WO2022254779A1 - Sensor - Google Patents

Sensor Download PDF

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Publication number
WO2022254779A1
WO2022254779A1 PCT/JP2022/002793 JP2022002793W WO2022254779A1 WO 2022254779 A1 WO2022254779 A1 WO 2022254779A1 JP 2022002793 W JP2022002793 W JP 2022002793W WO 2022254779 A1 WO2022254779 A1 WO 2022254779A1
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WO
WIPO (PCT)
Prior art keywords
power generation
sensor
voltage
movable member
generation unit
Prior art date
Application number
PCT/JP2022/002793
Other languages
French (fr)
Japanese (ja)
Inventor
優作 清水
雅明 野田
泰明 亀山
清仁 丸尾
悠佑 長田
康平 橘田
Original Assignee
パナソニックＩｐマネジメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パナソニックＩｐマネジメント株式会社 filed Critical パナソニックＩｐマネジメント株式会社
Publication of WO2022254779A1 publication Critical patent/WO2022254779A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H13/00—Switches having rectilinearly-movable operating part or parts adapted for pushing or pulling in one direction only, e.g. push-button switch
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators

Definitions

  • the present disclosure relates to sensors. More particularly, the present disclosure relates to sensors that operate on electrical power generated in response to movement of a moveable member.
  • Patent Literature 1 includes a cylinder body, a piston member attached to the cylinder body so as to be able to advance and retreat, a position detection mechanism capable of detecting the position of the piston member, and an interlocking rod that advances and retreats in conjunction with the piston member.
  • a conventional hydraulic cylinder is disclosed.
  • the position detection mechanism includes a forward position detection switch that detects that the detected part provided on the interlocking rod has moved to the forward setting position, and a backward position detection switch that detects that the detected part has moved to the backward limit position. and have.
  • the sensor includes a movable member, a return spring, a power generation unit, a battery, and a transmission unit.
  • the movable member is movable between a first position and a second position located below the first position.
  • the return spring applies an upward return force to the movable member.
  • the power generation unit generates power by moving the movable member.
  • the transmitting unit transmits radio signals.
  • the power generation unit includes a first power generation section and a second power generation section. Each of the first power generation section and the second power generation section generates power by bending according to the movement of the movable member. As the movable member moves from the first position to the second position, the first power generating section generates a first voltage.
  • the second power generating section After the movable member that has moved to the second position receives the restoring force of the return spring and moves to an intermediate position between the second position and the first position, the movable member moves from the intermediate position to the By moving to the second position, the second power generating section generates a second voltage.
  • the first voltage is a voltage equal to or higher than an activation voltage required to activate the transmission unit
  • the second voltage is a voltage lower than the activation voltage.
  • the transmission unit receives power from the power generation unit and transmits a first signal when the power generation unit generates the first voltage, and transmits a first signal when the power generation unit generates the second voltage. It receives power from the battery and transmits the second signal.
  • This sensor can reduce the possibility of damage.
  • FIG. 1 is a cross-sectional view of the sensor of one embodiment of the present disclosure when it returns slightly from the ON state.
  • FIG. 2 is a schematic block diagram of the same sensor.
  • 3 is a cross-sectional view of the B1 portion of the sensor in FIG. 1.
  • FIG. 4 is a cross-sectional view of the same sensor in the OFF state.
  • FIG. 5 is a cross-sectional view of the same sensor just before switching from an off state to an on state.
  • FIG. 6 is a cross-sectional view of the same sensor in the ON state.
  • FIG. 7 is a cross-sectional view of the same sensor when the movable member is pushed to the limit position.
  • FIG. 8 is an external perspective view of the same sensor held by a stopper member.
  • FIG. 9 is a perspective view of a state in which the same sensor and stopper member are separated.
  • FIG. 10 is a perspective view of the same sensor attached to a cylinder that drives the slide table.
  • FIG. 11 is a plan view of the same sensor attached to a cylinder.
  • FIG. 12 is a plan view of the first return state of the same cylinder.
  • FIG. 13 is a plan view of the second return state of the same cylinder.
  • FIG. 14 is an enlarged plan view of a main part of the same cylinder.
  • FIG. 15 is a perspective view of the cylinder of Application 1 as seen from the rear right.
  • FIG. 16 is a perspective view of the cylinder of Application 1 as seen from the rear left.
  • 17 is a front view of the closed state of the cylinder of Application Example 1.
  • FIG. 15 is a perspective view of the cylinder of Application 1 as seen from the rear right.
  • FIG. 16 is a perspective view of the cylinder of Application 1 as seen from the rear left.
  • 17
  • FIG. 18 is a front view of an open state of the cylinder of Application Example 1.
  • FIG. 19 is a front view of the first return state of the cylinder of Application Example 1.
  • FIG. 20 is a front view of the second return state of the cylinder of Application Example 1.
  • FIG. 21 is a perspective view of a cylinder of application example 2.
  • FIG. 22 is a perspective view of the cylinder of Application Example 2 with the rim plate removed.
  • 23 is a front view of the closed state of the link mechanism of the cylinder of Application Example 2.
  • FIG. 24 is a perspective view of the closed state of the link mechanism of the cylinder of Application Example 2.
  • FIG. 25 is a front view of the open state of the link mechanism of the cylinder of Application Example 2.
  • FIG. 26 is a perspective view of the open state of the link mechanism of the cylinder of Application Example 2.
  • FIG. 27 is a front view of an intermediate state showing the link mechanism of the cylinder of Application Example 2.
  • the movable member 13 is movable between a position PT1 (position in the OFF state shown in FIG. 4) and a position PT2 (position in the ON state shown in FIG. 6) located below the position PT1.
  • the return spring 14 applies a return force in the upward direction Du to the movable member 13 .
  • the power generation unit 20 generates power as the movable member 13 moves.
  • the transmission unit 33 transmits radio signals.
  • the power generation unit 20 includes a power generation section 21 and a power generation section 22 .
  • the power generation section 21 and the power generation section 22 each generate power by bending according to the movement of the movable member 13 .
  • the power generating section 21 By moving the movable member 13 from the position PT1 to the position PT2, the power generating section 21 generates the first voltage.
  • the power generating section 22 After the movable member 13 moved to the position PT2 receives the restoring force of the return spring 14 and moves to the intermediate position PT3 (the position shown in FIG. 1) between the positions PT2 and PT1, the movable member 13 returns to the intermediate position PT3. to the position PT2, the power generating section 22 generates the second voltage.
  • the first voltage is a voltage equal to or higher than the activation voltage necessary for activating the transmission unit 33, and the second voltage is a voltage less than the activation voltage.
  • the transmission unit 33 receives power from the power generation unit 20 and transmits the first signal.
  • the transmission unit 33 receives power from the battery 30 and transmits the second signal when the power generation unit 20 generates the second voltage.
  • the startup voltage is the lower limit value of the voltage range in which the transmission unit 33 can perform the transmission operation of transmitting the wireless signal.
  • the starting voltage is the lower limit of the operating voltage range of the IC for wireless communication.
  • the transmission unit 33 of the sensor A1 can be activated by being supplied with the first voltage from the power generation section 21 and can transmit the first signal when the movable member 13 moves in the downward direction Dd from the position PT1 to the position PT2. Further, when the movable member 13 moves from the position PT2 to the intermediate position PT3 by the restoring force of the return spring 14 and then moves from the intermediate position PT3 to the position PT2, the second voltage generated by the power generating section 22 is less than the starting voltage. , the sending unit 33 cannot be activated. In this case, the transmission unit 33 is triggered by the generation of the second voltage by the power generation unit 20 and receives power from the battery 30 to transmit the second signal. Even if there is, the transmitting unit 33 can transmit the second signal.
  • the transmission unit 33 can transmit the first signal and the second signal without receiving power supply from the outside, the sensor A1 does not need wires for power supply and signal transmission. If a wire for power supply and signal transmission is connected to the sensor A1, disconnection of the wire may occur, but the sensor A1 of this embodiment does not require a wire for power supply and signal transmission. As such, the likelihood of damage can be reduced. Moreover, since the sensor A1 of this embodiment does not require electric wires for power supply and signal transmission, there is an advantage that the degree of freedom of the installation position of the sensor A1 is improved.
  • the forward position detection switch and the reverse position detection switch provided in the conventional fluid pressure cylinder described above are each composed of a limit switch, and the position detection mechanism is connected to the limit switch with an electric wire.
  • a fluid pressure cylinder is used, for example, as a manipulator of a robot, there is a possibility that the movement of the manipulator may damage the wires connected to the position detection mechanism by rubbing against parts such as the manipulator.
  • the sensor A1 of this embodiment does not require wires for power supply and signal transmission, so it is possible to reduce the possibility of damage to the wires.
  • the sensor A1 has a power generation unit 20 that performs so-called environmental power generation (energy harvesting).
  • the movable member 13 receives the restoring force of the return spring 14 and the like and moves to the position PT1 as shown in FIG.
  • the first voltage generated by the power generation unit 20 (specifically, the power generation section 21) causes the transmission unit to 33 activates and transmits the first signal.
  • the senor A1 is applied to, for example, the cylinder SY1 (see FIGS. 10 to 14) that reciprocates the slide table 905, and is used to detect the position of the slide table 905.
  • An operation member 906 that moves together with the slide table 905 is fixed to the slide table 905 .
  • Sensors A1 are attached to cylinder SY1 at both ends 1906 and 2906 of movement range W906 of operating member 906, respectively.
  • Two sensors A1 attached to cylinder SY1 include sensor A11 that detects movement of actuating member 906 to end 1906 and sensor A12 that detects movement of actuating member 906 to end 2906.
  • the sensor A1 has a housing 10 that houses the movable member 13, the return spring 14, the power generation unit 20, the battery 30, the transmission unit 33, and the like.
  • the direction in which the return spring 14 pushes the movable member 13 is the upward direction Du, and the upward direction Du, the downward direction Dd, and the leftward direction indicated by arrows in FIGS. Dl and the right direction Dr are defined as the upward direction, downward direction, left direction and right direction of the sensor A1, respectively, and the forward direction Df and the rearward direction Db indicated by arrows in FIG. 8 are respectively defined as the forward direction and the rearward direction of the sensor A1. do.
  • the right direction Dr and the left direction Dl cross the upward direction Du and the downward direction Dd.
  • the forward direction Df and the backward direction Db cross the upward direction Du, the downward direction Dd, the right direction Dr, and the left direction Dl.
  • the right direction Dr and the left direction Dl are perpendicular to the upward direction Du and the downward direction Dd.
  • the forward direction Df and the rearward direction Db are perpendicular to the upward direction Du, the downward direction Dd, the right direction Dr and the left direction Dl.
  • these directions are defined for convenience of explanation, and do not define directions when the sensor A1 is actually used.
  • the housing 10 includes a base 11 made of metal material or synthetic resin, and a cover 12 made of synthetic resin or the like.
  • the base 11 is formed in the shape of a rectangular parallelepiped whose height dimension is smaller than the dimensions of the long and short sides of the bottom surface.
  • the cover 12 is formed in a box shape having an opening on the entire lower surface.
  • a base 11 is attached to the cover 12 so as to close the opening on the bottom surface.
  • the inside of the housing 10 accommodates components such as the movable member 13, the return spring 14, the power generation unit 20, the circuit board 25, and the movable block 40. ing. Components such as a battery 30 and a transmission unit 33 are mounted on the circuit board 25 .
  • the movable member 13 has a columnar operating portion 131 that is pushed downward Dd by the operating member 906 .
  • the operation unit 131 is inserted from below into a through hole 121 (see FIG. 1) provided in the upper surface of the cover 12 and exposed to the outside of the housing 10 through the through hole 121 .
  • the movable member 13 is provided with a through hole 132 into which the pole 111 protruding from the base 11 in the upward direction Du is inserted.
  • a return spring 14 such as a coil spring is inserted in the pole 111 .
  • the movable member 13 is attached to the base 11 with the pole 111 inserted into the through hole 132 , and the return spring 14 is arranged between the movable member 13 and the base 11 .
  • the movable member 13 is guided by the pole 111 so as to be movable in the upward direction Du and the downward direction Dd between the positions PT1 and PT2.
  • an axis AX1 is defined along the direction in which the movable member 13 moves (the upward direction Du or the downward direction Dd). That is, the movable member 13 can move in the upward direction Du and the downward direction Dd along the axis AX1 between the positions PT1 and PT2.
  • the movable member 13 is pushed in the upward direction Du by the return spring 14, and the movable member 13 is positioned at the upper end of the movement range, that is, at the position PT1 in a state where the force in the downward direction Dd is not applied to the operating portion 131. .
  • a protective cover 16 made of, for example, elastic synthetic resin is attached to a portion of the movable member 13 exposed from the through-hole 121 (that is, the operation portion 131). This reduces the possibility of water, dust, or the like entering the interior of the housing 10 through the gap between the operation portion 131 and the through hole 121 .
  • the power generation unit 20 includes a power generation section 21 and a power generation section 22 . Moreover, the power generation unit 20 further includes a power generation section 23 .
  • the power generation unit 21 and the power generation unit 22 have a common configuration.
  • Each of the power generation section 21 and the power generation section 22 has a vibrating body 241 , a piezoelectric element 242 and a weight 243 .
  • the power generation section 21 and the power generation section 22 are held by a base 15 fixed to the upper surface of the base 11 .
  • the base 15 includes a plate-like stopper piece 151 arranged along the upper surface of the base 11 , a connecting piece 152 projecting from the left end of the stopper piece 151 in the upward direction Du, and arranged parallel to the stopper piece 151 . and a stopper piece 153 whose left end is connected to the connecting piece 152 .
  • the pair of stopper pieces 151 and 153 and the connecting piece 152 are each made of a soft magnetic material, and the shape of the base 15 as viewed from the side is C-shaped as a whole.
  • the power generating section 21 is held between the connecting piece 152 and the upper stopper piece 153, and the power generating section 22 is held between the connecting piece 152 and the lower stopper piece 151.
  • the vibrating body 241 is formed in a rectangular plate shape from a soft magnetic plate material having elasticity, for example, a stainless steel plate. A left end of the vibrating body 241 is fixed to the base 15 , and the vibrating body 241 projects rightward from the base 15 .
  • a weight 243 is attached to the right end of the vibrating body 241 .
  • the weight 243 is made of, for example, a soft magnetic material and has a plate shape.
  • a weight 243 is attached to the lower surface of the vibrating body 241 in the power generating section 21
  • a weight 243 is attached to the upper surface of the vibrating body 241 in the power generating section 22 .
  • One piezoelectric element 242 is provided on each of the upper and lower surfaces of the vibrating body 241 .
  • the piezoelectric element 242 bends together with the vibrating body 241 when the right end of the vibrating body 241 bends in the upward direction Du or the downward direction Dd, and generates a voltage corresponding to the amount of bending. That is, the power generation section 22 includes the piezoelectric element 242 that bends as the movable member 13 moves.
  • the material of the piezoelectric element 242 is preferably piezoelectric ceramics such as lead zirconate titanate (Pb(Zr.Ti)O3).
  • the material forming the piezoelectric element 242 may be piezoelectric ceramics such as lead titanate (PbTiO3), lead metaniobate (PbNb2O6), bismuth titanate (Bi4Ti3O12). Since the power generation unit 22 generates power using the piezoelectric element 242, it is possible to reduce the possibility of malfunction of the sensor A1 even in an environment where electromagnetic noise exists, such as a site where spot welding is performed.
  • PbTiO3 lead titanate
  • PbNb2O6 lead metaniobate
  • Bi4Ti3O12 bismuth titanate
  • the right end portions of the weights 243 included in the power generation section 21 and the power generation section 22 are inserted into the through holes 154 provided in the stopper pieces 151 and 153, respectively, and the right end portions of the weights 243 are aligned with the rims of the through holes 154.
  • the amount of deflection of the vibrating body 241 is limited by the contact.
  • the power generation unit 23 has a core (iron core) 231 , a coil 232 and a movable block 40 .
  • the core 231 is formed in a columnar shape from a soft magnetic material such as pure iron or magnetic stainless steel, and is fixed to the right side surface of the connecting piece 152 using screws or the like.
  • the core 231 protrudes in the right direction Dr from the right side surface of the connecting piece 152 .
  • a coil 232 is attached to the core 231 .
  • the coil 232 is formed in a cylindrical shape by winding a wire (enameled wire) around a coil bobbin, and the core 231 is inserted into a hole of the coil bobbin.
  • the coil 232 may be a bobbinless coil in which an electric wire whose conductor is covered with a self-bonding insulator is spirally wound.
  • the movable block 40 has a permanent magnet 41, a pair of yokes 42, and a holder 43, as shown in FIGS.
  • the permanent magnet 41 is, for example, a rectangular parallelepiped neodymium magnet. However, the permanent magnet 41 may be a magnet other than a neodymium magnet, such as a samarium-cobalt magnet.
  • the permanent magnet 41 is magnetized in the vertical direction, for example, the upper part is the N pole and the lower part is the S pole.
  • Each of the pair of yokes 42 is made of a soft magnetic material and formed into a flat plate shape.
  • a pair of yokes 42 are arranged one each on the upper surface and the lower surface of the permanent magnet 41 .
  • Each of the pair of yokes 42 has a yoke piece 421 and a yoke piece 422 .
  • the yoke piece 421 is formed in a rectangular flat plate shape.
  • the yoke piece 421 is arranged along the top or bottom surface of the permanent magnet 41 .
  • the yoke piece 422 is formed in a rectangular flat plate shape.
  • the yoke piece 422 protrudes from the left end of the yoke piece 421 in the thickness direction (vertical direction) of the yoke piece 421 .
  • the holder 43 is made of a non-magnetic material such as aluminum or synthetic resin.
  • the holder 43 holds the permanent magnet 41 and the pair of yokes 42 .
  • the holder 43 holds the permanent magnet 41 and the pair of yokes 42 such that the permanent magnet 41 is sandwiched between the yoke pieces 421 of the pair of yokes 42 .
  • the yoke pieces 422 of the pair of yokes 42 are arranged on the left side of the permanent magnet 41 and face each other while being spaced apart.
  • the permanent magnet 41 and the pair of yokes 42 held by the holder 43 are arranged between the vibrating body 241 of the power generating section 21 and the vibrating body 241 of the power generating section 22 .
  • a groove 44 is provided on the front side surface of the holder 43 , and an intermediate portion of the wire spring 45 is inserted into this groove 44 .
  • the wire spring 45 is a filigree spring. Specifically, the wire spring 45 is made of a wire-shaped material and has a substantially G shape when viewed from below.
  • the wire spring 45 is arranged to surround the movable block 40 and the base 15 , the end 145 of the wire spring 45 is inserted into the hole 133 of the movable member 13 from the front side, and the end 245 of the wire spring 45 is inserted into the holder 43 . It is inserted into a hole provided on the rear side surface.
  • An intermediate portion of the wire spring 45 is passed through the groove 44 of the holder 43 and the groove 155 on the left side surface of the connecting piece 152 .
  • a magnetic path is formed by the path of the permanent magnet 41 , the upper yoke 42 , the core 231 , the connecting piece 152 , the power generating section 22 , the lower yoke 42 and the permanent magnet 41 .
  • the movable member 13 receives the restoring force of the return spring 14 and the like and moves upward Du.
  • the holder 43 is pushed upward Du by the wire spring 45 whose end 145 is held by the movable member 13, and the holder 43 moves upward Du.
  • the movable member 13 moves to the position PT1
  • the upper yoke 42 held by the holder 43 comes into contact with the weight 243 of the power generating section 21, and the yoke piece 422 of the lower yoke 42 moves toward the core 231.
  • a magnetic path is formed by the path of the permanent magnet 41 , the upper yoke 42 , the power generating section 21 , the connecting piece 152 , the core 231 , the lower yoke 42 and the permanent magnet 41 .
  • the power generation unit 23 generates power by changing the magnetic flux linking the coil 232 according to the downward or upward movement of the holder 43 .
  • the power generation unit 23 includes the permanent magnet 41 that moves in accordance with the movement of the movable member 13, and the coil 232 that generates power using a change in magnetic flux caused by the movement of the permanent magnet 14. It can also generate electricity.
  • Components such as a battery 30, a power supply circuit 31 (see FIG. 2), a transmission unit 33 and its antenna, a control circuit 34 (see FIG. 2), and a switch 32 (see FIG. 2) are mounted on the circuit board 25. .
  • the circuit board 25 is arranged on the stopper piece 153, for example.
  • the switch 32 is, for example, a normally-off MOSFET, and is connected between the battery 30 and the transmission unit 33.
  • the switch 32 is turned on/off by the control circuit 34 .
  • the power supply circuit 31 is electrically connected to the power generation unit 20 .
  • the power supply circuit 31 is configured to convert the power (AC power) generated by the power generation unit 20 into DC power.
  • the power supply circuit 31 has a rectifier circuit, a smoothing capacitor, a voltage regulator, and the like. DC power converted by the power supply circuit 31 is supplied to the transmission unit 33 .
  • the battery 30 is, for example, a primary battery.
  • the battery 30 is not limited to a primary battery, and may be a rechargeable secondary battery or a power storage device such as a capacitor.
  • the battery 30 may be a storage element that stores the electrical energy generated by the power generation unit 20, and has the advantage of eliminating the need to replace the battery 30 compared to the case where the battery 30 is a primary battery.
  • the transmission unit 33 transmits the first signal or the second signal by radio signals by being supplied with DC power from the power supply circuit 31 or the battery 30 .
  • the radio signal is, for example, a radio signal conforming to the Bluetooth (registered trademark) standard, and particularly preferably a radio signal conforming to the Bluetooth (registered trademark) Low Energy standard.
  • the output voltage of the power generation unit 20 (power generation section 21, power generation section 22, and power generation section 23) is input to the control circuit 34.
  • the control circuit 34 includes, for example, a low-voltage microcomputer, and controls the switch 32 to be off when the power generation output of the power generation unit 20 is a first voltage equal to or higher than the starting voltage of the transmission unit 33 .
  • the transmission unit 33 receives power from the power generation unit 20 and transmits the first signal by radio signal.
  • the control circuit 34 turns on the switch 32 when the power generation output of the power generation unit 20 is a second voltage lower than the starting voltage of the transmission unit 33 .
  • the transmitting unit 33 is powered by the battery 30 and transmits the second signal by radio signal.
  • control circuit 34 determines whether or not the output voltage of the power generation unit 20 is equal to or higher than the starting voltage based on the output voltages of the power generation units 21 and 22 and the output voltage of the power generation unit 23. 32 may be controlled on/off. Specifically, when the power generation unit 21 and the power generation unit 22 are generating power and the output voltage of the power generation unit 23 is less than a predetermined threshold voltage, the control circuit 34 controls the output voltage of the power generation unit 20 to be the same as that of the transmission unit. 33, the switch 32 is turned on. As a result, when the power generation unit 21 and the power generation unit 22 are generating power and the power generation output of the power generation unit 23 is equal to or higher than the threshold voltage, the switch 32 is turned off. That is, when the power output of the power generating unit 20 is equal to or higher than the starting voltage, the switch 32 is turned off, so that the power is not supplied from the battery 30 to the transmitting unit 33, and consumption of the battery 30 is suppressed.
  • Stopper member The two sensors A1 regulate the amount of downward movement of the movable member 13 by regulating the movement range W906 in which the movement member 906 moves.
  • Two stopper members 50 are attached.
  • the stopper member 50 holds the housing 10 in contact with a part of the housing 10 of the sensor A1 (for example, the lower surface and the right side surface of the base 11).
  • the two stopper members 50 include a stopper member 50A attached to the sensor A11 and a stopper member 50B attached to the sensor A12.
  • the stopper member 50 includes a plate-shaped mounting base 51 on which the base 11 of the sensor A1 is placed, a support 52 projecting from the right end of the mounting base 51 in the upward direction Du, and a holding portion projecting from the upper end of the support 52 in the left direction Dl. 53 and .
  • the stopper member 50 is made of, for example, a metal material.
  • a circular recess 55 is provided on the right side of the upper surface of the mounting base 51 .
  • a through hole 56 is formed in the bottom surface of the recess 55 so as to penetrate the mounting base 51 from the upper surface to the lower surface.
  • a threaded portion 63 of an adjusting bolt 61 is inserted into the through hole 56 from above, and a head portion 62 of the adjusting bolt 61 is arranged in the recess 55 (see FIG. 4).
  • two through holes 57 are provided on the left side of the upper surface of the mounting base 51 so as to penetrate the mounting base 51 from the upper surface to the lower surface (see FIG. 9).
  • the fixing screw passed through the through-hole 57 from below is screwed into the threaded hole of the base 11.
  • a stopper member 50 is fixed to the base 11 .
  • the depth dimension of the recess 55 is set to be slightly larger than the thickness dimension of the head 62, and the adjustment bolt 61 is held between the base 11 and the stopper member 50 in a rotatable state.
  • the adjustment bolt 61 is screwed into a bolt hole 76 provided in a mounting member 70 (see FIGS. 10 and 11) for mounting the sensor A1 and stopper member 50 to the cylinder SY1.
  • a mounting member 70 for mounting the sensor A1 and stopper member 50 to the cylinder SY1.
  • the holding portion 53 is provided with a through hole 54 into which the upper portion of the movable member 13 is inserted.
  • a contact portion 58 of the stopper member 50 is provided with a through hole 54 into which the operating portion 131 is inserted.
  • the ring-shaped holding portion 53 surrounds the movable member 13. Therefore, when the sensor A1 is attached to the cylinder SY1, the sensor A1 provided on the cylinder SY1 Cables of instruments and the like are less likely to be caught between the operating member 906 of the cylinder SY1 and the sensor A1, and damage to the sensor A1 is less likely to occur.
  • the holding portion 53 being “annular” is not limited to enclosing the entire circumference of the movable member 13, and may be partially cut off, and the shape of the holding portion 53 when viewed from above is a C shape. may be
  • the upper surface of the holding portion 53 becomes the contact portion 58 that contacts the operating member 906 of the cylinder SY1.
  • the movable member 13 of the sensor A1 is pushed in the downward direction Dd by the operating member 906 of the cylinder SY1.
  • Stopper member 50 determines position PT2 by coming into contact with operating member 906 when operating member 906 moves downward Dd.
  • the movable member 13 is positioned at the position PT2 when the stopper member 50 is in contact with the operating member 906.
  • the stopper member 50 limits the movement of the operating member 906 in the downward direction Dd so that the movable member 13 does not move below the position PT2.
  • the contact portion 58 of the stopper member 50 that contacts the operating member 906 is above the upper end of the movable member 13 existing at the limit position PT4, the movable member 13 is not pushed to the limit position PT4. , the sensor A1 is less likely to be damaged.
  • the stopper member 50 holding the sensor A1 is attached to the cylinder SY1 using the attachment member 70. Therefore, by adjusting the position of the stopper member 50 with respect to the cylinder SY1 using the position adjusting mechanism 60, the position of the sensor A1 with respect to the cylinder SY1 can be adjusted at the same time. Therefore, it is not necessary to adjust the position of the stopper member 50 with respect to the cylinder SY1 and the position adjustment of the sensor A1 with respect to the cylinder SY1 separately, thereby reducing the labor for the position adjustment.
  • the position adjusting mechanism 60 is arranged along the central axis AX3 of the cylindrical portion of the operating portion 131 (see FIG.
  • the positioning of the position adjusting mechanism 60 along the central axis AX3 of the cylindrical portion of the operation unit 131 means that the central axis of the adjusting bolt 61 of the position adjusting mechanism 60 is parallel to the central axis AX3.
  • the central axis of the adjusting bolt 61 and the central axis AX3 are not limited to being overlapped.
  • the intersection angle between the central axis of the adjusting bolt 61 of the position adjusting mechanism 60 and the central axis AX3 should be 45 degrees or less.
  • the distance between the central axis of the adjusting bolt 61 and the central axis AX3 in the plane orthogonal to the central axis of the adjusting bolt 61 is within the allowable dimension due to manufacturing error or the like.
  • two objects are not limited to being completely parallel, but may include a state in which they intersect at an angle of about several degrees.
  • the fact that two objects are orthogonal to each other is not limited to the fact that the two objects intersect at an angle of 90 degrees, but may include a state in which the angle of intersection of the two is deviated from 90 degrees by several degrees. .
  • the stopper member 50 is in contact with a part of the sensor A1 (for example, the lower surface and the right side surface of the base 11), the impact when the operating member 906 of the cylinder SY1 hits the contact portion 58 of the stopper member 50 is applied to the stopper. It becomes easier to transmit to the sensor A1 via the member 50. - ⁇ Therefore, the vibration body 241 of the power generation section 21, in which the weight 243 is not in contact with the yoke 42, is likely to vibrate due to the impact when the operating member 906 hits the contact portion 58, and the power generation output of the power generation section 21 increases. There are also advantages.
  • the stopper member 50 is provided with openings for exposing the front, left, and rear side surfaces of the housing 10 of the sensor A1 and the left half of the upper surface. E2 (see FIG. 8).
  • the transmission part E2 may be realized by a member made of synthetic resin having transparency to electromagnetic waves.
  • FIG. 10 to 14 the direction along the X axis is defined as up and down, the direction along the Y axis is defined as left and right, and the direction along the Z axis is defined as front and back.
  • these directions are only examples, and are not meant to limit the directions during use of the cylinder SY1.
  • the arrows indicating each direction in the drawings are only shown for explanation and are not substantial.
  • the cylinder SY1 is used to receive fluid pressure (for example, air pressure) to reciprocate the slide table 905 along the X axis.
  • the slide table 905 reciprocates between a stop position 1905 and a stop position 2905 on the X-axis.
  • a stop position 1905 is the position of the lower end of the movement range W905 in which the slide table 905 reciprocates (the position indicated by the solid line in FIG. 11), and a stop position 2905 is the position of the upper end of the movement range W905 of the slide table 905 (the 11).
  • the slide table 905 is attached to the front surface of the main body 900 of the cylinder SY1 so as to be movable along the X axis.
  • a body 900 of the cylinder SY1 is provided with a cylinder chamber that houses a piston.
  • the cylinder chamber is divided into a rod-side first air chamber and a head-side second air chamber with the piston interposed therebetween, and air pipes 902 and 903 are connected to the first and second air chambers, respectively.
  • Two rods 901 protrude downward from the bottom surface of the piston.
  • the two rods 901 are passed through two through holes provided in the lower portion of the main body 900 and are exposed to the outside of the main body 900 .
  • the lower ends of the two rods 901 are connected to a slide table 905, and the slide table 905 moves upward and downward in conjunction with the piston.
  • Two stopper members 50 that limit the movement range of the slide table 905 are attached to the cylinder SY1.
  • the lower end of the movement range W905 of the slide table 905 is restricted to the stop position 1905 by the stopper member 50A.
  • the upper end of the movement range of the slide table 905 is restricted to the stop position 2905 by the stopper member 50B.
  • a sensor A11 that detects that the slide table 905 has moved to the stop position 1905 and a sensor A12 that detects that the slide table 905 has moved to the stop position 2905 are attached to the cylinder SY1.
  • the sensor A11 and the stopper member 50A are attached to the cylinder SY1 using the attachment member 70A
  • the sensor A12 and the stopper member 50B are attached to the cylinder SY1 using the attachment member 70B.
  • the mounting member 70A and the mounting member 70B are formed in a substantially symmetrical shape with respect to a plane orthogonal to the X-axis, except for the mounting portion to the cylinder SY1.
  • the attachment member 70A for attaching the stopper member 50A and the sensor A11 to the cylinder SY1 at the stop position 1905 will be described, and the description of the attachment member 70B will be omitted.
  • the mounting member 70A is made of, for example, a metal material. As shown in FIG. 10, the mounting member 70A includes a rectangular plate-shaped bottom plate portion 71 facing the lower surface of the sensor A11, a vertical piece 72 projecting upward from the rear end of the bottom plate portion 71, and the bottom plate portion 71 and a vertical piece 73 projecting upward from the right end of the .
  • the bottom plate portion 71 is provided with bolt holes 76 passing through the bottom plate portion 71 along the X-axis at positions corresponding to the through holes 56 of the stopper member 50 .
  • a threaded portion is formed on the inner peripheral surface of the bolt hole 76 , and the adjustment bolt 61 inserted into the through hole 56 of the stopper member 50 is screwed into the bolt hole 76 .
  • the screwing amount of the adjustment bolt 61 By adjusting the screwing amount of the adjustment bolt 61, the stopper member 50 and the sensor A1 held by the stopper member 50 move along the X-axis.
  • the position of the adjusting bolt 61 is fixed by tightening the nut 64 on the threaded portion 63 of the adjusting bolt 61 .
  • the stopper member 50 holding the sensor A11 is arranged at a position where the operation member 906 contacts the contact portion 58 while the slide table 905 is moved to the stop position 1905 .
  • the mounting member 70A is provided with an opening that exposes the front and left side surfaces of the housing 10 of the sensor A1 and the left half of the top surface. See Figure 10).
  • the transmission part E1 may be implemented by a cover made of synthetic resin that is transparent to electromagnetic waves. Since the transmission part E2 and the transmission part E1 are arranged so that at least a part thereof overlaps, the attenuation of the wireless signal (radio wave signal) transmitted from the transmission unit 33 of the sensor A1 can be suppressed.
  • the mounting member 70A is provided with a fixed piece 74 (see FIG. 12) projecting upward from the upper end of the vertical piece 73 .
  • the fixed piece 74 is provided with a through-hole passing through the fixed piece 74 along the Y-axis.
  • the mounting member 70A is fixed to the main body 900 by placing the fixing piece 74 on the left side of the main body 900 of the cylinder SY1 and screwing the bolt through the through hole into the bolt hole provided in the main body 900 .
  • the mounting member 70B is provided with a fixing piece 75 projecting rightward from the right side surface of the vertical piece 73 .
  • the fixed piece 75 is provided with a through-hole passing through the fixed piece 75 along the X-axis.
  • the mounting member 70B is fixed to the main body 900 by placing the fixing piece 75 on the upper surface of the main body 900 of the cylinder SY1 and screwing the bolt through the through hole into the bolt hole provided in the main body 900. As shown in FIG.
  • the method of mounting the sensor A12 and the stopper member 50B using the mounting member 70B is the same as the mounting method using the mounting member 70A, so the description thereof will be omitted.
  • Two sensors A1 are attached to cylinder SY1 in order to detect that slide table 905 has moved to stop position 1905 and stop position 2905, respectively. It is not essential that two sensors A1 are attached. Of the sensors A11 and A12, only the sensor A11 for detecting that the slide table 905 has moved to the stop position 1905 may be attached to the cylinder SY1. Only the sensor A12 for detection may be attached.
  • FIG. 1 Two sensors A11 and A12 are attached to the cylinder SY1. Since the two sensors A11 and A12 have the same configuration, they detect the movement of the slide table 905 to the stop position 1905. Only the operation of the sensor A11 to be performed will be described.
  • the upper yoke 42 is in contact with the weight 243 of the power generation unit 21 , and the magnetic field passing through the upper yoke 42 , the weight 243 of the power generation unit 21 , the vibrating body 241 , the base 15 , the core 231 and the lower yoke 42 is generated. A path is formed. As a result, the end portion (weight 243 ) of the power generating section 21 is attracted to the movable block 40 by the magnetic attraction force of the permanent magnet 41 . In this state, since the magnetic flux interlinking with the coil 232 does not change, the power generation output of the power generation section 23 is also zero. That is, when the slide table 905 is stopped at the stop position 2905, the power generation output of the power generation unit 20 is zero, and the transmission unit 33 does not transmit radio signals.
  • FIG. 1 When the operating portion 131 is pushed downward by the operating member 906 , the movable member 13 moves downward, and the movable block 40 moves downward according to the movement of the movable member 13 . At this time, the vibrating body 241 and the piezoelectric element 242 of the power generating section 21 attracted to the movable block 40 bend downward, and the piezoelectric element 242 generates a voltage corresponding to the amount of bending.
  • the weight 243 of the power generation unit 21 is separated from the upper yoke 42, the magnetic flux interlinking with the coil 232 is rapidly reduced, and the power generation unit 23 generates voltage. Further, when the movable member 13 moves to the position PT1, the core 231 contacts the upper yoke 42, and the lower yoke 42 contacts the weight 243 of the power generation section 22, as shown in FIG. Thereby, a magnetic path passing through the upper yoke 42 , the core 231 , the connecting piece 152 , the vibrating body 241 and the weight 243 of the power generating section 22 , and the upper yoke 42 is formed.
  • the weight 243 of the power generation unit 22 is attracted to the movable block 40 by the magnetic attraction force of the permanent magnet 41 .
  • the magnetic flux interlinking with the coil 232 changes during that time, so the power generating section 23 generates power output according to the change in the magnetic flux.
  • the power generation sections 22 and 23 output the first voltage exceeding the starting voltage, and the transmission unit 33 is supplied from the power generation unit 20.
  • a first signal transmitted from the transmission unit 33 is received by an external host system R1 (see FIG. 2).
  • the host system R1 has a communication function of receiving wireless communication from the transmission unit 33.
  • FIG. The host system R1 can detect that the slide table 905 has moved to the stop position 1905 based on the first signal received from the sensor A11.
  • the movable block 40 is also stopped when the movable member 13 is stopped at the position PT2, the magnetic flux linking the coil 232 does not change, and the power generation output of the power generation section 23 becomes zero. As a result, the transmission of radio signals from the transmission unit 33 is also stopped.
  • the vibrating body 241 and the piezoelectric element 242 of the power generating section 22 attracted to the movable block 40 bend upward, and the piezoelectric element 242 generates a voltage corresponding to the amount of bending.
  • the magnetic flux interlinking with the coil 232 is rapidly reduced, and the power generation section 23 generates voltage.
  • the movable member 13 moves to the position PT2
  • the core 231 contacts the lower yoke 42 and the upper yoke 42 contacts the weight 243 of the power generation section 21, as shown in FIG.
  • a magnetic path passing through the upper yoke 42 , the weight 243 and the vibrating body 241 of the power generating section 21 , the connecting piece 152 , the core 231 and the lower yoke 42 is formed.
  • the weight 243 of the power generation unit 21 is attracted to the movable block 40 by the magnetic attraction force of the permanent magnet 41 .
  • the magnetic flux interlinking the coil 232 changes during that time, so the power generating section 23 generates power output according to the change in magnetic flux.
  • the host system R1 can detect that the slide table 905 has moved from the stop position 1905 toward the stop position 2905 by receiving the first signal transmitted from the transmission unit 33 of the sensor A11.
  • the motion member 906 comes into contact with the contact portion 58 of the stopper member 50B, and upward movement is restricted by the stopper member 50B. As a result, the slide table 905 stops at the stop position 2905 . Further, when the operation member 906 pushes the operating portion 131 of the sensor A12 upward, the power generation unit 20 generates the first voltage and the transmission unit 33 transmits the first signal. The power generation operation of the sensor A12 at this time is the same as the power generation operation of the sensor A11 described in "(2.4.1) Operation when moving from the stop position 2905 to the stop position 1905".
  • the external host system R1 detects that the slide table 905 is positioned at the stop position 2905 by receiving the first signal transmitted from the transmission unit 33 of the sensor A12.
  • the power generation output of the power generation unit 20 is activated. It becomes the 1st voltage more than a voltage.
  • the power generation required distance is, for example, the amount of movement of the movable member 13 when the power generation output of the power generation unit 20 becomes the starting voltage of the transmission unit 33 .
  • the power generation required distance is the amount of movement when the power generation output generated by the piezoelectric element 242 of the power generation unit 22 is flexed so as to be greater than or equal to the first voltage.
  • the power generation required distance is, for example, the distance that the movable member 13 moves from the position of the movable member 13 to the position PT2 when the movable block 40 moves upward to the position where the core 231 is separated from the upper yoke 42. may If the movable block 40 has moved upward to the position where the core 231 is separated from the upper yoke 42, the magnetic flux passing through the coil 232 will be changes and the power generation unit 23 generates power, the power generation unit 22 and the power generation unit 23 can generate the first voltage exceeding the starting voltage.
  • FIG. 12 shows the first return state, which is the state when the amount of upward movement of the movable member 13 while the pressure source is stopped is greater than or equal to the power generation required distance.
  • the action member 906 since the action member 906 is separated from the operation portion 131, the movable member 13 has moved to the position PT1. Since the amount of movement of the movable member 13 during the movement of the slide table 905 from the first return state to the initial stop state is equal to or greater than the power generation required distance, the power generation output of the power generation unit 20 becomes the first voltage equal to or greater than the starting voltage. Control circuit 34 keeps switch 32 off.
  • the power supply circuit 31 converts the power output of the power generation unit 20 into a DC voltage having a voltage value equal to or higher than the starting voltage, and supplies the DC voltage to the transmission unit 33 . That is, since the power generation output of the power generation unit 20 is equal to or higher than the activation voltage of the transmission unit 33, the transmission unit 33 receives power supply from the power generation unit 20, is activated, and transmits the first signal. Host system R1 detects that slide table 905 is positioned at stop position 1905 by receiving the first signal from sensor A11.
  • FIG. 13 shows the second return state, which is the state when the amount of upward movement of the movable member 13 while the pressure source is stopped is less than the required distance for power generation. Since the amount of movement of the movable member 13 until the slide table 905 moves from the second return state to the initial stop state is less than the power generation required distance, the power generation output of the power generation unit 20 becomes the second voltage less than the starting voltage. .
  • FIG. 1 shows the state of the sensor A11 (sensor A1) in the second return state.
  • the movable block 40 moves in accordance with the movement of the movable member 13 until the slide table 905 returns from the second return state to the initial stop state. Even if it moves downward, the magnetic flux passing through the coil 232 does not change, and the power generation output of the power generation section 23 becomes zero.
  • the piezoelectric element 242 of the power generation section 22 is slightly bent, the power generation section 22 generates a second voltage lower than the starting voltage during the period until the slide table 905 returns from the second return state to the initial stop state. .
  • control circuit 34 is triggered by the generation of the second voltage by the power generation unit 20, and controls the switch 32 to turn on. to send.
  • the host system R1 detects that the slide table 905 is positioned at the stop position 1905 by receiving the second signal transmitted from the transmission unit 33 of the sensor A11.
  • the power generation unit 22 is bent along the axis AX2 (see FIG. 1) due to the downward movement of the movable member 13.
  • the axis AX1 is along the axis AX2, so that the power generation output generated by the power generation unit 22 can be increased according to the movement of the movable member 13.
  • FIG. 1 the expression that the axis AX1 is along the axis AX2 preferably means that the axis AX1 and the axis AX2 are parallel. and the direction in which the axis AX2 extends is preferably 45 degrees or less.
  • the first signal and the second signal are preferably the same signal, and the host system R1 can detect that the slide table 905 is positioned at the stop position 1905 by receiving the second signal.
  • the second signal is not necessarily the same signal as the first signal, and the second signal may be a signal containing information different from that of the first signal.
  • the second signal may include information that the power generation unit 20 has generated the second voltage, and since the host system R1 has received the second signal, the slide table 905 stops after the pressure source is restarted. Movement to position 1905 can be detected.
  • the position of the slide table 905 may be displaced by receiving the restoring force of the return spring 14 or the like as described above. have a nature.
  • the sensor A12 A power generation unit 20 generates a first voltage. Therefore, the transmission unit 33 of the sensor A12 can receive power from the power generation unit 20 and transmit the first signal.
  • the slide table 905 When the slide table 905 receives the restoring force of the return spring 14 and moves to the second return state, the pressure source is restarted and the slide table 905 moves to the stop position 2905 before stopping. Since the unit 20 generates the second voltage, the transmission unit 33 cannot be activated by the power output of the power generation unit 20 . In this case, the control circuit 34 of the sensor A 12 turns on the switch 32 because the power output of the power generation unit 20 is the second voltage. A second signal can be transmitted.
  • Cylinder SY1 is a cylinder for driving slide table 905, but sensor A1 can also be applied to cylinders other than cylinder SY1 for driving slide table 905. be. Variations of cylinders to which the sensor A1 is applied will be described below.
  • the above sensor A1 may be applied to the cylinder that drives the parallel hand.
  • mounting methods for mounting the sensor A1 on the cylinder that drives the parallel hand there are an external mounting method as shown in FIGS. 15 to 20 and a built-in method as shown in FIGS.
  • Application Example 1 in which the sensor A1 is externally attached to the cylinder that drives the parallel hand, and Application Example 2 in which the sensor A1 is built into the cylinder that drives the parallel hand will be described below.
  • FIG. 15 An application example 1 in which the sensor A1 is externally attached to the cylinder SY2 that drives the parallel hand will be described with reference to FIGS. 15 to 20.
  • FIG. 15 In the description of the cylinder SY2 of Application Example 1, in FIG. 15, the direction along the X-axis is defined as up and down, the direction along the Y-axis is defined as left and right, and the direction along the Z-axis is defined as front and back. However, these directions are defined for convenience of explanation, and do not define directions when the sensor A1 and cylinder SY2 are actually used.
  • Cylinder SY2 has a rectangular parallelepiped main body 910 .
  • a pair of claws 911 are arranged on the upper surface of the main body 910 .
  • a pair of claws 911 are provided movably along the Y-axis.
  • a cylinder chamber is provided inside the main body 910 in which a piston is arranged so as to be able to reciprocate.
  • the cylinder chamber is divided into a rod-side first air chamber and a head-side second air chamber with the piston interposed therebetween, and air pipes 912 and 913 are connected to the first and second air chambers, respectively.
  • a rod is connected to the piston, and when the rod reciprocates together with the piston, the reciprocating motion of the rod is transmitted to the pair of pawls 911 via the link mechanism.
  • the pair of claws 911 moves to the closed position (position shown in FIGS. 15 to 17) where the distance between the two is minimum, or to the open position (position shown in FIG. 18) where the distance between the two is maximum. .
  • Two sensors A1 and two stopper members 50 are attached to the cylinder SY2 using two attachment members 80.
  • the two sensors A1 include a sensor A21 that detects movement of the pair of claws 911 to the closed position and a sensor A22 that detects movement of the pair of claws 911 to the open position.
  • the two stopper members 50 are attached to the sensor A21 and attached to the stopper member 50A for restricting the movement range of the pair of claws 911 in the closing direction, and attached to the sensor A22 to limit the movement of the pair of claws 911 in the opening direction. and a stopper member 50B that limits the range.
  • the two mounting members 80 include a mounting member 80A for mounting the sensor A21 and the stopper member 50A on the right side surface of the main body 910, and a mounting member 80B for mounting the sensor A22 and the stopper member 50B on the left side surface of the main body 910.
  • the sensor A21 and the sensor A22 have the same configuration as the sensor A1 described above, so the description of the configuration of the sensor A21 and the sensor A22 is omitted. Also, since the stopper member 50A and the stopper member 50B have the same configuration as the stopper member 50 described above, description of the configuration of the stopper member 50A and the stopper member 50B is omitted.
  • the mounting member 80A includes a fixing piece 81A that is attached to the right side surface of the main body 910 using, for example, a fixing screw, a projecting piece 82A that projects rightward from the lower end of the fixing piece 81A, and a rightward projecting piece 82A that projects rightward from the upper front end of the fixing piece 81A. and a link support piece 83A protruding into.
  • the projecting piece 82A is provided with a bolt hole into which the adjusting bolt 61 is screwed.
  • the sensor A21 held by the stopper member 50A is fixed to the mounting member 80A by screwing the adjusting bolt 61 into the bolt hole of the protruding piece 82A and tightening the nut 64 on the adjusting bolt 61 after adjusting the amount of screwing ( See Figure 17).
  • the mounting member 80A has an opening that exposes the side surface of the cover 12 of the sensor A21, and this opening serves as a transmitting portion E5 that transmits electromagnetic waves. Since the transmitting portion E5 of the mounting member 80A partially overlaps the transmitting portion E2 (see FIG. 8) provided on the stopper member 50A, attenuation of the radio signal transmitted from the sensor A21 is suppressed.
  • the transmission part E5 may be realized by a member made of synthetic resin.
  • the mounting member 80B includes a fixed piece 81B attached to the left side surface of the main body 910 using, for example, a fixing screw, a projecting piece 82B projecting leftward from the lower end of the fixed piece 81B, and a rear end of the upper portion of the fixed piece 81B. and a link support piece 83B projecting leftward.
  • the projecting piece 82B is provided with a bolt hole into which the threaded portion 63 of the adjusting bolt 61 is screwed.
  • the sensor A22 held by the stopper member 50B is fixed to the mounting member 80B by screwing the adjusting bolt 61 into the bolt hole of the protruding piece 82B and tightening the nut 64 on the adjusting bolt 61 after adjusting the amount of screwing ( See Figure 17).
  • the mounting member 80B has an opening that exposes the side surface of the cover 12 of the sensor A22, and this opening serves as a transmitting portion E5 that transmits electromagnetic waves. Since the transmitting portion E5 of the mounting member 80B partially overlaps with the transmitting portion E2 (see FIG. 8) provided on the stopper member 50B, attenuation of the radio signal transmitted from the sensor A22 is suppressed.
  • the transmission part E5 may be realized by a member made of synthetic resin.
  • the cylinder SY2 has a link mechanism 810 that converts the lateral movement of the right claw 911 into vertical movement and transmits it to the sensor A21, and a link mechanism 810 that converts the horizontal movement of the left claw 911 into vertical movement and transmits it to the sensor A22. and a link mechanism 820 for transmitting.
  • the link mechanism 810 includes a connecting portion 811, a driving link 812, an intermediate link 813, and a driven link 814 that is an operating member.
  • the connecting part 811 is fixed to the base of the claw 911 on the right side with a screw or the like.
  • the drive link 812 and the intermediate link 813 are each formed in a rectangular plate shape.
  • Drive link 812 is provided with three holes along its long side.
  • the intermediate link 813 is provided with two holes along its long side.
  • a pin P11 provided in the connecting portion 811 is inserted into the hole of the end 1812 of the driving link 812, and the driving link 812 can rotate about the pin P11.
  • a first end of pin P12 is inserted into the center hole of drive link 812 .
  • the second end of the pin P12 is inserted into the hole of the end 1813 of the intermediate link 813, and the drive link 812 and the intermediate link 813 are rotatable around the pin P12.
  • a pin P13 fixed to the top of the driven link 814 is inserted into the hole of the end 2812 of the drive link 812, and the drive link 812 can rotate about the pin P12.
  • a pin P14 fixed to the link support piece 83A is inserted into the hole of the end 2813 of the intermediate link 813, and the intermediate link 813 can rotate about the pin P14.
  • the pin P14 is inserted into an elongated hole 816 provided in the driven link 814 so as to pass through the driven link 814 in the front-rear direction below the hole through which the pin P13 is inserted.
  • the elongated hole 816 is formed in a shape whose vertical dimension is longer than its horizontal dimension, and the driven link 814 can move along the X-axis while being guided by the pin P14.
  • a rectangular push operation portion 815 for pushing the operation portion 131 of the movable member 13 is provided below the driven link 814 .
  • the link mechanism 820 includes a connecting portion 821, a driving link 822, an intermediate link 823, and a driven link 824 that is an operating member.
  • the connecting part 821 is fixed to the base of the claw 911 on the left side with a screw or the like.
  • the drive link 822 and the intermediate link 823 are each formed in a rectangular plate shape.
  • Drive link 822 is provided with three holes along its long side.
  • the intermediate link 823 is provided with two holes along its long side.
  • a pin P21 provided in the connecting portion 821 is inserted into the hole of the end 1822 of the driving link 822, and the driving link 822 can rotate around the pin P21.
  • a first end of the pin P22 is inserted into the center hole of the drive link 822 .
  • the second end of the pin P22 is inserted into the hole of the end 1823 of the intermediate link 823, and the drive link 822 and the intermediate link 823 are rotatable around the pin P22.
  • a pin P23 fixed to the lower portion of the driven link 824 is inserted into the hole of the end 2822 of the drive link 822, and the drive link 822 can rotate about the pin P23.
  • a pin P24 fixed to the link support piece 83B is inserted into the hole of the end 2823 of the intermediate link 823, and the intermediate link 823 can rotate about the pin P24.
  • the pin P24 is inserted into an elongated hole 826 provided in the driven link 824. As shown in FIG.
  • the long hole 826 is provided above the pin P23 so as to pass through the driven link 824 in the front-rear direction.
  • the elongated hole 826 is formed in a shape whose vertical dimension is longer than its horizontal dimension, and the driven link 824 can move along the X-axis while being guided by the pin P24. Further, a rectangular push operation portion 825 for pushing the operation portion 131 of the movable member 13 is provided below the driven link 824 .
  • 15 to 17 show the state in which the pair of claws 911 are moved to the closed position.
  • the rod moves downward together with the piston, thereby moving the pair of claws 911 to the closed position.
  • the driving link 812 of the link mechanism 810 rotates clockwise about the pin P11, and the intermediate link 813 rotates counterclockwise about the pin P12, while the driven link 814 rotates. moves downward.
  • the push operation portion 815 pushes the operation portion 131 of the movable member 13 downward.
  • the drive link 822 of the link mechanism 820 rotates clockwise about the pin P21, and the intermediate link 823 rotates counterclockwise about the pin P22.
  • Link 824 moves upward.
  • the push operation portion 825 is separated from the operation portion 131 of the movable member 13 .
  • the power generation unit 20 of the sensor A21 generates the first voltage
  • the transmission unit 33 receives the voltage supply from the power generation unit 20 and transmits the first signal. Based on the signal, it can be detected that the pair of claws 911 has moved to the closed position.
  • the rod moves upward together with the piston, thereby moving the pair of claws 911 from the closed position to the open position (see FIG. 18).
  • the drive link 812 of the link mechanism 810 rotates counterclockwise about the pin P11, and the intermediate link 813 rotates clockwise about the pin P12. moves upwards.
  • the push operation portion 815 is separated from the operation portion 131 of the movable member 13 .
  • the pressure source (for example, the pneumatic pump) of the cylinder SY2 is extended due to the stoppage of operation due to a holiday or the like. If the time is stopped, there is a possibility that the pressures of the first air chamber and the second air chamber will decrease due to air leakage from piping or the like.
  • the movable member 13 of the sensor A22 receives the restoring force of the return spring 14 and the like and moves upward. After that, when the operation is restarted and the pressure source of the cylinder SY2 is restarted, air is supplied from the pressure source and the cylinder SY2 returns to the open position which is the position before the operation is stopped.
  • the power generation unit 20 generates and outputs a first voltage equal to or higher than the starting voltage.
  • FIG. 19 shows the first return state, which is the state when the amount of upward movement of the movable member 13 of the sensor A22 while the pressure source is stopped is greater than or equal to the power generation required distance. Since the amount of movement of the movable member 13 until the pair of claws 911 moves from the first return state to the initial stop state is greater than or equal to the power generation required distance, the power generation output of the power generation unit 20 becomes the first voltage equal to or greater than the starting voltage. , the control circuit 34 keeps the switch 32 off. At this time, the power supply circuit 31 converts the power output of the power generation unit 20 into a DC voltage having a voltage value equal to or higher than the starting voltage, and supplies the DC voltage to the transmission unit 33 .
  • the transmission unit 33 receives power supply from the power generation unit 20, starts up, and transmits the first signal.
  • the host system R1 detects that the pair of claws 911 are positioned at the open position by receiving the first signal transmitted from the transmission unit 33 of the sensor A22.
  • FIG. 20 shows the second return state, which is the state when the upward movement amount of the movable member 13 of the sensor A22 while the pressure source is stopped is less than the power generation required distance. Since the amount of movement of the movable member 13 until the pair of pawls 911 move from the second return state to the initial stop state is less than the required distance for power generation, the power generation output of the power generation unit 20 becomes the second voltage less than the starting voltage. , the power generation output of the power generation unit 20 cannot activate the transmission unit 33 . At this time, since the power output of the power generation unit 20 is the second voltage, the control circuit 34 of the sensor A 22 turns on the switch 32, so that the transmission unit 33 is activated by the power supplied from the battery 30. Send a second signal. The host system R1 detects that the pair of claws 911 is positioned at the open position by receiving the second signal transmitted from the transmission unit 33 of the sensor A22.
  • the generator unit 20 of sensor A21 when the pair of pawls 911 receive the restoring force of the return spring 14 or the like and move to the position of the first return state, when the pressure source is restarted and the pair of pawls 911 move to the closed position before stopping,
  • the generator unit 20 of sensor A21 generates a first voltage. Therefore, the transmission unit 33 of the sensor A21 can receive power from the power generation unit 20 and transmit the first signal.
  • the transmission unit 33 cannot be activated by the power generation output of the power generation unit 20 .
  • the control circuit 34 of the sensor A 21 turns on the switch 32 because the power output of the power generation unit 20 is the second voltage. A second signal can be transmitted.
  • Two sensors A1 are attached to the cylinder SY2 described in Application Example 1 in order to detect the movement of the pair of claws 911 to the closed position and the open position, respectively.
  • Cylinder SY2 may be provided with only sensor A21 for detecting that the pair of claws 911 has moved to the closed position, or only sensor A22 for detecting that the pair of claws 911 has moved to the open position. may have been
  • FIG. 21 An application example 2 in which the sensor A1 is built in the cylinder SY3 that drives the parallel hand will be described with reference to FIGS. 21 to 27.
  • FIG. 21 In the explanation of the cylinder SY3 of Application Example 2, in FIG. 21, the direction along the X axis is defined as up and down, the direction along the Y axis is defined as left and right, and the direction along the Z axis is defined as front and back.
  • these directions are defined for convenience of explanation, and do not define directions when the sensor A1 and cylinder SY3 are actually used.
  • Cylinder SY3 has a rectangular parallelepiped main body 920 .
  • a rail member 921 holding a pair of claws 922 is attached to the upper portion of the main body 920 .
  • a rail groove 923 into which bases of a pair of claws 922 are inserted is provided on the upper surface of the rail member 921 .
  • Rail groove 923 extends along the Y-axis. The pair of claws 922 are held by the rail member 921 so as to be able to move in parallel along the Y-axis.
  • a cylinder chamber in which a piston 950 (see FIG. 23) is arranged so as to be movable along the X-axis.
  • the piston 950 is provided with a rod 951 protruding upward.
  • the cylinder chamber is divided into a first air chamber on the rod 951 side and a second air chamber on the head side with the piston 950 interposed therebetween, and an air pipe is connected to each of the first air chamber and the second air chamber.
  • the piston 950 and rod 951 move upward.
  • the piston 950 and the rod 951 move downward.
  • the reciprocating motion of the rod 951 is transmitted to the pair of claws 922 via the link mechanism 830 and the link mechanism 840, respectively.
  • the pair of pawls 922 are placed in the closed position (position shown in FIGS. 23 and 24) where the distance between the two is minimum and the open position (position shown in FIGS. 25 and 26) where the distance between the two is maximum (position shown in FIGS. 25 and 26).
  • Two sensors A1 are attached to the cylinder SY3 using two attachment members.
  • the two sensors A1 include a sensor A21 that detects movement of the pair of claws 922 to the closed position and a sensor A22 that detects movement of the pair of claws 922 to the open position.
  • the two mounting members also include a mounting member 930 for mounting the sensor A21 to the cylinder SY3 and a mounting member 940 for mounting the sensor A22 to the cylinder SY3.
  • the mounting member 930 has a function of a stopper member that limits the pushing amount of the movable member 13 of the sensor A21.
  • the mounting member 940 has the function of a stopper member that limits the pushing amount of the movable member 13 of the sensor A22.
  • the sensor A21 and the sensor A22 have the same configuration as the sensor A1 described above, so the description of the configuration of the sensor A21 and the sensor A22 is omitted.
  • the mounting member 930 has a base portion 931 arranged with the upper surface of the sensor A21 in contact with the lower surface, and a prism-shaped columnar portion 932 protruding downward from the left side of the lower surface of the base portion 931 .
  • the sensor A21 is arranged on the mounting member 930 with the upper surface of the housing 10 in contact with the lower surface of the base portion 931 and the left side surface of the housing 10 in contact with the right side surface of the columnar portion 932 .
  • the sensor A21 is fixed to the mounting member 930 by fastening the base 11 to the columnar portion 932 with a fixing bolt 934 .
  • the mounting member 930 has a shim plate 933 sandwiched between it and the lower surface of the main body 920 , and the fixing bolt 935 is passed through the through-hole passing through the columnar portion 932 along the X axis, and the fixing bolt 935 is screwed to the main body 920 . It is attached to the main body 920 by inserting it.
  • the shim plate 933 realizes the position adjustment mechanism, but the position adjustment mechanism may be realized by a feed screw or the like that moves the sensor A21 and the mounting member 930 along the X axis.
  • a rectangular through-hole 937 (see FIGS. 24 and 26) is provided on the upper surface of the mounting member 930 at a portion facing the operating portion 131 of the movable member 13 of the sensor A21.
  • the link mechanism 830 has a plunger 835, which is an operating member that drives the operating portion 131 of the movable member 13. The lower end of the plunger 835 is inserted through the through hole 937 into the mounting member 930, and the movable member of the sensor A21 is inserted. 13 is opposed to the operation unit 131 .
  • the side surface of the cover 12 of the sensor A21 is exposed. That is, since the mounting member 930 is provided with the transmitting portion E3 (see FIG. 21) that transmits electromagnetic waves, attenuation of the wireless signal transmitted from the transmitting unit 33 of the sensor A21 can be suppressed.
  • the transmitting portion E3 is realized by an opening that exposes the side surface of the cover 12, it may be realized by a synthetic resin member or the like having transparency to electromagnetic waves.
  • the mounting member 940 has a base portion 941 arranged with the upper surface of the sensor A 22 in contact with the lower surface, and a prism-shaped columnar portion 942 protruding downward from the right side of the lower surface of the base portion 941 .
  • the sensor A22 is arranged on the mounting member 940 with the upper surface of the housing 10 in contact with the lower surface of the base portion 941 and the right side surface of the housing 10 in contact with the left side surface of the columnar portion 942 .
  • the sensors A22 and A21 are arranged side by side along the Z axis (see FIG. 21).
  • the sensor A22 is fixed to the mounting member 940 by fastening the base 11 to the columnar portion 942 with a fixing bolt 944 .
  • the mounting member 940 has a shim plate 943 sandwiched between it and the lower surface of the main body 920 , and the fixing bolt 945 is passed through the through-hole passing through the columnar portion 942 along the X-axis, and the fixing bolt 945 is screwed to the main body 920 . It is attached to the main body 920 by inserting it. As a result, the sensor A22 is attached to the main body 920 of the cylinder SY3 via the attachment member 940. As shown in FIG.
  • the shim plate 943 realizes the position adjustment mechanism, but the position adjustment mechanism may be realized by a feed screw or the like that moves the sensor A22 and the mounting member 940 along the X axis.
  • a rectangular through-hole 947 (see FIGS. 24 and 26) is provided at a portion facing the operating portion 131 of the movable member 13 of the sensor A22.
  • the link mechanism 840 has a plunger 845 that is an operating member that drives the operating portion 131 of the movable member 13. The lower end of the plunger 845 is inserted through the through hole 947 into the mounting member 940, and the movable member of the sensor A22 is inserted. 13 is opposed to the operation unit 131 .
  • the side surface of the cover 12 of the sensor A22 is exposed. That is, since the mounting member 940 is provided with the transmitting portion E4 (see FIG. 21) that transmits electromagnetic waves, attenuation of the wireless signal transmitted from the transmitting unit 33 of the sensor A22 can be suppressed.
  • the transmitting portion E4 is realized by an opening that exposes the side surface of the cover 12, it may be realized by a synthetic resin member or the like having transparency to electromagnetic waves.
  • the cylinder SY3 includes a link mechanism 830 and a link mechanism 840.
  • the link mechanism 830 converts the lateral movement of the right claw 922 into vertical movement and transmits it to the sensor A21.
  • Link mechanism 830 includes link arm 831 , intermediate link 834 , and plunger 835 .
  • the link arm 831 integrally includes a horizontal piece 831B arranged along the Y-axis and a vertical piece 831A projecting downward from the right end of the horizontal piece 831B, and is formed in a substantially L shape.
  • the horizontal piece 831B is provided with a hole near the center of the left and right width, and a pin P31 fixed to the main body 920 is inserted into this hole.
  • the horizontal piece 831B is supported by the main body 920 so as to be rotatable around the pin P31.
  • a groove 833 is provided at the left end of the horizontal piece 831B.
  • a slit 952 is provided at the upper end of the rod 951 and a pin 953 is provided inside the slit 952 .
  • the left end of the lateral piece 831B is inserted into the slit 952 of the rod 951, and the pin 953 is inserted into the groove 833.
  • a driving piece 832 protrudes upward from the vicinity of the center of the lateral width of the horizontal piece 831B, and is inserted into a groove provided below the claw 922 on the right side.
  • a first end of the pin P32 is inserted into a hole provided at the bottom of the vertical piece 831A.
  • the second end of the pin P32 is inserted into the hole provided at the end 1834 of the intermediate link 834, and the vertical piece 831A and the intermediate link 834 are connected in a rotatable state about the pin P32.
  • a first end of the pin P33 is inserted into a hole provided at the end 2834 of the intermediate link 834, and a second end of the pin P33 is inserted into a hole provided at the upper end of the plunger 835.
  • the plunger 835 is arranged in the main body 920 so as to be movable along the X-axis (up and down) by a guide provided inside the main body 920 .
  • a push operation portion 836 for pushing the operation portion 131 of the movable member 13 included in the sensor A21 is provided at the lower end of the plunger 835 .
  • An intermediate portion of the plunger 835 is provided with a stepped portion 837 that contacts stopper pieces 936 and 946 projecting upward from the mounting member 930 and the mounting member 940 when the plunger 835 moves downward.
  • the stopper pieces 936 and 946 contact the stepped portion 837 of the plunger 835, which is the operating member, to limit the downward movement of the plunger 835 so that the movable member 13 does not move below the position PT2. do.
  • the upper ends of the stopper pieces 936 and 946 are contact portions that come into contact with the stepped portion 837 of the plunger 835, which is the operating member.
  • the link mechanism 840 converts the lateral movement of the left claw 922 into vertical movement and transmits it to the sensor A22.
  • the link mechanism 840 includes a link arm 841, an intermediate link 844, and a plunger 845 as an operating member.
  • the link arm 841 is formed in a rectangular plate shape. A hole is provided in the link arm 841 near the center of the left and right width, and a pin P41 fixed to the main body 920 is inserted into this hole. supported by A groove 843 is provided at the right end of the link arm 841 . The right end of the link arm 841 is inserted into the slit 952 of the rod 951 and the pin 953 is inserted into the groove 843 .
  • a drive piece 842 protrudes upward from the vicinity of the center of the left and right width of the link arm 841 and is inserted into a groove provided below the left claw 922 . A first end of the pin P42 is inserted into a hole provided at the left end of the link arm 841 .
  • the second end of the pin P42 is inserted into the hole provided in the end 1844 of the intermediate link 844, and the link arm 841 and the intermediate link 844 are connected in a rotatable state about the pin P42.
  • a first end of the pin P43 is inserted into a hole provided at the end 2844 of the intermediate link 844, and a second end of the pin P43 is inserted into a hole provided at the upper end of the plunger 845.
  • the plunger 845 is arranged in the main body 920 so as to be movable along the X-axis (up and down) by a guide provided inside the main body 920 .
  • a push operation portion 846 for pushing the operation portion 131 of the movable member 13 included in the sensor A22 is provided at the lower end of the plunger 845 .
  • An intermediate portion of the plunger 845 is provided with a stepped portion 847 that comes into contact with stopper pieces 936 and 946 projecting upward from the mounting member 930 and the mounting member 940, respectively, when the plunger 845 moves downward.
  • the power generation unit 20 of the sensor A21 generates the first voltage
  • the transmission unit 33 receives the voltage supply from the power generation unit 20 and transmits the first signal. Based on this, it can be detected that the pair of claws 922 has moved to the closed position. Further, when the link arm 841 rotates clockwise about the pin P41, the plunger 845 is pulled upward by the intermediate link 844, and the push operation portion 846 of the plunger 845 is separated from the operation portion 131 of the movable member 13 of the sensor A22. state.
  • the rod 951 moves upward together with the piston 950, the link arm 831 rotates clockwise about the pin P31, and the link arm 841 rotates about the pin P41. It rotates counterclockwise, and the driving pieces 832 and 842 move the pair of claws 922 to the open position (see FIGS. 25 and 26). Further, when the link arm 831 rotates clockwise about the pin P31, the plunger 835 is pulled upward by the intermediate link 834, and the push operation portion 836 of the plunger 835 is separated from the operation portion 131 of the sensor A21.
  • the plunger 845 is pushed downward via the intermediate link 844, and the push operation portion 846 of the plunger 845 pushes the operation portion 131 of the sensor A22 downward. state.
  • the stepped portion 847 of the plunger 845 comes into contact with the stopper pieces 936 and 946, the downward movement of the plunger 845 is restricted, and the position of the claw 922 at this time is the open position.
  • the power generation unit 20 of the sensor A22 generates the first voltage
  • the transmission unit 33 receives the voltage supply from the power generation unit 20 and transmits the first signal. Based on this, it can be detected that the pair of claws 922 has moved to the open position.
  • the power generation output of the power generation unit 20 is the first voltage equal to or higher than the starting voltage.
  • the pair of claws 922 move from the first return state to the initial stop state.
  • the amount of movement of the movable member 13 of the sensor A22 is greater than or equal to the power generation required distance.
  • the power generation output of the power generation unit 20 of the sensor A22 becomes the first voltage equal to or higher than the starting voltage, and the control circuit 34 keeps the switch 32 off.
  • the power supply circuit 31 converts the power output of the power generation unit 20 into a DC voltage having a voltage value equal to or higher than the starting voltage, and supplies the DC voltage to the transmission unit 33 .
  • the transmission unit 33 receives power supply from the power generation unit 20, is activated, and transmits the first signal.
  • the host system R1 detects that the pair of claws 922 is positioned at the open position by receiving the first signal transmitted from the transmission unit 33 of the sensor A22.
  • FIG. 27 shows a state (hereinafter referred to as a second return state) when the amount of upward movement of the movable member 13 while the pressure source is stopped is less than the required distance for power generation. Since the amount of movement of the movable member 13 until the pair of claws 922 return from the second return state to the initial stop state is less than the distance required for power generation, the power generation output of the power generation unit 20 becomes the second voltage less than the starting voltage. , the power generation output of the power generation unit 20 cannot activate the transmission unit 33 .
  • the control circuit 34 turns on the switch 32 with the generation of the second voltage by the power generation unit 20 as a trigger, the transmission unit 33 is activated by the power supplied from the battery 30, and transmits the second signal. Send.
  • the host system R1 detects that the pair of claws 922 is positioned at the open position by receiving the second signal transmitted from the transmission unit 33 of the sensor A22.
  • the pair of pawls 922 receives the restoring force of the return spring 14 or the like and moves to the position of the first return state
  • the pressure source is restarted and the pair of pawls 922 moves to the closed position before stopping
  • the generator unit 20 of sensor A22 generates a first voltage. Therefore, the transmitting unit 33 of the sensor A22 can receive power from the power generation unit 20 and transmit the first signal.
  • the control circuit 34 of the sensor A 22 is triggered by the generation of the second voltage by the power generation unit 20, and controls the switch 32 to turn on. A second signal can be transmitted.
  • Two sensors A1 are attached to the cylinder SY3 described in Application Example 2 in order to detect the movement of the pair of claws 922 to the closed position and the open position, respectively.
  • the sensors A21 and A21 only the sensor A21 for detecting that the pair of claws 922 has moved to the closed position may be attached to the cylinder SY3, or the sensor that detects that the pair of claws 922 have moved to the open position may be attached. Only the sensor A22 for detection may be attached.
  • the power generation unit 20 includes the power generation section 21, the power generation section 22, and the power generation section 23.
  • the power generation unit 20 does not necessarily include the power generation section 23, and the power generation section 23 can be omitted as appropriate. is.
  • the senor A1 is applied to the pneumatically operated cylinders SY1 to SY3, but it may be applied to a hydraulically operated cylinder or an electrically operated cylinder.
  • “greater than” may be “greater than”. That is, in the comparison of two values, whether or not the two values are equal can be arbitrarily changed depending on the setting of the reference value, etc., so there is no technical difference between “greater than” and “greater than”. Similarly, “less than” may be “less than”.
  • the sensor (A1) of the first aspect includes the movable member (13), the return spring (14), the power generation unit (20), the battery (30), and the transmission unit (33). , provided.
  • the movable member (13) is movable between a first position (PT1) and a second position (PT2) located below the first position (PT1).
  • a return spring (14) applies an upward (Du) return force to the movable member (13).
  • the power generation unit (20) generates power by moving the movable member (13).
  • a transmitting unit (33) transmits radio signals.
  • the power generation unit (20) includes a first power generation section (21) and a second power generation section (22).
  • Each of the first power generation section (21) and the second power generation section (22) generates power by bending according to the movement of the movable member (13).
  • the first power generation section (21) By moving the movable member (13) from the first position (PT1) to the second position (PT2), the first power generation section (21) generates the first voltage.
  • the movable member (13) moved to the second position (PT2) receives the restoring force of the return spring (14) and moves to an intermediate position (PT3) between the second position (PT2) and the first position (PT1). After that, the movable member (13) moves from the intermediate position (PT3) to the second position (PT2), whereby the second power generating section (22) generates the second voltage.
  • the first voltage is a voltage equal to or higher than the activation voltage required to activate the transmitting unit (33), and the second voltage is a voltage less than the activation voltage.
  • the transmission unit (33) receives power from the power generation unit (20) and transmits the first signal when the power generation unit (20) generates the first voltage, and the power generation unit (20) generates the second voltage. If so, it receives power from the battery (30) and transmits the second signal.
  • the transmission unit (33) can transmit the first signal and the second signal without receiving power supply from the outside, wires for power supply and signal transmission become unnecessary. If a wire for power supply and signal transmission is connected to the sensor (A1), disconnection of the wire may occur, but the sensor (A1) does not require a wire for power supply and signal transmission. As such, the likelihood of damage can be reduced.
  • the battery (30) includes a storage element that stores electrical energy generated by the power generation unit (20).
  • the power generation unit (20) further includes a third power generation section (23).
  • the third power generation section (23) has a permanent magnet (41) that moves in accordance with the movement of the movable member (13), and a coil (232) that generates power from changes in magnetic flux caused by the movement of the permanent magnet (41). .
  • the second power generation section (22) includes a piezoelectric element (242) that bends due to movement of the movable member (13).
  • the first signal and the second signal are the same signal.
  • the transmitting unit (33) can transmit the same signal when receiving power from the power generation unit (20) and when receiving power from the battery (30).
  • the sensor (A1) of the sixth aspect in any one of the first to fifth aspects, further comprises a housing (10) and a stopper member (50) holding the housing (10).
  • a housing (10) accommodates a movable member (13), a return spring (14), a power generation unit (20), a battery (30) and a transmission unit (33).
  • the movable member (13) is moved downward Dd by the operating members (906, 814, 824, 835, 845) of cylinders (SY1 to SY3) having operating members (906, 814, 824, 835, 845) that perform reciprocating motion.
  • the movable member (13) is located at the second position (PT2) when the stopper member (50) is in contact with the operating member (906, 814, 824, 835, 845).
  • the stopper member (50) limits downward movement of the action members (906, 814, 824, 835, 845) so that the movable member (13) does not move below the second position (PT2).
  • the possibility of the movable member (13) moving below the second position (PT2) can be reduced.
  • the senor (A1) of the seventh aspect is such that the contact portion (58) of the stopper member (50, 936, 946) that contacts the action member (906, 814, 824, 835, 845) is A position adjusting mechanism (60) for moving up and down with respect to the cylinders (SY1 to SY3) is further provided.
  • the positions of the stopper member (50) and the sensor (A1) with respect to the cylinders (SY1 to SY3) can be adjusted at once using the position adjusting mechanism (60).
  • the movable member (13) is a columnar operation part ( 131).
  • a contact portion (58) of the stopper member (50) is provided with a through-hole (54) into which the operating portion (131) is inserted.
  • the position adjusting mechanism (60) is arranged along the columnar central axis (AX3) of the operation part (131).
  • the operating part (131) is inserted into the through hole (54) of the stopper member (50), the movable member (13) and the operating members (906, 814, 824, 835, 845) It becomes difficult for a cable or the like to enter between them, and the possibility of damage to the sensor (A1) due to the pinching of the cable or the like can be reduced.
  • the position adjustment mechanism (60) is arranged along the cylindrical central axis (AX3) of the operation part (131), the action members (906, 814, 824, 835, 845) are aligned with the movable member (13). ), the possibility that a bending moment is generated in the position adjustment mechanism (60) via the sensor (A1) and the stopper member (50) can be reduced.
  • the sensor (A1) of the ninth aspect in any one of the sixth to eighth aspects, further comprises an attachment member (70) for attaching the stopper member (50) to the cylinders (SY1 to SY3).
  • the mounting member (70) includes a first transmitting portion (E1) that transmits electromagnetic waves
  • the stopper member (50) includes a second transmitting portion (E2) that transmits electromagnetic waves.
  • the first transmission section (E1) and the second transmission section (E2) are arranged so as to overlap at least partially.
  • Attenuation of the transmission signal can be suppressed when the transmission unit (33) transmits the transmission signal as a radio signal.
  • the configurations according to the second to tenth aspects are not essential configurations for the sensor (A1), and can be omitted as appropriate.

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Push-Button Switches (AREA)

Abstract

First and second electricity generating portions generate electricity by flexing in accordance with movement of a movable member. The first electricity generating portion generates a first voltage as a result of the movable member moving from a first position to a second position. The movable member that has moved to the second position is subjected to a returning force of a return spring and is moved to an intermediate position, after which the movable member moves from the intermediate position to the second position, as a result of which the second electricity generating portion generates a second voltage. The first voltage is a voltage at least equal to an activation voltage required to activate a transmission unit, and the second voltage is less than the activation voltage. If an electricity generating unit generates the first voltage, the transmission unit receives an electric power supply from the electricity generating unit and transmits a first signal, and if the electricity generating unit generates the second voltage, the transmission unit receives an electric power supply from a battery and transmits a second signal.

Description

センサsensor
　本開示は、センサに関する。より詳細には、本開示は、可動部材の移動に応じて発生した電力で動作するセンサに関する。 The present disclosure relates to sensors. More particularly, the present disclosure relates to sensors that operate on electrical power generated in response to movement of a moveable member.
　特許文献１は、シリンダ本体と、シリンダ本体に進退自在に装備されたピストン部材と、ピストン部材の位置を検出可能な位置検出機構と、ピストン部材と連動して進退する連動ロッドと、を備えた従来の流体圧シリンダを開示する。位置検出機構は、連動ロッドに設けられた被検出部が前進側設定位置に移動したことを検出する前進位置検出スイッチと、被検出部が後退限位置に移動したことを検出する後退位置検出スイッチと、を備えている。 Patent Literature 1 includes a cylinder body, a piston member attached to the cylinder body so as to be able to advance and retreat, a position detection mechanism capable of detecting the position of the piston member, and an interlocking rod that advances and retreats in conjunction with the piston member. A conventional hydraulic cylinder is disclosed. The position detection mechanism includes a forward position detection switch that detects that the detected part provided on the interlocking rod has moved to the forward setting position, and a backward position detection switch that detects that the detected part has moved to the backward limit position. and have.
実用新案登録第３１９７０２９号公報Utility Model Registration No. 3197029
　センサは、可動部材と、復帰ばねと、発電ユニットと、電池と、送信ユニットと、を備える。前記可動部材は、第１位置と前記第１位置の下方に位置する第２位置との間で移動可能である。前記復帰ばねは、前記可動部材に上方向の復帰力を加える。前記発電ユニットは、前記可動部材が移動することによって発電する。前記送信ユニットは無線信号を送信する。前記発電ユニットは、第１発電部及び第２発電部を含む。前記第１発電部及び前記第２発電部は、それぞれ、前記可動部材の移動に応じて撓むことで発電する。前記可動部材が前記第１位置から前記第２位置へと移動することにより、前記第１発電部が第１電圧を発生する。前記第２位置まで移動した前記可動部材が前記復帰ばねの復帰力を受けて前記第２位置と前記第１位置との間の中間位置まで移動した後で、前記可動部材が前記中間位置から前記第２位置に移動することにより、前記第２発電部が第２電圧を発生する。前記第１電圧は、前記送信ユニットが起動するのに必要な起動電圧以上の電圧であり、前記第２電圧は、前記起動電圧未満の電圧である。前記送信ユニットは、前記発電ユニットが前記第１電圧を発生した場合は、前記発電ユニットから電力供給を受けて第１信号を送信し、前記発電ユニットが前記第２電圧を発生した場合は、前記電池から電力供給を受けて第２信号を送信する。 The sensor includes a movable member, a return spring, a power generation unit, a battery, and a transmission unit. The movable member is movable between a first position and a second position located below the first position. The return spring applies an upward return force to the movable member. The power generation unit generates power by moving the movable member. The transmitting unit transmits radio signals. The power generation unit includes a first power generation section and a second power generation section. Each of the first power generation section and the second power generation section generates power by bending according to the movement of the movable member. As the movable member moves from the first position to the second position, the first power generating section generates a first voltage. After the movable member that has moved to the second position receives the restoring force of the return spring and moves to an intermediate position between the second position and the first position, the movable member moves from the intermediate position to the By moving to the second position, the second power generating section generates a second voltage. The first voltage is a voltage equal to or higher than an activation voltage required to activate the transmission unit, and the second voltage is a voltage lower than the activation voltage. The transmission unit receives power from the power generation unit and transmits a first signal when the power generation unit generates the first voltage, and transmits a first signal when the power generation unit generates the second voltage. It receives power from the battery and transmits the second signal.
　このセンサは、損傷の可能性を低減することができる。 This sensor can reduce the possibility of damage.
図１は、本開示の一実施形態のセンサがオン状態から僅かに復帰したときの断面図である。FIG. 1 is a cross-sectional view of the sensor of one embodiment of the present disclosure when it returns slightly from the ON state. 図２は、同上のセンサの概略的なブロック図である。FIG. 2 is a schematic block diagram of the same sensor. 図３は、図１におけるセンサのＢ１部の断面図である。3 is a cross-sectional view of the B1 portion of the sensor in FIG. 1. FIG. 図４は、同上のセンサのオフ状態での断面図である。FIG. 4 is a cross-sectional view of the same sensor in the OFF state. 図５は、同上のセンサのオフ状態からオン状態に切り替わる直前の断面図である。FIG. 5 is a cross-sectional view of the same sensor just before switching from an off state to an on state. 図６は、同上のセンサのオン状態の断面図である。FIG. 6 is a cross-sectional view of the same sensor in the ON state. 図７は、同上のセンサにおいて可動部材が限界位置まで押されたときの断面図である。FIG. 7 is a cross-sectional view of the same sensor when the movable member is pushed to the limit position. 図８は、同上のセンサがストッパ部材に保持された状態の外観斜視図である。FIG. 8 is an external perspective view of the same sensor held by a stopper member. 図９は、同上のセンサとストッパ部材とを分離した状態の斜視図である。FIG. 9 is a perspective view of a state in which the same sensor and stopper member are separated. 図１０は、同上のセンサがスライドテーブルを駆動するシリンダに取り付けられた状態の斜視図である。FIG. 10 is a perspective view of the same sensor attached to a cylinder that drives the slide table. 図１１は、同上のセンサがシリンダに取り付けられた状態の平面図である。FIG. 11 is a plan view of the same sensor attached to a cylinder. 図１２は、同上のシリンダの第１復帰状態の平面図である。FIG. 12 is a plan view of the first return state of the same cylinder. 図１３は、同上のシリンダの第２復帰状態の平面図である。FIG. 13 is a plan view of the second return state of the same cylinder. 図１４は、同上のシリンダの要部を拡大した平面図である。FIG. 14 is an enlarged plan view of a main part of the same cylinder. 図１５は、適用例１のシリンダを右後方から見た斜視図である。FIG. 15 is a perspective view of the cylinder of Application 1 as seen from the rear right. 図１６は、適用例１のシリンダを左後方から見た斜視図である。FIG. 16 is a perspective view of the cylinder of Application 1 as seen from the rear left. 図１７は、適用例１のシリンダの閉状態の正面図である。17 is a front view of the closed state of the cylinder of Application Example 1. FIG. 図１８は、適用例１のシリンダの開状態の正面図である。18 is a front view of an open state of the cylinder of Application Example 1. FIG. 図１９は、適用例１のシリンダの第１復帰状態の正面図である。FIG. 19 is a front view of the first return state of the cylinder of Application Example 1. FIG. 図２０は、適用例１のシリンダの第２復帰状態の正面図である。FIG. 20 is a front view of the second return state of the cylinder of Application Example 1. FIG. 図２１は、適用例２のシリンダの斜視図である。21 is a perspective view of a cylinder of application example 2. FIG. 図２２は、適用例２のシリンダのリム板が外された状態の斜視図である。FIG. 22 is a perspective view of the cylinder of Application Example 2 with the rim plate removed. 図２３は、適用例２のシリンダのリンク機構を示す閉状態の正面図である。23 is a front view of the closed state of the link mechanism of the cylinder of Application Example 2. FIG. 図２４は、適用例２のシリンダのリンク機構を示す閉状態の斜視図である。24 is a perspective view of the closed state of the link mechanism of the cylinder of Application Example 2. FIG. 図２５は、適用例２のシリンダのリンク機構を示す開状態の正面図である。25 is a front view of the open state of the link mechanism of the cylinder of Application Example 2. FIG. 図２６は、適用例２のシリンダのリンク機構を示す開状態の斜視図である。26 is a perspective view of the open state of the link mechanism of the cylinder of Application Example 2. FIG. 図２７は、適用例２のシリンダのリンク機構を示す中間状態の正面図である。27 is a front view of an intermediate state showing the link mechanism of the cylinder of Application Example 2. FIG.
　本開示の実施形態に係るセンサについて、図面を参照して詳細に説明する。ただし、下記の実施形態において説明する各図は模式的な図であり、各構成要素の大きさ及び厚さのそれぞれの比が必ずしも実際の寸法比を反映しているとは限らない。なお、以下の実施形態で説明する構成は本開示の一例にすぎない。本開示は、以下の実施形態に限定されず、本開示の効果を奏することができれば、設計等に応じて種々の変更が可能である。 A sensor according to an embodiment of the present disclosure will be described in detail with reference to the drawings. However, each drawing described in the following embodiments is a schematic drawing, and the ratio of the size and thickness of each component does not necessarily reflect the actual dimensional ratio. Note that the configurations described in the following embodiments are merely examples of the present disclosure. The present disclosure is not limited to the following embodiments, and various modifications can be made according to design and the like as long as the effects of the present disclosure can be achieved.
　（１）本開示の実施形態に係るセンサの概要
　本開示の実施形態に係るセンサＡ１は、図１に示すように、可動部材１３と、復帰ばね１４と、発電ユニット２０と、電池３０と、送信ユニット３３（図２参照）と、を備える。 (1) Overview of Sensor According to Embodiment of Present Disclosure Sensor A1 according to the embodiment of the present disclosure, as shown in FIG. and a transmission unit 33 (see FIG. 2).
　可動部材１３は、位置ＰＴ１（図４に示すオフ状態での位置）と、位置ＰＴ１の下方に位置する位置ＰＴ２（図６に示すオン状態での位置）との間で移動可能である。 The movable member 13 is movable between a position PT1 (position in the OFF state shown in FIG. 4) and a position PT2 (position in the ON state shown in FIG. 6) located below the position PT1.
　復帰ばね１４は、可動部材１３に上方向Ｄｕの復帰力を加える。 The return spring 14 applies a return force in the upward direction Du to the movable member 13 .
　発電ユニット２０は、可動部材１３が移動することによって発電する。 The power generation unit 20 generates power as the movable member 13 moves.
　送信ユニット３３は、無線信号を送信する。 The transmission unit 33 transmits radio signals.
　発電ユニット２０は、発電部２１及び発電部２２を含む。 The power generation unit 20 includes a power generation section 21 and a power generation section 22 .
　発電部２１及び発電部２２は、それぞれ、可動部材１３の移動に応じて撓むことで発電する。 The power generation section 21 and the power generation section 22 each generate power by bending according to the movement of the movable member 13 .
　可動部材１３が位置ＰＴ１から位置ＰＴ２へと移動することにより、発電部２１が第１電圧を発生する。 By moving the movable member 13 from the position PT1 to the position PT2, the power generating section 21 generates the first voltage.
　位置ＰＴ２まで移動した可動部材１３が復帰ばね１４の復帰力を受けて位置ＰＴ２と位置ＰＴ１との間の中間位置ＰＴ３（図１に示す位置）まで移動した後で、可動部材１３が中間位置ＰＴ３から位置ＰＴ２に移動することにより、発電部２２が第２電圧を発生する。 After the movable member 13 moved to the position PT2 receives the restoring force of the return spring 14 and moves to the intermediate position PT3 (the position shown in FIG. 1) between the positions PT2 and PT1, the movable member 13 returns to the intermediate position PT3. to the position PT2, the power generating section 22 generates the second voltage.
　第１電圧は、送信ユニット３３が起動するのに必要な起動電圧以上の電圧であり、第２電圧は、起動電圧未満の電圧である。 The first voltage is a voltage equal to or higher than the activation voltage necessary for activating the transmission unit 33, and the second voltage is a voltage less than the activation voltage.
　送信ユニット３３は、発電ユニット２０が第１電圧を発生した場合は、発電ユニット２０から電力供給を受けて第１信号を送信する。送信ユニット３３は、発電ユニット２０が第２電圧を発生した場合は、電池３０から電力供給を受けて第２信号を送信する。 When the power generation unit 20 generates the first voltage, the transmission unit 33 receives power from the power generation unit 20 and transmits the first signal. The transmission unit 33 receives power from the battery 30 and transmits the second signal when the power generation unit 20 generates the second voltage.
　ここで、起動電圧とは、送信ユニット３３が無線信号を送信する送信動作を実行可能な電圧範囲の下限値である。例えば、送信ユニット３３が無線通信用のＩＣを含む場合、起動電圧は、無線通信用のＩＣの動作電圧範囲の下限値となる。 Here, the startup voltage is the lower limit value of the voltage range in which the transmission unit 33 can perform the transmission operation of transmitting the wireless signal. For example, when the transmission unit 33 includes an IC for wireless communication, the starting voltage is the lower limit of the operating voltage range of the IC for wireless communication.
　センサＡ１の送信ユニット３３は、可動部材１３が位置ＰＴ１から位置ＰＴ２へと下方向Ｄｄに移動するときには発電部２１から第１電圧を供給されて起動し、第１信号を送信することができる。また、可動部材１３が復帰ばね１４の復帰力によって位置ＰＴ２から中間位置ＰＴ３に移動した後に中間位置ＰＴ３から位置ＰＴ２まで移動する場合、発電部２２が発生する第２電圧は起動電圧未満であるため、送信ユニット３３は起動できない。この場合、送信ユニット３３は、発電ユニット２０が第２電圧を発生したことをトリガとして電池３０から電力供給を受けて第２信号を送信するので、第２電圧が送信ユニット３３の起動電圧未満であっても、送信ユニット３３が第２信号を送信することができる。よって、センサＡ１では外部から電力供給を受けることなく、送信ユニット３３が第１信号及び第２信号を送信できるので、電力供給及び信号送信のための電線が不要になる。センサＡ１に電力供給及び信号送信のための電線が接続されている場合は電線の断線等が発生する可能性があるが、本実施形態のセンサＡ１は電力供給及び信号送信のための電線が不要であるから、損傷の可能性を低減することができる。また、本実施形態のセンサＡ１は電力供給及び信号送信のための電線が不要であるから、センサＡ１の設置位置の自由度が向上するという利点もある。 The transmission unit 33 of the sensor A1 can be activated by being supplied with the first voltage from the power generation section 21 and can transmit the first signal when the movable member 13 moves in the downward direction Dd from the position PT1 to the position PT2. Further, when the movable member 13 moves from the position PT2 to the intermediate position PT3 by the restoring force of the return spring 14 and then moves from the intermediate position PT3 to the position PT2, the second voltage generated by the power generating section 22 is less than the starting voltage. , the sending unit 33 cannot be activated. In this case, the transmission unit 33 is triggered by the generation of the second voltage by the power generation unit 20 and receives power from the battery 30 to transmit the second signal. Even if there is, the transmitting unit 33 can transmit the second signal. Therefore, since the transmission unit 33 can transmit the first signal and the second signal without receiving power supply from the outside, the sensor A1 does not need wires for power supply and signal transmission. If a wire for power supply and signal transmission is connected to the sensor A1, disconnection of the wire may occur, but the sensor A1 of this embodiment does not require a wire for power supply and signal transmission. As such, the likelihood of damage can be reduced. Moreover, since the sensor A1 of this embodiment does not require electric wires for power supply and signal transmission, there is an advantage that the degree of freedom of the installation position of the sensor A1 is improved.
　前述の従来の流体圧シリンダが備える前進位置検出スイッチ及び後退位置検出スイッチはそれぞれリミットスイッチで構成されており、位置検出機構には、リミットスイッチへの電線が接続されている。流体圧シリンダが、例えばロボットのマニピュレータに用いられる場合、マニピュレータの動きによって位置検出機構に接続された電線がマニピュレータ等の部品と擦れて損傷する可能性がある。 The forward position detection switch and the reverse position detection switch provided in the conventional fluid pressure cylinder described above are each composed of a limit switch, and the position detection mechanism is connected to the limit switch with an electric wire. When a fluid pressure cylinder is used, for example, as a manipulator of a robot, there is a possibility that the movement of the manipulator may damage the wires connected to the position detection mechanism by rubbing against parts such as the manipulator.
　対して、本実施形態のセンサＡ１は電力供給及び信号送信のための電線が不要であるから、電線の損傷の可能性を低減することができる。 On the other hand, the sensor A1 of this embodiment does not require wires for power supply and signal transmission, so it is possible to reduce the possibility of damage to the wires.
　（２）実施形態に係るセンサの詳細
　実施形態に係るセンサＡ１は、いわゆる環境発電（エナジーハーベスティング）を行う発電ユニット２０を有している。可動部材１３に下方向Ｄｄの力が加えられていない場合、可動部材１３は、図４に示すように、復帰ばね１４の復帰力等を受けて位置ＰＴ１に移動している。ここで、可動部材１３に下方向Ｄｄの力が加えられて可動部材１３が位置ＰＴ１から位置ＰＴ２に移動すると、発電ユニット２０（具体的には発電部２１）が発生した第１電圧により送信ユニット３３が起動して第１信号を送信する。 (2) Details of Sensor According to Embodiment The sensor A1 according to the embodiment has a power generation unit 20 that performs so-called environmental power generation (energy harvesting). When the force in the downward direction Dd is not applied to the movable member 13, the movable member 13 receives the restoring force of the return spring 14 and the like and moves to the position PT1 as shown in FIG. Here, when the downward force Dd is applied to the movable member 13 and the movable member 13 moves from the position PT1 to the position PT2, the first voltage generated by the power generation unit 20 (specifically, the power generation section 21) causes the transmission unit to 33 activates and transmits the first signal.
　本実施形態では、センサＡ１は、例えば、スライドテーブル９０５を往復動作させるシリンダＳＹ１（図１０～図１４参照）に適用され、スライドテーブル９０５の位置を検出するために使用される。スライドテーブル９０５には、スライドテーブル９０５と一緒に移動する動作部材９０６が固定されている。シリンダＳＹ１には、動作部材９０６の移動範囲Ｗ９０６の両端１９０６、２９０６に１つずつセンサＡ１が取り付けられている。シリンダＳＹ１に取り付けられた２つのセンサＡ１は、動作部材９０６が端１９０６に移動したことを検知するセンサＡ１１と、動作部材９０６が端２９０６に移動したことを検知するセンサＡ１２と、を含む。センサＡ１１の可動部材１３が、端１９０６に移動してきた動作部材９０６によって押されると、発電ユニット２０が発電し、発電ユニット２０から電力供給を受けて送信ユニット３３が無線信号を送信する。また、センサＡ１２の可動部材１３が、端２９０６に移動してきた動作部材９０６によって押されると、発電ユニット２０が発電し、発電ユニット２０から電力供給を受けて送信ユニット３３が無線信号を送信する。なお、シリンダＳＹ１については、「（２．３）シリンダ及び取付部材」において、より詳細に説明する。 In this embodiment, the sensor A1 is applied to, for example, the cylinder SY1 (see FIGS. 10 to 14) that reciprocates the slide table 905, and is used to detect the position of the slide table 905. An operation member 906 that moves together with the slide table 905 is fixed to the slide table 905 . Sensors A1 are attached to cylinder SY1 at both ends 1906 and 2906 of movement range W906 of operating member 906, respectively. Two sensors A1 attached to cylinder SY1 include sensor A11 that detects movement of actuating member 906 to end 1906 and sensor A12 that detects movement of actuating member 906 to end 2906. When the movable member 13 of the sensor A11 is pushed by the operating member 906 that has moved to the end 1906, the power generation unit 20 generates power, receives power supply from the power generation unit 20, and the transmission unit 33 transmits a wireless signal. Further, when the movable member 13 of the sensor A12 is pushed by the operation member 906 that has moved to the end 2906, the power generation unit 20 generates power, receives power supply from the power generation unit 20, and the transmission unit 33 transmits a wireless signal. Cylinder SY1 will be described in more detail in "(2.3) Cylinder and mounting member".
　（２．１）センサの構成
　センサＡ１は、可動部材１３、復帰ばね１４、発電ユニット２０、電池３０、及び送信ユニット３３等を収容する筐体１０を有している。なお、センサＡ１の説明においては、特に断りのない限り、復帰ばね１４が可動部材１３を押す方向を上方向Ｄｕとして、図１及び図８に矢印で示す上方向Ｄｕと下方向Ｄｄと左方向Ｄｌと右方向ＤｒをセンサＡ１の上方向と下方向と左方向と右方向とそれぞれ規定し、図８に矢印で示す前方向Ｄｆと後方向ＤｂをセンサＡ１の前方向と後方向とそれぞれ規定する。右方向Ｄｒと左方向Ｄｌとは、上方向Ｄｕと下方向Ｄｄとに交差する。前方向Ｄｆと後方向Ｄｂとは、上方向Ｄｕと下方向Ｄｄと右方向Ｄｒと左方向Ｄｌとに交差する。実施の形態では、右方向Ｄｒと左方向Ｄｌとは、上方向Ｄｕと下方向Ｄｄとに直角である。前方向Ｄｆと後方向Ｄｂとは、上方向Ｄｕと下方向Ｄｄと右方向Ｄｒと左方向Ｄｌとに直角である。ただし、これらの方向は、説明のために便宜上規定した方向であり、センサＡ１が実際に使用される際の方向を規定するものではない。 (2.1) Sensor Configuration The sensor A1 has a housing 10 that houses the movable member 13, the return spring 14, the power generation unit 20, the battery 30, the transmission unit 33, and the like. In the description of the sensor A1, unless otherwise specified, the direction in which the return spring 14 pushes the movable member 13 is the upward direction Du, and the upward direction Du, the downward direction Dd, and the leftward direction indicated by arrows in FIGS. Dl and the right direction Dr are defined as the upward direction, downward direction, left direction and right direction of the sensor A1, respectively, and the forward direction Df and the rearward direction Db indicated by arrows in FIG. 8 are respectively defined as the forward direction and the rearward direction of the sensor A1. do. The right direction Dr and the left direction Dl cross the upward direction Du and the downward direction Dd. The forward direction Df and the backward direction Db cross the upward direction Du, the downward direction Dd, the right direction Dr, and the left direction Dl. In the embodiment, the right direction Dr and the left direction Dl are perpendicular to the upward direction Du and the downward direction Dd. The forward direction Df and the rearward direction Db are perpendicular to the upward direction Du, the downward direction Dd, the right direction Dr and the left direction Dl. However, these directions are defined for convenience of explanation, and do not define directions when the sensor A1 is actually used.
　筐体１０は、金属材料又は合成樹脂によって形成されたベース１１と、合成樹脂等によって形成されたカバー１２とを含む。 The housing 10 includes a base 11 made of metal material or synthetic resin, and a cover 12 made of synthetic resin or the like.
　ベース１１は、底面の長辺及び短辺の寸法に比べて、高さの寸法が小さい直方体状に形成されている。 The base 11 is formed in the shape of a rectangular parallelepiped whose height dimension is smaller than the dimensions of the long and short sides of the bottom surface.
　カバー１２は、下面の全体に開口部を有する箱型に形成されている。カバー１２には、下面の開口部を塞ぐようにベース１１が取り付けられている。 The cover 12 is formed in a box shape having an opening on the entire lower surface. A base 11 is attached to the cover 12 so as to close the opening on the bottom surface.
　筐体１０の内部には、図１、図２、図４～図７に示すように、可動部材１３、復帰ばね１４、発電ユニット２０、回路基板２５、及び可動ブロック４０等の部品が収容されている。回路基板２５には、電池３０及び送信ユニット３３等の部品が実装されている。 As shown in FIGS. 1, 2, and 4 to 7, the inside of the housing 10 accommodates components such as the movable member 13, the return spring 14, the power generation unit 20, the circuit board 25, and the movable block 40. ing. Components such as a battery 30 and a transmission unit 33 are mounted on the circuit board 25 .
　可動部材１３は、動作部材９０６によって下方向Ｄｄに押される円柱状の操作部１３１を有している。操作部１３１は、カバー１２の上面に設けられた貫通孔１２１（図１参照）に下側から挿入され、貫通孔１２１を通して筐体１０の外部に露出する。可動部材１３には、ベース１１から上方向Ｄｕに突出するポール１１１が挿入される貫通孔１３２が設けられている。ポール１１１には、例えばコイルばねのような復帰ばね１４が挿入されている。可動部材１３は、貫通孔１３２にポール１１１が挿入された状態でベース１１に取り付けられており、可動部材１３とベース１１との間に復帰ばね１４が配置されている。可動部材１３は、ポール１１１にガイドされることによって、位置ＰＴ１と位置ＰＴ２との間で上方向Ｄｕと下方向Ｄｄに移動可能となっている。以下では、可動部材１３が移動する方向（上方向Ｄｕ又は下方向Ｄｄ）に沿った軸ＡＸ１を定義する。つまり、可動部材１３は、位置ＰＴ１と位置ＰＴ２との間で軸ＡＸ１に沿って上方向Ｄｕと下方向Ｄｄに移動可能である。可動部材１３は復帰ばね１４によって上方向Ｄｕに押されており、操作部１３１に下方向Ｄｄの力が加わっていない状態では、可動部材１３は移動範囲の上端、つまり位置ＰＴ１に位置している。 The movable member 13 has a columnar operating portion 131 that is pushed downward Dd by the operating member 906 . The operation unit 131 is inserted from below into a through hole 121 (see FIG. 1) provided in the upper surface of the cover 12 and exposed to the outside of the housing 10 through the through hole 121 . The movable member 13 is provided with a through hole 132 into which the pole 111 protruding from the base 11 in the upward direction Du is inserted. A return spring 14 such as a coil spring is inserted in the pole 111 . The movable member 13 is attached to the base 11 with the pole 111 inserted into the through hole 132 , and the return spring 14 is arranged between the movable member 13 and the base 11 . The movable member 13 is guided by the pole 111 so as to be movable in the upward direction Du and the downward direction Dd between the positions PT1 and PT2. Below, an axis AX1 is defined along the direction in which the movable member 13 moves (the upward direction Du or the downward direction Dd). That is, the movable member 13 can move in the upward direction Du and the downward direction Dd along the axis AX1 between the positions PT1 and PT2. The movable member 13 is pushed in the upward direction Du by the return spring 14, and the movable member 13 is positioned at the upper end of the movement range, that is, at the position PT1 in a state where the force in the downward direction Dd is not applied to the operating portion 131. .
　また、可動部材１３において貫通孔１２１から露出する部位（つまり操作部１３１）には、例えば弾性を有する合成樹脂で形成された保護カバー１６が取り付けられている。これにより、操作部１３１と貫通孔１２１との間の隙間から筐体１０の内部に水又は塵埃等が入り込む可能性を低減している。 A protective cover 16 made of, for example, elastic synthetic resin is attached to a portion of the movable member 13 exposed from the through-hole 121 (that is, the operation portion 131). This reduces the possibility of water, dust, or the like entering the interior of the housing 10 through the gap between the operation portion 131 and the through hole 121 .
　発電ユニット２０は、発電部２１と、発電部２２と、を含む。また、発電ユニット２０は、発電部２３を更に含んでいる。 The power generation unit 20 includes a power generation section 21 and a power generation section 22 . Moreover, the power generation unit 20 further includes a power generation section 23 .
　発電部２１及び発電部２２は共通の構成を有している。発電部２１及び発電部２２の各々は、振動体２４１と、圧電素子２４２と、おもり２４３とを有している。 The power generation unit 21 and the power generation unit 22 have a common configuration. Each of the power generation section 21 and the power generation section 22 has a vibrating body 241 , a piezoelectric element 242 and a weight 243 .
　発電部２１及び発電部２２は、ベース１１の上面に固定された基台１５に保持されている。 The power generation section 21 and the power generation section 22 are held by a base 15 fixed to the upper surface of the base 11 .
　基台１５は、ベース１１の上面に沿って配置される板状のストッパ片１５１と、ストッパ片１５１の左側の端部から上方向Ｄｕに突出する連結片１５２と、ストッパ片１５１と平行に配置されて、左側の端部が連結片１５２に連結されるストッパ片１５３と、を備える。一対のストッパ片１５１，１５３と連結片１５２とはそれぞれ軟磁性材料により形成されており、基台１５の側面視の形状は全体としてＣ型に形成されている。 The base 15 includes a plate-like stopper piece 151 arranged along the upper surface of the base 11 , a connecting piece 152 projecting from the left end of the stopper piece 151 in the upward direction Du, and arranged parallel to the stopper piece 151 . and a stopper piece 153 whose left end is connected to the connecting piece 152 . The pair of stopper pieces 151 and 153 and the connecting piece 152 are each made of a soft magnetic material, and the shape of the base 15 as viewed from the side is C-shaped as a whole.
　発電部２１は、連結片１５２と上側のストッパ片１５３との間に保持され、発電部２２は、連結片１５２と下側のストッパ片１５１との間に保持される。 The power generating section 21 is held between the connecting piece 152 and the upper stopper piece 153, and the power generating section 22 is held between the connecting piece 152 and the lower stopper piece 151.
　振動体２４１は、弾性を有する軟磁性体の板材、例えば、ステンレス鋼板によって矩形板状に形成されている。振動体２４１の左端は基台１５に固定されており、振動体２４１は基台１５から右方向に向かって突出している。 The vibrating body 241 is formed in a rectangular plate shape from a soft magnetic plate material having elasticity, for example, a stainless steel plate. A left end of the vibrating body 241 is fixed to the base 15 , and the vibrating body 241 projects rightward from the base 15 .
　振動体２４１の右端にはおもり２４３が取り付けられている。おもり２４３は、例えば軟磁性材料によって板状に形成されている。発電部２１では振動体２４１の下面におもり２４３が取り付けられており、発電部２２では振動体２４１の上面におもり２４３が取り付けられている。 A weight 243 is attached to the right end of the vibrating body 241 . The weight 243 is made of, for example, a soft magnetic material and has a plate shape. A weight 243 is attached to the lower surface of the vibrating body 241 in the power generating section 21 , and a weight 243 is attached to the upper surface of the vibrating body 241 in the power generating section 22 .
　圧電素子２４２は、振動体２４１の上面及び下面に１つずつ設けられている。圧電素子２４２は、振動体２４１の右端が上方向Ｄｕ又は下方向Ｄｄに撓むことによって振動体２４１と共に撓み、撓み量に応じた電圧を発生する。つまり、発電部２２は、可動部材１３の移動によって撓む圧電素子２４２を含んでいる。圧電素子２４２の材料は、圧電セラミックス、例えば、チタン酸ジルコン酸鉛（Ｐｂ（Ｚｒ・Ｔｉ）Ｏ３）が好適である。ただし、圧電素子２４２を形成する材料は、チタン酸鉛（ＰｂＴｉＯ３）、メタニオブ酸鉛（ＰｂＮｂ２Ｏ６）、チタン酸ビスマス（Ｂｉ４Ｔｉ３Ｏ１２）などの圧電セラミックスであっても構わない。発電部２２は圧電素子２４２を用いて発電を行うので、スポット溶接が行われる現場等、電磁ノイズが存在する環境下でも、センサＡ１の誤動作が発生する可能性を低減できる。 One piezoelectric element 242 is provided on each of the upper and lower surfaces of the vibrating body 241 . The piezoelectric element 242 bends together with the vibrating body 241 when the right end of the vibrating body 241 bends in the upward direction Du or the downward direction Dd, and generates a voltage corresponding to the amount of bending. That is, the power generation section 22 includes the piezoelectric element 242 that bends as the movable member 13 moves. The material of the piezoelectric element 242 is preferably piezoelectric ceramics such as lead zirconate titanate (Pb(Zr.Ti)O3). However, the material forming the piezoelectric element 242 may be piezoelectric ceramics such as lead titanate (PbTiO3), lead metaniobate (PbNb2O6), bismuth titanate (Bi4Ti3O12). Since the power generation unit 22 generates power using the piezoelectric element 242, it is possible to reduce the possibility of malfunction of the sensor A1 even in an environment where electromagnetic noise exists, such as a site where spot welding is performed.
　なお、発電部２１及び発電部２２がそれぞれ備えるおもり２４３の右端部分は、ストッパ片１５１，１５３にそれぞれ設けられた貫通孔１５４に挿入されており、おもり２４３の右端部分が貫通孔１５４の孔縁に当たることで振動体２４１の撓み量が制限されている。 The right end portions of the weights 243 included in the power generation section 21 and the power generation section 22 are inserted into the through holes 154 provided in the stopper pieces 151 and 153, respectively, and the right end portions of the weights 243 are aligned with the rims of the through holes 154. The amount of deflection of the vibrating body 241 is limited by the contact.
　発電部２３は、コア（鉄心）２３１、コイル２３２、及び可動ブロック４０を有する。 The power generation unit 23 has a core (iron core) 231 , a coil 232 and a movable block 40 .
　コア２３１は、純鉄又は磁性ステンレス鋼などの軟磁性材料によって円柱状に形成されており、連結片１５２の右側面にねじ等を用いて固定されている。コア２３１は連結片１５２の右側面から右方向Ｄｒに突出している。 The core 231 is formed in a columnar shape from a soft magnetic material such as pure iron or magnetic stainless steel, and is fixed to the right side surface of the connecting piece 152 using screws or the like. The core 231 protrudes in the right direction Dr from the right side surface of the connecting piece 152 .
　コア２３１には、コイル２３２が取り付けられている。コイル２３２は、コイルボビンに巻線（エナメル線）が巻回されて円筒状に形成されており、コイルボビンの孔にコア２３１が挿入されている。なお、コイル２３２は、自己融着性を有する絶縁体で導体を被覆した電線が、螺旋状に巻回されたボビンレスのコイルであっても構わない。 A coil 232 is attached to the core 231 . The coil 232 is formed in a cylindrical shape by winding a wire (enameled wire) around a coil bobbin, and the core 231 is inserted into a hole of the coil bobbin. The coil 232 may be a bobbinless coil in which an electric wire whose conductor is covered with a self-bonding insulator is spirally wound.
　可動ブロック４０は、図１及び図３に示すように、永久磁石４１と、一対のヨーク４２と、ホルダ４３とを有している。 The movable block 40 has a permanent magnet 41, a pair of yokes 42, and a holder 43, as shown in FIGS.
　永久磁石４１は、例えば、直方体状のネオジム磁石である。ただし、永久磁石４１は、ネオジム磁石以外の磁石、例えば、サマリウムコバルト磁石などであっても構わない。永久磁石４１は上下方向に着磁されており、例えば、上部がＮ極となり、下部がＳ極となっている。 The permanent magnet 41 is, for example, a rectangular parallelepiped neodymium magnet. However, the permanent magnet 41 may be a magnet other than a neodymium magnet, such as a samarium-cobalt magnet. The permanent magnet 41 is magnetized in the vertical direction, for example, the upper part is the N pole and the lower part is the S pole.
　一対のヨーク４２は、それぞれ軟磁性材料によって平板状に形成されている。一対のヨーク４２は永久磁石４１の上面及び下面に一つずつ配置されている。一対のヨーク４２の各々は、ヨーク片４２１と、ヨーク片４２２と、を有している。ヨーク片４２１は、四角形の平板状に形成されている。ヨーク片４２１は永久磁石４１の上面又は下面に沿って配置される。ヨーク片４２２は、矩形の平板状に形成されている。ヨーク片４２２は、ヨーク片４２１の左端からヨーク片４２１の厚み方向（上下方向）に突出している。 Each of the pair of yokes 42 is made of a soft magnetic material and formed into a flat plate shape. A pair of yokes 42 are arranged one each on the upper surface and the lower surface of the permanent magnet 41 . Each of the pair of yokes 42 has a yoke piece 421 and a yoke piece 422 . The yoke piece 421 is formed in a rectangular flat plate shape. The yoke piece 421 is arranged along the top or bottom surface of the permanent magnet 41 . The yoke piece 422 is formed in a rectangular flat plate shape. The yoke piece 422 protrudes from the left end of the yoke piece 421 in the thickness direction (vertical direction) of the yoke piece 421 .
　ホルダ４３は、非磁性材料、例えば、アルミニウム又は合成樹脂によって形成されている。ホルダ４３は、永久磁石４１と、一対のヨーク４２と、を保持する。ホルダ４３は、一対のヨーク４２のヨーク片４２１で永久磁石４１を上下から挟むようにして、永久磁石４１と一対のヨーク４２を保持する。永久磁石４１と一対のヨーク４２とがホルダ４３に保持された状態では、一対のヨーク４２のヨーク片４２２は、永久磁石４１の左側に配置され、互いに離間した状態で対向している。 The holder 43 is made of a non-magnetic material such as aluminum or synthetic resin. The holder 43 holds the permanent magnet 41 and the pair of yokes 42 . The holder 43 holds the permanent magnet 41 and the pair of yokes 42 such that the permanent magnet 41 is sandwiched between the yoke pieces 421 of the pair of yokes 42 . When the permanent magnet 41 and the pair of yokes 42 are held by the holder 43, the yoke pieces 422 of the pair of yokes 42 are arranged on the left side of the permanent magnet 41 and face each other while being spaced apart.
　ここで、ホルダ４３に保持された永久磁石４１及び一対のヨーク４２は、発電部２１の振動体２４１と、発電部２２の振動体２４１との間に配置される。 Here, the permanent magnet 41 and the pair of yokes 42 held by the holder 43 are arranged between the vibrating body 241 of the power generating section 21 and the vibrating body 241 of the power generating section 22 .
　ホルダ４３の前側の側面には溝４４が設けられており、この溝４４に線ばね４５の中間部位が挿入される。線ばね４５は線細工ばねである。具体的には、線ばね４５は、線状の材料により、下から見た形状が略Ｇ形に形成されている。線ばね４５は、可動ブロック４０及び基台１５の周りを囲むように配置され、線ばね４５の端１４５は前側から可動部材１３の孔１３３に挿入され、線ばね４５の端２４５はホルダ４３の後側の側面に設けられた孔に挿入されている。線ばね４５の中間部位は、ホルダ４３の溝４４と、連結片１５２の左側面の溝１５５とに通されている。 A groove 44 is provided on the front side surface of the holder 43 , and an intermediate portion of the wire spring 45 is inserted into this groove 44 . The wire spring 45 is a filigree spring. Specifically, the wire spring 45 is made of a wire-shaped material and has a substantially G shape when viewed from below. The wire spring 45 is arranged to surround the movable block 40 and the base 15 , the end 145 of the wire spring 45 is inserted into the hole 133 of the movable member 13 from the front side, and the end 245 of the wire spring 45 is inserted into the holder 43 . It is inserted into a hole provided on the rear side surface. An intermediate portion of the wire spring 45 is passed through the groove 44 of the holder 43 and the groove 155 on the left side surface of the connecting piece 152 .
　ここで、操作部１３１に下方向Ｄｄの力が加えられて、可動部材１３が位置ＰＴ１から下方向Ｄｄに移動すると、可動部材１３に端１４５が保持された線ばね４５によってホルダ４３が下方向Ｄｄに押され、ホルダ４３が下方向Ｄｄに移動する。図６に示すように、可動部材１３が位置ＰＴ２まで移動すると、ホルダ４３に保持された下側のヨーク４２が発電部２２のおもり２４３に接触し、上側のヨーク４２のヨーク片４２２がコア２３１の先端に接触する。このとき、永久磁石４１、上側のヨーク４２、コア２３１、連結片１５２、発電部２２、下側のヨーク４２、及び永久磁石４１の経路で磁路が形成される。 Here, when a downward force Dd is applied to the operating portion 131 to move the movable member 13 from the position PT1 in the downward direction Dd, the holder 43 is moved downward by the wire spring 45 whose end 145 is held by the movable member 13. Pushed by Dd, the holder 43 moves downward Dd. As shown in FIG. 6 , when the movable member 13 moves to the position PT2, the lower yoke 42 held by the holder 43 contacts the weight 243 of the power generating section 22, and the yoke piece 422 of the upper yoke 42 moves toward the core 231. the tip of the At this time, a magnetic path is formed by the path of the permanent magnet 41 , the upper yoke 42 , the core 231 , the connecting piece 152 , the power generating section 22 , the lower yoke 42 and the permanent magnet 41 .
　その後、操作部１３１を下方向Ｄｄに押す力がなくなると、可動部材１３が復帰ばね１４の復帰力等を受けて上方向Ｄｕに移動する。可動部材１３が上方向Ｄｕに移動すると、可動部材１３に端１４５が保持された線ばね４５によってホルダ４３が上方向Ｄｕに押されて、ホルダ４３が上方向Ｄｕに移動する。図４に示すように、可動部材１３が位置ＰＴ１まで移動すると、ホルダ４３に保持された上側のヨーク４２が発電部２１のおもり２４３に接触し、下側のヨーク４２のヨーク片４２２がコア２３１の先端に接触する。このとき、永久磁石４１、上側のヨーク４２、発電部２１、連結片１５２、コア２３１、下側のヨーク４２、及び永久磁石４１の経路で磁路が形成される。 After that, when the force pushing the operation part 131 downward Dd disappears, the movable member 13 receives the restoring force of the return spring 14 and the like and moves upward Du. When the movable member 13 moves upward Du, the holder 43 is pushed upward Du by the wire spring 45 whose end 145 is held by the movable member 13, and the holder 43 moves upward Du. As shown in FIG. 4, when the movable member 13 moves to the position PT1, the upper yoke 42 held by the holder 43 comes into contact with the weight 243 of the power generating section 21, and the yoke piece 422 of the lower yoke 42 moves toward the core 231. the tip of the At this time, a magnetic path is formed by the path of the permanent magnet 41 , the upper yoke 42 , the power generating section 21 , the connecting piece 152 , the core 231 , the lower yoke 42 and the permanent magnet 41 .
　発電部２３は、ホルダ４３の下側又は上側への移動に応じてコイル２３２を鎖交する磁束が変化することによって発電する。上述のように、発電部２３は、可動部材１３の移動に応じて移動する永久磁石４１と、永久磁石１４の移動による磁束の変化で発電するコイル２３２と、を有しており、電磁誘導による発電も行うことができる。 The power generation unit 23 generates power by changing the magnetic flux linking the coil 232 according to the downward or upward movement of the holder 43 . As described above, the power generation unit 23 includes the permanent magnet 41 that moves in accordance with the movement of the movable member 13, and the coil 232 that generates power using a change in magnetic flux caused by the movement of the permanent magnet 14. It can also generate electricity.
　回路基板２５には、電池３０、電源回路３１（図２参照）、送信ユニット３３とそのアンテナ、制御回路３４（図２参照）、及びスイッチ３２（図２参照）等の部品が実装されている。回路基板２５は、例えば、ストッパ片１５３の上に配置されている。 Components such as a battery 30, a power supply circuit 31 (see FIG. 2), a transmission unit 33 and its antenna, a control circuit 34 (see FIG. 2), and a switch 32 (see FIG. 2) are mounted on the circuit board 25. . The circuit board 25 is arranged on the stopper piece 153, for example.
　スイッチ３２は、例えばノーマリオフ型のＭＯＳＦＥＴであり、電池３０と送信ユニット３３との間に接続されている。スイッチ３２は制御回路３４によってオン／オフが切り替えられる。 The switch 32 is, for example, a normally-off MOSFET, and is connected between the battery 30 and the transmission unit 33. The switch 32 is turned on/off by the control circuit 34 .
　電源回路３１は、発電ユニット２０に電気的に接続される。電源回路３１は、発電ユニット２０で発電される電力（交流電力）を直流電力に変換するように構成される。例えば、電源回路３１は、整流回路、平滑コンデンサ及び電圧レギュレータなどを有する。電源回路３１で変換された直流電力が送信ユニット３３に供給される。 The power supply circuit 31 is electrically connected to the power generation unit 20 . The power supply circuit 31 is configured to convert the power (AC power) generated by the power generation unit 20 into DC power. For example, the power supply circuit 31 has a rectifier circuit, a smoothing capacitor, a voltage regulator, and the like. DC power converted by the power supply circuit 31 is supplied to the transmission unit 33 .
　電池３０は例えば一次電池である。なお、電池３０は、一次電池に限定されず、充電が可能な二次電池、キャパシタ等の蓄電素子でもよい。電池３０は、発電ユニット２０が発生した電気エネルギを蓄える蓄電素子でもよく、電池３０が一次電池である場合に比べて電池３０の交換が不要になるという利点がある。 The battery 30 is, for example, a primary battery. The battery 30 is not limited to a primary battery, and may be a rechargeable secondary battery or a power storage device such as a capacitor. The battery 30 may be a storage element that stores the electrical energy generated by the power generation unit 20, and has the advantage of eliminating the need to replace the battery 30 compared to the case where the battery 30 is a primary battery.
　送信ユニット３３は、電源回路３１又は電池３０から直流電力が供給されることで無線信号により第１信号又は第２信号を送信する。無線信号は、例えばＢｌｕｅｔｏｏｔｈ（登録商標）の規格に準拠した無線信号であり、特に、Ｂｌｕｅｔｏｏｔｈ（登録商標）　Ｌｏｗ　Ｅｎｅｒｇｙの規格に準拠した無線信号であることが好ましい。 The transmission unit 33 transmits the first signal or the second signal by radio signals by being supplied with DC power from the power supply circuit 31 or the battery 30 . The radio signal is, for example, a radio signal conforming to the Bluetooth (registered trademark) standard, and particularly preferably a radio signal conforming to the Bluetooth (registered trademark) Low Energy standard.
　制御回路３４には、発電ユニット２０（発電部２１、発電部２２、及び発電部２３）の出力電圧が入力されている。制御回路３４は、例えば低電圧動作のマイクロコンピュータを含み、発電ユニット２０の発電出力が送信ユニット３３の起動電圧以上の第１電圧であれば、スイッチ３２をオフに制御する。スイッチ３２がオフの場合、送信ユニット３３は発電ユニット２０から電力供給を受けて無線信号により第１信号を送信する。また、制御回路３４は、発電ユニット２０の発電出力が送信ユニット３３の起動電圧未満の第２電圧であれば、スイッチ３２をオンに制御する。スイッチ３２がオンの場合、送信ユニット３３は電池３０から電力供給を受けて無線信号により第２信号を送信する。 The output voltage of the power generation unit 20 (power generation section 21, power generation section 22, and power generation section 23) is input to the control circuit 34. The control circuit 34 includes, for example, a low-voltage microcomputer, and controls the switch 32 to be off when the power generation output of the power generation unit 20 is a first voltage equal to or higher than the starting voltage of the transmission unit 33 . When the switch 32 is off, the transmission unit 33 receives power from the power generation unit 20 and transmits the first signal by radio signal. Further, the control circuit 34 turns on the switch 32 when the power generation output of the power generation unit 20 is a second voltage lower than the starting voltage of the transmission unit 33 . When the switch 32 is on, the transmitting unit 33 is powered by the battery 30 and transmits the second signal by radio signal.
　なお、制御回路３４は、発電部２１及び発電部２２の出力電圧と、発電部２３の出力電圧とに基づいて、発電ユニット２０の出力電圧が起動電圧以上であるか否かを判断し、スイッチ３２のオン／オフを制御してもよい。具体的には、制御回路３４は、発電部２１及び発電部２２が発電している状態で、発電部２３の出力電圧が所定の閾値電圧未満であれば、発電ユニット２０の出力電圧が送信ユニット３３の起動電圧未満であると判断して、スイッチ３２をオンにする。これにより、発電部２１及び発電部２２が発電している状態で、発電部２３の発電出力も閾値電圧以上であれば、スイッチ３２はオフになる。つまり、発電ユニット２０の発電出力が起動電圧以上であれば、スイッチ３２はオフになるので、電池３０から送信ユニット３３に電力供給が行われることはなく、電池３０の消耗が抑制される。 Note that the control circuit 34 determines whether or not the output voltage of the power generation unit 20 is equal to or higher than the starting voltage based on the output voltages of the power generation units 21 and 22 and the output voltage of the power generation unit 23. 32 may be controlled on/off. Specifically, when the power generation unit 21 and the power generation unit 22 are generating power and the output voltage of the power generation unit 23 is less than a predetermined threshold voltage, the control circuit 34 controls the output voltage of the power generation unit 20 to be the same as that of the transmission unit. 33, the switch 32 is turned on. As a result, when the power generation unit 21 and the power generation unit 22 are generating power and the power generation output of the power generation unit 23 is equal to or higher than the threshold voltage, the switch 32 is turned off. That is, when the power output of the power generating unit 20 is equal to or higher than the starting voltage, the switch 32 is turned off, so that the power is not supplied from the battery 30 to the transmitting unit 33, and consumption of the battery 30 is suppressed.
　（２．２）ストッパ部材
　２つのセンサＡ１には、動作部材９０６の動作する動作範囲すなわち動作部材９０６が移動する移動範囲Ｗ９０６を規制することにより可動部材１３の下側への移動量を規制する２つのストッパ部材５０が取り付けられる。ストッパ部材５０は、センサＡ１の筐体１０の一部（例えばベース１１の下面及び右側面）と接触した状態で、筐体１０を保持している。なお、２つのストッパ部材５０は、センサＡ１１に取り付けられるストッパ部材５０Ａと、センサＡ１２に取り付けられるストッパ部材５０Ｂと、を含む。 (2.2) Stopper member The two sensors A1 regulate the amount of downward movement of the movable member 13 by regulating the movement range W906 in which the movement member 906 moves. Two stopper members 50 are attached. The stopper member 50 holds the housing 10 in contact with a part of the housing 10 of the sensor A1 (for example, the lower surface and the right side surface of the base 11). The two stopper members 50 include a stopper member 50A attached to the sensor A11 and a stopper member 50B attached to the sensor A12.
　ストッパ部材５０は、センサＡ１のベース１１が載せられる板状の取付台５１と、取付台５１の右端から上方向Ｄｕに突出する支柱５２と、支柱５２の上端から左方向Ｄｌに突出する保持部５３と、を有している。ストッパ部材５０は、例えば金属材料により形成されている。 The stopper member 50 includes a plate-shaped mounting base 51 on which the base 11 of the sensor A1 is placed, a support 52 projecting from the right end of the mounting base 51 in the upward direction Du, and a holding portion projecting from the upper end of the support 52 in the left direction Dl. 53 and . The stopper member 50 is made of, for example, a metal material.
　取付台５１の上面の右側には円形の凹部５５が設けられている。凹部５５の底面には、取付台５１を上面から下面まで貫通する貫通孔５６が設けられている。貫通孔５６には調整ボルト６１のねじ部６３が上側から挿入され、凹部５５に調整ボルト６１の頭部６２が配置される（図４参照）。 A circular recess 55 is provided on the right side of the upper surface of the mounting base 51 . A through hole 56 is formed in the bottom surface of the recess 55 so as to penetrate the mounting base 51 from the upper surface to the lower surface. A threaded portion 63 of an adjusting bolt 61 is inserted into the through hole 56 from above, and a head portion 62 of the adjusting bolt 61 is arranged in the recess 55 (see FIG. 4).
　また、取付台５１の上面の左側には、取付台５１を上面から下面まで貫通する２つの貫通孔５７が設けられている（図９参照）。 Also, two through holes 57 are provided on the left side of the upper surface of the mounting base 51 so as to penetrate the mounting base 51 from the upper surface to the lower surface (see FIG. 9).
　調整ボルト６１のねじ部６３が貫通孔５６に挿入され、凹部５５に頭部６２が配置された状態で、貫通孔５７に下面から通した固定ねじをベース１１のねじ穴にネジ込むことで、ストッパ部材５０がベース１１に固定される。凹部５５の深さ寸法は、頭部６２の厚み寸法よりも僅かに大きい寸法に設定されており、調整ボルト６１は回転可能な状態でベース１１とストッパ部材５０との間に保持される。 With the threaded portion 63 of the adjustment bolt 61 inserted into the through-hole 56 and the head 62 placed in the recess 55, the fixing screw passed through the through-hole 57 from below is screwed into the threaded hole of the base 11. A stopper member 50 is fixed to the base 11 . The depth dimension of the recess 55 is set to be slightly larger than the thickness dimension of the head 62, and the adjustment bolt 61 is held between the base 11 and the stopper member 50 in a rotatable state.
　調整ボルト６１は、センサＡ１及びストッパ部材５０をシリンダＳＹ１に取り付けるための取付部材７０（図１０及び図１１参照）に設けられたボルト孔７６にネジ込まれる。調整ボルト６１のねじ込み量を調整することで、Ｘ軸においてシリンダＳＹ１に対するセンサＡ１及びストッパ部材５０の位置が調整することができる。つまり、調整ボルト６１等で、動作部材９０６と接触するストッパ部材５０の接触部位５８をシリンダＳＹ１に対して上下に移動させる位置調整機構６０が実現される。なお、本実施形態では２つのセンサＡ１及び２つのストッパ部材５０が２つの取付部材７０を用いてシリンダＳＹ１に取り付けられる。２つの取付部材７０は、センサＡ１１及びストッパ部材５０ＡをシリンダＳＹ１に取り付けるための取付部材７０Ａと、センサＡ１２及びストッパ部材５０ＢをシリンダＳＹ１に取り付けるための取付部材７０Ｂと、を含む。 The adjustment bolt 61 is screwed into a bolt hole 76 provided in a mounting member 70 (see FIGS. 10 and 11) for mounting the sensor A1 and stopper member 50 to the cylinder SY1. By adjusting the screwing amount of the adjustment bolt 61, the positions of the sensor A1 and the stopper member 50 with respect to the cylinder SY1 on the X axis can be adjusted. In other words, the position adjusting mechanism 60 is realized in which the contact portion 58 of the stopper member 50 that contacts the operating member 906 is vertically moved with respect to the cylinder SY1 by the adjusting bolt 61 or the like. In this embodiment, the two sensors A1 and the two stopper members 50 are attached to the cylinder SY1 using two attachment members 70. As shown in FIG. The two mounting members 70 include a mounting member 70A for mounting the sensor A11 and the stopper member 50A to the cylinder SY1, and a mounting member 70B for mounting the sensor A12 and the stopper member 50B to the cylinder SY1.
　保持部５３には、可動部材１３の上部が挿入される貫通孔５４が設けられている。ストッパ部材５０の接触部位５８には、操作部１３１が挿入される貫通孔５４が設けられている。操作部１３１が貫通孔５４に挿入されることによって、環状の保持部５３で可動部材１３の周りが囲まれているので、センサＡ１がシリンダＳＹ１に取り付けられた場合に、シリンダＳＹ１に設けられた計器類のケーブル等が、シリンダＳＹ１の動作部材９０６とセンサＡ１との間に挟まれにくくなり、センサＡ１の破損等が発生しにくくなる。なお、保持部５３が「環状」であるとは、可動部材１３の全周を囲んでいるものに限定されず、一部が途切れていてもよく、保持部５３の上面視の形状はＣ型であってもよい。 The holding portion 53 is provided with a through hole 54 into which the upper portion of the movable member 13 is inserted. A contact portion 58 of the stopper member 50 is provided with a through hole 54 into which the operating portion 131 is inserted. By inserting the operating portion 131 into the through hole 54, the ring-shaped holding portion 53 surrounds the movable member 13. Therefore, when the sensor A1 is attached to the cylinder SY1, the sensor A1 provided on the cylinder SY1 Cables of instruments and the like are less likely to be caught between the operating member 906 of the cylinder SY1 and the sensor A1, and damage to the sensor A1 is less likely to occur. It should be noted that the holding portion 53 being “annular” is not limited to enclosing the entire circumference of the movable member 13, and may be partially cut off, and the shape of the holding portion 53 when viewed from above is a C shape. may be
　ここで、保持部５３の上面が、シリンダＳＹ１が有する動作部材９０６と接触する接触部位５８となる。センサＡ１の可動部材１３は、シリンダＳＹ１の動作部材９０６によって下方向Ｄｄに押されるのであるが、可動部材１３が下方向Ｄｄに移動する場合の限界の位置が限界位置ＰＴ４（図１及び図７参照）である。ストッパ部材５０は、動作部材９０６が下方向Ｄｄに移動したときに動作部材９０６と接触することによって位置ＰＴ２を決定する。言い換えれば、可動部材１３は、ストッパ部材５０が動作部材９０６と接触しているときに、位置ＰＴ２に位置している。ストッパ部材５０は、可動部材１３が位置ＰＴ２よりも下方に移動しないように、動作部材９０６の下方向Ｄｄへの移動を制限している。ここで、ストッパ部材５０において、動作部材９０６と接触する接触部位５８は、限界位置ＰＴ４に存在する可動部材１３の上端よりも上側にあるので、可動部材１３が限界位置ＰＴ４まで押されることがなく、センサＡ１が破損しにくくなる。 Here, the upper surface of the holding portion 53 becomes the contact portion 58 that contacts the operating member 906 of the cylinder SY1. The movable member 13 of the sensor A1 is pushed in the downward direction Dd by the operating member 906 of the cylinder SY1. ). Stopper member 50 determines position PT2 by coming into contact with operating member 906 when operating member 906 moves downward Dd. In other words, the movable member 13 is positioned at the position PT2 when the stopper member 50 is in contact with the operating member 906. As shown in FIG. The stopper member 50 limits the movement of the operating member 906 in the downward direction Dd so that the movable member 13 does not move below the position PT2. Here, since the contact portion 58 of the stopper member 50 that contacts the operating member 906 is above the upper end of the movable member 13 existing at the limit position PT4, the movable member 13 is not pushed to the limit position PT4. , the sensor A1 is less likely to be damaged.
　本実施形態では、センサＡ１を保持したストッパ部材５０が取付部材７０を用いてシリンダＳＹ１に取り付けられる。したがって、位置調整機構６０を用いてシリンダＳＹ１に対してストッパ部材５０の位置を調整すれば、シリンダＳＹ１に対するセンサＡ１の位置も同時に調整できる。よって、シリンダＳＹ１に対するストッパ部材５０の位置調整と、シリンダＳＹ１に対するセンサＡ１の位置調整を別々に行う必要がなく、位置調整の手間を削減できる。また、位置調整機構６０は操作部１３１の円柱状の部位の中心軸ＡＸ３に沿って配置されているので（図１１参照）、動作部材９０６が可動部材１３の操作部１３１に接触した場合に、センサＡ１及びストッパ部材５０を介して位置調整機構６０に曲げモーメントが発生する可能性を低減できる。なお、位置調整機構６０が操作部１３１の円柱状の部位の中心軸ＡＸ３に沿って配置されるとは、位置調整機構６０の調整ボルト６１の中心軸と中心軸ＡＸ３とが平行な状態で、調整ボルト６１の中心軸と中心軸ＡＸ３とが重なっていることに限定されない。位置調整機構６０の調整ボルト６１の中心軸と中心軸ＡＸ３との交差角が４５度以下であればよい。また調整ボルト６１の中心軸と直交する面において、調整ボルト６１の中心軸と中心軸ＡＸ３との間の距離が、製造誤差等に起因する許容寸法以下に収まっていればよい。また、本実施形態において、２つの物体が沿っているとは、両者が完全に平行であることに限定されず、数度程度の角度で交差している状態を含み得る。また、２つの物体が直交しているとは、両者が厳密に９０度の角度で交差していることに限定されず、両者の交差角が９０度から数度程度ずれている状態を含み得る。 In this embodiment, the stopper member 50 holding the sensor A1 is attached to the cylinder SY1 using the attachment member 70. Therefore, by adjusting the position of the stopper member 50 with respect to the cylinder SY1 using the position adjusting mechanism 60, the position of the sensor A1 with respect to the cylinder SY1 can be adjusted at the same time. Therefore, it is not necessary to adjust the position of the stopper member 50 with respect to the cylinder SY1 and the position adjustment of the sensor A1 with respect to the cylinder SY1 separately, thereby reducing the labor for the position adjustment. In addition, since the position adjusting mechanism 60 is arranged along the central axis AX3 of the cylindrical portion of the operating portion 131 (see FIG. 11), when the operating member 906 contacts the operating portion 131 of the movable member 13, The possibility that a bending moment is generated in the position adjustment mechanism 60 via the sensor A1 and the stopper member 50 can be reduced. Note that the positioning of the position adjusting mechanism 60 along the central axis AX3 of the cylindrical portion of the operation unit 131 means that the central axis of the adjusting bolt 61 of the position adjusting mechanism 60 is parallel to the central axis AX3. The central axis of the adjusting bolt 61 and the central axis AX3 are not limited to being overlapped. The intersection angle between the central axis of the adjusting bolt 61 of the position adjusting mechanism 60 and the central axis AX3 should be 45 degrees or less. Further, it is sufficient that the distance between the central axis of the adjusting bolt 61 and the central axis AX3 in the plane orthogonal to the central axis of the adjusting bolt 61 is within the allowable dimension due to manufacturing error or the like. Moreover, in this embodiment, two objects are not limited to being completely parallel, but may include a state in which they intersect at an angle of about several degrees. In addition, the fact that two objects are orthogonal to each other is not limited to the fact that the two objects intersect at an angle of 90 degrees, but may include a state in which the angle of intersection of the two is deviated from 90 degrees by several degrees. .
　また、ストッパ部材５０はセンサＡ１の一部（例えばベース１１の下面及び右側面）と接触しているので、ストッパ部材５０の接触部位５８にシリンダＳＹ１の動作部材９０６が当たったときの衝撃がストッパ部材５０を介してセンサＡ１に伝わりやすくなる。よって、接触部位５８に動作部材９０６が当たったときの衝撃で、おもり２４３がヨーク４２に接触していない発電部２１の振動体２４１が振動しやすくなり、発電部２１の発電出力が大きくなるという利点もある。 In addition, since the stopper member 50 is in contact with a part of the sensor A1 (for example, the lower surface and the right side surface of the base 11), the impact when the operating member 906 of the cylinder SY1 hits the contact portion 58 of the stopper member 50 is applied to the stopper. It becomes easier to transmit to the sensor A1 via the member 50. - 特許庁Therefore, the vibration body 241 of the power generation section 21, in which the weight 243 is not in contact with the yoke 42, is likely to vibrate due to the impact when the operating member 906 hits the contact portion 58, and the power generation output of the power generation section 21 increases. There are also advantages.
　また、ストッパ部材５０には、センサＡ１の筐体１０の前側、左側、及び後側の側面と、上面の左半分とを露出させる開口が設けられており、この開口が電磁波を透過する透過部Ｅ２となっている（図８参照）。なお、透過部Ｅ２は、電磁波に対して透過性を有する合成樹脂製の部材で実現されていてもよい。 In addition, the stopper member 50 is provided with openings for exposing the front, left, and rear side surfaces of the housing 10 of the sensor A1 and the left half of the upper surface. E2 (see FIG. 8). In addition, the transmission part E2 may be realized by a member made of synthetic resin having transparency to electromagnetic waves.
　（２．３）シリンダ及び取付部材
　次に、センサＡ１が取り付けられるシリンダＳＹ１について図１０～図１４を参照して説明する。なお、シリンダＳＹ１についての説明では、図１０～図１４においてＸ軸に沿う方向を上下、Ｙ軸に沿う方向を左右、Ｚ軸に沿う方向を前後と規定する。ただし、これらの方向は一例であり、シリンダＳＹ１の使用時の方向を限定する趣旨ではない。また、図面中の各方向を示す矢印は説明のために表記しているに過ぎず、実体を伴わない。 (2.3) Cylinder and Mounting Member Next, the cylinder SY1 to which the sensor A1 is mounted will be described with reference to FIGS. 10 to 14. FIG. 10 to 14, the direction along the X axis is defined as up and down, the direction along the Y axis is defined as left and right, and the direction along the Z axis is defined as front and back. However, these directions are only examples, and are not meant to limit the directions during use of the cylinder SY1. Also, the arrows indicating each direction in the drawings are only shown for explanation and are not substantial.
　シリンダＳＹ１は、流体圧（例えば空気圧）を受けて、スライドテーブル９０５をＸ軸に沿って往復動作させるために用いられる。スライドテーブル９０５は、Ｘ軸上の停止位置１９０５と停止位置２９０５との間で往復動作を行う。停止位置１９０５は、スライドテーブル９０５が往復動作を行う移動範囲Ｗ９０５の下端の位置（図１１に実線で示す位置）であり、停止位置２９０５は、スライドテーブル９０５の移動範囲Ｗ９０５の上端の位置（図１１に点線で示す位置）である。 The cylinder SY1 is used to receive fluid pressure (for example, air pressure) to reciprocate the slide table 905 along the X axis. The slide table 905 reciprocates between a stop position 1905 and a stop position 2905 on the X-axis. A stop position 1905 is the position of the lower end of the movement range W905 in which the slide table 905 reciprocates (the position indicated by the solid line in FIG. 11), and a stop position 2905 is the position of the upper end of the movement range W905 of the slide table 905 (the 11).
　スライドテーブル９０５は、シリンダＳＹ１の本体９００の前面に、Ｘ軸に沿って移動可能な状態で取り付けられている。 The slide table 905 is attached to the front surface of the main body 900 of the cylinder SY1 so as to be movable along the X axis.
　シリンダＳＹ１の本体９００には、ピストンを収容するシリンダ室が設けられている。シリンダ室は、ピストンを挟んでロッド側の第１空気室とヘッド側の第２空気室とに分けられ、第１空気室及び第２空気室のそれぞれにエア配管９０２，９０３が繋がっている。ピストンの下面からは２本のロッド９０１が下向きに突出している。２本のロッド９０１は、本体９００の下部に設けられた２つの貫通孔にそれぞれ通され、本体９００の外部に露出している。２本のロッド９０１の下端はスライドテーブル９０５に連結されており、スライドテーブル９０５はピストンと連動して上向きと下向きに移動する。 A body 900 of the cylinder SY1 is provided with a cylinder chamber that houses a piston. The cylinder chamber is divided into a rod-side first air chamber and a head-side second air chamber with the piston interposed therebetween, and air pipes 902 and 903 are connected to the first and second air chambers, respectively. Two rods 901 protrude downward from the bottom surface of the piston. The two rods 901 are passed through two through holes provided in the lower portion of the main body 900 and are exposed to the outside of the main body 900 . The lower ends of the two rods 901 are connected to a slide table 905, and the slide table 905 moves upward and downward in conjunction with the piston.
　シリンダＳＹ１には、スライドテーブル９０５の移動範囲を制限する２つのストッパ部材５０（ストッパ部材５０Ａ及びストッパ部材５０Ｂ）が取り付けられている。スライドテーブル９０５の移動範囲Ｗ９０５の下端は、ストッパ部材５０Ａによって停止位置１９０５に制限されている。また、スライドテーブル９０５の移動範囲の上端は、ストッパ部材５０Ｂによって停止位置２９０５に制限されている。 Two stopper members 50 (stopper member 50A and stopper member 50B) that limit the movement range of the slide table 905 are attached to the cylinder SY1. The lower end of the movement range W905 of the slide table 905 is restricted to the stop position 1905 by the stopper member 50A. Also, the upper end of the movement range of the slide table 905 is restricted to the stop position 2905 by the stopper member 50B.
　また、シリンダＳＹ１には、スライドテーブル９０５が停止位置１９０５に移動したことを検知するセンサＡ１１と、スライドテーブル９０５が停止位置２９０５に移動したことを検知するセンサＡ１２と、が取り付けられている。 Further, a sensor A11 that detects that the slide table 905 has moved to the stop position 1905 and a sensor A12 that detects that the slide table 905 has moved to the stop position 2905 are attached to the cylinder SY1.
　ここで、センサＡ１１及びストッパ部材５０Ａは取付部材７０Ａを用いてシリンダＳＹ１に取り付けられ、センサＡ１２及びストッパ部材５０Ｂは取付部材７０Ｂを用いてシリンダＳＹ１に取り付けられている。取付部材７０Ａと取付部材７０Ｂとは、シリンダＳＹ１への取付部分を除いて、Ｘ軸と直交する平面に対してほぼ対称な形状に形成されている。以下では、停止位置１９０５においてストッパ部材５０Ａ及びセンサＡ１１をシリンダＳＹ１に取り付ける取付部材７０Ａについて説明し、取付部材７０Ｂについては説明を省略する。 Here, the sensor A11 and the stopper member 50A are attached to the cylinder SY1 using the attachment member 70A, and the sensor A12 and the stopper member 50B are attached to the cylinder SY1 using the attachment member 70B. The mounting member 70A and the mounting member 70B are formed in a substantially symmetrical shape with respect to a plane orthogonal to the X-axis, except for the mounting portion to the cylinder SY1. Below, the attachment member 70A for attaching the stopper member 50A and the sensor A11 to the cylinder SY1 at the stop position 1905 will be described, and the description of the attachment member 70B will be omitted.
　取付部材７０Ａは、例えば金属材料により形成されている。取付部材７０Ａは、図１０に示すように、センサＡ１１の下面と対向する矩形板状の底板部７１と、底板部７１の後側の端部から上向きに突出する縦片７２と、底板部７１の右側の端部から上向きに突出する縦片７３と、を備えている。 The mounting member 70A is made of, for example, a metal material. As shown in FIG. 10, the mounting member 70A includes a rectangular plate-shaped bottom plate portion 71 facing the lower surface of the sensor A11, a vertical piece 72 projecting upward from the rear end of the bottom plate portion 71, and the bottom plate portion 71 and a vertical piece 73 projecting upward from the right end of the .
　底板部７１には、Ｘ軸に沿って底板部７１を貫通するボルト孔７６が、ストッパ部材５０の貫通孔５６に対応する位置に設けられている。ボルト孔７６の内周面にはねじ部が形成されており、ストッパ部材５０の貫通孔５６に挿入された調整ボルト６１がボルト孔７６にネジ込まれる。調整ボルト６１のねじ込み量を調整することで、ストッパ部材５０及びストッパ部材５０に保持されたセンサＡ１がＸ軸に沿って移動する。調整ボルト６１のねじ込み量を調整した後に、調整ボルト６１のねじ部６３にナット６４を締め付けることで、調整ボルト６１の位置が固定される。これにより、センサＡ１１を保持したストッパ部材５０は、スライドテーブル９０５が停止位置１９０５に移動した状態で、動作部材９０６が接触部位５８に接触する位置に配置される。 The bottom plate portion 71 is provided with bolt holes 76 passing through the bottom plate portion 71 along the X-axis at positions corresponding to the through holes 56 of the stopper member 50 . A threaded portion is formed on the inner peripheral surface of the bolt hole 76 , and the adjustment bolt 61 inserted into the through hole 56 of the stopper member 50 is screwed into the bolt hole 76 . By adjusting the screwing amount of the adjustment bolt 61, the stopper member 50 and the sensor A1 held by the stopper member 50 move along the X-axis. After adjusting the screwing amount of the adjusting bolt 61 , the position of the adjusting bolt 61 is fixed by tightening the nut 64 on the threaded portion 63 of the adjusting bolt 61 . As a result, the stopper member 50 holding the sensor A11 is arranged at a position where the operation member 906 contacts the contact portion 58 while the slide table 905 is moved to the stop position 1905 .
　取付部材７０Ａには、センサＡ１の筐体１０の前側及び左側の側面と、上面の左半分とを露出させる開口が設けられており、この開口が電磁波を透過する透過部Ｅ１となっている（図１０参照）。透過部Ｅ１は、電磁波に対して透過性を有する合成樹脂製のカバーで実現されていてもよい。透過部Ｅ２と透過部Ｅ１とは少なくとも一部が重なるように配置されているので、センサＡ１の送信ユニット３３から送信される無線信号（電波信号）の減衰を抑制できる。 The mounting member 70A is provided with an opening that exposes the front and left side surfaces of the housing 10 of the sensor A1 and the left half of the top surface. See Figure 10). The transmission part E1 may be implemented by a cover made of synthetic resin that is transparent to electromagnetic waves. Since the transmission part E2 and the transmission part E1 are arranged so that at least a part thereof overlaps, the attenuation of the wireless signal (radio wave signal) transmitted from the transmission unit 33 of the sensor A1 can be suppressed.
　取付部材７０Ａ及び取付部材７０ＢのシリンダＳＹ１への取付部分について説明する。取付部材７０Ａでは、縦片７３の上端から上向きに突出する固定片７４（図１２参照）が設けられている。固定片７４には、Ｙ軸に沿って固定片７４を貫通する貫通孔が設けられている。取付部材７０Ａは、シリンダＳＹ１の本体９００の左側面に固定片７４を重ね、貫通孔に通したボルトを本体９００に設けられたボルト穴にネジ込むことによって、本体９００に固定される。 The attachment portion of the attachment member 70A and the attachment member 70B to the cylinder SY1 will be described. The mounting member 70A is provided with a fixed piece 74 (see FIG. 12) projecting upward from the upper end of the vertical piece 73 . The fixed piece 74 is provided with a through-hole passing through the fixed piece 74 along the Y-axis. The mounting member 70A is fixed to the main body 900 by placing the fixing piece 74 on the left side of the main body 900 of the cylinder SY1 and screwing the bolt through the through hole into the bolt hole provided in the main body 900 .
　また、取付部材７０Ｂでは、縦片７３の右側の側面から右向きに突出する固定片７５が設けられている。固定片７５には、Ｘ軸に沿って固定片７５を貫通する貫通孔が設けられている。取付部材７０Ｂは、シリンダＳＹ１の本体９００の上面に固定片７５を重ね、貫通孔に通したボルトを本体９００に設けられたボルト穴にネジ込むことによって、本体９００に固定される。 In addition, the mounting member 70B is provided with a fixing piece 75 projecting rightward from the right side surface of the vertical piece 73 . The fixed piece 75 is provided with a through-hole passing through the fixed piece 75 along the X-axis. The mounting member 70B is fixed to the main body 900 by placing the fixing piece 75 on the upper surface of the main body 900 of the cylinder SY1 and screwing the bolt through the through hole into the bolt hole provided in the main body 900. As shown in FIG.
　なお、取付部材７０Ｂを用いたセンサＡ１２及びストッパ部材５０Ｂの取付方法は、取付部材７０Ａを用いた取付方法と同様であるので、その説明は省略する。 The method of mounting the sensor A12 and the stopper member 50B using the mounting member 70B is the same as the mounting method using the mounting member 70A, so the description thereof will be omitted.
　なお、シリンダＳＹ１には、スライドテーブル９０５が停止位置１９０５及び停止位置２９０５に移動したことをそれぞれ検知するために、２つのセンサＡ１（センサＡ１１及びセンサＡ１２）が取り付けられているが、シリンダＳＹ１に２つのセンサＡ１が取り付けられることは必須ではない。シリンダＳＹ１には、センサＡ１１、Ａ１２のうち、スライドテーブル９０５が停止位置１９０５に移動したことを検知するセンサＡ１１のみが取り付けられていてもよいし、スライドテーブル９０５が停止位置２９０５に移動したことを検知するセンサＡ１２のみが取り付けられていてもよい。 Two sensors A1 (sensor A11 and sensor A12) are attached to cylinder SY1 in order to detect that slide table 905 has moved to stop position 1905 and stop position 2905, respectively. It is not essential that two sensors A1 are attached. Of the sensors A11 and A12, only the sensor A11 for detecting that the slide table 905 has moved to the stop position 1905 may be attached to the cylinder SY1. Only the sensor A12 for detection may be attached.
　（２．４）動作
　次に、本実施形態のセンサＡ１及びシリンダＳＹ１の動作を図１、図４～図７、図１０～図１４に基づいて説明する。なお、シリンダＳＹ１には２つのセンサＡ１１及びセンサＡ１２が取り付けられているが、２つのセンサＡ１１及びセンサＡ１２は同様の構成を有しているので、スライドテーブル９０５の停止位置１９０５への移動を検出するセンサＡ１１の動作のみを説明する。 (2.4) Operation Next, the operation of the sensor A1 and the cylinder SY1 of this embodiment will be described with reference to FIGS. 1, 4 to 7, and 10 to 14. FIG. Two sensors A11 and A12 are attached to the cylinder SY1. Since the two sensors A11 and A12 have the same configuration, they detect the movement of the slide table 905 to the stop position 1905. Only the operation of the sensor A11 to be performed will be described.
　（２．４．１）停止位置２９０５から停止位置１９０５へ移動するときの動作
　スライドテーブル９０５が停止位置２９０５で停止している状態では、センサＡ１１の可動部材１３は、図４に示すように、復帰ばね１４のばね力を受けて位置ＰＴ１に移動している。この状態では、発電部２１の圧電素子２４２、及び、発電部２２の圧電素子２４２に撓みが発生しておらず、発電部２１及び発電部２２の発電出力はゼロである。可動部材１３が位置ＰＴ１に移動した状態では、可動ブロック４０が可動部材１３の移動に連動して上向きに移動しており、コア２３１が下側のヨーク４２に接触している。また、発電部２１のおもり２４３に上側のヨーク４２が接触しており、上側のヨーク４２、発電部２１のおもり２４３及び振動体２４１、基台１５、コア２３１及び下側のヨーク４２を通る磁路が形成される。その結果、永久磁石４１の磁気吸引力によって発電部２１の端部（おもり２４３）が可動ブロック４０に吸着されている。この状態では、コイル２３２に鎖交する磁束が変化しないため、発電部２３の発電出力もゼロである。つまり、スライドテーブル９０５が停止位置２９０５で停止している状態では、発電ユニット２０の発電出力はゼロであり、送信ユニット３３は無線信号の送信を行っていない。 (2.4.1) Operation when Moving from Stop Position 2905 to Stop Position 1905 When the slide table 905 is stopped at the stop position 2905, the movable member 13 of the sensor A11 moves as shown in FIG. It receives the spring force of the return spring 14 and moves to the position PT1. In this state, the piezoelectric element 242 of the power generation section 21 and the piezoelectric element 242 of the power generation section 22 are not bent, and the power generation output of the power generation section 21 and the power generation section 22 is zero. When the movable member 13 has moved to the position PT1, the movable block 40 moves upward in conjunction with the movement of the movable member 13, and the core 231 is in contact with the yoke 42 on the lower side. In addition, the upper yoke 42 is in contact with the weight 243 of the power generation unit 21 , and the magnetic field passing through the upper yoke 42 , the weight 243 of the power generation unit 21 , the vibrating body 241 , the base 15 , the core 231 and the lower yoke 42 is generated. A path is formed. As a result, the end portion (weight 243 ) of the power generating section 21 is attracted to the movable block 40 by the magnetic attraction force of the permanent magnet 41 . In this state, since the magnetic flux interlinking with the coil 232 does not change, the power generation output of the power generation section 23 is also zero. That is, when the slide table 905 is stopped at the stop position 2905, the power generation output of the power generation unit 20 is zero, and the transmission unit 33 does not transmit radio signals.
　スライドテーブル９０５が停止位置２９０５で停止している状態で、エア配管９０３を介して第１空気室にエアが導入され、第２空気室のエアがエア配管９０２を介して外に流れると、ピストンは第１空気室と第２空気室との圧力差によって下向きに移動する。動作部材９０６は、ピストンの下向きへの移動に連動して下向きに移動する。図１０及び図１１に示すように、スライドテーブル９０５が停止位置１９０５まで移動すると、動作部材９０６がストッパ部材５０Ａの接触部位５８と接触し、下向きへの移動がストッパ部材５０Ａによって規制される。これにより、スライドテーブル９０５は停止位置１９０５で停止する。また、動作部材９０６がセンサＡ１１の操作部１３１を下向きに押し込むことによって、発電ユニット２０が第１電圧を発生し、送信ユニット３３が第１信号を送信する。 When the slide table 905 is stopped at the stop position 2905, air is introduced into the first air chamber through the air pipe 903, and air in the second air chamber flows out through the air pipe 902. moves downward due to the pressure difference between the first and second air chambers. The operating member 906 moves downward in conjunction with the downward movement of the piston. As shown in FIGS. 10 and 11, when the slide table 905 moves to the stop position 1905, the motion member 906 comes into contact with the contact portion 58 of the stopper member 50A and its downward movement is restricted by the stopper member 50A. As a result, the slide table 905 stops at the stop position 1905 . Further, when the operation member 906 pushes the operating portion 131 of the sensor A11 downward, the power generation unit 20 generates the first voltage and the transmission unit 33 transmits the first signal.
　ここで、センサＡ１１の発電動作を図５及び図６に基づいて説明する。動作部材９０６によって操作部１３１が下向きに押されると、可動部材１３が下向きに移動し、可動部材１３の移動に応じて可動ブロック４０が下向きに移動する。このとき、可動ブロック４０に吸着された発電部２１の振動体２４１及び圧電素子２４２が下向きに撓み、圧電素子２４２は撓み量に応じた電圧を発生する。そして、発電部２１のおもり２４３の右端部分が、ストッパ片１５３の貫通孔１５４の下側縁に当たった時点で、振動体２４１の撓みが規制され、可動ブロック４０が更に下向きに移動すると、おもり２４３が上側のヨーク４２から開放される。このとき、発電部２１の振動体２４１が振動を開始し、振動体２４１の振動に応じて圧電素子２４２が電圧を発生する。 Here, the power generation operation of the sensor A11 will be explained based on FIGS. 5 and 6. FIG. When the operating portion 131 is pushed downward by the operating member 906 , the movable member 13 moves downward, and the movable block 40 moves downward according to the movement of the movable member 13 . At this time, the vibrating body 241 and the piezoelectric element 242 of the power generating section 21 attracted to the movable block 40 bend downward, and the piezoelectric element 242 generates a voltage corresponding to the amount of bending. When the right end portion of the weight 243 of the power generating section 21 hits the lower edge of the through hole 154 of the stopper piece 153, the bending of the vibrating body 241 is restricted, and when the movable block 40 moves further downward, the weight 243 are released from the upper yoke 42 . At this time, the vibrating body 241 of the power generating section 21 starts to vibrate, and the piezoelectric element 242 generates voltage according to the vibration of the vibrating body 241 .
　また、発電部２１のおもり２４３が上側のヨーク４２から離れると、コイル２３２に鎖交する磁束が急激に減少し、発電部２３が電圧を発生する。また、可動部材１３が位置ＰＴ１に移動すると、図６に示すように、コア２３１が上側のヨーク４２に接触し、下側のヨーク４２が発電部２２のおもり２４３に接触する。これにより、上側のヨーク４２、コア２３１、連結片１５２、発電部２２の振動体２４１及びおもり２４３、上側のヨーク４２を通る磁路が形成される。その結果、永久磁石４１の磁気吸引力によって発電部２２のおもり２４３が可動ブロック４０に吸着される。このように、可動部材１３が位置ＰＴ１から位置ＰＴ２まで移動すると、その間にコイル２３２に鎖交する磁束が変化するので、発電部２３が、磁束の変化に応じた発電出力を発生する。 Further, when the weight 243 of the power generation unit 21 is separated from the upper yoke 42, the magnetic flux interlinking with the coil 232 is rapidly reduced, and the power generation unit 23 generates voltage. Further, when the movable member 13 moves to the position PT1, the core 231 contacts the upper yoke 42, and the lower yoke 42 contacts the weight 243 of the power generation section 22, as shown in FIG. Thereby, a magnetic path passing through the upper yoke 42 , the core 231 , the connecting piece 152 , the vibrating body 241 and the weight 243 of the power generating section 22 , and the upper yoke 42 is formed. As a result, the weight 243 of the power generation unit 22 is attracted to the movable block 40 by the magnetic attraction force of the permanent magnet 41 . In this way, when the movable member 13 moves from the position PT1 to the position PT2, the magnetic flux interlinking with the coil 232 changes during that time, so the power generating section 23 generates power output according to the change in the magnetic flux.
　したがって、可動部材１３が位置ＰＴ１から位置ＰＴ２に移動するまでの間に、発電部２２及び発電部２３が、起動電圧を超える第１電圧を出力し、送信ユニット３３は、発電ユニット２０から供給される電力で第１信号を送信する。送信ユニット３３から送信される第１信号は外部の上位システムＲ１（図２参照）によって受信される。上位システムＲ１は、送信ユニット３３からの無線通信を受信する通信機能を有している。上位システムＲ１は、センサＡ１１から受信した第１信号に基づいて、スライドテーブル９０５が停止位置１９０５に移動したことを検知できる。 Therefore, while the movable member 13 moves from the position PT1 to the position PT2, the power generation sections 22 and 23 output the first voltage exceeding the starting voltage, and the transmission unit 33 is supplied from the power generation unit 20. transmit the first signal at a power A first signal transmitted from the transmission unit 33 is received by an external host system R1 (see FIG. 2). The host system R1 has a communication function of receiving wireless communication from the transmission unit 33. FIG. The host system R1 can detect that the slide table 905 has moved to the stop position 1905 based on the first signal received from the sensor A11.
　可動部材１３が位置ＰＴ２に移動した状態では、発電部２１の圧電素子２４２の撓み量、及び、発電部２２の圧電素子２４２の撓み量がそれぞれゼロになり、発電部２１及び発電部２２の発電出力はゼロになる。また、可動部材１３が位置ＰＴ２で停止した状態では可動ブロック４０も停止しているので、コイル２３２を鎖交する磁束は変化せず、発電部２３の発電出力はゼロになる。これにより、送信ユニット３３からの無線信号の送信も停止する。 When the movable member 13 has moved to the position PT2, the amount of deflection of the piezoelectric element 242 of the power generation section 21 and the amount of deflection of the piezoelectric element 242 of the power generation section 22 become zero, and the power generation sections 21 and 22 generate power. output will be zero. Further, since the movable block 40 is also stopped when the movable member 13 is stopped at the position PT2, the magnetic flux linking the coil 232 does not change, and the power generation output of the power generation section 23 becomes zero. As a result, the transmission of radio signals from the transmission unit 33 is also stopped.
　（２．４．２）停止位置１９０５から停止位置２９０５へ移動するときの動作
　スライドテーブル９０５が停止位置１９０５で停止している状態で、エア配管９０２を介して第２空気室にエアが導入され、第１空気室のエアがエア配管９０３を介して外に流れると、ピストンは第１空気室と第２空気室との圧力差によって上向きに移動する。動作部材９０６は、ピストンの上向きへの移動に連動して上向きに移動する。 (2.4.2) Operation when Moving from Stop Position 1905 to Stop Position 2905 With the slide table 905 stopped at the stop position 1905, air is introduced into the second air chamber via the air pipe 902. , when the air in the first air chamber flows out through the air pipe 903, the piston moves upward due to the pressure difference between the first and second air chambers. The operating member 906 moves upward in conjunction with the upward movement of the piston.
　動作部材９０６が上向きに移動すると、動作部材９０６が操作部１３１を下向きに押す力がなくなり、可動部材１３が復帰ばね１４の復帰力等を受けて上向きに移動する。このとき、図１に示すように、可動ブロック４０に吸着された発電部２２の振動体２４１及び圧電素子２４２が上向きに撓み、圧電素子２４２は撓み量に応じた電圧を発生する。そして、発電部２２のおもり２４３の右端部分が、ストッパ片１５３の貫通孔１５４の上側縁に当たった時点で、振動体２４１の撓みが規制され、可動ブロック４０が更に上向きに移動すると、おもり２４３が下側のヨーク４２から開放される。このとき、発電部２２の振動体２４１が振動を開始し、振動体２４１の振動に応じて圧電素子２４２が電圧を発生する。 When the operating member 906 moves upward, the force of the operating member 906 that pushes the operating portion 131 downward disappears, and the movable member 13 receives the restoring force of the return spring 14 and the like and moves upward. At this time, as shown in FIG. 1, the vibrating body 241 and the piezoelectric element 242 of the power generating section 22 attracted to the movable block 40 bend upward, and the piezoelectric element 242 generates a voltage corresponding to the amount of bending. When the right end portion of the weight 243 of the power generating section 22 hits the upper edge of the through hole 154 of the stopper piece 153, the bending of the vibrating body 241 is restricted, and when the movable block 40 moves further upward, the weight 243 is released from the lower yoke 42. At this time, the vibrating body 241 of the power generation section 22 starts to vibrate, and the piezoelectric element 242 generates voltage according to the vibration of the vibrating body 241 .
　また、発電部２２のおもり２４３が下側のヨーク４２から離れると、コイル２３２に鎖交する磁束が急激に減少し、発電部２３が電圧を発生する。また、可動部材１３が位置ＰＴ２に移動すると、図４に示すように、コア２３１が下側のヨーク４２に接触し、上側のヨーク４２が発電部２１のおもり２４３に接触する。これにより、上側のヨーク４２、発電部２１のおもり２４３及び振動体２４１、連結片１５２、コア２３１、及び下側のヨーク４２を通る磁路が形成される。その結果、永久磁石４１の磁気吸引力によって発電部２１のおもり２４３が可動ブロック４０に吸着される。このように、可動部材１３が位置ＰＴ２から位置ＰＴ１まで移動すると、その間にコイル２３２に鎖交する磁束が変化するので、発電部２３が、磁束の変化に応じた発電出力を発生する。 Further, when the weight 243 of the power generation section 22 is separated from the lower yoke 42, the magnetic flux interlinking with the coil 232 is rapidly reduced, and the power generation section 23 generates voltage. Further, when the movable member 13 moves to the position PT2, the core 231 contacts the lower yoke 42 and the upper yoke 42 contacts the weight 243 of the power generation section 21, as shown in FIG. As a result, a magnetic path passing through the upper yoke 42 , the weight 243 and the vibrating body 241 of the power generating section 21 , the connecting piece 152 , the core 231 and the lower yoke 42 is formed. As a result, the weight 243 of the power generation unit 21 is attracted to the movable block 40 by the magnetic attraction force of the permanent magnet 41 . In this way, when the movable member 13 moves from the position PT2 to the position PT1, the magnetic flux interlinking the coil 232 changes during that time, so the power generating section 23 generates power output according to the change in magnetic flux.
　したがって、可動部材１３が位置ＰＴ２から位置ＰＴ１に移動するまでの間に、発電部２１及び発電部２３が、起動電圧を超える第１電圧を出力し、センサＡ１１の送信ユニット３３は、発電ユニット２０から供給される電力で第１信号を送信する。このとき、上位システムＲ１は、センサＡ１１の送信ユニット３３から送信される第１信号を受信することによって、スライドテーブル９０５が停止位置１９０５から停止位置２９０５に向かって移動したことを検知できる。 Therefore, while the movable member 13 moves from the position PT2 to the position PT1, the power generation section 21 and the power generation section 23 output the first voltage exceeding the starting voltage, and the transmission unit 33 of the sensor A11 moves to the power generation unit 20 transmit the first signal with power supplied from the . At this time, the host system R1 can detect that the slide table 905 has moved from the stop position 1905 toward the stop position 2905 by receiving the first signal transmitted from the transmission unit 33 of the sensor A11.
　また、スライドテーブル９０５が停止位置２９０５まで移動すると、動作部材９０６がストッパ部材５０Ｂの接触部位５８と接触し、上向きへの移動がストッパ部材５０Ｂによって規制される。これにより、スライドテーブル９０５は停止位置２９０５で停止する。また、動作部材９０６がセンサＡ１２の操作部１３１を上向きに押し込むことによって、発電ユニット２０が第１電圧を発生し、送信ユニット３３が第１信号を送信する。このときのセンサＡ１２の発電動作は、「（２．４．１）停止位置２９０５から停止位置１９０５へ移動するときの動作」で説明したセンサＡ１１の発電動作と同様である。外部の上位システムＲ１は、センサＡ１２の送信ユニット３３から送信される第１信号を受信することによって、スライドテーブル９０５が停止位置２９０５に位置していることを検知する。 Further, when the slide table 905 moves to the stop position 2905, the motion member 906 comes into contact with the contact portion 58 of the stopper member 50B, and upward movement is restricted by the stopper member 50B. As a result, the slide table 905 stops at the stop position 2905 . Further, when the operation member 906 pushes the operating portion 131 of the sensor A12 upward, the power generation unit 20 generates the first voltage and the transmission unit 33 transmits the first signal. The power generation operation of the sensor A12 at this time is the same as the power generation operation of the sensor A11 described in "(2.4.1) Operation when moving from the stop position 2905 to the stop position 1905". The external host system R1 detects that the slide table 905 is positioned at the stop position 2905 by receiving the first signal transmitted from the transmission unit 33 of the sensor A12.
　（２．４．３）停止位置１９０５でシリンダの圧力源が停止した後に再起動したときの動作
　図１０及び図１１に示すように、スライドテーブル９０５が停止位置１９０５で停止している状態である初期停止状態で、休日等による操業停止でシリンダＳＹ１の圧力源（例えば空圧ポンプ等）が長時間停止すると、配管等でのエアのリークによって第１空気室及び第２空気室の圧力が低下する可能性がある。第１空気室及び第２空気室の圧力が低下すると、可動部材１３が復帰ばね１４の復帰力等を受けて上向きに移動する。その後、操業が再開してシリンダＳＹ１の圧力源が再起動すると、圧力源からエアが供給されてシリンダＳＹ１が、スライドテーブル９０５を操業停止前の位置である停止位置１９０５に復帰させる。 (2.4.3) Operation when the cylinder pressure source is restarted after stopping at the stop position 1905 As shown in FIGS. 10 and 11, the slide table 905 is stopped at the stop position 1905. In the initial shutdown state, if the pressure source for cylinder SY1 (for example, an air pressure pump) is stopped for a long time due to an operation stop due to a holiday, etc., the pressure in the first and second air chambers will drop due to air leaks from piping, etc. there's a possibility that. When the pressure in the first air chamber and the second air chamber decreases, the movable member 13 receives the restoring force of the return spring 14 and the like and moves upward. Thereafter, when operation resumes and the pressure source of cylinder SY1 is restarted, air is supplied from the pressure source and cylinder SY1 returns slide table 905 to stop position 1905, which is the position before operation was stopped.
　ここで、圧力源が再起動してからスライドテーブル９０５が停止位置１９０５に復帰するまでに可動部材１３が移動する移動量が所定の発電必要距離以上であれば、発電ユニット２０の発電出力は起動電圧以上の第１電圧となる。発電必要距離は、例えば、発電ユニット２０の発電出力が、送信ユニット３３の起動電圧となるときの可動部材１３の移動量である。具体的には、発電必要距離は、発電部２２の圧電素子２４２が発生する発電出力が、第１電圧以上となるような撓み量が発生するときの移動量である。なお、発電必要距離は、例えば、コア２３１が上側のヨーク４２から離れる位置まで可動ブロック４０が上向きに移動しているときの可動部材１３の位置から位置ＰＴ２まで可動部材１３が移動する距離であってもよい。コア２３１が上側のヨーク４２から離れる位置まで可動ブロック４０が上向きに移動していれば、圧力源が再起動してからスライドテーブル９０５が停止位置１９０５に復帰するまでに、コイル２３２を通過する磁束が変化して発電部２３が発電するので、発電部２２及び発電部２３によって起動電圧を超える第１電圧を発生することができる。 Here, if the amount of movement of the movable member 13 from when the pressure source is restarted until the slide table 905 returns to the stop position 1905 is greater than or equal to the predetermined power generation required distance, the power generation output of the power generation unit 20 is activated. It becomes the 1st voltage more than a voltage. The power generation required distance is, for example, the amount of movement of the movable member 13 when the power generation output of the power generation unit 20 becomes the starting voltage of the transmission unit 33 . Specifically, the power generation required distance is the amount of movement when the power generation output generated by the piezoelectric element 242 of the power generation unit 22 is flexed so as to be greater than or equal to the first voltage. The power generation required distance is, for example, the distance that the movable member 13 moves from the position of the movable member 13 to the position PT2 when the movable block 40 moves upward to the position where the core 231 is separated from the upper yoke 42. may If the movable block 40 has moved upward to the position where the core 231 is separated from the upper yoke 42, the magnetic flux passing through the coil 232 will be changes and the power generation unit 23 generates power, the power generation unit 22 and the power generation unit 23 can generate the first voltage exceeding the starting voltage.
　図１２は、圧力源の停止中に可動部材１３が上向きに移動した移動量が発電必要距離以上であるときの状態である第１復帰状態を示している。なお、図１２の例では、動作部材９０６が操作部１３１から離れているので、可動部材１３は位置ＰＴ１まで移動している。スライドテーブル９０５が第１復帰状態から初期停止状態に移動するまでに可動部材１３が移動する移動量は発電必要距離以上になるので、発電ユニット２０の発電出力が起動電圧以上の第１電圧となり、制御回路３４はスイッチ３２のオフを維持する。このとき、電源回路３１が発電ユニット２０の発電出力を、起動電圧以上の電圧値の直流電圧に変換して送信ユニット３３に供給する。すなわち、発電ユニット２０の発電出力は送信ユニット３３の起動電圧以上であるので、送信ユニット３３は、発電ユニット２０から電力供給を受けて起動し、第１信号を送信する。上位システムＲ１は、センサＡ１１からの第１信号を受信することによって、スライドテーブル９０５が停止位置１９０５に位置していることを検知する。 FIG. 12 shows the first return state, which is the state when the amount of upward movement of the movable member 13 while the pressure source is stopped is greater than or equal to the power generation required distance. In the example of FIG. 12, since the action member 906 is separated from the operation portion 131, the movable member 13 has moved to the position PT1. Since the amount of movement of the movable member 13 during the movement of the slide table 905 from the first return state to the initial stop state is equal to or greater than the power generation required distance, the power generation output of the power generation unit 20 becomes the first voltage equal to or greater than the starting voltage. Control circuit 34 keeps switch 32 off. At this time, the power supply circuit 31 converts the power output of the power generation unit 20 into a DC voltage having a voltage value equal to or higher than the starting voltage, and supplies the DC voltage to the transmission unit 33 . That is, since the power generation output of the power generation unit 20 is equal to or higher than the activation voltage of the transmission unit 33, the transmission unit 33 receives power supply from the power generation unit 20, is activated, and transmits the first signal. Host system R1 detects that slide table 905 is positioned at stop position 1905 by receiving the first signal from sensor A11.
　一方、図１３は、圧力源の停止中に可動部材１３が上向きに移動した移動量が発電必要距離未満であるときの状態である第２復帰状態を示している。スライドテーブル９０５が第２復帰状態から初期停止状態に移動するまでに可動部材１３が移動する移動量は発電必要距離未満であるので、発電ユニット２０の発電出力は起動電圧未満の第２電圧となる。 On the other hand, FIG. 13 shows the second return state, which is the state when the amount of upward movement of the movable member 13 while the pressure source is stopped is less than the required distance for power generation. Since the amount of movement of the movable member 13 until the slide table 905 moves from the second return state to the initial stop state is less than the power generation required distance, the power generation output of the power generation unit 20 becomes the second voltage less than the starting voltage. .
　図１は、第２復帰状態におけるセンサＡ１１（センサＡ１）の状態を示している。この状態では、コア２３１は上側のヨーク４２に接触しているので、スライドテーブル９０５が第２復帰状態から初期停止状態に復帰するまでの間に、可動部材１３の移動に応じて可動ブロック４０が下向きに移動しても、コイル２３２を通過する磁束は変化せず、発電部２３の発電出力はゼロとなる。一方、発電部２２の圧電素子２４２は僅かに撓んでいるため、スライドテーブル９０５が第２復帰状態から初期停止状態に復帰するまでの間に発電部２２が起動電圧未満の第２電圧を発生する。このとき、制御回路３４は、発電ユニット２０が第２電圧を発生したことをトリガとして、スイッチ３２をオンに制御するので、送信ユニット３３は電池３０から供給される電力で起動し、第２信号を送信する。上位システムＲ１は、センサＡ１１の送信ユニット３３から送信される第２信号を受信することによって、スライドテーブル９０５が停止位置１９０５に位置していることを検知する。 FIG. 1 shows the state of the sensor A11 (sensor A1) in the second return state. In this state, since the core 231 is in contact with the upper yoke 42, the movable block 40 moves in accordance with the movement of the movable member 13 until the slide table 905 returns from the second return state to the initial stop state. Even if it moves downward, the magnetic flux passing through the coil 232 does not change, and the power generation output of the power generation section 23 becomes zero. On the other hand, since the piezoelectric element 242 of the power generation section 22 is slightly bent, the power generation section 22 generates a second voltage lower than the starting voltage during the period until the slide table 905 returns from the second return state to the initial stop state. . At this time, the control circuit 34 is triggered by the generation of the second voltage by the power generation unit 20, and controls the switch 32 to turn on. to send. The host system R1 detects that the slide table 905 is positioned at the stop position 1905 by receiving the second signal transmitted from the transmission unit 33 of the sensor A11.
　なお、スライドテーブル９０５が第２復帰状態から初期停止状態に復帰するまでの間に、発電部２２は、可動部材１３が下向きに移動することによって軸ＡＸ２（図１参照）に沿って撓んでおり、軸ＡＸ１は軸ＡＸ２に沿っているので、可動部材１３の移動に応じて発電部２２が発生する発電出力を大きくできる。ここで、軸ＡＸ１が軸ＡＸ２に沿っているとは、好ましくは軸ＡＸ１と軸ＡＸ２とが平行であるが、軸ＡＸ１と軸ＡＸ２とが平行であることに限定されず、軸ＡＸ１の延びる方向と軸ＡＸ２が伸びる方向とが成す角度が４５度以下であることが好ましい。 It should be noted that while the slide table 905 returns from the second return state to the initial stop state, the power generation unit 22 is bent along the axis AX2 (see FIG. 1) due to the downward movement of the movable member 13. , the axis AX1 is along the axis AX2, so that the power generation output generated by the power generation unit 22 can be increased according to the movement of the movable member 13. FIG. Here, the expression that the axis AX1 is along the axis AX2 preferably means that the axis AX1 and the axis AX2 are parallel. and the direction in which the axis AX2 extends is preferably 45 degrees or less.
　ここにおいて、第１信号と第２信号とは同じ信号でもあることが好ましく、上位システムＲ１は、第２信号を受信することでスライドテーブル９０５が停止位置１９０５に位置していることを検知できる。なお、第２信号が第１信号と同じ信号であることは必須ではなく、第２信号は、第１信号と異なる情報を含む信号でもよい。例えば、第２信号は、発電ユニット２０が第２電圧を発生したとの情報を含んでもよく、上位システムＲ１は、第２信号を受信したことから、圧力源が再起動後にスライドテーブル９０５が停止位置１９０５に移動したことを検知できる。 Here, the first signal and the second signal are preferably the same signal, and the host system R1 can detect that the slide table 905 is positioned at the stop position 1905 by receiving the second signal. Note that the second signal is not necessarily the same signal as the first signal, and the second signal may be a signal containing information different from that of the first signal. For example, the second signal may include information that the power generation unit 20 has generated the second voltage, and since the host system R1 has received the second signal, the slide table 905 stops after the pressure source is restarted. Movement to position 1905 can be detected.
　なお、スライドテーブル９０５が停止位置２９０５で停止している状態でシリンダＳＹ１の圧力源が長時間停止すると、上述と同様に、復帰ばね１４の復帰力等を受けてスライドテーブル９０５の位置がずれる可能性がある。ここで、スライドテーブル９０５が復帰ばね１４の復帰力等を受けて第１復帰状態に移動した場合、圧力源が再起動してスライドテーブル９０５が停止前の停止位置２９０５に移動すると、センサＡ１２の発電ユニット２０が第１電圧を発生する。したがって、センサＡ１２の送信ユニット３３は発電ユニット２０から電力供給を受けて第１信号を送信できる。また、スライドテーブル９０５が復帰ばね１４の復帰力等を受けて第２復帰状態に移動した場合、圧力源が再起動してスライドテーブル９０５が停止前の停止位置２９０５に移動すると、センサＡ１２の発電ユニット２０は第２電圧を発生するため、送信ユニット３３は発電ユニット２０の発電出力では起動できない。この場合、センサＡ１２の制御回路３４は、発電ユニット２０の発電出力が第２電圧であることから、スイッチ３２をオンに制御するので、送信ユニット３３は電池３０から供給される電力で起動し、第２信号を送信することができる。 If the pressure source of the cylinder SY1 is stopped for a long time while the slide table 905 is stopped at the stop position 2905, the position of the slide table 905 may be displaced by receiving the restoring force of the return spring 14 or the like as described above. have a nature. Here, when the slide table 905 receives the restoring force of the return spring 14 and the like and moves to the first return state, when the pressure source is restarted and the slide table 905 moves to the stop position 2905 before stopping, the sensor A12 A power generation unit 20 generates a first voltage. Therefore, the transmission unit 33 of the sensor A12 can receive power from the power generation unit 20 and transmit the first signal. When the slide table 905 receives the restoring force of the return spring 14 and moves to the second return state, the pressure source is restarted and the slide table 905 moves to the stop position 2905 before stopping. Since the unit 20 generates the second voltage, the transmission unit 33 cannot be activated by the power output of the power generation unit 20 . In this case, the control circuit 34 of the sensor A 12 turns on the switch 32 because the power output of the power generation unit 20 is the second voltage. A second signal can be transmitted.
　（３）センサが適用されるシリンダのバリエーション
　上記のシリンダＳＹ１は、スライドテーブル９０５を駆動するためのシリンダであるが、センサＡ１は、スライドテーブル９０５を駆動するシリンダＳＹ１以外のシリンダにも適用可能である。以下、センサＡ１が適用されるシリンダのバリエーションを説明する。 (3) Variation of Cylinders to which Sensors are Applied Cylinder SY1 is a cylinder for driving slide table 905, but sensor A1 can also be applied to cylinders other than cylinder SY1 for driving slide table 905. be. Variations of cylinders to which the sensor A1 is applied will be described below.
　上記のセンサＡ１は、平行ハンドを駆動するシリンダに適用されてもよい。平行ハンドを駆動するシリンダにセンサＡ１を取り付ける取付方式としては、図１５～図２０に示すような外付け方式と、図２１～図２７に示すような内蔵方式とがある。以下では、平行ハンドを駆動するシリンダにセンサＡ１を外付けした適用例１と、平行ハンドを駆動するシリンダにセンサＡ１を内蔵した適用例２と、についてそれぞれ説明する。 The above sensor A1 may be applied to the cylinder that drives the parallel hand. As mounting methods for mounting the sensor A1 on the cylinder that drives the parallel hand, there are an external mounting method as shown in FIGS. 15 to 20 and a built-in method as shown in FIGS. Application Example 1 in which the sensor A1 is externally attached to the cylinder that drives the parallel hand, and Application Example 2 in which the sensor A1 is built into the cylinder that drives the parallel hand will be described below.
　（３．１）適用例１
　平行ハンドを駆動するシリンダＳＹ２にセンサＡ１を外付けした適用例１について図１５～図２０を参照して説明する。なお、適用例１のシリンダＳＹ２の説明では、図１５において、Ｘ軸に沿う方向を上下、Ｙ軸に沿う方向を左右、Ｚ軸に沿う方向を前後と規定する。ただし、これらの方向は、説明のために便宜上規定した方向であり、センサＡ１及びシリンダＳＹ２が実際に使用される際の方向を規定するものではない。 (3.1) Application example 1
An application example 1 in which the sensor A1 is externally attached to the cylinder SY2 that drives the parallel hand will be described with reference to FIGS. 15 to 20. FIG. In the description of the cylinder SY2 of Application Example 1, in FIG. 15, the direction along the X-axis is defined as up and down, the direction along the Y-axis is defined as left and right, and the direction along the Z-axis is defined as front and back. However, these directions are defined for convenience of explanation, and do not define directions when the sensor A1 and cylinder SY2 are actually used.
　（３．１．１）適用例１の構成
　シリンダＳＹ２は、直方体状の本体９１０を有している。本体９１０の上面には一対の爪９１１が配置されている。一対の爪９１１はＹ軸に沿って移動可能に設けられている。本体９１０の内部には、ピストンが往復運動可能な状態で配置されたシリンダ室が設けられている。シリンダ室は、ピストンを挟んでロッド側の第１空気室とヘッド側の第２空気室とに分けられ、第１空気室及び第２空気室のそれぞれにエア配管９１２，９１３が繋がっている。ピストンにはロッドが連結されており、ピストンと共にロッドが往復運動を行うと、ロッドの往復動作がリンク機構を介して一対の爪９１１に伝達される。これにより、一対の爪９１１は、両者の間隔が最小となる閉位置（図１５～図１７に示す位置）、又は、両者の間隔が最大となる開位置（図１８に示す位置）に移動する。 (3.1.1) Configuration of Application Example 1 Cylinder SY2 has a rectangular parallelepiped main body 910 . A pair of claws 911 are arranged on the upper surface of the main body 910 . A pair of claws 911 are provided movably along the Y-axis. Inside the main body 910, a cylinder chamber is provided in which a piston is arranged so as to be able to reciprocate. The cylinder chamber is divided into a rod-side first air chamber and a head-side second air chamber with the piston interposed therebetween, and air pipes 912 and 913 are connected to the first and second air chambers, respectively. A rod is connected to the piston, and when the rod reciprocates together with the piston, the reciprocating motion of the rod is transmitted to the pair of pawls 911 via the link mechanism. As a result, the pair of claws 911 moves to the closed position (position shown in FIGS. 15 to 17) where the distance between the two is minimum, or to the open position (position shown in FIG. 18) where the distance between the two is maximum. .
　シリンダＳＹ２には、２つのセンサＡ１と２つのストッパ部材５０とが、２つの取付部材８０を用いて取り付けられている。 Two sensors A1 and two stopper members 50 are attached to the cylinder SY2 using two attachment members 80.
　２つのセンサＡ１は、一対の爪９１１が閉位置に移動したことを検知するセンサＡ２１と、一対の爪９１１が開位置に移動したことを検知するセンサＡ２２と、を含む。２つのストッパ部材５０は、センサＡ２１に取り付けられて、一対の爪９１１の閉方向への移動範囲を規制するストッパ部材５０Ａと、センサＡ２２に取り付けられて、一対の爪９１１の開方向への移動範囲を規制するストッパ部材５０Ｂと、を含む。２つの取付部材８０は、センサＡ２１及びストッパ部材５０Ａを本体９１０の右側面に取り付けるための取付部材８０Ａと、センサＡ２２及びストッパ部材５０Ｂを本体９１０の左側面に取り付けるための取付部材８０Ｂと、を含む。なお、センサＡ２１及びセンサＡ２２は、上述したセンサＡ１と同様の構成を有しているので、センサＡ２１及びセンサＡ２２の構成についての説明は省略する。また、ストッパ部材５０Ａ及びストッパ部材５０Ｂは、上述したストッパ部材５０と同様の構成を有しているので、ストッパ部材５０Ａ及びストッパ部材５０Ｂの構成についての説明は省略する。 The two sensors A1 include a sensor A21 that detects movement of the pair of claws 911 to the closed position and a sensor A22 that detects movement of the pair of claws 911 to the open position. The two stopper members 50 are attached to the sensor A21 and attached to the stopper member 50A for restricting the movement range of the pair of claws 911 in the closing direction, and attached to the sensor A22 to limit the movement of the pair of claws 911 in the opening direction. and a stopper member 50B that limits the range. The two mounting members 80 include a mounting member 80A for mounting the sensor A21 and the stopper member 50A on the right side surface of the main body 910, and a mounting member 80B for mounting the sensor A22 and the stopper member 50B on the left side surface of the main body 910. include. Note that the sensor A21 and the sensor A22 have the same configuration as the sensor A1 described above, so the description of the configuration of the sensor A21 and the sensor A22 is omitted. Also, since the stopper member 50A and the stopper member 50B have the same configuration as the stopper member 50 described above, description of the configuration of the stopper member 50A and the stopper member 50B is omitted.
　取付部材８０Ａは、本体９１０の右側の側面に例えば固定ねじを用いて取り付けられる固定片８１Ａと、固定片８１Ａの下端部から右向きに突出する突出片８２Ａと、固定片８１Ａの上部の前端から右向きに突出するリンク支持片８３Ａと、を備える。突出片８２Ａには調整ボルト６１がねじ込まれるボルト孔が設けられている。ストッパ部材５０Ａに保持されたセンサＡ２１は、調整ボルト６１を突出片８２Ａのボルト孔にねじ込み、ねじ込み量を調整した状態で調整ボルト６１にナット６４を締め付けることによって、取付部材８０Ａに固定される（図１７参照）。なお、取付部材８０Ａは、センサＡ２１のカバー１２の側面を露出させる開口を有しており、この開口が電磁波を透過する透過部Ｅ５となっている。取付部材８０Ａの透過部Ｅ５は、ストッパ部材５０Ａに設けられた透過部Ｅ２（図８参照）と一部が重なっているので、センサＡ２１から送信される電波信号の減衰が抑制される。なお、透過部Ｅ５は合成樹脂製の部材で実現されていてもよい。 The mounting member 80A includes a fixing piece 81A that is attached to the right side surface of the main body 910 using, for example, a fixing screw, a projecting piece 82A that projects rightward from the lower end of the fixing piece 81A, and a rightward projecting piece 82A that projects rightward from the upper front end of the fixing piece 81A. and a link support piece 83A protruding into. The projecting piece 82A is provided with a bolt hole into which the adjusting bolt 61 is screwed. The sensor A21 held by the stopper member 50A is fixed to the mounting member 80A by screwing the adjusting bolt 61 into the bolt hole of the protruding piece 82A and tightening the nut 64 on the adjusting bolt 61 after adjusting the amount of screwing ( See Figure 17). The mounting member 80A has an opening that exposes the side surface of the cover 12 of the sensor A21, and this opening serves as a transmitting portion E5 that transmits electromagnetic waves. Since the transmitting portion E5 of the mounting member 80A partially overlaps the transmitting portion E2 (see FIG. 8) provided on the stopper member 50A, attenuation of the radio signal transmitted from the sensor A21 is suppressed. In addition, the transmission part E5 may be realized by a member made of synthetic resin.
　取付部材８０Ｂは、本体９１０の左側の側面に例えば固定ねじを用いて取り付けられる固定片８１Ｂと、固定片８１Ｂの下端部から左向きに突出する突出片８２Ｂと、固定片８１Ｂの上部の後端から左向きに突出するリンク支持片８３Ｂと、を備える。突出片８２Ｂには調整ボルト６１のねじ部６３がネジ込まれるボルト孔が設けられている。ストッパ部材５０Ｂに保持されたセンサＡ２２は、調整ボルト６１を突出片８２Ｂのボルト孔にねじ込み、ねじ込み量を調整した状態で調整ボルト６１にナット６４を締め付けることによって、取付部材８０Ｂに固定される（図１７参照）。また、取付部材８０Ｂは、センサＡ２２のカバー１２の側面を露出させる開口を有しており、この開口が電磁波を透過する透過部Ｅ５となっている。取付部材８０Ｂの透過部Ｅ５は、ストッパ部材５０Ｂに設けられた透過部Ｅ２（図８参照）と一部が重なっているので、センサＡ２２から送信される電波信号の減衰が抑制される。なお、透過部Ｅ５は合成樹脂製の部材で実現されていてもよい。 The mounting member 80B includes a fixed piece 81B attached to the left side surface of the main body 910 using, for example, a fixing screw, a projecting piece 82B projecting leftward from the lower end of the fixed piece 81B, and a rear end of the upper portion of the fixed piece 81B. and a link support piece 83B projecting leftward. The projecting piece 82B is provided with a bolt hole into which the threaded portion 63 of the adjusting bolt 61 is screwed. The sensor A22 held by the stopper member 50B is fixed to the mounting member 80B by screwing the adjusting bolt 61 into the bolt hole of the protruding piece 82B and tightening the nut 64 on the adjusting bolt 61 after adjusting the amount of screwing ( See Figure 17). Further, the mounting member 80B has an opening that exposes the side surface of the cover 12 of the sensor A22, and this opening serves as a transmitting portion E5 that transmits electromagnetic waves. Since the transmitting portion E5 of the mounting member 80B partially overlaps with the transmitting portion E2 (see FIG. 8) provided on the stopper member 50B, attenuation of the radio signal transmitted from the sensor A22 is suppressed. In addition, the transmission part E5 may be realized by a member made of synthetic resin.
　また、シリンダＳＹ２は、右側の爪９１１の左右の動きを上下の動きに変換してセンサＡ２１に伝えるリンク機構８１０と、左側の爪９１１の左右の動きを上下の動きに変換してセンサＡ２２に伝えるリンク機構８２０と、を備えている。 In addition, the cylinder SY2 has a link mechanism 810 that converts the lateral movement of the right claw 911 into vertical movement and transmits it to the sensor A21, and a link mechanism 810 that converts the horizontal movement of the left claw 911 into vertical movement and transmits it to the sensor A22. and a link mechanism 820 for transmitting.
　リンク機構８１０は、連結部８１１と、駆動リンク８１２と、中間リンク８１３と、動作部材である従動リンク８１４と、を備えている。 The link mechanism 810 includes a connecting portion 811, a driving link 812, an intermediate link 813, and a driven link 814 that is an operating member.
　連結部８１１は、右側の爪９１１の基部にねじ等で固定されている。 The connecting part 811 is fixed to the base of the claw 911 on the right side with a screw or the like.
　駆動リンク８１２及び中間リンク８１３は、それぞれ、矩形板状に形成されている。駆動リンク８１２には、長辺に沿って３つの孔が設けられている。中間リンク８１３には長辺に沿って２つの孔が設けられている。駆動リンク８１２の端１８１２の孔には連結部８１１に設けられたピンＰ１１が挿入されており、駆動リンク８１２はピンＰ１１を中心に回転可能である。駆動リンク８１２の中央の孔にはピンＰ１２の第１端が挿入されている。中間リンク８１３の端１８１３の孔にはピンＰ１２の第２端が挿入されており、駆動リンク８１２及び中間リンク８１３はピンＰ１２を中心に回転可能である。駆動リンク８１２の端２８１２の孔には、従動リンク８１４の上部に固定されたピンＰ１３が挿入されており、駆動リンク８１２はピンＰ１２を中心に回転可能である。また、中間リンク８１３の端２８１３の孔には、リンク支持片８３Ａに固定されたピンＰ１４が挿入されており、中間リンク８１３はピンＰ１４を中心に回転可能である。ピンＰ１４は、従動リンク８１４において、ピンＰ１３が挿入される孔よりも下側に、従動リンク８１４を前後に貫通するように設けられた長孔８１６に挿入されている。長孔８１６は左右の寸法に比べて上下の寸法が長い形状に形成されており、ピンＰ１４にガイドされた状態で従動リンク８１４がＸ軸に沿って移動可能となっている。また、従動リンク８１４の下部には、可動部材１３の操作部１３１を押すための矩形状の押操作部８１５が設けられている。 The drive link 812 and the intermediate link 813 are each formed in a rectangular plate shape. Drive link 812 is provided with three holes along its long side. The intermediate link 813 is provided with two holes along its long side. A pin P11 provided in the connecting portion 811 is inserted into the hole of the end 1812 of the driving link 812, and the driving link 812 can rotate about the pin P11. A first end of pin P12 is inserted into the center hole of drive link 812 . The second end of the pin P12 is inserted into the hole of the end 1813 of the intermediate link 813, and the drive link 812 and the intermediate link 813 are rotatable around the pin P12. A pin P13 fixed to the top of the driven link 814 is inserted into the hole of the end 2812 of the drive link 812, and the drive link 812 can rotate about the pin P12. A pin P14 fixed to the link support piece 83A is inserted into the hole of the end 2813 of the intermediate link 813, and the intermediate link 813 can rotate about the pin P14. The pin P14 is inserted into an elongated hole 816 provided in the driven link 814 so as to pass through the driven link 814 in the front-rear direction below the hole through which the pin P13 is inserted. The elongated hole 816 is formed in a shape whose vertical dimension is longer than its horizontal dimension, and the driven link 814 can move along the X-axis while being guided by the pin P14. Further, a rectangular push operation portion 815 for pushing the operation portion 131 of the movable member 13 is provided below the driven link 814 .
　リンク機構８２０は、連結部８２１と、駆動リンク８２２と、中間リンク８２３と、動作部材である従動リンク８２４と、を備えている。 The link mechanism 820 includes a connecting portion 821, a driving link 822, an intermediate link 823, and a driven link 824 that is an operating member.
　連結部８２１は、左側の爪９１１の基部にねじ等で固定されている。 The connecting part 821 is fixed to the base of the claw 911 on the left side with a screw or the like.
　駆動リンク８２２及び中間リンク８２３は、それぞれ、矩形板状に形成されている。駆動リンク８２２には、長辺に沿って３つの孔が設けられている。中間リンク８２３には長辺に沿って２つの孔が設けられている。駆動リンク８２２の端１８２２の孔には連結部８２１に設けられたピンＰ２１が挿入されており、駆動リンク８２２はピンＰ２１を中心に回転可能である。駆動リンク８２２の中央の孔にはピンＰ２２の第１端が挿入されている。中間リンク８２３の端１８２３の孔にはピンＰ２２の第２端が挿入されており、駆動リンク８２２及び中間リンク８２３はピンＰ２２を中心に回転可能である。駆動リンク８２２の端２８２２の孔には、従動リンク８２４の下部に固定されたピンＰ２３が挿入されており、駆動リンク８２２はピンＰ２３を中心に回転可能である。また、中間リンク８２３の端２８２３の孔には、リンク支持片８３Ｂに固定されたピンＰ２４が挿入されており、中間リンク８２３はピンＰ２４を中心に回転可能である。ピンＰ２４は、従動リンク８２４に設けられた長孔８２６に挿入されている。長孔８２６は、ピンＰ２３よりも上側に、従動リンク８２４を前後に貫通するように設けられている。長孔８２６は左右の寸法に比べて上下の寸法が長い形状に形成されており、ピンＰ２４にガイドされた状態で従動リンク８２４がＸ軸に沿って移動可能となっている。また、従動リンク８２４の下部には、可動部材１３の操作部１３１を押すための矩形状の押操作部８２５が設けられている。 The drive link 822 and the intermediate link 823 are each formed in a rectangular plate shape. Drive link 822 is provided with three holes along its long side. The intermediate link 823 is provided with two holes along its long side. A pin P21 provided in the connecting portion 821 is inserted into the hole of the end 1822 of the driving link 822, and the driving link 822 can rotate around the pin P21. A first end of the pin P22 is inserted into the center hole of the drive link 822 . The second end of the pin P22 is inserted into the hole of the end 1823 of the intermediate link 823, and the drive link 822 and the intermediate link 823 are rotatable around the pin P22. A pin P23 fixed to the lower portion of the driven link 824 is inserted into the hole of the end 2822 of the drive link 822, and the drive link 822 can rotate about the pin P23. A pin P24 fixed to the link support piece 83B is inserted into the hole of the end 2823 of the intermediate link 823, and the intermediate link 823 can rotate about the pin P24. The pin P24 is inserted into an elongated hole 826 provided in the driven link 824. As shown in FIG. The long hole 826 is provided above the pin P23 so as to pass through the driven link 824 in the front-rear direction. The elongated hole 826 is formed in a shape whose vertical dimension is longer than its horizontal dimension, and the driven link 824 can move along the X-axis while being guided by the pin P24. Further, a rectangular push operation portion 825 for pushing the operation portion 131 of the movable member 13 is provided below the driven link 824 .
　（３．１．２）適用例１の動作
　以下に、適用例１のシリンダＳＹ２の動作を説明する。 (3.1.2) Operation of Application Example 1 The operation of cylinder SY2 of Application Example 1 will be described below.
　図１５～図１７は一対の爪９１１が閉位置に移動している状態を示している。第１空気室にエアが供給されると、ピストンと共にロッドが下向きに移動することで、一対の爪９１１が閉位置に移動する。一対の爪９１１が閉位置に移動すると、リンク機構８１０の駆動リンク８１２がピンＰ１１を中心に右回りに回転するとともに、中間リンク８１３がピンＰ１２を中心に左回りに回転しながら、従動リンク８１４が下向きに移動する。これにより、押操作部８１５が可動部材１３の操作部１３１を下向きに押した状態となる。また、一対の爪９１１が閉位置に移動すると、リンク機構８２０の駆動リンク８２２がピンＰ２１を中心に右回りに回転するとともに、中間リンク８２３がピンＰ２２を中心に左回りに回転しながら、従動リンク８２４が上向きに移動する。これにより、押操作部８２５が可動部材１３の操作部１３１から離れた状態となる。このとき、センサＡ２１の発電ユニット２０が第１電圧を発生し、送信ユニット３３が発電ユニット２０から電圧供給を受けて第１信号を送信するので、上位システムＲ１はセンサＡ２１から送信された第１信号に基づいて、一対の爪９１１が閉位置に移動したことを検知できる。 15 to 17 show the state in which the pair of claws 911 are moved to the closed position. When air is supplied to the first air chamber, the rod moves downward together with the piston, thereby moving the pair of claws 911 to the closed position. When the pair of pawls 911 move to the closed position, the driving link 812 of the link mechanism 810 rotates clockwise about the pin P11, and the intermediate link 813 rotates counterclockwise about the pin P12, while the driven link 814 rotates. moves downward. As a result, the push operation portion 815 pushes the operation portion 131 of the movable member 13 downward. Further, when the pair of claws 911 move to the closed position, the drive link 822 of the link mechanism 820 rotates clockwise about the pin P21, and the intermediate link 823 rotates counterclockwise about the pin P22. Link 824 moves upward. As a result, the push operation portion 825 is separated from the operation portion 131 of the movable member 13 . At this time, the power generation unit 20 of the sensor A21 generates the first voltage, and the transmission unit 33 receives the voltage supply from the power generation unit 20 and transmits the first signal. Based on the signal, it can be detected that the pair of claws 911 has moved to the closed position.
　また、第２空気室にエアが供給されると、ピストンと共にロッドが上向きに移動することで、一対の爪９１１が閉位置から開位置に移動する（図１８参照）。一対の爪９１１が開位置に移動すると、リンク機構８１０の駆動リンク８１２がピンＰ１１を中心に左回りに回転するとともに、中間リンク８１３がピンＰ１２を中心に右回りに回転しながら、従動リンク８１４が上向きに移動する。これにより、押操作部８１５が可動部材１３の操作部１３１から離れた状態となる。また、一対の爪９１１が開位置に移動すると、リンク機構８２０の駆動リンク８２２がピンＰ２１を中心に左回りに回転するとともに、中間リンク８２３がピンＰ２２を中心に右回りに回転しながら、従動リンク８２４が下向きに移動する。これにより、押操作部８２５によって可動部材１３の操作部１３１が下向きに押された状態となる。このとき、センサＡ２２の発電ユニット２０が第１電圧を発生し、送信ユニット３３が発電ユニット２０から電圧供給を受けて第１信号を送信するので、上位システムＲ１はセンサＡ２２から送信された第１信号に基づいて、一対の爪９１１が閉位置に移動したことを検知できる。 Also, when air is supplied to the second air chamber, the rod moves upward together with the piston, thereby moving the pair of claws 911 from the closed position to the open position (see FIG. 18). When the pair of pawls 911 moves to the open position, the drive link 812 of the link mechanism 810 rotates counterclockwise about the pin P11, and the intermediate link 813 rotates clockwise about the pin P12. moves upwards. As a result, the push operation portion 815 is separated from the operation portion 131 of the movable member 13 . When the pair of claws 911 move to the open position, the driving link 822 of the link mechanism 820 rotates counterclockwise about the pin P21, and the intermediate link 823 rotates clockwise about the pin P22, thereby causing the driven link 823 to rotate clockwise. Link 824 moves downward. As a result, the operation portion 131 of the movable member 13 is pushed downward by the push operation portion 825 . At this time, the power generation unit 20 of the sensor A22 generates the first voltage, and the transmission unit 33 receives the voltage supply from the power generation unit 20 and transmits the first signal. Based on the signal, it can be detected that the pair of claws 911 has moved to the closed position.
　図１８に示すように、シリンダＳＹ２の一対の爪９１１が開位置で停止している状態である初期停止状態で、休日等による操業停止でシリンダＳＹ２の圧力源（例えば空圧ポンプ等）が長時間停止すると、配管等でのエアのリークによって第１空気室及び第２空気室の圧力が低下する可能性がある。第１空気室及び第２空気室の圧力が低下すると、センサＡ２２の可動部材１３が復帰ばね１４の復帰力等を受けて上向きに移動する。その後、操業が再開してシリンダＳＹ２の圧力源が再起動すると、圧力源からエアが供給されてシリンダＳＹ２が、操業停止前の位置である開状態の位置に復帰する。 As shown in FIG. 18, in the initial stop state in which the pair of claws 911 of the cylinder SY2 are stopped at the open position, the pressure source (for example, the pneumatic pump) of the cylinder SY2 is extended due to the stoppage of operation due to a holiday or the like. If the time is stopped, there is a possibility that the pressures of the first air chamber and the second air chamber will decrease due to air leakage from piping or the like. When the pressure in the first air chamber and the second air chamber decreases, the movable member 13 of the sensor A22 receives the restoring force of the return spring 14 and the like and moves upward. After that, when the operation is restarted and the pressure source of the cylinder SY2 is restarted, air is supplied from the pressure source and the cylinder SY2 returns to the open position which is the position before the operation is stopped.
　ここで、圧力源が再起動してから一対の爪９１１が開状態の位置に復帰するまでにセンサＡ２２の可動部材１３が移動する移動量が所定の発電必要距離以上であれば、発電ユニット２０が発電して出力する電圧は起動電圧以上の第１電圧となる。 Here, if the amount of movement of the movable member 13 of the sensor A 22 from when the pressure source is restarted until the pair of claws 911 return to the open position is greater than or equal to the predetermined power generation required distance, the power generation unit 20 generates and outputs a first voltage equal to or higher than the starting voltage.
　図１９は、圧力源の停止中にセンサＡ２２の可動部材１３が上向きに移動した移動量が発電必要距離以上であるときの状態である第１復帰状態を示している。一対の爪９１１が第１復帰状態から初期停止状態に移動するまでに可動部材１３が移動する移動量は発電必要距離以上になるので、発電ユニット２０の発電出力が起動電圧以上の第１電圧となり、制御回路３４はスイッチ３２のオフを維持する。このとき、電源回路３１が発電ユニット２０の発電出力を、起動電圧以上の電圧値の直流電圧に変換して送信ユニット３３に供給する。すなわち、センサＡ２２の発電ユニット２０の発電出力は送信ユニット３３の起動電圧以上であるので、送信ユニット３３は、発電ユニット２０から電力の供給を受けて起動し、第１信号を送信する。上位システムＲ１は、センサＡ２２の送信ユニット３３から送信される第１信号を受信することによって、一対の爪９１１が開位置に位置していることを検知する。 FIG. 19 shows the first return state, which is the state when the amount of upward movement of the movable member 13 of the sensor A22 while the pressure source is stopped is greater than or equal to the power generation required distance. Since the amount of movement of the movable member 13 until the pair of claws 911 moves from the first return state to the initial stop state is greater than or equal to the power generation required distance, the power generation output of the power generation unit 20 becomes the first voltage equal to or greater than the starting voltage. , the control circuit 34 keeps the switch 32 off. At this time, the power supply circuit 31 converts the power output of the power generation unit 20 into a DC voltage having a voltage value equal to or higher than the starting voltage, and supplies the DC voltage to the transmission unit 33 . That is, since the power generation output of the power generation unit 20 of the sensor A22 is equal to or higher than the starting voltage of the transmission unit 33, the transmission unit 33 receives power supply from the power generation unit 20, starts up, and transmits the first signal. The host system R1 detects that the pair of claws 911 are positioned at the open position by receiving the first signal transmitted from the transmission unit 33 of the sensor A22.
　一方、図２０は、圧力源の停止中にセンサＡ２２の可動部材１３が上向きに移動した移動量が発電必要距離未満であるときの状態である第２復帰状態を示している。一対の爪９１１が第２復帰状態から初期停止状態に移動するまでに可動部材１３が移動する移動量は発電必要距離未満であるので、発電ユニット２０の発電出力は起動電圧未満の第２電圧となり、発電ユニット２０の発電出力では送信ユニット３３が起動できない。このとき、センサＡ２２の制御回路３４は、発電ユニット２０の発電出力が第２電圧であることから、スイッチ３２をオンに制御するので、送信ユニット３３は電池３０から供給される電力で起動し、第２信号を送信する。上位システムＲ１は、センサＡ２２の送信ユニット３３から送信される第２信号を受信することによって、一対の爪９１１が開位置に位置していることを検知する。 On the other hand, FIG. 20 shows the second return state, which is the state when the upward movement amount of the movable member 13 of the sensor A22 while the pressure source is stopped is less than the power generation required distance. Since the amount of movement of the movable member 13 until the pair of pawls 911 move from the second return state to the initial stop state is less than the required distance for power generation, the power generation output of the power generation unit 20 becomes the second voltage less than the starting voltage. , the power generation output of the power generation unit 20 cannot activate the transmission unit 33 . At this time, since the power output of the power generation unit 20 is the second voltage, the control circuit 34 of the sensor A 22 turns on the switch 32, so that the transmission unit 33 is activated by the power supplied from the battery 30. Send a second signal. The host system R1 detects that the pair of claws 911 is positioned at the open position by receiving the second signal transmitted from the transmission unit 33 of the sensor A22.
　なお、シリンダＳＹ２の一対の爪９１１が閉位置で停止している状態でシリンダＳＹ２の圧力源が長時間停止すると、上述と同様に、復帰ばね１４の復帰力等を受けて一対の爪９１１の位置がずれる可能性がある。 If the pressure source of the cylinder SY2 is stopped for a long time while the pair of claws 911 of the cylinder SY2 are stopped at the closed position, the pair of claws 911 will be disengaged by the restoring force of the return spring 14, etc., as described above. Position may shift.
　ここで、一対の爪９１１が復帰ばね１４の復帰力等を受けて第１復帰状態の位置に移動した場合、圧力源が再起動して一対の爪９１１が停止前の閉位置に移動すると、センサＡ２１の発電ユニット２０が第１電圧を発生する。したがって、センサＡ２１の送信ユニット３３は発電ユニット２０から電力供給を受けて第１信号を送信できる。 Here, when the pair of pawls 911 receive the restoring force of the return spring 14 or the like and move to the position of the first return state, when the pressure source is restarted and the pair of pawls 911 move to the closed position before stopping, The generator unit 20 of sensor A21 generates a first voltage. Therefore, the transmission unit 33 of the sensor A21 can receive power from the power generation unit 20 and transmit the first signal.
　また、一対の爪９１１が復帰ばね１４の復帰力等を受けて第２復帰状態の位置に移動した場合、圧力源が再起動して一対の爪９１１が停止前の閉位置に移動すると、センサＡ２１の発電ユニット２０は第２電圧を発生するため、送信ユニット３３は発電ユニット２０の発電出力では起動できない。この場合、センサＡ２１の制御回路３４は、発電ユニット２０の発電出力が第２電圧であることから、スイッチ３２をオンに制御するので、送信ユニット３３は電池３０から供給される電力で起動し、第２信号を送信することができる。 Further, when the pair of pawls 911 receive the restoring force of the return spring 14 and the like and move to the position of the second return state, when the pressure source is restarted and the pair of pawls 911 move to the closed position before stopping, the sensor Since the power generation unit 20 of A21 generates the second voltage, the transmission unit 33 cannot be activated by the power generation output of the power generation unit 20 . In this case, the control circuit 34 of the sensor A 21 turns on the switch 32 because the power output of the power generation unit 20 is the second voltage. A second signal can be transmitted.
　なお、適用例１で説明したシリンダＳＹ２には、一対の爪９１１が閉位置及び開位置に移動したことをそれぞれ検知するために、２つのセンサＡ１（センサＡ２１及びセンサＡ２２）が取り付けられているが、シリンダＳＹ２に２つのセンサＡ１が取り付けられることは必須ではない。シリンダＳＹ２には、一対の爪９１１が閉位置に移動したことを検知するセンサＡ２１のみが取り付けられていてもよいし、一対の爪９１１が開位置に移動したことを検知するセンサＡ２２のみが取り付けられていてもよい。 Two sensors A1 (sensor A21 and sensor A22) are attached to the cylinder SY2 described in Application Example 1 in order to detect the movement of the pair of claws 911 to the closed position and the open position, respectively. However, it is not essential that two sensors A1 are attached to cylinder SY2. Cylinder SY2 may be provided with only sensor A21 for detecting that the pair of claws 911 has moved to the closed position, or only sensor A22 for detecting that the pair of claws 911 has moved to the open position. may have been
　（３．２）適用例２
　平行ハンドを駆動するシリンダＳＹ３にセンサＡ１を内蔵した適用例２について、図２１～図２７を参照して説明する。なお、適用例２のシリンダＳＹ３の説明では、図２１において、Ｘ軸に沿う方向を上下、Ｙ軸に沿う方向を左右、Ｚ軸に沿う方向を前後と規定する。ただし、これらの方向は、説明のために便宜上規定した方向であり、センサＡ１及びシリンダＳＹ３が実際に使用される際の方向を規定するものではない。 (3.2) Application example 2
An application example 2 in which the sensor A1 is built in the cylinder SY3 that drives the parallel hand will be described with reference to FIGS. 21 to 27. FIG. In the explanation of the cylinder SY3 of Application Example 2, in FIG. 21, the direction along the X axis is defined as up and down, the direction along the Y axis is defined as left and right, and the direction along the Z axis is defined as front and back. However, these directions are defined for convenience of explanation, and do not define directions when the sensor A1 and cylinder SY3 are actually used.
　（３．２．１）適用例２の構成
　シリンダＳＹ３は、直方体状の本体９２０を有している。本体９２０の上部には、一対の爪９２２を保持するレール部材９２１が取り付けられている。レール部材９２１の上面には、一対の爪９２２の基部が挿入されるレール溝９２３が設けられている。レール溝９２３はＹ軸に沿って伸びている。一対の爪９２２は、Ｙ軸に沿って平行移動可能な状態でレール部材９２１に保持されている。 (3.2.1) Configuration of Application Example 2 Cylinder SY3 has a rectangular parallelepiped main body 920 . A rail member 921 holding a pair of claws 922 is attached to the upper portion of the main body 920 . A rail groove 923 into which bases of a pair of claws 922 are inserted is provided on the upper surface of the rail member 921 . Rail groove 923 extends along the Y-axis. The pair of claws 922 are held by the rail member 921 so as to be able to move in parallel along the Y-axis.
　本体９２０の内部には、ピストン９５０（図２３参照）がＸ軸に沿って移動可能な状態で配置されたシリンダ室が設けられている。ピストン９５０には上向きに突出するロッド９５１が設けられている。シリンダ室は、ピストン９５０を挟んでロッド９５１側の第１空気室とヘッド側の第２空気室とに分けられ、第１空気室及び第２空気室のそれぞれにエア配管が繋がっている。圧力源からエア配管を介して第２空気室にエアが供給されると、ピストン９５０及びロッド９５１が上向きに移動する。また、圧力源からエア配管を介して第１空気室にエアが供給されると、ピストン９５０及びロッド９５１が下向きに移動する。ロッド９５１の往復動作はリンク機構８３０及びリンク機構８４０を介して一対の爪９２２にそれぞれ伝達される。これにより、一対の爪９２２は、両者の間隔が最小となる閉位置（図２３及び図２４に示す位置）、と両者の間隔が最大となる開位置（図２５及び図２６に示す位置）に移動する。 Inside the main body 920, there is provided a cylinder chamber in which a piston 950 (see FIG. 23) is arranged so as to be movable along the X-axis. The piston 950 is provided with a rod 951 protruding upward. The cylinder chamber is divided into a first air chamber on the rod 951 side and a second air chamber on the head side with the piston 950 interposed therebetween, and an air pipe is connected to each of the first air chamber and the second air chamber. When air is supplied from the pressure source to the second air chamber through the air pipe, the piston 950 and rod 951 move upward. Also, when air is supplied from the pressure source to the first air chamber through the air pipe, the piston 950 and the rod 951 move downward. The reciprocating motion of the rod 951 is transmitted to the pair of claws 922 via the link mechanism 830 and the link mechanism 840, respectively. As a result, the pair of pawls 922 are placed in the closed position (position shown in FIGS. 23 and 24) where the distance between the two is minimum and the open position (position shown in FIGS. 25 and 26) where the distance between the two is maximum (position shown in FIGS. 25 and 26). Moving.
　シリンダＳＹ３には、２つのセンサＡ１が２つの取付部材を用いて取り付けられている。ここで、２つのセンサＡ１は、一対の爪９２２が閉位置に移動したことを検知するセンサＡ２１と、一対の爪９２２が開位置に移動したことを検知するセンサＡ２２と、を含む。また、２つの取付部材は、センサＡ２１をシリンダＳＹ３に取り付けるための取付部材９３０と、センサＡ２２をシリンダＳＹ３に取り付けるための取付部材９４０と、を含んでいる。ここで、取付部材９３０は、センサＡ２１が有する可動部材１３の押し込み量を制限するストッパ部材の機能を有している。同様に、取付部材９４０は、センサＡ２２が有する可動部材１３の押し込み量を制限するストッパ部材の機能を有している。なお、センサＡ２１及びセンサＡ２２は、上述したセンサＡ１と同様の構成を有しているので、センサＡ２１及びセンサＡ２２の構成についての説明は省略する。 Two sensors A1 are attached to the cylinder SY3 using two attachment members. Here, the two sensors A1 include a sensor A21 that detects movement of the pair of claws 922 to the closed position and a sensor A22 that detects movement of the pair of claws 922 to the open position. The two mounting members also include a mounting member 930 for mounting the sensor A21 to the cylinder SY3 and a mounting member 940 for mounting the sensor A22 to the cylinder SY3. Here, the mounting member 930 has a function of a stopper member that limits the pushing amount of the movable member 13 of the sensor A21. Similarly, the mounting member 940 has the function of a stopper member that limits the pushing amount of the movable member 13 of the sensor A22. Note that the sensor A21 and the sensor A22 have the same configuration as the sensor A1 described above, so the description of the configuration of the sensor A21 and the sensor A22 is omitted.
　取付部材９３０は、下面にセンサＡ２１の上面が接した状態で配置されるベース部９３１と、ベース部９３１の下面の左側から下向きに突出する角柱状の柱状部９３２と、を有している。 The mounting member 930 has a base portion 931 arranged with the upper surface of the sensor A21 in contact with the lower surface, and a prism-shaped columnar portion 932 protruding downward from the left side of the lower surface of the base portion 931 .
　センサＡ２１は、筐体１０の上面がベース部９３１の下面に接触し、筐体１０の左側の側面が柱状部９３２の右側の側面に接触した状態で取付部材９３０に配置される。センサＡ２１は、ベース１１を固定ボルト９３４で柱状部９３２に締結することによって、取付部材９３０に固定される。取付部材９３０は、本体９２０の下面との間にシム板９３３を挟んだ状態で、柱状部９３２をＸ軸に沿って貫通する貫通孔に固定ボルト９３５を通し、固定ボルト９３５を本体９２０にネジ込むことによって、本体９２０に取り付けられる。これにより、センサＡ２１が取付部材９３０を介してシリンダＳＹ３の本体９２０に取り付けられる。ここで、所望の高さ寸法のシム板９３３を本体９２０と取付部材９３０との間に配置することで、センサＡ２１の可動部材１３の位置及びストッパ部材として機能する取付部材９３０の位置をＸ軸に沿って調整することができる。なお、適用例２では、シム板９３３により位置調整機構が実現されているが、センサＡ２１及び取付部材９３０をＸ軸に沿って移動させる送りねじ等で位置調整機構が実現されてもよい。 The sensor A21 is arranged on the mounting member 930 with the upper surface of the housing 10 in contact with the lower surface of the base portion 931 and the left side surface of the housing 10 in contact with the right side surface of the columnar portion 932 . The sensor A21 is fixed to the mounting member 930 by fastening the base 11 to the columnar portion 932 with a fixing bolt 934 . The mounting member 930 has a shim plate 933 sandwiched between it and the lower surface of the main body 920 , and the fixing bolt 935 is passed through the through-hole passing through the columnar portion 932 along the X axis, and the fixing bolt 935 is screwed to the main body 920 . It is attached to the main body 920 by inserting it. As a result, the sensor A21 is attached to the main body 920 of the cylinder SY3 via the attachment member 930. As shown in FIG. Here, by placing a shim plate 933 having a desired height dimension between the main body 920 and the mounting member 930, the position of the movable member 13 of the sensor A21 and the position of the mounting member 930 functioning as a stopper member can be adjusted to the X axis. can be adjusted accordingly. In Application Example 2, the shim plate 933 realizes the position adjustment mechanism, but the position adjustment mechanism may be realized by a feed screw or the like that moves the sensor A21 and the mounting member 930 along the X axis.
　また、取付部材９３０の上面には、センサＡ２１が備える可動部材１３の操作部１３１と対向する部位に角孔状の貫通孔９３７（図２４及び図２６参照）が設けられている。リンク機構８３０は、可動部材１３の操作部１３１を駆動する動作部材であるプランジャ８３５を有しており、プランジャ８３５の下端は貫通孔９３７を通して取付部材９３０の内部に挿入され、センサＡ２１の可動部材１３の操作部１３１と対向している。 Further, a rectangular through-hole 937 (see FIGS. 24 and 26) is provided on the upper surface of the mounting member 930 at a portion facing the operating portion 131 of the movable member 13 of the sensor A21. The link mechanism 830 has a plunger 835, which is an operating member that drives the operating portion 131 of the movable member 13. The lower end of the plunger 835 is inserted through the through hole 937 into the mounting member 930, and the movable member of the sensor A21 is inserted. 13 is opposed to the operation unit 131 .
　取付部材９３０にセンサＡ２１が取り付けられた状態では、センサＡ２１のカバー１２の側面が露出している。つまり、取付部材９３０には、電磁波を透過する透過部Ｅ３（図２１参照）が設けられているので、センサＡ２１の送信ユニット３３から送信される無線信号の減衰を抑制できる。なお、透過部Ｅ３は、カバー１２の側面を露出させる開口で実現されているが、電磁波に対して透過性を有する合成樹脂製の部材等で実現されてもよい。 When the sensor A21 is attached to the attachment member 930, the side surface of the cover 12 of the sensor A21 is exposed. That is, since the mounting member 930 is provided with the transmitting portion E3 (see FIG. 21) that transmits electromagnetic waves, attenuation of the wireless signal transmitted from the transmitting unit 33 of the sensor A21 can be suppressed. Although the transmitting portion E3 is realized by an opening that exposes the side surface of the cover 12, it may be realized by a synthetic resin member or the like having transparency to electromagnetic waves.
　取付部材９４０は、下面にセンサＡ２２の上面が接した状態で配置されるベース部９４１と、ベース部９４１の下面の右側から下向きに突出する角柱状の柱状部９４２と、を有している。 The mounting member 940 has a base portion 941 arranged with the upper surface of the sensor A 22 in contact with the lower surface, and a prism-shaped columnar portion 942 protruding downward from the right side of the lower surface of the base portion 941 .
　センサＡ２２は、筐体１０の上面がベース部９４１の下面に接触し、筐体１０の右側の側面が柱状部９４２の左側の側面に接触した状態で取付部材９４０に配置される。なお、センサＡ２２とセンサＡ２１とはＺ軸に沿って並ぶように配置されている（図２１参照）。センサＡ２２は、ベース１１を固定ボルト９４４で柱状部９４２に締結することによって、取付部材９４０に固定される。取付部材９４０は、本体９２０の下面との間にシム板９４３を挟んだ状態で、柱状部９４２をＸ軸に沿って貫通する貫通孔に固定ボルト９４５を通し、固定ボルト９４５を本体９２０にネジ込むことによって、本体９２０に取り付けられる。これにより、センサＡ２２が取付部材９４０を介してシリンダＳＹ３の本体９２０に取り付けられる。ここで、所望の高さ寸法のシム板９４３を本体９２０と取付部材９４０との間に配置することで、センサＡ２２の可動部材１３の位置及びストッパ部材として機能する取付部材９４０の位置をＸ軸に沿って調整することができる。なお、適用例２では、シム板９４３により位置調整機構が実現されているが、センサＡ２２及び取付部材９４０をＸ軸に沿って移動させる送りねじ等で位置調整機構が実現されてもよい。 The sensor A22 is arranged on the mounting member 940 with the upper surface of the housing 10 in contact with the lower surface of the base portion 941 and the right side surface of the housing 10 in contact with the left side surface of the columnar portion 942 . The sensors A22 and A21 are arranged side by side along the Z axis (see FIG. 21). The sensor A22 is fixed to the mounting member 940 by fastening the base 11 to the columnar portion 942 with a fixing bolt 944 . The mounting member 940 has a shim plate 943 sandwiched between it and the lower surface of the main body 920 , and the fixing bolt 945 is passed through the through-hole passing through the columnar portion 942 along the X-axis, and the fixing bolt 945 is screwed to the main body 920 . It is attached to the main body 920 by inserting it. As a result, the sensor A22 is attached to the main body 920 of the cylinder SY3 via the attachment member 940. As shown in FIG. By arranging a shim plate 943 having a desired height dimension between the main body 920 and the mounting member 940, the position of the movable member 13 of the sensor A22 and the position of the mounting member 940 functioning as a stopper member can be adjusted to the X axis. can be adjusted accordingly. In Application Example 2, the shim plate 943 realizes the position adjustment mechanism, but the position adjustment mechanism may be realized by a feed screw or the like that moves the sensor A22 and the mounting member 940 along the X axis.
　また、取付部材９４０の上面には、センサＡ２２が備える可動部材１３の操作部１３１と対向する部位に角孔状の貫通孔９４７（図２４及び図２６参照）が設けられている。リンク機構８４０は、可動部材１３の操作部１３１を駆動する動作部材であるプランジャ８４５を有しており、プランジャ８４５の下端は貫通孔９４７を通して取付部材９４０の内部に挿入され、センサＡ２２の可動部材１３の操作部１３１と対向している。 In addition, on the upper surface of the mounting member 940, a rectangular through-hole 947 (see FIGS. 24 and 26) is provided at a portion facing the operating portion 131 of the movable member 13 of the sensor A22. The link mechanism 840 has a plunger 845 that is an operating member that drives the operating portion 131 of the movable member 13. The lower end of the plunger 845 is inserted through the through hole 947 into the mounting member 940, and the movable member of the sensor A22 is inserted. 13 is opposed to the operation unit 131 .
　取付部材９４０にセンサＡ２２が取り付けられた状態では、センサＡ２２のカバー１２の側面が露出している。つまり、取付部材９４０には、電磁波を透過する透過部Ｅ４（図２１参照）が設けられているので、センサＡ２２の送信ユニット３３から送信される無線信号の減衰を抑制できる。なお、透過部Ｅ４は、カバー１２の側面を露出させる開口で実現されているが、電磁波に対して透過性を有する合成樹脂製の部材等で実現されてもよい。 When the sensor A22 is attached to the attachment member 940, the side surface of the cover 12 of the sensor A22 is exposed. That is, since the mounting member 940 is provided with the transmitting portion E4 (see FIG. 21) that transmits electromagnetic waves, attenuation of the wireless signal transmitted from the transmitting unit 33 of the sensor A22 can be suppressed. Although the transmitting portion E4 is realized by an opening that exposes the side surface of the cover 12, it may be realized by a synthetic resin member or the like having transparency to electromagnetic waves.
　また、シリンダＳＹ３は、リンク機構８３０と、リンク機構８４０と、を備えている。 In addition, the cylinder SY3 includes a link mechanism 830 and a link mechanism 840.
　リンク機構８３０は、右側の爪９２２の左右の動きを上下の動きに変換してセンサＡ２１に伝える。リンク機構８３０は、リンクアーム８３１と、中間リンク８３４と、プランジャ８３５とを備える。 The link mechanism 830 converts the lateral movement of the right claw 922 into vertical movement and transmits it to the sensor A21. Link mechanism 830 includes link arm 831 , intermediate link 834 , and plunger 835 .
　リンクアーム８３１は、Ｙ軸に沿って配置される横片８３１Ｂと、横片８３１Ｂの右端から下向きに突出する縦片８３１Ａと、を一体に備え、略Ｌ形に形成されている。横片８３１Ｂには左右の幅の中央付近に孔が設けられ、この孔に本体９２０に固定されたピンＰ３１が挿入されている。横片８３１Ｂは、ピンＰ３１を中心に回転可能な状態で本体９２０に支持されている。横片８３１Ｂの左側の端部には溝８３３が設けられている。ロッド９５１の上端にはスリット９５２が設けられ、スリット９５２の内部にはピン９５３が設けられている。横片８３１Ｂの左側の端部はロッド９５１のスリット９５２に挿入され、溝８３３にピン９５３が挿入されている。また、横片８３１Ｂの左右の幅の中央付近からは駆動片８３２が上向きに突出しており、この駆動片８３２は右側の爪９２２の下部に設けられた溝内に挿入されている。また、縦片８３１Ａの下部に設けられた孔にはピンＰ３２の第１端が挿入されている。 The link arm 831 integrally includes a horizontal piece 831B arranged along the Y-axis and a vertical piece 831A projecting downward from the right end of the horizontal piece 831B, and is formed in a substantially L shape. The horizontal piece 831B is provided with a hole near the center of the left and right width, and a pin P31 fixed to the main body 920 is inserted into this hole. The horizontal piece 831B is supported by the main body 920 so as to be rotatable around the pin P31. A groove 833 is provided at the left end of the horizontal piece 831B. A slit 952 is provided at the upper end of the rod 951 and a pin 953 is provided inside the slit 952 . The left end of the lateral piece 831B is inserted into the slit 952 of the rod 951, and the pin 953 is inserted into the groove 833. A driving piece 832 protrudes upward from the vicinity of the center of the lateral width of the horizontal piece 831B, and is inserted into a groove provided below the claw 922 on the right side. A first end of the pin P32 is inserted into a hole provided at the bottom of the vertical piece 831A.
　中間リンク８３４の端１８３４に設けられた孔にはピンＰ３２の第２端が挿入されており、縦片８３１Ａと中間リンク８３４とはピンＰ３２を中心に回転可能な状態で連結されている。また、中間リンク８３４の端２８３４に設けられた孔にはピンＰ３３の第１端が挿入され、プランジャ８３５の上端部に設けられた孔にはピンＰ３３の第２端が挿入されている。プランジャ８３５は、本体９２０の内部に設けられたガイド部によってＸ軸（上下）に沿って移動可能な状態で本体９２０に配置されている。プランジャ８３５の下端には、センサＡ２１が備える可動部材１３の操作部１３１を押すための押操作部８３６が設けられている。プランジャ８３５の中間部には、プランジャ８３５が下向きに移動したときに、取付部材９３０及び取付部材９４０からそれぞれ上向きに突出するストッパ片９３６，９４６と接触する段差部８３７が設けられている。ここにおいて、ストッパ片９３６，９４６が、動作部材であるプランジャ８３５の段差部８３７と接触することで、可動部材１３が位置ＰＴ２よりも下方に移動しないように、プランジャ８３５の下方への移動を制限する。なお、ストッパ片９３６，９４６の上端が、動作部材であるプランジャ８３５の段差部８３７と接触する接触部位となる。 The second end of the pin P32 is inserted into the hole provided at the end 1834 of the intermediate link 834, and the vertical piece 831A and the intermediate link 834 are connected in a rotatable state about the pin P32. A first end of the pin P33 is inserted into a hole provided at the end 2834 of the intermediate link 834, and a second end of the pin P33 is inserted into a hole provided at the upper end of the plunger 835. The plunger 835 is arranged in the main body 920 so as to be movable along the X-axis (up and down) by a guide provided inside the main body 920 . A push operation portion 836 for pushing the operation portion 131 of the movable member 13 included in the sensor A21 is provided at the lower end of the plunger 835 . An intermediate portion of the plunger 835 is provided with a stepped portion 837 that contacts stopper pieces 936 and 946 projecting upward from the mounting member 930 and the mounting member 940 when the plunger 835 moves downward. Here, the stopper pieces 936 and 946 contact the stepped portion 837 of the plunger 835, which is the operating member, to limit the downward movement of the plunger 835 so that the movable member 13 does not move below the position PT2. do. Note that the upper ends of the stopper pieces 936 and 946 are contact portions that come into contact with the stepped portion 837 of the plunger 835, which is the operating member.
　リンク機構８４０は、左側の爪９２２の左右の動きを上下の動きに変換してセンサＡ２２に伝える。リンク機構８４０は、リンクアーム８４１と、中間リンク８４４と、動作部材であるプランジャ８４５とを備える。 The link mechanism 840 converts the lateral movement of the left claw 922 into vertical movement and transmits it to the sensor A22. The link mechanism 840 includes a link arm 841, an intermediate link 844, and a plunger 845 as an operating member.
　リンクアーム８４１は矩形板状に形成されている。リンクアーム８４１には左右の幅の中央付近に孔が設けられ、この孔に本体９２０に固定されたピンＰ４１が挿入されており、リンクアーム８４１はピンＰ４１を中心に回転可能な状態で本体９２０に支持されている。リンクアーム８４１の右側の端部には溝８４３が設けられている。リンクアーム８４１の右側の端部はロッド９５１のスリット９５２に挿入され、溝８４３にピン９５３が挿入されている。また、リンクアーム８４１の左右の幅の中央付近からは駆動片８４２が上向きに突出しており、この駆動片８４２は左側の爪９２２の下部に設けられた溝内に挿入されている。また、リンクアーム８４１の左側の端部に設けられた孔にはピンＰ４２の第１端が挿入されている。 The link arm 841 is formed in a rectangular plate shape. A hole is provided in the link arm 841 near the center of the left and right width, and a pin P41 fixed to the main body 920 is inserted into this hole. supported by A groove 843 is provided at the right end of the link arm 841 . The right end of the link arm 841 is inserted into the slit 952 of the rod 951 and the pin 953 is inserted into the groove 843 . A drive piece 842 protrudes upward from the vicinity of the center of the left and right width of the link arm 841 and is inserted into a groove provided below the left claw 922 . A first end of the pin P42 is inserted into a hole provided at the left end of the link arm 841 .
　中間リンク８４４の端１８４４に設けられた孔にはピンＰ４２の第２端が挿入されており、リンクアーム８４１と中間リンク８４４とはピンＰ４２を中心に回転可能な状態で連結されている。また、中間リンク８４４の端２８４４に設けられた孔にはピンＰ４３の第１端が挿入され、プランジャ８４５の上端部に設けられた孔にはピンＰ４３の第２端が挿入されている。プランジャ８４５は、本体９２０の内部に設けられたガイド部によってＸ軸（上下）に沿って移動可能な状態で本体９２０に配置されている。プランジャ８４５の下端には、センサＡ２２が備える可動部材１３の操作部１３１を押すための押操作部８４６が設けられている。プランジャ８４５の中間部には、プランジャ８４５が下向きに移動したときに、取付部材９３０及び取付部材９４０からそれぞれ上向きに突出するストッパ片９３６，９４６と接触する段差部８４７が設けられている。 The second end of the pin P42 is inserted into the hole provided in the end 1844 of the intermediate link 844, and the link arm 841 and the intermediate link 844 are connected in a rotatable state about the pin P42. A first end of the pin P43 is inserted into a hole provided at the end 2844 of the intermediate link 844, and a second end of the pin P43 is inserted into a hole provided at the upper end of the plunger 845. The plunger 845 is arranged in the main body 920 so as to be movable along the X-axis (up and down) by a guide provided inside the main body 920 . A push operation portion 846 for pushing the operation portion 131 of the movable member 13 included in the sensor A22 is provided at the lower end of the plunger 845 . An intermediate portion of the plunger 845 is provided with a stepped portion 847 that comes into contact with stopper pieces 936 and 946 projecting upward from the mounting member 930 and the mounting member 940, respectively, when the plunger 845 moves downward.
　（３．２．２）適用例２の動作
　以下に、適用例２のシリンダＳＹ３の動作を説明する。 (3.2.2) Operation of Application Example 2 The operation of cylinder SY3 of Application Example 2 will be described below.
　図２３及び図２４は一対の爪９２２が閉位置に移動している状態を示している。第１空気室にエアが供給されると、ピストン９５０と共にロッド９５１が下向きに移動し、リンクアーム８３１がピンＰ３１を中心に左回りに回転するとともに、リンクアーム８４１がピンＰ４１を中心に右回りに回転し、駆動片８３２，８４２によって一対の爪９２２が閉位置に移動させられる。また、リンクアーム８３１がピンＰ３１を中心に左回りに回転すると、中間リンク８３４を介してプランジャ８３５が下向きに押され、プランジャ８３５の押操作部８３６によってセンサＡ２１の操作部１３１が下向きに押された状態となる。プランジャ８３５の段差部８３７がストッパ片９３６，９４６と接触することによって、プランジャ８３５の下方への移動が制限され、このときの爪９２２の位置が閉位置となる。このとき、センサＡ２１の発電ユニット２０が第１電圧を発生し、送信ユニット３３が発電ユニット２０から電圧供給を受けて第１信号を送信するので、上位システムＲ１はセンサＡ２１からの第１信号に基づいて、一対の爪９２２が閉位置に移動したことを検知できる。また、リンクアーム８４１がピンＰ４１を中心に右回りに回転すると、中間リンク８４４によってプランジャ８４５が上向きに引き上げられ、プランジャ８４５の押操作部８４６がセンサＡ２２の可動部材１３の操作部１３１から離れた状態となる。 23 and 24 show a state in which the pair of claws 922 are moved to the closed position. When air is supplied to the first air chamber, the rod 951 moves downward together with the piston 950, the link arm 831 rotates counterclockwise about the pin P31, and the link arm 841 rotates clockwise about the pin P41. , and the driving pieces 832 and 842 move the pair of claws 922 to the closed position. Further, when the link arm 831 rotates counterclockwise around the pin P31, the plunger 835 is pushed downward via the intermediate link 834, and the push operation portion 836 of the plunger 835 pushes the operation portion 131 of the sensor A21 downward. state. When the stepped portion 837 of the plunger 835 comes into contact with the stopper pieces 936 and 946, the downward movement of the plunger 835 is restricted, and the position of the claw 922 at this time is the closed position. At this time, the power generation unit 20 of the sensor A21 generates the first voltage, and the transmission unit 33 receives the voltage supply from the power generation unit 20 and transmits the first signal. Based on this, it can be detected that the pair of claws 922 has moved to the closed position. Further, when the link arm 841 rotates clockwise about the pin P41, the plunger 845 is pulled upward by the intermediate link 844, and the push operation portion 846 of the plunger 845 is separated from the operation portion 131 of the movable member 13 of the sensor A22. state.
　また、第２空気室にエアが供給されると、ピストン９５０と共にロッド９５１が上向きに移動し、リンクアーム８３１がピンＰ３１を中心に右回りに回転するとともに、リンクアーム８４１がピンＰ４１を中心に左回りに回転し、駆動片８３２，８４２によって一対の爪９２２が開位置（図２５及び図２６参照）に移動させられる。また、リンクアーム８３１がピンＰ３１を中心に右回りに回転すると、中間リンク８３４によってプランジャ８３５が上向きに引き上げられ、プランジャ８３５の押操作部８３６がセンサＡ２１の操作部１３１から離れた状態となる。また、リンクアーム８４１がピンＰ４１を中心に左回りに回転すると、中間リンク８４４を介してプランジャ８４５が下向きに押され、プランジャ８４５の押操作部８４６によってセンサＡ２２の操作部１３１が下向きに押された状態となる。プランジャ８４５の段差部８４７がストッパ片９３６，９４６と接触することによって、プランジャ８４５の下方への移動が制限され、このときの爪９２２の位置が開位置となる。このとき、センサＡ２２の発電ユニット２０が第１電圧を発生し、送信ユニット３３が発電ユニット２０から電圧供給を受けて第１信号を送信するので、上位システムＲ１はセンサＡ２２からの第１信号に基づいて、一対の爪９２２が開位置に移動したことを検知できる。 Further, when air is supplied to the second air chamber, the rod 951 moves upward together with the piston 950, the link arm 831 rotates clockwise about the pin P31, and the link arm 841 rotates about the pin P41. It rotates counterclockwise, and the driving pieces 832 and 842 move the pair of claws 922 to the open position (see FIGS. 25 and 26). Further, when the link arm 831 rotates clockwise about the pin P31, the plunger 835 is pulled upward by the intermediate link 834, and the push operation portion 836 of the plunger 835 is separated from the operation portion 131 of the sensor A21. Further, when the link arm 841 rotates counterclockwise around the pin P41, the plunger 845 is pushed downward via the intermediate link 844, and the push operation portion 846 of the plunger 845 pushes the operation portion 131 of the sensor A22 downward. state. When the stepped portion 847 of the plunger 845 comes into contact with the stopper pieces 936 and 946, the downward movement of the plunger 845 is restricted, and the position of the claw 922 at this time is the open position. At this time, the power generation unit 20 of the sensor A22 generates the first voltage, and the transmission unit 33 receives the voltage supply from the power generation unit 20 and transmits the first signal. Based on this, it can be detected that the pair of claws 922 has moved to the open position.
　図２５及び図２６に示すように、シリンダＳＹ３の一対の爪９２２が開位置で停止している状態である初期停止状態で、休日等による操業停止でシリンダＳＹ３の圧力源（例えば空圧ポンプ等）が長時間停止すると、配管等でのエアのリークによって第１空気室及び第２空気室の圧力が低下する可能性がある。第１空気室及び第２空気室の圧力が低下すると、センサＡ２２の可動部材１３が復帰ばね１４の復帰力等を受けて上向きに移動する。その後、操業が再開してシリンダＳＹ３の圧力源が再起動すると、圧力源からエアが供給されてシリンダＳＹ３が、操業停止前の位置である開位置に移動する。 As shown in FIGS. 25 and 26, in the initial stop state in which the pair of claws 922 of the cylinder SY3 are stopped at the open position, the pressure source (for example, an air pressure pump, etc.) of the cylinder SY3 is ) stops for a long time, there is a possibility that the pressures of the first air chamber and the second air chamber will decrease due to air leakage from piping or the like. When the pressure in the first air chamber and the second air chamber decreases, the movable member 13 of the sensor A22 receives the restoring force of the return spring 14 and the like and moves upward. Thereafter, when operation resumes and the pressure source for cylinder SY3 is restarted, air is supplied from the pressure source and cylinder SY3 moves to the open position, which is the position before the operation was stopped.
　ここで、圧力源が再起動してから一対の爪９２２が開状態の位置に復帰するまでに可動部材１３が移動する移動量が所定の発電必要距離以上であれば、発電ユニット２０の発電出力は起動電圧以上の第１電圧となる。 Here, if the amount of movement of the movable member 13 after the pressure source is restarted until the pair of pawls 922 return to the open position is greater than or equal to the predetermined power generation required distance, the power generation output of the power generation unit 20 is is the first voltage equal to or higher than the starting voltage.
　圧力源の停止中に可動部材１３が上向きに移動した移動量が発電必要距離以上である状態である第１復帰状態では、一対の爪９２２が第１復帰状態から初期停止状態に移動するまでにセンサＡ２２の可動部材１３が移動する移動量は発電必要距離以上になる。この場合、センサＡ２２の発電ユニット２０の発電出力が起動電圧以上の第１電圧となり、制御回路３４はスイッチ３２のオフを維持する。このとき、電源回路３１が発電ユニット２０の発電出力を、起動電圧以上の電圧値の直流電圧に変換して送信ユニット３３に供給する。発電ユニット２０の発電出力は送信ユニット３３の起動電圧以上であるので、送信ユニット３３は、発電ユニット２０から電力の供給を受けて起動し、第１信号を送信する。上位システムＲ１は、センサＡ２２の送信ユニット３３から送信される第１信号を受信することによって、一対の爪９２２が開位置に位置していることを検知する。 In the first return state, in which the amount of upward movement of the movable member 13 while the pressure source is stopped is equal to or greater than the power generation required distance, the pair of claws 922 move from the first return state to the initial stop state. The amount of movement of the movable member 13 of the sensor A22 is greater than or equal to the power generation required distance. In this case, the power generation output of the power generation unit 20 of the sensor A22 becomes the first voltage equal to or higher than the starting voltage, and the control circuit 34 keeps the switch 32 off. At this time, the power supply circuit 31 converts the power output of the power generation unit 20 into a DC voltage having a voltage value equal to or higher than the starting voltage, and supplies the DC voltage to the transmission unit 33 . Since the power generation output of the power generation unit 20 is equal to or higher than the activation voltage of the transmission unit 33, the transmission unit 33 receives power supply from the power generation unit 20, is activated, and transmits the first signal. The host system R1 detects that the pair of claws 922 is positioned at the open position by receiving the first signal transmitted from the transmission unit 33 of the sensor A22.
　一方、図２７は、圧力源の停止中に可動部材１３が上向きに移動した移動量が発電必要距離未満であるときの状態（以下、第２復帰状態と言う。）を示している。一対の爪９２２が第２復帰状態から初期停止状態に復帰するまでに可動部材１３が移動する移動量は発電必要距離未満であるので、発電ユニット２０の発電出力は起動電圧未満の第２電圧となり、発電ユニット２０の発電出力では送信ユニット３３が起動できない。このとき、制御回路３４は、発電ユニット２０が第２電圧を発生したことをトリガとして、スイッチ３２をオンに制御し、送信ユニット３３は電池３０から供給される電力で起動し、第２信号を送信する。上位システムＲ１は、センサＡ２２の送信ユニット３３から送信される第２信号を受信することによって、一対の爪９２２が開位置に位置していることを検知する。 On the other hand, FIG. 27 shows a state (hereinafter referred to as a second return state) when the amount of upward movement of the movable member 13 while the pressure source is stopped is less than the required distance for power generation. Since the amount of movement of the movable member 13 until the pair of claws 922 return from the second return state to the initial stop state is less than the distance required for power generation, the power generation output of the power generation unit 20 becomes the second voltage less than the starting voltage. , the power generation output of the power generation unit 20 cannot activate the transmission unit 33 . At this time, the control circuit 34 turns on the switch 32 with the generation of the second voltage by the power generation unit 20 as a trigger, the transmission unit 33 is activated by the power supplied from the battery 30, and transmits the second signal. Send. The host system R1 detects that the pair of claws 922 is positioned at the open position by receiving the second signal transmitted from the transmission unit 33 of the sensor A22.
　なお、シリンダＳＹ３の一対の爪９２２が閉位置で停止している状態でシリンダＳＹ３の圧力源が長時間停止すると、上述と同様に、復帰ばね１４の復帰力等を受けて一対の爪９２２の位置がずれる可能性がある。 If the pressure source of the cylinder SY3 is stopped for a long time while the pair of claws 922 of the cylinder SY3 are stopped at the closed position, the pair of claws 922 will be displaced by receiving the restoring force of the return spring 14, etc., in the same manner as described above. Position may shift.
　ここで、一対の爪９２２が復帰ばね１４の復帰力等を受けて第１復帰状態の位置に移動した場合、圧力源が再起動して一対の爪９２２が停止前の閉位置に移動すると、センサＡ２２の発電ユニット２０が第１電圧を発生する。したがって、センサＡ２２の送信ユニット３３は発電ユニット２０から電力供給を受けて第１信号を送信できる。 Here, when the pair of pawls 922 receives the restoring force of the return spring 14 or the like and moves to the position of the first return state, when the pressure source is restarted and the pair of pawls 922 moves to the closed position before stopping, The generator unit 20 of sensor A22 generates a first voltage. Therefore, the transmitting unit 33 of the sensor A22 can receive power from the power generation unit 20 and transmit the first signal.
　また、一対の爪９２２が復帰ばね１４の復帰力等を受けて第２復帰状態の位置に移動した場合、圧力源が再起動して一対の爪９２２が停止前の閉位置に移動すると、センサＡ２２の発電ユニット２０は第２電圧を発生するため、送信ユニット３３は発電ユニット２０の発電出力では起動できない。この場合、センサＡ２２の制御回路３４は、発電ユニット２０が第２電圧を発生したことをトリガとして、スイッチ３２をオンに制御するので、送信ユニット３３は電池３０から供給される電力で起動し、第２信号を送信することができる。 Further, when the pair of pawls 922 receives the restoring force of the return spring 14 or the like and moves to the position of the second return state, when the pressure source is restarted and the pair of pawls 922 moves to the closed position before stopping, the sensor Since the power generation unit 20 of A22 generates the second voltage, the transmission unit 33 cannot be activated by the power generation output of the power generation unit 20 . In this case, the control circuit 34 of the sensor A 22 is triggered by the generation of the second voltage by the power generation unit 20, and controls the switch 32 to turn on. A second signal can be transmitted.
　なお、適用例２で説明したシリンダＳＹ３には、一対の爪９２２が閉位置及び開位置に移動したことをそれぞれ検知するために、２つのセンサＡ１（センサＡ２１及びセンサＡ２２）が取り付けられているが、シリンダＳＹ３に２つのセンサＡ１が取り付けられることは必須ではない。シリンダＳＹ３には、センサＡ２１、Ａ２１のうち、一対の爪９２２が閉位置に移動したことを検知するセンサＡ２１のみが取り付けられていてもよいし、一対の爪９２２が開位置に移動したことを検知するセンサＡ２２のみが取り付けられていてもよい。 Two sensors A1 (sensor A21 and sensor A22) are attached to the cylinder SY3 described in Application Example 2 in order to detect the movement of the pair of claws 922 to the closed position and the open position, respectively. However, it is not essential that two sensors A1 are attached to cylinder SY3. Of the sensors A21 and A21, only the sensor A21 for detecting that the pair of claws 922 has moved to the closed position may be attached to the cylinder SY3, or the sensor that detects that the pair of claws 922 have moved to the open position may be attached. Only the sensor A22 for detection may be attached.
　（４）変形例
　上記実施形態は、本開示の様々な実施形態の一つに過ぎない。上記実施形態は、本開示の目的を達成できれば、設計等に応じて種々の変更が可能である。 (4) Modifications The above-described embodiment is merely one of various embodiments of the present disclosure. The above-described embodiment can be modified in various ways according to design and the like, as long as the object of the present disclosure can be achieved.
　上記の実施形態では、発電ユニット２０が発電部２１と発電部２２と発電部２３とを備えているが、発電ユニット２０が発電部２３を含むことは必須ではなく、発電部２３は適宜省略可能である。 In the above embodiment, the power generation unit 20 includes the power generation section 21, the power generation section 22, and the power generation section 23. However, the power generation unit 20 does not necessarily include the power generation section 23, and the power generation section 23 can be omitted as appropriate. is.
　上記の実施形態では、センサＡ１が、空圧で動作するシリンダＳＹ１～ＳＹ３に適用されているが、油圧で動作するシリンダ、又は電動で動作するシリンダに適用されてもよい。 In the above embodiment, the sensor A1 is applied to the pneumatically operated cylinders SY1 to SY3, but it may be applied to a hydraulically operated cylinder or an electrically operated cylinder.
　上記の実施形態において、発電ユニット２０の発電出力と起動電圧との比較等の２値の比較において、「以上」としているところは「より大きい」であってもよい。つまり、２値の比較において、２値が等しい場合を含むか否かは、基準値等の設定次第で任意に変更できるので、「以上」か「より大きい」かに技術上の差異はない。同様に、「未満」としているところは「以下」であってもよい。 In the above embodiment, in a binary comparison such as a comparison between the power generation output of the power generation unit 20 and the starting voltage, "greater than" may be "greater than". That is, in the comparison of two values, whether or not the two values are equal can be arbitrarily changed depending on the setting of the reference value, etc., so there is no technical difference between "greater than" and "greater than". Similarly, "less than" may be "less than".
　（まとめ）
　以上説明したように、第１の態様のセンサ（Ａ１）は、可動部材（１３）と、復帰ばね（１４）と、発電ユニット（２０）と、電池（３０）と、送信ユニット（３３）と、を備える。可動部材（１３）は、第１位置（ＰＴ１）と、第１位置（ＰＴ１）の下方に位置する第２位置（ＰＴ２）との間で移動可能である。復帰ばね（１４）は、可動部材（１３）に上方向（Ｄｕ）の復帰力を加える。発電ユニット（２０）は、可動部材（１３）が移動することによって発電する。送信ユニット（３３）は無線信号を送信する。発電ユニット（２０）は、第１発電部（２１）及び第２発電部（２２）を含む。第１発電部（２１）及び第２発電部（２２）は、それぞれ、可動部材（１３）の移動に応じて撓むことで発電する。可動部材（１３）が第１位置（ＰＴ１）から第２位置（ＰＴ２）へと移動することにより、第１発電部（２１）が第１電圧を発生する。第２位置（ＰＴ２）まで移動した可動部材（１３）が復帰ばね（１４）の復帰力を受けて第２位置（ＰＴ２）と第１位置（ＰＴ１）との間の中間位置（ＰＴ３）まで移動した後で、可動部材（１３）が中間位置（ＰＴ３）から第２位置（ＰＴ２）に移動することにより、第２発電部（２２）が第２電圧を発生する。第１電圧は、送信ユニット（３３）が起動するのに必要な起動電圧以上の電圧であり、第２電圧は、起動電圧未満の電圧である。送信ユニット（３３）は、発電ユニット（２０）が第１電圧を発生した場合は、発電ユニット（２０）から電力供給を受けて第１信号を送信し、発電ユニット（２０）が第２電圧を発生した場合は、電池（３０）から電力供給を受けて第２信号を送信する。 (summary)
As described above, the sensor (A1) of the first aspect includes the movable member (13), the return spring (14), the power generation unit (20), the battery (30), and the transmission unit (33). , provided. The movable member (13) is movable between a first position (PT1) and a second position (PT2) located below the first position (PT1). A return spring (14) applies an upward (Du) return force to the movable member (13). The power generation unit (20) generates power by moving the movable member (13). A transmitting unit (33) transmits radio signals. The power generation unit (20) includes a first power generation section (21) and a second power generation section (22). Each of the first power generation section (21) and the second power generation section (22) generates power by bending according to the movement of the movable member (13). By moving the movable member (13) from the first position (PT1) to the second position (PT2), the first power generation section (21) generates the first voltage. The movable member (13) moved to the second position (PT2) receives the restoring force of the return spring (14) and moves to an intermediate position (PT3) between the second position (PT2) and the first position (PT1). After that, the movable member (13) moves from the intermediate position (PT3) to the second position (PT2), whereby the second power generating section (22) generates the second voltage. The first voltage is a voltage equal to or higher than the activation voltage required to activate the transmitting unit (33), and the second voltage is a voltage less than the activation voltage. The transmission unit (33) receives power from the power generation unit (20) and transmits the first signal when the power generation unit (20) generates the first voltage, and the power generation unit (20) generates the second voltage. If so, it receives power from the battery (30) and transmits the second signal.
　この態様によれば、外部から電力供給を受けることなく、送信ユニット（３３）が第１信号及び第２信号を送信できるので、電力供給及び信号送信のための電線が不要になる。センサ（Ａ１）に電力供給及び信号送信のための電線が接続されている場合は電線の断線等が発生する可能性があるが、センサ（Ａ１）は電力供給及び信号送信のための電線が不要であるから、損傷の可能性を低減することができる。 According to this aspect, since the transmission unit (33) can transmit the first signal and the second signal without receiving power supply from the outside, wires for power supply and signal transmission become unnecessary. If a wire for power supply and signal transmission is connected to the sensor (A1), disconnection of the wire may occur, but the sensor (A1) does not require a wire for power supply and signal transmission. As such, the likelihood of damage can be reduced.
　第２の態様のセンサ（Ａ１）では、第１の態様において、電池（３０）は、発電ユニット（２０）が発生した電気エネルギを蓄える蓄電素子を含む。 In the sensor (A1) of the second aspect, in the first aspect, the battery (30) includes a storage element that stores electrical energy generated by the power generation unit (20).
　この態様によれば、電池（３０）が一次電池で実現される場合に比べて、電池（３０）の交換が不要になるという利点がある。 According to this aspect, there is an advantage that replacement of the battery (30) becomes unnecessary compared to the case where the battery (30) is realized by a primary battery.
　第３の態様のセンサ（Ａ１）では、第１又は第２の態様において、発電ユニット（２０）は、第３発電部（２３）を更に含む。第３発電部（２３）は、可動部材（１３）の移動に応じて移動する永久磁石（４１）と、永久磁石（４１）の移動による磁束の変化で発電するコイル（２３２）と、を有する。 In the sensor (A1) of the third aspect, in the first or second aspect, the power generation unit (20) further includes a third power generation section (23). The third power generation section (23) has a permanent magnet (41) that moves in accordance with the movement of the movable member (13), and a coil (232) that generates power from changes in magnetic flux caused by the movement of the permanent magnet (41). .
　この態様によれば、第３発電部（２３）を更に備えることで、動作部材（９０６，８１４，８２４，８３５，８４５）が可動部材（１３）に接触した際の発電出力を大きくできる。 According to this aspect, by further including the third power generation section (23), it is possible to increase the power generation output when the motion members (906, 814, 824, 835, 845) come into contact with the movable member (13).
　第４の態様のセンサ（Ａ１）では、第１～第３のいずれかの態様において、第２発電部（２２）は、可動部材（１３）の移動によって撓む圧電素子（２４２）を含む。 In the sensor (A1) of the fourth aspect, in any one of the first to third aspects, the second power generation section (22) includes a piezoelectric element (242) that bends due to movement of the movable member (13).
　この態様によれば、外部に電磁ノイズの発生源が存在する場合でも、電磁ノイズによる誤動作を低減できる。 According to this aspect, even if there is an external source of electromagnetic noise, malfunction due to electromagnetic noise can be reduced.
　第５の態様のセンサ（Ａ１）では、第１～第４のいずれかの態様において、第１信号と第２信号とが同じ信号である。 In the sensor (A1) of the fifth aspect, in any one of the first to fourth aspects, the first signal and the second signal are the same signal.
　この態様によれば、送信ユニット（３３）は発電ユニット（２０）から電力供給を受ける場合も電池（３０）から電力供給を受ける場合も同じ信号を送信することができる。 According to this aspect, the transmitting unit (33) can transmit the same signal when receiving power from the power generation unit (20) and when receiving power from the battery (30).
　第６の態様のセンサ（Ａ１）は、第１～第５のいずれかの態様において、筐体（１０）と、筐体（１０）を保持するストッパ部材（５０）と、を更に備える。筐体（１０）は、可動部材（１３）と復帰ばね（１４）と発電ユニット（２０）と電池（３０）と送信ユニット（３３）とを収容する。可動部材（１３）は、往復動作を行う動作部材（９０６，８１４，８２４，８３５，８４５）を有するシリンダ（ＳＹ１～ＳＹ３）の動作部材（９０６，８１４，８２４，８３５，８４５）によって下方向Ｄｄに押される。可動部材（１３）は、ストッパ部材（５０）が動作部材（９０６，８１４，８２４，８３５，８４５）と接触しているときに第２位置（ＰＴ２）に位置する。ストッパ部材（５０）は、可動部材（１３）が第２位置（ＰＴ２）よりも下方に移動しないように、動作部材（９０６，８１４，８２４，８３５，８４５）の下方への移動を制限する。 The sensor (A1) of the sixth aspect, in any one of the first to fifth aspects, further comprises a housing (10) and a stopper member (50) holding the housing (10). A housing (10) accommodates a movable member (13), a return spring (14), a power generation unit (20), a battery (30) and a transmission unit (33). The movable member (13) is moved downward Dd by the operating members (906, 814, 824, 835, 845) of cylinders (SY1 to SY3) having operating members (906, 814, 824, 835, 845) that perform reciprocating motion. pushed by The movable member (13) is located at the second position (PT2) when the stopper member (50) is in contact with the operating member (906, 814, 824, 835, 845). The stopper member (50) limits downward movement of the action members (906, 814, 824, 835, 845) so that the movable member (13) does not move below the second position (PT2).
　この態様によれば、可動部材（１３）が第２位置（ＰＴ２）よりも下方に移動する可能性を低減できる。 According to this aspect, the possibility of the movable member (13) moving below the second position (PT2) can be reduced.
　第７の態様のセンサ（Ａ１）は、第６の態様において、動作部材（９０６，８１４，８２４，８３５，８４５）と接触するストッパ部材（５０，９３６，９４６）の接触部位（５８）を、シリンダ（ＳＹ１～ＳＹ３）に対して上下に移動させる位置調整機構（６０）を更に備える。 In the sixth aspect, the sensor (A1) of the seventh aspect is such that the contact portion (58) of the stopper member (50, 936, 946) that contacts the action member (906, 814, 824, 835, 845) is A position adjusting mechanism (60) for moving up and down with respect to the cylinders (SY1 to SY3) is further provided.
　この態様によれば、シリンダ（ＳＹ１～ＳＹ３）に対するストッパ部材（５０）及びセンサ（Ａ１）の位置を位置調整機構（６０）を用いて一度に調整することができる。 According to this aspect, the positions of the stopper member (50) and the sensor (A1) with respect to the cylinders (SY1 to SY3) can be adjusted at once using the position adjusting mechanism (60).
　第８の態様のセンサ（Ａ１）では、第７の態様において、可動部材（１３）は、動作部材（９０６，８１４，８２４，８３５，８４５）によって下方向Ｄｄに押される円柱状の操作部（１３１）を有する。ストッパ部材（５０）の接触部位（５８）には、操作部（１３１）が挿入される貫通孔（５４）が設けられている。位置調整機構（６０）は、操作部（１３１）の円柱状の中心軸（ＡＸ３）に沿って配置される。 In the sensor (A1) of the eighth aspect, in the seventh aspect, the movable member (13) is a columnar operation part ( 131). A contact portion (58) of the stopper member (50) is provided with a through-hole (54) into which the operating portion (131) is inserted. The position adjusting mechanism (60) is arranged along the columnar central axis (AX3) of the operation part (131).
　この態様によれば、操作部（１３１）がストッパ部材（５０）の貫通孔（５４）に挿入されているので、可動部材（１３）と動作部材（９０６，８１４，８２４，８３５，８４５）との間にケーブル等が入りにくくなり、ケーブル等の挟み込みによってセンサ（Ａ１）が破損する可能性を低減できる。また、位置調整機構（６０）は、操作部（１３１）の円柱状の中心軸（ＡＸ３）に沿って配置されるので、動作部材（９０６，８１４，８２４，８３５，８４５）が可動部材（１３）に接触した場合に、センサ（Ａ１）及びストッパ部材（５０）を介して位置調整機構（６０）に曲げモーメントが発生する可能性を低減できる。 According to this aspect, since the operating part (131) is inserted into the through hole (54) of the stopper member (50), the movable member (13) and the operating members (906, 814, 824, 835, 845) It becomes difficult for a cable or the like to enter between them, and the possibility of damage to the sensor (A1) due to the pinching of the cable or the like can be reduced. In addition, since the position adjustment mechanism (60) is arranged along the cylindrical central axis (AX3) of the operation part (131), the action members (906, 814, 824, 835, 845) are aligned with the movable member (13). ), the possibility that a bending moment is generated in the position adjustment mechanism (60) via the sensor (A1) and the stopper member (50) can be reduced.
　第９の態様のセンサ（Ａ１）は、第６～第８のいずれかの態様において、ストッパ部材（５０）をシリンダ（ＳＹ１～ＳＹ３）に取り付けるための取付部材（７０）を更に備える。取付部材（７０）は、電磁波を透過する第１透過部（Ｅ１）を含み、ストッパ部材（５０）は、電磁波を透過する第２透過部（Ｅ２）を含む。第１透過部（Ｅ１）と第２透過部（Ｅ２）とは、少なくとも一部が重なるように配置されている。 The sensor (A1) of the ninth aspect, in any one of the sixth to eighth aspects, further comprises an attachment member (70) for attaching the stopper member (50) to the cylinders (SY1 to SY3). The mounting member (70) includes a first transmitting portion (E1) that transmits electromagnetic waves, and the stopper member (50) includes a second transmitting portion (E2) that transmits electromagnetic waves. The first transmission section (E1) and the second transmission section (E2) are arranged so as to overlap at least partially.
　この態様によれば、送信ユニット（３３）が電波信号により送信信号を送信する場合に、送信信号の減衰を抑制することができる。 According to this aspect, attenuation of the transmission signal can be suppressed when the transmission unit (33) transmits the transmission signal as a radio signal.
　第２～第１０の態様に係る構成については、センサ（Ａ１）に必須の構成ではなく、適宜省略可能である。 The configurations according to the second to tenth aspects are not essential configurations for the sensor (A1), and can be omitted as appropriate.
１　　センサ
１０　　筐体
１３　　可動部材
２０　　発電ユニット
２１　　発電部（第１発電部）
２２　　発電部（第２発電部）
２３　　発電部（第３発電部）
３０　　電池
３３　　送信ユニット
４１　　永久磁石
５０　　ストッパ部材
５３　　保持部
５８　　接触部位
６０　　位置調整機構
７０　　取付部材
２３２　　コイル
２４２　　圧電素子
８１４，８２４　　従動リンク（動作部材）
８３５，８４５　　プランジャ（動作部材）
９０６　　動作部材
Ａ１　　センサ
ＡＸ１　　軸（第１軸）
ＡＸ２　　軸（第２軸）
ＡＸ３　　中心軸
Ｅ１　　第１透過部
Ｅ２　　第２透過部
ＰＴ１　　位置（第１位置）
ＰＴ２　　位置（第２位置）
ＰＴ３　　中間位置
ＰＴ４　　限界位置
ＳＹ１～ＳＹ３　　シリンダ 1 sensor 10 housing 13 movable member 20 power generation unit 21 power generation section (first power generation section)
22 power generation unit (second power generation unit)
23 Power Generation Department (3rd Power Generation Department)
30 Battery 33 Transmission Unit 41 Permanent Magnet 50 Stopper Member 53 Holding Part 58 Contact Part 60 Position Adjustment Mechanism 70 Mounting Member 232 Coil 242 Piezoelectric Elements 814, 824 Driven Link (Operating Member)
835, 845 plunger (operating member)
906 motion member A1 sensor AX1 axis (first axis)
AX2 axis (second axis)
AX3 Central axis E1 First transmission part E2 Second transmission part PT1 Position (first position)
PT2 position (second position)
PT3 Intermediate position PT4 Limit positions SY1 to SY3 Cylinder

Claims (9)

  1. 　第１位置と前記第１位置の下方に位置する第２位置との間で移動可能な可動部材と、
    　前記可動部材に上方向の復帰力を加える復帰ばねと、
    　前記可動部材が移動することによって発電する発電ユニットと、
    　電池と、
    　無線信号を送信する送信ユニットと、を備え、
    　前記発電ユニットは、第１発電部及び第２発電部を含み、
    　前記第１発電部及び前記第２発電部は、それぞれ、前記可動部材の移動に応じて撓むことで発電し、
    　前記可動部材が前記第１位置から前記第２位置へと移動することにより、前記第１発電部が第１電圧を発生し、
    　前記第２位置まで移動した前記可動部材が前記復帰ばねの復帰力を受けて前記第２位置と前記第１位置との間の中間位置まで移動した後で、前記可動部材が前記中間位置から前記第２位置に移動することにより、前記第２発電部が第２電圧を発生し、
    　前記第１電圧は、前記送信ユニットが起動するのに必要な起動電圧以上の電圧であり、
    　前記第２電圧は、前記起動電圧未満の電圧であり、
    　前記送信ユニットは、
    　　前記発電ユニットが前記第１電圧を発生した場合は、前記発電ユニットから電力供給を受けて第１信号を送信し、
    　　前記発電ユニットが前記第２電圧を発生した場合は、前記電池から電力供給を受けて第２信号を送信する、
    　センサ。     a movable member movable between a first position and a second position located below the first position;
    a return spring that applies an upward return force to the movable member;
    a power generation unit that generates power by moving the movable member;
    a battery;
    a transmitting unit for transmitting radio signals;
    The power generation unit includes a first power generation section and a second power generation section,
    each of the first power generation unit and the second power generation unit generates power by bending according to the movement of the movable member;
    When the movable member moves from the first position to the second position, the first power generation section generates a first voltage,
    After the movable member that has moved to the second position receives the restoring force of the return spring and moves to an intermediate position between the second position and the first position, the movable member moves from the intermediate position to the By moving to the second position, the second power generation unit generates a second voltage,
    the first voltage is a voltage equal to or higher than a start-up voltage required to start the transmission unit;
    The second voltage is a voltage less than the startup voltage,
    The transmitting unit is
    receiving power from the power generation unit and transmitting a first signal when the power generation unit generates the first voltage;
    When the power generation unit generates the second voltage, it receives power from the battery and transmits a second signal.
    sensor.
  2. 　前記電池は、前記発電ユニットが発生した電気エネルギを蓄える蓄電素子を含む、
    　請求項１記載のセンサ。     the battery includes a storage element that stores electrical energy generated by the power generation unit;
    2. The sensor of claim 1.
  3. 　前記発電ユニットは、第３発電部を更に含み、
    　前記第３発電部は、
    　　前記可動部材の移動に応じて移動する永久磁石と、
    　　前記永久磁石の移動による磁束の変化で発電するコイルと、を有する、
    　請求項１又は２記載のセンサ。     The power generation unit further includes a third power generation section,
    The third power generation unit is
    a permanent magnet that moves according to the movement of the movable member;
    and a coil that generates power by a change in magnetic flux due to movement of the permanent magnet,
    3. A sensor according to claim 1 or 2.
  4. 　前記第２発電部は、前記可動部材の移動によって撓む圧電素子を含む、
    　請求項１～３のいずれか１項に記載のセンサ。     The second power generation unit includes a piezoelectric element that bends due to movement of the movable member,
    The sensor according to any one of claims 1-3.
  5. 　前記第１信号と前記第２信号とが同じ信号である、
    　請求項１～４のいずれか１項に記載のセンサ。     wherein the first signal and the second signal are the same signal;
    The sensor according to any one of claims 1-4.
  6. 　前記可動部材と前記復帰ばねと前記発電ユニットと前記電池と前記送信ユニットとを収容する筐体と、
    　前記筐体を保持するストッパ部材と、を更に備え、
    　前記可動部材は、往復動作を行う動作部材を有するシリンダの前記動作部材によって下方向に押され、
    　前記可動部材は、前記ストッパ部材が前記動作部材と接触しているときに、前記第２位置に位置し、
    　前記ストッパ部材は、前記可動部材が前記第２位置よりも下方に移動しないように、前記動作部材の下方への移動を制限する、
    　請求項１～５のいずれか１項に記載のセンサ。     a housing that houses the movable member, the return spring, the power generation unit, the battery, and the transmission unit;
    further comprising a stopper member that holds the housing,
    said movable member being pushed downward by said actuating member of a cylinder having a actuating member for reciprocating motion;
    the movable member is positioned at the second position when the stopper member is in contact with the operating member;
    the stopper member restricts downward movement of the action member so that the movable member does not move below the second position;
    The sensor according to any one of claims 1-5.
  7. 　前記動作部材と接触する前記ストッパ部材の接触部位を前記シリンダに対して上下に移動させる位置調整機構を更に備える、
    　請求項６に記載のセンサ。     further comprising a position adjustment mechanism for vertically moving a contact portion of the stopper member that contacts the operating member with respect to the cylinder;
    A sensor according to claim 6 .
  8. 　前記可動部材は、前記動作部材によって下方向に押される円柱状の操作部を有し、
    　前記ストッパ部材の前記接触部位には、前記操作部が挿入される貫通孔が設けられており、
    　前記位置調整機構は、前記操作部の前記円柱状の中心軸に沿って配置される、
    　請求項７に記載のセンサ。     The movable member has a columnar operating portion that is pushed downward by the action member,
    The contact portion of the stopper member is provided with a through hole into which the operation portion is inserted,
    The position adjustment mechanism is arranged along the cylindrical central axis of the operation unit,
    A sensor according to claim 7 .
  9. 　前記ストッパ部材を前記シリンダに取り付けるための取付部材を更に備え、
    　前記取付部材は、電磁波を透過する第１透過部を含み、
    　前記ストッパ部材は、電磁波を透過する第２透過部を含み、
    　前記第１透過部と前記第２透過部とは、少なくとも一部が重なるように配置されている、
    　請求項６～８のいずれか１項に記載のセンサ。     further comprising a mounting member for mounting the stopper member to the cylinder;
    The mounting member includes a first transmitting portion that transmits electromagnetic waves,
    The stopper member includes a second transmitting portion that transmits electromagnetic waves,
    The first transmission part and the second transmission part are arranged so that at least a part thereof overlaps,
    The sensor according to any one of claims 6-8.
PCT/JP2022/002793 2021-05-31 2022-01-26 Sensor WO2022254779A1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011522360A (en) * 2009-03-05 2011-07-28 チャン・ホ・キム Standby power cutoff device and control method thereof
WO2018230359A1 (en) * 2017-06-14 2018-12-20 パナソニックＩｐマネジメント株式会社 Power generation switch

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011522360A (en) * 2009-03-05 2011-07-28 チャン・ホ・キム Standby power cutoff device and control method thereof
WO2018230359A1 (en) * 2017-06-14 2018-12-20 パナソニックＩｐマネジメント株式会社 Power generation switch

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