WO2020057071A1 - Lc sensing system - Google Patents

Lc sensing system Download PDF

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Publication number
WO2020057071A1
WO2020057071A1 PCT/CN2019/078281 CN2019078281W WO2020057071A1 WO 2020057071 A1 WO2020057071 A1 WO 2020057071A1 CN 2019078281 W CN2019078281 W CN 2019078281W WO 2020057071 A1 WO2020057071 A1 WO 2020057071A1
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capacitive
capacitive sensor
inductor
movable
movable electrode
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PCT/CN2019/078281
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French (fr)
Chinese (zh)
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董蕾
黄庆安
王立峰
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东南大学
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/125—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means characterised by a first part whose movement represents the measuring value, and by a second part which is moved by an external force in order to follow the movement of the first part

Definitions

  • the present invention relates to the field of sensing technology, and in particular to an LC sensing system using a cantilever switch to implement multi-parameter measurement.
  • Passive wireless sensors do not require a power supply, and perform signal coupling by means of inductive coupling. Therefore, it has two natural advantages: one is that it does not require electrical connection, and the other is that it does not need to replace the battery, which theoretically has unlimited life. It is because of these two essential advantages that passive wireless sensors have unparalleled advantages in certain special application environments, such as closed environments, mechanical rotating structures, and so on. In practical applications, passive wireless sensors are often required to monitor multiple parameters simultaneously.
  • the present invention is to solve the technical problem of multi-parameter measurement of LC sensors, and to achieve the goal that an LC series resonant circuit can simultaneously measure a parameter to be measured. Therefore, the present invention provides an LC sensing system, and the LC sensing system Including a reading part and a sensing part, wherein the reading part includes a readout circuit and a first inductor connected in series with the readout circuit; the sensing part includes a second inductor, A cantilever switch and a parallel branch connected to both ends of the cantilever switch.
  • the parallel branch includes at least a first capacitive sensor and a second capacitive sensor, and the first inductor and the second inductor are coupled by mutual inductance.
  • the cantilever switch has a movable end and a fixed end.
  • the first capacitive sensor and the second capacitive sensor are respectively provided with a first capacitive movable electrode plate and a second capacitive movable electrode.
  • the movable end is in contact with the first capacitive movable electrode plate, and the first capacitive movable electrode plate is in contact with the second capacitive movable electrode.
  • the present invention also provides a measurement method of an LC sensing system.
  • the measurement method controls a movable end of a cantilever switch, uses different driving voltages to deform the movable end, and is connected with multiple capacitive sensors in parallel. Electrically connected to achieve passive wireless multi-parameter measurement, the measurement method includes:
  • the movable end of the cantilever switch is in contact with the first capacitive sensor to form an inductance-capacitance resonance circuit to generate a driving voltage, and the driving voltage is applied to the cantilever switch on;
  • the driving voltage applied to the cantilever switch is getting larger and larger, so that the movable end is deformed, and the movable end drives the first capacitor movable pole plate to approach the second capacitor movable pole plate, and makes The first capacitive movable electrode is in contact with the second capacitive movable electrode, and the first capacitive sensor and the second capacitive sensor are connected in parallel to the circuit, and the first capacitive sensor and the The data of the second capacitive sensor;
  • the measurement method includes transmitting a frequency signal to each other through a mutual inductance coupling effect of the first inductor and the second inductor, and a secondary magnetic field is generated at both ends of the second inductor, thereby generating a coupled AC voltage.
  • the coupled AC voltage is converted into a driving voltage by the action of a rectifier circuit, and the driving voltage is applied to a cantilever switch.
  • the sweep frequency emitted by the readout circuit is close to and equal to the resonance frequency of the resonance circuit formed by the second inductor and the first capacitive sensor, and the movable end drives the first capacitor movable plate to the first Two capacitive movable plates are close to each other, and the first capacitive movable plate and the second capacitive movable plate are in contact.
  • the sweep frequency and the resonance frequency are not equal, and the movable end is disconnected from the second capacitor movable plate and restored to an initial state.
  • the number of the plurality of capacitive sensors may be two, three or more.
  • the LC sensing system of the present invention controls the movable end of a cantilever switch, uses different driving voltages to deform the movable end, and is electrically connected to multiple capacitive sensors connected in parallel. The data of multiple capacitive sensors are read to realize passive wireless multi-parameter measurement.
  • the system is simple, easy to operate and implement.
  • FIG. 1 is a schematic diagram of an initial state of an LC sensing system according to the present invention.
  • FIG. 2 is a schematic diagram of a cantilever switch of the present invention when a second capacitive sensor is connected to a resonance circuit;
  • FIG. 3 is a schematic diagram of another embodiment of an LC sensing system in parallel with a plurality of capacitive sensors according to the present invention.
  • the present invention provides an LC sensing system that realizes multi-parameter measurement by using a cantilever switch.
  • the LC transmission system includes a reading section and a sensing section, wherein the reading section includes a reading circuit 1 and a first section.
  • An inductor 2 is connected in series to the readout circuit 1.
  • the sensing part includes a second inductor 3, a rectifier circuit 4, a cantilever switch 5, a first capacitive sensor 6, and a second capacitive sensor 7.
  • the second inductor 3 is connected in series with the cantilever switch 5 through a rectifier circuit 4.
  • a parallel branch formed by the first capacitive sensor 6 and the second capacitive sensor 7 is connected in parallel with the second inductor 3,
  • the series circuit of the rectifier circuit 4 and the cantilever switch 5 is not limited to this.
  • the above-mentioned parallel branch may also include a third capacitive sensor (see FIG. 3 for details), or more than three capacitive sensors.
  • the cantilever switch 5 has a movable end 51 and a fixed end 52, and the movable end 51 is deformed by different driving voltages; the movable end 51 of the cantilever switch 5 is in contact with the first capacitive sensor 6 to form an inductance -Capacitive (LC) resonant circuit; the first capacitive sensor 6 and the second capacitive sensor 7 are respectively provided with a first capacitive movable electrode plate 61 and a second capacitive movable electrode plate 71; under the action of driving pressure, the cantilever The movable end 51 of the beam 5 can be in contact with the first capacitive movable electrode plate 61, and the first movable electrode 61 and the second capacitive movable electrode plate 71 can be contacted to connect the first capacitive sensor 6 and the second capacitive type.
  • the sensor is connected to the circuit to realize passive wireless multi-parameter measurement.
  • the invention also provides a measuring method of an LC sensing system.
  • the measuring method controls the movable end of a cantilever switch, uses different driving voltages to deform the movable end, and electrically connects the capacitive sensors in parallel with a plurality of capacitive sensors. Connected to achieve passive wireless multi-parameter measurement.
  • there are two capacitive sensors specifically including a first capacitive sensor 6 and a second capacitive sensor 7.
  • the measurement method specifically includes:
  • the movable end 51 of the cantilever switch is in contact with the first capacitive sensor 6 to form an inductance-capacitance (LC) resonance circuit (see FIG. 1).
  • the mutual inductance coupling of the first inductor 2 transmits frequency signals to each other.
  • a secondary magnetic field is generated across the second inductor 3 to generate a coupled AC voltage.
  • This coupled AC voltage is converted into a driving voltage by the rectifier circuit 4 and the driving voltage is applied to the cantilever switch. 5 ⁇ ;
  • the frequency of the frequency sweep from the readout circuit 1 is close to the resonance frequency of the resonance circuit formed by the second inductor 3 and the first capacitive sensor 6, and the coupling AC voltage across the second inductor 3 is getting more and more Large, when the sweep frequency is consistent with the resonance frequency, the coupling AC voltage reaches the maximum.
  • the driving voltage applied to the cantilever switch 5 is getting larger and larger. Due to the electrostatic force, the movable end 51 is deformed and gradually moves closer to the fixed end 52.
  • the movable end 51 drives the first
  • the first capacitive movable electrode plate 61 of a capacitive sensor 6 approaches the second capacitive movable electrode plate 71 of the second capacitive sensor 7 until they contact each other (see FIG. 2).
  • the second capacitive sensor 7 and the first capacitive sensor 6 are connected in parallel to the circuit, and the resonance frequency of the resonance circuit is changed;
  • the frequency sweeping cycle continues. At this time, the frequency sweeping frequency is no longer consistent with the resonance frequency, so that the driving voltage across the cantilever switch 5 becomes smaller, and the movable end 51 gradually moves away from the fixed end 52. In the process, the movable end 51 and The second capacitive movable plate 71 of the second capacitive sensor 7 is separated, so that it is no longer connected to the circuit, and the state of the LC circuit gradually returns to the resonance state of the first step until the end of the frequency sweep period, ushering in the next time.
  • the frequency scanning period of the frequency is reciprocated in this way to realize continuous detection of the first capacitive sensor 6 and the second capacitive sensor 7.
  • the above-mentioned capacitive sensor is not limited to the first capacitive sensor 6 and the second capacitive sensor 7, but more capacitive sensors may be added between the first capacitive sensor 6 and the second capacitive sensor 7.
  • the sensor is connected in parallel with the first capacitive sensor 6 and the second capacitive sensor 7 to realize the measurement of multiple sensitive parameters.
  • the LC sensing system of the present invention controls the movable end of a cantilever switch, uses different driving voltages to deform the movable end, and is electrically connected to multiple capacitive sensors connected in parallel.
  • the data of multiple capacitive sensors in parallel are read separately to achieve passive wireless multi-parameter measurement.
  • the system is simple, easy to operate and implement.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)

Abstract

An LC sensing system, comprising a reading portion and a sensing portion, wherein the reading portion comprises a readout circuit (1) and a first inductor (2) connected in series to the readout circuit (1); the sensing portion comprises a second inductor (3), a cantilever switch (5) connected in series to the second inductor (3) by means of a rectifier circuit (4), and a parallel branch connected to both ends of the cantilever switch (5). The parallel branch comprises at least a first capacitive sensor (6) and a second capacitive sensor (7). The first inductor (2) and the second inductor (3) are inductively coupled to each other. In the LC sensing system, the deformation of the cantilever switch (5) is controlled, and on the basis of different deformation degrees and shape recovery characteristics of the cantilever switch (5) at different driving voltages, the first capacitive sensor (6) and then the second capacitive sensor (7) are connected in a circuit, so that passive wireless multi-parameter measurement is achieved, and the system is simple and easy to operate.

Description

一种LC传感***LC sensing system 技术领域Technical field
本发明涉及传感技术领域，特别地涉及一种利用悬臂梁开关实现多参数测量的LC传感***。The present invention relates to the field of sensing technology, and in particular to an LC sensing system using a cantilever switch to implement multi-parameter measurement.
背景技术Background technique
无源无线传感器不需要电源供电，通过电感耦合的方式进行信号耦合。因此其具备两个天然优势：一是不需要电气连接；二是不需要更换电池，从而理论上具有无限寿命。正是由于这两点本质上的优势，使得无源无线传感器在某些特殊的应用环境下具有无可比拟的优势，比如密闭环境、机械旋转结构等等。在实际应用过程中往往要求无源无线传感器能同时监测多个参数。Passive wireless sensors do not require a power supply, and perform signal coupling by means of inductive coupling. Therefore, it has two natural advantages: one is that it does not require electrical connection, and the other is that it does not need to replace the battery, which theoretically has unlimited life. It is because of these two essential advantages that passive wireless sensors have unparalleled advantages in certain special application environments, such as closed environments, mechanical rotating structures, and so on. In practical applications, passive wireless sensors are often required to monitor multiple parameters simultaneously.
已有的实现多个参数无源无线传感的技术手段有两种，一种每个传感器连接一个电感，利用多个电感-电容的谐振回路分别进行测试；另一种是在传感部分加入负载调制电路、分时复用电路以及整流稳压电路等形成一个复杂的分时调制***，然后调制后的信号再由读取部分进行解调得到多个传感器信号。然而，在实现多参数测量方面存在很大改进空间，因此，有必要提供一种新的LC传感***。There are two existing technical methods to achieve multiple parameter passive wireless sensing. One is to connect one inductor to each sensor, and use multiple resonant circuits of inductors and capacitors to test it separately; the other is to add it to the sensing part. The load modulation circuit, time-division multiplexing circuit, and rectification and voltage stabilization circuit form a complex time-division modulation system, and then the modulated signal is demodulated by the reading part to obtain multiple sensor signals. However, there is much room for improvement in implementing multi-parameter measurements, so it is necessary to provide a new LC sensing system.
发明内容Summary of the Invention
本发明要解决LC传感器多参数测量的技术问题，要达到一个LC串联谐振回路能够同时进行个待测参数测量的目标，因此，本发明提供了一种LC传感***，所述LC传感***，包括读取部分和传感部分，其中所述读取部分包括读出电路及与读出电路串联的第一电感；所述传感部分包括第二电感、经过整流电路与第二电感串联的悬臂梁开关、与悬臂梁开关的两端相连的并联支路，所述并联支路至少包括第一电容式传感器和第二电容式传感器，所述第一电感和所述第二电感互感耦合。The present invention is to solve the technical problem of multi-parameter measurement of LC sensors, and to achieve the goal that an LC series resonant circuit can simultaneously measure a parameter to be measured. Therefore, the present invention provides an LC sensing system, and the LC sensing system Including a reading part and a sensing part, wherein the reading part includes a readout circuit and a first inductor connected in series with the readout circuit; the sensing part includes a second inductor, A cantilever switch and a parallel branch connected to both ends of the cantilever switch. The parallel branch includes at least a first capacitive sensor and a second capacitive sensor, and the first inductor and the second inductor are coupled by mutual inductance.
作为一种改进，所述悬臂梁开关具有可动端与固定端。As an improvement, the cantilever switch has a movable end and a fixed end.
作为一种改进，所述第一电容式传感器、所述第二电容式传感器分别设有第一电容可动极板和第二电容可动电极。As an improvement, the first capacitive sensor and the second capacitive sensor are respectively provided with a first capacitive movable electrode plate and a second capacitive movable electrode.
作为一种改进，所述可动端与所述第一电容可动极板相接触，所述第一电容可动极板与第二电容可动电极相接触。As an improvement, the movable end is in contact with the first capacitive movable electrode plate, and the first capacitive movable electrode plate is in contact with the second capacitive movable electrode.
本发明还提供了一种LC传感***的测量方法，所述测量方法通过控制悬臂梁开关的可动端，利用不同驱动电压使所述可动端的形变，并与并联的多个电容式传感器电连接，以实现无源无线多参数测量，所述测量方法包括：The present invention also provides a measurement method of an LC sensing system. The measurement method controls a movable end of a cantilever switch, uses different driving voltages to deform the movable end, and is connected with multiple capacitive sensors in parallel. Electrically connected to achieve passive wireless multi-parameter measurement, the measurement method includes:
在读出电路扫频周期的初始状态，所述悬臂梁开关的可动端与第一电容式传感器接触，形成电感-电容谐振回路，产生驱动电压，所述驱动电压施加在所述悬臂梁开关上；In the initial state of the frequency sweep period of the readout circuit, the movable end of the cantilever switch is in contact with the first capacitive sensor to form an inductance-capacitance resonance circuit to generate a driving voltage, and the driving voltage is applied to the cantilever switch on;
施加在所述悬臂梁开关上的驱动电压越来越大，使得所述可动端产生形变，所述可动端带动第一电容可动极板向第二电容可动极板靠近，并使所述第一电容可动极板和所述第二电容可动极板接触，将第一电容式传感器与第二电容式传感器并联接入电路，分别读取所述第一电容式传感器与所述第二电容式传感器的数据；The driving voltage applied to the cantilever switch is getting larger and larger, so that the movable end is deformed, and the movable end drives the first capacitor movable pole plate to approach the second capacitor movable pole plate, and makes The first capacitive movable electrode is in contact with the second capacitive movable electrode, and the first capacitive sensor and the second capacitive sensor are connected in parallel to the circuit, and the first capacitive sensor and the The data of the second capacitive sensor;
在驱动电压的作用下，所述可动端与所述第二电容可动极板解除连接，再次恢复到电感-电容谐振回路的初始状态，如此往复，实现对所述第一电容式传感器与所述第二电容式传感器的连续多参数测量。Under the action of the driving voltage, the movable end is disconnected from the second capacitive movable electrode plate, and the original state of the inductor-capacitor resonant circuit is restored again. Continuous multi-parameter measurement of the second capacitive sensor.
作为一种改进，所述测量方法包括通过第一电感和第二电感的互感耦合作用进行相互传递频率信号，所述第二电感的两端产生次生磁场，从而产生耦合交流电压。As an improvement, the measurement method includes transmitting a frequency signal to each other through a mutual inductance coupling effect of the first inductor and the second inductor, and a secondary magnetic field is generated at both ends of the second inductor, thereby generating a coupled AC voltage.
作为一种改进，所述耦合交流电压通过整流电路的作用后转化为驱动电压，所述驱动电压施加在悬臂梁开关上。As an improvement, the coupled AC voltage is converted into a driving voltage by the action of a rectifier circuit, and the driving voltage is applied to a cantilever switch.
作为一种改进，读出电路发出的扫频频率与第二电感和第一电容式传感器形成的谐振回路的谐振频率接近且直至相等，所述可动端带动第一电容可动极板向第二电容可动极板靠近，并使所述第一电容可动极板和所述第二电容可动极板接触。As an improvement, the sweep frequency emitted by the readout circuit is close to and equal to the resonance frequency of the resonance circuit formed by the second inductor and the first capacitive sensor, and the movable end drives the first capacitor movable plate to the first Two capacitive movable plates are close to each other, and the first capacitive movable plate and the second capacitive movable plate are in contact.
作为一种改进，所述扫频频率和所述谐振频率不相等，所述可动端与所述第二电容可动极板解除连接，恢复至初始状态。As an improvement, the sweep frequency and the resonance frequency are not equal, and the movable end is disconnected from the second capacitor movable plate and restored to an initial state.
作为一种改进，所述多个电容式传感器的数量可以为两个、三个或更多个。As an improvement, the number of the plurality of capacitive sensors may be two, three or more.
有益效果：本发明的LC传感***，通过控制悬臂梁开关的可动端，利用不同驱动电压使所述可动端的形变，并与并联的多个电容式传感器电连接，可以分别对并联的多个电容式传感器的数据进行读取，实现无源无线多参数测量，***简单，易操作和实现。Beneficial effect: The LC sensing system of the present invention controls the movable end of a cantilever switch, uses different driving voltages to deform the movable end, and is electrically connected to multiple capacitive sensors connected in parallel. The data of multiple capacitive sensors are read to realize passive wireless multi-parameter measurement. The system is simple, easy to operate and implement.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明的LC传感***的初始状态示意图；1 is a schematic diagram of an initial state of an LC sensing system according to the present invention;
图2为本发明的悬臂梁开关将第二电容式传感器接入谐振回路时的原理示意图；2 is a schematic diagram of a cantilever switch of the present invention when a second capacitive sensor is connected to a resonance circuit;
图3为本发明的LC传感***并联多个电容传感器的另一实施方式的示意图。FIG. 3 is a schematic diagram of another embodiment of an LC sensing system in parallel with a plurality of capacitive sensors according to the present invention.
具体实施方式detailed description
下面结合附图对本发明做更进一步的解释。The invention is explained further below with reference to the drawings.
实施例1Example 1
如图1所示，本发明提供一种利用悬臂梁开关实现多参数测量的LC传感***，该LC传***包括读取部分和传感部分，其中，读取部分包括读出电路1和第一电感2，第一电感2串联在读出电路1上；传感部分包括第二电感3、整流电路4、悬臂梁开关5、第一电容式传感器6、第二电容式传感器7。As shown in FIG. 1, the present invention provides an LC sensing system that realizes multi-parameter measurement by using a cantilever switch. The LC transmission system includes a reading section and a sensing section, wherein the reading section includes a reading circuit 1 and a first section. An inductor 2 is connected in series to the readout circuit 1. The sensing part includes a second inductor 3, a rectifier circuit 4, a cantilever switch 5, a first capacitive sensor 6, and a second capacitive sensor 7.
具体地，第二电感3经过整流电路4与所述悬臂梁开关5串联，第一电容式传感器6、第二电容式传感器7构成的并联支路，该并联支路并联在第二电感3、整流电路4和悬臂梁开关5的串联电路中；不限于此，上述并联支路还可以包括第三电容式传感器(具体参见图3)，或者包括三个以上的电容式传感器。Specifically, the second inductor 3 is connected in series with the cantilever switch 5 through a rectifier circuit 4. A parallel branch formed by the first capacitive sensor 6 and the second capacitive sensor 7 is connected in parallel with the second inductor 3, The series circuit of the rectifier circuit 4 and the cantilever switch 5 is not limited to this. The above-mentioned parallel branch may also include a third capacitive sensor (see FIG. 3 for details), or more than three capacitive sensors.
进一步地，悬臂梁开关5具有可动端51与固定端52，可动端51通过不同的驱动电压而发生形变；悬臂梁开关5的可动端51与第一电容式传感器6接触，形成电感-电容(LC)谐振回路；第一电容式传感器6、第二电容式传感器7分别设有第一电容可动极板61和第二电容可动电极板71；在驱动压力的作用下，悬臂梁5的可动端51可与第一电容可动极板61接触，使第一可动电极61和第二电容可动电极板71接触，以将第一电容式传感器6与第二电容式传感器连入电路，从而实现无源无线多参数测量。Further, the cantilever switch 5 has a movable end 51 and a fixed end 52, and the movable end 51 is deformed by different driving voltages; the movable end 51 of the cantilever switch 5 is in contact with the first capacitive sensor 6 to form an inductance -Capacitive (LC) resonant circuit; the first capacitive sensor 6 and the second capacitive sensor 7 are respectively provided with a first capacitive movable electrode plate 61 and a second capacitive movable electrode plate 71; under the action of driving pressure, the cantilever The movable end 51 of the beam 5 can be in contact with the first capacitive movable electrode plate 61, and the first movable electrode 61 and the second capacitive movable electrode plate 71 can be contacted to connect the first capacitive sensor 6 and the second capacitive type. The sensor is connected to the circuit to realize passive wireless multi-parameter measurement.
实施例2Example 2
本发明还提供了一种LC传感***的测量方法，该测量方法通过控制悬臂梁开关的可动端，利用不同驱动电压使所述可动端的形变，并与并联的多个电容式传感器电连接，以实现无源无线多参数测量，在本实施方式中，所述多个电容式传感器为两个，具体包括第一电容式传感器6和第二电容式传感器7，该测量方法具体包括：The invention also provides a measuring method of an LC sensing system. The measuring method controls the movable end of a cantilever switch, uses different driving voltages to deform the movable end, and electrically connects the capacitive sensors in parallel with a plurality of capacitive sensors. Connected to achieve passive wireless multi-parameter measurement. In this embodiment, there are two capacitive sensors, specifically including a first capacitive sensor 6 and a second capacitive sensor 7. The measurement method specifically includes:
在读出电路扫频周期的伊始，悬臂梁开关的可动端51与第一电容式传感器6接触，形成电感-电容(LC)谐振回路(参见图1)，通过所述第二电感3和第一电感2的互感耦合作用进行相互传递频率信号。同时，由于磁耦合的存在，使得第二电感3两端产生次生磁场，从而产生耦合交流电压，此耦合交流电压通过整流电路4的作用后转化为驱动电压，此驱动电压施加在悬臂梁开关5上；At the beginning of the frequency sweep period of the readout circuit, the movable end 51 of the cantilever switch is in contact with the first capacitive sensor 6 to form an inductance-capacitance (LC) resonance circuit (see FIG. 1). The mutual inductance coupling of the first inductor 2 transmits frequency signals to each other. At the same time, due to the existence of magnetic coupling, a secondary magnetic field is generated across the second inductor 3 to generate a coupled AC voltage. This coupled AC voltage is converted into a driving voltage by the rectifier circuit 4 and the driving voltage is applied to the cantilever switch. 5 上 ；
随着扫频周期的进行，读出电路1发出的扫频频率与第二电感3和第一电容式传感器6形成的谐振回路的谐振频率接近，第二电感3两端的耦合交流电压越来越大，当扫频频率与谐振频率一致时，耦合交流电压达到最大。此时，施加在悬臂梁开关5上的驱动电压越来越 大，由于静电力的作用，使得可动端51产生形变，逐步向固定端52靠拢，在此过程中，可动端51带动第一电容式传感器6的第一电容可动极板61向第二电容式传感器7的第二电容动极板71靠近，直到两者接触(参见图2)。此时，第二电容式传感器7与第一电容式传感器6并联接入电路，谐振回路的谐振频率改变；With the progress of the frequency sweep period, the frequency of the frequency sweep from the readout circuit 1 is close to the resonance frequency of the resonance circuit formed by the second inductor 3 and the first capacitive sensor 6, and the coupling AC voltage across the second inductor 3 is getting more and more Large, when the sweep frequency is consistent with the resonance frequency, the coupling AC voltage reaches the maximum. At this time, the driving voltage applied to the cantilever switch 5 is getting larger and larger. Due to the electrostatic force, the movable end 51 is deformed and gradually moves closer to the fixed end 52. During this process, the movable end 51 drives the first The first capacitive movable electrode plate 61 of a capacitive sensor 6 approaches the second capacitive movable electrode plate 71 of the second capacitive sensor 7 until they contact each other (see FIG. 2). At this time, the second capacitive sensor 7 and the first capacitive sensor 6 are connected in parallel to the circuit, and the resonance frequency of the resonance circuit is changed;
扫频周期继续进行，此时扫频频率与谐振频率不再一致，使得悬臂梁开关5两端的驱动电压变小，可动端51逐步远离固定端52；在此过程中，可动端51与第二电容式传感器7的第二电容可动极板71分离，使其不再连入电路中，LC回路的状态逐渐恢复到第一步的谐振状态，直到扫频周期结束，迎来下一次的扫频周期，如此往复，实现对第一电容式传感器6与所述第二电容式传感器7的连续检测。The frequency sweeping cycle continues. At this time, the frequency sweeping frequency is no longer consistent with the resonance frequency, so that the driving voltage across the cantilever switch 5 becomes smaller, and the movable end 51 gradually moves away from the fixed end 52. In the process, the movable end 51 and The second capacitive movable plate 71 of the second capacitive sensor 7 is separated, so that it is no longer connected to the circuit, and the state of the LC circuit gradually returns to the resonance state of the first step until the end of the frequency sweep period, ushering in the next time. The frequency scanning period of the frequency is reciprocated in this way to realize continuous detection of the first capacitive sensor 6 and the second capacitive sensor 7.
需要说明的是，上述电容式传感器不局限于第一电容式传感器6与第二电容式传感器7，也可在第一电容式传感器6与第二电容式传感器7之间增加更多的电容式传感器，并且与第一电容式传感器6和第二电容式传感器7并联，实现多个敏感参数的测量。It should be noted that the above-mentioned capacitive sensor is not limited to the first capacitive sensor 6 and the second capacitive sensor 7, but more capacitive sensors may be added between the first capacitive sensor 6 and the second capacitive sensor 7. The sensor is connected in parallel with the first capacitive sensor 6 and the second capacitive sensor 7 to realize the measurement of multiple sensitive parameters.
与现有技术相比，本发明的LC传感***，通过控制悬臂梁开关的可动端，利用不同驱动电压使所述可动端的形变，并与并联的多个电容式传感器电连接，可以分别对并联的多个电容式传感器的数据进行读取，实现无源无线多参数测量，***简单，易操作和实现。Compared with the prior art, the LC sensing system of the present invention controls the movable end of a cantilever switch, uses different driving voltages to deform the movable end, and is electrically connected to multiple capacitive sensors connected in parallel. The data of multiple capacitive sensors in parallel are read separately to achieve passive wireless multi-parameter measurement. The system is simple, easy to operate and implement.
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principles of the present invention, several improvements and retouches can be made. These improvements and retouches also It should be regarded as the protection scope of the present invention.

Claims (10)

  1. 一种LC传感***，其特征在于，所述LC传感***包括读取部分和传感部分，其中所述读取部分包括读出电路及与读出电路串联的第一电感；所述传感部分包括第二电感、经过整流电路与第二电感串联的悬臂梁开关、与悬臂梁开关的两端相连的并联支路，所述并联支路至少包括第一电容式传感器和第二电容式传感器，所述第一电感和所述第二电感互感耦合。An LC sensing system is characterized in that the LC sensing system includes a reading section and a sensing section, wherein the reading section includes a readout circuit and a first inductor connected in series with the readout circuit; The sensing part includes a second inductor, a cantilever switch connected in series with the second inductor through a rectifier circuit, and a parallel branch connected to both ends of the cantilever switch. The parallel branch includes at least a first capacitive sensor and a second capacitive sensor. A sensor, the first inductance and the second inductance are coupled by mutual inductance.
  2. 根据权利要求1所述的LC传感***，其特征在于，所述悬臂梁开关具有可动端与固定端。The LC sensing system according to claim 1, wherein the cantilever switch has a movable end and a fixed end.
  3. 根据权利要求2所述的LC传感***，其特征在于，所述第一电容式传感器、所述第二电容式传感器分别设有第一电容可动极板和第二电容可动电极。The LC sensing system according to claim 2, wherein the first capacitive sensor and the second capacitive sensor are respectively provided with a first capacitive movable electrode plate and a second capacitive movable electrode.
  4. 根据权利要求3所述的LC传感***，其特征在于，所述可动端与所述第一电容可动极板相接触，所述第一电容可动极板与第二电容可动电极相接触。The LC sensing system according to claim 3, wherein the movable end is in contact with the first capacitive movable electrode plate, and the first capacitive movable electrode plate and a second capacitive movable electrode Phase contact.
  5. 一种LC传感***的测量方法，其特征在于，所述测量方法通过控制悬臂梁开关的可动端，利用不同驱动电压使所述可动端的形变，并与并联的多个电容式传感器电连接，以实现无源无线多参数测量，所述测量方法包括：A measuring method of an LC sensing system, characterized in that the measuring method controls a movable end of a cantilever switch, uses different driving voltages to deform the movable end, and electrically connects with a plurality of parallel capacitive sensors. Connected to achieve passive wireless multi-parameter measurement, the measurement method includes:
    在读出电路扫频周期的初始状态，所述悬臂梁开关的可动端与第一电容式传感器接触，形成电感-电容谐振回路，产生驱动电压，所述驱动电压施加在所述悬臂梁开关上；In the initial state of the frequency sweep period of the readout circuit, the movable end of the cantilever switch is in contact with the first capacitive sensor to form an inductance-capacitance resonance circuit to generate a driving voltage, and the driving voltage is applied to the cantilever switch on;
    施加在所述悬臂梁开关上的驱动电压越来越大，使得所述可动端产生形变，所述可动端带动第一电容可动极板向第二电容可动极板靠近，并使所述第一电容可动极板和所述第二电容可动极板接触，将第一电容式传感器与第二电容式传感器并联接入电路，分别读取所述第一电容式传感器与所述第二电容式传感器的数据；The driving voltage applied to the cantilever switch is getting larger and larger, so that the movable end is deformed, and the movable end drives the first capacitor movable pole plate to approach the second capacitor movable pole plate, and makes The first capacitive movable electrode is in contact with the second capacitive movable electrode, and the first capacitive sensor and the second capacitive sensor are connected in parallel to the circuit, and the first capacitive sensor and the The data of the second capacitive sensor;
    在驱动电压的作用下，所述可动端与所述第二电容可动极板解除连接，再次恢复到电感-电容谐振回路的初始状态，如此往复，实现对所述第一电容式传感器与所述第二电容式传感器的连续多参数测量。Under the action of the driving voltage, the movable end is disconnected from the second capacitive movable electrode plate, and the original state of the inductor-capacitor resonant circuit is restored again. Continuous multi-parameter measurement of the second capacitive sensor.
  6. 根据权利要求5所述的测量方法，其特征在于，所述测量方法包括通过第一电感和第二电感的互感耦合作用进行相互传递频率信号，所述第二电感的两端产生次生磁场，从而产生耦合交流电压。The measuring method according to claim 5, characterized in that the measuring method comprises transmitting frequency signals to each other through a mutual inductance coupling effect of the first inductor and the second inductor, and a secondary magnetic field is generated at both ends of the second inductor, This produces a coupled AC voltage.
  7. 根据权利要求6所述的测量方法，其特征在于，所述耦合交流电压通过整流电路的作用后转化为驱动电压，所述驱动电压用作驱动电压施加在悬臂梁开关上。The measuring method according to claim 6, wherein the coupled AC voltage is converted into a driving voltage by the action of a rectifier circuit, and the driving voltage is used as a driving voltage to be applied to a cantilever switch.
  8. 根据权利要求5所述的测量方法，其特征在于，读出电路发出的扫频频率与第二电感和第一电容式传感器形成的谐振回路的谐振频率接近且直至相等，所述可动端带动第一电容可动极板向第二电容可动极板靠近，并使所述第一电容可动极板和所述第二电容可动极板接 触。The measuring method according to claim 5, characterized in that the sweep frequency emitted by the readout circuit is close to and equal to the resonance frequency of the resonance circuit formed by the second inductor and the first capacitive sensor, and the movable end is driven The first capacitor movable electrode plate approaches the second capacitor movable electrode plate, and the first capacitor movable electrode plate and the second capacitor movable electrode plate are in contact.
  9. 根据权利要求8所述的测量方法，其特征在于，所述扫频频率和所述谐振频率不相等，所述可动端与所述第二电容可动极板解除连接，恢复至初始状态。The measuring method according to claim 8, wherein the sweep frequency and the resonance frequency are not equal, and the movable end is disconnected from the second capacitive movable plate and restored to an initial state.
  10. 根据权利要求5所述的测量方法，其特征在于，所述多个电容式传感器的数量可以为两个、三个或更多个。The measurement method according to claim 5, wherein the number of the plurality of capacitive sensors can be two, three or more.
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