WO2020202547A1 - 光距離測定装置 - Google Patents
光距離測定装置 Download PDFInfo
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- WO2020202547A1 WO2020202547A1 PCT/JP2019/015131 JP2019015131W WO2020202547A1 WO 2020202547 A1 WO2020202547 A1 WO 2020202547A1 JP 2019015131 W JP2019015131 W JP 2019015131W WO 2020202547 A1 WO2020202547 A1 WO 2020202547A1
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- light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Definitions
- the present invention relates to a light distance measuring device.
- An optical distance measurement method that measures the distance from a light source to an object by a method such as pulse propagation method, triangular distance measurement method, confocal method, white interference method, or wavelength scanning interference method using the light emitted from the light source.
- the white interference method, the wavelength scanning interference method, and the like are interference methods that use the interference phenomenon of light.
- the interference method the light emitted by the light source is branched into the measurement light and the reference light, and the reflected light and the reference light, which are the light reflected on the object by the measurement light, interfere with each other, and the reflected light and the reference light are strengthened.
- the distance from the light source to the object is measured based on the conditions that meet the conditions.
- a white interference method such as the spectrum domain method uses a light source that emits light in a wide band.
- the wide band light emitted by the light source is branched into the measurement light and the reference light.
- the distance from the light source to the object is measured based on the interference conditions between the reflected light spectrally separated and the reference light spectrally separated by spatially spectrally splitting the spectrum with a spectroscope.
- the wavelength scanning interference method sweeps the wavelength of the light emitted from the light source.
- the wavelength-swept light is branched into measurement light and reference light.
- the reflected light which is the light reflected on the object by the measurement light obtained by branching the wavelength-swept light, interferes with the reference light obtained by branching the wavelength-swept light.
- the wavelength scanning interference method measures the distance from the light source to the object by measuring the frequency of the reflected light and the frequency of the reference light.
- Non-Patent Document 1 discloses a wavelength sweep type optical coherence tomography (SS-OCT: Swept Source-Optical Coherence Tomography) in which an optical distance measuring device based on a wavelength scanning interference method is applied to medical applications.
- SS-OCT Swept Source-Optical Coherence Tomography
- the range of the distance from the light source that can be measured by one measurement to the object is limited to the range of the focal length of the optical system for irradiating the object with the measured light. There was a problem of closing it.
- the present invention is for solving the above-mentioned problems, and an object of the present invention is to provide an optical distance measuring device capable of measuring the distance with high accuracy while widening the range of distance measurement to an object.
- the optical distance measuring device of the present invention branches a branch portion that branches a laser beam that is an input continuous wave and outputs the branched laser light as measurement light and reference light, and a branch portion that outputs the measurement light output by the branch portion. Then, the measurement light branch portion that outputs the measured light after branching as the first measurement light and the second measurement light and the reference light output by the branch portion are branched, and the reference light after branching is the first reference light and the first reference light.
- a transmitter having a second optical system having a focal distance equal to that of the first optical system and irradiating the object with the second measurement light, and a first reference light.
- the first receiving unit that receives the first reflected light, which is the light reflected by the object, and outputs the first receiving signal indicating the first reference light and the first reflected light, and the second reference.
- the light and the second receiving unit that receives the second reflected light, which is the light reflected by the object, and outputs the second receiving signal indicating the second reference light and the second reflected light.
- the distance can be measured with high accuracy while widening the range of distance measurement to the object.
- FIG. 1 is a block diagram showing an example of the configuration of a main part of the light distance measuring device according to the first embodiment.
- FIG. 2 is a diagram showing an example of a processing device to which the light distance measuring device according to the first embodiment is applied.
- FIG. 3 is a diagram showing an example of a processing device to which the light distance measuring device according to the first embodiment is applied.
- FIG. 4A is a diagram showing an example of the distance between the transmission unit and the object according to the first embodiment.
- FIG. 4B shows an example of the relationship between the first reference light and the first reflected light input to the first light interference unit when the distance between the transmission unit and the object according to the first embodiment is X2. It is a figure which shows.
- FIG. 4A is a diagram showing an example of the distance between the transmission unit and the object according to the first embodiment.
- FIG. 4B shows an example of the relationship between the first reference light and the first reflected light input to the first light interference unit when the distance between the transmission unit and the object according to the first
- FIG. 4C is a diagram showing a frequency spectrum of the first interference light measured by the frequency measuring unit based on the first received signal at a certain time point T1 shown in FIG. 4B.
- FIG. 4D is a diagram showing a frequency spectrum of the first interference light measured by the frequency measuring unit based on the first received signal at a certain time point at the position of the object shown in FIG. 4A.
- FIG. 5A is a diagram showing an example of the relationship between the Rayleigh length of the optical system and the range in which the distance calculation unit according to the first embodiment can calculate the distance from the transmission unit to the object.
- FIG. 5B is a diagram showing an example of the relationship between the Rayleigh length of the optical system and the intensity of the reflected wave when the distance from the transmitting unit to the object according to the first embodiment is constant.
- FIG. 5C is a diagram showing an example of the relationship between the intensity of the reflected wave and the error included in the distance from the transmitting unit to the object calculated by the distance calculating unit according to the first embodiment.
- FIG. 6 shows the first measurement light and the second measurement light according to the first embodiment, and the first reflected light and the second reflected light which are the reflected light reflected by the object by the first measurement light and the second measurement light. It is a figure which shows an example of the path of.
- FIG. 7 is a block diagram showing an example of the configuration of a main part of the light distance measuring device according to the second embodiment.
- FIG. 1 is a block diagram showing an example of the configuration of a main part of the light distance measuring device 100 according to the first embodiment.
- the optical distance measuring device 100 includes a laser light source 101, a sweeping unit 102, a branching unit 103, a measuring optical branching unit 104, a reference optical branching unit 105, a delay adjusting unit 106, a first optical circulator 121, a second optical circulator 122, and a first.
- the laser light source 101 emits a laser beam that is continuous light.
- the laser light source 101 is a light source that emits a laser beam having a predetermined frequency, such as a gas laser or a semiconductor laser.
- the laser light source 101 is not an essential configuration in the light distance measuring device 100 according to the first embodiment.
- the light distance measuring device 100 may operate by receiving the laser light emitted by an external laser light generator having the laser light source 101.
- the laser light emitted by the laser light source 101 is input to the sweep unit 102.
- the sweep unit 102 sweeps the wavelength of the input laser light and outputs the swept laser light as the sweep light.
- the sweep light output by the sweep unit 102 is a continuous wave laser beam.
- the branching portion 103 is composed of an optical coupler or the like, branches the input continuous wave laser light, and outputs the branched laser light as measurement light and reference light. More specifically, the branching unit 103 branches the sweeping light, which is the laser light emitted by the sweeping unit 102, and outputs the laser light after the branching as the measurement light and the reference light.
- the measurement light branching unit 104 branches the measurement light output by the branching unit 103, and outputs the measured light after branching as the first measurement light and the second measurement light.
- the measurement optical branching unit 104 is composed of PBS (Polarizing Beam Splitter) or the like, and the measuring optical branching unit 104 branches by polarization-separating the measurement light output by the branching unit 103 to branch.
- the subsequent measurement light is output as the first polarization measurement light which is the first measurement light and the second polarization measurement light which is the second measurement light.
- the first polarization measurement light and the second polarization measurement light are, for example, linearly polarized light having different vibration directions from each other.
- the first optical circulator 121 is composed of, for example, a 3-port optical circulator, and guides the first measurement light output by the measurement light branching unit 104 to the first optical system 131. Specifically, the first optical circulator 121 guides the first polarization measurement light, which is the first measurement light output by the measurement light branching unit 104, to the first optical system 131. The first optical system 131 irradiates the object 20 with the first measurement light. Specifically, for example, the first optical system 131 is composed of one or more transmissive lenses or one or more reflective lenses or the like, and the first optical system 131 has a first optical circulator 121 first.
- the light beam diameter of the first polarization measurement light guided to the optical system 131 is widened, and the object 20 is irradiated with the first polarization measurement light having the widened light beam diameter.
- the first optical system 131 has a first Rayleigh length.
- the Rayleigh length is one of the values indicating the focusing characteristics of the optical system in the laser light, and the diameter of the laser light focused by the optical system can be regarded as sufficiently small, from the optical system to the focal point. It is a value indicating the range of length in the direction of heading.
- the first optical system 131 guides the first reflected light, which is the light reflected on the object 20 by the first polarization measurement light applied to the object 20, to the first optical circulator 121.
- the first optical circulator 121 guides the first reflected light to the first light interference unit 151.
- the second optical circulator 122 is composed of, for example, a 3-port optical circulator, and guides the second measurement light output by the measurement light branching unit 104 to the second optical system 132. Specifically, the second optical circulator 122 guides the second polarization measurement light, which is the second measurement light output by the measurement light branching unit 104, to the second optical system 132. The second optical system 132 irradiates the object 20 with the second measurement light. Specifically, for example, the second optical system 132 is composed of one or more transmitting lenses or one or more reflecting lenses or the like, and the second optical system 132 has a second optical circulator 122 as the first lens.
- the light beam diameter of the second polarization measurement light guided to the optical system 131 is widened, and the object 20 is irradiated with the second polarization measurement light having the widened light beam diameter.
- the second optical system 132 has a second Rayleigh length different from the first Rayleigh length.
- the second optical system 132 has a focal length equal to the focal length of the first optical system 131. Note that the equal focal lengths are not limited to being exactly the same focal lengths, but include substantially equal focal lengths.
- the second optical system 132 guides the second reflected light, which is the light reflected on the object 20 by the second polarization measurement light applied to the object 20, to the second optical circulator 122.
- the second optical circulator 122 guides the second reflected light to the second light interference unit 152.
- the reference light branching unit 105 branches the reference light output by the branching unit 103, and outputs the branched reference light as the first reference light and the second reference light.
- the reference optical branching portion 105 is composed of PBS or the like, and the reference optical branching portion 105 branches by polarization-separating the reference light output by the branching portion 103 to provide the reference light after branching.
- the first polarization reference light which is the first reference light and the second polarization reference light which is the second reference light are output.
- the first polarized wave reference light and the second polarized wave reference light are, for example, linearly polarized light having different vibration directions from each other.
- the vibration direction of the first polarization measurement light and the vibration direction of the first polarization reference light are the same, and the vibration direction of the second polarization measurement light and the vibration of the second polarization reference light. It is assumed that the directions are the same.
- the first reference light output by the reference light branching unit 105 is guided to the first optical interference unit 151.
- the second reference light output by the reference light branching unit 105 is guided to the second light interfering unit 152.
- the delay adjusting unit 106 adjusts the path difference between the measurement light and the reference light output by the branching unit 103.
- the optical distance measuring device 100 includes a laser light source 101, a sweeping unit 102, a branching unit 103, a measuring optical branching unit 104, a reference optical branching unit 105, a delay adjusting unit 106, a first optical circulator 121, and a second.
- the transmission unit 110 is composed of the optical circulator 122, the first optical system 131, and the second optical system 132.
- the first light interference unit 151 causes the first reference light and the first reflected light to interfere with each other, and outputs the interference light after the first reference light and the first reflected light are made to interfere with each other as the first interference light.
- the first optical interference unit 151 is composed of, for example, a 90-degree optical hybrid, and outputs the first interference light by synthesizing the first reference light and the first reflected light.
- the first photoelectric conversion unit 161 photoelectrically converts the first interference light output by the first optical interference unit 151, and outputs a first analog signal indicating the first interference light.
- the first digital conversion unit 171 performs A / D conversion of the first analog signal, and outputs the first analog signal after the A / D conversion as a first reception signal which is a digital signal.
- the first receiving unit 141 is composed of the first optical interference unit 151, the first photoelectric conversion unit 161 and the first digital conversion unit 171. That is, the first receiving unit 141 receives the first reference light and the first reflected light which is the light reflected by the object 20 by the first measurement light, and exhibits the first reference light and the first reflected light. 1 Output the received signal.
- the second light interference unit 152 causes the second reference light and the second reflected light to interfere with each other, and outputs the interference light after the second reference light and the second reflected light are made to interfere with each other as the second interference light.
- the second light interference unit 152 is composed of, for example, a 90-degree optical hybrid, and outputs the second interference light by synthesizing the second reference light and the second reflected light.
- the second photoelectric conversion unit 162 photoelectrically converts the second interference light output by the second light interference unit 152, and outputs a second analog signal indicating the second interference light.
- the second digital conversion unit 172 performs A / D conversion of the second analog signal and outputs the second analog signal after the A / D conversion as a second reception signal which is a digital signal.
- the second receiving unit 142 is composed of the second optical interference unit 152, the second photoelectric conversion unit 162, and the second digital conversion unit 172. That is, the second receiving unit 142 receives the second reference light and the second reflected light which is the light reflected by the object 20 by the second measurement light, and exhibits the second reference light and the second reflected light. 2 Output the received signal.
- the frequency measuring unit 181 measures the intensity of each frequency component of the first reference light and the first reflected light based on the first received signal. Further, the frequency measuring unit 181 outputs the first signal information indicating the intensity of each of the measured frequency components of the first reference light and the first reflected light. Further, the frequency measuring unit 181 measures the intensity of each frequency component of the second reference light and the second reflected light based on the second received signal. Further, the frequency measuring unit 181 outputs the second signal information indicating the intensity of each of the measured frequency components of the second reference light and the second reflected light. More specifically, for example, the frequency measuring unit 181 measures the intensity of each frequency component of the first reference light and the first reflected light by Fourier transforming the first received signal. Further, the frequency measuring unit 181 measures the intensity of each frequency component of the second reference light and the second reflected light by Fourier transforming the second received signal.
- the distance calculation unit 182 calculates the distance from the transmission unit 110 to the object 20 based on the first signal information or the second signal information output by the frequency measurement unit 181. Further, the distance calculation unit 182 outputs distance information indicating the distance from the transmission unit 110 calculated by the distance calculation unit 182 to the object 20.
- the distance from the transmission unit 110 to the object 20 is, for example, the distance from the first optical system 131 or the second optical system 132 to the object 20.
- the distance from the transmission unit 110 to the object 20 is not limited to the distance from the first optical system 131 or the second optical system 132 to the object 20, but the object 20 is based on the reference configuration of the transmission unit 110.
- the distance calculation unit 182 calculates the distance from the transmission unit 110 to the object 20 based on the first signal information or the second signal information output by the frequency measurement unit 181 by the polarization diversity method. calculate. Further, the distance calculation unit 182 outputs distance information indicating the distance from the transmission unit 110 calculated by the distance calculation unit 182 to the object 20. The distance calculation unit 182 may calculate the distance from the transmission unit 110 to the object 20 based on the first signal information and the second signal information output by the frequency measurement unit 181.
- the distance from the transmission unit 110 calculated by the distance calculation unit 182 to the object 20 is, for example, the distance from the first optical circulator 121, the second optical circulator 122, the first optical system 131, or the second optical system 132 to the object 20. Is the distance to.
- the delay adjustment unit 106 outputs the measurement light from the branch unit 103.
- the first measurement light via the measurement light branching portion 104, and the path length until the first measurement light is output toward the first optical system 131 via the first optical circulator 121, and The sum of the path lengths from the time when the first reflected light is input to the first optical circulator 121 to the time when it is input to the first light interference unit 151, and after the reference light is output from the branch unit 103, the first light interference unit 151 The route difference from the route length is adjusted until it is input to.
- the information transmission unit 190 controls to transmit the distance information output by the distance calculation unit 182, which indicates the distance between the transmission unit 110 and the object 20, to the outside. It should be noted that between the laser light source 101 and the sweep section 102, between the sweep section 102 and the branch section 103, between the branch section 103 and the measurement optical branch section 104, between the branch section 103 and the delay adjusting section 106, and The delay adjusting unit 106 and the measurement optical branching unit 104 are connected by, for example, an optical fiber, and the laser beam is guided via the optical fiber.
- the second For example, between the optical circulator 122 and the second optical interference section 152, between the measurement optical branching section 104 and the first optical interference section 151, and between the measurement optical branching section 104 and the second optical interference section 152, for example.
- the laser beam which is connected by an optical fiber which is a polarization holding fiber which holds the amplitude direction of polarization is guided through the optical fiber.
- FIGS. 2 and 3 are views showing an example of a processing device 10 to which the light distance measuring device 100 according to the first embodiment is applied.
- the processing device 10 shown in FIG. 2 includes a chuck 12, a processing head 11, a head movement control unit 13, and a head movement mechanism 14.
- the object 20 is an object that the processing apparatus 10 intends to process.
- the chuck 12 is a pedestal for fixing the object 20.
- the processing head 11 is a portion for processing the object 20.
- the processing head 11 may be processed in contact with the object 20 when processing the object 20, or may be processed in a non-contact state with the object 20.
- the head movement control unit 13 acquires the distance information output by the optical distance measuring device 100, and generates a control signal for moving the machining head 11 with respect to the chuck 12 based on the distance information.
- the head movement control unit 13 outputs the generated control signal to the head movement mechanism 14.
- the head movement mechanism 14 receives the control signal output by the head movement control unit 13 and moves the machining head 11 with respect to the chuck 12 based on the control signal.
- the machining apparatus 10 shown in FIG. 3 includes a chuck 12, a machining head 11, a chuck movement control unit 15, and a chuck movement mechanism 16. Since the chuck 12 and the processing head 11 are the same as the chuck 12 and the processing head 11 shown in FIG. 2, description thereof will be omitted.
- the chuck movement control unit 15 acquires the distance information output by the optical distance measuring device 100, and generates a control signal for moving the chuck 12 with respect to the machining head 11 based on the distance information.
- the chuck movement control unit 15 outputs the generated control signal to the chuck movement mechanism 16.
- the chuck movement mechanism 16 receives a control signal output by the chuck movement control unit 15 and moves the chuck 12 with respect to the machining head 11 based on the control signal.
- the first optical circulator 121, the second optical circulator 122, the first optical system 131, and the second optical system 132 in the light distance measuring device 100 are fixed to the processing head 11. It is assumed that the positions where the first optical circulator 121, the second optical circulator 122, the first optical system 131, and the second optical system 132 are fixed to the processing head 11 are known. That is, based on the distance from the transmission unit 110 to the object 20 indicated by the distance information output by the optical distance measuring device 100, the head movement control unit 13 or the chuck movement control unit 15 has the machining head 11 and the object 20. It is possible to calculate the distance between them.
- FIG. 4A is a diagram showing an example of the distance between the transmission unit 110 and the object 20 according to the first embodiment. As an example, FIG. 4A shows that the object 20 is located at a position separated from the transmission unit 110 according to the first embodiment by X1, X2, and X3.
- FIG. 4B shows the relationship between the first reference light and the first reflected light input to the first light interference unit 151 when the distance between the transmission unit 110 and the object 20 according to the first embodiment is X2. It is a figure which shows an example.
- the horizontal axis represents the elapsed time and the vertical axis represents the frequency. Since the laser light input to the branch portion 103 is the sweep light, the reference light and the measurement light output from the branch portion 103 and the reflected light which is the light reflected by the object 20 are swept. It becomes light. That is, the frequencies of the first reference light and the first reflected light input to the first light interference unit 151 change with the passage of time in the same manner as the sweep light. In the first embodiment, it is assumed that the value of the frequency change per unit time in the sweep light is known.
- the first reflected light is delayed with respect to the first reference light in the first light interference unit 151 according to the distance between the transmission unit 110 and the object 20. Therefore, in FIG. 4B, the first reflected light is shown in a state of being shifted to the right by the time ⁇ T2 with respect to the first reference light.
- the frequency measuring unit 181 measures the intensity of each frequency component of the first interfering light based on the first interfering light at a certain time point T1.
- FIG. 4C is a diagram showing a frequency spectrum of the first interference light measured by the frequency measuring unit 181 based on the first received signal at a certain time point T1 shown in FIG. 4B.
- the horizontal axis represents the frequency and the vertical axis represents the intensity of the first interference light.
- the intensity of the first interference light is increased in the two frequency bands.
- the frequency measuring unit 181 generates first signal information indicating that the frequency of the first reference light is Fr and the frequency of the first reflected light is F2, and outputs the first signal information.
- the distance calculation unit 182 delayed the first reflected light with respect to the first reference light based on the first signal information output by the frequency measurement unit 181 and the value of the frequency change per unit time in the known sweep light. Calculate the time ⁇ T2.
- the distance calculation unit 182 calculates X2, which is the distance from the transmission unit 110 to the object 20, by multiplying the calculated time ⁇ T2 by the known speed of light and further multiplying by 1/2.
- FIG. 4D is a diagram showing a frequency spectrum of the first interference light measured by the frequency measuring unit 181 based on the first received signal at a certain time point at the position of the object 20 shown in FIG. 4A.
- the frequency of the first reference light and the first reflected light As shown in FIG. 4A, when the distance between the transmitting unit 110 and the object 20 is X1, which is shorter than X2, as shown in FIG. 4D, the frequency of the first reference light and the first reflected light. The difference from the frequency becomes small.
- the time that the first reflected light is delayed with respect to the first reference light which is calculated by the distance calculation unit 182, is calculated from the time ⁇ T2 when the distance between the transmission unit 110 and the object 20 is X2. It gets shorter.
- the frequency of the first reference light and the first reflection are shown in FIG. 4D.
- the difference from the frequency of light becomes large.
- the time that the first reflected light is delayed with respect to the first reference light, which is calculated by the distance calculation unit 182 is calculated from the time ⁇ T2 when the distance between the transmission unit 110 and the object 20 is X2. become longer.
- the distance calculation unit 182 calculates the distance from the transmission unit 110 to the object 20, the first reference light and the first reflection input to the first optical interference unit 151.
- the method in which the distance calculation unit 182 calculates the distance from the transmission unit 110 to the object 20 is as follows: the second reference light and the second reflected light input to the second light interference unit 152. Since the same applies to the above, the description thereof will be omitted.
- the distance at which the distance calculation unit 182 can calculate the distance from the transmission unit 110 to the object 20 is in the vicinity of the focal length including the focal lengths of the first optical system 131 and the second optical system 132.
- the first optical system 131 and the second optical system 132 have the same focal lengths as each other.
- the range in which the distance calculation unit 182 when the first optical system 131 or the second optical system 132 can be used can calculate the distance from the transmission unit 110 to the object 20 will be described.
- the second Rayleigh length of the second optical system 132 will be described as being longer than the first Rayleigh length of the first optical system 131.
- FIG. 5A is a diagram showing an example of the relationship between the Rayleigh length of the optical system and the range in which the distance calculation unit 182 can calculate the distance from the transmission unit 110 to the object 20.
- the range in which the distance calculation unit 182 can calculate the distance from the transmission unit 110 to the object 20 becomes wider as the Rayleigh length of the optical system becomes longer. That is, since the second Rayleigh length of the second optical system 132 is longer than the first Rayleigh length of the first optical system 131, the distance calculation unit 182 is based on the second reception signal output by the second reception unit 142.
- the range of the distance from the transmission unit 110 to the object 20 that can be calculated is compared with the range of the distance from the transmission unit 110 to the object 20 that can be calculated based on the first reception signal output by the first reception unit 141. Become wider.
- FIG. 5B is a diagram showing an example of the relationship between the Rayleigh length of the optical system and the intensity of the reflected wave when the distance from the transmission unit 110 to the object 20 is constant.
- the longer the Rayleigh length the smaller the spot diameter.
- the reflected light reflected by the object 20 by the measurement light has not only a specular reflection component but also a diffuse reflection component. Therefore, the reflected light returning to the optical system is attenuated as the ratio of the diffusely reflected component increases. The amount of attenuation of reflected light increases as the spot diameter increases, and decreases as the spot diameter decreases.
- the intensity of the reflected wave becomes weaker as the Rayleigh length is longer, and becomes stronger as the Rayleigh length is shorter.
- FIG. 5B when the distance from the transmission unit 110 to the object 20 is constant, it can be seen that the intensity of the reflected wave becomes weaker as the Rayleigh length of the optical system becomes longer. That is, since the second Rayleigh length of the second optical system 132 is longer than the first Rayleigh length of the first optical system 131, the distance calculation unit 182 is included in the second reception signal output by the second reception unit 142. The intensity of the second reflected wave is weaker than the intensity of the first reflected wave included in the first received signal output by the first receiving unit 141.
- FIG. 5C is a diagram showing an example of the relationship between the intensity of the reflected wave and the error included in the distance from the transmission unit 110 to the object 20 calculated by the distance calculation unit 182.
- the error included in the distance from the transmission unit 110 to the object 20 calculated by the distance calculation unit 182 has a strong reflected wave intensity. It turns out that it gets smaller. That is, the intensity of the second reflected wave included in the second received signal output by the second receiving unit 142 is compared with the intensity of the first reflected wave included in the first received signal output by the first receiving unit 141.
- the error included in the distance from the transmission unit 110 to the object 20 calculated by the distance calculation unit 182 based on the second reception signal output by the second reception unit 142 is output by the first reception unit 141. It is larger than the error included in the distance from the transmission unit 110 to the object 20 calculated based on the first received signal.
- the measurement range is narrow, but the measurement error is small.
- the optical distance measuring device 100 roughly refers to an object 20 whose distance from the transmitting unit 110 to an object is unknown, based on a second received signal output by the second receiving unit 142. The distance from the transmitter 110 to the object 20 is measured.
- the processing device 10 moves the processing head 11 or the chuck 12 based on the distance information indicating the distance from the rough transmission unit 110 to the object 20 acquired from the optical distance measuring device 100. And make a rough alignment.
- the optical distance measuring device 100 calculates an accurate distance from the transmitting unit 110 to the object 20 based on the first receiving signal output by the first receiving unit 141.
- the light distance measuring device 100 uses the first polarization measurement light and the second polarization measurement light, and the first polarization reference light and the second polarization reference light from the transmission unit 110.
- the effect of measuring the distance to the object 20 will be described.
- FIG. 6 shows an example of the path of the first measured light and the second measured light, and the first reflected light and the second reflected light which are the reflected light reflected by the object 20 by the first measurement light and the second measurement light. It is a figure which shows.
- the surface of the object 20 irradiated with the first measurement light and the second measurement light has surface roughness. Therefore, as shown in FIG.
- the first reflected light and the second reflected light reflected by the first measurement light and the second measurement light on the surface are directed toward the same path as the first measurement light and the second measurement light. It has not only a positive reflection component that reflects, but also a diffuse reflection component that spreads uniformly over a wide angle and reflects. Therefore, the reflected light incident on the first optical system 131 has a component due to the first reflected light and a component of the second reflected light due to diffusely reflected stray light on the surface. Further, the reflected light incident on the second optical system 132 has a component due to the second reflected light and a component of the first reflected light due to diffusely reflected stray light on the surface.
- the optical distance measuring device 100 as described above, the first polarization measurement light and the second polarization measurement light branched by the measurement light branching unit 104 for polarization separation of the measurement light, Further, the distance from the transmission unit 110 to the object 20 is measured by using the first polarization reference light and the second polarization reference light branched by the reference light branching unit 105 for polarization separation of the reference light. Is. Two polarized waves with different vibration directions do not interfere with each other. Therefore, of the second reflected light incident on the first optical system 131, the component due to the diffusely reflected stray light on the surface does not interfere with the component due to the first reflected light in the first light interference unit 151.
- the frequency measuring unit 181 can accurately measure the frequency of the first measured light in the first received signal based on the component due to the first reflected light.
- the frequency measuring unit 181 can accurately measure the frequency of the second measured light in the second received signal based on the component due to the second reflected light.
- the optical distance measuring device 100 measures the distance from the transmitting unit 110 to the object 20, the first receiving signal output by the first receiving unit 141 and the second receiving unit 142 output.
- the accurate distance from the transmission unit 110 to the object 20 may be calculated based on the second received signal. More specifically, for example, the frequency measuring unit 181 measures the intensity of each frequency component of the first reference light and the first reflected light based on the signal obtained by combining the first received signal and the second received signal. Then, the first signal information indicating the intensity of each frequency component of the measured first reference light and the first reflected light may be output.
- the distance calculation unit 182 calculates the distance from the transmission unit 110 to the object 20 based on the first signal information output by the frequency measurement unit 181. With this configuration, in the third step, the optical distance measuring device 100 can more accurately calculate the distance from the transmitting unit 110 to the object 20.
- the frequency measuring unit 181 uses the polarization diversity method to determine the intensity of each frequency component of the first reference light and the first reflected light based on the first received signal or the second received signal.
- the first signal information indicating the intensity of each frequency component of the measured first reference light and the first reflected light may be output.
- the polarization ratio between the first polarization measurement light and the second polarization measurement light is the ambient temperature in the optical distance measuring device 100, the disturbance generated when propagating in the optical fiber, and the object 20. It varies depending on the material and the surface condition of the object 20.
- the frequency measuring unit 181 measures the frequency using only the first received signal generated by only one polarized wave
- the two polarized waves having different vibration directions do not interfere with each other.
- the reception sensitivity of the first reflected wave in the receiving unit 141 may decrease.
- the intensity of the two polarized waves is constant, even if the intensity of one polarized wave decreases, the intensity of the other polarized wave increases by the amount of the decrease.
- the frequency measuring unit 181 uses the polarization diversity method for each frequency component of the first reference light and the first reflected light based on the first received signal or the second received signal generated by the two polarizations, respectively. The intensity is measured, and the first signal information indicating the intensity of each frequency component of the measured first reference light and the first reflected light is output.
- the optical distance measuring device 100 has increased resistance to fluctuations in the polarization ratio between the first polarization measurement light and the second polarization measurement light, and the polarization ratio Can be calculated more accurately from the transmission unit 110 to the object 20 even when
- the optical distance measuring device 100 branches the input continuous wave laser light, and outputs the branched laser light as the measurement light and the reference light, and the branch portion 103 outputs the branched laser light.
- the reference light after branching by branching the measurement light branching unit 104 that branches the measurement light and outputs the measured light after branching as the first measurement light and the second measurement light and the reference light output by the branching unit 103.
- a reference light branching portion 105 that outputs light as a first reference light and a second reference light, a first optical system 131 having a first Rayleigh length and for irradiating the object 20 with the first measurement light, and a first With the second optical system 132 for irradiating the object 20 with the second measurement light, which has a second Rayleigh length different from the Rayleigh length and has a focal distance equal to the focal distance of the first optical system 131.
- the transmission unit 110 having the above, the first reference light, and the first reflected light, which is the light reflected by the object 20 by the first measurement light, show the first reference light and the first reflected light.
- the second reference light and the second reflected light receive the first receiving unit 141 that outputs a received signal, the second reference light, and the second reflected light that is the light reflected by the object 20 as the second measurement light.
- a second receiving unit 142 that outputs a second receiving signal indicating the above is provided.
- the optical distance measuring device 100 measures and measures the intensity of each frequency component of the first reference light and the first reflected light based on the first received signal, and the first reference light and the measured one.
- the first signal information indicating the intensity of each frequency component of the first reflected light is output, and the intensity of each frequency component of the second reference light and the second reflected light is measured based on the second received signal.
- the frequency measuring unit 181 that outputs the second signal information indicating the intensity of each frequency component of the measured second reference light and the second reflected light, and the first signal information or the second signal information output by the frequency measuring unit 181 Based on this, a distance calculation unit 182 that calculates the distance from the transmission unit 110 to the object 20 and outputs distance information indicating the calculated distance from the transmission unit 110 to the object 20 is provided.
- the optical distance measuring device 100 can measure the distance with high accuracy while widening the range of distance measurement from the transmission unit 110 to the object 20.
- the frequency measuring unit 181 measures and measures the intensity of each frequency component of the first reference light and the first reflected light based on the signal obtained by synthesizing the first received signal and the second received signal. It is configured to output the first signal information indicating the intensity of each frequency component of the reference light and the first reflected light.
- the optical distance measuring device 100 can measure the distance from the transmitting unit 110 to the object 20 with higher accuracy.
- the measurement optical branching unit 104 branches by polarization-separating the measurement light output by the branching unit 103, and the measured light after branching is transferred to the first. 1.
- Output as the first polarization measurement light which is the measurement light and the second polarization measurement light which is the second measurement light, and the reference light branching unit 105 polarizes and separates the reference light output by the branching part 103.
- the reference light after branching is output as the first polarization reference light which is the first reference light and the second polarization reference light which is the second reference light.
- the frequency measuring unit 181 uses the polarization diversity method to obtain the first reference light and the first reflected light based on the first received signal or the second received signal. The intensity of each frequency component of the light is measured, and the first signal information indicating the intensity of the measured first reference light and the first reflected light for each frequency component is output.
- the optical distance measuring device 100 has increased resistance to fluctuations in the polarization ratio between the first polarization measurement light and the second polarization measurement light, and when the polarization ratio fluctuates, Also, the distance from the transmission unit 110 to the object 20 can be measured with higher accuracy.
- the optical distance measuring device 100 further includes a sweeping unit 102 in which the transmitting unit 110 sweeps the input laser light by wavelength and outputs the swept laser light as the sweeping light.
- the branching unit 103 branches the sweeping light output by the sweeping unit 102, outputs the sweeping light after branching as measurement light and reference light, and the first receiving unit 141 receives the first reference light and the first reflected light.
- the first light interference unit 151 that outputs the interference light after the first reference light and the first reflected light are interfered with each other as the first interference light, and the first light interference unit 151 that outputs the interference light.
- the first photoelectric conversion unit 161 that photoelectrically converts the interference light and outputs the first analog signal indicating the first interference light, and the first analog after A / D conversion by A / D conversion of the first analog signal. It has a first digital conversion unit 171 that outputs a signal as a first reception signal which is a digital signal, and a second reception unit 142 causes the second reference light and the second reflected light to interfere with each other to refer to the second reference.
- the second light interference unit 152 which outputs the interference light after the light and the second reflected light interfere with each other as the second interference light, and the second interference light output by the second light interference unit 152 are photoelectrically converted.
- the second photoelectric conversion unit 162 that outputs the second analog signal indicating the second interference light and the second analog signal that is A / D converted and the second analog signal after A / D conversion is a digital signal. It is configured to have a second digital conversion unit 172 that outputs as a received signal. With this configuration, the optical distance measuring device 100 can measure the distance with high accuracy while widening the range of distance measurement from the transmission unit 110 to the object 20.
- Embodiment 2 The light distance measuring device 100a according to the second embodiment will be described with reference to FIG. 7.
- the light distance measuring device 100a replaces the laser light source 101 and the sweep unit 102 in the light distance measuring device 100 according to the first embodiment with the laser light source 101a.
- the optical distance measuring device 100a includes a transmitting unit 110, a first receiving unit 141, a second receiving unit 142, a frequency measuring unit 181 and a distance calculating unit 182 in the optical distance measuring device 100 according to the first embodiment. It is replaced with 110a, a first receiving unit 141a, a second receiving unit 142a, a frequency measuring unit 181a, and a distance calculating unit 182a.
- FIG. 7 is a block diagram showing an example of the configuration of a main part of the light distance measuring device 100a according to the second embodiment.
- the optical distance measuring device 100a includes a laser light source 101a, a branching portion 103a, a measuring optical branching portion 104, a reference optical branching portion 105, a delay adjusting portion 106, a first optical circulator 121, a second optical circulator 122, and a first optical system 131.
- 2nd optical system 132 1st synthesis unit 153, 2nd synthesis unit 154, 1st spectroscopic unit 155, 2nd spectroscopic unit 156, 1st photoelectric conversion unit 161a, 2nd photoelectric conversion unit 162a, 1st digital conversion unit 171a
- a second digital conversion unit 172a, a frequency measurement unit 181a, a distance calculation unit 182a, and an information transmission unit 190 are provided.
- the same reference numerals are given to the same configurations as those of the light distance measuring device 100, and duplicate description will be omitted. That is, the description of the configuration of FIG. 7 having the same reference numerals as those shown in FIG. 1 will be omitted.
- the laser light source 101a emits laser light which is continuous light.
- the laser light source 101a is a light source that emits laser light having a plurality of frequencies configured by an ASE (Amplified Spontaneous Emission) light source or the like.
- the laser light source 101a is not an essential configuration in the light distance measuring device 100a according to the second embodiment.
- the light distance measuring device 100a may operate by receiving the laser light emitted by an external laser light generating device having a laser light source 101a.
- the branching portion 103a is composed of an optical coupler or the like, branches the input continuous wave laser light, and outputs the branched laser light as the measurement light and the reference light. More specifically, the branching portion 103a branches the laser light having a plurality of frequencies emitted by the laser light source 101a, and outputs the branched laser light as the measurement light and the reference light.
- the optical distance measuring device 100a includes a laser light source 101a, a branching portion 103a, a measuring optical branching portion 104, a reference optical branching portion 105, a delay adjusting portion 106, a first optical circulator 121, and a second optical circulator 122.
- the transmission unit 110a is composed of the first optical system 131 and the second optical system 132.
- the first synthesis unit 153 is composed of an optical coupler or the like, synthesizes the first reference light and the first reflected light, and outputs the synthesized first reference light and the first reflected light as the first synthesized light.
- the first spectroscopic unit 155 is composed of a diffraction grating or the like, spatially spectrally spectroscopically disperses the first synthetic light output by the first synthetic unit 153, and the first synthetic light after spectral spectroscopy is used as the first spectral spectral light. Irradiate.
- the first photoelectric conversion unit 161a has photoelectric elements arranged in an array, receives the first spectrum spectroscopic light emitted from the first spectroscopic unit 155, and outputs information indicating the intensity of the first synthetic light in an array.
- the first analog signal associated with the position of each photoelectric element arranged in is output.
- the first digital conversion unit 171a A / D-converts the first analog signal and outputs the first analog signal after the A / D conversion as a first reception signal which is a digital signal.
- the first receiving unit 141a is composed of the first combining unit 153, the first spectroscopic unit 155, the first photoelectric conversion unit 161a, and the first digital conversion unit 171a. There is. That is, the first receiving unit 141a receives the first reference light and the first reflected light which is the light reflected by the object 20 by the first measurement light, and exhibits the first reference light and the first reflected light. 1 Output the received signal.
- the second synthesis unit 154 is composed of an optical coupler or the like, synthesizes the second reference light and the second reflected light, and outputs the combined second reference light and the second reflected light as the second composite light.
- the second spectroscopic unit 156 is composed of a diffraction grating or the like, spatially spectroscopically disperses the second synthetic light output by the second synthetic unit 154, and uses the second synthetic light after spectral spectroscopy as the second spectral spectroscopic light. Irradiate.
- the second photoelectric conversion unit 162a has photoelectric elements arranged in an array, receives the second spectrum spectroscopic light emitted from the second spectroscopic unit 156, and receives information indicating the intensity of the second synthetic light in an array.
- a second analog signal associated with the position of each photoelectric element arranged in is output.
- the second digital conversion unit 172a A / D-converts the second analog signal and outputs the second analog signal after the A / D conversion as a second reception signal which is a digital signal.
- the second receiving unit 142a is configured by the second combining unit 154, the second spectroscopic unit 156, the second photoelectric conversion unit 162a, and the second digital conversion unit 172a. There is. That is, the second receiving unit 142a receives the second reference light and the second reflected light which is the light reflected by the object 20 by the second measurement light, and exhibits the second reference light and the second reflected light. 2 Output the received signal.
- the frequency measuring unit 181a measures the intensity of each frequency component of the first reference light and the first reflected light based on the first received signal. Further, the frequency measuring unit 181a outputs the first signal information indicating the intensity of each of the measured frequency components of the first reference light and the first reflected light. Further, the frequency measuring unit 181a measures the intensity of each frequency component of the second reference light and the second reflected light based on the second received signal. Further, the frequency measuring unit 181a outputs the second signal information indicating the intensity of each of the measured frequency components of the second reference light and the second reflected light.
- the frequency measuring unit 181a has information in which the frequency is associated with the positions of the photoelectric elements arranged in an array in the first photoelectric conversion unit 161a, and the array in the first received signal.
- the intensity of each frequency component of the first reference light and the first reflected light is measured based on the information indicating the intensity of the first synthetic light associated with the position of each photoelectric element arranged in. It is assumed that the information in which the frequency in the first photoelectric conversion unit 161a is associated with the position of each photoelectric element arranged in an array is known.
- the frequency measuring unit 181a is arranged in an array of information in the second received signal and information in which the frequency is associated with the positions of the photoelectric elements arranged in an array in the second photoelectric conversion unit 162a.
- the intensity of each frequency component of the second reference light and the second reflected light is measured based on the information indicating the intensity of the second synthetic light associated with the position of each photoelectric element. It is assumed that the information in which the frequency in the second photoelectric conversion unit 162a is associated with the position of each photoelectric element arranged in an array is known.
- the distance calculation unit 182a calculates the distance from the transmission unit 110a to the object 20 based on the first signal information or the second signal information output by the frequency measurement unit 181a. Further, the distance calculation unit 182a outputs distance information indicating the calculated distance from the transmission unit 110a to the object 20. More specifically, the distance calculation unit 182a is based on the first signal information or the second signal information by the same method as the optical interference tomography based on the spectrum domain method, which is a well-known technique, from the transmission unit 110a to the object 20 Calculate the distance to. Since the distance measurement method using the optical interference tomography method by the spectrum domain method is known, the description thereof will be omitted.
- the optical distance measuring device 100a branches the continuous wave laser light having a plurality of input frequencies, and branches the branched portion 103a that outputs the branched laser light as the measurement light and the reference light.
- the measurement light output by unit 103a is branched, and the measurement light branching unit 104 that outputs the measured light after branching as the first measurement light and the second measurement light and the reference light output by the branching unit 103a are branched.
- a first optical system having a reference light branching portion 105 that outputs the reference light after branching as the first reference light and the second reference light and a first Rayleigh length and irradiating the object 20 with the first measurement light.
- the object 20 has a second Rayleigh length different from that of the first Rayleigh length, and has a focal distance equal to the focal distance of the first optical system 131, and is used to irradiate the object 20 with the second measurement light.
- the second reference light receives the first receiving unit 141a that outputs the first receiving signal indicating the light, the second reference light, and the second reflected light that is the light reflected by the object 20 as the second measurement light.
- a second receiving unit 142a that outputs a second receiving signal indicating the second reflected light
- the first receiving unit 141a synthesizes the first reference light and the first reflected light, and the first after synthesis.
- the first synthesis unit 153 that outputs the reference light and the first reflected light as the first composite light and the first composite light output by the first synthesis unit 153 are spatially spectrally separated, and the first synthesis after spectral spectroscopy is performed.
- first spectroscopic unit 155 that irradiates light as a first spectral spectroscopic light, and photoelectric elements arranged in an array, and receives the first spectral spectroscopic light emitted from the first spectroscopic unit 155 and first synthesizes It has a first photoelectric conversion unit 161a that associates information indicating light intensity with positions of each photoelectric element arranged in an array and outputs it as a first reception signal, and a second reception unit 142a is a second.
- the second synthesis unit 154 that synthesizes the reference light and the second reflected light and outputs the combined second reference light and the second reflected light as the second composite light, and the second synthesis unit 154 that is output by the second synthesis unit 154.
- It has a second spectroscopic unit 156 that spatially spectrally disperses light and irradiates the second synthetic light after spectral spectroscopy as second spectral spectroscopic light, and photoelectric elements arranged in an array, and the second spectroscopic unit.
- the second photoelectric conversion that receives the second spectrum spectral light emitted from 156, associates the information indicating the intensity of the second synthetic light with the position of each photoelectric element arranged in an array, and outputs it as a second reception signal.
- Part 1 It was configured to have 62a and. With this configuration, the optical distance measuring device 100a can measure the distance with high accuracy while widening the range of distance measurement from the transmitting unit 110a to the object 20.
- any combination of the embodiments can be freely combined, any component of the embodiment can be modified, or any component can be omitted in each embodiment. ..
- the light distance measuring device according to the present invention can be applied to a processing device.
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Abstract
Description
干渉方式は、光源が出射した光を測定光と参照光とに分岐し、測定光が対象物上で反射した光である反射光と参照光とを干渉させ、反射光と参照光とが強め合う条件に基づいて、光源から対象物までの距離を測定するものである。
例えば、スペクトラムドメイン方式等の白色干渉方式は、広帯域の光を出射する光源を用いる。白色干渉方式は、光源が出射した広帯域の光を測定光と参照光とに分岐する。白色干渉方式は、分光器により空間的にスペクトル分光し、スペクトル分光した反射光と、スペクトル分光した参照光との干渉条件に基づいて、光源から対象物までの距離を測定する。
例えば、非特許文献1には、波長走査干渉方式による光距離測定装置を医療用途に適用した波長掃引型光干渉断層計(SS-OCT:Swept Source - Optical Coherence Tomography)が開示されている。
図1は、実施の形態1に係る光距離測定装置100の要部の構成の一例を示すブロック図である。
光距離測定装置100は、レーザ光源101、掃引部102、分岐部103、測定光分岐部104、参照光分岐部105、遅延調整部106、第1光サーキュレータ121、第2光サーキュレータ122、第1光学系131、第2光学系132、第1光干渉部151、第2光干渉部152、第1光電変換部161、第2光電変換部162、第1デジタル変換部171、第2デジタル変換部172、周波数測定部181、距離算出部182、及び情報送信部190を備える。
レーザ光源101は、実施の形態1に係る光距離測定装置100において、必須な構成ではない。例えば、光距離測定装置100は、レーザ光源101を有する外部のレーザ光発生装置が出射したレーザ光を受けて、動作するものであっても良い。
第1光学系131は、第1測定光を対象物20に照射する。具体的には、例えば、第1光学系131は、1個以上の透過レンズ、又は1個以上の反射レンズ等のレンズにより構成され、第1光学系131は、第1光サーキュレータ121が第1光学系131に導いた第1偏波測定光の光束径を広げ、光束径を広げた第1偏波測定光を対象物20に照射する。
第1光学系131は、第1レイリー長を有する。なお、レイリー長とは、レーザ光における光学系の集光特性を示す値の1つであり、光学系により集光されたレーザ光の径が、十分に小さいとみなせる、当該光学系から焦点に向かう方向の長さの範囲を示す値である。
第1光学系131は、対象物20に照射された第1偏波測定光が対象物20上で反射した光である第1反射光を第1光サーキュレータ121に導く。
第1光サーキュレータ121は、第1反射光を第1光干渉部151に導く。
第2光学系132は、第2測定光を対象物20に照射する。具体的には、例えば、第2光学系132は、1個以上の透過レンズ、又は1個以上の反射レンズ等のレンズにより構成され、第2光学系132は、第2光サーキュレータ122が第1光学系131に導いた第2偏波測定光の光束径を広げ、光束径を広げた第2偏波測定光を対象物20に照射する。
第2光学系132は、第1レイリー長と異なる第2レイリー長を有する。
第2光学系132は、第1光学系131が有する焦点距離と等しい焦点距離を有する。なお、等しい焦点距離は、正確に等しい焦点距離であることに限定されるものではなく、略等しい焦点距離を含むものである。
第2光学系132は、対象物20に照射された第2偏波測定光が対象物20上で反射した光である第2反射光を第2光サーキュレータ122に導く。
第2光サーキュレータ122は、第2反射光を第2光干渉部152に導く。
以下の説明において、第1偏波測定光の振動方向と、第1偏波参照光の振動方向とは同一であり、第2偏波測定光の振動方向と、第2偏波参照光の振動方向とは同一であるものとして説明する。
参照光分岐部105が出力した第2参照光は、第2光干渉部152に導かれる。
遅延調整部106は、分岐部103が出力した測定光と参照光との経路差を調整する。
第1光電変換部161は、第1光干渉部151が出力した第1干渉光を光電変換して、第1干渉光を示す第1アナログ信号を出力する。
第1デジタル変換部171は、第1アナログ信号をA/D変換して、A/D変換後の第1アナログ信号をデジタル信号である第1受信信号として出力する。
すなわち、第1受信部141は、第1参照光、及び、第1測定光が対象物20で反射した光である第1反射光を受けて、第1参照光及び第1反射光を示す第1受信信号を出力する。
第2光電変換部162は、第2光干渉部152が出力した第2干渉光を光電変換して、第2干渉光を示す第2アナログ信号を出力する。
第2デジタル変換部172は、第2アナログ信号をA/D変換して、A/D変換後の第2アナログ信号をデジタル信号である第2受信信号として出力する。
すなわち、第2受信部142は、第2参照光、及び、第2測定光が対象物20で反射した光である第2反射光を受けて、第2参照光及び第2反射光を示す第2受信信号を出力する。
更に、周波数測定部181は、第2受信信号に基づいて、第2参照光及び第2反射光の周波数成分毎の強度を測定する。また、周波数測定部181は、測定した第2参照光及び第2反射光の周波数成分毎の強度を示す第2信号情報を出力する。
より具体的には、例えば、周波数測定部181は、第1受信信号をフーリエ変換することにより、第1参照光及び第1反射光の周波数成分毎の強度を測定する。また、周波数測定部181は、第2受信信号をフーリエ変換することにより、第2参照光及び第2反射光の周波数成分毎の強度を測定する。
具体的には、例えば、距離算出部182は、偏波ダイバーシティ方式により、周波数測定部181が出力した第1信号情報又は第2信号情報に基づいて、送信部110から対象物20までの距離を算出する。また、距離算出部182は、距離算出部182が算出した送信部110から対象物20までの距離を示す距離情報を出力する。
距離算出部182は、周波数測定部181が出力した第1信号情報及び第2信号情報に基づいて、送信部110から対象物20までの距離を算出しても良い。
例えば、距離算出部182が算出する送信部110から対象物20までの距離が第1光サーキュレータ121から対象物20までの距離である場合、遅延調整部106は、測定光が分岐部103から出力されてから、測定光分岐部104を介して第1測定光ととなり、第1測定光が第1光サーキュレータ121を介して第1光学系131に向かって出力されるまでの経路長、及び、第1反射光が第1光サーキュレータ121に入力されてから第1光干渉部151に入力されるまで経路長の和と、参照光が分岐部103から出力されてから、第1光干渉部151に入力されるまで経路長との経路差を調整するものである。
なお、レーザ光源101と掃引部102との間、掃引部102と分岐部103との間、分岐部103と測定光分岐部104との間、分岐部103と遅延調整部106との間、及び、遅延調整部106と測定光分岐部104との間は、例えば、光ファイバにより接続され、レーザ光は、当該光ファイバを介して導かれる。また、測定光分岐部104と第1光サーキュレータ121との間、第1光サーキュレータ121と第1光干渉部151との間、測定光分岐部104と第2光サーキュレータ122との間、第2光サーキュレータ122と第2光干渉部152との間、測定光分岐部104と第1光干渉部151との間、及び、測定光分岐部104と第2光干渉部152との間は、例えば、偏波の振幅方向が保持される偏波保持ファイバである光ファイバにより接続され、偏波光であるレーザ光は、当該光ファイバを介して導かれる。
図2及び図3は、実施の形態1に係る光距離測定装置100が適用された加工装置10の一例を示す図である。
対象物20は、加工装置10が加工しようとする物体である。
チャック12は、対象物20を固定するための台座である。
加工ヘッド11は、対象物20を加工するための部位である。加工ヘッド11は、対象物20を加工する際に、対象物20に接触して加工するものであっても、対象物20に非接触の状態で加工するものであっても良い。
ヘッド移動制御部13は、光距離測定装置100が出力する距離情報を取得し、当該距離情報に基づいて、チャック12に対して加工ヘッド11を移動するための制御信号を生成する。ヘッド移動制御部13は、生成した制御信号をヘッド移動機構14に出力する。
ヘッド移動機構14は、ヘッド移動制御部13が出力する制御信号を受信し、当該制御信号に基づいて、チャック12に対して加工ヘッド11を移動させる。
チャック12及び加工ヘッド11は、図2に示すチャック12及び加工ヘッド11と同様であるため、説明を省略する。
チャック移動制御部15は、光距離測定装置100が出力する距離情報を取得し、当該距離情報に基づいて、加工ヘッド11に対してチャック12を移動するための制御信号を生成する。チャック移動制御部15は、生成した制御信号をチャック移動機構16に出力する。
チャック移動機構16は、チャック移動制御部15が出力する制御信号を受信し、当該制御信号に基づいて、加工ヘッド11に対してチャック12を移動させる。
図4Aは、実施の形態1に係る送信部110と対象物20との間の距離の一例を示す図である。
図4Aは、一例として、対象物20が、実施の形態1に係る送信部110からX1,X2,及びX3だけ離れた位置にあることを示している。
分岐部103に入力されるレーザ光が掃引光であるため、分岐部103から出力される参照光及び測定光、並びに、測定光が対象物20で反射した光である反射光は、掃引された光となる。すなわち、第1光干渉部151に入力される第1参照光及び第1反射光は、時間経過に対応して掃引光と同様に周波数が変化する。実施の形態1では、掃引光における単位時間当たりの周波数変化の値は既知であるものとする。
図4Cは、図4Bに示すある時点T1における第1受信信号に基づいて周波数測定部181が測定した第1干渉光の周波数スペクトルを示す図である。図4Cにおいて、横軸は周波数を、縦軸は第1干渉光の強度を示している。
図4Cにおいて、2個の周波数帯において第1干渉光の強度が強くなっている。図4Cにおいて、第1干渉光の強度が高くなっている2個の周波数帯のうち、高い周波数である周波数がFrの光が第1参照光であり、低い周波数帯である周波数がF2の光が第1反射光である。
周波数測定部181は、第1参照光の周波数がFrであり、第1反射光の周波数がF2であることを示す第1信号情報を生成して、当該第1信号情報を出力する。
距離算出部182は、算出した時間ΔT2に既知の光速を乗じて、更に1/2を乗ずることにより、送信部110から対象物20までの距離であるX2を算出する。
例えば、図4Aに示すように、送信部110と対象物20との間の距離が、X2より短いX1である場合、図4Dに示すように、第1参照光の周波数と第1反射光の周波数との差が小さくなる。この場合、距離算出部182が算出することより求められる、第1反射光が第1参照光に対して遅延する時間は、送信部110と対象物20との間の距離がX2における時間ΔT2より短くなる。
また、例えば、図4Aに示すように、送信部110と対象物20との間の距離が、X2より長いX3である場合、図4Dに示すように、第1参照光の周波数と第1反射光の周波数との差が大きくなる。この場合、距離算出部182が算出することより求められる、第1反射光が第1参照光に対して遅延する時間は、送信部110と対象物20との間の距離がX2における時間ΔT2より長くなる。
図5を参照して、第1光学系131又は第2光学系132を用いた際の距離算出部182が送信部110から対象物20までの距離を算出可能な範囲について説明する。
以下、一例として、第2光学系132が有する第2レイリー長が、第1光学系131が有する第1レイリー長より長いものとして説明する。
図5Aのとおり、距離算出部182が送信部110から対象物20までの距離を算出可能な範囲は、光学系が有するレイリー長が長くなるほど、広くなることが分かる。
すなわち、第2光学系132が有する第2レイリー長が、第1光学系131が有する第1レイリー長より長いため、距離算出部182が、第2受信部142が出力する第2受信信号に基づいて算出できる送信部110から対象物20までの距離の範囲は、第1受信部141が出力する第1受信信号に基づいて算出できる送信部110から対象物20までの距離の範囲と比較して広くなる。
レイリー長が長いほどスポット径は小さい。一般に、対象物20は、表面に表面粗さを有するため、測定光が対象物20で反射した反射光は、正反射成分だけではなく乱反射成分を有する。したがって、光学系に戻る反射光は、乱反射成分の比率が大きいほど減衰する。反射光の減衰量は、スポット径が大きいほど大きくなり、スポット径が小さいほど小さくなる。すなわち、反射波の強度は、レイリー長が長いほど弱くなり、レイリー長が短いほど強くなる。
図5Bのとおり、送信部110から対象物20までの距離が一定である場合、反射波の強度は、光学系が有するレイリー長が長くなるほど、弱くなることが分かる。
すなわち、第2光学系132が有する第2レイリー長が、第1光学系131が有する第1レイリー長より長いため、距離算出部182が、第2受信部142が出力する第2受信信号に含まれる第2反射波の強度は、第1受信部141が出力する第1受信信号に含まれる第1反射波の強度と比較して弱くなる。
図5Cのとおり、送信部110から対象物20までの距離が一定である場合、距離算出部182が算出する送信部110から対象物20までの距離に含まれる誤差は、反射波の強度が強くなるほど、小さくなることが分かる。
すなわち、第2受信部142が出力する第2受信信号に含まれる第2反射波の強度は、第1受信部141が出力する第1受信信号に含まれる第1反射波の強度と比較して弱いため、距離算出部182が、第2受信部142が出力する第2受信信号に基づいて算出する送信部110から対象物20までの距離に含まれる誤差は、第1受信部141が出力する第1受信信号に基づいて算出する送信部110から対象物20までの距離に含まれる誤差と比較して大きくなる。
次に、第2ステップとして、加工装置10は、光距離測定装置100から取得した大まかな送信部110から対象物20までの距離を示す距離情報に基づいて、加工ヘッド11又はチャック12を移動させて、大まかな位置合わせを行う。
次に、第3ステップとして、光距離測定装置100は、第1受信部141が出力した第1受信信号に基づいて、正確な送信部110から対象物20までの距離を算出する。
図6は、第1測定光及び第2測定光、並びに、第1測定光及び第2測定光が対象物20で反射した反射光である第1反射光及び第2反射光の経路の一例を示す図である。
対象物20における第1測定光及び第2測定光が照射される表面は、表面粗さを有する。
そのため、図6に示すように、第1測定光及び第2測定光が当該表面で反射した第1反射光及び第2反射光は、第1測定光及び第2測定光と同一経路に向かって反射する正反射成分だけでなく、広い角度に一様に広がって反射する乱反射成分を有する。したがって、第1光学系131に入射する反射光は、第1反射光による成分と、第2反射光のうち当該表面での乱反射した迷光による成分を有する。また、第2光学系132に入射する反射光は、第2反射光による成分と、第1反射光のうち当該表面での乱反射した迷光による成分を有する。
振動方向が異なる2つの偏波は、干渉しない。そのため、第1光学系131に入射した第2反射光のうち当該表面での乱反射した迷光による成分は、第1光干渉部151において第1反射光による成分と干渉しない。したがって、周波数測定部181は、第1反射光による成分に基づいて、正確に第1受信信号における第1測定光の周波数を測定することができる。また、同様に、第2光学系132に入射した第1反射光のうち当該表面での乱反射した迷光による成分は、第2光干渉部152において第2反射光による成分と干渉しない。したがって、周波数測定部181は、第2反射光による成分に基づいて、正確に第2受信信号における第2測定光の周波数を測定することができる。
より具体的には、例えば、周波数測定部181は、第1受信信号と第2受信信号とを合成した信号に基づいて、第1参照光及び第1反射光の周波数成分毎の強度を測定して、測定した第1参照光及び第1反射光の周波数成分毎の強度を示す第1信号情報を出力しても良い。距離算出部182は、周波数測定部181が出力した第1信号情報に基づいて、送信部110から対象物20までの距離を算出する。
このように構成することで、第3ステップにおいて、光距離測定装置100は、送信部110から対象物20までの距離をより正確に算出することができる。
例えば、第1偏波測定光と第2偏波測定光との間の偏波比率は、光距離測定装置100内の環境温度、光ファイバ内伝搬している際に生じる外乱、対象物20の材質、及び対象物20の表面の状態等により変動する。周波数測定部181が、一方の偏波のみにより生成した第1受信信号のみを用いて周波数を測定する場合、偏波比率が変動すると、振動方向が異なる2つの偏波は干渉しないため、第1受信部141における第1反射波の受信感度が低下する場合がある。
一方、2つの偏波の強度の合計は一定であるため、一方の偏波の強度が低下したとしても、もう一方の偏波の強度は、当該低下した分だけ上昇する。
このように構成することで、第3ステップにおいて、光距離測定装置100は、第1偏波測定光と第2偏波測定光との間の偏波比率の変動に対する耐力が増し、偏波比率が変動した場合においても、送信部110から対象物20までの距離をより正確に算出することができる。
このように構成することで、光距離測定装置100は、送信部110から対象物20までの距離測定の範囲を広くしつつ、高精度に当該距離を測定できる。
このように構成することで、光距離測定装置100は、送信部110から対象物20までの距離測定の範囲を広くしつつ、高精度に当該距離を測定できる。
このように構成することで、光距離測定装置100は、送信部110から対象物20までの距離を更に高精度に測定できる。
このように構成することで、光距離測定装置100は、送信部110から対象物20までの距離測定の範囲を広くしつつ、更に高精度に当該距離を測定できる。
このように構成することで、光距離測定装置100は、第1偏波測定光と第2偏波測定光との間の偏波比率の変動に対する耐力が増し、偏波比率が変動した場合においても、送信部110から対象物20までの距離を更に高精度に測定できる。
このように構成することで、光距離測定装置100は、送信部110から対象物20までの距離測定の範囲を広くしつつ、高精度に当該距離を測定できる。
図7を参照して、実施の形態2に係る光距離測定装置100aについて説明する。
光距離測定装置100aは、実施の形態1に係る光距離測定装置100におけるレーザ光源101と掃引部102とを、レーザ光源101aに置き換えたものである。また、光距離測定装置100aは、実施の形態1に係る光距離測定装置100における送信部110、第1受信部141、第2受信部142、周波数測定部181、及び距離算出部182を送信部110a、第1受信部141a、第2受信部142a、周波数測定部181a、及び距離算出部182aに置き換えたものである。
光距離測定装置100aは、レーザ光源101a、分岐部103a、測定光分岐部104、参照光分岐部105、遅延調整部106、第1光サーキュレータ121、第2光サーキュレータ122、第1光学系131、第2光学系132、第1合成部153、第2合成部154、第1分光部155、第2分光部156、第1光電変換部161a、第2光電変換部162a、第1デジタル変換部171a、第2デジタル変換部172a、周波数測定部181a、距離算出部182a、及び情報送信部190を備える。
光距離測定装置100aの構成において、光距離測定装置100と同様の構成については、同じ符号を付して重複した説明を省略する。すなわち、図1に記載した符号と同じ符号を付した図7の構成については、説明を省略する。
レーザ光源101aは、実施の形態2に係る光距離測定装置100aにおいて、必須な構成ではない。例えば、光距離測定装置100aは、レーザ光源101aを有する外部のレーザ光発生装置が出射したレーザ光を受けて、動作するものであっても良い。
第1分光部155は、回折格子等により構成され、第1合成部153が出力した第1合成光を空間的にスペクトル分光して、スペクトル分光後の第1合成光を第1スペクトル分光光として照射する。
第1光電変換部161aは、アレイ状に並べられた光電素子を有し、第1分光部155から照射された第1スペクトル分光光を受けて、第1合成光の強度を示す情報をアレイ状に並べられた光電素子毎の位置に対応付けた第1アナログ信号を出力する。
第1デジタル変換部171aは、第1アナログ信号をA/D変換して、A/D変換後の第1アナログ信号をデジタル信号である第1受信信号として出力する。
すなわち、第1受信部141aは、第1参照光、及び、第1測定光が対象物20で反射した光である第1反射光を受けて、第1参照光及び第1反射光を示す第1受信信号を出力する。
第2分光部156は、回折格子等により構成され、第2合成部154が出力した第2合成光を空間的にスペクトル分光して、スペクトル分光後の第2合成光を第2スペクトル分光光として照射する。
第2光電変換部162aは、アレイ状に並べられた光電素子を有し、第2分光部156から照射された第2スペクトル分光光を受けて、第2合成光の強度を示す情報をアレイ状に並べられた光電素子毎の位置に対応付けた第2アナログ信号を出力する。
第2デジタル変換部172aは、第2アナログ信号をA/D変換して、A/D変換後の第2アナログ信号をデジタル信号である第2受信信号として出力する。
すなわち、第2受信部142aは、第2参照光、及び、第2測定光が対象物20で反射した光である第2反射光を受けて、第2参照光及び第2反射光を示す第2受信信号を出力する。
更に、周波数測定部181aは、第2受信信号に基づいて、第2参照光及び第2反射光の周波数成分毎の強度を測定する。また、周波数測定部181aは、測定した第2参照光及び第2反射光の周波数成分毎の強度を示す第2信号情報を出力する。
より具体的には、距離算出部182aは、周知技術であるスペクトラムドメイン方式による光干渉断層計と同様の方法により、第1信号情報又は第2信号情報に基づいて、送信部110aから対象物20までの距離を算出する。スペクトラムドメイン方式による光干渉断層計による距離計測方法は公知であるため、説明を省略する。
このように構成することで、光距離測定装置100aは、送信部110aから対象物20までの距離測定の範囲を広くしつつ、高精度に当該距離を測定できる。
Claims (7)
- 入力された連続波のレーザ光を分岐して、分岐後の前記レーザ光を測定光及び参照光として出力する分岐部と、
前記分岐部が出力する前記測定光を分岐して、分岐後の前記測定光を第1測定光及び第2測定光として出力する測定光分岐部と、
前記分岐部が出力する前記参照光を分岐して、分岐後の前記参照光を第1参照光及び第2参照光として出力する参照光分岐部と、
第1レイリー長を有し、前記第1測定光を対象物に照射するための第1光学系と、
前記第1レイリー長と異なる第2レイリー長を有し、且つ、前記第1光学系が有する焦点距離と等しい焦点距離を有し、前記第2測定光を前記対象物に照射するための第2光学系と、
を有する送信部と、
前記第1参照光、及び、前記第1測定光が前記対象物で反射した光である第1反射光を受けて、前記第1参照光及び前記第1反射光を示す第1受信信号を出力する第1受信部と、
前記第2参照光、及び、前記第2測定光が前記対象物で反射した光である第2反射光を受けて、前記第2参照光及び前記第2反射光を示す第2受信信号を出力する第2受信部と、
を備えたこと
を特徴とする光距離測定装置。 - 前記第1受信信号に基づいて、前記第1参照光及び前記第1反射光の周波数成分毎の強度を測定し、測定した前記第1参照光及び前記第1反射光の周波数成分毎の強度を示す第1信号情報を出力し、且つ、前記第2受信信号に基づいて、前記第2参照光及び前記第2反射光の周波数成分毎の強度を測定して、測定した前記第2参照光及び前記第2反射光の周波数成分毎の強度を示す第2信号情報を出力する周波数測定部と、
前記周波数測定部が出力した、前記第1信号情報又は前記第2信号情報に基づいて、前記送信部から前記対象物までの距離を算出し、算出した前記送信部から前記対象物までの距離を示す距離情報を出力する距離算出部と、
を有すること
を特徴とする請求項1記載の光距離測定装置。 - 前記周波数測定部は、前記第1受信信号と前記第2受信信号とを合成した信号に基づいて、前記第1参照光及び前記第1反射光の周波数成分毎の強度を測定して、測定した前記第1参照光及び前記第1反射光の周波数成分毎の強度を示す第1信号情報を出力すること
を特徴とする請求項2記載の光距離測定装置。 - 前記測定光分岐部は、前記分岐部が出力する前記測定光を偏波分離することにより分岐して、分岐後の前記測定光を、前記第1測定光である第1偏波測定光、及び前記第2測定光である第2偏波測定光として出力し、
前記参照光分岐部は、前記分岐部が出力する前記参照光を偏波分離することにより分岐して、分岐後の前記参照光を、前記第1参照光である第1偏波参照光、及び前記第2参照光である第2偏波参照光として出力すること
を特徴とする請求項2記載の光距離測定装置。 - 前記周波数測定部は、偏波ダイバーシティ方式により、前記第1受信信号又は前記第2受信信号に基づいて、前記第1参照光及び前記第1反射光の周波数成分毎の強度を測定して、測定した前記第1参照光及び前記第1反射光の周波数成分毎の強度を示す第1信号情報を出力すること
を特徴とする請求項4記載の光距離測定装置。 - 前記送信部は、
入力された前記レーザ光を波長掃引して、掃引後の前記レーザ光を掃引光として出力する掃引部を有し、
前記分岐部は、前記掃引部が出力する前記掃引光を分岐して、分岐後の前記掃引光を前記測定光及び前記参照光として出力し、
前記第1受信部は、
前記第1参照光と前記第1反射光とを干渉させて、前記第1参照光と前記第1反射光とを干渉させた後の干渉光を第1干渉光として出力する第1光干渉部と、
前記第1光干渉部が出力した前記第1干渉光を光電変換して、前記第1干渉光を示す第1アナログ信号を出力する第1光電変換部と、
前記第1アナログ信号をA/D変換して、A/D変換後の前記第1アナログ信号をデジタル信号である前記第1受信信号として出力する第1デジタル変換部と、
を有し、
前記第2受信部は、
前記第2参照光と前記第2反射光とを干渉させて、前記第2参照光と前記第2反射光とを干渉させた後の干渉光を第2干渉光として出力する第2光干渉部と、
前記第2光干渉部が出力した前記第2干渉光を光電変換して、前記第2干渉光を示す第2アナログ信号を出力する第2光電変換部と、
前記第2アナログ信号をA/D変換して、A/D変換後の前記第2アナログ信号をデジタル信号である前記第2受信信号として出力する第2デジタル変換部と、
を有すること
を特徴とする請求項1から請求項5のいずれか1項記載の光距離測定装置。 - 前記分岐部が分岐する前記レーザ光は、複数の周波数を有する前記レーザ光であって、
前記第1受信部は、
前記第1参照光及び前記第1反射光を合成して、合成後の前記第1参照光及び前記第1反射光を第1合成光として出力する第1合成部と、
前記第1合成部が出力した前記第1合成光を空間的にスペクトル分光して、スペクトル分光後の前記第1合成光を第1スペクトル分光光として照射する第1分光部と、
アレイ状に並べられた光電素子を有し、前記第1分光部から照射された前記第1スペクトル分光光を受けて、前記第1合成光の強度を示す情報を前記アレイ状に並べられた前記光電素子毎の位置に対応付けて前記第1受信信号として出力する第1光電変換部と、
を有し、
前記第2受信部は、
前記第2参照光及び前記第2反射光を合成して、合成後の前記第2参照光及び前記第2反射光を第2合成光として出力する第2合成部と、
前記第2合成部が出力した前記第2合成光を空間的にスペクトル分光して、スペクトル分光後の前記第2合成光を第2スペクトル分光光として照射する第2分光部と、
アレイ状に並べられた光電素子を有し、前記第2分光部から照射された前記第2スペクトル分光光を受けて、前記第2合成光の強度を示す情報を前記アレイ状に並べられた前記光電素子毎の位置に対応付けて前記第2受信信号として出力する第2光電変換部と、
を有すること
を特徴とする請求項1から請求項5のいずれか1項記載の光距離測定装置。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009008421A (ja) * | 2007-06-26 | 2009-01-15 | Kobe Steel Ltd | 形状測定装置 |
JP2015148488A (ja) * | 2014-02-05 | 2015-08-20 | 株式会社東京精密 | 距離測定装置、及び距離測定方法 |
JP2015155865A (ja) * | 2014-02-21 | 2015-08-27 | 株式会社ミツトヨ | 斜入射干渉計 |
JP2016057197A (ja) * | 2014-09-10 | 2016-04-21 | 株式会社トーメーコーポレーション | 光断層画像撮影装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5489984A (en) | 1994-04-01 | 1996-02-06 | Imra America, Inc. | Differential ranging measurement system and method utilizing ultrashort pulses |
US7139446B2 (en) | 2005-02-17 | 2006-11-21 | Metris Usa Inc. | Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar |
WO2010030884A2 (en) | 2008-09-11 | 2010-03-18 | Metris Usa, Inc. | Compact fiber optic geometry for a counter chirp fmcw coherent laser radar |
DE102010016862B3 (de) * | 2010-05-10 | 2011-09-22 | Precitec Optronik Gmbh | Materialbearbeitungsvorrichtung mit in-situ Messen des Bearbeitungsabstands |
US9784840B2 (en) * | 2012-03-23 | 2017-10-10 | Windar Photonics A/S | Multiple directional LIDAR system |
CN105814451A (zh) | 2013-12-10 | 2016-07-27 | 三菱电机株式会社 | 激光雷达装置 |
US10066081B2 (en) | 2013-12-13 | 2018-09-04 | Mitsui Chemicals, Inc. | Polymerizable composition for optical materials |
KR102497704B1 (ko) * | 2014-12-09 | 2023-02-09 | 바스프 에스이 | 광 검출기 |
CN108027312B (zh) * | 2015-07-30 | 2020-08-04 | 通快光电器件有限公司 | 用于颗粒尺寸检测的激光传感器 |
JP2019052981A (ja) * | 2017-09-15 | 2019-04-04 | 株式会社東芝 | 距離計測装置 |
-
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009008421A (ja) * | 2007-06-26 | 2009-01-15 | Kobe Steel Ltd | 形状測定装置 |
JP2015148488A (ja) * | 2014-02-05 | 2015-08-20 | 株式会社東京精密 | 距離測定装置、及び距離測定方法 |
JP2015155865A (ja) * | 2014-02-21 | 2015-08-27 | 株式会社ミツトヨ | 斜入射干渉計 |
JP2016057197A (ja) * | 2014-09-10 | 2016-04-21 | 株式会社トーメーコーポレーション | 光断層画像撮影装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220125431A (ko) * | 2021-03-05 | 2022-09-14 | 부산대학교 산학협력단 | 복수개의 광주파수 도약스캔 레이저를 이용한 광간섭 거리측정 시스템 및 방법 |
KR102571110B1 (ko) | 2021-03-05 | 2023-08-25 | 부산대학교 산학협력단 | 복수개의 광주파수 도약스캔 레이저를 이용한 광간섭 거리측정 시스템 및 방법 |
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