WO2020134714A1 - Stopping block for inertial sensor - Google Patents

Stopping block for inertial sensor Download PDF

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Publication number
WO2020134714A1
WO2020134714A1 PCT/CN2019/119351 CN2019119351W WO2020134714A1 WO 2020134714 A1 WO2020134714 A1 WO 2020134714A1 CN 2019119351 W CN2019119351 W CN 2019119351W WO 2020134714 A1 WO2020134714 A1 WO 2020134714A1
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WO
WIPO (PCT)
Prior art keywords
blocking block
inertial sensor
block
substrate
inertial
Prior art date
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PCT/CN2019/119351
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French (fr)
Chinese (zh)
Inventor
颜培力
裘进
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上海矽睿科技有限公司
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Publication of WO2020134714A1 publication Critical patent/WO2020134714A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/16—Elements for restraining, or preventing the movement of, parts, e.g. for zeroising

Definitions

  • the present invention relates to the field of MEMS technology, and in particular to a blocking block for inertial sensors.
  • the block structure is an important part of IC/MEMS sensor chips, especially inertial devices.
  • the barrier block structure in the prior art is easily damaged when shocked or vibrated, and it is easy to generate charge accumulation and adhesion.
  • the technical problem to be solved by the present invention is to provide a blocking block for an inertial sensor, which is not easily damaged when subjected to impact or vibration.
  • the present invention provides a blocking block for an inertial sensor, which is provided on a surface of a substrate and used for blocking the inertial movement of a mass, including: a body, a position where the body contacts the inertial mass It is rounded, and the body and the surface of the substrate are the same material.
  • the blocking block further includes a conductive body, the conductive body is disposed inside the body and connected to the conductive layer in the substrate.
  • the material of the electrical conductor is metal
  • the optional body is an insulating material.
  • the blocking block further includes a cover layer, the cover layer covers the surface of the body, and the cover layer is a hydrophobic material.
  • the material of the cover layer is silicon nitride.
  • the cross-sectional shape of the body along the direction parallel to the surface of the substrate is any one of a rectangle, a circle, an ellipse, a triangle, and a regular polygon.
  • the cross-sectional shape of the body along the direction parallel to the surface of the substrate is any one of a rectangle, a circle, an ellipse, a triangle, and a regular polygon.
  • the barrier block and the substrate surface of the invention are made of the same material, and the use of the homogenous material is tightly combined, which can increase the firmness of the barrier block and not easy to fall off from the substrate;
  • the effective contact area between the large blocking block and the mass block reduces the possibility of the blocking block being damaged after being impacted.
  • FIG. 1 is a schematic diagram of a partial structure of an inertial sensor according to a specific embodiment of the present invention.
  • FIG. 2 is a schematic view of the structure of FIG. 1 when the mass is displaced around the anchor point and is in contact with the blocking block.
  • FIG. 1 is a schematic diagram of a partial structure of an inertial sensor according to this embodiment, including a blocking block 10, a mass block 11, and a base 12.
  • the blocking block 10 includes a body 101, a cover layer 102 and a conductor 103.
  • FIG. 2 is a schematic view of the structure of FIG. 1 when the mass 11 is displaced around the anchor point 14 and is in contact with the blocking block 10.
  • the contact position between the body 101 and the mass 11 is rounded, which can increase the effective contact area between the body 101 and the mass 11 and reduce the possibility of damage to the blocking block after impact Sex.
  • the surface of the body 101 and the base 12 are made of the same material, and the tight combination of the homogeneous materials can increase the firmness of the blocking block 10 and is not easy to fall off the base 12.
  • the body 101 is an insulating material, which can prevent the accumulation of electric charges generated by repeated impacts. The accumulation of charge will couple extra electrostatic force between the blocking block 10 and the mass 11, resulting in a sensor measurement deviation.
  • the covering layer can further increase the firmness of the blocking block 10.
  • the cover layer 102 is provided as a hydrophobic material, preferably silicon nitride, which can prevent water vapor contamination and prevent adhesion between the blocking block 10 and the mass block 11.
  • the blocking block 10 may further be provided with a conductor 103 connected to the conductive layer 121 in the substrate 12, and the charges accumulated on the blocking block 10 may be derived through the base 12, and may also play a role in avoiding charge accumulation.
  • the cross-sectional shape of the body 101 along the direction parallel to the surface of the base 12 can be rectangular, circular, elliptical, triangular, and regular polygonal shapes as needed Any of them.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

The present invention provides a stopping block for an inertial sensor. The stopping block is provided on the surface of a substrate and used for blocking inertial movement of a mass block, and comprises a body; the position where the body and the inertial mass block is in contact is a round corner, and the body and the surface of the substrate are made of the same material. In the present invention, the stopping block and the surface of the substrate are made of the same material so that the firmness degree of the stopping block can be increased by utilizing the characteristic of tight binding of homogeneous materials and the stopping block is not prone to shedding from the substrate. In addition, the position where the stopping block and the mass block is in contact is the round corner so that the effective contact area between the stopping block and the mass block can be increased, and the possibility that the stopping block is damaged after being bumped can be reduced.

Description

用于惯性传感器的阻挡块Block for inertial sensors 技术领域Technical field
本发明涉及MEMS技术领域，尤其涉及一种用于惯性传感器的阻挡块。The present invention relates to the field of MEMS technology, and in particular to a blocking block for inertial sensors.
背景技术Background technique
阻挡块结构是IC/MEMS传感器芯片，特别是惯性器件的重要的一部分。但是现有技术中的阻挡块结构，受冲击或者震动时易破损、易产生电荷积累、易粘连。The block structure is an important part of IC/MEMS sensor chips, especially inertial devices. However, the barrier block structure in the prior art is easily damaged when shocked or vibrated, and it is easy to generate charge accumulation and adhesion.
发明内容Summary of the invention
本发明所要解决的技术问题是，提供一种用于惯性传感器的阻挡块，受冲击或者震动时不易破损。The technical problem to be solved by the present invention is to provide a blocking block for an inertial sensor, which is not easily damaged when subjected to impact or vibration.
为了解决上述问题，本发明提供了一种用于惯性传感器的阻挡块，设置在一基底表面，用于阻挡质量块的惯性移动，包括：本体，所述本体与所述惯性质量块接触的位置为圆角，且所述本体与所述基底表面为同一材料。In order to solve the above problem, the present invention provides a blocking block for an inertial sensor, which is provided on a surface of a substrate and used for blocking the inertial movement of a mass, including: a body, a position where the body contacts the inertial mass It is rounded, and the body and the surface of the substrate are the same material.
可选的，所述阻挡块进一步包括导电体，所述导电体设置在所述本体内部，并与所述基底内的导电层连接。Optionally, the blocking block further includes a conductive body, the conductive body is disposed inside the body and connected to the conductive layer in the substrate.
可选的，所述导电体的材料为金属。Optionally, the material of the electrical conductor is metal.
可选的所述本体为绝缘材料。The optional body is an insulating material.
可选的，所述阻挡块进一步包括覆盖层，所述覆盖层覆盖于本体表面，所述覆盖层为疏水材料。Optionally, the blocking block further includes a cover layer, the cover layer covers the surface of the body, and the cover layer is a hydrophobic material.
可选的，所述覆盖层的材料为氮化硅。Optionally, the material of the cover layer is silicon nitride.
可选的，所述本体沿着平行于基底表面方向的横截面形状为矩形、圆形、椭圆形、三角形、以及正多边形中的任意一种。Optionally, the cross-sectional shape of the body along the direction parallel to the surface of the substrate is any one of a rectangle, a circle, an ellipse, a triangle, and a regular polygon.
可选的，所述本体沿着平行于基底表面方向的横截面形状为矩形、圆形、椭圆形、三角形、以及正多边形中的任意一种。Optionally, the cross-sectional shape of the body along the direction parallel to the surface of the substrate is any one of a rectangle, a circle, an ellipse, a triangle, and a regular polygon.
本发明阻挡块与基底表面为同一材料，利用同质材料结合紧密的特点，可以增加阻挡块的牢固程度，不易从基底上脱落；并且将阻挡块与质量块接触的位置为圆角，可以增大阻挡块与质量块之间的有效接触面积，降低阻挡块被撞击后破损的可能性。The barrier block and the substrate surface of the invention are made of the same material, and the use of the homogenous material is tightly combined, which can increase the firmness of the barrier block and not easy to fall off from the substrate; The effective contact area between the large blocking block and the mass block reduces the possibility of the blocking block being damaged after being impacted.
附图说明BRIEF DESCRIPTION
附图1所示是本发明一具体实施方式所述惯性传感器的部分结构示意图。FIG. 1 is a schematic diagram of a partial structure of an inertial sensor according to a specific embodiment of the present invention.
附图2所示是附图1的结构在质量块绕锚点发生位移并与阻挡块相接触的状态示意图。FIG. 2 is a schematic view of the structure of FIG. 1 when the mass is displaced around the anchor point and is in contact with the blocking block.
具体实施方式detailed description
下面结合附图对本发明提供的用于惯性传感器的阻挡块的具体实施方式做详细说明。The specific implementation of the blocking block for inertial sensors provided by the present invention will be described in detail below with reference to the drawings.
附图1所示是本具体实施方式所述惯性传感器的部分结构示意图，包括阻挡块10、质量块11、以及基底12。所述阻挡块10包括本体101、覆盖层102以及导电体103。FIG. 1 is a schematic diagram of a partial structure of an inertial sensor according to this embodiment, including a blocking block 10, a mass block 11, and a base 12. The blocking block 10 includes a body 101, a cover layer 102 and a conductor 103.
附图2所示是附图1的结构在质量块11绕锚点14发生位移并与阻挡块10相接触的状态示意图。从图中可以看出，将所述本体101与所述质量块11接触的位置为圆角，可以增大本体101与质量块11 之间的有效接触面积，降低阻挡块被撞击后破损的可能性。且所述本体101与所述基底12表面为同一材料，利用同质材料结合紧密的特点，可以增加阻挡块10的牢固程度，不易从基底12上脱落。FIG. 2 is a schematic view of the structure of FIG. 1 when the mass 11 is displaced around the anchor point 14 and is in contact with the blocking block 10. As can be seen from the figure, the contact position between the body 101 and the mass 11 is rounded, which can increase the effective contact area between the body 101 and the mass 11 and reduce the possibility of damage to the blocking block after impact Sex. In addition, the surface of the body 101 and the base 12 are made of the same material, and the tight combination of the homogeneous materials can increase the firmness of the blocking block 10 and is not easy to fall off the base 12.
并且，本体101为绝缘材料，可以防止反复撞击产生的电荷积累。电荷积累会在阻挡块10和质量块11之间耦合出额外的静电力，导致传感器测量偏差。Moreover, the body 101 is an insulating material, which can prevent the accumulation of electric charges generated by repeated impacts. The accumulation of charge will couple extra electrostatic force between the blocking block 10 and the mass 11, resulting in a sensor measurement deviation.
进一步的，设置覆盖层可以进一步增加阻挡块10的牢固程度。并且，将覆盖层102设置为疏水材料，优选为氮化硅，可以防止水汽玷污，防止阻挡块10和质量块11之间发生粘连。Further, the provision of the covering layer can further increase the firmness of the blocking block 10. Moreover, the cover layer 102 is provided as a hydrophobic material, preferably silicon nitride, which can prevent water vapor contamination and prevent adhesion between the blocking block 10 and the mass block 11.
并且，阻挡块10还可以进一步设置有导电体103与基底12内的导电层121连接，可以将阻挡块10上积累的电荷通过基地12导出，也可以起到避免电荷积累的作用。In addition, the blocking block 10 may further be provided with a conductor 103 connected to the conductive layer 121 in the substrate 12, and the charges accumulated on the blocking block 10 may be derived through the base 12, and may also play a role in avoiding charge accumulation.
为了优化本体101与质量块11之间的有效接触面积，可以根据需要，将所述本体101沿着平行于基底12表面方向的横截面形状为矩形、圆形、椭圆形、三角形、以及正多边形中的任意一种。In order to optimize the effective contact area between the body 101 and the mass 11, the cross-sectional shape of the body 101 along the direction parallel to the surface of the base 12 can be rectangular, circular, elliptical, triangular, and regular polygonal shapes as needed Any of them.
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。The above is only the preferred embodiment of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the principles of the present invention, several improvements and retouches can be made. These improvements and retouches should also be regarded as This is the protection scope of the present invention.

Claims (7)

  1. 一种用于惯性传感器的阻挡块，设置在一基底表面，用于阻挡质量块的惯性移动，其特征在于，包括：A blocking block for an inertial sensor is provided on a surface of a base for blocking the inertial movement of a mass. The characteristic features include:
    本体，所述本体与所述惯性质量块接触的位置为圆角，且所述本体与所述基底表面为同一材料。The body, the position where the body contacts the inertial mass is rounded, and the body and the substrate surface are made of the same material.
  2. 根据权利要求1所述的用于惯性传感器的阻挡块，其特征在于，所述阻挡块进一步包括导电体，所述导电体设置在所述本体内部，并与所述基底内的导电层连接。The blocking block for an inertial sensor according to claim 1, wherein the blocking block further comprises a conductive body, the conductive body is disposed inside the body, and is connected to the conductive layer in the substrate.
  3. 根据权利要求2所述的用于惯性传感器的阻挡块，其特征在于，所述导电体的材料为金属。The blocking block for an inertial sensor according to claim 2, wherein the material of the electrical conductor is metal.
  4. 根据权利要求1所述的用于惯性传感器的阻挡块，其特征在于，所述本体为绝缘材料。The blocking block for an inertial sensor according to claim 1, wherein the body is an insulating material.
  5. 根据权利要求1所述的用于惯性传感器的阻挡块，其特征在于，所述阻挡块进一步包括覆盖层，所述覆盖层覆盖于本体表面，所述覆盖层为疏水材料。The blocking block for an inertial sensor according to claim 1, wherein the blocking block further comprises a covering layer, the covering layer covers the surface of the body, and the covering layer is a hydrophobic material.
  6. 根据权利要求5所述的用于惯性传感器的阻挡块，其特征在于，所述覆盖层的材料为氮化硅。The blocking block for an inertial sensor according to claim 5, wherein the material of the cover layer is silicon nitride.
  7. 根据权利要求1所述的用于惯性传感器的阻挡块，其特征在于，所述本体沿着平行于基底表面方向的横截面形状为矩形、圆形、椭圆形、三角形、以及正多边形中的任意一种。The blocking block for an inertial sensor according to claim 1, wherein the cross-sectional shape of the body along the direction parallel to the surface of the substrate is any of a rectangle, a circle, an ellipse, a triangle, and a regular polygon One kind.
PCT/CN2019/119351 2018-12-29 2019-11-19 Stopping block for inertial sensor WO2020134714A1 (en)

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CN109506691A (en) * 2018-12-29 2019-03-22 上海矽睿科技有限公司 Stopper for inertial sensor

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CN205070840U (en) * 2015-10-27 2016-03-02 南昌工程学院 Piezoelectricity - triboelectric combined type MEMS wide band energy gatherer
CN205981220U (en) * 2016-08-17 2017-02-22 中国航空工业集团公司西安飞行自动控制研究所 A micromechanical gyroscope structure for exceeding carry environment
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