WO2020181620A1 - High-precision large-format stereoscopic projection 3d printing system and printing method therefor - Google Patents

High-precision large-format stereoscopic projection 3d printing system and printing method therefor Download PDF

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WO2020181620A1
WO2020181620A1 PCT/CN2019/083761 CN2019083761W WO2020181620A1 WO 2020181620 A1 WO2020181620 A1 WO 2020181620A1 CN 2019083761 W CN2019083761 W CN 2019083761W WO 2020181620 A1 WO2020181620 A1 WO 2020181620A1
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film
printing
resin
layer
sample stage
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PCT/CN2019/083761
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French (fr)
Chinese (zh)
Inventor
夏春光
方雷
郭再勋
何贺敬
付良康
罗刚
蔡俊林
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无锡摩方精密科技有限公司
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Publication of WO2020181620A1 publication Critical patent/WO2020181620A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor

Definitions

  • the invention belongs to the technical field of 3D printing, and specifically relates to a high-precision large-format stereo projection 3D printing system and a printing method thereof.
  • Stereolithography (printing) first appeared as a rapid prototyping technology. Rapid prototyping technology or 3D printing technology refers to a series of technologies that directly generate full-scale samples from computer models. They are much faster than traditional mechanical cutting. Since Chuck Hull invented stereo lithography in 1986, it has played its role in many fields economically and quickly, such as visualization of complex components, error detection of initial design, verification of design functions of important initial components, and theoretical design verification. In the past few decades, people's investment in micro-electromechanical systems (MEMS) has led to the emergence of micro-scale stereo lithography, which inherits the basic principles of traditional stereo lithography, but can achieve micro-scale precision.
  • MEMS micro-electromechanical systems
  • the resin curing technology based on single-photon and two-photon can even reach an accuracy of 200 nanometers.
  • these technologies are based on serial sequential scanning of laser spots on the resin surface or inside, which greatly affects the printing speed and cost-effectiveness.
  • micro display devices such as micro liquid crystal displays (LCD) and Texas Instruments’ digital light processor (DLP).
  • LCD micro liquid crystal displays
  • DLP digital light processor
  • the picture is imaged by photo-mechanical imaging and projected onto the photosensitive resin liquid surface to be cured, and the model design generated by the computer is copied through multi-layer superposition.
  • Each microdisplay chip has a certain size, such as the currently popular high-definition resolution 1920X1080.
  • the present invention provides a high-precision large-format stereo projection 3D printing system and a printing method thereof.
  • a DLP-based micro-stereolithography system design is provided to solve high-precision 3D printing at the same time. And meet the needs of large format.
  • This technology has a wide range of applications, from structural engineering, material engineering, to biological and medical engineering; from the macro-optical scale (above the centimeter level) to the micro-scale (under the millimeter).
  • a high-precision large-format stereo projection 3D printing system including a DLP optical engine with a light source, a projection lens and a resin tank;
  • the light path projected by the DLP optical engine is reflected and projected by the thin-film beam splitter into the projection lens, and the projection lens is projected onto the interface between the thin film and the resin in the resin tank;
  • a laser displacement meter is provided on one side of the projection lens
  • An image controller is also provided on one side of the thin-film beam splitter, and the monitoring optical path of the image controller coincides with the projection optical path reflected by the thin-film beam splitter;
  • the sample stage is located in the resin tank, the resin tank is also provided with a film, and also includes a movement control system.
  • the movement control system controls the resin tank and the sample stage to move in the horizontal XY plane, controls the height of the sample stage, and controls Height movement of resin tank and film height;
  • the resin tank is also provided with a film clamp and a bubble scraper;
  • the film clamp includes a hollow lower clamp and a middle short tubular upper clamp; the film is fixed on the lower clamp of the film clamp, and the upper clamp Press down to form a downwardly convex membrane surface, the outer side of the membrane surface is located below the liquid surface of the resin;
  • the film is located directly below the projection lens in the direction of gravity. This helps to collect air bubbles during the printing process.
  • a bubble scraper is provided under the film; the blade of the bubble scraper is a smooth cylindrical surface, which is supported by a spring and installed on the scraper body, and the blade contacts the film elastically; the movement control system controls the movement of the scraper.
  • a high-precision large-format stereo projection 3D printing method includes the following steps:
  • the three-dimensional geometric model will be further sliced into two-dimensional pictures in one direction, each picture represents a thin layer in the three-dimensional model, and the slice direction of the model is printed by the printer direction;
  • the resulting series of pictures will be read by the printing system and projected to the interface between the film and the resin; within a certain period of time, where there is light, a cured layer of a certain thickness will be produced, which represents the corresponding model in the projected picture. layer;
  • the sample stage and sample will drop by 1-2 mm and separate from the film;
  • the less-returned distance is the thickness of the next layer.
  • the gap between the printed sample and the film is filled with the resin layer needed to print the next layer; the exposure is repeated successively, as the sample stage moves layer by layer Down, the model is copied in the resin tank.
  • the stitching printing mode is adopted; the picture representing the first layer of the model is cut into multiple sub-pictures less than a single DLP resolution. For each layer in the model, multiple exposures Finish, project all sub-pictures of the current layer in turn.
  • the present invention provides a high-precision large-format stereo projection 3D printing system and a printing method thereof, which provide a high-precision, large-format processing capability, which is useful in the fields of microelectromechanical (MEMS), biomedical, industrial connectors and Other developments in the field of micromachining provide an advanced and precise approach.
  • MEMS microelectromechanical
  • Figure 1 is a schematic diagram of the system structure of the present invention
  • FIG. 2 is a schematic diagram of the structure of the film clamp of the present invention.
  • FIG. 3 is a schematic diagram of the structure of the bubble scraper of the present invention.
  • Figure 5 is a schematic diagram of error stitching in stitching printing mode; where A, single exposure format; B, accurate stitching in the x direction, C, error stitching in the x direction; B', accurate stitching in the y direction, and C', error stitching in the y direction ;
  • Figure 6 is a schematic diagram of three printing modes
  • Fig. 7 shows the vertical adjustment steps of the sample stage and the optical axis of the present invention.
  • a high-precision large-format stereoscopic projection 3D printing system includes a DLP light engine 1 with a light source, a projection lens 4 and a resin tank 8;
  • the light path projected by the DLP optical engine 1 is reflected and projected by the film splitter 3 into the projection lens 4, and the projection lens 4 is projected onto the interface between the film 7 and the resin in the resin tank 8;
  • the thin-film beam splitter 3 can also be a millimeter-thick splitter lens made of glass. However, for the wavelength of light used, one side of the lens should be coated with a reflective film and the other side with an antireflection coating to eliminate ghosting.
  • a laser displacement meter 5 is provided on one side of the projection lens 4;
  • An image controller 2 is also provided on one side of the thin-film beam splitter 3, and the monitoring light path of the image controller 2 coincides with the projection light path reflected by the thin-film beam splitter 3;
  • the sample stage 9 is located in the resin tank 8.
  • the resin tank 8 is also provided with a film 7, and also includes a movement control system.
  • the movement control system controls the resin tank 8 and the sample stage 9 to move in the horizontal XY plane, and controls The height movement of the sample stage 9 controls the height movement of the resin tank 8 and the film 7;
  • the resin tank 8 is also provided with a film clamp 10 and a bubble scraper 6;
  • the film clamp 10 includes a hollow lower clamp and a middle short tubular upper clamp;
  • the film 7 is fixed on the lower clamp of the film clamp 10 , Forming a downwardly convex film surface under the squeeze of the upper clamp, and the outer surface of the film surface is located below the liquid surface of the resin;
  • the film 7 is located directly under the direction of gravity of the projection lens 4. This helps to collect air bubbles during the printing process.
  • a bubble scraper 6 is provided under the film 7; the blade 61 of the bubble scraper 6 is a smooth cylindrical surface, supported by a spring 62 and installed on the scraper body, and the blade 61 is in elastic contact with the film 7; the movement control system Control the movement of the scraper.
  • the display of the printed image is DLP of Texas Instruments, or it can be a reflective LCD screen LCOS.
  • LCOS is considered to have better image brightness and contrast than traditional transmissive LCD screens.
  • Each pixel of it will adjust the reflected light according to the applied voltage. The polarization state. Therefore, adding a polarizer to the optical path allows the reflected light of the corresponding polarized pixel to pass through to form an image.
  • Texas Instruments invented the DLP technology in 1987, which is different from the principle of changing the polarization state of the reflected light on the LCD screen.
  • Each pixel in the DLP is a tiny mirror. It controls the whereabouts of the reflected light by deflecting the micro-mirror.
  • Each lens can be deflected by ⁇ 10o.
  • Bright pixels are reflected light entering the lens, and the opposite are dark pixels.
  • the gray scale of the image is controlled by the frequency of lens deflection.
  • DLP chips have better UV compatibility and higher contrast than liquid crystal chips.
  • the resolution of the DLP chip used in this embodiment is 1920X1080, and chips with higher resolution can also be applied.
  • the size of each micro lens is 7.6umX7.6um, and the wavelength of the light source used is 405 nm.
  • the monitoring camera 2 is applied in the printing light path.
  • the image When the printed image on the DLP chip is projected on the interface between the film 7 and the resin, the image must be clear and the contrast must be strong, for example, greater than 5:1. This requires the interface to be on the optical focal plane of the projection lens 4.
  • the focal depth of the projection lens 4 is between tens of microns to one or two hundred microns. Such a size is difficult to guarantee for the mechanical assembly of multiple parts. Therefore, after hardware assembly, it is necessary to use the image analysis function of the surveillance camera and control the corresponding motion axis to make the interface on the focal plane.
  • the pixel size of the camera is generally required to be smaller than the pixel size of the DLP.
  • the 2 pixel size of the surveillance camera used in the system is 5 microns.
  • This camera is not only a focusing function, for a lens with a focal depth of tens of microns, it can be used to adjust the verticality of the sample stage 9 and the film 7 relative to the optical axis of the lens.
  • the optical path part includes the DLP optical engine 1 commercialized on the market, which includes a light source.
  • the projection light path and the monitoring light path overlap, so the thin film beam splitter 3 is used.
  • a 5 micron thin film beam splitter is used Mirror 3, the reflection and transmission ratio is around 95:5.
  • the beam splitter and beam splitter cube of other materials are also available.
  • the selection of the projection lens 4 needs to meet the following conditions at the working wavelength: 1.
  • the aperture should be large enough to ensure the clarity and uniformity of the DLP image,> 90%: 2.
  • the pixel size of the DLP on the image plane is the size required by the design , Such as 2 microns or 10 microns; 3.
  • the image reflected from the interface between the film and the resin on the surveillance camera through the lens needs to be complete and uniform.
  • the system installs a high-precision laser displacement meter 5 in parallel beside the lens.
  • a laser displacement meter 5 from Keyence was used, and its accuracy reached 1 micron.
  • other types of displacement meters are also feasible, such as ultrasonic displacement meters.
  • the displacement meter is parallel to the optical axis of the projection lens 4, so the surface perpendicular to the displacement meter probe is related to the perpendicular to the optical axis.
  • the displacement meter selects at least three points that are not on a line on a surface, usually three points forming a right triangle.
  • the displacement meter accurately measures the distance from the point to the displacement meter. If the distance from the point to the displacement meter is different, then this The surface is not perpendicular to the displacement gauge and the optical axis. For this reason, the horizontal mechanism of the plane can be adjusted to make all the points have the same distance from the displacement meter.
  • Such three points define the plane perpendicular to the displacement meter and the optical axis. Accurate recording of this verticality and position is essential to control the accuracy of the printing direction.
  • the resin tank 8 includes a film 7, a film holder 10, a bubble doctor 6, and an immersion type sample stage 9.
  • the film clamp 10 includes a hollow lower clamp and a middle short tubular upper clamp; the film 7 is fixed on the lower clamp of the film clamp 10 to form a downwardly convex film surface under the extrusion of the upper clamp, The outer side of the film surface is located below the liquid surface of the resin.
  • the film clamp 10 has a thickness of 5 mm, and the entire film clamp 10 is immersed in resin 1 to 2 mm to ensure that the lower surface of the film 7 and the resin are completely wetted, while the upper surface is kept dry.
  • the use of the film 7 is mainly to use the deformation of the film to reduce the force that the sample bears when moving up and down in the resin, so as to ensure the integrity of the fine structure; at the same time, the strong tension of the film 7 is used to define the thickness of each layer of resin during printing. Reduce printing time.
  • the film 7 fixed on the hollow lower clamp is pushed through the middle short tubular upper clamp, so that the film 7 is stretched by 20-30%.
  • the material of the film 7 here can be polydimethylsiloxane PDMS, PFA or other transparent plastics, with a thickness ranging from 25 microns to 100 microns.
  • rigid windows with weak adhesion to the cured resin can also be used, such as spraying transparent PDMS on the glass surface or adding a layer of transparent PFA plastic film.
  • Gases will inevitably dissolve during resin preparation and printing. These gases will generate fine bubbles due to the interaction of the movement of the resin and the film during the printing process and the heat generated during the light curing process. These fine bubbles will gradually Combine each other to form millimeter-level bubbles. These bubbles are wrapped in the film at the junction of the resin and the film 7, which will cause the defects of the final printed sample.
  • the equipment frame is projected from the upper part of the gravity direction onto the lower film 7, which makes the air bubbles Due to the buoyancy, it is concentrated under the film 7, and a specially designed bubble scraper 6 is introduced under the film 7, as shown in FIG. 3.
  • the blade 61 of the bubble scraper 6 is blunt and has a smooth cylindrical surface with a radius of 1.5 mm and a length covering the largest printing format.
  • the blade 61 is supported by a spring 62 on the scraper body, so that the blade 61 is in elastic contact with the film 7 or the hard window during scraping, without causing surface damage.
  • a temperature control unit can be added to the resin tank 8.
  • the temperature of the resin tank 8 can be adjusted from room temperature to 100 degrees Celsius.
  • the movement control system of the invention has a total of 5 movement axes, as shown in Figure 1.
  • the two axes control the resin tank 8 and the sample stage 9 to move simultaneously in the XY plane, the Z1 axis that controls the height of the sample stage 9 and the resin tank 8 and the film 7
  • the accuracy of other axis motion control is much higher than the optical accuracy. For example, for the optical accuracy of 10 microns, select the axis control accuracy of 1 micron; 2 Optical accuracy of micron, select the axis control accuracy of 0.5 micron.
  • the three-dimensional geometric model will be further sliced into two-dimensional pictures in one direction, generally black and white, with grayscale. Each picture represents a thin layer in the 3D model.
  • the slicing direction of the model will be the printing direction of the printer.
  • the resulting series of pictures will be read by the printer and projected onto the interface between the film 7 and the resin.
  • a certain thickness of cured layer will be produced where there is light in a certain period of time, which represents the corresponding layer in the model represented by the projected picture.
  • the thickness of the next layer should be reduced, so that the gap between the sample and the film 7 is filled with the resin layer required to print the next layer, as shown in Figure 4.
  • the exposure is repeated successively, and as the sample stage 9 descends layer by layer, the model is replicated in the resin tank 8.
  • a splicing printing mode is proposed.
  • the image representing the first layer of the model will be further sliced into multiple images smaller than a single DLP resolution. For example, a 3800X2000 pixel image can be divided into four 1900X1000 sub-images, and each sub-image will represent A quarter of the area on the first floor.
  • each layer in the model it will be completed through multiple exposures, projecting all the sub-pictures of the current layer in turn.
  • a certain amount of overlap is usually given, usually 10-30 microns.
  • the position and overlap of the exposure of each area are precisely controlled by the XY axis combination.
  • There are two coordinate systems in the system one is the DLP/LCD vertical coordinate system, and the other is a motion coordinate system composed of XY axes. If the two coordinate systems are not completely parallel due to mechanical assembly errors, there will be misalignment errors in adjacent areas during stitching printing, as shown in Figure 5. For this reason, the measured error will be compensated in the stitching printing mode.
  • the compensation amount in the X and Y directions can be different, and the compensation amount in different areas is also different, but it is often linear. Due to the existence of the X and Y axes, for samples with a smaller print format than the DLP chip, multiple identical samples can be printed repeatedly in the entire format, which can increase the speed of mass production. There are three printing modes as shown in Figure 6. Of course, for samples that require splicing mode, if the format is small enough, multiple samples can be printed at one time, but it is generally processed as splicing printing.
  • auxiliary optical equipment is required for 3D printing equipment where the focal depth of the projection lens 4 is greater than the accuracy requirements, such as 10 micron and 50 micron optical precision equipment.
  • Keyence's laser displacement meter 5 is selected, which can reach 1 micron Measurement accuracy.
  • the system status of the printer needs to be readjusted due to human misoperation or hardware updates. There are two main adjustments. One is the perpendicularity of the film/hard window and the sample stage 9 to the optical axis of the projection lens 4. If both surfaces are perpendicular to the optical axis, they are parallel to each other; the other is the film/hard window.
  • sample stage 9 After the sample stage 9 is adjusted to be vertical, use the feedback of the monitoring camera to move the sample stage 9 to the focal plane of the projection lens 4, and record the position of the displacement meter and the 9-axis Z1 of the sample stage, which is the starting position of printing.

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Abstract

The present invention belongs to the technical field of 3D printing, and specifically relates to a high-precision large-format stereoscopic projection 3D printing system and a printing method therefor. A light path projected by a DLP optical projector is reflected and projected by a thin film light splitter to enter a projection lens, and the projection lens projects the light path to an interfacial surface of a thin film and resin in a resin tank; a laser displacement meter is arranged at one side of the projection lens; an image controller is arranged at one side of the thin film light splitter, and a monitoring light path of the image controller coincides with the projected light path reflected by the thin film light splitter; and a sample stage is located in the resin tank, a thin film is also arranged in the resin tank, and a movement control system controls the resin tank, the sample stage and the thin film to move. A three-dimensional geometric model is segmented into two-dimensional pictures, the pictures are read by the printing system in sequence and are projected to the interfacial surface of the thin film and the resin, a curing layer is formed through exposure, and the sample stage descends and is separated from the thin film; and repeated exposure is carried out in sequence. By means of the present invention, a high-precision large-format machining capacity is achieved, and an advanced precise cutting-in means is provided for the field of micro-machining.

Description

一种高精度大幅面立体投影3D打印***及其打印方法High-precision large-format stereo projection 3D printing system and printing method thereof 技术领域Technical field
本发明属于3D打印技术领域，具体涉及一种高精度大幅面立体投影3D打印***及其打印方法。The invention belongs to the technical field of 3D printing, and specifically relates to a high-precision large-format stereo projection 3D printing system and a printing method thereof.
背景技术Background technique
立体光刻(打印)最早是以一种快速成型技术出现。快速成型技术或者3D打印技术指的是一系列从计算机模型上直接生成全尺度样件的技术，他们比传统的机械切削加工要快很多。自从Chuck Hull在1986年发明立体光刻以来，它已经在诸多领域经济快速的发挥它的作用，比如复杂部件的可视化，初始设计的错误检测，验证重要初始部件的设计功能，检验理论设计等。在过去的几十年中随着人们在微机电***(MEMS)的投入，促成了微尺度立体光刻出现，它继承了传统立体光刻的基本原理，但是可达到微米尺度的精度。基于单光子和双光子的树脂固化技术甚至可以达到200纳米的精度。但是这些技术都是基于激光斑在树脂液面或里面串联顺序扫描，很大程度上影响了打印速度和成本经济性。这也促成了投影式微立体光刻技术的出现，这项技术的核心来自于微显示器件的出现比如微液晶显示器(LCD)和德州仪器的数字光处理器(DLP)，3D打印机将微显示器上的图片通过光机成像并投影到感光的树脂液面上而固化，并通过多层的叠加复制电脑产生的模型设计。每种微显示芯片都有一定的大小，比如目前流行的高清分辨率1920X1080，如果每个像素成像大小是10微米X10微米，那么它一次投影覆盖的面积最大是19.2毫米X10.8毫米。对于其他倍率光机，投影的面积也是相应的缩放。因此高精度和大幅面是对矛盾的因数。Stereolithography (printing) first appeared as a rapid prototyping technology. Rapid prototyping technology or 3D printing technology refers to a series of technologies that directly generate full-scale samples from computer models. They are much faster than traditional mechanical cutting. Since Chuck Hull invented stereo lithography in 1986, it has played its role in many fields economically and quickly, such as visualization of complex components, error detection of initial design, verification of design functions of important initial components, and theoretical design verification. In the past few decades, people's investment in micro-electromechanical systems (MEMS) has led to the emergence of micro-scale stereo lithography, which inherits the basic principles of traditional stereo lithography, but can achieve micro-scale precision. The resin curing technology based on single-photon and two-photon can even reach an accuracy of 200 nanometers. However, these technologies are based on serial sequential scanning of laser spots on the resin surface or inside, which greatly affects the printing speed and cost-effectiveness. This has also led to the emergence of projection micro-stereolithography technology. The core of this technology comes from the emergence of micro display devices such as micro liquid crystal displays (LCD) and Texas Instruments’ digital light processor (DLP). The picture is imaged by photo-mechanical imaging and projected onto the photosensitive resin liquid surface to be cured, and the model design generated by the computer is copied through multi-layer superposition. Each microdisplay chip has a certain size, such as the currently popular high-definition resolution 1920X1080. If the image size of each pixel is 10 microns X 10 microns, the largest area covered by one projection is 19.2 mm X 10.8 mm. For other magnification machines, the projected area is also scaled accordingly. Therefore, high precision and large format are factors of contradiction.
发明概述Summary of the invention
技术问题technical problem
问题的解决方案The solution to the problem
技术解决方案Technical solutions
针对上述技术问题，本发明提供一种一种高精度大幅面立体投影3D打印***及 其打印方法，在本发明中提供一种基于DLP的微立体光刻***设计来解决高精度3D打印的同时又满足大幅面的需求。这种技术存在广泛的应用，从结构工程，材料工程，到生物和医疗工程；从宏光尺度(厘米量级以上)到微观尺度(毫米以下)。In view of the above technical problems, the present invention provides a high-precision large-format stereo projection 3D printing system and a printing method thereof. In the present invention, a DLP-based micro-stereolithography system design is provided to solve high-precision 3D printing at the same time. And meet the needs of large format. This technology has a wide range of applications, from structural engineering, material engineering, to biological and medical engineering; from the macro-optical scale (above the centimeter level) to the micro-scale (under the millimeter).
具体技术方案为：The specific technical solutions are:
一种高精度大幅面立体投影3D打印***，包括带有光源的DLP光机，还包括投影镜头、树脂槽；A high-precision large-format stereo projection 3D printing system, including a DLP optical engine with a light source, a projection lens and a resin tank;
DLP光机投出的光路经过薄膜分光镜反射投影进入投影镜头，所述的投影镜头投影到薄膜和树脂槽内树脂的交界面；The light path projected by the DLP optical engine is reflected and projected by the thin-film beam splitter into the projection lens, and the projection lens is projected onto the interface between the thin film and the resin in the resin tank;
所述的投影镜头一侧设有激光位移计；A laser displacement meter is provided on one side of the projection lens;
所述的薄膜分光镜一侧还设有图像控制器，所述的图像控制器的监控光路与薄膜分光镜反射的投影光路重合；An image controller is also provided on one side of the thin-film beam splitter, and the monitoring optical path of the image controller coincides with the projection optical path reflected by the thin-film beam splitter;
所述的样品台位于树脂槽内，所述的树脂槽内还设有薄膜，还包括移动控制***，移动控制***控制树脂槽和样品台在水平的XY平面移动，控制样品台高度移动，控制树脂槽和薄膜高度的高度移动；The sample stage is located in the resin tank, the resin tank is also provided with a film, and also includes a movement control system. The movement control system controls the resin tank and the sample stage to move in the horizontal XY plane, controls the height of the sample stage, and controls Height movement of resin tank and film height;
所述的树脂槽里面还设有薄膜夹具、气泡刮刀；所述的薄膜夹具包括中空的下夹具和中间短管状上夹具；所述的薄膜固定在薄膜夹具的下夹具上，在上夹具的挤压下形成一个向下凸起的膜面，所述的膜面的外侧面位于树脂的液面下；The resin tank is also provided with a film clamp and a bubble scraper; the film clamp includes a hollow lower clamp and a middle short tubular upper clamp; the film is fixed on the lower clamp of the film clamp, and the upper clamp Press down to form a downwardly convex membrane surface, the outer side of the membrane surface is located below the liquid surface of the resin;
所述的薄膜位于投影镜头在重力方向的正下方。从而有利于收集打印过程中出现的气泡。所述的薄膜下方设有气泡刮刀；所述的气泡刮刀的刀刃呈光滑圆柱面，由弹簧支撑安装在刮刀体上，刀刃跟薄膜弹性接触；所述的移动控制***控制控制刮刀的移动。The film is located directly below the projection lens in the direction of gravity. This helps to collect air bubbles during the printing process. A bubble scraper is provided under the film; the blade of the bubble scraper is a smooth cylindrical surface, which is supported by a spring and installed on the scraper body, and the blade contacts the film elastically; the movement control system controls the movement of the scraper.
一种高精度大幅面立体投影3D打印方法，包括以下步骤：A high-precision large-format stereo projection 3D printing method includes the following steps:
在计算机上建立三维的几何模型；三维的几何模型会被进一步在一个方向上被切成二维的图片，每一张图片代表着三维模型中的一薄层，模型的切片方向是打印机的打印方向；Build a three-dimensional geometric model on a computer; the three-dimensional geometric model will be further sliced into two-dimensional pictures in one direction, each picture represents a thin layer in the three-dimensional model, and the slice direction of the model is printed by the printer direction;
产生的一系列图片会依次被打印***读取并投影到薄膜和树脂的交界面；在一定的时间内有光的地方会产生一定厚度的固化层，代表了投影图片所代表的模 型中对应的一层；The resulting series of pictures will be read by the printing system and projected to the interface between the film and the resin; within a certain period of time, where there is light, a cured layer of a certain thickness will be produced, which represents the corresponding model in the projected picture. layer;
当上一层完成曝光打印后，样品台和样品会下降1-2毫米而脱离薄膜；When the upper layer is exposed and printed, the sample stage and sample will drop by 1-2 mm and separate from the film;
样品台回位时，少回的距离为下一层的厚度，打印好的样品和薄膜间的缝隙就充满了打印下一层所需的树脂层；依次重复曝光，随着样品台的逐层下降，模型在树脂槽中被复制出来。When the sample stage is returned to its position, the less-returned distance is the thickness of the next layer. The gap between the printed sample and the film is filled with the resin layer needed to print the next layer; the exposure is repeated successively, as the sample stage moves layer by layer Down, the model is copied in the resin tank.
当样品的尺寸超出一块芯片所覆盖的范围，采用拼接的打印模式；代表模型一层的图片切成多张小于单个DLP解析度的子图片，对于模型中的每一层，将通过多次曝光完成，依次投影当前层的所有子图片。When the size of the sample exceeds the range covered by a chip, the stitching printing mode is adopted; the picture representing the first layer of the model is cut into multiple sub-pictures less than a single DLP resolution. For each layer in the model, multiple exposures Finish, project all sub-pictures of the current layer in turn.
本发明提供的一种高精度大幅面立体投影3D打印***及其打印方法，提供了一个高精度，大幅面的加工能力，为在微机电(MEMS)领域，生物医疗领域，工业接插件领域和其他需要微加工领域的发展提供了一种先进精准的切入手段。The present invention provides a high-precision large-format stereo projection 3D printing system and a printing method thereof, which provide a high-precision, large-format processing capability, which is useful in the fields of microelectromechanical (MEMS), biomedical, industrial connectors and Other developments in the field of micromachining provide an advanced and precise approach.
发明的有益效果The beneficial effects of the invention
有益效果Beneficial effect
对附图的简要说明Brief description of the drawings
附图说明Description of the drawings
图1为本发明的***结构示意图；Figure 1 is a schematic diagram of the system structure of the present invention;
图2为本发明的薄膜夹具结构示意图；2 is a schematic diagram of the structure of the film clamp of the present invention;
图3为本发明的气泡刮刀结构示意图；Figure 3 is a schematic diagram of the structure of the bubble scraper of the present invention;
图4为本发明的打印方法步骤示意图；4 is a schematic diagram of the steps of the printing method of the present invention;
图5为拼接打印模式中的误差拼接示意图；其中A，单次曝光的幅面；B，x方向精确拼接，C，x方向误差拼接；B’，y方向精确拼接，C’，y方向误差拼接；Figure 5 is a schematic diagram of error stitching in stitching printing mode; where A, single exposure format; B, accurate stitching in the x direction, C, error stitching in the x direction; B', accurate stitching in the y direction, and C', error stitching in the y direction ；
图6为三种打印模式示意图；Figure 6 is a schematic diagram of three printing modes;
图7为本发明的样品台与光轴的垂直调节步骤。Fig. 7 shows the vertical adjustment steps of the sample stage and the optical axis of the present invention.
发明实施例Invention embodiment
本发明的实施方式Embodiments of the invention
结合实施例说明本发明的具体技术方案。The specific technical solutions of the present invention are explained in conjunction with the embodiments.
如图1所示，一种高精度大幅面立体投影3D打印***，包括带有光源的DLP光 机1，还包括投影镜头4、树脂槽8；As shown in Figure 1, a high-precision large-format stereoscopic projection 3D printing system includes a DLP light engine 1 with a light source, a projection lens 4 and a resin tank 8;
DLP光机1投出的光路经过薄膜分光镜3反射投影进入投影镜头4，所述的投影镜头4投影到薄膜7和树脂槽8内树脂的交界面；The light path projected by the DLP optical engine 1 is reflected and projected by the film splitter 3 into the projection lens 4, and the projection lens 4 is projected onto the interface between the film 7 and the resin in the resin tank 8;
所述的薄膜分光镜3，还可以是玻璃材质的毫米级别厚的分光镜片，但对于使用的光波长，要在镜片的一面镀反射膜，而另一面镀增透膜从而消除鬼影现象。The thin-film beam splitter 3 can also be a millimeter-thick splitter lens made of glass. However, for the wavelength of light used, one side of the lens should be coated with a reflective film and the other side with an antireflection coating to eliminate ghosting.
所述的投影镜头4一侧设有激光位移计5；A laser displacement meter 5 is provided on one side of the projection lens 4;
所述的薄膜分光镜3一侧还设有图像控制器2，所述的图像控制器2的监控光路与薄膜分光镜3反射的投影光路重合；An image controller 2 is also provided on one side of the thin-film beam splitter 3, and the monitoring light path of the image controller 2 coincides with the projection light path reflected by the thin-film beam splitter 3;
所述的样品台9位于树脂槽8内，所述的树脂槽8内还设有薄膜7，还包括移动控制***，移动控制***控制树脂槽8和样品台9在水平的XY平面移动，控制样品台9高度移动，控制树脂槽8和薄膜7高度的高度移动；The sample stage 9 is located in the resin tank 8. The resin tank 8 is also provided with a film 7, and also includes a movement control system. The movement control system controls the resin tank 8 and the sample stage 9 to move in the horizontal XY plane, and controls The height movement of the sample stage 9 controls the height movement of the resin tank 8 and the film 7;
所述的树脂槽8里面还设有薄膜夹具10、气泡刮刀6；所述的薄膜夹具10包括中空的下夹具和中间短管状上夹具；所述的薄膜7固定在薄膜夹具10的下夹具上，在上夹具的挤压下形成一个向下凸起的膜面，所述的膜面的外侧面位于树脂的液面下；The resin tank 8 is also provided with a film clamp 10 and a bubble scraper 6; the film clamp 10 includes a hollow lower clamp and a middle short tubular upper clamp; the film 7 is fixed on the lower clamp of the film clamp 10 , Forming a downwardly convex film surface under the squeeze of the upper clamp, and the outer surface of the film surface is located below the liquid surface of the resin;
所述的薄膜7位于投影镜头4重力方向的正下方。从而有利于收集打印过程中出现的气泡。The film 7 is located directly under the direction of gravity of the projection lens 4. This helps to collect air bubbles during the printing process.
所述的薄膜7下方设有气泡刮刀6；所述的气泡刮刀6的刀刃61呈光滑圆柱面，由弹簧62支撑安装在刮刀体上，刀刃61跟薄膜7弹性接触；所述的移动控制***控制刮刀的移动。A bubble scraper 6 is provided under the film 7; the blade 61 of the bubble scraper 6 is a smooth cylindrical surface, supported by a spring 62 and installed on the scraper body, and the blade 61 is in elastic contact with the film 7; the movement control system Control the movement of the scraper.
打印图像的显示是德州仪器的DLP，也可以是反射液晶屏LCOS，LCOS被认为比传统的透射液晶屏有更好的图像的亮度和对比度.它的每个像素会根据施加的电压调节反射光的偏振态。因此在光路中加入一块偏正片就可让相应的偏正像素的反射光通过从而形成图像。德州仪器在1987年发明了DLP技术，跟液晶屏改变反射光的偏振态的原理不同，DLP中每个像素是一个微小的反光镜。它通过偏转微镜面来控制反射光的去向。每个镜片可偏转±10o.亮的像素就是反射光进入了镜头，相反的就是暗的像素。图像的灰度则是由镜片偏转的频率来控制。DLP 芯片比液晶芯片具有更好的紫外线相容性和更高的对比度。本实施例使用DLP芯片的解析度是1920X1080，解析度更高的芯片也可应用。每个微镜片尺寸是7.6umX7.6um，用的光源波长是405纳米。The display of the printed image is DLP of Texas Instruments, or it can be a reflective LCD screen LCOS. LCOS is considered to have better image brightness and contrast than traditional transmissive LCD screens. Each pixel of it will adjust the reflected light according to the applied voltage. The polarization state. Therefore, adding a polarizer to the optical path allows the reflected light of the corresponding polarized pixel to pass through to form an image. Texas Instruments invented the DLP technology in 1987, which is different from the principle of changing the polarization state of the reflected light on the LCD screen. Each pixel in the DLP is a tiny mirror. It controls the whereabouts of the reflected light by deflecting the micro-mirror. Each lens can be deflected by ±10o. Bright pixels are reflected light entering the lens, and the opposite are dark pixels. The gray scale of the image is controlled by the frequency of lens deflection. DLP chips have better UV compatibility and higher contrast than liquid crystal chips. The resolution of the DLP chip used in this embodiment is 1920X1080, and chips with higher resolution can also be applied. The size of each micro lens is 7.6umX7.6um, and the wavelength of the light source used is 405 nm.
为了确保打印尺寸的精度，监控摄像头2被应用于打印光路中。在DLP芯片上的打印图片在被投影到薄膜7和树脂的交界面时，图像必须是清晰的，对比度要强，例如大于5∶1。这就要求交界面在投影镜头4的光学焦面上。对于高精度的打印，投影镜头4的焦深在几十微米到一两百微米之间。这样的尺寸对多部件的机械组装是很难保证的。因此在硬件组装后，都需要用监控摄像头的图像分析功能并控制相应的运动轴使得交界面在焦面上，为了看清图像，一般要求摄像头的像素尺寸要小等于DLP的像素大小，比如该***中用的监控摄像头2像素大小是5微米。这个摄像头不仅仅是对焦功能，对于焦深几十微米的镜头，可以用它来调节样品台9和薄膜7相对于镜头光轴的垂直度。在样品台9或者在薄膜7上选三个不在一条线上的至少三个点，一般是形成直角三角形的三点，利用摄像头将这三个点都置于焦面上。这样就能保证样品台9或者薄膜7和焦面是平行的，以保证打印精度的均匀性。In order to ensure the accuracy of the printing size, the monitoring camera 2 is applied in the printing light path. When the printed image on the DLP chip is projected on the interface between the film 7 and the resin, the image must be clear and the contrast must be strong, for example, greater than 5:1. This requires the interface to be on the optical focal plane of the projection lens 4. For high-precision printing, the focal depth of the projection lens 4 is between tens of microns to one or two hundred microns. Such a size is difficult to guarantee for the mechanical assembly of multiple parts. Therefore, after hardware assembly, it is necessary to use the image analysis function of the surveillance camera and control the corresponding motion axis to make the interface on the focal plane. In order to see the image clearly, the pixel size of the camera is generally required to be smaller than the pixel size of the DLP. The 2 pixel size of the surveillance camera used in the system is 5 microns. This camera is not only a focusing function, for a lens with a focal depth of tens of microns, it can be used to adjust the verticality of the sample stage 9 and the film 7 relative to the optical axis of the lens. Choose three at least three points on the sample stage 9 or on the film 7 that are not on the same line, generally three points forming a right triangle, and use a camera to place these three points on the focal plane. In this way, it can be ensured that the sample stage 9 or the film 7 and the focal plane are parallel to ensure the uniformity of printing accuracy.
光路部分包括市场上商业化的DLP光机1，其中包括光源。投影光路和监控光路有重叠部分，因此用到了薄膜分光镜3，同时为了减少薄膜分光镜3的的两个面反射对图像清晰度造成负面影响的鬼影现象，使用了5微米后的薄膜分光镜3，反射和透射比在95∶5左右。其它材质的分光片和分光立方体也是可以用的。投影镜头4的选择需在工作波长下满足以下几个条件：1，光圈要足够大，保证DLP图像成像的清晰和均匀，＞90％：2，DLP在像面的像素大小是设计需要的尺寸，比如2微米或10微米；3，从膜和树脂的交界面反射回来通过镜头在监控摄像头上成的像需是完整均匀的。同时为了控制样品在打印方向的精度和精确控制样品平台与薄膜7的相对平行，本***把高精度的激光位移计5并列安装于镜头旁。为了控制打印方向的精度达到10微米量级，使用了Keyence公司的激光位移计5，其精度达到了1微米。但对不同的精度要求，其他类型的位移计也是可行的，比如超声位移计。该位移计平行于投影镜头4的光轴，因此垂直于位移计探头的面就关联垂直于光轴。同样位移计在一个面上选不在一条线上的至少三个 点，一般是形成直角三角形的三点，位移计精确测量出点到位移计的距离，如果点到位移计的距离不同，那这个面不垂直于位移计和光轴。为此可以通过调节该平面的水平机构使得所有点到位移计的距离相同，这样的三点就定义了垂直于位移计和光轴的面。此垂直度和位置的精确记录对控制打印方向的精确度是至关重要的。The optical path part includes the DLP optical engine 1 commercialized on the market, which includes a light source. The projection light path and the monitoring light path overlap, so the thin film beam splitter 3 is used. At the same time, in order to reduce the ghosting phenomenon that the reflection of the two surfaces of the thin film beam splitter 3 negatively affects the image clarity, a 5 micron thin film beam splitter is used Mirror 3, the reflection and transmission ratio is around 95:5. The beam splitter and beam splitter cube of other materials are also available. The selection of the projection lens 4 needs to meet the following conditions at the working wavelength: 1. The aperture should be large enough to ensure the clarity and uniformity of the DLP image,> 90%: 2. The pixel size of the DLP on the image plane is the size required by the design , Such as 2 microns or 10 microns; 3. The image reflected from the interface between the film and the resin on the surveillance camera through the lens needs to be complete and uniform. At the same time, in order to control the accuracy of the sample in the printing direction and accurately control the relative parallelism of the sample platform and the film 7, the system installs a high-precision laser displacement meter 5 in parallel beside the lens. In order to control the accuracy of the printing direction to the order of 10 microns, a laser displacement meter 5 from Keyence was used, and its accuracy reached 1 micron. However, for different accuracy requirements, other types of displacement meters are also feasible, such as ultrasonic displacement meters. The displacement meter is parallel to the optical axis of the projection lens 4, so the surface perpendicular to the displacement meter probe is related to the perpendicular to the optical axis. Similarly, the displacement meter selects at least three points that are not on a line on a surface, usually three points forming a right triangle. The displacement meter accurately measures the distance from the point to the displacement meter. If the distance from the point to the displacement meter is different, then this The surface is not perpendicular to the displacement gauge and the optical axis. For this reason, the horizontal mechanism of the plane can be adjusted to make all the points have the same distance from the displacement meter. Such three points define the plane perpendicular to the displacement meter and the optical axis. Accurate recording of this verticality and position is essential to control the accuracy of the printing direction.
如图2所示，树脂槽8包括薄膜7、薄膜夹具10、气泡刮刀6、浸入式的样品台9。所述的薄膜夹具10包括中空的下夹具和中间短管状上夹具；所述的薄膜7固定在薄膜夹具10的下夹具上，在上夹具的挤压下形成一个向下凸起的膜面，所述的膜面的外侧面位于树脂的液面下。薄膜夹具10有5毫米的厚度，整个薄膜夹具10浸入树脂1到2毫米从而确保薄膜7的下表面和树脂完全浸润，而上表面保持干燥。薄膜7的使用主要是为了利用膜的变形来降低样品在树脂中上下移动时所承受的力，从而保证细微结构的完整；同时利用薄膜7的强张力来定义打印中每一层树脂的厚度，减少打印的时间。在使用中，通过中间短管状上夹具推挤固定在中空的下夹具上的薄膜7，使得薄膜7被撑开20-30％。这里的薄膜7的材料可以是聚二甲基矽氧烷PDMS，PFA或者其他透明的塑料，厚度从25微米到100微米。当然与固化树脂粘合力不强的硬质窗口也是可以使用的，比如玻璃表面上喷涂透明的PDMS或者再加一层透明的PFA塑料膜。树脂制备时和打印时气体不可避免的会溶入，这些气体在打印过程中由于树脂和膜的运动以及光固化过程中产生的热的相互作用下会产生细微的气泡，这些细微的气泡会渐渐相互结合而形成毫米级的气泡。而这些气泡却被膜裹在树脂和薄膜7的交界处，会因此造成最终打印样品的缺陷，因此在这项发明中设备构架是从重力方向的上方投影到下方的薄膜7上，这样就使得气泡由于浮力的作用汇聚于薄膜7的下方，并在薄膜7下方引入了专门设计的气泡刮刀6，如图3所示。气泡刮刀6的刀刃61是钝的，呈光滑圆柱面，半径1.5毫米，长度覆盖最大的打印幅面。并且该刀刃61是有弹簧62支撑于刮刀体上，使得在刮动时刀刃61跟薄膜7或者硬窗口是弹性接触，而不造成表面的破坏。对于粘度高的树脂比如＞100cPs，由于液体流动很慢，不易定义一层微薄的树脂层，因此严重影响了打印速度和精度。液体的粘度通常随着温度的上升而降低，而且一般是很强的关联关系，很多树脂提高三十摄氏 度可以降低将近40％的粘度。所以为了提高高粘度树脂的打印速度和精度，可以在树脂槽8上加入温度控制单元。在该项发明中，树脂槽8的温度可在室温到100摄氏度间调节。As shown in FIG. 2, the resin tank 8 includes a film 7, a film holder 10, a bubble doctor 6, and an immersion type sample stage 9. The film clamp 10 includes a hollow lower clamp and a middle short tubular upper clamp; the film 7 is fixed on the lower clamp of the film clamp 10 to form a downwardly convex film surface under the extrusion of the upper clamp, The outer side of the film surface is located below the liquid surface of the resin. The film clamp 10 has a thickness of 5 mm, and the entire film clamp 10 is immersed in resin 1 to 2 mm to ensure that the lower surface of the film 7 and the resin are completely wetted, while the upper surface is kept dry. The use of the film 7 is mainly to use the deformation of the film to reduce the force that the sample bears when moving up and down in the resin, so as to ensure the integrity of the fine structure; at the same time, the strong tension of the film 7 is used to define the thickness of each layer of resin during printing. Reduce printing time. In use, the film 7 fixed on the hollow lower clamp is pushed through the middle short tubular upper clamp, so that the film 7 is stretched by 20-30%. The material of the film 7 here can be polydimethylsiloxane PDMS, PFA or other transparent plastics, with a thickness ranging from 25 microns to 100 microns. Of course, rigid windows with weak adhesion to the cured resin can also be used, such as spraying transparent PDMS on the glass surface or adding a layer of transparent PFA plastic film. Gases will inevitably dissolve during resin preparation and printing. These gases will generate fine bubbles due to the interaction of the movement of the resin and the film during the printing process and the heat generated during the light curing process. These fine bubbles will gradually Combine each other to form millimeter-level bubbles. These bubbles are wrapped in the film at the junction of the resin and the film 7, which will cause the defects of the final printed sample. Therefore, in this invention, the equipment frame is projected from the upper part of the gravity direction onto the lower film 7, which makes the air bubbles Due to the buoyancy, it is concentrated under the film 7, and a specially designed bubble scraper 6 is introduced under the film 7, as shown in FIG. 3. The blade 61 of the bubble scraper 6 is blunt and has a smooth cylindrical surface with a radius of 1.5 mm and a length covering the largest printing format. In addition, the blade 61 is supported by a spring 62 on the scraper body, so that the blade 61 is in elastic contact with the film 7 or the hard window during scraping, without causing surface damage. For high-viscosity resins such as >100cPs, it is difficult to define a thin resin layer because the liquid flows very slowly, which seriously affects the printing speed and accuracy. The viscosity of liquids usually decreases with increasing temperature, and there is generally a strong correlation. Many resins can reduce their viscosity by nearly 40% by increasing 30 degrees Celsius. Therefore, in order to improve the printing speed and accuracy of the high-viscosity resin, a temperature control unit can be added to the resin tank 8. In this invention, the temperature of the resin tank 8 can be adjusted from room temperature to 100 degrees Celsius.
该发明的移动控制***，总共有5根运动轴，如图1，两轴控制树脂槽8和样品台9在XY平面同时移动，控制样品台9高度的Z1轴，控制树脂槽8和薄膜7高度的Z2轴，和控制刮刀的轴。除了刮刀轴的运动精度，比如0.1毫米，根据设备的光学精度设计，其它的轴运动控制的精度都要远高于光学精度，比如对于10微米的光学精度，选择1微米的轴控制精度；2微米的光学精度，选择0.5微米的轴控制精度。The movement control system of the invention has a total of 5 movement axes, as shown in Figure 1. The two axes control the resin tank 8 and the sample stage 9 to move simultaneously in the XY plane, the Z1 axis that controls the height of the sample stage 9 and the resin tank 8 and the film 7 The height of the Z2 axis, and the axis that controls the scraper. In addition to the movement accuracy of the squeegee shaft, such as 0.1 mm, according to the optical accuracy design of the equipment, the accuracy of other axis motion control is much higher than the optical accuracy. For example, for the optical accuracy of 10 microns, select the axis control accuracy of 1 micron; 2 Optical accuracy of micron, select the axis control accuracy of 0.5 micron.
打印的方法：How to print:
在计算机上建立几何模型，在建立模型时如果有悬空的结构时需要加上细小的支撑结构，通常是细柱。三维的几何模型会被进一步在一个方向上被切成二维的图片，一般是黑白，可以有灰度。每一张图片代表着三维模型中的一薄层。模型的切片方向将是打印机的打印方向。产生的一系列图片会依次被打印机读取并投影到薄膜7和树脂的交界面。在一定的时间内有光的地方会产生一定厚度的固化层，它代表了投影图片所代表的模型中对应的一层。当上一层完成曝光打印后，样品台9和样品会下降1-2毫米而脱离薄膜7。样品台9回位时，少回正好下一层的厚度，这样样品和薄膜7间的缝隙就充满了打印下一层所需的树脂层，如图4。依次重复曝光，随着样品台9的逐层下降，模型在树脂槽8中被复制出来。Create a geometric model on a computer. If there is a suspended structure when building the model, a small supporting structure, usually a thin column, needs to be added. The three-dimensional geometric model will be further sliced into two-dimensional pictures in one direction, generally black and white, with grayscale. Each picture represents a thin layer in the 3D model. The slicing direction of the model will be the printing direction of the printer. The resulting series of pictures will be read by the printer and projected onto the interface between the film 7 and the resin. A certain thickness of cured layer will be produced where there is light in a certain period of time, which represents the corresponding layer in the model represented by the projected picture. When the upper layer is exposed and printed, the sample stage 9 and the sample will drop by 1-2 mm and separate from the film 7. When the sample stage 9 is returned to its position, the thickness of the next layer should be reduced, so that the gap between the sample and the film 7 is filled with the resin layer required to print the next layer, as shown in Figure 4. The exposure is repeated successively, and as the sample stage 9 descends layer by layer, the model is replicated in the resin tank 8.
由于LCD和DLP芯片都有一定的大小，比如1920X1080像素的DLP，在十微米的光学精度下，一块芯片所覆盖的打印面积只有19.2mmX10.8mm.因此当样品的尺寸超出一块芯片所覆盖的范围将会是个问题。在该项发明中，提出了一种拼接的打印模式。在这种模式下，代表模型一层的图片会进一步被切成多张小于单个DLP解析度的图片，比如，3800X2000像素的图片可以被分割成四张1900X1000的子图片，每张子图片将代表一层中的四分之一的区域。对于模型中的每一层，将通过多次曝光完成，依次投影当前层的所有子图片。相邻区域/图片的交界处为了提高力学性能通常会给与一定的重叠量，通常是10-30微米。每个区域 的曝光的位置和重叠都由XY轴组合精确控制。***中有两个坐标系，一个是DLP/LCD垂直坐标系，还有一个是XY轴组成的运动坐标系。如果这两个坐标系之间由于机械组装的误差而不完全平行，就会在拼接打印中相邻的区域出现错位误差，如图5。为此，在的拼接打印模式中会对测量得到的误差进行补偿，X，Y方向的补偿量可以不同，不同区域的补偿量也是不同的，但往往是线性的。由于X，Y轴的存在，对于比DLP芯片的打印幅面小的样品，可以在整个幅面内重复打印多个同样的样品，这样可以提高量产时的速度。如图6标出的三种打印模式。当然对于需要拼接模式的样品，如果幅面足够小，也可以一次打印多个样品，但一般按拼接打印处理。Since LCD and DLP chips have a certain size, such as 1920X1080 pixel DLP, with an optical precision of ten microns, the printing area covered by a chip is only 19.2mmX10.8mm. Therefore, when the size of the sample exceeds the range covered by a chip It will be a problem. In this invention, a splicing printing mode is proposed. In this mode, the image representing the first layer of the model will be further sliced into multiple images smaller than a single DLP resolution. For example, a 3800X2000 pixel image can be divided into four 1900X1000 sub-images, and each sub-image will represent A quarter of the area on the first floor. For each layer in the model, it will be completed through multiple exposures, projecting all the sub-pictures of the current layer in turn. In order to improve the mechanical properties at the junction of adjacent areas/pictures, a certain amount of overlap is usually given, usually 10-30 microns. The position and overlap of the exposure of each area are precisely controlled by the XY axis combination. There are two coordinate systems in the system, one is the DLP/LCD vertical coordinate system, and the other is a motion coordinate system composed of XY axes. If the two coordinate systems are not completely parallel due to mechanical assembly errors, there will be misalignment errors in adjacent areas during stitching printing, as shown in Figure 5. For this reason, the measured error will be compensated in the stitching printing mode. The compensation amount in the X and Y directions can be different, and the compensation amount in different areas is also different, but it is often linear. Due to the existence of the X and Y axes, for samples with a smaller print format than the DLP chip, multiple identical samples can be printed repeatedly in the entire format, which can increase the speed of mass production. There are three printing modes as shown in Figure 6. Of course, for samples that require splicing mode, if the format is small enough, multiple samples can be printed at one time, but it is generally processed as splicing printing.
对于高精度的树脂3D打印设备，单凭机械加工和组装很难达到十微米量级的组装精度。而在该项发明中，薄膜7、样品台9、投影光轴的组装精度会严重影响到最终打印成品的精度。因此对于不同精度设备，引入了不同的光学手段加上机械调节让打印机达到高精度的打印状态。对于2微米光学精度的设备，因为选择的投影镜头4的焦深小于10微米，因此可以用监控摄像头中看到的图像的清晰度对比度来控制不同位置的点到镜头的垂直距离并精确到10微米内，以保证平面精确的平行于投影镜头4的像面和垂直于光轴。对于投影镜头4的焦深大于精度要求的3D打印设备，比如10微米和50微米光学精度的设备，需要有辅助的光学设备，该发明中选择了Keyence公司的激光位移计5，可达到1微米的测量精度。在第一次使用设备，或者设备在使用一段时间后，因人为的误操作或者硬件的更新需要重新调整打印机的***状态。调整主要有两方面，一是薄膜/硬窗口和样品台9对投影镜头4光轴的垂直度，如果两个面都垂直于光轴，那他们之间是相互平行的；二是薄膜/硬窗口下表面相对于样品台9上表面的精确距离，因为这个距离决定了样品在打印方向的精度。首先要保证投影镜头4光轴和激光位移计5的探头是平行的，以保证相对于激光垂直的面是垂直于光轴的。调整步骤如下：For high-precision resin 3D printing equipment, it is difficult to achieve assembly accuracy on the order of ten microns by mechanical processing and assembly alone. In this invention, the assembly accuracy of the film 7, the sample stage 9, and the projection optical axis will seriously affect the accuracy of the final printed product. Therefore, for different precision equipment, different optical means and mechanical adjustment are introduced to allow the printer to achieve high-precision printing. For equipment with 2 micron optical precision, because the focal depth of the selected projection lens 4 is less than 10 microns, the sharpness and contrast of the image seen in the surveillance camera can be used to control the vertical distance from the point to the lens at different positions and be accurate to 10 Within microns to ensure that the plane is accurately parallel to the image plane of the projection lens 4 and perpendicular to the optical axis. For 3D printing equipment where the focal depth of the projection lens 4 is greater than the accuracy requirements, such as 10 micron and 50 micron optical precision equipment, auxiliary optical equipment is required. In this invention, Keyence's laser displacement meter 5 is selected, which can reach 1 micron Measurement accuracy. After using the device for the first time, or after the device has been used for a period of time, the system status of the printer needs to be readjusted due to human misoperation or hardware updates. There are two main adjustments. One is the perpendicularity of the film/hard window and the sample stage 9 to the optical axis of the projection lens 4. If both surfaces are perpendicular to the optical axis, they are parallel to each other; the other is the film/hard window. The precise distance between the lower surface of the window and the upper surface of the sample stage 9 because this distance determines the accuracy of the sample in the printing direction. First, it is necessary to ensure that the optical axis of the projection lens 4 and the probe of the laser displacement meter 5 are parallel to ensure that the plane perpendicular to the laser is perpendicular to the optical axis. The adjustment steps are as follows:
1.取下薄膜/硬窗口，把样品台9移到激光位移计5的测量距离内，依次在样品台9上表面选择成直角三角形的三个点，点间距在机械允许的范围内越大越好。记录位移计的读数，根据读数给出的偏差，调整控制样品台9两个垂直方向倾斜角 度的细牙螺丝，直到三点读数的差别不大于设计的误差，一般十微米，如图7所示。1. Remove the film/hard window, move the sample stage 9 to the measuring distance of the laser displacement meter 5, and select three points on the upper surface of the sample stage 9 to form a right triangle. The distance between the points is within the mechanically allowable range. it is good. Record the reading of the displacement meter. According to the deviation given by the reading, adjust the fine screw that controls the two vertical tilt angles of the sample table 9 until the difference between the three readings is not greater than the design error, generally ten microns, as shown in Figure 7. .
2.在样品台9调整垂直后，利用监控摄像头的反馈将样品台9移动到投影镜头4的焦面，记录位移计和样品台9轴Z1的位置，既打印的起始位置。2. After the sample stage 9 is adjusted to be vertical, use the feedback of the monitoring camera to move the sample stage 9 to the focal plane of the projection lens 4, and record the position of the displacement meter and the 9-axis Z1 of the sample stage, which is the starting position of printing.
3.利用成直角三角的三点调整薄膜/硬窗口垂直于光轴。之后利用薄膜轴Z2和位移计将薄膜7的下表面移动到记录的焦面位置。经过调整后，焦面，薄膜7和样品台9的相对位置被精确的定义记录了，这为后续打印中的精确尺寸控制提供了充分条件。3. Adjust the film/hard window to be perpendicular to the optical axis using three points in a right triangle. Then, the lower surface of the film 7 is moved to the recorded focal plane position using the film axis Z2 and the displacement meter. After adjustment, the relative positions of the focal plane, film 7 and sample stage 9 are accurately defined and recorded, which provides sufficient conditions for precise size control in subsequent printing.

Claims (5)

  1. 一种高精度大幅面立体投影3D打印***，包括带有光源的DLP光机，其特征在于，还包括投影镜头、树脂槽；A high-precision large-format stereo projection 3D printing system, including a DLP optical engine with a light source, characterized in that it also includes a projection lens and a resin tank;
    DLP光机投出的光路经过薄膜分光镜反射投影进入投影镜头，所述的投影镜头投影到薄膜和树脂槽内树脂的交界面；The light path projected by the DLP optical engine is reflected and projected by the thin-film beam splitter into the projection lens, and the projection lens is projected onto the interface between the thin film and the resin in the resin tank;
    所述的投影镜头一侧设有激光位移计；A laser displacement meter is provided on one side of the projection lens;
    所述的薄膜分光镜一侧还设有图像控制器，所述的图像控制器的监控光路与薄膜分光镜反射的投影光路重合；An image controller is also provided on one side of the thin-film beam splitter, and the monitoring optical path of the image controller coincides with the projection optical path reflected by the thin-film beam splitter;
    所述的样品台位于树脂槽内，所述的树脂槽内还设有薄膜，还包括移动控制***，移动控制***控制树脂槽和样品台在水平的XY平面移动，控制样品台高度移动，控制树脂槽和薄膜高度的高度移动；The sample stage is located in the resin tank, the resin tank is also provided with a film, and also includes a movement control system. The movement control system controls the resin tank and the sample stage to move in the horizontal XY plane, controls the height of the sample stage, and controls Height movement of resin tank and film height;
    所述的树脂槽里面还设有薄膜夹具、气泡刮刀；所述的薄膜夹具包括中空的下夹具和中间短管状上夹具；所述的薄膜固定在薄膜夹具的下夹具上，在上夹具的挤压下形成一个向下凸起的膜面，所述的膜面的外侧面位于树脂的液面下。The resin tank is also provided with a film clamp and a bubble scraper; the film clamp includes a hollow lower clamp and a middle short tubular upper clamp; the film is fixed on the lower clamp of the film clamp, and the upper clamp Press down to form a downwardly convex membrane surface, the outer side of the membrane surface is located below the liquid surface of the resin.
  2. 根据权利要求1所述的一种高精度大幅面立体投影3D打印***，其特征在于，所述的薄膜位于投影镜头沿重力方向的正下方。The high-precision large-format stereoscopic projection 3D printing system according to claim 1, wherein the film is located directly below the projection lens in the direction of gravity.
  3. 根据权利要求1或2所述的一种高精度大幅面立体投影3D打印***，其特征在于，所述的薄膜下方设有气泡刮刀；所述的气泡刮刀的刀刃呈光滑圆柱面，由弹簧支撑安装在刮刀体上，刀刃跟薄膜弹性接触；所述的移动控制***控制控制刮刀的移动。A high-precision large-format stereoscopic projection 3D printing system according to claim 1 or 2, wherein a bubble scraper is provided under the film; the blade of the bubble scraper is a smooth cylindrical surface and is supported by a spring Installed on the scraper body, the blade is in elastic contact with the film; the movement control system controls the movement of the scraper.
  4. 一种高精度大幅面立体投影3D打印方法，其特征在于，利用权1到权3任一项所述的一种高精度大幅面立体投影3D打印***进行打印，包括以下步骤：A high-precision large-format stereoscopic projection 3D printing method is characterized in that printing is performed by using a high-precision large-format stereoscopic projection 3D printing system according to any one of rights 1 to 3, including the following steps:
    在计算机上建立三维的几何模型；三维的几何模型会被进一步在一个方向上被切成二维的图片，每一张图片代表着三维模型中的一薄层，模型的切片方向是打印机的打印方向； 产生的一系列图片会依次被打印***读取并投影到薄膜和树脂的交界面；在一定的时间内有光的地方会产生一定厚度的固化层，代表了投影图片所代表的模型中对应的一层；Build a three-dimensional geometric model on a computer; the three-dimensional geometric model will be further sliced into two-dimensional pictures in one direction, each picture represents a thin layer in the three-dimensional model, and the slice direction of the model is printed by the printer Direction; The resulting series of pictures will be read by the printing system and projected onto the interface between the film and the resin; a certain thickness of cured layer will be produced where there is light within a certain period of time, which represents the model represented by the projected picture Corresponding layer
    当上一层完成曝光打印后，样品台和样品会下降1-2毫米而脱离薄膜；When the upper layer is exposed and printed, the sample stage and sample will drop by 1-2 mm and separate from the film;
    样品台回位时，少回的距离为下一层的厚度，打印好的样品和薄膜间的缝隙就充满了打印下一层所需的树脂层；依次重复曝光，随着样品台的逐层下降，模型在树脂槽中被复制出来。When the sample stage is returned to its position, the less-returned distance is the thickness of the next layer. The gap between the printed sample and the film is filled with the resin layer needed to print the next layer; the exposure is repeated successively, as the sample stage moves layer by layer Down, the model is copied in the resin tank.
  5. 根据权利要求4所述的一种高精度大幅面立体投影3D打印方法，其特征在于，当样品的尺寸超出一块芯片所覆盖的范围，采用拼接的打印模式；代表模型一层的图片切成多张小于单个DLP解析度的子图片，对于模型中的每一层，将通过多次曝光完成，依次投影当前层的所有子图片。A high-precision large-format stereoscopic projection 3D printing method according to claim 4, wherein when the size of the sample exceeds the range covered by a chip, a splicing printing mode is adopted; the picture representing the first layer of the model is cut into multiple pieces. A sub-picture with a resolution less than a single DLP, for each layer in the model, will be completed through multiple exposures, and all sub-pictures of the current layer will be projected in turn.
PCT/CN2019/083761 2019-03-13 2019-04-23 High-precision large-format stereoscopic projection 3d printing system and printing method therefor WO2020181620A1 (en)

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