WO2022230004A1 - Burner head device - Google Patents

Burner head device Download PDF

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Publication number
WO2022230004A1
WO2022230004A1 PCT/JP2021/016578 JP2021016578W WO2022230004A1 WO 2022230004 A1 WO2022230004 A1 WO 2022230004A1 JP 2021016578 W JP2021016578 W JP 2021016578W WO 2022230004 A1 WO2022230004 A1 WO 2022230004A1
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WO
WIPO (PCT)
Prior art keywords
gas
burner head
buffer chamber
large number
buffer
Prior art date
Application number
PCT/JP2021/016578
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French (fr)
Japanese (ja)
Inventor
靖之 池田
隆己 西嶋
Original Assignee
株式会社旭製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 株式会社旭製作所 filed Critical 株式会社旭製作所
Priority to PCT/JP2021/016578 priority Critical patent/WO2022230004A1/en
Priority to JP2021537090A priority patent/JP7030299B1/en
Publication of WO2022230004A1 publication Critical patent/WO2022230004A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
    • F23D14/22—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other

Definitions

  • the present invention relates to a burner that mixes gaseous fuel, liquid mist fuel, etc. with an appropriate amount of air and burns it, and in particular to a burner head device that is used for the manufacture and processing of glass products.
  • a burner is a combustion device that is widely used, from household cooking utensils such as stoves to industrial furnaces for maintaining the quality of materials.
  • household cooking utensils such as stoves
  • industrial furnaces for maintaining the quality of materials.
  • the demand for burners for processing materials for semiconductor processes, scientific research and development supplies, clean rooms, experimental and research equipment, etc. has grown significantly.
  • quartz burners for processing glass products is being actively developed.
  • Patent Document 1 the device of Patent Document 1 is known as a quartz glass burner.
  • the quartz glass burner of Patent Document 1 is made of quartz glass by forming a plurality of flow passages for gas that penetrate from the back side to the front side in an integral quartz glass rod, and using these as passages for combustion-supporting gas and fuel gas.
  • a burner head is provided, and the ends of quartz glass tubes for gas supply are welded to the rear edge of each passage as gas introduction pipes.
  • the present invention has been made in view of the above-mentioned problems of the prior art, and one of its objectives is to provide a relatively simple manufacturing process, maintain good product precision, and enable manufacturing while keeping costs low.
  • a burner head device Another object of the present invention is to provide a burner head device which can set a wide working area by a burner flame and can be a burner corresponding to an arbitrary working area shape.
  • the present invention provides a burner head 8 made of a block body having a gas jetting surface 1F, in which a large number of gas passages 31, 41 are formed.
  • the burner head 8 for ejecting the combustion gas 1G and the combustible gas 2G from the ejection surface 1F provided with a large number of communicating gas ejection ports 21b and 22b, and the portion (XF) of the burner head 8 other than the ejection surface 1F.
  • a first inlet group 11a including a large number of gas inlets for supplying combustion gas, and a large number of gas inlets for supplying combustible gas provided in the portion XF of the burner head 8 other than the ejection surface.
  • a first buffer chamber 15 having a space shared by a second inlet group (12a-1 to 12a-4), a large number of gas inlets for supplying combustion gas, and a large number of gases for supplying combustible gas.
  • a second buffer chamber 16 having a space shared with the mouth.
  • the present invention is a burner head made of a block body having a front surface 1F, a side surface and a rear surface, and having a large number of gas passages 31 and 41 formed therein and a large number of gas ejection ports communicating with the large number of gas passages. (21b, 22b-1 to 22b-4) for ejecting the combustion gas 1G and the combustible gas 2G from the front surface 1F, and a large number of gas inlets (11a) provided on the rear surface 2F of the burner head 8. , a large number of gas introduction ports (12a-1 to 12a-4) provided on the side surfaces 3F-1 to 3F-4 of the burner head 8, and a large number of gas introduction ports (11a) on the rear surface 2F side. and a second buffer chamber 16 having a space 16S shared with many gas introduction ports 12a-1 to 12a-4 on the sides 3F-1 to 3F-4.
  • the burner head unit 10 includes:
  • a buffer frame 60 is provided in which the first buffer chamber 15 and the second buffer chamber 16 are formed by frame walls, the burner head 8 and the buffer frame 60 are made of quartz glass, and at least the first buffer chamber is The buffer frame 60 is integrally joined to the burner head 8 so that the chamber 15 and the second buffer chamber 16 communicate with the numerous gas introduction ports 11a, 12a-1 to 12a-4 of the burner head 8, respectively. I hope it is.
  • first buffer chamber 15 and the second buffer chamber 16 are separated by a partition wall 90 so that the chambers do not communicate with each other, and are integrally joined with the burner head 8 so as to enclose the burner head 8 inside. Good.
  • the burner head 8 may have a jetting surface whose front surface 1F is long in one direction.
  • the burner head 8 includes a first gas passage group 31a communicating with the gas introduction port (11a) on the side of the rear surface 2F and directly communicating with several gas ejection ports on the side of the front surface 1F, and side surfaces 3F-1 to 3F- a second gas passage group 41a that communicates with the gas introduction ports 12a-1 to 12a-4 on the 4 side and communicates with several gas ejection ports on the front face 1F side.
  • the second gas passage group 41a includes direct and/or curved gas passages communicating from the side gas introduction ports 12a-1 to 12a-4 of the burner head 8 to the front gas ejection ports 12b-1 to 12b-4. (41a) may be included.
  • Combustion gas 1G is introduced from the first buffer chamber 15, passes through the burner head 8, and is ejected from the front surface of the burner head 8.
  • the gas ejected from is preferably combustible gas 2G.
  • the burner head and the first and second chambers are basically welded together to form the device.
  • the burner head and the first and second chambers can be obtained.
  • FIG. 1A is a cross-sectional view along the line of FIG. 1A-A' showing only the portion other than the burner head of the burner head device of FIG. 3; It is the figure which showed only parts other than a burner head seeing from the bottom face of the burner head apparatus of FIG. 3 by hatching.
  • FIG. 1A is a cross-sectional view along the line of FIG. 1A-A' showing only the portion other than the burner head of the burner head device of FIG. 3; It is the figure which showed only parts other than a burner head seeing from the bottom face of the burner head apparatus of FIG. 3 by hatching.
  • FIG. 4 is a rear view of only the burner head of the burner head device of FIG. 3;
  • FIG. 4 is a perspective explanatory view of the burner head of FIG. 3;
  • FIG. 4 is a perspective explanatory view of the burner head of FIG. 3;
  • (a) is a cross-sectional view along line 7A in FIG. 8
  • (b) is a cross-sectional view along line 7B in FIG. 8
  • (c) is a cross-sectional view along line 7C in FIG. 4(a) and 4(b) are operation explanatory diagrams of the burner head device of FIG. 3.
  • FIG. 4 is a rear view of only the burner head of the burner head device of FIG. 3;
  • FIG. 4 is a perspective explanatory view of the burner head of FIG. 3;
  • FIG. 4 is a perspective explanatory view of the burner head of FIG. 3;
  • (a) is a cross-sectional view along line 7A in FIG. 8
  • (b) is a cross-
  • the burner head device of the present invention is a device for flame processing various articles and objects by flames generated by using gas or combustion fluid, and is used, for example, for physicochemical applications such as beakers and flasks, and for the manufacture of optical fiber manufacturing parts. .
  • FIGS. 1(a) and 1(b) are explanatory diagrams of the principle configuration of the present invention.
  • the burner head device of the present invention is constructed from metallic or non-metallic inorganic materials. Since the burner is equipment for flame processing, materials having heat resistance and corrosion resistance are preferably used. Among them, glass, refractories, fine ceramics, etc., which are non-metallic inorganic materials, are advantageously used. In principle, quartz glass, which is excellent in heat resistance, corrosion resistance and transparency, is particularly advantageously used. A wide flame machining area or arbitrary range of flame machining area is formed by using a gas injection nozzle processed from these materials to improve the efficiency of the flame machining work and the machining accuracy.
  • one surface of a burner head 8 made of, for example, quartz glass is a gas ejection surface 1F. 1 to 22b-4 are provided. Introducer groups 11a, 12a-1 to 12a-4 for supplying combustion gas and combustible gas are provided on the surface portion other than the ejection surface 1F, and each introduction port and each ejection port of the ejection surface 1F are one. Passages 31 and 41 for gas flow are provided inside the burner head 8 so as to communicate in pairs. Furthermore, at least two buffer chambers 15 and 16 are provided by bonding a buffer frame 60 to the surface of the burner head 8 so as to hermetically close the space adjacent to each inlet for supplying combustion gas.
  • One buffer chamber 15 is for temporary storage of combustion gas such as oxygen gas
  • the other buffer chamber 16 is for storage of combustible gas such as hydrogen gas.
  • the gas supplied from the supply pipe or the like is temporarily stored in each buffer chamber, enters the gas passages 31 and 41 through the introduction ports at substantially the same time, flows through the gas passages 31, 41, and is ejected from the ejection surface 1F. performs flame machining on the workpiece in the flame area in contact with .
  • By changing and adjusting the outer shape, size, etc. of the burner head to change the arrangement shape, spread, etc. of the group of many gas ejection ports, it is possible to freely generate a flame machining area.
  • the burner head 8 is a solid block body having a gas ejection surface 1F, and a large number of gas passages 31 and 41 are formed therein and a large number of gas passages 31 and 41 are formed therein.
  • a first inlet group 11a including a large number of gas inlets for supplying combustion gas provided in the portion (XF), and a large number for supplying combustible gas provided in a portion XF of the burner head 8 other than the ejection surface
  • a second inlet group (12a-1 to 12a-4) including gas inlets, a first buffer chamber 15 having a space shared with many gas inlets for supplying combustion gas, and combustible gas supply and a second buffer chamber 16 having a space shared with a number of gas inlets for gas.
  • the multiple gas passages within the burner head may be routed in any manner so long as the combustible and combustible gases do not come into contact.
  • the arrangement and the number of gas inlets and jet outlets can be arbitrarily set as long as the combustible and combustible gases do not come into contact with each other.
  • the buffer chamber disposed on the peripheral side of the burner head 8 may be provided only partially in the circumferential direction. It may be introduced and ejected from the ejection surface.
  • the shape of the burner head 8 may be a quadrangular prism, a cylinder, other three-dimensional polygons, and irregular shapes as long as the shape has one ejection surface (1F).
  • a block body having a three-dimensional shape or other arbitrary shape can be used.
  • the arrangement, number, and diameter of the holes in the ejection port of the ejection surface, and the arrangement, number, and diameter of the holes in the introduction port can be set arbitrarily.
  • Three or more buffer chambers may be provided.
  • the buffer chamber may be integrally joined around the burner head so as to cover the entire burner head inside, or only a part of the burner head may be used to form the burner head and the buffer chamber depending on the installation position of the inlet. 1 may be used, in which the buffer frame is joined. Also, the gas supply pipe may be made of a heat-resistant flexible tube or the like instead of quartz glass.
  • the burner head device of this embodiment is composed of a gas burner head device made of quartz (SiO2), which is excellent in corrosion resistance, heat resistance, and transparency.
  • FIG. 3 is a front view of a burner head device 10 according to an embodiment of the present invention
  • FIG. 4 is a sectional view taken along the line of FIG.
  • the apparatus 10 is configured by connecting supply pipes for the combustion gas and the combustible gas to a burner head 8 that blows out the combustion gas 1G and the combustible gas 2G from the front surface 1F.
  • the burner head device 10 includes a burner head 8 for ejecting a combustion gas 1G and a combustible gas 2G from a front surface 1F, and a gas inlet having a large number of gas inlets provided in the burner head 8.
  • Groups 11a, 12a-1, 12a-2, 12-a3, 12a-4, a first buffer chamber 15 and a second buffer chamber 16 are included.
  • the gas introduction port groups 11a, 12a-1, 12a-2, 12-a3, 12a-4 include a large number of gas introduction ports (hereinafter, not shown) 11a1, 11a2, 11a3 . . . , 12a-11, 12a-12, 12a-13. . .
  • the burner head 8 is composed of a three-dimensional block body having at least a front surface 1F and a rear surface 2F. A deformed three-dimensional shape or an irregular three-dimensional shape may be used.
  • the burner head 8 has a large number of gas passages (31, 41) inside it, and particularly in this embodiment, the gas passages are directly penetrated by an oblong cuboid-shaped block made of an integral mass made of quartz by ultrasonic machining or the like. A hole is drilled to form a passageway. Further, the burner head 8 is provided with gas ejection port groups 21b, 22b-1, 22b-2, 22b-3, and 22b-4 including a plurality or a large number of gas ejection ports on the front surface 1F.
  • the burner head 8 is a hexahedral three-dimensional quartz integral block mainly shown in FIG. , 3F-4.
  • all the small diameter holes are for the oxygen gas 1G, and all the large diameter holes are for the hydrogen gas 2G.
  • gas ejection port groups 21b, 22b-1, 22b-2, 22b-3, and 22-b4 including a large number of gas ejection ports are provided only on the front surface 1F, and the front surface 1F is the gas ejection surface. It is said that it is also possible to make the gas blow out from the side surface or other parts without providing the blowout port only on the front surface.
  • the burner head 8 has a front surface 1F formed as an ejection surface elongated in one direction. In addition, it is not necessary to provide the gas ejection ports on the entire front face 1F, and they may be unevenly distributed only on a part of the whole, or may be scattered on the whole.
  • the gas introduction port group 11a on the rear surface 2F has, for example, 7 vertical (columns) by 33 (rows) horizontal gas introduction ports with a diameter of 0.6 mm. perforated with In the embodiment, only oxygen (O2) as combustion gas is supplied to the gas introduction port on the rear surface 2F.
  • gas introduction ports are also provided on the four side surfaces (the plane, bottom surface, and left and right side surfaces of the burner head 8 in FIG. 3) as the peripheral surface of the burner head 8. is provided.
  • the plane and the bottom surface ie, the upper and lower side surfaces of FIG.
  • An opposing second side surface 3F-3 is provided.
  • a laterally elongated side gas inlet group 12a-1 including 65 gas inlets arranged in a row in the laterally elongated direction at substantially the central position of the short side width of each of the side faces 3F-1 and 3F-3, and a laterally elongated opposite side gas inlet group 12a-1.
  • a mouth group 12a-2 is formed.
  • the width is the same as the width of the short side of the oblong side 3F-1, 3F-3, respectively.
  • Five gas inlets 12-a3 and 12a-4 are perforated.
  • the gas introduction ports on the side surfaces are provided at substantially central positions of the widths of the short sides so as to encircle the peripheral side surfaces of the rectangular parallelepiped burner head.
  • the introduction ports of the introduction port groups 12a-1, 12a-2, 12a-3, and 12a-4 provided on the four side surfaces 3F-1, 3F-2, 3F-3, and 3F-4 of the burner head 8 are, for example,
  • the aperture is set to 1 mm, and in the embodiment, hydrogen (H2) as a combustible gas is supplied to each inlet of these inlet groups.
  • H2 hydrogen
  • the gas passages through which oxygen gas flows form a first gas passage group 31a.
  • the oxygen gas passage 31 has one end communicating with each gas introduction port of the gas introduction port group 11a on the back surface 2F and the other end communicating with the gas introduction port group 21b on the front surface 1F.
  • These are internal passages that respectively communicate with the ports, and in the embodiment, each is provided as a hole having a diameter of 0.6 mm and linearly penetrating from the back side to the front side.
  • the gas passage 31 directs the oxygen gas O2 for combustion supplied to the burner head 8 from the gas introduction port (11a) to the workpiece from the ejection port (21b) on the front surface of the burner head 8. erupt.
  • gas introduction ports 12a-1, 12a- provided in the side surfaces 3F-1, 3F-2, 3F-3, 3F-4 2, 12a-3, 12a-4 and gas ejection ports 22b-1, 22b-2, 22b-3, 22-b4 provided on the front surface 1F.
  • hydrogen H2 is introduced from the side surface of the head and ejected from the front ejection surface.
  • a large number of gas passages for flowing hydrogen gas form a second gas passage group 41a.
  • the gas ejection ports on the front face 1F of the burner head 8 include an oxygen gas ejection port 21b for combustion gas and hydrogen gas ejection ports 22b-1 to 22b- for combustible gas. including 4.
  • the small-diameter hole is the oxygen gas ejection port 21b
  • the large-diameter holes are set to the hydrogen gas ejection ports 22b-1 to 22b-4.
  • the small-diameter hole 21b and the large-diameter holes 22b-1 to 22b-4 are alternately arranged vertically and horizontally so that holes with different diameters are arranged around each hole. For example, in FIG.
  • a group of gas ejection ports (22b-3) of five large-diameter gas ejection port groups (22b-3) are provided vertically at required intervals. It is Seven small-diameter holes 21b for ejecting oxygen are provided in a row on the left adjacent to it with a required interval in the center, and one large-diameter hole for ejecting hydrogen is provided at each end. A hole mouth (22b-1) is arranged.
  • This mixed jet hole group x consisting of a group of oxygen jet holes as small-diameter holes arranged vertically in a row and one hydrogen jet hole at each end, and five holes arranged vertically next to it.
  • the center interval between the large-diameter holes of the hydrogen ejection port group y arranged in a row of five vertically is, for example, 2.25 mm
  • the center interval of the small-diameter holes of the mixed ejection port group y is, for example, 1.5 mm. is set.
  • the arrangement of the large-diameter openings and the small-diameter openings, the hole diameters, and the intervals between the openings can be set arbitrarily.
  • the hydrogen gas passage 41 is formed as an L-shaped passage that connects the introduction port and the ejection port in an L-shape.
  • the second gas passage group 41a includes direct and/or curved gas passages communicating from the side gas introduction ports 12a-1 to 12a-4 of the burner head 8 to the front gas ejection ports 22b-1 to 22b-4. including. Thereby, a passage can be specifically provided from the peripheral side of the burner head to the ejection side of the front face.
  • the apertures 22b-1 to 22b-4 are arranged in a row at intervals in the width direction center positions of the oblong first side surface 3F-1 and the oblong opposing second side surface 3F-3, respectively. It is L-shaped connected to 33 hydrogen gas inlets out of the hydrogen gas inlets 13a-1 to 13a-65.
  • the remaining 32 of the 65 horizontal hydrogen gas introduction ports provided in a line at intervals in the width direction center position of the oblong first side surface 3F-1 and the oblong opposite second side surface 3F-3 is connected to any one of the large-diameter holes 22b-1 to 22b-4 as hydrogen gas ejection ports on the front surface 1F in L-shaped communication.
  • the 65 rows of large-diameter holes provided on the horizontally long first and second side faces 3F-1 and 3F-3 alternately form a row of 5 large-diameter holes on the front face 1F, which is a hydrogen ejection port group y. , are provided so as to communicate with the mixing jet hole group x.
  • seven oxygen gas passages 31 are arranged at intervals in the center of the mixing jet port group x, and from the side surfaces 3F-1 and 3F-2 at both ends thereof, L-shaped passages 41 for supplying hydrogen gas and ejecting hydrogen from the hydrogen gas ejection ports (22b-1, 22b-2) on the front surface 1F are provided at symmetrical positions.
  • L-shaped passages 41 for supplying hydrogen gas and ejecting hydrogen from the hydrogen gas ejection ports (22b-1, 22b-2) on the front surface 1F are provided at symmetrical positions.
  • oxygen gas 1G and hydrogen gas 2G are simultaneously jetted from the front surface 1F.
  • FIG. 9(b) seven oxygen gas passages 31 are arranged at intervals in the center of the mixing jet port group x, and from the side surfaces 3F-1 and 3F-2 at both ends thereof, L-shaped passages 41 for supplying hydrogen gas and ejecting hydrogen from the hydrogen gas ejection ports (22b-1, 22b-2) on the front surface 1F are provided at
  • the hydrogen gas passage 41 in the line of the hydrogen ejection port group y, includes the gas ejection port 22b-1 of the side oblong introduction port and the gas ejection port 22b-1 of the opposite side oblong introduction port.
  • a through hole 51 is provided so as to penetrate from one side to the other side so as to communicate with the port 22b-2 in a straight line, and five ejection ports 22b-1 and 22b are provided in a row on the front surface 1F. -2 and a branch passage 52 that connects the through passage 51 at right angles.
  • the gases introduced from the hydrogen gas inlets 12a-1 and 12a-2 connected thereto flow mutually in the direction of both directly connected side faces, and the through holes From 51, it passes through branch passages 52 and is divided into five ejection ports on the front surface 1F and ejected.
  • the burner head device 10 of the embodiment comprises a burner head 8, a buffer frame 60 integrated with the burner head while exposing the ejection surface of the burner head, and a buffer frame 60. and a gas supply pipe 80 for supplying combustion and combustible gases to the gas inlet group of the burner head 8 via the gas supply pipe 80 .
  • the buffer frame 60 is formed by processing quartz glass to have a horizontally elongated rectangular three-dimensional shape with a hollow interior.
  • the buffer frame 60 is made of, for example, a horizontally elongated rectangular three-dimensional glass molded body with a thickness of about several millimeters, and surrounds the burner head 8 so as to wrap the burner head 8 inside. It is integrated by joining a part of The buffer frame 60 has an airtight frame wall molded to form the hollow buffer chambers 15, 16 therein, and in this embodiment, the burner head 8 extends over more than half of the burner head 8 profile. are joined to the burner head 8 in such a manner that buffer chambers 15 and 16 are formed between them and the outer peripheral surface of the burner head 8 .
  • the buffer frame 60 includes a large number of rear gas introduction port groups 11a arranged vertically and horizontally on the rear surface 2F (FIG. 6) of the burner head 8.
  • the first buffer chamber 15 is formed so as to cover the gas introduction port of the first buffer chamber 15 with a first frame wall 60-1 with a space 15S provided therebetween.
  • the first buffer chamber 15 is oxygen gas buffering means for receiving and temporarily storing only oxygen gas as combustion gas supplied from the gas supply pipe 80, and temporarily storing the gas supplied from the gas supply pipe 80. Oxygen gas is supplied to each gas introduction port of the gas introduction port group 11a of the burner head 8 substantially at the same time.
  • a first frame wall of the buffer frame 60 forms a first buffer space 15S as a hollow portion inside, and an end of the frame wall is annularly hermetically welded to the peripheral wall portion of the burner head to communicate with the oxygen gas supply pipe 80.
  • the space 15S other than the portion is airtightly closed.
  • the first buffer chamber 15 has a buffer space 15S that communicates with each of a number of gas introduction ports (11a) provided on the back surface 2F of the burner head 8. Therefore, the back surface 2F of the burner head 8 All of the large number of gas inlets (11a) share the space 15S and each communicates with the space 15S.
  • the oxygen gas supply pipe 80 has a straight main pipe portion 85 and branch pipes 87, 87 which branch into two and extend through a connecting portion 86.
  • the ends of the respective branch pipes 87 are connected to each other through openings 88 formed in the first buffer chamber 15 of the buffer frame 60, thereby allowing oxygen gas to flow into the buffer provided on the rear surface 2F side of the burner head 8. It is supplied into the first buffer chamber 15 from the first frame wall 60-1 of the frame.
  • the oxygen gas supply pipe 80 supports the back side of the burner head 8 by joining to the buffer frame 60 forming the first buffer chamber 15 by joining to the back of the burner head 8 .
  • the buffer frame 60 has a side gas introduction port 12a-1 provided so as to circulate holes in the peripheral wall surfaces 3F-1 to 3F-4 of the burner head 8. 12a-4 are covered with a second frame wall 60-2 with a space 16S therebetween to form a second buffer chamber 16. As shown in FIG.
  • the second buffer chamber 16 is hydrogen gas buffering means for receiving and temporarily storing only hydrogen gas as a combustible gas supplied from the gas supply pipe 70 . is temporarily stored, and hydrogen gas is supplied to each of the gas introduction port groups 12a-1 to 12a-4 of the burner head 8 at substantially the same time.
  • the second buffer chamber 16 is in contact with the peripheral side of the burner head 8 by a frame wall 60-2 having a larger outer shape than the burner head 8 with the second buffer chamber 16 interposed therebetween. It is provided to surround the space like a bag. It should be noted that which of the combustible or combustible gases 1G, 2G is supplied to which of the buffer chambers 15, 16 is not limited, and can be arbitrarily changed according to various conditions and specifications.
  • the second buffer chamber 16 has a space 16S that communicates with the entire peripheral side surface of the burner head 8, and is therefore formed in a row at an intermediate position in the width direction of the short side of the peripheral side surface of the burner head 8. All of the side gas introduction ports 12a-1 to 12a-4 share the space 16S and communicate with the space 16S.
  • the hydrogen gas supply pipe 70 has a straight pipe-like main pipe portion 75 and branch pipes 77, 77 which branch into two and extend through a connecting portion 76. , the ends of the respective branch pipes 77 are connected to openings 78 provided in the second buffer chamber 16 of the buffer frame 60, whereby the hydrogen gas supply pipe 70 and the second buffer chamber 16 are connected and connected. As a result, hydrogen gas is supplied into the second buffer chamber 16 from two locations on the laterally elongated peripheral wall of the buffer frame.
  • the first buffer chamber 15 and the second buffer chamber 16 are air-tightly integrally joined to the burner head 8, and different gases are supplied to the burner head 8 from the respective buffer chambers.
  • the gas is introduced into the gas inlets (11a, 12a-1 to 12a-4).
  • the chambers of the first buffer chamber 15 and the second buffer chamber 16 are fused and joined to each other without communicating with each other. That is, in the embodiment, the first and second frame walls 60-1 and 60-2 that define the first buffer chamber 15 and the second buffer chamber 16 are melt-joined to each other with the partition wall 90 provided between them. It is As a result, the entire buffer frame 60 and the burner head 8 are physically integrated to maintain strength.
  • the main pipe portions 75, 85 of the hydrogen and oxygen gas supply pipes 70, 80 are converged so as to be arranged parallel to each other, and the grip pipes and the respective grip pipes are connected at the grip portion 92.
  • the gas supply pipes are connected to each other, and the flame processing is performed while the grip portion 92 is gripped by the chuck of the processing actuator.
  • Oxygen gas enters the first buffer chamber 15 which is airtightly joined to the rear surface 2F of the burner head 8 from the oxygen gas supply pipe 80, and flows straight through the oxygen gas passage 31 from each gas introduction port of the rear gas introduction port group 11a. , and is jetted forward from the front face of the burner head from each jetting port of the gas jetting port group 21b on the front face 1F.
  • the ejected oxygen gas is ejected so as to form a horizontally long rectangular ejection area and an ejection destination area as shown in FIGS.
  • the hydrogen gas enters from the hydrogen gas supply pipe 70 into the second buffer chamber 16 of the second frame wall 60-2 of the buffer frame 60 surrounding the peripheral side of the burner head 8, and further into the side gas inlet group 12a. -1 to 12a-4 through the hydrogen gas passage 41 and through the gas ejection port groups 21b and 22b-1 to 22b-4 on the front face 1F of the burner head 8. blow out gas.
  • part of the hydrogen gas enters from the side surfaces 3F-1 to 3F-4 of the burner head 8 as shown in FIGS. erupt.
  • part of the other hydrogen gas enters through the through hole 51 and passes through the branch passages 52 that are branched into five L-shaped passages while communicating with the through hole 51.
  • the combustion gas 1G is introduced from the first buffer chamber 15 and flows straight through the burner head 8 and is ejected from the front surface thereof.
  • the gas ejected from the front is combustible gas 2G, so that the combustible gas and combustible gas are completely cut off so that they do not come into contact with each other, and the flow route is made different for each type of gas to facilitate management and maintenance. be able to.
  • the ejection port group 21b, 22b-1 to 22b4 on the front face 1F of the burner head 8 is formed with ports concentrated in a substantially laterally long rectangular shape according to the shape of the solid body of the burner head 8.
  • Combustion gas and combustible gas form a wide rectangular flame processing area at the same time, ensuring a wide processing area to shorten processing time, perform flame processing according to the desired processing shape, and ensure processing accuracy. can do.
  • the burner head device 10 of the present invention is not limited to the configuration of the embodiment described above.
  • the diameter size of the gas introduction holes on the back and peripheral side surfaces and the diameter size of the gas ejection port holes on the front surface are not limited to the sizes in the embodiments, and are arbitrary according to the flow velocity on the gas supply side and other conditions. size can be set.
  • the arrangement of the holes and the number of holes on the front surface and the peripheral side surface are not limited to those of the embodiment.
  • the arrangement configuration of the gas passages inside the burner head 8 and the L-shaped and other route configurations are not limited to those of the embodiment.
  • the bending configuration may be shallower than 90 degrees or even deeper.
  • first buffer chamber 15 and the second buffer chamber 16 do not necessarily have to be connected.
  • first and second frame wall bodies 60-1 and 60-2 of the buffer frame 60 are cut off and the second buffer chambers 16 are individually separated from many of the gas introduction port groups 12a-1 to 12a-4 on the circumferential side.
  • the second frame wall is connected and joined to the burner head 8 so that the space is shared by the gas inlets of the first buffer chamber 15, and the space is shared by the many gas inlets of the gas inlet group 11a on the rear side.
  • the first frame wall may be connected and joined to the burner head 8 as in the case of FIG.
  • the constituent material of the burner head is not limited to quartz glass, but other glass, refractories, non-metallic inorganic materials such as fine ceramics, metals having heat resistance and corrosion resistance, alloy materials, etc. may be used. can.
  • the burner head device 10 realized in the example according to the above embodiment is a block-shaped burner head 8 having a gas ejection surface 1F, in which a large number of gas passages 31, 41 are formed and a large number of gas passages 31, 41 are formed.
  • a second inlet group (12a-1 to 12a-4) including inlets, a first buffer chamber 15 having a space shared with many gas inlets for supplying combustion gas, and many for supplying combustible gas.
  • a second buffer chamber 16 having a space shared with the gas introduction port, the outer shape, size, etc. of the burner head can be changed and adjusted, and the arrangement shape and spread of the group of many gas ejection ports can be changed.
  • the parameters, etc. it is possible to generate a free flame processing area. For example, it is possible to cope with the case of wanting to make it horizontally long or the case of wanting to obtain a wide processing area. As a result, the range of objects to be flame processed is widened, and the field of processing and processing accuracy can be greatly improved.
  • the burner head is a block body having a front surface, a side surface, and a back surface, and has a large number of gas passages formed therein and a large number of gas ejection ports communicating with the large number of gas passages.
  • a buffer frame in which a first buffer chamber and a second buffer chamber are formed by frame walls, the burner head and the buffer frame are made of quartz glass, and at least the first buffer chamber and the second buffer chamber are provided.
  • the buffer frame is joined to and integrated with the burner head so that each of the chambers communicates with a large number of gas inlets of the burner head, so that the burner head and the first and second buffer chambers are made of material.
  • first buffer chamber and the second buffer chamber are separated by a partition so that the chambers do not communicate with each other, and are joined and integrated with the burner head so as to wrap the burner head inside.
  • the burner is easy to handle, easy to manage and maintain, and by integrating the burner head and both buffer chambers, the overall strength of the device increases, and it is durable enough to withstand the chucking operation of the actuator. can retain their sexuality.
  • the burner head Since the burner head has a jet surface that is long in one direction, it is possible to reliably form a horizontally long flame processing area even for an object that has a horizontally long processing area. Contributes to shortening and improving machining accuracy.
  • the burner head includes a first gas passage group communicating with the gas introduction port on the back side and directly communicating with some gas ejection ports on the front side, and a group of gas passages on the front side communicating with the gas introduction port on the side surface side.
  • the second gas passage group communicating with the gas ejection port, it is possible to reliably prevent contact between the combustion gas and the combustible gas while facilitating management and maintenance of the gas passages.
  • the second gas passage group includes straight and/or curved gas passages communicating from the side gas introduction port of the burner head to the front gas ejection port, thereby allowing gas to flow from the side side to the front side of the burner head.
  • the passage can be specifically formed.
  • the gas introduced from the first buffer chamber, traveling straight through the burner head, and ejected from the front surface is combustion gas
  • the gas introduced from the second buffer chamber, passing through the burner head, and ejected from the front surface is combustion gas. Since it is a combustible gas, it is possible to reliably prevent contact between combustion gas and combustible gas while facilitating management and maintenance of gas passages.
  • the conventional flame machining area such as pinpoint can be greatly expanded, and the machining area can be formed in an arbitrary machining area shape.
  • the burner head device of the present invention can be used in a wide range of fields such as household cooking utensils, material processing for semiconductor processes, scientific research and development supplies, clean rooms, experimental and research instruments, and other flame processing applications. .

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Gas Burners (AREA)
  • Pre-Mixing And Non-Premixing Gas Burner (AREA)

Abstract

[Problem] To provide a burner head device capable of generating an optional flame processing area shape and range. [Solution] The present invention includes: a burner head 8 that has a gas ejection surface 1F; a first inlet group 11a including a plurality of gas inlets for combustion gas supply that are provided in a portion (XF) of the burner head 8 other than the ejection surface 1F; a second inlet group (12a-1 to 12a-4) including a plurality of gas inlets for combustible gas supply that are provided in the portion (XF) of the burner head 8 other than the ejection surface; a first buffer chamber 15 that has a space shared with the plurality of gas inlets for combustion gas supply; and a second buffer chamber 16 that has a space shared with the plurality of gas inlets for combustible gas supply. The present invention is achieved by machining the burner head to provide the gas passages inside and the buffer chambers for different gases.

Description

バーナヘッド装置burner head device
　本発明は、気体燃料、霧状液体燃料等に空気を適量混合して燃焼させるバーナに関し、特に、ガラス製品製造、加工等に用いられるバーナヘッド装置に関する。 The present invention relates to a burner that mixes gaseous fuel, liquid mist fuel, etc. with an appropriate amount of air and burns it, and in particular to a burner head device that is used for the manufacture and processing of glass products.
　バーナは、コンロ等の家庭用調理器具から材料の品質保持のための工業用の工業炉まで幅広く用いられる燃焼装置である。近時、半導体プロセス用の素材加工、科学研究・開発用品、クリーンルーム、実験・研究用器具等の加工用のバーナの需要が大きく伸長しており、特に、ガラス製品加工等のための石英製バーナの開発が盛んに行われている。 A burner is a combustion device that is widely used, from household cooking utensils such as stoves to industrial furnaces for maintaining the quality of materials. In recent years, the demand for burners for processing materials for semiconductor processes, scientific research and development supplies, clean rooms, experimental and research equipment, etc., has grown significantly. Especially, quartz burners for processing glass products is being actively developed.
　従来、石英ガラス製バーナとして、特許文献１の装置が知られている。 Conventionally, the device of Patent Document 1 is known as a quartz glass burner.
特許第３２２２８４０号Patent No. 3222840
　特許文献１の石英ガラス製バーナは、一体の石英ガラスロッドに背面側から前面側に貫通するガス体の流通通路を複数形成してそれぞれ支燃性ガスと燃料性ガスの通路とした石英ガラス製バーナヘッドを設け、各通路の背面縁にそれぞれのガスの供給用石英ガラスチューブの端部をガスの導入管として溶接接続したものである。しかしながら、特許文献１の装置によれば、バーナヘッドの背面側で各流通通路の導入口に石英ガラスチューブの端部を溶接する作業を多数行う必要があり作業工数が多く製作に時間がかかり製品コストが高価である。また、数ミリ単位の各孔位置に合わせて溶接する作業であり溶接誤差を生じて完成品の精度バラツキを生じやすい。また、バーナヘッドの前面から中心軸方向前方位置に火炎焦点を設定したものであるから、バーナの火炎による加工領域を広く設定したい場合や一方向に長い長方形状等の加工領域を設定することができない、等の問題があった。 The quartz glass burner of Patent Document 1 is made of quartz glass by forming a plurality of flow passages for gas that penetrate from the back side to the front side in an integral quartz glass rod, and using these as passages for combustion-supporting gas and fuel gas. A burner head is provided, and the ends of quartz glass tubes for gas supply are welded to the rear edge of each passage as gas introduction pipes. However, according to the apparatus of Patent Document 1, it is necessary to perform many operations of welding the ends of the quartz glass tubes to the inlets of the respective distribution passages on the back side of the burner head, which requires many man-hours and takes time to manufacture the product. Cost is expensive. In addition, since welding is performed according to the position of each hole in units of several millimeters, welding errors are likely to occur, resulting in variations in the accuracy of the finished product. In addition, since the flame focus is set in front of the front surface of the burner head in the direction of the center axis, it is possible to set a wide machining area by the burner flame or to set a rectangular machining area that is long in one direction. I couldn't do it, etc.
本発明は上記従来の課題に鑑みてなされたものであり、その一つの目的は、製作工程が比較的簡単であり、かつ製品精度を良好に保持し、コストを安価に維持しつつ製作可能なバーナヘッド装置を提供することである。また、本発明の他の目的は、バーナの火炎による加工領域を広く設定でき、また、任意の加工領域形状に対応したバーナとすることのできるバーナヘッド装置を提供することである。 The present invention has been made in view of the above-mentioned problems of the prior art, and one of its objectives is to provide a relatively simple manufacturing process, maintain good product precision, and enable manufacturing while keeping costs low. To provide a burner head device. Another object of the present invention is to provide a burner head device which can set a wide working area by a burner flame and can be a burner corresponding to an arbitrary working area shape.
　上記課題を解決するために本発明は、ガスの噴出し面１Ｆを有するブロック体からなるバーナヘッド８であり、多数のガス通路３１、４１を内部に形成すると共に多数のガス通路３１、４１に連通する多数のガスの噴出し口２１ｂ、２２ｂを設けた噴出し面１Ｆから燃焼ガス１Ｇと可燃ガス２Ｇを噴き出すバーナヘッド８と、噴出し面１Ｆ以外のバーナヘッド８の部分（ＸＦ）に設けられた燃焼ガス供給用の多数のガス導入口を含む第１導入口群１１ａと、噴出し面以外のバーナヘッド８の部分ＸＦに設けられた可燃ガス供給用の多数のガスの導入口を含む第２導入口群（１２ａ―１～１２ａ―４）と、燃焼ガス供給用の多数のガスの導入口と共有する空間を有する第１バッファ室１５と、可燃ガス供給用の多数のガスの導入口と共有する空間を有する第２バッファ室１６と、を含むバーナヘッド装置２００から構成される。 In order to solve the above problems, the present invention provides a burner head 8 made of a block body having a gas jetting surface 1F, in which a large number of gas passages 31, 41 are formed. The burner head 8 for ejecting the combustion gas 1G and the combustible gas 2G from the ejection surface 1F provided with a large number of communicating gas ejection ports 21b and 22b, and the portion (XF) of the burner head 8 other than the ejection surface 1F. a first inlet group 11a including a large number of gas inlets for supplying combustion gas, and a large number of gas inlets for supplying combustible gas provided in the portion XF of the burner head 8 other than the ejection surface. A first buffer chamber 15 having a space shared by a second inlet group (12a-1 to 12a-4), a large number of gas inlets for supplying combustion gas, and a large number of gases for supplying combustible gas. A second buffer chamber 16 having a space shared with the mouth.
　また、本発明は、前面１Ｆと側面と背面を有するブロック体からなるバーナヘッドであり、多数のガス通路３１，４１を内部に形成すると共に多数のガス通路に連通する多数のガスの噴出し口（２１ｂ、２２ｂ－１～２２ｂ－４）を設けた前面１Ｆから燃焼ガス１Ｇと可燃ガス２Ｇを噴き出すバーナヘッド８と、バーナヘッド８の背面２Ｆに設けられた多数のガスの導入口（１１ａ）と、バーナへッド８の側面３Ｆ－１～３Ｆ－４に設けられた多数のガスの導入口（１２ａ－１～１２ａ－４）と、背面２Ｆ側の多数のガスの導入口（１１ａ）と共有する空間１５Ｓを有する第１バッファ室１５と、側面３Ｆ－１～３Ｆ－４側の多数のガスの導入口１２ａ－１～１２ａ－４と共有する空間１６Ｓを有する第２バッファ室１６と、を含むバーナヘッド装置１０から構成される。 Further, the present invention is a burner head made of a block body having a front surface 1F, a side surface and a rear surface, and having a large number of gas passages 31 and 41 formed therein and a large number of gas ejection ports communicating with the large number of gas passages. (21b, 22b-1 to 22b-4) for ejecting the combustion gas 1G and the combustible gas 2G from the front surface 1F, and a large number of gas inlets (11a) provided on the rear surface 2F of the burner head 8. , a large number of gas introduction ports (12a-1 to 12a-4) provided on the side surfaces 3F-1 to 3F-4 of the burner head 8, and a large number of gas introduction ports (11a) on the rear surface 2F side. and a second buffer chamber 16 having a space 16S shared with many gas introduction ports 12a-1 to 12a-4 on the sides 3F-1 to 3F-4. The burner head unit 10 includes:
その際、第１バッファ室１５と、第２バッファ室１６と、をフレーム壁により形成するバッファフレーム６０が設けられており、バーナヘッド８とバッファフレーム６０は石英ガラス製であり、少なくとも第１バッファ室１５と、第２バッファ室１６それぞれがバーナヘッド８の多数のガスの導入口１１ａ、１２ａ－１～１２ａ－４に連通するように、バッファフレーム６０は、バーナヘッド８に接合されて一体化されているとよい。 At that time, a buffer frame 60 is provided in which the first buffer chamber 15 and the second buffer chamber 16 are formed by frame walls, the burner head 8 and the buffer frame 60 are made of quartz glass, and at least the first buffer chamber is The buffer frame 60 is integrally joined to the burner head 8 so that the chamber 15 and the second buffer chamber 16 communicate with the numerous gas introduction ports 11a, 12a-1 to 12a-4 of the burner head 8, respectively. I hope it is.
また、第１バッファ室１５と、第２バッファ室１６とは室内どうしが連通しないように隔壁９０で分離された状態でバーナヘッド８を内側に包み込むようにバーナヘッド８と接合一体化されているとよい。 Also, the first buffer chamber 15 and the second buffer chamber 16 are separated by a partition wall 90 so that the chambers do not communicate with each other, and are integrally joined with the burner head 8 so as to enclose the burner head 8 inside. Good.
さらに、バーナヘッド８は、前面１Ｆが一方向に長い噴出し面であるとしてもよい。 Furthermore, the burner head 8 may have a jetting surface whose front surface 1F is long in one direction.
さらに、バーナヘッド８は、背面２Ｆ側のガス導入口（１１ａ）に連通しつつ前面１Ｆ側のいくつかのガス噴出し口に直通する第１ガス通路群３１ａと、側面３Ｆ－１～３Ｆ－４側のガス導入口１２ａ－１～１２ａ－４に連通しつつ前面１Ｆ側のいくつかのガス噴出し口に連通する第２ガス通路群４１ａと、を含むとよい。 Furthermore, the burner head 8 includes a first gas passage group 31a communicating with the gas introduction port (11a) on the side of the rear surface 2F and directly communicating with several gas ejection ports on the side of the front surface 1F, and side surfaces 3F-1 to 3F- a second gas passage group 41a that communicates with the gas introduction ports 12a-1 to 12a-4 on the 4 side and communicates with several gas ejection ports on the front face 1F side.
また、第２ガス通路群４１ａは、バーナヘッド８の側面側ガス導入口１２ａ－１～１２ａ－４から前面側ガス噴出し口１２ｂ－１～１２ｂ－４に連通する直通及び／又は屈曲ガス通路（４１ａ）を含むとよい。 The second gas passage group 41a includes direct and/or curved gas passages communicating from the side gas introduction ports 12a-1 to 12a-4 of the burner head 8 to the front gas ejection ports 12b-1 to 12b-4. (41a) may be included.
また、第１バッファ室１５から導入されバーナヘッド８内を直進しその前面から噴出されるガスは燃焼ガス１Ｇであり、第２バッファ室１６から導入されバーナヘッ８ド内を経由してその前面１Ｆから噴出されるガスは可燃ガス２Ｇであるとよい。 Combustion gas 1G is introduced from the first buffer chamber 15, passes through the burner head 8, and is ejected from the front surface of the burner head 8. The gas ejected from is preferably combustible gas 2G.
　本発明のバーナヘッド装置によれば、基本的にはバーナヘッドと第１、第２チャンバとを溶接して一体化するだけで装置を構成できるので製作工程が簡単で良好な仕上がり精度で高品質のバーナヘッド装置を得ることができる。また、製作が容易で製作時間も従来に比較して飛躍的に短時間でよくコストを大幅に低減することができる。さらに、バーナの火炎による加工領域を広く設定できると共に、任意の加工領域形状や大きな領域の火炎加工領域を形成し得るバーナヘッド装置を得ることが可能である。 According to the burner head device of the present invention, the burner head and the first and second chambers are basically welded together to form the device. can be obtained. In addition, it is easy to manufacture, and the manufacturing time is much shorter than the conventional one, and the cost can be greatly reduced. Furthermore, it is possible to obtain a burner head device that can set a wide processing area by a burner flame and can form an arbitrary processing area shape and a large flame processing area.
（ａ）、（ｂ）は、本発明のバーナヘッド装置の原理構成斜視説明図である。(a), (b) is a principle structure perspective explanatory view of the burner head apparatus of this invention. （ａ）は、図１の装置のバーナヘッドのみの斜視説明図である。（ｂ）は、図１の装置の正面説明図である。（ｃ）は、図１の装置の背面説明図である。2(a) is a perspective explanatory view of only the burner head of the apparatus of FIG. 1; FIG. (b) is a front explanatory view of the apparatus of FIG. 1; (c) is an explanatory rear view of the apparatus of FIG. 1; 実施形態に係るバーナヘッド装置の正面図である。It is a front view of a burner head device concerning an embodiment. 図３のバーナヘッド装置のバーナヘッド以外の部分のみの図１Ａ－Ａ‘線断面図である。FIG. 1A is a cross-sectional view along the line of FIG. 1A-A' showing only the portion other than the burner head of the burner head device of FIG. 3; 図３のバーナヘッド装置の底面から見てバーナヘッド以外の部分のみをハッチングで示した図である。It is the figure which showed only parts other than a burner head seeing from the bottom face of the burner head apparatus of FIG. 3 by hatching. 図３のバーナヘッド装置のバーナヘッドのみの背面図である。FIG. 4 is a rear view of only the burner head of the burner head device of FIG. 3; 図３のバーナヘッドの斜視説明図である。FIG. 4 is a perspective explanatory view of the burner head of FIG. 3; 図３のバーナヘッドの斜視説明図である。FIG. 4 is a perspective explanatory view of the burner head of FIG. 3; （ａ）は、図８の７Ａ線断面図、（ｂ）は、図８の７Ｂ線断面図、（ｃ）は、図８の７Ｃ線断面図である。(a) is a cross-sectional view along line 7A in FIG. 8, (b) is a cross-sectional view along line 7B in FIG. 8, and (c) is a cross-sectional view along line 7C in FIG. （ａ）、（ｂ）は、図３のバーナヘッド装置の作用説明図である。4(a) and 4(b) are operation explanatory diagrams of the burner head device of FIG. 3. FIG.
　以下添付図面を参照しつつ本発明のバーナヘッド装置の実施形態について説明する。 An embodiment of the burner head device of the present invention will be described below with reference to the accompanying drawings.
　本発明のバーナヘッド装置は、ガスや燃焼流体を用いて生じた火炎により種々の物品や物体を火炎加工する装置であり、例えばビーカーやフラスコなど理化学用途や光ファイバー製造用部品の製造などに用いられる。 The burner head device of the present invention is a device for flame processing various articles and objects by flames generated by using gas or combustion fluid, and is used, for example, for physicochemical applications such as beakers and flasks, and for the manufacture of optical fiber manufacturing parts. .
　図１（ａ）、（ｂ）は、本発明の原理構成説明図である。本発明のバーナヘッド装置は、金属材料又は非金属の無機材料で構成される。バーナは火炎加工の設備である点から、その中でも耐熱性、耐食性を有する材料が好適に用いられる。中でも、非金属無機材料であるガラス、耐火物、ファインセラミックス等が有利に用いられる。原理的には、耐熱性、耐食性、透明性に優れる石英ガラスが特に有利に用いられる。そして、これらの材料を加工したガスの噴射ノズルを利用し、広い火炎加工領域や任意の範囲の火炎加工領域を形成して火炎加工作業効率の向上、加工精度向上を図るものである。 FIGS. 1(a) and 1(b) are explanatory diagrams of the principle configuration of the present invention. The burner head device of the present invention is constructed from metallic or non-metallic inorganic materials. Since the burner is equipment for flame processing, materials having heat resistance and corrosion resistance are preferably used. Among them, glass, refractories, fine ceramics, etc., which are non-metallic inorganic materials, are advantageously used. In principle, quartz glass, which is excellent in heat resistance, corrosion resistance and transparency, is particularly advantageously used. A wide flame machining area or arbitrary range of flame machining area is formed by using a gas injection nozzle processed from these materials to improve the efficiency of the flame machining work and the machining accuracy.
図の原理構成例では、例えば石英ガラスを加工したソリッドブロック体のバーナヘッド８の１つの面をガスの噴出し面１Ｆとし、該噴出し面１Ｆに多数のガスの噴出し口２１ｂ、２２ｂ－１～２２ｂ－４が設けられている。噴出し面１Ｆ以外の表面部分に燃焼ガス供給用と可燃ガス供給用の導入口群１１ａ，１２ａ－１～１２ａ－４を設け、各導入口と噴出し面１Ｆの各噴出し口とが１対１で連通するようにバーナヘッド８の内部にガス通流用の通路３１、４１を設けている。さらに、燃焼ガス供給用の各導入口に接する空間を気密閉鎖するようにバッファフレーム６０をバーナヘッド８の表面に接合させて少なくとも２つのバッファ室１５，１６を設ける。１つのバッファ室１５は燃焼ガスとしての例えば酸素ガスの一時貯留用であり、他のバッファ室１６は可燃ガスとしての例えば水素ガス貯留用である。これによって、供給管等から供給を受けたガスは各バッファ室に一時貯留されてほぼ同時に各導入口からガス通路３１，４１に入り、通流して噴出し面１Ｆから噴出され空気中で両ガスが接する火炎領域で加工対象物に対して火炎加工を行う。バーナヘッドの外形形状やサイズ等を変更、調整して多数のガスの噴出し口群の配置形状や広がり等を変更することで自在の火炎加工領域を生成することができる。 In the principle configuration example shown in the figure, one surface of a burner head 8 made of, for example, quartz glass is a gas ejection surface 1F. 1 to 22b-4 are provided. Introducer groups 11a, 12a-1 to 12a-4 for supplying combustion gas and combustible gas are provided on the surface portion other than the ejection surface 1F, and each introduction port and each ejection port of the ejection surface 1F are one. Passages 31 and 41 for gas flow are provided inside the burner head 8 so as to communicate in pairs. Furthermore, at least two buffer chambers 15 and 16 are provided by bonding a buffer frame 60 to the surface of the burner head 8 so as to hermetically close the space adjacent to each inlet for supplying combustion gas. One buffer chamber 15 is for temporary storage of combustion gas such as oxygen gas, and the other buffer chamber 16 is for storage of combustible gas such as hydrogen gas. As a result, the gas supplied from the supply pipe or the like is temporarily stored in each buffer chamber, enters the gas passages 31 and 41 through the introduction ports at substantially the same time, flows through the gas passages 31, 41, and is ejected from the ejection surface 1F. performs flame machining on the workpiece in the flame area in contact with . By changing and adjusting the outer shape, size, etc. of the burner head to change the arrangement shape, spread, etc. of the group of many gas ejection ports, it is possible to freely generate a flame machining area.
すなわち、本発明の原理構成例によるバーナヘッド装置２００によれば、ガスの噴出し面１Ｆを有するソリッド状ブロック体のバーナヘッド８であり、多数のガス通路３１、４１を内部に形成すると共に多数のガス通路３１、４１に連通する多数のガスの噴出し口２１ｂ、２２ｂを設けた噴出し面１Ｆから燃焼ガス１Ｇと可燃ガス２Ｇを噴き出すバーナヘッド８と、噴出し面１Ｆ以外のバーナヘッド８の部分（ＸＦ）に設けられた燃焼ガス供給用の多数のガス導入口を含む第１導入口群１１ａと、噴出し面以外のバーナヘッド８の部分ＸＦに設けられた可燃ガス供給用の多数のガスの導入口を含む第２導入口群（１２ａ―１～１２ａ―４）と、燃焼ガス供給用の多数のガスの導入口と共有する空間を有する第１バッファ室１５と、可燃ガス供給用の多数のガスの導入口と共有する空間を有する第２バッファ室１６と、を含む。バーナヘッド内の多数のガスの通路は燃焼及び可燃ガスが接触しなければどのような通路の経路で通流してもよい。また、ガスの導入口並びに噴出し口の配置や個数は燃焼及び可燃ガスが接触しなければ任意に設定できる。バッファ室のうちバーナヘッド８の周側面側に配置するバッファ室は周方向の一部のみに設けるようにしてもよいし、全周にわたってバッファ室を形成し周側面全体からガスをバーナヘッド内に導入し、噴出し面から噴出させるようにしてもよい。 That is, according to the burner head device 200 according to the principle configuration example of the present invention, the burner head 8 is a solid block body having a gas ejection surface 1F, and a large number of gas passages 31 and 41 are formed therein and a large number of gas passages 31 and 41 are formed therein. a burner head 8 for ejecting the combustion gas 1G and the combustible gas 2G from the ejection surface 1F provided with a large number of gas ejection ports 21b, 22b communicating with the gas passages 31, 41, and the burner head 8 other than the ejection surface 1F. A first inlet group 11a including a large number of gas inlets for supplying combustion gas provided in the portion (XF), and a large number for supplying combustible gas provided in a portion XF of the burner head 8 other than the ejection surface A second inlet group (12a-1 to 12a-4) including gas inlets, a first buffer chamber 15 having a space shared with many gas inlets for supplying combustion gas, and combustible gas supply and a second buffer chamber 16 having a space shared with a number of gas inlets for gas. The multiple gas passages within the burner head may be routed in any manner so long as the combustible and combustible gases do not come into contact. In addition, the arrangement and the number of gas inlets and jet outlets can be arbitrarily set as long as the combustible and combustible gases do not come into contact with each other. Of the buffer chambers, the buffer chamber disposed on the peripheral side of the burner head 8 may be provided only partially in the circumferential direction. It may be introduced and ejected from the ejection surface.
本発明の原理構成例によるバーナヘッド装置によれば、バーナヘッド８の形状は１つの噴出し面（１Ｆ）を有する形状であれば、四角柱体、円柱体、その他の立体多角形、不定形状立体その他任意形状のブロック体を用いることができる。噴出し面の噴出し口の孔の配置、数、孔径、導入口の孔の配置、数、孔径等は任意に設定可能である。バッファ室は３個以上設けてもよい。バッファ室はバーナヘッド全体を内側に被覆するようにバーナヘッドを囲周して一体接合させてもよいし、導入口の設置位置に応じてバーナヘッドの一部のみでバーナヘッドとバッファ室形成用のバッファフレームとが接合されている図１のような接合形態でもよい。また、ガスの供給管は石英ガラスではなくとも耐熱仕様等の可撓性チューブ等を用いてもよい。 According to the burner head device according to the example of the principle configuration of the present invention, the shape of the burner head 8 may be a quadrangular prism, a cylinder, other three-dimensional polygons, and irregular shapes as long as the shape has one ejection surface (1F). A block body having a three-dimensional shape or other arbitrary shape can be used. The arrangement, number, and diameter of the holes in the ejection port of the ejection surface, and the arrangement, number, and diameter of the holes in the introduction port can be set arbitrarily. Three or more buffer chambers may be provided. The buffer chamber may be integrally joined around the burner head so as to cover the entire burner head inside, or only a part of the burner head may be used to form the burner head and the buffer chamber depending on the installation position of the inlet. 1 may be used, in which the buffer frame is joined. Also, the gas supply pipe may be made of a heat-resistant flexible tube or the like instead of quartz glass.
次に、本発明の具体的な実施形態について説明する。本実施形態のバーナヘッド装置は、耐食性、耐熱性、透明性に優れた石英（ＳｉＯ２）製のガスバーナヘッド装置で構成されている。図３は、本発明の実施形態に係るバーナヘッド装置１０の正面図、図４は、バーナヘッド装置のバーナヘッド以外の部分のみの図３Ａ－Ａ‘線断面図であり、図において、バーナヘッド装置１０は、前面１Ｆから燃焼ガス１Ｇと、可燃ガス２Ｇを噴き出すバーナヘッド８に燃焼ガス及び可燃性ガスの供給管を接続させて構成されている。 Next, specific embodiments of the present invention will be described. The burner head device of this embodiment is composed of a gas burner head device made of quartz (SiO2), which is excellent in corrosion resistance, heat resistance, and transparency. FIG. 3 is a front view of a burner head device 10 according to an embodiment of the present invention, and FIG. 4 is a sectional view taken along the line of FIG. The apparatus 10 is configured by connecting supply pipes for the combustion gas and the combustible gas to a burner head 8 that blows out the combustion gas 1G and the combustible gas 2G from the front surface 1F.
　即ち、本発明の実施形態に係るバーナヘッド装置１０は、前面１Ｆから燃焼ガス１Ｇと、可燃ガス２Ｇを噴き出すバーナヘッド８と、バーナヘッド８に設けた多数のガスの導入口を有するガス導入口群１１ａ、１２ａ－１、１２ａ－２、１２－ａ３、１２ａ－４と、第１バッファ室１５と、第２バッファ室１６と、を含む。ガス導入口群１１ａ、１２ａ－１、１２ａ－２、１２－ａ３、１２ａ－４は多数のガスの導入口（以下、図示省略）１１ａ１，１１ａ２、１１ａ３．．．、１２ａ－１１，１２ａ－１２，１２ａ―１３．．．、１２ａ－２１、１２ａ－２２、１２ａ－２３．．．、１２ａ－３１、１２ａ－３２、１２ａ３３．．．、１２ａ－４１、１２ａ－４２、１２ａ－４３．．．（以上、図示省略）を含む。 That is, the burner head device 10 according to the embodiment of the present invention includes a burner head 8 for ejecting a combustion gas 1G and a combustible gas 2G from a front surface 1F, and a gas inlet having a large number of gas inlets provided in the burner head 8. Groups 11a, 12a-1, 12a-2, 12-a3, 12a-4, a first buffer chamber 15 and a second buffer chamber 16 are included. The gas introduction port groups 11a, 12a-1, 12a-2, 12-a3, 12a-4 include a large number of gas introduction ports (hereinafter, not shown) 11a1, 11a2, 11a3 . . . , 12a-11, 12a-12, 12a-13. . . , 12a-21, 12a-22, 12a-23 . . . , 12a-31, 12a-32, 12a33 . . . , 12a-41, 12a-42, 12a-43. . . (above, illustration omitted).
　バーナヘッド８は、前面１Ｆと、背面２Ｆを少なくとも有する立体のブロック体からなり、立体形状自体は立方体、直方体、三角柱体、四角柱体、五角柱体、その他の多角柱体、立体台形、その他変形立体形状、不定形立体形状でもよい。バーナヘッド８は、その内部に多数のガス通路（３１、４１）を有しており、特に本実施形態では石英製の一体の塊からなる横長直方体形状ブロックに超音波加工等により直接に貫通する孔を穿孔して通路を形成している。さらに、バーナヘッド８は、前面１Ｆに複数又は多数のガスの噴出し口を含むガスの噴出し口群２１ｂ、２２ｂ－１、２２ｂ－２、２２ｂ－３、２２ｂ－４を設けている。 The burner head 8 is composed of a three-dimensional block body having at least a front surface 1F and a rear surface 2F. A deformed three-dimensional shape or an irregular three-dimensional shape may be used. The burner head 8 has a large number of gas passages (31, 41) inside it, and particularly in this embodiment, the gas passages are directly penetrated by an oblong cuboid-shaped block made of an integral mass made of quartz by ultrasonic machining or the like. A hole is drilled to form a passageway. Further, the burner head 8 is provided with gas ejection port groups 21b, 22b-1, 22b-2, 22b-3, and 22b-4 including a plurality or a large number of gas ejection ports on the front surface 1F.
　実施形態において、バーナヘッド８は、図８に主に示す六面体の立体形状の石英の一体ブロック体であり、前面１Ｆ、背面２Ｆの他に４つの側面３Ｆ－１、３Ｆ－２、３Ｆ－３、３Ｆ－４を含む。なお、図８実施形態では小径の孔口がすべて酸素ガス１Ｇの噴出し口であり、大径の孔口がすべて水素ガス２Ｇの噴出し口である。 In the embodiment, the burner head 8 is a hexahedral three-dimensional quartz integral block mainly shown in FIG. , 3F-4. In the embodiment shown in FIG. 8, all the small diameter holes are for the oxygen gas 1G, and all the large diameter holes are for the hydrogen gas 2G.
実施形態において、ガスの導入口群１１ａ、１２ａ－１、１２ａ－２、１２ａ－３、１２ａ－４は、図４，５，６，８に示すように、背面２Ｆと、全ての側面３Ｆ－１、３Ｆ－２、３Ｆ－３、３Ｆ－４とに設けられている。一方、前面１Ｆのみに多数のガス噴出し口を含むガス噴出し口群２１ｂ、２２ｂ－１、２２ｂ－２、２２ｂ－３、２２－ｂ４が設けられており、前面１Ｆがガスの噴出し面とされる。なお、前面にのみ噴出し口を設けることなく、側面や他の部位からガスを噴き出させるようにすることも可能である。バーナヘッド８は、前面１Ｆが一方向に長い噴出し面として形成されている。なお、前面１Ｆ全体にガス噴出し口を設ける必要はなく、全体の一部にのみ偏在したり、あるいは全体に散在していてもよい。 In the embodiment, the gas inlet groups 11a, 12a-1, 12a-2, 12a-3, 12a-4, as shown in FIGS. 1, 3F-2, 3F-3, and 3F-4. On the other hand, gas ejection port groups 21b, 22b-1, 22b-2, 22b-3, and 22-b4 including a large number of gas ejection ports are provided only on the front surface 1F, and the front surface 1F is the gas ejection surface. It is said that In addition, it is also possible to make the gas blow out from the side surface or other parts without providing the blowout port only on the front surface. The burner head 8 has a front surface 1F formed as an ejection surface elongated in one direction. In addition, it is not necessary to provide the gas ejection ports on the entire front face 1F, and they may be unevenly distributed only on a part of the whole, or may be scattered on the whole.
　実施形態において、背面２Ｆのガス導入口群１１ａは、図６に示すように、例えば直径０．６ｍｍの口径の導入口の孔が縦７個（列）×横３３個（行）で整列位置で穿孔されている。実施形態において、背面２Ｆのガス導入口には燃焼ガスとしての酸素（Ｏ２）のみが供給される。 In the embodiment, as shown in FIG. 6, the gas introduction port group 11a on the rear surface 2F has, for example, 7 vertical (columns) by 33 (rows) horizontal gas introduction ports with a diameter of 0.6 mm. perforated with In the embodiment, only oxygen (O2) as combustion gas is supplied to the gas introduction port on the rear surface 2F.
　一方、図４、５、８、９、１０に示すように、バーナヘッド８の周面としての４側面（図３のバーナヘッド８の平面、底面及び左右両側面）にもそれぞれガスの導入口が設けられている。図３の正面図から見て平面及び底面（図５）すなわち、図３の上下の側面側には、バーナヘッド８の底面となる横長第１側面３Ｆ－１、バーナヘッド８の平面となる横長対向第２側面３Ｆ－３が設けられている。そして、それぞれの側面３Ｆ－１、３Ｆ－３のそれぞれ短辺側幅の略中央位置に横長方向一列に６５個のガス導入口を含む側面横長ガス導入口群１２ａ－１、対向側面横長ガス導入口群１２ａ－２が形成されている。また、面が狭い右小第１側面、左小対向第２側面３Ｆ－２、３Ｆ－４にはそれぞれ横長側面３Ｆ－１、３Ｆ－３の短辺側幅と同じ幅の略中央位置一列に５個のガス導入口１２－ａ３、１２ａ－４が穿孔されている。すなわち、側面側のガス導入口は直方体形状のバーナヘッドの周側面を一周するようにそれぞれ短辺側幅の略中央位置で設けられている。バーナヘッド８の４側面３Ｆ－１、３Ｆ－２、３Ｆ－３、３Ｆ－４に設けられた導入口群１２ａ－１、１２ａ－２、１２ａ－３、１２ａ－４の各導入口はそれぞれ例えば１ｍｍの口径に設定されており、実施形態においては、これらの導入口群のそれぞれの導入口には可燃ガスとしての水素（Ｈ２）が供給される。なお、燃焼及び可燃のいずれのガスの導入口を背面側とするか側面側とするかは実施形態構成に限定されるものではなく、装置の製造しやすさやガス流通の効率、その他の条件から任意に設定することができる。また、燃焼ガスや可燃ガスの導入口の数や配置構成もこの実施態様構成に限定されることなく、任意に設定することができる。　　 On the other hand, as shown in FIGS. 4, 5, 8, 9, and 10, gas introduction ports are also provided on the four side surfaces (the plane, bottom surface, and left and right side surfaces of the burner head 8 in FIG. 3) as the peripheral surface of the burner head 8. is provided. When viewed from the front view of FIG. 3, the plane and the bottom surface (FIG. 5), ie, the upper and lower side surfaces of FIG. An opposing second side surface 3F-3 is provided. Then, a laterally elongated side gas inlet group 12a-1 including 65 gas inlets arranged in a row in the laterally elongated direction at substantially the central position of the short side width of each of the side faces 3F-1 and 3F-3, and a laterally elongated opposite side gas inlet group 12a-1. A mouth group 12a-2 is formed. In addition, on the first narrow side of the right small side and the second side facing the left small side 3F-2, 3F-4, the width is the same as the width of the short side of the oblong side 3F-1, 3F-3, respectively. Five gas inlets 12-a3 and 12a-4 are perforated. That is, the gas introduction ports on the side surfaces are provided at substantially central positions of the widths of the short sides so as to encircle the peripheral side surfaces of the rectangular parallelepiped burner head. The introduction ports of the introduction port groups 12a-1, 12a-2, 12a-3, and 12a-4 provided on the four side surfaces 3F-1, 3F-2, 3F-3, and 3F-4 of the burner head 8 are, for example, The aperture is set to 1 mm, and in the embodiment, hydrogen (H2) as a combustible gas is supplied to each inlet of these inlet groups. It should be noted that it is not limited to the configuration of the embodiment whether the inlet port for the combustible gas or the combustible gas is on the back side or on the side side. Can be set arbitrarily. Further, the number and layout of inlets for combustion gas and combustible gas are not limited to this embodiment, and can be arbitrarily set.　　
　バーナヘッド８の内部に設けられた多数のガス通路３１中、酸素ガスを通流させるガス通路は、第１ガス通路群３１ａを形成している。酸素ガス通路３１は、図８，９，１０に示すように、背面２Ｆのガス導入口群１１ａの各ガス導入口に一端が連通し他端が前面１Ｆの噴出し口群２１ｂのガス噴出し口にそれぞれ連通する内部通路であり、実施形態において、それぞれ直径０．６ｍｍ径の孔として背面側から前面に向けて直線状に貫通して設けられている。実施形態において、ガス通路３１は、ガスの導入口（１１ａ）からバーナヘッド８に供給された燃焼用の酸素ガスＯ２をバーナヘッド８の前面の噴出し口（２１ｂ）から加工対象物に向けて噴出す。 Among the many gas passages 31 provided inside the burner head 8, the gas passages through which oxygen gas flows form a first gas passage group 31a. As shown in FIGS. 8, 9, and 10, the oxygen gas passage 31 has one end communicating with each gas introduction port of the gas introduction port group 11a on the back surface 2F and the other end communicating with the gas introduction port group 21b on the front surface 1F. These are internal passages that respectively communicate with the ports, and in the embodiment, each is provided as a hole having a diameter of 0.6 mm and linearly penetrating from the back side to the front side. In the embodiment, the gas passage 31 directs the oxygen gas O2 for combustion supplied to the burner head 8 from the gas introduction port (11a) to the workpiece from the ejection port (21b) on the front surface of the burner head 8. erupt.
　バーナヘッド８の内部に設けられた他の多数のガス通路４１は、バーナヘッド８の側面３Ｆ－１、３Ｆ－２、３Ｆ－３、３Ｆ－４に設けたガス導入口１２ａ－１、１２ａ－２、１２ａ－３、１２ａ－４と、前面１Ｆに設けたガス噴出し口２２ｂ－１、２２ｂ－２、２２ｂ－３、２２－ｂ４を連通接続する通路であり、実施形態において、可燃ガスとしての水素Ｈ２をヘッドの側面から導入させ前面の噴出し面から噴出させる。水素ガス通流用の多数のガス通路は第２ガス通路群４１ａを形成している。 Other numerous gas passages 41 provided inside the burner head 8 are gas introduction ports 12a-1, 12a- provided in the side surfaces 3F-1, 3F-2, 3F-3, 3F-4 2, 12a-3, 12a-4 and gas ejection ports 22b-1, 22b-2, 22b-3, 22-b4 provided on the front surface 1F. of hydrogen H2 is introduced from the side surface of the head and ejected from the front ejection surface. A large number of gas passages for flowing hydrogen gas form a second gas passage group 41a.
　一方、図３，８に戻ってバーナヘッド８の前面１Ｆのガス噴出し口は、燃焼用ガスとしての酸素ガス噴出し口２１ｂと、可燃ガスとしての水素ガス噴出し口２２ｂ－１～２２ｂ－４を含む。図において小径の孔口は酸素ガス噴出し口２１ｂであり、大径の孔口は水素ガス噴出し口２２ｂ－１～２２ｂ－４に設定されている。小径孔口２１ｂと大径孔口２２ｂ－１～２２ｂ－４はそれぞれの孔の周囲に異なる径の孔が配置されるように縦横に交互に小径孔と大径孔を配置させている。例えば、図８において、バーナヘッド８の長手方向一端には、所要の間隔を空けて縦に５個の大径孔口としてのガス噴出し口群（２２ｂ－３）のガス噴出し口が設けられている。そして、それに隣接する左隣りに中央７個を縦に所要間隔を空けて酸素噴出し用としての小径孔口２１ｂが一列に設けられ、その両端に１個ずつの水素噴出し用としての大径孔口（２２ｂ－１）を配置している。この縦に７個一列の小径孔口としての酸素噴出し口群と両端１個ずつの水素噴出し口孔との混合噴出し口孔群ｘと、さらにその隣に縦に５個配置された大径孔口ｙとの並びを交互に繰り返してバーナヘッドの横長方向にわたって設けられている。このとき、縦５個一列の水素噴出し口群ｙの大径孔口どうしの中心間隔は例えば２．２５ｍｍ、混合噴出し口孔群ｙの小径孔口どうしの中心間隔は例えば１．５ｍｍに設定されている。これらの大径孔口、小径孔口の配置形態や孔径、孔口どうしの間隔は任意に設定できる。 On the other hand, referring back to FIGS. 3 and 8, the gas ejection ports on the front face 1F of the burner head 8 include an oxygen gas ejection port 21b for combustion gas and hydrogen gas ejection ports 22b-1 to 22b- for combustible gas. including 4. In the figure, the small-diameter hole is the oxygen gas ejection port 21b, and the large-diameter holes are set to the hydrogen gas ejection ports 22b-1 to 22b-4. The small-diameter hole 21b and the large-diameter holes 22b-1 to 22b-4 are alternately arranged vertically and horizontally so that holes with different diameters are arranged around each hole. For example, in FIG. 8, at one end in the longitudinal direction of the burner head 8, a group of gas ejection ports (22b-3) of five large-diameter gas ejection port groups (22b-3) are provided vertically at required intervals. It is Seven small-diameter holes 21b for ejecting oxygen are provided in a row on the left adjacent to it with a required interval in the center, and one large-diameter hole for ejecting hydrogen is provided at each end. A hole mouth (22b-1) is arranged. This mixed jet hole group x consisting of a group of oxygen jet holes as small-diameter holes arranged vertically in a row and one hydrogen jet hole at each end, and five holes arranged vertically next to it. They are provided over the horizontal direction of the burner head by alternately repeating the arrangement with the large-diameter holes y. At this time, the center interval between the large-diameter holes of the hydrogen ejection port group y arranged in a row of five vertically is, for example, 2.25 mm, and the center interval of the small-diameter holes of the mixed ejection port group y is, for example, 1.5 mm. is set. The arrangement of the large-diameter openings and the small-diameter openings, the hole diameters, and the intervals between the openings can be set arbitrarily.
図８において、バーナヘッド８の右小第１側面３Ｆ－２には、短辺方向である幅方向に５個の大径孔口としての小側面ガス導入口（１２ａ－３）が所要間隔を空けて一列に設けられている。そして、これらの小側面ガス導入口（１２ａ－３）は、前面１Ｆの長手方向一端側の縦５個の大径孔口ガス噴出し口（２２ｂ－３）に連通接続されている。すなわち、実施形態において、水素ガス通路４１は、Ｌ字状に導入口と噴出し口を連通接続させるＬ字通路として形成されている。すなわち、第２ガス通路群４１ａは、バーナヘッド８の側面側ガス導入口１２ａ－１～１２ａ－４から前面側ガス噴出し口２２ｂ－１～２２ｂ－４に連通する直通及び／又は屈曲ガス通路を含む。これによって、バーナヘッドの周側面側から前面の噴出し面側に具体的に通路を設けることができる。 In FIG. 8, on the right small first side face 3F-2 of the burner head 8, there are five small side gas inlets (12a-3) as large diameter holes in the width direction, which is the direction of the short side, at required intervals. They are arranged in a line with space between them. These small side gas inlets (12a-3) are connected in communication with longitudinally five large-diameter gas outlets (22b-3) on one end side in the longitudinal direction of the front surface 1F. That is, in the embodiment, the hydrogen gas passage 41 is formed as an L-shaped passage that connects the introduction port and the ejection port in an L-shape. That is, the second gas passage group 41a includes direct and/or curved gas passages communicating from the side gas introduction ports 12a-1 to 12a-4 of the burner head 8 to the front gas ejection ports 22b-1 to 22b-4. including. Thereby, a passage can be specifically provided from the peripheral side of the burner head to the ejection side of the front face.
さらに、バーナヘッド８の前面１Ｆの最も平面（横長対向第２側面３Ｆ－３）及び底面（横長第１側面３Ｆ－１）寄りに設けられたそれぞれ３３個の水素ガス噴出し口としての大径孔口２２ｂ－１～２２ｂ－４は、それぞれ横長第１側面３Ｆ－１と横長対向第２側面３Ｆ－３の幅方向中央位置に間隔を空けて一列状に設けられたそれぞれ６５個の横並びの水素ガス導入口１３ａ－１～１３ａ－６５のうちの３３個の水素ガス導入口にＬ字接続されている。さらに、横長第１側面３Ｆ－１と横長対向第２側面３Ｆ－３の幅方向中央位置に間隔を空けて一列状に設けられた６５個の横並びの水素ガス導入口のうちの残りの３２個が前面１Ｆの水素ガス噴出し口としての大径孔口２２ｂ－１～２２ｂ－４のいずれかにＬ字連通接続されている。横長第１、第２側面３Ｆ－１、３Ｆ－３に設けた６５個の一列の大径口孔はそれぞれ交互に前面１Ｆの５個一列の大径孔口としての水素噴出し口群ｙと、混合噴出し口孔群ｘに連通接続するように設けられている。 Furthermore, 33 large diameter hydrogen gas ejection ports provided on the front surface 1F of the burner head 8 (horizontally opposite second side surface 3F-3) and on the bottom surface (horizontally long first side surface 3F-1). The apertures 22b-1 to 22b-4 are arranged in a row at intervals in the width direction center positions of the oblong first side surface 3F-1 and the oblong opposing second side surface 3F-3, respectively. It is L-shaped connected to 33 hydrogen gas inlets out of the hydrogen gas inlets 13a-1 to 13a-65. Furthermore, the remaining 32 of the 65 horizontal hydrogen gas introduction ports provided in a line at intervals in the width direction center position of the oblong first side surface 3F-1 and the oblong opposite second side surface 3F-3 is connected to any one of the large-diameter holes 22b-1 to 22b-4 as hydrogen gas ejection ports on the front surface 1F in L-shaped communication. The 65 rows of large-diameter holes provided on the horizontally long first and second side faces 3F-1 and 3F-3 alternately form a row of 5 large-diameter holes on the front face 1F, which is a hydrogen ejection port group y. , are provided so as to communicate with the mixing jet hole group x.
　実施形態において、図９（ｂ）に示すように混合噴出し口孔群ｘは中央に間隔を空けて７個の酸素ガス通路３１が配置され、その両端に側面３Ｆ－１、３Ｆ－２から水素ガスを供給させ前面１Ｆの水素ガス噴出し口（２２ｂ－１、２２ｂ－２）から水素を噴き出すＬ字通路４１が対称位置に設けられている。これより、酸素ガス１Ｇと水素ガス２Ｇが同時に前面１Ｆから噴出される。また、図９（ｃ）に示すように、水素噴出し口群ｙのラインでは水素ガス通路４１は、側面横長導入口のガス噴出し口２２ｂ－１、と対向側面横長導入口のガス噴出し口２２ｂ－２を直線状に連通するように、一側面から他の側面を貫通するように設けられた貫通孔５１と、前面１Ｆの５個一列に設けられた噴出し口２２ｂ－１、２２ｂ－２とこの貫通路５１とを直角状に連通接続する枝通路５２と、で形成されている。したがって、水素噴出し口群ｙのラインではこれに接続される水素ガス導入口１２ａ―１、１２ａ－２から導入されるガスは直通されたいずれの側面方向にも相互に流通するとともに、貫通孔５１から枝通路５２を経由してそれぞれ前面１Ｆの５個の噴出し口に分かれて噴出される。 In the embodiment, as shown in FIG. 9(b), seven oxygen gas passages 31 are arranged at intervals in the center of the mixing jet port group x, and from the side surfaces 3F-1 and 3F-2 at both ends thereof, L-shaped passages 41 for supplying hydrogen gas and ejecting hydrogen from the hydrogen gas ejection ports (22b-1, 22b-2) on the front surface 1F are provided at symmetrical positions. As a result, oxygen gas 1G and hydrogen gas 2G are simultaneously jetted from the front surface 1F. In addition, as shown in FIG. 9(c), in the line of the hydrogen ejection port group y, the hydrogen gas passage 41 includes the gas ejection port 22b-1 of the side oblong introduction port and the gas ejection port 22b-1 of the opposite side oblong introduction port. A through hole 51 is provided so as to penetrate from one side to the other side so as to communicate with the port 22b-2 in a straight line, and five ejection ports 22b-1 and 22b are provided in a row on the front surface 1F. -2 and a branch passage 52 that connects the through passage 51 at right angles. Therefore, in the line of the hydrogen jet port group y, the gases introduced from the hydrogen gas inlets 12a-1 and 12a-2 connected thereto flow mutually in the direction of both directly connected side faces, and the through holes From 51, it passes through branch passages 52 and is divided into five ejection ports on the front surface 1F and ejected.
　図３ないし図７において、実施形態のバーナヘッド装置１０は、バーナヘッド８と、該バーナヘッドの噴出し面を露出させつつバーナヘッドを内包して一体化したバッファフレーム６０と、バッファフレーム６０を介してバーナヘッド８のガス導入口群に燃焼及び可燃ガスを供給するガス供給管８０と、を備えている。 3 to 7, the burner head device 10 of the embodiment comprises a burner head 8, a buffer frame 60 integrated with the burner head while exposing the ejection surface of the burner head, and a buffer frame 60. and a gas supply pipe 80 for supplying combustion and combustible gases to the gas inlet group of the burner head 8 via the gas supply pipe 80 .
　実施形態において、バッファフレーム６０は、石英ガラスを加工して内部が中空の横長矩形立体形状として形成されている。図３ないし図５に示すように、バッファフレーム６０は、例えば数ミリメール程度の厚さの横長矩形立体状のガラス成型体からなり、バーナヘッド８を内側に包み込むようにバーナヘッド８の周側面に一部を接合して一体化されている。バッファフレーム６０は、内部に中空のバッファ室１５，１６を形成するように成型した気密のフレーム壁体を有しており、実施形態においてはバーナヘッド８の外形の半分以上の部分でバーナヘッド８の外周面との間にバッファ室１５，１６を形成する状態でバーナヘッド８に接合されている。 In the embodiment, the buffer frame 60 is formed by processing quartz glass to have a horizontally elongated rectangular three-dimensional shape with a hollow interior. As shown in FIGS. 3 to 5, the buffer frame 60 is made of, for example, a horizontally elongated rectangular three-dimensional glass molded body with a thickness of about several millimeters, and surrounds the burner head 8 so as to wrap the burner head 8 inside. It is integrated by joining a part of The buffer frame 60 has an airtight frame wall molded to form the hollow buffer chambers 15, 16 therein, and in this embodiment, the burner head 8 extends over more than half of the burner head 8 profile. are joined to the burner head 8 in such a manner that buffer chambers 15 and 16 are formed between them and the outer peripheral surface of the burner head 8 .
　すなわち、図４，５、７に示すように、本実施形態ではバッファフレーム６０は、バーナヘッド８の背面２Ｆ（図６）に縦横に整列配置状態で設けられた背面ガス導入口群１１ａの多数のガス導入口を覆い、間に空間１５Ｓを設ける形態で第１フレーム壁体６０－１で被覆するように第１バッファ室１５を形成している。第１バッファ室１５は、ガス供給管８０から供給される燃焼ガスとしての酸素ガスのみを受け入れて一時貯留する酸素ガスのバッファリング手段であり、ガス供給管８０により供給されるガスを一時貯留してほぼ同時にバーナヘッド８のガス導入口群１１ａの各ガス導入口に酸素ガスを供給する。バッファフレーム６０の第１フレーム壁は内部に中空部としての第１バッファ空間１５Ｓを形成しつつ、フレーム壁端をバーナヘッドの周壁部に環状に気密溶融接合させ酸素ガス供給管８０との連通開口部分以外の空間１５Ｓを気密閉鎖している。ここにおいて、第１バッファ室１５は、バーナヘッド８の背面２Ｆに設けた多数のガス導入口（１１ａ）のそれぞれに連通するバッファ空間１５Ｓを有しており、したがって、バーナヘッドの８の背面２Ｆの多数のガス導入口（１１ａ）全体が空間１５Ｓを共有しそれぞれが該空間１５Ｓに連通している。 That is, as shown in FIGS. 4, 5, and 7, in this embodiment, the buffer frame 60 includes a large number of rear gas introduction port groups 11a arranged vertically and horizontally on the rear surface 2F (FIG. 6) of the burner head 8. The first buffer chamber 15 is formed so as to cover the gas introduction port of the first buffer chamber 15 with a first frame wall 60-1 with a space 15S provided therebetween. The first buffer chamber 15 is oxygen gas buffering means for receiving and temporarily storing only oxygen gas as combustion gas supplied from the gas supply pipe 80, and temporarily storing the gas supplied from the gas supply pipe 80. Oxygen gas is supplied to each gas introduction port of the gas introduction port group 11a of the burner head 8 substantially at the same time. A first frame wall of the buffer frame 60 forms a first buffer space 15S as a hollow portion inside, and an end of the frame wall is annularly hermetically welded to the peripheral wall portion of the burner head to communicate with the oxygen gas supply pipe 80. The space 15S other than the portion is airtightly closed. Here, the first buffer chamber 15 has a buffer space 15S that communicates with each of a number of gas introduction ports (11a) provided on the back surface 2F of the burner head 8. Therefore, the back surface 2F of the burner head 8 All of the large number of gas inlets (11a) share the space 15S and each communicates with the space 15S.
　そして、酸素ガス供給管８０は、図４、５，７に示すように、直管状の本管部８５と、接続部８６を介して二股に分岐して延長した分岐管８７、８７を有しており、それぞれの分岐管８７の端部がバッファフレーム６０の第１バッファ室１５に形成した開口８８において連通接合されており、これによって、酸素ガスがバーナヘッド８の背面２Ｆ側に設けたバッファフレームの第１フレーム壁体６０－１から第１バッファ室１５内に供給される。酸素ガス供給管８０は、バーナヘッド８の背面に接合して第１バッファ室１５を形成するバッファフレーム６０に接合することで、バーナヘッド８の背面側を支持している。 As shown in FIGS. 4, 5 and 7, the oxygen gas supply pipe 80 has a straight main pipe portion 85 and branch pipes 87, 87 which branch into two and extend through a connecting portion 86. The ends of the respective branch pipes 87 are connected to each other through openings 88 formed in the first buffer chamber 15 of the buffer frame 60, thereby allowing oxygen gas to flow into the buffer provided on the rear surface 2F side of the burner head 8. It is supplied into the first buffer chamber 15 from the first frame wall 60-1 of the frame. The oxygen gas supply pipe 80 supports the back side of the burner head 8 by joining to the buffer frame 60 forming the first buffer chamber 15 by joining to the back of the burner head 8 .
　一方、図４，５に示すように、本実施形態ではバッファフレーム６０は、バーナヘッド８の周壁面３Ｆ－１～３Ｆ－４に孔が周回するように設けられた側面ガス導入口１２ａ－１～１２ａ－４部分を、間に空間１６Ｓを設ける形態で第２フレーム壁体６０－２で被覆し第２バッファ室１６を形成している。 On the other hand, as shown in FIGS. 4 and 5, in the present embodiment, the buffer frame 60 has a side gas introduction port 12a-1 provided so as to circulate holes in the peripheral wall surfaces 3F-1 to 3F-4 of the burner head 8. 12a-4 are covered with a second frame wall 60-2 with a space 16S therebetween to form a second buffer chamber 16. As shown in FIG.
　実施形態において、第２バッファ室１６は、ガス供給管７０から供給する可燃性ガスとしての水素ガスのみを受け入れて一時貯留する水素ガスのバッファリング手段であり、ガス供給管７０により供給されるガスを一時貯留してほぼ同時にバーナヘッド８のガス導入口群１２ａ－１～１２ａ－４の各ガス導入口に水素ガスを供給する。第２バッファ室１６は、バーナヘッド８の周側部を間に第２バッファ室１６を介在させてバーナヘッド８の外形より大きな外形のフレーム壁体６０－２によりバーナヘッド８の周側面に接する空間を袋状に取り囲んで設けられている。なお、いずれのバッファ室１５，１６に燃焼又は可燃のいずれのガス１Ｇ，２Ｇを供給するかは限定的なものではなく、諸種の条件、仕様に則して任意に変更できる。 In the embodiment, the second buffer chamber 16 is hydrogen gas buffering means for receiving and temporarily storing only hydrogen gas as a combustible gas supplied from the gas supply pipe 70 . is temporarily stored, and hydrogen gas is supplied to each of the gas introduction port groups 12a-1 to 12a-4 of the burner head 8 at substantially the same time. The second buffer chamber 16 is in contact with the peripheral side of the burner head 8 by a frame wall 60-2 having a larger outer shape than the burner head 8 with the second buffer chamber 16 interposed therebetween. It is provided to surround the space like a bag. It should be noted that which of the combustible or combustible gases 1G, 2G is supplied to which of the buffer chambers 15, 16 is not limited, and can be arbitrarily changed according to various conditions and specifications.
　第２バッファ室１６は、バーナヘッド８の周側面全体に連通する空間１６Ｓを有しており、したがって、バーナヘッドの８の周側面の短辺方向幅の中間位置に一列状に周回形成された側面ガス導入口１２ａ－１～１２ａ－４全体が空間１６Ｓを共有しそれぞれが該空間１６Ｓに連通している。 The second buffer chamber 16 has a space 16S that communicates with the entire peripheral side surface of the burner head 8, and is therefore formed in a row at an intermediate position in the width direction of the short side of the peripheral side surface of the burner head 8. All of the side gas introduction ports 12a-1 to 12a-4 share the space 16S and communicate with the space 16S.
　一方、水素ガス供給管７０は、図４、７に示すように、直管状の本管部７５と、接続部７６を介して二股に分岐して延長した分岐管７７、７７を有しており、それぞれの分岐管７７の端部がバッファフレーム６０の第２バッファ室１６に設けた開口７８に接続され、これによって水素ガス供給管７０と第２バッファ室１６とは連通接合されている。これによって、水素ガスがバッファフレームの横長周壁の２か所から第２バッファ室１６内に供給される。 On the other hand, as shown in FIGS. 4 and 7, the hydrogen gas supply pipe 70 has a straight pipe-like main pipe portion 75 and branch pipes 77, 77 which branch into two and extend through a connecting portion 76. , the ends of the respective branch pipes 77 are connected to openings 78 provided in the second buffer chamber 16 of the buffer frame 60, whereby the hydrogen gas supply pipe 70 and the second buffer chamber 16 are connected and connected. As a result, hydrogen gas is supplied into the second buffer chamber 16 from two locations on the laterally elongated peripheral wall of the buffer frame.
図４、５，７に示すように第１バッファ室１５と、第２バッファ室１６とはそれぞれがバーナヘッド８に気密に一体接合されて、それぞれのバッファ室から異なるガスをバーナヘッド８の各ガス導入口（１１ａ、１２ａ－１～１２ａ－４）に導入させている。それと同時に本実施形態では、第１バッファ室１５と第２バッファ室１６の室内どうしが連通しない状態で相互に溶融接合されている。すなわち、実施形態において、第１バッファ室１５と第２バッファ室１６を画成する第１、第２フレーム壁体６０－１、６０－２が中間に隔壁９０を設けた状態で相互に溶融接合されている。これによって、バッファフレーム６０全体とバーナヘッド８が物理的に一体化し強度を保持している。 As shown in FIGS. 4, 5 and 7, the first buffer chamber 15 and the second buffer chamber 16 are air-tightly integrally joined to the burner head 8, and different gases are supplied to the burner head 8 from the respective buffer chambers. The gas is introduced into the gas inlets (11a, 12a-1 to 12a-4). At the same time, in this embodiment, the chambers of the first buffer chamber 15 and the second buffer chamber 16 are fused and joined to each other without communicating with each other. That is, in the embodiment, the first and second frame walls 60-1 and 60-2 that define the first buffer chamber 15 and the second buffer chamber 16 are melt-joined to each other with the partition wall 90 provided between them. It is As a result, the entire buffer frame 60 and the burner head 8 are physically integrated to maintain strength.
さらに、図７に示すように、実施形態において、水素及び酸素ガス供給管７０，８０の本管部７５、８５どうしは平行に配置されるように収束されてグリップ部９２においてグリップ管とそれぞれのガス供給管が相互に接合連結されおり、該グリップ部９２部分を加工用アクチュエータのチャックに把持させた状態で火炎加工する。 Further, as shown in FIG. 7, in the embodiment, the main pipe portions 75, 85 of the hydrogen and oxygen gas supply pipes 70, 80 are converged so as to be arranged parallel to each other, and the grip pipes and the respective grip pipes are connected at the grip portion 92. The gas supply pipes are connected to each other, and the flame processing is performed while the grip portion 92 is gripped by the chuck of the processing actuator.
次に、本発明の実施形態のバーナヘッド装置１０の作用について、説明すると、図４，８、９、１０にも示すようにガス噴射用スイッチをオンにすると、ガス供給管７０、８０から同時に燃焼用ガスとしての酸素ガスと、可燃ガスとしての水素ガスがそれぞれの供給管に案内されてそれぞれ、第１、第２バッファ室１５，１６内に供給される。 Next, the operation of the burner head device 10 of the embodiment of the present invention will be explained. When the gas injection switch is turned on as shown in FIGS. Oxygen gas as combustion gas and hydrogen gas as combustible gas are guided to respective supply pipes and supplied into first and second buffer chambers 15 and 16, respectively.
酸素ガスは、酸素ガス供給管８０からバーナヘッド８の背面２Ｆに気密接合される第１バッファ室１５に進入し背面ガス導入口群１１ａの各ガス導入口から酸素ガス通路３１を直線状にまっすぐに通流してそのまま前面１Ｆのガス噴出し口群２１ｂの各吹き出し口からバーナヘッド前面の前方に向けて噴出される。このとき、噴出される酸素ガスは、図２、４，５，６に示すように横長矩形状の噴出し領域と噴出し先領域を形成するように噴出される。 Oxygen gas enters the first buffer chamber 15 which is airtightly joined to the rear surface 2F of the burner head 8 from the oxygen gas supply pipe 80, and flows straight through the oxygen gas passage 31 from each gas introduction port of the rear gas introduction port group 11a. , and is jetted forward from the front face of the burner head from each jetting port of the gas jetting port group 21b on the front face 1F. At this time, the ejected oxygen gas is ejected so as to form a horizontally long rectangular ejection area and an ejection destination area as shown in FIGS.
一方、水素ガスは、水素ガス供給管７０からバーナヘッド８の周側面を囲繞するバッファフレーム６０の第２フレーム壁体６０－２の第２バッファ室１６内に進入しさらに側面ガス導入口群１２ａ－１～１２ａ－４の各ガス導入口から水素ガス通路４１内を通流してバーナヘッド８の前面１Ｆのガス噴出し口群２１ｂ、２２ｂ－１～２２ｂ－４の各ガス噴出し口から水素ガスを噴き出す。この時、水素ガスの一部は図９（ａ），（ｂ）のようにバーナヘッド８の側面３Ｆ－１～３Ｆ－４から進入して通路をＬ字状に屈曲案内されて前面１Ｆから噴き出す。また、他の水素ガスの一部は、図９（ｃ）のように、貫通孔５１から進入し、これに連通しつつそれぞれＬ字状に５つに分岐された枝通路５２を経由して前面１Ｆから噴き出す。実施形態では、第１バッファ室１５から導入されバーナヘッド８内を直進しその前面から噴出されるガスは燃焼ガス１Ｇであり、第２バッファ室１６から導入されバーナヘッド８内を経由してその前面から噴出されるガスは可燃ガス２Ｇであることにより、燃焼ガスと可燃ガスが接触しないように完全に遮断しつつガスの種類ごとに通流するルートを異ならせて管理やメンテナンスを容易にさせることができる。 On the other hand, the hydrogen gas enters from the hydrogen gas supply pipe 70 into the second buffer chamber 16 of the second frame wall 60-2 of the buffer frame 60 surrounding the peripheral side of the burner head 8, and further into the side gas inlet group 12a. -1 to 12a-4 through the hydrogen gas passage 41 and through the gas ejection port groups 21b and 22b-1 to 22b-4 on the front face 1F of the burner head 8. blow out gas. At this time, part of the hydrogen gas enters from the side surfaces 3F-1 to 3F-4 of the burner head 8 as shown in FIGS. erupt. Further, as shown in FIG. 9(c), part of the other hydrogen gas enters through the through hole 51 and passes through the branch passages 52 that are branched into five L-shaped passages while communicating with the through hole 51. It shoots out from the front 1F. In this embodiment, the combustion gas 1G is introduced from the first buffer chamber 15 and flows straight through the burner head 8 and is ejected from the front surface thereof. The gas ejected from the front is combustible gas 2G, so that the combustible gas and combustible gas are completely cut off so that they do not come into contact with each other, and the flow route is made different for each type of gas to facilitate management and maintenance. be able to.
バーナヘッド８の前面１Ｆの噴出し口群２１ｂ、２２ｂ－１～２２ｂ４は、バーナヘッド８のソリッド体の形状に応じて略横長四角形状に集中して口孔が形成されており、これによって、燃焼ガス及び可燃ガスが同時に横長四角形状の広域な加炎加工領域を形成し、加工領域を広く確保して加工時間短縮、所望の加工形状に則した火炎加工の実施、加工精度の確保を実現することができる。 The ejection port group 21b, 22b-1 to 22b4 on the front face 1F of the burner head 8 is formed with ports concentrated in a substantially laterally long rectangular shape according to the shape of the solid body of the burner head 8. Combustion gas and combustible gas form a wide rectangular flame processing area at the same time, ensuring a wide processing area to shorten processing time, perform flame processing according to the desired processing shape, and ensure processing accuracy. can do.
本発明のバーナヘッド装置１０は、上記した実施形態の構成のみに限定されるものではない。例えば、背面、周側面のガス導入孔の直径サイズや前面のガス噴出し口孔の直径サイズは実施例のサイズに限定されるものではなく、ガスの供給側の流速その他の条件に応じて任意サイズに設定することができる。また、前面や周側面における孔の配置や孔の数も実施例構成に限定されるものではない。また、バーナヘッド８の内部のガス通路の配置構成やＬ字その他のルート構成も実施例構成に限定されない。例えば、直角Ｌ字でなく屈曲が９０度より浅い、あるいはさらに深い屈曲構成としてもよい。また、第１バッファ室１５と第２バッファ室１６とは必ずしも連結している必要はない。例えば、バッファフレーム６０の第１、第２フレーム壁体６０－１，６０－２を切り離しそれぞれ個別にのみ第２バッファ室１６が周側面側のガス導入口群１２ａ－１～１２ａ－４の多数のガス導入口に空間を共有されるように第２フレーム壁をバーナヘッド８に連結接合させ、第１バッファ室１５が背面側のガス導入口群１１ａの多数のガス導入口に空間を共有されるように第１フレーム壁をバーナヘッド８に連結接合させてもよい。また、バーナヘッドの構成材料は、石英ガラスに限定されるものではなく、その他のガラス、耐火物、ファインセラミックス等の非金属無機材料、耐熱性、耐食性を有する金属、合金材料等を用いることができる。 The burner head device 10 of the present invention is not limited to the configuration of the embodiment described above. For example, the diameter size of the gas introduction holes on the back and peripheral side surfaces and the diameter size of the gas ejection port holes on the front surface are not limited to the sizes in the embodiments, and are arbitrary according to the flow velocity on the gas supply side and other conditions. size can be set. Also, the arrangement of the holes and the number of holes on the front surface and the peripheral side surface are not limited to those of the embodiment. Also, the arrangement configuration of the gas passages inside the burner head 8 and the L-shaped and other route configurations are not limited to those of the embodiment. For example, instead of the right-angled L-shape, the bending configuration may be shallower than 90 degrees or even deeper. Also, the first buffer chamber 15 and the second buffer chamber 16 do not necessarily have to be connected. For example, the first and second frame wall bodies 60-1 and 60-2 of the buffer frame 60 are cut off and the second buffer chambers 16 are individually separated from many of the gas introduction port groups 12a-1 to 12a-4 on the circumferential side. The second frame wall is connected and joined to the burner head 8 so that the space is shared by the gas inlets of the first buffer chamber 15, and the space is shared by the many gas inlets of the gas inlet group 11a on the rear side. The first frame wall may be connected and joined to the burner head 8 as in the case of FIG. In addition, the constituent material of the burner head is not limited to quartz glass, but other glass, refractories, non-metallic inorganic materials such as fine ceramics, metals having heat resistance and corrosion resistance, alloy materials, etc. may be used. can.
上記の実施形態による例で実現されるバーナヘッド装置１０は、ガスの噴出し面１Ｆを有するブロック体のバーナヘッド８であり、多数のガス通路３１、４１を内部に形成すると共に多数のガス通路３１、４１に連通する多数のガスの噴出し口２１ｂ、２２ｂを設けた噴出し面１Ｆから燃焼ガス１Ｇと可燃ガス２Ｇを噴き出すバーナヘッド８と、噴出し面１Ｆ以外のバーナヘッド８の部分（ＸＦ）に設けられた燃焼ガス供給用の多数のガス導入口を含む第１導入口群１１ａと、噴出し面以外のバーナヘッド８の部分ＸＦに設けられた可燃ガス供給用の多数のガスの導入口を含む第２導入口群（１２ａ―１～１２ａ―４）と、燃焼ガス供給用の多数のガスの導入口と共有する空間を有する第１バッファ室１５と、可燃ガス供給用の多数のガスの導入口と共有する空間を有する第２バッファ室１６と、を含むことにより、バーナヘッドの外形形状やサイズ等を変更、調整して多数のガスの噴出し口群の配置形状や広がり等を変更することで自在の火炎加工領域を生成することができる。例えば、横長にしたい場合や広い加工領域を得たい場合にも対応できる。この結果、火炎加工対象物の範囲が広くなり、加工分野、加工精度も大幅に向上させることが可能である。 The burner head device 10 realized in the example according to the above embodiment is a block-shaped burner head 8 having a gas ejection surface 1F, in which a large number of gas passages 31, 41 are formed and a large number of gas passages 31, 41 are formed. The burner head 8 for ejecting the combustion gas 1G and the combustible gas 2G from the ejection surface 1F provided with a large number of gas ejection ports 21b and 22b communicating with 31 and 41, and the portion of the burner head 8 other than the ejection surface 1F ( XF), which includes a large number of gas inlets for supplying combustion gas, and a large number of gases for supplying combustible gas, which are provided in a portion XF of the burner head 8 other than the ejection surface. A second inlet group (12a-1 to 12a-4) including inlets, a first buffer chamber 15 having a space shared with many gas inlets for supplying combustion gas, and many for supplying combustible gas. By including a second buffer chamber 16 having a space shared with the gas introduction port, the outer shape, size, etc. of the burner head can be changed and adjusted, and the arrangement shape and spread of the group of many gas ejection ports can be changed. By changing the parameters, etc., it is possible to generate a free flame processing area. For example, it is possible to cope with the case of wanting to make it horizontally long or the case of wanting to obtain a wide processing area. As a result, the range of objects to be flame processed is widened, and the field of processing and processing accuracy can be greatly improved.
また、前面と側面と背面を有するブロック体からなるバーナヘッドであり、多数のガス通路を内部に形成すると共に多数のガス通路に連通する多数のガスの噴出し口を設けた前面から燃焼ガスと可燃ガスを噴き出すバーナヘッドと、バーナヘッドの背面に設けられた多数のガスの導入口と、バーナへッドの側面に設けられた多数のガスの導入口と、背面側の多数のガスの導入口と共有する空間を有する第１バッファ室と、側面側の多数のガスの導入口と共有する空間を有する第２バッファ室と、を含むことにより、火炎加工領域を自在に変更でき、火炎加工対象物の範囲が広くなり、加工分野、加工精度も大幅に向上させ得るバーナヘッド装置を具体的に製作することができる。 Also, the burner head is a block body having a front surface, a side surface, and a back surface, and has a large number of gas passages formed therein and a large number of gas ejection ports communicating with the large number of gas passages. A burner head that blows out combustible gas, a large number of gas inlets provided on the back of the burner head, a large number of gas inlets provided on the side of the burner head, and a large number of gas inlets on the back side. By including a first buffer chamber having a space shared with the port and a second buffer chamber having a space shared with a large number of gas introduction ports on the lateral side, the flame processing area can be freely changed. It is possible to specifically manufacture a burner head device that can handle a wide range of objects and greatly improve the processing field and processing accuracy.
また、第１バッファ室と、第２バッファ室と、をフレーム壁により形成するバッファフレームが設けられており、バーナヘッドとバッファフレームは石英ガラス製であり、少なくとも第１バッファ室と、第２バッファ室それぞれがバーナヘッドの多数のガスの導入口に連通するように、バッファフレームは、バーナヘッドに接合されて一体化されていることにより、バーナヘッドと第１、第２バッファ室を構成材料で一体化することにより、精密加工仕上がり精度が良好で故障が少なく耐久性が高い共に、火炎加工用バーナとして取扱いが容易である上に、石英ガラスを素材とすることにより耐熱性、耐食性に優れる。 A buffer frame is provided in which a first buffer chamber and a second buffer chamber are formed by frame walls, the burner head and the buffer frame are made of quartz glass, and at least the first buffer chamber and the second buffer chamber are provided. The buffer frame is joined to and integrated with the burner head so that each of the chambers communicates with a large number of gas inlets of the burner head, so that the burner head and the first and second buffer chambers are made of material. By integrating the burner, the finishing precision of precision machining is good, failure is low, and durability is high. In addition, it is easy to handle as a burner for flame processing.
また、第１バッファ室と、第２バッファ室とは室内どうしが連通しないように隔壁で分離された状態でバーナヘッドを内側に包み込むようにバーナヘッドと接合一体化されていることにより、加工用バーナとしての作業上の取扱いが簡単で管理、メンテナンスも容易であるとともに、バーナヘッドと両バッファ室が一体化されることで装置全体の強度が高くなり、アクチュエータのチャッキング操作などに耐え得る耐久性を保持し得る。 In addition, the first buffer chamber and the second buffer chamber are separated by a partition so that the chambers do not communicate with each other, and are joined and integrated with the burner head so as to wrap the burner head inside. The burner is easy to handle, easy to manage and maintain, and by integrating the burner head and both buffer chambers, the overall strength of the device increases, and it is durable enough to withstand the chucking operation of the actuator. can retain their sexuality.
バーナヘッドは、前面が一方向に長い噴出し面であることとすることにより、例えば横長い加工領域を有する対象物に対しても横長の火炎加工領域を確実に形成することができ、加工時間短縮、加工精度向上に資する。 Since the burner head has a jet surface that is long in one direction, it is possible to reliably form a horizontally long flame processing area even for an object that has a horizontally long processing area. Contributes to shortening and improving machining accuracy.
また、バーナヘッドは、背面側のガス導入口に連通しつつ前面側のいくつかのガス噴出し口に直通する第１ガス通路群と、側面側のガス導入口に連通しつつ前面側のいくつかのガス噴出し口に連通する第２ガス通路群と、を含むことにより、燃焼ガスと可燃ガスとの接触を確実に防止しつつガス通路の管理、メンテナンスを容易に行える。 In addition, the burner head includes a first gas passage group communicating with the gas introduction port on the back side and directly communicating with some gas ejection ports on the front side, and a group of gas passages on the front side communicating with the gas introduction port on the side surface side. By including the second gas passage group communicating with the gas ejection port, it is possible to reliably prevent contact between the combustion gas and the combustible gas while facilitating management and maintenance of the gas passages.
また、第２ガス通路群は、バーナヘッドの側面側ガス導入口から前面側ガス噴出し口に連通する直通及び／又は屈曲ガス通路を含むことにより、バーナヘッドの側面側から前面側にガスの通路を具体的に形成させることができる。 In addition, the second gas passage group includes straight and/or curved gas passages communicating from the side gas introduction port of the burner head to the front gas ejection port, thereby allowing gas to flow from the side side to the front side of the burner head. The passage can be specifically formed.
また、第１バッファ室から導入されバーナヘッド内を直進しその前面から噴出されるガスは燃焼ガスであり、第２バッファ室から導入されバーナヘッド内を経由してその前面から噴出されるガスは可燃ガスであることにより、燃焼ガスと可燃ガスとの接触を確実に防止しつつガス通路の管理、メンテナンスを容易に行える。 Further, the gas introduced from the first buffer chamber, traveling straight through the burner head, and ejected from the front surface is combustion gas, and the gas introduced from the second buffer chamber, passing through the burner head, and ejected from the front surface is combustion gas. Since it is a combustible gas, it is possible to reliably prevent contact between combustion gas and combustible gas while facilitating management and maintenance of gas passages.
　以上のように、本発明のバーナヘッド装置によれば、ピンポイント等の従来の火炎加工領域を大幅に広げるとともに任意の加工領域形状の加工範囲を形成できるから、被加工物の対象範囲を大幅に大きくでき、さらに、加工時間短縮、加工精度向上等を実現することが可能である。 As described above, according to the burner head device of the present invention, the conventional flame machining area such as pinpoint can be greatly expanded, and the machining area can be formed in an arbitrary machining area shape. In addition, it is possible to shorten the machining time and improve the machining accuracy.
　本発明のバーナヘッド装置は、家庭用調理器具、半導体プロセス用の素材加工、科学研究・開発用品、クリーンルーム、実験・研究用器具等の加工用途、その他火炎加工の幅広い分野において利用することができる。 INDUSTRIAL APPLICABILITY The burner head device of the present invention can be used in a wide range of fields such as household cooking utensils, material processing for semiconductor processes, scientific research and development supplies, clean rooms, experimental and research instruments, and other flame processing applications. .
　１Ｆ　前面（噴出し面）
　２Ｆ　背面
　３Ｆ－１～３Ｆ－４　側面
　１Ｇ　燃焼ガス
　２Ｇ　可燃ガス
　８　バーナヘッド
　１０　バーナヘッド装置
　１１ａ　背面ガス導入口群
１２ａ－１～１２ａ－４　側面ガス導入口群
２１　前面ガス噴出し口群
２２ｂ－１～２２ｂ－４　側面ガス噴出し口群
１５　第１バッファ室
１５Ｓ　バッファ空間
１６　第２バッファ室
１６Ｓ　バッファ空間
３１　酸素ガス通路
３１ａ　第１ガス通路群
４１　水素ガス通路
４１ａ　第２ガス通路群
６０　バッファフレーム
７０　水素ガス供給管
８０　酸素ガス供給管
  1F front (spout surface)
2F Rear 3F-1 to 3F-4 Side 1G Combustion gas 2G Combustible gas 8 Burner head 10 Burner head device 11a Rear gas introduction port group 12a-1 to 12a-4 Side gas introduction port group 21 Front gas ejection port group 22b- 1 to 22b-4 Side gas outlet group 15 First buffer chamber 15S Buffer space 16 Second buffer chamber 16S Buffer space 31 Oxygen gas passage 31a First gas passage group 41 Hydrogen gas passage 41a Second gas passage group 60 Buffer frame 70 hydrogen gas supply pipe 80 oxygen gas supply pipe

Claims (8)

  1. 　ガスの噴出し面を有するブロック体からなるバーナヘッドであり、多数のガス通路を内部に形成すると共に多数のガス通路に連通する多数のガスの噴出し口を設けた噴出し面から燃焼ガスと可燃ガスを噴き出すバーナヘッドと、
    　噴出し面以外のバーナヘッドの部分に設けられた燃焼ガス供給用の多数のガス導入口を含む第１導入口群と、
    噴出し面以外のバーナヘッドの部分に設けられた可燃ガス供給用の多数のガスの導入口を含む第２導入口群と、
    　燃焼ガス供給用の多数のガスの導入口と共有する空間を有する第１バッファ室と、
    可燃ガス供給用の多数のガスの導入口と共有する空間を有する第２バッファ室と、を含むことを特徴とするバーナヘッド装置。     A burner head consisting of a block body having a gas ejection surface, and having a large number of gas passages formed therein and provided with a large number of gas ejection ports communicating with the large number of gas passages. a burner head that spouts combustible gas;
    a first inlet group including a large number of gas inlets for supplying combustion gas provided in a portion of the burner head other than the ejection surface;
    a second inlet group including a large number of gas inlets for supplying combustible gas provided in a portion of the burner head other than the ejection surface;
    a first buffer chamber having a space in common with a number of gas inlets for supplying combustion gases;
    a second buffer chamber having a common space with multiple gas inlets for supplying combustible gas.
  2. 　前面と側面と背面を有するブロック体からなるバーナヘッドであり、多数のガス通路を内部に形成すると共に多数のガス通路に連通する多数のガスの噴出し口を設けた前面から燃焼ガスと可燃ガスを噴き出すバーナヘッドと、
    　バーナヘッドの背面に設けられた多数のガスの導入口と、
    　バーナへッドの側面に設けられた多数のガスの導入口と、
    　背面側の多数のガスの導入口と共有する空間を有する第１バッファ室と、
    側面側の多数のガスの導入口と共有する空間を有する第２バッファ室と、を含むことを特徴とするバーナヘッド装置。     A burner head consisting of a block body having a front surface, a side surface and a back surface. A large number of gas passages are formed inside and combustion gas and combustible gas are emitted from the front surface provided with a large number of gas ejection ports communicating with the large number of gas passages. with a burner head that spouts
    a large number of gas inlets provided on the back of the burner head;
    a large number of gas introduction ports provided on the side surface of the burner head;
    a first buffer chamber having a space shared with many gas inlets on the back side;
    a second buffer chamber having a space shared with a number of gas inlets on the lateral side.
  3. 第１バッファ室と、第２バッファ室と、をフレーム壁により形成するバッファフレームが設けられており、
    バーナヘッドとバッファフレームは石英ガラス製であり、
    少なくとも第１バッファ室と、第２バッファ室それぞれがバーナヘッドの多数のガスの導入口に連通するように、バッファフレームは、バーナヘッドに接合されて一体化されていることを特徴とする請求項２記載のバーナヘッド装置。     A buffer frame is provided in which a first buffer chamber and a second buffer chamber are formed by frame walls,
    The burner head and buffer frame are made of quartz glass,
    The buffer frame is joined and integrated with the burner head so that at least the first buffer chamber and the second buffer chamber communicate with a plurality of gas inlets of the burner head, respectively. 3. The burner head device according to 2.
  4. 第１バッファ室と、第２バッファ室とは室内どうしが連通しないように隔壁で分離された状態でバーナヘッドを内側に包み込むようにバーナヘッドと接合一体化されていることを特徴とする請求項２又は３記載のバーナヘッド装置。 The first buffer chamber and the second buffer chamber are joined and integrated with the burner head so as to enclose the burner head while being separated by a partition so that the chambers do not communicate with each other. 4. Burner head device according to 2 or 3.
  5. バーナヘッドは、前面が一方向に長い噴出し面であることを特徴とする請求項２ないし４のいずれかに記載のバーナヘッド装置。 5. The burner head device according to claim 2, wherein the burner head has a jet surface whose front surface is elongated in one direction.
  6. バーナヘッドは、背面側のガス導入口に連通しつつ前面側のいくつかのガス噴出し口に直通する第１ガス通路群と、
    側面側のガス導入口に連通しつつ前面側のいくつかのガス噴出し口に連通する第２ガス通路群と、を含むことを特徴とする請求項２ないし５のいずれかに記載のバーナヘッド装置。     The burner head includes a first gas passage group that communicates with the gas introduction port on the back side and directly communicates with several gas ejection ports on the front side;
    6. The burner head according to any one of claims 2 to 5, further comprising a second gas passage group that communicates with the gas introduction port on the side surface and also communicates with several gas ejection ports on the front side. Device.
  7. 第２ガス通路群は、バーナヘッドの側面側ガス導入口から前面側ガス噴出し口に連通する直通及び／又は屈曲ガス通路を含むことを特徴とする請求項６記載のバーナヘッド装置。 7. The burner head apparatus according to claim 6, wherein the second gas passage group includes straight and/or curved gas passages communicating from the side gas introduction port of the burner head to the front gas ejection port.
  8. 第１バッファ室から導入されバーナヘッド内を直進しその前面から噴出されるガスは燃焼ガスであり、
    第２バッファ室から導入されバーナヘッド内を経由してその前面から噴出されるガスは可燃ガスであることを特徴とする請求項２ないし７のいずれかに記載のバーナヘッド装置。
          The gas introduced from the first buffer chamber, traveling straight through the burner head, and ejected from the front thereof is combustion gas,
    8. A burner head apparatus according to claim 2, wherein the gas introduced from the second buffer chamber, passed through the burner head and ejected from the front surface thereof is combustible gas.
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