WO2022163643A1 - Laser oscillator and laser processing device provided with same - Google Patents

Laser oscillator and laser processing device provided with same Download PDF

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Publication number
WO2022163643A1
WO2022163643A1 PCT/JP2022/002653 JP2022002653W WO2022163643A1 WO 2022163643 A1 WO2022163643 A1 WO 2022163643A1 JP 2022002653 W JP2022002653 W JP 2022002653W WO 2022163643 A1 WO2022163643 A1 WO 2022163643A1
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Prior art keywords
laser
control
bypass switch
bypass
laser diode
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PCT/JP2022/002653
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French (fr)
Japanese (ja)
Inventor
雄太 黒崎
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パナソニックＩｐマネジメント株式会社
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Priority to JP2022578404A priority Critical patent/JPWO2022163643A1/ja
Publication of WO2022163643A1 publication Critical patent/WO2022163643A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor

Definitions

  • the present disclosure relates to a laser oscillator including a laser diode and a bypass switch connected in parallel with the laser diode, and a laser processing apparatus including the same.
  • Patent Document 1 discloses a laser oscillator including a laser diode connected between first and second nodes and a current source for supplying a supply current between the first and second nodes, Disclosed is a bypass switch connected in parallel with the laser diode between first and second nodes. In this laser oscillator, it is possible to switch between the supply current to the laser diode and the bypass switch by switching the bypass switch on and off.
  • Patent Document 1 when the laser diode emits light (laser light) for a predetermined continuous light emission time, the switching operation from on to off and the switching operation from off to on are performed for one bypass switch as described above. It is necessary to perform at time intervals corresponding to the continuous light emission time. However, if one bypass switch is turned on and off at short intervals, the response of the bypass switch or the drive circuit for the bypass switch cannot keep up, and the bypass switch enters a half-on state, resulting in damage due to excessive heat generation. There is fear. Therefore, the continuous light emission time of the laser diode cannot be shortened very much.
  • the present disclosure has been made in view of this point, and its purpose is to make it possible to shorten the continuous emission time of a laser diode.
  • the present disclosure provides a laser diode comprising a laser diode connected between first and second nodes and a current source providing a supply current between said first and second nodes.
  • an oscillator a plurality of bypass switches connected between the first and second nodes, in parallel with the laser diode and in parallel with each other; and at least one first bypass of the plurality of bypass switches.
  • first control for turning on only a switch to stop the laser output of the laser diode
  • second control for turning off all of the plurality of bypass switches and allowing the supply current to flow through the laser diode, and among the plurality of bypass switches a control unit for continuously executing third control in this order to turn on only at least one second bypass switch different from the first bypass switch to stop the laser output of the laser diode; It is characterized by
  • the continuous emission time of the laser diode can be shortened.
  • FIG. 1 is a schematic diagram showing the configuration of a laser processing apparatus including a laser oscillator according to Embodiment 1 of the present disclosure.
  • FIG. 2 is a circuit diagram of a laser oscillator according to Embodiment 1 of the present disclosure.
  • FIG. 3 is a timing chart explaining the operation of the laser oscillator according to Embodiment 1 of the present disclosure.
  • FIG. 4 is a timing chart explaining the operation of the controller of the laser oscillator according to the second embodiment of the present disclosure.
  • FIG. 5 is a view corresponding to FIG. 4 of the third embodiment.
  • FIG. 1 shows the configuration of a laser processing apparatus 100. As shown in FIG. This laser processing apparatus 100 is used for cutting a work W, welding processing, and the like.
  • a laser processing apparatus 100 includes a laser processing head 10 , a manipulator 20 , a controller 30 , a laser oscillator 40 according to Embodiment 1 of the present disclosure, and an optical fiber 90 .
  • the laser processing head 10 irradiates the work W with the laser light LB from the optical fiber 90 .
  • the manipulator 20 has the laser processing head 10 attached to its tip and moves the laser processing head 10 .
  • the controller 30 controls operations of the laser processing head 10 , operations of the manipulator 20 , and laser oscillation of the laser oscillator 40 .
  • the laser oscillator 40 emits a laser beam LB to the optical fiber 90 by oscillation.
  • the optical fiber 90 passes the laser beam LB emitted by the laser oscillator 40 and guides it to the laser processing head 10 .
  • the laser processing head 10 emits laser light LB that has passed through an optical fiber 90 .
  • the laser processing apparatus 100 operates the laser processing head 10 and the manipulator 20 to irradiate the workpiece W with the laser beam LB emitted from the laser oscillator 40 along a desired trajectory.
  • the laser oscillator 40 includes a laser diode (LD) 41, a current source 50, three bypass switches 421 to 423, and a controller 43, as shown in FIG.
  • LD laser diode
  • a laser diode 41 is connected between the first and second nodes N1 and N2.
  • the laser diode 41 has its cathode side directed toward the second node N2.
  • a current source 50 supplies a supply current between the first and second nodes N1 and N2.
  • the current source 50 includes an AC power supply 51, a first rectifier circuit 52, an inverter circuit 53, a capacitor 54, an isolation transformer 55, a second rectifier circuit 56, and a reactor 57.
  • the first rectifier circuit 52 converts the power supply voltage output from the AC power supply 51 into a DC voltage and outputs it from a pair of output nodes ON1 and ON2.
  • the first rectifier circuit 52 is composed of, for example, a diode bridge.
  • the inverter circuit 53 generates a first AC voltage according to the voltages of the output nodes ON1 and ON2 of the first rectifier circuit 52 .
  • the inverter circuit 53 includes a first upper arm switching element 53a and a first lower arm switching element 53b connected in series between a pair of output nodes ON1 and ON2 of the first rectifier circuit 52.
  • a second upper arm switching element 53c and a second lower arm switching element 53d connected in series between a pair of output nodes ON1 and ON2 of the first rectifier circuit 52 .
  • a freewheeling diode 53e is connected in parallel to each of the switching elements 53a to 53d.
  • the capacitor 54 is connected between the first rectifier circuit 52 and the inverter circuit 53 in parallel with the first rectifier circuit 52 and the inverter circuit 53 .
  • a capacitor 54 is connected between a pair of output nodes ON1 and ON2 of the first rectifier circuit 52 .
  • the isolation transformer 55 converts the first AC voltage output by the inverter circuit 53 into a second AC voltage.
  • the isolation transformer 55 has a primary coil 55a and a secondary coil 55b.
  • the voltage of the primary coil 55a becomes the first AC voltage
  • the voltage of the secondary coil 55b becomes the second AC voltage.
  • the primary coil 55a connects a connection point between the first upper arm switching element 53a and the first lower arm switching element 53b and a connection point between the second upper arm switching element 53c and the second lower arm switching element 53d. connected between
  • the second rectifier circuit 56 generates a DC supply current based on a second AC voltage based on the first AC voltage.
  • the second rectifier circuit 56 has first and second diodes 56a and 56b.
  • the anode of the first diode 56a is connected to one end of the secondary coil 55b, and the anode of the second diode 56b is connected to the other end of the secondary coil 55b.
  • the cathodes of the first and second diodes 56a, 56b are connected to the first node N1.
  • the inverter circuit 53 and the second rectifier circuit 56 are insulated by the isolation transformer 55 .
  • the reactor 57 is connected between the middle portion of the secondary coil 55b and the second node N2.
  • the three bypass switches 421-423 are connected in parallel with the laser diode 41 and in parallel with each other between the first and second nodes N1 and N2. Freewheeling diodes 421a to 423a are connected in parallel to these bypass switches 421 to 423, respectively.
  • the control unit 43 controls on/off of the bypass switches 421 to 423 based on a pulse instruction indicating a period during which the laser diode 41 emits light (laser emission, laser oscillation (stimulated emission)). Specifically, the control unit 43 performs control A to turn on only the bypass switch 421 among the plurality of bypass switches 421 to 423 and turn off the bypass switches 422 and 423, and control B to turn off all the bypass switches 421 to 423.
  • the control D for turning off the bypass switch 421 and the bypass switch 422 and the control B are continuously and repeatedly executed in this order.
  • the control unit 43 executes control B for a period corresponding to the period indicated by the pulse instruction.
  • the bypass switch 421 is regarded as a first bypass switch
  • the bypass switch 422 constitutes a second bypass switch different from the first bypass switch
  • the control A is the first control
  • the control B is the second control.
  • control C correspond to the third control.
  • bypass switch 422 is regarded as a first bypass switch
  • bypass switch 423 constitutes a second bypass switch
  • control C corresponds to first control
  • control B corresponds to second control
  • control D corresponds to third control. .
  • bypass switches 421 to 423 to be selected are reset when resuming the repetitive control, and the same bypass switches 421 to 423 that were turned on immediately before the interruption may be turned on. good too.
  • control unit 43 controls the supply of current by the current source 50 by switching on and off the four switching elements 53a to 53d of the inverter circuit 53 of the current source 50.
  • the control unit 43 is composed of, for example, a microcomputer or FPGA. Between the control unit 43 and the bypass switches 421 to 423, an isolation circuit (photocoupler, pulse transformer, etc.) is provided to transmit signals from the control unit 43 to the bypass switches 421 to 423 while electrically isolating them from each other. may be provided. Further, in order to switch the bypass switches 421 to 423 at high speed, a drive circuit may be provided between the control unit 43 and the bypass switches 421 to 423 to increase the current supply capability.
  • an isolation circuit photocoupler, pulse transformer, etc.
  • control unit 43 performs the following control based on the pulse instruction indicating the period during which the laser diode 41 emits light (laser light emission).
  • the control unit 43 causes the current source 50 to supply current, turns off all of the bypass switches 421 to 423, and executes control B to supply current mainly to the laser diode 41.
  • the bypass switch 421 is switched from off to on, and execution of control A is started. This causes the supply current to flow through the bypass switch 421 and the current flowing through the laser diode 41 to decrease. Therefore, the laser output of the laser diode 41 stops. It should be noted that the current flowing through the laser diode 41 at this time may be decreased to the extent that the laser output of the laser diode 41 is stopped, that is, less than a predetermined threshold, and does not necessarily have to become 0A.
  • the control unit 43 turns off the bypass switch 421 and starts executing control B again.
  • the supply current mainly flows through the laser diode 41, and the laser diode 41 outputs laser light.
  • the control unit 43 turns on the bypass switch 422 and starts executing control C. This causes the supply current to flow through the bypass switch 422 and the current flowing through the laser diode 41 to decrease. Therefore, the laser output of the laser diode 41 stops. Note that the current flowing through the laser diode 41 at this time may also be decreased to the extent that the laser output of the laser diode 41 is stopped, that is, less than a predetermined threshold, and does not necessarily have to be 0A.
  • the control unit 43 turns off the bypass switch 422 and starts executing control B again.
  • the supply current mainly flows through the laser diode 41, and the laser diode 41 outputs laser light.
  • the control unit 43 turns on the bypass switch 423 and starts executing control D. This causes the supply current to flow through the bypass switch 423 and the current flowing through the laser diode 41 to decrease. Therefore, the laser output (laser emission) of the laser diode 41 stops. Note that the current flowing through the laser diode 41 at this time may also be decreased to the extent that the laser output of the laser diode 41 is stopped, that is, less than a predetermined threshold, and does not necessarily have to be 0A.
  • the control unit 43 turns off the bypass switch 423 and starts executing control B again.
  • the supply current mainly flows through the laser diode 41, and the laser diode 41 outputs laser light.
  • the control unit 43 turns on the bypass switch 421 and starts executing control A again. This causes the supply current to flow through the bypass switch 421 and the current flowing through the laser diode 41 to decrease. Therefore, the laser output of the laser diode 41 stops.
  • the control unit 43 turns off the bypass switch 421 and starts executing control B again.
  • the supply current mainly flows through the laser diode 41, and the laser diode 41 outputs laser light.
  • control unit 43 continuously and repeatedly executes control A, control B, control C, control B, control D, and control B in this order, thereby supplying a pulse current to the laser diode 41 and intermittently supplying the pulse current to the laser diode 41 .
  • light laser light
  • the time for control B can be set shorter and the continuous light emission time of the laser diode 41 can be shortened compared to the case where the switching operation is performed for the common bypass switch.
  • the duration of control B may be shortened, and the waveform of the current flowing through the laser diode 41 during control B may be triangular.
  • the continuous light emission time of the laser diode 41 can be set short, it is possible to finely control the amount of heat applied to the welded portion per unit time.
  • FIG. 4 is a timing chart illustrating the operation of the controller 43 of the laser oscillator 40 according to Embodiment 2 of the present disclosure.
  • the laser oscillator 40 has only two bypass switches 421 and 422 and does not have the bypass switch 423 .
  • the control unit 43 outputs a first clock signal with a duty ratio of 50% for switching the bypass switch 421 on and off.
  • Bypass switch 421 turns on when the first clock signal is at high level, and turns off when the first clock signal is at low level. That is, the control unit 43 switches the bypass switch 421 on and off when switching the level of the first clock signal.
  • control unit 43 further outputs a second clock signal for switching the bypass switch 422 on and off.
  • Bypass switch 422 turns on when the second clock signal is at high level and turns off when the second clock signal is at low level. That is, the control unit 43 switches the bypass switch 422 on and off when switching the level of the second clock signal.
  • the second clock signal is obtained by delaying the phase of the signal obtained by inverting the first clock signal (the signal indicated by the broken line in FIG. 4) by the phase corresponding to the continuous light emission time of the laser diode 41 .
  • the periods and duty ratios of the first and second clock signals are equal to each other.
  • the phases of the first and second clock signals are different from each other.
  • the first and second clock signals are signals that switch (periodically) between high level and low level at a specific cycle.
  • the first and second clock signals are generated by dividing or multiplying a clock signal generated by a timing device such as a crystal oscillator.
  • the first and second clock signals are switched to high level and low level at a specific period by counting the time by the signal generated by dividing or multiplying the clock signal generated by the timing device. may be generated.
  • the clock signal given from the outside of the laser processing apparatus 100 may be directly output by the controller 43 as the first and second clock signals.
  • the first and second clock signals do not include non-periodic signals, eg, signals whose levels are switched when an aperiodically occurring event occurs.
  • the control unit 43 performs first control to turn on the bypass switch 421 and turn off the bypass switch 422 to stop the laser output of the laser diode 41.
  • the control unit 43 performs second control in which both (all) of the bypass switches 421 and 422 are turned off and the supply current is mainly supplied to the laser diode 41.
  • the controller 43 performs third control to turn off the bypass switch 421 and turn on the bypass switch 422 to stop the laser output of the laser diode 41.
  • FIG. The second control time corresponds to the phase difference between the first and second clock signals.
  • control signals used to control the bypass switches 421 and 422 are the first and second clock signals with the same period, the light emission interval of the laser diode 41 can be easily controlled to be constant.
  • FIG. 5 is a timing chart illustrating the operation of the controller 43 of the laser oscillator 40 according to Embodiment 3 of the present disclosure.
  • the laser oscillator 40 has only two bypass switches 421 and 422 and does not have the bypass switch 423 .
  • the control unit 43 outputs a first clock signal that switches the bypass switch 421 on and off.
  • Bypass switch 421 turns on when the first clock signal is at high level, and turns off when the first clock signal is at low level. That is, the control unit 43 switches the bypass switch 421 on and off when switching the level of the first clock signal.
  • control unit 43 further outputs a second clock signal with a duty ratio of 50% for switching the bypass switch 422 on and off.
  • Bypass switch 422 turns on when the second clock signal is at high level and turns off when the second clock signal is at low level. That is, the control unit 43 switches the bypass switch 422 on and off when switching the level of the second clock signal.
  • the first clock signal is a signal obtained by inverting the second clock signal (the signal indicated by the broken line in FIG. 4) with a duty ratio of less than 50%. Therefore, the duty ratios of the first and second clock signals are different from each other. The periods of the first and second clock signals are equal to each other. Also, the fall of the second clock signal coincides with the rise of the first clock signal.
  • the first and second clock signals are signals that switch (periodically) between high level and low level at a specific cycle.
  • the first and second clock signals are generated by dividing or multiplying a clock signal generated by a timing device such as a crystal oscillator.
  • the first and second clock signals are switched to high level and low level at a specific period by counting the time by the signal generated by dividing or multiplying the clock signal generated by the timing device. may be generated.
  • the clock signal given from the outside of the laser processing apparatus 100 may be directly output by the controller 43 as the first and second clock signals.
  • the first and second clock signals do not include non-periodic signals, eg, signals whose levels are switched when an aperiodically occurring event occurs.
  • the control unit 43 performs the first control to turn on the bypass switch 421 and turn off the bypass switch 422 to stop the laser output of the laser diode 41 .
  • the control unit 43 performs second control in which both (all) of the bypass switches 421 and 422 are turned off and the supply current is mainly supplied to the laser diode 41 .
  • the controller 43 performs third control to turn off the bypass switch 421 and turn on the bypass switch 422 to stop the laser output of the laser diode 41 .
  • the second control time corresponds to the difference between the duty ratios of the first and second clock signals.
  • control signals used to control the bypass switches 421 and 422 are the first and second clock signals having the same period, the light emission interval of the laser diode 41 can be easily controlled to be constant.
  • a plurality of laser diodes 41 may be provided in series between the first and second nodes N1 and N2.
  • the laser oscillator 40 is provided with the three bypass switches 421 to 423, and in the second and third embodiments, the laser oscillator 40 is provided with the two bypass switches 421, 422. Four or more bypass switches may be provided.
  • bypass switch 421 to 423 is turned on in the first control and the third control.
  • the first and second bypass switches may be provided if they are different. That is, at least one each of the first and second bypass switches is provided.
  • the first and second clock signals have the same duty ratio of 50%.
  • the first and second clock signals may have different duty ratios. It may be greater than 50% or less than 50%.
  • the laser diode 41 may generate two types of continuous light emission time, which may adversely affect the processing quality, but the sum of the duty ratios of the first and second clock signals may be set to a value smaller than 100%. .
  • the continuous light emission time of the laser diode 41 may be adjusted according to the processing state during processing of the workpiece W with the laser beam LB.
  • the continuous emission time of the laser diode 41 is set to be shorter when the amount of spatter generation equal to or greater than a predetermined amount is detected by the amount of spatter detection means, compared to when the amount of spatter generation less than the predetermined amount is detected.
  • the continuous light emission time of the laser diode 41 can be adjusted by adjusting at least one of the duty ratio and phase of the first and second clock signals.
  • the duty ratio of the second clock signal is 50%. may be adjusted.
  • the falling edge of the second clock signal coincides with the rising edge of the first clock signal. There may be periods during which both the first and second clocks are at high level.
  • the present disclosure has the highly practical effect of shortening the continuous light emission time of the laser diode, so it is extremely useful and highly industrially applicable.

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  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
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Abstract

This laser oscillator 40 is provided with: bypass switches 421-423 provided between first and second nodes N1, N2 and connected in parallel to each other and in parallel to a laser diode 41; and a control unit 43 which continuously executes, in the following order, control A for turning ON only the bypass switch 421 and turning OFF the bypass switches 422, 423, control B for turning OFF all of the bypass switches 421-423 and causing a supply current to flow to a laser diode LD, and control C for turning OFF the bypass switches 421, 423 and turning ON only the bypass switch 422.

Description

レーザ発振器及びそれを備えたレーザ加工装置LASER OSCILLATOR AND LASER PROCESSING APPARATUS INCLUDING THE SAME
　本開示は、レーザダイオードと、前記レーザダイオードと並列に接続されたバイパススイッチとを備えたレーザ発振器及びそれを備えたレーザ加工装置に関する。 The present disclosure relates to a laser oscillator including a laser diode and a bypass switch connected in parallel with the laser diode, and a laser processing apparatus including the same.
　特許文献１には、第１及び第２のノード間に接続されたレーザダイオードと、前記第１及び第２のノード間に供給電流を供給する電流源とを備えたレーザ発振器であって、前記第１及び第２のノード間に、前記レーザダイオードと並列に接続されたバイパススイッチを備えたものが開示されている。このレーザ発振器では、バイパススイッチのオンオフを切り替えることによって、供給電流をレーザダイオードとバイパススイッチのいずれに流すかを切り替えることができる。 Patent Document 1 discloses a laser oscillator including a laser diode connected between first and second nodes and a current source for supplying a supply current between the first and second nodes, Disclosed is a bypass switch connected in parallel with the laser diode between first and second nodes. In this laser oscillator, it is possible to switch between the supply current to the laser diode and the bypass switch by switching the bypass switch on and off.
特許第６５７７５７５号公報Japanese Patent No. 6577575
　ところで、特許文献１では、レーザダイオードを所定の連続発光時間だけ発光（レーザ発光）させる場合、１つのバイパススイッチに対し、オンからオフへの切り替え動作とオフからオンへの切り替え動作とを、前記連続発光時間に相当する時間間隔で行う必要がある。しかし、１つのバイパススイッチに対してオンオフの切り替え動作を短い間隔で行うと、バイパススイッチ、又はバイパススイッチの駆動回路の応答が追いつかず、バイパススイッチがハーフオン状態となり、過度の発熱によって破損してしまう虞がある。したがって、レーザダイオードの連続発光時間をあまり短くできない。 By the way, in Patent Document 1, when the laser diode emits light (laser light) for a predetermined continuous light emission time, the switching operation from on to off and the switching operation from off to on are performed for one bypass switch as described above. It is necessary to perform at time intervals corresponding to the continuous light emission time. However, if one bypass switch is turned on and off at short intervals, the response of the bypass switch or the drive circuit for the bypass switch cannot keep up, and the bypass switch enters a half-on state, resulting in damage due to excessive heat generation. There is fear. Therefore, the continuous light emission time of the laser diode cannot be shortened very much.
　本開示は、かかる点に鑑みてなされたものであり、その目的とするところは、レーザダイオードの連続発光時間をより短くできるようにすることにある。 The present disclosure has been made in view of this point, and its purpose is to make it possible to shorten the continuous emission time of a laser diode.
　上記の目的を達成するため、本開示は、第１及び第２のノード間に接続されたレーザダイオードと、前記第１及び第２のノード間に供給電流を供給する電流源とを備えたレーザ発振器であって、前記第１及び第２のノード間に、前記レーザダイオードと並列に、かつ互いに並列に接続された複数のバイパススイッチと、前記複数のバイパススイッチのうち少なくとも１つの第１のバイパススイッチだけをオンして前記レーザダイオードのレーザ出力を停止させる第１制御、前記複数のバイパススイッチを全てオフし、前記レーザダイオードに前記供給電流を流す第２制御、及び前記複数のバイパススイッチのうち前記第１のバイパススイッチとは異なる少なくとも１つの第２のバイパススイッチだけをオンして前記レーザダイオードのレーザ出力を停止させる第３制御をこの順で連続して実行する制御部とをさらに備えたことを特徴とする。 To achieve the above objectives, the present disclosure provides a laser diode comprising a laser diode connected between first and second nodes and a current source providing a supply current between said first and second nodes. an oscillator, a plurality of bypass switches connected between the first and second nodes, in parallel with the laser diode and in parallel with each other; and at least one first bypass of the plurality of bypass switches. first control for turning on only a switch to stop the laser output of the laser diode, second control for turning off all of the plurality of bypass switches and allowing the supply current to flow through the laser diode, and among the plurality of bypass switches a control unit for continuously executing third control in this order to turn on only at least one second bypass switch different from the first bypass switch to stop the laser output of the laser diode; It is characterized by
　これにより、第２制御の開始時及び終了時に異なるバイパススイッチに対してオンオフの切り替え動作を行うので、第２制御の開始時の切り替え動作が完全に終了していない状態でも、第２制御の終了時の切り替え動作を開始できる。したがって、共通のバイパススイッチに対して切り替え動作を行う場合に比べ、第２制御の時間を短く設定し、レーザダイオードの連続発光時間を短くできる。 As a result, different bypass switches are switched on and off at the start and end of the second control. Therefore, even if the switching operation at the start of the second control is not completely finished, the second control is finished. Can start time switching. Therefore, the time for the second control can be set shorter and the continuous light emission time of the laser diode can be shortened compared to the case where the switching operation is performed with respect to the common bypass switch.
　本開示によると、レーザダイオードの連続発光時間を短くできる。 According to the present disclosure, the continuous emission time of the laser diode can be shortened.
図１は、本開示の実施形態１に係るレーザ発振器を備えたレーザ加工装置の構成を示す概略図である。FIG. 1 is a schematic diagram showing the configuration of a laser processing apparatus including a laser oscillator according to Embodiment 1 of the present disclosure. 図２は、本開示の実施形態１に係るレーザ発振器の回路図である。FIG. 2 is a circuit diagram of a laser oscillator according to Embodiment 1 of the present disclosure. 図３は、本開示の実施形態１に係るレーザ発振器の動作を説明するタイミングチャートである。FIG. 3 is a timing chart explaining the operation of the laser oscillator according to Embodiment 1 of the present disclosure. 図４は、本開示の実施形態２に係るレーザ発振器の制御部の動作を説明するタイミングチャートである。FIG. 4 is a timing chart explaining the operation of the controller of the laser oscillator according to the second embodiment of the present disclosure. 図５は、実施形態３の図４相当図である。FIG. 5 is a view corresponding to FIG. 4 of the third embodiment.
　以下、本開示の実施形態を図面に基づいて詳細に説明する。以下の好ましい実施形態の説明は、本質的に例示に過ぎず、本発明、その適用物或いはその用途を制限することを意図するものでは全くない。 Hereinafter, embodiments of the present disclosure will be described in detail based on the drawings. The following description of preferred embodiments is merely exemplary in nature and is in no way intended to limit the invention, its applicability or its uses.
　（実施形態１）
　図１は、レーザ加工装置１００の構成を示す。このレーザ加工装置１００は、ワークＷの切断や溶接加工等を行うのに使用される。レーザ加工装置１００は、レーザ加工ヘッド１０と、マニピュレータ２０と、コントローラ３０と、本開示の実施形態１に係るレーザ発振器４０と、光ファイバ９０とを備えている。 (Embodiment 1)
FIG. 1 shows the configuration of a laser processing apparatus 100. As shown in FIG. This laser processing apparatus 100 is used for cutting a work W, welding processing, and the like. A laser processing apparatus 100 includes a laser processing head 10 , a manipulator 20 , a controller 30 , a laser oscillator 40 according to Embodiment 1 of the present disclosure, and an optical fiber 90 .
　レーザ加工ヘッド１０は、光ファイバ９０からのレーザ光ＬＢをワークＷに照射する。マニピュレータ２０は、先端にレーザ加工ヘッド１０が取り付けられ、レーザ加工ヘッド１０を移動させる。コントローラ３０は、レーザ加工ヘッド１０の動作とマニピュレータ２０の動作と、レーザ発振器４０のレーザ発振を制御する。レーザ発振器４０は、発振によりレーザ光ＬＢを光ファイバ９０に出射する。光ファイバ９０は、レーザ発振器４０により出射されたレーザ光ＬＢを通過させてレーザ加工ヘッド１０に導く。レーザ加工ヘッド１０は、光ファイバ９０を通過したレーザ光ＬＢを出射する。このような構成により、レーザ加工装置１００は、レーザ発振器４０から出射されたレーザ光ＬＢを、レーザ加工ヘッド１０及びマニピュレータ２０を動作させてワークＷに所望の軌跡で照射させる。 The laser processing head 10 irradiates the work W with the laser light LB from the optical fiber 90 . The manipulator 20 has the laser processing head 10 attached to its tip and moves the laser processing head 10 . The controller 30 controls operations of the laser processing head 10 , operations of the manipulator 20 , and laser oscillation of the laser oscillator 40 . The laser oscillator 40 emits a laser beam LB to the optical fiber 90 by oscillation. The optical fiber 90 passes the laser beam LB emitted by the laser oscillator 40 and guides it to the laser processing head 10 . The laser processing head 10 emits laser light LB that has passed through an optical fiber 90 . With such a configuration, the laser processing apparatus 100 operates the laser processing head 10 and the manipulator 20 to irradiate the workpiece W with the laser beam LB emitted from the laser oscillator 40 along a desired trajectory.
　レーザ発振器４０は、図２に示すように、レーザダイオード（ＬＤ）４１と、電流源５０と、３つのバイパススイッチ４２１～４２３と、制御部４３とを備えている。 The laser oscillator 40 includes a laser diode (LD) 41, a current source 50, three bypass switches 421 to 423, and a controller 43, as shown in FIG.
　レーザダイオード４１は、第１及び第２のノードＮ１，Ｎ２間に接続されている。レーザダイオード４１は、そのカソード側を第２のノードＮ２側に向けている。 A laser diode 41 is connected between the first and second nodes N1 and N2. The laser diode 41 has its cathode side directed toward the second node N2.
　電流源５０は、第１及び第２のノードＮ１，Ｎ２間に供給電流を供給する。具体的には、電流源５０は、交流電源５１と、第１整流回路５２と、インバータ回路５３と、コンデンサ５４と、絶縁トランス５５と、第２整流回路５６と、リアクトル５７とを有している。 A current source 50 supplies a supply current between the first and second nodes N1 and N2. Specifically, the current source 50 includes an AC power supply 51, a first rectifier circuit 52, an inverter circuit 53, a capacitor 54, an isolation transformer 55, a second rectifier circuit 56, and a reactor 57. there is
　第１整流回路５２は、交流電源５１から出力される電源電圧を直流電圧に変換して１対の出力ノードＯＮ１，ＯＮ２から出力する。第１整流回路５２は、例えばダイオードブリッジで構成される。 The first rectifier circuit 52 converts the power supply voltage output from the AC power supply 51 into a DC voltage and outputs it from a pair of output nodes ON1 and ON2. The first rectifier circuit 52 is composed of, for example, a diode bridge.
　インバータ回路５３は、第１整流回路５２の出力ノードＯＮ１，ＯＮ２の電圧に応じて第１交流電圧を生成する。具体的には、インバータ回路５３は、第１整流回路５２の１対の出力ノードＯＮ１，ＯＮ２間に互いに直列に接続された第１の上アームスイッチング素子５３ａ、及び第１の下アームスイッチング素子５３ｂと、第１整流回路５２の１対の出力ノードＯＮ１，ＯＮ２間に互いに直列に接続された第２の上アームスイッチング素子５３ｃ、及び第２の下アームスイッチング素子５３ｄとを有している。各スイッチング素子５３ａ～５３ｄには、還流ダイオード５３ｅが並列に接続されている。 The inverter circuit 53 generates a first AC voltage according to the voltages of the output nodes ON1 and ON2 of the first rectifier circuit 52 . Specifically, the inverter circuit 53 includes a first upper arm switching element 53a and a first lower arm switching element 53b connected in series between a pair of output nodes ON1 and ON2 of the first rectifier circuit 52. , and a second upper arm switching element 53c and a second lower arm switching element 53d connected in series between a pair of output nodes ON1 and ON2 of the first rectifier circuit 52 . A freewheeling diode 53e is connected in parallel to each of the switching elements 53a to 53d.
　コンデンサ５４は、第１整流回路５２とインバータ回路５３との間に、これら第１整流回路５２とインバータ回路５３と並列に接続されている。コンデンサ５４は、第１整流回路５２の１対の出力ノードＯＮ１，ＯＮ２間に接続されている。 The capacitor 54 is connected between the first rectifier circuit 52 and the inverter circuit 53 in parallel with the first rectifier circuit 52 and the inverter circuit 53 . A capacitor 54 is connected between a pair of output nodes ON1 and ON2 of the first rectifier circuit 52 .
　絶縁トランス５５は、インバータ回路５３により出力される第１交流電圧を第２交流電圧に変換する。絶縁トランス５５は、一次コイル５５ａと、二次コイル５５ｂとを有している。一次コイル５５ａの電圧が、第１交流電圧となり、二次コイル５５ｂの電圧が、第２交流電圧となる。一次コイル５５ａは、第１の上アームスイッチング素子５３ａ、及び第１の下アームスイッチング素子５３ｂの接続点と、第２の上アームスイッチング素子５３ｃ、及び第２の下アームスイッチング素子５３ｄの接続点との間に接続されている。 The isolation transformer 55 converts the first AC voltage output by the inverter circuit 53 into a second AC voltage. The isolation transformer 55 has a primary coil 55a and a secondary coil 55b. The voltage of the primary coil 55a becomes the first AC voltage, and the voltage of the secondary coil 55b becomes the second AC voltage. The primary coil 55a connects a connection point between the first upper arm switching element 53a and the first lower arm switching element 53b and a connection point between the second upper arm switching element 53c and the second lower arm switching element 53d. connected between
　第２整流回路５６は、第１交流電圧に基づく第２交流電圧に基づいて、直流の供給電流を生成する。具体的には、第２整流回路５６は、第１及び第２のダイオード５６ａ，５６ｂを有している。第１のダイオード５６ａのアノードは、二次コイル５５ｂの一端部に接続され、第２のダイオード５６ｂのアノードは、二次コイル５５ｂの他端部に接続されている。第１及び第２のダイオード５６ａ，５６ｂのカソードは、第１のノードＮ１に接続されている。 The second rectifier circuit 56 generates a DC supply current based on a second AC voltage based on the first AC voltage. Specifically, the second rectifier circuit 56 has first and second diodes 56a and 56b. The anode of the first diode 56a is connected to one end of the secondary coil 55b, and the anode of the second diode 56b is connected to the other end of the secondary coil 55b. The cathodes of the first and second diodes 56a, 56b are connected to the first node N1.
　このように、インバータ回路５３と、第２整流回路５６とは、絶縁トランス５５により絶縁されている。 Thus, the inverter circuit 53 and the second rectifier circuit 56 are insulated by the isolation transformer 55 .
　リアクトル５７は、二次コイル５５ｂの中途部と第２のノードＮ２との間に接続されている。 The reactor 57 is connected between the middle portion of the secondary coil 55b and the second node N2.
　３つのバイパススイッチ４２１～４２３は、第１及び第２のノードＮ１，Ｎ２間に、レーザダイオード４１と並列に、かつ互いに並列に接続されている。これらのバイパススイッチ４２１～４２３には、還流ダイオード４２１ａ～４２３ａがそれぞれ並列に接続されている。 The three bypass switches 421-423 are connected in parallel with the laser diode 41 and in parallel with each other between the first and second nodes N1 and N2. Freewheeling diodes 421a to 423a are connected in parallel to these bypass switches 421 to 423, respectively.
　制御部４３は、レーザダイオード４１を発光（レーザ発光、レーザ発振（誘導放出））させる期間を示すパルス指示に基づいて、バイパススイッチ４２１～４２３のオンオフを制御する。詳しくは、制御部４３は、複数のバイパススイッチ４２１～４２３のうちバイパススイッチ４２１だけをオンし、かつバイパススイッチ４２２及びバイパススイッチ４２３をオフする制御Ａ、バイパススイッチ４２１～４２３を全てオフする制御Ｂ、バイパススイッチ４２１～４２３のうちバイパススイッチ４２２だけをオンし、かつバイパススイッチ４２１及びバイパススイッチ４２３をオフする制御Ｃ、前記制御Ｂ、バイパススイッチ４２１～４２３のうちバイパススイッチ４２３だけをオンし、かつバイパススイッチ４２１及びバイパススイッチ４２２をオフする制御Ｄ、及び前記制御Ｂをこの順で連続して繰り返し実行する。制御部４３は、パルス指示に示される期間に応じた期間に、制御Ｂを実行する。バイパススイッチ４２１を、第１のバイパススイッチとみなした場合、バイパススイッチ４２２が、第１のバイパススイッチとは異なる第２のバイパススイッチを構成し、制御Ａが第１制御、制御Ｂが第２制御、制御Ｃが第３制御に相当する。バイパススイッチ４２２を第１のバイパススイッチとみなした場合、バイパススイッチ４２３が第２のバイパススイッチを構成し、制御Ｃが第１制御、制御Ｂが第２制御、制御Ｄが第３制御に相当する。 The control unit 43 controls on/off of the bypass switches 421 to 423 based on a pulse instruction indicating a period during which the laser diode 41 emits light (laser emission, laser oscillation (stimulated emission)). Specifically, the control unit 43 performs control A to turn on only the bypass switch 421 among the plurality of bypass switches 421 to 423 and turn off the bypass switches 422 and 423, and control B to turn off all the bypass switches 421 to 423. , a control C for turning on only the bypass switch 422 out of the bypass switches 421 to 423 and turning off the bypass switches 421 and 423, the control B, turning on only the bypass switch 423 out of the bypass switches 421 to 423, and The control D for turning off the bypass switch 421 and the bypass switch 422 and the control B are continuously and repeatedly executed in this order. The control unit 43 executes control B for a period corresponding to the period indicated by the pulse instruction. When the bypass switch 421 is regarded as a first bypass switch, the bypass switch 422 constitutes a second bypass switch different from the first bypass switch, the control A is the first control, and the control B is the second control. , and control C correspond to the third control. When bypass switch 422 is regarded as a first bypass switch, bypass switch 423 constitutes a second bypass switch, control C corresponds to first control, control B corresponds to second control, and control D corresponds to third control. .
　なお、制御Ａ、制御Ｂ、制御Ｃ、制御Ｂ、制御Ｄ、及び制御Ｂを繰り返す繰り返し制御を、電流源５０による電流供給の停止、又はパルス電流出力の直流出力への移行の理由で中断させた場合には、繰り返し制御に再開するときに、選択するバイパススイッチ４２１～４２３がリセットされ、中断直前にオンしていたバイパススイッチ４２１～４２３と同じバイパススイッチ４２１～４２３をオンさせることがあってもよい。 It should be noted that the repeated control that repeats control A, control B, control C, control B, control D, and control B is interrupted for the reason of stopping the current supply by the current source 50 or switching the pulse current output to the DC output. In this case, the bypass switches 421 to 423 to be selected are reset when resuming the repetitive control, and the same bypass switches 421 to 423 that were turned on immediately before the interruption may be turned on. good too.
　また、制御部４３は、電流源５０による電流の供給を、電流源５０のインバータ回路５３の４つのスイッチング素子５３ａ～５３ｄのオンオフを切り替えることによって制御する。 In addition, the control unit 43 controls the supply of current by the current source 50 by switching on and off the four switching elements 53a to 53d of the inverter circuit 53 of the current source 50.
　制御部４３は例えばマイクロコンピュータやＦＰＧＡで構成される。制御部４３とバイパススイッチ４２１～４２３との間には、両者を互いに電気的に絶縁した状態で、制御部４３からバイパススイッチ４２１～４２３に信号を伝達する絶縁回路（フォトカプラ、パルストランス等）を設けてもよい。また、バイパススイッチ４２１～４２３を高速に切り替えるために、制御部４３とバイパススイッチ４２１～４２３との間に、電流供給能力を高めるための駆動回路を設けてもよい。 The control unit 43 is composed of, for example, a microcomputer or FPGA. Between the control unit 43 and the bypass switches 421 to 423, an isolation circuit (photocoupler, pulse transformer, etc.) is provided to transmit signals from the control unit 43 to the bypass switches 421 to 423 while electrically isolating them from each other. may be provided. Further, in order to switch the bypass switches 421 to 423 at high speed, a drive circuit may be provided between the control unit 43 and the bypass switches 421 to 423 to increase the current supply capability.
　次に、上述のように構成されたレーザ発振器４０の動作について、図３を参照して説明する。図３の例では、制御部４３は、レーザダイオード４１を発光（レーザ発光）させる期間を示すパルス指示に基づいて、以下の制御を行う。 Next, the operation of the laser oscillator 40 configured as described above will be described with reference to FIG. In the example of FIG. 3, the control unit 43 performs the following control based on the pulse instruction indicating the period during which the laser diode 41 emits light (laser light emission).
　まず、制御部４３は、電流源５０に電流の供給をさせ、かつバイパススイッチ４２１～４２３を全てオフし、主にレーザダイオード４１に供給電流を流す制御Ｂを実行している状態で、タイミングｔ１において、バイパススイッチ４２１をオフからオンに切り替え、制御Ａの実行を開始する。これにより、供給電流がバイパススイッチ４２１に流れ、レーザダイオード４１に流れる電流が減少する。したがって、レーザダイオード４１のレーザ出力が停止する。なお、このときレーザダイオード４１に流れる電流は、レーザダイオード４１のレーザ出力を停止させる程度、すなわち所定の閾値未満に減少すればよく、必ずしも０Ａにならなくてもよい。 First, the control unit 43 causes the current source 50 to supply current, turns off all of the bypass switches 421 to 423, and executes control B to supply current mainly to the laser diode 41. At timing t1 , the bypass switch 421 is switched from off to on, and execution of control A is started. This causes the supply current to flow through the bypass switch 421 and the current flowing through the laser diode 41 to decrease. Therefore, the laser output of the laser diode 41 stops. It should be noted that the current flowing through the laser diode 41 at this time may be decreased to the extent that the laser output of the laser diode 41 is stopped, that is, less than a predetermined threshold, and does not necessarily have to become 0A.
　次に、タイミングｔ１から期間Ｔ１１が経過したタイミングｔ２において、制御部４３は、バイパススイッチ４２１をオフし、制御Ｂの実行を再度開始する。これにより、主にレーザダイオード４１に供給電流が流れ、レーザダイオード４１がレーザ光を出力する。 Next, at timing t2 after the period T11 has elapsed from timing t1, the control unit 43 turns off the bypass switch 421 and starts executing control B again. As a result, the supply current mainly flows through the laser diode 41, and the laser diode 41 outputs laser light.
　その後、タイミングｔ３において、制御部４３は、バイパススイッチ４２２をオンし、制御Ｃの実行を開始する。これにより、供給電流がバイパススイッチ４２２に流れ、レーザダイオード４１に流れる電流が減少する。したがって、レーザダイオード４１のレーザ出力が停止する。なお、このときレーザダイオード４１に流れる電流も、レーザダイオード４１のレーザ出力を停止させる程度、すなわち所定の閾値未満に減少すればよく、必ずしも０Ａにならなくてもよい。 After that, at timing t3, the control unit 43 turns on the bypass switch 422 and starts executing control C. This causes the supply current to flow through the bypass switch 422 and the current flowing through the laser diode 41 to decrease. Therefore, the laser output of the laser diode 41 stops. Note that the current flowing through the laser diode 41 at this time may also be decreased to the extent that the laser output of the laser diode 41 is stopped, that is, less than a predetermined threshold, and does not necessarily have to be 0A.
　次いで、タイミングｔ３から期間Ｔ１２が経過したタイミングｔ４において、制御部４３は、バイパススイッチ４２２をオフし、制御Ｂの実行を再度開始する。これにより、主にレーザダイオード４１に供給電流が流れ、レーザダイオード４１がレーザ光を出力する。 Next, at timing t4 when period T12 has passed from timing t3, the control unit 43 turns off the bypass switch 422 and starts executing control B again. As a result, the supply current mainly flows through the laser diode 41, and the laser diode 41 outputs laser light.
　その後、タイミングｔ５において、制御部４３は、バイパススイッチ４２３をオンし、制御Ｄの実行を開始する。これにより、供給電流がバイパススイッチ４２３に流れ、レーザダイオード４１に流れる電流が減少する。したがって、レーザダイオード４１のレーザ出力（レーザ発光）が停止する。なお、このときレーザダイオード４１に流れる電流も、レーザダイオード４１のレーザ出力を停止させる程度、すなわち所定の閾値未満に減少すればよく、必ずしも０Ａにならなくてもよい。 After that, at timing t5, the control unit 43 turns on the bypass switch 423 and starts executing control D. This causes the supply current to flow through the bypass switch 423 and the current flowing through the laser diode 41 to decrease. Therefore, the laser output (laser emission) of the laser diode 41 stops. Note that the current flowing through the laser diode 41 at this time may also be decreased to the extent that the laser output of the laser diode 41 is stopped, that is, less than a predetermined threshold, and does not necessarily have to be 0A.
　さらに、タイミングｔ５から期間Ｔ１３が経過したタイミングｔ６において、制御部４３は、バイパススイッチ４２３をオフし、制御Ｂの実行を再度開始する。これにより、主にレーザダイオード４１に供給電流が流れ、レーザダイオード４１がレーザ光を出力する。 Further, at timing t6 after the period T13 has passed from timing t5, the control unit 43 turns off the bypass switch 423 and starts executing control B again. As a result, the supply current mainly flows through the laser diode 41, and the laser diode 41 outputs laser light.
　その後、タイミングｔ７において、制御部４３は、バイパススイッチ４２１をオンし、制御Ａの実行を再び開始する。これにより、供給電流がバイパススイッチ４２１に流れ、レーザダイオード４１に流れる電流が減少する。したがって、レーザダイオード４１のレーザ出力が停止する。 After that, at timing t7, the control unit 43 turns on the bypass switch 421 and starts executing control A again. This causes the supply current to flow through the bypass switch 421 and the current flowing through the laser diode 41 to decrease. Therefore, the laser output of the laser diode 41 stops.
　さらに、タイミングｔ７から期間Ｔ１４が経過したタイミングｔ８において、制御部４３は、バイパススイッチ４２１をオフし、制御Ｂの実行を再度開始する。これにより、主にレーザダイオード４１に供給電流が流れ、レーザダイオード４１がレーザ光を出力する。 Furthermore, at timing t8 when period T14 has passed from timing t7, the control unit 43 turns off the bypass switch 421 and starts executing control B again. As a result, the supply current mainly flows through the laser diode 41, and the laser diode 41 outputs laser light.
　このように、制御部４３は、制御Ａ、制御Ｂ、制御Ｃ、制御Ｂ、制御Ｄ、及び制御Ｂをこの順で連続して繰り返し実行することにより、レーザダイオード４１にパルス電流を流し、断続的に発光（レーザ発光）させることができる。 In this manner, the control unit 43 continuously and repeatedly executes control A, control B, control C, control B, control D, and control B in this order, thereby supplying a pulse current to the laser diode 41 and intermittently supplying the pulse current to the laser diode 41 . light (laser light).
　また、制御Ｂの開始時及び終了時に異なるバイパススイッチ４２１～４２３に対してオンオフの切り替え動作を行うので、制御Ｂの開始時の切り替え動作が完全に終了していない状態でも、制御Ｂの終了時の切り替え動作を開始できる。したがって、共通のバイパススイッチに対して切り替え動作を行う場合に比べ、制御Ｂの時間を短く設定し、レーザダイオード４１の連続発光時間を短くできる。例えば、制御Ｂの時間を短くし、制御Ｂの期間にレーザダイオード４１に流れる電流の波形を三角波形状にしてもよい。また、レーザダイオード４１の連続発光時間を短く設定できるので、単位時間あたりに溶接部に与える熱量を微細に制御できるようになり、その結果、ワークＷの精密な加工が可能になる。 In addition, since the bypass switches 421 to 423 are switched on and off differently at the start and end of the control B, even if the switching operation at the start of the control B is not completely completed, switching operation can be initiated. Therefore, the time for control B can be set shorter and the continuous light emission time of the laser diode 41 can be shortened compared to the case where the switching operation is performed for the common bypass switch. For example, the duration of control B may be shortened, and the waveform of the current flowing through the laser diode 41 during control B may be triangular. In addition, since the continuous light emission time of the laser diode 41 can be set short, it is possible to finely control the amount of heat applied to the welded portion per unit time.
　（実施形態２）
　図４は、本開示の実施形態２に係るレーザ発振器４０の制御部４３の動作を説明するタイミングチャートである。本実施形態２では、レーザ発振器４０が、２つのバイパススイッチ４２１，４２２だけを備え、バイパススイッチ４２３を備えていない。 (Embodiment 2)
FIG. 4 is a timing chart illustrating the operation of the controller 43 of the laser oscillator 40 according to Embodiment 2 of the present disclosure. In Embodiment 2, the laser oscillator 40 has only two bypass switches 421 and 422 and does not have the bypass switch 423 .
　制御部４３は、バイパススイッチ４２１のオンオフを切り替えるデューティ比５０％の第１のクロック信号を出力する。バイパススイッチ４２１は、第１のクロック信号がハイレベルであるときにオンし、第１のクロック信号がローレベルであるときにオフする。つまり、制御部４３は、第１のクロック信号のレベル切替時にバイパススイッチ４２１のオンオフを切り替える。 The control unit 43 outputs a first clock signal with a duty ratio of 50% for switching the bypass switch 421 on and off. Bypass switch 421 turns on when the first clock signal is at high level, and turns off when the first clock signal is at low level. That is, the control unit 43 switches the bypass switch 421 on and off when switching the level of the first clock signal.
　また、制御部４３は、バイパススイッチ４２２のオンオフを切り替える第２のクロック信号をさらに出力する。バイパススイッチ４２２は、第２のクロック信号がハイレベルであるときにオンし、第２のクロック信号がローレベルであるときにオフする。つまり、制御部４３は、第２のクロック信号のレベル切替時にバイパススイッチ４２２のオンオフを切り替える。第２のクロック信号は、第１のクロック信号を反転させた信号（図４中破線で示す信号）の位相を、レーザダイオード４１の連続発光時間に相当する位相分遅らせた信号である。第１及び第２のクロック信号の周期及びデューティ比は互いに等しい。第１及び第２のクロック信号の位相は、互いに異なっている。 In addition, the control unit 43 further outputs a second clock signal for switching the bypass switch 422 on and off. Bypass switch 422 turns on when the second clock signal is at high level and turns off when the second clock signal is at low level. That is, the control unit 43 switches the bypass switch 422 on and off when switching the level of the second clock signal. The second clock signal is obtained by delaying the phase of the signal obtained by inverting the first clock signal (the signal indicated by the broken line in FIG. 4) by the phase corresponding to the continuous light emission time of the laser diode 41 . The periods and duty ratios of the first and second clock signals are equal to each other. The phases of the first and second clock signals are different from each other.
　第１及び第２のクロック信号は、ハイレベルとローレベルとに特定の周期で（周期的に）切り替わる信号とする。第１及び第２のクロック信号は、例えば水晶発振子のようなタイミングデバイスによって生成されたクロック信号を分周又は逓倍することにより生成される。あるいは、第１及び第２のクロック信号は、タイミングデバイスによって生成されたクロック信号を分周又は逓倍することにより生成された信号による時間のカウントにより、特定周期でハイレベルとローレベルに切り替わるように生成してもよい。あるいは、レーザ加工装置１００の外部から与えられたクロック信号を、制御部４３が第１及び第２のクロック信号としてそのまま出力してもよい。第１及び第２のクロック信号には、非周期的な信号は含まれず、例えば、非周期的に発生する事象が発生したときにレベルが切り替えられる信号は含まれない。 The first and second clock signals are signals that switch (periodically) between high level and low level at a specific cycle. The first and second clock signals are generated by dividing or multiplying a clock signal generated by a timing device such as a crystal oscillator. Alternatively, the first and second clock signals are switched to high level and low level at a specific period by counting the time by the signal generated by dividing or multiplying the clock signal generated by the timing device. may be generated. Alternatively, the clock signal given from the outside of the laser processing apparatus 100 may be directly output by the controller 43 as the first and second clock signals. The first and second clock signals do not include non-periodic signals, eg, signals whose levels are switched when an aperiodically occurring event occurs.
　図４の例では、期間Ｔ２１において、制御部４３は、バイパススイッチ４２１をオンし、かつバイパススイッチ４２２をオフしてレーザダイオード４１のレーザ出力を停止させる第１制御を行う。次いで、期間Ｔ２１と連続する期間Ｔ２２において、制御部４３は、バイパススイッチ４２１，４２２を両方（全て）オフして主にレーザダイオード４１に供給電流を流す第２制御を行う。次いで、期間Ｔ２２と連続する期間Ｔ２３において、制御部４３は、バイパススイッチ４２１をオフし、かつバイパススイッチ４２２をオンしてレーザダイオード４１のレーザ出力を停止させる第３制御を行う。第２制御の時間は、第１及び第２のクロック信号の位相差に応じた時間となる。 In the example of FIG. 4, in period T21, the control unit 43 performs first control to turn on the bypass switch 421 and turn off the bypass switch 422 to stop the laser output of the laser diode 41. FIG. Next, in a period T22 that continues from the period T21, the control unit 43 performs second control in which both (all) of the bypass switches 421 and 422 are turned off and the supply current is mainly supplied to the laser diode 41. FIG. Next, in a period T23 that continues from the period T22, the controller 43 performs third control to turn off the bypass switch 421 and turn on the bypass switch 422 to stop the laser output of the laser diode 41. FIG. The second control time corresponds to the phase difference between the first and second clock signals.
　その他の構成は、実施形態１と同じであるので、その詳細な説明を省略する。 Other configurations are the same as in Embodiment 1, so detailed description thereof will be omitted.
　したがって、本実施形態２によれば、バイパススイッチ４２１，４２２の制御に用いる制御信号が互いに周期が等しい第１及び第２のクロック信号なので、レーザダイオード４１の発光間隔を容易に一定に制御できる。 Therefore, according to the second embodiment, since the control signals used to control the bypass switches 421 and 422 are the first and second clock signals with the same period, the light emission interval of the laser diode 41 can be easily controlled to be constant.
　また、バイパススイッチ４２１，４２２の制御に、周期が等しく、かつ位相が異なる２つのクロック信号を用いるので、当該２つのクロック信号を出力する機能を有し、当該２つのクロック信号の位相差をユーザにより設定可能なマイクロコンピュータを制御部４３の信号発生源として採用した場合には、クロック信号の位相を設定するだけで、レーザダイオード４１の連続発光時間を容易に調節できる。 Since two clock signals with the same cycle and different phases are used to control the bypass switches 421 and 422, the function of outputting the two clock signals is provided, and the phase difference between the two clock signals can be detected by the user. When a microcomputer that can be set by the control unit 43 is employed as the signal generation source of the control unit 43, the continuous light emission time of the laser diode 41 can be easily adjusted simply by setting the phase of the clock signal.
　（実施形態３）
　図５は、本開示の実施形態３に係るレーザ発振器４０の制御部４３の動作を説明するタイミングチャートである。本実施形態３では、レーザ発振器４０が、２つのバイパススイッチ４２１，４２２だけを備え、バイパススイッチ４２３を備えていない。 (Embodiment 3)
FIG. 5 is a timing chart illustrating the operation of the controller 43 of the laser oscillator 40 according to Embodiment 3 of the present disclosure. In Embodiment 3, the laser oscillator 40 has only two bypass switches 421 and 422 and does not have the bypass switch 423 .
　制御部４３は、バイパススイッチ４２１のオンオフを切り替える第１のクロック信号を出力する。バイパススイッチ４２１は、第１のクロック信号がハイレベルであるときにオンし、第１のクロック信号がローレベルであるときにオフする。つまり、制御部４３は、第１のクロック信号のレベル切替時にバイパススイッチ４２１のオンオフを切り替える。 The control unit 43 outputs a first clock signal that switches the bypass switch 421 on and off. Bypass switch 421 turns on when the first clock signal is at high level, and turns off when the first clock signal is at low level. That is, the control unit 43 switches the bypass switch 421 on and off when switching the level of the first clock signal.
　また、制御部４３は、バイパススイッチ４２２のオンオフを切り替えるデューティ比が５０％の第２のクロック信号をさらに出力する。バイパススイッチ４２２は、第２のクロック信号がハイレベルであるときにオンし、第２のクロック信号がローレベルであるときにオフする。つまり、制御部４３は、第２のクロック信号のレベル切替時にバイパススイッチ４２２のオンオフを切り替える。 In addition, the control unit 43 further outputs a second clock signal with a duty ratio of 50% for switching the bypass switch 422 on and off. Bypass switch 422 turns on when the second clock signal is at high level and turns off when the second clock signal is at low level. That is, the control unit 43 switches the bypass switch 422 on and off when switching the level of the second clock signal.
　ここで、第１のクロック信号は、第２のクロック信号を反転させた信号（図４中破線で示す信号）のデューティ比を、５０％未満にした信号である。したがって、第１及び第２のクロック信号のデューティ比は、互いに異なっている。第１及び第２のクロック信号の周期は、互いに等しい。また、第２のクロック信号の立ち下がりは、第１のクロック信号の立ち上がりと一致している。 Here, the first clock signal is a signal obtained by inverting the second clock signal (the signal indicated by the broken line in FIG. 4) with a duty ratio of less than 50%. Therefore, the duty ratios of the first and second clock signals are different from each other. The periods of the first and second clock signals are equal to each other. Also, the fall of the second clock signal coincides with the rise of the first clock signal.
　第１及び第２のクロック信号は、ハイレベルとローレベルとに特定の周期で（周期的に）切り替わる信号とする。第１及び第２のクロック信号は、例えば水晶発振子のようなタイミングデバイスによって生成されたクロック信号を分周又は逓倍することにより生成される。あるいは、第１及び第２のクロック信号は、タイミングデバイスによって生成されたクロック信号を分周又は逓倍することにより生成された信号による時間のカウントにより、特定周期でハイレベルとローレベルに切り替わるように生成してもよい。あるいは、レーザ加工装置１００の外部から与えられたクロック信号を、制御部４３が第１及び第２のクロック信号としてそのまま出力してもよい。第１及び第２のクロック信号には、非周期的な信号は含まれず、例えば、非周期的に発生する事象が発生したときにレベルが切り替えられる信号は含まれない。 The first and second clock signals are signals that switch (periodically) between high level and low level at a specific cycle. The first and second clock signals are generated by dividing or multiplying a clock signal generated by a timing device such as a crystal oscillator. Alternatively, the first and second clock signals are switched to high level and low level at a specific period by counting the time by the signal generated by dividing or multiplying the clock signal generated by the timing device. may be generated. Alternatively, the clock signal given from the outside of the laser processing apparatus 100 may be directly output by the controller 43 as the first and second clock signals. The first and second clock signals do not include non-periodic signals, eg, signals whose levels are switched when an aperiodically occurring event occurs.
　図５の例では、期間Ｔ３１において、制御部４３は、バイパススイッチ４２１をオンし、かつバイパススイッチ４２２をオフしてレーザダイオード４１のレーザ出力を停止させる第１制御を行う。次いで、期間Ｔ３１と連続する期間Ｔ３２において、制御部４３は、バイパススイッチ４２１，４２２を両方（全て）オフして主にレーザダイオード４１に供給電流を流す第２制御を行う。次いで、期間Ｔ３２と連続する期間Ｔ３３において、制御部４３は、バイパススイッチ４２１をオフし、かつバイパススイッチ４２２をオンしてレーザダイオード４１のレーザ出力を停止させる第３制御を行う。第２制御の時間は、第１及び第２のクロック信号のデューティ比の差に応じた時間となる。 In the example of FIG. 5, in period T31, the control unit 43 performs the first control to turn on the bypass switch 421 and turn off the bypass switch 422 to stop the laser output of the laser diode 41 . Next, in a period T32 that follows the period T31, the control unit 43 performs second control in which both (all) of the bypass switches 421 and 422 are turned off and the supply current is mainly supplied to the laser diode 41. FIG. Next, in a period T33 that continues from the period T32, the controller 43 performs third control to turn off the bypass switch 421 and turn on the bypass switch 422 to stop the laser output of the laser diode 41 . The second control time corresponds to the difference between the duty ratios of the first and second clock signals.
　その他の構成は、実施形態１と同じであるので、その詳細な説明を省略する。 Other configurations are the same as in Embodiment 1, so detailed description thereof will be omitted.
　したがって、本実施形態３によれば、バイパススイッチ４２１，４２２の制御に用いる制御信号が互いに周期が等しい第１及び第２のクロック信号なので、レーザダイオード４１の発光間隔を容易に一定に制御できる。 Therefore, according to the third embodiment, since the control signals used to control the bypass switches 421 and 422 are the first and second clock signals having the same period, the light emission interval of the laser diode 41 can be easily controlled to be constant.
　また、バイパススイッチ４２１，４２２の制御に、周期が等しく、かつデューティ比が異なる２つのクロック信号を用いるので、クロック信号を出力する機能を有し、当該クロック信号のデューティ比をユーザにより設定可能なマイクロコンピュータを制御部４３の信号発生源として採用した場合には、クロック信号のデューティ比を設定するだけで、レーザダイオード４１の連続発光時間を容易に調節できる。 In addition, since two clock signals having the same cycle and different duty ratios are used to control the bypass switches 421 and 422, it has a function of outputting the clock signals, and the duty ratio of the clock signals can be set by the user. When a microcomputer is employed as the signal generation source of the control section 43, the continuous emission time of the laser diode 41 can be easily adjusted simply by setting the duty ratio of the clock signal.
　なお、上記実施形態１～３では、レーザダイオード４１を１つだけ設けたが、第１及び第２のノードＮ１，Ｎ２間に互いに直列に複数設けてもよい。 Although only one laser diode 41 is provided in the first to third embodiments, a plurality of laser diodes 41 may be provided in series between the first and second nodes N1 and N2.
　また、上記実施形態１では、レーザ発振器４０に３つのバイパススイッチ４２１～４２３を設け、上記実施形態２，３では、レーザ発振器４０に２つのバイパススイッチ４２１，４２２を設けたが、レーザ発振器４０に４つ以上のバイパススイッチを設けてもよい。 In the first embodiment, the laser oscillator 40 is provided with the three bypass switches 421 to 423, and in the second and third embodiments, the laser oscillator 40 is provided with the two bypass switches 421, 422. Four or more bypass switches may be provided.
　また、上記実施形態１～３では、第１制御及び第３制御において、それぞれ１つのバイパススイッチ４２１～４２３だけをオンしたが、並列又は直列に接続された複数のバイパススイッチを同時にオンするようにしてもよい。つまり、第１及び第２のバイパススイッチが重複していなければ（異なっていれば）、第１及び第２のバイパススイッチを、それぞれ１つだけではなく、複数設けてもよい。つまり、第１及び第２のバイパススイッチは、それぞれ少なくとも１つ設けられる。 In the first to third embodiments, only one bypass switch 421 to 423 is turned on in the first control and the third control. may That is, if the first and second bypass switches do not overlap (if they are different), not only one but also a plurality of first and second bypass switches may be provided. That is, at least one each of the first and second bypass switches is provided.
　また、上記実施形態２では、第１及び第２のクロック信号のデューティ比を互いに等しい５０％としたが、第１及び第２のクロック信号のデューティ比を互いに異なるようにしてもよいし、それぞれ５０％より大きくしたり５０％未満にしてもよい。また、レーザダイオード４１の連続発光時間が２種類生じ、加工品質に悪影響を及ぼす可能性はあるが、第１及び第２のクロック信号のデューティ比の和を、１００％よりも小さい値としてもよい。 In the second embodiment, the first and second clock signals have the same duty ratio of 50%. However, the first and second clock signals may have different duty ratios. It may be greater than 50% or less than 50%. In addition, the laser diode 41 may generate two types of continuous light emission time, which may adversely affect the processing quality, but the sum of the duty ratios of the first and second clock signals may be set to a value smaller than 100%. .
　また、上記実施形態１～３において、レーザ光ＬＢによるワークＷの加工中、加工状態に応じてレーザダイオード４１の連続発光時間が調整されるようにしてもよい。例えば、スパッタ発生量の検出手段により所定量以上のスパッタ発生量が検出された場合に、所定量未満のスパッタ発生量が検出された場合に比べ、レーザダイオード４１の連続発光時間が短くされるようにしてもよい。実施形態２，３において、レーザダイオード４１の連続発光時間の調整は、第１及び第２のクロック信号のデューティ比及び位相の少なくとも一方の調整により行える。 Further, in Embodiments 1 to 3 described above, the continuous light emission time of the laser diode 41 may be adjusted according to the processing state during processing of the workpiece W with the laser beam LB. For example, the continuous emission time of the laser diode 41 is set to be shorter when the amount of spatter generation equal to or greater than a predetermined amount is detected by the amount of spatter detection means, compared to when the amount of spatter generation less than the predetermined amount is detected. may In Embodiments 2 and 3, the continuous light emission time of the laser diode 41 can be adjusted by adjusting at least one of the duty ratio and phase of the first and second clock signals.
　また、上記実施形態３において、第２のクロック信号のデューティ比を５０％としたが、第２のクロック信号のデューティ比を５０％よりも大きくした状態で初期に第１及び第２のクロック信号の位相を調整するようにしてもよい。 Further, in the third embodiment, the duty ratio of the second clock signal is 50%. may be adjusted.
　また、上記実施形態３において、第２のクロック信号の立ち下がりを、第１のクロック信号の立ち上がりと一致させたが、第２のクロック信号が立ち下がる前に第１のクロック信号が立ち上がり、第１及び第２のクロックの両方がハイレベルの期間が存在するようにしてもよい。 In the third embodiment, the falling edge of the second clock signal coincides with the rising edge of the first clock signal. There may be periods during which both the first and second clocks are at high level.
　以上説明したように、本開示は、レーザダイオードの連続発光時間を短くできるという実用性の高い効果が得られることから、きわめて有用で産業上の利用性は高い。 As described above, the present disclosure has the highly practical effect of shortening the continuous light emission time of the laser diode, so it is extremely useful and highly industrially applicable.
１０　　　レーザ加工ヘッド 
４０　　　レーザ発振器 
４１　　　レーザダイオード 
５０　　　電流源 
９０　　　光ファイバ 
Ｎ１，Ｎ２　　　第２のノード 
１００　　　レーザ加工装置 
４２１～４２３　　バイパススイッチ 
ＬＢ　　　レーザ光 10 laser processing head
40 laser oscillator
41 laser diode
50 current source
90 optical fiber
N1, N2 second node
100 laser processing equipment
421-423 bypass switch
LB laser light

Claims (4)

  1. 　第１及び第２のノード間に接続されたレーザダイオードと、
    　前記第１及び第２のノード間に供給電流を供給する電流源とを備えたレーザ発振器であって、
    　前記第１及び第２のノード間に、前記レーザダイオードと並列に、かつ互いに並列に接続された複数のバイパススイッチと、
    　前記複数のバイパススイッチのうち少なくとも１つの第１のバイパススイッチだけをオンして前記レーザダイオードのレーザ出力を停止させる第１制御、前記複数のバイパススイッチを全てオフし、前記レーザダイオードに前記供給電流を流す第２制御、及び前記複数のバイパススイッチのうち前記第１のバイパススイッチとは異なる少なくとも１つの第２のバイパススイッチだけをオンして前記レーザダイオードのレーザ出力を停止させる第３制御をこの順で連続して実行する制御部とをさらに備えたことを特徴とするレーザ発振器。     a laser diode connected between the first and second nodes;
    a current source that supplies a supply current between the first and second nodes,
    a plurality of bypass switches connected in parallel with the laser diode and in parallel with each other between the first and second nodes;
    a first control for turning on at least one first bypass switch among the plurality of bypass switches to stop the laser output of the laser diode; turning off all the plurality of bypass switches to supply the current to the laser diode; and third control for turning on at least one second bypass switch different from the first bypass switch among the plurality of bypass switches to stop the laser output from the laser diode. A laser oscillator, further comprising: a control section for sequentially executing the laser oscillator.
  2. 　請求項１に記載のレーザ発振器において、
    　前記制御部は、ハイレベルとローレベルとに周期的に切り替わる第１のクロック信号のレベル切替時に前記第１のバイパススイッチのオンオフを切り替えるとともに、ハイレベルとローレベルとに周期的に切り替わる第２のクロック信号のレベル切替時に前記第２のバイパススイッチのオンオフを切り替え、
    　前記第１及び第２のクロック信号の周期は、互いに等しく、前記第１及び第２のクロック信号の位相は、互いに異なり、
    　前記第２制御の時間は、前記第１及び第２のクロック信号の位相差に応じた時間となることを特徴とするレーザ発振器。     The laser oscillator according to claim 1,
    The control unit switches on and off the first bypass switch when the level of a first clock signal that periodically switches between a high level and a low level is switched, and the second bypass switch that periodically switches between a high level and a low level. switching on and off the second bypass switch when switching the level of the clock signal of
    the periods of the first and second clock signals are equal to each other, and the phases of the first and second clock signals are different from each other;
    The laser oscillator, wherein the second control time is a time corresponding to the phase difference between the first and second clock signals.
  3. 　請求項１に記載のレーザ発振器において、
    　前記制御部は、ハイレベルとローレベルとに周期的に切り替わる第１のクロック信号のレベル切替時に前記第１のバイパススイッチのオンオフを切り替えるとともに、ハイレベルとローレベルとに周期的に切り替わる第２のクロック信号のレベル切替時に前記第２のバイパススイッチのオンオフを切り替え、
    　前記第１及び第２のクロック信号の周期は、互いに等しく、前記第１及び第２のクロック信号のデューティ比は、互いに異なり、
    　前記第２制御の時間は、前記第１及び第２のクロック信号のデューティ比の差に応じた時間となることを特徴とするレーザ発振器。     The laser oscillator according to claim 1,
    The control unit switches on and off the first bypass switch when the level of a first clock signal that periodically switches between a high level and a low level is switched, and the second bypass switch that periodically switches between a high level and a low level. switching on and off the second bypass switch when switching the level of the clock signal of
    the periods of the first and second clock signals are equal to each other, and the duty ratios of the first and second clock signals are different from each other;
    The laser oscillator, wherein the time for the second control is a time corresponding to a difference in duty ratio between the first and second clock signals.
  4. 　請求項１～３のいずれか１項に記載のレーザ発振器と、
    　前記レーザ発振器により出射されたレーザ光を通過させる光ファイバと、
    　前記光ファイバを通過したレーザ光を出射するレーザ加工ヘッドとを備えたレーザ加工装置。     a laser oscillator according to any one of claims 1 to 3;
    an optical fiber through which the laser beam emitted by the laser oscillator passes;
    and a laser processing head that emits a laser beam that has passed through the optical fiber.
PCT/JP2022/002653 2021-01-28 2022-01-25 Laser oscillator and laser processing device provided with same WO2022163643A1 (en)

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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004249591A (en) * 2003-02-20 2004-09-09 Canon Inc Exposure device and its laser power correction method
JP2008034479A (en) * 2006-07-26 2008-02-14 Sumitomo Electric Ind Ltd Laser diode drive circuit
JP2009295681A (en) * 2008-06-03 2009-12-17 Sumitomo Electric Ind Ltd Laser diode driving circuit
JP2011249413A (en) * 2010-05-24 2011-12-08 Sumitomo Electric Ind Ltd Laser diode driving circuit
US20120319615A1 (en) * 2011-06-16 2012-12-20 Samsung Electronics Co., Ltd. Led driver circuit and method of driving led
JP2014096405A (en) * 2012-11-07 2014-05-22 Sumitomo Electric Ind Ltd Optical transmission circuit
JP2016096221A (en) * 2014-11-13 2016-05-26 住友電気工業株式会社 Drive circuit
JP2016122898A (en) * 2014-12-24 2016-07-07 日本電信電話株式会社 Dml driver and transmission front end
WO2016167019A1 (en) * 2015-04-15 2016-10-20 三菱電機株式会社 Power supply device for driving laser diodes
US20170085057A1 (en) * 2015-09-22 2017-03-23 Analog Devices, Inc. Pulsed laser diode driver
WO2018074410A1 (en) * 2016-10-20 2018-04-26 日本電信電話株式会社 Directly modulated laser drive circuit

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004249591A (en) * 2003-02-20 2004-09-09 Canon Inc Exposure device and its laser power correction method
JP2008034479A (en) * 2006-07-26 2008-02-14 Sumitomo Electric Ind Ltd Laser diode drive circuit
JP2009295681A (en) * 2008-06-03 2009-12-17 Sumitomo Electric Ind Ltd Laser diode driving circuit
JP2011249413A (en) * 2010-05-24 2011-12-08 Sumitomo Electric Ind Ltd Laser diode driving circuit
US20120319615A1 (en) * 2011-06-16 2012-12-20 Samsung Electronics Co., Ltd. Led driver circuit and method of driving led
JP2014096405A (en) * 2012-11-07 2014-05-22 Sumitomo Electric Ind Ltd Optical transmission circuit
JP2016096221A (en) * 2014-11-13 2016-05-26 住友電気工業株式会社 Drive circuit
JP2016122898A (en) * 2014-12-24 2016-07-07 日本電信電話株式会社 Dml driver and transmission front end
WO2016167019A1 (en) * 2015-04-15 2016-10-20 三菱電機株式会社 Power supply device for driving laser diodes
US20170085057A1 (en) * 2015-09-22 2017-03-23 Analog Devices, Inc. Pulsed laser diode driver
WO2018074410A1 (en) * 2016-10-20 2018-04-26 日本電信電話株式会社 Directly modulated laser drive circuit

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