WO2020093245A1 - 一种固体激光器 - Google Patents

一种固体激光器 Download PDF

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Publication number
WO2020093245A1
WO2020093245A1 PCT/CN2018/114203 CN2018114203W WO2020093245A1 WO 2020093245 A1 WO2020093245 A1 WO 2020093245A1 CN 2018114203 W CN2018114203 W CN 2018114203W WO 2020093245 A1 WO2020093245 A1 WO 2020093245A1
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WO
WIPO (PCT)
Prior art keywords
laser
laser light
lens
mirror
output
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PCT/CN2018/114203
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English (en)
French (fr)
Inventor
丁闯
勾志勇
蒋峰
Original Assignee
深圳市创鑫激光股份有限公司
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Priority to PCT/CN2018/114203 priority Critical patent/WO2020093245A1/zh
Publication of WO2020093245A1 publication Critical patent/WO2020093245A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/101—Lasers provided with means to change the location from which, or the direction in which, laser radiation is emitted
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109—Frequency multiplication, e.g. harmonic generation

Definitions

  • the embodiments of the present application relate to the field of laser technology, in particular to a solid-state laser.
  • Ultraviolet lasers have high photon energy and can directly destroy many molecules of non-metallic materials during material processing to achieve "cold" processing. Moreover, the ultraviolet laser has a small spot, short wavelength, and good focusing performance, which is suitable for processing fine structures.
  • Green solid-state lasers have the advantages of high efficiency, high power, good beam quality, small size, long life, etc., and are widely used in color display, laser medical, underwater communication, precious metal marking and other fields.
  • a laser may be required to output multiple wavelengths, and dual-wavelength lasers have become a research hotspot.
  • dual-wavelength lasers are also required in laser medical environmental biology. For example, when processing a part composed of multiple materials, according to the material properties, thickness, incident spot size requirements, power requirements, etc., Need to be able to freely switch between different wavelengths of laser.
  • the applicant of the present application found that the current dual-wavelength laser simultaneously generates laser light of two wavelengths through the dichroic prism, and the conversion efficiency is low.
  • the technical problem mainly solved by the embodiments of the present application is to provide a solid-state laser capable of selectively outputting lasers of different wavelengths, and having only one band of laser output required at the same time, with high conversion efficiency.
  • a technical solution adopted by the embodiments of the present application is to provide a solid-state laser, including: a laser input module for generating and emitting a laser light source; and a first wavelength laser generating module provided at the laser input The output end of the module is used to convert the laser light source into the first laser and output; the rotatable mirror is provided at the output end of the first wavelength laser generating module, the rotatable mirror is provided with a first area and a Two areas, the rotatable mirror is used to transmit the first laser light through the first area when in the first position, so that the first laser light is output in the first output direction of the rotatable mirror, When in the second position, the first laser light is reflected through the second area, so that the first laser light is output along the second output direction of the rotatable mirror; a second wavelength laser generating module is provided in the The second output direction of the rotatable mirror is used to convert and output the first laser light reflected by the second area into a second laser light
  • the first wavelength laser generating module includes a first lens, a laser crystal, an acousto-optic Q switch, a second lens, a first dichroic mirror, a first frequency-doubling crystal, and a third lens arranged in sequence;
  • the first lens is provided at the output end of the laser input module, the first lens is used for transmitting the laser light source;
  • the laser crystal converts the laser light source output by the first lens into a third Laser;
  • the acousto-optic Q switch is used to modulate the continuous third laser output by the laser crystal into the pulsed third laser;
  • the second lens is used to reflect the output of the acousto-optic Q switch
  • the first dichroic mirror is used to reflect the third laser reflected by the second lens;
  • the first frequency-doubling crystal is used to reflect through the first dichroic mirror
  • the third lens is used to reflect the third laser output from the first frequency doubling crystal to the first frequency doubling crystal;
  • part of the third laser light is on the first lens, the laser crystal, the acousto-optic Q switch, the second lens, the first dichroic mirror, and the first frequency doubling It oscillates between the crystal and the third lens until it is converted into the first laser, and then is output from the first dichroic mirror to the rotatable mirror.
  • the second wavelength laser generating module includes a second dichroic mirror, a fourth lens, a second frequency-doubling crystal, and a fifth lens arranged in sequence; the rotatable mirror is also specifically used for: In the second position, the first laser light transmitted by the first dichroic mirror is reflected through the second area; the second dichroic mirror is provided in the reflection direction of the rotatable mirror, so The second dichroic mirror is used to reflect the first laser light reflected through the rotatable mirror; the fourth lens is used to reflect the first laser light output from the second dichroic mirror; The second frequency doubling crystal is used to reflect the first laser light reflected through the fourth lens; the fifth lens is used to reflect the first laser light transmitted through the second frequency doubling crystal; the second The frequency doubling crystal is also used to convert the first laser reflected by the fifth lens into the second laser; the fourth lens is also used to transmit the second laser output through the second frequency doubling crystal Laser light, so that the second laser light is emitted in the second direction.
  • the rotatable mirror is
  • part of the first laser light oscillates between the second dichroic mirror, the fourth lens, the second frequency-doubling crystal, and the fifth lens until converted to the second
  • the laser light is then output from the fourth lens.
  • the first direction is the same as the second direction.
  • the laser light source is a 878 nm laser
  • the first laser is a 532 nm laser
  • the second laser is a 266 nm laser
  • the third laser is a 1064 nm laser.
  • the solid-state laser further includes: a focusing module; the focusing module is disposed between the laser input module and the first wavelength laser generating module, and the focusing module is used to output the laser input module The laser light source is focused.
  • the focusing module includes: a first plano-convex mirror and a second plano-convex mirror, the convex surface of the first plano-convex mirror and the convex surface of the second plano-convex mirror are disposed oppositely, the first plano-convex The mirror is used to input the laser light source, and the second plano-convex mirror is used to output the focused laser light source.
  • the solid-state laser further includes: a rotary displacement device, the rotatable mirror is provided on the rotary displacement device; the rotary displacement device is used to rotate the rotatable mirror to the first position, The first region is transmitted through the first laser light, or the rotatable mirror is rotated to the second position, so that the second region reflects the first laser light.
  • the rotation displacement device includes: a first synchronous electric gear, a second synchronous electric gear, a third synchronous electric gear, and a base; the rotatable mirror, the first synchronous electric gear, and the second synchronous
  • the electric gear and the third synchronous electric gear are mounted on the base, and the first synchronous electric gear, the second synchronous electric gear and the third synchronous electric gear are respectively provided on the side of the rotatable mirror
  • the first synchronous electric gear, the second synchronous electric gear, and the third synchronous electric gear are used to drive the rotatable rotation.
  • the solid-state laser further includes: a limiting device; the limiting device is used to limit the position of the rotatable mirror so that the rotatable mirror stops at the first position or the second position.
  • the solid-state laser further includes: a controller connected to the rotational displacement device; the controller is used to control the rotational displacement device to cause all The rotatable mirror rotates to the first position; when receiving the second wavelength laser output instruction, the rotary displacement device is controlled to rotate the rotatable mirror to the second position.
  • the controller is also connected to the laser input module, the first wavelength laser generating module and the second wavelength laser generating module.
  • the beneficial effects of the embodiments of the present application are: different from the situation in the prior art, the embodiments of the present application provide a solid-state laser that generates a laser light source through a laser input module, and the first wavelength laser generating module receives the laser light source output by the laser input module, The laser light source is converted into the first laser, and the rotatable mirror rotates to a different position, thereby selectively outputting the first laser or the second laser.
  • the wavelengths of the first laser and the second laser are different, so that there is only one needed at the same time Band laser output, the conversion efficiency is higher.
  • FIG. 1 is a schematic structural diagram of a solid-state laser provided by an embodiment of the present application.
  • FIG. 2 is a partial structural schematic diagram of a solid-state laser provided by an embodiment of the present application.
  • FIG. 3 is a schematic diagram of a circuit structure of a solid-state laser provided by an embodiment of the present application.
  • a laser source is incident on a beam splitter prism to separate two wavelengths of laser light, so that two wavelengths of laser light can be generated at the same time, but the conversion efficiency is low in this way.
  • a higher power laser source is required.
  • lasers of two wavelengths must be output at the same time, selection and switching cannot be performed, and the selectivity is poor.
  • the embodiments of the present application provide a solid-state laser.
  • lasers of different wavelengths can be selected to output, and only one band of laser output is needed at a time, and the conversion efficiency is high.
  • the solid-state laser will be described below through examples.
  • FIG. 1 is a schematic structural diagram of a solid-state laser provided by an embodiment of the present application.
  • the solid-state laser 100 includes a laser input module 110, a first wavelength laser generation module 120, a rotatable mirror 130, and a second wavelength laser generation module 140.
  • the first wavelength laser generating module 120 is provided at the output end of the laser input module 110, the rotatable mirror 130 is provided at the output end of the first wavelength laser generating module 120, and the rotatable mirror 130 is provided with a first output direction and a second output Direction, the output direction of the first wavelength laser generating module 120 is the same as the first output direction, and the second wavelength laser generating module 140 is disposed in the second output direction of the rotatable mirror 130.
  • the laser input module 110 is used to generate and emit a laser light source
  • the first wavelength laser generation module 120 is used to receive the laser light source, and convert the laser light source into the first laser light and output
  • the rotatable mirror 130 is used to When in the first position, through the first laser, the first laser is output in the first output direction of the rotatable mirror 130, when in the second position, the first laser is reflected, so that the first laser is along the The second output direction is output.
  • the second wavelength laser generating module 140 is used to convert the first laser light reflected by the rotatable mirror 130 into a second laser light and output it.
  • the laser light source is a semiconductor laser at 878 nm
  • the first laser is a 532 nm laser (green laser)
  • the second laser is a 266 nm laser (ultraviolet laser).
  • the laser light source, the first laser, and the second laser can also be lasers of other wavelengths, as long as the following conditions are met: the wavelength of the laser light source can generate the first laser after being input into the first wavelength laser generating module 120, and the wavelength of the first laser It is twice the wavelength of the second laser.
  • the laser input module 110 may be a semiconductor laser for generating and emitting a laser light source, thereby providing a light source for the solid-state laser 100.
  • the first wavelength laser generating module 120 includes: a first lens 121, a laser crystal 122, an acousto-optic Q switch 123, a second lens 124, a first dichroic mirror 125, a first frequency-doubling crystal 126, and a third lens 127.
  • the first lens 121, the laser crystal 122, the acousto-optic Q switch 123, the second lens 124, the first dichroic mirror 125, the first frequency-doubling crystal 126, and the third lens 127 are respectively arranged in sequence.
  • the first lens 121, the laser crystal 122, the acousto-optic Q switch 123, and the second lens 124 are arranged in sequence, the first dichroic mirror 125, the first frequency doubling crystal 126, and the third lens 127 are arranged in sequence, and the first lens 121.
  • the laser light transmitted by the laser crystal 122, the acousto-optic Q switch 123 and the second lens 124 is parallel to the first direction, and the laser light transmitted by the first dichroic mirror 125, the first frequency doubling crystal 126 and the third lens 127
  • the direction is the same as or opposite to the first direction.
  • the first lens 121 is disposed on the output end of the laser input module 110
  • the laser crystal 122 is disposed on the side of the first lens 121 away from the laser input module 110
  • the acousto-optic Q switch 123 is disposed on the laser crystal 122 away from the first lens 121
  • the second lens 124 is located on the side of the acousto-optic Q switch 123 away from the laser crystal 122, and is inclined at 45 degrees.
  • the first dichroic mirror 125 is opposite to the second lens 124 and is inclined at 45 degrees.
  • the first frequency doubling crystal 126 is provided between the first dichroic mirror 125 and the third lens 127.
  • the laser crystal 122 is provided at the output end of the first lens 121, the acousto-optic Q switch 123 is provided at the output end of the laser crystal 122, the second lens 124 is provided at the output end of the acousto-optic Q switch 123, and the first dichroic mirror 125 is provided At the output end of the second lens 124, the first frequency doubling crystal 126 is provided at the reflection end of the first dichroic mirror 125, and the third lens 127 is provided at the output end of the first frequency doubling crystal 126.
  • the first lens 121, the laser crystal 122, the acousto-optic Q switch 123, the second lens 124, the first dichroic mirror 125, the first frequency-doubling crystal 126, and the third lens 127 constitute a resonant cavity.
  • the first lens 121 may be a plane mirror or a curved mirror, specifically a front cavity plane mirror of the resonant cavity, which belongs to a total reflection mirror.
  • An end surface of the first lens 121 close to the laser input module 110 is coated with an 878 nm AR coating, and an end surface of the first lens 121 close to the laser crystal 122 is coated with an 878 nm AR coating and a 1064 nm high reflection film.
  • the first lens 121 is used to transmit the 878 nm laser light source emitted by the laser input module 110 and reflect the 1064 nm laser to prevent it from entering the laser input module 110.
  • the laser crystal 122 is a yttrium aluminum garnet crystal (Neodymium-doped Yttrium Aluminium Garnet; Nd: Y3Al5O12), which is a YAG laser crystal, which jumps to a high energy level after absorbing 878 nm pump light, thereby radiating 1064 nm light. Both end surfaces of the laser crystal 122 are coated with a 1064 nm high reflection film and a 878 nm antireflection film. In the present embodiment, the laser crystal 122 is used to convert the 878 nm laser light source output by the first lens 121 into a third laser of 1064 nm.
  • the acousto-optic Q switch 123 can convert the continuous laser power output into a laser pulse output with high peak power through Q-switching technology.
  • the acousto-optic Q switch 123 is used to modulate the continuous third laser light output by the laser crystal 122 into a pulsed third laser light, wherein the third laser light is a 1064 nm laser light.
  • the second lens 124 may be a mirror made of a plane mirror or a curved mirror.
  • the reflection surface of the second lens 124 is at 45 degrees to the optical axis of the third laser light emitted from the acousto-optic Q switch 123, and the end surface of the second lens 124 near the resonant cavity is coated with a 1064 nm high reflection film to improve the reflection efficiency.
  • the second lens 124 is used to reflect the 1064 nm third laser light output by the acousto-optic Q switch 123.
  • the first dichroic mirror 125 can reflect 1064 nm laser light on its inner surface, and can transmit 532 nm laser light.
  • the first dichroic mirror 125 is used to receive the third laser light reflected by the second lens 124 at a 45-degree angle and reflect the third laser light to the first frequency-doubling crystal 126; the first dichroic mirror 125 is also used for the first laser light output through the first frequency doubling crystal 126, so that the first laser light is output in the direction of the rotatable mirror 130.
  • the first frequency doubling crystal 126 is a frequency doubling crystal, for example, a lithium triborate crystal (LBO), which cooperates with the laser crystal 122 and the acousto-optic Q switch 123, so that the conversion efficiency of the resonant cavity is high. Both ends of the first frequency-doubling crystal 126 are plated with an antireflection coating of 1064 nm and an antireflection coating of 532 nm.
  • LBO lithium triborate crystal
  • the first frequency doubling crystal 126 is used for the third laser light reflected through the first dichroic mirror 125, and the first frequency doubling crystal 126 is also used to convert the third laser light reflected by the third lens 127 into The first laser light is output in the direction where the first dichroic mirror 125 and the rotatable mirror 130 are located.
  • the third lens 127 is a reflection mirror, and the third lens 127 is adjustable, which is an adjustable rear cavity plane mirror of the resonant cavity.
  • the inner side of the cavity of the third lens 127 near the resonant cavity is coated with a 1064 nm high reflection film and a 532 nm high reflection film to increase the reflection efficiency.
  • the third lens 127 is used to reflect the third laser light with a wavelength of 1064 nm output from the first frequency doubling crystal 126 to the first frequency doubling crystal 126.
  • the working process of the first wavelength laser generating module 120 is roughly as follows: the first lens 121 emits a 878 nm laser light source through the laser input module 110, and the laser light source is converted into a third wavelength of 1064 nm in the laser crystal 122 Laser light, the acousto-optic Q switch 123 modulates the continuous third laser light into a pulsed third laser light, the second lens 124 reflects the third laser light to the first dichroic mirror 125, and the first dichroic mirror 125 converts the third laser light Reflected to the first frequency doubling crystal 126, the third laser light passes through the first frequency doubling crystal 126 and enters the third lens 127, the third lens 127 reflects the third laser light to the first frequency doubling crystal 126, the first frequency doubling crystal 126 converts the third laser light with a wavelength of 1064 nm into the first laser light with a wavelength of 532 nm and outputs it to the first dichroic mirror 125.
  • the first laser light passes through the first dichroic mirror 125 and is output to the rotatable mirror 130.
  • part of the 1064nm third laser that is not converted will be in the first lens 121, the laser crystal 122, the acousto-optic Q switch 123, the second lens 124, the first dichroic The mirror 125, the first frequency doubling crystal 126, and the third lens 127 oscillate until they are converted into 532nm laser light, and then output from the first dichroic mirror 125 to the rotatable mirror 130.
  • the rotatable mirror 130 is disposed on a side of the first dichroic mirror 125 away from the first frequency-doubling crystal 126, and is used to receive the first laser light output by the first wavelength laser generating module 120.
  • the rotatable mirror 130 is provided with a first output direction and a second output direction, wherein the direction of the first laser light output by the first wavelength laser generating module 120 is the same as the first output direction of the rotatable mirror 130; the second wavelength laser generating module 140 is set in the second output direction of the rotatable mirror 130 to receive the first laser light reflected by the rotatable mirror 130.
  • the rotatable mirror 130 may be a rotatable flat circular mirror, and the rotatable mirror 130 has a first area 131 and a Two regions 132, the ratio of the areas of the first region 131 and the second region 132 can be set to an equal ratio or other ratios, the first region 131 is coated with a 532nm antireflection coating (R ⁇ 0.2%), and the second region 132 is coated with 532nm High reflective film (R> 99.9%) and 266nm high reflective film.
  • the first area 131 is used to transmit the first laser light, and the second area 132 is used to reflect the first laser light.
  • the first laser light transmitted through the first dichroic mirror 125 is incident on the first area 131, so that the first laser light passes through the first area and the first laser light is emitted in the first direction
  • the first laser light transmitted through the first dichroic mirror 125 is incident on the second area 132, and the second area 132 reflects the first laser light to the second wavelength laser generating module 140, so that The first laser light is emitted along the second output direction of the rotatable mirror 130.
  • the first direction can be the first output direction of the rotating mirror 130, and the second output direction of the rotatable mirror 130 is perpendicular to the first direction. Therefore, in the above manner, when the first laser light needs to be output, the rotatable mirror 130 is rotated to the first position, and when the second laser light needs to be output, the rotatable mirror 130 is rotated to the second position.
  • the second wavelength laser generating module 140 includes: a second dichroic mirror 141, a fourth lens 142, a second frequency-doubling crystal 143, and a fifth lens 144.
  • the second dichroic mirror 141, the fourth lens 142, the second frequency doubling crystal 143 and the fifth lens 144 are arranged in sequence.
  • the second dichroic mirror 141 is disposed in the second output direction of the rotatable mirror 130
  • the fourth lens 142 is disposed on the side of the second dichroic mirror 141 away from the rotatable mirror 130
  • the second frequency-doubling crystal 143 5 is arranged in the vertical direction of the second output direction of the rotatable mirror 130
  • the second frequency-doubling crystal 143 is arranged between the fourth lens 142 and the fifth lens 144.
  • an end surface of the second dichroic mirror 141 near the rotatable mirror 130 is coated with a 532 nm AR coating
  • an end surface near the fourth lens 142 is coated with a 532 nm AR coating and a 266 nm high reflection coating.
  • the second dichroic mirror 141 can transmit 532 nm laser light and reflect 266 nm laser light.
  • the second dichroic mirror 141 is used to transmit the 532 nm first laser light reflected by the rotatable mirror 130 and output to the fourth lens 142.
  • the fourth lens 142 may be a reflecting mirror or a dichroic mirror made of a plane mirror or a curved mirror.
  • the fourth lens 142 can reflect 532 nm laser light and can transmit 266 nm laser light.
  • the reflection surface of the fourth lens 142 is at 45 degrees to the direction of the incident first laser light, and an end surface of the fourth lens 142 near the second dichroic mirror 141 is coated with a 532 nm high reflection film and a 266 nm antireflection film.
  • the fourth lens 142 is used to receive the first laser light output by the second dichroic mirror 141 at a 45-degree angle and reflect the first laser light to the second frequency-doubling crystal 143.
  • the fourth lens 142 also The second laser light transmitted through the second frequency-doubling crystal 143 is used to emit the second laser light in the second direction.
  • the second frequency doubling crystal 143 is a frequency doubling crystal, for example, it can be barium metaborate crystal (BBO). Both ends of the second frequency-doubling crystal 143 are plated with an anti-reflection coating of 532 nm and an anti-reflection coating of 266 nm.
  • the second frequency doubling crystal 143 is used to transmit the first laser light reflected from the fourth lens 142, and the second frequency doubling crystal 143 is also used to receive the first laser light reflected from the fifth lens 144, and the One laser is converted into a second laser.
  • the second laser is a 266 nm laser.
  • the fifth lens 144 is a reflecting mirror, specifically a plane mirror, and the reflecting surface of the fifth lens 144 near the second frequency-doubling crystal 143 is plated with a 532 nm high reflection film and a 266 nm high reflection film.
  • the fifth lens 144 is used to reflect the first laser light transmitted from the second frequency doubling crystal 143 back to the second frequency doubling crystal 143.
  • the working process of the second wavelength laser generating module 140 is roughly as follows: the rotatable mirror 130 reflects the first laser beam of 532 nm wavelength output by the first wavelength laser generating module 120 to the second dichroic mirror 141, A laser passes through the second dichroic mirror 141 and enters the fourth lens 142.
  • the fourth lens 142 reflects the first laser to the second frequency doubling crystal 143, and the first laser passes through the second frequency doubling crystal 143 to
  • the fifth lens 144 reflects the first laser to the second frequency-doubling crystal 143, and the second frequency-doubling crystal 143 converts the 532nm first laser into a 266nm wavelength second laser and outputs it to the fourth lens 142.
  • the two lasers are output through the fourth lens 142.
  • part of the 532nm first laser that has not been converted will be among the second dichroic mirror 141, the fourth lens 142, the second frequency-doubling crystal 143, and the fifth lens 144 It oscillates intermittently until it is converted into 266nm laser light, and then is output from the fourth lens 142.
  • the first direction in which the first laser beam is emitted is the same as the second direction in which the second laser beam is emitted.
  • the output direction of the first wavelength laser generating module 120 is the same as the output direction of the second wavelength laser generating module 140, and the first output direction of the rotatable mirror 130 is perpendicular to the second output direction.
  • the first laser light output by the first wavelength laser generating module 120 is emitted along the first output direction of the rotatable mirror 130, and when the rotatable mirror 130 is at the second position, the first wavelength laser The first laser light output by the generating module 120 is emitted along the second output direction of the rotatable mirror 130, converted into a second laser by the second wavelength laser generating module 140 and output, so that the first direction of the first laser emission and the second laser The second direction of exit is the same.
  • the cavity structure of the solid-state laser 100 is regular, the difficulty of assembly and production is small, and the direction of the output laser is the same, which provides convenience for the construction of the peripheral optical path of the laser.
  • the solid-state laser 100 further includes a focusing module 150.
  • the focusing module 150 is disposed between the laser input module 110 and the first wavelength laser generating module 120.
  • the focusing module 150 is used to focus the laser light source output by the laser input module 110 to focus it on the first wavelength laser generating module 120.
  • the thermal lens effect of the laser crystal 122 is reduced, and the conversion efficiency of the crystal is improved.
  • the focusing module 150 includes a first plano-convex mirror 151 and a second plano-convex mirror 152.
  • the convex surface of the first plano-convex mirror 151 and the convex surface of the second plano-convex mirror 152 are oppositely arranged.
  • the first plano-convex mirror 151 is located near the end of the laser input module 110.
  • the first plano-convex mirror 151 is used to input the laser light source emitted by the laser input module 110;
  • the second plano-convex mirror 152 is located near the end of the first lens 121
  • the second plano-convex mirror 152 is used to output and focus the laser light source to the laser crystal 122.
  • the solid-state laser 100 further includes: a rotation displacement device 160 and a limit device 170.
  • the rotatable mirror 130 is installed on the rotation displacement device 160
  • the limiting device 170 is installed on the rotation displacement device 160.
  • the rotation displacement device 160 is used to rotate the rotatable mirror 130 to the first position, so that the first region 131 transmits the first laser, or rotate the rotatable mirror 130 to the second position, so that the second region 132 Reflect the first laser to achieve the purpose of wavelength switching.
  • the limiting device 170 is used to limit the position of the rotatable mirror 130 so that the rotatable mirror 130 stops at the first position or the second position.
  • the rotation displacement device 160 may include: a first synchronous electric gear 161, a second synchronous electric gear 162, a third synchronous electric gear 163, and a base 164.
  • the rotatable mirror 130 is installed on the base 164, and the first synchronous electric gear 161, the second synchronous electric gear 162, and the third synchronous electric gear 163 are installed on the base 164, and the first synchronous electric gear 161, the second synchronous electric gear 162, and The third synchronous electric gears 163 are respectively provided at different positions on the side of the rotatable mirror 130.
  • the rotation axis J1 of the first synchronous electric gear 161, the rotation axis J2 of the second synchronous electric gear 162, and the rotation axis J3 of the third synchronous electric gear 163 rotate synchronously to make the first synchronous electric gear 161.
  • the second synchronous electric gear 162 and the third synchronous electric gear 163 drive the rotatable mirror 130 to rotate.
  • J1 is an electric rotating spindle
  • J2 and J3 are optical circular orbits to ensure that the angle between the lens and the incident optical path is constant.
  • J1 is the driving axis, J2, J3 driven axis.
  • the limit device 170 may be a limit switch.
  • the rotary displacement device 160 stops rotating, so that the rotatable The mirror 130 stops at the first position or the second position.
  • the solid-state laser 100 further includes: a controller 180.
  • the controller 180 is connected to the rotation displacement device 160.
  • the controller 180 is used to: when receiving the first wavelength laser output instruction, control the rotation displacement device 160 to rotate the rotatable mirror 130 to the first position; when receiving the second wavelength laser When the command is output, the rotary displacement device 160 is controlled to rotate the rotatable mirror 130 to the second position.
  • the controller 180 is also connected to the laser input module 110, the first wavelength laser generating module 120, and the second wavelength laser generating module 140
  • the controller 180 is also used to: after the rotatable mirror 130 is rotated to the first position, control the first frequency doubling crystal 126 of the first wavelength laser generating module 120 to work so that the first frequency doubling crystal 126 reaches the preset operating temperature ,
  • the laser input module 110 is controlled to output a laser light source, and the acousto-optic Q switch of the first wavelength laser generating module 120 is turned on to output the first laser; after the rotatable mirror 130 is rotated to the second position, the first wavelength laser is controlled to be generated
  • the first frequency doubling crystal 126 of the module 120 works, and at the same time controls the operation of the second frequency doubling crystal 143 of the second wavelength laser generating module 140 so that the first frequency doubling crystal 126 and the second frequency doubling crystal 143 reach
  • the solid-state laser 100 generates a laser light source through the laser input module 110
  • the first wavelength laser generation module 120 receives the laser light source output from the laser input module 110, and converts the laser light source into the first laser light
  • the rotatable mirror 130 passes Rotate to a different position to select the first laser or the second laser.
  • the wavelength of the first laser and the second laser are different, so that only one band of laser output is needed at the same time, the conversion efficiency is higher, and it is more convenient and more convenient. Element laser marking materials, users can freely switch the laser band according to the needs of the material.

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Abstract

一种固体激光器（100），包括：激光输入模块（110），用于产生并出射激光光源；第一波长激光产生模块（120），设于激光输入模块（110）的输出端，用于将激光光源转换为第一激光并输出；可旋转镜（130），设于第一波长激光产生模块（120）的输出端，可旋转镜（130）设有第一区域（131）和第二区域（132），可旋转镜（130）用于当位于第一位置时，通过第一区域（131）透过第一激光，使第一激光沿可旋转镜（130）的第一输出方向输出，当位于第二位置时，通过第二区域（132）反射第一激光，使第一激光沿可旋转镜（130）的第二输出方向输出；第二波长激光产生模块（140），设于可旋转镜（130）的第二输出方向，用于将第二区域（132）反射的第一激光转换为第二激光并输出。能选择输出不同波长的激光，同一时间仅有需要的一个波段的激光输出，转换效率较高。

Description

一种固体激光器 技术领域
本申请实施例涉及激光技术领域，特别是涉及一种固体激光器。
背景技术
紫外激光器具有高的光子能量，在材料加工中能够直接破坏许多非金属材料的分子，以实现“冷”加工处理，并且，紫外激光光斑小、波长短、聚焦性能好，适合微细结构的加工。
绿色固体激光器具有效率高、功率大、光束质量好、体积小、寿命长等优点，在彩色显示、激光医疗、水下通信、贵重金属标刻等领域有着广泛的应用。
近些年来，由于激光打标材料的种类越来越丰富，可能需要一台激光器能够输出多种波长，双波长激光器成为研究的热点。不仅如此，在激光医疗环境生物学中也对双波长激光器提出了要求，例如，当加工一个由多种材料组成的部件时，根据材料的属性、厚度、入射光斑尺寸要求、功率需求等情况，需要能够自由切换不同波长的激光。
本申请的申请人在实现本申请实施例的过程中发现：目前的双波长激光器通过分光棱镜同时产生两种波长的激光，转换效率较低。
申请内容
本申请实施例主要解决的技术问题是提供一种固体激光器，能够选择输出不同波长的激光，同一时间仅有需要的一个波段的激光输出，转换效率较高。
为解决上述技术问题，本申请实施例采用的一个技术方案是：提供一种固体激光器，包括:激光输入模块，用于产生并出射激光光源；第一波长激光产生模块，设于所述激光输入模块的输出端，用于将所述激光光源转换为第一激光并输出；可旋转镜，设于所述第一波长激光产生模块的输出端，所述可旋转镜设有第一区域和第二区域，所述可旋转镜用于当位于第一位置时，通过所述第一区域透过所述第一激光，使所述第一激光沿所述可旋转镜的第一输出方向输出，当位于第二位置时，通过所述第二区域反射所述第一激光，使所述第一激光沿所述可旋转镜的第二输出方向输出；第二波长激光产生模块，设于所述可旋转镜的第二输出方向，用于将所述第二区域反射的所述第一激光转换为第 二激光并输出。
可选地，所述第一波长激光产生模块包括依次设置的第一镜片、激光晶体、声光Q开关、第二镜片、第一二向色镜、第一倍频晶体、第三镜片；所述第一镜片设于所述激光输入模块的输出端，所述第一镜片用于透过所述激光光源；所述激光晶体于将所述第一镜片输出的所述激光光源转换为第三激光；所述声光Q开关用于将所述激光晶体输出的连续的所述第三激光调制为脉冲的所述第三激光；所述第二镜片用于反射所述声光Q开关输出的所述第三激光；所述第一二向色镜用于反射所述第二镜片反射的所述第三激光；所述第一倍频晶体用于透过所述第一二向色镜反射的所述第三激光；所述第三镜片用于将所述第一倍频晶体输出的所述第三激光反射至所述第一倍频晶体；所述第一倍频晶体还用于将所述第三镜片反射的所述第三激光转换为所述第一激光；所述第一二向色镜还用于透过所述第一倍频晶体输出的所述第一激光；所述可旋转镜设于所述第一二向色镜与所述第一倍频晶体相对的一侧，所述可旋转镜具体用于：当位于所述第一位置时，通过所述第一区域透过所述第一二向色镜透过的所述第一激光，使所述第一激光沿第一方向出射。
可选地，部分所述第三激光在所述第一镜片、所述激光晶体、所述声光Q开关、所述第二镜片、所述第一二向色镜、所述第一倍频晶体和所述第三镜片之间振荡，直至转换为所述第一激光，然后从所述第一二向色镜输出至所述可旋转镜。
可选地，所述第二波长激光产生模块包括依次设置的第二二向色镜、第四镜片、第二倍频晶体、第五镜片；所述可旋转镜还具体用于：当位于所述第二位置时，通过所述第二区域反射所述第一二向色镜透过的所述第一激光；所述第二二向色镜设于所述可旋转镜的反射方向，所述第二二向色镜用于透过所述可旋转镜反射的所述第一激光；所述第四镜片用于反射所述第二二向色镜输出的所述第一激光；所述第二倍频晶体用于透过所述第四镜片反射的所述第一激光；所述第五镜片用于反射所述第二倍频晶体透过的所述第一激光；所述第二倍频晶体还用于将所述第五镜片反射的所述第一激光转换为所述第二激光；所述第四镜片还用于透过所述第二倍频晶体输出的所述第二激光，使所述第二激光沿第二方向出射。
可选地，部分所述第一激光在所述第二二向色镜、所述第四镜片、所述第 二倍频晶体、所述第五镜片之间振荡，直至转换为所述第二激光，然后从所述第四镜片输出。
可选地，所述第一方向与所述第二方向相同。可选地，所述激光光源为878nm激光，所述第一激光为532nm激光，所述第二激光为266nm激光，所述第三激光为1064nm激光。
可选地，所述固体激光器还包括：聚焦模块；所述聚焦模块设于所述激光输入模块与所述第一波长激光产生模块之间，所述聚焦模块用于对所述激光输入模块输出的所述激光光源进行聚焦。
可选地，所述聚焦模块包括：第一平凸镜和第二平凸镜，所述第一平凸镜的凸面和所述第二平凸镜的凸面相对设置，所述第一平凸镜用于输入所述激光光源，所述第二平凸镜用于输出所述聚焦后的激光光源。
可选地，所述固体激光器还包括：旋转位移装置，所述可旋转镜设于所述旋转位移装置；所述旋转位移装置用于使所述可旋转镜旋转至所述第一位置，以使所述第一区域透过所述第一激光，或者，使所述可旋转镜旋转至所述第二位置，以使所述第二区域反射所述第一激光。
可选地，所述旋转位移装置包括：第一同步电动齿轮、第二同步电动齿轮、第三同步电动齿轮和底座；所述可旋转镜、所述第一同步电动齿轮、所述第二同步电动齿轮和所述第三同步电动齿轮安装于所述底座，所述第一同步电动齿轮、所述第二同步电动齿轮和所述第三同步电动齿轮分别设于所述可旋转镜的侧面的不同位置，所述第一同步电动齿轮、所述第二同步电动齿轮和所述第三同步电动齿轮用于带动所述可旋转转动。
可选地，所述固体激光器还包括：限位装置；所述限位装置用于限制所述可旋转镜的位置，以使所述可旋转镜停止于所述第一位置或所述第二位置。
可选地，所述固体激光器还包括：控制器，所述控制器与所述旋转位移装置连接；所述控制器用于当接收到第一波长激光输出指令时，控制所述旋转位移装置使所述可旋转镜旋转至所述第一位置；当接收到第二波长激光输出指令时，控制所述旋转位移装置使所述可旋转镜旋转至所述第二位置。
可选地，所述控制器还与所述激光输入模块、所述第一波长激光产生模块和所述第二波长激光产生模块连接。
本申请实施例的有益效果是：区别于现有技术的情况，本申请实施例提供 一种固体激光器，通过激光输入模块产生激光光源，第一波长激光产生模块接收激光输入模块输出的激光光源，并将激光光源转换为第一激光，可旋转镜通过旋转至不同的位置，从而选择输出第一激光或者第二激光，第一激光与第二激光的波长不同，使得同一时间仅有需要的一个波段的激光输出，转换效率较高。
附图说明
一个或多个实施例通过与之对应的附图中的图片进行示例性说明，这些示例性说明并不构成对实施例的限定，附图中具有相同参考数字标号的元件表示为类似的元件，除非有特别申明，附图中的图不构成比例限制。
图1为本申请实施例提供的一种固体激光器的结构示意图；
图2为本申请实施例提供的一种固体激光器的部分结构示意图；
图3为本申请实施例提供的一种固体激光器的电路结构示意图。
具体实施方式
为了便于理解本申请，下面结合附图和具体实施例，对本申请进行更详细的说明。需要说明的是，当元件被表述“固定于”另一个元件，它可以直接在另一个元件上、或者其间可以存在一个或多个居中的元件。当一个元件被表述“连接”另一个元件，它可以是直接连接到另一个元件、或者其间可以存在一个或多个居中的元件。本说明书所使用的术语“垂直的”、“水平的”、“左”、“右”、“上”、“下”、“内”、“外”、“底部”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。此外，术语“第一”、“第二”等仅用于描述目的，而不能理解为指示或暗示相对重要性。
除非另有定义，本说明书所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。在本申请的说明书中所使用的术语只是为了描述具体的实施例的目的，不是用于限制本申请。本说明书所使用的术语“和/或”包括一个或多个相关的所列项目的任意的和所有的组合。
此外，下面所描述的本申请不同实施例中所涉及的技术特征只要彼此之间未构成冲突就可以相互结合。
目前的双波长激光器，通过一束激光源入射到分光棱镜，分离出两种波长的激光，从而能够同时产生两种波长的激光，但这种方式转换效率较低，若要获取较大功率的激光输出，则需要较大功率的激光源。并且，必须需要两种波长的激光同时输出，不能进行选择和切换，选择性较差。
基于此，本申请实施例提供一种固体激光器，通过设置可旋转镜，能够选择输出不同波长的激光，同一时间仅有需要的一个波段的激光输出，转换效率较高。
具体地，下面将通过实施例对固体激光器进行阐述。
请参阅图1，为本申请实施例提供的一种固体激光器的结构示意图。如图1所示，固体激光器100包括：激光输入模块110、第一波长激光产生模块120、可旋转镜130和第二波长激光产生模块140。
其中，第一波长激光产生模块120设于激光输入模块110的输出端，可旋转镜130设于第一波长激光产生模块120的输出端，可旋转镜130设有第一输出方向和第二输出方向，第一波长激光产生模块120的输出方向与第一输出方向相同，第二波长激光产生模块140设于可旋转镜130的第二输出方向。在本实施例中，激光输入模块110用于产生并出射激光光源，第一波长激光产生模块120用于接收激光光源，并将激光光源转换为第一激光并输出，可旋转镜130用于当位于第一位置时，透过第一激光，使第一激光沿可旋转镜130的第一输出方向输出，当位于第二位置时，反射第一激光，使第一激光沿可旋转镜130的第二输出方向输出，第二波长激光产生模块140用于将可旋转镜130反射的第一激光转换为第二激光并输出。
其中，在本实施例中，激光光源为878nm的半导体激光，第一激光为532nm激光(绿光激光)，第二激光为266nm激光(紫外激光)。当然，激光光源、第一激光、第二激光还可以为其他波长激光，只要满足以下条件即可：激光光源的波长输入第一波长激光产生模块120后能够产生第一激光，第一激光的波长是第二激光的波长的两倍。
激光输入模块110可以为半导体激光器，用于产生并出射激光光源，从而为固体激光器100提供光源。
第一波长激光产生模块120包括：第一镜片121、激光晶体122、声光Q开关123、第二镜片124、第一二向色镜125、第一倍频晶体126和第三镜片127。
其中，第一镜片121、激光晶体122、声光Q开关123、第二镜片124、第一二向色镜125、第一倍频晶体126和第三镜片127分别依次设置。第一镜片121、激光晶体122、声光Q开关123、第二镜片124依次排列设置，第一二向色镜125、第一倍频晶体126和第三镜片127依次排列设置，并且第一镜片121、激光晶体122、声光Q开关123和第二镜片124所传输的激光方向与第一方向平行，第一二向色镜125、第一倍频晶体126和第三镜片127所传输的激光方向与第一方向相同或相反。具体地，第一镜片121设于激光输入模块110的输出端，激光晶体122设于第一镜片121远离激光输入模块110的一侧，声光Q开关123设于激光晶体122远离第一镜片121的一侧，第二镜片124设于声光Q开关123的远离激光晶体122的一侧，并呈45度倾斜，第一二向色镜125与第二镜片124相对设置，并呈45度倾斜，第一倍频晶体126设于第一二向色镜125和第三镜片127之间。
激光晶体122设于第一镜片121的输出端，声光Q开关123设于激光晶体122的输出端，第二镜片124设于声光Q开关123的输出端，第一二向色镜125设于第二镜片124的输出端，第一倍频晶体126设于第一二向色镜125的反射端，第三镜片127设于第一倍频晶体126的输出端。
其中，第一镜片121、激光晶体122、声光Q开关123、第二镜片124、第一二向色镜125、第一倍频晶体126和第三镜片127构成谐振腔。其中，第一镜片121可以为平面镜或者曲面镜，具体为谐振腔的前腔平面镜，属于全反镜。第一镜片121靠近激光输入模块110的一端面镀有878nm增透膜，第一镜片121靠近激光晶体122的一端面镀有878nm增透膜和1064nm高反膜。在本实施例中，第一镜片121用于透过激光输入模块110发射的878nm激光光源，并反射1064nm激光，以防止其进入激光输入模块110。
其中，激光晶体122为钇铝石榴石晶体(Neodymium-dopedYttriumAluminiumGarnet；Nd：Y3Al5O12)，即为YAG激光晶体，其在吸收878nm的泵浦光之后跃迁到高能级，从而辐射出1064nm的光。激光晶体122的两个端面均镀有1064nm高反膜和878nm增透膜。在本实施例中，激光晶体122用于将第一镜片121输出的878nm激光光源转换为1064nm第三激光。
其中，声光Q开关123能够通过调Q技术使连续激光功率输出转化为具有 高峰值功率的激光脉冲输出。在本实施例中，声光Q开关123用于将激光晶体122输出的连续的第三激光调制为脉冲的第三激光，其中，第三激光为1064nm激光。
其中，第二镜片124可以为平面镜或者曲面镜制作而成的反射镜。第二镜片124的反射面与从声光Q开关123出射的第三激光的光轴呈45度，并且，第二镜片124靠近谐振腔的一端面镀有1064nm高反膜，以提高反射效率。在本实施例中，第二镜片124用于反射声光Q开关123输出的1064nm第三激光。
其中，第一二向色镜125靠近第一倍频晶体126的一端面镀有1064nm高反膜和532nm增透膜，远离第一倍频晶体126的另一端面镀有532nm增透膜，其中，镀有532nm增透膜的端面靠近可旋转镜130。第一二向色镜125能够在其内表面反射1064nm激光，并且能够透射532nm激光。在本实施例中，第一二向色镜125用于呈45度角接收第二镜片124反射的第三激光，并将第三激光反射至第一倍频晶体126；第一二向色镜125还用于透过第一倍频晶体126输出的第一激光，以使第一激光往可旋转镜130的方向输出。
其中，第一倍频晶体126为二倍频晶体，例如可以为三硼酸锂晶体(LBO)，其与激光晶体122和声光Q开关123配合，从而使得谐振腔的转换效率高。第一倍频晶体126的两端面均镀有1064nm增透膜和532nm增透膜。在本实施例中，第一倍频晶体126用于透过第一二向色镜125反射的第三激光，第一倍频晶体126还用于将第三镜片127反射的第三激光转换为第一激光，以使第一激光往第一二向色镜125和可旋转镜130所在的方向输出。
其中，第三镜片127为反射镜，并且，第三镜片127可调，为谐振腔的可调后腔平面镜。第三镜片127靠近谐振腔的腔内侧镀有1064nm高反膜和532nm高反膜，以增加反射效率。在本实施例中，第三镜片127用于将第一倍频晶体126输出的波长1064nm的第三激光反射至第一倍频晶体126。
在本实施例中，第一波长激光产生模块120的工作过程大致为：第一镜片121透过激光输入模块110出射的878nm激光光源，激光光源在激光晶体122中转换成波长为1064nm的第三激光，声光Q开关123将连续的第三激光调制为脉冲的第三激光，第二镜片124将第三激光反射至第一二向色镜125，第一二向色镜125将第三激光反射至第一倍频晶体126，第三激光透过第一倍频晶体126后入射至第三镜片127，第三镜片127将第三激光反射至第一倍频晶体126，第一 倍频晶体126将波长1064nm的第三激光转换成波长532nm的第一激光并输出至第一二向色镜125，第一激光透过第一二向色镜125后输出至可旋转镜130。其中，由于第一倍频晶体126的转换效率有限，部分没进行转换的1064nm第三激光会在第一镜片121、激光晶体122、声光Q开关123、第二镜片124、第一二向色镜125、第一倍频晶体126和第三镜片127之间振荡，直至转换为532nm激光，然后从第一二向色镜125输出至可旋转镜130。
可旋转镜130设于第一二向色镜125远离第一倍频晶体126的一侧，用于接收第一波长激光产生模块120输出的第一激光。可旋转镜130设有第一输出方向和第二输出方向，其中，第一波长激光产生模块120输出的第一激光的方向与可旋转镜130的第一输出方向相同；第二波长激光产生模块140设于可旋转镜130的第二输出方向，以接收可旋转镜130反射的第一激光。
其中，请一并参阅图1和图2，可旋转镜130可以为可旋转式的平面圆形镜，可旋转镜130靠近第一二向色镜125的一端面设有第一区域131和第二区域132，可以将第一区域131和第二区域132面积之比设为均等比例或其他比例，第一区域131镀有532nm增透膜(R＜0.2％)，第二区域132镀有532nm高反膜(R＞99.9％)和266nm高反膜。第一区域131用于透过第一激光，第二区域132用于反射第一激光。当可旋转镜130位于第一位置时，透过第一二向色镜125的第一激光入射至第一区域131，从而第一激光透过第一区域，使第一激光沿第一方向出射；当可旋转镜130位于第二位置时，透过第一二向色镜125的第一激光入射至第二区域132，第二区域132反射第一激光至第二波长激光产生模块140，使第一激光沿可旋转镜130的第二输出方向出射。其中，第一方向即可旋转镜130的第一输出方向，可旋转镜130的第二输出方向与第一方向垂直。因此，通过以上方式，当需要输出第一激光时，将可旋转镜130旋转至第一位置，当需要输出第二激光时，将可旋转镜130旋转至第二位置。
第二波长激光产生模块140包括：第二二向色镜141、第四镜片142、第二倍频晶体143和第五镜片144。
其中，第二二向色镜141、第四镜片142、第二倍频晶体143和第五镜片144依次设置。具体地，第二二向色镜141设于可旋转镜130的第二输出方向，第四镜片142设于第二二向色镜141远离可旋转镜130的一侧，第二倍频晶体143、第五镜片144设于可旋转镜130的第二输出方向的垂直方向上，第二倍频晶体 143设于第四镜片142和第五镜片144之间。
其中，第二二向色镜141靠近可旋转镜130的一端面镀有532nm增透膜，靠近第四镜片142的一端面镀有532nm增透膜和266nm高反膜。第二二向色镜141能够透射532nm激光，并反射266nm激光。在本实施例中，第二二向色镜141用于透过可旋转镜130反射的532nm第一激光，并输出至第四镜片142。
其中，第四镜片142可以为平面镜或者曲面镜制作而成的反射镜或者二向色镜。第四镜片142能够反射532nm激光，并且能够透射266nm激光。第四镜片142的反射面与入射的第一激光方向呈45度，并且，第四镜片142靠近第二二向色镜141的一端面镀有532nm高反膜和266nm增透膜。在本实施例中，第四镜片142用于呈45度角接收第二二向色镜141输出的所述第一激光，并反射第一激光至第二倍频晶体143，第四镜片142还用于透过第二倍频晶体143输出的第二激光，使第二激光沿第二方向出射。
其中，第二倍频晶体143为四倍频晶体，例如可以为偏硼酸钡晶体(BBO)。第二倍频晶体143的两端面均镀有532nm增透膜和266nm增透膜。在本实施例中，第二倍频晶体143用于透过从第四镜片142反射的第一激光，第二倍频晶体143还用于接收第五镜片144反射的第一激光，并将第一激光转换为第二激光。其中，第二激光为266nm激光。
其中，第五镜片144为反射镜，具体是平面反射镜，第五镜片144靠近第二倍频晶体143的反射面镀有532nm高反膜和266nm高反膜。在本实施例中，第五镜片144用于将从第二倍频晶体143透过的第一激光反射回第二倍频晶体143。
在本实施例中，第二波长激光产生模块140的工作过程大致为：可旋转镜130将第一波长激光产生模块120输出的532nm波长的第一激光反射至第二二向色镜141，第一激光从第二二向色镜141透过，入射至第四镜片142，第四镜片142将第一激光反射至第二倍频晶体143，第一激光透过第二倍频晶体143入射至第五镜片144，第五镜片144将第一激光反射至第二倍频晶体143，第二倍频晶体143将532nm第一激光转换成266nm波长的第二激光并输出至第四镜片142，第二激光穿过第四镜片142输出。其中，由于第二倍频晶体143的转换效率有限，部分没进行转换的532nm第一激光会在第二二向色镜141、第四镜片142、第二倍频晶体143和第五镜片144之间振荡，直至转换为266nm激光，然后从 第四镜片142输出。
需要说明的是，第一激光出射的第一方向与第二激光出射的第二方向相同。在本实施例中，第一波长激光产生模块120的输出方向与第二波长激光产生模块140的输出方向相同，可旋转镜130的第一输出方向与第二输出方向垂直。当可旋转镜130位于第一位置时，第一波长激光产生模块120输出的第一激光沿可旋转镜130的第一输出方向出射，当可旋转镜130位于第二位置时，第一波长激光产生模块120输出的第一激光沿可旋转镜130的第二输出方向出射，经过第二波长激光产生模块140转换成第二激光并输出，从而使得第一激光出射的第一方向与第二激光出射的第二方向相同。通过以上方式，使得固体激光器100的腔形结构规整，组装生产难度系数小，并且输出的激光的方向相同，为激光器***光路搭建提供了方便。
需要说明的是，在本实施例中，当同时镀有增透膜和高反膜、或两种不同波长的增透膜、或两种不同波长的高反膜时，可以为两张膜或者一张同时具备两种功能的膜，可以根据实际情况进行选择。
可选地，请再参阅图1，固体激光器100还包括：聚焦模块150。聚焦模块150设于激光输入模块110与第一波长激光产生模块120之间，聚焦模块150用于对激光输入模块110输出的激光光源进行聚焦，以使其聚焦至第一波长激光产生模块120的激光晶体122的中心处，从而减小激光晶体122的热透镜效应，提高晶体的转换效率。
其中，聚焦模块150包括：第一平凸镜151和第二平凸镜152，第一平凸镜151的凸面和第二平凸镜152的凸面相对设置。第一平凸镜151设于靠近激光输入模块110的一端，第一平凸镜151用于输入激光输入模块110发射后的激光光源；第二平凸镜152设于靠近第一镜片121的一端，第二平凸镜152用于输出并聚焦激光光源到激光晶体122。
可选地，请再参阅图1和图2，固体激光器100还包括：旋转位移装置160和限位装置170。可旋转镜130安装于旋转位移装置160，限位装置170设于旋转位移装置160。旋转位移装置160用于使可旋转镜130旋转至第一位置，以使第一区域131透过第一激光，或者，使可旋转镜130旋转至所述第二位置，以使第二区域132反射第一激光，达到波长切换的目的。限位装置170用于限制可旋转镜130的位置，以使可旋转镜130停止于第一位置或第二位置。
其中，旋转位移装置160可以包括：第一同步电动齿轮161、第二同步电动齿轮162、第三同步电动齿轮163和底座164。可旋转镜130安装在底座164上，第一同步电动齿轮161、第二同步电动齿轮162、第三同步电动齿轮163安装在底座164上，第一同步电动齿轮161、第二同步电动齿轮162和第三同步电动齿轮163分别设于可旋转镜130的侧面的不同位置。当旋转位移装置160工作时，第一同步电动齿轮161的转动轴J1、第二同步电动齿轮162的转动轴J2、第三同步电动齿轮163的转动轴J3同步转动，以使第一同步电动齿轮161、第二同步电动齿轮162、第三同步电动齿轮163带动可旋转镜130旋转。在一些实施例中，J1为电动旋转主轴，J2、J3为光学圆形轨道，保证镜片与入射光路角度恒定。其中，J1为主动轴，J2、J3从动轴。
其中，限位装置170可以为限位开关，当可旋转镜130旋转到第一位置或者第二位置时，可旋转镜130触碰到限位开关，则旋转位移装置160停止转动，使可旋转镜130停止在第一位置或者第二位置。
可选地，请参阅图3，固体激光器100还包括：控制器180。控制器180与旋转位移装置160连接，控制器180用于：当接收到第一波长激光输出指令时，控制旋转位移装置160使可旋转镜130旋转至第一位置；当接收到第二波长激光输出指令时，控制旋转位移装置160使可旋转镜130旋转至第二位置。
当然，为了提高固体激光器100的自动化，在一些其他实施例中，请再参阅图3，控制器180还与激光输入模块110、第一波长激光产生模块120、和第二波长激光产生模块140连接，控制器180还用于：在可旋转镜130旋转至第一位置后，控制第一波长激光产生模块120的第一倍频晶体126工作，使第一倍频晶体126达到预设工作温度后，控制激光输入模块110输出激光光源，并控制第一波长激光产生模块120的声光Q开关开启，从而输出第一激光；在可旋转镜130旋转至第二位置后，控制第一波长激光产生模块120的第一倍频晶体126工作，同时控制第二波长激光产生模块140的第二倍频晶体143工作，使第一倍频晶体126、第二倍频晶体143达到预设工作温度后，控制激光输入模块110输出激光光源，并控制第一波长激光产生模块120的声光Q开关开启，从而输出第二激光。
在本实施例中，固体激光器100通过激光输入模块110产生激光光源，第一波长激光产生模块120接收激光输入模块110输出的激光光源，并将激光光 源转换为第一激光，可旋转镜130通过旋转至不同的位置，从而选择输出第一激光或者第二激光，第一激光与第二激光的波长不同，使得同一时间仅有需要的一个波段的激光输出，转换效率较高，并且方便与多元素的激光打标材料，使用者可根据材料的需求自由切换激光波段。
以上仅为本申请的较佳实施例而已，并不用以限制本申请，凡在本申请的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本申请的保护范围之内。

Claims (14)

  1. 一种固体激光器，其特征在于，包括：
    激光输入模块，用于产生并出射激光光源；
    第一波长激光产生模块，设于所述激光输入模块的输出端，用于将所述激光光源转换为第一激光并输出；
    可旋转镜，设于所述第一波长激光产生模块的输出端，所述可旋转镜设有第一区域和第二区域，所述可旋转镜用于当位于第一位置时，通过所述第一区域透过所述第一激光，使所述第一激光沿所述可旋转镜的第一输出方向输出，当位于第二位置时，通过所述第二区域反射所述第一激光，使所述第一激光沿所述可旋转镜的第二输出方向输出；
    第二波长激光产生模块，设于所述可旋转镜的第二输出方向，用于将所述第二区域反射的所述第一激光转换为第二激光并输出。
  2. 根据权利要求1所述的固体激光器，其特征在于，所述第一波长激光产生模块包括依次设置的第一镜片、激光晶体、声光Q开关、第二镜片、第一二向色镜、第一倍频晶体、第三镜片；
    所述第一镜片设于所述激光输入模块的输出端，所述第一镜片用于透过所述激光光源；
    所述激光晶体于将所述第一镜片输出的所述激光光源转换为第三激光；
    所述声光Q开关用于将所述激光晶体输出的连续的所述第三激光调制为脉冲的所述第三激光；
    所述第二镜片用于反射所述声光Q开关输出的所述第三激光；
    所述第一二向色镜用于反射所述第二镜片反射的所述第三激光；
    所述第一倍频晶体用于透过所述第一二向色镜反射的所述第三激光；
    所述第三镜片用于将所述第一倍频晶体输出的所述第三激光反射至所述第一倍频晶体；
    所述第一倍频晶体还用于将所述第三镜片反射的所述第三激光转换为所述第一激光；
    所述第一二向色镜还用于透过所述第一倍频晶体输出的所述第一激光；
    所述可旋转镜设于所述第一二向色镜与所述第一倍频晶体相对的一侧，所述可旋转镜具体用于：当位于所述第一位置时，通过所述第一区域透过所述第一二向色镜透过的所述第一激光，使所述第一激光沿第一方向出射。
  3. 根据权利要求2所述的固体激光器，其特征在于，部分所述第三激光在所述第一镜片、所述激光晶体、所述声光Q开关、所述第二镜片、所述第一二向色镜、所述第一倍频晶体和所述第三镜片之间振荡，直至转换为所述第一激光，然后从所述第一二向色镜输出至所述可旋转镜。
  4. 根据权利要求2所述的固体激光器，其特征在于，所述第二波长激光产生模块包括依次设置的第二二向色镜、第四镜片、第二倍频晶体、第五镜片；
    所述可旋转镜还具体用于：当位于所述第二位置时，通过所述第二区域反射所述第一二向色镜透过的所述第一激光；
    所述第二二向色镜设于所述可旋转镜的反射方向，所述第二二向色镜用于透过所述可旋转镜反射的所述第一激光；
    所述第四镜片用于反射所述第二二向色镜输出的所述第一激光；
    所述第二倍频晶体用于透过所述第四镜片反射的所述第一激光；
    所述第五镜片用于反射所述第二倍频晶体透过的所述第一激光；
    所述第二倍频晶体还用于将所述第五镜片反射的所述第一激光转换为所述第二激光；
    所述第四镜片还用于透过所述第二倍频晶体输出的所述第二激光，使所述第二激光沿第二方向出射。
  5. 根据权利要求4所述的固体激光器，其特征在于，部分所述第一激光在所述第二二向色镜、所述第四镜片、所述第二倍频晶体、所述第五镜片之间振荡，直至转换为所述第二激光，然后从所述第四镜片输出。
  6. 根据权利要求4所述的固体激光器，其特征在于，所述第一方向与所述第二方向相同。
  7. 根据权利要求4所述的固体激光器，其特征在于，所述激光光源为878nm激光，所述第一激光为532nm激光，所述第二激光为266nm激光，所述第三激光为1064nm激光。
  8. 根据权利要求1所述的固体激光器，其特征在于，所述激光器还包括：聚焦模块；
    所述聚焦模块设于所述激光输入模块与所述第一波长激光产生模块之间，所述聚焦模块用于对所述激光输入模块输出的所述激光光源进行聚焦。
  9. 根据权利要求8所述的固体激光器，其特征在于，所述聚焦模块包括：第一平凸镜和第二平凸镜，所述第一平凸镜的凸面和所述第二平凸镜的凸面相对设置，所述第一平凸镜用于输入所述激光光源，所述第二平凸镜用于输出所述聚焦后的激光光源。
  10. 根据权利要求1-9任一项所述的固体激光器，其特征在于，所述固体激光器还包括：旋转位移装置，所述可旋转镜设于所述旋转位移装置；
    所述旋转位移装置用于使所述可旋转镜旋转至所述第一位置，以使所述第一区域透过所述第一激光，或者，使所述可旋转镜旋转至所述第二位置，以使所述第二区域反射所述第一激光。
  11. 根据权利要求10所述的固体激光器，其特征在于，所述旋转位移装置包括：第一同步电动齿轮、第二同步电动齿轮、第三同步电动齿轮和底座；
    所述可旋转镜、所述第一同步电动齿轮、所述第二同步电动齿轮和所述第三同步电动齿轮安装于所述底座，所述第一同步电动齿轮、所述第二同步电动齿轮和所述第三同步电动齿轮分别设于所述可旋转镜的侧面的不同位置，所述第一同步电动齿轮、所述第二同步电动齿轮和所述第三同步电动齿轮用于带动所述可旋转转动。
  12. 根据权利要求10所述的固体激光器，其特征在于，所述固体激光器还包括：限位装置；
    所述限位装置用于限制所述可旋转镜的位置，以使所述可旋转镜停止于所述第一位置或所述第二位置。
  13. 根据权利要求10所述的固体激光器，其特征在于，所述固体激光器还包括：控制器，所述控制器与所述旋转位移装置连接；
    所述控制器用于当接收到第一波长激光输出指令时，控制所述旋转位移装置使所述可旋转镜旋转至所述第一位置；当接收到第二波长激光输出指令时，控制所述旋转位移装置使所述可旋转镜旋转至所述第二位置。
  14. 根据权利要求13所述的固体激光器，其特征在于，所述控制器还与所述激光输入模块、所述第一波长激光产生模块和所述第二波长激光产生模块连接。
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