WO2020011262A1 - 机械刮刀装置和机械刮除式除膜设备 - Google Patents

机械刮刀装置和机械刮除式除膜设备 Download PDF

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Publication number
WO2020011262A1
WO2020011262A1 PCT/CN2019/095862 CN2019095862W WO2020011262A1 WO 2020011262 A1 WO2020011262 A1 WO 2020011262A1 CN 2019095862 W CN2019095862 W CN 2019095862W WO 2020011262 A1 WO2020011262 A1 WO 2020011262A1
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WO
WIPO (PCT)
Prior art keywords
scraper
mechanical
blade
knife holder
scraper device
Prior art date
Application number
PCT/CN2019/095862
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English (en)
French (fr)
Inventor
丁阳
Original Assignee
北京铂阳顶荣光伏科技有限公司
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Publication of WO2020011262A1 publication Critical patent/WO2020011262A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/16—Rigid blades, e.g. scrapers; Flexible blades, e.g. wipers
    • B08B1/165—Scrapers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present disclosure relates to the field of film removing equipment, and in particular, to a mechanical scraper device and a mechanical scraping type film removing equipment.
  • the present disclosure provides a mechanical doctor blade device and a mechanical doctor blade-type film removing device including the same.
  • the present disclosure provides a mechanical scraper device that includes a scraper mechanism
  • the scraper mechanism includes: a knife holder base; a scraper unit rotatably mounted on the knife holder base; and the scraper unit has a cutting edge in contact with a surface to be processed.
  • the present disclosure also provides a mechanical scraping type film removing device, which includes any one of the mechanical scraper devices described above;
  • a moving mechanism is used to drive the mechanical scraper device to move in a direction of a surface of the substrate with respect to the support structure.
  • the scraper unit can rotate relative to the knife holder base under a reaction force applied from the processed surface to the blade, So that the blade edge is in contact with the surface to be processed. Therefore, during the scraping film removal process, the blade edge can adaptively follow the shape of the surface being processed, ensuring that the blade edge is always completely in close contact (fitting) with the surface being processed, so that no residual film will occur. To ensure the quality of the film.
  • FIG. 1 is a schematic perspective view of a mechanical scraper device provided in Embodiment 1 of the present disclosure
  • FIG. 2 is a schematic side view of a mechanical scraper device that is performing a film removing operation according to Embodiment 1 of the present disclosure
  • FIG. 3 is a schematic perspective view of a mechanical scraper device provided in Embodiment 2 of the present disclosure.
  • FIG. 4 is a schematic partial plan view of a mechanical scraper device viewed from above the tool post rod along an axial direction of the tool post rod provided in Embodiment 3 of the present disclosure;
  • FIG. 5a and 5b are schematic diagrams showing the influence of substrate deformation on the film removal process in a conventional mechanical scraping film removal device, wherein FIG. 5a is a schematic diagram of a film removal state when the substrate is not deformed, and FIG. 5b is Schematic diagram of the film removal state when the substrate is deformed;
  • FIG. 5c and 5d are schematic diagrams showing the influence of the blade installation accuracy on the film removal process in a conventional mechanical scraper film removal device, wherein FIG. 5c is a schematic diagram of a film removal state when the blade is installed accurately, and FIG. 5d It is a schematic diagram of the state of film removal when the doctor blade is installed at an angle.
  • the mechanical scraping type film removing equipment mostly adopts a rigid fixed structure, that is, the scraper and the tool holder structure are completely rigid mechanical connections.
  • the scraper blade 13 " is fixed on the blade holder 12"
  • the blade holder 12 " is driven by a driving mechanism (not shown) rigidly connected thereto, so that the blade blade 13" is pressed against the substrate with a predetermined pushing force.
  • the tool holder 12" and the driving mechanism are moved along the substrate surface 50 "by the movement mechanism, so as to scrape the film layer on the substrate surface 50" by the blade of the scraper 13 ".
  • the blade of the scraper 13 "and the substrate surface 50" should be completely and closely fitted.
  • the substrate itself may deform (as shown in Figure 5b),
  • the support platform of the substrate is tilted, and the blade holder mechanism is not installed vertically enough, which causes the blade edge to be not parallel to the surface of the substrate 50 ", and cannot be closely fitted when scraping; or, it causes installation errors when replacing the blade 13", It also causes the blade to be non-parallel to the substrate (as shown in Figure 5d), and the two cannot be closely adhered during scraping. This leads to the phenomenon of film residue, blade damage or substrate scratching when scraping the film.
  • the embodiments of the present disclosure provide a mechanical scraper device and a mechanical scraping type film removing device, which are used to improve the tightness of the contact between the blade and the surface being processed, so as to avoid the residue of the film layer when the film layer is scraped off. Damage or scratching of the substrate, thereby improving the quality of the film removal.
  • FIG. 1 is a schematic perspective view of a mechanical scraper device provided in Embodiment 1 of the present disclosure.
  • FIG. 2 is a schematic side view of a mechanical scraper device undergoing a film removing operation according to Embodiment 1 of the present disclosure.
  • the mechanical scraper device includes a scraper mechanism 10 and a pressing mechanism 20.
  • the scraper mechanism 10 includes a knife holder base 11 and a scraper unit 14.
  • the doctor blade unit 14 has a blade 131 (suitable) that is in contact with the processed surface 50 (see FIG. 2) of the substrate. More specifically, in this embodiment, the doctor blade unit 14 further includes a knife holder 12 and a doctor blade 13. The doctor blade 13 is mounted on the knife holder 12, and the blade 131 is located at an end of the doctor blade 13.
  • the pressing mechanism 20 is used to move the doctor blade mechanism 10 to attach the blade 131 of the doctor blade mechanism 10 (specifically, the blade 131 of the doctor blade 13 in the doctor blade unit 14 in the doctor blade mechanism 10) to the surface 50 to be processed.
  • the blade holder and the scraper are integrally formed in the present disclosure, and the blade holder and the scraper may also be formed by being fixedly connected. It is not specifically limited here.
  • the blade may be part of a scraper.
  • the scraper unit 14 (specifically, the blade holder 12 in the scraper unit 14) is rotatably mounted on the blade holder base 11.
  • the scraper unit 14 (the blade holder 12 and the scraper 13) can move toward the processed surface 50.
  • the reaction force applied by the blade 131 automatically rotates relative to the blade base 11. For example, as shown in FIG. 2, if the blade 131 is not parallel to the processed surface 50 due to the installation error of the scraper, and the left side of the blade 131 is slightly higher, the right part of the blade 131 will first contact and push with a larger force.
  • the structure of this embodiment enables the blade edge 131 to adaptively follow the shape of the surface 50 to be processed, ensuring that the blade edge 131 is always completely in close contact with the surface 50 to be processed, so that no residual film layer occurs, ensuring removal Membrane quality.
  • the installation accuracy of each component is also reduced, and the installation time is saved.
  • the mechanical scraper device of this embodiment may further include a mounting substrate 40 and a guide rail 30.
  • the mounting substrate 40 serves as a mounting basis for the mechanical scraper device;
  • the guide rail 30 is mounted on the mounting substrate 40 or is integrally formed on the mounting substrate 40, and the guide rail 30 moves the moving direction of the scraper mechanism 10 along the pushing mechanism 20 (in this embodiment, Vertical direction).
  • the tool post base 11 has a chute structure that cooperates (slid-fits) with the guide rail 30 so that it can slide relative to the guide rail 30 as a slider. By setting the guide rail, the movement of the tool post base 11 is made more stable and accurate. It can be understood that the number of the guide rails 30 may be one as shown in FIG. 1, or two or more, so as to further enhance stability.
  • the tool post base 11 may include a tool post base body 112 and a tool post connection base 111.
  • the knife holder connection base 11 is fixed on the knife holder base body 112.
  • a bearing (not shown) is provided inside the tool post connection base 111.
  • the blade holder 12 includes a blade holder rod 121.
  • the tool post rod 121 is a cylindrical rod (the tool post rod may also have other shapes), which penetrates into the tool post connection base 111 and rotates to cooperate with a bearing in the tool post connection base 111.
  • the squeegee unit 14 is rotatably mounted on a bearing in the turret connection base 111 of the turret base 11 of the squeegee mechanism 10 through the turret rod 121 on the turret 12 of the squeegee mechanism 10. Therefore, the vertical axis (central axis) of the tool post lever 121 is the rotation axis of the tool post 12 (that is, the rotation axis of the scraper unit 14, the tool post lever 121, and the scraper 13).
  • the longitudinal axis of the blade holder lever 121 may be inclined with respect to the direction (vertical downward direction) in which the pressing mechanism 20 pushes the scraper mechanism 10.
  • the tilt angle may be in a range of 20 ° to 80 °, and preferably in a range of 45 ° to 70 °. In this embodiment, the tilt angle is 60 °.
  • a structure for restricting the axial movement of the tool post rod 121 may be provided in the tool post rod 121 and / or the tool post connecting base 111 to prevent the tool post lever 121 from falling out of the tool post connecting base 111.
  • the installation manner of the scraper blade 13 on the blade holder 12 in the present disclosure is not particularly limited.
  • the scraper blade 13 may be mounted on the bottom of the blade holder 12 by screws (not shown).
  • the material of the scraper 13 may be a tool alloy steel, and the material requirement is that the hardness is greater than the hardness of the film to be scraped, but smaller than the hardness of the metal (such as metal Mo) to be retained.
  • the tool holder base body 112 may be T-shaped, and the chute structure slidingly fitted with the guide rail 20 is formed on the narrow end side of the T-shape (left side in FIG. 2). Both the frame connecting base 111 and the scraper unit 14 are provided on the wide end side (the right side in FIG. 2) of the blade base base body 112.
  • the shape of the main body of the tool holder base may also be other shapes.
  • the main body of the tool holder base is a plate-like structure, and the plate-like structure has a sliding groove to facilitate sliding connection with the guide rail.
  • the mechanical scraper device may further include a biasing mechanism for applying a bias toward the reference position to the scraper unit when the scraper unit deviates from the reference position due to rotation relative to the blade base. pressure.
  • the biasing mechanism includes two springs (or elastic top wires) 31 provided between the blade holder base body 112 and the scraper unit 14. Two springs 31 are optionally disposed between the tool post base body 112 and the tool post 12, are parallel to each other, and are arranged in a direction perpendicular to the axial direction of the tool post lever 121. The purpose of the biasing mechanism is to prevent the inclination angle of the scraper blade 13 from being out of control, and to reduce undesired vibrations.
  • the scraper unit 14 when the blade 131 is not in contact with the surface to be processed 50, the scraper unit 14 is at a reference position relative to the tool holder base 11, and at this time, neither of the two springs 31 exerts a force on the scraper unit 14 (tool holder 12). Or the moments applied to the scraper unit 14 cancel each other, so this position is also referred to as a balanced position.
  • both springs 31 apply the scraper unit 14 toward the reference position (ie, The biasing force that returns the scraper unit 14 to the reference position).
  • the number of the springs (or elastic top wires) 30 is not limited to two, and the arrangement manner is not limited to be arranged in a direction perpendicular to the axial direction of the tool post rod 121.
  • the two springs 31 may be arranged in an angle (for example, an angle less than 90 ° and greater than 60 °) with the axial direction of the tool post rod 121; or, four elastic top wires (or springs) may be provided, respectively It is arranged between the four corners of the blade holder 12 and the blade holder base body 112.
  • three elastic top wires (or springs) may also be provided and arranged on the blade holder 12 in an isosceles triangle or an equilateral triangle.
  • the tool holder base body 112; or, the biasing mechanism may be composed of a combination of a plurality of springs and a plurality of elastic top wires.
  • the pressing mechanism 20 may include a pressing source 21 and a pressing rod 22.
  • the pressing source 21 is fixed on the mounting substrate 40.
  • the push rod 22 is connected to the knife holder base 11 and can move in the up and down direction under the driving of the pressing source 21, thereby pushing the scraper mechanism 10 downward and lifting the scraper mechanism 10 upward.
  • the bottom of the push rod 22 is connected to the top of the tool holder base body 112, and the tool holder base 11 moves correspondingly along the guide rail 30 under the push and pull action of the push rod 22.
  • the pressing source 21 may be a cylinder, a hydraulic cylinder, a motor (for example, a servo motor), or the like. Considering the economics of the device, it is preferable to use a cylinder.
  • the intake air volume of the cylinder can be controlled by a proportional valve or the like, thereby achieving stable control of the pressure.
  • the push rod 22 may be a piston rod driven by a piston in the cylinder accordingly.
  • the push rod 22 may be a screw rod or a screw rod, and the push rod 22 may be screwed into a threaded hole at the top of the tool holder base body 112, and the push rod 22 is driven by the motor 21 Rotate to make the tool holder base body 112 move along the guide rail 30 accordingly.
  • this embodiment also provides a mechanical scraping type film removing device that implements a film removing process.
  • the device includes the mechanical scraper device described above; further includes: a support portion and a moving mechanism; wherein, the support portion It is used to support a substrate having a film layer to be removed on its surface, such as the substrate (generally a glass substrate) having a metal electrode and a film layer to be removed covered on the metal electrode described above.
  • the supporting portion may be a supporting platform, a high-precision workbench, and the like, for supporting the substrate.
  • the supporting portion usually supports the substrate in parallel with the horizontal plane, but may also support the substrate in other directions according to design requirements.
  • the moving mechanism is used to drive the mechanical squeegee device to move in the direction of the substrate surface relative to the support portion (horizontal movement when the substrate surface is horizontal). Generally, the moving mechanism moves the mechanical scraper device while the support portion remains stationary, but it can also be reversed. The moving mechanism only moves the support portion without moving the mechanical scraper device.
  • the moving mechanism may be, for example, a servo motor.
  • the support portion may be provided with a chute.
  • the support portion may serve as a slider that slides along the chute, and is driven by the servo motor to move along the chute at a predetermined scraping speed.
  • Example 1 An exemplary film removing process performed by using the mechanical scraping type film removing apparatus in Example 1 will be briefly described.
  • a substrate covered with a film to be scraped is fixed on a support platform. Then, after the doctor blade is aligned with the starting position of the film removal of the substrate, the mechanical doctor device is turned on.
  • the control software issues a command to send compressed air into the cylinder through a proportional valve.
  • the piston in the cylinder descends, pushing the piston rod, and the piston rod pushes the scraper mechanism at the lower part of the cylinder to move down the guide rail, pressing the scraper to completely contact the lower substrate. Because the scraper can rotate with the blade holder, the blade of the scraper can automatically adapt to the deformation of the substrate during the pressing process, so that the blade and the processed surface of the substrate are kept completely in close contact at all times.
  • the moving mechanism drives the mounting substrate to move horizontally for a predetermined length, the air cylinder deflates and retracts, the scraper lifts up and leaves the surface of the substrate, and the process ends.
  • FIG. 3 is a schematic perspective view of a mechanical scraper device provided in Embodiment 2 of the present disclosure.
  • the same components as those in Embodiment 1 are assigned the same reference numerals.
  • the mechanical scraper device of this embodiment is different from the mechanical scraper device of Embodiment 1 in that in this embodiment, the knife holder connection base 111 'includes a knife holder connection base rod 121'; the knife holder connection base rod 121 '; It is a cylindrical rod and is fixedly connected to the knife holder connection base 111 '. Accordingly, a bearing is provided inside the tool holder 12 ', and the tool holder connection seat bar 121' can be rotatably fitted with the bearing.
  • the scraper unit 14 ' is rotatably mounted on the knife holder connection seat rod 121' of the knife holder connection seat 111 'of the knife holder base 11' through a bearing inside the knife holder 12 '.
  • the vertical axis (central axis) of the blade holder connection base 111 ' is the rotation axis of the blade holder 12' (that is, the rotation axis of the blade unit 14 'and the blade 13).
  • the longitudinal axis of the knife holder connection seat bar 121 ' can also be inclined at an angle with respect to the direction (vertical downward direction) in which the pushing mechanism 20 pushes the scraper mechanism 10'.
  • a structure that restricts the axial movement of the tool post connection seat bar 121 ' may be provided in the tool post 12' to prevent the tool post 12 'from being separated from the tool post connection seat 121'.
  • the connection manner of the biasing mechanism and the scraper unit 14 ' may be the same as that of the first embodiment.
  • FIG. 4 is a schematic partial plan view of a mechanical scraper device according to Embodiment 3 of the present disclosure.
  • the same components as those in Embodiment 1 are assigned the same reference numerals.
  • the mechanical scraper device of this embodiment is different from the mechanical scraper device in Embodiment 1 in that the mechanical scraper device does not use a spring or an elastic top wire as a biasing mechanism, but uses a blade holder 121 connected to the blade holder.
  • the coil spring 32 between the seats 111 serves as a biasing mechanism.
  • the coil spring 32 may be disposed on a surface of the blade holder connecting base 111 away from the scraper 13. As shown in FIG. 4, the inner end 32 b of the coil spring 32 is connected to the side surface of the blade holder lever 121, and the outer end 23 a of the coil spring 32 is connected to the surface of the blade holder connection base 111.
  • connection manner of the coil spring 32 with the tool holder lever 121 and the tool holder connection base 111 is not specifically limited.
  • the inner end 32b of the coil spring 32 is directly adhered to the side of the blade holder lever 121, and the outer end 23a of the coil spring 32 is provided in a hook form on a pin on the surface of the blade holder connection base 111.
  • the coil spring 32 in this embodiment may also be provided on the surface of the side of the knife holder connection base 111 close to the scraper 13 or near a bearing in the knife holder connection base 111, or in multiple places. Multiple coil springs are provided at each position, or used in combination with the spring or elastic top wire in the first embodiment.
  • the biasing mechanism in this embodiment can be similarly applied in Embodiment 2.
  • the mechanical scraper device of Embodiment 2 does not use a spring or an elastic top wire as a biasing mechanism, but uses a coil spring 32 connected between the blade holder connection seat rod 121 'and the blade holder 12' as a biasing device. ⁇ ⁇ Pressure mechanism.
  • the connection method of the coil spring 32 between the tool post connecting seat rod 121 'and the tool post 12' may be similar to the connection method of the coil spring 32 between the tool post lever 121 and the tool post connecting seat 111.
  • the present disclosure also provides a mechanical scraper device, the mechanical scraper device includes a scraper mechanism, the scraper mechanism includes a knife holder base, a scraper unit rotatably mounted on the knife holder base, and a scraper unit It has a cutting edge in contact with the surface to be processed.
  • the structures of the scraper unit and the blade holder base are the same as those of the scraper mechanism provided in Embodiment 1, Embodiment 2, and Embodiment 3.
  • the scraper unit 14 includes: a blade holder 12, a scraper blade 13, and a blade 131 at an end of the blade 13;
  • the blade holder base 11 may include a blade holder base body 112 and a blade holder connection base 111;
  • the tool post 12 includes a tool post 121.
  • the connection relationship between the above components and the installation position of each component are the same as those of the first embodiment.
  • FIG. 1 the scraper unit 14 includes: a blade holder 12, a scraper blade 13, and a blade 131 at an end of the blade 13;
  • the blade holder base 11 may include a blade holder base body 112 and a blade holder connection base 111;
  • the tool post 12 includes a tool post 121.
  • the connection relationship between the above components and the installation position of each component are the same as those of the first embodiment.
  • the scraper unit 14 ′ includes: a blade holder 12 ′, a scraper 13, and a blade 131 at an end of the blade 13; the blade holder base 11 ′ may include a blade holder base body 112 and a blade holder.
  • Each component in the scraper mechanism is the same as that described in the second embodiment. The same points are not repeated.
  • the manner in which the blade holder in the scraper unit is rotatably mounted on the blade holder base is the same as that of Embodiment 1, Embodiment 2, and Embodiment 3.
  • the scraper unit can be rotated relative to the base of the blade holder, so that when a pressure is applied to the scraper unit by an external force, so that the blade of the scraper unit fits on the surface to be processed,
  • the blade can move adaptively with respect to the surface being processed, ensuring that the blade is always completely in close contact (fitting) with the surface being processed, so that no film residues occur and the quality of the film is removed.
  • the structures of the scraper unit and the scraper mechanism are the same as those in Embodiment 1, Embodiment 2, and Embodiment 3, and the same points are not described repeatedly.
  • the above embodiments are merely exemplary implementations adopted to explain the principles of the present disclosure, but the present disclosure is not limited thereto.
  • various variations and improvements can be made without departing from the spirit and essence of the present disclosure, and these variations and improvements are also considered to be within the protection scope of the present disclosure.
  • the mechanical scraping type film removing device of the present disclosure can be used for the surface film removing process of other electronic products, mechanical materials, etc. .
  • the main body of the knife holder base may be integrated with the knife holder connection base and / or the knife holder may be integrated with the scraper blade.
  • the scraper blade may be an integrated scraper blade with a rotatable rod that cooperates with a bearing, and accordingly It is not necessary to provide a separate blade holder, and the biasing member directly acts on the integrated scraper; the chute structure of the blade holder base may be a separate structure installed on the blade holder base body.
  • the mounting substrate may be replaced by other mounting structures; the mounting substrate may not be provided with a guide rail; the mounting substrate may be two mounting substrates respectively disposed on both sides of the blade holder.
  • the rotary connection between the scraper unit and the knife holder base is not limited to the connection achieved by the rotatable rod and the bearing. It can also be the friction fit between the rotatable rod and the complementary circular hole, the screw and Rotary connection with screw holes or gears.

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  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
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Abstract

本公开提供一种机械刮刀装置和机械刮除式除膜设备。该机械刮刀装置包括安装基板；刮刀机构和推压机构，分别设置在所述安装基板上；所述刮刀机构包括刀架基座和刮刀单元；所述刀架基座设置在所述安装基板上，所述刮刀单元可旋转地安装在所述刀架基座上，具有与被加工表面接触的刀刃；所述推压机构用于驱动所述刮刀机构，以使所述刀刃贴合在所述被加工表面上。利用本公开的机械刮刀装置和机械刮除式除膜设备，能够使刮刀的刀刃相对于被加工表面进行自适应的随形运动，确保刀刃始终与被加工表面完全紧密接触，并且还降低了各部件的安装精度，节约了安装时间。

Description

机械刮刀装置和机械刮除式除膜设备
本公开要求申请日为2018年07月12日、申请号为201810763388.9、名称为“机械刮刀装置和机械刮除式除膜设备”的中国专利申请的优先权，该申请的全部内容通过引用结合在本公开中。
技术领域
本公开涉及除膜设备领域，尤其涉及一种机械刮刀装置和机械刮除式除膜设备。
背景技术
在薄膜太阳能光伏组件，特别是CIGS光伏组件(一种基于半导体Cu(In，Ga)Se2的光伏组件)的制造过程中，有时需要使用基板上的Mo或类似金属电极将电流引出。然而，一般来说，在金属电极上方存在因在先工艺而形成的膜层，要想将电流从金属电极引出，就需要先将基板相应位置处的金属电极上的膜层去除，以暴露出这些位置处的金属电极。膜层去除的方法一般包括机械除膜法、化学除膜法、激光除膜法等。其中，化学除膜法容易造成其他膜层位置的污染，激光除膜法现大多停留在研究阶段，成本昂贵。机械除膜法又可分为磨削机磨削式除膜法和机械刮除式除膜法等，其中主流的方法是机械刮除式除膜法，即利用刮刀的线性移动来刮除Mo或类似金属电极上方的膜层。
现有的机械刮除式除膜设备多采用刚性固定式结构，即刮刀与刀架结构为完全的刚性机械连接。而刮刀中的刀刃在刮除基板时，会出现刮刀的刀刃与基板不完全贴合，从而导致部分刀刃不能接触到基板上的膜层，造成膜层的残留；如果刀刃的压力过大，还可能导致刀刃的损坏或基板的划伤。
由于存在上述风险，反过来要求设备的安装调试有非常高的精度，需要 耗费大量精力保证基板的支撑平台绝对水平(且后续使用过程中也保持水平)，保证刮刀的安装没有误差等，进而导致了人力、物力的浪费和设备稼动率的降低。
发明内容
为了解决现有技术中的上述缺陷，本公开提供一种机械刮刀装置和包括此机械刮刀装置的机械刮除式除膜设备。
第一方面，本公开提供了一种机械刮刀装置，所述机械刮刀装置包括刮刀机构；
所述刮刀机构包括：刀架基座；刮刀单元，所述刮刀单元可旋转地安装在所述刀架基座上，所述刮刀单元具有与被加工表面接触的刀刃。
第二方面，本公开还提供了一种机械刮除式除膜设备，所述机械刮除式除膜设备包括上文所述的任一种的机械刮刀装置；
支撑结构，用于支撑表面具有待去除膜层的基板；
移动机构，用于驱动所述机械刮刀装置相对于所述支撑结构而沿所述基板的表面的方向移动。
本公开相比现有技术的有益效果：
通过本公开提供的机械刮刀装置和机械刮除式除膜设备，所述刮刀单元能够在由所述被加工表面向所述刀刃施加的反作用力的作用下相对于所述刀架基座旋转，以使得所述刀刃与所述被加工表面贴合。因此，在刮除式除膜过程中，刀刃能够相对于被加工表面进行自适应的随形运动，确保了刀刃始终与被加工表面完全紧密接触(贴合)，从而不会发生膜层的残留，确保了除膜质量。
附图说明
图1为本公开实施例1提供的机械刮刀装置的示意性立体图；
图2为本公开实施例1提供的正在进行除膜操作的机械刮刀装置的示意 性侧视图；
图3为本公开实施例2提供的机械刮刀装置的示意性立体图；
图4为本公开实施例3提供的从刀架杆的上方沿刀架杆的轴向观察到的机械刮刀装置的示意性局部平面图；
图5a和图5b为示出的现有的机械刮除式除膜设备中，基板变形对除膜过程的影响的示意图，其中图5a为基板无变形时的除膜状态的示意图，图5b为基板变形时的除膜状态的示意图；
图5c和图5d为示出的现有的机械刮除式除膜设备中，刮刀安装精度对除膜过程的影响的示意图，其中图5c为刮刀安装精确时的除膜状态的示意图，图5d为刮刀安装偏斜时的除膜状态的示意图。
具体实施方式
为使本领域技术人员更好地理解本公开的技术方案，下面结合附图和实施例对本公开作进一步详细描述。
一般地，机械刮除式除膜设备多采用刚性固定式结构，即刮刀与刀架结构为完全的刚性机械连接。如图5a所示，刮刀13”固定在刀架12”上，刀架12”由与之刚性连接的驱动机构(未示出)驱动，从而以预定的推压力将刮刀13”推压在基板的基板表面50”上，并由运动机构带动刀架12”和驱动机构一起沿着基板表面50”移动，从而通过刮刀13”的刀刃对基板表面50”上的膜层进行刮除。在理想情况下，如图5a和5c所示，刮刀13”的刀刃与基板表面50”应当是完全、紧密贴合的。然而，在实际情况下，可能发生基板自身变形(如图5b所示)、基板的支撑平台倾斜、刀架机构安装不够竖直等情况，导致刀刃与基板表面50”不平行，刮除时无法实现紧密贴合；或者，在更换刮刀13”时带来安装上的误差，同样导致了刀刃与基板不平行(如图5d所示)，刮除时二者无法实现紧密贴合。从而导致对膜层刮除时造成膜层的残留，刀刃损坏或者基板划伤的现象。
有鉴于此，本公开实施例提供了一种机械刮刀装置和机械刮除式除膜设 备，用以提高刀刃与被加工表面接触的紧密性，避免膜层刮除时造成膜层的残留，刀刃损坏或者基板划伤的现象，从而提高除膜质量。
实施例1
图1为本公开实施例1提供的机械刮刀装置的示意性立体图。图2为本公开实施例1提供的正在进行除膜操作的机械刮刀装置的示意性侧视图。
如图1和图2所示，机械刮刀装置包括刮刀机构10和推压机构20。其中，刮刀机构10包括刀架基座11和刮刀单元14。刮刀单元14具有(适于)与基板的被加工表面50(见图2)接触的刀刃131。更具体地，在本实施例中，刮刀单元14还包括刀架12和刮刀13，刮刀13安装在刀架12上，刀刃131位于刮刀13的端部。推压机构20用于移动刮刀机构10，以将刮刀机构10的刀刃131(具体地说，刮刀机构10中的刮刀单元14中的刮刀13的刀刃131)贴合到被加工表面50上。
需要说明的是，本公开中刀架和刮刀进行一体形成，也可以刀架和刮刀固定连接形成。在此不做具体限定。另外，刀刃可以为刮刀的一部分。
与现有技术不同，在本实施例中，刮刀单元14(具体地说，刮刀单元14中的刀架12)以可旋转的方式安装在刀架基座11上。这样，当推压机构20推压(向下移动)刮刀机构10，从而将刀刃131贴合到被加工表面50上时，刮刀单元14(刀架12和刮刀13)能够在被加工表面50向刀刃131施加的反作用力的作用下自动地相对于刀架基座11旋转。例如，如图2所示，假设由于刮刀的安装误差，导致刀刃131与被加工表面50不平行，刀刃131的左侧略高，则刀刃131的右部分将先接触且以较大的力推压被加工表面50(确切地说，压入基板上的膜层(未示出)中)，而刀刃131的左部分不接触被加工表面50，或后接触且仅以较小的力推压被加工表面50。从而，被加工表面50向刀刃131的右部分施加的反作用力较大，而向刀刃131的左部分施加的反作用力较小或为零。在此施加于刀刃131的反作用力的作用下，刮刀单元14将相对于刀架基座11逆时针旋转，使得刀刃131与被加工表面50紧密贴合。在除膜的过程中，如果基板发生变形，也会引起局部的反作用力，刮刀单元14能够与之相适应地发生旋转。因此，本实施例的结构能够使刀刃131 相对于被加工表面50进行自适应的随形运动，确保刀刃131始终与被加工表面50完全紧密接触，从而不会发生膜层的残留，确保了除膜质量。相应地，还降低各部件的安装精度，节约了安装时间，当刮刀13为可拆卸地安装在刀架12上时，能够实现刮刀13的即换即用。
接下来，对本实施例的细节进行进一步详细描述。
如图1和图2所示，本实施例的机械刮刀装置还可包括安装基板40和导轨30。其中，安装基板40作为机械刮刀装置的安装基础；导轨30安装在安装基板40上或一体形成在安装基板40上，导轨30沿推压机构20移动刮刀机构10的移动方向(本实施例中为竖直方向)延伸。刀架基座11具有与导轨30配合(滑动配合)的滑槽结构，从而能够作为滑块相对于导轨30滑动。通过设置导轨，使得刀架基座11的运动更加稳定、精确。可以理解，导轨30的数量可以是图1中所示的一条，也可以是两条或更多条，以便进一步增强稳定性。
在一些可选的实施方式中，刀架基座11可包括刀架基座主体112和刀架连接座111。刀架连接座11固定在刀架基座主体112上。在刀架连接座111的内部设置有轴承(未示出)。与刀架连接座111相对应地，刀架12包括刀架杆121。刀架杆121为圆柱形杆(刀架杆也可以为其他形状)，其穿入刀架连接座111中并与刀架连接座111中的轴承旋转配合。换言之，刮刀单元14通过其刀架12上的刀架杆121而可旋转地安装在刮刀机构10的刀架基座11的刀架连接座111中的轴承上。因此，刀架杆121的纵轴(中心轴)即为刀架12的旋转轴(也即为刮刀单元14、刀架杆121和刮刀13的旋转轴)。刀架杆121的纵轴可相对于推压机构20推压刮刀机构10的方向(竖直向下的方向)成倾斜角度。该倾斜角度可在20°至80°的范围内，优选在45°至70°的范围内。在本实施例中，该倾斜角度为60°。另外，在刀架杆121和/或刀架连接座111中还可设有限制刀架杆121的轴向运动的结构，以免刀架杆121从刀架连接座111中脱落。
需要说明的是，本公开中刮刀13在刀架12上的安装方式不受特别限制。例如，可以通过螺丝(未示出)将刮刀13安装在刀架12的底部。刮刀13的 材质可为工具合金钢，其材质要求为：硬度大于所要刮除的膜的硬度，但小于所要保留的金属(如金属Mo)的硬度。
在一些可选的实施方式中，刀架基座主体112可呈T形块状，与导轨20滑动配合的滑槽结构形成在T形的窄端侧(图2中的左侧)，而刀架连接座111及刮刀单元14均设置在刀架基座主体112的宽端侧(图2中的右侧)。
需要强调的是，刀架基座主体的形状也可以为其他形状，如刀架基座主体为板状结构，且板状结构中具有滑槽，以方便与导轨滑动连接。
在一些可选的实施方式中，机械刮刀装置还可包括偏压机构，偏压机构用于在刮刀单元因相对于刀架基座旋转而偏离基准位置时，向刮刀单元施加朝向基准位置的偏压力。在本实施例中，如图2所示，偏压机构包括设置在刀架基座主体112与刮刀单元14之间的两个弹簧(或弹性顶丝)31。两个弹簧31可选地设置在刀架基座主体112与刀架12之间，彼此平行，且沿与刀架杆121的轴向垂直的方向布置。偏压机构的目的在于使刮刀13的倾斜角度不至于失控，并减少不希望的震动。具体地说，当刀刃131与被加工表面50未接触时，刮刀单元14相对于刀架基座11处于基准位置，此时两个弹簧31均不向刮刀单元14(刀架12)施力，或向刮刀单元14施加的力矩彼此抵消，因此该位置也称为平衡位置。而当刮刀单元14受外力(如受被加工表面50的反作用力)，从而相对于刀架基座11旋转并偏离基准位置时，两个弹簧31均向刮刀单元14施加朝向基准位置(即，使刮刀单元14回到基准位置)的偏压力。例如，假设在刮刀单元14处于平衡位置时，两个弹簧31均不向刮刀单元14施力；当刮刀单元14顺时针旋转时，图2中布置在上方的弹簧31将向刮刀单元14施加拉力，而布置在下方的弹簧31将向刮刀单元14施加推力。刮刀单元14的旋转角度越大，弹簧31施加的力就越大。因此，弹簧31起到了缓冲、避震的作用，且使刮刀13的倾斜角度不至失控。本领域技术人员能够理解的是，弹簧(或弹性顶丝)30的数量不限于两个，并且其布置方式不限于沿与刀架杆121的轴向垂直的方向布置。例如，两个弹簧31可以沿与刀架杆121的轴向成一角度(例如，小于90°且大于60°的角度)的方向布置；或者，可以设置4个弹性顶丝(或弹簧)，分别设置在刀架12的四个 角部与刀架基座主体112之间；或者，也可以设置3个弹性顶丝(或弹簧)，按等腰三角形或等边三角形的方式布置在刀架12与刀架基座主体112之间；或者，偏压机构可由若干弹簧与若干弹性顶丝组合构成。
具体地，如图1所示，推压机构20可包括推压源21和推杆22。如图2所示，推压源21固定在安装基板40上。推杆22与刀架基座11连接，并且能够在推压源21的驱动下沿上下方向运动，从而向下推压刮刀机构10和向上提升刮刀机构10。具体地说，在本实施例中，推杆22的底部与刀架基座主体112的顶部连接，刀架基座11在推杆22的推拉作用下，沿着导轨30作相应的移动。
推压源21可以是气缸，也可以是液压缸、电机(例如伺服电机)等。考虑到装置的经济性，优选为采用气缸。可通过比例阀等来控制气缸的进气量，由此实现对压力的稳定控制。当推压源21是气缸时，推杆22相应地可为由气缸中的活塞驱动的活塞杆。此外，当推压源21是电机时，推杆22可为丝杆或丝杠，并且该推杆22可螺合在刀架基座主体112顶部的螺纹孔中，通过电机21驱动推杆22转动来使刀架基座主体112沿着导轨30作相应的移动。
基于同一发明思想，本实施例还提供一种实施除膜工艺的机械刮除式除膜设备，该设备包括上文所描述的机械刮刀装置；还包括：支撑部和移动机构；其中，支撑部用于支撑表面具有待去除膜层的基板，例如上文所述的具有金属电极和覆盖在金属电极上的待去除膜层的基板(一般为玻璃基板)。支撑部可以是支撑平台、高精度工作台等，用于支撑所述基板。支撑部通常将基板支撑为与水平面平行，但根据设计需要，也可以沿其他方向支撑基板。移动机构用于驱动机械刮刀装置相对于支撑部而沿基板表面的方向移动(基板表面水平时为水平移动)。一般地，移动机构移动机械刮刀装置，而支撑部保持不动，但也可以反过来，移动机构仅移动支撑部而不移动机械刮刀装置。移动机构例如可以是伺服电机。支撑部上可设置有滑槽，相应地，支撑部可作为沿该滑槽滑动的滑块，并且在伺服电机的驱动下，沿滑槽按预定的刮除速度移动。
下面，对利用实施例1中的机械刮除式除膜设备实施的示例性除膜工艺 进行简要描述。
首先，将覆有待刮除的膜的基板固定在支撑平台上。然后，在刮刀对准基板的除膜起始位置后，开启机械刮刀装置。其次，由控制软件发出命令，通过比例阀将压缩空气送入气缸。气缸中的活塞下降，推动活塞杆，活塞杆则推动其下部的刮刀机构沿着导轨向下运动，将刮刀压至和下方基板完全接触。因刮刀可以随刀杆架转动，所以在下压过程中刮刀的刀刃可自动适应基板的变形，时刻使刀刃和基板的被加工表面保持完全紧贴接触。移动机构带动安装基板水平移动规定长度后，气缸放气回缩，刮刀上提并离开基板表面，工艺结束。
实施例2
图3为本公开实施例2提供的机械刮刀装置的示意性立体图。在本实施例中，与实施例1中相同的部件使用相同的附图标记。
本实施例的机械刮刀装置与实施例1中的机械刮刀装置的不同之处在于：在本实施例中，刀架连接座111’包括刀架连接座杆121’；刀架连接座杆121’为圆柱形杆，且与刀架连接座111’固定连接。相应地，在刀架12’内部设置有轴承，刀架连接座杆121’能够与该轴承旋转配合。换言之，在本实施例中，刮刀单元14’通过其刀架12’内部的轴承而可旋转地安装在刀架基座11’的刀架连接座111’的刀架连接座杆121’上。因此，刀架连接座111’的纵轴(中心轴)即为刀架12’的旋转轴(也即为刮刀单元14’和刮刀13的旋转轴)。与实施例1类似，如图3所示，刀架连接座杆121’的纵轴也可相对于推压机构20推压刮刀机构10’的方向(竖直向下的方向)成倾斜角度。另外，在刀架12’内可设有限制刀架连接座杆121’的轴向移动的结构，以免刀架12’与刀架连接座杆121’分离。此外，在本实施例中，偏压机构与刮刀单元14’的连接方式可与实施例1中偏压机构与刮刀单元14的连接方式相同。
实施例3
图4是根据本公开实施例3的机械刮刀装置的示意性局部平面图。在本实施例中，与实施例1中相同的部件使用相同的附图标记。
本实施例的机械刮刀装置与实施例1中的机械刮刀装置的不同之处在于： 机械刮刀装置不使用弹簧或弹性顶丝作为偏压机构，而是使用连接在刀架杆121与刀架连接座111之间的盘簧32作为偏压机构。盘簧32可设置在刀架连接座111的远离刮刀13的一侧表面上。如图4所示，盘簧32的内侧端32b与刀架杆121的侧面连接，盘簧32的外侧端23a与刀架连接座111的表面连接。盘簧32与刀架杆121及刀架连接座111的连接方式不受具体限制。在本实施例中，盘簧32的内侧端32b直接粘结于刀架杆121的侧面，盘簧32的外侧端23a以钩挂形式设置在刀架连接座111的表面上的销钉上。当刀架杆121从刀刃不接触被加工表面时的基准位置起顺时针或逆时针旋转时，盘簧32均发生变形，并且向刀架杆121施加使刀架杆121朝向基准位置返回的偏压力。
本领域技术人员可以理解，本实施例中的盘簧32也可以设置在刀架连接座111的靠近刮刀13的一侧表面上，或设置在刀架连接座111内的轴承附近，或在多个位置设置多个盘簧，或与实施例1中的弹簧或弹性顶丝结合使用。此外，本领域技术人员还可以理解，本实施例中的偏压机构也可以类似地应用在实施例2中。在这种情况下，实施例2的机械刮刀装置不使用弹簧或弹性顶丝作为偏压机构，而是使用连接在刀架连接座杆121’与刀架12’之间的盘簧32作为偏压机构。盘簧32在刀架连接座杆121’与刀架12’之间的连接方式可类似于盘簧32在刀架杆121与刀架连接座111的连接方式。
基于同一发明思想，本公开还提供了一种机械刮刀装置，该机械刮刀装置包括刮刀机构，所述刮刀机构包括刀架基座；刮刀单元，可旋转地安装在刀架基座上，刮刀单元具有与被加工表面接触的刀刃。
具体地，刮刀单元以及刀架基座的结构均与实施例1、实施例2以及实施例3中提供的刮刀机构的结构相同。例如，参见图1中的刮刀单元14包括：刀架12、刮刀13，以及刮刀13端部的刀刃131；刀架基座11可以包括刀架基座主体112、刀架连接座111；其中，刀架12包括刀架杆121。上述各个部件的连接关系以及各个部件的设置位置均与实施例1相同。或者，又如，参见图3中的刮刀单元14’包括：刀架12’、刮刀13，以及刮刀13端部的刀刃131；刀架基座11’可以包括刀架基座主体112、刀架连接座111’；刀架连接 座111’包括刀架连接座杆121’；刀架连接座杆121’为圆柱形杆，且与刀架连接座111’固定连接。相应地，在刀架12’内部设置有轴承，刀架连接座杆121’能够与该轴承旋转配合。其中，刮刀机构中的各个部件均与实施例2中描述相同。相同之处不再赘述。其中，刮刀单元中刀架可旋转地安装在刀架基座上的方式与实施例1、实施例2以及实施例3均相同。
因此，本公开提供的刮刀机构中刮刀单元可以相对于刀架基座可旋转，从而使得当通过外力给刮刀单元施加一个压力，使得刮刀单元的刀刃贴合在被加工表面上时，刮刀单元的刀刃可以相对于被加工表面进行自适应的随行运动，确保了刀刃始终与被加工表面完全紧密接触(贴合)，从而不会发生膜层的残留，确保了除膜质量。其中，刮刀单元以及刮刀机构的结构，均与上述实施例1、实施例2以及实施例3相同，相同之处不再赘述。
可以理解的是，以上实施例仅仅是为了说明本公开的原理而采用的示例性实施方式，然而本公开并不局限于此。对于本领域内的普通技术人员而言，在不脱离本公开的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本公开的保护范围。例如，本领域技术人员容易理解，本公开的机械刮除式除膜设备除用于光伏组件的除膜工艺(留Mo工艺)外，还可用于其他电子产品、机械材料等的表面除膜工艺。本公开实施例中的刀架基座主体可与刀架连接座成一体和/或刀架可以与刮刀成一体，例如，刮刀可为具有与轴承配合的可旋转杆的一体式刮刀，相应地，不必设置单独的刀架，并且偏压部件直接作用在该一体式刮刀上；该刀架基座的滑槽结构可以是安装在刀架基座主体上的单独结构。安装基板可由其他安装结构所代替；安装基板上也可不设置导轨；安装基板可以是分别设置在刀架两侧的两个安装基板。此外，刮刀单元与刀架基座之间的旋转连接方式不限于通过可旋转杆与轴承配合而实现的连接，也可以是通过可旋转杆和与之互补的圆孔间的摩擦配合、螺杆和螺孔的螺旋配合或齿轮间的啮合等而实现的旋转连接方式。

Claims (13)

  1. 一种机械刮刀装置，包括刮刀机构，其特征在于，所述刮刀机构包括：
    刀架基座；
    刮刀单元，可旋转地安装在所述刀架基座上，所述刮刀单元具有与被加工表面接触的刀刃。
  2. 根据权利要求1所述的机械刮刀装置，其特征在于，所述机械刮刀装置还包括：与所述刀架基座连接的推压机构，所述推压机构用于驱动所述刀架基座，以带动所述刮刀单元的刀刃贴合在所述被加工表面上。
  3. 根据权利要求1或2所述的机械刮刀装置，其特征在于，
    所述刀刃与所述被加工表面未接触时，所述刮刀单元相对于所述刀架基座处于基准位置；
    所述机械刮刀装置还包括偏压机构，所述偏压机构用于在所述刮刀单元相对于所述刀架基座旋转而偏离所述基准位置时，向所述刮刀单元施加朝向所述基准位置的偏压力。
  4. 根据权利要求1所述的机械刮刀装置，其特征在于，所述刮刀单元包括：
    刀架，可旋转地安装在所述刀架基座上；
    刮刀，与所述刀架固定连接，所述刀刃位于所述刮刀的端部。
  5. 根据权利要求4所述的机械刮刀装置，其特征在于，
    所述刀架基座包括刀架连接座，所述刀架连接座的内部设置有轴承；
    所述刀架具有刀架杆，所述刀架杆通过所述轴承与所述刀架连接座可旋转连接。
  6. 根据权利要求5所述的机械刮刀装置，其特征在于，
    所述机械刮刀装置还包括连接在所述刀架杆与所述刀架连接座之间的盘簧。
  7. 根据权利要求4所述的机械刮刀装置，其特征在于，
    所述刀架基座包括刀架连接座，所述刀架连接座具有刀架连接座杆；
    所述刀架的内部设置有轴承，所述刀架连接座杆通过所述轴承与所述刀架可旋转连接。
  8. 根据权利要求7所述的机械刮刀装置，其特征在于，
    所述机械刮刀装置还包括连接在所述刀架连接座杆与所述刀架之间的盘簧。
  9. 根据权利要求5或7所述的机械刮刀装置，其特征在于，
    所述刀架基座还包括刀架基座主体，所述刀架连接座和所述刀架设置在所述刀架基座主体的一侧；
    所述机械刮刀装置还包括：设置在所述刀架基座主体与所述刀架之间的弹簧或弹性顶丝。
  10. 根据权利要求2至8中任一项所述的机械刮刀装置，其特征在于，
    所述机械刮刀装置还包括安装基板；所述安装基板上具有沿所述推压机构移动所述刮刀机构的移动方向延伸的导轨；
    所述刀架基座具有与所述导轨滑动配合的滑槽结构。
  11. 根据权利要求10所述的机械刮刀装置，其特征在于，所述推压机构包括：
    推压源，固定在所述安装基板上；
    推杆，与所述刀架基座连接，并能够在所述推压源的驱动下沿所述移动方向运动。
  12. 根据权利要求10所述的机械刮刀装置，其特征在于，
    所述刀架基座包括刀架基座主体，所述刮刀单元设置在所述刀架基座主体的一侧，所述滑槽结构形成在所述刀架基座主体的另一侧。
  13. 一种机械刮除式除膜设备，其特征在于，所述机械刮除式除膜设备包括：权利要求1至12中任一项所述的机械刮刀装置；
    支撑部，用于支撑表面具有待去除膜层的基板；
    移动机构，用于驱动所述机械刮刀装置相对于所述支撑部沿所述基板表面的方向移动。
PCT/CN2019/095862 2018-07-12 2019-07-12 机械刮刀装置和机械刮除式除膜设备 WO2020011262A1 (zh)

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