WO2023059084A1 - Electrically conductive contact pin and inspection device having same - Google Patents

Electrically conductive contact pin and inspection device having same Download PDF

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Publication number
WO2023059084A1
WO2023059084A1 PCT/KR2022/015028 KR2022015028W WO2023059084A1 WO 2023059084 A1 WO2023059084 A1 WO 2023059084A1 KR 2022015028 W KR2022015028 W KR 2022015028W WO 2023059084 A1 WO2023059084 A1 WO 2023059084A1
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WO
WIPO (PCT)
Prior art keywords
elastic
electrically conductive
conductive contact
contact pin
plunger
Prior art date
Application number
PCT/KR2022/015028
Other languages
French (fr)
Korean (ko)
Inventor
안범모
박승호
홍창희
Original Assignee
(주)포인트엔지니어링
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Application filed by (주)포인트엔지니어링 filed Critical (주)포인트엔지니어링
Publication of WO2023059084A1 publication Critical patent/WO2023059084A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers

Definitions

  • the present invention relates to an electrically conductive contact pin and a testing device having the same.
  • the electrically conductive contact pin is provided in the testing device and is used to electrically and physically contact an object to be tested to transmit an electrical signal.
  • the inspection device may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket.
  • the electrically conductive contact pins may be electrically conductive contact pins provided in a probe card to inspect a semiconductor chip, or socket pins provided in a test socket to inspect a packaged semiconductor package to inspect a semiconductor package.
  • the present invention relates to such an electrically conductive contact pin, the prior art will be described below by exemplifying a vertical probe card among inspection devices.
  • FIG. 1 is a schematic view of a vertical probe card 1 according to the prior art.
  • probe card Semiconductor chip inspection on a wafer basis is performed by a probe card.
  • the probe card is mounted between the wafer and the test equipment head, and 8,000 to 100,000 electrically conductive contact pins on the probe card are in contact with pads (WP) in individual chips on the wafer to transmit test signals between the probe equipment and individual chips. It serves as an intermediary that enables communication between them.
  • WP pads
  • These probe cards include vertical probe cards, cantilever probe cards, and MEMS probe cards.
  • a vertical probe card (1) includes a circuit board (2), a space converter (3) provided on the lower side of the circuit board (2), and a probe head (7) provided on the lower side of the space converter (3). It is composed by
  • the probe head 7 includes guide plates 5 and 6 having a plurality of electrically conductive contact pins 7 and holes into which the electrically conductive contact pins 7 are inserted.
  • the probe head 7 includes an upper guide plate 5 and a lower guide plate 6, and the upper guide plate 5 and the lower guide plate 6 are spaced apart from each other through a spacer and are fixedly installed.
  • the electrically conductive contact pins 7 are elastically deformed between the upper guide plate 5 and the lower guide plate 6, and the vertical probe card 1 is constructed by adopting such electrically conductive contact pins 7. .
  • the electrically conductive contact pin 7 has a locking jaw projecting outwardly of its body.
  • the locking jaw protrudes outward from the hole of the upper guide plate 5 and is supported on the upper surface of the upper guide plate 5 to prevent the electrically conductive contact pin 7 from falling from the probe head 7 .
  • Patent Document 1 Registration No. 10-1913355 Patent Publication
  • the present invention has been made to solve the above-described problems of the prior art, and the present invention applies frictional force to the sidewall of the guide hole so that it does not fall by its own weight from the guide plate and connects the object through compressive deformation in the longitudinal direction of the elastic part. It is an object of the present invention to provide an electrically conductive contact pin and a testing device having the same so that the pressing force is attenuated and transmitted to the frictional force.
  • the present invention is an electrically conductive contact pin capable of effectively inspecting the electrical characteristics of an object to be inspected without elastically bending or bending while its body is convex in the horizontal direction by a pressing force applied to both ends, and a testing device having the same Its purpose is to provide
  • an electrically conductive contact pin is installed by being inserted into a guide hole of a guide plate, and is located on the first end side of the electrically conductive contact pin.
  • a first plunger whose end serves as a first contact point;
  • a second plunger located on the side of the second end of the electrically conductive contact pin, the end of which serves as a second contact;
  • an elastic part for allowing the first plunger and the second plunger to be elastically displaced in the longitudinal direction of the electrically conductive contact pin;
  • a support portion provided outside the elastic portion along the longitudinal direction of the electrically conductive contact pin to guide the elastic portion to be compressed and stretched in the longitudinal direction of the electrically conductive contact pin and to prevent the elastic portion from buckling while being compressed; and extends from the support part to the outside in the width direction of the electrically conductive contact pin and is elastically supported on the sidewall of the guide hole to cause a restoring force acting in a direction perpendicular to the direction of compression and extension
  • the elastic part may include a first elastic part connected to the first plunger; a second elastic part connected to the second plunger; and an intermediate fixing portion connected to the first elastic portion and the second elastic portion between the first elastic portion and the second elastic portion and provided integrally with the support portion, wherein the length of the electrically conductive contact pin includes: In the direction, a position of at least one end of the elastic contact part coincides with a position of the intermediate fixing part and is connected to the intermediate fixing part.
  • one end of the elastic contact part is connected to the support part, and the other end of the elastic contact part is a free end.
  • one end and the other end of the elastic contact part are connected to the support part, and a space between one end and the other end of the elastic contact part is curved in the direction of the guide hole.
  • the support part includes a first support part provided on the left side of the elastic part and a second support part provided on the right side of the elastic part
  • the elastic contact part includes a first elastic contact part provided on the left side of the first support part and the second support part provided on the right side of the elastic part.
  • a second elastic contact portion provided on the right side of the second support portion, wherein the elastic portion includes: a first elastic portion connected to the first plunger; a second elastic part connected to the second plunger; and an intermediate fixing part connected to the first elastic part and the second elastic part between the first elastic part and the second elastic part and integrally provided with the support part, The intermediate fixing part is provided between the second elastic contact parts.
  • first plunger, the second plunger, the elastic part, and the support part are provided by stacking a plurality of metal layers, and the elastic contact part is provided with a single metal layer.
  • the elastic contact portion is composed of a straight line without bending from one end to the other end.
  • the elastic contact part is formed in a convex shape in the width direction between one end and the other end, and both one end and the other end are connected to the support part, and at least two convex parts are formed.
  • the first plunger is in contact with the connection object located on the upper side
  • the second plunger is in contact with the connection object located on the lower side
  • the electrically conductive contact pin is in contact with the connection object located on the upper side and the connection object located on the lower side.
  • the inspection device formed with a guide hole; and electrically conductive contact pins inserted into the guide holes of the guide plate and installed on the guide plate, wherein the electrically conductive contact pins are located at the first end side of the electrically conductive contact pins, and the end thereof is the first end.
  • a first plunger that becomes a contact a second plunger located on the side of the second end of the electrically conductive contact pin, the end of which serves as a second contact; an elastic part for allowing the first plunger and the second plunger to be elastically displaced in the longitudinal direction of the electrically conductive contact pin; a support portion provided outside the elastic portion along the longitudinal direction of the electrically conductive contact pin to guide the elastic portion to be compressed and stretched in the longitudinal direction of the electrically conductive contact pin and to prevent the elastic portion from buckling while being compressed; and extends from the support part to the outside in the width direction of the electrically conductive contact pin and is elastically supported on the sidewall of the guide hole to cause a restoring force acting in a direction perpendicular to the direction of compression and extension of the elastic part on the sidewall of the guide hole. and an elastic contact portion preventing the electrically conductive contact pin from falling due to its own weight.
  • the present invention provides an electrically conductive contact pin that prevents a guide plate from falling due to its own weight by applying frictional force to the sidewall of a guide hole and attenuates the pressing force of an object to be connected through compressive deformation in the longitudinal direction of the elastic part and transmits the frictional force. It provides an inspection device that does.
  • the present invention is an electrically conductive contact pin capable of effectively inspecting the electrical characteristics of an object to be inspected without elastically bending or bending while its body is convex in the horizontal direction by a pressing force applied to both ends, and a testing device having the same provides
  • FIG. 1 is a view schematically showing a vertical probe card according to the prior art.
  • Fig. 2 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 3 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • FIG. 4 is an enlarged view of part A of FIG. 2;
  • Figure 5 is a perspective view of part A of Figure 2;
  • FIG. 6 is an enlarged plan view of a lower portion of an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • FIG. 7 is an enlarged perspective view of a lower portion of an electrically conductive contact pin according to a first preferred embodiment of the present invention.
  • FIGS. 8A and 8B show a state in which an electrically conductive contact pin according to a first preferred embodiment of the present invention is inserted into a guide plate;
  • Fig. 9 is a perspective view showing an electrically conductive contact pin according to a second preferred embodiment of the present invention.
  • Fig. 10 is a plan view showing an electrically conductive contact pin according to a third preferred embodiment of the present invention.
  • Fig. 11 is a plan view showing an electrically conductive contact pin according to a fourth preferred embodiment of the present invention.
  • Fig. 12 is a plan view showing an electrically conductive contact pin according to a fifth preferred embodiment of the present invention.
  • Fig. 13 is a plan view showing an electrically conductive contact pin according to a sixth preferred embodiment of the present invention.
  • Embodiments described in this specification will be described with reference to sectional views and/or perspective views, which are ideal exemplary views of the present invention. Films and thicknesses of regions shown in these drawings are exaggerated for effective description of technical content.
  • the shape of the illustrative drawings may be modified due to manufacturing techniques and/or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes generated according to manufacturing processes.
  • Technical terms used in this specification are used only to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise.
  • the width direction of the electrically conductive contact pin described below is the ⁇ x direction indicated in the drawing
  • the length direction of the electrically conductive contact pin is the ⁇ y direction indicated in the drawing
  • the thickness direction of the electrically conductive contact pin is the ⁇ z direction indicated in the drawing. am.
  • the electrically conductive contact pin has an overall length dimension L in a longitudinal direction ( ⁇ y direction) and an overall thickness dimension H in a thickness direction perpendicular to the longitudinal direction ( ⁇ z direction), It has an overall width dimension (W) in the vertical width direction ( ⁇ x direction).
  • FIG. 2 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 3 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention
  • FIG. 4 is part A of FIG. 2
  • Fig. 5 is a perspective view of part A of Fig. 2
  • Fig. 6 is an enlarged plan view of the lower part of the electrically conductive contact pin according to the first preferred embodiment of the present invention
  • Fig. 7 is a plan view of the first preferred embodiment of the present invention.
  • 8A and 8B are diagrams illustrating a state in which the electrically conductive contact pin according to the first preferred embodiment of the present invention is inserted into the guide plate.
  • An electrically conductive contact pin 100 includes a first plunger 110 located at a first end side of the electrically conductive contact pin 100 and the end serving as a first contact; A second plunger (120) located on the side of the second end of the conductive contact pin (100), the end of which serves as a second contact point, and the first plunger (110) and the second plunger (120) form an electrically conductive contact pin (100)
  • the elastic part 130 elastically displaces in the longitudinal direction of the elastic part 130, the elastic part 130 guides the electrically conductive contact pin 100 to be compressed and stretched in the longitudinal direction, and prevents the elastic part 130 from buckling while being compressed.
  • the support part 140 provided on the outside of the elastic part 130 along the length direction of the electrically conductive contact pin 100 and the guide hole extending from the support part 140 to the outside in the width direction of the electrically conductive contact pin 100 to prevent is elastically supported on the sidewall of the elastic part 130 and causes a restoring force acting in a direction perpendicular to the direction of compression and extension of the elastic part 130 on the sidewall of the guide hole to prevent the electrically conductive contact pin 100 from falling due to its own weight. It includes the contact part (TM).
  • the electrically conductive contact pins 100 are inserted into the holes of the guide plate GP and are supported and installed on at least one of the guide plates GP.
  • the guide plate GP may be provided as one as shown in FIG. 8A or as plural as shown in FIG. 8B.
  • the guide plates GP include an upper guide plate GP1 located on the upper side and a lower guide plate GP2 provided and spaced apart from the upper guide plate GP1.
  • a description of a guide plate may mean only one guide plate GP, and may mean at least one of an upper guide plate GP1 and a lower guide plate GP2.
  • the first plunger 110 is connected to the connection object located on the upper side and the second plunger 120 is connected to the connection object located on the lower side.
  • the electrically conductive contact pin 100 is employed in the vertical probe card, the first contact of the first plunger 110 is connected to the space transducer, and the second plunger 120 is connected to the test object.
  • the electrically conductive contact pin 100 is employed in the test socket, the first contact of the first plunger 110 is connected to the test object and the second plunger 120 is connected to the circuit board.
  • the opposite connection relationship is also possible.
  • the elastic part 130 includes a first elastic part 131 connected to the first plunger 110; a second elastic part 135 connected to the second plunger 120; and an intermediate fixing part 137 connected to the first elastic part 131 and the second elastic part 135 between the first elastic part 131 and the second elastic part 135 and integrally provided with the support part 140. ).
  • each cross-sectional shape of the electrically conductive contact pin 100 in the thickness direction is the same in all thickness cross-sections.
  • the elastic part 130 has the same thickness as a whole.
  • the first and second elastic parts 131 and 135 have a shape in which a plate-like plate having an actual width t is repeatedly bent in an S shape, and the actual width t of the plate-like plate is generally constant.
  • One end of the first plunger 110 is a free end and the other end is connected to the first elastic part 131 so that it can move vertically elastically by contact pressure.
  • One end of the second plunger 120 is a free end, and the other end is connected to the second elastic part 135 so that it can move vertically elastically by contact pressure.
  • One end of the first elastic part 131 is connected to the first plunger 110 and the other end is connected to the intermediate fixing part 137 .
  • One end of the second elastic part 135 is connected to the second plunger 120 and the other end is connected to the intermediate fixing part 137 .
  • the support part 140 includes a first support part 141 provided on the left side of the elastic part 130 and a second support part 145 provided on the right side of the elastic part 130 .
  • the intermediate fixing portion 137 extends in the width direction of the electrically conductive contact pin 100 and connects the first support portion 141 and the second support portion 145 .
  • the first elastic part 131 is provided on the upper part with respect to the intermediate fixing part 137
  • the second elastic part 135 is provided on the lower part with respect to the intermediate fixing part 137. Based on the intermediate fixing part 137, the first elastic part 131 and the second elastic part 135 are compressed or stretched.
  • the intermediate fixing part 137 is fixed to the first and second support parts 141 and 145 to limit the movement of the first and second elastic parts 141 and 145 when the first and second elastic parts 131 and 135 are compressed and deformed.
  • An area provided with the first elastic part 131 and an area provided with the second elastic part 135 are distinguished from each other by the intermediate fixing part 137 . Therefore, foreign substances introduced into the upper opening cannot flow into the second elastic portion 135, and foreign substances introduced through the lower opening also cannot flow into the first elastic portion 131. Through this, by limiting the movement of the foreign matter introduced into the support part 140, it is possible to prevent the foreign matter from interfering with the operation of the first and second elastic parts 131 and 135.
  • the first support part 141 and the second support part 145 are formed along the longitudinal direction of the electrically conductive contact pin 100, and the first support part 141 and the second support part 145 form the electrically conductive contact pin 100 It is integrally connected to the intermediate fixing part 137 formed to extend along the width direction of the. While the first and second elastic parts 131 and 135 are integrally connected through the intermediate fixing part 137, the electrically conductive contact pin 100 is composed of one body as a whole.
  • the first and second elastic parts 131 and 135 are formed by alternately connecting a plurality of straight parts 130a and a plurality of curved parts 130b.
  • the straight portion 130a connects the left and right curved portions 130b, and the curved portion 130b connects the vertically adjacent straight portions 130a.
  • the curved portion 130b is provided in an arc shape.
  • a straight portion 130a is disposed at the central portion of the first and second elastic portions 131 and 135, and a curved portion 130b is disposed at an outer portion of the first and second elastic portions 131 and 135.
  • the straight portion 130a is provided parallel to the width direction so that the curved portion 130b is more easily deformed according to the contact pressure.
  • the part of the first and second elastic parts 131 and 135 connected to the intermediate fixing part 137 is the curved part 130b of the first and second elastic parts 131 and 135 .
  • the first and second elastic parts 131 and 135 maintain elasticity with respect to the intermediate fixing part 137 .
  • the second elastic part 135 While the first elastic part 131 requires an amount of compression sufficient for the first plungers 110 of the plurality of electrically conductive contact pins 100 to stably contact the upper connection object, the second elastic part 135 The second plungers 120 of the plurality of electrically conductive contact pins 100 require an amount of compression sufficient to stably contact the lower connection object. Therefore, the spring coefficient of the first elastic part 131 and the spring coefficient of the second elastic part 135 are different from each other. For example, the length of the first elastic part 131 and the length of the second elastic part 135 are provided differently. Also, the length of the second elastic part 135 may be longer than that of the first elastic part 131 .
  • Each curved portion 130b is formed by connecting two straight portions 130a, and the two straight portions 130a are positioned within a range not exceeding a distance in the longitudinal direction of each curved portion 130b.
  • One straight part 130a is connected at a position where each curved part 130b is bent from the top to the bottom, and another straight part 130a is connected at a position where each curved part 130b is bent from the bottom to the top.
  • the separation distance in the longitudinal direction of the two straight portions 130a connected to the one curved portion 130b does not exceed the separation distance in the longitudinal direction of the one curved portion 130b.
  • the distance between the curved portions 130b adjacent to each other is shorter than the distance between the straight portions 130a adjacent to each other.
  • the first support part 141 and the second support part 145 form openings while being close to each other at both ends and spaced apart from each other.
  • the opening includes an upper opening through which the first plunger 110 can pass in a vertical direction and a lower opening through which the second plunger 120 can pass through in a vertical direction.
  • the upper opening and the lower opening perform a function of preventing the first and second plungers 110 and 120 from excessively protruding into the support part 140 by the restoring force of the first and second elastic parts 131 and 135 .
  • the first support part 141 includes a first door part 144a extending toward the upper opening
  • the second support part 145 includes a second door part 144b extending toward the upper opening.
  • the first door part 144a and the second door part 144b are opposed to each other, and the space apart becomes an upper opening.
  • the opening width of the upper opening is smaller than the left and right lengths of the straight portion 130a of the first elastic portion 131 .
  • the first plunger 110 is connected to the straight portion 130a of the first elastic portion 131 and has a rod shape elongated in the longitudinal direction of the electrically conductive contact pin 100 .
  • the first plunger 110 may vertically pass through an upper opening formed by the first support part 141 and the second support part 145 .
  • the straight portion 130a of the first elastic portion 131 cannot pass through the upper opening. . Through this, the upward stroke of the first plunger 110 is limited.
  • the first support part 141 and the second support part 145 are close to each other at both ends but spaced apart from each other to form an upper opening through which the first plunger 110 can pass in the vertical direction, and the first plunger 141 is the support part ( 140) When moving vertically into the inside, the opening width of the upper opening decreases, and the first and second support parts 141 and 145 and the first plunger 110 come into contact with each other to form an additional contact point.
  • the first support part 141 has a first extension part 145a extending into the inner space of the support part 140, and the second support part 145 has a second extension part 145b extending into the inner space of the support part 140.
  • the first extension part 145a is connected to the first door part 144a.
  • the first extension part 145a has one end connected to the first door part 144a and the other end extending into the inner space of the support part 140 to form a free end.
  • the second extension part 145b is connected to the second door part 144b.
  • the second extension part 145b has one end connected to the second door part 144b and the other end extending into the inner space of the support part 140 to form a free end.
  • the first plunger 110 includes a first protrusion 110a extending in the direction of the first extension 145a and a second protrusion 110b extending in the direction of the second extension 145b.
  • first protrusion 110a and the second protrusion 110b can contact the first extension 145a and the second extension 145b, respectively.
  • the first protruding piece 110a and the second protruding piece 110b can come into contact with the first extension part 145a and the second extension part 145b, respectively, providing an additional contact point.
  • the first extension part 145a and the second extension part 145b are inclined, when the first plunger 110 moves vertically, the first protrusion 110a and the second protrusion 110b The separation space between the first door part 144a and the second door part 144b is reduced by pressing the extension part 145a and the second extension part 145b, respectively.
  • the first door part 144a and the second door part 144b are deformed to come closer to each other, thereby reducing the opening width of the upper opening.
  • the opening width of the upper opening decreases, and the first and second support parts 141 and 145 and the first plunger 110 contact each other to form an additional contact point. .
  • the first and second protruding pieces 110a and 110b and the first and second extension parts 145a and 145b primarily come into contact with each other to form additional contact points.
  • the first and second door parts 144a and 144b and the first plunger 110 contact each other to additionally form a contact point.
  • an additional current path is formed between the first plunger 110 and the support 140 .
  • This additional current path is formed directly from the support part 140 to the first plunger 110 without passing through the elastic part 130 .
  • a more stable electrical connection is possible.
  • the opening width of the upper opening decreases in proportion to the vertical movement distance of the first plunger 110 .
  • the first and second door parts 144a and 144b contact the first plunger 110
  • Frictional force between the first plungers 110 is further increased.
  • the increased frictional force prevents excessive descent of the first plunger 110 .
  • the elastic part more specifically, the first elastic part 131
  • the second plunger 120 is connected to the second elastic part 135 at the top and its end passes through the lower opening.
  • the second plunger 120 includes an inner body 121 located inside the support part 140 and connected to the second elastic part 120, and a protruding tip 125 connected to the inner body 121 and capable of passing through the lower opening. ).
  • the inner body 121 is a part located inside the support part 140, and the left and right lengths of the lower surface of the inner body 121 are shorter than the opening width of the lower opening so that the inner body 121 does not escape from the support part 140. formed large.
  • a stepped portion 127 is provided on the protruding tip 125 of the second plunger 120 .
  • the stepped portion 127 is formed at a portion of the second plunger 120 protruding from the support portion 140 while the width of the second plunger 120 increases from the second contact point toward the lower opening.
  • Scrubs of the oxide film layer generated in the process of performing the wiping operation of the second plunger 120 are generated.
  • the crumbs are electrodeposited and aggregated with each other, and these crumbs are caught on the step and are induced to fall naturally, and are prevented from growing continuously.
  • the stepped portion performs a function of preventing debris from moving into the support portion 140 .
  • the second plunger 120 repeatedly performs upward and downward motions, and at this time, the support parts 140 located on the left and right sides and the second plunger 120 come into sliding contact with each other.
  • a concave portion is formed on the side of the inner body 121 facing the support 140. Through the configuration of the concave portion provided in the inner body 121, the second plunger 120 can move up and down more smoothly.
  • the second plunger 120 performs a wiping operation at the second contact point while vertically rising inside the support part 140 .
  • the second elastic part 135 is the second plunger 120 so that the second contact point of the second plunger 120 can perform a wiping operation when the second plunger 120 rises. It is eccentric in the axial direction of and connected to the second plunger 120.
  • the second elastic part 135 is connected to the upper surface of the second plunger 120 at a position biased to one side based on the central axis of the second plunger 120 on the upper surface of the second plunger 120 . More specifically, the curved portion 130b of the second elastic portion 135 is connected to the upper surface of the second plunger 120 . One side of the upper surface of the second plunger 120 is connected to the second elastic part 135, and the other side of the upper surface of the second plunger 120 is not connected to the second elastic part 135, and the second elastic part 135 is formed to be spaced apart from
  • the second plunger 120 When the second plunger 120 rises, the second plunger 120 receives a repulsive force by the second elastic part 135 connected to one side of the top surface of the second plunger 120, but the other side of the top surface of the second plunger 120 Since it is spaced apart from the second elastic part 135, it does not receive a repulsive force.
  • the eccentric resisting force acts on the second plunger 120 .
  • the second plunger 120 receives an eccentric resisting force from the upper side, so that a rotational moment is generated in the second plunger 120, and as a result, the protruding tip 125 of the second plunger 120 exerts an appropriate contact pressure with the test object.
  • a wiping operation is performed on an object to be inspected (eg, a semiconductor device).
  • an object to be inspected eg, a semiconductor device.
  • the protruding tip 125 of the second plunger 120 maintains an appropriate contact pressure and is tilted at the same time, it induces a crack in the oxide film layer, and the conductive material layer of the electrode pad WP is exposed through the crack, so that the protruding tip 125 and the protruding tip 125 come into contact Through this, an electrical connection is made.
  • this wiping operation it is possible to minimize damage to the electrode pads WP and does not cause an excessive amount of debris on the oxide film layer, so that the use time of the electrically conductive contact pin 100 is improved. .
  • the extent to which the second contact wipes the electrode pad WP of the object to be inspected can be controlled by the size of the gap between the lower opening and the protruding tip 125 .
  • the gap between the lower opening and the protruding tip 125 is a factor determining the allowable tilt angle.
  • the probe pin 7 is bent or buckled by pressure applied to both ends, and as a result, the contact of the probe pin 7 slides to remove the oxide film layer on the electrode pad, which is an object to be inspected.
  • the removal of the oxide layer may be easy due to excessive pressure that causes the probe pin 7 to be bent in the width direction, the problem of increasing damage to the electrode pad has been continuously raised.
  • electrode pads are becoming smaller and smaller in response to the narrow pitch trend, damage to the electrode pad by the probe pin 7 due to excessive contact pressure is becoming more frequent.
  • the electrically conductive contact pin 100 has a spring structure in which the plate-shaped plate of the second elastic part 135 is repeatedly bent in advance when the second plunger 120 receives contact pressure. Because of the structure of wiping while being compressed and deformed, it is possible to minimize damage to the electrode pads by preventing excessive pressure from being applied to the electrode pads.
  • the prior art has a structure in which the probe pin 7 itself is elastically deformed and performs a wiping operation, whereas in the electrically conductive contact pin 100 according to a preferred embodiment of the present invention, the support portion 140 is in a vertical state There is a difference in the basic operation principle of the wiping operation in that the wiping operation is performed while the second plunger 120 is tilted while maintaining the .
  • the second plunger 120 removes the oxide film layer while the second contact is tilted while maintaining an appropriate contact pressure, preventing damage to the electrode pad. can be minimized.
  • the first and second plungers 110 and 120, the elastic part 130, and the support part 140 are integrally provided as they are manufactured at once using a plating process.
  • the electrically conductive contact pin 100 constitutes the first and second plungers 110 and 120 , the elastic part 130 and the support part 140 by integrally connecting the plate-shaped plates as a whole.
  • the electrically conductive contact pin 100 may be provided by stacking a plurality of metal layers by performing a plurality of plating processes with different metals in its thickness direction.
  • the electrically conductive contact pin 100 is provided by stacking a plurality of metal layers in the thickness direction of the electrically conductive contact pin 100 .
  • the plurality of metal layers include a first metal layer 160 and a second metal layer 180 .
  • the first metal layer 160 is a metal having relatively high wear resistance compared to the second metal layer 180, and is preferably made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), or nickel (Ni).
  • the second metal layer 180 is a metal having relatively high electrical conductivity compared to the first metal layer 160, and is preferably formed of a metal selected from copper (Cu), silver (Ag), gold (Au), or an alloy thereof. It can be.
  • the first metal layer 160 is provided on the bottom and top surfaces of the electrically conductive contact pin 100 in the thickness direction, and the second metal layer 180 is provided between the first metal layers 160 .
  • the electrically conductive contact pin 100 is provided by alternately stacking the first metal layer 160, the second metal layer 180, and the first metal layer 160 in that order, and the number of layers to be stacked is three or more. It can be. 5 layers are shown in the drawing.
  • the first metal layer 160 is composed of a palladium-cobalt (PdCo) alloy
  • the second metal layer 180 is composed of copper (Cu) such that the palladium-cobalt (PdCo) alloy and copper (Cu) are alternately formed. It can be laminated to constitute three or more metal layers.
  • the first metal layer 160 is composed of a palladium-cobalt (PdCo) alloy or rhodium (Rd)
  • the second metal layer 180 is composed of copper (Cu) and is composed of a palladium-cobalt (PdCo) alloy, copper (Cu) ), rhodium (Rd), copper (Cu), and palladium-cobalt (PdCo) alloys may be stacked in order to form five or more metal layers.
  • the thickness H of the electrically conductive contact pin 100 may be substantially the same as the width W of the electrically conductive contact pin 100 . Through this, the thickness of the electrically conductive contact pin 100 is small compared to the width of the electrically conductive contact pin 100, thereby preventing the characteristic deterioration of the electrically conductive contact pin 100 caused by reducing the thickness of the electrically conductive contact pin 100 can do.
  • elasticity, abrasion resistance, and/or electrical conductivity of the electrically conductive contact pins 100 arranged in a narrow pitch may be improved through a configuration in which a plurality of metal layers are stacked.
  • a plurality of metal layers are stacked, even if the electrically conductive contact pins 100 are arranged at a narrow pitch, it is possible to prevent a phenomenon in which wear resistance or electrical conductivity is deteriorated and to provide high elasticity mechanical properties. do.
  • the electrically conductive contact pin 100 includes an elastic contact portion TM.
  • the elastic contact portion TM is provided by alternately stacking the first metal layer 160 and the second metal layer 180. More specifically, the first plunger 110, the second plunger 120, the elastic part 130, the support part 140, and the elastic contact part TM are provided by stacking a plurality of metal layers, and the plurality of metal layers are A first metal layer 160 and a second metal layer 180 are included.
  • the elastic contact portion TM induces a restoring force acting in a direction perpendicular to the compression and extension directions of the elastic portion 130 on the sidewall of the guide hole to prevent the electrically conductive contact pin 100 from falling due to its own weight.
  • the elastic contact portion TM extends outward from the support portion 140 in the width direction of the electrically conductive contact pin 100 and is elastically supported on the sidewall of the guide hole.
  • the elastic contact part TM is formed in a structure that is elastically deformed when it comes into close contact with the sidewall of the guide hole of the guide plate GP.
  • the guide plate GP may be formed as a single member.
  • the guide plate GP includes an upper guide plate GP1 and a lower guide plate GP2, and the elastic contact part TM includes the upper guide plate GP1 and the lower guide plate GP2. ) is provided at a position corresponding to the position of at least one of the guide holes.
  • the elastic contact part TM is formed between the guide hole of the upper guide plate GP1 and the lower guide plate GP2. It may be provided to correspond to at least one of the guide holes.
  • the elastic contact part TM is provided to correspond to the guide hole of the upper guide plate GP1 or the guide hole of the lower guide plate GP2, or the guide hole of the upper guide plate GP1 and the lower guide plate GP2. It may be provided to correspond to all of the guide holes.
  • FIG. 8B shows a structure in which an elastic contact part TM is provided to correspond to the guide hole of the upper guide plate GP1, and the elastic contact part TM is not provided to correspond to the guide hole of the lower guide plate GP2.
  • the lower guide plate GP2 serves to guide the ascending and descending of the electrically conductive contact pins 100 and minimizes shaking of the electrically conductive contact pins 100 .
  • the elastic contact part TM has one end connected to the support part 140 and the other end formed as a free end. Between one end and the other end of the elastic contact part TM is formed to be curved in the direction of the guide hole. Through this, damage to the guide hole is minimized when it is elastically supported on the side wall of the guide hole and at the same time frictional movement with the side wall of the guide hole. In addition, even if the probe head or the like is reversed to replace the electrically conductive contact pins 100, the electrically conductive contact pins 100 do not fall from the guide plate GP.
  • a clearance gap (YT) is formed between the other end of the elastic contact part (TM) and the support part (140).
  • the clearance gap (YT) provides a clearance space in which the other end of the elastic contact portion (TM) can be elastically deformed.
  • At least one elastic contact part TM is formed based on the support part 140 . At least one elastic contact part TM may be formed on at least one of the first support part 141 and the second support part 145 . The elastic contact part TM may be formed on the first support part 141 or the second support part 145 , and may be formed on both the first support part 141 and the second support part 145 . In addition, at least one elastic contact part TM may be formed on the first support part 141 and/or the second support part 145 .
  • the elastic contact part TM includes a first elastic contact part TM1 provided on the left side of the first support part 141 and a second elastic contact part TM2 provided on the right side of the second support part 145 .
  • One end of the first elastic contact part TM1 is connected to the first support part 141 and the other end is formed as a free end
  • one end of the second elastic contact part TM2 is connected to the second support part 145 and the other end is formed as a free end. It is formed as a free end.
  • the location of at least one end of the elastic contact portion TM in the longitudinal direction of the electrically conductive contact pin 100 coincides with the location of the intermediate fixing portion 137 and is connected to the intermediate fixing portion 137 .
  • An intermediate fixing part 137 is positioned between one end of the first elastic contact part TM1 and one end of the second elastic contact part TM2.
  • One end of the first elastic contact part TM1 and one end of the second elastic contact part TM2 are connected to the intermediate fixing part 137 so that one end of the first elastic contact part TM1 and the second elastic contact part TM2 are connected. ) is not deformed in the width direction of the electrically conductive contact pin 100.
  • the restoring force of the other end of the first elastic contact part TM1 and the other end of the second elastic contact part TM2 is induced on the sidewall of the guide hole, and one end of the first elastic contact part TM1 and the second elastic contact part TM2 Since one end of ) is firmly fixed by the intermediate fixing part 137, it is possible to induce a solid restoring force.
  • the electrically conductive contact pins 100 are installed by inserting them into the guide plate GP.
  • the elastic contact portion TM is elastically adhered to the sidewall of the guide hole of the guide plate GP.
  • the overall width dimension (W) and thickness dimension (H) of the electrically conductive contact pin 100 are smaller than the opening width of the guide hole of the guide plate GP, but the width dimension of the elastic contact portion TM is smaller than the guide plate GP. is greater than the opening width of the guide hole of Therefore, the electrically conductive contact pin 100 is pressed with a predetermined pressing force and pushed into the guide hole, and at this time, the elastic contact portion TM is pressed in the width direction and compressed and deformed.
  • the elastic contact portion TM applies a frictional force to the sidewall of the guide hole by its restoring force, and the frictional force is greater than the gravitational force according to the weight of the electrically conductive contact pin 100 .
  • the electrically conductive contact pins 100 do not fall from the upper guide plate GP due to the weight of the electrically conductive contact pins 100 .
  • the electrically conductive contact pin 100 is movable in the longitudinal direction by an external force acting greater than the frictional force acting on the sidewall of the guide hole.
  • a probe head is formed by inserting the plurality of electrically conductive contact pins 100 into the guide plate GP.
  • the probe head is fixedly installed on the circuit board.
  • the first plunger 110 is in contact with a connection object positioned at the top and the second plunger 120 is in contact with a connection object positioned at the bottom.
  • the electrically conductive contact pin 100 is pressed in the longitudinal direction by a connection object located at the top and a connection object located at the bottom, the first elastic portion 131 and the second elastic portion 135 are compressed and deformed in the longitudinal direction.
  • the pressing force of the object to be connected is attenuated and transmitted to the frictional force of the elastic contact part TM. Accordingly, even when the elastic contact part TM adopts a structure in which the sidewall of the guide hole is elastically supported by being in close contact with the sidewall of the guide hole, damage to the sidewall of the guide hole due to frictional force can be minimized.
  • the electrically conductive contact pin 100 since the elastic contact portion TM is provided on the electrically conductive contact pin 100 at a position corresponding to the position of the sidewall of the guide hole of the guide plate GP, the electrically conductive contact pin 100 extends to the outside of the guide hole in the width direction. It does not have a protruding structure. Through this, interference between adjacent electrically conductive contact pins 100 can be minimized. In addition, the electrically conductive contact pin 100 can minimize interference between adjacent electrically conductive contact pins 100 by adopting the elastic part 130 that is elastically displaced in the longitudinal direction by an external force. As a result, the electrically conductive contact pin 100 is advantageous for responding to a narrow pitch.
  • the electrically conductive contact pins 100 when trying to replace the defective electrically conductive contact pins 100 individually for reasons such as defects, if the electrically conductive contact pins 100 are forcibly pulled, the electrically conductive contact pins 100 are separated from the guide plate GP.
  • the electrically conductive contact pins 100 can be easily separated from the guide plate GP.
  • a new electrically conductive contact pin 100 when a new electrically conductive contact pin 100 is to be installed in the removed position, it can be easily installed by forcibly pushing the electrically conductive contact pin 100 into the guide hole of the guide plate GP. Without the need to separate the fixed guide plate GP, it is easy to replace only the defective electrically conductive contact pins 100 with good electrically conductive contact pins 100 while the guide plate GP is fixedly installed. can
  • the width of the guide hole of the lower guide plate GP2 may be smaller than that of the guide hole of the upper guide plate GP1.
  • the electrically conductive contact pins 100 do not easily pass through the guide holes of the lower guide plate GP2.
  • the electrically conductive contact pin 100 removed from the upper guide plate GP1 by an unintended external force is pushed into the upper guide plate GP1 again and installed.
  • the guide hole width of the lower guide plate GP2 is smaller than that of the upper guide plate GP1, shaking of the lower part of the electrically conductive contact pin 100 can be minimized.
  • FIG. 9 is a perspective view of an electrically conductive contact pin 200 according to a second preferred embodiment of the present invention.
  • the electrically conductive contact pin 200 according to the second preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact part (TM), and the rest All configurations are the same.
  • the elastic contact part TM of the electrically conductive contact pin 200 according to the second preferred embodiment of the present invention is different from the configuration of the first embodiment composed of different metal layers in that it is composed of a single metal layer. .
  • the first plunger 110, the second plunger 120, the elastic part 130, and the support part 140 are provided by stacking a plurality of metal layers, and the elastic part
  • the adhesion part TM is provided with a single metal layer.
  • the first plunger 110, the second plunger 120, the elastic part 130, and the support part 140 are manufactured by a multi-layer plating process including the first metal layer 160 and the second metal layer 180, and are elastically adhered to each other.
  • Part TM is fabricated by a single-layer plating process including only a single metal layer.
  • the elastic contact part TM is composed of the first metal layer 160 .
  • the first metal layer 160 is rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), nickel (Ni), manganese (Mn), tungsten (W), phosphorus (Ph) or an alloy thereof. , or a metal selected from a palladium-cobalt (PdCo) alloy, a palladium-nickel (PdNi) alloy or a nickel-phosphorus (NiPh) alloy, a nickel-manganese (NiMn), a nickel-cobalt (NiCo), or a nickel-tungsten (NiW) alloy.
  • Rd rhodium
  • platinum platinum
  • Ir iridium
  • palladium palladium
  • Ni nickel
  • Mn manganese
  • W tungsten
  • Ph phosphorus
  • Ph phosphorus
  • the first metal layer 160 is a metal having high abrasion resistance, and through this, when the elastic contact part TM comes into contact with the sidewall of the guide hole and slides, wear can be minimized.
  • FIG. 10 is a perspective view of an electrically conductive contact pin 300 according to a third preferred embodiment of the present invention.
  • the electrically conductive contact pin 300 according to the third preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact part (TM), and the rest All configurations are the same.
  • the elastic contact portion (TM) of the electrically conductive contact pin 300 according to the third preferred embodiment of the present invention is configured in a straight line without bending from one end to the other end. There is a difference from the configuration of the elastic contact part (TM) of the contact pin (100).
  • the elastic contact part TM has one end connected to the support part 140 and the other end formed as a free end. It is composed of extending in the form of a straight line from one end to the other end.
  • FIG. 11 is a perspective view of an electrically conductive contact pin 400 according to a fourth preferred embodiment of the present invention.
  • the electrically conductive contact pin 400 according to the fourth preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact part (TM), and the rest All configurations are the same.
  • the elastic contact portion (TM) of the electrically conductive contact pin 300 according to the fourth preferred embodiment of the present invention is formed in a convex shape in the width direction between one end and the other end, and both one end and the other end are connected to the support part 140. It is different from the configuration of the elastic contact portion TM of the electrically conductive contact pin 100 according to the first embodiment.
  • Both one end and the other end of the elastic contact part TM according to the fourth embodiment are connected to the support part 140 and elastically come into close contact with the sidewall of the guide hole at the convex portion between one end and the other end.
  • the elastic contact part (TM) according to the fourth embodiment forms a closed space between the support part 140 and the closed space becomes a free gap (YT). Through this, the deformation rate of the elastic contact part TM in the width direction is minimized and a greater frictional force is induced to the sidewall of the guide hole.
  • FIG. 12 is a perspective view of an electrically conductive contact pin 500 according to a fifth preferred embodiment of the present invention.
  • the electrically conductive contact pin 500 according to the fifth preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact portion (TM), and the rest All configurations are the same.
  • the elastic contact portion TM of the electrically conductive contact pin 500 according to the fifth preferred embodiment of the present invention is formed in a convex shape in the width direction between one end and the other end, and both one end and the other end are connected to the support part 140. It is different from the configuration of the elastic contact portion TM of the electrically conductive contact pin 100 according to the first embodiment in that it has a configuration in which at least two convex portions are formed.
  • Both one end and the other end of the elastic contact part TM according to the fifth embodiment are connected to the support part 140 and elastically adhered to the sidewall of the guide hole at a plurality of convex portions between one end and the other end.
  • the elastic contact part TM according to the fifth embodiment forms a closed space between the support part 140 and the closed space becomes a free gap YT. Through this, the deformation rate of the elastic contact part TM in the width direction is minimized and a greater frictional force is induced to the sidewall of the guide hole.
  • FIG. 13 is a perspective view of an electrically conductive contact pin 600 according to a sixth preferred embodiment of the present invention.
  • the electrically conductive contact pin 600 according to the sixth preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact part (TM), and the rest All configurations are the same.
  • the elastic contact portion (TM) of the electrically conductive contact pin 600 according to the sixth preferred embodiment of the present invention is formed in a convex shape in the width direction between one end and the other end, and both one end and the other end are connected to the support part 140. It is different from the configuration of the elastic contact portion TM of the electrically conductive contact pin 100 according to the first embodiment in that it has a configuration in which at least two convex portions are formed.
  • Both one end and the other end of the elastic contact part TM according to the sixth embodiment are connected to the support part 140 and elastically come into close contact with the sidewall of the guide hole at a plurality of convex portions between one end and the other end. It is different from the configuration of the electrically conductive contact pin 500 according to the fifth embodiment in that there is no support part 140 inside the elastic contact part TM in the width direction.
  • An elastic part 130 is provided without a support part 140 inside the elastic contact part TM according to the sixth embodiment in the width direction, so that the clearance gap (YT) in the electrically conductive contact pin 500 according to the fifth embodiment ) has a clearance gap (YT) that is relatively larger than Through this, it is possible to more smoothly perform the deformation of the elastic contact part TM in the width direction.
  • the electrically conductive contact pins 100, 200, 300, 400, 500, and 600 are provided in a test device to electrically and physically contact an object to be tested to transmit an electrical signal. used
  • the inspection device includes a guide plate (GP) with holes and electrically conductive contact pins (100, 200, 300, 400, 500, 600) inserted into the guide holes of the guide plate (GP) and installed on the guide plate (GP). do.
  • GP guide plate
  • electrically conductive contact pins 100, 200, 300, 400, 500, 600
  • the inspection device may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket.
  • the electrically conductive contact pins 100, 200, 300, 400, 500, and 600 may be electrically conductive contact pins provided in a probe card to inspect a semiconductor chip, and provided in a test socket to inspect a packaged semiconductor package to inspect a semiconductor package. It could be the socket pin you are checking.
  • the electrically conductive contact pins 100, 200, 300, 400, 500, and 600 according to each preferred embodiment of the present invention may be employed in a vertical probe card.
  • a vertical probe card according to a preferred embodiment of the present invention is inserted into a space converter having a connection pad, a guide plate (GP) provided at a lower part of the space converter and spaced apart from the space converter, and a hole in the guide plate (GP). It includes electrically conductive contact pins (100, 200, 300, 400, 500, 600) installed.
  • the vertical probe card according to a preferred embodiment of the present invention is used in an inspection process of inspecting a chip fabricated on a wafer during a semiconductor manufacturing process, and is capable of responding to micrometers.
  • the pitch interval between the electrically conductive contact pins 100, 200, 300, 400, 500, and 600 installed on the guide plate GP of the vertical probe card is 50 ⁇ m or more and 150 ⁇ m or less.
  • Inspection devices in which the electrically conductive contact pins 100 and 200 according to a preferred embodiment of the present invention can be used are not limited thereto, and include all inspection devices for checking whether an object to be inspected is defective by applying electricity.
  • the inspection target of the inspection device may include a semiconductor device, a memory chip, a microprocessor chip, a logic chip, a light emitting device, or a combination thereof.
  • inspection objects include logic LSIs (such as ASICs, FPGAs, and ASSPs), microprocessors (such as CPUs and GPUs), memories (DRAM, HMC (Hybrid Memory Cube), MRAM (Magnetic RAM), PCM (Phase- Change Memory), ReRAM (Resistive RAM), FeRAM (ferroelectric RAM) and flash memory (NAND flash)), semiconductor light emitting devices (including LED, mini LED, micro LED, etc.), power devices, analog ICs (DC-AC converters and such as insulated gate bipolar transistors (IGBTs), MEMS (such as acceleration sensors, pressure sensors, vibrators, and giro sensors), wire-free devices (such as GPS, FM, NFC, RFEM, MMIC, and WLAN), discrete devices, Includes BSI, CIS, Camera Module, CMOS, Passive Device, GAW Filter, RF Filter, RF IPD, APE and BB.
  • LSIs such as ASICs, FPGAs, and ASSPs

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  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The present invention provides an electrically conductive contact pin and an inspection device having same, the contact pin applying frictional force to the sidewall of a guide hole so as to not to be dropped from a guide plate due to the self-load thereof and allow the pressure of an object to be connected to be attenuated through compressive strain in the lengthwise direction of an elastic part, so that the attenuated pressure is transferred to the frictional force.

Description

전기 전도성 접촉핀 및 이를 구비하는 검사장치Electrically conductive contact pin and testing device having the same
본 발명은 전기 전도성 접촉핀 및 이를 구비하는 검사장치에 관한 것이다.The present invention relates to an electrically conductive contact pin and a testing device having the same.
전기 전도성 접촉핀은, 검사장치에 구비되어 검사 대상물과 전기적, 물리적으로 접촉하여 전기적 신호를 전달하는데 사용된다. 검사장치는 반도체 제조공정에 사용되는 검사장치일 수 있으며, 그 일례로 프로브 카드일 수 있고, 테스트 소켓일 수 있다. 전기 전도성 접촉핀들은 프로브 카드에 구비되어 반도체 칩을 검사하는 전기 전도성 접촉핀일 수 있고, 패키징된 반도체 패키지를 검사하는 테스트 소켓에 구비되어 반도체 패키지를 검사하는 소켓 핀일 수 있다. 본 발명은 이와 같은 전기 전도성 접촉핀에 관한 것이지만, 이하 종래기술은 검사 장치 중에서도 수직형 프로브 카드를 예시하여 설명한다. The electrically conductive contact pin is provided in the testing device and is used to electrically and physically contact an object to be tested to transmit an electrical signal. The inspection device may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket. The electrically conductive contact pins may be electrically conductive contact pins provided in a probe card to inspect a semiconductor chip, or socket pins provided in a test socket to inspect a packaged semiconductor package to inspect a semiconductor package. Although the present invention relates to such an electrically conductive contact pin, the prior art will be described below by exemplifying a vertical probe card among inspection devices.
도 1은 종래기술에 따른 수직형 프로브 카드(1)를 개략적으로 도시한 도면이다.1 is a schematic view of a vertical probe card 1 according to the prior art.
웨이퍼 단위에서의 반도체 칩 검사는 프로브 카드에 의해 수행된다. 프로브 카드는 웨이퍼와 테스트 장비 헤드 사이에 장착되며, 프로브 카드상에 8,000~100,000개의 전기 전도성 접촉핀이 웨이퍼상의 개별 칩 내의 패드(WP)에 접촉되어 프로브 장비와 개별 칩간에 테스트 신호(Signal)를 서로 주고 받을 수 있도록 하는 중간 매개체 역할을 수행하게 된다. 이러한 프로브 카드에는 수직형 프로브 카드, 캔틸레버형 프로브 카드, 멤스 프로브 카드가 있다. Semiconductor chip inspection on a wafer basis is performed by a probe card. The probe card is mounted between the wafer and the test equipment head, and 8,000 to 100,000 electrically conductive contact pins on the probe card are in contact with pads (WP) in individual chips on the wafer to transmit test signals between the probe equipment and individual chips. It serves as an intermediary that enables communication between them. These probe cards include vertical probe cards, cantilever probe cards, and MEMS probe cards.
일반적으로 수직형 프로브 카드(1)는, 회로기판(2), 회로기판(2)의 하측에 구비되는 공간변환기(3) 및 공간변환기(3)의 하측에 구비되는 프로브 헤드(7)를 포함하여 구성된다.In general, a vertical probe card (1) includes a circuit board (2), a space converter (3) provided on the lower side of the circuit board (2), and a probe head (7) provided on the lower side of the space converter (3). It is composed by
프로브 헤드(7)는 다수의 전기 전도성 접촉핀(7)과 전기 전도성 접촉핀(7)이 삽입되는 구멍을 구비하는 가이드 플레이트(5, 6)를 포함한다. 프로브 헤드(7)는 상부 가이드 플레이트(5) 및 하부 가이드 플레이트(6)를 포함하며, 상부 가이드 플레이트(5) 및 하부 가이드 플레이트(6)는 스페이서를 통해 서로 이격되어 고정 설치된다. 전기 전도성 접촉핀(7)은 상부 가이드 플레이트(5) 및 하부 가이드 플레이트(6)사이에서 탄성 변형하는 구조로서, 이러한 전기 전도성 접촉핀(7)을 채택하여 수직형 프로브 카드(1)를 구성한다.The probe head 7 includes guide plates 5 and 6 having a plurality of electrically conductive contact pins 7 and holes into which the electrically conductive contact pins 7 are inserted. The probe head 7 includes an upper guide plate 5 and a lower guide plate 6, and the upper guide plate 5 and the lower guide plate 6 are spaced apart from each other through a spacer and are fixedly installed. The electrically conductive contact pins 7 are elastically deformed between the upper guide plate 5 and the lower guide plate 6, and the vertical probe card 1 is constructed by adopting such electrically conductive contact pins 7. .
전기 전도성 접촉핀(7)은 그 바디부의 외측으로 돌출된 걸림턱을 구비한다. 걸림턱은 상부 가이드 플레이트(5)의 구멍 외측으로 돌출 형성되어 상부 가이드 플레이트(5)의 상면에 지지됨으로써 프로브 헤드(7)로부터 전기 전도성 접촉핀(7)이 낙하되지 않도록 한다.The electrically conductive contact pin 7 has a locking jaw projecting outwardly of its body. The locking jaw protrudes outward from the hole of the upper guide plate 5 and is supported on the upper surface of the upper guide plate 5 to prevent the electrically conductive contact pin 7 from falling from the probe head 7 .
하지만, 전기 전도성 접촉핀(7)의 교체를 위해 프로브 헤드(7)를 반전시키는 경우에는, 전기 전도성 접촉핀(7)이 가이드 플레이트(5, 6)로부터 낙하되는 문제가 발생하게 된다.However, when the probe head 7 is reversed to replace the electrically conductive contact pins 7, a problem occurs in that the electrically conductive contact pins 7 fall from the guide plates 5 and 6.
[선행기술문헌][Prior art literature]
[특허문헌][Patent Literature]
(특허문헌 1) 등록번호 제10-1913355호 등록특허공보(Patent Document 1) Registration No. 10-1913355 Patent Publication
본 발명은 상술한 종래기술의 문제점을 해결하기 위하여 안출된 것으로서, 본 발명은 가이드 구멍의 측벽에 마찰력을 인가하여 가이드 플레이트로부터 자중에 의해 낙하되지 않도록 하면서 탄성부의 길이 방향의 압축 변형을 통해 접속 대상물의 가압력이 감쇠되어 마찰력에 전달되도록 하는 전기 전도성 접촉핀 및 이를 구비하는 검사장치를 제공하는 것을 그 목적으로 한다. The present invention has been made to solve the above-described problems of the prior art, and the present invention applies frictional force to the sidewall of the guide hole so that it does not fall by its own weight from the guide plate and connects the object through compressive deformation in the longitudinal direction of the elastic part. It is an object of the present invention to provide an electrically conductive contact pin and a testing device having the same so that the pressing force is attenuated and transmitted to the frictional force.
또한, 본 발명은 양단에 가해지는 가압력에 의해 그 바디가 수평방향으로 볼록해지면서 탄력적으로 구부러지거나 휘어지지 않으면서 검사 대상물의 전기적 특성을 효과적으로 검사할 수 있는 전기 전도성 접촉핀 및 이를 구비하는 검사장치를 제공하는 것을 그 목적으로 한다.In addition, the present invention is an electrically conductive contact pin capable of effectively inspecting the electrical characteristics of an object to be inspected without elastically bending or bending while its body is convex in the horizontal direction by a pressing force applied to both ends, and a testing device having the same Its purpose is to provide
본 발명의 목적을 달성하기 위해, 본 발명에 따른 전기 전도성 접촉핀은, 가이드 플레이트의 가이드 구멍에 삽입되어 설치되는 전기 전도성 접촉핀에 있어서, 상기 전기 전도성 접촉핀의 제1단부측에 위치하며 그 단부가 제1접점이 되는 제1플런저; 상기 전기 전도성 접촉핀의 제2단부측에 위치하며 그 단부가 제2접점이 되는 제2 플런저; 상기 제1플런저와 상기 제2플런저가 상기 전기 전도성 접촉핀의 길이방향으로 탄력적으로 변위되도록 하는 탄성부; 상기 탄성부가 상기 전기 전도성 접촉핀의 길이방향으로 압축 및 신장되도록 안내하며, 상기 탄성부가 압축되면서 좌굴되는 것을 방지하도록 상기 전기 전도성 접촉핀의 길이 방향을 따라 상기 탄성부의 외측에 구비되는 지지부; 및 상기 지지부로부터 상기 전기 전도성 접촉핀의 폭 방향 외측으로 연장되되 상기 가이드 구멍의 측벽에 탄력적으로 지지되어, 상기 탄성부의 압축 및 신장 방향과 수직한 방향으로 작용하는 복원력을 상기 가이드 구멍의 측벽에 유발하여 상기 전기 전도성 접촉핀이 자중에 의해 낙하되지 않도록 하는 탄성밀착부;를 포함한다.In order to achieve the object of the present invention, an electrically conductive contact pin according to the present invention is installed by being inserted into a guide hole of a guide plate, and is located on the first end side of the electrically conductive contact pin. a first plunger whose end serves as a first contact point; a second plunger located on the side of the second end of the electrically conductive contact pin, the end of which serves as a second contact; an elastic part for allowing the first plunger and the second plunger to be elastically displaced in the longitudinal direction of the electrically conductive contact pin; a support portion provided outside the elastic portion along the longitudinal direction of the electrically conductive contact pin to guide the elastic portion to be compressed and stretched in the longitudinal direction of the electrically conductive contact pin and to prevent the elastic portion from buckling while being compressed; and extends from the support part to the outside in the width direction of the electrically conductive contact pin and is elastically supported on the sidewall of the guide hole to cause a restoring force acting in a direction perpendicular to the direction of compression and extension of the elastic part on the sidewall of the guide hole. and an elastic contact portion preventing the electrically conductive contact pin from falling due to its own weight.
또한, 상기 탄성부는, 상기 제1플런저에 연결되는 제1탄성부; 상기 제2플런저에 연결되는 제2탄성부; 및 상기 제1탄성부와 상기 제2탄성부 사이에서 상기 제1탄성부 및 상기 제2탄성부와 연결되고 상기 지지부와 일체로 구비되는 중간 고정부;를 포함하고, 상기 전기 전도성 접촉핀의 길이방향으로 상기 탄성밀착부의 적어도 일단부의 위치는 상기 중간 고정부의 위치와 일치하여 상기 중간 고정부와 연결된다.In addition, the elastic part may include a first elastic part connected to the first plunger; a second elastic part connected to the second plunger; and an intermediate fixing portion connected to the first elastic portion and the second elastic portion between the first elastic portion and the second elastic portion and provided integrally with the support portion, wherein the length of the electrically conductive contact pin includes: In the direction, a position of at least one end of the elastic contact part coincides with a position of the intermediate fixing part and is connected to the intermediate fixing part.
또한, 상기 탄성밀착부의 일단은 상기 지지부에 연결되고, 상기 탄성밀착부의 타단은 자유단이다.In addition, one end of the elastic contact part is connected to the support part, and the other end of the elastic contact part is a free end.
또한, 상기 탄성밀착부의 일단 및 타단은 상기 지지부에 연결되고, 상기 탄성밀착부의 일단 및 타단 사이는 상기 가이드 구멍 방향으로 만곡되어 형성된다.In addition, one end and the other end of the elastic contact part are connected to the support part, and a space between one end and the other end of the elastic contact part is curved in the direction of the guide hole.
또한, 상기 지지부는 상기 탄성부의 좌측에 구비되는 제1지지부와 상기 탄성부의 우측에 구비되는 제2지지부를 포함하고, 상기 탄성밀착부는 상기 제1지지부의 좌측에 구비되는 제1탄성밀착부와 상기 제2지지부의 우측에 구비되는 제2탄성밀착부를 포함하고, 상기 탄성부는, 상기 제1플런저에 연결되는 제1탄성부; 상기 제2플런저에 연결되는 제2탄성부; 및 상기 제1탄성부와 상기 제2탄성부 사이에서 상기 제1탄성부 및 상기 제2탄성부와 연결되고 상기 지지부와 일체로 구비되는 중간 고정부;를 포함하고, 상기 제1탄성밀착부와 상기 제2탄성밀착부 사이에 상기 중간 고정부가 구비된다.In addition, the support part includes a first support part provided on the left side of the elastic part and a second support part provided on the right side of the elastic part, and the elastic contact part includes a first elastic contact part provided on the left side of the first support part and the second support part provided on the right side of the elastic part. A second elastic contact portion provided on the right side of the second support portion, wherein the elastic portion includes: a first elastic portion connected to the first plunger; a second elastic part connected to the second plunger; and an intermediate fixing part connected to the first elastic part and the second elastic part between the first elastic part and the second elastic part and integrally provided with the support part, The intermediate fixing part is provided between the second elastic contact parts.
또한, 상기 제1플런저, 상기 제2플런저, 상기 탄성부 및 상기 지지부는 복수개의 금속층이 적층되어 구비되고, 상기 탄성밀착부는 단일의 금속층으로 구비된다.In addition, the first plunger, the second plunger, the elastic part, and the support part are provided by stacking a plurality of metal layers, and the elastic contact part is provided with a single metal layer.
또한, 상기 탄성밀착부은, 일단에서 타단이 이르기까지 굴곡되지 않고 일직선으로 구성된다.In addition, the elastic contact portion is composed of a straight line without bending from one end to the other end.
또한, 상기 탄성 밀착부의 일단과 타단 사이에서 폭 방향으로 볼록한 형태로 형성되되 일단 및 타단이 모두 상기 지지부에 연결된다.In addition, it is formed in a convex shape in the width direction between one end and the other end of the elastic contact portion, and both one end and the other end are connected to the support part.
또한, 상기 탄성밀착부는, 일단과 타단 사이에서 폭 방향으로 볼록한 형태로 형성되되 일단 및 타단이 모두 상기 지지부에 연결되고 볼록부가 적어도 2개 형성된다.In addition, the elastic contact part is formed in a convex shape in the width direction between one end and the other end, and both one end and the other end are connected to the support part, and at least two convex parts are formed.
또한, 상기 제1플런저는 상부에 위치하는 접속 대상물과 접촉되고, 상기 제2플런저는 하부에 위치하는 접속 대상물과 접촉되며, 상기 전기 전도성 접촉핀이 상부에 위치하는 접속 대상물과 하부에 위치하는 접속 대상물에 의해 길이 방향으로 가압되면, 상기 탄성부는 길이 방향으로 압축 변형을 하고 상기 탄성부의 길이 방향의 압축 변형을 통해 접속 대상물의 가압력은 감쇠되어 상기 탄성밀착부의 마찰력에 전달된다.In addition, the first plunger is in contact with the connection object located on the upper side, the second plunger is in contact with the connection object located on the lower side, and the electrically conductive contact pin is in contact with the connection object located on the upper side and the connection object located on the lower side. When pressed by an object in the longitudinal direction, the elastic portion undergoes compressive deformation in the longitudinal direction, and through the compressive deformation of the elastic portion in the longitudinal direction, the pressing force of the connection object is attenuated and transmitted to the frictional force of the elastic contact portion.
한편, 본 발명에 따른 검사장치는, 가이드 구멍이 형성된 가이드 플레이트; 및 상기 가이드 플레이트의 가이드 구멍에 삽입되어 상기 가이드 플레이트에 설치되는 전기 전도성 접촉핀;을 포함하되, 상기 전기 전도성 접촉핀은, 상기 전기 전도성 접촉핀의 제1단부측에 위치하며 그 단부가 제1접점이 되는 제1플런저; 상기 전기 전도성 접촉핀의 제2단부측에 위치하며 그 단부가 제2접점이 되는 제2 플런저; 상기 제1플런저와 상기 제2플런저가 상기 전기 전도성 접촉핀의 길이방향으로 탄력적으로 변위되도록 하는 탄성부; 상기 탄성부가 상기 전기 전도성 접촉핀의 길이방향으로 압축 및 신장되도록 안내하며, 상기 탄성부가 압축되면서 좌굴되는 것을 방지하도록 상기 전기 전도성 접촉핀의 길이 방향을 따라 상기 탄성부의 외측에 구비되는 지지부; 및 상기 지지부로부터 상기 전기 전도성 접촉핀의 폭 방향 외측으로 연장되되 상기 가이드 구멍의 측벽에 탄력적으로 지지되어, 상기 탄성부의 압축 및 신장 방향과 수직한 방향으로 작용하는 복원력을 상기 가이드 구멍의 측벽에 유발하여 상기 전기 전도성 접촉핀이 자중에 의해 낙하되지 않도록 하는 탄성밀착부;를 포함한다.On the other hand, the inspection device according to the present invention, the guide plate formed with a guide hole; and electrically conductive contact pins inserted into the guide holes of the guide plate and installed on the guide plate, wherein the electrically conductive contact pins are located at the first end side of the electrically conductive contact pins, and the end thereof is the first end. A first plunger that becomes a contact; a second plunger located on the side of the second end of the electrically conductive contact pin, the end of which serves as a second contact; an elastic part for allowing the first plunger and the second plunger to be elastically displaced in the longitudinal direction of the electrically conductive contact pin; a support portion provided outside the elastic portion along the longitudinal direction of the electrically conductive contact pin to guide the elastic portion to be compressed and stretched in the longitudinal direction of the electrically conductive contact pin and to prevent the elastic portion from buckling while being compressed; and extends from the support part to the outside in the width direction of the electrically conductive contact pin and is elastically supported on the sidewall of the guide hole to cause a restoring force acting in a direction perpendicular to the direction of compression and extension of the elastic part on the sidewall of the guide hole. and an elastic contact portion preventing the electrically conductive contact pin from falling due to its own weight.
또한, 상기 가이드 플레이트는, 상부 가이드 플레이트; 및 상기 상부 가이드 플레이트와 이격되어 배치되는 하부 가이드 플레이트를 포함하고, 상기 탄성밀착부는 상기 상부 가이드 플레이트 및 상기 하부 가이드 플레이트 중 적어도 어느 하나의 가이드 구멍의 위치에 대응되는 위치에 구비된다.In addition, the guide plate, the upper guide plate; and a lower guide plate spaced apart from the upper guide plate, wherein the elastic contact part is provided at a position corresponding to a position of a guide hole in at least one of the upper guide plate and the lower guide plate.
본 발명은 가이드 구멍의 측벽에 마찰력을 인가하여 가이드 플레이트로부터 자중에 의해 낙하되지 않도록 하면서 탄성부의 길이 방향의 압축 변형을 통해 접속 대상물의 가압력이 감쇠되어 마찰력에 전달되도록 하는 전기 전도성 접촉핀 및 이를 구비하는 검사장치를 제공한다. The present invention provides an electrically conductive contact pin that prevents a guide plate from falling due to its own weight by applying frictional force to the sidewall of a guide hole and attenuates the pressing force of an object to be connected through compressive deformation in the longitudinal direction of the elastic part and transmits the frictional force. It provides an inspection device that does.
또한, 본 발명은 양단에 가해지는 가압력에 의해 그 바디가 수평방향으로 볼록해지면서 탄력적으로 구부러지거나 휘어지지 않으면서 검사 대상물의 전기적 특성을 효과적으로 검사할 수 있는 전기 전도성 접촉핀 및 이를 구비하는 검사장치를 제공한다.In addition, the present invention is an electrically conductive contact pin capable of effectively inspecting the electrical characteristics of an object to be inspected without elastically bending or bending while its body is convex in the horizontal direction by a pressing force applied to both ends, and a testing device having the same provides
도 1은 종래기술에 따른 수직형 프로브 카드를 개략적으로 도시한 도면.1 is a view schematically showing a vertical probe card according to the prior art.
도 2는 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀의 평면도.Fig. 2 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention;
도 3은 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀의 사시도.3 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention;
도 4는 도 2의 A부분의 확대도.4 is an enlarged view of part A of FIG. 2;
도 5는 도 2의 A부분의 사시도.Figure 5 is a perspective view of part A of Figure 2;
도 6은 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀의 하부를 확대한 평면도.6 is an enlarged plan view of a lower portion of an electrically conductive contact pin according to a first preferred embodiment of the present invention.
도 7은 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀의 하부를 확대한 사시도.7 is an enlarged perspective view of a lower portion of an electrically conductive contact pin according to a first preferred embodiment of the present invention;
도 8a 및 도 8b는 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀이 가이드 플레이트에 삽입된 상태를 도시한 도면.8A and 8B show a state in which an electrically conductive contact pin according to a first preferred embodiment of the present invention is inserted into a guide plate;
도 9는 본 발명의 바람직한 제2실시예에 따른 전기 전도성 접촉핀을 도시한 사시도.Fig. 9 is a perspective view showing an electrically conductive contact pin according to a second preferred embodiment of the present invention;
도 10은 본 발명의 바람직한 제3실시예에 따른 전기 전도성 접촉핀을 도시한 평면도.Fig. 10 is a plan view showing an electrically conductive contact pin according to a third preferred embodiment of the present invention;
도 11은 본 발명의 바람직한 제4실시예에 따른 전기 전도성 접촉핀을 도시한 평면도.Fig. 11 is a plan view showing an electrically conductive contact pin according to a fourth preferred embodiment of the present invention;
도 12는 본 발명의 바람직한 제5실시예에 따른 전기 전도성 접촉핀을 도시한 평면도.Fig. 12 is a plan view showing an electrically conductive contact pin according to a fifth preferred embodiment of the present invention;
도 13은 본 발명의 바람직한 제6실시예에 따른 전기 전도성 접촉핀을 도시한 평면도.Fig. 13 is a plan view showing an electrically conductive contact pin according to a sixth preferred embodiment of the present invention;
이하의 내용은 단지 발명의 원리를 예시한다. 그러므로 당업자는 비록 본 명세서에 명확히 설명되거나 도시되지 않았지만 발명의 원리를 구현하고 발명의 개념과 범위에 포함된 다양한 장치를 발명할 수 있는 것이다. 또한, 본 명세서에 열거된 모든 조건부 용어 및 실시 예들은 원칙적으로, 발명의 개념이 이해되도록 하기 위한 목적으로만 명백히 의도되고, 이와 같이 특별히 열거된 실시 예들 및 상태들에 제한적이지 않는 것으로 이해되어야 한다.The following merely illustrates the principles of the invention. Therefore, those skilled in the art can invent various devices that embody the principles of the invention and fall within the concept and scope of the invention, even though not explicitly described or shown herein. In addition, it should be understood that all conditional terms and embodiments listed in this specification are, in principle, expressly intended only for the purpose of making the concept of the invention understood, and are not limited to such specifically listed embodiments and conditions. .
상술한 목적, 특징 및 장점은 첨부된 도면과 관련한 다음의 상세한 설명을 통하여 보다 분명해질 것이며, 그에 따라 발명이 속하는 기술분야에서 통상의 지식을 가진 자가 발명의 기술적 사상을 용이하게 실시할 수 있을 것이다.The above objects, features and advantages will become more apparent through the following detailed description in conjunction with the accompanying drawings, and accordingly, those skilled in the art to which the invention belongs will be able to easily implement the technical idea of the invention. .
본 명세서에서 기술하는 실시 예들은 본 발명의 이상적인 예시 도인 단면도 및/또는 사시도들을 참고하여 설명될 것이다. 이러한 도면들에 도시된 막 및 영역들의 두께 등은 기술적 내용의 효과적인 설명을 위해 과장된 것이다. 제조 기술 및/또는 허용 오차 등에 의해 예시도의 형태가 변형될 수 있다. 따라서, 본 발명의 실시 예들은 도시된 특정 형태로 제한되는 것이 아니라 제조 공정에 따라 생성되는 형태의 변화도 포함하는 것이다. 본 명세서에서 사용한 기술적 용어는 단지 특정한 실시 예를 설명하기 위해 사용된 것으로서, 본 발명을 한정하려는 의도가 아니다. 단수의 표현은 문맥상 명백하게 다르게 뜻하지 않는 한, 복수의 표현을 포함한다. 본 명세서에서, "포함하다" 또는 "구비하다" 등의 용어는 본 명세서에 기재된 특징, 숫자, 단계, 동작, 구성 요소, 부분품 또는 이들을 조합한 것이 존재함을 지정하려는 것이지, 하나 또는 그 이상의 다른 특징들이나 숫자, 단계, 동작, 구성 요소, 부분품 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다.Embodiments described in this specification will be described with reference to sectional views and/or perspective views, which are ideal exemplary views of the present invention. Films and thicknesses of regions shown in these drawings are exaggerated for effective description of technical content. The shape of the illustrative drawings may be modified due to manufacturing techniques and/or tolerances. Therefore, embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes generated according to manufacturing processes. Technical terms used in this specification are used only to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as "comprise" or "comprise" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in this specification, but one or more other It should be understood that it does not preclude the possibility of addition or existence of features, numbers, steps, operations, components, parts, or combinations thereof.
이하에서는 도면을 참조하여 본 발명의 바람직한 실시예에 따른 전기 전도성 접촉핀 및 이를 구비하는 검사장치에 대해 설명한다. Hereinafter, an electrically conductive contact pin according to a preferred embodiment of the present invention and a test device having the same will be described with reference to the drawings.
이하에서는 첨부된 도면을 참조하여 본 발명의 바람직한 실시예들에 대해 구체적으로 설명한다. 이하에서 다양한 실시예들을 설명함에 있어서, 동일한 기능을 수행하는 구성요소에 대해서는 실시예가 다르더라도 편의상 동일한 명칭 및 동일한 참조번호를 부여하기로 한다. 또한, 이미 다른 실시예에서 설명된 구성 및 작동에 대해서는 편의상 생략하기로 한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of various embodiments, the same names and the same reference numbers will be given to components performing the same functions even if the embodiments are different. In addition, configurations and operations already described in other embodiments will be omitted for convenience.
이하에서 설명하는 전기 전도성 접촉핀의 폭 방향은 도면에 표기된 ±x방향이고, 전기 전도성 접촉핀의 길이 방향은 도면에 표기된 ±y방향이고, 전기 전도성 접촉핀의 두께 방향은 도면에 표기된 ±z방향이다. 전기 전도성 접촉핀은, 길이 방향(±y 방향)으로 전체 길이 치수(L)를 가지고, 상기 길이 방향의 수직한 두께 방향(±z 방향)으로 전체 두께 치수(H)를 가지며, 상기 길이 방향의 수직한 폭 방향(±x 방향)으로 전체 폭 치수(W)를 가진다. The width direction of the electrically conductive contact pin described below is the ±x direction indicated in the drawing, the length direction of the electrically conductive contact pin is the ±y direction indicated in the drawing, and the thickness direction of the electrically conductive contact pin is the ±z direction indicated in the drawing. am. The electrically conductive contact pin has an overall length dimension L in a longitudinal direction (±y direction) and an overall thickness dimension H in a thickness direction perpendicular to the longitudinal direction (±z direction), It has an overall width dimension (W) in the vertical width direction (±x direction).
제1실시예Example 1
이하, 도 2 내지 도 8b를 참조하여, 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀(100)에 설명한다.Hereinafter, an electrically conductive contact pin 100 according to a first preferred embodiment of the present invention will be described with reference to FIGS. 2 to 8B.
도 2는 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀의 평면도이고, 도 3은 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀의 사시도이며, 도 4는 도 2의 A부분의 확대도이고, 도 5는 도 2의 A부분의 사시도이며, 도 6은 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀의 하부를 확대한 평면도이고, 도 7은 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀의 하부를 확대한 사시도이며, 도 8a 및 도 8b는 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀이 가이드 플레이트에 삽입된 상태를 도시한 도면이다.2 is a plan view of an electrically conductive contact pin according to a first preferred embodiment of the present invention, FIG. 3 is a perspective view of an electrically conductive contact pin according to a first preferred embodiment of the present invention, and FIG. 4 is part A of FIG. 2 Fig. 5 is a perspective view of part A of Fig. 2, Fig. 6 is an enlarged plan view of the lower part of the electrically conductive contact pin according to the first preferred embodiment of the present invention, and Fig. 7 is a plan view of the first preferred embodiment of the present invention. 8A and 8B are diagrams illustrating a state in which the electrically conductive contact pin according to the first preferred embodiment of the present invention is inserted into the guide plate.
본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀(100)은, 전기 전도성 접촉핀(100)의 제1단부측에 위치하며 그 단부가 제1접점이 되는 제1플런저(110), 전기 전도성 접촉핀(100)의 제2단부측에 위치하며 그 단부가 제2접점이 되는 제2 플런저(120), 제1플런저(110)와 제2플런저(120)가 전기 전도성 접촉핀(100)의 길이방향으로 탄력적으로 변위되도록 하는 탄성부(130), 탄성부(130)가 전기 전도성 접촉핀(100)의 길이방향으로 압축 및 신장되도록 안내하며, 탄성부(130)가 압축되면서 좌굴되는 것을 방지하도록 전기 전도성 접촉핀(100)의 길이 방향을 따라 탄성부(130)의 외측에 구비되는 지지부(140) 및 지지부(140)로부터 전기 전도성 접촉핀(100)의 폭 방향 외측으로 연장되되 가이드 구멍의 측벽에 탄력적으로 지지되어, 탄성부(130)의 압축 및 신장 방향과 수직한 방향으로 작용하는 복원력을 가이드 구멍의 측벽에 유발하여 전기 전도성 접촉핀(100)이 자중에 의해 낙하되지 않도록 하는 탄성밀착부(TM)를 포함한다. An electrically conductive contact pin 100 according to a first preferred embodiment of the present invention includes a first plunger 110 located at a first end side of the electrically conductive contact pin 100 and the end serving as a first contact; A second plunger (120) located on the side of the second end of the conductive contact pin (100), the end of which serves as a second contact point, and the first plunger (110) and the second plunger (120) form an electrically conductive contact pin (100) The elastic part 130 elastically displaces in the longitudinal direction of the elastic part 130, the elastic part 130 guides the electrically conductive contact pin 100 to be compressed and stretched in the longitudinal direction, and prevents the elastic part 130 from buckling while being compressed. The support part 140 provided on the outside of the elastic part 130 along the length direction of the electrically conductive contact pin 100 and the guide hole extending from the support part 140 to the outside in the width direction of the electrically conductive contact pin 100 to prevent is elastically supported on the sidewall of the elastic part 130 and causes a restoring force acting in a direction perpendicular to the direction of compression and extension of the elastic part 130 on the sidewall of the guide hole to prevent the electrically conductive contact pin 100 from falling due to its own weight. It includes the contact part (TM).
전기 전도성 접촉핀(100)은 가이드 플레이트(GP)의 구멍에 삽입되어 가이드 플레이트(GP) 중 적어도 어느 하나에 지지되어 설치된다. 가이드 플레이트(GP)는 도 8a와 같이 1개로 구비되거나 또는 도 8b와 같이 복수개로 구비될 수 있다. 가이드 플레이트(GP)가 2개 구비되는 경우, 가이드 플레이트(GP)는 상측에 위치하는 상부 가이드 플레이트(GP1)와, 상부 가이드 플레이트(GP1)와 이격되어 구비되는 하부 가이드 플레이트(GP2)를 포함한다. 이하에서 가이드 플레이트라는 기재는, 하나의 가이드 플레이트(GP)만을 의미할 수 있고, 상부 가이드 플레이트(GP1)와 하부 가이드 플레이트(GP2) 중 적어도 어느 하나를 의미할 수 있다. The electrically conductive contact pins 100 are inserted into the holes of the guide plate GP and are supported and installed on at least one of the guide plates GP. The guide plate GP may be provided as one as shown in FIG. 8A or as plural as shown in FIG. 8B. When two guide plates GP are provided, the guide plates GP include an upper guide plate GP1 located on the upper side and a lower guide plate GP2 provided and spaced apart from the upper guide plate GP1. . Hereinafter, a description of a guide plate may mean only one guide plate GP, and may mean at least one of an upper guide plate GP1 and a lower guide plate GP2.
제1플런저(110)는 상부 측에 위치하는 접속 대상물에 접속되고 제2플런저(120)는 하부 측에 위치하는 접속 대상물에 접속된다. 전기 전도성 접촉핀(100)이 수직형 프로브 카드에 채용되는 경우, 제1플런저(110)의 제1접점은 공간 변환기에 접속되고, 제2플런저(120)는 검사 대상물에 접속된다. 한편, 전기 전도성 접촉핀(100)이 테스트 소켓에 채용되는 경우, 제1플런저(110)의 제1접점은 검사 대상물에 접속되고 제2플런저(120)는 회로기판에 접속된다. 물론 그 반대의 접속관계도 가능하다.The first plunger 110 is connected to the connection object located on the upper side and the second plunger 120 is connected to the connection object located on the lower side. When the electrically conductive contact pin 100 is employed in the vertical probe card, the first contact of the first plunger 110 is connected to the space transducer, and the second plunger 120 is connected to the test object. Meanwhile, when the electrically conductive contact pin 100 is employed in the test socket, the first contact of the first plunger 110 is connected to the test object and the second plunger 120 is connected to the circuit board. Of course, the opposite connection relationship is also possible.
탄성부(130)는 제1플런저(110)에 연결되는 제1탄성부(131); 제2플런저(120)에 연결되는 제2탄성부(135); 및 제1탄성부(131)와 제2탄성부(135) 사이에서 제1탄성부(131) 및 제2탄성부(135)와 연결되고 지지부(140)와 일체로 구비되는 중간 고정부(137)를 포함한다. 탄성부(130)는, 전기 전도성 접촉핀(100)의 두께 방향으로의 각 단면 형상이 모든 두께 단면에서 동일하다. 또한 탄성부(130)는, 두께가 전체적으로 동일하다. 제1,2탄성부(131,135)는 실질 폭(t)을 갖는 판상 플레이트가 S자 모양으로 반복적으로 절곡된 형태를 가지며, 판상 플레이트의 실질 폭(t)은 전체적으로 일정하다. The elastic part 130 includes a first elastic part 131 connected to the first plunger 110; a second elastic part 135 connected to the second plunger 120; and an intermediate fixing part 137 connected to the first elastic part 131 and the second elastic part 135 between the first elastic part 131 and the second elastic part 135 and integrally provided with the support part 140. ). In the elastic portion 130, each cross-sectional shape of the electrically conductive contact pin 100 in the thickness direction is the same in all thickness cross-sections. In addition, the elastic part 130 has the same thickness as a whole. The first and second elastic parts 131 and 135 have a shape in which a plate-like plate having an actual width t is repeatedly bent in an S shape, and the actual width t of the plate-like plate is generally constant.
제1플런저(110)의 일단은 자유단이고 타단은 제1탄성부(131)에 연결되어 접촉압력에 의해 탄력적으로 수직 이동이 가능하다. 제2플런저(120)의 일단은 자유단이고 타단은 제2탄성부(135)에 연결되어 접촉 압력에 의해 탄력적으로 수직 이동이 가능하다. One end of the first plunger 110 is a free end and the other end is connected to the first elastic part 131 so that it can move vertically elastically by contact pressure. One end of the second plunger 120 is a free end, and the other end is connected to the second elastic part 135 so that it can move vertically elastically by contact pressure.
제1탄성부(131)의 일단은 제1플런저(110)에 연결되고 타단은 중간 고정부(137)에 연결된다. 제2탄성부(135)의 일단은 제2플런저(120)에 연결되고 타단은 중간 고정부(137)에 연결된다. One end of the first elastic part 131 is connected to the first plunger 110 and the other end is connected to the intermediate fixing part 137 . One end of the second elastic part 135 is connected to the second plunger 120 and the other end is connected to the intermediate fixing part 137 .
지지부(140)는 탄성부(130)의 좌측에 구비되는 제1지지부(141)와 탄성부(130)의 우측에 구비되는 제2지지부(145)를 포함한다. The support part 140 includes a first support part 141 provided on the left side of the elastic part 130 and a second support part 145 provided on the right side of the elastic part 130 .
중간 고정부(137)는 전기 전도성 접촉핀(100)의 폭방향으로 연장되어 형성되며, 제1지지부(141)와 제2지지부(145)를 연결한다. The intermediate fixing portion 137 extends in the width direction of the electrically conductive contact pin 100 and connects the first support portion 141 and the second support portion 145 .
제1탄성부(131)는 중간 고정부(137)를 기준으로 그 상부에 구비되고, 제2탄성부(135)는 중간 고정부(137)를 기준으로 그 하부에 구비된다. 중간 고정부(137)를 기준으로 제1탄성부(131) 및 제2탄성부(135)가 압축 또는 신장 변형된다. 중간 고정부(137)는 제1,2지지부(141,145)에 고정되어 제1,2탄성부(131, 135)가 압축 변형될 때에 제1,2탄성부(141,145)의 위치 이동을 제한하는 기능을 수행하게 된다. The first elastic part 131 is provided on the upper part with respect to the intermediate fixing part 137, and the second elastic part 135 is provided on the lower part with respect to the intermediate fixing part 137. Based on the intermediate fixing part 137, the first elastic part 131 and the second elastic part 135 are compressed or stretched. The intermediate fixing part 137 is fixed to the first and second support parts 141 and 145 to limit the movement of the first and second elastic parts 141 and 145 when the first and second elastic parts 131 and 135 are compressed and deformed. will perform
중간 고정부(137)에 의해, 제1탄성부(131)가 구비되는 영역과 제2탄성부(135)가 구비되는 영역이 서로 구분이 된다. 따라서 상부 개구부로 유입된 이물질은 제2탄성부(135) 측으로 유입되지 못하고, 하부 개구부로 유입된 이물질 역시 제1탄성부(131)측으로 유입되지 못하게 된다. 이를 통해 지지부(140) 내측으로 유입된 이물질의 이동을 제한함으로써 이물질에 의해 제1,2탄성부(131, 135)의 작동이 방해되는 것을 방지할 수 있다. An area provided with the first elastic part 131 and an area provided with the second elastic part 135 are distinguished from each other by the intermediate fixing part 137 . Therefore, foreign substances introduced into the upper opening cannot flow into the second elastic portion 135, and foreign substances introduced through the lower opening also cannot flow into the first elastic portion 131. Through this, by limiting the movement of the foreign matter introduced into the support part 140, it is possible to prevent the foreign matter from interfering with the operation of the first and second elastic parts 131 and 135.
제1지지부(141)와 제2지지부(145)는 전기 전도성 접촉핀(100)의 길이 방향을 따라 형성되며, 제1지지부(141)와 제2지지부(145)는 전기 전도성 접초핀(100)의 폭 방향을 따라 연장되어 형성되는 중간 고정부(137)에 일체로 연결된다. 제1,2탄성부(131, 135)는 중간 고정부(137)를 통해 일체로 연결되면서, 전기 전도성 접촉핀(100)은 전체적으로 한 몸체로 구성된다. The first support part 141 and the second support part 145 are formed along the longitudinal direction of the electrically conductive contact pin 100, and the first support part 141 and the second support part 145 form the electrically conductive contact pin 100 It is integrally connected to the intermediate fixing part 137 formed to extend along the width direction of the. While the first and second elastic parts 131 and 135 are integrally connected through the intermediate fixing part 137, the electrically conductive contact pin 100 is composed of one body as a whole.
제1,2탄성부(131, 135)는 복수개의 직선부(130a)와 복수개의 만곡부(130b)가 교대로 접속되어 형성된다. 직선부(130a)는 좌, 우로 인접하는 만곡부(130b)를 연결하며, 만곡부(130b)는 상, 하로 인접하는 직선부(130a)를 연결한다. 만곡부(130b)는 원호 형상으로 구비된다.The first and second elastic parts 131 and 135 are formed by alternately connecting a plurality of straight parts 130a and a plurality of curved parts 130b. The straight portion 130a connects the left and right curved portions 130b, and the curved portion 130b connects the vertically adjacent straight portions 130a. The curved portion 130b is provided in an arc shape.
제1,2탄성부(131, 135)의 중앙 부위에는 직선부(130a)가 배치되고 제1,2탄성부(131, 135)의 외측 부위에는 만곡부(130b)가 배치된다. 직선부(130a)는 폭 방향과 평행하게 구비되어 접촉압에 따른 만곡부(130b)의 변형이 보다 쉽게 이루어지도록 한다. A straight portion 130a is disposed at the central portion of the first and second elastic portions 131 and 135, and a curved portion 130b is disposed at an outer portion of the first and second elastic portions 131 and 135. The straight portion 130a is provided parallel to the width direction so that the curved portion 130b is more easily deformed according to the contact pressure.
중간 고정부(137)와 연결되는 제1,2탄성부(131, 135)의 부분은 제1,2탄성부(131, 135)의 만곡부(130b)이다. 이를 통해 제1,2탄성부(131,135)는 중간 고정부(137)에 대해서 탄력을 유지한다. The part of the first and second elastic parts 131 and 135 connected to the intermediate fixing part 137 is the curved part 130b of the first and second elastic parts 131 and 135 . Through this, the first and second elastic parts 131 and 135 maintain elasticity with respect to the intermediate fixing part 137 .
복수개의 전기 전도성 접촉핀(100)의 제1플런저(110)들이 상부 접속 대상물에 각각 안정적인 접촉이 가능할 정도의 압축량이 제1탄성부(131)에 필요한 반면에, 제2탄성부(135)는 복수개의 전기 전도성 접촉핀(100)의 제2플런저(120)들이 하부 접속 대상물에 각각 안정적인 접촉이 가능할 정도의 압축량이 필요하다. 따라서 제1탄성부(131)의 스프링 계수와 제2탄성부(135)의 스프링 계수는 서로 다르다. 예컨대, 제1탄성부(131)의 길이와 제2탄성부(135)의 길이는 서로 다르게 구비된다. 또한, 제2탄성부(135)의 길이는 제1탄성부(131)의 길이보다 길게 형성될 수 있다.While the first elastic part 131 requires an amount of compression sufficient for the first plungers 110 of the plurality of electrically conductive contact pins 100 to stably contact the upper connection object, the second elastic part 135 The second plungers 120 of the plurality of electrically conductive contact pins 100 require an amount of compression sufficient to stably contact the lower connection object. Therefore, the spring coefficient of the first elastic part 131 and the spring coefficient of the second elastic part 135 are different from each other. For example, the length of the first elastic part 131 and the length of the second elastic part 135 are provided differently. Also, the length of the second elastic part 135 may be longer than that of the first elastic part 131 .
각각의 만곡부(130b)에는 2개의 직선부(130a)가 연결되어 형성되되, 각각의 만곡부(130b)의 길이 방향의 거리를 초과하지 않는 범위 내에 2개의 직선부(130a)가 위치하게 된다. 각각의 만곡부(130b)의 상부에서 하부로 굴곡진 위치에서 하나의 직선부(130a)가 연결되고 각각의 만곡부(130b)의 하부에서 상부로 굴곡진 위치에서 다른 하나의 직선부(130a)가 연결됨으로써 하나의 만곡부(130b)에 연결된 2개의 직선부(130a)의 길이 방향의 이격 거리는 하나의 만곡부(130b)의 길이 방향의 이격 거리를 초과하지 않는다. 이를 통해 탄성부(130)의 동일 길이 범위내에서 보다 많은 만곡부(130b)와 직선부(130a)를 구비토록 하는 것이 가능하므로 제1,2탄성부(131, 135)에 충분한 탄력을 제공할 수 있게 된다. 그 결과 탄성부(130)의 길이를 짧게 하는 것이 가능하게 된다. Each curved portion 130b is formed by connecting two straight portions 130a, and the two straight portions 130a are positioned within a range not exceeding a distance in the longitudinal direction of each curved portion 130b. One straight part 130a is connected at a position where each curved part 130b is bent from the top to the bottom, and another straight part 130a is connected at a position where each curved part 130b is bent from the bottom to the top. Thus, the separation distance in the longitudinal direction of the two straight portions 130a connected to the one curved portion 130b does not exceed the separation distance in the longitudinal direction of the one curved portion 130b. Through this, it is possible to have more curved parts 130b and straight parts 130a within the same length range of the elastic part 130, so that sufficient elasticity can be provided to the first and second elastic parts 131 and 135. there will be As a result, it is possible to shorten the length of the elastic part 130.
한편 상,하로 인접하는 만곡부(130b)간의 이격거리는 상,하로 인접하는 직선부(130a)간의 이격 거리보다 짧게 구성된다. 이를 통해 제1,2탄성부(131, 135)가 압축될 때 상,하로 인접하는 만곡부(130b)들이 먼저 접촉되어 만곡부(130b)를 통해 전류 통로를 형성하고, 추가적인 오버 드라이브가 가해지면 상,하로 이격된 직선부(130a)를 통해 제1,2탄성부(131, 135)의 추가 변형이 가능하게 된다. On the other hand, the distance between the curved portions 130b adjacent to each other is shorter than the distance between the straight portions 130a adjacent to each other. Through this, when the first and second elastic parts 131 and 135 are compressed, the upper and lower curved parts 130b are first contacted to form a current path through the curved part 130b, and when additional overdrive is applied, Additional deformation of the first and second elastic parts 131 and 135 is possible through the straight parts 130a spaced downward.
제1지지부(141)와 제2지지부(145)는 그 양단부에서 서로 근접하되 서로 이격되면서 개구부를 형성한다. 개구부는 제1플런저(110)가 수직 방향으로 통과가능한 상부 개구부와 제2플런저(120)가 수직 방향으로 통과가능한 하부 개구부를 포함한다. 상부 개구부와 하부 개구부는 제1,2탄성부(131,135)의 복원력에 의해 제1,2플런저(110,120)가 지지부(140)로 과도하게 돌출되는 것을 방지하는 기능을 수행한다.The first support part 141 and the second support part 145 form openings while being close to each other at both ends and spaced apart from each other. The opening includes an upper opening through which the first plunger 110 can pass in a vertical direction and a lower opening through which the second plunger 120 can pass through in a vertical direction. The upper opening and the lower opening perform a function of preventing the first and second plungers 110 and 120 from excessively protruding into the support part 140 by the restoring force of the first and second elastic parts 131 and 135 .
제1지지부(141)는 상부 개구부측으로 연장되는 제1도어부(144a)를 구비하고, 제2지지부(145)는 상부 개구부측으로 연장되는 제2도어부(144b)를 구비한다. 제1도어부(144a)와 제2도어부(144b)가 서로 대향되어 이격된 공간이 상부 개구부가 된다. 상부 개구부의 개구 폭은 제1탄성부(131)의 직선부(130a)의 좌,우 길이보다 작게 형성된다. The first support part 141 includes a first door part 144a extending toward the upper opening, and the second support part 145 includes a second door part 144b extending toward the upper opening. The first door part 144a and the second door part 144b are opposed to each other, and the space apart becomes an upper opening. The opening width of the upper opening is smaller than the left and right lengths of the straight portion 130a of the first elastic portion 131 .
제1플런저(110)는 제1탄성부(131)의 직선부(130a)와 연결되며, 전기 전도성 접촉핀(100)의 길이 방향으로 길게 형성되는 로드(rod) 형상으로 구비된다. 제1플런저(110)는 제1지지부(141)와 제2지지부(145)에 의해 형성되는 상부 개구부를 수직 방향으로 통과 가능하다. 또한 제1탄성부(131)의 직선부(130a)의 좌, 우 길이가 상부 개구부의 폭보다 크게 형성됨에 따라, 제1탄성부(131)의 직선부(130a)는 상부 개구부를 통과하지 못한다. 이를 통해 제1플런저(110)의 상승 스트로크를 제한한다. The first plunger 110 is connected to the straight portion 130a of the first elastic portion 131 and has a rod shape elongated in the longitudinal direction of the electrically conductive contact pin 100 . The first plunger 110 may vertically pass through an upper opening formed by the first support part 141 and the second support part 145 . In addition, as the left and right lengths of the straight portion 130a of the first elastic portion 131 are greater than the width of the upper opening, the straight portion 130a of the first elastic portion 131 cannot pass through the upper opening. . Through this, the upward stroke of the first plunger 110 is limited.
제1지지부(141)와 제2지지부(145)는 그 양단부에서 서로 근접하되 서로 이격되면서 제1플런저(110)가 수직 방향으로 통과가능한 상부 개구부를 형성하고, 제1플런저(141)가 지지부(140) 내부로 수직 이동하면 상부 개구부의 개구 폭이 감소하면서 제1,2지지부(141, 145)와 제1플런저(110)가 서로 접촉하여 추가적인 접촉 포인트를 형성한다. The first support part 141 and the second support part 145 are close to each other at both ends but spaced apart from each other to form an upper opening through which the first plunger 110 can pass in the vertical direction, and the first plunger 141 is the support part ( 140) When moving vertically into the inside, the opening width of the upper opening decreases, and the first and second support parts 141 and 145 and the first plunger 110 come into contact with each other to form an additional contact point.
제1지지부(141)는 지지부(140) 내측 공간으로 연장되는 제1연장부(145a)를 구비하고, 제2지지부(145)는 지지부(140) 내측 공간으로 연장되는 제2연장부(145b)를 구비한다. The first support part 141 has a first extension part 145a extending into the inner space of the support part 140, and the second support part 145 has a second extension part 145b extending into the inner space of the support part 140. to provide
제1도어부(144a)에는 제1연장부(145a)가 연결된다. 제1연장부(145a)는 그 일단이 제1도어부(144a)에 연결되고 그 타단은 지지부(140)의 내측 공간으로 연장되어 자유단으로 구성된다. The first extension part 145a is connected to the first door part 144a. The first extension part 145a has one end connected to the first door part 144a and the other end extending into the inner space of the support part 140 to form a free end.
제2도어부(144b)에는 제2연장부(145b)가 연결된다. 제2연장부(145b)는 그 일단이 제2도어부(144b)에 연결되고 그 타단은 지지부(140)의 내측 공간으로 연장되어 자유단으로 구성된다.The second extension part 145b is connected to the second door part 144b. The second extension part 145b has one end connected to the second door part 144b and the other end extending into the inner space of the support part 140 to form a free end.
제1플런저(110)에는 제1연장부(145a) 방향으로 연장되는 제1돌출편(110a)과 제2연장부(145b) 방향으로 연장되는 제2돌출편(110b)이 구비된다. 제1플런저(110)가 가압력에 의해 하강하게 되면, 제1돌출편(110a)과 제2돌출편(110b)은 각각 제1연장부(145a)와 제2연장부(145b)에 접촉 가능하다. The first plunger 110 includes a first protrusion 110a extending in the direction of the first extension 145a and a second protrusion 110b extending in the direction of the second extension 145b. When the first plunger 110 is lowered by the pressing force, the first protrusion 110a and the second protrusion 110b can contact the first extension 145a and the second extension 145b, respectively. .
제1플런저(110)가 하강하면, 제1돌출편(110a)과 제2돌출편(110b)은 제1연장부(145a)와 제2연장부(145b)에 각각 접촉 가능하여 추가적인 접촉 포인트를 형성한다. When the first plunger 110 descends, the first protruding piece 110a and the second protruding piece 110b can come into contact with the first extension part 145a and the second extension part 145b, respectively, providing an additional contact point. form
제1연장부(145a)와 제2연장부(145b)는 경사지게 형성됨에 따라, 제1플런저(110)가 수직 이동하면, 제1돌출편(110a)과 제2돌출편(110b)은 제1연장부(145a)와 제2연장부(145b)를 각각 가압하여, 제1도어부(144a)와 제2도어부(144b)의 이격 공간은 감소하게 된다. 다시 말해 제1플런저(110)가 하강할수록 제1도어부(144a)와 제2도어부(144b)는 서로 더욱 접근하도록 변형되어 상부 개구부의 개구 폭을 감소시키게 된다. 이처럼 제1플런저(110)가 지지부(140) 내부로 수직 이동하면 상부 개구부의 개구 폭이 감소하면서 제1,2지지부(141,145)와 제1플런저(110)가 서로 접촉하여 추가적인 접촉 포인트를 형성한다. Since the first extension part 145a and the second extension part 145b are inclined, when the first plunger 110 moves vertically, the first protrusion 110a and the second protrusion 110b The separation space between the first door part 144a and the second door part 144b is reduced by pressing the extension part 145a and the second extension part 145b, respectively. In other words, as the first plunger 110 descends, the first door part 144a and the second door part 144b are deformed to come closer to each other, thereby reducing the opening width of the upper opening. As such, when the first plunger 110 moves vertically into the support part 140, the opening width of the upper opening decreases, and the first and second support parts 141 and 145 and the first plunger 110 contact each other to form an additional contact point. .
제1플런저(110)가 하강하면서 1차적으로 제1, 2돌출편(110a, 110b)과 제1,2연장부(145a, 145b)가 서로 접촉하여 추가적인 접촉 포인트를 형성하고, 추가적인 하강에 의해 2차적으로 제1,2도어부(144a, 144b)와 제1플런저(110)가 서로 접촉하여 접촉 포인트를 추가로 형성하게 된다. 이처럼 제1플런저(110)가 수직 이동함에 따라 제1플런저(110)와 지지부(140)간에 추가적인 전류 패스가 형성한다. 이러한 추가적인 전류 패스는 탄성부(130)를 통하지 않고 지지부(140)에서 제1플런저(110)로 직접적으로 형성된다. 추가적인 전류 패스가 형성됨에 따라 보다 안정적인 전기 접속이 가능하게 된다. As the first plunger 110 descends, the first and second protruding pieces 110a and 110b and the first and second extension parts 145a and 145b primarily come into contact with each other to form additional contact points. Secondarily, the first and second door parts 144a and 144b and the first plunger 110 contact each other to additionally form a contact point. In this way, as the first plunger 110 moves vertically, an additional current path is formed between the first plunger 110 and the support 140 . This additional current path is formed directly from the support part 140 to the first plunger 110 without passing through the elastic part 130 . As an additional current path is formed, a more stable electrical connection is possible.
제1플런저(110)의 수직 이동 거리에 비례하여 상부 개구부의 개구 폭은 감소한다. 또한 제1,2도어부(144a, 144b)가 제1플런저(110)에 접촉한 이후도 제1플런저(110)에 하강 압력이 가해지는 경우, 제1,2도어부(144a, 144b)와 제1플런저(110)간의 마찰력은 더욱 커진다. 증가된 마찰력은 제1플런저(110)의 과도한 하강을 방지한다. 이를 통해 탄성부(보다 구체적으로 제1탄성부(131))가 과도하게 압축 변형되는 것을 방지할 수 있다. The opening width of the upper opening decreases in proportion to the vertical movement distance of the first plunger 110 . In addition, when downward pressure is applied to the first plunger 110 even after the first and second door parts 144a and 144b contact the first plunger 110, the first and second door parts 144a and 144b and Frictional force between the first plungers 110 is further increased. The increased frictional force prevents excessive descent of the first plunger 110 . Through this, it is possible to prevent the elastic part (more specifically, the first elastic part 131) from being excessively compressed and deformed.
제2플런저(120)는 상부에서 제2탄성부(135)에 연결되고 그 단부는 하부 개구부를 통과한다. The second plunger 120 is connected to the second elastic part 135 at the top and its end passes through the lower opening.
제2플런저(120)는 지지부(140)의 내측에 위치하며 제2탄성부(120)와 연결되는 내측 바디(121)와, 내측 바디(121)와 연결되고 하부 개구부를 통과가능한 돌출 팁(125)을 포함한다. 내측 바디(121)는 지지부(140)의 내측에 위치하는 부위로서 내측 바디(121)가 지지부(140)로부터 이탈되지 않도록 내측 바디(121)의 하면의 좌,우 길이는 하부 개구부의 개구 폭보다 크게 형성된다.The second plunger 120 includes an inner body 121 located inside the support part 140 and connected to the second elastic part 120, and a protruding tip 125 connected to the inner body 121 and capable of passing through the lower opening. ). The inner body 121 is a part located inside the support part 140, and the left and right lengths of the lower surface of the inner body 121 are shorter than the opening width of the lower opening so that the inner body 121 does not escape from the support part 140. formed large.
제2플런저(120)의 돌출 팁(125)에는 단턱부(127)가 구비된다. 단턱부(127)는 지지부(140)로부터 돌출된 제2플런저(120)의 부위에서, 제2접점에서 하부 개구부 방향으로 제2플런저(120)의 폭이 증가하면서 형성된다. A stepped portion 127 is provided on the protruding tip 125 of the second plunger 120 . The stepped portion 127 is formed at a portion of the second plunger 120 protruding from the support portion 140 while the width of the second plunger 120 increases from the second contact point toward the lower opening.
제2플런저(120)의 와이핑 동작 수행과정에서 발생하는 산화막층의 부스러기가 발생한다. 부스러기들은 서로 전착되어 뭉치게 되는데, 이러한 부스러기들은 단턱부에 걸려 자연스럽게 낙하되도록 유도되며 지속적으로 성장하는 것이 방지된다. 또한 단턱부는 부스러기들이 지지부(140) 내측으로 이동하는 것을 방지하는 기능을 수행한다. Scrubs of the oxide film layer generated in the process of performing the wiping operation of the second plunger 120 are generated. The crumbs are electrodeposited and aggregated with each other, and these crumbs are caught on the step and are induced to fall naturally, and are prevented from growing continuously. In addition, the stepped portion performs a function of preventing debris from moving into the support portion 140 .
제2플런저(120)는 상승 및 하강 동작을 반복적으로 수행하게 되는데, 이때에 좌, 우측에 위치하는 지지부(140)와 제2플런저(120)는 서로 슬라이딩 접촉을 하게 된다. 제2플런저(120)와 지지부(140)간의 슬라이딩 마찰력을 최소화하기 위해 지지부(140)와 대향되는 내측 바디(121)의 측면에는 오목부가 형성된다. 내측 바디(121)에 구비된 오목부의 구성을 통해, 제2플런저(120)는 보다 원활하게 승강할 수 있게 된다. The second plunger 120 repeatedly performs upward and downward motions, and at this time, the support parts 140 located on the left and right sides and the second plunger 120 come into sliding contact with each other. In order to minimize sliding friction between the second plunger 120 and the support 140, a concave portion is formed on the side of the inner body 121 facing the support 140. Through the configuration of the concave portion provided in the inner body 121, the second plunger 120 can move up and down more smoothly.
제2플런저(120)는 지지부(140) 내부에서 수직 상승하면서 제2접점에서 와이핑 동작을 수행한다. 제2탄성부(135)는 제2플런저(120)가 상승할 때 제2플런저(120)의 제2접점이 와이핑 동작을 수행할 수 있도록, 탄성부(130)는 제2플런저(120)의 축선 방향에서 편심되어 제2플런저(120)에 연결된다. The second plunger 120 performs a wiping operation at the second contact point while vertically rising inside the support part 140 . The second elastic part 135 is the second plunger 120 so that the second contact point of the second plunger 120 can perform a wiping operation when the second plunger 120 rises. It is eccentric in the axial direction of and connected to the second plunger 120.
제2탄성부(135)는 제2플런저(120)의 상면에서 제2플런저(120)의 중심 축선을 기준으로 일측으로 치우친 위치에 제2플런저(120)의 상면에 연결된다. 보다 구체적으로는, 제2탄성부(135)의 만곡부(130b)가 제2플런저(120)의 상면과 연결된다. 제2플런저(120)의 상면 중 일측은 제2탄성부(135)와 연결되고 제2플런저(120)의 상면 중 타측은 제2탄성부(135)와 연결되지 않고 제2탄성부(135)와 이격되게 형성된다. The second elastic part 135 is connected to the upper surface of the second plunger 120 at a position biased to one side based on the central axis of the second plunger 120 on the upper surface of the second plunger 120 . More specifically, the curved portion 130b of the second elastic portion 135 is connected to the upper surface of the second plunger 120 . One side of the upper surface of the second plunger 120 is connected to the second elastic part 135, and the other side of the upper surface of the second plunger 120 is not connected to the second elastic part 135, and the second elastic part 135 is formed to be spaced apart from
제2플런저(120)가 상승하면, 제2플런저(120)의 상면 일측에 연결된 제2탄성부(135)에 의해 제2플런저(120)는 반발력을 받지만 제2플런저(120)의 상면 타측은 제2탄성부(135)와 이격되어 있기 때문에 반발력을 받지 않는다. 이러한 구성을 통해, 제2플런저(120)가 가압력에 의해 수직 방향으로 상승하게 될 때, 제2플런저(120)에는 편심 저항력이 작용하게 된다. 제2플런저(120)는 상측에서 편심 저항력에 받아 제2플런저(120)에는 회전 모멘트가 발생하게 되고, 그 결과 제2플런저(120)의 돌출 팁(125)이 검사 대상물과의 적절한 접촉압력을 유지함과 동시에 틸팅되면서 검사 대상물(예를 들어, 반도체 소자)에 대해 와이핑 동작을 수행하게 된다. 제2플런저(120)의 돌출 팁(125)은 적절한 접촉압력을 유지함과 동시에 틸팅되면서 산화막층에 크랙을 유발하고 전극 패드(WP)의 전도성 물질층이 크랙을 통해 노출되어 돌출 팁(125)과 접촉하게 된다. 이를 통해 전기적 접속이 이루어진다. 또한 이러한 와이핑 동작을 통해, 전극 패드(WP)의 손상을 최소화하는 것이 가능하고 과도한 양의 산화막층의 부스러기를 유발하지 않아 전기 전도성 접촉핀(100)의 사용시간을 향상시키는 효과를 발휘하게 된다.When the second plunger 120 rises, the second plunger 120 receives a repulsive force by the second elastic part 135 connected to one side of the top surface of the second plunger 120, but the other side of the top surface of the second plunger 120 Since it is spaced apart from the second elastic part 135, it does not receive a repulsive force. Through this configuration, when the second plunger 120 rises in the vertical direction by the pressing force, the eccentric resisting force acts on the second plunger 120 . The second plunger 120 receives an eccentric resisting force from the upper side, so that a rotational moment is generated in the second plunger 120, and as a result, the protruding tip 125 of the second plunger 120 exerts an appropriate contact pressure with the test object. While holding and tilting at the same time, a wiping operation is performed on an object to be inspected (eg, a semiconductor device). As the protruding tip 125 of the second plunger 120 maintains an appropriate contact pressure and is tilted at the same time, it induces a crack in the oxide film layer, and the conductive material layer of the electrode pad WP is exposed through the crack, so that the protruding tip 125 and the protruding tip 125 come into contact Through this, an electrical connection is made. In addition, through this wiping operation, it is possible to minimize damage to the electrode pads WP and does not cause an excessive amount of debris on the oxide film layer, so that the use time of the electrically conductive contact pin 100 is improved. .
제2접점이 검사대상물의 전극 패드(WP)에 대해 와이핑하는 정도의 크기는, 하부 개구부와 돌출팁(125)간의 틈새의 크기로 제어 가능하다. 하부 개구부와 돌출팁(125)사이의 틈새는 허용 틸팅 각도를 결정하는 인자로서, 하부 개구부와 돌출팁(125)사이의 틈새가 크면 클수록 돌출팁(125)의 제2접점의 틸팅 각도는 커지고, 하부 개구부와 돌출팁(125)사이의 틈새가 작으면 작을수록 돌출팁(125)의 제2접점의 틸팅 각도는 작아지게 된다.The extent to which the second contact wipes the electrode pad WP of the object to be inspected can be controlled by the size of the gap between the lower opening and the protruding tip 125 . The gap between the lower opening and the protruding tip 125 is a factor determining the allowable tilt angle. The larger the gap between the lower opening and the protruding tip 125, the larger the tilt angle of the second contact of the protruding tip 125, The smaller the gap between the lower opening and the protruding tip 125 is, the smaller the tilting angle of the second contact point of the protruding tip 125 is.
종래에는 프로브 핀(7)이 양단에 가해지는 압력에 의해 구부러지거나 좌굴되는 변형을 하고 그 결과 프로브 핀(7)의 접점이 슬라이딩 동작을 하면서 검사 대상물인 전극 패드상의 산화막층을 제거하였다. 그러나 프로브 핀(7)이 폭 방향으로 휘어지도록 하는 과도한 압력에 의해, 산화막층의 제거가 용이할 수는 있지만 전극 패드의 손상 역시 커지는 문제가 지속적으로 제기되고 있다. 특히나 전극 패드는 협피치 추세에 대응되어 더욱 더 작아지고 있기 때문에 과도한 접촉압력에 의한 프로브 핀(7)에 의한 전극 패드의 손상은 더욱 빈번해지고 있다.Conventionally, the probe pin 7 is bent or buckled by pressure applied to both ends, and as a result, the contact of the probe pin 7 slides to remove the oxide film layer on the electrode pad, which is an object to be inspected. However, although the removal of the oxide layer may be easy due to excessive pressure that causes the probe pin 7 to be bent in the width direction, the problem of increasing damage to the electrode pad has been continuously raised. In particular, since electrode pads are becoming smaller and smaller in response to the narrow pitch trend, damage to the electrode pad by the probe pin 7 due to excessive contact pressure is becoming more frequent.
이와는 다르게, 본 발명의 바람직한 실시예에 따른 전기 전도성 접촉핀(100)은, 제2플런저(120)가 접촉압력을 받았을 때 제2탄성부(135)의 판상 플레이트가 미리 반복적으로 절곡된 스프링 구조에서 압축 변형되면서 와이핑하는 구조이기 때문에 전극 패드에 과도한 압력이 가해지는 것을 방지하여 전극 패드가 손상되는 것을 최소화하는 것이 가능하게 된다. Unlike this, the electrically conductive contact pin 100 according to a preferred embodiment of the present invention has a spring structure in which the plate-shaped plate of the second elastic part 135 is repeatedly bent in advance when the second plunger 120 receives contact pressure. Because of the structure of wiping while being compressed and deformed, it is possible to minimize damage to the electrode pads by preventing excessive pressure from being applied to the electrode pads.
이처럼 종래 기술은 프로브 핀(7) 자체가 탄성 변형되면서 와이핑 동작을 수행하는 구조인 반면에, 본 발명의 바람직한 실시예에 따른 전기 전도성 접촉핀(100)은, 지지부(140)는 수직한 상태를 유지한 채로 제2플런저(120)가 틸팅되면서 와이핑 동작을 수행하는 구조라는 점에서 와이핑 동작의 기본적인 작동원리에 차이가 있다. As such, the prior art has a structure in which the probe pin 7 itself is elastically deformed and performs a wiping operation, whereas in the electrically conductive contact pin 100 according to a preferred embodiment of the present invention, the support portion 140 is in a vertical state There is a difference in the basic operation principle of the wiping operation in that the wiping operation is performed while the second plunger 120 is tilted while maintaining the .
산화막층에 과도한 접촉압력을 부여하여 과도한 접촉압력으로 산화막층을 제거하는 종래의 와이핑 동작(기존의 수직형 프로브 카드) 또는 산화막층을 긁어내어 산화막층을 제거하는 종래의 와이핑 동작(기존의 캔틸레버형 프로브 카드)과는 달리, 본 발명의 바람직한 제1실시예에 따른 제2플런저(120)는 제2접점이 적절한 접촉압력을 유지하면서 틸팅되면서 산화막층을 제거하기 때문에 전극 패드가 손상되는 것을 최소화할 수 있게 된다. Conventional wiping operation (existing vertical probe card) of applying excessive contact pressure to the oxide film layer to remove the oxide film layer with excessive contact pressure (existing vertical probe card) or conventional wiping operation of removing the oxide film layer by scraping it (existing Unlike the cantilever probe card), the second plunger 120 according to the first preferred embodiment of the present invention removes the oxide film layer while the second contact is tilted while maintaining an appropriate contact pressure, preventing damage to the electrode pad. can be minimized.
제1,2플런저(110,120), 탄성부(130) 및 지지부(140)는 도금 공정을 이용하여 한꺼번에 제작됨에 따라 일체형으로 구비된다. 전기 전도성 접촉핀(100)은, 판상 플레이트가 전체적으로 일체 연결되어 제1,2플런저(110,120), 탄성부(130) 및 지지부(140)를 구성한다. 전기 전도성 접촉핀(100)은 그 두께 방향으로 이종의 금속으로 복수회에 걸친 도금 공정을 수행하여 복수개의 금속층이 적층되어 구비될 수 있다.The first and second plungers 110 and 120, the elastic part 130, and the support part 140 are integrally provided as they are manufactured at once using a plating process. The electrically conductive contact pin 100 constitutes the first and second plungers 110 and 120 , the elastic part 130 and the support part 140 by integrally connecting the plate-shaped plates as a whole. The electrically conductive contact pin 100 may be provided by stacking a plurality of metal layers by performing a plurality of plating processes with different metals in its thickness direction.
전기 전도성 접촉핀(100)은 전기 전도성 접촉핀(100)의 두께 방향으로 복수 개의 금속층이 적층되어 구비된다. 복수개의 금속층은, 제1금속층(160)과 제2금속층(180)을 포함한다. 제1금속층(160)은 제2금속층(180)에 비해 상대적으로 내마모성이 높은 금속으로서 바람직하게는, 로듐(Rd), 백금 (Pt), 이리듐(Ir), 팔라듐(Pd), 니켈(Ni), 망간(Mn), 텅스텐(W), 인(Ph) 이나 이들의 합금, 또는 팔라듐-코발트(PdCo) 합금, 팔라듐-니켈(PdNi) 합금 또는 니켈-인(NiPh) 합금, 니켈-망간(NiMn), 니켈-코발트(NiCo) 또는 니켈-텅스텐(NiW) 합금 중에서 선택된 금속으로 형성될 수 있다. 제2금속층(180)은 제1금속층(160)에 비해 상대적으로 전기 전도도가 높은 금속으로서 바람직하게는, 구리(Cu), 은(Ag), 금(Au) 또는 이들의 합금 중에서 선택된 금속으로 형성될 수 있다. The electrically conductive contact pin 100 is provided by stacking a plurality of metal layers in the thickness direction of the electrically conductive contact pin 100 . The plurality of metal layers include a first metal layer 160 and a second metal layer 180 . The first metal layer 160 is a metal having relatively high wear resistance compared to the second metal layer 180, and is preferably made of rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), or nickel (Ni). , manganese (Mn), tungsten (W), phosphorus (Ph) or alloys thereof, or palladium-cobalt (PdCo) alloy, palladium-nickel (PdNi) alloy or nickel-phosphorus (NiPh) alloy, nickel-manganese (NiMn ), a nickel-cobalt (NiCo) or a nickel-tungsten (NiW) alloy. The second metal layer 180 is a metal having relatively high electrical conductivity compared to the first metal layer 160, and is preferably formed of a metal selected from copper (Cu), silver (Ag), gold (Au), or an alloy thereof. It can be.
제1금속층(160)은 전기 전도성 접촉핀(100)의 두께 방향으로 하면과 상면에 구비되고 제2금속층(180)은 제1금속층(160) 사이에 구비된다. 예를 들어, 전기 전도성 접촉핀(100)은 제1금속층(160), 제2금속층(180), 제1금속층(160) 순으로 교대로 적층되어 구비되며, 적층되는 층수는 3층 이상으로 구성될 수 있다. 도면에는 5층이 도시되어 있다.The first metal layer 160 is provided on the bottom and top surfaces of the electrically conductive contact pin 100 in the thickness direction, and the second metal layer 180 is provided between the first metal layers 160 . For example, the electrically conductive contact pin 100 is provided by alternately stacking the first metal layer 160, the second metal layer 180, and the first metal layer 160 in that order, and the number of layers to be stacked is three or more. It can be. 5 layers are shown in the drawing.
예컨대, 제1금속층(160)은 팔라듐-코발트(PdCo) 합금으로 구성되고, 제2금속층(180)은 구리(Cu)로 구성되어 팔라듐-코발트(PdCo) 합금과 구리(Cu)가 교번적으로 적층되어 3층 이상의 금속층을 구성할 수 있다. 또는, 제1금속층(160)은 팔라듐-코발트(PdCo) 합금 또는 로듐(Rd)으로 구성되고, 제2금속층(180)은 구리(Cu)로 구성되어 팔라듐-코발트(PdCo) 합금, 구리(Cu), 로듐(Rd), 구리(Cu) 및 팔라듐-코발트(PdCo) 합금 순서로 적층되어 5층 이상의 금속층을 구성할 수 있다.For example, the first metal layer 160 is composed of a palladium-cobalt (PdCo) alloy, and the second metal layer 180 is composed of copper (Cu) such that the palladium-cobalt (PdCo) alloy and copper (Cu) are alternately formed. It can be laminated to constitute three or more metal layers. Alternatively, the first metal layer 160 is composed of a palladium-cobalt (PdCo) alloy or rhodium (Rd), and the second metal layer 180 is composed of copper (Cu) and is composed of a palladium-cobalt (PdCo) alloy, copper (Cu) ), rhodium (Rd), copper (Cu), and palladium-cobalt (PdCo) alloys may be stacked in order to form five or more metal layers.
전기 전도성 접촉핀(100)의 두께 치수(H)는 전기 전도성 접촉핀(100)의 폭 치수(W)와 실질적으로 동일한 크기로 형성될 수 있다. 이를 통해 전기 전도성 접촉핀(100)의 폭에 비해 전기 전도성 접촉핀(100)의 두께가 얇아 전기 전도성 접촉핀(100)의 두께를 줄이면서 발생하는 전기 전도성 접촉핀(100)의 특성 약화를 방지할 수 있다. The thickness H of the electrically conductive contact pin 100 may be substantially the same as the width W of the electrically conductive contact pin 100 . Through this, the thickness of the electrically conductive contact pin 100 is small compared to the width of the electrically conductive contact pin 100, thereby preventing the characteristic deterioration of the electrically conductive contact pin 100 caused by reducing the thickness of the electrically conductive contact pin 100 can do.
또한, 복수개의 금속층이 적층되는 구성을 통해, 협피치로 배열되는 전기 전도성 접촉핀(100)의 탄력성, 내마모성 및/또는 전기 전도성을 향상시킬 수 있다. 다시 말해 복수개의 금속층이 적층되는 구성을 채택함으로써 전기 전도성 접촉핀(100)을 협피치로 배열하더라도 내마모성이 저하되거나 전기 전도성이 저하되는 현상을 방지할 수 있고 고 탄력의 기계적 특성을 제공할 수 있게 된다.In addition, elasticity, abrasion resistance, and/or electrical conductivity of the electrically conductive contact pins 100 arranged in a narrow pitch may be improved through a configuration in which a plurality of metal layers are stacked. In other words, by adopting a structure in which a plurality of metal layers are stacked, even if the electrically conductive contact pins 100 are arranged at a narrow pitch, it is possible to prevent a phenomenon in which wear resistance or electrical conductivity is deteriorated and to provide high elasticity mechanical properties. do.
전기 전도성 접촉핀(100)은 탄성밀착부(TM)를 포함한다. The electrically conductive contact pin 100 includes an elastic contact portion TM.
전기 전도성 접촉핀(100)은 도금 공정을 이용하여 한꺼번에 제작됨에 따라 탄성밀착부(TM)는 제1금속층(160)과 제2금속층(180)이 교대로 적층되어 구비된다. 보다 구체적으로, 제1플런저(110), 제2플런저(120), 탄성부(130), 지지부(140) 및 탄성밀착부(TM)는 복수개의 금속층이 적층되어 구비되며, 복수개의 금속층은 제1금속층(160)과 제2금속층(180)을 포함한다. As the electrically conductive contact pins 100 are manufactured at once using a plating process, the elastic contact portion TM is provided by alternately stacking the first metal layer 160 and the second metal layer 180. More specifically, the first plunger 110, the second plunger 120, the elastic part 130, the support part 140, and the elastic contact part TM are provided by stacking a plurality of metal layers, and the plurality of metal layers are A first metal layer 160 and a second metal layer 180 are included.
탄성밀착부(TM)는 탄성부(130)의 압축 및 신장 방향과 수직한 방향으로 작용하는 복원력을 가이드 구멍의 측벽에 유발하여 전기 전도성 접촉핀(100)이 그 자중에 의해 낙하되지 않도록 한다. The elastic contact portion TM induces a restoring force acting in a direction perpendicular to the compression and extension directions of the elastic portion 130 on the sidewall of the guide hole to prevent the electrically conductive contact pin 100 from falling due to its own weight.
탄성밀착부(TM)는 지지부(140)로부터 전기 전도성 접촉핀(100)의 폭 방향 외측으로 연장되되 가이드 구멍의 측벽에 탄력적으로 지지된다. 탄성밀착부(TM)는 가이드 플레이트(GP)의 가이드 구멍의 측벽에 밀착될 때 탄성 변형되는 구조로 형성된다. The elastic contact portion TM extends outward from the support portion 140 in the width direction of the electrically conductive contact pin 100 and is elastically supported on the sidewall of the guide hole. The elastic contact part TM is formed in a structure that is elastically deformed when it comes into close contact with the sidewall of the guide hole of the guide plate GP.
가이드 플레이트(GP)는 도 8a에 도시된 바와 같이 하나의 부재로 형성될 수 있다. 또는, 도 8b에 도시된 같이 가이드 플레이트(GP)는 상부 가이드 플레이트(GP1)와 하부 가이드 플레이트(GP2)를 포함하고, 탄성밀착부(TM)는 상부 가이드 플레이트(GP1) 및 하부 가이드 플레이트(GP2) 중 적어도 어느 하나의 가이드 구멍의 위치에 대응되는 위치에 구비된다. As shown in FIG. 8A , the guide plate GP may be formed as a single member. Alternatively, as shown in FIG. 8B, the guide plate GP includes an upper guide plate GP1 and a lower guide plate GP2, and the elastic contact part TM includes the upper guide plate GP1 and the lower guide plate GP2. ) is provided at a position corresponding to the position of at least one of the guide holes.
가이드 플레이트(GP)가 상부 가이드 플레이트(GP1)와 하부 가이드 플레이트(GP2)를 포함하는 구성에 있어서, 탄성밀착부(TM)는 상부 가이드 플레이트(GP1)의 가이드 구멍과 하부 가이드 플레이트(GP2)의 가이드 구멍 중 적어도 어느 하나의 가이드 구멍에 대응하여 구비될 수 있다. 예컨대, 탄성밀착부(TM)는 상부 가이드 플레이트(GP1)의 가이드 구멍 또는 하부 가이드 플레이트(GP2)의 가이드 구멍에 대응하여 구비되거나, 상부 가이드 플레이트(GP1)의 가이드 구멍과 하부 가이드 플레이트(GP2)의 가이드 구멍 모두에 대응하여 구비될 수 있다. 도 8b는 상부 가이드 플레이트(GP1)의 가이드 구멍에 대응하여 탄성밀착부(TM)가 구비되고, 하부 가이드 플레이트(GP2)의 가이드 구멍에 대응해서는 탄성밀착부(TM)가 구비되지 않는 구조이다. 이 경우 하부 가이드 플레이트(GP2)는 전기 전도성 접촉핀(100)의 승,하강을 안내하고 전기 전기 전도성 접촉핀(100)의 흔들림을 최소화하는 기능을 수행한다. In the configuration in which the guide plate GP includes an upper guide plate GP1 and a lower guide plate GP2, the elastic contact part TM is formed between the guide hole of the upper guide plate GP1 and the lower guide plate GP2. It may be provided to correspond to at least one of the guide holes. For example, the elastic contact part TM is provided to correspond to the guide hole of the upper guide plate GP1 or the guide hole of the lower guide plate GP2, or the guide hole of the upper guide plate GP1 and the lower guide plate GP2. It may be provided to correspond to all of the guide holes. 8B shows a structure in which an elastic contact part TM is provided to correspond to the guide hole of the upper guide plate GP1, and the elastic contact part TM is not provided to correspond to the guide hole of the lower guide plate GP2. In this case, the lower guide plate GP2 serves to guide the ascending and descending of the electrically conductive contact pins 100 and minimizes shaking of the electrically conductive contact pins 100 .
탄성밀착부(TM)는 일단이 지지부(140)에 연결되고 타단은 자유단으로 형성된다. 탄성밀착부(TM)의 일단 및 타단 사이는 가이드 구멍 방향으로 만곡되어 형성된다. 이를 통해 가이드 구멍의 측벽에 탄력적으로 지지됨과 동시에 가이드 구멍의 측벽과 마찰 운동할 때 가이드 구멍의 손상을 최소화한다. 또한, 전기 전도성 접촉핀(100)의 교체를 위해 프로브 헤드 등을 반전시키더라도 전기 전도성 접촉핀(100)이 가이드 플레이트(GP)로부터 낙하되지 않는다. The elastic contact part TM has one end connected to the support part 140 and the other end formed as a free end. Between one end and the other end of the elastic contact part TM is formed to be curved in the direction of the guide hole. Through this, damage to the guide hole is minimized when it is elastically supported on the side wall of the guide hole and at the same time frictional movement with the side wall of the guide hole. In addition, even if the probe head or the like is reversed to replace the electrically conductive contact pins 100, the electrically conductive contact pins 100 do not fall from the guide plate GP.
탄성밀착부(TM)의 타단과 지지부(140) 사이에는 여유 틈새(YT)가 형성된다. 여유 틈새(YT)는 탄성밀착부(TM)의 타단이 탄성 변형될 수 있는 여유 공간을 제공한다. A clearance gap (YT) is formed between the other end of the elastic contact part (TM) and the support part (140). The clearance gap (YT) provides a clearance space in which the other end of the elastic contact portion (TM) can be elastically deformed.
탄성밀착부(TM)는 지지부(140)를 기준으로 적어도 1개 이상 형성된다. 탄성밀착부(TM)는 제1지지부(141) 및 제2지지부(145) 중 적어도 어느 하나에 적어도 하나 이상 형성될 수 있다. 탄성밀착부(TM)는 제1지지부(141) 또는 제2지지부(145)에 형성될 수 있고, 제1지지부(141) 및 제2지지부(145)에 모두 형성될 수 있다. 또한 탄성밀착부(TM)는 제1지지부(141) 및/또는 제2지지부(145)에 적어도 하나 이상 형성될 수 있다.At least one elastic contact part TM is formed based on the support part 140 . At least one elastic contact part TM may be formed on at least one of the first support part 141 and the second support part 145 . The elastic contact part TM may be formed on the first support part 141 or the second support part 145 , and may be formed on both the first support part 141 and the second support part 145 . In addition, at least one elastic contact part TM may be formed on the first support part 141 and/or the second support part 145 .
탄성밀착부(TM)는 제1지지부(141)의 좌측에 구비되는 제1탄성밀착부(TM1)와 제2지지부(145)의 우측에 구비되는 제2탄성밀착부(TM2)를 포함한다. 제1탄성밀착부(TM1)의 일단은 제1지지부(141)에 연결되고 타단은 자유단으로 형성되며, 제2탄성밀착부(TM2)의 일단은 제2지지부(145)에 연결되고 타단은 자유단으로 형성된다. The elastic contact part TM includes a first elastic contact part TM1 provided on the left side of the first support part 141 and a second elastic contact part TM2 provided on the right side of the second support part 145 . One end of the first elastic contact part TM1 is connected to the first support part 141 and the other end is formed as a free end, and one end of the second elastic contact part TM2 is connected to the second support part 145 and the other end is formed as a free end. It is formed as a free end.
전기 전도성 접촉핀(100)의 길이 방향으로 탄성밀착부(TM)의 적어도 일단부의 위치는 중간 고정부(137)의 위치와 일치하여 중간 고정부(137)와 연결된다. 제1탄성밀착부(TM1)의 일단과 제2탄성밀착부(TM2)의 일단 사이에는 중간고정부(137)가 위치한다. 제1탄성밀착부(TM1)의 일단과 제2탄성밀착부(TM2)의 일단이 중간고정부(137)에 연결됨으로써, 제1탄성밀착부(TM1)의 일단과 제2탄성밀착부(TM2)의 일단은 전기 전도성 접촉핀(100)의 폭 방향으로 변형되지 않는다. 제1탄성밀착부(TM1)의 타단과 제2탄성밀착부(TM2)의 타단의 복원력은 가이드 구멍의 측벽에 유발되는데, 제1탄성밀착부(TM1)의 일단과 제2탄성밀착부(TM2)의 일단이 중간고정부(137)에 의해 단단히 고정되어 있으므로 견고한 복원력을 유발할 수 있게 된다. The location of at least one end of the elastic contact portion TM in the longitudinal direction of the electrically conductive contact pin 100 coincides with the location of the intermediate fixing portion 137 and is connected to the intermediate fixing portion 137 . An intermediate fixing part 137 is positioned between one end of the first elastic contact part TM1 and one end of the second elastic contact part TM2. One end of the first elastic contact part TM1 and one end of the second elastic contact part TM2 are connected to the intermediate fixing part 137 so that one end of the first elastic contact part TM1 and the second elastic contact part TM2 are connected. ) is not deformed in the width direction of the electrically conductive contact pin 100. The restoring force of the other end of the first elastic contact part TM1 and the other end of the second elastic contact part TM2 is induced on the sidewall of the guide hole, and one end of the first elastic contact part TM1 and the second elastic contact part TM2 Since one end of ) is firmly fixed by the intermediate fixing part 137, it is possible to induce a solid restoring force.
전기 전도성 접촉핀(100)의 설치 및 작동과정을 살펴보면, 먼저 전기 전도성 접촉핀(100)을 가이드 플레이트(GP)에 삽입하여 설치한다. 탄성밀착부(TM)는 가이드 플레이트(GP)의 가이드 구멍의 측벽에 탄력적으로 밀착된다. 전기 전도성 접촉핀(100)의 전체 폭 치수(W) 및 두께 치수(H)는 가이드 플레이트(GP)의 가이드 구멍의 개구 폭보다 작지만, 탄성밀착부(TM)의 폭 치수는 가이드 플레이트(GP)의 가이드 구멍의 개구 폭보다 크다. 따라서 소정의 가압력으로 전기 전도성 접촉핀(100)을 가압하여 가이드 구멍에 밀어 넣게 되며, 이때 탄성밀착부(TM)는 폭 방향으로 가압되어 압축 변형된다. 탄성밀착부(TM)는 그 복원력에 의해 가이드 구멍의 측벽에 마찰력을 인가하며, 전기 전도성 접촉핀(100)의 자중에 따른 중력보다 마찰력이 크게 형성된다. 그 결과 전기 전도성 접촉핀(100)의 자중에 의해서는 전기 전도성 접촉핀(100)이 상부 가이드 플레이트(GP)로부터 낙하되지 않는다. 다만, 전기 전도성 접촉핀(100)은 가이드 구멍의 측벽에 작용하는 마찰력보다 더 크게 작용하는 외력에 의해서는 길이 방향으로 이동 가능하다. Looking at the installation and operation process of the electrically conductive contact pins 100, first, the electrically conductive contact pins 100 are installed by inserting them into the guide plate GP. The elastic contact portion TM is elastically adhered to the sidewall of the guide hole of the guide plate GP. The overall width dimension (W) and thickness dimension (H) of the electrically conductive contact pin 100 are smaller than the opening width of the guide hole of the guide plate GP, but the width dimension of the elastic contact portion TM is smaller than the guide plate GP. is greater than the opening width of the guide hole of Therefore, the electrically conductive contact pin 100 is pressed with a predetermined pressing force and pushed into the guide hole, and at this time, the elastic contact portion TM is pressed in the width direction and compressed and deformed. The elastic contact portion TM applies a frictional force to the sidewall of the guide hole by its restoring force, and the frictional force is greater than the gravitational force according to the weight of the electrically conductive contact pin 100 . As a result, the electrically conductive contact pins 100 do not fall from the upper guide plate GP due to the weight of the electrically conductive contact pins 100 . However, the electrically conductive contact pin 100 is movable in the longitudinal direction by an external force acting greater than the frictional force acting on the sidewall of the guide hole.
복수개의 전기 전도성 접촉핀(100)들을 가이드 플레이트(GP)에 삽입 완료하여 프로브 헤드를 구성한다. 프로브 헤드는 회로기판에 고정 설치된다. A probe head is formed by inserting the plurality of electrically conductive contact pins 100 into the guide plate GP. The probe head is fixedly installed on the circuit board.
제1플런저(110)는 상부에 위치하는 접속 대상물과 접촉되고 제2플런저(120)는 하부에 위치하는 접속 대상물과 접촉된다. 전기 전도성 접촉핀(100)이 상부에 위치하는 접속 대상물과 하부에 위치하는 접속 대상물에 의해 길이 방향으로 가압되면, 제1탄성부(131) 및 제2탄성부(135)는 길이 방향으로 압축 변형을 하고 제1탄성부(131) 및 제2탄성부(135)의 길이 방향의 압축 변형을 통해 접속 대상물의 가압력은 감쇠되어 탄성밀착부(TM)의 마찰력에 전달된다. 따라서 탄성밀착부(TM)가 가이드 구멍의 측벽에 밀착되어 탄력적으로 지지되는 구조를 채택하더라도, 가이드 구멍의 측벽이 마찰력에 의해 손상되는 것을 최소화할 수 있다. The first plunger 110 is in contact with a connection object positioned at the top and the second plunger 120 is in contact with a connection object positioned at the bottom. When the electrically conductive contact pin 100 is pressed in the longitudinal direction by a connection object located at the top and a connection object located at the bottom, the first elastic portion 131 and the second elastic portion 135 are compressed and deformed in the longitudinal direction. And, through the compressive deformation of the first elastic part 131 and the second elastic part 135 in the longitudinal direction, the pressing force of the object to be connected is attenuated and transmitted to the frictional force of the elastic contact part TM. Accordingly, even when the elastic contact part TM adopts a structure in which the sidewall of the guide hole is elastically supported by being in close contact with the sidewall of the guide hole, damage to the sidewall of the guide hole due to frictional force can be minimized.
또한 탄성밀착부(TM)는 가이드 플레이트(GP)의 가이드 구멍의 측벽 위치에 대응되는 위치에서 전기 전도성 접촉핀(100)에 구비되기 때문에, 전기 전도성 접촉핀(100)은 가이드 구멍의 폭 방향 외측으로 돌출된 구조를 구비하지 않는다. 이를 통해 인접한 전기 전도성 접촉핀(100)간의 간섭을 최소화할 수 있다. 또한, 전기 전도성 접촉핀(100)은 외력에 의해 길이 방향으로 탄력적으로 변위되도록 하는 탄성부(130)를 채택함으로써 인접한 전기 전도성 접촉핀(100)간의 간섭을 최소화할 수 있다. 그 결과 전기 전도성 접촉핀(100)은 협 피치 대응에 유리하다. In addition, since the elastic contact portion TM is provided on the electrically conductive contact pin 100 at a position corresponding to the position of the sidewall of the guide hole of the guide plate GP, the electrically conductive contact pin 100 extends to the outside of the guide hole in the width direction. It does not have a protruding structure. Through this, interference between adjacent electrically conductive contact pins 100 can be minimized. In addition, the electrically conductive contact pin 100 can minimize interference between adjacent electrically conductive contact pins 100 by adopting the elastic part 130 that is elastically displaced in the longitudinal direction by an external force. As a result, the electrically conductive contact pin 100 is advantageous for responding to a narrow pitch.
한편, 불량 등의 이유로 불량한 전기 전도성 접촉핀(100)을 낱개로 교체하고자 할 경우, 전기 전도성 접촉핀(100)을 강제로 잡아당기면 전기 전도성 접촉핀(100)이 가이드 플레이트(GP)로부터 이탈되므로 전기 전도성 접촉핀(100)을 가이드 플레이트(GP)로부터 쉽게 분리해 낼 수 있다. 또한 제거된 위치에 새로운 전기 전도성 접촉핀(100)을 설치하고자 할 경우에도, 강제로 전기 전도성 접촉핀(100)을 가이드 플레이트(GP)의 가이드 구멍에 밀어 넣음으로써 쉽게 설치할 수 있게 된다. 이처럼 고정 설치된 가이드 플레이트(GP)를 따로 분리해 낼 필요없이, 가이드 플레이트(GP)가 고정 설치된 상태에서 불량한 전기 전도성 접촉핀(100)만을 양호한 전기 전도성 접촉핀(100)으로 교체하는 것이 쉽게 수행될 수 있다. On the other hand, when trying to replace the defective electrically conductive contact pins 100 individually for reasons such as defects, if the electrically conductive contact pins 100 are forcibly pulled, the electrically conductive contact pins 100 are separated from the guide plate GP. The electrically conductive contact pins 100 can be easily separated from the guide plate GP. Also, when a new electrically conductive contact pin 100 is to be installed in the removed position, it can be easily installed by forcibly pushing the electrically conductive contact pin 100 into the guide hole of the guide plate GP. Without the need to separate the fixed guide plate GP, it is easy to replace only the defective electrically conductive contact pins 100 with good electrically conductive contact pins 100 while the guide plate GP is fixedly installed. can
한편, 도 8b을 참조하면, 하부 가이드 플레이트(GP2)의 가이드 구멍의 폭은 상부 가이드 플레이트(GP1)의 가이드 구멍의 폭보다 작게 형성될 수 있다. 이를 통해 의도치 않은 외력에 의해 전기 전도성 접촉핀(100)이 상부 가이드 플레이트(GP1)로부터 낙하되더라도 전기 전도성 접촉핀(100)이 하부 가이드 플레이트(GP2)의 가이드 구멍을 쉽게 통과하지 못하도록 한다. 의도치 않은 외력에 의해 상부 가이드 플레이트(GP1)로부터 빠진 전기 전도성 접촉핀(100)는 다시 상부 가이드 플레이트(GP1)에 밀어 넣어 설치된다. 또한 하부 가이드 플레이트(GP2)의 가이드 구멍의 폭은 상부 가이드 플레이트(GP1)의 가이드 구멍의 폭보다 작게 형성함으로써 전기 전도성 접촉핀(100)의 하부가 흔들리는 것을 최소화하는 것이 가능하게 된다. Meanwhile, referring to FIG. 8B , the width of the guide hole of the lower guide plate GP2 may be smaller than that of the guide hole of the upper guide plate GP1. Through this, even if the electrically conductive contact pins 100 fall from the upper guide plate GP1 due to an unintended external force, the electrically conductive contact pins 100 do not easily pass through the guide holes of the lower guide plate GP2. The electrically conductive contact pin 100 removed from the upper guide plate GP1 by an unintended external force is pushed into the upper guide plate GP1 again and installed. In addition, since the guide hole width of the lower guide plate GP2 is smaller than that of the upper guide plate GP1, shaking of the lower part of the electrically conductive contact pin 100 can be minimized.
제2실시예Example 2
다음으로, 본 발명에 따른 제2실시예에 대해 살펴본다. 단, 이하 설명되는 실시예들은 상기 제1실시예와 비교하여 특징적인 구성요소들을 중심으로 설명하겠으며, 제1실시예와 동일하거나 유사한 구성요소들에 대한 설명은 되도록이면 생략한다.Next, look at the second embodiment according to the present invention. However, the embodiments described below will be described focusing on characteristic components compared to the first embodiment, and descriptions of components identical or similar to those of the first embodiment will be omitted if possible.
이하, 도 9를 참조하여 본 발명의 바람직한 제2실시예에 따른 전기 전도성 접촉핀(200)에 대해 설명한다. 도 9는 본 발명의 바람직한 제2실시예에 따른 전기 전도성 접촉핀(200)의 사시도이다.Hereinafter, an electrically conductive contact pin 200 according to a second preferred embodiment of the present invention will be described with reference to FIG. 9 . 9 is a perspective view of an electrically conductive contact pin 200 according to a second preferred embodiment of the present invention.
본 발명의 바람직한 제2실시예에 따른 전기 전도성 접촉핀(200)은 탄성밀착부(TM) 구성만이 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀(100)와 차이가 있고 그 나머지 구성은 모두 동일하다. The electrically conductive contact pin 200 according to the second preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact part (TM), and the rest All configurations are the same.
본 발명의 바람직한 제2실시예에 따른 전기 전도성 접촉핀(200)의 탄성밀착부(TM)은, 단일의 금속층으로 구성된다는 점에서, 이종의 금속층으로 구성되는 제1실시예의 구성과 차이가 있다.The elastic contact part TM of the electrically conductive contact pin 200 according to the second preferred embodiment of the present invention is different from the configuration of the first embodiment composed of different metal layers in that it is composed of a single metal layer. .
제2실시예에 따른 전기 전도성 접촉핀(200)은, 제1플런저(110), 제2플런저(120), 탄성부(130) 및 지지부(140)는 복수개의 금속층이 적층되어 구비되고, 탄성밀착부(TM)는 단일의 금속층으로 구비된다. In the electrically conductive contact pin 200 according to the second embodiment, the first plunger 110, the second plunger 120, the elastic part 130, and the support part 140 are provided by stacking a plurality of metal layers, and the elastic part The adhesion part TM is provided with a single metal layer.
제1플런저(110), 제2플런저(120), 탄성부(130) 및 지지부(140)는 제1금속층(160)과 제2금속층(180)을 포함한 다층 도금 공정에 의해 제작되고, 탄성밀착부(TM)는 단일의 금속층만을 포함한 단층 도금 공정에 의해 제작된다. The first plunger 110, the second plunger 120, the elastic part 130, and the support part 140 are manufactured by a multi-layer plating process including the first metal layer 160 and the second metal layer 180, and are elastically adhered to each other. Part TM is fabricated by a single-layer plating process including only a single metal layer.
제2실시예에 따른 탄성밀착부(TM)는 제1금속층(160)으로 구성된다. 제1금속층(160)은 로듐(Rd), 백금 (Pt), 이리듐(Ir), 팔라듐(Pd), 니켈(Ni), 망간(Mn), 텅스텐(W), 인(Ph) 이나 이들의 합금, 또는 팔라듐-코발트(PdCo) 합금, 팔라듐-니켈(PdNi) 합금 또는 니켈-인(NiPh) 합금, 니켈-망간(NiMn), 니켈-코발트(NiCo) 또는 니켈-텅스텐(NiW) 합금 중에서 선택된 금속이다. The elastic contact part TM according to the second embodiment is composed of the first metal layer 160 . The first metal layer 160 is rhodium (Rd), platinum (Pt), iridium (Ir), palladium (Pd), nickel (Ni), manganese (Mn), tungsten (W), phosphorus (Ph) or an alloy thereof. , or a metal selected from a palladium-cobalt (PdCo) alloy, a palladium-nickel (PdNi) alloy or a nickel-phosphorus (NiPh) alloy, a nickel-manganese (NiMn), a nickel-cobalt (NiCo), or a nickel-tungsten (NiW) alloy. am.
제1금속층(160)은 내마모성이 높은 금속으로서, 이를 통해 탄성밀착부(TM)가 가이드 구멍의 측벽에 맞닿아 슬라이딩될 때, 마모되는 것을 최소화할 수 있다. The first metal layer 160 is a metal having high abrasion resistance, and through this, when the elastic contact part TM comes into contact with the sidewall of the guide hole and slides, wear can be minimized.
제3실시예3rd embodiment
다음으로, 본 발명에 따른 제3실시예에 대해 살펴본다. 단, 이하 설명되는 실시예들은 상기 제1실시예와 비교하여 특징적인 구성요소들을 중심으로 설명하겠으며, 제1실시예와 동일하거나 유사한 구성요소들에 대한 설명은 되도록이면 생략한다.Next, look at the third embodiment according to the present invention. However, the embodiments described below will be described focusing on characteristic components compared to the first embodiment, and descriptions of components identical or similar to those of the first embodiment will be omitted if possible.
이하, 도 10을 참조하여 본 발명의 바람직한 제3실시예에 따른 전기 전도성 접촉핀(300)에 대해 설명한다. 도 10은 본 발명의 바람직한 제3실시예에 따른 전기 전도성 접촉핀(300)의 사시도이다.Hereinafter, an electrically conductive contact pin 300 according to a third preferred embodiment of the present invention will be described with reference to FIG. 10 . 10 is a perspective view of an electrically conductive contact pin 300 according to a third preferred embodiment of the present invention.
본 발명의 바람직한 제3실시예에 따른 전기 전도성 접촉핀(300)은 탄성밀착부(TM) 구성만이 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀(100)와 차이가 있고 그 나머지 구성은 모두 동일하다. The electrically conductive contact pin 300 according to the third preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact part (TM), and the rest All configurations are the same.
본 발명의 바람직한 제3실시예에 따른 전기 전도성 접촉핀(300)의 탄성밀착부(TM)은, 일단에서 타단이 이르기까지 굴곡되지 않고 일직선으로 구성된다는 점에서, 제1실시예에 따른 전기 전도성 접촉핀(100)의 탄성밀착부(TM)의 구성과 차이가 있다.The electrical conductivity according to the first embodiment in that the elastic contact portion (TM) of the electrically conductive contact pin 300 according to the third preferred embodiment of the present invention is configured in a straight line without bending from one end to the other end. There is a difference from the configuration of the elastic contact part (TM) of the contact pin (100).
제3실시예에 따른 탄성밀착부(TM)는 일단이 지지부(140)에 연결되고 타단은 자유단으로 형성된다. 일단에서 타단에 이르기까지 직선의 형태로 연장되어 구성된다. The elastic contact part TM according to the third embodiment has one end connected to the support part 140 and the other end formed as a free end. It is composed of extending in the form of a straight line from one end to the other end.
제4실시예Example 4
다음으로, 본 발명에 따른 제4실시예에 대해 살펴본다. 단, 이하 설명되는 실시예들은 상기 제1실시예와 비교하여 특징적인 구성요소들을 중심으로 설명하겠으며, 제1실시예와 동일하거나 유사한 구성요소들에 대한 설명은 되도록이면 생략한다.Next, look at the fourth embodiment according to the present invention. However, the embodiments described below will be described focusing on characteristic components compared to the first embodiment, and descriptions of components identical or similar to those of the first embodiment will be omitted if possible.
이하, 도 11을 참조하여 본 발명의 바람직한 제4실시예에 따른 전기 전도성 접촉핀(400)에 대해 설명한다. 도 11은 본 발명의 바람직한 제4실시예에 따른 전기 전도성 접촉핀(400)의 사시도이다.Hereinafter, an electrically conductive contact pin 400 according to a fourth preferred embodiment of the present invention will be described with reference to FIG. 11 . 11 is a perspective view of an electrically conductive contact pin 400 according to a fourth preferred embodiment of the present invention.
본 발명의 바람직한 제4실시예에 따른 전기 전도성 접촉핀(400)은 탄성밀착부(TM) 구성만이 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀(100)와 차이가 있고 그 나머지 구성은 모두 동일하다. The electrically conductive contact pin 400 according to the fourth preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact part (TM), and the rest All configurations are the same.
본 발명의 바람직한 제4실시예에 따른 전기 전도성 접촉핀(300)의 탄성밀착부(TM)은, 일단과 타단 사이에서 폭 방향으로 볼록한 형태로 형성되되 일단 및 타단이 모두 지지부(140)에 연결되는 구성이라는 점에서, 제1실시예에 따른 전기 전도성 접촉핀(100)의 탄성밀착부(TM)의 구성과 차이가 있다.The elastic contact portion (TM) of the electrically conductive contact pin 300 according to the fourth preferred embodiment of the present invention is formed in a convex shape in the width direction between one end and the other end, and both one end and the other end are connected to the support part 140. It is different from the configuration of the elastic contact portion TM of the electrically conductive contact pin 100 according to the first embodiment.
제4실시예에 따른 탄성밀착부(TM)는 일단 및 타단이 모두 지지부(140)에 연결되고 일단과 타단 사이의 볼록한 부분에서 가이드 구멍의 측벽에 탄성 밀착된다. 제4실시예에 따른 탄성밀착부(TM)는 지지부(140)와의 사이에서 폐쇄공간을 형성하며 폐쇄공간이 여유틈새(YT)가 된다. 이를 통해 탄성 밀착부(TM)의 폭 방향으로의 변형율을 최소화하고 보다 큰 마찰력을 가이드 구멍의 측벽에 유발하도록 한다.Both one end and the other end of the elastic contact part TM according to the fourth embodiment are connected to the support part 140 and elastically come into close contact with the sidewall of the guide hole at the convex portion between one end and the other end. The elastic contact part (TM) according to the fourth embodiment forms a closed space between the support part 140 and the closed space becomes a free gap (YT). Through this, the deformation rate of the elastic contact part TM in the width direction is minimized and a greater frictional force is induced to the sidewall of the guide hole.
제5실시예Example 5
다음으로, 본 발명에 따른 제5실시예에 대해 살펴본다. 단, 이하 설명되는 실시예들은 상기 제1실시예와 비교하여 특징적인 구성요소들을 중심으로 설명하겠으며, 제1실시예와 동일하거나 유사한 구성요소들에 대한 설명은 되도록이면 생략한다.Next, look at the fifth embodiment according to the present invention. However, the embodiments described below will be described focusing on characteristic components compared to the first embodiment, and descriptions of components identical or similar to those of the first embodiment will be omitted if possible.
이하, 도 12를 참조하여 본 발명의 바람직한 제5실시예에 따른 전기 전도성 접촉핀(500)에 대해 설명한다. 도 12는 본 발명의 바람직한 제5실시예에 따른 전기 전도성 접촉핀(500)의 사시도이다.Hereinafter, an electrically conductive contact pin 500 according to a fifth preferred embodiment of the present invention will be described with reference to FIG. 12 . 12 is a perspective view of an electrically conductive contact pin 500 according to a fifth preferred embodiment of the present invention.
본 발명의 바람직한 제5실시예에 따른 전기 전도성 접촉핀(500)은 탄성밀착부(TM) 구성만이 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀(100)와 차이가 있고 그 나머지 구성은 모두 동일하다. The electrically conductive contact pin 500 according to the fifth preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact portion (TM), and the rest All configurations are the same.
본 발명의 바람직한 제5실시예에 따른 전기 전도성 접촉핀(500)의 탄성밀착부(TM)는, 일단과 타단 사이에서 폭 방향으로 볼록한 형태로 형성되되 일단 및 타단이 모두 지지부(140)에 연결되고 볼록부가 적어도 2개 형성되는 구성이라는 점에서, 제1실시예에 따른 전기 전도성 접촉핀(100)의 탄성밀착부(TM)의 구성과 차이가 있다.The elastic contact portion TM of the electrically conductive contact pin 500 according to the fifth preferred embodiment of the present invention is formed in a convex shape in the width direction between one end and the other end, and both one end and the other end are connected to the support part 140. It is different from the configuration of the elastic contact portion TM of the electrically conductive contact pin 100 according to the first embodiment in that it has a configuration in which at least two convex portions are formed.
제5실시예에 따른 탄성밀착부(TM)는 일단 및 타단이 모두 지지부(140)에 연결되고 일단과 타단 사이의 복수개의 볼록한 부분에서 가이드 구멍의 측벽에 탄성 밀착된다. 제5실시예에 따른 탄성밀착부(TM)는 지지부(140)와의 사이에서 폐쇄공간을 형성하며 폐쇄공간이 여유틈새(YT)가 된다. 이를 통해 탄성 밀착부(TM)의 폭 방향으로의 변형율을 최소화하고 보다 큰 마찰력을 가이드 구멍의 측벽에 유발하도록 한다.Both one end and the other end of the elastic contact part TM according to the fifth embodiment are connected to the support part 140 and elastically adhered to the sidewall of the guide hole at a plurality of convex portions between one end and the other end. The elastic contact part TM according to the fifth embodiment forms a closed space between the support part 140 and the closed space becomes a free gap YT. Through this, the deformation rate of the elastic contact part TM in the width direction is minimized and a greater frictional force is induced to the sidewall of the guide hole.
제6실시예6th embodiment
다음으로, 본 발명에 따른 제6실시예에 대해 살펴본다. 단, 이하 설명되는 실시예들은 상기 제1실시예와 비교하여 특징적인 구성요소들을 중심으로 설명하겠으며, 제1실시예와 동일하거나 유사한 구성요소들에 대한 설명은 되도록이면 생략한다.Next, look at the sixth embodiment according to the present invention. However, the embodiments described below will be described focusing on characteristic components compared to the first embodiment, and descriptions of components identical or similar to those of the first embodiment will be omitted if possible.
이하, 도 13을 참조하여 본 발명의 바람직한 제6실시예에 따른 전기 전도성 접촉핀(600)에 대해 설명한다. 도 13은 본 발명의 바람직한 제6실시예에 따른 전기 전도성 접촉핀(600)의 사시도이다.Hereinafter, an electrically conductive contact pin 600 according to a sixth preferred embodiment of the present invention will be described with reference to FIG. 13 . 13 is a perspective view of an electrically conductive contact pin 600 according to a sixth preferred embodiment of the present invention.
본 발명의 바람직한 제6실시예에 따른 전기 전도성 접촉핀(600)은 탄성밀착부(TM) 구성만이 본 발명의 바람직한 제1실시예에 따른 전기 전도성 접촉핀(100)와 차이가 있고 그 나머지 구성은 모두 동일하다. The electrically conductive contact pin 600 according to the sixth preferred embodiment of the present invention is different from the electrically conductive contact pin 100 according to the first preferred embodiment of the present invention only in the configuration of the elastic contact part (TM), and the rest All configurations are the same.
본 발명의 바람직한 제6실시예에 따른 전기 전도성 접촉핀(600)의 탄성밀착부(TM)은, 일단과 타단 사이에서 폭 방향으로 볼록한 형태로 형성되되 일단 및 타단이 모두 지지부(140)에 연결되고 볼록부가 적어도 2개 형성되는 구성이라는 점에서, 제1실시예에 따른 전기 전도성 접촉핀(100)의 탄성밀착부(TM)의 구성과 차이가 있다.The elastic contact portion (TM) of the electrically conductive contact pin 600 according to the sixth preferred embodiment of the present invention is formed in a convex shape in the width direction between one end and the other end, and both one end and the other end are connected to the support part 140. It is different from the configuration of the elastic contact portion TM of the electrically conductive contact pin 100 according to the first embodiment in that it has a configuration in which at least two convex portions are formed.
제6실시예에 따른 탄성밀착부(TM)는 일단 및 타단이 모두 지지부(140)에 연결되고 일단과 타단 사이의 복수개의 볼록한 부분에서 가이드 구멍의 측벽에 탄성 밀착된다. 탄성밀착부(TM)의 폭 방향 내측으로는 지지부(140)가 없다는 점에서 제5실시예에 따른 전기 전도성 접촉핀(500)의 구성과 차이가 있다. Both one end and the other end of the elastic contact part TM according to the sixth embodiment are connected to the support part 140 and elastically come into close contact with the sidewall of the guide hole at a plurality of convex portions between one end and the other end. It is different from the configuration of the electrically conductive contact pin 500 according to the fifth embodiment in that there is no support part 140 inside the elastic contact part TM in the width direction.
제6실시예에 따른 탄성밀착부(TM)의 폭 방향 내측으로는 지지부(140)없이 탄성부(130)가 구비되어 제5실시예에 따른 전기 전도성 접촉핀(500)에서의 여유 틈새(YT)보다 상대적으로 큰 여유 틈새(YT)를 가진다. 이를 통해 탄성밀착부(TM)의 폭 방향 변형을 보다 원활하게 수행하도록 할 수 있다. An elastic part 130 is provided without a support part 140 inside the elastic contact part TM according to the sixth embodiment in the width direction, so that the clearance gap (YT) in the electrically conductive contact pin 500 according to the fifth embodiment ) has a clearance gap (YT) that is relatively larger than Through this, it is possible to more smoothly perform the deformation of the elastic contact part TM in the width direction.
검사장치inspection device
이상에서 설명한 본 발명의 바람직한 각 실시예에 따른 전기 전도성 접촉핀들(100, 200, 300, 400, 500, 600)은, 검사장치에 구비되어 검사 대상물과 전기적, 물리적으로 접촉하여 전기적 신호를 전달하는데 사용된다. The electrically conductive contact pins 100, 200, 300, 400, 500, and 600 according to each preferred embodiment of the present invention described above are provided in a test device to electrically and physically contact an object to be tested to transmit an electrical signal. used
검사장치는 구멍이 형성된 가이드 플레이트(GP) 및 가이드 플레이트(GP)의 가이드 구멍에 삽입되어 가이드 플레이트(GP)에 설치되는 전기 전도성 접촉핀(100, 200, 300, 400, 500, 600)을 포함한다. The inspection device includes a guide plate (GP) with holes and electrically conductive contact pins (100, 200, 300, 400, 500, 600) inserted into the guide holes of the guide plate (GP) and installed on the guide plate (GP). do.
검사장치는 반도체 제조공정에 사용되는 검사장치일 수 있으며, 그 일례로 프로브 카드일 수 있고, 테스트 소켓일 수 있다. 전기 전도성 접촉핀들(100, 200, 300, 400, 500, 600)은 프로브 카드에 구비되어 반도체 칩을 검사하는 전기 전도성 접촉핀일 수 있고, 패키징된 반도체 패키지를 검사하는 테스트 소켓에 구비되어 반도체 패키지를 검사하는 소켓 핀일 수 있다. The inspection device may be an inspection device used in a semiconductor manufacturing process, and may be, for example, a probe card or a test socket. The electrically conductive contact pins 100, 200, 300, 400, 500, and 600 may be electrically conductive contact pins provided in a probe card to inspect a semiconductor chip, and provided in a test socket to inspect a packaged semiconductor package to inspect a semiconductor package. It could be the socket pin you are checking.
본 발명의 바람직한 각 실시예들에 따른 전기 전도성 접촉핀들(100, 200, 300, 400, 500, 600)은 수직형 프로브 카드에 채용될 수 있다. 본 발명의 바람직한 실시예에 따른 수직형 프로브 카드는, 접속 패드를 구비하는 공간변환기, 공간변환기 하부에서 공간변환기와 이격되어 구비되는 가이드 플레이트(GP), 및 가이드 플레이트(GP)의 구멍에 삽입되어 설치되는 전기 전도성 접촉핀(100, 200, 300, 400, 500, 600)을 포함한다. 본 발명의 바람직한 실시예에 따른 수직형 프로브 카드는, 반도체 제조 공정 중에서 웨이퍼 상에 제작된 칩을 검사하는 검사 공정에 사용되며 미세 미치 대응이 가능하다. 바람직하게는 수직형 프로브 카드의 가이드 플레이트(GP)에 설치되는 배치되는 전기 전도성 접촉핀(100, 200, 300, 400, 500, 600)들 간의 피치 간격은 50㎛ 이상 150㎛이하이다. The electrically conductive contact pins 100, 200, 300, 400, 500, and 600 according to each preferred embodiment of the present invention may be employed in a vertical probe card. A vertical probe card according to a preferred embodiment of the present invention is inserted into a space converter having a connection pad, a guide plate (GP) provided at a lower part of the space converter and spaced apart from the space converter, and a hole in the guide plate (GP). It includes electrically conductive contact pins (100, 200, 300, 400, 500, 600) installed. The vertical probe card according to a preferred embodiment of the present invention is used in an inspection process of inspecting a chip fabricated on a wafer during a semiconductor manufacturing process, and is capable of responding to micrometers. Preferably, the pitch interval between the electrically conductive contact pins 100, 200, 300, 400, 500, and 600 installed on the guide plate GP of the vertical probe card is 50 μm or more and 150 μm or less.
본 발명의 바람직한 실시예에 따른 전기 전도성 접촉핀(100,200)이 사용될 수 있는 검사장치들은 이에 한정되는 것은 아니며, 전기를 인가하여 검사 대상물의 불량 여부를 확인하기 위한 검사장치라면 모두 포함된다. 검사 장치의 검사 대상물은, 반도체 소자, 메모리 칩, 마이크로 프로세서 칩, 로직 칩, 발광소자, 혹은 이들의 조합을 포함할 수 있다. 예를 들어, 검사 대상물은 로직 LSI(ASIC, FPGA 및 ASSP과 같은), 마이크로프로세서(CPU 및 GPU와 같은), 메모리(DRAM, HMC(Hybrid Memory Cube), MRAM(Magnetic RAM), PCM(Phase-Change Memory), ReRAM(Resistive RAM), FeRAM(강유전성 RAM) 및 플래쉬 메모리(NAND flash)), 반도체 발광소자(LED, 미니 LED, 마이크로 LED 등 포함), 전력 장치, 아날로그IC(DC-AC 컨버터 및 절연 게이트 2극 트랜지스터(IGBT)와 같은), MEMS(가속 센서, 압력 센서, 진동기 및 지로 센서와 같은), 무배선 장치(GPS, FM, NFC, RFEM, MMIC 및 WLAN과 같은), 별개 장치, BSI, CIS, 카메라 모듈, CMOS, 수동 장치, GAW 필터, RF 필터, RF IPD, APE 및 BB를 포함한다.Inspection devices in which the electrically conductive contact pins 100 and 200 according to a preferred embodiment of the present invention can be used are not limited thereto, and include all inspection devices for checking whether an object to be inspected is defective by applying electricity. The inspection target of the inspection device may include a semiconductor device, a memory chip, a microprocessor chip, a logic chip, a light emitting device, or a combination thereof. For example, inspection objects include logic LSIs (such as ASICs, FPGAs, and ASSPs), microprocessors (such as CPUs and GPUs), memories (DRAM, HMC (Hybrid Memory Cube), MRAM (Magnetic RAM), PCM (Phase- Change Memory), ReRAM (Resistive RAM), FeRAM (ferroelectric RAM) and flash memory (NAND flash)), semiconductor light emitting devices (including LED, mini LED, micro LED, etc.), power devices, analog ICs (DC-AC converters and such as insulated gate bipolar transistors (IGBTs), MEMS (such as acceleration sensors, pressure sensors, vibrators, and giro sensors), wire-free devices (such as GPS, FM, NFC, RFEM, MMIC, and WLAN), discrete devices, Includes BSI, CIS, Camera Module, CMOS, Passive Device, GAW Filter, RF Filter, RF IPD, APE and BB.
전술한 바와 같이, 본 발명의 바람직한 실시 예를 참조하여 설명하였지만, 해당 기술분야의 통상의 기술자는 하기의 특허 청구범위에 기재된 본 발명의 사상 및 영역으로부터 벗어나지 않는 범위 내에서 본 발명을 다양하게 수정 또는 변형하여 실시할 수 있다.As described above, although it has been described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify the present invention within the scope not departing from the spirit and scope of the present invention described in the claims below. Or it can be carried out by modifying.
[부호의 설명][Description of code]
100: 전기 전도성 접촉핀 100: electrically conductive contact pin
110: 제1플런저110: first plunger
120: 제2플런저120: second plunger
130: 탄성부130: elastic part
140: 지지부 140: support
TM:탄성밀착부TM: elastic contact part

Claims (12)

  1. 가이드 플레이트의 가이드 구멍에 삽입되어 설치되는 전기 전도성 접촉핀에 있어서,In the electrically conductive contact pin inserted into the guide hole of the guide plate and installed,
    상기 전기 전도성 접촉핀의 제1단부측에 위치하며 그 단부가 제1접점이 되는 제1플런저;a first plunger located on the side of the first end of the electrically conductive contact pin, the end of which serves as a first contact;
    상기 전기 전도성 접촉핀의 제2단부측에 위치하며 그 단부가 제2접점이 되는 제2 플런저;a second plunger located on the side of the second end of the electrically conductive contact pin, the end of which serves as a second contact;
    상기 제1플런저와 상기 제2플런저가 상기 전기 전도성 접촉핀의 길이방향으로 탄력적으로 변위되도록 하는 탄성부; an elastic part for allowing the first plunger and the second plunger to be elastically displaced in the longitudinal direction of the electrically conductive contact pin;
    상기 탄성부가 상기 전기 전도성 접촉핀의 길이방향으로 압축 및 신장되도록 안내하며, 상기 탄성부가 압축되면서 좌굴되는 것을 방지하도록 상기 전기 전도성 접촉핀의 길이 방향을 따라 상기 탄성부의 외측에 구비되는 지지부; 및a support portion provided outside the elastic portion along the longitudinal direction of the electrically conductive contact pin to guide the elastic portion to be compressed and stretched in the longitudinal direction of the electrically conductive contact pin and to prevent the elastic portion from buckling while being compressed; and
    상기 지지부로부터 상기 전기 전도성 접촉핀의 폭 방향 외측으로 연장되되 상기 가이드 구멍의 측벽에 탄력적으로 지지되어, 상기 탄성부의 압축 및 신장 방향과 수직한 방향으로 작용하는 복원력을 상기 가이드 구멍의 측벽에 유발하여 상기 전기 전도성 접촉핀이 자중에 의해 낙하되지 않도록 하는 탄성밀착부;를 포함하는, 전기 전도성 접촉핀.It extends from the support part to the outside in the width direction of the electrically conductive contact pin and is elastically supported by the sidewall of the guide hole, causing a restoring force acting in a direction perpendicular to the direction of compression and extension of the elastic part on the sidewall of the guide hole. An electrically conductive contact pin comprising an elastic contact portion preventing the electrically conductive contact pin from falling due to its own weight.
  2. 제1항에 있어서According to claim 1
    상기 탄성부는,The elastic part,
    상기 제1플런저에 연결되는 제1탄성부;a first elastic part connected to the first plunger;
    상기 제2플런저에 연결되는 제2탄성부; 및a second elastic part connected to the second plunger; and
    상기 제1탄성부와 상기 제2탄성부 사이에서 상기 제1탄성부 및 상기 제2탄성부와 연결되고 상기 지지부와 일체로 구비되는 중간 고정부;를 포함하고,Including; an intermediate fixing part connected to the first elastic part and the second elastic part between the first elastic part and the second elastic part and provided integrally with the support part,
    상기 전기 전도성 접촉핀의 길이방향으로 상기 탄성밀착부의 적어도 일단부의 위치는 상기 중간 고정부의 위치와 일치하여 상기 중간 고정부와 연결되는, 전기 전도성 접촉핀.A position of at least one end of the elastic contact portion in the longitudinal direction of the electrically conductive contact pin coincides with a position of the intermediate fixing portion and is connected to the intermediate fixing portion.
  3. 제1항에 있어서,According to claim 1,
    상기 탄성밀착부의 일단은 상기 지지부에 연결되고,One end of the elastic contact portion is connected to the support portion,
    상기 탄성밀착부의 타단은 자유단인, 전기 전도성 접촉핀.The electrically conductive contact pin, wherein the other end of the elastic contact portion is a free end.
  4. 제1항에 있어서,According to claim 1,
    상기 탄성밀착부의 일단 및 타단은 상기 지지부에 연결되고,One end and the other end of the elastic contact part are connected to the support part,
    상기 탄성밀착부의 일단 및 타단 사이는 상기 가이드 구멍 방향으로 만곡되어 형성되는, 전기 전도성 접촉핀.An electrically conductive contact pin formed by bending in the direction of the guide hole between one end and the other end of the elastic contact part.
  5. 제1항에 있어서,According to claim 1,
    상기 지지부는 상기 탄성부의 좌측에 구비되는 제1지지부와 상기 탄성부의 우측에 구비되는 제2지지부를 포함하고,The support part includes a first support part provided on the left side of the elastic part and a second support part provided on the right side of the elastic part,
    상기 탄성밀착부는 상기 제1지지부의 좌측에 구비되는 제1탄성밀착부와 상기 제2지지부의 우측에 구비되는 제2탄성밀착부를 포함하고, The elastic contact part includes a first elastic contact part provided on the left side of the first support part and a second elastic contact part provided on the right side of the second support part,
    상기 탄성부는, 상기 제1플런저에 연결되는 제1탄성부; 상기 제2플런저에 연결되는 제2탄성부; 및 상기 제1탄성부와 상기 제2탄성부 사이에서 상기 제1탄성부 및 상기 제2탄성부와 연결되고 상기 지지부와 일체로 구비되는 중간 고정부;를 포함하고,The elastic part may include a first elastic part connected to the first plunger; a second elastic part connected to the second plunger; And an intermediate fixing part connected to the first elastic part and the second elastic part between the first elastic part and the second elastic part and provided integrally with the support part;
    상기 제1탄성밀착부와 상기 제2탄성밀착부 사이에 상기 중간 고정부가 구비되는, 전기 전도성 접촉핀. The electrically conductive contact pin of claim 1 , wherein the intermediate fixing portion is provided between the first elastic contact portion and the second elastic contact portion.
  6. 1항에 있어서,According to claim 1,
    상기 제1플런저, 상기 제2플런저, 상기 탄성부 및 상기 지지부는 복수개의 금속층이 적층되어 구비되고,The first plunger, the second plunger, the elastic part, and the support part are provided by stacking a plurality of metal layers,
    상기 탄성밀착부는 단일의 금속층으로 구비되는, 전기 전도성 접촉핀.The electrically conductive contact pin, wherein the elastic contact portion is provided with a single metal layer.
  7. 제1항에 있어서,According to claim 1,
    상기 탄성밀착부은, 일단에서 타단이 이르기까지 굴곡되지 않고 일직선으로 구성되는, 전기 전도성 접촉핀.The electrically conductive contact pin, wherein the elastic contact portion is formed in a straight line without bending from one end to the other end.
  8. 제1항에 있어서,According to claim 1,
    상기 탄성 밀착부의 일단과 타단 사이에서 폭 방향으로 볼록한 형태로 형성되되 일단 및 타단이 모두 상기 지지부에 연결되는, 전기 전도성 접촉핀.An electrically conductive contact pin formed in a convex shape in the width direction between one end and the other end of the elastic contact part, and both one end and the other end connected to the support part.
  9. 제1항에 있어서,According to claim 1,
    상기 탄성밀착부는, 일단과 타단 사이에서 폭 방향으로 볼록한 형태로 형성되되 일단 및 타단이 모두 상기 지지부에 연결되고 볼록부가 적어도 2개 형성되는, 전기 전도성 접촉핀. The electrically conductive contact pin of claim 1 , wherein the elastic contact portion is formed in a convex shape in the width direction between one end and the other end, and both one end and the other end are connected to the support part and at least two convex parts are formed.
  10. 제1항에 있어서,According to claim 1,
    상기 제1플런저는 상부에 위치하는 접속 대상물과 접촉되고, 상기 제2플런저는 하부에 위치하는 접속 대상물과 접촉되며,The first plunger is in contact with a connection object positioned at the top, and the second plunger is in contact with a connection object positioned at the bottom,
    상기 전기 전도성 접촉핀이 상부에 위치하는 접속 대상물과 하부에 위치하는 접속 대상물에 의해 길이 방향으로 가압되면, 상기 탄성부는 길이 방향으로 압축 변형을 하고 상기 탄성부의 길이 방향의 압축 변형을 통해 접속 대상물의 가압력은 감쇠되어 상기 탄성밀착부의 마찰력에 전달되는, 전기 전도성 접촉핀.When the electrically conductive contact pin is pressed in the longitudinal direction by a connection object positioned at the top and a connection object positioned at the bottom, the elastic portion compressively deforms in the longitudinal direction, and through the compressive deformation in the longitudinal direction of the elastic portion, the object to be connected The electrically conductive contact pin, wherein the pressing force is attenuated and transmitted to the frictional force of the elastic contact portion.
  11. 가이드 구멍이 형성된 가이드 플레이트; 및a guide plate having guide holes; and
    상기 가이드 플레이트의 가이드 구멍에 삽입되어 상기 가이드 플레이트에 설치되는 전기 전도성 접촉핀;을 포함하되, 상기 전기 전도성 접촉핀은, An electrically conductive contact pin inserted into a guide hole of the guide plate and installed in the guide plate, wherein the electrically conductive contact pin,
    상기 전기 전도성 접촉핀의 제1단부측에 위치하며 그 단부가 제1접점이 되는 제1플런저;a first plunger located on the side of the first end of the electrically conductive contact pin, the end of which serves as a first contact;
    상기 전기 전도성 접촉핀의 제2단부측에 위치하며 그 단부가 제2접점이 되는 제2 플런저;a second plunger located on the side of the second end of the electrically conductive contact pin, the end of which serves as a second contact;
    상기 제1플런저와 상기 제2플런저가 상기 전기 전도성 접촉핀의 길이방향으로 탄력적으로 변위되도록 하는 탄성부; an elastic part for allowing the first plunger and the second plunger to be elastically displaced in the longitudinal direction of the electrically conductive contact pin;
    상기 탄성부가 상기 전기 전도성 접촉핀의 길이방향으로 압축 및 신장되도록 안내하며, 상기 탄성부가 압축되면서 좌굴되는 것을 방지하도록 상기 전기 전도성 접촉핀의 길이 방향을 따라 상기 탄성부의 외측에 구비되는 지지부; 및a support portion provided outside the elastic portion along the longitudinal direction of the electrically conductive contact pin to guide the elastic portion to be compressed and stretched in the longitudinal direction of the electrically conductive contact pin and to prevent the elastic portion from buckling while being compressed; and
    상기 지지부로부터 상기 전기 전도성 접촉핀의 폭 방향 외측으로 연장되되 상기 가이드 구멍의 측벽에 탄력적으로 지지되어, 상기 탄성부의 압축 및 신장 방향과 수직한 방향으로 작용하는 복원력을 상기 가이드 구멍의 측벽에 유발하여 상기 전기 전도성 접촉핀이 자중에 의해 낙하되지 않도록 하는 탄성밀착부;를 포함하는, 검사장치.It extends from the support part to the outside in the width direction of the electrically conductive contact pin and is elastically supported on the side wall of the guide hole, causing a restoring force acting in a direction perpendicular to the direction of compression and extension of the elastic part on the side wall of the guide hole. and an elastic contact portion preventing the electrically conductive contact pin from falling due to its own weight.
  12. 제11항에 있어서,According to claim 11,
    상기 가이드 플레이트는,The guide plate,
    상부 가이드 플레이트; 및upper guide plate; and
    상기 상부 가이드 플레이트와 이격되어 배치되는 하부 가이드 플레이트를 포함하고,Including a lower guide plate disposed spaced apart from the upper guide plate,
    상기 탄성밀착부는 상기 상부 가이드 플레이트 및 상기 하부 가이드 플레이트 중 적어도 어느 하나의 가이드 구멍의 위치에 대응되는 위치에 구비되는, 검사장치.The elastic contact portion is provided at a position corresponding to a position of a guide hole of at least one of the upper guide plate and the lower guide plate.
PCT/KR2022/015028 2021-10-07 2022-10-06 Electrically conductive contact pin and inspection device having same WO2023059084A1 (en)

Applications Claiming Priority (2)

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KR10-2021-0133306 2021-10-07
KR1020210133306A KR20230050057A (en) 2021-10-07 2021-10-07 The Electro-conductive Contact Pin and Test Device Having The Same

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150020500A (en) * 2013-08-13 2015-02-26 주식회사 기가레인 Method for testing electrode circuit pin and electrode circuit testing pin using the same
JP2018009790A (en) * 2016-07-11 2018-01-18 アルプス電気株式会社 Spring contact and socket using the same
KR20180095315A (en) * 2017-02-17 2018-08-27 (주) 루켄테크놀러지스 Probe pin and manufacturing method thereof
KR102145398B1 (en) * 2020-07-09 2020-08-19 피엠피(주) Vertical probe pin and probe card with the same
KR20200104061A (en) * 2019-02-26 2020-09-03 (주)포인트엔지니어링 Guide plate for probe card and probe card having the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101913355B1 (en) 2017-09-19 2018-12-28 윌테크놀러지(주) Needle unit for vertical probe card with

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150020500A (en) * 2013-08-13 2015-02-26 주식회사 기가레인 Method for testing electrode circuit pin and electrode circuit testing pin using the same
JP2018009790A (en) * 2016-07-11 2018-01-18 アルプス電気株式会社 Spring contact and socket using the same
KR20180095315A (en) * 2017-02-17 2018-08-27 (주) 루켄테크놀러지스 Probe pin and manufacturing method thereof
KR20200104061A (en) * 2019-02-26 2020-09-03 (주)포인트엔지니어링 Guide plate for probe card and probe card having the same
KR102145398B1 (en) * 2020-07-09 2020-08-19 피엠피(주) Vertical probe pin and probe card with the same

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