WO2019111982A1 - Pump - Google Patents

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Publication number
WO2019111982A1
WO2019111982A1 PCT/JP2018/044817 JP2018044817W WO2019111982A1 WO 2019111982 A1 WO2019111982 A1 WO 2019111982A1 JP 2018044817 W JP2018044817 W JP 2018044817W WO 2019111982 A1 WO2019111982 A1 WO 2019111982A1
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WO
WIPO (PCT)
Prior art keywords
vibrating portion
flat plate
pump
base member
pump according
Prior art date
Application number
PCT/JP2018/044817
Other languages
French (fr)
Japanese (ja)
Inventor
宏志 浅野
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Publication of WO2019111982A1 publication Critical patent/WO2019111982A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Definitions

  • the present invention relates to a pump that delivers a fluid using a pressure change caused by flexural vibration.
  • Patent Document 1 there is a pump having a structure shown in Patent Document 1.
  • the pump shown to patent document 1 is provided with the housing
  • the actuator is flat and is disposed in the inner space of the housing so as to face one wall of the housing.
  • the wall facing the actuator has a thin central portion and functions as a passive first vibrating portion.
  • An inlet is provided at the center of the passive first vibration unit.
  • the outer edge of the actuator has an opening, which is a discharge port.
  • the negative pressure in the pump chamber separates the distance between the actuator and the passive first vibrating portion in the central region of the pump chamber, and the distance between the actuator and the passive first vibrating portion in the outer edge approaches. In this state, inhalation is realized.
  • the pump of the present invention comprises a base member, a first vibrating portion, and a drive member.
  • the base member is formed with an inlet port connected to the front surface from the rear surface.
  • the first vibrating portion has a first main surface facing the surface of the base member, and the first main surface overlaps the suction port in plan view, and is disposed at a predetermined distance from the surface, is there.
  • the driving member includes a second vibrating portion connected to a second main surface not facing the base member in the first vibrating portion, and a driving body for driving the second vibrating portion.
  • the base member is provided with a passive vibration unit that is more flexible than the first vibration unit and that vibrates passively by the vibration of the second vibration unit in a region facing the first vibration unit.
  • the first vibration unit vibrates in the same direction and in the same phase as the vibration of the central region (the connection region with the first vibration unit) of the second vibration unit, and the passive vibration unit is relative to the second vibration unit. Vibrate with phase delay. Thereby, the antinode of the vibration of the first vibrating portion and the node of the vibration of the passive first vibrating portion overlap, and the fluid is transported from the center toward the outer edge.
  • the first vibrating portion have the same or substantially the same resonance frequency as the driving member.
  • the area of the first vibrating portion and the area of the passive vibrating portion be the same as viewed in the direction in which the first vibrating portion and the passive vibrating portion face each other.
  • the area of the pump chamber is larger than that of the conventional configuration.
  • the pump of this invention is provided with a base member, a 1st vibration part, and a drive member.
  • the base member is formed with an inlet port connected to the front surface from the rear surface.
  • the first vibrating portion has a first main surface facing the surface of the base member, and the first main surface overlaps the suction port in plan view, and is disposed at a predetermined distance from the surface, is there.
  • the driving member is connected to a second main surface which does not face the base member in the first vibrating portion.
  • the first vibrating portion is more flexible than the drive member in a first direction orthogonal to the surface.
  • the space between the first main surface of the first vibrating portion and the surface of the base member is a pump chamber. Then, the first flexible vibrating portion vibrates in the height direction of the pump chamber by the force from the driving member, whereby the fluid sucked into the pump chamber from the suction port is sequentially out of the first vibrating portion. It is transported to the edge side.
  • the drive member preferably includes a drive body and a second vibrating portion.
  • the behavior of the driving body is converted to the vibration in the height direction of the pump chamber by the second vibrating unit, and the first vibrating unit vibrates.
  • the first vibrating portion it is easy to cause the first vibrating portion to generate a vibration having a predetermined amplitude in the height direction of the pump chamber.
  • the thickness of the first vibrating portion is preferably smaller than the thickness of the second vibrating portion.
  • the above-described vibration of the first vibrating unit can be realized more reliably with a simple configuration.
  • the thickness of the outer edge portion of the first vibrating portion is preferably smaller than the thickness of the center of the first vibrating portion.
  • the first vibrating portion is provided with a recess at a position facing the suction port, which is recessed from the first main surface and overlaps the suction port in plan view.
  • the recess preferably has an opening area larger than that of the bottom.
  • the size of the bottleneck portion of the flow path is further enlarged, and the flow rate is increased.
  • the first main surface of the first vibrating portion be provided with a convex portion that overlaps the suction port in plan view.
  • the convex portion rectifies the fluid from the suction port through the pump chamber to the outer edge of the first vibrating portion. Thereby, the turbulent flow of the fluid in the vicinity of the suction port is suppressed.
  • the suction port has a tapered shape in which the area at the opening surface on the first main surface side is larger than the area at a predetermined distance from the opening surface on the first main surface side.
  • the tapered shape rectifies the fluid from the suction port to the pump chamber.
  • the turbulent flow of the fluid in the vicinity of the suction port is suppressed.
  • turbulence is further suppressed by the combination with the above-mentioned convex portion.
  • the drive member is disposed in parallel to the first vibrating portion, and the approximate center of the second vibrating portion is connected to the approximate center of the first vibrating portion.
  • connection member which connects a 1st vibration part and a drive member.
  • the first vibrating portion and the drive member can be separated by a desired distance. Moreover, the 1st vibration part and drive member which were each formed separately were connected physically.
  • connection member preferably overlaps the suction port in plan view.
  • the distance between the first vibrating portion and the driving member is preferably equal to or greater than the distance between the first vibrating portion and the base member.
  • the interference between the driving member and the first vibrating portion is less likely to occur, and the propagation efficiency of the vibration is improved.
  • the second vibrating portion is vibratably supported in the direction substantially orthogonal to the main surface of the second vibrating portion at the other end of the support member having one end supported by the wall. Is preferred.
  • the second vibrating portion is supported such that the vibration directions of the first vibrating portion and the second vibrating portion coincide with each other. This further improves the propagation efficiency of the vibration.
  • the first vibrating portion preferably contains a resin.
  • the weight of the first vibration unit can be reduced.
  • the first vibrating portion is a substantially regular polygon in a plan view.
  • the distance from the suction port to the outer edge is substantially the same in all directions.
  • the vibration is transmitted about the central axis substantially symmetrically, so that a uniform radial flow can be generated regardless of the orientation.
  • the first vibrating portion is preferably circular in plan view.
  • the drive body in the drive member is a piezoelectric element.
  • the drive member has a low profile. This can reduce the height of the pump.
  • the driving body applies a force to move the center of the first vibrating portion in the first direction orthogonal to the surface, and the distance from the base member is in the central region of the first vibrating portion. After increasing, by gradually approaching the base member, it is preferable to generate vibration in which the position where the distance between the first vibrating portion and the base member is the largest moves from the center of the first vibrating portion toward the outer edge.
  • the fluid is sucked between the first vibrating portion and the base member, that is, into the pump chamber, and the fluid is swept away by the first vibrating portion from the central region of the first vibrating portion toward the outer edge.
  • the propagation efficiency of the fluid in the pump chamber is improved.
  • the distance between the first main surface and the surface is an amplitude of vibration in which the position where the distance between the first vibrating portion and the base member is the largest moves from the center of the first vibrating portion toward the outer edge. It is preferable that it is substantially the same as
  • the first main surface on the outer edge side of the center of the first vibrating portion is in close proximity to or in contact with the base member at the time of suction in which the pressure in the pump chamber consisting of the space between the first vibrating portion and the base member decreases. Contact. This suppresses the inflow of fluid from the outer edge of the first vibrating portion to the pump chamber at the time of suction.
  • the distance between the second vibrating portion of the driving member and the first vibrating portion is such that the position where the distance between the first vibrating portion and the base member is the largest is from the center of the first vibrating portion toward the outer edge It is preferable that it is about twice or less of the amplitude of the vibration which moves.
  • the flow rate or pressure can be improved as compared with the conventional configuration.
  • FIG. 1 is a side cross-sectional view showing a configuration of a pump according to a first embodiment of the present invention.
  • FIG. 2 is an exploded perspective view showing the configuration of the pump according to the first embodiment of the present invention.
  • the pump 10 includes a flat plate 21, a drive member 22, a connection member 30, a base member 51, a wall 52, a support member 201, and a wall 202.
  • the flat plate 21 has a first major surface 210 and a second major surface 220 opposed to each other.
  • the flat plate 21 is a disk having a predetermined thickness and diameter.
  • the flat plate 21 is made of a material having a predetermined rigidity, and preferably made of the same material as the flat plate 221 described later.
  • the thickness, diameter, and material of the flat plate 21 have the same phase in the same direction as the central region of the drive member 22, that is, the portion connected by the connection member 30 by application of a drive force from the drive member 22 described later. Is set to resonate. That is, the flat plate 21 is formed in a shape having a resonance frequency substantially the same as the resonance frequency of the drive member 22.
  • the resonance frequencies are substantially the same means that, for example, the resonance frequency difference is ⁇ 10% or less.
  • the flat plate 21 corresponds to the "first vibrating portion" in the present invention.
  • the driving member 22 includes a flat plate 221 and a piezoelectric element 222.
  • the flat plate 21 has two main surfaces facing each other.
  • the flat plate 221 is a disk having a predetermined thickness and diameter.
  • the flat plate 221 is made of a material having a predetermined rigidity.
  • the flat plate 221 is disposed on the second main surface 220 side of the flat plate 21 so as to be separated from the flat plate 21. At this time, the main surface of the flat plate 221 and the main surface of the flat plate 21 are parallel. Further, in plan view (viewed in the direction orthogonal to each main surface), the center of the flat plate 221 substantially coincides with the center PO of the flat plate 21.
  • the flat plate 221 corresponds to the "second vibrating portion" in the present invention.
  • the piezoelectric element 222 is disposed on the main surface of the flat plate 221 opposite to the flat plate 21.
  • the piezoelectric element 222 is a disk. At this time, in plan view, the center of the piezoelectric element 222 and the center of the flat plate 221 substantially coincide with each other.
  • the piezoelectric element 222 is composed of a cylindrical piezoelectric body and a pair of driving electrodes.
  • One of the pair of drive electrodes is disposed on one main surface of the piezoelectric body, and the other of the pair of drive electrodes is disposed on the other main surface of the piezoelectric body.
  • connection member 30 is made of, for example, a cylindrical, highly rigid material.
  • the connection member 30 connects a central region of a predetermined area including the center of the flat plate 221 and a central region of the predetermined area including the center PO of the flat plate 21.
  • the flat plate 21 and the flat plate 221 which are separately formed can be connected. That is, the flat plate 21 and the flat plate 221 can be formed with high-precision dimensions and connected to each other.
  • the connection member 30 can also be formed integrally with the flat plate 21 or the flat plate 221.
  • the base member 51 is made of a material having a predetermined rigidity.
  • the base member 51 is a flat plate having a front surface and a back surface.
  • the base member 51 includes a passive vibration unit 510 and a support unit 511.
  • the thickness of the passive vibration unit 510 is thinner than the thickness of the support unit 511.
  • the passive vibration portion 510 is circular in plan view, and the support portion 511 is disposed at the outer edge of the passive vibration portion 510 in plan view.
  • the passive vibration unit 510 and the support unit 511 are integrally formed.
  • the central predetermined area of the base member 51 is thin, the thin portion becomes the passive vibration portion 510, the portion on the outer edge side of the base member 51 is thick, and the thick portion is the support portion 511.
  • one main surface of the passive vibration unit 510 and one main surface of the support unit 511 are flush with each other, and this surface is the surface of the base member 51.
  • the passive vibration part 510 and the support part 511 are separately formed, and the base member 51 may be formed by combining these.
  • a suction port 101 is formed at the center of the base member 51, that is, at the passive vibration unit 510.
  • the suction port 101 is a through hole penetrating the passive vibration unit 510 from the front surface to the back surface.
  • the diameter (cross-sectional area) of the suction port 101 is appropriately set in accordance with the specification of the pump 10.
  • the base member 51 is disposed apart from the first major surface 210 of the flat plate 21. At this time, the surface of the base member 51 faces the first major surface 210 of the flat plate 21, and the surface of the base member 51 and the first major surface 210 of the flat plate 21 are parallel. Furthermore, the base member 51 is arranged such that the suction port 101 includes the center PO of the flat plate 21 in a plan view.
  • the passive vibration unit 510 overlaps the flat plate 21 in plan view.
  • the area of the passive vibration unit 510 is substantially the same as the area of the flat plate 21. That is, the area of the vibrating area of the passive vibration unit 510 and the area of the vibrating area of the flat plate 21 are substantially the same.
  • the flat plate 21 and the passive vibration unit 510 are opposed substantially over the entire surface.
  • the shape of the passive vibration unit 510 is not limited to the area of the region in which the flat plate 21 vibrates, and may be passive so that the resonant frequency of the passive vibration unit 510 approaches the resonant frequency of the flat plate 21.
  • the diameter, thickness, and material of the vibrating portion 510 may be set. Under the present circumstances, it is more preferable to design so that a diameter may also be made to correspond.
  • the distance between the first major surface 210 of the flat plate 21 and the surface of the base member 51 (the passive vibration portion 510) is set based on the maximum amplitude of the vibration of the flat plate 21 and the passive vibration portion 510.
  • the space between the flat plate 21 and the passive vibration unit 510 is a pump chamber 110.
  • the wall 52 is an annular member having an opening at a central portion of which at least the flat plate 21 can be accommodated.
  • the wall 52 is made of a material having high rigidity.
  • the total mass of the wall 52, the wall 202, and the support portion 511 may be equal to or greater than the mass of the drive member 22 and the flat plate 21.
  • the wall 52 is disposed on the surface side of the base member 51 so that the flat plate 21 is accommodated in the opening.
  • the back surface of the wall 52 abuts on and is joined to the surface of the support portion 511 in the base member 51.
  • the wall 202 is an annular member having an opening at a central portion of which at least the flat plate 221 can be accommodated.
  • the wall 202 is made of a material having high rigidity.
  • the back surface of the wall 202 abuts on and is joined to the surface of the wall 52.
  • the height of the wall 202 is substantially the same as that of the flat plate 221.
  • a flat plate 221 is disposed in the opening of the wall 202.
  • the wall 202 and the flat plate 221 are connected by the support member 201.
  • the support member 201 is connected to the outer edge OE 22 of the flat plate 221 and the inner wall surface of the wall 202.
  • the support member 201 has a shape having a predetermined elasticity, for example, a shape having a spring property.
  • the support member 201 is formed substantially uniformly over the entire circumference of the outer edge OE 22 of the flat plate 221. By this configuration, the flat plate 221 is supported by the outer edge OE 22 on the wall 202 as a free end.
  • the support member 201 is shaped to have an opening between one support member and the other support member. This opening becomes the discharge port 102.
  • the pump 10 realizes a housing having a hollow space surrounded by the base member 51, the wall 52, the wall 202, and the flat plate 221.
  • a flat plate 21 and a pump chamber 110 formed of an opposing region of the flat plate 21 and the passive vibration portion 510 of the base member 51 are disposed.
  • the hollow space communicates with the outside through the suction port 101 at the center of the plan view (center PO of the flat plate 221), and communicates with the outside through the discharge port 102 outside the flat plate 221 in plan view. ing.
  • the pump 10 operates as follows.
  • the flat plate 221 when a drive signal is applied to the piezoelectric element 222, the flat plate 221 generates bending vibration in which the flat plate is bent in the vertical direction in a side view as shown by the dotted line in FIG.
  • the central region of the flat plate 221 moves up and down (oscillates in the direction perpendicular to the main surface (the first direction of the present invention)).
  • the vibration of the central region of the flat plate 221 propagates to the central region including the center PO of the flat plate 21 through the connection member 30. Thereby, the central region of the flat plate 21 moves up and down.
  • the flat plate 21 vibrates at the same frequency, in the same direction, and in the same phase as the flat plate 221.
  • the passive vibration unit 510 vibrates with a temporal phase difference with respect to the vibration of the flat plate 21 and the flat plate 221 by the coupling of the pump chamber 110 via an air spring or the like.
  • FIG. 3 and FIG. 4 are diagrams showing the operating principle of the pump according to the first embodiment of the present invention.
  • the flat plate 21 has the same direction and the same phase as the vertical movement of the central portion of the flat plate 221.
  • the passive vibration unit 510 vibrates with a predetermined phase delay with respect to the vertical movement of the central portion of the flat plate 221.
  • the antinode of the vibration of the flat plate 21 and the node of the vibration of the passive vibration unit 510 are opposed to each other, and the position at which the distance between the flat plate 21 and the passive vibration unit 510 is most separated is a movement from the center PO toward the outer edge Behave like you do. That is, the highest position in the pump chamber 110 moves from the center PO toward the outer edge according to the vibration of the flat plate 21 and the passive vibration unit 510.
  • the low pressure region (negative pressure region) in the pump chamber 110 moves from the center PO toward the outer edge, and accordingly, the fluid FL is also sucked from the suction port 101 and moves from the center PO to the outer edge It is transported towards.
  • the fluid FL is drawn into the central region of the pump chamber 110 from the outside through the suction port 101, and the volume is gradually increased while the volume is gradually increased.
  • ST5, ST6, ST7 and ST8 of FIG. 4 the fluid FL is further transported from the central region toward the outer edge in the pump chamber 110, discharged outward from the outer edge, and discharged from the discharge port 102 to the outside. Ru.
  • the fluid FL can be transported in one direction.
  • the outer edge OE21 of the flat plate 21 is a free end. Therefore, the planar area and volume of the pump chamber 110 can be larger than in the conventional configuration, and the flow rate and pressure can be improved.
  • the area of the passive vibration unit 510 can be made substantially the same as the area of the flat plate 21. Thereby, the area of the pump chamber 110 and hence the volume can be made larger than in the conventional configuration. Therefore, the pump 10 can secure a higher flow rate than the conventional configuration.
  • the pump 10 can enlarge the diameter of the suction port 101 provided in the center of the passive vibration part 510 by this structure. Thereby, the restriction of the flow rate of fluid by the suction port 101 is alleviated, and the flow rate is improved.
  • the flat plate 21 is supported only by the connection member 30 connected to the drive member 22. Therefore, it is possible to prevent the vibration energy from leaking from the flat plate 21 to the housing as in the conventional configuration supported by the housing. Thereby, the energy efficiency of the pump 10 is improved. Further, in the configuration in which the flat plate (first vibration unit) is supported on the housing, occurrence of unnecessary resonance, variation in characteristics, deterioration in temperature characteristics, and variation in characteristics due to the fixing method occur. Does not occur. Thus, the pump performance of the pump 10 is improved.
  • the drive member 22 is a laminate of the flat plate 221 and the piezoelectric element 222, the height of the drive member 22 can be reduced. Thereby, the height of the pump 10 can be reduced, and the small pump 10 can be realized.
  • the flat plate 21 and the passive vibration unit 510 are not limited to a circular shape, but may be a substantially circular shape or a substantially regular polygon shape including a regular polygon shape.
  • the vibrations in the flat plate 21 and the passive vibration unit 510 are transmitted symmetrically about the central axis, so that uniform fluid flow in the radial direction can be realized. That is, the difference in fluid flow depending on the orientation is suppressed.
  • the flat plate 21 and the passive vibration unit 510 are circular, it is possible to most effectively generate a uniform radial flow (direction from the center toward the outer periphery). That is, the difference in fluid flow depending on the orientation is most effectively suppressed.
  • the flat plate 221 is not limited to a circular shape, and may be a substantially circular shape or a regular polygon as a substantially regular polygon. Thereby, stable vertical movement of the center position can be realized.
  • the flat plate 221, the support member 201, and the wall 202 are integrally formed.
  • an opening is provided in one flat plate member by laser processing or the like so as to form the support member 201. Therefore, the flat plate 221, the support member 201, and the wall 202 are easily integrally formed.
  • the flat plate 221 can be easily arrange
  • the flat plate 21 may vibrate in the same direction and in the same phase as the central region of the flat plate 221, and the stiffness of the flat plate 21 may not completely match the stiffness of the flat plate 221.
  • the passive vibration unit 510 may be more flexible than the flat plate 221 and the flat plate 21, and the position of the antinode of the vibration of the flat plate 21 and the position of the node of the passive vibration unit 510 in the direction from the center to the outer edge Also, the position of the node of the vibration of the flat plate 21 and the position of the antinode of the passive vibration unit 510 may be substantially the same.
  • FIG. 5 is a side sectional view showing the structure of a pump according to a second embodiment of the present invention.
  • FIG. 6 is an exploded perspective view showing a configuration of a pump according to a second embodiment of the present invention.
  • the pump 10A includes a flat plate 21A, a drive member 22, a connection member 30, a base member 51A, a wall 52, a support member 201, and a wall 202.
  • the flat plate 21A has a first main surface 210 and a second main surface 220 facing each other.
  • the flat plate 21A is a disk having a predetermined thickness and diameter.
  • the flat plate 21A is made of a flexible material.
  • the flat plate 21A is made of, for example, a material containing a resin. By using a material containing a resin, flexibility can be easily realized.
  • a resin an aramid resin, PPS, etc. can be applied and it is preferable that it is resin with a small loss coefficient. A small loss factor is consistent with the fact that vibrations are difficult to convert into heat.
  • displacement / force 1 / spring constant is used. Furthermore, specifically, it can measure by supporting the center part of flat plate 21A and pushing (or pulling) the outer edge. In addition, the flexibility of the other flat plate (for example, flat plate 221 grade
  • the flexibility of the flat plate 21A that is, the thickness, the diameter, and the material are applied in a direction perpendicular to the first main surface 210 and the second main surface 220 of the flat plate 21A by applying a driving force from a drive member 22 described later.
  • the generated vibration is set so that the flat plate 21A becomes a bending vibration (propagation of a progressive wave along the radial direction) having a spatial phase delay from the center PO toward the outer edge (along the radial direction) It is done.
  • this bending vibration having a phase delay in space, after the distance to the base member 51A increases in the central region of the flat plate 21A, the flat plate 21A and the base member are gradually approached by gradually approaching the base member 51A.
  • the position where the distance to 51A is the largest is the vibration moving from the center of the flat plate 21A toward the outer edge. At this time, the distance and the opposing area between the flat plate 21A and the base member 51A are also taken into consideration.
  • the flat plate 21A corresponds to the "first vibrating portion" in the present invention.
  • the driving member 22 includes a flat plate 221 and a piezoelectric element 222.
  • the flat plate 221 has two main surfaces facing each other.
  • the flat plate 221 is a disk having a predetermined thickness and diameter.
  • the flat plate 221 is made of a material having high rigidity.
  • the flat plate 221 is disposed apart from the flat plate 21A on the second major surface 220 side of the flat plate 21A. At this time, the main surface of the flat plate 221 and the main surface of the flat plate 21A are parallel. Further, in plan view (as viewed from the direction orthogonal to each main surface), the center of the flat plate 221 substantially coincides with the center PO of the flat plate 21A.
  • the flat plate 221 corresponds to the "second vibrating portion" in the present invention.
  • the piezoelectric element 222 is disposed on the main surface of the flat plate 221 opposite to the flat plate 21A.
  • the piezoelectric element 222 is a disk. At this time, in plan view, the center of the piezoelectric element 222 and the center of the flat plate 221 substantially coincide with each other.
  • the piezoelectric element 222 is composed of a cylindrical piezoelectric body and a pair of driving electrodes.
  • One of the pair of drive electrodes is disposed on one main surface of the piezoelectric body, and the other of the pair of drive electrodes is disposed on the other main surface of the piezoelectric body.
  • connection member 30 is made of, for example, a cylindrical, highly rigid material.
  • the connecting member 30 connects a central region of a predetermined area including the center of the flat plate 221 and a central region of a predetermined area including the center PO of the flat plate 21A.
  • the base member 51A is made of a material having high rigidity.
  • the base member 51A is a flat plate having a front surface and a back surface. Unlike the base member 51, the base member 51A has a constant thickness. Therefore, the base member 51A is hardly affected by the vibration of the flat plate 221 of the drive member 22, and hardly vibrates.
  • a suction port 101 is formed at the center of the base member 51A.
  • the suction port 101 is a through hole penetrating the base member 51A from the front surface to the back surface.
  • the diameter (cross-sectional area) of the suction port 101 is appropriately set according to the specification of the pump 10A.
  • the base member 51A is disposed apart from the first major surface 210 of the flat plate 21A. At this time, the surface of the base member 51A faces the first major surface 210 of the flat plate 21A, and the surface of the base member 51A and the first major surface 210 of the flat plate 21A are parallel. Furthermore, the base member 51A is arranged such that the suction port 101 includes the center PO of the flat plate 21A in a plan view. It is preferable that the distance between the first major surface 210 of the flat plate 21A and the surface of the base member 51A be substantially equal to the maximum amplitude of bending vibration of the flat plate 21A.
  • a space between the flat plate 21A and the base member 51A is a pressure generating portion, that is, a pump chamber 110A.
  • the wall 52 is an annular member having an opening of a size that can accommodate at least the flat plate 21A in the central portion.
  • the wall 52 is made of a material having high rigidity.
  • the wall 52 is disposed on the surface side of the base member 51A so that the flat plate 21A is accommodated in the opening.
  • the back surface of the wall 52 abuts on and is joined to the surface of the base member 51A.
  • the wall 202 is an annular member having an opening at a central portion of which at least the flat plate 221 can be accommodated.
  • the wall 202 is made of a material having high rigidity.
  • the back surface of the wall 202 abuts on and is joined to the surface of the wall 52.
  • the height of the wall 202 is substantially the same as that of the flat plate 221.
  • a flat plate 221 is disposed in the opening of the wall 202.
  • the wall 202 and the flat plate 221 are connected by the support member 201.
  • the support member 201 is connected to the outer edge OE 22 of the flat plate 221 and the inner wall surface of the wall 202.
  • the support member 201 has a shape having a predetermined elasticity, for example, a shape having a spring property.
  • the support member 201 is formed substantially uniformly over the entire circumference of the outer edge OE 22 of the flat plate 221. By this configuration, the flat plate 221 is supported by the outer edge OE 22 on the wall 202 as a free end.
  • the support member 201 is shaped to have an opening between one support member and the other support member. This opening becomes the discharge port 102.
  • the pump 10A realizes a housing having a hollow space surrounded by the base member 51A, the wall 52, the wall 202, and the flat plate 221.
  • a flat plate 21A and a pump chamber 110A formed of an opposing region of the flat plate 21A and the base member 51A are disposed.
  • the hollow space communicates with the outside through the suction port 101 at the center of the plan view (center PO of the flat plate 221), and communicates with the outside through the discharge port 102 outside the flat plate 221 in plan view. ing.
  • the pump 10A operates as follows.
  • the flat plate 221 when a drive signal is applied to the piezoelectric element 222, the flat plate 221 generates bending vibration in which the flat plate is bent in the vertical direction in a side view as shown by the dotted line in FIG.
  • the central region of the flat plate 221 moves up and down (oscillates in the direction perpendicular to the main surface (the first direction of the present invention)).
  • the vibration of the central region of the flat plate 221 propagates through the connecting member 30 to the central region including the center PO of the flat plate 21A. Thereby, the central region of the flat plate 21A moves up and down.
  • FIGS. 7 and 8 are diagrams showing the operating principle of a pump according to a second embodiment of the present invention.
  • the flat plate 21A is the most base member according to the vertical movement of the center of the flat plate 221.
  • the position away from 51A behaves to move from the center PO toward the outer edge OE21. That is, the highest position in the pump chamber 110A moves from the center PO toward the outer edge OE21 according to the vertical movement of the center of the flat plate 221.
  • the region where the pressure in the pump chamber 110A is low moves from the center PO toward the outer edge OE21, and accordingly, the fluid FL is also sucked from the suction port 101, and from the center PO It is transported toward the outer edge OE21.
  • the distance between the center of the flat plate 221 and the base member 51A is sequentially increased by the bending vibration of the flat plate 221.
  • the distance between the central region including the center PO of the flat plate 21A connected to the flat plate 221 and the distance to the base member 51A increase.
  • the height of the central region including the suction port 101 of the pump chamber 110A is increased, and the negative pressure is increased. Therefore, in these states (ST1, ST2, ST3, ST4), the fluid FL is drawn from the outside into the central region of the pump chamber 110A via the suction port 101, and its volume gradually increases.
  • the center of the flat plate 221 gradually approaches the base member 51A from the position where the distance from the base member 51A is the longest. According to this operation, the central region including the center PO of the flat plate 21A also approaches the base member 51A.
  • a position where the distance between the flat plate 21A and the base member 51A is the greatest distance (a position where the height of the pump chamber 110A is the highest) by causing the flat plate 21A to vibrate with a spatial phase delay. Moves from the center PO toward the outer edge OE21. Therefore, in these states (ST5, ST6, ST7, ST8), the fluid FL is transported from the central region of the pump chamber 110A toward the outer edge in the pump chamber 110A. Then, as shown in ST8 of FIG. 8 to ST1 of FIG. 7, the fluid FL is discharged outward from the outer edge of the pump chamber 110A, and is discharged from the discharge port 102 to the outside.
  • the fluid FL can be transported in one direction by using the configuration of the pump 10A.
  • the outer edge OE21 of the flat plate 21A is a free end. Therefore, the planar area and volume of the pump chamber 110A are larger than those of the conventional configuration, and the flow rate and pressure can be improved.
  • the portion on the outer edge OE21 side of the flat plate 21A with respect to the center PO approaches the base member 51A at the time of suction. Thereby, backflow from the outer edge OE21 side at the time of inhalation can be suppressed.
  • the portion on the outer edge OE21 side of the center PO of the flat plate 21A can be brought into contact with the base member 51A at the time of inhalation. it can. Thereby, the backflow from the outer edge OE21 at the time of inhalation can be further suppressed.
  • the pump 10A can improve the flow rate.
  • the distance between the flat plate 21A and the flat plate 221 is preferably approximately twice or less the amplitude of the vibration of the flat plate 21A.
  • the flat plate 21A is supported only by the connection member 30 connected to the drive member 22. Therefore, in order to obtain the same displacement of the first vibrating portion in the conventional configuration in which the first vibrating portion is instructed by the housing, the displacement amount of the outer edge OE22 of the first vibrating portion may be smaller than that of the conventional configuration. Therefore, it can suppress that vibration energy leaks from the flat plate 21A to a housing
  • the drive member 22 is a laminate of the flat plate 221 and the piezoelectric element 222, the height of the drive member 22 can be reduced. As a result, the height of the pump 10A can be reduced, and the small pump 10A can be realized.
  • the flat plate 21A is not limited to a circular shape, and may be a substantially circular shape or a substantially regular polygon shape including a regular polygon shape.
  • the vibrations in the flat plate 21A are transmitted on the central axis in a symmetrical manner, so that uniform fluid flow in the radial direction can be realized. That is, the difference in fluid flow depending on the orientation is suppressed.
  • the flat plate 21A is circular, it is possible to most effectively generate a uniform flow of fluid in the radial direction (the direction from the center toward the outer periphery). That is, the difference in fluid flow depending on the orientation is most effectively suppressed.
  • the thickness of the flat plate 21A is preferably smaller than the thickness of the flat plate 221. Thereby, the flexibility having the above-mentioned properties of the flat plate 21A can be easily realized.
  • the flat plate 221 is not limited to a circular shape, and may be a substantially circular shape or a regular polygon as a substantially regular polygon. Thereby, stable vertical movement of the center position can be realized.
  • the flat plate 221, the support member 201, and the wall 202 are integrally formed.
  • an opening is provided in one flat plate member by laser processing or the like so as to form the support member 201. Therefore, the flat plate 221, the support member 201, and the wall 202 are easily integrally formed.
  • the flat plate 221 can be easily arrange
  • the bonding area between the connecting member 30 and the flat plate 21A is preferably as small as possible based on the bonding strength against vibration, etc., but the area where the flat plate 21A can realize the bending vibration having the above-mentioned spatial phase delay. If it is
  • FIG. 9 is a partial side cross-sectional view showing the structure of a pump according to a third embodiment of the present invention.
  • the pump 10B according to the third embodiment differs from the pump 10A according to the second embodiment in the shape of the flat plate 21B.
  • the other configuration of the pump 10B is the same as that of the pump 10A, and the description of the same parts will be omitted.
  • the base member 51B has the same configuration as the base member 51A.
  • the thickness at the outer edge OE21 is smaller than the thickness at the center PO. At this time, the thickness of the flat plate 21B gradually decreases from the center PO toward the outer edge OE21. That is, the flat plate 21B has a tapered shape that narrows from the center PO toward the outer edge OE21.
  • the vibration having the above-described spatial phase delay can be realized more reliably and easily.
  • the first main surface 210 of the flat plate 21B is flat.
  • the height of the pump chamber 110B becomes constant from the center PO to the outer edge OE21. That is, the height of the pump chamber 110B can be prevented from gradually increasing from the center to the outer edge. As a result, it is possible to suppress the decrease in pump performance while reliably and easily realizing the above-described vibration having the spatial phase delay by the flat plate 21B.
  • FIG. 10 is a partial side cross-sectional view showing the configuration of a pump according to a fourth embodiment of the present invention.
  • the pump 10C according to the fourth embodiment is different from the pump 10A according to the second embodiment in that a recess 60 is provided.
  • the other configuration of the pump 10C is the same as that of the pump 10A, and the description of the same parts will be omitted.
  • the base member 51C is the same as the base member 51A.
  • the recess 60 is a cylindrical or regular polygonal tubular shape which is recessed from the first major surface 210 of the flat plate 21C.
  • the opening area of the recess 60 is larger than the opening area of the suction port 101 on the side of the pump chamber 110C.
  • the recess 60 overlaps the suction port 101 in plan view of the pump 10C.
  • the center of the recess 60 is preferably coincident with the center PO of the flat plate 21C and the center of the suction port 101.
  • the inlet radius is expanded from the inner diameter of the suction port 101 to the inner diameter of the recess 60 out of 2 ⁇ ⁇ (inlet radius) ⁇ (height of the pump chamber) which is the smallest channel cross-sectional area of the pump chamber 110C. can do. Therefore, the flow rate can be increased, and the pump performance is improved.
  • the depth of the recess 60 is equal to the sum of the thickness of the flat plate 21C and the thickness of the connecting member 30, but (1) the depth to the middle position in the thickness direction of the flat plate 21C, (2 It is also possible to select a depth which corresponds to the thickness of the flat plate 21C, (3) a depth obtained by adding the thickness of the flat plate 21C and the position to an intermediate position of the connecting member 30, or the like. This depth may be appropriately set in consideration of the above-described effect of increasing the flow rate and the like.
  • FIG. 11 is a partial side cross-sectional view showing the configuration of a pump according to a fifth embodiment of the present invention.
  • the pump 10D according to the fifth embodiment differs from the pump 10C according to the fourth embodiment in that the connecting member 30 is omitted.
  • the other configuration of the pump 10D is the same as that of the pump 10C, and the description of the same portions will be omitted.
  • the base member 51D is the same as the base member 51C.
  • the flat plate 23 has a recess 230.
  • the recess 230 has a shape that is recessed from the first main surface 231 facing the base member 51D toward the second main surface 232 opposite to the first main surface 231.
  • the opening area of the recess 230 is larger than the opening area of the suction port 101 on the side of the pump chamber 110D.
  • the recess 230 overlaps the suction port 101 in plan view of the pump 10D.
  • the center of the recess 230 preferably coincides with the center PO of the flat plate 23 and the center of the suction port 101.
  • connection member 30 can be omitted, and the configuration of the pump 10D can be simplified.
  • a recessed part 230 can be implement
  • the recess 230 is tapered such that the opening area is larger than the bottom area.
  • FIG. 12 is a partial side cross-sectional view showing a configuration of a pump according to a sixth embodiment of the present invention.
  • a pump 10E according to the sixth embodiment is different from the pump 10A according to the second embodiment in that a projection 24 is provided on a flat plate 21E and a tapered opening 120 is provided in the suction port 101.
  • the other configuration of the pump 10E is the same as that of the pump 10A, and the description of the same parts will be omitted.
  • the base member 51E has the same configuration as the base member 51A.
  • the pump 10 ⁇ / b> E is provided with a protrusion 24.
  • the protrusions 24 are disposed on the first major surface 210 of the flat plate 21E.
  • the protrusion 24 has a hemispherical shape as shown in FIG. 12, and the side with the larger area is in contact with the first major surface 210.
  • the protrusions 24 are made of a material having high rigidity. The protrusion 24 overlaps the suction port 101 in plan view.
  • the opening on the side of the pump chamber 110E in the suction port 101 that is, on the side of the flat plate 21E is a tapered opening 120, and the cross-sectional area gradually increases from the back side to the opening side. .
  • the fluid entering the pump chamber 110E through the suction port 101 is smoothly transmitted into the pump chamber 110E by the tapered opening 120 and the projection 24.
  • the turbulent flow at the time of inhalation can be suppressed, and energy loss can be suppressed.
  • At least one of the projection 24 and the tapered opening 120 may be provided. However, by providing the projection 24 and the tapered opening 120, the effect of suppressing turbulent flow is improved, and energy loss can be suppressed more effectively.
  • FIG. 13 is a partial side cross-sectional view showing a configuration of a pump according to a seventh embodiment of the present invention.
  • the pump 10F according to the seventh embodiment is different from the pump 10A according to the second embodiment in that a driving member 22F is provided.
  • the other configuration of the pump 10F is the same as that of the pump 10A, and the description of the same portions will be omitted.
  • the drive member 22F is a voice coil motor (VCM).
  • VCM voice coil motor
  • the voice coil motor is used as the drive member 22F.
  • vertical vibration with a predetermined resonance frequency is added to the central region including the center PO of the flat plate 21F that is the first vibration unit.
  • Other drive members can be substituted.
  • each embodiment can also be partially combined suitably. And the effect according to a combination can be acquired by these combination.
  • the pump which concerns on each above-mentioned embodiment is applicable to a sphygmomanometer, a breast pump, a negative pressure closing therapy apparatus etc., for example.
  • the device performance of a sphygmomanometer, a breast pump, a negative pressure closing therapy apparatus etc. improves by using the pump which concerns on the above-mentioned each embodiment.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

This pump (10) is provided with a flat plate (21), a drive member (22), and a base member (51). The base member (51) has therein a suction port (101) that is connected from the rear surface to the front surface thereof. The flat plate (21), which has a planar shape, has a first primary surface (210) that overlaps the suction port (101) in a plan view, and is arranged in a position spaced a predetermined distance away from the front surface. The drive member (22) includes a flat plate (221) that is connected to the flat plate (21) on the opposite side from the base member (51), and a piezoelectric element (222) which is a drive body that drives the flat plate (221). In a region that faces the flat plate (21), the base member (51) is provided with a passive vibration section (510) that has greater flexibility than the flat plate (21) and that vibrates passively by means of the vibration of the flat plate (221).

Description

ポンプpump
　この発明は、屈曲振動によって生じる圧力変化を用いて流体を搬送するポンプに関する。 BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a pump that delivers a fluid using a pressure change caused by flexural vibration.
　従来、例えば、特許文献１に示す構造を有するポンプがある。特許文献１に示すポンプは、内部空間を有する筐体と、アクチュエータとを備える。 Conventionally, for example, there is a pump having a structure shown in Patent Document 1. The pump shown to patent document 1 is provided with the housing | casing which has interior space, and an actuator.
　アクチュエータは、平板状であり、筐体の内部空間に、筐体の１つの壁に対向して配置されている。アクチュエータが対向する壁は、中央部の厚みが薄く、受動第１振動部として機能する。受動第１振動部の中央には、吸入口が設けられている。また、アクチュエータの外縁には開口があり、吐出口となっている。 The actuator is flat and is disposed in the inner space of the housing so as to face one wall of the housing. The wall facing the actuator has a thin central portion and functions as a passive first vibrating portion. An inlet is provided at the center of the passive first vibration unit. In addition, the outer edge of the actuator has an opening, which is a discharge port.
　アクチュエータが振動すると、アクチュエータと受動第１振動部との間のポンプ室の圧力変化によって、受動第１振動部が振動する。 When the actuator vibrates, the pressure change of the pump chamber between the actuator and the passive first vibrating portion vibrates the passive first vibrating portion.
　ポンプ室が負圧になることで、ポンプ室の中央領域でのアクチュエータと受動第１振動部との距離が離間し、外縁部でのアクチュエータと受動第１振動部との距離が近接する。この状態によって、吸入は実現される。 The negative pressure in the pump chamber separates the distance between the actuator and the passive first vibrating portion in the central region of the pump chamber, and the distance between the actuator and the passive first vibrating portion in the outer edge approaches. In this state, inhalation is realized.
　吐出は、ポンプ室が正圧になることで、ポンプ室の中央領域でのアクチュエータと受動第１振動部との距離が近接し、外縁部でのアクチュエータと受動第１振動部との距離が離間する。この状態によって、吐出は実現される。 In the discharge, when the pressure in the pump chamber becomes positive, the distance between the actuator and the passive first vibration unit in the central region of the pump chamber decreases, and the distance between the actuator and the passive first vibration unit in the outer edge separates Do. Discharge is realized by this state.
特許第５１７７３３１号明細書Patent No. 5177331 Specification
　しかしながら、特許文献１に記載の構成では、受動第１振動部の外縁部が固定されていることにより、流量または圧力に、ある程度の上限があった。 However, in the configuration described in Patent Document 1, there is a certain upper limit to the flow rate or pressure because the outer edge portion of the passive first vibrating portion is fixed.
　したがって、本発明の目的は、従来構成よりも流量または圧力を向上できるポンプを提供することにある。 Accordingly, it is an object of the present invention to provide a pump that can improve flow rate or pressure over conventional configurations.
　この発明のポンプは、ベース部材、第１振動部、および、駆動部材を備える。ベース部材には、裏面から表面に繋がる吸入口が形成されている。第１振動部は、ベース部材の表面に対向する第１主面を有し、平面視において第１主面が吸入口に重なり、表面から所定距離離れた位置に配置されており、平板状である。駆動部材は、第１振動部におけるベース部材に対向しない第２主面に接続された第２振動部、および、第２振動部を駆動する駆動体を含む。ベース部材は、第１振動部に対向する領域に、第１振動部よりも可撓性が高く、第２振動部の振動によって受動的に振動する受動振動部を備える。 The pump of the present invention comprises a base member, a first vibrating portion, and a drive member. The base member is formed with an inlet port connected to the front surface from the rear surface. The first vibrating portion has a first main surface facing the surface of the base member, and the first main surface overlaps the suction port in plan view, and is disposed at a predetermined distance from the surface, is there. The driving member includes a second vibrating portion connected to a second main surface not facing the base member in the first vibrating portion, and a driving body for driving the second vibrating portion. The base member is provided with a passive vibration unit that is more flexible than the first vibration unit and that vibrates passively by the vibration of the second vibration unit in a region facing the first vibration unit.
　この構成では、第１振動部は、第２振動部の中心領域（第１振動部との接続領域）の振動と同じ方向および同じ位相で振動し、受動振動部は、第２振動部に対して位相遅れで振動する。これにより、第１振動部の振動の腹と受動第１振動部の振動の節とが重なり、流体は、中心から外縁に向けて搬送される。 In this configuration, the first vibration unit vibrates in the same direction and in the same phase as the vibration of the central region (the connection region with the first vibration unit) of the second vibration unit, and the passive vibration unit is relative to the second vibration unit. Vibrate with phase delay. Thereby, the antinode of the vibration of the first vibrating portion and the node of the vibration of the passive first vibrating portion overlap, and the fluid is transported from the center toward the outer edge.
　また、この発明のポンプでは、第１振動部は、駆動部材と同一または略同一の共振周波数を有することが好ましい。 Further, in the pump according to the present invention, it is preferable that the first vibrating portion have the same or substantially the same resonance frequency as the driving member.
　この構成では、第１振動部と第２振動部の中心領域（第１振動部との接続領域）との振動を同じ方向および同じ位相にする構成が、確実且つ容易に実現される。 In this configuration, a configuration in which the vibrations of the first vibration unit and the central region of the second vibration unit (the connection region with the first vibration unit) are in the same direction and in the same phase is realized reliably and easily.
　また、この発明のポンプでは、第１振動部と受動振動部が対向する方向に視て、第１振動部の面積と受動振動部の面積とは同じであることが好ましい。 Further, in the pump according to the present invention, it is preferable that the area of the first vibrating portion and the area of the passive vibrating portion be the same as viewed in the direction in which the first vibrating portion and the passive vibrating portion face each other.
　この構成では、ポンプ室の面積が従来構成よりも広くなる。 In this configuration, the area of the pump chamber is larger than that of the conventional configuration.
　また、この発明のポンプは、ベース部材、第１振動部、および、駆動部材を備える。ベース部材には、裏面から表面に繋がる吸入口が形成されている。第１振動部は、ベース部材の表面に対向する第１主面を有し、平面視において第１主面が吸入口に重なり、表面から所定距離離れた位置に配置されており、平板状である。駆動部材は、第１振動部におけるベース部材に対向しない第２主面に接続されている。第１振動部は、表面に直交する第１方向において駆動部材よりも可撓性が高い。 Moreover, the pump of this invention is provided with a base member, a 1st vibration part, and a drive member. The base member is formed with an inlet port connected to the front surface from the rear surface. The first vibrating portion has a first main surface facing the surface of the base member, and the first main surface overlaps the suction port in plan view, and is disposed at a predetermined distance from the surface, is there. The driving member is connected to a second main surface which does not face the base member in the first vibrating portion. The first vibrating portion is more flexible than the drive member in a first direction orthogonal to the surface.
　この構成では、第１振動部の第１主面とベース部材の表面との間の空間がポンプ室となる。そして、可撓性の高い第１振動部が駆動部材からの力によってポンプ室の高さ方向に振動することで、吸入口からポンプ室に吸入された流体は、順次、第１振動部の外縁側に搬送される。 In this configuration, the space between the first main surface of the first vibrating portion and the surface of the base member is a pump chamber. Then, the first flexible vibrating portion vibrates in the height direction of the pump chamber by the force from the driving member, whereby the fluid sucked into the pump chamber from the suction port is sequentially out of the first vibrating portion. It is transported to the edge side.
　また、この発明のポンプでは、駆動部材は、駆動体と第２振動部とを備えることが好ましい。 Further, in the pump of the present invention, the drive member preferably includes a drive body and a second vibrating portion.
　この構成では、駆動体の挙動が第２振動部によってポンプ室の高さ方向の振動に変換され、第１振動部が振動する。これにより、ポンプ室の高さ方向に所定の振幅を有する振動を第１振動部に生じさせ易い。 In this configuration, the behavior of the driving body is converted to the vibration in the height direction of the pump chamber by the second vibrating unit, and the first vibrating unit vibrates. Thus, it is easy to cause the first vibrating portion to generate a vibration having a predetermined amplitude in the height direction of the pump chamber.
　また、この発明のポンプでは、第１振動部の厚みは、第２振動部の厚みよりも小さいことが好ましい。 In the pump of the present invention, the thickness of the first vibrating portion is preferably smaller than the thickness of the second vibrating portion.
　この構成では、上述の第１振動部の振動を、容易な構成でより確実に実現できる。 In this configuration, the above-described vibration of the first vibrating unit can be realized more reliably with a simple configuration.
　また、この発明のポンプでは、第１振動部の外縁部の厚みは、第１振動部の中心の厚みよりも小さいことが好ましい。 Further, in the pump according to the present invention, the thickness of the outer edge portion of the first vibrating portion is preferably smaller than the thickness of the center of the first vibrating portion.
　この構成では、上述の第１振動部の振動をさらに生じさせ易い。 In this configuration, the above-described vibration of the first vibrating unit is further easily generated.
　また、この発明のポンプでは、第１振動部は、吸入口に対向する位置に、第１主面から凹み、平面視において吸入口に重なる凹部を備えることが好ましい。 Further, in the pump according to the present invention, preferably, the first vibrating portion is provided with a recess at a position facing the suction port, which is recessed from the first main surface and overlaps the suction port in plan view.
　この構成では、吸入口からポンプ室に繋がる流路における最小断面積が大きくなる。これにより、流路のボトルネックとなる部分の大きさが拡大し、流量が増大する。 In this configuration, the minimum cross-sectional area in the flow passage connected from the suction port to the pump chamber is increased. As a result, the size of the bottleneck portion of the flow path is increased, and the flow rate is increased.
　また、この発明のポンプでは、凹部は、開口部の面積が底の面積よりも大きいことが好ましい。 Further, in the pump of the present invention, the recess preferably has an opening area larger than that of the bottom.
　この構成では、流路のボトルネックとなる部分の大きさがさらに拡大し、流量が増大する。 In this configuration, the size of the bottleneck portion of the flow path is further enlarged, and the flow rate is increased.
　また、この発明のポンプでは、第１振動部の第１主面には、平面視において吸入口に重なる凸部を備えることが好ましい。 Further, in the pump according to the present invention, it is preferable that the first main surface of the first vibrating portion be provided with a convex portion that overlaps the suction port in plan view.
　この構成では、凸部によって、吸入口からポンプ室を経て第１振動部の外縁への流体が整流される。これにより、吸入口付近での流体の乱流が抑制される。 In this configuration, the convex portion rectifies the fluid from the suction port through the pump chamber to the outer edge of the first vibrating portion. Thereby, the turbulent flow of the fluid in the vicinity of the suction port is suppressed.
　また、この発明のポンプでは、吸入口は、第１主面側の開口面における面積が第１主面側の開口面から所定距離の位置における面積よりも大きなテーパ状であることが好ましい。 In the pump according to the present invention, preferably, the suction port has a tapered shape in which the area at the opening surface on the first main surface side is larger than the area at a predetermined distance from the opening surface on the first main surface side.
　この構成では、テーパ形状によって、吸入口からポンプ室への流体が整流される。これにより、吸入口付近での流体の乱流が抑制される。特に、上記の凸部との組合せによって、乱流がさらに抑制される。 In this configuration, the tapered shape rectifies the fluid from the suction port to the pump chamber. Thereby, the turbulent flow of the fluid in the vicinity of the suction port is suppressed. In particular, turbulence is further suppressed by the combination with the above-mentioned convex portion.
　また、この発明のポンプでは、駆動部材は、第１振動部に対して平行に配置され、第２振動部の略中心は、第１振動部の略中心に接続されていることが好ましい。 In the pump according to the present invention, preferably, the drive member is disposed in parallel to the first vibrating portion, and the approximate center of the second vibrating portion is connected to the approximate center of the first vibrating portion.
　この構成では、第２振動部の振動が効率的に第１振動部へ与えられる。 In this configuration, the vibration of the second vibrating portion is efficiently applied to the first vibrating portion.
　また、この発明のポンプでは、第１振動部と駆動部材とを接続する接続部材を備えることが好ましい。 Moreover, in the pump of this invention, it is preferable to provide the connection member which connects a 1st vibration part and a drive member.
　この構成では、第１振動部と駆動部材とを、所望の距離で離間させられる。また、それぞれ別体で形成された第１振動部と駆動部材とが、物理的に接続される。 In this configuration, the first vibrating portion and the drive member can be separated by a desired distance. Moreover, the 1st vibration part and drive member which were each formed separately were connected physically.
　また、この発明のポンプでは、接続部材は、平面視において吸入口に重なることが好ましい。 Further, in the pump of the present invention, the connection member preferably overlaps the suction port in plan view.
　この構成では、第２振動部からの振動と吸入口からの流体の動きが連動し、ポンプ効率が向上する。 In this configuration, the vibration from the second vibration unit and the movement of the fluid from the suction port are interlocked to improve the pump efficiency.
　また、この発明のポンプでは、ポンプの高さ方向において、第１振動部と駆動部材との距離は、第１振動部とベース部材との距離以上であることが好ましい。 Further, in the pump according to the present invention, in the height direction of the pump, the distance between the first vibrating portion and the driving member is preferably equal to or greater than the distance between the first vibrating portion and the base member.
　この構成では、駆動部材と第１振動部との干渉が起こり難くなり、振動の伝搬効率が向上する。 In this configuration, the interference between the driving member and the first vibrating portion is less likely to occur, and the propagation efficiency of the vibration is improved.
　また、この発明のポンプでは、第２振動部は、一方端が壁に支持された支持部材の他方端に、第２振動部の主面に略直交する方向に振動可能に支持されていることが好ましい。 Further, in the pump according to the present invention, the second vibrating portion is vibratably supported in the direction substantially orthogonal to the main surface of the second vibrating portion at the other end of the support member having one end supported by the wall. Is preferred.
　この構成では、第１振動部と第２振動部の振動方向が一致するように、第２振動部が支持される。これにより、振動の伝搬効率がさらに向上する。 In this configuration, the second vibrating portion is supported such that the vibration directions of the first vibrating portion and the second vibrating portion coincide with each other. This further improves the propagation efficiency of the vibration.
　また、この発明のポンプでは、第１振動部は、樹脂を含むことが好ましい。 Further, in the pump of the present invention, the first vibrating portion preferably contains a resin.
　この構成では、第１振動部を軽量化できる。 In this configuration, the weight of the first vibration unit can be reduced.
　また、この発明のポンプでは、第１振動部は、平面視において略正多角形であることが好ましい。 Further, in the pump of the present invention, it is preferable that the first vibrating portion is a substantially regular polygon in a plan view.
　この構成では、吸入口から外縁までの距離が全方位において略同じになる。これにより、振動が略中心軸対称に伝わるため、方位によることなく均一な径方向の流れを生成できる。 In this configuration, the distance from the suction port to the outer edge is substantially the same in all directions. As a result, the vibration is transmitted about the central axis substantially symmetrically, so that a uniform radial flow can be generated regardless of the orientation.
　また、この発明のポンプでは、第１振動部は、平面視において円形であることが好ましい。 Further, in the pump of the present invention, the first vibrating portion is preferably circular in plan view.
　この構成では、吸入口から外縁までの距離が全方位において同じになる。これにより、振動が中心軸対称に伝わるため、方位によることなく均一な径方向の流れを生成できる。 In this configuration, the distance from the inlet to the outer edge is the same in all directions. As a result, since the vibration is transmitted symmetrically about the central axis, uniform radial flow can be generated regardless of the orientation.
　また、この発明のポンプでは、駆動部材における駆動体は圧電素子であることが好ましい。 Further, in the pump of the present invention, it is preferable that the drive body in the drive member is a piezoelectric element.
　この構成では、駆動部材が低背になる。これにより、ポンプを低背化できる。 In this configuration, the drive member has a low profile. This can reduce the height of the pump.
　また、この発明のポンプでは、駆動体は、表面に直交する第１方向に、第１振動部の中心を移動させる力を印加し、第１振動部の中心領域において、ベース部材との距離が増加した後、徐々にベース部材に近づいていくことで、第１振動部とベース部材との距離が最も大きな位置が第１振動部の中心から外縁に向かって移動する振動を発生させるとよい。 In the pump according to the present invention, the driving body applies a force to move the center of the first vibrating portion in the first direction orthogonal to the surface, and the distance from the base member is in the central region of the first vibrating portion. After increasing, by gradually approaching the base member, it is preferable to generate vibration in which the position where the distance between the first vibrating portion and the base member is the largest moves from the center of the first vibrating portion toward the outer edge.
　この構成では、第１振動部とベース部材との間、すなわちポンプ室に流体が吸入され、当該流体が、第１振動部の中心領域から外縁方向に向かって第１振動部によって押し流される。これにより、ポンプ室内での流体の伝搬効率が向上する。 In this configuration, the fluid is sucked between the first vibrating portion and the base member, that is, into the pump chamber, and the fluid is swept away by the first vibrating portion from the central region of the first vibrating portion toward the outer edge. Thereby, the propagation efficiency of the fluid in the pump chamber is improved.
　また、この発明のポンプでは、第１主面と表面との距離は、第１振動部とベース部材との距離が最も大きな位置が第１振動部の中心から外縁に向かって移動する振動の振幅と略同じであることが好ましい。 Further, in the pump according to the present invention, the distance between the first main surface and the surface is an amplitude of vibration in which the position where the distance between the first vibrating portion and the base member is the largest moves from the center of the first vibrating portion toward the outer edge. It is preferable that it is substantially the same as
　この構成では、第１振動部とベース部材との間の空間からなるポンプ室の圧力が低下する吸入時に第１振動部の中心よりも外縁側の第１主面がベース部材に極近接または当接する。これにより、吸入時に第１振動部の外縁からポンプ室への流体の流入が抑制される。 In this configuration, the first main surface on the outer edge side of the center of the first vibrating portion is in close proximity to or in contact with the base member at the time of suction in which the pressure in the pump chamber consisting of the space between the first vibrating portion and the base member decreases. Contact. This suppresses the inflow of fluid from the outer edge of the first vibrating portion to the pump chamber at the time of suction.
　また、この発明のポンプでは、駆動部材の第２振動部と第１振動部との距離は、第１振動部とベース部材との距離が最も大きな位置が第１振動部の中心から外縁に向かって移動する振動の振幅の略２倍以下であることが好ましい。 In the pump according to the present invention, the distance between the second vibrating portion of the driving member and the first vibrating portion is such that the position where the distance between the first vibrating portion and the base member is the largest is from the center of the first vibrating portion toward the outer edge It is preferable that it is about twice or less of the amplitude of the vibration which moves.
　この構成では、第１振動部と第２振動部とが振動していても、これらが接触することが抑制される。すなわち、第１振動部と第２振動部との干渉が起こり難くなり、振動の伝搬効率が向上する。 In this configuration, even if the first vibrating unit and the second vibrating unit vibrate, contact between them is suppressed. That is, the interference between the first vibrating unit and the second vibrating unit is less likely to occur, and the propagation efficiency of the vibration is improved.
　この発明によれば、従来構成よりも流量または圧力を向上できる。 According to the present invention, the flow rate or pressure can be improved as compared with the conventional configuration.
本発明の第１の実施形態に係るポンプの構成を示す側面断面図である。It is a side sectional view showing the composition of the pump concerning a 1st embodiment of the present invention. 本発明の第１の実施形態に係るポンプの構成を示す分解斜視図である。It is an exploded perspective view showing composition of a pump concerning a 1st embodiment of the present invention. 本発明の第１の実施形態に係るポンプの動作原理を示す図である。It is a figure which shows the principle of operation of the pump concerning a 1st embodiment of the present invention. 本発明の第１の実施形態に係るポンプの動作原理を示す図である。It is a figure which shows the principle of operation of the pump concerning a 1st embodiment of the present invention. 本発明の第２の実施形態に係るポンプの構成を示す側面断面図である。It is side surface sectional drawing which shows the structure of the pump which concerns on the 2nd Embodiment of this invention. 本発明の第２の実施形態に係るポンプの構成を示す分解斜視図である。It is an exploded perspective view showing composition of a pump concerning a 2nd embodiment of the present invention. 本発明の第２の実施形態に係るポンプの動作原理を示す図である。It is a figure which shows the principle of operation of the pump concerning a 2nd embodiment of the present invention. 本発明の第２の実施形態に係るポンプの動作原理を示す図である。It is a figure which shows the principle of operation of the pump concerning a 2nd embodiment of the present invention. 本発明の第３の実施形態に係るポンプの構成を示す部分的な側面断面図である。It is a partial side surface sectional view showing composition of a pump concerning a 3rd embodiment of the present invention. 本発明の第４の実施形態に係るポンプの構成を示す部分的な側面断面図である。It is a partial side surface sectional view showing composition of a pump concerning a 4th embodiment of the present invention. 本発明の第５の実施形態に係るポンプの構成を示す部分的な側面断面図である。It is a partial side surface sectional view showing composition of a pump concerning a 5th embodiment of the present invention. 本発明の第６の実施形態に係るポンプの構成を示す部分的な側面断面図である。It is a partial side sectional view showing composition of a pump concerning a 6th embodiment of the present invention. 本発明の第７の実施形態に係るポンプの構成を示す部分的な側面断面図である。It is a partial side sectional view showing composition of a pump concerning a 7th embodiment of the present invention.
　本発明の第１の実施形態に係るポンプについて、図を参照して説明する。図１は、本発明の第１の実施形態に係るポンプの構成を示す側面の断面図である。図２は、本発明の第１の実施形態に係るポンプの構成を示す分解斜視図である。 A pump according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a side cross-sectional view showing a configuration of a pump according to a first embodiment of the present invention. FIG. 2 is an exploded perspective view showing the configuration of the pump according to the first embodiment of the present invention.
　図１、図２に示すように、ポンプ１０は、平板２１、駆動部材２２、接続部材３０、ベース部材５１、壁５２、支持部材２０１、および、壁２０２を備える。 As shown in FIGS. 1 and 2, the pump 10 includes a flat plate 21, a drive member 22, a connection member 30, a base member 51, a wall 52, a support member 201, and a wall 202.
　平板２１は、互いに対向する第１主面２１０と第２主面２２０とを有する。平板２１は、所定の厚みおよび径からなる円板である。平板２１は、所定の剛性を有する材料からなり、好ましくは後述の平板２２１と同じ材料からなる。 The flat plate 21 has a first major surface 210 and a second major surface 220 opposed to each other. The flat plate 21 is a disk having a predetermined thickness and diameter. The flat plate 21 is made of a material having a predetermined rigidity, and preferably made of the same material as the flat plate 221 described later.
　平板２１の厚み、径、および、材料は、後述の駆動部材２２からの駆動力に印加によって、当該駆動部材２２の中心領域、すなわち、接続部材３０によって接続されている部分と同じ方向に同じ位相で共振するように設定されている。すなわち、平板２１は、駆動部材２２の共振周波数と略同じ共振周波数を有する形状で形成されている。ここで、共振周波数が略同じとは、例えば、共振周波数差が±１０％以下であることを意味する。平板２１が、本発明の「第１振動部」に対応する。 The thickness, diameter, and material of the flat plate 21 have the same phase in the same direction as the central region of the drive member 22, that is, the portion connected by the connection member 30 by application of a drive force from the drive member 22 described later. Is set to resonate. That is, the flat plate 21 is formed in a shape having a resonance frequency substantially the same as the resonance frequency of the drive member 22. Here, that the resonance frequencies are substantially the same means that, for example, the resonance frequency difference is ± 10% or less. The flat plate 21 corresponds to the "first vibrating portion" in the present invention.
　駆動部材２２は、平板２２１と圧電素子２２２とを備える。平板２１は、互いに対向する２つの主面を有する。平板２２１は、所定の厚みおよび径からなる円板である。平板２２１は、所定の剛性を有する材料からなる。 The driving member 22 includes a flat plate 221 and a piezoelectric element 222. The flat plate 21 has two main surfaces facing each other. The flat plate 221 is a disk having a predetermined thickness and diameter. The flat plate 221 is made of a material having a predetermined rigidity.
　平板２２１は、平板２１における第２主面２２０側に、平板２１から離間して配置されている。この際、平板２２１の主面と平板２１の主面とは、平行である。また、平面視において（各主面に直交する方向から視て）、平板２２１の中心は、平板２１の中心ＰＯに略一致している。この平板２２１が本発明の「第２振動部」に対応する。 The flat plate 221 is disposed on the second main surface 220 side of the flat plate 21 so as to be separated from the flat plate 21. At this time, the main surface of the flat plate 221 and the main surface of the flat plate 21 are parallel. Further, in plan view (viewed in the direction orthogonal to each main surface), the center of the flat plate 221 substantially coincides with the center PO of the flat plate 21. The flat plate 221 corresponds to the "second vibrating portion" in the present invention.
　圧電素子２２２は、平板２２１における平板２１と反対側の主面に配置されている。圧電素子２２２は、円板である。この際、平面視において、圧電素子２２２の中心と平板２２１の中心とは略一致している。 The piezoelectric element 222 is disposed on the main surface of the flat plate 221 opposite to the flat plate 21. The piezoelectric element 222 is a disk. At this time, in plan view, the center of the piezoelectric element 222 and the center of the flat plate 221 substantially coincide with each other.
　図示を省略しているが、圧電素子２２２は、円柱形の圧電体と、一対の駆動用電極とからなる。一対の駆動用電極の一方は、圧電体の一方主面に配置され、一対の駆動用電極の他方は、圧電体の他方主面に配置されている。 Although not shown, the piezoelectric element 222 is composed of a cylindrical piezoelectric body and a pair of driving electrodes. One of the pair of drive electrodes is disposed on one main surface of the piezoelectric body, and the other of the pair of drive electrodes is disposed on the other main surface of the piezoelectric body.
　接続部材３０は、例えば、円柱状で、高い剛性を有する材料からなる。接続部材３０は、平板２２１の中心を含む所定面積の中心領域と、平板２１の中心ＰＯを含む所定面積の中心領域とを接続している。これにより、例えば、それぞれ別体で形成された平板２１と平板２２１とを、接続できる。すなわち、平板２１と平板２２１とをそれぞれ高精度な寸法で形成して、これらを接続できる。なお、接続部材３０は、平板２１または平板２２１と一体で形成することも可能である。 The connection member 30 is made of, for example, a cylindrical, highly rigid material. The connection member 30 connects a central region of a predetermined area including the center of the flat plate 221 and a central region of the predetermined area including the center PO of the flat plate 21. Thereby, for example, the flat plate 21 and the flat plate 221 which are separately formed can be connected. That is, the flat plate 21 and the flat plate 221 can be formed with high-precision dimensions and connected to each other. The connection member 30 can also be formed integrally with the flat plate 21 or the flat plate 221.
　ベース部材５１は、所定の剛性を有する材料からなる。ベース部材５１は、表面および裏面を有する平板である。ベース部材５１は、受動振動部５１０と支持部５１１とを備える。受動振動部５１０の厚みは、支持部５１１の厚みよりも薄い。 The base member 51 is made of a material having a predetermined rigidity. The base member 51 is a flat plate having a front surface and a back surface. The base member 51 includes a passive vibration unit 510 and a support unit 511. The thickness of the passive vibration unit 510 is thinner than the thickness of the support unit 511.
　受動振動部５１０は、平面視において円形であり、支持部５１１は、平面視において受動振動部５１０の外縁に配置されている。受動振動部５１０と支持部５１１とは一体形成されている。言い換えれば、ベース部材５１の中央の所定面積の箇所は薄く、この薄い部分が受動振動部５１０となり、ベース部材５１の外縁側の箇所は厚く、この厚い部分が支持部５１１となる。この際、受動振動部５１０の一主面と支持部５１１の一主面とは面一であり、この面がベース部材５１の表面となる。なお、受動振動部５１０と支持部５１１とは別体で形成され、これらを組み合わせることによって、ベース部材５１が形成されていてもよい。 The passive vibration portion 510 is circular in plan view, and the support portion 511 is disposed at the outer edge of the passive vibration portion 510 in plan view. The passive vibration unit 510 and the support unit 511 are integrally formed. In other words, the central predetermined area of the base member 51 is thin, the thin portion becomes the passive vibration portion 510, the portion on the outer edge side of the base member 51 is thick, and the thick portion is the support portion 511. At this time, one main surface of the passive vibration unit 510 and one main surface of the support unit 511 are flush with each other, and this surface is the surface of the base member 51. In addition, the passive vibration part 510 and the support part 511 are separately formed, and the base member 51 may be formed by combining these.
　ベース部材５１の中心、すなわち、受動振動部５１０には、吸入口１０１が形成されている。吸入口１０１は、受動振動部５１０を表面から裏面に亘って貫通する貫通孔からなる。吸入口１０１の径（断面積）は、ポンプ１０としての仕様に応じて適宜設定されている。 A suction port 101 is formed at the center of the base member 51, that is, at the passive vibration unit 510. The suction port 101 is a through hole penetrating the passive vibration unit 510 from the front surface to the back surface. The diameter (cross-sectional area) of the suction port 101 is appropriately set in accordance with the specification of the pump 10.
　ベース部材５１は、平板２１における第１主面２１０側に、離間して配置されている。この際、ベース部材５１の表面は、平板２１の第１主面２１０に対向しており、ベース部材５１の表面と平板２１の第１主面２１０とは、平行である。さらに、ベース部材５１は、平面視において、吸入口１０１が平板２１の中心ＰＯを含むように配置されている。 The base member 51 is disposed apart from the first major surface 210 of the flat plate 21. At this time, the surface of the base member 51 faces the first major surface 210 of the flat plate 21, and the surface of the base member 51 and the first major surface 210 of the flat plate 21 are parallel. Furthermore, the base member 51 is arranged such that the suction port 101 includes the center PO of the flat plate 21 in a plan view.
　さらに、平面視において、受動振動部５１０は、平板２１に重なっている。受動振動部５１０の面積は、平板２１の面積と略同じである。すなわち、受動振動部５１０の振動する領域の面積と、平板２１の振動する領域の面積とは、略同じである。さらに、平板２１と受動振動部５１０とは、略全面で対向している。なお、受動振動部５１０の形状は、平板２１の振動する領域の面積と略同じであることに限るものではなく、受動振動部５１０の共振周波数が平板２１の共振周波数と近接するように、受動振動部５１０の径、厚み、および、材質を設定すればよい。この際、径も一致させるように設計することがより好ましい。 Furthermore, the passive vibration unit 510 overlaps the flat plate 21 in plan view. The area of the passive vibration unit 510 is substantially the same as the area of the flat plate 21. That is, the area of the vibrating area of the passive vibration unit 510 and the area of the vibrating area of the flat plate 21 are substantially the same. Furthermore, the flat plate 21 and the passive vibration unit 510 are opposed substantially over the entire surface. The shape of the passive vibration unit 510 is not limited to the area of the region in which the flat plate 21 vibrates, and may be passive so that the resonant frequency of the passive vibration unit 510 approaches the resonant frequency of the flat plate 21. The diameter, thickness, and material of the vibrating portion 510 may be set. Under the present circumstances, it is more preferable to design so that a diameter may also be made to correspond.
　平板２１の第１主面２１０とベース部材５１（受動振動部５１０）の表面との距離は、平板２１のおよび受動振動部５１０の振動の最大振幅に基づいて設定されている。 The distance between the first major surface 210 of the flat plate 21 and the surface of the base member 51 (the passive vibration portion 510) is set based on the maximum amplitude of the vibration of the flat plate 21 and the passive vibration portion 510.
　この平板２１と受動振動部５１０との間の空間が、ポンプ室１１０となる。 The space between the flat plate 21 and the passive vibration unit 510 is a pump chamber 110.
　壁５２は、中央部分に、少なくとも平板２１が収容可能な大きさの開口を有する環状部材である。壁５２は、高い剛性を有する材料からなる。なお、壁５２、壁２０２、および支持部５１１の合計質量が、駆動部材２２および平板２１の質量以上であればよい。壁５２は、開口内に平板２１が収容されるように、ベース部材５１の表面側に配置されている。壁５２の裏面は、ベース部材５１における支持部５１１の表面に当接し、接合されている。 The wall 52 is an annular member having an opening at a central portion of which at least the flat plate 21 can be accommodated. The wall 52 is made of a material having high rigidity. The total mass of the wall 52, the wall 202, and the support portion 511 may be equal to or greater than the mass of the drive member 22 and the flat plate 21. The wall 52 is disposed on the surface side of the base member 51 so that the flat plate 21 is accommodated in the opening. The back surface of the wall 52 abuts on and is joined to the surface of the support portion 511 in the base member 51.
　壁２０２は、中央部分に、少なくとも平板２２１が収容可能な大きさの開口を有する環状部材である。壁２０２は、高い剛性を有する材料からなる。壁２０２の裏面は、壁５２の表面に当接し、接合されている。 The wall 202 is an annular member having an opening at a central portion of which at least the flat plate 221 can be accommodated. The wall 202 is made of a material having high rigidity. The back surface of the wall 202 abuts on and is joined to the surface of the wall 52.
　壁２０２の高さは、平板２２１と略同じである。壁２０２の開口内には、平板２２１が配置されている。壁２０２と平板２２１とは、支持部材２０１によって接続されている。 The height of the wall 202 is substantially the same as that of the flat plate 221. In the opening of the wall 202, a flat plate 221 is disposed. The wall 202 and the flat plate 221 are connected by the support member 201.
　支持部材２０１は、平板２２１の外縁ＯＥ２２と壁２０２の内壁面とに繋がっている。支持部材２０１は、所定の弾性を有する形状、例えばバネ性を有する形状からなる。支持部材２０１は、平板２２１の外縁ＯＥ２２の全周に亘って、略均等に形成されている。この構成によって、平板２２１は、外縁ＯＥ２２が自由端として壁２０２に支持される。 The support member 201 is connected to the outer edge OE 22 of the flat plate 221 and the inner wall surface of the wall 202. The support member 201 has a shape having a predetermined elasticity, for example, a shape having a spring property. The support member 201 is formed substantially uniformly over the entire circumference of the outer edge OE 22 of the flat plate 221. By this configuration, the flat plate 221 is supported by the outer edge OE 22 on the wall 202 as a free end.
　支持部材２０１は、１の支持部材と他の支持部材との間に開口を有する形状である。この開口が、吐出口１０２となる。 The support member 201 is shaped to have an opening between one support member and the other support member. This opening becomes the discharge port 102.
　この構成によって、ポンプ１０は、ベース部材５１、壁５２、壁２０２、および、平板２２１によって囲まれる中空空間を有する筐体を実現する。この中空空間内には、平板２１と、平板２１とベース部材５１の受動振動部５１０との対向領域からなるポンプ室１１０と、が配置される。また、中空空間は、平面視の中心（平板２２１の中心ＰＯ）において吸入口１０１を介して外部に連通しており、平面視の平板２２１よりも外側において吐出口１０２を介して外部に連通している。 With this configuration, the pump 10 realizes a housing having a hollow space surrounded by the base member 51, the wall 52, the wall 202, and the flat plate 221. In the hollow space, a flat plate 21 and a pump chamber 110 formed of an opposing region of the flat plate 21 and the passive vibration portion 510 of the base member 51 are disposed. The hollow space communicates with the outside through the suction port 101 at the center of the plan view (center PO of the flat plate 221), and communicates with the outside through the discharge port 102 outside the flat plate 221 in plan view. ing.
　この構成では、ポンプ１０は、次に示すように動作する。 In this configuration, the pump 10 operates as follows.
　まず、圧電素子２２２に駆動信号を印加すると、平板２２１は、固有の共振周波数によって、図１の点線に示すように、側面視で平板が上下方向に屈曲するベンディング振動を生じる。 First, when a drive signal is applied to the piezoelectric element 222, the flat plate 221 generates bending vibration in which the flat plate is bent in the vertical direction in a side view as shown by the dotted line in FIG.
　このベンディング振動によって、平板２２１の中心領域は上下動（主面に直交する方向（本発明の第１方向）に振動）する。平板２２１の中心領域の振動は、接続部材３０を介して、平板２１の中心ＰＯを含む中心領域に伝搬する。これにより、平板２１の中心領域は上下動する。 Due to this bending vibration, the central region of the flat plate 221 moves up and down (oscillates in the direction perpendicular to the main surface (the first direction of the present invention)). The vibration of the central region of the flat plate 221 propagates to the central region including the center PO of the flat plate 21 through the connection member 30. Thereby, the central region of the flat plate 21 moves up and down.
　ここで、上述のように、平板２１の形状、材料を設定することで、平板２１は、平板２２１と同じ周波数、同じ方向および同じ位相で振動する。 Here, as described above, by setting the shape and material of the flat plate 21, the flat plate 21 vibrates at the same frequency, in the same direction, and in the same phase as the flat plate 221.
　さらに、受動振動部５１０は、ポンプ室１１０の空気バネ等を介する結合によって、平板２１および平板２２１の振動に対して時間的な位相差をもって振動する。 Furthermore, the passive vibration unit 510 vibrates with a temporal phase difference with respect to the vibration of the flat plate 21 and the flat plate 221 by the coupling of the pump chamber 110 via an air spring or the like.
　これにより、図３、図４に示すように、平板２１の振動と受動振動部５１０の振動とは、時間的な位相差を有する。図３および図４は、本発明の第１の実施形態に係るポンプの動作原理を示す図である。 Thereby, as shown in FIG. 3 and FIG. 4, the vibration of the flat plate 21 and the vibration of the passive vibration unit 510 have a temporal phase difference. 3 and 4 are diagrams showing the operating principle of the pump according to the first embodiment of the present invention.
　具体的には、図３のＳＴ１、ＳＴ２、ＳＴ３、ＳＴ４、図４のＳＴ５、ＳＴ６、ＳＴ７、ＳＴ８の順に示すように、平板２１は、平板２２１の中心部の上下動と同じ方向および同じ位相で振動する。また、受動振動部５１０は、平板２２１の中心部の上下動に対して所定の位相遅れをもって振動する。 Specifically, as shown in the order of ST1, ST2, ST3 and ST4 in FIG. 3 and ST5, ST6, ST7 and ST8 in FIG. 4, the flat plate 21 has the same direction and the same phase as the vertical movement of the central portion of the flat plate 221. Vibrate at In addition, the passive vibration unit 510 vibrates with a predetermined phase delay with respect to the vertical movement of the central portion of the flat plate 221.
　これにより、平板２１の振動の腹と受動振動部５１０の振動の節とが対向した状態となり、平板２１と受動振動部５１０との距離が最も離間する位置は、中心ＰＯから外縁に向かって移動するように振る舞う。すなわち、ポンプ室１１０における最も高い位置は、平板２１と受動振動部５１０の振動に応じて、中心ＰＯから外縁に向かって移動する。 Thereby, the antinode of the vibration of the flat plate 21 and the node of the vibration of the passive vibration unit 510 are opposed to each other, and the position at which the distance between the flat plate 21 and the passive vibration unit 510 is most separated is a movement from the center PO toward the outer edge Behave like you do. That is, the highest position in the pump chamber 110 moves from the center PO toward the outer edge according to the vibration of the flat plate 21 and the passive vibration unit 510.
　したがって、ポンプ室１１０における圧の低くなる領域（負圧の領域）は、中心ＰＯから外縁に向かって移動し、これに応じて、流体ＦＬも吸入口１０１から吸入されて、中心ＰＯから外縁に向かって搬送される。 Therefore, the low pressure region (negative pressure region) in the pump chamber 110 moves from the center PO toward the outer edge, and accordingly, the fluid FL is also sucked from the suction port 101 and moves from the center PO to the outer edge It is transported towards.
　具体的には、図３のＳＴ１、ＳＴ２、ＳＴ３、ＳＴ４では、流体ＦＬは、吸入口１０１を介して外部からポンプ室１１０の中心領域内に引き込まれ、徐々にその体積が増加しながら外縁方向へ移動する。また、図４のＳＴ５、ＳＴ６、ＳＴ７、ＳＴ８では、流体ＦＬは、ポンプ室１１０内において中心領域から外縁に向けてさらに搬送され、外縁から外方へ吐出され、吐出口１０２から外部へ吐出される。 Specifically, in ST1, ST2, ST3 and ST4 in FIG. 3, the fluid FL is drawn into the central region of the pump chamber 110 from the outside through the suction port 101, and the volume is gradually increased while the volume is gradually increased. Move to Further, in ST5, ST6, ST7 and ST8 of FIG. 4, the fluid FL is further transported from the central region toward the outer edge in the pump chamber 110, discharged outward from the outer edge, and discharged from the discharge port 102 to the outside. Ru.
　このように、ポンプ１０の構成を用いることによって、流体ＦＬを一方向に搬送できる。この際、ポンプ１０では、平板２１は、外縁ＯＥ２１が自由端となる。したがって、ポンプ室１１０の平面面積および体積は、従来構成よりも大きくなり、流量および圧力を向上できる。 Thus, by using the configuration of the pump 10, the fluid FL can be transported in one direction. At this time, in the pump 10, the outer edge OE21 of the flat plate 21 is a free end. Therefore, the planar area and volume of the pump chamber 110 can be larger than in the conventional configuration, and the flow rate and pressure can be improved.
　また、ポンプ１０では、平板２１における中心ＰＯよりも外縁ＯＥ２１側の部分が吸入時にベース部材５１に近接する。これにより、吸入時の外縁ＯＥ２１側からの逆流を抑制できる。 Further, in the pump 10, a portion closer to the outer edge OE21 than the center PO in the flat plate 21 approaches the base member 51 at the time of suction. Thereby, backflow from the outer edge OE21 side at the time of inhalation can be suppressed.
　また、ポンプ１０では、受動振動部５１０における外縁よりも中心側の部分が吐出時に平板２１に近接する。これにより、吐出時の吸入口１０１側からの漏洩を抑制できる。 Further, in the pump 10, a portion closer to the center than the outer edge in the passive vibration unit 510 approaches the flat plate 21 at the time of discharge. Thereby, the leakage from the suction port 101 side at the time of discharge can be suppressed.
　また、ポンプ１０では、受動振動部５１０の面積を、平板２１の面積と略同じにできる。これにより、ポンプ室１１０の面積、ひいては体積を、従来構成よりも大きくできる。したがって、ポンプ１０は、従来構成よりも高い流量を確保できる。 In the pump 10, the area of the passive vibration unit 510 can be made substantially the same as the area of the flat plate 21. Thereby, the area of the pump chamber 110 and hence the volume can be made larger than in the conventional configuration. Therefore, the pump 10 can secure a higher flow rate than the conventional configuration.
　また、ポンプ１０は、この構成によって、受動振動部５１０の中央に設けられた吸入口１０１の径を大きくできる。これにより、吸入口１０１による流体の流量の制限が緩和され、流量が向上する。 Moreover, the pump 10 can enlarge the diameter of the suction port 101 provided in the center of the passive vibration part 510 by this structure. Thereby, the restriction of the flow rate of fluid by the suction port 101 is alleviated, and the flow rate is improved.
　また、平板２１は、駆動部材２２に接続する接続部材３０のみによって支持されている。したがって、筐体に支持される従来構成のように振動エネルギーが平板２１から筐体に漏洩することを防止できる。これにより、ポンプ１０のエネルギー効率は向上する。また、筐体に平板（第１振動部）が支持される構成では、不要共振の発生、特性のばらつき、温度特性の悪化、固定方法による特性の変動が生じるが、ポンプ１０ではこのような悪影響は生じない。したがって、ポンプ１０のポンプ性能は向上する。 The flat plate 21 is supported only by the connection member 30 connected to the drive member 22. Therefore, it is possible to prevent the vibration energy from leaking from the flat plate 21 to the housing as in the conventional configuration supported by the housing. Thereby, the energy efficiency of the pump 10 is improved. Further, in the configuration in which the flat plate (first vibration unit) is supported on the housing, occurrence of unnecessary resonance, variation in characteristics, deterioration in temperature characteristics, and variation in characteristics due to the fixing method occur. Does not occur. Thus, the pump performance of the pump 10 is improved.
　また、ポンプ１０の構成では、駆動部材２２が平板２２１と圧電素子２２２との積層体であるので、駆動部材２２を低背に実現できる。これにより、ポンプ１０を低背化でき、小型のポンプ１０を実現できる。 Further, in the configuration of the pump 10, since the drive member 22 is a laminate of the flat plate 221 and the piezoelectric element 222, the height of the drive member 22 can be reduced. Thereby, the height of the pump 10 can be reduced, and the small pump 10 can be realized.
　なお、平板２１および受動振動部５１０は、円形に限らず、略円形、正多角形を含む略正多角形であってもよい。これにより、平板２１および受動振動部５１０における振動が中心軸対称に伝わるため、均一な径方向の流体ＦＬの流れを実現できる。すなわち、方位による流体の流れの差が抑制される。特に、平板２１および受動振動部５１０が円形の場合、最も効果的に均一な径方向（中心から外周へ向かう方向）の流体の流れを生成できる。すなわち、方位による流体の流れの差が最も効果的に抑制される。 The flat plate 21 and the passive vibration unit 510 are not limited to a circular shape, but may be a substantially circular shape or a substantially regular polygon shape including a regular polygon shape. As a result, the vibrations in the flat plate 21 and the passive vibration unit 510 are transmitted symmetrically about the central axis, so that uniform fluid flow in the radial direction can be realized. That is, the difference in fluid flow depending on the orientation is suppressed. In particular, when the flat plate 21 and the passive vibration unit 510 are circular, it is possible to most effectively generate a uniform radial flow (direction from the center toward the outer periphery). That is, the difference in fluid flow depending on the orientation is most effectively suppressed.
　また、平板２２１も円形に限らず、略円形、正多角形を略正多角形であってもよい。これにより、安定的な中心位置の上下動を実現可能である。 Further, the flat plate 221 is not limited to a circular shape, and may be a substantially circular shape or a regular polygon as a substantially regular polygon. Thereby, stable vertical movement of the center position can be realized.
　また、平板２２１、支持部材２０１、および、壁２０２は、一体形成されていることが好ましい。例えば、１つの平板部材に、支持部材２０１を形成するように、レーザ加工等によって開口を設ける。したがって、平板２２１、支持部材２０１、および、壁２０２は、容易に一体形成される。 Moreover, it is preferable that the flat plate 221, the support member 201, and the wall 202 are integrally formed. For example, an opening is provided in one flat plate member by laser processing or the like so as to form the support member 201. Therefore, the flat plate 221, the support member 201, and the wall 202 are easily integrally formed.
　そして、この一体形成された形状によって、平板２２１を、ポンプ１０の筐体における所望位置に容易に配置できる。これにより、平板２１および受動振動部５１０を所望の位置に配置する精度を得やすい。 And by this integrally formed shape, the flat plate 221 can be easily arrange | positioned in the desired position in the housing | casing of the pump 10. FIG. Accordingly, it is easy to obtain the accuracy of arranging the flat plate 21 and the passive vibration unit 510 at desired positions.
　なお、平板２１は、平板２２１の中心領域と同じ方向および同じ位相で振動すればよく、平板２１の剛性は、平板２２１の剛性と完全一致しなくてもよい。また、受動振動部５１０は、平板２２１および平板２１よりも可撓性を有すればよく、中心から外縁に向かう方向において、平板２１の振動の腹の位置と受動振動部５１０の節の位置、および、平板２１の振動の節の位置と受動振動部５１０の腹の位置とが略同じになればよい。 The flat plate 21 may vibrate in the same direction and in the same phase as the central region of the flat plate 221, and the stiffness of the flat plate 21 may not completely match the stiffness of the flat plate 221. In addition, the passive vibration unit 510 may be more flexible than the flat plate 221 and the flat plate 21, and the position of the antinode of the vibration of the flat plate 21 and the position of the node of the passive vibration unit 510 in the direction from the center to the outer edge Also, the position of the node of the vibration of the flat plate 21 and the position of the antinode of the passive vibration unit 510 may be substantially the same.
　本発明の第２の実施形態に係るポンプについて、図を参照して説明する。図５は、本発明の第２の実施形態に係るポンプの構成を示す側面の断面図である。図６は、本発明の第２の実施形態に係るポンプの構成を示す分解斜視図である。 A pump according to a second embodiment of the present invention will be described with reference to the drawings. FIG. 5 is a side sectional view showing the structure of a pump according to a second embodiment of the present invention. FIG. 6 is an exploded perspective view showing a configuration of a pump according to a second embodiment of the present invention.
　図５、図６に示すように、ポンプ１０Ａは、平板２１Ａ、駆動部材２２、接続部材３０、ベース部材５１Ａ、壁５２、支持部材２０１、および、壁２０２を備える。 As shown in FIGS. 5 and 6, the pump 10A includes a flat plate 21A, a drive member 22, a connection member 30, a base member 51A, a wall 52, a support member 201, and a wall 202.
　平板２１Ａは、互いに対向する第１主面２１０と第２主面２２０とを有する。平板２１Ａは、所定の厚みおよび径からなる円板である。平板２１Ａは、可撓性を有する材料からなる。平板２１Ａは、例えば、樹脂を含む材料からなる。樹脂を含む材料とすることによって、可撓性を容易に実現できる。なお、樹脂としては、アラミド樹脂、ＰＰＳ等が適用でき、損失係数が小さい樹脂であることが好ましい。損失係数が小さいとは、振動が熱に変換され難いことと同意である。また、平板２１Ａの可撓性（＝ばね定数）は、例えば、プッシュプルゲージを使用することで測定することができる。式としては、変位／力＝１／ばね定数を用いる。さらに、具体的には、平板２１Ａの中心部を支持して外縁部を押す（または引っ張る）ことによって測定できる。なお、後述する他の平板（例えば、平板２２１等）の可撓性も同様の方法で測定できる。 The flat plate 21A has a first main surface 210 and a second main surface 220 facing each other. The flat plate 21A is a disk having a predetermined thickness and diameter. The flat plate 21A is made of a flexible material. The flat plate 21A is made of, for example, a material containing a resin. By using a material containing a resin, flexibility can be easily realized. In addition, as a resin, an aramid resin, PPS, etc. can be applied and it is preferable that it is resin with a small loss coefficient. A small loss factor is consistent with the fact that vibrations are difficult to convert into heat. Also, the flexibility (= spring constant) of the flat plate 21A can be measured, for example, by using a push-pull gauge. As a formula, displacement / force = 1 / spring constant is used. Furthermore, specifically, it can measure by supporting the center part of flat plate 21A and pushing (or pulling) the outer edge. In addition, the flexibility of the other flat plate (for example, flat plate 221 grade | etc.,) Mentioned later can also be measured by the same method.
　平板２１Ａの可撓性、すなわち、厚み、径、および、材料は、後述の駆動部材２２からの駆動力に印加によって、平板２１Ａの第１主面２１０および第２主面２２０に直交する方向に生じる振動が、平板２１Ａが中心ＰＯから外縁に向かって（径方向に沿って）、空間的に位相遅れを有するベンディング振動（径方向に沿った進行波的な湾曲の伝搬）となるように設定されている。言い換えれば、この空間的に位相遅れを有するベンディング振動とは、平板２１Ａの中心領域においてベース部材５１Ａとの距離が増加した後、徐々にベース部材５１Ａに近づいていくことで、平板２１Ａとベース部材５１Ａとの距離が最も大きな位置が平板２１Ａの中心から外縁に向かって移動する振動である。この際、平板２１Ａとベース部材５１Ａとの距離および対向面積も加味して設定されている。平板２１Ａが、本発明の「第１振動部」に対応する。 The flexibility of the flat plate 21A, that is, the thickness, the diameter, and the material are applied in a direction perpendicular to the first main surface 210 and the second main surface 220 of the flat plate 21A by applying a driving force from a drive member 22 described later. The generated vibration is set so that the flat plate 21A becomes a bending vibration (propagation of a progressive wave along the radial direction) having a spatial phase delay from the center PO toward the outer edge (along the radial direction) It is done. In other words, with this bending vibration having a phase delay in space, after the distance to the base member 51A increases in the central region of the flat plate 21A, the flat plate 21A and the base member are gradually approached by gradually approaching the base member 51A. The position where the distance to 51A is the largest is the vibration moving from the center of the flat plate 21A toward the outer edge. At this time, the distance and the opposing area between the flat plate 21A and the base member 51A are also taken into consideration. The flat plate 21A corresponds to the "first vibrating portion" in the present invention.
　駆動部材２２は、平板２２１と圧電素子２２２とを備える。平板２２１は、互いに対向する２つの主面を有する。平板２２１は、所定の厚みおよび径からなる円板である。平板２２１は、高い剛性を有する材料からなる。 The driving member 22 includes a flat plate 221 and a piezoelectric element 222. The flat plate 221 has two main surfaces facing each other. The flat plate 221 is a disk having a predetermined thickness and diameter. The flat plate 221 is made of a material having high rigidity.
　平板２２１は、平板２１Ａにおける第２主面２２０側に、平板２１Ａから離間して配置されている。この際、平板２２１の主面と平板２１Ａの主面とは、平行である。また、平面視において（各主面に直交する方向から視て）、平板２２１の中心は、平板２１Ａの中心ＰＯに略一致している。この平板２２１が本発明の「第２振動部」に対応する。 The flat plate 221 is disposed apart from the flat plate 21A on the second major surface 220 side of the flat plate 21A. At this time, the main surface of the flat plate 221 and the main surface of the flat plate 21A are parallel. Further, in plan view (as viewed from the direction orthogonal to each main surface), the center of the flat plate 221 substantially coincides with the center PO of the flat plate 21A. The flat plate 221 corresponds to the "second vibrating portion" in the present invention.
　圧電素子２２２は、平板２２１における平板２１Ａと反対側の主面に配置されている。圧電素子２２２は、円板である。この際、平面視において、圧電素子２２２の中心と平板２２１の中心とは略一致している。 The piezoelectric element 222 is disposed on the main surface of the flat plate 221 opposite to the flat plate 21A. The piezoelectric element 222 is a disk. At this time, in plan view, the center of the piezoelectric element 222 and the center of the flat plate 221 substantially coincide with each other.
　図示を省略しているが、圧電素子２２２は、円柱形の圧電体と、一対の駆動用電極とからなる。一対の駆動用電極の一方は、圧電体の一方主面に配置され、一対の駆動用電極の他方は、圧電体の他方主面に配置されている。 Although not shown, the piezoelectric element 222 is composed of a cylindrical piezoelectric body and a pair of driving electrodes. One of the pair of drive electrodes is disposed on one main surface of the piezoelectric body, and the other of the pair of drive electrodes is disposed on the other main surface of the piezoelectric body.
　接続部材３０は、例えば、円柱状で、高い剛性を有する材料からなる。接続部材３０は、平板２２１の中心を含む所定面積の中心領域と、平板２１Ａの中心ＰＯを含む所定面積の中心領域とを接続している。 The connection member 30 is made of, for example, a cylindrical, highly rigid material. The connecting member 30 connects a central region of a predetermined area including the center of the flat plate 221 and a central region of a predetermined area including the center PO of the flat plate 21A.
　ベース部材５１Ａは、高い剛性を有する材料からなる。ベース部材５１Ａは、表面および裏面を有する平板である。ベース部材５１Ａは、ベース部材５１と異なり、厚みが一定である。したがって、ベース部材５１Ａは、駆動部材２２の平板２２１の振動による影響を殆ど受けず、殆ど振動しない。 The base member 51A is made of a material having high rigidity. The base member 51A is a flat plate having a front surface and a back surface. Unlike the base member 51, the base member 51A has a constant thickness. Therefore, the base member 51A is hardly affected by the vibration of the flat plate 221 of the drive member 22, and hardly vibrates.
　ベース部材５１Ａの中心には、吸入口１０１が形成されている。吸入口１０１は、ベース部材５１Ａを表面から裏面に亘って貫通する貫通孔からなる。吸入口１０１の径（断面積）は、ポンプ１０Ａとしての仕様に応じて適宜設定されている。 A suction port 101 is formed at the center of the base member 51A. The suction port 101 is a through hole penetrating the base member 51A from the front surface to the back surface. The diameter (cross-sectional area) of the suction port 101 is appropriately set according to the specification of the pump 10A.
　ベース部材５１Ａは、平板２１Ａにおける第１主面２１０側に、離間して配置されている。この際、ベース部材５１Ａの表面は、平板２１Ａの第１主面２１０に対向しており、ベース部材５１Ａの表面と平板２１Ａの第１主面２１０とは、平行である。さらに、ベース部材５１Ａは、平面視において、吸入口１０１が平板２１Ａの中心ＰＯを含むように配置されている。平板２１Ａの第１主面２１０とベース部材５１Ａの表面との距離は、平板２１Ａのベンディング振動の最大振幅に略一致することが好ましい。 The base member 51A is disposed apart from the first major surface 210 of the flat plate 21A. At this time, the surface of the base member 51A faces the first major surface 210 of the flat plate 21A, and the surface of the base member 51A and the first major surface 210 of the flat plate 21A are parallel. Furthermore, the base member 51A is arranged such that the suction port 101 includes the center PO of the flat plate 21A in a plan view. It is preferable that the distance between the first major surface 210 of the flat plate 21A and the surface of the base member 51A be substantially equal to the maximum amplitude of bending vibration of the flat plate 21A.
　この平板２１Ａとベース部材５１Ａとの間の空間が、圧力発生部、すなわち、ポンプ室１１０Ａとなる。 A space between the flat plate 21A and the base member 51A is a pressure generating portion, that is, a pump chamber 110A.
　壁５２は、中央部分に、少なくとも平板２１Ａが収容可能な大きさの開口を有する環状部材である。壁５２は、高い剛性を有する材料からなる。壁５２は、開口内に平板２１Ａが収容されるように、ベース部材５１Ａの表面側に配置されている。壁５２の裏面は、ベース部材５１Ａの表面に当接し、接合されている。 The wall 52 is an annular member having an opening of a size that can accommodate at least the flat plate 21A in the central portion. The wall 52 is made of a material having high rigidity. The wall 52 is disposed on the surface side of the base member 51A so that the flat plate 21A is accommodated in the opening. The back surface of the wall 52 abuts on and is joined to the surface of the base member 51A.
　壁２０２は、中央部分に、少なくとも平板２２１が収容可能な大きさの開口を有する環状部材である。壁２０２は、高い剛性を有する材料からなる。壁２０２の裏面は、壁５２の表面に当接し、接合されている。 The wall 202 is an annular member having an opening at a central portion of which at least the flat plate 221 can be accommodated. The wall 202 is made of a material having high rigidity. The back surface of the wall 202 abuts on and is joined to the surface of the wall 52.
　壁２０２の高さは、平板２２１と略同じである。壁２０２の開口内には、平板２２１が配置されている。壁２０２と平板２２１とは、支持部材２０１によって接続されている。 The height of the wall 202 is substantially the same as that of the flat plate 221. In the opening of the wall 202, a flat plate 221 is disposed. The wall 202 and the flat plate 221 are connected by the support member 201.
　支持部材２０１は、平板２２１の外縁ＯＥ２２と壁２０２の内壁面とに繋がっている。支持部材２０１は、所定の弾性を有する形状、例えばバネ性を有する形状からなる。支持部材２０１は、平板２２１の外縁ＯＥ２２の全周に亘って、略均等に形成されている。この構成によって、平板２２１は、外縁ＯＥ２２が自由端として壁２０２に支持される。 The support member 201 is connected to the outer edge OE 22 of the flat plate 221 and the inner wall surface of the wall 202. The support member 201 has a shape having a predetermined elasticity, for example, a shape having a spring property. The support member 201 is formed substantially uniformly over the entire circumference of the outer edge OE 22 of the flat plate 221. By this configuration, the flat plate 221 is supported by the outer edge OE 22 on the wall 202 as a free end.
　支持部材２０１は、１の支持部材と他の支持部材との間に開口を有する形状である。この開口が、吐出口１０２となる。 The support member 201 is shaped to have an opening between one support member and the other support member. This opening becomes the discharge port 102.
　この構成によって、ポンプ１０Ａは、ベース部材５１Ａ、壁５２、壁２０２、および、平板２２１によって囲まれる中空空間を有する筐体を実現する。この中空空間内には、平板２１Ａと、平板２１Ａとベース部材５１Ａとの対向領域からなるポンプ室１１０Ａと、が配置される。また、中空空間は、平面視の中心（平板２２１の中心ＰＯ）において吸入口１０１を介して外部に連通しており、平面視の平板２２１よりも外側において吐出口１０２を介して外部に連通している。 With this configuration, the pump 10A realizes a housing having a hollow space surrounded by the base member 51A, the wall 52, the wall 202, and the flat plate 221. In the hollow space, a flat plate 21A and a pump chamber 110A formed of an opposing region of the flat plate 21A and the base member 51A are disposed. The hollow space communicates with the outside through the suction port 101 at the center of the plan view (center PO of the flat plate 221), and communicates with the outside through the discharge port 102 outside the flat plate 221 in plan view. ing.
　この構成では、ポンプ１０Ａは、次に示すように動作する。 In this configuration, the pump 10A operates as follows.
　まず、圧電素子２２２に駆動信号を印加すると、平板２２１は、固有の共振周波数によって、図５の点線に示すように、側面視で平板が上下方向に屈曲するベンディング振動を生じる。 First, when a drive signal is applied to the piezoelectric element 222, the flat plate 221 generates bending vibration in which the flat plate is bent in the vertical direction in a side view as shown by the dotted line in FIG.
　このベンディング振動によって、平板２２１の中心領域は上下動（主面に直交する方向（本発明の第１方向）に振動）する。平板２２１の中心領域の振動は、接続部材３０を介して、平板２１Ａの中心ＰＯを含む中心領域に伝搬する。これにより、平板２１Ａの中心領域は上下動する。 Due to this bending vibration, the central region of the flat plate 221 moves up and down (oscillates in the direction perpendicular to the main surface (the first direction of the present invention)). The vibration of the central region of the flat plate 221 propagates through the connecting member 30 to the central region including the center PO of the flat plate 21A. Thereby, the central region of the flat plate 21A moves up and down.
　ここで、上述のように、平板２１Ａの形状、材料、平板２１Ａとベース部材５１Ａとの対向面積および距離を設定することで、ポンプ室１１０の空気バネ等が平板２１の振動に作用する。これにより、図７、図８に示すように、平板２１は、空間的な位相遅れを有する振動を生じる。図７および図８は、本発明の第２の実施形態に係るポンプの動作原理を示す図である。 Here, by setting the shape and material of the flat plate 21A, the facing area and the distance between the flat plate 21A and the base member 51A as described above, the air spring or the like of the pump chamber 110 acts on the vibration of the flat plate 21. As a result, as shown in FIGS. 7 and 8, the flat plate 21 generates vibrations having a spatial phase delay. 7 and 8 are diagrams showing the operating principle of a pump according to a second embodiment of the present invention.
　具体的には、図７のＳＴ１、ＳＴ２、ＳＴ３、ＳＴ４、図８のＳＴ５、ＳＴ６、ＳＴ７、ＳＴ８の順に示すように、平板２２１の中心の上下動に応じて、平板２１Ａは、最もベース部材５１Ａから離間する位置が中心ＰＯから外縁ＯＥ２１に向かって移動するように振る舞う。すなわち、ポンプ室１１０Ａにおける最も高い位置は、平板２２１の中心の上下動に応じて、中心ＰＯから外縁ＯＥ２１に向かって移動する。 Specifically, as shown in the order of ST1, ST2, ST3 and ST4 in FIG. 7 and ST5, ST6, ST7 and ST8 in FIG. 8, the flat plate 21A is the most base member according to the vertical movement of the center of the flat plate 221. The position away from 51A behaves to move from the center PO toward the outer edge OE21. That is, the highest position in the pump chamber 110A moves from the center PO toward the outer edge OE21 according to the vertical movement of the center of the flat plate 221.
　これにより、ポンプ室１１０Ａにおける圧の低くなる領域（負圧の領域）は、中心ＰＯから外縁ＯＥ２１に向かって移動し、これに応じて、流体ＦＬも吸入口１０１から吸入されて、中心ＰＯから外縁ＯＥ２１に向かって搬送される。 Thereby, the region where the pressure in the pump chamber 110A is low (region of negative pressure) moves from the center PO toward the outer edge OE21, and accordingly, the fluid FL is also sucked from the suction port 101, and from the center PO It is transported toward the outer edge OE21.
　具体的には、図７のＳＴ１、ＳＴ２、ＳＴ３、ＳＴ４では、平板２２１のベンディング振動によって、平板２２１の中心は、ベース部材５１Ａとの距離が順次増加していく。これらの状態（ＳＴ１、ＳＴ２、ＳＴ３、ＳＴ４）では、平板２２１に接続されている平板２１Ａの中心ＰＯを含む中心領域もベース部材５１Ａとの距離が増加していく。これに伴い、ポンプ室１１０Ａの吸入口１０１を含む中心領域の高さは高くなり、負圧が増していく。このため、これらの状態（ＳＴ１、ＳＴ２、ＳＴ３、ＳＴ４）では、流体ＦＬは、吸入口１０１を介して外部からポンプ室１１０Ａの中心領域内に引き込まれ、徐々にその体積が増加する。 Specifically, in ST1, ST2, ST3, and ST4 in FIG. 7, the distance between the center of the flat plate 221 and the base member 51A is sequentially increased by the bending vibration of the flat plate 221. In these states (ST1, ST2, ST3, and ST4), the distance between the central region including the center PO of the flat plate 21A connected to the flat plate 221 and the distance to the base member 51A increase. Along with this, the height of the central region including the suction port 101 of the pump chamber 110A is increased, and the negative pressure is increased. Therefore, in these states (ST1, ST2, ST3, ST4), the fluid FL is drawn from the outside into the central region of the pump chamber 110A via the suction port 101, and its volume gradually increases.
　また、図８のＳＴ５、ＳＴ６、ＳＴ７、ＳＴ８では、平板２２１の中心がベース部材５１Ａから最も距離を有した位置から徐々にベース部材５１Ａに近づいていく。この動作にしたがって、平板２１Ａの中心ＰＯを含む中心領域もベース部材５１Ａに近づいていく。ここで、上述のように、平板２１Ａが空間的な位相遅れを有する振動を生じることによって、平板２１Ａとベース部材５１Ａとの距離が最も離れた位置（ポンプ室１１０Ａの高さが最も高い位置）は、中心ＰＯから外縁ＯＥ２１に向かって移動する。このため、これらの状態（ＳＴ５、ＳＴ６、ＳＴ７、ＳＴ８）では、ポンプ室１１０Ａ内で流体ＦＬは、ポンプ室１１０Ａの中心領域から外縁方向に搬送される。そして、図８のＳＴ８から図７のＳＴ１に示すように、流体ＦＬは、ポンプ室１１０Ａの外縁から外方へ吐出され、吐出口１０２から外部へ吐出される。 Further, in ST5, ST6, ST7 and ST8 of FIG. 8, the center of the flat plate 221 gradually approaches the base member 51A from the position where the distance from the base member 51A is the longest. According to this operation, the central region including the center PO of the flat plate 21A also approaches the base member 51A. Here, as described above, a position where the distance between the flat plate 21A and the base member 51A is the greatest distance (a position where the height of the pump chamber 110A is the highest) by causing the flat plate 21A to vibrate with a spatial phase delay. Moves from the center PO toward the outer edge OE21. Therefore, in these states (ST5, ST6, ST7, ST8), the fluid FL is transported from the central region of the pump chamber 110A toward the outer edge in the pump chamber 110A. Then, as shown in ST8 of FIG. 8 to ST1 of FIG. 7, the fluid FL is discharged outward from the outer edge of the pump chamber 110A, and is discharged from the discharge port 102 to the outside.
　このように、ポンプ１０Ａの構成を用いることによって、流体ＦＬを一方向に搬送できる。この際、ポンプ１０Ａでは、平板２１Ａは、外縁ＯＥ２１が自由端となる。したがって、ポンプ室１１０Ａの平面面積および体積は、従来構成よりも大きくなり、流量および圧力を向上できる。 Thus, the fluid FL can be transported in one direction by using the configuration of the pump 10A. At this time, in the pump 10A, the outer edge OE21 of the flat plate 21A is a free end. Therefore, the planar area and volume of the pump chamber 110A are larger than those of the conventional configuration, and the flow rate and pressure can be improved.
　さらに、ポンプ１０Ａでは、平板２１Ａにおける中心ＰＯよりも外縁ＯＥ２１側の部分が吸入時にベース部材５１Ａに近接する。これにより、吸入時の外縁ＯＥ２１側からの逆流を抑制できる。特に、平板２１Ａとベース部材５１Ａとの距離を平板２１Ａの振動の振幅に略一致させることで、平板２１Ａの中心ＰＯよりも外縁ＯＥ２１側の部分を、吸入時にベース部材５１Ａに当接させることができる。これにより、吸入時の外縁ＯＥ２１からの逆流をさらに抑制できる。 Furthermore, in the pump 10A, the portion on the outer edge OE21 side of the flat plate 21A with respect to the center PO approaches the base member 51A at the time of suction. Thereby, backflow from the outer edge OE21 side at the time of inhalation can be suppressed. In particular, by making the distance between the flat plate 21A and the base member 51A substantially equal to the amplitude of vibration of the flat plate 21A, the portion on the outer edge OE21 side of the center PO of the flat plate 21A can be brought into contact with the base member 51A at the time of inhalation. it can. Thereby, the backflow from the outer edge OE21 at the time of inhalation can be further suppressed.
　また、吐出時には、平板２１Ａの外縁ＯＥ２１とベース部材５１Ａとが、従来構成よりも離れる。これにより、ポンプ１０Ａは、流量を向上できる。 Further, at the time of discharge, the outer edge OE21 of the flat plate 21A and the base member 51A are separated from each other as compared with the conventional configuration. Thus, the pump 10A can improve the flow rate.
　また、デフォルト状態（平板２２１および平板２１Ａが振動していない状態）において、平板２１Ａと平板２２１との距離は、平板２１Ａの振動の振幅の略２倍以下であることが好ましい。この構成によって、平板２２１が単振動をし、平板２１Ａが空間的な位相遅れを有する振動をしても、平板２１Ａの振動時に平板２２１に接触することを抑制できる。すなわち、平板２１Ａと平板２２１との干渉を抑制できる。これにより、平板２１Ａの振動の妨げになることを抑制でき、平板２１Ａの破損を抑制できる。また、振動の伝搬効率を向上できる。 In the default state (the flat plate 221 and the flat plate 21A are not vibrated), the distance between the flat plate 21A and the flat plate 221 is preferably approximately twice or less the amplitude of the vibration of the flat plate 21A. With this configuration, even if the flat plate 221 performs single vibration and the flat plate 21A vibrates with a spatial phase delay, contact with the flat plate 221 when the flat plate 21A vibrates can be suppressed. That is, the interference between the flat plate 21A and the flat plate 221 can be suppressed. As a result, it is possible to suppress interference with the vibration of the flat plate 21A, and to suppress breakage of the flat plate 21A. Moreover, the propagation efficiency of vibration can be improved.
　また、平板２１Ａは、駆動部材２２に接続する接続部材３０のみによって支持されている。このため、第１振動部が筐体に指示される従来構成において同じ第１振動部の変位を得るためには、従来構成よりも第１振動部の外縁ＯＥ２２の変位量が小さくて済む。したがって、筐体に支持される従来構成のように振動エネルギーが平板２１Ａから筐体に漏洩することを抑制できる。これにより、ポンプ１０Ａのエネルギー効率は向上する。また、筐体に平板（第１振動部）が支持される構成では、不要共振の発生、特性のばらつき、温度特性の悪化、固定方法による特性の変動が生じるが、ポンプ１０Ａではこのような悪影響は生じない。したがって、ポンプ１０Ａのポンプ性能は向上する。 The flat plate 21A is supported only by the connection member 30 connected to the drive member 22. Therefore, in order to obtain the same displacement of the first vibrating portion in the conventional configuration in which the first vibrating portion is instructed by the housing, the displacement amount of the outer edge OE22 of the first vibrating portion may be smaller than that of the conventional configuration. Therefore, it can suppress that vibration energy leaks from the flat plate 21A to a housing | casing like the conventional structure supported by a housing | casing. Thereby, the energy efficiency of the pump 10A is improved. Further, in the configuration in which the flat plate (first vibration unit) is supported on the housing, occurrence of unnecessary resonance, variation in characteristics, deterioration in temperature characteristics, and variation in characteristics due to the fixing method occur. Does not occur. Therefore, the pump performance of the pump 10A is improved.
　また、ポンプ１０Ａの構成では、駆動部材２２が平板２２１と圧電素子２２２との積層体であるので、駆動部材２２を低背に実現できる。これにより、ポンプ１０Ａを低背化でき、小型のポンプ１０Ａを実現できる。 Further, in the configuration of the pump 10A, since the drive member 22 is a laminate of the flat plate 221 and the piezoelectric element 222, the height of the drive member 22 can be reduced. As a result, the height of the pump 10A can be reduced, and the small pump 10A can be realized.
　なお、平板２１Ａは、円形に限らず、略円形、正多角形を含む略正多角形であってもよい。これにより、平板２１Ａにおける振動が中心軸対称に伝わるため、均一な径方向の流体ＦＬの流れを実現できる。すなわち、方位による流体の流れの差が抑制される。特に、平板２１Ａが円形の場合、最も効果的に均一な径方向（中心から外周へ向かう方向）の流体の流れを生成できる。すなわち、方位による流体の流れの差が最も効果的に抑制される。 The flat plate 21A is not limited to a circular shape, and may be a substantially circular shape or a substantially regular polygon shape including a regular polygon shape. As a result, the vibrations in the flat plate 21A are transmitted on the central axis in a symmetrical manner, so that uniform fluid flow in the radial direction can be realized. That is, the difference in fluid flow depending on the orientation is suppressed. In particular, when the flat plate 21A is circular, it is possible to most effectively generate a uniform flow of fluid in the radial direction (the direction from the center toward the outer periphery). That is, the difference in fluid flow depending on the orientation is most effectively suppressed.
　また、平板２１Ａの厚みは、平板２２１の厚みよりも小さいことが好ましい。これにより、平板２１Ａの上述の性質を有する可撓性を容易に実現できる。 The thickness of the flat plate 21A is preferably smaller than the thickness of the flat plate 221. Thereby, the flexibility having the above-mentioned properties of the flat plate 21A can be easily realized.
　また、平板２２１も円形に限らず、略円形、正多角形を略正多角形であってもよい。これにより、安定的な中心位置の上下動を実現可能である。 Further, the flat plate 221 is not limited to a circular shape, and may be a substantially circular shape or a regular polygon as a substantially regular polygon. Thereby, stable vertical movement of the center position can be realized.
　また、平板２２１、支持部材２０１、および、壁２０２は、一体形成されていることが好ましい。例えば、１つの平板部材に、支持部材２０１を形成するように、レーザ加工等によって開口を設ける。したがって、平板２２１、支持部材２０１、および、壁２０２は、容易に一体形成される。 Moreover, it is preferable that the flat plate 221, the support member 201, and the wall 202 are integrally formed. For example, an opening is provided in one flat plate member by laser processing or the like so as to form the support member 201. Therefore, the flat plate 221, the support member 201, and the wall 202 are easily integrally formed.
　そして、この一体形成された形状によって、平板２２１を、ポンプ１０Ａの筐体における所望位置に容易に配置できる。これにより、第１振動部である平板２１Ａをベース部材５１Ａに対して所望の位置に配置する精度を得やすい。 And by this integrally formed shape, the flat plate 221 can be easily arrange | positioned in the desired position in the housing | casing of pump 10A. Accordingly, it is easy to obtain the accuracy of arranging the flat plate 21A, which is the first vibration unit, at a desired position with respect to the base member 51A.
　また、接続部材３０と平板２１Ａとの接合面積は、振動に対する接合強度等に基づいて可能な限り小さいことが好ましいが、平板２１Ａが上述の空間的な位相遅れを有するベンディング振動を実現可能な面積であればよい。 Further, the bonding area between the connecting member 30 and the flat plate 21A is preferably as small as possible based on the bonding strength against vibration, etc., but the area where the flat plate 21A can realize the bending vibration having the above-mentioned spatial phase delay. If it is
　次に、本発明の第３の実施形態に係るポンプについて、図を参照して説明する。図９は、本発明の第３の実施形態に係るポンプの構成を示す部分的な側面断面図である。 Next, a pump according to a third embodiment of the present invention will be described with reference to the drawings. FIG. 9 is a partial side cross-sectional view showing the structure of a pump according to a third embodiment of the present invention.
　第３の実施形態に係るポンプ１０Ｂは、第２の実施形態に係るポンプ１０Ａに対して、平板２１Ｂの形状において異なる。ポンプ１０Ｂの他の構成は、ポンプ１０Ａと同様であり、同様の箇所の説明は省略する。なお、ベース部材５１Ｂは、ベース部材５１Ａと同じ構成である。 The pump 10B according to the third embodiment differs from the pump 10A according to the second embodiment in the shape of the flat plate 21B. The other configuration of the pump 10B is the same as that of the pump 10A, and the description of the same parts will be omitted. The base member 51B has the same configuration as the base member 51A.
　図９に示すように、平板２１Ｂでは、外縁ＯＥ２１における厚みは、中心ＰＯにおける厚みよりも小さい。この際、平板２１Ｂの厚みは、中心ＰＯから外縁ＯＥ２１に向けて徐々に小さくなっている。すなわち、平板２１Ｂは、中心ＰＯから外縁ＯＥ２１に向かって細くなる先細り形状である。 As shown in FIG. 9, in the flat plate 21B, the thickness at the outer edge OE21 is smaller than the thickness at the center PO. At this time, the thickness of the flat plate 21B gradually decreases from the center PO toward the outer edge OE21. That is, the flat plate 21B has a tapered shape that narrows from the center PO toward the outer edge OE21.
　このような構成では、上述の空間的な位相遅れを有する振動を、より確実且つ容易に実現できる。 In such a configuration, the vibration having the above-described spatial phase delay can be realized more reliably and easily.
　さらに、ポンプ１０Ｂでは、平板２１Ｂの第１主面２１０は平坦である。これにより、平板２１Ｂが振動していない状態において、ポンプ室１１０Ｂの高さは、中心ＰＯから外縁ＯＥ２１まで一定になる。すなわち、ポンプ室１１０Ｂが中心から外縁へ徐々に高さが高くなることを防止できる。これにより、平板２１Ｂによって上述の空間的な位相遅れを有する振動を確実且つ容易に実現しながら、ポンプ性能の低下を抑制できる。 Furthermore, in the pump 10B, the first main surface 210 of the flat plate 21B is flat. Thus, in a state where the flat plate 21B is not vibrating, the height of the pump chamber 110B becomes constant from the center PO to the outer edge OE21. That is, the height of the pump chamber 110B can be prevented from gradually increasing from the center to the outer edge. As a result, it is possible to suppress the decrease in pump performance while reliably and easily realizing the above-described vibration having the spatial phase delay by the flat plate 21B.
　次に、本発明の第４の実施形態に係るポンプについて、図を参照して説明する。図１０は、本発明の第４の実施形態に係るポンプの構成を示す部分的な側面断面図である。 Next, a pump according to a fourth embodiment of the present invention will be described with reference to the drawings. FIG. 10 is a partial side cross-sectional view showing the configuration of a pump according to a fourth embodiment of the present invention.
　第４の実施形態に係るポンプ１０Ｃは、第２の実施形態に係るポンプ１０Ａに対して、凹部６０を有する点で異なる。ポンプ１０Ｃの他の構成は、ポンプ１０Ａと同様であり、同様の箇所の説明は省略する。なお、ベース部材５１Ｃは、ベース部材５１Ａと同じである。 The pump 10C according to the fourth embodiment is different from the pump 10A according to the second embodiment in that a recess 60 is provided. The other configuration of the pump 10C is the same as that of the pump 10A, and the description of the same parts will be omitted. The base member 51C is the same as the base member 51A.
　凹部６０は、平板２１Ｃの第１主面２１０から凹む円筒形状または正多角形の筒状である。凹部６０の開口面積は、吸入口１０１のポンプ室１１０Ｃ側の開口面積よりも大きい。凹部６０は、ポンプ１０Ｃの平面視において、吸入口１０１に重なっている。なお、平面視において、凹部６０の中心は、平板２１Ｃの中心ＰＯおよび吸入口１０１の中心に一致することが好ましい。 The recess 60 is a cylindrical or regular polygonal tubular shape which is recessed from the first major surface 210 of the flat plate 21C. The opening area of the recess 60 is larger than the opening area of the suction port 101 on the side of the pump chamber 110C. The recess 60 overlaps the suction port 101 in plan view of the pump 10C. In plan view, the center of the recess 60 is preferably coincident with the center PO of the flat plate 21C and the center of the suction port 101.
　このような構成では、ポンプ室１１０Ｃの最小の流路断面積である２π×（入り口半径）×（ポンプ室の高さ）の内、入り口半径を吸入口１０１の内径から凹部６０の内径に拡大することができる。このため、流量を増大させることができ、ポンプ性能は向上する。 In such a configuration, the inlet radius is expanded from the inner diameter of the suction port 101 to the inner diameter of the recess 60 out of 2π × (inlet radius) × (height of the pump chamber) which is the smallest channel cross-sectional area of the pump chamber 110C. can do. Therefore, the flow rate can be increased, and the pump performance is improved.
　なお、図１０では、凹部６０の深さは、平板２１Ｃの厚みと接続部材３０の厚みとを加算した値に等しいが、（１）平板２１Ｃの厚み方向の途中位置までの深さ、（２）平板２１Ｃの厚みに一致する深さ、（３）平板２１Ｃの厚みと接続部材３０の途中位置まで位置とを加算した深さ等を選択することも可能である。この深さは、上述の流量を増大させる効果等を加味して適宜設定すればよい。 In FIG. 10, the depth of the recess 60 is equal to the sum of the thickness of the flat plate 21C and the thickness of the connecting member 30, but (1) the depth to the middle position in the thickness direction of the flat plate 21C, (2 It is also possible to select a depth which corresponds to the thickness of the flat plate 21C, (3) a depth obtained by adding the thickness of the flat plate 21C and the position to an intermediate position of the connecting member 30, or the like. This depth may be appropriately set in consideration of the above-described effect of increasing the flow rate and the like.
　次に、本発明の第５の実施形態に係るポンプについて、図を参照して説明する。図１１は、本発明の第５の実施形態に係るポンプの構成を示す部分的な側面断面図である。 Next, a pump according to a fifth embodiment of the present invention will be described with reference to the drawings. FIG. 11 is a partial side cross-sectional view showing the configuration of a pump according to a fifth embodiment of the present invention.
　第５の実施形態に係るポンプ１０Ｄは、第４の実施形態に係るポンプ１０Ｃに対して、接続部材３０を省略した点で異なる。ポンプ１０Ｄの他の構成は、ポンプ１０Ｃと同様であり、同様の箇所の説明は省略する。なお、ベース部材５１Ｄは、ベース部材５１Ｃと同じである。 The pump 10D according to the fifth embodiment differs from the pump 10C according to the fourth embodiment in that the connecting member 30 is omitted. The other configuration of the pump 10D is the same as that of the pump 10C, and the description of the same portions will be omitted. The base member 51D is the same as the base member 51C.
　平板２３は、凹部２３０を有する。凹部２３０は、ベース部材５１Ｄに対向する第１主面２３１から、これと反対側の第２主面２３２側に凹む形状である。凹部２３０の開口面積は、吸入口１０１のポンプ室１１０Ｄ側の開口面積よりも大きい。凹部２３０は、ポンプ１０Ｄの平面視において、吸入口１０１に重なっている。なお、平面視において、凹部２３０の中心は、平板２３の中心ＰＯおよび吸入口１０１の中心に一致することが好ましい。 The flat plate 23 has a recess 230. The recess 230 has a shape that is recessed from the first main surface 231 facing the base member 51D toward the second main surface 232 opposite to the first main surface 231. The opening area of the recess 230 is larger than the opening area of the suction port 101 on the side of the pump chamber 110D. The recess 230 overlaps the suction port 101 in plan view of the pump 10D. In plan view, the center of the recess 230 preferably coincides with the center PO of the flat plate 23 and the center of the suction port 101.
　平板２３の第２主面２３２における凹部２３０によって突出する領域は、駆動部材２２の平板２２１に当接し、接合されている。このような構成では、接続部材３０を省略でき、ポンプ１０Ｄの構成を簡素化できる。なお、このような凹部２３０は、例えば、平板２３に対してプレス加工等を施すことによって実現できる。 An area of the second main surface 232 of the flat plate 23 which is projected by the recess 230 abuts on and is joined to the flat plate 221 of the drive member 22. In such a configuration, the connection member 30 can be omitted, and the configuration of the pump 10D can be simplified. In addition, such a recessed part 230 can be implement | achieved by giving press processing etc. with respect to the flat plate 23, for example.
　凹部２３０は、開口面積が底の面積よりも大きなテーパ形状である。これにより、駆動部材２２から平板２３に振動が伝搬する際に、当該振動によって生じる振動方向に沿った応力を低減できる。したがって、平板２３は駆動部材２２から剥離し難く、ポンプ１０Ｄの信頼性は向上する。 The recess 230 is tapered such that the opening area is larger than the bottom area. Thereby, when the vibration is transmitted from the driving member 22 to the flat plate 23, it is possible to reduce the stress along the vibration direction generated by the vibration. Therefore, the flat plate 23 does not easily separate from the drive member 22, and the reliability of the pump 10D is improved.
　また、凹部２３０は吸入口１０１側の面積が大きいことによって、上述のチョーク現象の抑制効果が向上する。 In addition, when the area of the concave portion 230 on the side of the suction port 101 is large, the effect of suppressing the above-described choke phenomenon is improved.
　次に、本発明の第６の実施形態に係るポンプについて、図を参照して説明する。図１２は、本発明の第６の実施形態に係るポンプの構成を示す部分的な側面断面図である。 Next, a pump according to a sixth embodiment of the present invention will be described with reference to the drawings. FIG. 12 is a partial side cross-sectional view showing a configuration of a pump according to a sixth embodiment of the present invention.
　第６の実施形態に係るポンプ１０Ｅは、第２の実施形態に係るポンプ１０Ａに対して、平板２１Ｅに突起２４を有し、吸入口１０１にテーパ開口部１２０を有する点で異なる。ポンプ１０Ｅの他の構成は、ポンプ１０Ａと同様であり、同様の箇所の説明は省略する。なお、ベース部材５１Ｅは、ベース部材５１Ａと同じ構成である。 A pump 10E according to the sixth embodiment is different from the pump 10A according to the second embodiment in that a projection 24 is provided on a flat plate 21E and a tapered opening 120 is provided in the suction port 101. The other configuration of the pump 10E is the same as that of the pump 10A, and the description of the same parts will be omitted. The base member 51E has the same configuration as the base member 51A.
　図１２に示すように、ポンプ１０Ｅでは、突起２４を備える。突起２４は、平板２１Ｅの第１主面２１０に配置されている。突起２４は、例えば図１２に示すような半球形状であり、面積の大きい側が第１主面２１０に当接している。突起２４は、高い剛性を有する材料からなる。突起２４は、平面視において吸入口１０１に重なっている。 As shown in FIG. 12, the pump 10 </ b> E is provided with a protrusion 24. The protrusions 24 are disposed on the first major surface 210 of the flat plate 21E. For example, the protrusion 24 has a hemispherical shape as shown in FIG. 12, and the side with the larger area is in contact with the first major surface 210. The protrusions 24 are made of a material having high rigidity. The protrusion 24 overlaps the suction port 101 in plan view.
　図１２に示すように、吸入口１０１におけるポンプ室１１０Ｅ側、すなわち、平板２１Ｅ側の開口は、テーパ開口部１２０であり、奥側から開口側に向けて徐々に断面積が大きくなる形状である。 As shown in FIG. 12, the opening on the side of the pump chamber 110E in the suction port 101, that is, on the side of the flat plate 21E is a tapered opening 120, and the cross-sectional area gradually increases from the back side to the opening side. .
　このような構成では、吸入口１０１を介してポンプ室１１０Ｅに入る流体は、テーパ開口部１２０および突起２４によって、ポンプ室１１０Ｅ内にスムーズに伝搬される。これによって、吸入時の乱流を抑制でき、エネルギー損失を抑制できる。 In such a configuration, the fluid entering the pump chamber 110E through the suction port 101 is smoothly transmitted into the pump chamber 110E by the tapered opening 120 and the projection 24. By this, the turbulent flow at the time of inhalation can be suppressed, and energy loss can be suppressed.
　なお、突起２４とテーパ開口部１２０とは、少なくともいずれか一方が備えられていればよい。但し、突起２４とテーパ開口部１２０とを備えることによって、乱流の抑制効果は向上し、エネルギー損失をより効果的に抑制できる。 At least one of the projection 24 and the tapered opening 120 may be provided. However, by providing the projection 24 and the tapered opening 120, the effect of suppressing turbulent flow is improved, and energy loss can be suppressed more effectively.
　次に、本発明の第７の実施形態に係るポンプについて、図を参照して説明する。図１３は、本発明の第７の実施形態に係るポンプの構成を示す部分的な側面断面図である。 Next, a pump according to a seventh embodiment of the present invention will be described with reference to the drawings. FIG. 13 is a partial side cross-sectional view showing a configuration of a pump according to a seventh embodiment of the present invention.
　第７の実施形態に係るポンプ１０Ｆは、第２の実施形態に係るポンプ１０Ａに対して、駆動部材２２Ｆを備える点で異なる。ポンプ１０Ｆの他の構成は、ポンプ１０Ａと同様であり、同様の箇所の説明は省略する。 The pump 10F according to the seventh embodiment is different from the pump 10A according to the second embodiment in that a driving member 22F is provided. The other configuration of the pump 10F is the same as that of the pump 10A, and the description of the same portions will be omitted.
　図１３に示すように、ポンプ１０Ｆでは、駆動部材２２Ｆは、ボイスコイルモータ（ＶＣＭ）である。 As shown in FIG. 13, in the pump 10F, the drive member 22F is a voice coil motor (VCM).
　このような構成であっても、上述の第２の実施形態度と同様の作用効果を得られる。なお、ポンプ１０Ｆでは、駆動部材２２Ｆとしてボイスコイルモータを用いる態様を示したが、第１振動部である平板２１Ｆの中心ＰＯを含む中心領域に、所定の共振周波数からなる上下動の振動を加えられるものであれば、他の駆動部材に置き換えることができる。 Even with such a configuration, the same function and effect as those of the above-described second embodiment can be obtained. In the pump 10F, the voice coil motor is used as the drive member 22F. However, vertical vibration with a predetermined resonance frequency is added to the central region including the center PO of the flat plate 21F that is the first vibration unit. Other drive members can be substituted.
　なお、上述の各実施形態に示した構造は、適宜、部分的に組み合わせることもできる。そして、これらの組合せによって、組合せに応じた作用効果を得ることができる。 In addition, the structure shown to the above-mentioned each embodiment can also be partially combined suitably. And the effect according to a combination can be acquired by these combination.
　また、上述の各実施形態に係るポンプは、例えば、血圧計、搾乳器、陰圧閉鎖療法装置等に利用可能である。そして、上述の各実施形態に係るポンプを用いることによって、血圧計、搾乳器、陰圧閉鎖療法装置等の装置性能は向上する。 Moreover, the pump which concerns on each above-mentioned embodiment is applicable to a sphygmomanometer, a breast pump, a negative pressure closing therapy apparatus etc., for example. And the device performance of a sphygmomanometer, a breast pump, a negative pressure closing therapy apparatus etc. improves by using the pump which concerns on the above-mentioned each embodiment.
１０、１０Ａ、１０Ｂ、１０Ｃ、１０Ｄ、１０Ｅ、１０Ｆ：ポンプ
２１、２１Ａ、２１Ｂ、２１Ｃ、２１Ｅ、２１Ｆ：平板
２２、２２Ｆ：駆動部材
２３：平板
２４：突起
３０：接続部材
４０：圧電素子
５１、５１Ａ：ベース部材
５２：壁
６０：凹部
１０１：吸入口
１０２：吐出口
１１０：ポンプ室
１２０：テーパ開口部
２０１：支持部材
２０２：壁
２１０、２３１：第１主面
２２０、２３２：第２主面
２２１：平板
２２２：圧電素子
２３０：凹部
５１０：受動振動部
５１１：支持部
ＦＬ：流体
ＯＥ２１：外縁
ＯＥ２２：外縁
ＰＯ：中心 10, 10A, 10B, 10C, 10D, 10E, 10F: pumps 21, 21A, 21B, 21C, 21E, 21F: flat plate 22, 22F: driving member 23: flat plate 24: projection 30: connecting member 40: piezoelectric element 51, 51A: base member 52: wall 60: concave portion 101: suction port 102: discharge port 110: pump chamber 120: taper opening 201: support member 202: wall 210, 231: first main surface 220, 232: second main surface 221: Flat plate 222: Piezoelectric element 230: Concave portion 510: Passive vibration portion 511: Support portion FL: Fluid OE21: Outer edge OE22: Outer edge PO: Center

Claims (23)

  1. 　裏面から表面に繋がる吸入口が形成されたベース部材と、
    　前記ベース部材の前記表面に対向する第１主面を有し、平面視において前記第１主面が前記吸入口に重なり、前記表面から所定距離離れた位置に配置された平板状の第１振動部と、
    　前記第１振動部における前記ベース部材に対向しない第２主面に接続された第２振動部、および、前記第２振動部を駆動する駆動体を含む駆動部材と、
    　を備え、
    　前記ベース部材は、前記第１振動部に対向する領域に、前記第１振動部よりも可撓性が高く、前記第２振動部の振動によって受動的に振動する受動振動部を備える、
    　ポンプ。     A base member having an inlet formed from the back side to the front side;
    A flat plate-shaped first vibration having a first main surface opposite to the surface of the base member, the first main surface overlapping the suction port in a plan view, and disposed at a predetermined distance from the surface Department,
    A driving member including a second vibrating portion connected to a second main surface not facing the base member in the first vibrating portion, and a driving body for driving the second vibrating portion;
    Equipped with
    The base member has a passive vibration unit which is higher in flexibility than the first vibration unit in a region facing the first vibration unit, and passively vibrates by the vibration of the second vibration unit.
    pump.
  2. 　前記第１振動部は、前記駆動部材と同一または略同一の共振周波数を有する、
    　請求項１に記載のポンプ。     The first vibration unit has a resonant frequency that is the same as or substantially the same as the driving member.
    The pump according to claim 1.
  3. 　前記第１振動部と前記受動振動部が対向する方向に視て、前記第１振動部の面積と前記受動振動部の面積とは同じである、
    　請求項１または請求項２に記載のポンプ。     When viewed in the direction in which the first vibrating portion and the passive vibrating portion face each other, the area of the first vibrating portion and the area of the passive vibrating portion are the same.
    The pump according to claim 1 or 2.
  4. 　裏面から表面に繋がる吸入口が形成されたベース部材と、
    　前記ベース部材の前記表面に対向する第１主面を有し、平面視において前記第１主面が前記吸入口に重なり、前記表面から所定距離離れた位置に配置された平板状の第１振動部と、
    　前記第１振動部における前記ベース部材に対向しない第２主面に接続された駆動部材と、
    　を備え、
    　前記第１振動部は、前記表面に直交する第１方向において前記駆動部材よりも可撓性が高い、
    　ポンプ。     A base member having an inlet formed from the back side to the front side;
    A flat plate-shaped first vibration having a first main surface opposite to the surface of the base member, the first main surface overlapping the suction port in a plan view, and disposed at a predetermined distance from the surface Department,
    A driving member connected to a second main surface not facing the base member in the first vibrating portion;
    Equipped with
    The first vibrating portion is more flexible than the drive member in a first direction orthogonal to the surface.
    pump.
  5. 　前記駆動部材は、駆動体と第２振動部とを備える、
    　請求項４に記載のポンプ。     The driving member includes a driving body and a second vibrating unit.
    The pump according to claim 4.
  6. 　前記第１振動部の厚みは、前記第２振動部の厚みよりも小さい、
    　請求項４または請求項５に記載のポンプ。     The thickness of the first vibrating portion is smaller than the thickness of the second vibrating portion,
    The pump according to claim 4 or 5.
  7. 　前記第１振動部の外縁部の厚みは、前記第１振動部の中心の厚みよりも小さい、
    　請求項４乃至請求項６のいずれかに記載のポンプ。     The thickness of the outer edge portion of the first vibrating portion is smaller than the thickness of the center of the first vibrating portion,
    The pump according to any one of claims 4 to 6.
  8. 　前記第１振動部は、前記吸入口に対向する位置に、前記第１主面から凹み、前記平面視において前記吸入口に重なる凹部を備える、
    　請求項１乃至請求項７のいずれかに記載のポンプ。     The first vibrating portion includes a recess that is recessed from the first main surface at a position facing the suction port and that overlaps the suction port in the plan view.
    The pump according to any one of claims 1 to 7.
  9. 　前記凹部は、開口部の面積が底の面積よりも大きい、
    　請求項８に記載のポンプ。     The recess has an opening area larger than a bottom area.
    The pump according to claim 8.
  10. 　前記第１振動部の前記第１主面には、前記平面視において前記吸入口に重なる凸部を備える、
    　請求項１乃至請求項９のいずれかに記載のポンプ。     The first main surface of the first vibrating portion includes a convex portion overlapping the suction port in the plan view.
    The pump according to any one of claims 1 to 9.
  11. 　前記吸入口は、前記第１主面側の開口面における面積が前記第１主面側の開口面から所定距離の位置における面積よりも大きなテーパ状である、
    　請求項１乃至請求項１０のいずれかに記載のポンプ。     The suction port is tapered such that the area of the opening on the first main surface side is larger than the area at a predetermined distance from the opening on the first main surface side.
    The pump according to any one of claims 1 to 10.
  12. 　前記駆動部材は、前記第１振動部に対して平行に配置され、
    　前記第２振動部の略中心は、前記第１振動部の略中心に接続されている、
    　請求項１または請求項５に記載のポンプ。     The driving member is disposed in parallel to the first vibration unit.
    The approximate center of the second vibrating portion is connected to the approximate center of the first vibrating portion.
    The pump according to claim 1 or 5.
  13. 　前記第１振動部と前記駆動部材とを接続する接続部材を備える、
    　請求項１乃至請求項１２のいずれかに記載のポンプ。     A connecting member for connecting the first vibrating portion and the driving member;
    The pump according to any one of claims 1 to 12.
  14. 　前記接続部材は、前記平面視において前記吸入口に重なる、
    　請求項１３に記載のポンプ。     The connection member overlaps the suction port in the plan view.
    14. A pump according to claim 13.
  15. 　ポンプの高さ方向において、前記第１振動部と前記駆動部材との距離は、前記第１振動部と前記ベース部材との距離以上である、
    　請求項１乃至請求項１４のいずれかに記載のポンプ。     In the height direction of the pump, the distance between the first vibrating portion and the drive member is equal to or greater than the distance between the first vibrating portion and the base member.
    The pump according to any one of claims 1 to 14.
  16. 　前記第２振動部は、一方端が壁に支持された支持部材の他方端に、前記第２振動部の主面に略直交する方向に振動可能に支持されている、
    　請求項１または請求項５に記載のポンプ。     The second vibrating portion is vibratably supported in the direction substantially orthogonal to the main surface of the second vibrating portion at the other end of the support member of which one end is supported by the wall.
    The pump according to claim 1 or 5.
  17. 　前記第１振動部は、樹脂を含む、
    　請求項１乃至請求項１６のいずれかに記載のポンプ。     The first vibration unit includes a resin,
    17. A pump according to any of the preceding claims.
  18. 　前記第１振動部は、前記平面視において略正多角形である、
    　請求項１乃至請求項１７のいずれかに記載のポンプ。     The first vibrating portion is a substantially regular polygon in the plan view.
    A pump according to any one of the preceding claims.
  19. 　前記第１振動部は、前記平面視において円形である、
    　請求項１８に記載のポンプ。     The first vibrating portion is circular in the plan view.
    The pump of claim 18.
  20. 　前記駆動部材における駆動体は圧電素子である、
    　請求項１乃至請求項１９のいずれかに記載のポンプ。     The driving body in the driving member is a piezoelectric element.
    20. A pump according to any of the preceding claims.
  21. 　前記駆動体は、前記表面に直交する第１方向に、前記第１振動部の中心を移動させる力を印加し、前記第１振動部の中心領域において、前記ベース部材との距離が増加した後、徐々に前記ベース部材に近づいていくことで、前記第１振動部と前記ベース部材との距離が最も大きな位置が前記第１振動部の中心から外縁に向かって移動する振動を発生させる、
    　請求項２０に記載のポンプ。     The driving body applies a force to move the center of the first vibrating portion in a first direction orthogonal to the surface, and after the distance to the base member increases in the central region of the first vibrating portion By gradually approaching the base member, the position where the distance between the first vibrating portion and the base member is the largest generates vibration in which the center of the first vibrating portion moves from the center to the outer edge.
    21. A pump according to claim 20.
  22. 　前記第１主面と前記表面との距離は、
    　前記第１振動部と前記ベース部材との距離が最も大きな位置が前記第１振動部の中心から外縁に向かって移動する振動の振幅と略同じである、
    　請求項２１に記載のポンプ。     The distance between the first main surface and the surface is
    The position where the distance between the first vibrating portion and the base member is the largest is substantially the same as the amplitude of the vibration moving from the center of the first vibrating portion toward the outer edge.
    22. A pump according to claim 21.
  23. 　前記駆動部材の第２振動部と前記第１振動部との距離は、
    　前記第１振動部と前記ベース部材との距離が最も大きな位置が前記第１振動部の中心から外縁に向かって移動する振動の振幅の略２倍以下である、
    　請求項２１または請求項２２に記載のポンプ。     The distance between the second vibrating portion of the driving member and the first vibrating portion is
    The position where the distance between the first vibrating portion and the base member is the largest is approximately twice or less the amplitude of the vibration moving from the center of the first vibrating portion toward the outer edge,
    A pump according to claim 21 or claim 22.
PCT/JP2018/044817 2017-12-08 2018-12-06 Pump WO2019111982A1 (en)

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Publication number Priority date Publication date Assignee Title
WO2022165200A1 (en) * 2021-01-28 2022-08-04 Lansinoh Laboratories, Inc. Voice coil vacuum motor with vibration and/or release

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WO2009148005A1 (en) * 2008-06-05 2009-12-10 株式会社村田製作所 Piezoelectric microblower
JP2015092082A (en) * 2011-04-11 2015-05-14 株式会社村田製作所 Fluid control device and pump connection method
WO2015133283A1 (en) * 2014-03-07 2015-09-11 株式会社村田製作所 Blower

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Publication number Priority date Publication date Assignee Title
WO2009148005A1 (en) * 2008-06-05 2009-12-10 株式会社村田製作所 Piezoelectric microblower
JP2015092082A (en) * 2011-04-11 2015-05-14 株式会社村田製作所 Fluid control device and pump connection method
WO2015133283A1 (en) * 2014-03-07 2015-09-11 株式会社村田製作所 Blower

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Publication number Priority date Publication date Assignee Title
WO2022165200A1 (en) * 2021-01-28 2022-08-04 Lansinoh Laboratories, Inc. Voice coil vacuum motor with vibration and/or release

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