WO2022142433A1 - 一种切割设备 - Google Patents

一种切割设备 Download PDF

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Publication number
WO2022142433A1
WO2022142433A1 PCT/CN2021/116062 CN2021116062W WO2022142433A1 WO 2022142433 A1 WO2022142433 A1 WO 2022142433A1 CN 2021116062 W CN2021116062 W CN 2021116062W WO 2022142433 A1 WO2022142433 A1 WO 2022142433A1
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WO
WIPO (PCT)
Prior art keywords
crucible
cutting device
cutting
positioning mechanism
present disclosure
Prior art date
Application number
PCT/CN2021/116062
Other languages
English (en)
French (fr)
Inventor
邓书珍
杨林魁
刘爱军
陈新军
牛金淼
李国满
聂大威
胡新林
Original Assignee
保山隆基硅材料有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 保山隆基硅材料有限公司 filed Critical 保山隆基硅材料有限公司
Publication of WO2022142433A1 publication Critical patent/WO2022142433A1/zh

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/20Drives or gearings; Equipment therefor relating to feed movement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/16Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by turning

Definitions

  • the present disclosure relates to the technical field of single crystal manufacturing, and in particular, to a cutting device.
  • the thickness of the crucible opening is uneven and uneven.
  • cutting equipment is used to cut off a section of the crucible opening, and the inner and outer edges of the crucible opening are processed.
  • the current cutting equipment is usually divided into two types.
  • One type of cutting equipment usually uses four roller structures to hold the crucible. When the four rollers roll at the same time, the crucible is driven to rotate, and the edge trimming cutter head and the chamfering cutter head are used to carry out the cutting process on the crucible. Trimming and chamfering.
  • This kind of cutting equipment can quickly locate the crucible, but the crucible is easy to shake relative to the roller during the rotation process, which makes the outer circular incision of the crucible mouth uneven and has steps, resulting in poor processing effect of the crucible.
  • Another type of cutting equipment usually uses a three-jaw chuck to hold the crucible, and the three-jaw chuck clamps the crucible and drives the crucible to rotate together.
  • This kind of cutting equipment can achieve good processing effect, but it needs to manually adjust the coaxiality of the crucible and the three-jaw chuck, and the positioning time is long. That is, the cutting equipment in the prior art cannot have the characteristics of good processing effect and fast positioning speed at the same time.
  • the present disclosure has been made in order to provide a cutting apparatus that overcomes the above-mentioned problems or at least partially solves the above-mentioned problems.
  • the present disclosure discloses a cutting device for processing a crucible, the cutting device comprising: a clamping device, a positioning device and a cutting device; wherein,
  • the clamping device clamps the crucible
  • the positioning device cooperates with the clamping device to perform a positioning operation on the crucible so that the center line of the crucible coincides with the center line of the clamping device;
  • the cutting device is disposed opposite to the holding device, and the cutting device is used for processing the crucible held by the holding device.
  • the cutting device further includes a frame, and the clamping device, the positioning device and the cutting device are all arranged on the frame.
  • the positioning device and the cutting device are slidably connected to the frame, and the clamping device is fixedly connected to the frame.
  • the bottom of the frame is provided with a slide rail
  • the slide rail is provided with a first sliding block and a second sliding block
  • the positioning device is slidably connected to the sliding rail through the first sliding block
  • the cutting device is slidably connected to the sliding rail through the second sliding block.
  • the positioning device is arranged between the clamping device and the cutting device.
  • the positioning device includes: an upper positioning mechanism and a lower positioning mechanism; wherein,
  • the upper positioning mechanism is slidably connected to the beam of the frame;
  • the lower positioning mechanism is slidably connected to the sliding rail through the first sliding block;
  • the lower positioning mechanism is arranged opposite to the upper positioning mechanism.
  • the upper positioning mechanism includes: a first lifting structure and two first rollers, the two first rollers are arranged on the first lifting structure;
  • the lower positioning mechanism includes: a second lifting structure and Two second rollers, the two second rollers are arranged on the second lifting structure; the first roller and the second roller are oppositely arranged.
  • the lower positioning mechanism further includes a lifting structure, the lifting structure is movably connected to the first sliding block, and the lifting structure is used to lift the crucible so as to move the crucible out of the place. the cutting equipment.
  • the cutting device includes a motor, a trimming grinding wheel and a chamfering grinding wheel, and the motor drives the trimming grinding wheel and the chamfering grinding wheel respectively.
  • the clamping device is a chuck structure.
  • the positioning device can perform a positioning operation on the crucible, so that the centerline of the crucible coincides with the centerline of the clamping device, so that the clamping device can clamp the crucible after the positioning operation, the cutting device and the clamping device
  • the opposite arrangement is convenient for the cutting device to process the crucible held by the holding device.
  • the positioning device can quickly adjust the center line of the crucible to the state of being coincident with the center line of the clamping device, and the positioning speed is relatively fast; the clamping device can clamp the crucible, so that the crucible is not easy to shake relative to the clamping device, enhancing the The stability of the crucible during the cutting process can improve the processing effect of the cutting device on the crucible, that is, the cutting device in the present disclosure can have both the characteristics of fast positioning speed and good processing effect.
  • FIG. 1 is a schematic structural diagram of a cutting device of the present disclosure in a certain direction
  • FIG. 2 is a schematic structural diagram of a cutting device of the present disclosure in another direction;
  • FIG. 3 is an enlarged schematic view of the structure at A in FIG. 2 of the present disclosure
  • FIG. 4 is an enlarged schematic view of the structure at B in FIG. 2 of the present disclosure.
  • FIG. 5 is a schematic structural diagram of a crucible detachment cutting device of the present disclosure
  • FIG. 6 is an enlarged schematic view of the structure at C in FIG. 5 of the present disclosure.
  • FIG. 7 is a schematic structural diagram of a positioning device of the present disclosure during operation
  • FIG. 8 is a schematic structural diagram of a clamping device of the present disclosure during operation
  • FIG. 9 is a schematic structural diagram of a cutting device of the present disclosure during operation.
  • FIG. 10 is a schematic structural diagram of a cutting device of the present disclosure after the work is completed.
  • FIG. 1 it shows a schematic structural diagram of a cutting device of the present disclosure in a certain direction.
  • FIG. 2 it shows another cutting device of the present disclosure.
  • the cutting device may specifically include: a clamping device 2, a positioning device 3 and a cutting device 4; wherein, the clamping device 2 can clamp the crucible 200; the positioning device 3 can cooperate with the clamping device 2, The crucible 200 is positioned so that the centerline of the crucible 200 coincides with the centerline of the clamping device 2; the cutting device 4 is arranged opposite the clamping device 2, and the cutting device 4 can be used to process the crucible clamped by the clamping device 2 200.
  • the positioning device 3 can perform a positioning operation on the crucible 200, so that the centerline of the crucible 200 coincides with the centerline of the clamping device 2, so that the clamping device 2 can clamp the crucible 200 after the positioning operation,
  • the cutting device 4 is disposed opposite to the holding device 2 , so that the cutting device 4 can process the crucible 200 held by the holding device 2 .
  • the positioning device 3 can quickly adjust the centerline of the crucible 200 to coincide with the centerline of the clamping device 2 , so that the positioning operation of the crucible 200 is faster; the clamping device 2 can clamp the crucible 200 so that the The crucible 200 is not easy to shake relative to the clamping device 2, which enhances the stability of the crucible during the cutting process, and can improve the processing effect of the cutting device 4 on the crucible 200, that is, the cutting device in the present disclosure can have both high positioning speed and good processing effect.
  • the clamping device 2 is used to clamp the crucible 200 so that the cutting device 4 can process the crucible 200 .
  • the cutting device may further include a first motor, which may be connected to the clamping device 2 . , which is used to drive the clamping device 2 to drive the crucible 200 to rotate, so that the cutting device 4 can process the circumferential direction of the crucible 200 .
  • the positioning device 3 is used for positioning the crucible 200 so that the center line of the crucible 200 and the center line of the clamping device 2 are coincident, so as to improve the processing effect of the cutting device 4 on the crucible 200 .
  • the positioning device 3 can perform a positioning operation on the untreated crucible 200, and can also perform a positioning operation on the processed crucible 200 again, so as to start the processing operation of the crucible 200 again, which is not specifically limited in the present disclosure. .
  • the cutting device 4 may include a motor, a trimming grinding wheel 42 and a chamfering grinding wheel 43 , and the motor may drive the trimming grinding wheel 42 and the chamfering grinding wheel 43 respectively.
  • the motor drives the trimming grinding wheel 42 and the chamfering grinding wheel 43 respectively to process the crucible 200 , which can speed up the processing speed of the cutting device 4 on the crucible 200 .
  • the cutting device 4 may include: a cross slide structure 45, a trimming grinding wheel 42 and a chamfering grinding wheel 43.
  • the chamfering grinding wheel 43 may also include an inner chamfering grinding wheel 431 and an outer chamfering grinding wheel 432;
  • the trimming grinding wheel 42 can be fixedly connected to the cross slide structure 45 for trimming the crucible opening of the crucible 200 ;
  • the outer chamfering grinding wheel 432 can be fixedly connected to the cross slide structure 45 for performing outer chamfering treatment on the opening of the crucible 200 .
  • the cutting device 4 can first perform edge trimming treatment on the crucible opening of the crucible 200, and then perform inner chamfering treatment and outer chamfering treatment on the crucible opening after the edge trimming treatment.
  • the order of processing is not specifically limited in this embodiment of the present disclosure.
  • the motor may include: a second motor, a third motor and a fourth motor, the second motor may be used to drive the edge trimming grinding wheel 42 to trim the crucible opening of the crucible 200, and the third motor may be used to drive the inward pouring process
  • the edge grinding wheel 431 performs inner chamfering on the crucible opening of the crucible 200
  • the fourth motor can be used to drive the outer edge grinding wheel 432 to perform external chamfering processing on the opening of the crucible 200 .
  • the second motor, the third motor, and the fourth motor may each work independently, or may work simultaneously, which is not specifically limited in the embodiment of the present disclosure.
  • the second motor, the third motor, and the fourth motor may be the same motor, or may be independent different motors, which are not specifically limited in the embodiment of the present disclosure.
  • the trimming grinding wheel 42 and the chamfering grinding wheel 43 can also be replaced by other cutting tools to process the crucible opening of the crucible 200 .
  • the clamping device 2 can be a chuck structure.
  • the chuck structure can clamp the crucible 200 to prevent the crucible 200 from shaking relative to the chuck structure, so as to improve the processing effect of the crucible 200 .
  • the chuck structure may be a three-jaw chuck or a four-jaw chuck, etc., which is not specifically limited in the embodiment of the present disclosure.
  • the cutting device further includes a frame 1 , and the clamping device 2 , the positioning device 3 and the cutting device 4 can all be arranged on the frame 1 .
  • the clamping device 2 , the positioning device 3 and the cutting device 4 are all arranged on the frame 1 , which facilitates positioning, clamping and processing operations of the crucible 200 , which can improve the processing efficiency of the crucible 200 .
  • the positioning device 3 and the cutting device 4 can be slidably connected to the frame 1 , and the clamping device 2 can be fixedly connected to the frame 1 .
  • the clamping device 2 is fixedly connected to the frame 1, and the position of the positioning device 3 relative to the clamping device 2 can be adjusted by sliding the positioning device 3, so that the clamping device 2 can clamp the crucible 200.
  • the cutting device 4 adjusts the position of the cutting device 4 relative to the holding device 2 , so that the cutting device 4 can process the crucible 200 held by the holding device 2 .
  • the bottom of the frame 1 may be provided with a slide rail 11
  • the slide rail 11 may be provided with a first sliding block 31 and a second sliding block 41
  • the positioning device 3 may be slidably connected to the sliding rail 11 through the first sliding block 31
  • the cutting device 4 can be slidably connected to the sliding rail 11 through the second sliding block 41 .
  • the first slider 31 can be slidably connected to the slide rail 11 , and then the first slider 31 can drive the positioning device 3 to be slidably connected to the frame 1 , which improves the stability of the sliding connection of the positioning device 3 along the frame 1 .
  • the second sliding block 41 can be slidably connected to the sliding rail 11 , and the second sliding block 41 can drive the cutting device 4 to be slidably connected to the frame 1 , thereby improving the stability of the sliding connection of the cutting device 4 along the frame 1 .
  • the positioning device 3 may be arranged between the clamping device 2 and the cutting device 4 .
  • the positioning device 3 can first perform a positioning operation on the crucible 200, and then transport the crucible 200 to the clamping device 2. After the clamping device 2 clamps the crucible 200, the position of the cutting device 4 can be adjusted to facilitate the cutting device. 4. Process the crucible 200.
  • the positioning device 3 is arranged between the clamping device 2 and the cutting device 4, which can facilitate the positioning, clamping and processing of the crucible 200, thereby improving the processing effect of the crucible 200.
  • the crucible opening of the crucible 200 may be away from the clamping device 2 and disposed toward the cutting device 4 so that the cutting device 4 can process the opening of the crucible 200 .
  • the positioning device 3 may include: an upper positioning mechanism 32 and a lower positioning mechanism 33; wherein, the upper positioning mechanism 32 may be connected to the beam of the frame 1; the lower positioning mechanism The mechanism 33 can be slidably connected to the slide rail 11 through the first sliding block 31 ; the lower positioning mechanism 33 can be disposed opposite to the upper positioning mechanism 32 .
  • the upper positioning mechanism 32 is slidably connected to the beam of the frame 1
  • the lower positioning mechanism 33 is slidably connected to the slide rail 11 through the first sliding block 31 , so that the relative position between the upper positioning mechanism 32 and the lower positioning mechanism 33 is relatively high.
  • the position can be adjusted so that the crucible 200 is placed in the positioning device 3 and the crucible 200 is positioned using the upper positioning mechanism 32 and the lower positioning mechanism 33 .
  • the lower positioning mechanism 33 is slidably connected to the slide rail 11 through the first sliding block 31, so that the lower positioning mechanism 33 can be switched between the first position and the second position on the frame 1; the lower positioning mechanism 33 is located at the first position
  • the lower positioning mechanism 33 can be arranged opposite to the upper positioning mechanism 32, and the upper positioning mechanism 32 and the lower positioning mechanism 33 can be used for positioning the crucible 200.
  • the lower positioning mechanism 33 is located at the second position, the lower positioning mechanism 33
  • the mechanism 33 may be provided close to the holding device 2 so that the holding device 2 holds the crucible 200 after the positioning operation.
  • the lower positioning mechanism 33 when the lower positioning mechanism 33 is located at the first position, the upper positioning mechanism 32 and the lower positioning mechanism 33 can respectively contact the side walls of the crucible 200 , so that the centerline of the crucible 200 can be adjusted to be in line with the clamping device 2 .
  • the coincidence of the center lines can speed up the positioning operation of the crucible 200 .
  • the lower positioning mechanism 33 When the lower positioning mechanism 33 is located at the second position, the lower positioning mechanism 33 can drive the crucible 200 to slide together to a position close to the clamping device 2 , so that the clamping device 2 can clamp the crucible 200 after the positioning operation.
  • the lower positioning mechanism 33 drives the crucible 200 to switch between the first position and the second position, which facilitates the positioning and clamping operations of the crucible 200 respectively.
  • the upper positioning mechanism 32 may include: a first lifting structure 321 and two first rollers 322, the two first rollers 322 are provided on the first lifting structure 321, and the lower positioning mechanism 33 may It includes: a second lifting structure 331, two second rollers 332 are arranged on the second lifting knot 331; the first roller 322 and the second roller 332 are oppositely arranged.
  • the first roller 322 and the second roller 332 are disposed opposite to each other, and can be used for positioning the crucible 200 , and the first lifting structure 321 can drive the first roller 322 to ascend or descend, and the second lifting structure 331
  • the second roller 322 can be driven to ascend or descend, so that the space between the upper positioning mechanism 32 and the lower positioning mechanism 33 can be adjusted, so that the positioning device 3 can be adapted to crucibles 200 of different sizes.
  • the first lifting structure 321 can be slidably connected to the beam of the frame 1, so that the first roller 322 can be raised or lowered relative to the top of the frame 1, and the first roller 322 can be switched between the first height and the second height;
  • the two lifting structures 331 can be movably connected to the first sliding block 31 , so that the second roller 332 can ascend or descend relative to the first sliding block 31 , and the second roller 332 can switch between the third height and the fourth height.
  • the first lifting structure 321 adjusts the first roller 322 to the first height, it can prevent the cutting device 4 from colliding with the first roller 322 during the sliding process.
  • the lower positioning mechanism 33 can drive the crucible 200 to slide to a position close to the clamping device 2.
  • the second lifting structure 331 can adjust the second roller 332 to the fourth height to avoid During the process that the holding device 2 drives the crucible 200 to rotate, the crucible 200 is worn due to rolling contact with the second roller 332 for a long time.
  • the height to which the second roller 332 needs to rise can be obtained through the model operation of the control system. At this height, the second roller 332 can rise to the third position relative to the first slider 31 . Height, the centerline of the crucible 200 may coincide with the centerline of the clamping device 2 .
  • FIG. 3 an enlarged schematic view of the structure at A in FIG. 2 of the present disclosure is shown.
  • FIG. 4 an enlarged schematic view of the structure at B in FIG. 2 of the present disclosure is shown.
  • the lower positioning mechanism 33 is located at the first position and the second position. When a roller 322 descends to the second height relative to the top of the frame 1 and the second roller 332 rises to a third height relative to the first slider 31 , the first roller 322 and the second roller 332 are used to fit the side of the crucible 200 wall, the crucible 200 can be positioned.
  • the two first rollers 322 and the two second rollers 332 are attached to the side wall of the crucible 200 and drive the crucible 200 to rotate under the condition of rolling.
  • the centerline of the crucible 200 can be coincident with the centerline of the clamping device 2, which improves the speed of the crucible 200 positioning operation.
  • the upper positioning mechanism 32 may further include a first reinforcement member 51 , and the first reinforcement member 51 may be connected to the two first rollers 322 to improve the stability of the cooperation between the first rollers 322 and the crucible 200 .
  • the lower positioning mechanism 33 may further include a second reinforcement member 52 , and the second reinforcement member 52 may be connected with the two second rollers 332 to improve the stability of the second rollers 332 supporting the crucible 200 .
  • the first lifting structure 321 may further include: a plurality of first connecting rods, one end of the plurality of first connecting rods is respectively fixedly connected to the first roller 322, and the other end is respectively movably connected to the top of the frame 1, so as to The first roller 322 is raised or lowered relative to the top of the frame 1;
  • the second lifting structure 331 may include a plurality of second connecting rods, one end of the plurality of second connecting rods is respectively connected to the second roller 332, and the other end is respectively movably connected to The first sliding block 31 is used to make the second roller 332 ascend or descend relative to the first sliding block 31 .
  • the plurality of first connecting rods are movably connected to the top of the frame 1, so that the first roller 322 can rise or fall relative to the top of the frame 1, and the stability of the first roller 322 rising or falling relative to the top of the frame 1 is improved;
  • the plurality of second connecting rods are movably connected to the first sliding block 31 , enabling the second roller 332 to ascend or descend relative to the first sliding block 31 , improving the stability of the second roller 332 ascending or descending relative to the first sliding block 31 .
  • the first lifting structure 321 may further include: a first power source, the first power source may be connected with a plurality of first connecting rods for driving the plurality of first connecting rods to drive the first roller 322 relative to the frame
  • the top of 1 goes up or down.
  • the first power source may be an air cylinder or a servo system, so as to realize the up and down movement of the plurality of first connecting rods, which is not specifically limited in the embodiment of the present disclosure.
  • the power source is a cylinder
  • the pressure of the cylinder can be adjusted by the air pressure regulating valve, and then the pressure value can be set; when the power source is a servo, the pressure can be controlled by adjusting the torque of the servo.
  • the first connecting rod can be adjusted to rise or fall relative to the top of the frame 1 by controlling the pressure value.
  • the second lifting structure 331 may further include a second power source, and the second power source is connected with a plurality of second connecting rods for driving the plurality of second connecting rods to drive the second roller 332 to rise relative to the first sliding block 31 or drop.
  • the second power source may be a motor or a cylinder, etc., which is not specifically limited in the embodiment of the present disclosure.
  • FIG. 5 a schematic structural diagram of a crucible separation cutting device of the present disclosure is shown.
  • FIG. 6 an enlarged schematic structural diagram of the position C in FIG. 5 of the present disclosure is shown.
  • the lower positioning mechanism 33 is further A lift structure 333 may be included, and the lift structure 333 may be movably connected to the first slider 31; the lift structure 333 may be used to lift the crucible 200 so as to move the crucible 200 out of the cutting device.
  • the lifting structure 333 is movably connected to the first sliding block 31, and the lifting structure 333 can lift the crucible 200 to the platform, thereby facilitating the removal of the processed crucible 200 out of the cutting equipment. Moreover, in the case of positioning, clamping and processing the crucible 200 , the lifting structure 333 may be disposed close to the first sliding block 31 to avoid the lifting structure 333 from affecting the processing operation of the crucible 200 .
  • the lifting structure 333 can be switched between the fifth height and the sixth height.
  • the lifting structure 333 is disposed close to the first sliding block 31 to avoid contacting the crucible 200, and the lifting structure 333 is located at the fifth height.
  • the lifting structure 333 may be disposed away from the first sliding block 31 to lift the crucible 200 to the platform.
  • the lifting structure 333 may include a plurality of third connecting rods 3331 and a third roller 3332.
  • One end of the plurality of third connecting rods 3331 may be fixedly connected to the third rollers 3332, respectively, and the other ends may be movably connected to the third rollers 3332, respectively.
  • the third connecting rod 3331 is movably connected to the first sliding block 31, so that the third roller 3332 can be switched between the fifth height and the sixth height. In this way, when the third connecting rod 3331 drives the third roller 3332 to adjust to the fifth height, the influence of the third roller 3332 on the processing of the crucible 200 can be avoided, and the third connecting rod 3331 drives the third roller 3332 to adjust to the sixth In the case of high height, the third roller 3332 can be used to support the crucible 200 and drive the crucible 200 to be lifted to the platform, so as to facilitate the removal of the crucible 200 out of the cutting equipment.
  • FIG. 7 is a schematic structural diagram of a positioning device of the present disclosure when working
  • FIG. 8 is a structural schematic diagram of a clamping device of the present disclosure when working
  • FIG. 9 is a cutting device of the present disclosure.
  • FIG. 10 is a schematic diagram of the structure of a cutting device of the present disclosure after the work is completed.
  • the cutting device in the embodiment of the present disclosure can perform the following processing steps on the crucible 200:
  • the first step includes: first put the crucible 200 into the cutting equipment, use the second roller 332 of the lower positioning mechanism 33 to support the crucible 200, and the lower positioning mechanism 33 obtains the height that the second roller 332 needs to rise according to the read size of the crucible 200, Then, the second roller 332 is adjusted to rise to a third height relative to the first slider 31 through the second lifting structure 331 , and the height of the second roller 332 is locked.
  • the second step includes: adjusting the first roller 322 to descend to a second height relative to the top of the frame 1 through the first lifting structure 321 , and locking the height of the first roller 322 .
  • the lower positioning mechanism 33 is located at the first position, the first roller 322 and the second roller 332 drive the crucible 200 to rotate, and the crucible 200 automatically adjusts the position of the center of gravity through the rotation, so that the centerline of the crucible 200 and the clamping device 2 The center lines are coincident, and then the positioning operation of the crucible 200 is completed.
  • the third step includes: as shown in FIG. 8 , the first lifting structure 321 adjusts the first roller 322 to rise to a first height relative to the top of the frame 1 .
  • the first slider 31 slides along the slide rail 11 , so that the lower positioning mechanism 33 drives the crucible 200 to slide to the second position, so that the clamping device 2 can clamp the crucible 200 after the positioning operation.
  • the fourth step includes: as shown in FIG. 9 , the second lifting structure 331 adjusts the second roller 332 to descend to a fourth height relative to the first sliding block 31 .
  • the second slider 41 slides along the slide rail 11 so that the cutting device 4 is close to the clamping device 2 , and the first motor drives the clamping device 2 to drive the crucible 200 to rotate, so that the cutting device 4 cuts the crucible 200 clamped by the clamping device 2 .
  • the fifth step includes: as shown in FIG. 10 , after the cutting device 4 of the crucible 200 is completed, the second sliding block 41 slides along the slide rail 11 so that the cutting device 4 slides to the other end of the frame 1 .
  • the second lifting structure 331 adjusts the second roller 332 to rise to a third height relative to the first slider 31 to disassemble the crucible 200 from the clamping device 2 , so that the second roller 332 can support the crucible 200 .
  • the first sliding block 31 slides along the sliding rail 11 so that the lower positioning mechanism 33 can drive the crucible 200 to slide to the first position.
  • the sixth step includes: as shown in FIG. 5 , the lifting structure 333 lifts the third roller 3332 , so that the third roller 3332 drives the crucible 200 to rise to a sixth height, and moves the crucible 200 out of the cutting setting.
  • the cutting device may sequentially perform the above steps 1 to 6 on the crucible 200 , or may also perform some of the above steps 1 to 6, which may be adjusted according to actual conditions, which are not specifically limited in the embodiments of the present disclosure.
  • the positioning device can perform a positioning operation on the crucible, so that the centerline of the crucible coincides with the centerline of the clamping device, so that the clamping device can clamp the crucible after the positioning operation, the cutting device and the clamping device
  • the opposite arrangement is convenient for the cutting device to process the crucible held by the holding device.
  • the positioning device can quickly adjust the center line of the crucible to the state of being coincident with the center line of the clamping device, and the positioning speed is fast; the clamping device can clamp the crucible, so that the crucible is not easy to shake relative to the clamping device, enhancing the The stability of the crucible in the cutting process can improve the processing effect of the cutting device on the crucible, that is, the cutting device in the present disclosure can have the characteristics of fast positioning speed and good processing effect.

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Abstract

本公开提供了一种切割设备,用于切割坩埚,所述切割设备包括:夹持装置、定位装置和切割装置;其中,所述夹持装置对所述坩埚进行夹持;所述定位装置与所述夹持装置配合,对所述坩埚进行定位操作,使所述坩埚的中心线与夹持装置的中心线重合;所述切割装置与所述夹持装置相对设置,所述切割装置用于加工所述夹持装置夹持的所述坩埚。本公开中的切割设备可以兼备定位速度快和加工效果好的特点。

Description

一种切割设备
相关申请的交叉引用
本公开要求在2020年12月30日提交中国专利局、申请号为202023330500.1、名称为“一种切割设备”的中国专利申请的优先权,其全部内容通过引用结合在本公开中。
技术领域
本公开涉及单晶制造技术领域,特别是涉及一种切割设备。
背景技术
现有技术中,坩埚刚熔制出来时,埚口厚薄不均、参差不齐,通常需要使用切割设备切除一段埚口,并对埚口做内外倒棱处理。
目前的切割设备通常分为两种,一种切割设备通常使用四个滚轮结构夹持坩埚,四个滚轮同时滚动的情况下,带动坩埚旋转,使用切边刀头、倒棱刀头对坩埚进行切边、倒棱处理。这种切割设备可以快速定位坩埚,但是坩埚在旋转过程中容易相对滚轮抖动,使得埚口外圆切口不平整、有台阶,造成坩埚的加工效果较差。
另一种切割设备通常使用三爪卡盘夹持坩埚,三爪卡盘夹紧坩埚后带动坩埚一起旋转。这种切割设备可以实现较好的加工效果,但是需要人工调整坩埚与三爪卡盘的同轴度,定位时间较长。也即,现有技术中的切割设备无法同时兼备加工效果好和定位速度快的特点。
概述
鉴于上述问题,提出了本公开以便提供一种克服上述问题或者至少部分地解决上述问题的一种切割设备。
为了解决上述问题,本公开公开了一种切割设备,用于加工坩埚,所述切割设备包括:夹持装置、定位装置和切割装置;其中,
所述夹持装置对所述坩埚进行夹持;
所述定位装置与所述夹持装置配合,对所述坩埚进行定位操作,使所述坩埚的中心线与夹持装置的中心线重合;
所述切割装置与所述夹持装置相对设置,所述切割装置用于加工所述夹 持装置夹持的所述坩埚。
可选地,所述切割设备还包括框架,所述夹持装置、所述定位装置及所述切割装置均设置于所述框架上。
可选地,所述定位装置、所述切割装置滑动连接于所述框架,所述夹持装置固定连接于所述框架。
可选地,所述框架的底部设有滑轨,所述滑轨上设有第一滑块及第二滑块,所述定位装置通过所述第一滑块滑动连接于所述滑轨,所述切割装置通过所述第二滑块滑动连接于所述滑轨。
可选地,所述定位装置设置于所述夹持装置和所述切割装置之间。
可选地,所述定位装置包括:上定位机构和下定位机构;其中,
所述上定位机构滑动连接于所述框架的横梁;
所述下定位机构通过所述第一滑块滑动连接于所述滑轨;
所述下定位机构与所述上定位机构相对设置。
可选地,所述上定位机构包括:第一升降结构和两个第一滚轮,所述两个第一滚轮设于所述第一升降结构;所述下定位机构包括:第二升降结构和两个第二滚轮,所述两个第二滚轮设于所述第二升降结构;所述第一滚轮和所述第二滚轮相对设置。
可选地,所述下定位机构还包括举升结构,所述举升结构活动连接于所述第一滑块,所述举升结构用于举升所述坩埚,以便将所述坩埚移出所述切割设备。
可选地,所述切割装置包括电机、切边砂轮和倒边砂轮,所述电机分别驱动所述切边砂轮和所述倒边砂轮。
可选地,所述夹持装置为卡盘结构。
本公开包括以下优点:
在本公开中,定位装置可以对坩埚进行定位操作,使得坩埚的中心线与所述夹持装置的中心线重合,以便于夹持装置可以夹持定位操作后的坩埚,切割装置与夹持装置相对设置,便于切割装置对夹持装置夹持的坩埚进行加工操作。本公开中,定位装置可以快速将坩埚的中心线调整至与夹持装置的中心线重合的状态,定位速度较快;夹持装置可以夹持坩埚,使得坩埚不容易相对夹持装置抖动,增强坩埚在切割过程中的稳定性,可以提高切割装置 对坩埚的加工效果,即本公开中的切割设备可以兼备定位速度快和加工效果好的特点。
上述说明仅是本公开技术方案的概述,为了能够更清楚了解本公开的技术手段,而可依照说明书的内容予以实施,并且为了让本公开的上述和其它目的、特征和优点能够更明显易懂,以下特举本公开的具体实施方式。
附图简述
图1是本公开的一种切割设备某一方向上的结构示意图;
图2是本公开的一种切割设备另一方向上的结构示意图;
图3是本公开的图2中A处的放大结构示意图;
图4是本公开的图2中B处的放大结构示意图;
图5是本公开的一种坩埚脱离切割设备的结构示意图;
图6是本公开图5中C处的放大结构示意图;
图7是本公开的一种定位装置工作时的结构示意图;
图8是本公开的一种夹持装置工作时的结构示意图;
图9是本公开的一种切割装置工作时的结构示意图;并且
图10是本公开的一种切割设备完成工作后的结构示意图。
详细描述
为使本公开的上述目的、特征和优点能够更加明显易懂,下面结合附图和具体实施方式对本公开作进一步详细的说明。
本公开的核心构思之一在于提供一种切割设备,参照图1,示出了本公开的一种切割设备某一方向上的结构示意图,参照图2,示出了本公开的一种切割设备另一方向上的结构示意图,切割设备具体可以包括:夹持装置2、定位装置3和切割装置4;其中,夹持装置2可以对坩埚200进行夹持;定位装置3可以与夹持装置2配合,对坩埚200进行定位操作,以使坩埚200的中心线与夹持装置2的中心线重合;切割装置4与夹持装置2相对设置,切割装置4可以用于加工夹持装置2夹持的坩埚200。
在本公开中,定位装置3可以对坩埚200进行定位操作,使得坩埚200的中心线与所述夹持装置2的中心线重合,以便于夹持装置2可以夹持定位 操作后的坩埚200,切割装置4与夹持装置2相对设置,便于切割装置4对夹持装置2夹持的坩埚200进行加工操作。本公开中,定位装置3可以快速将坩埚200的中心线调整至与夹持装置2的中心线重合的状态,使得坩埚200定位操作的速度较快;夹持装置2可以夹持坩埚200,使得坩埚200不容易相对夹持装置2抖动,增强坩埚在切割过程中的稳定性,可以提高切割装置4对坩埚200的加工效果,即本公开中的切割设备可以兼备定位速度快和加工效果好的特点。
具体地,夹持装置2用于夹持坩埚200,以便于切割装置4对坩埚200进行加工处理,在实际应用中,切割设备还可以包括第一电机,第一电机可以与夹持装置2连接,用于驱动夹持装置2带动坩埚200转动,便于切割装置4对坩埚200的周向进行加工处理。
具体地,定位装置3用于对坩埚200进行定位操作,使得坩埚200的中心线和夹持装置2的中心线重合,以提高切割装置4对坩埚200的加工效果。在实际应用中,定位装置3可以对未处理过的坩埚200进行定位操作,也可以对处理过之后的坩埚200再次进行定位操作,以便再次开启对坩埚200的加工处理操作,本公开不作具体限定。
可选地,切割装置4可以包括电机、切边砂轮42和倒边砂轮43,电机可以分别驱动切边砂轮42和倒边砂轮43。在实际应用中,电机分别驱动切边砂轮42和倒边砂轮43对坩埚200进行加工处理,可以加快对切割装置4对坩埚200加工的速度。
如图1所示,切割装置4可以包括:十字滑台结构45、切边砂轮42和倒边砂轮43,具体地,倒边砂轮43还可以包括内倒边砂轮431以及外倒边砂轮432;切边砂轮42可以固定连接于十字滑台结构45,用于对坩埚200的埚口进行切边处理;内倒边砂轮431可以固定连接于十字滑台结构45,用于对坩埚200的埚口进行内倒棱处理;外倒边砂轮432可以固定连接于十字滑台结构45,用于对坩埚200的埚口进行外倒棱处理。
在实际应用中,切割装置4可以先对坩埚200的埚口进行切边处理,再对切边处理后的埚口进行内倒棱处理和外倒棱处理,针对内倒棱处理和外倒棱处理的顺序,本公开实施例不作具体限定。
具体地,电机可以包括:第二电机、第三电机以及第四电机,第二电机 可以用于驱动切边砂轮42对坩埚200的埚口进行切边处理,第三电机可以用于驱动内倒边砂轮431对坩埚200的埚口进行内倒棱处理,第四电机可以用于驱动外倒边砂轮432对坩埚200的埚口进行外倒棱处理。
在实际应用中,第二电机、第三电机和第四电机可以各自独立工作,也可以同时工作,本公开实施例不作具体限定。
具体地,第二电机、第三电机和第四电机可以为同一台电机,也可以为各自独立的不同电机,本公开实施例不作具体限定。
在实际应用中,切边砂轮42和倒边砂轮43还可以由其它切割工具代替,以对坩埚200的埚口进行加工处理。
可选地,夹持装置2可以为卡盘结构。在实际应用中,卡盘结构可以夹持坩埚200,避免坩埚200相对卡盘结构抖动,以提高坩埚200的加工效果。
具体地,卡盘结构可以为三爪卡盘或四爪卡盘等,本公开实施例中不作具体限定。
可选地,切割设备还包括框架1,夹持装置2、定位装置3及切割装置4均可以设置于框架1上。在实际应用中,将夹持装置2、定位装置3及切割装置4均设置在框架1上,便于对坩埚200进行定位、夹持和加工操作,可以提高对坩埚200的加工效率。
本公开的一个可选实施例中,定位装置3、切割装置4可以滑动连接于框架1,夹持装置2可以固定连接于框架1。在本公开中,夹持装置2固定连接于框架1,可以通过滑动定位装置3调整定位装置3相对夹持装置2的位置,以便于夹持装置2对坩埚200进行夹持操作,可以通过滑动切割装置4调整切割装置4相对夹持装置2的位置,以便于切割装置4对夹持装置2夹持的坩埚200进行加工操作。
可选地,框架1底部可以设有滑轨11,滑轨11上可以设有第一滑块31及第二滑块41,定位装置3可以通过第一滑块31滑动连接于滑轨11,切割装置4可以通过第二滑块41滑动连接于滑轨11。
在本公开实施例中,第一滑块31可以滑动连接于滑轨11,进而第一滑块31可以带动定位装置3滑动连接于框架1,提高了定位装置3沿框架1滑动连接的稳定性。第二滑块41可以滑动连接于滑轨11,进而第二滑块41可以带动切割装置4滑动连接于框架1,提高了切割装置4沿框架1滑动连接的稳 定性。
可选地,定位装置3可以设置于夹持装置2和切割装置4之间。在实际应用中,定位装置3可以先对坩埚200进行定位操作,然后将坩埚200运送至夹持装置2,夹持装置2夹持坩埚200后,再调整切割装置4的位置,以便于切割装置4对坩埚200进行加工处理,这样,将定位装置3设置于夹持装置2和切割装置4之间,可以便于对坩埚200进行定位、夹持和加工处理,进而提升坩埚200的加工效果。
具体地,坩埚200的埚口可以背离夹持装置2,并朝向切割装置4设置,以便于切割装置4对坩埚200的埚口进行加工处理。
本公开的一个可选实施例中,如图1和2所示,定位装置3可以包括:上定位机构32和下定位机构33;其中,上定位机构32可以连接于框架1的横梁;下定位机构33可以通过第一滑块31滑动连接于滑轨11;下定位机构33可以与上定位机构32相对设置。
在本公开实施例中,上定位机构32滑动连接于框架1的横梁,下定位机构33通过第一滑块31滑动连接于滑轨11,使得上定位机构32和下定位机构33之间的相对位置可以调整,以便于将坩埚200放入定位装置3,并使用上定位机构32和下定位机构33对坩埚200进行定位操作。
具体地,下定位机构33通过第一滑块31滑动连接于滑轨11,使得下定位机构33可以在框架1上的第一位置和第二位置之间切换;在下定位机构33位于第一位置的情况下,下定位机构33可以与上定位机构32相对设置,上定位机构32和下定位机构33可以用于对坩埚200进行定位操作,在下定位机构33位于第二位置的情况下,下定位机构33可以靠近夹持装置2设置,以便夹持装置2夹持定位操作后的坩埚200。
在实际应用中,下定位机构33位于第一位置的情况下,上定位机构32和下定位机构33可以分别接触坩埚200的侧壁,便于将坩埚200的中心线调整至与夹持装置2的中心线重合,可以加快坩埚200定位操作的速度。下定位机构33位于第二位置的情况下,下定位机构33可以带动坩埚200一起滑动至靠近夹持装置2的位置,便于夹持装置2夹持定位操作后的坩埚200。通过下定位机构33带动坩埚200在第一位置和第二位置之间切换,便于对坩埚200分别进行定位和夹持操作。
本公开的另一个可选实施例中,上定位机构32可以包括:第一升降结构321和两个第一滚轮322,两个第一滚轮322设于第一升降结构321,下定位机构33可以包括:第二升降结构331,两个第二滚轮332设于第二升降结331;第一滚轮322和第二滚轮332相对设置。
在本公开实施例中,第一滚轮322和第二滚轮332相对设置,可以用于对坩埚200进行定位操作,而第一升降结构321可以带动第一滚轮322上升或下降,第二升降结构331可以带动第二滚轮322进行上升或下降,进而可以调整上定位机构32和下定位机构33之间的空间,使得定位装置3可以适应于不同尺寸的坩埚200。
具体地,第一升降结构321可以滑动连接于框架1的横梁,以使第一滚轮322相对框架1的顶部上升或下降,第一滚轮322可以在第一高度和第二高度之间切换;第二升降结构331可以活动连接于第一滑块31,以使第二滚轮332相对第一滑块31上升或下降,第二滚轮332可以在第三高度和第四高度之间切换。
具体地,第一升降结构321将第一滚轮322调整至第一高度的情况下,可以避免切割装置4在滑动过程中出现与第一滚轮322碰撞的现象。
具体地,下定位机构33可以带动坩埚200滑动至靠近夹持装置2的位置,夹持装置2夹持坩埚200之后,第二升降结构331可以将第二滚轮332调整至第四高度,以避免夹持装置2带动坩埚200转动的过程中,坩埚200因长时间滚动接触于第二滚轮332而造成磨损。
在实际应用中,针对不同尺寸的坩埚200,可以通过控制***的模型运算,得到第二滚轮332需要上升的高度,在此高度下,第二滚轮332可以相对第一滑块31上升至第三高度,坩埚200的中心线可以与夹持装置2的中心线重合。
参照图3,示出了本公开的图2中A处的放大结构示意图,参照图4,示出了本公开的图2中B处的放大结构示意图,下定位机构33位于第一位置、第一滚轮322相对框架1的顶部下降至第二高度、第二滚轮332相对第一滑块31上升至第三高度的情况下,第一滚轮322和第二滚轮332用于贴合坩埚200的侧壁,可以对坩埚200进行定位操作。
具体地,两个第一滚轮322和两个第二滚轮332贴合坩埚200的侧壁, 并在滚动的情况下带动坩埚200旋转,坩埚200在旋转过程中可以自动调整重心位置,使得坩埚200的中心线可以与夹持装置2的中心线重合,提高了坩埚200定位操作的速度。
具体地,上定位机构32还可以包括第一加强件51,第一加强件51可以连接两个第一滚轮322,以提高第一滚轮322与坩埚200配合的稳定性。下定位机构33还可以包括第二加强件52,第二加强件52可以连接两个第二滚轮332,以提高第二滚轮332支撑坩埚200的稳定性。
在实际应用中,第一升降结构321还可以包括:多个第一连接杆,多个第一连接杆的一端分别固定连接于第一滚轮322,另一端分别活动连接于框架1的顶部,以使第一滚轮322相对框架1的顶部上升或下降;第二升降结构331可以包括多个第二连接杆,多个第二连接杆的一端分别连接于第二滚轮332,另一端分别活动连接于第一滑块31,以使第二滚轮332相对第一滑块31上升或下降。具体地,通过多个第一连接杆活动连接于框架1的顶部,实现第一滚轮322相对框架1的顶部上升或下降,提高了第一滚轮322相对框架1顶部上升或下降的稳定性;通过多个第二连接杆活动连接于第一滑块31,实现第二滚轮332相对第一滑块31上升或下降,提高了第二滚轮332相对第一滑块31上升或下降的稳定性。
本公开实施例中,第一升降结构321还可以包括:第一动力源,第一动力源可以与多个第一连接杆连接,用于驱动多个第一连接杆带动第一滚轮322相对框架1的顶部上升或下降。具体地,第一动力源可以为气缸或伺服***,以实现多个第一连接杆的上下运动,本公开实施例不作具体限定。动力源为气缸时,可以通过气压调节阀调节气缸的压力,进而设定压力值;动力源为伺服时,可以通过调节伺服转动力矩控制压力。在实际应用中,可以通过控制压力值调节第一连接杆相对框架1的顶部上升或下降。
具体地,第二升降结构331还可以包括第二动力源,第二动力源与多个第二连接杆连接,用于驱动多个第二连接杆带动第二滚轮332相对第一滑块31上升或下降。第二动力源可以为电机或气缸等,本公开实施例不作具体限定。
参照图5,示出了本公开的一种坩埚脱离切割设备的结构示意图,参照图6,示出了本公开图5中C处的放大结构示意图,如图6所示,下定位机构 33还可以包括举升结构333,举升结构333可以活动连接于第一滑块31;举升结构333可以用于举升坩埚200,以便将坩埚200移出切割设备。
在本公开实施例中,举升结构333活动连接于第一滑块31,举升结构333可以将坩埚200举升至平台,进而便于将处理好的坩埚200移出切割设备。而且,在对坩埚200进行定位、夹持和加工操作的情况下,举升结构333可以靠近第一滑块31设置,以避免举升结构333对坩埚200的处理操作造成影响。
示例地,举升结构333可以在第五高度和第六高度之间切换,举升结构333位于第五高度的情况下,举升结构333靠近第一滑块31设置,以免接触坩埚200,举升结构333位于第六高度的情况下,举升结构333可以远离第一滑块31设置,以将坩埚200举升至平台。
在实际应用中,举升结构333可以包括多个第三连接杆3331和第三滚轮3332,多个第三连接杆3331的一端可以分别固定连接于第三滚轮3332,另一端可以分别活动连接于第一滑块31;举升结构333位于第五高度的情况下,滚轮靠近第一滑块31设置,以免接触坩埚200,举升结构333位于第六高度的情况下,滚轮远离第一滑块31设置,用于举升坩埚200,以便将坩埚200移出切割设备。具体地,第三连接杆3331活动连接于第一滑块31,使得第三滚轮3332可以在第五高度和第六高度之间切换。这样,第三连接杆3331带动第三滚轮3332调整至第五高度的情况下,可以避免第三滚轮3332对坩埚200的处理过程造成影响,第三连接杆3331带动第三滚轮3332调整至第六高度的情况下,第三滚轮3332可以用于支撑坩埚200,并带动坩埚200举升至平台,便于将坩埚200移出切割设备。
参照图7,示出了图7是本公开的一种定位装置工作时的结构示意图,图8是本公开的一种夹持装置工作时的结构示意图,图9是本公开的一种切割装置工作时的结构示意图,图10是本公开的一种切割设备完成工作后的结构示意图,具体地,本公开实施例中的切割设备可以对坩埚200进行以下处理步骤:
第一步骤包括:先将坩埚200放入切割设备,使用下定位机构33的第二滚轮332支撑坩埚200,下定位机构33根据读取的坩埚200尺寸,得到第二滚轮332需要上升的高度,然后通过第二升降结构331调整第二滚轮332相 对第一滑块31上升至第三高度,并锁定第二滚轮332的高度。
第二步骤包括:通过第一升降结构321调整第一滚轮322相对框架1的顶部下降至第二高度,并锁定第一滚轮322的高度。如图7所示,下定位机构33位于第一位置,第一滚轮322和第二滚轮332带动坩埚200旋转,坩埚200通过旋转自动调整重心位置,使得坩埚200的中心线与夹持装置2的中心线重合,进而完成对坩埚200的定位操作。
第三步骤包括:如图8所示,第一升降结构321调整第一滚轮322相对框架1的顶部上升至第一高度。第一滑块31沿滑轨11滑动,使得下定位机构33带动坩埚200滑动至第二位置,以便于夹持装置2夹持定位操作后的坩埚200。
第四步骤包括:如图9所示,第二升降结构331调整第二滚轮332相对第一滑块31下降至第四高度。第二滑块41沿滑轨11滑动,使得切割装置4靠近夹持装置2,第一电机驱动夹持装置2带动坩埚200旋转,以便于切割装置4切割夹持装置2夹持的坩埚200。
第五步骤包括:如图10所示,完成坩埚200的切割装置4后,第二滑块41沿滑轨11滑动,使得切割装置4滑动至框架1的另一端。第二升降结构331调整第二滚轮332相对第一滑块31上升至第三高度,将坩埚200从夹持装置2上拆卸,使得第二滚轮332可以支撑坩埚200。第一滑块31沿滑轨11滑动,使得下定位机构33可以带动坩埚200滑动至第一位置。
第六步骤包括:如图5所示,举升结构333举升第三滚轮3332,使得第三滚轮3332带动坩埚200上升至第六高度,将坩埚200移出切割设置。
在实际应用中,切割设备可以对坩埚200依次执行上述步骤一至六,或者也可以执行上述步骤一至六中的部分步骤,具体可根据实际情况调整,本公开实施例不作具体限定。
本公开实施例提供的切割设备至少包括以下优点:
在本公开中,定位装置可以对坩埚进行定位操作,使得坩埚的中心线与所述夹持装置的中心线重合,以便于夹持装置可以夹持定位操作后的坩埚,切割装置与夹持装置相对设置,便于切割装置对夹持装置夹持的坩埚进行加工操作。本公开中,定位装置可以快速将坩埚的中心线调整至与夹持装置的中心线重合的状态,定位速度较快;夹持装置可以夹持坩埚,使得坩埚不容 易相对夹持装置抖动,增强坩埚在切割过程中的稳定性,可以提高切割装置对坩埚的加工效果,即本公开中的切割设备可以兼备定位速度快和加工效果好的特点。
最后,还需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者终端设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者终端设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括要素的过程、方法、物品或者终端设备中还存在另外的相同要素。
以上对本公开所提供的一种切割设备,进行了详细介绍,本文中应用了具体个例对本公开的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本公开的方法及其核心思想;同时,对于本领域的一般技术人员,依据本公开的思想,在具体实施方式及应用范围上均会有改变之处,综上,本说明书内容不应理解为对本公开的限制。

Claims (10)

  1. 一种切割设备,用于加工坩埚,其特征在于,所述切割设备包括夹持装置、定位装置和切割装置,其中,
    所述夹持装置对所述坩埚进行夹持;
    所述定位装置与所述夹持装置配合,对所述坩埚进行定位操作,使所述坩埚的中心线与夹持装置的中心线重合;
    所述切割装置与所述夹持装置相对设置,所述切割装置用于加工所述夹持装置夹持的所述坩埚。
  2. 根据权利要求1所述的切割设备,其特征在于,所述切割设备还包括框架,所述夹持装置、所述定位装置及所述切割装置均设置在所述框架上。
  3. 根据权利要求2所述的切割设备,其特征在于,所述定位装置、所述切割装置滑动连接于所述框架,所述夹持装置固定连接于所述框架。
  4. 根据权利要求2所述的切割设备,其特征在于,所述框架底部设有滑轨,所述滑轨上设有第一滑块及第二滑块,所述定位装置通过所述第一滑块滑动连接于所述滑轨,所述切割装置通过所述第二滑块滑动连接于所述滑轨。
  5. 根据权利要求2所述的切割设备,其特征在于,所述定位装置设置于所述夹持装置和所述切割装置之间。
  6. 根据权利要求4所述的切割设备,其特征在于,所述定位装置包括:上定位机构和下定位机构;其中,
    所述上定位机构滑动连接于所述框架的横梁;
    所述下定位机构通过所述第一滑块滑动连接于所述滑轨;
    所述下定位机构与所述上定位机构相对设置。
  7. 根据权利要求6所述的切割设备,其特征在于,所述上定位机构包括:第一升降结构和两个第一滚轮,所述两个第一滚轮设于所述第一升降结构;所述下定位机构包括:第二升降结构和两个第二滚轮,所述两个第二滚轮设于所述第二升降结构;所述第一滚轮和所述第二滚轮相对设置。
  8. 根据权利要求6所述的切割设备,其特征在于,所述下定位机构还包括举升结构,所述举升结构活动连接于所述第一滑块,所述举升结构用于举升所述坩埚,以便将所述坩埚移出所述切割设备。
  9. 根据权利要求1所述的切割设备,其特征在于,所述切割装置包括电 机、切边砂轮和倒边砂轮,所述电机分别驱动所述切边砂轮和所述倒边砂轮。
  10. 根据权利要求1所述的切割设备,其特征在于,所述夹持装置为卡盘结构。
PCT/CN2021/116062 2020-12-30 2021-09-01 一种切割设备 WO2022142433A1 (zh)

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