WO2019134458A1 - 触控结构及制备方法、触控基板、显示基板 - Google Patents

触控结构及制备方法、触控基板、显示基板 Download PDF

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Publication number
WO2019134458A1
WO2019134458A1 PCT/CN2018/116739 CN2018116739W WO2019134458A1 WO 2019134458 A1 WO2019134458 A1 WO 2019134458A1 CN 2018116739 W CN2018116739 W CN 2018116739W WO 2019134458 A1 WO2019134458 A1 WO 2019134458A1
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WIPO (PCT)
Prior art keywords
signal line
conductive structure
auxiliary conductive
touch
touch electrode
Prior art date
Application number
PCT/CN2018/116739
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English (en)
French (fr)
Inventor
胡伟频
魏从从
王纯
姜明宵
孙晓
Original Assignee
京东方科技集团股份有限公司
北京京东方显示技术有限公司
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Application filed by 京东方科技集团股份有限公司, 北京京东方显示技术有限公司 filed Critical 京东方科技集团股份有限公司
Priority to EP18855187.3A priority Critical patent/EP3736619A4/en
Priority to US16/336,387 priority patent/US11340737B2/en
Publication of WO2019134458A1 publication Critical patent/WO2019134458A1/zh

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    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416Control or interface arrangements specially adapted for digitisers
    • G06F3/04164Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
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    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • GPHYSICS
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    • G06FELECTRIC DIGITAL DATA PROCESSING
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    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416Control or interface arrangements specially adapted for digitisers
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1255Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

Definitions

  • the present disclosure relates to, but is not limited to, the field of touch technology, and more particularly, to a touch structure and a preparation method, a touch substrate, and a display substrate.
  • the touch structure includes a touch electrode, an insulating layer, and a signal line.
  • the signal line can be connected to the touch electrode through a via hole in the insulating layer to transmit a signal to the touch electrode, and then the signal is transmitted in the touch electrode.
  • the touch electrode is usually made of a transparent conductive material such as indium tin oxide (ITO), and the resistance thereof is large, and the signal is transmitted in the touch electrode to generate a large delay and attenuation, which may cause a signal transmitted in the touch electrode. Uneven, affecting the touch effect.
  • ITO indium tin oxide
  • An embodiment of the present disclosure provides a touch structure including: a touch electrode; a first signal line disposed on one side of the touch electrode and an auxiliary conductive structure, and the conductive conductive structure of the auxiliary conductive structure The ratio is greater than the conductivity of the touch electrode; and the first insulating layer disposed between the auxiliary conductive structure and the first signal line, wherein the auxiliary conductive structure and the touch electrode are in multiple Positionally connected and connected to the first signal line through a first via extending through the first insulating layer.
  • the auxiliary conductive structure is connected to the first signal line at a plurality of locations by a plurality of first vias penetrating the first insulating layer.
  • an orthographic projection of at least one of the plurality of connection locations between the auxiliary conductive structure and the touch electrode on the touch electrode and the first signal line are in the The orthographic projections on the touch electrodes do not overlap.
  • the touch structure further includes: a second signal line disposed in the same layer as the first signal line, the first signal line is disposed in parallel with the second signal line, and the The two signal lines are not connected to the touch electrode, wherein an orthographic projection of at least one of the plurality of connection positions between the auxiliary conductive structure and the touch electrode on the touch electrode is located An orthographic projection of the second signal line on the touch electrode is away from an orthogonal projection of the first signal line on the touch electrode.
  • the auxiliary conductive structure is a mesh structure.
  • the layer of the auxiliary conductive structure is located between the layer where the first signal line is located and the layer where the touch electrode is located.
  • the auxiliary conductive structure is in direct contact with the touch electrode.
  • a second insulating layer is disposed between the auxiliary conductive structure and the touch electrode, and the auxiliary conductive structure passes through the plurality of second vias penetrating the second insulating layer and the touch
  • the control electrodes are connected at a plurality of locations.
  • the layer where the first signal line is located is located between the layer where the auxiliary conductive structure is located and the layer where the touch electrode is located, and the first signal line and the touch electrode are disposed between the first signal line and the touch electrode.
  • a third insulating layer, the auxiliary conductive structure is connected to the touch electrode at a plurality of locations through a plurality of third vias penetrating the first insulating layer and the third insulating layer, the first signal line The position does not overlap with the position of the third via.
  • An embodiment of the present disclosure further provides a touch substrate, the touch substrate includes: a substrate; a plurality of touch structures disposed on the substrate, the plurality of touch structures are arranged in an array, and the At least one of the plurality of touch structures is a touch structure of the embodiment of the present disclosure.
  • An embodiment of the present disclosure further provides a display substrate, the display substrate includes spaced apart pixel units and spaced apart touch structures, each of the touch structures covering adjacent ones of the pixel units At least one touch structure of the touch structure is the touch structure of the embodiment of the present disclosure, and the first signal line and the auxiliary conductive structure of the touch structure are disposed adjacent to each other. In the interval between pixel units.
  • the display substrate further includes a gate line and a data line, the auxiliary conductive structure and the gate line are disposed in different layers, and the auxiliary conductive structure and the data line are disposed in different layers
  • the at least one insulating layer is disposed between the auxiliary conductive structure and the gate line, and at least one insulating layer is disposed between the auxiliary conductive structure and the data line.
  • the first signal line is disposed in the same layer as the data line and in parallel with each other.
  • the auxiliary conductive structure includes a first portion parallel to the gate line and a second portion disposed in parallel with the data line, the first portion of the auxiliary conductive structure being at the touch electrode.
  • the upper orthographic projection overlaps the orthographic projection of the gate line on the touch electrode, and the orthographic projection of the second portion of the auxiliary conductive structure on the touch electrode is adjacent to the first signal line The orthographic projections on the touch electrodes overlap.
  • the touch electrodes are multiplexed into a common electrode.
  • An embodiment of the present disclosure further provides a method for fabricating a touch structure, the method comprising: forming a first signal line and an auxiliary conductive structure on a substrate, wherein the auxiliary conductive structure and the first signal line are formed a first insulating layer; a touch electrode is formed on the substrate on which the first signal line and the auxiliary conductive structure are formed, wherein a conductivity of the auxiliary conductive structure is greater than a conductivity of the touch electrode, The auxiliary conductive structure is formed to be connected to the touch electrode at a plurality of positions, and the auxiliary conductive structure is formed to be connected to the first signal line through a first via formed in the first insulating layer .
  • the auxiliary conductive structure is formed to be connected to the first signal line at a plurality of locations through a plurality of first vias formed in the first insulating layer.
  • the auxiliary conductive structure and the touch electrode are formed as at least one of a plurality of connection positions between the auxiliary conductive structure and the touch electrode on the touch electrode.
  • the orthographic projection does not overlap with the orthographic projection of the first signal line on the touch electrode.
  • the method further includes forming a second signal line in the same layer as the first signal line, the first signal line is parallel to the second signal line, and the second signal line is not Connecting with the touch electrode, wherein the auxiliary conductive structure and the touch electrode are formed as at least one of a plurality of connection positions between the auxiliary conductive structure and the touch electrode.
  • the orthographic projection on the touch electrode is located on a side of the orthographic projection of the second signal line on the touch electrode away from the orthographic projection of the first signal line on the touch electrode.
  • the auxiliary conductive structure is formed into a mesh structure.
  • forming the first signal line and the auxiliary conductive structure on the substrate includes: forming the first signal line on the substrate; forming the first insulating layer over the first signal line; The auxiliary conductive structure is formed on the first insulating layer.
  • forming the touch electrode on the substrate on which the first signal line and the auxiliary conductive structure are formed includes: forming the touch electrode directly on the auxiliary conductive structure, the auxiliary The conductive structure is in direct contact with the touch electrode.
  • forming the touch electrode on the substrate on which the first signal line and the auxiliary conductive structure are formed includes: forming a second insulating layer over the auxiliary conductive structure; The touch electrode is formed on the two insulating layers, wherein the auxiliary conductive structure is connected to the touch electrode at a plurality of positions through a plurality of second via holes formed in the second insulating layer.
  • forming the first signal line and the auxiliary conductive structure on the substrate comprises: forming the auxiliary conductive structure on the substrate; forming the first insulating layer over the auxiliary conductive structure; Forming the first signal line on the first insulating layer; and forming a third insulating layer over the first signal line.
  • forming a touch electrode on the substrate on which the first signal line and the auxiliary conductive structure are formed includes: forming the touch electrode on the third insulating layer, wherein the auxiliary conductive The structure is formed to be connected to the touch electrode at a plurality of positions through a plurality of third via holes formed in the first insulating layer and the third insulating layer, the position of the first signal line and the first The positions of the three vias do not overlap.
  • 1 is a schematic structural view of a touch substrate
  • FIG. 2 is a schematic structural diagram of a touch substrate according to an embodiment of the present disclosure
  • FIG. 3 is a partial cross-sectional structural view of the touch substrate cut along the AA' line of FIG. 2;
  • FIG. 4 is a partial cross-sectional structural view of the touch substrate cut along line BB' in FIG. 2;
  • FIG. 5 is another partial cross-sectional structural view of the touch substrate of the embodiment of the present disclosure.
  • FIG. 6 is a schematic diagram showing the distribution of pixel units of a display substrate according to an embodiment of the present disclosure.
  • the two structures "same layer setting" means that the two are formed of the same material layer, so they are in the same layer in a laminated relationship, but do not mean that they are equal to the distance between the substrates.
  • any term previously defined as “first” and “second” is used only to distinguish the entity represented by the term, and does not represent the order, importance, etc. of the entity represented by the term, without the need to distinguish between entities.
  • first and second may be omitted.
  • patterning process refers to a step of forming a structure having a specific pattern, which may be a photolithography process including, for example, forming a material layer, coating a photoresist, exposing, developing, etching, light One or more steps in the step of peeling off the glue.
  • the "patterning process” can also be other processes such as an imprint process, an inkjet printing process, and the like.
  • An embodiment of the present disclosure provides a touch structure including: a touch electrode; a first signal line disposed on one side of the touch electrode and an auxiliary conductive structure, and the conductive conductive structure of the auxiliary conductive structure The ratio is greater than the conductivity of the touch electrode; and the first insulating layer disposed between the auxiliary conductive structure and the first signal line, wherein the auxiliary conductive structure and the touch electrode are in multiple Positionally connected and connected to the first signal line through a first via extending through the first insulating layer.
  • the first signal line is electrically connected to the touch electrode indirectly through the auxiliary conductive structure, and the conductivity of the auxiliary conductive structure is greater than the conductivity of the touch electrode.
  • the auxiliary conductive structure may be made of metal, has low resistance, strong ability to transmit signals, and can be connected to a plurality of different positions of the touch electrodes, so that signals in the first signal line can be smoothly transmitted. To a plurality of different positions of the touch electrodes, thereby eliminating or reducing the occurrence of signal unevenness in the touch electrodes, the touch effect can be improved.
  • the auxiliary conductive structure is connected to the first signal line at a plurality of locations by a plurality of first vias penetrating the first insulating layer.
  • the electrical connection between the auxiliary conductive structure and the first signal line can be reduced by connecting the auxiliary conductive structure and the first signal line at a plurality of positions, and the touch electrode can be further eliminated or reduced.
  • the unevenness of the signal occurs, so that the touch effect can be further improved.
  • an orthographic projection of at least one of the plurality of connection locations between the auxiliary conductive structure and the touch electrode on the touch electrode and the first signal line are in the The orthographic projections on the touch electrodes do not overlap.
  • the auxiliary conductive structure may be connected to the touch electrode at a position beyond the range of the first signal line, so that the first signal line that transmits a signal to the touch electrode cannot be directly reached. Position to improve the uniformity of the signal in the touch electrode.
  • the touch structure further includes: a second signal line disposed in the same layer as the first signal line, the first signal line is disposed in parallel with the second signal line, and the The two signal lines are not connected to the touch electrode, wherein an orthographic projection of at least one of the plurality of connection positions between the auxiliary conductive structure and the touch electrode on the touch electrode is located An orthographic projection of the second signal line on the touch electrode is away from an orthogonal projection of the first signal line on the touch electrode.
  • the first signal line and the second signal line are disposed in the same layer, the first signal line cannot intersect the second signal line (if the first signal line and the When the second signal lines intersect, the first signal line and the second signal line are electrically connected to each other, that is, the first signal line cannot cross the second signal line and transmit the signal to the first
  • the second signal line is further away from the position of the first signal line.
  • the touch structure of the embodiment is configured by the auxiliary conductive structure, the auxiliary conductive structure and the first signal line and the second signal line a first insulating layer is disposed therebetween, so that the auxiliary conductive structure can be connected to the touch electrode at a position farther from the first signal line than the second signal line to transmit a signal to the touch
  • the electrodes improve the uniformity of the signals in the touch electrodes.
  • the auxiliary conductive structure is a mesh structure.
  • the auxiliary conductive structure of the embodiment by setting the auxiliary conductive structure to a mesh structure, the resistance of the auxiliary conductive structure can be reduced on the one hand, and the touch electrode can be connected at a plurality of positions on the other hand. Thereby, the signal is transmitted to the plurality of positions of the touch electrode, and the uniformity of the signal in the touch electrode can be improved.
  • auxiliary conductive structure may also be in other forms.
  • the layer of the auxiliary conductive structure is located between the layer where the first signal line is located and the layer where the touch electrode is located.
  • the layer in which the auxiliary conductive structure is disposed is disposed between the layer where the first signal line is located and the layer where the touch electrode is located to facilitate the auxiliary conductive structure simultaneously with the first signal line and the touch. Electrode connection.
  • the auxiliary conductive structure is in direct contact with the touch electrode.
  • a second insulating layer is disposed between the auxiliary conductive structure and the touch electrode, and the auxiliary conductive structure passes through the plurality of second vias penetrating the second insulating layer and the touch
  • the control electrodes are connected at a plurality of locations.
  • the layer where the first signal line is located is located between the layer where the auxiliary conductive structure is located and the layer where the touch electrode is located, and the first signal line and the touch electrode are disposed between the first signal line and the touch electrode.
  • a third insulating layer, the auxiliary conductive structure is connected to the touch electrode at a plurality of locations through a plurality of third vias penetrating the first insulating layer and the third insulating layer, the first signal line The position does not overlap with the position of the third via.
  • the auxiliary conductive structure may never be from the first signal line. The position is connected to the touch electrode.
  • FIG. 1 is a schematic structural view of a touch substrate.
  • the touch substrate includes a plurality of touch electrodes 2 disposed on the substrate.
  • the plurality of touch electrodes 2 are arranged in an array, and each touch electrode 2 is connected to a signal line 1 and the signal is connected.
  • the line 1 can transmit a signal to the touch electrode 2, and then the signal is transmitted in the touch electrode 2.
  • an insulating layer is disposed between the touch electrode 2 and the signal line 1 , and the touch electrode 2 is connected to the signal line 1 through a via 9 penetrating the insulating layer.
  • the touch electrode 2 is made of a transparent conductive material such as indium tin oxide (ITO), and the resistance is large, and the signal is transmitted in the touch electrode 2 to cause a large delay and attenuation, which may cause the signal in the touch electrode 2 not to be generated. Evenly, which affects the touch effect.
  • ITO indium tin oxide
  • the embodiment of the present invention provides a touch substrate, the touch substrate includes: a substrate; a plurality of touch structures disposed on the substrate, the plurality of touch structures are arranged in an array, and the At least one of the plurality of touch structures is a touch structure of the embodiment of the present disclosure.
  • An embodiment of the present disclosure provides a display substrate including spaced apart pixel units and spaced apart touch structures, at least one of the touch structures covering adjacent ones of the pixel units At least one touch structure of the touch structure is a touch structure of the embodiment of the present disclosure, and the first signal line and the auxiliary conductive structure of the touch structure are disposed in adjacent pixels. In the interval between cells.
  • FIG. 2 to FIG. 6 are schematic diagrams showing a touch substrate, a touch structure, and a display substrate according to an embodiment of the present disclosure.
  • the touch substrate of the embodiment of the present disclosure includes: a substrate 8; a plurality of touch electrodes 2 formed of a transparent conductive material disposed on the substrate 8 , the plurality of touches The electrodes 2 are arranged in an array; a plurality of signal lines 1 are connected in one-to-one correspondence with the plurality of touch electrodes 2, and at least one insulating layer is disposed between the plurality of signal lines 1 and the touch electrodes 2.
  • the touch substrate of this embodiment is used to implement a touch function, that is, to identify a touch.
  • a plurality of touch electrodes 2 made of a transparent conductive material such as indium tin oxide (ITO) are spaced apart, and each touch electrode 2 is connected to one signal line 1. Therefore, the touch signal (such as a high frequency signal) can be transmitted to the corresponding touch electrode 2 through the signal line 1.
  • ITO indium tin oxide
  • the touch signal (such as a high frequency signal) can be transmitted to the corresponding touch electrode 2 through the signal line 1.
  • the signal in the touch electrode 2 at the touch occurrence position changes, and the corresponding signal
  • the line 1 feeds back the signal to, for example, a touch chip or the like for analysis, and can determine, for example, the position of the touch, so that an appropriate response can be made for the touch.
  • the auxiliary conductive structure 3 is disposed corresponding to the at least one touch electrode 2, and the auxiliary conductive structure 3 is connected to the touch electrode 2 corresponding thereto at a plurality of positions.
  • the signal line 1 and the auxiliary conductive structure 3 are disposed on the same side of the touch electrode 2, and the first insulating layer 71 is disposed between the auxiliary conductive structure 3 and the signal line 1.
  • the auxiliary conductive structure 3 can be connected to its corresponding signal line 1 through the first via 91 penetrating the first insulating layer 71.
  • an auxiliary conductive structure 3 formed of a metal material commonly used for wires such as aluminum or copper is disposed corresponding to at least one touch electrode 2 , thereby assisting the conductive structure. 3 also corresponds to the signal line 1 to which the touch electrode 2 is connected. Therefore, the signal line 1 is not directly connected to the touch electrode 2, but is connected to the corresponding auxiliary conductive structure 3 through the first via 91 penetrating the first insulating layer 71, and the auxiliary conductive structure 3 is further connected to the corresponding touch electrode. 2 Connect at multiple different locations.
  • the signal line 1 is electrically connected to the touch electrode 2 indirectly through the auxiliary conductive structure 3, and the conductivity of the auxiliary conductive structure 3 is greater than the conductivity of the touch electrode 2.
  • the auxiliary conductive structure 3 may be The metal structure has a small resistance, a strong ability to transmit signals, and is connected to a plurality of different positions of the touch electrode 2, so that the signal in the signal line 1 can be smoothly transmitted to the plurality of touch electrodes 2 via the auxiliary conductive structure 3. Different positions can eliminate or reduce the occurrence of signal unevenness in the touch electrode 2, and the touch effect can be improved.
  • the auxiliary conductive structure 3 can improve the signal uniformity in the touch electrode 2 corresponding thereto. Therefore, in order to achieve the best improvement effect, the auxiliary conductive structure 3 connected thereto can be correspondingly disposed for each touch electrode 2. .
  • each of the auxiliary conductive structures 3 may be connected at a plurality of locations by a plurality of first vias 91 penetrating the first insulating layer 71 and their corresponding signal lines 1.
  • the auxiliary conductive structure 3 is connected to its corresponding signal line 1 at a plurality of different positions, which can reduce the electrical resistance between the auxiliary conductive structure 3 and its corresponding signal line 1.
  • the orthographic projection of the at least one connection position on the substrate 8 and the auxiliary conductive structure do not overlap.
  • the signal line 1 and the touch electrode 2 can also overlap at a plurality of positions, so that the signal line 1 can also be directly connected to the touch electrode 2 at a plurality of positions.
  • the signal line 1 can only be connected to its corresponding touch electrode 2 at its location, so that the signal cannot be directly transmitted to a position beyond its range.
  • the auxiliary conductive structure 3 can be disposed beyond the range of the signal line 1 so as to be connected to the touch electrode 2 at a position beyond the range of the signal line 1, and can transmit a signal to a position where the signal line 1 cannot directly reach. .
  • At least one touch electrode 2 is disposed not only overlapped with the signal line 1 to which it is connected, but also overlapped with the signal line 1 not connected to the touch electrode 2.
  • at least one signal line 1 may extend and overlap with the plurality of touch electrodes 2, but only connect with one touch electrode 2 disposed at an overlapping position.
  • the signal lines 1 are usually formed in the same layer, it is obvious that different signal lines 1 cannot intersect, otherwise different signal lines 1 may be electrically connected to each other. Therefore, each signal line 1 may be arranged in parallel. In this case, corresponding The signal line 1 connected to the touch electrode 2 cannot be directly connected to any position of the touch electrode 2 across the signal line 1 not connected to the touch electrode 2.
  • the auxiliary conductive structure 3 can be combined with any signal.
  • the line 1 overlaps but does not conduct. Therefore, the auxiliary conductive structure 3 can be connected to any position of the corresponding touch electrode 2 across any signal line 1 to transmit a signal to the touch electrode 2, thereby improving the touch. Control the uniformity of the signal in the electrode 2.
  • the signal line 1 connected to the corresponding touch electrode 2 may be referred to as a “first signal line”, and the signal line 1 not connected to the touch electrode 2 but overlapping the touch electrode 2 may be referred to as “ The second signal line”.
  • the auxiliary conductive structure 3 disposed and connected corresponding to the touch electrode 2 may be a mesh structure.
  • auxiliary conductive structure 3 as a mesh structure, not only the resistance of the auxiliary conductive structure 3 but also the arbitrary position of the corresponding touch electrode 2 can be reduced, and the uniformity of the signal in the touch electrode 2 can be further improved.
  • auxiliary conductive structure 3 may be in other forms without departing from the concept of the present disclosure.
  • the layer in which the auxiliary conductive structure 3 is located may be located between the layer where the signal line 1 is located and the layer where the touch electrode 2 is located.
  • the auxiliary conductive structure 3 can be located at the signal line 1 and the touch electrode. Between 2, thereby facilitating connection with the signal line 1 and the touch electrode 2. 3 shows only the signal line 1 on the side of the auxiliary conductive structure 3 close to the substrate 8, and the touch electrode 2 is located on the side of the auxiliary conductive structure 3 away from the substrate 8. In practical applications, the signal line 1 can also be located. The side of the auxiliary conductive structure 3 away from the substrate 8 and the touch electrode 2 may be located on the side of the auxiliary conductive structure 3 close to the substrate 8.
  • a second insulating layer 72 may be disposed between the auxiliary conductive structure 3 and the touch electrode 2, and the auxiliary conductive structure 3 may pass through the plurality of second vias 92 and the touch electrodes penetrating the second insulating layer 72. 2 Connect at multiple locations.
  • the auxiliary conductive structure 3 and the touch electrode 2 may also be in direct contact, that is, the second insulating layer 72 may not be disposed.
  • the layer where the signal line 1 is located may be located between the layer where the auxiliary conductive structure 3 is located and the layer where the touch electrode 2 is located, and the third between the signal line 1 and the touch electrode 2 may be disposed.
  • the insulating layer 73 and the auxiliary conductive structure 3 can be connected to the touch electrode 2 at a plurality of positions by a plurality of third via holes 93 penetrating through the first insulating layer 71 and the third insulating layer 73 at a position where the signal line 1 is absent.
  • the touch substrate of the embodiment of the present disclosure may be, for example, a self-capacitive touch substrate.
  • FIG. 6 is a schematic diagram showing the distribution of pixel units of a display substrate of an embodiment of the present disclosure.
  • the display substrate of the embodiment includes spaced pixel units and a touch structure disposed at intervals. At least one of the touch structures covers adjacent ones of the pixel units. At least one touch structure in the touch structure is a touch structure of the embodiment of the present disclosure, and the signal line 1 and the auxiliary conductive structure 3 may be disposed in an interval between adjacent pixel units.
  • each touch structure covers an adjacent plurality of pixel units 4, and the signal lines 1 and the auxiliary conductive structures 3 may be disposed in intervals between adjacent pixel units 4.
  • the size of the touch electrode 2 is generally on the order of millimeters, which is much larger than the size of the pixel unit. Therefore, in practical applications, one touch electrode 2 generally covers a plurality of pixel units 4.
  • the signal line 1 and the auxiliary conductive structure 3 may be disposed in intervals between adjacent pixel units 4, which are usually provided with a black matrix, and therefore, the signal line 1 and the auxiliary conductive structure 3 are disposed at these positions. It will affect the display without reducing the aperture ratio of the display substrate.
  • each branch structure of the auxiliary conductive structure 3 may be located in an interval between adjacent pixel units.
  • the display substrate of the embodiment further includes a gate line 51 and a data line 52.
  • the auxiliary conductive structure 3 and the gate line 51 may be disposed in different layers, and the data line 52 may be disposed in different layers, and auxiliary.
  • At least one insulating side may be disposed between the conductive structure 3 and the gate line 51, and at least one insulating layer may be disposed between the data line 52.
  • the auxiliary conductive structure 3 in the case where the auxiliary conductive structure 3 is connected to the touch electrode 2 at an arbitrary position, in order to prevent the auxiliary conductive structure 3 from being electrically connected to the gate line 51 and/or the data line 52, the auxiliary conductive structure is At least one insulating side is disposed between the gate line 51 and at least one insulating layer between the auxiliary conductive structure 3 and the data line 52.
  • the signal line 1 and the data line 52 may be disposed in the same layer and in parallel with each other.
  • the auxiliary conductive structure 3 may include: a first portion 31 parallel to the gate line 51, which may overlap the gate line 51; and a second portion 32 parallel to the data line 52, which may be connected to the signal line 1 Stacked.
  • the signal line 1 can be disposed in the same layer as the data line 52, the signal line 1 can be disposed in parallel with the data line 52 in order to prevent the signal line 1 and the data line 52 from being electrically connected to each other.
  • a portion (the first portion 31) of the auxiliary conductive structure 3 may overlap the gate line 51, and the other portion (the second portion 32) may overlap the signal line 1, so that not only the auxiliary is facilitated.
  • the conductive structure 3 is connected to the corresponding signal line 1 and does not affect the aperture ratio of the display substrate.
  • the display substrate of the embodiment may be an array substrate.
  • the touch electrodes 2 can be multiplexed into a common electrode.
  • a common voltage can be applied to the touch electrode 2 so that it functions as a common electrode for the display function, and in the touch phase, the touch electrode 2 is touched.
  • the signal is such that it functions as a touch electrode and the user touches the function.
  • the embodiment of the present disclosure further provides a method for fabricating a touch structure, which is a touch structure of an embodiment of the present disclosure.
  • the method may include: forming a first signal line and an auxiliary conductive structure on the substrate, a first insulating layer is formed between the auxiliary conductive structure and the first signal line; and the first signal line is formed a touch electrode is formed on the substrate of the auxiliary conductive structure, wherein a conductivity of the auxiliary conductive structure is greater than a conductivity of the touch electrode, and the auxiliary conductive structure is formed to be more than the touch electrode
  • the plurality of locations are connected, and the auxiliary conductive structure is formed to be connected to the first signal line through a first via formed in the first insulating layer.
  • the auxiliary conductive structure is formed to be connected to the first signal line at a plurality of locations through a plurality of first vias formed in the first insulating layer.
  • the auxiliary conductive structure and the touch electrode are formed as at least one of a plurality of connection positions between the auxiliary conductive structure and the touch electrode on the touch electrode.
  • the orthographic projection does not overlap with the orthographic projection of the first signal line on the touch electrode.
  • the method further includes forming a second signal line in the same layer as the first signal line, the first signal line is parallel to the second signal line, and the second signal line is not Connecting with the touch electrode, wherein the auxiliary conductive structure and the touch electrode are formed as at least one of a plurality of connection positions between the auxiliary conductive structure and the touch electrode.
  • the orthographic projection on the touch electrode is located on a side of the orthographic projection of the second signal line on the touch electrode away from the orthographic projection of the first signal line on the touch electrode.
  • the auxiliary conductive structure is formed into a mesh structure.
  • forming the first signal line and the auxiliary conductive structure on the substrate includes: forming the first signal line on the substrate; forming the first insulating layer over the first signal line;
  • the auxiliary conductive structure is formed on the first insulating layer.
  • forming the touch electrode on the substrate on which the first signal line and the auxiliary conductive structure are formed includes: forming the touch electrode directly on the auxiliary conductive structure, the auxiliary The conductive structure is in direct contact with the touch electrode.
  • forming the touch electrode on the substrate on which the first signal line and the auxiliary conductive structure are formed includes: forming a second insulating layer over the auxiliary conductive structure; The touch electrode is formed on the two insulating layers, wherein the auxiliary conductive structure is connected to the touch electrode at a plurality of positions through a plurality of second via holes formed in the second insulating layer.
  • forming the first signal line and the auxiliary conductive structure on the substrate comprises: forming the auxiliary conductive structure on the substrate; forming the first insulating layer over the auxiliary conductive structure; Forming the first signal line on the first insulating layer; and forming a third insulating layer over the first signal line.
  • forming a touch electrode on the substrate on which the first signal line and the auxiliary conductive structure are formed includes: forming the touch electrode on the third insulating layer, wherein the auxiliary conductive The structure is formed to be connected to the touch electrode at a plurality of positions through a plurality of third via holes formed in the first insulating layer and the third insulating layer, the position of the first signal line and the first The positions of the three vias do not overlap.
  • the process of forming each structure may include a patterning process or the like.
  • the method for preparing the touch structure of the present embodiment is described by taking the touch electrode as being further away from the substrate with respect to the signal line and the auxiliary conductive structure.
  • the touch electrode can be formed directly to the substrate. contact. That is, referring to FIGS. 3 to 5, the structure on the substrate 8 can be inverted as a whole, so that the touch electrodes 2 can be formed directly on the substrate 8.
  • the touch substrate of the embodiment of the present disclosure can be directly attached to the light emitting surface of the display panel, thereby realizing a display panel with a touch function.
  • the display panel may be a liquid crystal display panel, an organic light emitting diode (OLED) display panel, or the like.
  • OLED organic light emitting diode
  • Embodiments of the present disclosure also provide a display device that can include the touch substrate, display substrate, or display panel of the disclosed embodiment.
  • the display device can be any product or component having a display function, such as an electronic paper, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like.
  • a display function such as an electronic paper, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like.

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Abstract

一种触控结构及其制备方法、一种触控基板、以及一种显示基板。触控结构包括:触控电极(2);设置在触控电极(2)的一侧的第一信号线(1)和辅助导电结构(3),辅助导电结构(3)的导电率大于触控电极(2)的导电率;以及设置在辅助导电结构(3)与第一信号线(1)之间的第一绝缘层(71),其中,辅助导电结构(3)与触控电极(2)在多个位置连接,并通过贯穿第一绝缘层(71)的第一过孔(9)与第一信号线(1)连接。

Description

触控结构及制备方法、触控基板、显示基板
相关领域的交叉引用
本申请要求于2018年1月2日提交的中国专利申请No.201810002250.7的优先权,该中国专利申请的内容通过引用的方式全部合并于此。
技术领域
本公开涉及但不限于触控技术领域,更具体地,涉及触控结构及制备方法、触控基板和显示基板。
背景技术
传统上,触控结构包括触控电极、绝缘层和信号线,信号线可通过绝缘层中的过孔与触控电极相连,以向触控电极传递信号,然后,信号在触控电极中传输。但是,触控电极通常由氧化铟锡(ITO)等透明导电材料构成,其电阻较大,信号在触控电极中传输会产生较大时延和衰减,会造成在触控电极中传输的信号不均匀,影响触控效果。
公开内容
本公开的实施例提供一种触控结构,所述触控结构包括:触控电极;设置在所述触控电极的一侧的第一信号线和辅助导电结构,所述辅助导电结构的导电率大于所述触控电极的导电率;以及设置在所述辅助导电结构与所述第一信号线之间的第一绝缘层,其中,所述辅助导电结构与所述触控电极在多个位置连接,并通过贯穿所述第一绝缘层的第一过孔与所述第一信号线连接。
在一些实施方式中,所述辅助导电结构通过贯穿所述第一绝缘层的多个第一过孔与所述第一信号线在多个位置连接。
在一些实施方式中,所述辅助导电结构与所述触控电极之间的 多个连接位置中的至少一个连接位置在所述触控电极上的正投影与所述第一信号线在所述触控电极上的正投影不重叠。
在一些实施方式中,所述触控结构还包括:与所述第一信号线同层设置的第二信号线,所述第一信号线与所述第二信号线平行设置,且所述第二信号线不与所述触控电极连接,其中,所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影位于所述第二信号线在所述触控电极上的正投影的远离所述第一信号线在所述触控电极上的正投影的一侧。
在一些实施方式中,所述辅助导电结构为网状结构。
在一些实施方式中,所述辅助导电结构所在层位于所述第一信号线所在层与所述触控电极所在层之间。
在一些实施方式中,所述辅助导电结构与所述触控电极直接接触。
在一些实施方式中,所述辅助导电结构与所述触控电极之间设置有第二绝缘层,所述辅助导电结构通过贯穿所述第二绝缘层的多个第二过孔与所述触控电极在多个位置连接。
在一些实施方式中,所述第一信号线所在层位于所述辅助导电结构所在层与所述触控电极所在层之间,所述第一信号线与所述触控电极之间设置有第三绝缘层,所述辅助导电结构通过贯穿所述第一绝缘层和所述第三绝缘层的多个第三过孔与所述触控电极在多个位置连接,所述第一信号线的位置与所述第三过孔的位置不重叠。
本公开的实施例还提供一种触控基板,所述触控基板包括:基底;间隔设置在所述基底上的多个触控结构,所述多个触控结构成阵列排列,且所述多个触控结构中的至少一个触控结构为本公开的实施例的触控结构。
本公开的实施例还提供一种显示基板,所述显示基板包括间隔设置的像素单元以及间隔设置的触控结构,所述触控结构中的每一个覆盖所述像素单元中的相邻的多个像素单元,所述触控结构中的至少一个触控结构为本公开的实施例的触控结构,所述触控结构的所述第一信号线和所述辅助导电结构均设置在相邻像素单元之间的间隔中。
在一些实施方式中,所述显示基板还包括栅线和数据线,所述辅助导电结构与所述栅线设置在不同的层中,所述辅助导电结构与所述数据线设置在不同的层中,所述辅助导电结构与所述栅线之间设置有至少一层绝缘层,以及所述辅助导电结构与所述数据线之间设置有至少一层绝缘层。
在一些实施方式中,所述第一信号线与所述数据线同层且相互平行地设置。
在一些实施方式中,所述辅助导电结构包括与所述栅线平行的第一部分以及与所述数据线平行设置的第二部分,所述辅助导电结构的所述第一部分在所述触控电极上的正投影与所述栅线在所述触控电极上的正投影重叠,所述辅助导电结构的所述第二部分在所述触控电极上的正投影与所述第一信号线在所述触控电极上的正投影重叠。
在一些实施方式中,所述触控电极复用为公共电极。
本公开的实施例还提供一种触控结构的制备方法,所述方法包括:在基底上形成第一信号线和辅助导电结构,所述辅助导电结构与所述第一信号线之间形成有第一绝缘层;在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极,其中,所述辅助导电结构的导电率大于所述触控电极的导电率,所述辅助导电结构形成为与所述触控电极在多个位置连接,且所述辅助导电结构形成为通过形成在所述第一绝缘层中的第一过孔与所述第一信号线连接。
在一些实施方式中,所述辅助导电结构形成为通过形成在所述第一绝缘层的多个第一过孔与所述第一信号线在多个位置连接。
在一些实施方式中,所述辅助导电结构与所述触控电极形成为所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影与所述第一信号线在所述触控电极上的正投影不重叠。
在一些实施方式中,所述方法还包括:与所述第一信号线同层形成第二信号线,所述第一信号线与所述第二信号线平行,且所述第二信号线不与所述触控电极连接,其中,所述辅助导电结构与所述触控电极形成为所述辅助导电结构与所述触控电极之间的多个连接位 置中的至少一个连接位置在所述触控电极上的正投影位于所述第二信号线在所述触控电极上的正投影的远离所述第一信号线在所述触控电极上的正投影的一侧。
在一些实施方式中,所述辅助导电结构形成为网状结构。
在一些实施方式中,在基底上形成第一信号线和辅助导电结构包括:在所述基底上形成所述第一信号线;在所述第一信号线上方形成所述第一绝缘层;以及在所述第一绝缘层上形成所述辅助导电结构。
在一些实施方式中,在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极包括:直接在所述辅助导电结构上形成所述触控电极,所述辅助导电结构与所述触控电极直接接触。
在一些实施方式中,在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极包括:在所述辅助导电结构上方形成第二绝缘层;以及在所述第二绝缘层上形成所述触控电极,其中,所述辅助导电结构通过形成在所述第二绝缘层的多个第二过孔与所述触控电极在多个位置连接。
在一些实施方式中,在基底上形成第一信号线和辅助导电结构包括:在所述基底上形成所述辅助导电结构;在所述辅助导电结构上方形成所述第一绝缘层;在所述第一绝缘层上形成所述第一信号线;以及在所述第一信号线上方形成第三绝缘层。相应地,在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极包括:在所述第三绝缘层上形成所述触控电极,其中,所述辅助导电结构形成为通过形成在所述第一绝缘层和所述第三绝缘层的多个第三过孔与所述触控电极在多个位置连接,所述第一信号线的位置与所述第三过孔的位置不重叠。
附图说明
图1为一种触控基板的结构示意图;
图2为本公开的实施例的触控基板的结构示意图;
图3为沿图2中AA’线切割触控基板得到的局部剖面结构示意图;
图4为沿图2中BB’线切割触控基板得到的局部剖面结构示意图;
图5为切割本公开的实施例的触控基板得到的另一局部剖面结构示意图;以及
图6为本公开的实施例的显示基板的像素单元的分布示意图。
具体实施方式
为使本领域技术人员更好地理解本公开的技术方案,下面结合附图和具体实施方式对本公开作进一步详细描述。
在本公开中,两结构“同层设置”是指二者是由同一个材料层形成的,故它们在层叠关系上处于同一层中,但并不代表它们与基底间的距离相等。
在本公开中,任意术语之前限定“第一”和“第二”仅用于区分术语所代表的实体,而不表示术语所代表的实体的顺序、重要性等,在不需要区分实体的情况下,限定“第一”和“第二”可省略。
在本公开中,“构图工艺”是指形成具有特定图案的结构的步骤,其可为光刻工艺,光刻工艺例如包括形成材料层、涂布光刻胶、曝光、显影、刻蚀、光刻胶剥离等步骤中的一步或多步。当然,“构图工艺”也可为压印工艺、喷墨打印工艺等其它工艺。
本公开的实施例提供一种触控结构,所述触控结构包括:触控电极;设置在所述触控电极的一侧的第一信号线和辅助导电结构,所述辅助导电结构的导电率大于所述触控电极的导电率;以及设置在所述辅助导电结构与所述第一信号线之间的第一绝缘层,其中,所述辅助导电结构与所述触控电极在多个位置连接,并通过贯穿所述第一绝缘层的第一过孔与所述第一信号线连接。
本实施例的触控结构中,所述第一信号线通过所述辅助导电结构间接地与所述触控电极电连接,而所述辅助导电结构的导电率大于所述触控电极的导电率,例如所述辅助导电结构可由金属构成,电阻较低,传输信号的能力强,且可与所述触控电极的多个不同位置连接, 故所述第一信号线中的信号可顺利地传递到所述触控电极的多个不同位置,从而消除或降低了所述触控电极中的信号不均匀的发生,可改善触控效果。
在一些实施方式中,所述辅助导电结构通过贯穿所述第一绝缘层的多个第一过孔与所述第一信号线在多个位置连接。
通过使所述辅助导电结构与所述第一信号线在多个位置连接,可降低所述辅助导电结构与所述第一信号线之间的电阻,可进一步消除或降低所述触控电极中的信号的不均匀的发生,从而可进一步改善触控效果。
在一些实施方式中,所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影与所述第一信号线在所述触控电极上的正投影不重叠。
也就是说,所述辅助导电结构可以在超出所述第一信号线所在范围的位置与所述触控电极连接,以将信号传递至所述触控电极的所述第一信号线无法直接到达的位置,从而改善所述触控电极中的信号的均匀性。
在一些实施方式中,所述触控结构还包括:与所述第一信号线同层设置的第二信号线,所述第一信号线与所述第二信号线平行设置,且所述第二信号线不与所述触控电极连接,其中,所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影位于所述第二信号线在所述触控电极上的正投影的远离所述第一信号线在所述触控电极上的正投影的一侧。
应当理解,在所述第一信号线与所述第二信号线同层设置的情况下,所述第一信号线不能与所述第二信号线相交(如果所述第一信号线与所述第二信号线相交,则所述第一信号线与所述第二信号线会相互导通),即所述第一信号线无法跨越所述第二信号线而将信号传递至比所述第二信号线更远离所述第一信号线的位置,然而,本实施例的触控结构借助所述辅助导电结构,所述辅助导电结构与所述第一信号线和所述第二信号线之间设置有第一绝缘层,从而所述辅助导电结构可在比所述第二信号线更远离所述第一信号线的位置与所述触 控电极连接,以将信号传递至所述触控电极,可改善所述触控电极中的信号的均匀性。
在一些实施方式中,所述辅助导电结构为网状结构。
本实施例的触控结构中,通过将所述辅助导电结构设置为网状结构,一方面可以降低所述辅助导电结构的电阻,另一方面可以在多个位置连接至所述触控电极,从而将信号传递至所述触控电极的多个位置,可改善所述触控电极中的信号的均匀性。
应当理解,所述辅助导电结构也可以为其他形式。
一些实施方式中,所述辅助导电结构所在层位于所述第一信号线所在层与所述触控电极所在层之间。
应当理解,将所述辅助导电结构所在层设置在所述第一信号线所在层与所述触控电极所在层之间便于所述辅助导电结构同时与所述第一信号线和所述触控电极连接。
在一些实施方式中,所述辅助导电结构与所述触控电极直接接触。
在一些实施方式中,所述辅助导电结构与所述触控电极之间设置有第二绝缘层,所述辅助导电结构通过贯穿所述第二绝缘层的多个第二过孔与所述触控电极在多个位置连接。
在一些实施方式中,所述第一信号线所在层位于所述辅助导电结构所在层与所述触控电极所在层之间,所述第一信号线与所述触控电极之间设置有第三绝缘层,所述辅助导电结构通过贯穿所述第一绝缘层和所述第三绝缘层的多个第三过孔与所述触控电极在多个位置连接,所述第一信号线的位置与所述第三过孔的位置不重叠。
也就是说,在所述第一信号线所在层位于所述辅助导电结构所在层与所述触控电极所在层之间的情况下,所述辅助导电结构可从没有所述第一信号线的位置与所述触控电极连接。
图1示出了一种触控基板的结构示意图。
如图1所示,所述触控基板包括间隔设置在基底上的多个触控电极2,多个触控电极2成阵列排列,每个触控电极2与一条信号线 1对应连接,信号线1可向触控电极2传递信号,然后信号在触控电极2中传输。例如,触控电极2与信号线1之间设置有绝缘层,且触控电极2通过贯穿所述绝缘层的过孔9与信号线1连接。
通常,触控电极2由氧化铟锡(ITO)等透明导电材料构成,电阻较大,信号在触控电极2中传输会发生较大的延迟和衰减,会造成触控电极2中的信号不均匀,从而影响触控效果。
本实施例的实施例提供一种触控基板,所述触控基板包括:基底;间隔设置在所述基底上的多个触控结构,所述多个触控结构成阵列排列,且所述多个触控结构中的至少一个触控结构为本公开的实施例的触控结构。
本公开的实施例提供一种显示基板,所述显示基板包括间隔设置的像素单元以及间隔设置的触控结构,所述触控结构中的至少一个覆盖所述像素单元中的相邻的多个像素单元,所述触控结构中的至少一个触控结构为本公开的实施例的触控结构,所述触控结构的所述第一信号线和所述辅助导电结构均设置在相邻像素单元之间的间隔中。
图2至图6示出了本公开的实施例的触控基板、触控结构及显示基板的示意图。
如图2至图5所示,本公开的实施例的触控基板包括:基底8;间隔设置在基底8上的、由透明导电材料构成的多个触控电极2,所述多个触控电极2成阵列排列;与所述多个触控电极2一一对应连接的多条信号线1,所述多条信号线1与所述触控电极2间设有至少一个绝缘层。
本实施例的触控基板用于实现触控功能,即用于识别触摸。该触控基板中,由氧化铟锡(ITO)等透明导电材料构成的多个触控电极2间隔设置,且每个触控电极2与一条信号线1连接。由此,可通过信号线1向对应的触控电极2传递触控信号(如高频信号),当有触摸发生时,触摸发生位置处的触控电极2中的信号发生变化,对应的信号线1将该信号反馈至例如触控芯片等进行分析,即可确定出例如触摸的位置,从而可针对该触摸进行适当的响应。
在本实施例的触控基板中,与至少一个触控电极2对应地设置 辅助导电结构3,辅助导电结构3与其所对应的触控电极2在多个位置连接。信号线1与辅助导电结构3设置在触控电极2的同一侧,且辅助导电结构3与信号线1之间设有第一绝缘层71。辅助导电结构3可通过贯穿第一绝缘层71的第一过孔91与其所对应的信号线1连接。
也就是说,如图2所示,本实施例的触控基板中,与至少一个触控电极2对应设置例如由铝、铜等引线常用的金属材料形成的辅助导电结构3,从而辅助导电结构3也与该触控电极2所对应连接的信号线1相对应。由此,信号线1不直接与触控电极2相连,而是通过贯穿第一绝缘层71的第一过孔91与对应的辅助导电结构3相连,辅助导电结构3再与对应的触控电极2在多个不同位置连接。
本实施例的触控基板中,信号线1通过辅助导电结构3间接地与触控电极2电连接,而辅助导电结构3的导电率大于触控电极2的导电率,例如辅助导电结构3可由金属构成,电阻较小,传输信号的能力强,且与触控电极2的多个不同位置连接,故信号线1中的信号可经由辅助导电结构3顺利地传递到触控电极2的多个不同位置,从而可消除或降低触控电极2中的信号不均匀的发生,可改善触控效果。
应当理解,辅助导电结构3可改善与其对应的触控电极2中的信号均匀性,因此,为了起到最好的改善效果,可针对每个触控电极2对应设置与其连接的辅助导电结构3。当然,只针对部分触控电极2对应设置辅助导电结构3而其它触控电极2则仍然直接与对应的信号线1连接也是可行的。
在一些实施方式中,每个辅助导电结构3可通过贯穿第一绝缘层71的多个第一过孔91与其所对应的信号线1在多个位置连接。
如图2和图3所示,辅助导电结构3与其所对应的信号线1在多个不同位置连接,这样能够降低辅助导电结构3与其所对应的信号线1之间的电阻。
在一些实施方式中,如图2所示,在辅助导电结构3与其所对应的触控电极2之间的多个连接位置中,至少一个连接位置在基底8上的正投影与该辅助导电结构3所对应的信号线1在基底8上的正投 影不重叠。
应当理解,信号线1与触控电极2也可在多个位置交叠,故信号线1也可直接与触控电极2在多个位置连接。但是,显然,信号线1只能在其所在位置与其所对应的触控电极2连接,因此不能将信号直接传递至超出其所在范围的位置。然而,辅助导电结构3可设置为超出信号线1所在范围的位置,从而可在超出信号线1所在范围的位置处与触控电极2连接,能够将信号传递至信号线1无法直接到达的位置。
在一些实施方式中,至少一个触控电极2不仅与其所对应连接的信号线1交叠设置,还与不与该触控电极2连接的信号线1交叠设置。也就是说,本实施例的触控基板中,如图2所示,至少一条信号线1可延伸与多个触控电极2交叠,但仅与一个与其交叠设置的触控电极2连接。由于各条信号线1通常同层形成,显然,不同信号线1不能相交,否则会导致不同信号线1之间相互导通,因此,各条信号线1可平行设置,该情况下,与对应触控电极2连接的信号线1无法直接跨越不与该触控电极2连接的信号线1而与该触控电极2的任意位置连接。本实施例的触控基板中,如图4所示,通过设置辅助导电结构3,且辅助导电结构3与信号线1之间设有第一绝缘层71,故辅助导电结构3可与任意信号线1交叠但不导通,由此,可通过辅助导电结构3跨越任意信号线1而与对应触控电极2的任意位置连接,以将信号传递至触控电极2,这样,可改善触控电极2中的信号的均匀性。
本公开中,与对应触控电极2连接的信号线1可称为“第一信号线”,不与该触控电极2连接但与该触控电极2交叠的信号线1可称为“第二信号线”。
在一些实施方式中,与触控电极2对应设置和连接的辅助导电结构3可为网状结构。
通过将辅助导电结构3设置为网状结构,不仅可减小辅助导电结构3的电阻,同时便于与对应触控电极2的任意位置连接,可进一步改善触控电极2中的信号的均匀性。
应当理解,在不脱离本公开的构思的情况下,辅助导电结构3也可为其它形式。
在一些实施方式中,辅助导电结构3所在层可位于信号线1所在层与触控电极2所在层之间。
由于信号线1和触控电极2均与辅助导电结构3连接,且辅助导电结构3与信号线1不能同层,故如图3所示,辅助导电结构3可位于信号线1与触控电极2之间,从而便于与信号线1和触控电极2连接。图3仅示出了信号线1位于辅助导电结构3的靠近基底8的一侧,而触控电极2位于辅助导电结构3的远离基底8的一侧,实际应用中,信号线1也可位于辅助导电结构3的远离基底8的一侧,而触控电极2可位于辅助导电结构3的靠近基底8的一侧。
在一些实施方式中,辅助导电结构3与触控电极2之间可设置有第二绝缘层72,辅助导电结构3可通过贯穿第二绝缘层72的多个第二过孔92与触控电极2在多个位置连接。
实际应用中,辅助导电结构3与触控电极2之间也可直接接触,即,可不设置第二绝缘层72。
在一些实施方式中,如图5所示,信号线1所在层可位于辅助导电结构3所在层与触控电极2所在层之间,信号线1与触控电极2之间可设置有第三绝缘层73,辅助导电结构3可在没有信号线1的位置通过贯穿第一绝缘层71和第三绝缘层73的多个第三过孔93与触控电极2在多个位置连接。
本公开的实施例的触控基板例如可以为自容式触控基板。
图6示出了本公开的实施例的显示基板的像素单元的分布示意图。如图6所示,本实施例的显示基板包括间隔设置的像素单元以及间隔设置的触控结构,所述触控结构中的至少一个覆盖所述像素单元中的相邻的多个像素单元,所述触控结构中的至少一个触控结构为本公开的实施例的触控结构,信号线1和辅助导电结构3可设置在相邻的像素单元之间的间隔中。
在一些实施方式中,每个触控结构覆盖相邻的多个像素单元4, 信号线1和辅助导电结构3可设置在相邻的像素单元4之间的间隔中。
应当理解,触控电极2的尺寸一般在毫米量级,远大于像素单元的尺寸,因此,实际应用中,一个触控电极2通常覆盖多个像素单元4。该情况下,信号线1和辅助导电结构3可设置在相邻的像素单元4之间的间隔中,这些位置通常设置黑矩阵,因此,将信号线1和辅助导电结构3设置在这些位置不会对显示造成影响,不会降低显示基板的开口率。
在辅助导电结构3为网状结构的情况下,辅助导电结构3的各分支结构可位于相邻的像素单元之间的间隔中。
在一些实施方式中,本实施例的显示基板还包括栅线51和数据线52,辅助导电结构3与栅线51可设于不同层中,且与数据线52可设于不同层中,辅助导电结构3与栅线51之间可设有至少一个绝缘侧,与数据线52之间可设有至少一个绝缘层。
应当理解,在辅助导电结构3在任意位置与触控电极2连接的情况下,为了避免辅助导电结构3与栅线51和/或数据线52交叠而相互导通,因此,在辅助导电结构3与栅线51之间设置至少一个绝缘侧、以及在辅助导电结构3与数据线52之间设置至少一个绝缘层。
在一些实施方式中,信号线1与数据线52可同层且相互平行地设置。
在一些实施方式中,辅助导电结构3可包括:与栅线51平行的第一部分31,其可与栅线51叠置;以及与数据线52平行的第二部分32,其可与信号线1叠置。
由于信号线1可与数据线52同层设置,因此,为了避免信号线1与数据线52相互导通,可将信号线1与数据线52平行设置。
然而,如图6所示,辅助导电结构3中可有一部分(第一部分31)与栅线51叠置,而另一部分(第二部分32)可与信号线1叠置,这样不仅可便于辅助导电结构3与对应的信号线1连接,而且不会影响显示基板的开口率。
在一些实施方式中,本实施例的显示基板可为阵列基板。
在一些实施方式中,触控电极2可复用为公共电极。
也就是说,在显示阶段,可向触控电极2通入公共电压,以使其起到公共电极的作用,用于显示功能,而在触控阶段,则向触控电极2通入触控信号,以使其起到触控电极的作用,用户触控功能。
本公开的实施例还提供一种触控结构的制备方法,所述触控结构为本公开的实施例的触控结构。所述方法可包括:在基底上形成第一信号线和辅助导电结构,所述辅助导电结构与所述第一信号线之间形成有第一绝缘层;在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极,其中,所述辅助导电结构的导电率大于所述触控电极的导电率,所述辅助导电结构形成为与所述触控电极在多个位置连接,且所述辅助导电结构形成为通过形成在所述第一绝缘层中的第一过孔与所述第一信号线连接。
在一些实施方式中,所述辅助导电结构形成为通过形成在所述第一绝缘层的多个第一过孔与所述第一信号线在多个位置连接。
在一些实施方式中,所述辅助导电结构与所述触控电极形成为所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影与所述第一信号线在所述触控电极上的正投影不重叠。
在一些实施方式中,所述方法还包括:与所述第一信号线同层形成第二信号线,所述第一信号线与所述第二信号线平行,且所述第二信号线不与所述触控电极连接,其中,所述辅助导电结构与所述触控电极形成为所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影位于所述第二信号线在所述触控电极上的正投影的远离所述第一信号线在所述触控电极上的正投影的一侧。
在一些实施方式中,所述辅助导电结构形成为网状结构。
在一些实施方式中,在基底上形成第一信号线和辅助导电结构包括:在所述基底上形成所述第一信号线;在所述第一信号线上方形成所述第一绝缘层;以及
在所述第一绝缘层上形成所述辅助导电结构。
在一些实施方式中,在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极包括:直接在所述辅助导电结构上形成所述触控电极,所述辅助导电结构与所述触控电极直接接触。
在一些实施方式中,在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极包括:在所述辅助导电结构上方形成第二绝缘层;以及在所述第二绝缘层上形成所述触控电极,其中,所述辅助导电结构通过形成在所述第二绝缘层的多个第二过孔与所述触控电极在多个位置连接。
在一些实施方式中,在基底上形成第一信号线和辅助导电结构包括:在所述基底上形成所述辅助导电结构;在所述辅助导电结构上方形成所述第一绝缘层;在所述第一绝缘层上形成所述第一信号线;以及在所述第一信号线上方形成第三绝缘层。相应地,在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极包括:在所述第三绝缘层上形成所述触控电极,其中,所述辅助导电结构形成为通过形成在所述第一绝缘层和所述第三绝缘层的多个第三过孔与所述触控电极在多个位置连接,所述第一信号线的位置与所述第三过孔的位置不重叠。
本实施例中,形成各结构的工艺可包括构图工艺等。
以上仅以触控电极形成为相对于信号线和辅助导电结构更远离基板为例对本实施例的触控结构的制备方法进行了说明,然而,实际应用中,触控电极可形成为与基板直接接触。也就是说,参照图3至图5,基底8上的结构可整体倒置,从而触控电极2可直接形成在基底8上。
另外,需要说明的是,本公开的实施例的触控基板可直接附加在显示面板的出光面处,从而实现具有触控功能的显示面板。
所述显示面板可为液晶显示面板、有机发光二极管(OLED)显示面板等。
本公开的实施例还提供一种显示装置,该显示装置可包括本公 开的实施例的触控基板、显示基板、或显示面板。
应当理解,所述显示装置中还可包括其他组件。
所述显示装置可为电子纸、手机、平板电脑、电视机、显示器、笔记本电脑、数码相框、导航仪等具有显示功能的任何产品或部件。
可以理解的是,以上实施例及实施方式仅仅是为了说明本公开的原理而采用的示例性实施例及实施方式,然而本公开并不局限于此。对于本领域内的普通技术人员而言,在不脱离本公开的构思和实质的情况下,可以对本公开的实施例及实施方式进行各种变型、修改和等价替换,这些变型、修改和等价替换均应视为落入本公开的保护范围。

Claims (24)

  1. 一种触控结构,包括:
    触控电极;
    设置在所述触控电极的一侧的第一信号线和辅助导电结构,所述辅助导电结构的导电率大于所述触控电极的导电率;以及
    设置在所述辅助导电结构与所述第一信号线之间的第一绝缘层,其中,所述辅助导电结构与所述触控电极在多个位置连接,并通过贯穿所述第一绝缘层的第一过孔与所述第一信号线连接。
  2. 根据权利要求1所述的触控结构,其中,所述辅助导电结构通过贯穿所述第一绝缘层的多个第一过孔与所述第一信号线在多个位置连接。
  3. 根据权利要求1所述的触控结构,其中,所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影与所述第一信号线在所述触控电极上的正投影不重叠。
  4. 根据权利要求1所述的触控结构,还包括:
    与所述第一信号线同层设置的第二信号线,所述第一信号线与所述第二信号线平行设置,且所述第二信号线不与所述触控电极连接,其中,所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影位于所述第二信号线在所述触控电极上的正投影的远离所述第一信号线在所述触控电极上的正投影的一侧。
  5. 根据权利要求1所述的触控结构,其中,所述辅助导电结构为网状结构。
  6. 根据权利要求1所述的触控结构,其中,所述辅助导电结构所在层位于所述第一信号线所在层与所述触控电极所在层之间。
  7. 根据权利要求6所述的触控结构,其中,所述辅助导电结构与所述触控电极直接接触。
  8. 根据权利要求6所述的触控结构,其中,所述辅助导电结构与所述触控电极之间设置有第二绝缘层,所述辅助导电结构通过贯穿所述第二绝缘层的多个第二过孔与所述触控电极在多个位置连接。
  9. 根据权利要求1所述的触控结构,其中,所述第一信号线所在层位于所述辅助导电结构所在层与所述触控电极所在层之间,所述第一信号线与所述触控电极之间设置有第三绝缘层,所述辅助导电结构通过贯穿所述第一绝缘层和所述第三绝缘层的多个第三过孔与所述触控电极在多个位置连接,所述第一信号线的位置与所述第三过孔的位置不重叠。
  10. 一种触控基板,包括:
    基底;
    间隔设置在所述基底上的多个触控结构,所述多个触控结构成阵列排列,且所述多个触控结构中的至少一个触控结构为如权利要求1所述的触控结构。
  11. 一种显示基板,包括间隔设置的像素单元以及间隔设置的触控结构,所述触控结构中的至少一个覆盖所述像素单元中的相邻的多个像素单元,所述触控结构中的至少一个触控结构为如权利要求1所述的触控结构,所述触控结构的所述第一信号线和所述辅助导电结构均设置在相邻像素单元之间的间隔中。
  12. 根据权利要求11所述的显示基板,还包括栅线和数据线, 所述辅助导电结构与所述栅线设置在不同的层中,所述辅助导电结构与所述数据线设置在不同的层中,所述辅助导电结构与所述栅线之间设置有至少一层绝缘层,以及所述辅助导电结构与所述数据线之间设置有至少一层绝缘层。
  13. 根据权利要求12所述的显示基板,其中,所述第一信号线与所述数据线同层且相互平行地设置。
  14. 根据权利要求13所述的显示基板,其中,所述辅助导电结构包括与所述栅线平行设置的第一部分以及与所述数据线平行设置的第二部分,所述辅助导电结构的所述第一部分在所述触控电极上的正投影与所述栅线在所述触控电极上的正投影重叠,所述辅助导电结构的所述第二部分在所述触控电极上的正投影与所述第一信号线在所述触控电极上的正投影重叠。
  15. 根据权利要求11所述的显示基板,其中,所述触控电极复用为公共电极。
  16. 一种触控结构的制备方法,包括:
    在基底上形成第一信号线和辅助导电结构,所述辅助导电结构与所述第一信号线之间形成有第一绝缘层;
    在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极,其中,所述辅助导电结构的导电率大于所述触控电极的导电率,所述辅助导电结构形成为与所述触控电极在多个位置连接,且所述辅助导电结构形成为通过形成在所述第一绝缘层中的第一过孔与所述第一信号线连接。
  17. 根据权利要求16所述的方法,其中,所述辅助导电结构形成为通过形成在所述第一绝缘层的多个第一过孔与所述第一信号线在多个位置连接。
  18. 根据权利要求16所述的方法,其中,所述辅助导电结构与所述触控电极形成为所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影与所述第一信号线在所述触控电极上的正投影不重叠。
  19. 根据权利要求16所述的方法,还包括:
    与所述第一信号线同层形成第二信号线,所述第一信号线与所述第二信号线平行,且所述第二信号线不与所述触控电极连接,其中,所述辅助导电结构与所述触控电极形成为所述辅助导电结构与所述触控电极之间的多个连接位置中的至少一个连接位置在所述触控电极上的正投影位于所述第二信号线在所述触控电极上的正投影的远离所述第一信号线在所述触控电极上的正投影的一侧。
  20. 根据权利要求16所述的方法,其中,所述辅助导电结构形成为网状结构。
  21. 根据权利要求16所述的方法,其中,在基底上形成第一信号线和辅助导电结构包括:
    在所述基底上形成所述第一信号线;
    在所述第一信号线上方形成所述第一绝缘层;以及
    在所述第一绝缘层上形成所述辅助导电结构。
  22. 根据权利要求21所述的方法,其中,在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极包括:
    直接在所述辅助导电结构上形成所述触控电极,所述辅助导电结构与所述触控电极直接接触。
  23. 根据权利要求21所述的方法,其中,在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极包括:
    在所述辅助导电结构上方形成第二绝缘层;以及
    在所述第二绝缘层上形成所述触控电极,其中,所述辅助导电结构通过形成在所述第二绝缘层的多个第二过孔与所述触控电极在多个位置连接。
  24. 根据权利要求16所述的方法,其中,在基底上形成第一信号线和辅助导电结构包括:
    在所述基底上形成所述辅助导电结构;
    在所述辅助导电结构上方形成所述第一绝缘层;
    在所述第一绝缘层上形成所述第一信号线;以及
    在所述第一信号线上方形成第三绝缘层,
    在形成有所述第一信号线与所述辅助导电结构的所述基底上形成触控电极包括:
    在所述第三绝缘层上形成所述触控电极,
    其中,所述辅助导电结构形成为通过形成在所述第一绝缘层和所述第三绝缘层的多个第三过孔与所述触控电极在多个位置连接,所述第一信号线的位置与所述第三过孔的位置不重叠。
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