WO2021181830A1 - Physical quantity measurement device - Google Patents

Physical quantity measurement device Download PDF

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Publication number
WO2021181830A1
WO2021181830A1 PCT/JP2020/048706 JP2020048706W WO2021181830A1 WO 2021181830 A1 WO2021181830 A1 WO 2021181830A1 JP 2020048706 W JP2020048706 W JP 2020048706W WO 2021181830 A1 WO2021181830 A1 WO 2021181830A1
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Prior art keywords
input
signal
physical quantity
measuring device
quantity measuring
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PCT/JP2020/048706
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French (fr)
Japanese (ja)
Inventor
康章 露木
晃 小田部
尭生 佐藤
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日立Astemo株式会社
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Priority to JP2022505784A priority Critical patent/JP7354409B2/en
Publication of WO2021181830A1 publication Critical patent/WO2021181830A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer

Definitions

  • the present invention relates to a physical quantity measuring device.
  • the physical quantity measuring device acquires data representing the physical quantity by, for example, a control circuit (semiconductor element such as a processor) arithmetically processing a measurement signal output by a humidity sensor, a flow rate sensor, or the like for measuring the physical quantity.
  • a control circuit semiconductor element such as a processor
  • a device equipped with a control circuit eg, a large-scale integrated circuit: LSI
  • a burn-in test is performed to reduce initial defects.
  • the burn-in test is a screening test aimed at reducing initial defects by, for example, applying a temperature and voltage load to an inspection target.
  • Patent Document 1 describes a burn-in method for a semiconductor wafer.
  • the document provides "a burn-in method for a semiconductor wafer that does not require a dummy circuit simulating a sensor element outside the wafer in an IC chip having an input / output terminal to which a sensor element is connected after dicing the semiconductor wafer.
  • a dummy circuit is formed inside an input / output terminal to which a sensor element is connected via a switching element.” Since the switching element is controlled to be turned on only at the time of burn-in by the input voltage level of the mode terminal, burn-in is possible without probing to the input / output terminal. Further, during normal operation, the switching element is turned off depending on the input voltage level of the mode terminal, and there is no effect when the external sensor circuit is connected. ⁇ Disclosures the technology (see summary).
  • the control circuit provided in the physical quantity measuring device is operated in a state of being connected to a physical quantity sensor (humidity sensor, etc.) via a sensor terminal. Therefore, if the physical quantity sensor is not connected to the sensor terminal, the control circuit determines that the signal error occurs.
  • a physical quantity sensor humidity sensor, etc.
  • the control circuit is performed during the burn-in test. Determines that a signal error has occurred. Then, since the control circuit cannot proceed to the processing after the signal error, even if a temperature load or a voltage load is applied, only a part of the processing performed by the control circuit is inspected. As a result, the accuracy of detecting initial defects is reduced.
  • Patent Document 1 a physical quantity sensor is simulated in a burn-in test by turning on / off a built-in dummy circuit, thereby avoiding a signal error.
  • the dummy circuit requires a suitable circuit scale, there is a problem that the cost of the semiconductor wafer increases.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a physical quantity measuring device capable of avoiding a signal error by a simple circuit configuration even if a physical quantity sensor is not connected to a sensor terminal. And.
  • the physical quantity measuring device has a mask circuit capable of masking a signal to a level at which the diagnostic unit does not operate, between an input / output terminal that serially communicates with the sensor and a diagnostic unit that diagnoses the sensor.
  • the physical quantity measuring device According to the physical quantity measuring device according to the present invention, a signal error can be avoided even if the physical quantity sensor is not connected to the sensor terminal. Further, since the mask circuit can be easily mounted, the above effect can be exhibited by a simple circuit configuration.
  • FIG. 1 This is an example of a signal waveform when a sensor is connected to a terminal. This is an example of a signal waveform when the sensor is not connected to the terminal. It is a circuit block diagram of the physical quantity measuring apparatus 1 which concerns on Embodiment 1.
  • FIG. This is an example of a signal waveform when a sensor is connected to a terminal. This is an example of a signal waveform when the sensor is not connected to the terminal.
  • FIG. This is an example of a signal waveform when the sensor is not connected to the terminal. This is another example of a signal waveform when the sensor is not connected to the terminal.
  • FIG. 1 It is a graph explaining the voltage level of REGOUT output by a power supply circuit 10. It is a circuit block diagram of the physical quantity measuring apparatus 1 which concerns on Embodiment 5. It is a graph explaining the voltage level of REGOUT output by a power supply circuit 10. It is a circuit block diagram of the physical quantity measuring apparatus 1 which concerns on Embodiment 6. This is an example of a signal waveform for explaining the operation of the physical quantity measuring device 1 in the sixth embodiment.
  • FIG. 1 is a circuit configuration diagram of the conventional physical quantity measuring device 1.
  • the physical quantity measuring device 1 is a device that receives a measurement signal output by the flow rate sensor 8 and the humidity sensor 9 by measuring the physical quantity, and outputs data representing the physical quantity by arithmetically processing the measurement signal.
  • the physical quantity measuring device 1 is connected to the flow rate sensor 8 via terminals 16 and 17, and is connected to the humidity sensor 9 via terminals 18 and 19.
  • the AD converter 5 receives signals QH and QL from terminals 16 and 17, respectively, converts them into digital signals, and outputs them to the logic circuit 7.
  • the difference voltage between the signal QH and the signal QL is a signal representing a change in the flow rate.
  • the physical quantity measuring device 1 includes two input / output circuits 2.
  • One of the input / output circuits 2 transmits and receives the signal SDA to and from the terminal 18, and further transmits and receives the signal SDA to and from the control circuit 6.
  • the signal SDA is a signal for transmitting and receiving data in I2C (Inter-Integrated Circuit) communication.
  • the other of the input / output circuits 2 transmits and receives the signal SCL to and from the terminal 19, and further transmits and receives the signal SCL to and from the control circuit 6.
  • the signal SCL is a synchronization signal in I2C communication.
  • the input / output circuit 2 includes a pull-up resistor 3 and an NMOS transistor 4.
  • the control circuit 6 turns on / off the NMOS transistor 4 by the signal DAD or CLD. That is, each of the signal DAD and the signal CLD inverts the signal level output by the input / output circuit 2.
  • the pull-up resistor 3 fixes the signal level of the SDA to REGOUT (described later) when the NMOS transistor 4 is OFF.
  • the control circuit 6 controls the input / output circuit 2 and diagnoses whether or not the communication between the humidity sensor 9 and the physical quantity measuring device 1 is normal.
  • the logic circuit 7 operates at a frequency corresponding to the oscillation signal output by the oscillation circuit 12.
  • the logic circuit 7 generates data representing the physical quantity measured by each sensor by performing processing such as correcting the measured value acquired from each sensor, and outputs the data via the output circuit 11 and the terminal 14. do.
  • the power supply circuit 10 receives the input voltage VCS via the terminal 13 and steps it down to the operating voltage (sometimes called the internal voltage) of the physical quantity measuring device 1 to generate the voltage REGOUT.
  • Terminal 15 is connected to GND.
  • FIG. 2 is an example of a signal waveform when the sensor is connected to the terminal.
  • a signal waveform when a physical quantity measuring device 1 serves as a master and a humidity sensor 9 serves as a slave and a command is transmitted from the physical quantity measuring device 1 to the humidity sensor 9 is illustrated.
  • the physical quantity measuring device 1 (control circuit 6) specifies an address (ADDRESS in FIG. 2) and a command (COMMAND in FIG. 2) to the humidity sensor 9 by operating the DAD.
  • Bit W represents sending a command.
  • the control circuit 6 performs a communication diagnosis every 9 bits of the SCL after START CONDITION (indicating that I2C communication is started). If the communication is normal, the SDA becomes 0V, and the control circuit 6 receives an acknowledgment (ACK) as a communication confirmation signal. When the command transmission is finished, STOP CONDITION is output to the humidity sensor 9.
  • FIG. 3 is an example of a signal waveform when the sensor is not connected to the terminal.
  • a signal waveform when a command is transmitted from the physical quantity measuring device 1 to the humidity sensor 9 is illustrated.
  • the humidity sensor 9 When the humidity sensor 9 is not connected, an abnormality is diagnosed by the communication diagnosis at the 9th bit, the SDA becomes the VINT level, and the communication confirmation signal becomes a negative response (NACK).
  • the control circuit 6 immediately transmits STOP CONDITION (indicating that I2C communication is terminated) to the humidity sensor 9 to terminate the communication.
  • the present invention proposes a configuration for properly performing a burn-in test while avoiding being diagnosed with a communication abnormality even when the sensor is not connected.
  • FIG. 4 is a circuit configuration diagram of the physical quantity measuring device 1 according to the first embodiment of the present invention.
  • the physical quantity measuring device 1 according to the first embodiment includes a mask circuit 21 between the input / output circuit 2 (the side that transmits / receives SDA) and the control circuit 6.
  • the mask circuit 21 is arranged on an input line (a signal line used when the control circuit 6 receives a signal from the humidity sensor 9) between the input / output circuit 2 and the control circuit 6. Therefore, the mask circuit 21 receives the signal output by the humidity sensor 9 before the control circuit 6.
  • the physical quantity measuring device 1 further includes a terminal 20 for inputting a burn-in signal. Since other configurations are substantially the same as those in FIG. 1, the differences between the mask circuit 21 and the terminal 20 will be mainly described below.
  • the mask circuit 21 generates a signal MDA by overwriting the signal SDA output by the input / output circuit 2, and outputs the signal MDA to the control circuit 6.
  • the mask circuit 21 switches whether or not to overwrite the SDA according to the signal MAS output by the control circuit 6.
  • the control circuit 6 treats the MDA value as the SDA regardless of the SDA value.
  • FIG. 5 is an example of a signal waveform when the sensor is connected to the terminal.
  • a signal waveform when a command is transmitted from the physical quantity measuring device 1 to the humidity sensor 9 is illustrated.
  • the control circuit 6 always sets the MAS signal to the VINT level during normal operation (when the sensor is connected).
  • the mask circuit 21 outputs the SDA to the control circuit 6 as it is. Therefore, even if the mask circuit 21 is arranged on the input line between the input / output circuit 2 and the control circuit 6, the SDA value received by the control circuit 6 does not change. That is, the control circuit 6 can receive ACK as a communication confirmation signal.
  • FIG. 6 is an example of a signal waveform when the sensor is not connected to the terminal.
  • a signal waveform when a command is transmitted from the physical quantity measuring device 1 to the humidity sensor 9 is illustrated.
  • the control circuit 6 sets the MAS to 0V at the same timing as the ACK.
  • the mask circuit 21 sets the MDA to 0V regardless of the value of the SDA.
  • the control circuit 6 recognizes that the SDA is 0V, and therefore receives ACK as a communication confirmation signal.
  • the timing at which the control circuit 6 receives the ACK response from the humidity sensor 9 is known to the control circuit 6 (that is, the timing of the 9th bit described in FIGS. 2 to 3). Therefore, the control circuit 6 may set the MAS to 0V according to the timing. In other words, the mask circuit 21 outputs the same signal as the ACK to the control circuit 6 by setting the MDA to 0V at the timing when the control circuit 6 should receive the ACK while synchronizing with the synchronization signal (SCL) in the I2C communication. ..
  • FIG. 7 is a circuit configuration diagram showing a modified example of the physical quantity measuring device 1 according to the first embodiment.
  • the flow rate sensor 8 is incorporated inside the physical quantity measuring device 1.
  • Other configurations are the same as those in FIGS. 4 to 6. Also in the configuration of FIG. 7, the same effect can be exhibited by overwriting the SDA when the humidity sensor 9 is not connected by the mask circuit 21.
  • the mask circuit 21 (a) outputs the SDA to the control circuit 6 as it is when the MAS signal is at the VINT level, and (b) when the MAS is 0V, the MDA does not depend on the SDA value. Was set to 0V. This operation may be reversed. That is, when the MAS is 0V, the SDA may be output as it is, and when the MAS is VINT, the MDA may always be 0V. In other words, the operation of the mask circuit 21 may be inverted by inverting the MAS level input to the mask circuit 21.
  • FIG. 8 is an example of a signal waveform when the sensor is not connected to the terminal.
  • a signal waveform when the physical quantity measuring device 1 receives data from the humidity sensor 9 is illustrated. Even when data is received, the control circuit 6 performs communication diagnosis every 9 bits of the SCL. Therefore, as in the first embodiment, the burn-in signal is input to the terminal 20 at the time of the burn-in test.
  • the control circuit 6 While the burn-in signal is being input to the terminal 20, the control circuit 6 sets MAS to 0V at the same timing as ACK. When the MAS is 0V, the mask circuit 21 sets the MDA to 0V regardless of the value of the SDA. As a result, even if the actual SDA is at the VINT level, the control circuit 6 recognizes that the SDA is 0V, and therefore receives ACK as a communication confirmation signal. Therefore, even when the data reception process from the humidity sensor 9 is performed in the burn-in test process, the process can be continued assuming that the communication is normal as in the first embodiment.
  • NACK may be inserted immediately before STOP CONDITION after data reception.
  • the control circuit 6 sets the MAS to the VINT level at the same timing as NACK. Since the mask circuit 21 outputs the SDA as it is when the MAS is at the VINT level, it is output as it is to the control circuit 6 when the SDA is at the VINT level. Therefore, NACK can be provided immediately before STOP CONDITION.
  • FIG. 9 is another signal waveform example when the sensor is not connected to the terminal.
  • the signal waveform when the physical quantity measuring device 1 receives data from the humidity sensor 9 is illustrated.
  • an error correction code for example, Cyclic Redundancy Check: CRC code
  • CRC code Cyclic Redundancy Check
  • the error correction code is also recalculated in the control circuit 6, and if the given error correction code and the calculated error correction code do not match (for example, the humidity sensor 9 is not connected), the error correction code is recalculated in the control circuit 6 as well.
  • the control circuit 6 will diagnose a communication error. Therefore, in FIG. 9, the mask circuit 21 itself generates an error correction code corresponding to the case where it is not a communication error and outputs it to the control circuit 6. As a result, even when the humidity sensor 9 is not connected, the control circuit 6 considers that the communication confirmation signal is normal. Therefore, even when data is received from the humidity sensor 9, the communication confirmation signal can be masked as in the first embodiment.
  • the mask circuit 21 may generate a data body received from the humidity sensor 9 in addition to generating an error correction code.
  • the data body in this case needs to be different from that received by the control circuit 6 at least at the time of a communication error, but as long as it is, any data may be used.
  • the activation rate of the control circuit 6 is increased, so that the control circuit 6 can be efficiently tested at the time of the burn-in test.
  • FIG. 10 is an example of a signal waveform illustrating the operation of the physical quantity measuring device 1 according to the third embodiment of the present invention.
  • the mask circuit 21 sets the MDA to 0V at the timing of ACK when the burn-in signal is input.
  • the mask circuit 21 instead of this, the mask circuit 21 always uses the MDA regardless of the synchronization signal SCL while the burn-in signal is input (when the humidity sensor 9 is not connected to the physical quantity measuring device 1). Set to 0V.
  • the control circuit 6 always receives 0V as the SDA without depending on the timing of the communication confirmation signal. Therefore, even if the humidity sensor 9 is not connected to the terminal at the time of the burn-in test, the process after the diagnostic process can be continuously subjected to the burn-in test.
  • the operation procedure is simplified in that it is not necessary to operate the mask circuit 21 in accordance with the synchronization signal SCL. Therefore, there is an advantage that the configuration of the control circuit 6 can be simplified.
  • FIG. 11 is a circuit configuration diagram of the physical quantity measuring device 1 according to the fourth embodiment of the present invention.
  • the control circuit 6 sets the MAS to 0V in accordance with ACK.
  • the terminal 20 is not required.
  • the power supply circuit 10 In order to carry out the burn-in test, it is necessary to input a voltage higher than that during normal operation to the physical quantity measuring device 1. By inputting this high voltage to the terminal 13, the power supply circuit 10 outputs a REGOUT higher than that in the normal operation, and outputs a signal BE notifying that the high voltage is in the state to the logic circuit 7.
  • the logic circuit 7 When this signal BE is input, the logic circuit 7 notifies the control circuit 6 that the burn-in mode has been entered. Upon receiving this notification, the control circuit 6 sets the MAS to 0V. Subsequent operations are the same as in the first embodiment.
  • FIG. 12 is a graph for explaining the voltage level of REGOUT output by the power supply circuit 10.
  • the power supply circuit 10 When the VCS is within the specified range (Vmin to Vmax), the power supply circuit 10 outputs the specified voltage VINT.
  • the VCS When the VCS is Vmax or higher, the power supply circuit 10 outputs a voltage equal to or higher than VINT.
  • the logic circuit 7 receives the signal BE, the logic circuit 7 notifies the control circuit 6 that the burn-in mode has been entered.
  • FIG. 13 is a circuit configuration diagram of the physical quantity measuring device 1 according to the fifth embodiment of the present invention.
  • the transition to the burn-in mode is performed by inputting a voltage higher than that during normal operation to the VCS.
  • the burn-in mode is entered by inputting a voltage equal to or higher than the threshold value to the terminal 20.
  • Other configurations are the same as those of the first and fourth embodiments.
  • FIG. 14 is a graph illustrating the voltage level of REGOUT output by the power supply circuit 10.
  • the burn-in signal BURN is BT or less
  • the power supply circuit 10 outputs a specified voltage VINT.
  • the power supply circuit 10 outputs a voltage of VINT or more.
  • the logic circuit 7 notifies the control circuit 6 that the burn-in mode has been entered. That is, the BURN signal having a signal level equal to or higher than BT acts as a signal instructing the transition to the burn-in mode.
  • the fifth embodiment is the same as the first embodiment in that a burn-in signal is input to the terminal 20, but (a) normal operation is performed until the burn-in signal becomes the threshold value BT or more, and (b) a power supply.
  • the circuit 10 is different from the first embodiment in that it generates an internal voltage corresponding to the signal level of the burn-in signal. That is, in the fifth embodiment, the burn-in signal has a role of designating the voltage load level in the burn-in mode in addition to instructing the shift to the burn-in mode. This allows burn-in tests to be performed at various voltage load levels.
  • FIG. 15 is a circuit configuration diagram of the physical quantity measuring device 1 according to the sixth embodiment of the present invention.
  • the mask circuit 21 is arranged on the input line for inputting the SDA from the input / output circuit 2 to the control circuit 6.
  • the mask circuit 21 is arranged on the output line that outputs the SDA from the control circuit 6 to the input / output circuit 2. That is, the mask circuit 21 is arranged at a position where the DAD output by the control circuit 6 is received before the input / output circuit 2. If the MAS is at the VINT level, the mask circuit 21 outputs the DAD as an MDA as it is, and if the MAS is 0V, the mask circuit 21 outputs the VINT as the MDA regardless of the value of the DAD.
  • the input / output circuit 2 outputs a signal level in which the MDA is inverted. Specifically, when the gate is OFF (when MDA is 0V), the output level is fixed to the VINT side by the pull-up resistor 3, and when the gate is ON (when MDA is VINT level), the output level is short-circuited with the ground to set the output level. It is fixed at 0V.
  • FIG. 16 is an example of a signal waveform illustrating the operation of the physical quantity measuring device 1 in the sixth embodiment.
  • the control circuit 6 sets the MAS to 0V at the same timing as the ACK.
  • the mask circuit 21 sets the MDA to VINT when the MAS is 0V, regardless of the value of the DAD. Since the input / output circuit 2 outputs the signal level in which the MDA is inverted as the SDA, the SDA becomes 0V at the ACK timing. As a result, the control circuit 6 recognizes that the SDA is 0V, and therefore receives ACK as a communication confirmation signal. Therefore, the same operation as in the first embodiment can be realized.
  • the present invention is not limited to the above embodiment, and includes various modifications.
  • the above-described embodiment has been described in detail in order to explain the present invention in an easy-to-understand manner, and is not necessarily limited to the one including all the described configurations.
  • control circuit 6 and the logic circuit 7 can be configured by hardware such as a circuit device that implements these functions, and software that implements these functions is provided by a CPU (Central Processing Unit) or the like. It can also be configured by executing the arithmetic unit of. Further, in the present embodiment, the communication method has been described by taking I2C communication as an example, but it can also be applied to a communication protocol for performing communication confirmation such as CAN (Control Area Network) communication.
  • CAN Control Area Network

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Abstract

Provided is a physical quantity measurement device that makes it possible to use a simple circuit configuration to prevent signal error even when a physical quantity sensor is not connected to a sensor terminal.　This physical quantity measurement device comprises a mask circuit that is between an input/output terminal for communicating serially with a sensor and a diagnosis unit for diagnosing the sensor and is capable of masking a signal to a level at which the diagnosis unit will not operate.

Description

物理量測定装置Physical quantity measuring device
　本発明は、物理量測定装置に関する。 The present invention relates to a physical quantity measuring device.
　物理量測定装置は、例えば湿度センサや流量センサなどが物理量を計測することにより出力する計測信号を、制御回路（プロセッサなどの半導体素子）が演算処理することにより、物理量を表すデータを取得する。物理量測定装置を製造する工程において、制御回路を搭載したデバイス（例：大規模集積回路：ＬＳＩ）を検査する。検査工程においては、例えばバーンイン試験などによって初期不良を低減することを図る。バーンイン試験は、例えば温度と電圧の負荷を検査対象に対してかけることにより、初期不良を低減することを図るスクリーニング試験である。 The physical quantity measuring device acquires data representing the physical quantity by, for example, a control circuit (semiconductor element such as a processor) arithmetically processing a measurement signal output by a humidity sensor, a flow rate sensor, or the like for measuring the physical quantity. In the process of manufacturing a physical quantity measuring device, a device equipped with a control circuit (eg, a large-scale integrated circuit: LSI) is inspected. In the inspection process, for example, a burn-in test is performed to reduce initial defects. The burn-in test is a screening test aimed at reducing initial defects by, for example, applying a temperature and voltage load to an inspection target.
　下記特許文献１は、半導体ウェハのバーンイン方法について記載している。同文献は、『半導体ウェハのダイシング後にセンサ素子が接続される入出力端子をもつＩＣチップにおいて、センサ素子を模擬したダミー回路をウェハ外部に必要としない半導体ウェハでのバーンイン方法を提供する。』ことを課題として、『半導体ウェハ上に形成されたＩＣチップにおいて、センサ素子が接続される入出力端子の内部にスイッチング素子を介してダミー回路を形成する。スイッチング素子はモード端子の入力電圧レベルによってバーンイン時のみＯＮするように制御されることにより、その入出力端子へのプロービングをせずにバーンインが可能となる。又、通常動作時にはモード端子の入力電圧レベルによってスイッチング素子がＯＦＦとなり外部センサ回路接続時には影響がない。』という技術を開示している（要約参照）。 The following Patent Document 1 describes a burn-in method for a semiconductor wafer. The document provides "a burn-in method for a semiconductor wafer that does not require a dummy circuit simulating a sensor element outside the wafer in an IC chip having an input / output terminal to which a sensor element is connected after dicing the semiconductor wafer. "In an IC chip formed on a semiconductor wafer, a dummy circuit is formed inside an input / output terminal to which a sensor element is connected via a switching element." Since the switching element is controlled to be turned on only at the time of burn-in by the input voltage level of the mode terminal, burn-in is possible without probing to the input / output terminal. Further, during normal operation, the switching element is turned off depending on the input voltage level of the mode terminal, and there is no effect when the external sensor circuit is connected. 』Disclosures the technology (see summary).
特開２０１８－１３６１９７号公報Japanese Unexamined Patent Publication No. 2018-136197
　物理量測定装置が備える制御回路は、センサ端子を介して物理量センサ（湿度センサなど）と接続された状態で運用される。したがって、センサ端子に物理量センサが接続されていない場合、制御回路は信号エラーと判断することになる。 The control circuit provided in the physical quantity measuring device is operated in a state of being connected to a physical quantity sensor (humidity sensor, etc.) via a sensor terminal. Therefore, if the physical quantity sensor is not connected to the sensor terminal, the control circuit determines that the signal error occurs.
　物理量測定装置の検査工程を効率化するためには、ウェハ単位でバーンイン試験を実施することが望ましい。すなわち、ウェハ上の複数の物理量測定装置に対してバーンイン試験を実施することが望ましい。しかし、ウェハ状態では個々の物理量測定装置に物理量センサを接続することができないため、物理量測定装置に物理量センサとの通信確認する診断機能がある場合、バーンイン試験を実施している間において、制御回路は信号エラーが生じていると判断する。そうすると、制御回路はその信号エラー以降の処理へ進むことができないので、温度負荷や電圧負荷をかけたとしても、制御回路が実施する処理のうち一部のみしか検査されないことになる。これにより、初期不良の検出精度が低下する。 In order to streamline the inspection process of the physical quantity measuring device, it is desirable to carry out a burn-in test on a wafer-by-wafer basis. That is, it is desirable to carry out a burn-in test on a plurality of physical quantity measuring devices on a wafer. However, since the physical quantity sensor cannot be connected to each physical quantity measuring device in the wafer state, if the physical quantity measuring device has a diagnostic function for confirming communication with the physical quantity sensor, the control circuit is performed during the burn-in test. Determines that a signal error has occurred. Then, since the control circuit cannot proceed to the processing after the signal error, even if a temperature load or a voltage load is applied, only a part of the processing performed by the control circuit is inspected. As a result, the accuracy of detecting initial defects is reduced.
　特許文献１においては、内蔵したダミー回路をＯＮ／ＯＦＦすることにより、バーンイン試験において物理量センサを模擬し、これにより信号エラーを回避している。しかしダミー回路は相応の回路規模が必要なので、半導体ウェハのコストが上昇するという課題がある。 In Patent Document 1, a physical quantity sensor is simulated in a burn-in test by turning on / off a built-in dummy circuit, thereby avoiding a signal error. However, since the dummy circuit requires a suitable circuit scale, there is a problem that the cost of the semiconductor wafer increases.
　本発明は、上記課題に鑑みてなされたものであり、センサ端子に物理量センサが接続されていなくとも、簡易な回路構成によって信号エラーを回避することができる、物理量測定装置を提供することを目的とする。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a physical quantity measuring device capable of avoiding a signal error by a simple circuit configuration even if a physical quantity sensor is not connected to a sensor terminal. And.
　本発明に係る物理量測定装置は、センサとシリアル通信する入出力端子と、センサを診断する診断部との間に、前記診断部が動作しないレベルに信号をマスクすることができるマスク回路を有する。 The physical quantity measuring device according to the present invention has a mask circuit capable of masking a signal to a level at which the diagnostic unit does not operate, between an input / output terminal that serially communicates with the sensor and a diagnostic unit that diagnoses the sensor.
　本発明に係る物理量測定装置によれば、センサ端子に物理量センサが接続されていなくとも、信号エラーを回避することができる。またマスク回路は簡易に実装できるので、簡易な回路構成によって上記効果を発揮できる。 According to the physical quantity measuring device according to the present invention, a signal error can be avoided even if the physical quantity sensor is not connected to the sensor terminal. Further, since the mask circuit can be easily mounted, the above effect can be exhibited by a simple circuit configuration.
従来の物理量測定装置１の回路構成図である。It is a circuit block diagram of the conventional physical quantity measuring apparatus 1. センサが端子に接続されている場合における信号波形例である。This is an example of a signal waveform when a sensor is connected to a terminal. センサが端子に接続されていない場合における信号波形例である。This is an example of a signal waveform when the sensor is not connected to the terminal. 実施形態１に係る物理量測定装置１の回路構成図である。It is a circuit block diagram of the physical quantity measuring apparatus 1 which concerns on Embodiment 1. FIG. センサが端子に接続されている場合における信号波形例である。This is an example of a signal waveform when a sensor is connected to a terminal. センサが端子に接続されていない場合における信号波形例である。This is an example of a signal waveform when the sensor is not connected to the terminal. 実施形態１に係る物理量測定装置１の変形例を示す回路構成図である。It is a circuit block diagram which shows the modification of the physical quantity measuring apparatus 1 which concerns on Embodiment 1. FIG. センサが端子に接続されていない場合における信号波形例である。This is an example of a signal waveform when the sensor is not connected to the terminal. センサが端子に接続されていない場合における別の信号波形例である。This is another example of a signal waveform when the sensor is not connected to the terminal. 実施形態３に係る物理量測定装置１の動作を説明する信号波形の例である。This is an example of a signal waveform for explaining the operation of the physical quantity measuring device 1 according to the third embodiment. 実施形態４に係る物理量測定装置１の回路構成図である。It is a circuit block diagram of the physical quantity measuring apparatus 1 which concerns on Embodiment 4. FIG. 電源回路１０が出力するＲＥＧＯＵＴの電圧レベルを説明するグラフである。It is a graph explaining the voltage level of REGOUT output by a power supply circuit 10. 実施形態５に係る物理量測定装置１の回路構成図である。It is a circuit block diagram of the physical quantity measuring apparatus 1 which concerns on Embodiment 5. 電源回路１０が出力するＲＥＧＯＵＴの電圧レベルを説明するグラフである。It is a graph explaining the voltage level of REGOUT output by a power supply circuit 10. 実施形態６に係る物理量測定装置１の回路構成図である。It is a circuit block diagram of the physical quantity measuring apparatus 1 which concerns on Embodiment 6. 実施形態６における物理量測定装置１の動作を説明する信号波形の例である。This is an example of a signal waveform for explaining the operation of the physical quantity measuring device 1 in the sixth embodiment.
＜従来の回路構成について＞　図１は、従来の物理量測定装置１の回路構成図である。物理量測定装置１は、流量センサ８や湿度センサ９が物理量を計測することにより出力する計測信号を受け取り、その計測信号を演算処理することにより、その物理量を表すデータを出力する装置である。物理量測定装置１は、端子１６と１７を介して流量センサ８と接続され、端子１８と１９を介して湿度センサ９と接続されている。 <Conventional circuit configuration> FIG. 1 is a circuit configuration diagram of the conventional physical quantity measuring device 1. The physical quantity measuring device 1 is a device that receives a measurement signal output by the flow rate sensor 8 and the humidity sensor 9 by measuring the physical quantity, and outputs data representing the physical quantity by arithmetically processing the measurement signal. The physical quantity measuring device 1 is connected to the flow rate sensor 8 via terminals 16 and 17, and is connected to the humidity sensor 9 via terminals 18 and 19.
　ＡＤコンバータ５は、端子１６と１７からそれぞれ信号ＱＨとＱＬを受け取り、これらをデジタル信号に変換して論理回路７へ出力する。信号ＱＨと信号ＱＬの差電圧は、流量の変化を表す信号である。 The AD converter 5 receives signals QH and QL from terminals 16 and 17, respectively, converts them into digital signals, and outputs them to the logic circuit 7. The difference voltage between the signal QH and the signal QL is a signal representing a change in the flow rate.
　物理量測定装置１は、２つの入出力回路２を備えている。入出力回路２のうち一方は、端子１８との間で信号ＳＤＡを送受信し、さらに信号ＳＤＡを制御回路６との間で送受信する。信号ＳＤＡは、Ｉ２Ｃ（Ｉｎｔｅｒ－Ｉｎｔｅｇｒａｔｅｄ　Ｃｉｒｃｕｉｔ）通信におけるデータ送受信のための信号である。入出力回路２のうちもう一方は、端子１９との間で信号ＳＣＬを送受信し、さらに信号ＳＣＬを制御回路６との間で送受信する。信号ＳＣＬは、Ｉ２Ｃ通信における同期信号である。 The physical quantity measuring device 1 includes two input / output circuits 2. One of the input / output circuits 2 transmits and receives the signal SDA to and from the terminal 18, and further transmits and receives the signal SDA to and from the control circuit 6. The signal SDA is a signal for transmitting and receiving data in I2C (Inter-Integrated Circuit) communication. The other of the input / output circuits 2 transmits and receives the signal SCL to and from the terminal 19, and further transmits and receives the signal SCL to and from the control circuit 6. The signal SCL is a synchronization signal in I2C communication.
　入出力回路２は、プルアップ抵抗３とＮＭＯＳトランジスタ４を備える。制御回路６は、信号ＤＡＤまたはＣＬＤによってＮＭＯＳトランジスタ４をＯＮ／ＯＦＦする。すなわち信号ＤＡＤと信号ＣＬＤはそれぞれ、入出力回路２が出力する信号レベルを反転させる。プルアップ抵抗３は、ＮＭＯＳトランジスタ４がＯＦＦのときＳＤＡの信号レベルをＲＥＧＯＵＴ（後述）に固定する。 The input / output circuit 2 includes a pull-up resistor 3 and an NMOS transistor 4. The control circuit 6 turns on / off the NMOS transistor 4 by the signal DAD or CLD. That is, each of the signal DAD and the signal CLD inverts the signal level output by the input / output circuit 2. The pull-up resistor 3 fixes the signal level of the SDA to REGOUT (described later) when the NMOS transistor 4 is OFF.
　制御回路６は、入出力回路２を制御するとともに、湿度センサ９と物理量測定装置１との間の通信が正常であるか否かを診断する。論理回路７は、発振回路１２が出力する発振信号に対応する周波数で動作する。論理回路７は、各センサから取得した計測値を補正するなどの処理を実施することにより、各センサが計測した物理量を表すデータを生成し、出力回路１１と端子１４を介してそのデータを出力する。 The control circuit 6 controls the input / output circuit 2 and diagnoses whether or not the communication between the humidity sensor 9 and the physical quantity measuring device 1 is normal. The logic circuit 7 operates at a frequency corresponding to the oscillation signal output by the oscillation circuit 12. The logic circuit 7 generates data representing the physical quantity measured by each sensor by performing processing such as correcting the measured value acquired from each sensor, and outputs the data via the output circuit 11 and the terminal 14. do.
　電源回路１０は、端子１３を介して入力電圧ＶＣＣを受け取り、これを物理量測定装置１の動作電圧（内部電圧と呼ぶ場合もある）に降圧することにより、電圧ＲＥＧＯＵＴを生成する。端子１５はＧＮＤと接続されている。 The power supply circuit 10 receives the input voltage VCS via the terminal 13 and steps it down to the operating voltage (sometimes called the internal voltage) of the physical quantity measuring device 1 to generate the voltage REGOUT. Terminal 15 is connected to GND.
　図２は、センサが端子に接続されている場合における信号波形例である。ここでは物理量測定装置１がマスタとなり、湿度センサ９がスレーブとなって、物理量測定装置１から湿度センサ９に対してコマンドを送信するときの信号波形を例示する。物理量測定装置１（制御回路６）は、ＤＡＤを操作することにより、湿度センサ９に対してアドレス（図２のＡＤＤＲＥＳＳ）やコマンド（図２のＣＯＭＭＡＮＤ）を指定する。ビットＷはコマンド送信することを表す。 FIG. 2 is an example of a signal waveform when the sensor is connected to the terminal. Here, a signal waveform when a physical quantity measuring device 1 serves as a master and a humidity sensor 9 serves as a slave and a command is transmitted from the physical quantity measuring device 1 to the humidity sensor 9 is illustrated. The physical quantity measuring device 1 (control circuit 6) specifies an address (ADDRESS in FIG. 2) and a command (COMMAND in FIG. 2) to the humidity sensor 9 by operating the DAD. Bit W represents sending a command.
　制御回路６は、ＳＴＡＲＴ　ＣＯＮＤＩＴＩＯＮ（Ｉ２Ｃ通信を開始することを表す）後、ＳＣＬの９ビットごとに通信診断を実施する。通信が正常であればＳＤＡは０Ｖとなり、制御回路６は通信確認信号として肯定応答（ＡＣＫ）を受け取ることになる。コマンド送信を終了するときは、ＳＴＯＰ　ＣＯＮＤＩＴＩＯＮを湿度センサ９に対して出力する。 The control circuit 6 performs a communication diagnosis every 9 bits of the SCL after START CONDITION (indicating that I2C communication is started). If the communication is normal, the SDA becomes 0V, and the control circuit 6 receives an acknowledgment (ACK) as a communication confirmation signal. When the command transmission is finished, STOP CONDITION is output to the humidity sensor 9.
　図３は、センサが端子に接続されていない場合における信号波形例である。ここでは図２と同様に物理量測定装置１から湿度センサ９に対してコマンドを送信するときの信号波形を例示する。湿度センサ９が接続されていない場合、９ビット目における通信診断によって異常と診断され、ＳＤＡはＶＩＮＴレベルとなり、通信確認信号は否定応答（ＮＡＣＫ）となる。制御回路６はこの場合、直ちにＳＴＯＰ　ＣＯＮＤＩＴＩＯＮ（Ｉ２Ｃ通信を終了することを表す）を湿度センサ９に対して送信し通信を終了する。 FIG. 3 is an example of a signal waveform when the sensor is not connected to the terminal. Here, as in FIG. 2, a signal waveform when a command is transmitted from the physical quantity measuring device 1 to the humidity sensor 9 is illustrated. When the humidity sensor 9 is not connected, an abnormality is diagnosed by the communication diagnosis at the 9th bit, the SDA becomes the VINT level, and the communication confirmation signal becomes a negative response (NACK). In this case, the control circuit 6 immediately transmits STOP CONDITION (indicating that I2C communication is terminated) to the humidity sensor 9 to terminate the communication.
　通信を再開したとしても、同じく異常と判断され再び９ビット目において同様にＮＡＣＫ応答となってＳＴＯＰ　ＣＯＮＤＩＴＩＯＮが送信される。以下同様の手順が繰り返される。したがってアドレス指定処理が繰り返され湿度センサ９に対してコマンドを送信する段階まで処理が進行できないことになる。バーンイン試験においても同様に、端子にセンサが接続されていない状態で通信診断を実施することになるので、湿度センサ９に対してコマンドを送信する以降の処理は実施されない。すなわちバーンイン試験において、それ以降の動作を検査することができないので、初期不良の検出漏れが生じる可能性が高まる。 Even if the communication is restarted, it is also judged to be abnormal, and in the 9th bit again, a NACK response is obtained and STOP CONDITION is transmitted. The same procedure is repeated thereafter. Therefore, the addressing process is repeated and the process cannot proceed to the stage where the command is transmitted to the humidity sensor 9. Similarly, in the burn-in test, the communication diagnosis is performed in a state where the sensor is not connected to the terminal, so that the processing after the command is transmitted to the humidity sensor 9 is not performed. That is, in the burn-in test, it is not possible to inspect the operation after that, so that the possibility of omission of detection of initial defects increases.
　本発明は、以上説明したような課題に鑑みて、センサを接続していない場合においても通信異常を診断されることを回避し、バーンイン試験を適正に実施するための構成を提案する。 In view of the above-described problems, the present invention proposes a configuration for properly performing a burn-in test while avoiding being diagnosed with a communication abnormality even when the sensor is not connected.
＜実施の形態１＞　図４は、本発明の実施形態１に係る物理量測定装置１の回路構成図である。本実施形態１に係る物理量測定装置１は、入出力回路２（ＳＤＡを送受信する側）と制御回路６との間にマスク回路２１を備える。マスク回路２１は、入出力回路２と制御回路６との間の入力線（制御回路６が湿度センサ９から信号を受け取るとき用いる信号線）上に配置されている。したがってマスク回路２１は、湿度センサ９が出力する信号を制御回路６よりも前に受け取ることになる。物理量測定装置１はさらに、バーンイン信号を入力するための端子２０を備える。その他構成は概ね図１と同様であるので、以下では主にマスク回路２１と端子２０に関する差異点について説明する。 <Embodiment 1> FIG. 4 is a circuit configuration diagram of the physical quantity measuring device 1 according to the first embodiment of the present invention. The physical quantity measuring device 1 according to the first embodiment includes a mask circuit 21 between the input / output circuit 2 (the side that transmits / receives SDA) and the control circuit 6. The mask circuit 21 is arranged on an input line (a signal line used when the control circuit 6 receives a signal from the humidity sensor 9) between the input / output circuit 2 and the control circuit 6. Therefore, the mask circuit 21 receives the signal output by the humidity sensor 9 before the control circuit 6. The physical quantity measuring device 1 further includes a terminal 20 for inputting a burn-in signal. Since other configurations are substantially the same as those in FIG. 1, the differences between the mask circuit 21 and the terminal 20 will be mainly described below.
　マスク回路２１は、入出力回路２が出力する信号ＳＤＡを上書することにより信号ＭＤＡを生成し、信号ＭＤＡを制御回路６に対して出力する。マスク回路２１は、制御回路６が出力する信号ＭＡＳにしたがって、ＳＤＡを上書するか否かを切り替える。マスク回路２１がＳＤＡを上書することにより、ＳＤＡの値によらず、制御回路６はＭＤＡの値をＳＤＡとして取り扱うことになる。 The mask circuit 21 generates a signal MDA by overwriting the signal SDA output by the input / output circuit 2, and outputs the signal MDA to the control circuit 6. The mask circuit 21 switches whether or not to overwrite the SDA according to the signal MAS output by the control circuit 6. By overwriting the SDA by the mask circuit 21, the control circuit 6 treats the MDA value as the SDA regardless of the SDA value.
　図５は、センサが端子に接続されている場合における信号波形例である。ここでは図２と同様に物理量測定装置１から湿度センサ９に対してコマンドを送信するときの信号波形を例示する。制御回路６は、通常動作時（センサが接続されているとき）はＭＡＳ信号を常にＶＩＮＴレベルとする。マスク回路２１は、ＭＡＳ信号がＶＩＮＴレベルのときは、ＳＤＡをそのまま制御回路６に対して出力する。したがって、マスク回路２１が入出力回路２と制御回路６との間の入力線上に配置されていても、制御回路６が受け取るＳＤＡの値は変わらない。すなわち制御回路６は、通信確認信号としてＡＣＫを受け取ることができる。 FIG. 5 is an example of a signal waveform when the sensor is connected to the terminal. Here, as in FIG. 2, a signal waveform when a command is transmitted from the physical quantity measuring device 1 to the humidity sensor 9 is illustrated. The control circuit 6 always sets the MAS signal to the VINT level during normal operation (when the sensor is connected). When the MAS signal is at the VINT level, the mask circuit 21 outputs the SDA to the control circuit 6 as it is. Therefore, even if the mask circuit 21 is arranged on the input line between the input / output circuit 2 and the control circuit 6, the SDA value received by the control circuit 6 does not change. That is, the control circuit 6 can receive ACK as a communication confirmation signal.
　図６は、センサが端子に接続されていない場合における信号波形例である。ここでは図２と同様に物理量測定装置１から湿度センサ９に対してコマンドを送信するときの信号波形を例示する。端子２０に対してバーンイン信号が入力されている間、制御回路６は、ＡＣＫと同じタイミングにおいて、ＭＡＳを０Ｖにセットする。マスク回路２１は、ＭＡＳが０Ｖであるとき、ＳＤＡの値によらず、ＭＤＡを０Ｖにセットする。これにより、実際のＳＤＡがＶＩＮＴレベルであっても、制御回路６はＳＤＡが０Ｖであると認識するので、通信確認信号としてＡＣＫを受け取る。 FIG. 6 is an example of a signal waveform when the sensor is not connected to the terminal. Here, as in FIG. 2, a signal waveform when a command is transmitted from the physical quantity measuring device 1 to the humidity sensor 9 is illustrated. While the burn-in signal is input to the terminal 20, the control circuit 6 sets the MAS to 0V at the same timing as the ACK. When the MAS is 0V, the mask circuit 21 sets the MDA to 0V regardless of the value of the SDA. As a result, even if the actual SDA is at the VINT level, the control circuit 6 recognizes that the SDA is 0V, and therefore receives ACK as a communication confirmation signal.
　制御回路６が湿度センサ９からＡＣＫ応答を受け取るタイミングは、制御回路６にとって既知である（すなわち図２～図３において説明した９ビット目のタイミング）。したがって制御回路６は、そのタイミングに合わせてＭＡＳを０Ｖにセットすればよい。換言するとマスク回路２１は、Ｉ２Ｃ通信における同期信号（ＳＣＬ）に同期しつつ、制御回路６がＡＣＫを受け取るべきタイミングで、ＭＤＡを０ＶにセットすることによりＡＣＫと同じ信号を制御回路６へ出力する。 The timing at which the control circuit 6 receives the ACK response from the humidity sensor 9 is known to the control circuit 6 (that is, the timing of the 9th bit described in FIGS. 2 to 3). Therefore, the control circuit 6 may set the MAS to 0V according to the timing. In other words, the mask circuit 21 outputs the same signal as the ACK to the control circuit 6 by setting the MDA to 0V at the timing when the control circuit 6 should receive the ACK while synchronizing with the synchronization signal (SCL) in the I2C communication. ..
　以上の動作により、バーンイン信号が入力されている間は信号エラーを回避して、アドレス指定以降のＳＤＡ信号を送受信することができる。したがって、バーンイン試験時においてセンサが端子に接続されていない場合であっても、診断処理以降の処理を継続してバーンイン試験に供することができる。 By the above operation, it is possible to avoid a signal error while the burn-in signal is being input, and to send and receive the SDA signal after the address is specified. Therefore, even if the sensor is not connected to the terminal at the time of the burn-in test, the process after the diagnostic process can be continuously subjected to the burn-in test.
　図７は、本実施形態１に係る物理量測定装置１の変形例を示す回路構成図である。図７においては流量センサ８が物理量測定装置１内部に組み込まれている。その他構成は図４～図６と同様である。図７の構成においても、マスク回路２１によって、湿度センサ９が接続されていないときのＳＤＡを上書することにより、同様の効果を発揮できる。 FIG. 7 is a circuit configuration diagram showing a modified example of the physical quantity measuring device 1 according to the first embodiment. In FIG. 7, the flow rate sensor 8 is incorporated inside the physical quantity measuring device 1. Other configurations are the same as those in FIGS. 4 to 6. Also in the configuration of FIG. 7, the same effect can be exhibited by overwriting the SDA when the humidity sensor 9 is not connected by the mask circuit 21.
　以上の説明において、マスク回路２１は、（ａ）ＭＡＳ信号がＶＩＮＴレベルのときはＳＤＡをそのまま制御回路６に対して出力し、（ｂ）ＭＡＳが０ＶであるときはＳＤＡの値によらずＭＤＡを０Ｖにセットすることを説明した。この動作は反対であってもよい。すなわちＭＡＳが０ＶのときはＳＤＡをそのまま出力し、ＭＡＳがＶＩＮＴのときはＭＤＡを常に０Ｖとしてもよい。換言すると、マスク回路２１に対して入力するＭＡＳレベルを反転させることによりマスク回路２１の動作も反転するようにすればよい。 In the above description, the mask circuit 21 (a) outputs the SDA to the control circuit 6 as it is when the MAS signal is at the VINT level, and (b) when the MAS is 0V, the MDA does not depend on the SDA value. Was set to 0V. This operation may be reversed. That is, when the MAS is 0V, the SDA may be output as it is, and when the MAS is VINT, the MDA may always be 0V. In other words, the operation of the mask circuit 21 may be inverted by inverting the MAS level input to the mask circuit 21.
＜実施の形態２＞　実施形態１においては、物理量測定装置１が湿度センサ９に対してコマンドを送信するときにおいて、マスク回路２１によってＳＤＡをマスクする例を説明した。同様の動作は物理量測定装置１が湿度センサ９からデータを受信するときにおいても用いることができる。本発明の実施形態２ではその動作例を説明する。物理量測定装置１の構成は実施形態１と同じである。 <Embodiment 2> In the first embodiment, an example in which the SDA is masked by the mask circuit 21 when the physical quantity measuring device 1 transmits a command to the humidity sensor 9 has been described. The same operation can be used when the physical quantity measuring device 1 receives data from the humidity sensor 9. In the second embodiment of the present invention, an operation example thereof will be described. The configuration of the physical quantity measuring device 1 is the same as that of the first embodiment.
　図８は、センサが端子に接続されていない場合における信号波形例である。ここでは物理量測定装置１が湿度センサ９からデータを受信するときの信号波形を例示する。データ受信時においても、制御回路６はＳＣＬの９ビットごとに通信診断を実施する。そこで実施形態１と同様に、バーンイン試験時において端子２０に対してバーンイン信号を入力する。 FIG. 8 is an example of a signal waveform when the sensor is not connected to the terminal. Here, a signal waveform when the physical quantity measuring device 1 receives data from the humidity sensor 9 is illustrated. Even when data is received, the control circuit 6 performs communication diagnosis every 9 bits of the SCL. Therefore, as in the first embodiment, the burn-in signal is input to the terminal 20 at the time of the burn-in test.
　端子２０に対してバーンイン信号が入力されている間、制御回路６は、ＡＣＫと同じタイミングにおいて、ＭＡＳを０Ｖにセットする。マスク回路２１は、ＭＡＳが０Ｖであるとき、ＳＤＡの値によらず、ＭＤＡを０Ｖにセットする。これにより、実際のＳＤＡがＶＩＮＴレベルであっても、制御回路６はＳＤＡが０Ｖであると認識するので、通信確認信号としてＡＣＫを受け取る。したがってバーンイン試験工程のなかで湿度センサ９からのデータ受信処理を実施する場合であっても、実施形態１と同様に通信が正常であるものとして処理を継続することができる。 While the burn-in signal is being input to the terminal 20, the control circuit 6 sets MAS to 0V at the same timing as ACK. When the MAS is 0V, the mask circuit 21 sets the MDA to 0V regardless of the value of the SDA. As a result, even if the actual SDA is at the VINT level, the control circuit 6 recognizes that the SDA is 0V, and therefore receives ACK as a communication confirmation signal. Therefore, even when the data reception process from the humidity sensor 9 is performed in the burn-in test process, the process can be continued assuming that the communication is normal as in the first embodiment.
　Ｉ２Ｃ通信においては、データ受信後のＳＴＯＰ　ＣＯＮＤＩＴＩＯＮ直前にＮＡＣＫを挿入する場合がある。この場合は、ＮＡＣＫと同じタイミングにおいて、制御回路６がＭＡＳをＶＩＮＴレベルにセットする。マスク回路２１は、ＭＡＳがＶＩＮＴレベルであればＳＤＡをそのまま出力するので、ＳＤＡがＶＩＮＴレベルであればこれがそのまま制御回路６へ出力される。したがってＳＴＯＰ　ＣＯＮＤＩＴＩＯＮ直前にＮＡＣＫを設けることができる。 In I2C communication, NACK may be inserted immediately before STOP CONDITION after data reception. In this case, the control circuit 6 sets the MAS to the VINT level at the same timing as NACK. Since the mask circuit 21 outputs the SDA as it is when the MAS is at the VINT level, it is output as it is to the control circuit 6 when the SDA is at the VINT level. Therefore, NACK can be provided immediately before STOP CONDITION.
　図９は、センサが端子に接続されていない場合における別の信号波形例である。ここでは図８と同様に、物理量測定装置１が湿度センサ９からデータを受信するときの信号波形を例示する。湿度センサ９は、制御回路６に対して応答する際に、データ本体に加えて誤り訂正符号（例えばＣｙｃｌｉｃ　Ｒｅｄｕｎｄａｎｃｙ　Ｃｈｅｃｋ:ＣＲＣコード）を付与する場合がある。誤り訂正符号は制御回路６でも再計算され、付与された誤り訂正符号と計算した誤り訂正符号が不一致の場合（例えば、湿度センサ９が接続されていない）、誤り訂正符号は制御回路６でも再計算され、付与された誤り訂正符号と計算した誤り訂正符号が不一致の場合（例えば、湿度センサ９が接続されていない）、制御回路６は通信エラーであると診断することになる。そこで図９において、マスク回路２１は、通信エラーではない場合に相当する誤り訂正符号を自ら生成して制御回路６へ出力する。これにより、湿度センサ９が接続されていない場合であっても、制御回路６は通信確認信号が正常であるとみなすことになる。したがって湿度センサ９からデータ受信するときであっても、実施形態１と同様に通信確認信号をマスクすることができる。 FIG. 9 is another signal waveform example when the sensor is not connected to the terminal. Here, as in FIG. 8, the signal waveform when the physical quantity measuring device 1 receives data from the humidity sensor 9 is illustrated. When the humidity sensor 9 responds to the control circuit 6, an error correction code (for example, Cyclic Redundancy Check: CRC code) may be added in addition to the data body. The error correction code is also recalculated in the control circuit 6, and if the given error correction code and the calculated error correction code do not match (for example, the humidity sensor 9 is not connected), the error correction code is recalculated in the control circuit 6 as well. If the calculated and assigned error correction code and the calculated error correction code do not match (for example, the humidity sensor 9 is not connected), the control circuit 6 will diagnose a communication error. Therefore, in FIG. 9, the mask circuit 21 itself generates an error correction code corresponding to the case where it is not a communication error and outputs it to the control circuit 6. As a result, even when the humidity sensor 9 is not connected, the control circuit 6 considers that the communication confirmation signal is normal. Therefore, even when data is received from the humidity sensor 9, the communication confirmation signal can be masked as in the first embodiment.
　マスク回路２１は、誤り訂正符号を生成することに加えて、湿度センサ９から受信するデータ本体を生成してもよい。この場合におけるデータ本体は、少なくとも通信エラー時において制御回路６が受信するものとは異なるようにする必要があるが、その限りにおいては任意のデータでよい。これにより、正しいＣＲＣコードを模擬することに加えて、制御回路６の活性化率を上げることになるので、バーンイン試験時において制御回路６を効率的にテストすることができる。 The mask circuit 21 may generate a data body received from the humidity sensor 9 in addition to generating an error correction code. The data body in this case needs to be different from that received by the control circuit 6 at least at the time of a communication error, but as long as it is, any data may be used. As a result, in addition to simulating the correct CRC code, the activation rate of the control circuit 6 is increased, so that the control circuit 6 can be efficiently tested at the time of the burn-in test.
＜実施の形態３＞　図１０は、本発明の実施形態３に係る物理量測定装置１の動作を説明する信号波形の例である。以上の実施形態においては、バーンイン信号が入力されたとき、マスク回路２１は、ＡＣＫのタイミングでＭＤＡを０Ｖにセットすることを説明した。本実施形態３においてはこれに代えて、バーンイン信号が入力されている間（湿度センサ９が物理量測定装置１に対して未接続のとき）、マスク回路２１は同期信号ＳＣＬによらず常にＭＤＡを０Ｖにセットする。これにより、通信確認信号のタイミングに依拠することなく、制御回路６は常にＳＤＡとして０Ｖを受け取る。したがってバーンイン試験時において湿度センサ９が端子に接続されていない場合であっても、診断処理以降の処理を継続してバーンイン試験に供することができる。 <Embodiment 3> FIG. 10 is an example of a signal waveform illustrating the operation of the physical quantity measuring device 1 according to the third embodiment of the present invention. In the above embodiment, it has been described that the mask circuit 21 sets the MDA to 0V at the timing of ACK when the burn-in signal is input. In the third embodiment, instead of this, the mask circuit 21 always uses the MDA regardless of the synchronization signal SCL while the burn-in signal is input (when the humidity sensor 9 is not connected to the physical quantity measuring device 1). Set to 0V. As a result, the control circuit 6 always receives 0V as the SDA without depending on the timing of the communication confirmation signal. Therefore, even if the humidity sensor 9 is not connected to the terminal at the time of the burn-in test, the process after the diagnostic process can be continuously subjected to the burn-in test.
　本実施形態３は、同期信号ＳＣＬに合わせてマスク回路２１を動作させる必要がない点において、動作手順が簡易化されている。したがって制御回路６の構成を簡易化できる利点がある。 In the third embodiment, the operation procedure is simplified in that it is not necessary to operate the mask circuit 21 in accordance with the synchronization signal SCL. Therefore, there is an advantage that the configuration of the control circuit 6 can be simplified.
＜実施の形態４＞　図１１は、本発明の実施形態４に係る物理量測定装置１の回路構成図である。実施形態１においては、端子２０に対してバーンイン信号を入力したとき、制御回路６がＡＣＫに合わせてＭＡＳを０Ｖにセットすることを説明した。本実施形態４においてはこれに代えて、端子１３に対して通常動作時よりも高い電圧を入力することにより、バーンイン信号を入力したときと同じ動作を実施する。したがって本実施形態４において、端子２０は必要ない。 <Embodiment 4> FIG. 11 is a circuit configuration diagram of the physical quantity measuring device 1 according to the fourth embodiment of the present invention. In the first embodiment, it has been described that when a burn-in signal is input to the terminal 20, the control circuit 6 sets the MAS to 0V in accordance with ACK. In the fourth embodiment, instead of this, by inputting a voltage higher than that during normal operation to the terminal 13, the same operation as when the burn-in signal is input is performed. Therefore, in the fourth embodiment, the terminal 20 is not required.
　バーンイン試験を実施するためには、通常動作時よりも高い電圧を物理量測定装置１に対して入力する必要がある。端子１３に対してこの高電圧を入力することにより、電源回路１０は通常動作時よりも高いＲＥＧＯＵＴを出力し、高電圧を状態となったことを通知する信号ＢＥを論理回路７へ出力する。論理回路７はこの信号ＢＥが入力されると、バーンインモードに移行した旨を制御回路６へ通知する。制御回路６はこの通知を受け取ると、ＭＡＳを０Ｖにセットする。以後の動作は実施形態１と同様である。 In order to carry out the burn-in test, it is necessary to input a voltage higher than that during normal operation to the physical quantity measuring device 1. By inputting this high voltage to the terminal 13, the power supply circuit 10 outputs a REGOUT higher than that in the normal operation, and outputs a signal BE notifying that the high voltage is in the state to the logic circuit 7. When this signal BE is input, the logic circuit 7 notifies the control circuit 6 that the burn-in mode has been entered. Upon receiving this notification, the control circuit 6 sets the MAS to 0V. Subsequent operations are the same as in the first embodiment.
　図１２は、電源回路１０が出力するＲＥＧＯＵＴの電圧レベルを説明するグラフである。ＶＣＣが規定範囲内（Ｖｍｉｎ～Ｖｍａｘ）であるとき、電源回路１０は規定電圧ＶＩＮＴを出力する。ＶＣＣがＶｍａｘ以上である場合、電源回路１０はＶＩＮＴ以上の電圧を出力する。論理回路７は、信号ＢＥを受け取った場合、バーンインモードに移行した旨を制御回路６へ通知する。 FIG. 12 is a graph for explaining the voltage level of REGOUT output by the power supply circuit 10. When the VCS is within the specified range (Vmin to Vmax), the power supply circuit 10 outputs the specified voltage VINT. When the VCS is Vmax or higher, the power supply circuit 10 outputs a voltage equal to or higher than VINT. When the logic circuit 7 receives the signal BE, the logic circuit 7 notifies the control circuit 6 that the burn-in mode has been entered.
　本実施形態４においては、バーンイン試験時に用いる高電圧をバーンイン信号の代わりに用いるので、端子２０を設ける必要がない。したがって端子や配線の数を抑制できる利点がある。 In the fourth embodiment, since the high voltage used in the burn-in test is used instead of the burn-in signal, it is not necessary to provide the terminal 20. Therefore, there is an advantage that the number of terminals and wiring can be suppressed.
＜実施の形態５＞　図１３は、本発明の実施形態５に係る物理量測定装置１の回路構成図である。実施形態４においては、ＶＣＣに対して通常動作時よりも高い電圧を入力することにより、バーンインモードへ移行することを説明した。本実施形態５においては、端子２０に対して閾値以上の電圧を入力することにより、バーンインモードへ移行する。その他構成は実施形態１、４と同様である。 <Embodiment 5> FIG. 13 is a circuit configuration diagram of the physical quantity measuring device 1 according to the fifth embodiment of the present invention. In the fourth embodiment, it has been described that the transition to the burn-in mode is performed by inputting a voltage higher than that during normal operation to the VCS. In the fifth embodiment, the burn-in mode is entered by inputting a voltage equal to or higher than the threshold value to the terminal 20. Other configurations are the same as those of the first and fourth embodiments.
　図１４は、電源回路１０が出力するＲＥＧＯＵＴの電圧レベルを説明するグラフである。バーンイン信号ＢＵＲＮがＢＴ以下であるとき、電源回路１０は規定電圧ＶＩＮＴを出力する。ＢＵＲＮがＢＴ以上である場合、電源回路１０はＶＩＮＴ以上の電圧を出力する。論理回路７は、ＢＵＲＮがＢＴ以上である場合、バーンインモードに移行した旨を制御回路６へ通知する。すなわちＢＴ以上の信号レベルを有するＢＵＲＮ信号は、バーンインモードへ移行するように指示する信号として作用する。 FIG. 14 is a graph illustrating the voltage level of REGOUT output by the power supply circuit 10. When the burn-in signal BURN is BT or less, the power supply circuit 10 outputs a specified voltage VINT. When BURN is BT or more, the power supply circuit 10 outputs a voltage of VINT or more. When the BURN is BT or more, the logic circuit 7 notifies the control circuit 6 that the burn-in mode has been entered. That is, the BURN signal having a signal level equal to or higher than BT acts as a signal instructing the transition to the burn-in mode.
　本実施形態５は、端子２０に対してバーンイン信号を入力する点においては実施形態１と同様であるが、（ａ）バーンイン信号が閾値ＢＴ以上になるまでは通常動作する点、（ｂ）電源回路１０がバーンイン信号の信号レベルに対応する内部電圧を生成する点、が実施形態１とは異なる。すなわち本実施形態５において、バーンイン信号は、バーンインモードへ移行する旨を指示することに加えて、バーンインモード時における電圧負荷レベルを指定する役割をも有する。これにより様々な電圧負荷レベルでバーンイン試験を実施することができる。 The fifth embodiment is the same as the first embodiment in that a burn-in signal is input to the terminal 20, but (a) normal operation is performed until the burn-in signal becomes the threshold value BT or more, and (b) a power supply. The circuit 10 is different from the first embodiment in that it generates an internal voltage corresponding to the signal level of the burn-in signal. That is, in the fifth embodiment, the burn-in signal has a role of designating the voltage load level in the burn-in mode in addition to instructing the shift to the burn-in mode. This allows burn-in tests to be performed at various voltage load levels.
＜実施の形態６＞　図１５は、本発明の実施形態６に係る物理量測定装置１の回路構成図である。実施形態１～５においては、入出力回路２から制御回路６へＳＤＡを入力する入力線上にマスク回路２１を配置した。本実施形態６においてはこれに代えて、制御回路６から入出力回路２へＳＤＡを出力する出力線上にマスク回路２１を配置する。すなわちマスク回路２１は、制御回路６が出力するＤＡＤを入出力回路２よりも前に受け取る位置に配置されていることになる。マスク回路２１は、ＭＡＳがＶＩＮＴレベルであればＤＡＤをそのままＭＤＡとして出力し、ＭＡＳが０ＶであればＤＡＤの値によらずＶＩＮＴをＭＤＡとして出力する。 <Embodiment 6> FIG. 15 is a circuit configuration diagram of the physical quantity measuring device 1 according to the sixth embodiment of the present invention. In the first to fifth embodiments, the mask circuit 21 is arranged on the input line for inputting the SDA from the input / output circuit 2 to the control circuit 6. In the sixth embodiment, instead of this, the mask circuit 21 is arranged on the output line that outputs the SDA from the control circuit 6 to the input / output circuit 2. That is, the mask circuit 21 is arranged at a position where the DAD output by the control circuit 6 is received before the input / output circuit 2. If the MAS is at the VINT level, the mask circuit 21 outputs the DAD as an MDA as it is, and if the MAS is 0V, the mask circuit 21 outputs the VINT as the MDA regardless of the value of the DAD.
　入出力回路２は、ＭＤＡを反転した信号レベルを出力する。具体的には、ゲートＯＦＦ時（ＭＤＡが０Ｖとき）はプルアップ抵抗３によって出力レベルをＶＩＮＴ側に固定し、ゲートＯＮ時（ＭＤＡがＶＩＮＴレベルのとき）はグラウンドと短絡することにより出力レベルを０Ｖに固定する。 The input / output circuit 2 outputs a signal level in which the MDA is inverted. Specifically, when the gate is OFF (when MDA is 0V), the output level is fixed to the VINT side by the pull-up resistor 3, and when the gate is ON (when MDA is VINT level), the output level is short-circuited with the ground to set the output level. It is fixed at 0V.
　図１６は、本実施形態６における物理量測定装置１の動作を説明する信号波形の例である。端子２０に対してバーンイン信号が入力されている間、制御回路６は、ＡＣＫと同じタイミングにおいて、ＭＡＳを０Ｖにセットする。マスク回路２１は、ＭＡＳが０Ｖであるとき、ＤＡＤの値によらず、ＭＤＡをＶＩＮＴにセットする。入出力回路２はＭＤＡを反転した信号レベルをＳＤＡとして出力するので、ＡＣＫのタイミングにおいてＳＤＡは０Ｖとなる。これにより制御回路６はＳＤＡが０Ｖであると認識するので、通信確認信号としてＡＣＫを受け取る。したがって実施形態１と同様の動作を実現できる。 FIG. 16 is an example of a signal waveform illustrating the operation of the physical quantity measuring device 1 in the sixth embodiment. While the burn-in signal is input to the terminal 20, the control circuit 6 sets the MAS to 0V at the same timing as the ACK. The mask circuit 21 sets the MDA to VINT when the MAS is 0V, regardless of the value of the DAD. Since the input / output circuit 2 outputs the signal level in which the MDA is inverted as the SDA, the SDA becomes 0V at the ACK timing. As a result, the control circuit 6 recognizes that the SDA is 0V, and therefore receives ACK as a communication confirmation signal. Therefore, the same operation as in the first embodiment can be realized.
＜本発明の変形例について＞　本発明は上記実施形態に限定されるものではなく、様々な変形例が含まれる。例えば、上記実施形態は本発明を分かりやすく説明するために詳細に説明したものであり、必ずしも説明した全ての構成を備えるものに限定されるものではない。また、ある実施形態の構成の一部を他の実施形態の構成に置き換えることが可能であり、また、ある実施形態の構成に他の実施形態の構成を加えることも可能である。また、各実施形態の構成の一部について、他の構成の追加・削除・置換をすることが可能である。 <About Modifications of the Present Invention> The present invention is not limited to the above embodiment, and includes various modifications. For example, the above-described embodiment has been described in detail in order to explain the present invention in an easy-to-understand manner, and is not necessarily limited to the one including all the described configurations. Further, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Further, it is possible to add / delete / replace other configurations with respect to a part of the configurations of each embodiment.
　以上の実施形態においては、湿度センサ９が物理量測定装置１に対して接続されていなくともバーンイン試験を適切に実施する例を説明したが、マスク回路２１が通信確認信号をマスクすることができるのであれば、その他センサについても本発明と同様の効果を発揮することができる。 In the above embodiment, an example in which the burn-in test is appropriately performed even if the humidity sensor 9 is not connected to the physical quantity measuring device 1 has been described, but since the mask circuit 21 can mask the communication confirmation signal. If so, the same effect as that of the present invention can be exhibited for other sensors.
　以上の実施形態において、制御回路６や論理回路７は、これらの機能を実装した回路デバイスなどのハードウェアによって構成することもできるし、これらの機能を実装したソフトウェアをＣＰＵ（Ｃｅｎｔｒａｌ　Ｐｒｏｃｅｓｓｉｎｇ　Ｕｎｉｔ）などの演算装置が実行することによって構成することもできる。また、本実施形態において、通信方式はＩ２Ｃ通信を例に説明したが、ＣＡＮ（Ｃｏｎｔｒｏｌｌｅｒ　Ａｒｅａ　Ｎｅｔｗｏｒｋ）通信など、通信確認を実施する通信プロトコルにおいても適用することができる。 In the above embodiment, the control circuit 6 and the logic circuit 7 can be configured by hardware such as a circuit device that implements these functions, and software that implements these functions is provided by a CPU (Central Processing Unit) or the like. It can also be configured by executing the arithmetic unit of. Further, in the present embodiment, the communication method has been described by taking I2C communication as an example, but it can also be applied to a communication protocol for performing communication confirmation such as CAN (Control Area Network) communication.
１：物理量測定装置２：入出力回路３：プルアップ抵抗４：ＮＭＯＳトランジスタ５：ＡＤコンバータ６：制御回路７：論理回路８：流量センサ９：湿度センサ１０：電源回路１１：出力回路１２：発振回路１３：端子１４～２０：端子 1: Physical quantity measuring device 2: Input / output circuit 3: Pull-up resistor 4: NMOS transistor 5: AD converter 6: Control circuit 7: Logic circuit 8: Flow sensor 9: Humidity sensor 10: Power supply circuit 11: Output circuit 12: Oscillation Circuit 13: Terminals 14 to 20: Terminals

Claims (15)

  1. 　センサとのシリアル通信用の入出力端子部と、前記入出力端子から入力される信号を診断する診断部と、を有する半導体素子を備える物理量測定装置において、
    　前記半導体素子は、前記入出力端子と前記診断部の間に設けられ、前記診断部が動作しないレベルに信号をマスク可能なマスク回路を有する、
    　物理量測定装置。     In a physical quantity measuring device including a semiconductor element having an input / output terminal unit for serial communication with a sensor and a diagnostic unit for diagnosing a signal input from the input / output terminal.
    The semiconductor element is provided between the input / output terminal and the diagnostic unit, and has a mask circuit capable of masking a signal to a level at which the diagnostic unit does not operate.
    Physical quantity measuring device.
  2. 　前記半導体素子は第１端子を有し、
    　前記マスク回路は、前記第１端子が第１電圧レベルの場合には動作し、第２電圧レベルの場合には動作せず、
    　前記第１電圧レベルはバーンインの際に設定され、
    　前記第２電圧レベルは製品実装の際に設定される、
    　請求項１記載の物理量測定装置。     The semiconductor element has a first terminal and has a first terminal.
    The mask circuit operates when the first terminal is at the first voltage level and does not operate when the first terminal is at the second voltage level.
    The first voltage level is set at the time of burn-in,
    The second voltage level is set at the time of product mounting.
    The physical quantity measuring device according to claim 1.
  3. 　前記物理量測定装置はさらに、前記入出力端子との間で信号を入出力する入出力回路を備え、
    　前記マスク回路は、前記入出力回路が前記入出力端子から受け取った信号を前記半導体素子へ伝搬する入力線に対して割り込む位置に配置されていることにより、前記入出力回路が前記入出力端子から受け取った信号を前記半導体素子よりも前に受け取る、
    　請求項１記載の物理量測定装置。     The physical quantity measuring device further includes an input / output circuit for inputting / outputting a signal to / from the input / output terminal.
    The mask circuit is arranged at a position where the input / output circuit interrupts the signal received from the input / output terminal with respect to the input line propagating to the semiconductor element, so that the input / output circuit is inserted from the input / output terminal. Receives the received signal before the semiconductor element,
    The physical quantity measuring device according to claim 1.
  4. 　前記マスク回路は、前記シリアル通信の同期信号と同期することにより、前記入出力端子から入力される通信確認信号を前記診断部が受け取るタイミングで、その通信確認信号を前記診断部が動作しないレベルにマスクする、
    　請求項１記載の物理量測定装置。     By synchronizing with the synchronization signal of the serial communication, the mask circuit brings the communication confirmation signal to a level at which the diagnosis unit does not operate at the timing when the diagnosis unit receives the communication confirmation signal input from the input / output terminal. To mask
    The physical quantity measuring device according to claim 1.
  5. 　前記半導体素子は、前記入出力端子を介して、流量センサまたは湿度センサのうち少なくともいずれかと接続できるように構成されており、
    　前記診断部は、前記入出力端子を介して接続された前記流量センサまたは前記湿度センサを診断する、
    　請求項１記載の物理量測定装置。     The semiconductor element is configured to be connected to at least one of a flow rate sensor and a humidity sensor via the input / output terminal.
    The diagnostic unit diagnoses the flow rate sensor or the humidity sensor connected via the input / output terminal.
    The physical quantity measuring device according to claim 1.
  6. 　前記マスク回路は、前記第１電圧レベルを前記マスク回路に対して入力している間は、前記入出力端子から入力された信号レベルを、前記診断部が動作しないレベルにマスクした信号レベルを出力する、
    　請求項２記載の物理量測定装置。     While the first voltage level is being input to the mask circuit, the mask circuit outputs a signal level obtained by masking the signal level input from the input / output terminals to a level at which the diagnostic unit does not operate. do,
    The physical quantity measuring device according to claim 2.
  7. 　前記マスク回路は、前記第２電圧レベルを前記マスク回路に対して入力している間は、前記入出力端子から入力された信号レベルと同じ信号レベルを出力する、
    　請求項６記載の物理量測定装置。     The mask circuit outputs the same signal level as the signal level input from the input / output terminal while the second voltage level is input to the mask circuit.
    The physical quantity measuring device according to claim 6.
  8. 　前記診断部は、前記入出力端子から入力される信号に誤り訂正符号が付与されている場合は、その誤り訂正符号が正常であるか否かを診断することにより、前記入出力端子から入力される信号が正常であるか否かを診断するように構成されており、
    　前記マスク回路は、前記入出力端子から入力される信号がエラーではない場合に対応する誤り訂正符号を生成して前記診断部へ出力することにより、前記入出力端子から入力される信号を前記診断部が正常と診断するように動作する、
    　請求項１記載の物理量測定装置。     When an error correction code is added to the signal input from the input / output terminal, the diagnosis unit diagnoses whether or not the error correction code is normal, so that the signal is input from the input / output terminal. It is configured to diagnose whether the signal is normal or not.
    The mask circuit generates an error correction code corresponding to the case where the signal input from the input / output terminal is not an error and outputs the error correction code to the diagnostic unit to diagnose the signal input from the input / output terminal. The part works to diagnose normal,
    The physical quantity measuring device according to claim 1.
  9. 　前記診断部は、前記入出力端子から入力される信号に誤り訂正符号が付与されている場合は、その誤り訂正符号が正常であるか否かを診断することにより、前記入出力端子から入力される信号が正常であるか否かを診断するように構成されており、
    　前記マスク回路は、前記診断部がエラーとして取り扱わない信号を生成して前記診断部へ出力するとともに、その信号の誤り訂正符号を生成して前記診断部へ出力することにより、前記入出力端子から入力される信号を前記診断部が正常と診断するように動作する、　請求項１記載の物理量測定装置。     When an error correction code is added to the signal input from the input / output terminal, the diagnosis unit diagnoses whether or not the error correction code is normal, so that the signal is input from the input / output terminal. It is configured to diagnose whether the signal is normal or not.
    The mask circuit generates a signal that the diagnostic unit does not handle as an error and outputs it to the diagnostic unit, and also generates an error correction code for the signal and outputs the signal to the diagnostic unit from the input / output terminal. The physical quantity measuring device according to claim 1, wherein the diagnostic unit operates so as to diagnose the input signal as normal.
  10. 　前記マスク回路は、前記第１端子に対して前記第１電圧レベルを有する信号が入力されている間は、前記シリアル通信の同期信号がいずれの値であるかによらず、前記入出力端子から入力される通信確認信号を前記診断部が動作しないレベルにマスクする、
    　請求項２記載の物理量測定装置。     In the mask circuit, while a signal having the first voltage level is input to the first terminal, the input / output terminal is used regardless of the value of the serial communication synchronization signal. Mask the input communication confirmation signal to a level at which the diagnostic unit does not operate.
    The physical quantity measuring device according to claim 2.
  11. 　前記物理量測定装置はさらに、
    　前記物理量測定装置に対して電圧を入力する電源端子、
    　前記電源端子に対して入力された入力電圧を変圧することにより前記物理量測定装置が用いる内部電圧に変換する電源回路、
    　を備え、
    　前記電源回路は、前記入力電圧が第１範囲に含まれる場合は前記入力電圧を前記内部電圧に変換し、
    　前記電源回路は、前記入力電圧が前記第１範囲を超える場合は前記入力電圧を前記内部電圧よりも大きい超過電圧に変換し、
    　前記マスク回路は、前記電源回路が前記超過電圧を出力した場合は、前記入出力端子から入力される信号を前記診断部が動作しないレベルにマスクする、
    　請求項１記載の物理量測定装置。     The physical quantity measuring device further
    A power supply terminal that inputs a voltage to the physical quantity measuring device,
    A power supply circuit that converts the input voltage input to the power supply terminal into the internal voltage used by the physical quantity measuring device.
    With
    When the input voltage is included in the first range, the power supply circuit converts the input voltage into the internal voltage.
    When the input voltage exceeds the first range, the power supply circuit converts the input voltage into an excess voltage larger than the internal voltage.
    The mask circuit masks the signal input from the input / output terminal to a level at which the diagnostic unit does not operate when the power supply circuit outputs the excess voltage.
    The physical quantity measuring device according to claim 1.
  12. 　前記物理量測定装置はさらに、
    　　前記物理量測定装置に対して電圧を入力する電源端子、
    　　前記電源端子に対して入力された入力電圧を変圧することにより前記物理量測定装置が用いる内部電圧に変換する電源回路、
    　　前記物理量測定装置の動作モードを指示するモード指示信号を入力するモード指定端子、
    　を備え、
    　前記電源回路は、前記モード指示信号が第１モードを指示している場合は、前記入力電圧を前記内部電圧よりも大きくかつ前記モード指示信号の信号レベルに対応する超過電圧に変換し、
    　前記電源回路は、前記モード指示信号が第２モードを指示している場合は、前記入力電圧を前記内部電圧に変換し、
    　前記マスク回路は、前記電源回路が前記超過電圧を出力した場合は、前記入出力端子から入力される信号を前記診断部が動作しないレベルにマスクする、
    　請求項１記載の物理量測定装置。     The physical quantity measuring device further
    A power supply terminal that inputs a voltage to the physical quantity measuring device,
    A power supply circuit that converts the input voltage input to the power supply terminal into the internal voltage used by the physical quantity measuring device.
    A mode designation terminal for inputting a mode instruction signal indicating the operation mode of the physical quantity measuring device,
    With
    When the mode instruction signal indicates the first mode, the power supply circuit converts the input voltage into an excess voltage that is larger than the internal voltage and corresponds to the signal level of the mode instruction signal.
    When the mode instruction signal indicates the second mode, the power supply circuit converts the input voltage into the internal voltage.
    The mask circuit masks the signal input from the input / output terminal to a level at which the diagnostic unit does not operate when the power supply circuit outputs the excess voltage.
    The physical quantity measuring device according to claim 1.
  13. 　前記物理量測定装置はさらに、前記入出力端子との間で信号を入出力する入出力回路を備え、
    　前記マスク回路は、前記半導体素子が前記入出力回路に対して出力した信号を前記入出力端子へ伝搬する出力線に対して割り込む位置に配置されていることにより、前記半導体素子が前記入出力端子に対して出力した信号を前記入出力回路よりも前に受け取る、
    　請求項１記載の物理量測定装置。     The physical quantity measuring device further includes an input / output circuit for inputting / outputting a signal to / from the input / output terminal.
    The mask circuit is arranged at a position where the semiconductor element interrupts the signal output to the input / output circuit with respect to the output line propagating to the input / output terminal, so that the semiconductor element is arranged at the input / output terminal. Receives the signal output to the above before the input / output circuit.
    The physical quantity measuring device according to claim 1.
  14. 　前記物理量測定装置はさらに、前記物理量測定装置の動作モードを指示するモード指示信号を入力するモード指定端子を備え、
    　前記マスク回路は、前記モード指示信号が第１モードを指示している場合は、前記入出力端子から入力される信号を前記診断部が動作しないレベルにマスクし、
    　前記マスク回路は、前記モード指示信号が第２モードを指示している場合は、前記入出力端子から入力される信号レベルと同じ信号レベルを出力する、
    　請求項１３記載の物理量測定装置。     The physical quantity measuring device further includes a mode designation terminal for inputting a mode instruction signal for instructing the operation mode of the physical quantity measuring device.
    When the mode instruction signal indicates the first mode, the mask circuit masks the signal input from the input / output terminal to a level at which the diagnostic unit does not operate.
    When the mode instruction signal indicates the second mode, the mask circuit outputs the same signal level as the signal level input from the input / output terminal.
    The physical quantity measuring device according to claim 13.
  15. 　前記入出力回路は、前記入出力回路が出力する信号レベルを固定することができるように構成されており、
    　前記マスク回路は、前記入出力回路が出力する信号レベルを固定させる指示信号を前記入出力回路に対して出力することにより、前記診断部が前記入出力回路から受け取る信号を、前記診断部が動作しないレベルにマスクする、
    　請求項１３記載の物理量測定装置。     The input / output circuit is configured so that the signal level output by the input / output circuit can be fixed.
    The mask circuit outputs an instruction signal for fixing the signal level output by the input / output circuit to the input / output circuit, so that the diagnostic unit operates a signal received from the input / output circuit. Mask to a level that does not
    The physical quantity measuring device according to claim 13.
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