WO2023065992A1

WO2023065992A1 - Capacitive force sensor, and measurement method for detecting external force borne by device

Info

Publication number: WO2023065992A1
Application number: PCT/CN2022/121863
Authority: WO
Inventors: 张冬冬; 陈莎莎
Original assignee: 华为技术有限公司
Priority date: 2021-10-22
Filing date: 2022-09-27
Publication date: 2023-04-27
Also published as: CN116007821A

Abstract

A capacitive force sensor and a measurement method for detecting the external force borne by a device by using a capacitive force sensor. The capacitive force sensor comprises: a first electrode plate (20) and a second electrode plate (30) opposite to one another, one among the first electrode plate (20) and second electrode plate (30) being fixedly connected to an elastic body (40), and the elastic body (40) driving the electrode plate fixedly connected thereto to translate and rotate relative to the other electrode plate; and a plurality of first electrodes (21) and a plurality of second electrodes (22) are alternately arranged on the first electrode plate (20), and a plurality of third electrodes (31) for forming a capacitor with the plurality of first electrodes (21) and plurality of second electrodes (22) are provided on the second electrode plate (30). The capacitor is not only an area-varying type capacitor, but is also a distance-varying type capacitor, and a plurality of variable capacitors connected in parallel are provided, so that the area change amount is increased, increasing sensitivity.

Description

电容式力传感器、检测设备所承受外力的测量方法Capacitive force sensor, measuring method for external force borne by detection equipment

本申请要求于2021年10月22日提交国家知识产权局、申请号为202111235896.8、发明名称为“电容式力传感器、检测设备所承受外力的测量方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application submitted to the State Intellectual Property Office on October 22, 2021, with the application number 202111235896.8, and the title of the invention is "Capacitive force sensor, method for measuring external force on detection equipment", the entire content of which Incorporated in this application by reference.

技术领域technical field

本申请实施例涉及力传感器技术领域，尤其涉及一种基于电容变化的、多维力的电容式力传感器，以及采用电容式力传感器检测设备所承受外力的测量方法。The embodiments of the present application relate to the technical field of force sensors, and in particular to a capacitive force sensor based on capacitance change and multi-dimensional force, and a measurement method for detecting an external force borne by a device using a capacitive force sensor.

背景技术Background technique

多维力传感器能够实现空间力和力矩的测量，被广泛应用在机器人、航空航天、机械加工、汽车制造以及多自由度精密组装等领域中。其中，基于电容变化的多维力传感器因为同时兼顾不易受温度影响、精度和分辨率高、属于非接触测量等特点，从而被广泛采用。The multi-dimensional force sensor can realize the measurement of space force and torque, and is widely used in the fields of robotics, aerospace, machining, automobile manufacturing, and multi-degree-of-freedom precision assembly. Among them, multi-dimensional force sensors based on capacitance changes are widely used because they are not easily affected by temperature, have high precision and resolution, and are non-contact measurements.

基于电容变化的多维力传感器一般有三种方式，分别为面积变化型、间距变化型和介电常数变化型。目前，常采用的是基于面积变化以及间距变化原理而制得的多维力传感器。There are generally three types of multidimensional force sensors based on capacitance changes, namely area change type, spacing change type and dielectric constant change type. At present, multi-dimensional force sensors based on the principle of area change and pitch change are often used.

图1示出了电容式多维力传感器的原理结构图，具体的工作原理包括：当有外力作用在该电容式多维力传感器时，弹性体03的形变带动动电极板02产生位移，该位移引起定电极板01和动电极板02之间的有效面积S和间距d中的至少一个参数发生变化，当有效面积S和间距d中的至少一个参数发生变化时，会引起电容变化，通过测量电容变化量来表征该多维力传感器所承受外力的大小。Figure 1 shows the principle structure diagram of the capacitive multi-dimensional force sensor. The specific working principle includes: when an external force acts on the capacitive multi-dimensional force sensor, the deformation of the elastic body 03 drives the displacement of the moving electrode plate 02, and the displacement causes At least one parameter of the effective area S and the spacing d between the fixed electrode plate 01 and the moving electrode plate 02 changes. When at least one parameter of the effective area S and the spacing d changes, it will cause a change in capacitance. By measuring the capacitance The amount of change is used to characterize the magnitude of the external force the multi-dimensional force sensor bears.

在一些情况下，多维力传感器受到外力作用引起弹性体03的形变位移量比较小，因此可能会产生至少以下现象：1)有效面积S变化微小，电容量变化非常小，使得该多维力传感器灵敏度较低；2)动电极板02和定电极板01之间的初始间距较大时，间距d变化微小，电容量变化微小，传感器灵敏度也较低。In some cases, the deformation and displacement of the elastic body 03 caused by the external force of the multidimensional force sensor is relatively small, so at least the following phenomena may occur: 1) The effective area S changes slightly, and the capacitance change is very small, making the multidimensional force sensor sensitive 2) When the initial distance between the movable electrode plate 02 and the fixed electrode plate 01 is large, the distance d changes slightly, the capacitance changes slightly, and the sensor sensitivity is also low.

为了提升该多维力传感器的灵敏度，可以通过增大定电极板01和动电极板02之间的有效面积来提升微小位移情况下的面积变化，这将导致该多维力传感器的整体体积增大；或者，还可以通过减小定电极板01和动电极板02之间的初始间距(例如，初始间距减小到100～200μm)来提升微小间距变化情况下的电容变化，但是，这可能引起该传感器加工和安装难度增大，给制造工艺提出挑战。In order to improve the sensitivity of the multidimensional force sensor, the area change in the case of small displacement can be improved by increasing the effective area between the fixed electrode plate 01 and the moving electrode plate 02, which will lead to an increase in the overall volume of the multidimensional force sensor; Alternatively, it is also possible to reduce the initial spacing between the fixed electrode plate 01 and the moving electrode plate 02 (for example, the initial spacing is reduced to 100-200 μm) to improve the capacitance change under the condition of a small spacing change, but this may cause the The difficulty of sensor processing and installation increases, which poses challenges to the manufacturing process.

基于上述多维力传感器存在的技术问题，需要提出一种可提升测量灵敏度，以提升使用性能的多维力传感器。Based on the above-mentioned technical problems of the multi-dimensional force sensor, it is necessary to propose a multi-dimensional force sensor that can improve measurement sensitivity and performance.

发明内容Contents of the invention

本申请提供一种电容式力传感器，以及利用电容式力传感器检测设备所承受外力的测量方法。主要目的是为了在不增加传感器体积、不提升工艺难度的前提下，提供一种可提升测量灵敏度的、多维力的电容式力传感器。The present application provides a capacitive force sensor and a measurement method for detecting an external force borne by a device by using the capacitive force sensor. The main purpose is to provide a multi-dimensional capacitive force sensor that can improve measurement sensitivity without increasing the volume of the sensor or increasing the difficulty of the process.

为达到上述目的，本申请的实施例采用如下技术方案：In order to achieve the above object, the embodiments of the present application adopt the following technical solutions:

第一方面，本申请提供了一种电容式力传感器，该电容式力传感器可以被应用在机器人、航空航天、机械加工、汽车制造等设备中，用于测量这些设备所受的空间外力大小。In a first aspect, the present application provides a capacitive force sensor, which can be applied in equipment such as robots, aerospace, machining, and automobile manufacturing, and used to measure the magnitude of external force in space that these equipment are subjected to.

该电容式力传感器包括第一电极板、第二电极板、弹性体和至少一个电极组；第二电极板与第一电极板相对设置，且第一电极板和第二电极板之间具有间距，第一电极板和第二电极板中的其中一个为定电极板，另一个为动电极板，弹性体与动电极板固定连接，弹性体能够带动动电极板相对定电极板沿平行定电极板的方向和垂直定电极板的方向移动，以及能够带动动电极板相对定电极板沿平行定电极板的轴线和垂直定电极板的轴线转动，也就是说，第一电极板和第二电极板中的其中一个能够相对另一个运动；另外，任一电极组包括：多个相互电连接的第一电极、多个相互电连接的第二电极和多个相互电连接的第三电极，多个第一电极和多个第二电极均设置在第一电极板的相对第二电极板的面上，且多个第一电极和多个第二电极依次交替排布，多个第三电极设置在第二电极板的相对第一电极板的面上，且第一电极、第三电极和第二电极错位设置，任一第三电极与其相邻的第一电极和第二电极形成耦合结构，并且任一第一电极或者任一第二电极属于一个独立的耦合结构，动电极板相对定电极板运动时，多个第一电极和多个第三电极形成第一电容器，多个第二电极和多个第三电极形成第二电容器。The capacitive force sensor includes a first electrode plate, a second electrode plate, an elastic body and at least one electrode group; the second electrode plate is arranged opposite to the first electrode plate, and there is a distance between the first electrode plate and the second electrode plate , one of the first electrode plate and the second electrode plate is a fixed electrode plate, and the other is a moving electrode plate. The direction of the plate and the direction perpendicular to the fixed electrode plate move, and can drive the moving electrode plate to rotate relative to the fixed electrode plate along the axis parallel to the fixed electrode plate and the axis perpendicular to the fixed electrode plate, that is, the first electrode plate and the second electrode plate One of the plates can move relative to the other; in addition, any electrode group includes: a plurality of first electrodes electrically connected to each other, a plurality of second electrodes electrically connected to each other, and a plurality of third electrodes electrically connected to each other, and the plurality of electrodes are electrically connected to each other. A first electrode and a plurality of second electrodes are arranged on the surface of the first electrode plate opposite to the second electrode plate, and the plurality of first electrodes and the plurality of second electrodes are arranged alternately in sequence, and the plurality of third electrodes are arranged On the surface of the second electrode plate opposite to the first electrode plate, and the first electrode, the third electrode and the second electrode are arranged in dislocation, any third electrode forms a coupling structure with its adjacent first electrode and second electrode, And any first electrode or any second electrode belongs to an independent coupling structure. When the movable electrode plate moves relative to the fixed electrode plate, a plurality of first electrodes and a plurality of third electrodes form a first capacitor, and a plurality of second electrodes and the plurality of third electrodes form a second capacitor.

基于上述对本申请给出的电容式力传感器结构的描述，可以看出，该电容式力传感器是一种容栅式的栅状结构。并且，动电极板在弹性体的带动下，可以相对定电极板不仅能够沿平行定电极板的方向和垂直定电极板的方向移动，还能够沿平行定电极板的轴线和垂直定电极板的轴线转动。也就是，该力传感器不仅属于面积变化型传感器，还属于间距变化型传感器。Based on the above description of the structure of the capacitive force sensor given in this application, it can be seen that the capacitive force sensor is a capacitive grid structure. Moreover, driven by the elastic body, the movable electrode plate can move relative to the fixed electrode plate not only along the direction parallel to the fixed electrode plate and the direction perpendicular to the fixed electrode plate, but also along the axis parallel to the fixed electrode plate and perpendicular to the fixed electrode plate. Axis rotation. That is, the force sensor is not only an area variable sensor but also a pitch variable sensor.

该力传感器在微小的位移下，属于面积变化型的此传感器的电容变化会明显的高于现有技术的普通平板状传感器结构的电容变化。具体的，比如，当动电极板相对定电极板沿平行于定电极板的方向移动ΔX时，在现有技术中，面积变化为H×ΔX(H为动电极板的与动电极板移动方向相垂直方向的尺寸)，然而，在本申请中，由于位于第一电极板上的第一电极和第二电极均具有多个，位于第二电极板上的第三电极也具有多个，如此的话，当动电极板相对定电极板沿平行于定电极板的方向移动ΔX时，本申请的面积变化为N×H×ΔX(N示为第一电极、第二电极、第三电极个数较小的数量)，从而，由N×H×ΔX相比H×ΔX，可以看出，本申请可以明显的增加面积变化，进而，会明显的提升电容变化，最终会有效的提升灵敏度。Under a small displacement of the force sensor, the capacitance change of the area change type sensor is significantly higher than the capacitance change of the common flat plate sensor structure in the prior art. Specifically, for example, when the moving electrode plate moves ΔX in a direction parallel to the fixed electrode plate relative to the fixed electrode plate, in the prior art, the area change is H×ΔX (H is the moving direction of the moving electrode plate and the moving electrode plate Dimensions in the perpendicular direction), however, in the present application, since there are multiple first electrodes and second electrodes on the first electrode plate, there are also multiple third electrodes on the second electrode plate, so Then, when the movable electrode plate moves ΔX relative to the fixed electrode plate along the direction parallel to the fixed electrode plate, the area change of the application is N×H×ΔX (N is shown as the number of the first electrode, the second electrode, and the third electrode Smaller quantity), thus, from N×H×ΔX compared with H×ΔX, it can be seen that the present application can significantly increase the area change, and further, the capacitance change will be significantly improved, and finally the sensitivity will be effectively improved.

除此之外，在本申请中，是通过在第一电极板和第二电极板上相对应的设置多个第一电极、多个第二电极和多个第三电极，以使得多个第一电极和多个第三电极形成第一电容器，多个第二电极和多个第三电极形成第二电容器的方式，来提升面积变化量，从而提升电容变化量。可以这样理解，可以将现有技术的一个尺寸较大的电极分割成多个电极，这样的话，在增加面积变化量、提升电容变化量的基础上，并未增加整个传感器的尺寸；另外，也并未缩小两个电极板之间的间距来提升灵敏度。所以说，本申请给出的电容式力传感器在不增大传感器体积、提升工艺难度的基础上，就可以提升测量灵敏度。In addition, in this application, a plurality of first electrodes, a plurality of second electrodes and a plurality of third electrodes are correspondingly arranged on the first electrode plate and the second electrode plate, so that the plurality of first electrodes One electrode and multiple third electrodes form a first capacitor, and multiple second electrodes and multiple third electrodes form a second capacitor to increase the amount of area change, thereby increasing the amount of capacitance change. It can be understood that an electrode with a large size in the prior art can be divided into multiple electrodes. In this way, the size of the entire sensor is not increased on the basis of increasing the area change and improving the capacitance change; The distance between the two electrode plates was not reduced to improve the sensitivity. Therefore, the capacitive force sensor provided in this application can improve the measurement sensitivity without increasing the volume of the sensor and increasing the difficulty of the process.

在第一方面可能的实现方式中，沿多个第一电极和多个第二电极的排布方向，任一第一电极和任一第二电极的宽度均为W1，每相邻的第一电极和第二电极的宽度为W2，且任一第三电极的宽度为W，每相邻两个第三电极之间的宽度为W，其中，W＝W1+W2。In a possible implementation of the first aspect, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the width of any first electrode and any second electrode is W1, and each adjacent first electrode The width of the electrode and the second electrode is W2, the width of any third electrode is W, and the width between every two adjacent third electrodes is W, wherein W=W1+W2.

当第一电极、第二电极和第三电极满足上述尺寸限定时，第一电容器的电容值和第二电容器的电容值呈线性变化，这样，就可以简化模型复杂度和降低解算难度。When the first electrode, the second electrode, and the third electrode meet the above-mentioned size constraints, the capacitance value of the first capacitor and the capacitance value of the second capacitor change linearly, thus simplifying the complexity of the model and reducing the difficulty of solution.

上述实现方式中的宽度尺寸可以是线性宽度尺寸，也可能是角度宽度尺寸。The width dimension in the above implementation manner may be a linear width dimension, or may be an angular width dimension.

在第一方面可能的实现方式中，至少一个电极组包括第一电极组；在第一电极组中，多个第一电极和多个第二电极沿平行于第一电极板的第一方向呈直线形排布，多个第三电极的排布方向，与多个第一电极和多个第二电极的排布方向一致。也就是说，多个第三电极也沿第一方向呈直线形排布。In a possible implementation manner of the first aspect, at least one electrode group includes a first electrode group; in the first electrode group, a plurality of first electrodes and a plurality of second electrodes are formed along a first direction parallel to the first electrode plate. Arranged in a straight line, the arrangement direction of the plurality of third electrodes is consistent with the arrangement direction of the plurality of first electrodes and the plurality of second electrodes. That is to say, the plurality of third electrodes are also linearly arranged along the first direction.

若将第一电极组中的多个第一电极和多个第二电极沿第一方向呈直线形排布的话，可以利用形成的第一电容器和第二电容器测量该传感器在X方向的力Fx，其中这里的X方向是平行于第一方向的方向，或者，在设置多组沿第一方向的电极组时，还可以测得绕Y方向的My、以及沿Z方向的力Fz，这里的Y方向和Z方向均是与X方向垂直的方向。If a plurality of first electrodes and a plurality of second electrodes in the first electrode group are arranged linearly along the first direction, the force Fx of the sensor in the X direction can be measured by using the formed first capacitor and the second capacitor , wherein the X direction here is a direction parallel to the first direction, or, when setting multiple sets of electrode groups along the first direction, My around the Y direction and the force Fz along the Z direction can also be measured, where Both the Y direction and the Z direction are directions perpendicular to the X direction.

在第一方面可能的实现方式中，至少一个电极组包括第一电极组；在第一电极组中，多个第一电极和多个第二电极沿第一电极板的周向呈弧形排布，多个第三电极的排布方向，与多个第一电极和多个第二电极的排布方向一致。In a possible implementation manner of the first aspect, at least one electrode group includes a first electrode group; in the first electrode group, a plurality of first electrodes and a plurality of second electrodes are arranged in an arc along the circumferential direction of the first electrode plate The arrangement direction of the plurality of third electrodes is consistent with the arrangement direction of the plurality of first electrodes and the plurality of second electrodes.

若将第一电极组中的多个第一电极和多个第二电极沿第一电极板的周向呈弧形排布的话，可以利用形成第一电容器和第二电容器测量该传感器沿Z方向的力Fz。进一步的，当设置弧形排布的多组电极组时，还可以进一步的测量绕Z方向轴的扭矩Mz，同时也可测量Mx和My。其中，这里的Z方向是与第一电极板相垂直的方向，X方向和Y方向均是与第一电极板相平行的方向，且X方向和Y方向相垂直。If a plurality of first electrodes and a plurality of second electrodes in the first electrode group are arranged in an arc along the circumferential direction of the first electrode plate, the sensor can be measured along the Z direction by forming a first capacitor and a second capacitor. The force Fz. Further, when multiple sets of electrode groups arranged in an arc are provided, the torque Mz around the axis in the Z direction can be further measured, and Mx and My can also be measured at the same time. Wherein, the Z direction here is a direction perpendicular to the first electrode plate, the X direction and the Y direction are both directions parallel to the first electrode plate, and the X direction and the Y direction are perpendicular to each other.

在第一方面可能的实现方式中，第一电极和第二电极在第二电极板上的正投影，在与多个第一电极和多个第二电极排布方向相垂直的方向上覆盖第三电极。In a possible implementation of the first aspect, the orthographic projection of the first electrode and the second electrode on the second electrode plate covers the first electrode in a direction perpendicular to the arrangement direction of the multiple first electrodes and the multiple second electrodes. Three electrodes.

也就是说，沿与多个第一电极和多个第二电极排布方向相垂直的方向上，第一电极和第二电极的尺寸大于第三电极的尺寸，这样的话，当第一电极板相对第二电极板沿第一方向运动时，即使在第二方向(就是与多个第一电极和多个第二电极排布方向相垂直的方向)上也具有较小的位移量，也不会因为在第二方向的较小位移量导致第一电极板和第二电极板之间的有效面积的变化量可变，因此，这样设计可以保障测量的准确性。That is to say, along the direction perpendicular to the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the dimensions of the first electrodes and the second electrodes are larger than the dimensions of the third electrodes. In this case, when the first electrode plate When moving relative to the second electrode plate along the first direction, even in the second direction (that is, the direction perpendicular to the arrangement direction of the plurality of first electrodes and the plurality of second electrodes), there is a relatively small amount of displacement. Because of the small displacement in the second direction, the effective area between the first electrode plate and the second electrode plate will vary, so this design can ensure the accuracy of measurement.

在第一方面可能的实现方式中，第三电极在第一电极板上的正投影，在与多个第一电极和多个第二电极排布方向相垂直的方向上覆盖第一电极和第二电极。In a possible implementation manner of the first aspect, the orthographic projection of the third electrode on the first electrode plate covers the first electrode and the second electrode in a direction perpendicular to the arrangement direction of the plurality of first electrodes and the plurality of second electrodes. two electrodes.

可以这样理解，沿与多个第一电极和多个第二电极排布方向相垂直的方向上，第一电极的尺寸和第三电极的尺寸可以不相等，以及，第二电极的尺寸与第三电极的尺寸不相等。It can be understood that, along the direction perpendicular to the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the size of the first electrode and the size of the third electrode may not be equal, and the size of the second electrode is the same as that of the first electrode The three electrodes are not equal in size.

在第一方面可能的实现方式中，至少一个电极组还包括第二电极组；第一电极组中的多个第一电极和多个第二电极，与第二电极组中的多个第一电极和多个第二电极，设置在第一电极板的中心的两侧；在第二电极组中，沿多个第一电极和多个第二电极的排布方向，任一第一电极和任一第二电极的宽度均为W1，每相邻的第一电极和第二电极的宽度为W2，且任一第三电极的宽度为W，每相邻两个第三电极之间的宽度为W，其中，W＝W1+W2。In a possible implementation manner of the first aspect, at least one electrode group further includes a second electrode group; a plurality of first electrodes and a plurality of second electrodes in the first electrode group, and a plurality of first electrodes in the second electrode group An electrode and a plurality of second electrodes are arranged on both sides of the center of the first electrode plate; in the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, any first electrode and The width of any second electrode is W1, the width of every adjacent first electrode and second electrode is W2, and the width of any third electrode is W, and the width between every two adjacent third electrodes is W, where W=W1+W2.

也就是说，该传感器除设置第一电极组之外，还设置第二电极组，由于第一电极组和第二电极组相对设置在第一电极板和第二电极板的中心的两侧，这样的话，可以进一步的增加面积变化，进一步提升电容变化量，从而可以进一步的提升灵敏度。That is to say, in addition to the first electrode group, the sensor is also provided with the second electrode group. Since the first electrode group and the second electrode group are relatively arranged on both sides of the center of the first electrode plate and the second electrode plate, In this way, the area change can be further increased, and the capacitance change can be further increased, so that the sensitivity can be further improved.

同样的，在上述的第二电极组中，宽度可以是线性宽度，或者可以是角度宽度。Likewise, in the above-mentioned second electrode group, the width may be a linear width, or may be an angular width.

在第一方面可能的实现方式中，在第一电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极的中心线重合；在第二电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极的中心线重合；其中，第一电极的中心线为第一电极的沿多个第一电极和多个第二电极的排布方向的中心线。In a possible implementation manner of the first aspect, in the first electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite first sides and second sides, The orthographic projection of the first side on the first electrode plate coincides with the center line of the first electrode; in the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes Opposite the first side and the second side, the orthographic projection of the first side on the first electrode plate coincides with the center line of the first electrode; wherein, the center line of the first electrode is a plurality of edges of the first electrode The center line of the arrangement direction of the first electrode and the plurality of second electrodes.

可以这样理解本申请给出的第一电极、第二电极和第三电极的布设方式，沿多个第一电极和多个第二电极的排布方向，第一电极具有中心线，第二电极也具有中心线，并且，第三电极的相对的两侧边分别与第一电极的中心线和第二电极的中心线相重合。也就是说，在任一耦合结构中，第三电极对称设置在第一电极和第二电极之间，如此设计的话，当将第一电容器的电容值与第二电容器的电容值差分时，差分信号大小变化是第一电容器电容值大小变化或第二电容器电容值大小变化的两倍，由此，可以进一步的提升电容变化大小。The arrangement of the first electrode, the second electrode and the third electrode given in this application can be understood in this way. Along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the first electrode has a center line, and the second electrode has a central line. It also has a centerline, and the opposite sides of the third electrode coincide with the centerline of the first electrode and the centerline of the second electrode respectively. That is to say, in any coupling structure, the third electrode is arranged symmetrically between the first electrode and the second electrode. If so designed, when the capacitance value of the first capacitor is differentiated from the capacitance value of the second capacitor, the differential signal The change in size is twice the change in the capacitance value of the first capacitor or the change in the capacitance value of the second capacitor, thus, the change in capacitance can be further increased.

在第一方面可能的实现方式中，电容式力传感器还包括处理器；处理器根据差分公式C ₁ ^-＝C ₁-C ₂求得C ₁ ^-，根据差分公式C ₂ ^-＝C ₃-C ₄求得C ₂ ^-；以及，根据求和公式C ₁ ⁺＝C ₁+C ₂求得C ₁ ⁺，根据求和公式C ₂ ⁺＝C ₃+C ₄求得C ₂ ⁺；处理器还根据C ₁ ^-、C ₂ ^-、C ₁ ⁺和C ₂ ⁺，计算电容式力传感器所承受的外力F；其中，C ₁为第一电极组中的第一电容器输出的电容值；C ₂为第一电极组中的第二电容器输出的电容值；C ₃为第二电极组中的第一电容器输出的电容值；C ₄为第二电极组中的第二电容器输出的电容值。 In a possible implementation of the first aspect, the capacitive force sensor further includes a processor; _the processor obtains C 1 ^- according to the differential formula C ₁ ^- =C ₁ -C ₂ , and according to the differential formula C ₂ ^- =C ₃ -C ₄ to obtain C ₂ ⁻ ; and, obtain _C 1 + according to the summation formula C ₁ ⁺ =C ₁ +C ₂ , and obtain C ₂ ⁺ according to the summation formula C ₂ ⁺ =C ₃ +C ₄ ^; the processor also According to C ₁ ^- , C ₂ ^- , C ₁ ⁺ and C ₂ ⁺ , calculate the external force F borne by the capacitive force sensor; wherein, C ₁ is the output capacitance value of the first capacitor in the first electrode group; C ₂ is The capacitance output by the second capacitor in the first electrode group; _C3 is the capacitance output by the first capacitor in the second electrode group; _C4 is the capacitance output by the second capacitor in the second electrode group.

在第一方面可能的实现方式中，在第一电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极的中心线重合；在第二电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极和第二电极之间的间隙的中心线重合；其中，第一电极的中心线为第一电极的沿多个第一电极和多个第二电极的排布方向的中心线。In a possible implementation manner of the first aspect, in the first electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite first sides and second sides, The orthographic projection of the first side on the first electrode plate coincides with the center line of the first electrode; in the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes Opposite the first side and the second side, the orthographic projection of the first side on the first electrode plate coincides with the center line of the gap between the first electrode and the second electrode; wherein, the center line of the first electrode is the center line of the first electrode along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes.

在该实施中，第一电极组中第一电极、第二电极和第三电极的布设方式，和第二电极组中第一电极、第二电极和第三电极的布设方式是不一样的。In this implementation, the arrangement of the first electrodes, the second electrodes and the third electrodes in the first electrode group is different from the arrangement of the first electrodes, the second electrodes and the third electrodes in the second electrode group.

在第一方面可能的实现方式中，电容式力传感器还包括处理器；处理器根据差分公式C ₁ ^-＝C ₁-C ₂求得C ₁ ^-，以及根据差分公式C ₂ ^-＝C ₃-C ₄求得C ₂ ^-；处理器还根据C ₁ ^-和C ₂ ^-，计算电容式力传感器所承受的外力F；其中，C ₁为第一电极组中的第一电容器输出的电容值；C ₂为第一电极组中的第二电容器输出的电容值；C ₃为第二电极组中的第一电容器输出的电容值；C ₄为第二电极组中的第二电容器输出的电容值。 In a possible implementation of the first aspect, the capacitive force sensor further includes a processor; the processor calculates C 1 - according to the differential formula C ₁ ^- =C ₁ -C ₂ , and calculates C ₁ ^- according to the differential formula C ₂ ^- =C ₃ - C ₄ obtains C ₂ ^- ; the processor also calculates the external force F borne by the capacitive force sensor according to C ₁ ^- and C ₂ ^- ; wherein, C ₁ is the capacitance value output by the first capacitor in the first electrode group; C ₂ is the capacitance value of the second capacitor output in the first electrode group; C ₃ is the capacitance value of the first capacitor output in the second electrode group; C ₄ is the capacitance value of the second capacitor output in the second electrode group .

由于第一电极组中第一电极、第二电极和第三电极的布设方式，和第二电极组中第一电极、第二电极和第三电极的布设方式是不一样的，那么，在计算传感器所承受的外力时，仅采用了差分处理方法，这样的话，可以降低计算复杂度，提高信号处理速率。Since the layout of the first electrode, the second electrode and the third electrode in the first electrode group is different from the layout of the first electrode, the second electrode and the third electrode in the second electrode group, then, in the calculation When the external force the sensor bears, only the differential processing method is used, so that the computational complexity can be reduced and the signal processing rate can be improved.

在第一方面可能的实现方式中，电容式力传感器还包括第三电极板，第三电极板设置在第二电极板的背离第一电极板的一侧；至少一个电极组还包括第三电极组；在第三电极组中，多个第一电极和多个第二电极设置在第三电极板的相对第二电极板的面，多个第三电极设置在第二电极板的相对第三电极板的面上；且第三电极组和第一电极组关于第二电极板对称布设。也就是说，在第三电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第三电极板上的正投影与第一电极的中心线重合。In a possible implementation of the first aspect, the capacitive force sensor further includes a third electrode plate, and the third electrode plate is arranged on a side of the second electrode plate away from the first electrode plate; at least one electrode group further includes a third electrode group; in the third electrode group, a plurality of first electrodes and a plurality of second electrodes are arranged on the surface of the third electrode plate opposite to the second electrode plate, and a plurality of third electrodes are arranged on the surface of the second electrode plate opposite to the third electrode plate the surface of the electrode plate; and the third electrode group and the first electrode group are arranged symmetrically with respect to the second electrode plate. That is to say, in the third electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite first sides and second sides, and the first side is at the The orthographic projection on the three-electrode plate coincides with the centerline of the first electrode.

可以这样讲，本实施例给出的电容式力传感器包括依次层叠的第一电极板、第二电极板和第三电极板，且第二电极板的相对第一电极板和第三电极板的面上均设置有第三电极。这样设计，可以进一步加倍了面积变化型电容的灵敏度，另外，还可以增加间距变化型电容的灵敏度。It can be said that the capacitive force sensor provided in this embodiment includes the first electrode plate, the second electrode plate and the third electrode plate stacked in sequence, and the opposite of the first electrode plate and the third electrode plate of the second electrode plate A third electrode is arranged on each surface. Such a design can further double the sensitivity of the area variable capacitor, and can also increase the sensitivity of the pitch variable capacitor.

在第一方面可能的实现方式中，电容式力传感器还包括处理器；处理器根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-；以及，根据求和公式C ₁ ^U+＝C ₁+C ₂求得C ₁ ^U+，根据求和公式C ₁ ^D+＝C ₅+C ₆求得C ₁ ^D+；处理器还根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-和C ₁ ⁺＝C ₁ ^U+-C ₁ ^D+，计算电容式力传感器所承受的外力F；其中，C ₁为第一电极组中的第一电容器输出的电容值；C ₂为第一电极组中的第二电容器输出的电容值；C ₅为第三电极组中的第一电容器输出的电容值；C ₆为第三电极组中的第二电容器输出的电容值。 In a possible implementation of the first aspect, the capacitive force sensor further includes a processor; the processor obtains C ₁ U- according to the differential formula C ₁ ^U- =C ₁ -C ₂ , and according to the differential ^formula C ₁ ^D- =C ₅ -C ₆ to obtain C ₁ ^D- ; and, according to the summation formula C ₁ ^U+ ＝C ₁ +C ₂ to obtain C ₁ ^U+ , according to the summation formula C ₁ ^D+ ＝C ₅ +C ₆ to obtain C ₁ ^D+ ; The processor also calculates the external force F borne by the capacitive force sensor according to C ₁ ^- =C ₁ ^U- +C ₁ ^D- and C ₁ ⁺ =C ₁ ^U+ -C ₁ ^D+ ; wherein, C ₁ is the first electrode The capacitance output of the first capacitor in the group; C ₂ is the capacitance output of the second capacitor in the first electrode group; C ₅ is the capacitance output of the first capacitor in the third electrode group; C ₆ is the third The capacitance value of the second capacitor output in the electrode set.

当力传感器不仅包括第一电极板和第二电极板，还包括第三电极板时，且第三电极对称设置在第一电极和第二电极之间时，可以利用差分信号处理和加和信号处理方法，算得空间外力的大小值。When the force sensor includes not only the first electrode plate and the second electrode plate but also the third electrode plate, and the third electrode is arranged symmetrically between the first electrode and the second electrode, differential signal processing and summation signals can be utilized The processing method is to calculate the value of the external force in space.

在第一方面可能的实现方式中，电容式力传感器还包括第三电极板，第三电极板设置在第二电极板的背离第一电极板的一侧；至少一个电极组还包括第三电极组；在第三电极组中，多个第一电极和多个第二电极设置在第三电极板的相对第二电极板的面，多个第三电极设置在第二电极板的相对第三电极板的面上；且第三电极组和第一电极组关于第二电极板对称布设，也就是说，在第三电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极和第二电极之间的间隙的中心线重合。In a possible implementation of the first aspect, the capacitive force sensor further includes a third electrode plate, and the third electrode plate is arranged on a side of the second electrode plate away from the first electrode plate; at least one electrode group further includes a third electrode group; in the third electrode group, a plurality of first electrodes and a plurality of second electrodes are arranged on the surface of the third electrode plate opposite to the second electrode plate, and a plurality of third electrodes are arranged on the surface of the second electrode plate opposite to the third electrode plate on the face of the electrode plate; and the third electrode group and the first electrode group are arranged symmetrically with respect to the second electrode plate, that is to say, in the third electrode group, along the arrangement of a plurality of first electrodes and a plurality of second electrodes direction, the third electrode includes a first side and a second side opposite to each other, and the orthographic projection of the first side on the first electrode plate coincides with the center line of the gap between the first electrode and the second electrode.

同样的，通过增加第三电极板，可以进一步加倍了面积变化型电容的灵敏度，另外，还可以增加间距变化型电容的灵敏度。Similarly, by adding the third electrode plate, the sensitivity of the area variable capacitor can be further doubled, and in addition, the sensitivity of the pitch variable capacitor can also be increased.

在第一方面可能的实现方式中，电容式力传感器还包括处理器；处理器根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-；处理器还根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-，计算电容式力传感器所承受的外力F；其中，C ₁为第一电极组中的第一电容器输出的电容值；C ₂为第一电极组中的第二电容器输出的电容值；C ₅为第三电极组中的第一电容器输出的电容值；C ₆为第三电极组中的第二电容器输出的电容值。 In a possible implementation of the first aspect, the capacitive force sensor further includes a processor; the processor obtains C ₁ U- according to the differential formula C ₁ ^U- =C ₁ -C ₂ , and according to the differential ^formula C ₁ ^D- =C ₅ -C ₆ to obtain C ₁ ^D- ; the processor also calculates the external force F borne by the capacitive force sensor according to C ₁ ^- =C ₁ ^U- +C ₁ ^D- ; wherein, C ₁ is the first electrode group The capacitance value of the first capacitor output of the first capacitor; C ₂ is the capacitance value of the second capacitor output in the first electrode group; C ₅ is the capacitance value of the first capacitor output in the third electrode group; C ₆ is the third electrode group The capacitance value of the second capacitor output in .

在该可实现的方式中，由于第三电极的侧边与第一电极和第二电极之间的间距的中心线重合，进而，只需要采用差分信号处理方式，计算得到空间外力大小，并且，不仅对面积变化型电容器，对于间距变化型电容器，通过差分都可以提升测量灵敏度。In this achievable manner, since the side of the third electrode coincides with the center line of the distance between the first electrode and the second electrode, furthermore, it is only necessary to use a differential signal processing method to calculate the magnitude of the external force in space, and, Not only for area variable capacitors, but also for pitch variable capacitors, the measurement sensitivity can be improved by differential.

在第一方面可能的实现方式中，至少一个电极组还包括第五电极组；在第五电极组中，多个第一电极和多个第二电极沿第二方向排布在第一电极板的相对第二电极板的面上，多个第三电极设置在第二电极板的相对第三电极板的面上；第二方向与第一方向相垂直。In a possible implementation of the first aspect, at least one electrode group further includes a fifth electrode group; in the fifth electrode group, a plurality of first electrodes and a plurality of second electrodes are arranged on the first electrode plate along the second direction On the surface of the second electrode plate opposite to the second electrode plate, a plurality of third electrodes are arranged on the surface of the second electrode plate opposite to the third electrode plate; the second direction is perpendicular to the first direction.

这样的话，可以对相垂直的第一方向和第二方向的力进行测量。比如，不仅对X方向的力Fx、绕Y方向轴的扭矩My、以及Z方向的力Fz，还可以测得Y方向的力Fy、绕X方向轴的扭矩Mx、以及Z方向的力Fz。In this way, the force in the first direction and the second direction perpendicular to each other can be measured. For example, not only the force Fx in the X direction, the torque My around the axis in the Y direction, and the force Fz in the Z direction, but also the force Fy in the Y direction, the torque Mx around the axis in the X direction, and the force Fz in the Z direction can be measured.

在第一方面可能的实现方式中，相对的第一电极板和第二电极板上设置八组电极组，且八组电极组沿着第一电极板和第二电极板的周向间隔布设。In a possible implementation manner of the first aspect, eight sets of electrode groups are arranged on the opposite first electrode plate and the second electrode plate, and the eight sets of electrode groups are arranged at intervals along the circumferential direction of the first electrode plate and the second electrode plate.

比如，八组电极组中的两组沿X方向布设，另两组沿Y方向布设，再另两组沿+45°方向布设，剩下的两组沿-45°方向布设。如此的话，形成的该传感器可以被称为六维力传感器。For example, two of the eight electrode groups are arranged along the X direction, the other two are arranged along the Y direction, the other two are arranged along the +45° direction, and the remaining two groups are arranged along the -45° direction. If so, the sensor formed can be called a six-dimensional force sensor.

在第一方面可能的实现方式中，电容式力传感器还包括：主体和受力板，主体内形成有容纳腔；弹性体设置在容纳腔内，弹性体包括连接部和多个沿连接部周向布设的弹性臂，且弹性臂的远离连接部的一端与主体固定连接；第一电极板和第二电极板均设置在容纳腔内，第二电极板与弹性体相对设置，且与连接部固定连接，第一电极板设置在第二电极板的背离弹性体的一侧并与主体固定连接；受力板设置在容纳腔外，且与第二电极板固定连接。In a possible implementation manner of the first aspect, the capacitive force sensor further includes: a main body and a force plate, an accommodation cavity is formed in the main body; an elastic body is arranged in the accommodation cavity, and the elastic body includes a connecting part and a plurality of The elastic arm arranged in the opposite direction, and the end of the elastic arm away from the connecting part is fixedly connected to the main body; the first electrode plate and the second electrode plate are both arranged in the accommodating cavity, and the second electrode plate is arranged opposite to the elastic body, and is connected to the connecting part Fixedly connected, the first electrode plate is arranged on the side of the second electrode plate away from the elastic body and fixedly connected with the main body; the force plate is arranged outside the accommodating cavity and fixedly connected with the second electrode plate.

该实施例提供的电容式力传感器在使用时，当外力作用在受力板上时，弹性臂会在受力板的带动下运动，进而带动第二电极板相对第一电极板运动，从而通过设置在第一电极板和第二电极板上的电极组测得所受外力大小。When the capacitive force sensor provided by this embodiment is in use, when an external force acts on the force plate, the elastic arm will move under the drive of the force plate, and then drive the second electrode plate to move relative to the first electrode plate, thereby passing The magnitude of the external force received by the electrode groups arranged on the first electrode plate and the second electrode plate is measured.

在第一方面可能的实现方式中，电容式力传感器还包括电路板，电路板设置在容纳腔内，且和第二电极板相对设置在弹性体的两侧。用于对电容值进行处理的处理器可以位于该电路板上。In a possible implementation manner of the first aspect, the capacitive force sensor further includes a circuit board, and the circuit board is disposed in the accommodation cavity, and is disposed on both sides of the elastic body opposite to the second electrode plate. A processor for processing capacitance values may be located on the circuit board.

在第一方面可能的实现方式中，电容式力传感器还包括底座，且底座、主体和受力板可以围城密封的容纳腔，第一电极板、第二电极板和电路板可以设置在该密封的容纳腔内，以对这些电子元器件起到保护的作用。In a possible implementation of the first aspect, the capacitive force sensor further includes a base, and the base, the main body, and the force plate can enclose a sealed accommodating cavity, and the first electrode plate, the second electrode plate, and the circuit board can be arranged in the sealed cavity. In the accommodating cavity, in order to protect these electronic components.

第二方面，本申请提供了一种利用电容式力传感器检测设备所承受外力的测量方法，电容式力传感器安装在检测设备上，该电容式力传感器包括第一电极板、第二电极板、弹性体和至少一个电极组；第二电极板与第一电极板相对设置，且第一电极板和第二电极板之间具有间距，第一电极板和第二电极板中的其中一个为定电极板，另一个为动电极板，弹性体与动电极板固定连接，弹性体能够带动动电极板相对定电极板沿平行定电极板的方向和垂直定电极板的方向移动，以及能够带动动电极板相对定电极板沿平行定电极板的轴线和垂直定电极板的轴线转动；另外，任一电极组包括：多个相互电连接的第一电极、多个相互电连接的第二电极和多个相互电连接的第三电极，多个第一电极和多个第二电极均设置在第一电极板的相对第二电极板的面上，且多个第一电极和多个第二电极依次交替排布，多个第三电极设置在第二电极板的相对第一电极板的面上，且第一电极、第三电极和第二电极错位设置，任一第三电极与其相邻的第一电极和第二电极形成耦合结构，并且任一第一电极或者任一第二电极属于一个独立的耦合结构，动电极板相对定电极板运动时，多个第一电极和多个第三电极形成第一电容器，多个第二电极和多个第三电极形成第二电容器；In the second aspect, the present application provides a method for measuring the external force borne by a capacitive force sensor detection device. The capacitive force sensor is installed on the detection device. The capacitive force sensor includes a first electrode plate, a second electrode plate, An elastic body and at least one electrode group; the second electrode plate is arranged opposite to the first electrode plate, and there is a distance between the first electrode plate and the second electrode plate, and one of the first electrode plate and the second electrode plate is fixed An electrode plate, the other is a moving electrode plate, and the elastic body is fixedly connected with the moving electrode plate. The electrode plate rotates relative to the fixed electrode plate along the axis parallel to the fixed electrode plate and the axis perpendicular to the fixed electrode plate; in addition, any electrode group includes: a plurality of first electrodes electrically connected to each other, a plurality of second electrodes electrically connected to each other and A plurality of third electrodes electrically connected to each other, a plurality of first electrodes and a plurality of second electrodes are all arranged on the surface of the first electrode plate opposite to the second electrode plate, and the plurality of first electrodes and the plurality of second electrodes Arranged alternately in sequence, a plurality of third electrodes are arranged on the surface of the second electrode plate opposite to the first electrode plate, and the first electrode, the third electrode and the second electrode are arranged in dislocation, and any third electrode and its adjacent The first electrode and the second electrode form a coupling structure, and any first electrode or any second electrode belongs to an independent coupling structure. When the moving electrode plate moves relative to the fixed electrode plate, multiple first electrodes and multiple third the electrodes form a first capacitor, and the plurality of second electrodes and the plurality of third electrodes form a second capacitor;

本实施例提供的测量方法包括：采集第一电容器的电容值，以及采集第二电容器的电容值；根据第一电容器的电容值和第二电容器的电容值，测得检测设备所承受外力F。The measurement method provided in this embodiment includes: collecting the capacitance value of the first capacitor and collecting the capacitance value of the second capacitor; measuring the external force F borne by the detection device according to the capacitance value of the first capacitor and the capacitance value of the second capacitor.

在本申请实施例提供的测量方法中，采用了上述实施例提供的电容式力传感器，由于在该传感器中，包括了设置在第一电极板上的多个第一电极和多个第二电极，以及设置在第二电极板上的多个第三电极，这样的话，相比现有技术的传感器，可以明显的增加面积变化，进而，会明显的提升电容变化，最终会有效的提升测量灵敏度。In the measurement method provided by the embodiment of the present application, the capacitive force sensor provided by the above embodiment is used, because the sensor includes a plurality of first electrodes and a plurality of second electrodes arranged on the first electrode plate , and a plurality of third electrodes arranged on the second electrode plate, in this way, compared with the sensor of the prior art, the area change can be significantly increased, and then the capacitance change will be significantly improved, and finally the measurement sensitivity will be effectively improved .

在第二方面可能的实现方式中，沿多个第一电极和多个第二电极的排布方向，任一第一电极和任一第二电极的宽度均为W1，每相邻的第一电极和第二电极的宽度为W2，且任一第三电极的宽度为W，每相邻两个第三电极之间的宽度为W，其中，W＝W1+W2；至少一个电极组包括第一电极组和第二电极组，第一电极组中的多个第一电极和多个第二电极，与第二电极组中的多个第一电极和多个第二电极，设置在第一电极板的中心的两侧；In a possible implementation of the second aspect, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the width of any first electrode and any second electrode is W1, and each adjacent first electrode The width of the electrode and the second electrode is W2, and the width of any third electrode is W, and the width between every two adjacent third electrodes is W, wherein W=W1+W2; at least one electrode group includes the first An electrode group and a second electrode group, a plurality of first electrodes and a plurality of second electrodes in the first electrode group, and a plurality of first electrodes and a plurality of second electrodes in the second electrode group are arranged on the first Both sides of the center of the electrode plate;

采集第一电容器的电容值，以及采集第二电容器的电容值，包括：Collecting the capacitance value of the first capacitor and collecting the capacitance value of the second capacitor includes:

采集第一电极组中的第一电容器输出的电容值C ₁，采集第一电极组中的第二电容器输出的电容值C ₂，采集第二电极组中的第一电容器输出的电容值C ₃，采集第一电极组中的第二电容器输出的电容值C ₄。 Collect the capacitance value C ₁ output by the first capacitor in the first electrode group, collect the capacitance value C ₂ output by the second capacitor in the first electrode group, and collect the capacitance value C ₃ output by the first capacitor in the second electrode group , collecting the capacitance value C ₄ output by the second capacitor in the first electrode group.

也就是，当包括关于第一电极板和第二电极板的中心相对设置的第一电极组和第二电极组时，需要对这两个电极组分别形成的电容值进行采用，再采用相对应的信号处理方法进行处理。That is, when including the first electrode group and the second electrode group that are arranged opposite to the center of the first electrode plate and the second electrode plate, it is necessary to use the capacitance values formed by the two electrode groups respectively, and then use the corresponding The signal processing method is processed.

在第二方面可能的实现方式中，在第一电极组和第二电极组中的任一电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极的中心线重合；In a possible implementation of the second aspect, in any electrode group of the first electrode group and the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite The first side and the second side of the first side, the orthographic projection of the first side on the first electrode plate coincides with the center line of the first electrode;

利用第一电容器的电容值和第二电容器的电容值，测得检测设备所承受外力F，包括：Using the capacitance value of the first capacitor and the capacitance value of the second capacitor, the external force F borne by the detection equipment is measured, including:

根据差分公式C ₁ ^-＝C ₁-C ₂求得C ₁ ^-，根据差分公式C ₂ ^-＝C ₃-C ₄求得C ₂ ^-；以及，根据求和公式C ₁ ⁺＝C ₁+C ₂求得C ₁ ⁺，根据求和公式C ₂ ⁺＝C ₃+C ₄求得C ₂ ⁺； C ₁ - is obtained according to the difference formula C 1 ^- =C ₁ -C ₂ , and C ₂ ^- is obtained according to the difference formula C ₂ ^- =C ₃ -C ₄ ^; and, according to the summation formula _{C 1} ₊ ⁼ C ₁ +C ₂ Obtain C ₁ ⁺ , and obtain C 2 + according to the summation formula C ₂ ⁺ =C ₃ + _C ₄ ^;

再根据C ₁ ^-、C ₂ ^-、C ₁ ⁺和C ₂ ⁺，计算检测设备所承受外力F。 Then, according to C ₁ ^- , C ₂ ^- , C ₁ ⁺ and C ₂ ⁺ , calculate the external force F that the testing equipment bears.

这里采用可差分信号处理，和加和信号处理，以计算得到F大小。Differential signal processing and summation signal processing are used here to calculate the size of F.

可以这样讲，不仅电容面积变化增多，可以提升力测量的灵敏度，通过差分方法，也可以使得电容信号变化加倍，进一步的提升测量灵敏度。It can be said that not only the change in capacitance area increases, the sensitivity of force measurement can be improved, but also the change in capacitance signal can be doubled through the differential method, further improving the measurement sensitivity.

在第二方面可能的实现方式中，电容式力传感器还包括第三电极板，第三电极板设置在第二电极板的背离第一电极板的一侧；至少一个电极组还包括第三电极组，在第三电极组中，多个第一电极和多个第二电极设置在第三电极板的相对第二电极板的面，多个第三电极设置在第二电极板的相对第三电极板的面上，且第三电极组和第一电极组关于第二电极板对称布设；在第一电极组和第二电极组中的任一电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极的中心线重合；In a possible implementation of the second aspect, the capacitive force sensor further includes a third electrode plate, and the third electrode plate is arranged on a side of the second electrode plate away from the first electrode plate; at least one electrode group further includes a third electrode In the third electrode group, a plurality of first electrodes and a plurality of second electrodes are arranged on the surface of the third electrode plate opposite to the second electrode plate, and a plurality of third electrodes are arranged on the surface of the second electrode plate opposite to the third electrode plate. on the surface of the electrode plate, and the third electrode group and the first electrode group are arranged symmetrically with respect to the second electrode plate; in any electrode group in the first electrode group and the second electrode group, The arrangement direction of the second electrode, the third electrode includes opposite first sides and second sides, and the orthographic projection of the first side on the first electrode plate coincides with the center line of the first electrode;

采集第一电容器的电容值，以及采集第二电容器的电容值，还包括：Collecting the capacitance value of the first capacitor and collecting the capacitance value of the second capacitor also includes:

采集第三电极组中的第一电容器输出的电容值C ₅，采集第三电极组中的第二电容器输出的电容值C ₆； Collecting the capacitance value C ₅ output by the first capacitor in the third electrode group, and collecting the capacitance value C ₆ output by the second capacitor in the third electrode group;

根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-； Calculate C ₁ U- according to the differential formula ^C ₁ ^U- =C ₁ -C ₂ , and obtain C ₁ ^D- according to the differential formula C ₁ ^D- =C ₅ -C ₆ ;

以及，根据求和公式C ₁ ^U+＝C ₁+C ₂求得C ₁ ^U+，根据求和公式C ₁ ^D+＝C ₅+C ₆求得C ₁ ^D+； And, C 1 U+ is obtained according to the summation formula C ₁ _U ⁺ =C ₁ +C ₂ , and C ₁ ^D+ is obtained according to the summation formula C ₁ ^D+ =C ₅ + ^C ₆ ;

再根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-和C ₁ ⁺＝C ₁ ^U+-C ₁ ^D+，计算检测设备所承受外力F。 Then, according to C ₁ ^- ＝C ₁ ^U- +C ₁ ^D- and C ₁ ⁺ ＝C ₁ ^U+ -C ₁ ^D+ , calculate the external force F borne by the testing equipment.

当该力传感器不仅包括第一电极板和第二电极板，还包括第三电极板，并且，电极布设方式对称设置时，也可以通过差分信号处理和加和信号处理方式计算得到外力F。When the force sensor includes not only the first electrode plate and the second electrode plate, but also the third electrode plate, and the electrodes are arranged symmetrically, the external force F can also be calculated through differential signal processing and summation signal processing.

同理的，通过增加第三电极板，可以进一步的增加电容面积变化，提升灵敏度。Similarly, by adding the third electrode plate, the capacitance area change can be further increased and the sensitivity can be improved.

在第二方面可能的实现方式中，在第一电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极的中心线重合；在第二电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极和第二电极之间的间隙的中心线重合；In a possible implementation manner of the second aspect, in the first electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite first sides and second sides, The orthographic projection of the first side on the first electrode plate coincides with the center line of the first electrode; in the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes The opposite side and the second side, the orthographic projection of the first side on the first electrode plate coincides with the center line of the gap between the first electrode and the second electrode;

根据差分公式C ₁ ^-＝C ₁-C ₂求得C ₁ ^-，以及根据差分公式C ₂ ^-＝C ₃-C ₄求得C ₂ ^-； C ₁ - is obtained according to the differential formula C ₁ ^- =C ₁ -C ₂ , and C ₂ ^- is obtained according to the differential formula C ₂ ^- =C ₃ -C ₄ ^;

再根据C ₁ ^-和C ₂ ^-，计算检测设备所承受外力F。 Then, according to C ₁ ^- and C ₂ ^- , calculate the external force F borne by the testing equipment.

当力传感器采用上述布设方式时，不仅对于面积变化型传感器，还是对于间距变化型传感器，仅可以采用差分信号处理方式，就可以得到外力F的大小。When the force sensor adopts the above layout method, not only for the area variable sensor, but also for the pitch variable sensor, only the differential signal processing method can be used to obtain the magnitude of the external force F.

在第二方面可能的实现方式中，电容式力传感器还包括第三电极板，第三电极板设置在第二电极板的背离第一电极板的一侧；至少一个电极组还包括第三电极组；在第三电极组中，多个第一电极和多个第二电极设置在第三电极板的相对第二电极板的面，多个第三电极设置在第二电极板的相对第三电极板的面上；且第三电极组和第一电极组关于第二电极板对称布设；在第一电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极的中心线重合；在第二电极组中，沿多个第一电极和多个第二电极的排布方向，第三电极包括相对的第一侧边和第二侧边，第一侧边在第一电极板上的正投影与第一电极和第二电极之间的间隙的中心线重合；In a possible implementation of the second aspect, the capacitive force sensor further includes a third electrode plate, and the third electrode plate is arranged on a side of the second electrode plate away from the first electrode plate; at least one electrode group further includes a third electrode group; in the third electrode group, a plurality of first electrodes and a plurality of second electrodes are arranged on the surface of the third electrode plate opposite to the second electrode plate, and a plurality of third electrodes are arranged on the surface of the second electrode plate opposite to the third electrode plate on the surface of the electrode plate; and the third electrode group and the first electrode group are arranged symmetrically with respect to the second electrode plate; in the first electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third The electrode includes opposite first sides and second sides, and the orthographic projection of the first side on the first electrode plate coincides with the center line of the first electrode; in the second electrode group, along the plurality of first electrodes and The arrangement direction of a plurality of second electrodes, the third electrode includes opposite first sides and second sides, the orthographic projection of the first side on the first electrode plate and the distance between the first electrode and the second electrode The centerlines of the gap coincide;

根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-； Calculate C ₁ U- according to the differential formula C ₁ ^U- =C ₁ -C ₂ , and obtain C ₁ ^D- according to the differential formula C ₁ ^D- =C ₅ -C ₆ ^;

再根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-，计算检测设备所承受外力F。 Then according to C ₁ ^- =C ₁ ^U- +C ₁ ^D- , calculate the external force F borne by the testing equipment.

也就是，在具有第三电极板的情况下，电极按照上述方式布设时，仅通过差分方式就可以求得空间外力大小。That is, in the case of the third electrode plate, when the electrodes are arranged in the above manner, the magnitude of the external force in space can be obtained only through the differential method.

附图说明Description of drawings

图1为现有技术中一种力传感器的简易结构图；Fig. 1 is a simple structural diagram of a force sensor in the prior art;

图2为本申请实施例提供的一种电容式力传感器的分解图；FIG. 2 is an exploded view of a capacitive force sensor provided in an embodiment of the present application;

图3为图2所示电容式力传感器的装配后的剖面图；Fig. 3 is the sectional view of the assembled capacitive force sensor shown in Fig. 2;

图4为本申请实施例提供的一种弹性体、主体和限位挡板的连接关系示意图；Fig. 4 is a schematic diagram of the connection relationship between an elastic body, a main body and a limit baffle provided in the embodiment of the present application;

图5为本申请实施例提供的电容式力传感器中的一种第一电极板的结构图；FIG. 5 is a structural diagram of a first electrode plate in a capacitive force sensor provided in an embodiment of the present application;

图6为本申请实施例提供的电容式力传感器中的一种第二电极板的结构图；FIG. 6 is a structural diagram of a second electrode plate in a capacitive force sensor provided in an embodiment of the present application;

图7为本申请实施例提供的电容式力传感器中的一种第一电极板的结构图；FIG. 7 is a structural diagram of a first electrode plate in a capacitive force sensor provided in an embodiment of the present application;

图8为本申请实施例提供的电容式力传感器中的一种第二电极板的结构图；FIG. 8 is a structural diagram of a second electrode plate in a capacitive force sensor provided in an embodiment of the present application;

图9为本申请实施例提供的电容式力传感器中的第一电极板和第二电极板的剖面图；9 is a cross-sectional view of the first electrode plate and the second electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图10为本申请实施例提供的电容式力传感器中的第一电极板和第二电极板上的电极分布图；FIG. 10 is an electrode distribution diagram on the first electrode plate and the second electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图11为本申请实施例提供的电容式力传感器中形成的第一电容器或者第二电容器的原理图；Fig. 11 is a schematic diagram of the first capacitor or the second capacitor formed in the capacitive force sensor provided by the embodiment of the present application;

图12a为本申请实施例提供的电容式力传感器中形成的第一电极板和第二电极板上的电极分布图；Fig. 12a is an electrode distribution diagram of the first electrode plate and the second electrode plate formed in the capacitive force sensor provided by the embodiment of the present application;

图12b为本申请实施例提供的电容式力传感器中形成的第一电极板和第二电极板上的电极分布图；Fig. 12b is an electrode distribution diagram formed on the first electrode plate and the second electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图13为图12a和图12b中的形成的电容器的曲线图；Figure 13 is a graph of the capacitors formed in Figures 12a and 12b;

图14a为图13中的形成的电容器差分后的曲线图；Fig. 14a is a graph after difference of the formed capacitor in Fig. 13;

图14b为图13中的形成的电容器加和后的曲线图；Figure 14b is a graph after summing the capacitors formed in Figure 13;

图15a为本申请实施例提供的电容式力传感器中形成的第一电极板和第二电极板上的电极分布图；Fig. 15a is an electrode distribution diagram formed on the first electrode plate and the second electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图15b为本申请实施例提供的电容式力传感器中形成的第一电极板和第二电极板上的电极分布图；Fig. 15b is an electrode distribution diagram formed on the first electrode plate and the second electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图16为图15a和图15b中的形成的电容器的曲线图；Figure 16 is a graph of the capacitors formed in Figures 15a and 15b;

图17为图16中的形成的电容器差分后的曲线图；FIG. 17 is a graph of the difference between the capacitors formed in FIG. 16;

图18为本申请实施例提供的电容式力传感器中的第一电极板的结构图；Fig. 18 is a structural diagram of the first electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图19为图18中的其中一个电极组的分布图；Figure 19 is a distribution diagram of one of the electrode groups in Figure 18;

图20为本申请实施例提供的电容式力传感器中的第二电极板的结构图；Fig. 20 is a structural diagram of the second electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图21为图20中的其中一个电极组的分布图；Figure 21 is a distribution diagram of one of the electrode groups in Figure 20;

图22为本申请实施例提供的电容式力传感器中的第一电极板、第二电极板和第三电极组的剖面图；Fig. 22 is a cross-sectional view of the first electrode plate, the second electrode plate and the third electrode group in the capacitive force sensor provided by the embodiment of the present application;

图23为本申请实施例提供的电容式力传感器中形成的第一电极板、第二电极板和第三电极组上的电极分布图；Fig. 23 is an electrode distribution diagram on the first electrode plate, the second electrode plate and the third electrode group formed in the capacitive force sensor provided by the embodiment of the present application;

图24a为本申请实施例提供的电容式力传感器中形成的第一电极板、第二电极板和第三电极板上的第一电极组和第三电极组的电极分布图；Fig. 24a is an electrode distribution diagram of the first electrode group and the third electrode group formed on the first electrode plate, the second electrode plate and the third electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图24b为本申请实施例提供的电容式力传感器中形成的第一电极板、第二电极板和第三电极板上的第二电极组和第四电极组的电极分布图；Fig. 24b is an electrode distribution diagram of the second electrode group and the fourth electrode group formed on the first electrode plate, the second electrode plate and the third electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图25a为本申请实施例提供的电容式力传感器中形成的第一电极板、第二电极板和第三电极板上的第一电极组和第三电极组的电极分布图；Fig. 25a is an electrode distribution diagram of the first electrode group and the third electrode group formed on the first electrode plate, the second electrode plate and the third electrode plate in the capacitive force sensor provided by the embodiment of the present application;

图25b为本申请实施例提供的电容式力传感器中形成的第一电极板、第二电极板和第三电极板上的第二电极组和第四电极组的电极分布图。Fig. 25b is an electrode distribution diagram of the second electrode group and the fourth electrode group formed on the first electrode plate, the second electrode plate and the third electrode plate in the capacitive force sensor provided by the embodiment of the present application.

附图标记：Reference signs:

1000-电容式力传感器；1000-capacitive force sensor;

10-主体；101-容纳腔；10-main body; 101-accommodating cavity;

20-感应电极板；201-通孔；20-induction electrode plate; 201-through hole;

30-弹性体电极板；30-elastomer electrode plate;

40-弹性体；401-连接部；402-弹性臂；403-固定臂；40-elastic body; 401-connecting part; 402-elastic arm; 403-fixed arm;

50-受力板；50-force plate;

60-连接柱；60-connecting column;

70-限位挡板；701-第一限位挡板；702-第二限位挡板；70-limit baffle; 701-the first limit baffle; 702-the second limit baffle;

80-电路板；80 - circuit board;

90-底座；90-base;

200-第一电极板；200 - the first electrode plate;

200a-第一绝缘衬底；200a-the first insulating substrate;

21、21-1、21-2、21-3、21-4、2011、2012、2031、2032-第一电极；22、22-1、22-2、22-3、22-4、2021、2022、2041、2042-第二电极；21, 21-1, 21-2, 21-3, 21-4, 2011, 2012, 2031, 2032 - the first electrode; 22, 22-1, 22-2, 22-3, 22-4, 2021, 2022, 2041, 2042 - second electrode;

300-第二电极板；300 - the second electrode plate;

300a-第二绝缘衬底；300a - the second insulating substrate;

31、31-1、31-2、31-3、31-4、3011、3012、3021、3022-第三电极；31, 31-1, 31-2, 31-3, 31-4, 3011, 3012, 3021, 3022 - the third electrode;

400-第三电极板。400 - third electrode plate.

具体实施方式Detailed ways

在机器人、航空航天设备、机械加工设备、汽车制造设备或者多自由度精密组装设备等一些设备中，均需要一种力传感器，以实现空间力或者力矩的测量。比如，在机器人中，一般采用力传感器对机器人的手臂、手腕、手指或者底座等部件在运动过程中所受力或者力矩进行测量，且力传感器能够将感知到的力或者力矩信息转换成电信号输出。In some equipment such as robots, aerospace equipment, machining equipment, automobile manufacturing equipment, or multi-degree-of-freedom precision assembly equipment, a force sensor is needed to measure space force or torque. For example, in a robot, a force sensor is generally used to measure the force or torque on the robot's arm, wrist, finger or base during motion, and the force sensor can convert the perceived force or torque information into an electrical signal output.

随着上述这些设备的发展，力传感器不仅由单维传感器发展为多维传感器，比如，发展为六维传感器，并且对传感器的灵敏度也提出了越来越高的要求。例如，在机器人中，即使手臂在外力的作用下产生较小的位移，也需要力传感器能够灵敏的感知到，以对外力大小比较精准的检测。With the development of the above-mentioned devices, the force sensor has not only developed from a single-dimensional sensor to a multi-dimensional sensor, for example, to a six-dimensional sensor, but also puts forward higher and higher requirements for the sensitivity of the sensor. For example, in a robot, even if the arm has a small displacement under the action of an external force, the force sensor needs to be able to sense it sensitively, so as to detect the external force more accurately.

为了提升力传感器检测的灵敏度，以提升力传感器的使用性能，本申请实施例给出了一种新型的力传感器，该种力传感器是一种基于电容变化的电容式力传感器，下面结合附图对本申请实施例给出的电容式力传感器进行详细描述。In order to improve the detection sensitivity of the force sensor and improve the performance of the force sensor, the embodiment of this application presents a new type of force sensor, which is a capacitive force sensor based on capacitance changes. The following is combined with the accompanying drawings The capacitive force sensor given in the embodiment of the present application is described in detail.

图2示出的是本申请实施例给出的一种电容式力传感器1000的分解图，图3是图2所示结构装配后的剖面图。一并结合图2和图3，该电容式力传感器1000包括主体10，主体10内形成有容纳腔101，容纳腔101内设置有弹性体40、感应电极板20和弹性体电极板30；其中，如图4所示，图4示出了弹性体40的结构图，弹性体40包括连接部401和多个沿连接部401的周向布设的弹性臂402，并且弹性臂402的远离连接部401的一端与主体10固定连接。FIG. 2 shows an exploded view of a capacitive force sensor 1000 given in the embodiment of the present application, and FIG. 3 is a cross-sectional view of the assembled structure shown in FIG. 2 . 2 and 3 together, the capacitive force sensor 1000 includes a main body 10, and a housing cavity 101 is formed in the main body 10, and an elastic body 40, a sensing electrode plate 20 and an elastic body electrode plate 30 are arranged in the housing cavity 101; , as shown in FIG. 4, FIG. 4 shows a structural diagram of the elastic body 40, the elastic body 40 includes a connecting portion 401 and a plurality of elastic arms 402 arranged along the circumferential direction of the connecting portion 401, and the elastic arms 402 are far away from the connecting portion One end of 401 is fixedly connected with the main body 10 .

还有，弹性体电极板30与弹性体40相对设置，且弹性体电极板30与弹性体40的连接部401固定连接。这样的话，当弹性体40发生变形时，就会带动弹性体电极板30相对主体10运动。In addition, the elastic body electrode plate 30 is disposed opposite to the elastic body 40 , and the elastic body electrode plate 30 is fixedly connected to the connecting portion 401 of the elastic body 40 . In this way, when the elastic body 40 deforms, it will drive the elastic body electrode plate 30 to move relative to the main body 10 .

再结合图2和图3，感应电极板20和弹性体电极板30相对设置，感应电极板20上设置有通孔201，设置在主体10的容纳腔101外部的受力板50通过穿过通孔201的连接柱60与弹性体电极板30固定连接。也可以这样讲，用于承受外力的受力板50设置在主体10的外部，且受力板50通过连接柱60与弹性体电极板30和弹性体40相对固定。如此一来，外力施加在受力板50后，会带动弹性体40发生形变，弹性体40的形变会带动弹性体电极板30相对感应电极板20运动。2 and 3 again, the sensing electrode plate 20 and the elastomer electrode plate 30 are arranged oppositely, and the sensing electrode plate 20 is provided with a through hole 201, and the force plate 50 arranged outside the accommodation cavity 101 of the main body 10 passes through the through hole The connecting post 60 of the hole 201 is fixedly connected with the elastomeric electrode plate 30 . It can also be said that the force receiving plate 50 for bearing external force is arranged outside the main body 10 , and the force receiving plate 50 is relatively fixed to the elastic body electrode plate 30 and the elastic body 40 through the connecting post 60 . In this way, when an external force is applied to the force receiving plate 50 , the elastic body 40 will be driven to deform, and the deformation of the elastic body 40 will drive the elastic body electrode plate 30 to move relative to the sensing electrode plate 20 .

并且，在感应电极板20和弹性体电极板30上均设置有电极，那么，当弹性体电极板30相对感应电极板20运动时，致使感应电极板20上的电极和弹性体电极板30上的电极之间的正对面积或者间距中的至少一个参数发生变化，进而引起该电容式力传感器1000的电容值发生变化，通过该电容值就可以用来表示外力大小。And, electrodes are arranged on both the sensing electrode plate 20 and the elastic body electrode plate 30, then, when the elastic body electrode plate 30 moves relative to the sensing electrode plate 20, the electrodes on the sensing electrode plate 20 and the elastic body electrode plate 30 are Changes in at least one parameter of the facing area or distance between the electrodes cause changes in the capacitance value of the capacitive force sensor 1000, and the capacitance value can be used to represent the magnitude of the external force.

对于感应电极板20上的电极布设，和弹性体电极板30上的电极布设，下面进行详细介绍。The electrode layout on the induction electrode plate 20 and the electrode layout on the elastomer electrode plate 30 will be described in detail below.

在另外一种实施例中，该电容式力传感器1000的弹性体40如图4的，还可以包括多个固定臂403，多个固定臂403沿着连接部401的周向间隔布设，并且，多个固定臂403和多个弹性臂402可以沿着连接部401的周向交替排布。In another embodiment, the elastic body 40 of the capacitive force sensor 1000 may further include a plurality of fixed arms 403 as shown in FIG. A plurality of fixed arms 403 and a plurality of elastic arms 402 may be alternately arranged along the circumferential direction of the connecting portion 401 .

继续结合图4，该电容式力传感器1000还包括限位挡板70，这里的限位挡板70用于限定弹性体40沿如图4所示的沿X方向、沿Y方向和沿Z方向的位移量，比如，该限位挡板70可以包括多个第一限位挡板701和多个第二限位挡板702，其中，两个第一限位挡板701相对布设，两个第二限位挡板702相对布设，固定臂403的一端与连接部401固定连接，另一端延伸中两个第一限位挡板701、两个第二限位挡板702 围城的空腔内，即通过限定固定臂403的位移量，限定弹性体40的位移量。Continuing with FIG. 4 , the capacitive force sensor 1000 also includes a limit baffle 70 , where the limit baffle 70 is used to limit the movement of the elastic body 40 along the X direction, along the Y direction and along the Z direction as shown in FIG. 4 . For example, the limit baffle 70 may include a plurality of first limit baffles 701 and a plurality of second limit baffles 702, wherein the two first limit baffles 701 are arranged oppositely, and the two The second limit baffle 702 is relatively arranged, one end of the fixed arm 403 is fixedly connected to the connecting part 401, and the other end extends into the cavity surrounded by the two first limit baffles 701 and the two second limit baffles 702 , that is, by limiting the displacement of the fixed arm 403 , the displacement of the elastic body 40 is limited.

再一并结合图2和图3，本申请实施例给出的电容式力传感器1000还可以包括电路板80，电路板80上集成有处理器，这里的处理器可以对感应电极板20和弹性体电极板30输出的电容值进行处理，以输出外力大小。In combination with Fig. 2 and Fig. 3, the capacitive force sensor 1000 provided in the embodiment of the present application may also include a circuit board 80, on which a processor is integrated, and the processor here may control the sensing electrode plate 20 and the elastic The capacitance value output by the body electrode plate 30 is processed to output the magnitude of the external force.

图2给出了电路板80布设的其中一种方式，也就是，将电路板80也设置在主体10的容纳腔301内，并且，电路板80和弹性体电极板30相对设置在弹性体40的两侧。图2仅示出的是电路板80布设方式中的其中一种，当然，电路板80、弹性体电极板30和感应电极板20均设置在弹性体40的同一侧。Figure 2 shows one way of laying out the circuit board 80, that is, the circuit board 80 is also arranged in the housing chamber 301 of the main body 10, and the circuit board 80 and the elastic body electrode plate 30 are relatively arranged on the elastic body 40 on both sides. FIG. 2 only shows one of the ways in which the circuit board 80 is arranged. Of course, the circuit board 80 , the elastic body electrode plate 30 and the sensing electrode plate 20 are all arranged on the same side of the elastic body 40 .

另外，再结合图2和图3，电容式力传感器1000还可以包括底座90，底座90与主体10固定连接。在一些可以选择的实施方式中，主体10、底座90和受力板50可以围城封闭的容纳腔101，以使得感应电极板20、弹性体电极板30、电路板80和弹性体40被设置在封闭的腔室内，免受外部灰尘等杂质对这些器件造成污染。In addition, referring to FIG. 2 and FIG. 3 , the capacitive force sensor 1000 may further include a base 90 , and the base 90 is fixedly connected to the main body 10 . In some optional embodiments, the main body 10, the base 90 and the force plate 50 can enclose the closed accommodation cavity 101, so that the induction electrode plate 20, the elastic body electrode plate 30, the circuit board 80 and the elastic body 40 are arranged in In a closed chamber, these devices are protected from contamination by impurities such as external dust.

在图2和图3所示的电容式力传感器1000中，由于弹性体电极板30与弹性体40相对固定，从而，弹性体电极板30作为动电极板，可以相对作为定电极板10的感应电极板20运动，以改变电容大小。In the capacitive force sensor 1000 shown in FIG. 2 and FIG. 3 , since the elastic body electrode plate 30 and the elastic body 40 are relatively fixed, the elastic body electrode plate 30 can be used as a moving electrode plate, and can be used as the induction of the fixed electrode plate 10. The electrode plate 20 moves to change the capacitance.

下述对本申请的用于形成电容器的电极板上的电极布设，以及对产生的电容的处理方法进行详细介绍。The electrode layout on the electrode plate used to form the capacitor and the processing method for the generated capacitance of the present application will be described in detail below.

如图5和图6所示，图5示出了的是本申请实施例给出的一种具有电极的第一电极板200的结构图，图6示出的是本申请实施例给出的一种具有电极的第二电极板300的结构图。第一电极板200和第二电极板300中的其中一个为动电极板，另一个为定电极板，这里的动电极板可以与上述图2和图3中的弹性体40固定连接，那么，当弹性体发生形变时，会促使第一电极板200和第二电极板300之间发生相对运动。As shown in Figure 5 and Figure 6, what Figure 5 shows is a structural diagram of a first electrode plate 200 with electrodes provided in the embodiment of the present application, and Figure 6 shows the structural diagram of a first electrode plate 200 provided in the embodiment of the present application. A structural diagram of a second electrode plate 300 with electrodes. One of the first electrode plate 200 and the second electrode plate 300 is a moving electrode plate, and the other is a fixed electrode plate. The moving electrode plate here can be fixedly connected with the elastic body 40 in the above-mentioned FIGS. 2 and 3 . Then, When the elastic body is deformed, relative movement between the first electrode plate 200 and the second electrode plate 300 will be promoted.

本申请的动电极板相对定电极板运动至少包括：动电极板相对定电极板沿平行于定电极板的方向移动，动电极板相对定电极板沿垂直于定电极板的方向移动，动电极板相对定电极板沿平行于定电极板的轴线转动，动电极板相对定电极板沿平行于定电极板的轴线转动。例如，如图2、图5和图6所示的，动电极板相对定电极板沿X轴、Y轴和Z轴平动，以及还可以绕X轴、Y轴和Z轴转动。这样的话，本申请给出的力传感器不仅是一种面积变化型传感器，还是一种间距变化型传感器，通过这两种不同类型的传感器测量外力空间大小。The movement of the moving electrode plate relative to the fixed electrode plate in the present application at least includes: the moving electrode plate moves relative to the fixed electrode plate along a direction parallel to the fixed electrode plate, the moving electrode plate moves relative to the fixed electrode plate along a direction perpendicular to the fixed electrode plate, and the moving electrode plate moves along a direction perpendicular to the fixed electrode plate. The plate rotates relative to the fixed electrode plate along an axis parallel to the fixed electrode plate, and the movable electrode plate rotates relative to the fixed electrode plate along an axis parallel to the fixed electrode plate. For example, as shown in FIG. 2 , FIG. 5 and FIG. 6 , the movable electrode plate can translate along the X-axis, Y-axis and Z-axis relative to the fixed electrode plate, and can also rotate around the X-axis, Y-axis and Z-axis. In this way, the force sensor provided in this application is not only an area variable sensor, but also a space variable sensor, and the external force space is measured by these two different types of sensors.

在一些可选择的实施方式中，这里的第一电极板200可以是上述图2和图3所示的感应电极板20，第二电极板300可以是上述图2和图3所示的弹性体电极板30。在另外一些可选择的实施方式中，第一电极板200也可以是上述图2和图3所示的弹性体电极板30，第二电极板300可以是上述图2和图3所示的感应电极板20。为了便于理解，本申请下述实施例是以第一电极板200为图2中的感应电极板20，第二电极板300为图2中的弹性体电极板30为例，来介绍电极分布，以及信号处理方式的。In some optional embodiments, the first electrode plate 200 here can be the sensing electrode plate 20 shown in the above-mentioned FIG. 2 and FIG. 3 , and the second electrode plate 300 can be the elastic body shown in the above-mentioned FIG. 2 and FIG. 3 electrode plate 30 . In some other optional embodiments, the first electrode plate 200 can also be the elastomer electrode plate 30 shown in the above-mentioned FIG. 2 and FIG. 3 , and the second electrode plate 300 can be the induction Electrode plate 20. For ease of understanding, the following embodiments of the present application take the first electrode plate 200 as the induction electrode plate 20 in FIG. 2 and the second electrode plate 300 as the elastomer electrode plate 30 in FIG. 2 as an example to introduce the electrode distribution, and signal processing.

如图5所示的，第一电极板200上具有多个感应电极组，图5示例性的示出了八个感应电极组，(201、202)为一个感应电极组，同理的，(203、204)、(205、206)、(207、208)、(209、210)、(211、212)、(213、214)、(215、216)为其余的七个感应电极组。如图6所示的，第二电极板300上具有多个接地电极组，图6示例性的示出了八个接地电极组，分别为接地电极组301至接地电极组308。As shown in FIG. 5 , there are multiple sensing electrode groups on the first electrode plate 200. FIG. 5 exemplarily shows eight sensing electrode groups, (201, 202) being one sensing electrode group. Similarly, ( 203, 204), (205, 206), (207, 208), (209, 210), (211, 212), (213, 214), (215, 216) are the remaining seven sensing electrode groups. As shown in Figure 6, there are multiple ground electrode groups on the second electrode plate 300, and Figure 6 exemplarily shows eight ground electrode groups, which are respectively ground electrode group 301 to ground electrode group 308.

一并结合图5和图6，图5中的感应电极组201和与图6中的接地电极组301，可以形成一个电容器，图5中的感应电极组202和与图6中的接地电极组301，也可以形成另一个电容器。同理的，图5中的感应电极组203和与图6中的接地电极组302，可以形成又一个电容器，图5中的感应电极组204和与图6中的接地电极组302，可以形成再一个电容器。Combining Fig. 5 and Fig. 6 together, the sensing electrode group 201 in Fig. 5 and the grounding electrode group 301 in Fig. 6 can form a capacitor, the sensing electrode group 202 in Fig. 5 and the grounding electrode group in Fig. 6 301, another capacitor can also be formed. Similarly, the induction electrode group 203 in FIG. 5 and the ground electrode group 302 in FIG. 6 can form another capacitor, and the induction electrode group 204 in FIG. 5 and the ground electrode group 302 in FIG. 6 can form another capacitor. Another capacitor.

这样的话，图5所示的第一电极板200和图6所示的第二电极板300可以形成16个电容器，其中，该电容式力传感器在使用时，沿X方向(也可以叫第一方向)布置的两组电容器可以用来测量X方向的力Fx、绕Y方向(也可以叫与第一方向垂直的第二方向)轴的扭矩My、以及Z方向(也可以叫与第一方向和第二方向均垂直的第三方向)的力Fz；Y方向布置的两组电容器用来测量Y方向的力Fy、绕X方向轴的扭矩Mx、以及Z方向的力Fz；其余的按照环形布置的四组电容器主要用来测量绕Z方向轴的扭矩Mz、Z方向的力Fz，同时也可测量Mx和My。In this way, the first electrode plate 200 shown in FIG. 5 and the second electrode plate 300 shown in FIG. 6 can form 16 capacitors, wherein, when the capacitive force sensor is in use, it can be The two groups of capacitors arranged in the direction) can be used to measure the force Fx in the X direction, the torque My around the axis in the Y direction (also called the second direction perpendicular to the first direction), and the Z direction (also called the second direction perpendicular to the first direction). The force Fz in the third direction perpendicular to the second direction); the two sets of capacitors arranged in the Y direction are used to measure the force Fy in the Y direction, the torque Mx around the axis in the X direction, and the force Fz in the Z direction; The four sets of capacitors arranged are mainly used to measure the torque Mz around the axis in the Z direction and the force Fz in the Z direction, and can also measure Mx and My.

当采用图5和图6所示的电极布设，形成的电容式力传感器是一种六维力传感器。在另外一些可选择的实施方式中，如图7和图8所示，可以在图5和图6的基础上，去掉第一电极板200上的感应电极组(209、210)、(211、212)、(213、214)、(215、216)，相对应的，去掉第二电极板300上的接地电极组305至接地电极组308。如此设计的话，图7和图8所示结构形成的电容式力传感器属于一种五维力传感器，即可以测量X方向的力Fx、绕Y方向轴的扭矩My、以及Z方向的力Fz、Y方向的力Fy、绕X方向轴的扭矩Mx。When the electrode layout shown in Fig. 5 and Fig. 6 is adopted, the formed capacitive force sensor is a six-dimensional force sensor. In other optional implementations, as shown in Figure 7 and Figure 8, on the basis of Figure 5 and Figure 6, the sensing electrode groups (209, 210), (211, 212), (213, 214), (215, 216), correspondingly, the ground electrode group 305 to the ground electrode group 308 on the second electrode plate 300 are removed. If so designed, the capacitive force sensor formed by the structure shown in Figure 7 and Figure 8 belongs to a five-dimensional force sensor, that is, it can measure the force Fx in the X direction, the torque My around the axis in the Y direction, and the force Fz in the Z direction, The force Fy in the Y direction and the torque Mx around the axis in the X direction.

当然，在其他可选择的实施方式中，可以在图7和图8的基础上，去掉感应电极组(203、204)、(207、208)，以及去掉接地电极组302和接地电极组304，可以实现力Fx、力Fz、力Fy的测量。Certainly, in other optional implementation manners, the induction electrode groups (203, 204), (207, 208), and the ground electrode group 302 and the ground electrode group 304 can be removed on the basis of Fig. 7 and Fig. 8 , The measurement of force Fx, force Fz and force Fy can be realized.

如图5和图6所示，在第一电极板200中，感应电极组(201、202)中的电极，和感应电极组(203、204)中的电极均是沿X方向布设，以及感应电极组(205、206)中的电极，和感应电极组(207、208)中的电极均是沿Y方向布设，进而，可以认为感应电极组(201、202)中的电极、感应电极组(203、204)中的电极、感应电极组(205、206)中的电极和感应电极组(207、208)中的电极均属于线性排布，那么，相对应的，在第二电极板300中，接地电极组301中的电极、接地电极组302中的电极、接地电极组303中的电极和接地电极组304中的电极也属于线性排布。As shown in Figures 5 and 6, in the first electrode plate 200, the electrodes in the sensing electrode group (201, 202) and the electrodes in the sensing electrode group (203, 204) are arranged along the X direction, and the sensing The electrodes in the electrode group (205, 206) and the electrodes in the sensing electrode group (207, 208) are arranged along the Y direction, and then, it can be considered that the electrodes in the sensing electrode group (201, 202), the sensing electrode group ( 203, 204), the electrodes in the sensing electrode group (205, 206) and the electrodes in the sensing electrode group (207, 208) are all linearly arranged, then, correspondingly, in the second electrode plate 300 The electrodes in the ground electrode group 301 , the electrodes in the ground electrode group 302 , the electrodes in the ground electrode group 303 and the electrodes in the ground electrode group 304 also belong to the linear arrangement.

然而，再结合图5和图6，在第一电极板200中，感应电极组(209、210)中的电极、感应电极组(211、212)中的电极、感应电极组(213、214)中的电极和感应电极组(215、216)中的电极沿第一电极板200的周向呈弧形排布，那么，这四组感应电极组均属于角度型排布。相对应的，在第二电极板300中，接地电极组305中的电极、接地电极组306中的电极、接地电极组307中的电极和接地电极组308中的电极也属于角度型排布。比如，按照角度型布置的四组电容器中，感应电极组(209、210)和感应电极组(211、212)的布设方向与Y方向之间的夹角为-45°，以及干感应电极组(213、214)和感应电极组(215、216)的布设方向与Y方向之间的夹角为45°，也就是说，八组感应电极组沿着第一电极板200的周向等间距的布设。However, in conjunction with Fig. 5 and Fig. 6, in the first electrode plate 200, the electrodes in the sensing electrode group (209, 210), the electrodes in the sensing electrode group (211, 212), the sensing electrode group (213, 214) The electrodes in and the electrodes in the sensing electrode groups (215, 216) are arranged in an arc along the circumferential direction of the first electrode plate 200, so these four groups of sensing electrode groups are all arranged in an angle. Correspondingly, in the second electrode plate 300 , the electrodes in the ground electrode group 305 , the electrodes in the ground electrode group 306 , the electrodes in the ground electrode group 307 and the electrodes in the ground electrode group 308 also belong to the angular arrangement. For example, in the four groups of capacitors arranged in an angle, the angle between the arrangement direction of the sensing electrode group (209, 210) and the sensing electrode group (211, 212) and the Y direction is -45°, and the dry sensing electrode group (213, 214) and the arrangement direction of the induction electrode groups (215, 216) and the Y direction are at an angle of 45°, that is to say, the eight groups of induction electrode groups are equally spaced along the circumference of the first electrode plate 200 layout.

需要说明的是，上述图5至图8所示的第一电极板200和第二电极板300可以被设置在图2和图3所示的电容式力传感器结构中，也可以设置在其他结构的电容式力传感器结构中。It should be noted that the first electrode plate 200 and the second electrode plate 300 shown in FIGS. 5 to 8 above can be arranged in the structure of the capacitive force sensor shown in FIGS. 2 and 3 , and can also be arranged in other structures. In the capacitive force sensor structure.

另外，可以将位于第一电极板200上的感应电极组(201、202)和第二电极板300上的接地电极组301合称为一个电极组。进而，同样的感应电极组(203、204)和接地电极组302可以合称为另一个电极组。In addition, the induction electrode group ( 201 , 202 ) on the first electrode plate 200 and the ground electrode group 301 on the second electrode plate 300 may be collectively referred to as an electrode group. Furthermore, the same induction electrode group (203, 204) and ground electrode group 302 may be collectively referred to as another electrode group.

下面分别对属于线性排布的电极组，以及对属于角度型排布的电极组分别进行介绍。The electrode groups belonging to the linear arrangement and the electrode groups belonging to the angular arrangement are respectively introduced below.

下述以第一电极板200上的感应电极组(201、202)和第二电极板300上的接地电极组301为例，来介绍线性排布电极组的具体布设方式，以及信号处理方法。The following takes the sensing electrode group (201, 202) on the first electrode plate 200 and the grounding electrode group 301 on the second electrode plate 300 as examples to introduce the specific layout of the linearly arranged electrode groups and the signal processing method.

图9示出了相对的第一电极板200和第二电极板300的部分结构的剖面图，图10是图9所示结构的电极板上的电极的分布图。一并结合图9和图10，第一电极板200具有与第二电极板300相对的A1面，第二电极板300具有与第一电极板200相对的B1面，即A1面与B1面相对。感应电极组(201、202)布设在A1面上，接地电极组301布设在B1面上，其中，感应电极组(201、202)包括多个第一电极21和多个第二电极22，接地电极组301包括多个第三电极31。FIG. 9 shows a cross-sectional view of the partial structure of the opposing first electrode plate 200 and the second electrode plate 300 , and FIG. 10 is a distribution diagram of electrodes on the electrode plate with the structure shown in FIG. 9 . 9 and 10 together, the first electrode plate 200 has an A1 surface opposite to the second electrode plate 300, and the second electrode plate 300 has a B1 surface opposite to the first electrode plate 200, that is, the A1 surface is opposite to the B1 surface . The induction electrode group (201, 202) is arranged on the A1 surface, and the ground electrode group 301 is arranged on the B1 surface, wherein the induction electrode group (201, 202) includes a plurality of first electrodes 21 and a plurality of second electrodes 22, grounded The electrode group 301 includes a plurality of third electrodes 31 .

在一些可选择的实施方式中，如图9，第一电极板200包括第一绝缘衬底200a，在第一绝缘衬底200a的相对第二电极板300的面上形成多个第一电极21和多个第二电极22。同样的，第二电极板300包括第二绝缘衬底300a，在第二绝缘衬底300a的相对第一电极板200的面上形成多个第三电极31。在一些可选择的工艺中，这里的多个第一电极21、多个第二电极22和多个第三电极31均可以采用在绝缘衬底上制得金属导线而形成。并且，多个第一电极21相互电连接，多个第二电极22相互电连接，还有，多个第三电极31也相互电连接。In some optional embodiments, as shown in FIG. 9, the first electrode plate 200 includes a first insulating substrate 200a, and a plurality of first electrodes 21 are formed on the surface of the first insulating substrate 200a opposite to the second electrode plate 300. and a plurality of second electrodes 22 . Similarly, the second electrode plate 300 includes a second insulating substrate 300a, and a plurality of third electrodes 31 are formed on the surface of the second insulating substrate 300a opposite to the first electrode plate 200 . In some optional processes, the plurality of first electrodes 21 , the plurality of second electrodes 22 and the plurality of third electrodes 31 can all be formed by making metal wires on an insulating substrate. In addition, the plurality of first electrodes 21 are electrically connected to each other, the plurality of second electrodes 22 are electrically connected to each other, and the plurality of third electrodes 31 are also electrically connected to each other.

如图9和图10，示例性的给出了设置在第一电极板200上的感应电极组(201、202)中的第一电极21具有四个，分别为相互电连接的第一电极21-1、第一电极21-2、第一电极21-3和第一电极21-4，以及示例性的给出了感应电极组(201、202)中的第二电极22也具有四个，分别为相互电连接的第二电极22-1、第二电极22-2、第三电极22-3和第二电极22-4。另外，这些多个第一电极和多个第二电极沿着X方向依次交替排布，比如，第一电极21-1、第二电极22-1、第一电极21-2、第二电极22-2、第一电极21-3、第三电极22-3、第一电极21-4和第二电极22-4沿着X方向依次排布。As shown in Fig. 9 and Fig. 10, the first electrodes 21 in the induction electrode group (201, 202) arranged on the first electrode plate 200 are exemplarily given to have four first electrodes 21 electrically connected to each other. -1, the first electrode 21-2, the first electrode 21-3, and the first electrode 21-4, and the exemplary second electrode 22 in the sensing electrode group (201, 202) also has four, They are respectively the second electrode 22-1, the second electrode 22-2, the third electrode 22-3 and the second electrode 22-4 which are electrically connected to each other. In addition, these multiple first electrodes and multiple second electrodes are arranged alternately along the X direction, for example, the first electrode 21-1, the second electrode 22-1, the first electrode 21-2, the second electrode 22 -2. The first electrode 21-3, the third electrode 22-3, the first electrode 21-4 and the second electrode 22-4 are arranged in sequence along the X direction.

继续结合图9和图10，第一电极21、第三电极31和第二电极22沿着X方向错位设置。比如，如图9和图10，示例性的给出了设置在第二电极板300上的接地电极组301中的第三电极31具有四个，分别为相互电连接的第三电极31-1、第三电极31-2、第三电极31-3和第三电极31-4。并且，任一第三电极31与其相邻的第一电极21和第二电极22形成耦合结构，且任一第一电极21和任一第二电极22属于一个独立的耦合结构，例如，如图9，第一电极21-1、第二电极22-1和第三电极31-1属于耦合结构Q1，第一电极21-2、第二电极22-2和第三电极31-2属于另一个独立的耦合结构Q2。也可以这样理解，相邻的第二电极22-1和第一电极21-2之间不会再设置一个第三电极，即任一个第一电极21、任一个第二电极22和任一第三电极31仅属于一个独立的耦合结构，不会同时处于两个耦合结构中，也就是说，第一电极21的数量和第二电极22的数量相等，第三电极31的数量等于或者小于第一电极21的数量，图9和图10示例性的给出了第一电极21、第二电极22和第三电极31的数量均相等。Continuing to refer to FIG. 9 and FIG. 10 , the first electrode 21 , the third electrode 31 and the second electrode 22 are disposed along the X direction. For example, as shown in FIG. 9 and FIG. 10 , it is exemplary that the third electrode 31 in the ground electrode group 301 arranged on the second electrode plate 300 has four, which are respectively the third electrodes 31-1 electrically connected to each other. , the third electrode 31-2, the third electrode 31-3 and the third electrode 31-4. Moreover, any third electrode 31 forms a coupling structure with its adjacent first electrode 21 and second electrode 22, and any first electrode 21 and any second electrode 22 belong to an independent coupling structure, for example, as shown in FIG. 9. The first electrode 21-1, the second electrode 22-1 and the third electrode 31-1 belong to the coupling structure Q1, and the first electrode 21-2, the second electrode 22-2 and the third electrode 31-2 belong to another Independent coupling structure Q2. It can also be understood in this way that no third electrode will be provided between adjacent second electrodes 22-1 and first electrodes 21-2, that is, any first electrode 21, any second electrode 22 and any first electrode 21-2. The three electrodes 31 only belong to an independent coupling structure, and will not be in two coupling structures at the same time, that is to say, the number of the first electrodes 21 is equal to the number of the second electrodes 22, and the number of the third electrodes 31 is equal to or less than the number of the first electrodes 31. For the number of electrodes 21 , FIG. 9 and FIG. 10 exemplarily show that the numbers of the first electrodes 21 , the second electrodes 22 and the third electrodes 31 are all equal.

基于图9和图10的设计，当第二电极板300相对第一电极板200运动时，多个第一电极21和多个第三电极31形成第一电容器，多个第二电极22和多个第三电极31形成第二电容器。示例的，在图10中，四个第一电极21和四个第三电极31形成第一电容器，四个第二电极22和四个第三电极31形成第二电容器。9 and 10, when the second electrode plate 300 moves relative to the first electrode plate 200, a plurality of first electrodes 21 and a plurality of third electrodes 31 form a first capacitor, and a plurality of second electrodes 22 and a plurality of A third electrode 31 forms a second capacitor. For example, in FIG. 10 , four first electrodes 21 and four third electrodes 31 form a first capacitor, and four second electrodes 22 and four third electrodes 31 form a second capacitor.

由上述的图9和图10可以看出，本申请给出的电容式力传感器是一种容栅式的传感器结构，在这种栅状结构中，如图9，当第二电极板300相对第一电极板200沿X方向移动ΔX时，本申请的第一电容器和第二电容器的面积变化均为N×H×ΔX，这里的N代表第一电极、第二电极或者第三电极中个数最少的数量，或者为耦合结构的数量，H代表第二电极板300的沿Y方向的尺寸，但是，在现有技术中，当可动的电极板相对定电极板移动ΔX时，电容器的面积变化仅为H×ΔX，进而，由N×H×ΔX和H×ΔX相比，本申请的面积变化明显的增加，当面积变化明显增加时，相对应的电容变化也是成倍的增加，进而，会有效的提升该电容式力传感器的灵敏度，以使得第二电极板300相对第一电极板200在X方向的位移量较小时，也会很灵敏的检测到该位移量，从而测出外力大小。It can be seen from the above-mentioned Figures 9 and 10 that the capacitive force sensor provided by the present application is a capacitive sensor structure. In this grid structure, as shown in Figure 9, when the second electrode plate 300 is opposite to When the first electrode plate 200 moves ΔX along the X direction, the area changes of the first capacitor and the second capacitor of the present application are both N×H×ΔX, where N represents one of the first electrode, the second electrode or the third electrode. The least number, or the number of coupling structures, H represents the size of the second electrode plate 300 along the Y direction, but, in the prior art, when the movable electrode plate moves ΔX relative to the fixed electrode plate, the capacitor’s The area change is only H×ΔX, and furthermore, compared with N×H×ΔX and H×ΔX, the area change of this application is significantly increased. When the area change is significantly increased, the corresponding capacitance change is also doubled. Furthermore, the sensitivity of the capacitive force sensor will be effectively improved, so that when the displacement of the second electrode plate 300 relative to the first electrode plate 200 in the X direction is small, the displacement can be detected very sensitively, thereby measuring The size of the external force.

再结合图9和图10，通过在第一电极板200上设置多个依次交替排布的第一电极21和第二电极22，以与第二电极板300上的多个第三电极31形成第一电容器和第二电容器，在提升电容变化量的前提下，也不需要增加第一电极板200和第二电极板300的沿X方向的尺寸，或者，减小第一电极板200和第二电极板300的沿Z方向的间距，这样设计，就不会增加整个两个电极板的尺寸，也不会对第一电极板200和第二电极板300的安装工艺提出挑战。9 and FIG. 10, by setting a plurality of first electrodes 21 and second electrodes 22 alternately arranged in sequence on the first electrode plate 200, to form a plurality of third electrodes 31 on the second electrode plate 300 The first capacitor and the second capacitor, under the premise of increasing the amount of capacitance change, do not need to increase the size of the first electrode plate 200 and the second electrode plate 300 along the X direction, or reduce the first electrode plate 200 and the second electrode plate 200. The distance between the two electrode plates 300 along the Z direction is designed in such a way that the size of the two electrode plates will not be increased, and the installation process of the first electrode plate 200 and the second electrode plate 300 will not be challenged.

再结合图11所示，图11示出了第一电容器或者第二电容器形成的原理。比如，一并结合图10和图11，第一电极21-1、第一电极21-2、第一电极21-3和第一电极21-4相并联，具有输出端子L1，第三电极31-1、第三电极31-2、第三电极31-3和第三电极31-4相并联，具有输出端子L3，输出端子L1和输出端子L3所输出的电信号示为第一电容器的电容值C1。同理的，第二电极22-1、第二电极22-2、第三电极22-3和第二电极22-4相并联，具有输出端子L2，第三电极31-1、第三电极31-2、第三电极31-3和第三电极31-4相并联，具有输出端子L3，输出端子L2和输出端子L3所输出的电信号示为第二电容器的电容值C2。也就是说，通过相并联的多个可变电容器，形成电容器，这样就可以增大电容变化量，提升测量灵敏度。In combination with FIG. 11 , FIG. 11 shows the principle of forming the first capacitor or the second capacitor. For example, in conjunction with Fig. 10 and Fig. 11, the first electrode 21-1, the first electrode 21-2, the first electrode 21-3 and the first electrode 21-4 are connected in parallel, have an output terminal L1, and the third electrode 31 -1, the third electrode 31-2, the third electrode 31-3 and the third electrode 31-4 are connected in parallel, and have an output terminal L3, the electrical signal output by the output terminal L1 and the output terminal L3 is shown as the capacitance of the first capacitor value C1. Similarly, the second electrode 22-1, the second electrode 22-2, the third electrode 22-3 and the second electrode 22-4 are connected in parallel and have an output terminal L2, the third electrode 31-1, the third electrode 31 -2. The third electrode 31-3 and the third electrode 31-4 are connected in parallel, and have an output terminal L3, and the electrical signal output by the output terminal L2 and the output terminal L3 is shown as the capacitance value C2 of the second capacitor. That is to say, a capacitor is formed by connecting multiple variable capacitors in parallel, so that the amount of capacitance change can be increased and the measurement sensitivity can be improved.

继续结合图9和图10，沿X方向，任一第一电极21和任一第二电极22的线性宽度均为W1，每相邻的第一电极21和第二电极22的线性宽度为W2，且任一第三电极的线性宽度为W，每相邻的两个第三电极31之间的线性宽度为W，其中，W＝W1+W2。可以这样讲，第一电极21的排布周期为2W，第二电极22的排布周期也为2W，每一个第一电极21和每一个第二电极22的沿X方向的宽度均为W1，每相邻的第一电极21和第二电极22的间距为W2，每一个第三电极31的沿X方向的宽度均为W＝W1+W2，每相邻的两个第三电极31之间的宽度为W＝W1+W2。Continuing with FIG. 9 and FIG. 10 , along the X direction, the linear width of any first electrode 21 and any second electrode 22 is W1, and the linear width of each adjacent first electrode 21 and second electrode 22 is W2 , and the linear width of any third electrode is W, and the linear width between every two adjacent third electrodes 31 is W, wherein W=W1+W2. It can be said that the arrangement period of the first electrodes 21 is 2W, the arrangement period of the second electrodes 22 is also 2W, and the width of each first electrode 21 and each second electrode 22 along the X direction is W1, The distance between every adjacent first electrode 21 and second electrode 22 is W2, the width of each third electrode 31 along the X direction is W=W1+W2, between every two adjacent third electrodes 31 The width of is W=W1+W2.

当第一电极、第二电极和第三电极按照上述尺寸限定时，带动动电极板运动的弹性体40受到X方向上的最大力而导致的移动量不应该超过W1/2。When the first electrode, the second electrode and the third electrode are defined according to the above-mentioned dimensions, the movement of the elastic body 40 driving the electrode plate under the maximum force in the X direction should not exceed W1/2.

还有，第一电极21和第二电极22在第二电极板300上的正投影，沿着与X方向相垂直的Y方向，覆盖第三电极31。即沿着Y方向，第一电极21和第二电极22的尺寸大于第三电极31的尺寸。或者，在另外一些实施方式中，第三电极31在第一电极板200上的正投影，沿着与X方向相垂直的Y方向，覆盖第一电极21和第二电极22。即沿着Y方向，第三电极31的尺寸大于第一电极21和第二电极22的尺寸。总之，需要第三电极31的沿Y方向的尺寸与第一电极21的沿Y方向的尺寸不相等，比如，如图10所示的，沿Y方向，第三电极31的尺寸为H2，第一电极21和第二电极22的尺寸为H1，且H1不等于H2。In addition, the orthographic projections of the first electrode 21 and the second electrode 22 on the second electrode plate 300 cover the third electrode 31 along the Y direction perpendicular to the X direction. That is, along the Y direction, the size of the first electrode 21 and the second electrode 22 is larger than the size of the third electrode 31 . Alternatively, in other embodiments, the orthographic projection of the third electrode 31 on the first electrode plate 200 covers the first electrode 21 and the second electrode 22 along the Y direction perpendicular to the X direction. That is, along the Y direction, the size of the third electrode 31 is larger than the size of the first electrode 21 and the second electrode 22 . In short, it is required that the size of the third electrode 31 along the Y direction is not equal to the size of the first electrode 21 along the Y direction. For example, as shown in FIG. 10 , along the Y direction, the size of the third electrode 31 is H2. The size of the first electrode 21 and the second electrode 22 is H1, and H1 is not equal to H2.

当对第一电极21、第二电极22和第三电极31在Y方向有上述的尺寸约束，且第一电极板200和第二电极板300沿X方向有相对运动时，即使在Y方向上产生较小的位移量，也不会因为在Y方向上的位移量，导致第一电极板和第二电极板之间的有效面积的变化量可变，因此，可以保障测量数据的准确性。When the first electrode 21, the second electrode 22, and the third electrode 31 have the above-mentioned dimensional constraints in the Y direction, and the first electrode plate 200 and the second electrode plate 300 have relative movement along the X direction, even in the Y direction A small amount of displacement is generated, and the amount of change in the effective area between the first electrode plate and the second electrode plate will not be variable due to the amount of displacement in the Y direction, so the accuracy of the measurement data can be guaranteed.

下面对感应电极组(201、202)中的第一电极和第二电极，以及相对应的接地电极组301中的第三电极，他们之间的位置关系进行描述。The positional relationship between the first electrode and the second electrode in the sensing electrode group (201, 202) and the corresponding third electrode in the ground electrode group 301 will be described below.

图12a给出了其中一种位置关系，具体的，在接地电极组301中，沿着多个第三电极的排布方向(即沿图12a的X方向)，第三电极包括相对的第一侧边M1和第二侧边M2，第一侧边M1在第一电极板200上的正投影与第一电极的中心线重合。比如，在图12a中，第三电极31-1的第一侧边M1的第一电极板200上的正投影与第一电极21-1的中心线T1重合，又因为第三电极的线性宽度为第一电极排布周期的二分之一，进而，第三电极31-1的第二侧边M2的第一电极板200上的正投影与第二电极22-1的中心线T2重合。Figure 12a shows one of the positional relationships, specifically, in the ground electrode group 301, along the arrangement direction of multiple third electrodes (that is, along the X direction in Figure 12a), the third electrodes include the opposite first The orthographic projection of the side M1 and the second side M2 on the first electrode plate 200 coincides with the center line of the first electrode. For example, in FIG. 12a, the orthographic projection on the first electrode plate 200 of the first side M1 of the third electrode 31-1 coincides with the centerline T1 of the first electrode 21-1, and because the linear width of the third electrode is half of the first electrode arrangement period, and furthermore, the orthographic projection of the second side M2 of the third electrode 31-1 on the first electrode plate 200 coincides with the central line T2 of the second electrode 22-1.

图12b给出了感应电极组(203、204)中的第一电极和第二电极，以及相对应的接地电极组302中的第三电极，他们之间的位置关系。如图12b所示的，第一电极、第二电极和第三电极的位置关系和图12a所示的一样，也是在接地电极组302中，沿着多个第三电极的排布方向(即沿图12b的X方向)，第三电极包括相对的第一侧边M1和第二侧边M2，第一侧边M1在第一电极板200上的正投影与第一电极的中心线重合。也就是说，第三电极对称的设置在第一电极和第二电极之间。Fig. 12b shows the positional relationship between the first electrode and the second electrode in the sensing electrode group (203, 204), and the corresponding third electrode in the ground electrode group 302. As shown in Figure 12b, the positional relationship of the first electrode, the second electrode and the third electrode is the same as that shown in Figure 12a, also in the ground electrode group 302, along the arrangement direction of multiple third electrodes (ie Along the X direction of FIG. 12b ), the third electrode includes a first side M1 and a second side M2 opposite to each other, and the orthographic projection of the first side M1 on the first electrode plate 200 coincides with the centerline of the first electrode. That is to say, the third electrode is arranged symmetrically between the first electrode and the second electrode.

图13给出了感应电极组201和接地电极组301形成的电容器输出的电容值C1与沿X位移变化的曲线图，也给出了感应电极组202和接地电极组301形成的电容器输出的电容值C2与沿X位移变化的曲线图。由于感应电极组203、感应电极组204和接地电极组302中的电极之间的位置关系，和感应电极组201、感应电极组202和接地电极组301中的电极之间的位置关系相同，从而，感应电极组203和与接地电极组302形成的电容器输出的电容值C3与沿X位移变化的曲线图，和感应电极组204和与接地电极组302形成的电容器输出的电容值C4与沿X位移变化的曲线也如图13所示，即C3曲线与C1曲线一致，C2曲线与C4曲线一致。Fig. 13 has provided the capacitance value C1 of the capacitor output that the sensing electrode group 201 and the ground electrode group 301 form and the graph that changes along X displacement, has also provided the capacitance of the capacitor output that the sensing electrode group 202 and the ground electrode group 301 form Plot of value C2 versus displacement along X. Since the positional relationship between the electrodes in the sensing electrode group 203, the sensing electrode group 204 and the grounding electrode group 302 is the same as the positional relationship between the electrodes in the sensing electrode group 201, the sensing electrode group 202 and the grounding electrode group 301, thus , the graph of the capacitance value C3 of the sensing electrode group 203 and the capacitor output formed with the ground electrode group 302 and the displacement along X, and the capacitance value C4 of the sensing electrode group 204 and the capacitor output formed with the ground electrode group 302 and along X The curve of the displacement change is also shown in Figure 13, that is, the C3 curve is consistent with the C1 curve, and the C2 curve is consistent with the C4 curve.

当第一电极板200和第二电极板300上的第一电极组如图12a所示布设，第一电极板200和第二电极板300上的第二电极组如图12b所示时，本申请给出了一种如何利用输出的电容值，计算得到外力F大小的处理方法。具体的包括，对感应电极组201和接地电极组301形成的第一电容器的电容值C1，和感应电极组202和接地电极组301形成的第二电容器的电容值C2进行差分处理得到C ₁ ^-＝C ₁-C ₂，差分信号C ₁ ^-曲线如图14a所示的，由图14a的差分信号C ₁ ^-的曲线相比图13的电容值C1和电容值C2的曲线，容易看出，在相同位移X变化的情况下，差分信号大小变化是电容值C1或者电容值C2大小变化的两倍，这样的话，力传感器信号的灵敏度就会明显的提升。 When the first electrode group on the first electrode plate 200 and the second electrode plate 300 is arranged as shown in Figure 12a, and the second electrode group on the first electrode plate 200 and the second electrode plate 300 is as shown in Figure 12b, the present invention The application provides a processing method of how to use the output capacitance value to calculate the magnitude of the external force F. Specifically, it includes performing differential processing on the capacitance value C1 of the first capacitor formed by the sensing electrode group 201 and the ground electrode group 301, and the capacitance value C2 of the second capacitor formed by the sensing electrode group 202 and the ground electrode group 301 to obtain C ₁ ^- =C ₁ -C ₂ , the curve of the differential signal C ₁ ^- is shown in Figure 14a, and it is easy to see that the curve of the differential signal C ₁ ^- in Figure 14a is compared with the curves of capacitance C1 and capacitance C2 in Figure 13, In the case of the same change in displacement X, the change in the magnitude of the differential signal is twice the change in the magnitude of the capacitance value C1 or the capacitance value C2. In this case, the sensitivity of the force sensor signal will be significantly improved.

同理的，可以对如图12b所示的第二电极组中，感应电极组203和接地电极组302形成的第一电容器的电容值C3，和感应电极组204和接地电极组302形成的第二电容器的电容值C4也进行差分处理，以得到C ₂ ^-＝C ₃-C ₄，差分信号C ₂ ^-曲线也如图14a所示。 Similarly, in the second electrode group shown in Figure 12b, the capacitance C3 of the first capacitor formed by the sensing electrode group 203 and the ground electrode group 302, and the capacitance value C3 of the first capacitor formed by the sensing electrode group 204 and the ground electrode group 302 can be calculated. The capacitance value C4 of the second capacitor is also differentially processed to obtain C ₂ ⁻ =C ₃ −C ₄ , and the curve of the differential signal C ₂ ⁻ is also shown in FIG. 14 a .

但是，由图14a可以看出，当动电极板相对定电极板仅仅在Z方向上运动，并且X变化为零时，由于电容值C1和电容值C2的数值大小始终相等，差分后的C ₁ ^-无论如何都为零。还有，即使X保持在不为零的位置且不变，仅仅在Z方向上运动，在相同的位移Z变化的情况下，差分信号C ₁ ^-的大小变化比电容值C1或者电容值C2的大小变化小，并且X越接近零，大小变化越小。也可以这样讲，当感应电极组和接地电极组按照图12a和图12b所示布设时，对于面积变化型的力传感器，采用差分信号处理，可以明显的提升测量灵敏度，但是，对于间距变化型的力传感器，仅采用差分信号处理方法，对于灵敏度的提升，效果不是很明显。 However, it can be seen from Figure 14a that when the movable electrode plate moves only in the Z direction relative to the fixed electrode plate, and the X change is zero, since the values of the capacitance value C1 and the capacitance value C2 are always equal, the differential C ₁ ^- is zero anyway. Also, even if X remains at a non-zero position and remains unchanged, only moving in the Z direction, in the case of the same displacement Z changes, the magnitude change of the differential signal C ₁ ^- is greater than that of the capacitance value C1 or capacitance value C2 The size change is small, and the closer X is to zero, the smaller the size change. It can also be said that when the induction electrode group and the ground electrode group are arranged as shown in Figure 12a and Figure 12b, for the area-variable force sensor, the differential signal processing can significantly improve the measurement sensitivity, but for the space-variable force sensor The force sensor only adopts the differential signal processing method, and the effect of improving the sensitivity is not very obvious.

对此，本申请对于图12a和图12b所示的电极布设，还另外提供了一种信号处理方法，即加和信号处理方法。可以这样讲，对感应电极组201和接地电极组301形成的第一电容器的电容值C1，和感应电极组202和接地电极组301形成的第二电容器的电容值C2进行加和处理得到C ₁ ⁺＝C ₁+C ₂，加和信号C ₁ ⁺曲线如图14b所示。由图14b可以看出，在动电极板相对定电极板仅仅在Z方向上运动时，不论X保持在零位置，还是X保持在不为零的位置，加和信号C ₁ ⁺的变化为恒值，也就是说，加和信号C ₁ ⁺的变化与间距变化型电容器的信号变化是相同的。 In this regard, the present application additionally provides a signal processing method for the electrode layout shown in FIG. 12a and FIG. 12b , that is, a sum signal processing method. It can be said that the capacitance value C1 of the first capacitor formed by the sensing electrode group 201 and the ground electrode group 301 and the capacitance value C2 of the second capacitor formed by the sensing electrode group 202 and the ground electrode group 301 are summed to obtain _C1 ⁺ =C ₁ +C ₂ , the curve of the summed signal C ₁ ⁺ is shown in Figure 14b. It can be seen from Fig. 14b that when the moving electrode plate moves only in the Z direction relative to the fixed electrode plate, the change of the summed signal C ₁ ⁺ is constant regardless of whether X is kept at zero position or at a non-zero position. value, that is, the change of the summed signal C ₁ ⁺ is the same as that of the pitch-varying capacitor.

进而，当采用图12a和图12b所示的电极布设时，可以采用相结合的图14a所示的差分信号和图14b所示的加和信号，计算得到所承受外力的大小。Furthermore, when the electrode layout shown in Figure 12a and Figure 12b is used, the combined differential signal shown in Figure 14a and sum signal shown in Figure 14b can be used to calculate the magnitude of the external force.

如图5和图6，沿Y轴布设的感应电极组(205、206)和接地电极组303，以及感应电极组(207、208)和接地电极组304也按照图12a和图12b所示结构布设时，同样的可以采用相结合的差分信号处理方法和加和信号处理方法。还有，对于角度型排布的感应电极组(209、210)和接地电极组305，以及感应电极组(211、212)和接地电极组306按照图12a和图12b所示结构布设时，角度型排布的感应电极组(213、214)和接地电极组307，以及感应电极组(215、216)和接地电极组308也按照图12a和图12b所示结构布设时，都可以采用相结合的差分信号处理方法和加和信号处理方法。As shown in Fig. 5 and Fig. 6, the induction electrode group (205, 206) and the ground electrode group 303 arranged along the Y axis, as well as the induction electrode group (207, 208) and the ground electrode group 304 also follow the structure shown in Fig. 12a and Fig. 12b During layout, the combined differential signal processing method and sum signal processing method can also be used. In addition, when the sensing electrode groups (209, 210) and the ground electrode group 305 arranged in an angle, and the sensing electrode groups (211, 212) and the ground electrode group 306 are arranged according to the structures shown in Fig. 12a and Fig. 12b, the angle When the sensing electrode groups (213, 214) and grounding electrode groups 307 arranged in the same pattern, as well as the sensing electrode groups (215, 216) and grounding electrode groups 308 are also arranged according to the structures shown in Figure 12a and Figure 12b, a combination of The differential signal processing method and the sum signal processing method.

在一些实施方式中，本申请给出的电容式力传感器还可以包括处理器，该处理器可以被设置在图2所示的电路板80上，该处理器可以对电容值进行处理，以得到空间外力大小。例如，当图5和图6所示的第一电极板200和第二电极板300上的16个电容器的电极布设均采用图12a和图12b所示的布设方式时，最终可以得到八个差分信号C ₁ ^-至C ₈ ^-，以及可以得到八个加和信号C ₁ ⁺至C ₈ ⁺。由于图5和图6所示结构可以测量空间六维力，则空间六维力可以表示

其中，

A为常数矩阵，

In some embodiments, the capacitive force sensor provided in the present application can also include a processor, which can be arranged on the circuit board 80 shown in FIG. 2 , and the processor can process the capacitance value to obtain The size of external force in space. For example, when the electrode layout of the 16 capacitors on the first electrode plate 200 and the second electrode plate 300 shown in FIGS. signals C ₁ ^- to C ₈ ^- , and eight summation signals C ₁ ⁺ to C ₈ ⁺ are available. Since the structures shown in Figure 5 and Figure 6 can measure the six-dimensional force in space, the six-dimensional force in space can be expressed as

in,

A is a constant matrix,

在另外一些实施例中，图15a和图15b给出了第一电极板200和第二电极板300上的第一电极组和第二电极组的电极布设的另外一种位置关系。在该实施例中，在第一电极组中，沿着多个第三电极的排布方向(即沿图15a的X方向)，第三电极包括相对的第一侧边M1和第二侧边M2，第一侧边M1在第一电极板200上的正投影与第一电极的中心线重合。比如，在图15a中，第三电极31-1的第一侧边M1的第一电极板200上的正投影与第一电极21-1的中心线T1重合，又因为第三电极的宽度为第一电极排布周期的二分之一，进而，第三电极31-1的第二侧边M2的第一电极板200上的正投影与第二电极22-1的中心线T2重合。In some other embodiments, FIG. 15 a and FIG. 15 b show another positional relationship of electrode arrangement of the first electrode group and the second electrode group on the first electrode plate 200 and the second electrode plate 300 . In this embodiment, in the first electrode group, along the arrangement direction of the plurality of third electrodes (that is, along the X direction in FIG. 15a ), the third electrodes include opposite first side M1 and second side M2, the orthographic projection of the first side M1 on the first electrode plate 200 coincides with the centerline of the first electrode. For example, in FIG. 15a, the orthographic projection on the first electrode plate 200 of the first side M1 of the third electrode 31-1 coincides with the center line T1 of the first electrode 21-1, and because the width of the third electrode is One-half of the first electrode arrangement period, and furthermore, the orthographic projection of the second side M2 of the third electrode 31-1 on the first electrode plate 200 coincides with the central line T2 of the second electrode 22-1.

但是，在感应电极组203、感应电极组204和相对应的接地电极组302形成的第二电极组中，如图15b所示的，第三电极31-1的第一侧边M1的第一电极板200上的正投影与第一电极21-1和第二电极22-1之间的间距的中心线T3重合，又因为第三电极的宽度为第一电极排布周期的二分之一，进而，第三电极31-1的第二侧边M2的第一电极板200上的正投影与第二电极22-1和第一电极21-2之间的间距的中心线T4重合。However, in the second electrode group formed by the sensing electrode group 203, the sensing electrode group 204 and the corresponding grounding electrode group 302, as shown in FIG. 15b, the first side of the first side M1 of the third electrode 31-1 The orthographic projection on the electrode plate 200 coincides with the center line T3 of the distance between the first electrode 21-1 and the second electrode 22-1, and because the width of the third electrode is 1/2 of the arrangement period of the first electrode Furthermore, the orthographic projection of the second side M2 of the third electrode 31-1 on the first electrode plate 200 coincides with the center line T4 of the distance between the second electrode 22-1 and the first electrode 21-2.

在第一电极组中，感应电极组201和与接地电极组301形成的电容器输出的电容值C1与沿X位移变化的曲线图如图13所示，和感应电极组202和与接地电极组301形成的电容器输出的电容值C2与沿X位移变化的曲线图也如图13所示。然而，在第二电极组中，感应电极组203和与接地电极组302形成的电容器输出的电容值C3，和感应电极组204和与接地电极组302形成的电容器输出的电容值C4，与沿X位移变化的曲线图如图16所示。对电容值C1和电容值C2进行差分处理得到C ₁ ^-＝C ₁-C ₂，同理的，对电容值C3和电容值C4进行差分处理得到C ₂ ^-＝C ₃-C ₄。图17示出了C ₁ ^-和C ₂ ^-沿X位移变化的曲线，由图17容易证明，当动电极板相对定电极板仅仅在Z方向上运动时，如论X变化为零，还是X变化不为零，差分后的C ₁ ^-都为零，但是，电容值C3和电容值C4中的一个处于最大值，一个处于最小值，差分后的信号C ₂ ^-处于极值，并且可以表示间距变化的电容值。 In the first electrode group, the capacitance value C1 of the capacitor output formed by the sensing electrode group 201 and the ground electrode group 301 and the graph of the displacement along X are shown in Figure 13, and the sensing electrode group 202 and the ground electrode group 301 The graph of the capacitance value C2 of the formed capacitor output and the displacement along X is also shown in FIG. 13 . However, in the second electrode group, the capacitance value C3 of the sensing electrode group 203 and the capacitor output formed with the ground electrode group 302, and the capacitance value C4 of the sensing electrode group 204 and the capacitor output formed with the ground electrode group 302, are the same as those along the The graph of X displacement variation is shown in FIG. 16 . Perform differential processing on capacitance C1 and capacitance C2 to obtain C ₁ ^- =C ₁ -C ₂ , and similarly, perform differential processing on capacitance C3 and capacitance C4 to obtain C ₂ ⁻ =C ₃ -C ₄ . Figure 17 shows the curves of C ₁ ^- and C ₂ ^- along the X displacement change. It is easy to prove from Figure 17 that when the moving electrode plate moves only in the Z direction relative to the fixed electrode plate, if the X change is zero, it is still X The change is not zero, C ₁ ^- after the difference is all zero, however, one of the capacitance value C3 and the capacitance value C4 is at the maximum value, one is at the minimum value, and the signal C ₂ ^- after the difference is at the extreme value, and it can be expressed Capacitance value for pitch variation.

当图5和图6所示的第一电极板200和第二电极板300上的16个电容器的电极布设均采用图15a和图15b所示的布设方式时，最终可以得到八个差分信号C ₁ ^-至C ₈ ^-，则空间六维力则可以表示

其中，

A为常数矩阵，

When the electrodes of the 16 capacitors on the first electrode plate 200 and the second electrode plate 300 shown in Figure 5 and Figure 6 are arranged in the way shown in Figure 15a and Figure 15b, eight differential signals C ₁ ^- to C ₈ ^- , then the six-dimensional force in space can be expressed

in,

A is a constant matrix,

也可以这样理解，本申请针对两种不同的电极布设方式，给出了两种不同的信号处理方法，这两种不同的电极布设方式，和两种不同的信号处理方法，不仅对于面积变化型的电容器，还是间距变化型的电容器，均可以提升测量力的灵敏度。另外，当采用图15a和图15b所示的电极布设方式时，信号处理方法的计算复杂度降低，这样的话，可以提升测量速率，进一步的提升用户体验度。It can also be understood that this application provides two different signal processing methods for two different electrode layout methods. These two different electrode layout methods and two different signal processing methods are not only for area-variable Capacitors, or capacitors with variable spacing, can improve the sensitivity of the measurement force. In addition, when the electrode layout shown in FIG. 15a and FIG. 15b is adopted, the computational complexity of the signal processing method is reduced. In this case, the measurement rate can be increased, and user experience can be further improved.

上述介绍了电容器包括第一电极板200和第二电极板300时，给出了至少两种电极布设方式，和相对应的信号处理方法。总而言之，给出的测量力的电容传感器不仅面积变化增多，而且采用差分信号处理方法也可以使得电容变化加倍，以提升测量的灵敏度。When the capacitor includes the first electrode plate 200 and the second electrode plate 300 as described above, at least two electrode layout methods and corresponding signal processing methods are given. All in all, the given capacitive sensor for force measurement not only increases the area change, but also doubles the capacitance change by using the differential signal processing method to improve the measurement sensitivity.

除此之外，本申请给出的容栅式的电容器，还可以减弱甚至消除信号串扰，和实现力解耦的问题，具体体现在：沿X方向的面积变化型电容器的电容变化，和沿Y方向的面积变化型电容器的电容变化互不影响；沿X和Y方向的面积变化型电容器的电容变化，与两个45°方向布设的面积变化型电容器的电容变化相互影响甚微；另外，面积变化型电容器的电容变化和间距变化型电容器的电容变化相互影响甚微。In addition, the capacitive capacitor provided in this application can also reduce or even eliminate signal crosstalk and realize the problem of force decoupling, which is specifically reflected in: the capacitance change of the area-varying capacitor along the X direction, and the The capacitance changes of the area variable capacitors in the Y direction do not affect each other; the capacitance changes of the area variable capacitors along the X and Y directions have little interaction with the capacitance changes of the two area variable capacitors arranged in the 45° direction; in addition, The capacitance change of the area variable capacitor and the capacitance change of the pitch variable capacitor have little influence on each other.

上述给出的是呈线性排布的电极组，以及对应的信号处理方法，下面结合图18和图19介绍角度型排布的电极组的具体布设方式，以及对应的信号处理方法。The above is the linearly arranged electrode groups and the corresponding signal processing method. The following describes the specific layout of the angularly arranged electrode groups and the corresponding signal processing method with reference to FIG. 18 and FIG. 19 .

图18给出了第一电极板200上的角度型排布的感应电极组(209、210)、感应电极组(211、212)、感应电极组(213、214)和感应电极组(215、216)的一种可实现的排布方式，图19是感应电极组(209、210)电极排布的放大图。一并结合图18和图19，感应电极组(209、210)的多个第一电极和多个第二电极沿着第一电极板200的周向交替排布，比如，第一电极21-1、第二电极22-1、第一电极21-2、第二电极22-2、第一电极21-3、第二电极22-3、第一电极21-4、第二电极22-4和第一电极21-5沿着第一电极板200的周向依次排布。Fig. 18 shows the sensing electrode groups (209, 210), sensing electrode groups (211, 212), sensing electrode groups (213, 214) and sensing electrode groups (215, 214) arranged in an angle on the first electrode plate 200. 216), an achievable arrangement of the sensing electrode groups (209, 210) in FIG. 19 is an enlarged view. 18 and 19 together, a plurality of first electrodes and a plurality of second electrodes of the induction electrode group (209, 210) are alternately arranged along the circumferential direction of the first electrode plate 200, for example, the first electrodes 21- 1. Second electrode 22-1, first electrode 21-2, second electrode 22-2, first electrode 21-3, second electrode 22-3, first electrode 21-4, second electrode 22-4 and the first electrodes 21 - 5 are sequentially arranged along the circumferential direction of the first electrode plate 200 .

还有，任一第一电极21和任一第二电极22的角度宽度均为W1，每相邻的第一电极21和第二电极22的角度宽度为W2，第一电极21的排布周期为2W，第二电极22的排布周期也为2W，W＝W1+W2。In addition, the angular width of any first electrode 21 and any second electrode 22 is W1, the angular width of each adjacent first electrode 21 and second electrode 22 is W2, and the arrangement period of the first electrode 21 is 2W, the arrangement period of the second electrodes 22 is also 2W, W=W1+W2.

图20给出了第二电极板300上的角度型排布的接地电极组305至接地电极组308的一种可实现的排布方式，图21是接地电极组305的电极排布的放大图。一并结合图20和图21，接地电极组的多个第三电极沿着第二电极板300的周向依次排布，比如，第三电极31-1、第三电极31-2、第三电极31-3和第三电极31-4沿着第二电极板300的周向依次排布。FIG. 20 shows a possible arrangement of the angularly arranged ground electrode group 305 to the ground electrode group 308 on the second electrode plate 300, and FIG. 21 is an enlarged view of the electrode arrangement of the ground electrode group 305. . 20 and 21 together, a plurality of third electrodes of the ground electrode group are sequentially arranged along the circumferential direction of the second electrode plate 300, for example, the third electrode 31-1, the third electrode 31-2, the third electrode The electrodes 31 - 3 and the third electrodes 31 - 4 are arranged in sequence along the circumferential direction of the second electrode plate 300 .

且任一第三电极的角度宽度为W，每相邻的两个第三电极31之间的角度宽度为W，其中，W＝W1+W2。And the angular width of any third electrode is W, and the angular width between every two adjacent third electrodes 31 is W, wherein W=W1+W2.

对于图18至图21所示的第一电极板200和第二电极板300上的电极依照角度型排布时，对于角度型排布的第一电极、第二电极和第三电极之间的位置关系至少包括两种情况，比如，可以是按照上述图12a和图12b所示的布设方式设置，或者，也可以按照上述图15a和图15b所示的布设方式设计。When the electrodes on the first electrode plate 200 and the second electrode plate 300 shown in FIGS. 18 to 21 are arranged in an angular manner, the The positional relationship includes at least two situations. For example, it can be set according to the layout shown in the above-mentioned Figure 12a and Figure 12b, or it can also be designed according to the layout shown in the above-mentioned Figure 15a and Figure 15b.

如果角度型排布的电极组按照上述图12a和图12b所示的布设方式设置时，信号处理方法可以参照上述，即采用差分信号处理和加和信号处理，求得空间外力的大小。如果角度型排布的电极组按照上述图15a和图15b所示的布设方式设置时，信号处理方法也可以参照上述方法，也就是仅采用差分信号处理，算得空间外力的大小。If the electrode groups arranged in an angle are set according to the arrangement shown in Fig. 12a and Fig. 12b above, the signal processing method can refer to the above, that is, use differential signal processing and summation signal processing to obtain the magnitude of the external force in space. If the electrode groups arranged in an angle are set according to the arrangement shown in Fig. 15a and Fig. 15b above, the signal processing method can also refer to the above method, that is, only the differential signal processing is used to calculate the magnitude of the external force in space.

上述给出的力传感器中，示例性的给出了包括第一电极板200和第二电极板300的力传感器结构。下面给出了另外一种力传感器结构，如图22所示，不仅包括了上述实施例示出的第一电极板200和第二电极板300，还包括了第三电极板400，图22示出了第一电极板200、第二电极板300和第三电极板400的剖面图，图23给出了第一电极板200、第二电极板300和第三电极板400的电极分布图。Among the force sensors given above, the structure of the force sensor including the first electrode plate 200 and the second electrode plate 300 is exemplarily given. Another force sensor structure is given below, as shown in Figure 22, which not only includes the first electrode plate 200 and the second electrode plate 300 shown in the above embodiments, but also includes a third electrode plate 400, as shown in Figure 22 23 shows the electrode distribution diagram of the first electrode plate 200, the second electrode plate 300 and the third electrode plate 400.

如图22，第三电极板400设置在第二电极板300的背离第一电极板200的一侧。当第二电极板300为定电极板时，第一电极板200和第三电极板400均为可以相对第二电极板300运动的动电极板。在另外一些实施方式中，当第二电极板300为动电极板时，第一电极板200和第三电极板400均为定电极板。As shown in FIG. 22 , the third electrode plate 400 is disposed on a side of the second electrode plate 300 away from the first electrode plate 200 . When the second electrode plate 300 is a fixed electrode plate, both the first electrode plate 200 and the third electrode plate 400 are movable electrode plates that can move relative to the second electrode plate 300 . In other embodiments, when the second electrode plate 300 is a moving electrode plate, both the first electrode plate 200 and the third electrode plate 400 are fixed electrode plates.

图22中的动电极板的运动方向至少包括：动电极板相对定电极板沿平行于定电极板的方向移动，动电极板相对定电极板沿垂直于定电极板的方向移动，动电极板相对定电极板沿平行于定电极板的轴线转动，动电极板相对定电极板沿平行于定电极板的轴线转动。例如，如图22和图23所示的，动电极板相对定电极板沿X轴、Y轴和Z轴平动，以及还可以绕X轴、Y轴和Z轴转动。和上述的包括第一电极板200和第二电极板300的力传感器结构一样，图22给出的力传感器结构不仅属于面积变化型传感器，还属于间距变化型传感器。The moving direction of the movable electrode plate in Fig. 22 at least includes: the movable electrode plate moves relative to the fixed electrode plate along the direction parallel to the fixed electrode plate, the movable electrode plate moves relative to the fixed electrode plate along the direction perpendicular to the fixed electrode plate, and the movable electrode plate moves along the direction perpendicular to the fixed electrode plate. The relative fixed electrode plate rotates along the axis parallel to the fixed electrode plate, and the movable electrode plate rotates relative to the fixed electrode plate along the axis parallel to the fixed electrode plate. For example, as shown in FIG. 22 and FIG. 23 , the movable electrode plate can translate along the X-axis, Y-axis and Z-axis relative to the fixed electrode plate, and can also rotate around the X-axis, Y-axis and Z-axis. Like the above-mentioned force sensor structure including the first electrode plate 200 and the second electrode plate 300 , the force sensor structure shown in FIG. 22 is not only an area change sensor, but also a pitch change sensor.

一并结合图22和图23，可以这样理解本实施例，第一电极板200具有与第二电极板300相对的A1面，第二电极板300具有与第一电极板200相对的B1面，A1面上布设有依次交替排布的第一电极21和第二电极22，B1面上布设有与第一电极21和第二电极22错位的第三电极31，上述已经介绍了第一电极21、第二电极22和第三电极31的位置关系，尺寸约束，在此不再赘述。Combined with FIG. 22 and FIG. 23 , this embodiment can be understood in this way, the first electrode plate 200 has an A1 surface opposite to the second electrode plate 300, and the second electrode plate 300 has a B1 surface opposite to the first electrode plate 200, The first electrode 21 and the second electrode 22 arranged alternately in sequence are arranged on the A1 surface, and the third electrode 31 which is offset from the first electrode 21 and the second electrode 22 is arranged on the B1 surface. The first electrode 21 has been introduced above. , the positional relationship between the second electrode 22 and the third electrode 31 , and size constraints, which will not be repeated here.

还有，再结合图22和图23，第二电极板300具有与第三电极板400相对的B2面，第三电极板400具有与第二电极板300相对的C1面，B2面上布设有多个第三电极31，C1面上布设有多个第一电极21和多个第二电极22。并且B2面和C1面上的电极布设，可以和B1面和A1面上的电极布设如图22所示的对称设置。Also, in combination with Fig. 22 and Fig. 23, the second electrode plate 300 has a B2 surface opposite to the third electrode plate 400, the third electrode plate 400 has a C1 surface opposite to the second electrode plate 300, and the B2 surface is arranged with A plurality of third electrodes 31, a plurality of first electrodes 21 and a plurality of second electrodes 22 are arranged on the C1 surface. And the electrode layout on the B2 surface and the C1 surface can be arranged symmetrically with the electrode layout on the B1 surface and the A1 surface as shown in FIG. 22 .

如图23，A1面上的多个第一电极21和B1面上的多个第三电极31形成电容器，且输出的电容值为C1，A1面上的多个第二电极22和B1面上的多个第三电极31形成另一电容器，且输出的电容值为C2；还有，C1面上的多个第一电极21和B2面上的多个第三电极31形成电容器，且输出的电容值为C5，C1面上的多个第二电极22和B2面上的多个第三电极31形成又一电容器，且输出的电容值为C6。如此设置的话，将图22、图23和图5、图6相结合，本实施例给出的力传感器包括32个电容器，相比上述的包括第一电极板200和第二电极板300的力电容器结构，明显的增加了电容器的数量，以及，还可以增加面积变化量，提升测量灵敏度。As shown in Figure 23, a plurality of first electrodes 21 on the A1 surface and a plurality of third electrodes 31 on the B1 surface form a capacitor, and the output capacitance value is C1, and a plurality of second electrodes 22 on the A1 surface and the B1 surface A plurality of third electrodes 31 form another capacitor, and the capacitance value of the output is C2; also, a plurality of first electrodes 21 on the C1 face and a plurality of third electrodes 31 on the B2 face form a capacitor, and the output The capacitance value is C5, the multiple second electrodes 22 on the C1 surface and the multiple third electrodes 31 on the B2 surface form another capacitor, and the output capacitance value is C6. If so set up, combining Figure 22 and Figure 23 with Figure 5 and Figure 6, the force sensor provided in this embodiment includes 32 capacitors, compared to the above-mentioned force sensor including the first electrode plate 200 and the second electrode plate 300 The capacitor structure significantly increases the number of capacitors, and can also increase the amount of area change and improve measurement sensitivity.

为了以下描述方便，如图24a所示的，可以把位于B1面和A1面上的电极组叫做第一电极组，位于B2面和C1面上的电极组叫做第三电极组，可以这样讲，第一电极组和第三电极组是设置在第二电极板300的相对的两侧；另外，在第一电极板200和第二电极板300上，如图24b所示的，把与第一电极组关于第一电极板200和第二电极板300中心相对设置的称为第二电极组，在第二电极板300和第三电极板400上，且与第二电极组关于第二电极板200相对设置的称为第四电极组。For the convenience of the following description, as shown in Figure 24a, the electrode group located on the B1 surface and the A1 surface can be called the first electrode group, and the electrode group located on the B2 surface and the C1 surface can be called the third electrode group. It can be said that, The first electrode group and the third electrode group are arranged on opposite sides of the second electrode plate 300; in addition, on the first electrode plate 200 and the second electrode plate 300, as shown in FIG. The electrode group that is arranged opposite to the center of the first electrode plate 200 and the second electrode plate 300 is called the second electrode group, on the second electrode plate 300 and the third electrode plate 400, and is related to the second electrode group on the second electrode plate 200 opposite to each other is called the fourth electrode group.

下面结合附图给出了第一电极组、第二电极组、第三电极组和第四电极组的电极的不同布设方式。The different layout methods of the electrodes of the first electrode group, the second electrode group, the third electrode group and the fourth electrode group are given below with reference to the accompanying drawings.

如图24a所述，在相对的第一电极组和第三电极组中，第二电极板300上的第三电极的相对两侧边中的第一侧边与第一电极的中心线T1重合，第二侧边与第二电极的中心线T2重合。比如，在第一电极组中，第三电极3011的相对两侧边分别与对应的第一电极板200上的第一电极2011的中心线T1和第二电极2021的中心线T2重合，类似的，第三电极3012的相对两侧边分别与对应的第三电极板400上的第一电极2012的中心线T1和第二电极2022的中心线T2重合；在第三电极组中，第三电极3021的相对两侧边分别与对应的第一电极板200上的第一电极2021的中心线T1和第二电极2021的中心线T2重合，类似的，第三电极3012的相对两侧边分别与对应的第三电极板400上的第一电极2012的中心线T1和第二电极2022的中心线T2重合。As shown in FIG. 24a, in the opposite first electrode group and the third electrode group, the first side of the opposite two sides of the third electrode on the second electrode plate 300 coincides with the centerline T1 of the first electrode , the second side coincides with the centerline T2 of the second electrode. For example, in the first electrode group, the opposite sides of the third electrode 3011 coincide with the centerline T1 of the first electrode 2011 and the centerline T2 of the second electrode 2021 on the corresponding first electrode plate 200, similarly , the opposite sides of the third electrode 3012 coincide with the centerline T1 of the first electrode 2012 and the centerline T2 of the second electrode 2022 on the corresponding third electrode plate 400 respectively; in the third electrode group, the third electrode The opposite sides of 3021 coincide with the center line T1 of the first electrode 2021 and the center line T2 of the second electrode 2021 on the corresponding first electrode plate 200 respectively. Similarly, the opposite sides of the third electrode 3012 coincide with The centerline T1 of the first electrode 2012 on the corresponding third electrode plate 400 coincides with the centerline T2 of the second electrode 2022 .

如图24b所示，在相对的第二电极组和第四电极组中，电极布设方式和上述的第一电极组和第三电极组的电极布设方式一样，在此不再赘述。As shown in FIG. 24b, in the opposite second electrode group and the fourth electrode group, the electrode layout method is the same as that of the above-mentioned first electrode group and the third electrode group, and will not be repeated here.

那么，相对应的信号处理方式可以包括处理器根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-；以及，根据求和公式C ₁ ^U+＝C ₁+C ₂求得C ₁ ^U+，根据求和公式C ₁ ^D+＝C ₅+C ₆求得C ₁ ^D+；处理器再根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-和C ₁ ⁺＝C ₁ ^U+-C ₁ ^D+，计算所述力传感器所承受空间外力F的大小。 Then, the corresponding signal processing method may include that the processor obtains C ₁ U- according _to the differential formula C 1 ^U- = ^C ₁ -C ₂ , and obtains C ₁ ^D according to the differential formula C ₁ ^D- =C ₅ -C ₆ ^- ; and, obtain C ₁ ^{U+ according to the summation formula C 1 U+} =C ₁ +C ₂ , and obtain C ₁ ^D+ according to the summation formula C ₁ ^D+ =C ₅ +C ₆ ^; the processor then calculates according to C ₁ _- ⁼ C ₁ ^U- +C ₁ ^D- and C ₁ ⁺ =C ₁ ^U+ -C ₁ ^D+ , calculate the magnitude of the external force F in space that the force sensor bears.

在一种实施例中，当图24a和图24b所示的第一电极板200、第二电极板300和第三电极板400上的电极如图5和图6示出，具有八组电极组，且这八组电极组沿着第一电极板200、第二电极板300和第三电极板400的周向等间距布设时，可以得到八个差分信号C ₁ ^-至C ₈ ^-，以及可以得到八个加和信号C ₁ ⁺至C ₈ ⁺，则空间六维力则可以表示

其中，

A为常数矩阵，

In one embodiment, when the electrodes on the first electrode plate 200 shown in Figure 24a and Figure 24b, the second electrode plate 300 and the third electrode plate 400 are shown in Figure 5 and Figure 6, there are eight groups of electrode groups , and these eight sets of electrode groups are arranged at equal intervals along the circumference of the first electrode plate 200, the second electrode plate 300 and the third electrode plate 400, eight differential signals C ₁ ^- to C ₈ ^- can be obtained, and can be Get eight summation signals C ₁ ⁺ to C ₈ ⁺ , then the six-dimensional force in space can be expressed

in,

A is a constant matrix,

这样看来，包含第一电极板200、第二电极板300和第三电极板400的力传感器，由于增加了第三电极板400，面积变化量更大，从而加倍了面积变化型的电容的灵敏度；除此之外，这种结构也增加了间距变化型电容的差分形式，也使得间距变化型的电容的灵敏度加倍提升。From this point of view, the force sensor including the first electrode plate 200, the second electrode plate 300 and the third electrode plate 400, due to the addition of the third electrode plate 400, has a larger area change, thereby doubling the capacitance of the area change type. Sensitivity; In addition, this structure also increases the differential form of the pitch-varying capacitor, and doubles the sensitivity of the pitch-varying capacitor.

如图25a和图25b所述，给出了第一电极组、第二电极组、第三电极组和第四电极组中的电极的另外一种布设方式。具体的，见图25a，在第一电极组和第三电极组中，第二电极板300上的第三电极的相对两侧边中的第一侧边与第一电极的中心线T1重合，第二侧边与第二电极的中心线T2重合。比如，在第一电极组中，第三电极3011的相对两侧边分别与对应的第一电极板200上的第一电极2011的中心线T1和第二电极2021的中心线T2重合，类似的，第三电极3012的相对两侧边分别与对应的第三电极板400上的第一电极2012的中心线T1和第二电极2022的中心线T2重合；在第三电极组中，第三电极3021的相对两侧边分别与对应的第一电极板200上的第一电极2021的中心线T1和第二电极2021的中心线T2重合，类似的，第三电极3012的相对两侧边分别与对应的第三电极板400上的第一电极2012的中心线T1和第二电极2022的中心线T2重合。As shown in Fig. 25a and Fig. 25b, another way of arranging the electrodes in the first electrode group, the second electrode group, the third electrode group and the fourth electrode group is given. Specifically, as shown in FIG. 25a, in the first electrode group and the third electrode group, the first side of the opposite sides of the third electrode on the second electrode plate 300 coincides with the centerline T1 of the first electrode, The second side coincides with the centerline T2 of the second electrode. For example, in the first electrode group, the opposite sides of the third electrode 3011 coincide with the centerline T1 of the first electrode 2011 and the centerline T2 of the second electrode 2021 on the corresponding first electrode plate 200, similarly , the opposite sides of the third electrode 3012 coincide with the centerline T1 of the first electrode 2012 and the centerline T2 of the second electrode 2022 on the corresponding third electrode plate 400 respectively; in the third electrode group, the third electrode The opposite sides of 3021 coincide with the center line T1 of the first electrode 2021 and the center line T2 of the second electrode 2021 on the corresponding first electrode plate 200 respectively. Similarly, the opposite sides of the third electrode 3012 coincide with The centerline T1 of the first electrode 2012 on the corresponding third electrode plate 400 coincides with the centerline T2 of the second electrode 2022 .

但是，见图25b，在相对的第二电极组和第四电极组中，第三电极的第一侧边在第一电极板200上的正投影与第一电极和第二电极之间的间距的中心线重合。比如，在图25b的第二电极组中，第三电极3021的一侧边与对应的第一电极板200上的第一电极2031和第二电极2041之间的间距的中心线T3重合，第三电极3021的另一侧边与对应的第一电极板200上的另一第一电极2031和第二电极2041之间的间距的中心线T4重合；类似的，在第四电极组中，第三电极3022的一侧边与对应的第三电极板400上的第一电极2032和第二电极2042之间的间距的中心线T3重合，第三电极3022的另一侧边与对应的第一电极板200上的另一第一电极2032和第二电极2042之间的间距的中心线T4重合。But, see Fig. 25b, in the opposite second electrode group and the fourth electrode group, the orthographic projection of the first side of the third electrode on the first electrode plate 200 and the distance between the first electrode and the second electrode centerlines coincide. For example, in the second electrode group in FIG. 25b, one side of the third electrode 3021 coincides with the center line T3 of the distance between the first electrode 2031 and the second electrode 2041 on the corresponding first electrode plate 200, and the second The other side of the three electrodes 3021 coincides with the center line T4 of the distance between another first electrode 2031 and the second electrode 2041 on the corresponding first electrode plate 200; similarly, in the fourth electrode group, the first One side of the three electrodes 3022 coincides with the centerline T3 of the distance between the first electrode 2032 and the second electrode 2042 on the corresponding third electrode plate 400, and the other side of the third electrode 3022 coincides with the corresponding first electrode 2032 and the second electrode 2042. The center line T4 of the distance between the other first electrode 2032 and the second electrode 2042 on the electrode plate 200 coincides.

进而，相对应的信号处理方法可以包括处理器根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-；再根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-，计算该力传感器所承受空间外力F的大小。 Furthermore, the corresponding signal processing method may include that the processor obtains C ₁ U- according _to the differential formula C 1 ^U- =C ₁ ^-C ₂ , and obtains C ₁ ^D according to the differential formula C ₁ ^D- =C ₅ -C ₆ ^- ; Then according to C ₁ ^- =C ₁ ^U- +C ₁ ^D- , calculate the magnitude of the external force F in space that the force sensor bears.

在一种实施例中，当图25a和图25b所示的第一电极板200、第二电极板300和第三电极板400上的电极如图5和图6示出，具有八组电极组，且这八组电极组沿着第一电极板200、第二电极板300和第三电极板400的周向等间距布设时，可以得到八个差分信号C ₁ ^-至C ₈ ^-，则空间六维力则可以表示

其中，

A为常数矩阵，

In one embodiment, when the electrodes on the first electrode plate 200 shown in Figure 25a and Figure 25b, the second electrode plate 300 and the third electrode plate 400 are shown in Figure 5 and Figure 6, there are eight groups of electrode groups , and these eight sets of electrode groups are arranged at equal intervals along the circumference of the first electrode plate 200, the second electrode plate 300 and the third electrode plate 400, eight differential signals C ₁ ^- to C ₈ ^- can be obtained, then the space The six-dimensional force can represent

in,

A is a constant matrix,

和上述包括第一电极板200、第二电极板300和第三电极板400中电极布设所达到的效果类似，均加倍了面积变化型电容的灵敏度，也增加了间距变化型电容的差分形式，使得间距变化型的电容的灵敏度加倍提升。Similar to the effect achieved by the arrangement of electrodes in the first electrode plate 200, the second electrode plate 300 and the third electrode plate 400 above, the sensitivity of the area variable capacitance is doubled, and the differential form of the pitch variable capacitance is also increased. This doubles the sensitivity of the pitch-variable capacitor.

在本说明书的描述中，具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in an appropriate manner.

以上所述，仅为本申请的具体实施方式，但本申请的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本申请揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本申请的保护范围之内。因此，本申请的保护范围应以所述权利要求的保护范围为准。The above is only a specific implementation of the application, but the scope of protection of the application is not limited thereto. Anyone familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the application. Should be covered within the protection scope of this application. Therefore, the protection scope of the present application should be determined by the protection scope of the claims.

Claims

一种电容式力传感器，其特征在于，包括：A capacitive force sensor, characterized in that, comprising:

第一电极板；first electrode plate;

第二电极板，与所述第一电极板相对设置，且所述第一电极板和第二电极板之间具有间距，所述第一电极板和所述第二电极板中的其中一个为定电极板，另一个为动电极板；The second electrode plate is arranged opposite to the first electrode plate, and there is a distance between the first electrode plate and the second electrode plate, and one of the first electrode plate and the second electrode plate is The fixed electrode plate and the other one is the moving electrode plate;

弹性体，与所述动电极板固定连接，所述弹性体能够带动所述动电极板相对所述定电极板沿平行所述定电极板的方向和垂直所述定电极板的方向移动，以及能够带动所述动电极板相对所述定电极板沿平行所述定电极板的轴线和垂直所述定电极板的轴线转动；An elastic body is fixedly connected to the movable electrode plate, and the elastic body can drive the movable electrode plate to move relative to the fixed electrode plate in a direction parallel to the fixed electrode plate and in a direction perpendicular to the fixed electrode plate, and It can drive the movable electrode plate to rotate relative to the fixed electrode plate along the axis parallel to the fixed electrode plate and the axis perpendicular to the fixed electrode plate;

至少一个电极组，任一所述电极组包括：多个相互电连接的第一电极、多个相互电连接的第二电极和多个相互电连接的第三电极；At least one electrode group, any one of the electrode groups includes: a plurality of first electrodes electrically connected to each other, a plurality of second electrodes electrically connected to each other, and a plurality of third electrodes electrically connected to each other;

所述第一电极板的相对所述第二电极板的面上设置有多个所述第一电极和多个所述第二电极，且多个所述第一电极和多个所述第二电极依次交替排布；A plurality of the first electrodes and a plurality of the second electrodes are provided on the surface of the first electrode plate opposite to the second electrode plate, and the plurality of the first electrodes and the plurality of the second electrodes The electrodes are arranged alternately in sequence;

所述第二电极板的相对所述第一电极板的面上设置有多个所述第三电极；A plurality of third electrodes are provided on the surface of the second electrode plate opposite to the first electrode plate;

所述第一电极、所述第三电极和所述第二电极错位设置，任一所述第三电极与其相邻的所述第一电极和所述第二电极形成耦合结构，并且任一所述第一电极和任一所述第二电极属于一个独立的耦合结构，所述动电极板相对所述定电极板运动时，多个所述第一电极和多个所述第三电极形成第一电容器，多个所述第二电极和多个所述第三电极形成第二电容器。The first electrode, the third electrode and the second electrode are arranged in dislocation, any of the third electrodes forms a coupling structure with its adjacent first electrode and the second electrode, and any of the third electrodes The first electrode and any one of the second electrodes belong to an independent coupling structure, and when the moving electrode plate moves relative to the fixed electrode plate, a plurality of the first electrodes and a plurality of the third electrodes form a second A capacitor, a plurality of the second electrodes and a plurality of the third electrodes form a second capacitor.
根据权利要求1所述的电容式力传感器，其特征在于，沿多个所述第一电极和多个所述第二电极的排布方向，任一所述第一电极和任一所述第二电极的宽度均为W1，每相邻的所述第一电极和所述第二电极的宽度为W2，且任一所述第三电极的宽度为W，每相邻两个所述第三电极之间的宽度为W，其中，W＝W1+W2。The capacitive force sensor according to claim 1, characterized in that, along the arrangement direction of a plurality of the first electrodes and a plurality of the second electrodes, any one of the first electrodes and any one of the first electrodes The width of the two electrodes is W1, the width of each adjacent first electrode and the second electrode is W2, and the width of any third electrode is W, and each adjacent two third electrodes The width between the electrodes is W, where W=W1+W2.
根据权利要求1或2所述的电容式力传感器，其特征在于，所述至少一个电极组包括第一电极组；The capacitive force sensor according to claim 1 or 2, wherein the at least one electrode set comprises a first electrode set;

在所述第一电极组中，多个所述第一电极和多个所述第二电极沿平行于所述第一电极板的第一方向呈直线形排布；或者，In the first electrode group, a plurality of the first electrodes and a plurality of the second electrodes are arranged linearly along a first direction parallel to the first electrode plate; or,

在所述第一电极组中，多个所述第一电极和多个所述第二电极沿所述第一电极板的周向呈弧形排布。In the first electrode group, a plurality of the first electrodes and a plurality of the second electrodes are arranged in an arc along the circumferential direction of the first electrode plate.
根据权利要求3所述的电容式力传感器，其特征在于，所述第一电极和所述第二电极在所述第二电极板上的正投影，在与多个所述第一电极和多个所述第二电极排布方向相垂直的方向上覆盖所述第三电极；或者，The capacitive force sensor according to claim 3, wherein the orthographic projections of the first electrode and the second electrode on the second electrode plate are compared with a plurality of the first electrodes and a plurality of covering the third electrode in a direction perpendicular to the arrangement direction of the second electrodes; or,

所述第三电极在所述第一电极板上的正投影，在与多个所述第一电极和多个所述第二电极排布方向相垂直的方向上覆盖所述第一电极和所述第二电极。The orthographic projection of the third electrode on the first electrode plate covers the first electrode and the plurality of second electrodes in a direction perpendicular to the arrangement direction of the plurality of first electrodes and the plurality of second electrodes. the second electrode.
根据权利要求3或4所述的电容式力传感器，其特征在于，所述至少一个电极组还包括第二电极组；The capacitive force sensor according to claim 3 or 4, wherein the at least one electrode group further comprises a second electrode group;

所述第一电极组中的多个所述第一电极和多个所述第二电极，与所述第二电极组中的多个所述第一电极和多个所述第二电极，设置在所述第一电极板的中心的两侧。A plurality of the first electrodes and a plurality of the second electrodes in the first electrode group, and a plurality of the first electrodes and a plurality of the second electrodes in the second electrode group are set on both sides of the center of the first electrode plate.
根据权利要求5所述的电容式力传感器，其特征在于，The capacitive force sensor according to claim 5, characterized in that,

在所述第一电极组和所述第二电极组中的任一电极组中，沿多个所述第一电极和多个所述第二电极的排布方向，所述第三电极包括相对的第一侧边和第二侧边，所述第一侧边在所述第一电极板上的正投影与所述第一电极的中心线重合；In any one of the first electrode group and the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite The first side and the second side of the first side, the orthographic projection of the first side on the first electrode plate coincides with the center line of the first electrode;

其中，所述第一电极的中心线为所述第一电极的沿多个所述第一电极和多个所述第二电极的排布方向的中心线。Wherein, the centerline of the first electrode is the centerline of the first electrode along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes.
根据权利要求6所述的电容式力传感器，其特征在于，所述电容式力传感器还包括处理器；The capacitive force sensor according to claim 6, wherein the capacitive force sensor further comprises a processor;

所述处理器根据差分公式C ₁ ^-＝C ₁-C ₂求得C ₁ ^-，根据差分公式C ₂ ^-＝C ₃-C ₄求得C ₂ ^-；以及，根据求和公式C ₁ ⁺＝C ₁+C ₂求得C ₁ ⁺，根据求和公式C ₂ ⁺＝C ₃+C ₄求得C ₂ ⁺； The processor obtains C ₁ - according to the difference formula C 1 ⁻ =C ₁ −C ₂ , and obtains C ₂ ⁻ according to the difference formula C ₂ ⁻ =C ₃ −C ₄ ^; and, according to the summation formula C ₁ ₊ ⁼ C ₁ + C ₂ to obtain C ₁ ⁺ , according to the summation formula C ₂ ⁺ = C ₃ + C ₄ to obtain C ₂ ⁺ ;

所述处理器还根据C ₁ ^-、C ₂ ^-、C ₁ ⁺和C ₂ ⁺，计算所述电容式力传感器所承受的外力F； The processor also calculates the external force F borne by the capacitive force sensor according to C ₁ ⁻ , C ₂ ⁻ , C ₁ ⁺ and C ₂ ⁺ ;

其中，C ₁为所述第一电极组中的所述第一电容器输出的电容值； Wherein, _C1 is the capacitance value output by the first capacitor in the first electrode group;

C ₂为所述第一电极组中的所述第二电容器输出的电容值； _C2 is the capacitance value output by the second capacitor in the first electrode group;

C ₃为所述第二电极组中的所述第一电容器输出的电容值； _C3 is the capacitance value output by the first capacitor in the second electrode group;

C ₄为所述第二电极组中的所述第二电容器输出的电容值。 C ₄ is the capacitance output by the second capacitor in the second electrode group.
根据权利要求5所述的电容式力传感器，其特征在于，The capacitive force sensor according to claim 5, characterized in that,

在所述第一电极组中，沿多个所述第一电极和多个所述第二电极的排布方向，所述第三电极包括相对的第一侧边和第二侧边，所述第一侧边在所述第一电极板上的正投影与所述第一电极的中心线重合；In the first electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite first sides and second sides, the The orthographic projection of the first side on the first electrode plate coincides with the centerline of the first electrode;

在所述第二电极组中，沿多个所述第一电极和多个所述第二电极的排布方向，所述第三电极包括相对的第一侧边和第二侧边，所述第一侧边在所述第一电极板上的正投影与所述第一电极和所述第二电极之间的间隙的中心线重合；In the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite first sides and second sides, the The orthographic projection of the first side on the first electrode plate coincides with the center line of the gap between the first electrode and the second electrode;

其中，所述第一电极的中心线为所述第一电极的沿多个所述第一电极和多个所述第二电极的排布方向的中心线。Wherein, the centerline of the first electrode is the centerline of the first electrode along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes.
根据权利要求8所述的电容式力传感器，其特征在于，所述电容式力传感器还包括处理器；The capacitive force sensor according to claim 8, wherein the capacitive force sensor further comprises a processor;

所述处理器根据差分公式C ₁ ^-＝C ₁-C ₂求得C ₁ ^-，以及根据差分公式C ₂ ^-＝C ₃-C ₄求得C ₂ ^-； The processor obtains C ₁ - according to ^the differential formula C 1 ^- = _C ₁ -C ₂ , and obtains C ₂ - according to the differential formula C ₂ ^- =C ₃ -C ₄ ^;

所述处理器还根据C ₁ ^-和C ₂ ^-，计算所述电容式力传感器所承受的外力F； The processor also calculates the external force F borne by the capacitive force sensor according to C ₁ ^- and C ₂ ^- ;

其中，in,

C ₁为所述第一电极组中的所述第一电容器输出的电容值； _C1 is the capacitance value output by the first capacitor in the first electrode group;

C ₂为所述第一电极组中的所述第二电容器输出的电容值； _C2 is the capacitance value output by the second capacitor in the first electrode group;

C ₃为所述第二电极组中的所述第一电容器输出的电容值； _C3 is the capacitance value output by the first capacitor in the second electrode group;

C ₄为所述第二电极组中的所述第二电容器输出的电容值。 C ₄ is the capacitance output by the second capacitor in the second electrode group.
根据权利要求6所述的电容式力传感器，其特征在于，所述电容式力传感器还包括：The capacitive force sensor according to claim 6, wherein the capacitive force sensor further comprises:

第三电极板，所述第三电极板设置在所述第二电极板的背离所述第一电极板的一侧；a third electrode plate, the third electrode plate is arranged on a side of the second electrode plate away from the first electrode plate;

所述至少一个电极组还包括第三电极组；The at least one electrode set also includes a third electrode set;

在所述第三电极组中，多个所述第一电极和多个所述第二电极设置在所述第三电极板的相对所述第二电极板的面，多个所述第三电极设置在所述第二电极板的相对所述第三电极板的面上；In the third electrode group, a plurality of the first electrodes and a plurality of the second electrodes are arranged on the surface of the third electrode plate opposite to the second electrode plate, and the plurality of the third electrodes disposed on the surface of the second electrode plate opposite to the third electrode plate;

所述第三电极组和所述第一电极组关于所述第二电极板对称布设。The third electrode group and the first electrode group are arranged symmetrically with respect to the second electrode plate.
根据权利要求10所述的电容式力传感器，其特征在于，所述电容式力传感器还包括处理器；The capacitive force sensor according to claim 10, wherein the capacitive force sensor further comprises a processor;

所述处理器根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-； The processor obtains C ₁ U- according to the differential formula C ₁ ^U- =C ₁ -C ₂ , and obtains C ₁ ^D- according to the differential formula C ₁ ^D- =C ₅ -C ₆ ^;

以及，根据求和公式C ₁ ^U+＝C ₁+C ₂求得C ₁ ^U+，根据求和公式C ₁ ^D+＝C ₅+C ₆求得C ₁ ^D+； And, C 1 U+ is obtained according to the summation formula C ₁ _U ⁺ =C ₁ +C ₂ , and C ₁ ^D+ is obtained according to the summation formula C ₁ ^D+ =C ₅ + ^C ₆ ;

所述处理器还根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-和C ₁ ⁺＝C ₁ ^U+-C ₁ ^D+，计算所述电容式力传感器所承受的外力F； The processor also calculates the external force F borne by the capacitive force sensor according to C ₁ ^- =C ₁ ^U- +C ₁ ^D- and C ₁ ⁺ =C ₁ ^U+ -C ₁ ^D+ ;

其中，C ₁为所述第一电极组中的所述第一电容器输出的电容值； Wherein, _C1 is the capacitance value output by the first capacitor in the first electrode group;

C ₂为所述第一电极组中的所述第二电容器输出的电容值； _C2 is the capacitance value output by the second capacitor in the first electrode group;

C ₅为所述第三电极组中的所述第一电容器输出的电容值； _C5 is the capacitance value output by the first capacitor in the third electrode group;

C ₆为所述第三电极组中的所述第二电容器输出的电容值。 C ₆ is the capacitance output by the second capacitor in the third electrode group.
根据权利要求8所述的电容式力传感器，其特征在于，所述电容式力传感器还包括：The capacitive force sensor according to claim 8, wherein the capacitive force sensor further comprises:

第三电极板，所述第三电极板设置在所述第二电极板的背离所述第一电极板的一侧；a third electrode plate, the third electrode plate is arranged on a side of the second electrode plate away from the first electrode plate;

所述至少一个电极组还包括第三电极组；The at least one electrode set also includes a third electrode set;

在所述第三电极组中，多个所述第一电极和多个所述第二电极设置在所述第三电极板的相对所述第二电极板的面，多个所述第三电极设置在所述第二电极板的相对所述第三电极板的面上；In the third electrode group, a plurality of the first electrodes and a plurality of the second electrodes are arranged on the surface of the third electrode plate opposite to the second electrode plate, and the plurality of the third electrodes disposed on the surface of the second electrode plate opposite to the third electrode plate;

所述第三电极组和所述第一电极组关于所述第二电极板对称布设。The third electrode group and the first electrode group are arranged symmetrically with respect to the second electrode plate.
根据权利要求12所述的电容式力传感器，其特征在于，所述电容式力传感器还包括处理器；The capacitive force sensor according to claim 12, wherein the capacitive force sensor further comprises a processor;

所述处理器根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-； The processor obtains C ₁ U- according to the differential formula C ₁ ^U- =C ₁ -C ₂ , and obtains C ₁ ^D- according to the differential formula C ₁ ^D- =C ₅ -C ₆ ^;

所述处理器还根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-，计算所述电容式力传感器所承受的外力F； The processor also calculates the external force F borne by the capacitive force sensor according to C ₁ ^- =C ₁ ^U- +C ₁ ^D- ;

其中，C ₁为所述第一电极组中的所述第一电容器输出的电容值； Wherein, _C1 is the capacitance value output by the first capacitor in the first electrode group;

C ₂为所述第一电极组中的所述第二电容器输出的电容值； _C2 is the capacitance value output by the second capacitor in the first electrode group;

C ₅为所述第三电极组中的所述第一电容器输出的电容值； _C5 is the capacitance value output by the first capacitor in the third electrode group;

C ₆为所述第三电极组中的所述第二电容器输出的电容值。 C ₆ is the capacitance output by the second capacitor in the third electrode group.
根据权利要求3-13中任一项所述的电容式力传感器，其特征在于，所述至少一个电极组还包括第五电极组；The capacitive force sensor according to any one of claims 3-13, wherein the at least one electrode group further comprises a fifth electrode group;

在所述第五电极组中，多个所述第一电极和多个所述第二电极沿第二方向排布在所述第一电极板的相对所述第二电极板的面上，多个所述第三电极设置在所述第二电极板的相对所述第三电极板的面上；In the fifth electrode group, a plurality of the first electrodes and a plurality of the second electrodes are arranged along the second direction on the surface of the first electrode plate opposite to the second electrode plate, and a plurality of The third electrodes are arranged on the surface of the second electrode plate opposite to the third electrode plate;

所述第二方向与所述第一方向相垂直。The second direction is perpendicular to the first direction.
根据权利要求1-14中任一项所述的电容式力传感器，其特征在于，相对的所述第一电极板和所述第二电极板上设置八组所述电极组，且八组所述电极组沿着所述第一电极板和所述第二电极板的周向等间距的间隔布设。The capacitive force sensor according to any one of claims 1-14, characterized in that eight sets of electrode groups are arranged on the opposite first electrode plate and the second electrode plate, and the eight sets of electrode groups are The electrode groups are arranged at equal intervals along the circumferential direction of the first electrode plate and the second electrode plate.
根据权利要求1-15中任一项所述的电容式力传感器，其特征在于，所述电容式力传感器还包括：The capacitive force sensor according to any one of claims 1-15, wherein the capacitive force sensor further comprises:

主体，所述主体内形成有容纳腔；a main body, an accommodating cavity is formed in the main body;

所述弹性体设置在所述容纳腔内，所述弹性体包括连接部和多个沿所述连接部周向布设的弹性臂，且所述弹性臂的远离所述连接部的一端与所述主体固定连接；The elastic body is disposed in the accommodating cavity, the elastic body includes a connecting portion and a plurality of elastic arms arranged circumferentially along the connecting portion, and one end of the elastic arm away from the connecting portion is connected to the connecting portion. The main body is fixedly connected;

所述第一电极板和所述第二电极板均设置在所述容纳腔内，所述第二电极板与所述弹性体相对设置，且与所述连接部固定连接，所述第一电极板设置在所述第二电极板的背离所述弹性体的一侧并与所述主体固定连接；Both the first electrode plate and the second electrode plate are arranged in the accommodating cavity, the second electrode plate is arranged opposite to the elastic body, and is fixedly connected to the connecting portion, and the first electrode The plate is arranged on the side of the second electrode plate away from the elastic body and is fixedly connected with the main body;

所述电容式力传感器还包括受力板，所述受力板设置在所述容纳腔外，且与所述第二电极板固定连接。The capacitive force sensor further includes a force plate, which is arranged outside the accommodation cavity and is fixedly connected to the second electrode plate.
一种利用电容式力传感器检测设备所承受外力的测量方法，所述电容式力传感器安装在所述检测设备上，其特征在于，所述电容式力传感器包括：A method for measuring external force borne by a capacitive force sensor detection device, the capacitive force sensor is installed on the detection device, characterized in that the capacitive force sensor includes:

第一电极板；first electrode plate;

第二电极板，与所述第一电极板相对设置，且所述第一电极板和第二电极板之间具有间距，所述第一电极板和所述第二电极板中的其中一个为定电极板，另一个为动电极板；The second electrode plate is arranged opposite to the first electrode plate, and there is a distance between the first electrode plate and the second electrode plate, and one of the first electrode plate and the second electrode plate is The fixed electrode plate and the other one is the moving electrode plate;

弹性体，与所述动电极板固定连接，所述弹性体能够带动所述动电极板相对所述定电极板沿平行所述定电极板的方向和垂直所述定电极板的方向移动，以及能够带动所述动电极板相对所述定电极板沿平行所述定电极板的轴线和垂直所述定电极板的轴线转动；An elastic body is fixedly connected to the movable electrode plate, and the elastic body can drive the movable electrode plate to move relative to the fixed electrode plate in a direction parallel to the fixed electrode plate and in a direction perpendicular to the fixed electrode plate, and It can drive the movable electrode plate to rotate relative to the fixed electrode plate along the axis parallel to the fixed electrode plate and the axis perpendicular to the fixed electrode plate;

至少一个电极组，任一所述电极组包括：多个相互电连接的第一电极、多个相互电连接的第二电极和多个相互电连接的第三电极；At least one electrode group, any one of the electrode groups includes: a plurality of first electrodes electrically connected to each other, a plurality of second electrodes electrically connected to each other, and a plurality of third electrodes electrically connected to each other;

所述第一电极板的相对所述第二电极板的面上设置有多个所述第一电极和多个所述第二电极，且多个所述第一电极和多个所述第二电极依次交替排布；A plurality of the first electrodes and a plurality of the second electrodes are provided on the surface of the first electrode plate opposite to the second electrode plate, and the plurality of the first electrodes and the plurality of the second electrodes The electrodes are arranged alternately in sequence;

所述第二电极板的相对所述第一电极板的面上设置有多个所述第三电极；A plurality of third electrodes are provided on the surface of the second electrode plate opposite to the first electrode plate;

所述第一电极、所述第三电极和所述第二电极错位设置，任一所述第三电极与其相邻的所述第一电极和所述第二电极形成耦合结构，并且任一所述第一电极和任一所述第二电极属于一个独立的耦合结构，所述动电极板相对所述定电极板运动时，多个所述第一电极和多个所述第三电极形成第一电容器，多个所述第二电极和多个所述第三电极形成第二电容器；The first electrode, the third electrode and the second electrode are arranged in dislocation, any of the third electrodes forms a coupling structure with its adjacent first electrode and the second electrode, and any of the third electrodes The first electrode and any one of the second electrodes belong to an independent coupling structure, and when the moving electrode plate moves relative to the fixed electrode plate, a plurality of the first electrodes and a plurality of the third electrodes form a second a capacitor, a plurality of said second electrodes and a plurality of said third electrodes forming a second capacitor;

所述测量方法包括：The measurement methods include:

采集所述第一电容器的电容值，以及采集所述第二电容器的电容值；collecting the capacitance value of the first capacitor, and collecting the capacitance value of the second capacitor;

根据所述第一电容器的电容值和所述第二电容器的电容值，测得所述检测设备所承受外力F。According to the capacitance value of the first capacitor and the capacitance value of the second capacitor, the external force F borne by the detection device is measured.
根据权利要求17所述的测量方法，其特征在于，沿多个所述第一电极和多个所述第二电极的排布方向，任一所述第一电极和任一所述第二电极的宽度均为W1，每相邻的所述第一电极和所述第二电极的宽度为W2，且任一所述第三电极的宽度为W，每相邻两个所述第三电极之间的宽度为W，其中，W＝W1+W2；The measurement method according to claim 17, characterized in that, along the arrangement direction of a plurality of the first electrodes and a plurality of the second electrodes, any one of the first electrodes and any one of the second electrodes The width is W1, the width of each adjacent first electrode and the second electrode is W2, and the width of any third electrode is W, between each adjacent two third electrodes The width between them is W, where W=W1+W2;

所述至少一个电极组包括第一电极组和第二电极组，所述第一电极组中的多个所述第一电极和多个所述第二电极，与所述第二电极组中的多个所述第一电极和多个所述第二电极，设置在所述第一电极板的中心的两侧；The at least one electrode group includes a first electrode group and a second electrode group, a plurality of the first electrodes and a plurality of the second electrodes in the first electrode group, and a plurality of the second electrodes in the second electrode group A plurality of the first electrodes and a plurality of the second electrodes are arranged on both sides of the center of the first electrode plate;

采集所述第一电容器的电容值，以及采集所述第二电容器的电容值，包括：Collecting the capacitance value of the first capacitor and collecting the capacitance value of the second capacitor includes:

采集所述第一电极组中的所述第一电容器输出的电容值C ₁，采集所述第一电极组中的所述第二电容器输出的电容值C ₂，采集所述第二电极组中的所述第一电容器输出的电容值C ₃，采集所述第一电极组中的所述第二电容器输出的电容值C ₄。 Collect the capacitance value C ₁ output by the first capacitor in the first electrode group, collect the capacitance value C 2 output by the second capacitor in the first electrode group, and collect the capacitance value C ₂ output by the second capacitor in the second electrode group The capacitance value C ₃ output by the first capacitor is collected, and the capacitance value C ₄ output by the second capacitor in the first electrode group is collected.
根据权利要求18所述的测量方法，其特征在于，The measuring method according to claim 18, characterized in that,

在所述第一电极组和所述第二电极组中的任一电极组中，沿多个所述第一电极和多个所述第二电极的排布方向，所述第三电极包括相对的第一侧边和第二侧边，所述第一侧边在所述第一电极板上的正投影与所述第一电极的中心线重合；In any one of the first electrode group and the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite The first side and the second side of the first side, the orthographic projection of the first side on the first electrode plate coincides with the centerline of the first electrode;

利用所述第一电容器的电容值和所述第二电容器的电容值，测得所述检测设备所承受外力F，包括：Using the capacitance value of the first capacitor and the capacitance value of the second capacitor, the external force F borne by the detection device is measured, including:

根据差分公式C ₁ ^-＝C ₁-C ₂求得C ₁ ^-，根据差分公式C ₂ ^-＝C ₃-C ₄求得C ₂ ^-；以及，根据求和公式C ₁ ⁺＝C ₁+C ₂求得C ₁ ⁺，根据求和公式C ₂ ⁺＝C ₃+C ₄求得C ₂ ⁺； C ₁ - is obtained according to the difference formula C 1 ^- =C ₁ -C ₂ , and C ₂ ^- is obtained according to the difference formula C ₂ ^- =C ₃ -C ₄ ^; and, according to the summation formula _{C 1} ₊ ⁼ C ₁ +C ₂ Obtain C ₁ ⁺ , and obtain C 2 + according to the summation formula C ₂ ⁺ =C ₃ + _C ₄ ^;

再根据C ₁ ^-、C ₂ ^-、C ₁ ⁺和C ₂ ⁺，计算所述检测设备所承受外力F。 Then, according to C ₁ ⁻ , C ₂ ⁻ , C ₁ ⁺ and C ₂ ⁺ , calculate the external force F borne by the detection device.
根据权利要求18所述的测量方法，其特征在于，所述电容式力传感器还包括：The measurement method according to claim 18, wherein the capacitive force sensor further comprises:

第三电极板，所述第三电极板设置在所述第二电极板的背离所述第一电极板的一侧；a third electrode plate, the third electrode plate is arranged on a side of the second electrode plate away from the first electrode plate;

所述至少一个电极组还包括第三电极组；The at least one electrode set also includes a third electrode set;

在所述第三电极组中，多个所述第一电极和多个所述第二电极设置在所述第三电极板的相对所述第二电极板的面，多个所述第三电极设置在所述第二电极板的相对所述第三电极板的面上；In the third electrode group, a plurality of the first electrodes and a plurality of the second electrodes are arranged on the surface of the third electrode plate opposite to the second electrode plate, and the plurality of the third electrodes disposed on the surface of the second electrode plate opposite to the third electrode plate;

且所述第三电极组和所述第一电极组关于所述第二电极板对称布设；And the third electrode group and the first electrode group are arranged symmetrically with respect to the second electrode plate;

在所述第一电极组和所述第二电极组中的任一电极组中，沿多个所述第一电极和多个所述第二电极的排布方向，所述第三电极包括相对的第一侧边和第二侧边，所述第一侧边在所述第一电极板上的正投影与所述第一电极的中心线重合；In any one of the first electrode group and the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite The first side and the second side of the first side, the orthographic projection of the first side on the first electrode plate coincides with the center line of the first electrode;

采集所述第一电容器的电容值，以及采集所述第二电容器的电容值，还包括：Collecting the capacitance value of the first capacitor, and collecting the capacitance value of the second capacitor also includes:

采集所述第三电极组中的所述第一电容器输出的电容值C ₅，采集所述第三电极组中的所述第二电容器输出的电容值C ₆； collecting the capacitance value C ₅ output by the first capacitor in the third electrode group, and collecting the capacitance value C ₆ output by the second capacitor in the third electrode group;

利用所述第一电容器的电容值和所述第二电容器的电容值，测得所述检测设备所承受外力F，包括：Using the capacitance value of the first capacitor and the capacitance value of the second capacitor, the external force F borne by the detection device is measured, including:

根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-； Calculate C ₁ U- according to the differential formula ^C ₁ ^U- =C ₁ -C ₂ , and obtain C ₁ ^D- according to the differential formula C ₁ ^D- =C ₅ -C ₆ ;

以及，根据求和公式C ₁ ^U+＝C ₁+C ₂求得C ₁ ^U+，根据求和公式C ₁ ^D+＝C ₅+C ₆求得C ₁ ^D+； And, C 1 U+ is obtained according to the summation formula C ₁ _U ⁺ =C ₁ +C ₂ , and C ₁ D ⁺ is obtained according to the summation formula C ₁ ^D+ =C ₅ + ^C ₆ ;

再根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-和C ₁ ⁺＝C ₁ ^U+-C ₁ ^D+，计算所述检测设备所承受外力F。 Then, according to C ₁ ^- =C ₁ ^U- +C ₁ ^D- and C ₁ ⁺ =C ₁ ^U+ -C ₁ ^D+ , calculate the external force F borne by the detection device.
根据权利要求18所述的测量方法，其特征在于，The measuring method according to claim 18, characterized in that,

在所述第一电极组中，沿多个所述第一电极和多个所述第二电极的排布方向，所述第三电极包括相对的第一侧边和第二侧边，所述第一侧边在所述第一电极板上的正投影与所述第一电极的中心线重合；In the first electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite first sides and second sides, the The orthographic projection of the first side on the first electrode plate coincides with the centerline of the first electrode;

在所述第二电极组中，沿多个所述第一电极和多个所述第二电极的排布方向，所述第三电极包括相对的一侧边和第二侧边，所述第一侧边在所述第一电极板上的正投影与所述第一电极和所述第二电极之间的间隙的中心线重合；In the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes an opposite side and a second side, and the first The orthographic projection of one side on the first electrode plate coincides with the center line of the gap between the first electrode and the second electrode;

利用所述第一电容器的电容值和所述第二电容器的电容值，测得所述检测设备所承受外力F，包括：Using the capacitance value of the first capacitor and the capacitance value of the second capacitor, the external force F borne by the detection device is measured, including:

根据差分公式C ₁ ^-＝C ₁-C ₂求得C ₁ ^-，以及根据差分公式C ₂ ^-＝C ₃-C ₄求得C ₂ ^-； C ₁ - is obtained according to the differential formula C ₁ ^- =C ₁ -C ₂ , and C ₂ ^- is obtained according to the differential formula C ₂ ^- =C ₃ -C ₄ ^;

再根据C ₁ ^-和C ₂ ^-，计算所述检测设备所承受外力F。 Then, according to C ₁ ^- and C ₂ ^- , calculate the external force F borne by the detection device.
根据权利要求18所述的测量方法，其特征在于，所述电容式力传感器还包括：The measurement method according to claim 18, wherein the capacitive force sensor further comprises:

第三电极板，所述第三电极板设置在所述第二电极板的背离所述第一电极板的一侧；a third electrode plate, the third electrode plate is arranged on a side of the second electrode plate away from the first electrode plate;

所述至少一个电极组还包括第三电极组；The at least one electrode set also includes a third electrode set;

在所述第三电极组中，多个所述第一电极和多个所述第二电极设置在所述第三电极板的相对所述第二电极板的面，多个所述第三电极设置在所述第二电极板的相对所述第三电极板的面上；In the third electrode group, a plurality of the first electrodes and a plurality of the second electrodes are arranged on the surface of the third electrode plate opposite to the second electrode plate, and the plurality of the third electrodes disposed on the surface of the second electrode plate opposite to the third electrode plate;

且所述第三电极组和所述第一电极组关于所述第二电极板对称布设；And the third electrode group and the first electrode group are arranged symmetrically with respect to the second electrode plate;

在所述第一电极组中，沿多个所述第一电极和多个所述第二电极的排布方向，所述第三电极包括相对的第一侧边和第二侧边，所述第一侧边在所述第一电极板上的正投影与所述第一电极的中心线重合；In the first electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite first sides and second sides, the The orthographic projection of the first side on the first electrode plate coincides with the centerline of the first electrode;

在所述第二电极组中，沿多个所述第一电极和多个所述第二电极的排布方向，所述第三电极包括相对的第一侧边和第二侧边，所述第一侧边在所述第一电极板上的正投影与所述第一电极和所述第二电极之间的间隙的中心线重合；In the second electrode group, along the arrangement direction of the plurality of first electrodes and the plurality of second electrodes, the third electrode includes opposite first sides and second sides, the The orthographic projection of the first side on the first electrode plate coincides with the center line of the gap between the first electrode and the second electrode;

采集所述第一电容器的电容值，以及采集所述第二电容器的电容值，还包括：Collecting the capacitance value of the first capacitor, and collecting the capacitance value of the second capacitor also includes:

采集所述第三电极组中的所述第一电容器输出的电容值C ₅，采集所述第三电极组中的所述第二电容器输出的电容值C ₆； collecting the capacitance value C ₅ output by the first capacitor in the third electrode group, and collecting the capacitance value C ₆ output by the second capacitor in the third electrode group;

利用所述第一电容器的电容值和所述第二电容器的电容值，测得所述检测设备所承受外力F，包括：Using the capacitance value of the first capacitor and the capacitance value of the second capacitor, the external force F borne by the detection device is measured, including:

根据差分公式C ₁ ^U-＝C ₁-C ₂求得C ₁ ^U-，根据差分公式C ₁ ^D-＝C ₅-C ₆求得C ₁ ^D-； Calculate C ₁ U- according to the differential formula ^C ₁ ^U- =C ₁ -C ₂ , and obtain C ₁ ^D- according to the differential formula C ₁ ^D- =C ₅ -C ₆ ;

再根据C ₁ ^-＝C ₁ ^U-+C ₁ ^D-，计算所述检测设备所承受外力F。 Then, according to C ₁ ⁻ =C ₁ ^U− +C ₁ ^D− , calculate the external force F borne by the detection device.