WO2020037837A1 - 基于k空间变换的三维成像装置及其成像方法 - Google Patents

基于k空间变换的三维成像装置及其成像方法 Download PDF

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WO2020037837A1
WO2020037837A1 PCT/CN2018/114488 CN2018114488W WO2020037837A1 WO 2020037837 A1 WO2020037837 A1 WO 2020037837A1 CN 2018114488 W CN2018114488 W CN 2018114488W WO 2020037837 A1 WO2020037837 A1 WO 2020037837A1
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sample
dimensional
light
motorized stage
dimensional imaging
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French (fr)
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张雪丹
刘诚
朱健强
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中国科学院上海光学精密机械研究所
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4788—Diffraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4788—Diffraction
    • G01N2021/479—Speckle

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  • the invention relates to the field of three-dimensional imaging, in particular to a three-dimensional imaging device based on K-space transformation and an imaging method thereof.
  • Three-dimensional imaging technology has developed rapidly due to its wide reference. This technology has a great role in the observation of biological samples and tumor diagnosis.
  • There are many methods used in the field of three-dimensional imaging such as structured light illumination technology, confocal scanning, coherence tomography, flake illumination microscopy, and coherence tomography. These technologies are able to reflect the internal structure of the sample, including information such as the reflectance of the sample and the concentration of the luminescent material.
  • Structured light three-dimensional imaging technology uses a carrier frequency stripe to illuminate the object, records the deformed stripes, and then digitally demodulates the reconstructed three-dimensional image from the deformed fringe map obtained to reconstruct the three-dimensional image of the measured object. The shadow effect of the focal part.
  • the most widely used 3D imaging technology is confocal scanning technology.
  • This technology uses pinholes to block the passage of light from the out-of-focus portion, thereby eliminating the effects of shadows from the out-of-focus sample.
  • Optical coherence tomography can use gratings and two-dimensional scanning galvanometers to achieve high lateral and vertical resolution.
  • the flake light illumination microscopy technology uses a flake light source to illuminate the sample, and at the same time collects reflected light in a direction perpendicular to the optical path. Since the illumination light is a flake light, the collected reflected light is the axial distribution of the sample. Since the lighting system and the acquisition system are not co-axial systems, this technology is difficult to implement.
  • the method proposed by this patent has high imaging rate, spatial resolution, simple structure, and easy construction and assembly.
  • the purpose of the present invention is to overcome the above-mentioned shortcomings of the prior art, and provide a three-dimensional imaging method with high imaging speed, high resolution, simple structure, and easy construction and assembly.
  • a three-dimensional imaging device based on K-space transformation which is characterized by comprising a laser, a lens, a first beam splitting prism, a first cylindrical lens, a spot detector, a computer, a second beam splitting prism, a microscope objective lens, and a place for a sample to be measured.
  • the laser light emitted by the laser (1) passes through the lens (2) and becomes a parallel beam.
  • the beam is transmitted and reflected by the first beam splitting prism (3), that is, a detection beam and a reference beam.
  • the detection beam passes through the first
  • a cylindrical lens (4) is focused into a sheet-shaped illumination light, and is condensed into a thinner sheet-shaped sheet-shaped illumination light by a second spectroscopic prism (7) and a microscope objective lens (8) in order, and irradiates the sample to be measured. After the reflection of the sample is measured, the original path is returned, transmitted through the micro objective lens (8), and then incident on the second beam splitting prism (7);
  • the reference beam After the reference beam is reflected by the second reflector (14), a sheet-shaped reference light is formed through the second cylindrical lens (13), and after being reflected by the first reflector (12), it passes through the microscope objective lens group (11) in order. ) And the second spectroscopic prism (7) are transmitted, and together with the detection beam reflected by the second spectroscopic prism (7), they are incident on the spot detector (5), and the computer (6) and the spot detector are respectively (5) Connected to the one-dimensional motorized stage (9).
  • the computer (6) controls the movement of the one-dimensional motorized stage (9), so that the sample to be measured is moved in a direction perpendicular to the optical axis according to a preset moving step l, and each time the movement is performed, the light spot detector collects and repeats the steps 3 , 4, 5 until moving n times, collect 3n scattered light spots;
  • the intensity of the light spot recorded by the radon spot detector is input into the computer, and the computer performs three-dimensional imaging of the sample to be measured.
  • the spot intensity recorded by the spot detector is input to a computer, and the computer uses the spot data to perform three-dimensional imaging of the sample to be measured.
  • a computer is used to calculate the 3n scattered light version recorded by the spot detector.
  • the calculation process is as follows:
  • Step 7.2 Read in the three scattered light spots recorded by the n-th movement of the one-dimensional motorized stage;
  • Step 7.3 Use the sum of the 3rd scattered light spot pattern of the nth time and the sum of the 1st and 2nd scattered light spot patterns of the nth time to make a difference;
  • Step 7.4 Perform a discrete Fourier transform on the image obtained in step 7.3, and then intercept the first-level spectrum and translate it to the center of the image;
  • Step 7.5 Perform inverse discrete Fourier transform on the image obtained in step 7.4, and then use the Fresnel propagation formula to propagate to the center plane of the sample, and the propagation distance is: D + L 1 + L 2 ;
  • Step 7.6 Perform a discrete Fourier transform on the image obtained in step 7.5;
  • Step 7.7 use the formula Obtain the corresponding position of the wavefront on the optical axis, where p is the axial position, m is the lateral position, n is the longitudinal position, ⁇ is the laser wavelength, ⁇ k x is the lateral spatial frequency, ⁇ k y is the longitudinal spatial frequency, and ⁇ k z Axial space frequency
  • Step 7.8 Move the corresponding amplitude and phase of the data (m, n) to (m, p), thereby projecting the wavefront to a plane parallel to the optical axis;
  • Step 7.9 Perform a discrete inverse Fourier transform on the result obtained in step 7.8;
  • This method does not require scanning in order to achieve axial imaging, and a depth map of the sample to be measured can be obtained by one acquisition;
  • This method can eliminate mutual crosstalk between different levels and shield the projection of the blurred position.
  • FIG. 1 is a schematic diagram of an apparatus for a three-dimensional imaging method based on K-space transformation according to the present invention.
  • FIG. 1 is a schematic diagram of a three-dimensional imaging method based on K-space transformation.
  • a laser with a wavelength of 632.8 nm emitted by laser 1 passes through lens 2 to become a parallel light with a flat phase, and then passes through the light.
  • the beam splitting prism 3 with a ratio of 1: 1 splits the beam to produce two parallel beams of equal intensity, which are a detection beam and a reference beam, respectively.
  • the detection beam is focused by the cylindrical lens 4 into a sheet-shaped illumination light and passes through a microscope objective lens. 5.
  • the sample holder to be tested is controlled by a one-dimensional motorized stage 9, and the light in the reference optical path is split by a beam splitter and passed through After being reflected by the reflecting mirror 14, the sheet-shaped reference light is formed through the cylindrical lens 13, and after being reflected by the reflecting mirror 12, the reflected light irradiated on the sample holder 10 to be measured by the micro objective lens group 11 and the detection light passes through the beam splitting prism. 7. Record by the spot detector 5 and transfer the recorded data to the computer 6.
  • the laser (1) emits a laser with a wavelength of 632.8 nm and passes through the lens (2) to become a parallel beam.
  • the beam is split into a transmitted beam and a reflected beam by a first beam splitting prism (3) with a beam splitting ratio of 1: 1, that is, detection.
  • Light beam and reference light beam, the detection beam is focused by the first cylindrical lens (4) into sheet-like illumination light, and then passes through a second beam splitting prism (7) and a microscope objective lens (8) in order of 1: 1.
  • the thinner sheet-shaped illumination light condensed into a thin sheet is irradiated on the sample to be measured, and after being reflected by the sample to be measured, it returns to the original path, passes through the microscope objective lens (8), and enters the second beam splitting prism (7);
  • the reference beam After the reference beam is reflected by the second reflector (14), a sheet-shaped reference light is formed through the second cylindrical lens (13), and after being reflected by the first reflector (12), it passes through the microscope objective lens group (11) in order. ) And the second spectroscopic prism (7) are transmitted, and together with the detection beam reflected by the second spectroscopic prism (7), they are incident on the spot detector (5), and the computer (6) and the spot detector are respectively (5) Connected to the one-dimensional motorized stage (9).
  • the focal length of the first cylindrical lens 4 and the second cylindrical lens 13 is 40 mm
  • the linear distance between the cylindrical lens 4 and the microscope objective lens 8 is 48.83 mm
  • the microscope objective lens 8 is a 10x objective lens
  • the microscope objective lens 8 is clamped to the sample to be measured.
  • the linear distance of the detector 10 is 0.97mm
  • the resolution of the light spot detector 5 is 2048 pixels ⁇ 2048 pixels
  • the minimum unit is 5.5 ⁇ m.
  • the computer (6) controls the movement of the one-dimensional motorized stage (9), so that the sample to be measured is moved in a direction perpendicular to the optical axis according to a preset moving step l, and each time the movement is performed, the light spot detector collects and repeats the steps 3 , 4, 5 until moving n times, collect 3n scattered light spots;
  • the intensity of the light spot recorded by the radon spot detector is input into the computer, and the computer performs three-dimensional imaging of the sample to be measured.
  • the spot intensity recorded by the spot detector is input to a computer, and the computer uses the spot data to perform three-dimensional imaging of the sample to be measured.
  • a computer is used to calculate the 3n scattered light version recorded by the spot detector.
  • the calculation process is as follows:
  • Step 7.2 Read in the three scattered light spots recorded by the n-th movement of the one-dimensional motorized stage;
  • Step 7.3 Use the sum of the 3rd scattered light spot pattern of the nth time and the sum of the 1st and 2nd scattered light spot patterns of the nth time to make a difference;
  • Step 7.4 Perform a discrete Fourier transform on the image obtained in step 7.3, and then intercept the first-level spectrum and translate it to the center of the image;
  • Step 7.5 Perform inverse discrete Fourier transform on the image obtained in step 7.4, and then use the Fresnel propagation formula to propagate to the center plane of the sample, and the propagation distance is: D + L 1 + L 2 ;
  • Step 7.6 Perform a discrete Fourier transform on the image obtained in step 7.5;
  • Step 7.7 use the formula Obtain the corresponding position of the wavefront on the optical axis, where p is the axial position, m is the lateral position, n is the longitudinal position, ⁇ is the laser wavelength, ⁇ k x is the lateral spatial frequency, ⁇ k y is the longitudinal spatial frequency, and ⁇ k z Axial space frequency
  • Step 7.8 Move the corresponding amplitude and phase of the data (m, n) to (m, p), thereby projecting the wavefront to a plane parallel to the optical axis;
  • Step 7.9 Perform a discrete inverse Fourier transform on the result obtained in step 7.8;
  • the experimental results show that the device of the present invention successfully realizes three-dimensional imaging of the sample.
  • the device uses scanning to record 3n scattered light spots, and the computer calculates and displays the three-dimensional structural characteristics of the sample. This method is not limited to the size of the light spot detector. Less affected by the environment, the device has a simple structure, high measurement resolution, and fast imaging speed, which meets the requirements for three-dimensional inspection of optical components.

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Abstract

一种基于K空间变换的三维成像方法，该方法采用沿着光轴方向的片状光照明样品，利用相同的片状光源与该照明光发生干涉；记录干涉图并从中获得被照明的样品在焦平面的复振幅信息(包括振幅和相位)；样品的空间频谱信息可以通过离散傅里叶变换获得；然后利用投影法计算出垂直于样品平面的空间频谱信息；再通过离散逆傅里叶变换，获得垂直于样品平面的强度信息；最后通过扫描，获取最终的样品三维结构信息。该方法具有较高的采集速率和较高的分辨率，特别是对于获取轴向信息，只需单次采集，即可实现成像。

Description

基于K空间变换的三维成像装置及其成像方法 技术领域
本发明涉及三维成像领域，特别是一种基于K空间变换的三维成像装置及其成像方法。
背景技术
三维成像技术由于其广泛引用，已经有了飞速的发展。该技术在生物样品的观测，肿瘤诊断等方面有着极大的作用。有很多方法用在三维成像领域，例如结构光照明技术，共聚焦扫描，相干层析成像，片状照明显微成像和相干层析成像。这些技术都能够反应样品的内部结构，包括样品的反射率，发光材料浓度等信息。结构光三维成像技术,利用一个载频条纹的照明光照射物体,记录形变后的条纹,再从获取的变形条纹图中数字解调重建出被测物体的三维图像，用这种方法能够消除离焦部分的阴影影响。应用最为广泛的三维成像技术是共聚焦扫描技术。该技术利用针孔阻断离焦部分光的通过，从而让消除离焦样品阴影的影响，但是该技术由于需要使用逐点扫描来成像，因此采集数据部分需要花费大量的时间。光学相干层析技术可以利用光栅和二维扫描振镜，能够实现高的横向和纵向分辨率。片状光照明显微技术采用一个片状光源照射样品，同时在垂直于光路的方向采集反射光，由于照明光为一个片状光，因此采集到的反射光即为样品的轴向分布。由于照明***和采集***不是共轴***，因此该技术在实现上具有一定难度。本专利所提出的方法具有高的成像速率，空间分辨率，并且结构简单，易于搭建组装。
发明内容
本发明的目的是克服上述现有技术不足，提供一种三维成像方法，具有高的成像速率，高分辨率，并且结构简单，易于搭建组装。
为解决上述问题，本发明的技术方案如下：
一种基于K空间变换的三维成像装置，其特点在于：包括激光器、透镜、第一分光棱镜、第一柱透镜、光斑探测器、计算机、第二分光棱镜、显微物镜、供待测样品放置的一维电动位移台、夹持器、显微物镜组、第一反射镜、第二柱透、第二反射镜。
上述元件的位置关系如下：
所述激光器(1)发出激光经过透镜(2)成为一束平行光，通过第一分光棱镜(3)分束为透射光束和反射光束，即探测光束和参考光束，所述的探测光束经第一柱透镜(4)聚焦成为片状照明光，并依次经第二分光棱镜(7)和显微物镜(8)汇聚成片状更细的片状照明光照射在待测样品上，经待测样品反射后，原路返回，经显微物镜(8)透射后入射到第二分光棱镜(7)；
所述的参考光束经第二反射镜(14)反射后，通过第二柱透镜(13)形成片状参考光，并由第一反射镜(12)反射后，依次经显微物镜组(11)和第二分光棱镜(7)透射后，与经第二分光棱镜(7)反射的探测光束共同入射到光斑探测器(5)，所述的计算机(6)分别与所述的光斑探测器(5)和一维电动位移台(9)相连。
利用所述的基于K空间变换的三维成像装置对待测样品进行三维成像的方法，其特点在于，该方法包括以下步骤：
①以激光器发出激光为光轴，将待测样品固定在所述一维电动位移台上，由一维电动位移台控制送入光路中，使待测样品垂直于探测光束入射方向，同时，确保各个光学元件与探测光束垂直且中心保持在光轴上；
②测量待测样品到第二分光棱镜(7)的距离L 1,第二分光棱镜(7)到光斑探测器(5)靶面的距离L 2，以及第二分光棱镜(7)的宽度D；
③遮挡住参考光路，保留探测光路，用光斑探测器记录第1幅散射光斑；
④遮挡住探测光路，保留参考光路，用光斑探测器记录第2幅散射光斑；
⑤保留探测光路与参考光路，用光斑探测器记录第3幅散射光斑；
⑥计算机(6)控制所述的一维电动位移台(9)的移动，使待测样品按照预设移动步长l沿垂直于光轴方向移动，每移动一次，光斑探测器采集重复步骤③、④、⑤直至移动n次，采集3n幅散射光斑；
⑦光斑探测器记录的光斑强度分别输入计算机，由计算机进行待测样品的三维成像。
光斑探测器记录的光斑强度分别输入计算机，由计算机利用光斑数据进行待测样品的三维成像。
利用计算机对光斑探测器记录的3n幅散射光版进行计算，计算过程具体如下：
步骤7.1、令n＝1；
步骤7.2、读入一维电动位移台移动第n次所记录的3幅散射光斑；
步骤7.3、用第n次的第3幅散射光斑图与第n次的第1幅和第2幅散射光斑图之和做差；
步骤7.4、对步骤7.3得到的图像做离散傅里叶变换，然后截取1级频谱，并平移至图像中心处；
步骤7.5、对步骤7.4得到的图像做离散逆傅里叶逆变换，然后利用菲涅尔传播公式传播至样品中心平面，其传播距离为：D+L 1+L 2；
步骤7.6、对步骤7.5得到的图像做离散傅里叶变换；
步骤7.7、利用公式
Figure PCTCN2018114488-appb-000001
获取波前在光轴上的对应位置，其中，p为轴向位置，m为横向位置，n为纵向位置，λ为激光波长，Δk x为横向空间频率，Δk y为纵向空间频率，Δk z轴向空间频率；
步骤7.8、将数据(m,n)处对应的振幅和相位移动至(m,p)处，从而将波前投影至平行于光轴的平面；
步骤7.9、对步骤7.8得到的结果做离散逆傅里叶变换；
步骤7.10、令n＝n+1，重复步骤7,2到步骤7.9直至电动位移台移动n次，最终得到的三维数据组，即是待测样品的三维信息。
与现有技术相比，本发明的技术效果：
(1)该方法在实现轴向成像是不需要扫描，可通过一次采集得到待测样品的深度图；
(2)该方法满足同轴成像，因此光路简单，设备稳定性高；
(3)该方法能够消除不同层级之间的相互串扰，屏蔽模糊位置的投影。
(4)成本低于现有常用的光学相干层析等方法，在光学元器件检测领域有着十分广阔的市场前景。
附图说明
为了更清楚的说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本发明基于K空间变换的三维成像方法的装置示意图。
图中：1-激光器，2-透镜，3-第一分光棱镜，4-第一柱透镜，5-光斑探测器，6-计算机，7-分光棱镜，8-显微物镜，9-供待测样品放置的一维电动位移台，10-夹持器，11-显微物镜组，12-第一反射镜，13-第二柱透镜，14-第二反射镜，待测样品夹持器9到第二分光棱镜7的直线距离为L 1,第二分光棱镜7到光斑探测器靶面的直线距离为L 2，第二分光棱镜宽度为D。
具体实施方式
下面结合实施例和附图对本发明作进一步说明，但不应以此实施例限制本发明的保护范围。
请先参与图1，图1是基于K空间变换的三维成像方法的装置示意图，如图所示，激光器1发出波长为632.8nm的激光经过透镜2成为一束相位平整的平行光，再通过分光比为1:1的分光棱镜3对该光束分束，产生强度相等的两束平行光，分别为探测光束和参考光束，其中探测光束通过柱透镜4聚焦成为片状照明光并通过显微物镜5，汇聚成片状更细的片状照明光并照射在待测样品夹持器10上；待测样品夹持器由一维电动位移台控制9，参考光路的光由分光棱镜分光后通过反射镜14反射后，通过柱透镜13，形成片状参考光，并由反射镜12反射后，通过显微物镜组11与探测光照射在待测样品夹持器10的反射光共同经过分光棱镜7，由光斑探测器5记录，并将记录数据传递至计算机6。
所述激光器(1)发出波长为632.8nm激光经过透镜(2)成为一束平行光，通过分束比为1：1的第一分光棱镜(3)分束为透射光束和反射光束，即探测光束和参考光束，所述的探测光束经第一柱透镜(4)聚焦成为片状照明光，并依次经分束比为1：1的第二分光棱镜(7)和显微物镜(8)汇聚成片状更细的片状照明光照射在待测样品上，经待测样品反射后，原路返回，经显微物镜(8)透射后入射到第二分光棱镜(7)；
所述的参考光束经第二反射镜(14)反射后，通过第二柱透镜(13)形成片状参考光，并由第一反射镜(12)反射后，依次经显微物镜组(11)和第二分光棱镜(7)透射后，与经第二分光棱镜(7)反射的探测光束共同入射到光斑探测器(5)，所述的计算机(6)分别与所述的光斑探测器(5)和一维电动位移台(9)相连。
第一柱透镜4和第二柱透镜13的焦距为40mm,柱透镜4距离显微物镜8的直线距离为48.83mm,显微物镜8为10倍物镜，显微物镜8到待测样品夹持器10的直线距离为0.97mm，光斑探测器5的分辨率为2048像素×2048像素，最小单元为5.5μm,一维电动位移台每移动一次，光斑探测器记录3幅散射光斑，分别为挡住参考光，保持探测光，挡住探测光，保持参考光，同时保持探测光和参考光这三种情况下记录到的散射图。一维电动位移台共移动200次，每次移动精度为5.5μm,分别输入计算机进行计算。
利用该装置进行三维成像，步骤如下：
①以激光器发出激光为光轴，将待测样品固定在所述一维电动位移台上，由一维电动位移台控制送入光路中，使待测样品垂直于探测光束入射方向，同时，确保各个光学元件与探测光束垂直且中心保持在光轴上；
②测量待测样品到第二分光棱镜(7)的距离L 1,第二分光棱镜(7)到光斑探测器(5)靶面的距离L 2，以及第二分光棱镜(7)的宽度D；
③遮挡住参考光路，保留探测光路，用光斑探测器记录第1幅散射光斑；
④遮挡住探测光路，保留参考光路，用光斑探测器记录第2幅散射光斑；
⑤保留探测光路与参考光路，用光斑探测器记录第3幅散射光斑；
⑥计算机(6)控制所述的一维电动位移台(9)的移动，使待测样品按照预设移动步长l沿垂直于光轴方向移动，每移动一次，光斑探测器采集重复步骤③、④、⑤直至移动n次，采集3n幅散射光斑；
⑦光斑探测器记录的光斑强度分别输入计算机，由计算机进行待测样品的三维成像。
光斑探测器记录的光斑强度分别输入计算机，由计算机利用光斑数据进行待测样品的三维成像。
利用计算机对光斑探测器记录的3n幅散射光版进行计算，计算过程具体如下：
步骤7.1、令n＝1；
步骤7.2、读入一维电动位移台移动第n次所记录的3幅散射光斑；
步骤7.3、用第n次的第3幅散射光斑图与第n次的第1幅和第2幅散射光斑图之和做差；
步骤7.4、对步骤7.3得到的图像做离散傅里叶变换，然后截取1级频谱，并平移至图像中心处；
步骤7.5、对步骤7.4得到的图像做离散逆傅里叶逆变换，然后利用菲涅尔传播公式传播至样品中心平面，其传播距离为：D+L 1+L 2；
步骤7.6、对步骤7.5得到的图像做离散傅里叶变换；
步骤7.7、利用公式
Figure PCTCN2018114488-appb-000002
获取波前在光轴上的对应位置，其中，p为轴向位置，m为横向位置，n为纵向位置，λ为激光波长，Δk x为横向空间频率，Δk y为纵向空间频率，Δk z轴向空间频率；
步骤7.8、将数据(m,n)处对应的振幅和相位移动至(m,p)处，从而将波前投影至平行于光轴的平面；
步骤7.9、对步骤7.8得到的结果做离散逆傅里叶变换；
步骤7.10、令n＝n+1，重复步骤7,2到步骤7.9直至电动位移台移动n次，最 终得到的三维数据组，即是待测样品的三维信息。
实验结果表明，本发明装置成功实现了样品的三维成像，该装置利用扫描的方式，记录3n幅散射光斑，由计算机计算显示出样品的三维结构特征，该方法不受限于光斑探测器尺寸，受环境影响较小，装置结构简单，测量分辨率高，成像速度快，满足于光学元器件的三维检测的要求。

Claims (6)

  1. 一种基于K空间变换的三维成像装置，其特征在于：包括激光器(1)、透镜(2)、第一分光棱镜(3)、第一柱透镜(4)、光斑探测器(5)、计算机(6)、第二分光棱镜(7)、显微物镜(8)、供待测样品放置的一维电动位移台(9)、夹持器(10)、显微物镜组(11)、第一反射镜(12)、第二柱透镜(13)、第二反射镜(14)；
    上述元件的位置关系如下：
    所述激光器(1)发出激光经过透镜(2)成为一束平行光，通过第一分光棱镜(3)分束为透射光束和反射光束，即探测光束和参考光束，所述的探测光束经第一柱透镜(4)聚焦成为片状照明光，并依次经第二分光棱镜(7)和显微物镜(8)汇聚成片状更细的片状照明光照射在待测样品上，经待测样品反射后，原路返回，经显微物镜(8)透射后入射到第二分光棱镜(7)；
    所述的参考光束经第二反射镜(14)反射后，通过第二柱透镜(13)形成片状参考光，并由第一反射镜(12)反射后，依次经显微物镜组(11)和第二分光棱镜(7)透射后，与经第二分光棱镜(7)反射的探测光束共同入射到光斑探测器(5)，所述的计算机(6)分别与所述的光斑探测器(5)和一维电动位移台(9)相连。
  2. 根据权利要求1所述的基于K空间变换的三维成像装置，其特征在于：还包括夹持器(10)，该夹持器(10)由一维电动位移台(9)控制，用于固定待测样品。
  3. 利用权利要求1或2所述的基于K空间变换的三维成像装置对待测样品进行三维成像的方法，其特征在于，该方法包括以下步骤：
    ①以激光器发出激光为光轴，将待测样品固定在所述一维电动位移台上，由一维电动位移台控制送入光路中，使待测样品垂直于探测光束入射方向，同时，确保各个光学元件与探测光束垂直且中心保持在光轴上；
    ②测量待测样品到第二分光棱镜(7)的距离L 1,第二分光棱镜(7)到光斑探测器(5)靶面的距离L 2，以及第二分光棱镜(7)的宽度D；
    ③遮挡住参考光路，保留探测光路，用光斑探测器记录第1幅散射光斑；
    ④遮挡住探测光路，保留参考光路，用光斑探测器记录第2幅散射光斑；
    ⑤保留探测光路与参考光路，用光斑探测器记录第3幅散射光斑；
    ⑥计算机(6)控制所述的一维电动位移台(9)的移动，使待测样品按照预设移动步长l沿垂直于光轴方向移动，每移动一次，光斑探测器采集重复步骤③、④、⑤直至移动n次，采集3n幅散射光斑；
    ⑦光斑探测器记录的光斑强度分别输入计算机，由计算机进行待测样品的三维成像。
  4. 根据权利要求3所述的三维成像方法，其特征在于，所述步骤⑦，利用计算机对光斑探测器记录的3n幅散射光斑进行三维成像，具体步骤如下：
    步骤7.1、令n＝1；
    步骤7.2、读入一维电动位移台移动第n次所记录的3幅散射光斑；
    步骤7.3、用第n次的第3幅散射光斑图与第n次的第1幅和第2幅散射光斑图之和做差；
    步骤7.4、对步骤7.3得到的图像做离散傅里叶变换，然后截取1级频谱，并平移至图像中心处；
    步骤7.5、对步骤7.4得到的图像做离散逆傅里叶逆变换，然后利用菲涅尔传播公式传播至样品中心平面，其传播距离为：D+L 1+L 2；
    步骤7.6、对步骤7.5得到的图像做离散傅里叶变换；
    步骤7.7、利用公式
    Figure PCTCN2018114488-appb-100001
    获取波前在光轴上的对应位置，其中，p为轴向位置，m为横向位置，n为纵向位置，λ为激光波长，Δk x为横向空间频率，Δk y为纵向空间频率，Δk z轴向空间频率；
    步骤7.8、将数据(m,n)处对应的振幅和相位移动至(m,p)处，从而将波前投影至平行于光轴的平面；
    步骤7.9、对步骤7.8得到的结果做离散逆傅里叶变换；
    步骤7.10、令n＝n+1，重复步骤7,2到步骤7.9直至电动位移台移动n次，最终得到的三维数据组，即是待测样品的三维信息。
  5. 根据权利要求3或4所述的三维成像方法，其特征在于，所述的预设移动步长l的范围为1μm-10μm。
  6. 根据权利要求3或4所述的三维成像方法，其特征在于，所述的一维电动位移台移动次数n的范围为300-500次。
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111855544A (zh) * 2020-07-31 2020-10-30 洹仪科技(上海)有限公司 一种荧光成像装置及其成像方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101324422A (zh) * 2007-06-12 2008-12-17 西安普瑞光学仪器有限公司 白光干涉测量样品表面形状精细分布的方法及其装置
CN101963582A (zh) * 2010-09-13 2011-02-02 深圳大学 一种三维荧光纳米显微成像方法、***及成像设备
CN102460129A (zh) * 2009-06-22 2012-05-16 Asml荷兰有限公司 物体检查***和方法
CN102628799A (zh) * 2012-04-25 2012-08-08 中国科学院上海光学精密机械研究所 无需深度扫描的时域光学相干层析成像方法与***
US20150022881A1 (en) * 2013-07-22 2015-01-22 Universitat Politecnca De Catalunya Light sheet-based imaging device with extended depth of field
CN104956202A (zh) * 2012-10-30 2015-09-30 宾夕法尼亚州研究基金会 3d激光消融层析成像和光谱分析

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101324422A (zh) * 2007-06-12 2008-12-17 西安普瑞光学仪器有限公司 白光干涉测量样品表面形状精细分布的方法及其装置
CN102460129A (zh) * 2009-06-22 2012-05-16 Asml荷兰有限公司 物体检查***和方法
CN101963582A (zh) * 2010-09-13 2011-02-02 深圳大学 一种三维荧光纳米显微成像方法、***及成像设备
CN102628799A (zh) * 2012-04-25 2012-08-08 中国科学院上海光学精密机械研究所 无需深度扫描的时域光学相干层析成像方法与***
CN104956202A (zh) * 2012-10-30 2015-09-30 宾夕法尼亚州研究基金会 3d激光消融层析成像和光谱分析
US20150022881A1 (en) * 2013-07-22 2015-01-22 Universitat Politecnca De Catalunya Light sheet-based imaging device with extended depth of field

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PANT, S. ET AL.: "Line Scan Focal Modulation Microscopy for In-Vivo Imaging of Zebrafish", 2014 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP), 11 November 2014 (2014-11-11), pages 1 - 2, XP033537953 *
WU, DI ET AL.: "A rotating-mirror scanning camera system for light-sheet microscopy", 2015 OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC), 28 June 2015 (2015-06-28), pages 1 - 3, XP032823994, DOI: 10.1109/OECC.2015.7340343 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111855544A (zh) * 2020-07-31 2020-10-30 洹仪科技(上海)有限公司 一种荧光成像装置及其成像方法

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