WO2022252301A1 - Optical fiber probe and assembling method therefor - Google Patents
Optical fiber probe and assembling method therefor Download PDFInfo
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- WO2022252301A1 WO2022252301A1 PCT/CN2021/101004 CN2021101004W WO2022252301A1 WO 2022252301 A1 WO2022252301 A1 WO 2022252301A1 CN 2021101004 W CN2021101004 W CN 2021101004W WO 2022252301 A1 WO2022252301 A1 WO 2022252301A1
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- optical fiber
- fiber probe
- dimensional nanomaterial
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- tapered
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- 239000000523 sample Substances 0.000 title claims abstract description 140
- 239000013307 optical fiber Substances 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 36
- 239000002086 nanomaterial Substances 0.000 claims abstract description 83
- 229910052751 metal Inorganic materials 0.000 claims abstract description 49
- 239000002184 metal Substances 0.000 claims abstract description 49
- 238000003672 processing method Methods 0.000 claims abstract description 18
- 239000002071 nanotube Substances 0.000 claims abstract description 7
- 239000002070 nanowire Substances 0.000 claims abstract description 7
- 238000000313 electron-beam-induced deposition Methods 0.000 claims abstract description 6
- 239000000835 fiber Substances 0.000 claims description 52
- 239000011521 glass Substances 0.000 claims description 14
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 14
- 229910052737 gold Inorganic materials 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052709 silver Inorganic materials 0.000 claims description 12
- 239000004332 silver Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 3
- 230000007547 defect Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 20
- 230000003287 optical effect Effects 0.000 description 7
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000002041 carbon nanotube Substances 0.000 description 6
- 229910021393 carbon nanotube Inorganic materials 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Definitions
- the invention belongs to the technical field of micro-nano manufacturing, and in particular relates to an optical fiber probe and an assembly method thereof.
- the realization of military equipment functions such as micro-spacecraft control and inertial guidance devices, and aircraft stealth depends on the special functions of high-precision and complex micro-nano structures.
- the characteristic size is generally at the nanometer level ( ⁇ 50nm), and the depth may reach the micron level.
- ⁇ 50nm nanometer level
- the depth may reach the micron level.
- complex micro-nano structures especially high-aspect-ratio micro-nano structures, it is difficult to perform accurate three-dimensional structure measurement to guide precise processing and ensure the effectiveness of their functional applications.
- high-end microscopes such as scanning probe microscopes are still used as the main measuring instruments, in which the size and shape of the probe determine the imaging performance.
- the scanning probe is in the shape of a cone or a pyramid, although a lateral resolution of about 10 nm can be obtained, its shape limits its application in the measurement of micro-nano structures with a large aspect ratio.
- ordinary atomic force probes will have a widening effect when measuring deep trench structures. This false imaging makes it impossible to accurately measure the trench depth.
- a large aspect ratio probe based on AFM probe was proposed and applied to the measurement of deep trench structures, and obtained better imaging resolution.
- the large aspect ratio probe based on the AFM probe is only suitable for contact measurement, and can only obtain the lateral and longitudinal dimensions of the sample, and is powerless for the measurement of spectral information such as the material and stress of the sample, and these optical information also determine the function of the micro-nano structure device.
- spectral information such as the material and stress of the sample
- these optical information also determine the function of the micro-nano structure device.
- the traditional preparation methods of large aspect ratio probes need to destroy the AFM probe (such as pore growth method) or corrode and lead to the destruction of the surface structure of the AFM probe (such as solution-based growth method and assembly method). These methods are only suitable for ordinary AFM probes. Probes bound to one-dimensional nanomaterials. For fiber-optic large-aspect-ratio probes that require smooth probe surface light guidance and precise positioning of one-dimensional nanomaterials with large aspect ratios, if assembled according to the existing traditional preparation method of large-aspect-ratio probes, the fiber-optic probe If the surface is damaged, it cannot be used to guide light and thus cannot be used for optical measurements.
- the present invention provides an optical fiber probe and its assembly method.
- the surface of the optical fiber probe is not damaged and the surface is smooth, which can ensure that the optical fiber probe
- the light guiding ability can be used for optical measurement.
- a fiber optic probe comprising a tapered fiber probe and a one-dimensional nanomaterial, one end of the one-dimensional nanomaterial is connected to the tip of the tapered fiber probe through a metal layer, the tapered fiber probe and the one-dimensional nanomaterial are coaxial,
- the one-dimensional nanomaterials are nanowires or nanotubes with an aspect ratio ⁇ 10:1.
- the surface of the tapered optical fiber probe is coated with a metal film layer
- the material of the metal film layer is gold, silver or aluminum, and the thickness is 10nm-150nm.
- the shape of the tapered fiber optic probe is a cone, the angle of the cone is 10°-80°, and the diameter of the tip of the cone is 5nm-200nm.
- the one-dimensional nanomaterial has a diameter of 5 nm to 200 nm, a length of 50 nm to 2 ⁇ m, and a tip diameter of not more than 10 nm.
- the material of the metal layer is gold, silver or aluminum.
- the present invention also provides a method for assembling an optical fiber probe, including the following process:
- the tip of the tapered fiber probe is in contact with one end of the one-dimensional nanomaterial, the tapered fiber probe is coaxial with the one-dimensional nanomaterial, and the one-dimensional nanomaterial adopts nanowires or nanotubes;
- a layer of metal is induced to be deposited by electron beam deposition, and the deposited metal layer fixes the one-dimensional nanomaterial at the tip of the tapered fiber probe;
- the deposited metal layer is modified and processed by a micro-nano processing method, so that the aspect ratio of the one-dimensional nanomaterial is not less than 10:1, and the optical fiber probe is obtained.
- the process of contacting the tip of the tapered fiber optic probe with one end of the one-dimensional nanomaterial includes:
- the tip diameter of the one-dimensional nano-material is processed to be no greater than 10 nm to obtain the final optical fiber probe, wherein the micro-nano processing method includes focusing ion beams processing method or laser processing method.
- the electron beam deposited metal material comprises gold, silver or aluminum.
- the tapered fiber probe is a tapered fiber probe whose surface is coated with a metal film layer; the material of the metal film layer is gold, silver or aluminum, and the thickness is 10 nm to 150 nm.
- the present invention has the following beneficial effects:
- one end of the one-dimensional nanomaterial is directly connected to the tip of the tapered fiber probe through a metal layer.
- This connection form is a non-destructive connection structure, so the surface of the tapered fiber probe will not be damaged. Quality, can get a smooth surface of the fiber optic probe, ensure the light guide, and use the light guide for optical information measurement.
- the aspect ratio of the one-dimensional nanomaterial is ⁇ 10:1. It can be seen that the one-dimensional nanomaterial is a structure with a large aspect ratio.
- the optical fiber probe of the present invention can be used for the measurement of high aspect ratio micro-nano structures , so that accurate three-dimensional structure measurement can be carried out to guide precise processing and ensure the effectiveness of its functional application, and meet the multiple information measurement requirements such as shape and properties of micro-nano functional structures with large aspect ratios.
- the assembly method of the optical fiber probe of the present invention a layer of metal is induced to be deposited by electron beam deposition at the contact portion between the tapered optical fiber probe and the one-dimensional nanomaterial, and the deposited metal layer fixes the one-dimensional nanomaterial on the tapered
- the electron beam deposition method will not cause the problem of surface damage of the tapered fiber probe, and the micro-nano processing method is used for modification processing to obtain the final fiber probe with a preset aspect ratio.
- the assembly method of the present invention can obtain an optical fiber probe with an undamaged surface, so that the optical fiber probe with a one-dimensional nanomaterial aspect ratio of not less than 10:1 can be used for light guiding and optical information measurement.
- the nano manipulator and the metal stage are placed in the vacuum chamber of the scanning electron microscope for assembly, which can monitor the assembly process in real time and precisely control the assembly position of the fiber probe and the one-dimensional nanomaterial.
- Fig. 1 is the schematic diagram of assembly of fiber optic probe of the present invention
- Fig. 2 is a schematic diagram of depositing and fixing a one-dimensional nanomaterial at the tip of a fiber optic probe in an embodiment of the present invention.
- optical fiber probe of the present invention comprises tapered optical fiber probe 2 and one-dimensional nanomaterial, and one end of one-dimensional nanomaterial is connected with the tip of tapered optical fiber probe 2 by metal layer, tapered optical fiber probe 2 and The one-dimensional nanomaterials are coaxial; the one-dimensional nanomaterials are nanowires or nanotubes, and the aspect ratio is ⁇ 10:1.
- the surface of the tapered optical fiber probe 2 is coated with a metal film layer, the material of the metal film layer is gold, silver or aluminum, and the thickness is 10nm-150nm.
- the tapered fiber optic probe 2 is in the shape of a cone, the angle of the cone is 10°-80°, and the diameter of the tip of the cone is 5nm-200nm.
- the one-dimensional nanomaterial has a diameter of 5 nm to 200 nm and a length of 50 nm to 2 ⁇ m.
- the material of the metal layer is gold, silver or aluminum.
- the present invention also provides a method for assembling an optical fiber probe, including the following process:
- the tapered fiber optic probe 2 and the one-dimensional nanomaterial are coaxial, and the one-dimensional nanomaterial adopts nanowires or nanotubes;
- a layer of metal is induced to be deposited by electron beam deposition, and the deposited metal layer fixes the one-dimensional nanomaterial at the tip of the tapered fiber optic probe 2;
- the deposited metal layer is modified and processed by a micro-nano processing method, so that the one-dimensional nanomaterial reaches the final size, and the aspect ratio of the one-dimensional nanomaterial is not less than 10:1, and the optical fiber probe is obtained.
- the process of contacting the tip of the tapered fiber optic probe 2 with one end of the one-dimensional nanomaterial includes:
- the one-dimensional nanomaterial is modified and processed by a micro-nano processing method so that the tip diameter of the one-dimensional nano-material is not greater than 10 nm to obtain the final optical fiber probe, wherein the micro-nano processing method includes focusing Ion beam processing method or laser processing method.
- the electron beam deposited metal material comprises gold, silver or aluminum.
- the tapered optical fiber probe 2 is a tapered optical fiber probe whose surface is coated with a metal film layer; the material of the metal film layer is gold, silver or aluminum, and the thickness is 10nm ⁇ 150nm.
- the tapered optical fiber probe 2 coated with the metal film layer is fixed on the side wall of the quartz tuning fork resonant sensor pin, utilizes nanometer operation manipulator 3 to clamp another pin of the quartz tuning fork resonant sensor;
- This embodiment provides a method for assembling an optical fiber probe with a large aspect ratio, as shown in Figure 1, including the following steps:
- the present invention is based on a nano-manipulator-based method for assembling an optical fiber probe with a large aspect ratio: (1) There is no need to destroy the surface quality of the optical fiber probe during the preparation process, and a smooth surface of the optical fiber probe can be obtained for light guiding. Optical information measurement; (2) It can monitor the assembly process in real time and precisely control the assembly position of the fiber probe and the one-dimensional nanomaterial.
- the large aspect ratio optical fiber probe assembly method of the present invention can obtain a large aspect ratio optical fiber probe with a smooth probe surface, which meets the multiple information measurement requirements such as the shape and properties of the micro-nano functional structure with a large aspect ratio.
Abstract
An optical fiber probe and an assembling method therefor. The optical fiber probe comprises a conical optical fiber probe (2) and a one-dimensional nanomaterial; one end of the one-dimensional nanomaterial is connected to a tip end of the conical optical fiber probe (2) by means of a metal layer; the conical optical fiber probe (2) and the one-dimensional nanomaterial are coaxial; the one-dimensional nanomaterial uses nanowires or nanotubes (5); and the length-to-diameter ratio is greater than or equal to 10:1. The assembling method comprises the following processes: the tip end of the conical optical fiber probe (2) is in contact with one end of the one-dimensional nanomaterial; a layer of metal is induced and deposited at the contact part of the conical optical fiber probe (2) and the one-dimensional nanomaterial by using an electron beam deposition method, and the deposited metal layer fixes the one-dimensional nanomaterial at the tip end position of the conical optical fiber probe (2); and the deposited metal layer is modified and processed by using a micro-nano processing method so as to obtain an optical fiber probe. The surface of the probe is not damaged and is smooth, and the defects in the prior art caused by the situation that the surface of the probe is damaged and is rough when the optical fiber probe is assembled can be avoided.
Description
本发明属于微纳米制造技术领域，特别是涉及一种光纤探针及其组装方法。The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to an optical fiber probe and an assembly method thereof.
微型航天器控制和惯性制导器件、飞行器隐身等军事装备功能的实现依赖于高精度复杂微纳结构的特殊功能，其特征尺寸一般在纳米级别(＜50nm)，且深度可能达到微米级。对于复杂微纳结构，特别是高深宽比微纳结构，现有技术难以进行精确三维结构测量以指导精确加工并保证其功能应用的有效性。The realization of military equipment functions such as micro-spacecraft control and inertial guidance devices, and aircraft stealth depends on the special functions of high-precision and complex micro-nano structures. The characteristic size is generally at the nanometer level (<50nm), and the depth may reach the micron level. For complex micro-nano structures, especially high-aspect-ratio micro-nano structures, it is difficult to perform accurate three-dimensional structure measurement to guide precise processing and ensure the effectiveness of their functional applications.
目前，在纳米测量领域，仍以扫描探针显微镜等高端显微镜作为主要测量仪器，其中，探针的尺寸形状决定着成像性能。但由于扫描探针为锥形或金字塔形，虽然能得到10nm左右的横向分辨率，但本身的形状限制了其在大深宽比微纳结构中的测量应用。如，普通原子力探针在测量深沟槽结构时会出现加宽效应，这种假象成像导致其不能准确测量沟槽深度。为了解决大深宽比微纳结构测量，基于AFM探针的大长径比探针被提出并应用于深沟槽结构的测量，并得到较好的成像分辨率。但基于AFM探针的大长径比探针仅适合接触测量，仅能得到样品的横向和纵向尺寸，对于样品的材料、应力等光谱信息测量无能为力，而这些光学信息也是决定微纳结构器件功能的关键信息，为了得到大深宽比微纳结构的形状、性质等多重信息测量结构，迫切需要设计并制备一种能够将光学测量和普通原子力接触式测量相结合的一种大长径比光纤探针来解决上述测量难题。At present, in the field of nanometer measurement, high-end microscopes such as scanning probe microscopes are still used as the main measuring instruments, in which the size and shape of the probe determine the imaging performance. However, since the scanning probe is in the shape of a cone or a pyramid, although a lateral resolution of about 10 nm can be obtained, its shape limits its application in the measurement of micro-nano structures with a large aspect ratio. For example, ordinary atomic force probes will have a widening effect when measuring deep trench structures. This false imaging makes it impossible to accurately measure the trench depth. In order to solve the measurement of micro-nano structures with large aspect ratio, a large aspect ratio probe based on AFM probe was proposed and applied to the measurement of deep trench structures, and obtained better imaging resolution. However, the large aspect ratio probe based on the AFM probe is only suitable for contact measurement, and can only obtain the lateral and longitudinal dimensions of the sample, and is powerless for the measurement of spectral information such as the material and stress of the sample, and these optical information also determine the function of the micro-nano structure device. In order to obtain multiple information measurement structures such as the shape and properties of large-aspect-ratio micro-nano structures, it is urgent to design and prepare a large-aspect-ratio optical fiber that can combine optical measurement and ordinary atomic force contact measurement. Probes to solve the above measurement problems.
传统的大长径比探针制备方法需要破坏原子力探针(如孔隙生长法)或者腐蚀并导致原子力探针表面结构破坏(如基于溶液的生长法和组装发)，这些方法仅适用于普通原子力探针结合一维纳米材料。对于需要光滑探针表面导光和大长径比一维纳米材料精确定位的光纤式大长 径比探针，如果按照现有传统的大长径比探针制备方法进行组装，使得光纤探针的表面会被破坏，则无法利用其进行导光，进而无法用于光学测量。The traditional preparation methods of large aspect ratio probes need to destroy the AFM probe (such as pore growth method) or corrode and lead to the destruction of the surface structure of the AFM probe (such as solution-based growth method and assembly method). These methods are only suitable for ordinary AFM probes. Probes bound to one-dimensional nanomaterials. For fiber-optic large-aspect-ratio probes that require smooth probe surface light guidance and precise positioning of one-dimensional nanomaterials with large aspect ratios, if assembled according to the existing traditional preparation method of large-aspect-ratio probes, the fiber-optic probe If the surface is damaged, it cannot be used to guide light and thus cannot be used for optical measurements.
发明内容Contents of the invention
针对上述现有技术中存在的缺陷和不足，本发明提供了一种光纤探针及其组装方法，本发明的光纤探针中，光纤探针表面未受到破坏，表面光滑，能够保证光纤探针的导光能力，进而能够用于光学测量。Aiming at the defects and deficiencies in the above-mentioned prior art, the present invention provides an optical fiber probe and its assembly method. In the optical fiber probe of the present invention, the surface of the optical fiber probe is not damaged and the surface is smooth, which can ensure that the optical fiber probe The light guiding ability can be used for optical measurement.
本发明采用的技术方案如下：The technical scheme that the present invention adopts is as follows:
一种光纤探针，包括锥形光纤探针和一维纳米材料，一维纳米材料的一端通过金属层与锥形光纤探针的尖端连接，锥形光纤探针和一维纳米材料同轴，所述一维纳米材料采用纳米线或纳米管，长径比≥10：1。A fiber optic probe, comprising a tapered fiber probe and a one-dimensional nanomaterial, one end of the one-dimensional nanomaterial is connected to the tip of the tapered fiber probe through a metal layer, the tapered fiber probe and the one-dimensional nanomaterial are coaxial, The one-dimensional nanomaterials are nanowires or nanotubes with an aspect ratio ≥ 10:1.
优选的，锥形光纤探针表面镀有金属膜层，金属膜层材料为金、银或铝，厚度为10nm～150nm。Preferably, the surface of the tapered optical fiber probe is coated with a metal film layer, the material of the metal film layer is gold, silver or aluminum, and the thickness is 10nm-150nm.
优选的，锥形光纤探针形状为锥体，锥体角为10°～80°，锥体针尖直径为5nm～200nm。Preferably, the shape of the tapered fiber optic probe is a cone, the angle of the cone is 10°-80°, and the diameter of the tip of the cone is 5nm-200nm.
优选的，所述一维纳米材料直径为5nm～200nm，长度为50nm～2μm，尖端直径不大于10nm。Preferably, the one-dimensional nanomaterial has a diameter of 5 nm to 200 nm, a length of 50 nm to 2 μm, and a tip diameter of not more than 10 nm.
优选的，所述金属层材料为金、银或铝。Preferably, the material of the metal layer is gold, silver or aluminum.
本发明还提供了一种光纤探针的组装方法，包括如下过程：The present invention also provides a method for assembling an optical fiber probe, including the following process:
将锥形光纤探针的尖端和一维纳米材料的一端接触，锥形光纤探针和一维纳米材料同轴，所述一维纳米材料采用纳米线或纳米管；The tip of the tapered fiber probe is in contact with one end of the one-dimensional nanomaterial, the tapered fiber probe is coaxial with the one-dimensional nanomaterial, and the one-dimensional nanomaterial adopts nanowires or nanotubes;
在锥形光纤探针和一维纳米材料的接触部位，利用电子束沉积的方法诱导沉积一层金属，沉积的金属层将一维纳米材料固定在锥形光纤探针的尖端位置；At the contact point between the tapered fiber probe and the one-dimensional nanomaterial, a layer of metal is induced to be deposited by electron beam deposition, and the deposited metal layer fixes the one-dimensional nanomaterial at the tip of the tapered fiber probe;
对沉积的金属层利用微纳加工方法进行修饰加工，使一维纳米材料的长径比不小于10:1，得到所述光纤探针。The deposited metal layer is modified and processed by a micro-nano processing method, so that the aspect ratio of the one-dimensional nanomaterial is not less than 10:1, and the optical fiber probe is obtained.
优选的，将锥形光纤探针的尖端和一维纳米材料的一端接触的过程包括：Preferably, the process of contacting the tip of the tapered fiber optic probe with one end of the one-dimensional nanomaterial includes:
将锥形光纤探针固定在纳米操作机械手上；Fix the tapered fiber optic probe on the nanomanipulator;
将一维纳米材料放置于载玻片上，所述载玻片利用导电胶固定在金属载物台上；Place the one-dimensional nanomaterial on a glass slide, and the glass slide is fixed on a metal stage with conductive glue;
将纳米操作机械手和金属载物台放置于扫描电子显微镜真空腔室内，在电子显微镜观察下控制纳米操作机械手，使锥形光纤探针接近并吸附载玻片上的一维纳米材料的一端，实现锥形光纤探针的尖端和一维纳米材料的一端接触。Place the nano-manipulator and the metal stage in the vacuum chamber of the scanning electron microscope, and control the nano-manipulator under the observation of the electron microscope, so that the tapered fiber probe approaches and adsorbs one end of the one-dimensional nanomaterial on the glass slide, realizing the cone The tip of the fiber-shaped probe is in contact with one end of the 1D nanomaterial.
优选的，对一维纳米材料利用微纳加工方法进行修饰加工时，将一维纳米材料的尖端直径加工为不大于10nm，得到最终的光纤探针，其中所述微纳加工方法包括聚焦离子束加工方法或激光加工方法。Preferably, when the one-dimensional nanomaterial is modified and processed by a micro-nano processing method, the tip diameter of the one-dimensional nano-material is processed to be no greater than 10 nm to obtain the final optical fiber probe, wherein the micro-nano processing method includes focusing ion beams processing method or laser processing method.
优选的，电子束沉积金属材料包括金、银或铝。Preferably, the electron beam deposited metal material comprises gold, silver or aluminum.
优选的，所述锥形光纤探针为表面镀有金属膜层的锥形光纤探针；所述金属膜层材料为金、银或铝，厚度为10nm～150nm。Preferably, the tapered fiber probe is a tapered fiber probe whose surface is coated with a metal film layer; the material of the metal film layer is gold, silver or aluminum, and the thickness is 10 nm to 150 nm.
与现有技术相比，本发明具有如下有益效果：Compared with the prior art, the present invention has the following beneficial effects:
本发明光纤探针中，一维纳米材料的一端通过金属层与锥形光纤探针的尖端直接连接，该连接形式是一种非破坏式的连接结构，因此不会破坏锥形光纤探针表面质量，能够得到光滑的光纤探针表面，保证导光性，并用于导光进行光学信息测量。一维纳米材料的长径比≥10：1，可以看出，该一维纳米材料为大长径比的结构，因此，本发明的光纤探针可被用于高深宽比微纳结构的测量，使得能够进行精确三维结构测量以指导精确加工并保证其功能应用的有效性，满足大深宽比微纳功能结构的形状、性质等多重信息测量要求。In the fiber probe of the present invention, one end of the one-dimensional nanomaterial is directly connected to the tip of the tapered fiber probe through a metal layer. This connection form is a non-destructive connection structure, so the surface of the tapered fiber probe will not be damaged. Quality, can get a smooth surface of the fiber optic probe, ensure the light guide, and use the light guide for optical information measurement. The aspect ratio of the one-dimensional nanomaterial is ≥10:1. It can be seen that the one-dimensional nanomaterial is a structure with a large aspect ratio. Therefore, the optical fiber probe of the present invention can be used for the measurement of high aspect ratio micro-nano structures , so that accurate three-dimensional structure measurement can be carried out to guide precise processing and ensure the effectiveness of its functional application, and meet the multiple information measurement requirements such as shape and properties of micro-nano functional structures with large aspect ratios.
本发明光纤探针的组装方法中，在锥形光纤探针和一维纳米材料的接触部位，利用电子束沉积的方法诱导沉积一层金属，沉积的金属层将一维纳米材料固定在锥形光纤探针的尖端位置，利用电子束沉积的方法不会导致锥形光纤探针表面破坏的问题，利用微纳加工方法进行修饰加 工，得到最终的具有预设长径比的光纤探针。综上，本发明的组装方法能够得到表面未被破坏的光纤探针，使得具有一维纳米材料长径比不小于10:1的光纤探针能够用于导光、进行光学信息测量。In the assembly method of the optical fiber probe of the present invention, a layer of metal is induced to be deposited by electron beam deposition at the contact portion between the tapered optical fiber probe and the one-dimensional nanomaterial, and the deposited metal layer fixes the one-dimensional nanomaterial on the tapered For the tip position of the fiber probe, the electron beam deposition method will not cause the problem of surface damage of the tapered fiber probe, and the micro-nano processing method is used for modification processing to obtain the final fiber probe with a preset aspect ratio. In summary, the assembly method of the present invention can obtain an optical fiber probe with an undamaged surface, so that the optical fiber probe with a one-dimensional nanomaterial aspect ratio of not less than 10:1 can be used for light guiding and optical information measurement.
进一步的，将纳米操作机械手和金属载物台放置于扫描电子显微镜真空腔室内进行组装，能够实时监控组装过程，精确控制光纤探针和一维纳米材料的组装位置。Further, the nano manipulator and the metal stage are placed in the vacuum chamber of the scanning electron microscope for assembly, which can monitor the assembly process in real time and precisely control the assembly position of the fiber probe and the one-dimensional nanomaterial.
图1是本发明光纤探针组装示意图；Fig. 1 is the schematic diagram of assembly of fiber optic probe of the present invention;
图2是本发明实施例中沉积并固定光纤探针针尖处一维纳米材料示意图。Fig. 2 is a schematic diagram of depositing and fixing a one-dimensional nanomaterial at the tip of a fiber optic probe in an embodiment of the present invention.
图中，1-扫描电子显微镜真空腔室，2-锥形光纤探针，3-纳米操作机械手，4-石英音叉谐振传感器，5-碳纳米管，6-载玻片，7-金属载物台，8-电子束，9-金属层。In the figure, 1-scanning electron microscope vacuum chamber, 2-tapered fiber optic probe, 3-nanometer manipulator, 4-quartz tuning fork resonant sensor, 5-carbon nanotube, 6-glass slide, 7-metal load stage, 8-electron beam, 9-metal layer.
下面将结合附图和具体实施方法对本发明做清楚、具体的说明。The present invention will be clearly and specifically described below in conjunction with the accompanying drawings and specific implementation methods.
参照图2，本发明的光纤探针包括锥形光纤探针2和一维纳米材料，一维纳米材料的一端通过金属层与锥形光纤探针2的尖端连接，锥形光纤探针2和一维纳米材料同轴；所述一维纳米材料采用纳米线或纳米管，长径比≥10：1。With reference to Fig. 2, optical fiber probe of the present invention comprises tapered optical fiber probe 2 and one-dimensional nanomaterial, and one end of one-dimensional nanomaterial is connected with the tip of tapered optical fiber probe 2 by metal layer, tapered optical fiber probe 2 and The one-dimensional nanomaterials are coaxial; the one-dimensional nanomaterials are nanowires or nanotubes, and the aspect ratio is ≥10:1.
作为本发明优选的实施方案，锥形光纤探针2表面镀有金属膜层，金属膜层材料为金、银或铝，厚度为10nm～150nm。As a preferred embodiment of the present invention, the surface of the tapered optical fiber probe 2 is coated with a metal film layer, the material of the metal film layer is gold, silver or aluminum, and the thickness is 10nm-150nm.
作为本发明优选的实施方案，锥形光纤探针2形状为锥体，锥体角为10°～80°，锥体针尖直径为5nm～200nm。As a preferred embodiment of the present invention, the tapered fiber optic probe 2 is in the shape of a cone, the angle of the cone is 10°-80°, and the diameter of the tip of the cone is 5nm-200nm.
作为本发明优选的实施方案，所述一维纳米材料直径为5nm～200nm，长度为50nm～2μm。As a preferred embodiment of the present invention, the one-dimensional nanomaterial has a diameter of 5 nm to 200 nm and a length of 50 nm to 2 μm.
作为本发明优选的实施方案，所述金属层材料为金、银或铝。As a preferred embodiment of the present invention, the material of the metal layer is gold, silver or aluminum.
本发明还提供了一种光纤探针的组装方法，包括如下过程：The present invention also provides a method for assembling an optical fiber probe, including the following process:
将锥形光纤探针2的尖端和一维纳米材料的一端接触，锥形光纤探针2和一维纳米材料同轴，所述一维纳米材料采用纳米线或纳米管；Contacting the tip of the tapered fiber optic probe 2 with one end of the one-dimensional nanomaterial, the tapered fiber optic probe 2 and the one-dimensional nanomaterial are coaxial, and the one-dimensional nanomaterial adopts nanowires or nanotubes;
在锥形光纤探针2和一维纳米材料的接触部位，利用电子束沉积的方法诱导沉积一层金属，沉积的金属层将一维纳米材料固定在锥形光纤探针2的尖端位置；At the contact portion between the tapered fiber optic probe 2 and the one-dimensional nanomaterial, a layer of metal is induced to be deposited by electron beam deposition, and the deposited metal layer fixes the one-dimensional nanomaterial at the tip of the tapered fiber optic probe 2;
对沉积的金属层利用微纳加工方法进行修饰加工，使得一维纳米材料达到最终的尺寸，使一维纳米材料的长径比不小于10:1，得到所述光纤探针。The deposited metal layer is modified and processed by a micro-nano processing method, so that the one-dimensional nanomaterial reaches the final size, and the aspect ratio of the one-dimensional nanomaterial is not less than 10:1, and the optical fiber probe is obtained.
作为本发明优选的实施方案，将锥形光纤探针2的尖端和一维纳米材料的一端接触的过程包括：As a preferred embodiment of the present invention, the process of contacting the tip of the tapered fiber optic probe 2 with one end of the one-dimensional nanomaterial includes:
将锥形光纤探针2固定在纳米操作机械手上；Fix the tapered fiber optic probe 2 on the nano manipulator;
将一维纳米材料放置于载玻片上，所述载玻片利用导电胶固定在金属载物台上；Place the one-dimensional nanomaterial on a glass slide, and the glass slide is fixed on a metal stage with conductive glue;
将纳米操作机械手和金属载物台放置于扫描电子显微镜真空腔室内，在电子显微镜观察下控制纳米操作机械手，使锥形光纤探针2接近并吸附载玻片上的一维纳米材料的一端，实现锥形光纤探针2的尖端和一维纳米材料的一端接触。Place the nano-manipulator and the metal stage in the vacuum chamber of the scanning electron microscope, control the nano-manipulator under the observation of the electron microscope, make the tapered fiber optic probe 2 approach and adsorb one end of the one-dimensional nanomaterial on the glass slide, and realize The tip of the tapered fiber optic probe 2 is in contact with one end of the one-dimensional nanomaterial.
作为本发明优选的实施方案，对一维纳米材料利用微纳加工方法进行修饰加工，使一维纳米材料的尖端直径不大于10nm，得到最终的光纤探针，其中所述微纳加工方法包括聚焦离子束加工方法或激光加工方法。As a preferred embodiment of the present invention, the one-dimensional nanomaterial is modified and processed by a micro-nano processing method so that the tip diameter of the one-dimensional nano-material is not greater than 10 nm to obtain the final optical fiber probe, wherein the micro-nano processing method includes focusing Ion beam processing method or laser processing method.
作为本发明优选的实施方案，电子束沉积金属材料包括金、银或铝。As a preferred embodiment of the present invention, the electron beam deposited metal material comprises gold, silver or aluminum.
作为本发明优选的实施方案，上述制备方法中，锥形光纤探针2为表面镀有金属膜层的锥形光纤探针；所述金属膜层材料为金、银或铝，厚度为10nm～150nm。As a preferred embodiment of the present invention, in the above-mentioned preparation method, the tapered optical fiber probe 2 is a tapered optical fiber probe whose surface is coated with a metal film layer; the material of the metal film layer is gold, silver or aluminum, and the thickness is 10nm～ 150nm.
实施例1Example 1
本实施例光纤探针的组装方法包括以下步骤：The assembly method of the fiber optic probe in this embodiment includes the following steps:
(1)将镀有金属膜层的锥形光纤探针2固定在石英音叉谐振传感器针脚的侧壁上，利用 纳米操作机械手3夹持石英音叉谐振传感器的另一针脚；(1) the tapered optical fiber probe 2 coated with the metal film layer is fixed on the side wall of the quartz tuning fork resonant sensor pin, utilizes nanometer operation manipulator 3 to clamp another pin of the quartz tuning fork resonant sensor;
(2)将分散的一维纳米材料放置于载玻片6上，利用导电胶将载玻片6固定到金属载物台7上；(2) Place the dispersed one-dimensional nanomaterials on the slide glass 6, and fix the slide glass 6 to the metal stage 7 with conductive glue;
(3)将纳米操作机械手3和金属载物台7放置于扫描电子显微镜真空腔室1内，在电子显微镜观察下控制纳米操作机械手3，使石英音叉上的锥形光纤探针2接近并吸附金属载物台7上的一维纳米材料；(3) Place the nano-manipulator 3 and the metal stage 7 in the vacuum chamber 1 of the scanning electron microscope, and control the nano-manipulator 3 under the observation of the electron microscope, so that the tapered fiber optic probe 2 on the quartz tuning fork approaches and absorbs One-dimensional nanomaterials on the metal stage 7;
(4)利用电子束诱导沉积一层金属将一维纳米材料固定在锥形光纤探针尖端的位置；(4) Using electron beams to induce deposition of a layer of metal to fix the one-dimensional nanomaterials at the tip of the tapered fiber optic probe;
(5)利用微纳加工方法对位于光纤探针针尖位置的一维纳米材料进行修饰加工，得到光纤探针。(5) Using a micro-nano processing method to modify and process the one-dimensional nanomaterial located at the tip of the fiber probe to obtain the fiber probe.
实施例2Example 2
本实施例提供一种大长径比的光纤探针组装方法，如图1所以，包括以下步骤：This embodiment provides a method for assembling an optical fiber probe with a large aspect ratio, as shown in Figure 1, including the following steps:
(1)将镀有80nm厚的金膜层的锥形光纤探针2固定在石英音叉谐振传感器4针脚侧壁上，利用纳米操作机械手夹持石英音叉另一针脚，其中，锥形光纤探针2探针锥角为30°、锥尖直径为50nm；(1) Fix the tapered fiber optic probe 2 plated with an 80nm thick gold film layer on the side wall of the 4 pins of the quartz tuning fork resonant sensor, and use the nano-manipulator to clamp the other pin of the quartz tuning fork, wherein the tapered fiber optic probe 2 The probe cone angle is 30°, and the cone tip diameter is 50nm;
(2)将分散的碳纳米管5放置于载玻片6上，利用导电胶将载玻片6固定到金属载物台7上；(2) The dispersed carbon nanotubes 5 are placed on the glass slide 6, and the glass slide 6 is fixed on the metal stage 7 with conductive glue;
(3)将纳米操作机械手3和金属载物台7放置于扫描电子显微镜真空腔室1内，在电子显微镜下首先找到直径为10nm，长度>100nm的碳纳米管5，然后控制纳米操作机械手3，使石英音叉上的光纤探针2接近并吸附载物台7上的碳纳米管5；(3) Place the nanomanipulator 3 and the metal stage 7 in the vacuum chamber 1 of the scanning electron microscope, first find a carbon nanotube 5 with a diameter of 10nm and a length > 100nm under the electron microscope, and then control the nanomanipulator 3 , making the fiber optic probe 2 on the quartz tuning fork approach and adsorb the carbon nanotube 5 on the stage 7;
(4)利用电子束8诱导沉积金材料9，将碳纳米管5固定在光纤探针2尖端位置；(4) Utilize the electron beam 8 to induce the deposition of gold material 9, and fix the carbon nanotube 5 at the tip position of the optical fiber probe 2;
(5)利用聚焦离子束加工对位于光纤探针针尖位置的碳纳米管进行修饰加工，得到长径比10：1的光纤探针。(5) Using focused ion beam processing to modify the carbon nanotubes at the tip of the fiber probe to obtain a fiber probe with an aspect ratio of 10:1.
由上述可以看出，本发明基于纳米操作机械手的大长径比光纤探针组装方法：(1)制备过程中无需破坏光纤探针表面质量，能够得到光滑的光纤探针表面用于导光进行光学信息测量；(2)能够实时监控组装过程，精确控制光纤探针和一维纳米材料的组装位置。本发明的大长径比光纤探针组装方法能够得到探针表面光滑的大长径比光纤探针，满足大深宽比微纳功能结构的形状、性质等多重信息测量要求。As can be seen from the above, the present invention is based on a nano-manipulator-based method for assembling an optical fiber probe with a large aspect ratio: (1) There is no need to destroy the surface quality of the optical fiber probe during the preparation process, and a smooth surface of the optical fiber probe can be obtained for light guiding. Optical information measurement; (2) It can monitor the assembly process in real time and precisely control the assembly position of the fiber probe and the one-dimensional nanomaterial. The large aspect ratio optical fiber probe assembly method of the present invention can obtain a large aspect ratio optical fiber probe with a smooth probe surface, which meets the multiple information measurement requirements such as the shape and properties of the micro-nano functional structure with a large aspect ratio.
Claims (10)
- 一种光纤探针，其特征在于，包括锥形光纤探针(2)和一维纳米材料，一维纳米材料的一端通过金属层与锥形光纤探针(2)的尖端连接，锥形光纤探针(2)和一维纳米材料同轴；A kind of optical fiber probe, it is characterized in that, comprises tapered optical fiber probe (2) and one-dimensional nanomaterial, one end of one-dimensional nanomaterial is connected with the tip of tapered optical fiber probe (2) by metal layer, tapered optical fiber The probe (2) is coaxial with the one-dimensional nanomaterial;所述一维纳米材料采用纳米线或纳米管，长径比≥10：1。The one-dimensional nanomaterials are nanowires or nanotubes with an aspect ratio ≥ 10:1.
- 根据权利要求1所述的一种光纤探针，其特征在于，锥形光纤探针(2)表面镀有金属膜层，金属膜层材料为金、银或铝，厚度为10nm～150nm。The optical fiber probe according to claim 1, characterized in that the surface of the tapered optical fiber probe (2) is coated with a metal film layer, the material of the metal film layer is gold, silver or aluminum, and the thickness is 10nm-150nm.
- 根据权利要求1所述的一种光纤探针，其特征在于，锥形光纤探针(2)形状为锥体，锥体角为10°～80°，锥体针尖直径为5nm～200nm。The optical fiber probe according to claim 1, characterized in that the tapered optical fiber probe (2) is in the shape of a cone, the angle of the cone is 10°-80°, and the diameter of the tip of the cone is 5nm-200nm.
- 根据权利要求1所述的一种光纤探针，其特征在于，所述一维纳米材料直径为5nm～200nm，长度为50nm～2μm，尖端直径不大于10nm。The optical fiber probe according to claim 1, characterized in that, the one-dimensional nanomaterial has a diameter of 5 nm to 200 nm, a length of 50 nm to 2 μm, and a tip diameter of not more than 10 nm.
- 根据权利要求1所述的一种光纤探针，其特征在于，所述金属层材料为金、银或铝。An optical fiber probe according to claim 1, characterized in that the material of the metal layer is gold, silver or aluminum.
- 一种光纤探针的组装方法，其特征在于，包括如下过程：A method for assembling an optical fiber probe, characterized in that it comprises the following processes:将锥形光纤探针(2)的尖端和一维纳米材料的一端接触，锥形光纤探针(2)和一维纳米材料同轴，所述一维纳米材料采用纳米线或纳米管；Contacting the tip of the tapered fiber optic probe (2) with one end of the one-dimensional nanomaterial, the tapered fiber optic probe (2) and the one-dimensional nanomaterial are coaxial, and the one-dimensional nanomaterial adopts nanowires or nanotubes;在锥形光纤探针(2)和一维纳米材料的接触部位，利用电子束沉积的方法诱导沉积一层金属，沉积的金属层将一维纳米材料固定在锥形光纤探针(2)的尖端位置；At the contact portion between the tapered fiber probe (2) and the one-dimensional nanomaterial, a layer of metal is induced to be deposited by electron beam deposition, and the deposited metal layer fixes the one-dimensional nanomaterial on the tapered fiber probe (2) tip position;对一维纳米材料利用微纳加工方法进行修饰加工，使一维纳米材料的长径比不小于10:1，得到所述光纤探针。The one-dimensional nanomaterial is modified and processed by a micro-nano processing method, so that the aspect ratio of the one-dimensional nanomaterial is not less than 10:1, and the optical fiber probe is obtained.
- 根据权利要求6所述的一种光纤探针的组装方法，其特征在于，将锥形光纤探针(2)的尖端和一维纳米材料的一端接触的过程包括：A method for assembling an optical fiber probe according to claim 6, wherein the process of contacting the tip of the tapered optical fiber probe (2) with one end of the one-dimensional nanomaterial comprises:将锥形光纤探针(2)固定在纳米操作机械手上；Fixing the tapered fiber optic probe (2) on the nano manipulator;将一维纳米材料放置于载玻片上，所述载玻片利用导电胶固定在金属载物台上；Place the one-dimensional nanomaterial on a glass slide, and the glass slide is fixed on a metal stage with conductive glue;将纳米操作机械手和金属载物台放置于扫描电子显微镜真空腔室内，在电子显微镜观察下 控制纳米操作机械手，使锥形光纤探针(2)接近并吸附载玻片上的一维纳米材料的一端，实现锥形光纤探针(2)的尖端和一维纳米材料的一端接触。Place the nano-manipulator and the metal stage in the vacuum chamber of the scanning electron microscope, and control the nano-manipulator under the observation of the electron microscope, so that the tapered fiber probe (2) approaches and adsorbs one end of the one-dimensional nanomaterial on the glass slide , realizing the contact between the tip of the tapered fiber optic probe (2) and one end of the one-dimensional nanomaterial.
- 根据权利要求6所述的一种光纤探针的组装方法，其特征在于，对一维纳米材料利用微纳加工方法进行修饰加工时，将一维纳米材料的尖端直径加工为不大于10nm，得到最终的光纤探针，其中所述微纳加工方法包括聚焦离子束加工方法或激光加工方法。A method for assembling an optical fiber probe according to claim 6, wherein, when the one-dimensional nanomaterial is modified and processed by a micro-nano processing method, the diameter of the tip of the one-dimensional nanomaterial is processed to be no greater than 10nm, to obtain The final optical fiber probe, wherein the micro-nano processing method includes a focused ion beam processing method or a laser processing method.
- 根据权利要求6所述的一种光纤探针的组装方法，其特征在于，电子束沉积金属材料包括金、银或铝。The method for assembling an optical fiber probe according to claim 6, wherein the electron beam deposited metal material includes gold, silver or aluminum.
- 根据权利要求6所述的一种光纤探针的组装方法，其特征在于，所述锥形光纤探针(2)为表面镀有金属膜层的锥形光纤探针；所述金属膜层材料为金、银或铝，厚度为10nm～150nm。The method for assembling an optical fiber probe according to claim 6, wherein the tapered optical fiber probe (2) is a tapered optical fiber probe whose surface is coated with a metal film layer; the metal film layer material It is gold, silver or aluminum, with a thickness of 10nm to 150nm.
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