WO2021182146A1 - 面状液膜形成方法および面状液膜形成装置 - Google Patents
面状液膜形成方法および面状液膜形成装置 Download PDFInfo
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- WO2021182146A1 WO2021182146A1 PCT/JP2021/007599 JP2021007599W WO2021182146A1 WO 2021182146 A1 WO2021182146 A1 WO 2021182146A1 JP 2021007599 W JP2021007599 W JP 2021007599W WO 2021182146 A1 WO2021182146 A1 WO 2021182146A1
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Definitions
- the present invention relates to a planar liquid film forming method and a planar liquid film forming apparatus for forming a planar liquid film on an object to be coated.
- Patent Document 1 relates to a method of applying a coating for protecting an electric component mounted on a printed circuit board from moisture and the like, while moving an injection valve for injecting a coating material in a non-contact manner with respect to the substrate. This is a method of applying a coating of a coating material to the surface of a substrate by repeating the steps of forming droplets of the coating material.
- the cross section of the coating line formed by the coating method of Patent Document 2 is semicircular or semi-elliptical, and the height is larger than the width (for example, the ratio of the height and width of the cross section of the coating line is 1). There was a problem (close to).
- Patent Document 3 a coating method capable of drawing a cross-sectional shape having a small height ratio to the width.
- Patent Document 3 relates to a method of applying a line drawing having a cross-sectional shape having a height lower than the width, and the jet type discharge device and the object to be coated are relative to each other in a direction orthogonal to a straight line in which a plurality of discharge ports are arranged.
- a linear liquid film is formed by continuously discharging a liquid material from a plurality of discharge ports and combining the liquid materials while moving the liquid material.
- an object of the present invention is to provide a planar liquid film forming method and a planar liquid film forming apparatus for forming a planar liquid film having less unevenness on the surface than before.
- FIG. 7 is a diagram illustrating a process of forming a linear liquid film by the apparatus described in Patent Document 3.
- a plurality of droplets 702a, 702b landing on the object to be coated 701 come into contact with each other and start to bond with each other, they become droplets (702a, 702b).
- a heading flow occurs and they collide near the center.
- the colliding flows cause a swelling near the center, and as a result, the cross-sectional shape of the linear liquid film 703 may be a convex mountain-like shape.
- FIG. 7A shows when a plurality of droplets 702a, 702b (two in this example) landing on the object to be coated 701 come into contact with each other and start to bond with each other, they become droplets (702a, 702b).
- a heading flow occurs and they collide near the center.
- the colliding flows cause a swelling near the center, and as a result, the cross-sectional shape of the linear liquid film 703 may be a conve
- the cross-sectional shape of the linear liquid film 703 is close to a semi-elliptical shape even if the colliding flows do not bulge near the center. Then, when the linear liquid film 703 having the cross-sectional shape of FIG. 7 is repeated a plurality of times to form the planar liquid film, there arises a problem that unacceptable irregularities are formed on the surface of the planar liquid film. This will be described with reference to FIG.
- FIG. 8 is a diagram illustrating a process of forming a planar liquid film 704 by forming a plurality of adjacent linear liquid films 703 (two in this example) with the apparatus described in Patent Document 3.
- FIG. 8A when a plurality of linear liquid films 703a and 703b (two in this example) having a raised portion coated on the object to be coated 701 come into contact with each other and are bonded to each other, FIG. 8C ),
- the planar liquid film 704 formed by bonding has an unacceptably uneven surface.
- FIG. 8B the same applies to the case where the linear liquid films 703a and 703b having a shape close to a semi-ellipse are bonded. Therefore, the inventor created the technical idea of the present invention based on the idea of discharging a small amount of liquid material into the recesses of the bonded linear liquid film after trial and error. That is, the present invention is composed of the following technical means.
- the method for forming a planar liquid film of the present invention is a method of forming a planar liquid film on an object to be coated by using a jet-type discharge device having a plurality of discharge ports, and any of the plurality of discharge ports can be used.
- the liquid material is arranged on the straight nozzle arrangement line and is arranged at a distance where the liquid material landed on the object to be coated can be combined to form a linear liquid film, and the liquid material is simultaneously discharged from the plurality of discharge ports.
- a unit that forms a unit linear liquid film by discharging a liquid material so that a plurality of liquid lumps do not come into contact with each other before landing on the object to be coated and combining the liquid materials landed on the object to be coated.
- a plurality of linear liquid film forming steps by continuously executing the unit linear liquid film forming step while relatively moving the jet type discharge device and the coating object in a direction orthogonal to the nozzle arrangement line. It is characterized by having a specific planar liquid film forming step of forming a specific planar liquid film formed by combining the unit linear liquid films of the above.
- planar liquid film forming method by executing the specific planar liquid film forming step a plurality of times, a plurality of specific planar liquid films adjacent to the direction of the nozzle arrangement line are formed, thereby forming a plurality of specific surfaces. It may be characterized by having a bonding surface-like liquid film forming step of forming a bonding surface-like liquid film formed by bonding the state-like liquid films.
- a specific planar liquid film is formed while moving the jet-type discharge device and the coating object in the first direction, and subsequently.
- the above-mentioned method for forming a planar liquid film may be characterized in that, in the step of forming a combined planar liquid film, specific planar liquid films having different shapes are combined to form a bonded planar liquid film.
- the surface liquid film forming method may be characterized in that the unevenness of the surface of the bonded surface liquid film is 1/10 or less of the film thickness of the bonded surface liquid film.
- the plurality of discharge ports are the left end large diameter discharge port arranged at the left end portion, the right end large diameter discharge port arranged at the right end portion, the left end large diameter discharge port, and the right end large diameter discharge port. It may be characterized in that it is configured to include a small-diameter discharge port arranged in the middle of the diameter discharge port, and the diameters of the large-diameter discharge ports are all the same.
- the plurality of discharge ports are the left end large diameter discharge port arranged at the left end portion, the right end large diameter discharge port arranged at the right end portion, the left end large diameter discharge port, and the right end large diameter discharge port. It is configured to include one or more large-diameter discharge ports arranged between the diameter discharge ports and a plurality of small-diameter discharge ports, and the diameters of the respective large-diameter discharge ports are the same.
- the small-diameter discharge port may be arranged between two adjacent large-diameter discharge ports.
- the planar liquid film forming method in the unit linear liquid film forming step, after a plurality of large droplets discharged from the large-diameter discharge port land on the object to be coated, they are discharged from the small-diameter discharge port. It may be characterized in that the unit linear liquid film is formed by landing the small droplets.
- the plurality of large droplets are discharged so that a recess is formed on the surface when the plurality of large droplets are combined on the object to be coated, and the small droplets land on the concave portion. It may be characterized by discharging as described above.
- the planar liquid film forming method may be characterized in that the diameter of each large-diameter discharge port is 1.2 to 2 times the diameter of the small-diameter discharge port.
- the large-diameter discharge ports are arranged at equal intervals, and the distance between adjacent large-diameter discharge ports is 2 to 12 times the diameter of the large-diameter discharge ports. May be a feature.
- the planar liquid film forming method may be characterized in that the viscosity of the liquid material is 1000 mPa ⁇ s or more.
- the planar liquid film forming apparatus of the present invention includes a jet-type discharge device and a relative drive device for relatively moving the jet-type discharge device and the object to be coated, and the jet-type discharge device is a linear nozzle.
- a nozzle having a plurality of discharge ports arranged on an arrangement line, a liquid chamber communicating with the plurality of discharge ports via a plurality of discharge flow paths, and a liquid chamber narrower than the liquid chamber moving back and forth in the liquid chamber. It is characterized by comprising a plunger rod and a control device in which a coating program for carrying out the above-mentioned planar liquid film forming method is stored.
- the nozzle includes a plurality of discharge pipes having the plurality of discharge ports, and a nozzle member having a tip portion arranged so that the plurality of discharge pipes project. May be a feature.
- the time point of contact with the droplet is indicated, (e) indicates the middle of bonding between the droplets, and (f) indicates the time point when the droplet forms a liquid film.
- (D) shows the place where the specific surface-like liquid film was formed, and (d) shows the place where the additional specific surface-like liquid film was combined to form a bonded surface-like liquid film.
- It is a bottom view explaining the deformation example of a nozzle.
- (A) shows a case where there are three large-diameter discharge ports, and (b) shows a case where there are four large-diameter discharge ports. It is sectional drawing explaining the process until the droplet applied by the method of a prior art forms a linear liquid film.
- (A) indicates the time when the two droplets start to combine, (b) indicates the time when the two droplets combine to form a convex shape, and (c) indicates the time when the two droplets combine to form a convex shape.
- the jet-type discharge device referred to in the present specification means that the tip of a plunger rod (valve body), which is located in the liquid chamber communicating with the nozzle and is narrower than the liquid chamber, is advanced and moved, and then suddenly stopped.
- a discharge device that applies an inertial force to a liquid material and discharges it.
- the discharge device 101 of the present embodiment has a drive unit 102 that drives the rod 108 in the vertical direction and a discharge unit 103 that discharges a liquid material by the action of the driven rod 108. Mainly composed of and.
- the drive unit 102 includes a drive unit main body 104 having a lumen 107.
- the lumen 107 houses the piston 106 inside, and the piston 106 can slide in the vertical direction.
- a rod 108 is fixedly attached to the piston 106.
- the rod 108 is not limited to the illustrated shape, and may have a hemispherical tip or a tapered shape, for example.
- the lumen 107 is divided into a spring chamber 109 and an air chamber 110 by a piston 106.
- the spring chamber 109 is formed on the upper side of the piston 106 and houses a spring 111 for driving the rod 108 downward.
- a compression coil spring, an air spring, or a leaf spring can be used.
- a stroke adjusting screw 112 for restricting the movement of the rod 108 and adjusting the stroke, which is the moving distance, is provided on the upper portion of the spring chamber 109.
- the stroke is adjusted by changing the distance between the lower end 113 of the stroke adjusting screw 112 and the upper end 114 of the rod 108.
- the air chamber 110 is formed on the lower side of the piston 106, and allows compressed air to flow in to drive the rod 108 ascending.
- the inflow of compressed air into the air chamber 110 is performed from the compressed air source 129 through the air supply pipe 116 and through the switching valve 115.
- the outflow of compressed air from the air chamber 110 is performed through the exhaust pipe 117 via the switching valve 115.
- the switching valve 115 for example, an electromagnetic valve, a high-speed response valve, or the like can be used to control the opening and closing of the control device 128 connected by the control line 118.
- a seal member 119 is provided on the side surface of the piston 106 so that the compressed air flowing into the air chamber 110 does not flow out to the spring chamber 109.
- the discharge unit 103 includes a discharge unit main body 105 having a liquid chamber 120.
- the lower part of the rod 108 is inserted into the liquid chamber 120, and the lower end portion 137 of the rod is moved forward and then suddenly stopped to apply an inertial force to the liquid material to discharge a plurality of droplets.
- the lower end portion 137 of the rod may be brought into contact with the wall surface of the liquid chamber 120, or a mechanism for stopping the advance movement of the rod 108 at a desired position may be provided. Since the inner diameter of the liquid chamber 120 is sufficiently larger than the diameter of the rod 108 located in the liquid chamber 120, the rod 108 moves up and down without contacting the side peripheral surface of the rod 108 and the inner surface of the liquid chamber 120. can do.
- An insertion hole 121 through which the rod 108 is inserted is provided in the upper part of the liquid chamber 120.
- a sealing member 122 is provided below the insertion hole 121 to prevent the liquid material from leaking from the liquid chamber 120 to the drive unit 102 side.
- a supply flow path 123 for communicating the liquid chamber 120 and the storage container 126 for storing the liquid material is provided on the side surface of the liquid chamber 120.
- the storage container 126 is attached to the extension portion 124 provided on the side surface of the discharge portion main body 105, and communicates with the supply flow path 123 via the flow path 125 provided inside the extension portion 124.
- Compressed air for pumping the liquid material is supplied to the storage container 126 through the adapter tube 127 after being adjusted to a desired pressure by the control device 128.
- the liquid material flows from the storage container 126 through the flow path 125 in the extension portion 124, through the supply flow path 123, and into the liquid chamber 120.
- a valve seat 131 and a nozzle member 130 are detachably fixed to the lower portion of the liquid chamber 120 by a nozzle fixture 132. In the case of a valve body seating type jet discharge device, the worn valve seat 131 can be replaced in a timely manner.
- the valve seat 131 of the present embodiment has two large-diameter communication holes (133a, 133b) and a small-diameter discharge flow path 136 that communicate with the liquid chamber 120 and the large-diameter discharge flow paths (135a, 135b) of the nozzle member 130 described later.
- One small-diameter communication hole 134 that communicates with is provided.
- the valve seat 131 is fixed so as to be sandwiched between the lower end portion of the liquid chamber 120 and the nozzle member 130. It is also possible to directly communicate the liquid chamber 120 and the discharge flow paths (135a, 135b, 136) of the nozzle member 130 without providing the valve seat 131.
- the nozzle member 130 of the present embodiment is composed of a cylindrical body portion 142 and a tip portion 144 extending downward from the lower end of the body portion 142.
- the upper end of the body portion 142 is shaped so as to fit into the step portion 143 provided at the lower end portion of the liquid chamber 120.
- the inside of the body portion 142 has a concave shape to hold the valve seat 131.
- two large-diameter discharge flow paths (135a, 135b) and one small-diameter discharge flow path 136 are provided so as to be parallel to each other.
- the outer surface of the tip portion 144 may be coated with a water-repellent material or surface-treated to exhibit water repellency.
- the tip portion 144 By providing the tip portion 144 with water repellency and preventing excess liquid material from adhering to the tip portion 144, it is possible to prevent problems that occur when continuous coating is performed.
- the upper ends of the two large-diameter discharge channels (135a, 135a) communicate with the two large-diameter communication holes (133a, 133b) of the valve seat 131, and the upper ends of one small-diameter discharge flow path 136 communicate with the valve seat 131. It communicates with one of the small diameter communication holes 134.
- each discharge flow path (135a, 135b, 136) is composed of a columnar flow path having the same diameter from the upper end to the lower end.
- the diameter of the large diameter discharge flow paths 135a, 135b is 0.35 to 0.70 mm.
- the diameter of the small diameter discharge flow path 136 is set to be in the range of 0.25 to 0.35 mm.
- the diameters of the large-diameter discharge flow paths 135a and 135b are set to be 1.2 to 2 times the diameter of the small-diameter discharge flow paths 136.
- any setting is not limited to the above range, and can be appropriately changed depending on the properties of the liquid material used and the desired coating shape.
- the two large-diameter discharge ports (138a and 138b) are arranged at symmetrical positions with the central axis 141 in between, and one small-diameter discharge port 139 is arranged coaxially with the central axis 141. That is, each discharge port (138a, 138b, 139) is arranged side by side on one straight line 140 (hereinafter, this straight line is referred to as a nozzle arrangement line 140) passing through the central axis 141.
- the distance between the two large-diameter discharge ports (138a and 138b) (the distance between the right end of the large-diameter discharge port 138a on the left side and the left end of the large-diameter discharge port 138b on the right side) is at least each discharge port.
- a distance at which a plurality of droplets simultaneously ejected from (138a, 138b, 139) do not combine in the air to form one droplet for example, set to 2 to 12 times the diameter of the large-diameter ejection ports 138a and 138b. Will be done.
- the distance between the nozzle member 130 and the object to be coated 401, etc., the two large droplets (402a, 402b) discharged from the large diameter discharge port (138a, 138b) are the objects to be coated.
- the conditions for coupling on the 401 are set in the control device 313. At this time, it is preferable to set a condition so that a recess is formed on the surface when two large droplets (402a, 402b) discharged from the large-diameter discharge port (138a, 138b) are combined.
- One small diameter discharge port 139 is located between (that is, exactly in the middle) between the two large diameter discharge ports (138a, 138b) for the reason described later (see FIG. 4), in other words, which large diameter discharge port (that is, exactly in the middle). It is preferable to arrange them at positions that are equal in distance from 138a and 138b).
- the tip portion 144 of the nozzle member 130 is substantially rectangular when viewed from the bottom surface side, and the tip portion first direction side surface (145a, 145b) and the nozzle arrangement line 140. It has a tip portion second direction side surface (146a, 146b) parallel to the above.
- the number of the large-diameter discharge port 138 is two and the number of the small-diameter discharge port 139 is one, but the present invention is not limited to these, and the large-diameter discharge port 138 may be 3 or more and the small-diameter discharge port 139 may be 2 or more.
- FIG. 6A shows a case where there are three large-diameter discharge ports 138 and two small-diameter discharge ports 139.
- FIG. 6B shows a case where there are four large-diameter discharge ports 138 and three small-diameter discharge ports 139. In either case, the discharge ports (138, 139) are arranged side by side on one nozzle arrangement line 140.
- each discharge port (138, 139) communicates with the liquid chamber 120 by a discharge flow path having the same diameter as each discharge port.
- the small-diameter discharge port 139 is arranged at a position where the distance is the same from any of the large-diameter discharge ports 138 on both sides. Further, it is preferable that the discharge ports (138, 139) are arranged at equal intervals. By arranging them at equal intervals, it is possible to reduce the unevenness of the surface of the specific planar liquid film 405. Further, by increasing the number of discharge ports as illustrated in FIG. 6, the area of the liquid film that can be formed by one coating is increased as compared with the configuration of FIG. 2, and the planar coating can be performed with a small number of times. can.
- each discharge port (138, 139) is arranged on the nozzle arrangement line 140.
- a plurality of discharge ports are arranged substantially on a straight line. It is included in the technical scope of the present invention.
- the rod 108 is moved up and down, and the tip 137 of the rod 108 is communicated with the discharge flow path (135, 136) of the nozzle member 130.
- It is a discharge device that simultaneously shoots and discharges a plurality of droplets from a plurality of discharge ports (138a, 138b, 139) by advancing and moving toward 133b, 134).
- the initial state is a state in which the rod 108 is in contact with the valve seat 131 and the communication holes (133a, 133b, 134) are closed.
- the valve When the operation start signal is transmitted from the control device 128 to the switching valve 115, the valve switches to the inflow position and the compressed air flows into the air chamber 110.
- the compressed air causes the piston 106 to move upward while compressing the spring 111, and accordingly, the lower end portion 137 of the rod 108 is separated from the valve seat 131 to open the communication holes (133a, 133b, 134).
- the rod 108 moves up until its upper end 114 abuts on the lower end 113 of the stroke adjusting screw 112.
- the valve When the operation end signal is transmitted to the switching valve 115 after the lapse of the set time, the valve switches to the discharge position and the compressed air in the air chamber 110 is discharged to the atmosphere.
- the piston 106 is lowered by the repulsive force of the spring 111, and the lower end portion 137 of the rod 108 abuts on the valve seat 131 accordingly to close the communication holes (133a, 133b, 134). Then, the liquid material flows out from the lower end of the discharge flow path (135a, 135b, 136), and eventually separates from the discharge port (138a, 138b, 139) to form three droplets, which are then shot and discharged toward the target.
- the above is one operation when discharging the liquid material in the discharge device of the type in which the rod 108 is brought into contact with the valve seat 131.
- the nozzle member 130 is arranged so that the center line of each discharge flow path (135a, 135b, 136) coincides with the vertical line.
- the coating device 301 of the present embodiment has a discharge device 101 for discharging a liquid material, and a work table 310 on which the discharge device 101 and an object to be coated 311 are placed. It is mainly composed of an XYZ drive device (relative drive device) 303 that is relatively moved.
- XYZ drive device relative drive device
- the XYZ drive device 303 is an X drive device 304 that relatively moves the discharge device 101 and the work table 310 in the X direction 307, and a Y drive device that moves the discharge device 101 and the work table 310 relatively in the Y direction 308.
- the 305 is composed of a Z drive device 306 that relatively moves the discharge device 101 and the work table 310 in the Z direction 309.
- the Y drive device 305 is provided on the upper surface of the housing 312 so as to extend in the Y direction 308, and the X drive device 304 is provided on the Y drive device 305 so as to extend in the X direction 307.
- a Z drive device 306 is provided on the X drive device 304, and a discharge device 101 is provided on the Z drive device 306.
- the work table 310 is installed on the upper surface of the housing 312 so as to be parallel to the Y drive device 305 and located below the X drive device 304.
- the discharge device 101 and the object to be coated 311 on the work table 310 can move relatively in the X direction 307, the Y direction 308, and the Z direction 309.
- the XYZ drive device 303 is controlled by the control device 313 to move the nozzle tip of the discharge device 101 to an arbitrary position on the coating object 311 at an arbitrary speed.
- a device that combines an electric motor such as a servo motor or a stepping motor with a ball screw, a device that uses a linear motor, a device that transmits power with a belt or a chain, or the like can be used.
- a ⁇ -axis drive device that rotates the discharge device 101 with respect to the Z-axis may be provided.
- the work table 310 is made of a plate-shaped member, and is provided with a mechanism (not shown) for fixing the object to be coated 311.
- a mechanism for fixing for example, a mechanism for adsorbing the object to be coated 311 by making a plurality of holes leading from the inside of the work table 310 to the upper surface and sucking air through the holes, and a mechanism for adsorbing the object to be coated 311 with a fixing member.
- a mechanism for fixing the object to be coated 311 by sandwiching the member and fixing the member to the work table 310 with a fixing means such as a screw can be used.
- the control device 313 is composed of a processing device, a storage device, an input device, an output device, and a display device. In the present embodiment, it is composed of a control device 313 having a built-in processing device and a storage device, and a touch panel (not shown) that also serves as an input device, an output device, and a display device.
- a personal computer (PC), a programmable logic controller (PLC), or the like can be used as a processing device or a storage device, and a keyboard, a mouse, or the like can be used as an input device, an output device, or a display device.
- a display or the like can be used.
- the storage device stores a coating program for causing the processing device to execute the coating operation described later.
- the upper portion of the housing 312 provided with the discharge device 101, the XYZ drive device 303, the work table 310, and the like is covered with the cover 317 shown by the dotted line.
- a part is interrupted for convenience of explanation.
- the cover 317 it is possible to prevent dust from entering the coating device 301 and prevent inadvertent contact between the operator and a moving portion such as the XYZ drive device 303.
- the cover 317 may be provided with a door that can be opened and closed in order to facilitate access to the inside of the coating device by an operator.
- the above-mentioned touch panel may be provided on the cover 317 so that the operation can be performed from the outside of the cover 317.
- the coating device 301 may be linked with a transport device (not shown) for carrying the uncoated object 401 into the coating device and carrying the coated object 401 out of the coating device.
- a transport device includes, for example, a rail composed of two members extending from the carry-in port to the carry-out port provided on the cover 317, and a transmission element that acts to convey the object to be coated 401 along the extension direction of the rail. It is composed of a transport drive device for driving the transmission element and an elevating device for raising and lowering the work table 310.
- the work table 310 is set to the lowering position when the object to be coated 401 is conveyed, and the work table 310 is set to the ascending position when the coating operation is performed. At this ascending position, the object to be coated 401 is sandwiched between the work table 310 and the holding plate provided on the rail and fixed.
- the coating device 301 is a planar liquid material having a desired cross-sectional shape (width, height) by combining the operation of the discharge device 101 and the operation of the XYZ drive device 303. Can be applied on the object to be applied 311.
- the nozzle member 130 is attached to the discharge device 101 so that the discharge ports (138a, 138b, 139) are arranged in a direction perpendicular to the moving direction. In other words, it is attached to the discharge device 101 so that the nozzle arrangement line 140 is perpendicular to the moving direction. Then, when the ejection device 101 to which the nozzle member 130 is attached is continuously ejected while being moved as described above, the droplets ejected from the respective ejection ports (138a, 138b, 139) are sequentially applied to the object to be coated. It adheres on 311 and combines to form a unit linear liquid film 404.
- the unit linear liquid film 404 when the unit linear liquid film 404 is formed a plurality of times so that adjacent long sides come into contact with each other, they are combined to form a specific planar liquid film 405.
- the specific planar liquid film 405 is formed a plurality of times so that adjacent long sides are in contact with each other, they are combined to form a bonded planar liquid film 407.
- the process of forming the unit linear liquid film 404, the specific planar liquid film 405, and the bonded planar liquid film 407 will be described below.
- the liquid material that flows out from the discharge port and is not separated from the discharge port, and the plurality of droplets that are separated after being discharged from the discharge port and before landing on the object to be coated are combined. Sometimes called a "liquid mass".
- the small droplets 403 come into contact with each other before or immediately after the two large droplets (402a, 402b) come into contact with each other (FIG. 4 (d)).
- the droplet 403 contacts the two droplets (402a, 402b) before the two droplets (402a, 402b) are fully bound to each other. Since the small-diameter discharge port 139 is located in the middle of the large-diameter discharge port (138a, 138b), the small drop 403 contacts the recess formed between the two large drops (402a, 402b) that have begun to combine. do.
- the droplet 403 is ejected into a recess formed between the two droplets (402a, 402b) that have begun to combine. Then, when the two large droplets (402a and 402b) are combined, the small droplet 403 acts to suppress the flow toward the center (FIG. 4 (e)). In addition, the small drop 403 fills the central recess formed by the combination of the two large drops (402a, 402b) with the liquid. By doing so, it is possible to form a unit line liquid film 404 having a thin and wide cross-sectional shape with less unevenness on the surface as compared with the case where only two large droplets are combined (for example, the method described in Patent Document 3) (for example, the method described in Patent Document 3). FIG. 4 (f). It should be noted that FIG. 4 is merely a drawing of an image diagram for explanation, and the shape of the cross section of the actual droplet or the unit line liquid film may be different from that drawn in FIG. I will add that it is naturally assumed.
- the specific surface liquid film 405 is discharged in a direction orthogonal to the nozzle arrangement line 140 (for example, the direction of arrow 406 shown in the upper plan view of FIG. 5).
- a plurality of unit linear liquid films 404 are continuously formed while moving relative to each other, and these are formed by binding them.
- the operation of forming the unit linear liquid film 404 n + 1 at the position adjacent to the Nth unit linear liquid film 404 n formed on the object to be coated 401 is repeated a desired number of times to specify the specific surface.
- a liquid film 405 is formed (where n is a natural number). Specifically, as shown in FIG. 5A, when the unit linear liquid film 404 a1 ...
- the unit linear liquid film 404 a1 ... 404 am combine to form a specific planar liquid film 405a (where m is a natural number). Since the unit linear liquid films 404 a1 ... 404 am to be applied have a cross-sectional shape close to a rectangle, the cross-sectional shape is close to a rectangle even if they are combined, and the surface is thin and wide with few irregularities.
- a specific planar liquid film 405a can be formed.
- a specific planar liquid film 405b is formed at a position adjacent to the specific planar liquid film 405a, and the bonded surface liquid film 407a is formed by binding these. (Fig. 5 (b)).
- the moving direction of the discharge device 101 when forming the specific planar liquid film 405a and the moving direction of the discharging device 101 when forming the specific planar liquid film 405b are opposite to each other. By doing so, the relative moving distance of the discharge device 101 is minimized.
- the discharge device 101 moves in a direction orthogonal to the moving direction 406a when forming the specific planar liquid film 405a, and then moves in the direction opposite to the moving direction 406a.
- a specific planar liquid film 405b is formed by continuously forming a plurality of unit linear liquid films 404 while moving in the direction 406b. If the target bonded surface liquid film 407 is obtained by combining two specific surface liquid films 405, the work ends here.
- the aspect in which the moving direction 406a and the moving direction 406b are in the same direction is also included in the technical scope of the present invention.
- the target bonded surface liquid film 407 is obtained by binding three or more specific surface liquid films 405, the third and subsequent specific surface liquid films 405 are formed. Specifically, as shown in FIG. 5 (c), a specific planar liquid film 405c is formed at a position adjacent to the bonded planar liquid film 407a, and by binding these, three specific planar liquid films 405 are formed. A bonded planar liquid film 407b obtained by bonding is formed (FIG. 5 (d)). Even if an additional specific planar liquid film 405 is sequentially applied in order to obtain the final target bonded surface liquid film 407, the specific planar liquid film 405 in which the bonded surface liquid film 407 in the intermediate process is newly formed is also newly formed.
- the cross-sectional shapes are close to a rectangle, the cross-sectional shape is close to a rectangle even when they are joined, and a thin and wide bonded surface-like liquid film 407 having less unevenness than the conventional one can be formed on the surface.
- the desired bonded planar liquid film 407 is formed by applying the specific planar liquid film 405 over a desired range once or a plurality of times to form the specific planar liquid film 405.
- the specific planar liquid film and the combined planar liquid film are formed so as to form a quadrangle in a plan view, but the shape is not limited to these.
- the discharge device 101 of the second embodiment will be described with reference to FIG.
- the discharge device 101 of the second embodiment discharges the liquid material from the discharge unit 103 by the action of the drive unit 102 that drives the rod 108 in the vertical direction and the driven rod 108. It is the same as the apparatus 101.
- the discharge device 101 of the second embodiment is different from the discharge device 101 of the first embodiment in that it includes a nozzle member 150 provided with discharge pipes (151a, 151b, 152).
- discharge pipes 151a, 151b, 152
- the nozzle member 150 of the second embodiment shown in FIG. 9 is composed of a cylindrical body portion 142 and a tip portion 144 extending downward from the lower end of the body portion 142.
- Two large-diameter discharge flow paths (135a and 135b) and one small-diameter flow path 136 are internally provided at the tip portion 144 of the nozzle member 150.
- a large-diameter discharge pipe (151a, 151b) is inserted at the lower end of the two large-diameter discharge passages (135a, 135b) so as to protrude from the lower end of the tip portion 144, and a small-diameter discharge pipe is inserted at the lower end of the small-diameter discharge flow path 136.
- the tube 152 is inserted so as to protrude from the lower end of the tip portion 144.
- the amount of the discharge pipes (151a, 151b, 152) protruding from the lower end of the tip portion 144 is set to be, for example, 1.5 to 3.5 times the inner diameter of each discharge pipe (151, 152). do.
- FIG. 9 illustrates a configuration in which the tip positions of the discharge pipes (151a, 151b, 152) are aligned (that is, on the same horizontal plane).
- the tip positions of the small-diameter discharge pipe 152 may not be aligned with those of 151a and 151b).
- the small diameter with respect to the large diameter discharge pipe (151a, 151b) is adjusted.
- the protrusion amount of the discharge pipe 152 may be shortened, or conversely may be lengthened.
- each discharge pipe (151a, 151b, 152) is the same as the inner diameter of each discharge flow path (135a, 135b, 136), and the discharge port (138a) is provided from the communication hole (133a, 133b, 134) of the valve seat 131. It is preferable to construct a flow path having the same diameter without a step up to 138b and 139).
- the discharge pipes (151a, 151b, 152) are arranged so as to be parallel to each other so that the center line of each discharge pipe (151a, 151b, 152) coincides with the vertical line during the discharge operation.
- the nozzle member 150 is arranged in the.
- the number of large-diameter discharge pipes 151 is two and the number of small-diameter discharge pipes 152 is one.
- the number of 152 (and small diameter discharge port 139) may be 2 or more.
- it includes three large-diameter discharge pipes 151 and two small-diameter discharge pipes 152 installed between two adjacent large-diameter discharge pipes 151, respectively.
- It can also be configured, or as in the modified example illustrated in FIG. 6B above, three large-diameter discharge pipes 151 and three installed between two adjacent large-diameter discharge pipes 151, respectively.
- the diameters of the plurality of large-diameter discharge pipes 151 (and the large-diameter discharge ports 138) are the same, and the diameters of the plurality of small-diameter discharge pipes 152 (and the small-diameter discharge ports 139) are the same. ..
- each discharge pipe (151, 152) is arranged on the nozzle arrangement line 140, a slight deviation of the arrangement of each discharge pipe (151, 152) is not allowed in order to obtain the effect of the present invention. Rather, the technical scope of the present invention also includes an embodiment in which a plurality of discharge pipes are arranged substantially in a straight line.
- the unit linear liquid film 404 and the specific surface of various shapes are also applied as in the first embodiment. It is possible to form a liquid film 405 and a bonding surface liquid film 407 having a desired shape. Further, by providing discharge pipes (151, 152) at the lower ends of the discharge flow paths (135, 136) so that the lower ends of the discharge pipes (151, 152) protrude from the tip portion 144 and do not come into contact with each other, at the time of discharge. In addition, the drops can be cut well, and excess liquid material can be prevented from adhering to the tip of the discharge pipe (151, 152). In addition, by improving the cutting of drops, stable continuous discharge with little difference in the size of drops and the like becomes possible. Therefore, according to the discharge device 101 of the second embodiment, it is possible to accurately form a thin and wide planar liquid film with few irregularities on the surface.
- the unevenness of the surface of the bonded surface liquid film 407 formed of a high-viscosity liquid material such as a silicon resin, a urethane resin, or an epoxy resin can be made 1/10 or less of the film thickness.
- a comparison between the results of the prior art and the results of the present invention was made using a liquid material having a viscosity of 2500 [mPa ⁇ s]
- the surface irregularities of the prior art were ⁇ 100 [ ⁇ m] for a film thickness of 500 [ ⁇ m].
- the surface irregularities could be ⁇ 50 [ ⁇ m] or less with respect to the film thickness of 500 [ ⁇ m].
- the present invention is suitable for coating a liquid material having a viscosity of 1000 to 500,000 mPa ⁇ s, which is liable to cause irregularities that cannot be tolerated by the prior art, and is more suitable for a liquid material having a viscosity of 1500 to 500,000 mPa ⁇ s, and a liquid of 2000 to 500,000 mPa ⁇ s. More suitable for materials.
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Abstract
Description
例えば、特許文献1は、プリント回路基板に実装された電気部品を湿気などから保護するための被覆を施す方法に関するもので、コーティング材料を非接触で射出する射出弁を基板に対して動かしながら、コーティング材料の液滴を形成するステップを繰り返すことにより、コーティング材料の被覆を基板の表面に施す方法である。
しかしながら、特許文献2の塗布方法により形成した塗布線の断面は、半円状あるいは半楕円状となり、幅に比べて高さが大きい(例えば、塗布線の断面の高さと幅との比が1に近い)という問題があった。
そこで本発明は、従来よりも表面に凹凸の少ない面状液膜を形成するための面状液膜形成方法および面状液膜形成装置を提供することを目的とする。
そこで発明者は、試行錯誤のすえ、結合した線状液膜の凹部に少量の液体材料を吐出するとの着想を得て、本発明の技術思想を創作した。すなわち、本発明は、以下の技術手段から構成される。
上記面状液膜形成方法において、前記結合面状液膜形成工程において、前記ジェット式吐出装置と前記塗布対象物とを第一の方向に移動しながら特定面状液膜を形成し、続いて第一の方向と逆方向である第二の方向に移動しながら特定面状液膜を形成することを繰り返すことを特徴としてもよい。
上記面状液膜形成方法において、前記結合面状液膜形成工程において、形状の異なる特定面状液膜を結合させて結合面状液膜を形成することを特徴としてもよい。
上記面状液膜形成方法において、前記結合面状液膜の表面の凹凸が、前記結合面状液膜の膜厚の1/10以下であることを特徴としてもよい。
上記面状液膜形成方法において、前記複数の吐出口が、左端部に配置される左端大径吐出口と、右端部に配置される右端大径吐出口と、左端大径吐出口および右端大径吐出口の中間に配置される小径吐出口と、を備えて構成され、前記各大径吐出口の直径がいずれも同径であることを特徴としてもよい。
上記面状液膜形成方法において、前記単位線状液膜形成工程において、前記大径吐出口から吐出された複数の大滴が前記塗布対象物上に着地した後に、前記小径吐出口から吐出された小滴を着地させることで前記単位線状液膜を形成することを特徴としてもよい。
上記面状液膜形成方法において、前記複数の大滴が前記塗布対象物上で結合した際に表面に凹部ができるように前記複数の大滴を吐出し、当該凹部に前記小滴が着地するように吐出することを特徴としてもよい。
上記面状液膜形成方法において、前記各大径吐出口の直径が、前記小径吐出口の直径の1.2~2倍であることを特徴としてもよい。
上記面状液膜形成方法において、前記大径吐出口が等間隔に配置されており、隣り合う前記大径吐出口間の距離が、前記大径吐出口の直径の2~12倍であることを特徴としてもよい。
上記面状液膜形成方法において、前記液体材料の粘度が、1000mPa・s以上であることを特徴としてもよい。
上記面状液膜形成装置において、前記ノズルが、前記複数の吐出口を備える複数の吐出管と、前記複数の吐出管が突出するように配置された先端部を有するノズル部材と、を備えることを特徴としてもよい。
(1)吐出装置
本実施形態の吐出装置101は、図1に示すように、ロッド108を上下方向に駆動させる駆動部102と、駆動されたロッド108の作用により液体材料を吐出する吐出部103とから主に構成される。
本実施形態のバルブシート131には、液室120と後述するノズル部材130の大径吐出流路(135a、135b)と連通する二つの大径連通孔(133a、133b)および小径吐出流路136と連通する一つの小径連通孔134が貫設される。バルブシート131は、液室120の下端部とノズル部材130との間に挟まれるようにして固定される。なお、バルブシート131を設けず、液室120とノズル部材130の各吐出流路(135a、135b、136)とを直接連通させるようにすることもできる。
二つの大径吐出流路(135a、135a)の上端は、バルブシート131の二つの大径連通孔(133a、133b)にそれぞれ連通し、一つの小径吐出流路136の上端は、バルブシート131の一つの小径連通孔134に連通している。一方、二つの大径吐出流路(135a、135b)の下端は、外部に連通する二つの大径吐出口(138a、138b)をそれぞれ構成し、一つの小径吐出流路136の下端は、外部に連通する一つの小径吐出口139を構成する。各吐出流路(135a、135b、136)は、上端から下端まで同径の円柱状流路から構成されており、例えば、大径吐出流路135a、135bの直径は0.35~0.70mm、小径吐出流路136の直径は0.25~0.35mmの範囲となるように設定している。別の言い方をすると、大径吐出流路135a、135bの直径は、小径吐出流路136の直径の1.2~2倍となるように設定している。ただし、いずれの設定も上記の範囲に限定されず、用いる液体材料の性質や所望とする塗布形状により適宜変更され得るものである。
本実施形態では、ノズル部材130の先端部144は、図2(b)に示すように、底面側から見ると略矩形であり、先端部第1方向側面(145a、145b)およびノズル配置線140と平行な先端部第2方向側面(146a、146b)とを有している。
本実施形態の吐出装置101は、ロッド108を上下動させ、ロッド108の先端137をノズル部材130の吐出流路(135、136)と連通するバルブシートの連通孔(133a、133b、134)に向かって進出移動させることで、複数の吐出口(138a、138b、139)から複数の液滴を同時に飛翔吐出させる吐出装置である。
以下では、ロッド108をバルブシート131に当接させるタイプにおける、一回の液体材料(3つの液滴)を吐出する際の動作について説明する。ロッド108がバルブシート131に当接し、連通孔(133a、133b、134)を閉鎖している状態を初期状態とする。
本実施形態の塗布装置301は、図3に示すように、液体材料を吐出する吐出装置101と、該吐出装置101と塗布対象物311が載置されるワークテーブル310とを相対的に移動させるXYZ駆動装置(相対駆動装置)303とから主に構成される。
本実施形態に係る塗布装置301は、塗布装置内に未塗布の塗布対象物401を搬入し、塗布装置外へ塗布済みの塗布対象物401を搬出するための図示しない搬送装置と連係させることができる。このような搬送装置は、例えば、カバー317に設けられた搬入口から搬出口まで延びる二つの部材からなるレールと、レールの延伸方向に沿って塗布対象物401を搬送する作用をする伝動要素と、伝動要素を駆動するための搬送駆動装置と、ワークテーブル310を昇降動する昇降装置とから構成される。この昇降装置は、塗布対象物401を搬送するときはワークテーブル310を下降位置とし、塗布作業を行うこときは上昇位置とする。この上昇位置において、塗布対象物401は、ワークテーブル310とレールに設けられた押え板に挟まれて、固定される。
本実施形態に係る塗布装置301は、吐出装置101の動作とXYZ駆動装置303の動作とを組み合わせることで、所望の断面形状(幅、高さ)を有する面状の液体材料を塗布対象物311上に塗布することができる。
以下に、単位線状液膜404、特定面状液膜405および結合面状液膜407が形成される過程を説明する。なお、本明細書では、吐出口から流出し、吐出口から分断される前の液体材料と、吐出口から吐出された後に分断され、塗布対象物に着地する前の複数の液滴を合わせて「液塊」と呼ぶ場合がある。
はじめに、本実施形態に係る塗布装置301により塗布される液滴が単位線状液膜404を形成する過程の一例を、図4を参照しながら説明する。図4(a)に示すように、ノズル部材130の複数の吐出口(138a、138b、139)から同時に吐出される複数の液滴(402a、402b、403)は、大きさ(体積あるいは重量)の違いにより、塗布対象物401に着地するまでに時間差あるいは距離差が生じる(図4(b))。すなわち、二つの大滴(402a、402b)が先に塗布対象物401上に着地する(図4(c))。そして、二つの大滴(402a、402b)が互いに接触する前、あるいは接触した直後に小滴403が接触する(図4(d))。言い換えると、二つの大滴(402a、402b)が互いに完全に結合する前に、小滴403が二つの大滴(402a、402b)に接触する。小径吐出口139が大径吐出口(138a、138b)の中間に配置されているので、小滴403は、結合し始めた二つの大滴(402a、402b)の間に形成される凹部に接触する。言い換えると、小滴403は、結合し始めた二つの大滴(402a、402b)の間に形成される凹部に吐出される。すると、二つの大滴(402a、402b)が結合する際に中央に向かう流れを、小滴403が押し止めるように働く(図4(e))。くわえて、小滴403が二つの大滴(402a、402b)が結合してできた中央部の凹みへ液体を補うことになる。このようにすることで、二つの大滴のみを結合する場合(例えば、特許文献3に記載の方法)と比べ表面に凹凸の少ない、薄く広い断面形状の単位線状液膜404を形成できる(図4(f))。なお、図4は、説明のためのイメージ図を描画したものに過ぎず、実際の液滴や単位線状液膜の断面の形状などが、図4に描画されたものと異なるものになることは当然に想定されることを付言する。
特定面状液膜405は、ノズル配置線140と直交する方向(例えば、図5上段の平面図に示した矢印406の方向)に吐出装置101を相対移動させながら複数の単位線状液膜404を連続形成し、これらが結合することにより形成される。別の言い方をすれば、塗布対象物401上に形成したN番目の単位線状液膜404nに隣接した位置に、単位線状液膜404n+1を形成する動作を所望回数繰り返すことで特定面状液膜405を形成する(ここで、nは自然数)。詳細には、図5(a)に示すように、隣り合う単位線状液膜404に隣接するように単位線状液膜404a1・・・404amを形成すると、単位線状液膜404a1・・・404amが結合して特定面状液膜405aを形成する(ここで、mは自然数)。塗布される単位線状液膜404a1・・・404amは、断面形状が矩形に近いもの同士であるので、結合しても断面形状は矩形に近く、また、表面に凹凸の少ない、薄く広い特定面状液膜405aが形成できる。
特定面状液膜405aに隣接した位置に特定面状液膜405bを形成し、これらを結合させることにより結合面状液膜407aが形成される(図5(b))。図5(a)の例では、特定面状液膜405aを形成する際の吐出装置101の移動方向と特定面状液膜405bを形成する際の吐出装置101の移動方向とを、逆方向とすることで、吐出装置101の相対移動距離が最小限となるようにしている。すなわち、特定面状液膜405aの形成が終了すると、吐出装置101は特定面状液膜405aを形成する際の移動方向406aと直交する方向に移動し、次いで移動方向406aと逆方向である移動方向406bに移動しながら複数の単位線状液膜404を連続形成することで特定面状液膜405bを形成する。目的とする結合面状液膜407が、特定面状液膜405を2つ結合して得られるのであれば、ここで作業は終える。なお、図5の例示とは異なり、移動方向406aと移動方向406bが同じ方向になる態様も、本発明の技術的範囲には含まれる。
第2実施形態の吐出装置101を、図9を参照しながら説明する。第2実施形態の吐出装置101は、ロッド108を上下方向に駆動させる駆動部102と、駆動されたロッド108の作用により液体材料を吐出部103から吐出する点においては、第1実施形態の吐出装置101と同様である。第2実施形態の吐出装置101は、吐出管(151a、151b、152)が設けられたノズル部材150を備える点で、第1実施形態の吐出装置101と相違する。以下では、共通の構成には同一の符号を付し、説明を省略する。
本実施形態では、大径吐出管151を二つ、小径吐出管152を一つとしたが、これらに限定されず、大径吐出管151(および大径吐出口138)が3以上、小径吐出管152(および小径吐出口139)が2以上としてもよい。例えば、上述の図6(a)で例示した変形例と同様、三つの大径吐出管151と、隣接する二つの大径吐出管151の間それぞれに設置された二つの小径吐出管152を備える構成とすることもできるし、上述の図6(b)で例示した変形例と同様、四つの大径吐出管151と、隣接する二つの大径吐出管151の間それぞれに設置された三つの小径吐出管152を備える構成とすることもできる。この場合、複数の大径吐出管151(および大径吐出口138)の直径は同径とし、かつ、複数の小径吐出管152(および小径吐出口139)の直径を同径とすることが好ましい。また、各吐出管(151、152)はノズル配置線140上に配置するが、本発明の効果を得るためには、各吐出管(151、152)の僅かな配置のズレも許容されないという訳ではなく、複数の吐出管が実質的に直線上に配置された態様も本発明の技術的範囲には含まれる。
また、吐出流路(135、136)の下端に吐出管(151、152)を設け、それらの下端を先端部144よりも突出させ、かつ、互いに接触しないように構成することで、吐出の際に、滴の切れがよくなり、吐出管(151、152)の先端部への余分な液体材料の付着を防ぐことができる。また、滴の切れがよくなることで、滴の大きさ等に差が少ない、安定した連続吐出が可能となる。したがって、第2実施形態の吐出装置101によれば、表面に凹凸が少なく、薄く広い面状液膜を精度よく形成することが可能である。
粘度が2500[mPa・s]の液体材料を用いて、従来技術による結果と本発明による結果との比較を行ったところ、従来技術では膜厚500[μm]に対し表面の凹凸が±100[μm]以上であったものが、本発明では膜厚500[μm]に対し表面の凹凸が±50[μm]以下とすることができた。本発明は、従来技術では許容できない凹凸が生じやすい粘度が1000~500000mPa・sの液体材料の塗布に好適であり、1500~500000mPa・sの液体材料により好適であり、2000~500000mPa・sの液体材料にさらに好適である。
301:塗布装置、303:XYZ駆動装置(相対駆動装置)、304:X駆動装置、305:Y駆動装置、306:Z駆動装置、307:X移動方向、308:Y移動方向、309:Z移動方向、310:ワークテーブル、311:塗布対象物、312:筐体、313:制御装置、317:カバー
401:塗布対象物、402:大滴、403:小滴、404:単位線状液膜、405:特定面状液膜、406:吐出装置移動方向(塗布方向)、407:結合面状液膜
701:塗布対象物、702:液滴、703:線状液膜、704:面状液膜
Claims (14)
- 複数の吐出口を有するジェット式吐出装置を用いて塗布対象物上に面状液膜を形成する方法であって、
前記複数の吐出口のいずれもが、直線であるノズル配置線上に配置され、且つ、塗布対象物上に着地した液体材料が結合して線状液膜を形成可能な距離に配置されること、
前記複数の吐出口から同時に吐出された複数の液塊が、前記塗布対象物に着地する前に接触しないように液体材料を吐出し、前記塗布対象物上で着地した液体材料を結合させることにより単位線状液膜を形成する単位線状液膜形成工程、
前記ノズル配置線と直交する方向に前記ジェット式吐出装置と前記塗布対象物とを相対移動させながら、前記単位線状液膜形成工程を連続して実行することにより複数の単位線状液膜を結合してなる特定面状液膜を形成する特定面状液膜形成工程、を有することを特徴とする面状液膜形成方法。 - 前記特定面状液膜形成工程を複数回実行することにより、前記ノズル配置線の方向に隣接する複数の特定面状液膜を形成することにより複数の特定面状液膜を結合してなる結合面状液膜を形成する結合面状液膜形成工程、を有することを特徴とする請求項1に記載の面状液膜形成方法。
- 前記結合面状液膜形成工程において、前記ジェット式吐出装置と前記塗布対象物とを第一の方向に移動しながら特定面状液膜を形成し、続いて第一の方向と逆方向である第二の方向に移動しながら特定面状液膜を形成することを繰り返すことを特徴とする請求項2に記載の面状液膜形成方法。
- 前記結合面状液膜形成工程において、形状の異なる特定面状液膜を結合させて結合面状液膜を形成することを特徴とする請求項2または3に記載の面状液膜形成方法。
- 前記結合面状液膜の表面の凹凸が、前記結合面状液膜の膜厚の1/10以下であることを特徴とする請求項2ないし4のいずれかに記載の面状液膜形成方法。
- 前記複数の吐出口が、
左端部に配置される左端大径吐出口と、
右端部に配置される右端大径吐出口と、
左端大径吐出口および右端大径吐出口の中間に配置される小径吐出口と、
を備えて構成され、前記各大径吐出口の直径がいずれも同径である請求項1ないし5のいずれかに記載の面状液膜形成方法。 - 前記複数の吐出口が、
左端部に配置される左端大径吐出口と、
右端部に配置される右端大径吐出口と、
左端大径吐出口および右端大径吐出口の間に配置される1つ以上の大径吐出口と、
複数の小径吐出口と、を備えて構成されており、
前記各大径吐出口の直径がいずれも同径であり、
隣り合う2つの大径吐出口の中間に、前記小径吐出口が配置されていることを特徴とする請求項1ないし5のいずれかに記載の面状液膜形成方法。 - 前記単位線状液膜形成工程において、前記大径吐出口から吐出された複数の大滴が前記塗布対象物上に着地した後に、前記小径吐出口から吐出された小滴を着地させることで前記単位線状液膜を形成することを特徴とする請求項6または7に記載の面状液膜形成方法。
- 前記単位線状液膜形成工程において、前記複数の大滴が前記塗布対象物上で結合した際に表面に凹部ができるように前記複数の大滴を吐出し、当該凹部に前記小滴が着地するように吐出することを特徴とする請求項8に記載の面状液膜形成方法。
- 前記各大径吐出口の直径が、前記小径吐出口の直径の1.2~2倍であることを特徴とする請求項6ないし9のいずれかに記載の面状液膜形成方法。
- 前記大径吐出口が等間隔に配置されており、
隣り合う前記大径吐出口間の距離が、前記大径吐出口の直径の2~12倍であることを特徴とする請求項10に記載の面状液膜形成方法。 - 前記液体材料の粘度が、1000mPa・s以上であることを特徴とする請求項1ないし11のいずれかに記載の面状液膜形成方法。
- ジェット式吐出装置と、
前記ジェット式吐出装置と塗布対象物とを相対移動させる相対駆動装置と、
を備え、
前記ジェット式吐出装置が、
直線であるノズル配置線上に配置された複数の吐出口を有するノズルと、
前記複数の吐出口と複数の吐出流路を介して連通する液室と、
前記液室内を進退動する前記液室よりも幅狭のプランジャロッドと、
請求項1ないし12のいずれかに記載の面状液膜形成方法を実施するための塗布プログラムが記憶された制御装置と、
を備える面状液膜形成装置。 - 前記ノズルが、前記複数の吐出口を備える複数の吐出管と、前記複数の吐出管が突出するように配置された先端部を有するノズル部材と、を備えることを特徴とする請求項13に記載の面状液膜形成装置。
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EP (1) | EP4119239A4 (ja) |
JP (1) | JPWO2021182146A1 (ja) |
KR (1) | KR20220148232A (ja) |
CN (1) | CN115279504B (ja) |
BR (1) | BR112022016747A2 (ja) |
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- 2021-03-01 KR KR1020227033260A patent/KR20220148232A/ko active Search and Examination
- 2021-03-01 US US17/910,098 patent/US20230095269A1/en active Pending
- 2021-03-01 CN CN202180020274.5A patent/CN115279504B/zh active Active
- 2021-03-01 JP JP2022505922A patent/JPWO2021182146A1/ja active Pending
- 2021-03-01 EP EP21769000.7A patent/EP4119239A4/en active Pending
- 2021-03-01 MX MX2022011288A patent/MX2022011288A/es unknown
- 2021-03-01 BR BR112022016747A patent/BR112022016747A2/pt unknown
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Also Published As
Publication number | Publication date |
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CN115279504A (zh) | 2022-11-01 |
BR112022016747A2 (pt) | 2022-12-20 |
EP4119239A4 (en) | 2024-05-08 |
KR20220148232A (ko) | 2022-11-04 |
EP4119239A1 (en) | 2023-01-18 |
TW202140149A (zh) | 2021-11-01 |
MX2022011288A (es) | 2022-10-07 |
US20230095269A1 (en) | 2023-03-30 |
JPWO2021182146A1 (ja) | 2021-09-16 |
CN115279504B (zh) | 2023-12-01 |
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