WO2020042287A1 - Cold-spraying preparation method for y / y2o3 metal ceramic protective coating - Google Patents

Cold-spraying preparation method for y / y2o3 metal ceramic protective coating Download PDF

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WO2020042287A1
WO2020042287A1 PCT/CN2018/109937 CN2018109937W WO2020042287A1 WO 2020042287 A1 WO2020042287 A1 WO 2020042287A1 CN 2018109937 W CN2018109937 W CN 2018109937W WO 2020042287 A1 WO2020042287 A1 WO 2020042287A1
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powder
cermet
cold
metal
spraying
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PCT/CN2018/109937
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French (fr)
Chinese (zh)
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郑广文
沈艳芳
王吉强
冯博
吴杰
熊天英
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沈阳富创精密设备有限公司
中国科学院金属研究所
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Publication of WO2020042287A1 publication Critical patent/WO2020042287A1/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/082—Coating starting from inorganic powder by application of heat or pressure and heat without intermediate formation of a liquid in the layer
    • C23C24/085—Coating with metallic material, i.e. metals or metal alloys, optionally comprising hard particles, e.g. oxides, carbides or nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat

Definitions

  • the invention relates to the field of cermet coatings, in particular to a method for preparing a Y / Y 2 O 3 cermet coating by cold spraying.
  • Cermets are heterogeneous composite materials composed of ceramics and bonded metals. Ceramics are mainly high temperature resistant oxides such as alumina and zirconia or their solid solutions. Bonded metals are mainly high melting points such as chromium, molybdenum, tungsten, and titanium. metal. The ceramic and the bonding metal are ground and mixed uniformly, and sintered in an inactive atmosphere after molding to obtain a cermet. Cermets have the advantages of both metals and ceramics, with small density, high hardness, wear resistance, and good thermal conductivity, and will not be brittle due to sudden cooling or sudden heating.
  • Cermet is widely used in rockets and missiles , The shell of a supersonic aircraft, the flame nozzle of a combustion chamber, etc.
  • cermet coatings such as flame spraying, arc spraying, and plasma spraying. Due to the high temperature during spraying, powder particles or wires need to be heated to a molten state, which inevitably makes the sprayed material Phase changes, chemical reactions, and radiation occur during spraying, which greatly reduces the performance of the coating.
  • the characteristics of cold air power spraying are high spraying particle speed and low temperature, low driving force for phase change, solid particle grains are not easy to grow, and oxidation phenomenon is difficult to occur.
  • the properties of spraying powder can be retained to the maximum extent in the coating in. Therefore, in the preparation of the cermet coating, the oxidation of the metal can be fully avoided, and the plasticity of the metal and the brittleness of the ceramic can be effectively combined together.
  • Y 2 O 3 ceramic coating is a kind of protective coating with promising application on key components of IC equipment. Compared with traditional anodized aluminum film and alumina coating, it has better corrosion resistance, so Extensive research.
  • the object of the present invention is to provide a method for preparing a Y / Y 2 O 3 cermet coating by cold spraying, and open up a new method for preparing a Y / Y 2 O 3 cermet coating. Effective way to get practical application as soon as possible.
  • the design idea of the present invention is to combine the intrinsic advantages of the two materials, ceramic and metal, to mix Y and Y 2 O 3 powders uniformly by mechanical ball milling, and then use cold spray solid deposition technology to prepare Y / Y on the aluminum alloy substrate. 2 O 3 cermet anticorrosive coating.
  • a cold spraying preparation method of a Y / Y 2 O 3 cermet protective coating includes the following steps:
  • the second step is to prepare the Y / Y 2 O 3 cermet coating by cold spraying.
  • the Y / Y2O3 cermet powder obtained in the first step is pre-heated, and then cold-sprayed on the surface of the base material, the pre-heating temperature is 200-600 ° C;
  • the cold spraying process conditions are: the acceleration gas and powder feeding gas used are compressed air, the gas temperature is 200-600 ° C, the gas pressure is 1.0-2.5MPa, and the spraying distance is 10-60mm.
  • a mechanical ball milling method is used to prepare metal Y powder and Y 2 O 3 ceramic powder, and the mass ratio of the metal Y powder and Y 2 O 3 ceramic powder is It is 1: 1 to 1:10.
  • the mass ratio of the ball material is 1: 1 ⁇ 1: 10.
  • the particle size range of the metal Y powder is 3 to 40 ⁇ m, and the particle size range of the Y 2 O 3 ceramic powder is 10 to 60 ⁇ m.
  • the porosity of the Y / Y 2 O 3 cermet coating is less than 2%, the interface bonding strength is 20-50 MPa, and the coating thickness is 100. ⁇ 400 ⁇ m.
  • a cermet powder composed of Y / Y 2 O 3 and uniformly mixed is obtained by means of ball milling technology. Only a low-cost compressed air is used as a carrier gas, and a thickness of 100 to 400 ⁇ m can be prepared by cold spraying / Y 2 O 3 cermet coating.
  • the method of depositing a high efficiency, adjustable ceramic coating thickness of the metal Y / Y 2 O 3 based on actual usage, can be used to prepare thick Y / Y 2 O 3 cermet coating.
  • the process of the invention is simple and suitable for industrial production.
  • FIG. 1 is a flow chart of preparing a Y / Y 2 O 3 cermet coating by cold spraying.
  • FIG. 2 is a morphology of the Y / Y 2 O 3 cermet coating in Example 1.
  • the method for preparing a Y / Y 2 O 3 cermet coating by cold spraying selects a Y 2 O 3 powder with a purity of more than 99.9wt% (the particle size ranges from 10 to 60 ⁇ m). And Y powder (particle size range of 3 to 40 ⁇ m), using ball milling technology to mix Y powder and Y 2 O 3 powder uniformly, pre-treatment of the sprayed surface, spraying on the surface of the substrate by cold spraying technology to prepare Y / Y 2 O 3 cermet coating, Y and Y 2 O 3 in the coating are continuously distributed in a laminar layer, and the coating and the substrate are well combined.
  • the process parameters of this method are as follows: first, metal Y powder and Y 2 O 3 ceramic powder are mixed at different mass ratios; second, the powder is sprayed on the surface of the substrate using cold spraying to obtain a Y / Y 2 O 3 cermet coating
  • the conditions for cold spraying are: using compressed air as the working gas, a gas temperature of 200 to 600 ° C, a gas pressure of 1.0 to 2.5 MPa, and a spray distance of 10 to 60 mm.
  • the Y / Y 2 O 3 cermet powder obtained in the first step is cold sprayed on the surface of the base material after being preheated, and the preheating temperature is 600 ° C .;
  • the cold spraying process conditions are: the acceleration gas and powder feeding gas used are compressed air, the gas temperature is 600 ° C, the gas pressure is 2.5MPa, and the spraying distance is 20mm.
  • Y / Y 2 O 3 cermet powder was prepared by mechanical ball milling.
  • the mass ratio of Y powder and Y 2 O 3 powder was 1: 1.
  • the ball mill used is a planetary ball mill
  • the ball milling medium is a polyester tank and a polyester ball
  • the mass ratio of the ball and the material is 1: 2.
  • the coating is continuously distributed on the substrate, and its thickness is about 50-100 ⁇ m.
  • the porosity of the Y / Y 2 O 3 cermet coating is 1%, the interface bonding strength is 50 MPa, and the coating thickness is 300 ⁇ m.
  • the Y / Y 2 O 3 cermet powder obtained in the first step is cold sprayed on the surface of the base material after being preheated, and the preheating temperature is 550 ° C;
  • the cold spraying process conditions are: the acceleration gas and powder feeding gas used are compressed air, the gas temperature is 550 ° C, the gas pressure is 2.2MPa, and the spraying distance is 30mm.
  • Y / Y 2 O 3 cermet powder was prepared by mechanical ball milling.
  • the mass ratio of Y powder and Y 2 O 3 powder was 1: 2.
  • the ball mill used is a planetary ball mill, and the ball milling medium is a polyester tank and a polyester ball, and the mass ratio of the ball and the material is 1: 3.
  • the porosity of the Y / Y 2 O 3 cermet coating is 1.5%
  • the interface bonding strength is 45 MPa
  • the coating thickness is 280 ⁇ m.
  • the Y / Y 2 O 3 cermet powder obtained in the first step is cold sprayed on the surface of the base material after being preheated, and the preheating temperature is 500 ° C .;
  • the cold spraying process conditions are: the acceleration gas and powder feeding gas used are compressed air, the gas temperature is 500 ° C, the gas pressure is 2.0MPa, and the spraying distance is 20mm.
  • Y / Y 2 O 3 cermet powder was prepared by mechanical ball milling.
  • the mass ratio of Y powder and Y 2 O 3 powder was 1: 3.
  • the ball mill used is a planetary ball mill, and the ball milling medium is a polyester tank and a polyester grinding ball.
  • the Y / Y 2 O 3 cermet coating has a porosity of 2%, an interface bonding strength of 50 MPa, and a coating thickness of 300 ⁇ m.
  • the results of the examples show that the present invention can use only low-cost compressed air as a carrier gas to prepare a Y / Y 2 O 3 cermet coating with a thickness of 100-400 ⁇ m.
  • the method of the invention is simple and has high deposition efficiency, and the thickness of the Y / Y 2 O 3 cermet coating can be adjusted at will according to the actual use conditions to meet different working conditions.

Abstract

A cold-spraying preparation method for a Y/Y2O3 metal ceramic protective coating, the method comprising the following steps: step 1, preparing a Y/Y2O3 metal ceramic powder, comprising uniformly mixing a metal Y powder and a Y2O3 ceramic powder according to different mass ratios; and step 2, preparing a Y/Y2O3 metal ceramic coating by means of cold spraying, comprising preheating the Y/Y2O3 metal ceramic powder obtained in step 1, and then cold spraying same on the surface of a substrate material, wherein the preheating temperature is 200℃-600℃. The cold-spraying process conditions are as follows: both an acceleration gas and a powder feeding gas used are compressed air, the gas temperature is 200℃-600℃, the gas pressure is 1.0-2.5 MPa, and the spraying distance is 10-60 mm.

Description

一种Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法 Y / Y       2O       3 cold spraying preparation method of cermet protective coating      技术领域Technical field
本发明涉及金属陶瓷涂层领域，具体为一种冷喷涂制备Y/Y 2O 3金属陶瓷涂层的方法。 The invention relates to the field of cermet coatings, in particular to a method for preparing a Y / Y 2 O 3 cermet coating by cold spraying.
背景技术Background technique
金属陶瓷是由陶瓷和粘接金属组成的非均质复合材料，陶瓷主要是氧化铝、氧化锆等耐高温氧化物或它们的固溶体，粘接金属主要是铬、钼、钨、钛等高熔点金属。将陶瓷和粘接金属研磨混合均匀，成型后在不活泼气氛中烧结，就可制得金属陶瓷。金属陶瓷同时兼有金属和陶瓷的优点，密度小、硬度高、耐磨、导热性好，不会因为骤冷或骤热而脆裂。另外，在金属陶瓷表面再喷涂一层气密性好、熔点高、传热性能较差的陶瓷涂层，也能防止金属或合金在高温下氧化或腐蚀，金属陶瓷广泛地应用于火箭、导弹、超音速飞机的外壳、燃烧室的火焰喷口等处。Cermets are heterogeneous composite materials composed of ceramics and bonded metals. Ceramics are mainly high temperature resistant oxides such as alumina and zirconia or their solid solutions. Bonded metals are mainly high melting points such as chromium, molybdenum, tungsten, and titanium. metal. The ceramic and the bonding metal are ground and mixed uniformly, and sintered in an inactive atmosphere after molding to obtain a cermet. Cermets have the advantages of both metals and ceramics, with small density, high hardness, wear resistance, and good thermal conductivity, and will not be brittle due to sudden cooling or sudden heating. In addition, spraying another layer of ceramic coating with good air tightness, high melting point and poor heat transfer performance on the surface of cermet can also prevent oxidation or corrosion of metal or alloy at high temperature. Cermet is widely used in rockets and missiles , The shell of a supersonic aircraft, the flame nozzle of a combustion chamber, etc.
传统的热喷涂技术可以用来制备金属陶瓷涂层，如：火焰喷涂、电弧喷涂和等离子喷涂等，由于喷涂时温度偏高，粉末颗粒或线材需要被加热到熔化状态，不可避免地使喷涂材料在喷涂的过程中发生相变、化学反应及辐射等现象，极大降低涂层的性能。Traditional thermal spraying techniques can be used to prepare cermet coatings, such as flame spraying, arc spraying, and plasma spraying. Due to the high temperature during spraying, powder particles or wires need to be heated to a molten state, which inevitably makes the sprayed material Phase changes, chemical reactions, and radiation occur during spraying, which greatly reduces the performance of the coating.
冷气动力喷涂的特点是喷涂颗粒速度高和温度低，发生相变的驱动力较小，固体粒子晶粒不易长大，氧化现象很难发生，可以最大限度的将喷涂粉末的性质保留在涂层中。因此，在制备金属陶瓷涂层时，可以充分避免金属的氧化，将金属的塑性和陶瓷的脆性有效结合在一起。The characteristics of cold air power spraying are high spraying particle speed and low temperature, low driving force for phase change, solid particle grains are not easy to grow, and oxidation phenomenon is difficult to occur. The properties of spraying powder can be retained to the maximum extent in the coating in. Therefore, in the preparation of the cermet coating, the oxidation of the metal can be fully avoided, and the plasticity of the metal and the brittleness of the ceramic can be effectively combined together.
Y 2O 3陶瓷涂层是目前IC装备关键零部件上较有应用前景的一种防护涂层，与传统的阳极氧化铝膜和氧化铝涂层相比，具有更好的耐蚀效果，因而被广泛研究。 Y 2 O 3 ceramic coating is a kind of protective coating with promising application on key components of IC equipment. Compared with traditional anodized aluminum film and alumina coating, it has better corrosion resistance, so Extensive research.
发明内容Summary of the Invention
针对现有技术中存在的上述不足，本发明的目的是提供一种冷喷涂制备Y/Y 2O 3金属陶瓷涂层的方法，开辟一种新的制备Y/Y 2O 3金属陶瓷涂层的有效途径，以期早日获得实际应用。本发明的设计思想是结合陶瓷与金属两种材料各自的本征优点，通过机械球磨将Y和Y 2O 3粉末混合均匀，才用冷喷涂固态沉积技术，在铝合金基体上制备Y/Y 2O 3金属陶瓷防腐蚀涂层。 In view of the above-mentioned shortcomings in the prior art, the object of the present invention is to provide a method for preparing a Y / Y 2 O 3 cermet coating by cold spraying, and open up a new method for preparing a Y / Y 2 O 3 cermet coating. Effective way to get practical application as soon as possible. The design idea of the present invention is to combine the intrinsic advantages of the two materials, ceramic and metal, to mix Y and Y 2 O 3 powders uniformly by mechanical ball milling, and then use cold spray solid deposition technology to prepare Y / Y on the aluminum alloy substrate. 2 O 3 cermet anticorrosive coating.
本发明技术方案如下：The technical scheme of the present invention is as follows:
一种Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，包括下述步骤： A cold spraying preparation method of a Y / Y 2 O 3 cermet protective coating includes the following steps:
第一步，Y/Y 2O 3金属陶瓷粉末的制备 First step, preparation of Y / Y 2 O 3 cermet powder
将金属Y粉和Y 2O 3陶瓷粉末按不同的质量配比混合均匀； Mix metal Y powder and Y 2 O 3 ceramic powder according to different mass ratios;
第二步，冷喷涂制备Y/Y 2O 3金属陶瓷涂层 The second step is to prepare the Y / Y 2 O 3 cermet coating by cold spraying.
将第一步得到的Y/Y2O3金属陶瓷粉末经预热后，冷喷涂在基体材料表面，所述的预热温度为200～600℃；The Y / Y2O3 cermet powder obtained in the first step is pre-heated, and then cold-sprayed on the surface of the base material, the pre-heating temperature is 200-600 ° C;
冷喷涂工艺条件为：使用的加速气体和送粉气体均为压缩空气，气体温度为200～600℃， 气体压力为1.0～2.5MPa，喷涂距离为10～60mm。The cold spraying process conditions are: the acceleration gas and powder feeding gas used are compressed air, the gas temperature is 200-600 ° C, the gas pressure is 1.0-2.5MPa, and the spraying distance is 10-60mm.
所述的Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，采用机械球磨法制备金属Y粉和Y 2O 3陶瓷粉末，金属Y粉和Y 2O 3陶瓷粉末的质量配比为1：1～1：10。 In the cold spraying preparation method of the Y / Y 2 O 3 cermet protective coating, a mechanical ball milling method is used to prepare metal Y powder and Y 2 O 3 ceramic powder, and the mass ratio of the metal Y powder and Y 2 O 3 ceramic powder is It is 1: 1 to 1:10.
所述的Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，采用机械球磨法制备金属Y粉和Y 2O 3陶瓷粉末时，采用行星式球磨机，球磨介质为聚酯罐和聚酯磨球，球料质量比1：1～1：10。 In the cold spraying preparation method of the Y / Y 2 O 3 metal-ceramic protective coating, when the metal Y powder and the Y 2 O 3 ceramic powder are prepared by a mechanical ball milling method, a planetary ball mill is used, and the ball milling medium is a polyester tank and a polymer Ester grinding ball, the mass ratio of the ball material is 1: 1 ～ 1: 10.
所述的Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，金属Y粉的粒度范围为3～40μm，Y 2O 3陶瓷粉末粒度范围为10～60μm。 In the cold spraying preparation method of the Y / Y 2 O 3 cermet protective coating, the particle size range of the metal Y powder is 3 to 40 μm, and the particle size range of the Y 2 O 3 ceramic powder is 10 to 60 μm.
所述的Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，Y/Y 2O 3金属陶瓷涂层孔隙率低于2％，界面结合强度为20～50MPa，涂层厚度为100～400μm。 In the cold spraying preparation method of the Y / Y 2 O 3 cermet protective coating, the porosity of the Y / Y 2 O 3 cermet coating is less than 2%, the interface bonding strength is 20-50 MPa, and the coating thickness is 100. ~ 400 μm.
本发明的优点及有益效果是：The advantages and beneficial effects of the present invention are:
1、本发明借助球磨技术得到由Y/Y 2O 3组成、且混合均匀的金属陶瓷粉体，仅仅使用低成本的压缩空气为载气，就能用冷喷涂制备厚度为100～400μm的Y/Y 2O 3金属陶瓷涂层。该方法沉积效率高，可根据实际使用情况随意调节Y/Y 2O 3金属陶瓷涂层的厚度，可以用来制备厚的Y/Y 2O 3金属陶瓷涂层。 1. According to the present invention, a cermet powder composed of Y / Y 2 O 3 and uniformly mixed is obtained by means of ball milling technology. Only a low-cost compressed air is used as a carrier gas, and a thickness of 100 to 400 μm can be prepared by cold spraying / Y 2 O 3 cermet coating. The method of depositing a high efficiency, adjustable ceramic coating thickness of the metal Y / Y 2 O 3 based on actual usage, can be used to prepare thick Y / Y 2 O 3 cermet coating.
2、本发明工艺简单，适合工业化生产。2. The process of the invention is simple and suitable for industrial production.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为冷喷涂制备Y/Y 2O 3金属陶瓷涂层流程图。 FIG. 1 is a flow chart of preparing a Y / Y 2 O 3 cermet coating by cold spraying.
图2为实施例1中Y/Y 2O 3金属陶瓷涂层的形貌。 FIG. 2 is a morphology of the Y / Y 2 O 3 cermet coating in Example 1. FIG.
具体实施方式detailed description
如图1所示，在具体实施过程中，本发明冷喷涂制备Y/Y 2O 3金属陶瓷涂层的方法，选择纯度大于99.9wt％的Y 2O 3粉末(粒度范围为10～60μm)和Y粉(粒度范围为3～40μm)，使用球磨技术将Y粉和Y 2O 3粉末混合均匀，对喷涂的表面进行预处理，通过冷喷涂技术在基体表面进行喷涂，制备Y/Y 2O 3金属陶瓷涂层，涂层中的Y和Y 2O 3呈片层状连续分布，涂层与基体结合良好。 As shown in FIG. 1, in a specific implementation process, the method for preparing a Y / Y 2 O 3 cermet coating by cold spraying according to the present invention selects a Y 2 O 3 powder with a purity of more than 99.9wt% (the particle size ranges from 10 to 60 μm). And Y powder (particle size range of 3 to 40 μm), using ball milling technology to mix Y powder and Y 2 O 3 powder uniformly, pre-treatment of the sprayed surface, spraying on the surface of the substrate by cold spraying technology to prepare Y / Y 2 O 3 cermet coating, Y and Y 2 O 3 in the coating are continuously distributed in a laminar layer, and the coating and the substrate are well combined.
该方法的工艺参数如下：首先，将金属Y粉和Y 2O 3陶瓷粉末按不同的质量配比混合；其次，使用冷喷涂将该粉末喷涂到基体表面得到Y/Y 2O 3金属陶瓷涂层；冷喷涂的条件为：使用压缩空气为工作气体，气体温度为200～600℃，气体压力为1.0～2.5MPa，喷涂距离为10～60mm。 The process parameters of this method are as follows: first, metal Y powder and Y 2 O 3 ceramic powder are mixed at different mass ratios; second, the powder is sprayed on the surface of the substrate using cold spraying to obtain a Y / Y 2 O 3 cermet coating The conditions for cold spraying are: using compressed air as the working gas, a gas temperature of 200 to 600 ° C, a gas pressure of 1.0 to 2.5 MPa, and a spray distance of 10 to 60 mm.
下面对本发明的实施例作详细说明，在以发明技术方案为前提下进行实施，给出详细的实施方式和具体操作过程，但本发明的保护范围不限于下面的实施例。The embodiments of the present invention are described in detail below, and implemented on the premise of the technical solution of the invention, and detailed implementations and specific operating procedures are given, but the protection scope of the present invention is not limited to the following embodiments.
实施例1Example 1
本实施例中，冷喷涂制备Y/Y 2O 3金属陶瓷涂层的具体步骤如下： In this embodiment, the specific steps for preparing the Y / Y 2 O 3 cermet coating by cold spraying are as follows:
(1)Y/Y 2O 3金属陶瓷粉末的制备 (1) Preparation of Y / Y 2 O 3 cermet powder
将金属Y粉(粒度为3～40μm)和Y 2O 3陶瓷粉末(粒度为10～60μm)按不同的质量配比混合均匀； Mix metal Y powder (particle size 3-40 μm) and Y 2 O 3 ceramic powder (particle size 10-60 μm) according to different mass ratios and mix uniformly;
(2)冷喷涂制备Y/Y 2O 3金属陶瓷涂层 (2) Preparation of Y / Y 2 O 3 cermet coating by cold spraying
将第一步得到的Y/Y 2O 3金属陶瓷粉末经预热后冷喷涂在基体材料表面，所述的预热温度为600℃； The Y / Y 2 O 3 cermet powder obtained in the first step is cold sprayed on the surface of the base material after being preheated, and the preheating temperature is 600 ° C .;
冷喷涂工艺条件为：使用的加速气体和送粉气体均为压缩空气，气体温度为600℃，气体压力为2.5MPa，喷涂距离为20mm。The cold spraying process conditions are: the acceleration gas and powder feeding gas used are compressed air, the gas temperature is 600 ° C, the gas pressure is 2.5MPa, and the spraying distance is 20mm.
采用机械球磨法制备Y/Y 2O 3金属陶瓷粉末，Y粉和Y 2O 3粉的质量配比为1：1。在采用机械球磨法制备Y/Y 2O 3金属陶瓷粉末时，所用的球磨机为行星式球磨机，球磨介质为聚酯罐和聚酯磨球，球料质量比1：2。 Y / Y 2 O 3 cermet powder was prepared by mechanical ball milling. The mass ratio of Y powder and Y 2 O 3 powder was 1: 1. When the mechanical ball milling method is used to prepare Y / Y 2 O 3 cermet powder, the ball mill used is a planetary ball mill, the ball milling medium is a polyester tank and a polyester ball, and the mass ratio of the ball and the material is 1: 2.
如图2所示，从Y/Y 2O 3金属陶瓷涂层的形貌可以看出，涂层在基体上连续分布，其厚度约为50～100μm。 As shown in FIG. 2, from the morphology of the Y / Y 2 O 3 cermet coating, it can be seen that the coating is continuously distributed on the substrate, and its thickness is about 50-100 μm.
本实施例中，Y/Y 2O 3金属陶瓷涂层孔隙率为1％，界面结合强度为50MPa，涂层厚度为300μm。 In this embodiment, the porosity of the Y / Y 2 O 3 cermet coating is 1%, the interface bonding strength is 50 MPa, and the coating thickness is 300 μm.
实施例2Example 2
本实施例中，冷喷涂制备Y/Y 2O 3金属陶瓷涂层的具体步骤如下： In this embodiment, the specific steps for preparing the Y / Y 2 O 3 cermet coating by cold spraying are as follows:
(1)Y/Y 2O 3金属陶瓷粉末的制备 (1) Preparation of Y / Y 2 O 3 cermet powder
将金属Y粉(粒度为3～40μm)和Y 2O 3陶瓷粉末(粒度为10～60μm)按不同的质量配比混合均匀； Mix metal Y powder (particle size 3-40 μm) and Y 2 O 3 ceramic powder (particle size 10-60 μm) according to different mass ratios and mix uniformly;
(2)冷喷涂制备Y/Y 2O 3金属陶瓷涂层 (2) Preparation of Y / Y 2 O 3 cermet coating by cold spraying
将第一步得到的Y/Y 2O 3金属陶瓷粉末经预热后冷喷涂在基体材料表面，所述的预热温度为550℃； The Y / Y 2 O 3 cermet powder obtained in the first step is cold sprayed on the surface of the base material after being preheated, and the preheating temperature is 550 ° C;
冷喷涂工艺条件为：使用的加速气体和送粉气体均为压缩空气，气体温度为550℃，气体压力为2.2MPa，喷涂距离为30mm。The cold spraying process conditions are: the acceleration gas and powder feeding gas used are compressed air, the gas temperature is 550 ° C, the gas pressure is 2.2MPa, and the spraying distance is 30mm.
采用机械球磨法制备Y/Y 2O 3金属陶瓷粉末，Y粉和Y 2O 3粉的质量配比为1：2。在采用机械球磨法制备Y/Y 2O 3金属陶瓷粉末时，所用的球磨机为行星式球磨机，球磨介质为聚酯罐和聚酯磨球，球料质量比1：3。 Y / Y 2 O 3 cermet powder was prepared by mechanical ball milling. The mass ratio of Y powder and Y 2 O 3 powder was 1: 2. When the mechanical ball milling method is used to prepare the Y / Y 2 O 3 cermet powder, the ball mill used is a planetary ball mill, and the ball milling medium is a polyester tank and a polyester ball, and the mass ratio of the ball and the material is 1: 3.
本实施例中，Y/Y 2O 3金属陶瓷涂层孔隙率为1.5％，界面结合强度为45MPa，涂层厚度为280μm。 In this embodiment, the porosity of the Y / Y 2 O 3 cermet coating is 1.5%, the interface bonding strength is 45 MPa, and the coating thickness is 280 μm.
实施例3Example 3
本实施例中，冷喷涂制备Y/Y 2O 3金属陶瓷涂层的具体步骤如下： In this embodiment, the specific steps for preparing the Y / Y 2 O 3 cermet coating by cold spraying are as follows:
(1)Y/Y 2O 3金属陶瓷粉末的制备 (1) Preparation of Y / Y 2 O 3 cermet powder
将金属Y粉(粒度为3～40μm)和Y 2O 3陶瓷粉末(粒度为10～60μm)按不同的质量配比混合均匀； Mix metal Y powder (particle size 3-40 μm) and Y 2 O 3 ceramic powder (particle size 10-60 μm) according to different mass ratios and mix uniformly;
(2)冷喷涂制备Y/Y 2O 3金属陶瓷涂层 (2) Preparation of Y / Y 2 O 3 cermet coating by cold spraying
将第一步得到的Y/Y 2O 3金属陶瓷粉末经预热后冷喷涂在基体材料表面，所述的预热温度为500℃； The Y / Y 2 O 3 cermet powder obtained in the first step is cold sprayed on the surface of the base material after being preheated, and the preheating temperature is 500 ° C .;
冷喷涂工艺条件为：使用的加速气体和送粉气体均为压缩空气，气体温度为500℃，气体压力为2.0MPa，喷涂距离为20mm。The cold spraying process conditions are: the acceleration gas and powder feeding gas used are compressed air, the gas temperature is 500 ° C, the gas pressure is 2.0MPa, and the spraying distance is 20mm.
采用机械球磨法制备Y/Y 2O 3金属陶瓷粉末，Y粉和Y 2O 3粉的质量配比为1：3。在采用机械球磨法制备Y/Y 2O 3金属陶瓷粉末时，所用的球磨机为行星式球磨机，球磨介质为聚酯罐和聚酯磨球，球料质量比1：4。 Y / Y 2 O 3 cermet powder was prepared by mechanical ball milling. The mass ratio of Y powder and Y 2 O 3 powder was 1: 3. When the mechanical ball milling method is used to prepare Y / Y 2 O 3 cermet powder, the ball mill used is a planetary ball mill, and the ball milling medium is a polyester tank and a polyester grinding ball.
所述的冷喷涂制备Y/Y 2O 3金属陶瓷涂层的方法，Y/Y 2O 3金属陶瓷涂层孔隙率为2％，界面结合强度为50MPa，涂层厚度为300μm。 According to the method for preparing a Y / Y 2 O 3 cermet coating by cold spraying, the Y / Y 2 O 3 cermet coating has a porosity of 2%, an interface bonding strength of 50 MPa, and a coating thickness of 300 μm.
实施例结果表明，本发明仅使用低成本的压缩空气作为载气就能制备出厚度为100～400μm的Y/Y 2O 3金属陶瓷涂层。本发明方法简单、沉积效率高，可根据实际使用情况随意调节Y/Y 2O 3金属陶瓷涂层的厚度，满足不同的使用工况。 The results of the examples show that the present invention can use only low-cost compressed air as a carrier gas to prepare a Y / Y 2 O 3 cermet coating with a thickness of 100-400 μm. The method of the invention is simple and has high deposition efficiency, and the thickness of the Y / Y 2 O 3 cermet coating can be adjusted at will according to the actual use conditions to meet different working conditions.

Claims (5)

  1. 一种Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，其特征在于，包括下述步骤： A cold spraying method for preparing a Y / Y 2 O 3 cermet protective coating is characterized in that it includes the following steps:
    第一步，Y/Y 2O 3金属陶瓷粉末的制备 First step, preparation of Y / Y 2 O 3 cermet powder
    将金属Y粉和Y 2O 3陶瓷粉末按不同的质量配比混合均匀； Mix metal Y powder and Y 2 O 3 ceramic powder according to different mass ratios;
    第二步，冷喷涂制备Y/Y 2O 3金属陶瓷涂层 The second step is to prepare the Y / Y 2 O 3 cermet coating by cold spraying.
    将第一步得到的Y/Y2O3金属陶瓷粉末经预热后，冷喷涂在基体材料表面，所述的预热温度为200～600℃；The Y / Y2O3 cermet powder obtained in the first step is pre-heated, and then cold-sprayed on the surface of the base material, the pre-heating temperature is 200-600 ° C;
    冷喷涂工艺条件为：使用的加速气体和送粉气体均为压缩空气，气体温度为200～600℃，气体压力为1.0～2.5MPa，喷涂距离为10～60mm。The cold spraying process conditions are: the accelerating gas and the powder-feeding gas used are compressed air, the gas temperature is 200 to 600 ° C, the gas pressure is 1.0 to 2.5 MPa, and the spraying distance is 10 to 60 mm.
  2. 根据权利要求1所述的Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，其特征在于，采用机械球磨法制备金属Y粉和Y 2O 3陶瓷粉末，金属Y粉和Y 2O 3陶瓷粉末的质量配比为1：1～1：10。 The method for preparing a cold sprayed Y / Y 2 O 3 cermet protective coating according to claim 1, wherein the metal Y powder and Y 2 O 3 ceramic powder, the metal Y powder and Y 2 are prepared by a mechanical ball milling method. The mass ratio of O 3 ceramic powder is 1: 1 to 1:10.
  3. 根据权利要求2所述的Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，其特征在于，采用机械球磨法制备金属Y粉和Y 2O 3陶瓷粉末时，采用行星式球磨机，球磨介质为聚酯罐和聚酯磨球，球料质量比1：1～1：10。 The method for preparing a cold sprayed Y / Y 2 O 3 cermet protective coating according to claim 2, wherein a planetary ball mill is used to prepare metal Y powder and Y 2 O 3 ceramic powder by a mechanical ball milling method, The ball milling medium is a polyester tank and a polyester milling ball, and the mass ratio of the ball material is 1: 1 to 1:10.
  4. 根据权利要求1或2所述的Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，其特征在于，金属Y粉的粒度范围为3～40μm，Y 2O 3陶瓷粉末粒度范围为10～60μm。 The method for preparing a cold sprayed Y / Y 2 O 3 metal-ceramic protective coating according to claim 1 or 2, wherein the particle size range of the metal Y powder is 3 to 40 μm, and the particle size range of the Y 2 O 3 ceramic powder is 10 to 60 μm.
  5. 根据权利要求1所述的Y/Y 2O 3金属陶瓷防护涂层的冷喷涂制备方法，其特征在于，Y/Y 2O 3金属陶瓷涂层孔隙率低于2％，界面结合强度为20～50MPa，涂层厚度为100～400μm。 The method for preparing a cold sprayed Y / Y 2 O 3 cermet coating according to claim 1, wherein the porosity of the Y / Y 2 O 3 cermet coating is less than 2%, and the interface bonding strength is 20 ～ 50MPa, coating thickness is 100 ～ 400μm.
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Publication number Priority date Publication date Assignee Title
CN112647005B (en) * 2020-11-20 2022-02-11 西安交通大学 Cermet material based on dual-phase structure composite powder and preparation method thereof
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005158933A (en) * 2003-11-25 2005-06-16 National Institute Of Advanced Industrial & Technology Member of manufacturing apparatus of semiconductor or liquid crystal, and manufacturing method thereof
CN101135033A (en) * 2006-04-20 2008-03-05 信越化学工业株式会社 Conductive, plasma-resistant member
CN103215535A (en) * 2013-04-16 2013-07-24 中国科学院金属研究所 Method for preparing protective coating layer for surface of plasma etched cavity
CN106591820A (en) * 2015-10-15 2017-04-26 沈阳富创精密设备有限公司 Preparation method of high-purity yttrium oxide coating for IC equipment critical parts
CN106591763A (en) * 2015-10-15 2017-04-26 沈阳富创精密设备有限公司 Method for preparing high-purity yttrium oxide coating for IC equipment aluminum alloy part through explosion spraying

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9186866B2 (en) * 2012-01-10 2015-11-17 Siemens Aktiengesellschaft Powder-based material system with stable porosity
CN103074624B (en) * 2012-12-20 2014-12-03 中南大学 Method for cold-spraying preparation of ZrO2-CeO2 ceramic coating
CN103695898B (en) * 2013-12-19 2016-02-24 山东大学 A kind of titanium alloy surface cermet composite coating and preparation technology thereof
CN104894554B (en) * 2015-04-10 2018-10-30 西安交通大学 A kind of preparation method and application of high-compactness cold spraying metal/metal base lithosomic body

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005158933A (en) * 2003-11-25 2005-06-16 National Institute Of Advanced Industrial & Technology Member of manufacturing apparatus of semiconductor or liquid crystal, and manufacturing method thereof
CN101135033A (en) * 2006-04-20 2008-03-05 信越化学工业株式会社 Conductive, plasma-resistant member
CN103215535A (en) * 2013-04-16 2013-07-24 中国科学院金属研究所 Method for preparing protective coating layer for surface of plasma etched cavity
CN106591820A (en) * 2015-10-15 2017-04-26 沈阳富创精密设备有限公司 Preparation method of high-purity yttrium oxide coating for IC equipment critical parts
CN106591763A (en) * 2015-10-15 2017-04-26 沈阳富创精密设备有限公司 Method for preparing high-purity yttrium oxide coating for IC equipment aluminum alloy part through explosion spraying

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