WO2023002861A1 - Heating device - Google Patents

Heating device Download PDF

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Publication number
WO2023002861A1
WO2023002861A1 PCT/JP2022/027009 JP2022027009W WO2023002861A1 WO 2023002861 A1 WO2023002861 A1 WO 2023002861A1 JP 2022027009 W JP2022027009 W JP 2022027009W WO 2023002861 A1 WO2023002861 A1 WO 2023002861A1
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WO
WIPO (PCT)
Prior art keywords
electrode
heating
metal plate
collective
heating device
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PCT/JP2022/027009
Other languages
French (fr)
Japanese (ja)
Inventor
浩幸 前田
Original Assignee
京セラ株式会社
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Publication date
Application filed by 京セラ株式会社 filed Critical 京セラ株式会社
Priority to JP2023536689A priority Critical patent/JPWO2023002861A1/ja
Publication of WO2023002861A1 publication Critical patent/WO2023002861A1/en

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/03—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater

Definitions

  • the disclosed embodiments relate to heating devices.
  • Patent Document 1 discloses a heating device in which a heat insulating material is provided on substantially the entire back surface of the heating plate (the surface located on the opposite side of the heating surface) in order to prevent heat dissipation from the heating plate ( See Patent Document 1).
  • a heating device includes a heating plate, a plurality of heaters, and a collective electrode.
  • the heating plate has a heating surface and a plurality of recesses opposite the heating surface.
  • a plurality of heaters are positioned in the plurality of recesses, respectively, and are connected to lead electrodes, respectively.
  • a collective electrode is connected to two or more lead electrodes.
  • FIG. 1 is a side view of the heating device according to the embodiment viewed from the Y-axis negative direction.
  • FIG. 2 is a cross-sectional view of the heater according to the embodiment.
  • FIG. 3 is a plan view of the heating device according to the embodiment viewed from the Z-axis positive direction.
  • FIG. 4 is a cross-sectional view taken along line IV-IV shown in FIG.
  • FIG. 5 is a cross-sectional view taken along line VV shown in FIG.
  • FIG. 6 is a side view of the heating device according to the embodiment viewed from the negative direction of the X-axis.
  • FIG. 7 is a cross-sectional view taken along line VII--VII shown in FIG. FIG.
  • FIG. 8 is a side view of the heating device according to the embodiment viewed from the positive direction of the Y-axis.
  • FIG. 9 is a plan view of a plurality of cathode-side collective electrodes according to the embodiment, viewed from the Z-axis negative direction.
  • FIG. 10 is a cross-sectional view of a collective electrode on the anode side according to the first modified example.
  • FIG. 11 is a cross-sectional view of a collective electrode on the anode side according to the second modification.
  • FIG. 12 is a side view of a plurality of anode-side collective electrodes according to the third modification, viewed from the negative direction of the X-axis.
  • FIG. 13 is a side view of a heating device according to a fourth modification as seen from the Y-axis negative direction.
  • FIG. 14 is a side view of a heating device according to a fifth modified example viewed from the negative direction of the X-axis.
  • the cartridge heater has a temperature distribution in the longitudinal direction. For this reason, in a configuration that prevents heat dissipation by using a heat insulating material as in the technique described in Patent Document 1, there is a difference between the temperature of the metal plate near the central portion of the heat insulating material and the temperature of the metal plate near the outer peripheral portion. It was difficult to make the temperature of the metal plate uniform.
  • the heat generated in a plurality of cartridge heaters may dissipate separately from the lead electrodes of the cartridge heaters, causing the temperature of the metal plate to become non-uniform.
  • FIG. 1 is a side view of the heating device 100 according to the embodiment viewed from the Y-axis negative direction.
  • the surface located on the side of the object to be heated is defined as the "upper surface”
  • the surface located on the opposite side of the object to be heated is defined as the "lower surface”.
  • the heating device 100 is not limited to this, and may be used upside down, for example, or may be used in an arbitrary posture.
  • the heating device 100 shown in FIG. 1 has a heating plate 110, a fixed plate 120, a plurality of heaters 130, and a support plate 150.
  • the heating device 100 also has a plurality of anode-side collective electrodes 160 and a plurality of cathode-side collective electrodes 170 .
  • the anode-side collective electrode 160 and the cathode-side collective electrode 170 are examples of collective electrodes.
  • the heating plate 110 is, for example, a plate-like member made of metal.
  • the heating plate 110 has an upper surface 110a that can come into contact with an object to be heated. That is, the upper surface 110a of the heating plate 110 serves as a heating surface for heating the object to be heated.
  • the upper surface 110a is used, for example, for heating a mold as an example of an object to be heated.
  • a plurality of recesses 113 into which the plurality of heaters 130 are respectively inserted are positioned on a lower surface 110b (an example of the opposite surface) of the heating plate 110 opposite to the heating surface.
  • the plurality of heaters 130 are inserted into the plurality of recesses 113 respectively.
  • the plurality of heaters 130 are positioned in the plurality of recesses 113 respectively.
  • the plurality of heaters 130 are arranged so as to be perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface.
  • the heater 130 has a temperature distribution in the longitudinal direction.
  • FIG. 2 is a cross-sectional view of the heater 130 according to the embodiment.
  • the heater 130 has a heater main body 131, a fixing member 132, an anode side lead electrode 133, and a cathode side lead electrode .
  • the anode-side lead electrode 133 and the cathode-side lead electrode 134 are examples of lead electrodes.
  • the heater body 131 is a ceramic heater.
  • the heater main body 131 has a heating resistor 131a inside a ceramic body.
  • seizure between the heating plate 110 and the heater main body 131, which are made of metal, can be suppressed. Therefore, for example, the problem that the heater main body 131 is seized to the heating plate 110 and the heater 130 cannot be replaced is less likely to occur.
  • the length of the heater main body 131 that is, the length of the ceramic body can be, for example, about 1 mm or more and 200 mm or less.
  • the outer dimensions of the ceramic body can be, for example, about 0.5 mm or more and 100 mm or less.
  • the shape of the heater main body 131 that is, the shape of the ceramic body is cylindrical, for example.
  • the shape of the heater main body 131 is not limited to the columnar shape, and may be, for example, an elliptical columnar shape or a prismatic shape.
  • the material of the ceramic body is, for example, ceramic having insulating properties.
  • oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used as the material of the ceramic body.
  • the heating resistor 131a is a member that generates heat when current flows. One end of the heating resistor 131a is connected to a coil portion 133a of an anode-side lead electrode 133, which will be described later. The other end of the heating resistor 131a is connected to a coil portion 134a of a cathode-side lead electrode 134, which will be described later.
  • the heating resistor 131a may include, for example, a high-resistance conductor containing tungsten, molybdenum, or the like.
  • the dimensions of the heating resistor 131a can be, for example, a width of 0.1 mm or more and 5 mm or less, a thickness of 0.05 mm or more and 0.3 mm or less, and a total length of 1 mm or more and 500 mm or less.
  • the heating resistor 131a may be made of conductive ceramics containing, for example, tungsten carbide. In this case, the difference in thermal expansion between the ceramic body and the heating resistor 131a can be reduced. Thereby, the thermal stress between the ceramic body and the heating resistor 131a can be reduced. As a result, durability of the heater body 131 can be enhanced.
  • the fixing member 132 has a tubular shape surrounding the peripheral surface of the heater main body 131 .
  • the fixing member 132 has, for example, a first member 132a and a second member 132b.
  • a male screw 132c is located on the outer peripheral surface of the first member 132a.
  • the material of the first member 132a is, for example, a metal material having heat resistance.
  • a material of the fixing member 132 for example, an alloy containing Fe or Ni can be used.
  • the fixing member 132 can be made of stainless steel, Fe--Ni--Co alloy, Ni-based heat-resistant alloy, or the like.
  • the second member 132b is positioned between the first member 132a and the coil portion 134a of the lead electrode 134 on the cathode side.
  • the material of the second member 132b is, for example, insulating ceramics.
  • the material of the second member 132b may be, for example, alumina or silicon nitride.
  • the anode-side lead electrode 133 and the cathode-side lead electrode 134 are fixed to the peripheral surface of the heater main body 131 .
  • One end of the anode-side lead electrode 133 is connected to an external power supply via an anode-side collective electrode 160, which will be described later, and the other end is electrically connected to the heating resistor 131a.
  • One end of the cathode-side lead electrode 134 is connected to an external power supply via a cathode-side collective electrode 170, which will be described later, and the other end is electrically connected to the heating resistor 131a.
  • the anode-side lead electrode 133 and the cathode-side lead electrode 134 are, for example, wires containing metal materials such as nickel, iron, or nickel-based heat-resistant alloys.
  • the cross sections of the anode-side lead electrode 133 and the cathode-side lead electrode 134 may be circular, elliptical, or rectangular, for example.
  • the outer diameters of the anode-side lead electrode 133 and the cathode-side lead electrode 134 may be, for example, 0.5 mm or more and 2.0 mm or less.
  • the anode-side lead electrode 133 has a coil portion 133a and a terminal portion 133b.
  • the coil portion 133a is a portion of the anode-side lead electrode 133 that is spirally wound along the peripheral surface of the heater body 131, and is electrically connected to one end of the heating resistor 131a.
  • the terminal portion 133b is a portion of the anode-side lead electrode 133 that is drawn out of the heater main body 131 from the coil portion 133a.
  • the terminal portion 133b extends outward in the longitudinal direction of the heater main body 131 (here, in the Z-axis negative direction) from the rear end of the heater main body 131 .
  • the cathode-side lead electrode 134 has a coil portion 134a and a terminal portion 134b.
  • the coil portion 134a is a portion spirally wound along the peripheral surface of the heater main body 131, and is electrically connected to the other end of the heating resistor 131a.
  • the terminal portion 134b is a portion of the cathode-side lead electrode 134 that is pulled out from the coil portion 134a.
  • the terminal portion 134b extends radially outward of the heater main body 131 (here, in the positive Y-axis direction) from the peripheral surface of the heater main body 131 .
  • the lead electrodes (anode side lead electrode 133 and cathode side lead electrode 134) of the heater 130 are drawn out from the coil portions 133a and 134a located along the peripheral surface of the heater main body 131 and the coil portions 133a and 134a. and terminal portions 133b and 134b.
  • the coil portions 133a and 134a function as springs, so stress is less likely to concentrate. Therefore, the heater 130 configured in this way has high durability.
  • the anode-side lead electrode 133 is positioned closer to the rear end side of the heater main body 131 than the cathode-side lead electrode 134 has been described, but the positions of the anode-side lead electrode 133 and the cathode-side lead electrode 134 are different.
  • the relationship may be reversed. That is, the lead electrode provided at the position of the anode lead electrode 133 shown in FIG. 2 may be the cathode lead electrode 134 . Moreover, the lead electrode provided at the position of the cathode side lead electrode 134 shown in FIG. 2 may be the anode side lead electrode 133 .
  • FIG. 3 is a plan view of the heating device 100 according to the embodiment viewed from the Z-axis positive direction.
  • the upper surface 110a of the heating plate 110 which is the heating surface, is shown in the shape of a rectangular plate, and the positions of the plurality of recesses 113 are indicated by dashed lines.
  • the plurality of recesses 113 shown in FIG. 3 are arranged in 6 rows and 6 columns. That is, the heating plate 110 according to the embodiment has a total of 36 recesses 113 . Note that the arrangement and number of the plurality of recesses 113 are not limited to the illustrated example.
  • the fixed plate 120 is, for example, a plate-like member made of metal, and is arranged apart from the heating plate 110 .
  • a plurality of heaters 130 that are respectively inserted into the plurality of recesses 113 are fixed to the fixed plate 120 . How the heater 130 is fixed to the fixing plate 120 will be described later.
  • the support plate 150 is fixed to the fixed plate 120 by a plurality of columnar members 151 while being separated from the fixed plate 120 .
  • a space for arranging the terminal portions 133b and 134b of each heater 130, in other words, an anode-side collective electrode 160 and a cathode-side collective electrode 170, which will be described later, are arranged. A space for this can be secured between the support plate 150 and the fixing plate 120 .
  • the support plate 150 and the plurality of columnar members 151 may be omitted as necessary.
  • FIG. 4 is a cross-sectional view along line IV-IV shown in FIG. 5 is a cross-sectional view taken along line VV shown in FIG. 4 and 5, illustration of the support plate 150 and the plurality of columnar members 151 is omitted.
  • the heating device 100 is configured by a plurality of heaters 130 fixed to a fixed plate 120 and inserted into a plurality of recesses 113 of a heating plate 110, respectively.
  • the heating plate 110 has a first plate member 111 and a second plate member 112 .
  • the first plate member 111 is a plate member having an upper surface 110a of the heating plate 110, which is a heating surface.
  • the first plate member 111 is joined to the second plate member 112 by fixing members 114 such as bolts. That is, the lower surface 111a of the first plate member 111 opposite to the upper surface 110a is a joint surface to which the second plate member 112 is joined.
  • the second plate member 112 is a plate-shaped member having an upper surface 112a that serves as a surface to be joined that is joined to the joint surface of the first plate member 111, and a lower surface 110b located on the opposite side of the upper surface 112a.
  • a plurality of through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the first plate member 111 is exposed from each of the plurality of through holes 112b.
  • Each of the plurality of recesses 113 is formed by each of the plurality of through holes 112b and the lower surface 111a of the first plate member 111 exposed from each of the plurality of through holes 112b. That is, the inner wall surface of each through hole 112b forms the inner side surface of each recess 113, and the lower surface 111a of the first plate member 111 forms the bottom surface of each recess 113 (ceiling surface in the posture shown in FIG. 5).
  • the fixing plate 120 is separated from the heating plate 110 by being connected to the heating plate 110 by a connecting member 121 such as a bolt with a gap formed between the fixing plate 120 and the heating plate 110 . It is By arranging the fixed plate 120 apart from the heating plate 110, it is possible to suppress the temperature rise of the fixing portions (for example, fixing holes 120a described later) of the plurality of heaters 130 with respect to the fixed plate 120. FIG. On the other hand, since the heat taken from the heating plate 110 by the fixing plate 120 is reduced, the temperature rise of the heating plate 110 can be accelerated.
  • the fixing plate 120 has a plurality of fixing holes 120 a at positions corresponding to the plurality of recesses 113 .
  • a plurality of heaters 130 are respectively inserted and fixed to the plurality of fixing holes 120a.
  • the plurality of recesses 113, the plurality of fixing holes 120a, and the plurality of heaters 130 will be simply referred to as “recesses 113,” “fixing holes 120a,” and “heaters 130,” respectively, when there is no particular need to distinguish them. call.
  • a heater main body 131 of the heater 130 penetrates through the fixing hole 120 a and its tip is inserted into the recess 113 .
  • the base end of the heater main body 131 protrudes in a direction away from the upper surface 110a of the heating plate 110, which is the heating surface, rather than the lower surface of the fixed plate 120.
  • the anode lead electrode 133 and the cathode lead electrode 134 are positioned at the proximal end of the heater main body 131 .
  • the anode lead electrode 133 and the cathode lead electrode 134 are separated from the heating surface.
  • the side lead electrodes 134 can be kept away. Therefore, according to such a configuration, heat transfer to the anode side lead electrode 133 and the cathode side lead electrode 134 can be suppressed.
  • a fixing member 132 of the heater 130 fixes the heater main body 131 to the fixing hole 120a with a gap between it and the inner wall of the fixing hole 120a.
  • a female screw is formed in a portion of the inner wall of the fixing hole 120a located on the side opposite to the heating plate 110 .
  • the fixing member 132 has an external thread 132c on the outer peripheral portion of the first member 132a.
  • the fixing plate 120 Since the heater main body 131 is thus fixed to the fixing hole 120a with a gap between it and the inner wall of the fixing hole 120a, the fixing plate 120 is less likely to receive heat from the heater main body 131. As a result, the temperature rise of the fixing plate 120 is suppressed, so that the heat radiated from the fixing plate 120 toward the proximal end portion of the heater main body 131 where the anode lead electrode 133 and the cathode lead electrode 134 are provided is reduced. Suppressed. Therefore, according to the heating device 100 according to the embodiment, the deterioration of the anode lead electrode 133 and the cathode lead electrode 134 in the heater 130 can be reduced.
  • a spacer member 140 is arranged between the heating plate 110 and the fixed plate 120 .
  • the spacer member 140 has a tubular shape, and the connecting member 121 is inserted therethrough.
  • the material of the spacer member 140 is preferably heat-resistant ceramic, for example.
  • a material of the spacer member 140 for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. As a result, thermal expansion and thermal contraction of the spacer member 140 can be reduced, and wear of the spacer member 140 can be reduced.
  • the anode collective electrode 160 is electrically connected to the anode lead electrodes 133 of the plurality of heaters 130 .
  • the heating device 100 has 36 heaters 130, and the anode-side collective electrode 160 is connected to the anode-side lead electrodes 133 of the 6 heaters 130 arranged in a line among the 36 heaters 130. is electrically connected to The heating device 100 has a total of six anode-side collective electrodes 160 (see FIG. 7).
  • the cathode-side collective electrode 170 is electrically connected to the cathode-side lead electrodes 134 of the plurality of heaters 130 .
  • the heating device 100 has 36 heaters 130, and the cathode-side collective electrode 170 is connected to the cathode-side lead electrodes 134 of the 6 heaters 130 arranged in a line among the 36 heaters 130. is electrically connected to The heating device 100 has a total of six cathode-side collective electrodes 170 (see FIG. 9).
  • the heating device 100 has the anode-side collective electrode 160 connected to two or more anode-side lead electrodes 133 of two or more heaters 130 among the plurality of heaters 130 of the heating device 100. Moreover, the heating device 100 according to the embodiment has a cathode-side collective electrode 170 connected to two or more cathode-side lead electrodes 134 of two or more heaters 130 among the plurality of heaters 130 of the heating device 100 .
  • the heat generated by a plurality of (here, six) heaters 130 is transferred to one collective electrode via lead electrodes.
  • the heat generated in each heater 130 can be prevented from dissipating separately from the lead electrodes of each heater 130 . Therefore, according to the heating device 100 according to the embodiment, uniformity of heat can be improved.
  • FIG. 6 is a side view of the heating device 100 according to the embodiment viewed from the negative direction of the X-axis.
  • FIG. 7 is a cross-sectional view taken along line VII--VII shown in FIG.
  • FIG. 8 is a side view of the heating device 100 according to the embodiment viewed from the positive Y-axis direction.
  • FIG. 9 is a plan view of a plurality of cathode-side collective electrodes 170 according to the embodiment, viewed from the Z-axis negative direction.
  • the anode-side collective electrode 160 has a first metal plate 161, a second metal plate 162, and a plurality of fixing members 163.
  • the first metal plate 161 and the second metal plate 162 are metal plate members having a rectangular cross-sectional view.
  • the fixing member 163 detachably fixes the first metal plate 161 and the second metal plate 162 .
  • Fixing member 163 is, for example, a bolt.
  • the anode collective electrode 160 is electrically connected to the anode lead electrodes 133 by sandwiching the terminal portions 133b of the anode lead electrodes 133 between the first metal plate 161 and the second metal plate 162. .
  • the first metal plate 161 and the second metal plate 162 extend along the X-axis direction, and a plurality of (here, six) arranged along the X-axis direction. ) is sandwiched therebetween.
  • the fixing between the first metal plate 161 and the second metal plate 162 by the fixing member 163 can be released. Therefore, for example, when any one of the plurality of heaters 130 fails, only the failed heater can be replaced. Thus, according to the heating device 100 according to the embodiment, it is easy to replace the heater 130 .
  • a plurality of (here, six) anode-side collective electrodes 160 are arranged along the Y-axis direction.
  • the connecting positions of the anode-side collective electrodes 160 and the terminal portions 133 b overlap the upper surface 110 a of the heating plate 110 . ing.
  • the anode-side collective electrode 160 and the terminal portion 133b within the range of the heating region, for example, compared to the case where the anode-side collective electrode 160 and the terminal portion 133b are connected outside the heating region.
  • heat dissipation from each heater 130 to the outside of the heating device 100 can be suppressed. Therefore, according to the heating device 100 according to the embodiment, the heat uniformity can be further improved.
  • the cathode-side collective electrode 170 has a first metal plate 171, a second metal plate 172, and a plurality of fixing members 173.
  • the first metal plate 171 and the second metal plate 172 are metal plate materials having a rectangular cross-sectional view.
  • the fixing member 173 detachably fixes the first metal plate 171 and the second metal plate 172 .
  • Fixing member 173 is, for example, a bolt.
  • the cathode-side collective electrode 170 is electrically connected to the plurality of cathode-side lead electrodes 134 by sandwiching the terminal portions 134b of the plurality of cathode-side lead electrodes 134 between the first metal plate 171 and the second metal plate 172. .
  • the first metal plate 171 and the second metal plate 172 extend along the X-axis direction, and a plurality of (here, six) arranged along the X-axis direction. ) sandwiches the terminal portion 134b (see FIGS. 8 and 9).
  • the plurality of cathode-side lead electrodes 134 can be connected in a straight line, so that the plurality of cathode-side lead electrodes 134 can be connected in the shortest distance. Moreover, even if the length of the terminal portion 134b varies, the connection is easy.
  • the fixation of the first metal plate 171 and the second metal plate 172 by the fixing member 173 can be released, for example, if one of the plurality of heaters 130 fails, only the failed heater can be replaced. can be replaced.
  • the heating device 100 according to the embodiment it is easy to replace the heater 130 .
  • a plurality (here, six) of cathode-side collective electrodes 170 are arranged along the Y-axis direction.
  • the connecting positions of the cathode-side collective electrodes 170 and the terminal portions 134b are located on the upper surface 110a of the heating plate 110. overlaps with
  • the cathode-side collective electrode 170 and the terminal portion 134b within the range of the heating region, for example, compared to the case of connecting the cathode-side collective electrode 170 and the terminal portion 134b outside the heating region.
  • the heat uniformity can be further improved.
  • the heating device 100 since the heating device 100 according to the embodiment employs a configuration in which the lead electrode is sandwiched between two metal plates on both the anode side and the cathode side, the above configuration is employed only on one of the anode side and the cathode side. Heat uniformity can be further improved as compared with the case.
  • the anode-side collective electrode 160 and the cathode-side collective electrode 170 are parallel. With such a configuration, the direction of thermal expansion or thermal contraction of the anode-side collective electrode 160 is aligned with the direction of thermal expansion or thermal contraction of the cathode-side collective electrode 170, so stress in the shear direction is less likely to be applied to the heater 130. Become. Therefore, according to the heating device 100, durability of the plurality of heaters 130 can be enhanced.
  • FIG. 10 is a cross-sectional view of an anode-side collective electrode 160 according to a first modified example.
  • the first metal plate 161 of the anode-side collective electrode 160 has a concave portion 161a (an example of a first concave portion) on the surface facing the second metal plate 162 (an example of the first facing surface).
  • the second metal plate 162 of the anode-side collective electrode 160 may have a concave portion 162a (an example of a second concave portion) on the surface facing the first metal plate 161 (an example of the second facing surface).
  • the concave portions 161a and 162a have, for example, a groove shape extending along the extending direction of the terminal portion 133b (here, the Z-axis direction).
  • the anode-side collective electrode 160 may have recesses 161 a and 162 a in the first metal plate 161 and the second metal plate 162 .
  • the first metal plate 161 and the second metal plate 162 can function as springs.
  • the force that clamps the terminal portion 133b can be maintained for a long period of time.
  • the recess 161a of the first metal plate 161 and the recess 162a of the second metal plate 162 may face each other. With such a configuration, the force of the spring generated by the first metal plate 161 and the second metal plate 162 can be appropriately transmitted to each terminal portion 133b.
  • the recess 161a and the recess 162a do not necessarily have to face each other.
  • the anode-side collective electrode 160 may have recesses 161 a and 162 a only on one of the first metal plate 161 and the second metal plate 162 .
  • Plate 172 may also have similar recesses. That is, the first metal plate 171 of the cathode-side collective electrode 170 may have a concave portion on the surface facing the second metal plate 172 . Also, the second metal plate 172 of the cathode-side collective electrode 170 may have a concave portion on the surface facing the first metal plate 171 . Also, the concave portion of the first metal plate 171 and the concave portion of the second metal plate 172 may face each other.
  • FIG. 11 is a cross-sectional view of an anode-side collective electrode 160 according to a second modified example.
  • the anode-side collective electrode 160 has one metal plate 165, for example.
  • the metal plate 165 has a plurality of insertion holes 165a arranged along the longitudinal direction of the metal plate 165 (here, the X-axis direction).
  • the insertion hole 165 a is a through hole extending through the metal plate 165 along the extending direction of the terminal portion 133 b of the anode lead electrode 133 (here, the Z-axis direction).
  • the terminal portion 133b of the anode-side lead electrode 133 is inserted through each insertion hole 165a. In other words, the anode-side lead electrode 133 is located in the insertion hole 165a.
  • the metal plate 165 may have fixing holes 165b communicating with the insertion holes 165a for each of the plurality of insertion holes 165a.
  • a fixing member 166 for fixing the terminal portion 133b of the anode lead electrode 133 is inserted through the fixing hole 165b.
  • the fixing member 166 is, for example, a bolt, and a screw groove is formed on the inner surface of the fixing hole 165b.
  • the terminal portion 133b of the anode-side lead electrode 133 is sandwiched between the inner surface of the insertion hole 165a and the fixing member 166 inserted through the fixing hole 165b. As a result, the terminal portion 133 b is electrically connected to the anode-side collective electrode 160 .
  • the plurality of terminal portions 133b can be appropriately connected to the anode-side collective electrode 160.
  • the terminal portion 133b only needs to be in contact with at least the metal plate 165. Therefore, the metal plate 165 of the anode-side collective electrode 160 does not necessarily need to be provided with the fixing holes 165b and the fixing member 166 . In this case, for example, by making the diameter of insertion hole 165a slightly larger than that of terminal portion 133b, the contact between terminal portion 133b and fixing hole 165b can be enhanced. Alternatively, the metal plate 165 and the terminal portion 133b may be electrically connected by filling the insertion hole 165a with a brazing material, a solder material, or the like.
  • the cathode-side collective electrode 170 may have a metal plate with a plurality of through holes. Further, the cathode-side collective electrode 170 may have a fixing hole communicating with each of the plurality of through holes.
  • FIG. 12 is a side view of a plurality of anode-side collective electrodes 160 according to the third modification, viewed from the negative direction of the X-axis.
  • at least one of the plurality of anode-side collective electrodes 160 extends in a direction ( Here, the position in the Z-axis direction) may be different from that of other anode-side collective electrodes 160 .
  • the plurality of anode-side collective electrodes 160 can be arranged with higher density.
  • the heat dissipation of the plurality of anode-side collective electrodes 160 can be improved.
  • At least one of the plurality of cathode-side collective electrodes 170 is arranged in a direction (here, the Z-axis direction) may be different from the other cathode-side collecting electrodes 170 .
  • FIG. 13 is a side view of the heating device 100 according to the fourth modification as seen from the Y-axis negative direction.
  • at least one of the plurality of anode-side collective electrodes 160 (an example of an anisotropic collective electrode) has an inclination with respect to the upper surface 110 a (see FIG. 1 etc.), which is the heating surface of the heating plate 110 . may be different from the anode-side collective electrode 160 of .
  • the height positions of the anode-side collective electrodes 160 are shifted, so that the heat dissipation of the plurality of anode-side collective electrodes 160 can be improved.
  • the heating device 100 may have the inclinations of the plurality of cathode-side collective electrodes 170 varied. That is, at least one of the plurality of cathode-side collective electrodes 170 (an example of a different-tilt collective electrode) has an inclination with respect to the upper surface 110a (see FIG. 1 , etc.), which is the heating surface of the heating plate 110. The slope may be different from 170.
  • FIG. 14 is a side view of the heating device 100 according to the fifth modification as seen from the X-axis negative direction.
  • the extending directions of the anode-side collective electrode 160 and the cathode-side collective electrode 170 may be perpendicular to each other.
  • the example shown in FIG. 14 shows an example in which the anode-side collective electrode 160 extends along the Y-axis direction and the cathode-side collective electrode 170 extends along the X-axis direction.
  • heat diffusion in the X-axis direction and heat diffusion in the Y-axis direction can be made uniform.
  • heating device 110 heating plate 110a upper surface 110b lower surface 111 first plate member 111a lower surface 112 second plate member 112a upper surface 112b through hole 113 recess 114 joining member 120 fixing plate 120a fixing hole 121 connecting member 130 heater 131 heater body 131a heating resistor 131a tip 132 fixing member 132a first member 132b second member 133 anode side lead electrode 133a coil portion 133b terminal portion 134 cathode side lead electrode 134a coil portion 134b terminal portion 140 spacer member 150 support plate 151 columnar member 160 anode Side collective electrode 161 First metal plate 161a Recess 162 Second metal plate 162a Recess 163 Fixing member 165 Metal plate 165a Insertion hole 165b Fixing hole 166 Fixing member 170 Cathode collective electrode 171 First metal plate 172 Second metal plate 173 Fixing Element

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Abstract

A heating device (100) according to the present disclosure comprises a heating plate (110), a plurality of heaters (130), and collecting electrodes. The heating plate (110) has a heating surface (110a), and a plurality of recessed portions (113) positioned on the opposite side to the heating surface (110a). The plurality of heaters (130) are positioned respectively in the plurality of recessed portions (113), and are each connected to lead electrodes (133, 134). The collecting electrodes (160, 170) are connected to two or more of the lead electrodes (133, 134).

Description

加熱装置heating device
　開示の実施形態は、加熱装置に関する。 The disclosed embodiments relate to heating devices.
　従来、複数のカートリッジヒータが側面から挿入された加熱板を有し、かかる加熱板に対象物を接触させることによって対象物を加熱する加熱装置が知られている。特許文献１には、加熱板からの熱の散逸を防ぐために、加熱板の裏面（加熱面の反対側に位置する面）の略全面に断熱材が設けられた加熱装置が知られている（特許文献１参照）。 Conventionally, there has been known a heating device that has a heating plate into which a plurality of cartridge heaters are inserted from the side, and that heats an object by bringing the object into contact with the heating plate. Patent Document 1 discloses a heating device in which a heat insulating material is provided on substantially the entire back surface of the heating plate (the surface located on the opposite side of the heating surface) in order to prevent heat dissipation from the heating plate ( See Patent Document 1).
特開２０２１－００３８８５号公報JP 2021-003885 A
　実施形態の一態様による加熱装置は、加熱プレートと、複数のヒータと、集合電極と、を備える。加熱プレートは、加熱面と、該加熱面の反対側に位置する複数の凹部と、を有する。複数のヒータは、複数の凹部にそれぞれ位置しているとともに、それぞれリード電極に接続される。集合電極は、２以上のリード電極に接続される。 A heating device according to one aspect of an embodiment includes a heating plate, a plurality of heaters, and a collective electrode. The heating plate has a heating surface and a plurality of recesses opposite the heating surface. A plurality of heaters are positioned in the plurality of recesses, respectively, and are connected to lead electrodes, respectively. A collective electrode is connected to two or more lead electrodes.
図１は、実施形態に係る加熱装置をＹ軸負方向から見た側面図である。FIG. 1 is a side view of the heating device according to the embodiment viewed from the Y-axis negative direction. 図２は、実施形態に係るヒータの断面図である。FIG. 2 is a cross-sectional view of the heater according to the embodiment. 図３は、実施形態に係る加熱装置をＺ軸正方向から見た平面図である。FIG. 3 is a plan view of the heating device according to the embodiment viewed from the Z-axis positive direction. 図４は、図３に示すＩＶ－ＩＶ線における断面図である。FIG. 4 is a cross-sectional view taken along line IV-IV shown in FIG. 図５は、図３に示すＶ－Ｖ線における断面図である。FIG. 5 is a cross-sectional view taken along line VV shown in FIG. 図６は、実施形態に係る加熱装置をＸ軸負方向から見た側面図である。FIG. 6 is a side view of the heating device according to the embodiment viewed from the negative direction of the X-axis. 図７は、図６に示すＶＩＩ－ＶＩＩ線矢視における断面図である。FIG. 7 is a cross-sectional view taken along line VII--VII shown in FIG. 図８は、実施形態に係る加熱装置をＹ軸正方向から見た側面図である。FIG. 8 is a side view of the heating device according to the embodiment viewed from the positive direction of the Y-axis. 図９は、実施形態に係る複数の陰極側集合電極をＺ軸負方向から見た平面図である。FIG. 9 is a plan view of a plurality of cathode-side collective electrodes according to the embodiment, viewed from the Z-axis negative direction. 図１０は、第１変形例に係る陽極側集合電極の断面図である。FIG. 10 is a cross-sectional view of a collective electrode on the anode side according to the first modified example. 図１１は、第２変形例に係る陽極側集合電極の断面図である。FIG. 11 is a cross-sectional view of a collective electrode on the anode side according to the second modification. 図１２は、第３変形例に係る複数の陽極側集合電極をＸ軸負方向から見た側面図である。FIG. 12 is a side view of a plurality of anode-side collective electrodes according to the third modification, viewed from the negative direction of the X-axis. 図１３は、第４変形例に係る加熱装置をＹ軸負方向から見た側面図である。FIG. 13 is a side view of a heating device according to a fourth modification as seen from the Y-axis negative direction. 図１４は、第５変形例に係る加熱装置をＸ軸負方向から見た側面図である。FIG. 14 is a side view of a heating device according to a fifth modified example viewed from the negative direction of the X-axis.
　以下に、本開示による加熱装置を実施するための形態（以下、「実施形態」と記載する）について図面を参照しつつ詳細に説明する。なお、この実施形態により本開示による加熱装置が限定されるものではない。また、各実施形態は、処理内容を矛盾させない範囲で適宜組み合わせることが可能である。また、以下の各実施形態において同一の部位には同一の符号を付し、重複する説明は省略される。 Hereinafter, a form for implementing the heating device according to the present disclosure (hereinafter referred to as "embodiment") will be described in detail with reference to the drawings. Note that the heating device according to the present disclosure is not limited to this embodiment. Further, each embodiment can be appropriately combined within a range that does not contradict the processing contents. Also, in each of the following embodiments, the same parts are denoted by the same reference numerals, and overlapping descriptions are omitted.
　また、以下に示す実施形態では、「一定」、「直交」、「垂直」あるいは「平行」といった表現が用いられる場合があるが、これらの表現は、厳密に「一定」、「直交」、「垂直」あるいは「平行」であることを要しない。すなわち、上記した各表現は、たとえば製造精度、設置精度などのずれを許容するものとする。 Further, in the embodiments described below, expressions such as "constant", "perpendicular", "perpendicular" or "parallel" may be used, but these expressions are strictly "constant", "perpendicular", " It does not have to be "perpendicular" or "parallel". That is, each of the expressions described above allows deviations in, for example, manufacturing accuracy and installation accuracy.
　また、以下で参照する各図は、説明の便宜上の模式的なものである。したがって、細部は省略されることがあり、また、寸法比率は必ずしも現実のものとは一致していない。 In addition, each figure referred to below is a schematic for the convenience of explanation. Accordingly, details may be omitted, and dimensional proportions may not always match reality.
　また、以下参照する各図面では、説明を分かりやすくするために、互いに直交するＸ軸方向、Ｙ軸方向およびＺ軸方向を規定し、Ｚ軸正方向を鉛直上向き方向とする直交座標系を示す場合がある。 In addition, in each drawing referred to below, in order to make the explanation easier to understand, an orthogonal coordinate system is shown in which the X-axis direction, the Y-axis direction and the Z-axis direction that are orthogonal to each other are defined, and the Z-axis positive direction is the vertically upward direction. Sometimes.
　カートリッジヒータは、長手方向に温度分布が生じる。このため、特許文献１に記載の技術のように断熱材を用いて熱の散逸を防ぐ構成では、断熱材の中央部付近における金属板の温度と外周部付近における金属板の温度とに差が生じやすく、金属板の温度を均一にすることが難しかった。 The cartridge heater has a temperature distribution in the longitudinal direction. For this reason, in a configuration that prevents heat dissipation by using a heat insulating material as in the technique described in Patent Document 1, there is a difference between the temperature of the metal plate near the central portion of the heat insulating material and the temperature of the metal plate near the outer peripheral portion. It was difficult to make the temperature of the metal plate uniform.
　また、複数のカートリッジヒータにおいて発生した熱が各カートリッジヒータのリード電極からバラバラに散逸することで、金属板の温度が不均一化するおそれがあった。 In addition, the heat generated in a plurality of cartridge heaters may dissipate separately from the lead electrodes of the cartridge heaters, causing the temperature of the metal plate to become non-uniform.
　そこで、均熱性の向上を図ることができる加熱装置の提供が期待されている。 Therefore, it is expected to provide a heating device that can improve heat uniformity.
　図１は、実施形態に係る加熱装置１００をＹ軸負方向から見た側面図である。以下では、加熱装置１００を加熱対象物に接触させる際に加熱対象物側に位置する面が「上面」であり、加熱対象物とは反対側に位置する面が「下面」であるものとする。なお、これに限らず、加熱装置１００は、例えば上下反転して使用されてもよく、任意の姿勢で使用されてよい。 FIG. 1 is a side view of the heating device 100 according to the embodiment viewed from the Y-axis negative direction. Hereinafter, when the heating device 100 is brought into contact with the object to be heated, the surface located on the side of the object to be heated is defined as the "upper surface", and the surface located on the opposite side of the object to be heated is defined as the "lower surface". . Note that the heating device 100 is not limited to this, and may be used upside down, for example, or may be used in an arbitrary posture.
　図１に示す加熱装置１００は、加熱プレート１１０、固定プレート１２０、複数のヒータ１３０、及び支持プレート１５０を有する。また、加熱装置１００は、複数の陽極側集合電極１６０と、複数の陰極側集合電極１７０とを有する。陽極側集合電極１６０と、陰極側集合電極１７０とは、集合電極の一例である。 The heating device 100 shown in FIG. 1 has a heating plate 110, a fixed plate 120, a plurality of heaters 130, and a support plate 150. The heating device 100 also has a plurality of anode-side collective electrodes 160 and a plurality of cathode-side collective electrodes 170 . The anode-side collective electrode 160 and the cathode-side collective electrode 170 are examples of collective electrodes.
　加熱プレート１１０は、例えば金属製の板状部材である。加熱プレート１１０は、加熱対象物と接触可能な上面１１０ａを有する。すなわち、加熱プレート１１０の上面１１０ａが加熱対象物を加熱する加熱面となる。上面１１０ａは、例えば、加熱対象物の一例としての金型の加熱に用いられる。加熱プレート１１０の加熱面とは反対側の下面１１０ｂ（反対面の一例）には、複数のヒータ１３０がそれぞれ挿入される複数の凹部１１３（図３、図５等参照）が位置している。 The heating plate 110 is, for example, a plate-like member made of metal. The heating plate 110 has an upper surface 110a that can come into contact with an object to be heated. That is, the upper surface 110a of the heating plate 110 serves as a heating surface for heating the object to be heated. The upper surface 110a is used, for example, for heating a mold as an example of an object to be heated. A plurality of recesses 113 (see FIGS. 3, 5, etc.) into which the plurality of heaters 130 are respectively inserted are positioned on a lower surface 110b (an example of the opposite surface) of the heating plate 110 opposite to the heating surface.
　複数のヒータ１３０は、複数の凹部１１３にそれぞれ挿入される。言い換えれば、複数のヒータ１３０は、複数の凹部１１３にそれぞれ位置する。これにより、複数のヒータ１３０は、加熱面である加熱プレート１１０の上面１１０ａに対して垂直となるように配置される。このように、複数のヒータ１３０を加熱プレート１１０の加熱面に対して垂直に配置することにより、複数のヒータ１３０と加熱面との間の距離のばらつきが抑制されることから、加熱面の面内での均熱性を向上させることができる。また、ヒータ１３０は、長手方向に温度分布が生じる。これに対し、複数のヒータ１３０を加熱プレート１１０の加熱面に対して垂直に配置することにより、上面１１０ａの中央部と外周部とで、ヒータ１３０の温度分布に起因する温度差が生じることを抑制することができる。 The plurality of heaters 130 are inserted into the plurality of recesses 113 respectively. In other words, the plurality of heaters 130 are positioned in the plurality of recesses 113 respectively. Thereby, the plurality of heaters 130 are arranged so as to be perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface. By arranging the plurality of heaters 130 perpendicularly to the heating surface of the heating plate 110 in this way, variations in the distance between the plurality of heaters 130 and the heating surface are suppressed. It is possible to improve the uniformity of heat inside. Also, the heater 130 has a temperature distribution in the longitudinal direction. On the other hand, by arranging the plurality of heaters 130 perpendicular to the heating surface of the heating plate 110, it is possible to prevent the temperature difference caused by the temperature distribution of the heaters 130 from occurring between the central portion and the outer peripheral portion of the upper surface 110a. can be suppressed.
　ここで、ヒータ１３０の構成について図２を参照して説明する。図２は、実施形態に係るヒータ１３０の断面図である。 Here, the configuration of the heater 130 will be described with reference to FIG. FIG. 2 is a cross-sectional view of the heater 130 according to the embodiment.
　図２に示すように、実施形態に係るヒータ１３０は、ヒータ本体１３１と、固定部材１３２と、陽極側リード電極１３３と、陰極側リード電極１３４とを有する。陽極側リード電極１３３と、陰極側リード電極１３４とは、リード電極の一例である。 As shown in FIG. 2, the heater 130 according to the embodiment has a heater main body 131, a fixing member 132, an anode side lead electrode 133, and a cathode side lead electrode . The anode-side lead electrode 133 and the cathode-side lead electrode 134 are examples of lead electrodes.
　ヒータ本体１３１は、セラミックヒータである。ヒータ本体１３１は、セラミック体の内部に発熱抵抗体１３１ａを有する。ヒータ本体１３１をセラミックヒータとすることにより、金属製である加熱プレート１１０とヒータ本体１３１との間の焼き付きを抑制することができる。したがって、たとえば、ヒータ本体１３１が加熱プレート１１０に焼き付くことでヒータ１３０が交換できなくなるといった不具合が生じにくい。 The heater body 131 is a ceramic heater. The heater main body 131 has a heating resistor 131a inside a ceramic body. By using a ceramic heater for the heater main body 131, seizure between the heating plate 110 and the heater main body 131, which are made of metal, can be suppressed. Therefore, for example, the problem that the heater main body 131 is seized to the heating plate 110 and the heater 130 cannot be replaced is less likely to occur.
　ヒータ本体１３１の長さ、すなわちセラミック体の長さは、例えば、１ｍｍ以上２００ｍｍ以下程度とすることができる。また、セラミック体の外寸は、例えば、０．５ｍｍ以上１００ｍｍ以下程度とすることができる。 The length of the heater main body 131, that is, the length of the ceramic body can be, for example, about 1 mm or more and 200 mm or less. In addition, the outer dimensions of the ceramic body can be, for example, about 0.5 mm or more and 100 mm or less.
　ヒータ本体１３１の形状、すなわちセラミック体の形状は、たとえば円柱状である。なお、ヒータ本体１３１の形状は、円柱状に限らず、例えば楕円柱状または角柱状であってもよい。セラミック体の材料は、例えば、絶縁性を有するセラミックである。セラミック体の材料としては、例えば、酸化物セラミックス、窒化物セラミックスまたは炭化物セラミックス等を使用することができる。 The shape of the heater main body 131, that is, the shape of the ceramic body is cylindrical, for example. The shape of the heater main body 131 is not limited to the columnar shape, and may be, for example, an elliptical columnar shape or a prismatic shape. The material of the ceramic body is, for example, ceramic having insulating properties. As the material of the ceramic body, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used.
　発熱抵抗体１３１ａは、電流が流れることによって発熱する部材である。発熱抵抗体１３１ａは、一方の端部において後述する陽極側リード電極１３３のコイル部１３３ａに接続される。また、発熱抵抗体１３１ａは、他方の端部において後述する陰極側リード電極１３４のコイル部１３４ａに接続される。 The heating resistor 131a is a member that generates heat when current flows. One end of the heating resistor 131a is connected to a coil portion 133a of an anode-side lead electrode 133, which will be described later. The other end of the heating resistor 131a is connected to a coil portion 134a of a cathode-side lead electrode 134, which will be described later.
　発熱抵抗体１３１ａは、例えば、タングステン、モリブデンなどを含む高抵抗の導体を含んでよい。発熱抵抗体１３１ａの寸法は、例えば幅を０．１ｍｍ以上５ｍｍ以下に、厚みを０．０５ｍｍ以上０．３ｍｍ以下に、全長を１ｍｍ以上５００ｍｍ以下にすることができる。また、発熱抵抗体１３１ａは、例えばタングステンカーバイドを含む導電性セラミックスであってもよい。この場合は、セラミック体と発熱抵抗体１３１ａとの熱膨張差を低減できる。これにより、セラミック体と発熱抵抗体１３１ａとの間の熱応力を低減できる。その結果、ヒータ本体１３１の耐久性を高めることができる。 The heating resistor 131a may include, for example, a high-resistance conductor containing tungsten, molybdenum, or the like. The dimensions of the heating resistor 131a can be, for example, a width of 0.1 mm or more and 5 mm or less, a thickness of 0.05 mm or more and 0.3 mm or less, and a total length of 1 mm or more and 500 mm or less. Also, the heating resistor 131a may be made of conductive ceramics containing, for example, tungsten carbide. In this case, the difference in thermal expansion between the ceramic body and the heating resistor 131a can be reduced. Thereby, the thermal stress between the ceramic body and the heating resistor 131a can be reduced. As a result, durability of the heater body 131 can be enhanced.
　固定部材１３２は、ヒータ本体１３１の周面を囲む筒状をなしている。固定部材１３２は、たとえば、第１部材１３２ａと第２部材１３２ｂとを有する。 The fixing member 132 has a tubular shape surrounding the peripheral surface of the heater main body 131 . The fixing member 132 has, for example, a first member 132a and a second member 132b.
　第１部材１３２ａの外周面には、おねじ１３２ｃが位置している。第１部材１３２ａの材料は、例えば、耐熱性を有する金属材料である。固定部材１３２の材料としては、例えば、ＦｅまたはＮｉ等を含有する合金を使用することができる。具体的には、固定部材１３２は、ステンレス鋼、Ｆｅ－Ｎｉ－Ｃｏ合金またはＮｉ系耐熱合金等を材料とすることができる。 A male screw 132c is located on the outer peripheral surface of the first member 132a. The material of the first member 132a is, for example, a metal material having heat resistance. As a material of the fixing member 132, for example, an alloy containing Fe or Ni can be used. Specifically, the fixing member 132 can be made of stainless steel, Fe--Ni--Co alloy, Ni-based heat-resistant alloy, or the like.
　第２部材１３２ｂは、第１部材１３２ａと陰極側リード電極１３４のコイル部１３４ａとの間に位置している。第２部材１３２ｂの材料は、例えば、絶縁性を有するセラミックである。第２部材１３２ｂの材料としては、例えば、アルミナまたは窒化ケイ素等であってよい。 The second member 132b is positioned between the first member 132a and the coil portion 134a of the lead electrode 134 on the cathode side. The material of the second member 132b is, for example, insulating ceramics. The material of the second member 132b may be, for example, alumina or silicon nitride.
　陽極側リード電極１３３および陰極側リード電極１３４は、ヒータ本体１３１の周面に固定されている。陽極側リード電極１３３は、一端が後述する陽極側集合電極１６０を介して外部電源に接続され、他端が発熱抵抗体１３１ａに電気的に接続される。また、陰極側リード電極１３４は、一端が後述する陰極側集合電極１７０を介して外部電源に接続され、他端が発熱抵抗体１３１ａに電気的に接続される。 The anode-side lead electrode 133 and the cathode-side lead electrode 134 are fixed to the peripheral surface of the heater main body 131 . One end of the anode-side lead electrode 133 is connected to an external power supply via an anode-side collective electrode 160, which will be described later, and the other end is electrically connected to the heating resistor 131a. One end of the cathode-side lead electrode 134 is connected to an external power supply via a cathode-side collective electrode 170, which will be described later, and the other end is electrically connected to the heating resistor 131a.
　陽極側リード電極１３３および陰極側リード電極１３４は、例えば、ニッケル、鉄またはニッケル系耐熱合金等の金属材料を含む線材である。陽極側リード電極１３３および陰極側リード電極１３４の断面は、例えば円形状であってもよく、楕円形状、矩形状であってもよい。陽極側リード電極１３３および陰極側リード電極１３４の外径は、例えば０．５以上２．０ｍｍ以下であってもよい。 The anode-side lead electrode 133 and the cathode-side lead electrode 134 are, for example, wires containing metal materials such as nickel, iron, or nickel-based heat-resistant alloys. The cross sections of the anode-side lead electrode 133 and the cathode-side lead electrode 134 may be circular, elliptical, or rectangular, for example. The outer diameters of the anode-side lead electrode 133 and the cathode-side lead electrode 134 may be, for example, 0.5 mm or more and 2.0 mm or less.
　陽極側リード電極１３３は、コイル部１３３ａと端子部１３３ｂとを有する。コイル部１３３ａは、陽極側リード電極１３３のうち、ヒータ本体１３１の周面に沿って螺旋状に巻回される部分であり、発熱抵抗体１３１ａの一方の端部に電気的に接続されている。端子部１３３ｂは、陽極側リード電極１３３のうち、コイル部１３３ａからヒータ本体１３１の外方に引き出された部分である。端子部１３３ｂは、ヒータ本体１３１の後端からヒータ本体１３１の長手方向外方（ここでは、Ｚ軸負方向）に延びている。 The anode-side lead electrode 133 has a coil portion 133a and a terminal portion 133b. The coil portion 133a is a portion of the anode-side lead electrode 133 that is spirally wound along the peripheral surface of the heater body 131, and is electrically connected to one end of the heating resistor 131a. . The terminal portion 133b is a portion of the anode-side lead electrode 133 that is drawn out of the heater main body 131 from the coil portion 133a. The terminal portion 133b extends outward in the longitudinal direction of the heater main body 131 (here, in the Z-axis negative direction) from the rear end of the heater main body 131 .
　陰極側リード電極１３４は、コイル部１３４ａと端子部１３４ｂとを有する。コイル部１３４ａは、ヒータ本体１３１の周面に沿って螺旋状に巻回される部分であり、発熱抵抗体１３１ａの他方の端部に電気的に接続されている。端子部１３４ｂは、陰極側リード電極１３４のうち、コイル部１３４ａから引き出された部分である。端子部１３４ｂは、ヒータ本体１３１の周面からヒータ本体１３１の径方向外方（ここでは、Ｙ軸正方向）に延びている。 The cathode-side lead electrode 134 has a coil portion 134a and a terminal portion 134b. The coil portion 134a is a portion spirally wound along the peripheral surface of the heater main body 131, and is electrically connected to the other end of the heating resistor 131a. The terminal portion 134b is a portion of the cathode-side lead electrode 134 that is pulled out from the coil portion 134a. The terminal portion 134b extends radially outward of the heater main body 131 (here, in the positive Y-axis direction) from the peripheral surface of the heater main body 131 .
　このように、ヒータ１３０のリード電極（陽極側リード電極１３３および陰極側リード電極１３４）は、ヒータ本体１３１の周面に沿って位置するコイル部１３３ａ，１３４ａと、コイル部１３３ａ，１３４ａから引き出された端子部１３３ｂ，１３４ｂとを有する。このように構成されたヒータ１３０は、コイル部１３３ａ，１３４ａがバネとして機能することで、応力が集中しにくい。したがって、このように構成されたヒータ１３０は、耐久性が高い。 In this way, the lead electrodes (anode side lead electrode 133 and cathode side lead electrode 134) of the heater 130 are drawn out from the coil portions 133a and 134a located along the peripheral surface of the heater main body 131 and the coil portions 133a and 134a. and terminal portions 133b and 134b. In the heater 130 configured in this manner, the coil portions 133a and 134a function as springs, so stress is less likely to concentrate. Therefore, the heater 130 configured in this way has high durability.
　なお、ここでは、陽極側リード電極１３３が、陰極側リード電極１３４よりもヒータ本体１３１の後端側に位置する場合の例について説明したが、陽極側リード電極１３３および陰極側リード電極１３４の位置関係は逆であってもよい。すなわち、図２に示す陽極側リード電極１３３の位置に設けられるリード電極は、陰極側リード電極１３４であってもよい。また、図２に示す陰極側リード電極１３４の位置に設けられるリード電極は、陽極側リード電極１３３であってもよい。 Here, an example in which the anode-side lead electrode 133 is positioned closer to the rear end side of the heater main body 131 than the cathode-side lead electrode 134 has been described, but the positions of the anode-side lead electrode 133 and the cathode-side lead electrode 134 are different. The relationship may be reversed. That is, the lead electrode provided at the position of the anode lead electrode 133 shown in FIG. 2 may be the cathode lead electrode 134 . Moreover, the lead electrode provided at the position of the cathode side lead electrode 134 shown in FIG. 2 may be the anode side lead electrode 133 .
　加熱装置１００が有する複数のヒータ１３０は、加熱プレート１１０の下面１１０ｂに形成された複数の凹部１１３に挿入される。図３は、実施形態に係る加熱装置１００をＺ軸正方向から見た平面図である。 A plurality of heaters 130 included in the heating device 100 are inserted into a plurality of recesses 113 formed in the lower surface 110b of the heating plate 110 . FIG. 3 is a plan view of the heating device 100 according to the embodiment viewed from the Z-axis positive direction.
　図３には、加熱面である加熱プレート１１０の上面１１０ａが矩形板状に示されるとともに、複数の凹部１１３の位置が破線で示されている。一例として、図３に示す複数の凹部１１３は、６行６列で配置されている。すなわち、実施形態に係る加熱プレート１１０は、合計３６個の凹部１１３を有している。なお、複数の凹部１１３の配置および数は、図示の例に限定されない。 In FIG. 3, the upper surface 110a of the heating plate 110, which is the heating surface, is shown in the shape of a rectangular plate, and the positions of the plurality of recesses 113 are indicated by dashed lines. As an example, the plurality of recesses 113 shown in FIG. 3 are arranged in 6 rows and 6 columns. That is, the heating plate 110 according to the embodiment has a total of 36 recesses 113 . Note that the arrangement and number of the plurality of recesses 113 are not limited to the illustrated example.
　図１に戻り、固定プレート１２０について説明する。固定プレート１２０は、例えば金属製の板状部材であり、加熱プレート１１０から離隔して配置されている。固定プレート１２０には、複数の凹部１１３にそれぞれ挿入される複数のヒータ１３０が固定されている。固定プレート１２０に対するヒータ１３０の固定態様については、後述する。 Returning to FIG. 1, the fixing plate 120 will be explained. The fixed plate 120 is, for example, a plate-like member made of metal, and is arranged apart from the heating plate 110 . A plurality of heaters 130 that are respectively inserted into the plurality of recesses 113 are fixed to the fixed plate 120 . How the heater 130 is fixed to the fixing plate 120 will be described later.
　支持プレート１５０は、固定プレート１２０から離れた状態で、複数の柱状部材１５１によって固定プレート１２０に固定されている。支持プレート１５０が固定プレート１２０から離れて位置することにより、各ヒータ１３０の端子部１３３ｂ，１３４ｂを配置するための空間、言い換えれば、後述する陽極側集合電極１６０および陰極側集合電極１７０を配置するための空間を支持プレート１５０と固定プレート１２０との間に確保することが可能となる。なお、支持プレート１５０及び複数の柱状部材１５１は、必要に応じて省略されてもよい。 The support plate 150 is fixed to the fixed plate 120 by a plurality of columnar members 151 while being separated from the fixed plate 120 . By positioning the support plate 150 away from the fixed plate 120, a space for arranging the terminal portions 133b and 134b of each heater 130, in other words, an anode-side collective electrode 160 and a cathode-side collective electrode 170, which will be described later, are arranged. A space for this can be secured between the support plate 150 and the fixing plate 120 . Note that the support plate 150 and the plurality of columnar members 151 may be omitted as necessary.
　図４は、図３に示すＩＶ－ＩＶ線における断面図である。また、図５は、図３に示すＶ－Ｖ線における断面図である。なお、図４及び図５では、支持プレート１５０及び複数の柱状部材１５１の図示が省略されている。 FIG. 4 is a cross-sectional view along line IV-IV shown in FIG. 5 is a cross-sectional view taken along line VV shown in FIG. 4 and 5, illustration of the support plate 150 and the plurality of columnar members 151 is omitted.
　図４及び図５に示すように、加熱装置１００は、複数のヒータ１３０が固定プレート１２０に固定されるとともに加熱プレート１１０の複数の凹部１１３にそれぞれ挿入されて構成される。 As shown in FIGS. 4 and 5, the heating device 100 is configured by a plurality of heaters 130 fixed to a fixed plate 120 and inserted into a plurality of recesses 113 of a heating plate 110, respectively.
　加熱プレート１１０は、第１のプレート部材１１１及び第２のプレート部材１１２を有する。 The heating plate 110 has a first plate member 111 and a second plate member 112 .
　第１のプレート部材１１１は、加熱面である加熱プレート１１０の上面１１０ａを有する板状部材である。第１のプレート部材１１１は、例えばボルト等の固定部材１１４によって第２のプレート部材１１２に接合されている。すなわち、第１のプレート部材１１１の上面１１０ａとは反対側の下面１１１ａは、第２のプレート部材１１２に接合される接合面である。 The first plate member 111 is a plate member having an upper surface 110a of the heating plate 110, which is a heating surface. The first plate member 111 is joined to the second plate member 112 by fixing members 114 such as bolts. That is, the lower surface 111a of the first plate member 111 opposite to the upper surface 110a is a joint surface to which the second plate member 112 is joined.
　第２のプレート部材１１２は、第１のプレート部材１１１の接合面に接合される被接合面となる上面１１２ａと、上面１１２ａの反対側に位置する下面１１０ｂとを有する板状部材である。下面１１０ｂには、複数の貫通孔１１２ｂが形成されており、複数の貫通孔１１２ｂの各々から第１のプレート部材１１１の下面１１１ａが露出する。 The second plate member 112 is a plate-shaped member having an upper surface 112a that serves as a surface to be joined that is joined to the joint surface of the first plate member 111, and a lower surface 110b located on the opposite side of the upper surface 112a. A plurality of through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the first plate member 111 is exposed from each of the plurality of through holes 112b.
　複数の凹部１１３の各々は、複数の貫通孔１１２ｂの各々と複数の貫通孔１１２ｂの各々から露出する第１のプレート部材１１１の下面１１１ａとによって形成されている。すなわち、各貫通孔１１２ｂの内壁面が各凹部１１３の内側面を形成し、第１のプレート部材１１１の下面１１１ａが各凹部１１３の底面（図５に示す姿勢においては天井面）を形成している。 Each of the plurality of recesses 113 is formed by each of the plurality of through holes 112b and the lower surface 111a of the first plate member 111 exposed from each of the plurality of through holes 112b. That is, the inner wall surface of each through hole 112b forms the inner side surface of each recess 113, and the lower surface 111a of the first plate member 111 forms the bottom surface of each recess 113 (ceiling surface in the posture shown in FIG. 5). there is
　固定プレート１２０は、固定プレート１２０と加熱プレート１１０との間に隙間が形成された状態で、例えばボルト等の連結部材１２１によって加熱プレート１１０に連結されることにより、加熱プレート１１０から離隔して配置されている。固定プレート１２０を加熱プレート１１０から離隔して配置させることにより、固定プレート１２０に対する複数のヒータ１３０の固定部分（例えば、後述の固定孔１２０ａ）の昇温を抑制することができる。一方で、固定プレート１２０によって加熱プレート１１０から奪われる熱が低減するため、加熱プレート１１０の昇温を促進することができる。 The fixing plate 120 is separated from the heating plate 110 by being connected to the heating plate 110 by a connecting member 121 such as a bolt with a gap formed between the fixing plate 120 and the heating plate 110 . It is By arranging the fixed plate 120 apart from the heating plate 110, it is possible to suppress the temperature rise of the fixing portions (for example, fixing holes 120a described later) of the plurality of heaters 130 with respect to the fixed plate 120. FIG. On the other hand, since the heat taken from the heating plate 110 by the fixing plate 120 is reduced, the temperature rise of the heating plate 110 can be accelerated.
　固定プレート１２０は、複数の凹部１１３に対応する位置に複数の固定孔１２０ａを有する。複数の固定孔１２０ａには、複数のヒータ１３０がそれぞれ挿通されて固定されている。以下では、説明の便宜上、特に区別する必要がない場合には、複数の凹部１１３、複数の固定孔１２０ａ及び複数のヒータ１３０をそれぞれ単に「凹部１１３」、「固定孔１２０ａ」及び「ヒータ１３０」と呼ぶ。 The fixing plate 120 has a plurality of fixing holes 120 a at positions corresponding to the plurality of recesses 113 . A plurality of heaters 130 are respectively inserted and fixed to the plurality of fixing holes 120a. Hereinafter, for convenience of explanation, the plurality of recesses 113, the plurality of fixing holes 120a, and the plurality of heaters 130 will be simply referred to as "recesses 113," "fixing holes 120a," and "heaters 130," respectively, when there is no particular need to distinguish them. call.
　ヒータ１３０のヒータ本体１３１は、固定孔１２０ａを貫通しており、その先端が凹部１１３に挿入されている。ヒータ本体１３１の基端部は、固定プレート１２０の下面よりも加熱面である加熱プレート１１０の上面１１０ａから離れる方向に突出している。ヒータ本体１３１の基端部には、上述した陽極側リード電極１３３および陰極側リード電極１３４が位置している。加熱面である加熱プレート１１０の上面１１０ａから離れる方向に突出するヒータ本体１３１の基端部に陽極側リード電極１３３および陰極側リード電極１３４を設けることにより、加熱面から陽極側リード電極１３３および陰極側リード電極１３４を遠ざけることができる。したがって、かかる構成によれば、陽極側リード電極１３３および陰極側リード電極１３４への熱伝達を抑制することができる。 A heater main body 131 of the heater 130 penetrates through the fixing hole 120 a and its tip is inserted into the recess 113 . The base end of the heater main body 131 protrudes in a direction away from the upper surface 110a of the heating plate 110, which is the heating surface, rather than the lower surface of the fixed plate 120. As shown in FIG. The anode lead electrode 133 and the cathode lead electrode 134 are positioned at the proximal end of the heater main body 131 . By providing the anode lead electrode 133 and the cathode lead electrode 134 at the proximal end portion of the heater main body 131 protruding in the direction away from the upper surface 110a of the heating plate 110, which is the heating surface, the anode lead electrode 133 and the cathode lead electrode 134 are separated from the heating surface. The side lead electrodes 134 can be kept away. Therefore, according to such a configuration, heat transfer to the anode side lead electrode 133 and the cathode side lead electrode 134 can be suppressed.
　ヒータ１３０の固定部材１３２は、固定孔１２０ａの内壁との間に隙間を空けてヒータ本体１３１を固定孔１２０ａに固定する。具体的には、固定孔１２０ａの内壁の加熱プレート１１０とは反対側に位置する一部には、めねじが形成されている。一方で、固定部材１３２は、第１部材１３２ａの外周部におねじ１３２ｃを有する。固定部材１３２は、ヒータ本体１３１が固定孔１２０ａに挿通される際に、おねじ１３２ｃを固定孔１２０ａのめねじに嵌合させることで、ヒータ本体１３１と固定孔１２０ａの内壁との間に隙間が形成された状態で、ヒータ本体１３１を固定孔１２０ａに固定する。 A fixing member 132 of the heater 130 fixes the heater main body 131 to the fixing hole 120a with a gap between it and the inner wall of the fixing hole 120a. Specifically, a female screw is formed in a portion of the inner wall of the fixing hole 120a located on the side opposite to the heating plate 110 . On the other hand, the fixing member 132 has an external thread 132c on the outer peripheral portion of the first member 132a. When the heater main body 131 is inserted through the fixing hole 120a, the fixing member 132 is formed by fitting the male screw 132c into the female screw of the fixing hole 120a, thereby creating a gap between the heater main body 131 and the inner wall of the fixing hole 120a. is formed, the heater main body 131 is fixed to the fixing hole 120a.
　このように、ヒータ本体１３１が固定孔１２０ａの内壁との間に隙間を空けて固定孔１２０ａに固定されることにより、固定プレート１２０はヒータ本体１３１からの熱を受け難い。これにより、固定プレート１２０の温度上昇が抑制されることから、固定プレート１２０から、陽極側リード電極１３３および陰極側リード電極１３４が設けられるヒータ本体１３１の基端部へ向けて放射される熱が抑制される。このため、実施形態に係る加熱装置１００によれば、ヒータ１３０における陽極側リード電極１３３および陰極側リード電極１３４の劣化を低減することができる。 Since the heater main body 131 is thus fixed to the fixing hole 120a with a gap between it and the inner wall of the fixing hole 120a, the fixing plate 120 is less likely to receive heat from the heater main body 131. As a result, the temperature rise of the fixing plate 120 is suppressed, so that the heat radiated from the fixing plate 120 toward the proximal end portion of the heater main body 131 where the anode lead electrode 133 and the cathode lead electrode 134 are provided is reduced. Suppressed. Therefore, according to the heating device 100 according to the embodiment, the deterioration of the anode lead electrode 133 and the cathode lead electrode 134 in the heater 130 can be reduced.
　加熱プレート１１０と固定プレート１２０との間には、スペーサ部材１４０が配置されている。スペーサ部材１４０は、筒状をなし、連結部材１２１を挿通させている。加熱プレート１１０と固定プレート１２０との間にスペーサ部材１４０を設けることにより、加熱プレート１１０と固定プレート１２０とが離隔した状態を保つことができるとともに、加熱プレート１１０と固定プレート１２０との距離を保つことができる。したがって、かかる構成によれば、加熱プレート１１０からの伝熱に伴う固定プレート１２０の温度上昇を継続的に抑えることができる。 A spacer member 140 is arranged between the heating plate 110 and the fixed plate 120 . The spacer member 140 has a tubular shape, and the connecting member 121 is inserted therethrough. By providing the spacer member 140 between the heating plate 110 and the fixing plate 120, the heating plate 110 and the fixing plate 120 can be kept separated, and the distance between the heating plate 110 and the fixing plate 120 can be maintained. be able to. Therefore, according to such a configuration, it is possible to continuously suppress the temperature rise of the fixed plate 120 due to heat transfer from the heating plate 110 .
　スペーサ部材１４０の材料は、例えば、耐熱性を有するセラミックであることが好ましい。スペーサ部材１４０の材料としては、例えば、酸化物セラミックス、窒化物セラミックスまたは炭化物セラミックス等を使用することができる。これにより、スペーサ部材１４０の熱膨張及び熱収縮を低減することができることから、スペーサ部材１４０の消耗を低減することができる。 The material of the spacer member 140 is preferably heat-resistant ceramic, for example. As a material of the spacer member 140, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. As a result, thermal expansion and thermal contraction of the spacer member 140 can be reduced, and wear of the spacer member 140 can be reduced.
　図１に戻る。陽極側集合電極１６０は、複数のヒータ１３０の陽極側リード電極１３３に電気的に接続されている。実施形態において、加熱装置１００は、３６個のヒータ１３０を有しており、陽極側集合電極１６０は、これら３６個のヒータ１３０のうち一列に並んだ６個のヒータ１３０の陽極側リード電極１３３に電気的に接続されている。加熱装置１００は、合計で６個の陽極側集合電極１６０を有している（図７参照）。 Return to Figure 1. The anode collective electrode 160 is electrically connected to the anode lead electrodes 133 of the plurality of heaters 130 . In the embodiment, the heating device 100 has 36 heaters 130, and the anode-side collective electrode 160 is connected to the anode-side lead electrodes 133 of the 6 heaters 130 arranged in a line among the 36 heaters 130. is electrically connected to The heating device 100 has a total of six anode-side collective electrodes 160 (see FIG. 7).
　また、陰極側集合電極１７０は、複数のヒータ１３０の陰極側リード電極１３４に電気的に接続されている。実施形態において、加熱装置１００は、３６個のヒータ１３０を有しており、陰極側集合電極１７０は、これら３６個のヒータ１３０のうち一列に並んだ６個のヒータ１３０の陰極側リード電極１３４に電気的に接続されている。加熱装置１００は、合計で６個の陰極側集合電極１７０を有している（図９参照）。 Also, the cathode-side collective electrode 170 is electrically connected to the cathode-side lead electrodes 134 of the plurality of heaters 130 . In the embodiment, the heating device 100 has 36 heaters 130, and the cathode-side collective electrode 170 is connected to the cathode-side lead electrodes 134 of the 6 heaters 130 arranged in a line among the 36 heaters 130. is electrically connected to The heating device 100 has a total of six cathode-side collective electrodes 170 (see FIG. 9).
　このように、実施形態に係る加熱装置１００は、加熱装置１００が有する複数のヒータ１３０のうち２以上のヒータ１３０が有する２以上の陽極側リード電極１３３に接続された陽極側集合電極１６０を有する。また、実施形態に係る加熱装置１００は、加熱装置１００が有する複数のヒータ１３０のうち２以上のヒータ１３０が有する２以上の陰極側リード電極１３４に接続された陰極側集合電極１７０を有する。 Thus, the heating device 100 according to the embodiment has the anode-side collective electrode 160 connected to two or more anode-side lead electrodes 133 of two or more heaters 130 among the plurality of heaters 130 of the heating device 100. . Moreover, the heating device 100 according to the embodiment has a cathode-side collective electrode 170 connected to two or more cathode-side lead electrodes 134 of two or more heaters 130 among the plurality of heaters 130 of the heating device 100 .
　複数（ここでは、６個）のヒータ１３０で発生した熱は、リード電極を介して１つの集合電極に伝えられる。これにより、各ヒータ１３０で発生した熱が各ヒータ１３０のリード電極からバラバラに散逸することを抑制することができる。したがって、実施形態に係る加熱装置１００によれば、均熱性の向上を図ることができる。 The heat generated by a plurality of (here, six) heaters 130 is transferred to one collective electrode via lead electrodes. As a result, the heat generated in each heater 130 can be prevented from dissipating separately from the lead electrodes of each heater 130 . Therefore, according to the heating device 100 according to the embodiment, uniformity of heat can be improved.
　以下、陽極側集合電極１６０および陰極側集合電極１７０の構成について図６～図９を参照してより具体的に説明する。図６は、実施形態に係る加熱装置１００をＸ軸負方向から見た側面図である。図７は、図６に示すＶＩＩ－ＶＩＩ線矢視における断面図である。図８は、実施形態に係る加熱装置１００をＹ軸正方向から見た側面図である。図９は、実施形態に係る複数の陰極側集合電極１７０をＺ軸負方向から見た平面図である。 The configurations of the anode-side collective electrode 160 and the cathode-side collective electrode 170 will be described in more detail below with reference to FIGS. 6 to 9. FIG. FIG. 6 is a side view of the heating device 100 according to the embodiment viewed from the negative direction of the X-axis. FIG. 7 is a cross-sectional view taken along line VII--VII shown in FIG. FIG. 8 is a side view of the heating device 100 according to the embodiment viewed from the positive Y-axis direction. FIG. 9 is a plan view of a plurality of cathode-side collective electrodes 170 according to the embodiment, viewed from the Z-axis negative direction.
　図６および図７に示すように、陽極側集合電極１６０は、第１金属板１６１と、第２金属板１６２と、複数の固定部材１６３とを有する。第１金属板１６１および第２金属板１６２は、断面視矩形状の金属製の板材である。固定部材１６３は、第１金属板１６１と第２金属板１６２とを着脱自在に固定する。固定部材１６３は、たとえばボルトである。 As shown in FIGS. 6 and 7, the anode-side collective electrode 160 has a first metal plate 161, a second metal plate 162, and a plurality of fixing members 163. The first metal plate 161 and the second metal plate 162 are metal plate members having a rectangular cross-sectional view. The fixing member 163 detachably fixes the first metal plate 161 and the second metal plate 162 . Fixing member 163 is, for example, a bolt.
　陽極側集合電極１６０は、第１金属板１６１と第２金属板１６２とで複数の陽極側リード電極１３３の端子部１３３ｂを挟み込むことにより、複数の陽極側リード電極１３３と電気的に接続される。具体的には、実施形態において、第１金属板１６１および第２金属板１６２は、Ｘ軸方向に沿って延在しており、Ｘ軸方向に沿って並べられた複数（ここでは、６個）の端子部１３３ｂを挟み込んでいる。 The anode collective electrode 160 is electrically connected to the anode lead electrodes 133 by sandwiching the terminal portions 133b of the anode lead electrodes 133 between the first metal plate 161 and the second metal plate 162. . Specifically, in the embodiment, the first metal plate 161 and the second metal plate 162 extend along the X-axis direction, and a plurality of (here, six) arranged along the X-axis direction. ) is sandwiched therebetween.
　かかる構成とすることにより、複数の陽極側リード電極１３３を一直線に接続することができるため、複数の陽極側リード電極１３３を最短で接続することができる。また、端子部１３３ｂの長さにバラツキがある場合であっても、接続が容易である。 By adopting such a configuration, it is possible to connect the plurality of anode lead electrodes 133 in a straight line, so that the plurality of anode lead electrodes 133 can be connected in the shortest distance. Moreover, even if the length of the terminal portion 133b varies, the connection is easy.
　また、固定部材１６３による第１金属板１６１と第２金属板１６２との固定は解除可能である。このため、たとえば複数のヒータ１３０のうちいずれか１個が故障した場合に、故障した１個だけを交換することができる。このように、実施形態に係る加熱装置１００によれば、ヒータ１３０の交換が容易である。 Also, the fixing between the first metal plate 161 and the second metal plate 162 by the fixing member 163 can be released. Therefore, for example, when any one of the plurality of heaters 130 fails, only the failed heater can be replaced. Thus, according to the heating device 100 according to the embodiment, it is easy to replace the heater 130 .
　図７に示すように、複数（ここでは、６個）の陽極側集合電極１６０は、Ｙ軸方向に沿って並べられている。図７に示すように、加熱プレート１１０の加熱面である上面１１０ａに向かって視た平面透視において、各陽極側集合電極１６０と端子部１３３ｂとの接続位置は、加熱プレート１１０の上面１１０ａと重なっている。このように、加熱領域の範囲内において陽極側集合電極１６０と端子部１３３ｂとを接続することで、たとえば、加熱領域の外方において陽極側集合電極１６０と端子部１３３ｂとを接続する場合と比較して、各ヒータ１３０から加熱装置１００の外方への熱の散逸を抑制することができる。したがって、実施形態に係る加熱装置１００によれば、均熱性をさらに高めることができる。 As shown in FIG. 7, a plurality of (here, six) anode-side collective electrodes 160 are arranged along the Y-axis direction. As shown in FIG. 7 , in a perspective plan view toward the upper surface 110 a of the heating plate 110 , the connecting positions of the anode-side collective electrodes 160 and the terminal portions 133 b overlap the upper surface 110 a of the heating plate 110 . ing. Thus, by connecting the anode-side collective electrode 160 and the terminal portion 133b within the range of the heating region, for example, compared to the case where the anode-side collective electrode 160 and the terminal portion 133b are connected outside the heating region. As a result, heat dissipation from each heater 130 to the outside of the heating device 100 can be suppressed. Therefore, according to the heating device 100 according to the embodiment, the heat uniformity can be further improved.
　図６、図８および図９に示すように、陰極側集合電極１７０は、第１金属板１７１と、第２金属板１７２と、複数の固定部材１７３とを有する。第１金属板１７１および第２金属板１７２は、断面視矩形状の金属製の板材である。固定部材１７３は、第１金属板１７１と第２金属板１７２とを着脱自在に固定する。固定部材１７３は、たとえばボルトである。 As shown in FIGS. 6, 8 and 9, the cathode-side collective electrode 170 has a first metal plate 171, a second metal plate 172, and a plurality of fixing members 173. The first metal plate 171 and the second metal plate 172 are metal plate materials having a rectangular cross-sectional view. The fixing member 173 detachably fixes the first metal plate 171 and the second metal plate 172 . Fixing member 173 is, for example, a bolt.
　陰極側集合電極１７０は、第１金属板１７１と第２金属板１７２とで複数の陰極側リード電極１３４の端子部１３４ｂを挟み込むことにより、複数の陰極側リード電極１３４と電気的に接続される。具体的には、実施形態において、第１金属板１７１および第２金属板１７２は、Ｘ軸方向に沿って延在しており、Ｘ軸方向に沿って並べられた複数（ここでは、６個）の端子部１３４ｂを挟み込んでいる（図８および図９参照）。 The cathode-side collective electrode 170 is electrically connected to the plurality of cathode-side lead electrodes 134 by sandwiching the terminal portions 134b of the plurality of cathode-side lead electrodes 134 between the first metal plate 171 and the second metal plate 172. . Specifically, in the embodiment, the first metal plate 171 and the second metal plate 172 extend along the X-axis direction, and a plurality of (here, six) arranged along the X-axis direction. ) sandwiches the terminal portion 134b (see FIGS. 8 and 9).
　かかる構成とすることにより、複数の陰極側リード電極１３４を一直線に接続することができるため、複数の陰極側リード電極１３４を最短で接続することができる。また、端子部１３４ｂの長さにバラツキがある場合であっても、接続が容易である。 With this configuration, the plurality of cathode-side lead electrodes 134 can be connected in a straight line, so that the plurality of cathode-side lead electrodes 134 can be connected in the shortest distance. Moreover, even if the length of the terminal portion 134b varies, the connection is easy.
　また、固定部材１７３による第１金属板１７１と第２金属板１７２との固定は解除可能であるため、たとえば複数のヒータ１３０のうちいずれか１個が故障した場合に、故障した１個だけを交換することができる。このように、実施形態に係る加熱装置１００によれば、ヒータ１３０の交換が容易である。 In addition, since the fixation of the first metal plate 171 and the second metal plate 172 by the fixing member 173 can be released, for example, if one of the plurality of heaters 130 fails, only the failed heater can be replaced. can be replaced. Thus, according to the heating device 100 according to the embodiment, it is easy to replace the heater 130 .
　図９に示すように、複数（ここでは、６個）の陰極側集合電極１７０は、Ｙ軸方向に沿って並べられている。図９に示すように、加熱プレート１１０の加熱面である上面１１０ａと垂直な方向から見た平面視において、各陰極側集合電極１７０と端子部１３４ｂとの接続位置は、加熱プレート１１０の上面１１０ａと重複している。このように、加熱領域の範囲内において陰極側集合電極１７０と端子部１３４ｂとを接続することで、たとえば、加熱領域の外方において陰極側集合電極１７０と端子部１３４ｂとを接続する場合と比較して、各ヒータ１３０から加熱装置１００の外方への熱の散逸を抑制することができる。したがって、実施形態に係る加熱装置１００によれば、均熱性をさらに高めることができる。 As shown in FIG. 9, a plurality (here, six) of cathode-side collective electrodes 170 are arranged along the Y-axis direction. As shown in FIG. 9, in a plan view seen from a direction perpendicular to the upper surface 110a, which is the heating surface of the heating plate 110, the connecting positions of the cathode-side collective electrodes 170 and the terminal portions 134b are located on the upper surface 110a of the heating plate 110. overlaps with Thus, by connecting the cathode-side collective electrode 170 and the terminal portion 134b within the range of the heating region, for example, compared to the case of connecting the cathode-side collective electrode 170 and the terminal portion 134b outside the heating region. As a result, heat dissipation from each heater 130 to the outside of the heating device 100 can be suppressed. Therefore, according to the heating device 100 according to the embodiment, the heat uniformity can be further improved.
　また、実施形態に係る加熱装置１００は、２つの金属板でリード電極を挟み込む構成を陽極側および陰極側の両方において採用しているため、上記構成を陽極側および陰極側の一方にのみ採用する場合と比較して、均熱性をさらに高めることができる。 In addition, since the heating device 100 according to the embodiment employs a configuration in which the lead electrode is sandwiched between two metal plates on both the anode side and the cathode side, the above configuration is employed only on one of the anode side and the cathode side. Heat uniformity can be further improved as compared with the case.
　また、図７～図９に示すように、陽極側集合電極１６０と陰極側集合電極１７０とは、平行である。かかる構成とすることで、陽極側集合電極１６０の熱膨張または熱収縮の方向と、陰極側集合電極１７０の熱膨張または熱収縮の方向とが揃うため、ヒータ１３０に剪断方向の応力がかかり難くなる。したがって、加熱装置１００によれば、複数のヒータ１３０の耐久性を高めることができる。 Also, as shown in FIGS. 7 to 9, the anode-side collective electrode 160 and the cathode-side collective electrode 170 are parallel. With such a configuration, the direction of thermal expansion or thermal contraction of the anode-side collective electrode 160 is aligned with the direction of thermal expansion or thermal contraction of the cathode-side collective electrode 170, so stress in the shear direction is less likely to be applied to the heater 130. Become. Therefore, according to the heating device 100, durability of the plurality of heaters 130 can be enhanced.
（第１変形例）
　図１０は、第１変形例に係る陽極側集合電極１６０の断面図である。図１０に示すように、陽極側集合電極１６０の第１金属板１６１は、第２金属板１６２との対向面（第１対向面の一例）に凹部１６１ａ（第１凹部の一例）を有していてもよい。また、陽極側集合電極１６０の第２金属板１６２は、第１金属板１６１との対向面（第２対向面の一例）に凹部１６２ａ（第２凹部の一例）を有していてもよい。凹部１６１ａ，１６２ａは、たとえば、端子部１３３ｂの延在方向（ここでは、Ｚ軸方向）に沿って延在する溝形状を有している。 (First modification)
FIG. 10 is a cross-sectional view of an anode-side collective electrode 160 according to a first modified example. As shown in FIG. 10, the first metal plate 161 of the anode-side collective electrode 160 has a concave portion 161a (an example of a first concave portion) on the surface facing the second metal plate 162 (an example of the first facing surface). may be Further, the second metal plate 162 of the anode-side collective electrode 160 may have a concave portion 162a (an example of a second concave portion) on the surface facing the first metal plate 161 (an example of the second facing surface). The concave portions 161a and 162a have, for example, a groove shape extending along the extending direction of the terminal portion 133b (here, the Z-axis direction).
　このように、陽極側集合電極１６０は、第１金属板１６１および第２金属板１６２に凹部１６１ａ，１６２ａを有していてもよい。かかる構成とすることにより、第１金属板１６１および第２金属板１６２をバネとして機能させることができる。これにより、端子部１３３ｂを挟む力を長期間にわたって維持することができる。 Thus, the anode-side collective electrode 160 may have recesses 161 a and 162 a in the first metal plate 161 and the second metal plate 162 . With such a configuration, the first metal plate 161 and the second metal plate 162 can function as springs. As a result, the force that clamps the terminal portion 133b can be maintained for a long period of time.
　また、第１金属板１６１の凹部１６１ａと第２金属板１６２の凹部１６２ａとは対向していてもよい。かかる構成とすることにより、第１金属板１６１と第２金属板１６２とによるバネの力を各端子部１３３ｂに適切に伝えることができる。 Also, the recess 161a of the first metal plate 161 and the recess 162a of the second metal plate 162 may face each other. With such a configuration, the force of the spring generated by the first metal plate 161 and the second metal plate 162 can be appropriately transmitted to each terminal portion 133b.
　なお、凹部１６１ａと凹部１６２ａとは、必ずしも対向していることを要しない。また、陽極側集合電極１６０は、第１金属板１６１および第２金属板１６２の一方にのみ凹部１６１ａ，１６２ａを有していてもよい。 It should be noted that the recess 161a and the recess 162a do not necessarily have to face each other. Also, the anode-side collective electrode 160 may have recesses 161 a and 162 a only on one of the first metal plate 161 and the second metal plate 162 .
　ここでは、陽極側集合電極１６０の第１金属板１６１および第２金属板１６２が凹部１６１ａ，１６２ａを有する場合の例について説明したが、陰極側集合電極１７０の第１金属板１７１および第２金属板１７２も同様の凹部を有していてもよい。すなわち、陰極側集合電極１７０の第１金属板１７１は、第２金属板１７２との対向面に凹部を有していてもよい。また、陰極側集合電極１７０の第２金属板１７２は、第１金属板１７１との対向面に凹部を有していてもよい。また、第１金属板１７１の凹部と第２金属板１７２の凹部とは対向していてもよい。 Here, an example in which the first metal plate 161 and the second metal plate 162 of the anode-side collective electrode 160 have the concave portions 161a and 162a has been described. Plate 172 may also have similar recesses. That is, the first metal plate 171 of the cathode-side collective electrode 170 may have a concave portion on the surface facing the second metal plate 172 . Also, the second metal plate 172 of the cathode-side collective electrode 170 may have a concave portion on the surface facing the first metal plate 171 . Also, the concave portion of the first metal plate 171 and the concave portion of the second metal plate 172 may face each other.
（第２変形例）
　図１１は、第２変形例に係る陽極側集合電極１６０の断面図である。図１１に示すように、陽極側集合電極１６０は、たとえば１つの金属板１６５を有する。金属板１６５は、金属板１６５の長手方向（ここでは、Ｘ軸方向）に沿って並べられた複数の挿通穴１６５ａを有する。挿通穴１６５ａは、陽極側リード電極１３３の端子部１３３ｂの延在方向（ここでは、Ｚ軸方向）に沿って延在して金属板１６５を貫通する貫通孔である。各挿通穴１６５ａには、陽極側リード電極１３３の端子部１３３ｂが挿通される。言い換えると、陽極側リード電極１３３は、挿通穴１６５ａに位置している。 (Second modification)
FIG. 11 is a cross-sectional view of an anode-side collective electrode 160 according to a second modified example. As shown in FIG. 11, the anode-side collective electrode 160 has one metal plate 165, for example. The metal plate 165 has a plurality of insertion holes 165a arranged along the longitudinal direction of the metal plate 165 (here, the X-axis direction). The insertion hole 165 a is a through hole extending through the metal plate 165 along the extending direction of the terminal portion 133 b of the anode lead electrode 133 (here, the Z-axis direction). The terminal portion 133b of the anode-side lead electrode 133 is inserted through each insertion hole 165a. In other words, the anode-side lead electrode 133 is located in the insertion hole 165a.
　また、金属板１６５は、複数の挿通穴１６５ａごとに、挿通穴１６５ａに連通する固定用穴１６５ｂを有していてもよい。かかる固定用穴１６５ｂには、陽極側リード電極１３３の端子部１３３ｂを固定するための固定部材１６６が挿通される。固定部材１６６は、たとえばボルトであり、固定用穴１６５ｂの内面にはネジ溝が形成されている。陽極側リード電極１３３の端子部１３３ｂは、挿通穴１６５ａの内面と固定用穴１６５ｂに挿通された固定部材１６６とに挟まれる。これにより、端子部１３３ｂは、陽極側集合電極１６０と電気的に接続される。 Also, the metal plate 165 may have fixing holes 165b communicating with the insertion holes 165a for each of the plurality of insertion holes 165a. A fixing member 166 for fixing the terminal portion 133b of the anode lead electrode 133 is inserted through the fixing hole 165b. The fixing member 166 is, for example, a bolt, and a screw groove is formed on the inner surface of the fixing hole 165b. The terminal portion 133b of the anode-side lead electrode 133 is sandwiched between the inner surface of the insertion hole 165a and the fixing member 166 inserted through the fixing hole 165b. As a result, the terminal portion 133 b is electrically connected to the anode-side collective electrode 160 .
　かかる構成とすることにより、たとえば、端子部１３３ｂの太さにバラツキがある場合であっても、複数の端子部１３３ｂを陽極側集合電極１６０に適切に接続することができる。 With such a configuration, for example, even if the thickness of the terminal portions 133b varies, the plurality of terminal portions 133b can be appropriately connected to the anode-side collective electrode 160.
　なお、端子部１３３ｂは、少なくとも金属板１６５と接触していればよい。このため、陽極側集合電極１６０の金属板１６５は、必ずしも固定用穴１６５ｂおよび固定部材１６６を備えることを要しない。この場合、たとえば、挿通穴１６５ａの径を端子部１３３ｂよりもわずかに大きい程度とすることで、端子部１３３ｂと固定用穴１６５ｂとの接触性を高めることができる。また、挿通穴１６５ａにろう材または、はんだ材等を充填することによって、金属板１６５と端子部１３３ｂとを電気的に接続してもよい。 It should be noted that the terminal portion 133b only needs to be in contact with at least the metal plate 165. Therefore, the metal plate 165 of the anode-side collective electrode 160 does not necessarily need to be provided with the fixing holes 165b and the fixing member 166 . In this case, for example, by making the diameter of insertion hole 165a slightly larger than that of terminal portion 133b, the contact between terminal portion 133b and fixing hole 165b can be enhanced. Alternatively, the metal plate 165 and the terminal portion 133b may be electrically connected by filling the insertion hole 165a with a brazing material, a solder material, or the like.
　ここでは、陽極側集合電極１６０が複数の挿通穴１６５ａが形成された金属板１６５を有する場合の例について説明したが、陰極側集合電極１７０も、第２変形例に係る陽極側集合電極１６０と同様の構成を有していてもよい。すなわち、陰極側集合電極１７０は、複数の挿通穴が形成された金属板を有していてもよい。また、陰極側集合電極１７０は、複数の挿通穴ごとに、挿通穴に連通する固定用穴を有していてもよい。 Here, an example in which the anode-side collective electrode 160 has a metal plate 165 in which a plurality of insertion holes 165a are formed has been described. You may have the same structure. That is, the cathode-side collective electrode 170 may have a metal plate with a plurality of through holes. Further, the cathode-side collective electrode 170 may have a fixing hole communicating with each of the plurality of through holes.
（第３変形例）
　図１２は、第３変形例に係る複数の陽極側集合電極１６０をＸ軸負方向から見た側面図である。図１２に示すように、複数の陽極側集合電極１６０のうち少なくとも一つ（異位置集合電極の一例）は、加熱プレート１１０の加熱面である上面１１０ａ（図１等参照）と垂直な方向（ここでは、Ｚ軸方向）における位置が他の陽極側集合電極１６０と異なっていてもよい。かかる構成とすることにより、複数の陽極側集合電極１６０をより高密度に配置させることができる。また、複数の陽極側集合電極１６０の高さ位置がずれることで、複数の陽極側集合電極１６０の放熱性を向上させることができる。 (Third modification)
FIG. 12 is a side view of a plurality of anode-side collective electrodes 160 according to the third modification, viewed from the negative direction of the X-axis. As shown in FIG. 12, at least one of the plurality of anode-side collective electrodes 160 (an example of different-position collective electrodes) extends in a direction ( Here, the position in the Z-axis direction) may be different from that of other anode-side collective electrodes 160 . With such a configuration, the plurality of anode-side collective electrodes 160 can be arranged with higher density. In addition, by shifting the height positions of the plurality of anode-side collective electrodes 160, the heat dissipation of the plurality of anode-side collective electrodes 160 can be improved.
　ここでは、複数の陽極側集合電極１６０の高さ位置にバラツキを有する場合の例について説明したが、加熱装置１００は、複数の陰極側集合電極１７０の高さ位置にバラツキを有していてもよい。すなわち、複数の陰極側集合電極１７０のうち少なくとも一つ（異位置集合電極の一例）は、加熱プレート１１０の加熱面である上面１１０ａ（図１等参照）と垂直な方向（ここでは、Ｚ軸方向）における位置が他の陰極側集合電極１７０と異なっていてもよい。 Here, an example in which the height positions of the plurality of anode-side collective electrodes 160 are varied has been described. good. That is, at least one of the plurality of cathode-side collective electrodes 170 (an example of different-position collective electrodes) is arranged in a direction (here, the Z-axis direction) may be different from the other cathode-side collecting electrodes 170 .
（第４変形例）
　図１３は、第４変形例に係る加熱装置１００をＹ軸負方向から見た側面図である。図１３に示すように、複数の陽極側集合電極１６０のうち少なくとも一つ（異傾集合電極の一例）は、加熱プレート１１０の加熱面である上面１１０ａ（図１等参照）に対する傾きが、他の陽極側集合電極１６０と異なっていてもよい。かかる構成とすることにより、陽極側集合電極１６０の高さ位置がずれるため、複数の陽極側集合電極１６０の放熱性を向上させることができる。 (Fourth modification)
FIG. 13 is a side view of the heating device 100 according to the fourth modification as seen from the Y-axis negative direction. As shown in FIG. 13 , at least one of the plurality of anode-side collective electrodes 160 (an example of an anisotropic collective electrode) has an inclination with respect to the upper surface 110 a (see FIG. 1 etc.), which is the heating surface of the heating plate 110 . may be different from the anode-side collective electrode 160 of . With such a configuration, the height positions of the anode-side collective electrodes 160 are shifted, so that the heat dissipation of the plurality of anode-side collective electrodes 160 can be improved.
　ここでは、複数の陽極側集合電極１６０の傾きにバラツキを有する場合の例について説明したが、加熱装置１００は、複数の陰極側集合電極１７０の傾きにバラツキを有していてもよい。すなわち、複数の陰極側集合電極１７０のうち少なくとも一つ（異傾集合電極の一例）は、加熱プレート１１０の加熱面である上面１１０ａ（図１等参照）に対する傾きが、他の陰極側集合電極１７０と傾きが異なっていてもよい。 Here, an example in which the inclinations of the plurality of anode-side collective electrodes 160 are varied has been described, but the heating device 100 may have the inclinations of the plurality of cathode-side collective electrodes 170 varied. That is, at least one of the plurality of cathode-side collective electrodes 170 (an example of a different-tilt collective electrode) has an inclination with respect to the upper surface 110a (see FIG. 1 , etc.), which is the heating surface of the heating plate 110. The slope may be different from 170.
（第５変形例）
　図１４は、第５変形例に係る加熱装置１００をＸ軸負方向から見た側面図である。図１４に示すように、加熱プレート１１０の上面１１０ａに向かって視た平面透視において、陽極側集合電極１６０および陰極側集合電極１７０の延在方向は、直交していてもよい。図１４に示す例では、陽極側集合電極１６０がＹ軸方向に沿って延在し、陰極側集合電極１７０がＸ軸方向に沿って延在する場合の例を示している。 (Fifth modification)
FIG. 14 is a side view of the heating device 100 according to the fifth modification as seen from the X-axis negative direction. As shown in FIG. 14 , in a perspective plan view toward the upper surface 110 a of the heating plate 110 , the extending directions of the anode-side collective electrode 160 and the cathode-side collective electrode 170 may be perpendicular to each other. The example shown in FIG. 14 shows an example in which the anode-side collective electrode 160 extends along the Y-axis direction and the cathode-side collective electrode 170 extends along the X-axis direction.
　かかる構成とすることにより、Ｘ軸方向への熱拡散とＹ軸方向への熱拡散とを均一化させることができる。 With such a configuration, heat diffusion in the X-axis direction and heat diffusion in the Y-axis direction can be made uniform.
　さらなる効果や変形例は、当業者によって容易に導き出すことができる。このため、本開示のより広範な態様は、以上のように表しかつ記述した特定の詳細および代表的な実施形態に限定されるものではない。したがって、添付の請求の範囲およびその均等物によって定義される総括的な発明の概念の精神または範囲から逸脱することなく、様々な変更が可能である。 Further effects and modifications can be easily derived by those skilled in the art. Therefore, the broader aspects of the disclosure are not limited to the specific details and representative embodiments so represented and described. Accordingly, various changes may be made without departing from the spirit or scope of the general inventive concept defined by the appended claims and equivalents thereof.
３６　合計
１００　加熱装置
１１０　加熱プレート
１１０ａ　上面
１１０ｂ　下面
１１１　第１のプレート部材
１１１ａ　下面
１１２　第２のプレート部材
１１２ａ　上面
１１２ｂ　貫通孔
１１３　凹部
１１４　接合部材
１２０　固定プレート
１２０ａ　固定孔
１２１　連結部材
１３０　ヒータ
１３１　ヒータ本体
１３１ａ　発熱抵抗体
１３１ａ　先端
１３２　固定部材
１３２ａ　第１部材
１３２ｂ　第２部材
１３３　陽極側リード電極
１３３ａ　コイル部
１３３ｂ　端子部
１３４　陰極側リード電極
１３４ａ　コイル部
１３４ｂ　端子部
１４０　スペーサ部材
１５０　支持プレート
１５１　柱状部材
１６０　陽極側集合電極
１６１　第１金属板
１６１ａ　凹部
１６２　第２金属板
１６２ａ　凹部
１６３　固定部材
１６５　金属板
１６５ａ　挿通穴
１６５ｂ　固定用穴
１６６　固定部材
１７０　陰極側集合電極
１７１　第１金属板
１７２　第２金属板
１７３　固定部材 36 total 100 heating device 110 heating plate 110a upper surface 110b lower surface 111 first plate member 111a lower surface 112 second plate member 112a upper surface 112b through hole 113 recess 114 joining member 120 fixing plate 120a fixing hole 121 connecting member 130 heater 131 heater body 131a heating resistor 131a tip 132 fixing member 132a first member 132b second member 133 anode side lead electrode 133a coil portion 133b terminal portion 134 cathode side lead electrode 134a coil portion 134b terminal portion 140 spacer member 150 support plate 151 columnar member 160 anode Side collective electrode 161 First metal plate 161a Recess 162 Second metal plate 162a Recess 163 Fixing member 165 Metal plate 165a Insertion hole 165b Fixing hole 166 Fixing member 170 Cathode collective electrode 171 First metal plate 172 Second metal plate 173 Fixing Element

Claims (13)

  1. 　加熱プレートと、
    　複数のヒータと、
    　集合電極と、を備えており、
    　前記加熱プレートは、加熱面と、該加熱面の反対面に位置する複数の凹部と、を有し、
    　前記複数のヒータは、前記複数の凹部にそれぞれ位置しているとともに、それぞれリード電極に接続されており、
    　前記集合電極は、２以上の前記リード電極に接続されている、加熱装置。     a heating plate;
    a plurality of heaters;
    a collecting electrode;
    The heating plate has a heating surface and a plurality of recesses located on the opposite side of the heating surface,
    the plurality of heaters are respectively positioned in the plurality of recesses and connected to lead electrodes, respectively;
    The heating device, wherein the collective electrode is connected to two or more of the lead electrodes.
  2. 　前記加熱面に向かって視た平面透視において、前記集合電極と前記リード電極との接続位置は、前記加熱面と重なっている、請求項１に記載の加熱装置。 2. The heating device according to claim 1, wherein a connection position between the collective electrode and the lead electrode overlaps the heating surface in plan perspective seen toward the heating surface.
  3. 　前記集合電極は、第１金属板および第２金属板を有し、
    　前記リード電極は、前記第１金属板および前記第２金属板に挟まれている、請求項１または請求項２に記載の加熱装置。     The collective electrode has a first metal plate and a second metal plate,
    3. The heating device according to claim 1, wherein said lead electrode is sandwiched between said first metal plate and said second metal plate.
  4. 　前記第１金属板は、前記第２金属板との第１対向面に第１凹部を有する、請求項３に記載の加熱装置。 The heating device according to claim 3, wherein the first metal plate has a first concave portion on a first surface facing the second metal plate.
  5. 　前記第２金属板は、前記第１金属板との第２対向面に第２凹部を有し、
    　前記第１凹部と前記第２凹部とは、対向している、請求項４に記載の加熱装置。     The second metal plate has a second concave portion on a second surface facing the first metal plate,
    5. The heating device according to claim 4, wherein said first recess and said second recess face each other.
  6. 　前記ヒータは、陽極側リード電極および陰極側リード電極を有し、
    　前記集合電極は、
    　前記第１金属板と前記第２金属板とで前記陽極側リード電極を挟み込む陽極側集合電極と、
    　前記第１金属板と前記第２金属板とで前記陰極側リード電極を挟み込む陰極側集合電極と
    　を有する、請求項３～５のいずれか一つに記載の加熱装置。     The heater has an anode-side lead electrode and a cathode-side lead electrode,
    The collective electrode is
    an anode-side collective electrode sandwiching the anode-side lead electrode between the first metal plate and the second metal plate;
    The heating device according to any one of claims 3 to 5, further comprising a cathode-side collective electrode sandwiching the cathode-side lead electrode between the first metal plate and the second metal plate.
  7. 　前記陽極側集合電極と前記陰極側集合電極とは、平行である、請求項６に記載の加熱装置。 The heating device according to claim 6, wherein the collective electrode on the anode side and the collective electrode on the cathode side are parallel.
  8. 　前記加熱面に向かって視た平面透視において、前記陽極側集合電極および前記陰極側集合電極の延在方向は、直交する、請求項６に記載の加熱装置。 7. The heating device according to claim 6, wherein the extending directions of the anode-side collective electrode and the cathode-side collective electrode are perpendicular to each other in plan view seen toward the heating surface.
  9. 　前記集合電極は、複数の挿通穴を有し、
    　前記リード電極は、前記挿通穴に位置している、請求項１または請求項２に記載の加熱装置。     The collective electrode has a plurality of insertion holes,
    3. The heating device according to claim 1, wherein said lead electrode is positioned in said insertion hole.
  10. 　前記集合電極は、前記複数の挿通穴ごとに、前記挿通穴に連通する固定用穴を有し、
    　前記リード電極は、前記固定用穴に挿通された固定部材と前記挿通穴の内面とに挟まれている、請求項９に記載の加熱装置。     the collective electrode has a fixing hole communicating with the plurality of through-holes for each of the plurality of through-holes,
    10. The heating device according to claim 9, wherein said lead electrode is sandwiched between a fixing member inserted through said fixing hole and an inner surface of said insertion hole.
  11. 　前記集合電極を複数有し、
    　前記加熱面と垂直な方向における位置が他と異なる、異位置集合電極を有する、請求項１～１０のいずれか一つに記載の加熱装置。     Having a plurality of the collective electrodes,
    11. The heating device according to any one of claims 1 to 10, comprising different position collecting electrodes whose positions in the direction perpendicular to the heating surface are different from others.
  12. 　前記集合電極を複数有し、
    　前記加熱面に対し傾きが他と異なる、異傾集合電極を有する、請求項１～１１のいずれか一つに記載の加熱装置。     Having a plurality of the collective electrodes,
    12. The heating device according to any one of claims 1 to 11, further comprising an anisotropically assembled electrode having a different inclination with respect to the heating surface.
  13. 　前記ヒータは、柱状のヒータ本体を有し、
    　前記リード電極は、
    　前記ヒータ本体の周面に沿って位置するコイル部と、
    　前記コイル部から引き出された端子部と
    　を有し、
    　前記集合電極は、前記リード電極の前記端子部に接続されている、請求項１～１２のいずれか一つに記載の加熱装置。     The heater has a columnar heater main body,
    The lead electrodes are
    a coil portion positioned along the peripheral surface of the heater main body;
    and a terminal portion drawn out from the coil portion,
    The heating device according to any one of claims 1 to 12, wherein the collective electrode is connected to the terminal portion of the lead electrode.
PCT/JP2022/027009 2021-07-20 2022-07-07 Heating device WO2023002861A1 (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07183059A (en) * 1993-12-22 1995-07-21 Tokyo Sokki Kenkyusho:Kk Terminal block
JPH10125452A (en) * 1996-10-18 1998-05-15 Toshiba Corp Heater bundle
JP2011165507A (en) * 2010-02-10 2011-08-25 Bridgestone Corp Heater unit
JP2016207595A (en) * 2015-04-28 2016-12-08 日本特殊陶業株式会社 Heating apparatus
JP2017134912A (en) * 2016-01-25 2017-08-03 京セラ株式会社 Ceramic heater
JP2019503566A (en) * 2016-01-28 2019-02-07 ジャーワ エレクトロニクス カンパニー リミテッド Independently controlled PTC heater and device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07183059A (en) * 1993-12-22 1995-07-21 Tokyo Sokki Kenkyusho:Kk Terminal block
JPH10125452A (en) * 1996-10-18 1998-05-15 Toshiba Corp Heater bundle
JP2011165507A (en) * 2010-02-10 2011-08-25 Bridgestone Corp Heater unit
JP2016207595A (en) * 2015-04-28 2016-12-08 日本特殊陶業株式会社 Heating apparatus
JP2017134912A (en) * 2016-01-25 2017-08-03 京セラ株式会社 Ceramic heater
JP2019503566A (en) * 2016-01-28 2019-02-07 ジャーワ エレクトロニクス カンパニー リミテッド Independently controlled PTC heater and device

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