WO2021206261A1 - Method for manufacturing two-dimensional material having vertically aligned nanopatterns - Google Patents

Method for manufacturing two-dimensional material having vertically aligned nanopatterns Download PDF

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Publication number
WO2021206261A1
WO2021206261A1 PCT/KR2020/017098 KR2020017098W WO2021206261A1 WO 2021206261 A1 WO2021206261 A1 WO 2021206261A1 KR 2020017098 W KR2020017098 W KR 2020017098W WO 2021206261 A1 WO2021206261 A1 WO 2021206261A1
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dimensional material
mold part
mold
mixed solution
nanopatterns
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PCT/KR2020/017098
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French (fr)
Korean (ko)
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이용희
송태은
안치원
윤화진
한희
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한국과학기술원
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02628—Liquid deposition using solutions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02587—Structure
    • H01L21/0259—Microstructure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02527—Carbon, e.g. diamond-like carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds

Definitions

  • the present invention relates to a method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction, and more particularly, in a vertical direction for forming nanopatterns vertically aligned in a two-dimensional material quickly and easily without expensive equipment. It relates to a method for manufacturing a two-dimensional material with aligned nanopatterns.
  • Two-dimensional materials can be classified into conductors, semiconductors, and insulators according to their electrical properties. Representatively, there are graphene having conductor properties, transition metal dichalcogenides and black phosphorus having semiconductor properties, and hexagonal boron nitride having non-conductive properties. .
  • 2D materials are a source technology with great ripple effect that can be applied to various industrial fields such as the Internet of Things, flexible devices, ultra-low power devices, next-generation batteries, water filters, and spacecraft.
  • An object of the present invention for solving the above problems is to provide a method of manufacturing a two-dimensional material having a vertically aligned nanopattern for quickly and easily forming a vertically aligned nanopattern in a two-dimensional material without expensive equipment.
  • the configuration of the present invention for achieving the above object comprises: a) placing a mixed solution consisting of an organic solvent in which a two-dimensional material is dispersed on a substrate; b) placing a mold part on the mixed solution; c) moving the mixed solution to the inside of the mold part by capillary action; d) sequentially expanding and contracting the mold part in which the mixed solution is located to form nanopatterns aligned in a vertical direction on the two-dimensional material; and e) removing the mold part and obtaining a two-dimensional material in which the vertically aligned nanopatterns are formed.
  • the two-dimensional material is selected from the group consisting of maxine (MXene), graphene, rGO, transition metal dichalcogenai, transition metal chalcogen compounds, black phosphorus, and hexagonal boron nitride. It may be characterized in that any one or more are provided.
  • the organic solvent is diisopropylamine, triethylamince, pentance, xylenes, chloroform, ether, tetrahydrofuran, hexanes, trichloroethylene, n-heptane, cyclohexane, dimethoxyethane, toluene, benzene, chlorobenzene , methylene chloride, t-butyl alcohol, 2-butanone, ethyl acetate, dioxane, 1-propanol, acetone, pyridine, ethyl alcohol, dimethyl carbonate, N-methylpyrrolidone, fimethylformamide, methanol, phenol, propylene carbonate, acetonitrile, perfluorotributylamine, perfluorodecalin , nitromethane, dimethylsulfoxide, and ethylene glycol may be characterized in that it is prepared in that it is prepared in that it is prepared in that it
  • the mold part may be made of a material prepared to absorb the organic solvent to enable expansion.
  • the mold part may be made of a PDMS material.
  • the mold part may include: a mold plate having upper and lower surfaces formed of a flat surface; a plurality of mold extensions protruding downward from the mold plate, extending in the longitudinal direction of the mold plate, and spaced apart from each other; and a mold groove formed between the adjacent mold extensions and formed to extend in the form of grooves in the longitudinal direction of the mold plate, wherein the mixed solution is provided to move into the mold groove by capillary action.
  • the mold extension body may be formed to have a pitch interval of 1 to 3 microns.
  • the step c) includes: c1) applying a pressure downwardly to the molded portion positioned; and c2) moving the mixed solution into the mold groove by capillary action according to the applied pressure.
  • the step d) comprises: d1) the organic solvent contained in the mixed solution inside the mold part penetrates the mold part and expands the mold part; and d2) evaporating the organic solvent penetrating into the expanded mold part and shrinking the mold part.
  • step d1) as the mold part expands, the two-dimensional material pattern located inside the mold part It may be characterized in that the thickness of the becomes finer and is provided to be vertically aligned.
  • the configuration of the present invention for achieving the above object provides a two-dimensional material manufactured according to a method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction.
  • FIG. 1 is a process illustration of a method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction according to an embodiment of the present invention.
  • FIG. 2 is a flowchart of a method of manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction according to an embodiment of the present invention.
  • FIG. 3 is a flowchart of a step in which the mixed solution is moved to the inside of the mold part by capillary action according to an embodiment of the present invention.
  • FIG. 4 is a flowchart of a step in which a nano-pattern is formed according to an embodiment of the present invention.
  • FIG. 5 is an image of a two-dimensional material in which nanopatterns aligned in a vertical direction are formed according to an embodiment of the present invention.
  • 6 and 7 are images showing nanopatterns formed by using a mixed solution in which a maxine solution is dispersed in toluene according to an embodiment of the present invention.
  • FIG 8 is an image showing a nanopattern formed by using a mixed solution in which a maxine solution is dispersed in DMF according to an embodiment of the present invention.
  • FIG. 9 is an image showing a nanopattern formed by using a mixed solution in which a maxine solution is dispersed in water according to a comparative example.
  • a most preferred embodiment according to the present invention comprises the steps of: a) placing a mixed solution consisting of an organic solvent in which a two-dimensional material is dispersed on a substrate; b) placing a mold part on the mixed solution; c) moving the mixed solution to the inside of the mold part by capillary action; d) sequentially expanding and contracting the mold part in which the mixed solution is located to form nanopatterns aligned in a vertical direction on the two-dimensional material; and e) removing the mold part, and obtaining a two-dimensional material in which the nano-patterns aligned in the vertical direction are formed.
  • FIG. 1 is a process illustration of a method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction according to an embodiment of the present invention
  • FIG. 2 is a nanopattern aligned in a vertical direction according to an embodiment of the present invention. It is a flowchart of a manufacturing method of a two-dimensional material having
  • the method for manufacturing a two-dimensional material having a nanopattern aligned in a vertical direction is first, a mixed solution consisting of an organic solvent in which the two-dimensional material is dispersed is placed on a substrate part ( S10) may be performed.
  • the two-dimensional material 121 is MXene, graphene, rGO, transition metal dichalcogeny.
  • a transition metal chalcogen compound, black phosphorus may be prepared with any one or more of hexagonal boron nitride.
  • the two-dimensional material 121 is not limited to the above description, and may include any two-dimensional material.
  • the organic solvent 122 is diisopropylamine, triethylamince, pentance, xylenes, chloroform, ether, tetrahydrofuran, hexanes , trichlorethylene, n-heptane, cyclohexane, dimethoxyethane, toluene, benzene, chlorobenzene, methylene chloride, t-butyl alcohol, 2-butanone, ethyl acetate, dioxane, 1-propanol, acetone, pyridine, ethyl alcohol, dimethyl carbonate, N- It may be prepared with any one or more of methylpyrrolidone, fimethylformamide, methanol, phenol, propylene carbonate, acetonitrile, perfluorotributylamine,
  • the organic solvent 122 is not limited thereto, and includes all materials that can penetrate into the lower inner side of the mold part to be described later and expand and contract the mold part 130 .
  • the mixed solution 120 in which the two-dimensional material 121 is dispersed and mixed in the organic solvent 122 may be provided so as to be positioned by dropping it on the substrate 110 .
  • the step (S10) in which the mixed solution made of the organic solvent in which the two-dimensional material is dispersed is positioned on the substrate part (S10)
  • the step (S20) in which the mold part is positioned on the mixed solution may be performed.
  • the mold part 130 may be positioned on the mixed solution 120 .
  • the mold part 130 may be made of a material prepared to absorb the organic solvent to enable expansion.
  • the mold part 130 may be made of a PDMS material.
  • the mold part 130 may include a mold plate 131 , a mold extension body 132 , and a mold groove 133 .
  • the mold plate 131 has a flat top and a bottom, and may be provided to cover the top of the substrate 110 as shown in FIG. 1B .
  • the mold extension body 132 may be formed to protrude toward a lower portion of the mold plate 131 .
  • the mold extension body 132 is formed to extend in the longitudinal direction of the mold plate 131 and may be provided in plurality.
  • the plurality of mold extension bodies 132 provided in this way may be disposed parallel to each other and may be formed to be spaced apart from each other.
  • the mold groove 133 is formed between the adjacent mold extension bodies 132 , and may extend in a groove shape in the longitudinal direction of the mold plate 131 .
  • the mold groove 133 may be provided to form a groove between the adjacent mold extension 132 .
  • the plurality of mold extensions 132 may be formed to have a pitch interval of 1 to 3 microns.
  • a step (S30) of moving the mixed solution to the inside of the mold part by capillary action may be performed.
  • FIG. 3 is a flowchart of a step in which the mixed solution is moved to the inside of the mold part by capillary action according to an embodiment of the present invention.
  • the step (S31) of applying pressure downward to the mold part may be performed.
  • the mold part 130 positioned to cover the upper part of the mixed solution 120 sprayed on the substrate part 110 is the mixed solution. (120) It may be provided to apply pressure toward the lower side.
  • step (S32) of moving the mixed solution into the mold groove by capillary action according to the applied pressure may be performed.
  • step (S32) of moving the mixed solution to the mold groove by capillary action according to the applied pressure as shown in FIG.
  • the mixed solution 120 is moved to the mold groove 133 by development.
  • step (S30) in which the mixed solution is moved to the inside of the mold part by the capillary phenomenon the mold part in which the mixed solution is located inside is sequentially expanded and contracted to vertically aligned with the two-dimensional material.
  • a step S40 of forming a pattern may be performed.
  • FIG. 4 is a flowchart of a step in which a nano-pattern is formed according to an embodiment of the present invention.
  • the step of sequentially expanding and contracting the mold part in which the mixed solution is located to form a nanopattern aligned in a vertical direction on the two-dimensional material (S40) is first, the inner side of the mold part.
  • a step (S41) of the organic solvent contained in the mixed solution penetrating into the mold part to expand the mold part may be performed.
  • the organic solvent contained in the mixed solution 120 moved to the mold groove 133 122 may penetrate into the mold part 130 to expand the mold part 130 .
  • the thickness of the pattern of the two-dimensional material 121 located inside the mold part 130 becomes finer and nano-sized, and the pattern is also vertically aligned.
  • step (S41) in which the organic solvent contained in the mixed solution inside the mold part penetrates into the mold part and expands the mold part, the organic solvent penetrating into the expanded mold part is evaporated and the mold part is contracted. (S42) may be performed.
  • the expanded mold part 130 is restored as the organic solvent 122 penetrating into the mold part 130 is evaporated. It shrinks and returns to its original shape.
  • the mold part 130 expands and maintains an integrated state. That is, the pattern of the two-dimensional material 121 is nanosized and maintained in a vertically aligned state.
  • step (S40) in which the mold part in which the mixed solution is located is sequentially expanded and contracted to form a nano-pattern aligned in a vertical direction on the two-dimensional material (S40)
  • the mold part is removed, and the vertically aligned nano-pattern is removed.
  • a step (S50) of obtaining a patterned two-dimensional material may be performed.
  • step S50 of obtaining a two-dimensional material in which the mold part is removed and the vertically aligned nano-patterns are formed removing the shrunk mold part 130 to obtain a two-dimensional material in which the vertically aligned nano-patterns are formed can
  • FIG. 5 is an image of a two-dimensional material in which nanopatterns aligned in a vertical direction are formed according to an embodiment of the present invention.
  • the mold part is removed, and the two-dimensional material in which the vertically aligned nanopatterns are formed obtained in the step S50 of obtaining the two-dimensional material in which the vertically aligned nanopatterns are formed has fine patterns in the vertical direction. It can be confirmed that the stacked state is maintained.
  • 6 and 7 are images showing nanopatterns formed by using a mixed solution in which a maxine solution is dispersed in toluene according to an embodiment of the present invention.
  • 6 and 7 are images showing the results of experiments according to the above-described method after forming a mixed solution using toluene as an organic solvent and maxine solution as a two-dimensional material.
  • FIG. 6a is an optical microscope image
  • FIG. 6b is an atomic force microscopy (AFM) image
  • FIG. 6c is a scanning electron microscopy (SEM) image
  • FIG. 6d is a high magnification SEM image
  • FIG. 6e is a pattern A cross-sectional SEM image of the (low magnification)
  • Fig. 6f is a cross-sectional SEM image (high magnification) of the pattern.
  • FIG. 7A is a cross-sectional transmission electron microscope (TEM) image of the pattern (low magnification)
  • FIG. 7B is a cross-sectional transmission electron microscope (TEM) image of the pattern (high magnification)
  • FIG. 7 c and d are vertically aligned
  • FIG. 7E is a TEM image of the circular dotted line region in FIG.
  • the width is 200 nm or less to form a nano-scale fine pattern.
  • FIG 8 is an image showing a nanopattern formed by using a mixed solution in which a maxine solution is dispersed in DMF according to an embodiment of the present invention.
  • FIG. 9 is an image showing a nanopattern formed by using a mixed solution in which a maxine solution is dispersed in water according to a comparative example.
  • FIG. 9 shows the result of performing the manufacturing method according to the present invention by using a mixed solution using water as an organic solvent and a maxine solution as a two-dimensional material.
  • the aqueous solution other than the organic solvent proposed in the present invention does not cause swelling and contraction of the mold part 130, and the polarity difference is also large, so that the pattern cannot be properly formed.

Abstract

The present invention relates to a method for manufacturing a two-dimensional material having vertically aligned nanopatterns, and more specifically, to a method for manufacturing a two-dimensional material having vertically aligned nanopatterns for easily and quickly forming vertically aligned nanopatterns on a two-dimensional material, without expensive equipment. In order to achieve the above objectives, the present invention provides a method for manufacturing a two-dimensional material having vertically aligned nanopatterns characterized by comprising the steps of: (a) positioning, on a substrate part, a mixed solution consisting of an organic solvent in which a two-dimensional material is dispersed; (b) positioning a mold part on the mixed solution; (c) moving the mixed solution to the inside of the mold part by capillary action; (d) sequentially expanding and contracting the mold part in which the mixed solution is contained so as to form vertically aligned nanopatterns on the two-dimensional material; and (e) removing the mold part and obtaining a two-dimensional material in which the vertically aligned nanopatterns are formed.

Description

수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법Method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction
본 발명은 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법에 관한 것으로, 보다 상세하게는 고가의 장비 없이 쉽고 빠르게 2차원 재료에 수직 방향으로 정렬된 나노패턴을 형성하기 위한 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법에 관한 것이다.The present invention relates to a method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction, and more particularly, in a vertical direction for forming nanopatterns vertically aligned in a two-dimensional material quickly and easily without expensive equipment. It relates to a method for manufacturing a two-dimensional material with aligned nanopatterns.
2차원(2D)재료(소재)란 원자들이 단일 원자층 두께(약 1nm=10억분의 1m)를 가지고 평면에서 결정구조를 이루는 물질을 지칭한다.A two-dimensional (2D) material (material) refers to a material in which atoms form a crystal structure in a plane with a single atomic layer thickness (about 1 nm = 1 billionth of a meter).
2차원 재료는 전기적 특성에 따라 도체, 반도체, 부도체로 분류할 수 있으며, 대표적으로 도체 성질을 가지는 그래핀, 반도체 성질을 가지는 전이금속 디칼코게나이드와 흑린, 부도체 성질을 가지는 육방정계 질화붕소가 있다.Two-dimensional materials can be classified into conductors, semiconductors, and insulators according to their electrical properties. Representatively, there are graphene having conductor properties, transition metal dichalcogenides and black phosphorus having semiconductor properties, and hexagonal boron nitride having non-conductive properties. .
2차원 재료는 사물인터넷, 휘어지는 소자, 초저전력 소자, 차세대 배터리, 정수 필터, 우주선 등 다양한 산업 분야에 적용 가능한 파급력이 큰 원천기술로서, 최근 응용 범위가 확대되고 상용화 가능성도 높아지고 있다.2D materials are a source technology with great ripple effect that can be applied to various industrial fields such as the Internet of Things, flexible devices, ultra-low power devices, next-generation batteries, water filters, and spacecraft.
특히, Nature volume 557, pages409-412(2018년)에 따르면, 2차원 재료의 수직방향 정렬은 이온수송 기능을 활성화시켜 에너지소자 등에서 효율을 향상시키는 효과가 있다.In particular, according to Nature volume 557, pages 409-412 (2018), vertical alignment of two-dimensional materials has the effect of activating an ion transport function to improve efficiency in energy devices, etc.
그러나, 맥신, 그래핀 등 2차원 재료의 경우, 필름 형성시 구조적인 특징에 의해 가로방향 정렬의 적층 구조가 되기는 쉬우나, 세로 방향으로의 정렬되어 적층된 구조를 형성하는 데에는 어려움이 있다.However, in the case of two-dimensional materials such as maxine and graphene, it is easy to have a horizontally aligned laminated structure due to structural characteristics when forming a film, but it is difficult to form a vertically aligned and laminated structure.
또한, 종래에는 맥신의 수직 정렬 패턴 형성 기술의 개발이 이루어지기는 했으나, 고가의 장비가 필요했고, 마이크로미터 이상의 패턴이 형성되어, 소자의 소형화, 집적화, 소자효율 극대화를 위한 나노 패터닝을 달성하기는 어려움이 있었다.In addition, in the prior art, Maxine's vertical alignment pattern formation technology was developed, but expensive equipment was required, and patterns of micrometers or more were formed. had difficulties.
따라서, 고가의 장비 없이도 쉽고 빠르게 2차원 재료의 패턴을 수직 방향으로 정렬하고, 나노급 패터닝을 할 수 있는 기술이 필요하다.Therefore, there is a need for a technology capable of quickly and easily aligning a pattern of a two-dimensional material in a vertical direction and performing nanoscale patterning without expensive equipment.
<선행기술문헌><Prior art literature>
(비특허문헌) Nature volume 557, pages 409-412, 2018(Non-patent literature) Nature volume 557, pages 409-412, 2018
상기와 같은 문제를 해결하기 위한 본 발명의 목적은 고가의 장비 없이 쉽고 빠르게 2차원 재료에 수직 방향으로 정렬된 나노패턴을 형성하기 위한 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법을 제공하는 것이다.An object of the present invention for solving the above problems is to provide a method of manufacturing a two-dimensional material having a vertically aligned nanopattern for quickly and easily forming a vertically aligned nanopattern in a two-dimensional material without expensive equipment. will provide
본 발명이 이루고자 하는 기술적 과제는 이상에서 언급한 기술적 과제로 제한되지 않으며, 언급되지 않은 또 다른 기술적 과제들은 아래의 기재로부터 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자에게 명확하게 이해될 수 있을 것이다.The technical problems to be achieved by the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned can be clearly understood by those of ordinary skill in the art to which the present invention belongs from the description below. There will be.
상기와 같은 목적을 달성하기 위한 본 발명의 구성은 a) 2차원 재료가 분산된 유기용매로 이루어진 혼합용액이 기판부 상에 위치되는 단계; b) 상기 혼합용액 상에 몰드부가 위치되는 단계; c) 모세관 현상에 의해 상기 혼합용액이 상기 몰드부의 내측으로 이동되는 단계; d) 내측에 상기 혼합용액이 위치된 상기 몰드부가 순차적으로 팽창 및 수축되어 상기 2차원 재료에 수직 방향으로 정렬된 나노 패턴이 형성되는 단계; 및 e) 상기 몰드부가 제거되고, 상기 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료를 얻는 단계를 포함하는 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법을 제공한다.The configuration of the present invention for achieving the above object comprises: a) placing a mixed solution consisting of an organic solvent in which a two-dimensional material is dispersed on a substrate; b) placing a mold part on the mixed solution; c) moving the mixed solution to the inside of the mold part by capillary action; d) sequentially expanding and contracting the mold part in which the mixed solution is located to form nanopatterns aligned in a vertical direction on the two-dimensional material; and e) removing the mold part and obtaining a two-dimensional material in which the vertically aligned nanopatterns are formed. .
본 발명의 실시예에 있어서, 상기 a) 단계에서, 상기 2차원 재료는, 맥신(MXene), 그래핀, rGO, 전이금속 다이칼코제나이, 전이금속 칼코겐화합물, 흑린, 육방정계 질화붕소 중 어느 하나 이상으로 마련된 것을 특징으로 할 수 있다.In an embodiment of the present invention, in step a), the two-dimensional material is selected from the group consisting of maxine (MXene), graphene, rGO, transition metal dichalcogenai, transition metal chalcogen compounds, black phosphorus, and hexagonal boron nitride. It may be characterized in that any one or more are provided.
본 발명의 실시예에 있어서, 상기 a) 단계에서, 상기 유기용매는, diisopropylamine, triethylamince, pentance, xylenes, chloroform, ether, tetrahydrofuran, hexanes, trichloroethylene, n-heptane, cyclohexane, dimethoxyethane, toluene, benzene, chlorobenzene, methylene chloride, t-butyl alcohol, 2-butanone, ethyl acetate, dioxane, 1-propanol, acetone, pyridine, ethyl alcohol, dimethyl carbonate, N-methylpyrrolidone, fimethylformamide, methanol, phenol, propylene carbonate, acetonitrile, perfluorotributylamine, perfluorodecalin, nitromethane, dimethylsulfoxide, ethylene glycol 중 어느 하나 이상으로 마련된 것을 특징으로 할 수 있다.In an embodiment of the present invention, in step a), the organic solvent is diisopropylamine, triethylamince, pentance, xylenes, chloroform, ether, tetrahydrofuran, hexanes, trichloroethylene, n-heptane, cyclohexane, dimethoxyethane, toluene, benzene, chlorobenzene , methylene chloride, t-butyl alcohol, 2-butanone, ethyl acetate, dioxane, 1-propanol, acetone, pyridine, ethyl alcohol, dimethyl carbonate, N-methylpyrrolidone, fimethylformamide, methanol, phenol, propylene carbonate, acetonitrile, perfluorotributylamine, perfluorodecalin , nitromethane, dimethylsulfoxide, and ethylene glycol may be characterized in that it is prepared in any one or more.
본 발명의 실시예에 있어서, 상기 몰드부는, 상기 유기용매를 흡수하여 팽창이 가능하도록 마련된 소재로 이루어진 것을 특징으로 할 수 있다.In an embodiment of the present invention, the mold part may be made of a material prepared to absorb the organic solvent to enable expansion.
본 발명의 실시예에 있어서, 상기 몰드부는, PDMS소재로 이루어진 것을 특징으로 할 수 있다.In an embodiment of the present invention, the mold part may be made of a PDMS material.
본 발명의 실시예에 있어서, 상기 몰드부는, 상부 및 하부가 평면으로 이루어진 몰드플레이트; 상기 몰드플레이트로부터 하부를 향해 돌출되고, 상기 몰드플레이트의 길이 방향으로 연장 형성되며, 상호 이격되어 형성된 복수의 몰드연장체; 및 이웃하는 상기 몰드연장체 사이에 형성되며, 상기 몰드플레이트의 길이 방향으로 그루브 형태로 연장 형성된 몰드그루브를 포함하며, 상기 혼합용액은 모세관 현상에 의해 상기 몰드그루브로 이동되도록 마련된 것을 특징으로 할 수 있다.In an embodiment of the present invention, the mold part may include: a mold plate having upper and lower surfaces formed of a flat surface; a plurality of mold extensions protruding downward from the mold plate, extending in the longitudinal direction of the mold plate, and spaced apart from each other; and a mold groove formed between the adjacent mold extensions and formed to extend in the form of grooves in the longitudinal direction of the mold plate, wherein the mixed solution is provided to move into the mold groove by capillary action. .
본 발명의 실시예에 있어서, 상기 몰드연장체는, 1 내지 3micron의 피치 간격을 갖도록 형성된 것을 특징으로 할 수 있다.In an embodiment of the present invention, the mold extension body may be formed to have a pitch interval of 1 to 3 microns.
본 발명의 실시예에 있어서, 상기 c) 단계는, c1) 위치된 상기 몰드부에 하부를 향해 압력이 가해지는 단계; 및 c2) 가해지는 압력에 따라 상기 혼합용액이 모세관 현상에 의해 상기 몰드그루브로 이동되는 단계를 포함하는 것을 특징으로 할 수 있다.In an embodiment of the present invention, the step c) includes: c1) applying a pressure downwardly to the molded portion positioned; and c2) moving the mixed solution into the mold groove by capillary action according to the applied pressure.
본 발명의 실시예에 있어서, 상기 d) 단계는, d1) 상기 몰드부의 내측의 상기 혼합용액에 포함된 상기 유기용매가 상기 몰드부에 침투하여 상기 몰드부를 팽창시키는 단계; 및 d2) 팽창된 상기 몰드부에 침투한 상기 유기용매가 증발되어 상기 몰드부가 수축되는 단계를 포함하며, 상기 d1) 단계에서, 상기 몰드부가 팽창됨에 따라 상기 몰드부 내측에 위치한 2차원 재료의 패턴의 굵기가 더 미세해지고 수직으로 정렬되도록 마련된 것을 특징으로 할 수 있다.In an embodiment of the present invention, the step d) comprises: d1) the organic solvent contained in the mixed solution inside the mold part penetrates the mold part and expands the mold part; and d2) evaporating the organic solvent penetrating into the expanded mold part and shrinking the mold part. In step d1), as the mold part expands, the two-dimensional material pattern located inside the mold part It may be characterized in that the thickness of the becomes finer and is provided to be vertically aligned.
상기와 같은 목적을 달성하기 위한 본 발명의 구성은 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법에 따라 제조된 2차원 재료를 제공한다.The configuration of the present invention for achieving the above object provides a two-dimensional material manufactured according to a method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction.
상기와 같은 구성에 따르는 본 발명의 효과는, 고가의 장비 없이 쉽고 빠르게 2차원 재료에 수직 방향으로 정렬된 나노급 패터닝이 가능하다.According to the effect of the present invention according to the above configuration, it is possible to perform nanoscale patterning arranged in a vertical direction on a two-dimensional material quickly and easily without expensive equipment.
본 발명의 효과는 상기한 효과로 한정되는 것은 아니며, 본 발명의 상세한 설명 또는 특허청구범위에 기재된 발명의 구성으로부터 추론 가능한 모든 효과를 포함하는 것으로 이해되어야 한다.It should be understood that the effects of the present invention are not limited to the above-described effects, and include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention.
도 1은 본 발명의 일실시예에 따른 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법의 공정 예시도이다.1 is a process illustration of a method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction according to an embodiment of the present invention.
도 2는 본 발명의 일실시예에 따른 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법의 순서도이다.2 is a flowchart of a method of manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction according to an embodiment of the present invention.
도 3은 본 발명의 일실시예에 따른 모세관현상에 의해 혼합용액이 몰드부의 내측으로 이동되는 단계의 순서도이다.3 is a flowchart of a step in which the mixed solution is moved to the inside of the mold part by capillary action according to an embodiment of the present invention.
도 4는 본 발명의 일실시예에 따른 나노 패턴이 형성되는 단계의 순서도이다.4 is a flowchart of a step in which a nano-pattern is formed according to an embodiment of the present invention.
도 5는 본 발명의 일실시예에 따른 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료의 이미지이다.5 is an image of a two-dimensional material in which nanopatterns aligned in a vertical direction are formed according to an embodiment of the present invention.
도 6 및 도 7은 본 발명의 일실시예에 따른 톨루엔에 맥신 용액을 분산시킨 혼합용액을 활용하여 형성된 나노패턴을 나타낸 이미지이다.6 and 7 are images showing nanopatterns formed by using a mixed solution in which a maxine solution is dispersed in toluene according to an embodiment of the present invention.
도 8은 본 발명의 일실시예에 따른 DMF에 맥신 용액을 분산시킨 혼합용액을 활용하여 형성된 나노패턴을 나타낸 이미지이다.8 is an image showing a nanopattern formed by using a mixed solution in which a maxine solution is dispersed in DMF according to an embodiment of the present invention.
도 9는 비교예에 따른 물에 맥신 용액을 분산시킨 혼합용액을 활용하여 형성된 나노패턴을 나타낸 이미지이다.9 is an image showing a nanopattern formed by using a mixed solution in which a maxine solution is dispersed in water according to a comparative example.
본 발명에 따른 가장 바람직한 일 실시예는, a) 2차원 재료가 분산된 유기용매로 이루어진 혼합용액이 기판부 상에 위치되는 단계; b) 상기 혼합용액 상에 몰드부가 위치되는 단계; c) 모세관 현상에 의해 상기 혼합용액이 상기 몰드부의 내측으로 이동되는 단계; d) 내측에 상기 혼합용액이 위치된 상기 몰드부가 순차적으로 팽창 및 수축되어 상기 2차원 재료에 수직 방향으로 정렬된 나노 패턴이 형성되는 단계; 및 e) 상기 몰드부가 제거되고, 상기 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료를 얻는 단계를 포함하는 것을 특징으로 한다.A most preferred embodiment according to the present invention comprises the steps of: a) placing a mixed solution consisting of an organic solvent in which a two-dimensional material is dispersed on a substrate; b) placing a mold part on the mixed solution; c) moving the mixed solution to the inside of the mold part by capillary action; d) sequentially expanding and contracting the mold part in which the mixed solution is located to form nanopatterns aligned in a vertical direction on the two-dimensional material; and e) removing the mold part, and obtaining a two-dimensional material in which the nano-patterns aligned in the vertical direction are formed.
이하에서는 첨부한 도면을 참조하여 본 발명을 설명하기로 한다. 그러나 본 발명은 여러 가지 상이한 형태로 구현될 수 있으며, 따라서 여기에서 설명하는 실시예로 한정되는 것은 아니다. 그리고 도면에서 본 발명을 명확하게 설명하기 위해서 설명과 관계없는 부분은 생략하였으며, 명세서 전체를 통하여 유사한 부분에 대해서는 유사한 도면 부호를 붙였다.Hereinafter, the present invention will be described with reference to the accompanying drawings. However, the present invention may be embodied in several different forms, and thus is not limited to the embodiments described herein. And in order to clearly explain the present invention in the drawings, parts irrelevant to the description are omitted, and similar reference numerals are attached to similar parts throughout the specification.
명세서 전체에서, 어떤 부분이 다른 부분과 "연결(접속, 접촉, 결합)"되어 있다고 할 때, 이는 "직접적으로 연결"되어 있는 경우뿐 아니라, 그 중간에 다른 부재를 사이에 두고 "간접적으로 연결"되어 있는 경우도 포함한다. 또한 어떤 부분이 어떤 구성요소를 "포함"한다고 할 때, 이는 특별히 반대되는 기재가 없는 한 다른 구성요소를 제외하는 것이 아니라 다른 구성요소를 더 구비할 수 있다는 것을 의미한다.Throughout the specification, when a part is said to be “connected (connected, contacted, coupled)” with another part, it is not only “directly connected” but also “indirectly connected” with another member interposed therebetween. "Including cases where In addition, when a part "includes" a certain component, this means that other components may be further provided without excluding other components unless otherwise stated.
본 명세서에서 사용한 용어는 단지 특정한 실시예를 설명하기 위해 사용된 것으로, 본 발명을 한정하려는 의도가 아니다. 단수의 표현은 문맥상 명백하게 다르게 뜻하지 않는 한, 복수의 표현을 포함한다. 본 명세서에서, "포함하다" 또는 "가지다" 등의 용어는 명세서상에 기재된 특징, 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것이 존재함을 지정하려는 것이지, 하나 또는 그 이상의 다른 특징들이나 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다.The terms used herein are used only to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. In this specification, terms such as "comprises" or "have" are intended to designate that the features, numbers, steps, operations, components, parts, or combinations thereof described in the specification exist, but one or more other features It should be understood that this does not preclude the existence or addition of numbers, steps, operations, components, parts, or combinations thereof.
이하 첨부된 도면을 참고하여 본 발명의 실시예를 상세히 설명하기로 한다.Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명의 일실시예에 따른 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법의 공정 예시도이고, 도 2는 본 발명의 일실시예에 따른 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법의 순서도이다.1 is a process illustration of a method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction according to an embodiment of the present invention, and FIG. 2 is a nanopattern aligned in a vertical direction according to an embodiment of the present invention. It is a flowchart of a manufacturing method of a two-dimensional material having
도 1 및 도 2에 도시된 것처럼, 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법은, 먼저, 2차원 재료가 분산된 유기용매로 이루어진 혼합용액이 기판부 상에 위치되는 단계(S10)가 수행될 수 있다.As shown in FIGS. 1 and 2 , the method for manufacturing a two-dimensional material having a nanopattern aligned in a vertical direction is first, a mixed solution consisting of an organic solvent in which the two-dimensional material is dispersed is placed on a substrate part ( S10) may be performed.
2차원 재료가 분산된 유기용매로 이루어진 혼합용액이 기판부 상에 위치되는 단계(S10)에서, 상기 2차원 재료(121)는, 맥신(MXene), 그래핀, rGO, 전이금속 다이칼코제나이, 전이금속 칼코겐화합물, 흑린, 육방정계 질화붕소 중 어느 하나 이상으로 마련된 것일 수 있다.In the step (S10) in which the mixed solution made of the organic solvent in which the two-dimensional material is dispersed is positioned on the substrate part, the two-dimensional material 121 is MXene, graphene, rGO, transition metal dichalcogeny. , a transition metal chalcogen compound, black phosphorus, may be prepared with any one or more of hexagonal boron nitride.
상기 2차원 재료(121)는 상기 기재한 바에 한정되지 않으며, 2차원 소재로 마련된 것을 모두 포함할 수 있다.The two-dimensional material 121 is not limited to the above description, and may include any two-dimensional material.
또한, 2차원 재료가 분산된 유기용매로 이루어진 혼합용액이 기판부 상에 위치되는 단계(S10)에서, 상기 유기용매(122)는, diisopropylamine, triethylamince, pentance, xylenes, chloroform, ether, tetrahydrofuran, hexanes, trichloroethylene, n-heptane, cyclohexane, dimethoxyethane, toluene, benzene, chlorobenzene, methylene chloride, t-butyl alcohol, 2-butanone, ethyl acetate, dioxane, 1-propanol, acetone, pyridine, ethyl alcohol, dimethyl carbonate, N-methylpyrrolidone, fimethylformamide, methanol, phenol, propylene carbonate, acetonitrile, perfluorotributylamine, perfluorodecalin, nitromethane, dimethylsulfoxide, ethylene glycol 중 어느 하나 이상으로 마련된 것일 수 있다.In addition, in the step (S10) in which the mixed solution consisting of the organic solvent in which the two-dimensional material is dispersed is located on the substrate part, the organic solvent 122 is diisopropylamine, triethylamince, pentance, xylenes, chloroform, ether, tetrahydrofuran, hexanes , trichlorethylene, n-heptane, cyclohexane, dimethoxyethane, toluene, benzene, chlorobenzene, methylene chloride, t-butyl alcohol, 2-butanone, ethyl acetate, dioxane, 1-propanol, acetone, pyridine, ethyl alcohol, dimethyl carbonate, N- It may be prepared with any one or more of methylpyrrolidone, fimethylformamide, methanol, phenol, propylene carbonate, acetonitrile, perfluorotributylamine, perfluorodecalin, nitromethane, dimethylsulfoxide, and ethylene glycol.
단, 상기 유기용매(122)는 이에 한정되는 것은 아니며 후술할 몰드부의 하부 내측에 침투하여 상기 몰드부(130)를 팽창 및 수축시킬 수 있는 소재를 모두 포함한다.However, the organic solvent 122 is not limited thereto, and includes all materials that can penetrate into the lower inner side of the mold part to be described later and expand and contract the mold part 130 .
이처럼, 2차원 재료가 분산된 유기용매로 이루어진 혼합용액이 기판부 상에 위치되는 단계(S10)에서는 상기 2차원 재료(121)를 상기 유기용매(122)에 분산시켜 혼합한 상기 혼합용액(120)을 기판(110)에 떨어트려 위치시키도록 마련될 수 있다.As such, in the step (S10) in which the mixed solution consisting of the organic solvent in which the two-dimensional material is dispersed is located on the substrate part, the mixed solution 120 in which the two-dimensional material 121 is dispersed and mixed in the organic solvent 122 ) may be provided so as to be positioned by dropping it on the substrate 110 .
2차원 재료가 분산된 유기용매로 이루어진 혼합용액이 기판부 상에 위치되는 단계(S10) 이후에는, 혼합용액 상에 몰드부가 위치되는 단계(S20)가 수행될 수 있다.After the step (S10) in which the mixed solution made of the organic solvent in which the two-dimensional material is dispersed is positioned on the substrate part (S10), the step (S20) in which the mold part is positioned on the mixed solution may be performed.
혼합용액 상에 몰드부가 위치되는 단계(S20)에서, 상기 몰드부(130)는 상기 혼합용액(120) 상에 위치될 수 있다.In the step S20 in which the mold part is positioned on the mixed solution, the mold part 130 may be positioned on the mixed solution 120 .
이때, 상기 몰드부(130)는 상기 유기용매를 흡수하여 팽창이 가능하도록 마련된 소재로 이루어질 수 있다.In this case, the mold part 130 may be made of a material prepared to absorb the organic solvent to enable expansion.
이러한 소재로서, 상기 몰드부(130)는, PDMS소재로 이루어질 수 있다.As such a material, the mold part 130 may be made of a PDMS material.
더욱 구체적으로, 상기 몰드부(130)는 몰드플레이트(131), 몰드연장체(132) 및 몰드그루브(133)를 포함할 수 있다.More specifically, the mold part 130 may include a mold plate 131 , a mold extension body 132 , and a mold groove 133 .
상기 몰드플레이트(131)는 상부 및 하부가 평면으로 이루어지며, 도 1의 (b)와 같이, 상기 기판부(110)의 상부를 덮도록 마련될 수 있다.The mold plate 131 has a flat top and a bottom, and may be provided to cover the top of the substrate 110 as shown in FIG. 1B .
상기 몰드연장체(132)는 상기 몰드플레이트(131)의 하부를 향해 돌출 형성될 수 있다. 그리고, 상기 몰드연장체(132)는 상기 몰드플레이트(131)의 길이 방향으로 연장 형성되며, 복수로 마련될 수 있다.The mold extension body 132 may be formed to protrude toward a lower portion of the mold plate 131 . In addition, the mold extension body 132 is formed to extend in the longitudinal direction of the mold plate 131 and may be provided in plurality.
이처럼 복수로 마련된 상기 몰드연장체(132)는 상호 평행하게 배치되고, 상호 이격되어 형성될 수 있다.The plurality of mold extension bodies 132 provided in this way may be disposed parallel to each other and may be formed to be spaced apart from each other.
상기 몰드그루브(133)는 이웃하는 상기 몰드연장체(132)의 사이에 형성되며, 상기 몰드플레이트(131)의 길이 방향으로 그루브 형태로 연장 형성될 수 있다.The mold groove 133 is formed between the adjacent mold extension bodies 132 , and may extend in a groove shape in the longitudinal direction of the mold plate 131 .
즉, 상기 몰드그루브(133)는 상기 몰드연장체(132)가 형성됨에 따라 이웃하는 상기 몰드연장체(132) 사이에 홈을 형성하는 부분을 이루도록 마련될 수 있다.That is, as the mold extension 132 is formed, the mold groove 133 may be provided to form a groove between the adjacent mold extension 132 .
이때, 복수의 상기 몰드연장체(132)는, 1 내지 3micron의 피치 간격을 갖도록 형성될 수 있다.In this case, the plurality of mold extensions 132 may be formed to have a pitch interval of 1 to 3 microns.
혼합용액 상에 몰드부가 위치되는 단계(S20) 이후에는, 모세관 현상에 의해 상기 혼합용액이 상기 몰드부의 내측으로 이동되는 단계(S30)가 수행될 수 있다.After the step (S20) of placing the mold part on the mixed solution, a step (S30) of moving the mixed solution to the inside of the mold part by capillary action may be performed.
도 3은 본 발명의 일실시예에 따른 모세관현상에 의해 혼합용액이 몰드부의 내측으로 이동되는 단계의 순서도이다.3 is a flowchart of a step in which the mixed solution is moved to the inside of the mold part by capillary action according to an embodiment of the present invention.
도 3을 더 참조하면, 모세관 현상에 의해 상기 혼합용액이 상기 몰드부의 내측으로 이동되는 단계(S30)는 먼저, 위치된 몰드부에 하부를 향해 압력이 가해지는 단계(S31)가 수행될 수 있다.Referring further to FIG. 3 , in the step (S30) of moving the mixed solution to the inside of the mold part by capillary action, first, the step (S31) of applying pressure downward to the mold part may be performed. .
위치된 몰드부에 하부를 향해 압력이 가해지는 단계(S31)에서, 상기 기판부(110) 상에 뿌려진 상기 혼합용액(120)의 상부를 덮도록 위치된 상기 몰드부(130)가 상기 혼합용액(120) 방향인 하부를 향해 압력을 가하도록 마련될 수 있다.In the step (S31) in which the pressure is applied downwardly to the molded part positioned, the mold part 130 positioned to cover the upper part of the mixed solution 120 sprayed on the substrate part 110 is the mixed solution. (120) It may be provided to apply pressure toward the lower side.
위치된 몰드부에 하부를 향해 압력이 가해지는 단계(S31) 이후에는, 가해지는 압력에 따라 상기 혼합용액이 모세관 현상에 의해 몰드그루브로 이동되는 단계(S32)가 수행될 수 있다.After the step (S31) in which the pressure is applied downwardly to the molded part, the step (S32) of moving the mixed solution into the mold groove by capillary action according to the applied pressure may be performed.
가해지는 압력에 따라 상기 혼합용액이 모세관 현상에 의해 몰드그루브로 이동되는 단계(S32)에서는, 도 1의 (c)에 도시된 것처럼, 상기 몰드부(130)가 하부를 향해 압력을 가하게 되면 모세관 현상에 의해 상기 몰드그루브(133)로 상기 혼합용액(120)이 이동되게 된다.In the step (S32) of moving the mixed solution to the mold groove by capillary action according to the applied pressure, as shown in FIG. The mixed solution 120 is moved to the mold groove 133 by development.
모세관 현상에 의해 상기 혼합용액이 상기 몰드부의 내측으로 이동되는 단계(S30) 이후에는, 내측에 상기 혼합용액이 위치된 상기 몰드부가 순차적으로 팽창 및 수축되어 상기 2차원 재료에 수직 방향으로 정렬된 나노 패턴이 형성되는 단계(S40)가 수행될 수 있다.After the step (S30) in which the mixed solution is moved to the inside of the mold part by the capillary phenomenon, the mold part in which the mixed solution is located inside is sequentially expanded and contracted to vertically aligned with the two-dimensional material. A step S40 of forming a pattern may be performed.
도 4는 본 발명의 일실시예에 따른 나노 패턴이 형성되는 단계의 순서도이다.4 is a flowchart of a step in which a nano-pattern is formed according to an embodiment of the present invention.
도 4를 더 참조하면, 내측에 상기 혼합용액이 위치된 상기 몰드부가 순차적으로 팽창 및 수축되어 상기 2차원 재료에 수직 방향으로 정렬된 나노 패턴이 형성되는 단계(S40)는 먼저, 몰드부의 내측의 상기 혼합용액에 포함된 상기 유기용매가 상기 몰드부에 침투하여 상기 몰드부를 팽창시키는 단계(S41)가 수행될 수 있다.Referring further to FIG. 4 , the step of sequentially expanding and contracting the mold part in which the mixed solution is located to form a nanopattern aligned in a vertical direction on the two-dimensional material (S40) is first, the inner side of the mold part. A step (S41) of the organic solvent contained in the mixed solution penetrating into the mold part to expand the mold part may be performed.
몰드부의 내측의 상기 혼합용액에 포함된 상기 유기용매가 상기 몰드부에 침투하여 상기 몰드부를 팽창시키는 단계(S41)에서는, 상기 몰드그루브(133)에 이동한 혼합용액(120)에 포함된 유기용매(122)가 상기 몰드부(130)에 침투하여 상기 몰드부(130)가 팽창될 수 있다.In the step (S41) in which the organic solvent contained in the mixed solution inside the mold part penetrates into the mold part and expands the mold part, the organic solvent contained in the mixed solution 120 moved to the mold groove 133 122 may penetrate into the mold part 130 to expand the mold part 130 .
상기 몰드부(130)가 팽창되면, 도 1의 (d)에 도시된 것처럼, 상기 몰드그루브(133)의 공간이 좁아지면서 상기 혼합용액(120)의 2차원 재료(121)가 각각의 몰드그루브(133)의 가운데에 모이게 된다.When the mold part 130 is expanded, as shown in (d) of FIG. 1 , the space of the mold groove 133 is narrowed and the two-dimensional material 121 of the mixed solution 120 is transferred to each mold groove. (133) is gathered in the middle.
이처럼, 상기 몰드부(130)가 팽창됨에 따라 상기 몰드부(130) 내측에 위치한 2차원 재료(121)의 패턴의 굵기는 더욱 미세해져 나노화가 되며, 패턴도 수직으로 정렬되게 된다.As such, as the mold part 130 expands, the thickness of the pattern of the two-dimensional material 121 located inside the mold part 130 becomes finer and nano-sized, and the pattern is also vertically aligned.
몰드부의 내측의 상기 혼합용액에 포함된 상기 유기용매가 상기 몰드부에 침투하여 상기 몰드부를 팽창시키는 단계(S41) 이후에는, 팽창된 몰드부에 침투한 유기용매가 증발되어 상기 몰드부가 수축되는 단계(S42)가 수행될 수 있다.After the step (S41) in which the organic solvent contained in the mixed solution inside the mold part penetrates into the mold part and expands the mold part, the organic solvent penetrating into the expanded mold part is evaporated and the mold part is contracted. (S42) may be performed.
팽창된 몰드부에 침투한 유기용매가 증발되어 상기 몰드부가 수축되는 단계(S42)에서, 팽창된 몰드부(130)는 상기 몰드부(130)에 침투한 유기용매(122)가 증발됨에 따라 다시 수축되어 원래 형태로 돌아가게 된다.In the step (S42) in which the organic solvent penetrating into the expanded mold part is evaporated and the mold part is contracted (S42), the expanded mold part 130 is restored as the organic solvent 122 penetrating into the mold part 130 is evaporated. It shrinks and returns to its original shape.
그러나, 상기 2차원 재료(121)는 상기 몰드부(130)가 팽창하여 집적화된 상태를 그대로 유지하게 된다. 즉, 상기 2차원 재료(121)의 패턴은 나노화되고 수직 방향으로 정렬된 상태를 유지하게 된다.However, in the two-dimensional material 121, the mold part 130 expands and maintains an integrated state. That is, the pattern of the two-dimensional material 121 is nanosized and maintained in a vertically aligned state.
내측에 상기 혼합용액이 위치된 상기 몰드부가 순차적으로 팽창 및 수축되어 상기 2차원 재료에 수직 방향으로 정렬된 나노 패턴이 형성되는 단계(S40) 이후에는, 몰드부가 제거되고, 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료를 얻는 단계(S50)가 수행될 수 있다.After the step (S40) in which the mold part in which the mixed solution is located is sequentially expanded and contracted to form a nano-pattern aligned in a vertical direction on the two-dimensional material (S40), the mold part is removed, and the vertically aligned nano-pattern is removed. A step (S50) of obtaining a patterned two-dimensional material may be performed.
몰드부가 제거되고, 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료를 얻는 단계(S50)에서, 수축된 상기 몰드부(130)를 제거하면 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료를 얻을 수 있다.In the step S50 of obtaining a two-dimensional material in which the mold part is removed and the vertically aligned nano-patterns are formed, removing the shrunk mold part 130 to obtain a two-dimensional material in which the vertically aligned nano-patterns are formed can
도 5는 본 발명의 일실시예에 따른 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료의 이미지이다.5 is an image of a two-dimensional material in which nanopatterns aligned in a vertical direction are formed according to an embodiment of the present invention.
도 5에 도시된 것처럼, 몰드부가 제거되고, 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료를 얻는 단계(S50)에서 얻은 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료는 미세한 패턴들이 수직 방향으로 정렬되어 적층된 상태를 유지하고 있음을 확인할 수 있다.As shown in FIG. 5 , the mold part is removed, and the two-dimensional material in which the vertically aligned nanopatterns are formed obtained in the step S50 of obtaining the two-dimensional material in which the vertically aligned nanopatterns are formed has fine patterns in the vertical direction. It can be confirmed that the stacked state is maintained.
도 6 및 도 7은 본 발명의 일실시예에 따른 톨루엔에 맥신 용액을 분산시킨 혼합용액을 활용하여 형성된 나노패턴을 나타낸 이미지이다.6 and 7 are images showing nanopatterns formed by using a mixed solution in which a maxine solution is dispersed in toluene according to an embodiment of the present invention.
도 6 및 도 7은 톨루엔을 유기용매로하고, 맥신 용액을 2차원 재료로 하여 혼합용액을 형성한 다음, 전술한 방법에 따라 실험을 한 결과를 나타낸 이미지이다.6 and 7 are images showing the results of experiments according to the above-described method after forming a mixed solution using toluene as an organic solvent and maxine solution as a two-dimensional material.
도 6의 a는 광학현미경 이미지, 도 6의 b는 Atomic force microscopy (AFM) 이미지, 도 6의 c는 Scanning electron microscopy (SEM) 이미지, 도 6의 d는 고배율 SEM 이미지, 도 6의 e는 패턴의 단면 SEM 이미지 (저배율), 도 6의 f는 패턴의 단면 SEM 이미지 (고배율)이다.6a is an optical microscope image, FIG. 6b is an atomic force microscopy (AFM) image, FIG. 6c is a scanning electron microscopy (SEM) image, FIG. 6d is a high magnification SEM image, FIG. 6e is a pattern A cross-sectional SEM image of the (low magnification), Fig. 6f is a cross-sectional SEM image (high magnification) of the pattern.
그리고, 도 7의 a는 패턴의 단면 transmission electron microscope (TEM) 이미지 (저배율), 도 7의 b는 패턴의 단면 transmission electron microscope(TEM) 이미지 (고배율), 도 7의 c, d는 수직정렬된 MXene layer의 고배율 이미지, 도 7의 e는 도 7의 a에서 원형 점선 영역의 TEM 이미지, 도 7의 f는 a 부분의 Electro diffraction 패턴을 나타낸 것이다.7A is a cross-sectional transmission electron microscope (TEM) image of the pattern (low magnification), FIG. 7B is a cross-sectional transmission electron microscope (TEM) image of the pattern (high magnification), and FIG. 7 c and d are vertically aligned A high magnification image of the MXene layer, FIG. 7E is a TEM image of the circular dotted line region in FIG.
도 6 및 도 7의 이미지를 보면 알 수 있듯이 전술한 제조 방법에 따라 제조된 2차원 재료는 패턴이 수직 방향으로 정렬되어 적층된 구조를 이루는 것을 볼 수 있다.As can be seen from the images of FIGS. 6 and 7 , in the two-dimensional material manufactured according to the above-described manufacturing method, patterns are aligned in a vertical direction to form a stacked structure.
또한, 폭도 200nm 이하로 이루어져 나노 단위의 미세한 패턴이 형성되는 것도 확인된다.In addition, it is also confirmed that the width is 200 nm or less to form a nano-scale fine pattern.
도 8은 본 발명의 일실시예에 따른 DMF에 맥신 용액을 분산시킨 혼합용액을 활용하여 형성된 나노패턴을 나타낸 이미지이다.8 is an image showing a nanopattern formed by using a mixed solution in which a maxine solution is dispersed in DMF according to an embodiment of the present invention.
도 8은 유기용매를 DMF로 하고, 2차원 재료를 맥신 용액으로 한 혼합용액을 활용하여 형성된 나노 패턴을 볼 수 있다. 이의 이미지에서도 볼수 있듯이 유기용매인 DMF가 톨루엔처럼 PDMS로 이루어진 몰드부(130)에 팽창 및 수축을 일으켜 상기 맥신 용액에 수직으로 정렬된 나노 패턴이 형성되게 한 것을 확인할 수 있다.8 shows a nanopattern formed by using a mixed solution using DMF as an organic solvent and maxine solution as a two-dimensional material. As can be seen from this image, it can be confirmed that the organic solvent, DMF, causes expansion and contraction of the mold part 130 made of PDMS like toluene, thereby forming a vertically aligned nano-pattern in the maxine solution.
즉, 본 발명에 따르면 고가의 장비 없이도 쉽고 빠르게 2차원 재료에 수직으로 정렬된 나노 패턴을 형성할 수 있다.That is, according to the present invention, it is possible to quickly and easily form a vertically aligned nanopattern on a two-dimensional material without expensive equipment.
도 9는 비교예에 따른 물에 맥신 용액을 분산시킨 혼합용액을 활용하여 형성된 나노패턴을 나타낸 이미지이다.9 is an image showing a nanopattern formed by using a mixed solution in which a maxine solution is dispersed in water according to a comparative example.
도 9는 유기용매를 물로 하고, 2차원 재료로 맥신 용액으로 한 혼합 용액을 활용하여 본 발명에 따른 제조방법을 수행한 결과를 나타낸다.9 shows the result of performing the manufacturing method according to the present invention by using a mixed solution using water as an organic solvent and a maxine solution as a two-dimensional material.
도 9에서 볼 수 있듯이, 유기용매를 본 발명에서 제안한 유기용매가 아닌 물과 같은 수용액 등을 사용할 경우, 혼합용액이 PDMS 몰드부(130)로 침투하지 못하고 오히려 몰드부(130)의 밖으로 밀려나가는 결과를 초래하는 것을 볼 수 있다.As can be seen in FIG. 9 , when an aqueous solution such as water is used instead of the organic solvent proposed in the present invention, the mixed solution does not penetrate into the PDMS mold part 130 but rather pushes out of the mold part 130 . You can see the consequences.
또한 본 발명에서 제안한 유기용매가 아닌 수용액은 몰드부(130)의 팽창(Swelling) 및 수축을 유발하지 못하며 극성차이도 커서 패턴이 제대로 형성되지 못하게 된다.In addition, the aqueous solution other than the organic solvent proposed in the present invention does not cause swelling and contraction of the mold part 130, and the polarity difference is also large, so that the pattern cannot be properly formed.
즉, 본 발명에 따른 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법을 사용할 때, 고가의 장비 없이 2차원 재료에 수직으로 정렬된 나노 패턴이 형성되도록 할 수 있다.That is, when using the method for manufacturing a two-dimensional material having a vertically aligned nanopattern according to the present invention, it is possible to form a vertically aligned nanopattern in the two-dimensional material without expensive equipment.
전술한 본 발명의 설명은 예시를 위한 것이며, 본 발명이 속하는 기술분야의 통상의 지식을 가진 자는 본 발명의 기술적 사상이나 필수적인 특징을 변경하지 않고서 다른 구체적인 형태로 쉽게 변형이 가능하다는 것을 이해할 수 있을 것이다. 그러므로 이상에서 기술한 실시예들은 모든 면에서 예시적인 것이며 한정적이 아닌 것으로 이해해야만 한다. 예를 들어, 단일형으로 설명되어 있는 각 구성 요소는 분산되어 실시될 수도 있으며, 마찬가지로 분산된 것으로 설명되어 있는 구성 요소들도 결합된 형태로 실시될 수 있다.The above description of the present invention is for illustration, and those of ordinary skill in the art to which the present invention pertains can understand that it can be easily modified into other specific forms without changing the technical spirit or essential features of the present invention. will be. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a dispersed form, and likewise components described as distributed may be implemented in a combined form.
본 발명의 범위는 후술하는 특허청구범위에 의하여 나타내어지며, 특허청구범위의 의미 및 범위 그리고 그 균등 개념으로부터 도출되는 모든 변경 또는 변형된 형태가 본 발명의 범위에 포함되는 것으로 해석되어야 한다.The scope of the present invention is indicated by the following claims, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present invention.
<부호의 설명><Explanation of code>
110: 기판부110: substrate unit
120: 혼합용액120: mixed solution
121: 2차원 재료121: two-dimensional material
122: 유기용매122: organic solvent
130: 몰드부130: mold part
131: 몰드플레이트131: mold plate
132: 몰드연장체132: mold extension
133: 몰드그루브133: mold groove

Claims (10)

  1. a) 2차원 재료가 분산된 유기용매로 이루어진 혼합용액이 기판부 상에 위치되는 단계;a) placing a mixed solution comprising an organic solvent in which a two-dimensional material is dispersed on a substrate;
    b) 상기 혼합용액 상에 몰드부가 위치되는 단계;b) placing a mold part on the mixed solution;
    c) 모세관 현상에 의해 상기 혼합용액이 상기 몰드부의 내측으로 이동되는 단계;c) moving the mixed solution to the inside of the mold part by capillary action;
    d) 내측에 상기 혼합용액이 위치된 상기 몰드부가 순차적으로 팽창 및 수축되어 상기 2차원 재료에 수직 방향으로 정렬된 나노 패턴이 형성되는 단계; 및d) sequentially expanding and contracting the mold part in which the mixed solution is located to form nanopatterns aligned in a vertical direction on the two-dimensional material; and
    e) 상기 몰드부가 제거되고, 상기 수직 방향으로 정렬된 나노 패턴이 형성된 2차원 재료를 얻는 단계를 포함하는 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법.e) removing the mold part, and obtaining a two-dimensional material in which the vertically aligned nanopatterns are formed.
  2. 제 1 항에 있어서,The method of claim 1,
    상기 a) 단계에서,In step a),
    상기 2차원 재료는,The two-dimensional material is
    맥신(MXene), 그래핀, rGO, 전이금속 다이칼코제나이, 전이금속 칼코겐화합물, 흑린, 육방정계 질화붕소 중 어느 하나 이상으로 마련된 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법.Maxine (MXene), graphene, rGO, transition metal dichalcogeny, transition metal chalcogen compound, black phosphorus, two-dimensional having a vertically aligned nanopattern, characterized in that provided with any one or more of hexagonal boron nitride Method of manufacturing the material.
  3. 제 1 항에 있어서,The method of claim 1,
    상기 a) 단계에서,In step a),
    상기 유기용매는,The organic solvent is
    diisopropylamine, triethylamince, pentance, xylenes, chloroform, ether, tetrahydrofuran, hexanes, trichloroethylene, n-heptane, cyclohexane, dimethoxyethane, toluene, benzene, chlorobenzene, methylene chloride, t-butyl alcohol, 2-butanone, ethyl acetate, dioxane, 1-propanol, acetone, pyridine, ethyl alcohol, dimethyl carbonate, N-methylpyrrolidone, fimethylformamide, methanol, phenol, propylene carbonate, acetonitrile, perfluorotributylamine, perfluorodecalin, nitromethane, dimethylsulfoxide, ethylene glycol 중 어느 하나 이상으로 마련된 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법.diisopropylamine, triethylamince, pentance, xylenes, chloroform, ether, tetrahydrofuran, hexanes, trichloroethylene, n-heptane, cyclohexane, dimethoxyethane, toluene, benzene, chlorobenzene, methylene chloride, t-butyl alcohol, 2-butanone, ethyl acetate, dioxane, 1 -Propanol, acetone, pyridine, ethyl alcohol, dimethyl carbonate, N-methylpyrrolidone, fimethylformamide, methanol, phenol, propylene carbonate, acetonitrile, perfluorotributylamine, perfluorodecalin, nitromethane, dimethylsulfoxide, ethylene glycol A method for manufacturing a two-dimensional material with aligned nanopatterns.
  4. 제 1 항에 있어서,The method of claim 1,
    상기 몰드부는,The mold part,
    상기 유기용매를 흡수하여 팽창이 가능하도록 마련된 소재로 이루어진 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법.A method of manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction, characterized in that it is made of a material prepared to be expandable by absorbing the organic solvent.
  5. 제 4 항에 있어서,5. The method of claim 4,
    상기 몰드부는,The mold part,
    PDMS소재로 이루어진 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법.A method of manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction, characterized in that it is made of a PDMS material.
  6. 제 1 항에 있어서,The method of claim 1,
    상기 몰드부는,The mold part,
    상부 및 하부가 평면으로 이루어진 몰드플레이트;The upper and lower mold plates are made of a flat surface;
    상기 몰드플레이트로부터 하부를 향해 돌출되고, 상기 몰드플레이트의 길이 방향으로 연장 형성되며, 상호 이격되어 형성된 복수의 몰드연장체; 및a plurality of mold extensions protruding downward from the mold plate, extending in the longitudinal direction of the mold plate, and spaced apart from each other; and
    이웃하는 상기 몰드연장체 사이에 형성되며, 상기 몰드플레이트의 길이 방향으로 그루브 형태로 연장 형성된 몰드그루브를 포함하며,It is formed between the adjacent mold extensions and includes a mold groove extending in the form of a groove in the longitudinal direction of the mold plate,
    상기 혼합용액은 모세관 현상에 의해 상기 몰드그루브로 이동되도록 마련된 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법.The method for producing a two-dimensional material having nanopatterns aligned in a vertical direction, characterized in that the mixed solution is provided to move into the mold groove by capillary action.
  7. 제 6 항에 있어서,7. The method of claim 6,
    상기 몰드연장체는,The mold extension,
    1 내지 3micron의 피치 간격을 갖도록 형성된 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법.A method of manufacturing a two-dimensional material having a nanopattern aligned in a vertical direction, characterized in that it is formed to have a pitch interval of 1 to 3 microns.
  8. 제 6 항에 있어서,7. The method of claim 6,
    상기 c) 단계는,Step c) is,
    c1) 위치된 상기 몰드부에 하부를 향해 압력이 가해지는 단계; 및c1) step of applying a pressure toward the bottom of the molded portion positioned; and
    c2) 가해지는 압력에 따라 상기 혼합용액이 모세관 현상에 의해 상기 몰드그루브로 이동되는 단계를 포함하는 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법.c2) A method of manufacturing a two-dimensional material having a vertically aligned nanopattern, comprising the step of moving the mixed solution to the mold groove by capillary action according to the applied pressure.
  9. 제 1 항에 있어서,The method of claim 1,
    상기 d) 단계는, Step d) is,
    d1) 상기 몰드부의 내측의 상기 혼합용액에 포함된 상기 유기용매가 상기 몰드부에 침투하여 상기 몰드부를 팽창시키는 단계; 및d1) expanding the mold part by penetrating the organic solvent contained in the mixed solution inside the mold part into the mold part; and
    d2) 팽창된 상기 몰드부에 침투한 상기 유기용매가 증발되어 상기 몰드부가 수축되는 단계를 포함하며,d2) the organic solvent penetrating into the expanded mold part is evaporated and the mold part is contracted;
    상기 d1) 단계에서, 상기 몰드부가 팽창됨에 따라 상기 몰드부 내측에 위치한 2차원 재료의 패턴의 굵기가 더 미세해지고 수직으로 정렬되도록 마련된 것을 특징으로 하는 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법.In step d1), as the mold part expands, the thickness of the pattern of the two-dimensional material located inside the mold part becomes finer and a two-dimensional material having a vertically aligned nanopattern, characterized in that it is arranged to be vertically aligned. manufacturing method.
  10. 제 1 항에 따른 수직 방향으로 정렬된 나노패턴을 갖는 2차원 재료의 제조방법에 따라 제조된 2차원 재료.A two-dimensional material manufactured according to the method for manufacturing a two-dimensional material having nanopatterns aligned in a vertical direction according to claim 1 .
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