WO2021230263A1 - Moisture detection sensor - Google Patents

Moisture detection sensor Download PDF

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Publication number
WO2021230263A1
WO2021230263A1 PCT/JP2021/017964 JP2021017964W WO2021230263A1 WO 2021230263 A1 WO2021230263 A1 WO 2021230263A1 JP 2021017964 W JP2021017964 W JP 2021017964W WO 2021230263 A1 WO2021230263 A1 WO 2021230263A1
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WO
WIPO (PCT)
Prior art keywords
electrode film
main surface
detection sensor
recess
porous body
Prior art date
Application number
PCT/JP2021/017964
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French (fr)
Japanese (ja)
Inventor
鉄三 原
昌宏 石井
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株式会社村田製作所
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Publication of WO2021230263A1 publication Critical patent/WO2021230263A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance

Definitions

  • the present invention relates to a sensor that is inserted into a detection target such as soil and detects the moisture content of the detection target.
  • Patent Document 1 describes a sensor that detects soil moisture.
  • the sensor described in Patent Document 1 includes a cylindrical base material and a reference material.
  • the reference body is a cylinder with a diameter larger than that of the base material.
  • the reference material is arranged along the peripheral surface of the base material.
  • Patent Document 1 does not describe a method of fixing the reference material to the support, but in general, a method of using an adhesive or a method of mechanically fixing the reference material with screws or the like can be considered.
  • a porous body having a fine space may be used as a reference material having water permeability and water retention.
  • the adhesive infiltrates the reference body and causes deterioration of characteristics.
  • the rigidity of the screws is significantly higher than that of the reference material, and there is a possibility that the reference material will be damaged when screwed. Further, if the screw is a metal (conductor), it is affected by the screw, and an error occurs in the detection result.
  • an object of the present invention is to provide a moisture detection sensor in which a porous body is fixed to a support without causing deterioration of characteristics or damage.
  • the moisture detection sensor of the present invention includes an insulating substrate, a first electrode film, a second electrode film, and a porous body.
  • the insulating substrate has a first main surface and a second main surface, and has a through-shaped recess.
  • the first electrode film and the second electrode film are arranged on the substrate.
  • the porous body is arranged on the substrate, and the dielectric constant changes depending on the amount of water contained.
  • the porous body is continuously arranged with the first portion arranged on the first main surface side and the first portion, and is continuously arranged with the second portion arranged in the recess and the second portion. It has a third portion arranged on the main surface side.
  • the cross-sectional area parallel to the first and second main planes of the second portion is smaller than the cross-sectional area parallel to the first and second main planes of the first and third portions.
  • the porous body is fixed to the substrate without using other members. Further, even if the first portion of the porous body receives a force to separate it from the substrate, the third portion is applied to the substrate and does not separate. As described above, by not using the other portion, the characteristic deterioration or damage caused by the deterioration does not occur, and the fixed state of the porous body on the substrate is stable.
  • the moisture detection sensor of the present invention includes an insulating substrate, a first electrode film, a second electrode film, and a porous body.
  • the insulating substrate has a first main surface and a second main surface, and has penetrating or non-penetrating recesses.
  • the first electrode film and the second electrode film are arranged on the substrate.
  • the porous body is arranged on the substrate, and the dielectric constant changes depending on the amount of water contained.
  • the porous body has a first portion arranged on the first main surface side and a second portion continuously arranged with the first portion and arranged in the recess.
  • the second portion includes a first position and a second position located closer to the second main surface than the first position.
  • the cross-sectional area orthogonal to the depth direction of the recess at the first position is smaller than the cross-sectional area orthogonal to the depth direction of the recess at the second position.
  • the porous body is fixed to the substrate without using other members. Further, even if the first portion of the porous body is subjected to a force to be separated from the substrate, the cross-sectional area of the second position of the second portion is larger than the cross-sectional area of the first position, and the second portion is applied to the concave portion of the substrate. , I won't leave. As described above, by not using the other portion, the characteristic deterioration or damage caused by the deterioration does not occur, and the fixed state of the porous body on the substrate is stable.
  • a moisture detection sensor in which a porous body is fixed to a support is realized without causing deterioration of characteristics or damage.
  • FIG. 1 is an external perspective view of the moisture detection sensor 10 according to the first embodiment.
  • 2A and 2C are plan views of the moisture detection sensor 10 according to the first embodiment, FIG. 2B is a side view thereof, and FIG. 2D is a side view thereof. It is the side sectional view.
  • FIG. 3 is an enlarged side sectional view of a fixed portion of the porous body 30 in the moisture detection sensor 10 according to the first embodiment.
  • 4 (A), 4 (B), 4 (C), and 4 (D) show the states of the moisture detection sensor 10 according to the first embodiment in each one step. It is a side sectional view.
  • 5A and 5C are plan views of the moisture detection sensor 10A according to the second embodiment, FIG. 5B is a side view thereof, and FIG.
  • 5D is a side view thereof. It is the side sectional view. 6 (A) and 6 (B) are enlarged side sectional views of a portion of the moisture detection sensor 10B according to the third embodiment including the porous body 30B. 7 (A), 7 (B), 7 (C), 7 (D), and 7 (E) show the portion of the moisture detection sensor 10C according to the fourth embodiment including the porous body 30C. It is an enlarged side sectional view.
  • FIG. 8 is an enlarged side sectional view of a portion of the moisture detection sensor 10D according to the fifth embodiment including the porous body 30D.
  • FIG. 9 is an enlarged side sectional view of a portion of the moisture detection sensor 10E according to the sixth embodiment including the porous body 30E.
  • FIG. 10 is an enlarged side sectional view of a portion of the moisture detection sensor 10F according to the seventh embodiment including the porous body 30F.
  • FIG. 1 is an external perspective view of the moisture detection sensor 10 according to the first embodiment.
  • 2A and 2C are plan views of the moisture detection sensor 10 according to the first embodiment,
  • FIG. 2B is a side view thereof, and
  • FIG. 2D is a side view thereof. It is the side sectional view.
  • FIG. 2D is a diagram showing a cross section taken along the line AA shown in FIG. 2A.
  • the insulating films 51 and 52 are omitted.
  • FIG. 3 is an enlarged side sectional view of a fixed portion of the porous body 30 in the moisture detection sensor 10 according to the first embodiment.
  • the moisture detection sensor 10 includes a substrate 20, a porous body 30, and an electrode film 41.
  • the electrode film 42, the insulating film 51, the insulating film 52, the electrode film 71, and the electrode film 72 are provided.
  • the substrate 20 has an insulating property.
  • the substrate 20 is formed of a glass epoxy substrate.
  • the substrate 20 has a main surface 201 and a main surface 202 that are orthogonal to each other in the thickness direction.
  • the main surface 201 corresponds to the "first main surface” of the present invention
  • the main surface 202 corresponds to the "second main surface” of the present invention.
  • the plan view means a state of the substrate 20 viewed in a direction orthogonal to the main surface 201 and the main surface 202.
  • the substrate 20 is rectangular in a plan view.
  • the substrate 20 has a shape that is long in one direction (longitudinal direction) orthogonal to the thickness direction and short in the other direction (shortward direction).
  • the substrate 20 is formed with a recess 61 and a recess 62 penetrating from the main surface 201 to the main surface 202.
  • the recess 61 and the recess 62 have a cylindrical shape.
  • the recess 61 and the recess 62 are arranged near one end of the substrate 20 in the longitudinal direction.
  • the electrode film 41 and the electrode film 42 are arranged on the main surface 201 of the substrate 20.
  • the set of the electrode film 41 and the electrode film 42 corresponds to the set of the "first electrode film” and the "second electrode film” of the present invention.
  • the electrode film 41 and the electrode film 42 are rectangular in a plan view.
  • the electrode film 41 and the electrode film 42 are arranged so that their side surfaces are close to each other.
  • the electrode film 41 has a non-formed portion of the electrode in the central portion in a plan view.
  • the recess 61 passes through the non-formed portion of the electrode in the electrode film 41.
  • the electrode film 42 has a non-formed portion of the electrode in the central portion in a plan view.
  • the recess 62 passes through the non-formed portion of the electrode in the electrode film 42.
  • a wiring electrode film 411 and a wiring electrode film 421 are arranged on the main surface 201 of the substrate 20.
  • the wiring electrode film 411 and the wiring electrode film 421 are mainly in a shape extending in the longitudinal direction of the substrate 20.
  • the wiring electrode film 411 is connected to the electrode film 41.
  • the wiring electrode film 421 is connected to the electrode film 42.
  • the wiring electrode film 411 and the wiring electrode film 421 are electrically connected to external circuit elements (for example, a circuit unit for extracting a capacitance value and a processing circuit unit for estimating a water content), which are not shown.
  • the insulating film 51 is formed on the main surface 201 of the substrate 20.
  • the insulating film 51 is thinner than the substrate 20.
  • the insulating film 51 covers the electrode film 41, the electrode film 42, the wiring electrode film 411, and the wiring electrode film 421.
  • the insulating film 51 may have a shape that at least covers a portion overlapping the electrode film 41, the electrode film 42, the wiring electrode film 411, and the wiring electrode film 421.
  • the electrode film 71 and the electrode film 72 are arranged on the main surface 202 of the substrate 20.
  • the set of the electrode film 71 and the electrode film 72 corresponds to the set of the "first electrode film” and the "second electrode film” of the present invention.
  • the electrode film 71 and the electrode film 72 are rectangular in a plan view.
  • the electrode film 71 and the electrode film 72 are arranged so that their side surfaces are close to each other.
  • the electrode film 71 has a non-formed portion of the electrode in the central portion in a plan view.
  • the recess 61 passes through the non-formed portion of the electrode in the electrode film 71.
  • the electrode film 72 has a non-formed portion of the electrode in the central portion in a plan view.
  • the recess 62 passes through the non-formed portion of the electrode in the electrode film 72.
  • a wiring electrode film 711 and a wiring electrode film 721 are arranged on the main surface 202 of the substrate 20.
  • the wiring electrode film 711 and the wiring electrode film 721 mainly have a shape extending in the longitudinal direction of the substrate 20.
  • the wiring electrode film 711 is connected to the electrode film 71.
  • the wiring electrode film 721 is connected to the electrode film 72.
  • the wiring electrode film 711 and the wiring electrode film 721 are electrically connected to external circuit elements (for example, a circuit unit for extracting a capacitance value and a processing circuit unit for estimating a water content), which are not shown.
  • the insulating film 52 is formed on the main surface 202 of the substrate 20.
  • the insulating film 52 is thinner than the substrate 20.
  • the insulating film 52 covers the electrode film 71, the electrode film 72, the wiring electrode film 711, and the wiring electrode film 721.
  • the insulating film 52 may have a shape that at least covers a portion overlapping the electrode film 71, the electrode film 72, the wiring electrode film 711, and the wiring electrode film 721.
  • the porous body 30 includes a first portion 31, a second portion 341, a second portion 342, and a third portion 33.
  • the first part 31, the third part 33, the second part 341 and the second part 342 are integrally formed. In other words, the first portion 31, the third portion 33, the second portion 341 and the second portion 342 are joined without using other portions.
  • the porous body 30 is made of, for example, gypsum. However, the porous body 30 may be made of another material as long as it is a material capable of such integral formation.
  • the first part 31 is a rectangular parallelepiped.
  • the first portion 31 is arranged on the main surface 201 side of the substrate 20. More specifically, the first portion 31 abuts on the surface of the insulating film 51 opposite to the main surface 201 side of the substrate 20. The first portion 31 overlaps with the electrode film 41 and the electrode film 42 in a plan view.
  • the third part 33 is a rectangular parallelepiped.
  • the third portion 33 is arranged on the main surface 202 side of the substrate 20. More specifically, the third portion 33 abuts on the surface of the insulating film 52 opposite to the main surface 202 side of the substrate 20.
  • the third portion 33 overlaps with the electrode film 71 and the electrode film 72 in a plan view.
  • the third portion 33 has substantially the same shape and size as the first portion 31.
  • the second part 341 is a columnar body.
  • the second portion 341 is arranged in the recess 61.
  • the second portion 341 is preferably filled in the entire recess 61.
  • the second part 342 is a columnar body.
  • the second portion 342 is arranged in the recess 62.
  • the second portion 342 is preferably filled in the entire recess 62.
  • the moisture detection sensor 10 detects the moisture content of the object to be detected (for example, soil) as follows.
  • the porous body 30 has a predetermined relative permittivity. Therefore, as shown in FIG. 3, an electric field E40 that reaches the electrode film 42 from the electrode film 41 through the first portion 31 of the porous body 30 is obtained. That is, a capacitor in which the porous body 30 of the dielectric is arranged is formed by using the electrode film 41 and the electrode film 42 as a pair of electrodes. Further, an electric field E70 that reaches the electrode membrane 72 from the electrode membrane 71 through the third portion 33 of the porous body 30 is obtained. That is, a capacitor in which the porous body 30 of the dielectric is arranged is formed by using the electrode film 71 and the electrode film 72 as a pair of electrodes.
  • the permittivity of the porous body 30 changes depending on the amount of water retained. Therefore, by detecting the capacitance between the electrode film 41 and the electrode film 42, the change in the dielectric constant of the first portion 31 can be detected. Further, by detecting the capacitance between the electrode film 71 and the electrode film 72, the change in the dielectric constant of the third portion 33 can be detected.
  • the moisture detection sensor 10 is arranged so that the porous body 30 enters the object to be detected (for example, soil).
  • the moisture detection sensor 10 is inserted.
  • the water content of the portion is detectable.
  • the electrode film 71, the electrode film 72, and the wiring electrode film connected to these can be omitted, and the electrode film 71 can be omitted.
  • the electrode film 41, the electrode film 42, and the wiring electrode film connected to these can be omitted.
  • the water content is calculated individually from the capacitance between the electrode film 41 and the electrode film 42 and the capacitance between the electrode film 71 and the electrode film 72.
  • the water content on the main surface 201 side and the water content on the main surface 202 side of the water content detection sensor 10 in the detection target can be individually detected.
  • the porous body 30 is fixed to the substrate 20 without using other parts. As a result, deterioration and damage of the characteristics of the moisture detection sensor 10 can be suppressed.
  • the area of the third portion 33 in a plan view is larger than the plane cross-sectional area of the recess 61 (the area of the surface orthogonal to the extending direction) and the plane cross-sectional area of the recess 62 (the area of the surface orthogonal to the extending direction). It is larger than the total area of these. Therefore, for example, even if a force for pulling the first portion 31 away from the main surface 201 is generated in the porous body 30, the third portion 33 is pushed by the main surface 202. As a result, the separation of the first portion 31 from the main surface 201 is suppressed.
  • the area of the first portion 31 in a plan view is larger than the plane cross-sectional area of the recess 61 (the area of the surface orthogonal to the extending direction) and the plane cross-sectional area of the recess 62 (the area of the surface orthogonal to the extending direction). , It is larger than the area where these are added. Therefore, even if a force for pulling the third portion 33 away from the main surface 202 is generated in the porous body 30, the first portion 31 is pushed by the main surface 201. As a result, the separation of the third portion 33 from the main surface 202 is suppressed.
  • the porous body 30 is stably fixed to the substrate 20. That is, the moisture detection sensor 10 can realize a structure in which the porous body 30 is fixed to the substrate 20 without causing deterioration of characteristics or damage.
  • the electrode film 41 and the electrode film 42 are close to the same surface of the first portion 31 of the porous body 30 and are arranged side by side along this surface. Therefore, the distance between the electrode film 41 and the electrode film 42 can be a desired distance regardless of the shape and volume of the first portion 31. In other words, the pattern of the electric field distribution of the electric field E40 generated between the electrode film 41 and the electrode film 42 via the first portion 31 can be controlled to a desired shape.
  • the electrode film 71 and the electrode film 72 are close to the same surface of the third portion 33 of the porous body 30 and are arranged side by side along this surface.
  • the distance between the electrode film 71 and the electrode film 72 can be a desired distance regardless of the shape and volume of the third portion 33.
  • the pattern of the electric field distribution of the electric field E70 generated between the electrode film 71 and the electrode film 72 via the third portion 33 can be controlled to a desired shape.
  • the water content detection sensor 10 can adjust the distance between the electrodes as a capacitor, the detection capacity can be adjusted, and the desired detection sensitivity to the water content can be realized.
  • the moisture detection sensor 10 includes an insulating film 51 between the electrode film 41 and the electrode film 42 and the first portion 31 of the porous body 30. As a result, it is possible to suppress the flow of a conduction current between the electrode film 41 and the electrode film 42 via the first portion 31 of the porous body 30.
  • the moisture detection sensor 10 includes an insulating film 52 between the electrode film 71 and the electrode film 72 and the third portion 33 of the porous body 30. As a result, it is possible to suppress the flow of a conduction current between the electrode film 71 and the electrode film 72 via the third portion 33 of the porous body 30. As a result, the water content detection sensor 10 can detect the water content with higher accuracy.
  • the moisture detection sensor 10 having such a configuration can be manufactured, for example, as follows.
  • 4 (A), 4 (B), 4 (C), and 4 (D) show the states of the moisture detection sensor 10 according to the first embodiment in each one step. It is a plan view and a side sectional view.
  • the electrode film 41 and the electrode film 42 are formed on the main surface 201 of the substrate 20, and the electrode film 71 and the electrode film 72 are formed on the main surface 202 of the substrate 20. At this time, an opening is formed in the central portion of each of the electrode film 41, the electrode film 42, the electrode film 71, and the electrode film 72. Although not shown, the above-mentioned wiring electrode films are also formed at this time.
  • the insulating film 51 is formed on the main surface 201 of the substrate 20, and the insulating film 52 is formed on the main surface 202 of the substrate 20.
  • the substrate 20, the insulating film 51, and the recess 61 and the recess 62 penetrating the insulating film 52 are formed.
  • the recess 61 is formed in the opening of the electrode film 41 and the electrode film 71
  • the recess 62 is formed in the opening of the electrode film 42 and the electrode film 72.
  • the electrode film 41, the electrode film 42, the electrode film 71, and the mold 90 surrounding the forming region of the electrode film 72 are installed on the substrate 20.
  • the mold 90 has an injection port 91.
  • the mold 90 has a portion arranged on the main surface 201 side of the substrate 20 and a portion arranged on the main surface 202 side.
  • the liquid porous body 30 is injected from the injection port 91. Since the injection port 91 is on the main surface 202 side, the liquid porous body 30 first flows into the internal space 901, and then flows into the internal space 902 through the recess 61 and the recess 62.
  • the injection hole may also be provided on the internal space 902 side. By providing the injection hole on the internal space 902 side as well, the filling time of the liquid porous body 30 can be shortened.
  • the moisture detection sensor 10 is completed by removing the mold 90.
  • FIGS. 5A and 5C are plan views of the moisture detection sensor 10A according to the second embodiment
  • FIG. 5B is a side view thereof
  • FIG. 5D is a side view thereof. It is the side sectional view.
  • FIG. 5D is a diagram showing a cross section taken along the line BB shown in FIG. 5A.
  • the insulating films 51 and 52 are omitted.
  • the moisture detection sensor 10A according to the second embodiment detects moisture according to the first embodiment.
  • the difference is that the electrode film 801 and the electrode film 802, the electrode film 803, and the electrode film 804 are added to the sensor 10.
  • Other configurations of the moisture detection sensor 10A are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the electrode film 801 and the electrode film 802 are arranged on the main surface 201 of the substrate 20.
  • the electrode film 803 and the electrode film 804 are arranged on the main surface 202 of the substrate 20.
  • the pair of the electrode film 801 and the electrode film 802 and the pair of the electrode film 803 and the electrode film 804 correspond to the pair of the "third electrode film” and the "fourth electrode film” of the present invention, respectively. ..
  • the electrode film 801 and the electrode film 802, the electrode film 803, and the electrode film 804 are rectangular in a plan view.
  • the electrode film 801 and the electrode film 802 are arranged so that their side surfaces are close to each other.
  • the electrode film 801 and the electrode film 802 are arranged apart from each other at a distance that does not affect the capacitance measurement between the electrode film 41 and the electrode film 42.
  • the electrode film 803 and the electrode film 804 are arranged so that their side surfaces are close to each other.
  • the electrode film 803 and the electrode film 804 are arranged apart from each other at a distance that does not affect the capacitance measurement between the electrode film 71 and the electrode film 72.
  • the wiring electrode film 811 and the wiring electrode film 821 are arranged on the main surface 201 of the substrate 20.
  • the wiring electrode film 811 and the wiring electrode film 821 are mainly in a shape extending in the longitudinal direction of the substrate 20.
  • the wiring electrode film 811 is connected to the electrode film 801.
  • the wiring electrode film 821 is connected to the electrode film 802.
  • a wiring electrode film 831 and a wiring electrode film 841 are arranged on the main surface 202 of the substrate 20.
  • the wiring electrode film 831 and the wiring electrode film 841 mainly have a shape extending in the longitudinal direction of the substrate 20.
  • the wiring electrode film 831 is connected to the electrode film 803.
  • the wiring electrode film 841 is connected to the electrode film 804.
  • the moisture detection sensor 10A has the same effect as the moisture detection sensor 10. Further, the moisture detection sensor 10A can use the detection capacitance between the electrode film 801 and the electrode film 802 and the detection capacitance between the electrode film 803 and the electrode film 804 as a reference. By using the detection capacity of the reference, the estimation calculation accuracy of the water content is improved, and the water content detection sensor 10B can detect the water content of the detection target object more accurately.
  • the pair of the reference electrode film 801 and the electrode film 802 and the pair of the electrode film 803 and the electrode film 804 may have at least one of them.
  • the electrode film 801 and the electrode film 802 when the electrode film 801 and the electrode film 802 are used, the electrode film 803 and the electrode film 804, and the wiring electrode film connected to them can be omitted, and when the electrode film 803 and the electrode film 804 are used, the electrode film is used.
  • the 801 and the electrode film 802, and the wiring electrode film connected to these can be omitted.
  • only the set of the electrode film 41 and the electrode film 42 only the set of the electrode film 801 and the electrode film 802 may be used, and only the set of the electrode film 71 and the electrode film 72 may be used. In this case, only the pair of the electrode film 803 and the electrode film 804 may be used.
  • the moisture detection sensor 10B according to the third embodiment does not have the third portion 33 of the porous body 30 with respect to the moisture detection sensor 10 according to the first embodiment, and is second.
  • the shapes of the two parts 341 and the second part 342 are different.
  • Other configurations of the moisture detection sensor 10B are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
  • the porous body 30B includes a first portion 31, a second portion 341B, and a second portion 342B.
  • the first portion 31, the second portion 341B, and the second portion 342B are integrally formed.
  • the first portion 31 is arranged on the main surface 201 side of the substrate 20.
  • the second portion 341B is arranged in the recess 61B, and the second portion 342B is arranged in the recess 62B.
  • the area of the end surface on the main surface 201 side (the end surface on the side closer to the first portion 31: the first position P1) is the end surface on the main surface 202 side (the side far from the first portion 31). End face: Smaller than the area of the second position P2).
  • the first position P1 and the second position P2 shown in FIG. 6A are examples.
  • the recess 61B and the second portion 341B have a shape in which the cross-sectional area gradually increases from the main surface 201 to the main surface 202.
  • the second portion 341B is a hexagon having a maximum cross-sectional area (planar cross-sectional area) at an intermediate position in the extending direction (thickness direction of the substrate 20). It may be in shape.
  • the position where the cross-sectional area (planar cross-sectional area) is relatively small is larger than the position where the cross-sectional area (planar cross-sectional area) is relatively large in the extending direction.
  • first position P1 in FIG. 6B corresponds to the "first position" of the present invention
  • the position where the cross-sectional area is relatively large (FIG. 6B).
  • Second position P2) corresponds to the "second position" of the present invention.
  • the area of the end surface on the main surface 201 side is the end surface on the main surface 202 side (the end surface on the side far from the first portion 31). : Smaller than the area of (2nd position).
  • the recess 62B and the second portion 342B have a shape in which the cross-sectional area gradually increases from the main surface 201 to the main surface 202.
  • the second portion 342B is a hexagon having a maximum cross-sectional area (planar cross-sectional area) at an intermediate position in the extending direction (thickness direction of the substrate 20). It may be in shape.
  • the position where the cross-sectional area (planar cross-sectional area) is relatively small is larger than the position where the cross-sectional area (planar cross-sectional area) is relatively large in the extending direction.
  • the position having a relatively small cross-sectional area corresponds to the "first position" of the present invention, and the position having a relatively large cross-sectional area corresponds to the "second position" of the present invention.
  • the second portion 341B and the second portion 342B are caught on the walls of the recess 61B and the recess 62B, respectively, even if a force is applied to the porous body 30B so that the porous body 30B comes out to the first portion 31 side. .. As a result, the porous body 30B is stably fixed to the substrate 20.
  • the moisture detection sensor 10B can realize a structure in which the porous body 30B is fixed to the substrate 20 without causing deterioration of characteristics or damage, like the moisture detection sensor 10.
  • the moisture detection sensor 10C according to the fourth embodiment has the shape of the recess 61C, the recess 62C, and the porous body 30C with respect to the moisture detection sensor 10B according to the third embodiment. different.
  • Other configurations of the moisture detection sensor 10C are the same as those of the moisture detection sensor 10B, and the description of the same parts will be omitted.
  • the porous body 30C includes a first portion 31, a second portion 341C, and a second portion 342C.
  • the first portion 31, the second portion 341C, and the second portion 342C are integrally formed.
  • the first portion 31 is arranged on the main surface 201 side of the substrate 20.
  • the second portion 341C is arranged in the recess 61C, and the second portion 342C is arranged in the recess 62C.
  • the area of the end surface on the main surface 201 side is the end surface on the main surface 202 side (the end surface on the side far from the first portion 31). : Smaller than the area of (2nd position).
  • the recess 61C and the second portion 341C have a shape in which the cross-sectional area gradually increases from the main surface 201 to the main surface 202.
  • the area of the end surface on the main surface 201 side is the end surface on the main surface 202 side (the end surface on the side far from the first portion 31). : Smaller than the area of (2nd position).
  • the recess 62C and the second portion 342C have a shape in which the cross-sectional area gradually increases from the main surface 201 to the main surface 202.
  • shapes may be used. In these shapes, positions with a relatively small cross-sectional area (planar cross-sectional area) and positions with a relatively large cross-sectional area (planar cross-sectional area) alternately exist in the extending direction, and the cross-sectional areas (planar) are relatively large.
  • It is a shape in which at least one of a position having a small cross-sectional area (cross-sectional area) and a position having a relatively large cross-sectional area (planar cross-sectional area) exist at a plurality of places.
  • the position having a relatively small cross-sectional area corresponds to the "first position" of the present invention
  • the position having a relatively large cross-sectional area corresponds to the "second position" of the present invention.
  • the second portion 341C and the second portion 342C are caught on the walls of the recess 61C and the recess 62C, respectively, even if a force is applied to the porous body 30C so that the porous body 30C comes out to the first portion 31 side. .. As a result, the porous body 30C is stably fixed to the substrate 20.
  • the moisture detection sensor 10C can realize a structure in which the porous body 30C is fixed to the substrate 20 without causing deterioration of characteristics or damage, like the moisture detection sensor 10B.
  • FIG. 8 is an enlarged side sectional view of a portion of the moisture detection sensor 10D according to the fifth embodiment including the porous body 30D.
  • the moisture detection sensor 10D according to the fifth embodiment differs from the moisture detection sensor 10B according to the third embodiment in the shapes of the recess 61D, the recess 62D, and the porous body 30D.
  • Other configurations of the moisture detection sensor 10D are the same as those of the moisture detection sensor 10B, and the description of the same parts will be omitted.
  • the porous body 30D includes a first portion 31, a second portion 341D, and a second portion 342D.
  • the first portion 31, the second portion 341D, and the second portion 342D are integrally formed.
  • the first portion 31 is arranged on the main surface 201 side of the substrate 20.
  • the second portion 341D is arranged in the recess 61D, and the second portion 342D is arranged in the recess 62D.
  • the side surface (peripheral surface) connecting the end surface on the main surface 201 side and the end surface on the main surface 202 side is roughened.
  • a position having a relatively small cross-sectional area (planar cross-sectional area) in the extending direction (direction orthogonal to the two end faces) has a relatively small cross-sectional area (planar cross-sectional area). ) Is larger than the position on the first portion 31 side.
  • the side surface (peripheral surface) connecting the end surface on the main surface 201 side and the end surface on the main surface 202 side is roughened.
  • a position having a relatively small cross-sectional area (planar cross-sectional area) in the extending direction (direction orthogonal to the two end faces) has a relatively small cross-sectional area (planar cross-sectional area). ) Is larger than the position on the first portion 31 side.
  • the position having a relatively small cross-sectional area corresponds to the "first position" of the present invention, and the position having a relatively large cross-sectional area corresponds to the "second position" of the present invention.
  • the second portion 341D and the second portion 342D are caught on the walls of the recess 61D and the recess 62D, respectively, even if a force is applied to the porous body 30D so that the porous body 30D comes out to the first portion 31 side. .. As a result, the porous body 30D is stably fixed to the substrate 20.
  • the moisture detection sensor 10D can realize a structure in which the porous body 30D is fixed to the substrate 20 without causing deterioration of characteristics or damage, like the moisture detection sensor 10B.
  • FIG. 9 is an enlarged side sectional view of a portion of the moisture detection sensor 10E according to the sixth embodiment including the porous body 30E.
  • the moisture detection sensor 10E according to the sixth embodiment is different from the moisture detection sensor 10B according to the third embodiment in the shapes of the recess 61E, the recess 62E, and the porous body 30E.
  • Other configurations of the moisture detection sensor 10E are the same as those of the moisture detection sensor 10B, and the description of the same parts will be omitted.
  • the recess 61E and the recess 62E are recessed from the main surface 201 of the substrate 20 and do not reach the main surface 202. That is, the recess 61E and the recess 62E are not through holes.
  • the second portion 341E of the porous body 30E is arranged in the recess 61E, and the second portion 342E is arranged in the recess 62E.
  • the moisture detection sensor 10E can realize a structure in which the porous body 30E is fixed to the substrate 20 without causing deterioration of characteristics or damage, similarly to the moisture detection sensor 10.
  • the recesses 61D and 62D in FIG. 8 in the embodiment may have a structure that does not reach the main surface 202 as in the present embodiment. In other words, these recesses do not have to be through holes.
  • FIG. 10 is an enlarged side sectional view of a portion of the moisture detection sensor 10F according to the seventh embodiment including the porous body 30F.
  • the moisture detection sensor 10F according to the seventh embodiment is different from the moisture detection sensor 10B according to the third embodiment in the formation positions of the recess 61F, the recess 62F, and the porous body 30F.
  • Other configurations of the moisture detection sensor 10F are the same as those of the moisture detection sensor 10B, and the description of the same parts will be omitted.
  • the recess 61F is formed so as not to penetrate the central portion of the electrode film 41.
  • the recess 62F is formed so as not to penetrate the central portion of the electrode film 42.
  • the second portion 341F of the porous body 30F is arranged in the recess 61F, and the second portion 342F is arranged in the recess 62F. Further, by omitting the recess 62F, only the recess 61F may be used, or a recess may be added.
  • the moisture detection sensor 10F can realize a structure in which the porous body 30F is fixed to the substrate 20 without causing deterioration of characteristics or damage, similarly to the moisture detection sensor 10.
  • Moisture detection sensor 20 Substrate 30, 30B, 30C, 30D, 30E, 30F: Porous 31: First part 33: Third part 341, 341B, 341C, 341D, 341E, 341F, 342, 342B, 342C, 342D, 342E, 342F: Second part 41, 42, 71, 72, 801, 802, 803, 804: Electrode film 51, 52: Insulation film 61, 61B, 61C , 61D, 61E, 61F, 62, 62B, 62C, 62D, 62E, 62F: Recess 90: Mold 91: Injection port 201, 202: Main surface 411, 421, 711, 721, 811, 821, 831, 841: Wiring electrode films 901, 902: Internal space P1: First position P2: Second position

Abstract

This moisture detection sensor (10) comprises a substrate (20) and a porous body (30). The substrate (20) has a main surface (201) and a main surface (202) and has an insulating property. The porous body (30) is disposed on the substrate (20) and has permittivity varying according to the amount of contained moisture. The porous body (30) comprises: a first portion (31) disposed on the main surface (201) side; a third portion (33) disposed on the main surface (202) side; and a second portion (341) and a second portion (342) that are respectively disposed in a recess section (61) and a recess section (62) of the substrate (20). The area of the third portion (33) is greater than the area of the second portion (341) and the area of the second portion (342).

Description

水分検出センサMoisture detection sensor
　本発明は、土壌等の検出対象物に差し込まれ、検出対象物の水分を検出するセンサに関する。 The present invention relates to a sensor that is inserted into a detection target such as soil and detects the moisture content of the detection target.
　特許文献１には、土壌の水分を検出するセンサが記載されている。特許文献１に記載のセンサは、円筒形状の基材と参照材とを備えている。 Patent Document 1 describes a sensor that detects soil moisture. The sensor described in Patent Document 1 includes a cylindrical base material and a reference material.
　参照体は、基材よりも径の大きな円筒形である。参照材は、基材の周面に沿って配置されている。 The reference body is a cylinder with a diameter larger than that of the base material. The reference material is arranged along the peripheral surface of the base material.
特開２０１２－２４２１２７号公報Japanese Unexamined Patent Publication No. 2012-242127
　特許文献１では、参照材を支持体に固定する方法が記載されていないが、一般的には、接着剤を用いる方法や、ネジ等による機械的に固定する方法が考えられる。 Patent Document 1 does not describe a method of fixing the reference material to the support, but in general, a method of using an adhesive or a method of mechanically fixing the reference material with screws or the like can be considered.
　また、特許文献１には開示されていないが、透水性および保水性を備える参照材としては、微細な空間を備える多孔体が用いられることがある。 Further, although not disclosed in Patent Document 1, a porous body having a fine space may be used as a reference material having water permeability and water retention.
　しかしながら、接着剤を用いる場合、接着剤が参照体に浸潤して特性劣化を生じてしまう。 However, when an adhesive is used, the adhesive infiltrates the reference body and causes deterioration of characteristics.
　ネジ等による機械的な固定では、ネジの剛性が参照材よりも大幅に高く、ネジ留め時に参照材を破損する可能性がある。また、ネジが金属（導電体）であると、その影響を受けて、検出結果に誤差を生じてしまう。 With mechanical fixing with screws, etc., the rigidity of the screws is significantly higher than that of the reference material, and there is a possibility that the reference material will be damaged when screwed. Further, if the screw is a metal (conductor), it is affected by the screw, and an error occurs in the detection result.
　したがって、本発明の目的は、特性劣化や破損を生じさせることなく、多孔体が支持体に固定された水分検出センサを提供することにある。 Therefore, an object of the present invention is to provide a moisture detection sensor in which a porous body is fixed to a support without causing deterioration of characteristics or damage.
　この発明の水分検出センサは、絶縁性の基板、第１電極膜、第２電極膜、および、多孔体を備える。絶縁性の基板は、第１主面と第２主面とを有し、貫通形状の凹部を有する。第１電極膜および第２電極膜は、基板に配置されている。多孔体は、基板に配置され、含有する水分量によって誘電率が変化する。多孔体は、第１主面側に配置された第１部分と、第１部分と連続的に配置され、凹部に配置される第２部分と、第２部分と連続的に配置され、第２主面側に配置された第３部分と、を有する。第２部分の第１主面および第２主面に平行な断面積は、第１部分および第３部分の第１主面および第２主面に平行な断面積よりも小さい。 The moisture detection sensor of the present invention includes an insulating substrate, a first electrode film, a second electrode film, and a porous body. The insulating substrate has a first main surface and a second main surface, and has a through-shaped recess. The first electrode film and the second electrode film are arranged on the substrate. The porous body is arranged on the substrate, and the dielectric constant changes depending on the amount of water contained. The porous body is continuously arranged with the first portion arranged on the first main surface side and the first portion, and is continuously arranged with the second portion arranged in the recess and the second portion. It has a third portion arranged on the main surface side. The cross-sectional area parallel to the first and second main planes of the second portion is smaller than the cross-sectional area parallel to the first and second main planes of the first and third portions.
　この構成では、他の部材を用いることなく、多孔体が基板に固定される。また、多孔体の第１部分が基板から離される力を受けたとしても、第３部分が基板にかかり、離れない。このように、他の部分を用いないことによって、これに起因する特性劣化や破損は、生じず、基板への多孔体の固定状態は、安定する。 In this configuration, the porous body is fixed to the substrate without using other members. Further, even if the first portion of the porous body receives a force to separate it from the substrate, the third portion is applied to the substrate and does not separate. As described above, by not using the other portion, the characteristic deterioration or damage caused by the deterioration does not occur, and the fixed state of the porous body on the substrate is stable.
　この発明の水分検出センサは、絶縁性の基板、第１電極膜、第２電極膜、および、多孔体を備える。絶縁性の基板は、第１主面と第２主面とを有し、貫通または非貫通の凹部を有する。第１電極膜および第２電極膜は、基板に配置されている。多孔体は、基板に配置され、含有する水分量によって誘電率が変化する。多孔体は、第１主面側に配置された第１部分と、第１部分と連続的に配置され、凹部に配置される第２部分と、を有する。第２部分は、第１位置と、第１位置よりも第２主面側に位置する第２位置と、を含む。第１位置の凹部の深さ方向に直交する断面積は、第２位置の凹部の深さ方向に直交する断面積よりも小さい。 The moisture detection sensor of the present invention includes an insulating substrate, a first electrode film, a second electrode film, and a porous body. The insulating substrate has a first main surface and a second main surface, and has penetrating or non-penetrating recesses. The first electrode film and the second electrode film are arranged on the substrate. The porous body is arranged on the substrate, and the dielectric constant changes depending on the amount of water contained. The porous body has a first portion arranged on the first main surface side and a second portion continuously arranged with the first portion and arranged in the recess. The second portion includes a first position and a second position located closer to the second main surface than the first position. The cross-sectional area orthogonal to the depth direction of the recess at the first position is smaller than the cross-sectional area orthogonal to the depth direction of the recess at the second position.
　この構成では、他の部材を用いることなく、多孔体が基板に固定される。また、多孔体の第１部分が基板から離される力を受けたとしても、第２部分の第２位置の断面積が第１位置の断面積よりも大きく、第２部分が基板の凹部にかかり、離れない。このように、他の部分を用いないことによって、これに起因する特性劣化や破損は、生じず、基板への多孔体の固定状態は、安定する。 In this configuration, the porous body is fixed to the substrate without using other members. Further, even if the first portion of the porous body is subjected to a force to be separated from the substrate, the cross-sectional area of the second position of the second portion is larger than the cross-sectional area of the first position, and the second portion is applied to the concave portion of the substrate. , I won't leave. As described above, by not using the other portion, the characteristic deterioration or damage caused by the deterioration does not occur, and the fixed state of the porous body on the substrate is stable.
　この発明によれば、特性劣化や破損を生じさせることなく、多孔体が支持体に固定された水分検出センサを実現する。 According to the present invention, a moisture detection sensor in which a porous body is fixed to a support is realized without causing deterioration of characteristics or damage.
図１は、第１の実施形態に係る水分検出センサ１０の外観斜視図である。FIG. 1 is an external perspective view of the moisture detection sensor 10 according to the first embodiment. 図２（Ａ）、図２（Ｃ）は、第１の実施形態に係る水分検出センサ１０の平面図であり、図２（Ｂ）は、その側面図であり、図２（Ｄ）は、その側面断面図である。2A and 2C are plan views of the moisture detection sensor 10 according to the first embodiment, FIG. 2B is a side view thereof, and FIG. 2D is a side view thereof. It is the side sectional view. 図３は、第１の実施形態に係る水分検出センサ１０における多孔体３０の固定部分を拡大した側面断面図である。FIG. 3 is an enlarged side sectional view of a fixed portion of the porous body 30 in the moisture detection sensor 10 according to the first embodiment. 図４（Ａ）、図４（Ｂ）、図４（Ｃ）、および、図４（Ｄ）は、第１の実施形態に係る水分検出センサ１０の製造工程のそれぞれ一過程での状態を示す側面断面図である。4 (A), 4 (B), 4 (C), and 4 (D) show the states of the moisture detection sensor 10 according to the first embodiment in each one step. It is a side sectional view. 図５（Ａ）、図５（Ｃ）は、第２の実施形態に係る水分検出センサ１０Ａの平面図であり、図５（Ｂ）は、その側面図であり、図５（Ｄ）は、その側面断面図である。5A and 5C are plan views of the moisture detection sensor 10A according to the second embodiment, FIG. 5B is a side view thereof, and FIG. 5D is a side view thereof. It is the side sectional view. 図６（Ａ）、図６（Ｂ）は、第３の実施形態に係る水分検出センサ１０Ｂにおける多孔体３０Ｂを備える部分を拡大した側面断面図である。6 (A) and 6 (B) are enlarged side sectional views of a portion of the moisture detection sensor 10B according to the third embodiment including the porous body 30B. 図７（Ａ）、図７（Ｂ）、図７（Ｃ）、図７（Ｄ）、図７（Ｅ）は、第４の実施形態に係る水分検出センサ１０Ｃにおける多孔体３０Ｃを備える部分を拡大した側面断面図である。7 (A), 7 (B), 7 (C), 7 (D), and 7 (E) show the portion of the moisture detection sensor 10C according to the fourth embodiment including the porous body 30C. It is an enlarged side sectional view. 図８は、第５の実施形態に係る水分検出センサ１０Ｄにおける多孔体３０Ｄを備える部分を拡大した側面断面図である。FIG. 8 is an enlarged side sectional view of a portion of the moisture detection sensor 10D according to the fifth embodiment including the porous body 30D. 図９は、第６の実施形態に係る水分検出センサ１０Ｅにおける多孔体３０Ｅを備える部分を拡大した側面断面図である。FIG. 9 is an enlarged side sectional view of a portion of the moisture detection sensor 10E according to the sixth embodiment including the porous body 30E. 図１０は、第７の実施形態に係る水分検出センサ１０Ｆにおける多孔体３０Ｆを備える部分を拡大した側面断面図である。FIG. 10 is an enlarged side sectional view of a portion of the moisture detection sensor 10F according to the seventh embodiment including the porous body 30F.
　（第１の実施形態）
　本発明の第１の実施形態に係る水分検出センサについて、図を参照して説明する。図１は、第１の実施形態に係る水分検出センサ１０の外観斜視図である。図２（Ａ）、図２（Ｃ）は、第１の実施形態に係る水分検出センサ１０の平面図であり、図２（Ｂ）は、その側面図であり、図２（Ｄ）は、その側面断面図である。図２（Ｄ）は、図２（Ａ）に示すＡ－Ａ断面を示す図である。なお、図２（Ａ）、図２（Ｃ）の平面図では、絶縁膜５１，５２を省略して記載している。図３は、第１の実施形態に係る水分検出センサ１０における多孔体３０の固定部分を拡大した側面断面図である。 (First Embodiment)
The moisture detection sensor according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an external perspective view of the moisture detection sensor 10 according to the first embodiment. 2A and 2C are plan views of the moisture detection sensor 10 according to the first embodiment, FIG. 2B is a side view thereof, and FIG. 2D is a side view thereof. It is the side sectional view. FIG. 2D is a diagram showing a cross section taken along the line AA shown in FIG. 2A. In the plan views of FIGS. 2A and 2C, the insulating films 51 and 52 are omitted. FIG. 3 is an enlarged side sectional view of a fixed portion of the porous body 30 in the moisture detection sensor 10 according to the first embodiment.
　図１、図２（Ａ）、図２（Ｂ）、図２（Ｃ）、図２（Ｄ）、図３に示すように、水分検出センサ１０は、基板２０、多孔体３０、電極膜４１、電極膜４２、絶縁膜５１、絶縁膜５２、電極膜７１、および、電極膜７２を備える。 As shown in FIGS. 1, 2 (A), 2 (B), 2 (C), 2 (D), and FIG. 3, the moisture detection sensor 10 includes a substrate 20, a porous body 30, and an electrode film 41. The electrode film 42, the insulating film 51, the insulating film 52, the electrode film 71, and the electrode film 72 are provided.
　基板２０は、絶縁性を有する。例えば、基板２０は、ガラスエポキシ基板によって形成されている。基板２０は、厚み方向に直交する主面２０１と主面２０２とを有する。主面２０１が、本発明の「第１主面」に対応し、主面２０２が、本発明の「第２主面」に対応する。以下、平面視とは、基板２０の主面２０１および主面２０２に直交する方向に視た状態を意味する。 The substrate 20 has an insulating property. For example, the substrate 20 is formed of a glass epoxy substrate. The substrate 20 has a main surface 201 and a main surface 202 that are orthogonal to each other in the thickness direction. The main surface 201 corresponds to the "first main surface" of the present invention, and the main surface 202 corresponds to the "second main surface" of the present invention. Hereinafter, the plan view means a state of the substrate 20 viewed in a direction orthogonal to the main surface 201 and the main surface 202.
　基板２０は、平面視して矩形である。言い換えれば、基板２０は、厚み方向に直交する一方向に長く（長手方向）、もう一方向に短い（短手方向）形状である。 The substrate 20 is rectangular in a plan view. In other words, the substrate 20 has a shape that is long in one direction (longitudinal direction) orthogonal to the thickness direction and short in the other direction (shortward direction).
　基板２０には、主面２０１から主面２０２まで貫通する凹部６１および凹部６２が形成されている。図１、図２（Ａ）、図２（Ｂ）、図２（Ｃ）、図２（Ｄ）の例であれば、凹部６１および凹部６２は、円柱形状である。凹部６１および凹部６２は、基板２０の長手方向の一方端付近に配置されている。 The substrate 20 is formed with a recess 61 and a recess 62 penetrating from the main surface 201 to the main surface 202. In the example of FIGS. 1, 2 (A), 2 (B), 2 (C), and 2 (D), the recess 61 and the recess 62 have a cylindrical shape. The recess 61 and the recess 62 are arranged near one end of the substrate 20 in the longitudinal direction.
　電極膜４１と電極膜４２は、基板２０の主面２０１に配置される。例えば、電極膜４１と電極膜４２との組が、本発明の「第１電極膜」と「第２電極膜」の組に対応する。電極膜４１と電極膜４２は、平面視して、矩形である。電極膜４１と電極膜４２は、それぞれの側面が近接した状態で配置される。なお、電極膜４１は、平面視した中央部に、電極の非形成部を有する。凹部６１は、この電極膜４１における電極の非形成部を通る。電極膜４２は、平面視した中央部に、電極の非形成部を有する。凹部６２は、この電極膜４２における電極の非形成部を通る。 The electrode film 41 and the electrode film 42 are arranged on the main surface 201 of the substrate 20. For example, the set of the electrode film 41 and the electrode film 42 corresponds to the set of the "first electrode film" and the "second electrode film" of the present invention. The electrode film 41 and the electrode film 42 are rectangular in a plan view. The electrode film 41 and the electrode film 42 are arranged so that their side surfaces are close to each other. The electrode film 41 has a non-formed portion of the electrode in the central portion in a plan view. The recess 61 passes through the non-formed portion of the electrode in the electrode film 41. The electrode film 42 has a non-formed portion of the electrode in the central portion in a plan view. The recess 62 passes through the non-formed portion of the electrode in the electrode film 42.
　基板２０の主面２０１には、配線電極膜４１１と配線電極膜４２１とが配置される。配線電極膜４１１と配線電極膜４２１は、主として、基板２０の長手方向に延びる形状である。配線電極膜４１１は、電極膜４１に接続する。配線電極膜４２１は、電極膜４２に接続する。配線電極膜４１１と配線電極膜４２１とは、それぞれ図示しない外部の回路要素（例えば、容量値を抽出する回路部や、水分量を推定する処理回路部）に電気的に接続される。 A wiring electrode film 411 and a wiring electrode film 421 are arranged on the main surface 201 of the substrate 20. The wiring electrode film 411 and the wiring electrode film 421 are mainly in a shape extending in the longitudinal direction of the substrate 20. The wiring electrode film 411 is connected to the electrode film 41. The wiring electrode film 421 is connected to the electrode film 42. The wiring electrode film 411 and the wiring electrode film 421 are electrically connected to external circuit elements (for example, a circuit unit for extracting a capacitance value and a processing circuit unit for estimating a water content), which are not shown.
　絶縁膜５１は、基板２０の主面２０１に形成されている。絶縁膜５１は、基板２０よりも薄い。絶縁膜５１は、電極膜４１、電極膜４２、配線電極膜４１１、および、配線電極膜４２１を覆っている。絶縁膜５１は、電極膜４１、電極膜４２、配線電極膜４１１、および、配線電極膜４２１に重なる部分を、少なくとも覆う形状であればよい。 The insulating film 51 is formed on the main surface 201 of the substrate 20. The insulating film 51 is thinner than the substrate 20. The insulating film 51 covers the electrode film 41, the electrode film 42, the wiring electrode film 411, and the wiring electrode film 421. The insulating film 51 may have a shape that at least covers a portion overlapping the electrode film 41, the electrode film 42, the wiring electrode film 411, and the wiring electrode film 421.
　電極膜７１と電極膜７２は、基板２０の主面２０２に配置される。例えば、電極膜７１と電極膜７２との組が、本発明の「第１電極膜」と「第２電極膜」の組に対応する。電極膜７１と電極膜７２は、平面視して、矩形である。電極膜７１と電極膜７２は、それぞれの側面が近接した状態で配置される。なお、電極膜７１は、平面視した中央部に、電極の非形成部を有する。凹部６１は、この電極膜７１における電極の非形成部を通る。電極膜７２は、平面視した中央部に、電極の非形成部を有する。凹部６２は、この電極膜７２における電極の非形成部を通る。 The electrode film 71 and the electrode film 72 are arranged on the main surface 202 of the substrate 20. For example, the set of the electrode film 71 and the electrode film 72 corresponds to the set of the "first electrode film" and the "second electrode film" of the present invention. The electrode film 71 and the electrode film 72 are rectangular in a plan view. The electrode film 71 and the electrode film 72 are arranged so that their side surfaces are close to each other. The electrode film 71 has a non-formed portion of the electrode in the central portion in a plan view. The recess 61 passes through the non-formed portion of the electrode in the electrode film 71. The electrode film 72 has a non-formed portion of the electrode in the central portion in a plan view. The recess 62 passes through the non-formed portion of the electrode in the electrode film 72.
　基板２０の主面２０２には、配線電極膜７１１と配線電極膜７２１とが配置される。配線電極膜７１１と配線電極膜７２１は、主として、基板２０の長手方向に延びる形状である。配線電極膜７１１は、電極膜７１に接続する。配線電極膜７２１は、電極膜７２に接続する。配線電極膜７１１と配線電極膜７２１とは、それぞれ図示しない外部の回路要素（例えば、容量値を抽出する回路部や、水分量を推定する処理回路部）に電気的に接続される。 A wiring electrode film 711 and a wiring electrode film 721 are arranged on the main surface 202 of the substrate 20. The wiring electrode film 711 and the wiring electrode film 721 mainly have a shape extending in the longitudinal direction of the substrate 20. The wiring electrode film 711 is connected to the electrode film 71. The wiring electrode film 721 is connected to the electrode film 72. The wiring electrode film 711 and the wiring electrode film 721 are electrically connected to external circuit elements (for example, a circuit unit for extracting a capacitance value and a processing circuit unit for estimating a water content), which are not shown.
　絶縁膜５２は、基板２０の主面２０２に形成されている。絶縁膜５２は、基板２０よりも薄い。絶縁膜５２は、電極膜７１、電極膜７２、配線電極膜７１１、および、配線電極膜７２１を覆っている。絶縁膜５２は、電極膜７１、電極膜７２、配線電極膜７１１、および、配線電極膜７２１に重なる部分を、少なくとも覆う形状であればよい。 The insulating film 52 is formed on the main surface 202 of the substrate 20. The insulating film 52 is thinner than the substrate 20. The insulating film 52 covers the electrode film 71, the electrode film 72, the wiring electrode film 711, and the wiring electrode film 721. The insulating film 52 may have a shape that at least covers a portion overlapping the electrode film 71, the electrode film 72, the wiring electrode film 711, and the wiring electrode film 721.
　多孔体３０は、第１部分３１、第２部分３４１、第２部分３４２、および、第３部分３３を備える。 The porous body 30 includes a first portion 31, a second portion 341, a second portion 342, and a third portion 33.
　第１部分３１、第３部分３３、第２部分３４１および第２部分３４２は、一体形成されている。言い換えると、第１部分３１、第３部分３３、第２部分３４１および第２部分３４２とは、他の部分を用いることなく、接合している。多孔体３０は、例えば、石膏からなる。ただし、多孔体３０は、このような一体形成が可能な材料であれば、他の材料であってもよい。 The first part 31, the third part 33, the second part 341 and the second part 342 are integrally formed. In other words, the first portion 31, the third portion 33, the second portion 341 and the second portion 342 are joined without using other portions. The porous body 30 is made of, for example, gypsum. However, the porous body 30 may be made of another material as long as it is a material capable of such integral formation.
　第１部分３１は、直方体である。第１部分３１は、基板２０の主面２０１側に配置される。より具体的には、第１部分３１は、絶縁膜５１における基板２０の主面２０１側と反対側の面に当接する。第１部分３１は、平面視して、電極膜４１および電極膜４２と重なる。 The first part 31 is a rectangular parallelepiped. The first portion 31 is arranged on the main surface 201 side of the substrate 20. More specifically, the first portion 31 abuts on the surface of the insulating film 51 opposite to the main surface 201 side of the substrate 20. The first portion 31 overlaps with the electrode film 41 and the electrode film 42 in a plan view.
　第３部分３３は、直方体である。第３部分３３は、基板２０の主面２０２側に配置される。より具体的には、第３部分３３は、絶縁膜５２における基板２０の主面２０２側と反対側の面に当接する。第３部分３３は、平面視して、電極膜７１および電極膜７２と重なる。第３部分３３は、第１部分３１とほぼ同様の形状、大きさである。 The third part 33 is a rectangular parallelepiped. The third portion 33 is arranged on the main surface 202 side of the substrate 20. More specifically, the third portion 33 abuts on the surface of the insulating film 52 opposite to the main surface 202 side of the substrate 20. The third portion 33 overlaps with the electrode film 71 and the electrode film 72 in a plan view. The third portion 33 has substantially the same shape and size as the first portion 31.
　第２部分３４１は、柱状体である。第２部分３４１は、凹部６１内に配置される。なお、第２部分３４１は、凹部６１の全体に充填されていることが好ましい。 The second part 341 is a columnar body. The second portion 341 is arranged in the recess 61. The second portion 341 is preferably filled in the entire recess 61.
　第２部分３４２は、柱状体である。第２部分３４２は、凹部６２内に配置される。なお、第２部分３４２は、凹部６２の全体に充填されていることが好ましい。 The second part 342 is a columnar body. The second portion 342 is arranged in the recess 62. The second portion 342 is preferably filled in the entire recess 62.
　このような構成により、水分検出センサ１０は、次のように、検出対象物（例えば、土壌）の水分量を検出する。 With such a configuration, the moisture detection sensor 10 detects the moisture content of the object to be detected (for example, soil) as follows.
　多孔体３０は、所定の比誘電率を有する。したがって、図３に示すように、電極膜４１から多孔体３０の第１部分３１を通して電極膜４２に達する電界Ｅ４０が得られる。すなわち、電極膜４１と電極膜４２とを対の電極として、その間に誘電体の多孔体３０が配置されるキャパシタが形成される。また、電極膜７１から多孔体３０の第３部分３３を通して電極膜７２に達する電界Ｅ７０が得られる。すなわち、電極膜７１と電極膜７２とを対の電極として、その間に誘電体の多孔体３０が配置されるキャパシタが形成される。 The porous body 30 has a predetermined relative permittivity. Therefore, as shown in FIG. 3, an electric field E40 that reaches the electrode film 42 from the electrode film 41 through the first portion 31 of the porous body 30 is obtained. That is, a capacitor in which the porous body 30 of the dielectric is arranged is formed by using the electrode film 41 and the electrode film 42 as a pair of electrodes. Further, an electric field E70 that reaches the electrode membrane 72 from the electrode membrane 71 through the third portion 33 of the porous body 30 is obtained. That is, a capacitor in which the porous body 30 of the dielectric is arranged is formed by using the electrode film 71 and the electrode film 72 as a pair of electrodes.
　水の比誘電率は、比較的高く、８０程度であるため、多孔体３０は、保持する水分量によって、誘電率が変化する。したがって、電極膜４１と電極膜４２との間の静電容量を検出することで、第１部分３１の誘電率の変化を検出できる。また、電極膜７１と電極膜７２との間の静電容量を検出することで、第３部分３３の誘電率の変化を検出できる。 Since the relative permittivity of water is relatively high, about 80, the permittivity of the porous body 30 changes depending on the amount of water retained. Therefore, by detecting the capacitance between the electrode film 41 and the electrode film 42, the change in the dielectric constant of the first portion 31 can be detected. Further, by detecting the capacitance between the electrode film 71 and the electrode film 72, the change in the dielectric constant of the third portion 33 can be detected.
　これを利用し、検出対象物の水分量を検出する場合、水分検出センサ１０は、多孔体３０が検出対象物（例えば、土壌）内に入り込むように、配置される。 When using this to detect the amount of water in the object to be detected, the moisture detection sensor 10 is arranged so that the porous body 30 enters the object to be detected (for example, soil).
　この状態で、検出対象物からの水分が多孔体３０に入り込むと、水分を含んだ状態の多孔体の誘電率は、水分を含んでいない多孔体３０の誘電率から変化する。すなわち、多孔体３０単体の誘電率は変化しないが、水分の含有状態に応じて、水分と多孔体３０とを一体としたものとしての誘電率は、多孔体３０単体の誘電率に対して変化する。このような状態が、本発明の多孔体の誘電率が変化する状態に相当する。これにより、電極膜４１と電極膜４２との間の静電容量、および、電極膜７１と電極膜７２との間の静電容量が変化する。言い換えれば、検出対象物の水分量に応じた検出容量が出力される。この検出容量を計測することによって、検出対象物の水分量を検出できる。 In this state, when water from the detection target enters the porous body 30, the dielectric constant of the porous body containing water changes from the dielectric constant of the porous body 30 containing no water. That is, the dielectric constant of the porous body 30 alone does not change, but the dielectric constant of the porous body 30 as an integral body changes depending on the water content state with respect to the dielectric constant of the porous body 30 alone. do. Such a state corresponds to a state in which the dielectric constant of the porous body of the present invention changes. As a result, the capacitance between the electrode film 41 and the electrode film 42 and the capacitance between the electrode film 71 and the electrode film 72 change. In other words, the detection capacity corresponding to the water content of the detection target is output. By measuring this detection capacity, the water content of the detection target can be detected.
　この際、電極膜４１と電極膜４２との間の静電容量、および、電極膜７１と電極膜７２との間の静電容量を用いて、平均値演算等、統計学的演算を行う。これにより、検出対象物における水分検出センサ１０が挿入された部分の水分量は、より精度良く検出できる。 At this time, statistical calculations such as average value calculation are performed using the capacitance between the electrode film 41 and the electrode film 42 and the capacitance between the electrode film 71 and the electrode film 72. As a result, the amount of water in the portion of the object to be detected in which the water detection sensor 10 is inserted can be detected more accurately.
　なお、電極膜４１と電極膜４２との間の静電容量、および、電極膜７１と電極膜７２との間の静電容量の少なくとも一方を備えていれば、水分検出センサ１０が挿入された部分の水分量は、検出可能である。この場合、例えば、電極膜４１と電極膜４２との間の静電容量を用いる場合であれば、電極膜７１と電極膜７２、および、これらに接続する配線電極膜は省略でき、電極膜７１と電極膜７２との間の静電容量を用いる場合であれば、電極膜４１と電極膜４２、および、これらに接続する配線電極膜は省略できる。 If at least one of the capacitance between the electrode film 41 and the electrode film 42 and the capacitance between the electrode film 71 and the electrode film 72 is provided, the moisture detection sensor 10 is inserted. The water content of the portion is detectable. In this case, for example, when the electrostatic capacitance between the electrode film 41 and the electrode film 42 is used, the electrode film 71, the electrode film 72, and the wiring electrode film connected to these can be omitted, and the electrode film 71 can be omitted. When the electrostatic capacitance between the electrode film 72 and the electrode film 72 is used, the electrode film 41, the electrode film 42, and the wiring electrode film connected to these can be omitted.
　また、電極膜４１と電極膜４２との間の静電容量、および、電極膜７１と電極膜７２との間の静電容量から、それぞれ個別に水分量を算出する。これにより、検出対象物における水分検出センサ１０の主面２０１側の水分量と、主面２０２側の水分量とを個別に検出できる。 Further, the water content is calculated individually from the capacitance between the electrode film 41 and the electrode film 42 and the capacitance between the electrode film 71 and the electrode film 72. As a result, the water content on the main surface 201 side and the water content on the main surface 202 side of the water content detection sensor 10 in the detection target can be individually detected.
　そして、水分検出センサ１０は、他の部分を用いることなく、多孔体３０が、基板２０に固定されている。これにより、水分検出センサ１０の特性劣化や破損は、抑制できる。 Then, in the moisture detection sensor 10, the porous body 30 is fixed to the substrate 20 without using other parts. As a result, deterioration and damage of the characteristics of the moisture detection sensor 10 can be suppressed.
　また、第３部分３３を平面視した面積は、凹部６１の平面断面積（延びる方向に直交する面の面積）と凹部６２の平面断面積（延びる方向に直交する面の面積）よりも大きく、これらを加算した面積よりも大きい。したがって、例えば、第１部分３１が主面２０１から引き離される力が多孔体３０に生じても、第３部分３３は主面２０２に押される。これにより、第１部分３１が主面２０１から引き離されることは、抑制される。 Further, the area of the third portion 33 in a plan view is larger than the plane cross-sectional area of the recess 61 (the area of the surface orthogonal to the extending direction) and the plane cross-sectional area of the recess 62 (the area of the surface orthogonal to the extending direction). It is larger than the total area of these. Therefore, for example, even if a force for pulling the first portion 31 away from the main surface 201 is generated in the porous body 30, the third portion 33 is pushed by the main surface 202. As a result, the separation of the first portion 31 from the main surface 201 is suppressed.
　同様に、第１部分３１を平面視した面積は、凹部６１の平面断面積（延びる方向に直交する面の面積）と凹部６２の平面断面積（延びる方向に直交する面の面積）よりも大きく、これらを加算した面積よりも大きい。したがって、第３部分３３が主面２０２から引き離される力が多孔体３０に生じても、第１部分３１は主面２０１に押される。これにより、第３部分３３が主面２０２から引き離されることは、抑制される。 Similarly, the area of the first portion 31 in a plan view is larger than the plane cross-sectional area of the recess 61 (the area of the surface orthogonal to the extending direction) and the plane cross-sectional area of the recess 62 (the area of the surface orthogonal to the extending direction). , It is larger than the area where these are added. Therefore, even if a force for pulling the third portion 33 away from the main surface 202 is generated in the porous body 30, the first portion 31 is pushed by the main surface 201. As a result, the separation of the third portion 33 from the main surface 202 is suppressed.
　したがって、多孔体３０は、基板２０に安定的に固定される。すなわち、水分検出センサ１０は、特性劣化や破損を生じさせることなく、多孔体３０が基板２０に固定された構造を実現できる。 Therefore, the porous body 30 is stably fixed to the substrate 20. That is, the moisture detection sensor 10 can realize a structure in which the porous body 30 is fixed to the substrate 20 without causing deterioration of characteristics or damage.
　また、水分検出センサ１０では、電極膜４１と電極膜４２は、多孔体３０の第１部分３１の同じ面に近接し、この面に沿って並んで配置される。したがって、電極膜４１と電極膜４２との間隔は、第１部分３１の形状、体積によらず、所望の距離にできる。言い換えれば、電極膜４１と電極膜４２との間で第１部分３１を介して生じる電界Ｅ４０の電界分布のパターンを所望の形状に制御できる。同様に、水分検出センサ１０では、電極膜７１と電極膜７２は、多孔体３０の第３部分３３の同じ面に近接し、この面に沿って並んで配置される。したがって、電極膜７１と電極膜７２との間隔は、第３部分３３の形状、体積によらず、所望の距離にできる。言い換えれば、電極膜７１と電極膜７２との間で第３部分３３を介して生じる電界Ｅ７０の電界分布のパターンを所望の形状に制御できる。このように、水分検出センサ１０は、キャパシタとしての電極間距離を調整でき、検出容量を調整可能であり、水分量に対する所望の検出感度を実現できる。 Further, in the moisture detection sensor 10, the electrode film 41 and the electrode film 42 are close to the same surface of the first portion 31 of the porous body 30 and are arranged side by side along this surface. Therefore, the distance between the electrode film 41 and the electrode film 42 can be a desired distance regardless of the shape and volume of the first portion 31. In other words, the pattern of the electric field distribution of the electric field E40 generated between the electrode film 41 and the electrode film 42 via the first portion 31 can be controlled to a desired shape. Similarly, in the moisture detection sensor 10, the electrode film 71 and the electrode film 72 are close to the same surface of the third portion 33 of the porous body 30 and are arranged side by side along this surface. Therefore, the distance between the electrode film 71 and the electrode film 72 can be a desired distance regardless of the shape and volume of the third portion 33. In other words, the pattern of the electric field distribution of the electric field E70 generated between the electrode film 71 and the electrode film 72 via the third portion 33 can be controlled to a desired shape. In this way, the water content detection sensor 10 can adjust the distance between the electrodes as a capacitor, the detection capacity can be adjusted, and the desired detection sensitivity to the water content can be realized.
　また、水分検出センサ１０は、電極膜４１および電極膜４２と多孔体３０の第１部分３１との間に、絶縁膜５１を備える。これにより、電極膜４１と電極膜４２との間で、多孔体３０の第１部分３１を介した導通電流が流れることを抑制できる。同様に、水分検出センサ１０は、電極膜７１および電極膜７２と多孔体３０の第３部分３３との間に、絶縁膜５２を備える。これにより、電極膜７１と電極膜７２との間で、多孔体３０の第３部分３３を介した導通電流が流れることを抑制できる。この結果、水分検出センサ１０は、水分量をより高精度に検出できる。 Further, the moisture detection sensor 10 includes an insulating film 51 between the electrode film 41 and the electrode film 42 and the first portion 31 of the porous body 30. As a result, it is possible to suppress the flow of a conduction current between the electrode film 41 and the electrode film 42 via the first portion 31 of the porous body 30. Similarly, the moisture detection sensor 10 includes an insulating film 52 between the electrode film 71 and the electrode film 72 and the third portion 33 of the porous body 30. As a result, it is possible to suppress the flow of a conduction current between the electrode film 71 and the electrode film 72 via the third portion 33 of the porous body 30. As a result, the water content detection sensor 10 can detect the water content with higher accuracy.
　このような構成の水分検出センサ１０は、例えば、次のように製造できる。図４（Ａ）、図４（Ｂ）、図４（Ｃ）、および、図４（Ｄ）は、第１の実施形態に係る水分検出センサ１０の製造工程のそれぞれ一過程での状態を示す平面図および側面断面図である。 The moisture detection sensor 10 having such a configuration can be manufactured, for example, as follows. 4 (A), 4 (B), 4 (C), and 4 (D) show the states of the moisture detection sensor 10 according to the first embodiment in each one step. It is a plan view and a side sectional view.
　まず、図４（Ａ）に示すように、電極膜４１および電極膜４２を、基板２０の主面２０１に形成し、電極膜７１および電極膜７２を基板２０の主面２０２に形成する。この際、電極膜４１、電極膜４２、電極膜７１、および、電極膜７２には、それぞれに中央部に開口が形成される。なお、図示を省略しているが、上述の各配線電極膜もこのときに形成される。次に、図４（Ａ）に示すように、基板２０の主面２０１に絶縁膜５１を形成し、基板２０の主面２０２に絶縁膜５２を形成する。 First, as shown in FIG. 4A, the electrode film 41 and the electrode film 42 are formed on the main surface 201 of the substrate 20, and the electrode film 71 and the electrode film 72 are formed on the main surface 202 of the substrate 20. At this time, an opening is formed in the central portion of each of the electrode film 41, the electrode film 42, the electrode film 71, and the electrode film 72. Although not shown, the above-mentioned wiring electrode films are also formed at this time. Next, as shown in FIG. 4A, the insulating film 51 is formed on the main surface 201 of the substrate 20, and the insulating film 52 is formed on the main surface 202 of the substrate 20.
　次に、図４（Ｂ）に示すように、基板２０、絶縁膜５１、および、絶縁膜５２を貫通する凹部６１および凹部６２を形成する。凹部６１は電極膜４１と電極膜７１の開口に形成され、凹部６２は電極膜４２と電極膜７２の開口に形成される。 Next, as shown in FIG. 4B, the substrate 20, the insulating film 51, and the recess 61 and the recess 62 penetrating the insulating film 52 are formed. The recess 61 is formed in the opening of the electrode film 41 and the electrode film 71, and the recess 62 is formed in the opening of the electrode film 42 and the electrode film 72.
　次に、図４（Ｃ）に示すように、電極膜４１、電極膜４２、電極膜７１、および、電極膜７２の形成領域を囲む金型９０を基板２０に設置する。金型９０は、注入口９１を有する。金型９０は、基板２０の主面２０１側に配置される部分と、主面２０２側に配置される部分とを有する。金型９０が基板２０に設置されることで、金型９０と基板２０とによる主面２０１側の内部空間９０２と主面２０２側の内部空間９０１とが形成される。内部空間９０１と内部空間９０２とは、基板２０の凹部６１と凹部６２とによって連通する。 Next, as shown in FIG. 4C, the electrode film 41, the electrode film 42, the electrode film 71, and the mold 90 surrounding the forming region of the electrode film 72 are installed on the substrate 20. The mold 90 has an injection port 91. The mold 90 has a portion arranged on the main surface 201 side of the substrate 20 and a portion arranged on the main surface 202 side. By installing the mold 90 on the substrate 20, the internal space 902 on the main surface 201 side and the internal space 901 on the main surface 202 side are formed by the mold 90 and the substrate 20. The internal space 901 and the internal space 902 communicate with each other by the recess 61 and the recess 62 of the substrate 20.
　そして、注入口９１から、液状の多孔体３０が注入される。注入口９１は、主面２０２側にあるので、液体の多孔体３０は、まず、内部空間９０１に流入し、凹部６１と凹部６２とを通じて、内部空間９０２に流入する。なお、注入孔を内部空間９０２側にも設けてもよい。内部空間９０２側にも注入孔を設けることで、液体の多孔体３０の充填時間を短縮できる。 Then, the liquid porous body 30 is injected from the injection port 91. Since the injection port 91 is on the main surface 202 side, the liquid porous body 30 first flows into the internal space 901, and then flows into the internal space 902 through the recess 61 and the recess 62. The injection hole may also be provided on the internal space 902 side. By providing the injection hole on the internal space 902 side as well, the filling time of the liquid porous body 30 can be shortened.
　次に、液状の多孔体３０が、内部空間９０１、内部空間９０２、凹部６１、および、凹部６２に流入し、充填されると、熱処理等が施され、多孔体３０は硬化する。 Next, when the liquid porous body 30 flows into the internal space 901, the internal space 902, the concave portion 61, and the concave portion 62 and is filled, heat treatment or the like is performed to cure the porous body 30.
　次に、図４（Ｄ）に示すように、金型９０を取り外すことによって、水分検出センサ１０ができあがる。 Next, as shown in FIG. 4 (D), the moisture detection sensor 10 is completed by removing the mold 90.
　（第２の実施形態）
　本発明の第２の実施形態に係る水分検出センサについて、図を参照して説明する。図５（Ａ）、図５（Ｃ）は、第２の実施形態に係る水分検出センサ１０Ａの平面図であり、図５（Ｂ）は、その側面図であり、図５（Ｄ）は、その側面断面図である。図５（Ｄ）は、図５（Ａ）に示すＢ－Ｂ断面を示す図である。なお、図５（Ａ）、図５（Ｃ）の平面図では、絶縁膜５１，５２を省略して記載している。 (Second embodiment)
The moisture detection sensor according to the second embodiment of the present invention will be described with reference to the drawings. 5A and 5C are plan views of the moisture detection sensor 10A according to the second embodiment, FIG. 5B is a side view thereof, and FIG. 5D is a side view thereof. It is the side sectional view. FIG. 5D is a diagram showing a cross section taken along the line BB shown in FIG. 5A. In the plan views of FIGS. 5A and 5C, the insulating films 51 and 52 are omitted.
　図５（Ａ）、図５（Ｂ）、図５（Ｃ）、図５（Ｄ）に示すように、第２の実施形態に係る水分検出センサ１０Ａは、第１の実施形態に係る水分検出センサ１０に対して、電極膜８０１、電極膜８０２、電極膜８０３、および、電極膜８０４が追加された点で異なる。水分検出センサ１０Ａの他の構成は、水分検出センサ１０と同様であり、同様の箇所の説明は省略する。 As shown in FIGS. 5A, 5B, 5C, and 5D, the moisture detection sensor 10A according to the second embodiment detects moisture according to the first embodiment. The difference is that the electrode film 801 and the electrode film 802, the electrode film 803, and the electrode film 804 are added to the sensor 10. Other configurations of the moisture detection sensor 10A are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
　電極膜８０１と電極膜８０２は、基板２０の主面２０１に配置される。電極膜８０３と電極膜８０４は、基板２０の主面２０２に配置される。電極膜８０１と電極膜８０２との組、および、電極膜８０３と電極膜８０４との組が、それぞれに、本発明の「第３電極膜」と「第４電極膜」との組に対応する。 The electrode film 801 and the electrode film 802 are arranged on the main surface 201 of the substrate 20. The electrode film 803 and the electrode film 804 are arranged on the main surface 202 of the substrate 20. The pair of the electrode film 801 and the electrode film 802 and the pair of the electrode film 803 and the electrode film 804 correspond to the pair of the "third electrode film" and the "fourth electrode film" of the present invention, respectively. ..
　電極膜８０１、電極膜８０２、電極膜８０３、および、電極膜８０４は、平面視して、矩形である。 The electrode film 801 and the electrode film 802, the electrode film 803, and the electrode film 804 are rectangular in a plan view.
　電極膜８０１と電極膜８０２は、それぞれの側面が近接した状態で配置される。電極膜８０１と電極膜８０２は、電極膜４１と電極膜４２との容量測定に影響を与えない距離で離間して配置される。電極膜８０３と電極膜８０４は、それぞれの側面が近接した状態で配置される。電極膜８０３と電極膜８０４は、電極膜７１と電極膜７２との容量測定に影響を与えない距離で離間して配置される。 The electrode film 801 and the electrode film 802 are arranged so that their side surfaces are close to each other. The electrode film 801 and the electrode film 802 are arranged apart from each other at a distance that does not affect the capacitance measurement between the electrode film 41 and the electrode film 42. The electrode film 803 and the electrode film 804 are arranged so that their side surfaces are close to each other. The electrode film 803 and the electrode film 804 are arranged apart from each other at a distance that does not affect the capacitance measurement between the electrode film 71 and the electrode film 72.
　また、基板２０の主面２０１には、配線電極膜８１１と配線電極膜８２１とが配置される。配線電極膜８１１と配線電極膜８２１は、主として、基板２０の長手方向に延びる形状である。配線電極膜８１１は、電極膜８０１に接続する。配線電極膜８２１は、電極膜８０２に接続する。基板２０の主面２０２には、配線電極膜８３１と配線電極膜８４１とが配置される。配線電極膜８３１と配線電極膜８４１は、主として、基板２０の長手方向に延びる形状である。配線電極膜８３１は、電極膜８０３に接続する。配線電極膜８４１は、電極膜８０４に接続する。 Further, the wiring electrode film 811 and the wiring electrode film 821 are arranged on the main surface 201 of the substrate 20. The wiring electrode film 811 and the wiring electrode film 821 are mainly in a shape extending in the longitudinal direction of the substrate 20. The wiring electrode film 811 is connected to the electrode film 801. The wiring electrode film 821 is connected to the electrode film 802. A wiring electrode film 831 and a wiring electrode film 841 are arranged on the main surface 202 of the substrate 20. The wiring electrode film 831 and the wiring electrode film 841 mainly have a shape extending in the longitudinal direction of the substrate 20. The wiring electrode film 831 is connected to the electrode film 803. The wiring electrode film 841 is connected to the electrode film 804.
　このような構成によって、水分検出センサ１０Ａは、水分検出センサ１０と同様の作用効果を奏する。また、水分検出センサ１０Ａは、電極膜８０１と電極膜８０２との間の検出容量、および、電極膜８０３と電極膜８０４との間の検出容量を、リファレンスとして利用できる。リファレンスの検出容量を用いることで、水分量の推定算出精度が向上し、水分検出センサ１０Ｂは、検出対象物の水分を、より精度良く検出できる。 With such a configuration, the moisture detection sensor 10A has the same effect as the moisture detection sensor 10. Further, the moisture detection sensor 10A can use the detection capacitance between the electrode film 801 and the electrode film 802 and the detection capacitance between the electrode film 803 and the electrode film 804 as a reference. By using the detection capacity of the reference, the estimation calculation accuracy of the water content is improved, and the water content detection sensor 10B can detect the water content of the detection target object more accurately.
　なお、リファレンス用の電極膜８０１と電極膜８０２との組、および、電極膜８０３と電極膜８０４との組は、少なくとも一方を備えていればよい。この場合、電極膜８０１と電極膜８０２を用いる場合は、電極膜８０３と電極膜８０４、および、これらに接続する配線電極膜は省略でき、電極膜８０３と電極膜８０４を用いる場合は、電極膜８０１と電極膜８０２、および、これらに接続する配線電極膜は省略できる。そして、例えば、電極膜４１と電極膜４２との組だけを用いる場合には、電極膜８０１と電極膜８０２との組だけを用いればよく、電極膜７１と電極膜７２との組だけを用いる場合には、電極膜８０３と電極膜８０４との組だけを用いればよい。 The pair of the reference electrode film 801 and the electrode film 802 and the pair of the electrode film 803 and the electrode film 804 may have at least one of them. In this case, when the electrode film 801 and the electrode film 802 are used, the electrode film 803 and the electrode film 804, and the wiring electrode film connected to them can be omitted, and when the electrode film 803 and the electrode film 804 are used, the electrode film is used. The 801 and the electrode film 802, and the wiring electrode film connected to these can be omitted. Then, for example, when only the set of the electrode film 41 and the electrode film 42 is used, only the set of the electrode film 801 and the electrode film 802 may be used, and only the set of the electrode film 71 and the electrode film 72 may be used. In this case, only the pair of the electrode film 803 and the electrode film 804 may be used.
　（第３の実施形態）
　本発明の第３の実施形態に係る水分検出センサについて、図を参照して説明する。図６（Ａ）、図６（Ｂ）は、第３の実施形態に係る水分検出センサ１０Ｂにおける多孔体３０Ｂを備える部分を拡大した側面断面図である。 (Third embodiment)
The moisture detection sensor according to the third embodiment of the present invention will be described with reference to the drawings. 6 (A) and 6 (B) are enlarged side sectional views of a portion of the moisture detection sensor 10B according to the third embodiment including the porous body 30B.
　図６（Ａ）に示すように、第３の実施形態に係る水分検出センサ１０Ｂは、第１の実施形態に係る水分検出センサ１０に対して、多孔体３０の第３部分３３が無く、第２部分３４１および第２部分３４２の形状において異なる。水分検出センサ１０Ｂの他の構成は、水分検出センサ１０と同様であり、同様の箇所の説明は省略する。 As shown in FIG. 6A, the moisture detection sensor 10B according to the third embodiment does not have the third portion 33 of the porous body 30 with respect to the moisture detection sensor 10 according to the first embodiment, and is second. The shapes of the two parts 341 and the second part 342 are different. Other configurations of the moisture detection sensor 10B are the same as those of the moisture detection sensor 10, and the description of the same parts will be omitted.
　多孔体３０Ｂは、第１部分３１、第２部分３４１Ｂ、および、第２部分３４２Ｂを備える。第１部分３１、第２部分３４１Ｂ、および、第２部分３４２Ｂは、一体形成されている。第１部分３１は、基板２０の主面２０１側に配置される。第２部分３４１Ｂは凹部６１Ｂに配置され、第２部分３４２Ｂは凹部６２Ｂに配置される。 The porous body 30B includes a first portion 31, a second portion 341B, and a second portion 342B. The first portion 31, the second portion 341B, and the second portion 342B are integrally formed. The first portion 31 is arranged on the main surface 201 side of the substrate 20. The second portion 341B is arranged in the recess 61B, and the second portion 342B is arranged in the recess 62B.
　凹部６１Ｂおよび第２部分３４１Ｂでは、主面２０１側の端面（第１部分３１に近い側の端面：第１位置Ｐ１）の面積は、主面２０２側の端面（第１部分３１から遠い側の端面：第２位置Ｐ２）の面積よりも小さい。なお、図６（Ａ）に示す第１位置Ｐ１および第２位置Ｐ２は、一例である。凹部６１Ｂおよび第２部分３４１Ｂは、主面２０１から主面２０２に向けて徐々に断面積が大きくなる形状を有する。 In the recess 61B and the second portion 341B, the area of the end surface on the main surface 201 side (the end surface on the side closer to the first portion 31: the first position P1) is the end surface on the main surface 202 side (the side far from the first portion 31). End face: Smaller than the area of the second position P2). The first position P1 and the second position P2 shown in FIG. 6A are examples. The recess 61B and the second portion 341B have a shape in which the cross-sectional area gradually increases from the main surface 201 to the main surface 202.
　この変形形状として、図６（Ｂ）に示すように、第２部分３４１Ｂは、延びる方向（基板２０の厚み方向）の途中位置において、断面積（平面断面積）が最大となるような６角形形状でもよい。このように、凹部６１Ｂおよび第２部分３４１Ｂには、延びる方向において、相対的に断面積（平面断面積）の小さい位置が相対的に断面積（平面断面積）の大きい位置よりも第１部分３１側になる箇所が存在する。なお、この相対的に断面積が小さい位置（図６（Ｂ）の第１位置Ｐ１）が、本発明の「第１位置」に対応し、相対的に断面積が大きい位置（図６（Ｂ）の第２位置Ｐ２）が、本発明の「第２位置」に対応する。 As this deformed shape, as shown in FIG. 6B, the second portion 341B is a hexagon having a maximum cross-sectional area (planar cross-sectional area) at an intermediate position in the extending direction (thickness direction of the substrate 20). It may be in shape. As described above, in the recess 61B and the second portion 341B, the position where the cross-sectional area (planar cross-sectional area) is relatively small is larger than the position where the cross-sectional area (planar cross-sectional area) is relatively large in the extending direction. There is a place on the 31st side. The position where the cross-sectional area is relatively small (first position P1 in FIG. 6B) corresponds to the "first position" of the present invention, and the position where the cross-sectional area is relatively large (FIG. 6B). ) Second position P2) corresponds to the "second position" of the present invention.
　凹部６２Ｂおよび第２部分３４２Ｂでは、主面２０１側の端面（第１部分３１に近い側の端面：第１位置）の面積は、主面２０２側の端面（第１部分３１から遠い側の端面：第２位置）の面積よりも小さい。凹部６２Ｂおよび第２部分３４２Ｂは、主面２０１から主面２０２に向けて徐々に断面積が大きくなる形状を有する。 In the recess 62B and the second portion 342B, the area of the end surface on the main surface 201 side (the end surface on the side closer to the first portion 31: the first position) is the end surface on the main surface 202 side (the end surface on the side far from the first portion 31). : Smaller than the area of (2nd position). The recess 62B and the second portion 342B have a shape in which the cross-sectional area gradually increases from the main surface 201 to the main surface 202.
　この変形形状として、図６（Ｂ）に示すように、第２部分３４２Ｂは、延びる方向（基板２０の厚み方向）の途中位置において、断面積（平面断面積）が最大となるような６角形形状でもよい。このように、凹部６２Ｂおよび第２部分３４２Ｂには、延びる方向において、相対的に断面積（平面断面積）の小さい位置が相対的に断面積（平面断面積）の大きい位置よりも第１部分３１側になる箇所が存在する。なお、この相対的に断面積が小さい位置が、本発明の「第１位置」に対応し、相対的に断面積が大きい位置が、本発明の「第２位置」に対応する。 As this deformed shape, as shown in FIG. 6B, the second portion 342B is a hexagon having a maximum cross-sectional area (planar cross-sectional area) at an intermediate position in the extending direction (thickness direction of the substrate 20). It may be in shape. As described above, in the recess 62B and the second portion 342B, the position where the cross-sectional area (planar cross-sectional area) is relatively small is larger than the position where the cross-sectional area (planar cross-sectional area) is relatively large in the extending direction. There is a place on the 31st side. The position having a relatively small cross-sectional area corresponds to the "first position" of the present invention, and the position having a relatively large cross-sectional area corresponds to the "second position" of the present invention.
　このような形状では、多孔体３０Ｂが第１部分３１側に抜けるように、多孔体３０Ｂに力が加わっても、第２部分３４１Ｂおよび第２部分３４２Ｂが凹部６１Ｂおよび凹部６２Ｂの壁にそれぞれ引っかかる。これにより、多孔体３０Ｂは、基板２０に安定的に固定される。 In such a shape, the second portion 341B and the second portion 342B are caught on the walls of the recess 61B and the recess 62B, respectively, even if a force is applied to the porous body 30B so that the porous body 30B comes out to the first portion 31 side. .. As a result, the porous body 30B is stably fixed to the substrate 20.
　したがって、水分検出センサ１０Ｂは、水分検出センサ１０と同様に、特性劣化や破損を生じさせることなく、多孔体３０Ｂが基板２０に固定された構造を実現できる。 Therefore, the moisture detection sensor 10B can realize a structure in which the porous body 30B is fixed to the substrate 20 without causing deterioration of characteristics or damage, like the moisture detection sensor 10.
　（第４の実施形態）
　本発明の第４の実施形態に係る水分検出センサについて、図を参照して説明する。図７（Ａ）、図７（Ｂ）、図７（Ｃ）、図７（Ｄ）、図７（Ｅ）は、第４の実施形態に係る水分検出センサ１０Ｃにおける多孔体３０Ｃを備える部分を拡大した側面断面図である。 (Fourth Embodiment)
The moisture detection sensor according to the fourth embodiment of the present invention will be described with reference to the drawings. 7 (A), 7 (B), 7 (C), 7 (D), and 7 (E) show the portion of the moisture detection sensor 10C according to the fourth embodiment including the porous body 30C. It is an enlarged side sectional view.
　図７（Ａ）に示すように、第４の実施形態に係る水分検出センサ１０Ｃは、第３の実施形態に係る水分検出センサ１０Ｂに対して、凹部６１Ｃ、凹部６２Ｃ、多孔体３０Ｃの形状において異なる。水分検出センサ１０Ｃの他の構成は、水分検出センサ１０Ｂと同様であり、同様の箇所の説明は省略する。 As shown in FIG. 7A, the moisture detection sensor 10C according to the fourth embodiment has the shape of the recess 61C, the recess 62C, and the porous body 30C with respect to the moisture detection sensor 10B according to the third embodiment. different. Other configurations of the moisture detection sensor 10C are the same as those of the moisture detection sensor 10B, and the description of the same parts will be omitted.
　多孔体３０Ｃは、第１部分３１、第２部分３４１Ｃ、および、第２部分３４２Ｃを備える。第１部分３１、第２部分３４１Ｃ、および、第２部分３４２Ｃは、一体形成されている。第１部分３１は、基板２０の主面２０１側に配置される。第２部分３４１Ｃは凹部６１Ｃに配置され、第２部分３４２Ｃは凹部６２Ｃに配置される。 The porous body 30C includes a first portion 31, a second portion 341C, and a second portion 342C. The first portion 31, the second portion 341C, and the second portion 342C are integrally formed. The first portion 31 is arranged on the main surface 201 side of the substrate 20. The second portion 341C is arranged in the recess 61C, and the second portion 342C is arranged in the recess 62C.
　凹部６１Ｃおよび第２部分３４１Ｃでは、主面２０１側の端面（第１部分３１に近い側の端面：第１位置）の面積は、主面２０２側の端面（第１部分３１から遠い側の端面：第２位置）の面積よりも小さい。凹部６１Ｃおよび第２部分３４１Ｃは、主面２０１から主面２０２に向けて段階的に断面積が大きくなる形状を有する。 In the recess 61C and the second portion 341C, the area of the end surface on the main surface 201 side (the end surface on the side closer to the first portion 31: the first position) is the end surface on the main surface 202 side (the end surface on the side far from the first portion 31). : Smaller than the area of (2nd position). The recess 61C and the second portion 341C have a shape in which the cross-sectional area gradually increases from the main surface 201 to the main surface 202.
　凹部６２Ｃおよび第２部分３４２Ｃでは、主面２０１側の端面（第１部分３１に近い側の端面：第１位置）の面積は、主面２０２側の端面（第１部分３１から遠い側の端面：第２位置）の面積よりも小さい。凹部６２Ｃおよび第２部分３４２Ｃは、主面２０１から主面２０２に向けて段階的に断面積が大きくなる形状を有する。 In the recess 62C and the second portion 342C, the area of the end surface on the main surface 201 side (the end surface on the side closer to the first portion 31: the first position) is the end surface on the main surface 202 side (the end surface on the side far from the first portion 31). : Smaller than the area of (2nd position). The recess 62C and the second portion 342C have a shape in which the cross-sectional area gradually increases from the main surface 201 to the main surface 202.
　なお、凹部６１Ｃ、凹部６２Ｃ、第２部分３４１Ｃ、および、第２部分３４２Ｃの変形例として、図７（Ｂ）、図７（Ｃ）、図７（Ｄ）、図７（Ｅ）に示すような形状でもよい。これらの形状は、延びる方向において、相対的に断面積（平面断面積）の小さい位置と、相対的に断面積（平面断面積）の大きい位置が交互に存在し、相対的に断面積（平面断面積）の小さい位置と、相対的に断面積（平面断面積）の大きい位置との少なくとも一方が複数箇所存在する形状である。そして、この相対的に断面積が小さい位置が、本発明の「第１位置」に対応し、相対的に断面積が大きい位置が、本発明の「第２位置」に対応する。 As examples of modifications of the recess 61C, the recess 62C, the second portion 341C, and the second portion 342C, as shown in FIGS. 7 (B), 7 (C), 7 (D), and 7 (E). Shape may be used. In these shapes, positions with a relatively small cross-sectional area (planar cross-sectional area) and positions with a relatively large cross-sectional area (planar cross-sectional area) alternately exist in the extending direction, and the cross-sectional areas (planar) are relatively large. It is a shape in which at least one of a position having a small cross-sectional area (cross-sectional area) and a position having a relatively large cross-sectional area (planar cross-sectional area) exist at a plurality of places. The position having a relatively small cross-sectional area corresponds to the "first position" of the present invention, and the position having a relatively large cross-sectional area corresponds to the "second position" of the present invention.
　このような形状では、多孔体３０Ｃが第１部分３１側に抜けるように、多孔体３０Ｃに力が加わっても、第２部分３４１Ｃおよび第２部分３４２Ｃが凹部６１Ｃおよび凹部６２Ｃの壁にそれぞれ引っかかる。これにより、多孔体３０Ｃは、基板２０に安定的に固定される。 In such a shape, the second portion 341C and the second portion 342C are caught on the walls of the recess 61C and the recess 62C, respectively, even if a force is applied to the porous body 30C so that the porous body 30C comes out to the first portion 31 side. .. As a result, the porous body 30C is stably fixed to the substrate 20.
　したがって、水分検出センサ１０Ｃは、水分検出センサ１０Ｂと同様に、特性劣化や破損を生じさせることなく、多孔体３０Ｃが基板２０に固定された構造を実現できる。 Therefore, the moisture detection sensor 10C can realize a structure in which the porous body 30C is fixed to the substrate 20 without causing deterioration of characteristics or damage, like the moisture detection sensor 10B.
　（第５の実施形態）
　本発明の第５の実施形態に係る水分検出センサについて、図を参照して説明する。図８は、第５の実施形態に係る水分検出センサ１０Ｄにおける多孔体３０Ｄを備える部分を拡大した側面断面図である。 (Fifth Embodiment)
The moisture detection sensor according to the fifth embodiment of the present invention will be described with reference to the drawings. FIG. 8 is an enlarged side sectional view of a portion of the moisture detection sensor 10D according to the fifth embodiment including the porous body 30D.
　図８に示すように、第５の実施形態に係る水分検出センサ１０Ｄは、第３の実施形態に係る水分検出センサ１０Ｂに対して、凹部６１Ｄ、凹部６２Ｄ、多孔体３０Ｄの形状において異なる。水分検出センサ１０Ｄの他の構成は、水分検出センサ１０Ｂと同様であり、同様の箇所の説明は省略する。 As shown in FIG. 8, the moisture detection sensor 10D according to the fifth embodiment differs from the moisture detection sensor 10B according to the third embodiment in the shapes of the recess 61D, the recess 62D, and the porous body 30D. Other configurations of the moisture detection sensor 10D are the same as those of the moisture detection sensor 10B, and the description of the same parts will be omitted.
　多孔体３０Ｄは、第１部分３１、第２部分３４１Ｄ、および、第２部分３４２Ｄを備える。第１部分３１、第２部分３４１Ｄ、および、第２部分３４２Ｄは、一体形成されている。第１部分３１は、基板２０の主面２０１側に配置される。第２部分３４１Ｄは、凹部６１Ｄに配置され、第２部分３４２Ｄは、凹部６２Ｄに配置される。 The porous body 30D includes a first portion 31, a second portion 341D, and a second portion 342D. The first portion 31, the second portion 341D, and the second portion 342D are integrally formed. The first portion 31 is arranged on the main surface 201 side of the substrate 20. The second portion 341D is arranged in the recess 61D, and the second portion 342D is arranged in the recess 62D.
　凹部６１Ｄおよび第２部分３４１Ｄでは、主面２０１側の端面と主面２０２側の端面とを繋げる側面（周面）が粗化されている。これにより、凹部６１Ｄおよび第２部分３４１Ｄには、延びる方向（２個の端面に直交する方向）において、相対的に断面積（平面断面積）の小さい位置が相対的に断面積（平面断面積）の大きい位置よりも第１部分３１側になる箇所が存在する。 In the recess 61D and the second portion 341D, the side surface (peripheral surface) connecting the end surface on the main surface 201 side and the end surface on the main surface 202 side is roughened. As a result, in the recess 61D and the second portion 341D, a position having a relatively small cross-sectional area (planar cross-sectional area) in the extending direction (direction orthogonal to the two end faces) has a relatively small cross-sectional area (planar cross-sectional area). ) Is larger than the position on the first portion 31 side.
　同様に、凹部６２Ｄおよび第２部分３４２Ｄでは、主面２０１側の端面と主面２０２側の端面とを繋げる側面（周面）が粗化されている。これにより、凹部６２Ｄおよび第２部分３４２Ｄには、延びる方向（２個の端面に直交する方向）において、相対的に断面積（平面断面積）の小さい位置が相対的に断面積（平面断面積）の大きい位置よりも第１部分３１側になる箇所が存在する。なお、この相対的に断面積が小さい位置が、本発明の「第１位置」に対応し、相対的に断面積が大きい位置が、本発明の「第２位置」に対応する。 Similarly, in the recess 62D and the second portion 342D, the side surface (peripheral surface) connecting the end surface on the main surface 201 side and the end surface on the main surface 202 side is roughened. As a result, in the recess 62D and the second portion 342D, a position having a relatively small cross-sectional area (planar cross-sectional area) in the extending direction (direction orthogonal to the two end faces) has a relatively small cross-sectional area (planar cross-sectional area). ) Is larger than the position on the first portion 31 side. The position having a relatively small cross-sectional area corresponds to the "first position" of the present invention, and the position having a relatively large cross-sectional area corresponds to the "second position" of the present invention.
　このような形状では、多孔体３０Ｄが第１部分３１側に抜けるように、多孔体３０Ｄに力が加わっても、第２部分３４１Ｄおよび第２部分３４２Ｄが凹部６１Ｄおよび凹部６２Ｄの壁にそれぞれ引っかかる。これにより、多孔体３０Ｄは、基板２０に安定的に固定される。 In such a shape, the second portion 341D and the second portion 342D are caught on the walls of the recess 61D and the recess 62D, respectively, even if a force is applied to the porous body 30D so that the porous body 30D comes out to the first portion 31 side. .. As a result, the porous body 30D is stably fixed to the substrate 20.
　したがって、水分検出センサ１０Ｄは、水分検出センサ１０Ｂと同様に、特性劣化や破損を生じさせることなく、多孔体３０Ｄが基板２０に固定された構造を実現できる。 Therefore, the moisture detection sensor 10D can realize a structure in which the porous body 30D is fixed to the substrate 20 without causing deterioration of characteristics or damage, like the moisture detection sensor 10B.
　（第６の実施形態）
　本発明の第６の実施形態に係る水分検出センサについて、図を参照して説明する。図９は、第６の実施形態に係る水分検出センサ１０Ｅにおける多孔体３０Ｅを備える部分を拡大した側面断面図である。 (Sixth Embodiment)
The moisture detection sensor according to the sixth embodiment of the present invention will be described with reference to the drawings. FIG. 9 is an enlarged side sectional view of a portion of the moisture detection sensor 10E according to the sixth embodiment including the porous body 30E.
　図９に示すように、第６の実施形態に係る水分検出センサ１０Ｅは、第３の実施形態に係る水分検出センサ１０Ｂに対して、凹部６１Ｅ、凹部６２Ｅ、多孔体３０Ｅの形状において異なる。水分検出センサ１０Ｅの他の構成は、水分検出センサ１０Ｂと同様であり、同様の箇所の説明は省略する。 As shown in FIG. 9, the moisture detection sensor 10E according to the sixth embodiment is different from the moisture detection sensor 10B according to the third embodiment in the shapes of the recess 61E, the recess 62E, and the porous body 30E. Other configurations of the moisture detection sensor 10E are the same as those of the moisture detection sensor 10B, and the description of the same parts will be omitted.
　凹部６１Ｅおよび凹部６２Ｅは、基板２０の主面２０１から凹む形状であり、主面２０２に達していない。すなわち、凹部６１Ｅおよび凹部６２Ｅは、貫通孔ではない。多孔体３０Ｅの第２部分３４１Ｅは凹部６１Ｅに配置され、第２部分３４２Ｅは凹部６２Ｅに配置される。 The recess 61E and the recess 62E are recessed from the main surface 201 of the substrate 20 and do not reach the main surface 202. That is, the recess 61E and the recess 62E are not through holes. The second portion 341E of the porous body 30E is arranged in the recess 61E, and the second portion 342E is arranged in the recess 62E.
　このような構成であっても、水分検出センサ１０Ｅは、水分検出センサ１０と同様に、特性劣化や破損を生じさせることなく、多孔体３０Ｅが基板２０に固定された構造を実現できる。 Even with such a configuration, the moisture detection sensor 10E can realize a structure in which the porous body 30E is fixed to the substrate 20 without causing deterioration of characteristics or damage, similarly to the moisture detection sensor 10.
　なお、上述の第３の実施形態における図６（Ｂ）の凹部６１Ｂ，６２Ｂ、第４の実施形態における図７（Ａ）－図７（Ｅ）の凹部６１Ｃ，６２Ｃ、および、第５の実施形態における図８の凹部６１Ｄ，６２Ｄは、本実施形態のように主面２０２に達していない構造であってもよい。言い換えれば、これらの凹部は貫通孔でなくてもよい。 It should be noted that the recesses 61B and 62B of FIG. 6B in the third embodiment described above, the recesses 61C and 62C of FIGS. 7A-7E in the fourth embodiment, and the fifth embodiment. The recesses 61D and 62D in FIG. 8 in the embodiment may have a structure that does not reach the main surface 202 as in the present embodiment. In other words, these recesses do not have to be through holes.
　（第７の実施形態）
　本発明の第７の実施形態に係る水分検出センサについて、図を参照して説明する。図１０は、第７の実施形態に係る水分検出センサ１０Ｆにおける多孔体３０Ｆを備える部分を拡大した側面断面図である。 (7th Embodiment)
The moisture detection sensor according to the seventh embodiment of the present invention will be described with reference to the drawings. FIG. 10 is an enlarged side sectional view of a portion of the moisture detection sensor 10F according to the seventh embodiment including the porous body 30F.
　図１０に示すように、第７の実施形態に係る水分検出センサ１０Ｆは、第３の実施形態に係る水分検出センサ１０Ｂに対して、凹部６１Ｆ、凹部６２Ｆ、多孔体３０Ｆの形成位置において異なる。水分検出センサ１０Ｆの他の構成は、水分検出センサ１０Ｂと同様であり、同様の箇所の説明は省略する。 As shown in FIG. 10, the moisture detection sensor 10F according to the seventh embodiment is different from the moisture detection sensor 10B according to the third embodiment in the formation positions of the recess 61F, the recess 62F, and the porous body 30F. Other configurations of the moisture detection sensor 10F are the same as those of the moisture detection sensor 10B, and the description of the same parts will be omitted.
　凹部６１Ｆは、電極膜４１の中央部を貫通しないように形成されている。凹部６２Ｆは、電極膜４２の中央部を貫通しないように形成されている。多孔体３０Ｆの第２部分３４１Ｆは、凹部６１Ｆ内に配置され、第２部分３４２Ｆは、凹部６２Ｆ内に配置される。また、凹部６２Ｆを省略することで、凹部６１Ｆのみにしてもよく、さらに凹部を追加してもよい。 The recess 61F is formed so as not to penetrate the central portion of the electrode film 41. The recess 62F is formed so as not to penetrate the central portion of the electrode film 42. The second portion 341F of the porous body 30F is arranged in the recess 61F, and the second portion 342F is arranged in the recess 62F. Further, by omitting the recess 62F, only the recess 61F may be used, or a recess may be added.
　このような構成であっても、水分検出センサ１０Ｆは、水分検出センサ１０と同様に、特性劣化や破損を生じさせることなく、多孔体３０Ｆが基板２０に固定された構造を実現できる。 Even with such a configuration, the moisture detection sensor 10F can realize a structure in which the porous body 30F is fixed to the substrate 20 without causing deterioration of characteristics or damage, similarly to the moisture detection sensor 10.
　なお、上述の各実施形態の構成は、適宜組み合わせることが可能であり、それぞれの組合せに応じた作用効果を奏することができる。 It should be noted that the configurations of the above-mentioned embodiments can be appropriately combined, and the action and effect corresponding to each combination can be achieved.
１０、１０Ａ、１０Ｂ、１０Ｃ、１０Ｄ、１０Ｅ、１０Ｆ：水分検出センサ
２０：基板
３０、３０Ｂ、３０Ｃ、３０Ｄ、３０Ｅ、３０Ｆ：多孔体
３１：第１部分
３３：第３部分
３４１、３４１Ｂ、３４１Ｃ、３４１Ｄ、３４１Ｅ、３４１Ｆ、３４２、３４２Ｂ、３４２Ｃ、３４２Ｄ、３４２Ｅ、３４２Ｆ：第２部分
４１、４２、７１、７２、８０１、８０２、８０３、８０４：電極膜
５１、５２：絶縁膜
６１、６１Ｂ、６１Ｃ、６１Ｄ、６１Ｅ、６１Ｆ、６２、６２Ｂ、６２Ｃ、６２Ｄ、６２Ｅ、６２Ｆ：凹部
９０：金型
９１：注入口
２０１、２０２：主面
４１１、４２１、７１１、７２１、８１１、８２１、８３１、８４１：配線電極膜
９０１、９０２：内部空間
Ｐ１：第１位置
Ｐ２：第２位置 10, 10A, 10B, 10C, 10D, 10E, 10F: Moisture detection sensor 20: Substrate 30, 30B, 30C, 30D, 30E, 30F: Porous 31: First part 33: Third part 341, 341B, 341C, 341D, 341E, 341F, 342, 342B, 342C, 342D, 342E, 342F: Second part 41, 42, 71, 72, 801, 802, 803, 804: Electrode film 51, 52: Insulation film 61, 61B, 61C , 61D, 61E, 61F, 62, 62B, 62C, 62D, 62E, 62F: Recess 90: Mold 91: Injection port 201, 202: Main surface 411, 421, 711, 721, 811, 821, 831, 841: Wiring electrode films 901, 902: Internal space P1: First position P2: Second position

Claims (8)

  1. 　第１主面と第２主面とを有し、貫通形状の凹部を有する絶縁性の基板と、
    　前記基板に配置された第１電極膜および第２電極膜と、
    　前記基板に配置され、含有する水分量によって誘電率が変化する多孔体と、
    　を備え、
    　前記多孔体は、
    　　前記第１主面側に配置された第１部分と、
    　　前記第１部分と連続的に配置され、前記凹部に配置される第２部分と、
    　　前記第２部分と連続的に配置され、前記第２主面側に配置された第３部分と、を有し、
    　前記第２部分の前記第１主面および前記第２主面に平行な断面積は、前記第１部分および前記第３部分の前記第１主面および前記第２主面に平行な断面積よりも小さい、
    　水分検出センサ。     An insulating substrate having a first main surface and a second main surface and having a through-shaped recess,
    The first electrode film and the second electrode film arranged on the substrate,
    A porous body that is placed on the substrate and whose dielectric constant changes depending on the amount of water contained,
    Equipped with
    The porous body is
    The first part arranged on the first main surface side and
    A second portion that is continuously arranged with the first portion and is arranged in the recess,
    It has a third portion that is continuously arranged with the second portion and is arranged on the second main surface side.
    The cross-sectional area parallel to the first main surface and the second main surface of the second part is from the cross-sectional area parallel to the first main surface and the second main surface of the first part and the third part. Is also small
    Moisture detection sensor.
  2. 　第１主面と第２主面とを有し、貫通または非貫通の凹部を有する絶縁性の基板と、
    　前記基板に配置された第１電極膜および第２電極膜と、
    　前記基板に配置され、含有する水分量によって誘電率が変化する多孔体と、
    　を備え、
    　前記多孔体は、
    　　前記第１主面側に配置された第１部分と、
    　　前記第１部分と連続的に配置され、前記凹部に配置される第２部分と、を有し、
    　前記第２部分は、
    　　第１位置と、
    　　前記第１位置よりも前記第２主面側に位置する第２位置と、を含み、
    　前記第１位置の前記凹部の深さ方向に直交する断面積は、前記第２位置の前記凹部の深さ方向に直交する断面積よりも小さい、
    　水分検出センサ。     An insulating substrate having a first main surface and a second main surface and having penetrating or non-penetrating recesses.
    The first electrode film and the second electrode film arranged on the substrate,
    A porous body that is placed on the substrate and whose dielectric constant changes depending on the amount of water contained,
    Equipped with
    The porous body is
    The first part arranged on the first main surface side and
    It has a second portion that is continuously arranged with the first portion and is arranged in the recess.
    The second part is
    First position and
    Includes a second position located closer to the second main surface than the first position.
    The cross-sectional area orthogonal to the depth direction of the recess at the first position is smaller than the cross-sectional area orthogonal to the depth direction of the recess at the second position.
    Moisture detection sensor.
  3. 　前記凹部および前記第２部分は、複数である、
    　請求項１または請求項２に記載の水分検出センサ。     The recess and the second portion are plural.
    The moisture detection sensor according to claim 1 or 2.
  4. 　前記凹部および前記第２部分は、前記第１主面側から前記第２主面側に徐々に、前記断面積が大きくなる部分を有する、
    　請求項１乃至請求項３のいずれかに記載の水分検出センサ。     The recess and the second portion have a portion in which the cross-sectional area gradually increases from the first main surface side to the second main surface side.
    The moisture detection sensor according to any one of claims 1 to 3.
  5. 　前記凹部および前記第２部分は、前記第１主面側から前記第２主面側に向かって段階的に、前記断面積が大きくなる部分を有する、
    　請求項１乃至請求項４のいずれかに記載の水分検出センサ。     The recess and the second portion have a portion in which the cross-sectional area gradually increases from the first main surface side toward the second main surface side.
    The moisture detection sensor according to any one of claims 1 to 4.
  6. 　前記第１電極膜および前記第２電極膜は、前記第１主面に直交する方向に視て前記多孔体に重なり、前記第１主面側および前記第２主面側の少なくとも一方に配置される、
    　請求項１乃至請求項５のいずれかに記載の水分検出センサ。     The first electrode film and the second electrode film overlap the porous body when viewed in a direction orthogonal to the first main surface, and are arranged on at least one of the first main surface side and the second main surface side. NS,
    The moisture detection sensor according to any one of claims 1 to 5.
  7. 　前記第１電極膜および前記第２電極膜と前記多孔体との間に配置された絶縁膜を備える、
    　請求項６に記載の水分検出センサ。     The first electrode film and the insulating film arranged between the second electrode film and the porous body are provided.
    The moisture detection sensor according to claim 6.
  8. 　前記第１主面に直交する方向に視て、前記多孔体に重ならない位置に、互いに距離をおいて配置された第３電極膜と第４電極膜とを備える、
    　請求項６または請求項７に記載の水分検出センサ。     A third electrode film and a fourth electrode film arranged at a distance from each other at a position not overlapping the porous body when viewed in a direction orthogonal to the first main surface are provided.
    The moisture detection sensor according to claim 6 or 7.
PCT/JP2021/017964 2020-05-14 2021-05-12 Moisture detection sensor WO2021230263A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032550A (en) * 2006-07-28 2008-02-14 T & D:Kk Electrostatic capacity type detector
JP2013057574A (en) * 2011-09-07 2013-03-28 Fujitsu Ltd Soil sensor
US20150129538A1 (en) * 2012-05-15 2015-05-14 Commissariat À L' Énergie Atomique Et Aux Énergies Alternatives Method for producing a capacitive sensor
WO2017150107A1 (en) * 2016-03-01 2017-09-08 国立大学法人静岡大学 Ion concentration measuring device and ion concentration measuring method
WO2018062379A1 (en) * 2016-09-30 2018-04-05 ミツミ電機株式会社 Humidity sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032550A (en) * 2006-07-28 2008-02-14 T & D:Kk Electrostatic capacity type detector
JP2013057574A (en) * 2011-09-07 2013-03-28 Fujitsu Ltd Soil sensor
US20150129538A1 (en) * 2012-05-15 2015-05-14 Commissariat À L' Énergie Atomique Et Aux Énergies Alternatives Method for producing a capacitive sensor
WO2017150107A1 (en) * 2016-03-01 2017-09-08 国立大学法人静岡大学 Ion concentration measuring device and ion concentration measuring method
WO2018062379A1 (en) * 2016-09-30 2018-04-05 ミツミ電機株式会社 Humidity sensor

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