WO2022146393A3 - A silicon-based closed and integrated platform for the investigation of radiation transfer at micro-nano scale - Google Patents

A silicon-based closed and integrated platform for the investigation of radiation transfer at micro-nano scale Download PDF

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Publication number
WO2022146393A3
WO2022146393A3 PCT/TR2021/051588 TR2021051588W WO2022146393A3 WO 2022146393 A3 WO2022146393 A3 WO 2022146393A3 TR 2021051588 W TR2021051588 W TR 2021051588W WO 2022146393 A3 WO2022146393 A3 WO 2022146393A3
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WO
WIPO (PCT)
Prior art keywords
silicon
micro
emitter
receiver
coated
Prior art date
Application number
PCT/TR2021/051588
Other languages
French (fr)
Other versions
WO2022146393A2 (en
Inventor
Elif Begum ELCIOGLU
Hanife Tuba OKUTUCU OZYURT
Mustafa Pinar MENGUC
Original Assignee
Orta Dogu Teknik Universitesi
Ozyegin Universitesi
Eskisehir Osmangazi Universitesi
Eskisehir Teknik Universitesi
Istanbul Teknik Universitesi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Orta Dogu Teknik Universitesi, Ozyegin Universitesi, Eskisehir Osmangazi Universitesi, Eskisehir Teknik Universitesi, Istanbul Teknik Universitesi filed Critical Orta Dogu Teknik Universitesi
Publication of WO2022146393A2 publication Critical patent/WO2022146393A2/en
Publication of WO2022146393A3 publication Critical patent/WO2022146393A3/en

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    • H04B5/70—

Abstract

The invention is a closed and integrated NFR platform (12) for inspection of radiation transfer at micro-nano scale, and comprises of an emitter (5) comprises of a silicon carbide thin film (2) coated on a silicon substrate (1), a receiver (6) comprising a silicon carbide thin film (2) coated on a silicon substrate (1). The silicon carbide thin films (2) of the emitter (5) and the receiver (6) are coated and bonded under vacuum along their patterned contact surfaces, silicon dioxide intermediate pillars such that distance between the emitter (5) and the receiver (6) is smaller than thermal radiation wavelength and parallel to each other. The attained integrated structure (7) at wafer size is diced to obtain 3cmx3cm chips. The fabrication method of the NFR platform (12) is within the scope of the invention.
PCT/TR2021/051588 2020-12-31 2021-12-29 A silicon-based closed and integrated platform for the investigation of radiation transfer at micro-nano scale WO2022146393A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TRTR2020/22603 2020-12-31
TR2020/22603A TR202022603A1 (en) 2020-12-31 2020-12-31 A SILICUM-BASED CLOSED AND INTEGRATED PLATFORM FOR INVESTIGATION OF RADIATION TRANSFER ON THE MICRO-NANO SCALE

Publications (2)

Publication Number Publication Date
WO2022146393A2 WO2022146393A2 (en) 2022-07-07
WO2022146393A3 true WO2022146393A3 (en) 2022-09-01

Family

ID=82261041

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/TR2021/051588 WO2022146393A2 (en) 2020-12-31 2021-12-29 A silicon-based closed and integrated platform for the investigation of radiation transfer at micro-nano scale

Country Status (2)

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TR (1) TR202022603A1 (en)
WO (1) WO2022146393A2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100031990A1 (en) * 2008-08-01 2010-02-11 University Of Kentucky Research Foundation Cascaded Photovoltaic and Thermophotovoltaic Energy Conversion Apparatus with Near-Field Radiation Transfer Enhancement at Nanoscale Gaps
WO2013159075A1 (en) * 2012-04-19 2013-10-24 Cornell University Near-field radiative thermal coupling and related devices and techniques
GB2517696A (en) * 2013-08-27 2015-03-04 Ibm Nanodevice assemblies

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100031990A1 (en) * 2008-08-01 2010-02-11 University Of Kentucky Research Foundation Cascaded Photovoltaic and Thermophotovoltaic Energy Conversion Apparatus with Near-Field Radiation Transfer Enhancement at Nanoscale Gaps
WO2013159075A1 (en) * 2012-04-19 2013-10-24 Cornell University Near-field radiative thermal coupling and related devices and techniques
GB2517696A (en) * 2013-08-27 2015-03-04 Ibm Nanodevice assemblies

Also Published As

Publication number Publication date
WO2022146393A2 (en) 2022-07-07
TR202022603A1 (en) 2022-07-21

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