WO2021128952A1 - Micromirror laser scanning near-to-eye display system - Google Patents

Micromirror laser scanning near-to-eye display system Download PDF

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Publication number
WO2021128952A1
WO2021128952A1 PCT/CN2020/114578 CN2020114578W WO2021128952A1 WO 2021128952 A1 WO2021128952 A1 WO 2021128952A1 CN 2020114578 W CN2020114578 W CN 2020114578W WO 2021128952 A1 WO2021128952 A1 WO 2021128952A1
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grating
coupling
waveguide
mirror
micro
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PCT/CN2020/114578
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French (fr)
Chinese (zh)
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杨濛
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常州市瑞泰光电有限公司
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • the invention relates to the technical field of waveguide near-eye display, in particular to a micro-mirror laser scanning near-eye display system.
  • Figure 1 is an augmented reality (AR) waveguide near-eye display device in the prior art.
  • the displayed image source is provided by the microdisplay 1.
  • the light beams emitted by different pixels on the microdisplay 1 are collimated by the collimator. 2 is converted into incident light beams of different angles, so that it can be coupled into the grating 3 into the waveguide 4.
  • the coupled light beam is transmitted in the waveguide 4 in the form of total reflection.
  • the light beam encounters the coupling out grating 5 each time, a part of the energy of the light beam is coupled out of the waveguide and enters the human eye 6.
  • the light beams of different pixels enter the human eye 6 at different angles, so that the display image at infinity can be seen.
  • the display device in FIG. 1 has at least the following three disadvantages:
  • the field of view (Field of View, FOV) is limited by the total reflection angle of the waveguide, and it is impossible to achieve a large FOV;
  • VAC Vergence-accommodation Conflict
  • the invention provides a micro-mirror laser scanning near-eye display system, which can expand the FOV size, avoid the occurrence of VAC, and display images with good uniformity.
  • the micro-mirror laser scanning near-eye display system includes: a MEMS micro-mirror scanning device, a collimator, a coupling grating, a waveguide, and a coupling-out grating.
  • the coupling grating is placed on the surface of the waveguide, and the MEMS micromirror
  • the scanning device includes a light source for emitting light beams, the light beams emitted by the light sources become parallel light beams after passing through the collimator lens, the parallel light beams are incident perpendicularly to the coupling grating, and perpendicularly incident to the coupling grating.
  • the light beam of the grating is coupled into the waveguide by the coupling grating for transmission, and the light beam transmitted through the waveguide is totally reflected in the waveguide and is coupled out by the coupling-out grating;
  • the coupling-out grating is a holographic grating,
  • the light beam of the waveguide is coupled out by the out-coupling grating into a convergent light beam and converges in the human eye.
  • the MEMS micro-mirror scanning device includes the light source, the beam combiner and the MEMS micro-mirror arranged in sequence along the propagation path of the light beam, the light source is an RGB three-color light source, and the light beam emitted by the light source is The beam combiner is integrated and transferred to the MEMS micro-mirror, and the MEMS micro-mirror scans and displays the light beam.
  • MEMS micromirror scanning device includes the light source, the beam combiner and the MEMS micro-mirror arranged in sequence along the propagation path of the light beam, the light source is an RGB three-color light source, and the light beam emitted by the light source is The beam combiner is integrated and transferred to the MEMS micro-mirror, and the MEMS micro-mirror scans and displays the light beam.
  • MEMS micromirror scanning device includes the light source, the beam combiner and the MEMS micro-mirror arranged in sequence along the propagation path of the light beam, the light source is an RGB three-color light
  • the surface of the MEMS micro-mirror is plated with metal to increase the light reflectivity of the visible light waveband.
  • the coupling grating is a surface relief grating or a volume holographic grating, and the diffraction angle of the light beam in the coupling grating is greater than the total reflection angle of the waveguide.
  • the coupling-in grating and the coupling-out grating are both arranged on a side of the waveguide close to the MEMS micro-mirror scanning device.
  • the coupling-out grating is arranged on a side of the waveguide away from the MEMS micro-mirror scanning device.
  • the decoupling grating includes at least two layers of the holographic grating arranged in a layered manner, for respectively exposing the RGB light beams.
  • the holographic grating adopts multiple exposures to separately record the RGB three-color light beams.
  • the light beams coupled by the coupling-out grating are projected to different positions on the retina of the human eye to form an image near-eye vision, and the near-eye vision field angle satisfies:
  • FOV is the field of view
  • s is the area of the holographic grating
  • d is the distance from the beam converging point to the waveguide.
  • the coupling-in grating and the coupling-out grating are both volume holographic gratings, the coupling-in grating and the coupling-out grating are arranged on the same side of the waveguide, and the area of the coupling-out grating is larger than that of the coupling-in grating. The area of the grating.
  • the coupling-in grating and the coupling-out grating are both arranged on a side of the waveguide close to the MEMS micro-mirror scanning device, and both the coupling-in grating and the coupling-out grating are transmission gratings.
  • the coupling-in grating and the coupling-out grating are both arranged on a side of the waveguide away from the MEMS micro-mirror scanning device, and the coupling-in grating and the coupling-out grating are both reflective gratings.
  • a parallel light beam incident perpendicular to the waveguide is the reference light
  • the incident angle of the object light incident on the central ray of the coupling grating satisfies:
  • ⁇ is the incident angle of the object light
  • ⁇ is the waveguide refraction angle
  • n 0 is the refractive index of air
  • n 1 is the waveguide refractive index
  • the micro-mirror laser scanning near-eye display system Compared with the prior art, the micro-mirror laser scanning near-eye display system provided by the present invention adjusts the angle of the incident light beam coupled into the grating to avoid the limitation of the light beam by the total reflection angle of the waveguide, and at the same time converges to the human eye through the HOE of the coupling out grating
  • the center of the lens prevents the occurrence of VAC.
  • the light is coupled in and out at an angle, and the uniformity of the displayed image is good.
  • Figure 1 is a schematic diagram of a prior art AR waveguide near-eye display
  • FIG. 2 is a schematic diagram of a micro-mirror laser scanning near-eye display system provided by Embodiment 1 of the present invention
  • FIG. 3 is a schematic diagram of the MEMS micro-mirror laser scanning display device in FIG. 2;
  • FIG. 4 is a schematic diagram of the recording of HOE provided by Embodiment 1 of the present invention.
  • FIG. 5 is a schematic diagram of the principle of adjusting the coupled-in grating HOE and the coupled-in grating HOE according to the first embodiment of the present invention
  • FIG. 6 is a schematic diagram of the recording of the HOE coupled into the grating in FIG. 5.
  • the micro-mirror laser scanning near-eye display system includes: Microelectromechanical Systems (MEMS) MEMS micro-mirror scanning device 10, collimator 20, coupling-in grating 30, waveguide 40, and coupling-out grating 50.
  • MEMS micro-mirror scanning device 10 includes a light source for emitting a light beam. The light beam emitted by the light source becomes a parallel beam after passing through the collimator lens 20 and then vertically enters the coupling grating 30.
  • the grating 30 is a surface relief grating or a volume holographic grating, and the diffraction angle 31 ⁇ of the coupling grating 30 is greater than the total reflection angle of the waveguide 40; the light beam incident perpendicularly to the coupling grating 30 is caused by the coupling grating 30 Coupled into the waveguide 40 for transmission, the light beams coupled into the waveguide 40 are still equal to each other; the coupling grating 30 is placed on the surface of the waveguide 40, and the light beam transmitted through the waveguide 40 is inside the waveguide 40 Total reflection and coupling out by the coupling-out grating 50, the coupling-out grating 50 is a holographic grating, and the light beam of the waveguide 40 is coupled by the coupling-out grating 50 into a converging beam and converging in the human eye 60; The convergence point is the lens center 61 of the human eye 60, and then it is directly projected onto the retina 62 of the human eye 60 to form near vision.
  • the outcoupling grating 50 is a Holographic Optical Element (HOE), and the outcoupling grating 50 is placed on the surface of the waveguide 40.
  • the in-coupling grating 30 and the out-coupling grating 50 can be placed on the upper surface 41 or the lower surface 42 of the waveguide 40.
  • a transmissive coupling-in/out-coupling grating When the coupling-in grating 30 and the coupling-out grating 50 are placed on the lower surface 42 of the waveguide 40, they are reflective coupling-in/out-coupling gratings.
  • the upper surface of the waveguide 40 41 and the lower surface 42 are relative to the light source, namely the MEMS micro-mirror scanning device 10, the surface on the same side as the light source is the upper surface 41, and the opposite surface is the lower surface 42.
  • a reflective coupling-in grating/coupling-out grating is used as an example.
  • the light beams of the near-eye display system are scanned by the micro-mirror laser, and the light beams coupled by the coupling-out grating are projected to different positions on the retina of the human eye to form near-eye vision.
  • the light beams emitted from different directions carry information of different pixels of the image source.
  • the image composed of all pixels is directly projected to different positions on the retina 62 of the human eye to form image vision. Since all the light beams pass through the center 61 of the human eye lens, the focus adjustment of the lens does not affect the propagation of the light beam.
  • virtual digital images can be clearly displayed independently of the focusing of the lens, avoiding the occurrence of VAC. Since the light rays of all pixels are parallel to each other and are coupled into the waveguide at the same angle, the Field of View (FOV) 63 is not limited by the waveguide total reflection condition, and the near-eye vision field angle satisfies:
  • FOV is the viewing angle
  • s is the area of the HOE
  • d is the distance from the beam converging point to the waveguide.
  • the light incident on the coupling-in grating and the coupling-out grating HOE are parallel to each other, and the incident angles are the same, so there is no problem of different diffraction efficiency at different incident angles, and the human eye will see an image with uniform brightness.
  • FIG. 3 shows the MEMS micro-mirror scanning device 10.
  • LCOS Liquid Crystal on Silicon
  • DMD Digital Micro-Mirror Array
  • Micro-Organic Light-Emitting Diode Micro-OLED
  • the MEMS micro-mirror scanning device 10 has the advantages of small display chip, wide color gamut, high contrast, and focus-free. It is suitable for portable miniature projection system, near-eye display system, locomotive display system, and has broad market prospects.
  • the MEMS micro-reflector is etched by a bulk silicon micromachining process. The silicon has very good mechanical properties, and the shaft made of it can withstand high-speed rotation without breaking.
  • the MEMS micro-mirror scanning device 10 includes the light source, the beam combiner 15 and the MEMS micro-mirror 11 arranged in sequence along the propagation path of the light beam, the light source is an RGB three-color light source, and the RGB three-color light source is respectively R12, G13 and B14, the light beam emitted by the light source is integrated by the beam combiner 15 and then transmitted to the MEMS micro-mirror 11, and the MEMS micro-mirror 11 scans and displays the light beam.
  • the surface of the MEMS micro-mirror 11 is plated with metal to increase the light reflectivity in the visible light waveband. Specifically, in this embodiment, the surface of the mirror is plated with gold (Au) and then aluminum (Aluminum, Al). The reflectivity of light in the visible light band.
  • the MEMS micro-mirror 11 rotates around the fulcrum 110, and the color mode (Red Green Blue, RGB) three laser light sources R12, G13, and B14 reach the MEMS micro-mirror 11 after passing through the beam combiner 15 and the mirror 16 On the surface, the color of each pixel is controlled by adjusting the brightness of the three RGB lasers.
  • the color mode Red Green Blue, RGB
  • the HOE101 adopts a volume holographic recording method.
  • the use of the HOE101 includes single-layer multiple exposures or multiple-layer superimposed recording separately.
  • the recorded object light 102 is a spherical wave converging to o103 point
  • the reference light 104 is a plane wave.
  • the reference light 104 can be coupled into the waveguide 10 by using a prism 105 with a refractive index similar to that of the waveguide 10.
  • HOE101 needs to be exposed to it multiple times with RGB three-color lasers, so that it can record three kinds of RBG object light information; or use multi-layer HOE overlay.
  • three-layer HOE is used, each One layer records the object light information of one color in the RBG; in another embodiment, two layers of HOE are used, one layer records one color, and the other layer records the other two colors of object light information.
  • HOE generally uses volume holographic recording, which has good wavelength selectivity, and only diffracts the recorded RGB light with three wavelengths, while other wavelengths can be directly transmitted. Therefore, most of the ambient light can reach the human eye through the waveguide and HOE, so the displayed image can be superimposed on the surrounding environment.
  • both the coupling-in grating 30 and the coupling-out grating 50 are set to HOE, and the HOE of the coupling-in grating 30 And the HOE of the outcoupling grating 50 is placed on the upper surface or the lower surface of the waveguide 40, the HOE of the outcoupling grating 50 is greater than the HOE of the incoupling grating 30, and the HOE area of the outcoupling grating 50 is enlarged by increasing The FOV.
  • the HOE of the coupling-in grating 30 and the HOE of the coupling-out grating 50 are both placed on the upper surface 41 of the waveguide 40, the HOE is a transmissive HOE, and when the HOE of the coupling-in grating 30 is When the HOE of the outcoupling grating 50 is placed on the lower surface 42 of the waveguide 40, the HOE is a reflective HOE.
  • the HOE of the coupling-in grating 30 and the HOE of the coupling-out grating 50 are placed on the upper surface 41 of the waveguide 40 as an example.
  • the area of the HOE needs to be increased. Since the light transmitted in the waveguide 40 is parallel to each other, the area of the coupling grating 30 needs to be increased to expand the FOV. This will cause the collimator lens 20 and the MEMS micromirror scanning device 10 to become bulky. The increase is not conducive to the control of the overall volume and weight, and the portability is reduced. Therefore, specifically in this embodiment, the coupling grating 30 is replaced by HOE, and the parallel beams incident perpendicularly can be diffracted into divergent beams. It is only necessary to ensure that the minimum diffraction angle is greater than the total reflection angle of the waveguide, which is the divergent beam. Can be transmitted in the waveguide.
  • the contact area with the waveguide interface during each total reflection is larger than the previous total reflection.
  • the area of the HOE coupled out of the grating 50 is larger than the area of the HOE coupled into the grating 30, so that the FOV can be enlarged without increasing the volume and weight of the system.
  • the parallel beam incident vertically is the reference light 301
  • the reference light 301 is a plane wave incident perpendicular to the waveguide 40
  • the object light 302 is emitted from the o'point 303 Spherical wave.
  • the incident angle of the object light incident on the HOE center light coupled into the grating 30 satisfies:
  • ⁇ is the incident angle 304 of the object light
  • ⁇ is the waveguide refraction angle 305
  • n 0 is the air refractive index
  • n 1 is the waveguide refractive index
  • the micro-mirror laser scanning near-eye display system Compared with the prior art, the micro-mirror laser scanning near-eye display system provided by the present invention adjusts the angle of the incident light beam coupled into the grating to avoid the limitation of the total reflection angle of the waveguide. At the same time, it converges to the human eye through the HOE of the coupling out grating. The center of the lens prevents the occurrence of VAC. At the same time, the light is coupled in and out at an angle, and the uniformity of the displayed image is good.

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Abstract

A micromirror laser scanning near-eye display system, comprising an MEMS micromirror scanning apparatus (10), a collimating mirror (20), a coupling-in grating (30), a waveguide (40) and a coupling-out grating (50), wherein the coupling-in grating (30) is placed on the surface of the waveguide (40); the MEMS micromirror scanning apparatus (10) comprises a light source for emitting a light beam; the light beam emitted from the light source passes through the collimating mirror (20), and then becomes a parallel light beam; the parallel light beam perpendicularly enters the coupling-in grating (30); the light beam perpendicularly entering the coupling-in grating (30) is coupled into the waveguide (40) via the coupling-in grating (30) for transmission; the light beam transmitted by the waveguide (40) is totally reflected in the waveguide (40) and is coupled out by the coupling-out grating (50); the coupling-out grating (50) is a holographic grating; and the light beam from the waveguide (40) is coupled out by the coupling-out grating (50) in order to form a convergent light beam, and the convergent light beam converges in human eyes. The micromirror laser scanning near-eye display system prevents a light beam from being limited by the angle of total reflection of the waveguide (40), and avoids VAC; and at the same time, light rays are all coupled in and coupled out at one angle, so that the uniformity of a displayed image is good.

Description

微镜激光扫描近眼显示***Micro-mirror laser scanning near-eye display system 技术领域Technical field
本发明涉及波导近眼显示技术领域，尤其涉及一种微镜激光扫描近眼显示***。The invention relates to the technical field of waveguide near-eye display, in particular to a micro-mirror laser scanning near-eye display system.
背景技术Background technique
请参阅图1，图1为现有技术中的增强现实(Augmented Reality，AR)波导近眼显示设备，显示的图像源由微显示器1提供，微显示器1上不同像素点发出的光束被准直镜2转换为不同角度的入射光束，从而能被耦入光栅3耦入到波导4中。耦入的光束在波导4中以全反射的形式传输，当光束每次遇到耦出光栅5时都有部分能量的光束被耦出波导进入人眼6。最终不同像素点的光束以不同的角度进入人眼6，从而能看到无穷远处的显示图像。Please refer to Figure 1. Figure 1 is an augmented reality (AR) waveguide near-eye display device in the prior art. The displayed image source is provided by the microdisplay 1. The light beams emitted by different pixels on the microdisplay 1 are collimated by the collimator. 2 is converted into incident light beams of different angles, so that it can be coupled into the grating 3 into the waveguide 4. The coupled light beam is transmitted in the waveguide 4 in the form of total reflection. When the light beam encounters the coupling out grating 5 each time, a part of the energy of the light beam is coupled out of the waveguide and enters the human eye 6. Eventually, the light beams of different pixels enter the human eye 6 at different angles, so that the display image at infinity can be seen.
然而，图1中的显示装置至少有以下三个缺点：However, the display device in FIG. 1 has at least the following three disadvantages:
一、由于波导中以全反射的形式传播，视场(Field of View，FOV)受波导全反射角度的限制，无法实现很大的FOV；1. Because the waveguide propagates in the form of total reflection, the field of view (Field of View, FOV) is limited by the total reflection angle of the waveguide, and it is impossible to achieve a large FOV;
二、显示图像永远处于无穷远处，这样人眼聚焦在近处的时候会有视觉辐辏调节冲突(Vergence-accommodation Conflict，VAC)发生。2. The displayed image is always at infinity, so that when the human eye is focused on close, there will be a Vergence-accommodation Conflict (VAC).
三、不同像素点以不同角度被光栅耦入和耦出，而光栅对不同入射角的光束的衍射效率不同，而且不同角度光束在耦出光栅的耦出位置也不相同，综合以上两个因素，人眼看到的图像会出现亮度和色彩不均匀的现象。3. Different pixels are coupled in and out by the grating at different angles, and the diffraction efficiency of the grating to the beams of different incident angles is different, and the out-coupling positions of the beams with different angles are also different at the coupling out of the grating, combining the above two factors , The image seen by the human eye will appear uneven in brightness and color.
技术问题technical problem
本发明提供一种微镜激光扫描近眼显示***，能够扩大FOV大小，避免VAC的发生，同时显示的图像的均匀性好。The invention provides a micro-mirror laser scanning near-eye display system, which can expand the FOV size, avoid the occurrence of VAC, and display images with good uniformity.
技术解决方案Technical solutions
本发明提供的微镜激光扫描近眼显示***包括：MEMS微镜扫描装置、准直镜、耦入光栅、波导及耦出光栅，所述耦入光栅放置在所述波导表面，所述MEMS微镜扫描装置包括用于发射光束的光源，所述光源发出的光束经过所述准直镜后变为平行的光束，所述平行的光束垂直入射到所述耦入光栅，垂直入射到所述耦入光栅的光束由所述耦入光栅耦入所述波导进行传递，经所述波导传递的光束在所述波导内全反射并由所述耦出光栅耦出；所述耦出光栅为全息光栅，所述波导的光束由所述耦出光栅耦出为会聚光束并在人眼内会聚。MEMS微镜扫描装置MEMS微镜扫描装置The micro-mirror laser scanning near-eye display system provided by the present invention includes: a MEMS micro-mirror scanning device, a collimator, a coupling grating, a waveguide, and a coupling-out grating. The coupling grating is placed on the surface of the waveguide, and the MEMS micromirror The scanning device includes a light source for emitting light beams, the light beams emitted by the light sources become parallel light beams after passing through the collimator lens, the parallel light beams are incident perpendicularly to the coupling grating, and perpendicularly incident to the coupling grating. The light beam of the grating is coupled into the waveguide by the coupling grating for transmission, and the light beam transmitted through the waveguide is totally reflected in the waveguide and is coupled out by the coupling-out grating; the coupling-out grating is a holographic grating, The light beam of the waveguide is coupled out by the out-coupling grating into a convergent light beam and converges in the human eye. MEMS micro-mirror scanning deviceMEMS micro-mirror scanning device
优选地，所述MEMS微镜扫描装置包括沿所述光束的传播路径依次设置的所述光源、合束镜以及MEMS微反射镜，所述光源为RGB三色光源，所述光源发出的光束由所述合束镜整合后传递至所述MEMS微反射镜，所述MEMS微反射镜扫描显示所述光束。MEMS微镜扫描装置Preferably, the MEMS micro-mirror scanning device includes the light source, the beam combiner and the MEMS micro-mirror arranged in sequence along the propagation path of the light beam, the light source is an RGB three-color light source, and the light beam emitted by the light source is The beam combiner is integrated and transferred to the MEMS micro-mirror, and the MEMS micro-mirror scans and displays the light beam. MEMS micromirror scanning device
优选地，所述MEMS微反射镜的表面通过镀金属以增大对可见光波段的光反射率。Preferably, the surface of the MEMS micro-mirror is plated with metal to increase the light reflectivity of the visible light waveband.
优选地，所述耦入光栅为表面浮雕光栅或者体全息光栅，所述光束在所述耦入光栅内的衍射角大于在所述波导的全反射角。Preferably, the coupling grating is a surface relief grating or a volume holographic grating, and the diffraction angle of the light beam in the coupling grating is greater than the total reflection angle of the waveguide.
优选地，所述耦入光栅与耦出光栅均设置于所述波导靠近所述 MEMS微镜扫描装置的一侧。Preferably, the coupling-in grating and the coupling-out grating are both arranged on a side of the waveguide close to the MEMS micro-mirror scanning device.
优选地，所述耦出光栅设置于所述波导远离所述MEMS微镜扫描装置的一侧。Preferably, the coupling-out grating is arranged on a side of the waveguide away from the MEMS micro-mirror scanning device.
优选地，所述耦出光栅包括至少两层层叠设置的所述全息光栅，用于分别对RGB光束进行曝光。Preferably, the decoupling grating includes at least two layers of the holographic grating arranged in a layered manner, for respectively exposing the RGB light beams.
优选地，所述全息光栅采用多次曝光分别记录RGB三色光束。Preferably, the holographic grating adopts multiple exposures to separately record the RGB three-color light beams.
优选地，所述耦出光栅耦出的光束投影到人眼视网膜上不同的位置形成图像近眼视觉，所述近眼视觉视场角满足：Preferably, the light beams coupled by the coupling-out grating are projected to different positions on the retina of the human eye to form an image near-eye vision, and the near-eye vision field angle satisfies:
Figure PCTCN2020114578-appb-000001
Figure PCTCN2020114578-appb-000001
其中，FOV为视场角，s为所述全息光栅的面积，d为光束会聚点到波导的距离。Wherein, FOV is the field of view, s is the area of the holographic grating, and d is the distance from the beam converging point to the waveguide.
优选地，所述耦入光栅和所述耦出光栅同为体全息光栅，所述耦入光栅和所述耦出光栅设置于在波导同一侧，所述耦出光栅的面积大于所述耦入光栅的面积。Preferably, the coupling-in grating and the coupling-out grating are both volume holographic gratings, the coupling-in grating and the coupling-out grating are arranged on the same side of the waveguide, and the area of the coupling-out grating is larger than that of the coupling-in grating. The area of the grating.
优选地，所述耦入光栅和所述耦出光栅均设置于所述波导靠近所述MEMS微镜扫描装置的一侧，所述耦入光栅和所述耦出光栅均为透射光栅。Preferably, the coupling-in grating and the coupling-out grating are both arranged on a side of the waveguide close to the MEMS micro-mirror scanning device, and both the coupling-in grating and the coupling-out grating are transmission gratings.
优选地，所述耦入光栅和所述耦出光栅均设置于所述波导远离所述MEMS微镜扫描装置的一侧，所述耦入光栅和所述耦出光栅均为反射光栅。Preferably, the coupling-in grating and the coupling-out grating are both arranged on a side of the waveguide away from the MEMS micro-mirror scanning device, and the coupling-in grating and the coupling-out grating are both reflective gratings.
优选地，对于所述耦入光栅，垂直于所述波导入射的平行光束为参考光，入射到耦入光栅的中心光线的物光的入射角度满足：Preferably, for the coupling grating, a parallel light beam incident perpendicular to the waveguide is the reference light, and the incident angle of the object light incident on the central ray of the coupling grating satisfies:
n 0sinγ＝n 1sinβ n 0 sinγ=n 1 sinβ
其中，γ为物光入射角度，β为波导折射角度，n 0为空气折射率，n 1为波导折射率。 Among them, γ is the incident angle of the object light, β is the waveguide refraction angle, n 0 is the refractive index of air, and n 1 is the waveguide refractive index.
有益效果Beneficial effect
与现有技术相比，本发明提供的微镜激光扫描近眼显示***，通过调整入射耦入光栅的光束角度，避免光束受波导全反射角的限制，同时通过耦出光栅的HOE会聚到人眼晶状体中心，避免VAC的发生，同时，光线均以一个角度被耦入和耦出，显示的图像的均匀性好。Compared with the prior art, the micro-mirror laser scanning near-eye display system provided by the present invention adjusts the angle of the incident light beam coupled into the grating to avoid the limitation of the light beam by the total reflection angle of the waveguide, and at the same time converges to the human eye through the HOE of the coupling out grating The center of the lens prevents the occurrence of VAC. At the same time, the light is coupled in and out at an angle, and the uniformity of the displayed image is good.
附图说明Description of the drawings
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其它的附图，其中：In order to explain the technical solutions in the embodiments of the present invention more clearly, the following will briefly introduce the drawings needed in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative work, other drawings can be obtained based on these drawings, among which:
图1为现有技术的AR波导近眼显示的示意图；Figure 1 is a schematic diagram of a prior art AR waveguide near-eye display;
图2为本发明实施例一提供的微镜激光扫描近眼显示***的示意图；2 is a schematic diagram of a micro-mirror laser scanning near-eye display system provided by Embodiment 1 of the present invention;
图3为图2中的MEMS微镜激光扫描显示装置的示意图；3 is a schematic diagram of the MEMS micro-mirror laser scanning display device in FIG. 2;
图4为本发明实施例一提供的HOE的记录示意图；4 is a schematic diagram of the recording of HOE provided by Embodiment 1 of the present invention;
图5为本发明实施例一提供的调整耦入光栅HOE和耦入光栅HOE的原理示意图；5 is a schematic diagram of the principle of adjusting the coupled-in grating HOE and the coupled-in grating HOE according to the first embodiment of the present invention;
图6为图5中的耦入光栅的HOE的记录示意图。FIG. 6 is a schematic diagram of the recording of the HOE coupled into the grating in FIG. 5.
本发明的实施方式Embodiments of the present invention
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例，都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
请参阅图2，本发明提供的微镜激光扫描近眼显示***包括：微机电***(Microelectromechanical Systems，MEMS)MEMS微镜扫描装置10、准直镜20、耦入光栅30、波导40及耦出光栅50，所述MEMS微镜扫描装置10包括用于发射光束的光源，所述光源发出的光束经过所述准直镜20后变为平行的光束后垂直入射到耦入光栅30，所述耦入光栅30为表面浮雕光栅或者体全息光栅，所述耦入光栅30的衍射角31θ大于在所述波导40的全反射角；垂直入射到所述耦入光栅30的光束由所述耦入光栅30耦入所述波导40进行传递，耦入波导40后的光束之间仍彼此平等；所述耦入光栅30放置在所述波导40表面，经所述波导40传递的光束在所述波导40内全反射并由所述耦出光栅50耦出，所述耦出光栅50为全息光栅，所述波导40的光束由所述耦出光栅50耦出为会聚光束并在人眼60内会聚；光束会聚点为人眼60的晶状体中心61，然后直接投影到人眼60的视网膜62上，形成近眼视觉。Please refer to FIG. 2. The micro-mirror laser scanning near-eye display system provided by the present invention includes: Microelectromechanical Systems (MEMS) MEMS micro-mirror scanning device 10, collimator 20, coupling-in grating 30, waveguide 40, and coupling-out grating 50. The MEMS micro-mirror scanning device 10 includes a light source for emitting a light beam. The light beam emitted by the light source becomes a parallel beam after passing through the collimator lens 20 and then vertically enters the coupling grating 30. The grating 30 is a surface relief grating or a volume holographic grating, and the diffraction angle 31θ of the coupling grating 30 is greater than the total reflection angle of the waveguide 40; the light beam incident perpendicularly to the coupling grating 30 is caused by the coupling grating 30 Coupled into the waveguide 40 for transmission, the light beams coupled into the waveguide 40 are still equal to each other; the coupling grating 30 is placed on the surface of the waveguide 40, and the light beam transmitted through the waveguide 40 is inside the waveguide 40 Total reflection and coupling out by the coupling-out grating 50, the coupling-out grating 50 is a holographic grating, and the light beam of the waveguide 40 is coupled by the coupling-out grating 50 into a converging beam and converging in the human eye 60; The convergence point is the lens center 61 of the human eye 60, and then it is directly projected onto the retina 62 of the human eye 60 to form near vision.
所述耦出光栅50为全息光学元件(Holographic Optical Element，HOE)，所述耦出光栅50放置在所述波导40的表面。所述耦入光栅 30和耦出光栅50可以放置于所述波导40的上表面41或下表面42，所述耦入光栅30和耦出光栅50放置在所述波导40的上表面41时为透射式耦入光栅/耦出光栅，所述耦入光栅30和耦出光栅50放置在所述波导40的下表面42时为反射式耦入光栅/耦出光栅，所述波导40的上表面41和下表面42是相对于光源，即所述MEMS微镜扫描装置10所说，与所述光源在同一侧的表面为上表面41，相反的一面为下表面42。具体在本实施例中，采用反射式耦入光栅/耦出光栅为例。The outcoupling grating 50 is a Holographic Optical Element (HOE), and the outcoupling grating 50 is placed on the surface of the waveguide 40. The in-coupling grating 30 and the out-coupling grating 50 can be placed on the upper surface 41 or the lower surface 42 of the waveguide 40. When the in-coupling grating 30 and the out-coupling grating 50 are placed on the upper surface 41 of the waveguide 40, A transmissive coupling-in/out-coupling grating. When the coupling-in grating 30 and the coupling-out grating 50 are placed on the lower surface 42 of the waveguide 40, they are reflective coupling-in/out-coupling gratings. The upper surface of the waveguide 40 41 and the lower surface 42 are relative to the light source, namely the MEMS micro-mirror scanning device 10, the surface on the same side as the light source is the upper surface 41, and the opposite surface is the lower surface 42. Specifically, in this embodiment, a reflective coupling-in grating/coupling-out grating is used as an example.
经过所述的微镜激光扫描近眼显示***的光束，所述耦出光栅耦出的光束投影到人眼视网膜上不同的位置形成图像近眼视觉，不同方向射出的光束携带图像源不同像素点的信息，所有像素点组成的图像被直接投影到人眼视网膜62上不同的位置形成图像视觉，由于全部光束都经过人眼晶状体中心61，故晶状体的调焦不影响光束的传播，当人眼60调焦和会聚辐辏以观察远近不同的自然真实物体时，虚拟数字图像都能够独立于晶状体的调焦而清晰地显示，避免了VAC发生。由于所有像素点的光线彼此平行，以相同的角度耦入波导，所以近眼视觉视场角(Field of View，FOV)63不受波导全反射条件限制，所述近眼视觉视场角满足：The light beams of the near-eye display system are scanned by the micro-mirror laser, and the light beams coupled by the coupling-out grating are projected to different positions on the retina of the human eye to form near-eye vision. The light beams emitted from different directions carry information of different pixels of the image source. The image composed of all pixels is directly projected to different positions on the retina 62 of the human eye to form image vision. Since all the light beams pass through the center 61 of the human eye lens, the focus adjustment of the lens does not affect the propagation of the light beam. When focusing and converging to observe natural real objects with different distances, virtual digital images can be clearly displayed independently of the focusing of the lens, avoiding the occurrence of VAC. Since the light rays of all pixels are parallel to each other and are coupled into the waveguide at the same angle, the Field of View (FOV) 63 is not limited by the waveguide total reflection condition, and the near-eye vision field angle satisfies:
Figure PCTCN2020114578-appb-000002
Figure PCTCN2020114578-appb-000002
其中，FOV为视声角，s为HOE的面积，d为光束会聚点到波导的距离。Among them, FOV is the viewing angle, s is the area of the HOE, and d is the distance from the beam converging point to the waveguide.
因此，入射到耦入光栅和耦出光栅HOE的光线彼此平行，入射 角都相同，所以不存在不同入射角度衍射效率不同的问题，人眼将看到亮度均匀的图像。Therefore, the light incident on the coupling-in grating and the coupling-out grating HOE are parallel to each other, and the incident angles are the same, so there is no problem of different diffraction efficiency at different incident angles, and the human eye will see an image with uniform brightness.
请参阅图3，图3显示所述MEMS微镜扫描装置10，相比于现有技术中的微显示技术，如硅基液晶(Liquid Crystal on Silicon，LCOS)，数字微镜阵列(Digital Micro-mirror Device，DMD)，微型有机发光二极管(Micro-Organic Light-Emitting Diode，Micro-OLED)等，所述MEMS微镜扫描装置10具有显示芯片小、广色域、高对比度和免对焦的优点，适用于便携式微型投影***、近眼显示***、机车显示***，具有广阔的市场前景。所述MEMS微反射镜由体硅微加工工艺刻蚀得到，硅具有非常好的机械性能，其制成的转轴能承受高速的转动而不会断裂。所述MEMS微镜扫描装置10包括沿所述光束的传播路径依次设置的所述光源、合束镜15以及MEMS微反射镜11，所述光源为RGB三色光源，所述RGB三色光源分别为R12、G13和B14，所述光源发出的光束由所述合束镜15整合后传递至所述MEMS微反射镜11，所述MEMS微反射镜11扫描显示所述光束。所述MEMS微反射镜11的表面通过镀金属以增大对可见光波段的光反射率，具体在本实施例中，在反射镜表面会镀金(Gold，Au)后铝(Aluminum，Al)来增大对可见光波段的光反射率。Please refer to FIG. 3, which shows the MEMS micro-mirror scanning device 10. Compared with the micro-display technology in the prior art, such as Liquid Crystal on Silicon (LCOS), Digital Micro-Mirror Array (Digital Micro- mirror Device, DMD), Micro-Organic Light-Emitting Diode (Micro-OLED), etc. The MEMS micro-mirror scanning device 10 has the advantages of small display chip, wide color gamut, high contrast, and focus-free. It is suitable for portable miniature projection system, near-eye display system, locomotive display system, and has broad market prospects. The MEMS micro-reflector is etched by a bulk silicon micromachining process. The silicon has very good mechanical properties, and the shaft made of it can withstand high-speed rotation without breaking. The MEMS micro-mirror scanning device 10 includes the light source, the beam combiner 15 and the MEMS micro-mirror 11 arranged in sequence along the propagation path of the light beam, the light source is an RGB three-color light source, and the RGB three-color light source is respectively R12, G13 and B14, the light beam emitted by the light source is integrated by the beam combiner 15 and then transmitted to the MEMS micro-mirror 11, and the MEMS micro-mirror 11 scans and displays the light beam. The surface of the MEMS micro-mirror 11 is plated with metal to increase the light reflectivity in the visible light waveband. Specifically, in this embodiment, the surface of the mirror is plated with gold (Au) and then aluminum (Aluminum, Al). The reflectivity of light in the visible light band.
如图3所示，MEMS微反射镜11绕支点110旋转，颜色模式(Red Green Blue，RGB)三种激光光源R12、G13和B14经过合束镜15和反射镜16后到达MEMS微反射镜11表面，每个像素点的颜色通过调节RGB三个激光的亮度来控制。As shown in Fig. 3, the MEMS micro-mirror 11 rotates around the fulcrum 110, and the color mode (Red Green Blue, RGB) three laser light sources R12, G13, and B14 reach the MEMS micro-mirror 11 after passing through the beam combiner 15 and the mirror 16 On the surface, the color of each pixel is controlled by adjusting the brightness of the three RGB lasers.
请参阅图4，所述HOE101采用体全息的记录方式，对于RBG三色显示，所述HOE101的使用包括单层多次曝光或者多层叠加分别记录。具体地，记录的物光102为会聚到o103点的球面波，参考光104为平面波，利用折射率与波导10相近的棱镜105可以将参考光104耦合入波导10。对于RBG三色显示，HOE101需要分别用RGB三色激光对其多次曝光，这样能记录RBG三种物光信息；或者用多层HOE叠加，具体在一实施例中，使用三层HOE，每一层记录RBG中一种颜色的物光信息；在另一实施例中，使用两层HOE，一层记录一种颜色，另一层记录另外两种颜色的物光信息。Referring to FIG. 4, the HOE101 adopts a volume holographic recording method. For RBG three-color display, the use of the HOE101 includes single-layer multiple exposures or multiple-layer superimposed recording separately. Specifically, the recorded object light 102 is a spherical wave converging to o103 point, and the reference light 104 is a plane wave. The reference light 104 can be coupled into the waveguide 10 by using a prism 105 with a refractive index similar to that of the waveguide 10. For RBG three-color display, HOE101 needs to be exposed to it multiple times with RGB three-color lasers, so that it can record three kinds of RBG object light information; or use multi-layer HOE overlay. Specifically, in one embodiment, three-layer HOE is used, each One layer records the object light information of one color in the RBG; in another embodiment, two layers of HOE are used, one layer records one color, and the other layer records the other two colors of object light information.
这里HOE一般采用体全息的记录方式，其对波长有很好的选择性，只衍射记录的RGB三种波长的光，而其它波长的光可以直接透过。所以大部分的环境光线能透过波导和HOE到达人眼，所以显示的图像能叠加到周围的环境中去。Here, HOE generally uses volume holographic recording, which has good wavelength selectivity, and only diffracts the recorded RGB light with three wavelengths, while other wavelengths can be directly transmitted. Therefore, most of the ambient light can reach the human eye through the waveguide and HOE, so the displayed image can be superimposed on the surrounding environment.
请参阅图5，具体在一实施例中，由于要扩大人眼近眼显示的FOV，因此将所述耦入光栅30和所述耦出光栅50均设为HOE，所述耦入光栅30的HOE和所述耦出光栅50的HOE放置在波导40的上表面或下表面，所述耦出光栅50的HOE大于所述耦入光栅30的HOE，通过增加所述耦出光栅50的HOE面积扩大所述FOV。具体地，当所述耦入光栅30的HOE和所述耦出光栅50的HOE都放置在波导40的上表面41时，所述HOE为透射式HOE，当所述耦入光栅30的HOE和所述耦出光栅50的HOE都放置在波导40的下表面42时，所述HOE为反射式HOE。具体在本实施例中，以所述耦入光栅 30的HOE和所述耦出光栅50的HOE都放置在波导40的上表面41为例。Referring to FIG. 5, in an embodiment, since the FOV displayed by the human eye near the eye is to be enlarged, both the coupling-in grating 30 and the coupling-out grating 50 are set to HOE, and the HOE of the coupling-in grating 30 And the HOE of the outcoupling grating 50 is placed on the upper surface or the lower surface of the waveguide 40, the HOE of the outcoupling grating 50 is greater than the HOE of the incoupling grating 30, and the HOE area of the outcoupling grating 50 is enlarged by increasing The FOV. Specifically, when the HOE of the coupling-in grating 30 and the HOE of the coupling-out grating 50 are both placed on the upper surface 41 of the waveguide 40, the HOE is a transmissive HOE, and when the HOE of the coupling-in grating 30 is When the HOE of the outcoupling grating 50 is placed on the lower surface 42 of the waveguide 40, the HOE is a reflective HOE. Specifically, in this embodiment, it is assumed that both the HOE of the coupling-in grating 30 and the HOE of the coupling-out grating 50 are placed on the upper surface 41 of the waveguide 40 as an example.
为扩大FOV需要增大HOE的面积，由于波导40中传输的光线彼此平行，从而需要增大耦入光栅30的面积才能扩大FOV，这样会导致准直镜20和MEMS微镜扫描装置10体积的增大，不利于整体体积和重量的控制，降低了便携性。因此，具体在本实施例中，将耦入光栅30换成了HOE，垂直入射的平行光束能被衍射为发散的光束，只需要保证最小的衍射角大于波导的全反射角这个发散的光束就能在波导中传输。由于光束发散的特性，每一次全反射时与波导界面的接触面积都大于上一次全反射。这样耦出光栅50的HOE的面积大于所述耦入光栅30的HOE的面积，这样可在不增大***的体积和重量的情况扩大FOV。In order to expand the FOV, the area of the HOE needs to be increased. Since the light transmitted in the waveguide 40 is parallel to each other, the area of the coupling grating 30 needs to be increased to expand the FOV. This will cause the collimator lens 20 and the MEMS micromirror scanning device 10 to become bulky. The increase is not conducive to the control of the overall volume and weight, and the portability is reduced. Therefore, specifically in this embodiment, the coupling grating 30 is replaced by HOE, and the parallel beams incident perpendicularly can be diffracted into divergent beams. It is only necessary to ensure that the minimum diffraction angle is greater than the total reflection angle of the waveguide, which is the divergent beam. Can be transmitted in the waveguide. Due to the divergence of the beam, the contact area with the waveguide interface during each total reflection is larger than the previous total reflection. In this way, the area of the HOE coupled out of the grating 50 is larger than the area of the HOE coupled into the grating 30, so that the FOV can be enlarged without increasing the volume and weight of the system.
请参阅图6，对于所述耦入光栅30的HOE，垂直入射的平行光束为参考光301，所述参考光301为垂直于波导40入射的平面波，物光302为从o’点303发出的球面波。考虑到波导的折射率与空气的折射率不同，入射到耦入光栅30的HOE中心光线的物光的入射角度满足：Referring to FIG. 6, for the HOE coupled into the grating 30, the parallel beam incident vertically is the reference light 301, the reference light 301 is a plane wave incident perpendicular to the waveguide 40, and the object light 302 is emitted from the o'point 303 Spherical wave. Considering that the refractive index of the waveguide is different from that of air, the incident angle of the object light incident on the HOE center light coupled into the grating 30 satisfies:
n 0sinγ＝n 1sinβ n 0 sinγ=n 1 sinβ
其中，γ为物光入射角度304，β为波导折射角度305，n 0为空气折射率，n 1为波导折射率。 Among them, γ is the incident angle 304 of the object light, β is the waveguide refraction angle 305, n 0 is the air refractive index, and n 1 is the waveguide refractive index.
与现有技术相比，本发明提供的微镜激光扫描近眼显示***，通过调整入射耦入光栅的光束角度，避免光束受波导全反射角的限制， 同时通过耦出光栅的HOE会聚到人眼晶状体中心，避免VAC的发生，同时，光线均以一个角度被耦入和耦出，显示的图像的均匀性好。Compared with the prior art, the micro-mirror laser scanning near-eye display system provided by the present invention adjusts the angle of the incident light beam coupled into the grating to avoid the limitation of the total reflection angle of the waveguide. At the same time, it converges to the human eye through the HOE of the coupling out grating. The center of the lens prevents the occurrence of VAC. At the same time, the light is coupled in and out at an angle, and the uniformity of the displayed image is good.
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。The above are only the embodiments of the present invention. It should be pointed out here that for those of ordinary skill in the art, improvements can be made without departing from the inventive concept of the present invention, but these all belong to the present invention. The scope of protection.

Claims (13)

  1. 一种微镜激光扫描近眼显示***，其特征在于，所述微镜激光扫描近眼显示***包括：MEMS微镜扫描装置、准直镜、耦入光栅、波导及耦出光栅，所述耦入光栅放置在所述波导表面，所述MEMS微镜扫描装置包括用于发射光束的光源，所述光源发出的光束经过所述准直镜后变为平行的光束，所述平行的光束垂直入射到所述耦入光栅，垂直入射到所述耦入光栅的光束由所述耦入光栅耦入所述波导进行传递，经所述波导传递的光束在所述波导内全反射并由所述耦出光栅耦出；所述耦出光栅为全息光栅，所述波导的光束由所述耦出光栅耦出为会聚光束并在人眼内会聚。A micro-mirror laser scanning near-eye display system, characterized in that the micro-mirror laser scanning near-eye display system includes: a MEMS micro-mirror scanning device, a collimator lens, a coupling grating, a waveguide, and a coupling-out grating, the coupling grating Placed on the surface of the waveguide, the MEMS micro-mirror scanning device includes a light source for emitting a light beam, the light beam emitted by the light source becomes a parallel light beam after passing through the collimator lens, and the parallel light beam is incident perpendicularly to the light beam. The in-coupling grating, the light beam vertically incident to the in-coupling grating is transmitted by the in-coupling grating into the waveguide, and the light beam transmitted through the waveguide is totally reflected in the waveguide and is transmitted by the out-coupling grating Coupling; the coupling-out grating is a holographic grating, and the light beam of the waveguide is coupled by the coupling-out grating into a convergent beam and converging in the human eye.
  2. 根据权利要求1所述的微镜激光扫描近眼显示***，其特征在于，所述MEMS微镜扫描装置包括沿所述光束的传播路径依次设置的所述光源、合束镜以及MEMS微反射镜，所述光源为RGB三色光源，所述光源发出的光束由所述合束镜整合后传递至所述MEMS微反射镜，所述MEMS微反射镜扫描显示所述光束。The micro-mirror laser scanning near-eye display system according to claim 1, wherein the MEMS micro-mirror scanning device comprises the light source, the beam combiner, and the MEMS micro-mirror arranged in sequence along the propagation path of the light beam, The light source is an RGB three-color light source, the light beams emitted by the light source are integrated by the beam combiner and then transmitted to the MEMS micro-mirror, and the MEMS micro-mirror scans and displays the light beam.
  3. 根据权利要求2所述的微镜激光扫描近眼显示***，其特征在于，所述MEMS微反射镜的表面通过镀金属以增大对可见光波段的光反射率。The micro-mirror laser scanning near-eye display system according to claim 2, wherein the surface of the MEMS micro-mirror is plated with metal to increase the light reflectivity of the visible light waveband.
  4. 根据权利要求1所述的微镜激光扫描近眼显示***，其特征在于，所述耦入光栅为表面浮雕光栅或者体全息光栅，所述光束在所述耦入光栅内的衍射角大于在所述波导的全反射角。The micromirror laser scanning near-eye display system according to claim 1, wherein the coupling grating is a surface relief grating or a volume holographic grating, and the diffraction angle of the light beam in the coupling grating is larger than that in the coupling grating. The total reflection angle of the waveguide.
  5. 根据权利要求1所述的微镜激光扫描近眼显示***，其特征 在于，所述耦入光栅与耦出光栅均设置于所述波导靠近所述MEMS微镜扫描装置的一侧。The micromirror laser scanning near-eye display system according to claim 1, wherein the coupling-in grating and the coupling-out grating are both arranged on a side of the waveguide close to the MEMS micro-mirror scanning device.
  6. 根据权利要求1所述的微镜激光扫描近眼显示***，其特征在于，所述耦出光栅设置于所述波导远离所述MEMS微镜扫描装置的一侧。The micro-mirror laser scanning near-eye display system according to claim 1, wherein the coupling-out grating is disposed on a side of the waveguide away from the MEMS micro-mirror scanning device.
  7. 根据权利要求2所述的微镜激光扫描近眼显示***，其特征在于，所述耦出光栅包括至少两层层叠设置的所述全息光栅，用于分别对RGB光束进行曝光。The micro-mirror laser scanning near-eye display system according to claim 2, wherein the coupling-out grating comprises at least two layers of the holographic grating arranged in a layered manner, for respectively exposing RGB light beams.
  8. 根据权利要求2所述的微镜激光扫描近眼显示***，其特征在于，所述全息光栅采用多次曝光分别记录RGB三色光束。The micro-mirror laser scanning near-eye display system according to claim 2, wherein the holographic grating adopts multiple exposures to separately record RGB three-color light beams.
  9. 根据权利要求1所述的微镜激光扫描近眼显示***，其特征在于，所述耦出光栅耦出的光束投影到人眼视网膜上不同的位置形成图像近眼视觉，所述近眼视觉视场角满足：The micro-mirror laser scanning near-eye display system according to claim 1, wherein the light beams coupled by the coupling-out grating are projected to different positions on the retina of the human eye to form near-eye vision, and the near-eye vision field angle satisfies :
    Figure PCTCN2020114578-appb-100001
    Figure PCTCN2020114578-appb-100001
    其中，FOV为视场角，s为所述全息光栅的面积，d为光束会聚点到波导的距离。Wherein, FOV is the field of view, s is the area of the holographic grating, and d is the distance from the beam converging point to the waveguide.
  10. 根据权利要求1或9所述的微镜激光扫描近眼显示***，其特征在于，所述耦入光栅和所述耦出光栅同为体全息光栅，所述耦入光栅和所述耦出光栅设置于在波导同一侧，所述耦出光栅的面积大于所述耦入光栅的面积。The micromirror laser scanning near-eye display system according to claim 1 or 9, wherein the coupling-in grating and the coupling-out grating are both volume holographic gratings, and the coupling-in grating and the coupling-out grating are arranged On the same side of the waveguide, the area of the coupling-out grating is larger than the area of the coupling-in grating.
  11. 根据权利要求10所述的微镜激光扫描近眼显示***，其特征在于，所述耦入光栅和所述耦出光栅均设置于所述波导靠近所述 MEMS微镜扫描装置的一侧，所述耦入光栅和所述耦出光栅均为透射光栅。The micro-mirror laser scanning near-eye display system according to claim 10, wherein the coupling-in grating and the coupling-out grating are both arranged on a side of the waveguide close to the MEMS micro-mirror scanning device, and Both the coupling-in grating and the coupling-out grating are transmission gratings.
  12. 根据权利要求10所述的微镜激光扫描近眼显示***，其特征在于，所述耦入光栅和所述耦出光栅均设置于所述波导远离所述MEMS微镜扫描装置的一侧，所述耦入光栅和所述耦出光栅均为反射光栅。The micro-mirror laser scanning near-eye display system according to claim 10, wherein the coupling-in grating and the coupling-out grating are both arranged on a side of the waveguide away from the MEMS micro-mirror scanning device, and the Both the coupling-in grating and the coupling-out grating are reflective gratings.
  13. 根据权利要求10所述的微镜激光扫描近眼显示***，其特征在于，对于所述耦入光栅，垂直于所述波导入射的平行光束为参考光，入射到耦入光栅的中心光线的物光的入射角度满足：The micro-mirror laser scanning near-eye display system according to claim 10, wherein for the coupling grating, a parallel beam incident perpendicular to the waveguide is the reference light, and the object light incident on the central ray of the coupling grating The incident angle satisfies:
    n 0sinγ＝n 1sinβ n 0 sinγ=n 1 sinβ
    其中，γ为物光入射角度，β为波导折射角度，n 0为空气折射率，n 1为波导折射率。 Among them, γ is the incident angle of the object light, β is the waveguide refraction angle, n 0 is the refractive index of air, and n 1 is the waveguide refractive index.
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