WO2021048683A1 - 撮像装置、撮像モジュール、電子機器及び撮像方法 - Google Patents
撮像装置、撮像モジュール、電子機器及び撮像方法 Download PDFInfo
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Definitions
- One aspect of the present invention relates to an imaging device, an imaging module, an electronic device, and an imaging method.
- semiconductor devices display devices, light emitting devices, power storage devices, storage devices, electronic devices, lighting devices, input devices (for example, touch sensors, etc.), input / output devices (for example, touch panels, etc.) , Their driving methods, or their manufacturing methods can be given as an example.
- Semiconductor devices refer to all devices that can function by utilizing semiconductor characteristics.
- Patent Document 1 discloses an image pickup apparatus having an oxide semiconductor and using a transistor having an extremely small off-current in a pixel circuit.
- One aspect of the present invention is to provide a lightweight and thin imaging device.
- One aspect of the present invention is to provide an imaging device capable of capturing a high-definition image.
- One aspect of the present invention is to provide an imaging device capable of capturing a high-quality image.
- One aspect of the present invention is to provide a multifunctional imaging device.
- One aspect of the present invention is to provide a highly convenient imaging device.
- One aspect of the present invention is to provide an image pickup apparatus having high color reproducibility.
- One aspect of the present invention is to provide a novel imaging device.
- One aspect of the present invention is to provide an imaging method having high color reproducibility.
- One aspect of the present invention is to provide a novel imaging method.
- the imaging unit includes a light receiving device, a first light emitting device, and a second light emitting device.
- the first light emitting device has a function of emitting light in a wavelength region different from that of the second light emitting device.
- the image pickup unit has a function of causing the first light emitting device to emit light and acquiring the first image data.
- the image pickup unit has a function of causing the second light emitting device to emit light and acquiring the second image data.
- the memory has a function of holding the first reference data and the second reference data.
- the arithmetic circuit has a function of correcting the first image data using the first reference data and calculating the first corrected image data.
- the arithmetic circuit has a function of correcting the second image data using the second reference data and calculating the second corrected image data. Further, the arithmetic circuit has a function of adding the first corrected image data and the second corrected image data to generate composite image data.
- the light receiving device has a first pixel electrode, and the first light emitting device has a second pixel electrode located on the same plane as the first pixel electrode.
- the light receiving device further has an active layer and a common electrode
- the first light emitting device further has a light emitting layer and a common electrode.
- the active layer is located on the first pixel electrode and has a first organic compound.
- the light emitting layer is located on the second pixel electrode and has a second organic compound.
- the common electrode has a portion that overlaps with the first pixel electrode via the active layer and a portion that overlaps with the second pixel electrode via the light emitting layer.
- the imaging unit further has a lens.
- the lens has a portion that overlaps the light receiving device and is located on the first pixel electrode. Further, it is preferable that the light transmitted through the lens is incident on the light receiving device.
- One aspect of the present invention is an imaging module having the above-mentioned imaging device and any one or more of a connector and an integrated circuit.
- One aspect of the present invention is an electronic device having the above-mentioned imaging module and any one or more of an antenna, a battery, a housing, a camera, a speaker, a microphone, and an operation button.
- One aspect of the present invention is a step of causing the first light emitting device to emit light and acquiring the first image data, and correcting the first image data using the first reference data, and the first corrected image data.
- This is an imaging method including a step of calculating and a step of adding the first corrected image data and the second corrected image data to generate composite image data.
- the first light emitting device emits light in a wavelength region different from that of the second light emitting device.
- a lightweight and thin imaging device can be provided. According to one aspect of the present invention, it is possible to provide an imaging device capable of capturing a high-definition image. According to one aspect of the present invention, it is possible to provide an imaging device capable of capturing a high-quality image. According to one aspect of the present invention, a multifunctional imaging device can be provided. According to one aspect of the present invention, a highly convenient imaging device can be provided. According to one aspect of the present invention, an image pickup device having high color reproducibility can be provided. According to one aspect of the present invention, a novel imaging device can be provided. According to one aspect of the present invention, an imaging method having high color reproducibility can be provided. According to one aspect of the present invention, a novel imaging method can be provided.
- FIG. 1 is a block diagram showing an example of an imaging device.
- 2A to 2C are top views showing an example of pixels.
- 3A to 3D are cross-sectional views showing an example of an image pickup apparatus.
- FIG. 4 is a conceptual diagram illustrating the operation of the image pickup apparatus.
- FIG. 5 is a flowchart showing an example of the operation of the image pickup apparatus.
- 6A to 6C are cross-sectional views showing an example of an image pickup apparatus.
- 7A to 7C are cross-sectional views showing an example of an image pickup apparatus.
- 8A to 8C are cross-sectional views showing an example of an image pickup apparatus.
- 9A to 9C are cross-sectional views showing an example of an image pickup apparatus.
- 10A to 10C are cross-sectional views showing an example of an image pickup apparatus.
- FIG. 11 is a perspective view showing an example of the image pickup apparatus.
- FIG. 12 is a cross-sectional view showing an example of the image pickup apparatus.
- 13A and 13B are cross-sectional views showing an example of an image pickup apparatus.
- 14A to 14C are cross-sectional views showing an example of an image pickup apparatus.
- FIG. 15 is a cross-sectional view showing an example of an imaging device.
- 16A and 16B are circuit diagrams showing an example of a pixel circuit.
- 17A and 17B are diagrams showing an example of an electronic device.
- 18A to 18D are diagrams showing an example of an electronic device.
- 19A to 19F are diagrams showing an example of an electronic device.
- membrane and the word “layer” can be interchanged with each other in some cases or depending on the situation.
- conductive layer can be changed to the term “conductive layer”.
- insulating film can be changed to the term “insulating layer”.
- One aspect of the present invention is an image pickup apparatus having an image pickup unit, a memory, and an arithmetic circuit.
- the imaging unit includes a light emitting device (also referred to as a light emitting element), a light receiving device, and (also referred to as a light receiving element).
- the light emitting device and the light receiving device are arranged in a matrix in the imaging unit, the light emitting device emits light, and the light receiving device receives the light reflected from the subject.
- the memory has a function of holding reference data.
- the arithmetic circuit has a function of correcting the image data output from the light receiving device using the reference data and calculating the corrected image data.
- the image pickup apparatus sequentially emits light emitting devices of different colors to take an image, corrects the image data obtained from the images taken with the light of each color, and calculates the corrected image data. By adding these corrected image data, it has a function of generating composite image data.
- the imaging device can display a composite image on the imaging unit based on the composite image data.
- the light emitting device preferably emits light in the wavelength range of visible light.
- an EL element such as an OLED (Organic Light Emitting Diode) or a QLED (Quantum-dot Light Emitting Diode).
- luminescent substances possessed by EL elements substances that emit fluorescence (fluorescent materials), substances that emit phosphorescence (phosphorescent materials), inorganic compounds (quantum dot materials, etc.), and substances that exhibit thermally activated delayed fluorescence (thermally activated delayed fluorescence (thermally activated delayed fluorescence) Thermally activated fluorescent (TADF) material) and the like can be mentioned.
- an LED such as a micro LED (Light Emitting Diode) can also be used.
- the light receiving device preferably has sensitivity in the wavelength range of visible light. In particular, it is preferable to use a light receiving device having sensitivity over the entire wavelength region of visible light.
- a light receiving device for example, a pn type or pin type photodiode can be used.
- the light receiving device functions as a photoelectric conversion element that detects light incident on the light receiving device and generates an electric charge. The amount of charge generated is determined based on the amount of light incident on the light receiving device.
- an organic photodiode having a layer containing an organic compound as the light receiving device.
- the organic photodiode can be easily made thinner, lighter, and larger in area, and has a high degree of freedom in shape and design, so that it can be applied to various imaging devices.
- an organic EL element as a light emitting device and an organic photodiode as a light receiving device.
- the organic photodiode has many layers that can have the same configuration as the organic EL element. Therefore, the light emitting device and the light receiving device can be built in the image pickup device without significantly increasing the manufacturing process.
- the active layer of the light receiving device and the light emitting layer of the light emitting device can be made separately, and the other layers can have the same configuration for the light emitting device and the light receiving device. Therefore, the image pickup device can be lightweight and thin.
- the layer that the light receiving device and the light emitting device have in common may have different functions in the light emitting device and those in the light receiving device.
- the components are referred to based on the function in the light emitting device.
- the hole injection layer functions as a hole injection layer in the light emitting device and as a hole transport layer in the light receiving device.
- the electron injection layer functions as an electron injection layer in the light emitting element and as an electron transport layer in the light receiving element.
- the light emitting device for example, a light emitting device that emits light in the red wavelength region, a light emitting device that emits light in the green wavelength region, and a light emitting device that emits light in the blue wavelength region can be used.
- the subject can be imaged in color.
- the image pickup apparatus according to one aspect of the present invention can be used as a color image scanner.
- the imaging device according to one aspect of the present invention corrects the image data obtained from the images captured by the light of each color, calculates the corrected image data, and adds the corrected image data to form a composite image. Data can be generated.
- the light receiving device does not have a spectroscopic function, it can be an image pickup device having high color reproducibility. Further, by using a light emitting device having high color reproducibility, it is possible to obtain an image pickup device having even higher color reproducibility.
- the blue wavelength region is 400 nm or more and less than 490 nm, and the blue emission has at least one emission spectrum peak in the wavelength region.
- the green wavelength region is 490 nm or more and less than 580 nm, and the green emission has at least one emission spectrum peak in the wavelength region.
- the red wavelength region is 580 nm or more and 680 nm or less, and the red emission has at least one emission spectrum peak in the wavelength region.
- the imaging device uses a light receiving device having sensitivity over the entire wavelength region of visible light, so that a light receiving device for red, a light receiving device for green, and a light receiving device for blue are not provided. Therefore, it can be an imaging device capable of capturing a high-definition image. Further, since the image pickup device according to one aspect of the present invention has a light emitting device, it also has a function of displaying an image, and can be a multifunctional and highly convenient image pickup device. For example, by displaying the image captured by the imaging unit on the imaging unit, the captured image can be confirmed immediately.
- the imaging device can be applied to a display unit of an electronic device.
- the electronic device for example, a television device, a personal computer, a monitor for a computer, a digital signage, a mobile phone, a portable game machine, a portable information terminal, or the like can be used.
- the image pickup apparatus By applying the image pickup apparatus according to one aspect of the present invention to the display section of an electronic device, it is possible to obtain a display section having an image pickup function.
- the user can perform imaging by placing a subject to be imaged on the display unit of the electronic device.
- the user can immediately display the captured image on the display unit to check the image, and the electronic device can be highly convenient.
- the imaging device according to one aspect of the present invention can be applied to personal authentication by capturing biological information such as fingerprints and palm prints with a light receiving device. Further, the imaging device according to one aspect of the present invention can be applied to a touch sensor by detecting the position information of an object touching the imaging unit.
- FIG. 1 A block diagram illustrating the image pickup apparatus 10 according to one aspect of the present invention is shown in FIG.
- the image pickup apparatus 10 includes an image pickup section 61, a drive circuit section 62, a drive circuit section 63, a drive circuit section 64, and a circuit section 65.
- the imaging unit 61 has pixels 60 arranged in a matrix. Each pixel 60 has a light emitting device and a light receiving device. The light receiving device may be provided on all pixels 60, or may be provided on some pixels 60. Further, one pixel 60 may have a plurality of light receiving devices.
- the drive circuit unit 62 functions as a source line drive circuit (also referred to as a source driver).
- the drive circuit unit 63 functions as a gate line drive circuit (also referred to as a gate driver).
- the drive circuit unit 64 has a function of generating a signal for driving the light receiving device of the pixel 60 and outputting the signal to the pixel 60.
- the circuit unit 65 has a function of receiving a signal output from the pixel 60 and outputting it as data to the arithmetic circuit 71.
- the circuit unit 65 functions as a read circuit.
- the calculation circuit 71 has a function of receiving a signal output from the circuit unit 65 and performing a calculation.
- the memory 73 has a function of holding a program executed by the arithmetic circuit 71, data input to the arithmetic circuit 71, data output from the arithmetic circuit 71, and the like.
- a CPU Central Processing Unit
- DSP Digital Signal Processor
- GPU Graphics Processing Unit
- PLD Programmable Logic Device
- FPGA Field Programmable Gate Array
- FPGA Field Programmable Analog Array
- a storage device to which a non-volatile storage element is applied can be preferably used.
- a flash memory MRAM (Magnetoresistive Random Access Memory), PRAM (Phase change RAM), ReRAM (Resistive RAM), FeRAM (Ferroelectric RAM) and the like can be used.
- the drive circuit unit 62 is electrically connected to the pixel 60 via the wiring 82.
- the drive circuit unit 63 is electrically connected to the pixel 60 via the wiring 83.
- the drive circuit unit 64 is electrically connected to the pixel 60 via the wiring 84.
- the circuit unit 65 is electrically connected to the pixel 60 via the wiring 85.
- the arithmetic circuit 71 is electrically connected to the circuit unit 65 via the wiring 86.
- the memory 73 is electrically connected to the arithmetic circuit 71 via the wiring 87.
- each of the pixels 60 has two or more sub-pixels. Further, the pixel 60 preferably has a sub-pixel having a light emitting device and a sub pixel having a light receiving device.
- An example of the pixel 60 is shown in FIG. 2A.
- FIG. 2A shows an example in which the pixel 60 has four sub-pixels of a sub-pixel 60R, a sub-pixel 60G, a sub-pixel 60B, and a sub-pixel 60PD.
- the sub-pixel 60R has a light emitting device 91R that emits light in a red wavelength region
- the sub-pixel 60G has a light emitting device 91G that emits light in a green wavelength region
- the sub-pixel 60B has a light emitting device 91G that emits light in a blue wavelength region
- the subpixel 60PD has a light receiving device 91PD.
- the pixel 60 shown in FIG. 2A shows an example in which four sub-pixels are arranged in a 2 ⁇ 2 matrix, but one aspect of the present invention is not limited to this.
- four sub-pixels may be arranged in a row. Further, the arrangement order of each sub-pixel is not particularly limited.
- the pixel 60 has five sub-pixels of a sub-pixel 60R, a sub-pixel 60G, a sub-pixel 60B, a sub-pixel 60W, and a sub-pixel 60PD, and the sub-pixel 60W has a light emitting device 91W that emits white light. An example is shown.
- the color elements applied to the sub-pixels are not limited to the above, and cyan (C), magenta (M), and the like may be combined. Further, although FIGS. 2A to 2C show an example in which the areas of the sub-pixels are the same, one aspect of the present invention is not limited to this. The area of each sub-pixel may be different.
- FIGS. 3A to 3D Schematic cross-sectional views of the imaging unit 61 are shown in FIGS. 3A to 3D.
- the imaging unit 61 shown in FIG. 3A has a substrate 51 and a substrate 59, and has a layer 53 and a layer 57 between the substrate 51 and the substrate 59.
- the layer 57 has a light emitting device such as a light emitting device 91R, and the layer 53 has a light receiving device 91PD.
- the imaging unit 61 shown in FIG. 3B has a substrate 51 and a substrate 59, and has a layer 53, a layer 55, and a layer 57 between the substrate 51 and the substrate 59.
- Layer 55 has transistors.
- the image pickup unit 61 emits red (R), green (G), and blue (B) light from, for example, a layer 57 having a light emitting device such as a light emitting device 91R to the layer 53 having a light receiving device 91PD.
- the configuration may be such that light is incident from the outside.
- FIGS. 3A and 3B the light emitted from the layer 57 and the light incident on the layer 53 are indicated by arrows.
- the layer 55 having a transistor preferably has a first transistor and a second transistor.
- the first transistor is electrically connected to the light receiving device 91PD included in the layer 53.
- the second transistor is electrically connected to a light emitting device such as the light emitting device 91R included in the layer 57.
- the imaging device of one aspect of the present invention has a function of imaging a subject in contact with the imaging unit 61.
- the light emitting device included in the layer 57 emits light
- the subject 52 in contact with the imaging unit 61 reflects the light
- the light receiving device 91PD included in the layer 53 receives the reflected light.
- the subject 52 on the imaging unit 61 can be imaged.
- the imaging device can also image a subject 52 that is not in contact with the imaging unit 61.
- the imaging unit 61 shown in FIG. 3A can also image the subject 52 that is not in contact with the imaging unit 61.
- FIGS. 3C and 3D the light emitted from the layer 57, reflected by the subject 52, and incident on the layer 53 is indicated by an arrow.
- FIG. 4 is a conceptual diagram illustrating the operation of the image pickup apparatus.
- imaging is performed using a three-color light emitting device of the light emitting device 91R that emits the red color, the light emitting device 91G that emits the green color, and the light emitting device 91B that emits the blue color shown in FIGS. 2A and 2B. This will be described with an example.
- the imaging unit 61 It lights the light-emitting device 91R emitting red light by the imaging unit 61, by using the light receiving device 91PD, for imaging the first image IM R.
- Signal from the light receiving device 91PD of each pixel (hereinafter, referred to as the first image data R X) is output to the arithmetic circuit 71 via the circuit unit 65.
- the imaging unit 61, the light-emitting device 91G emitting green light is lit, with the light receiving device 91PD, imaging the second image IM G.
- Signal from the light receiving device 91PD of each pixel hereinafter, referred to as second image data G X
- second image data G X Signal from the light receiving device 91PD of each pixel (hereinafter, referred to as second image data G X) is output to the arithmetic circuit 71 via the circuit unit 65.
- the image pickup unit 61 lights the light emitting device 91B that emits blue light, and the light receiving device 91PD is used to image the third image IM B.
- Signal from the light receiving device 91PD of each pixel (hereinafter, referred to as the third image data B X) is output to the arithmetic circuit 71 via the circuit unit 65.
- the arithmetic circuit 71 In the arithmetic circuit 71, the first image data R X, the second image data G X, and the third image data B X of are corrected, respectively. Arithmetic circuit 71, a first image data R X corrected using the reference data to calculate a first corrected image data R LSB. Similarly, the arithmetic circuit 71, the second image data G X corrected using the reference data, calculates a second corrected image data G LSB. Arithmetic circuit 71, the third image data B X corrected using the reference data to calculate a third corrected image data B LSB.
- the reference data will be explained.
- the reference data that serves as a black reference and the reference data that serves as a white reference are acquired in advance.
- the black reference subject is imaged with red light, green light, and blue light, respectively, and the first black reference data R min , the second black reference data G min , and the second black reference data G min, which serve as black reference data, are captured.
- the third black reference data B min is acquired.
- the first black reference data R min is an output value output from the light receiving device of each pixel in imaging with red light.
- the second black reference data G min is an output value output from the light receiving device of each pixel in imaging with green light.
- the third black reference data B min is an output value output from the light receiving device of each pixel in imaging with blue light.
- a voltage value can be used as the first black reference data R min , the second black reference data G min , and the third black reference data B min. It is preferable that the black subject used for acquiring the reference data has an extremely low reflectance.
- the white reference subject is imaged with red light, green light, and blue light, respectively, and the first white reference data R max and the second white reference data G, which are the white reference data, are captured.
- the max and the third white reference data B max are acquired.
- the first white reference data R max is an output value output from the light receiving device of each pixel in imaging with red light.
- the second white reference data G max is an output value output from the light receiving device of each pixel in imaging with green light.
- the third white reference data B max is an output value output from the light receiving device of each pixel in imaging with blue light.
- a voltage value can be used as the first white reference data R max , the second white reference data G max , and the third white reference data B max. It is preferable that the white subject used for acquiring the reference data has an extremely high reflectance.
- the reference data may be acquired at the time of shipment of the imaging device and stored in the memory 73.
- the memory 73 it is preferable to use a non-volatile memory such as a flash memory. Further, the reference data may be rewritten when the user uses the imaging device.
- the arithmetic circuit 71 has a function of reading reference data stored in the memory 73. Specifically, the arithmetic circuit 71 has a function of reading reference data from the memory 73 and using the reference data to correct image data of each color into corrected image data. Further, the corrected image data of each color may be output to the memory 73 and held.
- the first black reference data R min and the first white reference data R max are referred to as the first reference data, the second black reference data G min , and the second white reference data.
- G max may be referred to as a second reference data
- a third black reference data B min and a third white reference data B max may be referred to as a third reference data.
- the white reference data B max of 3 may be referred to as reference data.
- First image data R X outputted from the light receiving device, the second image data G X, and the third image data B X are each the following formula (1), equation (2), Equation (3) Is converted into the first corrected image data R LSB , the second corrected image data G LSB , and the third corrected image data B LSB.
- R LSB (R X -R min ) / (R max -R min) ⁇ A (1)
- G LSB (G X -G min ) / (G max -G min) ⁇ A (2)
- the constant A indicates the maximum value of the gradation that can be taken by the composite image SyIM.
- the gradation of the composite image SyIM takes an integer of 0 or more and 2 n -1 or less, and the constant A is 2 n -1.
- the constant A is 255.
- the first image data R X output from the light receiving device whereas the second image data G X, and the third image data B X of an analog value, the first corrected image data R LSB, The second corrected image data G LSB and the third corrected image data B LSB are digital values.
- the arithmetic circuit 71 adds the first corrected image data R LSB , the second corrected image data G LSB , and the third corrected image data B LSB to generate composite image data, and generates a color composite image SyIM. can do.
- the reference data acquired by photographing the white reference subject and the black reference subject are used for correction, but one aspect of the present invention is not limited to this.
- a unique value determined from the characteristics of the light receiving device may be used as reference data.
- the temperature inside the image pickup apparatus or the temperature of the usage environment may be acquired, and reference data using the temperature as a variable may be used.
- the reference data with the temperature as a variable the influence of the temperature at the time of imaging can be reduced, and the imaging device with high color reproducibility even when the characteristics of the light emitting device and the light receiving device change depending on the temperature. Can be done.
- the cumulative drive time of the light emitting device and the cumulative drive time of the light receiving device may be acquired, and reference data using the cumulative drive time as a variable may be used.
- reference data By using the reference data with the cumulative usage time as a variable, it is possible to obtain an image pickup device having high color reproducibility even when the characteristics of the light emitting device and the light receiving photon change depending on the cumulative driving time of each.
- FIG. 5 is a flowchart illustrating the operation of the image pickup apparatus.
- step S11 the light emitting device 91R that emits red light is turned on.
- step S12 by using a light receiving device 91PD, for imaging the first image IM R. Since the light emitting device 91R is used for imaging while emitting light, red light is reflected by the subject, and the reflected light is incident on the light receiving device 91PD. That is, the first image IM R can be said that information about the red object.
- the signal from the light receiving device 91PD of each pixel (hereinafter, referred to as the first image data R X), and outputs to the arithmetic circuit 71.
- First image data R X is data corresponding to a current value flowing through the light-receiving device 91PD of each pixel is output to the arithmetic circuit 71 via the circuit unit 65 from the imaging unit 61.
- the first image data R X for example, it can be used voltage value.
- step S13 the light emitting device 91R is turned off.
- step S21 the arithmetic circuit 71, a first image data R X corrected using the reference data to calculate a first corrected image data R LSB.
- the first corrected image data R LB is output to the memory 73 and held.
- the reference data is held in the memory 73 and is read out by the arithmetic circuit 71 at the time of correction.
- the reference data the first white reference data R max and the first black reference data R min can be used.
- step S31 the light emitting device 91G that emits green light is turned on.
- step S32 by using a light receiving device 91PD, imaging the second image IM G. Since the light emitting device 91G is used for imaging while emitting light, green light is reflected by the subject, and the reflected light is incident on the light receiving device 91PD. That is, the second image IM G can be said to be information about the green object.
- the signal from the light receiving device 91PD of each pixel (hereinafter, referred to as second image data G X), and outputs to the arithmetic circuit 71.
- Second image data G X is data corresponding to a current value flowing through the light-receiving device 91PD of each pixel is output to the arithmetic circuit 71 via the circuit unit 65 from the imaging unit 61.
- the second image data G X for example, it can be used voltage value.
- step S33 the light emitting device 91G is turned off.
- step S41 the arithmetic circuit 71, the second image data G X corrected using the reference data, calculates a second corrected image data G LSB.
- the second corrected image data LSB is output to the memory 73 and held.
- the reference data the second white reference data G max and the second black reference data G min can be used.
- step S51 the light emitting device 91B that emits blue light is turned on.
- step S52 by using a light receiving device 91PD, it captures a third image IM B. Since the light emitting device 91B is made to emit light while taking an image, blue light is reflected by the subject, and the reflected light is incident on the light receiving device 91PD. That is, the third image IM B can be said to be information regarding the blue color of the subject.
- the signal from the light receiving device 91PD of each pixel hereinafter, referred to as the third image data B X), and outputs to the arithmetic circuit 71.
- a third image data B X for example, it can be used voltage value.
- step S53 the light emitting device 91B is turned off.
- step S61 the arithmetic circuit 71, the third image data B X corrected using the reference data to calculate a third corrected image data B LSB.
- the third corrected image data B LSB is output to the memory 73 and held.
- the reference data the third white reference data B max and the third black reference data B min can be used.
- step S71 the first corrected image data R LSB , the second corrected image data G LSB , and the third corrected image data B LSB are read from the memory 73 to the arithmetic circuit 71, and these are added together to form the composite image data. Can be generated to generate a color composite image SyIM.
- FIG. 5 shows an example in which imaging is performed in the order of red, green, and blue
- the type of color, the number of colors, and the order of colors to be imaged are not particularly limited.
- FIG. 6A A cross-sectional view of the image pickup apparatus 10A is shown in FIG. 6A.
- the image pickup device 10A has a light receiving device 110 and a light emitting device 190.
- the light receiving device 110 has a pixel electrode 111, a common layer 112, an active layer 113, a common layer 114, and a common electrode 115.
- the light emitting device 190 has a pixel electrode 191 and a common layer 112, a light emitting layer 193, a common layer 114, and a common electrode 115.
- the pixel electrode 111, the pixel electrode 191 and the common layer 112, the active layer 113, the light emitting layer 193, the common layer 114, and the common electrode 115 may each have a single layer structure or a laminated structure.
- the pixel electrode 111 and the pixel electrode 191 are located on the insulating layer 214.
- the pixel electrode 111 and the pixel electrode 191 can be formed of the same material and in the same process.
- the common layer 112 is located on the pixel electrode 111 and on the pixel electrode 191.
- the common layer 112 is a layer commonly used for the light receiving device 110 and the light emitting device 190.
- the active layer 113 overlaps with the pixel electrode 111 via the common layer 112.
- the light emitting layer 193 overlaps with the pixel electrode 191 via the common layer 112.
- the active layer 113 has a first organic compound, and the light emitting layer 193 has a second organic compound different from the first organic compound.
- the common layer 114 is located on the common layer 112, on the active layer 113, and on the light emitting layer 193.
- the common layer 114 is a layer commonly used for the light receiving device 110 and the light emitting device 190.
- the common electrode 115 has a portion that overlaps with the pixel electrode 111 via the common layer 112, the active layer 113, and the common layer 114. Further, the common electrode 115 has a portion that overlaps with the pixel electrode 191 via the common layer 112, the light emitting layer 193, and the common layer 114.
- the common electrode 115 is a layer commonly used for the light receiving device 110 and the light emitting device 190.
- an organic compound is used for the active layer 113 of the light receiving device 110.
- the light receiving device 110 can have a layer other than the active layer 113 having the same configuration as the light emitting device 190 (EL element). Therefore, the light receiving device 110 can be formed in parallel with the formation of the light emitting device 190 only by adding the step of forming the active layer 113 to the manufacturing process of the light emitting device 190. Further, the light emitting device 190 and the light receiving device 110 can be formed on the same substrate. Therefore, the light emitting device 190 and the light receiving device 110 can be incorporated in the image pickup apparatus without significantly increasing the manufacturing process.
- the image pickup device 10A shows an example in which the light receiving device 110 and the light emitting device 190 have a common configuration except that the active layer 113 of the light receiving device 110 and the light emitting layer 193 of the light emitting device 190 are separately formed.
- the configuration of the light receiving device 110 and the light emitting device 190 is not limited to this.
- the light receiving device 110 and the light emitting device 190 may have layers that are separated from each other (see the imaging devices 10K, 10L, and 10M described later).
- the light receiving device 110 and the light emitting device 190 preferably have one or more layers (common layers) that are commonly used. As a result, the light emitting device 190 and the light receiving device 110 can be incorporated in the image pickup apparatus without significantly increasing the manufacturing process.
- the image pickup apparatus 10A has a light receiving device 110, a light emitting device 190, a transistor 41, a transistor 42, and the like between a pair of boards (board 151 and board 152).
- the common layer 112, the active layer 113, and the common layer 114 located between the pixel electrode 111 and the common electrode 115 can also be referred to as an organic layer (a layer containing an organic compound).
- the pixel electrode 111 preferably has a function of reflecting visible light.
- the end of the pixel electrode 111 is covered with a partition wall 216.
- the common electrode 115 has a function of transmitting visible light.
- the light receiving device 110 has a function of detecting light.
- the light receiving device 110 is a photoelectric conversion element that receives light 22 incident from the outside of the image pickup device 10A and converts it into an electric signal.
- the light 22 can also be said to be the light reflected by the object from the light emitted by the light emitting device 190. Further, the light 22 may enter the light receiving device 110 via a lens described later.
- the pixel electrode 111 functions as an anode and the common electrode 115 functions as a cathode in alignment with the light emitting device 190. That is, the light receiving device 110 can detect the light incident on the light receiving device 110 and generate an electric charge by driving the light receiving device 110 by applying a reverse bias between the pixel electrode 111 and the common electrode 115.
- a light-shielding layer BM is provided on the surface of the substrate 152 on the substrate 151 side.
- the light-shielding layer BM has openings at a position overlapping the light receiving device 110 and a position overlapping the light emitting device 190.
- the light-shielding layer BM a material that blocks light emission from the light-emitting device can be used.
- the light-shielding layer BM preferably absorbs visible light.
- a metal material, a resin material containing a pigment (carbon black or the like) or a dye, or the like can be used to form a black matrix.
- the light-shielding layer BM may have a laminated structure of a red color filter, a green color filter, and a blue color filter.
- the light receiving device 110 detects the light emitted by the light emitting device 190 reflected by the object.
- the light emitted from the light emitting device 190 may be reflected in the image pickup device 10A and may be incident on the light receiving device 110 without passing through the object.
- the light-shielding layer BM can suppress the influence of such stray light.
- the light-shielding layer BM is not provided, the light 23a emitted by the light emitting device 190 may be reflected by the substrate 152, and the reflected light 23b may be incident on the light receiving device 110.
- the light-shielding layer BM it is possible to prevent the reflected light 23b from being incident on the light receiving device 110. As a result, noise can be reduced and the sensitivity of the sensor using the light receiving device 110 can be increased.
- the common layer 112, the light emitting layer 193, and the common layer 114 located between the pixel electrode 191 and the common electrode 115, respectively, can be said to be an EL layer.
- the pixel electrode 191 preferably has a function of reflecting visible light.
- the end of the pixel electrode 191 is covered by a partition wall 216.
- the pixel electrode 111 and the pixel electrode 191 are electrically insulated from each other by a partition wall 216.
- the common electrode 115 has a function of transmitting visible light.
- the light emitting device 190 has a function of emitting visible light. Specifically, the light emitting device 190 is an electroluminescent device that emits light toward the substrate 152 by applying a voltage between the pixel electrode 191 and the common electrode 115 (see light emitting 21).
- the light emitting layer 193 is preferably formed so as not to overlap the light receiving region of the light receiving device 110. As a result, it is possible to suppress the light emitting layer 193 from absorbing the light 22, and it is possible to increase the amount of light emitted to the light receiving device 110.
- the pixel electrode 111 is electrically connected to the source or drain of the transistor 41 through an opening provided in the insulating layer 214.
- the end of the pixel electrode 111 is covered with a partition wall 216.
- the pixel electrode 191 is electrically connected to the source or drain of the transistor 42 through an opening provided in the insulating layer 214.
- the end of the pixel electrode 191 is covered with a partition wall 216.
- the transistor 42 has a function of controlling the drive of the light emitting device 190.
- the transistor 41 and the transistor 42 are in contact with each other on the same layer (the substrate 151 in FIG. 6A).
- At least a part of the circuit electrically connected to the light receiving device 110 is formed of the same material and the same process as the circuit electrically connected to the light emitting device 190.
- the thickness of the image pickup apparatus can be reduced and the manufacturing process can be simplified as compared with the case where the two circuits are formed separately.
- the light receiving device 110 and the light emitting device 190 are each covered with a protective layer 195.
- the protective layer 195 is provided in contact with the common electrode 115.
- the protective layer 195 it is possible to prevent impurities such as water from entering the light receiving device 110 and the light emitting device 190, and to improve the reliability of the light receiving device 110 and the light emitting device 190.
- the protective layer 195 and the substrate 152 are bonded to each other by the adhesive layer 142.
- the protective layer may not be provided on the light receiving device 110 and the light emitting device 190.
- the common electrode 115 and the substrate 152 are bonded to each other by the adhesive layer 142.
- Imaging device 10B A cross-sectional view of the image pickup apparatus 10B having a configuration different from that of the image pickup apparatus 10A described above is shown in FIG. 6B. In the following description of the imaging device, the description of the same configuration as that of the imaging device described above may be omitted.
- the image pickup device 10B shown in FIG. 6B has a lens 149 in addition to the configuration of the image pickup device 10A.
- the image pickup apparatus of this embodiment may have a lens 149.
- the lens 149 is provided at a position overlapping the light receiving device 110.
- the lens 149 is provided in contact with the substrate 152.
- the lens 149 included in the image pickup apparatus 10B has a convex surface on the substrate 151 side.
- the lens 149 may have a convex surface on the substrate 152 side.
- FIG. 6B shows an example in which the lens 149 is formed first, the light-shielding layer BM may be formed first. In FIG. 6B, the end of the lens 149 is covered with a light-shielding layer BM.
- the image pickup device 10B has a configuration in which the light 22 is incident on the light receiving device 110 via the lens 149.
- the imaging range of the light receiving device 110 can be narrowed as compared with the case where the lens 149 is not provided, and the overlapping of the imaging range with the adjacent light receiving device 110 can be suppressed. As a result, a clear image with less blurring can be captured.
- the size of the pinhole when the lens 149 is provided is the size of the pinhole (in FIG. 6B, the size of the opening of the BM overlapping the light receiving device 110) as compared with the case where the lens 149 is not provided. Corresponding) can be increased. Therefore, by having the lens 149, the amount of light incident on the light receiving device 110 can be increased.
- the image pickup apparatus shown in FIGS. 7B and 7C also has a configuration in which the light 22 is incident on the light receiving device 110 via the lens 149, similarly to the image pickup apparatus 10B shown in FIG. 6B, respectively.
- the lens 149 is provided in contact with the upper surface of the protective layer 195.
- the lens 149 of the image pickup apparatus shown in FIG. 7B has a convex surface on the substrate 152 side.
- the image pickup apparatus shown in FIG. 7C is provided with a lens array 146 on the image pickup surface side of the substrate 152.
- the lens included in the lens array 146 is provided at a position overlapping the light receiving device 110. It is preferable that a light-shielding layer BM is provided on the surface of the substrate 152 on the substrate 151 side.
- a lens such as a microlens may be directly formed on a substrate or a light receiving device, or a separately manufactured lens array such as a microlens array may be formed on the substrate. You may stick them together.
- FIG. 6C A cross-sectional view of the image pickup apparatus 10C is shown in FIG. 6C.
- the image pickup apparatus 10C shown in FIG. 6C differs from the image pickup apparatus 10A in that it does not have a substrate 151, a substrate 152, and a partition wall 216, and has a substrate 153, a substrate 154, an adhesive layer 155, an insulating layer 212, and a partition wall 217. ..
- the substrate 153 and the insulating layer 212 are bonded to each other by an adhesive layer 155.
- the substrate 154 and the protective layer 195 are bonded to each other by an adhesive layer 142.
- the image pickup apparatus 10C has a configuration in which the insulating layer 212, the transistor 41, the transistor 42, the light receiving device 110, the light emitting device 190, and the like formed on the manufacturing substrate are transposed on the substrate 153. It is preferable that the substrate 153 and the substrate 154 have flexibility, respectively. This makes it possible to increase the flexibility of the image pickup apparatus 10C. For example, it is preferable to use a resin for the substrate 153 and the substrate 154, respectively.
- polyester resins such as polyethylene terephthalate (PET) and polyethylene naphthalate (PEN), polyacrylonitrile resin, acrylic resin, polyimide resin, polymethylmethacrylate resin, polycarbonate (PC) resin, and polyether sulfone, respectively.
- PES resin polyamide resin (nylon, aramid, etc.), polysiloxane resin, cycloolefin resin, polystyrene resin, polyamideimide resin, polyurethane resin, polyvinyl chloride resin, polyvinylidene chloride resin, polypropylene resin, polytetrafluoroethylene (PES) PTFE) resin, ABS resin, cellulose nanofibers and the like can be used.
- PES polytetrafluoroethylene
- ABS resin cellulose nanofibers and the like
- glass having a thickness sufficient to have flexibility may be used.
- a film having high optical isotropic properties may be used as the substrate of the image pickup apparatus of this embodiment.
- the film having high optical isotropic properties include a triacetyl cellulose (TAC, also referred to as cellulose triacetate) film, a cycloolefin polymer (COP) film, a cycloolefin copolymer (COC) film, and an acrylic film.
- TAC triacetyl cellulose
- COP cycloolefin polymer
- COC cycloolefin copolymer
- the partition wall 217 preferably absorbs the light emitted by the light emitting device.
- a black matrix can be formed by using a resin material containing a pigment or a dye. Further, by using a brown resist material, the partition wall 217 can be formed of a colored insulating layer.
- the light 23c emitted by the light emitting device 190 is reflected by the substrate 154 and the partition wall 217, and the reflected light 23d may be incident on the light receiving device 110. Further, the light 23c passes through the partition wall 217 and is reflected by a transistor, wiring, or the like, so that the reflected light may enter the light receiving device 110. By absorbing the light 23c by the partition wall 217, it is possible to suppress the reflected light 23d from entering the light receiving device 110. As a result, noise can be reduced and the sensitivity of the sensor using the light receiving device 110 can be increased.
- the partition wall 217 preferably absorbs at least the wavelength of light detected by the light receiving device 110.
- the partition wall 217 preferably absorbs at least the green light.
- the partition wall 217 has a red color filter, it can absorb the green light 23c and suppress the reflected light 23d from entering the light receiving device 110.
- FIG. 8A A cross-sectional view of the image pickup apparatus 10D is shown in FIG. 8A.
- the image pickup device 10D has a colored layer 148a in addition to the configuration of the image pickup device 10B.
- the colored layer 148a has a portion in contact with the upper surface of the pixel electrode 111 of the light receiving device 110 and a portion in contact with the side surface of the partition wall 216.
- the colored layer 148a preferably absorbs the light emitted by the light emitting device.
- a black matrix can be formed by using a resin material containing a pigment or a dye. Further, by using a brown resist material, the colored layer 148a can be formed of the colored insulating layer.
- the colored layer 148a preferably absorbs at least the wavelength of light detected by the light receiving device 110.
- the colored layer 148a preferably absorbs at least the green light.
- the colored layer 148a has a red color filter, it can absorb green light and suppress stray light (reflected light) from entering the light receiving device 110.
- the amount of stray light incident on the light receiving device 110 can be reduced. As a result, noise can be reduced and the sensitivity of the sensor using the light receiving device 110 can be increased.
- the colored layer is arranged between the light receiving device 110 and the light emitting device 190. As a result, stray light incident on the light receiving device 110 from the light emitting device 190 can be suppressed.
- FIG. 8B A cross-sectional view of the image pickup apparatus 10E is shown in FIG. 8B.
- the image pickup device 10E has a colored layer 148b in addition to the configuration of the image pickup device 10D.
- the material that can be used for the colored layer 148b is the same as that of the colored layer 148a.
- the colored layer 148b has a portion in contact with the upper surface of the pixel electrode 191 of the light emitting device 190 and a portion in contact with the side surface of the partition wall 216.
- the imaging device of the present embodiment preferably has one or both of the colored layer 148a and the colored layer 148b.
- the amount of stray light incident on the light receiving device 110 can be further reduced.
- the imaging device 10E since the colored layer 148b is in contact with the upper surface of the pixel electrode 191, the amount of light extracted to the outside of the imaging device 10E among the light emitting 21 of the light emitting device 190 is measured by the imaging device 10D (FIG. 8A). May be reduced. Therefore, when only one of the colored layer 148a and the colored layer 148b is provided, it is preferable to provide only the colored layer 148a on the light receiving device 110 side as in the image pickup apparatus 10D. As a result, the light extraction efficiency of the light emitting device 190 can be increased, and the incident of stray light on the light receiving device 110 can be suppressed. Therefore, it is possible to obtain an imaging device capable of capturing a high-quality image.
- FIG. 8C A cross-sectional view of the image pickup apparatus 10F is shown in FIG. 8C.
- the image pickup device 10F has a colored layer 148 in addition to the configuration of the image pickup device 10B.
- the material that can be used for the colored layer 148 is the same as that of the colored layer 148a.
- the colored layer 148 is provided so as to cover the upper surface and the side surface of the partition wall 216.
- the colored layer 148 has a portion in contact with the upper surface of the pixel electrode 111 included in the light receiving device 110 and a portion in contact with the upper surface of the pixel electrode 191 included in the light emitting device 190.
- the colored layer 148a and the colored layer 148b shown in FIG. 8B do not have to be separated from each other, and may be one film as in the colored layer 148 shown in FIG. 8C.
- the amount of stray light incident on the light receiving device 110 can be reduced.
- noise can be reduced and the sensitivity of the sensor using the light receiving device 110 can be increased.
- FIG. 9A A cross-sectional view of the image pickup apparatus 10G is shown in FIG. 9A.
- the image pickup device 10G has a colored layer 147 in addition to the configuration of the image pickup device 10B.
- the colored layer 147 is located on the insulating layer 214, and the partition wall 216 is provided so as to cover the upper surface and the side surface of the colored layer 147.
- the colored layer 147 and the light receiving device 110 are electrically insulated by a partition wall 216.
- the colored layer 147 and the light emitting device 190 are electrically insulated by a partition wall 216.
- the material that can be used for the colored layer 147 is the same as that of the colored layer 148a. Similar to the colored layers 148, 148a, and 148b described above, the colored layer 147 absorbs the stray light generated in the image pickup apparatus 10G, so that the amount of stray light incident on the light receiving device 110 can be reduced. As a result, noise can be reduced and the sensitivity of the sensor using the light receiving device 110 can be increased.
- the resistivity may be lower than that of the partition wall 216 depending on the material.
- a resin containing a pigment such as carbon black has a lower resistivity than a resin containing no such pigment. Therefore, depending on the material, by providing any of the colored layers 148, 148a, and 148b, a current may leak to an adjacent light emitting device or light receiving device. For example, when a current leaks to an adjacent light emitting device, there arises a problem that other than the desired light emitting device emits light (also referred to as crosstalk).
- the colored layer 147 is provided separately from the light receiving device 110 and the light emitting device 190, respectively. Further, the colored layer 147 is electrically insulated from each of the light receiving device 110 and the light emitting device 190 by a partition wall 216. Therefore, even if the colored layer 147 is a layer having a low resistivity, it is unlikely to affect the light receiving device 110 and the light emitting device 190. Therefore, the range of selection of the material used for the colored layer 147 is widened, which is preferable. For example, as the colored layer 147, a black matrix may be formed by using a metal material or the like.
- FIG. 9B A cross-sectional view of the image pickup apparatus 10H is shown in FIG. 9B.
- the image pickup device 10H has a colored layer 148c in addition to the configuration of the image pickup device 10B.
- the partition wall 216 has an opening that reaches the insulating layer 214.
- the colored layer 148c has a portion that contacts the insulating layer 214 through the opening, a portion that contacts the side surface of the partition wall 216 inside the opening, and a portion that contacts the upper surface of the partition wall 216.
- the colored layer 148c and the light receiving device 110 are electrically insulated by a partition wall 216.
- the colored layer 148c and the light emitting device 190 are electrically insulated by the partition wall 216.
- the material that can be used for the colored layer 148c is the same as that of the colored layer 147.
- the amount of stray light incident on the light receiving device 110 can be reduced.
- noise can be reduced and the sensitivity of the sensor using the light receiving device 110 can be increased.
- the colored layer 148c is provided separately from the light receiving device 110 and the light emitting device 190, respectively. Further, the colored layer 148c is electrically insulated from each of the light receiving device 110 and the light emitting device 190 by a partition wall 216. Therefore, even if the colored layer 148c is a layer having a low resistivity, it is unlikely to affect the light receiving device 110 and the light emitting device 190. Therefore, the range of selection of the material used for the colored layer 148c is widened, which is preferable.
- FIG. 9C A cross-sectional view of the image pickup apparatus 10J is shown in FIG. 9C.
- the image pickup device 10J has a colored layer 148c in addition to the configuration of the image pickup device 10D.
- the image pickup apparatus of one aspect of the present invention preferably has one or more of colored layers 148, 148a, 148b, 148c, and 147.
- the stray light generated in the image pickup apparatus can be absorbed, and the amount of stray light incident on the light receiving device 110 can be reduced. Therefore, it is possible to reduce noise and increase the sensitivity of the sensor using the light receiving device 110.
- FIG. 10A shows a cross-sectional view of the image pickup device 10K
- FIG. 10B shows a cross-sectional view of the image pickup device 10L
- FIG. 10C shows a cross-sectional view of the image pickup device 10M.
- the image pickup device 10K is different from the image pickup device 10A in that it does not have a common layer 114 and has a buffer layer 184 and a buffer layer 194.
- the buffer layer 184 and the buffer layer 194 may have a single-layer structure or a laminated structure, respectively.
- the light receiving device 110 has a pixel electrode 111, a common layer 112, an active layer 113, a buffer layer 184, and a common electrode 115.
- the light emitting device 190 has a pixel electrode 191 and a common layer 112, a light emitting layer 193, a buffer layer 194, and a common electrode 115.
- the image pickup device 10L is different from the image pickup device 10A in that it does not have a common layer 112 and has a buffer layer 182 and a buffer layer 192.
- the buffer layer 182 and the buffer layer 192 may have a single-layer structure or a laminated structure, respectively.
- the light receiving device 110 has a pixel electrode 111, a buffer layer 182, an active layer 113, a common layer 114, and a common electrode 115.
- the light emitting device 190 has a pixel electrode 191 and a buffer layer 192, a light emitting layer 193, a common layer 114, and a common electrode 115.
- the image pickup device 10M differs from the image pickup device 10A in that it does not have a common layer 112 and a common layer 114 and has a buffer layer 182, a buffer layer 184, a buffer layer 192, and a buffer layer 194.
- the light receiving device 110 has a pixel electrode 111, a buffer layer 182, an active layer 113, a buffer layer 184, and a common electrode 115.
- the light emitting device 190 has a pixel electrode 191 and a buffer layer 192, a light emitting layer 193, a buffer layer 194, and a common electrode 115.
- the active layer 113 and the light emitting layer 193 can be separately produced, but also other layers can be produced separately.
- the buffer layer 184 between the common electrode 115 and the active layer 113 and the buffer layer 194 between the common electrode 115 and the light emitting layer 193 are separately formed.
- the buffer layer 184 for example, an electron transport layer can be formed.
- the buffer layer 194 for example, one or both of the electron injection layer and the electron transport layer can be formed.
- the buffer layer 182 between the pixel electrode 111 and the active layer 113 and the buffer layer 192 between the pixel electrode 191 and the light emitting layer 193 are separately formed.
- a hole transport layer can be formed.
- the buffer layer 192 for example, one or both of the hole injection layer and the hole transport layer can be formed.
- the light receiving device 110 and the light emitting device 190 do not have a common layer between a pair of electrodes (pixel electrode 111 or pixel electrode 191 and common electrode 115).
- the pixel electrode 111 and the pixel electrode 191 are formed on the insulating layer 214 by the same material and the same process, and the buffer layer 182 and the active layer are formed on the pixel electrode 111.
- the buffer layer 184 and forming the buffer layer 192, the light emitting layer 193, and the buffer layer 194 on the pixel electrode 191, the pixel electrode 111, the buffer layer 182, the active layer 113, the buffer layer 184, and the pixel electrode It can be produced by forming a common electrode 115 so as to cover the 191 and the buffer layer 192, the light emitting layer 193, and the buffer layer 194.
- the order of formation of the laminated structure of the buffer layer 182, the active layer 113, and the buffer layer 184 and the laminated structure of the buffer layer 192, the light emitting layer 193, and the buffer layer 194 is not particularly limited.
- the buffer layer 192, the light emitting layer 193, and the buffer layer 194 may be formed.
- the buffer layer 192, the light emitting layer 193, and the buffer layer 194 may be formed before the buffer layer 182, the active layer 113, and the buffer layer 184 are formed.
- the buffer layer 182, the buffer layer 192, the active layer 113, the light emitting layer 193, and the like may be formed alternately in this order.
- FIG. 11 shows a perspective view of the image pickup device 100A
- FIG. 12 shows a cross-sectional view of the image pickup device 100A.
- the image pickup apparatus 100A has a configuration in which a substrate 152 and a substrate 151 are bonded together.
- the substrate 152 is clearly indicated by a broken line.
- the image pickup device 100A can also be said to be an image pickup module having the image pickup device according to one aspect of the present invention and any one or more of a connector and an integrated circuit (IC).
- a connector a flexible printed circuit board (FPC: Flexible printed circuit board), TCP (Tape Carrier Package), or the like can be used.
- the integrated circuit (IC) can be mounted on the image pickup module by a COG (Chip On Glass) method, a COF (Chip On Film) method, or the like.
- FIG. 11 shows an example in which the IC173 and the FPC172 are mounted on the image pickup apparatus 100A.
- the image pickup apparatus 100A includes an image pickup unit 162, a circuit 164, wiring 165, and the like.
- a scanning line drive circuit can be used.
- the wiring 165 has a function of supplying signals and power to the imaging unit 162 and the circuit 164.
- the signal and power are input to the wiring 165 from the outside via the FPC 172 or from the IC 173.
- FIG. 11 shows an example in which the IC173 is provided on the substrate 151 by the COG method, the COF method, or the like.
- the IC 173 an IC having, for example, a scanning line drive circuit or a signal line drive circuit can be applied.
- the image pickup apparatus 100A and the image pickup module may be configured without an IC. Further, the IC may be mounted on the FPC by the COF method or the like.
- FIG. 12 shows a part of the region including the FPC 172, a part of the region including the circuit 164, a part of the region including the imaging unit 162, and one of the regions including the end portion of the image pickup apparatus 100A shown in FIG. An example of the cross section when each part is cut is shown.
- the image pickup apparatus 100A shown in FIG. 12 has a transistor 201, a transistor 205, a transistor 206, a light emitting device 190, a light receiving device 110, and the like between the substrate 151 and the substrate 152.
- the substrate 152 and the insulating layer 214 are adhered to each other via the adhesive layer 142.
- a solid sealing structure, a hollow sealing structure, or the like can be applied to seal the light emitting device 190 and the light receiving device 110.
- the space 143 surrounded by the substrate 152, the adhesive layer 142, and the insulating layer 214 is filled with an inert gas (nitrogen, argon, or the like), and a hollow sealing structure is applied.
- the adhesive layer 142 may be provided so as to overlap with the light emitting device 190.
- the space 143 surrounded by the substrate 152, the adhesive layer 142, and the insulating layer 214 may be filled with a resin different from that of the adhesive layer 142.
- the light emitting device 190 has a laminated structure in which the pixel electrode 191 and the common layer 112, the light emitting layer 193, the common layer 114, and the common electrode 115 are laminated in this order from the insulating layer 214 side.
- the pixel electrode 191 is electrically connected to the conductive layer 222b of the transistor 206 via an opening provided in the insulating layer 214.
- the transistor 206 has a function of controlling the drive of the light emitting device 190.
- the end of the pixel electrode 191 is covered with a partition wall 216.
- the pixel electrode 191 contains a material that reflects visible light
- the common electrode 115 contains a material that transmits visible light.
- the light receiving device 110 has a laminated structure in which the pixel electrode 111, the common layer 112, the active layer 113, the common layer 114, and the common electrode 115 are laminated in this order from the insulating layer 214 side.
- the pixel electrode 111 is electrically connected to the conductive layer 222b of the transistor 205 via an opening provided in the insulating layer 214.
- the end of the pixel electrode 111 is covered with a partition wall 216.
- the pixel electrode 111 contains a material that reflects visible light
- the common electrode 115 contains a material that transmits visible light.
- the light emitted by the light emitting device 190 is emitted to the substrate 152 side. Further, light is incident on the light receiving device 110 via the substrate 152 and the space 143. It is preferable to use a material having high transparency to visible light for the substrate 152.
- the pixel electrode 111 and the pixel electrode 191 can be manufactured by the same material and the same process.
- the common layer 112, the common layer 114, and the common electrode 115 are used for both the light receiving device 110 and the light emitting device 190.
- the light receiving device 110 and the light emitting device 190 can all have the same configuration except that the configurations of the active layer 113 and the light emitting layer 193 are different. As a result, the light receiving device 110 and the light receiving device 110 can be built in the image pickup apparatus 100A without significantly increasing the number of manufacturing steps.
- a light-shielding layer BM is provided on the surface of the substrate 152 on the substrate 151 side.
- the light-shielding layer BM has openings at a position overlapping the light receiving device 110 and a position overlapping the light emitting device 190.
- the transistor 201, the transistor 205, and the transistor 206 are all formed on the substrate 151. These transistors can be manufactured by the same material and the same process.
- An insulating layer 211, an insulating layer 213, an insulating layer 215, and an insulating layer 214 are provided on the substrate 151 in this order.
- a part of the insulating layer 211 functions as a gate insulating layer of each transistor.
- a part of the insulating layer 213 functions as a gate insulating layer of each transistor.
- the insulating layer 215 is provided so as to cover the transistor.
- the insulating layer 214 is provided so as to cover the transistor and has a function as a flattening layer.
- the number of gate insulating layers and the number of insulating layers covering the transistors are not limited, and may be a single layer or two or more layers, respectively.
- the insulating layer can function as a barrier layer.
- an inorganic insulating film as the insulating layer 211, the insulating layer 213, and the insulating layer 215, respectively.
- an inorganic insulating film for example, a silicon nitride film, a silicon nitride film, a silicon oxide film, a silicon nitride film, an aluminum oxide film, an aluminum nitride film, or the like can be used.
- a hafnium oxide film, an yttrium oxide film, a zirconium oxide film, a gallium oxide film, a tantalum oxide film, a magnesium oxide film, a lanthanum oxide film, a cerium oxide film, a neodymium oxide film and the like may be used. Further, two or more of the above-mentioned insulating films may be laminated and used.
- the organic insulating film often has a lower barrier property than the inorganic insulating film. Therefore, the organic insulating film preferably has an opening near the end of the image pickup apparatus 100A. As a result, it is possible to prevent impurities from entering from the end of the image pickup apparatus 100A via the organic insulating film.
- the organic insulating film may be formed so that the end portion of the organic insulating film is inside the end portion of the image pickup apparatus 100A so that the organic insulating film is not exposed at the end portion of the image pickup apparatus 100A.
- An organic insulating film is suitable for the insulating layer 214 that functions as a flattening layer.
- the material that can be used for the organic insulating film include acrylic resin, polyimide resin, epoxy resin, polyamide resin, polyimideamide resin, siloxane resin, benzocyclobutene resin, phenol resin, and precursors of these resins.
- an opening is formed in the insulating layer 214.
- an organic insulating film is used for the insulating layer 214, it is possible to prevent impurities from entering the imaging unit 162 from the outside through the insulating layer 214. Therefore, the reliability of the image pickup apparatus 100A can be improved.
- the transistor 201, the transistor 205, and the transistor 206 are a conductive layer 221 that functions as a gate, an insulating layer 211 that functions as a gate insulating layer, a conductive layer 222a and a conductive layer 222b that function as a source and a drain, a semiconductor layer 231 and a gate insulating layer. It has an insulating layer 213 that functions as a gate and a conductive layer 223 that functions as a gate.
- the same hatching pattern is attached to a plurality of layers obtained by processing the same conductive film.
- the insulating layer 211 is located between the conductive layer 221 and the semiconductor layer 231.
- the insulating layer 213 is located between the conductive layer 223 and the semiconductor layer 231.
- the structure of the transistor included in the image pickup apparatus of this embodiment is not particularly limited.
- a planar type transistor, a stagger type transistor, an inverted stagger type transistor and the like can be used.
- either a top gate type or a bottom gate type transistor structure may be used.
- gates may be provided above and below the semiconductor layer on which the channel is formed.
- a configuration in which a semiconductor layer on which a channel is formed is sandwiched between two gates is applied to the transistor 201, the transistor 205, and the transistor 206.
- the transistor may be driven by connecting two gates and supplying the same signal to them.
- the threshold voltage of the transistor may be controlled by giving a potential for controlling the threshold voltage to one of the two gates and giving a potential for driving to the other.
- the crystallinity of the semiconductor material used for the transistor is also not particularly limited, and either an amorphous semiconductor or a semiconductor having crystallinity (microcrystalline semiconductor, polycrystalline semiconductor, single crystal semiconductor, or semiconductor having a partially crystalline region). May be used. It is preferable to use a semiconductor having crystallinity because deterioration of transistor characteristics can be suppressed.
- the semiconductor layer of the transistor preferably has a metal oxide (also referred to as an oxide semiconductor).
- the semiconductor layer of the transistor may have silicon. Examples of silicon include amorphous silicon and crystalline silicon (low temperature polysilicon, single crystal silicon, etc.).
- the semiconductor layers include, for example, indium and M (M is gallium, aluminum, silicon, boron, ittrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lantern, cerium, neodymium, etc. It is preferable to have one or more selected from hafnium, tantalum, tungsten, and magnesium) and zinc.
- M is preferably one or more selected from aluminum, gallium, yttrium, and tin.
- an oxide containing indium (In), gallium (Ga), and zinc (Zn) also referred to as IGZO
- IGZO oxide containing indium (In), gallium (Ga), and zinc (Zn)
- the sputtering target used for forming the In-M-Zn oxide has an atomic number ratio of In equal to or higher than the atomic number ratio of M.
- the atomic number ratio of the semiconductor layer to be formed includes a fluctuation of plus or minus 40% of the atomic number ratio of the metal element contained in the sputtering target.
- the atomic number ratio of In is 4
- the atomic number ratio of Ga is 1 or more and 3 or less, and Zn.
- the atomic number ratio of is 2 or more and 4 or less.
- the atomic number ratio of Ga is larger than 0.1 when the atomic number ratio of In is 5. This includes the case where the number of atoms is 2 or less and the atomic number ratio of Zn is 5 or more and 7 or less.
- the atomic number ratio of Ga is larger than 0.1 when the atomic number ratio of In is 1. This includes the case where the number of atoms of Zn is 2 or less and the atomic number ratio of Zn is larger than 0.1 and 2 or less.
- the transistor included in the circuit 164 and the transistor included in the imaging unit 162 may have the same structure or different structures.
- the structures of the plurality of transistors included in the circuit 164 may all be the same, or there may be two or more types.
- the structures of the plurality of transistors included in the imaging unit 162 may all be the same, or there may be two or more types.
- a connecting portion 204 is provided in a region of the substrate 151 where the substrates 152 do not overlap.
- the wiring 165 is electrically connected to the FPC 172 via the conductive layer 166 and the connection layer 242.
- a conductive layer 166 obtained by processing the same conductive film as the pixel electrode 191 is exposed on the upper surface of the connecting portion 204.
- the connection portion 204 and the FPC 172 can be electrically connected via the connection layer 242.
- optical members can be arranged on the outside of the substrate 152.
- the optical member include a polarizing plate, a retardation plate, a light diffusing layer (diffusing film, etc.), an antireflection layer, a condensing film, and the like.
- an antistatic film for suppressing the adhesion of dust a water-repellent film for preventing the adhesion of dirt, a hard coat film for suppressing the occurrence of scratches due to use, a shock absorbing layer and the like are arranged. You may.
- Glass, quartz, ceramic, sapphire, resin and the like can be used for the substrate 151 and the substrate 152, respectively.
- the flexibility of the image pickup apparatus can be increased.
- various curable adhesives such as a photocurable adhesive such as an ultraviolet curable type, a reaction curable type adhesive, a thermosetting type adhesive, and an anaerobic type adhesive can be used.
- these adhesives include epoxy resin, acrylic resin, silicone resin, phenol resin, polyimide resin, imide resin, PVC (polyvinyl chloride) resin, PVB (polyvinyl butyral) resin, EVA (ethylene vinyl acetate) resin and the like.
- a material having low moisture permeability such as an epoxy resin is preferable.
- a two-component mixed type resin may be used.
- an anisotropic conductive film (ACF: Anisotropic Conductive Film), an anisotropic conductive paste (ACP: Anisotropic Connective Paste), or the like can be used.
- ACF Anisotropic Conductive Film
- ACP Anisotropic Connective Paste
- the light emitting device 190 includes a top emission type, a bottom emission type, a dual emission type, and the like.
- a conductive film that transmits visible light is used for the electrode on the side that extracts light. Further, it is preferable to use a conductive film that reflects visible light for the electrode on the side that does not take out light.
- the light emitting device 190 has at least a light emitting layer 193.
- the light emitting device 190 includes a substance having high hole injecting property, a substance having high hole transporting property, a hole blocking material, a substance having high electron transporting property, a substance having high electron injecting property, or a bipolar. It may further have a layer containing a sex substance (a substance having high electron transport property and hole transport property) and the like.
- the common layer 112 preferably has one or both of a hole injecting layer and a hole transporting layer.
- the common layer 114 preferably has one or both of an electron transport layer and an electron injection layer.
- Either a low molecular weight compound or a high molecular weight compound can be used for the common layer 112, the light emitting layer 193, and the common layer 114, and an inorganic compound may be contained.
- the layers constituting the common layer 112, the light emitting layer 193, and the common layer 114 can be formed by a method such as a vapor deposition method (including a vacuum vapor deposition method), a transfer method, a printing method, an inkjet method, or a coating method, respectively. ..
- the light emitting layer 193 may have an inorganic compound such as a quantum dot as a light emitting material.
- the active layer 113 of the light receiving device 110 includes a semiconductor.
- the semiconductor include an inorganic semiconductor such as silicon and an organic semiconductor containing an organic compound.
- an organic semiconductor is used as the semiconductor included in the active layer.
- the light emitting layer 193 of the light emitting device 190 and the active layer 113 of the light receiving device 110 can be formed by the same method (for example, vacuum vapor deposition method), which is preferable because the manufacturing apparatus can be shared. ..
- Examples of the n-type semiconductor material contained in the active layer 113 include electron-accepting organic semiconductor materials such as fullerenes (for example, C 60 , C 70, etc.) or derivatives thereof. Further, as a material for the p-type semiconductor contained in the active layer 113, an electron-donating organic semiconductor material such as copper (II) phthalocyanine (CuPc) or tetraphenyldibenzoperiflanthene (DBP) can be used. Can be mentioned.
- electron-accepting organic semiconductor materials such as fullerenes (for example, C 60 , C 70, etc.) or derivatives thereof.
- an electron-donating organic semiconductor material such as copper (II) phthalocyanine (CuPc) or tetraphenyldibenzoperiflanthene (DBP) can be used. Can be mentioned.
- the active layer 113 is preferably formed by co-depositing an n-type semiconductor and a p-type semiconductor.
- Materials that can be used for conductive layers such as the gate, source, and drain of transistors, as well as various wiring and electrodes that make up the image pickup device, include aluminum, titanium, chromium, nickel, copper, yttrium, zirconium, molybdenum, silver, and tantalum. , And metals such as tungsten, and alloys containing the metal as a main component. A film containing these materials can be used as a single layer or as a laminated structure.
- a conductive oxide such as indium oxide, indium tin oxide, indium zinc oxide, zinc oxide, zinc oxide containing gallium, or graphene can be used.
- metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, and titanium, and alloy materials containing the metal materials can be used.
- a nitride of the metal material for example, titanium nitride
- the laminated film of the above material can be used as the conductive layer.
- a laminated film of an alloy of silver and magnesium and an indium tin oxide because the conductivity can be enhanced.
- These can also be used for conductive layers such as various wirings and electrodes constituting the image pickup device, and conductive layers (conductive layers that function as pixel electrodes and common electrodes) of the light receiving device.
- Examples of the insulating material that can be used for each insulating layer include resins such as acrylic resin and epoxy resin, and inorganic insulating materials such as silicon oxide, silicon oxide, silicon nitride, silicon nitride, and aluminum oxide.
- FIG. 13A A cross-sectional view of the image pickup apparatus 100B is shown in FIG. 13A.
- the image pickup device 100B is mainly different from the image pickup device 100A in that it has a lens 149 and a protective layer 195.
- the protective layer 195 that covers the light receiving device 110 and the light emitting device 190, impurities such as water can be suppressed from entering the light receiving device 110 and the light emitting device 190, and the reliability of the light receiving device 110 and the light emitting device 190 can be improved. it can.
- the insulating layer 215 and the protective layer 195 are in contact with each other through the opening of the insulating layer 214.
- the inorganic insulating film of the insulating layer 215 and the inorganic insulating film of the protective layer 195 are in contact with each other.
- FIG. 13B shows an example in which the protective layer 195 has a three-layer structure.
- the protective layer 195 has an inorganic insulating layer 195a on the common electrode 115, an organic insulating layer 195b on the inorganic insulating layer 195a, and an inorganic insulating layer 195c on the organic insulating layer 195b.
- the end of the inorganic insulating layer 195a and the end of the inorganic insulating layer 195c extend outward from the end of the organic insulating layer 195b and are in contact with each other. Then, the inorganic insulating layer 195a comes into contact with the insulating layer 215 (inorganic insulating layer) through the opening of the insulating layer 214 (organic insulating layer). As a result, the light receiving device 110 and the light emitting device 190 can be surrounded by the insulating layer 215 and the protective layer 195, so that the reliability of the light receiving device 110 and the light emitting device 190 can be improved.
- the protective layer 195 may have a laminated structure of an organic insulating film and an inorganic insulating film. At this time, it is preferable that the end portion of the inorganic insulating film extends outward rather than the end portion of the organic insulating film.
- a lens 149 is provided on the surface of the substrate 152 on the substrate 151 side.
- the lens 149 has a convex surface on the substrate 151 side. It is preferable that the light receiving region of the light receiving device 110 overlaps the lens 149 and does not overlap the light emitting layer 193. This makes it possible to increase the sensitivity and accuracy of the sensor using the light receiving device 110.
- the lens 149 preferably has a refractive index of 1.3 or more and 2.5 or less.
- the lens 149 can be formed using at least one of an inorganic material and an organic material.
- a resin-containing material can be used for the lens 149.
- a material containing at least one of an oxide and a sulfide can be used for the lens 149.
- a resin containing chlorine, bromine, or iodine, a resin containing a heavy metal atom, a resin containing an aromatic ring, a resin containing sulfur, or the like can be used for the lens 149.
- a material containing a resin and nanoparticles of a material having a higher refractive index than the resin can be used for the lens 149. Titanium oxide, zirconium oxide, etc. can be used for the nanoparticles.
- Lens 149 such as cerium oxide, hafnium oxide, lanthanum oxide, magnesium oxide, niobium oxide, tantalum oxide, titanium oxide, yttrium oxide, zinc oxide, oxides containing indium and tin, or oxides containing indium, gallium and zinc. Can be used for. Alternatively, zinc sulfide or the like can be used for the lens 149.
- the protective layer 195 and the substrate 152 are bonded to each other by the adhesive layer 142.
- the adhesive layer 142 is provided so as to overlap the light receiving device 110 and the light emitting device 190, respectively, and a solid-state sealing structure is applied to the image pickup apparatus 100B.
- FIG. 14A A cross-sectional view of the image pickup apparatus 100C is shown in FIG. 14A.
- the transistor structure of the image pickup device 100C is different from that of the image pickup device 100B.
- the image pickup apparatus 100C has a transistor 208, a transistor 209, and a transistor 210 on the substrate 151.
- the transistor 208, the transistor 209, and the transistor 210 are a conductive layer 221 that functions as a gate, an insulating layer 211 that functions as a gate insulating layer, a semiconductor layer having a channel forming region 231i and a pair of low resistance regions 231n, and a pair of low resistance regions. Covers the conductive layer 222a connected to one of the 231n, the conductive layer 222b connected to the other of the pair of low resistance regions 231n, the insulating layer 225 functioning as the gate insulating layer, the conductive layer 223 functioning as the gate, and the conductive layer 223. It has an insulating layer 215.
- the insulating layer 211 is located between the conductive layer 221 and the channel forming region 231i.
- the insulating layer 225 is located between the conductive layer 223 and the channel forming region 231i.
- the conductive layer 222a and the conductive layer 222b are connected to the low resistance region 231n via openings provided in the insulating layer 225 and the insulating layer 215, respectively.
- the conductive layer 222a and the conductive layer 222b one functions as a source and the other functions as a drain.
- the pixel electrode 191 of the light emitting device 190 is electrically connected to one of the pair of low resistance regions 231n of the transistor 208 via the conductive layer 222b.
- the pixel electrode 111 of the light receiving device 110 is electrically connected to the other of the pair of low resistance regions 231n of the transistor 209 via the conductive layer 222b.
- the transistor 208, the transistor 209, and the transistor 210 shown in FIG. 14A show an example in which the insulating layer 225 covers the upper surface and the side surface of the semiconductor layer.
- the insulating layer 225 overlaps with the channel forming region 231i of the semiconductor layer 231 and does not overlap with the low resistance region 231n.
- the structure shown in FIG. 14B can be produced by processing the insulating layer 225 using the conductive layer 223 as a mask.
- the insulating layer 215 is provided so as to cover the insulating layer 225 and the conductive layer 223, and the conductive layer 222a and the conductive layer 222b are connected to the low resistance region 231n, respectively, through the openings of the insulating layer 215. Further, an insulating layer 218 may be provided to cover the transistor.
- the image pickup device 100C is different from the image pickup device 100B in that it has a colored layer 147.
- the colored layer 147 is located on the insulating layer 214, and the partition wall 216 is provided so as to cover the upper surface and the side surface of the colored layer 147.
- the colored layer 147 and the light receiving device 110 are provided so as to be separated from each other.
- the colored layer 147 and the light emitting device 190 are provided apart from each other.
- the colored layer 147 is not limited to the arrangement shown in FIG. 14A.
- the colored layer 147 may cover one or both of the end portion of the pixel electrode 111 and the end portion of the pixel electrode 191.
- the colored layer 147 is provided separately from the light receiving device 110 and the light emitting device 190, even if the colored layer 147 is a layer having a low resistivity, it affects the light receiving device 110 and the light emitting device 190. Hateful. Therefore, the range of selection of the material used for the colored layer 147 is widened, which is preferable.
- the area where the colored layer 147 is provided can be increased.
- the larger the area where the colored layer 147 is provided the more the stray light generated in the image pickup apparatus can be absorbed by the colored layer 147, and the amount of stray light incident on the light receiving device 110 can be reduced, which is preferable. As a result, noise can be reduced and the sensitivity of the sensor using the light receiving device 110 can be increased.
- FIG. 1 A cross-sectional view of the image pickup apparatus 100D is shown in FIG.
- the image pickup device 100D is different from the image pickup device 100C in that it does not have the colored layer 147 but has the colored layer 148a.
- the colored layer 148a has a portion in contact with the upper surface of the pixel electrode 111 of the light receiving device 110 and a portion in contact with the side surface of the partition wall 216.
- the amount of stray light incident on the light receiving device 110 can be reduced. As a result, noise can be reduced and the sensitivity of the sensor using the light receiving device 110 can be increased.
- the image pickup apparatus 100D differs from the image pickup apparatus 100C in that it does not have the substrate 151 and the substrate 152 and has the substrate 153, the substrate 154, the adhesive layer 155, and the insulating layer 212.
- the substrate 153 and the insulating layer 212 are bonded to each other by an adhesive layer 155.
- the substrate 154 and the protective layer 195 are bonded to each other by an adhesive layer 142.
- the image pickup apparatus 100D has a configuration in which an insulating layer 212, a transistor 208, a transistor 209, a transistor 210, a light receiving device 110, a light emitting device 190, and the like formed on the manufacturing substrate are transposed on the substrate 153. .. It is preferable that the substrate 153 and the substrate 154 have flexibility, respectively. This makes it possible to increase the flexibility of the image pickup apparatus 100D.
- an inorganic insulating film that can be used for the insulating layer 211, the insulating layer 213, and the insulating layer 215 can be used.
- the image pickup device 100C shows an example without the lens 149
- the image pickup device 100D shows an example with the lens 149.
- the lens 149 can be appropriately provided depending on the application of the sensor and the like.
- Metal oxides applicable to the semiconductor layer will be described below.
- a metal oxide having nitrogen may also be collectively referred to as a metal oxide.
- a metal oxide having nitrogen may be referred to as a metal oxynitride.
- a metal oxide having nitrogen such as zinc acid nitride (ZnON) may be used for the semiconductor layer.
- CAAC c-axis aligned critical
- CAC Cloud-Aligned Composite
- CAC Cloud-Binded Composite
- OS Oxide Semiconductor
- CAC-OS has a conductive function in a part of the material and an insulating function in a part of the material, and has a function as a semiconductor in the whole material.
- the conductive function is a function of allowing electrons (or holes) to flow as carriers
- the insulating function is a function of not allowing electrons (or holes) to flow as carriers. is there.
- CAC-OS has a conductive region and an insulating region.
- the conductive region has the above-mentioned conductive function
- the insulating region has the above-mentioned insulating function.
- the conductive region and the insulating region may be separated at the nanoparticle level. Further, the conductive region and the insulating region may be unevenly distributed in the material. In addition, the conductive region may be observed with the periphery blurred and connected in a cloud shape.
- the conductive region and the insulating region may be dispersed in the material in a size of 0.5 nm or more and 10 nm or less, preferably 0.5 nm or more and 3 nm or less, respectively.
- CAC-OS is composed of components having different band gaps.
- CAC-OS is composed of a component having a wide gap due to an insulating region and a component having a narrow gap due to a conductive region.
- the carriers when the carriers flow, the carriers mainly flow in the components having a narrow gap.
- the component having a narrow gap acts complementarily to the component having a wide gap, and the carrier flows to the component having a wide gap in conjunction with the component having a narrow gap. Therefore, when the CAC-OS is used in the channel formation region of the transistor, a high current driving force, that is, a large on-current and a high field effect mobility can be obtained in the on-state of the transistor.
- CAC-OS can also be referred to as a matrix composite material or a metal matrix composite material.
- Oxide semiconductors are divided into single crystal oxide semiconductors and other non-single crystal oxide semiconductors.
- non-single crystal oxide semiconductors include CAAC-OS (c-axis aligned crystalline oxide semiconductor), polycrystalline oxide semiconductor, nc-OS (nanocrystalline oxide semiconductor), and pseudo-amorphous oxide semiconductor (a-like). : Amorphous-like oxide semiconductor), amorphous oxide semiconductors, and the like.
- CAAC-OS has a c-axis orientation and has a distorted crystal structure in which a plurality of nanocrystals are connected in the ab plane direction.
- the strain refers to a region where the orientation of the lattice arrangement changes between a region in which the lattice arrangement is aligned and a region in which another lattice arrangement is aligned in the region where a plurality of nanocrystals are connected.
- Nanocrystals are basically hexagons, but they are not limited to regular hexagons and may be non-regular hexagons. Further, in the strain, it may have a lattice arrangement such as a pentagon and a heptagon. In CAAC-OS, it is difficult to confirm a clear grain boundary (also referred to as grain boundary) even in the vicinity of strain. That is, it can be seen that the formation of grain boundaries is suppressed by the distortion of the lattice arrangement. This is because CAAC-OS can tolerate distortion because the arrangement of oxygen atoms is not dense in the ab plane direction and the bond distance between atoms changes due to the substitution of metal elements. Because.
- CAAC-OS has a layered crystal structure in which a layer having indium and oxygen (hereinafter, In layer) and a layer having elements M, zinc, and oxygen (hereinafter, (M, Zn) layer) are laminated. It tends to have a layered structure).
- Indium and the element M can be replaced with each other, and when the element M of the (M, Zn) layer is replaced with indium, it can be expressed as the (In, M, Zn) layer. Further, when the indium of the In layer is replaced with the element M, it can be expressed as the (In, M) layer.
- CAAC-OS is a highly crystalline metal oxide.
- CAAC-OS it is difficult to confirm a clear crystal grain boundary, so it can be said that a decrease in electron mobility due to the grain boundary is unlikely to occur.
- CAAC-OS impurities and defects oxygen deficiency (V O:. Oxygen vacancy also referred) etc.) with less metal It can also be called an oxide. Therefore, the metal oxide having CAAC-OS has stable physical properties. Therefore, the metal oxide having CAAC-OS is resistant to heat and has high reliability.
- the nc-OS has periodicity in the atomic arrangement in a minute region (for example, a region of 1 nm or more and 10 nm or less, particularly a region of 1 nm or more and 3 nm or less).
- nc-OS does not show regularity in crystal orientation between different nanocrystals. Therefore, no orientation is observed in the entire film. Therefore, the nc-OS may be indistinguishable from the a-like OS and the amorphous oxide semiconductor depending on the analysis method.
- Indium-gallium-zinc oxide which is a kind of metal oxide having indium, gallium, and zinc, may have a stable structure by forming the above-mentioned nanocrystals. is there.
- IGZO tends to have difficulty in crystal growth in the atmosphere, it is preferable to use smaller crystals (for example, the above-mentioned nanocrystals) than large crystals (here, a few mm crystal or a few cm crystal). However, it may be structurally stable.
- the a-like OS is a metal oxide having a structure between the nc-OS and an amorphous oxide semiconductor.
- the a-like OS has a void or low density region. That is, the a-like OS has lower crystallinity than the nc-OS and CAAC-OS.
- Oxide semiconductors have various structures, and each has different characteristics.
- the oxide semiconductor of one aspect of the present invention may have two or more of amorphous oxide semiconductor, polycrystalline oxide semiconductor, a-like OS, nc-OS, and CAAC-OS.
- the metal oxide film that functions as a semiconductor layer can be formed by using either one or both of an inert gas and an oxygen gas.
- the oxygen flow rate ratio (oxygen partial pressure) at the time of forming the metal oxide film is not particularly limited. However, in the case of obtaining a transistor having high field effect mobility, the oxygen flow rate ratio (oxygen partial pressure) at the time of film formation of the metal oxide film is preferably 0% or more and 30% or less, and 5% or more and 30% or less. Is more preferable, and 7% or more and 15% or less is further preferable.
- the metal oxide preferably has an energy gap of 2 eV or more, more preferably 2.5 eV or more, and further preferably 2.7 eV or more. As described above, by using the metal oxide having a wide energy gap, the off-current of the transistor can be reduced.
- the substrate temperature at the time of forming the metal oxide film is preferably 350 ° C. or lower, more preferably room temperature or higher and 200 ° C. or lower, and further preferably room temperature or higher and 130 ° C. or lower. It is preferable that the substrate temperature at the time of forming the metal oxide film is room temperature because the productivity can be increased.
- the metal oxide film can be formed by a sputtering method.
- a PLD method for example, a PECVD method, a thermal CVD method, an ALD method, a vacuum deposition method, or the like may be used.
- the imaging device of the present embodiment has a light receiving device and a light emitting device in the imaging unit. As a result, it is possible to reduce the size and weight of the electronic device as compared with the case where the light emitting device is provided outside the image pickup unit.
- the light receiving device can have at least one layer other than the active layer having the same configuration as the light emitting device (EL element). Further, the light receiving device may have all the layers other than the active layer having the same configuration as the light emitting device (EL element).
- the light emitting device and the light receiving device can be formed on the same substrate only by adding a step of forming an active layer to the manufacturing process of the light emitting device.
- the pixel electrode and the common electrode can be formed by the same material and the same process, respectively.
- the manufacturing process of the image pickup apparatus can be simplified. .. As described above, it is possible to manufacture a highly convenient imaging device by incorporating a light emitting device and a light receiving device without having a complicated process.
- the imaging device of the present embodiment has a colored layer between the light receiving device and the light emitting device.
- the colored layer may also serve as a partition wall that electrically insulates the light receiving device and the light emitting device. Since the colored layer can absorb the stray light in the image pickup apparatus, the sensitivity of the sensor using the light receiving device can be increased.
- the image pickup apparatus of one aspect of the present invention includes a first pixel circuit having a light receiving device and a second pixel circuit having a light emitting device.
- the first pixel circuit and the second pixel circuit are arranged in a matrix, respectively.
- FIG. 16A shows an example of a first pixel circuit having a light receiving device
- FIG. 16B shows an example of a second pixel circuit having a light emitting device.
- the pixel circuit PIX1 shown in FIG. 16A includes a light receiving device PD, a transistor M1, a transistor M2, a transistor M3, a transistor M4, and a capacitive element C1.
- a photodiode is used as the light receiving device PD.
- the cathode is electrically connected to the wiring V1 and the anode is electrically connected to either the source or the drain of the transistor M1.
- the gate is electrically connected to the wiring TX, and the other of the source or drain is electrically connected to one electrode of the capacitive element C1, one of the source or drain of the transistor M2, and the gate of the transistor M3.
- the gate is electrically connected to the wiring RES, and the other of the source or drain is electrically connected to the wiring V2.
- one of the source and the drain is electrically connected to the wiring V3 and the other of the source and the drain is electrically connected to one of the source and the drain of the transistor M4.
- the gate is electrically connected to the wiring SE, and the other of the source and drain is electrically connected to the wiring OUT1.
- a constant potential is supplied to the wiring V1, the wiring V2, and the wiring V3, respectively.
- the transistor M2 is controlled by a signal supplied to the wiring RES, and has a function of resetting the potential of the node connected to the gate of the transistor M3 to the potential supplied to the wiring V2.
- the transistor M1 is controlled by a signal supplied to the wiring TX, and has a function of controlling the timing at which the potential of the node changes according to the current flowing through the light receiving device PD.
- the transistor M3 functions as an amplification transistor that outputs an output according to the potential of the node.
- the transistor M4 is controlled by a signal supplied to the wiring SE, and functions as a selection transistor for reading an output corresponding to the potential of the node by an external circuit connected to the wiring OUT1.
- the relationship between the cathode and the anode of the light receiving device PD may be reversed from that in FIG. 16A.
- the pixel circuit PIX2 shown in FIG. 16B includes a light emitting device EL, a transistor M5, a transistor M6, a transistor M7, and a capacitive element C2.
- a light emitting diode is used as the light emitting device EL.
- the gate is electrically connected to the wiring VG, one of the source or the drain is electrically connected to the wiring VS, the other of the source or the drain is one electrode of the capacitive element C2, and the gate of the transistor M6. And electrically connect.
- One of the source or drain of the transistor M6 is electrically connected to the wiring V4, and the other is electrically connected to the anode of the light emitting device EL and one of the source or drain of the transistor M7.
- the gate is electrically connected to the wiring MS, and the other of the source and drain is electrically connected to the wiring OUT2.
- the cathode of the light emitting device EL is electrically connected to the wiring V5.
- a constant potential is supplied to the wiring V4 and the wiring V5, respectively.
- the anode side of the light emitting device EL can have a high potential, and the cathode side can have a lower potential than the anode side.
- the transistor M5 is controlled by a signal supplied to the wiring VG, and functions as a selection transistor for controlling the selection state of the pixel circuit PIX2. Further, the transistor M6 functions as a drive transistor that controls the current flowing through the light emitting device EL according to the potential supplied to the gate. When the transistor M5 is in the conductive state, the potential supplied to the wiring VS is supplied to the gate of the transistor M6, and the emission brightness of the light emitting device EL can be controlled according to the potential.
- the transistor M7 is controlled by a signal supplied to the wiring MS, and has a function of outputting the potential between the transistor M6 and the light emitting device EL to the outside via the wiring OUT2.
- the wiring V1 to which the cathode of the light receiving device PD is electrically connected and the wiring V5 to which the cathode of the light emitting device EL is electrically connected can have the same layer and the same potential.
- an image may be captured by causing the light emitting device to emit light in a pulsed manner.
- an organic EL element is suitable because it has excellent frequency characteristics.
- the frequency can be, for example, 1 kHz or more and 100 MHz or less.
- the transistor M1, the transistor M2, the transistor M3, and the transistor M4 included in the pixel circuit PIX1 and the transistor M5, the transistor M6, and the transistor M7 included in the pixel circuit PIX2 are each made of metal in the semiconductor layer on which channels are formed. It is preferable to apply a transistor using an oxide (oxide semiconductor).
- a transistor using a metal oxide having a wider bandgap and a smaller carrier density than silicon can realize an extremely small off-current. Therefore, the small off-current makes it possible to retain the electric charge accumulated in the capacitive element connected in series with the transistor for a long period of time. Therefore, it is particularly preferable to use a transistor to which an oxide semiconductor is applied for the transistor M1, the transistor M2, and the transistor M5 connected in series with the capacitive element C1 or the capacitive element C2. Further, by using a transistor to which an oxide semiconductor is applied for other transistors as well, the manufacturing cost can be reduced.
- transistors M1 to M7 a transistor in which silicon is applied to a semiconductor in which a channel is formed can also be used.
- highly crystalline silicon such as single crystal silicon or polycrystalline silicon because high field effect mobility can be realized and higher speed operation is possible.
- transistors M1 to M7 a transistor to which an oxide semiconductor is applied to one or more is used, and a transistor to which silicon is applied may be used in addition to the transistor M1 to the transistor M7.
- the transistor is described as an n-channel type transistor in FIGS. 16A and 16B, a p-channel type transistor can also be used.
- the transistor included in the pixel circuit PIX1 and the transistor included in the pixel circuit PIX2 are formed side by side on the same substrate.
- the transistor included in the pixel circuit PIX1 and the transistor included in the pixel circuit PIX2 are mixed in one region and arranged periodically.
- the electronic device of the present embodiment has an imaging device of one aspect of the present invention.
- the image pickup apparatus of one aspect of the present invention can be applied to the display unit of an electronic device. Since the image pickup apparatus of one aspect of the present invention has a function of detecting light, biometric authentication can be performed on the display unit, or touch or near touch can be detected. As a result, the functionality and convenience of the electronic device can be enhanced.
- Electronic devices include, for example, electronic devices with relatively large screens such as television devices, desktop or notebook personal computers, monitors for computers, digital signage, and large game machines such as pachinko machines, as well as digital cameras.
- the electronic device of the present embodiment is a sensor (force, displacement, position, speed, acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature, chemical substance, voice, time, hardness, electric field, current, voltage. , Including the ability to measure power, radiation, flow rate, humidity, gradient, vibration, odor or infrared rays).
- the electronic device of this embodiment can have various functions. For example, a function to display various information (still images, moving images, text images, etc.) on the display unit, a touch panel function, a function to display a calendar, date or time, a function to execute various software (programs), wireless communication. It can have a function, a function of reading a program or data recorded on a recording medium, and the like.
- the electronic device 6500 shown in FIG. 17A is a portable information terminal that can be used as a smartphone.
- the electronic device 6500 includes a housing 6501, a display unit 6502, a power button 6503, an operation button 6504, a speaker 6505, a microphone 6506, a camera 6507, a light source 6508, and the like.
- the display unit 6502 has a touch panel function.
- An imaging device can be applied to the display unit 6502.
- FIG. 17B is a schematic cross-sectional view including the end portion of the housing 6501 on the microphone 6506 side.
- a translucent protective member 6510 is provided on the display surface side of the housing 6501, and the display panel 6511, the optical member 6512, the touch sensor panel 6513, and the printed circuit board are provided in the space surrounded by the housing 6501 and the protective member 6510.
- a substrate 6517, a battery 6518, and the like are arranged.
- a display panel 6511, an optical member 6512, and a touch sensor panel 6513 are fixed to the protective member 6510 by an adhesive layer (not shown).
- a part of the display panel 6511 is folded back in the area outside the display unit 6502, and the FPC 6515 is connected to the folded back part.
- IC6516 is mounted on FPC6515.
- the FPC6515 is connected to a terminal provided on the printed circuit board 6517.
- a flexible display according to one aspect of the present invention can be applied to the display panel 6511. Therefore, an extremely lightweight electronic device can be realized. Further, since the display panel 6511 is extremely thin, it is possible to mount a large-capacity battery 6518 while suppressing the thickness of the electronic device. Further, by folding back a part of the display panel 6511 and arranging the connection portion with the FPC 6515 on the back side of the pixel portion, an electronic device having a narrow frame can be realized.
- FIG. 18A shows an example of a television device.
- the display unit 7000 is incorporated in the housing 7101.
- a configuration in which the housing 7101 is supported by the stand 7103 is shown.
- An imaging device can be applied to the display unit 7000.
- the operation of the television device 7100 shown in FIG. 18A can be performed by an operation switch provided in the housing 7101 or a separate remote controller operating device 7111.
- the display unit 7000 may be provided with a touch sensor, and the television device 7100 may be operated by touching the display unit 7000 with a finger or the like.
- the remote controller 7111 may have a display unit that displays information output from the remote controller 7111.
- the channel and volume can be operated by the operation keys or the touch panel provided on the remote controller 7111, and the image displayed on the display unit 7000 can be operated.
- the television device 7100 is configured to include a receiver, a modem, and the like.
- the receiver can receive general television broadcasts.
- information communication is performed in one direction (sender to receiver) or two-way (sender and receiver, or between recipients, etc.). It is also possible.
- FIG. 18B shows an example of a notebook personal computer.
- the notebook personal computer 7200 includes a housing 7211, a keyboard 7212, a pointing device 7213, an external connection port 7214, and the like.
- a display unit 7000 is incorporated in the housing 7211.
- An imaging device can be applied to the display unit 7000.
- FIGS. 18C and 18D show an example of digital signage.
- the digital signage 7300 shown in FIG. 18C has a housing 7301, a display unit 7000, a speaker 7303, and the like. Further, it may have an LED lamp, an operation key (including a power switch or an operation switch), a connection terminal, various sensors, a microphone, and the like.
- FIG. 18D is a digital signage 7400 attached to a columnar pillar 7401.
- the digital signage 7400 has a display unit 7000 provided along the curved surface of the pillar 7401.
- the image pickup apparatus of one aspect of the present invention can be applied to the display unit 7000.
- the wider the display unit 7000 the more information can be provided at one time. Further, the wider the display unit 7000 is, the easier it is to be noticed by people, and for example, the advertising effect of the advertisement can be enhanced.
- the touch panel By applying the touch panel to the display unit 7000, not only the image or moving image can be displayed on the display unit 7000, but also the user can operate it intuitively, which is preferable. In addition, when used for the purpose of providing information such as route information or traffic information, usability can be improved by intuitive operation.
- the digital signage 7300 or the digital signage 7400 can be linked with the information terminal 7311 such as a smartphone or the information terminal 7411 owned by the user by wireless communication.
- the information of the advertisement displayed on the display unit 7000 can be displayed on the screen of the information terminal 7311 or the information terminal 7411. Further, by operating the information terminal 7311 or the information terminal 7411, the display of the display unit 7000 can be switched.
- the digital signage 7300 or the digital signage 7400 can execute a game using the screen of the information terminal 7311 or the information terminal 7411 as an operation means (controller). As a result, an unspecified number of users can participate in and enjoy the game at the same time.
- the electronic devices shown in FIGS. 19A to 19F include a housing 9000, a display unit 9001, a speaker 9003, an operation key 9005 (including a power switch or an operation switch), a connection terminal 9006, and a sensor 9007 (force, displacement, position, speed). , Acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature, chemical substance, voice, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, smell or infrared (Including the function of), microphone 9008, and the like.
- the electronic devices shown in FIGS. 19A to 19F have various functions. For example, a function to display various information (still images, moving images, text images, etc.) on the display unit, a touch panel function, a function to display a calendar, date or time, etc., a function to control processing by various software (programs), It can have a wireless communication function, a function of reading and processing a program or data recorded on a recording medium, and the like.
- the functions of electronic devices are not limited to these, and can have various functions.
- the electronic device may have a plurality of display units.
- the electronic device even if the electronic device is provided with a camera or the like, it has a function of shooting a still image or a moving image and saving it on a recording medium (external or built in the camera), a function of displaying the shot image on a display unit, and the like. Good.
- FIGS. 19A to 19F The details of the electronic devices shown in FIGS. 19A to 19F will be described below.
- FIG. 19A is a perspective view showing a mobile information terminal 9101.
- the mobile information terminal 9101 can be used as, for example, a smartphone.
- the mobile information terminal 9101 may be provided with a speaker 9003, a connection terminal 9006, a sensor 9007, and the like. Further, the mobile information terminal 9101 can display character and image information on a plurality of surfaces thereof.
- FIG. 19A shows an example in which three icons 9050 are displayed. Further, the information 9051 indicated by the broken line rectangle can be displayed on another surface of the display unit 9001. Examples of information 9051 include notification of incoming calls such as e-mail, SNS, and telephone, titles such as e-mail and SNS, sender name, date and time, time, remaining battery level, and antenna reception strength. Alternatively, an icon 9050 or the like may be displayed at the position where the information 9051 is displayed.
- FIG. 19B is a perspective view showing a mobile information terminal 9102.
- the mobile information terminal 9102 has a function of displaying information on three or more surfaces of the display unit 9001.
- information 9052, information 9053, and information 9054 are displayed on different surfaces.
- the user can check the information 9053 displayed at a position that can be observed from above the mobile information terminal 9102 with the mobile information terminal 9102 stored in the chest pocket of the clothes.
- the user can check the display without taking out the mobile information terminal 9102 from the pocket, and can determine, for example, whether or not to receive a call.
- FIG. 19C is a perspective view showing a wristwatch-type portable information terminal 9200.
- the mobile information terminal 9200 can be used as, for example, a smart watch.
- the display unit 9001 is provided with a curved display surface, and can display along the curved display surface.
- the mobile information terminal 9200 can also make a hands-free call by communicating with a headset capable of wireless communication, for example.
- the mobile information terminal 9200 can also perform data transmission and charge with other information terminals by means of the connection terminal 9006.
- the charging operation may be performed by wireless power supply.
- FIG. 19D, 19E and 19F are perspective views showing a foldable mobile information terminal 9201. Further, FIG. 19D is a perspective view of the mobile information terminal 9201 in an unfolded state, FIG. 19F is a folded state, and FIG. 19E is a perspective view of a state in which one of FIGS. 19D and 19F is in the process of changing to the other.
- the mobile information terminal 9201 is excellent in portability in the folded state, and is excellent in display listability due to a wide seamless display area in the unfolded state.
- the display unit 9001 included in the personal digital assistant terminal 9201 is supported by three housings 9000 connected by a hinge 9055. For example, the display unit 9001 can be bent with a radius of curvature of 0.1 mm or more and 150 mm or less.
- BM light-shielding layer
- EL light-emitting device
- PD light-receiving device
- 10A image pickup device
- 10B image pickup device
- 10C image pickup device
- 10D image pickup device
- 10E image pickup device
- 10F image pickup device
- 10G image pickup device
- 10H image pickup device
- 10J image pickup device
- 10K image pickup device
- 10L image pickup device
- 10M image pickup device
- 23c light
- 23d light
- 60B sub-pixel
- 60G sub-pixel
- 60PD Sub-pixel
- 60R Sub-pixel
- 60W Sub-pixel
- 60: Pixel 61: Imaging unit
- 62 Drive circuit unit
- 64 Drive circuit unit
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Abstract
Description
図2A乃至図2Cは、画素の一例を示す上面図である。
図3A乃至図3Dは、撮像装置の一例を示す断面図である。
図4は、撮像装置の動作を説明する概念図である。
図5は、撮像装置の動作の一例を示すフローチャートである。
図6A乃至図6Cは、撮像装置の一例を示す断面図である。
図7A乃至図7Cは、撮像装置の一例を示す断面図である。
図8A乃至図8Cは、撮像装置の一例を示す断面図である。
図9A乃至図9Cは、撮像装置の一例を示す断面図である。
図10A乃至図10Cは、撮像装置の一例を示す断面図である。
図11は、撮像装置の一例を示す斜視図である。
図12は、撮像装置の一例を示す断面図である。
図13A、図13Bは、撮像装置の一例を示す断面図である。
図14A乃至図14Cは、撮像装置の一例を示す断面図である。
図15は、撮像装置の一例を示す断面図である。
図16A、図16Bは、画素回路の一例を示す回路図である。
図17A、図17Bは、電子機器の一例を示す図である。
図18A乃至図18Dは、電子機器の一例を示す図である。
図19A乃至図19Fは、電子機器の一例を示す図である。
本発明の一態様は、撮像部と、メモリと、演算回路とを有する撮像装置である。また、撮像部に、発光デバイス(発光素子ともいう)と、受光デバイスと(受光素子ともいう)を有する。具体的には、撮像部に発光デバイス及び受光デバイスがそれぞれマトリクス状に配置され、発光デバイスが光を発し、被写体から反射された光を受光デバイスが受光する。メモリは、基準データを保持する機能を有する。演算回路は、基準データを用いて受光デバイスから出力される画像データを補正し、補正画像データを算出する機能を有する。また、本発明の一態様である撮像装置は、異なる色の発光デバイスを順次発光させて撮像し、各色の光で撮像した画像から得られる画像データをそれぞれ補正して補正画像データを算出し、これらの補正画像データを足し合わせることで、合成画像データを生成する機能を有する。また、本発明の一態様である撮像装置は、合成画像データに基づいて合成画像を撮像部に表示させることができる。
本発明の一態様の撮像装置10を説明するブロック図を、図1に示す。撮像装置10は、撮像部61、駆動回路部62、駆動回路部63、駆動回路部64、及び回路部65を有する。
本発明の一態様である撮像装置の動作を、図5を用いて説明する。図5は、撮像装置の動作を説明するフローチャートである。
本発明の一態様である撮像装置の詳細な構成について、図6乃至図10を用いて説明する。
撮像装置10Aの断面図を、図6Aに示す。
前述の撮像装置10Aと異なる構成を有する撮像装置10Bの断面図を、図6Bに示す。なお、以降の撮像装置の説明において、先に説明した撮像装置と同様の構成については、説明を省略することがある。
撮像装置10Cの断面図を、図6Cに示す。
撮像装置10Dの断面図を、図8Aに示す。
撮像装置10Eの断面図を、図8Bに示す。
撮像装置10Fの断面図を、図8Cに示す。
撮像装置10Gの断面図を、図9Aに示す。
撮像装置10Hの断面図を、図9Bに示す。
撮像装置10Jの断面図を、図9Cに示す。
図10Aに撮像装置10Kの断面図を示し、図10Bに撮像装置10Lの断面図を示し、図10Cに撮像装置10Mの断面図を示す。
以下では、図11乃至図15を用いて、本発明の一態様の撮像装置のより詳細な構成について説明する。
図11に撮像装置100Aの斜視図を示し、図12に撮像装置100Aの断面図を示す。
撮像装置100Bの断面図を、図13Aに示す。
撮像装置100Cの断面図を、図14Aに示す。
撮像装置100Dの断面図を、図15に示す。
以下では、半導体層に適用可能な金属酸化物について説明する。
本実施の形態では、本発明の一態様の撮像装置について、図16を用いて説明する。
本実施の形態では、本発明の一態様の電子機器について、図17乃至図19を用いて説明する。
Claims (6)
- 撮像部と、メモリと、演算回路と、を有し、
前記撮像部は、受光デバイスと、第1の発光デバイスと、第2の発光デバイスと、を有し、
前記第1の発光デバイスは、前記第2の発光デバイスと異なる波長領域の光を発する機能を有し、
前記撮像部は、前記第1の発光デバイスを発光させて、第1の画像データを取得する機能を有し、
前記撮像部は、前記第2の発光デバイスを発光させて、第2の画像データを取得する機能を有し、
前記メモリは、第1の基準データ及び第2の基準データを保持する機能を有し、
前記演算回路は、前記メモリに保持された前記第1の基準データを用いて前記第1の画像データを補正し、第1の補正画像データを算出する機能を有し、
前記演算回路は、前記メモリに保持された前記第2の基準データを用いて前記第2の画像データを補正し、第2の補正画像データを算出する機能を有し、
前記演算回路は、前記第1の補正画像データと前記第2の補正画像データを足し合わせて、合成画像データを生成する機能を有し、
前記受光デバイスは、第1の画素電極を有し、
前記第1の発光デバイスは、前記第1の画素電極と同一面上に位置する第2の画素電極を有する撮像装置。 - 請求項1において、
前記受光デバイスは、活性層、及び共通電極を有し、
前記第1の発光デバイスは、発光層、及び前記共通電極を有し、
前記活性層は、前記第1の画素電極上に位置し、
前記活性層は、第1の有機化合物を有し、
前記発光層は、前記第2の画素電極上に位置し、
前記発光層は、第2の有機化合物を有し、
前記共通電極は前記活性層を介して前記第1の画素電極と重なる部分と、前記発光層を介して前記第2の画素電極と重なる部分と、を有する撮像装置。 - 請求項1または請求項2において、
前記撮像部は、レンズを有し、
前記レンズは、前記受光デバイスと重なる部分を有し、
前記レンズは、前記第1の画素電極上に位置し、
前記レンズを透過した光が、前記受光デバイスに入射する撮像装置。 - 請求項1乃至請求項3のいずれか一に記載の撮像装置と、
コネクタ及び集積回路のいずれか一以上と、を有する撮像モジュール。 - 請求項4に記載の撮像モジュールと、
アンテナ、バッテリ、筐体、カメラ、スピーカ、マイク、及び操作ボタンのいずれか一以上と、を有する電子機器。 - 第1の発光デバイスを発光させ、第1の画像データを取得する工程と、
第1の基準データを用いて前記第1の画像データを補正し、第1の補正画像データを算出する工程と、
第2の発光デバイスを発光させ、第2の画像データを取得する工程と、
第2の基準データを用いて前記第2の画像データを補正し、第2の補正画像データを算出する工程と、
前記第1の補正画像データと前記第2の補正画像データを足し合わせて、合成画像データを生成する工程と、を有し、
前記第1の発光デバイスは、前記第2の発光デバイスと異なる波長領域の光を発する機能を有する撮像方法。
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