WO2022143066A1

WO2022143066A1 - Laser output system and method, multi-wavelength multiplexing optical gate, and laser and processing method therefor

Info

Publication number: WO2022143066A1
Application number: PCT/CN2021/136622
Authority: WO
Inventors: 蒋峰; 张浩泰; 杨德权; 吕张勇
Original assignee: 苏州创鑫激光科技有限公司; 深圳市创鑫激光股份有限公司
Priority date: 2020-12-31
Filing date: 2021-12-09
Publication date: 2022-07-07
Also published as: CN114682908A

Abstract

A laser output system (100), comprising: a laser module (110) configured to output pump laser (L1); an optical switching module (120) configured to receive the pump laser outputted by the laser module, divide the pump laser into at least two paths of sub laser, and allocate the at least two paths of sub laser into multiple sub laser channels at different times or at the same time, wherein at least one path of sub laser is signal laser (L2); and multiple laser output heads (130) configured to collimate and focus the laser outputted by the multiple sub laser channels and then output the laser. The output system provides a multi-wavelength multiplexing optical gate capable of achieving the laser of two wavelengths by means of single-port input and multi-port output, satisfies the requirements of various processing technologies, and can reduce the processing cost. Further involved are a laser output method, a multi-wavelength multiplexing optical gate, a laser, and a laser processing method.

Description

[根据细则37.2由ISA制定的发明名称]　激光输出***及方法、多波长复用光闸、激光器及其加工方法[Title of invention formulated by ISA pursuant to Rule 37.2] Laser output system and method, multi-wavelength multiplexing optical gate, laser and method of processing the same

技术领域technical field

本申请实施例涉及激光技术领域，特别涉及一种激光输出***、输出方法及综合加工方法。The embodiments of the present application relate to the field of laser technology, and in particular, to a laser output system, an output method, and a comprehensive processing method.

背景技术Background technique

采用高功率光纤激光或者直接半导体激光进行金属和非金属材料加工处理能够显示出非常优越的性能，但是高功率激光加工处理的更大规模的应用受制于激光器高成本的限制。而激光加工的复用技术是一种有效可行的解决方案，通过采用光开关或者空间光学光闸将一路主光纤激光分为两路或者多路子激光输出，每一路子激光被引入不同的加工平台，这样可以通过控制光闸或光开关的开关实现单个激光快速切换多个加工平台同时或者分时工作，降低应用成本。The use of high-power fiber lasers or direct semiconductor lasers for metal and non-metallic materials processing can show very superior performance, but the larger-scale application of high-power laser processing is limited by the high cost of lasers. The multiplexing technology of laser processing is an effective and feasible solution. By using an optical switch or a spatial optical shutter, a main fiber laser is divided into two or multiple sub-laser outputs, and each sub-laser is introduced into a different processing platform. , in this way, a single laser can quickly switch multiple processing platforms to work at the same time or time-sharing by controlling the switch of the optical gate or the optical switch, thereby reducing the application cost.

目前，最主流的光闸方案，是将光闸或光开关置于光纤激光输出组件之后，每路子激光功率低于主激光功率(分时***功率会较接近)，考虑光闸光学***的像差等因素，光斑质量也会比主激光光斑劣化。所以采用传统主流光闸技术，从原理上，分路激光加工性能不可能完全达到单路主激光的最佳加工性能。At present, the most mainstream optical gate solution is to place the optical gate or optical switch behind the fiber laser output component, and the power of each sub-laser is lower than that of the main laser (the power of the time-sharing system will be closer). Considering the image of the optical system of the optical gate Poor and other factors, the spot quality will also be worse than the main laser spot. Therefore, using the traditional mainstream optical gate technology, in principle, the processing performance of the branch laser cannot fully reach the optimal processing performance of the single main laser.

同时，由于光闸设置在光纤激光之后，各分路激光波长，光斑特性也和主光路光纤激光类似，对于一些特殊要求高功率但是相对低功率密度，平顶光斑的应用，光纤激光需要相对复杂的定制光斑劣化处理，不仅会增加成本，而且效果可能并不理想。At the same time, since the optical gate is set after the fiber laser, the wavelength and spot characteristics of each branch laser are similar to those of the main optical path fiber laser. For some applications that require high power but relatively low power density and flat top spot, the fiber laser needs to be relatively complex. The customized light spot degradation treatment will not only increase the cost, but also the effect may not be ideal.

此外，在某些应用场合中，比如熔覆，特殊的焊接等，光纤激光并不适合，需要采用如半导体激光等较短的波长，更高的功率，较低的功率密度，更均匀的光斑输出。In addition, in some applications, such as cladding, special welding, etc., fiber lasers are not suitable, and need to use shorter wavelengths such as semiconductor lasers, higher power, lower power density, and more uniform light spot output.

当前，在需要进行切割，钻孔、特种焊接等综合加工场景下，往往需要同时配置多台分别采用半导体激光器、光纤激光器的激光加工设备，造成实际加工操作复杂，加工费时的同时，使用成本也居高不下。At present, in the comprehensive processing scenarios such as cutting, drilling, special welding, etc., it is often necessary to configure multiple laser processing equipment using semiconductor lasers and fiber lasers, respectively, resulting in complicated actual processing operations. Stay high.

因此，如果可以在一台激光中将半导体激光和光纤激光有机结合，甚至用一台激光器通过特殊光闸***同时提供高功率半导体激光和高功率光纤激光，不仅会大大降低客户的运营成本，将各种工艺方便集成，还可以显著降低运行成本。Therefore, if the semiconductor laser and the fiber laser can be organically combined in one laser, or even a single laser can provide high-power semiconductor laser and high-power fiber laser through a special shutter system, it will not only greatly reduce the customer's operating costs, but also Various processes are easy to integrate and can also significantly reduce operating costs.

申请内容Application content

针对现有技术的上述缺陷，本申请实施例的目的是提供一种激光输出方法、激光输出***及加工平台，用于解决现有技术中不能同时提供直接多波长激光的多口输出,以满足复杂的加工场景，并且加工操作复杂，加工费时以及加工成本较高的问题。In view of the above-mentioned defects of the prior art, the purpose of the embodiments of the present application is to provide a laser output method, a laser output system and a processing platform, which are used to solve the problem that the prior art cannot simultaneously provide the multi-port output of direct multi-wavelength lasers, so as to satisfy the Complex processing scenarios, complex processing operations, time-consuming processing and high processing costs.

本申请实施例的目的是通过如下技术方案实现的：The purpose of the embodiment of the present application is achieved through the following technical solutions:

为解决上述技术问题，本申请实施例中提供了一种激光输出***，包括：In order to solve the above technical problems, a laser output system is provided in the embodiment of the present application, including:

激光模块，用于输出泵浦激光；Laser module, used to output pump laser;

光切换模块，用于接收所述激光模块输出的泵浦激光，并将其分成至少两路子激光分时或同时分配到多个分激光通道中,其中至少一路所述子激光为信号激光；以及an optical switching module, configured to receive the pump laser output from the laser module, and divide it into at least two sub-lasers time-divisionally or simultaneously distribute them to a plurality of sub-laser channels, wherein at least one of the sub-lasers is a signal laser; and

多个激光输出头，用于将所述多个分激光通道输出的激光准直聚焦后输出。A plurality of laser output heads are used for collimating and focusing the laser beams output by the plurality of sub-laser channels and outputting the laser beams.

本申请实施例提供了一种加工平台采用如上所述的激光输出***。The embodiment of the present application provides a processing platform using the above-mentioned laser output system.

本申请实施例提供了一种激光输出方法，包括：The embodiment of the present application provides a laser output method, including:

发射泵浦激光；emit pump laser;

将所述泵浦激光分光后增益为信号激光，将所述泵浦激光和/或所述信号激光自至少两个分激光通道分时或同时输出。The pump laser light is split and then gained into signal laser light, and the pump laser light and/or the signal laser light are output from at least two split laser channels in a time-division or at the same time.

与现有技术相比，本申请的有益效果是：通过光路切换模块对输出激光的数量和光路进行控制，能够分时或同时输出一束或多束具有两种以上波长的激光，从而实现将各种激光加工工艺需求，并且能显著降低加工成本；且光路切换模块设置在激光模块的输出端，能够减少对所输出的多束激光中每路子激光的影响，从而得到质量高、效果好的激光光斑。Compared with the prior art, the beneficial effect of the present application is that the number and optical paths of the output lasers are controlled by the optical path switching module, so that one or more laser beams with two or more wavelengths can be output in time-division or at the same time, thereby realizing the Various laser processing technology requirements, and can significantly reduce processing costs; and the optical path switching module is arranged at the output end of the laser module, which can reduce the impact on each sub-laser in the output multi-beam laser, so as to obtain high quality and good effect. Laser spot.

附图说明Description of drawings

一个或多个实施例中通过与之对应的附图中的图片进行示例性说明，这些示例性说明并不构成对实施例的限定，附图中具有相同参考数字标号的元件/模块和步骤表示为类似的元件/模块和步骤，除非有特别申明，附图中的图不构成比例限制。One or more embodiments are exemplified by the pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations to the embodiments, and the elements/modules and steps with the same reference numerals in the drawings represent For similar elements/modules and steps, the figures in the accompanying drawings do not constitute a scale limitation unless otherwise stated.

图1是现有技术中传统光闸型光纤激光输出***的一种结构示意图；Fig. 1 is a kind of structural representation of traditional optical gate type fiber laser output system in the prior art;

图2是本申请实施例提供的一种激光输出***的结构框图；2 is a structural block diagram of a laser output system provided by an embodiment of the present application;

图3(a)是本申请一实施例提供的一种激光输出***光路示意图(内置正向增益模块)；FIG. 3(a) is a schematic diagram of the optical path of a laser output system provided by an embodiment of the present application (built-in forward gain module);

图3(b)是本申请一实施例提供的一种激光输出***光路示意图(外接反向增益模块)；3(b) is a schematic diagram of the optical path of a laser output system provided by an embodiment of the present application (with an external reverse gain module);

图4是本申请一实施例提供的一种激光输出***中激光模块提供的复合激光的光谱示意图；4 is a schematic diagram of a spectrum of a composite laser provided by a laser module in a laser output system provided by an embodiment of the present application;

图5是本申请一实施例提供的一种激光输出***中第一分光组件的波分工作示意图；5 is a schematic diagram of the wavelength division operation of the first optical splitting component in a laser output system provided by an embodiment of the present application;

图6是本申请一实施例提供的一种激光输出***分时工作示意图；6 is a schematic diagram of the time-sharing operation of a laser output system provided by an embodiment of the present application;

图7是本申请一实施例提供的一种激光输出***提供多种激光输出的示意图；7 is a schematic diagram of a laser output system providing multiple laser outputs provided by an embodiment of the present application;

图8是本申请实施例提供的一种激光输出方法流程图；8 is a flowchart of a laser output method provided by an embodiment of the present application;

图9是本申请实施例提供的一种加工平台结构示意图；9 is a schematic structural diagram of a processing platform provided by an embodiment of the present application;

图10是本申请实施例提供的一种激光加工方法流程图。FIG. 10 is a flowchart of a laser processing method provided by an embodiment of the present application.

具体实施方式Detailed ways

下面结合具体实施例对本申请进行详细说明。以下实施例将有助于本领域的技术人员进一步理解本申请，但不以任何形式限制本申请。应当指出的是，对本领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干变形和改进。这些都属于本申请的保护范围。The present application will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the application, but do not limit the application in any form. It should be noted that, for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present application. These all belong to the protection scope of the present application.

需要说明的是，如果不冲突，本申请实施例中的各个特征可以相互结合，均在本申请的保护范围之内。另外，虽然在装置示意图中进行了功能模块划分，但是在某些情况下，可以以不同于装置中的模块划分。It should be noted that, if there is no conflict, various features in the embodiments of the present application may be combined with each other, which are all within the protection scope of the present application. In addition, although the functional modules are divided in the schematic diagram of the device, in some cases, the modules may be divided differently from the device.

需要说明的是，当一个元件被表述“连接”另一个元件，它可以是直接连接到另一个元件、或者其间可以存在一个或多个居中的元件。It should be noted that when an element is referred to as being "connected" to another element, it can be directly connected to the other element, or one or more intervening elements may be present therebetween.

除非另有定义，本说明书所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。本说明书中在本申请的说明书中所使用的术语只是为了描述具体的实施方式的目的，不是用于限制本申请。此外，下面所描述的本申请各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the technical field belonging to this application. The terms used in the specification of the present application in this specification are only for the purpose of describing specific embodiments, and are not used to limit the present application. In addition, the technical features involved in the various embodiments of the present application described below can be combined with each other as long as there is no conflict with each other.

请参见图1，其示出了一种传统的光纤激光器加光闸的激光输出***的结构，激光输出***101中，激光模块110输出泵浦激光L1，该泵浦激光L1通过谐振腔模块122增益输出信号激光L2，所述信号激光L2通过光切换单元120并分路输出多束信号激光L2。Please refer to FIG. 1 , which shows the structure of a conventional laser output system with a fiber laser and a shutter. In the laser output system 101 , the laser module 110 outputs a pump laser L1 , and the pump laser L1 passes through the resonator module 122 The gain output signal laser L2, the signal laser L2 passes through the optical switching unit 120 and splits to output multiple signal laser beams L2.

上述现有技术中的光纤激光器加光闸的激光输出***只能对一种波长的激光实现分光分路，且分光质量不理想，已经不能满足目前多加工环境的需求。The above-mentioned laser output system of the fiber laser and optical gate in the prior art can only realize splitting and splitting of laser light of one wavelength, and the splitting quality is not ideal, which can no longer meet the needs of the current multi-processing environment.

为了解决上述问题，本申请实施例提供了一种激光输出***、输出方法、多波长复用光闸、激光器及综合加工。In order to solve the above problems, embodiments of the present application provide a laser output system, an output method, a multi-wavelength multiplexing optical gate, a laser, and a comprehensive processing.

请参见图2，其示出了本申请实施例提供的一种激光输出***的结构框图，其中，该激光输出***100包括：激光模块110和光路切换模块120和多个激光输出头130。所述激光模块110用于输出泵浦激光L1，所述光路切换模块120包括一个输入端，至少两个输出端，用于接收所述激光模块110输出的所述泵浦激光L1，将所述泵浦激光L1分光后增益为信号激光L2，并将所述泵浦激光L1和/或所述信号激光L2分配至不同分激光通道，通过至少两个输出端分时或同时输出，多个激光输出头，用于将所述多个分激光通道输出的激光准直聚焦后输出用于将所述多个分激光通道输出的激光准直聚焦后输出。Referring to FIG. 2 , it shows a structural block diagram of a laser output system provided by an embodiment of the present application, wherein the laser output system 100 includes a laser module 110 , an optical path switching module 120 and a plurality of laser output heads 130 . The laser module 110 is used for outputting the pump laser L1, and the optical path switching module 120 includes an input end and at least two output ends for receiving the pump laser L1 output by the laser module 110, and converting the After the pump laser L1 is split, the gain is the signal laser L2, and the pump laser L1 and/or the signal laser L2 are distributed to different sub-laser channels, and the at least two output ends are time-divisionally or simultaneously output, and multiple lasers The output head is used for collimating and focusing the laser light output by the plurality of sub-laser channels and outputting the laser collimating and focusing the output of the plurality of sub-laser channels.

本申请实施例提供的激光器输出***通过光路切换模块对激光模块所输出激光的数量和光路进行控制，能够输出一束或多束激光，且光路切换模块设置在激光模块的输出端，能够减少对所输出的多束激光中每路子激光的影响，从而得到质量高、效果好的激光光斑。The laser output system provided by the embodiments of the present application controls the quantity and optical path of the laser light output by the laser module through the optical path switching module, and can output one or more laser beams, and the optical path switching module is arranged at the output end of the laser module, which can reduce the number of laser beams output by the laser module. The influence of each sub-laser in the output multi-beam laser, so as to obtain a laser spot with high quality and good effect.

所述激光模块110可以采用半导体光源，固体激光光源或者光纤激光光源的任一一种。The laser module 110 may use any one of a semiconductor light source, a solid-state laser light source or a fiber laser light source.

所述光路切换模块120可以是多波长复用光闸、多波长复用机械光开关或其它光切换组件的任一一种。The optical path switching module 120 may be any one of a multi-wavelength multiplexing optical gate, a multi-wavelength multiplexing mechanical optical switch or other optical switching components.

所述光路切换模块120还包括至少一增益子模块用于接收分光后的至少一路泵浦激光L1，并将其增益为信号激光L2。所述增益子模块可以是将泵浦激光L1增益放大为信号激光L2后沿光轴正向输出的正向光纤/固体/谐振腔/MOPA放大器模块，也可以是将泵浦激光L1增益为信号激光L2后沿光轴反向输出的反向光纤/固体/谐振腔/MOPA放大器模块。The optical path switching module 120 further includes at least one gain sub-module for receiving at least one pump laser L1 after splitting, and gaining it as a signal laser L2. The gain sub-module may be a forward fiber/solid/resonator/MOPA amplifier module that amplifies the gain of the pump laser L1 into a signal laser L2 and then outputs it along the positive axis of the optical axis, or may be a gain of the pump laser L1 into a signal. The reverse fiber/solid/resonator/MOPA amplifier module outputting in the opposite direction along the optical axis after the laser L2.

同时，所述增益子模块可以作为一个高度集成的器件设置在所述多波长复用光闸/光开关/光切换组件内部，也可以作为一个独立的外接模块设置在所述多波长复用光闸/光开关/光切换组件外部。At the same time, the gain sub-module can be set inside the multi-wavelength multiplexing optical gate/optical switch/optical switching component as a highly integrated device, or can be set as an independent external module in the multi-wavelength multiplexing optical Outside the gate/optical switch/optical switching assembly.

另外，所述光路切换模块120的输入端和输出端可以采用传统的传能光纤连接设计，更优选的，所述光路切换模块的输入端和输出端均为可插拔连接端口，其中，输入端与激光模块实现可插拔连接，方便实现对不同光源的更换；输出端可以与激光输出组件直接插拔连接的同时，也可以与外接的谐振腔模块直接插拔连接，便于多波长复用光闸与其他光学器件的模块化组合使用。In addition, the input end and output end of the optical path switching module 120 may adopt a traditional energy-transmitting optical fiber connection design. The pluggable connection between the end and the laser module is realized, which is convenient for the replacement of different light sources; the output end can be directly plugged and connected with the laser output component, and can also be directly plugged and connected with the external resonator module, which is convenient for multi-wavelength multiplexing. The shutter is used in modular combination with other optics.

需要说明的是，激光输出组件(未图示)需要根据对接的输出端口输出激光的种类和能量参数配置不同种类的输出头模块，例如光纤激光QBH输出头，半导体QD输出头或半导体Q+输出头等，通过插拔端口更加方便更换。It should be noted that the laser output module (not shown) needs to be configured with different types of output head modules according to the type of output laser and energy parameters of the connected output port, such as fiber laser QBH output head, semiconductor QD output head or semiconductor Q+ output head, etc. , it is more convenient to replace through the plug-in port.

需要说明的是，在本申请所提供的实施例中，可以选择以正向光纤谐振腔模块、正向光纤MOPA放大器模块、正向固体谐振腔模块、正向固体放大器模块、反向光纤谐振腔模块、反向光纤MOPA放大器模块、反向固体谐振腔模块或反向固体放大器模块中的任一一种，采用内置于或外接于多波长复用光闸、光开关或其它光切换组件中的任何一种的多种组合设置方式，本申请提供的实施例仅选择其中几种组合进行举例说明，在实际应用中，根据需要也可以采用其他模块与设置方式的组合，不需要拘泥于本申请实施例中的限定。It should be noted that, in the embodiments provided in this application, forward fiber resonator modules, forward fiber MOPA amplifier modules, forward solid-state resonator modules, forward solid-state amplifier modules, and reverse fiber resonator modules can be selected. module, reverse fiber MOPA amplifier module, reverse solid-state resonant cavity module or reverse solid-state amplifier module, using built-in or external multi-wavelength multiplexing optical gates, optical switches or other optical switching components. Any of the various combinations of setting methods, the embodiments provided in this application only select several of these combinations for illustration. In practical applications, other combinations of modules and setting methods can also be used as needed, and do not need to be bound by this application. Limitations in the Examples.

实施例一Example 1

请参见图3a，其示出了本申请实施例一提供的一种具反向增益模块的激光输出***的光路结构示意图，在该激光输出***100中，所述激光输出***100包括激光模块110、多波长复用光闸120和反向谐振腔模块123。所述反向谐振腔模块123是作为外接模块连接于多波长复用光闸120。Please refer to FIG. 3 a , which shows a schematic diagram of an optical path structure of a laser output system with an inverse gain module provided in Embodiment 1 of the present application. In the laser output system 100 , the laser output system 100 includes a laser module 110 , a multi-wavelength multiplexing optical gate 120 and an inverse resonant cavity module 123 . The reverse resonant cavity module 123 is connected to the multi-wavelength multiplexing optical gate 120 as an external module.

所述多波长复用光闸120设有一个输入端130a和至少两个输出端130d,c,e,f，所述多波长复用光闸120的输入端130a与所述激光模块110的输出端连接，用于接收所述泵浦激光L1，所述多波长复用光闸120的输出端130c,d,e,f与激光输出组件连接，用于输出分路后的泵浦激光L1和信号激光L2。The multi-wavelength multiplexing optical gate 120 is provided with an input end 130a and at least two output ends 130d, c, e, f, the input end 130a of the multi-wavelength multiplexing optical gate 120 and the output of the laser module 110 The output terminals 130c, d, e, and f of the multi-wavelength multiplexing optical gate 120 are connected to the laser output components for outputting the split pump laser L1 and Signal laser L2.

所述多波长复用光闸120内设有分光组件，所述分光组件由多个可移动或转动的分光镜或全反射镜组成。其中，分光镜通过设置不同的镀膜系可以将入射光进行不同比例的反射或透射，所述分光组件内还设有旋转装置用于带动所述分光镜或全反射镜转动至特定位置。The multi-wavelength multiplexing optical shutter 120 is provided with a spectroscopic component, and the spectroscopic component is composed of a plurality of movable or rotatable spectroscopic mirrors or total reflection mirrors. The beam splitter can reflect or transmit the incident light in different proportions by setting different coating systems, and the beam splitter is also provided with a rotating device to drive the beam splitter or total reflection mirror to rotate to a specific position.

具体的，所述分光组件包括：第一分光组件121，设置于靠近所述多波长复用光闸120的输入端130a一侧，所述第一分光组件121包括第一透光镜片和第一反射镜片，所述第一透光镜片能够透射所述泵浦激光L1，所述第一反射镜片能够反射所述泵浦激光L1。Specifically, the light-splitting component includes: a first light-splitting component 121, which is disposed on a side close to the input end 130a of the multi-wavelength multiplexing optical shutter 120, and the first light-splitting component 121 includes a first light-transmitting lens and a first light-transmitting lens. A reflective lens, the first light-transmitting lens can transmit the pump laser L1, and the first reflective lens can reflect the pump laser L1.

所述分光组件还包括：至少一第四分光组件126，其设置于靠近所述第一分光组件121的第一反射镜片一侧，所述第四分光组件126包括第四透光镜片和第四反射镜片，所述第四透光镜片能够透射所述泵浦激光L1，所述第四反射镜片能够反射所述泵浦激光L1，经所述第一分光组件121反射的所述泵浦激光L1通过至少一第四分光组件126控制可以实现分路输出。本实施例中仅示出两个第四分光组件126a、126b，可将反射的所述泵浦激光L1分配至三个分激光通道输出。第四分光组件的数量可根据需要分路的泵浦激光L1的数量进行设置，不需要拘泥于本申请实施例的限定。The light-splitting component further includes: at least one fourth light-splitting component 126, which is disposed on the side of the first reflecting lens close to the first light-splitting component 121, and the fourth light-splitting component 126 includes a fourth light-transmitting lens and a fourth light-splitting lens. Reflecting lens, the fourth light-transmitting lens can transmit the pump laser L1, the fourth reflecting lens can reflect the pumping laser L1, and the pumping laser L1 reflected by the first light splitting component 121 The split output can be achieved through the control of at least one fourth optical splitting component 126 . In this embodiment, only two fourth

light splitting components

126a, 126b are shown, and the reflected pump laser L1 can be distributed to three split laser channels for output. The number of the fourth optical splitting components can be set according to the number of pump lasers L1 to be branched, and does not need to be bound by the limitations of the embodiments of the present application.

所述分光组件还包括：第二分光组件124，设置于靠近所述第一分光组件121的第一透光镜片一侧，所述第二分光组件124包括一第二透光镜片和第二反射镜片，所述第二透射面能够透射经所述第一分光组件121部分透射出的泵浦激光L1，所述第二反射镜片能够反射经所述反向谐振腔模块123增益输出的所述信号激光L2。同时，所述第二透光镜片和第二反射镜片也可以用一片镀有增反透膜的镜片替代，使得该镜片既可以透射经所述第一分光组件121部分透射出的泵浦激光L1，也能够反射经所述反向谐振腔模块123增益输出的所述信号激光L2。The light-splitting component further includes: a second light-splitting component 124, which is disposed on the side of the first light-transmitting lens close to the first light-splitting component 121, and the second light-splitting component 124 includes a second light-transmitting lens and a second reflector. A mirror, the second transmission surface can transmit the pump laser L1 partially transmitted through the first beam splitting component 121 , and the second reflection mirror can reflect the signal output by the gain and output of the reverse resonator module 123 Laser L2. At the same time, the second light-transmitting lens and the second reflecting lens can also be replaced by a lens coated with an anti-reflection film, so that the lens can transmit the pump laser L1 partially transmitted through the first beam splitting component 121 , can also reflect the signal laser L2 output by the gain of the reverse resonator module 123 .

所述分光组件还包括：至少一第三分光组件125，其设置于靠近所述第二分光组件124的第二反射镜片的一侧，所述第三分光组件125包括第三透光镜片和第三反射镜片，所述第三透光镜片能够透射所述信号激光L2，所述第三反射镜片能够反射所述信号激光L2，经反射的所述信号激光L2通过至少一第三分光组件125控制可以实现分路输出。本实施例中仅示出两个第三分光组件125a、125b，可将反射的所述泵浦激光L1分配至两个分激光通道输出。第三分光组件的数量可根据需要分路的信号激光L2的数量进行设置，不需要拘泥于本申请实施例的限定。The light-splitting component further includes: at least one third light-splitting component 125, which is disposed on one side of the second reflective lens close to the second light-splitting component 124, and the third light-splitting component 125 includes a third light-transmitting lens and a first light-transmitting lens. Three reflective mirrors, the third translucent mirror can transmit the signal laser L2, the third reflective mirror can reflect the signal laser L2, and the reflected signal laser L2 is controlled by at least one third beam splitting component 125 Split output can be achieved. In this embodiment, only two third

light splitting components

125a and 125b are shown, and the reflected pump laser L1 can be distributed to the outputs of the two split laser channels. The number of the third optical splitting components can be set according to the number of the signal laser light L2 to be branched, and does not need to be bound by the limitations of the embodiments of the present application.

所述多波长复用光闸120还包括至少一控制模块，所述控制模块包括驱动装置和分光控制器，其中驱动装置分别与所述第一分光组件121和/或第二分光组件124和/或第三分光组件125和/或第四分光组件126连接；分光控制器与所述驱动装置连接，用于控制所述驱动装置带动所述第一分光组件121和/或第二分光组件124和/或第三分光组件125和/或第四分光组件126调整分光的出射角度。The multi-wavelength multiplexing optical gate 120 further includes at least one control module, the control module includes a driving device and a light splitting controller, wherein the driving device is respectively connected with the first light splitting component 121 and/or the second light splitting component 124 and/or or the third beam splitting assembly 125 and/or the fourth beam splitting assembly 126 are connected; the beam splitting controller is connected to the driving device for controlling the driving device to drive the first beam splitting assembly 121 and/or the second beam splitting assembly 124 and /or the third light splitting component 125 and/or the fourth light splitting component 126 adjust the exit angle of the split light.

所述多波长复用光闸120还包括：准直透镜127，设于所述多波长复用光闸120靠近输入端130a一侧，用于准直扩束所述激光模块110输出的泵浦激光L1。The multi-wavelength multiplexing optical gate 120 further includes: a collimating lens 127, which is arranged on the side of the multi-wavelength multiplexing optical gate 120 close to the input end 130a, for collimating the beam expanding the pump output of the laser module 110 Laser L1.

所述多波长复用光闸120还包括：聚焦透镜128，设于所述多波长复用光闸120靠近输出端一侧，用于将通过所述第四分光组件126实现分路输出的泵浦激光L1或通过所述第三分光组件125实现分路输出的信号激光L2聚焦后通过所述至少两个输出端输出。所述聚焦透镜的数量可根据分路激光的数量进行设置，不需要拘泥于本申请实施例的限定。可知的，所述输出端与所述聚焦透镜的数量一致。The multi-wavelength multiplexing optical gate 120 further includes: a focusing lens 128, which is arranged on the side of the multi-wavelength multiplexing optical gate 120 close to the output end, and is used for the pump to realize the split output through the fourth optical splitting component 126. The laser light L1 or the signal laser L2 that is output by splitting through the third optical splitting component 125 is focused and then output through the at least two output ends. The number of the focusing lenses can be set according to the number of branched lasers, and does not need to be bound by the limitations of the embodiments of the present application. It can be known that the number of the output ends is the same as the number of the focusing lenses.

为了方便说明，本申请实施例中仅示出六个所述聚焦透镜128a、128b、128c、128d、128e和128f，以及对应的示出了六个输出端口130b、130c、130d、130e、130f和130g。For convenience of description, only six of the focusing

lenses

128a, 128b, 128c, 128d, 128e and 128f are shown in the embodiment of the present application, and six

output ports

130b, 130c, 130d, 130e, 130f and 130f are shown correspondingly. 130g.

其中，聚焦透镜128a接收自第二分光组件124透射出的泵浦激光L1，聚焦后输送到所述反向谐振腔模块123，通过反向谐振腔模块123放大为所述信号激光L2并输送回到所述聚焦透镜128a进行准直后入射第二分光组件124的第二反射镜片，经反射后入射所述第三分光组件125a；聚焦透镜128b接收由所述第三分光组件125a反射后分路输出的信号激光L2，聚焦后通过所述输出端130c输出分路信号激光L2，聚焦透镜128c接收由所述第三分光组件125a透射后由所述第三分光组件125b反射出的信号激光L2，聚焦后通过所述输出端130d输出分路信号激光L2。The focusing lens 128a receives the pump laser L1 transmitted from the second beam splitting component 124, focuses and transmits it to the reverse resonator module 123, and is amplified into the signal laser L2 by the reverse resonator module 123 and sent back to the signal laser L2. After being collimated by the focusing lens 128a, it enters the second reflector of the second beam splitting component 124, and then enters the third beam splitting component 125a after being reflected; the focusing lens 128b receives the reflection from the third beam splitting component 125a and then divides it into a branch. The output signal laser L2, after being focused, outputs the split signal laser L2 through the output end 130c, and the focusing lens 128c receives the signal laser L2 transmitted by the third beam splitting component 125a and then reflected by the third beam splitting component 125b, After focusing, the split signal laser L2 is output through the output end 130d.

所述聚焦透镜128d、128e、128f分别接收自所述第四分光组件126a、126b透射/反射后分路输出的所述泵浦激光L1，聚焦后分别通过输出端130e、130f和130g输出分路泵浦激光L1。The focusing

lenses

128d, 128e, and 128f respectively receive the pump laser L1 that is transmitted/reflected from the fourth

light splitting components

126a, 126b and output in a split way, and after focusing, the pump laser light L1 is output through the

output terminals

130e, 130f and 130g respectively. Pump laser L1.

实施例二Embodiment 2

请参见图3b，本申请实施例二提供了一种激光输出***，其示出了一种正向增益模块内置的激光输出***的光路结构示意图，在该激光输出***100中，所述激光输出***100包括激光模块110、多波长复用光闸120和正向谐振腔模块122，所述正向谐振腔模块122是以内置方式集成于所述多波长复用光闸120中。Referring to FIG. 3b, the second embodiment of the present application provides a laser output system, which shows a schematic diagram of the optical path structure of a laser output system built in a forward gain module. In the laser output system 100, the laser output The system 100 includes a laser module 110 , a multi-wavelength multiplexing optical gate 120 , and a forward resonant cavity module 122 , which is integrated in the multi-wavelength multiplexing optical gate 120 in a built-in manner.

所述多波长复用光闸120还包括第一分光组件121和至少一第四分光组件126a,b。The multi-wavelength multiplexing optical gate 120 further includes a first optical splitting component 121 and at least one fourth optical splitting component 126a, b.

具体的，所述第一分光组件121设置于靠近所述多波长复用光闸120的输入端130a一侧，所述第一分光组件121包括第一透光镜片和第一反射镜片，所述第一透光镜片能够透射所述泵浦激光L1，所述第一反射镜片能够反射所述泵浦激光L1。Specifically, the first light splitting component 121 is disposed on the side close to the input end 130a of the multi-wavelength multiplexing optical shutter 120. The first light splitting component 121 includes a first light-transmitting lens and a first reflecting lens. The first light-transmitting lens can transmit the pumping laser light L1, and the first reflecting lens can reflect the pumping laser light L1.

所述至少一第四分光组件126设置于靠近所述第一分光组件121的第一反射镜片一侧，所述第四分光组件126包括第四透光镜片和第四反射镜片，所述第四透光镜片能够透射所述泵浦激光L1，所述第四反射镜片能够反射所述泵浦激光L1，经所述第一分光组件121反射的所述泵浦激光L1通过至少一第四分光组件126控制可以实现分路输出。本实施例中仅示出两个第四分光组件126a、126b，可将所述泵浦激光L1分配至三个分激光通道输出。分光组件的数量可根据需要分路的泵浦激光L1的数量进行设置，不需要拘泥于本申请实施例的限定。The at least one fourth beam splitting component 126 is disposed on the side of the first reflecting lens close to the first beam splitting component 121 . The fourth beam splitting component 126 includes a fourth translucent lens and a fourth reflecting lens. The light-transmitting lens can transmit the pump laser L1, the fourth reflecting lens can reflect the pump laser L1, and the pump laser L1 reflected by the first beam splitting component 121 passes through at least one fourth beam splitting component 126 control can realize shunt output. In this embodiment, only two fourth

light splitting components

126a and 126b are shown, and the pump laser L1 can be distributed to the output of three split laser channels. The number of light splitting components can be set according to the number of pump lasers L1 to be branched, and does not need to be limited to the limitations of the embodiments of the present application.

所述多波长复用光闸120还包括：控制模块，与所述分光组件121,126a,126b连接；用于控制驱动所述分光组件121、126a,126b改变调整光的出射类型和出射角度。The multi-wavelength multiplexing optical gate 120 further includes: a control module connected to the

light splitting components

121, 126a, 126b; for controlling and driving the

light splitting components

121, 126a, 126b to change the output type and output angle of the adjusted light.

所述多波长复用光闸120还包括聚焦透镜128，设于所述多波长复用光闸120靠近输出端一侧。本实施例中仅示出四个聚焦透镜128a、128d、128e、128f，其中，聚焦透镜128a用于将通过所述第一分光组件121透射输出的泵浦激光L1聚焦后输出至正向谐振腔模块122经增益放大为信号激光L2后通过输出端130b输出；聚焦透镜128d、128e、128f用于将通过所述第四分光组件126实现分路输出的三束泵浦激光L1聚焦后分别通过输出端130e、130f、130g输出。The multi-wavelength multiplexing optical shutter 120 further includes a focusing lens 128, which is disposed on the side of the multi-wavelength multiplexing optical shutter 120 close to the output end. In this embodiment, only four focusing

lenses

128a, 128d, 128e, 128f are shown, wherein the focusing lens 128a is used to focus the pump laser L1 transmitted and output through the first beam splitting component 121 and output it to the forward resonator The module 122 is amplified into the signal laser L2 by the gain and then output through the output end 130b; the focusing

lenses

128d, 128e, 128f are used to focus the three pump laser beams L1 that are split and output by the fourth optical splitting component 126 and then respectively pass through the output.

Terminals

130e, 130f, 130g output.

本申请实施例二与上述实施例一的区别在于，因为采用正向增益模块，增益放大后的信号激光L2不再回到所述多波长复用光闸120内进行分光分路。The difference between the second embodiment of the present application and the above-mentioned first embodiment is that because the forward gain module is adopted, the signal laser L2 after gain amplification does not return to the multi-wavelength multiplexing optical gate 120 for optical splitting.

需要说明的是，若正向增益模块插拔外接于多波长复用光闸，也可以直接选用如实施例一中的所述的多波长复用光闸120，在输出端将原来的反向增益模块直接更换为需要的正向增益模块即可。It should be noted that, if the forward gain module is externally connected to the multi-wavelength multiplexing optical gate, the multi-wavelength multiplexing optical gate 120 described in the first embodiment can also be directly selected, and the original reverse The gain module can be directly replaced with the required forward gain module.

实施例三Embodiment 3

在本申请提供的实施例三中，结合图3a的光路结构，并参考图4和图5示意，提供了一种可以同时输出包含两种波长的双波长光纤激光器。例如，输出的泵浦激光L1同时包含半导体激光和光纤激光，所述第一分光组件121的分光镜上设有可以反射半导体激光的镀膜层同时也可以透射光纤激光的镀膜层，使得入射激光中包含的半导体激光L1分光后通过反向光纤激光谐振腔模块成为信号激光L2并进入第三分光组件125的分激光通道；同时，入射激光中包含的半导体激光L1分光后进入第四分光组件126的分激光通道，上述设置实现了对包含两种不同波长复合激光的分光分路。In the third embodiment provided in the present application, combined with the optical path structure of FIG. 3 a and schematic diagrams with reference to FIGS. 4 and 5 , a dual-wavelength fiber laser that can output two wavelengths simultaneously is provided. For example, the output pump laser L1 includes both a semiconductor laser and a fiber laser, and the beam splitter of the first beam splitting component 121 is provided with a coating layer that can reflect the semiconductor laser and also transmit the fiber laser, so that the incident laser is The included semiconductor laser L1 is split into the signal laser L2 through the reverse fiber laser resonator module and enters the split laser channel of the third splitting component 125; at the same time, the semiconductor laser L1 contained in the incident laser is split into the fourth splitting component 126 after splitting. Dividing the laser channel, the above setting realizes the splitting and branching of the composite laser containing two different wavelengths.

实施例四Embodiment 4

进一步地，在本申请提供的又一种实施例中，提供了一种可输出不同功率分束激光的激光输出***。当驱动装置带动分光组件将不同的分光镜旋转或移动到激光入射位置时，因不同分光镜设置的镀膜层膜系不同，可实现将入射激光按照不同的比例配置进入反射通道和透射通道，以使所述激光器***能够同时输出功率不同的多束激光，从而提高激光器***的功率利用率，增加激光器***的应用场景。Further, in another embodiment provided by the present application, a laser output system capable of outputting split-beam lasers with different powers is provided. When the driving device drives the spectroscope to rotate or move different spectroscopes to the laser incident position, the incident laser can be configured to enter the reflection channel and transmission channel according to different proportions due to the different coating systems of the different spectroscopes. The laser system can simultaneously output multiple laser beams with different powers, thereby improving the power utilization rate of the laser system and increasing the application scenarios of the laser system.

实施例五Embodiment 5

在本申请实施例五中提供了一种分时工作的激光输出***，结合图3a和图6所示，示出了一种具反向增益的激光输出***中单束激光分时输出的示意图。In the fifth embodiment of the present application, a time-sharing laser output system is provided. With reference to FIG. 3 a and FIG. 6 , a schematic diagram of the time-sharing output of a single laser beam in a laser output system with reverse gain is shown. .

当激光模块100输出的泵浦激光L1通过第一分光组件121的反射至第四分光组件126a时，驱动装置带动所述第四分光组件126a的全反射镜旋转，在第一时间段，调整反射光的出射角度，使泵浦激光L1通过第四分光组件126a反射至聚焦透镜128d，自输出端130e输出；在第二时间段，调整反射光的出射角度，使泵浦激光L1通过第四分光组件126a反射至聚焦透镜128e，自输出端130f输出。其中第一时间段和第二时间段为不同的时间段，自输出端130f输出的泵浦激光L1和自输出端130g输出的泵浦激光L1的输出功率相同。When the pump laser L1 output from the laser module 100 is reflected by the first beam splitting assembly 121 to the fourth beam splitting assembly 126a, the driving device drives the total reflection mirror of the fourth beam splitting assembly 126a to rotate, and adjusts the reflection during the first time period. The exit angle of the light makes the pump laser L1 reflect to the focusing lens 128d through the fourth beam splitting component 126a, and output from the output end 130e; in the second time period, adjust the exit angle of the reflected light, so that the pump laser L1 passes through the fourth beam split Component 126a is reflected to focusing lens 128e, which is output from output 130f. The first time period and the second time period are different time periods, and the output power of the pump laser L1 output from the output end 130f and the pump laser light L1 output from the output end 130g is the same.

当泵浦激光L1经过第一分光组件121和第二分光组件124的透射射出后，通过反向谐振腔模块123增益为信号激光L2,并经过第二分光组件124反射射出至第三分光组件125a，驱动装置带动第三分光组件125a的全反射镜旋转，在第三时间段，调整反射光的出射角度，使信号激光L2从第三分光组件125a中反射后进入聚焦透镜128b，自输出端130c输出；在第四时间段，调整反射光的出射角度，信号激光L2从第三分光组件125a中反射后进入聚焦透镜128c，自输出端130d输出。其中第三时间段和第四时间段为不同的时间段，自输出端130c输出的泵浦激光L1和自输出端130d输出的泵浦激光L1的输出功率相同。When the pump laser L1 is transmitted and emitted by the first beam splitting component 121 and the second beam splitting component 124, it is gained into the signal laser L2 by the inverse resonator module 123, and is reflected and emitted to the third beam splitting component 125a through the second beam splitting component 124. , the driving device drives the total reflection mirror of the third beam splitting assembly 125a to rotate, and adjusts the exit angle of the reflected light in the third time period, so that the signal laser L2 is reflected from the third beam splitting assembly 125a and then enters the focusing lens 128b, from the output end 130c Output; in the fourth time period, the exit angle of the reflected light is adjusted, and the signal laser L2 is reflected from the third beam splitting component 125a and then enters the focusing lens 128c and is output from the output end 130d. The third time period and the fourth time period are different time periods, and the output power of the pump laser L1 output from the output end 130c and the pump laser light L1 output from the output end 130d is the same.

实施例六Embodiment 6

在本申请实施例六中提供了一种可输出特定波长激光的激光器，如图7所述，选择直接半导体模块作为输入光源，发射泵浦激光L1，所述泵浦激光L1经过多波长复用光闸120的输入端口进入，经第一分光组件121分成两束子泵浦激光L1，其中一束通过第二分光组件124透射进入可插拔连接在所述多波长复用光闸120输出端口130b的反向光纤谐振腔123a，增益为信号激光L2反向输出到第二分光组件124，由第三分光组件125a反射到子分激光通道经输出端口130c传递到特定的光纤激光加工台上使用；In the sixth embodiment of the present application, a laser that can output a specific wavelength laser is provided. As shown in FIG. 7 , a direct semiconductor module is selected as the input light source, and a pump laser L1 is emitted, and the pump laser L1 is multiplexed by multiple wavelengths. The input port of the optical gate 120 enters, and is divided into two beams of sub-pumped laser light L1 through the first optical splitting component 121, one of which is transmitted through the second optical splitting component 124 and enters the pluggable connection to the output port 130b of the multi-wavelength multiplexing optical gate 120. The reverse fiber resonator 123a, the gain is that the signal laser L2 is reversely output to the second optical splitting assembly 124, reflected by the third optical splitting assembly 125a to the sub-molecular laser channel through the output port 130c and transmitted to a specific fiber laser processing platform for use;

另一路子泵浦激光L1经第四分光组件126a分光后的一部分泵浦激光L1反射到子通道经输出端口130e传递到特定的半导体激光加工台上使用；A part of the pump laser L1 after another sub-pump laser L1 is split by the fourth optical splitting component 126a is reflected to the sub-channel and transmitted to a specific semiconductor laser processing stage for use through the output port 130e;

另一路子泵浦激光L1经第四分光组件126a分光后的一部分泵浦激光L1投射到第四分光组件126b、经反射后进入第四分光组件126c并透射进入可插拔连接在输出端口130f的反向固体谐振腔123b，增益为信号激光L2后反向输回到第四分光组件126c，再由第四分光组件126d反射到子分激光通道经输出端口130g传递到特定的固体激光加工台上使用。A part of the pump laser L1 after being split by the fourth optical splitting component 126a is projected to the fourth optical splitting component 126b, and after being reflected, it enters the fourth optical splitting component 126c and transmits into the pluggable connection to the output port 130f. The inverse solid-state resonator 123b, the gain is the signal laser L2, and then reversely input to the fourth optical splitting component 126c, and then reflected by the fourth optical splitting component 126d to the sub-molecular laser channel and transmitted to the specific solid-state laser processing stage through the output port 130g use.

其中，反向光纤谐振腔123a由1080nm波长的低反光栅，高反光栅，增益光纤组成，激光模块110发射半导体激光束经过该谐振器谐振后经过低反光束输出发散的1080nm激光束，反向固体谐振腔123b由输出镜，激光晶体，高反镜组成，其中输出镜对1080nm光束低反，激光晶体受半导体激光束泵浦后输出1080nm激光束，而高反镜对1080nm激光束高反射。如果该输出光束为准直光，则多波长复用光闸120内部会附加一个准直扩束模块140，把激光束扩束到特定的光斑直径的准直光束。Among them, the reverse fiber resonator 123a is composed of a low-reflection grating, a high-reflection grating and a gain fiber with a wavelength of 1080nm. The laser module 110 emits a semiconductor laser beam that resonates through the resonator and outputs a divergent 1080nm laser beam through the low-reflection beam. The solid resonator 123b is composed of an output mirror, a laser crystal, and a high-reflection mirror, wherein the output mirror has a low reflection to the 1080nm beam, the laser crystal is pumped by a semiconductor laser beam and outputs a 1080nm laser beam, and the high-reflection mirror has a high reflection to the 1080nm laser beam. If the output beam is collimated light, a collimating beam expanding module 140 will be added inside the multi-wavelength multiplexing optical shutter 120 to expand the laser beam to a collimated beam with a specific spot diameter.

优选的，激光模块还包括一电压控制模块112，所述电压控制模块112与激光模块中的光源111连接。反向光纤谐振腔123a中的特殊掺杂的增益光纤或反向固体谐振腔123b中特殊掺杂激光晶体可作为一个被动的可饱和吸收体，由于饱和吸收体会将低强度的光吸收，而在光强足够高时让其穿过，通过电压控制模块112脉冲式调节半导体光源的输入电流，从而可以改变输出半导体激光束的脉冲宽度和脉冲峰值。由于输入到激光晶体或者增益光纤的激光能量未达到饱和吸收状态，该半导体光脉冲的前沿都被衰减吸收，当半导体输入的脉冲峰值瞬时功率足够高时，可饱和吸收体达到其产生激光束的阈值，瞬间让激光束通过，则此时输出的激光束峰值能量远高于原来半导体输入的激光束峰值能量，相当于通过该方法我们实现了高峰值能量的脉冲激光输出。Preferably, the laser module further includes a voltage control module 112, and the voltage control module 112 is connected to the light source 111 in the laser module. The specially doped gain fiber in the reverse fiber resonator 123a or the specially doped laser crystal in the reverse solid resonator 123b can be used as a passive saturable absorber. When the light intensity is high enough, it is allowed to pass through, and the input current of the semiconductor light source is adjusted in pulse mode through the voltage control module 112, so that the pulse width and pulse peak value of the output semiconductor laser beam can be changed. Since the laser energy input to the laser crystal or gain fiber does not reach the saturable absorption state, the leading edge of the semiconductor optical pulse is attenuated and absorbed. When the peak instantaneous power of the pulse input by the semiconductor is high enough, the saturable absorber can reach its ability to generate a laser beam. Threshold, the laser beam passes through instantaneously, and the peak energy of the output laser beam is much higher than the peak energy of the laser beam input by the original semiconductor, which is equivalent to the realization of pulsed laser output with high peak energy through this method.

优选的，如果功率比较高的时候，所述光纤谐振腔123a或反向固体谐振腔123b可以内置散热模块，通过内置的风道和水路冷却腔体，提升使用功率。Preferably, if the power is relatively high, the optical fiber resonator 123a or the reverse solid resonator 123b may have a built-in heat dissipation module, and the built-in air duct and water channel are used to cool the cavity to increase the power used.

本申请实施例提出了一种通过提供低成本可插拔的增益模块，在输入光源基本不变化的情况下，即可产生各种一些特定的波长，特定模式，甚至连续和脉冲方式的激光束。例如，通过光束质量比较差的915nm半导体产生光束质量比较好的1080nm的激光器，通过该915nm等泵浦激光输出单脉冲能量比较高的激光束。在客户应用端，客户只需要购买特定的低成本模块，即可实现各种各样的激光器效果，相对当前直接购买激光器，成本大幅下降。The embodiments of the present application propose a low-cost pluggable gain module, which can generate various laser beams of specific wavelengths, specific modes, and even continuous and pulsed modes without substantially changing the input light source. . For example, a 1080 nm laser with relatively good beam quality is generated by a 915 nm semiconductor with poor beam quality, and a laser beam with relatively high single-pulse energy is output through the 915 nm pump laser. On the client application side, customers only need to purchase specific low-cost modules to achieve various laser effects. Compared with the current direct purchase of lasers, the cost is greatly reduced.

实施例七Embodiment 7

本申请实施例七还提供了一种激光输出方法，请参见图8，其示出了本申请实施例提供的一种激光输出方法，该激光输出方法包括：Embodiment 7 of the present application further provides a laser output method. Please refer to FIG. 8 , which shows a laser output method provided by an embodiment of the present application. The laser output method includes:

发射泵浦激光；emit pump laser;

接受输出的泵浦激光，并将所述泵浦激光分成至少两路；receiving the output pump laser, and dividing the pump laser into at least two paths;

将至少一路所述泵浦激光增益放大为信号激光；Amplify the gain of at least one channel of the pump laser into a signal laser;

将所述泵浦激光和/或所述信号激光自至少两个分激光通道分时或同时输出。The pump laser light and/or the signal laser light are output from the at least two sub-laser channels in time-division or simultaneously.

具体的，所述激光模块110发射泵浦激光L1输入至多波长复用光闸120，控制所述多波长复用光闸120的第一分光组件121，部分或全部透射所述泵浦激光L1，透射出的所述泵浦激光L1通过所述增益模块增益放大为信号激光L2，当增益模块为反向增益模块时，控制至少一第三分光组件125，反射和/或透射所述第二分光组件反射出的所述信号激光L2，将其分配至不同分激光通道，实现分时或同时输出信号激光L2；当增益模块为正向增益模块时，信号激光L2可直接自分激光通道输出。Specifically, the laser module 110 transmits the pump laser L1 and inputs it to the multi-wavelength multiplexing optical gate 120, and controls the first optical splitting component 121 of the multi-wavelength multiplexing optical gate 120 to partially or fully transmit the pump laser L1, The transmitted pump laser L1 is gain-amplified into the signal laser L2 by the gain module, and when the gain module is a reverse gain module, at least one third beam splitting component 125 is controlled to reflect and/or transmit the second beam splitter The signal laser L2 reflected by the component is distributed to different sub-laser channels to realize time-sharing or simultaneous output of the signal laser L2; when the gain module is a forward gain module, the signal laser L2 can be directly output from the sub-laser channel.

同时，控制所述多波长复用光闸120的第一分光组件121，反射部分或全部所述泵浦激光L1至一所述第四分光组件126，控制所述至少一第四分光组件反射和/或透射所述主激光，将所述泵浦激光L1分配至不同分激光通道，实现分时或同时输出泵浦激光L1。At the same time, the first optical splitting component 121 of the multi-wavelength multiplexing optical gate 120 is controlled to reflect part or all of the pump laser L1 to one of the fourth optical splitting components 126, and the at least one fourth optical splitting component is controlled to reflect and /or transmit the main laser light, and distribute the pump laser light L1 to different sub-laser channels, so as to realize the time-division or simultaneous output of the pump laser light L1.

实施例八Embodiment 8

请参阅图9，本申请实施例八提供了一种激光加工平台200，该加工平台200 采用如本申请实施例所示的激光输出***100，所述加工平台可以提供多个加工端口出光，可在半导体激光加工、固态激光和/或光纤激光加工中切换使用。Referring to FIG. 9, the eighth embodiment of the present application provides a laser processing platform 200. The processing platform 200 adopts the laser output system 100 shown in the embodiment of the present application. Switch between semiconductor laser processing, solid state laser and/or fiber laser processing.

具体地，所述加工平台200采用如上述激光输出***100，加工平台200可提供如上述激光输出***提供的泵浦激光L1和/或信号激光L2对待加工工件进行分时或同时加工，当待加工工件有多道加工工艺需同时实施时，泵浦激光L1和信号激光L2自不同方位同时出光完成加工；当待加工工件需多道加工工艺逐次实施时，可按需要选择泵浦激光L1或信号激光L2自一个方位或多个方位逐次出光完成加工。所述加工平台200还包括激光加工头用于与激光输出头适配连接对待加工工件进行加工。需要说明的是，所述激光输出***100的输出端、所述激光输出头、激光加工头的数量可根据实际需要进行配置。Specifically, the processing platform 200 adopts the above-mentioned laser output system 100, and the processing platform 200 can provide the pump laser L1 and/or the signal laser L2 provided by the above-mentioned laser output system for time-sharing or simultaneous processing of the workpiece to be processed. When the workpiece to be processed needs multiple processing processes to be implemented at the same time, the pump laser L1 and the signal laser L2 emit light from different directions at the same time to complete the processing; when the workpiece to be processed requires multiple processing processes to be implemented successively, the pump laser L1 or The signal laser L2 emits light from one azimuth or multiple azimuths successively to complete the processing. The processing platform 200 further includes a laser processing head adapted to be connected with the laser output head to process the workpiece to be processed. It should be noted that, the number of the output ends of the laser output system 100, the laser output heads, and the laser processing heads can be configured according to actual needs.

实施例九Embodiment 9

本申请实施例九还提供了一种激光加工方法，请参见图10，其示出了本申请实施例提供的一种激光加工方法的流程图，该激光加工方法包括：The ninth embodiment of the present application also provides a laser processing method. Please refer to FIG. 10 , which shows a flowchart of the laser processing method provided by the embodiment of the present application. The laser processing method includes:

发射主激光；Launch the main laser;

将所述多波长激光分成至少两路子激光输出，所述至少一路子激光由所述主激光增益放大得到；The multi-wavelength laser is divided into at least two sub-laser outputs, and the at least one sub-laser is obtained by gain amplification of the main laser;

通过控制光路的开关将所述每路子激光被引入不同的加工平台；Each sub-laser is introduced into a different processing platform by controlling the switch of the optical path;

所述每一路子激光同时或分时在多个加工平台之间快速切换至工作。Each of the sub-lasers can be quickly switched to work between multiple processing platforms at the same time or time-sharing.

所述子激光的输出功率及光斑质量与主激光的输出功率和光斑质量相同。The output power and spot quality of the sub-laser are the same as those of the main laser.

综上所述，本申请实施例中提供了一种激光输出***，包括：激光单元、光切换模块和增益模块，其中，激光模块用于输出激光，光切换模块用于接收所述激光模块输出的所述泵浦激光，将所述泵浦激光分光后增益为信号激光，并将所述泵浦激光和/或所述信号激光分配至不同分激光通道，通过至少两个输出端口分时或同时输出。To sum up, an embodiment of the present application provides a laser output system, including: a laser unit, an optical switching module and a gain module, wherein the laser module is used for outputting laser light, and the optical switching module is used for receiving the output of the laser module The pump laser is split into a signal laser, and the pump laser and/or the signal laser are distributed to different split laser channels, time-division or output at the same time.

本申请实施例提供的激光输出***通过光切换模块对输出激光的数量和光路进行控制，能够分时或同时输出一束或多束激光，且多波长复用光闸设置在激光模块的输出端，能够减少对所输出的多束激光中每路子激光的影响，从而得到质量高、效果好的激光光斑。本申请实施例提供的激光输出***还通过有限的激光模块实现了多种多样的激光束输出，大幅拓展了激光束的类型，以极低的成本实现了多种应用厂家的覆盖。例如，未来客户可以只采购一个半导体光源，两个可插拔的增益模块和一个多波长复用光闸即可实现常规光闸的不同功率，不同纤芯直径光束的输出而且还附带的实现了包括半导体激光输出、光纤激光输出、固体激光输出、脉冲激光输出等不同类型激光束的输出，相对传统加工中需要购买单独输出以上各种光束的激光器，其成本明显大幅下降，因此，本申请提供了一种未来激光模块化，低成本的创造性解决方案。The laser output system provided by the embodiment of the present application controls the quantity and optical path of the output lasers through an optical switching module, and can output one or more laser beams in time-division or at the same time, and the multi-wavelength multiplexing optical gate is arranged at the output end of the laser module , which can reduce the influence on each sub-laser in the output multi-beam laser, so as to obtain a laser spot with high quality and good effect. The laser output system provided by the embodiments of the present application also realizes various laser beam outputs through limited laser modules, greatly expands the types of laser beams, and achieves coverage of various application manufacturers at extremely low cost. For example, in the future, customers can purchase only one semiconductor light source, two pluggable gain modules and a multi-wavelength multiplexing optical shutter to realize the output of conventional optical shutters with different powers and different core diameters, and the additional realization Including the output of different types of laser beams such as semiconductor laser output, fiber laser output, solid laser output, pulse laser output, etc., the cost of lasers that output the above various beams needs to be purchased separately in traditional processing, and the cost is significantly reduced. Therefore, this application provides A modular, low-cost creative solution for the future of lasers.

需要说明的是，以上所描述的装置实施例仅仅是示意性的，其中所述作为分离部件说明的单元可以是或者也可以不是物理上分开的，作为单元显示的部件可以是或者也可以不是物理单元，即可以位于一个地方，或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部模块来实现本实施例方案的目的。It should be noted that the device embodiments described above are only schematic, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physically separated unit, that is, it can be located in one place, or it can be distributed over multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution in this embodiment.

最后应说明的是：以上实施例仅用以说明本申请的技术方案，而非对其限制；在本申请的思路下，以上实施例或者不同实施例中的技术特征之间也可以进行组合，步骤可以以任意顺序实现，并存在如上所述的本申请的不同方面的许多其它变化，为了简明，它们没有在细节中提供；尽管参照前述实施例对本申请进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本申请各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit them; under the thinking of the present application, the technical features in the above embodiments or different embodiments can also be combined, The steps may be carried out in any order, and there are many other variations of the different aspects of the present application as described above, which are not provided in detail for the sake of brevity; although the present application has been The skilled person should understand that it is still possible to modify the technical solutions recorded in the foregoing embodiments, or to perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the implementation of the application. scope of technical solutions.

Claims

一种激光输出***，包括：A laser output system includes:

激光模块，用于输出泵浦激光；Laser module, used to output pump laser;

光切换模块，用于接收所述激光模块输出的泵浦激光，并将其分成至少两路子激光分时或同时分配到多个分激光通道中,其中至少一路所述子激光为信号激光；以及an optical switching module, configured to receive the pump laser output from the laser module, and divide it into at least two sub-lasers time-divisionally or simultaneously distribute them to a plurality of sub-laser channels, wherein at least one of the sub-lasers is a signal laser; and

多个激光输出头，用于将所述多个分激光通道输出的激光准直聚焦后输出；a plurality of laser output heads, used for collimating and focusing the laser beams output by the plurality of sub-laser channels and outputting;
根据权利要求1所述的激光输出***，其中所述光切换模块中还包括增益子模块，用于将至少部分所述泵浦激光增益为信号激光。The laser output system according to claim 1, wherein the optical switching module further comprises a gain sub-module, which is used to gain at least part of the pump laser into a signal laser.
根据权利要求2所述的激光输出***，所述增益子模块为反向谐振腔模块或反向放大器模块。The laser output system according to claim 2, wherein the gain sub-module is an inverse resonant cavity module or an inverse amplifier module.
根据权利要求1或2所述的激光输出***，所述光切换模块包括控制单元和多个分光镜片，所述分光镜片上分别镀有特定的膜系，用于透射或反射入射的特定波长激光，所述控制单元通过控制所述不同分光镜片的移动，将入射的子激光分配到对应的所述分激光通道中。The laser output system according to claim 1 or 2, wherein the light switching module comprises a control unit and a plurality of dichroic mirrors, the dichroic mirrors are respectively coated with a specific film system for transmitting or reflecting the incident laser light of a specific wavelength , the control unit distributes the incident sub-lasers to the corresponding sub-laser channels by controlling the movement of the different dichroic mirrors.
根据权利要求4所述的激光输出***，其特征在于，所述分光镜片包括设置在所述激光模块出射光路上的第一透光镜片和第一反射镜片，所述第一透光镜片用于透射射入的所述泵浦激光中的特定波长激光，所述第一反射镜片用于反射射入的所述泵浦激光中的特定波长激光。The laser output system according to claim 4, wherein the dichroic lens comprises a first translucent lens and a first reflection lens arranged on the outgoing light path of the laser module, and the first translucent lens is used for The specific wavelength laser light in the incident pump laser light is transmitted, and the first reflecting lens is used for reflecting the specific wavelength laser light in the incident pump laser light.
根据权利要求5所述的激光输出***，所述分光镜片还包括设置在所述第一透射镜片与所述增益子模块之间的第二镜片，用于透射射入的所述泵浦激光中的特定波长激光并反射所述信号激光。The laser output system according to claim 5, wherein the dichroic mirror further comprises a second mirror set between the first transmission mirror and the gain sub-module, for transmitting the pump laser light that is incident on the specific wavelength of laser light and reflect the signal laser light.
根据权利要求6所述的激光输出***，所述分光镜片还包括设置在所述第二镜片反射光路上的多组第三透光镜片和第三反射镜片，所述第三透光镜片用于透射射入的所述信号激光，所述第三反射镜片用于反射射入的所述信号激光。The laser output system according to claim 6, wherein the dichroic mirror further comprises a plurality of groups of third light-transmitting mirrors and third reflective mirrors disposed on the reflection light path of the second mirror, the third light-transmitting mirrors being used for The incoming signal laser light is transmitted, and the third reflecting lens is used for reflecting the incoming signal laser light.
根据权利要求5所述的激光输出***，所述分光镜片还包括设置在所述第一反射镜片的反射光路上的多组第四透光镜片和第四反射镜片，所述第四透光镜片用于透射射入的所述泵浦激光中的特定波长激光，所述第四反射镜片用于反射射入的所述泵浦激光中的特定波长激光。The laser output system according to claim 5, wherein the dichroic mirror further comprises a plurality of groups of fourth translucent mirrors and fourth reflective mirrors disposed on the reflected light path of the first reflective mirror, the fourth translucent mirrors The fourth reflective sheet is used for transmitting the specific wavelength laser light in the incident pumping laser light, and the fourth reflecting mirror is used for reflecting the specific wavelength laser light in the incident pumping laser light.
根据权利要求1所述的激光输出***，所述激光模块包括固体激光光源、半导体激光光源或光纤激光光源中的一种或多种，所述激光输出头包括半导体激光输出头、光纤激光输出头和固体激光输出头中的一种或多种。The laser output system according to claim 1, wherein the laser module comprises one or more of a solid-state laser light source, a semiconductor laser light source or a fiber laser light source, and the laser output head comprises a semiconductor laser output head, a fiber laser output head and one or more of solid-state laser output heads.
根据权利要求2所述的激光输出***，所述光切换模块还包括一准直扩束子模块，用于将增益输出的所述信号激光扩束为预设光斑直径的准直光束。The laser output system according to claim 2, wherein the optical switching module further comprises a collimation beam expansion sub-module for expanding the signal laser beam output by the gain into a collimated beam with a preset spot diameter.
一种激光输出方法，其特征在于，包括：A laser output method, comprising:

输出泵浦激光；Output pump laser;

接收所述泵浦激光，并将至少部分所述泵浦激光增益放大为信号激光；receiving the pump laser, and amplifying at least part of the pump laser gain into signal laser;

将所述泵浦激光与所述信号激光分时或同时分配到多个分激光通道中准直聚焦后输出。The pump laser and the signal laser are time-divisionally or simultaneously distributed into a plurality of sub-laser channels and output after collimation and focusing.
根据权利要求11所述的激光输出方法，所述泵浦激光为多波长激光束，所述泵浦激光中的特定波长激光通过透射或反射的方式被分时或同时分配至不同的分激光通道输出。The laser output method according to claim 11, wherein the pump laser is a multi-wavelength laser beam, and the specific wavelength laser in the pump laser is time-divisionally or simultaneously distributed to different sub-laser channels by means of transmission or reflection output.
一种多波长复用光闸，包括：A multi-wavelength multiplexing optical gate, comprising:

壳体，所述壳体上设有一个输入端口和多个输出端口；a casing, which is provided with an input port and a plurality of output ports;

分光组件，用于接收自所述输入端射入的主激光束，将所述主激光束分成多路具不同波长的子激光后分时或同时自对应的输出端口输出。The optical splitting component is used for receiving the main laser beam incident from the input end, dividing the main laser beam into multiple sub-lasers with different wavelengths, and then outputting from the corresponding output port in time-division or at the same time.
根据权利要求13所述的多波长复用光闸，所述光闸还包括一增益模块，所述增益模块设置于所述分光组件与所述输出端口之间，用于将输入的子激光增益放大后反向输回所述分光组件。The multi-wavelength multiplexing optical gate according to claim 13, further comprising a gain module, the gain module is arranged between the optical splitting component and the output port, and is used to gain the input sub-laser. After amplification, it is returned to the spectroscopic component in reverse.
根据权利要求13所述的多波长复用光闸，所述分光组件还包括多个分光镜片，所述分光镜片上分别镀有特定膜系的光学薄膜，用于对入射光束中特定波长的光进行透射或反射。The multi-wavelength multiplexing optical shutter according to claim 13, wherein the spectroscopic component further comprises a plurality of spectroscopic mirrors, and the spectroscopic mirrors are respectively coated with optical films of a specific film system, which are used to detect the light of a specific wavelength in the incident beam. Transmit or reflect.
一种激光器，包括：A laser comprising:

激光模块，用于输出泵浦激光；Laser module, used to output pump laser;

多波长复用光闸，所述多波长复用光闸设有一个输入端口和多个输出端口，所述输入端口与所述激光模块连接，用于接收所述激光模块输出的泵浦激光，并对所述泵浦激光分光分路后从对应的多个输出端口分别输出；a multi-wavelength multiplexing optical gate, the multi-wavelength multiplexing optical gate is provided with an input port and a plurality of output ports, the input port is connected with the laser module, and is used for receiving the pump laser output by the laser module, and splitting the pump laser light and outputting from the corresponding multiple output ports respectively;

增益放大器，所述增益放大器与所述光闸连接，用于将其中一束分路泵浦激光增益为信号激光；和a gain amplifier, the gain amplifier is connected to the optical gate, and is used to gain one of the shunt pump lasers into a signal laser; and

多个输出头，所述激光输出头与所述光闸的多个输出端口分别连接，用于分别接收自所述多波长复用光闸输出的泵浦激光或信号激光。A plurality of output heads, the laser output heads are respectively connected with the multiple output ports of the optical gate, and are used for respectively receiving the pump laser or the signal laser output from the multi-wavelength multiplexing optical gate.
根据权利要求16所述的激光器，所述增益放大器为正向谐振腔、正向MOPA放大器、反向谐振腔或反向MOPA放大器中的任一一种，所述增益放大器可插拔连接于所述光闸的输出端口。The laser according to claim 16, wherein the gain amplifier is any one of a forward resonant cavity, a forward MOPA amplifier, an inverse resonant cavity or an inverse MOPA amplifier, and the gain amplifier is pluggably connected to the the output port of the shutter.
根据权利要求16所述的激光器，所述激光模块包括固体激光光源、半导体激光光源或光纤激光光源中的一种或多种，所述激光输出头包括半导体激光输出头、光纤激光输出头和固体激光输出头中的一种或多种。The laser according to claim 16, wherein the laser module comprises one or more of a solid-state laser light source, a semiconductor laser light source or a fiber laser light source, and the laser output head comprises a semiconductor laser output head, a fiber laser output head and a solid-state laser output head One or more of the laser output heads.
一种激光加工方法，包括：A laser processing method, comprising:

发射主激光；Launch the main laser;

将所述多波长激光分成至少两路子激光输出，所述至少一路子激光由所述主激光增益放大得到；The multi-wavelength laser is divided into at least two sub-laser outputs, and the at least one sub-laser is obtained by gain amplification of the main laser;

通过控制光路的开关将所述每路子激光被引入不同的加工平台；Each sub-laser is introduced into a different processing platform by controlling the switch of the optical path;

所述每一路子激光同时或分时在多个加工平台之间快速切换至工作。Each of the sub-lasers can be quickly switched to work between multiple processing platforms at the same time or time-sharing.
根据权利要求19所述的激光加工方法，所述至少一路子激光的输出功率及光斑质量与主激光的输出功率和光斑质量相同。The laser processing method according to claim 19, wherein the output power and spot quality of the at least one sub-laser are the same as the output power and spot quality of the main laser.