WO2019163604A1 - Cam-type control valve, and stroke adjustment method for cam-type control valve - Google Patents

Cam-type control valve, and stroke adjustment method for cam-type control valve Download PDF

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Publication number
WO2019163604A1
WO2019163604A1 PCT/JP2019/005099 JP2019005099W WO2019163604A1 WO 2019163604 A1 WO2019163604 A1 WO 2019163604A1 JP 2019005099 W JP2019005099 W JP 2019005099W WO 2019163604 A1 WO2019163604 A1 WO 2019163604A1
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WIPO (PCT)
Prior art keywords
cam
bonnet
valve
holder
stem
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PCT/JP2019/005099
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French (fr)
Japanese (ja)
Inventor
洋平 澤田
西野　功二
暢 平井
耕平 執行
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株式会社フジキン
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Publication of WO2019163604A1 publication Critical patent/WO2019163604A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/524—Mechanical actuating means with crank, eccentric, or cam with a cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam

Definitions

  • the present invention is mainly used for adjusting the flow rate of a fluid such as a gas or a refrigerant interposed in a fluid supply line such as a semiconductor manufacturing facility or a solar cell manufacturing process, or a refrigerant circulation circuit of a chiller unit,
  • a fluid supply line such as a semiconductor manufacturing facility or a solar cell manufacturing process
  • a refrigerant circulation circuit of a chiller unit
  • the present invention relates to an improvement in a motor-driven cam control valve and a stroke adjustment method for the cam control valve that can finely and precisely adjust the flow rate of gas or refrigerant using a cam and a motor.
  • Patent Document 1 Japanese Utility Model Laid-Open No. 61-117971
  • Patent Document 2 Japanese Utility Model Laid-Open No. 61-117972
  • each of them has a valve box having a fluid flow path and a valve seat, a valve body that contacts and separates from the valve seat of the valve box, and a valve body
  • An elastic body that urges the valve body away from the valve seat, a valve rod that is connected to the valve body and supported by the upper lid of the valve box so as to be movable up and down, and a cam roller provided at the upper end of the valve rod.
  • a cam plate that pushes down the valve stem and a pulse motor (stepping motor) that rotationally drives the cam plate are provided. The cam plate is rotated by the pulse motor, and the valve stem is pushed down via the cam plate.
  • the valve body provided at the lower end is made to contact the valve seat.
  • the motor-driven cam control valve can perform high-precision flow rate control and has excellent practical utility.
  • the cam plate rotates by a predetermined angle according to the number of pulses supplied to the pulse motor, and the valve rod and the valve body are displaced by a small amount by the rotation of the cam plate. Therefore, the zero point must be adjusted so that the valve body and the valve stem are accurately positioned to the zero point position (fully open position or fully closed position) when the valve is fully opened or fully closed. .
  • the cam plate is adjusted so that the minimum radius portion of the cam plate is in contact with the cam roller and the valve body and the valve seat are most separated, and when the cam type control valve is fully closed, Adjustment must be made so that the maximum radius of the cam plate abuts against the cam roller and the valve element rests against the valve seat with an appropriate force.
  • the conventional motor-driven cam control valve described above has a problem that it does not have any adjustment mechanism for adjusting the position of the valve body or the like to the zero point position, and it takes much time to adjust the zero point of the valve.
  • valve body may be excessively pressed against the valve seat, or the contact between the valve body and the valve seat may be insufficient. There was something to do. As a result, there has been a problem that the valve seat or the like of the cam control valve is damaged or the fluid leaks.
  • the cam type control valve 30 includes a body 33 having a fluid flow path 31 and a valve seat 32, and a valve body 34 that opens and closes the valve seat 32 to open and close the fluid flow path 31.
  • a bonnet 36 that is placed on the body 33 and is fixed to the body 33 by a bonnet nut 35; a valve rod 37 that is guided by the bonnet 36 so as to move up and down and pushes down the valve body 34 to be seated on the valve seat 32; 37, a cam 38 that pushes down the valve rod 37, a motor 39 that rotationally drives the cam 38, a motor holder 40 that holds the motor 39, and a motor holder 40 that is fixed to the body 33 side so as to move the motor holder 40 in the vertical direction.
  • a support frame 41 that is movably supported, an elastic member 42 that urges the motor holder 40 away from the upper side 41a of the support frame 41, and a slidable on the upper side 41a of the support frame 41
  • two height adjustment screws 43 screwed into the motor holder 40, and the motor holder 40 is suspended from the support frame 41 by the two height adjustment screws 43. The height of the motor holder 40 relative to the support frame 41 is adjusted.
  • the cam control valve 30 is supported on the upper side 41a of the support frame 41 and the motor holder 40 so as to be movable in the vertical direction, and is in contact with the elastic member 42, and on the upper side 41a of the support frame 41.
  • An abutment pressure adjusting mechanism including an elastic force adjusting screw 45 that is screwed and presses the piston member 44 to adjust the elastic force of the elastic member 42 is provided.
  • the motor holder 40 is suspended from the support frame 41 by the height adjustment screw 43, so that the height adjustment screw 43 is screwed into the motor holder 40.
  • the height adjustment screw 43 is provided on the upper side portion 41a of the support frame 41, there is an advantage that the height adjustment screw 43 is easily accessible.
  • the elastic force of the elastic member 42 can be adjusted by the abutment pressure adjusting mechanism, the height of the cam 38 and the motor 39 is adjusted, and then the valve body 34 is adjusted. There is an advantage that the contact pressure to the valve seat 32 can be adjusted.
  • cam type control valve 30 still has problems to be solved.
  • the cam type control valve 30 adjusts the elastic force of the elastic member 42 by turning the elastic force adjusting screw 45 when adjusting the contact pressure of the valve body 34 to the valve seat 32.
  • the elastic member 42 may be overtightened by the elastic force adjusting screw 45 or the elastic member 42 may be insufficiently tightened, and it is difficult to adjust the contact pressure of the valve body 34 to the valve seat 32 to a predetermined pressure.
  • the skill of the operator was required. For example, if the elastic member 42 is tightened too much, the valve body 34 and the valve seat 32 are greatly deformed and damaged, or it is difficult to open the valve. Conversely, if the elastic member 42 is insufficiently tightened, a desired sealing property is obtained. It cannot be secured.
  • the cam control valve 30 adjusts the lower limit position of the motor holder 40 provided with the cam 38 and the motor 39 by turning two height adjusting screws 43, respectively. Since the adjustment of the elastic force adjusting screw 45 and the height adjustment described above are performed, there is a problem that it takes time to adjust the position of the motor holder 40. Moreover, the two height adjusting screws 43 have to be rotated by the same amount, and there is a problem that adjustment becomes complicated.
  • the cam type control valve 30 includes a support frame 41 that supports the motor holder 40 so as to be movable in the vertical direction, a lock nut 46 that fixes the support frame 41 to the body 33 side, two height adjusting screws 43, a piston.
  • a support frame 41 that supports the motor holder 40 so as to be movable in the vertical direction
  • a lock nut 46 that fixes the support frame 41 to the body 33 side
  • two height adjusting screws 43 two height adjusting screws 43
  • a piston There is a problem that the member 44, the elastic force adjusting screw 45, and the like are required, and the number of parts increases, resulting in complicated assembly and cost increase.
  • the present invention has been made in view of such problems, and its purpose is to easily adjust the contact pressure of the valve body to the valve seat and the height of the holder to which the motor as the drive means is attached.
  • Another object of the present invention is to provide a cam type control valve and a cam type control valve stroke adjusting method which can be performed at the same time and can reduce the number of parts to simplify assembly and reduce costs.
  • a first aspect of a cam control valve according to the present invention includes a fluid passage and a body provided with an elastic valve seat provided in the middle of the fluid passage, and the valve A valve body that opens and closes the fluid flow path by being contacted with a seat; a tubular bonnet fixed to the body; and a valve that is inserted and supported in the bonnet so as to be movable in the axial direction of the bonnet.
  • a second aspect of the cam control valve according to the present invention is the valve seat according to the first aspect, wherein the valve seat is formed of an annular synthetic resin material having an elastic force.
  • the central portion of the valve body bulged to one side is elastically deformed to the other side by pressing the stem.
  • the bonnet is formed in a cylindrical shape into which the stem can be inserted, and the first lock is formed on an outer peripheral surface of the bonnet.
  • the nut and the second lock nut are respectively screwed so as to be movable and adjustable in the axial direction of the bonnet, the first lock nut is disposed in the holder, and the second lock nut is positioned outside the holder. Arrange.
  • the linear movement is performed by linearly moving the stem in the axial direction of the bonnet between the bonnet and the stem. Insert a bush.
  • the holder in any one of the first aspect, the fourth aspect, and the fifth aspect, is formed in a box shape with an open front surface. The lower side of the holder is inserted into the bonnet so as to be slidable in the axial direction of the bonnet.
  • a first aspect of a cam type control valve stroke adjusting method according to the present invention is the cam type control valve stroke adjusting method according to any of the first to sixth aspects, wherein the cam and the stem and valve are controlled by a cam.
  • the cam position where the body is pushed down and the valve body is in contact with the valve seat and the distance between the rotation center of the cam and the stem is the maximum is set as the origin position, and the cam is rotated by a predetermined angle from the origin position.
  • the cam type control valve of the present invention adjusts the contact pressure of the valve body to the valve seat by rotating the cam and adjusting the height of the holder to which the motor as the driving means by the first lock nut is attached. Therefore, the elastic member is deformed by tightening operation of the elastic force adjusting screw, and the contact pressure to the valve seat of the valve body is adjusted. The contact pressure can be easily adjusted.
  • the cam type control valve of the present invention adjusts the height of the holder provided with the cam and the driving means with the first lock nut, and fixes the holder at a predetermined height position with the second lock nut. Compared with a conventional cam type control valve in which the height of the holder is adjusted by turning two height adjusting screws, the height of the holder can be adjusted easily and easily.
  • the cam type control valve of the present invention supports a holder provided with a cam and a driving means so as to be movable in the vertical direction on the bonnet, adjusts the height of the holder with a single first lock nut, and elasticizes the valve seat. Because it is made of a member and the contact pressure of the valve body to the valve seat is adjusted by the elastic force of the valve seat, the support frame and two height adjusting screws required for the conventional cam type control valve In addition, the piston member, the elastic force adjusting screw and the like are not required, and the number of parts is reduced, so that the assembly can be simplified and the cost can be reduced.
  • the cam type control valve stroke adjusting method of the present invention includes a first step of forming a gap between the valve seat and the valve body by rotating the cam by a predetermined angle from the origin position, and a fluid flow path of the body from the primary side.
  • the stroke adjusting method of the cam type control valve of the present invention when the elastic member is overtightened by the elastic force adjusting screw as in the conventional cam type control valve, or the elastic member is insufficiently tightened. Needless to say, even if the operator is not skilled, the contact pressure of the valve body to the valve seat can be easily and easily adjusted to a predetermined pressure.
  • FIG. 1 It is a perspective view of the cam type control valve concerning one embodiment of the present invention. It is a partially cutaway front view of the cam type control valve shown in FIG. It is a vertical side view of the cam type control valve shown in FIG. It is explanatory drawing of the cam used for the cam type control valve shown in FIG. It is a vertical front view of the conventional cam type control valve.
  • the cam control valve 1 is mainly used for a fluid supply line such as a semiconductor manufacturing facility or a solar cell manufacturing process, or a chiller unit.
  • a metal diaphragm valve element 5 is placed in contact with a valve seat 3 made of a synthetic resin annular valve seat, and is used for adjusting the flow rate of a fluid such as gas or refrigerant.
  • the normally open type cam control valve 1 is configured to open and close the fluid flow path 2 by being separated from the seat.
  • the cam type control valve 1 includes a fluid passage 2 and a body 4 provided with an elastic valve seat 3 provided in the middle of the fluid passage 2 and the valve seat 3 as shown in FIGS.
  • the valve body 5 that opens and closes the fluid flow path 2 by being in contact with the body, the bonnet 6 that is fixed to the body 4, and the hood 6 is inserted and supported so as to be movable in the vertical direction.
  • Means for example, a motor 9, a holder that is supported by the bonnet 6 so as to be movable in the vertical direction and holds the motor 9 (hereinafter referred to as a motor holder 10), and are screwed to the hood 6 so as to be movable in the vertical direction
  • the motor holder 10 along the bonnet 6
  • a first locking nut 11 to push down, and a second locking nut 12 for clamping fixing part of the motor holder 10 between the first locking nut 11 is moved adjustably screwed vertically into the bonnet 6.
  • various systems such as a cylinder and a rack and pinion can be employed in addition to the motor 9 (for example, a stepping motor) as in the present embodiment.
  • the body 4 is formed in a block shape from a metal material such as stainless steel, and includes a fluid channel 2, an upward valve chamber 13 formed in the middle of the fluid channel 2, and a valve chamber 13 is provided with an elastic valve seat 3 provided on the bottom surface and a female screw 4a to which the bonnet 6 is screwed in a vertical orientation.
  • the body 4 is provided with a thermal flow rate sensor 14 including a rectifying layer portion 14a and a flow rate detection portion 14b for measuring the flow rate of the fluid flowing in the fluid flow path 2.
  • the valve seat 3 is composed of a valve seat seat formed in an annular shape by a synthetic resin material having elasticity, and the upstream side of the fluid flow path 2 on the bottom surface of the valve chamber 13 formed in the middle of the fluid flow path 2. It is fitted and fixed so as to surround the upward opening.
  • this valve seat 3 is a material which has elasticity, In this embodiment, it is formed with the polychlorotrifluoroethylene resin (PCTFE), for example.
  • PCTFE polychlorotrifluoroethylene resin
  • the valve body 5 is formed of a metal diaphragm formed in an inverted dish shape by bulging upward the central portion of one or a plurality of circular thin metal plates.
  • This metal diaphragm is housed in the valve chamber 13 of the body 4, and the lower end portion of the bonnet 6 screwed to the female screw 4a of the body 4 is screwed into the female screw 4a of the body 4, so that the outer peripheral edge of the metal diaphragm is The metal diaphragm is fixed to the body 4 by pressing the outer peripheral edge portion of the metal diaphragm together with the stainless steel annular presser adapter 15 placed thereon.
  • the metal diaphragm forming the valve body 5 is raised at the center and separated from the valve seat 3 when the valve is opened.
  • the disc 19 and The diaphragm 21 is elastically deformed to contact the valve seat 3 to close the fluid flow path 2, and when the pressure by the stem 7 is released, the fluid flow path 2 is restored elastically by its own elasticity. Is to be released.
  • metal diaphragm As the metal diaphragm, a conventionally known one made of a thin metal plate such as nickel-cobalt alloy, Inconel (registered trademark), spron (registered trademark) or the like is used.
  • the bonnet 6 is formed in a cylindrical shape into which the stem 7 can be inserted by a metal material such as stainless steel, and is detachably screwed to the outer peripheral surface of the lower end portion of the bonnet 6 to the female screw 4a of the body 4.
  • a direction in which the first lock nut 11 extends along the axial direction of the bonnet 6 (hereinafter, a direction along the axial direction of the bonnet 6 is simply referred to as a vertical direction).
  • the upper male screw 6b that is screwed so as to be movable and adjustable, and the middle male screw 6c that is screwed so that the second lock nut 12 is movable and adjusted in the vertical direction is respectively provided on the outer peripheral surface of the bonnet 6. Is formed.
  • a polygonal nut portion 6d for rotating the bonnet 6 with a tool such as a spanner and tightening it on the body 4 is formed on the outer peripheral surface between the intermediate male screw 6c and the lower male screw 6a of the bonnet 6. Has been.
  • a circular sliding portion 6e that supports the motor holder 10 so as to be slidable in the vertical direction is formed.
  • the stem 7 is formed in a columnar shape by a metal material such as stainless steel, and a bifurcated portion 7 a for rotatably supporting a roller 16 made of a bearing that contacts the cam 8 is formed at the upper end portion of the stem 7.
  • a part of the roller 16 is arranged in a posture projecting from above into the groove of the bifurcated portion 7a of the stem 7, and is rotatably supported by parallel pins 17 inserted and supported by the bifurcated portion 7a.
  • the stem 7 is supported in the hood 6 via a linear bush 18 so as to be movable in the vertical direction, and is placed on a disk 19 inserted in the lower end of the bonnet 6 so as to be movable in the vertical direction. Yes.
  • the linear bush 18 is an infinite linear motion guide device in which a plurality of balls circulate in a cage (not shown), and is prevented from being removed from the bonnet 6 by a snap ring 20. Since the ball is in point contact with the stem 7, the linear bush 18 performs linear motion with low friction and high accuracy, and high accuracy motion can be obtained.
  • an oilless bush can be fitted into the stem 6 insertion port of the bonnet 6.
  • the disk 19 is formed in a cylindrical shape with a flange by a metal material such as stainless steel, and the lower end surface of the disk 19 is made of a synthetic resin that comes into contact with the upper surface of the central portion of the metal diaphragm that is the valve body 5.
  • the diaphragm retainer 21 is fitted.
  • the disc 19 restricts the forcible lowering of the stem 7 by the flange portion 19 a coming into contact with the upper surface of the presser adapter 15.
  • the flange portion 19 a regulates the rise of the stem 7 by abutting against a step portion formed at the lower end portion of the stem 7 insertion port of the bonnet 6.
  • the stem 7 and the disk 19 are formed separately, but in other embodiments, although not shown, the stem 7 and the disk 19 may be formed integrally. good.
  • the cam 8 is formed in a cylindrical shape by a metal material made of stainless steel, and is fixed to the rotary shaft 9a of the motor 9 in a horizontal posture so that the position eccentric from the central axis by a predetermined distance becomes the rotation center 8a. Yes.
  • the cam 8 has a cam surface 8b on its outer peripheral surface, and the cam surface 8b pushes down the stem 7, the disk 19 and the valve body 5 so that the valve body 5 is in contact with the valve seat 3 and the cam 8
  • the position of the cam 8 at which the distance between the rotation center 8a of 8 and the stem 7 is the maximum is the origin position.
  • the shape of the cam 8 is set so that the stem 7, the disk 19 and the valve body 5 are displaced upward by about 80 ⁇ m when rotated by 50 ° from the origin position as shown in FIG. Further, the cam 8 is formed symmetrically.
  • the cam 8 is formed in a columnar shape, but in other embodiments, the cam 8 may be formed in a disk shape. In the above-described embodiment, the cam 8 is formed symmetrically in the left-right direction. However, in other embodiments, the cam 8 may be formed asymmetrical in the left-right direction.
  • the motor 9 is attached to the motor holder 10 in a horizontal posture by a plurality of fixing bolts 22.
  • a stepping motor capable of position control is used as the motor 9 .
  • a stepping motor is used as the motor 9, but any type of motor may be used as long as the rotation angle can be controlled.
  • the motor 9 may be a servo motor (DC motor + encoder), an AC servomotor (AC motor + encoder), or an ultrasonic motor.
  • the motor holder 10 is formed in a box shape with a front surface opened by a metal material such as aluminum or stainless steel, and the motor 9 is attached to the back surface of the motor holder 10 with fixing bolts 22 in a horizontal posture.
  • a cam 8 and a bearing holder 23 that supports the tip of the cam 8 are accommodated inside the motor holder 10.
  • the bearing holder 23 is formed in a T shape from a metal material such as stainless steel, and is fixed to the lower surface of the upper side portion 10a of the motor holder 10 in a hanging shape by a plurality of fixing bolts 24.
  • the bearing holder 23 includes a bearing 26 that rotatably supports a support shaft 25 fitted to the tip of the cam 8.
  • a sensor 27 for example, a photo sensor for detecting the rotational angle position of the cam 8 is attached to the inner surface of one side wall of the motor holder 10.
  • the motor holder 10 is formed with a through-hole sliding hole 10c through which the sliding portion 6e of the bonnet 6 is slidably inserted in the vertical direction on the lower side portion 10b. By inserting the sliding part 6 e of the bonnet 6, the bonnet 6 can slide in the vertical direction.
  • the outer peripheral surface of the first lock nut 11 is formed in a circular shape, and a female screw 11a that is detachably screwed to the upper male screw 6b of the bonnet 6 is formed on the inner peripheral surface thereof.
  • the first lock nut 11 is positioned on the lower side portion 10 b of the motor holder 10 when screwed into the upper male screw 6 b of the bonnet 6, and serves to push down the motor holder 10 along the bonnet 6. To do.
  • a rotation operation hole 11b is formed on the outer peripheral surface of the first lock nut 11 at a certain angle, and the first lock nut 11 is rotated by inserting a rod-like tool into the rotation operation hole 11b. It can be done. Therefore, even if the 1st lock nut 11 is the state accommodated in the box-shaped motor holder 10 of the open front, the 1st lock nut 11 can be rotated easily and easily.
  • the outer peripheral surface of the second lock nut 12 is formed in a polygonal shape, and a female screw 12a that is detachably screwed to the lower male screw 6a of the bonnet 6 is formed on the inner peripheral surface thereof. .
  • the second lock nut 12 is positioned below the lower side portion 10 b of the motor holder 10 when screwed into the lower male screw 6 a of the bonnet 6, and the motor holder 10 is connected to the first lock nut 11.
  • the lower side portion 10b is clamped and fixed.
  • the rotation angle position of the cam 8 is rotated to a position where the distance between the rotation center 8a of the cam 8 and the roller 16 is maximum, and this position is set as the origin position of the cam 8, and the cam 8 is rotated by a predetermined angle from this origin position.
  • a predetermined gap is formed between the valve seat 3 and the valve body 5 (first step).
  • the cam 8 is rotated by 50 ° from the origin position. Further, when the cam 8 is rotated by 50 °, the shape of the cam surface 8a of the cam 8 is determined so that the central portion of the metal diaphragm forming the stem 7, the disk 19 and the valve body 5 is displaced upward by about 80 ⁇ m. ing.
  • 100 sccm of N 2 gas is allowed to flow from the primary side to the secondary side of the fluid flow path 2 of the body 4.
  • the first lock nut 11 screwed on the upper male screw 6 b of the bonnet 6 is tightened downward to adjust the motor holder 10 provided with the motor 9 and the cam 8.
  • the gap between the valve seat 3 and the valve body 5 is adjusted so that the primary pressure of the fluid flow path 2 of the body 4 becomes a predetermined pressure by sliding downward along the sliding portion 6e of the bonnet 6 ( (3rd process). That is, when the first lock nut 11 is tightened and adjusted downward, the motor holder 10 provided with the motor 9 and the cam 8 is lowered, and the metal diaphragm in which the stem 7 and the disk 19 form the valve body 5 by the descending cam 8. Is pressed down against the elastic force, the gap between the valve seat 3 and the valve body 5 is adjusted, and the primary pressure of the fluid flow path 2 of the body 4 changes.
  • the downward tightening amount of the first lock nut 11 is adjusted so that the primary pressure of the fluid flow path 2 of the body 4 is 50 Torr.
  • the cam 8 When the motor holder 10 is fixed to the bonnet 6, the cam 8 is rotated by a predetermined angle in the opposite direction to the above to return to the origin position (fifth step). At this time, the cam 8 pushes down the metal diaphragm in which the stem 7 and the disk 19 form the valve body 5 against its elastic force, and the central part of the metal diaphragm is formed by an elastic valve seat.
  • the valve seat 3 is pressed in a state of being in close contact with the valve 3, and the valve seat 3 is crushed by a predetermined amount.
  • the cam type control valve 1 is in a closed state and a desired sealing property is ensured when the valve is closed.
  • the cam 8 is rotated by 50 ° in the opposite direction to the original position.
  • the valve seat 3 is crushed by about 40 ⁇ m when the valve is closed in order to ensure the required seat performance by the displacement characteristics of the cam 8 and the flow characteristics.
  • N 2 gas having a pressure of 100 Torr is applied to the primary side of the fluid flow path 2 of the body 4, and leakage from the valve seat 3 is 0.1% F.V. S.
  • the stroke of the cam type control valve 1 (that is, the amount of elevation of the stem 7 and the disk 19 and the amount of deformation of the metal diaphragm) is adjusted.
  • the motor 9 when a predetermined number of pulse signals are input to the motor 9 in the state of the maximum opening, the motor 9 performs stepping rotation in accordance with the number of input pulses, whereby the cam 8 Rotate by a predetermined angle.
  • the cam control valve 1 according to the present invention is mainly used in a fluid supply line of a semiconductor manufacturing facility or the like, or a refrigerant circulation circuit of a chiller unit, but its application target is not limited to the semiconductor manufacturing apparatus or the like, It can also be used in fluid supply lines in various devices in the chemical industry, the pharmaceutical industry, the food industry, and the like.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

The present invention can facilitate the adjustment of the pressure of contact of a valve body with a valve seat and the adjustment of the height of a holder for mounting a driving means, and can also reduce the number of components, simplify assembly, and reduce costs. The present invention comprises: a body 4 provided with a fluid flow path 2 and an elastic valve seat 3; a valve body 5 for opening and closing the fluid flow path 2 by being brought into contact with or separated from the valve seat 3; a hood 6 fixed to the body 4; a stem 7 inserted and supported in the hood 6 so as to be movable in the axial direction of the hood 6, the stem 7 moving the valve body 5 to bring the valve body into contact with the valve seat 3; a cam 8 which acts on the stem 7 to press the stem 7 in the direction of the valve body 5; a driving means for rotationally driving the cam 8; a holder 10 which is supported on the hood 6 so as to be movable in the axial direction of the hood 6, and which holds the driving means; a first lock nut 11 which is screwed into the hood 6 so as to be adjustably movable in the axial direction of the hood 6, and which moves the holder 10 along the hood 6; and a second lock nut 12 which is screwed into the hood 6 so as to be adjustably movable in the axial direction of the hood 6, and which sandwiches and fixes part of the holder 10 together with the first lock nut 11.

Description

カム式制御弁及びカム式制御弁のストローク調整方法Cam type control valve and stroke adjustment method of cam type control valve
　本発明は、主に半導体製造設備や太陽電池製造工程等の流体供給ライン、或いはチラーユニットの冷媒循環回路等に介設されてガスや冷媒等の流体の流量調整用に用いられるものであり、特に、カム及びモータを用いてガスや冷媒等の流量を微少且つ精密に調整できるようにしたモータ駆動型のカム式制御弁及びカム式制御弁のストローク調整方法の改良に関するものである。 The present invention is mainly used for adjusting the flow rate of a fluid such as a gas or a refrigerant interposed in a fluid supply line such as a semiconductor manufacturing facility or a solar cell manufacturing process, or a refrigerant circulation circuit of a chiller unit, In particular, the present invention relates to an improvement in a motor-driven cam control valve and a stroke adjustment method for the cam control valve that can finely and precisely adjust the flow rate of gas or refrigerant using a cam and a motor.
　従来、この種のモータ駆動型のカム式制御弁としては、例えば、実開昭６１－１１７９７１号公報（特許文献１）や実開昭６１－１１７９７２号公報（特許文献２）に開示された構造のものが知られている。 Conventionally, as this type of motor-driven cam control valve, for example, a structure disclosed in Japanese Utility Model Laid-Open No. 61-117971 (Patent Document 1) and Japanese Utility Model Laid-Open No. 61-117972 (Patent Document 2). Things are known.
　即ち、前記モータ駆動型のカム式制御弁は、図示していないが、何れも流体流路及び弁座を備えた弁箱と、弁箱の弁座に当離座する弁体と、弁体を弁座から離座する方向へ付勢する弾性体と、弁体に連結されて弁箱の上蓋に昇降自在に支持された弁棒と、弁棒の上端部に設けたカムローラに当接して弁棒を押し下げるカム板と、カム板を回転駆動するパルスモータ（ステッピングモータ）等を備えており、パルスモータによりカム板を回転させ、カム板を介して弁棒を押し下げることにより、弁棒の下端に設けた弁体を弁座へ当座させるようにしたものである。 That is, although the motor-driven cam type control valve is not shown in the figure, each of them has a valve box having a fluid flow path and a valve seat, a valve body that contacts and separates from the valve seat of the valve box, and a valve body An elastic body that urges the valve body away from the valve seat, a valve rod that is connected to the valve body and supported by the upper lid of the valve box so as to be movable up and down, and a cam roller provided at the upper end of the valve rod. A cam plate that pushes down the valve stem and a pulse motor (stepping motor) that rotationally drives the cam plate are provided. The cam plate is rotated by the pulse motor, and the valve stem is pushed down via the cam plate. The valve body provided at the lower end is made to contact the valve seat.
　前記モータ駆動型のカム式制御弁は、高精度な流量制御を行うことができ、優れた実用的効用を奏するものである。 The motor-driven cam control valve can perform high-precision flow rate control and has excellent practical utility.
　ところで、パルスモータを用いたカム式制御弁は、パルスモータに供給するパルス数に応じてカム板が所定の角度だけ回転し、カム板の回転により弁棒及び弁体が微少量変位して流体の流量制御を行わせるものであるから、バルブの全開時又は全閉時に弁体及び弁棒等が零点位置（全開位置又は全閉位置）へ正確に位置するように零点調整されていなければならない。 By the way, in the cam type control valve using a pulse motor, the cam plate rotates by a predetermined angle according to the number of pulses supplied to the pulse motor, and the valve rod and the valve body are displaced by a small amount by the rotation of the cam plate. Therefore, the zero point must be adjusted so that the valve body and the valve stem are accurately positioned to the zero point position (fully open position or fully closed position) when the valve is fully opened or fully closed. .
　即ち、カム式制御弁の全開時には、カム板の最小半径部分がカムローラに当接し且つ弁体と弁座が最も離間した状態となるように調整し、また、カム式制御弁の全閉時には、カム板の最大半径部分がカムローラに当接し且つ弁体が弁座に適切な力で当座するように調整しなければならない。 That is, when the cam type control valve is fully opened, the cam plate is adjusted so that the minimum radius portion of the cam plate is in contact with the cam roller and the valve body and the valve seat are most separated, and when the cam type control valve is fully closed, Adjustment must be made so that the maximum radius of the cam plate abuts against the cam roller and the valve element rests against the valve seat with an appropriate force.
　しかし、上述した従来のモータ駆動型のカム式制御弁においては、弁体等を零点位置へ位置調整する調整機構を全く備えておらず、バルブの零点調整に極めて手間取ると云う問題があった。 However, the conventional motor-driven cam control valve described above has a problem that it does not have any adjustment mechanism for adjusting the position of the valve body or the like to the zero point position, and it takes much time to adjust the zero point of the valve.
　また、カム式制御弁の各構成部品の加工精度や組立精度等を高めておかないと、弁体が弁座へ過度に押し付けられたり、或いは弁体と弁座の接触が不十分になったりすることがあった。その結果、カム式制御弁の弁座等が損傷したり、流体が漏洩したりすると云う問題があった。 In addition, if the processing accuracy and assembly accuracy of each component of the cam type control valve are not increased, the valve body may be excessively pressed against the valve seat, or the contact between the valve body and the valve seat may be insufficient. There was something to do. As a result, there has been a problem that the valve seat or the like of the cam control valve is damaged or the fluid leaks.
　そこで、このような問題点を解消するため、本件出願人等は、カム及びステッピングモータを上下方向へ微調整できるようにし、バルブの零点調整を簡単且つ容易に行えるようにしたカム式制御弁を開発した（例えば、特許文献３）。 Therefore, in order to eliminate such problems, the applicants of the present application have made a cam type control valve that can finely adjust the cam and the stepping motor in the vertical direction, and can easily and easily adjust the zero point of the valve. Developed (for example, Patent Document 3).
　即ち、前記カム式制御弁３０は、図５に示す如く、流体流路３１及び弁座３２を有するボディ３３と、弁座３２に当離座して流体流路３１を開閉する弁体３４と、ボディ３３に被せられてボンネットナット３５によりボディ３３に固定されたボンネット３６と、ボンネット３６に上下動自在に案内されて弁体３４を押し下げて弁座３２に当座させる弁棒３７と、弁棒３７の上方位置に配置されて弁棒３７を押し下げるカム３８と、カム３８を回転駆動するモータ３９と、モータ３９を保持するモータホルダ４０と、ボディ３３側に固定されてモータホルダ４０を上下方向へ移動可能に支持する支持枠４１と、支持枠４１の上辺部４１ａからモータホルダ４０を離間させる方向に付勢する弾性部材４２と、支持枠４１の上辺部４１ａに摺動可能に挿入されると共に、モータホルダ４０に螺入された２本の高さ調整ネジ４３と、を備えており、前記２本の高さ調整ネジ４３でモータホルダ４０を支持枠４１に吊り下げ状に支持すると共に、モータホルダ４０の支持枠４１に対する高さ調整を行うようにしたものである。 That is, as shown in FIG. 5, the cam type control valve 30 includes a body 33 having a fluid flow path 31 and a valve seat 32, and a valve body 34 that opens and closes the valve seat 32 to open and close the fluid flow path 31. A bonnet 36 that is placed on the body 33 and is fixed to the body 33 by a bonnet nut 35; a valve rod 37 that is guided by the bonnet 36 so as to move up and down and pushes down the valve body 34 to be seated on the valve seat 32; 37, a cam 38 that pushes down the valve rod 37, a motor 39 that rotationally drives the cam 38, a motor holder 40 that holds the motor 39, and a motor holder 40 that is fixed to the body 33 side so as to move the motor holder 40 in the vertical direction. A support frame 41 that is movably supported, an elastic member 42 that urges the motor holder 40 away from the upper side 41a of the support frame 41, and a slidable on the upper side 41a of the support frame 41 And two height adjustment screws 43 screwed into the motor holder 40, and the motor holder 40 is suspended from the support frame 41 by the two height adjustment screws 43. The height of the motor holder 40 relative to the support frame 41 is adjusted.
　また、前記カム式制御弁３０は、支持枠４１の上辺部４１ａ及びモータホルダ４０に上下方向へ移動可能に支持されて弾性部材４２に当接するピストン部材４４と、支持枠４１の上辺部４１ａに螺入されてピストン部材４４を押圧して弾性部材４２の弾性力を調整する弾性力調整ネジ４５とから成る当座圧力調整機構を備えている。 The cam control valve 30 is supported on the upper side 41a of the support frame 41 and the motor holder 40 so as to be movable in the vertical direction, and is in contact with the elastic member 42, and on the upper side 41a of the support frame 41. An abutment pressure adjusting mechanism including an elastic force adjusting screw 45 that is screwed and presses the piston member 44 to adjust the elastic force of the elastic member 42 is provided.
　而して、前記カム式制御弁３０によれば、高さ調整ネジ４３でモータホルダ４０を支持枠４１に吊り下げ状に支持しているため、高さ調整ネジ４３のモータホルダ４０に対する螺入度合いを調整することで、カム３８が取り付けられたモータ３９の上下高さを調整することができ、その結果、バルブの零点調整を簡単に行えると言う利点がある。しかも、高さ調整ネジ４３が支持枠４１の上辺部４１ａに設けられているので、高さ調整ネジ４３にアクセスし易いと言う利点がある。 Thus, according to the cam type control valve 30, the motor holder 40 is suspended from the support frame 41 by the height adjustment screw 43, so that the height adjustment screw 43 is screwed into the motor holder 40. By adjusting the degree, the vertical height of the motor 39 to which the cam 38 is attached can be adjusted. As a result, there is an advantage that the zero point adjustment of the valve can be easily performed. Moreover, since the height adjustment screw 43 is provided on the upper side portion 41a of the support frame 41, there is an advantage that the height adjustment screw 43 is easily accessible.
　また、前記カム式制御弁３０によれば、当座圧力調整機構で弾性部材４２の弾性力を調整できるようにしているため、カム３８及びモータ３９の高さ調整を行った後に、弁体３４の弁座３２への当接圧力を調整できると言う利点がある。 Further, according to the cam type control valve 30, since the elastic force of the elastic member 42 can be adjusted by the abutment pressure adjusting mechanism, the height of the cam 38 and the motor 39 is adjusted, and then the valve body 34 is adjusted. There is an advantage that the contact pressure to the valve seat 32 can be adjusted.
　しかしながら、上述したカム式制御弁３０においても、未だ解決すべき問題点が残されている。 However, the above-described cam type control valve 30 still has problems to be solved.
　即ち、前記カム式制御弁３０は、弁体３４の弁座３２への当接圧力を調整する際、弾性力調整ネジ４５を回して弾性部材４２の弾性力を調整するようにしているため、弾性力調整ネジ４５で弾性部材４２を締め過ぎたり、或いは、弾性部材４２の締め付けが不足したりすることがあり、弁体３４の弁座３２への当接圧力を所定の圧力に調整し難く、作業者の熟練を要すると言う問題があった。例えば、弾性部材４２を強く締め過ぎると、弁体３４や弁座３２が大きく変形して破損したり、或いは開弁し難くなり、反対に弾性部材４２の締め付けが不足すると、所望のシール性が確保できないことになる。 That is, the cam type control valve 30 adjusts the elastic force of the elastic member 42 by turning the elastic force adjusting screw 45 when adjusting the contact pressure of the valve body 34 to the valve seat 32. The elastic member 42 may be overtightened by the elastic force adjusting screw 45 or the elastic member 42 may be insufficiently tightened, and it is difficult to adjust the contact pressure of the valve body 34 to the valve seat 32 to a predetermined pressure. There was a problem that the skill of the operator was required. For example, if the elastic member 42 is tightened too much, the valve body 34 and the valve seat 32 are greatly deformed and damaged, or it is difficult to open the valve. Conversely, if the elastic member 42 is insufficiently tightened, a desired sealing property is obtained. It cannot be secured.
　また、前記カム式制御弁３０は、２本の高さ調整ネジ４３をそれぞれ回してカム３８及びモータ３９を設けたモータホルダ４０の下限位置を調整するようにしている。上述した弾性力調整ネジ４５の調整とこの高さ調整を行っているため、モータホルダ４０の位置調整に手間取ると言う問題があった。しかも、２本の高さ調整ネジ４３を同じ量だけ回転操作しなければならず、調整が煩雑になると言う問題もあった。 The cam control valve 30 adjusts the lower limit position of the motor holder 40 provided with the cam 38 and the motor 39 by turning two height adjusting screws 43, respectively. Since the adjustment of the elastic force adjusting screw 45 and the height adjustment described above are performed, there is a problem that it takes time to adjust the position of the motor holder 40. Moreover, the two height adjusting screws 43 have to be rotated by the same amount, and there is a problem that adjustment becomes complicated.
　更に、前記カム式制御弁３０は、モータホルダ４０を上下方向に移動可能に支持する支持枠４１、支持枠４１をボディ３３側に固定するロックナット４６、２本の高さ調整ネジ４３、ピストン部材４４、弾性力調整ネジ４５等を必要とし、部品点数が多くなって組立の煩雑化やコスト高騰を招くと言う問題があった。 Further, the cam type control valve 30 includes a support frame 41 that supports the motor holder 40 so as to be movable in the vertical direction, a lock nut 46 that fixes the support frame 41 to the body 33 side, two height adjusting screws 43, a piston. There is a problem that the member 44, the elastic force adjusting screw 45, and the like are required, and the number of parts increases, resulting in complicated assembly and cost increase.
実開昭６１－１１７９７１号公報Japanese Utility Model Publication No. 61-117971 実開昭６１－１１７９７２号公報Japanese Utility Model Publication No. 61-117972 特許第５３５７７２１号公報Japanese Patent No. 5357721
　本発明は、このような問題点に鑑みて為されたものであり、その目的は、弁体の弁座への当接圧力の調整や駆動手段としてのモータを取り付けるホルダの高さ調整を簡単に行えると共に、部品点数の削減を図れて組立の簡略化及びコスト低減を図れるようにしたカム式制御弁及びカム式制御弁のストローク調整方法を提供することにある。 The present invention has been made in view of such problems, and its purpose is to easily adjust the contact pressure of the valve body to the valve seat and the height of the holder to which the motor as the drive means is attached. Another object of the present invention is to provide a cam type control valve and a cam type control valve stroke adjusting method which can be performed at the same time and can reduce the number of parts to simplify assembly and reduce costs.
　上記目的を達成するために、本発明に係るカム式制御弁の第１の態様は、流体流路及び当該流体流路の途中に設けられて弾性を有する弁座を備えたボディと、前記弁座に当離座して前記流体流路を開閉する弁体と、前記ボディに固定された筒状のボンネットと、前記ボンネット内に、該ボンネットの軸方向に移動可能に挿入支持され、前記弁体を移動させて前記弁座に当接させることにより前記流体流路を閉鎖するためのステムと、前記ステムに作用して当該ステムを前記弁体の方向に押圧するカムと、前記カムを正逆回転方向に回転駆動する駆動手段と、前記ボンネットに、該ボンネットの軸方向に移動可能に支持されて前記駆動手段を保持するホルダと、前記ボンネットに、該ボンネットの軸方向に移動調整可能に螺着されて前記ホルダを前記ボンネットに沿って移動させる第１ロックナットと、前記ボンネットに、該ボンネットの軸方向に移動調整可能に螺着されて前記第１ロックナットとで前記ホルダの一部を挟持固定する第２ロックナットと、を備えている。 In order to achieve the above object, a first aspect of a cam control valve according to the present invention includes a fluid passage and a body provided with an elastic valve seat provided in the middle of the fluid passage, and the valve A valve body that opens and closes the fluid flow path by being contacted with a seat; a tubular bonnet fixed to the body; and a valve that is inserted and supported in the bonnet so as to be movable in the axial direction of the bonnet. A stem for closing the fluid flow path by moving the body into contact with the valve seat, a cam acting on the stem to press the stem in the direction of the valve body, and the cam Drive means for rotationally driving in the reverse rotation direction, a holder supported by the bonnet so as to be movable in the axial direction of the bonnet, and holding the drive means, and being movable and adjustable in the axial direction of the bonnet. Screwed on the hole A first lock nut that moves along the bonnet; and a second lock nut that is screwed to the bonnet so as to be movable and adjustable in the axial direction of the bonnet, and that holds and fixes a part of the holder with the first lock nut. And a lock nut.
　本発明に係るカム式制御弁の第２の態様は、前記第１の態様において、前記弁座は、弾性力を有する合成樹脂材により環状に形成された弁座シートから成る。 A second aspect of the cam control valve according to the present invention is the valve seat according to the first aspect, wherein the valve seat is formed of an annular synthetic resin material having an elastic force.
　本発明に係るカム式制御弁の第３の態様は、前記第１の態様又は第２の態様において、前記弁体は、一方へ膨出した中央部が前記ステムの押圧により他方へ弾性変形して前記弁座に当座すると共に、前記ステムの押圧の解除により自己の保有弾性によって弾性復帰して前記弁座から離座する金属ダイヤフラムから成る。 According to a third aspect of the cam type control valve of the present invention, in the first aspect or the second aspect, the central portion of the valve body bulged to one side is elastically deformed to the other side by pressing the stem. And a metal diaphragm that comes into contact with the valve seat and is elastically restored by its own resilience by releasing the pressure of the stem and is separated from the valve seat.
　本発明に係るカム式制御弁の第４の態様は、前記第１の態様において、前記ボンネットは、前記ステムを挿入可能な円筒状に形成されており、当該ボンネットの外周面に前記第１ロックナット及び前記第２ロックナットをそれぞれ前記ボンネットの軸方向に移動調整可能に螺着し、前記第１ロックナットを前記ホルダ内に配設するとともに、前記第２ロックナットを前記ホルダ外の位置に配設する。 According to a fourth aspect of the cam control valve of the present invention, in the first aspect, the bonnet is formed in a cylindrical shape into which the stem can be inserted, and the first lock is formed on an outer peripheral surface of the bonnet. The nut and the second lock nut are respectively screwed so as to be movable and adjustable in the axial direction of the bonnet, the first lock nut is disposed in the holder, and the second lock nut is positioned outside the holder. Arrange.
　本発明に係るカム式制御弁の第５の態様は、前記第１の態様又は第４の態様において、前記ボンネットと前記ステムとの間に、前記ステムを前記ボンネットの軸方向に直線運動させるリニアブッシュを介設する。 According to a fifth aspect of the cam control valve of the present invention, in the first aspect or the fourth aspect, the linear movement is performed by linearly moving the stem in the axial direction of the bonnet between the bonnet and the stem. Insert a bush.
　本発明に係るカム式制御弁の第６の態様は、前記第１の態様、第４の態様又は第５の態様の何れかにおいて、前記ホルダは、前面が開放された箱状に形成されており、当該ホルダの下辺部を前記ボンネットに対し、該ボンネットの軸方向へ摺動可能に挿通する。 According to a sixth aspect of the cam control valve of the present invention, in any one of the first aspect, the fourth aspect, and the fifth aspect, the holder is formed in a box shape with an open front surface. The lower side of the holder is inserted into the bonnet so as to be slidable in the axial direction of the bonnet.
　本発明に係るカム式制御弁のストローク調整方法の第１の態様は、前記第１の態様～第６の態様の何れかのカム式制御弁のストローク調整方法であって、カムによりステム及び弁体が押し下げられて前記弁体が弁座に当接している状態で且つカムの回転中心とステムとの距離が最大となるカムの位置を原点位置とし、この原点位置からカムを所定角度回転させて前記弁座と前記弁体との間に隙間を形成する第１工程と、ボディの流体流路に一次側から二次側に所定量のガスを流す第２工程と、第１ロックナットを下方へ締め付け調整してホルダをボンネットに沿って押し下げ調整し、前記ボディの流体流路の一次側圧力が所定の圧力になるように前記弁座と前記弁体との隙間を調整する第３工程と、第２ロックナットを上方へ締め付け調整し、前記第１ロックナットとで前記ホルダの一部を挟持固定して当該ホルダを前記ボンネットに固定する第４工程と、前記カムを所定角度回転させて原点位置に戻し、前記弁体により前記弁座を弾性変形させて前記弁体と前記弁座との間にシール性を確保する第５工程と、を含む。 A first aspect of a cam type control valve stroke adjusting method according to the present invention is the cam type control valve stroke adjusting method according to any of the first to sixth aspects, wherein the cam and the stem and valve are controlled by a cam. The cam position where the body is pushed down and the valve body is in contact with the valve seat and the distance between the rotation center of the cam and the stem is the maximum is set as the origin position, and the cam is rotated by a predetermined angle from the origin position. A first step of forming a gap between the valve seat and the valve body, a second step of flowing a predetermined amount of gas from the primary side to the secondary side in the fluid flow path of the body, and a first lock nut A third step of adjusting the clearance between the valve seat and the valve body so that the primary side pressure of the fluid flow path of the body becomes a predetermined pressure by adjusting the tightening downward and pressing down the holder along the bonnet. And tighten the second lock nut upward A fourth step of clamping and fixing a part of the holder with the first lock nut and fixing the holder to the bonnet; rotating the cam by a predetermined angle to return to the original position; and A fifth step of elastically deforming the seat to ensure a sealing property between the valve body and the valve seat.
　本発明のカム式制御弁は、カムの回転操作及び第１ロックナットによる駆動手段としてのモータを取り付けるホルダの高さ調整等によって弁体の弁座への当接圧力を調整するようにしているため、弾性力調整ネジの締め付け操作により弾性部材を変形させ、弁体の弁座への当接圧力を調整するようにした従来のカム式制御弁に比較して弁体の弁座シートへの当接圧力の調整を簡単に行えることになる。 The cam type control valve of the present invention adjusts the contact pressure of the valve body to the valve seat by rotating the cam and adjusting the height of the holder to which the motor as the driving means by the first lock nut is attached. Therefore, the elastic member is deformed by tightening operation of the elastic force adjusting screw, and the contact pressure to the valve seat of the valve body is adjusted. The contact pressure can be easily adjusted.
　本発明のカム式制御弁は、第１ロックナットでカム及び駆動手段を設けたホルダの高さ調整を行い、第２ロックナットでホルダを所定の高さ位置に固定するようにしているため、２本の高さ調整ネジを回してホルダの高さ調整を行うようにした従来のカム式制御弁に比較してホルダの高さ調整を簡単且つ容易に行うことができる。 The cam type control valve of the present invention adjusts the height of the holder provided with the cam and the driving means with the first lock nut, and fixes the holder at a predetermined height position with the second lock nut. Compared with a conventional cam type control valve in which the height of the holder is adjusted by turning two height adjusting screws, the height of the holder can be adjusted easily and easily.
　本発明のカム式制御弁は、カム及び駆動手段を設けたホルダをボンネットに上下方向に移動自在に支持させると共に、ホルダを一つの第１ロックナットで高さ調整し、また、弁座を弾性部材により形成し、弁体の弁座への当接圧力を弁座の弾性力で調整するようにしているため、従来のカム式制御弁で必要としていた支持枠、２本の高さ調整ネジ、ピストン部材、弾性力調整ネジ等が不要となり、部品点数が少なくなって組立の簡略化及びコスト低減を図ることができる。 The cam type control valve of the present invention supports a holder provided with a cam and a driving means so as to be movable in the vertical direction on the bonnet, adjusts the height of the holder with a single first lock nut, and elasticizes the valve seat. Because it is made of a member and the contact pressure of the valve body to the valve seat is adjusted by the elastic force of the valve seat, the support frame and two height adjusting screws required for the conventional cam type control valve In addition, the piston member, the elastic force adjusting screw and the like are not required, and the number of parts is reduced, so that the assembly can be simplified and the cost can be reduced.
　本発明のカム式制御弁のストローク調整方法は、カムを原点位置から所定角度回転させて弁座と弁体との間に隙間を形成する第１工程と、ボディの流体流路に一次側から二次側に所定量のガスを流す第２工程と、第１ロックナットを下方へ締め付け調整してホルダをボンネットに沿って押し下げ調整し、ボディの流体流路の一次側圧力が所定の圧力になるように弁座と弁体との隙間を調整する第３工程と、第２ロックナットを上方へ締め付け調整し、第１ロックナットとでホルダの一部を挟持固定して当該ホルダをボンネットに固定する第４工程と、カムを所定角度回転させて原点位置に戻し、弁体により弁座を弾性変形させて弁体と弁座との間にシール性を確保する第５工程と、を含んでいるため、カム式制御弁のストローク調整を簡単且つ正確に行うことができる。
　その結果、本発明のカム式制御弁のストローク調整方法によれば、従来のカム式制御弁のように弾性力調整ネジにより弾性部材を締め過ぎたり、或いは、弾性部材の締め付けが不足したりすると言うことがなく、作業者が熟練していない場合でも弁体の弁座への当接圧力を所定の圧力に簡単且つ容易に調整することができる。 The cam type control valve stroke adjusting method of the present invention includes a first step of forming a gap between the valve seat and the valve body by rotating the cam by a predetermined angle from the origin position, and a fluid flow path of the body from the primary side. The second step of flowing a predetermined amount of gas to the secondary side, the first lock nut is tightened downward and the holder is pushed down along the bonnet to adjust the primary pressure of the fluid flow path of the body to the predetermined pressure. A third step of adjusting the clearance between the valve seat and the valve body so that the second lock nut is tightened upward, and a part of the holder is clamped and fixed with the first lock nut, and the holder is attached to the bonnet. A fourth step of fixing, and a fifth step of rotating the cam by a predetermined angle to return to the original position and elastically deforming the valve seat by the valve body to ensure a sealing property between the valve body and the valve seat. Therefore, it is easy and easy to adjust the stroke of the cam control valve. It can be carried out accurately.
As a result, according to the stroke adjusting method of the cam type control valve of the present invention, when the elastic member is overtightened by the elastic force adjusting screw as in the conventional cam type control valve, or the elastic member is insufficiently tightened. Needless to say, even if the operator is not skilled, the contact pressure of the valve body to the valve seat can be easily and easily adjusted to a predetermined pressure.
本発明の一実施形態に係るカム式制御弁の斜視図である。It is a perspective view of the cam type control valve concerning one embodiment of the present invention. 図１に示すカム式制御弁の一部切欠正面図である。It is a partially cutaway front view of the cam type control valve shown in FIG. 図１に示すカム式制御弁の縦断側面図である。It is a vertical side view of the cam type control valve shown in FIG. 図１に示すカム式制御弁に用いるカムの説明図である。It is explanatory drawing of the cam used for the cam type control valve shown in FIG. 従来のカム式制御弁の縦断正面図である。It is a vertical front view of the conventional cam type control valve.
　以下、本発明の実施形態を図面に基づいて詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
　図１～図３は本発明の一実施形態に係るカム式制御弁１を示し、当該カム式制御弁１は、主に半導体製造設備や太陽電池製造工程等の流体供給ライン、或いはチラーユニットの冷媒循環回路等に介設されてガスや冷媒等の流体の流量調整用に用いられるものであり、金属ダイヤフラム製の弁体５を合成樹脂製の環状の弁座シートから成る弁座３に当離座させて流体流路２を開閉するようにしたノーマルオープンタイプのカム式制御弁１に構成されている。 1 to 3 show a cam control valve 1 according to an embodiment of the present invention. The cam control valve 1 is mainly used for a fluid supply line such as a semiconductor manufacturing facility or a solar cell manufacturing process, or a chiller unit. A metal diaphragm valve element 5 is placed in contact with a valve seat 3 made of a synthetic resin annular valve seat, and is used for adjusting the flow rate of a fluid such as gas or refrigerant. The normally open type cam control valve 1 is configured to open and close the fluid flow path 2 by being separated from the seat.
　即ち、前記カム式制御弁１は、図１～図３に示す如く、流体流路２及び流体流路２の途中に設けられて弾性を有する弁座３を備えたボディ４と、弁座３に当離座して流体流路２を開閉する弁体５と、ボディ４に固定されたボンネット６と、ボンネット６に上下方向に移動可能に挿入支持され、弁体５を押し下げて弁座３に当接させることにより流体流路２を閉鎖するためのステム７と、ステム７に作用して当該ステム７を押し下げる方向に押圧するカム８と、カム８を正逆回転方向に回転駆動する駆動手段、例えば、モータ９と、ボンネット６に上下方向に移動可能に支持されてモータ９を保持するホルダ（以下、モータホルダ１０と呼ぶ）と、ボンネット６に上下方向に移動調整可能に螺着されてモータホルダ１０をボンネット６に沿って押し下げる第１ロックナット１１と、ボンネット６に上下方向に移動調整可能に螺着されて第１ロックナット１１とでモータホルダ１０の一部を挟持固定する第２ロックナット１２とを備えている。尚、カム８を回転駆動する駆動手段としては、本実施形態のようにモータ９（例えば、ステッピングモータ）を用いる他、シリンダとラックピニオンを使用する等、種々の方式を採用することができる。 That is, the cam type control valve 1 includes a fluid passage 2 and a body 4 provided with an elastic valve seat 3 provided in the middle of the fluid passage 2 and the valve seat 3 as shown in FIGS. The valve body 5 that opens and closes the fluid flow path 2 by being in contact with the body, the bonnet 6 that is fixed to the body 4, and the hood 6 is inserted and supported so as to be movable in the vertical direction. , A stem 7 for closing the fluid flow path 2 by being brought into contact with it, a cam 8 that acts on the stem 7 and presses the stem 7 in a downward direction, and a drive that drives the cam 8 to rotate in forward and reverse rotation directions. Means, for example, a motor 9, a holder that is supported by the bonnet 6 so as to be movable in the vertical direction and holds the motor 9 (hereinafter referred to as a motor holder 10), and are screwed to the hood 6 so as to be movable in the vertical direction The motor holder 10 along the bonnet 6 A first locking nut 11 to push down, and a second locking nut 12 for clamping fixing part of the motor holder 10 between the first locking nut 11 is moved adjustably screwed vertically into the bonnet 6. As a driving means for rotationally driving the cam 8, various systems such as a cylinder and a rack and pinion can be employed in addition to the motor 9 (for example, a stepping motor) as in the present embodiment.
　具体的には、前記ボディ４は、ステンレス鋼等の金属材によりブロック状に形成されており、流体流路２と、流体流路２の途中に形成された上向きの弁室１３と、弁室１３の底面に設けられて弾性を有する弁座３と、ボンネット６が縦向き姿勢で螺着される雌ネジ４ａとを備えている。 Specifically, the body 4 is formed in a block shape from a metal material such as stainless steel, and includes a fluid channel 2, an upward valve chamber 13 formed in the middle of the fluid channel 2, and a valve chamber 13 is provided with an elastic valve seat 3 provided on the bottom surface and a female screw 4a to which the bonnet 6 is screwed in a vertical orientation.
　尚、前記ボディ４には、流体流路２内を流れる流体の流量を測定するための整流層部１４ａ及び流量検出部１４ｂから成る熱式流量センサー１４が設けられている。 The body 4 is provided with a thermal flow rate sensor 14 including a rectifying layer portion 14a and a flow rate detection portion 14b for measuring the flow rate of the fluid flowing in the fluid flow path 2.
　前記弁座３は、弾性力を有する合成樹脂材により環状に形成された弁座シートから成り、流体流路２の途中に形成された弁室１３の底面に、上流側の流体流路２の上向き開口を囲むようにして嵌合固定されている。この弁座３は、弾性を有する材料であれば、特に限定するものではないが、本実施形態では、例えば、ポリクロロトリフルオロエチレン樹脂（ＰＣＴＦＥ）により形成されている。この弁座３の弾性力が図５に示す従来の弾性部材４２の役割を担うものである。 The valve seat 3 is composed of a valve seat seat formed in an annular shape by a synthetic resin material having elasticity, and the upstream side of the fluid flow path 2 on the bottom surface of the valve chamber 13 formed in the middle of the fluid flow path 2. It is fitted and fixed so as to surround the upward opening. Although it will not specifically limit if this valve seat 3 is a material which has elasticity, In this embodiment, it is formed with the polychlorotrifluoroethylene resin (PCTFE), for example. The elastic force of the valve seat 3 plays a role of the conventional elastic member 42 shown in FIG.
　前記弁体５は、一枚若しくは複数枚の円形の金属薄板の中央部を上方へ膨出させて逆皿状に形成した金属ダイヤフラムにより形成されている。この金属ダイヤフラムは、ボディ４の弁室１３内に収納されており、ボディ４の雌ネジ４ａに螺着したボンネット６の下端部をボディ４の雌ネジ４ａへねじ込み、金属ダイヤフラムの外周縁部に載置したステンレス鋼製の環状の押えアダプタ１５と一緒に金属ダイヤフラムの外周縁部をボディ４側へ押圧することによりボディ４に固定されている。 The valve body 5 is formed of a metal diaphragm formed in an inverted dish shape by bulging upward the central portion of one or a plurality of circular thin metal plates. This metal diaphragm is housed in the valve chamber 13 of the body 4, and the lower end portion of the bonnet 6 screwed to the female screw 4a of the body 4 is screwed into the female screw 4a of the body 4, so that the outer peripheral edge of the metal diaphragm is The metal diaphragm is fixed to the body 4 by pressing the outer peripheral edge portion of the metal diaphragm together with the stainless steel annular presser adapter 15 placed thereon.
　また、前記弁体５を形成する金属ダイヤフラムは、開弁時には中央部が盛り上がって弁座３から離座しており、金属ダイヤフラムの中央部がステム７により下方へ押圧されると、ディスク１９及びダイヤフラム押え２１を介し、弾性変形して弁座３に当接して流体流路２を閉鎖し、また、ステム７による押圧が解除されると、自己の保有弾性により弾性復帰して流体流路２を開放するようになっている。 The metal diaphragm forming the valve body 5 is raised at the center and separated from the valve seat 3 when the valve is opened. When the center of the metal diaphragm is pressed downward by the stem 7, the disc 19 and The diaphragm 21 is elastically deformed to contact the valve seat 3 to close the fluid flow path 2, and when the pressure by the stem 7 is released, the fluid flow path 2 is restored elastically by its own elasticity. Is to be released.
　尚、金属ダイヤフラムには、ニッケル－コバルト合金、インコネル（登録商標）、スプロン（登録商標）等の金属薄板で形成された従来公知のものが使用されている。 As the metal diaphragm, a conventionally known one made of a thin metal plate such as nickel-cobalt alloy, Inconel (registered trademark), spron (registered trademark) or the like is used.
　前記ボンネット６は、ステンレス鋼等の金属材によりステム７を挿入可能な筒状に形成されており、ボンネット６の下端部外周面には、ボディ４の雌ネジ４ａに着脱自在に螺着される下部雄ネジ６ａが、ボンネット６の上端部外周面には、第１ロックナット１１がボンネット６の軸方向に沿った方向（以下、ボンネット６の軸方向に沿った方向を単に上下方向と言う。）へ移動調整可能に螺着される上部雄ネジ６ｂが、ボンネット６の中間部外周面には、第２ロックナット１２が上下方向へ移動調整可能に螺着される中間部雄ネジ６ｃがそれぞれ形成されている。 The bonnet 6 is formed in a cylindrical shape into which the stem 7 can be inserted by a metal material such as stainless steel, and is detachably screwed to the outer peripheral surface of the lower end portion of the bonnet 6 to the female screw 4a of the body 4. A direction in which the first lock nut 11 extends along the axial direction of the bonnet 6 (hereinafter, a direction along the axial direction of the bonnet 6 is simply referred to as a vertical direction). The upper male screw 6b that is screwed so as to be movable and adjustable, and the middle male screw 6c that is screwed so that the second lock nut 12 is movable and adjusted in the vertical direction is respectively provided on the outer peripheral surface of the bonnet 6. Is formed.
　また、ボンネット６の中間部雄ネジ６ｃと下部雄ネジ６ａとの間の外周面には、ボンネット６をスパナ等の工具で回転させてボディ４に締め込むための多角形状のナット部６ｄが形成されている。 Further, a polygonal nut portion 6d for rotating the bonnet 6 with a tool such as a spanner and tightening it on the body 4 is formed on the outer peripheral surface between the intermediate male screw 6c and the lower male screw 6a of the bonnet 6. Has been.
　更に、ボンネット６の上部雄ネジ６ｂと中間部雄ネジ６ｃとの間の外周面には、モータホルダ１０を上下方向に摺動移動可能に支持する円形の摺動部６ｅが形成されている。 Furthermore, on the outer peripheral surface between the upper male screw 6b and the intermediate male screw 6c of the bonnet 6, a circular sliding portion 6e that supports the motor holder 10 so as to be slidable in the vertical direction is formed.
　前記ステム７は、ステンレス鋼等の金属材により円柱状に形成されており、ステム７の上端部には、カム８に当接するベアリング製のローラ１６を回転自在に支持ための二股部７ａが形成されている。前記ローラ１６は、その一部がステム７の二股部７ａの溝に上方から突出する姿勢で配設されており、二股部７ａに挿通支持された平行ピン１７により回転自在に支持されている。 The stem 7 is formed in a columnar shape by a metal material such as stainless steel, and a bifurcated portion 7 a for rotatably supporting a roller 16 made of a bearing that contacts the cam 8 is formed at the upper end portion of the stem 7. Has been. A part of the roller 16 is arranged in a posture projecting from above into the groove of the bifurcated portion 7a of the stem 7, and is rotatably supported by parallel pins 17 inserted and supported by the bifurcated portion 7a.
　そして、前記ステム７は、ボンネット６内にリニアブッシュ１８を介して上下方向に移動可能に支持されているとともに、ボンネット６の下端部内方に上下移動可能に挿入したディスク１９上に載置されている。 The stem 7 is supported in the hood 6 via a linear bush 18 so as to be movable in the vertical direction, and is placed on a disk 19 inserted in the lower end of the bonnet 6 so as to be movable in the vertical direction. Yes.
　前記リニアブッシュ１８は、複数のボールが保持器（何れも図示省略）の中で循環運動する無限直線運動の案内装置であり、スナップリング２０によりボンネット６から抜け止めされている。このリニアブッシュ１８は、ボールがステム７と点接触しているため、低摩擦且つ高精度で直線運動をし、高精度な運動が得られる。尚、ボンネット６のステム６挿通口には、リニアブッシュ１８の他、オイルレスブッシュを嵌着することもできる。 The linear bush 18 is an infinite linear motion guide device in which a plurality of balls circulate in a cage (not shown), and is prevented from being removed from the bonnet 6 by a snap ring 20. Since the ball is in point contact with the stem 7, the linear bush 18 performs linear motion with low friction and high accuracy, and high accuracy motion can be obtained. In addition to the linear bush 18, an oilless bush can be fitted into the stem 6 insertion port of the bonnet 6.
　また、前記ディスク１９は、ステンレス鋼等の金属材により鍔付きの円柱状に形成されており、ディスク１９の下端面には、弁体５である金属ダイヤフラムの中央部上面に当接する合成樹脂製のダイヤフラム押え２１が嵌着されている。このディスク１９は、その鍔部１９ａが押えアダプタ１５の上面に当接することによりステム７の無理な下降を規制するものである。また、鍔部１９ａは、ボンネット６のステム７挿通口の下端部に形成した段部にも当接することで、ステム７の上昇を規制する。 The disk 19 is formed in a cylindrical shape with a flange by a metal material such as stainless steel, and the lower end surface of the disk 19 is made of a synthetic resin that comes into contact with the upper surface of the central portion of the metal diaphragm that is the valve body 5. The diaphragm retainer 21 is fitted. The disc 19 restricts the forcible lowering of the stem 7 by the flange portion 19 a coming into contact with the upper surface of the presser adapter 15. In addition, the flange portion 19 a regulates the rise of the stem 7 by abutting against a step portion formed at the lower end portion of the stem 7 insertion port of the bonnet 6.
　尚、上記の実施形態においては、ステム７とディスク１９とを別体に形成したが、他の実施形態においては、図示していないが、ステム７とディスク１９とを一体的に形成しても良い。 In the above embodiment, the stem 7 and the disk 19 are formed separately, but in other embodiments, although not shown, the stem 7 and the disk 19 may be formed integrally. good.
　前記カム８は、ステンレス鋼製の金属材により円柱状に形成されており、中心軸線から所定距離だけ偏心した位置が回転中心８ａとなるように水平姿勢のモータ９の回転軸９ａに固定されている。このカム８は、その外周面がカム面８ｂとなっており、カム面８ｂによりステム７、ディスク１９及び弁体５が押し下げられて弁体５が弁座３に当座している状態で且つカム８の回転中心８ａとステム７との距離が最大となるカム８の位置を原点位置としている。本実施形態においては、カム８の形状は、図４に示すように原点位置から５０°回転させると、ステム７、ディスク１９及び弁体５が約８０μｍ上方へ変位するように設定されている。また、カム８は、左右対称状に形成されている。 The cam 8 is formed in a cylindrical shape by a metal material made of stainless steel, and is fixed to the rotary shaft 9a of the motor 9 in a horizontal posture so that the position eccentric from the central axis by a predetermined distance becomes the rotation center 8a. Yes. The cam 8 has a cam surface 8b on its outer peripheral surface, and the cam surface 8b pushes down the stem 7, the disk 19 and the valve body 5 so that the valve body 5 is in contact with the valve seat 3 and the cam 8 The position of the cam 8 at which the distance between the rotation center 8a of 8 and the stem 7 is the maximum is the origin position. In the present embodiment, the shape of the cam 8 is set so that the stem 7, the disk 19 and the valve body 5 are displaced upward by about 80 μm when rotated by 50 ° from the origin position as shown in FIG. Further, the cam 8 is formed symmetrically.
　尚、上記の実施形態においては、カム８を円柱状に形成したが、他の実施形態においては、カム８を円板状に形成するようにしても良い。また、上記の実施形態においては、カム８を左右対称状に形成したが、他の実施形態においては、カム８を左右非対称状に形成しても良い。 In the above embodiment, the cam 8 is formed in a columnar shape, but in other embodiments, the cam 8 may be formed in a disk shape. In the above-described embodiment, the cam 8 is formed symmetrically in the left-right direction. However, in other embodiments, the cam 8 may be formed asymmetrical in the left-right direction.
　前記モータ９は、本実施形態においては、複数本の固定ボルト２２によりモータホルダ１０に水平姿勢で取り付けられている。このモータ９には、位置制御可能なステッピングモータが使用されている。 In this embodiment, the motor 9 is attached to the motor holder 10 in a horizontal posture by a plurality of fixing bolts 22. As the motor 9, a stepping motor capable of position control is used.
　尚、上記の実施形態に於いては、モータ９にステッピングモータを使用したが、回転角度を制御できるモータであれば如何なる型式のモータであっても良い。例えば、モータ９には、サーボモータ（ＤＣモータ＋エンコーダ）やＡＣサーボモータ（ＡＣモータ＋エンコーダ）、超音波モータを使用するようにしても良い。 In the above-described embodiment, a stepping motor is used as the motor 9, but any type of motor may be used as long as the rotation angle can be controlled. For example, the motor 9 may be a servo motor (DC motor + encoder), an AC servomotor (AC motor + encoder), or an ultrasonic motor.
　前記モータホルダ１０は、アルミ、ステンレス鋼等の金属材により前面が開放された箱状に形成されており、当該モータホルダ１０の背面には、モータ９が水平姿勢で固定ボルト２２により取り付けられ、また、モータホルダ１０の内方には、カム８とカム８の先端部を支持するベアリングホルダ２３とが収容されている。 The motor holder 10 is formed in a box shape with a front surface opened by a metal material such as aluminum or stainless steel, and the motor 9 is attached to the back surface of the motor holder 10 with fixing bolts 22 in a horizontal posture. In addition, a cam 8 and a bearing holder 23 that supports the tip of the cam 8 are accommodated inside the motor holder 10.
　前記ベアリングホルダ２３は、ステンレス鋼等の金属材によりＴ字状に形成されており、モータホルダ１０の上辺部１０ａ下面に複数本の固定ボルト２４により垂下状に固定されている。このベアリングホルダ２３は、カム８の先端部に嵌合した支持軸２５を回転自在に支持するベアリング２６を備えている。 The bearing holder 23 is formed in a T shape from a metal material such as stainless steel, and is fixed to the lower surface of the upper side portion 10a of the motor holder 10 in a hanging shape by a plurality of fixing bolts 24. The bearing holder 23 includes a bearing 26 that rotatably supports a support shaft 25 fitted to the tip of the cam 8.
　また、モータホルダ１０の一方の側壁内面には、カム８の回転角度位置を検出するためのセンサー２７（例えば、フォトセンサー）が取り付けられている。 Further, a sensor 27 (for example, a photo sensor) for detecting the rotational angle position of the cam 8 is attached to the inner surface of one side wall of the motor holder 10.
　そして、前記モータホルダ１０は、その下辺部１０ｂにボンネット６の摺動部６ｅが上下方向へ摺動自在に挿通される貫通状の摺動穴１０ｃが形成されており、この摺動穴１０ｃにボンネット６の摺動部６ｅを挿通することによりボンネット６に対して上下方向へ摺動可能となっている。 The motor holder 10 is formed with a through-hole sliding hole 10c through which the sliding portion 6e of the bonnet 6 is slidably inserted in the vertical direction on the lower side portion 10b. By inserting the sliding part 6 e of the bonnet 6, the bonnet 6 can slide in the vertical direction.
　前記第１ロックナット１１は、その外周面が円形に形成されており、その内周面には、ボンネット６の上部雄ネジ６ｂに着脱自在に螺着される雌ネジ１１ａが形成されている。この第１ロックナット１１は、ボンネット６の上部雄ネジ６ｂに螺着したときにモータホルダ１０の下辺部１０ｂ上に位置するようになっており、モータホルダ１０をボンネット６に沿って押し下げる役目をするものである。 The outer peripheral surface of the first lock nut 11 is formed in a circular shape, and a female screw 11a that is detachably screwed to the upper male screw 6b of the bonnet 6 is formed on the inner peripheral surface thereof. The first lock nut 11 is positioned on the lower side portion 10 b of the motor holder 10 when screwed into the upper male screw 6 b of the bonnet 6, and serves to push down the motor holder 10 along the bonnet 6. To do.
　また、第１ロックナット１１の外周面には、一定角度ごとに回転操作用穴１１ｂが形成されており、回転操作用穴１１ｂに棒状の工具を挿入することにより第１ロックナット１１を回転操作できるようになっている。そのため、第１ロックナット１１が前面開放の箱状のモータホルダ１０内に収容された状態であっても、第１ロックナット１１を簡単且つ容易に回転操作することできる。 In addition, a rotation operation hole 11b is formed on the outer peripheral surface of the first lock nut 11 at a certain angle, and the first lock nut 11 is rotated by inserting a rod-like tool into the rotation operation hole 11b. It can be done. Therefore, even if the 1st lock nut 11 is the state accommodated in the box-shaped motor holder 10 of the open front, the 1st lock nut 11 can be rotated easily and easily.
　前記第２ロックナット１２は、その外周面が多角形に形成されており、その内周面には、ボンネット６の下部雄ネジ６ａに着脱自在に螺着される雌ネジ１２ａが形成されている。この第２ロックナット１２は、ボンネット６の下部雄ネジ６ａに螺着したときに、モータホルダ１０の下辺部１０ｂの下方に位置するようになっており、第１ロックナット１１とでモータホルダ１０の下辺部１０ｂを挟持固定するものである。 The outer peripheral surface of the second lock nut 12 is formed in a polygonal shape, and a female screw 12a that is detachably screwed to the lower male screw 6a of the bonnet 6 is formed on the inner peripheral surface thereof. . The second lock nut 12 is positioned below the lower side portion 10 b of the motor holder 10 when screwed into the lower male screw 6 a of the bonnet 6, and the motor holder 10 is connected to the first lock nut 11. The lower side portion 10b is clamped and fixed.
　次に、上述したカム式制御弁１のストローク調整方法について説明する。 Next, the stroke adjusting method of the cam type control valve 1 described above will be described.
　先ず、カム８の回転角度位置をカム８の回転中心８ａとローラ１６との距離が最大となる位置に回転させ、この位置をカム８の原点位置とし、この原点位置からカム８を所定角度回転させて弁座３と弁体５との間に所定の隙間を形成する（第１工程）。 First, the rotation angle position of the cam 8 is rotated to a position where the distance between the rotation center 8a of the cam 8 and the roller 16 is maximum, and this position is set as the origin position of the cam 8, and the cam 8 is rotated by a predetermined angle from this origin position. Thus, a predetermined gap is formed between the valve seat 3 and the valve body 5 (first step).
　尚、カム８を原点位置にすると、カム８によりステム７及びディスク１９が弁体５を形成している金属ダイヤフラムの弾性力に抗して押し下げられると共に、金属ダイヤフラムの中央部がディスク１９に設けたダイヤフラム押え２１により押し下げられて弁座３に当接するようになっている。即ち、カム８を原点位置にすると、カム式制御弁１は、流体流路２が閉じた状態になっている。 When the cam 8 is brought to the origin position, the stem 7 and the disk 19 are pushed down against the elastic force of the metal diaphragm forming the valve body 5 by the cam 8, and the central part of the metal diaphragm is provided on the disk 19. The diaphragm presser 21 is pressed down to come into contact with the valve seat 3. That is, when the cam 8 is set to the origin position, the cam control valve 1 is in a state where the fluid flow path 2 is closed.
　カム８を原点位置から所定角度回転させると、弁体５を形成する金属ダイヤフラムの中央部がその弾性力により元の形状に復帰しようとすると共に、ステム７及びディスク１９が金属ダイヤフラムの弾性力により所定量だけ上方へ押し上げられる。その結果、カム式制御弁１は、弁座シート３と弁体５との間に所定の隙間が形成され、流体流路２が開いた状態となる。 When the cam 8 is rotated by a predetermined angle from the origin position, the central portion of the metal diaphragm forming the valve body 5 tries to return to its original shape by the elastic force, and the stem 7 and the disk 19 are moved by the elastic force of the metal diaphragm. It is pushed upward by a predetermined amount. As a result, the cam control valve 1 is in a state where a predetermined gap is formed between the valve seat 3 and the valve body 5 and the fluid flow path 2 is opened.
　本実施形態においては、カム８を原点位置から５０°回転させている。また、カム８を５０°回転させたときに、ステム７、ディスク１９及び弁体５を形成する金属ダイヤフラムの中央部が約８０μｍ上方へ変位するようにカム８のカム面８ａの形状が決められている。 In this embodiment, the cam 8 is rotated by 50 ° from the origin position. Further, when the cam 8 is rotated by 50 °, the shape of the cam surface 8a of the cam 8 is determined so that the central portion of the metal diaphragm forming the stem 7, the disk 19 and the valve body 5 is displaced upward by about 80 μm. ing.
　カム８を原点位置から５０°回転させ、流体流路２が開いた状態になったら、ボディ４の流体流路２に所定量のガスを流す。即ち、ボディ４の流体流路２に一次側から二次側に所定量のガスを流す（第２工程）。 Rotate the cam 8 by 50 ° from the origin position, and when the fluid flow path 2 is in an open state, a predetermined amount of gas flows through the fluid flow path 2 of the body 4. That is, a predetermined amount of gas is caused to flow from the primary side to the secondary side in the fluid flow path 2 of the body 4 (second step).
　本実施形態においては、ボディ４の流体流路２に一次側から二次側に１００ｓｃｃｍのＮ２ガスを流している。 In this embodiment, 100 sccm of N 2 gas is allowed to flow from the primary side to the secondary side of the fluid flow path 2 of the body 4.
　ボディ４の流体流路２にＮ２ガスを流したら、ボンネット６の上部雄ネジ６ｂに螺着した第１ロックナット１１を下方へ締め付け調整し、モータ９及びカム８を設けたモータホルダ１０をボンネット６の摺動部６ｅに沿って下方へ摺動移動させ、ボディ４の流体流路２の一次側圧力が所定の圧力になるように弁座３と弁体５との隙間を調整する（第３工程）。即ち、第１ロックナット１１を下方へ締め付け調整すると、モータ９及びカム８を設けたモータホルダ１０が下降し、下降するカム８によりステム７及びディスク１９が弁体５を形成している金属ダイヤフラムをその弾性力に抗して押し下げ、弁座３と弁体５との隙間が調整されてボディ４の流体流路２の一次側圧力が変化する。 When N 2 gas flows through the fluid flow path 2 of the body 4, the first lock nut 11 screwed on the upper male screw 6 b of the bonnet 6 is tightened downward to adjust the motor holder 10 provided with the motor 9 and the cam 8. The gap between the valve seat 3 and the valve body 5 is adjusted so that the primary pressure of the fluid flow path 2 of the body 4 becomes a predetermined pressure by sliding downward along the sliding portion 6e of the bonnet 6 ( (3rd process). That is, when the first lock nut 11 is tightened and adjusted downward, the motor holder 10 provided with the motor 9 and the cam 8 is lowered, and the metal diaphragm in which the stem 7 and the disk 19 form the valve body 5 by the descending cam 8. Is pressed down against the elastic force, the gap between the valve seat 3 and the valve body 5 is adjusted, and the primary pressure of the fluid flow path 2 of the body 4 changes.
　本実施形態においては、第１ロックナット１１の下方への締め付け量は、ボディ４の流体流路２の一次側圧力が５０Ｔｏｒｒになるように調整される。 In the present embodiment, the downward tightening amount of the first lock nut 11 is adjusted so that the primary pressure of the fluid flow path 2 of the body 4 is 50 Torr.
　第１ロックナット１１の締め付け調整が終了したら、ボンネット６の中間部雄ネジ６ｃに螺着した第２ロックナット１２を上方へ締め付け調整し、第１ロックナット１１とでモータホルダ１０の下辺部１０ｂを挟持固定し、モータホルダ１０をボンネット６に固定する（第４工程）。これにより、カム８の高さ位置及びカム８の回転中心８ａ位置が決定される。 When the tightening adjustment of the first lock nut 11 is finished, the second lock nut 12 screwed to the intermediate male screw 6c of the bonnet 6 is tightened upward and adjusted, and the lower side portion 10b of the motor holder 10 is joined with the first lock nut 11. And the motor holder 10 is fixed to the bonnet 6 (fourth step). Thereby, the height position of the cam 8 and the rotation center 8a position of the cam 8 are determined.
　モータホルダ１０をボンネット６に固定したら、カム８を前記と反対方向へ所定角度だけ回転させて原点位置に戻す（第５工程）。このとき、カム８によりステム７及びディスク１９が弁体５を形成している金属ダイヤフラムをその弾性力に抗して押し下げ、金属ダイヤフラムの中央部が弾性を有する弁座シートにより形成された弁座３に密着する状態で押し付けられ、弁座３を所定量だけ押し潰すようになっている。その結果、カム式制御弁１は、閉弁状態になると共に、閉弁時において所望のシール性が確保されることになる。 When the motor holder 10 is fixed to the bonnet 6, the cam 8 is rotated by a predetermined angle in the opposite direction to the above to return to the origin position (fifth step). At this time, the cam 8 pushes down the metal diaphragm in which the stem 7 and the disk 19 form the valve body 5 against its elastic force, and the central part of the metal diaphragm is formed by an elastic valve seat. The valve seat 3 is pressed in a state of being in close contact with the valve 3, and the valve seat 3 is crushed by a predetermined amount. As a result, the cam type control valve 1 is in a closed state and a desired sealing property is ensured when the valve is closed.
　本実施形態においては、カム８を前記と反対方向へ５０°回転させて原点位置に戻している。また、カム８の変位特性と、流量特性とにより必要なシート性能を確保するため、閉弁時に弁座シート３を約４０μｍ押し潰すようにしている。 In the present embodiment, the cam 8 is rotated by 50 ° in the opposite direction to the original position. In addition, the valve seat 3 is crushed by about 40 μm when the valve is closed in order to ensure the required seat performance by the displacement characteristics of the cam 8 and the flow characteristics.
　カム式制御弁１が閉弁状態になったら、ボディ４の流体流路２の一次側に圧力が１００ＴｏｒｒのＮ２ガスを印加し、弁座３からの漏れが０．１％Ｆ．Ｓ．以下になっているかを確認する。弁座３からの漏れが０．１％Ｆ．Ｓ．以下になっていたら、閉弁時のシール性が確保されていることになる。 When the cam control valve 1 is closed, N 2 gas having a pressure of 100 Torr is applied to the primary side of the fluid flow path 2 of the body 4, and leakage from the valve seat 3 is 0.1% F.V. S. Check if it is as follows. Leakage from the valve seat 3 is 0.1% F.V. S. If it is below, the sealing performance at the time of valve closing is secured.
　このようにして、カム式制御弁１のストローク（即ち、ステム７及びディスク１９の昇降量、金属ダイヤフラムの変形量）の調整を行う。 In this way, the stroke of the cam type control valve 1 (that is, the amount of elevation of the stem 7 and the disk 19 and the amount of deformation of the metal diaphragm) is adjusted.
　そして、上記のようにしてカム式制御弁１のストローク調整を行い、閉弁状態において所望のシール性能が確保されたら、モータ９にパルス信号を送ってカム８をカム式制御弁１が開く方向に回転させる。そうすると、弁体５が弁座３に当接している状態からカム８の回転中心８ａとローラ１６との距離が縮まり、弁体５を形成している金属ダイヤフラムの自己弾性力により、弁体５が弁座シート３から離座し、流体流路２が開放される。 When the stroke of the cam control valve 1 is adjusted as described above and a desired sealing performance is ensured in the closed state, a pulse signal is sent to the motor 9 so that the cam 8 opens the cam 8. Rotate to Then, the distance between the rotation center 8a of the cam 8 and the roller 16 is reduced from the state in which the valve body 5 is in contact with the valve seat 3, and the valve body 5 is caused by the self-elastic force of the metal diaphragm forming the valve body 5. Is separated from the valve seat 3 and the fluid flow path 2 is opened.
　流体流路２が開放されて、流体流路２を流れる流量が所望の値に達したところでモータ９の回転を停止させ、停止位置の回転角度位置をモータ９の制御回路（図示省略）に記憶させて、最大開度に設定する。 When the fluid flow path 2 is opened and the flow rate flowing through the fluid flow path 2 reaches a desired value, the rotation of the motor 9 is stopped, and the rotation angle position of the stop position is stored in a control circuit (not shown) of the motor 9. And set the maximum opening.
　このように、前記カム式制御弁１においては、最大開度の状態でモータ９に所定数のパルス信号を入力すると、モータ９が入力パルス数に応じたステッピング回転を行い、これによりカム８が所定の角度だけ回転する。 Thus, in the cam type control valve 1, when a predetermined number of pulse signals are input to the motor 9 in the state of the maximum opening, the motor 9 performs stepping rotation in accordance with the number of input pulses, whereby the cam 8 Rotate by a predetermined angle.
　カム８が回転すると、ローラ１６が下方へ押圧され、これによりステム７及びディスク１９が弁体５を形成する金属ダイヤフラムの弾性力に抗して漸次押し下げられると共に、金属ダイヤフラムの中央部がディスク１９に設けたダイヤフラム押え２１を介して下方へ徐々に押し下げられる。その結果、金属ダイヤフラムと弁座３との間隔が狭くなり、流体の流量が制御されることになる。 When the cam 8 rotates, the roller 16 is pressed downward, whereby the stem 7 and the disk 19 are gradually pushed down against the elastic force of the metal diaphragm forming the valve body 5, and the central portion of the metal diaphragm is moved to the disk 19. It is gradually pushed down through the diaphragm presser 21 provided in. As a result, the distance between the metal diaphragm and the valve seat 3 is narrowed, and the flow rate of the fluid is controlled.
　そして、弁体５を形成する金属ダイヤフラムが押し下げられて金属ダイヤフラムの中央部が弁座３に当座し、弁座３が所定量だけ押し潰された状態になると、カム式制御弁１が全閉状態になって流体流路２が閉鎖される。このとき、弁座３は、必要なシート性能を確保するため、弁体５により約４０μｍ押し潰される。 When the metal diaphragm forming the valve body 5 is pushed down so that the central portion of the metal diaphragm contacts the valve seat 3, and the valve seat 3 is crushed by a predetermined amount, the cam control valve 1 is fully closed. As a result, the fluid flow path 2 is closed. At this time, the valve seat 3 is crushed by about 40 μm by the valve body 5 in order to ensure necessary seat performance.
　この状態からカム８を前記と反対方向に回転し、カム８とローラ１６との距離を縮めると、弁体５を形成する金属ダイヤフラムがその弾性力により元の形状に復元すると共に、ステム７及びディスク１９を上方へ押し上げる。その結果、カム式制御弁１は、金属ダイヤフラムと弁座３とが離間し、流体流路２が開放される。 When the cam 8 is rotated in the opposite direction from this state to reduce the distance between the cam 8 and the roller 16, the metal diaphragm forming the valve body 5 is restored to its original shape by its elastic force, and the stem 7 and The disk 19 is pushed upward. As a result, in the cam type control valve 1, the metal diaphragm and the valve seat 3 are separated from each other, and the fluid flow path 2 is opened.
　本発明に係るカム式制御弁１は、主として半導体製造設備等の流体供給ラインやチラーユニットの冷媒循環回路において利用されるが、その利用対象は前記半導体製造装置等に限定されるものではなく、化学産業や薬品産業、食品産業等の各種装置における流体供給ライン等においても利用することができる。 The cam control valve 1 according to the present invention is mainly used in a fluid supply line of a semiconductor manufacturing facility or the like, or a refrigerant circulation circuit of a chiller unit, but its application target is not limited to the semiconductor manufacturing apparatus or the like, It can also be used in fluid supply lines in various devices in the chemical industry, the pharmaceutical industry, the food industry, and the like.
　１　カム式制御弁
　２　流体流路
　３　弁座
　４　ボディ
　５　弁体
　６　ボンネット
　７　ステム
　８　カム
　９　モータ（駆動手段）
　１０　モータホルダ（ホルダ）
　１０ｂ　モータホルダの下辺部
　１１　第１ロックナット
　１２　第２ロックナット DESCRIPTION OF SYMBOLS 1 Cam type control valve 2 Fluid flow path 3 Valve seat 4 Body 5 Valve body 6 Bonnet 7 Stem 8 Cam 9 Motor (drive means)
10 Motor holder (holder)
10b Lower side of motor holder 11 First lock nut 12 Second lock nut

Claims (7)

  1. 　流体流路及び当該流体流路の途中に設けられて弾性を有する弁座を備えたボディと、
    　前記弁座に当離座して前記流体流路を開閉する弁体と、
    　前記ボディに固定された筒状のボンネットと、
    　前記ボンネット内に、該ボンネットの軸方向に移動可能に挿入支持され、前記弁体を移動させて前記弁座に当接させることにより前記流体流路を閉鎖するためのステムと、
    　前記ステムに作用して当該ステムを前記弁体の方向に押圧するカムと、
    　前記カムを正逆回転方向に回転駆動する駆動手段と、
    　前記ボンネットに、該ボンネットの軸方向に移動可能に支持されて前記駆動手段を保持するホルダと、
    　前記ボンネットに、該ボンネットの軸方向に移動調整可能に螺着されて前記ホルダを前記ボンネットに沿って移動させる第１ロックナットと、
    　前記ボンネットに、該ボンネットの軸方向に移動調整可能に螺着されて前記第１ロックナットとで前記ホルダの一部を挟持固定する第２ロックナットと、
    　を備えているカム式制御弁。     A body provided with a fluid passage and an elastic valve seat provided in the middle of the fluid passage;
    A valve body that contacts and separates from the valve seat to open and close the fluid flow path;
    A cylindrical bonnet fixed to the body;
    A stem that is inserted and supported in the bonnet so as to be movable in the axial direction of the bonnet, and that closes the fluid flow path by moving the valve body and contacting the valve seat;
    A cam that acts on the stem and presses the stem toward the valve body;
    Drive means for rotationally driving the cam in forward and reverse rotation directions;
    A holder that is supported by the bonnet so as to be movable in the axial direction of the bonnet and holds the driving means;
    A first lock nut that is screwed to the bonnet so as to be movable and adjustable in the axial direction of the bonnet and moves the holder along the bonnet;
    A second lock nut that is screwed onto the bonnet so as to be movable and adjustable in the axial direction of the bonnet, and holds and fixes a part of the holder with the first lock nut;
    With cam control valve.
  2. 　前記弁座は、弾性力を有する合成樹脂材により環状に形成された弁座シートから成る請求項１に記載のカム式制御弁。 The cam type control valve according to claim 1, wherein the valve seat comprises a valve seat seat formed in an annular shape by a synthetic resin material having elastic force.
  3. 　前記弁体は、一方へ膨出した中央部が前記ステムの押圧により他方へ弾性変形して前記弁座に当座すると共に、前記ステムの押圧の解除により自己の保有弾性によって弾性復帰して前記弁座から離座する金属ダイヤフラムから成る請求項１又は請求項２に記載のカム式制御バルブ。 The central portion of the valve body bulged to one side is elastically deformed to the other side by the pressing of the stem and is seated on the valve seat, and the valve body is elastically restored by its own holding elasticity by releasing the pressing of the stem. The cam type control valve according to claim 1 or 2, comprising a metal diaphragm which is separated from a seat.
  4. 　前記ボンネットは、前記ステムを挿入可能な円筒状に形成されており、当該ボンネットの外周面に前記第１ロックナット及び前記第２ロックナットをそれぞれ前記ボンネットの軸方向に移動調整可能に螺着し、前記第１ロックナットを前記ホルダ内に配設するとともに、前記第２ロックナットを前記ホルダ外の位置に配設した請求項１に記載のカム式制御弁。 The bonnet is formed in a cylindrical shape into which the stem can be inserted, and the first lock nut and the second lock nut are screwed onto the outer peripheral surface of the bonnet so as to be movable and adjustable in the axial direction of the bonnet. The cam control valve according to claim 1, wherein the first lock nut is disposed in the holder, and the second lock nut is disposed at a position outside the holder.
  5. 　前記ボンネットと前記ステムとの間に、前記ステムを前記ボンネットの軸方向に直線運動させるリニアブッシュを介設した請求項１又は請求項４に記載のカム式制御弁。 The cam type control valve according to claim 1 or 4, wherein a linear bush is provided between the bonnet and the stem to linearly move the stem in the axial direction of the bonnet.
  6. 　前記ホルダは、前面が開放された箱状に形成されており、当該ホルダの下辺部を前記ボンネットに対し、該ボンネットの軸方向へ摺動可能に挿通した請求項１、請求項４又は請求項５の何れかに記載のカム式制御弁。 The said holder is formed in the box shape by which the front surface was open | released, The lower side part of the said holder was penetrated so that it could slide to the axial direction of this bonnet with respect to the said bonnet. The cam type control valve according to any one of 5.
  7. 　請求項１～請求項６の何れかに記載のカム式制御弁のストローク調整方法であって、
    　カムによりステム及び弁体が押し下げられて前記弁体が弁座に当接している状態で且つカムの回転中心とステムとの距離が最大となるカムの位置を原点位置とし、この原点位置からカムを所定角度回転させて前記弁座と前記弁体との間に隙間を形成する第１工程と、
    　ボディの流体流路に一次側から二次側に所定量のガスを流す第２工程と、
    　第１ロックナットを下方へ締め付け調整してホルダをボンネットに沿って押し下げ調整し、前記ボディの流体流路の一次側圧力が所定の圧力になるように前記弁座と前記弁体との隙間を調整する第３工程と、
    　第２ロックナットを上方へ締め付け調整し、前記第１ロックナットとで前記ホルダの一部を挟持固定して当該ホルダを前記ボンネットに固定する第４工程と、
    　前記カムを所定角度回転させて原点位置に戻し、前記弁体により前記弁座を弾性変形させて前記弁体と前記弁座との間にシール性を確保する第５工程と、
    　を含むカム式制御弁のストローク調整方法。     A cam type control valve stroke adjusting method according to any one of claims 1 to 6,
    The cam position where the stem and the valve body are pushed down by the cam and the valve body is in contact with the valve seat and the distance between the rotation center of the cam and the stem is the maximum is set as the origin position. Rotating a predetermined angle to form a gap between the valve seat and the valve body,
    A second step of flowing a predetermined amount of gas from the primary side to the secondary side in the fluid passage of the body;
    The first lock nut is tightened downward and the holder is pushed down along the bonnet to adjust the clearance between the valve seat and the valve body so that the primary pressure of the fluid flow path of the body becomes a predetermined pressure. A third step to adjust;
    A fourth step of adjusting and tightening the second lock nut upward, clamping and fixing a part of the holder with the first lock nut, and fixing the holder to the bonnet;
    A fifth step in which the cam is rotated by a predetermined angle to return to the origin position, and the valve seat is elastically deformed by the valve body to ensure a sealing property between the valve body and the valve seat;
    Adjusting method for cam type control valve.
PCT/JP2019/005099 2018-02-23 2019-02-13 Cam-type control valve, and stroke adjustment method for cam-type control valve WO2019163604A1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011117473A (en) * 2009-11-30 2011-06-16 Fujikin Inc Cam type control valve
JP2015049569A (en) * 2013-08-30 2015-03-16 株式会社フジキン Gas diversion supply device and gas diversion supply method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011117473A (en) * 2009-11-30 2011-06-16 Fujikin Inc Cam type control valve
JP2015049569A (en) * 2013-08-30 2015-03-16 株式会社フジキン Gas diversion supply device and gas diversion supply method

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