WO2023077364A1 - 端面耦合器及光通信装置 - Google Patents
端面耦合器及光通信装置 Download PDFInfo
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- WO2023077364A1 WO2023077364A1 PCT/CN2021/128741 CN2021128741W WO2023077364A1 WO 2023077364 A1 WO2023077364 A1 WO 2023077364A1 CN 2021128741 W CN2021128741 W CN 2021128741W WO 2023077364 A1 WO2023077364 A1 WO 2023077364A1
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- 238000004891 communication Methods 0.000 title claims abstract description 19
- 238000005253 cladding Methods 0.000 claims abstract description 12
- 239000013307 optical fiber Substances 0.000 claims description 71
- 230000005693 optoelectronics Effects 0.000 claims description 18
- 230000008878 coupling Effects 0.000 abstract description 23
- 238000010168 coupling process Methods 0.000 abstract description 23
- 238000005859 coupling reaction Methods 0.000 abstract description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 51
- 229910052710 silicon Inorganic materials 0.000 description 51
- 239000010703 silicon Substances 0.000 description 51
- 238000004519 manufacturing process Methods 0.000 description 32
- 230000001902 propagating effect Effects 0.000 description 12
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
Definitions
- the present application relates to the field of optical communication, in particular to an end coupler and an optical communication device.
- optical communication devices based on silicon photonics technology, it mainly includes optoelectronic chips and optical fibers, and optical signals need to be transmitted between optoelectronic chips and optical fibers. Due to the large difference between the mode field diameter (mode field diameter, MFD) of the silicon waveguide of the optoelectronic chip and the mode field diameter of the optical fiber, the mode spot size of the two is greatly different. If the silicon waveguide and optical fiber are directly coupled to propagate optical signals, the coupling loss will be very large.
- MFD mode field diameter
- Embodiments of the present application provide an end face coupler and an optical communication device, so as to overcome the problem of large coupling loss in the related art.
- an end face coupler in a first aspect, includes an intermediate waveguide and a cladding layer, the intermediate waveguide is located in the cladding layer, and the cross section of the intermediate waveguide has a first direction and In a second direction, the first direction is the same as the length direction of the intermediate waveguide, and the second direction is perpendicular to the first direction.
- the intermediate waveguide includes a first layer body and a second layer body, the first layer body includes a first part and a second part, and the first part and the second part are sequentially connected along the first direction.
- the size of the first portion in the second direction is not larger than the size of the second portion in the second direction.
- the second part has two sides along the first direction, and the two sides are parallel to each other.
- the second layer is stacked on the first layer, and the orthographic projection of the second layer on the cross section of the first layer is located on the first layer of the first layer.
- the second layer is stacked on the second part and does not exceed the outer edge of the second part.
- the end of the second layer away from the first part is flush with the end of the second part away from the first part.
- the end face coupler is arranged between the silicon waveguide and the optical fiber such that an end of the first portion remote from the second portion is coupled to an end of the optical fiber. And, since the end of the second part away from the first part is flush with the end of the second layer away from the first part, the end of the second part away from the first part and the end of the first part are flush with each other. The ends of the second layer away from the first part can be respectively coupled with silicon waveguides.
- the optical signal output by the optical fiber is coupled into the end face coupler from the end of the first part away from the second part. Since the size of the end of the first part away from the second part is small, the mode spot size Larger, the mode field overlap integral with the optical signal output by the fiber is high.
- the optical signal As the optical signal propagates, the optical signal enters the second part from the first part, and since the size of the second part is larger than that of the first part, the size of the mode spot decreases accordingly. As the optical signal further propagates, the optical signal enters the part where the second part and the second layer are stacked together, and since this part increases the size of the second layer, the size of the mode spot is further reduced accordingly. In this way, when the optical signal is coupled to the silicon waveguide, the mode spot size matches the mode spot size of the silicon waveguide, reducing the loss of the optical signal when it is coupled between the optical fiber and the silicon waveguide.
- the first part has two ends in the first direction, the first end of the first part is an end far away from the second part, and the first end of the first part is The two ends are ends close to the second part.
- the size of the first portion in the second direction gradually increases from the first end of the first portion to the second end of the first portion. That is to say, the optical signal enters from the first end of the first part, and in the process of propagating to the second end of the first part, the size of the mode spot gradually increases until it reaches the second part.
- the spot size gradually decreases until it is output from the first end of the first part during the process of propagating to the first end of the first part. In this way, the reflection of the optical signal during propagation is also reduced. In addition, it can also reduce the difficulty of manufacturing the first layer, effectively improving the production yield.
- the size of the second part in the second direction is the same as the size of the second end of the first part in the second direction.
- the size of the first part in the second direction gradually increases from the first end of the first part to the second end of the first part, it can smoothly transition and connect with the second part , avoiding abrupt changes in dimensions between the first portion and the second portion.
- Such a design can make the difference of the mode field diameters of adjacent interfaces smaller, effectively reduce the reflection of the optical signal, and reduce the interference. In addition, it can also reduce the difficulty of manufacturing the first layer, effectively improving the production yield.
- the second layer body includes a third part and a fourth part, and the third part and the fourth part are sequentially connected along the first direction.
- a dimension of the third portion in the second direction is not greater than a dimension of the fourth portion in the second direction.
- the second layer is stacked on the second part, which can increase the mode field diameter of the part, so that the corresponding mode spot size can be reduced. Since the optical signal propagates along the first direction, the third part and the fourth part are also sequentially connected along the first direction, so the fourth part is The size above is designed to be larger than the size of the third part in the second direction, so that the mode field diameter of the superimposed part of the second layer and the first layer gradually increases, that is, the size of the mode spot gradually increases. increase. In this way, the difference between the mode field diameters of adjacent interfaces is small, which can effectively reduce the reflection of the optical signal and reduce the interference. In addition, it can also reduce the difficulty of manufacturing the first layer body and the second layer body, effectively improving the manufacturing yield.
- the third part has two ends in the first direction, the first end of the third part is an end far away from the fourth part, and the third part
- the second end of the section is the end adjacent to the fourth section.
- the size of the third portion in the second direction gradually increases from the first end of the third portion to the second end of the third portion. That is to say, the optical signal enters from the first end of the third part, and in the process of propagating to the second end of the third part, the size of the mode spot increases gradually until it propagates to the fourth part.
- the difference of the mode field diameters of adjacent interfaces is small, which can effectively reduce the reflection of the optical signal and reduce the interference. In addition, it can also reduce the difficulty of manufacturing the second layer, effectively improving the manufacturing yield.
- the size of the fourth part in the second direction is the same as the size of the second end of the third part in the second direction.
- the size of the third part in the second direction gradually increases from the first end of the third part to the second end of the third part, it can be smoothly connected with the fourth part Transition and connection avoid abrupt changes in size between the third part and the fourth part.
- Such a design can make the difference of the mode field diameters of adjacent interfaces smaller, effectively reduce the reflection of the optical signal, and reduce the interference. In addition, it can also reduce the difficulty of manufacturing the second layer, effectively improving the manufacturing yield.
- a dimension of the fourth portion in the second direction is the same as a dimension of the second portion in the second direction. Since the two sides of the second part extending along the first direction are parallel, and the orthographic projection of the second layer on the cross section of the first layer is located on the side of the first layer In the second part, the two side surfaces of the fourth part extending along the first direction are also parallel, and respectively flush with the two side surfaces of the second part extending along the first direction.
- Such a design can facilitate the control of the mode field diameters of the second part and the fourth part, reduce the manufacturing difficulty of the first layer body and the second layer body, and effectively improve the manufacturing yield.
- the first end of the third part is located at the junction of the first part and the second part. Due to the size of the first portion in the second direction, it gradually increases from the first end of the first portion to the second end of the first portion, and the second portion in the second direction remains unchanged, so designing the first end of the third part at the junction of the first part and the second part can better control the change of the mode field diameter of the intermediate waveguide, The manufacturing difficulty of the intermediate waveguide is reduced, and the manufacturing yield is effectively improved.
- the end face coupler further includes a side waveguide, and the side waveguide and the middle waveguide are spaced apart from each other and arranged in parallel.
- the first end of the side waveguide is flush with the end of the first part away from the second part, and the size of the side waveguide in the first direction is not larger than that of the middle waveguide in the The dimension in the first direction, ie the second end of the side waveguide does not exceed the middle waveguide in the first direction.
- the size of the side waveguide in the second direction is the same as the size of the end of the first part away from the second part in the second direction, that is, the side waveguide is in the second direction The dimensions in both directions remain the same.
- designing side waveguides beside the central optical fiber can improve the coupling efficiency between the optical fiber and the end-face coupler and reduce polarization sensitivity.
- the optical signal in the side waveguides can be coupled to the central waveguide through adiabatic coupling.
- the second end of the side waveguide is flush with the junction of the first part and the second part. Such a design can ensure that all optical signals propagating in the side waveguide can be coupled to the second part.
- the size of the side waveguide in the second direction is the same as the size of the end of the first part away from the second part in the second direction.
- Such a design can ensure that the coupling loss between the side waveguide and the optical fiber and the coupling loss between the intermediate waveguide and the optical fiber are the same.
- the manufacturing difficulty of the end face coupler is reduced, and the manufacturing yield is effectively improved.
- the end face coupler includes at least two side waveguides.
- the side waveguides of a part of the at least two side waveguides are located on one side of the intermediate waveguide, and the side waveguides of the other part of the at least two side waveguides are located on the side of the intermediate waveguide.
- the other side That is to say, the side waveguides are located on both sides of the intermediate waveguide, so that the end coupler can be better coupled with the optical fiber, which can improve the coupling efficiency between the optical fiber and the end coupler, and reduce polarization sensitivity. sex.
- the intermediate waveguide and the side waveguides are located in the same plane. Such a design can facilitate the fabrication of the intermediate waveguide and the side waveguides, and improves the fabrication efficiency of the end-face coupler.
- an optical communication device in a second aspect, includes an end coupler, an optical fiber, and an optoelectronic chip.
- the end face coupler is the end face coupler described in the first aspect, the end face coupler is located between the optical fiber and the optoelectronic chip, and the end face coupler is connected to the optical fiber and the optoelectronic chip respectively coupling.
- An end face coupler is arranged between the silicon waveguide and the optical fiber, so that the end of the first part away from the second part is coupled with one end of the optical fiber. And, since the end of the second part away from the first part is flush with the end of the second layer away from the first part, the end of the second part away from the first part and the end of the first part are flush with each other. The ends of the second layer away from the first part can be respectively coupled with silicon waveguides.
- the optical signal output by the optical fiber is coupled into the end face coupler from the end of the first part away from the second part. Since the size of the end of the first part away from the second part is small, the mode spot size Larger, the mode field overlap integral with the optical signal output by the fiber is high.
- the optical signal As the optical signal propagates, the optical signal enters the second part from the first part, and since the size of the second part is larger than that of the first part, the size of the mode spot decreases accordingly. As the optical signal further propagates, the optical signal enters the part where the second part and the second layer are stacked together, and since this part increases the size of the second layer, the size of the mode spot is further reduced accordingly. In this way, when the optical signal is coupled to the silicon waveguide, the mode spot size matches the mode spot size of the silicon waveguide, reducing the loss of the optical signal when it is coupled between the optical fiber and the silicon waveguide.
- the optical communication device provided by the embodiment of the present application is provided with an end-face coupler between the optical fiber and the silicon waveguide, the end-face coupler can be used to realize low-loss transmission of optical signals between the optical fiber and the silicon waveguide.
- FIG. 1 is a schematic structural diagram of an end face coupler provided in an embodiment of the present application
- Fig. 2 is a top view of the intermediate waveguide provided by the embodiment of the present application.
- Fig. 3 is a top view of the intermediate waveguide provided by the embodiment of the present application.
- FIG. 4 is a schematic structural diagram of an end face coupler provided in an embodiment of the present application.
- Fig. 5 is a top view of the middle waveguide and side waveguides provided by the embodiment of the present application.
- Fig. 6 is a dimension marking diagram of the end face coupler provided by the embodiment of the present application.
- Fig. 7 is a dimension marking diagram of the end face coupler provided by the embodiment of the present application.
- FIG. 8 is a schematic structural diagram of an optical communication device provided by an embodiment of the present application.
- 3000 optoelectronic chip
- 3100 silicon waveguide
- optical communication devices based on silicon photonics technology, such as silicon photonics optical modules, silicon photonics on-board light engines, and the like.
- Such optical communication devices mainly include optoelectronic chips and optical fibers for outputting optical signals. Due to the large difference between the mode field diameter (mode field diameter, MFD) of the silicon waveguide of the optoelectronic chip and the mode field diameter of the optical fiber, the mode spot size of the two is greatly different. If the silicon waveguide and optical fiber are directly coupled, the coupling loss is very large.
- MFD mode field diameter
- FIG. 1 is a schematic structural diagram of the end-face coupler.
- the dotted lines in FIG. 1 represent virtual separation lines between two adjacent parts, and are only used to distinguish two different parts, so as to facilitate understanding of the drawing, and these dotted lines do not have entities. And, the same goes for the rest of the drawings.
- the end-face coupler includes an intermediate waveguide 1 and a cladding 2 .
- the cross section of the intermediate waveguide 1 has a first direction a and a second direction b perpendicular to each other, the first direction a is the same as the length direction of the intermediate waveguide 1 , and the intermediate waveguide 1 is located in the cladding 2 .
- the intermediate waveguide 1 includes a first layer body 11 and a second layer body 12, the first layer body 11 includes a first part 111 and a second part 112 sequentially connected along the first direction a, the size of the first part 111 in the second direction b , not greater than the size of the second portion 112 in the second direction b, and the two sides of the second portion 112 extending along the first direction a are parallel.
- the second layer 12 is stacked on the first layer 11, and the orthographic projection of the second layer 12 on the cross section of the first layer 11 is located in the second part 112 of the first layer 11, and the second layer
- the end of the body 12 away from the first part 111 is flush with the end of the second part 112 away from the first part 111 .
- the above-described end face coupler is configured in an optical communication device such that the end face coupler is arranged between the silicon waveguide and the optical fiber.
- the end of the first part 111 far away from the second part 112 is coupled with one end of the optical fiber. Since the end of the second part 112 far away from the first part 111 is flush with the end of the second layer 12 far away from the first part 111, the second The end of the part 112 away from the first part 111 and the end of the second layer body 12 away from the first part 111 are respectively coupled to the silicon waveguide. In this way, the configuration of the end-face coupler between the silicon waveguide and the optical fiber is realized.
- the optical signal output by the optical fiber is coupled into the end face coupler from the end of the first part 111 away from the second part 112, because the end of the first part 111 far away from the second part 112 has a smaller Small, so the mode spot size is large, and the mode field overlap integral with the optical signal output by the fiber is high.
- the optical signal propagates, the optical signal enters the second portion 112 from the first portion 111 , and since the size of the second portion 112 is larger than that of the first portion 111 , the size of the mode spot decreases accordingly. With the further propagation of the optical signal, the optical signal enters the part where the second part 112 and the second layer body 12 are stacked together.
- the size of the mode spot is further reduced. Small. In this way, when the optical signal is coupled to the silicon waveguide, the mode spot size matches the mode spot size of the silicon waveguide, reducing the loss of the optical signal when it is coupled between the optical fiber and the silicon waveguide.
- the optical signal output by the silicon waveguide is coupled into the end face coupler by the end of the second part 112 away from the first part 111, and the end of the second layer body 12 away from the first part, Since the second part 112 and the second layer body 12 are stacked together, the size of the second part 112 is larger and the size of the mode spot is smaller, so that low-loss coupling with the silicon waveguide can be realized.
- the optical signal propagates, the optical signal enters the first part 111. Since the first part 111 is not stacked with the second layer 12, and the size of the first part 111 is smaller than the size of the second part 112, the size decreases accordingly, and the mold spot The size increases accordingly. In this way, when the optical signal is coupled to the optical fiber, the mode spot size matches the mode spot size of the optical fiber, reducing the loss of the optical signal when it is coupled between the silicon waveguide and the optical fiber.
- the reason why the end face coupler provided by the embodiment of the present application can reduce the loss of the optical signal when coupling between the optical fiber and the silicon waveguide is precisely because the size of the intermediate waveguide 1 in the second direction b, along the first There is a change in direction a.
- the first layer body 11 and the second layer body 12 of the intermediate waveguide 1 will be introduced respectively below.
- FIG. 2 is a top view of the intermediate waveguide 1 , and its viewing angle is that of FIG. 1 .
- the end of the first part 111 away from the second part 112 is the first end
- the end of the first part 111 close to the second part 112 is the second end.
- the size of the first portion 111 in the second direction b gradually increases from the first end of the first portion 111 to the second end of the first portion 111 .
- the first part 111 is approximately elongated and extends along the first direction a.
- the optical signal enters the first part 111 from the first end of the first part 111.
- the mode spot size gradually increases until it propagates to 112 of the second part.
- the spot size gradually decreases until it is output from the first end of the first part 111 during the process of propagating to the first end of the first part 111 .
- the reflection of the optical signal during propagation is also reduced.
- it can also reduce the difficulty of manufacturing the first layer body 11 and effectively improve the manufacturing yield.
- the first portion 111 has a first side 111a and a second side 111b opposite to each other, and the first side 111a and the second side 111b approximately extend along the first direction a and are located in the second direction b.
- both the first side 111a and the second side 111b are planes (see FIG. 2 ), and there is an angle between the first side 111a and the second side 111b.
- the cross section of the first part 111 is a trapezoid
- the upper base of the trapezoid is at the first end of the first part 111
- the lower base of the trapezoid is at the bottom of the first part 111. second end.
- the two waists of the trapezoid are located on the first side 111a and the second side 111b respectively.
- the cross section of the first part 111 is a triangle, one corner of the triangle is at the first end of the first part 111, the side opposite to the corner is at the second end of the first part 111, and the other two sides of the triangle are respectively at the first end of the first part 111.
- the cross section of the first portion 111 is an isosceles trapezoid.
- both the first side 111a and the second side 111b are curved surfaces (see FIG. 3 ), and the first side 111a and the second side 111b extend from the first end of the first part 111 to the second end. Smooth transition, so that the size of the first portion 111 in the second direction b gradually increases from the first end of the first portion 111 to the second end of the first portion 111 .
- first side 111a and the second side 111b can also have other shapes, as long as the size of the first part 111 in the second direction b is from the first end of the first part 111 to It is sufficient that the second end of the first portion 111 gradually increases.
- the size of the second part 112 in the second direction b is the same as the size of the second end of the first part 111 in the second direction b.
- the size of the first part 111 in the second direction b gradually increases from the first end of the first part 111 to the second end of the first part 111, it can smoothly transition to the second part 112 and connected to avoid abrupt size changes between the first part 111 and the second part 112 .
- Such a design can make the difference of the mode field diameters of adjacent interfaces smaller, effectively reduce the reflection of the optical signal, and reduce the interference. In addition, it can also reduce the difficulty of manufacturing the first layer body 11 and effectively improve the manufacturing yield.
- the first part 111 of the first layer body 11 has been introduced above, and the second part 112 of the first layer body 11 and the relationship between the second part 112 and the first part 111 will be introduced below.
- the second layer body 12 includes a third part 121 and a fourth part 122 sequentially connected along the first direction a, and the size of the third part 121 in the second direction b is not larger than The size of the fourth part 122 in the second direction b.
- the second layer 12 is stacked on the second part 112, which can increase the mode field diameter of this part, so that the corresponding mode spot size can be reduced. Since the optical signal propagates along the first direction a, the third part 121 and the fourth part 122 are also sequentially connected along the first direction a, so the dimension of the fourth part 122 in the second direction b is designed as Being larger than the size of the third portion 121 in the second direction b can make the mode field diameter of the overlapping portion of the second layer 12 and the first layer 11 gradually increase, that is, the mode spot size gradually increases. In this way, the difference between the mode field diameters of adjacent interfaces is small, which can effectively reduce the reflection of the optical signal and reduce the interference. In addition, it can also reduce the difficulty of manufacturing the first layer body 11 and the second layer body 12, effectively improving the manufacturing yield.
- the end of the third portion 121 away from the fourth portion 122 is the first end
- the end of the third portion 121 close to the fourth portion 122 is the second end.
- the size of the third portion 121 in the second direction b gradually increases from the first end of the third portion 121 to the second end of the third portion 121 .
- the third portion 121 is approximately elongated and extends along the first direction a.
- the optical signal enters from the first end of the third part 121, and in the process of propagating to the second end of the third part 121, the mode spot The size gradually increases until it propagates to the fourth portion 122 .
- the difference of the mode field diameters of adjacent interfaces is small, which can effectively reduce the reflection of the optical signal and reduce the interference.
- it can also reduce the difficulty of manufacturing the second layer body 12 and effectively improve the manufacturing yield.
- the third portion 121 has a third side 121a and a fourth side 121b opposite to each other, and the third side 121a and the fourth side 121b approximately extend along the first direction a and are located in the second direction b.
- both the third side 121a and the fourth side 121b are planes (see FIG. 2 ), and there is an included angle between the third side 121a and the fourth side 121b.
- the cross section of the third part 121 is trapezoidal, the upper base of the trapezoid is at the first end of the third part 121, and the lower base of the trapezoid is at the third end. The second end of portion 121. The two waists of the trapezoid are located on the third side 121a and the fourth side 121b respectively.
- the cross section of the third part 121 is a triangle, one corner of the triangle is at the first end of the third part 121, the side opposite to the corner is at the second end of the third part 121, and the other two sides of the triangle are They are located on the third side 121a and the fourth side 121b respectively.
- the cross section of the third part 121 is a right triangle, and the right angle of the right triangle is located at the second end of the third part 121 .
- the size of the fourth portion 122 in the second direction b is the same as the size of the second portion 112 in the second direction b.
- the first end of the third part 121 is located at the junction of the first part 111 and the second part 112 .
- the size of the first part 111 in the second direction b due to the size of the first part 111 in the second direction b, it gradually increases from the first end of the first part 111 to the second end of the first part 111, and the second part 112 is in the second direction b.
- the size of the third part 121 remains unchanged, so designing the first end of the third part 121 at the junction of the first part 111 and the second part 112 can better control the change of the mode field diameter of the intermediate waveguide 1 . That is to say, during the propagation process of the optical signal, the spot size in the first part 111 changes gradually. After entering the second part 112, if the second layer 12 is not considered, the spot size is Unchanging.
- designing the first end of the third part 121 at the junction of the first part 111 and the second part 112 can make the optical signal propagate to the second part 112, because the third part 121 is stacked on the second part 112 , and the size of the third part 121 changes gradually, so it is equivalent to increasing the overall size of the second part 112 and the third part 121, so that the size of the mold spot continues to change gradually.
- FIG. 4 is a schematic structural diagram of an end coupler. In order to better show the structure inside the cladding 2 , FIG. 4 omits the cladding 2 .
- the end face coupler further includes a side waveguide 3 .
- the side waveguide 3 and the middle waveguide 1 are spaced apart from each other and arranged in parallel, the first end of the side waveguide 3 is flush with the end of the first part 111 away from the second part 112, and the size of the side waveguide 3 in the first direction a is,
- the dimension of the side waveguide 3 in the second direction b is no greater than the dimension of the end of the first part 111 away from the second part 112 in the second direction b.
- the optical signal in the side waveguide 3 can be coupled to the central waveguide through adiabatic coupling, while Devices such as MMI (Multimode Interference, multimode interference coupler) are not needed.
- MMI Multimode Interference, multimode interference coupler
- FIG. 5 is a top view of the middle waveguide 1 and side waveguides 3 , and the viewing angle is the top view of FIG. 4 .
- the second end of the side waveguide 3 is flush with the junction of the first part 111 and the second part 112 .
- Such a design can ensure that all the optical signals propagating in the side waveguide 3 can be coupled to the second part 112 .
- the size of the side waveguide 3 in the second direction b is the same as the size of the end of the first part 111 away from the second part 112 in the second direction b.
- the coupling loss between the side waveguide 3 and the optical fiber and the coupling loss between the intermediate waveguide 1 and the optical fiber can be guaranteed to be the same. Moreover, the manufacturing difficulty of the end face coupler is reduced, and the manufacturing yield is effectively improved.
- the end-face coupler includes at least two side waveguides 3 .
- a part of the at least two side waveguides 3 is located on one side of the middle waveguide 1
- another part of the at least two side waveguides 3 is located on the other side of the middle waveguide 1 .
- the side waveguides 3 are located on both sides of the intermediate waveguide 1, so that the end coupler can be better coupled with the optical fiber, which can improve the coupling efficiency between the optical fiber and the end coupler, and reduce polarization sensitivity.
- the end face coupler includes two side waveguides 3, one of the two side waveguides 3 is located on one side of the intermediate waveguide 1, and the other of the two side waveguides 3 is located on one side of the intermediate waveguide 1 .
- the middle waveguide 1 and the side waveguides 3 are located in the same plane. Such a design can facilitate the manufacture of the middle waveguide 1 and the side waveguide 3, and improves the manufacturing efficiency of the end face coupler.
- Figure 6 and Figure 7 are the dimensions of the end coupler
- Figure 6 is the top view of the end coupler
- Figure 7 is the front view of the end coupler. It should be noted that the size ratio of each part in FIG. 6 and FIG. 7 is only for illustration, and is not limited to the size ratio of each part.
- the dimensions of each part of the end coupler are as follows.
- the cladding 2 has a thickness of 4 ⁇ m, the distance between the centerline of the intermediate waveguide 1 and the centerline of the adjacent side waveguides 3 is 1.075 ⁇ m, and the first part 111
- the end face size of the first end is 150nm*150nm
- the end face size of the corresponding side waveguide 3 is also 150nm*150nm
- the length of the first part 111 in the first direction a is 100 ⁇ m
- the second end of the first part 111 is in the second
- the dimension on the direction b is 380nm
- the thickness of the second layer body 12 is 70nm
- the length of the third part 121 in the first direction a is 10 ⁇ m
- the dimension of the second end of the third part 121 in the second direction b is 380nm.
- each part of the above-mentioned end face coupler is taken as examples. In other embodiments, the size of each part of the end face coupler can be adjusted according to actual needs, which is not limited in this application.
- the mode field overlap integral of the TE (Transverse Electric) mode field of the end coupler and the 3 ⁇ m diameter Gaussian spot (produced by the optical fiber) is 89.9%, considering the refractive index difference between the end coupler and the fiber end face and the mode spot conversion structure, the overall coupling efficiency from the fiber to the silicon waveguide is 83.9%.
- the mode field overlap integral of the TM (Transverse Magnetic) mode field of the end coupler and the 3 ⁇ m diameter Gaussian spot (produced by the optical fiber) is 92.8%, considering the refractive index difference between the end coupler and the fiber end face and the mode spot conversion structure, the overall coupling efficiency from the fiber to the silicon waveguide is 86.3%.
- FIG. 8 is a schematic structural diagram of an optical communication device provided by an embodiment of the present application.
- the end face coupler 1000 is the above end face coupler 1000, the end face coupler 1000 is located between the optical fiber 2000 and the optoelectronic chip 3000, and the end face coupler 1000 is coupled with the optical fiber 2000 and the optoelectronic chip 3000 respectively.
- An end face coupler 1000 is arranged between the optoelectronic chip 3000 and the optical fiber 2000, and the end of the first part 111 away from the second part 112 is coupled with an end of the optical fiber 2000, because the second part 112 is far away from the end of the first part 111 and the first part
- the end of the second layer 12 away from the first part 111 is flush, so the end of the second part 112 away from the first part 111 and the end of the second layer 12 away from the first part 111 are respectively coupled with the silicon waveguide 3100 of the optoelectronic chip 3000 .
- the arrangement of the end face coupler 1000 between the optoelectronic chip 3000 and the optical fiber 2000 is realized, so that the end face coupler 1000 is coupled with the optoelectronic chip 3000 and the optical fiber 2000 respectively.
- the optical signal output by the optical fiber 2000 is coupled into the end face coupler 1000 from the end of the first part 111 far away from the second part 112, because the first part 111 is far away from the end of the second part 112
- the size of the end portion is small, so the size of the mode spot is relatively large, and it can be integrated with the mode field of the optical signal output by the optical fiber 2000 to be high.
- the optical signal propagates, the optical signal enters the second portion 112 from the first portion 111 , and since the size of the second portion 112 is larger than that of the first portion 111 , the size of the mode spot decreases accordingly.
- the optical signal With the further propagation of the optical signal, the optical signal enters the part where the second part 112 and the second layer body 12 are stacked together. Since this part increases the size of the second layer body 12, the size of the mode spot is further reduced. Small. In this way, when the optical signal is coupled to the silicon waveguide 3100 , the mode spot size matches the mode spot size of the silicon waveguide 3100 , reducing the loss of the optical signal when coupling between the optical fiber 2000 and the silicon waveguide 3100 .
- the optical signal output by the silicon waveguide 3100 is coupled into the end-face coupling by the end of the second part 112 away from the first part 111, and the end of the second layer body 12 away from the first part.
- the size is larger and the mode spot size is smaller, which can realize low-loss coupling with the silicon waveguide 3100 .
- the optical signal enters the first part 111.
- the size of the first part 111 is not stacked with the second layer 12, and the size of the first part 111 is smaller than the size of the second part 112, the size decreases accordingly, and the mold spot The size increases accordingly.
- the mode spot size matches the mode spot size of the optical fiber 2000 , reducing the loss of the optical signal when coupling between the silicon waveguide 3100 and the optical fiber 2000 .
- the optical communication device provided by the embodiment of the present application is provided with the end face coupler 1000 between the optical fiber 2000 and the optoelectronic chip 3000, the end face coupler 1000 can be used to realize the transmission of optical signals between the optical fiber 2000 and the silicon waveguide 3100. low-loss transmission between them.
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Abstract
Description
Claims (14)
- 一种端面耦合器,其特征在于,包括中间波导(1)和包层(2);在所述中间波导(1)的横截面上具有相互垂直的第一方向和第二方向,所述第一方向与所述中间波导(1)的长度方向相同;所述中间波导(1)位于所述包层(2)内,所述中间波导(1)包括第一层体(11)和第二层体(12);所述第一层体(11)包括沿所述第一方向依次连接的第一部分(111)和第二部分(112),所述第一部分(111)在所述第二方向上的尺寸,不大于所述第二部分(112)在所述第二方向上的尺寸,所述第二部分(112)沿所述第一方向延伸的两侧面平行;所述第二层体(12)叠设在所述第一层体(11),且所述第二层体(12)在所述第一层体(11)的横截面上的正投影,位于所述第一层体(11)的所述第二部分内,所述第二层体(12)远离所述第一部分(111)的端部与所述第二部分(112)远离所述第一部分(111)的端部平齐。
- 根据权利要求1所述的端面耦合器,其特征在于,所述第一部分(111)远离所述第二部分(112)的端部为第一端,所述第一部分(111)靠近所述第二部分(112)的端部为第二端;所述第一部分(111)在所述第二方向上的尺寸,由所述第一部分(111)的第一端至所述第一部分(111)的第二端逐渐增大。
- 根据权利要求2所述的端面耦合器,其特征在于,所述第二部分(112)在所述第二方向上的尺寸,与所述第一部分(111)的第二端在所述第二方向上的尺寸相同。
- 根据权利要求2或3所述的端面耦合器,其特征在于,所述第二层体(12)包括沿所述第一方向依次连接的第三部分(121)和第四部分(122);所述第三部分(121)在所述第二方向上的尺寸,不大于所述第四部分(122)在所述第二方向上的尺寸。
- 根据权利要求4所述的端面耦合器,其特征在于,所述第三部分(121)远离所述第四部分(122)的端部为第一端,所述第三部分(121)靠近所述第四部分(122)的端部为第二端;所述第三部分(121)在所述第二方向上的尺寸,由所述第三部分(121)的第一端至所述第三部分(121)的第二端逐渐增大。
- 根据权利要求5所述的端面耦合器,其特征在于,所述第四部分(122)在所述第二方向上的尺寸,与所述第三部分(121)的第二端在所述第二方向上的尺寸相同。
- 根据权利要求5或6所述的端面耦合器,其特征在于,所述第四部分(122)在所述第二方向上的尺寸,与所述第二部分(112)在所述第二方向上的尺寸相同。
- 根据权利要求5-7任一项所述的端面耦合器,其特征在于,所述第三部分(121)的第一端位于所述第一部分(111)和所述第二部分(112)的连接处。
- 根据权利要求1-8任一项所述的端面耦合器,其特征在于,所述端面耦合器还包括旁侧波导(3);所述旁侧波导(3)与所述中间波导(1)相互间隔且平行布置,所述旁侧波导(3)的第一端与所述第一部分(111)远离所述第二部分(112)的端部平齐,所述旁侧波导(3)在所述第一方向上的尺寸,不大于所述中间波导(1)在所述第一方向上的尺寸,所述旁侧波导(3)在所述第二方向上的尺寸,不大于所述第一部分(111)远离所述第二部分(112)的端部在所述第二方向上的尺寸。
- 根据权利要求9所述的端面耦合器,其特征在于,所述旁侧波导(3)的第二端与所述第一部分(111)和所述第二部分(112)的连接处平齐。
- 根据权利要求9或10所述的端面耦合器,其特征在于,所述旁侧波导(3)在所述第二方向上的尺寸,与所述第一部分(111)远离所述第二部分(112)的端部在所述第二方向上的尺寸相同。
- 根据权利要求9-11任一项所述的端面耦合器,其特征在于,包括至少两个所述旁侧波导(3);至少两个所述旁侧波导(3)中的一部分的所述旁侧波导(3)位于所述中间波导(1)的一侧,至少两个所述旁侧波导(3)中的另一部分的所述旁侧波导(3)位于所述中间波导(1)的另一侧。
- 根据权利要求9-12任一项所述的端面耦合器,其特征在于,所述中间波导(1)和所述旁侧波导(3)位于同一平面内。
- 一种光通信装置,其特征在于,包括端面耦合器(1000)、光纤(2000)和光电芯片(3000);所述端面耦合器(1000)为权利要求1-13任一项所述的端面耦合器(1000),所述端面耦合器(1000)位于所述光纤(2000)和所述光电芯片(3000)之间,且所述端面耦合器(1000)分别与所述光纤(2000)和所述光电芯片(3000)相耦合。
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CN109324372A (zh) * | 2018-11-09 | 2019-02-12 | 昆明理工大学 | 一种硅光波导端面耦合器 |
CN112255727A (zh) * | 2020-10-30 | 2021-01-22 | 联合微电子中心有限责任公司 | 端面耦合器和半导体器件 |
WO2021175082A1 (zh) * | 2020-03-02 | 2021-09-10 | 苏州旭创科技有限公司 | 一种模斑变换器及硅光集成芯片 |
CN113552669A (zh) * | 2021-08-27 | 2021-10-26 | 东莞铭普光磁股份有限公司 | 一种端面耦合器及其制备方法 |
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CN109324372A (zh) * | 2018-11-09 | 2019-02-12 | 昆明理工大学 | 一种硅光波导端面耦合器 |
WO2021175082A1 (zh) * | 2020-03-02 | 2021-09-10 | 苏州旭创科技有限公司 | 一种模斑变换器及硅光集成芯片 |
CN112255727A (zh) * | 2020-10-30 | 2021-01-22 | 联合微电子中心有限责任公司 | 端面耦合器和半导体器件 |
CN113552669A (zh) * | 2021-08-27 | 2021-10-26 | 东莞铭普光磁股份有限公司 | 一种端面耦合器及其制备方法 |
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