WO2022082338A1 - Preparation device and method for optical fiber preform - Google Patents

Preparation device and method for optical fiber preform Download PDF

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Publication number
WO2022082338A1
WO2022082338A1 PCT/CN2020/121783 CN2020121783W WO2022082338A1 WO 2022082338 A1 WO2022082338 A1 WO 2022082338A1 CN 2020121783 W CN2020121783 W CN 2020121783W WO 2022082338 A1 WO2022082338 A1 WO 2022082338A1
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WO
WIPO (PCT)
Prior art keywords
chamber
optical fiber
fiber preform
sintering
dehydration
Prior art date
Application number
PCT/CN2020/121783
Other languages
French (fr)
Chinese (zh)
Inventor
张功会
陈伟
严勇虎
朱永刚
孙伟
王林
郝昌平
罗干
周忠凯
李永通
袁建超
王亚玲
卢萍
管弘丰
戚仁宝
Original Assignee
江苏亨通光纤科技有限公司
江苏亨通光电股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 江苏亨通光纤科技有限公司, 江苏亨通光电股份有限公司 filed Critical 江苏亨通光纤科技有限公司
Priority to PCT/CN2020/121783 priority Critical patent/WO2022082338A1/en
Priority to DE112020007706.3T priority patent/DE112020007706T5/en
Priority to CN202080102910.4A priority patent/CN116234779A/en
Publication of WO2022082338A1 publication Critical patent/WO2022082338A1/en

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01406—Deposition reactors therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01486—Means for supporting, rotating or translating the preforms being formed, e.g. lathes

Definitions

  • the present disclosure relates to the technical field of optical fiber production, for example, to an optical fiber preform preparation device and method.
  • the market has higher and higher requirements for the quality of optical fibers.
  • the quality of optical fiber preforms directly affects the performance and parameter indicators of optical fiber products.
  • Optical fiber preform production is generally divided into two preparation processes:
  • One is to separate the preparation phase of the mandrel and the outer cladding, and then match the corresponding outer cladding or mandrel according to the parameters of the mandrel or the outer cladding.
  • the common process method is the Rod in Cylinder (RIC) process.
  • RIC Rod in Cylinder
  • the advantage of this type of preparation process is that large-diameter optical fiber preforms can be prepared, but there may be parameter mismatches during the combination process of the core rod and the outer package, impurities may be introduced during the combination process, and scratches may be easily generated during transportation or combination. defect problem.
  • the other is to first prepare the loose body of the optical fiber preform (also known as the soot body, soot body), and then sinter the loose body of the optical fiber preform into the optical fiber preform through the sintering process.
  • Common processes such as modified chemical vapor deposition (Modified Chemical Vapor Deposition) Deposition, MCVD), axial vapor deposition (Vapour Axial Deposition, VAD) and external vapor deposition (Outside Vapour Deposition, OVD) and so on.
  • MCVD Modified Chemical Vapor Deposition
  • VAD axial vapor deposition
  • OVD External vapor deposition
  • This kind of preparation process avoids the problem that the optical fiber preform is prone to scratches and other defects during transportation.
  • different processes such as deposition and sintering need to run the optical fiber preform between different devices.
  • the fiber preform may cause impurities to adhere or crack the rod due to stress changes during the temperature change process, which will seriously affect the quality of subsequent fiber products and is not conducive to fiber loss. decrease and increase the fiber strength.
  • the present disclosure provides a preparation device and method for an optical fiber preform.
  • the device can prepare an optical fiber preform based on the VAD method.
  • the optical fiber preform does not need to be operated between different devices, so the quality of the optical fiber preform can be improved, and the optical fiber preform can be greatly improved. Improve production efficiency.
  • the present disclosure provides a preparation device for an optical fiber preform, which includes a reaction chamber, a clamping mechanism and a driving mechanism, wherein the clamping mechanism is arranged in the reaction chamber and is arranged to fix a target rod, and the driving mechanism is arranged as driving the clamping mechanism to rotate around the vertical axis and move up and down along the vertical direction;
  • the reaction chamber is provided with a plurality of partitions, and the plurality of partitions partition the reaction chamber to form a first chamber, a second chamber and a third chamber sequentially arranged from bottom to top;
  • the partition part has a through hole, and the through hole is coaxial with the target rod, so that the target rod can be placed in the first chamber and the second chamber after moving in the vertical direction chamber or said third chamber;
  • the first chamber is configured to deposit on the target rod using a VAD method to form loose bodies
  • the second chamber is configured to perform dehydration treatment and sintering treatment on the loose body to obtain an optical fiber preform
  • the third chamber is configured to anneal the optical fiber preform.
  • FIG. 1 is a schematic structural diagram of a device for preparing an optical fiber preform in an embodiment of the present invention
  • FIG. 2 is a schematic diagram of the matching structure of a partition made of a rigid material and an optical fiber preform in an embodiment of the present invention
  • FIG. 3 is a schematic diagram of the matching structure of a partition made of a flexible material and an optical fiber preform in an embodiment of the present invention.
  • Reaction chamber 11. First chamber; 12. Second chamber; 121. Sintering chamber; 122. Dehydration chamber; 13. Third chamber;
  • Driving mechanism 31.
  • connection should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integrated ; It can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between the two elements.
  • connection may be a fixed connection, a detachable connection, or an integrated ; It can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between the two elements.
  • the specific meanings of the above terms in the present disclosure can be understood in specific situations.
  • a first feature "on” or “under” a second feature may include the first and second features in direct contact, or may include the first and second features Not directly but through additional features between them.
  • the first feature being “above”, “over” and “above” the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is level higher than the second feature.
  • the first feature is “below”, “below” and “below” the second feature includes the first feature being directly below and diagonally below the second feature, or simply means that the first feature has a lower level than the second feature.
  • this embodiment provides a preparation device for an optical fiber preform.
  • the preparation device includes a reaction chamber 1 , a clamping mechanism 2 and a driving mechanism 3 .
  • the clamping mechanism 2 is arranged in the reaction chamber 1 and is arranged to fix the target rod 4, and the driving mechanism 3 is arranged to drive the clamping mechanism 2 to rotate around the vertical axis and move up and down in the vertical direction.
  • the reaction chamber 1 is provided with a plurality of partitions 5, and the plurality of partitions 5 partition the reaction chamber 1 to form a first chamber 11, a second chamber 12 and a third chamber 13 arranged in sequence from bottom to top;
  • the partition 5 has a through hole, and the through hole is arranged coaxially with the target rod 4 so that the target rod 4 can be placed in the first chamber 11 , the second chamber 12 or the third chamber 13 after moving in the vertical direction ,in:
  • the first chamber 11 is configured to deposit a loose body on the target rod 4 by the VAD method
  • the second chamber 12 is configured to perform dehydration treatment and sintering treatment on the loose body to obtain the optical fiber preform 10;
  • the third chamber 13 is configured to anneal the optical fiber preform 10 .
  • Deposition The process of chemical reaction of optical fiber raw materials in a certain environment to generate doped silica glass
  • Sintering The process of gradually sintering the deposited hollow glass tube into a solid glass rod under a certain heat source.
  • the preparation device completes the deposition, dehydration, sintering and annealing treatment processes of the optical fiber preform 10 through a reaction chamber 1 , and directly produces the finished product of the optical fiber preform 10 . Since the optical fiber preform 10 does not need to be operated between different devices during the preparation process, the situation that the optical fiber preform 10 is in contact with the outside air and adheres to impurities is avoided, the doping purity of the optical fiber preform 10 is improved, and at the same time, the optical fiber preform can be avoided. 10.
  • the sudden temperature change caused by the transfer can minimize the internal stress caused by the temperature change of the optical fiber preform 10 during the process, and avoid problems such as cracking of the rod. and special optical fibers.
  • the reaction chamber 1 may be generally a hollow cylinder, and a heating device (not shown in the figure) and a temperature sensor (not shown in the figure) are provided inside the reaction chamber 1, so as to provide suitable The high temperature environment in which the optical fiber preform 10 is prepared.
  • a circulating water pipeline (not shown in the figure) can be provided outside the reaction chamber 1 to meet cooling requirements.
  • the top of the reaction chamber 1 is provided with a chamber cover (not shown in the figure) that can seal or open the reaction chamber 1 to allow the target rod 4 to move into the reaction chamber 1, or allow the target rod 4 to carry the optical fiber preform 10 to move out of the reaction chamber. Cavity 1.
  • the first chamber 11 is provided with a torch 6, and the torch 6 includes a mandrel deposition lamp and a cladding deposition lamp.
  • the first chamber 11 provides high purity SiCl 4 and other dopants.
  • the gas distribution system (not shown in the figure) communicating with the first chamber 11 , the second chamber 12 and the third chamber 13 can supply the first chamber 11 , the second chamber 12 and the third chamber
  • the chamber 13 provides an inert gas, so that an inert atmosphere is formed in the first chamber 11 , the second chamber 12 and the third chamber 13 .
  • the clamping mechanism 2 includes a chuck, and the chuck is configured to fix the target rod 4 .
  • the driving mechanism 3 includes a first power assembly 31 and a second power assembly 32 .
  • the first power assembly 31 includes a screw rod 311 extending from the top of the reaction chamber 1 into the third chamber 13 along the vertical direction.
  • the lower end of the screw rod 311 is rotatably connected to the reaction chamber corresponding to the third chamber 13
  • the support member 312 fixedly connected to the cavity wall of the body 1, the upper end of the screw rod 311 is drivingly connected with a synchronous pulley mechanism 313, and the synchronous pulley mechanism 313 is driven by the first motor 314.
  • the lead screw 311 may also be located outside the chamber.
  • the second power assembly 32 includes a lift seat 321 screwed with the lead screw 311, and a second motor 322 fixed to the lift seat 321, wherein the lift seat 321 is arranged to move only in the vertical direction, and the second motor 322 is Arranged so that the rotating shaft is parallel to the vertical direction, the end of the rotating shaft of the second motor 322 is fixed to the chuck.
  • the driving mechanism 3 can drive the chuck to rotate around the vertical axis and move up and down in the vertical direction, so that the target rod 4 is placed in the first chamber 11 , the second chamber 12 or the third chamber 13 .
  • clamping mechanism 2 and the driving mechanism 3 are merely illustrative in this embodiment, and mechanisms with the same or similar technical effects may be configured based on related technologies, which are not limited herein.
  • the preparation device further includes a control system 7, and the control system 7 includes a control module and an information collection module.
  • the control module includes a programmable logic controller (Programmable Logic Controller, PLC) controller and an operating console.
  • the information acquisition module includes a position sensor (not shown in the figure) and an on-line monitoring device (not shown in the figure, which may include temperature sensor, flowmeter, laser rangefinder, etc.), the information acquisition module can collect the loose body end position, running speed, running distance, diameter of the optical fiber preform 10, transmittance of the optical fiber preform 10, deposition supply
  • the information such as the amount of material and the flow rate of the oxyhydrogen flame of the torch 6 is provided to the control module, and the control module can then adjust the heating device, the feeding system, the gas distribution system, the torch 6 and the driving mechanism 3 and other components in the preparation device by means of the above information
  • control module and the information acquisition module have been used in the preparation equipment for preparing the optical fiber preform 10 by the VAD method, so the components and the circuit/communication structure adopted by the control system 7 are not repeated here, and In the preparation process based on the preparation device provided in this embodiment, the specific information collection and processing process required by the control system 7 will be described in the following case.
  • the partitions 5 can be made of rigid materials such as metal, and the diameter of the through holes located on each partition 5 is correspondingly smaller than the diameter of the loose body or the optical fiber preform 10 , so that the The partition 5 is interference-connected with the loose body or the optical fiber preform 10 .
  • the diameter of the through hole on the first partition 51 is smaller than the diameter of the loose body
  • the diameter of the through hole on the second partition 52 is smaller than the diameter of the optical fiber preform 10
  • the through hole on the third partition 53 The diameter of the hole is smaller than the diameter of the optical fiber preform 10 .
  • the loose body/optical fiber preform 10 When the loose body/optical fiber preform 10 is in two or even three chambers at the same time, for example, when the upper half of the loose body is in the second chamber 12 and the lower half is in the first chamber 11, at this time, it is located in the first chamber 11.
  • the first partition 51 between the first chamber 11 and the second chamber 12 is in close contact with the loose body, so that the first chamber 11 and the second chamber 12 are blocked, forming an independent atmosphere, which is convenient for the first chamber 11 and the second chamber 12.
  • the loose bodies of a chamber 11 can continue to be deposited at the bottom of the first chamber 11 , and the loose bodies in the first chamber 11 can be dehydrated or sintered.
  • the flexible partition 5 can be made of ceramic fiber, which has the characteristics of high temperature resistance, low thermal conductivity, light bulk density, long service life, high tensile strength, good elasticity and non-toxicity, and does not produce volatile substances when heated. The quality of the optical fiber preform 10 is not affected.
  • the difference between the diameter of the optical fiber preform 10 and the diameter of the through hole can be less than 3 mm to ensure that the loose body/optical fiber preform 10 can pass through the through hole smoothly.
  • the partitions 5 can also be made of flexible materials, and there are preset gaps between the through holes located on each partition 5 and the loose body or the optical fiber preform 10 , to ensure that the loose body obtained by deposition does not scratch with the first partition 51 when passing through the first partition 51 between the first chamber 11 and the second chamber 12; When the rod 10 passes through the second partition 52 between the second chamber 12 and the third chamber 13 , the second partition 52 is not scratched.
  • the preset gap may be 1-3mm.
  • there is a preset gap between the through hole on each partition 5 and the loose body or the optical fiber preform 10 which may be: the through hole on the first partition 51 has a preset gap with the loose body.
  • the through holes on the second partition part 52 have a preset gap with the optical fiber preform 10
  • the through holes on the third partition part 53 have a preset gap with the optical fiber preform 10 .
  • the diameter of the loose body/optical fiber preform 10 will change, and the diameter of the through holes provided on each partition 5 can be adjusted correspondingly instead of The apertures are the same.
  • the partition part 5 is made of rigid material, that is, a gap is formed between the loose body/fiber preform 10 and the partition part 5, the first chamber 11 and the second chamber 12 communicate with each other, which does not mean that the first chamber 11 and the second chamber 12 communicate with each other.
  • the chamber 11 and the second chamber 12 cannot work simultaneously.
  • the second chamber 12 can be sintered or even dehydrated by only filling the inert gas, and the inert gas flowing from the second chamber 12 to the first chamber 11 will not affect the The reaction atmosphere of the first chamber 11 .
  • the first partition 51 and the third partition 53 between the first chamber 11 and the second chamber 12 can be made of rigid materials, and the second chamber 12 and the third chamber 13 are made of rigid materials.
  • the room can be made of flexible materials.
  • the above-mentioned can make the loose body in the first chamber 11 and the second chamber 12 at the same time, that is, the lower half of the loose body is in the first chamber 11, and the upper half is in the second chamber 12, so that the first The chamber 11 and the second chamber 12 can perform deposition processing and dehydration processing simultaneously, or the first chamber 11 and the second chamber 12 can perform deposition processing and sintering processing simultaneously to improve production efficiency.
  • the entire loose body can be obtained by deposition in the first chamber 11 Afterwards, the loose body is lifted to the second chamber 12 for dehydration or sintering treatment.
  • the partition part 5 is provided in the second chamber 12, and the partition part 5 partitions the second chamber 12 to form a sintering chamber 121 and a dehydration chamber 122 that communicate up and down,
  • the sintering chamber 121 and the dehydration chamber 122 are respectively configured to perform the sintering process and the dehydration process on the loose body.
  • the height of at least one of the sintering chamber 121 and the dehydration chamber 122 is less than the total length of the loose body, so that the sintering chamber 121 and the dehydration chamber 122 The dehydration treatment and the sintering treatment can be performed simultaneously.
  • the height of the second chamber 12 is less than the total length of the loose body, so that the first chamber 11 , the sintering chamber 121 and the dehydration chamber 122 can be simultaneously performed Deposition treatment, the dehydration treatment, and the sintering treatment.
  • the heights of the sintering chamber 121 and the dehydration chamber 122 are both greater than the total length of the loose body, so that the loose body can be dehydrated in the sintering chamber 121 and the dehydration chamber respectively.
  • the chamber 122 is integrally dehydrated and integrally sintered.
  • the height of the third chamber 13 is greater than the total length of the optical fiber preform 10 , so that the optical fiber preform 10 can be annealed in the third chamber 13 as a whole.
  • the partitions 5 are made of rigid material, and there is a predetermined gap between the through holes located on each partition 5 and the loose body or the optical fiber preform 10 .
  • the partitions 5 are made of flexible materials, and the diameter of the through holes on each partition 5 is correspondingly smaller than the diameter of the loose body or the optical fiber preform 10, so that the The partition part 5 is interference-connected with the loose body or the optical fiber preform 10 .
  • the partitions 5 are made of ceramic fibers.
  • the second chamber 12 is provided with a third partition 53 , and the third partition 53 separates the second chamber 12 to form a sintering chamber 121 and a dehydration chamber 122 that communicate up and down, and the sintering chamber 121 and the dehydration chamber 122 are respectively configured to perform sintering treatment and dehydration treatment on the loose body.
  • the height of the sintering chamber 121 and/or the dehydration chamber 122 may be smaller than the total length of the loose body, so that the sintering chamber 121 and the dehydration chamber 122 can perform dehydration treatment and sintering treatment at the same time, thereby improving production efficiency .
  • the sum of the heights of the sintering chamber 121 and the dehydration chamber 122 may be less than the total length of the loose body, so that the first chamber 11, the sintering chamber 121 and the dehydration chamber 122 can simultaneously perform deposition processing, Dehydration treatment and sintering treatment.
  • the height of the third chamber 13 is greater than the total length of the optical fiber preform 10, so that the optical fiber preform 10 can be annealed in the third chamber 13 as a whole, so as to ensure that the entire optical fiber preform 10 can be annealed during annealing.
  • the multi-section stress of the rod 10 is simultaneously reduced.
  • the first chamber 11 , the second chamber 12 and the third chamber 13 , and even the sintering chamber 121 and the dehydration chamber 122 which constitute the second chamber 12 in combination can be set to be higher than the loose
  • the overall length of the body/fiber preform 10 so that the deposition, dehydration, sintering and annealing treatments are performed individually.
  • the heights of the first chamber 11 , the second chamber 12 and the third chamber 13 may be adaptively selected based on production requirements, and the above is only an exemplary illustration.
  • the practitioner can adjust the height of the multiple chambers adaptively based on the process requirements of the optical fiber preform to be prepared and the proportion of the time spent in the deposition, dehydration, sintering and annealing treatments, etc., so as to make the preparation device suitable for use. in continuous preparation.
  • the reaction chamber 1 includes a deposition chamber (a first chamber 11 ), a dehydration chamber 122 , and a sintering chamber 121 (which together with the dehydration chamber 122 form a second chamber 121 ) sequentially arranged from bottom to top chamber 12) and an annealing chamber (third chamber 13).
  • the sum of the heights of the deposition chamber, the dehydration chamber 122 and the sintering chamber 121 is less than the total length of the optical fiber preform 10 to be prepared, and the height of the annealing chamber is greater than the total length of the optical fiber preform 10 to be prepared.
  • the preparation process of the preparation device to prepare the optical fiber preform is as follows:
  • the control system 7 controls the feeding system to feed the raw materials such as SiCl 4 and other dopants to the mandrel deposition lamp and the cladding deposition lamp according to the preset flow value.
  • the powder is sprayed on the target rod 4 to form a section of mandrel, the cladding deposition lamp is then ignited, and the cladding is formed by spraying outside the mandrel.
  • the control system 7 controls the action of the driving mechanism 3 to drive the target rod 4 to rotate and lift, so as to prepare a loose body with a specific core-skin ratio and diameter growing along the axial direction of the target rod 4 .
  • the position sensor and the on-line monitoring device continuously monitor the position of the end of the loose body, the running speed, the running distance, the diameter of the optical fiber preform 10, the transmittance of the optical fiber preform 10, the amount of deposited material,
  • the information such as the gas flow rate of the oxyhydrogen flame of the torch 6 is used as the basis for the control system 7 to control the flame temperature of the torch 6, the rotation and lifting speed of the drive mechanism 3, the feeding speed, the temperature of the deposition chamber and the gas atmosphere and other parameters. .
  • the loose body With the lifting of the target rod 4, the loose body enters the dehydration chamber 122.
  • the control system 7 receives the sensing signal transmitted by the position sensor located in the dehydration chamber 122, the control system 7 controls the heating device in the dehydration chamber 122 to work. , and the temperature of the dehydration chamber 122 is raised to 1300° C. to perform dehydration treatment on the loose body, and the hydroxyl content of the mandrel after dehydration is less than or equal to 10ppb.
  • the dehydrated loose body enters the sintering chamber 121 .
  • the control system 7 receives the sensing signal transmitted by the position sensor located in the sintering chamber 121 , the control system 7 controls the sintering chamber 121
  • the heating device inside works, and the dehydration chamber 122 is heated to 1500 ° C for sintering treatment.
  • the gas distribution system introduces helium gas into the sintering chamber 121 to maintain the normal pressure of about 100Pa, and can be fed with fluorine-containing gas. Fluoride treatment. Negative pressure sintering can be used during cladding sintering. At this time, no gas is allowed to pass through and a negative pressure is maintained.
  • the negative pressure is generally a vacuum below 0.01Pa, so as to eliminate the closed bubbles remaining in the optical fiber preform 10 after vitrification and improve the Fiber preform quality and shorten the time of subsequent annealing.
  • An optical fiber preform 10 with a diameter of more than 90 mm, good quality of core rod and cladding, and a minimum relative refractive index of -0.006 is sintered.
  • the online monitoring device located in the sintering chamber 121 collects parameters such as the transmittance of the optical fiber preform 10 after sintering. , it is convenient for the control system 7 to control the rotation and lifting speed of the driving mechanism 3 based on the above parameters, adjust the deposition speed and the gas atmosphere in the deposition chamber, etc., to ensure the quality of the optical fiber preform 10 .
  • the sintered optical fiber preform 10 enters the annealing chamber as a whole for annealing treatment.
  • the gas distribution system introduces inert gas such as helium or nitrogen into the annealing chamber to lower the optical fiber preform 10.
  • the internal stress prevents the optical fiber preform 10 from cracking due to excessive stress, and finally a large-sized optical fiber preform 10 with a length of more than 2000 mm is prepared.
  • the high-quality optical fiber preform 10 is removed from the reaction chamber 1, and the optical fiber preform 10 is removed.
  • the loose body lifted to the dehydration chamber 122 and even the sintering chamber 121 can be dehydrated or sintered at the same time.
  • dehydration and sintering Processing can be performed intermittently.
  • the annealing treatment can be performed in the annealing chamber after the entire loose body is sintered to form the optical fiber preform 10, so as to ensure that the entire optical fiber preform 10 is annealed as a whole during annealing, so that the stress of multiple parts can be simultaneously reduced, so as to avoid the optical fiber preform. 10+ part stress relief inconsistencies.
  • the inert gas used as the reaction atmosphere can also be argon with good thermal conductivity.
  • This embodiment also provides a method for preparing an optical fiber preform by using the above-mentioned preparation device, and the method includes:
  • the target rod 4 is placed in the first chamber 11, and the VAD method is adopted in the first chamber 11 to deposit loose bodies on the target rod 4;

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Abstract

A preparation device and method for an optical fiber preform. The preparation device comprises a reaction cavity, a clamping mechanism and a driving mechanism. The clamping mechanism is configured to fix a target rod. The driving mechanism is configured to drive the clamping mechanism to rotate around a vertical axis and move up and down along the vertical direction. A partition portion is provided in the reaction cavity, and the partition portion separates the reaction cavity to form a first chamber, a second chamber and a third chamber which are sequentially arranged from bottom to top. The target rod can be placed in the first chamber, the second chamber or the third chamber after moving along the vertical direction. The first chamber is configured to deposit a loose body on the target rod by using a VAD method. The second chamber is configured to perform dehydration and sintering treatment on the loose body to obtain the optical fiber preform. The third chamber is configured to perform annealing treatment on the optical fiber preform.

Description

光纤预制棒的制备装置及方法Preparation device and method of optical fiber preform 技术领域technical field
本公开涉及光纤生产技术领域，例如涉及一种光纤预制棒的制备装置及方法。The present disclosure relates to the technical field of optical fiber production, for example, to an optical fiber preform preparation device and method.
背景技术Background technique
随着光纤市场竞争的日益激烈，市场对光纤质量的要求越来越高，在光纤的生产过程中，光纤预制棒的品质直接影响到光纤产品的性能和参数指标等。With the increasingly fierce competition in the optical fiber market, the market has higher and higher requirements for the quality of optical fibers. In the production process of optical fibers, the quality of optical fiber preforms directly affects the performance and parameter indicators of optical fiber products.
光纤预制棒生产一般分为两种制备工艺：Optical fiber preform production is generally divided into two preparation processes:
一种是芯棒和外包层的制备相分离，然后按照芯棒或外包层的参数匹配相应的外包层或芯棒，常见的工艺方法如套柱套棒法(Rod in Cylinder，RIC)工艺法，该类制备工艺的优势在于可制备大直径光纤预制棒，但在芯棒和外包组合过程中可能会有参数不匹配、组合过程可能会引入杂质以及在运输或组合过程中易产生划伤等缺陷的问题。One is to separate the preparation phase of the mandrel and the outer cladding, and then match the corresponding outer cladding or mandrel according to the parameters of the mandrel or the outer cladding. The common process method is the Rod in Cylinder (RIC) process. , the advantage of this type of preparation process is that large-diameter optical fiber preforms can be prepared, but there may be parameter mismatches during the combination process of the core rod and the outer package, impurities may be introduced during the combination process, and scratches may be easily generated during transportation or combination. defect problem.
另外一种为首先制备光纤预制棒松散体(又称疏松体、烟灰体)，再通过烧结工序将光纤预制棒松散体烧结为光纤预制棒，常见的工艺如改进的化学气相沉积(Modified Chemical Vapor Deposition，MCVD)、轴向气相沉积(Vapour Axial Deposition，VAD)和外部气相沉积(Outside Vapour Deposition，OVD)等。此类制备工艺避免了光纤预制棒在运输过程中易产生划伤等缺陷的问题，但在生产过程中，沉积、烧结等不同工序需要将光纤预制棒在不同的装置之间运转，在转运过程中，因与外界空气接触，且环境温度骤变，光纤预制棒可能会产生杂质附着或在温度变化过程中因应力变化而导致裂棒的问题，进而严重影响后续光纤产品质量，不利于光纤损耗的降低和光纤强度的提升。The other is to first prepare the loose body of the optical fiber preform (also known as the soot body, soot body), and then sinter the loose body of the optical fiber preform into the optical fiber preform through the sintering process. Common processes such as modified chemical vapor deposition (Modified Chemical Vapor Deposition) Deposition, MCVD), axial vapor deposition (Vapour Axial Deposition, VAD) and external vapor deposition (Outside Vapour Deposition, OVD) and so on. This kind of preparation process avoids the problem that the optical fiber preform is prone to scratches and other defects during transportation. However, during the production process, different processes such as deposition and sintering need to run the optical fiber preform between different devices. Due to the contact with the outside air and the sudden change of the ambient temperature, the fiber preform may cause impurities to adhere or crack the rod due to stress changes during the temperature change process, which will seriously affect the quality of subsequent fiber products and is not conducive to fiber loss. decrease and increase the fiber strength.
发明内容SUMMARY OF THE INVENTION
本公开提供一种光纤预制棒的制备装置及方法，该装置能基于VAD法制备光纤预制棒，制备过程中无需将光纤预制棒在不同的装置之间运转，提升光纤预制棒品质，并可大幅提升生产效率。The present disclosure provides a preparation device and method for an optical fiber preform. The device can prepare an optical fiber preform based on the VAD method. During the preparation process, the optical fiber preform does not need to be operated between different devices, so the quality of the optical fiber preform can be improved, and the optical fiber preform can be greatly improved. Improve production efficiency.
本公开提供一种光纤预制棒的制备装置，包括反应腔体、卡持机构和驱动机构，所述卡持机构设置于所述反应腔体中并设置为固定靶棒，所述驱动机构 设置为驱动所述卡持机构绕竖直轴线转动并沿竖直方向上下移动；The present disclosure provides a preparation device for an optical fiber preform, which includes a reaction chamber, a clamping mechanism and a driving mechanism, wherein the clamping mechanism is arranged in the reaction chamber and is arranged to fix a target rod, and the driving mechanism is arranged as driving the clamping mechanism to rotate around the vertical axis and move up and down along the vertical direction;
所述反应腔体内设置有多个分隔部，多个所述分隔部将所述反应腔体分隔形成由下至上依次排布的第一腔室、第二腔室和第三腔室；The reaction chamber is provided with a plurality of partitions, and the plurality of partitions partition the reaction chamber to form a first chamber, a second chamber and a third chamber sequentially arranged from bottom to top;
所述分隔部具有贯通孔，所述贯通孔与所述靶棒同轴设置，以使所述靶棒在沿竖直方向移动后能够被置于所述第一腔室、所述第二腔室或所述第三腔室；The partition part has a through hole, and the through hole is coaxial with the target rod, so that the target rod can be placed in the first chamber and the second chamber after moving in the vertical direction chamber or said third chamber;
所述第一腔室被配置为采用VAD法进行沉积在所述靶棒上沉积形成松散体；The first chamber is configured to deposit on the target rod using a VAD method to form loose bodies;
所述第二腔室被配置为对所述松散体进行脱水处理及烧结处理，以获得光纤预制棒；The second chamber is configured to perform dehydration treatment and sintering treatment on the loose body to obtain an optical fiber preform;
所述第三腔室被配置为对所述光纤预制棒进行退火处理。The third chamber is configured to anneal the optical fiber preform.
还提供一种采用上述的光纤预制棒的制备装置制备光纤预制棒的方法，所述方法包括：Also provided is a method for preparing an optical fiber preform using the above-mentioned preparation device for an optical fiber preform, the method comprising:
将所述靶棒置于所述第一腔室，在所述第一腔室内采用VAD法在所述靶棒上沉积松散体；placing the target rod in the first chamber, and depositing loose bodies on the target rod by the VAD method in the first chamber;
提升所述靶棒，对处于所述第二腔室内的所述松散体进行脱水处理及烧结处理，以获得光纤预制棒；Lifting the target rod, and performing dehydration treatment and sintering treatment on the loose body in the second chamber to obtain an optical fiber preform;
继续提升所述光纤预制棒，对处于所述第三腔室的所述光纤预制棒进行退火处理。Continue to lift the optical fiber preform, and perform annealing treatment on the optical fiber preform in the third chamber.
附图说明Description of drawings
图1是本发明实施例中的光纤预制棒的制备装置的结构示意图；1 is a schematic structural diagram of a device for preparing an optical fiber preform in an embodiment of the present invention;
图2是本发明实施例中的刚性材料制成的分隔部与光纤预制棒的配合结构示意图；2 is a schematic diagram of the matching structure of a partition made of a rigid material and an optical fiber preform in an embodiment of the present invention;
图3是本发明实施例中的柔性材料制成的分隔部与光纤预制棒的配合结构示意图。FIG. 3 is a schematic diagram of the matching structure of a partition made of a flexible material and an optical fiber preform in an embodiment of the present invention.
图中：In the picture:
1、反应腔体；11、第一腔室；12、第二腔室；121、烧结腔室；122、脱水腔室；13、第三腔室；1. Reaction chamber; 11. First chamber; 12. Second chamber; 121. Sintering chamber; 122. Dehydration chamber; 13. Third chamber;
2、卡持机构；2. Card holding institutions;
3、驱动机构；31、第一动力组件；311、丝杆；312、支撑件；313、同步 带轮机构；314、第一电机；32、第二动力组件；321、升降座；322、第二电机；3. Driving mechanism; 31. The first power assembly; 311, the screw rod; 312, the support; 313, the synchronous pulley mechanism; 314, the first motor; 32, the second power assembly; two motors;
4、靶棒；4. Target stick;
5、分隔部；51、第一分隔部；52、第二分隔部；53、第三分隔部；5. Partition; 51, First partition; 52, Second partition; 53, Third partition;
6、喷灯；6. Blowtorch;
7、控制***；7. Control system;
10、光纤预制棒。10. Optical fiber preform.
具体实施方式Detailed ways
下面结合附图和实施例对本公开进行说明。此处所描述的具体实施例仅仅用于解释本公开。The present disclosure will be described below with reference to the accompanying drawings and embodiments. The specific embodiments described herein are merely used to explain the present disclosure.
在本公开的描述中，除非另有明确的规定和限定，术语“相连”、“连接”、“固定”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。可以具体情况理解上述术语在本公开中的具体含义。In the description of the present disclosure, unless otherwise expressly specified and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integrated ; It can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between the two elements. The specific meanings of the above terms in the present disclosure can be understood in specific situations.
在本公开中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且，第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方，或仅仅表示第一特征水平高度小于第二特征。In the present disclosure, unless otherwise expressly stated and defined, a first feature "on" or "under" a second feature may include the first and second features in direct contact, or may include the first and second features Not directly but through additional features between them. Also, the first feature being "above", "over" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is level higher than the second feature. The first feature is "below", "below" and "below" the second feature includes the first feature being directly below and diagonally below the second feature, or simply means that the first feature has a lower level than the second feature.
在本实施例的描述中，术语“上”、“下”、“右”等方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述和简化操作，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本公开的限制。此外，术语“第一”、“第二”仅仅用于在描述上加以区分，并没有特殊的含义。In the description of this embodiment, the terms "up", "down", "right" and other azimuth or positional relationships are based on the azimuth or positional relationship shown in the drawings, which are only for the convenience of description and simplification of operations, rather than indicating or It is implied that the device or element referred to must have, be constructed, and operate in a particular orientation, and therefore should not be construed as a limitation of the present disclosure. In addition, the terms "first" and "second" are only used for distinction in description, and have no special meaning.
请参阅图1，本实施例提供了一种光纤预制棒的制备装置，该制备装置包括反应腔体1、卡持机构2和驱动机构3。卡持机构2设置于反应腔体1中并设置为固定靶棒4，驱动机构3设置为驱动卡持机构2绕竖直轴线转动并沿竖直方向上下移动。反应腔体1内设置有多个分隔部5，多个分隔部5将反应腔体1分隔 形成由下至上依次排布的第一腔室11、第二腔室12和第三腔室13；分隔部5具有贯通孔，贯通孔与靶棒4同轴设置，以使靶棒4在沿竖直方向移动后能够被置于第一腔室11、第二腔室12或第三腔室13，其中：Referring to FIG. 1 , this embodiment provides a preparation device for an optical fiber preform. The preparation device includes a reaction chamber 1 , a clamping mechanism 2 and a driving mechanism 3 . The clamping mechanism 2 is arranged in the reaction chamber 1 and is arranged to fix the target rod 4, and the driving mechanism 3 is arranged to drive the clamping mechanism 2 to rotate around the vertical axis and move up and down in the vertical direction. The reaction chamber 1 is provided with a plurality of partitions 5, and the plurality of partitions 5 partition the reaction chamber 1 to form a first chamber 11, a second chamber 12 and a third chamber 13 arranged in sequence from bottom to top; The partition 5 has a through hole, and the through hole is arranged coaxially with the target rod 4 so that the target rod 4 can be placed in the first chamber 11 , the second chamber 12 or the third chamber 13 after moving in the vertical direction ,in:
第一腔室11被配置为采用VAD法在靶棒4上沉积形成松散体；The first chamber 11 is configured to deposit a loose body on the target rod 4 by the VAD method;
第二腔室12被配置为对松散体进行脱水处理及烧结处理，以获得光纤预制棒10；The second chamber 12 is configured to perform dehydration treatment and sintering treatment on the loose body to obtain the optical fiber preform 10;
第三腔室13被配置为对光纤预制棒10进行退火处理。The third chamber 13 is configured to anneal the optical fiber preform 10 .
沉积：光纤原材料在一定的环境下发生化学反应生成掺杂的石英玻璃的工艺过程；Deposition: The process of chemical reaction of optical fiber raw materials in a certain environment to generate doped silica glass;
烧结：将沉积后的空心玻璃管在一定的热源下逐渐烧成实心玻璃棒的工艺过程。借由上述结构，该制备装置通过一个反应腔体1完成光纤预制棒10的沉积、脱水、烧结及退火处理工序，直接产出玻璃化的光纤预制棒10成品。由于在制备过程中无需将光纤预制棒10在不同的装置之间运转，避免光纤预制棒10与外界空气接触并附着杂质的情况，提高光纤预制棒10掺杂纯度，同时也能避免光纤预制棒10因转运所引起的温度骤变，最大限度地减少光纤预制棒10在工序过程中的温度变化带来的内部应力，避免裂棒等问题，例如可适用于制造超低损耗光纤、高强度光纤及特种光纤。Sintering: The process of gradually sintering the deposited hollow glass tube into a solid glass rod under a certain heat source. With the above structure, the preparation device completes the deposition, dehydration, sintering and annealing treatment processes of the optical fiber preform 10 through a reaction chamber 1 , and directly produces the finished product of the optical fiber preform 10 . Since the optical fiber preform 10 does not need to be operated between different devices during the preparation process, the situation that the optical fiber preform 10 is in contact with the outside air and adheres to impurities is avoided, the doping purity of the optical fiber preform 10 is improved, and at the same time, the optical fiber preform can be avoided. 10. The sudden temperature change caused by the transfer can minimize the internal stress caused by the temperature change of the optical fiber preform 10 during the process, and avoid problems such as cracking of the rod. and special optical fibers.
在本实施例中，反应腔体1可以大体呈一空心圆柱体，反应腔体1内部设置有加热器件(图中未示出)和温度传感器(图中未示出)，以能够提供适于光纤预制棒10制备的高温环境。反应腔体1外部可设置循环水管道(图中未示出)，以满足冷却需求。反应腔体1顶部设置有能密封或开启该反应腔体1的腔盖(图中未示出)，以允许靶棒4移入反应腔体1，或允许靶棒4携带光纤预制棒10移出反应腔体1。In this embodiment, the reaction chamber 1 may be generally a hollow cylinder, and a heating device (not shown in the figure) and a temperature sensor (not shown in the figure) are provided inside the reaction chamber 1, so as to provide suitable The high temperature environment in which the optical fiber preform 10 is prepared. A circulating water pipeline (not shown in the figure) can be provided outside the reaction chamber 1 to meet cooling requirements. The top of the reaction chamber 1 is provided with a chamber cover (not shown in the figure) that can seal or open the reaction chamber 1 to allow the target rod 4 to move into the reaction chamber 1, or allow the target rod 4 to carry the optical fiber preform 10 to move out of the reaction chamber. Cavity 1.
第一腔室11内设置有喷灯6，喷灯6包括芯棒沉积灯和包层沉积灯，自反应腔体1外部连通至第一腔室11的喂料***(图中未示出)能向第一腔室11提供高纯度的SiCl 4及其他掺杂物。同时，与第一腔室11、第二腔室12和第三腔室13均连通的配气***(图中未示出)能够向第一腔室11、第二腔室12和第三腔室13提供惰性气体，进而使第一腔室11、第二腔室12和第三腔室13内形成惰性气氛。 The first chamber 11 is provided with a torch 6, and the torch 6 includes a mandrel deposition lamp and a cladding deposition lamp. The first chamber 11 provides high purity SiCl 4 and other dopants. At the same time, the gas distribution system (not shown in the figure) communicating with the first chamber 11 , the second chamber 12 and the third chamber 13 can supply the first chamber 11 , the second chamber 12 and the third chamber The chamber 13 provides an inert gas, so that an inert atmosphere is formed in the first chamber 11 , the second chamber 12 and the third chamber 13 .
卡持机构2包括一卡盘，卡盘设置为固定靶棒4。The clamping mechanism 2 includes a chuck, and the chuck is configured to fix the target rod 4 .
驱动机构3包括第一动力组件31和第二动力组件32。第一动力组件31包括一沿竖直方向自反应腔体1顶部伸入第三腔室13的丝杆311，该丝杆311的下端可转动地连接于与第三腔室13对应的反应腔体1的腔壁固接的支撑件312， 该丝杆311的上端与一同步带轮机构313传动连接，该同步带轮机构313由第一电机314驱动。在一实施例中，丝杆311也可以位于腔室外部。第二动力组件32包括与丝杆311螺接的升降座321，以及固定于升降座321的第二电机322，其中升降座321被布置为仅能沿竖直方向移动，该第二电机322被布置为转轴平行于竖直方向，第二电机322的转轴末端与卡盘固定。通过上述结构，驱动机构3能够驱动卡盘绕竖直轴线转动并沿竖直方向上下移动，使靶棒4被置于第一腔室11、第二腔室12或第三腔室13。The driving mechanism 3 includes a first power assembly 31 and a second power assembly 32 . The first power assembly 31 includes a screw rod 311 extending from the top of the reaction chamber 1 into the third chamber 13 along the vertical direction. The lower end of the screw rod 311 is rotatably connected to the reaction chamber corresponding to the third chamber 13 The support member 312 fixedly connected to the cavity wall of the body 1, the upper end of the screw rod 311 is drivingly connected with a synchronous pulley mechanism 313, and the synchronous pulley mechanism 313 is driven by the first motor 314. In one embodiment, the lead screw 311 may also be located outside the chamber. The second power assembly 32 includes a lift seat 321 screwed with the lead screw 311, and a second motor 322 fixed to the lift seat 321, wherein the lift seat 321 is arranged to move only in the vertical direction, and the second motor 322 is Arranged so that the rotating shaft is parallel to the vertical direction, the end of the rotating shaft of the second motor 322 is fixed to the chuck. Through the above structure, the driving mechanism 3 can drive the chuck to rotate around the vertical axis and move up and down in the vertical direction, so that the target rod 4 is placed in the first chamber 11 , the second chamber 12 or the third chamber 13 .
以上关于卡持机构2和驱动机构3的结构在本实施例中仅作为示例性说明，可基于相关技术配置具有相同或类似技术效果的机构，在此不作限定。The above structures of the clamping mechanism 2 and the driving mechanism 3 are merely illustrative in this embodiment, and mechanisms with the same or similar technical effects may be configured based on related technologies, which are not limited herein.
本实施例中，该制备装置还包括控制***7，该控制***7包含控制模块和信息采集模块。其中控制模块包括可编程逻辑控制器(Programmable Logic Controller，PLC)控制器及操作台等。信息采集模块包括设置于第一腔室11、第二腔室12和/或第三腔室13的位置感应器(图中未示出)及在线监测装置(图中未示出，可包括温度传感器、流量计、激光测距仪等)，信息采集模块能够将其采集的松散体端头位置、运行速度、运行距离、光纤预制棒10的直径、光纤预制棒10的透光度、沉积供料量、喷灯6的氢氧焰气体流量等信息提供至控制模块，控制模块继而能够借由上述信息调节该制备装置中加热器件、喂料***、配气***、喷灯6和驱动机构3等部件的启停及运行状态，以控制松散体沉积量及烧结腔的温度等，实现光纤预制棒10制备过程中沉积和烧结等工序的联动及转换。In this embodiment, the preparation device further includes a control system 7, and the control system 7 includes a control module and an information collection module. The control module includes a programmable logic controller (Programmable Logic Controller, PLC) controller and an operating console. The information acquisition module includes a position sensor (not shown in the figure) and an on-line monitoring device (not shown in the figure, which may include temperature sensor, flowmeter, laser rangefinder, etc.), the information acquisition module can collect the loose body end position, running speed, running distance, diameter of the optical fiber preform 10, transmittance of the optical fiber preform 10, deposition supply The information such as the amount of material and the flow rate of the oxyhydrogen flame of the torch 6 is provided to the control module, and the control module can then adjust the heating device, the feeding system, the gas distribution system, the torch 6 and the driving mechanism 3 and other components in the preparation device by means of the above information In order to control the deposition amount of the loose body and the temperature of the sintering chamber, etc., the linkage and conversion of the deposition and sintering processes during the preparation of the optical fiber preform 10 are realized.
上述控制***7中，控制模块和信息采集模块在采用VAD法制备光纤预制棒10的制备设备中已有应用，故控制***7所采用的元器件和电路/通讯结构在此不做赘述，而基于本实施例提供的制备装置所进行的制备过程中，控制***7所需要进行的特定信息采集及处理过程将在下文的案例中说明。In the above-mentioned control system 7, the control module and the information acquisition module have been used in the preparation equipment for preparing the optical fiber preform 10 by the VAD method, so the components and the circuit/communication structure adopted by the control system 7 are not repeated here, and In the preparation process based on the preparation device provided in this embodiment, the specific information collection and processing process required by the control system 7 will be described in the following case.
请参阅图2，在本实施例中，分隔部5可以由金属等刚性材料制成，位于每个分隔部5上的贯通孔的孔径对应地小于松散体或光纤预制棒10的直径，以使分隔部5与松散体或光纤预制棒10过盈插接。在一实施例中，第一分隔部51上的贯通孔的孔径小于松散体的直径，第二分隔部52上的贯通孔的孔径小于光纤预制棒10的直径，第三分隔部53上的贯通孔的孔径小于光纤预制棒10的直径。Referring to FIG. 2 , in this embodiment, the partitions 5 can be made of rigid materials such as metal, and the diameter of the through holes located on each partition 5 is correspondingly smaller than the diameter of the loose body or the optical fiber preform 10 , so that the The partition 5 is interference-connected with the loose body or the optical fiber preform 10 . In one embodiment, the diameter of the through hole on the first partition 51 is smaller than the diameter of the loose body, the diameter of the through hole on the second partition 52 is smaller than the diameter of the optical fiber preform 10, and the through hole on the third partition 53 The diameter of the hole is smaller than the diameter of the optical fiber preform 10 .
当松散体/光纤预制棒10同时处于两个乃至三个腔室时，例如，当松散体的上半部分处于第二腔室12，下半部分处于第一腔室11，此时，位于第一腔室11和第二腔室12之间的第一分隔部51与松散体紧密地抵接，使第一腔室11和第二腔室12相阻隔，形成独立的气氛环境，便于处于第一腔室11的松散体可继 续在第一腔室11的底部进行沉积，而处于第一腔室11的松散体则可以被进行脱水或烧结处理。When the loose body/optical fiber preform 10 is in two or even three chambers at the same time, for example, when the upper half of the loose body is in the second chamber 12 and the lower half is in the first chamber 11, at this time, it is located in the first chamber 11. The first partition 51 between the first chamber 11 and the second chamber 12 is in close contact with the loose body, so that the first chamber 11 and the second chamber 12 are blocked, forming an independent atmosphere, which is convenient for the first chamber 11 and the second chamber 12. The loose bodies of a chamber 11 can continue to be deposited at the bottom of the first chamber 11 , and the loose bodies in the first chamber 11 can be dehydrated or sintered.
该柔性的分隔部5可以由陶瓷纤维制成，陶瓷纤维具有耐高温、导热系数低、容重轻、使用寿命长、抗拉强度大、弹性好及无毒等特性，受热时不产生挥发物质，不影响光纤预制棒10的品质。The flexible partition 5 can be made of ceramic fiber, which has the characteristics of high temperature resistance, low thermal conductivity, light bulk density, long service life, high tensile strength, good elasticity and non-toxicity, and does not produce volatile substances when heated. The quality of the optical fiber preform 10 is not affected.
在一实施例中，当分隔部5采用柔性材料时，光纤预制棒10的直径与贯通孔的孔径的差值可以为小于3mm，以确保松散体/光纤预制棒10能够顺利通过贯通孔。In one embodiment, when the partition 5 is made of a flexible material, the difference between the diameter of the optical fiber preform 10 and the diameter of the through hole can be less than 3 mm to ensure that the loose body/optical fiber preform 10 can pass through the through hole smoothly.
请参阅图3，在一个可选的实施方式中，分隔部5还可以由柔性材料制成，位于每个分隔部5上的贯通孔与松散体或光纤预制棒10之间均具有预设间隙，以确保沉积获得的松散体在经过位于第一腔室11和第二腔室12之间的第一分隔部51时，不与该第一分隔部51刮擦；同时确保烧结获得的光纤预制棒10在经过位于第二腔室12和第三腔室13之间的第二分隔部52时，不与第二分隔部52刮擦。该预设间隙可以为1-3mm。在一实施例中，每个分隔部5上的贯通孔与松散体或光纤预制棒10之间均具有预设间隙可以是：第一分隔部51上的贯通孔是和松散体具有预设间隙，第二分隔部52上的贯通孔是和光纤预制棒10具有预设间隙，第三分隔部53上的贯通孔是和光纤预制棒10具有预设间隙。Referring to FIG. 3 , in an optional embodiment, the partitions 5 can also be made of flexible materials, and there are preset gaps between the through holes located on each partition 5 and the loose body or the optical fiber preform 10 , to ensure that the loose body obtained by deposition does not scratch with the first partition 51 when passing through the first partition 51 between the first chamber 11 and the second chamber 12; When the rod 10 passes through the second partition 52 between the second chamber 12 and the third chamber 13 , the second partition 52 is not scratched. The preset gap may be 1-3mm. In one embodiment, there is a preset gap between the through hole on each partition 5 and the loose body or the optical fiber preform 10 , which may be: the through hole on the first partition 51 has a preset gap with the loose body. , the through holes on the second partition part 52 have a preset gap with the optical fiber preform 10 , and the through holes on the third partition part 53 have a preset gap with the optical fiber preform 10 .
在一实施例中，由于在沉积、脱水及烧结等处理过程，松散体/光纤预制棒10的直径将发生变化，每个分隔部5上设置的贯通孔的孔径可对应地进行调整，而非孔径相同。In one embodiment, due to the process of deposition, dehydration and sintering, the diameter of the loose body/optical fiber preform 10 will change, and the diameter of the through holes provided on each partition 5 can be adjusted correspondingly instead of The apertures are the same.
此外，当分隔部5采用刚性材料，即松散体/光纤预制棒10与分隔部5之间形成有间隙时，第一腔室11和第二腔室12之间连通，这并非意味着第一腔室11和第二腔室12无法同时工作。例如，当第一腔室11进行沉积处理时，第二腔室12内仅填充惰性气体即可进行烧结处理乃至脱水处理，自第二腔室12流向第一腔室11的惰性气体不会影响第一腔室11的反应气氛环境。In addition, when the partition part 5 is made of rigid material, that is, a gap is formed between the loose body/fiber preform 10 and the partition part 5, the first chamber 11 and the second chamber 12 communicate with each other, which does not mean that the first chamber 11 and the second chamber 12 communicate with each other. The chamber 11 and the second chamber 12 cannot work simultaneously. For example, when the deposition process is performed in the first chamber 11 , the second chamber 12 can be sintered or even dehydrated by only filling the inert gas, and the inert gas flowing from the second chamber 12 to the first chamber 11 will not affect the The reaction atmosphere of the first chamber 11 .
因此，在本实施例中，第一腔室11和第二腔室12之间的第一分隔部51和第三分隔部53可以选用刚性材料，第二腔室12及第三腔室13之间则可以选用柔性材料制成。Therefore, in this embodiment, the first partition 51 and the third partition 53 between the first chamber 11 and the second chamber 12 can be made of rigid materials, and the second chamber 12 and the third chamber 13 are made of rigid materials. The room can be made of flexible materials.
在沉积处理前，若靶棒4下沉的最低位置与第一分隔部51的高度差小于松散体的总长度，则在沉积处理过程中，随着靶棒4的提升，即可以形成如上述的能使得松散体同时处于第一腔室11和第二腔室12中的情况，即松散体的下半部分处于第一腔室11，上半部分处于第二腔室12，进而使得第一腔室11和第二腔室12能够同时进行沉积处理和脱水处理，或者，第一腔室11和第二腔 室12能够同时进行沉积处理和烧结处理，以提高生产效率。Before the deposition process, if the height difference between the lowest position where the target rod 4 sinks and the first partition 51 is smaller than the total length of the loose body, then during the deposition process, with the lifting of the target rod 4, the above-mentioned can make the loose body in the first chamber 11 and the second chamber 12 at the same time, that is, the lower half of the loose body is in the first chamber 11, and the upper half is in the second chamber 12, so that the first The chamber 11 and the second chamber 12 can perform deposition processing and dehydration processing simultaneously, or the first chamber 11 and the second chamber 12 can perform deposition processing and sintering processing simultaneously to improve production efficiency.
而若第一腔室11具有足够的高度，使得靶棒4下沉的最低位置与第一分隔部51的高度差大于松散体的总长度，则可以在第一腔室11沉积获得整个松散体后，再将松散体提升至第二腔室12进行脱水或烧结处理。However, if the first chamber 11 has a sufficient height, so that the height difference between the lowest position where the target rod 4 sinks and the first partition 51 is greater than the total length of the loose body, the entire loose body can be obtained by deposition in the first chamber 11 Afterwards, the loose body is lifted to the second chamber 12 for dehydration or sintering treatment.
在一实施例中，所述第二腔室12内设置有所述分隔部5，所述分隔部5将所述第二腔室12分隔形成上下连通的烧结腔室121和脱水腔室122，所述烧结腔室121和所述脱水腔室122被分别配置为对所述松散体进行所述烧结处理及所述脱水处理。In one embodiment, the partition part 5 is provided in the second chamber 12, and the partition part 5 partitions the second chamber 12 to form a sintering chamber 121 and a dehydration chamber 122 that communicate up and down, The sintering chamber 121 and the dehydration chamber 122 are respectively configured to perform the sintering process and the dehydration process on the loose body.
在一实施例中，所述烧结腔室121和所述脱水腔室122中的至少一种的高度小于所述松散体的总长度，以使所述烧结腔室121和所述脱水腔室122能够同时进行所述脱水处理及所述烧结处理。In one embodiment, the height of at least one of the sintering chamber 121 and the dehydration chamber 122 is less than the total length of the loose body, so that the sintering chamber 121 and the dehydration chamber 122 The dehydration treatment and the sintering treatment can be performed simultaneously.
在一实施例中，所述第二腔室12的高度小于所述松散体的总长度，以使所述第一腔室11、所述烧结腔室121和所述脱水腔室122能够同时进行沉积处理、所述脱水处理及所述烧结处理。In one embodiment, the height of the second chamber 12 is less than the total length of the loose body, so that the first chamber 11 , the sintering chamber 121 and the dehydration chamber 122 can be simultaneously performed Deposition treatment, the dehydration treatment, and the sintering treatment.
在一实施例中，所述烧结腔室121和所述脱水腔室122的高度均大于所述松散体的总长度，以使所述松散体能够分别在所述烧结腔室121和所述脱水腔室122内整体脱水和整体烧结。In one embodiment, the heights of the sintering chamber 121 and the dehydration chamber 122 are both greater than the total length of the loose body, so that the loose body can be dehydrated in the sintering chamber 121 and the dehydration chamber respectively. The chamber 122 is integrally dehydrated and integrally sintered.
在一实施例中，所述第三腔室13的高度大于所述光纤预制棒10的总长度，以使所述光纤预制棒10能够整体地在所述第三腔室13内进行退火处理。In one embodiment, the height of the third chamber 13 is greater than the total length of the optical fiber preform 10 , so that the optical fiber preform 10 can be annealed in the third chamber 13 as a whole.
在一实施例中，所述分隔部5由刚性材料制成，位于每个分隔部5上的所述贯通孔与所述松散体或所述光纤预制棒10之间均具有预设间隙。In one embodiment, the partitions 5 are made of rigid material, and there is a predetermined gap between the through holes located on each partition 5 and the loose body or the optical fiber preform 10 .
在一实施例中，所述分隔部5由柔性材料制成，位于每个分隔部5上的所述贯通孔的孔径对应地小于所述松散体或所述光纤预制棒10的直径，以使所述分隔部5与所述松散体或所述光纤预制棒10过盈插接。In one embodiment, the partitions 5 are made of flexible materials, and the diameter of the through holes on each partition 5 is correspondingly smaller than the diameter of the loose body or the optical fiber preform 10, so that the The partition part 5 is interference-connected with the loose body or the optical fiber preform 10 .
在一实施例中，所述分隔部5由陶瓷纤维制成。In one embodiment, the partitions 5 are made of ceramic fibers.
在一个实施方式中，第二腔室12内设置有第三分隔部53，第三分隔部53将第二腔室12分隔形成上下连通的烧结腔室121和脱水腔室122，烧结腔室121和脱水腔室122被分别配置为对松散体进行烧结处理及脱水处理。In one embodiment, the second chamber 12 is provided with a third partition 53 , and the third partition 53 separates the second chamber 12 to form a sintering chamber 121 and a dehydration chamber 122 that communicate up and down, and the sintering chamber 121 and the dehydration chamber 122 are respectively configured to perform sintering treatment and dehydration treatment on the loose body.
在一实施例中，烧结腔室121和/或脱水腔室122的高度可以小于松散体的总长度，以使烧结腔室121和脱水腔室122能够同时进行脱水处理及烧结处理，提高生产效率。In one embodiment, the height of the sintering chamber 121 and/or the dehydration chamber 122 may be smaller than the total length of the loose body, so that the sintering chamber 121 and the dehydration chamber 122 can perform dehydration treatment and sintering treatment at the same time, thereby improving production efficiency .
在一实施例中，烧结腔室121和脱水腔室122的高度之和可以小于松散体 的总长度，以使第一腔室11、烧结腔室121和脱水腔室122能够同时进行沉积处理、脱水处理及烧结处理。In one embodiment, the sum of the heights of the sintering chamber 121 and the dehydration chamber 122 may be less than the total length of the loose body, so that the first chamber 11, the sintering chamber 121 and the dehydration chamber 122 can simultaneously perform deposition processing, Dehydration treatment and sintering treatment.
在一实施例中，第三腔室13的高度大于光纤预制棒10的总长度，以使光纤预制棒10能够整体地在第三腔室13内进行退火处理，以确保退火时，整个光纤预制棒10的多部分应力得以同步降低。In one embodiment, the height of the third chamber 13 is greater than the total length of the optical fiber preform 10, so that the optical fiber preform 10 can be annealed in the third chamber 13 as a whole, so as to ensure that the entire optical fiber preform 10 can be annealed during annealing. The multi-section stress of the rod 10 is simultaneously reduced.
在一实施例中，第一腔室11、第二腔室12和第三腔室13，乃至组合构成第二腔室12的烧结腔室121和脱水腔室122均可以被设置为高度大于松散体/光纤预制棒10的总长度，以使沉积、脱水、烧结和退火处理单独进行。可基于制备需求对第一腔室11、第二腔室12和第三腔室13的高度进行适应性选择，以上仅作为示例性说明。In one embodiment, the first chamber 11 , the second chamber 12 and the third chamber 13 , and even the sintering chamber 121 and the dehydration chamber 122 which constitute the second chamber 12 in combination can be set to be higher than the loose The overall length of the body/fiber preform 10 so that the deposition, dehydration, sintering and annealing treatments are performed individually. The heights of the first chamber 11 , the second chamber 12 and the third chamber 13 may be adaptively selected based on production requirements, and the above is only an exemplary illustration.
即，实施者可基于所要制备的光纤预制棒的工艺需求，以及沉积、脱水、烧结和退火处理所耗用时间的比例等，对多个腔室的高度进行适应性调整，以使制备装置适于不间断地制备。That is, the practitioner can adjust the height of the multiple chambers adaptively based on the process requirements of the optical fiber preform to be prepared and the proportion of the time spent in the deposition, dehydration, sintering and annealing treatments, etc., so as to make the preparation device suitable for use. in continuous preparation.
下面，以案例对该制备装置及制备方法进行说明。Hereinafter, the preparation device and the preparation method will be described with an example.
案例case
请参阅图1，该案例中，反应腔体1包括由下至上依次设置的沉积腔室(第一腔室11)、脱水腔室122、烧结腔室121(与脱水腔室122共同形成第二腔室12)和退火腔室(第三腔室13)。沉积腔室、脱水腔室122和烧结腔室121三者的高度之和小于待制备的光纤预制棒10的总长度，退火腔室的高度大于待制备的光纤预制棒10的总长度。Referring to FIG. 1 , in this case, the reaction chamber 1 includes a deposition chamber (a first chamber 11 ), a dehydration chamber 122 , and a sintering chamber 121 (which together with the dehydration chamber 122 form a second chamber 121 ) sequentially arranged from bottom to top chamber 12) and an annealing chamber (third chamber 13). The sum of the heights of the deposition chamber, the dehydration chamber 122 and the sintering chamber 121 is less than the total length of the optical fiber preform 10 to be prepared, and the height of the annealing chamber is greater than the total length of the optical fiber preform 10 to be prepared.
基于VAD法，该制备装置制备光纤预制棒的过程如下：Based on the VAD method, the preparation process of the preparation device to prepare the optical fiber preform is as follows:
将靶棒4顶端固定于卡盘，确保靶棒4处于竖直状态，将靶棒4移入反应腔体1后密封反应腔体1，驱动机构3驱动靶棒4下移至靶棒4的底端置于沉积腔室中。Fix the top of the target rod 4 on the chuck to ensure that the target rod 4 is in a vertical state, move the target rod 4 into the reaction chamber 1 and seal the reaction chamber 1, and the drive mechanism 3 drives the target rod 4 to move down to the bottom of the target rod 4 The end is placed in the deposition chamber.
控制***7控制喂料***将SiCl 4及其他掺杂物等原料按照预设的流量值喂至芯棒沉积灯和包层沉积灯，芯棒沉积灯首先点燃，生成以SiO 2为主要成分的粉末，并在靶棒4上喷射形成一段芯棒，包层沉积灯随后点燃，在芯棒外喷射形成包层。与此同时，控制***7控制驱动机构3动作，以驱动靶棒4旋转和提升，制备出沿靶棒4轴向生长的具有特定包芯比和直径的松散体。 The control system 7 controls the feeding system to feed the raw materials such as SiCl 4 and other dopants to the mandrel deposition lamp and the cladding deposition lamp according to the preset flow value. The powder is sprayed on the target rod 4 to form a section of mandrel, the cladding deposition lamp is then ignited, and the cladding is formed by spraying outside the mandrel. At the same time, the control system 7 controls the action of the driving mechanism 3 to drive the target rod 4 to rotate and lift, so as to prepare a loose body with a specific core-skin ratio and diameter growing along the axial direction of the target rod 4 .
在松散体制备过程中，位置感应器及在线监测装置持续监测松散体的端头位置、运行速度、运行距离、光纤预制棒10的直径、光纤预制棒10的透光度、沉积供料量、喷灯6氢氧焰气体流量等信息，以作为控制***7控制喷灯6的火焰温度、驱动机构3的旋转和提升速度、喂料进料速度、沉积腔室的温度和 气体氛围等参数调整的依据。During the preparation of the loose body, the position sensor and the on-line monitoring device continuously monitor the position of the end of the loose body, the running speed, the running distance, the diameter of the optical fiber preform 10, the transmittance of the optical fiber preform 10, the amount of deposited material, The information such as the gas flow rate of the oxyhydrogen flame of the torch 6 is used as the basis for the control system 7 to control the flame temperature of the torch 6, the rotation and lifting speed of the drive mechanism 3, the feeding speed, the temperature of the deposition chamber and the gas atmosphere and other parameters. .
随着靶棒4的提升，松散体进入脱水腔室122，当控制***7接收到位于脱水腔室122内的位置感应器传输的感应信号，控制***7控制脱水腔室122内的加热器件工作，并使脱水腔室122升温至1300℃对松散体进行脱水处理，脱水后芯棒羟基含量小于或等于10ppb。With the lifting of the target rod 4, the loose body enters the dehydration chamber 122. When the control system 7 receives the sensing signal transmitted by the position sensor located in the dehydration chamber 122, the control system 7 controls the heating device in the dehydration chamber 122 to work. , and the temperature of the dehydration chamber 122 is raised to 1300° C. to perform dehydration treatment on the loose body, and the hydroxyl content of the mandrel after dehydration is less than or equal to 10ppb.
随着靶棒4的继续提升，脱水完成后的松散体进入烧结腔室121，当控制***7接收到位于烧结腔室121内的位置感应器传输的感应信号，控制***7控制烧结腔室121内的加热器件工作，并使脱水腔室122升温至1500℃进行烧结处理，烧结时配气***向烧结腔室121内通入氦气，保持常压压力约100Pa，并可以通入含氟气体进行渗氟处理。在进行包层烧结时可采用负压烧结，此时不通气体并进行抽气保持负压，负压一般为0.01Pa以下的真空，以便消除玻璃化后光纤预制棒10内残留的闭合气泡，提高光纤预制棒品质并缩短后续退火的时间。烧结出直径超过90mm、芯棒及包层质量好、相对折射率最低为-0.006的光纤预制棒10，位于烧结腔室121内的在线监测装置采集烧结后光纤预制棒10的透光度等参数，便于控制***7基于上述参数控制驱动机构3的旋转及提升速度，调节沉积速度及沉积腔室内气体氛围等，确保光纤预制棒10的品质。As the target rod 4 continues to be lifted, the dehydrated loose body enters the sintering chamber 121 . When the control system 7 receives the sensing signal transmitted by the position sensor located in the sintering chamber 121 , the control system 7 controls the sintering chamber 121 The heating device inside works, and the dehydration chamber 122 is heated to 1500 ° C for sintering treatment. During sintering, the gas distribution system introduces helium gas into the sintering chamber 121 to maintain the normal pressure of about 100Pa, and can be fed with fluorine-containing gas. Fluoride treatment. Negative pressure sintering can be used during cladding sintering. At this time, no gas is allowed to pass through and a negative pressure is maintained. The negative pressure is generally a vacuum below 0.01Pa, so as to eliminate the closed bubbles remaining in the optical fiber preform 10 after vitrification and improve the Fiber preform quality and shorten the time of subsequent annealing. An optical fiber preform 10 with a diameter of more than 90 mm, good quality of core rod and cladding, and a minimum relative refractive index of -0.006 is sintered. The online monitoring device located in the sintering chamber 121 collects parameters such as the transmittance of the optical fiber preform 10 after sintering. , it is convenient for the control system 7 to control the rotation and lifting speed of the driving mechanism 3 based on the above parameters, adjust the deposition speed and the gas atmosphere in the deposition chamber, etc., to ensure the quality of the optical fiber preform 10 .
随着靶棒4的提升，烧结后光纤预制棒10整体进入退火腔室内进行退火处理，在高温环境中，配气***向退火腔室通入氦气或氮气等惰性气体，降低光纤预制棒10内部应力，防止光纤预制棒10因应力过大开裂，最终制备出长度超过2000mm的大尺寸光纤预制棒10。With the lifting of the target rod 4, the sintered optical fiber preform 10 enters the annealing chamber as a whole for annealing treatment. In a high temperature environment, the gas distribution system introduces inert gas such as helium or nitrogen into the annealing chamber to lower the optical fiber preform 10. The internal stress prevents the optical fiber preform 10 from cracking due to excessive stress, and finally a large-sized optical fiber preform 10 with a length of more than 2000 mm is prepared.
将得到高质量的光纤预制棒10移出反应腔体1，并将光纤预制棒10取下即可。The high-quality optical fiber preform 10 is removed from the reaction chamber 1, and the optical fiber preform 10 is removed.
在沉积处理过程中，提升至脱水腔室122乃至烧结腔室121的松散体可以同时进行脱水处理或烧结处理，考虑到沉积处理速度相较于脱水处理和烧结处理速度较慢，脱水处理和烧结处理均可以间断进行。During the deposition process, the loose body lifted to the dehydration chamber 122 and even the sintering chamber 121 can be dehydrated or sintered at the same time. Considering that the deposition process is slower than the dehydration and sintering, dehydration and sintering Processing can be performed intermittently.
退火处理可为在整个松散体均完成烧结形成光纤预制棒10后，再在退火腔室内进行，以确保退火时整个光纤预制棒10整体退火，使其多部分应力得以同步降低，避免光纤预制棒10多部分应力消除不一致。The annealing treatment can be performed in the annealing chamber after the entire loose body is sintered to form the optical fiber preform 10, so as to ensure that the entire optical fiber preform 10 is annealed as a whole during annealing, so that the stress of multiple parts can be simultaneously reduced, so as to avoid the optical fiber preform. 10+ part stress relief inconsistencies.
可选地，除氦气外，上述作为反应气氛的惰性气体还可以为具有良好导热性的氩气。Optionally, in addition to helium, the inert gas used as the reaction atmosphere can also be argon with good thermal conductivity.
本实施例还提供了一种采用上述的制备装置制备光纤预制棒的方法，该方法包括：This embodiment also provides a method for preparing an optical fiber preform by using the above-mentioned preparation device, and the method includes:
将靶棒4置于第一腔室11，在第一腔室11内采用VAD法在靶棒4上沉积 松散体；The target rod 4 is placed in the first chamber 11, and the VAD method is adopted in the first chamber 11 to deposit loose bodies on the target rod 4;
提升靶棒4，对处于第二腔室12内的松散体进行脱水处理及烧结处理，以获得光纤预制棒10；Lift the target rod 4, and perform dehydration treatment and sintering treatment on the loose body in the second chamber 12 to obtain the optical fiber preform 10;
继续提升光纤预制棒10，对处于第三腔室13的光纤预制棒10进行退火处理。Continue to lift the optical fiber preform 10 , and perform annealing treatment on the optical fiber preform 10 in the third chamber 13 .
该方法的实施方式与上述案例基本相同，在此不做赘述。The implementation of this method is basically the same as the above case, and will not be repeated here.

Claims (12)

  1. 一种光纤预制棒的制备装置，包括反应腔体(1)、卡持机构(2)和驱动机构(3)，所述卡持机构(2)设置于所述反应腔体(1)中并设置为固定靶棒(4)，所述驱动机构(3)设置为驱动所述卡持机构(2)绕竖直轴线转动并沿竖直方向上下移动，其中：A device for preparing an optical fiber preform, comprising a reaction chamber (1), a clamping mechanism (2) and a driving mechanism (3), wherein the clamping mechanism (2) is arranged in the reaction chamber (1) and It is arranged to fix the target rod (4), and the driving mechanism (3) is arranged to drive the clamping mechanism (2) to rotate around the vertical axis and move up and down in the vertical direction, wherein:
    所述反应腔体(1)内设置有多个分隔部(5)，所述多个分隔部(5)将所述反应腔体(1)分隔形成由下至上依次排布的第一腔室(11)、第二腔室(12)和第三腔室(13)；The reaction chamber (1) is provided with a plurality of partitions (5), and the plurality of partitions (5) partition the reaction chamber (1) to form first chambers sequentially arranged from bottom to top (11), a second chamber (12) and a third chamber (13);
    所述分隔部(5)具有贯通孔，所述贯通孔与所述靶棒(4)同轴设置，以使所述靶棒(4)在沿竖直方向移动后能够被置于所述第一腔室(11)、所述第二腔室(12)或所述第三腔室(13)；The partition portion (5) has a through hole, and the through hole is coaxially arranged with the target rod (4), so that the target rod (4) can be placed in the second rod after moving in the vertical direction. a chamber (11), the second chamber (12) or the third chamber (13);
    所述第一腔室(11)被配置为采用轴向气相沉积VAD法在所述靶棒(4)上沉积形成松散体；The first chamber (11) is configured to deposit a loose body on the target rod (4) using an axial vapor deposition VAD method;
    所述第二腔室(12)被配置为对所述松散体进行脱水处理及烧结处理，以获得光纤预制棒(10)；The second chamber (12) is configured to perform dehydration treatment and sintering treatment on the loose body to obtain an optical fiber preform (10);
    所述第三腔室(13)被配置为对所述光纤预制棒(10)进行退火处理。The third chamber (13) is configured to anneal the optical fiber preform (10).
  2. 根据权利要求1所述的制备装置，其中，所述第二腔室(12)内设置有所述分隔部(5)，所述分隔部(5)将所述第二腔室(12)分隔形成上下连通的烧结腔室(121)和脱水腔室(122)，所述烧结腔室(121)和所述脱水腔室(122)被分别配置为对所述松散体进行所述烧结处理及所述脱水处理。The preparation device according to claim 1, wherein the second chamber (12) is provided with the partition (5), and the partition (5) partitions the second chamber (12) A sintering chamber (121) and a dehydration chamber (122) communicating up and down are formed, and the sintering chamber (121) and the dehydration chamber (122) are respectively configured to perform the sintering treatment and the dehydration process on the loose body. The dehydration treatment.
  3. 根据权利要求2所述的制备装置，其中，所述烧结腔室(121)和所述脱水腔室(122)中的至少一种的高度小于所述松散体的总长度，以使所述烧结腔室(121)和所述脱水腔室(122)能够同时进行所述脱水处理及所述烧结处理。The preparation apparatus according to claim 2, wherein the height of at least one of the sintering chamber (121) and the dehydration chamber (122) is smaller than the total length of the loose body, so that the sintering The chamber (121) and the dehydration chamber (122) can simultaneously perform the dehydration treatment and the sintering treatment.
  4. 根据权利要求3所述的制备装置，其中，所述第二腔室(12)的高度小于所述松散体的总长度，以使所述第一腔室(11)、所述脱水腔室(122)和所述烧结腔室(121)能够同时进行沉积处理、所述脱水处理及所述烧结处理。The preparation device according to claim 3, wherein the height of the second chamber (12) is less than the total length of the loose body, so that the first chamber (11), the dehydration chamber ( 122) and the sintering chamber (121) can simultaneously perform the deposition process, the dehydration process and the sintering process.
  5. 根据权利要求2所述的制备装置，其中，所述烧结腔室(121)和所述脱水腔室(122)的高度均大于所述松散体的总长度，以使所述松散体能够分别在所述脱水腔室(122)和所述烧结腔室(121)内整体脱水和整体烧结。The preparation device according to claim 2, wherein the heights of the sintering chamber (121) and the dehydration chamber (122) are both greater than the total length of the loose body, so that the loose body can be respectively The dehydration chamber (122) and the sintering chamber (121) are integrally dehydrated and integrally sintered.
  6. 根据权利要求1所述的制备装置，其中，所述第三腔室(13)的高度大于所述光纤预制棒(10)的总长度，以使所述光纤预制棒(10)能够整体地在所述第三腔室(13)内进行退火处理。The preparation device according to claim 1, wherein the height of the third chamber (13) is greater than the total length of the optical fiber preform (10), so that the optical fiber preform (10) can be integrally Annealing treatment is performed in the third chamber (13).
  7. 根据权利要求1-6中任意一项所述的制备装置，其中，所述分隔部(5) 由刚性材料制成，位于每个所述分隔部(5)上的所述贯通孔与所述松散体或所述光纤预制棒(10)之间均具有预设间隙。The preparation device according to any one of claims 1-6, wherein the partitions (5) are made of rigid materials, and the through holes located on each of the partitions (5) are connected to the There are preset gaps between the loose body or the optical fiber preforms (10).
  8. 根据权利要求1-6中任意一项所述的制备装置，其中，所述分隔部(5)由柔性材料制成，位于每个所述分隔部(5)上的所述贯通孔的孔径小于所述松散体或所述光纤预制棒(10)的直径，以使所述分隔部(5)与所述松散体或所述光纤预制棒(10)过盈插接。The preparation device according to any one of claims 1-6, wherein the partitions (5) are made of flexible materials, and the diameter of the through holes on each of the partitions (5) is smaller than The diameter of the loose body or the optical fiber preform (10), so that the separation part (5) and the loose body or the optical fiber preform (10) are interference-spliced.
  9. 根据权利要求8所述的制备装置，其中，所述分隔部(5)由陶瓷纤维制成。The preparation device according to claim 8, wherein the partition (5) is made of ceramic fibers.
  10. 根据权利要求1所述的制备装置，其中，所述驱动机构(3)包括第一动力组件(31)和第二动力组件(32)，The preparation device according to claim 1, wherein the driving mechanism (3) comprises a first power assembly (31) and a second power assembly (32),
    所述第一动力组件(31)包括一沿竖直方向自所述反应腔体(1)顶部伸入所述第三腔室(13)的丝杆(311)，所述丝杆(311)的下端可转动地连接于与所述第三腔室(13)对应的反应腔体(1)的腔壁固接的支撑件(312)，所述丝杆(311)的上端与一同步带轮机构(313)传动连接，所述同步带轮机构(313)由第一电机(314)驱动，The first power assembly (31) includes a lead screw (311) extending from the top of the reaction chamber (1) into the third chamber (13) in a vertical direction, the lead screw (311) The lower end of the screw rod (311) is rotatably connected to the support member (312) fixed to the cavity wall of the reaction chamber (1) corresponding to the third chamber (13), and the upper end of the screw rod (311) is connected to a timing belt The wheel mechanism (313) is connected in a driving manner, and the synchronous pulley mechanism (313) is driven by the first motor (314),
    所述第二动力组件(32)包括与所述丝杆(311)螺接的升降座(321)，以及固定于所述升降座(321)的第二电机(322)。The second power assembly (32) includes a lift seat (321) screwed with the lead screw (311), and a second motor (322) fixed to the lift seat (321).
  11. 根据权利要求1所述的制备装置，还包括：控制***(7)，The preparation device according to claim 1, further comprising: a control system (7),
    所述控制***(7)包括控制模块和信息采集模块，所述控制模块包括可编程逻辑控制器PLC控制器及操作台，所述信息采集模块包括设置于以下至少之一的位置感应器及在线监测装置：所述第一腔室(11)、所述第二腔室(12)、或所述第三腔室(13)，The control system (7) includes a control module and an information acquisition module, the control module includes a programmable logic controller (PLC) controller and an operation console, and the information acquisition module includes a position sensor and an online sensor set at least one of the following: Monitoring device: the first chamber (11), the second chamber (12), or the third chamber (13),
    所述信息采集模块设置为将以下信息至少之一提供至所述控制模块：采集的松散体端头位置、运行速度、运行距离、所述光纤预制棒(10)的直径、所述光纤预制棒(10)的透光度、沉积供料量、喷灯(6)的氢氧焰气体流量，The information collection module is configured to provide at least one of the following information to the control module: the collected loose body tip position, running speed, running distance, the diameter of the optical fiber preform (10), the optical fiber preform (10) transmittance, deposition feed amount, oxyhydrogen flame gas flow rate of torch (6),
    所述控制模块设置为根据所述信息调节所述光纤预制棒的制备装置中加热器件、喂料***、配气***、喷灯(6)和驱动机构(3)的启停及运行状态，以控制松散体沉积量及烧结腔的温度。The control module is configured to adjust the start-stop and running states of the heating device, the feeding system, the gas distribution system, the torch (6) and the driving mechanism (3) in the optical fiber preform preparation device according to the information, so as to control the The amount of loose body deposition and the temperature of the sintering chamber.
  12. 一种制备光纤预制棒的方法，应用于权利要求1-11任意一项所述的光纤预制棒的制备装置，所述方法包括：A method for preparing an optical fiber preform, applied to the device for preparing an optical fiber preform according to any one of claims 1-11, the method comprising:
    将所述靶棒(4)置于所述第一腔室(11)，在所述第一腔室(11)内采用轴向气相沉积VAD法在所述靶棒(4)上沉积松散体；The target rod (4) is placed in the first chamber (11), and an axial vapor deposition VAD method is used in the first chamber (11) to deposit loose bodies on the target rod (4) ;
    提升所述靶棒(4)，对处于所述第二腔室(12)内的所述松散体进行脱水处理及烧结处理，以获得光纤预制棒(10)；Lifting the target rod (4), and performing dehydration treatment and sintering treatment on the loose body in the second chamber (12) to obtain an optical fiber preform (10);
    继续提升所述光纤预制棒(10)，对处于所述第三腔室(13)的所述光纤预制棒(10)进行退火处理。Continue to lift the optical fiber preform (10), and perform annealing treatment on the optical fiber preform (10) in the third chamber (13).
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CN108046582A (en) * 2017-12-29 2018-05-18 江苏通鼎光棒有限公司 A kind of continuous device and method for preparing preform and wire drawing

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