WO2019146831A1 - 양방향 도전성 모듈 - Google Patents
양방향 도전성 모듈 Download PDFInfo
- Publication number
- WO2019146831A1 WO2019146831A1 PCT/KR2018/001728 KR2018001728W WO2019146831A1 WO 2019146831 A1 WO2019146831 A1 WO 2019146831A1 KR 2018001728 W KR2018001728 W KR 2018001728W WO 2019146831 A1 WO2019146831 A1 WO 2019146831A1
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- WO
- WIPO (PCT)
- Prior art keywords
- hole
- pin
- holes
- conductive module
- elastic
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Definitions
- the present invention relates to a bidirectional conductive module, and more particularly, to a bidirectional conductive module capable of replacing a pogo-pin type semiconductor test socket, capable of testing at a high speed with stable signal transmission, To a bidirectional conductive module that can be applied to an interposer that stably connects a CPU and a board.
- the semiconductor device is subjected to a manufacturing process and then an inspection is performed to determine whether the electrical performance is good or not. Inspection is carried out with a semiconductor test socket (or a connector or a connector) formed so as to be in electrical contact with a terminal of a semiconductor element inserted between a semiconductor element and an inspection circuit board. Semiconductor test sockets are used in burn-in testing process of semiconductor devices in addition to final semiconductor testing of semiconductor devices.
- the size and spacing of terminals or leads of semiconductor devices are becoming finer in accordance with the development of technology for integrating semiconductor devices and miniaturization trends and there is a demand for a method of finely forming spaces between conductive patterns of test sockets.
- Pogo-pin type semiconductor test sockets have a limitation in manufacturing semiconductor test sockets for testing integrated semiconductor devices.
- 1 to 3 are views showing an example of a conventional pogo-pin type semiconductor test socket disclosed in Korean Patent Laid-Open No. 10-2011-0065047.
- the conventional semiconductor test socket 1100 includes a housing 1110 having a through hole 1111 formed at a position corresponding to the terminal 1131 of the semiconductor device 1130 in a vertical direction, A pogo-pin 1120 mounted in the through-hole 1111 of the housing 1110 and electrically connecting the terminal 1131 of the semiconductor device 1130 and the pad 1141 of the test apparatus 1140, Lt; / RTI >
- the configuration of the pogo-pin 1120 includes a barrel 1124 having a cylindrical shape that is used as a pogo-pin body and has an interior hollow portion, and a barrel 1124 formed on the lower side of the barrel 1124 A contact tip 1123 and a spring 1122 connected to the contact tip 1123 inside the barrel 1124 for contraction and expansion and a spring 1122 connected to the contact tip 1123, 1130, and a contact pin 1121 that performs up and down movement.
- the spring 1122 contracts and expands while absorbing the mechanical impact transmitted to the contact pin 1121 and the contact tip 1123, and the terminal 1131 of the semiconductor device 1130 and the test device 1140
- the pads 1141 are electrically connected to inspect whether there is an electrical failure.
- a physical spring is used to maintain the elasticity in the vertical direction, and a spring and a pin are inserted into the barrel, and a barrel It is required to be inserted into the through hole of the housing again, so that the process is complicated and the manufacturing cost increases due to the complexity of the process.
- the physical structure itself for realizing the electrical contact structure having elasticity in the up and down direction has a limitation in realizing the fine pitch, and in recent years, it has already reached a limit to be applied to the integrated semiconductor device.
- the pogo-pin type semiconductor test socket is connected to the connection tip 1123, the spring 1122, and the connection pin 1121 in the vertical direction of the upper portion And there is a limitation in reducing the length in the up and down direction.
- the limitation of such a length is a limitation in testing a high-speed device.
- the Pogo-pin semiconductor test socket is used not only for testing of semiconductor devices but also for the structure of electrically connecting two devices.
- a high-speed CPU for example, a CPU used for a large-capacity server, and an interposer for connecting the pins of the CPU and the terminals of the board between the boards are applied.
- a Pogo-pin type interposer connects the two devices elastically in the up and down direction.
- the pushed state is maintained constantly between the two devices.
- a metal-made pogo- the elasticity of the pin may be discarded and some pins may be separated from any one of the two devices to cause defects.
- the present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a high-speed CPU which can replace a pogo-pin type semiconductor test socket, And a bidirectional conductive module applicable to an interposer that stably connects the CPU and the board between the board and the board.
- Another object of the present invention is to provide a bidirectional conductive module that is stable and maintains a long lifetime by continuously restoring a vertical restoring force when applied to an interposer.
- a bidirectional conductive module for electrically connecting an upper device and a lower device according to the present invention.
- the bidirectional conductive module includes a plurality of through holes penetrating in the vertical direction, An insulative body protruding from the insulator body to form a through hole, the insulator body having an upper protrusion, an upper protrusion, and a lower protrusion, And a plurality of conductive pattern portions formed in the through holes and electrically connecting the upper device and the lower device, wherein the elastic springs are formed in the protrusions and provide an elastic force in a vertical direction,
- Each of the conductive pattern portions includes an upper pin inserted into the upper hole so as to be exposed to an upper portion of the through hole, a lower pin inserted into the lower hole to be exposed to a lower portion of the through hole, And a connection part for electrically connecting the lower pin to the lower pin.
- the elastic spring may include a coil spring that is wound along the vertical direction inside the insulating main body around the through hole.
- the diameter of the upper pin and the lower pin may be larger than the inner diameter of the intermediate hole.
- the connecting portion may include a plug pin extending from one of the upper pin and the lower pin toward the other; And a receptacle formed on the other of the upper pin and the lower pin and electrically connected to the plug pin by inserting the plug pin.
- the other of the upper pin and the lower pin may have an insertion hole into which the plug pin can be inserted to form the socket.
- the plug pin has a first tension projection protruding from an outer surface thereof; A second tension projection protruding inward is formed on an inner surface of the insertion hole; The first tension projection may elastically contact the inner surface of the insertion hole and the second tension projection may elastically contact the outer surface of the plug pin.
- the connecting portion may include a coil spring connecting the upper pin and the lower pin.
- connection portion may include a conductive powder filled in the intermediate hole.
- a bidirectional conductive module applicable to an interposer that stably connects the board is provided.
- the resilient force in the vertical direction is provided by the elastic spring and the inner protruding portion in the insulative body, so that the resilient force in the vertical direction is continuously maintained when applied to the interposer, Another object is to provide a bidirectional conductive module.
- Figs. 1 to 3 are views for explaining a conventional pogo-pin type semiconductor test socket
- Fig. 5 is a view for explaining an example of the configuration of the conductive pattern portion of the bidirectional conductive module of Fig. 1,
- FIG. 6 is a view for explaining a bidirectional conductive module according to a second embodiment of the present invention.
- FIG. 7 is a view for explaining a bidirectional conductive module according to a third embodiment of the present invention.
- a bidirectional conductive module for electrically connecting an upper device and a lower device, the bidirectional conductive module comprising: a plurality of through holes formed in a material having insulation property and penetrating in a vertical direction; An insulating main body protruding from the inner wall of the hole to form the through hole with an inner protrusion forming an upper hole, a lower hole, an upper hole, and an intermediate hole having a smaller inner diameter than the lower hole; A plurality of conductive pattern portions formed in the through holes and electrically connecting the upper device and the lower device, the elastic springs being formed in the inner protrusions to provide an elastic force in a vertical direction; Each of the conductive pattern portions includes an upper pin inserted into the upper hole so as to be exposed to an upper portion of the through hole, a lower pin inserted into the lower hole to be exposed to a lower portion of the through hole, And a connection part for electrically connecting the lower pin.
- the bidirectional conductive module 10 according to the embodiments of the present invention is applied to electrically connect the upper device and the lower device.
- the upper device may be a semiconductor device to be tested and the lower device may be an inspection circuit board.
- the bidirectional conductive module 10 according to the present invention is applied to an interposer, the upper device may be a CPU and the lower device may be a board.
- the bidirectional conductive module 10 according to the present invention is applied to an interposer.
- the bidirectional conductive module 10 according to the first embodiment of the present invention includes an insulating main body 100, an elastic spring 300, and a plurality of conductive pattern portions 200.
- the insulating main body 100 is made of an insulating material, and is made of an elastic material such as silicon.
- the insulating main body 100 is formed with a plurality of through holes 110 penetrating in the vertical direction.
- the inner protrusion 120 is formed in each of the through holes 110.
- the inner protrusion 120 protrudes from the inner wall of each through hole 110 and protrudes from the middle portion of the through hole 110.
- Each of the through holes 110 has an upper hole 111, a lower hole 112 and an intermediate hole 113 having a smaller inner diameter than the upper hole 111 and the lower hole 112,
- the through hole 110 having a stepped shape can be formed, as shown in FIG.
- the elastic spring 300 is formed inside the inner protrusion 120 so as to surround the intermediate hole 113 of the through hole 110 and provides a restoring force in the up and down direction.
- the elastic spring 300 is formed in the form of a coil spring that is wound along the vertical direction inside the inner protrusion 120 in the vicinity of the intermediate hole 113.
- Each of the conductive pattern portions 200 is formed in each of the through holes 110 to electrically connect the upper device and the lower device. That is, one conductive pattern unit 200 forms one signal line connecting the upper device and the lower device.
- the conductive pattern unit 200 includes the upper fin 210, the lower fin 220, and the connection unit 230.
- the upper pin 210 is inserted into the upper hole 111 so as to protrude to the upper portion of the through hole 110 and the lower pin 220 is inserted into the lower hole 112 to protrude to the lower portion of the through hole 110.
- the connection part 230 is formed in the intermediate hole 113 to electrically connect the upper pin 210 and the lower pin 220.
- the conductive pattern portion 200 formed by the upper fin 210, the lower fin 220, and the connection portion 230 forms one signal line, and the bidirectional conductivity
- the bidirectional conductive module 10 is pressed downward by the upper device in a state where the module 10 is disposed, the lower portion of the upper fin 210 contacts the inner protrusion 120, The inner protrusion 120 of the elastic material elastically provides the restoring force in the upward direction, thereby enabling more stable contact.
- the restoring force of the elastic spring 300 and the restoring force of the inner protrusion 120 cooperate with each other, so that the life of the product can be stably increased.
- the upper pin 210 and the lower pin 220 are coupled to each other so that the upper pin 210 and the lower pin 220 can be caught by the inner protrusion 120 of the insulating main body 100,
- the diameter of the intermediate hole 113 is larger than the inner diameter of the intermediate hole 113.
- connection portion 230 of the conductive pattern portion 200 may include a plug pin 231 and a receptacle 232, as shown in FIG.
- the plug pin 231 extends from one of the upper pin 210 and the lower pin 220 toward the other.
- the receptacle 232 is formed on the other of the upper pin 210 and the lower pin 220 and the plug pin 231 is inserted and electrically connected to the plug pin 231.
- the plug pin 231 is formed on the upper fin 210 and the receptacle 232 is formed on the lower fin 220.
- the position of the plug pin 231 is changed Enough is also possible.
- an insertion hole into which the plug pin 231 can be inserted is provided in the lower pin 220 where the receptacle 232 is formed, and the insertion hole forms the receptacle 232 have.
- a first tension projection 233 protruding from the surface is formed on the outer surface of the plug pin 231 and a second tension projection 234 protruding inward is formed on the inner surface of the insertion hole.
- the bidirectional conductive module 10a according to the second embodiment of the present invention will be described in detail with reference to FIG.
- the structure of the insulating main body 100 and the elastic spring 300 of the bidirectional conductive module 10a according to the second embodiment of the present invention corresponds to the first embodiment, and a detailed description thereof will be omitted.
- the conductive pattern portion 200a includes an upper fin 210a, a lower fin 220a, and a connection portion 230a as shown in FIG.
- the upper pin 210a and the lower pin 220a are accommodated in the upper hole 111 and the lower hole 112.
- the upper pin 210a and the lower pin 220a correspond to the first embodiment
- the inner protrusion 120 and the resilient spring 300 are provided with a restoring force in the vertical direction, which corresponds to the first embodiment.
- the connecting portion 230a is formed as a coil spring connecting the upper pin 210a and the lower pin 220a.
- the upper pin 210a and the lower pin 220a are elastically supported while electrically connecting the upper pin 210a and the lower pin 220a, thereby providing a restoring force in the vertical direction.
- the bidirectional conductive module 10b according to the third embodiment of the present invention will be described in detail with reference to FIG.
- the configuration of the insulating main body 100 and the elastic spring 300 of the bidirectional conductive module 10b according to the third embodiment of the present invention corresponds to the first embodiment, and a detailed description thereof will be omitted.
- the conductive pattern portion 200b includes an upper fin 210b, a lower fin 220b, and a connection portion 230b, as shown in FIG.
- the upper pin 210b and the lower pin 220b are received in the upper hole 111 and the lower hole 112.
- the upper pin 210b and the lower pin 220b correspond to the first embodiment
- the inner protrusion 120 and the resilient spring 300 are provided with a restoring force in the vertical direction, which corresponds to the first embodiment.
- connection part 230b may include a conductive powder filled in the intermediate hole 113.
- the conductive powder is filled in the intermediate hole 113 together with the silicon powder to electrically connect the upper pin 210b and the lower pin 220b.
- Middle hole 120 Inner protrusion
- 200, 200a, 200b conductive pattern portions 210, 210a, 210b:
- the present invention can replace the pogo-pin type semiconductor test socket, can test at high speed with stable signal transmission, and is capable of testing a high-speed interposer (Interposer).
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- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
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- Testing Of Individual Semiconductor Devices (AREA)
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Abstract
Description
Claims (9)
- 상부 디바이스와 하부 디바이스를 전기적으로 연결하는 양방향 도전성 모듈에 있어서,절연성을 갖는 재질로 마련되고, 상하 방향으로 관통된 복수의 관통공이 형성되되, 각각의 상기 관통공 내벽으로부터 내부로 돌출되어 상기 관통공을 상부홀, 하부홀, 상기 상부홀 및 상기 하부홀보다 내경이 작은 중간홀을 형성하는 내부 돌출부가 형성된 절연성 본체와,상기 관통홀의 상기 중간홀을 감싸도록 상기 내부 돌출부 내부에 형성되어 상하 방향으로 탄성력을 제공하는 탄성 스프링과,각각의 상기 관통홀에 형성되어 상기 상부 디바이스와 상기 하부 디바이스를 전기적으로 연결하는 복수의 도전 패턴부를 포함하고;각각의 상기 도전 패턴부는 상기 관통홀의 상부로 노출되도록 상기 상부홀에 삽입되는 상부핀과, 상기 관통홀의 하부로 노출되도록 상기 하부홀에 삽입되는 하부핀과, 상기 중간홀에 형성되어 상기 상부핀과 상기 하부핀을 전기적으로 연결하는 연결부를 포함하는 것을 특징으로 하는 양방향 도전성 모듈.
- 제1항에 있어서,상기 탄성 스프링은 상기 관통홀 주변의 상기 절연성 본체 내부에서 상하 방향을 따라 감기는 형태의 코일 스프링을 포함하는 것을 특징으로 하는 양방향 도전성 모듈.
- 제1항에 있어서,상기 상부핀 및 상기 하부핀의 직경은 상기 중간홀의 내경보다 크게 마련되는 것을 특징으로 하는 양방향 도전성 모듈.
- 제3항에 있어서,상기 상부 디바이스가 각각의 상기 상부핀과 접촉하여 하부 방향으로 가압할 때 상기 상부핀의 하부가 상기 내부 돌출부에 접촉하고, 상기 탄성 스프링이 상기 상부핀의 가압을 탄성적으로 지지하는 것을 특징으로 하는 양방향 도전성 모듈.
- 제1항에 있어서,상기 연결부는상기 상부핀과 상기 하부핀 중 어느 하나로부터 다른 하나를 향해 연장되는 플러그 핀과;상기 상부핀과 상기 하부핀 중 다른 하나에 형성되고, 상기 플러그 핀이 삽입되어 상기 플러그 핀과 전기적으로 연결되는 콘센트부를 포함하는 것을 특징으로 하는 양방향 도전성 모듈.
- 제5항에 있어서,상기 상부핀과 상기 하부핀 중 다른 하나는 상기 플러그 핀이 삽입 가능한 삽입홀이 마련되어 상기 콘센트부를 형성하는 것을 특지응로 하는 양방향 도전성 모듈.
- 제6항에 있어서,상기 플러그 핀은 외부 표면으로부터 돌출된 제1 텐션 돌출부가 형성되고;상기 삽입홀의 내부 표면에는 내측으로 둘출된 제2 텐션 돌출부가 형성되며;상기 제1 텐션 돌출부가 상기 삽입홀의 내부 표면에 탄성적으로 접촉하고, 상기 제2 텐션 돌출부가 상기 플러그 핀의 외부 표면에 탄성적으로 접촉하는 것을 특징으로 하는 양방향 도전성 모듈.
- 제1항에 있어서,상기 연결부는 상기 상부핀과 상기 하부핀을 연결하는 코일 스프링을 포함하는 것을 특징으로 하는 양방향 도전성 모듈.
- 제1항에 있어서,상기 연결부는 상기 중간홀에 충진되는 도전성 분말을 포함하는 것을 특징으로 하는 양방향 도전성 모듈.
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KR10-2018-0010593 | 2018-01-29 | ||
KR1020180010593A KR101961281B1 (ko) | 2018-01-29 | 2018-01-29 | 양방향 도전성 모듈 |
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KR102484329B1 (ko) | 2022-08-12 | 2023-01-03 | 주식회사 비이링크 | 인터포저 |
KR102456348B1 (ko) | 2022-08-12 | 2022-10-19 | 주식회사 비이링크 | 인터포저 및 이를 구비하는 테스트 소켓 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002042922A (ja) * | 2000-07-21 | 2002-02-08 | Shin Etsu Polymer Co Ltd | 電気コネクタ及びその製造方法 |
KR20090126338A (ko) * | 2008-06-04 | 2009-12-09 | 이용준 | 반도체 소자 테스트용 콘택터 및 그 제조방법 |
KR20100028800A (ko) * | 2008-09-05 | 2010-03-15 | (주)리뉴젠 | 반도체 테스트 소켓 |
KR20100045705A (ko) * | 2008-10-24 | 2010-05-04 | 이재학 | 도전체가 패드에 밀착될 수 있는 테스트소켓 |
KR20130094100A (ko) * | 2012-02-15 | 2013-08-23 | 리노공업주식회사 | 반도체 디바이스를 검사하기 위한 프로브 및 그를 사용하는 테스트 소켓 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001116791A (ja) * | 1999-10-20 | 2001-04-27 | Fujitsu Ltd | 電子部品試験装置及び電気接続体 |
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2018
- 2018-01-29 KR KR1020180010593A patent/KR101961281B1/ko active
- 2018-02-09 WO PCT/KR2018/001728 patent/WO2019146831A1/ko active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002042922A (ja) * | 2000-07-21 | 2002-02-08 | Shin Etsu Polymer Co Ltd | 電気コネクタ及びその製造方法 |
KR20090126338A (ko) * | 2008-06-04 | 2009-12-09 | 이용준 | 반도체 소자 테스트용 콘택터 및 그 제조방법 |
KR20100028800A (ko) * | 2008-09-05 | 2010-03-15 | (주)리뉴젠 | 반도체 테스트 소켓 |
KR20100045705A (ko) * | 2008-10-24 | 2010-05-04 | 이재학 | 도전체가 패드에 밀착될 수 있는 테스트소켓 |
KR20130094100A (ko) * | 2012-02-15 | 2013-08-23 | 리노공업주식회사 | 반도체 디바이스를 검사하기 위한 프로브 및 그를 사용하는 테스트 소켓 |
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