WO2020050389A1 - Exhaust gas treatment method and device - Google Patents

Exhaust gas treatment method and device Download PDF

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Publication number
WO2020050389A1
WO2020050389A1 PCT/JP2019/035097 JP2019035097W WO2020050389A1 WO 2020050389 A1 WO2020050389 A1 WO 2020050389A1 JP 2019035097 W JP2019035097 W JP 2019035097W WO 2020050389 A1 WO2020050389 A1 WO 2020050389A1
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Prior art keywords
exhaust gas
volatile component
pressure
suction blower
treating
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PCT/JP2019/035097
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French (fr)
Japanese (ja)
Inventor
能智　博史
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システム エンジ サービス株式会社
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Application filed by システム エンジ サービス株式会社 filed Critical システム エンジ サービス株式会社
Priority to CN201980031903.7A priority Critical patent/CN112118900A/en
Priority to JP2020541310A priority patent/JP6993029B2/en
Publication of WO2020050389A1 publication Critical patent/WO2020050389A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B01D53/44—Organic components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/81—Solid phase processes
    • B01D53/82—Solid phase processes with stationary reactants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/96—Regeneration, reactivation or recycling of reactants

Definitions

  • the present invention relates to an exhaust gas treatment method and apparatus with enhanced safety, and in particular, purifies exhaust gas containing volatile components such as volatile hydrocarbons (hereinafter, sometimes referred to as “VOC”) that are released into the atmosphere. Also, the present invention relates to an exhaust gas treatment method and apparatus capable of efficiently separating and reusing volatile components and enhancing safety.
  • VOC volatile hydrocarbons
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2004-042013 discloses that as shown in FIG. 6, VOCs mixed in exhaust gas are removed to achieve zero emission, and VOCs in the exhaust gas are separated and recovered.
  • An exhaust gas treatment apparatus 100 is disclosed.
  • This exhaust gas treatment apparatus 100 uses adsorption towers 101a and 101b filled with mesopore activated carbon (MPC) pre-coated with a volatile hydrocarbon in advance, and the switching time between adsorption and desorption is set to 1 to 30 minutes.
  • MPC mesopore activated carbon
  • the exhaust gas supplied from the exhaust gas supply line 102 is introduced into the adsorption tower 101a or 101b to adsorb and remove VOC, and the clean exhaust gas from which VOC has been removed is radiated into the atmosphere from the gas line 103a or 103b.
  • the purge gas (air) obtained from the vacuum pump 104 and the purge line 105 is used in combination, and the obtained purge exhaust gas is recovered through the gas-liquid separator 106 and the liquefied VOC is recovered through the recovery line 107.
  • the uncondensed VOC is returned to the exhaust gas at the inlets of the adsorption towers 101a and 101b via the return line 108.
  • the MPC since the MPC hardly adsorbs the moisture in the exhaust gas, the moisture in the exhaust gas is passed through the released gas as it is. Therefore, the vacuum pumping capacity required for the vacuum pump at the time of desorption is small. The advantage exists.
  • Patent Document 2 Japanese Patent Application Laid-Open No. 2008-068205 discloses that an exhaust gas is substantially saturated with water or volatile hydrocarbons contained in exhaust gas before the exhaust gas treatment apparatus disclosed in Patent Document 1.
  • an exhaust gas treatment apparatus provided with a pretreatment apparatus which pressurizes after avoiding an explosion limit value and concentrates volatile hydrocarbons contained in exhaust gas several times.
  • the subsequent adsorption / desorption device can be significantly reduced in size, and it is particularly useful for treating gasoline vapor-containing exhaust gas.
  • Patent Document 3 Japanese Patent Application Laid-Open No. 2015-1133366 discloses that vinyl chloride monomer is recovered from exhaust gas containing gaseous vinyl chloride monomer by an adsorption method using hydrophobic silica gel as an adsorbent, and further recovered. A method for producing a vinyl chloride polymer using the obtained vinyl chloride monomer is disclosed. According to the invention disclosed in Patent Document 3, the vinyl chloride monomer can be recovered from the exhaust gas generated in the vinyl chloride polymer production plant and reused as a raw material for producing the vinyl chloride polymer. Becomes
  • the VOC-containing exhaust gas treatment device using the adsorption method is a device that sufficiently satisfies that the performance has already been reduced to the standard value or less, has good safety, and further has a VOC containing a vinyl chloride monomer. Has a merit that it can recover concentrated gas and liquefaction, and its operation results are increasing.
  • the VOC-containing exhaust gas treatment device using the adsorption method is an exhaust gas treatment device that complies with environmental regulations for VOC-containing exhaust gas generated from the manufacturing process. As a processing device, it has been incorporated as a part of a manufacturing facility. Therefore, an exhaust gas treatment device as a manufacturing facility is required to have not only performance as an exhaust gas treatment device but also ease of use and durability.
  • the manufacturing facility In order to obtain satisfactory performance as an exhaust gas treatment device incorporated in a manufacturing facility, the manufacturing facility must be inspected once a year, so there is no failure for at least one year as a durability. It is necessary to be able to handle simple tasks even when necessary, and to be able to predict failures in advance.
  • an exhaust gas treatment device when incorporating an exhaust gas treatment device into a manufacturing facility, it is required to have a structure that does not have a large back pressure that adversely affects the exhaust gas pipeline of the manufacturing facility.
  • the exhaust gas treatment device is installed at a later stage of the manufacturing facility.
  • the exhaust gas from the manufacturing equipment includes an exhaust gas from a vacuum pump, a breathing gas generated from the manufacturing equipment, and the like.
  • the manufacturing facility may be damaged, and the exhaust gas treatment device installed at the subsequent stage is also restricted by pressure loss.
  • the allowable range of the pressure loss is different in each manufacturing facility, but the approximate back pressure is set to be an allowable range in which safe use is possible as long as the back pressure is within atmospheric pressure to 0.5 KPaG.
  • an object of the present invention is to automatically reduce the back pressure of an exhaust gas line of a production facility to a predetermined value or less when incorporating an exhaust gas treatment apparatus into a production facility, and furthermore, by using a flow control valve at the time of desorption.
  • An object of the present invention is to provide a method for treating exhaust gas containing VOCs by an adsorption method, which is capable of maintaining a suction air volume in an optimum range, hardly causing damage to manufacturing equipment, and having excellent safety.
  • Still another object of the present invention is to provide a control panel having a structure that can be installed in an explosion-proof area similar to a VOC-containing exhaust gas treatment apparatus and a manufacturing facility, and to easily set predetermined parameters of the exhaust gas treatment apparatus in the explosion-proof area. -To provide a VOC-containing exhaust gas treatment device that can be modified.
  • a method for treating a volatile component-containing exhaust gas includes: By using a plurality of adsorption towers having an adsorbent layer for alternately performing adsorption and desorption, and supplying exhaust gas containing a volatile component to one of the plurality of adsorption towers through a suction blower, an adsorbent in the adsorption tower is provided. The layer is made to adsorb the volatile component, and the exhaust gas substantially free of the volatile component is taken out from the outlet of the adsorption tower and discharged out of the system, during which at least one of the other adsorption towers is desorbed.
  • a method for treating a volatile component-containing exhaust gas comprising switching the volatile component previously adsorbed out of the system as a purge exhaust gas through a bypass pipe having a flow control valve and a vacuum pump, Using a suction blower having a spill-back function, Providing an exhaust gas bypass pipe having an exhaust gas bypass valve between the outlet pipe of the adsorption tower and the inlet side of the suction blower, Controlling the pressure on the inlet side of the suction blower to a predetermined value by the spillback function according to the pressure on the inlet side of the suction blower, When the pressure on the inlet side of the suction blower exceeds the predetermined value, the bypass valve is opened to directly connect the inlet side of the blower to the outlet of the adsorption tower.
  • the pressure on the inlet side of the suction blower is reduced. It will be applied to the manufacturing equipment as back pressure.
  • the pressure on the inlet side of the suction blower is controlled to a substantially predetermined constant pressure by the spillback function (constant pressure function) of the suction blower. , So that excessive pressure is not applied to the exhaust gas line of the manufacturing facility.
  • the bypass valve is opened and the inlet side of the suction blower is directly connected to the outlet of the suction device.
  • the volatile component-containing exhaust gas is released directly into the atmosphere, and no excessive back pressure is applied to the exhaust gas line of the manufacturing equipment, thereby reducing the possibility of damage to the manufacturing equipment.
  • the pressure loss in the exhaust gas treatment device in the exhaust gas treatment device is about 1 KPaG to 3 KPaG, depending on the scale of the device, and the size of the pipe and the size of the adsorption tower are determined by this. Further, the allowable pressure loss of the exhaust gas from the manufacturing equipment is about atmospheric pressure to about 0.5 KPaG.
  • the volatile component-containing exhaust gas applicable in the present invention includes not only VOC-containing exhaust gas in refineries and gasoline storage bases, but also VOC in various product manufacturing plants, recycling plants, pharmaceutical companies, electric and semiconductor manufacturers, and the like.
  • the present invention is also applicable to exhaust gas containing various solvents, various volatile components, and the like, and exhaust gas containing an inert gas from a chemical plant.
  • a volatile component having polymerizability is also included.
  • the method for treating a volatile component-containing exhaust gas according to the second aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to the first aspect, wherein the spill-back function of the suction blower has a pressure applied to the suction blower. It is provided by providing a bypass pipe having a control valve.
  • the method for treating volatile component-containing exhaust gas according to a third aspect of the present invention is the method for treating volatile component-containing exhaust gas according to the first aspect, wherein the spill-back function of the suction blower is such that the suction blower is driven.
  • the motor for use is an inverter motor, and is provided by controlling the number of revolutions of the inverter motor.
  • the pressure on the inlet side of the suction blower can be easily maintained at a predetermined value, and the exhaust gas pipe of the manufacturing facility Excessive pressure on the road can be prevented.
  • the method for treating a volatile component-containing exhaust gas according to a fourth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the first to third aspects, wherein the purged exhaust gas is cooled. Is returned to the inlet side of the adsorption tower.
  • a trace amount of volatile component is contained in the uncondensed gas of the purge exhaust gas. Since it can be recovered by passing through, the recovery efficiency of the volatile components in the volatile component-containing exhaust gas is improved.
  • the method for treating a volatile component-containing exhaust gas according to the fifth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the first to fourth aspects, wherein the exhaust gas containing the volatile component is polymerizable. It is a substance-containing exhaust gas, wherein the adsorbent layer contains at least one selected from silica gel, hydrophobic silica gel, and synthetic zeolite.
  • the method for treating volatile component-containing exhaust gas according to a sixth aspect of the present invention is the method for treating volatile component-containing exhaust gas according to the fifth aspect, wherein the polymerizable substance is acrylonitrile, methyl ethyl ketone, vinyl chloride monomer, styrene. , Tetrahydrofuran.
  • the method for treating a volatile component-containing exhaust gas by using an adsorbent having a predetermined composition, not only the heat of adsorption is low even when a polymerizable substance is adsorbed, Since the reaction can be prevented from proceeding, the exhaust gas containing polymerizable substances such as acrylonitrile, methyl ethyl ketone, vinyl chloride monomer, styrene, tetrahydrofuran and the like can be purified and these polymerizable substances can be recovered.
  • polymerizable substances such as acrylonitrile, methyl ethyl ketone, vinyl chloride monomer, styrene, tetrahydrofuran and the like
  • an apparatus for carrying out the method for treating a volatile component-containing exhaust gas according to the seventh aspect of the present invention is an apparatus for carrying out the method for treating a volatile component-containing exhaust gas according to any one of the first to sixth aspects.
  • the control panel may be a display device mounted inside a door of the control panel and visible from the outside, and various parameters may be set from outside the door.
  • a touch panel that can be used, and has a pressure-resistant explosion-proof structure.
  • a general control panel is equipped with a touch panel inside the control panel and on the surface of the control panel, the parameters of various devices can be set with simple operations.
  • Explosion-proof type The door of a general explosion-proof control panel is made of an iron plate of about 20 mm and is further tightened with many bolts, so that opening and closing of the door requires about 20 minutes.
  • explosion-proof control panels require that explosion-proof guidelines prevent regulations such as opening the explosion-proof control panel lid during operation and turning off the power to open the explosion-proof control panel lid. is there. For this reason, parameter settings during operation must be entered and used each time in the safety zone of the non-explosion-proof area and used in the explosion-proof area. We had to set up various parameter input devices.
  • the display device mounted inside the door of the pressure-resistant explosion-proof control panel can be visually recognized from the outside, and furthermore, the pressure-resistant explosion-proof control panel A touch panel that allows various parameters to be set from outside the door is provided, so that various parameters can be input easily without opening the door, so that more settings can be provided for efficient exhaust gas treatment.
  • a function such as failure prediction can be added to make the device safer.
  • an apparatus for performing the method for treating a volatile component-containing exhaust gas according to the eighth aspect of the present invention is an apparatus for performing the method for treating a volatile component-containing exhaust gas according to the seventh aspect, wherein The adsorption tower, the suction blower having the spill-back function, the exhaust gas bypass line having the exhaust gas bypass valve, the bypass line having the flow control valve and the vacuum pump, and the control panel, the explosion-proof area It is characterized by being provided.
  • substantially all the operating devices and the control panel are provided in the explosion-proof area, so that the safety is improved.
  • various parameters can be easily set in the explosion-proof area.
  • a method for treating a volatile component-containing exhaust gas includes: A plurality of adsorption towers having an adsorbent layer for alternately performing adsorption and desorption are used, and by supplying exhaust gas containing a volatile component to one of the plurality of adsorption towers, the volatilization is performed on the adsorbent layer in the adsorption tower.
  • the volatile component is adsorbed, and the exhaust gas substantially free of the volatile component is taken out from the outlet of the adsorption tower and discharged out of the system.
  • at least one of the other adsorption towers is switched to desorption, and
  • a method for treating volatile component-containing exhaust gas comprising removing the adsorbed volatile component out of the system as a purge exhaust gas through a bypass pipe having a flow control valve and a vacuum pump,
  • the optimal opening degree of the flow control valve based on the internal pressure of any of the plurality of adsorption towers is determined in advance, and the opening degree of the flow control valve is determined based on the internal pressure of any of the plurality of adsorption towers. It is characterized in that control is performed so that the predetermined set value is obtained.
  • the method for treating volatile component-containing exhaust gas according to a tenth aspect of the present invention is the method for treating volatile component-containing exhaust gas according to the ninth aspect, wherein the flow control valve is opened immediately after the vacuum pump is started. Degree is controlled to a predetermined constant value until any of the internal pressures of the plurality of adsorption towers reaches a predetermined pressure, and the internal pressure of any of the plurality of adsorption towers becomes a predetermined pressure. After reaching, the opening degree of the flow control valve is controlled to be increased at a predetermined rate of increase.
  • the pressure fluctuation range of a general treatment device for volatile component-containing exhaust gas using a plurality of adsorption towers having an adsorbent layer that alternately performs adsorption and desorption is about 100 KPaA (atmospheric pressure) to about 3.3 KPaA. Therefore, the pressure in the adsorption tower at the time of the desorption step is evacuated from the atmospheric pressure to 3.3 KPaA by a vacuum pump to reach the ultimate degree of vacuum of 3.3 KPaA. It becomes smaller as it goes. Therefore, at the time of the desorption step, it is necessary to provide a flow control valve between the adsorption tower and the vacuum pump to control the amount of air sucked by the vacuum pump.
  • the suction air volume control by the flow control valve is performed based on the internal pressure of any of the plurality of adsorption towers. Is controlled so as to be a predetermined value, so that the internal flow rate of the heat exchanger and the gas-liquid separator installed at the subsequent stage of the vacuum pump can be maintained within a desired range, and flooding is performed. And the mist generated in the gas-liquid separator is prevented from reaching the adsorption tower to reduce the adsorption effect, and the vacuum pump is less likely to stop due to overcurrent.
  • the set value of the predetermined opening of the flow control valve based on the internal pressure of any of the plurality of adsorption towers may be appropriately determined experimentally.
  • the method for treating a volatile component-containing exhaust gas according to an eleventh aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to the ninth or tenth aspect, wherein a pipe for supplying the exhaust gas containing the volatile component is provided. A pressure control valve is provided between the adsorption towers.
  • the adsorption tower can be installed without any suction blower. Exhaust gas containing volatile components can be supplied.
  • the method for treating a volatile component-containing exhaust gas of the eleventh aspect when the pressure of the pipeline for supplying the exhaust gas containing the volatile component is high, only the pressure control valve is provided to supply the volatile component to the adsorption tower. It is possible to maintain the pressure of the exhaust gas containing the acidic component at an optimum value.
  • the method for treating volatile component-containing exhaust gas of this embodiment can be applied to the case where the pressure of the exhaust gas line of the production facility is low and a blower is provided at the outlet side of the production facility to increase the pressure. is there.
  • the method for treating a volatile component-containing exhaust gas according to a twelfth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the ninth to eleventh aspects, wherein the outlet pipe of the adsorption tower is connected to the exhaust pipe.
  • An exhaust gas bypass pipe having an exhaust gas bypass valve is provided between the pipe and the pipe that supplies the exhaust gas containing volatile components, and the pressure of the pipe that supplies the exhaust gas containing the volatile component exceeds a predetermined value.
  • the exhaust gas bypass valve is opened, and a pipe for supplying the exhaust gas containing the volatile component is directly connected to an outlet of the adsorption tower.
  • the treatment method of the volatile component-containing exhaust gas of the twelfth aspect when the pressure of the pipeline for supplying the exhaust gas containing the volatile component suddenly increases for some reason, the volatile component is directly connected to the outside to remove the volatile component. Since the pressure of the pipeline for supplying the exhaust gas containing can be released, it is possible to prevent an excessive pressure from being applied to the exhaust gas pipeline of the manufacturing facility.
  • the method for treating a volatile component-containing exhaust gas according to the thirteenth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to the ninth or tenth aspect, Using a suction blower having a spill-back function, Providing an exhaust gas bypass pipe having an exhaust gas bypass valve between the outlet pipe of the adsorption tower and the inlet side of the suction blower, Activating the pressure control valve according to the pressure on the inlet side of the suction blower to control the pressure on the inlet side of the suction blower to be a predetermined value, When the pressure on the inlet side of the suction blower exceeds the predetermined value, the bypass valve is opened to directly connect the inlet side of the blower to the outlet of the adsorption tower.
  • the method for treating volatile component-containing exhaust gas of the thirteenth aspect of the present invention not only the operation and effect of the volatile component-containing exhaust gas treatment method of any of the ninth to twelfth aspects, but also at least the first aspect
  • the effect of the method for treating a volatile component-containing exhaust gas described above can also be exerted.
  • the method for treating volatile component-containing exhaust gas according to a fourteenth aspect of the present invention is the method for treating volatile component-containing exhaust gas according to the thirteenth aspect, wherein the spill-back function of the suction blower is such that a pressure is applied to the suction blower. It is provided by providing a bypass pipe having a control valve. Further, in the method for treating a volatile component-containing exhaust gas according to a fifteenth aspect of the present invention, in the method for treating a volatile component-containing exhaust gas according to a thirteenth aspect, the spill-back function of the suction blower may be used to drive the suction blower.
  • the motor for use is an inverter motor, and is provided by controlling the number of revolutions of the inverter motor.
  • the pressure on the inlet side of the suction blower can be easily maintained at a predetermined value, and the exhaust gas pipe of the manufacturing equipment Excessive pressure on the road can be prevented.
  • the method for treating a volatile component-containing exhaust gas according to a sixteenth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the ninth to fifteenth aspects, wherein the purged exhaust gas is cooled. Is returned to the inlet side of the adsorption device.
  • a trace amount of the volatile component is contained in the uncondensed gas of the purge exhaust gas, and the trace amount of the volatile component is also adsorbed again. Since it can be recovered by passing through a tower, the volatile component recovery efficiency of the volatile component-containing exhaust gas is improved.
  • the method for treating a volatile component-containing exhaust gas according to a seventeenth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the ninth to sixteenth aspects, wherein the exhaust gas containing the volatile component is a polymerizable substance.
  • the method for treating a volatile component-containing exhaust gas according to an eighteenth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to the seventeenth aspect, wherein the polymerizable substance is acetone, acrylonitrile, methyl ethyl ketone, a vinyl chloride monomer. , Styrene, and tetrahydrofuran.
  • the same function and effect as those of the method for treating volatile component-containing exhaust gas according to the fifth and sixth aspects of the present invention are exerted. Will be able to do it.
  • an apparatus for performing the method for treating a volatile component-containing exhaust gas according to the nineteenth aspect of the present invention is an apparatus for performing the method for treating a volatile component-containing exhaust gas according to any one of the ninth to eighteenth aspects.
  • the control panel has a display device attached to the inside of the door of the control panel, which can be visually recognized from the outside, and a touch panel that can set various parameters from outside the door, and has a flameproof structure. It is characterized by being.
  • An apparatus for performing the method for treating a volatile component-containing exhaust gas according to a twentieth aspect of the present invention is the apparatus for performing the method for treating a volatile component-containing exhaust gas according to a fifteenth aspect, wherein
  • the bypass tower having the adsorption tower, the flow control valve and the vacuum pump, and the control panel are provided in an explosion-proof area.
  • the method for treating volatile component-containing exhaust gas according to the seventh and eighth aspects of the present invention is provided.
  • the same operation and effect as in the case of the device for implementing the present invention can be obtained.
  • the back pressure of the exhaust gas pipeline of the production facility is automatically reduced to a predetermined value or less.
  • the amount of air suctioned by the flow control valve at the time of desorption can be kept in the optimum range, so that it is possible to provide an exhaust gas treatment method using an adsorption method that is less likely to damage manufacturing equipment and is excellent in safety.
  • FIG. 3 is a conceptual diagram collectively showing an operation state of the volatile component-containing exhaust gas treatment device of the embodiment. It is a figure which shows the control state of the flow control valve at the time of desorption of the volatile component containing exhaust gas processing apparatus of embodiment.
  • 9 is a flow sheet of a volatile component-containing exhaust gas treatment device of Modification Example 2. It is a top view of the pressure-resistant explosion-proof control board used in the embodiment. 4 is a flow sheet of a conventional volatile component-containing exhaust gas treatment device.
  • FIG. 1 is a flow sheet of the exhaust gas treatment apparatus containing a volatile component according to the first embodiment.
  • FIG. 2 is a conceptual diagram collectively showing the operation states of the volatile component-containing exhaust gas treatment apparatus of the embodiment.
  • a region sandwiched between alternate long and short dash lines indicates an explosion-proof area.
  • a volatile component-containing exhaust gas treatment apparatus 10 includes two adsorption towers 11a and 11b, a suction blower 12, a vacuum pump 13, a heat exchanger 14, A gas-liquid separator 15 and a recovery pump 16 are provided.
  • the part including the adsorption tower 11a forms the A system
  • the area including the adsorption tower 11b forms the B system.
  • adsorbents 17a and 17b are disposed in the two adsorption towers 11a and 11b, respectively.
  • Optimum ones of these adsorbents 17a and 17b are selected depending on the types of volatile components and exhaust gas.
  • the adsorbent may be a flame-retardant activated carbon made of mesopores (about 20 to 40 °) pre-coated with a volatile component, a silica gel pre-coated similarly. Synthetic zeolites can be used.
  • These adsorbents 17a and 17b may be of a single layer or of a plurality of layers.
  • adsorbents In the case of a plurality of layers, those composed of different types of adsorbents may be employed. can do.
  • the volatile component contains a polymerizable component, at least one selected from silica gel, hydrophobic silica gel, and synthetic zeolite is used in order to prevent the formation of a polymer upon adsorption.
  • the volatile component-containing exhaust gas from the manufacturing equipment not shown is supplied to the inlet side 12a of the suction blower 12 via the exhaust gas introduction line 18, and the outlet side 12b of the suction blower 12 is divided into two, and each of the lines 19a, 19b, it is connected to the lower inlet side of the adsorption towers 11a and 11b via automatic open / close valves 20a and 20b.
  • the upper outlet sides of the adsorption towers 11a and 11b are joined via pipes 21a and 21b and automatic opening / closing valves 22a and 22b, respectively, and are connected to a discharge path to the atmosphere (not shown) via an air discharge pipe 23. It is connected.
  • a purge gas for example, air
  • a purge gas supply pipe 24 and an automatic opening / closing valve 25 and the adsorption tower 11a and the adsorption tower 11a via automatic opening / closing valves 26a and 26b and pipes 27a and 27b, respectively. It is connected to conduits 21a, 21b on the outlet side of 11b.
  • the lower inlet sides of the adsorption towers 11a, 11b are joined via desorption / recovery pipes 28a, 28b and automatic opening / closing valves 29a, 29b, respectively, and are connected to the inlet side of the vacuum pump 13 via a flow control valve 30. It is connected.
  • the outlet side of the vacuum pump 13 is connected to the inlet side of the gas-liquid separator 15 via a check valve (check valve) 31, a heat exchanger 14, and a pipe 32.
  • the liquid outlet side at the lower part of the gas-liquid separator 15 is connected to the inlet side of the recovery pump 16 via a pipe 33 and a partition valve 34.
  • the outlet side of the recovery pump 16 is configured to take out the liquefied VOC out of the system through an automatic opening / closing valve 35 and a VOC recovery pipe 36.
  • the outlet side of the gas-liquid separator 15 is connected to the outlet side of the suction blower 12 via a pipe 37, and the purge gas containing VOC not liquefied and collected by the gas-liquid separator 15 is supplied through a pipe 19a, The gas is introduced to the inlet side of the adsorption towers 11a and 11b through the 19b and the automatic opening and closing valves 20a and 20b.
  • bypass pipe 40 Furthermore, the outlet side and the inlet side of the suction blower 12 are connected by a bypass pipe 40, and a bypass valve 41 composed of a pressure control valve is provided in the middle of the bypass pipe 40.
  • the bypass line 40 and the bypass valve 41 form the spill-back function of the present invention.
  • An exhaust gas bypass pipe 42 is provided between the exhaust gas introduction pipe 18 and the atmosphere discharge pipe 23, and an exhaust gas bypass valve 43 is provided in the exhaust gas bypass pipe 43.
  • a pressure sensor 44 for measuring the pressure on the inlet side of the suction blower is provided on the inlet side of the suction blower 12, and the output of the pressure sensor 44 controls the bypass valve 41 and the exhaust gas bypass valve 43. Has become. If the exhaust gas pressure does not rise abnormally, the bypass pipe 40 and the bypass valve 41 can be omitted.
  • the operation of the volatile component-containing exhaust gas treatment apparatus 10 shown in FIG. 1 will be described.
  • the adsorption operation is performed in the system A and the desorption operation is performed in the system B.
  • the automatic open / close valves 20a and 22a connected to the adsorption tower 11a are open, and the automatic open / close valves 26a and 29a are also closed.
  • the automatic open / close valves 20b and 22b connected to the adsorption tower 11b are closed, and the automatic open / close valves 26b and 29b are open.
  • the exhaust gas bypass valve 43 provided in the exhaust gas bypass pipe 40 is closed, and the pressure control valve 41 of the bypass pipe 40 provided in parallel with the suction blower 12 has a predetermined opening degree. It is assumed that it is open and the pressure on the inlet side 12a of the suction blower 12 is maintained at a predetermined pressure (back pressure).
  • the VOC-containing exhaust gas as a volatile component introduced from the manufacturing facility is sucked by the suction blower 12 through the exhaust gas introduction line 18, and is introduced into the adsorption tower 11a through the line 19a and the automatic opening / closing valve 20a. Then, the VOC is adsorbed and removed by the adsorbent 17a in the adsorption tower 11a, and the purified exhaust gas is discharged into the atmosphere via the pipe 21a, the automatic on-off valve 22a, and the air discharge pipe 23.
  • the purge gas such as air supplied from the purge gas supply pipe 24 is introduced into the adsorption tower 11b through the automatic opening / closing valves 25 and 26b, and the VOC adsorbed by the adsorbent 17b is desorbed, and the desorption recovery pipe is purged together with the purge gas.
  • the air is sucked by the vacuum pump 13 through the passage 28b, the automatic opening / closing valve 29b, and the flow control valve 30.
  • the purge gas containing VOC exhausted from the outlet of the vacuum pump 13 is cooled by the heat exchanger 14 to liquefy the VOC, and is introduced into the gas-liquid separator 15 via the pipe 32.
  • the liquefied VOC separated by the gas-liquid separator 15 is recovered outside the system via a pipe 33, a partition valve 34, a recovery pump 16, an automatic on-off valve 35, and a VOC recovery pipe 36.
  • the purge gas containing VOC that has not been adsorbed by the gas-liquid separator 15 is introduced into the adsorption tower 11a together with the VOC-containing exhaust gas introduced from the manufacturing facility via the pipe 37, the pipe 19a, and the automatic on-off valve 20a. It is cleaned and released into the atmosphere via the atmosphere discharge pipe 23.
  • the system A and the system B are switched to perform operations opposite to each other after a predetermined pause time. That is, the desorption operation is performed in the A system, and the adsorption operation is performed in the B system.
  • the automatic open / close valves 20a and 22a connected to the adsorption tower 11a are closed, and the automatic open / close valves 26a and 29a are also opened.
  • the automatic opening / closing valves 20b and 22b connected to the adsorption tower 11b are opened, and the automatic opening / closing valves 26b and 29b are closed.
  • the operations of the A system and the B system are switched at predetermined time intervals, and the VOC-containing exhaust gas as a volatile component introduced from the manufacturing equipment substantially continuously. Is released to the atmosphere and liquefied VOCs are collected.
  • FIG. 2 shows the operating states of the volatile component-containing exhaust gas treatment apparatus 10 of such an embodiment.
  • the exhaust gas bypass valve 43 provided in the exhaust gas bypass line 40 and the pressure control valve 41 of the bypass line 40 provided in parallel with the suction blower 12 are maintained in the same manner as in the previous case.
  • the pressure on the inlet side 12a of 12 is maintained at a predetermined pressure (back pressure).
  • the pressure at the inlet side 12a of the suction blower 12 is set as the back pressure. Will be applied to the equipment. Therefore, the pressure on the inlet side 12a of the suction blower 12 is measured by the pressure sensor 44, and the opening degree of the bypass valve 41 provided in the exhaust gas bypass pipe 40 is adjusted so that the measured pressure becomes a predetermined pressure. The pressure measured by the adjustment is set to be within a predetermined pressure range.
  • the pressure on the inlet side 12a of the suction blower 12 drops to near atmospheric pressure, so that no excessive back pressure is applied to the exhaust gas line of the manufacturing equipment.
  • the pressure loss in the exhaust gas treatment device in the exhaust gas treatment device is about 1 KPaG to 3 KPaG, depending on the scale of the device, and the size of the pipe and the size of the adsorption tower are determined by this. Further, the allowable pressure loss of the exhaust gas from the manufacturing equipment is about atmospheric pressure to about 0.5 KPaG.
  • the volatile component-containing exhaust gas is a VOC-containing exhaust gas
  • the VOC-containing exhaust gas not only a VOC-containing exhaust gas at a refinery, a chemical storage base, and the like, but also various product manufacturing plants
  • the present invention is also applicable to exhaust gas containing VOCs, various solvents, various volatile components, etc. in recycling plants, pharmaceutical companies, electric / semiconductor manufacturers, etc., and exhaust gas containing inert gas in chemical plants.
  • the adsorbents 17a and 17b contain at least one selected from silica gel, hydrophobic silica gel, or synthetic zeolite, the adsorption and the absorption can be achieved.
  • the polymerizable component can be adsorbed and desorbed without being polymerized, so that treatment can be performed in the same manner as in the case of the VOC-containing exhaust gas.
  • FIG. 3 is a diagram showing a control state of the flow control valve 30 when the volatile component-containing exhaust gas treatment device 10 of the embodiment is desorbed.
  • the exhaust flow rate at the time of desorption is controlled by an opening and closing method that follows a signal from a pressure switch or a pressure sensor.However, since the pressure adjustment is not constant depending on the exhaust flow rate, it is difficult to set, and in the worst case, the vacuum pump The system went down due to abnormal current. There is also a method of opening the valve opening by following a signal from the pressure sensor, but it is difficult to adjust the valve opening due to a change in gas concentration or the like. Therefore, in the volatile component-containing exhaust gas treatment apparatus 10 according to the embodiment of the embodiment, the opening degree of the flow control valve 30 is controlled by a signal from the pressure sensors 44a and 44b in the adsorption towers 11a and 11b, and the flow control valve 30 is controlled.
  • the displacement of the vacuum pump 13 can be smoothly adjusted, and the operation control without applying a load to the vacuum pump 13 is enabled.
  • the pressures ⁇ , ⁇ , ⁇ , and ⁇ at the respective control start points shown in FIG. 3 are determined based on the actual values based on the desorbing performance of the adsorbent, and after the input operation at the time of the initial setting is completed, There is no need to change the numerical values.
  • the flow control valve 30 is set to a predetermined opening degree, for example, about 20%.
  • the desorption is performed by the vacuum pump 13.
  • the pressure in the adsorption towers 11a and 11b decreases, but when this pressure reaches a predetermined first set value ⁇ , the opening of the flow control valve 30 is changed to a constant speed, for example. Increase by 0.2% / sec. In this case, as the time elapses, the opening of the flow control valve 30 increases and the pressure in the adsorption towers 11a and 11b also decreases.
  • the opening of the flow control valve 30 is increased at another constant speed, for example, 0.1% / sec. Also in this case, as the time elapses, the opening of the flow control valve 30 increases and the pressure in the adsorption towers 11a and 11b also decreases.
  • the opening of the flow control valve 30 is increased at another constant speed, for example, 0.15% / sec.
  • the opening degree of the flow control valve 30 increases with the passage of time and the pressure in the adsorption towers 11a and 11b also decreases to reach a predetermined fourth set value ⁇ , the flow control valve 30 Is fully opened.
  • the pressures in the adsorption towers 11a and 11b are substantially close to a vacuum, even when the flow control valve 30 is fully opened, a large change in flow does not occur.
  • the opening of the flow control valve 30 When the opening of the flow control valve 30 is increased at a constant speed in accordance with the pressure in the adsorption towers 11a and 11b in this manner, an excessive load is not applied to the vacuum pump 13 and the vacuum pump does not stop overcurrent. Not only that, the flow rates in the heat exchanger 14 and the gas-liquid separator provided downstream of the vacuum pump 13 can be maintained in a range where good performance is achieved, so that good desorption efficiency can be obtained.
  • the opening, the control time, or the set value of the pressure of the flow control valve 30 may be experimentally determined to be optimal in advance.
  • FIG. 5 is a plan view of the pressure-resistant explosion-proof control panel used in the embodiment.
  • an ordinary non-explosion-proof control panel can be used.
  • a door 52 is attached to a pressure-resistant case 51 so as to be openable and closable. Both the case 51 and the door are made of an iron plate having a thickness of about 20 mm. Used in the state that was done. Therefore, opening and closing the door 52 requires about 20 minutes.
  • Various operation switches 54 are provided inside the door 52, and the setting state of these operation switches 54 can be visually recognized from the outside via a window 55 provided on the door 52.
  • the window 55 is fitted with pressure-resistant glass.
  • a display unit 56 such as a liquid crystal display panel and a plurality of, for example, five touch panels 57 are provided inside the explosion-proof control panel 50.
  • the surfaces of these display units 56 and the touch panel 57 are also made of pressure-resistant glass. , And neither the display unit 56 nor the touch panel 57 is exposed to the outside.
  • the touch panel 57 allows various parameters to be set from outside the door 52, and the set various parameters can be confirmed on the display unit 56.
  • the spill-back function of the suction blower 12 includes the exhaust gas bypass pipe 40 provided in parallel with the suction blower 12 and the bypass valve 41 provided in the exhaust gas bypass pipe 40.
  • the drive motor (not shown) of the suction blower 12 is used as an inverter motor as the suction blower 12
  • the spill-back function is provided to the suction blower 12 by controlling the rotation speed of the inverter motor.
  • the inverter signal (4 to 20 mA) is controlled so that the pressure detected by the pressure sensor 44 provided on the inlet side 12a of the suction blower 12 falls within a predetermined range. You only need to control the number.
  • the pressure of the exhaust gas can be increased in advance, so that it is not necessary to provide the suction blower 12 on the inlet side of the exhaust gas treatment device.
  • the flow sheet of the volatile component-containing exhaust gas treating apparatus according to Modification 2 in which the suction blower 12 is eliminated will be described with reference to FIG.
  • the volatile component-containing exhaust gas treating apparatus of Modification 2 is the same as the volatile component-containing exhaust gas treating apparatus of the embodiment shown in FIG. 1 except that the suction blower 12 and the bypass pipe and the bypass valve provided in parallel with the suction blower 12 are provided.
  • a pressure control valve 45 is provided in place of 41, and the pressure control valve 45 is controlled by the output of a pressure sensor 44 for detecting the pressure of the exhaust gas introduction pipe 18, and other configurations are substantially implemented. It is the same as that of the form. According to the volatile component-containing exhaust gas treating apparatus of Modification 2 having such a configuration, even if the pressure of the exhaust gas introduction pipe 18 is high, the volatilization supplied to the adsorption towers 11a and 11b by the pressure control valve 45.
  • the configuration of the volatile component-containing exhaust gas treatment apparatus of Modification 2 is also applicable to a case where the pressure of the exhaust gas line of the production facility is low and a blower is provided at the outlet side of the production facility.
  • an exhaust gas bypass line 42 is provided between the exhaust gas introduction line 18 and the atmospheric release line 23.
  • an exhaust gas bypass valve 43 may be provided in the exhaust gas bypass pipe 43. Also in this case, if for some reason the pressure in the exhaust gas introduction line 18 exceeds a predetermined pressure, the bypass line bypass valve opens based on the output of the pressure sensor 44 and the exhaust gas introduction line Since the pressure 18 is directly connected to the outlets of the adsorption towers 11a and 11b, the increased pressure can be released, so that an excessive pressure is not applied to the exhaust gas pipe of the manufacturing equipment. At least one of the pressure control valve 45 and the exhaust gas bypass pipe 43 provided with the exhaust gas bypass valve 43 can be omitted.
  • Desorption / recovery line 30 Flow control valve 31 ... Check valve 34 ... Partition valve 35 ... Automatic open / close valve 36 ... VOC recovery Pipe line 40: bypass line 41: bypass valve 42: exhaust gas bypass pipe Road 43 ... Exhaust gas bypass valve 44, 44a, 44b ... Pressure sensor 45 ... Pressure control valve 50 ... Explosion-proof control panel 51 ... Pressure-resistant case 52 ... Door 53 ... Bolt 54 ... Various operation switches 55 ... Window 56 ... Display unit 57 ... Touch panel

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Abstract

This exhaust gas treatment device (10): uses a suction blower (12) that has a spill-back function (constant pressure function); is provided with an exhaust gas bypass pipeline (42) that has an exhaust gas bypass valve (43) between an air discharge pipeline (23), that is the outlet pipeline for an absorption tower (11a, 11b), and the inlet side (12a) of the suction blower (12); controls the pressure of the inlet side (12a) of the suction blower to be a preset prescribed value; and directly couples the inlet side (12a) of the blower (12) to the air discharge pipeline (23) with the exhaust gas bypass valve (43) in an opened state when the pressure exceeds the preset prescribed value. According to this exhaust gas treatment device, it is possible to provide an exhaust gas treatment method and device wherein the back pressure of the exhaust gas pipeline for manufacturing equipment is automatically set to be equal to or less than the prescribed value when installing the exhaust gas treatment device in the manufacturing equipment, thereby preventing the manufacturing equipment from being easily damaged and ensuring safety.

Description

排ガス処理方法及び装置Exhaust gas treatment method and apparatus
　本発明は、安全性を強化した排ガス処理方法及び装置に関し、特に大気中に放散される揮発性炭化水素（以下、「ＶＯＣ」ということがある。）等の揮発性成分を含む排ガスを浄化し、揮発性成分を効率よく分離して再利用することができるようにするとともに、安全性を強化した排ガス処理方法及び装置に関する。 The present invention relates to an exhaust gas treatment method and apparatus with enhanced safety, and in particular, purifies exhaust gas containing volatile components such as volatile hydrocarbons (hereinafter, sometimes referred to as “VOC”) that are released into the atmosphere. Also, the present invention relates to an exhaust gas treatment method and apparatus capable of efficiently separating and reusing volatile components and enhancing safety.
　従来、ＶＯＣ等の揮発性成分を含む多量の排ガスを処理する排ガス処理装置は、多数提案されてきている。これらの排ガス処理装置の開発目的は、公害防止上、法的に義務付けられたＶＯＣ等の排出濃度の規制値を満足するように、排ガス中のＶＯＣ等の大気放出濃度及び大気放出量を基準値以下にするためである。このような大量の排ガス中のＶＯＣ等の揮発性成分を除去する方法として、燃焼法は温暖化ガス（炭酸ガス）の排出規制の強化によって適用が著しく困難なため、吸着及び脱着を交互に繰り返す吸着法が多く採用されている。 Conventionally, many exhaust gas treatment apparatuses for treating a large amount of exhaust gas containing volatile components such as VOCs have been proposed. The purpose of the development of these exhaust gas treatment equipment is to set the emission concentration of VOC and the like in the exhaust gas to the standard value so that the emission concentration of VOC and the like in the exhaust gas can be satisfied in order to prevent the pollution. This is for the following. As a method for removing volatile components such as VOCs in such a large amount of exhaust gas, the combustion method is extremely difficult to apply due to stricter emission control of greenhouse gases (carbon dioxide gas), so that adsorption and desorption are alternately repeated. Adsorption methods are often employed.
　例えば、特許文献１（特開２００４－０４２０１３号公報）には、図６に示したように、排ガス中に混在するＶＯＣを除去してゼロエミツションを達成させ、排ガス中のＶＯＣを分離・回収する排ガス処理装置１００が開示されている。この排ガス処理装置１００は、揮発性炭化水素で予めプレコートして成るメソポアー活性炭（ＭＰＣ）を充填した吸着塔１０１ａ，１０１ｂを用い、吸・脱着の切り換え時間を１～３０分としている。吸着時には排ガス供給管路１０２から供給された排ガスを吸着塔１０１ａ又は１０１ｂ内に導入してＶＯＣを吸着除去し、ＶＯＣを除去された清浄な排ガスはガス管路１０３ａ又は１０３ｂから大気中に放散される。 For example, Patent Document 1 (Japanese Patent Application Laid-Open No. 2004-042013) discloses that as shown in FIG. 6, VOCs mixed in exhaust gas are removed to achieve zero emission, and VOCs in the exhaust gas are separated and recovered. An exhaust gas treatment apparatus 100 is disclosed. This exhaust gas treatment apparatus 100 uses adsorption towers 101a and 101b filled with mesopore activated carbon (MPC) pre-coated with a volatile hydrocarbon in advance, and the switching time between adsorption and desorption is set to 1 to 30 minutes. At the time of adsorption, the exhaust gas supplied from the exhaust gas supply line 102 is introduced into the adsorption tower 101a or 101b to adsorb and remove VOC, and the clean exhaust gas from which VOC has been removed is radiated into the atmosphere from the gas line 103a or 103b. You.
　また、脱着時には、真空ポンプ１０４とパージ管路１０５からのパージガス（空気）を併用し、得られたパージ排ガスを気液分離器１０６を経て、液化したＶＯＣを回収管路１０７を経て回収するとともに、未凝縮のＶＯＣは戻し管路１０８を経て吸着塔１０１ａ，１０１ｂの入口の排ガス中に戻されるようになっている。この排ガス処理装置１００では、ＭＰＣが排ガス中の水分をほとんど吸着しないため、排ガス中の水分はそのまま放出ガス中にスルーさせているので、脱着時の真空ポンプに必要な真空排気容量は小さくてすむという利点が存在する。 Further, at the time of desorption, the purge gas (air) obtained from the vacuum pump 104 and the purge line 105 is used in combination, and the obtained purge exhaust gas is recovered through the gas-liquid separator 106 and the liquefied VOC is recovered through the recovery line 107. The uncondensed VOC is returned to the exhaust gas at the inlets of the adsorption towers 101a and 101b via the return line 108. In the exhaust gas treatment apparatus 100, since the MPC hardly adsorbs the moisture in the exhaust gas, the moisture in the exhaust gas is passed through the released gas as it is. Therefore, the vacuum pumping capacity required for the vacuum pump at the time of desorption is small. The advantage exists.
　また、特許文献２（特開２００８－０６８２０５号公報）には、実質的に特許文献１に開示されている排ガス処理装置の前段に、予め排ガス中に水分ないし含まれる揮発性炭化水素で飽和させて爆発限界値を避けた後に加圧し、排ガス中に含まれる揮発性炭化水素を数倍に濃縮する前処理装置を設けた排ガス処理装置が開示されている。この排ガス処理装置によれば、後段の吸着・脱着装置を著しく小型化することができ、特にガソリンベーパー含有排ガスを処理するのに有用となる。 Further, Patent Document 2 (Japanese Patent Application Laid-Open No. 2008-068205) discloses that an exhaust gas is substantially saturated with water or volatile hydrocarbons contained in exhaust gas before the exhaust gas treatment apparatus disclosed in Patent Document 1. There is disclosed an exhaust gas treatment apparatus provided with a pretreatment apparatus which pressurizes after avoiding an explosion limit value and concentrates volatile hydrocarbons contained in exhaust gas several times. According to this exhaust gas treatment device, the subsequent adsorption / desorption device can be significantly reduced in size, and it is particularly useful for treating gasoline vapor-containing exhaust gas.
　さらに、特許文献３（特開２０１５－１１３３３６号公報）には、吸着材として疎水性のシリカゲルを用い、吸着法によってガス状塩化ビニルモノマーを含有する排気ガスから塩化ビニルモノマーを回収し、さらに回収された塩化ビニルモノマーを用いて塩化ビニルポリマーを製造する方法が示されている。この特許文献３に開示されている発明によれば、塩化ビニルポリマーの製造プラントで発生した排気ガスから塩化ビニルモノマーを回収して塩化ビニルポリマーの製造原料として再利用することができるので、経済的となる。 Further, Patent Document 3 (Japanese Patent Application Laid-Open No. 2015-113336) discloses that vinyl chloride monomer is recovered from exhaust gas containing gaseous vinyl chloride monomer by an adsorption method using hydrophobic silica gel as an adsorbent, and further recovered. A method for producing a vinyl chloride polymer using the obtained vinyl chloride monomer is disclosed. According to the invention disclosed in Patent Document 3, the vinyl chloride monomer can be recovered from the exhaust gas generated in the vinyl chloride polymer production plant and reused as a raw material for producing the vinyl chloride polymer. Becomes
特開２００４－０４２０１３号公報JP-A-2004-042013 特開２００８－０６８２０５号公報JP 2008-068205 A 特開２０１５－１１３３３６号公報JP 2015-113336 A
　上述したように、吸着法によるＶＯＣ含有排ガス処理装置は、性能が既に基準値以下にすることを十分に満足する装置であること、安全性が良好であること、さらには塩化ビニルモノマーも含むＶＯＣを濃縮ガス回収及び液化回収できるというメリットもあることから、稼働実績も増えてきている。さらに、現在では、吸着法によるＶＯＣ含有排ガス処理装置は、製造工程から発生するＶＯＣ含有排ガスの環境規制対応の排ガス処理装置として、ＶＯＣ等の回収液を原料として再利用できるリサイクル機器しての排ガス処理装置として、製造設備の一部として組み込まれてきている。そのため、製造設備としての排ガス処理装置は、排ガス処理装置としての性能だけでなく、使い易さ及び耐久性も要求されている。製造設備に組み込まれる排ガス処理装置として満足した性能を得るためには、製造設備には１年に１回は点検時期があるため、耐久性として最低１年間は故障がないこと、また点検修理が必要な場合でも簡単な作業対応で処理できること、故障の事前予知ができることなどが必要である。 As described above, the VOC-containing exhaust gas treatment device using the adsorption method is a device that sufficiently satisfies that the performance has already been reduced to the standard value or less, has good safety, and further has a VOC containing a vinyl chloride monomer. Has a merit that it can recover concentrated gas and liquefaction, and its operation results are increasing. Furthermore, at present, the VOC-containing exhaust gas treatment device using the adsorption method is an exhaust gas treatment device that complies with environmental regulations for VOC-containing exhaust gas generated from the manufacturing process. As a processing device, it has been incorporated as a part of a manufacturing facility. Therefore, an exhaust gas treatment device as a manufacturing facility is required to have not only performance as an exhaust gas treatment device but also ease of use and durability. In order to obtain satisfactory performance as an exhaust gas treatment device incorporated in a manufacturing facility, the manufacturing facility must be inspected once a year, so there is no failure for at least one year as a durability. It is necessary to be able to handle simple tasks even when necessary, and to be able to predict failures in advance.
　加えて、排ガス処理装置を製造設備に組み込む際には、製造設備の排ガス管路に悪影響を与える大きな背圧を持たない構造とすることが要求される。排ガス処理装置は、製造設備の後段に取り付けられるものである。製造設備からの排気ガスには、真空ポンプからの排出ガス、製造設備から発生するブリージングガス等がある。しかしながら、製造設備の出口に背圧があると、最悪の場合、製造設備を破損させることがあり、また、後段に設置する排ガス処理装置にも圧損の制約がある。圧損の許容範囲は、それぞれの製造設備において異なるが、おおよその背圧は大気圧～０．５ＫＰａＧ以内であれば安全に使用できる許容範囲とされている。 In addition, when incorporating an exhaust gas treatment device into a manufacturing facility, it is required to have a structure that does not have a large back pressure that adversely affects the exhaust gas pipeline of the manufacturing facility. The exhaust gas treatment device is installed at a later stage of the manufacturing facility. The exhaust gas from the manufacturing equipment includes an exhaust gas from a vacuum pump, a breathing gas generated from the manufacturing equipment, and the like. However, if there is a back pressure at the outlet of the manufacturing facility, in the worst case, the manufacturing facility may be damaged, and the exhaust gas treatment device installed at the subsequent stage is also restricted by pressure loss. The allowable range of the pressure loss is different in each manufacturing facility, but the approximate back pressure is set to be an allowable range in which safe use is possible as long as the back pressure is within atmospheric pressure to 0.5 KPaG.
　本発明は従来技術のこのような課題を解決すべくなされたものである。すなわち、本発明の目的は、排ガス処理装置を製造設備に組み込む際に、製造設備の排ガス管路の背圧を自動的に所定値以下となるようにし、さらには、脱着時の流量制御弁による吸引風量を最適な範囲に保てるようにして、製造設備に損傷が生じ難い、安全性に優れた吸着法によるＶＯＣ含有排ガス処理方法を提供することにある。 The present invention has been made to solve such problems of the prior art. That is, an object of the present invention is to automatically reduce the back pressure of an exhaust gas line of a production facility to a predetermined value or less when incorporating an exhaust gas treatment apparatus into a production facility, and furthermore, by using a flow control valve at the time of desorption. An object of the present invention is to provide a method for treating exhaust gas containing VOCs by an adsorption method, which is capable of maintaining a suction air volume in an optimum range, hardly causing damage to manufacturing equipment, and having excellent safety.
　さらに、本発明の別の目的は、制御盤もＶＯＣ含有排ガス処理装置及び製造設備と同様の防爆区域に設置できる構造のものとし、かつ、防爆区域において簡単に排ガス処理装置の所定のパラメータを設定・修正できるようにしたＶＯＣ含有排ガス処理装置を提供することにある。 Still another object of the present invention is to provide a control panel having a structure that can be installed in an explosion-proof area similar to a VOC-containing exhaust gas treatment apparatus and a manufacturing facility, and to easily set predetermined parameters of the exhaust gas treatment apparatus in the explosion-proof area. -To provide a VOC-containing exhaust gas treatment device that can be modified.
　上記目的を達成するため、本発明の第１の態様の揮発性成分含有排ガスの処理方法は、
吸着と脱着を交互に行う吸着剤層を有する吸着塔を複数用い、前記複数の吸着塔の一つに、揮発性成分を含む排ガスを吸引ブロワを経て供給することにより前記吸着塔内の吸着剤層に前記揮発性成分を吸着させ、実質的に前記揮発性成分を含まない排ガスを前記吸着塔の出口から取り出して系外に放出し、その間に、他の吸着塔の少なくとも一つを脱着に切り換えて先に吸着された前記揮発性成分を流量制御弁及び真空ポンプを有するバイパス管路を経てパージ排ガスとして系外に取り出すことからなる揮発性成分含有排ガスの処理方法において、
　前記吸引ブロワとしてスピルバック機能を有するものを用い、
　前記吸着塔の出口管路と前記吸引ブロワの入口側との間に排ガスバイパス弁を有する排ガスバイパス管路を設け、
　前記吸引ブロワの入口側の圧力に応じて前記スピルバック機能によって前記吸引ブロワの入口側の圧力を予め定めた所定値となるように制御し、
　前記吸引ブロワの入口側の圧力が前記予め定めた所定値を越えた際には、前記バイパス弁を開状態として前記ブロワの入口側を前記吸着塔の出口と直結させることを特徴とする。 In order to achieve the above object, a method for treating a volatile component-containing exhaust gas according to the first aspect of the present invention includes:
By using a plurality of adsorption towers having an adsorbent layer for alternately performing adsorption and desorption, and supplying exhaust gas containing a volatile component to one of the plurality of adsorption towers through a suction blower, an adsorbent in the adsorption tower is provided. The layer is made to adsorb the volatile component, and the exhaust gas substantially free of the volatile component is taken out from the outlet of the adsorption tower and discharged out of the system, during which at least one of the other adsorption towers is desorbed. A method for treating a volatile component-containing exhaust gas, comprising switching the volatile component previously adsorbed out of the system as a purge exhaust gas through a bypass pipe having a flow control valve and a vacuum pump,
Using a suction blower having a spill-back function,
Providing an exhaust gas bypass pipe having an exhaust gas bypass valve between the outlet pipe of the adsorption tower and the inlet side of the suction blower,
Controlling the pressure on the inlet side of the suction blower to a predetermined value by the spillback function according to the pressure on the inlet side of the suction blower,
When the pressure on the inlet side of the suction blower exceeds the predetermined value, the bypass valve is opened to directly connect the inlet side of the blower to the outlet of the adsorption tower.
　本発明の第１の態様の揮発性成分含有排ガスの処理方法においては、製造設備の排ガス管路は排ガス処理装置の吸引ブロワの入口側に接続されるので、この吸引ブロアの入口側の圧力が背圧として製造設備に印加されることになる。本発明の第１の態様の揮発性成分含有排ガスの処理方法によれば、吸引ブロアの入口側の圧力を吸引ブロアのスピルバック機能（定圧機能）によって実質的に予め定めた一定の圧力に制御することができるようになるので、製造設備の排ガス管路に過大な圧力が掛からなくなる。加えて、吸引ブロアの入口側の圧力が予め定めた所定の圧力を超えて増大する場合には、バイパス弁が開いて吸引ブロワの入口側が吸着装置の出口と直結されるため、製造設備からの揮発性成分含有排ガスは直接大気中に放出され、製造設備の排ガス管路に過大な背圧が掛かることがなくなって製造設備の破損の可能性が減少する。 In the method for treating a volatile component-containing exhaust gas according to the first aspect of the present invention, since the exhaust gas line of the manufacturing facility is connected to the inlet side of the suction blower of the exhaust gas treatment device, the pressure on the inlet side of the suction blower is reduced. It will be applied to the manufacturing equipment as back pressure. According to the method for treating a volatile component-containing exhaust gas according to the first aspect of the present invention, the pressure on the inlet side of the suction blower is controlled to a substantially predetermined constant pressure by the spillback function (constant pressure function) of the suction blower. , So that excessive pressure is not applied to the exhaust gas line of the manufacturing facility. In addition, when the pressure on the inlet side of the suction blower increases beyond a predetermined pressure, the bypass valve is opened and the inlet side of the suction blower is directly connected to the outlet of the suction device. The volatile component-containing exhaust gas is released directly into the atmosphere, and no excessive back pressure is applied to the exhaust gas line of the manufacturing equipment, thereby reducing the possibility of damage to the manufacturing equipment.
　なお、排ガス処理装置内の排ガス処理装置内の圧力損失は、装置規模にもよるが、およそ１ＫＰａＧ～３ＫＰａＧ程度で、これにより配管サイズ及び吸着塔サイズが決定される。また、製造設備からの排ガス許容圧損は、大気圧～０．５ＫＰａＧ程度である。さらに、本発明で適用し得る揮発性成分含有排ガスとしては、製油所、ガソリン貯蔵基地等におけるＶＯＣ含有排ガスだけでなく、各種製品製造工場、リサイクル工場、製薬会社、電気・半導体メーカー等におけるＶＯＣ、各種溶剤、各種揮発性成分等の含有排ガス、化学工場の不活性ガス含有排ガス等に対しても適用可能である。なお、本発明における揮発性成分ないしＶＯＣとしては、重合性を有する揮発性成分も含まれる。 The pressure loss in the exhaust gas treatment device in the exhaust gas treatment device is about 1 KPaG to 3 KPaG, depending on the scale of the device, and the size of the pipe and the size of the adsorption tower are determined by this. Further, the allowable pressure loss of the exhaust gas from the manufacturing equipment is about atmospheric pressure to about 0.5 KPaG. Furthermore, the volatile component-containing exhaust gas applicable in the present invention includes not only VOC-containing exhaust gas in refineries and gasoline storage bases, but also VOC in various product manufacturing plants, recycling plants, pharmaceutical companies, electric and semiconductor manufacturers, and the like. The present invention is also applicable to exhaust gas containing various solvents, various volatile components, and the like, and exhaust gas containing an inert gas from a chemical plant. In addition, as the volatile component or VOC in the present invention, a volatile component having polymerizability is also included.
　また、本発明の第２の態様の揮発性成分含有排ガスの処理方法は、第１の態様の揮発性成分含有排ガスの処理方法において、前記吸引ブロワの前記スピルバック機能が、前記吸引ブロワに圧力コントロール弁を有するバイパス管路を設けることにより付与されたものであることを特徴とする。また、本発明の第３の態様の揮発性成分含有排ガスの処理方法は、第１の態様の揮発性成分含有排ガスの処理方法において、前記吸引ブロワの前記スピルバック機能が、前記吸引ブロワの駆動用モータをインバータモータとし、前記インバータモータの回転数を制御することにより付与されたものであることを特徴とする。 Further, the method for treating a volatile component-containing exhaust gas according to the second aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to the first aspect, wherein the spill-back function of the suction blower has a pressure applied to the suction blower. It is provided by providing a bypass pipe having a control valve. The method for treating volatile component-containing exhaust gas according to a third aspect of the present invention is the method for treating volatile component-containing exhaust gas according to the first aspect, wherein the spill-back function of the suction blower is such that the suction blower is driven. The motor for use is an inverter motor, and is provided by controlling the number of revolutions of the inverter motor.
　本発明の第２及び第３の態様の揮発性成分含有排ガスの処理方法によれば、容易に吸引ブロワの入口側の圧力を予め定めた所定値に維持することができ、製造設備の排ガス管路に過大な圧力が掛からないようにすることができる。 According to the method for treating a volatile component-containing exhaust gas according to the second and third aspects of the present invention, the pressure on the inlet side of the suction blower can be easily maintained at a predetermined value, and the exhaust gas pipe of the manufacturing facility Excessive pressure on the road can be prevented.
　また、本発明の第４の態様の揮発性成分含有排ガスの処理方法は、第１～３のいずれかの態様の揮発性成分含有排ガスの処理方法において、前記パージ排ガスを冷却処理し、この際の未凝縮ガスを前記吸着塔の入口側に戻すことを特徴とする。 Further, the method for treating a volatile component-containing exhaust gas according to a fourth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the first to third aspects, wherein the purged exhaust gas is cooled. Is returned to the inlet side of the adsorption tower.
　本発明の第４の態様の揮発性成分含有処理方法によれば、パージ排ガスの未凝縮ガス中には微量の揮発性成分が含まれているが、この微量の揮発性成分も再度吸着塔を通すことにより回収できるため、揮発性成分含有排ガス中の揮発性成分の回収効率が向上する。 According to the volatile component-containing treatment method of the fourth aspect of the present invention, a trace amount of volatile component is contained in the uncondensed gas of the purge exhaust gas. Since it can be recovered by passing through, the recovery efficiency of the volatile components in the volatile component-containing exhaust gas is improved.
　さらに、本発明の第５の態様の揮発性成分含有排ガスの処理方法は、第１～４のいずれかの態様の揮発性成分含有排ガスの処理方法において、前記揮発性成分を含む排ガスが重合性物質含有排ガスであり、前記吸着剤層がシリカゲル、疎水性シリカゲル又は合成ゼオライトから選択された少なくとも１種を含むことを特徴とする。また、本発明の第６の態様の揮発性成分含有排ガスの処理方法は、第５の態様の揮発性成分含有排ガスの処理方法において、前記重合性物質が、アクリロニトリル、メチルエチルケトン、塩化ビニルモノマー、スチレン、テトラヒドロフランから選択される１種であることを特徴とする。 Further, the method for treating a volatile component-containing exhaust gas according to the fifth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the first to fourth aspects, wherein the exhaust gas containing the volatile component is polymerizable. It is a substance-containing exhaust gas, wherein the adsorbent layer contains at least one selected from silica gel, hydrophobic silica gel, and synthetic zeolite. The method for treating volatile component-containing exhaust gas according to a sixth aspect of the present invention is the method for treating volatile component-containing exhaust gas according to the fifth aspect, wherein the polymerizable substance is acrylonitrile, methyl ethyl ketone, vinyl chloride monomer, styrene. , Tetrahydrofuran.
　本発明の第５及び第６の態様の揮発性成分含有排ガスの処理方法によれば、所定の組成の吸着剤を用いることにより、重合性物質を吸着した際にも吸着熱が少ないばかりか重合反応が進行しないようにできるので、安全にアクリロニトリル、メチルエチルケトン、塩化ビニルモノマー、スチレン、テトラヒドロフラン等の重合性物質を含有する排ガスを浄化し、これらの重合性物質を回収することができるようになる。 According to the method for treating a volatile component-containing exhaust gas according to the fifth and sixth aspects of the present invention, by using an adsorbent having a predetermined composition, not only the heat of adsorption is low even when a polymerizable substance is adsorbed, Since the reaction can be prevented from proceeding, the exhaust gas containing polymerizable substances such as acrylonitrile, methyl ethyl ketone, vinyl chloride monomer, styrene, tetrahydrofuran and the like can be purified and these polymerizable substances can be recovered.
　また、本発明の第７の態様の揮発性成分含有排ガスの処理方法を実施するための装置は、第１～６のいずれかの態様の揮発性成分含有排ガスの処理方法を実施するための装置であって、少なくとも前記複数の吸着塔と、前記スピルバック機能を有する吸引ブロワと、前記排ガスバイパス弁を有する排ガスバイパス管路と、前記流量制御弁及び真空ポンプを有するバイパス管路と、これらの機器の動作を制御するための制御盤とを備え、前記制御盤は、前記制御盤の扉内に取り付けられた外部から視認し得る表示装置と、前記扉の外部から各種パラメータを設定することができるタッチパネルと、を有し、かつ耐圧防爆構造とされていることを特徴とする。 Further, an apparatus for carrying out the method for treating a volatile component-containing exhaust gas according to the seventh aspect of the present invention is an apparatus for carrying out the method for treating a volatile component-containing exhaust gas according to any one of the first to sixth aspects. And at least the plurality of adsorption towers, a suction blower having the spillback function, an exhaust gas bypass line having the exhaust gas bypass valve, a bypass line having the flow control valve and a vacuum pump, and A control panel for controlling the operation of the device, the control panel may be a display device mounted inside a door of the control panel and visible from the outside, and various parameters may be set from outside the door. A touch panel that can be used, and has a pressure-resistant explosion-proof structure.
　一般の制御盤であれば、制御盤内及び制御盤表面にタッチパネルを設置すれば、簡単な操作で各種機器のパラメータを設定できるが、排ガス処理装置で使用する制御盤は、安全のため、耐圧防爆タイプとなる。一般的な耐圧防爆制御盤の扉は２０ｍｍ程度の鉄板製で、さらには多くのボルトで締め付けられているため、扉の開閉には約２０分程度が必要である。また、耐圧防爆制御盤による各種パラメータ変更操作は、防爆指針により、運転中は防爆制御盤の蓋を開放できず、防爆制御盤の蓋を開けるには電源を切断しなければならない等の規制がある。そのため、作動中のパラメータの設定は、その都度非防爆エリアの安全地帯でシーケンサに入力して使用しなければならず、防爆エリアで使用各種パラメータを変更できるようにするには防爆機器仕様の高額なパラメータ入力機器を設置しなければならなかった。 If a general control panel is equipped with a touch panel inside the control panel and on the surface of the control panel, the parameters of various devices can be set with simple operations. Explosion-proof type. The door of a general explosion-proof control panel is made of an iron plate of about 20 mm and is further tightened with many bolts, so that opening and closing of the door requires about 20 minutes. In addition, explosion-proof control panels require that explosion-proof guidelines prevent regulations such as opening the explosion-proof control panel lid during operation and turning off the power to open the explosion-proof control panel lid. is there. For this reason, parameter settings during operation must be entered and used each time in the safety zone of the non-explosion-proof area and used in the explosion-proof area. We had to set up various parameter input devices.
　本発明の第７の態様の揮発性成分含有排ガスの処理方法を実施するための装置によれば、耐圧防爆制御盤の扉内に取り付けられた表示装置が外部から視認でき、しかも耐圧防爆制御盤に扉の外部から各種パラメータを設定することができるタッチパネルを設けたため、扉を開放せずに容易に各種パラメータ入力が可能となるので、より多くの設定を設けて効率のよい排ガス処理ができるようにすることができ、しかも、故障予測などの機能を追加して、より安全な装置とすることができる。 According to the apparatus for carrying out the method for treating a volatile component-containing exhaust gas according to the seventh aspect of the present invention, the display device mounted inside the door of the pressure-resistant explosion-proof control panel can be visually recognized from the outside, and furthermore, the pressure-resistant explosion-proof control panel A touch panel that allows various parameters to be set from outside the door is provided, so that various parameters can be input easily without opening the door, so that more settings can be provided for efficient exhaust gas treatment. In addition, a function such as failure prediction can be added to make the device safer.
　さらに、本発明の第８の態様の揮発性成分含有排ガスの処理方法を実施するための装置は、第７の態様の揮発性成分含有排ガスの処理方法を実施するための装置において、少なくとも前記複数の吸着塔と、前記スピルバック機能を有する吸引ブロワと、前記排ガスバイパス弁を有する排ガスバイパス管路と、前記流量制御弁及び真空ポンプを有するバイパス管路と、前記制御盤とは、防爆エリアに設けられていることを特徴とする。 Further, an apparatus for performing the method for treating a volatile component-containing exhaust gas according to the eighth aspect of the present invention is an apparatus for performing the method for treating a volatile component-containing exhaust gas according to the seventh aspect, wherein The adsorption tower, the suction blower having the spill-back function, the exhaust gas bypass line having the exhaust gas bypass valve, the bypass line having the flow control valve and the vacuum pump, and the control panel, the explosion-proof area It is characterized by being provided.
　本発明の第８の態様の揮発性成分含有排ガスの処理方法を実施するための装置によれば、実質的に全ての作動機器及び制御盤が防爆エリアに設けられているので、安全性が向上に、しかも防爆エリア内で容易に各種パラメータの設定ができるようになる。 According to the apparatus for performing the method for treating a volatile component-containing exhaust gas according to the eighth aspect of the present invention, substantially all the operating devices and the control panel are provided in the explosion-proof area, so that the safety is improved. In addition, various parameters can be easily set in the explosion-proof area.
　また、本発明の第９の態様の揮発性成分含有排ガスの処理方法は、
　吸着と脱着を交互に行う吸着剤層を有する吸着塔を複数用い、前記複数の吸着塔の一つに、揮発性成分を含む排ガスを供給することにより前記吸着塔内の吸着剤層に前記揮発性成分を吸着させ、実質的に前記揮発性成分を含まない排ガスを前記吸着塔の出口から取り出して系外に放出し、その間に、他の吸着塔の少なくとも一つを脱着に切り換えて先に吸着された前記揮発性成分を流量制御弁及び真空ポンプを有するバイパス管路を経てパージ排ガスとして系外に取り出すことからなる揮発性成分含有排ガスの処理方法において、
　予め前記複数の吸着塔のいずれかの内部圧力に基く最適な前記流量制御弁の開度を定めておき、前記複数の吸着塔のいずれかの内部圧力に基いて前記流量制御弁の開度を前記予め定めた設定値となるように制御することを特徴とする。 Further, a method for treating a volatile component-containing exhaust gas according to a ninth aspect of the present invention includes:
A plurality of adsorption towers having an adsorbent layer for alternately performing adsorption and desorption are used, and by supplying exhaust gas containing a volatile component to one of the plurality of adsorption towers, the volatilization is performed on the adsorbent layer in the adsorption tower. The volatile component is adsorbed, and the exhaust gas substantially free of the volatile component is taken out from the outlet of the adsorption tower and discharged out of the system.In the meantime, at least one of the other adsorption towers is switched to desorption, and A method for treating volatile component-containing exhaust gas, comprising removing the adsorbed volatile component out of the system as a purge exhaust gas through a bypass pipe having a flow control valve and a vacuum pump,
The optimal opening degree of the flow control valve based on the internal pressure of any of the plurality of adsorption towers is determined in advance, and the opening degree of the flow control valve is determined based on the internal pressure of any of the plurality of adsorption towers. It is characterized in that control is performed so that the predetermined set value is obtained.
　また、本発明の第１０の態様の揮発性成分含有排ガスの処理方法は、第９の態様の態様の揮発性成分含有排ガスの処理方法において、前記真空ポンプの起動直後の前記流量調節弁の開度を、前記前記複数の吸着塔のいずれかの内部圧力が予め定めた圧力に達するまでは予め定めた一定値に制御し、前記複数の吸着塔のいずれかの内部圧力が予め定めた圧力に達した後は前記流量調節弁の開度を予め定めた所定の増加率で増大させるように制御することを特徴とする。 The method for treating volatile component-containing exhaust gas according to a tenth aspect of the present invention is the method for treating volatile component-containing exhaust gas according to the ninth aspect, wherein the flow control valve is opened immediately after the vacuum pump is started. Degree is controlled to a predetermined constant value until any of the internal pressures of the plurality of adsorption towers reaches a predetermined pressure, and the internal pressure of any of the plurality of adsorption towers becomes a predetermined pressure. After reaching, the opening degree of the flow control valve is controlled to be increased at a predetermined rate of increase.
　一般的な吸着と脱着を交互に行う吸着剤層を有する吸着塔を複数用いた揮発性成分含有排ガスの処理装置における圧力変動幅は、１００ＫＰａＡ（大気圧）～３．３ＫＰａＡ程度である。そのため、脱着工程時の吸着塔内の圧力は、大気圧から３．３ＫＰａＡまで真空ポンプで排気して３．３ＫＰａＡが到達真空度となるが、排気風量は大気圧時点が最大で、真空になるにつれて小さくなる。そこで、脱着工程時は、吸着塔から真空ポンプの間に流量制御弁を設けて真空ポンプによる吸引風量を制御する必要がある。 (4) The pressure fluctuation range of a general treatment device for volatile component-containing exhaust gas using a plurality of adsorption towers having an adsorbent layer that alternately performs adsorption and desorption is about 100 KPaA (atmospheric pressure) to about 3.3 KPaA. Therefore, the pressure in the adsorption tower at the time of the desorption step is evacuated from the atmospheric pressure to 3.3 KPaA by a vacuum pump to reach the ultimate degree of vacuum of 3.3 KPaA. It becomes smaller as it goes. Therefore, at the time of the desorption step, it is necessary to provide a flow control valve between the adsorption tower and the vacuum pump to control the amount of air sucked by the vacuum pump.
　本発明の第９及び１０の態様の揮発性成分含有排ガスの処理方法によれば、流量制御弁による吸引風量制御は、複数の吸着塔のいずれかの内部圧力に基いて流量制御弁の開度を予め定めた設定値となるように制御しているので、真空ポンプの後段に設置している熱交換器や気液分離機の内部流量を望ましい範囲内に保つことができるようになり、フラッディングが生じ難く、また、気液分離機で発生したミストが吸着塔に到達して吸着効果を低下するようなことが抑制され、さらには、真空ポンプが過電流により停止することも少なくなる。なお、複数の吸着塔のいずれかの内部圧力に基く流量制御弁の所定の開度の設定値としては、実験的に適宜に定めればよい。 According to the method for treating a volatile component-containing exhaust gas according to the ninth and tenth aspects of the present invention, the suction air volume control by the flow control valve is performed based on the internal pressure of any of the plurality of adsorption towers. Is controlled so as to be a predetermined value, so that the internal flow rate of the heat exchanger and the gas-liquid separator installed at the subsequent stage of the vacuum pump can be maintained within a desired range, and flooding is performed. And the mist generated in the gas-liquid separator is prevented from reaching the adsorption tower to reduce the adsorption effect, and the vacuum pump is less likely to stop due to overcurrent. Note that the set value of the predetermined opening of the flow control valve based on the internal pressure of any of the plurality of adsorption towers may be appropriately determined experimentally.
　また、本発明の第１１の態様の揮発性成分含有排ガスの処理方法は、第９又は１０の態様の揮発性成分含有排ガスの処理方法において、前記揮発性成分を含む排ガスを供給する管路と前記吸着塔の間に圧力制御弁を設けたことを特徴とする。 Further, the method for treating a volatile component-containing exhaust gas according to an eleventh aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to the ninth or tenth aspect, wherein a pipe for supplying the exhaust gas containing the volatile component is provided. A pressure control valve is provided between the adsorption towers.
　揮発性成分を含む排ガスを供給する管路（製造設備の排ガス管路）の圧力が排ガス処理装置内の圧力損失相当の圧力よりも高い場合には、特に吸引ブロアを設けなくても吸着塔に揮発性成分を含む排ガスを供給することができるようになる。第１１の態様の揮発性成分含有排ガスの処理方法によれば、揮発性成分を含む排ガスを供給する管路の圧力が高い場合には、圧力制御弁を設けるのみで吸着塔に供給される揮発性成分を含む排ガスの圧力を最適な値に維持することができるようになる。なお、係る態様の揮発性成分含有排ガスの処理方法は、製造設備の排ガス管路の圧力が低くてこの製造設備の出口側にブロアが設けられて圧力が高められている場合にも適用可能である。 If the pressure of the pipe that supplies the exhaust gas containing volatile components (exhaust gas pipe of the manufacturing facility) is higher than the pressure corresponding to the pressure loss in the exhaust gas treatment equipment, the adsorption tower can be installed without any suction blower. Exhaust gas containing volatile components can be supplied. According to the method for treating a volatile component-containing exhaust gas of the eleventh aspect, when the pressure of the pipeline for supplying the exhaust gas containing the volatile component is high, only the pressure control valve is provided to supply the volatile component to the adsorption tower. It is possible to maintain the pressure of the exhaust gas containing the acidic component at an optimum value. The method for treating volatile component-containing exhaust gas of this embodiment can be applied to the case where the pressure of the exhaust gas line of the production facility is low and a blower is provided at the outlet side of the production facility to increase the pressure. is there.
　また、本発明の第１２の態様の揮発性成分含有排ガスの処理方法は、第９～第１１のいずれかの態様の揮発性成分含有排ガスの処理方法において、前記吸着塔の出口管路と前記揮発性成分を含む排ガスを供給する管路との間に排ガスバイパス弁を有する排ガスバイパス管路を設け、前記揮発性成分を含む排ガスを供給する管路の圧力が予め定めた所定値を越えた際には、前記排ガスバイパス弁を開状態として前記揮発性成分を含む排ガスを供給する管路を前記吸着塔の出口と直結させることを特徴とする。 The method for treating a volatile component-containing exhaust gas according to a twelfth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the ninth to eleventh aspects, wherein the outlet pipe of the adsorption tower is connected to the exhaust pipe. An exhaust gas bypass pipe having an exhaust gas bypass valve is provided between the pipe and the pipe that supplies the exhaust gas containing volatile components, and the pressure of the pipe that supplies the exhaust gas containing the volatile component exceeds a predetermined value. In this case, the exhaust gas bypass valve is opened, and a pipe for supplying the exhaust gas containing the volatile component is directly connected to an outlet of the adsorption tower.
　第１２の態様の揮発性成分含有排ガスの処理方法によれば、揮発性成分を含む排ガスを供給する管路の圧力が何らかの原因によって急増した場合には、外部に直結して前記揮発性成分を含む排ガスを供給する管路の圧力を逃がすことができるので、製造設備の排ガス管路に過大な圧力が掛からないようにすることができる。 According to the treatment method of the volatile component-containing exhaust gas of the twelfth aspect, when the pressure of the pipeline for supplying the exhaust gas containing the volatile component suddenly increases for some reason, the volatile component is directly connected to the outside to remove the volatile component. Since the pressure of the pipeline for supplying the exhaust gas containing can be released, it is possible to prevent an excessive pressure from being applied to the exhaust gas pipeline of the manufacturing facility.
　また、本発明の第１３の態様の揮発性成分含有排ガスの処理方法は、第９又は１０の態様の揮発性成分含有排ガスの処理方法において、
　前記吸引ブロワとしてスピルバック機能を有するものを用い、
　前記吸着塔の出口管路と前記吸引ブロワの入口側との間に排ガスバイパス弁を有する排ガスバイパス管路を設け、
　前記吸引ブロワの入口側の圧力に応じて前記圧力コントロール弁を作動させて前記吸引ブロワの入口側の圧力を予め定めた所定値となるように制御し、
　前記吸引ブロワの入口側の圧力が前記予め定めた所定値を越えた際には、前記バイパス弁を開状態として前記ブロワの入口側を前記吸着塔の出口と直結させることを特徴とする。 The method for treating a volatile component-containing exhaust gas according to the thirteenth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to the ninth or tenth aspect,
Using a suction blower having a spill-back function,
Providing an exhaust gas bypass pipe having an exhaust gas bypass valve between the outlet pipe of the adsorption tower and the inlet side of the suction blower,
Activating the pressure control valve according to the pressure on the inlet side of the suction blower to control the pressure on the inlet side of the suction blower to be a predetermined value,
When the pressure on the inlet side of the suction blower exceeds the predetermined value, the bypass valve is opened to directly connect the inlet side of the blower to the outlet of the adsorption tower.
　本発明の第１３の態様の揮発性成分含有排ガスの処理方法によれば、第９～１２のいずれかの態様の揮発性成分含有排ガスの処理方法の作用効果だけでなく、少なくとも第１の態様の揮発性成分含有排ガスの処理方法の作用効果をも奏することができるようになる。 According to the method for treating volatile component-containing exhaust gas of the thirteenth aspect of the present invention, not only the operation and effect of the volatile component-containing exhaust gas treatment method of any of the ninth to twelfth aspects, but also at least the first aspect The effect of the method for treating a volatile component-containing exhaust gas described above can also be exerted.
　また、本発明の第１４の態様の揮発性成分含有排ガスの処理方法は、第１３の態様の揮発性成分含有排ガスの処理方法において、前記吸引ブロワの前記スピルバック機能が、前記吸引ブロワに圧力コントロール弁を有するバイパス管路を設けることにより付与されたものであることを特徴とする。さらに、本発明の第１５の態様の揮発性成分含有排ガスの処理方法は、第１３の態様の揮発性成分含有排ガスの処理方法において、前記吸引ブロワの前記スピルバック機能が、前記吸引ブロワの駆動用モータをインバータモータとし、前記インバータモータの回転数を制御することにより付与されたものであることを特徴とする。 The method for treating volatile component-containing exhaust gas according to a fourteenth aspect of the present invention is the method for treating volatile component-containing exhaust gas according to the thirteenth aspect, wherein the spill-back function of the suction blower is such that a pressure is applied to the suction blower. It is provided by providing a bypass pipe having a control valve. Further, in the method for treating a volatile component-containing exhaust gas according to a fifteenth aspect of the present invention, in the method for treating a volatile component-containing exhaust gas according to a thirteenth aspect, the spill-back function of the suction blower may be used to drive the suction blower. The motor for use is an inverter motor, and is provided by controlling the number of revolutions of the inverter motor.
　本発明の第１４及び第１５の態様の揮発性成分含有排ガスの処理方法によれば、容易に吸引ブロワの入口側の圧力を予め定めた所定値に維持することができ、製造設備の排ガス管路に過大な圧力が掛からないようにすることができる。 According to the method for treating exhaust gas containing volatile components according to the fourteenth and fifteenth aspects of the present invention, the pressure on the inlet side of the suction blower can be easily maintained at a predetermined value, and the exhaust gas pipe of the manufacturing equipment Excessive pressure on the road can be prevented.
　また、本発明の第１６の態様の揮発性成分含有排ガスの処理方法は、第９～１５のいずれかの態様の揮発性成分含有排ガスの処理方法において、前記パージ排ガスを冷却処理し、この際の未凝縮ガスを前記吸着装置の入口側に戻すことを特徴とする。 The method for treating a volatile component-containing exhaust gas according to a sixteenth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the ninth to fifteenth aspects, wherein the purged exhaust gas is cooled. Is returned to the inlet side of the adsorption device.
　本発明の第１６の態様の揮発性成分含有排ガスの処理方法によれば、パージ排ガスの未凝縮ガス中には微量の揮発性成分が含まれているが、この微量の揮発性成分も再度吸着塔を通すことにより回収できるため、揮発性成分含有排ガスの揮発性成分回収効率が向上する。 According to the method for treating a volatile component-containing exhaust gas of the sixteenth aspect of the present invention, a trace amount of the volatile component is contained in the uncondensed gas of the purge exhaust gas, and the trace amount of the volatile component is also adsorbed again. Since it can be recovered by passing through a tower, the volatile component recovery efficiency of the volatile component-containing exhaust gas is improved.
　また、本発明の第１７の態様の揮発性成分含有排ガスの処理方法は、第９～１６のいずれか態様の揮発性成分含有排ガスの処理方法において、前記揮発性成分を含む排ガスが重合性物質含有排ガスであり、前記吸着剤層がシリカゲル、疎水性シリカゲル又は合成ゼオライトから選択された少なくとも１種を含むことを特徴とする。 The method for treating a volatile component-containing exhaust gas according to a seventeenth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to any one of the ninth to sixteenth aspects, wherein the exhaust gas containing the volatile component is a polymerizable substance. Exhaust gas, wherein the adsorbent layer contains at least one selected from silica gel, hydrophobic silica gel and synthetic zeolite.
　また、本発明の第１８の態様の揮発性成分含有排ガスの処理方法は、第１７の態様の揮発性成分含有排ガスの処理方法において、前記重合性物質が、アセトン、アクリロニトリル、メチルエチルケトン、塩化ビニルモノマー、スチレン、テトラヒドロフランから選択される１種であることを特徴とする。 The method for treating a volatile component-containing exhaust gas according to an eighteenth aspect of the present invention is the method for treating a volatile component-containing exhaust gas according to the seventeenth aspect, wherein the polymerizable substance is acetone, acrylonitrile, methyl ethyl ketone, a vinyl chloride monomer. , Styrene, and tetrahydrofuran.
　本発明の第１７及び１８の態様の揮発性成分含有排ガスの処理方法によれば、本発明の第５及び第６の態様の揮発性成分含有排ガスの処理方法の場合と同様の作用効果を奏することができるようになる。 According to the method for treating volatile component-containing exhaust gas according to the seventeenth and eighteenth aspects of the present invention, the same function and effect as those of the method for treating volatile component-containing exhaust gas according to the fifth and sixth aspects of the present invention are exerted. Will be able to do it.
　さらに、本発明の第１９の態様の揮発性成分含有排ガスの処理方法を実施するための装置は、第９～１８のいずれかの態様の揮発性成分含有排ガスの処理方法を実施するための装置であって、
　少なくとも前記複数の吸着塔、前記流量制御弁及び真空ポンプを有するバイパス管路、及び、これらの機器の動作を制御するための制御盤を備え、
　前記制御盤は、前記制御盤の扉内に取り付けられた外部から視認し得る表示装置と、前記扉の外部から各種パラメータを設定することができるタッチパネルとを有し、かつ耐圧防爆構造とされていることを特徴とする。 Further, an apparatus for performing the method for treating a volatile component-containing exhaust gas according to the nineteenth aspect of the present invention is an apparatus for performing the method for treating a volatile component-containing exhaust gas according to any one of the ninth to eighteenth aspects. And
At least a plurality of adsorption towers, a bypass pipeline having the flow control valve and a vacuum pump, and a control panel for controlling the operation of these devices,
The control panel has a display device attached to the inside of the door of the control panel, which can be visually recognized from the outside, and a touch panel that can set various parameters from outside the door, and has a flameproof structure. It is characterized by being.
　また、本発明の第２０の態様の揮発性成分含有排ガスの処理方法を実施するための装置は、第１５の態様の揮発性成分含有排ガスの処理方法を実施するための装置において、少なくとも前記複数の吸着塔、前記流量制御弁及び真空ポンプを有するバイパス管路及び前記制御盤は、防爆エリアに設けられていることを特徴とする。 An apparatus for performing the method for treating a volatile component-containing exhaust gas according to a twentieth aspect of the present invention is the apparatus for performing the method for treating a volatile component-containing exhaust gas according to a fifteenth aspect, wherein The bypass tower having the adsorption tower, the flow control valve and the vacuum pump, and the control panel are provided in an explosion-proof area.
　本発明の第１９及び第２０の態様の揮発性成分含有排ガスの処理方法を実施するための装置によれば、それぞれ本発明の第７及び第８の態様の揮発性成分含有排ガスの処理方法を実施するための装置の場合と同様の作用効果を奏することができるようになる。 According to the apparatus for carrying out the method for treating volatile component-containing exhaust gas according to the nineteenth and twentieth aspects of the present invention, the method for treating volatile component-containing exhaust gas according to the seventh and eighth aspects of the present invention is provided. The same operation and effect as in the case of the device for implementing the present invention can be obtained.
　以上述べたように、本発明の揮発性成分排ガス処理方法及び排ガス処理装置によれば、排ガス処理装置を製造設備に組み込む際に、製造設備の排ガス管路の背圧を自動的に所定値以下とするとともに、脱着時の流量制御弁による吸引風量を最適な範囲に保てるようになるので、製造設備に損傷が生じ難い、安全性に優れた吸着法による排ガス処理方法を提供ことができる。 As described above, according to the volatile component exhaust gas treatment method and the exhaust gas treatment apparatus of the present invention, when incorporating the exhaust gas treatment apparatus into the production facility, the back pressure of the exhaust gas pipeline of the production facility is automatically reduced to a predetermined value or less. At the same time, the amount of air suctioned by the flow control valve at the time of desorption can be kept in the optimum range, so that it is possible to provide an exhaust gas treatment method using an adsorption method that is less likely to damage manufacturing equipment and is excellent in safety.
実施形態の揮発性成分含有排ガス処理装置のフローシートである。It is a flow sheet of the volatile component-containing exhaust gas treatment device of the embodiment. 実施形態の揮発性成分含有排ガス処理装置の作動状態を纏めて示す概念図である。FIG. 3 is a conceptual diagram collectively showing an operation state of the volatile component-containing exhaust gas treatment device of the embodiment. 実施形態の揮発性成分含有排ガス処理装置の脱着時の流量制御弁の制御状態を示す図である。It is a figure which shows the control state of the flow control valve at the time of desorption of the volatile component containing exhaust gas processing apparatus of embodiment. 変形例２の揮発性成分含有排ガス処理装置のフローシートである。9 is a flow sheet of a volatile component-containing exhaust gas treatment device of Modification Example 2. 実施形態で使用した耐圧防爆制御盤の平面図である。It is a top view of the pressure-resistant explosion-proof control board used in the embodiment. 従来の揮発性成分含有排ガス処理装置のフローシートである。4 is a flow sheet of a conventional volatile component-containing exhaust gas treatment device.
　本発明の実施形態の揮発性成分含有排ガス処理装置を、図１及び図２を用いて、揮発性成分が揮発性炭化水素（ＶＯＣ）の場合を例にとって説明する。なお、図１は実施形態１の揮発性成分含有排ガス処理装置のフローシートである。図２は実施形態の揮発性成分含有排ガス処理装置の作動状態を纏めて示す概念図である。なお、図１における一点鎖線で挟まれた領域は防爆エリアを示している。 排 ガ ス The volatile component-containing exhaust gas treatment apparatus according to the embodiment of the present invention will be described with reference to FIGS. 1 and 2 by taking a case where the volatile component is a volatile hydrocarbon (VOC) as an example. FIG. 1 is a flow sheet of the exhaust gas treatment apparatus containing a volatile component according to the first embodiment. FIG. 2 is a conceptual diagram collectively showing the operation states of the volatile component-containing exhaust gas treatment apparatus of the embodiment. In FIG. 1, a region sandwiched between alternate long and short dash lines indicates an explosion-proof area.
　本発明の一実施形態の揮発性成分含有排ガス処理装置１０は、図１に示すように、２基の吸着塔１１ａ、１１ｂと、吸引ブロワ１２と、真空ポンプ１３と、熱交換器１４と、気液分離器１５と、回収ポンプ１６とを備えている。このうち、吸着塔１１ａを含む部分がＡ系統を形成し、吸着塔１１ｂを含む領域がＢ系統を形成している。 As shown in FIG. 1, a volatile component-containing exhaust gas treatment apparatus 10 according to one embodiment of the present invention includes two adsorption towers 11a and 11b, a suction blower 12, a vacuum pump 13, a heat exchanger 14, A gas-liquid separator 15 and a recovery pump 16 are provided. Among these, the part including the adsorption tower 11a forms the A system, and the area including the adsorption tower 11b forms the B system.
　２基の吸着塔１１ａ、１１ｂ内にはそれぞれ同一の吸着材１７ａ、１７ｂが配置されている。これらの吸着剤１７ａ、１７ｂは、それぞれ揮発性成分や排ガスの種類によって最適なものが選択される。例えば、揮発性成分が重合性成分を含まないＶＯＣである場合、吸着剤としては、予め揮発性成分をプレコートしたメソポアー（２０～４０Å程度）からなる難燃性の活性炭、同様にプレコートしたシリカゲルないし合成ゼオライトを使用することができる。これらの吸着剤１７ａ、１７ｂは、単一層のものであっても、複数層に分かれているものであってもよく、複数層に分かれているものではそれぞれ異なる種類の吸着剤からなるものも採用することができる。なお、揮発性成分が重合性成分を含む場合は、吸着時に重合体が生じないようにするため、シリカゲル、疎水性シリカゲル又は合成ゼオライト～選択された少なくとも1種を用いる。 #The same adsorbents 17a and 17b are disposed in the two adsorption towers 11a and 11b, respectively. Optimum ones of these adsorbents 17a and 17b are selected depending on the types of volatile components and exhaust gas. For example, when the volatile component is a VOC containing no polymerizable component, the adsorbent may be a flame-retardant activated carbon made of mesopores (about 20 to 40 °) pre-coated with a volatile component, a silica gel pre-coated similarly. Synthetic zeolites can be used. These adsorbents 17a and 17b may be of a single layer or of a plurality of layers. In the case of a plurality of layers, those composed of different types of adsorbents may be employed. can do. When the volatile component contains a polymerizable component, at least one selected from silica gel, hydrophobic silica gel, and synthetic zeolite is used in order to prevent the formation of a polymer upon adsorption.
　図示省略した製造設備からの揮発性成分含有排ガスは、排ガス導入管路１８を介して吸引ブロワ１２の入口側１２ａに供給され、吸引ブロワ１２の出口側１２ｂは２分され、それぞれ管路１９ａ、１９ｂ、自動開閉弁２０ａ、２０ｂを介して吸着塔１１ａ、１１ｂの下部の入口側に接続されている。また、吸着塔１１ａ、１１ｂの上部の出口側はそれぞれ管路２１ａ、２１ｂ及び自動開閉弁２２ａ、２２ｂを介して合流され、大気放出管路２３を介して図示省略した大気中への放出路へ接続されている。また、系外からのパージガス（例えば空気）は、パージガス供給管路２４及び自動開閉弁２５を介して２分され、それぞれ自動開閉弁２６ａ、２６ｂ及び管路２７ａ、２７ｂを介して吸着塔１１ａ、１１ｂの出口側の管路２１ａ、２１ｂに接続されている。 The volatile component-containing exhaust gas from the manufacturing equipment not shown is supplied to the inlet side 12a of the suction blower 12 via the exhaust gas introduction line 18, and the outlet side 12b of the suction blower 12 is divided into two, and each of the lines 19a, 19b, it is connected to the lower inlet side of the adsorption towers 11a and 11b via automatic open / close valves 20a and 20b. The upper outlet sides of the adsorption towers 11a and 11b are joined via pipes 21a and 21b and automatic opening / closing valves 22a and 22b, respectively, and are connected to a discharge path to the atmosphere (not shown) via an air discharge pipe 23. It is connected. Further, a purge gas (for example, air) from the outside of the system is divided into two parts via a purge gas supply pipe 24 and an automatic opening / closing valve 25, and the adsorption tower 11a and the adsorption tower 11a via automatic opening / closing valves 26a and 26b and pipes 27a and 27b, respectively. It is connected to conduits 21a, 21b on the outlet side of 11b.
　また、吸着塔１１ａ、１１ｂの下部の入口側には、それぞれ脱着回収管路２８ａ、２８ｂ及び自動開閉弁２９ａ、２９ｂを介して合流され、流量制御弁３０を介して真空ポンプ１３の入口側に接続されている。真空ポンプ１３の出口側は、チェッキ弁(逆止弁）３１、熱交換器１４、管路３２を経て気液分離器１５の入口側に接続されている。気液分離器１５の下部の液体出口側は、管路３３、仕切バルブ３４を経て回収ポンプ１６の入口側に接続されている。回収ポンプ１６の出口側は、自動開閉弁３５、ＶＯＣ回収管路３６を介して、液化されたＶＯＣを系外へ取り出すようになっている。 Also, the lower inlet sides of the adsorption towers 11a, 11b are joined via desorption / recovery pipes 28a, 28b and automatic opening / closing valves 29a, 29b, respectively, and are connected to the inlet side of the vacuum pump 13 via a flow control valve 30. It is connected. The outlet side of the vacuum pump 13 is connected to the inlet side of the gas-liquid separator 15 via a check valve (check valve) 31, a heat exchanger 14, and a pipe 32. The liquid outlet side at the lower part of the gas-liquid separator 15 is connected to the inlet side of the recovery pump 16 via a pipe 33 and a partition valve 34. The outlet side of the recovery pump 16 is configured to take out the liquefied VOC out of the system through an automatic opening / closing valve 35 and a VOC recovery pipe 36.
　また、気液分離器１５の出口側は、管路３７を経て吸引ブロワ１２の出口側に接続されており、気液分離器１５で液化回収されなかったＶＯＣを含むパージガスは、管路１９ａ、１９ｂ及び自動開閉弁２０ａ、２０ｂを経て吸着塔１１ａ、１１ｂの入口側に導入されるようになっている。 Further, the outlet side of the gas-liquid separator 15 is connected to the outlet side of the suction blower 12 via a pipe 37, and the purge gas containing VOC not liquefied and collected by the gas-liquid separator 15 is supplied through a pipe 19a, The gas is introduced to the inlet side of the adsorption towers 11a and 11b through the 19b and the automatic opening and closing valves 20a and 20b.
　さらに、吸引ブロワ１２の出口側と入口側とは、バイパス管路４０によって接続されており、バイパス管路４０の途中には圧力調節弁からなるバイパス弁４１が設けられている。このバイパス管路４０とバイパス弁４１とが本発明のスピルバック機能を形成する。また、排ガス導入管路１８と大気放出管路２３との間には排ガスバイパス管路４２が設けられており、この排ガスバイパス管路４３の途中には排ガスバイパス弁４３が設けられている。また、吸引ブロワ１２の入口側には吸引ブロワの入口側の圧力を測定する圧力センサ４４が設けられており、この圧力センサ４４の出力によりバイパス弁４１及び排ガスバイパス弁４３が制御されるようになっている。なお、排ガス圧力が異常に上昇することがない場合には、バイパス管路４０及びバイパス弁４１を省略することも可能である。 Furthermore, the outlet side and the inlet side of the suction blower 12 are connected by a bypass pipe 40, and a bypass valve 41 composed of a pressure control valve is provided in the middle of the bypass pipe 40. The bypass line 40 and the bypass valve 41 form the spill-back function of the present invention. An exhaust gas bypass pipe 42 is provided between the exhaust gas introduction pipe 18 and the atmosphere discharge pipe 23, and an exhaust gas bypass valve 43 is provided in the exhaust gas bypass pipe 43. Further, a pressure sensor 44 for measuring the pressure on the inlet side of the suction blower is provided on the inlet side of the suction blower 12, and the output of the pressure sensor 44 controls the bypass valve 41 and the exhaust gas bypass valve 43. Has become. If the exhaust gas pressure does not rise abnormally, the bypass pipe 40 and the bypass valve 41 can be omitted.
　以下において、図１に示した揮発性成分含有排ガス処理装置１０の動作を説明する。まず、Ａ系統は吸着操作が、Ｂ系統は脱着操作が、それぞれ行われているものとする。このとき、吸着塔１１ａに連なる自動開閉弁２０ａ及び２２ａは開となっており、同じく自動開閉弁２６ａ及び２９ａは閉となっている。また、吸着塔１１ｂに連なる自動開閉弁２０ｂ及び２２ｂは閉となっており、自動開閉弁２６ｂ及び２９ｂは開となっている。 Hereinafter, the operation of the volatile component-containing exhaust gas treatment apparatus 10 shown in FIG. 1 will be described. First, it is assumed that the adsorption operation is performed in the system A and the desorption operation is performed in the system B. At this time, the automatic open / close valves 20a and 22a connected to the adsorption tower 11a are open, and the automatic open / close valves 26a and 29a are also closed. Further, the automatic open / close valves 20b and 22b connected to the adsorption tower 11b are closed, and the automatic open / close valves 26b and 29b are open.
　さらに、排ガスバイパス管路４０に設けられている排ガスバイパス弁４３は閉となっており、また、吸引ブロワ１２に並列に設けられているバイパス管路４０の圧力コントロール弁４１は所定の開度で開となっており、吸引ブロワ１２の入口側１２ａの圧力は所定の圧力（背圧）に維持されているものとする。 Further, the exhaust gas bypass valve 43 provided in the exhaust gas bypass pipe 40 is closed, and the pressure control valve 41 of the bypass pipe 40 provided in parallel with the suction blower 12 has a predetermined opening degree. It is assumed that it is open and the pressure on the inlet side 12a of the suction blower 12 is maintained at a predetermined pressure (back pressure).
　製造設備から導入された揮発性成分としてのＶＯＣ含有排ガスは、排ガス導入管路１８を経て吸引ブロワ１２により吸引され、管路１９ａ、自動開閉弁２０ａを経て吸着塔１１ａに導入される。そして、吸着塔１１ａでＶＯＣが吸着剤１７ａに吸着・除去され、清浄化された排ガスは管路２１ａ、自動開閉弁２２ａ及び大気放出管路２３を経て、大気中へ放出される。 The VOC-containing exhaust gas as a volatile component introduced from the manufacturing facility is sucked by the suction blower 12 through the exhaust gas introduction line 18, and is introduced into the adsorption tower 11a through the line 19a and the automatic opening / closing valve 20a. Then, the VOC is adsorbed and removed by the adsorbent 17a in the adsorption tower 11a, and the purified exhaust gas is discharged into the atmosphere via the pipe 21a, the automatic on-off valve 22a, and the air discharge pipe 23.
　その間にパージガス供給管路２４から供給された空気等のパージガスは、自動開閉弁２５及び２６ｂを経て吸着塔１１ｂに導入され、吸着剤１７ｂに吸着されていたＶＯＣは脱着され、パージガスとともに脱着回収管路２８ｂ、自動開閉弁２９ｂ、流量制御弁３０を経て真空ポンプ１３により吸引される。真空ポンプ１３の出口から排気されたＶＯＣを含むパージガスは、熱交換器１４で冷却されてＶＯＣが液化され、管路３２を介して気液分離器１５に導入される。気液分離器１５で分離された液化されたＶＯＣは、管路３３、仕切バルブ３４、回収ポンプ１６、自動開閉弁３５及びＶＯＣ回収管路３６を介して系外においてＶＯＣが回収される。 During that time, the purge gas such as air supplied from the purge gas supply pipe 24 is introduced into the adsorption tower 11b through the automatic opening / closing valves 25 and 26b, and the VOC adsorbed by the adsorbent 17b is desorbed, and the desorption recovery pipe is purged together with the purge gas. The air is sucked by the vacuum pump 13 through the passage 28b, the automatic opening / closing valve 29b, and the flow control valve 30. The purge gas containing VOC exhausted from the outlet of the vacuum pump 13 is cooled by the heat exchanger 14 to liquefy the VOC, and is introduced into the gas-liquid separator 15 via the pipe 32. The liquefied VOC separated by the gas-liquid separator 15 is recovered outside the system via a pipe 33, a partition valve 34, a recovery pump 16, an automatic on-off valve 35, and a VOC recovery pipe 36.
　一方、気液分離器１５で吸着されなかったＶＯＣを含むパージガスは、管路３７、管路１９ａ、自動開閉弁２０ａを介して製造設備から導入されたＶＯＣ含有排ガスとともに吸着塔１１ａに導入され、清浄化され、大気放出管路２３を経て大気中へ放出される。 On the other hand, the purge gas containing VOC that has not been adsorbed by the gas-liquid separator 15 is introduced into the adsorption tower 11a together with the VOC-containing exhaust gas introduced from the manufacturing facility via the pipe 37, the pipe 19a, and the automatic on-off valve 20a. It is cleaned and released into the atmosphere via the atmosphere discharge pipe 23.
　予め定めた所定時間、吸着塔１１ａでの吸着操作が行われた後、所定の休止時間後に、Ａ系統とＢ系統とが互いに逆の操作を行うように切り替えられる。すなわち、Ａ系統は脱着操作が、Ｂ系統は吸着操作が、それぞれ行われるようになる。このとき、吸着塔１１ａに連なる自動開閉弁２０ａ及び２２ａは閉とされ、同じく自動開閉弁２６ａ及び２９ａは開とされる。また、吸着塔１１ｂに連なる自動開閉弁２０ｂ及び２２ｂは開とされ、自動開閉弁２６ｂ及び２９ｂは閉とされる。 (4) After the adsorption operation in the adsorption tower 11a is performed for a predetermined period of time, the system A and the system B are switched to perform operations opposite to each other after a predetermined pause time. That is, the desorption operation is performed in the A system, and the adsorption operation is performed in the B system. At this time, the automatic open / close valves 20a and 22a connected to the adsorption tower 11a are closed, and the automatic open / close valves 26a and 29a are also opened. The automatic opening / closing valves 20b and 22b connected to the adsorption tower 11b are opened, and the automatic opening / closing valves 26b and 29b are closed.
　この実施形態の揮発性成分含有排ガス処理装置１０では、所定の時間間隔でＡ系統及びＢ系統の動作が切り替えられ、実質的に連続して製造設備から導入された揮発性成分としてのＶＯＣ含有排ガスが清浄化されて大気中へ放出されるとともに、液化されたＶＯＣが回収される。このような実施形態の揮発性成分含有排ガス処理装置１０の作動状態を纏めて図２に示した。 In the volatile component-containing exhaust gas treatment apparatus 10 of this embodiment, the operations of the A system and the B system are switched at predetermined time intervals, and the VOC-containing exhaust gas as a volatile component introduced from the manufacturing equipment substantially continuously. Is released to the atmosphere and liquefied VOCs are collected. FIG. 2 shows the operating states of the volatile component-containing exhaust gas treatment apparatus 10 of such an embodiment.
　なお、排ガスバイパス管路４０に設けられている排ガスバイパス弁４３及び吸引ブロワ１２に並列に設けられているバイパス管路４０の圧力コントロール弁４１は先の場合と同様に維持されており、吸引ブロワ１２の入口側１２ａの圧力は所定の圧力（背圧）に維持されている。 The exhaust gas bypass valve 43 provided in the exhaust gas bypass line 40 and the pressure control valve 41 of the bypass line 40 provided in parallel with the suction blower 12 are maintained in the same manner as in the previous case. The pressure on the inlet side 12a of 12 is maintained at a predetermined pressure (back pressure).
　この実施形態の揮発性成分含有排ガス処理装置１０では、製造設備の排ガス管路は吸引ブロワ１２の入口側１２ａに接続されているので、この吸引ブロア１２の入口側１２ａの圧力が背圧として製造設備に印加されることになる。そこで、吸引ブロア１２の入口側１２ａの圧力を圧力センサ４４で測定し、測定された圧力が予め定めた所定の圧力となるように排ガスバイパス管路４０に設けられたバイパス弁４１の開度を調節して測定された圧力が予め定めた所定の圧力の範囲内となるようにしている。 In the exhaust gas treatment apparatus 10 containing volatile components of this embodiment, since the exhaust gas line of the manufacturing equipment is connected to the inlet side 12a of the suction blower 12, the pressure at the inlet side 12a of the suction blower 12 is set as the back pressure. Will be applied to the equipment. Therefore, the pressure on the inlet side 12a of the suction blower 12 is measured by the pressure sensor 44, and the opening degree of the bypass valve 41 provided in the exhaust gas bypass pipe 40 is adjusted so that the measured pressure becomes a predetermined pressure. The pressure measured by the adjustment is set to be within a predetermined pressure range.
　このような構成を採用すると、実質的に製造設備の排ガス管に掛かる背圧を予め定めた一定の圧力に制御することができるようになるので、製造設備の排ガス管路に過大な圧力が掛からなくなる。加えて、吸引ブロア１２の入口側１２ａの圧力が予め定めた所定の圧力を超えて増大する場合には、圧力センサ４４の出力に基づいてバイパス管路バイパス弁が開き、吸引ブロワ１２の入口側１２ａが吸着塔１１ａ、１１ｂの出口と直結されるため、に製造設備からのＶＯＣ含有排ガスはそのまま大気中に放出される。これにより、吸引ブロワ１２の入口側１２ａの圧力が、大気圧近くまで落ちるので、製造設備の排ガス管路に過大な背圧が掛かることがなくなる。なお、排ガス処理装置内の排ガス処理装置内の圧力損失は、装置規模にもよるが、およそ１ＫＰａＧ～３ＫＰａＧ程度で、これにより配管サイズ及び吸着塔サイズが決定される。また、製造設備からの排ガス許容圧損は、大気圧～０．５ＫＰａＧ程度である。 By adopting such a configuration, it becomes possible to control the back pressure applied to the exhaust gas pipe of the manufacturing facility substantially to a predetermined constant pressure, so that excessive pressure is applied to the exhaust gas pipe of the manufacturing facility. Disappears. In addition, when the pressure on the inlet side 12a of the suction blower 12 increases beyond a predetermined pressure, the bypass pipe bypass valve opens based on the output of the pressure sensor 44, and the inlet side of the suction blower 12 is opened. Since 12a is directly connected to the outlets of the adsorption towers 11a and 11b, the VOC-containing exhaust gas from the production facility is released to the atmosphere as it is. As a result, the pressure on the inlet side 12a of the suction blower 12 drops to near atmospheric pressure, so that no excessive back pressure is applied to the exhaust gas line of the manufacturing equipment. The pressure loss in the exhaust gas treatment device in the exhaust gas treatment device is about 1 KPaG to 3 KPaG, depending on the scale of the device, and the size of the pipe and the size of the adsorption tower are determined by this. Further, the allowable pressure loss of the exhaust gas from the manufacturing equipment is about atmospheric pressure to about 0.5 KPaG.
　上記実施形態では、揮発性成分含有排ガスとしてＶＯＣ含有排ガスの場合を例にとって説明したが、ＶＯＣ含有排ガスとしては、製油所、化学品貯蔵基地等におけるＶＯＣ含有排ガスだけでなく、各種製品製造工場、リサイクル工場、製薬会社、電気・半導体メーカー等におけるＶＯＣ、各種溶剤、各種揮発性成分等の含有排ガス、化学工場の不活性ガス含有排ガス等に対しても適用可能である。また、揮発性成分含有排ガスとして重合性成分を含むＶＯＣ含有排ガスの場合は、吸着剤１７ａ，１７ｂとしてシリカゲル、疎水性シリカゲル又は合成ゼオライトから選択された少なくとも１種を含むものを用いれば、吸着及び脱着時時に重合性成分を重合させることなく吸着及び脱着させることができるので、上記のＶＯＣ含有排ガスの場合と同様に処理が可能となる。 In the above embodiment, the case where the volatile component-containing exhaust gas is a VOC-containing exhaust gas has been described as an example. However, as the VOC-containing exhaust gas, not only a VOC-containing exhaust gas at a refinery, a chemical storage base, and the like, but also various product manufacturing plants, The present invention is also applicable to exhaust gas containing VOCs, various solvents, various volatile components, etc. in recycling plants, pharmaceutical companies, electric / semiconductor manufacturers, etc., and exhaust gas containing inert gas in chemical plants. Further, in the case of a VOC-containing exhaust gas containing a polymerizable component as the volatile component-containing exhaust gas, if the adsorbents 17a and 17b contain at least one selected from silica gel, hydrophobic silica gel, or synthetic zeolite, the adsorption and the absorption can be achieved. At the time of desorption, the polymerizable component can be adsorbed and desorbed without being polymerized, so that treatment can be performed in the same manner as in the case of the VOC-containing exhaust gas.
　ここで、図３を用いて脱着時の流量制御弁３０による真空ポンプ１３の吸引流量制御について説明する。なお、図３は、実施形態の揮発性成分含有排ガス処理装置１０の脱着時の流量制御弁３０の制御状態を示す図である。 Here, the suction flow rate control of the vacuum pump 13 by the flow rate control valve 30 during desorption will be described with reference to FIG. FIG. 3 is a diagram showing a control state of the flow control valve 30 when the volatile component-containing exhaust gas treatment device 10 of the embodiment is desorbed.
　吸着塔１１ａ、１１ｂを真空排気する場合は、大気圧から３．３ＫＰａＡを真空ポンプで排気して３．３ＫＰａＡが到達真空度となる。真空ポンプの排気量は、大気圧時点で最大となり、真空になるにつれて小さくなる。そこで、真空ポンプ１３の入口側にある流量制御弁３０によって排気流量を制御する必要がある。その理由は、真空ポンプ１３の排気流量が増えた場合、後段の熱交換器１４、気液分離機１５内の線速が増え、最悪フラッディングを発生することがあるからである。 (4) When the adsorption towers 11a and 11b are evacuated to vacuum, 3.3 KPaA is evacuated from the atmospheric pressure by a vacuum pump, and the ultimate vacuum degree is 3.3 KPaA. The displacement of the vacuum pump becomes maximum at the time of the atmospheric pressure, and becomes smaller as the pressure becomes vacuum. Therefore, it is necessary to control the exhaust flow rate by the flow control valve 30 on the inlet side of the vacuum pump 13. The reason is that, when the exhaust flow rate of the vacuum pump 13 increases, the linear velocity in the heat exchanger 14 and the gas-liquid separator 15 at the subsequent stage increases, and in the worst case flooding may occur.
　従来の脱着時の排気流量の制御は、圧力スイッチないし圧力センサからの信号に追従した開閉方式であったが、排気流量によっては圧力調整が一定でないため、設定が難しく、最悪は真空ポンプの過電流異常によるシステムダウン等が発生していた。圧力センサからの信号の追従で弁開度を開放する方法もあるが、ガス濃度の変化等もあるので調整が困難である。そこで、実施形態の実施形態の揮発性成分含有排ガス処理装置１０では、吸着塔１１ａ、１１ｂ内の圧力センサ４４ａ、４４ｂからの信号での流量制御弁３０の開度制御を行い、流量制御弁３０の開度を例えば３段など数段の開度設定を設けることで、円滑な真空ポンプ１３の排気量調整を行うことができるようにし、真空ポンプ１３に負荷がかからない運転制御を可能とした。図３に示したそれぞれの制御開始ポイントの圧力α、β、γ及びδは、吸着剤の離脱性能に基いて実績値を基にして決定し、初期設定時の入力操作を終えれば、その後に数値を変更する必要はなくなる。 Conventionally, the exhaust flow rate at the time of desorption is controlled by an opening and closing method that follows a signal from a pressure switch or a pressure sensor.However, since the pressure adjustment is not constant depending on the exhaust flow rate, it is difficult to set, and in the worst case, the vacuum pump The system went down due to abnormal current. There is also a method of opening the valve opening by following a signal from the pressure sensor, but it is difficult to adjust the valve opening due to a change in gas concentration or the like. Therefore, in the volatile component-containing exhaust gas treatment apparatus 10 according to the embodiment of the embodiment, the opening degree of the flow control valve 30 is controlled by a signal from the pressure sensors 44a and 44b in the adsorption towers 11a and 11b, and the flow control valve 30 is controlled. By setting the opening of the vacuum pump 13 at several stages, for example, three stages, the displacement of the vacuum pump 13 can be smoothly adjusted, and the operation control without applying a load to the vacuum pump 13 is enabled. The pressures α, β, γ, and δ at the respective control start points shown in FIG. 3 are determined based on the actual values based on the desorbing performance of the adsorbent, and after the input operation at the time of the initial setting is completed, There is no need to change the numerical values.
　まず、脱着工程開始時の状態は、吸引開始時の状態はいずれの脱着工程時であっても実施的に一定であるので、流量制御弁３０を予め定めた所定の開度、例えば約２０％として真空ポンプ１３により脱着を行っていく。時間の経過に伴って吸着塔１１ａ、１１ｂ内の圧力は低下していくが、この圧力が予め定めた第１の設定値αに達したとき、流量制御弁３０の開度を一定速度、例えば０．２％／秒ずつ増大させていく。この場合は、時間の経過に伴って流量制御弁３０の開度が増大していくとともに吸着塔１１ａ、１１ｂ内の圧力も低下していく。さらに吸着塔１１ａ、１１ｂ内の圧力が予め定めた第２の設定値βに達したとき、流量制御弁３０の開度を別の一定速度、例えば０．１％／秒ずつ増大させていく。この場合も、時間の経過に伴って流量制御弁３０の開度が増大していくとともに吸着塔１１ａ、１１ｂ内の圧力も低下していく。 First, since the state at the start of the desorption step is practically constant regardless of the desorption step at the start of the suction step, the flow control valve 30 is set to a predetermined opening degree, for example, about 20%. The desorption is performed by the vacuum pump 13. As the time elapses, the pressure in the adsorption towers 11a and 11b decreases, but when this pressure reaches a predetermined first set value α, the opening of the flow control valve 30 is changed to a constant speed, for example. Increase by 0.2% / sec. In this case, as the time elapses, the opening of the flow control valve 30 increases and the pressure in the adsorption towers 11a and 11b also decreases. Further, when the pressure in the adsorption towers 11a and 11b reaches the second predetermined value β, the opening of the flow control valve 30 is increased at another constant speed, for example, 0.1% / sec. Also in this case, as the time elapses, the opening of the flow control valve 30 increases and the pressure in the adsorption towers 11a and 11b also decreases.
　さらに、吸着塔１１ａ、１１ｂ内の圧力が予め定めた第３の設定値γに達したとき、流量制御弁３０の開度を別の一定速度、例えば０．１５％／秒ずつ増大させていき、時間の経過に伴って流量制御弁３０の開度が増大していくとともに吸着塔１１ａ、１１ｂ内の圧力も低下して予め定めた第４の設定値δに達したとき、流量制御弁３０を全開とする。このときは、吸着塔１１ａ、１１ｂ内の圧力は実質的に真空に近い状態となっているので、流量制御弁３０を全開としても大きな流量変化は生じない。 Further, when the pressure in the adsorption towers 11a and 11b reaches a third predetermined value γ, the opening of the flow control valve 30 is increased at another constant speed, for example, 0.15% / sec. When the opening degree of the flow control valve 30 increases with the passage of time and the pressure in the adsorption towers 11a and 11b also decreases to reach a predetermined fourth set value δ, the flow control valve 30 Is fully opened. At this time, since the pressures in the adsorption towers 11a and 11b are substantially close to a vacuum, even when the flow control valve 30 is fully opened, a large change in flow does not occur.
　このように吸着塔１１ａ、１１ｂ内の圧力に応じて流量制御弁３０の開度を一定速度で増大させると、真空ポンプ１３に過大な負荷が掛からなくなり、真空ポンプが過電流停止することもなくなるだけでなく、真空ポンプ１３の後段に設置している熱交換器１４及び気液分離器内の流量も良好な性能を奏する範囲に維持できるので、良好な脱着効率が得られるようになる。なお、流量制御弁３０の開度、制御時間ないし圧力の設定値は、予め実験的に最適な値を求めておけばよい。 When the opening of the flow control valve 30 is increased at a constant speed in accordance with the pressure in the adsorption towers 11a and 11b in this manner, an excessive load is not applied to the vacuum pump 13 and the vacuum pump does not stop overcurrent. Not only that, the flow rates in the heat exchanger 14 and the gas-liquid separator provided downstream of the vacuum pump 13 can be maintained in a range where good performance is achieved, so that good desorption efficiency can be obtained. The opening, the control time, or the set value of the pressure of the flow control valve 30 may be experimentally determined to be optimal in advance.
［耐圧防爆制御盤］
　ここで、実施形態の揮発性成分含有排ガス処理装置で使用した耐圧防爆制御盤５０の概略構成について図５を用いて説明する。なお、図５は実施形態で使用した耐圧防爆制御盤の平面図である。なお、本発明おいては耐圧防爆制御盤を使用することは必ずしも必要な構成ではなく、非防爆区域に設ける場合は耐圧防爆型ではない通常の制御盤を使用することができる。 [Explosion-proof control panel]
Here, a schematic configuration of the pressure-resistant explosion-proof control panel 50 used in the volatile component-containing exhaust gas treatment apparatus of the embodiment will be described with reference to FIG. FIG. 5 is a plan view of the pressure-resistant explosion-proof control panel used in the embodiment. In the present invention, it is not always necessary to use a pressure-resistant explosion-proof control panel. When the control panel is provided in a non-explosion-proof area, an ordinary non-explosion-proof control panel can be used.
　この耐圧防爆制御盤は、耐圧ケース５１に扉５２が開閉可能に取り付けられており、ケース５１及び扉ともに約２０ｍｍ厚の鉄板製であって、使用時には扉５２の周囲が多数のボルト５３によって密閉された状態で使用される。そのため、扉５２の開閉には約２０分程度必要となる。また、扉５２の内部には各種操作スイッチ５４が設けられており、これらの操作スイッチ５４の設定状態は扉５２に設けられた窓５５を介して外部から視認できるようになっている。なお、窓５５には耐圧ガラスがはめ込まれている。 In this explosion-proof control panel, a door 52 is attached to a pressure-resistant case 51 so as to be openable and closable. Both the case 51 and the door are made of an iron plate having a thickness of about 20 mm. Used in the state that was done. Therefore, opening and closing the door 52 requires about 20 minutes. Various operation switches 54 are provided inside the door 52, and the setting state of these operation switches 54 can be visually recognized from the outside via a window 55 provided on the door 52. The window 55 is fitted with pressure-resistant glass.
　さらに、耐圧防爆制御盤５０の内部には、液晶表示パネル等の表示部５６と、複数、例えば５個のタッチパネル５７とが設けられており、これらの表示部５６及びタッチパネル５７の表面も耐圧ガラスで覆われており、表示部５６及びタッチパネル５７ともに外部には露出していない。このタッチパネル５７により、扉５２の外部から各種パラメータを設定することができるようになっており、設定した各種パラメータは表示部５６によって確認できるようになっている。 Further, a display unit 56 such as a liquid crystal display panel and a plurality of, for example, five touch panels 57 are provided inside the explosion-proof control panel 50. The surfaces of these display units 56 and the touch panel 57 are also made of pressure-resistant glass. , And neither the display unit 56 nor the touch panel 57 is exposed to the outside. The touch panel 57 allows various parameters to be set from outside the door 52, and the set various parameters can be confirmed on the display unit 56.
　従来の耐圧防爆制御盤による各種パラメータ変更操作は、防爆指針により、運転中は防爆制御盤の蓋を開放できず、防爆制御盤の蓋を開けるには電源を切断しなければならない等の規制があった。しかしながら、実施形態の揮発性成分含有排ガス処理装置で使用した耐圧防爆制御盤５０によれば、扉５２を開放せずに容易に各種パラメータ入力が可能となるので、より多くの設定を設けて効率のよい排ガス処理ができるようにすることができ、しかも、故障予測などの機能を追加して、より安全な揮発性成分含有排ガス処理装置とすることができる The operation of changing various parameters using the conventional explosion-proof control panel is restricted by the explosion-proof guidelines, such as that the lid of the explosion-proof control panel cannot be opened during operation and the power must be turned off to open the lid of the explosion-proof control panel. there were. However, according to the pressure-resistant explosion-proof control panel 50 used in the volatile component-containing exhaust gas treatment apparatus of the embodiment, various parameters can be easily input without opening the door 52. It is possible to perform good exhaust gas treatment, and it is possible to add a function such as failure prediction to provide a safer exhaust gas treatment device containing volatile components.
［変形例１］
　上記の実施形態では、吸引ブロア１２のスピルバック機能として吸引ブロア１２に並列に設けられた排ガスバイパス管路４０と、この排ガスバイパス管路４０に設けられたバイパス弁４１とからなるものを用いた例を示したが、これに限らず吸引ブロア１２として吸引ブロワ１２の駆動用モータ(図示せず）をインバータモータとし、このインバータモータの回転数を制御することにより吸引ブロア１２にスピルバック機能を与えることもできる。この場合は、吸引ブロア１２の入口側１２ａに設けられた圧力センサ４４で検出された圧力が予め定めた所定の範囲内となるようにインバータ信号（４～２０ｍＡ）をコントロールしてインバータモータの回転数を制御すればよい。ただし、このようなインバータモータを備えたＶＯＣ等の実施形態の揮発性成分含有排ガス処理装置１０を日本国内で用いるには、防爆エリアで使用するインバータモータとインバータとについて同一の防爆検定を受ける必要があるが、外国向けはこのような規制がないために不要である。そこで、この変形例の構成を採用するかどうかは、経済性をも考慮する必要がある。 [Modification 1]
In the above embodiment, the spill-back function of the suction blower 12 includes the exhaust gas bypass pipe 40 provided in parallel with the suction blower 12 and the bypass valve 41 provided in the exhaust gas bypass pipe 40. Although an example is shown, the drive motor (not shown) of the suction blower 12 is used as an inverter motor as the suction blower 12, and the spill-back function is provided to the suction blower 12 by controlling the rotation speed of the inverter motor. Can also be given. In this case, the inverter signal (4 to 20 mA) is controlled so that the pressure detected by the pressure sensor 44 provided on the inlet side 12a of the suction blower 12 falls within a predetermined range. You only need to control the number. However, in order to use the volatile component-containing exhaust gas treatment apparatus 10 of the embodiment such as the VOC equipped with such an inverter motor in Japan, it is necessary to receive the same explosion-proof test for the inverter motor and the inverter used in the explosion-proof area. There is, however, no need for exports to foreign countries because there are no such regulations. Therefore, whether to adopt the configuration of this modified example also needs to consider economics.
［変形例２］
　上記の実施形態では、揮発性成分を含む排ガスを供給する排ガス導入管路１８と吸着塔１１ａ、１１ｂとの間にスピルバック機能を有する吸引ブロア１２を設けた例を示したが、製造設備の排ガス管路内の排ガスの圧力が高くて排ガス導入管路１８内の圧力が吸着塔１１ａ、１１ｂを含む揮発性成分含有排ガス処理装置内の圧力損失相当の圧力よりも高い場合には、特に吸引ブロア１２を設けなくても吸着塔に揮発性成分を含む排ガスを供給することができる。例えば、製造設備の排ガス出口側にブロアが設けられている場合には、予め排ガスの圧力を高めておくことができるため、排ガス処理装置の入口側に吸引ブロア１２を設ける必要がない。吸引ブロア１２を排除した変形例２の揮発性成分含有排ガス処理装置のフローシートを、図４を用いて説明する。 [Modification 2]
In the above embodiment, the example in which the suction blower 12 having the spillback function is provided between the exhaust gas introduction pipe 18 for supplying the exhaust gas containing the volatile component and the adsorption towers 11a and 11b has been described. Particularly when the pressure of the exhaust gas in the exhaust gas line is high and the pressure in the exhaust gas introduction line 18 is higher than the pressure corresponding to the pressure loss in the volatile component-containing exhaust gas treatment apparatus including the adsorption towers 11a and 11b, suction is particularly performed. Exhaust gas containing volatile components can be supplied to the adsorption tower without providing the blower 12. For example, when a blower is provided on the exhaust gas outlet side of the manufacturing facility, the pressure of the exhaust gas can be increased in advance, so that it is not necessary to provide the suction blower 12 on the inlet side of the exhaust gas treatment device. The flow sheet of the volatile component-containing exhaust gas treating apparatus according to Modification 2 in which the suction blower 12 is eliminated will be described with reference to FIG.
　変形例２の揮発性成分含有排ガス処理装置は、図１に示した実施形態の揮発性成分含有排ガス処理装置において、吸引ブロワ１２と、吸引ブロア１２に並列に設けられたバイパス管路及びバイパス弁４１に換えて圧力調節弁４５を設け、この圧力制御弁４５を排ガス導入管路１８の圧力を検知する圧力センサ４４の出力によって制御するようにしたものであり、その他の構成は実質的に実施形態のものと同様である。このような構成を備えている変形例２の揮発性成分含有排ガス処理装置によれば、排ガス導入管路１８の圧力が高くても、圧力制御弁４５によって吸着塔１１ａ、１１ｂに供給される揮発性成分を含む排ガスの圧力を最適な値に維持することができ、しかも、圧力制御弁のコストはスピルバック機能を有する吸引ブロア１２よりも安価であるため、経済的となる。なお、変形例２の揮発性成分含有排ガス処理装置の構成は、製造設備の排ガス管路の圧力が低く、この製造設備の出口側にブロアが設けられている場合にも適用可能である。 The volatile component-containing exhaust gas treating apparatus of Modification 2 is the same as the volatile component-containing exhaust gas treating apparatus of the embodiment shown in FIG. 1 except that the suction blower 12 and the bypass pipe and the bypass valve provided in parallel with the suction blower 12 are provided. A pressure control valve 45 is provided in place of 41, and the pressure control valve 45 is controlled by the output of a pressure sensor 44 for detecting the pressure of the exhaust gas introduction pipe 18, and other configurations are substantially implemented. It is the same as that of the form. According to the volatile component-containing exhaust gas treating apparatus of Modification 2 having such a configuration, even if the pressure of the exhaust gas introduction pipe 18 is high, the volatilization supplied to the adsorption towers 11a and 11b by the pressure control valve 45. Since the pressure of the exhaust gas containing the volatile component can be maintained at an optimum value, and the cost of the pressure control valve is lower than that of the suction blower 12 having the spill-back function, it is economical. Note that the configuration of the volatile component-containing exhaust gas treatment apparatus of Modification 2 is also applicable to a case where the pressure of the exhaust gas line of the production facility is low and a blower is provided at the outlet side of the production facility.
　変形例２の揮発性成分含有排ガス処理装置においては、実施形態の揮発性成分含有排ガス処理装置の場合と同様に、排ガス導入管路１８と大気放出管路２３との間に排ガスバイパス管路４２を設け、この排ガスバイパス管路４３の途中に排ガスバイパス弁４３を設けてもよい。この場合も、何らかの原因で排ガス導入管路１８の圧力が予め定めた所定の圧力を超えて増大する場合には、圧力センサ４４の出力に基づいてバイパス管路バイパス弁が開き、排ガス導入管路１８が吸着塔１１ａ、１１ｂの出口と直結されるため、増大した圧力を逃がすことができるので、製造設備の排ガス管路に過大な圧力が掛からないようにすることができる。なお、圧力制御弁４５又は排ガスバイパス弁４３を設けた排ガスバイパス管路４３の少なくともいずれか一方は、省略可能である。 In the volatile component-containing exhaust gas treatment device of Modification Example 2, similarly to the case of the volatile component-containing exhaust gas treatment device of the embodiment, an exhaust gas bypass line 42 is provided between the exhaust gas introduction line 18 and the atmospheric release line 23. And an exhaust gas bypass valve 43 may be provided in the exhaust gas bypass pipe 43. Also in this case, if for some reason the pressure in the exhaust gas introduction line 18 exceeds a predetermined pressure, the bypass line bypass valve opens based on the output of the pressure sensor 44 and the exhaust gas introduction line Since the pressure 18 is directly connected to the outlets of the adsorption towers 11a and 11b, the increased pressure can be released, so that an excessive pressure is not applied to the exhaust gas pipe of the manufacturing equipment. At least one of the pressure control valve 45 and the exhaust gas bypass pipe 43 provided with the exhaust gas bypass valve 43 can be omitted.
　１０…揮発性成分含有排ガス処理装置　　１１ａ、１１ｂ…吸着塔
　１２…吸引ブロワ　　　　　　　　　　　１２ａ…吸引ブロワの入口側
　１２ｂ…吸引ブロワの出口側　　　　　　１３…真空ポンプ
　１４…熱交換器　　　　　　　　　　　　１５…気液分離器
　１６…回収ポンプ　　　　　　　　　　　１７ａ，１７ｂ…吸着剤
　１８…排ガス導入管路
　１９ａ、１９ｂ、２１ａ、２１ｂ、２７ａ、２７ｂ、３２、３３、３７…管路
　２０ａ、２０ｂ、２２ａ、２２ｂ…自動開閉弁
　２３…大気放出管路　　　　　　　　　　２４…パージガス供給管路
　２５、２６ａ、２６ｂ、２９ａ、２９ｂ…自動開閉弁
　２８ａ、２８ｂ…脱着回収管路　　　　　３０…流量制御弁
　３１…チェッキ弁　　　　　　　　　　　３４…仕切バルブ
　３５…自動開閉弁　　　　　　　　　　　３６…ＶＯＣ回収管路
　４０…バイパス管路　　　　　　　　　　４１…バイパス弁
　４２…排ガスバイパス管路　　　　　　　４３…排ガスバイパス弁
　４４、４４ａ、４４ｂ…圧力センサ　　　４５…圧力制御弁
　５０…耐圧防爆制御盤　　　　　　　　　５１…耐圧ケース
　５２…扉　　　　　　　　　　　　　　　５３…ボルト
　５４…各種操作スイッチ　　　　　　　　５５…窓
　５６…表示部　　　　　　　　　　　　　５７…タッチパネル DESCRIPTION OF SYMBOLS 10 ... Exhaust gas processing apparatus containing volatile components 11a, 11b ... Adsorption tower 12 ... Suction blower 12a ... Inlet side of suction blower 12b ... Outlet side of suction blower 13 ... Vacuum pump 14 ... Heat exchanger 15 ... Gas-liquid separator 16 ... Recovery pump 17a, 17b Adsorbent 18 Exhaust gas introduction pipeline 19a, 19b, 21a, 21b, 27a, 27b, 32, 33, 37 Pipe pipeline 20a, 20b, 22a, 22b Automatic open / close valve 23 ... Atmospheric discharge pipe Channel 24 ... Purge gas supply line 25, 26a, 26b, 29a, 29b ... Automatic open / close valve 28a, 28b ... Desorption / recovery line 30 ... Flow control valve 31 ... Check valve 34 ... Partition valve 35 ... Automatic open / close valve 36 ... VOC recovery Pipe line 40: bypass line 41: bypass valve 42: exhaust gas bypass pipe Road 43 ... Exhaust gas bypass valve 44, 44a, 44b ... Pressure sensor 45 ... Pressure control valve 50 ... Explosion-proof control panel 51 ... Pressure-resistant case 52 ... Door 53 ... Bolt 54 ... Various operation switches 55 ... Window 56 ... Display unit 57 ... Touch panel

Claims (20)

  1. 　吸着と脱着を交互に行う吸着剤層を有する吸着塔を複数用い、前記複数の吸着塔の一つに、揮発性成分を含む排ガスを吸引ブロワを経て供給することにより前記吸着塔内の吸着剤層に前記揮発性成分を吸着させ、実質的に前記揮発性成分を含まない排ガスを前記吸着塔の出口から取り出して系外に放出し、その間に、他の吸着塔の少なくとも一つを脱着に切り換えて先に吸着された前記揮発性成分を流量制御弁及び真空ポンプを有するバイパス管路を経てパージ排ガスとして系外に取り出すことからなる揮発性成分含有排ガスの処理方法において、
    　前記吸引ブロワとしてスピルバック機能を有するものを用い、
    　前記吸着塔の出口管路と前記吸引ブロワの入口側との間に排ガスバイパス弁を有する排ガスバイパス管路を設け、
    　前記吸引ブロワの入口側の圧力に応じて前記スピルバック機能によって前記吸引ブロワの入口側の圧力を予め定めた所定値となるように制御し、
    　前記吸引ブロワの入口側の圧力が前記予め定めた所定値を越えた際には、前記バイパス弁を開状態として前記ブロワの入口側を前記吸着塔の出口と直結させることを特徴とする、揮発性成分含有排ガスの処理方法。     By using a plurality of adsorption towers having an adsorbent layer for alternately performing adsorption and desorption, and supplying exhaust gas containing a volatile component to one of the plurality of adsorption towers through a suction blower, an adsorbent in the adsorption tower is provided. The layer is made to adsorb the volatile component, and the exhaust gas substantially free of the volatile component is taken out from the outlet of the adsorption tower and discharged out of the system, during which at least one of the other adsorption towers is desorbed. A method for treating a volatile component-containing exhaust gas, comprising switching the volatile component previously adsorbed out of the system as a purge exhaust gas through a bypass pipe having a flow control valve and a vacuum pump,
    Using a suction blower having a spill-back function,
    Providing an exhaust gas bypass pipe having an exhaust gas bypass valve between the outlet pipe of the adsorption tower and the inlet side of the suction blower,
    Controlling the pressure on the inlet side of the suction blower to a predetermined value by the spillback function according to the pressure on the inlet side of the suction blower,
    When the pressure on the inlet side of the suction blower exceeds the predetermined value, the bypass valve is opened to directly connect the inlet side of the blower to the outlet of the adsorption tower. For treating waste gas containing volatile components.
  2. 　前記吸引ブロワの前記スピルバック機能が、前記吸引ブロワに圧力コントロール弁を有するバイパス管路を設けることにより付与されたものであることを特徴とする、請求項１に記載の揮発性成分含有排ガスの処理方法。 The volatile component-containing exhaust gas according to claim 1, wherein the spill-back function of the suction blower is provided by providing a bypass pipe having a pressure control valve in the suction blower. Processing method.
  3. 　前記吸引ブロワの前記スピルバック機能が、前記吸引ブロワの駆動用モータをインバータモータとし、前記インバータモータの回転数を制御することにより付与されたものであることを特徴とする、請求項１に記載の揮発性成分含有排ガスの処理方法。 The spill-back function of the suction blower is provided by controlling a rotation speed of the inverter motor by using a drive motor for the suction blower as an inverter motor. For treating volatile component-containing exhaust gas.
  4. 　前記パージ排ガスを冷却処理し、この際の未凝縮ガスを前記吸着塔の入口側に戻すことをと特徴とする、請求項１～３のいずれか１項に記載の揮発性成分含有排ガスの処理方法。 The treatment of a volatile component-containing exhaust gas according to any one of claims 1 to 3, wherein the purge exhaust gas is subjected to a cooling process, and uncondensed gas at this time is returned to an inlet side of the adsorption tower. Method.
  5. 　前記揮発性成分を含む排ガスが重合性物質含有排ガスであり、前記吸着剤層がシリカゲル、疎水性シリカゲル又は合成ゼオライトから選択された少なくとも１種を含むことを特徴とする、請求項１～４のいずれか１項に記載の揮発性成分含有排ガスの処理方法。 The exhaust gas containing a volatile component is an exhaust gas containing a polymerizable substance, and the adsorbent layer contains at least one selected from silica gel, hydrophobic silica gel and synthetic zeolite. The method for treating a volatile component-containing exhaust gas according to any one of the preceding claims.
  6. 　前記重合性物質が、アクリロニトリル、メチルエチルケトン、塩化ビニルモノマー、スチレン、テトラヒドロフランから選択される１種であることを特徴とする、請求項５に記載の揮発性成分含有排ガスの処理方法。 The method according to claim 5, wherein the polymerizable substance is one selected from acrylonitrile, methyl ethyl ketone, vinyl chloride monomer, styrene, and tetrahydrofuran.
  7. 　請求項１～６のいずれか１項に記載の揮発性成分含有排ガスの処理方法を実施するための装置であって、
    　少なくとも前記複数の吸着塔と、前記スピルバック機能を有する吸引ブロワと、前記排ガスバイパス弁を有する排ガスバイパス管路と、前記流量制御弁及び真空ポンプを有するバイパス管路と、これらの機器の動作を制御するための制御盤とを備え、
    　前記制御盤は、前記制御盤の扉内に取り付けられた外部から視認し得る表示装置と、前記扉の外部から各種パラメータを設定することができるタッチパネルと、を有し、かつ耐圧防爆構造とされていることを特徴とする、揮発性成分含有排ガスの処理方法を実施するための装置。     An apparatus for carrying out the method for treating a volatile component-containing exhaust gas according to any one of claims 1 to 6,
    At least the plurality of adsorption towers, the suction blower having the spillback function, the exhaust gas bypass line having the exhaust gas bypass valve, the bypass line having the flow control valve and the vacuum pump, and the operation of these devices. With a control panel for controlling
    The control panel has a display device attached inside the door of the control panel and visible from the outside, and a touch panel capable of setting various parameters from outside the door, and has a flameproof structure. An apparatus for carrying out a method for treating a volatile component-containing exhaust gas, the method comprising:
  8. 　少なくとも前記複数の吸着塔と、前記スピルバック機能を有する吸引ブロワと、前記排ガスバイパス弁を有する排ガスバイパス管路と、前記流量制御弁及び真空ポンプを有するバイパス管路と、前記制御盤とは、防爆エリアに設けられていることを特徴とする、請求項７に記載の揮発性成分含有排ガスの処理方法を実施するための装置。 At least the plurality of adsorption towers, a suction blower having the spill-back function, an exhaust gas bypass line having the exhaust gas bypass valve, a bypass line having the flow control valve and a vacuum pump, and the control panel, The apparatus for carrying out the method for treating a volatile component-containing exhaust gas according to claim 7, wherein the apparatus is provided in an explosion-proof area.
  9. 　吸着と脱着を交互に行う吸着剤層を有する吸着塔を複数用い、前記複数の吸着塔の一つに、揮発性成分を含む排ガスを供給することにより前記吸着塔内の吸着剤層に前記揮発性成分を吸着させ、実質的に前記揮発性成分を含まない排ガスを前記吸着塔の出口から取り出して系外に放出し、その間に、他の吸着塔の少なくとも一つを脱着に切り換えて先に吸着された前記揮発性成分を流量制御弁及び真空ポンプを有するバイパス管路を経てパージ排ガスとして系外に取り出すことからなる揮発性成分含有排ガスの処理方法において、
    　予め前記複数の吸着塔のいずれかの内部圧力に基く最適な前記流量制御弁の開度を定めておき、前記複数の吸着塔のいずれかの内部圧力に基いて前記流量制御弁の開度を前記予め定めた設定値となるように制御することを特徴とする、揮発性成分含有排ガスの処理方法。     A plurality of adsorption towers having an adsorbent layer for alternately performing adsorption and desorption are used, and by supplying exhaust gas containing a volatile component to one of the plurality of adsorption towers, the volatilization is performed on the adsorbent layer in the adsorption tower. The volatile component is adsorbed, and the exhaust gas substantially free of the volatile component is taken out from the outlet of the adsorption tower and discharged out of the system.In the meantime, at least one of the other adsorption towers is switched to desorption, and A method for treating volatile component-containing exhaust gas, comprising removing the adsorbed volatile component out of the system as a purge exhaust gas through a bypass pipe having a flow control valve and a vacuum pump,
    The optimal opening degree of the flow control valve based on the internal pressure of any of the plurality of adsorption towers is determined in advance, and the opening degree of the flow control valve is determined based on the internal pressure of any of the plurality of adsorption towers. A method for treating volatile component-containing exhaust gas, characterized in that the exhaust gas is controlled to have the predetermined set value.
  10. 　前記真空ポンプの起動直後の前記流量調節弁の開度を、前記前記複数の吸着塔のいずれかの内部圧力が予め定めた圧力に達するまでは予め定めた一定値に制御し、前記複数の吸着塔のいずれかの内部圧力が予め定めた圧力に達した後は前記流量調節弁の開度を予め定めた所定の増加率で増大させるように制御することを特徴とする、請求項９に記載の揮発性成分含有排ガスの処理方法。 The opening degree of the flow control valve immediately after the start of the vacuum pump is controlled to a predetermined constant value until the internal pressure of any of the plurality of adsorption towers reaches a predetermined pressure, and the plurality of adsorption towers are controlled. The method according to claim 9, wherein after any one of the internal pressures of the tower reaches a predetermined pressure, the opening of the flow control valve is controlled to increase at a predetermined predetermined rate. For treating volatile component-containing exhaust gas.
  11. 　前記揮発性成分を含む排ガスを供給する管路と前記吸着塔の間に圧力制御弁を設けたことを特徴とする、請求項９又は１０に記載の揮発性成分含有排ガスの処理方法。 The method for treating a volatile component-containing exhaust gas according to claim 9 or 10, wherein a pressure control valve is provided between the pipe for supplying the exhaust gas containing the volatile component and the adsorption tower.
  12. 　前記吸着塔の出口管路と前記揮発性成分を含む排ガスを供給する管路との間に排ガスバイパス弁を有する排ガスバイパス管路を設け、
    　前記揮発性成分を含む排ガスを供給する管路の圧力が予め定めた所定値を越えた際には、前記排ガスバイパス弁を開状態として前記揮発性成分を含む排ガスを供給する管路を前記吸着塔の出口と直結させることを特徴とする、請求項９～１１のいずれか１項に記載の発性成分含有排ガスの処理方法。     An exhaust gas bypass pipe having an exhaust gas bypass valve is provided between an outlet pipe of the adsorption tower and a pipe for supplying exhaust gas containing the volatile component,
    When the pressure of the pipe for supplying the exhaust gas containing the volatile component exceeds a predetermined value, the exhaust gas bypass valve is opened and the pipe for supplying the exhaust gas containing the volatile component is adsorbed. 12. The method for treating a spontaneous component-containing exhaust gas according to any one of claims 9 to 11, wherein the exhaust gas is directly connected to an outlet of a tower.
  13. 　前記揮発性成分を含む排ガスを供給する管路と前記吸着塔の間にスピルバック機能を有する吸引ブロワを設け、
    　前記吸着塔の出口管路と前記吸引ブロワの入口側との間に排ガスバイパス弁を有する排ガスバイパス管路を設け、
    　前記吸引ブロワの入口側の圧力に応じて前記スピルバック機能によって前記吸引ブロワの入口側の圧力を予め定めた所定値となるように制御し、
    　前記吸引ブロワの入口側の圧力が予め定めた所定値を越えた際には、前記排ガスバイパス弁を開状態として前記吸引ブロワの入口側を前記吸着塔の出口と直結させることを特徴とする、請求項９又は１０に記載の揮発性成分含有排ガスの処理方法。     Providing a suction blower having a spill-back function between a pipe line for supplying the exhaust gas containing the volatile component and the adsorption tower,
    Providing an exhaust gas bypass pipe having an exhaust gas bypass valve between the outlet pipe of the adsorption tower and the inlet side of the suction blower,
    Controlling the pressure on the inlet side of the suction blower to a predetermined value by the spillback function according to the pressure on the inlet side of the suction blower,
    When the pressure on the inlet side of the suction blower exceeds a predetermined value, the exhaust gas bypass valve is opened to directly connect the inlet side of the suction blower to the outlet of the adsorption tower, The method for treating a volatile component-containing exhaust gas according to claim 9.
  14. 　前記吸引ブロワの前記スピルバック機能が、前記吸引ブロワに圧力コントロール弁を有するバイパス管路を設けることにより付与されたものであることを特徴とする、請求項１３に記載の揮発性成分含有排ガスの処理方法。 The volatile component-containing exhaust gas according to claim 13, wherein the spill-back function of the suction blower is provided by providing a bypass pipe having a pressure control valve in the suction blower. Processing method.
  15. 　前記吸引ブロワの前記スピルバック機能が、前記吸引ブロワの駆動用モータをインバータモータとし、前記インバータモータの回転数を制御することにより付与されたものであることを特徴とする、請求項１３に記載の揮発性成分含有排ガスの処理方法。 The spill-back function of the suction blower is provided by controlling a rotation speed of the inverter motor by using a drive motor for the suction blower as an inverter motor. For treating volatile component-containing exhaust gas.
  16. 　前記パージ排ガスを冷却処理し、この際の未凝縮ガスを前記吸着塔の入口側に戻すことをと特徴とする、請求項９～１５のいずれか１項に記載の揮発性成分含有排ガスの処理方法。 The treatment of a volatile component-containing exhaust gas according to any one of claims 9 to 15, wherein the purge exhaust gas is subjected to a cooling process, and uncondensed gas at this time is returned to an inlet side of the adsorption tower. Method.
  17. 　前記揮発性成分を含む排ガスが重合性物質含有排ガスであり、前記吸着剤層がシリカゲル、疎水性シリカゲル又は合成ゼオライトから選択された少なくとも１種を含むことを特徴とする、請求項９～１６のいずれか１項に記載の揮発性成分含有排ガスの処理方法。 17. The exhaust gas according to claim 9, wherein the exhaust gas containing volatile components is an exhaust gas containing a polymerizable substance, and the adsorbent layer contains at least one selected from silica gel, hydrophobic silica gel, and synthetic zeolite. The method for treating a volatile component-containing exhaust gas according to any one of the preceding claims.
  18. 　前記重合性物質が、アセトン、アクリロニトリル、メチルエチルケトン、塩化ビニルモノマー、スチレン、テトラヒドロフランから選択される１種であることを特徴とする、請求項１７に記載の揮発性成分含有排ガスの処理方法。 18. The method for treating a volatile component-containing exhaust gas according to claim 17, wherein the polymerizable substance is one selected from acetone, acrylonitrile, methyl ethyl ketone, vinyl chloride monomer, styrene, and tetrahydrofuran.
  19. 　請求項９～１８のいずれか１項に記載の揮発性成分含有排ガスの処理方法を実施するための装置であって、
    　少なくとも前記複数の吸着塔、前記流量制御弁及び真空ポンプを有するバイパス管路、及び、これらの機器の動作を制御するための制御盤を備え、
    　前記制御盤は、前記制御盤の扉内に取り付けられた外部から視認し得る表示装置と、前記扉の外部から各種パラメータを設定することができるタッチパネルとを有し、かつ耐圧防爆構造とされていることを特徴とする、揮発性成分含有排ガスの処理方法を実施するための装置。     An apparatus for carrying out the method for treating a volatile component-containing exhaust gas according to any one of claims 9 to 18, wherein
    At least a plurality of adsorption towers, a bypass pipeline having the flow control valve and a vacuum pump, and a control panel for controlling the operation of these devices,
    The control panel has a display device attached to the inside of the door of the control panel, which can be visually recognized from the outside, and a touch panel that can set various parameters from outside the door, and has a flameproof structure. An apparatus for carrying out a method for treating volatile component-containing exhaust gas, the method comprising:
  20. 　少なくとも前記複数の吸着塔、前記流量制御弁及び真空ポンプを有するバイパス管路及び前記制御盤は、防爆エリアに設けられていることを特徴とする、請求項１９に記載の揮発性成分含有排ガスの処理方法を実施するための装置。 The volatile component-containing exhaust gas according to claim 19, wherein at least the plurality of adsorption towers, the bypass pipe having the flow rate control valve and the vacuum pump, and the control panel are provided in an explosion-proof area. Apparatus for implementing the processing method.
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