WO2022264521A1 - 測定装置 - Google Patents
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- WO2022264521A1 WO2022264521A1 PCT/JP2022/006760 JP2022006760W WO2022264521A1 WO 2022264521 A1 WO2022264521 A1 WO 2022264521A1 JP 2022006760 W JP2022006760 W JP 2022006760W WO 2022264521 A1 WO2022264521 A1 WO 2022264521A1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6489—Photoluminescence of semiconductors
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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Definitions
- the present disclosure relates to measuring devices.
- PL measurement photoluminescence measurement
- PL measurement is known as a measurement method used to inspect objects to be measured such as semiconductor wafers.
- PL measurement is, for example, a method of measuring light emitted by recombination of electrons and holes generated by irradiating a semiconductor material with light having energy higher than the bandgap.
- the quality of a measured object has been evaluated based on the PL intensity and information for each wavelength, but from the viewpoint of ensuring the quality of semiconductor wafers, improvements in defect quantification and reproducibility are required.
- ODPL measurement omnidirectional photoluminescence measurement
- Non-Patent Document 1 omnidirectional photoluminescence measurement
- ODPL measurement is a method of measuring the number of photons of excitation light absorbed by a measurement object and the number of emitted photons in all directions using an integrating sphere.
- the emission quantum efficiency of band-edge emission which is affected by non-radiative recombination including impurity density and point defect density, can be calculated, and thus defects can be quantified.
- the external quantum efficiency (EQE) of the measured object is measured using an integrating sphere.
- the internal quantum efficiency (IQE) of the measured object is calculated using the standard PL spectrum of the measured object.
- the external quantum efficiency is the ratio of the number of emission photons emitted to the outside of the object to the number of excitation light photons absorbed by the object.
- the internal quantum efficiency is the ratio of the number of emission photons generated in the object to the number of excitation light photons absorbed in the object.
- the internal quantum efficiency of the measurement object can be calculated.
- the higher the crystallinity and the smaller the number of defects the higher the internal quantum efficiency tends to be (see Non-Patent Document 1).
- the internal quantum efficiency directly reflects the crystalline quality of the material, and by evaluating the crystalline quality of the wafer material during wafer manufacturing, it is possible to evaluate the factors that affect device life and performance.
- Measurement using an integrating sphere is to detect the light incident on the integrating sphere and the omnidirectional light generated from the object to be measured. For this reason, an integrating sphere is generally not used when measuring a standard PL spectrum of a measured object (see, for example, Non-Patent Document 2). However, in carrying out the ODPL measurement, from the viewpoint of convenience of measurement, it is preferable that the standard PL spectrum of the measured object can be measured while the measured object is placed on the integrating sphere.
- the present disclosure has been made to solve the above problems, and an object thereof is to provide a measuring apparatus capable of measuring a standard PL spectrum of an object to be measured while the object is placed in an integrating sphere. .
- a measurement apparatus includes an excitation light source that outputs excitation light, an integrating sphere in which an object to be measured is arranged, and an excitation light that guides the excitation light toward the object to be measured arranged in the integrating sphere.
- An optical system a photodetector for detecting light to be measured generated in an object to be measured within an integrating sphere by irradiation with excitation light, and a first detection optical system for guiding measurement light from the integrating sphere toward the photodetector.
- the first detection optical system has an opening that limits the detection range of the light to be measured in the photodetector, and the excitation optical system and the first detection optical system are connected to the measurement object in the integrating sphere and a separation optical element for separating the optical axis of the excitation light directed to and the optical axis of the light to be measured output from the integrating sphere and directed to the photodetector;
- the optical axis of the excitation light incident on the object to be measured in the integrating sphere in the excitation optical system and the first The optical axis of the light to be measured emitted from the integrating sphere in the detection optical system is obliquely crossed by the separation optical element and the first light collecting element, and the irradiation spot of the excitation light on the measurement object and the opening are located at the first
- the first condensing element and the second condensing element are in an optically conjugate relationship.
- the optical axis of the excitation light incident on the object to be measured in the integrating sphere in the excitation optical system and the optical axis of the light to be measured emitted from the integrating sphere in the first detection optical system are separated from each other by the separating optical element. It is obliquely crossed with one condensing element. This can prevent the excitation light reflected by the object to be measured in the integrating sphere from being directly detected by the photodetector. Further, in this measuring apparatus, the irradiation spot of the excitation light on the object to be measured arranged in the integrating sphere and the aperture arranged in the first detection optical system are combined into the first condenser element and the second condenser.
- the separation optical element may be composed of a perforated mirror having an opening through which the excitation light passes and a reflecting surface that reflects the light to be measured.
- the separation optical element can be configured easily.
- unnecessary attenuation of the intensity of the excitation light and the intensity of the light to be measured can be avoided.
- the optical axis of the excitation light incident on the integrating sphere may be inclined with respect to the surface of the measurement object, and the optical axis of the light to be measured emitted from the integrating sphere may be perpendicular to the surface of the measurement object. In this case, it becomes easy to construct the first detection optical system for guiding the light to be measured to the photodetector.
- the optical axis of the excitation light incident on the integrating sphere may be perpendicular to the surface of the measured object, and the optical axis of the light to be measured emitted from the integrating sphere may be inclined with respect to the surface of the measured object. In this case, it becomes easy to construct an excitation optical system that guides the excitation light to the object to be measured in the integrating sphere.
- the first condensing element may be arranged such that the surface of the object to be measured is positioned within the depth of focus of the first condensing element. This makes it easy to focus on the object to be measured even when the optical axis of the light to be measured is tilted with respect to the surface of the object.
- the measurement apparatus includes a second detection optical system that guides the light to be measured diffusely reflected within the integrating sphere from the integrating sphere toward the photodetector, and a first detection optical system and a second detection optical system for the photodetector. and a switching unit for optically connecting one of the detection optical systems.
- a second detection optical system that guides the light to be measured diffusely reflected within the integrating sphere from the integrating sphere toward the photodetector
- a first detection optical system and a second detection optical system for the photodetector for the photodetector.
- a switching unit for optically connecting one of the detection optical systems.
- the switching unit may include an attenuating element that is arranged to move back and forth on the optical axis of the light to be measured. In this case, saturation of the light to be measured in the photodetector can be preferably prevented.
- the standard PL spectrum of the measured object can be measured while the measured object is placed on the integrating sphere.
- FIG. 1 is a schematic diagram showing the configuration of a measuring device according to an embodiment of the present disclosure
- FIG. It is a figure which shows the calculation method of an external quantum efficiency.
- FIG. 4 is a diagram showing an example of a standard PL spectrum
- FIG. 4 is a schematic diagram showing an example of the configuration of a separation optical element
- FIG. 3 is a schematic diagram showing an optical connection state between an excitation optical system and a first detection optical system in standard PL spectrum measurement
- FIG. 4 is a schematic diagram showing an example of a configuration of a switching unit
- 2 is a flow chart of ODPL measurement using the measurement apparatus shown in FIG. 1
- 4 is a flow chart of preparation steps
- Fig. 3 is a flow chart of standard PL spectrum measurement steps
- FIG. 3 is a flow chart of an external quantum efficiency measurement step; 4 is a flowchart of an internal quantum efficiency calculation step; FIG. 4 is a schematic diagram showing a modification of the optical connection state between the excitation optical system and the first detection optical system in standard PL spectrum measurement.
- FIG. 10 is a schematic diagram showing another modification of the optical connection state between the excitation optical system and the first detection optical system in standard PL spectrum measurement;
- FIG. 10 is a schematic diagram showing another example of the configuration of the switching unit;
- FIG. 1 is a schematic diagram showing the configuration of a measuring device according to one embodiment of the present disclosure.
- a measuring apparatus 1 shown in the figure is configured as an apparatus for performing a non-destructive inspection of an object S to be measured, for example.
- a compound semiconductor crystal is exemplified as the object S to be measured.
- the measurement object S is a gallium nitride (GaN) semiconductor crystal.
- GaN semiconductor is a material expected to be applied to visible/ultraviolet light emitting devices, high frequency devices, and power devices. It is known that the characteristics of devices using GaN semiconductors are greatly affected by structural defects such as threading dislocations, point defects, and trace impurities.
- the measuring apparatus 1 is configured as an apparatus for inspecting both the distribution of structural defects in GaN semiconductor crystals and the quantification of defects in order to improve the yield of devices and promote mass production.
- omnidirectional photoluminescence measurement (hereinafter referred to as "ODPL measurement”) is performed on the measurement object S in order to inspect both the distribution of structural defects in the GaN semiconductor crystal and the quantitativeness of the defects.
- EQE external quantum efficiency
- IQE internal quantum efficiency
- the external quantum efficiency is the ratio of the number of emission photons emitted outside the object to the number of excitation light photons absorbed by the object.
- the graph shown in FIG. 2 shows the spectrum of the light to be measured (graph A in FIG. 2) output from the integrating sphere when the excitation light is input to the integrating sphere without placing the sample on the integrating sphere, and the sample on the integrating sphere. is shown as an example of the spectrum of light to be measured output from the integrating sphere when excitation light is input to the integrating sphere (graph B in FIG. 2).
- the number of photons of the excitation light absorbed by the object to be measured corresponds to the difference (region D1 in FIG.
- the internal quantum efficiency is the ratio of the number of emitted photons generated in the measured object to the number of excited light photons absorbed in the measured object.
- the external quantum efficiency is obtained by considering the influence of the light extraction efficiency from the measured object on the internal quantum efficiency.
- the light extraction efficiency from an object to be measured is a known value determined by the material of the object to be measured. For example, the light extraction efficiency of a GaN crystal is estimated to be 2.55% (see Non-Patent Document 2 above).
- the internal quantum efficiency of the measured object S can be derived.
- the higher the crystallinity and the smaller the number of defects the higher the internal quantum efficiency tends to be (eg, see Non-Patent Document 1 mentioned above).
- the internal quantum efficiency directly reflects the crystalline quality of the material, and by evaluating the crystalline quality of the wafer material during wafer manufacturing, it is possible to evaluate the factors that affect device life and performance.
- the measurement apparatus 1 includes an excitation light source 2, an excitation optical system 3, an integrating sphere 4, an XY stage 5, a photodetector 6, a first detection optical system 7, a second detection optical system 8 and a calculation unit 12 .
- an excitation optical system 3, an integrating sphere 4, a photodetector 6, a first detection optical system 7, and a second detection optical system 8 are placed in a housing 13 made of a member such as metal. Contained.
- the excitation light source 2 , the XY stage 5 , and the computing section 12 are externally attached to the housing 13 .
- the excitation light source 2 is a device that outputs excitation light L1 for the object S to be measured.
- the excitation light source 2 may be either a coherent light source or an incoherent light source.
- coherent light sources include excimer lasers (wavelength 193 nm), YAG laser second harmonics (wavelength 532 nm), YAG laser fourth harmonics (wavelength 266 nm), semiconductor lasers (e.g. InGaN semiconductor lasers (wavelength 375 nm to 530 nm), red semiconductor laser, infrared semiconductor laser), semiconductor-pumped all-solid-state UV laser (wavelength: 320 nm), HeCd laser (wavelength: 325 nm), or the like can be used.
- the excitation light L1 output from the excitation light source 2 may be either pulsed light or CW light.
- the excitation light source 2 may be, among the above light sources, YAG laser fourth harmonic (wavelength 266 nm), semiconductor excitation all-solid-state UV laser (wavelength 320 nm), HeCd laser (wavelength 325 nm). ) are used.
- the excitation optical system 3 is an optical system that guides the excitation light L1 toward the object S to be measured.
- the excitation optical system 3 includes, for example, a variable attenuation filter 16, a mirror 17, a separation optical element 18, and a lens 19 (first condensing element).
- the variable attenuation filter 16 is an element for changing the intensity of the excitation light L1 that irradiates the object S to be measured, and adjusts the intensity of the excitation light L1 directed toward the object S to be measured.
- the separation optical element 18 is an element that separates the optical axis of the excitation light L1 directed toward the measurement object S and the optical axis of the light to be measured L2 generated in the measurement object S by the irradiation of the excitation light L1.
- the separation optical element 18 is composed of a so-called perforated mirror. 22.
- the light to be measured L ⁇ b>2 is reflected at a position shifted from the opening 21 .
- the optical axis of the excitation light L1 directed toward the object S and the optical axis of the light to be measured L2 output from the integrating sphere 4 and directed toward the photodetector 6 are separated.
- the lens 19 is composed of, for example, a convex lens.
- the lens 19 converges the excitation light L1 toward the integrating sphere 4 onto the surface of the object S to be measured. That is, the lens 19 forms an irradiation spot La (see FIG. 5) of the excitation light L1 on the object S within the integrating sphere 4 . Also, the lens 19 collimates the light L2 to be measured from the integrating sphere 4 .
- the integrating sphere 4 is a device that spatially integrates light by diffusely reflecting it on the inner wall of the sphere with a reflective coating.
- the shape of the integrating sphere 4 is not limited to spherical, and may be hemispherical.
- a measurement object S is arranged inside the integrating sphere 4 .
- the tip of the arm 23 connected to the XY stage 5 extends inside the integrating sphere 4, and the tip of the arm 23 holds the object S to be measured. Thereby, the measurement object S can be scanned in the XY plane inside the integrating sphere 4 .
- the integrating sphere 4 has a first port 24 and a second port 25 .
- the first port 24 opens in a direction orthogonal to the scanning plane (XY plane) of the object S scanned by the XY stage 5 .
- the second port 25 opens in a direction (X direction or Y direction) orthogonal to the opening direction of the first port 24 .
- the first port 24 is for standard PL spectrum measurements and the second port 25 is for external quantum efficiency measurements.
- the excitation light L1 directed toward the object S by the excitation optical system 3 and the light L2 to be measured generated by the object S within the integrating sphere 4 are both transmitted through the first port 24 of the integrating sphere 4.
- the excitation light L1 directed toward the object S by the excitation optical system 3 passes through the first port 24, and the measured light L2 diffusely reflected in the integrating sphere 4 passes through the second port 25. It's becoming
- the photodetector 6 is a device that detects the light to be measured L2 generated at the object S within the integrating sphere 4 by irradiation with the excitation light L1.
- the photodetector 6 is optically connected to one of the first detection optical system 7 and the second detection optical system 8 via the switching section 31 .
- the photodetector 6 for example, CMOS, CCD, EM-CCD, photomultiplier tube, SiPM (MPPC), APD (SPAD), photodiode (including array type), etc. can be used.
- the photodetector 6 is composed of a BT-CCD (a multi-channel photodetector incorporating a back-thinned CCD).
- the photodetector 6 outputs a signal based on the detection result to the calculation section 12 .
- the photodetector 6 may incorporate an element (for example, a variable attenuation filter) for suppressing saturation of the light L2 to be measured.
- the first detection optical system 7 is an optical system that guides the light L2 to be measured from the integrating sphere 4 toward the photodetector 6 in standard PL spectrum measurement.
- the first detection optical system 7 includes a dichroic mirror 32, a mirror 33, and a lens 34 (second condensing element) in addition to the lens 19 and separation optical element 18 common to the excitation optical system 3. It is The light to be measured L2 output from the first port 24 of the integrating sphere 4 is guided by the first detection optical system 7 and input to the photodetector 6 via the photodetector input end 35 .
- FIG. 5 is a schematic diagram showing the optical connection state between the excitation optical system and the first detection optical system in standard PL spectrum measurement.
- the optical axis of the excitation light L1 toward the measurement object S and the optical axis of the excitation light L1 toward the measurement object S are separated by the separation optical element 18 described above.
- the optical axis of the excitation light L1 incident on the measurement object S is inclined with respect to the surface (XY plane) of the measurement object S, and the optical axis of the light L2 to be measured is the surface of the measurement object S ( XY plane).
- the optimum arrangement for standard PL measurement is to adopt a mode in which the PL component on the normal line can be measured as shown in FIG.
- the optical axis of the excitation light L1 may be perpendicular to the surface of the object S to be measured.
- the optical axis of the light L2 to be measured is inclined with respect to the surface of the measurement object S, but by using a shift lens or a tilt lens in the excitation optical system 3, the entire measurement object S can be brought into the range of the depth of field. It becomes possible to contain the light, and the measurement of the PL component becomes possible. Since the optical axis of the excitation light L1 and the optical axis of the light L2 to be measured obliquely intersect in this manner, the excitation light L1 reflected by the object S in the integrating sphere 4 is directly detected by the photodetector 6. can be prevented.
- the first detection optical system 7 is provided with an opening 36 that limits the detection range of the light L2 to be measured in the photodetector 6 .
- the photodetector 6 is a fiber input type detector.
- the photodetector input end 35 is configured by a bundle fiber 37 in which the strands of optical fibers are bundled. Therefore, in this embodiment, the end surface 37a of the bundle fiber 37 corresponds to the opening 36 that limits the detection range of the light L2 to be measured in the photodetector 6. As shown in FIG.
- the excitation light L1 directed toward the measurement object S is condensed by the lens 19 and forms an image on the surface of the measurement object S.
- the light to be measured L2 generated in the object S by the irradiation of the excitation light L1 is collimated by the lens 19, then condensed by the lens 34, and formed into an image on the end surface 37a (opening 36) of the bundle fiber 37. . That is, the irradiation spot La of the excitation light L1 on the measurement object S and the aperture 36 are in an optically conjugate relationship.
- the measurement apparatus 1 can measure the standard PL spectrum of the measurement object S while the measurement object S is placed on the integrating sphere 4 .
- the second detection optical system 8 is an optical system that guides the measured light L2 diffusely reflected in the integrating sphere 4 from the integrating sphere 4 toward the photodetector 6 in the external quantum efficiency measurement.
- the light to be measured L2 output from the second port 25 of the integrating sphere 4 passes through a photodetector input end 38 separate from the first detection optical system 7 and reaches the photodetector. 6.
- the photodetector input end 38 is, for example, similar to the photodetector input end 35 of the first detection optical system 7, and is composed of a bundle fiber 39 (see FIG. 6) in which optical fibers are bundled together.
- the switching section 31 is a section that optically connects one of the first detection optical system 7 and the second detection optical system 8 to the photodetector 6 .
- the switching unit 31 includes, for example, a pair of light guides 41A and 41B and an off-axis parabolic mirror 42, as shown in FIG.
- a photodetector input end 35 (bundle fiber 37) on the first detection optical system 7 side is optically connected to the light guide 41A.
- a photodetector input end 38 (bundle fiber 39) on the second detection optical system 8 side is optically connected to the light guide 41B.
- the direction of the reflecting surface of the off-axis parabolic mirror 42 is variable by a driving means such as a stepping motor.
- the off-axis parabolic mirror 42 is optically coupled to one of the light guides 41A and 41B, only one of the excitation light L1 from the light guide 41A and the excitation light L1 from the light guide 41B reaches the photodetector 6. Light is guided toward
- the calculation unit 12 is a part that calculates the external quantum efficiency and the internal quantum efficiency of the measurement object S based on the signal output from the photodetector 6 .
- it is a computer system configured with memory such as RAM and ROM, processor (arithmetic circuit) such as CPU, communication interface, storage unit such as hard disk, and display unit such as display. Examples of computer systems include personal computers, cloud servers, and smart devices (smartphones, tablet terminals, etc.).
- the arithmetic unit 12 may be configured by a PLC (programmable logic controller), or may be configured by an integrated circuit such as an FPGA (Field-programmable gate array).
- the calculation unit 12 In the standard PL spectrum measurement, the calculation unit 12 generates measurement data of the standard PL spectrum based on the signal output from the photodetector 6, and stores the measurement data in the storage unit.
- the calculation unit 12 calculates the external quantum efficiency of the measurement object S based on the signals (measurement signal and reference signal) output from the photodetector 6, and stores the calculated data in the storage unit. Further, the calculation unit 12 calculates the internal quantum efficiency of the measurement object S based on the measurement data of the standard PL spectrum and the calculation data of the external quantum efficiency, and stores the calculation data in the storage unit.
- the calculation unit 12 may output the obtained measurement data of the standard PL spectrum, the calculation data of the external quantum efficiency, and the calculation data of the internal quantum efficiency to a monitor or the like.
- FIG. 7 is a flowchart of ODPL measurement using the measurement device. As shown in the figure, in the ODPL measurement using the measurement apparatus 1, a preparation step (step S01), a standard PL spectrum measurement step (step S02), an external quantum efficiency measurement step (step S03), an internal quantum efficiency calculation step ( Step S04) is performed in order.
- the switching unit 31 is set (step S11).
- the off-axis parabolic mirror 42 of the switching unit 31 is driven to optically connect the second detection optical system 8 to the photodetector 6 .
- the excitation light L1 is output from the excitation light source 2 (step S12), and the intensity of the excitation light L1 is adjusted (step S13).
- the intensity of the excitation light L1 is adjusted by the variable attenuation filter 16 or the variable attenuation filter incorporated in the photodetector 6 so that the light output from the integrating sphere 4 due to the incidence of the excitation light L1 does not saturate the photodetector 6. etc. is adjusted.
- step S14 After adjusting the intensity of the excitation light L1, the output of the excitation light L1 is stopped (step S14). Then, the arm 23 of the XY stage 5 is removed from the integrating sphere 4, the object S is held, and the object S is placed in the integrating sphere 4 while being held by the arm 23 (step S15).
- the switching unit 31 is set (step S21).
- the off-axis parabolic mirror 42 of the switching unit 31 is driven to optically connect the first detection optical system 7 to the photodetector 6 .
- the excitation light L1 is emitted from the excitation light source 2 to enter the measurement object S in the integrating sphere 4 (step S22), and the exposure time of the photodetector 6 is set (step S23).
- the light to be measured L2 output from the first port 24 of the integrating sphere 4 by irradiation with the excitation light L1 is guided to the photodetector 6 by the first detection optical system 7.
- standard PL spectrum measurement of the object S is performed (step S24).
- the output of the excitation light is stopped (step S25), and the measurement data is saved (step S26).
- the switching unit 31 is set (step S31).
- the off-axis parabolic mirror 42 of the switching unit 31 is driven to optically connect the second detection optical system 8 to the photodetector 6 .
- the excitation light L1 is emitted from the excitation light source 2 to enter the measurement object S in the integrating sphere 4 (step S32), and the exposure time of the photodetector 6 is set (step S33).
- the light to be measured L2 output from the second port 25 of the integrating sphere 4 by irradiation with the excitation light L1 is guided to the photodetector 6 by the second detection optical system 8.
- diffuse reflected light is measured (step S34).
- the output of the excitation light L1 is stopped (step S35), and the measurement object S is taken out from the integrating sphere 4 (step S36).
- the output of the excitation light L1 is started again (step S37), and the reference measurement is performed (step S38).
- the reference measurement the light to be measured L2 output from the second port 25 of the integrating sphere 4 is guided to the photodetector 6 by the second detection optical system 8 while the measurement object S is not placed on the integrating sphere 4. Then, diffuse reflected light is measured (step S38). After the measurement is finished, the output of the excitation light L1 is stopped (step S39).
- step S40 the external quantum efficiency of the measurement object S is calculated (step S40), and the calculated data is stored (step S41).
- the measurement data of the standard PL spectrum measurement saved in step S26 and the calculation data of the external quantum efficiency saved in step S41 are read (step S51).
- the internal quantum efficiency of the measurement object S is calculated based on the measurement data of the read standard PL spectrum measurement, the calculation data of the external quantum efficiency, and the light extraction efficiency of the measurement object S, which is known by the material. (step S52).
- the calculated data is saved, and the process is completed (step S53).
- the optical axis of the excitation light L1 incident on the object S in the integrating sphere 4 in the excitation optical system 3 and the optical axis of the excitation light L1 emitted from the integrating sphere 4 in the first detection optical system 7 The separation optical element 18 and the lens 19 obliquely cross the optical axis of the light L2 to be measured. As a result, the excitation light L1 reflected by the object S within the integrating sphere 4 can be prevented from being directly detected by the photodetector 6 .
- the irradiation spot La of the excitation light L1 on the object S placed in the integrating sphere 4 and the aperture 36 placed in the first detection optical system 7 are formed by the lens 19 and the lens 34 are in an optically conjugate relationship.
- the influence of multiple scattering within the integrating sphere 4 can be suppressed, and only the light to be measured L2 generated on the surface of the object S due to the incidence of the excitation light L1 can be extracted from the integrating sphere 4 and detected. . Therefore, with this measurement apparatus 1, the standard PL spectrum of the measurement object S can be measured while the measurement object S is placed on the integrating sphere 4.
- the separation optical element 18 is configured by a perforated mirror having an opening 21 for passing the excitation light L1 and a reflecting surface 22 for reflecting the light L2 to be measured.
- the separation optical element 18 can be configured easily.
- unnecessary attenuation of the intensity of the excitation light L1 and the intensity of the light L2 to be measured can be avoided compared to the case where the optical axis of the excitation light L1 and the optical axis of the light L2 to be measured are separated using a filter or the like.
- the optical axis of the excitation light L1 incident on the integrating sphere 4 is inclined with respect to the surface of the object S to be measured, and the optical axis of the light to be measured L2 emitted from the integrating sphere 4 is aligned with the surface of the object S to be measured. is perpendicular to In this case, construction of the first detection optical system 7 for guiding the light L2 to be measured to the photodetector 6 is facilitated.
- the measurement apparatus 1 includes a second detection optical system 8 that guides the light L2 to be measured diffusely reflected in the integrating sphere 4 from the integrating sphere 4 toward the photodetector 6; and a switching unit 31 for optically connecting one of the first detection optical system 7 and the second detection optical system 8 with respect to.
- the second detection optical system 8 is used to guide the light to be measured L2 diffusely reflected in the integrating sphere 4 from the integrating sphere 4 toward the photodetector 6. Measurements of the external quantum efficiency of the entity S can be performed.
- the same measurement of the standard PL spectrum and the measurement of the external quantum efficiency can be performed while maintaining the state where the measurement object S is placed on the integrating sphere 4. Can be performed in-house.
- the present disclosure is not limited to the above embodiments.
- the optical axis of the excitation light L1 incident on the integrating sphere 4 is inclined with respect to the surface of the measurement object S, and the optical axis of the light to be measured L2 emitted from the integrating sphere 4 is aligned with the surface of the measurement object S.
- An embodiment that is perpendicular to is exemplified.
- the relationship between the inclinations of the optical axis of the excitation light L1 and the optical axis of the light L2 to be measured may be reversed. That is, as shown in FIG.
- the optical axis of the excitation light L1 incident on the integrating sphere 4 is perpendicular to the surface of the measurement object S, and the optical axis of the light to be measured L2 emitted from the integrating sphere 4 is It may be inclined with respect to the surface of the object S to be measured. In this case, construction of the excitation optical system 3 that guides the excitation light L1 to the measurement object S within the integrating sphere 4 is facilitated.
- the lens 19 is arranged so that the surface of the measurement object S is positioned within the focal depth of the lens 19 .
- a lens with a deep depth of field, a tilt lens, or a shift lens may be used. In this case, it is possible to focus on the entire detection range of the photodetector 6 on the surface of the object S to be measured. This makes it easy to focus on the object S even when the optical axis of the light L2 to be measured is inclined with respect to the surface of the object S to be measured.
- an integrating hemisphere 4A may be used instead of the integrating sphere 4, instead of the integrating sphere 4, an integrating hemisphere 4A may be used.
- the integrating hemisphere 4A has a first port 24A and a second port 25A.
- the first port 24A is opened in a direction inclined to the scanning plane (XY plane) of the measurement object S by the XY stage 5 .
- the second port 25A opens in a direction perpendicular to the scanning plane (XY plane) of the object S scanned by the XY stage 5 .
- the excitation light L1 directed toward the object S by the excitation optical system 3 is condensed by the lens 51 and enters the integrating hemisphere 4A through the first port 24A of the integrating hemisphere 4A. Also, the light L2 to be measured generated by the measurement object S in the integrating hemisphere 4A passes through the second port 25A of the integrating hemisphere 4A, exits from the integrating hemisphere 4A, and is collimated by the lens 52.
- the optical axis of the excitation light L1 incident on the object S in the integrating hemisphere 4A in the excitation optical system 3 and the light to be measured L2 emitted from the integrating hemisphere 4A in the first detection optical system 7 The optical axis can be obliquely crossed by the separation optical element 18 and the lens 51 .
- FIG. 14 is a schematic diagram showing another example of the configuration of the switching unit.
- the switching section 61 according to this modified example has a base section 71 , an input section 72 , a filter unit 73 (attenuation element), and an output section 74 .
- the base portion 71 has a rectangular plate shape, for example, and extends in one direction from the input portions 72A and 72B toward the output portion 74 side.
- the input unit 72 is provided with a pair of input terminals 75A and 75B and a pair of mirrors 76 and 77.
- the input terminal 75A is optically connected to the photodetector input end 35 (bundle fiber 37) on the first detection optical system 7 side.
- the device input end 38 (bundle fiber 39) is optically connected.
- the filter unit 73 is arranged between the input section 72 and the output section 74 .
- the filter unit 73 is composed of a neutral density filter unit 81 and a low-pass filter unit 82 .
- the neutral density filter unit 81 has, for example, three neutral density filters 81A to 81C with different degrees of light attenuation.
- the low-pass filter unit 82 has, for example, three low-pass filters 82A-82C with different cut wavelengths.
- the output section 74 is provided with an output terminal 83 and a mirror 84 .
- the output terminal 83 is optically connected to the photodetector 6 .
- the input section 72, the neutral density filter unit 81, and the low-pass filter unit 82 are slidable in a direction orthogonal to the extending direction of the base section 71, for example.
- the sliding of the input section 72 optically connects one of the mirrors 76 and 77 to the mirror 84 of the output section 74 .
- only one of the measured light L2 from the input terminal 75A and the measured light L2 from the input terminal 75B is guided toward the photodetector 6.
- the dimmer filters 81A to 81C and the low-pass filters 82A to 82C advance and retreat on the optical axis of the light L2 to be measured between the input section 72 and the output section 74. It is free.
- the intensity of the light L2 to be measured output from the output terminal 83 can be adjusted in multiple stages, and the saturation of the light L2 to be measured at the photodetector 6 can be preferably prevented.
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Abstract
Description
[測定装置の概略]
[測定装置の構成]
[測定装置を用いたODPL測定の実施手順]
以上説明したように、この測定装置1では、励起光学系3において積分球4内の測定物Sに入射する励起光L1の光軸と、第1の検出光学系7において積分球4から出射する被測定光L2の光軸とが分離光学素子18とレンズ19とによって斜交している。これにより、積分球4内の測定物Sで反射した励起光L1が光検出器6で直接検出されることを防止できる。また、この測定装置1では、積分球4内に配置された測定物S上の励起光L1の照射スポットLaと、第1の検出光学系7に配置された開口部36とがレンズ19とレンズ34とによって光学的に共役な関係となっている。これにより、積分球4内での多重散乱の影響を抑制でき、励起光L1の入射によって測定物Sの表面で発生した被測定光L2のみを積分球4から取り出して検出することが可能となる。したがって、この測定装置1では、積分球4に測定物Sを配置したままの状態で測定物Sの標準PLスペクトルの測定を実施できる。
本開示は、上記実施形態に限られるものではない。上記実施形態では、積分球4に入射する励起光L1の光軸が測定物Sの表面に対して傾斜しており、積分球4から出射する被測定光L2の光軸が測定物Sの表面に対して垂直となっている態様を例示した。しかしながら、励起光L1の光軸及び被測定光L2の光軸の傾斜の関係は、反転していてもよい。すなわち、図12に示すように、積分球4に入射する励起光L1の光軸が測定物Sの表面に対して垂直となっており、積分球4から出射する被測定光L2の光軸が測定物Sの表面に対して傾斜していてもよい。この場合、積分球4内の測定物Sに励起光L1を導光する励起光学系3の構築が容易となる。
Claims (7)
- 励起光を出力する励起光源と、
測定物が内部に配置される積分球と、
前記積分球に配置された前記測定物に向けて前記励起光を導光する励起光学系と、
前記励起光の照射によって前記積分球内の前記測定物で生じた被測定光を検出する光検出器と、
前記積分球から前記光検出器に向けて前記被測定光を導光する第1の検出光学系と、を備え、
前記第1の検出光学系は、前記光検出器における前記被測定光の検出範囲を制限する開口部を有し、
前記励起光学系及び前記第1の検出光学系は、前記積分球内の前記測定物に向かう前記励起光の光軸と、前記積分球から出力して前記光検出器に向かう前記被測定光の光軸とを分離する分離光学素子と、
前記測定物上に前記励起光の照射スポットを形成する第1の集光素子と、
前記開口部に前記被測定光を集光する第2の集光素子と、を有し、
前記励起光学系において前記積分球内の前記測定物に入射する前記励起光の光軸と、前記第1の検出光学系において前記積分球から出射する前記被測定光の光軸とは、前記分離光学素子と前記第1の集光素子とによって斜交し、
前記測定物上の前記励起光の照射スポットと前記開口部とは、前記第1の集光素子と前記第2の集光素子とによって光学的に共役な関係となっている測定装置。 - 前記分離光学素子は、前記励起光を通過させる開口部と、前記被測定光を反射する反射面とを有する孔開きミラーによって構成されている請求項1記載の測定装置。
- 前記積分球に入射する励起光の光軸が前記測定物の表面に対して傾斜しており、前記積分球から出射する前記被測定光の光軸が前記測定物の表面に対して垂直となっている請求項1又は2記載の測定装置。
- 積分球に入射する励起光の光軸が測定物の表面に対して垂直となっており、積分球から出射する被測定光の光軸が測定物の表面に対して傾斜している請求項1又は2記載の測定装置。
- 前記第1の集光素子は、当該第1の集光素子の焦点深度内に前記測定物の表面が位置するように配置されている請求項4記載の測定装置。
- 前記積分球内で拡散反射した前記被測定光を前記積分球から前記光検出器に向けて導光する第2の検出光学系と、
前記光検出器に対して前記第1の検出光学系及び前記第2の検出光学系の一方を光学的に接続する切替部と、を更に備える請求項1~5のいずれか一項記載の測定装置。 - 前記切替部は、前記被測定光の光軸上に進退自在に配置された減衰素子を含んで構成されている請求項6記載の測定装置。
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