WO2021182033A1 - Measurement device, program, and measurement method - Google Patents

Measurement device, program, and measurement method Download PDF

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Publication number
WO2021182033A1
WO2021182033A1 PCT/JP2021/005748 JP2021005748W WO2021182033A1 WO 2021182033 A1 WO2021182033 A1 WO 2021182033A1 JP 2021005748 W JP2021005748 W JP 2021005748W WO 2021182033 A1 WO2021182033 A1 WO 2021182033A1
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WIPO (PCT)
Prior art keywords
light
measurement
mirror
light source
unit
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PCT/JP2021/005748
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French (fr)
Japanese (ja)
Inventor
洋介 村木
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株式会社Ｘｔｉａ
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Application filed by 株式会社Ｘｔｉａ filed Critical 株式会社Ｘｔｉａ
Priority to JP2022505865A priority Critical patent/JPWO2021182033A1/ja
Publication of WO2021182033A1 publication Critical patent/WO2021182033A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • the present invention relates to a measuring device, a program, and a measuring method.
  • An optical measuring device is used to measure the inner diameter of the object to be measured having an opening in a non-contact manner.
  • Patent Document 1 in order to measure the inner diameter of an opening in a non-contact manner, a large number of measurement points are measured by the measurement head while changing the measurement head so as to straddle the direction orthogonal to the axis orthogonal to the rotation axis without a positioning guide. Is disclosed as one data group, and an apparatus for measuring the inner diameter based on the minimum value of each data group is disclosed.
  • the present invention has been made in view of such circumstances, and an object of the present invention is to provide a measuring device capable of measuring an object to be measured with higher accuracy.
  • a measuring device includes a first light source, a mirror, a light detecting unit, a displacement detecting unit, and a measuring unit.
  • the first light source is configured to output measurement light.
  • the mirror is configured to rotate about an axis of rotation towards the first light source.
  • the measurement light is reflected so as to face a desired direction, and the measurement surface is continuously irradiated with the measurement light.
  • the photodetector is configured to detect the specular reflection component of the light reflected on the measurement surface of the measurement light.
  • the displacement detection unit is configured to detect the displacement between the mirror and the rotation axis that occurs during rotation.
  • the measuring unit is configured to continuously calculate the distance between the mirror and one point on the measuring surface based on the specular reflection component and the displacement, thereby measuring the shape of the measuring surface.
  • the object to be measured can be measured with high accuracy.
  • FIG. It is an overall block diagram of the measuring apparatus 1.
  • FIG. It is a figure of the arranged mirror 4. It is a figure which shows the state which the shaft 5 is bent during measurement. It is a schematic diagram which shows the optical path of the measurement light and the reference light. It is a block diagram which shows the hardware composition of the measuring apparatus 1.
  • FIG. It is a block diagram which shows the hardware structure of an information processing apparatus 3. It is a functional block diagram which shows the function which the control part 33 in an information processing apparatus 3 has. It is a figure which looked at the reference light when the shaft 5 was not rotated from the upper surface and the side surface of the shaft 5. It is a figure which looked at the reference light at the time of rotation of a shaft 5 from the upper surface and the side surface of a shaft 5.
  • Each image data of the reference light reflected by the mirror 4 is shown. It is a figure which showed an example which irradiates the upper surface 41 of the mirror 4 with the measurement light from the 1st light source 21 which concerns on embodiment, and measures the length L. It is an activity diagram of the method of calculating the deflection angle ⁇ of the shaft 5 which concerns on embodiment. It is an activity diagram of the measurement method of the distance to the measurement surface 7 which concerns on embodiment.
  • FIG. 1 is an overall configuration diagram of the measuring device 1.
  • the measuring device 1 includes a measuring unit 2, a mirror 4, a shaft 5, and a bearing 6.
  • the measuring device 1 three-dimensionally measures the measuring surface 7 along the central axis of the object to be measured in a non-contact manner.
  • the information processing device 3 is electrically connected to the measurement unit 2 so that the detection signals of the photodetector 23 and the reference light detection unit 24 can be input. Each component will be described in more detail below.
  • the measurement unit 2 includes a first light source 21, a second light source 22, a light detection unit 23, a reference light detection unit 24, a first beam splitter B1, and a second beam splitter B2.
  • the first light source 21 is configured to output the measurement light.
  • the first light source 21 is configured to irradiate the slope 42 of the mirror 4, which will be described later, with the measurement light along the direction of the rotation axis.
  • the optical axis of the measurement light output from the first light source 21 coincides with the central axis of the object to be measured.
  • the measurement light is, for example, laser light, and more preferably, the first light source 21 is an optical comb light source.
  • the second light source 22 irradiates the upper surface 41 of the mirror 4 with reference light along the direction of the rotation axis of the shaft 5.
  • the optical axis of the reference light output by the second light source 22 is separated by a distance ⁇ from the optical axis of the measurement light output by the first light source 21.
  • the light detection unit 23 includes a reference light detection unit 23a and a measurement light detection unit 23b.
  • the reference light detection unit 23a detects a part of the measurement light reflected by the reference light beam splitter B1a and extracts the reference signal data.
  • the photodetector is configured to detect a component of the measurement light reflected on the measurement surface 7 that is mirror-reflected by the mirror 4. That is, the measurement light detection unit 23b detects the specularly reflected measurement light and extracts the measurement signal data.
  • the reference light detection unit 24 detects the reference light that the reference light output by the second light source 22 is reflected by the upper surface 41 of the mirror 4.
  • the reference light is preferably visible light, but may be infrared light or ultraviolet light. That is, the reference light detection unit 24 detects the first reference reflected light G1 and the second reference reflected light G2, which will be described later.
  • the reference light detection unit 24 is, for example, an optical image sensor, and may be a CCD (Charge Couple Devices) image sensor or a CMOS (Completion Metal Semiconductor) image sensor.
  • the first beam splitter B1 has a reference light beam splitter B1a and a measurement light beam splitter B1b. Both of these are arranged in the measuring unit 2.
  • the reference light beam splitter B1a reflects a part of the light emitted from the first light source 21 toward the reference light detection unit 23a.
  • the measurement light beam splitter B1b transmits the remaining light as the measurement light, and reflects the measurement light that has entered from the reflection path toward the measurement light detection unit 23b.
  • the second beam splitter B2 is arranged in the measuring unit 2.
  • the second beam splitter B2 reflects the reference light output from the second light source 22, and transmits the reference light entering from the reflection path toward the reference light detection unit 24.
  • FIG. 2 is a view of the arranged mirror 4. As shown in FIG. 2, the mirror 4 is installed on the lower surface 51 inside the shaft 5.
  • the mirror 4 includes an upper surface 41 orthogonal to the rotation axis and a slope 42 inclined with respect to the upper surface 41.
  • the upper surface 41 reflects the reference light output from the second light source 22 perpendicularly to the lower surface 51 inside the shaft 5. That is, the upper surface 41 is provided horizontally with respect to the installation surface of the mirror 4.
  • the slope 42 reflects the measurement light substantially at right angles to the optical axis. According to such a configuration, the measurement surface 7 of the object to be measured can be continuously irradiated with the measurement light while the shaft 5 is rotating.
  • FIG. 3 is a diagram showing a state in which the shaft 5 is bent during measurement. Since the shaft 5 has the mirror 4 on the lower surface 51, the center of gravity of the shaft 5 deviates from the central axis of the shaft 5. That is, eccentricity occurs because the center of gravity and the rigid center are separated. Due to this eccentricity, centrifugal force is generated during rotation, and deflection occurs in the direction perpendicular to the rotation axis.
  • the deflection angle ⁇ is an angle formed by the tangent line of the flexed shaft 5 and the central axis of the shaft 5.
  • the tangent line of the flexed shaft 5 may be regarded as the same as the central axis of the shaft 5.
  • FIG. 4 is a schematic diagram showing the optical paths of the measurement light and the reference light.
  • FIG. 4A shows a case where there is no deflection angle ⁇
  • FIG. 4B shows a case where there is a deflection angle ⁇ .
  • the measurement light is reflected by the mirror 4 so as to be perpendicular to the central axis of the shaft 5, and travels toward the measurement surface 7.
  • the measurement light is reflected by the measurement surface 7 and travels in the opposite direction to the photodetector 23 in the incident path.
  • the reference light is reflected by the upper surface 41 of the mirror 4 and travels in the opposite direction to the reference light detection unit 24.
  • the shaft 5 rotates during measurement, a deflection angle ⁇ is generated. Since the measuring unit 2 is fixed, the optical axis coincides with the central axis of the object to be measured, but the central axis of the shaft 5 is deviated by a deflection angle ⁇ . As a result, the lower surface 51 of the shaft 5 is displaced in the horizontal direction by ⁇ from the lower surface 51 when not rotating. Ideally, the measurement light is reflected by the mirror 4 so as to be perpendicular to the optical axis and travels toward the measurement surface 7. However, when the deflection angle ⁇ is generated during the measurement, the measurement light travels in the direction in which the posture of the mirror 4 deviates from the deflection angle ⁇ . Therefore, a measurement error occurs, and it is necessary to correct the measurement distance. This will be described in detail in the displacement detection unit 332 described later.
  • the lower surface 51 is configured to be perpendicular to the axis of the shaft 5 so that the mirror 4 maintains a horizontal posture when the shaft 5 is not rotated. Further, since the mirror 4 and the lower surface 51 are joined, the mirror 4 is prevented from moving in the horizontal direction with respect to the lower surface 51 during the rotation of the shaft 5.
  • bearing 6 rotatably supports the shaft 5 with respect to the measuring unit 2.
  • one bearing 6 is shown as a cantilever at one end of the shaft 5, but a plurality of bearings 6 may be arranged. Since the load is applied in the direction perpendicular to the shaft of the shaft 5, the bearing 6 is a radial bearing and may be either a rolling bearing or a slide bearing.
  • the measurement surface 7 is an inner surface of an object to be measured having a circular opening.
  • the inner surface is a cylinder.
  • the optical axis of the first light source 21 and the central axis of the object to be measured coincide with each other before the start of measurement.
  • the measuring device 1 three-dimensionally measures the distance from the central axis of the object to be measured to the measuring surface 7.
  • FIG. 5 is a block diagram showing a hardware configuration of the measuring device 1.
  • the information processing device 3 is a component of the measuring device 1.
  • FIG. 6 is a block diagram showing a hardware configuration of the information processing device 3.
  • FIG. 7 is a functional block diagram showing a function carried out by the control unit 33 in the information processing device 3.
  • the information processing device 3 has a communication unit 31, a storage unit 32, and a control unit 33 (acquisition unit 331, displacement detection unit 332, measurement unit 333, result storage unit 334, and display control unit 335).
  • the components are electrically connected inside the information processing device 3 via the communication bus 30.
  • each component will be further described.
  • the communication unit 31 performs wireless LAN network communication, mobile communication such as LTE / 3G, Bluetooth (registered trademark) communication, and the like as necessary. May be included. That is, it is more preferable to carry out as a set of these plurality of communication means.
  • the first light source 21, the second light source 22, the light detection unit 23, and the reference light detection unit 24 are configured to be communicable according to a predetermined communication standard.
  • the communication unit 31 is configured to receive the data detected by the light detection unit 23 and the reference light detection unit 24. Further, the communication unit 31 is configured to be able to transmit information for the first light source 21 and the second light source 22 to output light. With such a configuration, the measuring device 1 can control the distance from the central axis of the object to be measured to the measuring surface 7 in three dimensions.
  • the storage unit 32 stores various information defined by the above description. This is, for example, as a storage device such as a solid state drive (SSD), or a random access memory (Random Access Memory:) that stores temporarily necessary information (arguments, arrays, etc.) related to program operations. It can be implemented as a memory such as RAM). Moreover, these combinations may be used.
  • the storage unit 32 stores the data detected by the light detection unit 23 and the reference light detection unit 24. Further, the storage unit 32 stores the acquisition program, the displacement detection program, the measurement program, the result storage program, and the display control program. In addition to this, the storage unit 32 stores various programs related to the information processing device 3 executed by the control unit 33.
  • Control unit 33 The control unit 33 processes and controls the entire operation related to the information processing device 3.
  • the control unit 33 is, for example, a central processing unit (CPU) (not shown).
  • the control unit 33 realizes various functions related to the information processing device 3 by reading a predetermined program stored in the storage unit 32. Specifically, the acquisition function, the displacement detection function, the measurement function, the result storage function, and the display control function are applicable. That is, the information processing by the software (stored in the storage unit 32) is concretely realized by the hardware (control unit 33), so that the acquisition unit 331, the displacement detection unit 332, the measurement unit 333, and the result storage unit are realized. It can be executed as 334 and display control unit 335. Although it is described as a single control unit 33 in FIG.
  • control unit 33 it is not actually limited to this, and it may be implemented so as to have a plurality of control units 33 for each function. Moreover, it may be a combination thereof.
  • the acquisition unit 331, the displacement detection unit 332, the measurement unit 333, the result storage unit 334, and the display control unit 335 will be described in more detail.
  • the acquisition unit 331 In the acquisition unit 331, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33).
  • the acquisition unit 331 is configured to acquire the data detected by the light detection unit 23 and the reference light detection unit 24 via the communication unit 31.
  • the displacement detection unit 332 is configured to detect the displacement between the mirror 4 and the rotation shaft that occurs when the shaft 5 rotates. Specifically, the displacement detection unit 332 is configured to calculate the displacement based on the first reference reflected light G1 and the second reference reflected light G2. That is, the displacement detection unit 332 detects the amount of deflection during rotation of the shaft 5 based on the reference signal data and the measurement signal data acquired by the acquisition unit 331. In other words, the deflection angle ⁇ is calculated using the L (the sum of the length of the shaft 5 and the distance from the shaft 5 to the reference light detection unit 24 (see FIG. 3)) and the amount of deflection stored in the storage unit 32. do.
  • L the sum of the length of the shaft 5 and the distance from the shaft 5 to the reference light detection unit 24 (see FIG. 3)
  • the first reference reflected light G1 is the one in which the reference light is reflected by the mirror 4 in the state where there is no displacement. Since the upper surface 41 of the mirror 4 is perpendicular to the rotation axis, the reference light is reflected in the same path as the incident path. Therefore, the reference light detection unit 24 detects the reflected first reference reflected light G1 at the incident position.
  • FIG. 9 is a view of the reference light during rotation of the shaft 5 as viewed from the upper surface and the side surface of the shaft 5.
  • the central axis of the shaft 5 deviates from the central axis of the object to be measured and the optical axis of the measurement light by the deflection angle ⁇ . Therefore, the upper surface 41 of the mirror 4 is also displaced by the deflection angle ⁇ . Therefore, the reference light is also reflected by a path different from the incident path by ⁇ .
  • the second reference reflected light G2 is the one in which the reference light is reflected by the mirror 4 in a state where there is a displacement. Therefore, the reference light detection unit 24 detects the reflected second reference reflected light G2 at a position deviated from the first reference reflected light G1.
  • FIG. 10 shows each image data of the reference light reflected by the mirror 4.
  • FIG. 10A is image data of the first reference reflected light G1.
  • FIG. 10B is image data of the second reference reflected light G2.
  • the reference light detection unit 24 detects the first reference reflected light G1 at the same position as the reflection position.
  • the mirror 4 tilts by the bending angle ⁇ . Therefore, the reference light detection unit 24 detects the second reference reflected light G2 at a position deviated from the first reference reflected light G1 by the amount of deflection.
  • the reference light detection unit 24 detects only the locus of the reference light reflected by the upper surface 41 of the mirror 4.
  • the second reference reflected light G2 draws a locus around the first reference reflected light G1 within an angle of ⁇ a.
  • the locus is the radius of r from the center of the first reference reflected light G1.
  • ⁇ a is determined by the shape of the mirror 4, the mounting position, and the distance from the optical axis of the measurement light.
  • the displacement detection unit 332 calculates the radius r of the locus which is the displacement based on the first reference reflected light G1 and the second reference reflected light G2, the length L (the length of the shaft 5 and the reference light detection from the shaft 5).
  • the deflection angle ⁇ can be calculated from the relationship between the distance to the portion 24 and the sum (see FIG. 3).
  • the reference light detection unit 24 is a CCD camera
  • the distance per pixel is stored in the storage unit 32 in advance when calculating r.
  • the displacement detection unit 332 calculates r from the number of pixels from the center of the first reference reflected light G1 to the locus of the second reference reflected light G2 and the distance per pixel.
  • the deflection angle ⁇ can be obtained by the following equation. If this radius r is regarded as the amount of deflection of the shaft 5, the following equation 1 is obtained.
  • the deflection angle ⁇ is stored in the storage unit 32 after calculation.
  • the measurement unit 333 continuously calculates the distance between the mirror 4 and one point on the measurement surface 7 based on the measurement light reflected from the slope 42 of the mirror 4 and the displacement obtained from the deflection angle ⁇ , and measures the distance accordingly. It is configured to measure the shape of the surface 7. That is, the measuring unit 333 measures from the center of the object to be measured based on the deflection angle ⁇ calculated from the data detected by the reference light detecting unit 24 and the distance from the first light source 21 to the slope 42 of the mirror 4. Calculate the true distance R to surface 7.
  • the measuring unit 333 measures the true distance R by correcting the distance R'to the measuring surface 7 measured by the photodetecting unit 23 by using the deflection angle ⁇ .
  • the measurement light As shown in FIGS. 3 and 4B, when the mirror 4 is tilted by ⁇ due to the deflection of the shaft 5, the measurement light also shifts by ⁇ and advances to the measurement surface 7. A part of the scattered light reflected by the measurement surface 7 travels to the photodetector 23 along the same path as the incident path. Therefore, the relationship between the true distance R and the distance R'when having the deflection angle ⁇ is the following equation 2. Since the deflection angle ⁇ has already been calculated, R is calculated from this equation.
  • the measuring unit 333 irradiates the first light source 21 with light.
  • the measurement unit 333 measures the round-trip time ⁇ of the light from the reference signal data detected by the reference light detection unit 23a and the measurement signal data detected by the measurement light detection unit 23b.
  • the distance D to the measurement surface 7 of the object to be measured can be obtained as shown in Equation 3.
  • n is the average refractive index of the optical path
  • c is the speed of light in vacuum.
  • the measurement unit 333 calculates the distance R'from the central axis of the object to be measured to the measurement surface 7 excluding the distance from the first beam splitter B1 to the mirror 4 from the distance D. Further, the measuring unit 333 corrects the distance R'by Equation 2 using the deflection angle ⁇ to calculate the true distance R.
  • FIG. 11 is a diagram showing an example in which the upper surface 41 of the mirror 4 is irradiated with the measurement light from the first light source 21 according to the embodiment to measure the length L.
  • the measurement unit 2 is divided into an upper measurement unit 2a and a lower measurement unit 2b, and the central axis of the upper measurement unit 2a provided with the first light source 21 is a distance ⁇ with respect to the central axis of the shaft 5.
  • the first light source 21 is arranged on the upper surface 41.
  • the first light source 21 may be configured to be able to irradiate the upper surface 41 of the mirror 4 with the measurement light along the direction of the rotation axis.
  • the measurement unit 333 makes a point on the first light source 21 and the upper surface 41 based on the reflection component on the upper surface 41. Measure the distance continuously.
  • the length L measured directly by irradiating the measurement light from the first light source 21 to the upper surface 41 of the mirror 4 in the shaft 5 is larger than the length L calculated based on the design data of the shaft 5. High accuracy. Therefore, the measurement unit 2 can measure the shape of the measurement surface 7 with higher accuracy.
  • the distance for moving the central axis of the upper measurement unit 2a including the first light source 21 with respect to the central axis of the shaft 5 is determined. Not limited.
  • the measurement unit 2 is divided into an upper measurement unit 2a and a lower measurement unit 2b.
  • the upper measurement unit 2a includes a first light source 21, a second light source 22, a light detection unit 23, and a first beam splitter B1
  • the lower measurement unit 2b includes a bearing 6. That is, the central axis of the lower measurement unit 2b is arranged coaxially with the central axis of the shaft 5 fitted to the bearing 6.
  • a moving unit 9 is attached between the upper measurement unit 2a and the lower measurement unit 2b. As a result, the upper measurement unit 2a can be moved in a plane relative to the lower measurement unit 2b.
  • the moving portion 9 includes an upper surface moving portion 91 and a lower surface moving portion 92.
  • the upper surface moving portion 91 is configured to be movable relative to the lower surface moving portion 92.
  • the upper measurement unit 2a attached to the upper surface of the upper surface moving portion 91 can move in a plane relative to the lower measuring unit 2b attached to the lower surface of the lower surface moving portion 92.
  • the moving portion 9 may be an XY stage including a stage opening 93.
  • the XY stage is provided with a movement mechanism such as a feed screw, a rack and pinion, etc. on the X-axis and the Y-axis, whereby the upper measurement unit 2a attached to the upper surface of the XY stage is attached to the lower surface of the XY stage. It is moved in a plane relative to the lower measurement unit 2b.
  • the first light source 21 provided in the upper measurement unit 2a irradiates the upper surface 41 of the mirror 4 with the measurement light through the stage opening 93.
  • the moving unit 9 may be a feed screw individually attached to the first light source 21 and the first beam splitter B1. By moving the individual components without dividing the measurement unit 2, the first light source 21 can irradiate the upper surface 41 of the mirror 4 with the measurement light.
  • the structure is not limited as long as the first light source 21 can irradiate the upper surface 41 of the mirror 4 with the measurement light.
  • result storage unit 3334 In the result storage unit 334, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33).
  • the result storage unit 334 stores data related to measurement such as the true distance R from the central axis of the object to be measured to the measurement surface 7, the deflection angle ⁇ used for correcting the measurement distance, or the rotation speed of the shaft 5. It is stored in the storage unit 32.
  • Display control unit 335 In the display control unit 335, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33).
  • the display control unit 335 determines the true distance R from the central axis of the object to be measured to the measurement surface 7, the deflection angle ⁇ used to correct the measurement distance, the rotation speed of the shaft 5, etc. during or after the inspection.
  • the data related to the measurement of the above is displayed on the display device 8. Since these data display the measurement status at the production site in real time, they are useful for quickly grasping and identifying the problem of the measurement surface 7 of the object to be measured, and for quick countermeasures and the like.
  • Measurement Method Section 2 describes a measurement method using the measurement device 1 described in Section 1.
  • the measurement method includes a measurement light output step, a light detection step, a displacement detection step, and a measurement step.
  • the measurement light output step the measurement light is output from the first light source 21 and reflected by the mirror 4 so as to face a desired direction. This is continuously irradiated on the measurement surface 7.
  • the mirror 4 is configured to rotate about a rotation axis toward the first light source 21.
  • the specular reflection component of the light reflected on the measurement surface 7 of the measurement light is detected.
  • the displacement detection step the displacement between the mirror 4 and the rotation axis that occurs during rotation is detected.
  • the distance between the mirror 4 and one point on the measurement surface 7 is continuously calculated based on the specular reflection component and the displacement. As a result, the shape of the measuring surface 7 is measured. Specifically, this measurement method will be described in two parts.
  • FIG. 12 is an activity diagram of a method for calculating the deflection angle ⁇ of the shaft 5 according to the embodiment. Hereinafter, description will be given with reference to this figure.
  • the user adjusts the shaft 5 so that the reference light is applied to the upper surface 41 of the mirror 4.
  • the first light source 21 outputs the reference light toward the upper surface 41 of the mirror 4.
  • the reference light detection unit 24 detects the reflected light of the reference light. When the reference light detection unit 24 is a CCD camera, the reference light detection unit 24 captures the first reference reflected light G1 and the second reference reflected light G2 which are reflected lights.
  • the user confirms whether the shaft 5 is not rotating or is rotating.
  • the user rotates the shaft 5 when the shaft 5 is not rotated.
  • the acquisition unit 331 acquires images obtained by capturing the first reference reflected light G1 and the second reference reflected light G2.
  • the result storage unit 334 stores images obtained by capturing the first reference reflected light G1 and the second reference reflected light G2.
  • the displacement detection unit 332 obtains the number of pixels from the center point of the first reference reflected light G1 to the position of the second reference reflected light G2 in the captured image, and calculates the amount of deflection r from the number of pixels. Further, the displacement detection unit 332 determines the deflection angle ⁇ based on the length L (the sum of the length of the shaft 5 and the distance from the shaft 5 to the reference light detection unit 24 (see FIG.
  • the result storage unit 334 stores the calculated deflection angle ⁇ in the storage unit 32.
  • the information processing device 3 completes the calculation of the deflection angle ⁇ .
  • the user stops the rotation of the shaft 5.
  • the user stops the output of the second light source 22.
  • FIG. 13 is an activity diagram of a method for measuring the distance to the measurement surface 7 according to the embodiment.
  • the user activates the measuring device 1.
  • the shaft 5 rotates.
  • the rotation speed is the same as the rotation speed of the shaft 5 when the deflection angle ⁇ is calculated in advance.
  • the first light source 21 irradiates the slope 42 of the mirror 4 with the measurement light.
  • the reference light detection unit 23a detects a part of the measurement light reflected by the reference light beam splitter B1a as the reference light.
  • the measurement light detection unit 23b detects the measurement light reflected by the measurement light beam splitter B1b.
  • the first light source 21 stops the output of the measurement light.
  • the acquisition unit 331 acquires the reference signal data and the measurement signal data.
  • the measurement unit 333 reads the deflection angle ⁇ stored in the storage unit 32.
  • the measurement unit 333 calculates the round-trip time ⁇ of the measurement light from the reference signal data and the measurement signal data, and measures the distance R'from the central axis of the object to be measured to the measurement surface 7.
  • the measuring unit 333 corrects the measured distance using the deflection angle ⁇ , and calculates the true distance R.
  • the result storage unit 334 stores the measured three-dimensional data including the true distance R in the storage unit 32.
  • the information processing device 3 confirms whether the reference signal data and the measurement signal data have been input.
  • the measuring device 1 stops the rotation of the shaft 5.
  • Modification Example Section 3 describes a modification of the measuring device 1. That is, the above-described embodiment may be implemented according to the following aspects.
  • the reference light emitted from the second light source 22 may pass through the upper surface 41 and the lower surface 43 of the mirror 4 and be reflected by the lower surface 51 of the shaft 5.
  • the lower end of the shaft 5 may be a mirror surface, the second light source 22 and the reference light detection unit 24 may be arranged below the shaft 5, and the reference light may be output from the second light source 22 toward the lower end.
  • the shaft 5 does not have to be a cylinder.
  • the bottom surface may be a prism such as a triangle, a quadrangle, or a pentagon.
  • a camera may be arranged below in a direction perpendicular to the central axis of the shaft 5, the contours of the shaft 5 being stopped and rotating may be imaged, and the difference between the contours of both images may be defined as the amount of deflection r.
  • the measuring unit 333 measures the true distance R from the central axis of the object to be measured to the measurement surface 7, it may be corrected by the deflection angle ⁇ measured in advance, but the second light source 22 may be corrected in real time. It is also possible to irradiate the reference light from the source and detect and correct the deflection angle ⁇ .
  • a dichroic mirror capable of separating the reflection component and the transmission component depending on the wavelength band may be adopted.
  • the wavelength band of the measurement light output by the first light source 21 becomes the reflection component
  • the wavelength band of the reference light output by the second light source 22 becomes the transmission component.
  • the distance measurement is not limited to the above-mentioned method, and an optical modulation method, a matching method, an optical comb interference measurement method, or the like may be appropriately adopted.
  • the user may manually adjust the position of the mirror 4, but the position of the mirror 4 may be adjusted by automatically detecting the first reference reflected light G1 by the measuring device 1.
  • a program may be provided that causes a computer to execute the above-mentioned measurement method. This program may be pre-installed, may be installed after the fact, such a program may be stored in an external storage medium, or may be operated by cloud computing.
  • the mirror includes an upper surface orthogonal to the rotation axis and a slope inclined with respect to the upper surface, and the first light source measures the slope along the rotation axis direction.
  • a device that is configured to irradiate light further includes a second light source, and the second light source is configured to irradiate the upper surface with reference light along the direction of the rotation axis.
  • the first light source is configured to be able to irradiate the measuring light on the upper surface of the mirror along the direction of the rotation axis, and the measuring unit is a reflection component on the upper surface. Based on this, the distance between the first light source and one point on the upper surface is continuously measured.
  • the mirror is a dichroic mirror capable of separating a reflected component and a transmitted component by a wavelength band, the wavelength band of the measured light serves as the reflected component, a second light source is further provided, and the second light source is provided.
  • the wavelength band of the reference light output by is the transmission component.
  • the displacement detecting unit is configured to calculate the displacement based on the first reference reflected light and the second reference reflected light, and here, the first reference reflected light is in a state where there is no such displacement.
  • the reference light is reflected by the mirror, and the second reference reflected light is the reference light reflected by the mirror in a state of having the displacement.
  • the measuring device further includes a shaft, the shaft is hollow, the measurement light and the reference light are passed from one end of the shaft, and the mirror is provided on the inner lower surface thereof.
  • the reference light is visible light.
  • the first light source is an optical comb light source. It is a measurement method and includes a measurement light output step, a light detection step, a displacement detection step, and a measurement step. In the measurement light output step, measurement light is output from a first light source, and this is desired by a mirror.
  • the measurement surface is continuously irradiated with light reflected in the direction of the above, where the mirror is configured to rotate about a rotation axis toward the first light source, and in the light detection step, the measurement light is The mirror surface reflection component of the reflected light with respect to the measurement surface is detected, the displacement between the mirror and the rotation axis generated during rotation is detected in the displacement detection step, and the mirror surface reflection component is detected in the measurement step.
  • a program that causes a computer to execute the measurement method is not the case.
  • Measuring device 2 Measuring unit 2a: Upper measuring unit 2b: Lower measuring unit 21: First light source 22: Second light source 23: Light detection unit 23a: Reference light detection unit 23b: Measurement light detection unit 24: Reference light detection Unit 3: Information processing device 30: Communication bus 31: Communication unit 32: Storage unit 33: Control unit 331: Acquisition unit 332: Displacement detection unit 333: Measurement unit 334: Result storage unit 335: Display control unit 4: Mirror 41: Top surface 42: Slope 43: Bottom surface 5: Shaft 51: Bottom surface 6: Bearing 7: Measurement surface 8: Display device 9: Moving unit 91: Top surface moving unit 92: Bottom surface moving unit 93: Stage opening B1: First beam splitter B1a : Reference light beam splitter B1b: Measurement light beam splitter B2: Second beam splitter G1: First reference reflected light G2: Second reference reflected light

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

In one embodiment of this invention, a measurement device is provided. The measurement device comprises a first light source, a mirror, a photodetection unit, a displacement detection unit, and a measurement unit. The first light source outputs measurement light. The mirror rotates around a rotation axis oriented toward the first light source. The measurement light is reflected so as to be oriented in a desired direction and is continuously emitted onto a measurement surface. The photodetection unit detects the specularly reflected component of the measurement light that has been reflected by the measurement surface. The displacement detection unit detects displacement between the mirror and rotation axis that occurs during rotation. The measurement unit successively calculates distances between the mirror and single points on the measurement surface on the basis of the specularly reflected component and the displacement and measures the shape of the measurement surface accordingly.

Description

計測装置、プログラム及び計測方法Measuring equipment, programs and measuring methods
　本発明は、計測装置、プログラム及び計測方法に関する。 The present invention relates to a measuring device, a program, and a measuring method.
　開口部を有する被計測物の内径を非接触で計測するために、光計測装置が用いられている。 An optical measuring device is used to measure the inner diameter of the object to be measured having an opening in a non-contact manner.
　特許文献１には、開口部の内径を非接触に測定するために、位置決めガイドなしで、測定ヘッドを回転軸と直交する軸直交方向を跨ぐように変化させながら、測定ヘッドにより多数の測定点を一つのデータ群として、各データ群の最小値に基づいて内径を測定する装置が開示されている。 In Patent Document 1, in order to measure the inner diameter of an opening in a non-contact manner, a large number of measurement points are measured by the measurement head while changing the measurement head so as to straddle the direction orthogonal to the axis orthogonal to the rotation axis without a positioning guide. Is disclosed as one data group, and an apparatus for measuring the inner diameter based on the minimum value of each data group is disclosed.
特開２０１７－７２５４６号公報JP-A-2017-72546
　ところが、特許文献１に開示されている計測装置では、測定ヘッドの位置が、連結しているシャフトが回転することで発生するたわみによってずれた場合、正確な内径を測定することはできない。 However, in the measuring device disclosed in Patent Document 1, if the position of the measuring head is deviated due to the deflection generated by the rotation of the connected shaft, it is not possible to accurately measure the inner diameter.
　本発明は、かかる事情を鑑みてなされたものであり、被計測物をより精度良く計測可能な計測装置を提供することを目的とする。 The present invention has been made in view of such circumstances, and an object of the present invention is to provide a measuring device capable of measuring an object to be measured with higher accuracy.
　本発明の一態様によれば、計測装置が提供される。この計測装置は、第１光源と、ミラーと、光検出部と、変位検出部と、計測部とを備える。第１光源は、測定光を出力するように構成される。ミラーは、第１光源に向かう回転軸周りに回転するように構成される。測定光を、所望の方向に向くように反射させて、これを計測面に連続的に照射するように構成される。光検出部は、測定光の、計測面に対する反射光のうちの鏡面反射成分を検出するように構成される。変位検出部は、回転時に生じるミラーと回転軸との変位を検出するように構成される。計測部は、鏡面反射成分と変位とに基づいて、ミラーと計測面における一点との距離を連続的に算出し、これにより計測面の形状を計測するように構成される。 According to one aspect of the present invention, a measuring device is provided. This measuring device includes a first light source, a mirror, a light detecting unit, a displacement detecting unit, and a measuring unit. The first light source is configured to output measurement light. The mirror is configured to rotate about an axis of rotation towards the first light source. The measurement light is reflected so as to face a desired direction, and the measurement surface is continuously irradiated with the measurement light. The photodetector is configured to detect the specular reflection component of the light reflected on the measurement surface of the measurement light. The displacement detection unit is configured to detect the displacement between the mirror and the rotation axis that occurs during rotation. The measuring unit is configured to continuously calculate the distance between the mirror and one point on the measuring surface based on the specular reflection component and the displacement, thereby measuring the shape of the measuring surface.
　このような計測装置によれば、被計測物を精度良く計測することができる。 According to such a measuring device, the object to be measured can be measured with high accuracy.
計測装置１の全体構成図である。It is an overall block diagram of the measuring apparatus 1. FIG. 配置されたミラー４の図である。It is a figure of the arranged mirror 4. 計測中にシャフト５がたわんでいる状態を示す図である。It is a figure which shows the state which the shaft 5 is bent during measurement. 測定光と基準光の光路を示す概要図である。It is a schematic diagram which shows the optical path of the measurement light and the reference light. 計測装置１のハードウェア構成を示すブロック図である。It is a block diagram which shows the hardware composition of the measuring apparatus 1. FIG. 情報処理装置３のハードウェア構成を示すブロック図である。It is a block diagram which shows the hardware structure of an information processing apparatus 3. 情報処理装置３における制御部３３が担う機能を示す機能ブロック図である。It is a functional block diagram which shows the function which the control part 33 in an information processing apparatus 3 has. シャフト５が未回転時の基準光をシャフト５の上面と側面から見た図である。It is a figure which looked at the reference light when the shaft 5 was not rotated from the upper surface and the side surface of the shaft 5. シャフト５の回転時の基準光をシャフト５の上面と側面から見た図である。It is a figure which looked at the reference light at the time of rotation of a shaft 5 from the upper surface and the side surface of a shaft 5. ミラー４で反射した基準光の各画像データを示している。Each image data of the reference light reflected by the mirror 4 is shown. 実施形態に係る第１光源２１から測定光をミラー４の上面４１に照射して長さＬを測定する一例を表した図である。It is a figure which showed an example which irradiates the upper surface 41 of the mirror 4 with the measurement light from the 1st light source 21 which concerns on embodiment, and measures the length L. 実施形態に係るシャフト５のたわみ角θを算出する方法のアクティビティ図である。It is an activity diagram of the method of calculating the deflection angle θ of the shaft 5 which concerns on embodiment. 実施形態に係る計測面７までの距離の計測方法のアクティビティ図である。It is an activity diagram of the measurement method of the distance to the measurement surface 7 which concerns on embodiment.
　以下、図面を用いて本発明の実施形態について説明する。以下に示す実施形態中で示した各特徴事項は、互いに組み合わせ可能である。また、各特徴事項について独立して発明が成立する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. The features shown in the embodiments shown below can be combined with each other. In addition, the invention is independently established for each feature.
１．全体構成
１．１　計測装置１
　第１節では、本実施形態に係る計測装置について説明する。図１は、計測装置１の全体構成図である。 1. 1. Overall configuration 1.1 Measuring device 1
Section 1 describes the measuring device according to the present embodiment. FIG. 1 is an overall configuration diagram of the measuring device 1.
　図１に示されるように、計測装置１は、計測ユニット２と、ミラー４と、シャフト５と、軸受６とを備える。計測装置１は、被計測物の中心軸に沿って計測面７を非接触で三次元計測する。情報処理装置３は、光検出部２３及び基準光検出部２４の検出信号を入力可能に計測ユニット２に電気的に接続されている。以下各構成要素についてさらに詳述する。 As shown in FIG. 1, the measuring device 1 includes a measuring unit 2, a mirror 4, a shaft 5, and a bearing 6. The measuring device 1 three-dimensionally measures the measuring surface 7 along the central axis of the object to be measured in a non-contact manner. The information processing device 3 is electrically connected to the measurement unit 2 so that the detection signals of the photodetector 23 and the reference light detection unit 24 can be input. Each component will be described in more detail below.
１．２　計測ユニット２
　計測ユニット２は、第１光源２１と、第２光源２２と、光検出部２３と、基準光検出部２４と、第１ビームスプリッタＢ１と、第２ビームスプリッタＢ２とを有する。 1.2 Measuring unit 2
The measurement unit 2 includes a first light source 21, a second light source 22, a light detection unit 23, a reference light detection unit 24, a first beam splitter B1, and a second beam splitter B2.
（第１光源２１）
　第１光源２１は、測定光を出力するように構成される。特に、第１光源２１は、回転軸方向に沿って後述のミラー４における斜面４２に測定光を照射するよう構成される。第１光源２１から出力する測定光の光軸は、被計測体の中心軸と一致する。ここで測定光は、例えば、レーザー光であり、さらに好ましくは、第１光源２１は、光コム光源である。 (First light source 21)
The first light source 21 is configured to output the measurement light. In particular, the first light source 21 is configured to irradiate the slope 42 of the mirror 4, which will be described later, with the measurement light along the direction of the rotation axis. The optical axis of the measurement light output from the first light source 21 coincides with the central axis of the object to be measured. Here, the measurement light is, for example, laser light, and more preferably, the first light source 21 is an optical comb light source.
（第２光源２２）
　第２光源２２は、シャフト５の回転軸方向に沿ってミラー４の上面４１に基準光を照射する。第２光源２２が出力する基準光の光軸は、第１光源２１が出力する測定光の光軸に対して距離δ離間している。 (Second light source 22)
The second light source 22 irradiates the upper surface 41 of the mirror 4 with reference light along the direction of the rotation axis of the shaft 5. The optical axis of the reference light output by the second light source 22 is separated by a distance δ from the optical axis of the measurement light output by the first light source 21.
（光検出部２３）
　光検出部２３は、参照光検出部２３ａと、測定光検出部２３ｂとを有する。参照光検出部２３ａは、参照光ビームスプリッタＢ１ａで反射した測定光の一部を検出して、参照信号データを抽出する。光検出部は、測定光の、計測面７に対する反射光のうちの、ミラー４で鏡面反射した成分を検出するように構成される。即ち、測定光検出部２３ｂは、鏡面反射した測定光を検出して、測定信号データを抽出する。 (Light detection unit 23)
The light detection unit 23 includes a reference light detection unit 23a and a measurement light detection unit 23b. The reference light detection unit 23a detects a part of the measurement light reflected by the reference light beam splitter B1a and extracts the reference signal data. The photodetector is configured to detect a component of the measurement light reflected on the measurement surface 7 that is mirror-reflected by the mirror 4. That is, the measurement light detection unit 23b detects the specularly reflected measurement light and extracts the measurement signal data.
（基準光検出部２４）
　基準光検出部２４は、第２光源２２が出力した基準光がミラー４の上面４１で反射した基準光を検出する。基準光は、好ましくは可視光であるが、赤外光、又は紫外光であってもよい。即ち、基準光検出部２４は、後述する第１基準反射光Ｇ１及び第２基準反射光Ｇ２を検出する。基準光検出部２４は、例えば、光撮像素子であり、ＣＣＤ（Ｃｈａｒｇｅ　Ｃｏｕｐｌｅ　Ｄｅｖｉｃｅｓ）イメージセンサーでもＣＭＯＳ（Ｃｏｍｐｌｅｔｅｌｙ　Ｍｅｔａｌ　Ｏｘｉｄｅ　Ｓｅｍｉｃｏｎｄｕｃｔｏｒ）イメージセンサーであってもよい。 (Reference light detection unit 24)
The reference light detection unit 24 detects the reference light that the reference light output by the second light source 22 is reflected by the upper surface 41 of the mirror 4. The reference light is preferably visible light, but may be infrared light or ultraviolet light. That is, the reference light detection unit 24 detects the first reference reflected light G1 and the second reference reflected light G2, which will be described later. The reference light detection unit 24 is, for example, an optical image sensor, and may be a CCD (Charge Couple Devices) image sensor or a CMOS (Completion Metal Semiconductor) image sensor.
（第１ビームスプリッタＢ１）
　第１ビームスプリッタＢ１は、参照光ビームスプリッタＢ１ａと測定光ビームスプリッタＢ１ｂとを有する。これらは、両者とも計測ユニット２内に配置される。参照光ビームスプリッタＢ１ａは、第１光源２１から照射した光の一部を参照光検出部２３ａに向けて反射させる。測定光ビームスプリッタＢ１ｂは、残りの光を測定光として透過させ、反射経路から進入した測定光を測定光検出部２３ｂに向けて反射させる。 (1st beam splitter B1)
The first beam splitter B1 has a reference light beam splitter B1a and a measurement light beam splitter B1b. Both of these are arranged in the measuring unit 2. The reference light beam splitter B1a reflects a part of the light emitted from the first light source 21 toward the reference light detection unit 23a. The measurement light beam splitter B1b transmits the remaining light as the measurement light, and reflects the measurement light that has entered from the reflection path toward the measurement light detection unit 23b.
（第２ビームスプリッタＢ２）
　第２ビームスプリッタＢ２は、計測ユニット２内に配置される。第２ビームスプリッタＢ２は、第２光源２２から出力された基準光を反射させ、反射経路から進入した基準光を基準光検出部２４に向けて透過させる。 (2nd beam splitter B2)
The second beam splitter B2 is arranged in the measuring unit 2. The second beam splitter B2 reflects the reference light output from the second light source 22, and transmits the reference light entering from the reflection path toward the reference light detection unit 24.
１．３　ミラー４
　ミラー４は、第１光源２１に向かう回転軸周りに回転するように構成される。また、ミラー４は、測定光を、所望の方向に向くように反射させる。図２は、配置されたミラー４の図である。図２に示されるように、ミラー４は、シャフト５の内部の下面５１に設置されている。ミラー４は、回転軸に対して直交する上面４１と、上面４１に対して傾斜する斜面４２とを備える。 1.3 Mirror 4
The mirror 4 is configured to rotate about a rotation axis toward the first light source 21. Further, the mirror 4 reflects the measurement light so as to face a desired direction. FIG. 2 is a view of the arranged mirror 4. As shown in FIG. 2, the mirror 4 is installed on the lower surface 51 inside the shaft 5. The mirror 4 includes an upper surface 41 orthogonal to the rotation axis and a slope 42 inclined with respect to the upper surface 41.
　上面４１は、第２光源２２から出力された基準光をシャフト５の内部の下面５１に対して垂直に反射させる。即ち上面４１は、ミラー４の設置面に対して水平に設けられている。斜面４２は、第１光源２１から照射されたら測定光を光軸に対して略直角に反射させる。このような構成によれば、シャフト５が回転中に、測定光を被計測体の計測面７に連続的に照射することができる。 The upper surface 41 reflects the reference light output from the second light source 22 perpendicularly to the lower surface 51 inside the shaft 5. That is, the upper surface 41 is provided horizontally with respect to the installation surface of the mirror 4. When the slope 42 is irradiated from the first light source 21, the slope 42 reflects the measurement light substantially at right angles to the optical axis. According to such a configuration, the measurement surface 7 of the object to be measured can be continuously irradiated with the measurement light while the shaft 5 is rotating.
１．４　シャフト５
　シャフト５は、中空であり、シャフト５の一端から測定光及び基準光を通過させる。また、シャフト５は、その内部の下面５１にミラー４を有するように構成される。シャフト５は、高速スピンドルモータ（不図示）によって回転可能に構成される。図３は、計測中にシャフト５がたわんでいる状態を示す図である。シャフト５は、下面５１にミラー４を有するため、シャフト５の重心が、シャフト５の中心軸よりもずれる。即ち重心と剛心が離れるため偏心が生ずる。この偏心により回転中に遠心力が発生し、回転軸に対して直角方向にたわみが生じる。たわみ角θは、たわんだシャフト５の接線とシャフト５の中心軸がなす角度である。ここで、たわみ角θは僅かであるため、図３に記すように、たわんだシャフト５の接線は、シャフト５の中心軸と同一とみなしてもよい。 1.4 Shaft 5
The shaft 5 is hollow, and the measurement light and the reference light are passed from one end of the shaft 5. Further, the shaft 5 is configured to have a mirror 4 on the lower surface 51 inside the shaft 5. The shaft 5 is rotatably configured by a high-speed spindle motor (not shown). FIG. 3 is a diagram showing a state in which the shaft 5 is bent during measurement. Since the shaft 5 has the mirror 4 on the lower surface 51, the center of gravity of the shaft 5 deviates from the central axis of the shaft 5. That is, eccentricity occurs because the center of gravity and the rigid center are separated. Due to this eccentricity, centrifugal force is generated during rotation, and deflection occurs in the direction perpendicular to the rotation axis. The deflection angle θ is an angle formed by the tangent line of the flexed shaft 5 and the central axis of the shaft 5. Here, since the deflection angle θ is small, as shown in FIG. 3, the tangent line of the flexed shaft 5 may be regarded as the same as the central axis of the shaft 5.
　図４は、測定光と基準光の光路を示す概要図である。特に図４Ａはたわみ角θがないとき、図４Ｂはたわみ角θがあるときを示している。たわみ角θがないときは、測定光は、シャフト５の中心軸に対して直角になるようにミラー４で反射し、計測面７に向かって進行する。測定光は、計測面７で反射し、光検出部２３まで入射経路を逆に進行する。同様に、基準光はミラー４の上面４１で反射し、基準光検出部２４まで入射経路を逆に進行する。 FIG. 4 is a schematic diagram showing the optical paths of the measurement light and the reference light. In particular, FIG. 4A shows a case where there is no deflection angle θ, and FIG. 4B shows a case where there is a deflection angle θ. When there is no deflection angle θ, the measurement light is reflected by the mirror 4 so as to be perpendicular to the central axis of the shaft 5, and travels toward the measurement surface 7. The measurement light is reflected by the measurement surface 7 and travels in the opposite direction to the photodetector 23 in the incident path. Similarly, the reference light is reflected by the upper surface 41 of the mirror 4 and travels in the opposite direction to the reference light detection unit 24.
　計測中にシャフト５が回転するため、たわみ角θが生じる。計測ユニット２は固定されているため、光軸と被計測物の中心軸とは一致するが、シャフト５の中心軸がたわみ角θ分だけずれることになる。その結果、シャフト５の下面５１が、非回転時の下面５１よりθだけ水平方向にずれる。理想的には、測定光は、光軸に対して直角になるようにミラー４で反射し、計測面７に向かって進行する。しかし、計測中にたわみ角θが生じた場合、測定光は、ミラー４の姿勢がたわみ角θずれた方向に進行することになる。したがって計測誤差が生じるため、計測距離を補正する必要がある。これについては、後述する変位検出部３３２で詳しく説明する。 Since the shaft 5 rotates during measurement, a deflection angle θ is generated. Since the measuring unit 2 is fixed, the optical axis coincides with the central axis of the object to be measured, but the central axis of the shaft 5 is deviated by a deflection angle θ. As a result, the lower surface 51 of the shaft 5 is displaced in the horizontal direction by θ from the lower surface 51 when not rotating. Ideally, the measurement light is reflected by the mirror 4 so as to be perpendicular to the optical axis and travels toward the measurement surface 7. However, when the deflection angle θ is generated during the measurement, the measurement light travels in the direction in which the posture of the mirror 4 deviates from the deflection angle θ. Therefore, a measurement error occurs, and it is necessary to correct the measurement distance. This will be described in detail in the displacement detection unit 332 described later.
　シャフト５の非回転時にミラー４が水平な姿勢を維持するように、下面５１がシャフト５の軸に対して直角になるように構成されている。また、ミラー４と下面５１とは接合されているため、シャフト５の回転中にミラー４が下面５１に対して水平方向に移動することが防止される。 The lower surface 51 is configured to be perpendicular to the axis of the shaft 5 so that the mirror 4 maintains a horizontal posture when the shaft 5 is not rotated. Further, since the mirror 4 and the lower surface 51 are joined, the mirror 4 is prevented from moving in the horizontal direction with respect to the lower surface 51 during the rotation of the shaft 5.
１．５　軸受６
　軸受６は、計測ユニット２に対してシャフト５を回転可能に軸支する。図１及び図３では、軸受６がシャフト５の一端に片持ち梁として１つ示されているが、これを複数配置してもよい。シャフト５の軸に対して垂直方向に荷重がかかるため、軸受６はラジアル軸受であって、転がり軸受又は滑り軸受のどちらでもよい。 1.5 Bearing 6
The bearing 6 rotatably supports the shaft 5 with respect to the measuring unit 2. In FIGS. 1 and 3, one bearing 6 is shown as a cantilever at one end of the shaft 5, but a plurality of bearings 6 may be arranged. Since the load is applied in the direction perpendicular to the shaft of the shaft 5, the bearing 6 is a radial bearing and may be either a rolling bearing or a slide bearing.
１．６　計測面７
　計測面７は、円形開口部を有する被計測物の内面である。内面は円筒である。第１光源２１の光軸と被計測物の中心軸は、測定開始前は一致している。計測装置１は、被計測物の中心軸から計測面７までの距離を三次元計測する。 1.6 Measuring surface 7
The measurement surface 7 is an inner surface of an object to be measured having a circular opening. The inner surface is a cylinder. The optical axis of the first light source 21 and the central axis of the object to be measured coincide with each other before the start of measurement. The measuring device 1 three-dimensionally measures the distance from the central axis of the object to be measured to the measuring surface 7.
１．７　情報処理装置３
　図５は、計測装置１のハードウェア構成を示すブロック図である。情報処理装置３は、計測装置１の構成要素である。図６は、情報処理装置３のハードウェア構成を示すブロック図である。図７は、情報処理装置３における制御部３３が担う機能を示す機能ブロック図である。情報処理装置３は、通信部３１と、記憶部３２と、制御部３３（取得部３３１、変位検出部３３２、計測部３３３、結果保存部３３４及び表示制御部３３５）とを有し、これらの構成要素が情報処理装置３の内部において通信バス３０を介して電気的に接続されている。以下、各構成要素についてさらに説明する。 1.7 Information processing device 3
FIG. 5 is a block diagram showing a hardware configuration of the measuring device 1. The information processing device 3 is a component of the measuring device 1. FIG. 6 is a block diagram showing a hardware configuration of the information processing device 3. FIG. 7 is a functional block diagram showing a function carried out by the control unit 33 in the information processing device 3. The information processing device 3 has a communication unit 31, a storage unit 32, and a control unit 33 (acquisition unit 331, displacement detection unit 332, measurement unit 333, result storage unit 334, and display control unit 335). The components are electrically connected inside the information processing device 3 via the communication bus 30. Hereinafter, each component will be further described.
（通信部３１）
　通信部３１は、ＵＳＢ、ＩＥＥＥ１３９４、Ｔｈｕｎｄｅｒｂｏｌｔ、有線ＬＡＮネットワーク通信等といった有線型の通信手段が好ましいものの、無線ＬＡＮネットワーク通信、ＬＴＥ／３Ｇ等のモバイル通信、Ｂｌｕｅｔｏｏｔｈ（登録商標）通信等を必要に応じて含めてもよい。即ち、これら複数の通信手段の集合として実施することがより好ましい。特に、第１光源２１、第２光源２２、光検出部２３及び基準光検出部２４とは、所定の通信規格において通信可能に構成されることが好ましい。 (Communication unit 31)
Although wired communication means such as USB, IEEE1394, Thunderbolt, and wired LAN network communication are preferable, the communication unit 31 performs wireless LAN network communication, mobile communication such as LTE / 3G, Bluetooth (registered trademark) communication, and the like as necessary. May be included. That is, it is more preferable to carry out as a set of these plurality of communication means. In particular, it is preferable that the first light source 21, the second light source 22, the light detection unit 23, and the reference light detection unit 24 are configured to be communicable according to a predetermined communication standard.
　通信部３１は、光検出部２３及び基準光検出部２４が検出したデータを受信するように構成される。また、通信部３１は、第１光源２１及び第２光源２２が光を出力するための情報を送信可能に構成される。このような構成により、計測装置１が被計測物の中心軸から計測面７までの距離を三次元計測する制御が可能となる。 The communication unit 31 is configured to receive the data detected by the light detection unit 23 and the reference light detection unit 24. Further, the communication unit 31 is configured to be able to transmit information for the first light source 21 and the second light source 22 to output light. With such a configuration, the measuring device 1 can control the distance from the central axis of the object to be measured to the measuring surface 7 in three dimensions.
（記憶部３２）
　記憶部３２は、前述の記載により定義される様々な情報を記憶する。これは、例えばソリッドステートドライブ（Ｓｏｌｉｄ　Ｓｔａｔｅ　Ｄｒｉｖｅ：ＳＳＤ）等のストレージデバイスとして、あるいは、プログラムの演算に係る一時的に必要な情報（引数、配列等）を記憶するランダムアクセスメモリ（Ｒａｎｄｏｍ　Ａｃｃｅｓｓ　Ｍｅｍｏｒｙ：ＲＡＭ）等のメモリとして実施されうる。また、これらの組合せであってもよい。特に、記憶部３２は、光検出部２３及び基準光検出部２４が検出したデータを記憶する。また、記憶部３２は、取得プログラム、変位検出プログラム、計測プログラム、結果保存プログラム、及び表示制御プログラムを記憶する。また、記憶部３２は、これ以外にも制御部３３によって実行される情報処理装置３に係る種々のプログラム等を記憶している。 (Memory unit 32)
The storage unit 32 stores various information defined by the above description. This is, for example, as a storage device such as a solid state drive (SSD), or a random access memory (Random Access Memory:) that stores temporarily necessary information (arguments, arrays, etc.) related to program operations. It can be implemented as a memory such as RAM). Moreover, these combinations may be used. In particular, the storage unit 32 stores the data detected by the light detection unit 23 and the reference light detection unit 24. Further, the storage unit 32 stores the acquisition program, the displacement detection program, the measurement program, the result storage program, and the display control program. In addition to this, the storage unit 32 stores various programs related to the information processing device 3 executed by the control unit 33.
（制御部３３）
　制御部３３は、情報処理装置３に関連する全体動作の処理・制御を行う。制御部３３は、例えば不図示の中央処理装置（Ｃｅｎｔｒａｌ　Ｐｒｏｃｅｓｓｉｎｇ　Ｕｎｉｔ：ＣＰＵ）である。制御部３３は、記憶部３２に記憶された所定のプログラムを読み出すことによって、情報処理装置３に係る種々の機能を実現する。具体的には取得機能、変位検出機能、計測機能、結果保存機能、及び表示制御機能が該当する。即ち、ソフトウェア（記憶部３２に記憶されている）による情報処理がハードウェア（制御部３３）によって具体的に実現されることで、取得部３３１、変位検出部３３２、計測部３３３、結果保存部３３４、及び表示制御部３３５として実行されうる。なお、図７においては、単一の制御部３３として表記されているが、実際はこれに限るものではなく、機能ごとに複数の制御部３３を有するように実施してもよい。またそれらの組合せであってもよい。以下、取得部３３１、変位検出部３３２、計測部３３３、結果保存部３３４、及び表示制御部３３５についてさらに詳述する。 (Control unit 33)
The control unit 33 processes and controls the entire operation related to the information processing device 3. The control unit 33 is, for example, a central processing unit (CPU) (not shown). The control unit 33 realizes various functions related to the information processing device 3 by reading a predetermined program stored in the storage unit 32. Specifically, the acquisition function, the displacement detection function, the measurement function, the result storage function, and the display control function are applicable. That is, the information processing by the software (stored in the storage unit 32) is concretely realized by the hardware (control unit 33), so that the acquisition unit 331, the displacement detection unit 332, the measurement unit 333, and the result storage unit are realized. It can be executed as 334 and display control unit 335. Although it is described as a single control unit 33 in FIG. 7, it is not actually limited to this, and it may be implemented so as to have a plurality of control units 33 for each function. Moreover, it may be a combination thereof. Hereinafter, the acquisition unit 331, the displacement detection unit 332, the measurement unit 333, the result storage unit 334, and the display control unit 335 will be described in more detail.
（取得部３３１）
　取得部３３１は、ソフトウェア（記憶部３２に記憶されている）による情報処理がハードウェア（制御部３３）によって具体的に実現されているものである。取得部３３１は、光検出部２３及び基準光検出部２４が検出したデータを、通信部３１を介して取得するように構成されている。 (Acquisition unit 331)
In the acquisition unit 331, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33). The acquisition unit 331 is configured to acquire the data detected by the light detection unit 23 and the reference light detection unit 24 via the communication unit 31.
（変位検出部３３２）
　変位検出部３３２は、シャフト５の回転時に生じるミラー４と回転軸との変位を検出するように構成される。具体的には、変位検出部３３２は、第１基準反射光Ｇ１及び第２基準反射光Ｇ２に基づいて変位を算出するように構成される。即ち、変位検出部３３２は、取得部３３１が取得した参照信号データと測定信号データとに基づいて、シャフト５が回転中のたわみ量を検出する。換言すると、記憶部３２に記憶されたＬ（シャフト５の長さと、シャフト５から基準光検出部２４までの距離との和（図３参照））とたわみ量とを用いてたわみ角θを算出する。図８は、シャフト５が未回転時の基準光をシャフト５の上面と側面から見た図である。このように、第１基準反射光Ｇ１は、変位がない状態で基準光がミラー４で反射したものである。ミラー４の上面４１が回転軸に対して直角であるため、基準光は入射経路と同じ経路で反射する。そのため、基準光検出部２４は、反射した第１基準反射光Ｇ１を入射した位置で検出する。 (Displacement detection unit 332)
The displacement detection unit 332 is configured to detect the displacement between the mirror 4 and the rotation shaft that occurs when the shaft 5 rotates. Specifically, the displacement detection unit 332 is configured to calculate the displacement based on the first reference reflected light G1 and the second reference reflected light G2. That is, the displacement detection unit 332 detects the amount of deflection during rotation of the shaft 5 based on the reference signal data and the measurement signal data acquired by the acquisition unit 331. In other words, the deflection angle θ is calculated using the L (the sum of the length of the shaft 5 and the distance from the shaft 5 to the reference light detection unit 24 (see FIG. 3)) and the amount of deflection stored in the storage unit 32. do. FIG. 8 is a view of the reference light when the shaft 5 is not rotating as viewed from the upper surface and the side surface of the shaft 5. As described above, the first reference reflected light G1 is the one in which the reference light is reflected by the mirror 4 in the state where there is no displacement. Since the upper surface 41 of the mirror 4 is perpendicular to the rotation axis, the reference light is reflected in the same path as the incident path. Therefore, the reference light detection unit 24 detects the reflected first reference reflected light G1 at the incident position.
　図９は、シャフト５の回転時の基準光をシャフト５の上面と側面から見た図である。シャフト５の中心軸は、たわみ角θだけ被計測物の中心軸及び測定光の光軸からずれる。そのためミラー４の上面４１もたわみ角θだけずれることになる。したがって、基準光も入射経路とθだけ異なる経路で反射する。このように、第２基準反射光Ｇ２は、変位がある状態で基準光がミラー４で反射したものである。そのため、基準光検出部２４は、反射した第２基準反射光Ｇ２を第１基準反射光Ｇ１よりずれた位置で検出する。 FIG. 9 is a view of the reference light during rotation of the shaft 5 as viewed from the upper surface and the side surface of the shaft 5. The central axis of the shaft 5 deviates from the central axis of the object to be measured and the optical axis of the measurement light by the deflection angle θ. Therefore, the upper surface 41 of the mirror 4 is also displaced by the deflection angle θ. Therefore, the reference light is also reflected by a path different from the incident path by θ. As described above, the second reference reflected light G2 is the one in which the reference light is reflected by the mirror 4 in a state where there is a displacement. Therefore, the reference light detection unit 24 detects the reflected second reference reflected light G2 at a position deviated from the first reference reflected light G1.
　基準光検出部２４がＣＣＤカメラである場合、検出データは、画像データである。図１０は、ミラー４で反射した基準光の各画像データを示している。図１０Ａは、第１基準反射光Ｇ１の画像データである。図１０Ｂは、第２基準反射光Ｇ２の画像データである。図１０Ａは、基準光がミラー４の上面４１から垂直に反射されているため、基準光検出部２４は反射位置と同じ位置で第１基準反射光Ｇ１を検出する。一方で、回転中のシャフト５はたわむため、ミラー４がたわみ角θだけ傾く。そのため、基準光検出部２４は、第１基準反射光Ｇ１から、たわみ量分ずれた位置で第２基準反射光Ｇ２を検出する。ここで、図９からも明らかなように、シャフト５が回転中、基準光はミラー４の上面４１に照射できない瞬間が存在する。そのため基準光検出部２４は、基準光がミラー４の上面４１で反射した軌跡のみを検出する。図１０Ｂに描かれているように、測定光が反射している間は、第１基準反射光Ｇ１を中心にθａの角度内で第２基準反射光Ｇ２が軌跡を描く。軌跡は第１基準反射光Ｇ１を中心からｒの半径である。θａはミラー４の形状、取付位置、測定光の光軸との距離によって決まる。 When the reference light detection unit 24 is a CCD camera, the detection data is image data. FIG. 10 shows each image data of the reference light reflected by the mirror 4. FIG. 10A is image data of the first reference reflected light G1. FIG. 10B is image data of the second reference reflected light G2. In FIG. 10A, since the reference light is vertically reflected from the upper surface 41 of the mirror 4, the reference light detection unit 24 detects the first reference reflected light G1 at the same position as the reflection position. On the other hand, since the rotating shaft 5 bends, the mirror 4 tilts by the bending angle θ. Therefore, the reference light detection unit 24 detects the second reference reflected light G2 at a position deviated from the first reference reflected light G1 by the amount of deflection. Here, as is clear from FIG. 9, there is a moment when the reference light cannot irradiate the upper surface 41 of the mirror 4 while the shaft 5 is rotating. Therefore, the reference light detection unit 24 detects only the locus of the reference light reflected by the upper surface 41 of the mirror 4. As shown in FIG. 10B, while the measurement light is reflected, the second reference reflected light G2 draws a locus around the first reference reflected light G1 within an angle of θa. The locus is the radius of r from the center of the first reference reflected light G1. θa is determined by the shape of the mirror 4, the mounting position, and the distance from the optical axis of the measurement light.
　変位検出部３３２は、第１基準反射光Ｇ１及び第２基準反射光Ｇ２に基づいて、変位である軌跡の半径ｒを算出すると、長さＬ（シャフト５の長さと、シャフト５から基準光検出部２４までの距離と、の和（図３参照））との関係でたわみ角θが算出できる。基準光検出部２４がＣＣＤカメラである場合、ｒを算出するにあたり、画素当たりの距離を予め記憶部３２に記憶する。変位検出部３３２は、第１基準反射光Ｇ１の中心から第２基準反射光Ｇ２の軌跡までの画素数と画素当たりの距離からｒを算出する。ここでたわみ角θは以下の式で求まる。この半径ｒをシャフト５のたわみ量とみなすと以下の数１となる。
Figure JPOXMLDOC01-appb-M000001
　たわみ角θは算出後に、記憶部３２に記憶される。 When the displacement detection unit 332 calculates the radius r of the locus which is the displacement based on the first reference reflected light G1 and the second reference reflected light G2, the length L (the length of the shaft 5 and the reference light detection from the shaft 5). The deflection angle θ can be calculated from the relationship between the distance to the portion 24 and the sum (see FIG. 3). When the reference light detection unit 24 is a CCD camera, the distance per pixel is stored in the storage unit 32 in advance when calculating r. The displacement detection unit 332 calculates r from the number of pixels from the center of the first reference reflected light G1 to the locus of the second reference reflected light G2 and the distance per pixel. Here, the deflection angle θ can be obtained by the following equation. If this radius r is regarded as the amount of deflection of the shaft 5, the following equation 1 is obtained.
Figure JPOXMLDOC01-appb-M000001
The deflection angle θ is stored in the storage unit 32 after calculation.
（計測部３３３）
　計測部３３３は、ミラー４の斜面４２を反射した測定光と、たわみ角θより求めた変位とに基づいて、ミラー４と計測面７における一点との距離を連続的に算出し、これにより計測面７の形状を計測するように構成される。即ち、計測部３３３は、基準光検出部２４が検出したデータから算出したたわみ角θと、第１光源２１からミラー４の斜面４２までの距離等とに基づいて、被計測物の中心から計測面７までの真の距離Ｒを算出する。 (Measurement unit 333)
The measurement unit 333 continuously calculates the distance between the mirror 4 and one point on the measurement surface 7 based on the measurement light reflected from the slope 42 of the mirror 4 and the displacement obtained from the deflection angle θ, and measures the distance accordingly. It is configured to measure the shape of the surface 7. That is, the measuring unit 333 measures from the center of the object to be measured based on the deflection angle θ calculated from the data detected by the reference light detecting unit 24 and the distance from the first light source 21 to the slope 42 of the mirror 4. Calculate the true distance R to surface 7.
　変位検出部３３２が、たわみ角θを算出したときと同じ条件で、スピンドルモーター（不図示）が回転すると、シャフト５は同じたわみ角θを有してたわむ。そのため、計測部３３３は、光検出部２３が計測した計測面７までの距離Ｒ‘を、たわみ角θを用いて補正することで真の距離Ｒを計測する。図３及び図４Ｂに描かれているように、シャフト５のたわみにより、ミラー４がθ傾くと計測光もθだけずれて計測面７に進行する。計測面７で反射した散乱光の一部が入射経路と同じ経路で光検出部２３に進行する。そのため、真の距離Ｒとたわみ角θを有したときの距離Ｒ’の関係は以下の数２である。
Figure JPOXMLDOC01-appb-M000002
　たわみ角θは既に算出されているため、本式からＲを算出する。 When the spindle motor (not shown) rotates under the same conditions as when the displacement detection unit 332 calculates the deflection angle θ, the shaft 5 bends with the same deflection angle θ. Therefore, the measuring unit 333 measures the true distance R by correcting the distance R'to the measuring surface 7 measured by the photodetecting unit 23 by using the deflection angle θ. As shown in FIGS. 3 and 4B, when the mirror 4 is tilted by θ due to the deflection of the shaft 5, the measurement light also shifts by θ and advances to the measurement surface 7. A part of the scattered light reflected by the measurement surface 7 travels to the photodetector 23 along the same path as the incident path. Therefore, the relationship between the true distance R and the distance R'when having the deflection angle θ is the following equation 2.
Figure JPOXMLDOC01-appb-M000002
Since the deflection angle θ has already been calculated, R is calculated from this equation.
　非接触で距離を計測する方法は数多くある。ここでは、光パルス法の原理を用いて計測方法を説明する。計測部３３３は、第１光源２１に対して光を照射させる。計測部３３３は、参照光検出部２３ａが検出した参照信号データと測定光検出部２３ｂが検出した測定信号データから、光の往復時間τを測定する。被計測物の計測面７までの距離Ｄは、数３のように求まる。
Figure JPOXMLDOC01-appb-M000003
　ただし、ｎは光路の平均屈折率、ｃは真空中の光速である。 There are many ways to measure distance in a non-contact manner. Here, the measurement method will be described using the principle of the optical pulse method. The measuring unit 333 irradiates the first light source 21 with light. The measurement unit 333 measures the round-trip time τ of the light from the reference signal data detected by the reference light detection unit 23a and the measurement signal data detected by the measurement light detection unit 23b. The distance D to the measurement surface 7 of the object to be measured can be obtained as shown in Equation 3.
Figure JPOXMLDOC01-appb-M000003
However, n is the average refractive index of the optical path, and c is the speed of light in vacuum.
　計測部３３３は、距離Ｄから、第１ビームスプリッタＢ１からミラー４までの距離を除いた、被計測物の中心軸から計測面７までの距離Ｒ’を算出する。さらに、計測部３３３は、たわみ角θを用いて数２によって距離Ｒ’を補正して真の距離Ｒを算出する。 The measurement unit 333 calculates the distance R'from the central axis of the object to be measured to the measurement surface 7 excluding the distance from the first beam splitter B1 to the mirror 4 from the distance D. Further, the measuring unit 333 corrects the distance R'by Equation 2 using the deflection angle θ to calculate the true distance R.
　図１１は、実施形態に係る第１光源２１から測定光をミラー４の上面４１に照射して長さＬを測定する一例を表した図である。図１１に表したように、計測ユニット２を上部計測ユニット２ａと下部計測ユニット２ｂに分割させて、第１光源２１を備える上部計測ユニット２ａの中心軸をシャフト５の中心軸に対して距離δ移動させることで、第１光源２１が上面４１の上部に配置される。このような配置で、第１光源２１は、測定光を回転軸方向に沿ってミラー４の備える上面４１に測定光を照射可能に構成されてもよい。このように回転軸に対して垂直に配置されているミラー４の上面４１に測定光を照射すると、計測部３３３が上面４１における反射成分に基づいて、第１光源２１と上面４１における一点との距離を連続的に計測する。 FIG. 11 is a diagram showing an example in which the upper surface 41 of the mirror 4 is irradiated with the measurement light from the first light source 21 according to the embodiment to measure the length L. As shown in FIG. 11, the measurement unit 2 is divided into an upper measurement unit 2a and a lower measurement unit 2b, and the central axis of the upper measurement unit 2a provided with the first light source 21 is a distance δ with respect to the central axis of the shaft 5. By moving, the first light source 21 is arranged on the upper surface 41. With such an arrangement, the first light source 21 may be configured to be able to irradiate the upper surface 41 of the mirror 4 with the measurement light along the direction of the rotation axis. When the upper surface 41 of the mirror 4 arranged perpendicular to the rotation axis is irradiated with the measurement light in this way, the measurement unit 333 makes a point on the first light source 21 and the upper surface 41 based on the reflection component on the upper surface 41. Measure the distance continuously.
　このように第１光源２１からシャフト５内のミラー４の上面４１まで測定光を照射させて直接計測された長さＬの方が、シャフト５の設計データに基づいて算出された長さＬより精度が高い。そのため、計測ユニット２は、計測面７の形状をより精度よく計測できる。 The length L measured directly by irradiating the measurement light from the first light source 21 to the upper surface 41 of the mirror 4 in the shaft 5 is larger than the length L calculated based on the design data of the shaft 5. High accuracy. Therefore, the measurement unit 2 can measure the shape of the measurement surface 7 with higher accuracy.
　ここで、第１光源２１が測定光をミラー４の上面４１に照射させることができれば、第１光源２１を備える上部計測ユニット２ａの中心軸をシャフト５の中心軸に対して移動させる距離は、限定されない。 Here, if the first light source 21 can irradiate the upper surface 41 of the mirror 4 with the measurement light, the distance for moving the central axis of the upper measurement unit 2a including the first light source 21 with respect to the central axis of the shaft 5 is determined. Not limited.
　ここでは、第１光源２１をシャフト５に対して移動させる構造の一例について説明する。計測ユニット２は、上部計測ユニット２ａと下部計測ユニット２ｂとに分割される。上部計測ユニット２ａは、第１光源２１、第２光源２２、光検出部２３及び第１ビームスプリッタＢ１を備え、下部計測ユニット２ｂは、軸受６を備える。即ち、下部計測ユニット２ｂの中心軸は、軸受６に嵌合されたシャフト５の中心軸と同軸上に配置される。上部計測ユニット２ａと下部計測ユニット２ｂとの間には、移動部９が取り付けられる。これにより、上部計測ユニット２ａを下部計測ユニット２ｂに対して相対的に平面移動させることができる。移動部９は、上面移動部９１と下面移動部９２とを備える。上面移動部９１は、下面移動部９２に対して相対的に移動可能に構成される。これにより、上面移動部９１の上面に取り付けられた上部計測ユニット２ａは、下面移動部９２の下面に取り付けられた下部計測ユニット２ｂに対して相対的に平面移動可能となる。 Here, an example of a structure in which the first light source 21 is moved with respect to the shaft 5 will be described. The measurement unit 2 is divided into an upper measurement unit 2a and a lower measurement unit 2b. The upper measurement unit 2a includes a first light source 21, a second light source 22, a light detection unit 23, and a first beam splitter B1, and the lower measurement unit 2b includes a bearing 6. That is, the central axis of the lower measurement unit 2b is arranged coaxially with the central axis of the shaft 5 fitted to the bearing 6. A moving unit 9 is attached between the upper measurement unit 2a and the lower measurement unit 2b. As a result, the upper measurement unit 2a can be moved in a plane relative to the lower measurement unit 2b. The moving portion 9 includes an upper surface moving portion 91 and a lower surface moving portion 92. The upper surface moving portion 91 is configured to be movable relative to the lower surface moving portion 92. As a result, the upper measurement unit 2a attached to the upper surface of the upper surface moving portion 91 can move in a plane relative to the lower measuring unit 2b attached to the lower surface of the lower surface moving portion 92.
　具体的には、移動部９は、ステージ開口部９３を備えるＸＹステージであってもよい。ＸＹステージは、Ｘ軸及びＹ軸に送りネジ、ラック・アンド・ピニオン等の運動機構を備え、これによって、ＸＹステージの上面に取り付けられた上部計測ユニット２ａを、ＸＹステージの下面に取り付けられた下部計測ユニット２ｂに対して相対的に平面移動させる。上部計測ユニット２ａに備え付けせれた第１光源２１は、ステージ開口部９３を介して、測定光をミラー４の上面４１に照射する。 Specifically, the moving portion 9 may be an XY stage including a stage opening 93. The XY stage is provided with a movement mechanism such as a feed screw, a rack and pinion, etc. on the X-axis and the Y-axis, whereby the upper measurement unit 2a attached to the upper surface of the XY stage is attached to the lower surface of the XY stage. It is moved in a plane relative to the lower measurement unit 2b. The first light source 21 provided in the upper measurement unit 2a irradiates the upper surface 41 of the mirror 4 with the measurement light through the stage opening 93.
　移動部９は、第１光源２１及び第１ビームスプリッタＢ１に個々に取り付けられる送りネジであってもよい。計測ユニット２を分割させずに、個々の構成要素を移動させることで、第１光源２１が測定光をミラー４の上面４１に照射することができる。第１光源２１が測定光をミラー４の上面４１に照射できれば、構造は限定されない。 The moving unit 9 may be a feed screw individually attached to the first light source 21 and the first beam splitter B1. By moving the individual components without dividing the measurement unit 2, the first light source 21 can irradiate the upper surface 41 of the mirror 4 with the measurement light. The structure is not limited as long as the first light source 21 can irradiate the upper surface 41 of the mirror 4 with the measurement light.
（結果保存部３３４）
　結果保存部３３４は、ソフトウェア（記憶部３２に記憶されている）による情報処理がハードウェア（制御部３３）によって具体的に実現されているものである。結果保存部３３４は、被計測物の中心軸から計測面７までの真の距離Ｒ、計測距離を補正する上で用いたがたわみ角θ、又はシャフト５の回転数等の計測に係るデータを記憶部３２に記憶させる。 (Result storage unit 334)
In the result storage unit 334, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33). The result storage unit 334 stores data related to measurement such as the true distance R from the central axis of the object to be measured to the measurement surface 7, the deflection angle θ used for correcting the measurement distance, or the rotation speed of the shaft 5. It is stored in the storage unit 32.
（表示制御部３３５）
　表示制御部３３５は、ソフトウェア（記憶部３２に記憶されている）による情報処理がハードウェア（制御部３３）によって具体的に実現されているものである。表示制御部３３５は、検査中又は検査終了後に、被計測物の中心軸から計測面７までの真の距離Ｒ、計測距離を補正する上で用いたたわみ角θ、又はシャフト５の回転数等の計測に係るデータを表示装置８に表示させる。これらのデータは、生産現場での計測状況をリアルタイムで表示しているため、被計測物の計測面７の問題点を迅速に把握、特定すること、及び素早い対策等に役立てられる。 (Display control unit 335)
In the display control unit 335, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33). The display control unit 335 determines the true distance R from the central axis of the object to be measured to the measurement surface 7, the deflection angle θ used to correct the measurement distance, the rotation speed of the shaft 5, etc. during or after the inspection. The data related to the measurement of the above is displayed on the display device 8. Since these data display the measurement status at the production site in real time, they are useful for quickly grasping and identifying the problem of the measurement surface 7 of the object to be measured, and for quick countermeasures and the like.
２．計測方法
　第２節では、第１節で説明した計測装置１を用いた計測方法について説明する。計測方法は、測定光出力ステップと、光検出ステップと、変位検出ステップと、計測ステップとを備える。測定光出力ステップでは、第１光源２１から測定光を出力し、ミラー４でこれを所望の方向に向くように反射させてる。これを計測面７に連続的に照射する。ここで、ミラー４は第１光源２１に向かう回転軸周りに回転するように構成される。光検出ステップでは、測定光の、計測面７に対する反射光のうちの鏡面反射成分を検出する。変位検出ステップでは、回転時に生じるミラー４と回転軸との変位を検出する。計測ステップでは、鏡面反射成分と変位とに基づいて、ミラー４と計測面７における一点との距離を連続的に算出する。これにより計測面７の形状を計測する。具体的には、この計測方法を２つに分けて説明する。 2. Measurement Method Section 2 describes a measurement method using the measurement device 1 described in Section 1. The measurement method includes a measurement light output step, a light detection step, a displacement detection step, and a measurement step. In the measurement light output step, the measurement light is output from the first light source 21 and reflected by the mirror 4 so as to face a desired direction. This is continuously irradiated on the measurement surface 7. Here, the mirror 4 is configured to rotate about a rotation axis toward the first light source 21. In the light detection step, the specular reflection component of the light reflected on the measurement surface 7 of the measurement light is detected. In the displacement detection step, the displacement between the mirror 4 and the rotation axis that occurs during rotation is detected. In the measurement step, the distance between the mirror 4 and one point on the measurement surface 7 is continuously calculated based on the specular reflection component and the displacement. As a result, the shape of the measuring surface 7 is measured. Specifically, this measurement method will be described in two parts.
２．１　シャフト５のたわみ角θを算出方法
　本項では、計測面７までの距離を補正する上で用いるたわみ角θを算出する方法の一例を説明する。図１２は、実施形態に係るシャフト５のたわみ角θを算出する方法のアクティビティ図である。以下、本図に沿って説明する。 2.1 Method for calculating the deflection angle θ of the shaft 5 This section describes an example of the method for calculating the deflection angle θ used for correcting the distance to the measurement surface 7. FIG. 12 is an activity diagram of a method for calculating the deflection angle θ of the shaft 5 according to the embodiment. Hereinafter, description will be given with reference to this figure.
（アクティビティＡ０１）
　ユーザーは、基準光がミラー４の上面４１に照射されるようにシャフト５を調整する。
（アクティビティＡ０２）
　第１光源２１は、基準光をミラー４の上面４１に向けて出力する。
（アクティビティＡ０３）
　基準光検出部２４は、基準光の反射光を検出する。基準光検出部２４がＣＣＤカメラの場合、基準光検出部２４は、反射光である第１基準反射光Ｇ１及び第２基準反射光Ｇ２を撮像する。
（アクティビティＡ０４）
　ユーザーは、シャフト５が未回転か回転中かを確認する。
（アクティビティＡ０５）
　ユーザーは、シャフト５が未回転の場合、シャフト５を回転させる。
（アクティビティＡ０６）
　取得部３３１は、第１基準反射光Ｇ１及び第２基準反射光Ｇ２を撮像した画像を取得する。
（アクティビティＡ０７）
　結果保存部３３４は、第１基準反射光Ｇ１及び第２基準反射光Ｇ２を撮像した画像を保存する。
（アクティビティＡ０８）
　変位検出部３３２は、撮像した画像内の、第１基準反射光Ｇ１の中心点から第２基準反射光Ｇ２の位置までの画素数を求め、該画素数からたわみ量ｒを算出する。また、変位検出部３３２は、長さＬ（シャフト５の長さと、シャフト５から基準光検出部２４までの距離と、の和（図３参照））とたわみ量ｒに基づいてたわみ角θを算出する。
（アクティビティＡ０９）
　結果保存部３３４は、算出したたわみ角θを記憶部３２に保存する。
（アクティビティＡ１０）
　情報処理装置３は、たわみ角θの算出を完了する。
（アクティビティＡ１１）
　ユーザーは、シャフト５の回転を停止する。
（アクティビティＡ１２）
　ユーザーは、第２光源２２の出力を停止する。 (Activity A01)
The user adjusts the shaft 5 so that the reference light is applied to the upper surface 41 of the mirror 4.
(Activity A02)
The first light source 21 outputs the reference light toward the upper surface 41 of the mirror 4.
(Activity A03)
The reference light detection unit 24 detects the reflected light of the reference light. When the reference light detection unit 24 is a CCD camera, the reference light detection unit 24 captures the first reference reflected light G1 and the second reference reflected light G2 which are reflected lights.
(Activity A04)
The user confirms whether the shaft 5 is not rotating or is rotating.
(Activity A05)
The user rotates the shaft 5 when the shaft 5 is not rotated.
(Activity A06)
The acquisition unit 331 acquires images obtained by capturing the first reference reflected light G1 and the second reference reflected light G2.
(Activity A07)
The result storage unit 334 stores images obtained by capturing the first reference reflected light G1 and the second reference reflected light G2.
(Activity A08)
The displacement detection unit 332 obtains the number of pixels from the center point of the first reference reflected light G1 to the position of the second reference reflected light G2 in the captured image, and calculates the amount of deflection r from the number of pixels. Further, the displacement detection unit 332 determines the deflection angle θ based on the length L (the sum of the length of the shaft 5 and the distance from the shaft 5 to the reference light detection unit 24 (see FIG. 3)) and the amount of deflection r. calculate.
(Activity A09)
The result storage unit 334 stores the calculated deflection angle θ in the storage unit 32.
(Activity A10)
The information processing device 3 completes the calculation of the deflection angle θ.
(Activity A11)
The user stops the rotation of the shaft 5.
(Activity A12)
The user stops the output of the second light source 22.
２．２　計測面７までの距離の計測方法
　本項では、被計測物の中心軸から計測面７までの距離を三次元計測する方法の一例について説明する。図１３は、実施形態に係る計測面７までの距離の計測方法のアクティビティ図である。 2.2 Measurement method of the distance to the measurement surface 7 This section describes an example of the method of three-dimensionally measuring the distance from the central axis of the object to be measured to the measurement surface 7. FIG. 13 is an activity diagram of a method for measuring the distance to the measurement surface 7 according to the embodiment.
（アクティビティＡ２１）
　ユーザーは、計測装置１を起動する。シャフト５が回転する。回転速度は、予めたわみ角θを算出したときのシャフト５の回転速度と同じである。
（アクティビティＡ２２）
　第１光源２１は、測定光をミラー４の斜面４２に照射する。
（アクティビティＡ２３）
　参照光検出部２３ａは、参照光ビームスプリッタＢ１ａで反射した測定光の一部を、参照光として検出する。
（アクティビティＡ２４）
　測定光検出部２３ｂは、測定光ビームスプリッタＢ１ｂで反射した測定光を検出する。
（アクティビティＡ２５）
　第１光源２１は、測定光の出力を停止する。
（アクティビティＡ２６）
　情報処理装置３が、全ての計測を完了したかを確認する。
（アクティビティＡ２７）
　取得部３３１は、参照信号データ及び測定信号データを取得する。
（アクティビティＡ２８）
　計測部３３３は、記憶部３２に記憶されたたわみ角θを読み込む。
（アクティビティＡ２９）
　計測部３３３は、参照信号データ及び測定信号データから、測定光の往復時間τを算出し、被計測物の中心軸から計測面７までの距離Ｒ’を計測する。計測部３３３は、計測した距離を、たわみ角θを用いて補正し、真の距離Ｒを算出する。
（アクティビティＡ３０）
　結果保存部３３４は、真の距離Ｒを含む計測した三次元データを記憶部３２に保存する。
（アクティビティＡ３１）
　情報処理装置３は、参照信号データ、測定信号データが入力されたか確認する。
（アクティビティＡ３２）
　測定が完了した場合、計測装置１はシャフト５の回転を停止する。 (Activity A21)
The user activates the measuring device 1. The shaft 5 rotates. The rotation speed is the same as the rotation speed of the shaft 5 when the deflection angle θ is calculated in advance.
(Activity A22)
The first light source 21 irradiates the slope 42 of the mirror 4 with the measurement light.
(Activity A23)
The reference light detection unit 23a detects a part of the measurement light reflected by the reference light beam splitter B1a as the reference light.
(Activity A24)
The measurement light detection unit 23b detects the measurement light reflected by the measurement light beam splitter B1b.
(Activity A25)
The first light source 21 stops the output of the measurement light.
(Activity A26)
It is confirmed whether the information processing device 3 has completed all the measurements.
(Activity A27)
The acquisition unit 331 acquires the reference signal data and the measurement signal data.
(Activity A28)
The measurement unit 333 reads the deflection angle θ stored in the storage unit 32.
(Activity A29)
The measurement unit 333 calculates the round-trip time τ of the measurement light from the reference signal data and the measurement signal data, and measures the distance R'from the central axis of the object to be measured to the measurement surface 7. The measuring unit 333 corrects the measured distance using the deflection angle θ, and calculates the true distance R.
(Activity A30)
The result storage unit 334 stores the measured three-dimensional data including the true distance R in the storage unit 32.
(Activity A31)
The information processing device 3 confirms whether the reference signal data and the measurement signal data have been input.
(Activity A32)
When the measurement is completed, the measuring device 1 stops the rotation of the shaft 5.
３．変形例
　第３節では、計測装置１に係る変形例について説明する。即ち、下記のような態様によって前述の実施形態を実施してもよい。 3. 3. Modification Example Section 3 describes a modification of the measuring device 1. That is, the above-described embodiment may be implemented according to the following aspects.
（１）第２光源２２から照射する基準光を、ミラー４の上面４１と下面４３を通過させて、シャフト５の下面５１で反射させてもよい。
（２）シャフト５の下端を鏡面にし、第２光源２２及び基準光検出部２４をシャフト５の下方に配置して、第２光源２２から基準光を該下端に向けて出力してもよい。
（３）シャフト５は円筒でなくてもよい。底面が三角形、四角形、五角形のような角柱であってもよい。
（４）シャフト５の中心軸に直角の向きで下方にカメラを配置し、停止中及び回転中のシャフト５の輪郭を撮像し、両画像の輪郭の違いをたわみ量ｒとしてもよい。
（５）計測部３３３が、被計測物の中心軸から計測面７までの真の距離Ｒを計測するにあたり、予め計測したたわみ角θで補正をしてもよいが、リアルタイムで第２光源２２から基準光りを照射し、たわみ角θを検出して補正してもよい。
（６）上面４１及び斜面４２を備えるミラー４に代えて、波長帯によって反射成分と透過成分とを分離可能なダイクロイックミラーを採用してもよい。かかる場合、第１光源２１が出力する測定光の波長帯が反射成分となり、第２光源２２が出力する基準光の波長帯が透過成分となる。
（７）距離の計測は、前述の方法に限定されず、光変調法、合致法、光コム干渉計測法等を適宜採用してもよい。
（８）ユーザーが、ミラー４の位置を手動で調整してもよいが、計測装置１によって第１基準反射光Ｇ１を自動検出することによって、ミラー４の位置を調整してもよい。シャフト５の回転開始、停止、第２光源２２の出力の開始、及び停止は、一連のシーケンスとして、計測装置１によって自動的に実施されてもよい。
（９）プログラムであって、コンピュータに前述の計測方法を実行させるものが提供されてもよい。このプログラムが予めインストールされていてもよいし、事後的にインストールされてもよいし、このようなプログラムを外部の記憶媒体に記憶させてもよいし、クラウドコンピューティングで動作させてもよい。 (1) The reference light emitted from the second light source 22 may pass through the upper surface 41 and the lower surface 43 of the mirror 4 and be reflected by the lower surface 51 of the shaft 5.
(2) The lower end of the shaft 5 may be a mirror surface, the second light source 22 and the reference light detection unit 24 may be arranged below the shaft 5, and the reference light may be output from the second light source 22 toward the lower end.
(3) The shaft 5 does not have to be a cylinder. The bottom surface may be a prism such as a triangle, a quadrangle, or a pentagon.
(4) A camera may be arranged below in a direction perpendicular to the central axis of the shaft 5, the contours of the shaft 5 being stopped and rotating may be imaged, and the difference between the contours of both images may be defined as the amount of deflection r.
(5) When the measuring unit 333 measures the true distance R from the central axis of the object to be measured to the measurement surface 7, it may be corrected by the deflection angle θ measured in advance, but the second light source 22 may be corrected in real time. It is also possible to irradiate the reference light from the source and detect and correct the deflection angle θ.
(6) Instead of the mirror 4 provided with the upper surface 41 and the slope 42, a dichroic mirror capable of separating the reflection component and the transmission component depending on the wavelength band may be adopted. In such a case, the wavelength band of the measurement light output by the first light source 21 becomes the reflection component, and the wavelength band of the reference light output by the second light source 22 becomes the transmission component.
(7) The distance measurement is not limited to the above-mentioned method, and an optical modulation method, a matching method, an optical comb interference measurement method, or the like may be appropriately adopted.
(8) The user may manually adjust the position of the mirror 4, but the position of the mirror 4 may be adjusted by automatically detecting the first reference reflected light G1 by the measuring device 1. The rotation start and stop of the shaft 5, the start and stop of the output of the second light source 22 may be automatically performed by the measuring device 1 as a series of sequences.
(9) A program may be provided that causes a computer to execute the above-mentioned measurement method. This program may be pre-installed, may be installed after the fact, such a program may be stored in an external storage medium, or may be operated by cloud computing.
４．結言
　このように、回転中に発生するたわみによる変位を算出し、基準点から被計測物の内径を補正し、より精度良く距離を計測できる計測装置を提供することができる。 4. Conclusion In this way, it is possible to provide a measuring device capable of calculating the displacement due to the deflection generated during rotation, correcting the inner diameter of the object to be measured from the reference point, and measuring the distance more accurately.
　次に記載の各態様で提供されてもよい。
　前記計測装置において、前記ミラーは、前記回転軸に対して直交する上面と、該上面に対して傾斜する斜面とを備え、前記第１光源は、前記回転軸方向に沿って前記斜面に前記測定光を照射するよう構成され、第２光源をさらに備え、前記第２光源は、前記回転軸方向に沿って前記上面に基準光を照射するよう構成される、もの。
　前記計測装置において、前記第１光源は、前記測定光を前記回転軸方向に沿って前記ミラーの備える前記上面に前記測定光を照射可能に構成され、前記計測部は、前記上面における反射成分に基づいて、前記第１光源と前記上面における一点との距離を連続的に計測するように構成される、もの。
　前記計測装置において、前記ミラーは、波長帯によって反射成分と透過成分とを分離可能なダイクロイックミラーであり、前記測定光の波長帯が前記反射成分となり、第２光源をさらに備え、前記第２光源が出力する基準光の波長帯が前記透過成分となる、もの。
　前記計測装置において、前記変位検出部は、第１基準反射光及び第２基準反射光に基づいて前記変位を算出するように構成され、ここで前記第１基準反射光は、前記変位がない状態で前記基準光が前記ミラーで反射したもので、前記第２基準反射光は、前記変位がある状態で前記基準光が前記ミラーで反射したものである、もの。
　前記計測装置において、シャフトをさらに備え前記シャフトは、中空であり、該シャフトの一端から前記測定光及び前記基準光を通過させ、その内部下面に前記ミラーを有するように構成される、もの。
　前記計測装置において、前記基準光は、可視光である、もの。
　前記計測装置において、前記第１光源は、光コム光源である、もの。
　計測方法であって、測定光出力ステップと、光検出ステップと、変位検出ステップと、計測ステップとを備え、前記測定光出力ステップでは、第１光源から測定光を出力し、ミラーでこれを所望の方向に向くように反射させて計測面に連続的に照射し、ここで、前記ミラーは前記第１光源に向かう回転軸周りに回転するように構成され、前記光検出ステップでは、前記測定光の、前記計測面に対する反射光のうちの鏡面反射成分を検出し、前記変位検出ステップでは、回転時に生じる前記ミラーと前記回転軸との変位を検出し、前記計測ステップでは、前記鏡面反射成分と前記変位とに基づいて、前記ミラーと前記計測面における一点との距離を連続的に算出し、これにより前記計測面の形状を計測する、方法。
　プログラムであって、コンピュータに前記計測方法を実行させる、もの。
　もちろん、この限りではない。 It may be provided in each of the following aspects.
In the measuring device, the mirror includes an upper surface orthogonal to the rotation axis and a slope inclined with respect to the upper surface, and the first light source measures the slope along the rotation axis direction. A device that is configured to irradiate light, further includes a second light source, and the second light source is configured to irradiate the upper surface with reference light along the direction of the rotation axis.
In the measuring device, the first light source is configured to be able to irradiate the measuring light on the upper surface of the mirror along the direction of the rotation axis, and the measuring unit is a reflection component on the upper surface. Based on this, the distance between the first light source and one point on the upper surface is continuously measured.
In the measuring device, the mirror is a dichroic mirror capable of separating a reflected component and a transmitted component by a wavelength band, the wavelength band of the measured light serves as the reflected component, a second light source is further provided, and the second light source is provided. The wavelength band of the reference light output by is the transmission component.
In the measuring device, the displacement detecting unit is configured to calculate the displacement based on the first reference reflected light and the second reference reflected light, and here, the first reference reflected light is in a state where there is no such displacement. The reference light is reflected by the mirror, and the second reference reflected light is the reference light reflected by the mirror in a state of having the displacement.
In the measuring device, the measuring device further includes a shaft, the shaft is hollow, the measurement light and the reference light are passed from one end of the shaft, and the mirror is provided on the inner lower surface thereof.
In the measuring device, the reference light is visible light.
In the measuring device, the first light source is an optical comb light source.
It is a measurement method and includes a measurement light output step, a light detection step, a displacement detection step, and a measurement step. In the measurement light output step, measurement light is output from a first light source, and this is desired by a mirror. The measurement surface is continuously irradiated with light reflected in the direction of the above, where the mirror is configured to rotate about a rotation axis toward the first light source, and in the light detection step, the measurement light is The mirror surface reflection component of the reflected light with respect to the measurement surface is detected, the displacement between the mirror and the rotation axis generated during rotation is detected in the displacement detection step, and the mirror surface reflection component is detected in the measurement step. A method of continuously calculating the distance between the mirror and a point on the measuring surface based on the displacement, thereby measuring the shape of the measuring surface.
A program that causes a computer to execute the measurement method.
Of course, this is not the case.
　最後に、本発明に係る種々の実施形態を説明したが、これらは、例として提示したものであり、発明の範囲を限定することは意図していない。当該新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。当該実施形態やその変形は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれるものである。 Finally, various embodiments according to the present invention have been described, but these are presented as examples and are not intended to limit the scope of the invention. The novel embodiment can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. The embodiment and its modifications are included in the scope and gist of the invention, and are included in the scope of the invention described in the claims and the equivalent scope thereof.
１　　　：計測装置
２　　　：計測ユニット
２ａ　　：上部計測ユニット
２ｂ　　：下部計測ユニット
２１　　：第１光源
２２　　：第２光源
２３　　：光検出部
２３ａ　：参照光検出部
２３ｂ　：測定光検出部
２４　　：基準光検出部
３　　　：情報処理装置
３０　　：通信バス
３１　　：通信部
３２　　：記憶部
３３　　：制御部
３３１　：取得部
３３２　：変位検出部
３３３　：計測部
３３４　：結果保存部
３３５　：表示制御部
４　　　：ミラー
４１　　：上面
４２　　：斜面
４３　　：下面
５　　　：シャフト
５１　　：下面
６　　　：軸受
７　　　：計測面
８　　　：表示装置
９　　　：移動部
９１　　：上面移動部
９２　　：下面移動部
９３　　：ステージ開口部
Ｂ１　　：第１ビームスプリッタ
Ｂ１ａ　：参照光ビームスプリッタ
Ｂ１ｂ　：測定光ビームスプリッタ
Ｂ２　　：第２ビームスプリッタ
Ｇ１　　：第１基準反射光
Ｇ２　　：第２基準反射光 1: Measuring device 2: Measuring unit 2a: Upper measuring unit 2b: Lower measuring unit 21: First light source 22: Second light source 23: Light detection unit 23a: Reference light detection unit 23b: Measurement light detection unit 24: Reference light detection Unit 3: Information processing device 30: Communication bus 31: Communication unit 32: Storage unit 33: Control unit 331: Acquisition unit 332: Displacement detection unit 333: Measurement unit 334: Result storage unit 335: Display control unit 4: Mirror 41: Top surface 42: Slope 43: Bottom surface 5: Shaft 51: Bottom surface 6: Bearing 7: Measurement surface 8: Display device 9: Moving unit 91: Top surface moving unit 92: Bottom surface moving unit 93: Stage opening B1: First beam splitter B1a : Reference light beam splitter B1b: Measurement light beam splitter B2: Second beam splitter G1: First reference reflected light G2: Second reference reflected light

Claims (10)

  1. 計測装置であって、
    　第１光源と、ミラーと、光検出部と、変位検出部と、計測部とを備え、
    　前記第１光源は、測定光を出力するように構成され、
    　前記ミラーは、
    　　前記第１光源に向かう回転軸周りに回転するように構成され、
    　　前記測定光を、所望の方向に向くように反射させて、これを計測面に連続的に照射するように構成され、
    　前記光検出部は、前記測定光の、前記計測面に対する反射光のうちの鏡面反射成分を検出するように構成され、
    　前記変位検出部は、回転時に生じる前記ミラーと前記回転軸との変位を検出するように構成され、
    　前記計測部は、前記鏡面反射成分と前記変位とに基づいて、前記ミラーと前記計測面における一点との距離を連続的に算出し、これにより前記計測面の形状を計測するように構成される、
    もの。     It ’s a measuring device,
    A first light source, a mirror, a light detection unit, a displacement detection unit, and a measurement unit are provided.
    The first light source is configured to output measurement light.
    The mirror
    It is configured to rotate about an axis of rotation towards the first light source.
    The measurement light is reflected so as to face a desired direction, and the measurement surface is continuously irradiated with the measurement light.
    The photodetector is configured to detect a specular reflection component of the light reflected from the measurement surface with respect to the measurement surface.
    The displacement detecting unit is configured to detect the displacement between the mirror and the rotating shaft that occurs during rotation.
    The measuring unit is configured to continuously calculate the distance between the mirror and one point on the measuring surface based on the specular reflection component and the displacement, thereby measuring the shape of the measuring surface. ,
    thing.
  2. 請求項１に記載の計測装置において、
    　前記ミラーは、前記回転軸に対して直交する上面と、該上面に対して傾斜する斜面とを備え、
    　前記第１光源は、前記回転軸方向に沿って前記斜面に前記測定光を照射するよう構成され、
    　第２光源をさらに備え、
    　前記第２光源は、前記回転軸方向に沿って前記上面に基準光を照射するよう構成される、
    もの。     In the measuring device according to claim 1,
    The mirror includes an upper surface orthogonal to the rotation axis and a slope inclined with respect to the upper surface.
    The first light source is configured to irradiate the slope with the measurement light along the direction of the rotation axis.
    With a second light source
    The second light source is configured to irradiate the upper surface with reference light along the direction of the rotation axis.
    thing.
  3. 請求項２に記載の計測装置において、
    　前記第１光源は、前記測定光を前記回転軸方向に沿って前記ミラーの備える前記上面に前記測定光を照射可能に構成され、
    　前記計測部は、前記上面における反射成分に基づいて、前記第１光源と前記上面における一点との距離を連続的に計測するように構成される、
    もの。     In the measuring device according to claim 2.
    The first light source is configured to be capable of irradiating the measurement light on the upper surface of the mirror along the direction of the rotation axis.
    The measuring unit is configured to continuously measure the distance between the first light source and one point on the upper surface based on the reflection component on the upper surface.
    thing.
  4. 請求項１に記載の計測装置において、
    　前記ミラーは、波長帯によって反射成分と透過成分とを分離可能なダイクロイックミラーであり、
    　前記測定光の波長帯が前記反射成分となり、
    　第２光源をさらに備え、
    　前記第２光源が出力する基準光の波長帯が前記透過成分となる、
    もの。     In the measuring device according to claim 1,
    The mirror is a dichroic mirror capable of separating a reflection component and a transmission component according to a wavelength band.
    The wavelength band of the measurement light becomes the reflection component.
    With a second light source
    The wavelength band of the reference light output by the second light source serves as the transmitted component.
    thing.
  5. 請求項２～請求項４の何れか１つに記載の計測装置において、
    　前記変位検出部は、第１基準反射光及び第２基準反射光に基づいて前記変位を算出するように構成され、ここで
    　　前記第１基準反射光は、前記変位がない状態で前記基準光が前記ミラーで反射したもので、
    　　前記第２基準反射光は、前記変位がある状態で前記基準光が前記ミラーで反射したものである、
    もの。     In the measuring device according to any one of claims 2 to 4.
    The displacement detection unit is configured to calculate the displacement based on the first reference reflected light and the second reference reflected light, and here, the first reference reflected light is the reference light in the absence of the displacement. Reflected by the mirror
    The second reference reflected light is the one in which the reference light is reflected by the mirror in a state where there is the displacement.
    thing.
  6. 請求項２～請求項５の何れか１つに記載の計測装置において、
    　シャフトをさらに備え
    　前記シャフトは、
    　　中空であり、該シャフトの一端から前記測定光及び前記基準光を通過させ、
    　　その内部下面に前記ミラーを有するように構成される、
    もの。     In the measuring device according to any one of claims 2 to 5.
    The shaft is further provided.
    It is hollow and allows the measurement light and the reference light to pass from one end of the shaft.
    It is configured to have the mirror on its inner lower surface.
    thing.
  7. 請求項２～請求項６の何れか１つに記載の計測装置において、
    　前記基準光は、可視光である、
    もの。     In the measuring device according to any one of claims 2 to 6.
    The reference light is visible light.
    thing.
  8. 請求項１～請求項７の何れか１つに記載の計測装置において、
    　前記第１光源は、光コム光源である、
    もの。     In the measuring device according to any one of claims 1 to 7.
    The first light source is an optical comb light source.
    thing.
  9. 計測方法であって、
    　測定光出力ステップと、光検出ステップと、変位検出ステップと、計測ステップとを備え、
    　前記測定光出力ステップでは、第１光源から測定光を出力し、ミラーでこれを所望の方向に向くように反射させて計測面に連続的に照射し、ここで、前記ミラーは前記第１光源に向かう回転軸周りに回転するように構成され、
    　前記光検出ステップでは、前記測定光の、前記計測面に対する反射光のうちの鏡面反射成分を検出し、
    　前記変位検出ステップでは、回転時に生じる前記ミラーと前記回転軸との変位を検出し、
    　前記計測ステップでは、前記鏡面反射成分と前記変位とに基づいて、前記ミラーと前記計測面における一点との距離を連続的に算出し、これにより前記計測面の形状を計測する、
    方法。     It ’s a measurement method.
    It includes a measurement light output step, a light detection step, a displacement detection step, and a measurement step.
    In the measurement light output step, the measurement light is output from the first light source, reflected by the mirror so as to face a desired direction, and continuously irradiated to the measurement surface, where the mirror is the first light source. It is configured to rotate around the axis of rotation towards
    In the light detection step, the specular reflection component of the reflected light of the measurement light with respect to the measurement surface is detected.
    In the displacement detection step, the displacement between the mirror and the rotation axis that occurs during rotation is detected.
    In the measurement step, the distance between the mirror and one point on the measurement surface is continuously calculated based on the specular reflection component and the displacement, thereby measuring the shape of the measurement surface.
    Method.
  10. プログラムであって、
    　コンピュータに請求項９に記載の計測方法を実行させる、
    もの。     It ’s a program
    Let the computer perform the measurement method according to claim 9.
    thing.
PCT/JP2021/005748 2020-03-10 2021-02-16 Measurement device, program, and measurement method WO2021182033A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015232539A (en) * 2014-05-12 2015-12-24 並木精密宝石株式会社 Optical type inner surface measuring device
JP2018179918A (en) * 2017-04-20 2018-11-15 株式会社日立製作所 Shape measurement system, and shape measurement method
JP2020148632A (en) * 2019-03-13 2020-09-17 株式会社Ｘｔｉａ Inner diameter measuring apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015232539A (en) * 2014-05-12 2015-12-24 並木精密宝石株式会社 Optical type inner surface measuring device
JP2018179918A (en) * 2017-04-20 2018-11-15 株式会社日立製作所 Shape measurement system, and shape measurement method
JP2020148632A (en) * 2019-03-13 2020-09-17 株式会社Ｘｔｉａ Inner diameter measuring apparatus

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