WO2021134675A1 - Mems gyroscope - Google Patents

Mems gyroscope Download PDF

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Publication number
WO2021134675A1
WO2021134675A1 PCT/CN2019/130912 CN2019130912W WO2021134675A1 WO 2021134675 A1 WO2021134675 A1 WO 2021134675A1 CN 2019130912 W CN2019130912 W CN 2019130912W WO 2021134675 A1 WO2021134675 A1 WO 2021134675A1
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WIPO (PCT)
Prior art keywords
mems gyroscope
electrode assembly
fixing member
ring
spokes
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PCT/CN2019/130912
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French (fr)
Chinese (zh)
Inventor
马昭
占瞻
李杨
张睿
刘雨微
谭秋喻
黎家健
Original Assignee
瑞声声学科技(深圳)有限公司
瑞声科技（南京）有限公司
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Application filed by 瑞声声学科技(深圳)有限公司, 瑞声科技（南京）有限公司 filed Critical 瑞声声学科技(深圳)有限公司
Priority to PCT/CN2019/130912 priority Critical patent/WO2021134675A1/en
Publication of WO2021134675A1 publication Critical patent/WO2021134675A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/02—Rotary gyroscopes
    • G01C19/04—Details
    • G01C19/16—Suspensions; Bearings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/02—Rotary gyroscopes
    • G01C19/42—Rotary gyroscopes for indicating rate of turn; for integrating rate of turn
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Definitions

  • the invention relates to the technical field of gyroscopes, in particular to a MEMS gyroscope.
  • Micromechanical gyroscopes namely MEMS (Micro Electro Mechanical systems) gyroscopes
  • MEMS Micro Electro Mechanical systems
  • MEMS gyroscopes can be divided into two types: linear vibration tuning fork gyroscopes and disc gyroscopes.
  • the drive mode and detection mode of the disc gyroscope are combined, with high sensitivity and simple structure.
  • the disc-shaped gyroscope is limited by the structure and space layout, resulting in a low quality factor, and the electric capacity that can be accommodated in the structure is small, which has application limitations.
  • the purpose of the present invention is to disclose a MEMS gyroscope that can improve the quality factor and the capacitance that can be accommodated in the structure.
  • the objective of the present invention is achieved by adopting the following technical solutions to provide a MEMS gyroscope, the MEMS gyroscope including:
  • a ring member is a regular octagonal star, and a plurality of the ring members are sequentially nested and arranged on the outside of the fixing member at intervals;
  • a first spoke, a plurality of the first spokes are arranged annularly at equal intervals between the fixing member and the ring member adjacent to the fixing member, so as to connect the fixing member and the ring member;
  • a second spoke, a plurality of the second spokes are arranged annularly between the adjacent ring members at equal intervals to connect the adjacent ring members;
  • the first electrode assembly is arranged annularly on the outer periphery of the annular member.
  • the first electrode assembly includes a first driving electrode for driving the ring member to vibrate in a first direction and a second direction perpendicular to each other, and for detecting that the ring member is aligned with the first direction.
  • a first detection electrode vibrating in a 45° angular direction and a 135° angular direction with the first direction, and a first calibration electrode disposed between the first driving electrode and the first detection electrode.
  • the MEMS gyroscope further includes a second electrode assembly, and the second electrode assembly is arranged between two adjacent ring members.
  • the second electrode assembly is arranged in a regular octagonal star shape.
  • the MEMS gyroscope further includes a mass, which is arranged between two adjacent ring members and connected to the second spoke or the ring member.
  • the mass blocks are arranged in a regular octagonal star shape.
  • the MEMS gyroscope further includes a second electrode assembly and a mass; wherein the second electrode assembly is disposed between two adjacent ring members, and the mass is disposed on the first The electrode assembly and the second electrode assembly are connected to the second spokes or the ring member between the first electrode assembly and the second electrode assembly.
  • the second electrode assembly and the mass block are both arranged in a regular octagonal star shape.
  • the outer contour of the fixing member is a regular octagonal star.
  • the ring member, the fixing member, the first spoke and the second spoke are integrally formed.
  • the second spokes arranged along the same radial direction of the ring member are arranged at intervals.
  • the first spokes are respectively connected to two ends of the fixing member in the first direction and two ends in the second direction, respectively.
  • the first radiating strip and the adjacent second radiating strip are arranged in parallel and spaced apart from each other.
  • the MEMS gyroscope provided by the present invention sets the ring member as a regular octagonal star, and nests and arranges several ring members on the outside of the fixed member.
  • the corners of the star are easy to deform and structure.
  • Symmetrical features on the one hand, can achieve the merger of the gyroscope drive mode and detection mode, in line with the principle of the Coriolis effect, on the other hand, the star-shaped structure can improve the quality factor of the MEMS gyroscope and the capacitance that can be accommodated in the structure , Improve the performance of the gyroscope.
  • FIG. 1 is a schematic diagram of the planar structure of the MEMS gyroscope disclosed in the first embodiment of the present invention
  • Fig. 2A is a partial enlarged schematic diagram of the structure of Fig. 1;
  • 2B is a schematic diagram of the planar structure of the first electrode assembly of the MEMS gyroscope
  • Fig. 3 is a schematic diagram of a driving mode simulation of the first embodiment of the present invention.
  • FIG. 4 is a schematic diagram of a detection modal simulation of Embodiment 1 of the present invention.
  • FIG. 5 is a schematic diagram of the planar structure of the MEMS gyroscope disclosed in the second embodiment of the present invention.
  • Fig. 6 is a partial enlarged schematic view of the structure of Fig. 5;
  • FIG. 7 is a schematic diagram of the planar structure of the MEMS gyroscope disclosed in the third embodiment of the present invention.
  • FIG. 8 is a schematic diagram of a partial enlarged structure of FIG. 7;
  • FIG. 9 is a schematic diagram of the planar structure of the MEMS gyroscope disclosed in the fourth embodiment of the present invention.
  • FIG. 10 is a schematic diagram of a partial enlarged structure of FIG. 9;
  • FIG. 11 is a schematic diagram of a driving mode simulation of the fourth embodiment of the present invention.
  • Fig. 12 is a schematic diagram of a detection mode simulation of the fourth embodiment of the present invention.
  • the first embodiment of the present invention discloses a MEMS gyroscope 100, which includes a fixing member 11, a first spoke 12, a ring member 14, a second spoke 13 and a first electrode assembly 15 .
  • the fixing member 11 is used to provide fixed support.
  • the outer contour of the fixing member 11 may be a circle or a regular octagonal star.
  • the outer contour of the fixing member 11 is a regular octagonal star.
  • each ring member 14 is a regular octagonal star, and is nested and arranged on the outside of the fixing member 11 at intervals.
  • the ring member 14 and the fixing member 11 are connected by a plurality of first spokes 12, and the adjacent ring members
  • the pieces 14 are connected by a number of second spokes 13.
  • a plurality of first spokes 12 are arranged annularly at equal intervals between the fixing member 11 and the ring member 14 adjacent to the fixing member 11 to connect the ring member 14 and the fixing member 11.
  • a plurality of second spokes 13 are arranged annularly between adjacent ring members 14 at equal intervals to connect the adjacent ring members 14.
  • the first electrode assembly 15 is annularly arranged on the outer periphery of the ring member 14 for driving the ring member 14 to vibrate in the first direction and the second direction, and detecting the direction of the ring member 14 at an angle of 45° to the first direction and to the first direction.
  • the first direction is the X-axis direction and the second direction is the Y-axis direction as an example for description, but it is not limited to the first direction is only the X-axis direction, and the second direction is only the Y-axis direction, as shown in the figure. 1 shown.
  • the MEMS gyroscope 100 is installed in an electronic product and can be used to detect the angular velocity corresponding to the movement of the electronic product.
  • the MEMS gyroscope 100 When the electronic product moves, the MEMS gyroscope 100 is acted on by the external force except the first electrode assembly 15. According to the Coriolis principle, the MEMS gyroscope 100 generates an angle of 45° to the first direction and an angle of 135° to the first direction. The resulting Coriolis force F2 in the direction will force the ring member 14 to vibrate in a direction at an angle of 45° to the first direction and an angle of 135° to the first direction.
  • the simulation diagram of the detection mode is shown in Figure 4.
  • the detection electrode 142 detects the displacement of the ring member 14 in a direction at an angle of 45° to the first direction and a direction at an angle of 135° to the first direction, and the magnitude of the rotational angular velocity of the electronic product can be obtained through arithmetic processing.
  • the ring member 14 by setting the ring member 14 as a regular octagonal star, a number of ring members 14 are nested and arranged on the outside of the fixing member 11, and the corners of the star are easily deformed and the structure is symmetrical.
  • the star-shaped structure can increase the quality factor of the MEMS gyroscope 100 and the capacity that can be accommodated in the structure. The performance of the gyroscope.
  • the first electrode assembly 15 includes a first driving electrode 151 for driving the ring member 14 to vibrate in the first direction and the second direction, and for detecting the ring member 14 in a direction at an angle of 45° to the first direction.
  • the vibrating first detection electrode 152 and the first calibration electrode 153 disposed between the first driving electrode 151 and the first detection electrode 152.
  • each first driving electrode 151 is V-shaped and correspondingly disposed at the eight corners of the ring member 14.
  • the ring member 14, the fixing member 11, the first spoke 12 and the second spoke 13 are integrally formed.
  • the second spokes 13 arranged along the same radial direction of the ring 14 are arranged at intervals.
  • first spokes 12 are respectively connected to the two ends of the fixing member 11 in the first direction and the two ends in the second direction.
  • the first radiating bar 12 and the adjacent second radiating bar 13 are arranged in parallel and spaced apart from each other.
  • the difference between the MEMS gyroscope 200 disclosed in this embodiment and the MEMS gyroscope 100 disclosed in the first embodiment is: the MEMS gyroscope 200 disclosed in this embodiment further includes a second electrode assembly 26, a second electrode The assembly 26 is arranged between two adjacent ring members 24.
  • the second electrode assembly 26 is arranged in a regular octagonal star shape.
  • the structure of other components in the MEMS gyroscope 200 disclosed in this embodiment and the connection relationship between the components can refer to the MEMS gyroscope 100 disclosed in the first embodiment, which will not be repeated here.
  • the electrode assembly 26 is arranged between two adjacent ring members 24, thereby expanding the variable capacitance of the MEMS gyroscope 200 and improving the sensitivity and performance of the MEMS gyroscope 200.
  • the difference between the MEMS gyroscope 300 disclosed in this embodiment and the MEMS gyroscope 100 disclosed in the first embodiment is:
  • the MEMS gyroscope 300 disclosed in this embodiment further includes a mass 37, and the mass 30 is disposed between two adjacent ring members 34 and connected to the second spoke 33 or the ring member 34.
  • the masses 30 are arranged in a regular octagonal star shape.
  • the structure of other components in the MEMS gyroscope 300 disclosed in this embodiment and the connection relationship between the components can refer to the MEMS gyroscope 100 disclosed in the first embodiment, which will not be repeated here.
  • the inertia of the ring member 34 is enhanced, so that the deformation amount of the ring member 34 can be effectively increased, and the performance of the MEMS gyroscope 200 is improved.
  • the difference between the MEMS gyroscope 400 disclosed in this embodiment and the MEMS gyroscope 100 disclosed in the first embodiment is: the MEMS gyroscope 400 disclosed in this embodiment further includes a second electrode assembly 46 and a mass 47 .
  • the second electrode assembly 46 is arranged between two adjacent ring members 44, and the mass 47 is arranged between the first electrode assembly 45 and the second electrode assembly 46 and is connected to the first electrode assembly 45 and the second electrode assembly.
  • the second spokes 43 or ring 44 between 46 are connected.
  • the second electrode assembly 46 and the mass 47 are both arranged in a regular octagonal star shape.
  • the structure of other components in the MEMS gyroscope 400 disclosed in this embodiment and the connection relationship between the components can refer to the MEMS gyroscope 100 disclosed in the first embodiment, which will not be repeated here.
  • the driving mode simulation model of the MEMS gyroscope 400 is shown in FIG. 11.
  • the detection mode simulation model of the MEMS gyroscope 400 is shown in FIG. 12.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

Disclosed is a MEMS gyroscope. The MEMS gyroscope comprises: a fixing member; annular members, wherein the annular members are in a regular eight-angle star shape, and the several annular members are sequentially arranged on the outer side of the fixing member in a nested manner at intervals; first spokes, wherein several first spokes are annularly distributed between the fixing member and the annular members adjacent to the fixing member at equal intervals so as to connect the fixing member to the annular members; second spokes, wherein several second spokes are annularly distributed between adjacent annular members at equal intervals so as to connect the adjacent annular members; and first electrode assemblies, wherein the first electrode assemblies are annularly distributed on the peripheries of the annular members.

Description

MEMS陀螺仪MEMS gyroscope 技术领域Technical field
本发明涉及陀螺仪技术领域，尤其涉及一种MEMS陀螺仪。The invention relates to the technical field of gyroscopes, in particular to a MEMS gyroscope.
背景技术Background technique
微机械陀螺仪，即MEMS(Micro Electro Mechanical systems)陀螺仪，是一种典型的角速度微传感器，由于其尺寸小、功耗低和加工方便等优势在消费电子市场有着非常广泛的应用。近年来随着MEMS陀螺仪性能的逐步提升，广泛应用于汽车、工业、虚拟现实等领域。Micromechanical gyroscopes, namely MEMS (Micro Electro Mechanical systems) gyroscopes, are a typical angular velocity micro sensor. Due to its small size, low power consumption and convenient processing, it has a very wide range of applications in the consumer electronics market. In recent years, with the gradual improvement of the performance of MEMS gyroscopes, it has been widely used in fields such as automobiles, industry, and virtual reality.
MEMS陀螺仪可分为线振动音叉型陀螺仪和圆盘形陀螺仪两类，其中，圆盘形陀螺仪的驱动模态振型和检测模态振型兼并，灵敏度高，且结构简单，逐步成为实用较为广泛的高性能陀螺仪。但是，圆盘形陀螺仪受限于结构和空间布局，导致品质因数低，且结构内可够容纳的电容量较小，存在着应用的局限。MEMS gyroscopes can be divided into two types: linear vibration tuning fork gyroscopes and disc gyroscopes. Among them, the drive mode and detection mode of the disc gyroscope are combined, with high sensitivity and simple structure. Become a high-performance gyroscope with a wide range of practical applications. However, the disc-shaped gyroscope is limited by the structure and space layout, resulting in a low quality factor, and the electric capacity that can be accommodated in the structure is small, which has application limitations.
因而，有必要提供一种新的MEMS陀螺仪以解决上述的问题。Therefore, it is necessary to provide a new MEMS gyroscope to solve the above-mentioned problems.
发明概述Summary of the invention
技术问题technical problem
本发明的目的公开一种能够提升品质因数和结构内可够容纳的电容量的MEMS陀螺仪。The purpose of the present invention is to disclose a MEMS gyroscope that can improve the quality factor and the capacitance that can be accommodated in the structure.
问题的解决方案The solution to the problem
技术解决方案Technical solutions
本发明的目的采用如下技术方案实现，提供一种MEMS陀螺仪，所述MEMS陀螺仪包括：The objective of the present invention is achieved by adopting the following technical solutions to provide a MEMS gyroscope, the MEMS gyroscope including:
固定件；Fastener;
环形件，所述环形件为正8角星形，若干所述环形件依次间隔嵌套布设于所述固定件外侧；A ring member, the ring member is a regular octagonal star, and a plurality of the ring members are sequentially nested and arranged on the outside of the fixing member at intervals;
第一辐条，若干所述第一辐条等间距环形布设于所述固定件和与所述固定件相邻的所述环形件之间，以连接所述固定件和所述环形件；A first spoke, a plurality of the first spokes are arranged annularly at equal intervals between the fixing member and the ring member adjacent to the fixing member, so as to connect the fixing member and the ring member;
第二辐条，若干所述第二辐条等间距环形布设于相邻的所述环形件之间，以连接相邻的所述环形件；以及A second spoke, a plurality of the second spokes are arranged annularly between the adjacent ring members at equal intervals to connect the adjacent ring members; and
第一电极组件，所述第一电极组件环形布设于所述环形件外周。优选地，所述第一电极组件包括用于驱动所述环形件沿相互垂直的第一方向和第二方向振动的第一驱动电极、用于检测所述环形件沿与所述第一方向呈45°角方向和与所述第一方向呈135°角方向振动的第一检测电极以及设置于所述第一驱动电极和所述第一检测电极之间的第一校准电极。The first electrode assembly is arranged annularly on the outer periphery of the annular member. Preferably, the first electrode assembly includes a first driving electrode for driving the ring member to vibrate in a first direction and a second direction perpendicular to each other, and for detecting that the ring member is aligned with the first direction. A first detection electrode vibrating in a 45° angular direction and a 135° angular direction with the first direction, and a first calibration electrode disposed between the first driving electrode and the first detection electrode.
优选地，所述MEMS陀螺仪还包括第二电极组件，所述第二电极组件设置于两个相邻的所述环形件之间。Preferably, the MEMS gyroscope further includes a second electrode assembly, and the second electrode assembly is arranged between two adjacent ring members.
优选地，所述第二电极组件呈正8角星形布设。Preferably, the second electrode assembly is arranged in a regular octagonal star shape.
优选地，所述MEMS陀螺仪还包括质量块，所述质量块设置于两个相邻的所述环形件之间并与所述第二辐条或所述环形件连接。Preferably, the MEMS gyroscope further includes a mass, which is arranged between two adjacent ring members and connected to the second spoke or the ring member.
优选地，所述质量块呈正8角星形布设。Preferably, the mass blocks are arranged in a regular octagonal star shape.
优选地，所述MEMS陀螺仪还包括第二电极组件以及质量块；其中，所述第二电极组件设置于两个相邻的所述环形件之间，所述质量块设置于所述第一电极组件和所述第二电极组件之间并与所述第一电极组件和所述第二电极组件之间的所述第二辐条或所述环形件连接。Preferably, the MEMS gyroscope further includes a second electrode assembly and a mass; wherein the second electrode assembly is disposed between two adjacent ring members, and the mass is disposed on the first The electrode assembly and the second electrode assembly are connected to the second spokes or the ring member between the first electrode assembly and the second electrode assembly.
优选地，所述第二电极组件和所述质量块均呈正8角星形布设。Preferably, the second electrode assembly and the mass block are both arranged in a regular octagonal star shape.
优选地，所述固定件的外轮廓呈正8角星形。Preferably, the outer contour of the fixing member is a regular octagonal star.
优选地，所述环形件、所述固定件、所述第一辐条及所述第二辐条一体成型。Preferably, the ring member, the fixing member, the first spoke and the second spoke are integrally formed.
优选地，沿所述环形件同一径向设置的所述第二辐条间隔设置。Preferably, the second spokes arranged along the same radial direction of the ring member are arranged at intervals.
优选地，所述第一辐条分别连接在所述固定件分别沿所述第一方向的两端以及沿所述第二方向的两端。Preferably, the first spokes are respectively connected to two ends of the fixing member in the first direction and two ends in the second direction, respectively.
优选地，所述第一辐射条与相邻所述第二辐射条平行且相互间隔设置。Preferably, the first radiating strip and the adjacent second radiating strip are arranged in parallel and spaced apart from each other.
发明的有益效果The beneficial effects of the invention
有益效果Beneficial effect
相对于现有技术相比，本发明所提供的MEMS陀螺仪通过设置环形件为正8角星形，将若干个环形件嵌套布设于固定件外侧，利用星形的角部容易变形和结 构对称的特征，一方面能够实现陀螺仪驱动模态与检测模态的兼并，符合哥氏效应原理，另一方面星形的结构能够提升MEMS陀螺仪的品质因数和结构内可够容纳的电容量，提升陀螺仪的性能。Compared with the prior art, the MEMS gyroscope provided by the present invention sets the ring member as a regular octagonal star, and nests and arranges several ring members on the outside of the fixed member. The corners of the star are easy to deform and structure. Symmetrical features, on the one hand, can achieve the merger of the gyroscope drive mode and detection mode, in line with the principle of the Coriolis effect, on the other hand, the star-shaped structure can improve the quality factor of the MEMS gyroscope and the capacitance that can be accommodated in the structure , Improve the performance of the gyroscope.
对附图的简要说明Brief description of the drawings
附图说明Description of the drawings
图1为本发明实施例一公开的MEMS陀螺仪平面结构示意图；FIG. 1 is a schematic diagram of the planar structure of the MEMS gyroscope disclosed in the first embodiment of the present invention;
图2A为图1的局部放大结构示意图；Fig. 2A is a partial enlarged schematic diagram of the structure of Fig. 1;
图2B为MEMS陀螺仪的第一电极组件平面结构示意图；2B is a schematic diagram of the planar structure of the first electrode assembly of the MEMS gyroscope;
图3为本发明实施例一的驱动模态仿真示意图；Fig. 3 is a schematic diagram of a driving mode simulation of the first embodiment of the present invention;
图4为本发明实施例一的检测模态仿真示意图；FIG. 4 is a schematic diagram of a detection modal simulation of Embodiment 1 of the present invention;
图5为本发明实施例二公开的MEMS陀螺仪平面结构示意图；5 is a schematic diagram of the planar structure of the MEMS gyroscope disclosed in the second embodiment of the present invention;
图6为图5的局部放大结构示意图；Fig. 6 is a partial enlarged schematic view of the structure of Fig. 5;
图7为本发明实施例三公开的MEMS陀螺仪平面结构示意图；7 is a schematic diagram of the planar structure of the MEMS gyroscope disclosed in the third embodiment of the present invention;
图8为图7的局部放大结构示意图；FIG. 8 is a schematic diagram of a partial enlarged structure of FIG. 7;
图9为本发明实施例四公开的MEMS陀螺仪平面结构示意图；9 is a schematic diagram of the planar structure of the MEMS gyroscope disclosed in the fourth embodiment of the present invention;
图10为图9的局部放大结构示意图；FIG. 10 is a schematic diagram of a partial enlarged structure of FIG. 9;
图11为本发明实施例四的驱动模态仿真示意图；FIG. 11 is a schematic diagram of a driving mode simulation of the fourth embodiment of the present invention;
图12为本发明实施例四的检测模态仿真示意图。Fig. 12 is a schematic diagram of a detection mode simulation of the fourth embodiment of the present invention.
发明实施例Invention embodiment
具体实施方式Detailed ways
下面结合附图和实施方式对本发明作进一步说明。The present invention will be further described below in conjunction with the drawings and embodiments.
需要说明，本发明实施例中所有方向性指示(诸如上、下、左、右、前、后……)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relationship between components in a specific posture (as shown in the accompanying drawings). If the relative position relationship, movement situation, etc. change, the directional indication will change accordingly.
还需要说明的是，当元件被称为“固定于”或“设置于”另一个元件上时，它可以直接在另一个元件上或者可能同时存在居中元件。当一个元件被称为是“连接”另一个元件，它可以是直接连接另一个元件或者可能同时存在居中元件。It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be a centering element at the same time. When an element is said to be "connected" to another element, it can be directly connected to the other element or there may be a central element at the same time.
另外，在本发明中涉及“第一”、“第二”等的描述仅用于描述目的，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外，各个实施例之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也不在本发明要求的保护范围之内。In addition, the descriptions related to "first", "second", etc. in the present invention are only used for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on what can be achieved by a person of ordinary skill in the art. When the combination of technical solutions is contradictory or cannot be achieved, it should be considered that such a combination of technical solutions does not exist. , Is not within the protection scope of the present invention.
实施例一：Example one:
请参阅图1及图2A-2B，本发明的实施例一公开了一种MEMS陀螺仪100，其包括固定件11、第一辐条12、环形件14、第二辐条13以及第一电极组件15。1 and 2A-2B, the first embodiment of the present invention discloses a MEMS gyroscope 100, which includes a fixing member 11, a first spoke 12, a ring member 14, a second spoke 13 and a first electrode assembly 15 .
其中，固定件11用于提供固定支撑，该固定件11的外轮廓可以是圆形或正8角星形，较佳地，固定件11的外轮廓为正8角星形。Wherein, the fixing member 11 is used to provide fixed support. The outer contour of the fixing member 11 may be a circle or a regular octagonal star. Preferably, the outer contour of the fixing member 11 is a regular octagonal star.
环形件14为若干个，每个环形件14均为正8角星形，且依次间隔嵌套布设于固定件11外侧，环形件14和固定件11通过若干第一辐条12连接，相邻环形件14之间通过若干第二辐条13连接。There are several ring members 14, and each ring member 14 is a regular octagonal star, and is nested and arranged on the outside of the fixing member 11 at intervals. The ring member 14 and the fixing member 11 are connected by a plurality of first spokes 12, and the adjacent ring members The pieces 14 are connected by a number of second spokes 13.
其中，若干第一辐条12等间距环形布设于固定件11和与固定件11相邻的环形件14之间，以连接环形件14和固定件11。Wherein, a plurality of first spokes 12 are arranged annularly at equal intervals between the fixing member 11 and the ring member 14 adjacent to the fixing member 11 to connect the ring member 14 and the fixing member 11.
若干第二辐条13等间距环形布设于相邻的环形件14之间，以连接相邻的环形件14。A plurality of second spokes 13 are arranged annularly between adjacent ring members 14 at equal intervals to connect the adjacent ring members 14.
第一电极组件15环形布设于环形件14的外周，用于驱动环形件14沿第一方向和第二方向振动，以及检测环形件14沿与第一方向呈45°角方向和与第一方向呈135°角方向振动的振动量，其中，第一方向和第二方向相互垂直。The first electrode assembly 15 is annularly arranged on the outer periphery of the ring member 14 for driving the ring member 14 to vibrate in the first direction and the second direction, and detecting the direction of the ring member 14 at an angle of 45° to the first direction and to the first direction. The amount of vibration that vibrates in a 135° angular direction, where the first direction and the second direction are perpendicular to each other.
本实施例中，以第一方向为X轴方向、第二方向为Y轴方向为例进行说明，但不局限于第一方向仅为X轴方向、第二方向仅为Y轴方向，如图1所示。In this embodiment, the first direction is the X-axis direction and the second direction is the Y-axis direction as an example for description, but it is not limited to the first direction is only the X-axis direction, and the second direction is only the Y-axis direction, as shown in the figure. 1 shown.
MEMS陀螺仪100安装于电子产品，可用于检测电子产品移动时对应的角速度大小。The MEMS gyroscope 100 is installed in an electronic product and can be used to detect the angular velocity corresponding to the movement of the electronic product.
电子产品静止时，MEMS陀螺仪100仅受到第一电极组件15提供的驱动力F驱动情况下，环形件14沿第一方向和第二方向振动，其驱动模态仿真图，如图3所示。When the electronic product is stationary and the MEMS gyroscope 100 is only driven by the driving force F provided by the first electrode assembly 15, the ring member 14 vibrates in the first direction and the second direction, and its driving mode simulation diagram is shown in FIG. 3 .
电子产品移动时，MEMS陀螺仪100受到除去第一电极组件15之外的外力作用 ，根据哥氏原理MEMS陀螺仪100产生沿与第一方向呈45°角方向和与第一方向呈135°角方向的哥氏力合力F2，哥氏力合力F2会迫使环形件14沿与第一方向呈45°角方向和与第一方向呈135°角方向振动。其检测模态仿真图，如图4所示。检测电极142通过检测环形件14沿与第一方向呈45°角方向和与第一方向呈135°角方向的位移，经过运算处理即可获得电子产品转动角速度的大小。When the electronic product moves, the MEMS gyroscope 100 is acted on by the external force except the first electrode assembly 15. According to the Coriolis principle, the MEMS gyroscope 100 generates an angle of 45° to the first direction and an angle of 135° to the first direction. The resulting Coriolis force F2 in the direction will force the ring member 14 to vibrate in a direction at an angle of 45° to the first direction and an angle of 135° to the first direction. The simulation diagram of the detection mode is shown in Figure 4. The detection electrode 142 detects the displacement of the ring member 14 in a direction at an angle of 45° to the first direction and a direction at an angle of 135° to the first direction, and the magnitude of the rotational angular velocity of the electronic product can be obtained through arithmetic processing.
本实施例公开的MEMS陀螺仪100，通过设置环形件14为正8角星形，将若干个环形件14嵌套布设于固定件11外侧，利用星形的角部容易变形和结构对称的特征，一方面能够实现陀螺仪驱动模态与检测模态的兼并，符合哥氏效应原理，另一方面星形的结构能够提升MEMS陀螺仪100的品质因数和结构内可够容纳的电容量，提升陀螺仪的性能。In the MEMS gyroscope 100 disclosed in this embodiment, by setting the ring member 14 as a regular octagonal star, a number of ring members 14 are nested and arranged on the outside of the fixing member 11, and the corners of the star are easily deformed and the structure is symmetrical. On the one hand, it can realize the merger of the driving mode and detection mode of the gyroscope, which conforms to the principle of Coriolis effect. On the other hand, the star-shaped structure can increase the quality factor of the MEMS gyroscope 100 and the capacity that can be accommodated in the structure. The performance of the gyroscope.
在部分实施例中，第一电极组件15包括用于驱动环形件14沿第一方向和第二方向振动的第一驱动电极151、用于检测环形件14沿与第一方向呈45°角方向振动的第一检测电极152以及设置于第一驱动电极151和第一检测电极152之间的第一校准电极153。In some embodiments, the first electrode assembly 15 includes a first driving electrode 151 for driving the ring member 14 to vibrate in the first direction and the second direction, and for detecting the ring member 14 in a direction at an angle of 45° to the first direction. The vibrating first detection electrode 152 and the first calibration electrode 153 disposed between the first driving electrode 151 and the first detection electrode 152.
较佳地，第一驱动电极151为8个，每个第一驱动电极151呈V型，对应设置于环形件14的8个角部。Preferably, there are eight first driving electrodes 151, and each first driving electrode 151 is V-shaped and correspondingly disposed at the eight corners of the ring member 14.
在部分实施例中，环形件14、固定件11、第一辐条12以及第二辐条13一体成型。In some embodiments, the ring member 14, the fixing member 11, the first spoke 12 and the second spoke 13 are integrally formed.
在部分实施例中，沿环形件14同一径向设置的第二辐条13间隔设置。In some embodiments, the second spokes 13 arranged along the same radial direction of the ring 14 are arranged at intervals.
其中，第一辐条12分别连接在固定件11分别沿第一方向的两端以及沿第二方向的两端。Wherein, the first spokes 12 are respectively connected to the two ends of the fixing member 11 in the first direction and the two ends in the second direction.
较佳地，第一辐射条12与相邻第二辐射条13平行且相互间隔设置。Preferably, the first radiating bar 12 and the adjacent second radiating bar 13 are arranged in parallel and spaced apart from each other.
实施例二：Embodiment two:
请参阅图5-6，本实施例公开的MEMS陀螺仪200与实施一公开的MEMS陀螺仪100不同的地方在于：本实施例公开的MEMS陀螺仪200还包括第二电极组件26，第二电极组件26设置于两个相邻的环形件24之间。5-6, the difference between the MEMS gyroscope 200 disclosed in this embodiment and the MEMS gyroscope 100 disclosed in the first embodiment is: the MEMS gyroscope 200 disclosed in this embodiment further includes a second electrode assembly 26, a second electrode The assembly 26 is arranged between two adjacent ring members 24.
较佳地，第二电极组件26呈正8角星形布设。Preferably, the second electrode assembly 26 is arranged in a regular octagonal star shape.
本实施例公开的MEMS陀螺仪200中其它部件的结构及部件之间的连接关系可 以参照实施例一中公开的MEMS陀螺仪100，在此不做赘述。The structure of other components in the MEMS gyroscope 200 disclosed in this embodiment and the connection relationship between the components can refer to the MEMS gyroscope 100 disclosed in the first embodiment, which will not be repeated here.
本实施例中，通过在相邻两个环形件24之间设有电极组件26，从而扩大了MEMS陀螺仪200的可变电容量，提升MEMS陀螺仪200的灵敏度和性能。In this embodiment, the electrode assembly 26 is arranged between two adjacent ring members 24, thereby expanding the variable capacitance of the MEMS gyroscope 200 and improving the sensitivity and performance of the MEMS gyroscope 200.
实施例三：Embodiment three:
请参阅图7-8，本实施例公开的MEMS陀螺仪300与实施一公开的MEMS陀螺仪100不同的地方在于：Referring to FIGS. 7-8, the difference between the MEMS gyroscope 300 disclosed in this embodiment and the MEMS gyroscope 100 disclosed in the first embodiment is:
本实施例公开的MEMS陀螺仪300还包括质量块37，质量块30设置于两个相邻的环形件34之间并与第二辐条33或环形件34连接。The MEMS gyroscope 300 disclosed in this embodiment further includes a mass 37, and the mass 30 is disposed between two adjacent ring members 34 and connected to the second spoke 33 or the ring member 34.
较佳地，质量块30呈正8角星形布设。Preferably, the masses 30 are arranged in a regular octagonal star shape.
本实施例公开的MEMS陀螺仪300中其它部件的结构及部件之间的连接关系可以参照实施例一中公开的MEMS陀螺仪100，在此不做赘述。The structure of other components in the MEMS gyroscope 300 disclosed in this embodiment and the connection relationship between the components can refer to the MEMS gyroscope 100 disclosed in the first embodiment, which will not be repeated here.
通过在相邻两个环形件34之间悬挂质量块37，增强环形件34的惯性，从而使得环形件34的形变量可以有效增加，提升了MEMS陀螺仪200的性能。By suspending the mass 37 between two adjacent ring members 34, the inertia of the ring member 34 is enhanced, so that the deformation amount of the ring member 34 can be effectively increased, and the performance of the MEMS gyroscope 200 is improved.
实施例四：Embodiment four:
请参阅图9-10，本实施例公开的MEMS陀螺仪400与实施一公开的MEMS陀螺仪100不同的地方在于：本实施例公开的MEMS陀螺仪400还包括第二电极组件46以及质量块47。其中，第二电极组件46设置于两个相邻的环形件44之间，质量块47设置于第一电极组件45和第二电极组件46之间并与第一电极组件45和第二电极组件46之间的第二辐条43或环形件44连接。9-10, the difference between the MEMS gyroscope 400 disclosed in this embodiment and the MEMS gyroscope 100 disclosed in the first embodiment is: the MEMS gyroscope 400 disclosed in this embodiment further includes a second electrode assembly 46 and a mass 47 . Wherein, the second electrode assembly 46 is arranged between two adjacent ring members 44, and the mass 47 is arranged between the first electrode assembly 45 and the second electrode assembly 46 and is connected to the first electrode assembly 45 and the second electrode assembly. The second spokes 43 or ring 44 between 46 are connected.
较佳地，第二电极组件46和质量块47均呈正8角星形布设。Preferably, the second electrode assembly 46 and the mass 47 are both arranged in a regular octagonal star shape.
本实施例公开的MEMS陀螺仪400中其它部件的结构及部件之间的连接关系可以参照实施例一中公开的MEMS陀螺仪100，在此不做赘述。The structure of other components in the MEMS gyroscope 400 disclosed in this embodiment and the connection relationship between the components can refer to the MEMS gyroscope 100 disclosed in the first embodiment, which will not be repeated here.
MEMS陀螺仪400的驱动模态仿真模型，如图11所示。The driving mode simulation model of the MEMS gyroscope 400 is shown in FIG. 11.
MEMS陀螺仪400的检测模态仿真模型，如图12所示。The detection mode simulation model of the MEMS gyroscope 400 is shown in FIG. 12.
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。The above are only the embodiments of the present invention. It should be pointed out here that for those of ordinary skill in the art, improvements can be made without departing from the inventive concept of the present invention, but these all belong to the present invention. The scope of protection.

Claims (13)

  1. 一种MEMS陀螺仪，其特征在于，所述MEMS陀螺仪包括：A MEMS gyroscope, characterized in that, the MEMS gyroscope includes:
    固定件；Fastener;
    环形件，所述环形件为正8角星形，若干所述环形件依次间隔嵌套布设于所述固定件外侧；A ring member, the ring member is a regular octagonal star, and a plurality of the ring members are sequentially nested and arranged on the outside of the fixing member at intervals;
    第一辐条，若干所述第一辐条等间距环形布设于所述固定件和与所述固定件相邻的所述环形件之间，以连接所述固定件和所述环形件；A first spoke, a plurality of the first spokes are arranged annularly at equal intervals between the fixing member and the ring member adjacent to the fixing member, so as to connect the fixing member and the ring member;
    第二辐条，若干所述第二辐条等间距环形布设于相邻的所述环形件之间，以连接相邻的所述环形件；以及A second spoke, a plurality of the second spokes are arranged annularly between the adjacent ring members at equal intervals to connect the adjacent ring members; and
    第一电极组件，所述第一电极组件环形布设于所述环形件外周。The first electrode assembly is arranged annularly on the outer periphery of the annular member.
  2. 根据权利要求1所述的MEMS陀螺仪，其特征在于：所述第一电极组件包括用于驱动所述环形件沿相互垂直的第一方向和第二方向振动的第一驱动电极、用于检测所述环形件沿与所述第一方向呈45°角方向和与所述第一方向呈135°角方向振动的第一检测电极以及设置于所述第一驱动电极和所述第一检测电极之间的第一校准电极。The MEMS gyroscope according to claim 1, wherein the first electrode assembly comprises a first driving electrode for driving the ring member to vibrate in a first direction and a second direction perpendicular to each other, and for detecting The ring-shaped member vibrates in a direction at an angle of 45° to the first direction and a first detecting electrode at an angle of 135° to the first direction, and is disposed on the first driving electrode and the first detecting electrode Between the first calibration electrode.
  3. 根据权利要求1所述的MEMS陀螺仪，其特征在于：所述MEMS陀螺仪还包括第二电极组件，所述第二电极组件设置于两个相邻的所述环形件之间。The MEMS gyroscope according to claim 1, wherein the MEMS gyroscope further comprises a second electrode assembly, and the second electrode assembly is arranged between two adjacent ring members.
  4. 根据权利要求3所述的MEMS陀螺仪，其特征在于：所述第二电极组件呈正8角星形布设。The MEMS gyroscope according to claim 3, wherein the second electrode assembly is arranged in a regular octagonal star.
  5. 根据权利要求1所述的MEMS陀螺仪，其特征在于：所述MEMS陀螺仪还包括质量块，所述质量块设置于两个相邻的所述环形件之间并与所述第二辐条或所述环形件连接。The MEMS gyroscope according to claim 1, characterized in that: the MEMS gyroscope further comprises a mass, and the mass is disposed between two adjacent ring members and is connected to the second spoke or the second spoke. The ring members are connected.
  6. 根据权利要求5所述的MEMS陀螺仪，其特征在于：所述质量块呈正8角星形布设。The MEMS gyroscope according to claim 5, wherein the mass blocks are arranged in a regular octagonal star shape.
  7. 根据权利要求1所述的MEMS陀螺仪，其特征在于：所述MEMS陀 螺仪还包括第二电极组件以及质量块；其中，所述第二电极组件设置于两个相邻的所述环形件之间，所述质量块设置于所述第一电极组件和所述第二电极组件之间并与所述第一电极组件和所述第二电极组件之间的所述第二辐条或所述环形件连接。The MEMS gyroscope according to claim 1, wherein the MEMS gyroscope further comprises a second electrode assembly and a mass; wherein the second electrode assembly is arranged between two adjacent ring members In between, the mass block is arranged between the first electrode assembly and the second electrode assembly and is connected to the second spokes or the ring shape between the first electrode assembly and the second electrode assembly. Pieces to connect.
  8. 根据权利要求7所述的MEMS陀螺仪，其特征在于：所述第二电极组件和所述质量块均呈正8角星形布设。The MEMS gyroscope according to claim 7, wherein the second electrode assembly and the mass block are both arranged in a regular octagonal star.
  9. 根据权利要求1所述的MEMS陀螺仪，其特征在于：所述固定件的外轮廓呈正8角星形。The MEMS gyroscope according to claim 1, wherein the outer contour of the fixing member is a regular octagonal star.
  10. 根据权利要求1所述的MEMS陀螺仪，其特征在于：所述环形件、所述固定件、所述第一辐条及所述第二辐条一体成型。The MEMS gyroscope according to claim 1, wherein the ring member, the fixing member, the first spoke and the second spoke are integrally formed.
  11. 根据权利要求2所述的MEMS陀螺仪，其特征在于：沿所述环形件同一径向设置的所述第二辐条间隔设置。3. The MEMS gyroscope according to claim 2, wherein the second spokes arranged along the same radial direction of the ring are arranged at intervals.
  12. 根据权利要求11所述的MEMS陀螺仪，其特征在于：所述第一辐条分别连接在所述固定件分别沿所述第一方向的两端以及沿所述第二方向的两端。11. The MEMS gyroscope according to claim 11, wherein the first spokes are respectively connected to two ends of the fixing member in the first direction and two ends in the second direction.
  13. 根据权利要求12所述的MEMS陀螺仪，其特征在于：所述第一辐射条与相邻所述第二辐射条平行且相互间隔设置。The MEMS gyroscope according to claim 12, wherein the first radiating strip and the adjacent second radiating strip are arranged in parallel and spaced apart from each other.
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CN110058041A (en) * 2019-04-08 2019-07-26 瑞声科技(新加坡)有限公司 Gyroscope

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