WO2022130736A1 - 光学ラインセンサ - Google Patents
光学ラインセンサ Download PDFInfo
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- WO2022130736A1 WO2022130736A1 PCT/JP2021/036486 JP2021036486W WO2022130736A1 WO 2022130736 A1 WO2022130736 A1 WO 2022130736A1 JP 2021036486 W JP2021036486 W JP 2021036486W WO 2022130736 A1 WO2022130736 A1 WO 2022130736A1
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- WIPO (PCT)
- Prior art keywords
- light receiving
- lens
- line sensor
- lenses
- light
- Prior art date
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Images
Classifications
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Definitions
- the present invention mainly relates to an optical line sensor that detects scratches / defects on the surface of a thin inspection object such as printed matter or film and scratches / defects inside a transparent film.
- a close-contact optical sensor (hereinafter referred to as CIS) that has been used in inspection machines that determine the authenticity of bills, commercial copiers, and flatbed scanners such as home printer scanners is used to check the printability of printed matter.
- CIS close-contact optical sensor
- Surface inspection in the manufacturing process of thin and wide film products, inspection of labels attached to various beverage containers, food containers, cans, etc. have been studied for application to so-called surface inspection machines. Some of them have been commercialized.
- CIS that still applies the SELFOC lens
- the working distance (hereinafter referred to as WD) is short, and in order to avoid contact in the scene used in the process, W. D. Long CIS is desired.
- WD working distance
- W. D. Long CIS is desired.
- the depth of field is relatively shallow, it can be used, but in the manufacturing process of the inspection object, the variation in the optical axis direction of the inspection object is large. For some reason, CIS with a deep depth of field is also strongly desired.
- CIS with a deep depth of field is typically a telecentric optical system using a mirror optical system as shown in Patent Documents 1 to 5.
- Patent Documents 1 to 5 From the patent literature, it can be seen that the optical system is very complicated. It is very difficult to manufacture the optical system and operate it as a commercial product. That is, at the time of manufacturing, the process becomes complicated, and manufacturing stability and cost increase become problems. In addition, even after commercialization, the optical axis is out of order due to the complicated optical system due to changes in the environment and changes over time, and performance is more likely to deteriorate compared to the conventional CIS with a simple structure. The problem remains.
- Patent Document 6 a telecentric refractory optical system is arranged at a distance from a staggered line sensor, and a lens which is the refractory optical system is arranged at a distance to form an array.
- Patent Document 7 a method of preventing crosstalk between lenses by providing a partition plate between the separated lenses is studied.
- Patent Documents 6 and 7 it is possible to improve the depth of field and prevent crosstalk between lenses, but the ordinary telecentric refraction optical system is large and it is difficult to make it compact. .. Further, in the partition plate shown in Patent Document 7, missing pixels occur at the time of reading, and the reading becomes incomplete. Furthermore, no solution for shading that one lens has in principle, which is caused by the separation of lenses, has not been shown. No mention is made of a method of suppressing so-called ripple in the reading line direction. Moreover, the above-mentioned refractive optics system has not been realized so far.
- inspection machines that use camera lenses such as line cameras, which are different from the above method, are large in size, and a large number of inspection machines are required to accommodate a wide range of inspection objects at the manufacturing site. Therefore, the entire device becomes very large and the cost is enormous, so that it is difficult to deploy it in each process of the factory.
- Patent Documents 1 to 5 a complicated telecentric optical system of a mirror system is used. Since the optical system is complicated, there are various problems such as manufacturing stability, cost increase, easy deviation of the optical axis with respect to the surrounding environment, increase in the amount of change with time, and durability. Further, in Patent Documents 6 and 7, a refraction system separating lens array is used, but the telecentric refraction optical system is large and it is difficult to make it compact. Further, the shading caused by each lens is suppressed, and the measures for suppressing the occurrence of the intensity (ripple) of the light intensity distribution in the reading line direction are incomplete, and dissatisfaction remains in securing the dynamic range of the line sensor.
- the present invention eliminates a complicated optical system, secures a long working distance (WD) and high resolution performance by a simple optical system, and has a durable optical line sensor with a small amount of change over time.
- the purpose is to realize. It is also an object of the present invention to realize an illumination optical system that can more effectively secure the dynamic range of the line sensor even when the refractive optics system is used.
- the optical line sensor according to the present invention is an optical line sensor that reads an inspection object conveyed in the sub-scanning direction with a reading line extending in the main scanning direction, and includes a plurality of light receiving lenses and a plurality of light receiving elements.
- a plurality of the plurality of light receiving lenses are arranged along the main scanning direction.
- the plurality of light receiving elements are arranged in a line along the main scanning direction, and receive light transmitted through the plurality of light receiving lenses.
- the plurality of light receiving lenses are arranged apart from each other by a diameter equal to or larger than the diameter of the light receiving lens. Further, the plurality of light receiving elements form at least one row or more of the reading lines.
- the optical axis of the other light receiving lens does not intersect with the optical axis of the light receiving lens.
- the fields of view are arranged so as to be separated by the field of view in the arrangement direction of the light receiving lenses so that the fields do not overlap, or if the output of the superimposed points in the image composition is corrected, the depth of field peculiar to one light receiving lens can be obtained. Can be secured. Therefore, it is possible to realize an optical line sensor with a deep depth of field.
- the effective diameter of the light receiving lenses can be appropriately increased.
- the amount of received light can be secured, and the depth of field, which was not possible in the past, can be secured.
- the light receiving lens system is a reduced optical system
- the depth of field can be obtained by similarly separating the reduced optical system to the field size of the light receiving lens and reducing the pixel size of the light receiving element according to the magnification.
- FIG. 1 It is sectional drawing of a typical CIS. It is an exploded perspective view of the line-shaped illumination optical system for CIS. It is a schematic diagram of a light receiving system in which the fields of view of each light receiving lens do not almost overlap when each light receiving lens is arranged so as to act as a monocular lens. It is a side view which showed a part of the light receiving system of FIG. It is a schematic diagram which showed an example of the light receiving system in which a plurality of light receiving element arrays are arranged. It is a schematic diagram which showed the other example of the light receiving system in which a plurality of light receiving element arrays are arranged. It is a schematic diagram which showed still another example of the light receiving system in which a plurality of light receiving element arrays are arranged.
- A. It is a graph showing the relationship between and the diffraction limit. It is a graph which showed the relationship between the effective diameter of the SELFOC lens A and the diameter of a circle of confusion. It is a graph which showed the relationship between the effective diameter of the SELFOC lens B and the diameter of a circle of confusion. It is a graph which showed the relationship between the effective diameter of the SELFOC lens C and the diameter of a circle of confusion.
- RGB-LED or RGB-LD laser diode; semiconductor laser
- FIG. 14A is a diagram showing a lens holder for explaining a crosstalk prevention method in the one-row separated lens array system, and shows a schematic diagram when the field of view is restricted by a cylindrical aperture. It is a detailed view of the tubular visual field limitation aperture shown in FIG. 16A.
- FIG. 1 shows a typical CIS
- FIG. 2 also shows a line-shaped illumination optical system for CIS.
- FIG. 1 shows a cross-sectional view in the vicinity of the central portion in the longitudinal direction of the CIS.
- FIG. 2 is an exploded perspective view.
- the X direction is the main scanning direction
- the Y direction is the sub-scanning direction.
- the Z direction is orthogonal to the X direction and the Y direction.
- the line-shaped light source unit 10 is an illumination optical system having an elongated light amount distribution in the main scanning direction.
- a line-shaped light source unit 10 for illuminating the inspection object on the focal plane 20 is provided in each housing 16.
- a light receiving lens 11 and a light receiving unit 12 are provided in one of the housings 16, and the light from the illuminated inspection object is guided to the light receiving unit 12 by the light receiving lens 11.
- the light receiving lens 11 is an optical element that forms an image of light from an inspection object on the light receiving unit 12.
- one of the two light source units 10 is arranged on the light receiving unit 12 side and the other is arranged on the side opposite to the light receiving unit 12 side with respect to the focal plane 20.
- the light receiving unit 12 is mounted on a substrate 13 fixed to one of the housings 16.
- the light that has passed through the light receiving lens 11 is received by the light receiving surface 12A of the light receiving unit 12, and a signal corresponding to the light receiving amount is output from the light receiving unit 12.
- the object to be inspected is conveyed in one direction Y along the focal plane 20
- the light from the object to be inspected is continuously received by the light receiving unit 12, and the object to be inspected is continuously received by the light receiving unit 12 based on the output signal from the light receiving unit 12.
- Images color images, fluorescent images, etc.
- the light B3 emitted from one light source unit 10 passes through the protective glass 14 fixed to the housing 16 and is a reflective member 17A provided on the inner surface of the protective glass 14A fixed to the other housing 16. Is reflected and guided to the focal plane 20.
- An ultraviolet light blocking filter (UV cut filter) 15 for blocking ultraviolet light from being incident on the light receiving unit 12 is provided at an arbitrary position from the focal plane 20 to the light receiving unit 12. Further, a color filter 18 for passing visible light in a specific wavelength range is provided between the light receiving unit 12 and the ultraviolet light blocking filter 15.
- a substrate 5 for fixing a light source 103 (ultraviolet light source, visible light source, etc.) provided in the light source unit 10 is installed at a position in one housing 16 facing the bottom surface of the light source unit 10.
- the light source unit 10 includes a transparent light guide 101 extending along the longitudinal direction L, a light source 103 provided near one end surface of the longitudinal direction L, and a light guide 101. It is provided with a cover member 102 for holding each side surface of the above.
- the light emitted from the light source 103 is incident on the light guide body 101, is appropriately reflected by the light diffusion pattern P while propagating in the light guide body 101, and is emitted from the light emitting surface in the direction of the arrow to form a line-shaped illumination light. And illuminate the object to be inspected.
- the depth of field of such CIS is shallow and the inspection object is thick, it is difficult to inspect the entire thickness direction, and W. D. Because it is narrow, it often comes into contact with the inspection target and the inspection itself cannot be completed.
- a SELFOC (manufactured by Nippon Sheet Glass Co., Ltd.) lens array is used as the light receiving lens 11.
- the SELFOC lens array is an upright lens array with the same magnification.
- columnar SELFOC lenses are stacked to form a multi-lens.
- the advantage of a multi-lens is that it is possible to make the so-called lens brighter than the lens alone. That is, the F number when a plurality of single lenses are arranged to form a multi-lens is smaller than the F number of a single lens.
- NA numerical aperture
- CIS as described above are disadvantageous from the viewpoint of depth of field and depth of focus.
- the larger the numerical aperture the shallower the depth of field.
- the magnification is large, that is, N.I. A.
- the depth of field becomes shallower as the value increases.
- the length of the depth of field is clearly shown in the distant view and the near view, and the aperture is adjusted to secure the depth of field. That is, N. A. To obtain the desired depth of field.
- an erect polycular lens represented by a SELFOC lens has a structure in which the optical axis of each lens intersects differently, so that the image is easily blurred when the inspection object changes in the optical axis direction as compared with a monocular lens. It has become.
- the above is a major drawback of the bale-type multi-lens SELFOC lens array. Therefore, an example obtained as a result of examining how it is possible to increase the depth of field of a compact optical line sensor is described below.
- FIG. 3 is a schematic diagram of a light receiving system in which the visual fields 111 of each light receiving lens 11 do not substantially overlap. That is, in FIG. 3, the light receiving lenses 11 are arranged apart from each other in the main scanning direction (X direction) so that the fields of view 111 of the light receiving lenses 11 do not substantially overlap.
- a plurality of light receiving lenses 11 arranged along the main scanning direction (X direction) are arranged apart from each other by the diameter or more. This is shown in FIG. In FIG. 4, a part of the light receiving system of FIG. 3 is shown in a side view, but a plan view of a part of the light receiving system is also shown for visual clarity.
- the plurality of light receiving lenses 11 are integrally held by the lens holder 110.
- a light receiving element configured by arranging a plurality of light receiving elements (not shown) in a line along the main scanning direction (X direction) at positions facing the plurality of light receiving lenses 11 in the Z direction.
- the array 120 is arranged.
- one light receiving element array 120 is configured by arranging a plurality of light receiving elements in a row of arrays. As a result, the plurality of light receiving elements form a row of reading lines L. Each light receiving element receives light transmitted through each light receiving lens 11.
- the plurality of light receiving lenses 11 are arranged apart from each other within the visual field dimension (within the visual field range) of the light receiving lens 11.
- a plurality of light receiving lenses 11 are arranged at substantially the same size as their respective field dimensions and are spaced apart from each other, but the field radii of each light receiving lens 11 may be superimposed.
- the pixel output from the light receiving element may be subtracted from the light receiving element in the portion where the visual fields 111 of the plurality of light receiving lenses 11 overlap.
- the image of one light receiving lens 11 (the amount of light received through one light receiving lens 11) is excluded from the data output from the light receiving element, or the pixels from the light receiving element are combined when the image is synthesized.
- the output value may be about half.
- the light receiving element arrays 120 may be arranged apart from each other in the sub-scanning direction (Y direction).
- a plurality of light receiving elements are arranged in an array of a plurality of rows (for example, two rows) to form a plurality of light receiving element arrays 120, forming a reading line L having a plurality of rows.
- the plurality of light receiving element arrays 120 may be a plurality of line system or a system in which short light receiving element rows are arranged in a staggered manner.
- FIG. 5 is a schematic diagram showing an example of a light receiving system in which a plurality of light receiving element arrays 120 are arranged.
- the main scanning direction (X direction) at least a part of the plurality of light receiving lenses 11 is arranged so as to be separated from each other by the visual field dimension of the light receiving lens 11 or more, and at least 2 by the plurality of line method.
- a read line L of rows (two rows in this example) is formed.
- the separation distance of the light receiving element array 120 in the sub-scanning direction (Y direction) is preferably larger than the field size of the light receiving lens 11 as shown in FIG.
- the field of view 111 may overlap.
- the positions where the visual fields 111 overlap each other may be corrected in advance using a correction chart or the like for correcting the pixel output from the light receiving element.
- the field of view 111 may be superimposed, and the optical line sensor can be made compact.
- FIG. 6A is a schematic diagram showing another example of the light receiving system in which a plurality of light receiving element arrays 120 are arranged.
- the light receiving element arrays 120 made of short sensors are arranged in a staggered manner with the field of view 111 or more of the light receiving lens 11 separated from each other in the sub-scanning direction (Y direction).
- Y direction sub-scanning direction
- a plurality of light receiving lenses 11 may be arranged as many as the number corresponding to the plurality of light receiving element arrays 120. ..
- the optical axis of each light receiving lens 11 may penetrate substantially the central portion of each light receiving element array 120 corresponding to one to one in the main scanning direction (X direction).
- a plurality of light receiving element arrays 120 are arranged in a plurality of rows in the sub-scanning direction (Y direction). That is, a plurality of rows of light receiving element arrays 120 are arranged at right angles to the arrangement direction (X direction) of the light receiving elements (Y direction).
- FIG. 6B is a schematic diagram showing still another example of the light receiving system in which a plurality of light receiving element arrays 120 are arranged.
- each light receiving element array 120 composed of a long sensor (length corresponding to the total length in the main scanning direction) is separated from the field of view 111 or more of the light receiving lens 11 in the sub-scanning direction (Y direction) by a line having the same length. It is placed as a sensor.
- a plurality of light receiving element arrays 120 may be arranged as many as the number of light receiving elements.
- each of the plurality of light receiving element arrays 120 is arranged so as to be separated from each other by the field size of the light receiving lens 11 or more in the sub-scanning direction (Y direction) orthogonal to the reading line L. ..
- each of the plurality of light receiving element arrays 120 is separated from each other by the diameter of the light receiving lens 11 or more in the sub-scanning direction (Y direction) orthogonal to the reading line L, and the light receiving lens is said. They may be arranged apart from each other below the field size of 11.
- the short light receiving element arrays 120 may be used in a staggered arrangement (see FIG.
- the two rows of light receiving element arrays 120 may be arranged apart from each other (see FIG. 6B). ), And more than this, a plurality of light receiving element arrays 120 may be arranged apart from each other in the sub-scanning direction (Y direction).
- FIG. 6C shows a case where the light receiving lenses 11 in one row are arranged in parallel to the light receiving element array 120 at substantially the center of the sub-scanning direction (Y direction) of the two rows of light receiving element arrays 120 arranged in a staggered manner. show.
- a common light receiving lens 11 is arranged in the sub-scanning direction (Y direction).
- a plurality of light receiving element arrays 120 arranged in each of the two rows of reading lines L are shorter than each reading line L and are separated from each other in the main scanning direction (X direction).
- the light receiving element array 120 arranged on one reading line L and the light receiving element array 120 arranged on the other reading line L are alternately arranged in a staggered pattern along the main scanning direction (X direction).
- a plurality of light receiving lenses 11 are arranged in one row in parallel with the plurality of light receiving element arrays 120 between the two rows of reading lines L, and the optical axis of each light receiving lens 11 is a sub-scanning of the two rows of reading lines L. It penetrates the substantially central part in the direction (Y direction). In this case, even if the light receiving lenses 11 are in one row, the light transmitted through each light receiving lens 11 can be received by the light receiving element array 120 in two rows.
- the conventional CIS is N.I. A. Because of the large size, it was possible to ignore the fact that the image was blurred due to the diffraction limit.
- W. D. In order to take a long time, it is necessary to extend the focal length of the light receiving lens, that is, N.I. A. With the conventional lens diameter, the influence of diffraction increases as the focal length increases. In this embodiment, by increasing the lens diameter, W. D. We propose a method that does not deteriorate the optical resolution even when the image is blurred due to the diffraction limit.
- FIG. 8A shows the relationship between the effective diameter of the SELFOC lens A and the diameter of the circle of confusion.
- FIGS. 8A to 8C shows the relationship between the effective diameter of the SELFOC lens C and the diameter of the circle of confusion, respectively.
- the solid line shows the total circle of confusion
- the broken line shows the circle of confusion due to diffraction
- the alternate long and short dash line shows the circle of geometrical optics.
- the relationship between the minimum circle of confusion and the diffraction limit, that is, the optical resolution at a certain lens diameter and focal length can be understood. Therefore, in the case of the light receiving lens 11 shown in FIG. 8A, it can be seen that the larger the effective diameter ⁇ , the smaller the confusion circle diameter, and the effective diameter ⁇ should be 1.0 mm ⁇ ⁇ ⁇ 3.0 mm.
- the light receiving lens 11 shown in FIG. 8A is a SELFOC lens having a smaller aberration and a larger effective diameter than the light receiving lens 11 shown in FIG. 8B, and it can be seen that the light receiving lens 11 of FIG. 8A should be selected. Further, the light receiving lens 11 of FIG. 8A having the same focal length has N.I. A.
- the amount of received light is increased by at least 3 times, that is, the amount of received light is increased by 9 times or more, and therefore the output of the light receiving element is also increased by 9 times or more.
- shot noise depending on the amount of light received by the light receiving element is also reduced to 1/3, so the light receiving lens 11 shown in FIG. 8A is preferable from the viewpoint of noise suppression.
- the light receiving lens 11 of FIG. 8A can improve the scanning speed by 9 times as compared with the light receiving lens 11 of FIG. 8B.
- the SELFOC lens C also has less aberration like the SELFOC lens A, and can have a large effective diameter.
- the parameters of the SELFOC lenses A to C shown in FIGS. 8A to 8C are shown in Table 1 below.
- the most important parameter shown in Table 1 is the refractive index distribution constant.
- the light receiving lens 11 having the smallest aberration when the effective diameter is expanded and the focal length is extended is the SELFOC lens A having the smallest refractive index distribution constant, and the light receiving lens 11 having the next smallest aberration is the SELFOC lens C.
- a light receiving lens 11 having a large effective diameter, brightness, and low aberration is preferable.
- FIG. 9A shows the relationship between the effective diameter of the rod lens A and the diameter of the circle of confusion
- FIG. 9B shows the effectiveness of the rod lens B
- FIG. 9C shows the relationship between the diameter and the diameter of the circle of confusion
- FIG. 9C shows the relationship between the effective diameter of the rod lens C and the diameter of the circle of confusion
- FIG. 9D shows the relationship between the effective diameter of the rod lens D and the diameter of the circle of confusion.
- the solid line shows the total circle of confusion
- the broken line shows the circle of confusion due to diffraction
- the alternate long and short dash line shows the circle of geometrical optics.
- the parameters of the rod lenses A to D shown in FIGS. 9A to 9D are shown in Table 2 below. It can be seen that the plastic rod lens has the same tendency as the SELFOC lens. Considering the refractive index of the plastic rod lens and the refractive index of the glass lens, the refractive index on the axis is preferably about 1.45 to 1.65.
- the refractive index distribution constant is the dominant factor for aberrations.
- the more gradual the refractive index changes the less aberration there is.
- a sharp change in angle means an increase in the higher-order nonlinear effect when the Snell'Law is polynomial expanded. That is, the aberration becomes large because the deviation from the paraxial optics becomes large.
- the inventor of the present application may use the focal length or W. D.
- the refractive index distribution constant it was found that it is preferable to set the refractive index distribution constant to 0.12 or less in order to achieve a pixel resolution with a resolution of 400 dpi or more when the effective diameter ⁇ is about 50 mm or more and the effective diameter ⁇ is about ⁇ ⁇ 1.0 mm.
- FIG. 10 is a schematic diagram in the case where the light receiving lens 11 is replaced with an upright 1x magnification polycular lens and used as an upright reduction polycular lens.
- FIG. 10 when the light receiving lens 11 is separated by the visual field dimension of the light receiving lens 11 or more, and each light receiving element array 120 is arranged so as to be separated by the visual field dimension or more of the light receiving lens 11 in the direction orthogonal to the reading line L.
- a schematic diagram is shown.
- a part of the light receiving system is shown in a plan view, but for the sake of visual clarity, a side view of a part of the light receiving system is also shown.
- the depth of field can be deepened in each step as compared with the above-mentioned upright 1x lens. For example, if the horizontal magnification is 4 times, the depth of field is doubled. When the horizontal magnification is 9 times, the depth of field is 3 times.
- the pixel size of the light receiving element is also made smaller than the pixel size in the 1x system according to the reduction magnification and the desired resolution. However, depending on the resolution, the same pixel size as that of the 1x system may be used.
- FIG. 11 shows the relationship between the effective diameter of the reduction lens and the diameter of the circle of confusion.
- the reduction magnification of the reduction lens is 1: 4.
- the reduction system is less than half, 14 ⁇ m to 18 ⁇ m. Therefore, it can be seen that the depth of field and the resolution can be improved.
- the light receiving lens 11 in the present invention is not limited to a refractive index distribution type lens such as a SELFOC lens or a plastic rod lens, but is used in other lenses such as achromat (achromatic) and apochromat in consideration of cost.
- the aberration due to the non-linear effect in the refractive index distribution type lens is equalized, that is, the spherical aberration, coma aberration, and non-point aberration are equalized, or the telecentric refraction optical system is due to the non-linear effect in the above-mentioned refractive index distribution type lens.
- a refractive index distribution type lens such as a SELFOC lens or a plastic rod lens having the same aberration and diffraction limit
- it can be used with the same arrangement and dimensions (diameter). This also applies to the light receiving lens 11 that forms an inverted image, which will be described later.
- the above-mentioned optical system is centered on an upright lens, but may be an inverted optical system when the fields of view 111 do not overlap. That is, the plurality of light receiving lenses 11 may be configured to form an inverted image. If it is a two-row lens array, an inverted optical system can be adopted. In the case of an inverted optical system, since the image is inverted symmetric with respect to the optical axis, the inverted image may be converted into an upright image by image processing at the time of image composition. That is, the inverted images of the plurality of light receiving lenses 11 may be inverted and converted into an upright image, and then the image composition process may be performed.
- the necessity or unnecessary of the overlapping portion may be determined and corrected from the correction algorithm, and the determined relationship between the pixels may be converted into an erect image.
- the detected portion on the inspection surface may be superimposed.
- the position is corrected in advance by the correction chart.
- the data obtained from one of the two rows of light receiving element arrays arranged in a staggered manner so as to be separated in the sub-scanning direction is acquired for a long time.
- the data obtained from the other light receiving element array may be acquired for a short time, the acquired image may be inverted to an upright image, and then the image may be combined.
- the overlapping portions may be multiplied or subtracted by the correction coefficient when the images are combined.
- a plurality of light receiving element arrays may be a light receiving element array shorter than each reading line arranged in a plurality of reading lines in two rows. Further, the light receiving element array arranged on one reading line and the light receiving element array arranged on the other reading line may be alternately arranged in a staggered pattern along the main scanning direction. Since such a configuration is the same as that of the upright refraction optical system described with reference to FIG. 6A, detailed description thereof will be omitted.
- the plurality of light receiving elements are arranged in an array of two or more rows to form a plurality of light receiving element arrays 120. Further, each of the plurality of light receiving element arrays 120 is arranged so as to be separated from each other by the field size of the light receiving lens 11 or more in the direction orthogonal to the reading line L.
- the plurality of light receiving lenses 11 are arranged in a number corresponding to the plurality of light receiving element arrays 120, and the optical axis of each light receiving lens 11 penetrates substantially the central portion of each light receiving element array 120.
- the inspection surface illuminance needs to be 100 times or more in the 1x system. Therefore, for example, a high-brightness white LED array is used as the light source 103. That is, the plurality of light sources 103 may be configured to include white LEDs.
- the emitted beam is expanded in the main scanning direction and collimated in the sub-scanning direction to reduce unevenness in the amount of light during irradiation.
- FIG. 12A shows an example of an arrangement method when RGB-LED or RGB-LD (laser diode; semiconductor laser) is used as the light source 103.
- the plurality of light sources 103 may have a configuration including a red LED (R), a green LED (G), and a blue LED (B), or may have a configuration including a laser diode.
- the plurality of light sources 103 are mounted on the light source substrate 134, and the heat sink 135 is attached to the light source substrate 134.
- the beam emitted from each light source 103 is collimated by the ellipsoidal condensing lens 104 having different lens powers in the main scanning direction and the sub-scanning direction, and irradiates the inspection object.
- the ellipsoidal condensing lens 104 is shown, but any lens may have different lens powers in the main scanning direction and the sub-scanning direction.
- the power of the lens is the reciprocal of the focal length and is a measure of the refractive power of the lens.
- FIG. 12B is a side view showing a specific example of the arrangement method when the LD is used as the light source 103.
- the LD having the larger spread angle is arranged parallel to the main scanning direction.
- the beams emitted from the red LD131, the green LD132, and the blue LD133 constituting the light source 103 are collimated by the condenser lens 104 associated with each of them, and then narrowed down to the inspection surface by the cylindrical lens 105.
- each color of RGB is irradiated at substantially the same position in the sub-scanning direction, and it becomes possible to reduce color unevenness in the sub-scanning direction.
- the light irradiated by the light source 103 such as an LED or LD and diffusely reflected on the inspection surface is imaged on the light receiving element array by the light receiving lens system.
- the light receiving element in the 1x optical system, an element size of 62 ⁇ m equivalent to 400 dpi to an element size of 42 ⁇ m equivalent to 600 dpi is used.
- the power of the illumination light may be increased accordingly.
- the plurality of light sources 103 include the light sources 131 to 133 having a plurality of different wavelengths, and the light sources 131 to 133 are set as one unit, and a plurality of the light sources 103 of the one unit are arranged in the main scanning direction (X direction). It may be a configured configuration.
- the amount of illumination light is determined. As the element size becomes smaller, the amount of received light decreases in inverse proportion to the element area for the same storage time. This is a physical property of the semiconductor light receiving element, and in order to maintain the S / N, it is sufficient to increase the illumination light, increase the power density, and make the number of generated electrons in a unit time the same. .. As a result, shot noise can be maintained at the same level as a large-sized light-receiving element even if the size of the light-receiving element is reduced.
- the light received by the light receiving element depends not only on the illuminance of the inspection surface but also on the range seen by the light receiving element when receiving light. Needless to say, the light receiving solid angle is different, and if the angle is reduced, the light receiving amount is also reduced, and if the inspection surface is a completely diffused surface, the light receiving light amount is according to the so-called cos ⁇ law.
- the light diffusely reflected from the inspection surface is captured by the light receiving lens and focused on the light receiving element, and the output signal is output from the light receiving element. Further, the output signal from the light receiving element sequence is branched from the serial in parallel to improve the processing speed and is transmitted to the image processing device.
- FIG. 13A and 13B show the positional relationship between the light source 103 and the light receiving system.
- FIG. 13A is a schematic diagram showing an example of the positional relationship between the light source 103 and the light receiving system, in which the two rows of light receiving element arrays 120 are staggered or staggered in a short sensor with the light receiving lens 11 separated from the field of view 111.
- the long sensor (the length corresponding to the total length in the main scanning direction) represents the case where it is arranged as a line sensor having the same length.
- FIG. 13B is a schematic diagram showing another example of the positional relationship between the light source 103 and the light receiving system, and the light receiving lens 11 is arranged in the main scanning direction so that the visual fields 111 of the light receiving lens 11 do not substantially overlap. Represents.
- FIG. 14A is a schematic diagram showing the positional relationship between the light source 103 and the light receiving lens 11, and is a case where the light receiving element array 120 is in one row.
- the position of the light source 103 is determined so that the minimum value of unevenness on the inspection surface of the illumination light of the light source 103 is located substantially in the center of the light receiving element array 120.
- the light source 103 is located at any position on the inspection surface in the main scanning direction (X direction) on a virtual plane perpendicular to the main scanning direction including the substantially central portion between the light receiving lenses 11 adjacent to each other. Determined in consideration of irradiance.
- the light sources 103 are arranged side by side in parallel with the reading line L.
- each light source 103 is arranged at an arbitrary position on a virtual plane that connects an intersection with the optical axis of each light receiving lens 11 and intersects the optical axis of each light receiving lens 11.
- the light source 103 is arranged at a substantially central portion between the light receiving lenses 11 adjacent to each other.
- the light source 103 irradiates the inspection surface at an angle of about 45 degrees. Therefore, the W. D.
- the distance between the light source 103 and the inspection surface was set to 70 mm.
- LD is used, but LEDs of each wavelength may be used.
- FIG. 14B is a schematic diagram showing the positional relationship between the light source 103 and the light receiving lens 11, and is a case where the light receiving element array 120 has two rows.
- the lens parameters are the same as in FIG. 14A.
- FIG. 14B shows the arrangement of the light source 103 with respect to the light receiving lenses 11 and the light receiving element array 120 arranged in two rows.
- the light source 103 is arranged at substantially the center of the two rows of reading lines L.
- the arrangement pitch of the light receiving lens 11 since the arrangement pitch of the light receiving lens 11 may be arranged at a distance wider than the lens diameter, the arrangement pitch of the light source 103 is also adjusted to the distance between the lenses, and the arrangement pitch of the light source 103 is between the light receiving lenses 11 adjacent to each other.
- the light source 103 is arranged at a position substantially central and at the same time substantially central the two rows of reading lines L. By doing so, it is possible to further prevent the loss of pixels on the inspection surface, and at the same time, it is possible to further reduce the shading of the light receiving lens 11 and the unevenness of the amount of light of the light source 103.
- the positional relationship between the light source 103 and the inspection surface is the same as in FIG. 14A.
- the lens pitch between the light receiving lenses 11 in each row was set to 7 mm. In this case, the actual lens pitch is 3.5 mm.
- FIG. 14C is a diagram showing the relationship between the light amount distribution of the light source 103 (on the inspection surface), the light amount distribution on the light receiving element surface, and the shading of the light receiving lens 11 in the main scanning direction.
- the light amount distribution on the light receiving element array 120 becomes flat as schematically shown in FIG. 14C, and the dynamic range of the light receiving element can be effectively used.
- the object to be inspected is irradiated with illumination light having a negative intensity distribution by the illumination system in advance.
- the method of arranging the light source 103 between the adjacent light receiving lenses 11 is not a shading suppression method completely compatible with various light receiving lenses 11. That is, if there is shading peculiar to each light receiving lens 11 and the light receiving lens 11 is different, an illumination optical system corresponding to the shading must be used.
- a condenser lens 104 having a large power in the main scanning direction is arranged.
- the luminous flux transmitted through the condenser lens 104 is then guided to the inspection object by a focusing lens such as a cylindrical lens 105, and forms a light intensity corresponding to the shading of the light receiving lens 11 on the inspection object.
- the condenser lens 104 may have power in the sub-scanning direction. In short, it is sufficient that the shading of the light receiving lens 11 is completely suppressed and an effective light intensity distribution in consideration of the focal length of the light receiving lens 11 can be simultaneously realized for the inspection object. That is, an optical element in which the lens power in the main scanning direction is larger than the lens power in the sub-scanning direction is preferable.
- the condenser lens 104 for example, a cylindrical lens, a lenticular lens, a Fresnel lens, or a combination of a prism sheet and a spherical lens is preferable.
- the positional relationship of the light source 103 with respect to the main scanning direction may be arranged at an intermediate position of each light receiving lens 11 or may be arranged on the optical axis of the light receiving lens 11. Further, the light source 103 may be arranged at a position on the outer periphery of the light receiving lens 11. Further, a lens having a power distribution in the main scanning direction is more preferable.
- a condensing lens 104 that collects light fluxes from a plurality of light sources 103 is provided as one lens body, and the power of the lens body in the main scanning direction is higher than the power in the sub-scanning direction.
- the condenser lens 104 may be configured to include a first condenser lens and a second condenser lens instead of one lens body.
- the power in the main scanning direction of the first condensing lens may be larger than the power in the sub-scanning direction
- the power in the sub-scanning direction of the second condensing lens may be larger than the power in the main scanning direction.
- the power in the main scanning direction may be adjustable by the first condensing lens and the second condensing lens.
- the first condenser lens and the second condenser lens are a cylindrical lens, a lenticular lens, a Fresnel lens, or a prism array. It can be configured by such as.
- the first condenser lens may be a lenticular lens or a prism array.
- the second condenser lens may be a Fresnel lens or a cylindrical lens.
- FIG. 14D shows a graph of the light receiving system MTF for each lens diameter in the present embodiment.
- the case where the effective diameter ⁇ is ⁇ 1.0, 1.5, 2.0, 2.5, 3.0 mm is shown in the order of the solid line, the short broken line, the long broken line, and the alternate long and short dash line.
- the pixel size of the light receiving element is 42.3 ⁇ m in both the main scanning direction and the sub scanning direction according to the equivalent of 600 dpi.
- the performance is about 30% at 12 lines / mm equivalent to 600 dpi, ⁇ 1.0 mm to ⁇ 3. It satisfies the MTF characteristics in the range up to 0 mm.
- the lens is preferably made of glass or resin.
- the axial refractive index N 0 is 1.45 ⁇ N 0 ⁇ 1.65
- the refractive index distribution constant ⁇ A is 0.05 ⁇ ⁇ A ⁇ 0.12.
- the focal length f is preferably 50 mm ⁇ f ⁇ 150 mm.
- the light receiving lens 11 may be an achromat or an apochromat in which a plurality of lenses are combined. In this case, it may be a lens system in which only a convex lens is combined as a plurality of lenses, or a lens system in which a convex lens and a concave lens are combined as a plurality of lenses. Further, it is preferable that the focal length f of the plurality of lenses is 50 mm ⁇ f ⁇ 250 mm, and the aperture ⁇ of the plurality of lenses is 2 mm ⁇ ⁇ ⁇ 10 mm.
- the light receiving lens system is a reduced optical system.
- the configuration of the optical system is the same as that of FIGS. 14A and 14B, and the magnification of the light receiving lens 11 is changed. That is, the relationship between the object point of the light receiving lens 11 and the lateral magnification of the image point is changed as 9: 1 or 4: 1.
- the depth of field is increased to 3 times that of the 1x system when the horizontal magnification is 9: 1 and to 2 times that of the 1x system when the horizontal magnification is 4: 1.
- the size of the light receiving element is 1/9 of the size of the light receiving element of the same magnification system.
- the size of the light receiving element is 1/4 the size of the light receiving element of the same magnification system. In this embodiment, the depth of field is doubled by using a light receiving element having a size of 1/4.
- the graph (solid line) in FIG. 15 shows the MTF characteristics of the reduced optical system at the time of defocus in this embodiment.
- the MTF characteristics at the time of defocus of the same magnification system are shown in the graph (broken line) of FIG. From the comparison between the reduced-magnification system and the same-magnification system in the figure, it can be seen that the depth of field of the reduced-magnification optical system is about twice as deep as that of the first-magnification system. Further, the N.I. A. If the reduction ratio is S, it increases by 1 / S, which is the reciprocal of the reduction ratio. Therefore, even when the lens diameter of the light receiving lens 11 is small, if the reduction ratio is increased according to the focal length, an effective N.I. A. Is maintained, so blurring due to the diffraction effect can be made constant.
- FIG. 14A a method for preventing crosstalk when the field of view 111 is superimposed will be described.
- FIG. 16B A detailed diagram is shown in FIG. 16B.
- a plurality of light receiving lenses 11 are inserted in the lens holder 110, and an aperture 112 formed of a through hole is formed on the light receiving element array 120 side of each light receiving lens 11.
- the outer diameter of the plurality of light receiving lenses 11 is a clearance size with respect to the inner diameter of the lens holder 110, and each light receiving lens 11 is crevice-fitted by being inserted into the lens holder 110.
- Each aperture 112 has an inner diameter smaller than the outer diameter of each light receiving lens 11 and extends along the optical axis of each light receiving lens 11.
- each aperture 112 extends the plurality of light receiving element sides (light receiving element array 120 side) of the lens holder 110 into a cylindrical shape, which limits the field of view 111 of each light receiving lens 11.
- the above-mentioned tubular shape means a configuration in which the aperture 112 is extended by a through hole formed in a cylindrical shape, but the configuration is not limited to this, and the aperture 112 is extended in a flat plate shape by a protruding flat plate. There may be.
- the lengths of the plurality of light receiving element sides (light receiving element array 120 side) of the lens holder 110 that is, the lengths of the aperture 112 may be different.
- the luminous flux shown by hatching in FIG. 16B is in the field of view 111, it is possible to receive light by the light receiving element array 120 without being limited by the field of view 112, but outside of this (on the optical axis of the light receiving lens 11).
- the light flux (outside) does not reach the light receiving element array 120. That is, the luminous flux in the field of view 111 of the light receiving lens 11 reaches the light receiving element facing the light receiving lens 11, but the luminous flux outside the field of view 111 reaches the light receiving element facing the light receiving lens 11 and the adjacent light receiving element. Does not reach any of.
- the luminous flux other than the field of view 111 of the light receiving lens 11 facing the light receiving element does not reach the light receiving element, and therefore crosstalk between adjacent pixels can be prevented.
- the aperture 112 is formed on the lens holder 110, it is possible to realize a highly accurate crosstalk prevention aperture.
- the aperture 112 does not have to be cylindrical.
- a partition may be provided at an intermediate position between the light receiving lenses 11 so that the light received by each light receiving lens 11 is not received by another light receiving lens 11.
- the plurality of light receiving lenses 11 are not limited to the configuration arranged in one row, but by inserting and fixing the light receiving lens 11 alone into the cylindrical holder in advance and then stacking the cylindrical holders in a bale shape. They may be arranged in bales. Further, a plurality of light receiving lenses 11 may be positioned by an L-shaped positioning jig, adhered and fixed, and then housed in a rectangular lens holder.
- the above aperture 112 is provided on the light receiving element array 120 side, but W. D. It may be provided on the inspection surface side with a length that does not impair. Then, the combination of the aperture on the inspection surface side and the aperture on the light receiving element side enables more effective visual field limitation.
- the effective diameter ⁇ is the same as in the case of FIG. 14A.
- the solid line shows the total circle of confusion
- the broken line shows the circle of confusion due to diffraction
- the alternate long and short dash line shows the circle of geometrical optics.
- Light source 11 Light receiving lens 12
- Light receiving part 20 Focal plane 103
- Light source 104 Condensing lens 105
- Cylindrical lens 110 Lens holder 111 Field 112 Aperture 120
- Light source board 135 Heat sink
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Abstract
Description
典型的なCISを図1に、同様にCIS用ライン状照明光学系を図2に示す。図1においては、CISの長手方向中央部近傍における断面図が示されている。一方、図2は分解斜視図である。X方向が主走査方向であり、Y方向が副走査方向である。Z方向は、X方向及びY方向に直交している。ライン状の光源部10は、主走査方向に細長い光量分布を有する照明光学系である。
まず、第一の方法は、図3に示すように光学ラインセンサを単眼レンズ化したと見做せるアレイ構造とすることである。図3は、各受光レンズ11の視野111がほぼ重ならないようにした受光系の模式図である。すなわち、図3では、各受光レンズ11の視野111がほぼ重ならないように、各受光レンズ11を主走査方向(X方向)に離間して配置している。
次に、受光レンズの長焦点化について述べる。従来のSELFOCレンズはCISのコンパクト化やコストダウンに重きを置き、共役長のより短いレンズが求められてきた。しかしながら、この流れは、許容される被写界深度を減じてしまうことを助長する要因となっている。しかもレンズ径は益々小さくなってきいる。受光レンズを長焦点化する場合、従来の受光レンズを利用すると、N.A.が極端に小さくなる。故に回折の影響が大きくなり、受光レンズ自身の有する幾何光学的な収差によるボケよりも回折限界によるボケが光学的分解能劣化の支配要因となる。従来方式のCISは、N.A.が大きいため、回折限界による像のボケが生じることを無視出来ていた。しかし、W.D.を長くとるためには、受光レンズの焦点距離を延ばすことが必要であり、即ち、N.A.が小さくなってしまうため、従来のレンズ径では、焦点距離が増大すればするほど回折の影響もそれに伴い増大する。本実施形態では、レンズ径を大きくすることでW.D.を長くし、回折限界による像のボケを減じた場合においても、光学的分解能を劣化させない方法を提案する。
d=λ/N.A. (式1)
図7に各波長に対するN.A.と回折限界の関係を表す。同じレンズパラメータの受光レンズ11においては、受光レンズ11自身の所謂ピッチを短くすれば焦点距離は伸び、収差の影響も少なくなる。
次に、更に被写界深度を増大させる方法を記す。図10は、受光レンズ11を正立等倍多眼レンズに代えて正立縮小多眼レンズとした場合の模式図である。図10では、受光レンズ11を該受光レンズ11の視野寸法以上離間させ、かつ、読取ラインLに直交する方向に各受光素子アレイ120を該受光レンズ11の視野寸法以上離間させて配置した場合の模式図を示している。図10では、受光系の一部が平面図で示されているが、視覚的に分かりやすくするために、該受光系の一部の側面図も示されている。
本実施例において、受光レンズ11の焦点距離fは、f=50mm、N.A.は、N.A.=0.01、0.02、0.025、0.03とし、屈折率分布定数√Aは、√A=0.077とした。光源103に関しては、W.D.が従来のCISに比べて10倍以上長いため、等倍系では、検査面照度は100倍以上を必要とする。そのため、光源103として、例えば高輝度の白色LEDアレイを用いる。すなわち、複数の光源103が、白色LEDを含む構成であってもよい。可視域の半導体レーザを光源103として用いる場合は、出射ビームを主走査方向に拡大し、副走査方向にコリメーションすることで照射時の光量ムラを低減する。
次に、個々の受光レンズ11に起因するシェーディングが読取ラインL方向に対するリップルを発生させ、ひいては、受光素子のダイナミックレンジを狭くすることに繋がるのであるが、この抑制方法について述べる。
本実施形態におけるレンズ径別の受光系MTFのグラフを図14Dに示す。比較例として、図14Eに屈折率分布定数√A=0.154の場合を示す。実線、短破線、長破線、一点鎖線の順番に、有効径ΦがΦ=1.0、1.5、2.0、2.5、3.0mmの場合を示している。尚、受光素子の画素寸法は、600dpi相当に合わせ主走査方向、副走査方向とも42.3μmとしている。
図14Aの場合において、視野111の重畳によりクロストークの発生があった際の防止方法について説明する。図14Aの場合において、レンズ径ΦはΦ=4mmであり、レンズホルダー110に収めて用いる。そこで、図16Aにレンズホルダー110の受光素子アレイ120側を筒状に延長した視野制限ホルダーの構成を示す。以下にその効果について説明する。
11 受光レンズ
12 受光部
20 焦点面
103 光源
104 集光レンズ
105 シリンドリカルレンズ
110 レンズホルダー
111 視野
112 アパチャー
120 受光素子アレイ
131 赤色LD
132 緑色LD
133 青色LD
134 光源基板
135 ヒートシンク
Claims (33)
- 副走査方向に搬送される検査対象物を主走査方向に延びる読取ラインで読み取る光学ラインセンサであって、
主走査方向に沿って複数配置された複数の受光レンズと、
主走査方向に沿ってライン状に配置され、前記複数の受光レンズを透過した光を受光する複数の受光素子とを備え、
前記複数の受光レンズは、該受光レンズの直径以上に互いに離間して配置され、
前記複数の受光素子は、少なくとも1列以上の前記読取ラインを形成することを特徴とする光学ラインセンサ。 - 前記複数の受光レンズは、正立像を形成することを特徴とする請求項1に記載の光学ラインセンサ。
- 前記複数の受光レンズは、該受光レンズの視野寸法以下に互いに離間して配置されていることを特徴とする請求項2に記載の光学ラインセンサ。
- 前記複数の受光レンズは、該受光レンズの視野寸法以上に互いに離間して配置され、
前記複数の受光素子は少なくとも2列以上の前記読取ラインを形成することを特徴とする請求項2に記載の光学ラインセンサ。 - 前記複数の受光素子は、1列のアレイ状に配置されることにより1つの受光素子アレイを構成し、
前記複数の受光レンズは、該受光レンズの直径以上に互いに離間し、かつ、該受光レンズの視野寸法以下に互いに離間して配置されていることを特徴とする請求項2に記載の光学ラインセンサ。 - 前記複数の受光素子は、2列以上のアレイ状に配置されることにより複数の受光素子アレイを構成し、該複数の受光素子アレイの各々は、前記読取ラインに直交する方向において前記受光レンズの直径以上に互いに離間し、かつ、該受光レンズの視野寸法以下に互いに離間して配置され、
前記複数の受光レンズは、前記複数の受光素子アレイに対応した数だけ配置され、各受光レンズの光軸は、各受光素子アレイの略中央部を貫くことを特徴とする請求項2に記載の光学ラインセンサ。 - 前記複数の受光素子は、2列以上のアレイ状に配置されることにより複数の受光素子アレイを構成し、該複数の受光素子アレイの各々は、前記読取ラインに直交する方向において前記受光レンズの視野寸法以上に互いに離間して配置され、
前記複数の受光レンズは、前記複数の受光素子アレイに対応した数だけ配置され、各受光レンズの光軸は、各受光素子アレイの略中央部を貫くことを特徴とする請求項2に記載の光学ラインセンサ。 - 前記複数の受光素子アレイは、2列の読取ラインにそれぞれ複数配置された各読取ラインよりも短い受光素子アレイであり、一方の読取ラインに配置された受光素子アレイと他方の読取ラインに配置された受光素子アレイとが、主走査方向に沿って交互に千鳥状に配置されていることを特徴とする請求項6又は7に記載の光学ラインセンサ。
- 前記複数の受光レンズは、前記2列の読取ラインの間に、前記複数の受光素子アレイに平行に1列で配置され、各受光レンズの光軸が、前記2列の読取ラインの間の副走査方向における略中央部を貫くことを特徴とする請求項8に記載の光学ラインセンサ。
- 前記複数の受光レンズは、倒立像を形成することを特徴とする請求項1に記載の光学ラインセンサ。
- 前記複数の受光素子は、2列以上のアレイ状に配置されることにより複数の受光素子アレイを構成し、該複数の受光素子アレイの各々は、前記読取ラインに直交する方向において前記受光レンズの視野寸法以上に互いに離間して配置され、
前記複数の受光レンズは、前記複数の受光素子アレイに対応した数だけ配置され、各受光レンズの光軸は、各受光素子アレイの略中央部を貫くことを特徴とする請求項10に記載の光学ラインセンサ。 - 前記複数の受光素子アレイは、2列の読取ラインにそれぞれ複数配置された各読取ラインよりも短い受光素子アレイであり、一方の読取ラインに配置された受光素子アレイと他方の読取ラインに配置された受光素子アレイとが、主走査方向に沿って交互に千鳥状に配置されていることを特徴とする請求項11に記載の光学ラインセンサ。
- 前記複数の受光レンズが、それぞれ正立像を形成する屈折率分布型レンズ、或いは、アクロマート、或いは、アポクロマートを含むことを特徴とする請求項2~9の何れか1項に記載の光学ラインセンサ。
- 前記複数の受光レンズが、それぞれ倒立像を形成する屈折率分布型レンズ、或いは、アクロマート、或いは、アポクロマートを含むことを特徴とする請求項10~12の何れか1項に記載の光学ラインセンサ。
- 前記屈折率分布型レンズが、ガラス或いは樹脂からなり、該レンズのレンズパラメータにおいて、軸上屈折率N0が1.45≦N0≦1.65であり、屈折率分布定数√Aが0.05≦√A≦0.12であり、焦点距離fが50mm≦f≦150mmであることを特徴とする請求項13又は14に記載の光学ラインセンサ。
- 前記複数の受光レンズが、それぞれ複数枚のレンズを組み合わせたアクロマート又はアポクロマートからなり、前記複数枚のレンズとして凸レンズのみを組み合わせたレンズ系であるか、或いは、前記複数枚のレンズとして凸レンズと凹レンズを組み合わせたレンズ系であり、かつ、該複数枚のレンズの焦点距離fが50mm≦f≦250mmであり、更に該複数枚のレンズの口径Φが2mm≦Φ≦10mmであることを特徴とする請求項13又は14に記載の光学ラインセンサ。
- 検査対象物に光を照射する複数の光源をさらに備え、
前記複数の光源は、前記読取ラインに平行に並べて配置され、前記複数の光源の光軸は、前記複数の受光レンズの光軸と交点を結び、かつ該複数の受光レンズの光軸と交差する仮想平面の任意の位置に配置され、更に互いに隣接する受光レンズの間の略中央部に光源が配置されたことを特徴とする請求項1~16の何れか1項に記載の光学ラインセンサ。 - 前記複数の光源は、複数の異なる波長を有する光源を含み、該複数の異なる波長を有する光源を1単位として、該1単位の光源が主走査方向に複数並べられたことを特徴とする請求項17に記載の光学ラインセンサ。
- 前記複数の光源からの光束を集光する集光レンズをさらに備えることを特徴とする請求項17又は18に記載の光学ラインセンサ。
- 前記集光レンズは、主走査方向のパワーが副走査方向のパワーよりも大きい第1集光レンズと、副走査方向のパワーが主走査方向のパワーよりも大きい第2集光レンズとを含むことを特徴とする請求項19に記載の光学ラインセンサ。
- 前記集光レンズは、1個のレンズ体であり、該レンズ体が有する主走査方向のパワーが副走査方向のパワーよりも大きいことを特徴とする請求項19に記載の光学ラインセンサ。
- 前記集光レンズは、主走査方向のパワーを前記第1集光レンズと第2集光レンズにより調整可能であることを特徴とする請求項20に記載の光学ラインセンサ。
- 前記集光レンズが、シリンドリカルレンズ或いはフレネルレンズであることを特徴とする請求項19~22の何れか1項に記載の光学ラインセンサ。
- 前記第1集光レンズが、レンチキュラーレンズで或いはプリズム列であり、
前記第2集光レンズが、フレネルレンズ或いはシリンドリカルレンズであることを特徴とする請求項20又は22に記載の光学ラインセンサ。 - 前記複数の光源が、白色LEDを含むことを特徴とする請求項17~24の何れか1項に記載の光学ラインセンサ。
- 前記複数の光源が、赤色LED、緑色LED及び青色LEDを含むことを特徴とする請求項17~24の何れか1項に記載の光学ラインセンサ。
- 前記複数の光源が、レーザダイオードを含むことを特徴とする請求項17~24の何れか1項に記載の光学ラインセンサ。
- 前記複数の受光レンズを保持するレンズホルダーをさらに備え、
前記レンズホルダーの前記複数の受光素子側が筒状或いは平板状に延長されることにより、各受光レンズの視野が制限されていることを特徴とする請求項1~27の何れか1項に記載の光学ラインセンサ。 - 前記複数の受光レンズを保持するレンズホルダーをさらに備え、
前記複数の受光レンズの外径が、前記レンズホルダーの内径に対してすきまばめ寸法であり、前記複数の受光レンズが俵積み或いは1列に配置されていることを特徴とする請求項1~27の何れか1項に記載の光学ラインセンサ。 - 隣り合う前記受光レンズにおいて、前記レンズホルダーの前記複数の受光素子側の長さが異なることを特徴とする請求項28に記載の光学ラインセンサ。
- 前記複数の光源が実装された光源基板と、
前記光源基板に取り付けられたヒートシンクとをさらに備えることを特徴とする請求項17~27の何れか1項に記載の光学ラインセンサ。 - 請求項2~9の何れか1項に記載の光学ラインセンサを用いた画像合成処理方法であって、
前記複数の受光レンズの視野が重なった部分の受光素子について、該受光素子からの画素出力を減算処理することを特徴とする画像合成処理方法。 - 請求項10~12の何れか1項に記載の光ラインセンサを用いた画像合成処理方法であって、
前記複数の受光レンズの反転像を反転させ、正立像に変換した後に画像合成処理をすることを特徴とする画像合成処理方法。
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