WO2020155699A1 - Laser light source apparatus and laser projection device - Google Patents

Laser light source apparatus and laser projection device Download PDF

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Publication number
WO2020155699A1
WO2020155699A1 PCT/CN2019/113894 CN2019113894W WO2020155699A1 WO 2020155699 A1 WO2020155699 A1 WO 2020155699A1 CN 2019113894 W CN2019113894 W CN 2019113894W WO 2020155699 A1 WO2020155699 A1 WO 2020155699A1
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WIPO (PCT)
Prior art keywords
laser
array group
light
laser array
laser beam
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Application number
PCT/CN2019/113894
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French (fr)
Chinese (zh)
Inventor
王强
李显荣
Original Assignee
青岛海信激光显示股份有限公司
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Priority claimed from CN201910105630.8A external-priority patent/CN111522189B/en
Priority claimed from CN201910104916.4A external-priority patent/CN111522188B/en
Application filed by 青岛海信激光显示股份有限公司 filed Critical 青岛海信激光显示股份有限公司
Publication of WO2020155699A1 publication Critical patent/WO2020155699A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/20Lamp housings

Definitions

  • This application relates to the field of projection display, in particular to laser light source devices and laser projection equipment.
  • Lasers are used in the field of projection display due to their high brightness, strong monochromaticity, and wide color gamut. As the size of the laser display projection becomes larger and larger, the output energy requirements are higher and higher, so the laser light source device is proposed Higher requirements.
  • the laser light source usually uses a laser array composed of multiple lasers.
  • the number of laser arrays needs to be increased.
  • the design of the combined light optical path is unreasonable, it is easy to cause the size of the laser spot emitted by the final laser array to increase accordingly.
  • parameters such as the clear aperture of each element located behind the optical path of the laser array need to be redesigned, resulting in an increase in the size of the optical lens.
  • the coupled lasers in the laser light source device are increased from 4 groups to 6 groups, the size of the light spot emitted by the laser light source device will increase by 50%.
  • the diameter of the lens and other elements behind the corresponding laser light path needs to be increased by at least 50%, and the thickness of the lens will also increase, which will undoubtedly increase the design cost and difficulty of the laser light source device.
  • a laser light source device including: a first laser array group for emitting a first laser beam;
  • the second laser array group is used to emit a second laser beam, the polarization direction of the second laser beam and the polarization direction of the first laser beam are perpendicular to each other;
  • the third laser array group is used to emit a third laser beam
  • the polarization combiner includes a transmissive surface and a reflective surface that are opposed to each other, wherein the transmissive surface is used to transmit the first laser beam, the reflective surface is used to reflect the second laser beam, and the position of the polarization combiner is set to transmit the transmissive surface
  • the first laser beam and the second laser beam reflected by the reflecting surface are emitted in the same direction;
  • the light combining mirror located on the light exit side of the polarization combining mirror, includes alternately arranged transmission parts and reflection parts, wherein the transmission part is used to transmit and reflect the combined light of the first laser beam and the second laser beam emitted by the polarization combining mirror.
  • the part is used to reflect the third laser beam emitted by the third laser array, and the position of the light combining mirror is set so that the combined light of the first laser beam and the second laser beam transmitted by the transmission part and the third laser beam reflected by the reflection part are directed Shoot out in the same direction.
  • another laser light source device including: a fourth laser array group for emitting a fourth laser beam;
  • the fifth laser array group is used to emit the fifth laser beam
  • the sixth laser array group is used to emit a sixth laser beam, wherein the polarization direction of the sixth laser beam is perpendicular to the polarization directions of the fourth laser beam and the fifth laser beam;
  • the light combining mirror includes alternately arranged transmissive parts and reflective parts, the transmissive part is used to transmit the fourth laser beam, the reflective part is used to reflect the fifth laser beam, and the light combining mirror is set to make the fourth laser transmitted by the transmissive part The beam and the fifth laser beam reflected by the reflecting part are emitted in the same direction;
  • the polarization combining mirror is located on the light exit side of the combining mirror and includes a transmission surface and a reflection surface that are oppositely arranged.
  • the reflection surface is used to reflect the sixth laser beam
  • the transmission surface is used to transmit the fourth laser beam emitted by the combining mirror and
  • the position of the polarization combiner is set so that the fourth laser beam, the fifth laser beam and the sixth laser beam reflected by the reflective surface are emitted in the same direction.
  • a laser projection device which includes any of the above-mentioned laser light source devices, a light modulation device located in the light exit direction of the laser light source device, and a projection lens located on the light exit side of the light modulation device.
  • FIG. 1 is a schematic structural diagram of a laser light source device provided by some embodiments of this application.
  • FIG. 2 is a schematic structural diagram of a light combining mirror provided by some embodiments of the application.
  • FIG. 3 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application.
  • FIG. 4 is a schematic structural diagram of still another light combining mirror provided by some embodiments of this application.
  • FIG. 5 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application.
  • FIG. 6 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application.
  • FIG. 7 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application.
  • FIG. 8 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application.
  • FIG. 9 is a schematic structural diagram of still another laser projection device provided by some embodiments of this application.
  • An embodiment of the application provides a laser light source device, as shown in FIG. 1, comprising: a first laser array group 111, a second laser array group 112, a third laser array group 113, a light combining mirror 121, and a polarization combining mirror 122.
  • the light combining mirror 121 is located on the light exit side of the polarization combining mirror 122.
  • each laser in the first laser array group 111, the second laser array group 112, and the third laser array group 113 can emit a laser beam, so the emitted light of the above three laser array groups includes multiple lasers. bundle.
  • the polarization combiner 122 includes a transmissive surface and a reflective surface that are opposed to each other.
  • the lower surface of the polarized light combiner 122 serves as the transmissive surface
  • the upper surface of the polarized light combiner 122 The surface acts as a reflective surface.
  • the laser beams emitted by the first laser array group 111 are incident on the transmission surface of the polarization combiner 122; the laser beams emitted by the second laser array group 112 are incident on the reflection surface of the polarization combiner 122; the first laser array group 111
  • the polarization direction of each laser beam emitted and the polarization direction of each laser beam emitted by the second laser array group 112 are perpendicular to each other.
  • the light combining mirror 121 includes: a transmissive part 1211 and a reflective part 1212 arranged alternately.
  • the laser beams emitted from the third laser array group 113 are incident on the reflection parts 1212 respectively.
  • the polarization combining mirror 122 is used to combine the laser beams incident on the transmission surface and the reflection surface, and respectively enter the transmission portions 1211 of the combining mirror 121.
  • the light combining mirror 121 is used to combine the laser beams incident on the transmissive parts 1211 and the reflective parts 1212 and emit them in a set direction.
  • the set direction is the light emitting direction of the laser light source device.
  • the polarization combiner 122 may include a transparent substrate, and at least two dielectric layers alternately coated on the transparent substrate. Choose the material and thickness of each dielectric layer according to Brews’s theorem, and set the installation direction of each laser array group reasonably so that the polarization direction is parallel to the incident surface of the laser beams emitted by the first laser array group 111.
  • the polarization combiner 122 is transmitted, the laser beams emitted by the second laser array group 112 whose polarization direction is perpendicular to the incident surface are reflected when incident on the polarization combiner 122, so that the polarization directions are perpendicular to each other.
  • the emitted laser beams are combined and then emitted toward the light combining mirror.
  • the reflective part and the transmissive part can be divided on the transparent substrate first. And the reflective film is plated at the corresponding position of the reflective part, and the anti-reflection film is plated or not coated at the corresponding position of the transmissive part to maintain the transparent state.
  • the reflection part of the light combining mirror 121 also has the function of polarization selection.
  • the reflection film in the reflection part 1211 may include at least two kinds of dielectric layers stacked and arranged. The ratio and thickness can enable the reflecting part to reflect incident light whose polarization direction is parallel to the incident surface and transmit incident light whose polarization direction is perpendicular to the incident surface.
  • the transmission part 1211 does not have the function of polarization selection, and can transmit incident light whose polarization direction is parallel to the incident surface or transmit incident light whose polarization direction is perpendicular to the incident surface.
  • the transmissive part 1211 and the reflective part 1212 in the light combining mirror 121 can be set to have an appropriate distance, so that the components of the combined laser beams of the polarization combining mirror whose polarization direction is parallel to the incident surface can be Completely pass through the transmission part 1211 of the light combining mirror 121, and the component whose polarization direction is perpendicular to the incident plane can be incident on the transmission part 1211 and the reflection part 1212 of the light combining mirror 121 at the same time; and the laser beams emitted by the third laser array group 113 It can also be incident on the reflecting part 1212 respectively. Therefore, the use of the polarization combining mirror 122 and the combining mirror 121 can combine the laser beams of the three groups of laser arrays to increase the output power of the laser.
  • the placement direction of the laser array group determines the polarization direction of the laser light emitted by the laser array group.
  • the polarization direction of the laser beam emitted by the first laser array group 111 and the polarization direction of the laser beam emitted by the third laser array group 113 are both parallel to the incidence of the polarization combining mirror or the combining mirror.
  • the polarization direction of the laser beam emitted by the second laser array group 112 is perpendicular to the incident surface of the polarization combiner. Therefore, as shown in FIG.
  • the light-emitting surface of the first laser array group 111 and the light-emitting surface of the second laser array group 112 may be perpendicular to each other, and the light-emitting surface of the second laser array group 112 and the light-emitting surface of the third laser array group 113 may be perpendicular to each other.
  • the faces are parallel to each other.
  • the second laser array group 112 can be rotated by 90 degrees with respect to the third laser array group 113 with the normal line perpendicular to the light exit surface of the third laser array group as an axis; the third laser array group 113 can be opposite to The first laser array group 111 is rotated by 90 degrees with the intersection of the light exit surface of the first laser array group and the light exit surface of the third laser array group as an axis.
  • the lasers in the first laser array group 111, the second laser array group 112, and the third laser array group 113 can all be semiconductor lasers; the beam output by the semiconductor laser has a fast axis and a slow axis, and the divergence angle of the laser in the direction of the slow axis It is about ⁇ 10°, and the divergence angle of the laser in the fast axis direction is about ⁇ 30°. Then after the laser beam emitted by the laser is collimated, the size of the spot in the fast axis direction is larger than the slow axis direction, and it is a rectangular or elliptical spot. The long side/long axis direction of the spot is the fast axis direction, and the short side/short axis direction of the spot is slow. Axis direction.
  • the above-mentioned polarization combining mirror 122 and light combining mirror 121 provided in the embodiments of the present application can be configured to be rectangular; and each reflecting portion 1212 and each transmitting portion 1211 in the combining mirror 121 can be They are arranged as strip-shaped regions that are alternately arranged in parallel along the slow axis direction of the emitted laser beam of the first laser array group 111.
  • the lasers are generally arranged along the slow axis direction, so that the laser beam of the first laser array group 111 can completely pass through the transmission part of the light combining mirror 121 after passing through the polarization combining mirror 122 1211, the fast axis direction of the emitted laser beam of the first laser array group 111 can be set parallel to the extension direction of the strip-shaped transmission part and the strip-shaped reflection part, and the fast axis direction of the emitted laser beam of the second laser array group 112 can be set
  • the fast axis direction of the emitted laser beam of the third laser array group 113 is arranged perpendicular to the extension direction of the strip-shaped transmission part and the strip-shaped reflection part, and is parallel to the extension direction of the strip-shaped transmission part and the strip-shaped reflection part.
  • the laser beam emitted by the semiconductor laser has a unique polarization direction, and the polarization direction can be parallel to the short axis direction of the light spot, or parallel to the long axis direction of the light spot.
  • a specific description is given by taking an example in which the polarization direction of the laser beam emitted by the semiconductor laser is parallel to the minor axis direction of the light spot.
  • the same semiconductor laser is used to emit laser beams whose polarization direction is perpendicular, it can be achieved by rotating the laser setting direction.
  • the laser incident surface is parallel to the plane formed by the xz axis.
  • the fast axis direction of the laser beam emitted by the first laser array group 111 is parallel to the y axis, and the slow axis direction is parallel to the x axis, then the fast axis direction of the laser beam emitted by the second laser array group 112 is parallel to the z axis, and the slow axis direction Parallel to the y axis, the fast axis direction of the laser beam emitted by the third laser array group 113 is parallel to the y axis, and the slow axis direction is parallel to the z axis.
  • the polarization directions of the emitted laser beams of the first laser array group 111 and the third laser array group 113 are both parallel to the plane formed by the xz axis, and the polarization direction of the emitted laser beams of the second laser array group 112 is perpendicular to the plane formed by the xz axis .
  • the short side directions of the light combining mirror 121 and the polarization combining mirror 122 are both parallel to the y-axis, and the strip-shaped reflection parts and transmission parts in the light combining mirror 121 are arranged along the long side direction.
  • the fast axis of the laser spot of the first laser array group 111 and the third laser array group 113 is parallel to the extending direction of the strip-shaped transmission part and the reflection part of the light combining mirror 121, so that the reflection part of the light combining mirror 121 is parallel to
  • the arrangement direction of the transmission part matches the arrangement direction of the lasers in the laser array group, which improves the emission efficiency of the laser beam.
  • the emitted laser beam of the first laser array group 111 and the emitted laser beam of the second laser array group 112 can be combined into the first combined laser beam after being acted by the polarization combiner 122.
  • a combined laser beam has a cross-shaped "cross” or "T” shape along a cross section perpendicular to the propagation direction. Among them, the laser beam emitted by the first laser array group 111 needs to be aligned with the transmission part of the light combining mirror 121 and incident.
  • the laser beam emitted by the third laser array group 113 needs to be aligned with the reflection part of the light combining mirror 121, so that the first laser array group 111, the second laser array group 112, and the light combining mirror can be combined with the light combining mirror and polarization combining mirror.
  • the emitted laser beams of the third laser array group 113 are combined.
  • Another laser light source device includes: a fourth laser array group 114, a fifth laser array group 115, a sixth laser array group 116, a light combining mirror 121, and a polarization The light combining mirror 122; the polarization combining mirror 122 is located on the light exit side of the light combining mirror 121.
  • each laser in the fourth laser array group 114, the fifth laser array group 115, and the sixth laser array group 116 can emit a laser beam, so the emitted light of the above three laser array groups includes multiple lasers. bundle.
  • the light combining mirror 121 includes: a transmissive part 1213 and a reflective part 1214 arranged alternately.
  • the laser beams emitted by the fourth laser array group 114 are incident on the transmission parts 1213 respectively, and the laser beams emitted by the fifth laser array group 115 are incident on the reflection parts 1214 respectively.
  • the polarization combiner 122 includes a transmissive surface and a reflective surface that are opposite to each other.
  • the lower surface of the polarization combiner 122 serves as the transmissive surface
  • the The upper surface serves as a reflective surface.
  • the laser beams emitted by the sixth laser array group 116 are incident on the reflection surface of the polarization combiner 122; the polarization directions of the laser beams emitted by the sixth laser array group 116 are the same as those of the fourth laser array group 114 and the fifth laser array group 115
  • the polarization directions of the emitted laser beams are all vertical.
  • the light combining mirror 121 is used to combine the laser beams incident on each transmission part 1213 and each reflection part 1214 and enter the transmission surface of the polarization combiner 122.
  • the polarization combiner 122 is used to combine the laser beams incident on the transmission surface and the reflection surface and emit them in a set direction.
  • the set direction is the light emitting direction of the laser light source device.
  • a reflective part and a transmissive part can be divided on a transparent substrate.
  • the anti-reflection coating is plated at the corresponding position of the reflection part, and the transmission-increasing film is plated or not at the corresponding position of the transmission part to keep the transparent state.
  • the reflective film and the anti-reflection film can adopt the principle of thin film interference. According to the incident angle of the fifth laser array group 115 to the reflective part and the wavelength of the laser emitted by the fifth laser array group, a dielectric film with a suitable refractive index and thickness can be set.
  • the light combining mirror 121 can combine the laser beams whose exit polarization directions of the fourth laser array group 114 and the fifth laser array group 115 are parallel to the incident surface, and then exit to the transmission surface of the polarization combining mirror 122.
  • the transmissive portion 1213 and the reflective portion 1214 provided on the light combining mirror 121 do not have a polarization selection function, and only transmit light incident on the transmissive portion and reflect light incident on the reflective portion.
  • the laser beams emitted by the fourth laser array group 114 need to be aligned with the transmission part 1213 of the light combining mirror 121 and incident, while the laser beams emitted by the fifth laser array group 115 need to be aligned with the reflection of the light combining mirror 121.
  • the portion 1214 is incident so that the light combining mirror 121 can combine the laser beams emitted by the fourth laser array group 114 and the fifth laser array group 115 and then emit them to the transmission surface of the polarization combining mirror 122.
  • the polarization combiner 122 may include a transparent substrate, and at least two dielectric layers alternately coated on the transparent substrate.
  • each dielectric layer Chooses the material and thickness of each dielectric layer according to the Bruce's theorem, and set the installation direction of each laser array group reasonably so that the polarization direction is parallel to the incident surface of the fourth laser array group 114 and the fifth laser array group 115
  • the combined laser beam is lensed when it enters the polarization combiner 122, so that the laser beams emitted by the sixth laser array group 116 whose polarization direction is perpendicular to the incident surface are reflected when they enter the polarization combiner 122, thereby mutually polarizing directions
  • the vertical laser beams merge.
  • the transmissive part 1213 and the reflective part 1214 in the light combining mirror 121 may be set to have an appropriate distance, so that the laser beams emitted by the fourth laser array group 114 are aligned with each of the light combining mirror 121
  • the transmission part 1213 is incident, and the laser beams emitted by the fifth laser array group 115 are aligned with the reflection parts 1214 of the light combining mirror 121 to be incident.
  • the placement direction of the laser array group determines the polarization direction of the laser light emitted by the laser array group.
  • the polarization direction of the laser beam emitted by the fourth laser array group 114 and the polarization direction of the laser beam emitted by the fifth laser array group 115 are both parallel to the incident surface when the incident combined light is reflected, and the sixth laser The polarization direction of the laser beam emitted by the array group 116 is perpendicular to the incident surface of the polarization combiner. Therefore, as shown in FIG.
  • the light-emitting surface of the fourth laser array group 114 and the light-emitting surface of the fifth laser array group 115 may be perpendicular to each other, and the light-emitting surface of the fifth laser array group 115 and the light-emitting surface of the sixth laser array group 116 may be perpendicular to each other.
  • the faces are parallel to each other.
  • the fifth laser array group 115 can be rotated by 90 degrees relative to the fourth laser array group 114 by taking the intersection of the light-emitting surface of the fourth laser array group 114 and the light-emitting surface of the fifth laser array group 115 as an axis;
  • the array group 116 can be rotated by 90 degrees with respect to the fifth laser array group 115 with a normal line perpendicular to the light-emitting surface of the fifth laser array group 115 as an axis.
  • each laser in the fourth laser array group 114, the fifth laser array group 115, and the sixth laser array group 116 may all be semiconductor lasers; then the output laser beams of the above-mentioned laser arrays have a fast axis and a slow axis. axis.
  • the shape of the polarization combining mirror 122 and the combining mirror 121 can be set to be rectangular; and the reflection portions 1213 and the transmission portions 1214 in the combining mirror 121 can be arranged parallel to the fourth laser
  • the slow axis direction of the emitted laser beam of the array group 114 is parallel and alternately arranged in stripe regions.
  • the fast axis directions of the emitted laser beams of the fourth laser array group 114 and the fifth laser array group 115 are both parallel to the extension direction of the strip-shaped transmission part and the strip-shaped reflection part, and the sixth laser array group 116 emits
  • the fast axis direction of the laser beam is perpendicular to the extending direction of the strip-shaped transmission part and the strip-shaped reflection part.
  • the laser beam emitted by a semiconductor laser generally has a unique polarization direction, which can be parallel to the short axis direction of the light spot or parallel to the long axis direction of the light spot.
  • a specific description is given by taking an example in which the polarization direction of the laser beam emitted by the semiconductor laser is parallel to the minor axis direction of the light spot.
  • the same semiconductor laser is used to emit a laser beam with a vertical polarization direction, it can be achieved by rotating the laser setting direction.
  • the laser incident surface is parallel to the plane formed by the xz axis.
  • the fast axis direction of the laser beam emitted by the fourth laser array group 114 is parallel to the y axis, and the slow axis direction is parallel to the x axis, so the fast axis direction of the laser beam emitted by the fifth laser array group 115 is parallel to the y axis and the slow axis direction Parallel to the z axis, the fast axis direction of the laser beam emitted by the sixth laser array group 116 is parallel to the z axis, and the slow axis direction is parallel to the y axis.
  • the polarization directions of the emitted laser beams of the fourth laser array group 114 and the fifth laser array group 115 are both parallel to the plane formed by the xz axis, and the polarization direction of the emitted laser beams of the sixth laser array group 116 is perpendicular to the plane formed by the xz axis .
  • the short side directions of the light combining mirror 121 and the polarization combining mirror 122 are both parallel to the y-axis, and the strip-shaped reflection parts and transmission parts in the light combining mirror 121 are arranged along the long side direction.
  • the fast axis of the laser spot of the fourth laser array group 114 and the fifth laser array group 115 is parallel to the extending direction of the strip-shaped transmission part and the reflection part of the light combining mirror 121, so that the reflection part of the light combining mirror 121 is parallel to
  • the arrangement direction of the transmission part matches the arrangement direction of the lasers in the laser array group, which improves the emission efficiency of the laser beam.
  • the emitted laser beam of the fourth laser array group 114 and the emitted laser beam of the fifth laser array group 115 can be combined into a second combined laser beam after being acted by the light combining mirror 121, and
  • the cross-section of the two-combined laser beam perpendicular to the propagation direction is rectangular.
  • the laser beams emitted by the fourth laser array group 114 need to be aligned with the transmission parts 1213 of the light combining mirror 121 respectively, and the laser beams emitted by the fifth laser array group 115 need to be aligned with the light combining mirror 121 respectively.
  • the reflection part 1214 is incident.
  • the polarization direction of the laser beam combined by the light combining mirror 121 is parallel to the incident surface, while the polarization direction of the outgoing laser beam of the sixth laser array group 116 is perpendicular to the incident surface, and the polarization combining mirror 122 parallels the polarization direction to the incident surface. And the laser beams whose polarization direction is perpendicular to the incident surface are combined.
  • the width of the laser beam emitted by the semiconductor laser along the fast axis direction is about 2.5 mm, and the width along the slow axis direction is about 1 mm.
  • the lasers in each group of laser arrays can be arranged along the slow axis direction of the laser spot.
  • a bank package with 2 ⁇ 4 laser beams is used.
  • an array composed of 6 2 ⁇ 4 lasers is combined with beams.
  • the laser spot size of each group of laser array is about 40mm ⁇ 40mm.
  • the size of the laser spot after the laser beams emitted by each group of laser arrays are combined through the above structure is basically unchanged, and is still about 40mm ⁇ 40mm.
  • the size of the light combining mirror 121 is about 57mm ⁇ 42mm, of which there are 4 reflecting parts and 3 transmission parts in between.
  • the size of each zone is about 8mm ⁇ 42mm, and the other two sides have more A side of 0.5mm is reserved for fixing with the structural member; the size of the polarization combiner 122 is approximately 69mm ⁇ 50mm.
  • the combined laser power is about 228W.
  • a polarization combining mirror and a combining mirror are used to combine the laser beams of three or more laser arrays. Way to increase the light energy of the light source.
  • the size of the combined laser beam is similar to that of the single laser array, and the power of the laser beam is significantly increased. Therefore, the purpose of increasing the laser output power is achieved, and there is no need to redesign the components after changing the optical path of the laser array, thereby saving design costs.
  • the laser light source device includes three groups of laser arrays
  • more groups of laser arrays can be added to enhance the laser output power.
  • a group of laser array groups 117 is added between the fifth laser array group 115 and the sixth laser array group 116.
  • the placement direction can be the same as the placement direction of the fifth laser array group 115; at the same time, a light combining mirror 121' is added to receive the laser beams emitted by the seventh laser array group 117.
  • each laser beam emitted from the fourth laser array group 114 is incident on each transmission part of the light combining mirror 121 to be transmitted, and each laser beam emitted from the fifth laser array group 115 is incident on the light combining mirror 121, respectively.
  • Each reflecting part is reflected, whereby the laser beams emitted by the fourth laser array group 114 and the fifth laser array group 115 are combined by the light combining mirror 121 and then respectively emitted to the transmission parts of the light combining mirror 121';
  • the transmission part of the mirror 121' transmits the combined laser beams of the fourth laser array group 114 and the fifth laser array group 115, and the laser beams emitted by the increased laser array group 117 are incident on the reflection parts of the combining mirror 121'.
  • the light combining mirror 121' combines the laser beams of the fourth laser array group 114, the fifth laser array group 115 and the added laser array group 117 and then exits to the polarization combining mirror 122 to combine the polarization directions of the laser beams Parallel to the incident surface.
  • the polarization combiner 122 transmits the laser beam whose polarization direction is parallel to the incident surface and then reflects it after receiving the laser beam from the sixth laser array group 116 whose polarization direction is perpendicular to the incident surface.
  • the outgoing laser beams of the group laser array are combined.
  • the polarization directions of the laser beams emitted by the fourth laser array group 114, the fifth laser array group 115, and the additional laser array group 117 are all parallel to the incident surface, so the strip reflection part of the light combining mirror 121, 121' can be set
  • the extension direction is parallel to the fast axis of each laser in the fourth laser array group 114, the fifth laser array group 115, and the added laser array group 117, so that the combining mirror can fully receive the incident laser beam, and merge the laser beams. It emits in the direction of transmission.
  • the width of the transmission part in the light combining mirror 121' needs to be larger than that of the light combining mirror 121
  • the width of the middle transmissive part is larger.
  • the pitch of the reflective part is correspondingly increased. Therefore, it is also necessary to adjust the pitch of the lasers in the laser array group 117.
  • the adaptive adjustment is made so that the emitted light of each laser in the laser array group 117 can be incident on each reflection part of the light combining mirror 121'.
  • more groups of laser arrays can be added to enhance the laser output power.
  • a group of laser array groups whose polarization direction is the third polarization direction can be added on the side of the third laser array group 113 away from the second laser array group 112, and a light combining mirror can be added accordingly to increase the reflection.
  • the outgoing laser beam of the laser array group If you need to further enhance the laser output intensity and add more groups of laser arrays, you need to increase the setting position of the laser array and the polarization direction of the emitted laser beam to set a suitable light combiner corresponding to it. List one by one.
  • the light combining mirror 121 and the polarization combining mirror 122 in the laser light source device can combine the emitted laser beams of at least three groups of laser arrays, and one group of laser arrays includes at least one laser array. Therefore, the present application In the above-mentioned laser light source device provided by the embodiment, the total number of light combining mirror 121 and polarization combining mirror 122 is at least one less than the number of laser arrays.
  • the laser array emits lasers simultaneously after the lasers are arranged in an array. In order to avoid crosstalk of the emitted lasers between adjacent lasers, a certain distance between the lasers needs to be maintained. Then, when the light combining mirror 121 is used to reflect the laser light emitted by the laser array, the width including the reflection portion needs to be set to match the width and spacing of the laser beam emitted by the laser.
  • the width of the reflection part in the light combining mirror may satisfy the following relationship: d>b>L/cos ⁇ .
  • b is the width of the reflection part
  • d is the distance between two adjacent lasers in the laser array
  • L is the width of the slow axis of the emitted laser beam
  • is the light-emitting surface of the reflection part and the laser array group incident on the reflection part The included angle.
  • each reflection part can completely receive each laser beam and completely reflect the received laser beam.
  • the angle between the reflection part of the combining mirror and the light-emitting surface of the laser array group incident on the reflection part is 45 degrees.
  • the width of the reflection part can be Set according to the following rules:
  • each reflection part can completely receive the laser beam and completely reflect the received laser beam.
  • the laser light source device further includes: a light source beam reduction component 13, which may be a transmission type beam reduction component or a reflection type Shrink beam components.
  • the light source beam reduction component is a transmission type component
  • the light source beam reduction component 13 includes: a positive transmission 131 and a negative lens 132 arranged in sequence along the light emission direction of the light combining lens group 12, and the positive lens 131
  • the image-side focal point coincides with the object-side focal point or the image-side focal point of the negative lens 132.
  • the positive transmission 131 and the negative lens 132 in Figure 7 constitute a telescope system, which can reduce the size of the incident parallel laser beam.
  • the reduced laser beam is more in line with the needs of the components in the subsequent optical path, and the reduced laser beam has more High energy density.
  • the light source beam reduction component 13 includes: a concave mirror 133 and a convex mirror 134 located on the light exit side of the light combining mirror group 12, and the focal point of the concave mirror 133 It coincides with the focal point of the convex mirror 134.
  • the output light of the light combining mirror group 12 first enters the concave mirror 133, is reflected by the concave mirror 133, and is condensed out to the convex mirror 134; then, after being reflected by the convex mirror 134, it is reduced and collimated out.
  • the type of the light source beam reduction component can be selected according to actual needs, which is not limited here.
  • the above-mentioned laser light source device provided by the embodiment of the present application further includes: a diffuser 14 and a dichroic mirror 15 located in the light-emitting direction of the light source shrinking assembly 13; The reflective fluorescent wheel 16 and the light path turning assembly 17 on the light path, the color filter wheel 18 and the light homogenizing component 19 on the side of the dichroic mirror 15 away from the reflective fluorescent wheel 16.
  • the laser beam is homogenized by a diffuser 14 to prevent uneven laser spot energy distribution and avoid laser beam damage.
  • the local light energy is large and burns the fluorescent wheel, resulting in a decrease in fluorescence conversion efficiency, and can also reduce laser speckle.
  • the dichroic mirror 15 can reflect blue light and transmit fluorescence.
  • the blue laser light is reflected by the dichroic mirror 15 and condensed and irradiated onto the reflective fluorescent wheel 16 through the lens.
  • the fluorescent wheel may be a reflective fluorescent wheel 16, which is divided into two areas, a reflective fluorescent powder area and a laser transmission portion.
  • the reflective fluorescent wheel 16 rotates, laser light periodically irradiates these two areas. After the phosphor area is irradiated by the laser, fluorescence will be generated, and the phosphor area has a back plate that can reflect light, so the excited fluorescence will be reflected by the back plate. Since the emission of fluorescence is non-directional and the angle is large, a lens is required for collimation. After the fluorescence reflected by the back plate is collimated by the lens, it is incident on the dichroic mirror 15 again and transmitted.
  • the laser light passes through the fluorescent wheel and exits from its back, and passes through the blue circuit formed by the optical path turning element 17 (generally including lenses, mirrors, diffusers, etc.)
  • the element reflects one round, and is incident on the dichroic mirror 15 again and is reflected.
  • the blue light is reflected by the dichroic mirror 15 and combined with the fluorescence (red fluorescence and green fluorescence), and then converged by a lens group, and then reaches the homogenizing part 19 after passing through the color filter wheel 18.
  • the color filter wheel 18 can provide three primary colors meeting the requirements according to the requirements of color purity. It rotates synchronously with the reflective fluorescent wheel 16, and has corresponding color divisions.
  • the filter wheel 18 rotates to the red filter region for color filtering
  • the green fluorescence passes through the corresponding green color filter area, and the three primary colors are obtained through the filter color wheel 18.
  • the light of the three primary colors passes through the homogenization effect of the light homogenizing component 19 and then exits to the subsequent light path.
  • the light homogenizing component 19 can be a light rod, a light pipe, etc., which is not limited here.
  • the laser projection equipment can use the three primary colors generated by the laser light source device to realize laser projection.
  • the laser projection equipment includes the above-mentioned laser light source device, as shown in FIG. 9, also includes: a light valve modulation component 200 located on the light exit side of the laser light source device, and a projection lens located on the light output side of the light valve modulation component 200 300.
  • the laser light source device can sequentially output light of different colors to be incident on the light valve modulation component 200, and the light valve modulation component 200 sequentially modulates the incident light of different colors, so that the image reflected to the projection lens 300 meets the requirements.
  • the laser projection device may be a Digital Light Processing (DLP) projection system
  • the light valve modulation component 200 may be a Digital Micromirror Device (DMD).
  • DLP Digital Light Processing
  • DMD Digital Micromirror Device
  • the laser light source device and laser projection equipment include: at least three sets of laser arrays, light combining mirrors, and polarization combining mirrors; wherein the polarization combining mirrors and light combining mirrors are both used for laser beam combining.
  • the polarization combining mirrors and light combining mirrors are both used for laser beam combining.
  • the size of the combined laser beam is similar to that of the single laser array, and the power of the laser beam is significantly increased. As a result, the purpose of increasing the laser output power and keeping the size of the laser beam is achieved, and there is no need to redesign the components after changing the optical path of the laser array, thereby saving design costs.

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Abstract

Disclosed are a laser light source apparatus and a laser projection device. The laser light source apparatus comprises at least three groups of laser arrays (111, 112, 113), a light combination reflecting mirror (121) and a polarization light combination mirror (122), wherein the polarization light combination mirror (122) and the light combination reflecting mirror (121) are both used for combining laser beams.

Description

激光光源装置及激光投影设备Laser light source device and laser projection equipment
本申请要求于2019年02月01日提交中国专利局、申请号为201910105630.8、申请名称为“激光光源装置和激光投影设备”,以及2019年02月01日提交中国专利局、申请号为201910104916.4、申请名称为“激光光源装置和激光投影设备”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application is required to be submitted to the Chinese Patent Office on February 1, 2019, with the application number of 201910105630.8, and the application name is "Laser light source device and laser projection equipment", and on February 1, 2019, to the Chinese Patent Office with the application number of 201910104916.4, The priority of the Chinese patent application named "laser light source device and laser projection equipment", the entire content of which is incorporated into this application by reference.
技术领域Technical field
本申请涉及投影显示领域,尤其涉及激光光源装置及激光投影设备。This application relates to the field of projection display, in particular to laser light source devices and laser projection equipment.
背景技术Background technique
激光因具有亮度高,单色性强,色域宽等优点被应用于投影显示领域,随着激光显示投影尺寸越来越大,对输出能量要求越来越高,因此对激光光源装置提出了更高要求。Lasers are used in the field of projection display due to their high brightness, strong monochromaticity, and wide color gamut. As the size of the laser display projection becomes larger and larger, the output energy requirements are higher and higher, so the laser light source device is proposed Higher requirements.
激光光源通常采用多个激光器构成的激光器阵列,当需要较高的激光光能量时,则需要增加激光器阵列的数量。然而当激光器阵列中的激光器数量增加时,如果合光光路设计不合理,容易导致最终激光器阵列出射激光光斑的尺寸也将随之增大。那么对于位于激光器阵列光路之后的各元件的通光孔径等参数均需要重新设计,导致光学镜片的尺寸增加。例如,如果将激光光源装置中耦合激光器由4组增加到6组时,激光光源装置出射光斑尺寸将增大50%。相应激光器光路后方的透镜等元件口径需要至少增大50%,且透镜的厚度也会增加,无疑会增加激光光源装置的设计成本和难度。The laser light source usually uses a laser array composed of multiple lasers. When higher laser light energy is required, the number of laser arrays needs to be increased. However, when the number of lasers in the laser array increases, if the design of the combined light optical path is unreasonable, it is easy to cause the size of the laser spot emitted by the final laser array to increase accordingly. Then, parameters such as the clear aperture of each element located behind the optical path of the laser array need to be redesigned, resulting in an increase in the size of the optical lens. For example, if the coupled lasers in the laser light source device are increased from 4 groups to 6 groups, the size of the light spot emitted by the laser light source device will increase by 50%. The diameter of the lens and other elements behind the corresponding laser light path needs to be increased by at least 50%, and the thickness of the lens will also increase, which will undoubtedly increase the design cost and difficulty of the laser light source device.
发明内容Summary of the invention
一方面,提供一种激光光源装置,包括:第一激光器阵列组,用于出射第一激光束;In one aspect, a laser light source device is provided, including: a first laser array group for emitting a first laser beam;
第二激光器阵列组,用于出射第二激光束,第二激光束的偏振方向与第一激光束的偏振方向相互垂直;The second laser array group is used to emit a second laser beam, the polarization direction of the second laser beam and the polarization direction of the first laser beam are perpendicular to each other;
第三激光器阵列组,用于出射第三激光束;The third laser array group is used to emit a third laser beam;
偏振合光镜,包括相对而置的透射面和反射面,其中透射面用于透射第一激光束,反射面用于反射第二激光束,偏振合光镜的位置被设置为使透射面透射的第一激光束和反射面反射的第二激光束向同一方向出射;The polarization combiner includes a transmissive surface and a reflective surface that are opposed to each other, wherein the transmissive surface is used to transmit the first laser beam, the reflective surface is used to reflect the second laser beam, and the position of the polarization combiner is set to transmit the transmissive surface The first laser beam and the second laser beam reflected by the reflecting surface are emitted in the same direction;
合光反射镜,位于偏振合光镜的出光侧,包括交替排列的透射部和反射部,其中透射部用于透射偏振合光镜出射的第一激光束和第二激光束的合光,反射部用于反射第三激光器阵列出射的第三激光束,合光镜的位置被设置为使透射部透射的第一激光束和第二激光束的合光与反射部反射的第三激光束向同一方向出射。The light combining mirror, located on the light exit side of the polarization combining mirror, includes alternately arranged transmission parts and reflection parts, wherein the transmission part is used to transmit and reflect the combined light of the first laser beam and the second laser beam emitted by the polarization combining mirror. The part is used to reflect the third laser beam emitted by the third laser array, and the position of the light combining mirror is set so that the combined light of the first laser beam and the second laser beam transmitted by the transmission part and the third laser beam reflected by the reflection part are directed Shoot out in the same direction.
另一方面,提供另一种激光光源装置,包括:第四激光器阵列组,用于出射第四激光束;On the other hand, another laser light source device is provided, including: a fourth laser array group for emitting a fourth laser beam;
第五激光器阵列组,用于出射第五激光束;The fifth laser array group is used to emit the fifth laser beam;
第六激光器阵列组,用于出射第六激光束,其中第六激光束的偏振方向与第四激光束、第五激光束的偏振方向均垂直;The sixth laser array group is used to emit a sixth laser beam, wherein the polarization direction of the sixth laser beam is perpendicular to the polarization directions of the fourth laser beam and the fifth laser beam;
合光反射镜,包括交替排列的透射部和反射部,透射部用于透射第四激光束,反射部用于反射第五激光束,合光反射镜被设置为使透射部透射的第四激光束和反射部反射的第五激光束向同一方向出射;The light combining mirror includes alternately arranged transmissive parts and reflective parts, the transmissive part is used to transmit the fourth laser beam, the reflective part is used to reflect the fifth laser beam, and the light combining mirror is set to make the fourth laser transmitted by the transmissive part The beam and the fifth laser beam reflected by the reflecting part are emitted in the same direction;
偏振合光镜,位于合光反射镜的出光侧,包括相对设置的透射 面和反射面,反射面用于反射第六激光束,透射面用于透射合光反射镜出射的第四激光束和第五激光束,偏振合光镜的位置被设置为使透射面透射的第四激光束、第五激光束和反射面反射的第六激光束向同一方向出射。The polarization combining mirror is located on the light exit side of the combining mirror and includes a transmission surface and a reflection surface that are oppositely arranged. The reflection surface is used to reflect the sixth laser beam, and the transmission surface is used to transmit the fourth laser beam emitted by the combining mirror and For the fifth laser beam, the position of the polarization combiner is set so that the fourth laser beam, the fifth laser beam and the sixth laser beam reflected by the reflective surface are emitted in the same direction.
另一方面,提供一种激光投影设备,包括上述任一激光光源装置,位于所述激光光源装置出光方向上的光调制器件,以及位于所述光调制器件出光侧的投影镜头。In another aspect, a laser projection device is provided, which includes any of the above-mentioned laser light source devices, a light modulation device located in the light exit direction of the laser light source device, and a projection lens located on the light exit side of the light modulation device.
附图说明Description of the drawings
为了更清楚地说明本申请实施例的技术方案,下面将对本申请实施例中所需要使用的附图作简单地介绍,显而易见地,下面所介绍的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the technical solutions of the embodiments of the present application more clearly, the following will briefly introduce the drawings that need to be used in the embodiments of the present application. Obviously, the drawings described below are only some embodiments of the present application. A person of ordinary skill in the art can obtain other drawings based on these drawings without creative work.
图1为本申请一些实施例提供的一种激光光源装置的结构示意图;FIG. 1 is a schematic structural diagram of a laser light source device provided by some embodiments of this application;
图2为本申请一些实施例提供的一种合光反射镜的结构示意图;FIG. 2 is a schematic structural diagram of a light combining mirror provided by some embodiments of the application;
图3为本申请一些实施实施例提供的再一种激光光源装置的结构示意图;FIG. 3 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application;
图4为本申请一些实施实施例提供的再一种合光反射镜的结构示意图;4 is a schematic structural diagram of still another light combining mirror provided by some embodiments of this application;
图5为本申请一些实施实施例提供的再一种激光光源装置的结构示意图;FIG. 5 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application;
图6为本申请一些实施实施例提供的再一种激光光源装置的结构示意图;FIG. 6 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application;
图7为本申请一些实施实施例提供的再一种激光光源装置的 结构示意图;FIG. 7 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application;
图8为本申请一些实施实施例提供的再一种激光光源装置的结构示意图;FIG. 8 is a schematic structural diagram of still another laser light source device provided by some embodiments of this application;
图9为本申请一些实施实施例提供的再一种激光投影设备的结构示意图。FIG. 9 is a schematic structural diagram of still another laser projection device provided by some embodiments of this application.
具体实施方式detailed description
为了使本申请的目的、技术方案和优点更加清楚,下面将结合附图对本申请作进一步地详细描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本申请保护的范围。In order to make the purpose, technical solutions, and advantages of the application more clear, the application will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the application, rather than all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of this application.
下面结合附图详细介绍本申请具体实施例提供的激光光源装置及激光投影设备。The laser light source device and laser projection equipment provided by specific embodiments of the present application will be described in detail below with reference to the accompanying drawings.
本申请实施例提供一种激光光源装置,如图1所示,包括:第一激光器阵列组111、第二激光器阵列组112、第三激光器阵列组113、合光反射镜121以及偏振合光镜122。合光反射镜121位于偏振合光镜122的出光侧。An embodiment of the application provides a laser light source device, as shown in FIG. 1, comprising: a first laser array group 111, a second laser array group 112, a third laser array group 113, a light combining mirror 121, and a polarization combining mirror 122. The light combining mirror 121 is located on the light exit side of the polarization combining mirror 122.
在具体实施时,第一激光器阵列组111、第二激光器阵列组112及第三激光器阵列组113中的各激光器均可以出射激光束,因此上述三个激光器阵列组的出射光均包括多个激光束。In specific implementation, each laser in the first laser array group 111, the second laser array group 112, and the third laser array group 113 can emit a laser beam, so the emitted light of the above three laser array groups includes multiple lasers. bundle.
其中,偏振合光镜122包括相对而置的透射面和反射面,在本申请实施例中,如图1所示,偏振合光镜122的下表面作为透射面,偏振合光镜122的上表面作为反射面。第一激光器阵列组111出射的各激光束向偏振合光镜122的透射面入射;第二激光器阵列组112出射的各激光束向偏振合光镜122的反射面入射;第一激光器阵列组 111出射的各激光束的偏振方向与第二激光器阵列组112出射的各激光束的偏振方向相互垂直。The polarization combiner 122 includes a transmissive surface and a reflective surface that are opposed to each other. In the embodiment of the present application, as shown in FIG. 1, the lower surface of the polarized light combiner 122 serves as the transmissive surface, and the upper surface of the polarized light combiner 122 The surface acts as a reflective surface. The laser beams emitted by the first laser array group 111 are incident on the transmission surface of the polarization combiner 122; the laser beams emitted by the second laser array group 112 are incident on the reflection surface of the polarization combiner 122; the first laser array group 111 The polarization direction of each laser beam emitted and the polarization direction of each laser beam emitted by the second laser array group 112 are perpendicular to each other.
进一步地,如图2所示,合光反射镜121包括:交替排列的透射部1211和反射部1212。第三激光器阵列组113出射的各激光束分别向各反射部1212入射。Further, as shown in FIG. 2, the light combining mirror 121 includes: a transmissive part 1211 and a reflective part 1212 arranged alternately. The laser beams emitted from the third laser array group 113 are incident on the reflection parts 1212 respectively.
在本申请一些实施例提供的上述激光光源装置中,偏振合光镜122,用于将透射面及反射面入射的各激光束合并,分别向合光反射镜121的各透射部1211入射。合光反射镜121,用于将各透射部1211和各反射部1212入射的各激光束合并,向设定方向出射。该设定方向为激光光源装置的出光方向。In the above-mentioned laser light source device provided by some embodiments of the present application, the polarization combining mirror 122 is used to combine the laser beams incident on the transmission surface and the reflection surface, and respectively enter the transmission portions 1211 of the combining mirror 121. The light combining mirror 121 is used to combine the laser beams incident on the transmissive parts 1211 and the reflective parts 1212 and emit them in a set direction. The set direction is the light emitting direction of the laser light source device.
具体来说,偏振合光镜122可包括透明基板,以及在该透明基板之上的交替涂覆的至少两种介电质层。根据布儒斯特定理来选择各介电质层的材料和厚度,并合理设置各激光器阵列组的安装方向,使偏振方向平行于入射面的第一激光器阵列组111出射的各激光束在入射偏振合光镜122时被透射,使偏振方向垂直于入射面的第二激光器阵列组112出射的各激光束在入射偏振合光镜122时被反射,从而将偏振方向相互垂直的两组激光器阵列出射的各激光束合并后向合光反射镜出射。Specifically, the polarization combiner 122 may include a transparent substrate, and at least two dielectric layers alternately coated on the transparent substrate. Choose the material and thickness of each dielectric layer according to Brews’s theorem, and set the installation direction of each laser array group reasonably so that the polarization direction is parallel to the incident surface of the laser beams emitted by the first laser array group 111. When the polarization combiner 122 is transmitted, the laser beams emitted by the second laser array group 112 whose polarization direction is perpendicular to the incident surface are reflected when incident on the polarization combiner 122, so that the polarization directions are perpendicular to each other. The emitted laser beams are combined and then emitted toward the light combining mirror.
进一步地,在制作合光反射镜121时,可以先在透明基板上划分出反射部和透射部。并在反射部对应位置处镀反射膜,而在透射部对应位置处镀增透膜或不镀膜保持透明状态。在本申请实施例中,合光反射镜121的反射部同时具有偏振选择的作用,反射部1211内的反射膜可以包括层叠设置的至少两种介电质层,通过设置介电质层的折射率以及厚度可以使得该反射部可以反射偏振方向平行于入射面的入射光同时透射偏振方向垂直于入射面的入射光。而透射部1211 则不具有偏振选择的作用,既可以透射偏振方向平行于入射面的入射光也可以透射偏振方向垂直于入射面的入射光。Further, when manufacturing the light combining mirror 121, the reflective part and the transmissive part can be divided on the transparent substrate first. And the reflective film is plated at the corresponding position of the reflective part, and the anti-reflection film is plated or not coated at the corresponding position of the transmissive part to maintain the transparent state. In the embodiment of the present application, the reflection part of the light combining mirror 121 also has the function of polarization selection. The reflection film in the reflection part 1211 may include at least two kinds of dielectric layers stacked and arranged. The ratio and thickness can enable the reflecting part to reflect incident light whose polarization direction is parallel to the incident surface and transmit incident light whose polarization direction is perpendicular to the incident surface. The transmission part 1211 does not have the function of polarization selection, and can transmit incident light whose polarization direction is parallel to the incident surface or transmit incident light whose polarization direction is perpendicular to the incident surface.
在本申请一些实施例中,可以设置合光反射镜121中的透射部1211和反射部1212具有合适的间距,使得偏振合光镜的合并的各激光束中偏振方向平行于入射面的分量可以完全通过合光反射镜121的透射部1211,偏振方向垂直于入射面的分量可以同时入射至合光反射镜121的透射部1211和反射部1212;而第三激光器阵列组113出射的各激光束又可以分别入射至反射部1212。由此,采用偏振合光镜122配合合光反射镜121可以将三组激光器阵列的激光束合并来提高激光的出射功率。In some embodiments of the present application, the transmissive part 1211 and the reflective part 1212 in the light combining mirror 121 can be set to have an appropriate distance, so that the components of the combined laser beams of the polarization combining mirror whose polarization direction is parallel to the incident surface can be Completely pass through the transmission part 1211 of the light combining mirror 121, and the component whose polarization direction is perpendicular to the incident plane can be incident on the transmission part 1211 and the reflection part 1212 of the light combining mirror 121 at the same time; and the laser beams emitted by the third laser array group 113 It can also be incident on the reflecting part 1212 respectively. Therefore, the use of the polarization combining mirror 122 and the combining mirror 121 can combine the laser beams of the three groups of laser arrays to increase the output power of the laser.
在具体实施时,激光器阵列组的摆放方向决定了该激光器阵列组出射激光的偏振方向。在本申请实施例中,第一激光器阵列组111出射的激光束的偏振方向和第三激光器阵列组113出射的激光束的偏振方向均平行于入射偏振合光镜或合光反射镜时的入射面,而第二激光器阵列组112出射的激光束的偏振方向垂直于入射偏振合光镜时的入射面。因此,如图1所示,可设置第一激光器阵列组111的出光面与第二激光器阵列组112的出光面相互垂直,第二激光器阵列组112的出光面与第三激光器阵列组113的出光面相互平行。其中,第二激光器阵列组112可相对于第三激光器阵列组113以垂直于第三激光器阵列组的出光面的法线为轴旋转90度旋转进行放置;第三激光器阵列组113可相于对第一激光器阵列组111以第一激光器阵列组的出光面与第三激光器阵列组的出光面的交线为轴旋转90度进行放置。上述第一激光器阵列组111、第二激光器阵列组112以及第三激光器阵列组113中的各激光器可均采用半导体激光器;半导体激光器输出的光束具有快轴和慢轴,慢轴方向激光的发散角度约为±10°,快轴 方向激光的发散角度约为±30°。那么激光器出射的激光束经准直后,光斑的快轴方向尺寸大于慢轴方向,呈矩形或椭圆形光斑,光斑长边/长轴方向为快轴方向,光斑短边/短轴方向为慢轴方向。In specific implementation, the placement direction of the laser array group determines the polarization direction of the laser light emitted by the laser array group. In the embodiment of the present application, the polarization direction of the laser beam emitted by the first laser array group 111 and the polarization direction of the laser beam emitted by the third laser array group 113 are both parallel to the incidence of the polarization combining mirror or the combining mirror. The polarization direction of the laser beam emitted by the second laser array group 112 is perpendicular to the incident surface of the polarization combiner. Therefore, as shown in FIG. 1, the light-emitting surface of the first laser array group 111 and the light-emitting surface of the second laser array group 112 may be perpendicular to each other, and the light-emitting surface of the second laser array group 112 and the light-emitting surface of the third laser array group 113 may be perpendicular to each other. The faces are parallel to each other. Wherein, the second laser array group 112 can be rotated by 90 degrees with respect to the third laser array group 113 with the normal line perpendicular to the light exit surface of the third laser array group as an axis; the third laser array group 113 can be opposite to The first laser array group 111 is rotated by 90 degrees with the intersection of the light exit surface of the first laser array group and the light exit surface of the third laser array group as an axis. The lasers in the first laser array group 111, the second laser array group 112, and the third laser array group 113 can all be semiconductor lasers; the beam output by the semiconductor laser has a fast axis and a slow axis, and the divergence angle of the laser in the direction of the slow axis It is about ±10°, and the divergence angle of the laser in the fast axis direction is about ±30°. Then after the laser beam emitted by the laser is collimated, the size of the spot in the fast axis direction is larger than the slow axis direction, and it is a rectangular or elliptical spot. The long side/long axis direction of the spot is the fast axis direction, and the short side/short axis direction of the spot is slow. Axis direction.
为了配合激光光斑的形状,本申请实施例提供的上述偏振合光镜122与合光反射镜121形状可均设置为矩形;且合光反射镜121中的各反射部1212和各透射部1211可设置为沿平行于第一激光器阵列组111的出射激光束的慢轴方向平行交替排列的条形区域。In order to match the shape of the laser spot, the above-mentioned polarization combining mirror 122 and light combining mirror 121 provided in the embodiments of the present application can be configured to be rectangular; and each reflecting portion 1212 and each transmitting portion 1211 in the combining mirror 121 can be They are arranged as strip-shaped regions that are alternately arranged in parallel along the slow axis direction of the emitted laser beam of the first laser array group 111.
为了减小激光器阵列的整体尺寸,激光器一般沿着慢轴方向进行排列,为了使激光第一激光器阵列组111的激光束在经过偏振合光镜122之后可以完全通过合光反射镜121的透射部1211,则可以设置第一激光器阵列组111的出射激光束的快轴方向平行于上述条形透射部和条形反射部的延伸方向,设置第二激光器阵列组112的出射激光束的快轴方向垂直于上述条形透射部和条形反射部的延伸方向,设置第三激光器阵列组113的出射激光束的快轴方向平行于上述条形透射部和条形反射部的延伸方向。In order to reduce the overall size of the laser array, the lasers are generally arranged along the slow axis direction, so that the laser beam of the first laser array group 111 can completely pass through the transmission part of the light combining mirror 121 after passing through the polarization combining mirror 122 1211, the fast axis direction of the emitted laser beam of the first laser array group 111 can be set parallel to the extension direction of the strip-shaped transmission part and the strip-shaped reflection part, and the fast axis direction of the emitted laser beam of the second laser array group 112 can be set The fast axis direction of the emitted laser beam of the third laser array group 113 is arranged perpendicular to the extension direction of the strip-shaped transmission part and the strip-shaped reflection part, and is parallel to the extension direction of the strip-shaped transmission part and the strip-shaped reflection part.
半导体激光器出射的激光束具有唯一的偏振方向,偏振方向可平行于光斑的短轴方向,也可平行于光斑的长轴方向。以半导体激光器出射的激光束的偏振方向平行于光斑的短轴方向为例进行具体说明。在采用相同的半导体激光器出射偏振方向相垂直的激光束时,可以通过旋转激光器设置方向来实现,例如,在三维坐标系中,当第一激光器阵列组111的出光面在x-y轴构成的平面内时,第二激光器阵列组112和第三激光器阵列组113的出光面在y-z轴构成的平面,则激光入射面平行于x-z轴构成的平面。第一激光器阵列组111出射的激光束的快轴方向平行于y轴,慢轴方向平行于x轴,则第二激光器阵列组112出射的激光束的快轴方向平行于z轴,慢轴方向平行于y 轴,第三激光器阵列组113出射的激光束的快轴方向平行于y轴,慢轴方向平行于z轴。第一激光器阵列组111和第三激光器阵列组113的出射激光束的偏振方向均平行于x-z轴构成的平面,而第二激光器阵列组112的出射激光束的偏振方向垂直于x-z轴构成的平面。此时,可以设置合光反射镜121和偏振合光镜122的短边方向均平行于y轴,合光反射镜121中的条形反射部和透射部沿长边方向排列。第一激光器阵列组111以及第三激光器阵列组113的激光光斑的快轴与合光反射镜121的条形透射部以及反射部的延伸方向相平行,使合光反射镜121中的反射部和透射部的排列方向与激光器阵列组中激光器的排列方向相匹配,提高激光束的出射效率。The laser beam emitted by the semiconductor laser has a unique polarization direction, and the polarization direction can be parallel to the short axis direction of the light spot, or parallel to the long axis direction of the light spot. A specific description is given by taking an example in which the polarization direction of the laser beam emitted by the semiconductor laser is parallel to the minor axis direction of the light spot. When the same semiconductor laser is used to emit laser beams whose polarization direction is perpendicular, it can be achieved by rotating the laser setting direction. For example, in a three-dimensional coordinate system, when the light-emitting surface of the first laser array group 111 is in the plane formed by the xy axis When the light exit surfaces of the second laser array group 112 and the third laser array group 113 are on the plane formed by the yz axis, the laser incident surface is parallel to the plane formed by the xz axis. The fast axis direction of the laser beam emitted by the first laser array group 111 is parallel to the y axis, and the slow axis direction is parallel to the x axis, then the fast axis direction of the laser beam emitted by the second laser array group 112 is parallel to the z axis, and the slow axis direction Parallel to the y axis, the fast axis direction of the laser beam emitted by the third laser array group 113 is parallel to the y axis, and the slow axis direction is parallel to the z axis. The polarization directions of the emitted laser beams of the first laser array group 111 and the third laser array group 113 are both parallel to the plane formed by the xz axis, and the polarization direction of the emitted laser beams of the second laser array group 112 is perpendicular to the plane formed by the xz axis . At this time, it can be set that the short side directions of the light combining mirror 121 and the polarization combining mirror 122 are both parallel to the y-axis, and the strip-shaped reflection parts and transmission parts in the light combining mirror 121 are arranged along the long side direction. The fast axis of the laser spot of the first laser array group 111 and the third laser array group 113 is parallel to the extending direction of the strip-shaped transmission part and the reflection part of the light combining mirror 121, so that the reflection part of the light combining mirror 121 is parallel to The arrangement direction of the transmission part matches the arrangement direction of the lasers in the laser array group, which improves the emission efficiency of the laser beam.
通过旋转半导体激光器的设置方向,可以使第一激光器阵列组111的出射激光束与第二激光器阵列组112的出射激光束经过偏振合光镜122的作用后合并为第一合并激光束,且第一合并激光束沿垂直于传播方向的截面为交叉的“十”字形或“T”字形。其中,第一激光器阵列组111出射的激光束需要对准合光反射镜121的透射部入射。第三激光器阵列组113出射的激光束需要对准合光反射镜121的反射部,由此通过合光反射镜和偏振合光镜可以将第一激光器阵列组111、第二激光器阵列组112以及第三激光器阵列组113的出射激光束合并。By rotating the arrangement direction of the semiconductor laser, the emitted laser beam of the first laser array group 111 and the emitted laser beam of the second laser array group 112 can be combined into the first combined laser beam after being acted by the polarization combiner 122. A combined laser beam has a cross-shaped "cross" or "T" shape along a cross section perpendicular to the propagation direction. Among them, the laser beam emitted by the first laser array group 111 needs to be aligned with the transmission part of the light combining mirror 121 and incident. The laser beam emitted by the third laser array group 113 needs to be aligned with the reflection part of the light combining mirror 121, so that the first laser array group 111, the second laser array group 112, and the light combining mirror can be combined with the light combining mirror and polarization combining mirror. The emitted laser beams of the third laser array group 113 are combined.
本申请一些实施例提供的另一种激光光源装置,如图3所示,包括:第四激光器阵列组114、第五激光器阵列组115、第六激光器阵列组116、合光反射镜121以及偏振合光镜122;偏振合光镜122位于合光反射镜121的出光侧。Another laser light source device provided by some embodiments of the present application, as shown in FIG. 3, includes: a fourth laser array group 114, a fifth laser array group 115, a sixth laser array group 116, a light combining mirror 121, and a polarization The light combining mirror 122; the polarization combining mirror 122 is located on the light exit side of the light combining mirror 121.
在具体实施时,第四激光器阵列组114、第五激光器阵列组115及第六激光器阵列组116中的各激光器均可以出射激光束,因此上述 三个激光器阵列组的出射光均包括多个激光束。In specific implementation, each laser in the fourth laser array group 114, the fifth laser array group 115, and the sixth laser array group 116 can emit a laser beam, so the emitted light of the above three laser array groups includes multiple lasers. bundle.
其中,如图4所示,合光反射镜121包括:交替排列的透射部1213和反射部1214。第四激光器阵列组114出射的各激光束分别向各透射部1213入射,第五激光器阵列组115出射的各激光束分别向各反射部1214入射。Among them, as shown in FIG. 4, the light combining mirror 121 includes: a transmissive part 1213 and a reflective part 1214 arranged alternately. The laser beams emitted by the fourth laser array group 114 are incident on the transmission parts 1213 respectively, and the laser beams emitted by the fifth laser array group 115 are incident on the reflection parts 1214 respectively.
进一步地,偏振合光镜122包括相对而置的透射面和反射面,在本申请实施例中,如图3所示,偏振合光镜122的下表面作为透射面,偏振合光镜122的上表面作为反射面。第六激光器阵列组116出射的各激光束向偏振合光镜122的反射面入射;第六激光器阵列组116出射的各激光束的偏振方向与第四激光器阵列组114、第五激光器阵列组115出射的各激光束的偏振方向均垂直。Further, the polarization combiner 122 includes a transmissive surface and a reflective surface that are opposite to each other. In the embodiment of the present application, as shown in FIG. 3, the lower surface of the polarization combiner 122 serves as the transmissive surface, and the The upper surface serves as a reflective surface. The laser beams emitted by the sixth laser array group 116 are incident on the reflection surface of the polarization combiner 122; the polarization directions of the laser beams emitted by the sixth laser array group 116 are the same as those of the fourth laser array group 114 and the fifth laser array group 115 The polarization directions of the emitted laser beams are all vertical.
在本申请一些实施例提供的上述激光光源装置中,合光反射镜121,用于将各透射部1213和各反射部1214入射的各激光束合并,向偏振合光镜122的透射面入射。偏振合光镜122,用于将透射面及反射面入射的各激光束合并,向设定方向出射。该设定方向为激光光源装置的出光方向。In the above-mentioned laser light source device provided by some embodiments of the present application, the light combining mirror 121 is used to combine the laser beams incident on each transmission part 1213 and each reflection part 1214 and enter the transmission surface of the polarization combiner 122. The polarization combiner 122 is used to combine the laser beams incident on the transmission surface and the reflection surface and emit them in a set direction. The set direction is the light emitting direction of the laser light source device.
具体来说,合光反射镜121在制作时,可以在透明基板上划分出反射部和透射部。并在第反射部对应位置处镀增反膜,而在透射部对应位置处镀增透射膜或不镀膜保持透明状态。其中反射膜和增透膜可以采用薄膜干涉原理,根据第五激光器阵列组115入射到反射部的入射角度以及第五激光器阵列组出射激光的波长来设置合适折射率以及厚度的介质薄膜,用于对入射的第五激光器阵列组115的激光束产生增反作用;根据第四激光器阵列组114入射到透射部的入射角度以及第四激光器阵列组出射激光的波长设置合适折射率以及厚度的介质薄膜,用于对入射的第四激光器阵列组114的激光束产生增透作 用。由此,合光反射镜121可以将第四激光器阵列组114和第五激光器阵列组115的出射偏振方向平行于入射面的激光束合并后向偏振合光镜122的透射面出射。Specifically, when the light combining mirror 121 is manufactured, a reflective part and a transmissive part can be divided on a transparent substrate. And the anti-reflection coating is plated at the corresponding position of the reflection part, and the transmission-increasing film is plated or not at the corresponding position of the transmission part to keep the transparent state. The reflective film and the anti-reflection film can adopt the principle of thin film interference. According to the incident angle of the fifth laser array group 115 to the reflective part and the wavelength of the laser emitted by the fifth laser array group, a dielectric film with a suitable refractive index and thickness can be set. Increase the reaction to the incident laser beam of the fifth laser array group 115; according to the incident angle of the fourth laser array group 114 to the transmissive part and the wavelength of the laser emitted by the fourth laser array group, a dielectric film with an appropriate refractive index and thickness is set, It is used to produce an anti-reflection effect on the incident laser beam of the fourth laser array group 114. In this way, the light combining mirror 121 can combine the laser beams whose exit polarization directions of the fourth laser array group 114 and the fifth laser array group 115 are parallel to the incident surface, and then exit to the transmission surface of the polarization combining mirror 122.
本申请一些实施例中,合光反射镜121所设置的透射部1213和反射部1214不具有偏振选择的作用,仅仅将入射到透射部的光线透射,将入射到反射部的光线反射。相应地,第四激光器阵列组114出射的各激光束需要对准合光反射镜121的透射部1213入射,而第五激光器阵列组115出射的各激光束需要对准合光反射镜121的反射部1214入射,以使合光反射镜121可将第四激光器阵列组114以及第五激光器阵列组115出射的各激光束合并后向偏振合光镜122的透射面出射。进一步地,偏振合光镜122可包括透明基板,以及在该透明基板之上的交替涂覆的至少两种介电质层。根据布儒斯特定理来选择各介电质层的材料和厚度,并合理设置各激光器阵列组的安装方向,使偏振方向平行于入射面的第四激光器阵列组114以及第五激光器阵列组115的合并激光束在入射偏振合光镜122时被透镜,使偏振方向垂直于入射面的第六激光器阵列组116出射的各激光束在入射偏振合光镜122时被反射,从而将偏振方向相互垂直的激光束合并。In some embodiments of the present application, the transmissive portion 1213 and the reflective portion 1214 provided on the light combining mirror 121 do not have a polarization selection function, and only transmit light incident on the transmissive portion and reflect light incident on the reflective portion. Correspondingly, the laser beams emitted by the fourth laser array group 114 need to be aligned with the transmission part 1213 of the light combining mirror 121 and incident, while the laser beams emitted by the fifth laser array group 115 need to be aligned with the reflection of the light combining mirror 121. The portion 1214 is incident so that the light combining mirror 121 can combine the laser beams emitted by the fourth laser array group 114 and the fifth laser array group 115 and then emit them to the transmission surface of the polarization combining mirror 122. Further, the polarization combiner 122 may include a transparent substrate, and at least two dielectric layers alternately coated on the transparent substrate. Choose the material and thickness of each dielectric layer according to the Bruce's theorem, and set the installation direction of each laser array group reasonably so that the polarization direction is parallel to the incident surface of the fourth laser array group 114 and the fifth laser array group 115 The combined laser beam is lensed when it enters the polarization combiner 122, so that the laser beams emitted by the sixth laser array group 116 whose polarization direction is perpendicular to the incident surface are reflected when they enter the polarization combiner 122, thereby mutually polarizing directions The vertical laser beams merge.
在本申请一些实施例中,可以设置合光反射镜121中的透射部1213和反射部1214具有合适的间距,使得第四激光器阵列组114出射的各激光束对准合光反射镜121的各透射部1213入射,并使得第五激光器阵列组115出射的各激光束对准合光反射镜121的各反射部1214入射。In some embodiments of the present application, the transmissive part 1213 and the reflective part 1214 in the light combining mirror 121 may be set to have an appropriate distance, so that the laser beams emitted by the fourth laser array group 114 are aligned with each of the light combining mirror 121 The transmission part 1213 is incident, and the laser beams emitted by the fifth laser array group 115 are aligned with the reflection parts 1214 of the light combining mirror 121 to be incident.
在具体实施时,激光器阵列组的摆放方向决定了该激光器阵列组出射激光的偏振方向。在本申请实施例中,第四激光器阵列组114出射的激光束的偏振方向和第五激光器阵列组115出射的激光束的 偏振方向均平行于入射合光反射时的入射面,而第六激光器阵列组116出射的激光束的偏振方向垂直于入射偏振合光镜时的入射面。因此,如图3所示,可设置第四激光器阵列组114的出光面与第五激光器阵列组115的出光面相互垂直,第五激光器阵列组115的出光面与第六激光器阵列组116的出光面相互平行。其中,第五激光器阵列组115可相对于第四激光器阵列组114以第四激光器阵列组114的出光面与第五激光器阵列组115的出光面的交线为轴旋转90度进行放置;六激光器阵列组116可相对于第五激光器阵列组115以垂直于第五激光器阵列组115出光面的法线为轴旋转90度进行放置。In specific implementation, the placement direction of the laser array group determines the polarization direction of the laser light emitted by the laser array group. In the embodiment of the present application, the polarization direction of the laser beam emitted by the fourth laser array group 114 and the polarization direction of the laser beam emitted by the fifth laser array group 115 are both parallel to the incident surface when the incident combined light is reflected, and the sixth laser The polarization direction of the laser beam emitted by the array group 116 is perpendicular to the incident surface of the polarization combiner. Therefore, as shown in FIG. 3, the light-emitting surface of the fourth laser array group 114 and the light-emitting surface of the fifth laser array group 115 may be perpendicular to each other, and the light-emitting surface of the fifth laser array group 115 and the light-emitting surface of the sixth laser array group 116 may be perpendicular to each other. The faces are parallel to each other. Among them, the fifth laser array group 115 can be rotated by 90 degrees relative to the fourth laser array group 114 by taking the intersection of the light-emitting surface of the fourth laser array group 114 and the light-emitting surface of the fifth laser array group 115 as an axis; The array group 116 can be rotated by 90 degrees with respect to the fifth laser array group 115 with a normal line perpendicular to the light-emitting surface of the fifth laser array group 115 as an axis.
在具体实施时,上述第四激光器阵列组114、第五激光器阵列组115以及第六激光器阵列组116中的各激光器可均采用半导体激光器;则上述各激光器阵列的出射激光束具有快轴和慢轴。In specific implementation, each laser in the fourth laser array group 114, the fifth laser array group 115, and the sixth laser array group 116 may all be semiconductor lasers; then the output laser beams of the above-mentioned laser arrays have a fast axis and a slow axis. axis.
配合激光光斑的形状,偏振合光镜122与合光反射镜121形状可均设置为矩形;且合光反射镜121中的各反射部1213和各透射部1214可设置为沿平行于第四激光器阵列组114的出射激光束的慢轴方向平行交替排列的条形区域。According to the shape of the laser spot, the shape of the polarization combining mirror 122 and the combining mirror 121 can be set to be rectangular; and the reflection portions 1213 and the transmission portions 1214 in the combining mirror 121 can be arranged parallel to the fourth laser The slow axis direction of the emitted laser beam of the array group 114 is parallel and alternately arranged in stripe regions.
其中,可设置第四激光器阵列组114以及第五激光器阵列组115的出射激光束的快轴方向均平行于上述条形透射部和条形反射部的延伸方向,第六激光器阵列组116的出射激光束的快轴方向垂直于上述条形透射部和条形反射部的延伸方向。Wherein, it can be set that the fast axis directions of the emitted laser beams of the fourth laser array group 114 and the fifth laser array group 115 are both parallel to the extension direction of the strip-shaped transmission part and the strip-shaped reflection part, and the sixth laser array group 116 emits The fast axis direction of the laser beam is perpendicular to the extending direction of the strip-shaped transmission part and the strip-shaped reflection part.
半导体激光器出射激光束一般具有唯一的偏振方向,偏振方向可平行于光斑的短轴方向,也可平行于光斑的长轴方向。以半导体激光器出射的激光束的偏振方向平行于光斑的短轴方向为例进行具体说明。在采用相同的半导体激光器出射偏振方向相垂直的激光束时,可以通过旋转激光器设置方向来实现,例如,在三维坐标系中,当第 四激光器阵列组114的出光面在x-y轴构成的平面内时,第五激光器阵列组115和第六激光器阵列组116的出光面在y-z轴构成的平面,则激光入射面平行于x-z轴构成的平面。第四激光器阵列组114出射的激光束的快轴方向平行于y轴,慢轴方向平行于x轴,则第五激光器阵列组115出射的激光束的快轴方向平行于y轴,慢轴方向平行于z轴,第六激光器阵列组116出射的激光束的快轴方向平行于z轴,慢轴方向平行于y轴。第四激光器阵列组114和第五激光器阵列组115的出射激光束的偏振方向均平行于x-z轴构成的平面,而第六激光器阵列组116的出射激光束的偏振方向垂直于x-z轴构成的平面。此时,可以设置合光反射镜121和偏振合光镜122的短边方向均平行于y轴,合光反射镜121中的条形反射部和透射部沿长边方向排列。第四激光器阵列组114以及第五激光器阵列组115的激光光斑的快轴与合光反射镜121的条形透射部以及反射部的延伸方向相平行,使合光反射镜121中的反射部和透射部的排列方向与激光器阵列组中激光器的排列方向相匹配,提高激光束的出射效率。The laser beam emitted by a semiconductor laser generally has a unique polarization direction, which can be parallel to the short axis direction of the light spot or parallel to the long axis direction of the light spot. A specific description is given by taking an example in which the polarization direction of the laser beam emitted by the semiconductor laser is parallel to the minor axis direction of the light spot. When the same semiconductor laser is used to emit a laser beam with a vertical polarization direction, it can be achieved by rotating the laser setting direction. For example, in a three-dimensional coordinate system, when the light-emitting surface of the fourth laser array group 114 is in the plane formed by the xy axis When the light exit surfaces of the fifth laser array group 115 and the sixth laser array group 116 are on the plane formed by the yz axis, the laser incident surface is parallel to the plane formed by the xz axis. The fast axis direction of the laser beam emitted by the fourth laser array group 114 is parallel to the y axis, and the slow axis direction is parallel to the x axis, so the fast axis direction of the laser beam emitted by the fifth laser array group 115 is parallel to the y axis and the slow axis direction Parallel to the z axis, the fast axis direction of the laser beam emitted by the sixth laser array group 116 is parallel to the z axis, and the slow axis direction is parallel to the y axis. The polarization directions of the emitted laser beams of the fourth laser array group 114 and the fifth laser array group 115 are both parallel to the plane formed by the xz axis, and the polarization direction of the emitted laser beams of the sixth laser array group 116 is perpendicular to the plane formed by the xz axis . At this time, it can be set that the short side directions of the light combining mirror 121 and the polarization combining mirror 122 are both parallel to the y-axis, and the strip-shaped reflection parts and transmission parts in the light combining mirror 121 are arranged along the long side direction. The fast axis of the laser spot of the fourth laser array group 114 and the fifth laser array group 115 is parallel to the extending direction of the strip-shaped transmission part and the reflection part of the light combining mirror 121, so that the reflection part of the light combining mirror 121 is parallel to The arrangement direction of the transmission part matches the arrangement direction of the lasers in the laser array group, which improves the emission efficiency of the laser beam.
通过旋转半导体激光器的设置方向,可以使第四激光器阵列组114的出射激光束与第五激光器阵列组115的出射激光束经过合光反射镜121的作用后合并为第二合并激光束,且第二合并激光束沿垂直于传播方向的截面为矩形。其中,第四激光器阵列组114出射的各激光束需要分别对准合光反射镜121的各透射部1213入射,第五激光器阵列组115出射的各激光束需要分别对准合光反射镜121的反射部1214入射。由合光反射镜121合并后的激光束的偏振方向平行于入射面,而第六激光器阵列组116的出射激光束的偏振方向垂直于入射面,偏振合光镜122将偏振方向平行于入射面以及偏振方向垂直于入射面的激光束合并。By rotating the setting direction of the semiconductor laser, the emitted laser beam of the fourth laser array group 114 and the emitted laser beam of the fifth laser array group 115 can be combined into a second combined laser beam after being acted by the light combining mirror 121, and The cross-section of the two-combined laser beam perpendicular to the propagation direction is rectangular. Among them, the laser beams emitted by the fourth laser array group 114 need to be aligned with the transmission parts 1213 of the light combining mirror 121 respectively, and the laser beams emitted by the fifth laser array group 115 need to be aligned with the light combining mirror 121 respectively. The reflection part 1214 is incident. The polarization direction of the laser beam combined by the light combining mirror 121 is parallel to the incident surface, while the polarization direction of the outgoing laser beam of the sixth laser array group 116 is perpendicular to the incident surface, and the polarization combining mirror 122 parallels the polarization direction to the incident surface. And the laser beams whose polarization direction is perpendicular to the incident surface are combined.
在实际应用中,半导体激光器出射的激光束沿快轴方向的宽度约为2.5mm,沿慢轴方向的宽度约为1mm。各组激光器阵列中的各激光器可沿激光光斑的慢轴方向进行排列。例如,采用2×4个激光束的bank封装方式。当采用两组2×4个激光器分别构成上述的激光器阵列组时,将6个2×4个激光器构成的阵列进行合并光束。各组激光器阵列的出射激光光斑尺寸约为40mm×40mm。各组激光器阵列的出射激光通过上述结构合束后的激光光斑尺寸基本不变,仍约为40mm×40mm。由于合光反射镜121和偏振合光镜122与激光器阵列组出射面之间存在一定的倾斜角,再加之需要为镜片预留安装的尺寸,当合光反射镜121和偏振合光镜122以倾斜45度角的方式安装时,合光反射镜121的尺寸约为57mm×42mm,其中4个反射部,间以3个透射部,每个区的尺寸约为8mm×42mm,另外两边各余留了0.5mm的边,用于与结构件固定;偏振合光镜122的尺寸约为69mm×50mm。合并后的激光功率约为228W。In practical applications, the width of the laser beam emitted by the semiconductor laser along the fast axis direction is about 2.5 mm, and the width along the slow axis direction is about 1 mm. The lasers in each group of laser arrays can be arranged along the slow axis direction of the laser spot. For example, a bank package with 2×4 laser beams is used. When two groups of 2×4 lasers are used to form the above-mentioned laser array group respectively, an array composed of 6 2×4 lasers is combined with beams. The laser spot size of each group of laser array is about 40mm×40mm. The size of the laser spot after the laser beams emitted by each group of laser arrays are combined through the above structure is basically unchanged, and is still about 40mm×40mm. Since there is a certain inclination angle between the light combining mirror 121 and the polarization combining mirror 122 and the exit surface of the laser array group, and the size of the lens needs to be reserved, when the light combining mirror 121 and the polarization combining mirror 122 are smaller than When installed at an angle of 45 degrees, the size of the light combining mirror 121 is about 57mm×42mm, of which there are 4 reflecting parts and 3 transmission parts in between. The size of each zone is about 8mm×42mm, and the other two sides have more A side of 0.5mm is reserved for fixing with the structural member; the size of the polarization combiner 122 is approximately 69mm×50mm. The combined laser power is about 228W.
由此可见,采用本申请实施例提供的上述两种激光光源装置的结构,不再需要扩大单个激光器阵列的规模,而是采用偏振合光镜和合光反射镜将三组以上激光器阵列的激光束的方式来提高光源光能量。合并后的激光束与单组激光器阵列的激光束的尺寸相近,而激光束的功率显著提高。由此达到了增大激光出射功率的目的,也不需要改变激光器阵列光路之后的元件重新设计,节省设计成本。It can be seen that, with the above-mentioned two types of laser light source device structures provided by the embodiments of the present application, it is no longer necessary to expand the scale of a single laser array. Instead, a polarization combining mirror and a combining mirror are used to combine the laser beams of three or more laser arrays. Way to increase the light energy of the light source. The size of the combined laser beam is similar to that of the single laser array, and the power of the laser beam is significantly increased. Therefore, the purpose of increasing the laser output power is achieved, and there is no need to redesign the components after changing the optical path of the laser array, thereby saving design costs.
除上述激光光源装置包括三组激光器阵列的实施方式以外,在实际应用中,还可以增加更多组的激光器阵列来增强激光出射功率。以图5所示的结构为例,在图3所示的激光光源装置的结构基础之上,在第五激光器阵列组115和第六激光器阵列组116之间再增加一组激光器阵列组117,其摆放方向可与第五激光器阵列组115的摆放 方向相同;同时再增加一个合光反射镜121’接收第七激光器阵列组117出射的各激光束。In addition to the foregoing embodiment in which the laser light source device includes three groups of laser arrays, in practical applications, more groups of laser arrays can be added to enhance the laser output power. Taking the structure shown in FIG. 5 as an example, on the basis of the structure of the laser light source device shown in FIG. 3, a group of laser array groups 117 is added between the fifth laser array group 115 and the sixth laser array group 116. The placement direction can be the same as the placement direction of the fifth laser array group 115; at the same time, a light combining mirror 121' is added to receive the laser beams emitted by the seventh laser array group 117.
具体来说,第四激光器阵列组114出射的各激光束分别入射到合光反射镜121的各透射部被透射,第五激光器阵列组115出射的各激光束分别入射到合光反射镜121的各反射部被反射,由此第四激光器阵列组114以及第五激光器阵列组115出射的各激光束被合光反射镜121合并后分别向合光反射镜121’的各透射部出射;合光反射镜121’的透射部将第四激光器阵列组114和第五激光器阵列组115合并激光束透射,增加的激光器阵列组117出射的各激光束入射至合光反射镜121’的各反射部被反射,由此合光反射镜121’将第四激光器阵列组114、第五激光器阵列组115以及增加的激光器阵列组117的激光束合并后向偏振合光镜122出射,合并激光束的偏振方向平行于入射面。偏振合光镜122在接收到偏振方向平行于入射面的激光束后将其透射,在接收到偏振方向垂直于入射面的第六激光器阵列组116的出射激光束后将其反射,最终将四组激光器阵列的出射激光束合并。Specifically, each laser beam emitted from the fourth laser array group 114 is incident on each transmission part of the light combining mirror 121 to be transmitted, and each laser beam emitted from the fifth laser array group 115 is incident on the light combining mirror 121, respectively. Each reflecting part is reflected, whereby the laser beams emitted by the fourth laser array group 114 and the fifth laser array group 115 are combined by the light combining mirror 121 and then respectively emitted to the transmission parts of the light combining mirror 121'; The transmission part of the mirror 121' transmits the combined laser beams of the fourth laser array group 114 and the fifth laser array group 115, and the laser beams emitted by the increased laser array group 117 are incident on the reflection parts of the combining mirror 121'. Reflect, the light combining mirror 121' combines the laser beams of the fourth laser array group 114, the fifth laser array group 115 and the added laser array group 117 and then exits to the polarization combining mirror 122 to combine the polarization directions of the laser beams Parallel to the incident surface. The polarization combiner 122 transmits the laser beam whose polarization direction is parallel to the incident surface and then reflects it after receiving the laser beam from the sixth laser array group 116 whose polarization direction is perpendicular to the incident surface. The outgoing laser beams of the group laser array are combined.
第四激光器阵列组114、第五激光器阵列组115以及增加的激光器阵列组117出射的激光束的偏振方向均平行于入射面,因此可设置合光反射镜121、121’的条形反射部的延伸方向均平行于第四激光器阵列组114、第五激光器阵列组115及增加的激光器阵列组117中各激光器的快轴,以使合光反射镜可以充分接收入射的激光束,将合并激光束其向透射的方向上出射。然而由于合光反射镜121’的透射部需要透射第四激光器阵列组114和第五激光器阵列组115的合并激光束,因此合光反射镜121’中透射部的宽度需要比合光反射镜121中透射部的宽度更大,相应地,如果合光反射镜121’中的透射部的宽度增大,则反射部的间距相应地增大,因此还需要对激光器阵列组117 中各激光器的间距进行适应性调整,以使激光器阵列组117中的各激光器的出射光均能入射至合光反射镜121’的各反射部上。The polarization directions of the laser beams emitted by the fourth laser array group 114, the fifth laser array group 115, and the additional laser array group 117 are all parallel to the incident surface, so the strip reflection part of the light combining mirror 121, 121' can be set The extension direction is parallel to the fast axis of each laser in the fourth laser array group 114, the fifth laser array group 115, and the added laser array group 117, so that the combining mirror can fully receive the incident laser beam, and merge the laser beams. It emits in the direction of transmission. However, since the transmission part of the light combining mirror 121' needs to transmit the combined laser beams of the fourth laser array group 114 and the fifth laser array group 115, the width of the transmission part in the light combining mirror 121' needs to be larger than that of the light combining mirror 121 The width of the middle transmissive part is larger. Correspondingly, if the width of the transmissive part in the light combining mirror 121' is increased, the pitch of the reflective part is correspondingly increased. Therefore, it is also necessary to adjust the pitch of the lasers in the laser array group 117. The adaptive adjustment is made so that the emitted light of each laser in the laser array group 117 can be incident on each reflection part of the light combining mirror 121'.
此外,还可以根据图1所示的激光光源装置结构的基础上增加更多组的激光器阵列以增强激光出射功率。例如,可以在第三激光器阵列组113背离第二激光器阵列组112的一侧再增加一组偏振方向为第三偏振方向的激光器阵列组,相应地可以再增加一个合光反射镜用于反射增加的激光器阵列组的出射激光束。而如果需要进一步增强激光的出射强度增加更多组的激光器阵列时,需要针对增加激光器阵列的设置位置及其出射激光束的偏振方向,来设置适合的合光镜与之对应,此处不再一一列举。In addition, according to the structure of the laser light source device shown in FIG. 1, more groups of laser arrays can be added to enhance the laser output power. For example, a group of laser array groups whose polarization direction is the third polarization direction can be added on the side of the third laser array group 113 away from the second laser array group 112, and a light combining mirror can be added accordingly to increase the reflection. The outgoing laser beam of the laser array group. If you need to further enhance the laser output intensity and add more groups of laser arrays, you need to increase the setting position of the laser array and the polarization direction of the emitted laser beam to set a suitable light combiner corresponding to it. List one by one.
在具体实施时,激光光源装置中的合光反射镜121和偏振合光镜122可以将至少三组激光器阵列的出射激光束合并,而一组激光器阵列中至少包括一个激光器阵列,因此,本申请实施例提供的上述激光光源装置中,合光反射镜121及偏振合光镜122的总数量比激光器阵列的数量至少少1。In specific implementation, the light combining mirror 121 and the polarization combining mirror 122 in the laser light source device can combine the emitted laser beams of at least three groups of laser arrays, and one group of laser arrays includes at least one laser array. Therefore, the present application In the above-mentioned laser light source device provided by the embodiment, the total number of light combining mirror 121 and polarization combining mirror 122 is at least one less than the number of laser arrays.
进一步地,激光器阵列为由激光器呈阵列排布后同时出射激光,为了避免相邻的激光器之间出射激光的串扰,需要保持激光器之间设置一定的距离。那么在采用合光反射镜121反射激光器阵列出射的激光时,其包括反射部的宽度需要配合激光器出射激光束的宽度和间距进行设置。合光反射镜中的反射部的宽度可以满足以下关系:d>b>L/cosθ。Further, the laser array emits lasers simultaneously after the lasers are arranged in an array. In order to avoid crosstalk of the emitted lasers between adjacent lasers, a certain distance between the lasers needs to be maintained. Then, when the light combining mirror 121 is used to reflect the laser light emitted by the laser array, the width including the reflection portion needs to be set to match the width and spacing of the laser beam emitted by the laser. The width of the reflection part in the light combining mirror may satisfy the following relationship: d>b>L/cosθ.
其中,b为反射部的宽度,d为激光器阵列中相邻两个激光器之间的间距,L为出射的激光束慢轴的宽度,θ为反射部与入射至反射部的激光器阵列组出光面的夹角。Among them, b is the width of the reflection part, d is the distance between two adjacent lasers in the laser array, L is the width of the slow axis of the emitted laser beam, and θ is the light-emitting surface of the reflection part and the laser array group incident on the reflection part The included angle.
当满足上述关系时,可以保证激光器阵列组出射的激光束入射 至合光反射镜的各反射部时,各反射部可以完全接收各激光束,并将接收的激光束完全反射。When the above relationship is satisfied, it can be ensured that when the laser beam emitted by the laser array group is incident on each reflection part of the light combining mirror, each reflection part can completely receive each laser beam and completely reflect the received laser beam.
如本申请实施例图1、图3所示的结构中,合光反射镜中的反射部与入射至反射部的激光器阵列组出光面的夹角为45度,此时,反射部的宽度可以按照以下规则进行设置:
Figure PCTCN2019113894-appb-000001
For example, in the structure shown in Figure 1 and Figure 3 of the embodiment of the present application, the angle between the reflection part of the combining mirror and the light-emitting surface of the laser array group incident on the reflection part is 45 degrees. At this time, the width of the reflection part can be Set according to the following rules:
Figure PCTCN2019113894-appb-000001
由此,可以保证激光器阵列组出射的各激光束分别入射至合光反射镜的各反射部时,各反射部可以完全接收激光束,并将接收的激光束完全反射。As a result, it can be ensured that when each laser beam emitted by the laser array group is incident on each reflection part of the light combining mirror, each reflection part can completely receive the laser beam and completely reflect the received laser beam.
进一步地,在本申请实施例中,如图6和图7所示,激光光源装置还包括:光源缩束组件13,该光源缩束组件13可为透射型缩束组件,也可为反射型缩束组件。当光源缩束组件为透射型组件时,如图6所示,光源缩束组件13包括:沿合光镜组12的光出射方向依次设置的正透射131和负透镜132,且正透镜131的像方焦点与负透镜132的物方焦点或像方焦点重合。图7中的正透射131和负透镜132构成望远镜***,可以将入射的平行激光束的尺寸缩小,缩束后的激光束更符合后续光路中元件的需要,且缩束后的激光束具有更高的能量密度。Further, in the embodiment of the present application, as shown in FIG. 6 and FIG. 7, the laser light source device further includes: a light source beam reduction component 13, which may be a transmission type beam reduction component or a reflection type Shrink beam components. When the light source beam reduction component is a transmission type component, as shown in FIG. 6, the light source beam reduction component 13 includes: a positive transmission 131 and a negative lens 132 arranged in sequence along the light emission direction of the light combining lens group 12, and the positive lens 131 The image-side focal point coincides with the object-side focal point or the image-side focal point of the negative lens 132. The positive transmission 131 and the negative lens 132 in Figure 7 constitute a telescope system, which can reduce the size of the incident parallel laser beam. The reduced laser beam is more in line with the needs of the components in the subsequent optical path, and the reduced laser beam has more High energy density.
当光源缩束组件为反射型组件时,如图7所示,光源缩束组件13包括:位于合光镜组12的出光侧的凹面反射镜133和凸面反射镜134,凹面反射镜133的焦点与凸面反射镜134的焦点重合。合光镜组12的出射光先入射到凹面反射镜133,被凹面反射镜133反射并会聚出射到凸面反射镜134;再经过凸面反射镜134的反射后被缩束并准直出射。如图8所示,采用反射型缩束组件时,不仅可以对激光束进行缩束还可以改变激光束的传播方向,因此在想要缩小整机某一方向的尺寸时,可以优先考虑采用反射型光源缩束组件。When the light source beam reduction component is a reflective component, as shown in FIG. 7, the light source beam reduction component 13 includes: a concave mirror 133 and a convex mirror 134 located on the light exit side of the light combining mirror group 12, and the focal point of the concave mirror 133 It coincides with the focal point of the convex mirror 134. The output light of the light combining mirror group 12 first enters the concave mirror 133, is reflected by the concave mirror 133, and is condensed out to the convex mirror 134; then, after being reflected by the convex mirror 134, it is reduced and collimated out. As shown in Figure 8, when the reflective beam reduction component is used, not only can the laser beam be reduced, but also the propagation direction of the laser beam can be changed. Therefore, when you want to reduce the size of the whole machine in a certain direction, you can give priority to using reflection Type light source shrink beam assembly.
在具体实施时,可以根据实际需要选择光源缩束组件的类型,在此不做限定。In specific implementation, the type of the light source beam reduction component can be selected according to actual needs, which is not limited here.
进一步地,如图8所示,本申请实施例提供的上述激光光源装置,还包括:位于光源缩束组件13出光方向上的扩散片14、二向色镜15,位于二向色镜15反射光路上的反射式荧光轮16、光路转向组件17,位于二向色镜15背离反射式荧光轮16一侧的滤色轮18以及匀光部件19。Further, as shown in FIG. 8, the above-mentioned laser light source device provided by the embodiment of the present application further includes: a diffuser 14 and a dichroic mirror 15 located in the light-emitting direction of the light source shrinking assembly 13; The reflective fluorescent wheel 16 and the light path turning assembly 17 on the light path, the color filter wheel 18 and the light homogenizing component 19 on the side of the dichroic mirror 15 away from the reflective fluorescent wheel 16.
以常见的蓝色激光器阵列为例进行说明,蓝色激光器阵列出射的激光束经过缩束后,再通过一个扩散片14对激光光束进行匀化,防止激光光斑能量分布不均匀,避免激光光束的局部光能量较大而灼伤荧光轮,造成荧光转换效率降低,还可以起到降低激光散斑的作用。二向色镜15能够反射蓝光并透射荧光。蓝色的激光被二向色镜15反射,经过透镜会聚照射到反射式荧光轮16上。在本申请实施例中荧光轮可采用反射式荧光轮16,分为反射荧光粉区和激光透射部两个区域。随着反射式荧光轮16的旋转,激光周期性地照射在这两个区域上。荧光粉区经过激光的照射,会产生荧光,且荧光粉区具有可以发生光反射的背板,因此所激发的荧光会被背板反射。由于荧光的发射是不定向的,角度较大,需要用透镜进行准直,经背板反射的荧光经透镜准直之后,重新入射到二向色镜15上并透射。当蓝色的激光射向反射式荧光轮16上的激光透射部时,激光透过荧光轮从其背面出射,经过由光路转向元件17构成的蓝光回路(一般包括透镜、反射镜和扩散片等元件)反射一周,重新入射到二向色镜15上并被反射。蓝光经二向色镜15反射后,与荧光(红色荧光和绿色荧光)合光,再经过一个透镜组会聚,经滤色轮18之后到达匀光部件19。其中,滤色轮18能够按照色纯度的需求,提供满足要求的三基色光。 它与反射式荧光轮16同步转动,具有相对应的颜色分区。根据反射式荧光轮16的转动时序,当荧光轮输出蓝色激光时,蓝光透过滤色轮18的蓝光透射部;当荧光轮产生红色荧光,滤色轮18转动到红色滤色区进行滤色,同理,绿色荧光透过相应的绿色滤色区,从而经过滤色轮18得到三基色。三基色光再经过匀光部件19的匀化作用后向之后的光路出射。在实际应用中,匀光部件19可采用光棒、光导管等装置,在此不做限定。Take a common blue laser array as an example. After the laser beam emitted by the blue laser array is reduced, the laser beam is homogenized by a diffuser 14 to prevent uneven laser spot energy distribution and avoid laser beam damage. The local light energy is large and burns the fluorescent wheel, resulting in a decrease in fluorescence conversion efficiency, and can also reduce laser speckle. The dichroic mirror 15 can reflect blue light and transmit fluorescence. The blue laser light is reflected by the dichroic mirror 15 and condensed and irradiated onto the reflective fluorescent wheel 16 through the lens. In the embodiment of the present application, the fluorescent wheel may be a reflective fluorescent wheel 16, which is divided into two areas, a reflective fluorescent powder area and a laser transmission portion. As the reflective fluorescent wheel 16 rotates, laser light periodically irradiates these two areas. After the phosphor area is irradiated by the laser, fluorescence will be generated, and the phosphor area has a back plate that can reflect light, so the excited fluorescence will be reflected by the back plate. Since the emission of fluorescence is non-directional and the angle is large, a lens is required for collimation. After the fluorescence reflected by the back plate is collimated by the lens, it is incident on the dichroic mirror 15 again and transmitted. When the blue laser light is directed to the laser transmission part on the reflective fluorescent wheel 16, the laser light passes through the fluorescent wheel and exits from its back, and passes through the blue circuit formed by the optical path turning element 17 (generally including lenses, mirrors, diffusers, etc.) The element) reflects one round, and is incident on the dichroic mirror 15 again and is reflected. The blue light is reflected by the dichroic mirror 15 and combined with the fluorescence (red fluorescence and green fluorescence), and then converged by a lens group, and then reaches the homogenizing part 19 after passing through the color filter wheel 18. Among them, the color filter wheel 18 can provide three primary colors meeting the requirements according to the requirements of color purity. It rotates synchronously with the reflective fluorescent wheel 16, and has corresponding color divisions. According to the rotation timing of the reflective fluorescent wheel 16, when the fluorescent wheel outputs blue laser light, the blue light passes through the blue light transmitting part of the filter color wheel 18; when the fluorescent wheel generates red fluorescence, the filter wheel 18 rotates to the red filter region for color filtering In the same way, the green fluorescence passes through the corresponding green color filter area, and the three primary colors are obtained through the filter color wheel 18. The light of the three primary colors passes through the homogenization effect of the light homogenizing component 19 and then exits to the subsequent light path. In practical applications, the light homogenizing component 19 can be a light rod, a light pipe, etc., which is not limited here.
本申请一些实施例提供一种激光投影设备,包括上述任一激光光源装置。该激光投影设备可利用上述激光光源装置所产生的三基色光实现激光投影。在实际应用中,激光投影设备除包括上述激光光源装置以外,如图9所示,还包括:位于激光光源装置出光侧的光阀调制部件200,以及位于光阀调制部件200出光侧的投影镜头300。激光光源装置可时序性地输出不同颜色的光线入射至光阀调制部件200,通过光阀调制部件200时序性的对不同颜色入射光的调制,使得反射到投影镜头300成像出的图像满足需要。Some embodiments of the application provide a laser projection device, which includes any of the foregoing laser light source devices. The laser projection equipment can use the three primary colors generated by the laser light source device to realize laser projection. In practical applications, the laser projection equipment includes the above-mentioned laser light source device, as shown in FIG. 9, also includes: a light valve modulation component 200 located on the light exit side of the laser light source device, and a projection lens located on the light output side of the light valve modulation component 200 300. The laser light source device can sequentially output light of different colors to be incident on the light valve modulation component 200, and the light valve modulation component 200 sequentially modulates the incident light of different colors, so that the image reflected to the projection lens 300 meets the requirements.
在具体实施时,该激光投影设备可为数字光处理构架(Digital Light Processing,简称DLP)投影***,上述光阀调制部件200可为数字微镜芯片(Digital Micromirror Device,简称DMD)。通过把影像信号数字化处理,使激光光源装置时序性地出射的不同颜色光线投射在DMD芯片上,由DMD芯片根据数字化信号对光线进行调制后反射,最后经过投影镜头在投影屏幕上成像。In specific implementation, the laser projection device may be a Digital Light Processing (DLP) projection system, and the light valve modulation component 200 may be a Digital Micromirror Device (DMD). By digitizing the image signal, the light of different colors emitted by the laser light source device is projected on the DMD chip in a sequential manner. The light is modulated by the DMD chip according to the digital signal and reflected, and finally imaged on the projection screen by the projection lens.
本申请一些实施例提供的激光光源装置及激光投影设备,包括:至少三组激光器阵列、合光反射镜以及偏振合光镜;其中,偏振合光镜和合光反射镜均用于激光束合并。上述激光光源装置中,不再需要扩大单个激光器阵列的规模,而是采用多组激光器阵列入射合光反射 镜和偏振合光镜合并各组激光器阵列的激光束的方式来提高光源光能量。合并后的激光束与单组激光器阵列的激光束的尺寸相近,而激光束的功率显著提高。由此达到了兼顾增大激光出射功率和保持较小激光光束尺寸的目的,也不需要改变激光器阵列光路之后的元件重新设计,节省设计成本。The laser light source device and laser projection equipment provided by some embodiments of the present application include: at least three sets of laser arrays, light combining mirrors, and polarization combining mirrors; wherein the polarization combining mirrors and light combining mirrors are both used for laser beam combining. In the above-mentioned laser light source device, it is no longer necessary to expand the scale of a single laser array. Instead, multiple groups of laser arrays are incident to light combining mirrors and polarization combining mirrors to combine the laser beams of each group of laser arrays to increase the light energy of the light source. The size of the combined laser beam is similar to that of the single laser array, and the power of the laser beam is significantly increased. As a result, the purpose of increasing the laser output power and keeping the size of the laser beam is achieved, and there is no need to redesign the components after changing the optical path of the laser array, thereby saving design costs.
尽管已描述了本申请的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例作出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本申请范围的所有变更和修改。Although the preferred embodiments of the present application have been described, those skilled in the art can make additional changes and modifications to these embodiments once they learn the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of this application.
显然,本领域的技术人员可以对本申请进行各种改动和变型而不脱离本申请的精神和范围。这样,倘若本申请的这些修改和变型属于本申请权利要求及其等同技术的范围之内,则本申请也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to the application without departing from the spirit and scope of the application. In this way, if these modifications and variations of this application fall within the scope of the claims of this application and their equivalent technologies, then this application is also intended to include these modifications and variations.

Claims (18)

  1. 一种激光光源装置,包括:A laser light source device includes:
    第一激光器阵列组,用于出射第一激光束;The first laser array group is used to emit the first laser beam;
    第二激光器阵列组,用于出射第二激光束,所述第二激光束的偏振方向与所述第一激光束的偏振方向相互垂直;The second laser array group is used to emit a second laser beam, the polarization direction of the second laser beam and the polarization direction of the first laser beam are perpendicular to each other;
    第三激光器阵列组,用于出射第三激光束;The third laser array group is used to emit a third laser beam;
    偏振合光镜,包括相对而置的透射面和反射面,其中所述透射面用于透射所述第一激光束,所述反射面用于反射所述第二激光束,所述偏振合光镜的位置被设置为使所述透射面透射的所述第一激光束和所述反射面反射的第二激光束向同一方向出射;The polarization combining mirror includes a transmissive surface and a reflective surface that are opposed to each other, wherein the transmissive surface is used to transmit the first laser beam, the reflective surface is used to reflect the second laser beam, and the polarization combined light The position of the mirror is set so that the first laser beam transmitted by the transmission surface and the second laser beam reflected by the reflection surface are emitted in the same direction;
    合光反射镜,位于所述偏振合光镜的出光侧,包括交替排列的透射部和反射部,其中所述透射部用于透射所述偏振合光镜出射的第一激光束和第二激光束的合光,所述反射部用于反射所述第三激光器阵列出射的第三激光束,所述合光镜的位置被设置为使所述透射部透射的所述第一激光束和第二激光束的合光与所述反射部反射的所述第三激光束向同一方向出射。The light combining mirror, located on the light exit side of the polarization combining mirror, includes alternately arranged transmission parts and reflection parts, wherein the transmission part is used to transmit the first laser beam and the second laser light emitted by the polarization combining mirror The reflection part is used to reflect the third laser beam emitted by the third laser array, and the position of the light combining mirror is set to make the first laser beam and the second laser beam transmitted by the transmission part The combined light of the two laser beams and the third laser beam reflected by the reflecting part are emitted in the same direction.
  2. 如权利要求1所述的激光光源装置,其中所述第一激光器阵列组的出光面与所述第二激光器阵列组的出光面相互垂直,所述第二激光器阵列组的出光面与所述第三激光器阵列组的出光面相互平行。The laser light source device according to claim 1, wherein the light exit surface of the first laser array group and the light exit surface of the second laser array group are perpendicular to each other, and the light exit surface of the second laser array group is perpendicular to the first laser array group. The light-emitting surfaces of the three laser array groups are parallel to each other.
  3. 如权利要求3所述的激光光源装置,所述第二激光器阵列组相对于所述第三激光器阵列组以垂直于所述第三激光器阵列组的出光面的法线为轴旋转90度设置;所述第三激光器阵列组相于对所述第一激光器阵列组以所述第一激光器阵列组的出光面与所述第三激光器阵列组的出光面的交线为轴旋转90度设置。3. The laser light source device according to claim 3, wherein the second laser array group is rotated by 90 degrees with respect to the third laser array group about an axis perpendicular to the light exit surface of the third laser array group; The third laser array group is arranged to be rotated by 90 degrees with respect to the first laser array group with the intersection of the light exit surface of the first laser array group and the light exit surface of the third laser array group as an axis.
  4. 如权利要求1至3任一所述的激光光源装置,其中所述第一激光器阵列组、所述第二激光器阵列组及所述第三激光器阵列组中的各激光器均为半导体激光器。The laser light source device according to any one of claims 1 to 3, wherein each laser in the first laser array group, the second laser array group, and the third laser array group is a semiconductor laser.
  5. 如权利要求3所述的激光光源装置,所述偏振合光镜与所述合光反射镜的形状均为矩形;各所述反射部和各所述透射部为沿平行于所述第一激光器阵列组的出射激光束的慢轴方向平行交替排列的条形区域;The laser light source device according to claim 3, wherein the shapes of the polarization combining mirror and the light combining mirror are both rectangular; each of the reflection portions and each of the transmission portions are along parallel to the first laser Strip-shaped regions arranged alternately in parallel with the slow axis direction of the emitted laser beams of the array group;
    所述第一激光器阵列组和所述第三激光器阵列组的出射激光束的快轴方向均平行于所述条形区域的延伸方向;The fast axis directions of the emitted laser beams of the first laser array group and the third laser array group are both parallel to the extending direction of the strip-shaped area;
    所述第二激光器阵列组的出射激光束的快轴方向垂直于所述条形区域的延伸方向。The fast axis direction of the emitted laser beam of the second laser array group is perpendicular to the extending direction of the strip-shaped area.
  6. 一种激光光源装置,包括:A laser light source device includes:
    第四激光器阵列组,用于出射第四激光束;The fourth laser array group is used to emit the fourth laser beam;
    第五激光器阵列组,用于出射第五激光束;The fifth laser array group is used to emit the fifth laser beam;
    第六激光器阵列组,用于出射第六激光束,其中所述第六激光束的偏振方向与所述第四激光束、第五激光束的偏振方向均垂直;A sixth laser array group for emitting a sixth laser beam, wherein the polarization direction of the sixth laser beam is perpendicular to the polarization directions of the fourth laser beam and the fifth laser beam;
    合光反射镜,包括交替排列的透射部和反射部,所述透射部用于透射所述第四激光束,所述反射部用于反射所述第五激光束,所述合光反射镜被设置为使所述透射部透射的第四激光束和所述反射部反射的第五激光束向同一方向出射;The light combining mirror includes alternately arranged transmission parts and reflection parts, the transmission part is used to transmit the fourth laser beam, the reflection part is used to reflect the fifth laser beam, and the light combining mirror is Arranged so that the fourth laser beam transmitted by the transmission part and the fifth laser beam reflected by the reflection part exit in the same direction;
    偏振合光镜,位于所述合光反射镜的出光侧,包括相对设置的透射面和反射面,所述反射面用于反射所述第六激光束,所述透射面用于透射所述合光反射镜出射的所述第四激光束和所述第五激光束,所述偏振合光镜的位置被设置为使所述透射面透射的第四激光束、第五激光束和所述反射面反射的第六激光束向同一方向出射。The polarization combining mirror is located on the light exit side of the combining mirror, and includes a transmission surface and a reflection surface that are arranged oppositely. The reflection surface is used to reflect the sixth laser beam, and the transmission surface is used to transmit the combination. The fourth laser beam and the fifth laser beam emitted by the light reflecting mirror, the position of the polarization combining mirror is set so that the fourth laser beam, the fifth laser beam and the reflection The sixth laser beam reflected from the surface exits in the same direction.
  7. 如权利要求6所述的激光光源装置,所述第四激光器阵列组的出光面与所述第五激光器阵列组的出光面相互垂直,所述第五激光器阵列组的出光面与所述第六激光器阵列组的出光面平行。7. The laser light source device according to claim 6, wherein the light exit surface of the fourth laser array group and the light exit surface of the fifth laser array group are perpendicular to each other, and the light exit surface of the fifth laser array group is perpendicular to the sixth laser array group. The light emitting surface of the laser array group is parallel.
  8. 如权利要求6所述的激光光源装置,The laser light source device according to claim 6,
    所述第五激光器阵列组相对于所述第四激光器阵列组以所述第四激光器阵列组的出光面与所述第五激光器阵列组的出光面的交线为轴旋转90度设置;The fifth laser array group is rotated by 90 degrees relative to the fourth laser array group with the intersection line of the light exit surface of the fourth laser array group and the light exit surface of the fifth laser array group as an axis;
    所述六激光器阵列组相对于第五激光器阵列组以垂直于所述第五激光器阵列组出光面的法线为轴旋转90度设置。The six-laser array group is rotated by 90 degrees with respect to the fifth laser array group with a normal line perpendicular to the light-emitting surface of the fifth laser array group as an axis.
  9. 如权利要求6至8任一所述的激光光源装置,所述第四激光器阵列组、所述第五激光器阵列组及所述第六激光器阵列组中的各激光器均为半导体激光器。8. The laser light source device according to any one of claims 6 to 8, wherein each laser in the fourth laser array group, the fifth laser array group, and the sixth laser array group is a semiconductor laser.
  10. 如权利要求8所述的激光光源装置,The laser light source device according to claim 8,
    所述偏振合光镜与所述合光反射镜的形状均为矩形;各所述反射部和各所述透射部为沿平行于所述第四激光器阵列组的出射激光束的慢轴方向平行交替排列的条形区域;The shapes of the polarization combining mirror and the light combining mirror are both rectangular; each of the reflection parts and each of the transmission parts are parallel to the slow axis direction of the emitted laser beam of the fourth laser array group Alternately arranged strip-shaped areas;
    所述第四激光器阵列组和所述第五激光器阵列组的出射激光束的快轴方向均平行于所述条形区域的延伸方向;The fast axis directions of the emitted laser beams of the fourth laser array group and the fifth laser array group are both parallel to the extending direction of the strip-shaped area;
    所述第六激光器阵列组的出射激光束的快轴方向垂直于所述条形区域的延伸方向。The fast axis direction of the emitted laser beam of the sixth laser array group is perpendicular to the extending direction of the strip-shaped area.
  11. 一种激光投影设备,包括:A laser projection equipment, including:
    如权利要求1-5任一项所述的激光光源装置;The laser light source device according to any one of claims 1-5;
    位于所述激光光源装置出光方向上的光阀调制部件;A light valve modulation component located in the light emitting direction of the laser light source device;
    位于所述光阀调制部件出光侧的投影镜头。A projection lens located on the light emitting side of the light valve modulation component.
  12. 如权利要求11所述的激光投影设备,所述激光光源装置中 的各激光器阵列组包括:两组并排排列的激光器阵列;The laser projection equipment according to claim 11, each laser array group in the laser light source device comprises: two groups of laser arrays arranged side by side;
    所述激光器阵列包括:排列为两行四列的激光器。The laser array includes lasers arranged in two rows and four columns.
  13. 如权利要求11所述的激光投影设备,所述激光光源装置中的偏振合光镜和合光反射镜的总数量比激光器阵列的数量至少少1。11. The laser projection device according to claim 11, wherein the total number of polarization combining mirrors and light combining mirrors in the laser light source device is at least one less than the number of laser arrays.
  14. 如权利要求11所述的激光投影设备,所述合光反射镜中的反射部的宽度满足以下关系:11. The laser projection device according to claim 11, wherein the width of the reflection part in the light combining mirror satisfies the following relationship:
    d>b>L/cosθ;d>b>L/cosθ;
    其中,b为所述反射部的宽度,d为激光器阵列中相邻两个激光器之间的间距,L为出射的激光束慢轴的宽度,θ为所述反射部与入射至所述反射部的激光器阵列组出光面的夹角。Wherein, b is the width of the reflection part, d is the distance between two adjacent lasers in the laser array, L is the width of the slow axis of the emitted laser beam, and θ is the reflection part and the incident to the reflection part The angle between the light-emitting surface of the laser array group.
  15. 一种激光投影设备,包括:A laser projection equipment, including:
    如权利要求6-10任一项所述的激光光源装置;The laser light source device according to any one of claims 6-10;
    位于所述激光光源装置出光方向上的光阀调制部件;A light valve modulation component located in the light emitting direction of the laser light source device;
    位于所述光阀调制部件出光侧的投影镜头。A projection lens located on the light emitting side of the light valve modulation component.
  16. 如权利要求15所述的激光投影设备,所述激光光源装置中的各激光器阵列组包括:两组并排排列的激光器阵列;15. The laser projection device according to claim 15, wherein each laser array group in the laser light source device comprises: two groups of laser arrays arranged side by side;
    所述激光器阵列包括:排列为两行四列的激光器。The laser array includes lasers arranged in two rows and four columns.
  17. 如权利要求15所述的激光投影设备,所述激光光源装置中的偏振合光镜和合光反射镜的总数量比激光器阵列的数量至少少1。15. The laser projection device according to claim 15, wherein the total number of polarization combining mirrors and light combining mirrors in the laser light source device is at least one less than the number of laser arrays.
  18. 如权利要求15所述的激光投影设备,所述合光反射镜中的反射部的宽度满足以下关系:15. The laser projection device according to claim 15, wherein the width of the reflection part in the light combining mirror satisfies the following relationship:
    d>b>L/cosθ;d>b>L/cosθ;
    其中,b为所述反射部的宽度,d为激光器阵列中相邻两个激光器之间的间距,L为出射的激光束慢轴的宽度,θ为所述反射部与入射至所述反射部的激光器阵列组出光面的夹角。Wherein, b is the width of the reflection part, d is the distance between two adjacent lasers in the laser array, L is the width of the slow axis of the emitted laser beam, and θ is the reflection part and the incident to the reflection part The angle between the light-emitting surface of the laser array group.
PCT/CN2019/113894 2019-02-01 2019-10-29 Laser light source apparatus and laser projection device WO2020155699A1 (en)

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CN108563088A (en) * 2016-02-26 2018-09-21 海信集团有限公司 A kind of laser light-source device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101051176A (en) * 2006-04-06 2007-10-10 中强光电股份有限公司 Lighting system and projector
JP2007333774A (en) * 2006-06-12 2007-12-27 Seiko Epson Corp Projector
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