WO2019223567A1 - 显示基板、显示装置以及显示基板的制作方法 - Google Patents
显示基板、显示装置以及显示基板的制作方法 Download PDFInfo
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- WO2019223567A1 WO2019223567A1 PCT/CN2019/086683 CN2019086683W WO2019223567A1 WO 2019223567 A1 WO2019223567 A1 WO 2019223567A1 CN 2019086683 W CN2019086683 W CN 2019086683W WO 2019223567 A1 WO2019223567 A1 WO 2019223567A1
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- 239000000758 substrate Substances 0.000 title claims abstract description 108
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 239000002184 metal Substances 0.000 claims abstract description 81
- 239000010409 thin film Substances 0.000 claims abstract description 61
- 239000010410 layer Substances 0.000 claims description 294
- 239000011229 interlayer Substances 0.000 claims description 40
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 31
- 229920005591 polysilicon Polymers 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 24
- 239000002096 quantum dot Substances 0.000 claims description 22
- 239000011149 active material Substances 0.000 claims description 20
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 14
- 239000003086 colorant Substances 0.000 claims description 11
- 238000000059 patterning Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 14
- 239000011159 matrix material Substances 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0054—Processes for devices with an active region comprising only group IV elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/34—Materials of the light emitting region containing only elements of Group IV of the Periodic Table
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/50—Wavelength conversion elements
- H01L33/501—Wavelength conversion elements characterised by the materials, e.g. binder
- H01L33/502—Wavelength conversion materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
- H01L25/167—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0016—Processes relating to electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0041—Processes relating to semiconductor body packages relating to wavelength conversion elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/50—Wavelength conversion elements
- H01L33/507—Wavelength conversion elements the elements being in intimate contact with parts other than the semiconductor body or integrated with parts other than the semiconductor body
Definitions
- the present disclosure relates to a display substrate, a display device, and a method for manufacturing a display substrate.
- Micro-LED Micro Light-Emitting Diode
- Micro-LED Micro Light-Emitting Diode
- CMOS complementary metal-oxide-semiconductor
- Micro-LED Micro Light-Emitting Diode
- each pixel of an LED display can be addressed and individually driven to light. It can be regarded as a miniature version of an outdoor LED display. Level down to the micron level.
- Micro-LED inherits the characteristics of high efficiency, high brightness, high reliability and fast response time of inorganic LED. It has the characteristics of self-luminous and no backlight, more energy-saving, simple structure and small size. , Thin and other advantages. In addition, because Micro LEDs are extremely small, they display ultra-high resolution.
- Micro-LED colors are easier to accurately debug, have longer luminous life and higher brightness, and have better material stability, long life, no image Branding and other advantages. Therefore, it is another thin, light and power-saving display technology after OLED.
- At least one embodiment of the present disclosure provides a method for manufacturing a display substrate, including: sequentially forming a light emitting diode on a first substrate and a first metal layer covering the light emitting diode; and sequentially forming an active material layer on the second substrate. And a second metal layer; combining the first metal layer on the first substrate and the second metal layer on the second substrate face to face; peeling off the second substrate; the first metal layer Patterning with the second metal layer to form a connection metal pattern electrically connected to a top electrode of the light emitting diode; and forming a thin film transistor on the first substrate, wherein an active layer of the thin film transistor is Formed by patterning the active material layer, a drain of the thin film transistor is electrically connected to the connection metal pattern.
- forming the light emitting diode on the first substrate includes epitaxially growing a light emitting layer on the first substrate.
- the light emitting layer includes an inorganic semiconductor material.
- an area of the connection metal pattern is smaller than an area of a top electrode of the light emitting diode.
- forming the thin film transistor on the first substrate includes: patterning the active material layer to form the active layer; forming a gate insulating layer on the active layer; and Forming a gate on the gate insulating layer; forming an interlayer insulating layer on the gate; forming a first transition layer connected to the active layer in the gate insulating layer and the interlayer insulating layer A hole, a second via, and a third via connected to the connection metal pattern; a source and a drain are formed on the interlayer insulating layer, and the source is connected to the source through the first via and In the active layer connection, the drain is connected to the active layer through the second via and is connected to the connection pattern through the third via.
- forming a thin film transistor on the first substrate includes: patterning an active material layer to form the active layer; forming a drain connected to the active layer and the connection metal pattern; A gate insulating layer is formed on the drain; a gate is formed on the gate insulating layer; an interlayer insulating layer is formed on the gate; the gate insulating layer and the interlayer insulating layer are formed on the gate; Forming a first via hole connected to the active layer; and forming a source electrode on the interlayer insulating layer, the source electrode being connected to the active layer through the first via hole.
- the manufacturing method further includes forming a buffer layer on the second substrate between the active material layer and the second metal layer, wherein the buffer layer and the active layer The material layer is simultaneously patterned to form a buffer layer pattern, and the active layer is insulated from the connection metal pattern through the buffer layer pattern.
- the manufacturing method further includes: forming a first planarization layer on the thin film transistor; and forming a light conversion layer on the first planarization layer.
- the light conversion layer includes a white fluorescent layer and a filter layer sequentially disposed on the first flat layer, and the filter layer includes a plurality of color photoresists with different colors.
- the light conversion layer includes a quantum dot structure layer
- the quantum dot material structure layer includes a plurality of colored light regions provided with quantum dot materials of different colors.
- the manufacturing method further includes forming a second planarization layer on the light conversion layer.
- At least one embodiment of the present disclosure provides a display substrate including a substrate and a plurality of pixel units disposed on the substrate, wherein at least one of the plurality of pixel units includes sequentially disposed along a direction away from the substrate.
- the electrode is conductively connected to the connection metal pattern.
- the thin film transistor is a low temperature polysilicon thin film transistor.
- the low-temperature polysilicon thin film transistor includes: a low-temperature polysilicon active layer, a gate insulating layer, a gate, an interlayer insulating layer, a source, and a drain, which are sequentially disposed along a direction away from the connection metal pattern, wherein The source is connected to the low-temperature polysilicon active layer through the gate insulating layer and a first via in the interlayer insulating layer; the drain is connected through the gate insulating layer and the layer A second via in the interlayer insulation layer is connected to the low-temperature polysilicon active layer, and the drain is connected to the connection metal pattern through the gate insulating layer and a third via in the interlayer insulation layer. Electrical connection.
- the low-temperature polysilicon thin film transistor includes: a low-temperature polysilicon active layer, a gate insulating layer, a drain, a gate, an interlayer insulating layer, and a source, which are sequentially disposed along a direction away from the connection metal pattern, where The source is connected to the low-temperature polysilicon active layer through the gate insulating layer and a first via in the interlayer insulating layer; the drain is disposed away from the low-temperature polysilicon active layer One side of the connection metal pattern is electrically connected to the connection metal pattern.
- the display substrate further includes: a first planarization layer and a light conversion layer sequentially disposed along a direction away from the thin film transistor.
- the light conversion layer includes a white fluorescent layer and a filter layer sequentially disposed on the first flat layer, and the filter layer includes a plurality of color photoresists with different colors.
- the light conversion layer includes a quantum dot structure layer
- the quantum dot material structure layer includes a plurality of colored light regions provided with quantum dot materials of different colors.
- the light emitting diode is a blue light emitting diode.
- At least one embodiment of the present disclosure provides a display device including the display substrate according to any one of the above.
- FIG. 1 is a schematic structural diagram of a light emitting diode according to an embodiment of the present disclosure
- FIG. 2 is a schematic structural diagram of a display substrate according to an embodiment of the present disclosure
- FIG. 3 is a schematic structural diagram of a display substrate according to another embodiment of the present disclosure.
- FIG. 4 is a schematic structural diagram of a display substrate according to another embodiment of the present disclosure.
- FIG. 5 is a schematic structural diagram of a display substrate according to an embodiment of the present disclosure.
- FIG. 6 is a schematic structural diagram of a display substrate according to another embodiment of the present disclosure.
- FIG. 7 is a schematic structural diagram of a display substrate according to another embodiment of the present disclosure.
- FIG. 8 is a schematic structural diagram of a display substrate according to an embodiment of the present disclosure.
- FIG. 9 is a schematic structural diagram of a display substrate according to another embodiment of the present disclosure.
- FIG. 10 is a schematic structural diagram of a display substrate according to another embodiment of the present disclosure.
- FIG. 11 is a schematic structural diagram of a display substrate according to an embodiment of the present disclosure.
- FIG. 12 is a schematic structural diagram of a display substrate according to another embodiment of the present disclosure.
- FIG. 13 is a schematic structural diagram of a display substrate according to another embodiment of the present disclosure.
- FIG. 14 is a schematic structural diagram of a display substrate according to an embodiment of the present disclosure.
- 15 is a flowchart of a method for manufacturing a display substrate according to an embodiment of the present disclosure.
- the micro-LED device requires an epitaxial layer during fabrication, the epitaxial layer is relatively high and can only be fabricated on a silicon wafer or sapphire. It is difficult to directly fabricate an LED on a thin film transistor control circuit. Most of the current Micro-LED devices are separately manufactured LED and thin film transistor control circuits and then aligned and bonded. Since the registration and bonding will lose a certain degree of accuracy, it is not conducive to the production of high-resolution panels.
- the embodiments of the present disclosure provide a display substrate, a display device, and a manufacturing method of the display substrate.
- a display substrate provided by an embodiment of the present disclosure includes: a substrate 1 and a plurality of pixel units arranged on the substrate 1 in an array.
- the pixel unit includes a light emitting diode 2, a connection metal 3, and a thin film transistor 5 which are sequentially disposed in a direction away from the substrate 1.
- the connection metal 3 is conductively connected to the top electrode 4 of the light-emitting diode 2.
- the active layer 6 of the thin film transistor 5 is insulated from the connection metal 3, and the drain electrode 7 of the thin film transistor 5 is electrically connected to the connection metal 3.
- the light emitting diode 2 is a micro light emitting diode.
- the substrate of the thin-film transistor 5 of the display substrate is manufactured, the substrate of the thin-film transistor 5 that has not been patterned with the active layer and the light-emitting diode 2 substrate are directly pasted. Then, the thin film transistor 5 is fabricated on the light emitting diode 2. Since the connection metal 3 is conductively connected to the top electrode 4 of the light emitting diode 2 and the drain electrode 7 of the thin film transistor 5 is conductively connected to the connection metal 3, the drain electrode 7 of the thin film transistor 5 is conductively connected to the top electrode 4 of the light emitting diode 2.
- the manufactured light-emitting diode 2 does not need to be aligned and bonded to the thin-film transistor 5. In this way, the loss of alignment accuracy can be avoided, so that the size of the light-emitting diode 2 can be made smaller to produce a super-high-resolution display device.
- the specific type of the thin film transistor 5 is not limited, and may be, for example, a low temperature polysilicon thin film transistor.
- the low-temperature polysilicon thin film transistor includes a first buffer layer 8, a low-temperature polysilicon active layer 9, a second buffer layer 10, a gate insulating layer 11, and a gate 12 (see FIG. 6), an interlayer insulating layer 13, a source electrode 14 and a drain electrode 7.
- the source electrode 14 is connected to the low-temperature polysilicon active layer 9 through the gate insulating layer 11 and the first via 15 (see FIG. 6) on the interlayer insulating layer 13; the drain electrode 7 is insulated through the gate insulating layer 11 and interlayer insulation
- the second via 16 on the layer 13 is connected to the low-temperature polysilicon active layer 9, and the drain 7 is electrically connected to the connection metal 3 through the gate insulating layer 11 and the third via 17 on the interlayer insulating layer 13.
- the low temperature polysilicon thin film transistor includes a first buffer layer 8, a low temperature polysilicon active layer 9, a gate insulating layer 11, and Drain 7, gate 12, interlayer insulating layer 13, and source 14.
- the source electrode 14 is connected to the low-temperature polysilicon active layer 9 through the gate insulating layer 11 and the first via hole 15 on the interlayer insulating layer 13; Side and is conductively connected to the connection metal 3.
- This arrangement can prevent via holes for connecting the drain electrode 7 and the low-temperature polysilicon active layer 9 on the gate insulating layer 11 and the interlayer insulating layer 13 and via holes for connecting the drain electrode 7 to the connection metal 3, thereby It can reduce the difficulty of substrate manufacturing process and improve product yield.
- the display substrate further includes a first planarization layer 18, a white fluorescent layer 19, a filter layer 20, and a second planarization layer which are sequentially disposed along a direction away from the thin film transistor 5.
- the planarization layer 23 and the filter layer 20 include a color photoresistor 21 corresponding to each pixel unit and a black matrix 22 defining an adjacent color photoresistor 21.
- the light emitting diode 2 is a miniature blue light emitting diode
- the display substrate further includes a first planarization layer 18 and a quantum dot material, which are sequentially disposed along a direction away from the thin film transistor 5.
- the quantum dot material structure layer includes a first color light region 30, a second color light region 31, and a third color light region 32 corresponding to each pixel unit, and defines adjacent first color light regions 30 and second color light regions 31.
- the black matrix 22 of the third color light region 32 The first colored light area 30 is provided with a green light quantum dot material structure layer, and the second colored light area 31 is provided with a red light quantum dot material structure layer.
- the white fluorescent layer, the filter layer, and the quantum dot material layer described above are examples of the light conversion layer.
- the light conversion layer can convert the monochromatic light emitted by the monochromatic diode into light of other colors or into light of different colors.
- an embodiment of the present disclosure further provides a display device including a display substrate as in any one of the foregoing.
- the size of the light emitting diode of the display device of the present technical solution can be made smaller, and the product yield and the resolution of the display device can be made higher.
- an embodiment of the present disclosure further provides a method for manufacturing a display substrate, which includes the following steps 001-006.
- Step 001 As shown in FIG. 1, a light emitting diode 2 and a first metal layer 25 covering the light emitting diode 2 are sequentially formed on the first substrate 24.
- Step 002 As shown in FIG. 2, an active material layer and a second metal layer 27 of a thin film transistor are sequentially formed on the second substrate 26.
- the example of the active material layer here may be the low-temperature polysilicon active layer 9 described above.
- the first buffer layer 8 and the second buffer layer 10 may be formed on both sides of the active material layer.
- the first buffer layer 8 and the second buffer layer 10 are insulating materials, and the first buffer layer 8 can prevent the active material layer from being connected to the second metal layer 27.
- Step 003 As shown in FIG. 3, the first metal layer 25 on the first substrate 24 and the second metal layer 27 on the second substrate 26 face each other and are bonded together. For example, in this step, the first metal layer 25 and the second metal layer 27 are bonded to face each other.
- Step 004 As shown in FIGS. 4 and 8, the second substrate 26 is peeled.
- the second substrate 26 is peeled in this step.
- the method of peeling the second substrate 26 is not particularly limited.
- a sacrificial layer may be formed between the second substrate 26 and the active material layer.
- the sacrificial layer may be decomposed or melted by means such as laser irradiation or heating, so that the second substrate can be peeled off. .
- Step 005 Etching the first metal layer 25 and the second metal layer 27 bonded together to form a pattern of the connection metal 3 which is conductively connected to the top electrode 4 of the light emitting diode 2, and its structure is shown in FIG. 5 and FIG. Show.
- Step 006 A thin film transistor 5 is formed on the first substrate 24 that has completed the above steps.
- the drain electrode 7 of the thin film transistor 5 is electrically connected to the connection metal 3, as shown in FIGS. 6, 7, 10, and 11.
- the active layer of the thin film transistor 5 may be formed by patterning an active material layer.
- forming a light emitting diode on the first substrate includes epitaxially growing a light emitting layer on the first substrate.
- the light emitting layer material includes an inorganic semiconductor material.
- a step of growing an n-type contact layer, a p-type contact layer, and a buffer layer may be further included.
- a process of forming an n-side electrode and a p-side electrode may be included.
- one of the n-side electrode and the p-side electrode may be a top electrode of the above-mentioned light emitting diode.
- the area of the connection metal 3 can be smaller than the area of the top electrode 4 of the light emitting diode. In this way, after the connection metal 3 is formed on the top electrode 4, it can avoid completely blocking the top electrode and affecting the light emitting diode's light .
- the area of the connection metal 3 is smaller than 1/4 of the area of the top electrode 4.
- the area of the connection metal 3 can be set as small as possible under the condition that the electrical transmission performance is satisfied.
- the light emitting diode 2 and the first metal layer 25 covering the light emitting diode 2 are firstly fabricated on the first substrate 24, and then the thin film is fabricated on the second substrate 26.
- the active material layer and the second metal layer 27 of the transistor 5 are then bonded to each other. Since the two metal layers are made on the entire substrate on the entire surface, it is less difficult to align the two metal layers when they are bonded, so the alignment accuracy requirements are lower.
- the display substrate is manufactured by the method of the present technical solution, it is not necessary to align the manufactured light-emitting diode 2 and the thin-film transistor 5 in the process of manufacturing the display device, so that the light-emitting diode 2 and the thin-film transistor 5 can be avoided.
- the alignment requires a smaller size of the light-emitting diode 2, thereby improving the product yield of the display substrate and the resolution of the display device.
- the thin film transistor 5 is a low temperature polysilicon thin film transistor, and forming and forming the thin film transistor 5 on the first substrate 24 includes, for example, etching and forming an active material layer.
- Metal 3 insulated active layer 6 see FIG.
- a gate insulating layer 11 is formed on the active layer 6; a gate 12 pattern is formed on the gate insulating layer 11; a layer is formed on the gate 12 pattern Inter-insulating layer 13; forming a first via 15 for conducting connection between source 14 and active layer 6 on gate insulating layer 11 and inter-layer insulating layer 13; gate insulating layer 11 and inter-layer insulating layer 13 A second via 16 for conductively connecting the drain 7 to the active layer 6 is formed thereon, and a third via 17 for conductively connecting the drain 7 to the connection metal 3 is formed; a source is formed on the interlayer insulating layer 13 Pole 14 pattern and drain 7 pattern.
- the thin film transistor is a low-temperature polysilicon thin film transistor
- forming the thin film transistor on the first substrate 24 includes, for example, etching an active material layer to Active layer 6 connected to metal 3 insulation gap; pattern of drain electrode 7 connected to active layer 6 and connection metal 3; gate insulating layer 11 formed on drain electrode 7; gate formed on gate insulating layer 11 12 pattern; forming an interlayer insulating layer 13 on the gate 12 pattern; forming a first via 15 for conducting connection between the source electrode 14 and the active layer 6 on the gate insulating layer 11 and the interlayer insulating layer 13; A source electrode 14 pattern is formed on the interlayer insulating layer 13.
- the method further includes: forming a first planarization layer 18 on the interlayer insulating layer 13; forming on the first planarization layer 18 White fluorescent layer 19; a filter layer 20 is formed on the white fluorescent layer 19, and the filter layer 20 includes a color photoresistor 21 corresponding to each pixel unit and a black matrix 22 defining an adjacent color photoresistor 21; A second planarization layer 23 is formed thereon.
- the light emitting diode 2 is a blue light emitting diode
- the method further includes: forming a first planarization layer 18 on the interlayer insulating layer 13; A quantum dot material structure layer 29 is formed on the first planarization layer 18.
- the quantum dot material structure layer 29 includes a first color light area 30, a second color light area 31, and a third color light area 32 corresponding to each pixel unit.
- the display device may be a VR device, an AR device, a mobile phone, a notebook computer, an e-book, or a tablet computer.
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Abstract
Description
Claims (20)
- 一种显示基板的制作方法,包括:在第一基板之上依次形成发光二极管和覆盖发光二极管的第一金属层;在第二基板之上依次形成有源材料层和第二金属层;将所述第一基板上的第一金属层与所述第二基板上的第二金属层相面对结合;将所述第二基板剥离;对所述第一金属层和所述第二金属层进行图案化,以形成与所述发光二极管的顶电极电连接的连接金属图案;以及在所述第一基板上形成薄膜晶体管,其中所述薄膜晶体管的有源层是通过图案化所述有源材料层而形成,所述薄膜晶体管的漏极与所述连接金属图案电连接。
- 如权利要求1所述的制作方法,其中,在所述第一基板上形成所述发光二极管包括在所述第一基板上外延生长发光层。
- 如权利要求2所述的制作方法,其中,所述发光层包括无机半导体材料。
- 如权利要求1-3任一项所述的制作方法,其中,所述连接金属图案的面积小于所述发光二极管的顶电极的面积。
- 如权利要求1-4任一项所述的制作方法,其中,在所述第一基板上形成所述薄膜晶体管包括:将所述有源材料层图案化以形成所述有源层;在所述有源层上形成栅极绝缘层;在所述栅极绝缘层上形成栅极;在所述栅极上形成层间绝缘层;在所述栅极绝缘层以及所述层间绝缘层中形成与所述有源层连接的第一过孔和第二过孔以及与所述连接金属图案连接的第三过孔;在所述层间绝缘层上形成源极和所述漏极,所述源极通过所述第一过孔与所述有源层连接,所述漏极通过所述第二过孔与所述有源层连接且通过所述第三过孔与所述连接图案连接。
- 如权利要求1-4任一项所述的制作方法,其中,在所述第一基板上形成薄膜晶体管包括:将有源材料层图案化以形成所述有源层;形成与所述有源层以及所述连接金属图案连接的漏极;在所述漏极上形成栅极绝缘层;在所述栅极绝缘层上形成栅极;在所述栅极上形成层间绝缘层;在所述栅极绝缘层以及所述层间绝缘层中形成与所述有源层连接的第一过孔;以及在所述层间绝缘层上形成源极,所述源极通过所述第一过孔与所述有源层连接。
- 如权利要求1-6任一项所述的制作方法,还包括,在形成所述有源材料层和所述第二金属层之间,在所述第二基板上形成缓冲层,其中,所述缓冲层与所述有源材料层被同时图案化,以形成缓冲层图案,所述有源层通过所述缓冲层图案与所述连接金属图案绝缘。
- 如权利要求1-7任一项所述的制作方法,还包括:在所述薄膜晶体管上形成第一平坦化层;在所述第一平坦化层上形成光转换层。
- 如权利要求8所述的制作方法,其中,所述光转化层包括依次设置在所述第一平坦层上的白荧光层和滤光层,所述滤光层包括颜色不同的多个彩色光阻。
- 如权利要求8所述的制作方法,其中,所述光转换层包括量子点结构层,所述量子点材料结构层包括设置有不同颜色量子点材料的多个彩色光区。
- 如权利要求8-10任何一项所述的制作方法,还包括在所述光转换层上形成第二平坦化层。
- 一种显示基板,包括:基板以及设置于所述基板上的多个像素单元,其中:所述多个像素单元中的至少一个包括沿远离所述基板方向依次设置的发光二极管、连接金属图案以及薄膜晶体管;所述连接金属图案与所述发光二极管的顶电极导电连接;所述薄膜晶体管的有源层与所述连接金属图案绝缘间隔,所述薄膜晶体管的漏极与所述连接金属图案导电连接。
- 如权利要求12所述的显示基板,其中,所述薄膜晶体管为低温多晶硅薄膜晶体管。
- 如权利要求13所述的显示基板,其中,所述低温多晶硅薄膜晶体管包括:沿远离所述连接金属图案方向依次设置的低温多晶硅有源层、栅极绝缘层、栅极、层间绝缘层、源极和漏极,其中:其中,所述源极通过所述栅极绝缘层以及所述层间绝缘层中的第一过孔与所述低温多晶硅有源层连接;所述漏极通过所述栅极绝缘层以及所述层间绝缘层中的第二过孔与所述低温多晶硅有源层连接,且所述漏极通过所述栅极绝缘层以及所述层间绝缘层中的第三过孔与所述连接金属图案电连接。
- 如权利要求13所述的显示基板,其中,所述低温多晶硅薄膜晶体管包括:沿远离所述连接金属图案方向依次设置的低温多晶硅有源层、栅极绝缘层、漏极、栅极、层间绝缘层和源极,其中,所述源极通过所述栅极绝缘层以及所述层间绝缘层中的第一过孔与所述低温多晶硅有源层连接;所述漏极设置于所述低温多晶硅有源层远离所述连接金属图案的一侧,且与所述连接金属图案电连接。
- 如权利要求12-15任一项所述的显示基板,还包括:沿远离所述薄膜晶体管方向依次设置的第一平坦化层和光转换层。
- 如权利要求16所述的显示基板,其中,所述光转化层包括依次设置在所述第一平坦层上的白荧光层和滤光层,所述滤光层包括颜色不同的多个彩色光阻。
- 如权利要求16所述的显示基板,其中,所述光转换层包括量子点结构层,所述量子点材料结构层包括设置有不同颜色量子点材料的多个彩色光区。
- 如权利要求19所述的显示基板,其中,所述发光二极管为蓝光发光二极管。
- 一种显示装置,包括如权利要求12-19任一项所述的显示基板。
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TWI706397B (zh) * | 2018-10-12 | 2020-10-01 | 友達光電股份有限公司 | 顯示裝置及其之形成方法 |
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CN111863729A (zh) * | 2020-06-29 | 2020-10-30 | 南京中电熊猫液晶显示科技有限公司 | 垂直结构微型发光二极管显示面板及其制造方法 |
CN111933036B (zh) * | 2020-08-31 | 2022-10-21 | 武汉天马微电子有限公司 | 显示面板及显示装置 |
CN112271197B (zh) * | 2020-10-23 | 2024-03-08 | 京东方科技集团股份有限公司 | 显示基板及其制备方法、显示装置 |
CN114495734A (zh) * | 2020-10-27 | 2022-05-13 | 深圳市柔宇科技股份有限公司 | 显示装置 |
CN112993139B (zh) * | 2020-11-10 | 2022-09-27 | 重庆康佳光电技术研究院有限公司 | 显示面板及其制作方法和显示装置 |
CN112447786B (zh) * | 2020-11-23 | 2022-09-30 | 厦门天马微电子有限公司 | 发光二极管显示面板及其制作方法、发光二极管显示装置 |
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WO2023019520A1 (zh) * | 2021-08-19 | 2023-02-23 | 重庆康佳光电技术研究院有限公司 | 显示面板及其制造方法 |
TWI778790B (zh) * | 2021-09-15 | 2022-09-21 | 友達光電股份有限公司 | 畫素結構 |
CN114023850B (zh) * | 2021-10-27 | 2023-12-15 | 武汉华星光电半导体显示技术有限公司 | 一种显示面板及显示面板的制备方法 |
CN114203733B (zh) * | 2021-12-10 | 2023-07-25 | 武汉华星光电半导体显示技术有限公司 | 显示装置及其制造方法 |
CN115425120B (zh) * | 2022-08-09 | 2023-10-20 | 惠科股份有限公司 | 显示面板的制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102714138A (zh) * | 2010-01-22 | 2012-10-03 | 夏普株式会社 | 半导体装置及其制造方法 |
KR20130137985A (ko) * | 2012-06-08 | 2013-12-18 | 엘지전자 주식회사 | 반도체 발광 소자를 이용한 디스플레이 장치 |
CN103855179A (zh) * | 2012-12-03 | 2014-06-11 | 孙润光 | 一种无机发光二极管显示器件结构 |
WO2016015174A1 (zh) * | 2014-07-30 | 2016-02-04 | 孙润光 | 一种红色无机发光二极管显示器件及其制作方法 |
CN108493209A (zh) * | 2018-05-24 | 2018-09-04 | 京东方科技集团股份有限公司 | 一种显示基板、显示装置以及显示基板的制作方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1760798B1 (en) * | 2005-08-31 | 2012-01-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP2010537408A (ja) * | 2007-08-14 | 2010-12-02 | ナイテック インコーポレイテッド | マイクロピクセル紫外発光ダイオード |
KR102079253B1 (ko) * | 2013-06-26 | 2020-02-20 | 삼성디스플레이 주식회사 | 박막트랜지스터 기판, 이를 구비하는 유기 발광 장치, 박막트랜지스터 기판 제조방법 및 유기 발광 장치 제조방법 |
JP2016025147A (ja) * | 2014-07-17 | 2016-02-08 | ソニー株式会社 | 電子デバイスおよびその製造方法、並びに電子機器 |
US10134330B2 (en) * | 2015-03-17 | 2018-11-20 | Kunshan Yunyinggu Electronic Technology Co., Ltd. | Subpixel arrangement for displays and driving circuit thereof |
JP6995739B2 (ja) * | 2015-07-23 | 2022-01-17 | ソウル セミコンダクター カンパニー リミテッド | ディスプレイ装置及びその製造方法 |
KR102465382B1 (ko) * | 2015-08-31 | 2022-11-10 | 삼성디스플레이 주식회사 | 표시장치 및 표시장치의 제조방법 |
US10304811B2 (en) * | 2015-09-04 | 2019-05-28 | Hong Kong Beida Jade Bird Display Limited | Light-emitting diode display panel with micro lens array |
US10068888B2 (en) * | 2015-12-21 | 2018-09-04 | Hong Kong Beida Jade Bird Display Limited | Making semiconductor devices with alignment bonding and substrate removal |
US10079264B2 (en) * | 2015-12-21 | 2018-09-18 | Hong Kong Beida Jade Bird Display Limited | Semiconductor devices with integrated thin-film transistor circuitry |
JPWO2019111763A1 (ja) * | 2017-12-04 | 2021-02-04 | 富士フイルム株式会社 | ルーバーフィルム、面光源装置および液晶表示装置 |
CN112639937B (zh) * | 2018-09-05 | 2023-06-23 | 株式会社半导体能源研究所 | 显示装置、显示模块、电子设备及显示装置的制造方法 |
-
2018
- 2018-05-24 CN CN201810510492.7A patent/CN108493209B/zh active Active
-
2019
- 2019-05-13 US US16/647,940 patent/US11575067B2/en active Active
- 2019-05-13 WO PCT/CN2019/086683 patent/WO2019223567A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102714138A (zh) * | 2010-01-22 | 2012-10-03 | 夏普株式会社 | 半导体装置及其制造方法 |
KR20130137985A (ko) * | 2012-06-08 | 2013-12-18 | 엘지전자 주식회사 | 반도체 발광 소자를 이용한 디스플레이 장치 |
CN103855179A (zh) * | 2012-12-03 | 2014-06-11 | 孙润光 | 一种无机发光二极管显示器件结构 |
WO2016015174A1 (zh) * | 2014-07-30 | 2016-02-04 | 孙润光 | 一种红色无机发光二极管显示器件及其制作方法 |
CN108493209A (zh) * | 2018-05-24 | 2018-09-04 | 京东方科技集团股份有限公司 | 一种显示基板、显示装置以及显示基板的制作方法 |
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