WO2019083009A1 - Inspection system and inspection method - Google Patents

Inspection system and inspection method

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Publication number
WO2019083009A1
WO2019083009A1 PCT/JP2018/039845 JP2018039845W WO2019083009A1 WO 2019083009 A1 WO2019083009 A1 WO 2019083009A1 JP 2018039845 W JP2018039845 W JP 2018039845W WO 2019083009 A1 WO2019083009 A1 WO 2019083009A1
Authority
WO
WIPO (PCT)
Prior art keywords
inspection
central axis
angle
degrees
head
Prior art date
Application number
PCT/JP2018/039845
Other languages
French (fr)
Japanese (ja)
Inventor
信悟 佐藤
大知 長谷川
研弥 山浦
Original Assignee
長野オートメーション株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 長野オートメーション株式会社 filed Critical 長野オートメーション株式会社
Priority to JP2019550316A priority Critical patent/JPWO2019083009A1/en
Publication of WO2019083009A1 publication Critical patent/WO2019083009A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G02B23/26—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes using light guides

Definitions

  • the present invention relates to an inspection system and method for inspecting a surface by irradiating a laser beam for inspection from an inspection head to an object to be inspected.
  • the inner peripheral surface can also be inspected easily, and when the surface of the object to be inspected is flat, it can be moved by one movement.
  • a surface inspection apparatus is disclosed that can widen the area that can be inspected.
  • the armature shaft of the electric motor is formed into a hollow cylinder, and a fiber holding cylinder for binding and holding the light emitting fiber and the light receiving fiber is loosely inserted therein, and the rotating cylinder is integrated with the tip of the armature shaft.
  • an optical path changing means for changing the optical path, for example, at right angles to the inspection light and the reflected light with respect to the axial center of the fiber holding cylinder, condensing the inspection light onto the inspection object, and the reflected light And focusing means for focusing the light onto the light receiving fiber.
  • the inspection device which inspects the surface by irradiating the inspection light in the direction orthogonal to the axis from the rotating cylinder.
  • the inspection device which inspects the surface by irradiating the inspection light in the direction orthogonal to the axis from the rotating cylinder.
  • means for changing the angle of the light path of the inspection light for example, a reflecting mirror at the tip of the rotating cylinder. Therefore, since the installation space of the reflecting mirror is required, when inspecting the bottomed cylindrical inner surface, the portion close to the bottom surface of the cylindrical inner surface, and further, the boundary between the cylindrical inner surface and the bottom surface should be inspected. Was impossible.
  • One aspect of the present invention is a hollow inspection head extending in a rod shape along a central axis, the inspection head being rotated about the central axis, and a laser for inspection along the central axis through the inside of the inspection head. It has an optical system for supplying light and receiving reflected light from the inspection surface (surface) of the inspection object returned along the central axis, and an optical element disposed near or at the tip of the inspection head It is an inspection system.
  • the optical element is an optical element that emits a laser beam for inspection toward the inspection object and guides the reflected light in the central axis direction, and for inspection in a state where the normal is inclined at an angle ⁇ with respect to the central axis Of the laser beam can be emitted, and the angle ⁇ satisfies the following condition (1). 46 degrees ⁇ ⁇ ⁇ 55 degrees (1)
  • the inspection system includes a hollow inspection head rod-shaped along a central axis, a rotation unit that rotates the inspection head around the central axis, and laser light for inspection along the central axis through the inspection head.
  • the optical device includes an optical system for supplying light and receiving reflected light from the inspection surface of the inspection object returned along the central axis, and an optical element disposed in the vicinity of the tip of the inspection head or at the tip.
  • the laser light for inspection may be emitted toward the surface to be inspected at an angle ⁇ with respect to the central axis and the reflected light may be guided in the central axial direction.
  • the angle ⁇ satisfies the following condition (2). 92 degrees ⁇ ⁇ ⁇ 110 degrees (2)
  • the inventor of the present application emits laser light for inspection in a non-perpendicular direction by the optical element and irradiates the surface of the inspection object non-perpendicularly from the surface of the inspection object. It has been found that although the intensity of the reflected light decreases, it can be captured with sufficient intensity to analyze the surface condition. Therefore, the inspection system can detect the state of the non-inspection surface by emitting the laser light for inspection toward the inspection surface parallel to the central axis at right angles by the optical element.
  • the intensity of the reflected light may decrease to about 1/10 compared to the case where the angle ⁇ is 45 degrees, that is, the angle ⁇ is 90 degrees, but analysis of the surface state It is possible to obtain reflected light that contains the minimum necessary information.
  • the upper limit of the condition (1) may be 53.5 degrees or 52 degrees because the intensity of the reflected light can be secured.
  • the upper limit of the condition (2) may be 107 degrees or 104 degrees.
  • the lower limit of the condition (1) may be 48 degrees or 50 degrees because the boundary of the inspectable side can be brought close to the bottom surface.
  • the lower limit of the condition (2) may be 96 degrees or 100 degrees.
  • the inspection system may include a unit that varies the angle ⁇ , ie, the angle ⁇ . It may have an opening provided from near the tip of the inspection head to the tip. Furthermore, the inspection system may comprise a rotation unit which rotates the inspection head around a central axis. The inspection system may further include a moving unit that moves the inspection head relative to the inspection object including the hollow portion or recess into which the inspection head is inserted, along the central axis.
  • One of the other aspects of the present invention is a hollow inspection head extending in a rod-like manner along a central axis, the inspection system comprising an inspection head rotated about the central axis. It is a method which has inspecting the state of a to-be-inspected surface.
  • the inspection system supplies an inspection laser beam along the central axis through the inspection head, and an optical system that receives reflected light from the surface to be inspected returned along the central axis, and the vicinity of the tip of the inspection head
  • the optical device further includes an optical element disposed at the tip, and emitting an inspection laser beam toward the inspection object and guiding the reflected light in the central axis direction.
  • the inspection includes emitting a laser beam for inspection toward the surface to be inspected in a state in which a normal is inclined at an angle ⁇ with respect to the central axis with respect to the reflective surface of the optical element. Satisfies the above condition (1).
  • the emitting may include changing the angle ⁇ .
  • One of the still another different aspect of the present invention is a method comprising inspecting a state of an inspection surface of an inspection object using an inspection system including an inspection head, the inspection comprising:
  • the method includes emitting laser light for inspection toward the surface to be inspected at an angle ⁇ with respect to the central axis.
  • the angle ⁇ satisfies the above condition (2).
  • emitting may include emitting a laser beam for inspection toward a surface to be inspected which is parallel to the central axis.
  • emitting includes emitting laser light for inspection toward a surface to be inspected (inner surface, surface) parallel to the central axis of the hollow portion or recess extending along the central axis of the object to be inspected. May be.
  • FIG. 5 is a cross-sectional view showing the configuration of the tip of the inspection head shown in FIG. 4 in a further enlarged manner.
  • 6 is a flowchart showing an example of an inspection method using the inspection apparatus.
  • FIG. 1 shows the appearance of the inspection apparatus (inspection system) 1
  • FIG. 2 shows the schematic configuration of the inspection apparatus 1 by using a cross section.
  • the inspection apparatus (surface inspection apparatus) 1 is suitable for inspecting the shape or state of the inner surface (surface, inspection surface) 4 of the hollow portion 3 such as a hole or a recess provided in the inspection object 2.
  • One example of the hollow portion 3 is a bottomed hollow portion 3 having a cylindrical side surface 4a and a bottom surface 4b.
  • the inspection apparatus 1 includes a hollow inspection head (inspection probe) 10 extending in a rod-like shape along the central axis 11, a rotation unit 20 for rotating the inspection head 10 around the central axis 11, and a center through the inspection head 10.
  • An optical system 30 that supplies laser light for inspection along the axis 11 and receives reflected light from the surface (surface to be inspected) 4 of the inspection object 2 returned along the central axis 11, and an inspection head 10
  • An optical element 50 disposed at or near the tip of the lens, a moving unit 25 relatively moving at least one of the inspection head 10 and the inspection object 2 along the central axis 11, a rotation unit 20, an optical system 30, and And a housing 5 in which the moving unit 25 is incorporated.
  • the inspection apparatus 1 includes a moving unit 25 of the inspection head 10 housed in the housing 5 as a moving unit 25 for moving the inspection head (inspection probe) 10 and the inspection object 2 relative to each other.
  • the moving unit 25 includes a carriage 28 on which the inspection head 10, the rotating unit 20 and the optical system 30 are mounted, and a combination of a ball screw 26 and a moving motor 27 for moving the carriage 28 back and forth (left and right in FIG. 2).
  • the inspection head 10 includes a fixing portion 19 serving as a base end and a rotating portion 18 mounted so as to rotate with respect to the fixing portion 19, and the fixing portion 19 is mounted on the carriage 28 via a holder 29.
  • the configuration of the moving unit 25 is an example, and may be a slider, a moving table, or the like.
  • the moving unit 25 moves the inspection head 10 to a position P 1 projecting forward from the housing 5 and a position P 2 at which the inspection head 10 retracts into the housing 5.
  • the inspection object 2 may be moved using a robot or the like instead of the inspection head 10 or together with the inspection head 10.
  • the optical system 30 includes a semiconductor laser (laser diode, LD) 31 that generates a laser beam for inspection, a light receiving element (for example, a photodiode, CCD, CMOS, etc.) 32 that receives reflected light, and a drive of the semiconductor laser 31. And a control unit 33 including a circuit, a circuit for processing a signal received by the light receiving element 32, and the like.
  • a signal received by the optical system 30 is sent to a computer (personal computer) (not shown) via the control unit 33, and is further data processed and used for analysis of the surface 4 of the inspection object 2.
  • the optical system 30 further includes an optical fiber 35 inserted inside the inspection probe 10, and a light control lens 36 for controlling a light flux input to and output from the optical fiber 35. These are further described below.
  • An example of the rotation unit 20 is a motor 21 mounted on a carriage 28.
  • the pulley 22 driven by the motor 21 is connected to the rotating portion 18 of the inspection head 10 by the drive belt 23, and the motor 21 rotates the rotating portion 18 of the inspection head 10 around the central axis 11 via the drive belt 23. It rotates at high speed (with the central axis 11 as the center of rotation).
  • the inspection head (inspection probe) 10 is extracted and shown in FIG.
  • the schematic configuration of the probe 10 is shown in FIG. 4 using a cross section.
  • the inspection head 10 is a hollow cylindrical body generally extending along the rotation axis 11 and coaxially mounted so as to rotate via the bearing 17 with respect to the fixed portion 19 at the proximal end and the fixed portion 19. , And a rotating portion 18 extending in the distal direction (forward) 16.
  • the rotating portion 18 includes a relatively thick drive portion 15 to which a rotational force is transmitted via the drive belt 23, and an insertion portion (needle) 14 extending from the drive portion 15 toward the tip end (forward) 16 .
  • a radially directed opening (notch) 13 is provided at the tip 14 a of the insertion portion 14, and a laser beam (probe light) for inspection is emitted from the inspection head 10 through the opening 13 and the inspection is performed. Reflected light from the surface 4 of the object 2 is returned to the inspection head 10.
  • FIG. 5 shows a state in which the inner surface 4 of the hollow portion 3 which is an inspection object of the inspection object 2 is inspected by the light irradiated from the inspection head 10.
  • Laser light (probe light) 61 for inspection is emitted from the opening 13 of the inspection head 10 toward the inner surface (inspection target surface) 4, and reflected light 62 from the inspection target surface 4 enters the inspection head 10 from the opening 13. Will be returned.
  • optical fiber 35 for guiding the probe light 61 and the reflected light 62 along the central axis 11 is inserted inside the inspection head 10.
  • the optical fiber 35 constituting the optical system 30 is a bundle of a plurality of fibers, and a light emitting optical fiber 35a for guiding the probe light 61 emitted from the LD 31 toward the inspection object 2 and a reflected light 62 from the inspection object 2 are received. And a light receiving fiber 35 b leading to the element 32.
  • the optical system 30 includes, inside the inspection head 10, a holding cylinder 34 for holding the optical fibers 35 in a bundled state, and a light control lens 36 provided at the tip of the holding cylinder 34.
  • the insertion portion 14 at the tip of the inspection head 10 coaxially extends to cover the holding cylinder 34 and the light adjustment lens 36, and the probe light 61 is transmitted to the tip (near the tip) 14 a of the insertion portion 14 at the front 16 of the light adjustment lens 36.
  • An optical element 50 is disposed to control the direction of emission of light.
  • One example of the optical element 50 is a plane mirror, and may be an optical element having a reflecting surface such as a prism that can control the emitting direction and the incident direction of other light.
  • an angle ⁇ of the mirror surface (reflection surface) 51 specifically, an angle (a depression angle, an angle on the acute angle side) ⁇ between the normal axis 55 orthogonal to the reflection surface 51 and the central axis 11 It can be set to 46 degrees or more.
  • the probe light 61 emitted from the optical fiber 35 extending along the central axis 11 with the central axis 11 as the optical axis is forward 16 with respect to the central axis (optical axis) 11, ie, relative to the central axis 11.
  • the light is emitted forward 16 at an angle ⁇ larger than the orthogonal direction.
  • the angle ⁇ of the reflecting surface 51 may be fixed, and can be varied from 45 degrees or less than 45 degrees to 45 degrees or more using a suitable small-sized, angle-controllable actuator 59 such as a micromotor or a piezo element It is also good.
  • the optical element 50 in which the angle ⁇ of the reflecting surface 51 is inclined at 46 degrees or more is such that the reflected light 62 of the front surface 4 to be inspected irradiated by the probe light 61 emitted toward the front 16 is directed toward the central axis 11 It includes the function of reflecting and leading to the optical fiber 35.
  • the light adjustment lens 36 is an objective lens having a focal length suitable for condensing the probe light 61 output from the tip 35 c of the optical fiber 35 on the inspection target surface 4 via the reflection surface 51.
  • the light adjustment lens 36 also includes a function of condensing the reflected light 62 introduced to the inspection head 10 via the reflection surface 51 on the tip 35 c of the optical fiber 35.
  • the optical system 30 which emits the probe light 61 along the central axis 11 of the inspection head 10 and detects the reflected light 62 is not limited to the one using the optical fiber 35, but as an optical pickup etc. provided with a dichroic prism etc. It may be another known optical system. When the diameter of the hollow portion 3 to be inspected is several cm or less or several mm or less, the optical system 30 using the optical fiber 35 is preferable.
  • FIG. 6 shows some examples of the opening (notch) 13 provided at the tip 14 a of the insertion portion 14 at the front 16 of the inspection head 10.
  • the opening 13 provided at the tip (near the tip) 14a of the insertion portion 14 of the inspection head 10 shown in FIG. 6A has a U-shape in which the direction of the edge 14e of the tip (leading end) of the insertion portion 14 is open.
  • the opening 13 includes at least a point (center) 51c at which the reflecting surface 51 intersects the central axis (optical axis) 11 and reaches the edge 14e toward the front 16 It has become.
  • the probe light 61 reflected to the front 16 by the reflection surface 51 and the reflected light 62 from the front 16 enter the inside of the inspection head 10 without interfering with the wall surface (housing, sheath) of the insertion portion 14. It is output.
  • the opening 13 provided at the tip 14a of the insertion portion 14 of the inspection head 10 shown in FIG. 6C is U-shaped in which the direction of the edge 14e of the insertion portion 14 is open, and is shown in FIG. Thus, the opening reaches the edge 14 e of the insertion portion 14 including the intersection point 51 c of the reflection surface 51 and the central axis 11.
  • the shape of the opening 13 is not limited to these, and may be configured such that an optical element 50 such as a mirror is mounted so as to protrude forward 16 from the tip of the insertion portion 14.
  • the optical element 50 In the inspection head 10, in order to irradiate the probe light 61 in a circumferential shape continuously on the cylindrical inspection object surface 4, the optical element 50 is centered on the central axis 11 at a high speed and around the central axis 11. , Need to rotate in a stable state. Therefore, the optical element 50 is fixed in a state of being inserted into the tip 14 a of the cylindrical insertion portion 14, and a configuration for handling the probe light 61 and the reflected light 62 with the tip 14 a partially open (notched) 13 is an inspection head 10 is one of the preferable configurations.
  • the optical element 50 is installed at the tip or near the tip 14 a to convert the emission direction of the probe light 61 from the direction of the central axis 11 to the radial direction. Therefore, in the case where the hollow portion 3 having the bottom surface 4 b as shown in FIG. 5 is to be inspected, in addition to the clearance for avoiding the interference between the inspection head 10 and the inspection object 2, the optical element 50 is installed.
  • the space required for is the dead space DS.
  • the angle ⁇ of the reflecting surface 51 is set (arranged) to 46 degrees or more, and the irradiation angle ⁇ of the probe light 61 with respect to the central axis 11 is 92
  • the dead space DS which can not be inspected in the circumferential surface 4a can be reduced or eliminated by irradiating the front side 16 with a degree or more.
  • the inspection object surface (inspection surface) 4 a parallel to the central axis 11, for example, the center
  • the intensity of the reflected light 62 is sufficient, it is possible to inspect the state including the unevenness of the surface 4a to be inspected.
  • the average density value of the reflected light 62 is less than about 1/10 of that when the highest intensity probe light 61 is emitted orthogonal to the central axis 11, the amount of data for image processing is increased. It was found that there was a shortage and it was difficult to obtain the information necessary for surface inspection.
  • FIG. 7 shows a change in the ratio (average density ratio) of the average density values of the reflected light 62 when the angle ⁇ of the reflective surface 51 is changed.
  • the angle (tilt angle) ⁇ of the surface 4 to be inspected can be changed to obtain the reflection
  • the average density value of the light 62 is measured, and the inclination angle ⁇ is shown in% assuming that the value of 0 is 100.
  • the laser power used for the measurement is 300 ⁇ W, and the spot diameter is about 50 ⁇ m.
  • the angle ⁇ of the reflective surface 51 be 55 degrees or less (the irradiation angle ⁇ be 110 degrees or less). In particular, when the inclination angle ⁇ exceeds 20 degrees, the attenuation rate of the average density ratio becomes large. Furthermore, it is desirable that the angle ⁇ be 46 degrees or more from the viewpoint of reducing the dead space DS. Therefore, it is desirable that the angle ⁇ of the reflecting surface 51 be 46 degrees or more and 55 degrees or less, as shown in the equation (1).
  • the irradiation angle ⁇ of the probe light 61 is preferably 92 degrees or more and 110 degrees or less, as shown in the equation (2). Under this condition, if Lc / Lr is 0.36, the inside diameter of the hollow portion 3 to be inspected is about 30 mm, the diameter of the inspection head 10 is about 14 mm, and the dead space DS is 5 mm, the hollow portion 3 to be inspected is The circumferential surface 4a can be inspected up to the boundary 4c of the bottom surface 4b.
  • the inspection head 10 and the inspection head 10 which are more suitable for surface inspection, which have a wide inspection range and high intensity of the reflected light 62.
  • Lc / Lr at this time is 0.31, and under the above conditions, the circumferential surface 4a can be inspected sufficiently to reach the boundary of the bottom surface 4b.
  • the inspection head 10 and the inspection head 10 that are more suitable for surface inspection, in which the inspection range is wide and the intensity of the reflected light 62 is higher.
  • Lc / Lr at this time is 0.25, and under the above conditions, the circumferential surface 4a can be sufficiently inspected up to the boundary 4c of the bottom surface 4b.
  • the angle ⁇ of the reflective surface 51 is 50 degrees or less, the irradiation angle ⁇ is 100 degrees or less, and the average density ratio exceeds 65%. Therefore, the reflected light 62 with higher intensity can be obtained, and the inspection head 10 and the inspection head 10 more suitable for surface inspection can be provided.
  • Lc / Lr at this time is 0.18, and under the above conditions, the circumferential surface 4a can be inspected sufficiently to reach the boundary 4c of the bottom surface 4b.
  • the lower limit of the angle ⁇ of the reflecting surface 51 may be non-90 degrees (non-right angle) as long as the probe light 61 can be irradiated, the angle ⁇ may be more than 45 degrees, and the irradiation angle ⁇ may be more than 90 degrees .
  • the angle ⁇ is preferably 46 degrees (the irradiation angle ⁇ is 92 degrees) or more, and the angle ⁇ is 48 degrees (the irradiation angle ⁇ is 96 degrees) or more Is desirable.
  • the angle ⁇ is preferably 49 degrees (the irradiation angle ⁇ is 98 degrees) or more, and the angle ⁇ is 50 degrees (irradiation More preferably, the angle ⁇ is 100 degrees or more.
  • the surface to be inspected is a bottom surface parallel to the central axis by irradiating the probe light 61 non-perpendicularly to the surface 4 to be inspected. Even if it continues, it is possible to expand the inspection range.
  • the angle (tilt angle) ⁇ between the surface 4 to be inspected and the probe light 61 is preferably 20 degrees or less, more preferably 17 degrees or less, and 14 degrees or less. Is more preferred.
  • the inclination angle ⁇ is preferably 2 degrees or more, more preferably 6 degrees or more, and it is also effective that it is 10 degrees or more.
  • FIG. 8 shows an example of a method of inspecting the surface (inspection surface) of an inspection object (inspection object) using the inspection device 1.
  • An example of the surface to be inspected (surface to be inspected) 4 is a hollow cylindrical surface with a bottom, for example, the inner surface (side surface) of a cylinder.
  • the angle ⁇ of the reflecting surface 51 is set to 45 degrees, and the irradiation angle ⁇ of the probe light 61 is set to 90 degrees.
  • the angle ⁇ of the reflecting surface 51 may not be 45 degrees, it is preferable to adopt the high angle ⁇ of the average density ratio in a normal inspection.
  • step 112 the inspection head 10 is inserted into the hollow portion to be inspected, and inspection of the side surface (inner surface, inspection surface) 4a of the hollow portion 3 is started.
  • step 113 when the inspection head 10 reaches a deepest portion, that is, a position where a predetermined clearance can be secured with respect to the bottom surface 4b of the hollow portion 3, in step 114, the angle ⁇ of the reflection surface 51 is 46 using the actuator 59.
  • the irradiation angle ⁇ of the probe light 61 is changed to 92 degrees or more, continuously or intermittently, and inspection of the side surface 4a of the hollow portion 3 is continued.
  • step 115 when the boundary 4c between the side surface 4a and the bottom surface 4b is detected, the inspection is ended.
  • the angle ⁇ of the reflection surface 51 is set in advance to an angle at which the boundary 4c can be detected at the deepest portion. Even if the irradiation angle of 61 is set in advance to 92 degrees or more, the side 4a is inspected while inserting the inspection head 10 gradually into the hollow portion 3, and the inspection is ended if the boundary 4c is detected. Good.
  • the side surface 4a is irradiated with the probe light 61 until the boundary 4c is reached. The status of 4a can be checked.
  • the inspection apparatus (inspection system) 1 moves the light (probe light) 61 for inspection forward 16 in the non-90 degrees direction from the tip 14 a of the inspection head (inspection probe) 10 It can be directed towards. Therefore, the dead space of the inspection head 10 can be eliminated or reduced. Therefore, by inspecting the circumferential surface 4a of the hollow space 3 provided with the bottom surface 4b by the inspection system 1, the circumferential surface 4a is inspected up to the bottom surface 4b or a portion closer to the bottom surface 4b. It can be evaluated.

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  • Chemical & Material Sciences (AREA)
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  • Life Sciences & Earth Sciences (AREA)
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  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)

Abstract

An inspection system (1) having a hollow inspection head (10) which extends in a rod shape along a center axis (11), a rotation unit (20) which rotates the inspection head around the center axis (11), an optical system (30) which supplies a laser beam for inspection along the center axis (11) through the interior of the inspection head (10), and receives reflected light from the surface (4) of an inspection target (2) which is returned along the center axis, and an optical element (50) which is positioned at or near the tip of the inspection head, emits the laser beam for inspection toward the inspection target, and guides the reflected light in the center axis direction, wherein the optical element has a reflection surface capable of tilting in a manner such that the normal line thereof relative to the center axis forms an angle θ, and the angle θ satisfies the condition of 46°≤θ≤55°.

Description

検査システムおよび検査方法Inspection system and inspection method
　本発明は、検査ヘッドから被検査物に検査用のレーザー光を照射して表面を検査する検査システムおよび方法に関するものである。 The present invention relates to an inspection system and method for inspecting a surface by irradiating a laser beam for inspection from an inspection head to an object to be inspected.
　日本国特開平１１－２８１５８３号公報には、被検査物が円筒状をなす場合、その内周面も容易に検査でき、被検査物の表面が平面である場合には、一回の移動で検査できる領域を広くとることができる表面検査装置が開示されている。この表面検査装置は、電動モータの電機子軸を中空筒形とし、その内部に投光ファイバー及び受光ファイバーを結束保持するファイバー保持筒を遊挿すると共に、電機子軸の先端部に回転円筒を一体に取付ける。この回転円筒の内部に、検査光と反射光をファイバー保持筒の軸心に対して、例えば直角に光路を変更する光路変更手段と、検査光を被検査物へ集光し、かつ、反射光を受光ファイバーへ集光する集光手段とを設置する。電動モータを作動して電機子軸と共に回転円筒を回転させると、その内部に設置された光路変更手段が回転し、検査光を照射して検査する領域を移動させることができる。 In Japanese Patent Laid-Open No. 11-281583, when the object to be inspected has a cylindrical shape, the inner peripheral surface can also be inspected easily, and when the surface of the object to be inspected is flat, it can be moved by one movement. A surface inspection apparatus is disclosed that can widen the area that can be inspected. In this surface inspection apparatus, the armature shaft of the electric motor is formed into a hollow cylinder, and a fiber holding cylinder for binding and holding the light emitting fiber and the light receiving fiber is loosely inserted therein, and the rotating cylinder is integrated with the tip of the armature shaft. Attach to Inside the rotating cylinder, an optical path changing means for changing the optical path, for example, at right angles to the inspection light and the reflected light with respect to the axial center of the fiber holding cylinder, condensing the inspection light onto the inspection object, and the reflected light And focusing means for focusing the light onto the light receiving fiber. When the electric motor is operated to rotate the rotary cylinder together with the armature shaft, the optical path changing means provided therein is rotated and the inspection light can be irradiated to move the area to be inspected.
　回転円筒から軸に直交する方向に検査光を照射して表面を検査する検査装置により、被検査物の円筒状の内部の表面を検査することが可能である。しかしながら、回転円筒の先端に検査光の光路の角度を変更する手段、例えば、反射鏡を設置する必要がある。したがって、反射鏡の設置スペースが必要となるため、有底の円筒状の内部の表面を検査する場合は、円筒内面の底面に近い部分、さらには、円筒内面と底面との境界まで検査することは不可能であった。 It is possible to inspect the cylindrical inner surface of the object to be inspected by the inspection device which inspects the surface by irradiating the inspection light in the direction orthogonal to the axis from the rotating cylinder. However, it is necessary to install means for changing the angle of the light path of the inspection light, for example, a reflecting mirror at the tip of the rotating cylinder. Therefore, since the installation space of the reflecting mirror is required, when inspecting the bottomed cylindrical inner surface, the portion close to the bottom surface of the cylindrical inner surface, and further, the boundary between the cylindrical inner surface and the bottom surface should be inspected. Was impossible.
　本発明の一態様は、中心軸に沿って棒状に延びた中空の検査ヘッドであって、中心軸の周りに回転される検査ヘッドと、検査ヘッド内を通じて、中心軸に沿って検査用のレーザー光を供給し、中心軸に沿って戻された被検査物の被検査面（表面）からの反射光を受光する光学システムと、検査ヘッドの先端近傍または先端に配置された光学素子とを有する検査システムである。光学素子は、検査用のレーザー光を被検査物に向けて出射するとともに反射光を中心軸方向に導く光学素子であり、中心軸に対して、法線が角度θで傾いた状態で検査用のレーザー光を出射可能な反射面を含み、角度θが以下の条件（１）を満たす。
４６度　≦　θ　≦　５５度　・・・（１） One aspect of the present invention is a hollow inspection head extending in a rod shape along a central axis, the inspection head being rotated about the central axis, and a laser for inspection along the central axis through the inside of the inspection head. It has an optical system for supplying light and receiving reflected light from the inspection surface (surface) of the inspection object returned along the central axis, and an optical element disposed near or at the tip of the inspection head It is an inspection system. The optical element is an optical element that emits a laser beam for inspection toward the inspection object and guides the reflected light in the central axis direction, and for inspection in a state where the normal is inclined at an angle θ with respect to the central axis Of the laser beam can be emitted, and the angle θ satisfies the following condition (1).
46 degrees ≦ θ ≦ 55 degrees (1)
　この検査システムは、中心軸に沿って棒状に延びた中空の検査ヘッドと、検査ヘッドを中心軸の周りに回転する回転ユニットと、検査ヘッド内を通じて、中心軸に沿って検査用のレーザー光を供給し、中心軸に沿って戻された被検査物の被検査面からの反射光を受光する光学システムと、検査ヘッドの先端近傍または先端に配置された光学素子とを有し、光学素子が、中心軸に対して、検査用のレーザー光を、角度φで被検査面に向けて出射するとともに反射光を中心軸方向に導いてもよい。角度φは以下の条件（２）を満たす。
９２度　≦　φ　≦　１１０度　・・・（２） The inspection system includes a hollow inspection head rod-shaped along a central axis, a rotation unit that rotates the inspection head around the central axis, and laser light for inspection along the central axis through the inspection head. The optical device includes an optical system for supplying light and receiving reflected light from the inspection surface of the inspection object returned along the central axis, and an optical element disposed in the vicinity of the tip of the inspection head or at the tip. The laser light for inspection may be emitted toward the surface to be inspected at an angle φ with respect to the central axis and the reflected light may be guided in the central axial direction. The angle φ satisfies the following condition (2).
92 degrees ≦ φ ≦ 110 degrees (2)
　本願の発明者は、この検査システムにおいて、光学素子により検査用のレーザー光を非直角方向に出射して、被検査物の表面に対して非直角に照射しても、被検査物の表面からの反射光を、強度は低下するが、表面の状態を解析するためには十分な強度で捉えることができることを見出した。したがって、検査システムは、光学素子により、中心軸に対し平行な被検査面に向けて検査用のレーザー光を、非直角に出射して、非検査面の状態を検出できる。条件（１）の範囲では、角度θが４５度、すなわち、角度φが９０度の場合と比較し、反射光の強度は１／１０程度まで低下する可能性があるが、表面の状態の解析に最小限必要な情報を含む反射光を得ることができる。 In the inspection system, the inventor of the present application emits laser light for inspection in a non-perpendicular direction by the optical element and irradiates the surface of the inspection object non-perpendicularly from the surface of the inspection object. It has been found that although the intensity of the reflected light decreases, it can be captured with sufficient intensity to analyze the surface condition. Therefore, the inspection system can detect the state of the non-inspection surface by emitting the laser light for inspection toward the inspection surface parallel to the central axis at right angles by the optical element. In the range of condition (1), the intensity of the reflected light may decrease to about 1/10 compared to the case where the angle θ is 45 degrees, that is, the angle φ is 90 degrees, but analysis of the surface state It is possible to obtain reflected light that contains the minimum necessary information.
　条件（１）の上限は、反射光の強度を確保できることから、５３．５度であってもよく、５２度であってもよい。同様に、条件（２）の上限は、１０７度であってもよく、１０４度であってもよい。条件（１）の下限は、検査可能な側面の境界を底面に近づけられることから、４８度であってもよく、５０度であってもよい。同様に、条件（２）の下限は、９６度であってもよく、１００度であってもよい。 The upper limit of the condition (1) may be 53.5 degrees or 52 degrees because the intensity of the reflected light can be secured. Similarly, the upper limit of the condition (2) may be 107 degrees or 104 degrees. The lower limit of the condition (1) may be 48 degrees or 50 degrees because the boundary of the inspectable side can be brought close to the bottom surface. Similarly, the lower limit of the condition (2) may be 96 degrees or 100 degrees.
　この検査システムは、角度θ、すなわち角度φを可変するユニットを備えていてもよい。検査ヘッドの先端近傍から先端に達するように設けられた開口を有していてもよい。さらに、この検査システムは、検査ヘッドを中心軸の周りに回転する回転ユニットを有していてもよい。検査システムは、検査ヘッドが挿入される中空部分または凹みを含む被検査物と検査ヘッドとを中心軸に沿って相対的に移動する移動ユニットをさらに有していてもよい。 The inspection system may include a unit that varies the angle θ, ie, the angle φ. It may have an opening provided from near the tip of the inspection head to the tip. Furthermore, the inspection system may comprise a rotation unit which rotates the inspection head around a central axis. The inspection system may further include a moving unit that moves the inspection head relative to the inspection object including the hollow portion or recess into which the inspection head is inserted, along the central axis.
　本発明の他の態様の１つは、中心軸に沿って棒状に延びた中空の検査ヘッドであって、中心軸の周りに回転される検査ヘッドを含む検査システムを用いて、被検査物の被検査面の状態を検査することを有する方法である。検査システムは、検査ヘッド内を通じて、中心軸に沿って検査用のレーザー光を供給し、中心軸に沿って戻された被検査面からの反射光を受光する光学システムと、検査ヘッドの先端近傍または先端に配置された光学素子であって、検査用のレーザー光を被検査物に向けて出射するとともに反射光を中心軸方向に導く光学素子とをさらに有する。さらに、検査することは、光学素子の反射面を、中心軸に対して、法線が角度θで傾いた状態で検査用のレーザー光を被検査面に向けて出射することを含み、角度θは上記の条件（１）を満たす。出射することは、角度θを変えることを含んでもよい。 One of the other aspects of the present invention is a hollow inspection head extending in a rod-like manner along a central axis, the inspection system comprising an inspection head rotated about the central axis. It is a method which has inspecting the state of a to-be-inspected surface. The inspection system supplies an inspection laser beam along the central axis through the inspection head, and an optical system that receives reflected light from the surface to be inspected returned along the central axis, and the vicinity of the tip of the inspection head Alternatively, the optical device further includes an optical element disposed at the tip, and emitting an inspection laser beam toward the inspection object and guiding the reflected light in the central axis direction. Furthermore, the inspection includes emitting a laser beam for inspection toward the surface to be inspected in a state in which a normal is inclined at an angle θ with respect to the central axis with respect to the reflective surface of the optical element. Satisfies the above condition (1). The emitting may include changing the angle θ.
　本発明のさらに異なる他の態様の１つは、検査ヘッドを含む検査システムを用いて、被検査物の被検査面の状態を検査することを有する方法であって、検査することが、光学素子により、中心軸に対して、検査用のレーザー光を、角度φで被検査面に向けて出射することを含む、方法である。角度φは上記の条件（２）を満たす。 One of the still another different aspect of the present invention is a method comprising inspecting a state of an inspection surface of an inspection object using an inspection system including an inspection head, the inspection comprising: Thus, the method includes emitting laser light for inspection toward the surface to be inspected at an angle φ with respect to the central axis. The angle φ satisfies the above condition (2).
　これらの検査方法において、出射することは、中心軸に対し平行な被検査面に向けて検査用のレーザー光を出射することを含んでもよい。また、出射することは、被検査物の中心軸に沿って延びた中空部分または凹みの中心軸に平行な被検査面（内面、表面）に向けて検査用のレーザー光を出射することを含んでもよい。 In these inspection methods, emitting may include emitting a laser beam for inspection toward a surface to be inspected which is parallel to the central axis. In addition, emitting includes emitting laser light for inspection toward a surface to be inspected (inner surface, surface) parallel to the central axis of the hollow portion or recess extending along the central axis of the object to be inspected. May be.
検査装置の概要を示す斜視図。The perspective view which shows the outline | summary of a test | inspection apparatus. 検査装置の概略構成を示す断面図（II－II断面図）。Sectional drawing which shows schematic structure of a test | inspection apparatus (II-II sectional drawing). 検査ヘッドの概要を示す斜視図。The perspective view which shows the outline | summary of a test | inspection head. 検査ヘッドの概略構成を示す断面図（IV－IV断面図）。Sectional drawing (IV-IV sectional drawing) which shows schematic structure of a test | inspection head. 図４に示す検査ヘッドの先端の構成をさらに拡大して示す断面図。FIG. 5 is a cross-sectional view showing the configuration of the tip of the inspection head shown in FIG. 4 in a further enlarged manner. 検査ヘッドの先端の開口の形状の幾つかの例を示す図。The figure which shows the several example of the shape of opening of the front-end | tip of a test | inspection head. 反射光の平均濃度比の測定結果を示す図。The figure which shows the measurement result of the average density ratio of reflected light. 検査装置を用いた検査方法の一例を示すフローチャート。6 is a flowchart showing an example of an inspection method using the inspection apparatus.
発明の実施の形態Embodiment of the Invention
　図１に、検査装置（検査システム）１の外観を示し、図２に、検査装置１の概略の構成を、断面を用いて示している。この検査装置（表面検査装置）１は、被検査物２に設けられた孔、凹みなどの中空部分３の内面（表面、被検査面）４の形状または状態を検査するために適している。中空部分３の一例は、円筒状の側面４ａと、底面４ｂとを備えた有底の中空部分３である。 FIG. 1 shows the appearance of the inspection apparatus (inspection system) 1, and FIG. 2 shows the schematic configuration of the inspection apparatus 1 by using a cross section. The inspection apparatus (surface inspection apparatus) 1 is suitable for inspecting the shape or state of the inner surface (surface, inspection surface) 4 of the hollow portion 3 such as a hole or a recess provided in the inspection object 2. One example of the hollow portion 3 is a bottomed hollow portion 3 having a cylindrical side surface 4a and a bottom surface 4b.
　検査装置１は、中心軸１１に沿って棒状に延びた中空の検査ヘッド（検査プローブ）１０と、検査ヘッド１０を中心軸１１の周りに回転させる回転ユニット２０と、検査ヘッド１０内を通じて、中心軸１１に沿って検査用のレーザー光を供給し、中心軸１１に沿って戻された被検査物２の表面（被検査面）４からの反射光を受光する光学システム３０と、検査ヘッド１０の先端またはその近傍に配置された光学素子５０と、検査ヘッド１０および被検査物２の少なくとも一方を中心軸１１に沿って相対的に移動する移動ユニット２５と、回転ユニット２０、光学システム３０および移動ユニット２５を内蔵するハウジング５とを含む。 The inspection apparatus 1 includes a hollow inspection head (inspection probe) 10 extending in a rod-like shape along the central axis 11, a rotation unit 20 for rotating the inspection head 10 around the central axis 11, and a center through the inspection head 10. An optical system 30 that supplies laser light for inspection along the axis 11 and receives reflected light from the surface (surface to be inspected) 4 of the inspection object 2 returned along the central axis 11, and an inspection head 10 An optical element 50 disposed at or near the tip of the lens, a moving unit 25 relatively moving at least one of the inspection head 10 and the inspection object 2 along the central axis 11, a rotation unit 20, an optical system 30, and And a housing 5 in which the moving unit 25 is incorporated.
　この検査装置１は、検査ヘッド（検査プローブ）１０と被検査物２とを相対的に移動する移動ユニット２５としてハウジング５に収納された検査ヘッド１０の移動ユニット２５を含む。移動ユニット２５は、検査ヘッド１０、回転ユニット２０および光学システム３０を搭載したキャリッジ２８と、キャリッジ２８を前後（図２の左右）に動かすボールねじ２６および移動用のモータ２７の組み合わせとを含む。検査ヘッド１０は、基端となる固定部１９と、固定部１９に対して回転するように装着された回転部１８とを含み、固定部１９がホルダー２９を介してキャリッジ２８に搭載されている。移動ユニット２５の構成は一例であり、スライダー、移動テーブルなどであってもよい。移動ユニット２５により、検査ヘッド１０はハウジング５から前方に突き出た位置Ｐ１と、検査ヘッド１０がハウジング５の内部に退避する位置Ｐ２とに移動する。検査ヘッド１０の代わりに、あるいは検査ヘッド１０とともに被検査物２を、ロボット等を用いて動かしてもよい。 The inspection apparatus 1 includes a moving unit 25 of the inspection head 10 housed in the housing 5 as a moving unit 25 for moving the inspection head (inspection probe) 10 and the inspection object 2 relative to each other. The moving unit 25 includes a carriage 28 on which the inspection head 10, the rotating unit 20 and the optical system 30 are mounted, and a combination of a ball screw 26 and a moving motor 27 for moving the carriage 28 back and forth (left and right in FIG. 2). The inspection head 10 includes a fixing portion 19 serving as a base end and a rotating portion 18 mounted so as to rotate with respect to the fixing portion 19, and the fixing portion 19 is mounted on the carriage 28 via a holder 29. . The configuration of the moving unit 25 is an example, and may be a slider, a moving table, or the like. The moving unit 25 moves the inspection head 10 to a position P 1 projecting forward from the housing 5 and a position P 2 at which the inspection head 10 retracts into the housing 5. The inspection object 2 may be moved using a robot or the like instead of the inspection head 10 or together with the inspection head 10.
　光学システム３０は、検査用のレーザー光を生成する半導体レーザー（レーザーダイオード、ＬＤ）３１と、反射光を受光する受光素子（例えば、フォトダイオード、ＣＣＤ、ＣＭＯＳなど）３２と、半導体レーザー３１の駆動回路、受光素子３２で受信した信号を処理する回路などを含む制御ユニット３３とを含む。光学システム３０で受信した信号は制御ユニット３３を介して不図示のコンピュータ（パーソナルコンピュータ）に送られて、さらにデータ処理され、被検査物２の表面４の解析に用いられる。光学システム３０は、さらに、検査プローブ１０の内部に挿入された光ファイバー３５と、光ファイバー３５に対して入出力する光束を制御する調光レンズ３６とを含む。これらについてはさらに以下で説明する。 The optical system 30 includes a semiconductor laser (laser diode, LD) 31 that generates a laser beam for inspection, a light receiving element (for example, a photodiode, CCD, CMOS, etc.) 32 that receives reflected light, and a drive of the semiconductor laser 31. And a control unit 33 including a circuit, a circuit for processing a signal received by the light receiving element 32, and the like. A signal received by the optical system 30 is sent to a computer (personal computer) (not shown) via the control unit 33, and is further data processed and used for analysis of the surface 4 of the inspection object 2. The optical system 30 further includes an optical fiber 35 inserted inside the inspection probe 10, and a light control lens 36 for controlling a light flux input to and output from the optical fiber 35. These are further described below.
　回転ユニット２０の一例は、キャリッジ２８に搭載されたモータ２１である。モータ２１により駆動されるプーリ２２が、検査ヘッド１０の回転部１８と駆動ベルト２３で接続されており、モータ２１が駆動ベルト２３を介して検査ヘッド１０の回転部１８を中心軸１１の周りに（中心軸１１を回転の中心として）高速で回転する。 An example of the rotation unit 20 is a motor 21 mounted on a carriage 28. The pulley 22 driven by the motor 21 is connected to the rotating portion 18 of the inspection head 10 by the drive belt 23, and the motor 21 rotates the rotating portion 18 of the inspection head 10 around the central axis 11 via the drive belt 23. It rotates at high speed (with the central axis 11 as the center of rotation).
　図３に検査ヘッド（検査プローブ）１０を抜き出して示している。図４にプローブ１０の概略構成を、断面を用いて示している。検査ヘッド１０は、全体として回転軸１１に沿って延びた中空の円筒体であり、基端の固定部１９と、固定部１９に対してベアリング１７を介して回転するように同軸上に取り付けられ、先端方向（前方）１６に向かって延びた回転部１８とを含む。回転部１８は、駆動ベルト２３を介して回転力が伝達される、比較的太い駆動部１５と、駆動部１５から細く先端（前方）１６に向かって延びた挿入部（ニードル）１４とを含む。挿入部１４の先端１４ａには、半径方向に向いた開口（切り欠き）１３が設けられており、開口１３を介して検査用のレーザー光（プローブ光）が検査ヘッド１０から出射され、被検査物２の表面４からの反射光が検査ヘッド１０に戻されるようになっている。 The inspection head (inspection probe) 10 is extracted and shown in FIG. The schematic configuration of the probe 10 is shown in FIG. 4 using a cross section. The inspection head 10 is a hollow cylindrical body generally extending along the rotation axis 11 and coaxially mounted so as to rotate via the bearing 17 with respect to the fixed portion 19 at the proximal end and the fixed portion 19. , And a rotating portion 18 extending in the distal direction (forward) 16. The rotating portion 18 includes a relatively thick drive portion 15 to which a rotational force is transmitted via the drive belt 23, and an insertion portion (needle) 14 extending from the drive portion 15 toward the tip end (forward) 16 . A radially directed opening (notch) 13 is provided at the tip 14 a of the insertion portion 14, and a laser beam (probe light) for inspection is emitted from the inspection head 10 through the opening 13 and the inspection is performed. Reflected light from the surface 4 of the object 2 is returned to the inspection head 10.
　図５に、被検査物２の検査対象である中空部分３の内面４を検査ヘッド１０から照射される光により検査する様子を示している。検査ヘッド１０の開口１３から検査用のレーザー光（プローブ光）６１が内面（検査対象面）４に向けて照射され、検査対象面４からの反射光６２が開口１３から検査ヘッド１０の内部に戻される。 FIG. 5 shows a state in which the inner surface 4 of the hollow portion 3 which is an inspection object of the inspection object 2 is inspected by the light irradiated from the inspection head 10. Laser light (probe light) 61 for inspection is emitted from the opening 13 of the inspection head 10 toward the inner surface (inspection target surface) 4, and reflected light 62 from the inspection target surface 4 enters the inspection head 10 from the opening 13. Will be returned.
　検査ヘッド１０の内部には、中心軸１１に沿ってプローブ光６１と反射光６２とを導く光ファイバー３５が挿入されている。光学システム３０を構成する光ファイバー３５は複数のファイバーのバンドルであり、ＬＤ３１から射出されるプローブ光６１を被検査物２に向かって導く投光ファイバー３５ａと、被検査物２からの反射光６２を受光素子３２へ導く受光ファイバー３５ｂとを含む。さらに、光学システム３０は、検査ヘッド１０の内部に、光ファイバー３５を束ねた状態で保持する保持筒３４と、その保持筒３４の先端に設けられた調光レンズ３６とを含む。 An optical fiber 35 for guiding the probe light 61 and the reflected light 62 along the central axis 11 is inserted inside the inspection head 10. The optical fiber 35 constituting the optical system 30 is a bundle of a plurality of fibers, and a light emitting optical fiber 35a for guiding the probe light 61 emitted from the LD 31 toward the inspection object 2 and a reflected light 62 from the inspection object 2 are received. And a light receiving fiber 35 b leading to the element 32. Furthermore, the optical system 30 includes, inside the inspection head 10, a holding cylinder 34 for holding the optical fibers 35 in a bundled state, and a light control lens 36 provided at the tip of the holding cylinder 34.
　検査ヘッド１０の先端の挿入部１４は、同軸状に保持筒３４および調光レンズ３６を覆うように延び、調光レンズ３６の前方１６の挿入部１４の先端（先端近傍）１４ａにプローブ光６１の出射方向を制御する光学素子５０が配置されている。光学素子５０の一例は平面鏡であり、プリズムなどの他の光の出射方向および入射方向を制御できる反射面を有する光学素子であってもよい。本例の検査装置１においては、鏡面（反射面）５１の角度θ、具体的には、反射面５１に直交する法線５５が中心軸１１となす角度（夾角、鋭角側の角度）θを４６度以上に設定可能としている。これにより、中心軸１１に沿って延びた光ファイバー３５から中心軸１１を光軸として出射されるプローブ光６１を、中心軸（光軸）１１に対して前方１６、すなわち、中心軸１１に対して直交する方向よりも大きな角度φで前方１６に向けて出射するようにしている。反射面５１の角度θは固定されていてもよく、マイクロモーター、ピエゾ素子などの小型で角度制御が可能な適当なアクチュエータ５９を用いて４５度あるいは４５度未満から４５度以上まで可変であってもよい。 The insertion portion 14 at the tip of the inspection head 10 coaxially extends to cover the holding cylinder 34 and the light adjustment lens 36, and the probe light 61 is transmitted to the tip (near the tip) 14 a of the insertion portion 14 at the front 16 of the light adjustment lens 36. An optical element 50 is disposed to control the direction of emission of light. One example of the optical element 50 is a plane mirror, and may be an optical element having a reflecting surface such as a prism that can control the emitting direction and the incident direction of other light. In the inspection apparatus 1 of this example, an angle θ of the mirror surface (reflection surface) 51, specifically, an angle (a depression angle, an angle on the acute angle side) θ between the normal axis 55 orthogonal to the reflection surface 51 and the central axis 11 It can be set to 46 degrees or more. As a result, the probe light 61 emitted from the optical fiber 35 extending along the central axis 11 with the central axis 11 as the optical axis is forward 16 with respect to the central axis (optical axis) 11, ie, relative to the central axis 11. The light is emitted forward 16 at an angle φ larger than the orthogonal direction. The angle θ of the reflecting surface 51 may be fixed, and can be varied from 45 degrees or less than 45 degrees to 45 degrees or more using a suitable small-sized, angle-controllable actuator 59 such as a micromotor or a piezo element It is also good.
　反射面５１の角度θが４６度以上に傾いた光学素子５０は、前方１６に向けて出射されたプローブ光６１により照射された前方の検査対象面４の反射光６２を中心軸１１の方向に反射し、光ファイバー３５に導く機能を含む。調光レンズ３６は、光ファイバー３５の先端３５ｃから出力されたプローブ光６１を、反射面５１を介して検査対象面４に集光するために適した焦点距離を有する対物レンズである。調光レンズ３６は、反射面５１を介して検査ヘッド１０に導入された反射光６２を光ファイバー３５の先端３５ｃに集光する機能も含む。検査ヘッド１０の中心軸１１に沿ってプローブ光６１を出射し、反射光６２を検出する光学システム３０は、光ファイバー３５を使用したものに限定されず、ダイクロイックプリズムなどを備えた、光ピックアップなどとして公知の他の光学系であってもよい。検査対象の中空部分３の径が数ｃｍ以下あるいは数ｍｍ以下のような場合は、光ファイバー３５を用いた光学システム３０が好適である。 The optical element 50 in which the angle θ of the reflecting surface 51 is inclined at 46 degrees or more is such that the reflected light 62 of the front surface 4 to be inspected irradiated by the probe light 61 emitted toward the front 16 is directed toward the central axis 11 It includes the function of reflecting and leading to the optical fiber 35. The light adjustment lens 36 is an objective lens having a focal length suitable for condensing the probe light 61 output from the tip 35 c of the optical fiber 35 on the inspection target surface 4 via the reflection surface 51. The light adjustment lens 36 also includes a function of condensing the reflected light 62 introduced to the inspection head 10 via the reflection surface 51 on the tip 35 c of the optical fiber 35. The optical system 30 which emits the probe light 61 along the central axis 11 of the inspection head 10 and detects the reflected light 62 is not limited to the one using the optical fiber 35, but as an optical pickup etc. provided with a dichroic prism etc. It may be another known optical system. When the diameter of the hollow portion 3 to be inspected is several cm or less or several mm or less, the optical system 30 using the optical fiber 35 is preferable.
　図６に、検査ヘッド１０の前方１６の挿入部１４の先端１４ａに設けられた開口（切り欠き）１３の幾つかの例を示している。図６（ａ）に示す検査ヘッド１０の、挿入部１４の先端（先端近傍）１４ａに設けられた開口１３は、挿入部１４の先端（最先端）のエッジ１４ｅの方向が開いたコ字型である。図６（ｂ）に断面で示すように、開口１３は、反射面５１が中心軸（光軸）１１と交差する点（中央）５１ｃを少なくとも含み、前方１６に向けてエッジ１４ｅに達する開口となっている。このため、反射面５１により前方１６に反射されるプローブ光６１および前方１６からの反射光６２が、挿入部１４の壁面（ハウジング、シース）と干渉せずに検査ヘッド１０の内部に対して入出力される。 FIG. 6 shows some examples of the opening (notch) 13 provided at the tip 14 a of the insertion portion 14 at the front 16 of the inspection head 10. The opening 13 provided at the tip (near the tip) 14a of the insertion portion 14 of the inspection head 10 shown in FIG. 6A has a U-shape in which the direction of the edge 14e of the tip (leading end) of the insertion portion 14 is open. It is. 6B, the opening 13 includes at least a point (center) 51c at which the reflecting surface 51 intersects the central axis (optical axis) 11 and reaches the edge 14e toward the front 16 It has become. Therefore, the probe light 61 reflected to the front 16 by the reflection surface 51 and the reflected light 62 from the front 16 enter the inside of the inspection head 10 without interfering with the wall surface (housing, sheath) of the insertion portion 14. It is output.
　図６（ｃ）に示す検査ヘッド１０の、挿入部１４の先端１４ａに設けられた開口１３は、挿入部１４のエッジ１４ｅの方向が開いたＵ字型であり、図６（ｄ）に示すように、反射面５１と中心軸１１との交点５１ｃを含めて挿入部１４のエッジ１４ｅに達する開口となっている。開口１３の形状はこれらに限定されず、挿入部１４の先端から前方１６に突き出るようにミラーなどの光学素子５０が装着された構成であってもよい。検査ヘッド１０においては、プローブ光６１を円周状に、円筒状の検査対象面４に連続して照射するために、光学素子５０を高速で中心軸１１を中心として、中心軸１１の周りに、安定した状態で回転する必要がある。したがって、光学素子５０を円筒状の挿入部１４の先端１４ａに挿入した状態で固定し、先端１４ａの一部を開口（切り欠き）１３としてプローブ光６１および反射光６２をハンドリングする構成は検査ヘッド１０として好適な構成の１つである。 The opening 13 provided at the tip 14a of the insertion portion 14 of the inspection head 10 shown in FIG. 6C is U-shaped in which the direction of the edge 14e of the insertion portion 14 is open, and is shown in FIG. Thus, the opening reaches the edge 14 e of the insertion portion 14 including the intersection point 51 c of the reflection surface 51 and the central axis 11. The shape of the opening 13 is not limited to these, and may be configured such that an optical element 50 such as a mirror is mounted so as to protrude forward 16 from the tip of the insertion portion 14. In the inspection head 10, in order to irradiate the probe light 61 in a circumferential shape continuously on the cylindrical inspection object surface 4, the optical element 50 is centered on the central axis 11 at a high speed and around the central axis 11. , Need to rotate in a stable state. Therefore, the optical element 50 is fixed in a state of being inserted into the tip 14 a of the cylindrical insertion portion 14, and a configuration for handling the probe light 61 and the reflected light 62 with the tip 14 a partially open (notched) 13 is an inspection head 10 is one of the preferable configurations.
　検査装置１に用いられている検査ヘッド１０においては、先端または先端近傍１４ａに光学素子５０を配置してプローブ光６１の出射方向を中心軸１１の方向から半径方向に変換する必要がある。したがって、図５に示すような、底面４ｂを有する中空部分３を検査対象とする場合は、検査ヘッド１０と被検査対象物２との干渉を避けるためのクリアランスに加えて、光学素子５０の設置のために必要なスペースがデッドスペースＤＳとなる。このため、従来の検査ヘッド１０のように、反射面５１を中心軸１１に対して４５度に配置し、プローブ光６１を中心軸１１に対して９０度方向に出射するタイプでは、検査対象の周面４ａのうち、底面４ｂに近いデッドスペースＤＳの部分の面は検査できないという問題がある。 In the inspection head 10 used in the inspection apparatus 1, it is necessary to dispose the optical element 50 at the tip or near the tip 14 a to convert the emission direction of the probe light 61 from the direction of the central axis 11 to the radial direction. Therefore, in the case where the hollow portion 3 having the bottom surface 4 b as shown in FIG. 5 is to be inspected, in addition to the clearance for avoiding the interference between the inspection head 10 and the inspection object 2, the optical element 50 is installed. The space required for is the dead space DS. Therefore, in the type in which the reflection surface 51 is disposed at 45 degrees with respect to the central axis 11 and the probe light 61 is emitted in the 90 degree direction with respect to the central axis 11 as in the conventional inspection head 10 There is a problem that the surface of the portion of the dead space DS near the bottom surface 4b can not be inspected among the circumferential surfaces 4a.
　これに対し、検査ヘッド１０においては、図５に拡大して示すように、反射面５１の角度θを４６度以上に設定（配置）し、プローブ光６１の中心軸１１に対する照射角φを９２度以上とし、前方１６に向けて照射することにより、周面４ａのうち、検査ができないデッドスペースＤＳを縮小し、または、なくすようにしている。 On the other hand, in the inspection head 10, as shown enlarged in FIG. 5, the angle θ of the reflecting surface 51 is set (arranged) to 46 degrees or more, and the irradiation angle φ of the probe light 61 with respect to the central axis 11 is 92 The dead space DS which can not be inspected in the circumferential surface 4a can be reduced or eliminated by irradiating the front side 16 with a degree or more.
　本願の発明者は、プローブ光６１を中心軸１１に対して直交する方向ではなく、前方１６に照射しても、中心軸１１に対し平行な検査対象面（被検査面）４ａ、例えば、中心軸１１を中心とする円筒状の内面４ａからの反射光６２が得られることを見出した。さらに、反射光６２の強度が十分であれば、検査対象面４ａの凹凸を含めた状態を検査できることを見出した。さらに、反射光６２の平均濃度値が、最も強度が高いプローブ光６１が中心軸１１に対して直交するように出射されたときの約１／１０未満になると、画像処理のためのデータ量が不足し、表面検査に必要な情報が得られにくいことを見出した。 Even if the inventor of the present application irradiates the probe light 61 not in the direction orthogonal to the central axis 11 but in the forward direction 16, the inspection object surface (inspection surface) 4 a parallel to the central axis 11, for example, the center It has been found that the reflected light 62 from the cylindrical inner surface 4a centered on the axis 11 is obtained. Furthermore, it has been found that if the intensity of the reflected light 62 is sufficient, it is possible to inspect the state including the unevenness of the surface 4a to be inspected. Furthermore, when the average density value of the reflected light 62 is less than about 1/10 of that when the highest intensity probe light 61 is emitted orthogonal to the central axis 11, the amount of data for image processing is increased. It was found that there was a shortage and it was difficult to obtain the information necessary for surface inspection.
　図７に、反射面５１の角度θを変化させたときの反射光６２の平均濃度値の比（平均濃度比）の変化を示している。この測定においては、検査ヘッド１０に装着されている反射面５１の角度θを直に変える代わりに、検査対象（測定対象）である面４の角度（傾斜角度）βを変えて、取得できる反射光６２の平均濃度値を測定し、傾斜角度βが０の値を１００として％で示している。測定に使用したレーザー出力は３００μＷ、スポット径は約５０μｍである。 FIG. 7 shows a change in the ratio (average density ratio) of the average density values of the reflected light 62 when the angle θ of the reflective surface 51 is changed. In this measurement, instead of changing the angle θ of the reflection surface 51 mounted on the inspection head 10 directly, the angle (tilt angle) β of the surface 4 to be inspected (measurement object) can be changed to obtain the reflection The average density value of the light 62 is measured, and the inclination angle β is shown in% assuming that the value of 0 is 100. The laser power used for the measurement is 300 μW, and the spot diameter is about 50 μm.
　反射面５１の角度θ、プローブ光６１の照射角度φおよび傾斜角度βとの関係は以下の式（３）および（４）で表される。
φ＝２×θ　　　　・・・（３）
β＝２×θ－９０　・・・（４） The relationship between the angle θ of the reflecting surface 51, the irradiation angle φ of the probe light 61, and the inclination angle β is expressed by the following equations (3) and (4).
φ = 2 × θ (3)
β = 2 × θ-90 (4)
　さらに、反射面５１の中心軸１１との交点５１ｃとプローブ光６１により照射可能な点の中心軸方向の距離Ｌｃと、中心軸１１からの半径方向との距離Ｌｒとは以下の式（６）で表される。
Ｌｃ／Ｌｒ＝ｔａｎ（２×θ－９０）・・・（５） Furthermore, the distance Lc between the intersection 51c of the reflecting surface 51 with the central axis 11, the distance Lc in the central axis direction of the point that can be irradiated by the probe light 61, and the distance Lr between the central axis 11 and the radial direction is the following formula (6) Is represented by
Lc / Lr = tan (2 × θ-90) (5)
　図７の測定結果より、傾斜角βが２０度を超えると平均濃度比は約９％を下回ることが分かる。したがって、反射面５１の角度θは５５度以下（照射角度φは１１０度以下）であることが望ましい。特に、傾斜角βが２０度を超えると平均濃度比の減衰率が大きくなる。さらに、デッドスペースＤＳを削減するという観点から角度θは４６度以上であることが望ましい。したがって、反射面５１の角度θは、式（１）で示したように、４６度以上、５５度以下であることが望ましい。また、プローブ光６１の照射角度φは、式（２）で示したように、９２度以上、１１０度以下であることが望ましい。この条件で、Ｌｃ／Ｌｒは０．３６であり、検査対象の中空部３の内径が３０ｍｍ、検査ヘッド１０の径が１４ｍｍ程度、デッドスペースＤＳが５ｍｍであれば、検査対象の中空部３の周面４ａを底面４ｂの境界４ｃに至るまで検査することができる。 From the measurement results of FIG. 7, it is understood that the average concentration ratio falls below about 9% when the inclination angle β exceeds 20 degrees. Therefore, it is desirable that the angle θ of the reflective surface 51 be 55 degrees or less (the irradiation angle φ be 110 degrees or less). In particular, when the inclination angle β exceeds 20 degrees, the attenuation rate of the average density ratio becomes large. Furthermore, it is desirable that the angle θ be 46 degrees or more from the viewpoint of reducing the dead space DS. Therefore, it is desirable that the angle θ of the reflecting surface 51 be 46 degrees or more and 55 degrees or less, as shown in the equation (1). The irradiation angle φ of the probe light 61 is preferably 92 degrees or more and 110 degrees or less, as shown in the equation (2). Under this condition, if Lc / Lr is 0.36, the inside diameter of the hollow portion 3 to be inspected is about 30 mm, the diameter of the inspection head 10 is about 14 mm, and the dead space DS is 5 mm, the hollow portion 3 to be inspected is The circumferential surface 4a can be inspected up to the boundary 4c of the bottom surface 4b.
　図７の測定結果に示すように、反射面５１の角度θが５３．５度以下であれば、照射角度φは１０７度以下となり、平均濃度比は３３％を超え、反射光６２の強度として最大強度の１／３以上を確保できる。このため、検査範囲が広く、かつ、反射光６２の強度も高い、表面検査にさらに適した検査ヘッド１０および検査ヘッド１０を提供できる。このときのＬｃ／Ｌｒは０．３１であり、上記条件であれば、十分に周面４ａを底面４ｂの境界に至るまで検査できる。 As shown in the measurement results of FIG. 7, if the angle θ of the reflecting surface 51 is 53.5 degrees or less, the irradiation angle φ is 107 degrees or less, and the average density ratio exceeds 33%, and the intensity of the reflected light 62 It can secure 1/3 or more of the maximum strength. Therefore, it is possible to provide the inspection head 10 and the inspection head 10 which are more suitable for surface inspection, which have a wide inspection range and high intensity of the reflected light 62. Lc / Lr at this time is 0.31, and under the above conditions, the circumferential surface 4a can be inspected sufficiently to reach the boundary of the bottom surface 4b.
　さらに、反射面５１の角度θが５２度以下であれば、照射角度φは１０４度以下となり、平均濃度比は５０％を超え、反射光６２の強度として最大強度の１／２以上を確保できる。このため、検査範囲が広く、反射光６２の強度がさらに高い、表面検査にさらに適した検査ヘッド１０および検査ヘッド１０を提供できる。このときのＬｃ／Ｌｒは０．２５であり、上記条件であれば、十分に周面４ａを底面４ｂの境界４ｃに至るまで検査できる。 Furthermore, if the angle θ of the reflecting surface 51 is 52 degrees or less, the irradiation angle φ is 104 degrees or less, the average density ratio exceeds 50%, and the intensity of the reflected light 62 can secure 1/2 or more of the maximum intensity. . Therefore, it is possible to provide the inspection head 10 and the inspection head 10 that are more suitable for surface inspection, in which the inspection range is wide and the intensity of the reflected light 62 is higher. Lc / Lr at this time is 0.25, and under the above conditions, the circumferential surface 4a can be sufficiently inspected up to the boundary 4c of the bottom surface 4b.
　さらに、反射面５１の角度θが５０度以下であれば、照射角度φは１００度以下となり、平均濃度比は６５％を超える。このため、強度のさらに高い反射光６２を得ることができ、表面検査にさらに適した検査ヘッド１０および検査ヘッド１０を提供できる。このときのＬｃ／Ｌｒは０．１８であり、上記条件であれば、十分に周面４ａを底面４ｂの境界４ｃに至るまで検査できる。 Furthermore, if the angle θ of the reflective surface 51 is 50 degrees or less, the irradiation angle φ is 100 degrees or less, and the average density ratio exceeds 65%. Therefore, the reflected light 62 with higher intensity can be obtained, and the inspection head 10 and the inspection head 10 more suitable for surface inspection can be provided. Lc / Lr at this time is 0.18, and under the above conditions, the circumferential surface 4a can be inspected sufficiently to reach the boundary 4c of the bottom surface 4b.
　反射面５１の角度θの下限は、非９０度（非直角）でプローブ光６１を照射できればよく、角度θは４５度を超えていればよく、照射角度φも９０度を超えていればよい。しかしながら、デッドスペースＤＳを削減することを考えると、角度θは４６度（照射角度φは９２度）以上であることが望ましく、角度θは４８度（照射角度φは９６度）以上であることが望ましい。さらに、上記のような中空部３の周面４ａの全域を検査することを考慮すると、角度θは４９度（照射角度φは９８度）以上であることが好ましく、角度θは５０度（照射角度φは１００度）以上であることがさらに好ましい。 The lower limit of the angle θ of the reflecting surface 51 may be non-90 degrees (non-right angle) as long as the probe light 61 can be irradiated, the angle θ may be more than 45 degrees, and the irradiation angle φ may be more than 90 degrees . However, in consideration of reducing the dead space DS, the angle θ is preferably 46 degrees (the irradiation angle φ is 92 degrees) or more, and the angle θ is 48 degrees (the irradiation angle φ is 96 degrees) or more Is desirable. Furthermore, in consideration of inspecting the entire area of the circumferential surface 4a of the hollow portion 3 as described above, the angle θ is preferably 49 degrees (the irradiation angle φ is 98 degrees) or more, and the angle θ is 50 degrees (irradiation More preferably, the angle φ is 100 degrees or more.
　また、この検査装置１および検査ヘッド１０、およびそれらを用いた検査方法においては、検査対象の面４に対しプローブ光６１を非直角に照射することにより、検査対象面が中心軸に平行に底面まで続いていても、検査可能な範囲を拡大することができる。検査対象の面４とプローブ光６１との成す角（傾斜角）βは、上述したように、２０度以下であることが好ましく、１７度以下であることがさらに好ましく、１４度以下であることがいっそう好ましい。また、検査範囲を拡張することを考えると、傾斜角βは、２度以上であることが好ましく、６度以上であることがさらに好ましく、１０度以上であることも有効である。 Further, in the inspection apparatus 1 and the inspection head 10 and the inspection method using them, the surface to be inspected is a bottom surface parallel to the central axis by irradiating the probe light 61 non-perpendicularly to the surface 4 to be inspected. Even if it continues, it is possible to expand the inspection range. As described above, the angle (tilt angle) β between the surface 4 to be inspected and the probe light 61 is preferably 20 degrees or less, more preferably 17 degrees or less, and 14 degrees or less. Is more preferred. Further, in consideration of expanding the inspection range, the inclination angle β is preferably 2 degrees or more, more preferably 6 degrees or more, and it is also effective that it is 10 degrees or more.
　図８に、検査装置１を用いて検査対象物（被検査物）の表面（被検査面）を検査する方法の一例を示している。被検査面（検査対象面）４の一例は、有底で中空の円筒状の面、例えば、シリンダーの内面（側面）である。ステップ１１１において、反射面５１の角度θを４５度にセットし、プローブ光６１の照射角φを９０度に設定する。反射面５１の角度θは４５度でなくてもよいが、通常の検査では平均濃度比の高い角度θを採用することが好ましい。ステップ１１２において、検査ヘッド１０を検査対象の中空部に挿入して、中空部３の側面（内面、被検査面）４ａの検査を開始する。ステップ１１３において、検査ヘッド１０が最深部、すなわち、中空部３の底面４ｂに対して所定のクリアランスが確保できる位置に到達すると、ステップ１１４において、アクチュエータ５９を用いて反射面５１の角度θを４６度以上に、連続的にまたは断続的に変更し、プローブ光６１の照射角φを９２度以上に変更して、中空部３の側面４ａの検査を継続する。ステップ１１５において、側面４ａと底面４ｂとの境界４ｃを検出すると検査を終了する。 FIG. 8 shows an example of a method of inspecting the surface (inspection surface) of an inspection object (inspection object) using the inspection device 1. An example of the surface to be inspected (surface to be inspected) 4 is a hollow cylindrical surface with a bottom, for example, the inner surface (side surface) of a cylinder. In step 111, the angle θ of the reflecting surface 51 is set to 45 degrees, and the irradiation angle φ of the probe light 61 is set to 90 degrees. Although the angle θ of the reflecting surface 51 may not be 45 degrees, it is preferable to adopt the high angle θ of the average density ratio in a normal inspection. In step 112, the inspection head 10 is inserted into the hollow portion to be inspected, and inspection of the side surface (inner surface, inspection surface) 4a of the hollow portion 3 is started. In step 113, when the inspection head 10 reaches a deepest portion, that is, a position where a predetermined clearance can be secured with respect to the bottom surface 4b of the hollow portion 3, in step 114, the angle θ of the reflection surface 51 is 46 using the actuator 59. The irradiation angle φ of the probe light 61 is changed to 92 degrees or more, continuously or intermittently, and inspection of the side surface 4a of the hollow portion 3 is continued. In step 115, when the boundary 4c between the side surface 4a and the bottom surface 4b is detected, the inspection is ended.
　検査装置１を用いた検査方法は、反射面５１の角度θを可変にする代わりに、ステップ１１１において、最深部において境界４ｃが検出できる角度に反射面５１の角度θを予め設定し、プローブ光６１の照射角を９２度以上に予めセットしてから、検査ヘッド１０を徐々に中空部３に挿入しながら側面４ａの検査を行い、境界４ｃを検出したら検査を終了するという方法であってもよい。このような方法により、底面４ｂとの境界４ｃまで中心軸１１に平行な側面４ａが続くような中空部３であっても、側面４ａを境界４ｃに至るまでプローブ光６１を照射して、側面４ａの状態を検査することができる。 In the inspection method using the inspection apparatus 1, instead of making the angle θ of the reflection surface 51 variable, in step 111, the angle θ of the reflection surface 51 is set in advance to an angle at which the boundary 4c can be detected at the deepest portion. Even if the irradiation angle of 61 is set in advance to 92 degrees or more, the side 4a is inspected while inserting the inspection head 10 gradually into the hollow portion 3, and the inspection is ended if the boundary 4c is detected. Good. By such a method, even in the hollow portion 3 in which the side surface 4a parallel to the central axis 11 continues to the boundary 4c with the bottom surface 4b, the side surface 4a is irradiated with the probe light 61 until the boundary 4c is reached. The status of 4a can be checked.
　以上に説明したように、本発明に係る検査装置（検査システム）１は、検査ヘッド（検査プローブ）１０の先端１４ａより、検査用の光（プローブ光）６１を非９０度方向に前方１６へ向けて照射することができる。このため、検査ヘッド１０のデッドスペースをなくす、あるいは小さくすることが可能である。したがって、検査システム１により、底面４ｂを備えた中空の空間３の周面４ａを検査することにより、底面４ｂまで、あるいは底面４ｂにさらに近い部分まで周面４ａを検査し、その表面の状態を評価することができる。 As described above, the inspection apparatus (inspection system) 1 according to the present invention moves the light (probe light) 61 for inspection forward 16 in the non-90 degrees direction from the tip 14 a of the inspection head (inspection probe) 10 It can be directed towards. Therefore, the dead space of the inspection head 10 can be eliminated or reduced. Therefore, by inspecting the circumferential surface 4a of the hollow space 3 provided with the bottom surface 4b by the inspection system 1, the circumferential surface 4a is inspected up to the bottom surface 4b or a portion closer to the bottom surface 4b. It can be evaluated.

Claims (15)

  1. 　中心軸に沿って棒状に延びた中空の検査ヘッドであって、前記中心軸の周りに回転される検査ヘッドと、
    　前記検査ヘッド内を通じて、前記中心軸に沿って検査用のレーザー光を供給し、前記中心軸に沿って戻された被検査物の被検査面からの反射光を受光する光学システムと、
    　前記検査ヘッドの先端近傍または先端に配置された光学素子であって、前記検査用のレーザー光を前記被検査物に向けて出射するとともに前記反射光を前記中心軸方向に導く光学素子とを有し、
    　前記光学素子は、前記中心軸に対して、法線が角度θで傾いた状態で前記検査用のレーザー光を前記被検査面に向けて出射可能な反射面を含み、前記角度θが以下の条件を満たす、検査システム。
    　４６度≦θ≦５５度     A hollow inspection head rod-shaped along a central axis, wherein the inspection head is rotated about said central axis;
    An optical system for supplying a laser beam for inspection along the central axis through the inside of the inspection head and receiving reflected light from an inspection surface of the inspection object returned along the central axis;
    An optical element disposed near or at the tip of the inspection head, the optical element emitting the laser light for inspection toward the object to be inspected and guiding the reflected light in the central axis direction; And
    The optical element includes a reflection surface capable of emitting the inspection laser light toward the inspection surface in a state where the normal is inclined at an angle θ with respect to the central axis, and the angle θ is An inspection system that meets the requirements.
    46 degrees ≦ θ ≦ 55 degrees
  2. 　請求項１において、
    前記角度θが以下の条件を満たす、検査システム。
    　４８度≦θ≦５３．５度     In claim 1,
    An inspection system in which the angle θ satisfies the following condition.
    48 degrees ≦ θ ≦ 53.5 degrees
  3. 　請求項２において、
    前記角度θが以下の条件を満たす、検査システム。
    　５０度≦θ≦５２度     In claim 2,
    An inspection system in which the angle θ satisfies the following condition.
    50 degrees ≦ θ ≦ 52 degrees
  4. 　請求項１ないし３のいずれかにおいて、
    　前記角度θを可変するユニットを有する、検査システム。     In any one of claims 1 to 3,
    An inspection system having a unit that varies the angle θ.
  5. 　中心軸に沿って棒状に延びた中空の検査ヘッドと、
    　前記検査ヘッドを前記中心軸の周りに回転する回転ユニットと、
    　前記検査ヘッド内を通じて、前記中心軸に沿って検査用のレーザー光を供給し、前記中心軸に沿って戻された被検査物の被検査面からの反射光を受光する光学システムと、
    　前記検査ヘッドの先端近傍または先端に配置された光学素子であって、前記中心軸に対して、前記検査用のレーザー光を、角度φで前記被検査面に向けて出射するとともに前記反射光を前記中心軸方向に導く光学素子とを有し、前記角度φが以下の条件を満たす、検査システム。
    　９２度≦φ≦１１０度     A hollow inspection head extending in a rod-like manner along the central axis;
    A rotating unit that rotates the inspection head around the central axis;
    An optical system for supplying a laser beam for inspection along the central axis through the inside of the inspection head and receiving reflected light from an inspection surface of the inspection object returned along the central axis;
    An optical element disposed near or at the tip of the inspection head, wherein the laser beam for inspection is emitted toward the surface to be inspected at an angle φ with respect to the central axis and the reflected light is emitted. An inspection system, comprising: an optical element that leads in the central axis direction, and the angle φ satisfies the following condition.
    92 degrees ≦ φ ≦ 110 degrees
  6. 　請求項５において、
    　前記角度φを可変するユニットを有する、検査システム。     In claim 5,
    The inspection system which has a unit which changes the said angle (phi).
  7. 　請求項１ないし６のいずれかにおいて、
    　前記検査ヘッドの先端近傍から先端に達するように設けられた開口を有する、検査システム。     In any one of claims 1 to 6,
    An inspection system having an opening provided from near the tip of the inspection head to the tip.
  8. 　請求項１ないし７のいずれかにおいて、さらに、
    　前記検査ヘッドを前記中心軸の周りに回転する回転ユニットを有する検査システム。     In any one of claims 1 to 7, further,
    An inspection system comprising a rotation unit for rotating the inspection head around the central axis.
  9. 　請求項１ないし８のいずれかにおいて、
    　前記被検査物は、前記検査ヘッドが挿入される中空部分または凹みを含み、
    　前記検査ヘッドと前記被検査物とを前記中心軸に沿って相対的に移動する移動ユニットをさらに有する、検査システム。     In any one of claims 1 to 8,
    The inspection object includes a hollow portion or a recess into which the inspection head is inserted,
    An inspection system, further comprising: a moving unit relatively moving the inspection head and the inspection object along the central axis.
  10. 　請求項１ないし９のいずれかにおいて、
    　前記光学素子は、前記中心軸に対し平行な前記被検査面に向けて前記検査用のレーザー光を出射する、検査システム。     In any one of claims 1 to 9,
    The inspection system, wherein the optical element emits the inspection laser light toward the inspection surface parallel to the central axis.
  11. 　中心軸に沿って棒状に延びた中空の検査ヘッドであって、前記中心軸の周りに回転される検査ヘッドを含む検査システムを用いて、被検査物の被検査面の状態を検査することを有する方法であって、
    　前記検査システムは、前記検査ヘッド内を通じて、前記中心軸に沿って検査用のレーザー光を供給し、前記中心軸に沿って戻された被検査面からの反射光を受光する光学システムと、前記検査ヘッドの先端近傍または先端に配置された光学素子であって、前記検査用のレーザー光を前記被検査物に向けて出射するとともに前記反射光を前記中心軸方向に導く光学素子とをさらに有し、
    　前記検査することは、
    　前記光学素子の反射面を、前記中心軸に対して、法線が角度θで傾いた状態で前記検査用のレーザー光を前記被検査面に向けて出射することを含み、前記角度θが以下の条件を満たす、方法。
    　４６度≦θ≦５５度     A hollow inspection head rod-shaped extending along a central axis, the inspection system comprising an inspection head rotated about said central axis to inspect the condition of the surface to be inspected of the inspection object A method of having
    The inspection system supplies laser light for inspection along the central axis through the inspection head, and an optical system that receives reflected light from the surface to be inspected returned along the central axis, and An optical element disposed near or at the tip of the inspection head, further comprising an optical element that emits the inspection laser light toward the inspection object and guides the reflected light in the central axis direction. And
    The inspection is
    The laser light for inspection is emitted toward the inspection surface in a state where the normal is inclined at an angle θ with respect to the central axis, and the angle θ is How to meet the requirements of
    46 degrees ≦ θ ≦ 55 degrees
  12. 　請求項１１において、
    　前記出射することは、前記角度θを変えることを含む、方法。     In claim 11,
    The emitting comprises changing the angle θ.
  13. 　中心軸に沿って棒状に延びた中空の検査ヘッドであって、前記中心軸の周りに回転される検査ヘッドを含む検査システムを用いて、被検査物の被検査面の状態を検査することを有する方法であって、
    　前記検査システムは、前記検査ヘッド内を通じて、前記中心軸に沿って検査用のレーザー光を供給し、前記中心軸に沿って戻された前記被検査面からの反射光を受光する光学システムと、前記検査用のレーザー光を前記被検査物に向けて出射するとともに前記反射光を前記中心軸方向に導く光学素子とを有し、
    　前記検査することは、
    　前記光学素子により、前記中心軸に対して、前記検査用のレーザー光を、角度φで前記被検査面に向けて出射することを含み、前記角度φが以下の条件を満たす、方法。
    　９２度≦φ≦１１０度     A hollow inspection head rod-shaped extending along a central axis, the inspection system comprising an inspection head rotated about said central axis to inspect the condition of the surface to be inspected of the inspection object A method of having
    The inspection system supplies laser light for inspection along the central axis through the inspection head, and receives an optical beam reflected from the surface to be inspected returned along the central axis; And an optical element for emitting the inspection laser light toward the inspection object and guiding the reflected light in the central axis direction.
    The inspection is
    A method comprising emitting the inspection laser light toward the inspection surface at an angle φ with respect to the central axis by the optical element, wherein the angle φ satisfies the following condition.
    92 degrees ≦ φ ≦ 110 degrees
  14. 　請求項１１ないし１３のいずれかにおいて、
    　前記出射することは、前記中心軸に対し平行な前記被検査面に向けて前記検査用のレーザー光を出射することを含む、方法。     In any one of claims 11 to 13,
    The emitting includes emitting the inspection laser light toward the inspection surface parallel to the central axis.
  15. 　請求項１１ないし１３のいずれかにおいて、
    　前記出射することは、前記被検査物の前記中心軸に沿って延びた中空部分または凹みの前記中心軸に平行な前記被検査面に向けて前記検査用のレーザー光を出射することを含む、方法。     In any one of claims 11 to 13,
    The emitting includes emitting the inspection laser light toward the inspection surface parallel to the central axis of the hollow portion or recess extending along the central axis of the inspection object. Method.
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