WO2019229663A1 - Capteur de vitesse de rotation comprenant un substrat présentant un plan d'étendue principale et au moins un oscillateur à masse - Google Patents

Capteur de vitesse de rotation comprenant un substrat présentant un plan d'étendue principale et au moins un oscillateur à masse Download PDF

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Publication number
WO2019229663A1
WO2019229663A1 PCT/IB2019/054433 IB2019054433W WO2019229663A1 WO 2019229663 A1 WO2019229663 A1 WO 2019229663A1 IB 2019054433 W IB2019054433 W IB 2019054433W WO 2019229663 A1 WO2019229663 A1 WO 2019229663A1
Authority
WO
WIPO (PCT)
Prior art keywords
mass oscillator
rate sensor
anchor element
rotation rate
anchor
Prior art date
Application number
PCT/IB2019/054433
Other languages
German (de)
English (en)
Inventor
Stefano CARDANOBILE
Robert Maul
Rudy Eid
Markus LINCK-LESCANNE
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2019229663A1 publication Critical patent/WO2019229663A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames

Definitions

  • Rate of rotation sensor with a a main extension plane having sub strate and at least one mass oscillator
  • the invention relates to a rotation rate sensor according to the preamble of claim 1.
  • Micromechanical rotation rate sensors are known from the prior art in minutias.
  • a common operating principle is the detection of a rate of rotation over the effect of the associated Coriolis force.
  • one or more mass oscillators are placed in periodic motion, so that by the rotation of a perpendicular to the direction of motion we kende force comes off.
  • the periodic movement is maintained by a drive structure, which is coupled by spring elements to the mass oscillator.
  • the mass vibrator In order to detect the Coriolis force, the mass vibrator must, in addition, be mounted so that it can swing in a direction perpendicular to the drive direction. This suspension is provided by spring elements which are anchored to the substrate.
  • the distances and relative positions of the anchor points can change, which distorts the dy namic properties of the suspended mass oscillator who the.
  • the gyroscope according to the invention according to the main claim has the advantage over the sensors known from the prior art that the effects of substrate distortions by the positioning of the anchoring elements are reduced. If it comes to compressions or strains of the substrate due to mechanical stresses or thermal factors, the distance change of two substrate points is greater the farther the two points are apart. Due to the inventive positioning of Ankerele elements in the vicinity of the geometric center of the mass oscillator move the anchor points closer together, so that the change in distance between the anchor points is reduced.
  • the geometrical center in this context is understood to mean the geometical center of gravity, i. the point that results from averaging all the points of the mass oscillator.
  • the geometric center is not identical to the center of mass, but the two points are usually close to each other in the cases relevant here. Since primarily the extent of the mass oscillator in the main plane of extension is relevant here, the geometric center substantially corresponds to the center of area of the projection of the mass oscillator on the main extension plane.
  • the position information of the anchor elements in each case relate to the points at which the anchor elements are connected to the substrate. In the following, these points are also referred to as anchor points.
  • the first and second anchor element are arranged symmetrically to the geometric center of the mass oscillator. This is particularly relevant in cases where the mass oscillator itself has a symmetry, such as an axis symmetry with respect to a central axis.
  • a suspension can be realized, which maintains the symmetry of the device and supports the mass oscillator in the middle of balanced manner.
  • the first and second anchor element are spaced apart in the excitation direction.
  • the mass oscillator is advantageously anchored at different locations in the substrate, with both locations being close to the geometric center, so that the robustness according to the invention is achieved with respect to substrate distortions.
  • the choice of the distance depends on additional factors, such as the design and positioning of the spring elements, so that the overall results in a well-balanced storage for the mass oscillator.
  • the first and second anchor element adjoin one another directly or substantially coincide.
  • the technical effect of the invention is maximized, as a distortion of the substrate practically does not change the relative distance of the anchor points. Fall the two anchor element together and form a single anchor element, with which both spring elements are connected, also results in an advantageous simplification of the overall structure of the micro-mechanical sensor.
  • the first and second anchor element are in the excitation direction on a line.
  • the connecting line between the two anchor points is parallel to the direction of excitation.
  • the mass oscillator has a frame and the first and second spring element are connected to the frame.
  • the first and second spring element each extend substantially in the direction of excitation between the first and second anchor point and the Rah men.
  • the springs can be present in this embodiment, for example, as a flexible beam, so that the deflection of the mass oscillator in the detection direction is made possible by a bending of the beams.
  • the Rah men is formed axisymmetric to a running through the geometric center of the mass oscillator and parallel to the detection direction central axis.
  • the rotation rate sensor has a fixedly connected to the substrate third and fourth to kerelement, wherein the mass oscillator is connected via a third spring element with the third anchor element and is connected via a fourth spring element with the fourth anchor element.
  • the mass oscillator is connected via springs with four anchor elements, which can be advantageously realized a particularly stable and balanced suspension.
  • the inventive concept is here realized by at least the first and second anchor element are arranged in the vicinity of the center, whereby compared to the conventional suspensions already results in a reduction of the distances of all anchor elements. Especially before given to the third and fourth anchor element as close to the center are arranged, unless such positioning is not precluded further constructive or other reasons.
  • the first and second anchor element are arranged within the frame and the third and fourth anchor element arranged outside the frame. Positioning the first and second anchor members within the frame facilitates positioning near the geometric center. Denk bar is also that the third and fourth anchor element are also arranged within the frame.
  • the third and fourth anchor element are arranged symmetrically to the center point passing through the geometric center of the mass oscillator and parallel to the direction of detection. Similar to the above-proposed imple mentation form, in which the first and second anchor element are symmetrical to the central axis, can also be realized in this way a uniform and ausba launched suspension.
  • the third and fourth spring element are each connected to a corner of the frame.
  • the third and fourth anchor element are arranged offset with respect to the corners of the mass oscillator in the direction of the central axis extending through the geometric center of the mass oscillator and parallel to the direction of detection.
  • the offset of the third and fourth anchor element in the direction of the central axis allows a suspension in which all four anchor elements approach closer to the geo metric center, whereby the technical effect of robustness to substrate distortions advantageously comes particularly strong effect.
  • FIG. 1 shows a schematic representation of a rotation rate sensor according to the prior art.
  • FIG. 2 shows a schematic representation of a rotation rate sensor according to a first exemplary embodiment of the present invention.
  • FIG. 3 shows a schematic representation of a rotation rate sensor according to a second exemplary embodiment of the present invention.
  • the mass oscillator 2 consists of a frame 11 which is connected via the coupling elements 3 with a Anstriebsmechanismus (not shown), so that the mass oscillator 2 via the drive in a vibra tion in the excitation 4 can be added.
  • a Coriolis force which is directed perpendicular to the excitation direction 4 and perpendicular to the axis of rotation. Does this force a component in the detection direction 5, this leads to a deflection of the Massenschwin gers 2 in this direction.
  • the mass oscillator 2 electrodes 18 which are displaced during the deflection relative to substrate-fixed electrodes 17, so that the deflection can be measured by an electrical signal caused thereby.
  • the rotation rate sensor 1 shown has four suspensions for the mass oscillator 2.
  • the suspension of the mass oscillator 2 with springs 8, 9, 15, 16 is connected, in turn, via the anchor elements 6, 7, 13, 14 fixed with connected to the substrate.
  • the anchor points are at 6, 7, 13, 14 at the corners of the mass oscillator 2 and the springs 8, 9, 15, 16 are connected at the corners with the mass oscillator 2.
  • Figure 2 shows a schematic representation of an embodiment of the inventions to the invention suspension.
  • the coupling to the drive and the shape of the frame 11 of the mass oscillator 2 are identical to the presented in Figure 1 Darge embodiment of the prior art.
  • the first and second anchor members of the present invention are centrally positioned near the geometric center 10. Since the shape of the mass oscillator 2 is formed axially symmetrical to the center axis 12 extending through the center 10, it is advantageous here to arrange the armature elements 6, 7 likewise symmetrically to this axis 12 and in particular also symmetrically to the center 10.
  • the armature elements 6, 7 are spaced apart in the excitation direction 4 and lie with respect to this direction 4 in a line.
  • the first spring elements 8 extends in the direction of excitation 4 between the anchoring element 6 and the frame 11, while the second spring element 9 symmetrically extends between the anchor element 7 and the frame 11.
  • suspension of the mass oscillator 2 is mounted so that it is deflected onscardi 5 due to the Coriolis force by a deflection of the spring elements 8, 9 in Detekti.
  • the armature elements 6, 7 are in this case according to fiction close to each other, so that a deformation of the substrate due to mechanically or thermally induced stresses the relative distance between the armature elements 6, 7 changed only slightly.
  • the illustrated rotation rate sensor 1, in addition to the first and second on kerelement 6, 7 further comprises a third and fourth anchor element 13, 14.
  • At the kerieri 6, 7 are arranged in the interior of the frame 11, while the Po sites of the anchor members 13, 14 are outside of the frame 11.
  • the associated with the anchor elements 13, 14 spring elements 15, 16 are connected to the corners of the mass oscillator 2, the anchor elements 13, 14 are each but each offset from the corner positions in the direction of the central axis 12 is arranged so that they are closer to the anchor elements. 6 , 7 and approach the center 10.
  • the idea of the invention is expressed that the Reduced distance between the anchor elements 6, 7, 13, 14 leads to a size ren robustness to substrate distortions.
  • FIG. 3 shows a schematic representation of another embodiment of the suspension according to the invention. This embodiment corresponds in large

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

L'invention concerne un capteur de vitesse de rotation comprenant un substrat présentant un plan d'étendue principale et au moins un oscillateur à masse, l'oscillateur à masse étant connecté à une structure d'entraînement par le biais d'un ou plusieurs éléments de ressort et pouvant être amené à osciller dans une direction d'excitation s'étendant parallèlement au plan d'étendue principale, le capteur de vitesse de rotation présentant un premier et un deuxième élément d'ancrage connectés fixement au substrat, l'oscillateur à masse étant connecté par le biais d'un premier élément de ressort au premier élément d'ancrage et étant connecté par le biais d'un deuxième élément de ressort au deuxième élément d'ancrage, l'oscillateur à masse pouvant être dévié le long d'une direction de détection s'étendant parallèlement au plan d'étendue principale et perpendiculairement à la direction d'excitation, le premier et le deuxième élément d'ancrage étant disposés à proximité d'un centre géométrique de l'oscillateur à masse.
PCT/IB2019/054433 2018-05-26 2019-05-29 Capteur de vitesse de rotation comprenant un substrat présentant un plan d'étendue principale et au moins un oscillateur à masse WO2019229663A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018208326.6 2018-05-26
DE102018208326.6A DE102018208326A1 (de) 2018-05-26 2018-05-26 Drehratensensor mit einem, eine Haupterstreckungsebene aufweisenden Substrat und mindestens einem Massenschwinger

Publications (1)

Publication Number Publication Date
WO2019229663A1 true WO2019229663A1 (fr) 2019-12-05

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PCT/IB2019/054433 WO2019229663A1 (fr) 2018-05-26 2019-05-29 Capteur de vitesse de rotation comprenant un substrat présentant un plan d'étendue principale et au moins un oscillateur à masse

Country Status (2)

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DE (1) DE102018208326A1 (fr)
WO (1) WO2019229663A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3097044A1 (fr) * 2019-06-05 2020-12-11 Robert Bosch Gmbh Capteur de vitesse de rotation
IT201900009453A1 (it) * 2019-06-19 2020-12-19 Bosch Gmbh Robert Sensore di velocità angolare con un substrato avente un piano di estensione principale e con almeno un oscillatore di massa

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080282833A1 (en) * 2005-12-13 2008-11-20 Thales Vibratory Gyroscope Balanced by an Electrostatic Device
US20160341758A1 (en) * 2015-05-20 2016-11-24 Lumedyne Technologies Incorporated Extracting inertial information from nonlinear periodic signals
US20180031601A1 (en) * 2016-07-27 2018-02-01 Lumedyne Technologies Incorporated Composite vibratory in-plane accelerometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080282833A1 (en) * 2005-12-13 2008-11-20 Thales Vibratory Gyroscope Balanced by an Electrostatic Device
US20160341758A1 (en) * 2015-05-20 2016-11-24 Lumedyne Technologies Incorporated Extracting inertial information from nonlinear periodic signals
US20180031601A1 (en) * 2016-07-27 2018-02-01 Lumedyne Technologies Incorporated Composite vibratory in-plane accelerometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3097044A1 (fr) * 2019-06-05 2020-12-11 Robert Bosch Gmbh Capteur de vitesse de rotation
IT201900009453A1 (it) * 2019-06-19 2020-12-19 Bosch Gmbh Robert Sensore di velocità angolare con un substrato avente un piano di estensione principale e con almeno un oscillatore di massa

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Publication number Publication date
DE102018208326A1 (de) 2019-11-28

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