WO2021101492A2 - A film coating composition - Google Patents

A film coating composition Download PDF

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Publication number
WO2021101492A2
WO2021101492A2 PCT/TR2020/051143 TR2020051143W WO2021101492A2 WO 2021101492 A2 WO2021101492 A2 WO 2021101492A2 TR 2020051143 W TR2020051143 W TR 2020051143W WO 2021101492 A2 WO2021101492 A2 WO 2021101492A2
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Prior art keywords
nitride
titanium
film coating
coating
chrome
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PCT/TR2020/051143
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French (fr)
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WO2021101492A3 (en
Inventor
İhsan EFEOĞLU
Yaşar TOTİK
Ayşenur KELEŞ
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Ataturk Universitesi Bilimsel Arastirma Projeleri Birimi
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Publication of WO2021101492A2 publication Critical patent/WO2021101492A2/en
Publication of WO2021101492A3 publication Critical patent/WO2021101492A3/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0647—Boron nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Definitions

  • Invention relates to an ultra-hard c-BN (cubic boron nitride) films improving adhesion value.
  • Invention particularly relates to an ultra-hard film coating formed by layers comprising titanium or chrome, chrome nitride or titanium nitride, titanium di-boride, titanium boron nitride, boron carbon-nitride and cubic boron nitride agents.
  • Citride application numbered CN101462386 discloses a coated tool part.
  • Hard alloy, ceramic, cubic boron nitride or high-speed steel is used as coating substrate.
  • Said coating comprises at least two non-metal functional layers and a metal layer between said layers.
  • metal layer comprises one or more of Ti, Mo, Al, Cr, V, Y, Nb, W, Ta and Zr metals
  • non-metal layer comprises nitride, oxide, boride, carbide or a combination thereof.
  • This patent application indicates a similarity in terms of coating composition.
  • coating composition of the invention is formed by specific determination of layers and contents giving optimum features as a result of studies conducted.
  • Another invention is TR numbered Turkish patent application entitled “a method for manufacture of decorative HiPIMS hard material layers”.
  • the invention relates to a method for coating of bottom layers by a decorative hard material in vacuum coating chamber, wherein decorative hard material layer is settled by help of a reactive HiPIMS process (High Power Pulse Magnetron Sputtering) and power content is arranged in a manner settled hard material layer achieves a homogenous colour, lower surface roughness and a higher hardness.
  • This application indicates similarity only in terms of method but it does not disclose composition of the invention.
  • the present invention relates to an ultra hard film meeting the needs mentioned above, eliminating all disadvantages and providing some additional advantages.
  • Primary purpose of the invention is to improve adhesion value of c-BN films.
  • Another purpose of the invention is to achieve a c-BN film of high resistance against wear and corrosion.
  • a further purpose of the invention is to decrease coefficient of friction in coated machine parts and increase service life of machines.
  • Ultra hard film coating developed to achieve above mentioned purposes comprises at least one or more layer composed by respectively titanium or chrome, chrome nitride or titanium nitride, titanium di-boride, titanium boron nitride, boron carbide, boron carbon- nitride and cubic boron nitride agent starting from surface of the bottom material to be coated.
  • Figure 1 shows FT-IR graphic of film coating of the invention.
  • Figure 2 shows SEM picture of film coating of the invention.
  • Figure 3 is a schematic view of film coating of the invention.
  • Figure 4 is view of graphic obtained as a result of scratch test wherein adhesion critical load of film for the invention is obtained.
  • Invention is an ultra hard film coating improving adhesion value of layers comprising respectively from bottom surface of material to be coated titanium or chrome (Ti/Cr), chrome nitride or titanium nitride (CrN/TiN), titanium diboride (TiB 2 ), titanium boron nitride (TiBN), boron carbide (B 4 C), boron carbonitride (BCN) and cubic boron nitride (c-BN).
  • Ti/Cr titanium or chrome
  • CrN/TiN chrome nitride or titanium nitride
  • TiB 2 titanium diboride
  • TiBN titanium boron nitride
  • B 4 C boron carbide
  • BCN boron carbonitride
  • c-BN cubic boron nitride
  • Ultra hard film coating of the invention is produced by use of HiPIMS. It is used in coating of machine members as bottom material.
  • Ti is commonly used to improve adhesion between bottom material (machine member bottom of which is film coated) and film. In addition to adhesion feature, Ti also increases corrosion strength. Cr is also used to improve adhesion. During preliminary studies, it is seen that Cr gives better result in interlayer than Ti interlayer.
  • Chrome nitride (CrN) cubic structure has same coordination structure as NaCI and 20-24 GPa hardness value. Since CrN has strong covalent bond, it is a compound having high melting point. Since CrN also show extraordinary wear and corrosion resistance, it is commonly used in industrial coating.
  • Titanium diboride (TiB 2 ) is composed by planar stacking of Ti and B atoms having strong covalent bond and because of that it has high melting point. It also has high hardness. It is commonly used for shields resistant against hit, pots resistant against heat and coating resistant against wear.
  • TiBN titanium boron nitride
  • TiBN coating has perfect mechanical, chemical and thermal stability features, they are commonly used in technological applications.
  • TiBN coating is used in industrial applications requiring features such as appropriate tribiological features (low friction coefficient and high wear resistance) and good oxidization and corrosion resistance. It is possible to control mechanical and tri-biological features of TiBN coating by means of controlling boron and nitrogen content of coating.
  • B or N concentration increases in TiBN system grain size, coating morphology, chemical and phase composition is affected and mechanical and chemical features change. This is because of occurrence of c-BN and/or h-BN phases in the structure.
  • BCN Boron carbonitride
  • c-BCN Cubic BCN
  • c-BCN is a compound expected to combine super hardness of diamond and high oxidization strength of c-BCN.
  • BCN coating enlarged by use of various vacuum coating techniques are widely studied in respect to mechanical features of films but hardness could not be reached to ultra high hardness value.
  • Development of super hard coating having improved chemical and wear resistance such as TiBCN provides contribution to development of advanced coating materials.
  • Coating of the invention comprises cubic nitride in 85 % in weight ( Figure 1).
  • c-BN considered as the most important ceramic coating for improvement of friction and wear properties of contact surfaces of machine parts will be coated to give better functional features.
  • applying coating in form of Cr+CrN+TiB2+TiBN+B4C+BCN-i-c-BN onto substrate will increase adhesion of film more as well as improve friction and wear features.
  • c-BN films obtained by HiPIMS has longer life and better performance for mechanical and tribiomechanical applications. Since the performed coating has high adhesion, it reduces friction occurring in machine members and increases service lives of machines.
  • Ultra hard c-BN films with improved adhesion value can be used

Abstract

Invention relates to an ultra hard film coating with improved adhesion value, comprising at least one or more layer composed by respectively titanium or chrome, chrome nitride or titanium nitride, titanium di-boride, titanium boron nitride, boron carbide, boron carbon-nitride and cubic boron nitride agent starting from surface of the substrate to be coated.

Description

A film Coating Composition
Technical Field
Invention relates to an ultra-hard c-BN (cubic boron nitride) films improving adhesion value.
Invention particularly relates to an ultra-hard film coating formed by layers comprising titanium or chrome, chrome nitride or titanium nitride, titanium di-boride, titanium boron nitride, boron carbon-nitride and cubic boron nitride agents.
Present State of the Art
Today the biggest problem with coated c-BN films is inadequacy of adhesion in mechanic or thermo-mechanic applications. For that reason, machine parts contact each other during working and cause friction and wear problems. Hard c-BN films separated from bottom material due to low adhesion causes increase in wear. Coated films show semi column feature.
In the literature the following applications are seen in relevant to the subject.
Chinese Patent application numbered CN101462386 discloses a coated tool part. Hard alloy, ceramic, cubic boron nitride or high-speed steel is used as coating substrate. Said coating comprises at least two non-metal functional layers and a metal layer between said layers. It is disclosed that metal layer comprises one or more of Ti, Mo, Al, Cr, V, Y, Nb, W, Ta and Zr metals, and non-metal layer comprises nitride, oxide, boride, carbide or a combination thereof. This patent application indicates a similarity in terms of coating composition. However, coating composition of the invention is formed by specific determination of layers and contents giving optimum features as a result of studies conducted.
Another invention is TR numbered Turkish patent application entitled “a method for manufacture of decorative HiPIMS hard material layers”. The invention relates to a method for coating of bottom layers by a decorative hard material in vacuum coating chamber, wherein decorative hard material layer is settled by help of a reactive HiPIMS process (High Power Pulse Magnetron Sputtering) and power content is arranged in a manner settled hard material layer achieves a homogenous colour, lower surface roughness and a higher hardness. This application indicates similarity only in terms of method but it does not disclose composition of the invention.
As a result, due to above described disadvantages and inadequacy of existing solutions it has been necessary to make development in the related art.
Brief Description of the Invention
The present invention relates to an ultra hard film meeting the needs mentioned above, eliminating all disadvantages and providing some additional advantages.
Primary purpose of the invention is to improve adhesion value of c-BN films.
Another purpose of the invention is to achieve a c-BN film of high resistance against wear and corrosion.
A further purpose of the invention is to decrease coefficient of friction in coated machine parts and increase service life of machines.
Ultra hard film coating developed to achieve above mentioned purposes comprises at least one or more layer composed by respectively titanium or chrome, chrome nitride or titanium nitride, titanium di-boride, titanium boron nitride, boron carbide, boron carbon- nitride and cubic boron nitride agent starting from surface of the bottom material to be coated.
The structural and characteristics features of the invention and all advantages will be understood better in detailed descriptions with the figures given below and with reference to the figures, and therefore, the assessment should be made taking into account the said figures and detailed explanations.
Brief Description of the Drawings
Figure 1 shows FT-IR graphic of film coating of the invention.
Figure 2 shows SEM picture of film coating of the invention.
Figure 3 is a schematic view of film coating of the invention.
Figure 4 is view of graphic obtained as a result of scratch test wherein adhesion critical load of film for the invention is obtained. Detailed Description of the Invention
In this detailed description, the film coating of the invention has been described in a manner not forming any restrictive effect and only for purpose of better understanding of the matter.
Invention is an ultra hard film coating improving adhesion value of layers comprising respectively from bottom surface of material to be coated titanium or chrome (Ti/Cr), chrome nitride or titanium nitride (CrN/TiN), titanium diboride (TiB2), titanium boron nitride (TiBN), boron carbide (B4C), boron carbonitride (BCN) and cubic boron nitride (c-BN).
Ultra hard film coating of the invention is produced by use of HiPIMS. It is used in coating of machine members as bottom material.
Ti is commonly used to improve adhesion between bottom material (machine member bottom of which is film coated) and film. In addition to adhesion feature, Ti also increases corrosion strength. Cr is also used to improve adhesion. During preliminary studies, it is seen that Cr gives better result in interlayer than Ti interlayer.
Chrome nitride (CrN) cubic structure has same coordination structure as NaCI and 20-24 GPa hardness value. Since CrN has strong covalent bond, it is a compound having high melting point. Since CrN also show extraordinary wear and corrosion resistance, it is commonly used in industrial coating.
Hexagonal structure of Titanium diboride (TiB2) is composed by planar stacking of Ti and B atoms having strong covalent bond and because of that it has high melting point. It also has high hardness. It is commonly used for shields resistant against hit, pots resistant against heat and coating resistant against wear.
Since titanium boron nitride (TiBN) nanocomposite coating has perfect mechanical, chemical and thermal stability features, they are commonly used in technological applications. In addition to cutting and shaping sets, TiBN coating is used in industrial applications requiring features such as appropriate tribiological features (low friction coefficient and high wear resistance) and good oxidization and corrosion resistance. It is possible to control mechanical and tri-biological features of TiBN coating by means of controlling boron and nitrogen content of coating. When B or N concentration increases in TiBN system, grain size, coating morphology, chemical and phase composition is affected and mechanical and chemical features change. This is because of occurrence of c-BN and/or h-BN phases in the structure.
Boron carbonitride (BCN) films are highly favourite because of structural similarities with carbon (graphite and diamond) and boron nitride (BN in hexagonal and cubic phases). Cubic BCN (c-BCN) is a compound expected to combine super hardness of diamond and high oxidization strength of c-BCN. BCN coating enlarged by use of various vacuum coating techniques are widely studied in respect to mechanical features of films but hardness could not be reached to ultra high hardness value. Development of super hard coating having improved chemical and wear resistance such as TiBCN provides contribution to development of advanced coating materials.
Coating of the invention comprises cubic nitride in 85 % in weight (Figure 1). c-BN considered as the most important ceramic coating for improvement of friction and wear properties of contact surfaces of machine parts will be coated to give better functional features. In this respect, applying coating in form of Cr+CrN+TiB2+TiBN+B4C+BCN-i-c-BN onto substrate will increase adhesion of film more as well as improve friction and wear features. c-BN films obtained by HiPIMS has longer life and better performance for mechanical and tribiomechanical applications. Since the performed coating has high adhesion, it reduces friction occurring in machine members and increases service lives of machines.
Scratch test used to find out adhesion features of fine films indicated that adhesion (critical load) value of coating of invention is 74N (Figure 4).
Ultra hard c-BN films with improved adhesion value can be used
• For high temperature applications
• Thermomechanical applications
• Tribiomechanical systems running under high load
• Cutting set tools and several other fields.

Claims

1. An ultra hard film coating with improved adhesion value characterized comprising at least one or more layer composed by respectively titanium or chrome, chrome nitride or titanium nitride, titanium di-boride, titanium boron nitride, boron carbide, boron carbon- nitride and cubic boron nitride agent starting from surface of the bottom material to be coated.
2. The film coating according to claim 1 characterized in comprising chrome.
3. The film coating according to claim 1 characterized in comprising chrome nitride.
4. The film coating according to claim 1 characterized in production by use of HiPIMS technique.
5. The film coating according to claim 1 characterized in being used as bottom material in coating of machine members.
6. The film coating according to claim 1 characterized in comprising cubic boron nitride in 85 % in weight.
PCT/TR2020/051143 2019-11-22 2020-11-20 A film coating composition WO2021101492A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TR2019/18269 2019-11-22
TR201918269 2019-11-22

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WO2021101492A2 true WO2021101492A2 (en) 2021-05-27
WO2021101492A3 WO2021101492A3 (en) 2021-08-12

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8512882B2 (en) * 2007-02-19 2013-08-20 TDY Industries, LLC Carbide cutting insert

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