WO2019225042A1 - Dispositif d'oscillation et dispositif de détection optique - Google Patents

Dispositif d'oscillation et dispositif de détection optique Download PDF

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Publication number
WO2019225042A1
WO2019225042A1 PCT/JP2018/046594 JP2018046594W WO2019225042A1 WO 2019225042 A1 WO2019225042 A1 WO 2019225042A1 JP 2018046594 W JP2018046594 W JP 2018046594W WO 2019225042 A1 WO2019225042 A1 WO 2019225042A1
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WIPO (PCT)
Prior art keywords
vibration
transparent electrode
electrode layer
vibration device
vibrator
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PCT/JP2018/046594
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English (en)
Japanese (ja)
Inventor
藤本　克己
西山　健次
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株式会社村田製作所
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Publication of WO2019225042A1 publication Critical patent/WO2019225042A1/fr

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator

Definitions

  • the present invention relates to a vibration device and an optical detection device capable of removing water droplets and the like by mechanical vibration.
  • Patent Document 1 discloses a vibration device having a translucent portion disposed in front of a camera body. By vibrating the plate-like body including the translucent portion, the water droplets are moved and atomized. In this vibration device, a high-order resonance mode is used so that a vibration antinode is located in a portion other than the central portion of the plate-like body.
  • the surface tension of the water plate-like body differs between the vibration antinode portion and the vibration node portion. The difference in surface tension at each position becomes a driving force, the water droplet moves toward the antinode of vibration, and then the water droplet is further atomized to secure a visual field.
  • An object of the present invention is to provide a vibration device and an optical detection device that can reliably move a water droplet without depending on a difference in surface tension at each position.
  • a vibrating device includes a vibrating element having a light transmitting body portion, a vibrating element having a vibrator that vibrates the vibrating body, and a transparent electrode provided on the light transmitting body portion of the vibrating body.
  • An optical detection device includes a vibration device configured according to the present invention and an optical detection element arranged so that a detection region is included in the light transmitting body portion.
  • FIG. 1 is a schematic partially cutaway perspective view of the vibration device according to the first embodiment of the present invention.
  • FIG. 2 is a front sectional view of the imaging device having the vibration device according to the first embodiment of the present invention.
  • FIG. 3 is a perspective view of the resonator element according to the first embodiment of the invention.
  • FIG. 4 is a schematic circuit diagram of the drive circuit and the voltage application circuit in the first embodiment of the present invention.
  • FIG. 5 is a schematic front cross-sectional view of a vibration element for explaining a vibration mode of the vibration element in the first embodiment of the present invention.
  • FIG. 6 is a schematic perspective view of the vibration element for explaining a vibration mode of the vibration element in the first embodiment of the present invention.
  • FIG. 1 is a schematic partially cutaway perspective view of the vibration device according to the first embodiment of the present invention.
  • FIG. 2 is a front sectional view of the imaging device having the vibration device according to the first embodiment of the present invention.
  • FIG. 3 is a perspective view of the
  • FIG. 7 is a plan view of a piezoelectric vibrator according to a modification of the first embodiment of the present invention.
  • FIG. 8 is a perspective view of a vibration element according to the second embodiment of the present invention.
  • FIG. 9 is a front cross-sectional view of a vibration device according to a third embodiment of the present invention.
  • FIG. 10 is a front sectional view of a vibration device according to the fourth embodiment of the present invention.
  • FIG. 11 is a front cross-sectional view of a vibration device according to a fifth embodiment of the present invention.
  • FIG. 12 is a front sectional view of an imaging device according to the sixth embodiment of the present invention.
  • FIG. 13 is a front sectional view of the vibration device according to the seventh embodiment of the present invention.
  • FIG. 14 is a front cross-sectional view of a vibration device according to a modification of the seventh embodiment of the present invention.
  • FIG. 1 is a schematic partially cutaway perspective view of the vibration device according to the first embodiment.
  • the vibration device 1 shown in FIG. 1 is a vibration device that removes water droplets and foreign matter from the field of view of the image sensor by moving the water droplets and foreign matter by vibration.
  • the vibration device 1 includes a vibration element 2, a case member 9 that holds the vibration element 2, a drive circuit 13, and a voltage application circuit 14.
  • the drive circuit 13 and the voltage application circuit 14 are electrically connected to the vibration element 2.
  • FIG. 2 is a front sectional view of an imaging device having the vibration device according to the first embodiment. Note that the drive circuit and the voltage application circuit may be omitted in perspective views and cross-sectional views other than FIG.
  • an image pickup element 10A indicated by a one-dot chain line is disposed in an internal space surrounded by the vibration element 2 and the case member 9, an image pickup element 10A indicated by a one-dot chain line is disposed.
  • the imaging device 10 includes the vibration device 1 and an image sensor 10A.
  • the image pickup element 10A include a CMOS, a CCD, a bolometer, a thermopile, and the like that receive light of any wavelength from the visible region to the far infrared region.
  • Examples of the imaging device 10 include a camera, a Radar, a LIDAR device, and the like.
  • an optical detection element that optically detects energy rays other than the imaging element 10A may be arranged.
  • an energy ray to detect active energy rays, such as electromagnetic waves and infrared rays, may be used, for example.
  • the detection region of the optical detection element is included in a light transmitting body portion to be described later.
  • the visual field of the image sensor 10 ⁇ / b> A is a detection region and is included in the translucent part.
  • FIG. 3 is a perspective view of the vibration element according to the first embodiment.
  • the vibration element 2 has a substantially disk shape. More specifically, the vibration element 2 includes a substantially disk-shaped vibration body 3 having an opening 3c at the center.
  • the vibrating body 3 has a first main surface 3a and a second main surface 3b facing each other.
  • the first main surface 3a is an outer main surface of the vibration device 1, and the second main surface 3b is a main surface on the inner space side.
  • An extension 3d extends from the outer peripheral edge of the opening 3c on the first main surface 3a in a direction perpendicular to the first main surface 3a. Note that the extension 3d may not be provided.
  • a translucent body 4 serving as a translucent body is provided on the extension 3 d of the vibrating body 3 so as to cover the opening 3 c.
  • the light transmitting body 4 is made of a light transmitting material.
  • the translucent material for example, translucent plastic, glass, translucent ceramics, or the like can be used.
  • a transparent electrode layer 15 is provided on the translucent body 4.
  • a dielectric layer 16 is provided on the transparent electrode layer 15. More specifically, the transparent electrode layer 15 is provided so as to cover the entire surface of the transparent body 4 in plan view. Similarly, the dielectric layer 16 is provided so as to cover the entire surface of the transparent body 4 and the transparent electrode layer 15 in plan view.
  • the transparent electrode layer 15 is made of a transparent electrode material such as ITO or ZnO, for example.
  • the dielectric layer 16 is made of silicon oxide.
  • the material of the dielectric layer 16 is not limited to the above, and an appropriate dielectric having translucency can be used.
  • the translucency in this specification means the translucency which transmits the energy beam and light of the wavelength which the said optical detection element detects at least.
  • the transparent electrode layer 15 is electrically connected to the voltage application circuit 14.
  • the voltage application circuit 14 applies a voltage to the transparent electrode layer 15 at a certain timing.
  • the shapes of the vibrating body 3 and the translucent body 4 in a plan view are circular, but are not limited to this, and may be substantially elliptical, or may be rectangular or polygonal. Good.
  • the translucent body 4 has a disc shape, but may have a dome shape or the like.
  • the piezoelectric vibrator 5A and the piezoelectric vibrator 5B are provided on the second main surface 3b of the vibrating body 3 so as to face each other with the opening 3c therebetween.
  • the piezoelectric vibrator 5A has a rectangular plate-like piezoelectric body 6.
  • the piezoelectric body 6 is made of, for example, an appropriate piezoelectric ceramic such as Pb (Zr, Ti) O 3 or (K, Na) NbO 3 or an appropriate piezoelectric single crystal such as LiTaO 3 or LiNbO 3 .
  • the shape of the piezoelectric body 6 is not limited to the above.
  • the piezoelectric vibrator 5A includes a first electrode 7a and a feedback electrode 7c provided on one main surface of the piezoelectric body 6.
  • the first electrode 7a and the return electrode 7c are provided separately.
  • the piezoelectric vibrator 5A has a second electrode 7b provided on the other main surface of the piezoelectric body 6 so as to face the first electrode 7a.
  • the first electrode 7 a and the feedback electrode 7 c are electrically connected to the drive circuit 13.
  • the second electrode 7b is connected to the ground potential.
  • the piezoelectric vibrator 5B is configured similarly to the piezoelectric vibrator 5A.
  • the piezoelectric vibrator 5A is bonded to the vibrating body 3 on the second electrode 7b side, and the piezoelectric vibrator 5B is bonded to the vibrating body 3 on the first electrode and feedback electrode side. Accordingly, the piezoelectric vibrator 5A and the piezoelectric vibrator 5B vibrate in the opposite directions with respect to the vibrating body 3 and vibrate the vibrating body 3.
  • the feature of this embodiment is that the transparent electrode layer 15 and the dielectric layer 16 are provided on the transparent body 4, and the voltage application circuit 14 that applies a voltage to the transparent electrode layer 15 at a certain timing is provided. is there. Accordingly, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor without depending on the difference in surface tension at each position described above. Details will be described below.
  • FIG. 4 is a schematic circuit diagram of the drive circuit and the voltage application circuit in the first embodiment.
  • FIG. 4 shows a connection form with one piezoelectric vibrator, but the drive circuit and the voltage application circuit are similarly connected to other piezoelectric vibrators.
  • the vibration device 1 has a circuit 12 shown in FIG.
  • the circuit 12 includes the drive circuit 13 and the voltage application circuit 14. Further, the circuit 12 includes an amplifier connected between the drive circuit 13 and the voltage application circuit 14 and the feedback electrode 7c of the piezoelectric vibrator 5A.
  • the drive circuit 13 applies an electric signal to the piezoelectric vibrator 5A so that the vibration element 2 is in a resonance state.
  • the drive circuit 13 has a phase circuit 13A connected to the amplifier.
  • the drive circuit 13 includes an amplifier circuit 13B connected between the phase circuit 13A and the first electrode 7a of the piezoelectric vibrator 5A.
  • a self-excited circuit is configured by the amplifier, the drive circuit 13, and the piezoelectric vibrator 5A.
  • the configuration of the drive circuit 13 and the form of connection between the drive circuit 13 and the piezoelectric vibrator 5A are not limited to the above.
  • the drive circuit 13 applies an electrical signal to the piezoelectric vibrator 5B as well as the piezoelectric vibrator 5A.
  • the voltage application circuit 14 includes a timing generation circuit 14A connected to the amplifier.
  • the voltage application circuit 14 includes a switching circuit 14B connected between the timing generation circuit 14A and the transparent electrode layer 15. Further, the voltage application circuit 14 has a power source 14C connected to the switching circuit 14B. The power source 14C is connected to the transparent electrode layer 15 via the switching circuit 14B.
  • the timing generation circuit 14A applies an electrical signal to the switching circuit 14B at a certain timing according to the feedback signal output from the piezoelectric vibrator 5A. While the electrical signal is being applied, the switching circuit 14B is in an ON state, and a voltage is applied to the transparent electrode layer 15 from the power source 14C. On the other hand, when the electrical signal is not applied to the switching circuit 14B from the timing generation circuit 14A, the switching circuit 14B is in an OFF state, and no voltage is applied to the transparent electrode layer 15.
  • the configuration of the voltage application circuit 14 is not limited to the above, and any circuit that applies a voltage to the transparent electrode layer 15 at a certain timing may be used.
  • the dielectric layer 16 when a voltage is applied to the transparent electrode layer 15, the dielectric layer 16 is polarized. As a result, the surface tension of the dielectric layer 16 such as water droplets attached to the dielectric layer 16 changes. In the present embodiment, since the surface tension changes at a certain timing, it is possible to move water droplets and the like more reliably in a certain direction by the vibration of the vibration element 2. Therefore, it is possible to make it difficult for the above-described reciprocating motion of water droplets or the like, and it is possible to move the water droplets or the like more reliably outside the field of view of the image sensor.
  • FIG. 5 is a schematic front cross-sectional view of the vibration element for explaining the vibration mode of the vibration element in the first embodiment.
  • FIG. 6 is a schematic perspective view of the vibration element for explaining a vibration mode of the vibration element in the first embodiment. 5 and 6, the initial state of the vibration element is indicated by a solid line, and the vibration element is vibrated by a dashed line. Note that the light transmitting body, the transparent electrode layer, and the dielectric layer are omitted. In FIG. 6, a portion surrounded by a broken line is a vibration node.
  • the vibration element 2 of this embodiment vibrates in the seesaw mode by the drive circuit 13.
  • the seesaw mode refers to a vibration mode that vibrates with a vibration node line extending in the radial direction of the vibration element as a rotation axis. Since the vibration node is located at the center of the vibration element 2, the vibration antinode is located at a portion other than the center of the vibration element 2.
  • the vibration mode in the present embodiment is a seesaw mode having one vibration node line extending in the circumferential direction in addition to one vibration node line extending in the radial direction.
  • Acceleration is applied to water droplets and the like in the left and right directions in FIG. 5 by rotational vibration with a vibration node line extending in the radial direction as a rotation axis.
  • water droplets and the like reciprocate in a certain position range.
  • a water droplet or the like does not move from the fixed position range.
  • the difference in surface tension with respect to the vibration element 2 such as a water drop between the vibration antinode and the vibration node increases.
  • water droplets or the like can move toward the vibration belly using the difference in surface tension as a driving force.
  • some water droplets may remain. The remaining water droplets and the like continue to reciprocate within a certain range.
  • the vibration element 2 when the vibration element 2 is vibrating as described above, a voltage is applied to the transparent electrode layer 15 at a certain timing to change the surface tension of the dielectric layer 16 such as water droplets. Thereby, a water droplet or the like can be moved more reliably outside the field of view of the image sensor.
  • the transparent electrode layer 15 and the dielectric layer 16 are provided so as to cover the entire light transmitting body 4 in plan view. Thereby, water droplets and the like can be effectively moved out of the field of view of the image sensor.
  • the transparent electrode layer 15 and the dielectric material layer 16 should just be provided so that at least one part of the transparent body 4 may be covered.
  • the transparent electrode layer 15 and the dielectric layer 16 are preferably provided so as to be located in at least a part of the field of view of the imaging device. However, as in the present embodiment, it is more preferable that the transparent electrode layer 15 and the dielectric layer 16 are provided so as to be positioned in the entire field of view of the imaging device.
  • the transparent electrode layer 15 and the dielectric layer 16 may be provided not only on the light transmitting body 4 that is the light transmitting body portion of the vibration element 2 but also on the vibrating body 3 other than the light transmitting body portion.
  • the translucent body 4 is provided on the extension 3d of the vibrating body 3. Thereby, the rotational force of the translucent body 4 when vibrated by the seesaw mode or the like can be increased.
  • the entire vibrating body 3 may be a translucent body.
  • the vibration element 2 is supported by a case member 9 and a seal member 8 at a vibration node.
  • the case member 9 has a first case portion 9a and a second case portion 9b.
  • the first case portion 9a has a substantially ring-shaped bottom portion 19a and an inner wall 19b extending from the inner peripheral edge of the bottom portion 19a.
  • the inner wall 19b extends in a direction orthogonal to the ring-shaped surface of the bottom 19a.
  • a ring-shaped seal member 8 is provided at the tip of the inner wall 19b.
  • the seal member 8 is not particularly limited, but is a sealing rubber in the present embodiment.
  • the second case portion 9b is provided on the bottom portion 19a of the first case portion 9a.
  • the second case portion 9b has an outer wall 19c facing the inner wall 19b and a top plate portion 19d connected to the outer wall 19c, having a ring shape and facing the bottom portion 19a.
  • the outer wall 19c has a step portion.
  • the 2nd case part 9b has the rib 19e extended from the inner periphery of the top-plate part 19d to the said bottom part 19a side.
  • the rib 19e and the seal member 8 are opposed to each other.
  • the vibration element 2 is supported by being sandwiched between the rib 19e of the second case portion 9b and the seal member 8.
  • the configuration of the case member 9 is not limited to the above.
  • the case member 9 may support the vibration element 2 by line contact or may support by point contact.
  • the vibration element 2 is circular in a plan view and vibrates in a seesaw mode. Therefore, a part of the vibration node of the vibration element 2 has a substantially ring shape.
  • the rib 19e and the seal member 8 are provided so as to extend along the vibration node of the vibration element 2.
  • the case member 9 can easily support the vibration node in the vibration element 2. Therefore, the sealing performance of the vibration device 1 can be improved effectively and more reliably.
  • the case member 9 has a gap B so as not to contact the vibration element 2 at a portion other than the rib 19e of the second case portion 9b. Accordingly, it is difficult to further inhibit the vibration of the vibration element 2.
  • the case member 9 of the vibration device 1 is provided with four cylindrical recesses 9x. More specifically, the recess 9x penetrates the bottom portion 19a of the first case portion 9a and reaches the second case portion 9b.
  • the concave portion 9x can be used as a screw hole, and the vibration device 1 can be fixed to the outside by a screw or the like, or can be connected to another case member.
  • the shape and number of the recesses 9x are not limited to the above.
  • the case member 9 may not be provided with the recess 9x.
  • FIG. 7 is a plan view of a piezoelectric vibrator according to a modification of the first embodiment.
  • the piezoelectric vibrator 25 of this modification has a ring-shaped piezoelectric body 26.
  • the piezoelectric vibrator 25 has a first region C and a second region D that are adjacent to each other with the center line S interposed therebetween.
  • the polarization axis direction of the piezoelectric body 26 is the same in any region.
  • a first electrode 27 a is provided in the first region C
  • a second electrode 27 b is provided in the second region D.
  • the second electrode 27 b is provided in the first region C
  • the first electrode 27 a is provided in the second region D.
  • a return electrode 27c is also provided on the other main surface.
  • the second electrode 27b is provided with a notch so that the feedback electrode 27c and the second electrode 27b do not contact each other. But the said notch does not necessarily need to be provided and the return electrode 27c and the other electrode in the piezoelectric vibrator 25 should just not contact.
  • the piezoelectric body 26 may have the polarization axis directions opposite to each other in the first region C and the second region D.
  • an electrode may be provided so that alternating current signals having the same phase are applied to the first region C and the second region D.
  • the second electrode 27b is provided in the first region C and the second region D on one main surface, and the first region C and the second region D on the other main surface are provided with the first electrode.
  • An electrode 27a may be provided.
  • FIG. 8 is a perspective view of the vibration element according to the second embodiment.
  • the vibration device of this embodiment is different from the first embodiment in the configuration of the vibration element 32 and the vibration mode used. Except for the above points, the vibration device of the present embodiment has the same configuration as the vibration device 1 of the first embodiment.
  • the vibration element 32 includes a piezoelectric vibrator 35C and a piezoelectric vibrator 35D that face each other with the opening 3c therebetween.
  • the piezoelectric vibrator 35C and the piezoelectric vibrator 35D are provided on the second main surface 3b of the vibrating body 3 together with the piezoelectric vibrator 5A and the piezoelectric vibrator 5B.
  • a straight line connecting the piezoelectric vibrator 35C and the piezoelectric vibrator 35D is orthogonal to a straight line connecting the piezoelectric vibrator 5A and the piezoelectric vibrator 5B.
  • the piezoelectric vibrator 35C and the piezoelectric vibrator 35D are configured similarly to the piezoelectric vibrator 5A and the piezoelectric vibrator 5B.
  • the phases of vibrations of the piezoelectric vibrators adjacent in the circumferential direction differ by 90 °.
  • the vibration phases of the piezoelectric vibrator 5A and the piezoelectric vibrator 5B facing each other are different by 180 °.
  • the phases of the vibrations of the piezoelectric vibrator 35C and the piezoelectric vibrator 35D facing each other are also different by 180 °.
  • the vibration element 32 vibrates in the turning mode.
  • the swivel mode is a vibration mode in which the rotation axis rotates at a constant cycle with the vibration element line extending in the radial direction of the vibration element as a rotation axis and the center of the vibration element as an axis. It is.
  • the vibration node 32 since the vibration element 32 vibrates in the turning mode, the vibration node has a substantially ring-shaped portion. Therefore, similarly to the first embodiment, the vibration node in the vibration element 32 can be easily supported, and the sealing performance of the vibration device can be improved effectively and more reliably.
  • the vibration device of the present embodiment also includes the transparent electrode layer 15 and the dielectric layer 16 provided on the light transmitting body 4 and the voltage application circuit 14 similar to that of the first embodiment, Water droplets can be reliably moved in a certain direction. Accordingly, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor without depending on the difference in surface tension at each position.
  • the vibration mode of a vibration element is not limited to these.
  • a vibration mode of torsional vibration may be used.
  • torsional vibration is a vibration mode in which, for example, one main surface and the other main surface rotate in the circumferential direction and in opposite directions.
  • the vibration devices according to the third to fifth embodiments also include the transparent electrode layer and the dielectric layer provided on the light transmitting body and the voltage application circuit similar to that of the first embodiment, It is possible to move water droplets and the like more reliably out of the field of view of the image sensor without depending on the difference in surface tension.
  • FIG. 9 is a front sectional view of the vibration device according to the third embodiment.
  • the vibration element 42 in the present embodiment includes a first vibration body 43A and a second vibration body 43B that face each other.
  • the first vibrating body 43A has the same configuration as that of the vibrating body 3 in the first embodiment, and the translucent body 4 is provided on the extension 3d of the first vibrating body 43A.
  • the second vibrating body 43B has a configuration similar to that of the first vibrating body 43A except that the extension portion is not provided.
  • the vibration element 42 of the present embodiment vibrates in the seesaw mode or the turning mode.
  • the vibration element 42 is disposed between the first vibration body 43A and the second vibration body 43B, and a support body 43c that connects the first vibration body 43A and the second vibration body 43B is provided.
  • the support body 43c connects the outer peripheral edge of the first vibrating body 43A and the outer peripheral edge of the second vibrating body 43B in the entire circumferential direction.
  • the shape of the support body 43c is a substantially cylindrical shape.
  • the support 43c has an outer surface and an inner surface, and a hinge portion 43d that protrudes radially outward from the outer surface.
  • the vibration device of the present embodiment is supported by the hinge portion 43d.
  • the shape of the support body 43c is not limited to the above.
  • the same piezoelectric vibrator 5A and piezoelectric vibrator 5B as those of the first embodiment are provided on the main surface of the second vibrating body 43B located outside the vibration device.
  • the piezoelectric vibrator 5A and the piezoelectric vibrator 5B may be provided on the main surface of the second vibrating body 43B on the first vibrating body 43A side.
  • the vibration element 42 may include the ring-shaped piezoelectric vibrator 25 illustrated in FIG.
  • the vibration node in the seesaw mode or the turning mode is located not on the first vibrating body 43A but on the hinge portion 43d.
  • FIG. 10 is a front sectional view of the vibration device according to the fourth embodiment. Note that the piezoelectric vibrator is omitted in FIG. 10 and FIGS. 11 and 12 described later.
  • the vibration device of the present embodiment includes a lens module 58.
  • the lens module 58 includes a lens 58a and a lens holder 58b that holds the lens 58a.
  • the translucent body 54 of the vibration element 52 is a dome cover.
  • the vibrating body 53 has a ring shape and does not have the extension portion.
  • a transparent electrode layer 55 is provided so as to cover the outer surface of the dome-shaped translucent body 54.
  • a dielectric layer 56 is provided on the transparent electrode layer 55. In plan view, the transparent electrode layer 55 and the dielectric layer 56 cover the entire light transmitting body 54.
  • the vibration element 52 is supported by the case member 59.
  • the case member 59 of the present embodiment includes a rib that supports the first main surface 3a of the vibrating body 53 and a rib that supports the second main surface 3b. Also in this embodiment, as in the first embodiment, the case member 59 supports the vibration element 52 at the vibration node.
  • the vibration device of the present embodiment has a bottom plate 57, and a case member 59 and a lens holder 58 b are provided on the bottom plate 57.
  • the lens module 58 is disposed in an internal space surrounded by the vibration element 52, the case member 59, and the bottom plate 57.
  • FIG. 11 is a front sectional view of the vibration device according to the fifth embodiment.
  • This embodiment is different from the fourth embodiment in that the inner periphery of the vibrating body 53 is joined to the lens holder 58b and does not have a dome cover.
  • a transparent electrode layer 55 is provided so as to cover the outer surface of the lens 58a as a light transmitting body portion.
  • a dielectric layer 56 is provided on the transparent electrode layer 55. In plan view, the transparent electrode layer 55 and the dielectric layer 56 cover the entire lens 58a.
  • FIG. 12 is a front sectional view of an imaging device according to the sixth embodiment of the present invention.
  • the imaging device 60 includes the vibration device 51 of the fifth embodiment and an image sensor 60A.
  • the imaging device 60 has a bottom plate 67, and a lens holder 58 b is provided on the bottom plate 67.
  • the image sensor 60A is disposed in an internal space surrounded by the bottom plate 67, the lens holder 58b, and the lens 58a.
  • the same case member 59 as in the fourth embodiment may be provided.
  • the imaging device 60 by having the vibration device 51, it is possible to move water droplets and the like more reliably outside the field of view of the image sensor 60A without depending on the difference in surface tension at each position.
  • the vibrator is a piezoelectric vibrator, but the vibrator may be, for example, an electromagnetic induction element such as an electromagnetic actuator.
  • an electromagnetic actuator An example in which the vibrator is an electromagnetic actuator will be described below.
  • FIG. 13 is a front sectional view of the vibration device according to the seventh embodiment.
  • the vibrator is an electromagnetic actuator 75.
  • the electromagnetic actuator 75 has a solenoid coil 76 and a magnet 77.
  • the drive circuit and the voltage application circuit are connected to the solenoid coil 76.
  • the shape of the case member 79 is also different from that of the first embodiment. Except for the above points, the vibration device of the present embodiment has the same configuration as the vibration device 1 of the first embodiment.
  • the magnet 77 of the electromagnetic actuator 75 is provided on the second main surface 3 b of the vibrating body 3.
  • the case member 79 of the present embodiment has a support portion 79 a that extends radially inward from the inner surface and supports the solenoid coil 76. Except for the above points, the case member 79 has the same configuration as the case member 59 of the fourth embodiment.
  • the solenoid coil 76 is disposed so as to face the magnet 77.
  • a piezoelectric element may be bonded to the vibration body 3. Alternatively, a part or all of the electromagnetic actuator may be used to generate and output the feedback signal.
  • the vibration device also includes a voltage application circuit that applies a voltage to the transparent electrode layer 15 at a certain timing.
  • a piezoelectric element having a feedback electrode is preferably provided on the vibrating body 3.
  • the vibrating body 83 includes an extension portion 83 d that extends toward the internal space of the vibration device.
  • the magnet 77 is disposed on the outer surface of the extension 83d.
  • the solenoid coil 76 is supported by a support portion 79 a of the case member 79 so as to face the magnet 77. Even in such a case, a water droplet or the like can be moved more reliably without depending on the difference in surface tension at each position.
  • Timing generation circuit 14B Switching circuit 14C ... Power source 15 ... Transparent electrode layer 16 ... Dielectric layer 19a ... Bottom 19b ... Inner wall 19c ... Outer wall 19d ... Top plate portion 19e ... Rib 25 ... Piezoelectric vibrator 26 ... Piezoelectric body 27a ... First electrode 27b ... Second electrode 27c ... Feedback electrode 32 ... Vibrating elements 35C, 35D ... Piezoelectric vibrator 42 ... Vibrating element 43A 1st vibrating body 43B ... 2nd vibrating body 43c ... support body 43d ... hinge part 51 ... vibrating device 52 ... vibrating element 53 ... vibrating body 54 ... translucent body 55 ... transparent electrode layer 56 ... dielectric layer 57 ...
  • bottom plate 58 ... Lens module 58a ... Lens 58b ... Lens holder 59 ... Case member 60 ... Imaging device 60A ... Imaging device 67 ... Bottom plate 72 ... Vibration element 75 ... Electromagnetic actuator 76 ... Solenoid coil 77 ... Magnet 79 ... Case member 79a ... Supporting part 83 ... Vibrating body 83d ... Extension part

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Abstract

L'invention concerne un dispositif d'oscillation avec lequel il est possible de déplacer de manière fiable des gouttelettes d'eau, sans s'appuyer sur des différences de tension de surface à différentes positions. Ce dispositif d'oscillation 1 comprend : un élément oscillant 2 comportant un corps oscillant 3 comportant un corps translucide 4 (partie de corps translucide) et un oscillateur piézoélectrique 5A (oscillateur) qui fait osciller le corps oscillant ; une couche d'électrode transparente 15 disposée sur le corps translucide 4 du corps oscillant 3 ; une couche diélectrique 16 disposée sur la couche d'électrode transparente 15 ; et un circuit d'application de tension qui est électriquement connecté à la couche d'électrode transparente 15 et qui applique une tension à la couche d'électrode transparente 15.
PCT/JP2018/046594 2018-05-22 2018-12-18 Dispositif d'oscillation et dispositif de détection optique WO2019225042A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023021812A1 (fr) * 2021-08-18 2023-02-23 株式会社村田製作所 Boîtier et dispositif de détection

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011010094A (ja) * 2009-06-26 2011-01-13 Nikon Corp 光学装置および光学機器
JP2013028072A (ja) * 2011-07-28 2013-02-07 Sharp Corp 防汚構造、及びその動作方法
WO2017110564A1 (fr) * 2015-12-25 2017-06-29 株式会社村田製作所 Dispositif de vibration et appareil photo
WO2017110563A1 (fr) * 2015-12-24 2017-06-29 株式会社村田製作所 Dispositif de vibration, procédé pour piloter ce dernier et caméra

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011010094A (ja) * 2009-06-26 2011-01-13 Nikon Corp 光学装置および光学機器
JP2013028072A (ja) * 2011-07-28 2013-02-07 Sharp Corp 防汚構造、及びその動作方法
WO2017110563A1 (fr) * 2015-12-24 2017-06-29 株式会社村田製作所 Dispositif de vibration, procédé pour piloter ce dernier et caméra
WO2017110564A1 (fr) * 2015-12-25 2017-06-29 株式会社村田製作所 Dispositif de vibration et appareil photo

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023021812A1 (fr) * 2021-08-18 2023-02-23 株式会社村田製作所 Boîtier et dispositif de détection

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