WO2020067198A1 - Dispositif de liaison par ultrasons - Google Patents

Dispositif de liaison par ultrasons Download PDF

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Publication number
WO2020067198A1
WO2020067198A1 PCT/JP2019/037673 JP2019037673W WO2020067198A1 WO 2020067198 A1 WO2020067198 A1 WO 2020067198A1 JP 2019037673 W JP2019037673 W JP 2019037673W WO 2020067198 A1 WO2020067198 A1 WO 2020067198A1
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WO
WIPO (PCT)
Prior art keywords
ultrasonic
tip
ultrasonic bonding
bonding apparatus
vibration
Prior art date
Application number
PCT/JP2019/037673
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English (en)
Japanese (ja)
Inventor
潤 光行
Original Assignee
株式会社Ｌｉｎｋ－Ｕｓ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社Ｌｉｎｋ－Ｕｓ filed Critical 株式会社Ｌｉｎｋ－Ｕｓ
Priority to JP2020549308A priority Critical patent/JP7219495B2/ja
Publication of WO2020067198A1 publication Critical patent/WO2020067198A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/08—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations

Definitions

  • the present invention relates to an ultrasonic bonding apparatus for bonding a work such as metal or plastic by ultrasonic vibration.
  • ultrasonic bonding (ultrasonic welding) has been used to bond metals such as plastics and battery parts used in food packs and the like.
  • the tip of a bonding tip is ultrasonically vibrated, and bonding is performed by repeatedly applying pressure to a bonding target.
  • the ultrasonic metal bonding apparatus disclosed in the following patent document transmits an ultrasonic oscillator, a BLT vibrator that generates ultrasonic vibration from electric signals oscillated by the ultrasonic oscillator, and transmits ultrasonic vibration generated from the BLT vibrator. And a horn as an ultrasonic resonator, and an ultrasonic bonding tool attached near the tip of the horn.
  • An anvil for placing the metal to be joined is arranged below the ultrasonic metal joining device in parallel with the tip surface of the ultrasonic joining tool.
  • the ultrasonic metal joining apparatus is relatively movable with respect to the anvil, and the distal end surface of the ultrasonic joining tool is brought into contact with the upper surface of the joining portion of the second copper plate to join in the tool length direction (downward).
  • Patent Document 1 Japanese Patent No. 48744445
  • the tool horn has a cylindrical shape in which a thick cylindrical part and a thin cylindrical part are connected by a curved surface, and a rectangular parallelepiped pressing part is raised in the radial direction on the peripheral surface of the thin cylindrical part (projections formed by knurling are grid-like). And thus, solid-state welding can be performed stably by applying pressure and ultrasonic vibration to the object to be welded for a certain period of time (see Japanese Patent Application Laid-Open No. 2014-213366).
  • the bonding chip is generally vibrated in a horizontal direction (linear vibration) as in Patent Literature 1, but the bonding target may be broken at the edge of the bonding chip, Sufficient bonding strength was not obtained.
  • the present invention has been made in view of such circumstances, and has as its object to provide an ultrasonic bonding apparatus capable of improving the bonding strength of a work.
  • the present invention is directed to a first direction perpendicular to a direction in which the first member presses a plurality of workpieces stacked between a first member and a second member disposed at a position facing the first member.
  • An ultrasonic joining device that joins the plurality of workpieces by vibrating the first member by ultrasonic vibration in which a vibration component of the second direction and a vibration component in a second direction orthogonal to the first direction are combined.
  • a pressurizing unit for applying pressure to the plurality of workpieces via the first member, and an opening edge separated from each other on a contact surface of at least one of the first member and the second member. Has a plurality of closed recesses.
  • the plurality of workpieces to be bonded are pressed by the first member by the pressing unit regardless of the arrangement direction (horizontal direction, tilt direction) of the first member and the second member.
  • the first member is vibrated by a composite vibration in which a vibration component in a first direction perpendicular to the pressing direction and a vibration component in a second direction perpendicular to the first direction are combined.
  • a plurality of recesses which are separated from each other and have closed opening edges are provided on at least one contact surface of the first member and the second member. Since the recesses are arranged in an island-like discrete manner, and portions other than the recesses (flat portions described later) are formed continuously, the pressed portions of the work are connected like a network, and the bonding strength is improved. . As a result, a sufficient bonding strength can be obtained even if the amount of pushing of the work is reduced as compared with the conventional pressing by the convex portion.
  • the ultrasonic bonding apparatus includes a sensor configured to acquire a pressing amount of the first member with respect to the plurality of workpieces, and a control unit configured to receive a signal from the sensor and control the pressing unit. Is preferred.
  • the control unit receives the signal of the sensor and controls the pressure of the work by the first member, it is possible to prevent an excessively high pressure from being applied to the joint surface of the work.
  • the width of the opening edge in the first direction, the magnitude of the vibration component in the first direction, the width of the opening edge in the second direction, and the width of the opening edge in the second direction are preferable that the magnitudes of the vibration components correspond to each other.
  • the opening edge of the recess is elliptical
  • the width in the first direction for example, the long axis width
  • the magnitude of the vibration component in the first direction for example, the width of the short axis
  • the width of the short axis and the magnitude of the vibration component in the second direction have the same correspondence.
  • the first member is vibrated by a composite vibration in which the vibration component in the first direction is large corresponding to the long axis width of the opening edge and the vibration component in the second direction is small corresponding to the short axis width of the opening edge.
  • the composite vibration becomes smooth, the work surface is prevented from being shaved by the concave portion, and the thickness of the joint portion can be ensured.
  • the opening edge of the concave portion is chamfered.
  • the first member is a bonding tip and the second member is an anvil.
  • the first member is the joining tip.
  • the workpiece can be securely joined by composite ultrasonic vibration while pressing the workpiece. Can be.
  • the bonding chip has at least one or more protrusions in a central region of a tip portion thereof, and has the plurality of recesses in an outer region outside the center region It is preferable that the protruding portion protrudes from an end surface of a tip portion of the bonding tip.
  • FIG. 1 is a diagram illustrating an overall configuration of an ultrasonic bonding apparatus according to an embodiment of the present invention.
  • A The figure which looked at the front-end
  • B The figure which looked at the front-end
  • A The figure explaining the compound vibration of the horn tip (circular dimple) at the time of joining.
  • B An enlarged view of a region S1 in FIG. 3A (a).
  • B An enlarged view of a region S2 in FIG.
  • the ultrasonic bonding apparatus 1 is an apparatus for bonding (welding) a bonding target (work) such as a metal plate using an ultrasonic composite vibration described later.
  • the ultrasonic bonding apparatus 1 is mainly used for bonding electrodes of a lithium ion battery, a semiconductor element, and the like, and the same or different metals.
  • the ultrasonic bonding apparatus 1 includes an ultrasonic vibrator 2, an ultrasonic expansion horn 3, an ultrasonic LT (Langevin Type) horn 4, a horn chip 6, and an anvil 7. Further, the oscillation device 8, the pressurizing device 10, the sensor 12, the control device 13, and the display device 14 are also a part of the ultrasonic bonding device 1.
  • the ultrasonic vibrator 2 When a power supply voltage is applied to the oscillation device 8 from a power supply (not shown), a voltage signal is transmitted to the positive electrode and the negative electrode of the ultrasonic vibrator 2, the ultrasonic vibrator 2 vibrates, and ultrasonic vibration (about 20 KHz) Occurs.
  • the ultrasonic vibration generated by the ultrasonic vibrator 2 is transmitted to a cylindrical ultrasonic magnifying horn 3 attached to one end of the ultrasonic vibrator 2, and the vibration amplitude is expanded. Further, the ultrasonic vibration is transmitted to the cylindrical ultrasonic LT horn 4 attached to one end of the ultrasonic expansion horn 3 (the end on the side other than the ultrasonic vibrator 2).
  • the ultrasonic vibration generated by the ultrasonic vibrator 2 has been transmitted in the longitudinal direction of the ultrasonic expansion horn 3 and the ultrasonic LT horn 4 (longitudinal vibration of the ultrasonic wave). Due to the plurality of oblique slits 4a, a vibration component converted from the vertical vibration to the horizontal vibration is generated.
  • the ultrasonic vibration (composite vibration) is applied to the horn tip 6 (the “joining chip” and the “joining tip” of the present invention) screwed to one end of the ultrasonic LT horn 4 (the end on the side other than the ultrasonic expansion horn 3). To the first member).
  • the horn tip 6 includes a base portion 6a having a truncated cone shape and a tip portion 6b that comes into contact with the workpiece W at the time of joining. That is, by adjusting the phase of the ultrasonic vibration by the oscillation device 8, a composite vibration (for example, an elliptical vibration) is generated at one end of the ultrasonic LT horn 4, and the tip 6 b of the horn tip 6 moves the surface of the workpiece W. Vibrates in an elliptical orbit. This vibration removes impurities on the surface of the work W and further promotes plastic deformation of the surface of the work W.
  • the horn tip 6 has various shapes, and can be used interchangeably according to the type of the work W.
  • a vibration component in a first direction perpendicular to the direction of pressing and a second component perpendicular to the first direction.
  • the vibration is a combination of a vibration component in the direction. If the vibration component in the first direction and the vibration component in the second direction are 1: 1, the vibration is circular, and if the vibration component is 2: 1, the vibration is elliptical.
  • a highly rigid pressurizing block (not shown) is in contact with the flange portion 3a of the ultrasonic expansion horn 3.
  • the pressurizing device 10 (corresponding to the “pressing portion” of the present invention) is controlled by the control device 13 (corresponding to the “controlling portion” of the present invention), and the ultrasonic bonding is performed via the pressurizing block that moves up and down.
  • the device 1 can be moved vertically.
  • the tip 6 b of the horn tip 6 comes into contact with the work W and generates a static pressure (joining). At times, 200 to 800 N) are added.
  • a sensor (stroke sensor) 12 for detecting the displacement of the pressurizing block, and obtains the pushing amount of the horn tip 6 into which the work W is pushed.
  • the sensor 12 feeds back a change in the coordinate of the horn tip 6 in the vertical direction at the time of joining to the control device 13 (the broken line is a feedback signal), so that the pushing amount is kept constant. For this reason, an actuator having a high response speed is used for the pressurizing device 10.
  • the pushing amount can be set by the operator from the display device 14. Further, a pressure sensor may be provided in addition to the sensor 12, and control may be performed so as to keep the static pressure constant. As described above, when the work W is joined, the joining (solid-state joining) is surely promoted by giving the composite vibration while adjusting the pushing amount or the static pressure.
  • the surface of a metal atom is covered with oil or fat, an oxide film, or the like, so that the atoms are prevented from approaching each other.
  • ultrasonic bonding ultrasonic vibration is applied to a metal to generate a strong frictional force on the metal surface. Thereby, the oxide film and the like on the metal surface are removed, and clean and activated metal atoms appear on the bonding surface.
  • the base portion 6a of the horn tip 6 has a height of 25.7 mm and a diameter of a flange portion 6a 'connected to the ultrasonic LT horn 4 is 15 mm, and the diameter decreases as approaching the tip portion 6b. (10 mm).
  • the base portion 6a has such a shape, there is an effect that vibration is concentrated on a portion having a small cross-sectional area and ultrasonic vibration is expanded.
  • the distal end portion 6b is a truncated cone-shaped projection (height: 2.0 mm) attached to the distal end of the base portion 6a.
  • a plurality of dimples D are provided on an end surface 6c of the distal end portion 6b. (Corresponding to the “recess” of the present invention).
  • the dimples D are formed inside the outer peripheral edge of the distal end portion 6b (end surface 6c) with the opening edges separated from each other, that is, in a discrete arrangement (a total of 22 dimples).
  • the static pressure at the time of joining is most appropriate. Value. If the area ratio is smaller than the above range (the flat portion is wide), the horn tip 6 slides on the workpiece W. On the other hand, if the area ratio is larger than the above range (the flat portion is narrow), the pressure at the time of joining increases, and the joining portion becomes thin.
  • the diameter of the dimple D is 0.4 mm and the depth is 0.1 mm.
  • the size and the number of the dimples D are not limited thereto.
  • the opening of the dimple D may be elliptical, polygonal, or the like as long as the opening edges separated from each other are closed.
  • FIG. 3A (a) shows the movement of one dimple D (the opening edge is a thick line) of the horn tip 6 when the work W is viewed from above.
  • the opening edge of the dimple D draws a ring shape like a hatched portion.
  • the amplitude of the horn tip 6 is usually 10 ⁇ m or less.
  • FIG. 3A (b) is an enlarged view of a region S1 in FIG. 3A (a).
  • a circular arrow is a locus drawn by one point of the opening edge of the dimple D, and a portion of the area A 1 (hatched portion) is pressed.
  • Region B 1 represents a partial entering the inside of the dimples D.
  • the area B 2 in order to position outside the dimples D, is pushed by the tip portion 6b of the horn tip 6 (flat portion), the pressing portion is connected to the network.
  • the horn tip 6 reciprocates in one direction (for example, the x-axis direction). Therefore, it is necessary to switch the traveling direction while the horn tip 6 is vibrated. , Broken parts and the like sometimes occurred.
  • the traveling direction does not need to be switched in the case of the circular vibration, and when the same surface area of the workpiece W is joined, the stroke (the rubbing width) of the horn tip 6 can be suppressed smaller than in the case of the linear vibration. Thereby, wrinkles and broken portions generated in the work W can be reduced, and high joining strength without directivity of joining can be obtained.
  • an opening edge may be an elliptical (thick line) dimple D ′.
  • the velocity vector V in the x-axis direction is obtained.
  • V x: V y a : elliptical vibration by the relationship of b becomes smooth, it is possible to reduce the wrinkles and breaks that occur workpiece W at the time of bonding.
  • FIG. 3B (b) is an enlarged view of a region S2 in FIG. 3B (a).
  • the elliptical arrow is a locus drawn by one point of the opening edge of the dimple D ′, and the area A 2 (hatched portion) is pressed.
  • Region B 3 is a portion into the inside of the dimples D '.
  • region B 4 is a portion located outside of the dimple D ', it is pressed by the tip portion 6b of the horn tip 6, the pressing portion is connected to the network.
  • the opening edge of the dimple D stands up at a predetermined angle with respect to the x-axis.
  • the width in the x-axis direction is defined as width a ′ and the width in the y-axis direction is defined as width b ′.
  • FIG. 4A shows a state immediately before the horn tip 6 (tip portion 6 b) pressurized by the pressurizing block applies a static pressure to the work W.
  • the dimple D is a hemispherical concave portion, but its depth is smaller than the radius of the hemisphere. This is because if the dimple D is deep to some extent and the edge portion is substantially vertical, the surface of the work W may be wrinkled or broken at the time of joining.
  • the edge portion of the dimple D has a chamfered curved surface shape.
  • the radius of curvature of the edge portion is preferably in the range of 10 to 100 ⁇ m.
  • FIG. 4B shows a state in which the horn tip 6 is joined by applying a static pressure to the work W.
  • the ultrasonic bonding apparatus 1 controls the oscillation device 8 (force trigger method) so that oscillation starts when the tip 6b of the horn tip 6 comes into contact with the workpiece W and the static pressure reaches a peak.
  • the work W is depressed by the static pressure, but the dimple D has a smaller dimple than the other parts.
  • the pressurizing device 10 can hold the pushing amount so that the work W does not contact the inner upper surface of the dimple D.
  • the horn tip 6 is ultrasonically vibrated in a state where the static pressure is applied to the work W, so that the regions R1 and R2 in FIG. 4B have a predetermined thickness and are efficiently joined. You. Further, since the dimples D are separated from each other, portions where pressure is applied, such as the regions R1 and R2, are continuously generated. Thereby, sufficient bonding strength can be obtained even if the amount of pushing in the work W is reduced as compared with the conventional knurling.
  • FIG. 5A is a perspective view of the horn tip 20 according to the modified embodiment.
  • the horn chip 20 has a structure in which a plurality of dimples D2 are arranged around the outer periphery of the end face 20c, and at least one projection P is arranged in the center.
  • the surfaces of the workpieces may slip each other immediately after the horn tip 6 is ultrasonically vibrated and at the time when the joining has not been completed.
  • the protrusion P is pushed into the work, thereby producing an effect of suppressing the slip.
  • FIG. 5B shows a side view when the horn chip 20 is joined.
  • the leading end P t of the projection P is required to protrude than dimples surface D b (the end face).
  • the bottom surface P b of the projection P it is preferable to work so that the internal side of the dimple surface D b.
  • the protrusions P may be arranged on the outer periphery of the end face 20c, and the plurality of dimples D2 may be arranged at the center of the end face 20c.
  • the protrusion P suppresses the work W, and the dimple D2 produces an effect that the work W becomes difficult to slide.
  • the protrusions P may be arranged to be separated from each other. Further, the area ratio of the end face 20c, the protrusion P, and the dimple D2 is also arbitrary, but when the area of the dimple D2 is maximized, the work W is hard to slip and the surface is hardly scratched.
  • FIG. 6A shows a perspective view of an anvil 30 according to a modified embodiment.
  • the anvil 30 has a structure in which a plurality of dimples D3 are arranged on the upper surface 30a.
  • the formation of the dimple D3 has the effect of suppressing the work at the time of joining and making the surfaces of the work hard to slip.
  • the diameter of the dimple D3 is preferably about 0.4 mm in diameter and about 0.1 mm in depth.
  • the size and the number of the dimples D3 are not limited to this.
  • FIG. 6B shows a side view at the time of joining by the anvil 30.
  • the took static pressure pushes the workpiece W 1 by horn tip 21 having a projection P '.
  • the workpiece W 2 in contact with the upper surface of the anvil 30 is pressed from above at the time of bonding, a portion of the lower surface side enters the dimple D3, the workpiece W 2 is suppressed.
  • the work W 2 is an anvil, also hardly slip work together, even to reduce the pushing amount of horn tip 21, it is possible to obtain a sufficient bonding strength.
  • ⁇ Protrusions can be provided on the anvil to prevent the work from slipping.
  • providing the dimples on the anvil as in the above embodiment is advantageous in that the work is less likely to be damaged.
  • the above description is a part of the embodiment of the present invention, and various other embodiments can be considered.
  • the dimple is not particularly limited as long as the opening edge is closed, and the number of dimples may be plural.
  • the depth of the dimple and the ratio of the total area of the opening edge to the total area of the flat portion also depend on the material of the workpiece to be processed.
  • the dimple may be provided on at least one contact surface of the horn tip and the anvil arranged at a position facing the horn tip.
  • the work is placed on the anvil and the horn tip is located above the work (in the vertical direction).
  • the present invention is not limited to this. That is, the horn tip and the anvil may be arranged in a horizontal direction or in an inclined direction.
  • the work is located between the horn tip and the anvil regardless of the direction, and is placed in contact with the anvil (or horn tip). Even in such an embodiment, the dimples provided on at least one of the contact surfaces of the horn tip and the anvil have an effect of making the workpieces hard to slip during joining.
  • the above-mentioned horn tip 6 is an integral type in which a tip 6b that comes into contact with the workpiece W is provided at the tip of the base 6a, but a long rod-shaped tip can also be attached to the base 6a by screwing. . In this case, care should be taken that the mounting position of the tip does not become a vibration node.
  • the pushing amount of the horn tip 6 may be detected by any method. For example, there is a method in which an encoder is attached to an actuator (servo motor) that drives a pressurizing block, and a pushing amount is detected based on a displacement from a reference position.
  • an actuator servo motor

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

L'invention concerne un dispositif liaison par ultrasons permettant d'améliorer la résistance de liaison de pièces à travailler. Le dispositif de liaison par ultrasons selon l'invention utilise un dispositif d'application de pression pour presser une pluralité de pièces à travailler qui ont été placées sur une enclume à l'aide d'une partie d'extrémité de pointe (6b) d'une pointe de corne, et lie la pluralité de pièces à travailler au moyen d'une vibration ultrasonore dans laquelle une composante de vibration dans une première direction perpendiculaire à la direction de pression et une composante de vibration dans une seconde direction croisant la première direction sont combinées. La partie d'extrémité de pointe (6b) de la pointe de corne a une pluralité d'alvéoles (D) qui sont séparées les unes des autres et dont les bords d'ouverture sont fermés.
PCT/JP2019/037673 2018-09-28 2019-09-25 Dispositif de liaison par ultrasons WO2020067198A1 (fr)

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JP2020549308A JP7219495B2 (ja) 2018-09-28 2019-09-25 超音波接合装置

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JP2018185354 2018-09-28
JP2018-185354 2018-09-28

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WO2020067198A1 true WO2020067198A1 (fr) 2020-04-02

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01139986U (fr) * 1988-03-22 1989-09-25
JP2011110839A (ja) * 2009-11-27 2011-06-09 Seidensha Electronics Co Ltd 工具ホーンおよびこれを用いた超音波溶着装置
JP4874445B2 (ja) * 2007-11-07 2012-02-15 超音波工業株式会社 超音波接合ツール及び超音波接合ツールの取付方法
JP2015016504A (ja) * 2013-04-10 2015-01-29 株式会社アドウェルズ 接合装置および接合方法
JP2017064779A (ja) * 2015-09-28 2017-04-06 辻野　次郎丸 超音波複合振動加工装置
JP2017162635A (ja) * 2016-03-09 2017-09-14 株式会社オートネットワーク技術研究所 超音波溶接治具、端子付き電線の製造方法及び端子付き電線

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01139986U (fr) * 1988-03-22 1989-09-25
JP4874445B2 (ja) * 2007-11-07 2012-02-15 超音波工業株式会社 超音波接合ツール及び超音波接合ツールの取付方法
JP2011110839A (ja) * 2009-11-27 2011-06-09 Seidensha Electronics Co Ltd 工具ホーンおよびこれを用いた超音波溶着装置
JP2015016504A (ja) * 2013-04-10 2015-01-29 株式会社アドウェルズ 接合装置および接合方法
JP2017064779A (ja) * 2015-09-28 2017-04-06 辻野　次郎丸 超音波複合振動加工装置
JP2017162635A (ja) * 2016-03-09 2017-09-14 株式会社オートネットワーク技術研究所 超音波溶接治具、端子付き電線の製造方法及び端子付き電線

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