WO2022065056A1 - エラストマー組成物、シール材およびシール材の製造方法 - Google Patents
エラストマー組成物、シール材およびシール材の製造方法 Download PDFInfo
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- WO2022065056A1 WO2022065056A1 PCT/JP2021/033159 JP2021033159W WO2022065056A1 WO 2022065056 A1 WO2022065056 A1 WO 2022065056A1 JP 2021033159 W JP2021033159 W JP 2021033159W WO 2022065056 A1 WO2022065056 A1 WO 2022065056A1
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- 125000000864 peroxy group Chemical group O(O*)* 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 125000000286 phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004344 phenylpropyl group Chemical group 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920013716 polyethylene resin Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- MHSKRLJMQQNJNC-UHFFFAOYSA-N terephthalamide Chemical compound NC(=O)C1=CC=C(C(N)=O)C=C1 MHSKRLJMQQNJNC-UHFFFAOYSA-N 0.000 description 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
- PNWOTXLVRDKNJA-UHFFFAOYSA-N tert-butylperoxybenzene Chemical compound CC(C)(C)OOC1=CC=CC=C1 PNWOTXLVRDKNJA-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 229920002725 thermoplastic elastomer Polymers 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- GRPURDFRFHUDSP-UHFFFAOYSA-N tris(prop-2-enyl) benzene-1,2,4-tricarboxylate Chemical compound C=CCOC(=O)C1=CC=C(C(=O)OCC=C)C(C(=O)OCC=C)=C1 GRPURDFRFHUDSP-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 125000006839 xylylene group Chemical group 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08L27/16—Homopolymers or copolymers or vinylidene fluoride
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J3/00—Processes of treating or compounding macromolecular substances
- C08J3/24—Crosslinking, e.g. vulcanising, of macromolecules
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J3/00—Processes of treating or compounding macromolecular substances
- C08J3/24—Crosslinking, e.g. vulcanising, of macromolecules
- C08J3/244—Stepwise homogeneous crosslinking of one polymer with one crosslinking system, e.g. partial curing
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J3/00—Processes of treating or compounding macromolecular substances
- C08J3/28—Treatment by wave energy or particle radiation
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/14—Peroxides
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/54—Silicon-containing compounds
- C08K5/541—Silicon-containing compounds containing oxygen
- C08K5/5425—Silicon-containing compounds containing oxygen containing at least one C=C bond
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/10—Materials in mouldable or extrudable form for sealing or packing joints or covers
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/10—Materials in mouldable or extrudable form for sealing or packing joints or covers
- C09K3/1006—Materials in mouldable or extrudable form for sealing or packing joints or covers characterised by the chemical nature of one of its constituents
- C09K3/1009—Fluorinated polymers, e.g. PTFE
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/102—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by material
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/20—Polysiloxanes containing silicon bound to unsaturated aliphatic groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
- C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
- C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C08J2327/16—Homopolymers or copolymers of vinylidene fluoride
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3467—Heterocyclic compounds having nitrogen in the ring having more than two nitrogen atoms in the ring
- C08K5/3477—Six-membered rings
- C08K5/3492—Triazines
- C08K5/34924—Triazines containing cyanurate groups; Tautomers thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
- C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/03—Polymer mixtures characterised by other features containing three or more polymers in a blend
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/03—Polymer mixtures characterised by other features containing three or more polymers in a blend
- C08L2205/035—Polymer mixtures characterised by other features containing three or more polymers in a blend containing four or more polymers in a blend
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2312/00—Crosslinking
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- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2200/00—Chemical nature of materials in mouldable or extrudable form for sealing or packing joints or covers
- C09K2200/06—Macromolecular organic compounds, e.g. prepolymers
- C09K2200/0615—Macromolecular organic compounds, e.g. prepolymers obtained by reactions only involving carbon-to-carbon unsaturated bonds
- C09K2200/0635—Halogen-containing polymers, e.g. PVC
- C09K2200/0637—Fluoro-containing polymers, e.g. PTFE
Definitions
- One embodiment of the present invention relates to an elastomer composition, a sealing material, or a method for producing a sealing material.
- the sealing material has been widely used in various applications, and among these applications, an example of the application of the sealing material that puts the most load on the sealing material is the sealing material used in semiconductor manufacturing equipment and the like. ..
- Patent Document 1 discloses an uncrosslinked rubber composition containing a hydrogen-containing fluororubber, a hydrogen site protectant, and a heat-crosslinking agent.
- sealing material formed from the conventional elastomer composition as described in Patent Document 1 in particular, as a sealing material used for applications such as in a plasma atmosphere where the generation of particles becomes a problem, a filler is used. Although sealing materials to which is not added or the amount of addition is small are used, there is room for improvement in these sealing materials in terms of tensile stress (100% Mo) at 100% elongation.
- One embodiment of the present invention provides an elastomer composition capable of forming a sealing material having a high tensile stress (100% Mo) at 100% elongation.
- the configuration example of the present invention is as follows.
- a crosslinkable fluoroelastomer (A) other than the perfluoroelastomer, an ethylenically unsaturated bond-containing compound (B), a crosslinking agent (C) and a crosslinking aid (D) are contained.
- the ethylenically unsaturated bond-containing compound (B) contains at least one selected from a compound having a perfluoro skeleton having an ethylenically unsaturated bond and a compound having a siloxane skeleton having an ethylenically unsaturated bond.
- the mass ratio of the content of the cross-linking aid (D) to the cross-linking agent (C) is 5 or more. Elastomer composition.
- the content of the ethylenically unsaturated bond-containing compound (B) is 0.5 to 50 parts by mass with respect to 100 parts by mass of the elastomer (A), [1] or [2].
- a method for producing a sealing material which comprises a step of irradiating the elastomer composition according to any one of [1] to [5] or a crosslinked product of the elastomer composition with radiation.
- a sealing material having a high 100% Mo can be formed, and in particular, a sealing material having a good balance of hardness, tensile strength, and 100% Mo can be obtained. Further, according to one embodiment of the present invention, it is possible to obtain a sealing material having excellent plasma resistance (radical resistance), crack resistance, compression set, and the like. Therefore, the sealing material can be suitably used as a sealing material for semiconductor manufacturing equipment and a sealing material for plasma processing equipment.
- the elastomer composition according to one embodiment of the present invention is a crosslinkable fluoroelastomer (A) other than the perfluoroelastomer, an ethylenically unsaturated bond-containing compound (B), and a crosslinking agent. (C) and cross-linking aid (D) are included.
- the ethylenically unsaturated bond-containing compound (B) contains at least one selected from a compound having a perfluoro skeleton having an ethylenically unsaturated bond and a compound having a siloxane skeleton having an ethylenically unsaturated bond.
- the mass ratio of the content of the cross-linking aid (D) to the cross-linking agent (C) is 5 or more.
- the elastomer (A) is not particularly limited as long as it is a crosslinkable fluoroelastomer other than perfluoroelastomer, and is also referred to as unvulcanized fluororubber. Types and the like can be mentioned. Among these, it is not necessary to use an acid receiving agent that is a source of particles in a plasma atmosphere or the like, and there is no risk of generating particles while using the obtained sealing material. It is preferably a possible fluoroelastomer.
- the elastomer (A) contained in the present composition may be one kind or two or more kinds. In the present invention, "elastomer” and “rubber” have the same meaning, and there is no particular distinction between them.
- the elastomer (A) include a fluoroelastomer (FKM), a tetrafluoroethylene-propylene-based elastomer (FEPM), a fluoroelastomer-based thermoplastic elastomer (eg, at least one elastomeric polymer chain segment and at least one non-elastomer).
- FKM fluoroelastomer
- FEPM tetrafluoroethylene-propylene-based elastomer
- FEPM tetrafluoroethylene-propylene-based elastomer
- an elastomer capable of obtaining a sealing material showing resistance to plasma (plasma etching treatment) used in various semiconductor dry processes is preferable, plasma resistance is relatively good, and sealing property is good.
- FKM excellent in is more preferable. FKM is also preferable in terms of low cost and versatility.
- the elastomer (A) one synthesized by a conventionally known method may be used, or a commercially available product may be used.
- the commercially available product include “Daiel” manufactured by Daikin Industries, Ltd., “Baiton” manufactured by The Chemours Company, “Dynion” manufactured by 3M, and “Technoflon” manufactured by Solvay.
- the fluorine content of the elastomer (A) is preferably 55% by mass or more, more preferably 60% by mass or more, further preferably 63% by mass or more, preferably 73% by mass or less, and more preferably 72% by mass or less. More preferably, it is 71% by mass or less.
- the fluorine content can be measured and calculated by elemental analysis of fluorine using 19 F-NMR, 1 H-NMR, etc., mass spectrometry (MS spectrum method), or the like.
- the fluorine content in the present invention is a value rounded off to the nearest whole number.
- an elastomer (A1) having a fluorine content in the range of 69 to 73% by mass and an elastomer (A2) having a fluorine content in the range of 55 to 68% by mass are used. Is preferable. As long as the fluorine content of the elastomer (A1) and the elastomer (A2) is within the above range, the types of the constituent units constituting these elastomers may be the same or different.
- the present composition contains an elastomer (A1)
- the elastomer (A1) contained in the present composition may be one kind or two or more kinds.
- the elastomer (A2) contained in the present composition may be one kind or two or more kinds.
- the fluorine content of the elastomer (A1) is 69% by mass or more, preferably 70% by mass or more, 73% by mass or less, and preferably 71% by mass or less.
- the fluorine content of the elastomer (A2) is 55 to 68% by mass, preferably 60 to 68% by mass, more preferably 63 to 68% by mass, and further preferably 65 to 68% by mass.
- the Mooney viscosity of the elastomer (A) is preferably 10 or more, more preferably 15 or more, still more preferably 20 or more, preferably 140 or less, more preferably 120 or less, still more preferably 80 or less, and particularly preferably 60 or less. Is. When the Mooney viscosity of the elastomer (A) is in the above range, an elastomer composition having excellent moldability, particularly dispenseability, can be easily obtained.
- the Mooney viscosity in the present specification refers to the Mooney viscosity (ML1 + 10) at 121 ° C. measured according to ASTM D 1646.
- the content of the elastomer (A) in the solid content of the present composition is preferably 50% by mass or more, more preferably 70% by mass or more, preferably 97% by mass or less, and more preferably 95% by mass or less. ..
- a sealing material having excellent sealing properties and plasma resistance can be easily obtained.
- a solid content means a component other than a solvent.
- the content of the elastomer (A1) is preferably 60% by mass or more, more preferably 65% by mass or more, and preferably 95% by mass with respect to the total content of the elastomers (A1) and (A2) in the present composition. Hereinafter, it is more preferably 90% by mass or less.
- the mass ratio of the contents of the elastomers (A1) and (A2) is in the above range, a uniform elastomer composition can be obtained in a short time, and an elastomer composition having excellent moldability, particularly dispenseability, can be easily obtained. It is possible to easily obtain a sealing material having a high 100% Mo, particularly hardness, tensile strength, and a good balance of 100% Mo.
- the FKM is not particularly limited, and examples thereof include a polymer containing a hydrogen atom (carbon-hydrogen bond) in the polymer main chain, and specifically, it is preferable to include a structural unit derived from vinylidene fluoride.
- the FKM is not particularly limited, and specific examples thereof include vinylidene fluoride-hexafluoropropylene-based polymer; vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene-based polymer; vinylidene fluoride-propylene-tetrafluoroethylene-based weight. Combined; ethylene-tetrafluoroethylene-perfluoroalkyl vinyl ether polymer; vinylidene fluoride-tetrafluoroethylene-perfluoroalkyl vinyl ether polymer can be mentioned.
- the perfluoroalkyl vinyl ether include perfluoromethyl vinyl ether.
- a ternary polymer is preferable, and a vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene polymer is more preferable from the viewpoint of excellent plasma resistance, heat resistance, chemical resistance, and the like.
- the fluoroepolymer that can be crosslinked with peroxide preferably has a functional group such as an iodine group, a bromine group, a cyano group, a peroxy group, and an unsaturated group, and the iodine group and the bromine group are more suitable for easy introduction of the functional group.
- a fluoroelastomer having an iodine group and / or a bromine group can be obtained, for example, by using one or more saturated or unsaturated iodine-containing and / or bromine-containing compounds when synthesizing the elastomer.
- Examples of the iodine-containing and / or bromine-containing compound include compounds represented by the following formula (1) or (2).
- a fluoroelastomer having an iodine group and / or a bromine group in the side chain can be synthesized, and by using the compound represented by the following formula (2).
- Fluoroelastomers having an iodine group and / or a bromine group at the ends can be synthesized.
- CY 1 2 CY 2 RfX (1)
- Y 1 and Y 2 are independently fluorine atoms, hydrogen atoms or methyl groups, and Rf is a linear or branched fluorine-containing alkylene group in which part or all of the hydrogen atoms are substituted with fluorine atoms. , Or a group containing an ether bond as part of the fluorine-containing alkylene group, and X is an iodine atom or a bromine atom.
- Specific examples of the compound represented by the formula (2) include the compounds described in JP-A-2002-97329 and JP-A-2008-56739.
- the compound (B) is at least one compound selected from a compound having a perfluoro skeleton having an ethylenically unsaturated bond (B1) and a compound having a siloxane skeleton having an ethylenically unsaturated bond (B2).
- the compound (B) preferably contains the compound (B1) from the viewpoint that a sealing material having more excellent plasma resistance can be easily obtained.
- Examples of the ethylenically unsaturated bond include an alkenyl group having 2 to 8 carbon atoms such as a vinyl group, a methyl vinyl group, an allyl group, a propenyl group, an isopropenyl group, a butenyl group, a pentenyl group, a hexenyl group and a heptenyl group.
- Examples thereof include a vinylphenyl group, a (meth) acryloyl group, an allyloxy group, a styryl group, and a propargyl group.
- an alkenyl group is preferable, an alkenyl group having 2 to 4 carbon atoms is more preferable, and a vinyl group is particularly preferable.
- Compound (B) may have two or more ethylenically unsaturated bonds.
- the compound (B) a compound synthesized by a conventionally known method may be used, or a commercially available product may be used.
- the commercially available product include "SIFEL” (manufactured by Shin-Etsu Chemical Co., Ltd.).
- the commercially available product containing the compound (B) includes a one-component type commercial product and a two-component type commercial product, and any of these may be used.
- there are liquid, paste, oil, mirabable and the like, and any of these may be used.
- the commercially available product includes a reactive organic silicon compound having two or more hydrosilyl groups in the molecule (eg, JP-A-2003-183402, JP-A-11-116684).
- a reactive organic silicon compound having two or more hydrosilyl groups in the molecule eg, JP-A-2003-183402, JP-A-11-116684.
- Additives such as organic silicon compounds described in JP-A), catalysts (eg, catalysts described in JP-A-2003-183402, JP-A-11-116684, etc.), fillers (eg, silica), etc. are included.
- the compound (B) those containing these additives may be used.
- the content of the compound (B) in the present composition is such that a uniform elastomer composition can be obtained in a shorter time, and a sealing material having better plasma resistance can be easily obtained.
- the amount / content of the cross-linking agent (C)) is preferably 1 or more, more preferably 2 or more, preferably 20 or less, and more preferably 10 or less.
- the compound (B1) is a compound other than the elastomer (A).
- Examples of the compound (B1) include a compound having a perfluoropolyether structure having an ethylenically unsaturated bond and a compound having a perfluoroalkylene structure having an ethylenically unsaturated bond. Among these, the ethylenically unsaturated compound is mentioned.
- a compound having a perfluoropolyether structure having a bond (hereinafter, also referred to as “compound (B1-1)”) is preferable.
- the compound (B1) contained in the present composition may be one kind or two or more kinds.
- the compound (B1-1) is preferably a perfluoropolyether having two or more ethylenically unsaturated bonds in one molecule.
- Preferable examples of the compound (B1-1) include the compounds described in JP-A-2003-183402, JP-A-11-116684, JP-A-11-116685, and JP-A-2015-67737. ..
- Examples of the compound (B1-1) include a compound represented by the following formula (1).
- X is independently -CH 2- , -CH 2 O-, -CH 2 OCH 2- , * -Si (R 2 ) 2 -Ph- (Ph: phenylene group), * -Y-NR 1 SO 2 -or * -Y-NR 1 -CO- (However, Y is -CH 2- or * -Si (R 2 ) 2 -Ph-. The * portion is bound to Z 1 or Z 2. ) Is.
- Rf is a divalent perfluoropolyether group (divalent perfluorooxyalkylene group).
- p is independently 0 or 1.
- a is an integer of 0 or more, preferably an integer of 0 to 10, and more preferably an integer of 0 to 6.
- Q is a group represented by the following formula (2), (3) or (4).
- R 2 is a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, particularly 1 to 8 carbon atoms, and is, for example, a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, and the like.
- Alkyl groups such as t-butyl group, pentyl group, hexyl group, octyl group and decyl group, cycloalkyl groups such as cyclopentyl group, cyclohexyl group and cycloheptyl group, vinyl group, allyl group, propenyl group, isopropenyl group and butenyl.
- Alkyl groups such as groups and hexenyl groups, aryl groups such as phenyl groups, trill groups, xylyl groups and naphthyl groups, aralkyl groups such as benzyl groups, phenylethyl groups and phenylpropyl groups, and some of the hydrogen atoms of these groups or Groups entirely substituted with halogen atoms or the like (eg, chloromethyl group, chloropropyl group, bromoethyl group, 3,3,3-trifluoropropyl group, 6,6,6,5,5,4,4,3 A fluorine-substituted alkyl group such as a 3-nonafluorohexyl group) can be mentioned.
- halogen atoms or the like eg, chloromethyl group, chloropropyl group, bromoethyl group, 3,3,3-trifluoropropyl group, 6,6,6,5,5,4,4,3
- R 1 is a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, particularly 1 to 8 carbon atoms similar to the hydrogen atom or the group exemplified as R 2 above, and is the same as the hydrogen atom or R 2 .
- Examples include an alkyl group such as a methyl group, an ethyl group, a propyl group and an isopropyl group, a cycloalkyl group such as a cyclohexyl group, an alkenyl group such as a vinyl group and an allyl group, a phenyl group and a trill group.
- Aryl group a group in which a part of the hydrogen atom of these groups is substituted with a halogen atom, etc. (eg, chloromethyl group, chloropropyl group, 3,3,3-trifluoropropyl group, 6,6,6,5 , 5, 4, 4, 3, 3-Fluoro-substituted alkyl groups such as nonafluorohexyl groups).
- Z 1 and Z 2 are independently ethylenically unsaturated bond-containing groups, and may be —Si (ethylenically unsaturated bond-containing group) (R') 2 .
- R' is an independently substituted or unsubstituted monovalent hydrocarbon group, specifically, for example, a methyl group, an ethyl group, an n-propyl group, an i-propyl group, an n-butyl group, i-.
- Alkyl groups such as butyl group, t-butyl group, pentyl group and hexyl group; aryl groups such as phenyl group, trill group and xylyl group; halogens such as 3-chloropropyl group and 3,3,3-trifluoropropyl group Examples thereof include an alkyl group, and among these, an alkyl group having 1 to 5 carbon atoms is preferable.
- R 3 and R 4 are each independently substituted or unsubstituted divalent hydrocarbon group in which one or more selected from oxygen atom, nitrogen atom, silicon atom and sulfur atom may be interposed in the middle of bonding, and the formula is R 3 in (2) and R 4 in formula (3) may be independently represented by the following formula (5) or (6).
- R 5 is a substituted or unsubstituted monovalent hydrocarbon group
- R 6 is one or more selected from a carbon atom, an oxygen atom, a nitrogen atom, a silicon atom and a sulfur atom. It is a group containing.
- the R 3 and R 4 are not particularly limited as long as they are substituted or unsubstituted divalent hydrocarbon groups, but divalent hydrocarbon groups having 1 to 20 carbon atoms, particularly 2 to 12 carbon atoms are preferable, and specifically.
- divalent hydrocarbon groups having 1 to 20 carbon atoms, particularly 2 to 12 carbon atoms are preferable, and specifically.
- an alkylene group such as a methylene group, an ethylene group, a propylene group, a methylethylene group, a butylene group, a hexamethylene group, a cycloalkylene group such as a cyclohexylene group, a phenylene group, a trilen group, a xylylene group, a naphthylene group, a biphenylene group, etc.
- Examples thereof include an arylene group, a group in which a part of the hydrogen atom of these groups is substituted with a halogen atom or the like, a substituted or unsubstituted alkylene group thereof, and a combination of an arylene group.
- R 7 indicates a perfluoroalkanediyl group, and n is an integer of 2 or more. show. A plurality of R 7s may be the same or different from each other. ] Is preferable.
- Examples of the perfluoroalkanediyl group represented by R 7 include a group represented by C m F 2 m (m is an integer of 2 or more), and may be linear or branched.
- the number of carbon atoms (that is, m) of the perfluoroalkanediyl group is, for example, 1 to 10, preferably 2 to 6, more preferably 2 to 4, and particularly preferably 2 to 3.
- N may be 2 or more, for example, 10 or more, preferably 40 or more, and more preferably 70 or more. Further, n is, for example, 300 or less, preferably 200 or less, and more preferably 150 or less.
- the compound represented by the formula (1) is preferably a compound represented by the following formula (1-1).
- the definition of each code in the formula (1-1) is the same as the definition of each code in the formula (1). ]
- the compound represented by the formula (1-1) is preferably a compound in which a is 0, and in this case, it is represented by the following formula (1-1-1).
- the definition of each code in the formula (1-1-1) is the same as the definition of each code in the formula (1). ]
- Rf examples include the following groups. -[CF (Z) OCF 2 ] p- (CF 2 ) r- [CF 2 OCF (Z)] q- (Z is a fluorine atom or ⁇ CF 3 , and p, q and r are integers satisfying p ⁇ 1, q ⁇ 1, 2 ⁇ p + q ⁇ 200, preferably 2 ⁇ p + q ⁇ 110, 0 ⁇ r ⁇ 6.
- the compound (B2) is preferably a polysiloxane having two or more ethylenically unsaturated bonds in one molecule, and has two or more ethylenically unsaturated bonds in one molecule, and It is preferably an organopolysiloxane in which an organic group is bonded to a silicon atom.
- the bond position of the ethylenically unsaturated bond is not particularly limited.
- the compound (B2) contained in the present composition may be one kind or two or more kinds.
- Examples of the organic group bonded to the silicon atom include the ethylenically unsaturated bond, a linear alkyl group, a branched chain alkyl group, a cyclic alkyl group, an aryl group, an aralkyl group and an alkyl halide group.
- Examples of the linear alkyl group include groups having 1 to 20 carbon atoms, preferably 1 to 6 carbon atoms such as a methyl group, an ethyl group, a propyl group, a hexyl group, an octyl group and a decyl group.
- Examples of the branched alkyl group include groups having 1 to 20 carbon atoms, preferably 1 to 6 carbon atoms such as an isopropyl group, an isobutyl group, a t-butyl group and a 2-ethylhexyl group.
- Examples of the cyclic alkyl group include a group having 3 to 20 carbon atoms such as a cyclopentyl group and a cyclohexyl group.
- Examples of the aryl group include a group having 6 to 20 carbon atoms such as a phenyl group and a tolyl group.
- Examples of the aralkyl group include a group having 7 to 20 carbon atoms such as a benzyl group, a 2-phenylethyl group and a 2-methyl-2-phenylethyl group.
- Examples of the alkyl halide group include a 3,3,3-trifluoropropyl group, a 2- (nonafluorobutyl) ethyl group, a 2- (heptadecafluorooctyl) ethyl group, and the like, preferably having 1 to 20 carbon atoms. Groups having 1 to 6 carbon atoms can be mentioned.
- a linear alkyl group, an alkenyl group and an aryl group are preferable, a linear alkyl group having 1 to 6 carbon atoms, an alkenyl group and an aryl group are more preferable, and a methyl group and vinyl are more preferable.
- Groups and phenyl groups are particularly preferred.
- the molecular structure of compound (B2) is not particularly limited, and examples thereof include linear, branched chain, linear with partial branch, and dendrimer (dendrimer), preferably linear and partially branched. It has a linear shape.
- the compound (B2) may be a single polymer having these molecular structures, a copolymer having these molecular structures, or a mixture of two or more of these polymers.
- Examples of the compound (B2) include dimethylpolysiloxane having a dimethylvinylsiloxy group block at both ends of the molecular chain, dimethylpolysiloxane having a methylphenylvinylsiloxy group block having both ends of the molecular chain, and dimethylsiloxane / methylphenyl having a dimethylvinylsiloxy group block having both ends of the molecular chain.
- Siloxane copolymer dimethylvinylsiloxy group-blocked dimethylsiloxane / methylvinylsiloxane copolymer at both ends of the molecular chain, dimethylsiloxane / methylvinylsiloxane copolymer at both ends of the molecular chain, dimethylsiloxane group-blocked at both ends of the molecular chain ⁇ Methylvinylsiloxane ⁇ Methylphenylsiloxane copolymer, trimethylsiloxy group-blocked dimethylsiloxane at both ends of the molecular chain dimethylsiloxane ⁇ Methylvinylsiloxane copolymer, dimethylvinylsiloxy group-blocked methyl at both ends of the molecular chain (3,3,3-trifluoropropyl) ) Polysiloxane, formula: (CH 3 ) 3 siloxane unit represented by SiO 1/2 and formula
- R 1 is independently an unsubstituted or substituted monovalent hydrocarbon group
- R 2 is independently an alkyl group, an alkoxyalkyl group, an alkenyl group or an acyl group
- b is. It is an integer of 2 to 100
- a is an integer of 1 to 3.
- at least two of R 1 and R 2 in the formula (7) include the ethylenically unsaturated bond.
- R 1 is independently unsubstituted or substituted, preferably a monovalent hydrocarbon group having 1 to 10 carbon atoms, and an example thereof is an organic group bonded to the silicon atom.
- a monovalent hydrocarbon group having 1 to 6 carbon atoms is preferable, and an alkenyl group, an aryl group, and an alkyl group having 1 to 3 carbon atoms are more preferable.
- Examples of the alkyl group and alkenyl group in R 2 in the formula (7) include a linear alkyl group, a branched chain alkyl group, and a cyclic alkyl group similar to the group exemplified as the organic group bonded to the silicon atom.
- Examples include alkenyl groups.
- Examples of the alkoxyalkyl group in R 2 in the formula (7) include a group having 2 to 10 carbon atoms such as a methoxyethyl group and a methoxypropyl group.
- Examples of the acyl group in R 2 in the formula (7) include a group having 2 to 10 carbon atoms such as an acetyl group and an octanoyl group.
- B in the formula (7) is preferably an integer of 10 to 50, and a is preferably 3.
- the cross-linking agent (C) is not particularly limited, and can be selected and used from conventionally known cross-linking agents according to the type of elastomer (A) used.
- the cross-linking agent (C) contained in the present composition may be one kind or two or more kinds.
- cross-linking agent (C) examples include, when FKM is used, a peroxide-based cross-linking agent, a polyamine-based cross-linking agent, a polyol-based cross-linking agent, a triazine-based cross-linking agent, and the like.
- an acid receiving agent such as magnesium oxide or calcium hydroxide, which is a source of particles, in the present composition under a plasma atmosphere or the like, and the obtained sealing material is used during use.
- a peroxide-based cross-linking agent is preferable because there is no risk of generating particles.
- peroxide-based cross-linking agent examples include 2,5-dimethyl-2,5-di (t-butylperoxy) hexane, dicumyl peroxide, 2,4-dichlorobenzoyl peroxide, and di-t-butylper.
- Oxide t-butyldicumyl peroxide, benzoyl peroxide, 2,5-dimethyl-2,5- (t-butylperoxy) hexine-3, 2,5-dimethyl-2,5-di (benzoylperoxy) ) Hexane, ⁇ , ⁇ '-bis (t-butylperoxy-m-isopropyl) benzene, t-butylperoxyisopropyl carbonate, di- (4-t-butylcyclohexyl) peroxydicarbonate, p-chlorobenzoylper Oxide, t-butylperoxy-2-ethylhexanoate, t-butylperoxybenzoate, 1,1-bis (t-butylperoxy) -3,5,5-trimethylcyclohexane, 2,5-dimethylhexane Examples thereof include -2,5-dihydroperoxide, ⁇ , ⁇ -bis (t
- 2,5-dimethyl-2,5-di (t-butylperoxy) hexane 2,4-dichlorobenzoyl peroxide, dicumyl peroxide, benzoyl peroxide, ⁇ , ⁇ '-bis (t).
- 2,5-dimethyl-2,5-di (t-butylperoxy) hexane is preferred, and 2,5-dimethyl-2,5-di (t-butylperoxy) hexane is more preferred.
- the content of the cross-linking agent (C) in the present composition is such that the cross-linking reaction proceeds sufficiently, and a sealing material having an excellent balance of hardness, tensile strength, and 100% Mo can be easily obtained. Therefore, it is preferably 0.2 to 4 parts by mass, and more preferably 0.2 to 2.5 parts by mass with respect to 100 parts by mass of the elastomer (A).
- the cross-linking aid (D) is not particularly limited, and a conventionally known cross-linking aid may be selected according to the type of the cross-linking agent (C).
- the cross-linking aid (D) contained in the present composition may be one kind or two or more kinds.
- cross-linking aid (D) used when a peroxide-based cross-linking agent is used, triallyl isocyanurate; triallyl cyanurate; trimetalyl isocyanurate; triallylformal; triallyl trimellitate; N, N'-m-phenylene bismaleimide; dipropagil terephthalate; diallyl phthalate; tetraallyl terephthalamide; ethylene glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate and other polyfunctional (meth) acrylates.
- D cross-linking aid
- the cross-linking reaction proceeds sufficiently, and a sealing material having an excellent balance of hardness, tensile strength, and 100% Mo can be easily obtained. From the point of view, it is preferably 1 part by mass or more, more preferably 2 parts by mass or more, further preferably 4 parts by mass or more, preferably 10 parts by mass or less, and more preferably 7 with respect to 100 parts by mass of the elastomer (A). It is not more than parts by mass, more preferably 6 parts by mass or less.
- a radiation-crosslinked sealing material (radiated product) is preferable, but in this case, even if the following filler is not used, it is more preferable.
- the content of the crosslinking aid (D) in the present composition is preferably 2 with respect to 100 parts by mass of the elastomer (A) from the viewpoint that a sealing material having high hardness and high modulus can be easily obtained. It is more than parts by mass, more preferably 4 parts by mass or more, preferably 7 parts by mass or less, still more preferably 6 parts by mass or less.
- the mass ratio of the content of the cross-linking aid (D) to the content of the cross-linking agent (C) in the present composition is the cross-linking agent.
- (C) can be reacted in just proportion to easily obtain a sealing material showing desired physical properties.
- a sealing material having higher hardness and higher modulus can be easily obtained without using a packing material as described below. 5 or more, preferably 8 or more, more preferably more than 8, still more preferably 9 or more, particularly preferably 10 or more, preferably 30 or less, more preferably 20 or more. It is as follows.
- the present composition may contain other conventionally known components that have been blended in the sealing material, if necessary, as long as the effects of the present invention are not impaired. good.
- the other components include reactive organic silicon compounds having two or more hydrosilyl groups in the molecule; catalysts; acid-receiving agents such as magnesium oxide and calcium hydroxide; anthraquinone-based pigments, perylene-based pigments, and dioxazine-based pigments.
- Organic pigments such as pigments; plasticizers; processing aids; sulfurization accelerators; antiaging agents; antioxidants; inorganic fillers; organic fillers.
- As each of the other components only one kind may be used, or two or more kinds may be used.
- Preferred examples of the reactive organosilicon compound include compounds similar to those of the organosilicon compounds described in JP-A-2003-183402, JP-A-11-116684, and the like.
- Preferred examples of the catalyst include catalysts similar to those described in JP-A-2003-183402, JP-A-11-116684, and the like.
- organic pigments include organic pigments similar to those described in International Publication No. 2016/043100, Japanese Patent No. 472501, International Publication No. 2004/094527 and the like.
- the inorganic filler and the organic filler are in the form of particles other than the compound (B), the crosslinking agent (C) and the crosslinking aid (D). It is a component (in powder form).
- the inorganic filler include carbon black, silica, barium sulfate, titanium oxide, and aluminum oxide.
- the organic filler include fluororesins such as PTFE, PFA, FEP, ETFE, and PVDF, polyethylene resins, polyimide resins, silicone resins, and melamine resins.
- the content of the filler is preferably 100 parts by mass of the elastomer (A). It is 5 parts by mass or less, more preferably 3 parts by mass or less, and most preferably 0 parts by mass.
- the present composition is produced by mixing (kneading) the elastomer (A), the compound (B), the crosslinking agent (C), the crosslinking aid (D), and if necessary, the other components. Can be done.
- the mixing order of the elastomer (A), the compound (B), the cross-linking agent (C), the cross-linking aid (D), and the other components is not particularly limited, and may be sequentially mixed (kneaded) in any order. These may be mixed (kneaded) all at once, but it is preferable to sequentially mix (knead) so that each component becomes uniform.
- a conventionally known mixing (kneading) machine can be used, and examples thereof include an open roll, a Banbury mixer, a twin-screw roll, and a kneader. Further, at the time of the mixing (kneading), depending on the mixing (kneading) machine, mixing (kneading) may be performed under heating or cooling, if necessary.
- the sealing material according to one embodiment of the present invention is a sealing material obtained from the present composition, and is preferably a crosslinked body of the present composition. It is more preferable that the composition is a radiation crosslinked product.
- the radiation crosslinked product of the present composition is specifically, radiation is applied to the present composition itself or a crosslinked product of the present composition (eg, a crosslinked product obtained by thermally cross-linking the present composition). Examples thereof include a radiation crosslinked body obtained by a method including a step of irradiating.
- this sealing material is obtained from the present composition, it is excellent in hardness, tensile strength, and 100% Mo in a well-balanced manner, and further has plasma resistance (radical resistance), crack resistance, compression set, and the like. Excellent.
- This sealing material can be used, for example, as a gasket or packing for various members, and in particular, because it exerts the above-mentioned effect, it is used for semiconductor manufacturing equipment and plasma processing equipment, especially for openings of plasma processing chamber units. It can be suitably used for a drive unit such as a gate valve.
- the shape and the like of the sealing material may be appropriately selected according to the intended use.
- the present sealing material can be a sealing material having the following physical properties while being a sealing material that does not contain the filler.
- the 100% Mo measured based on JIS K 6251: 2017 of the present sealing material is preferably 2.4 MPa or more, more preferably 3 MPa or more, still more preferably 4.5 MPa or more, and particularly preferably 5 MPa or more.
- the shore A hardness (type A durometer hardness) measured based on JIS K 6253: 2012 of this sealing material is preferably 60 or more.
- the tensile strength measured based on JIS K 6251: 2017 of this sealing material is preferably 10 MPa or more.
- the present sealing material can be produced by molding the present composition, but it is easy to obtain a sealing material excellent in plasma resistance (radical resistance), crack resistance, non-adhesiveness and the like.
- the cross-linked product is obtained by a method including a step of cross-linking the present composition (cross-linking step), and further, hardness, tensile strength, elongation at cutting, and From the viewpoint that a sealing material having a good balance of 100% Mo can be easily obtained, the radiation-treated product is more preferably obtained by a method including a step of irradiating the present composition with radiation (irradiation step). preferable.
- This dispensing step is usually performed using a roll or the like, and is also usually a step of preliminarily forming the present composition into a sheet.
- the sheet obtained in the dispensing step is preformed into a desired sealing material shape before the crosslinking step or the irradiation step.
- a desired sealing material shape may be formed directly from the sheet obtained in the dispensing step, and the sheet obtained in the dispensing step may be cut or extruded into a rope shape (ribbon shape, etc.). Udon-shaped or the like is also synonymous with the shape), and the obtained rope-shaped material may be formed into a desired sealing material shape.
- the crosslinking step when producing the present sealing material, it is preferable to include a crosslinking step before the irradiation step, and it is more preferable that the crosslinking step includes a primary crosslinking step and a secondary crosslinking step.
- the cross-linking step is preferably performed using the desired sealing material shape obtained by the preforming.
- the primary cross-linking step is preferably a step of heating and pressurizing the desired sealing material shape obtained by the preforming, and specifically, for example, the preformed material is put into a mold and heated.
- Examples thereof include a step of cross-linking with a press machine or the like under pressure of about 2 to 15 MPa at a temperature of, for example, 150 to 200 ° C. for, for example, about 5 to 20 minutes.
- the secondary cross-linking step is preferably a step of heating the molded product obtained in the primary cross-linking step, and specifically, using various ovens, preferably a vacuum oven, under normal pressure to reduced pressure. For example, a step of heating at a temperature of 150 to 300 ° C. for 1 to 24 hours, more preferably about 3 to 24 hours can be mentioned.
- the radiation to be irradiated in the irradiation step is not particularly limited as long as it can crosslink the elastomer (A), and for example, X-rays, gamma rays, electron beams, proton rays, neutron rays, heavy particle beams, alpha rays, etc. Beta rays are mentioned, and among these, gamma rays and electron beams are preferable.
- the radiation to be irradiated may be one type alone or two or more types.
- the absorbed dose is preferably 1 to 120 kGy, more preferably 20 to 100 kGy. Irradiation with such an amount of radiation can reduce unreacted components that can become particles and emitted gas, does not excessively reduce the molecular weight of the elastomer (A), and has excellent plasma resistance, crack resistance, and the like. The material can be easily obtained.
- the radiation irradiation step may be performed in two or more stages by changing the conditions.
- the irradiation step is performed in an atmosphere of an inert gas such as nitrogen or argon.
- Technoflon P959 (manufactured by Solvay) 70 parts by mass, Technoflon P757 (manufactured by Solvay) 30 parts by mass, SIFEL 8070A (manufactured by Shin-Etsu Chemical Co., Ltd.) 1.0 part by mass, SIFEL 8070B (manufactured by Shin-Etsu Chemical Co., Ltd.) (Manufactured by) 1.0 part by mass, TAIC (manufactured by Mitsubishi Chemical Co., Ltd., triallyl isocyanurate) 4.0 parts by mass, and Perhexa 25B (manufactured by Nichiyu Co., Ltd.) 0.5 parts by mass are sequentially placed in a kneader.
- SIFEL 8070A and SIFEL 8070B contains a compound having a perfluoroskeleton having an ethylenically unsaturated bond.
- the obtained massive elastomer composition was filled in a mold, press-molded at 170 ° C. for 10 minutes at 170 ° C. under a pressure of 5 MPa using a compression vacuum press machine (primary cross-linking), and then the sheet after press molding was pressed. It was heated at 200 ° C. for 16 hours under reduced pressure in a vacuum oven (vacuum degree: 50 Pa) (secondary cross-linking). Then, the secondary crosslinked sheet was irradiated with radiation so that the absorbed dose was 80 kGy to prepare a radiation crosslinked body. The following normal physical characteristics and plasma resistance of the prepared radiation crosslinked body were measured. The results are shown in Table 1.
- Example 1 [Examples 2 to 10 and Comparative Examples 1 to 2]
- Example 1 the following normal physical properties and plasma resistance were measured in the same manner as in Example 1 except that each component shown in Table 1 was used in the amount shown in Table 1. The results are shown in Table 1.
- the plasma resistance (mass reduction rate) of the obtained molded product was measured. Specifically, the measurements were made as follows. Using a flat plate plasma processing device with an electrode diameter of ⁇ 300 mm and a distance between electrodes of 50 mm, the flow rate ratio of RF1000 W, O 2 gas to CF 4 gas (O 2 : CF 4 ) 190:10, gas flow rate 200 sccm, vacuum degree 1 torr. Under the conditions, the obtained molded body was irradiated with plasma for 3 hours. The obtained molded product was installed at a place 6 cm away from the plasma electrode.
- Mass reduction rate (%) [(mass of molded product before test-mass of molded product after test) / mass of molded product before test] ⁇ 100
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Abstract
Description
例えば、特許文献1には、水素含有フッ素ゴムと、水素サイト保護剤と、熱架橋剤とを含有する未架橋ゴム組成物が開示されている。
本発明の構成例は以下の通りである。
前記エチレン性不飽和結合含有化合物(B)が、エチレン性不飽和結合を有するパーフルオロ骨格の化合物、および、エチレン性不飽和結合を有するシロキサン骨格の化合物から選ばれる少なくとも1種を含み、
前記架橋剤(C)に対する架橋助剤(D)の含有量の質量比が5以上である、
エラストマー組成物。
本発明の一実施形態に係るエラストマー組成物(以下「本組成物」ともいう。)は、パーフルオロエラストマー以外の架橋性フルオロエラストマー(A)、エチレン性不飽和結合含有化合物(B)、架橋剤(C)および架橋助剤(D)を含み、
前記エチレン性不飽和結合含有化合物(B)が、エチレン性不飽和結合を有するパーフルオロ骨格の化合物、および、エチレン性不飽和結合を有するシロキサン骨格の化合物から選ばれる少なくとも1種を含み、
前記架橋剤(C)に対する架橋助剤(D)の含有量の質量比が5以上である。
エラストマー(A)は、パーフルオロエラストマー以外の架橋性のフルオロエラストマーであれば特に制限されず、未加硫フッ素ゴムなどともいい、架橋タイプとしては、パーオキサイド架橋、ポリオール架橋、アミン架橋、放射線架橋タイプなどが挙げられる。これらの中でも、プラズマ雰囲気下等において、パーティクルの発生源となる受酸剤を用いる必要がなく、得られたシール材を使用中に、パーティクルを発生させる恐れがない等の点で、パーオキサイド架橋可能なフルオロエラストマーであることが好ましい。
本組成物に含まれるエラストマー(A)は、1種でもよく、2種以上でもよい。
なお、本発明において、「エラストマー」と「ゴム」は同義であり、これらに特に区別はない。
フッ素含有量が前記範囲にあるエラストマー(A)を用いることで、100%Moの高い、特に、硬度、引張強さ、および、100%Moにバランスよく優れるシール材を容易に得ることができる。
前記フッ素含有量は、19F-NMRや1H-NMR等を用いたフッ素の元素分析または質量分析法(MSスペクトル法)等により、測定・算出することができる。
なお、本発明におけるフッ素含有量は、小数点以下を四捨五入した値である。
エラストマー(A1)とエラストマー(A2)とはフッ素含有量が前記範囲にあれば、これらのエラストマーを構成する構成単位の種類は、同様でも、異なっていてもよい。
本組成物がエラストマー(A1)を含む場合、本組成物に含まれるエラストマー(A1)は、1種でもよく、2種以上でもよい。また、本組成物がエラストマー(A2)を含む場合、本組成物に含まれるエラストマー(A2)も、1種でもよく、2種以上でもよい。
エラストマー(A2)のフッ素含有量は、55~68質量%であり、好ましくは60~68質量%、より好ましくは63~68質量%、さらに好ましくは65~68質量%である。
前記エラストマー(A1)および(A2)を用いることで、100%Moの高い、特に、硬度、引張強さ、および、100%Moにバランスよく優れるシール材を容易に得ることができる。また、短時間で均一なエラストマー組成物を容易に得ることができ、成形性、特に分出し性に優れるエラストマー組成物を容易に得ることができる。
エラストマー(A)のムーニー粘度が前記範囲にあると、成形性、特に分出し性に優れるエラストマー組成物を容易に得ることができる。
なお、本明細書におけるムーニー粘度は、ASTM D 1646に準拠して測定した121℃におけるムーニー粘度(ML1+10)のことをいう。
エラストマー(A)含有量が前記範囲にあると、シール性および耐プラズマ性に優れるシール材を容易に得ることができる。
なお、本明細書において、固形分とは、溶剤以外の成分のことをいう。
エラストマー(A1)および(A2)の含有量の質量比が前記範囲にあると、短時間で均一なエラストマー組成物とすることができ、成形性、特に分出し性に優れるエラストマー組成物を容易に得ることができ、100%Moの高い、特に、硬度、引張強さ、および、100%Moにバランスよく優れるシール材を容易に得ることができる。
FKMとしては特に制限されないが、ポリマー主鎖中に水素原子(炭素-水素結合)を含むポリマーが挙げられ、具体的には、フッ化ビニリデン由来の構成単位を含むことが好ましい。
前記パーフルオロアルキルビニルエーテルの好適例としては、パーフルオロメチルビニルエーテルが挙げられる。
ヨウ素基および/または臭素基を有するフルオロエラストマーは、例えば、該エラストマーを合成する際に、飽和または不飽和の含ヨウ素および/または含臭素化合物を1種以上用いることで得ることができる。
下記式(1)で表される化合物を用いることで、ヨウ素基および/または臭素基を側鎖に有するフルオロエラストマーを合成することができ、下記式(2)で表される化合物を用いることで、ヨウ素基および/または臭素基を末端に有するフルオロエラストマーを合成することができる。
[Y1およびY2はそれぞれ独立に、フッ素原子、水素原子またはメチル基であり、Rfは、水素原子の一部または全部がフッ素原子で置換された直鎖状または分岐状の含フッ素アルキレン基、または、該含フッ素アルキレン基の一部にエーテル結合を含む基であり、Xはヨウ素原子または臭素原子である。]
[Rは炭素数1~12のフルオロ炭化水素基であり、nおよびmはそれぞれ独立に、0~2の整数であり、n+mは1または2である。]
本組成物は、エチレン性不飽和結合含有化合物(B)を用いるため、耐プラズマ性に優れ、非粘着であるシール材を容易に得ることができる。
化合物(B)は、エチレン性不飽和結合を有するパーフルオロ骨格の化合物(B1)、および、エチレン性不飽和結合を有するシロキサン骨格の化合物(B2)から選ばれる少なくとも1種の化合物である。これらの中でも、より耐プラズマ性に優れるシール材を容易に得ることができる等の点から、前記化合物(B)は、化合物(B1)を含むことが好ましい。
化合物(B)は、2種以上のエチレン性不飽和結合を有していてもよい。
なお、化合物(B)を含む市販品としては、1成分型の市販品と2成分型の市販品等があるが、これらのいずれを使用してもよい。また、化合物(B)を含む市販品としては、液状、ペースト状、オイル状、ミラブル状等があるが、これらのいずれを使用してもよい。
前記化合物(B1)は、エラストマー(A)以外の化合物である。
前記化合物(B1)としては、例えば、エチレン性不飽和結合を有するパーフルオロポリエーテル構造の化合物、エチレン性不飽和結合を有するパーフルオロアルキレン構造の化合物が挙げられ、これらの中でも、エチレン性不飽和結合を有するパーフルオロポリエーテル構造の化合物(以下「化合物(B1-1)」ともいう。)が好ましい。
本組成物が化合物(B1)を含む場合、本組成物に含まれる化合物(B1)は、1種でもよく、2種以上でもよい。
前記化合物(B1-1)としては、1分子中に2個以上のエチレン性不飽和結合を有するパーフルオロポリエーテルであることが好ましい。
Z1-(X)p-(Rf-Q)a-Rf-(X)p-Z2 ・・・(1)
Rfは2価パーフルオロポリエーテル基(2価パーフルオロオキシアルキレン基)である。
pは独立に0または1である。aは0以上の整数であり、好ましくは0~10の整数、より好ましくは0~6の整数である。
Qは下記式(2)、(3)または(4)で表される基である。
該エチレン性不飽和結合含有基としては、1価のアルケニル基が好ましく、炭素数2~4の1価のアルケニル基がより好ましく、1価のビニル基が特に好ましい。
R’は独立に、置換または非置換の1価の炭化水素基であり、具体的には、例えば、メチル基、エチル基、n-プロピル基、i-プロピル基、n-ブチル基、i-ブチル基、t-ブチル基、ペンチル基、ヘキシル基などのアルキル基;フェニル基、トリル基、キシリル基などのアリール基;3-クロロプロピル基、3,3,3-トリフルオロプロピル基などのハロゲン化アルキル基が挙げられ、これらの中でも、炭素数1~5のアルキル基が好ましい。
CH2=CH-(X)p-(Rf-Q)a-Rf-(X)p-CH=CH2 ・・・(1-1)
[式(1-1)中の各符号の定義は、式(1)中の各符号の定義と同様ある。]
CH2=CH-(X)p-Rf-(X)p-CH=CH2 ・・・(1-1-1)
[式(1-1-1)中の各符号の定義は、式(1)中の各符号の定義と同様ある。]
-[CF(Z)OCF2]p-(CF2)r-[CF2OCF(Z)]q-
(Zは、フッ素原子または-CF3であり、p、qおよびrは、p≧1、q≧1、2≦p+q≦200、好ましくは2≦p+q≦110、0≦r≦6を満たす整数である。)、
-CF2CF2OCF2-(CF(CF3)OCF2)s-(CF2)r-(CF2OCF(CF3))t-CF2OCF2CF2-
(r、sおよびtは、0≦r≦6、s≧0、t≧0、0≦s+t≦200、好ましくは2≦s+t≦110を満たす整数である。)、
-CF(Z)-(OCF(Z)CF2)u-(OCF2)v-OCF(Z)-
(Zは、フッ素原子または-CF3であり、uおよびvは、1≦u≦100、1≦v≦50を満たす整数である。)、
-CF2CF2-[OCF2CF2CF2]w-OCF2CF2-
(wは、1≦w≦100を満たす整数である。)
前記化合物(B2)としては、1分子中に2個以上のエチレン性不飽和結合を有するポリシロキサンであることが好ましく、1分子中に2個以上のエチレン性不飽和結合を有し、かつ、ケイ素原子に有機基が結合したオルガノポリシロキサンであることが好ましい。前記エチレン性不飽和結合の結合位置は特に制限されない。
本組成物が化合物(B2)を含む場合、該本組成物に含まれる化合物(B2)は、1種でもよく、2種以上でもよい。
直鎖状アルキル基としては、例えば、メチル基、エチル基、プロピル基、ヘキシル基、オクチル基、デシル基等の炭素数1~20、好ましくは炭素数1~6の基が挙げられる。
分岐鎖状アルキル基としては、例えば、イソプロピル基、イソブチル基、t-ブチル基、2-エチルヘキシル基等の炭素数1~20、好ましくは炭素数1~6の基が挙げられる。
環状アルキル基としては、例えば、シクロペンチル基、シクロヘキシル基等の炭素数3~20の基が挙げられる。
アリール基としては、例えば、フェニル基、トリル基等の炭素数6~20の基が挙げられる。
アラルキル基としては、例えば、ベンジル基、2-フェニルエチル基、2-メチル-2-フェニルエチル基等の炭素数7~20の基が挙げられる。
ハロゲン化アルキル基としては、例えば、3,3,3-トリフルオロプロピル基、2-(ノナフルオロブチル)エチル基、2-(ヘプタデカフルオロオクチル)エチル基等の炭素数1~20、好ましくは炭素数1~6の基が挙げられる。
式(7)中のR2におけるアルコキシアルキル基としては、例えば、メトキシエチル基、メトキシプロピル基等の炭素数2~10の基が挙げられる。
式(7)中のR2におけるアシル基としては、例えば、アセチル基、オクタノイル基等の炭素数2~10の基が挙げられる。
前記架橋剤(C)としては特に制限されず、用いるエラストマー(A)の種類に応じて従来公知の架橋剤の中から選択して用いることができる。
本組成物に含まれる架橋剤(C)は、1種でもよく、2種以上でもよい。
これらの中でも、2,5-ジメチル-2,5-ジ(t-ブチルパーオキシ)ヘキサン、2,4-ジクロロベンゾイルパーオキサイド、ジクミルパーオキサイド、ベンゾイルパーオキサイド、α,α’-ビス(t-ブチルペルオキシ-m-イソプロピル)ベンゼンが好ましく、2,5-ジメチル-2,5-ジ(t-ブチルパーオキシ)ヘキサンがより好ましい。
前記架橋助剤(D)としては特に制限されず、架橋剤(C)の種類に応じて従来公知の架橋助剤を選択すればよい。
本組成物に含まれる架橋助剤(D)は、1種でもよく、2種以上でもよい。
これらの中では、反応性に優れ、耐熱性に優れ、高硬度で高モジュラスのシール材を容易に得ることができる等の点から、トリアリルイソシアヌレートが好ましい。
特に、プラズマ雰囲気下等において、シール材に生じ得るクラックを抑制するために、放射線架橋したシール材(放射線処理物)が好ましいが、この場合、下記のような充填材を用いなくても、より高硬度で高モジュラスのシール材を容易に得ることができる等の点から、本組成物中の架橋助剤(D)の含有量は、エラストマー(A)100質量部に対して、好ましくは2質量部以上、さらに好ましくは4質量部以上であり、好ましくは7質量部以下、さらに好ましくは6質量部以下である。
本組成物は、前記(A)~(D)の他に、本発明の効果を損なわない範囲で、必要に応じて、シール材に配合されてきた従来公知のその他の成分を含んでいてもよい。該その他の成分としては、例えば、分子中に2個以上のヒドロシリル基を有する反応性有機珪素化合物;触媒;酸化マグネシウム、水酸化カルシウム等の受酸剤;アントラキノン系顔料、ペリレン系顔料、ジオキサジン系顔料等の有機顔料;可塑剤;加工助剤;加硫促進剤;老化防止剤;酸化防止剤;無機充填材;有機充填材が挙げられる。
前記その他の成分はそれぞれ、1種のみを用いてもよいし、2種以上を用いてもよい。
前記無機充填材としては、例えば、カーボンブラック、シリカ、硫酸バリウム、酸化チタン、酸化アルミニウムが挙げられる。
前記有機充填材としては、例えば、PTFE、PFA、FEP、ETFE、PVDF等のフッ素樹脂、ポリエチレン樹脂、ポリイミド樹脂、シリコーン樹脂およびメラミン樹脂が挙げられる。
本組成物は、エラストマー(A)と、化合物(B)と、架橋剤(C)と、架橋助剤(D)と、必要により前記その他の成分とを混合(混練)することで製造することができる。
エラストマー(A)、化合物(B)、架橋剤(C)、架橋助剤(D)、前記その他の成分の混合順は特に制限されず、任意の順番で順次混合(混練)してもよく、これらを一括混合(混練)してもよいが、各成分が均一になるように、順次混合(混練)することが好ましい。
また、前記混合(混練)の際には、混合(混練)機に応じて、必要により、加熱下または冷却下で混合(混練)してもよい。
本発明の一実施形態に係るシール材(以下「本シール材」ともいう。)は、前記本組成物から得られたシール材であり、前記本組成物の架橋体であることが好ましく、前記本組成物の放射線架橋体であることがより好ましい。
なお、本組成物の放射線架橋体とは、具体的には、本組成物自体、または、該本組成物の架橋物(例:本組成物を熱架橋して得られる架橋物)に放射線を照射する工程を含む方法で得られた放射線架橋体が挙げられる。
本シール材の形状等は、用いる用途に応じて適宜選択すればよい。
本シール材のJIS K 6251:2017に基づいて測定された100%Moは、好ましくは2.4MPa以上、より好ましくは3MPa以上、さらに好ましくは4.5MPa以上、特に好ましくは5MPa以上である。
本シール材のJIS K 6253:2012に基づいて測定されたショアA硬度(タイプAデュロメータ硬度)は、好ましくは60以上である。
本シール材のJIS K 6251:2017に基づいて測定された引張強さは、好ましくは10MPa以上である。
本シール材は、具体的には、本組成物を成形することで製造することができるが、耐プラズマ性(耐ラジカル性)、耐クラック性、非粘着性等により優れるシール材を容易に得ることができる等の点から、本組成物を架橋処理する工程(架橋工程)を含む方法で得られた架橋処理物であることが好ましく、さらに、硬度、引張強さ、切断時伸び、および、100%Moにバランスよく優れるシール材を容易に得ることができる等の点から、本組成物に放射線を照射する工程(放射線照射工程)を含む方法で得られた放射線処理物であることがより好ましい。
この予備成形は、分出し工程で得られたシートから直接所望のシール材形状を形成してもよく、分出し工程で得られたシートを、裁断や押出成形等により、ロープ状(リボン状、うどん状等も同義である。)等の形状にし、得られたロープ状物を所望のシール材形状にしてもよい。
前記架橋工程は、前記予備成形で得られた所望のシール材形状物を用いて行うことが好ましい。
この二次架橋工程により、架橋を促進させたり、前記一次架橋工程後に未反応成分が残存していたとしても、該未反応成分を分解揮散させることができ、より放出ガス発生の少ないシール材を得ることができる。
照射する放射線は、1種単独でもよく、2種以上でもよい。
なお、前記放射線照射工程は、条件を変更して、2段階以上に分けて行ってもよい。
テクノフロンP959(ソルベイ社製)70質量部、テクノフロンP757(ソルベイ社製)30質量部、SIFEL 8070A(信越化学工業(株)製)1.0質量部、SIFEL 8070B(信越化学工業(株)製)1.0質量部、TAIC(三菱ケミカル(株)製、トリアリルイソシアヌレート)4.0質量部、および、パーヘキサ25B(日油(株)製)0.5質量部を順次ニーダーに入れ、電流値が安定するまで混練することで塊状のエラストマー組成物を得た。
なお、SIFEL 8070AおよびSIFEL 8070Bの少なくとも一方には、エチレン性不飽和結合を有するパーフルオロ骨格の化合物が含まれている。
作製した放射線架橋体について、下記常態物性および耐プラズマ性を測定した。結果を表1に示す。
実施例1において、表1に示す各成分を、表1に示す量で用いた以外は実施例1と同様にして、下記常態物性および耐プラズマ性を測定した。結果を表1に示す。
常態物性として、JIS K 6253:2012に準拠して、ショアA硬度を測定し、かつ、JIS K 6251:2017に準拠して、引張強さ、および、100%伸びにおける引張応力(100%Mo)を測定した。
得られた成形体について、耐プラズマ性(質量減少率)を測定した。具体的には以下の通り測定した。
電極径;φ300mm、電極間距離;50mmの平板プラズマ処理装置を用いて、RF1000W、O2ガスとCF4ガスの流量比(O2:CF4)190:10、ガス流量200sccm、真空度1torrの条件下で、得られた成形体にプラズマを3時間照射した。
なお、得られた成形体は、プラズマ電極より6cm離れた場所に設置した。次いで、試験前後の成形体の質量を測定して、下記式により、質量減少率(%)を求めることで、耐プラズマ性を評価した。質量減少率が小さいほど耐プラズマ性に優れるといえる。
質量減少率(%)=[(試験前の成形体の質量-試験後の成形体の質量)/試験前の成形体の質量]×100
・テクノフロンP459:架橋性フルオロエラストマー(ソルベイ社製)
・ダイエルG912:架橋性フルオロエラストマー(ダイキン工業(株)製)
・SIFEL 3590-N(信越化学工業(株)製、エチレン性不飽和結合を有するパーフルオロ骨格の化合物含有、一液型液状タイプ)
・X-71-906(信越化学工業(株)製、エチレン性不飽和結合を有するパーフルオロ骨格の化合物含有、ミラブルタイプ)
・KE-1830(信越化学工業(株)製、エチレン性不飽和結合を有するシロキサン骨格の化合物含有、一液型液状タイプ)
Claims (7)
- パーフルオロエラストマー以外の架橋性フルオロエラストマー(A)、エチレン性不飽和結合含有化合物(B)、架橋剤(C)および架橋助剤(D)を含み、
前記エチレン性不飽和結合含有化合物(B)が、エチレン性不飽和結合を有するパーフルオロ骨格の化合物、および、エチレン性不飽和結合を有するシロキサン骨格の化合物から選ばれる少なくとも1種を含み、
前記架橋剤(C)に対する架橋助剤(D)の含有量の質量比が5以上である、
エラストマー組成物。 - 前記エラストマー(A)がパーオキサイド架橋可能なフルオロエラストマーである、請求項1に記載のエラストマー組成物。
- 前記エチレン性不飽和結合含有化合物(B)の含有量が、前記エラストマー(A)の含有量100質量部に対し、0.5~50質量部である、請求項1または2に記載のエラストマー組成物。
- 前記架橋助剤(D)の含有量が、前記エラストマー(A)の含有量100質量部に対し、1~10質量部である、請求項1~3のいずれか1項に記載のエラストマー組成物。
- 充填材の含有量が、前記エラストマー(A)100質量部に対し、5質量部以下である、請求項1~4のいずれか1項に記載のエラストマー組成物。
- 請求項1~5のいずれか1項に記載のエラストマー組成物の放射線架橋体であるシール材。
- 請求項1~5のいずれか1項に記載のエラストマー組成物、または、該エラストマー組成物の架橋物に放射線を照射する工程を含む、シール材の製造方法。
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EP21872187.6A EP4219613A1 (en) | 2020-09-28 | 2021-09-09 | Elastomer composition, sealing material, and production method for sealing material |
US18/246,688 US20230365799A1 (en) | 2020-09-28 | 2021-09-09 | Elastomer Composition, Sealing Material, and Method for Producing Sealing Material |
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Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11116684A (ja) | 1997-10-13 | 1999-04-27 | Shin Etsu Chem Co Ltd | 硬化性組成物 |
JPH11116685A (ja) | 1997-10-09 | 1999-04-27 | Shin Etsu Chem Co Ltd | 硬化性組成物 |
JP2002097329A (ja) | 2000-09-20 | 2002-04-02 | Nippon Mektron Ltd | 含フッ素共重合体組成物 |
JP2003096303A (ja) * | 2001-05-31 | 2003-04-03 | Wacker Chemie Gmbh | 粘着性、熱架橋性1−成分−シリコーンコンパウンド、シリコーンエラストマーからの製法、そのようなエラストマー、シリコーンコンパウンドと支持体との接着法、そのようにして製造された接着材料、およびシリコーンコンパウンドの使用 |
JP2003183402A (ja) | 2001-10-12 | 2003-07-03 | Nichias Corp | 耐プラズマ性フッ素系エラストマーシール材 |
WO2004094527A1 (ja) | 2003-04-22 | 2004-11-04 | Daikin Industries Ltd. | プラズマ老化防止効果に優れた含フッ素エラストマー組成物およびその成形品 |
JP2008056739A (ja) | 2006-08-29 | 2008-03-13 | Nok Corp | フッ素ゴム組成物 |
WO2009119409A1 (ja) | 2008-03-27 | 2009-10-01 | ダイキン工業株式会社 | パーオキサイド架橋系含フッ素エラストマー組成物 |
JP2013166859A (ja) * | 2012-02-15 | 2013-08-29 | Three M Innovative Properties Co | フルオロポリマー組成物 |
JP2015067737A (ja) | 2013-09-30 | 2015-04-13 | 日本バルカー工業株式会社 | 熱伝導性樹脂組成物及びこれを用いた熱伝導性シート |
WO2016043100A1 (ja) | 2014-09-16 | 2016-03-24 | ダイキン工業株式会社 | 含フッ素エラストマー組成物および成形品 |
WO2017145920A1 (ja) * | 2016-02-24 | 2017-08-31 | ダイキン工業株式会社 | フッ素ゴム組成物及び成形品 |
JP2019026723A (ja) * | 2017-07-28 | 2019-02-21 | Nok株式会社 | 過酸化物架橋用フッ素ゴム組成物 |
WO2019054293A1 (ja) * | 2017-09-14 | 2019-03-21 | 三菱電線工業株式会社 | 未架橋ゴム組成物並びにそれを用いて製造されるゴム製品及びその製造方法 |
JP2019065307A (ja) * | 2017-09-14 | 2019-04-25 | 三菱電線工業株式会社 | シール材及びその製造方法 |
JP2019214743A (ja) * | 2019-09-19 | 2019-12-19 | 三菱電線工業株式会社 | ゴム製品及びその製造方法 |
JP2020203444A (ja) * | 2019-06-18 | 2020-12-24 | 信越化学工業株式会社 | ゴム物品及びその製造方法、ならびにゴム製品 |
-
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- 2021-09-09 EP EP21872187.6A patent/EP4219613A1/en active Pending
- 2021-09-09 KR KR1020237011598A patent/KR20230078695A/ko unknown
- 2021-09-09 CN CN202180064241.0A patent/CN116368187A/zh active Pending
- 2021-09-09 US US18/246,688 patent/US20230365799A1/en active Pending
- 2021-09-16 TW TW110134599A patent/TW202225310A/zh unknown
Patent Citations (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11116685A (ja) | 1997-10-09 | 1999-04-27 | Shin Etsu Chem Co Ltd | 硬化性組成物 |
JPH11116684A (ja) | 1997-10-13 | 1999-04-27 | Shin Etsu Chem Co Ltd | 硬化性組成物 |
JP2002097329A (ja) | 2000-09-20 | 2002-04-02 | Nippon Mektron Ltd | 含フッ素共重合体組成物 |
JP2003096303A (ja) * | 2001-05-31 | 2003-04-03 | Wacker Chemie Gmbh | 粘着性、熱架橋性1−成分−シリコーンコンパウンド、シリコーンエラストマーからの製法、そのようなエラストマー、シリコーンコンパウンドと支持体との接着法、そのようにして製造された接着材料、およびシリコーンコンパウンドの使用 |
JP2003183402A (ja) | 2001-10-12 | 2003-07-03 | Nichias Corp | 耐プラズマ性フッ素系エラストマーシール材 |
JP4720501B2 (ja) | 2003-04-22 | 2011-07-13 | ダイキン工業株式会社 | プラズマ老化防止効果に優れた含フッ素エラストマー組成物およびその成形品 |
WO2004094527A1 (ja) | 2003-04-22 | 2004-11-04 | Daikin Industries Ltd. | プラズマ老化防止効果に優れた含フッ素エラストマー組成物およびその成形品 |
JP2008056739A (ja) | 2006-08-29 | 2008-03-13 | Nok Corp | フッ素ゴム組成物 |
WO2009119409A1 (ja) | 2008-03-27 | 2009-10-01 | ダイキン工業株式会社 | パーオキサイド架橋系含フッ素エラストマー組成物 |
JP2013166859A (ja) * | 2012-02-15 | 2013-08-29 | Three M Innovative Properties Co | フルオロポリマー組成物 |
JP2015067737A (ja) | 2013-09-30 | 2015-04-13 | 日本バルカー工業株式会社 | 熱伝導性樹脂組成物及びこれを用いた熱伝導性シート |
WO2016043100A1 (ja) | 2014-09-16 | 2016-03-24 | ダイキン工業株式会社 | 含フッ素エラストマー組成物および成形品 |
WO2017145920A1 (ja) * | 2016-02-24 | 2017-08-31 | ダイキン工業株式会社 | フッ素ゴム組成物及び成形品 |
JP2019026723A (ja) * | 2017-07-28 | 2019-02-21 | Nok株式会社 | 過酸化物架橋用フッ素ゴム組成物 |
WO2019054293A1 (ja) * | 2017-09-14 | 2019-03-21 | 三菱電線工業株式会社 | 未架橋ゴム組成物並びにそれを用いて製造されるゴム製品及びその製造方法 |
JP2019052226A (ja) | 2017-09-14 | 2019-04-04 | 三菱電線工業株式会社 | ゴム製品及びその製造方法 |
JP2019065307A (ja) * | 2017-09-14 | 2019-04-25 | 三菱電線工業株式会社 | シール材及びその製造方法 |
JP2020203444A (ja) * | 2019-06-18 | 2020-12-24 | 信越化学工業株式会社 | ゴム物品及びその製造方法、ならびにゴム製品 |
JP2019214743A (ja) * | 2019-09-19 | 2019-12-19 | 三菱電線工業株式会社 | ゴム製品及びその製造方法 |
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TW202225310A (zh) | 2022-07-01 |
US20230365799A1 (en) | 2023-11-16 |
EP4219613A1 (en) | 2023-08-02 |
CN116368187A (zh) | 2023-06-30 |
KR20230078695A (ko) | 2023-06-02 |
JPWO2022065056A1 (ja) | 2022-03-31 |
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