WO2022183816A1 - Torsion structure of scanning galvanometer, and scanning galvanometer and manufacturing method therefor - Google Patents

Torsion structure of scanning galvanometer, and scanning galvanometer and manufacturing method therefor Download PDF

Info

Publication number
WO2022183816A1
WO2022183816A1 PCT/CN2021/140840 CN2021140840W WO2022183816A1 WO 2022183816 A1 WO2022183816 A1 WO 2022183816A1 CN 2021140840 W CN2021140840 W CN 2021140840W WO 2022183816 A1 WO2022183816 A1 WO 2022183816A1
Authority
WO
WIPO (PCT)
Prior art keywords
torsion
spacer
scanning galvanometer
torsion beam
base
Prior art date
Application number
PCT/CN2021/140840
Other languages
French (fr)
Chinese (zh)
Inventor
高永丰
叶良琛
向少卿
Original Assignee
上海禾赛科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上海禾赛科技有限公司 filed Critical 上海禾赛科技有限公司
Publication of WO2022183816A1 publication Critical patent/WO2022183816A1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements

Definitions

  • the invention relates to the field of laser detection, in particular to a torsion structure of a scanning galvanometer, a scanning galvanometer and a manufacturing method thereof.
  • Lidar is a radar system that detects the position, velocity and other characteristics of a target by emitting a laser beam.
  • lidar The working principle of lidar is to transmit a detection signal (laser beam) to the target, and then compare the received signal (target echo) reflected from the target with the transmitted signal. After proper processing, the relevant characteristics of the target can be obtained. parameters such as target distance, bearing, altitude, speed, attitude, and even shape. Lidar can detect, track and identify targets such as aircraft and missiles.
  • Lidar is divided into mechanical, hybrid solid-state and pure solid-state lidar.
  • solid-state LiDAR in order to reduce the cost and cancel the mechanical rotation structure, one of the methods used is to use a MEMS galvanometer to integrate all the mechanical components into a single chip, which is produced by a semiconductor process.
  • the existing scanning galvanometers often have the problem that the size of the mirror surface is too small, or the processing difficulty is too large.
  • the problem solved by the present invention is: how to form a scanning galvanometer with a large mirror surface size without increasing the difficulty of the process.
  • the present invention provides a torsion structure of a scanning galvanometer, comprising: at least one torsion beam, and the at least one torsion beam is stacked and disposed on the spacer.
  • the at least one torsion beam and the spacer are fixed by welding.
  • the torsion structure includes: a first torsion beam and a second torsion beam, and an extension direction of the second torsion beam intersects with an extension direction of the first torsion beam.
  • the first torsion beam and the second torsion beam are stacked in sequence, the stacking direction is perpendicular to the extension direction of the first torsion beam, and the stacking direction is perpendicular to the extension direction of the second torsion beam.
  • the present invention also provides a method for forming a torsion structure of a scanning galvanometer, comprising: stacking at least one torsion beam on a spacer; performing welding so that the at least one torsion beam and the spacer are formed between the torsion beam and the spacer. fixed between.
  • the step of arranging the at least one torsion beam includes: sequentially stacking a first torsion beam and a second torsion beam with intersecting extension directions on the partition, and the stacking direction is perpendicular to the extension of the first torsion beam. direction, the stacking direction is perpendicular to the extending direction of the second torsion beam.
  • the present invention provides a scanning galvanometer, comprising: a base; a torsion structure, the torsion structures are stacked on the base and are suitable for providing a torsion moment; a first spacer, the first spacer is located between the base and the base. between the torsion structures; a reflection mirror, the reflection mirrors are stacked on the torsion structure; a second partition, the second partition is located between the reflection mirror and the torsion structure.
  • the base, the torsion structure, the reflector, the first spacer and the second spacer are fixed by welding.
  • the method further includes: solder, the solder is located between the substrate, the torsion structure, the reflector, the first spacer and the second spacer.
  • the material of the reflector is a non-weldable material; the assembly surface of the reflector has a connection layer, and the connection layer is a weldable material.
  • the present invention also provides a method for manufacturing a scanning galvanometer, including: providing a base; stacking and arranging a first separator on the base; stacking a torsion structure on the first separator; A second spacer is laminated on the structure; a mirror is laminated on the second spacer; a welding process is performed to make the base, the first spacer, the torsion structure, the second spacer and the The mirrors are fixed between them.
  • the manufacturing method further includes: Set the solder.
  • the method further includes: fixing a stack assembly by a clamp, where the stack assembly includes the base, the first spacer, the torsion structure, the second spacer and the Reflector.
  • a welding process is performed.
  • the material of the reflector is a non-weldable material; before the step of stacking the reflectors, the method further includes: forming a connection layer on the assembly surface of the reflector, and the connection layer is a weldable material.
  • the material of the reflector is a weldable material; before the step of stacking the reflector, the method further includes: polishing the mounting surface of the reflector.
  • the first spacer, the torsion structure, the spacer and the reflector are sequentially stacked on the base and fixed by welding.
  • a fixed laminated structure can be realized by welding, which can realize complex structures with different levels of requirements in the off-plane direction, so that the processing capability of the off-plane structure can be improved to meet the design requirements of the scanning galvanometer, and the scanning galvanometer can be
  • the structure is more compact, the overall size is smaller, and the use of MEMS technology can be avoided to effectively control the process cost.
  • solder is disposed between the substrate, the torsion structure, the mirror, the first spacer and the second spacer.
  • the stacked assembly before performing the welding process, may be fixed by a clamp, and the stacked assembly may include a base, the first spacer, the torsion structure, the second spacer, and the reflector , that is to say, after all the structural components are stacked and arranged, the fixing between the components is realized by one welding, which not only simplifies the process and reduces the process steps, but also effectively improves the uniformity of the welding process among the components and balances the various components.
  • the stress on the part reduces the possibility of deformation.
  • 1 to 6 are schematic structural diagrams corresponding to each step of an embodiment of a scanning galvanometer manufacturing method of the present invention
  • FIG. 7 is a schematic structural diagram corresponding to the steps of another embodiment of the scanning galvanometer manufacturing method of the present invention.
  • FIG. 8 is a schematic structural diagram corresponding to still another embodiment of the manufacturing method of a scanning galvanometer according to the present invention.
  • the existing scanning galvanometers are generally formed by MEMS technology.
  • the strength of the structural part under the MEMS process cannot be guaranteed; moreover, the processing cost of the MEMS process is too high, and there is a cost disadvantage.
  • the existing scanning galvanometers based on metal structures can realize complex structures within one layer, the ability to realize multi-layer complex structures in the off-plane direction is insufficient.
  • the mirror surface with complex graphics it is impossible to process different components of the scanning galvanometer synchronously, which easily increases the process procedure and takes time and effort.
  • the present invention provides a processing method of a scanning galvanometer, comprising:
  • a mirror is provided; a welding process is performed to fix the base, the first spacer, the torsion structure, the second spacer and the mirror.
  • the first spacer, the torsion structure, the spacer and the reflector are sequentially stacked on the base and fixed by welding.
  • a fixed laminated structure can be realized by welding, which can realize complex structures with different levels of requirements in the off-plane direction, so that the processing capability of the off-plane structure can be improved to meet the design requirements of the scanning galvanometer, and the scanning galvanometer can be
  • the structure is more compact, the overall size is smaller, and the use of MEMS technology can be avoided to effectively control the process cost.
  • FIG. 1 to FIG. 6 schematic structural diagrams corresponding to each step of an embodiment of a method for fabricating a scanning galvanometer according to the present invention are shown.
  • FIG. 2 is a view of the structure in block 010 of FIG. 1 along direction A, a substrate 110 is provided.
  • the base 110 serves as the base of the scanning galvanometer, which can provide a basis for the fabrication and assembly of the scanning galvanometer, and also provide mechanical support for other structural components of the scanning galvanometer.
  • the substrate 110 in the step of providing the substrate 110 , is disposed on the processing jig 100 .
  • a plurality of substrates 110 are arranged on the processing jig 100 .
  • M ⁇ N substrates 110 are arranged on the processing jig 100 .
  • the scanning galvanometers are fabricated on the basis of the M ⁇ N substrates 110 , and finally M ⁇ N finished products of the scanning galvanometers can be obtained at the same time. In this way, batch processing of scanning galvanometers can be realized.
  • a plurality of substrates can also be arranged in sequence on the flow production line, so as to realize batch processing of scanning galvanometers.
  • the substrate 110 is rectangular.
  • the shape of the base may also be other shapes such as a frame shape, a circle, and the like.
  • first spacers 112 are stacked on the base 110 ; and torsion structures 120 are stacked on the first spacers 112 .
  • FIG. 3 to FIG. 5 are all views corresponding to FIG. 2 .
  • the torsion structure 120 is used to support the mirror and provide torque for the reciprocating motion of the mirror; the first spacer 112 is used to support and fix the torsion structure 120 on the base 110, and is used for A space is occupied between the torsion structure 120 and the base 110 to form a gap, so as to provide a margin space for the vibration of the torsion structure 120 and the mirror.
  • the manufacturing method further includes: disposing solder.
  • solder Through the selection of solder, the temperature of the subsequent welding process can be controlled, and the controllable process temperature can effectively reduce the deformation of each component, which is beneficial to improve the accuracy of the over-formed scanning galvanometer.
  • the selection of solder is based on the combination of the material of the welding surface, considering the feasibility, convenience and cost of the process operation. For example, when the welding surface is copper, nickel, etc., the solder can be selected from solder. On the one hand, the price of solder is low, and the solder can weld copper and nickel very firmly. On the other hand, the welding of solder does not require too high welding temperature. The precision part of the galvanometer is very friendly.
  • the type of the solder and the thickness of the solder are related to the process parameters such as the process temperature and process time of the subsequent welding process. Therefore, it is necessary to comprehensively consider the welding process based on the design requirements of the scanning galvanometer. parameter to set the thickness of the solder.
  • the thickness of the solder needs to be set so that the stacked components remain parallel. Each stacked component is obtained by linear cutting or etching, and it is difficult to keep the same thickness everywhere, for example, as shown in FIG.
  • the distance between one end of the spacer 112 and the surface of the substrate 110 is D, and the distance between the other end and the surface of the substrate 110 is d.
  • Thickness compensation can be achieved by setting the thickness of the solder, that is, to compensate for the difference between the distance D and the distance d . Similarly, this happens between other stacked components. The solder then acts as a thickness compensation, combining the stacked components to make them parallel to each other, improving the quality of the finished galvo mirror and enabling more precise reflection of laser light in lidar.
  • solder 111 a is placed on the substrate 110 ; the first spacer 112 is placed on the solder 111 a ; Solder 111b is disposed above the first separator 112; and a torsion structure 120 is disposed above the solder 111b.
  • the manufacturing method before the step of performing the welding process, further includes: fixing a stack assembly by a clamp, and the stack assembly at least includes the base 110 and the first spacer 112 .
  • the positions of the solders 111a/111b are determined based on the specific structure of the scanning galvanometer.
  • the solder 111a is used to realize the fixed connection between the first spacer 112 and the base 110
  • the solder 111b is used to realize the fixed connection between the torsion structure 120 and the first spacer 112 Therefore, the disposition position of the solder 111a corresponds to the position of the first spacer 112 on the substrate 110, and the disposition position of the solder 112b corresponds to the torsion structure 120 and the first spacer 112.
  • the position of the contact corresponds to.
  • the torsion structure 120 includes: at least one torsion beam, and the at least one torsion beam is stacked on the partition.
  • the torsion structure 120 includes: a first torsion beam 121 and a second torsion beam 122 located on the first partition 112 , the second torsion beam 122
  • the extension direction of the first torsion beam 121 intersects with the extension direction of the first torsion beam 121 .
  • the extending direction of the second torsion beam 122 is perpendicular to the extending direction of the first torsion beam 121. 4 is a view of the torsion structure 120 in FIG. 3 along the B direction.
  • second spacers 123 are stacked on the torsion structure 120 ; mirrors 130 are stacked on the second spacers 123 .
  • the reflector 130 is used to reflect light; the second partition 123 is used to support and fix the reflector 130 on the torsion structure 120 and between the reflector 130 and the torsion structure 120 The space is occupied to form a gap, thereby providing a margin space for the vibration of the mirror 130 .
  • the reflecting mirror 130 includes a reflecting surface 132 and a mounting surface 131 disposed opposite to each other.
  • the reflecting surface 132 facing away from the base 110 is suitable for reflecting light
  • the mounting surface 131 facing the base 110 is suitable for reflecting light. for welding installation.
  • the material of the reflector 130 is a non-weldable material; therefore, before the step of stacking the reflector 130 , the manufacturing method further includes: A connection layer 133 is formed on the mounting surface 131 of the reflector 130 , and the connection layer 133 is made of a solderable material.
  • non-weldable materials refer to materials that cannot be welded such as glass, quartz, sapphire, silicon carbide, etc., or iron-based metals such as stainless steel and cast iron that cannot be welded, or metals that cannot be welded such as aluminum.
  • Weldable materials refer to materials that can be welded, such as copper, gold, silver and other weldable metals.
  • the step of forming the connection layer 133 includes: forming the connection layer 133 by electroplating or melt coating, that is, the connection layer 133 is a plating layer or a coating.
  • the connection layer 113 adopts a standard coating process, such as evaporation coating or sputtering.
  • the connection layer 113 is formed by a standard evaporation plating process, that is, it has successively undergone the steps of pre-plating preparation, vacuuming, ion bombardment, baking, pre-melting, evaporation, removal, film surface treatment, etc. After that, the connection layer 113 is formed.
  • the connection layer is formed by a standard sputtering process, wherein the sputtering process includes at least one of ion sputtering and cathode sputtering.
  • the manufacturing method further includes: disposing solder.
  • solder 124 a is disposed above the torsion structure 120 ; the second spacer 123 is disposed over the solder 124 a ; and then the second spacer is disposed over the torsion structure 120
  • Solder 124b is arranged above 123; and the reflector 130 is arranged above the solder 124b.
  • the manufacturing method before the step of performing the welding process, further includes: fixing the stacked assembly by a clamp, and the stacked assembly may further include the torsion structure 120 , the second spacer 123 and the Mirror 130.
  • one component for example, the first spacer 112, the torsion structure 120, the second spacer 123, the reflector 130, or the solder 111a/ After 111b/124a/124b), they are fixed by jigs or other auxiliary fixtures and the various structural parts are aligned with each other.
  • a jig or other auxiliary jig may be used to fix a stack assembly, where the stack assembly includes the base, the first partition, the torsion structure, the The second spacer and the reflector, that is, after each structural component is stacked, the stacked stacked assembly is fixed by a jig or other auxiliary fixture, and the structural components are aligned with each other.
  • the positions where the solders 124a/124b are arranged are determined based on the specific structure of the scanning galvanometer.
  • the solder 124a is used to realize the fixed connection between the second spacer 123 and the torsion structure 120
  • the solder 124b is used to realize the fixation between the second spacer 123 and the reflector 130 connection; therefore, the placement position of the solder 124a corresponds to the position of the second spacer 123 on the torsion structure 120
  • the placement position of the solder 124b corresponds to the second spacer 123 and the reflector 130 corresponds to the contact position.
  • a welding process 140 is performed to fix the base 110 , the first spacer 112 , the torsion structure 120 , the second spacer 123 and the reflector 130 .
  • the welding process 140 is performed, and the That is to say, after laying all the structural components on top of each other, the fixing between the components is realized by one welding, which can not only simplify the process and reduce the process steps, but also effectively improve the uniformity of the welding process among the components, and balance all the components. stress, reducing the possibility of deformation.
  • the welding process 140 is not heavy, and can be welded by a welding furnace or a welding machine to complete the fixing between the various structural components of the scanning galvanometer.
  • the manufacturing method further includes: post-welding process.
  • the post-welding treatment includes: removing fixing fixtures and fixtures, trimming burrs and leftovers, etc. to obtain a finished scanning galvanometer.
  • FIG. 7 a schematic structural diagram corresponding to the steps of another embodiment of the method for manufacturing a scanning galvanometer of the present invention is shown.
  • the manufacturing method further includes: aligning the reflecting mirrors 230 .
  • the mounting surface 231 of the mirror 230 is polished. The polishing process can improve the assembly flatness of the assembly surface 231, which is beneficial to improve the assembly quality.
  • the scanning galvanometer may also include a mirror mounting frame 331, an anchor area (not shown in the figure) ) and other structural components (as shown in FIG. 8 ), which will not be repeated in the present invention.
  • the present invention provides a scanning galvanometer. Specifically, referring to FIG. 5 , a side view of an embodiment of the scanning galvanometer of the present invention is shown.
  • the scanning galvanometer includes: a base 110; a torsion structure 120, the torsion structures 120 are stacked on the base 110, and are suitable for providing a torsional moment; a first partition 112, the first partition 112 is located in the between the substrate 110 and the torsion structure 120; the mirror 130, the mirrors 130 are stacked on the torsion structure 120; the second partition 123, the second partition 123 is located between the mirror 130 and the torsion structure 120; Between the torsion structures 120 ; the base 110 , the torsion structure 120 , the reflector 130 , the first spacer 112 and the second spacer 123 are fixed by welding.
  • the base 110 serves as the base of the scanning galvanometer, which can provide a basis for the fabrication and assembly of the scanning galvanometer, and also provide mechanical support for other structural components of the scanning galvanometer.
  • the substrate 110 is rectangular.
  • the shape of the base may also be other shapes such as a frame shape, a circle, and the like.
  • the torsion structure 120 is used to support the mirror and provide torque for the reciprocating motion of the mirror; the first spacer 112 is used to support and fix the torsion structure 120 on the base 110, and is used for A space is occupied between the torsion structure 120 and the base 110 to form a gap, so as to provide a margin space for the vibration of the torsion structure 120 and the mirror.
  • the torsion structure 120 includes: at least one torsion beam, and the at least one torsion beam is stacked on the spacer.
  • the torsion structure 120 includes: a first torsion beam 121 and a second torsion beam 122 located above the first partition 112 , and the extension direction of the second torsion beam 122 It intersects with the extending direction of the first torsion beam 121 .
  • the extending direction of the second torsion beam 122 is perpendicular to the extending direction of the first torsion beam 121 .
  • 4 is a view of the torsion structure 120 in FIG. 3 along the B direction.
  • the reflector 130 is used to reflect light; the second partition 123 is used to support and fix the reflector 130 on the torsion structure 120 and between the reflector 130 and the torsion structure 120 The space is occupied to form a gap, thereby providing a margin space for the vibration of the mirror 130 .
  • the reflecting mirror 130 includes a reflecting surface 132 and a mounting surface 131 disposed opposite to each other.
  • the reflecting surface 132 facing away from the base 110 is suitable for reflecting light
  • the mounting surface 131 facing the base 110 is suitable for reflecting light. for welding installation.
  • the material of the reflector 130 is a non-weldable material; the mounting surface 131 of the reflector 130 has a connecting layer 133 , and the connecting layer 133 is a weldable material.
  • weldable materials refer to materials that cannot be welded such as glass, quartz, sapphire, silicon carbide, etc., or iron-based metals such as stainless steel and cast iron that cannot be welded, or metals that cannot be welded such as aluminum; weldable materials are Refers to materials that can be welded, such as copper, gold, silver and other weldable metals.
  • the connection layer 133 is a plating layer or a coating.
  • the scanning galvanometer further includes: solder, where the solder is located on the substrate, the torsion structure, the mirror, the first spacer and the first spacer. between the two separators.
  • solder where the solder is located on the substrate, the torsion structure, the mirror, the first spacer and the first spacer. between the two separators.
  • the type of the solder and the thickness of the solder are related to the process parameters such as the process temperature and process time of the soldering process. Therefore, it is necessary to comprehensively consider the process parameters of the soldering process based on the design requirements of the scanning galvanometer. the thickness of the solder.
  • the solder 111a is located above the substrate 110; the first spacer 112 is located above the solder 111a; the solder 111b is located on the first spacer 112; the torsion The structure 120 is located on the solder 111b; the torsion structure 120 is located on the solder 111b; the solder 124a is located on the torsion structure 120; the second spacer 123 is located on the solder 124a; the solder 124b is located on the Above the second spacer 123; the mirror 130 is above the solder 124b.
  • the present invention also provides a method for forming a torsion structure of a scanning galvanometer, which specifically includes: stacking at least one torsion beam on a spacer; performing welding processing to make the space between the at least one torsion beam and the spacer fixed.
  • FIG. 7 a side view of an embodiment of a method for forming a torsion structure of a scanning galvanometer provided by the present invention is shown.
  • At least one torsion beam is stacked on the spacer.
  • the spacer is a stacked first spacer 212 disposed on the base 210 .
  • the step of arranging the torsion beams includes: sequentially stacking a first torsion beam 221 and a second torsion beam 222 on the partition 212 whose extending directions intersect. z is perpendicular to the extending direction x of the first torsion beam 221 , and the stacking direction z is perpendicular to the extending direction y of the second torsion beam 222 .
  • the base 210 is disposed on the surface of the fixture 200 , the first torsion beam 221 extends along the x direction parallel to the surface of the base 210 , the second torsion beam 222 extends along the y direction parallel to the surface of the base 210 , Therefore, the second torsion beam 222 and the first torsion beam 221 are stacked along the z direction away from the base 210 , that is, the stacking direction z is perpendicular to the surface of the base 210 , and the first torsion beams 221 are stacked in a stacked arrangement above the second torsion beam 222 .
  • a welding process 240 is performed to secure the at least one torsion beam and the spacer.
  • the welding process 240 is performed after the mirror 230 is installed. In other embodiments of the present invention, the welding process 240 may also be performed after the second torsion beam 222 is disposed.
  • the forming method further includes: disposing solder.
  • the step of arranging the torsion beam includes: arranging the first torsion beam 221 and the second torsion beam 222 in sequence; therefore, the step of arranging the first torsion beam 221 and arranging the between the steps of the second torsion beam 222, the forming method further includes: disposing solder.
  • a solder 223a is disposed above the first separator 212; the first torsion beam 221 is disposed above the solder 223a; Solder 223b is provided on the first torsion beam 221; the second torsion beam 222 is provided on the solder 223b.
  • the present invention also provides a torsion structure of a scanning galvanometer.
  • a side view of an embodiment of the torsion structure of the scanning galvanometer of the present invention is shown.
  • the torsion structure includes: at least one torsion beam, the at least one torsion beam is stacked on the partition; the at least one torsion beam and the partition are fixed by welding.
  • the spacers are stacked first spacers 212 disposed on the base 210 .
  • the torsion structure includes: a first torsion beam 221 and a second torsion beam 222, and the extension direction of the second torsion beam 222 intersects with the extension direction of the first torsion beam 221.
  • the first torsion beam 221 and the second torsion beam 222 are stacked in sequence, the stacking direction is perpendicular to the extension direction of the first torsion beam 221 , and the stacking direction is perpendicular to the extension of the second torsion beam 222 direction.
  • the base 210 is located on the surface of the fixture 200 ; the first torsion beam 221 located above the first spacer 221 extends along the x-direction parallel to the surface of the base 210 ; the second torsion beam 222 is parallel to the surface of the base 210 .
  • the y direction of the surface of the base 210 extends, so the second torsion beam 222 and the first torsion beam 221 are stacked along the z direction away from the base 210, that is, the stacking direction z is perpendicular to the surface of the base 210, the The first torsion beam 221 is stacked above the second torsion beam 222 .
  • the first spacer, the torsion structure, the spacer and the reflector are sequentially stacked on the base and fixed by welding.
  • a fixed laminated structure can be realized by welding, which can realize complex structures with different levels of requirements in the off-plane direction, so that the processing capability of the off-plane structure can be improved to meet the design requirements of the scanning galvanometer, and the scanning galvanometer can be
  • the structure is more compact, the overall size is smaller, and the use of MEMS technology can be avoided to effectively control the process cost.

Abstract

A torsion structure (120) of a scanning galvanometer, the scanning galvanometer and a manufacturing method therefor. In the scanning galvanometer, a first separator (112, 212), a torsion structure (120), a second separator (123) and a reflector (130, 230) are sequentially stacked on a substrate (110, 210), and fixed by means of welding processing. By implementing a fixed stacked structure by welding processing, the structure of complex and different hierarchical requirements can be achieved in the off-plane direction, such that the processing capability of the off-plane structure of the large-size scanning galvanometer mirror surface can be improved to meet the design requirement of the scanning galvanometer, the structure of the scanning galvanometer can be more compact, the overall size is smaller, and the use of the MEMS process can be avoided, to effectively control the process cost.

Description

扫描振镜的扭力结构、扫描振镜及其制作方法Torsion structure of scanning galvanometer, scanning galvanometer and manufacturing method thereof
本申请要求2021年3月5日提交中国专利局、申请号为2021102484752、发明名称为“扫描振镜的扭力结构、扫描振镜及其制作方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application filed on March 5, 2021 with the application number 2021102484752 and the invention titled "torsional structure of scanning galvanometer, scanning galvanometer and its manufacturing method", the entire contents of which are approved by Reference is incorporated in this application.
技术领域technical field
本发明涉及激光探测领域，特别涉及一种扫描振镜的扭力结构、扫描振镜及其制作方法。The invention relates to the field of laser detection, in particular to a torsion structure of a scanning galvanometer, a scanning galvanometer and a manufacturing method thereof.
背景技术Background technique
随着无人车技术的兴起，激光雷达作为重要的探测部件越来越受到重视。激光雷达顾名思义，是通过发射激光束实现目标的位置、速度等特征量探测的雷达***。With the rise of unmanned vehicle technology, lidar has been paid more and more attention as an important detection component. Lidar, as its name implies, is a radar system that detects the position, velocity and other characteristics of a target by emitting a laser beam.
激光雷达的工作原理是向目标发射探测信号(激光束)，然后将接收到的从目标反射回来的信号(目标回波)与发射信号进行比较，作适当处理后，即可获得目标的有关特征量，如目标距离、方位、高度、速度、姿态、甚至形状等参数。激光雷达能够实现对飞机、导弹等目标的探测、跟踪和识别。The working principle of lidar is to transmit a detection signal (laser beam) to the target, and then compare the received signal (target echo) reflected from the target with the transmitted signal. After proper processing, the relevant characteristics of the target can be obtained. parameters such as target distance, bearing, altitude, speed, attitude, and even shape. Lidar can detect, track and identify targets such as aircraft and missiles.
激光雷达分为机械式、混合固态以及纯固态激光雷达。固态激光雷达中，为了降低成本取消机械旋转结构，采用的方法之一就是利用MEMS振镜把所有的机械部件集成到单个芯片，利用半导体工艺生产。Lidar is divided into mechanical, hybrid solid-state and pure solid-state lidar. In solid-state LiDAR, in order to reduce the cost and cancel the mechanical rotation structure, one of the methods used is to use a MEMS galvanometer to integrate all the mechanical components into a single chip, which is produced by a semiconductor process.
但是，现有的扫描振镜往往存在镜面尺寸过小，或者加工难度过 大的问题。However, the existing scanning galvanometers often have the problem that the size of the mirror surface is too small, or the processing difficulty is too large.
发明内容SUMMARY OF THE INVENTION
本发明解决的问题是：在不增加工艺难度的前提下，如何形成镜面尺寸大的扫描振镜。The problem solved by the present invention is: how to form a scanning galvanometer with a large mirror surface size without increasing the difficulty of the process.
为解决上述问题，本发明提供一种扫描振镜的扭力结构，包括：至少一个扭力梁，所述至少一个扭力梁层叠的设置于分隔件上。In order to solve the above problems, the present invention provides a torsion structure of a scanning galvanometer, comprising: at least one torsion beam, and the at least one torsion beam is stacked and disposed on the spacer.
可选的，所述至少一个扭力梁和所述分隔件之间通过焊接的方式实现固定。Optionally, the at least one torsion beam and the spacer are fixed by welding.
可选的，所述扭力结构包括：第一扭力梁和第二扭力梁，所述第二扭力梁的延伸方向与所述第一扭力梁的延伸方向相交。Optionally, the torsion structure includes: a first torsion beam and a second torsion beam, and an extension direction of the second torsion beam intersects with an extension direction of the first torsion beam.
可选的，所述第一扭力梁和所述第二扭力梁依次层叠设置，层叠方向垂直所述第一扭力梁的延伸方向，层叠方向垂直所述第二扭力梁的延伸方向。Optionally, the first torsion beam and the second torsion beam are stacked in sequence, the stacking direction is perpendicular to the extension direction of the first torsion beam, and the stacking direction is perpendicular to the extension direction of the second torsion beam.
相应的，本发明还提供一种扫描振镜的扭力结构的形成方法，包括：在分隔件上层叠的设置至少一个扭力梁；进行焊接处理以使所述至少一个扭力梁和所述分隔件之间固定。Correspondingly, the present invention also provides a method for forming a torsion structure of a scanning galvanometer, comprising: stacking at least one torsion beam on a spacer; performing welding so that the at least one torsion beam and the spacer are formed between the torsion beam and the spacer. fixed between.
可选的，在设置所述至少一个扭力梁的步骤包括：在所述分隔件上依次层叠设置延伸方向相交的第一扭力梁和第二扭力梁，层叠方向垂直所述第一扭力梁的延伸方向，层叠方向垂直所述第二扭力梁的延伸方向。Optionally, the step of arranging the at least one torsion beam includes: sequentially stacking a first torsion beam and a second torsion beam with intersecting extension directions on the partition, and the stacking direction is perpendicular to the extension of the first torsion beam. direction, the stacking direction is perpendicular to the extending direction of the second torsion beam.
本发明提供一种扫描振镜，包括：基底；扭力结构，所述扭力结 构层叠的位于所述基底上，适于提供扭力力矩；第一分隔件，所述第一分隔件位于所述基底和所述扭力结构之间；反射镜，所述反射镜层叠的位于所述扭力结构上；第二分隔件，所述第二分隔件位于所述反射镜和所述扭力结构之间。The present invention provides a scanning galvanometer, comprising: a base; a torsion structure, the torsion structures are stacked on the base and are suitable for providing a torsion moment; a first spacer, the first spacer is located between the base and the base. between the torsion structures; a reflection mirror, the reflection mirrors are stacked on the torsion structure; a second partition, the second partition is located between the reflection mirror and the torsion structure.
可选的，所述基底、所述扭力结构、所述反射镜、所述第一分隔件和所述第二分隔件之间通过焊接的方式实现固定。Optionally, the base, the torsion structure, the reflector, the first spacer and the second spacer are fixed by welding.
可选的，还包括：焊料，所述焊料位于所述基底、所述扭力结构、所述反射镜、所述第一分隔件和所述第二分隔件两两之间。Optionally, the method further includes: solder, the solder is located between the substrate, the torsion structure, the reflector, the first spacer and the second spacer.
可选的，所述反射镜的材料为不可焊接材质；所述反射镜的装配面上具有连接层，所述连接层为可焊接材质。Optionally, the material of the reflector is a non-weldable material; the assembly surface of the reflector has a connection layer, and the connection layer is a weldable material.
相应的，本发明还提供一种扫描振镜的制作方法，包括：提供基底；在所述基底上层叠设置第一分隔件；在所述第一分隔件上层叠设置扭力结构；在所述扭力结构上层叠设置第二分隔件；在所述第二分隔件上层叠设置反射镜；进行焊接处理以使所述基底、所述第一分隔件、所述扭力结构、所述第二分隔件和所述反射镜之间固定。Correspondingly, the present invention also provides a method for manufacturing a scanning galvanometer, including: providing a base; stacking and arranging a first separator on the base; stacking a torsion structure on the first separator; A second spacer is laminated on the structure; a mirror is laminated on the second spacer; a welding process is performed to make the base, the first spacer, the torsion structure, the second spacer and the The mirrors are fixed between them.
可选的，提供基底的步骤、设置第一分隔件的步骤、设置扭力结构的步骤、设置第二分隔件的步骤以及设置反射镜的步骤中两两步骤之间，所述制作方法还包括：设置焊料。Optionally, between the steps of providing the substrate, the step of setting the first partition, the step of setting the torsion structure, the step of setting the second partition and the step of setting the mirror, the manufacturing method further includes: Set the solder.
可选的，进行焊接处理的步骤之前，还包括：通过夹具固定堆叠组件，所述堆叠组件包括所述基底、所述第一分隔件、所述扭力结构、所述第二分隔件和所述反射镜。Optionally, before the step of performing the welding process, the method further includes: fixing a stack assembly by a clamp, where the stack assembly includes the base, the first spacer, the torsion structure, the second spacer and the Reflector.
可选的，在所述基底上依次设置所述第一分隔件、所述扭力结构、 所述第二分隔件和所述反射镜之后，进行焊接处理。Optionally, after the first spacer, the torsion structure, the second spacer, and the reflector are sequentially arranged on the substrate, a welding process is performed.
可选的，所述反射镜的材料为不可焊接材质；层叠设置所述反射镜的步骤之前，还包括：在所述反射镜的装配面上形成连接层，所述连接层为可焊接材质。Optionally, the material of the reflector is a non-weldable material; before the step of stacking the reflectors, the method further includes: forming a connection layer on the assembly surface of the reflector, and the connection layer is a weldable material.
可选的，所述反射镜的材料为可焊接材质；层叠设置所述反射镜的步骤之前，还包括：对所述反射镜的装配面进行抛光处理。Optionally, the material of the reflector is a weldable material; before the step of stacking the reflector, the method further includes: polishing the mounting surface of the reflector.
与现有技术相比，本发明的技术方案具有以下优点：Compared with the prior art, the technical solution of the present invention has the following advantages:
本发明技术方案中，第一分隔件、扭力结构、分隔件和反射镜依次层叠设置于基底上，而且通过焊接处理实现固定。通过焊接处理实现固定的层叠式结构，能够在离面方向实现复杂的、不同层次要求的结构，从而能够提升离面结构的加工能力以满足扫描振镜的设计需求，能够使所述扫描振镜的结构更加紧凑、整体尺寸更小，而且还能够避免MEMS工艺的使用以有效的控制工艺成本。In the technical solution of the present invention, the first spacer, the torsion structure, the spacer and the reflector are sequentially stacked on the base and fixed by welding. A fixed laminated structure can be realized by welding, which can realize complex structures with different levels of requirements in the off-plane direction, so that the processing capability of the off-plane structure can be improved to meet the design requirements of the scanning galvanometer, and the scanning galvanometer can be The structure is more compact, the overall size is smaller, and the use of MEMS technology can be avoided to effectively control the process cost.
本发明可选方案中，所述基底、所述扭力结构、所述反射镜、所述第一分隔件和所述第二分隔件两两之间设置有焊料。通过焊料的选择，能够控制焊接工艺的温度，可控的工艺温度，能够有效减小各部件的形变，有利于提高形成扫描振镜的精度。In an optional solution of the present invention, solder is disposed between the substrate, the torsion structure, the mirror, the first spacer and the second spacer. Through the selection of solder, the temperature of the welding process can be controlled, and the controllable process temperature can effectively reduce the deformation of each component, which is beneficial to improve the accuracy of forming the scanning galvanometer.
本发明可选方案中，进行焊接处理之前，可以通过夹具固定堆叠组件，所述堆叠组件可以包括基底、所述第一分隔件、所述扭力结构、所述第二分隔件以及所述反射镜，也就是说，在层叠设置所有结构部件之后，通过一次焊接实现各部件之间的固定，不仅能够简化工艺、减少工艺步骤，还能够有效提高焊接工艺在各部件之间的均匀性，平 衡各部件所受到的应力，减小形变可能。In an optional solution of the present invention, before performing the welding process, the stacked assembly may be fixed by a clamp, and the stacked assembly may include a base, the first spacer, the torsion structure, the second spacer, and the reflector , that is to say, after all the structural components are stacked and arranged, the fixing between the components is realized by one welding, which not only simplifies the process and reduces the process steps, but also effectively improves the uniformity of the welding process among the components and balances the various components. The stress on the part reduces the possibility of deformation.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to these drawings without creative efforts.
图1至图6是本发明扫描振镜制作方法一实施例各个步骤所对应的结构示意图；1 to 6 are schematic structural diagrams corresponding to each step of an embodiment of a scanning galvanometer manufacturing method of the present invention;
图7是本发明扫描振镜制作方法另一实施例步骤所对应的结构示意图；7 is a schematic structural diagram corresponding to the steps of another embodiment of the scanning galvanometer manufacturing method of the present invention;
图8是本发明扫描振镜制作方法再一实施例所对应的结构示意图。FIG. 8 is a schematic structural diagram corresponding to still another embodiment of the manufacturing method of a scanning galvanometer according to the present invention.
具体实施方式Detailed ways
由背景技术可知，现有技术中扫描振镜存在镜面尺寸小、加工难度大问题。It can be known from the background art that the scanning galvanometer in the prior art has the problems of small mirror surface size and great difficulty in processing.
从光学角度考虑，小、微尺寸振镜会导致光反射能力不足，从而降低激光雷达的探测效果，因此在一些激光雷达产品上需要用到大尺寸镜面的振镜。但是大尺寸镜面振镜的使用，使激光雷达内部本已有限的空间更显局促。From an optical point of view, small and micro-sized galvanometers will lead to insufficient light reflection ability, thereby reducing the detection effect of lidar. Therefore, galvanometers with large-sized mirrors are required on some lidar products. However, the use of large-scale mirror galvanometers makes the already limited space inside the lidar even more cramped.
而且，现有的扫描振镜一般采用MEMS工艺形成。但是当结构件 尺寸过大时，MEMS工艺下的结构件强度无法得到保障；而且，采用MEMS工艺的加工成本过于高昂，存在成本劣势。Moreover, the existing scanning galvanometers are generally formed by MEMS technology. However, when the size of the structural part is too large, the strength of the structural part under the MEMS process cannot be guaranteed; moreover, the processing cost of the MEMS process is too high, and there is a cost disadvantage.
此外，现有基于金属结构的扫描振镜，虽然可以在一层之内实现复杂结构，但是在离面方向实现多层复杂结构的能力有所不足。比如，虽然可以加工复杂图形的镜面，但无法同步加工扫描振镜的不同构件，从而容易增加工艺程序、费时费力。In addition, although the existing scanning galvanometers based on metal structures can realize complex structures within one layer, the ability to realize multi-layer complex structures in the off-plane direction is insufficient. For example, although it is possible to process the mirror surface with complex graphics, it is impossible to process different components of the scanning galvanometer synchronously, which easily increases the process procedure and takes time and effort.
为解决所述技术问题，本发明提供一种扫描振镜的加工方法，包括：In order to solve the technical problem, the present invention provides a processing method of a scanning galvanometer, comprising:
提供基底；在所述基底上层叠设置第一分隔件；在所述第一分隔件上层叠设置扭力结构；在所述扭力结构上层叠设置第二分隔件；在所述第二分隔件上层叠设置反射镜；进行焊接处理以使所述基底、所述第一分隔件、所述扭力结构、所述第二分隔件和所述反射镜之间固定。providing a substrate; stacking a first separator on the substrate; stacking a torsion structure on the first separator; stacking a second separator on the torsion structure; stacking on the second separator A mirror is provided; a welding process is performed to fix the base, the first spacer, the torsion structure, the second spacer and the mirror.
本发明技术方案中，第一分隔件、扭力结构、分隔件和反射镜依次层叠设置于基底上，而且通过焊接处理实现固定。通过焊接处理实现固定的层叠式结构，能够在离面方向实现复杂的、不同层次要求的结构，从而能够提升离面结构的加工能力以满足扫描振镜的设计需求，能够使所述扫描振镜的结构更加紧凑、整体尺寸更小，而且还能够避免MEMS工艺的使用以有效的控制工艺成本。In the technical solution of the present invention, the first spacer, the torsion structure, the spacer and the reflector are sequentially stacked on the base and fixed by welding. A fixed laminated structure can be realized by welding, which can realize complex structures with different levels of requirements in the off-plane direction, so that the processing capability of the off-plane structure can be improved to meet the design requirements of the scanning galvanometer, and the scanning galvanometer can be The structure is more compact, the overall size is smaller, and the use of MEMS technology can be avoided to effectively control the process cost.
为使本发明的上述目的、特征和优点能够更为明显易懂，下面结合附图对本发明的具体实施例做详细的说明。In order to make the above objects, features and advantages of the present invention more clearly understood, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
参考图1至图6示出了本发明扫描振镜制作方法一实施例各个步 骤所对应的结构示意图。Referring to FIG. 1 to FIG. 6 , schematic structural diagrams corresponding to each step of an embodiment of a method for fabricating a scanning galvanometer according to the present invention are shown.
参考图1和图2，其中图2是图1中方框010中结构沿A方向的视图，提供基底110。Referring to FIGS. 1 and 2, wherein FIG. 2 is a view of the structure in block 010 of FIG. 1 along direction A, a substrate 110 is provided.
所述基底110作为所述扫描振镜的底座，能够为所述扫描振镜的制作和装配提供基础，也为所述扫描振镜的其他结构部件提供机械支撑。The base 110 serves as the base of the scanning galvanometer, which can provide a basis for the fabrication and assembly of the scanning galvanometer, and also provide mechanical support for other structural components of the scanning galvanometer.
本发明一些实施例中，在提供基底110的步骤中，所述基底110设置于加工治具100上。如图1所示，在所述加工治具100上设置多个基底110。具体的，在所述加工治具100上设置M×N个所述基底110。同时以所述M×N个所述基底110为基础进行扫描振镜的制作，最终能够同时获得M×N个扫描振镜的成品。这种做法，能够实现扫描振镜的批量化加工。此外，本发明另一些实施例中，也可以在流动生产线上依次设置多个基底，从而实现扫描振镜的批量加工。In some embodiments of the present invention, in the step of providing the substrate 110 , the substrate 110 is disposed on the processing jig 100 . As shown in FIG. 1 , a plurality of substrates 110 are arranged on the processing jig 100 . Specifically, M×N substrates 110 are arranged on the processing jig 100 . At the same time, the scanning galvanometers are fabricated on the basis of the M×N substrates 110 , and finally M×N finished products of the scanning galvanometers can be obtained at the same time. In this way, batch processing of scanning galvanometers can be realized. In addition, in other embodiments of the present invention, a plurality of substrates can also be arranged in sequence on the flow production line, so as to realize batch processing of scanning galvanometers.
如图1所示，本实施例中，所述基底110为矩形。本发明其他实施例中，所述基底的形状也可以是框形、圆形等其他形状。As shown in FIG. 1 , in this embodiment, the substrate 110 is rectangular. In other embodiments of the present invention, the shape of the base may also be other shapes such as a frame shape, a circle, and the like.
之后，参考图3，在所述基底110上层叠设置第一分隔件112；在所述第一分隔件112上层叠设置扭力结构120。Then, referring to FIG. 3 , first spacers 112 are stacked on the base 110 ; and torsion structures 120 are stacked on the first spacers 112 .
需要说明的是，图3至图5均是与图2所对应的视图。It should be noted that, FIG. 3 to FIG. 5 are all views corresponding to FIG. 2 .
所述扭力结构120用于支撑反射镜，为所述反射镜的往复运动提供扭矩；所述第一分隔件112用于在所述基底110上支撑并固定所述扭力结构120，并且在所述扭力结构120和所述基底110之间占据空间以形成间隙，从而为所述扭力结构120以及所述反射镜的振动提供 余量空间。The torsion structure 120 is used to support the mirror and provide torque for the reciprocating motion of the mirror; the first spacer 112 is used to support and fix the torsion structure 120 on the base 110, and is used for A space is occupied between the torsion structure 120 and the base 110 to form a gap, so as to provide a margin space for the vibration of the torsion structure 120 and the mirror.
本发明一些实施例中，提供基底110的步骤、设置第一分隔件112的步骤和设置扭力结构120的步骤中两两步骤之间，所述制作方法还包括：设置焊料。通过焊料的选择，能够控制后续焊接工艺的温度，可控的工艺温度，能够有效减小各部件的形变，有利于提高过形成扫描振镜的精度。其中，焊料的选择，是在结合焊接面的材质的基础上，考虑工艺操作的可行性、便利性和成本。比如结合焊接面为铜、镍等，所述焊料可以选择焊锡，一方面焊锡价格低廉，而且焊锡可以将铜、镍非常牢固的焊接，另一方面焊锡的焊接不需要太高的焊接温度，对于振镜这种精密零件非常友好。In some embodiments of the present invention, between the steps of providing the substrate 110 , the step of disposing the first spacer 112 and the step of disposing the torsion structure 120 , the manufacturing method further includes: disposing solder. Through the selection of solder, the temperature of the subsequent welding process can be controlled, and the controllable process temperature can effectively reduce the deformation of each component, which is beneficial to improve the accuracy of the over-formed scanning galvanometer. Among them, the selection of solder is based on the combination of the material of the welding surface, considering the feasibility, convenience and cost of the process operation. For example, when the welding surface is copper, nickel, etc., the solder can be selected from solder. On the one hand, the price of solder is low, and the solder can weld copper and nickel very firmly. On the other hand, the welding of solder does not require too high welding temperature. The precision part of the galvanometer is very friendly.
需要说明的是，所述焊料的种类以及所述焊料的厚度，与后续焊接处理的工艺温度、工艺时间等工艺参数相关，因此需要基于所述扫描振镜的设计要求，综合考虑焊接处理的工艺参数，设置所述焊料的厚度。总体而言，焊料的厚度设置需要使各堆叠组件保持平行。各堆叠组件是通过线性切割或者腐蚀的方式得到的，其各处厚度难以保持一致，例如如图6所示，本实施例中，基底110和第一分隔件112两端厚度不一致，从而造成第一分隔件112一端与基底110表面之间的距离为D，另一端与基底110表面之间的距离为d，可以通过焊料厚度的设置以实现厚度补偿，即弥补距离D与距离d之间差异。类似的，其他堆叠组件之间也会出现这种情况。那么焊料就可以起到厚度补偿的作用，将各堆叠组件组合在一起后使它们彼此平行，提高振镜的成品质量，在激光雷达中能够更精密的反射激光。It should be noted that the type of the solder and the thickness of the solder are related to the process parameters such as the process temperature and process time of the subsequent welding process. Therefore, it is necessary to comprehensively consider the welding process based on the design requirements of the scanning galvanometer. parameter to set the thickness of the solder. In general, the thickness of the solder needs to be set so that the stacked components remain parallel. Each stacked component is obtained by linear cutting or etching, and it is difficult to keep the same thickness everywhere, for example, as shown in FIG. The distance between one end of the spacer 112 and the surface of the substrate 110 is D, and the distance between the other end and the surface of the substrate 110 is d. Thickness compensation can be achieved by setting the thickness of the solder, that is, to compensate for the difference between the distance D and the distance d . Similarly, this happens between other stacked components. The solder then acts as a thickness compensation, combining the stacked components to make them parallel to each other, improving the quality of the finished galvo mirror and enabling more precise reflection of laser light in lidar.
具体的，如图3所示，将所述基底110设置于加工治具100上并固定后，在基底110上方设置焊料111a；在所述焊料111a上方设置所述第一分隔件112；之后在所述第一分隔件112上方设置焊料111b；在所述焊料111b上方设置扭力结构120。Specifically, as shown in FIG. 3 , after the substrate 110 is placed on the processing jig 100 and fixed, solder 111 a is placed on the substrate 110 ; the first spacer 112 is placed on the solder 111 a ; Solder 111b is disposed above the first separator 112; and a torsion structure 120 is disposed above the solder 111b.
本发明一些实施例中，进行焊接处理的步骤之前，所述制造方法还包括：通过夹具固定堆叠组件，所述堆叠组件至少包括所述基底110和所述第一分隔件112。In some embodiments of the present invention, before the step of performing the welding process, the manufacturing method further includes: fixing a stack assembly by a clamp, and the stack assembly at least includes the base 110 and the first spacer 112 .
具体的，在设置所述焊料111a、设置第一分隔件112、设置所述焊料111b以及设置所述扭力结构120之后，均可以通过治具或其他辅助夹具固定并使各个结构部件相互对齐。Specifically, after disposing the solder 111a, disposing the first spacer 112, disposing the solder 111b, and disposing the torsion structure 120, all structural components can be fixed by a jig or other auxiliary fixtures and aligned with each other.
需要说明的是，所述焊料111a/111b设置的位置基于所述扫描振镜的具体结构而定。所述焊料111a用于实现所述第一分隔件112和所述基底110之间的固定连接，所述焊料111b用于实现所述扭力结构120和所述第一分隔件112之间的固定连接；因此所述焊料111a的设置位置与所述第一分隔件112在所述基底110上的位置相对应，所述焊料112b的设置位置与所述扭力结构120和所述第一分隔件112相接触的位置相对应。It should be noted that, the positions of the solders 111a/111b are determined based on the specific structure of the scanning galvanometer. The solder 111a is used to realize the fixed connection between the first spacer 112 and the base 110 , and the solder 111b is used to realize the fixed connection between the torsion structure 120 and the first spacer 112 Therefore, the disposition position of the solder 111a corresponds to the position of the first spacer 112 on the substrate 110, and the disposition position of the solder 112b corresponds to the torsion structure 120 and the first spacer 112. The position of the contact corresponds to.
本发明一些实施例中，所述扭力结构120包括：至少一个扭力梁，所述至少一个扭力梁层叠的设置于所述分隔件上。如图3和图4所示，本实施例中，所述扭力结构120包括：位于所述第一分隔件112上的第一扭力梁121和第二扭力梁122，所述第二扭力梁122的延伸方向与所述第一扭力梁121的延伸方向相交。具体的，所述第二扭力梁 122的延伸方向与所述第一扭力梁121的延伸方向相垂直。其中图4是图3中扭力结构120沿B方向的视图。In some embodiments of the present invention, the torsion structure 120 includes: at least one torsion beam, and the at least one torsion beam is stacked on the partition. As shown in FIG. 3 and FIG. 4 , in this embodiment, the torsion structure 120 includes: a first torsion beam 121 and a second torsion beam 122 located on the first partition 112 , the second torsion beam 122 The extension direction of the first torsion beam 121 intersects with the extension direction of the first torsion beam 121 . Specifically, the extending direction of the second torsion beam 122 is perpendicular to the extending direction of the first torsion beam 121. 4 is a view of the torsion structure 120 in FIG. 3 along the B direction.
结合参考图5，在所述扭力结构120上层叠设置第二分隔件123；在所述第二分隔件123上层叠设置反射镜130。Referring to FIG. 5 , second spacers 123 are stacked on the torsion structure 120 ; mirrors 130 are stacked on the second spacers 123 .
所述反射镜130用于反射光线；所述第二分隔件123用于在所述扭力结构120上支撑并固定所述反射镜130，并且在所述反射镜130和所述扭力结构120之间占据空间以形成间隙，从而为所述反射镜130的振动提供余量空间。The reflector 130 is used to reflect light; the second partition 123 is used to support and fix the reflector 130 on the torsion structure 120 and between the reflector 130 and the torsion structure 120 The space is occupied to form a gap, thereby providing a margin space for the vibration of the mirror 130 .
本发明一些实施例中，所述反射镜130包括相背设置的反射面132和装配面131，背向所述基底110的反射面132适于反射光线，朝向所述基底110的装配面131适于焊接安装。In some embodiments of the present invention, the reflecting mirror 130 includes a reflecting surface 132 and a mounting surface 131 disposed opposite to each other. The reflecting surface 132 facing away from the base 110 is suitable for reflecting light, and the mounting surface 131 facing the base 110 is suitable for reflecting light. for welding installation.
需要说明的是，如图5所示，本实施例中，所述反射镜130的材料为不可焊接材质；所以层叠设置所述反射镜130的步骤之前，所述制造方法还包括：在所述反射镜130的所述装配面131上形成连接层133，所述连接层133为可焊接材质。其中，不可焊接材质是指类似玻璃、石英、蓝宝石，碳化硅等不能进行焊接处理的材料，或者包括不锈钢、铸铁等无法焊接的铁基金属、或者类似铝的无法焊接的金属。可焊接材质是指能够进行焊接处理的材料，例如铜、金、银等可焊接金属。It should be noted that, as shown in FIG. 5 , in this embodiment, the material of the reflector 130 is a non-weldable material; therefore, before the step of stacking the reflector 130 , the manufacturing method further includes: A connection layer 133 is formed on the mounting surface 131 of the reflector 130 , and the connection layer 133 is made of a solderable material. Among them, non-weldable materials refer to materials that cannot be welded such as glass, quartz, sapphire, silicon carbide, etc., or iron-based metals such as stainless steel and cast iron that cannot be welded, or metals that cannot be welded such as aluminum. Weldable materials refer to materials that can be welded, such as copper, gold, silver and other weldable metals.
还需要说明的是，形成所述连接层133的步骤包括：采用电镀或者熔液涂覆的方式形成所述连接层133，也就是说，所述连接层133为镀层或涂层。本实施例中，所述连接层113采用的是标准镀膜工艺， 比如蒸发镀或是溅射。具体的，本实施例中，所述连接层113采用蒸发镀标准工艺形成，即先后经历镀前准备、抽真空、离子轰击、烘烤、预熔、蒸发、取件、膜层表面处理等步骤之后，形成所述连接层113。本发明另一些实施例中，所述连接层采用溅射标准工艺形成，其中溅射工艺包括离子溅射和阴极溅射中的至少一种。It should also be noted that the step of forming the connection layer 133 includes: forming the connection layer 133 by electroplating or melt coating, that is, the connection layer 133 is a plating layer or a coating. In this embodiment, the connection layer 113 adopts a standard coating process, such as evaporation coating or sputtering. Specifically, in this embodiment, the connection layer 113 is formed by a standard evaporation plating process, that is, it has successively undergone the steps of pre-plating preparation, vacuuming, ion bombardment, baking, pre-melting, evaporation, removal, film surface treatment, etc. After that, the connection layer 113 is formed. In other embodiments of the present invention, the connection layer is formed by a standard sputtering process, wherein the sputtering process includes at least one of ion sputtering and cathode sputtering.
本发明一些实施例中，设置所述扭力结构120的步骤、设置第二分隔件123的步骤以及设置反射镜130的步骤中两两步骤之间，所述制作方法还包括：设置焊料。In some embodiments of the present invention, between the steps of disposing the torsion structure 120 , the step of disposing the second spacer 123 and the step of disposing the mirror 130 , the manufacturing method further includes: disposing solder.
具体的，如图5所示，设置所述扭力结构120之后，所述扭力结构120上方设置焊料124a；在所述焊料124a上方设置所述第二分隔件123；之后在所述第二分隔件123上方设置焊料124b；在所述焊料124b上方设置所述反射镜130。Specifically, as shown in FIG. 5 , after disposing the torsion structure 120 , solder 124 a is disposed above the torsion structure 120 ; the second spacer 123 is disposed over the solder 124 a ; and then the second spacer is disposed over the torsion structure 120 Solder 124b is arranged above 123; and the reflector 130 is arranged above the solder 124b.
另外，一些实施例中，进行焊接处理的步骤之前，所述制造方法还包括：通过夹具固定堆叠组件，所述堆叠组件还可以包括所述扭力结构120、所述第二分隔件123和所述反射镜130。In addition, in some embodiments, before the step of performing the welding process, the manufacturing method further includes: fixing the stacked assembly by a clamp, and the stacked assembly may further include the torsion structure 120 , the second spacer 123 and the Mirror 130.
具体的，在设置所述焊料124a、设置第二分隔件123、设置所述焊料124b以及设置所述反射镜130之后，均可以通过治具或其他辅助夹具固定并使各个结构部件相互对齐。Specifically, after disposing the solder 124a, disposing the second spacer 123, disposing the solder 124b and disposing the reflecting mirror 130, all structural components can be fixed and aligned with each other by a jig or other auxiliary fixtures.
需要说明的是，本实施例中，每次设置一个部件(例如所述第一分隔件112、所述扭力结构120、所述第二分隔件123、所述反射镜130或者所述焊料111a/111b/124a/124b)之后，均通过治具或其他辅助夹具固定并使各个结构部件相互对齐。本发明其他实施例中，可 以在设置所述反射镜之后，通过治具或其他辅助夹具固定堆叠组件，所述堆叠组件包括所述基底、所述第一分隔件、所述扭力结构、所述第二分隔件和所述反射镜，也就是说，在堆叠好各个结构部件之后，统一通过治具或其他辅助夹具固定层叠好的堆叠组件，并使各个结构部件之间相互对齐。It should be noted that, in this embodiment, one component (for example, the first spacer 112, the torsion structure 120, the second spacer 123, the reflector 130, or the solder 111a/ After 111b/124a/124b), they are fixed by jigs or other auxiliary fixtures and the various structural parts are aligned with each other. In other embodiments of the present invention, after arranging the mirror, a jig or other auxiliary jig may be used to fix a stack assembly, where the stack assembly includes the base, the first partition, the torsion structure, the The second spacer and the reflector, that is, after each structural component is stacked, the stacked stacked assembly is fixed by a jig or other auxiliary fixture, and the structural components are aligned with each other.
还需要说明的是，所述焊料124a/124b设置的位置基于所述扫描振镜的具体结构而定。所述焊料124a用于实现所述第二分隔件123和所述扭力结构120之间的固定连接，所述焊料124b用于实现所述第二分隔件123和所述反射镜130之间的固定连接；因此所述焊料124a的设置位置与所述第二分隔件123在所述扭力结构120上的位置相对应，所述焊料124b的设置位置与所述第二分隔件123和所述反射镜130相接触的位置相对应。It should also be noted that, the positions where the solders 124a/124b are arranged are determined based on the specific structure of the scanning galvanometer. The solder 124a is used to realize the fixed connection between the second spacer 123 and the torsion structure 120, and the solder 124b is used to realize the fixation between the second spacer 123 and the reflector 130 connection; therefore, the placement position of the solder 124a corresponds to the position of the second spacer 123 on the torsion structure 120, and the placement position of the solder 124b corresponds to the second spacer 123 and the reflector 130 corresponds to the contact position.
结合参考图5，进行焊接处理140以使所述基底110、所述第一分隔件112、所述扭力结构120、所述第二分隔件123和所述反射镜130之间固定。Referring to FIG. 5 , a welding process 140 is performed to fix the base 110 , the first spacer 112 , the torsion structure 120 , the second spacer 123 and the reflector 130 .
本发明一些实施例中，在所述基底110上依次设置所述第一分隔件112、所述扭力结构120、所述第二分隔件123和所述反射镜130之后，进行焊接处理140，也就是说，在层叠设置所有结构部件之后，通过一次焊接实现各部件之间的固定，不仅能够简化工艺、减少工艺步骤，还能够效提高焊接工艺在各部件之间的均匀性，平衡各部件所受到的应力，减小形变可能。In some embodiments of the present invention, after the first spacer 112 , the torsion structure 120 , the second spacer 123 and the reflector 130 are sequentially arranged on the substrate 110 , the welding process 140 is performed, and the That is to say, after laying all the structural components on top of each other, the fixing between the components is realized by one welding, which can not only simplify the process and reduce the process steps, but also effectively improve the uniformity of the welding process among the components, and balance all the components. stress, reducing the possibility of deformation.
具体的，进行焊接处理140的不重，可以通过焊炉或焊接机进行 焊接以完成所述扫描振镜各个结构部件之间的固定。Specifically, the welding process 140 is not heavy, and can be welded by a welding furnace or a welding machine to complete the fixing between the various structural components of the scanning galvanometer.
需要说明的是，本发明一些实施例中，在焊接处理以实现各个结构部件的固定之后，所述制造方法还包括：焊接后处理。具体的，所述焊接后处理包括：去除固定夹具及治具、修剪毛刺边角料等工艺以得到扫描振镜成品。It should be noted that, in some embodiments of the present invention, after the welding process is performed to realize the fixing of each structural component, the manufacturing method further includes: post-welding process. Specifically, the post-welding treatment includes: removing fixing fixtures and fixtures, trimming burrs and leftovers, etc. to obtain a finished scanning galvanometer.
参考图7示出了本发明扫描振镜制作方法另一实施例步骤所对应的结构示意图。Referring to FIG. 7, a schematic structural diagram corresponding to the steps of another embodiment of the method for manufacturing a scanning galvanometer of the present invention is shown.
本实施例与前述实施例相同之处，本发明在此不再赘述。本实施例与前述实施例不同之处在于，本实施例中，所述反射镜230的材料为可焊接材料；因此层叠设置所述反射镜230之前，所述制造方法还包括：对所述反射镜230的装配面231进行抛光处理。所述抛光处理能够提高所述装配面231的装配平整度，有利于提高装配质量。This embodiment is the same as the previous embodiment, and the present invention will not repeat it here. The difference between this embodiment and the previous embodiments is that in this embodiment, the material of the reflecting mirror 230 is a weldable material; therefore, before the reflecting mirrors 230 are stacked and arranged, the manufacturing method further includes: aligning the reflecting mirrors 230 . The mounting surface 231 of the mirror 230 is polished. The polishing process can improve the assembly flatness of the assembly surface 231, which is beneficial to improve the assembly quality.
此外，本发明其他实施例中，所述扫描振镜除了包括基底310、第一扭力梁321、第二扭力梁322和反射镜330指纹，还可以包括镜面安装框331、锚区(图中未示出)等其他结构部件(如图8所示)，本发明在此不再赘述。In addition, in other embodiments of the present invention, in addition to the base 310, the first torsion beam 321, the second torsion beam 322 and the mirror 330 fingerprint, the scanning galvanometer may also include a mirror mounting frame 331, an anchor area (not shown in the figure) ) and other structural components (as shown in FIG. 8 ), which will not be repeated in the present invention.
相应的，本发明提供一种扫描振镜，具体参考图5，示出了本发明扫描振镜一实施例的侧视图。Correspondingly, the present invention provides a scanning galvanometer. Specifically, referring to FIG. 5 , a side view of an embodiment of the scanning galvanometer of the present invention is shown.
所述扫描振镜包括：基底110；扭力结构120，所述扭力结构120层叠的位于所述基底110上，适于提供扭力力矩；第一分隔件112，所述第一分隔件112位于所述基底110和所述扭力结构120之间；反射镜130，所述反射镜130层叠的位于所述扭力结构120上；第二分 隔件123，所述第二分隔件123位于所述反射镜130和所述扭力结构120之间；所述基底110、所述扭力结构120、所述反射镜130、所述第一分隔件112和所述第二分隔件123之间通过焊接的方式实现固定。The scanning galvanometer includes: a base 110; a torsion structure 120, the torsion structures 120 are stacked on the base 110, and are suitable for providing a torsional moment; a first partition 112, the first partition 112 is located in the between the substrate 110 and the torsion structure 120; the mirror 130, the mirrors 130 are stacked on the torsion structure 120; the second partition 123, the second partition 123 is located between the mirror 130 and the torsion structure 120; Between the torsion structures 120 ; the base 110 , the torsion structure 120 , the reflector 130 , the first spacer 112 and the second spacer 123 are fixed by welding.
所述基底110作为所述扫描振镜的底座，能够为所述扫描振镜的制作和装配提供基础，也为所述扫描振镜的其他结构部件提供机械支撑。The base 110 serves as the base of the scanning galvanometer, which can provide a basis for the fabrication and assembly of the scanning galvanometer, and also provide mechanical support for other structural components of the scanning galvanometer.
如图5所示，本实施例中，所述基底110为矩形。本发明其他实施例中，所述基底的形状也可以是框形、圆形等其他形状。As shown in FIG. 5 , in this embodiment, the substrate 110 is rectangular. In other embodiments of the present invention, the shape of the base may also be other shapes such as a frame shape, a circle, and the like.
所述扭力结构120用于支撑反射镜，为所述反射镜的往复运动提供扭矩；所述第一分隔件112用于在所述基底110上支撑并固定所述扭力结构120，并且在所述扭力结构120和所述基底110之间占据空间以形成间隙，从而为所述扭力结构120以及所述反射镜的振动提供余量空间。The torsion structure 120 is used to support the mirror and provide torque for the reciprocating motion of the mirror; the first spacer 112 is used to support and fix the torsion structure 120 on the base 110, and is used for A space is occupied between the torsion structure 120 and the base 110 to form a gap, so as to provide a margin space for the vibration of the torsion structure 120 and the mirror.
本发明一些实施例中，所述扭力结构120包括：至少一个扭力梁，所述至少一个扭力梁层叠的位于所述分隔件上。如图5所示，本实施例中，所述扭力结构120包括：位于所述第一分隔件112上方的第一扭力梁121和第二扭力梁122，所述第二扭力梁122的延伸方向与所述第一扭力梁121的延伸方向相交。具体的，所述第二扭力梁122的延伸方向与所述第一扭力梁121的延伸方向相垂直。其中图4是图3中扭力结构120沿B方向的视图。In some embodiments of the present invention, the torsion structure 120 includes: at least one torsion beam, and the at least one torsion beam is stacked on the spacer. As shown in FIG. 5 , in this embodiment, the torsion structure 120 includes: a first torsion beam 121 and a second torsion beam 122 located above the first partition 112 , and the extension direction of the second torsion beam 122 It intersects with the extending direction of the first torsion beam 121 . Specifically, the extending direction of the second torsion beam 122 is perpendicular to the extending direction of the first torsion beam 121 . 4 is a view of the torsion structure 120 in FIG. 3 along the B direction.
所述反射镜130用于反射光线；所述第二分隔件123用于在所述扭力结构120上支撑并固定所述反射镜130，并且在所述反射镜130 和所述扭力结构120之间占据空间以形成间隙，从而为所述反射镜130的振动提供余量空间。The reflector 130 is used to reflect light; the second partition 123 is used to support and fix the reflector 130 on the torsion structure 120 and between the reflector 130 and the torsion structure 120 The space is occupied to form a gap, thereby providing a margin space for the vibration of the mirror 130 .
本发明一些实施例中，所述反射镜130包括相背设置的反射面132和装配面131，背向所述基底110的反射面132适于反射光线，朝向所述基底110的装配面131适于焊接安装。In some embodiments of the present invention, the reflecting mirror 130 includes a reflecting surface 132 and a mounting surface 131 disposed opposite to each other. The reflecting surface 132 facing away from the base 110 is suitable for reflecting light, and the mounting surface 131 facing the base 110 is suitable for reflecting light. for welding installation.
如图5所示，本实施例中，所述反射镜130的材料为不可焊接材质；所述反射镜130的装配面131上具有连接层133，所述连接层133为可焊接材质。其中，可焊接材质是指类似玻璃、石英、蓝宝石，碳化硅等不能进行焊接处理的材料，或者包括不锈钢、铸铁等无法焊接的铁基金属、或者类似铝的无法焊接的金属；可焊接材质是指能够进行焊接处理的材料，例如铜、金、银等可焊接金属。所述连接层133为镀层或涂层。As shown in FIG. 5 , in this embodiment, the material of the reflector 130 is a non-weldable material; the mounting surface 131 of the reflector 130 has a connecting layer 133 , and the connecting layer 133 is a weldable material. Among them, weldable materials refer to materials that cannot be welded such as glass, quartz, sapphire, silicon carbide, etc., or iron-based metals such as stainless steel and cast iron that cannot be welded, or metals that cannot be welded such as aluminum; weldable materials are Refers to materials that can be welded, such as copper, gold, silver and other weldable metals. The connection layer 133 is a plating layer or a coating.
需要说明的是，本发明一些实施例中，所述扫描振镜还包括：焊料，所述焊料位于所述基底、所述扭力结构、所述反射镜、所述第一分隔件和所述第二分隔件两两之间。其中，所述焊料的种类以及所述焊料的厚度，与焊接处理的工艺温度、工艺时间等工艺参数相关，因此需要基于所述扫描振镜的设计要求，综合考虑焊接处理的工艺参数，设置所述焊料的厚度。It should be noted that, in some embodiments of the present invention, the scanning galvanometer further includes: solder, where the solder is located on the substrate, the torsion structure, the mirror, the first spacer and the first spacer. between the two separators. Among them, the type of the solder and the thickness of the solder are related to the process parameters such as the process temperature and process time of the soldering process. Therefore, it is necessary to comprehensively consider the process parameters of the soldering process based on the design requirements of the scanning galvanometer. the thickness of the solder.
具体的，如图5所示，所述焊料111a位于所述基底110上方；所述第一分隔件112位于所述焊料111a上方；所述焊料111b位于所述第一分隔件112；所述扭力结构120位于所述焊料111b；所述扭力结构120位于所述焊料111b；所述焊料124a位于所述扭力结构120 上方；所述第二分隔件123位于所述焊料124a上方；所述焊料124b位于所述第二分隔件123上方；所述反射镜130位于所述焊料124b上方。Specifically, as shown in FIG. 5, the solder 111a is located above the substrate 110; the first spacer 112 is located above the solder 111a; the solder 111b is located on the first spacer 112; the torsion The structure 120 is located on the solder 111b; the torsion structure 120 is located on the solder 111b; the solder 124a is located on the torsion structure 120; the second spacer 123 is located on the solder 124a; the solder 124b is located on the Above the second spacer 123; the mirror 130 is above the solder 124b.
此外，采用本发明技术方案制作扫描振镜之前，需要将所述扫描振镜的各个结构部件制备完成。因此本发明还提供一种扫描振镜的扭力结构的形成方法，具体包括：在分隔件上层叠的设置至少一个扭力梁；进行焊接处理以使所述至少一个扭力梁和所述分隔件之间固定。In addition, before using the technical solution of the present invention to manufacture the scanning galvanometer, each structural component of the scanning galvanometer needs to be prepared. Therefore, the present invention also provides a method for forming a torsion structure of a scanning galvanometer, which specifically includes: stacking at least one torsion beam on a spacer; performing welding processing to make the space between the at least one torsion beam and the spacer fixed.
具体的，参考图7，示出了本发明所提供扫描振镜的扭力结构的形成方法一实施例的侧视图。Specifically, referring to FIG. 7 , a side view of an embodiment of a method for forming a torsion structure of a scanning galvanometer provided by the present invention is shown.
首先，在所述分隔件上层叠的设置至少一个扭力梁。本实施例中，所述分隔件为层叠的设置于基底210上的第一分隔件212。First, at least one torsion beam is stacked on the spacer. In this embodiment, the spacer is a stacked first spacer 212 disposed on the base 210 .
如图7所示，本发明一些实施例中，设置所述扭力梁的步骤包括：在所述分隔件212上依次层叠设置延伸方向相交的第一扭力梁221和第二扭力梁222，层叠方向z垂直所述第一扭力梁221的延伸方向x，层叠方向z垂直所述第二扭力梁222的延伸方向y。As shown in FIG. 7 , in some embodiments of the present invention, the step of arranging the torsion beams includes: sequentially stacking a first torsion beam 221 and a second torsion beam 222 on the partition 212 whose extending directions intersect. z is perpendicular to the extending direction x of the first torsion beam 221 , and the stacking direction z is perpendicular to the extending direction y of the second torsion beam 222 .
本实施例中，基底210设置于治具200的表面上，所述第一扭力梁221沿平行基底210表面的x方向延伸，所述第二扭力梁222沿平行基底210表面的y方向延伸，因此所述第二扭力梁222和所述第一扭力梁221沿背离所述基底210的z方向堆叠，即所述堆叠方向z垂直所述基底210表面，所述第一扭力梁221层叠的设置于所述第二扭力梁222上方。In this embodiment, the base 210 is disposed on the surface of the fixture 200 , the first torsion beam 221 extends along the x direction parallel to the surface of the base 210 , the second torsion beam 222 extends along the y direction parallel to the surface of the base 210 , Therefore, the second torsion beam 222 and the first torsion beam 221 are stacked along the z direction away from the base 210 , that is, the stacking direction z is perpendicular to the surface of the base 210 , and the first torsion beams 221 are stacked in a stacked arrangement above the second torsion beam 222 .
设置至少一个扭力梁之后，进行焊接处理240以使所述至少一个 扭力梁和所述分隔件之间固定。After the at least one torsion beam is positioned, a welding process 240 is performed to secure the at least one torsion beam and the spacer.
本实施例中，所述焊接处理240在所述反射镜230设置之后进行。本发明其他实施例中，所述焊接处理240也可以在设置所述第二扭力梁222之后进行。In this embodiment, the welding process 240 is performed after the mirror 230 is installed. In other embodiments of the present invention, the welding process 240 may also be performed after the second torsion beam 222 is disposed.
本发明一些实施例中，在进行焊接处理240的步骤之间，所述形成方法还包括：设置焊料。此外，本实施例中，设置所述扭力梁的步骤包括：依次层叠设置所述第一扭力梁221和所述第二扭力梁222；因此设置所述第一扭力梁221的步骤和设置所述第二扭力梁222的步骤之间，所述形成方法还包括：设置焊料。In some embodiments of the present invention, between the steps of performing the soldering process 240, the forming method further includes: disposing solder. In addition, in this embodiment, the step of arranging the torsion beam includes: arranging the first torsion beam 221 and the second torsion beam 222 in sequence; therefore, the step of arranging the first torsion beam 221 and arranging the Between the steps of the second torsion beam 222, the forming method further includes: disposing solder.
具体的，如图7所示，设置所述第一扭力梁221之前，在所述第一分隔件212上方设置焊料223a；在所述焊料223a上方设置所述第一扭力梁221；在所述第一扭力梁221上设置焊料223b；在所述焊料223b上设置所述第二扭力梁222。Specifically, as shown in FIG. 7 , before disposing the first torsion beam 221, a solder 223a is disposed above the first separator 212; the first torsion beam 221 is disposed above the solder 223a; Solder 223b is provided on the first torsion beam 221; the second torsion beam 222 is provided on the solder 223b.
相应的，本发明还提供一种扫描振镜的扭力结构。具体的，参考图7，示出了本发明扫描振镜的扭力结构一实施例的侧视图。Correspondingly, the present invention also provides a torsion structure of a scanning galvanometer. Specifically, referring to FIG. 7 , a side view of an embodiment of the torsion structure of the scanning galvanometer of the present invention is shown.
所述扭力结构包括：至少一个扭力梁，所述至少一个扭力梁层叠的设置于分隔件上；所述至少一个扭力梁和所述分隔件之间通过焊接的方式实现固定。The torsion structure includes: at least one torsion beam, the at least one torsion beam is stacked on the partition; the at least one torsion beam and the partition are fixed by welding.
如图7所示，本实施例中，所述分隔件为层叠的设置于基底210上的第一分隔件212。As shown in FIG. 7 , in this embodiment, the spacers are stacked first spacers 212 disposed on the base 210 .
此外，本发明一些实施例中，所述扭力结构包括：第一扭力梁221和第二扭力梁222，所述第二扭力梁222的延伸方向与所述第一 扭力梁221的延伸方向相交。In addition, in some embodiments of the present invention, the torsion structure includes: a first torsion beam 221 and a second torsion beam 222, and the extension direction of the second torsion beam 222 intersects with the extension direction of the first torsion beam 221.
本实施例中，所述第一扭力梁221和所述第二扭力梁222依次层叠设置，层叠方向垂直所述第一扭力梁221的延伸方向，层叠方向垂直所述第二扭力梁222的延伸方向。In this embodiment, the first torsion beam 221 and the second torsion beam 222 are stacked in sequence, the stacking direction is perpendicular to the extension direction of the first torsion beam 221 , and the stacking direction is perpendicular to the extension of the second torsion beam 222 direction.
具体的，基底210位于治具200的表面上；位于所述第一分隔件221上方的所述第一扭力梁221沿平行基底210表面的x方向延伸；所述第二扭力梁222且沿平行基底210表面的y方向延伸，因此所述第二扭力梁222和所述第一扭力梁221沿背离所述基底210的z方向堆叠，即所述堆叠方向z垂直所述基底210表面，所述第一扭力梁221层叠的设置于所述第二扭力梁222上方。Specifically, the base 210 is located on the surface of the fixture 200 ; the first torsion beam 221 located above the first spacer 221 extends along the x-direction parallel to the surface of the base 210 ; the second torsion beam 222 is parallel to the surface of the base 210 . The y direction of the surface of the base 210 extends, so the second torsion beam 222 and the first torsion beam 221 are stacked along the z direction away from the base 210, that is, the stacking direction z is perpendicular to the surface of the base 210, the The first torsion beam 221 is stacked above the second torsion beam 222 .
综上，本发明技术方案中，第一分隔件、扭力结构、分隔件和反射镜依次层叠设置于基底上，而且通过焊接处理实现固定。通过焊接处理实现固定的层叠式结构，能够在离面方向实现复杂的、不同层次要求的结构，从而能够提升离面结构的加工能力以满足扫描振镜的设计需求，能够使所述扫描振镜的结构更加紧凑、整体尺寸更小，而且还能够避免MEMS工艺的使用以有效的控制工艺成本。To sum up, in the technical solution of the present invention, the first spacer, the torsion structure, the spacer and the reflector are sequentially stacked on the base and fixed by welding. A fixed laminated structure can be realized by welding, which can realize complex structures with different levels of requirements in the off-plane direction, so that the processing capability of the off-plane structure can be improved to meet the design requirements of the scanning galvanometer, and the scanning galvanometer can be The structure is more compact, the overall size is smaller, and the use of MEMS technology can be avoided to effectively control the process cost.
虽然本发明披露如上，但本发明并非限定于此。任何本领域技术人员，在不脱离本发明的精神和范围内，均可作各种更动与修改，因此本发明的保护范围应当以权利要求所限定的范围为准。Although the present invention is disclosed above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be based on the scope defined by the claims.

Claims (16)

  1. 一种扫描振镜的扭力结构，其特征在于，包括：A torsion structure of a scanning galvanometer, comprising:
    分隔件；separator;
    至少一个扭力梁，所述至少一个扭力梁层叠的设置于分隔件上。At least one torsion beam, the at least one torsion beam is disposed on the spacer in a stacked manner.
  2. 如权利要求1所述的扫描振镜的扭力结构，其特征在于，所述至少一个扭力梁和所述分隔件之间通过焊接的方式实现固定。The torsion structure of the scanning galvanometer according to claim 1, wherein the at least one torsion beam and the spacer are fixed by welding.
  3. 如权利要求1所述的扫描振镜的扭力结构，其特征在于，所述扭力结构包括：第一扭力梁和第二扭力梁，所述第二扭力梁的延伸方向与所述第一扭力梁的延伸方向相交。The torsion structure of the scanning galvanometer according to claim 1, wherein the torsion structure comprises: a first torsion beam and a second torsion beam, and the extension direction of the second torsion beam is the same as that of the first torsion beam direction of extension.
  4. 如权利要求3所述的扫描振镜的扭力结构，其特征在于，所述第一扭力梁和所述第二扭力梁依次层叠设置，层叠方向垂直所述第一扭力梁的延伸方向，层叠方向垂直所述第二扭力梁的延伸方向。The torsion structure of the scanning galvanometer according to claim 3, wherein the first torsion beam and the second torsion beam are stacked in sequence, and the stacking direction is perpendicular to the extending direction of the first torsion beam, and the stacking direction perpendicular to the extending direction of the second torsion beam.
  5. 一种扫描振镜的扭力结构的形成方法，其特征在于，包括：A method for forming a torsion structure of a scanning galvanometer, comprising:
    在分隔件上层叠的设置至少一个扭力梁；stacking at least one torsion beam on the spacer;
    进行焊接处理以使所述至少一个扭力梁和所述分隔件之间固定。A welding process is performed to secure between the at least one torsion beam and the spacer.
  6. 如权利要求5所述扫描振镜的扭力结构的形成方法，其特征在于，在设置所述至少一个扭力梁的步骤包括：在所述分隔件上依次层叠设置延伸方向相交的第一扭力梁和第二扭力梁，层叠方向垂直所述第一扭力梁的延伸方向，层叠方向垂直所述第二扭力梁的延伸方向。6. The method for forming a torsion structure of a scanning galvanometer according to claim 5, wherein the step of disposing the at least one torsion beam comprises: sequentially stacking the first torsion beam and For the second torsion beam, the stacking direction is perpendicular to the extending direction of the first torsion beam, and the stacking direction is perpendicular to the extending direction of the second torsion beam.
  7. 一种扫描振镜，其特征在于，包括：A scanning galvanometer, characterized in that, comprising:
    基底；base;
    扭力结构，所述扭力结构层叠的位于所述基底上，适于提供扭力力矩；a torsion structure, the torsion structure is stacked on the base, and is suitable for providing a torsion moment;
    第一分隔件，所述第一分隔件位于所述基底和所述扭力结构之间；a first spacer located between the base and the torsion structure;
    反射镜，所述反射镜层叠的位于所述扭力结构上；a mirror, the mirrors are stacked on the torsion structure;
    第二分隔件，所述第二分隔件位于所述反射镜和所述扭力结构之间。A second spacer located between the mirror and the torsion structure.
  8. 如权利要求7所述的扫描振镜，其特征在于，所述基底、所述扭力结构、所述反射镜、所述第一分隔件和所述第二分隔件之间通过焊接的方式实现固定。The scanning galvanometer according to claim 7, wherein the base, the torsion structure, the reflector, the first spacer and the second spacer are fixed by welding .
  9. 如权利要求8所述的扫描振镜，其特征在于，还包括：焊料，所述焊料位于所述基底、所述扭力结构、所述反射镜、所述第一分隔件和所述第二分隔件两两之间。9. The scanning galvanometer of claim 8, further comprising: solder on the base, the torsion structure, the mirror, the first spacer and the second spacer between pieces.
  10. 如权利要求7所述的扫描振镜，其特征在于，所述反射镜的材料为不可焊接材质；所述反射镜的装配面上具有连接层，所述连接层为可焊接材质。The scanning galvanometer according to claim 7, wherein the material of the reflector is a non-weldable material; the assembly surface of the reflector has a connecting layer, and the connecting layer is a weldable material.
  11. 一种扫描振镜的制作方法，其特征在于，包括：A method for making a scanning galvanometer, comprising:
    提供基底；provide a base;
    在所述基底上层叠设置第一分隔件；A first separator is stacked on the base;
    在所述第一分隔件上层叠设置扭力结构；stacking a torsion structure on the first separator;
    在所述扭力结构上层叠设置第二分隔件；stacking a second spacer on the torsion structure;
    在所述第二分隔件上层叠设置反射镜；stacking mirrors on the second partition;
    进行焊接处理以使所述基底、所述第一分隔件、所述扭力结构、所述第二分隔件和所述反射镜之间固定。A welding process is performed to secure the base, the first spacer, the torsion structure, the second spacer, and the reflector.
  12. 如权利要求11所述扫描振镜的制作方法，其特征在于，提供基底的步骤、设置第一分隔件的步骤、设置扭力结构的步骤、设置第二分隔件的步骤以及设置反射镜的步骤中两两步骤之间，所述制作方法还包括：设置焊料。11. The method for manufacturing a scanning galvanometer according to claim 11, wherein the steps of providing the base, setting the first spacer, setting the torsion structure, setting the second spacer, and setting the mirror Between the two steps, the manufacturing method further includes: disposing solder.
  13. 如权利要求11所述扫描振镜的制作方法，其特征在于，进行 焊接处理的步骤之前，还包括：通过夹具固定堆叠组件，所述堆叠组件包括所述基底、所述第一分隔件、所述扭力结构、所述第二分隔件和所述反射镜。The method for manufacturing a scanning galvanometer according to claim 11, wherein before the step of welding, the method further comprises: fixing a stacking assembly by a clamp, the stacking assembly comprising the base, the first spacer, the the torsion structure, the second spacer and the mirror.
  14. 如权利要求11所述扫描振镜的制作方法，其特征在于，在所述基底上依次设置所述第一分隔件、所述扭力结构、所述第二分隔件和所述反射镜之后，进行焊接处理。The method for manufacturing a scanning galvanometer according to claim 11, wherein after the first spacer, the torsion structure, the second spacer and the reflector are sequentially arranged on the substrate, Welding treatment.
  15. 如权利要求11所述扫描振镜的制作方法，其特征在于，所述反射镜的材料为不可焊接材质；层叠设置所述反射镜的步骤之前，还包括：在所述反射镜的装配面上形成连接层，所述连接层为可焊接材质。The method for manufacturing a scanning galvanometer according to claim 11, wherein the material of the reflecting mirror is a non-weldable material; before the step of stacking the reflecting mirrors, the method further comprises: on the mounting surface of the reflecting mirror A connection layer is formed, and the connection layer is a solderable material.
  16. 如权利要求11所述扫描振镜的制作方法，其特征在于，所述反射镜的材料为可焊接材质；层叠设置所述反射镜的步骤之前，还包括：对所述反射镜的装配面进行抛光处理。The method for manufacturing a scanning galvanometer according to claim 11, wherein the material of the reflecting mirror is a weldable material; before the step of stacking the reflecting mirrors, the method further comprises: assembling a surface of the reflecting mirrors. Polished.
PCT/CN2021/140840 2021-03-05 2021-12-23 Torsion structure of scanning galvanometer, and scanning galvanometer and manufacturing method therefor WO2022183816A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202110248475.2A CN115015876A (en) 2021-03-05 2021-03-05 Torsion structure of scanning galvanometer, scanning galvanometer and manufacturing method of torsion structure
CN202110248475.2 2021-03-05

Publications (1)

Publication Number Publication Date
WO2022183816A1 true WO2022183816A1 (en) 2022-09-09

Family

ID=83065108

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2021/140840 WO2022183816A1 (en) 2021-03-05 2021-12-23 Torsion structure of scanning galvanometer, and scanning galvanometer and manufacturing method therefor

Country Status (2)

Country Link
CN (1) CN115015876A (en)
WO (1) WO2022183816A1 (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060065977A1 (en) * 2004-09-30 2006-03-30 Kyocera Wireless Corp. Reliable printed wiring board assembly employing packages with solder joints and related assembly technique
CN101233441A (en) * 2005-07-29 2008-07-30 德克萨斯仪器股份有限公司 Digital micro-mirror device with free standing spring tips and distributed address electrodes
CN101447464A (en) * 2007-11-30 2009-06-03 日本电气株式会社 Vacuum package and manufacturing process thereof
CN101530655A (en) * 2009-04-28 2009-09-16 北京金海创科技发展有限公司 Three-lens vertical light-incident medical and beautifying scanning vibrating mirror assembly
CN101562947A (en) * 2008-04-18 2009-10-21 群康科技(深圳)有限公司 Welding structure and welding method
CN108089174A (en) * 2017-11-10 2018-05-29 无锡英菲感知技术有限公司 It is a kind of that scanning field of view shared window laser radar system is doubled based on micro mirror
CN215340301U (en) * 2021-03-05 2021-12-28 上海禾赛科技股份有限公司 Scanning galvanometer and torsion structure thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060065977A1 (en) * 2004-09-30 2006-03-30 Kyocera Wireless Corp. Reliable printed wiring board assembly employing packages with solder joints and related assembly technique
CN101233441A (en) * 2005-07-29 2008-07-30 德克萨斯仪器股份有限公司 Digital micro-mirror device with free standing spring tips and distributed address electrodes
CN101447464A (en) * 2007-11-30 2009-06-03 日本电气株式会社 Vacuum package and manufacturing process thereof
CN101562947A (en) * 2008-04-18 2009-10-21 群康科技(深圳)有限公司 Welding structure and welding method
CN101530655A (en) * 2009-04-28 2009-09-16 北京金海创科技发展有限公司 Three-lens vertical light-incident medical and beautifying scanning vibrating mirror assembly
CN108089174A (en) * 2017-11-10 2018-05-29 无锡英菲感知技术有限公司 It is a kind of that scanning field of view shared window laser radar system is doubled based on micro mirror
CN215340301U (en) * 2021-03-05 2021-12-28 上海禾赛科技股份有限公司 Scanning galvanometer and torsion structure thereof

Also Published As

Publication number Publication date
CN115015876A (en) 2022-09-06

Similar Documents

Publication Publication Date Title
EP3237141B1 (en) Kinetically limited nano-scale diffusion bond structures and methods
US8703582B2 (en) Laser processing method
JP2021513226A (en) Part placements, packages and package placements, and manufacturing methods
JP6764552B2 (en) Work separation device and work separation method
US5963577A (en) Multiple element laser diode assembly incorporating a cylindrical microlens
WO2018190046A1 (en) Base material, mold package using same, base material manufacturing method, and mold package manufacturing method
CN215340301U (en) Scanning galvanometer and torsion structure thereof
WO2022183816A1 (en) Torsion structure of scanning galvanometer, and scanning galvanometer and manufacturing method therefor
KR20220024776A (en) A method for manufacturing a component assembly for a package, a method for manufacturing a package having a component assembly, a component assembly, and a package
JP2012004316A (en) Laser processing method
TWI685389B (en) Method for producing an euv module, euv module and euv lithography system
JP5625522B2 (en) Laser processing method
JP2012004313A (en) Laser processing method
JP2007503607A (en) Mirror for deflecting device in laser system, method for manufacturing the same and deflecting device for laser system
US9588338B2 (en) Reflective optical element for a dynamic deflection of a laser beam and method for manufacture thereof
CN115044865A (en) Mask assembly for coating film layer and manufacturing method thereof
CN113382550B (en) Circuit defect repairing system and method based on laser induction
JP2019139190A (en) Method for producing fine hole optical element, and fine hole optical element
JP2012004315A (en) Laser processing method
CN114786863A (en) Method for processing a metal-ceramic substrate, installation for such a method and metal-ceramic substrate produced by means of such a method
US20240139886A1 (en) Laser bonding of glass ceramic to metal foil
CN114453740B (en) Quartz harmonic oscillator assembly device and method based on laser welding
WO2023067860A1 (en) Protective cap, electronic device, and protective cap production method
JP6677853B1 (en) Sputtering target, method for joining target material and backing plate, and method for manufacturing sputtering target
JP3728020B2 (en) Fixing device for piezoelectric vibrator

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21928887

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21928887

Country of ref document: EP

Kind code of ref document: A1