WO2019037494A1 - 触控面板及其制作方法、触控显示装置 - Google Patents

触控面板及其制作方法、触控显示装置 Download PDF

Info

Publication number
WO2019037494A1
WO2019037494A1 PCT/CN2018/088136 CN2018088136W WO2019037494A1 WO 2019037494 A1 WO2019037494 A1 WO 2019037494A1 CN 2018088136 W CN2018088136 W CN 2018088136W WO 2019037494 A1 WO2019037494 A1 WO 2019037494A1
Authority
WO
WIPO (PCT)
Prior art keywords
touch
electrode
sub
sensing units
touch sub
Prior art date
Application number
PCT/CN2018/088136
Other languages
English (en)
French (fr)
Inventor
王静
张雷
许邹明
郑启涛
谢晓冬
张贵玉
李冬
郭总杰
Original Assignee
京东方科技集团股份有限公司
合肥鑫晟光电科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京东方科技集团股份有限公司, 合肥鑫晟光电科技有限公司 filed Critical 京东方科技集团股份有限公司
Priority to EP18804501.7A priority Critical patent/EP3683661A4/en
Priority to US16/305,980 priority patent/US10705640B2/en
Priority to JP2018563107A priority patent/JP7202187B2/ja
Publication of WO2019037494A1 publication Critical patent/WO2019037494A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412—Digitisers structurally integrated in a display
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416—Control or interface arrangements specially adapted for digitisers
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16—Constructional details or arrangements
    • G06F1/1613—Constructional details or arrangements for portable computers
    • G06F1/1633—Constructional details or arrangements of portable computers not specific to the type of enclosures covered by groups G06F1/1615 - G06F1/1626
    • G06F1/1637—Details related to the display arrangement, including those related to the mounting of the display in the housing
    • G06F1/1643—Details related to the display arrangement, including those related to the mounting of the display in the housing the display being associated to a digitizer, e.g. laptops that can be used as penpads
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04102—Flexible digitiser, i.e. constructional details for allowing the whole digitising part of a device to be flexed or rolled like a sheet of paper
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0448—Details of the electrode shape, e.g. for enhancing the detection of touches, for generating specific electric field shapes, for enhancing display quality

Definitions

  • the present disclosure relates to the field of display technologies, and in particular, to a touch panel, a touch display device, and a method of fabricating the touch panel.
  • an embodiment of the present disclosure provides a touch panel.
  • the touch panel includes: a base substrate; a plurality of touch sensing units arranged in an array on the base substrate, each of the touch sensing units including a first touch sub-electrode arranged along a first direction, Two second touch sub-electrodes disposed on two sides of the first touch sub-electrode along the second direction, and electrodes disposed between each of the second touch sub-electrodes and the first touch sub-electrode a slit; wherein two of the second touch sub-electrodes in each of the touch sensing units are electrically connected via at least two first bridges.
  • the electrode slit has a sawtooth shape.
  • a first slit and at least two second bridges are disposed, the at least two second bridges spanning the The first slit is electrically connected to the two first touch sub-electrodes of the two touch sensing units.
  • a first slit and at least two second bridges are disposed between the two touch sensing units adjacent in the first direction.
  • a second slit and at least two third bridges are disposed, the at least two third bridges spanning the The second slit is electrically connected to the two second touch sub-electrodes directly adjacent to the two touch sensing units.
  • a second slit and at least two third bridges are disposed between the two touch sensing units adjacent in the second direction.
  • the length direction of the second bridge and/or the length direction of the third bridge are inclined to the first direction.
  • the second bridging and/or the third bridging inclined to the first direction (or the second direction) can further enhance the erasing effect without affecting the conductivity between adjacent touch sensing units .
  • the first slit and the second slit both have a sawtooth shape.
  • each of the touch sensing units further includes a floating electrode, the floating electrode is located between the adjacent first touch sub-electrode and the second touch sub-electrode, and the floating electrode is The first touch sub-electrode and the second touch sub-electrode are insulated; wherein the first touch sub-electrode, the second touch sub-electrode and the floating electrode are disposed in the same layer.
  • the floating signal of the first touch sub-electrode and the second touch sub-electrode can be used to shield the electrical signal interference, thereby improving the touch sensitivity of the touch panel.
  • the floating electrode can also be used to control the initial capacitance and the capacitance increment of the touch sensing unit, thereby adjusting the electrical parameters of the touch sensing unit.
  • the first touch sub-electrode, the second touch sub-electrode, and the floating electrode in the touch panel may be fabricated using a single mask process, thereby simplifying the process steps and Reduce the overall thickness of the touch panel.
  • the floating electrode has a serrated edge.
  • the materials of the first touch sub-electrode, the second touch sub-electrode, the floating electrode, and the first bridge are all transparent conductive materials.
  • the second and third bridges can also be fabricated using the same transparent conductive material.
  • the first touch sub-electrode, the second touch sub-electrode, the floating electrode, the first bridging, the second bridging, and the third are fabricated by using a transparent conductive material.
  • the bridge bridge can further eliminate the reflection of the ambient light by the touch sensing unit, thereby enhancing the shadow elimination effect.
  • the touch panel provided by the embodiment of the present disclosure has the above structural features, the defect that the transparent conductive material is easily broken when bent is advantageously eliminated.
  • the transparent conductive material is indium tin oxide or indium zinc oxide.
  • a process such as magnetron sputtering, chemical vapor deposition, or sol-gel may be used to form an indium tin oxide or indium zinc oxide film layer, and the first touch is fabricated using a mask process.
  • an embodiment of the present disclosure further provides a touch display device.
  • the touch display device includes the touch panel described in the above embodiments.
  • an embodiment of the present disclosure further provides a method of fabricating a touch panel.
  • the method includes: providing a substrate; arraying a plurality of touch sensing units on the substrate, each of the touch sensing units including a first touch sub-electrode disposed along a first direction Two second touch sub-electrodes disposed on two sides of the first touch sub-electrode; and an electrode slit disposed between each of the second touch sub-electrodes and the first touch sub-electrode; At least two first bridges are disposed, and each of the at least two first bridges is electrically connected to two second touch sub-electrodes in each of the touch sensing units.
  • the method further includes: providing a first slit and at least two second bridges between the two touch sensing units adjacent in the first direction, the at least two second The bridge spans the first slit and electrically connects the two first touch sub-electrodes of the two touch sensing units.
  • the method further includes: providing a second slit and at least two third bridges between the two touch sensing units adjacent in the second direction, the at least two third The bridge spans the second slit and electrically connects two directly adjacent second touch sub-electrodes of the two touch sensing units.
  • the method further includes: providing a floating electrode in each touch sensing unit, the floating electrode being located between the adjacent first touch sub-electrode and the second touch sub-electrode, and The floating electrode is insulated from the first touch sub-electrode and the second touch sub-electrode; wherein the first touch sub-electrode, the second touch sub-electrode and the floating electrode are in the same layer Settings.
  • the floating electrode has a serrated edge.
  • the first touch sub-electrode, the second touch sub-electrode, and the floating electrode in the touch panel are fabricated by using a mask process.
  • the step of arranging the plurality of touch sensing units on the substrate substrate comprises: forming the first touch sub-electrode and the second touch on the base substrate by using a photolithography process a pattern of the sub-electrodes; the step of disposing at least two first bridges includes: forming a first photoresist layer covering a pattern of the first touch sub-electrode and the second touch sub-electrode, The first photoresist layer forms a via hole corresponding to a position of a bridge point of the first bridge, and fills the via hole with a conductive material and forms the first bridge.
  • the method further includes: forming metal traces around the pattern of the first touch sub-electrode and the second touch sub-electrode pattern.
  • FIG. 1 is a schematic structural diagram of a touch panel according to an embodiment of the present disclosure
  • FIG. 2 is a schematic structural view of a touch sensing unit of the touch panel shown in FIG. 1;
  • FIG. 3 is a partial view of the touch sensing unit shown in FIG. 2;
  • FIG. 4 is a schematic structural diagram of two adjacent touch sensing units according to an embodiment of the present disclosure.
  • FIG. 5 is a partial view of the adjacent two touch sensing units shown in FIG. 4;
  • FIG. 6 is a schematic structural diagram of four adjacent touch sensing units according to an embodiment of the present disclosure.
  • FIG. 7 is a flowchart of a method of fabricating a touch panel according to an embodiment of the disclosure.
  • FIGS. 8a-8d are schematic diagrams showing steps of a method of fabricating a touch panel according to an embodiment of the present disclosure.
  • the inventors realized that when designing a touch sensor pattern, it is necessary to take into account the shadow elimination effect and bending resistance of the bridge.
  • the metal bridge has good ductility, but the shadow elimination effect is poor.
  • a bridge such as an ITO material has a good shadowing effect, but is easily broken when bent. Therefore, it is desirable to provide a touch sensor design that combines both shadow cancellation and bending resistance.
  • embodiments of the present disclosure provide a touch panel, a touch display device, and a method for fabricating the touch panel, which improve the shadow elimination effect of the touch panel and increase the ability to release stress.
  • FIG. 1 is a schematic structural diagram of a touch panel according to an embodiment of the present disclosure.
  • 2 is a schematic structural view of a touch sensing unit of the touch panel shown in FIG. 1 .
  • 3 is a partial view of a region A in the touch sensing unit shown in FIG. 2.
  • the touch panel 100 includes a base substrate 10 and a plurality of touch sensing units 20 arranged in an array on the base substrate 10 .
  • Each of the touch sensing units 20 includes a first touch sub-electrode 201 arranged along a first direction X and two second touches disposed on two sides of the first touch sub-electrode 201 along a second direction Y. a sub-electrode 202, and an electrode slit 221 disposed between each of the second touch sub-electrode 202 and the first touch sub-electrode 201; wherein each of the two touch sensing units 20 is second
  • the touch sub-electrode 202 is electrically connected via at least two first bridges 203.
  • a via plug 205 is provided in the through hole 204 at a position where each of the bridge 203 is in contact with the second touch sub-electrode 202 as shown in FIG.
  • a zigzag electrode slit can be disposed between the first touch sub-electrode 201 and the second touch sub-electrode 202 (as shown in FIG. 3). 206 indicates).
  • the two second touch sub-electrodes 202 in each of the touch sensing units 20 are electrically connected by at least two bridges 203.
  • each of the vias 203 has a via plug 205 in the through hole 204 at a position in contact with the second touch sub-electrode 202.
  • the use of at least two bridges 203 increases the ability of the touch sensing unit 20 to release stress.
  • the touch panel 100 of the present disclosure is bent in any direction, at least two bridges 203 in each touch sensing unit 20 can effectively release stress, and the two second touch sub-electrodes 202 are avoided.
  • the disconnection between the two increases the reliability of the flexible touch panel.
  • various sizes of touch sensing units can be fabricated to support touch chips having various channel numbers and touch schemes.
  • the routing area 30 may be disposed at the periphery of the plurality of touch sensing units 20 arranged in the array.
  • a metal trace pattern may be disposed inside the trace area 30 for connecting the plurality of touch sensing units 20 to an external circuit.
  • FIG. 4 is a schematic structural diagram of two adjacent touch sensing units according to an embodiment of the present disclosure.
  • FIG. 5 is a partial view of a region B in the touch sensing unit shown in FIG. 4.
  • a first slit 207 and at least two second bridges 208 are disposed between the two touch sensing units 20 adjacent to the first direction X.
  • the at least two second bridges 208 span the first slit 207 and electrically connect the two first touch sub-electrodes 201 of the two touch sensing units 20 .
  • the electrode slit 221 has a sawtooth shape. Due to the reflection of light, the edge of the electrode slit 221 (ie, the edge of the first touch sub-electrode or the second touch sub-electrode) exhibits a zigzag pattern, thereby further improving the image subtraction effect. Those skilled in the art will appreciate that the electrode slits 221 may also have other shapes such as straight lines or curves.
  • a first slit 207 and at least two second bridges 208 are disposed between the two touch sensing units 20 adjacent in the first direction X.
  • FIG. 6 is a schematic structural diagram of four adjacent touch sensing units according to an embodiment of the present disclosure.
  • a second slit 209 and at least two third bridges 210 are disposed between the two touch sensing units 20 adjacent to the second direction Y.
  • the at least two third bridges 210 span the second slit 209 and electrically connect the two second touch sub-electrodes 202 directly adjacent to the two touch sensing units 20 .
  • a second slit 209 and at least two third bridges 210 are disposed between the two touch sensing units 20 adjacent in the second direction Y. Thereby, the shadow elimination effect of the touch panel is further improved. And enhancing the bending resistance of the touch panel along the first direction.
  • the length direction of the second bridge 208 and/or the length direction of the third bridge 210 are inclined to the first direction X.
  • the second bridging and/or the third bridging inclined to the first direction (or the second direction) can further enhance the erasing effect without affecting the conductivity between adjacent touch sensing units .
  • the first slit 207 and the second slit 209 both have a sawtooth shape. Due to the reflection of light, the edges of the first slit 207 and the second slit 209 exhibit a zigzag pattern, thereby further improving the image subtraction effect.
  • the first slit 207 and the second slit 209 may also have other shapes such as straight lines or curves.
  • each of the touch sensing units 20 further includes a floating electrode 211, and the floating electrode 211 is located at the adjacent first touch sub-electrode 201 and The second touch sub-electrode 202 is insulated from the first touch sub-electrode 201 and the second touch sub-electrode 202; wherein the first touch sub-electrode 201, The second touch sub-electrode 202 and the floating electrode 211 are disposed in the same layer.
  • two or more objects “same layer setting” means that the two or more objects are disposed on the same surface or are sandwiched in the same layer.
  • the floating electrode 211 insulated from the first touch sub-electrode 201 and the second touch sub-electrode 202 can shield electrical signal interference, thereby improving the touch sensitivity of the touch panel.
  • the floating electrode 211 since the use of the floating electrode 211 increases the total area of the electrode, the floating electrode 211 can be used to control the initial capacitance and the capacitance increment of the touch sensing unit 20, thereby adjusting the touch sensing.
  • the first touch sub-electrode, the second touch sub-electrode, and the floating electrode in the touch panel may be fabricated using a single mask process, thereby simplifying the process steps and Reduce the overall thickness of the touch panel.
  • the floating electrode 211 has a zigzag edge.
  • the materials of the first touch sub-electrode 201, the second touch sub-electrode 202, the floating electrode 211, and the first bridge 203 are all transparent conductive materials.
  • the second bridge 208 and the third bridge 210 can also be fabricated using the same transparent conductive material.
  • the first touch sub-electrode, the second touch sub-electrode, the floating electrode, the first bridging, the second bridging, and the third are fabricated by using a transparent conductive material.
  • the bridge bridge can further eliminate the reflection of the ambient light by the touch sensing unit, thereby enhancing the shadow elimination effect.
  • the touch panel provided by the embodiment of the present disclosure has the above structural features, the defect that the transparent conductive material is easily broken when bent is advantageously eliminated.
  • the transparent conductive material is indium tin oxide or indium zinc oxide.
  • a process such as magnetron sputtering, chemical vapor deposition, or sol-gel may be used to form an indium tin oxide or indium zinc oxide film layer, and the first touch is fabricated using a mask process.
  • an embodiment of the present disclosure further provides a touch display device.
  • the touch display device includes the touch panel described in the above embodiments.
  • the touch display device can be any product or component having a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like.
  • a display function such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like.
  • the touch display device refer to the embodiment of the touch panel described above, and the repeated description is omitted.
  • an embodiment of the present disclosure further provides a method of fabricating a touch panel.
  • FIG. 7 is a flow chart of a method of fabricating a touch panel according to an embodiment of the disclosure.
  • the method 700 includes: S701, providing a substrate; S702 arraying a plurality of touch sensing units on the substrate, each of the touch sensing units including being arranged along a first direction a first touch sub-electrode and two second touch sub-electrodes disposed on two sides of the first touch sub-electrode along a second direction; at each second touch sub-electrode and the first touch An electrode slit is disposed between the sub-electrodes; and S703 is provided with at least two first bridges, each of the at least two first bridges electrically connecting two second touches in each of the touch sensing units Sub-electrode.
  • the two second touch sub-electrodes in each of the touch sensing units are electrically connected by at least two bridges.
  • Each of the bridges has a through hole in the through hole at a position in contact with the second touch sub-electrode. Therefore, with at least four independent bridge points, the bridging structure in the touch sensing unit will be less obvious, which improves the shadow elimination effect of the touch panel.
  • the use of at least two bridges increases the ability of the touch sensing unit to release stress.
  • the touch panel provided in the embodiment of the present disclosure is bent in any direction, at least two bridges in each touch sensing unit can effectively release stress, thereby avoiding an open circuit between the two second touch sub-electrodes. Increases the reliability of the flexible touch panel.
  • various sizes of touch sensing units can be fabricated to support touch chips having various channel numbers and touch schemes.
  • the method further includes: providing a first slit and at least two second bridges between the two touch sensing units adjacent in the first direction, the at least two second The bridge spans the first slit and electrically connects the two first touch sub-electrodes of the two touch sensing units.
  • a first slit and at least two second bridges are disposed between the two touch sensing units adjacent in the first direction.
  • the shadow elimination effect of the touch panel is further improved.
  • the first slit can be formed simultaneously with the first touch sub-electrode and the second touch sub-electrode, and the at least two second bridging can be combined with the at least two A bridge is formed at the same time.
  • the method further includes: providing a second slit and at least two third bridges between the two touch sensing units adjacent in the second direction, the at least two third The bridge spans the second slit and electrically connects two directly adjacent second touch sub-electrodes of the two touch sensing units.
  • a second slit and at least two third bridges are disposed between the two touch sensing units adjacent in the second direction.
  • the shadow elimination effect of the touch panel is further improved.
  • the second slit can be formed simultaneously with the first touch sub-electrode and the second touch sub-electrode, and the at least two third bridging can be combined with the at least two A bridge is formed at the same time.
  • the method further includes: providing a floating electrode in each touch sensing unit, the floating electrode being located between the adjacent first touch sub-electrode and the second touch sub-electrode, and The floating electrode is insulated from the first touch sub-electrode and the second touch sub-electrode; wherein the first touch sub-electrode, the second touch sub-electrode and the floating electrode are in the same layer Settings.
  • the floating signal of the first touch sub-electrode and the second touch sub-electrode can be used to shield the electrical signal interference, thereby improving the touch sensitivity of the touch panel.
  • the floating electrode can also be used to control the initial capacitance and the capacitance increment of the touch sensing unit, thereby adjusting the electrical parameters of the touch sensing unit.
  • the first touch sub-electrode, the second touch sub-electrode, and the floating electrode in the touch panel may be fabricated using a single mask process, thereby simplifying the process steps and Reduce the overall thickness of the touch panel.
  • the floating electrode has a serrated edge.
  • the first touch sub-electrode, the second touch sub-electrode, and the floating electrode in the touch panel are fabricated by using a mask process.
  • the first touch sub-electrode, the second touch sub-electrode, and the floating electrode in the touch panel may be fabricated using a single mask process, thereby simplifying the process steps and Reduce the overall thickness of the touch panel.
  • the step of arranging the plurality of touch sensing units on the substrate substrate comprises: forming the first touch sub-electrode and the second touch on the base substrate by using a photolithography process a pattern of the sub-electrodes; the step of disposing at least two first bridges includes: forming a first photoresist layer covering a pattern of the first touch sub-electrode and the second touch sub-electrode, The first photoresist layer forms a via hole corresponding to a position of a bridge point of the first bridge, and fills the via hole with a conductive material and forms the first bridge.
  • FIGS. 8a-8d are schematic diagrams showing steps of a method of fabricating a touch panel according to an embodiment of the present disclosure. An example of a method of manufacturing a touch panel will be described below with reference to FIGS. 8a to 8d. It will be understood by those skilled in the art that only the cross-sectional view of the structure of a single touch sensing unit in parallel with the second direction Y is exemplarily shown in FIGS. 8a-8d.
  • a pattern of the first touch sub-electrode 201 and the second touch sub-electrode 202 is formed on the base substrate 10 by a photolithography process.
  • the base substrate 10 may be a glass substrate or a cycloolefin copolymer (COP) film.
  • the material of the first touch sub-electrode 201 and the second touch sub-electrode 202 may be ITO.
  • an optical adhesive (OCA) 212 is coated on the pattern of the first touch sub-electrode 201 and the second touch sub-electrode 202, and a via hole 204 is formed at a bridge position by a photolithography process.
  • a conductive material such as ITO is formed inside the via hole 204 and the surface of the optical paste 212 by, for example, a sputtering process.
  • the first bridge 203 is then formed using a photolithography process.
  • the optical adhesive 213 is coated, thereby completing the structure of the touch sensing unit.
  • the method may further include: forming a metal walk around the pattern of the first touch sub-electrode and the second touch sub-electrode Line pattern.
  • the routing area 30 may also be disposed around the plurality of touch sensing units 20 of the array.
  • a metal trace pattern may be disposed inside the trace area 30 for connecting the plurality of touch sensing units 20 to an external circuit.
  • the two second touch sub-electrodes in each of the touch sensing units are composed of at least two frames.
  • the bridge is electrically connected.
  • Each of the bridges has a through hole in the through hole at a position in contact with the second touch sub-electrode. Therefore, with at least four independent bridge points, the bridge structure in the touch sensing unit will be less obvious, and the shadow elimination effect of the touch panel is improved. Moreover, the use of at least two bridges increases the ability of the touch sensing unit to release stress.
  • each touch sensing unit can effectively release stress, thereby avoiding an open circuit between the two second touch sub-electrodes. Increases the reliability of the flexible touch panel.
  • various sizes of touch sensing units can be fabricated to support touch chips having various channel numbers and touch schemes.

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Quality & Reliability (AREA)
  • Position Input By Displaying (AREA)

Abstract

本公开实施例提供了一种触控面板、触控显示装置以及所述触控面板的制作方法，改善了触控面板的消影效果并增加了释放应力的能力。所述触控面板包括：衬底基板；在所述衬底基板上阵列布置的多个触控感应单元，每个所述触控感应单元包括沿第一方向布置的第一触控子电极、沿第二方向布置在所述第一触控子电极两侧的两个第二触控子电极、以及设置在每个第二触控子电极和所述第一触控子电极之间的电极狭缝；其中每个所述触控感应单元中的两个第二触控子电极经由至少两个第一架桥电连接。

Description

触控面板及其制作方法、触控显示装置
相关申请
本申请要求保护在2017年8月21日提交的申请号为201710719365.3的中国专利申请的优先权，该申请的全部内容以引用的方式结合到本文中。
技术领域
本公开涉及显示技术领域，尤其涉及一种触控面板、触控显示装置以及所述触控面板的制作方法。
背景技术
近年来中小尺寸显示市场发生了巨大变化，有源矩阵发光二极管(AMOLED)面板出货量快速提升，发展势头迅猛。柔性显示技术为厂商提供了更多创新空间。为了广泛应用于高端手机及新一代穿戴显示***，需要在柔性显示产品上搭载触控传感器。目前主流的触控传感器的制作工艺包括GFF(Glass+Film+Film，玻璃+薄膜+薄膜)、GF(Glass+Film，玻璃+薄膜)等类型的架桥。在诸如GF架桥的触控传感器图案的设计过程中，采用金属架桥或者ITO架桥有很大的争议。采用金属架桥延展性虽好，但消影效果差。采用ITO架桥，消影效果好，但对应弯折时容易出现断裂(crack)。
公开内容
根据本公开的一个方面，本公开实施例提供了一种触控面板。所述触控面板包括：衬底基板；在所述衬底基板上阵列布置的多个触控感应单元，每个所述触控感应单元包括沿第一方向布置的第一触控子电极、沿第二方向布置在所述第一触控子电极两侧的两个第二触控子电极、以及设置在每个第二触控子电极和所述第一触控子电极之间的电极狭缝；其中每个所述触控感应单元中的两个第二触控子电极经由至少两个第一架桥电连接。
可选地，所述电极狭缝具有锯齿的形状。
可选地，在沿所述第一方向相邻的两个触控感应单元之间，设置 有第一狭缝以及至少两个第二架桥，所述至少两个第二架桥跨越所述第一狭缝并且电连接所述两个触控感应单元中的两个第一触控子电极。
在一些实施例中，在沿所述第一方向相邻的两个触控感应单元之间，设置有第一狭缝以及至少两个第二架桥。由此，进一步改善了触控面板的消影效果。并且增强了所述触控面板沿着所述第二方向的耐弯折性。
可选地，在沿所述第二方向相邻的两个触控感应单元之间，设置有第二狭缝以及至少两个第三架桥，所述至少两个第三架桥跨越所述第二狭缝并且电连接所述两个触控感应单元中直接相邻的两个第二触控子电极。
在一些实施例中，在沿所述第二方向相邻的两个触控感应单元之间，设置有第二狭缝以及至少两个第三架桥。由此，进一步改善了触控面板的消影效果。并且增强了所述触控面板沿着所述第一方向的耐弯折性。
可选地，所述第二架桥的长度方向和/或所述第三架桥的长度方向倾斜于所述第一方向。
利用倾斜于所述第一方向(或，第二方向)的第二架桥和/或第三架桥，可以进一步增强消影效果，并且不影响相邻的触控感应单元之间的导电性。
可选地，所述第一狭缝和第二狭缝都具有锯齿的形状。
可选地，每个所述触控感应单元进一步包括浮置电极，所述浮置电极位于相邻的第一触控子电极和第二触控子电极之间，并且所述浮置电极与所述第一触控子电极以及所述第二触控子电极绝缘；其中所述第一触控子电极、所述第二触控子电极和所述浮置电极同层设置。
在一些实施例中，利用与所述第一触控子电极和所述第二触控子电极绝缘的浮置电极，可以屏蔽电气信号干扰，从而提高触控面板的触控灵敏度。此外，还可以利用所述浮置电极来控制所述触控感应单元的初始电容和电容增量，从而调整所述触控感应单元的电气参数。在一些实施例中，可以使用一次掩模工艺来制作所述触控面板中的所述第一触控子电极、所述第二触控子电极和所述浮置电极，从而简化工艺步骤并减小触控面板的整体厚度。
可选地，所述浮置电极具有锯齿形边缘。
利用具有锯齿形边缘的浮置电极，进一步改善了消影效果。
可选地，所述第一触控子电极、所述第二触控子电极、所述浮置电极和所述第一架桥的材料均为透明导电材料。本领域技术人员能够理解，还可以使用相同的透明导电材料来制作所述第二架桥和第三架桥。
在一些实施例中，利用透明导电材料来制作所述第一触控子电极、所述第二触控子电极、所述浮置电极、所述第一架桥、第二架桥和第三架桥，能够进一步消除触控感应单元对环境光的反射，从而增强消影效果。并且，由于本公开实施例提供的触控面板具有上述结构性特征，有利地消除了透明导电材料在弯折时容易断裂的缺陷。
可选地，所述透明导电材料为氧化铟锡或氧化铟锌。
在一些实施例中，可以使用诸如磁控溅射、化学气相沉积或溶胶-凝胶的工艺来形成氧化铟锡或氧化铟锌膜层，并利用掩模工艺来制作所述第一触控子电极、所述第二触控子电极、所述浮置电极、所述第一架桥、第二架桥以及第三架桥。
根据本公开的另一方面，本公开实施例还提供了一种触控显示装置。所述触控显示装置包括以上实施例所述的触控面板。
根据本公开的又一方面，本公开实施例还提供了一种触控面板的制作方法。所述方法包括：提供衬底基板；在所述衬底基板上阵列布置多个触控感应单元，每个所述触控感应单元包括沿第一方向布置的第一触控子电极和沿第二方向布置在所述第一触控子电极两侧的两个第二触控子电极；在每个第二触控子电极和所述第一触控子电极之间设置电极狭缝；以及设置至少两个第一架桥，所述至少两个第一架桥的每一个电连接每个所述触控感应单元中的两个第二触控子电极。
可选地，所述方法还包括：在沿所述第一方向相邻的两个触控感应单元之间，设置第一狭缝以及至少两个第二架桥，所述至少两个第二架桥跨越所述第一狭缝并且电连接所述两个触控感应单元中的两个第一触控子电极。
可选地，所述方法还包括：在沿所述第二方向相邻的两个触控感应单元之间，设置第二狭缝以及至少两个第三架桥，所述至少两个第三架桥跨越所述第二狭缝并且电连接所述两个触控感应单元中直接相邻的两个第二触控子电极。
可选地，所述方法进一步包括：在每个触控感应单元中设置浮置电极，所述浮置电极位于相邻的第一触控子电极和第二触控子电极之间，并且所述浮置电极与所述第一触控子电极以及所述第二触控子电极绝缘；其中所述第一触控子电极、所述第二触控子电极和所述浮置电极同层设置。
可选地，所述浮置电极具有锯齿形边缘。
可选地，使用一次掩模工艺来制作所述触控面板中的所述第一触控子电极、所述第二触控子电极和所述浮置电极。
可选地，在所述衬底基板上阵列布置多个触控感应单元的步骤包括：利用光刻工艺在所述衬底基板上形成所述第一触控子电极和所述第二触控子电极的图案；所述设置至少两个第一架桥的步骤包括：形成覆盖所述第一触控子电极和所述第二触控子电极的图案的第一光刻胶层，在所述第一光刻胶层对应于所述第一架桥的桥点的位置形成通孔，以及利用导电材料填充所述通孔并形成所述第一架桥。
可选地，在所述设置至少两个第一架桥的步骤之前，所述方法还包括：在所述第一触控子电极和所述第二触控子电极的图案周边形成金属走线图案。
附图说明
图1为根据本公开实施例的触控面板的结构示意图；
图2为图1所示的触控面板的触控感应单元的结构示意图；
图3为图2所示的触控感应单元的局部视图；
图4为根据本公开实施例的相邻的两个触控感应单元的结构示意图；
图5为图4所示的相邻的两个触控感应单元的局部视图；
图6为根据本公开实施例的相邻的四个触控感应单元的结构示意图；
图7为根据公开实施例的触控面板的制作方法的流程图；以及
图8a-图8d为根据本公开实施例的触控面板的制作方法的各步骤的示意图。
具体实施方式
下面将结合本公开实施例中的附图，对本公开实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本公开一部分实施例，而不是全部的实施例。基于本公开中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本公开专利保护的范围。
发明人意识到，在设计触控传感器图案时，需要兼顾架桥的消影效果与耐弯折性。金属架桥具有良好的延展性，但消影效果差。诸如ITO材料的架桥具有良好的消影效果，但在弯折时容易断裂。因此，期望提供一种兼具消影和耐弯折性能的触控传感器设计方案。
有鉴于此，本公开的实施例提供一种触控面板、触控显示装置以及所述触控面板的制作方法，改善了触控面板的消影效果并增加了释放应力的能力。
根据本公开的一个方面，本公开实施例提供了一种触控面板。图1为根据本公开实施例的触控面板的结构示意图。图2为图1所示的触控面板的触控感应单元的结构示意图。图3为图2所示的触控感应单元中区域A的局部视图。如图1-图3所示，所述触控面板100包括：衬底基板10以及在所述衬底基板10上阵列布置的多个触控感应单元20。每个所述触控感应单元20包括沿第一方向X布置的第一触控子电极201、沿第二方向Y布置在所述第一触控子电极201两侧的两个第二触控子电极202、以及设置在每个第二触控子电极202和所述第一触控子电极201之间的电极狭缝221；其中每个所述触控感应单元20中的两个第二触控子电极202经由至少两个第一架桥203电连接。
如图3所示每个架桥203与第二触控子电极202接触位置处的通孔204中具有通孔塞(via plug)205。本领域技术人员能够理解，在每个触控感应单元20中，所述第一触控子电极201和第二触控子电极202之间可以设置锯齿形的电极狭缝(如图3中的206指示)。
在本公开实施例中，每个所述触控感应单元20中的所述两个第二触控子电极202由至少两个架桥203电连接。如图3所示，每个所述架桥203与所述第二触控子电极202接触位置处的通孔204中具有通孔塞205。利用上述布置方式，相邻的架桥之间可以具有更大的间隔。相比于相关技术中较为密集的架桥排布方式，触控感应单元20中的架桥结构将更加不明显，改善了触控面板100的消影效果。ITO等导电氧 化物材料延展性较差，内部有应力时易出现断裂，影响产品功能。以架桥方式连接诸如ITO材料制成的多个电极，应力可在连接区域释放，就可以将其内部应力去除。因此，利用至少两个架桥203，增加了所述触控感应单元20释放应力的能力。本公开实施例提供的触控面板100在沿着任意方向弯折时，每个触控感应单元20中的至少两个架桥203能够有效释放应力，避免了两个第二触控子电极202之间的断路，增加了可挠曲触控面板的可靠性。此外，利用上述布置，还可以制作各种尺寸的触控感应单元，从而支持具有各种通道数量和触控方案的触控芯片。
如图1所示，在本公开实施例提供的触控面板100中，还可以在阵列布置的多个触控感应单元20的周边布置走线区域30。金属走线图案可以布置在所述走线区域30内部，用以将所述多个触控感应单元20连接至外部电路。
图4为根据本公开实施例的相邻的两个触控感应单元的结构示意图。图5为图4所示的触控感应单元中区域B的局部视图。可选地，如图4和图5所示，在沿所述第一方向X相邻的两个触控感应单元20之间，设置有第一狭缝207以及至少两个第二架桥208，所述至少两个第二架桥208跨越所述第一狭缝207并且电连接所述两个触控感应单元20中的两个第一触控子电极201。
可选地，所述电极狭缝221具有锯齿的形状。由于光的反射，电极狭缝221的边缘(即，第一触控子电极或第二触控子电极的边缘)呈现的图案为锯齿形，由此进一步改善了消影效果。本领域技术人员能够理解，电极狭缝221也可以具有诸如直线或曲线的其他形状。
在一些实施例中，在沿所述第一方向X相邻的两个触控感应单元20之间，设置有第一狭缝207以及至少两个第二架桥208。由此，进一步改善了触控面板的消影效果，并且增强了所述触控面板100沿着所述第二方向Y的耐弯折性。
图6为根据本公开实施例的相邻的四个触控感应单元的结构示意图。可选地，如图6所示，在沿所述第二方向Y相邻的两个触控感应单元20之间，设置有第二狭缝209以及至少两个第三架桥210，所述至少两个第三架桥210跨越所述第二狭缝209并且电连接所述两个触控感应单元20中直接相邻的两个第二触控子电极202。
在一些实施例中，在沿所述第二方向Y相邻的两个触控感应单元20之间，设置有第二狭缝209以及至少两个第三架桥210。由此，进一步改善了触控面板的消影效果。并且增强了所述触控面板沿着所述第一方向的耐弯折性。
可选地，如图4-6所示，所述第二架桥208的长度方向和/或所述第三架桥210的长度方向倾斜于所述第一方向X。
利用倾斜于所述第一方向(或，第二方向)的第二架桥和/或第三架桥，可以进一步增强消影效果，并且不影响相邻的触控感应单元之间的导电性。
可选地，所述第一狭缝207和第二狭缝209都具有锯齿的形状。由于光的反射，第一狭缝207和第二狭缝209的边缘呈现的图案为锯齿形，由此进一步改善了消影效果。本领域技术人员能够理解，第一狭缝207和第二狭缝209也可以具有诸如直线或曲线的其他形状。
可选地，如图2、图4和图6所示，每个所述触控感应单元20还包括浮置电极211，所述浮置电极211位于相邻的第一触控子电极201和第二触控子电极202之间，并且所述浮置电极211与所述第一触控子电极201以及所述第二触控子电极202绝缘；其中所述第一触控子电极201、所述第二触控子电极202和所述浮置电极211同层设置。
在本公开的上下文中，两个或多个物体“同层设置”指的是该两个或多个物体设置在同一表面上或夹设在同一层中。
在一些实施例中，利用与所述第一触控子电极201和所述第二触控子电极202绝缘的浮置电极211，可以屏蔽电气信号干扰，从而提高触控面板的触控灵敏度。此外，由于所述浮置电极211的使用增加了电极总面积，还可以利用所述浮置电极211来控制所述触控感应单元20的初始电容和电容增量，从而调整所述触控感应单元20的电气参数。在一些实施例中，可以使用一次掩模工艺来制作所述触控面板中的所述第一触控子电极、所述第二触控子电极和所述浮置电极，从而简化工艺步骤并减小触控面板的整体厚度。
可选地，如图2、图4和图6所示，所述浮置电极211具有锯齿形边缘。
利用具有锯齿形边缘的浮置电极，进一步改善了消影效果。
可选地，所述第一触控子电极201、所述第二触控子电极202、所 述浮置电极211、所述第一架桥203的材料均为透明导电材料。本领域技术人员能够理解，还可以使用相同的透明导电材料来制作所述第二架桥208和第三架桥210。
在一些实施例中，利用透明导电材料来制作所述第一触控子电极、所述第二触控子电极、所述浮置电极、所述第一架桥、第二架桥和第三架桥，能够进一步消除触控感应单元对环境光的反射，从而增强消影效果。并且，由于本公开实施例提供的触控面板具有上述结构性特征，有利地消除了透明导电材料在弯折时容易断裂的缺陷。
可选地，所述透明导电材料为氧化铟锡或氧化铟锌。
在一些实施例中，可以使用诸如磁控溅射、化学气相沉积或溶胶-凝胶的工艺来形成氧化铟锡或氧化铟锌膜层，并利用掩模工艺来制作所述第一触控子电极、所述第二触控子电极、所述浮置电极、所述第一架桥、第二架桥以及第三架桥。
根据本公开的另一方面，本公开实施例还提供了一种触控显示装置。所述触控显示装置包括以上实施例所述的触控面板。
该触控显示装置可以为：手机、平板电脑、电视机、显示器、笔记本电脑、数码相框、导航仪等任何具有显示功能的产品或部件。该触控显示装置的实施可以参见上述触控面板的实施例，重复之处不再赘述。
根据本公开的又一方面，本公开实施例还提供了一种触控面板的制作方法。图7为根据公开实施例的触控面板的制作方法的流程图。如图7所示，所述方法700包括：S701，提供衬底基板；S702在所述衬底基板上阵列布置多个触控感应单元，每个所述触控感应单元包括沿第一方向布置的第一触控子电极和沿第二方向布置在所述第一触控子电极两侧的两个第二触控子电极；在每个第二触控子电极和所述第一触控子电极之间设置电极狭缝；以及S703设置至少两个第一架桥，所述至少两个第一架桥的每一个电连接每个所述触控感应单元中的两个第二触控子电极。
在本公开实施例中，每个所述触控感应单元中的所述两个第二触控子电极由至少两个架桥电连接。每个所述架桥与所述第二触控子电极接触位置处的通孔中具有通孔塞。因此，利用至少四个独立的桥点，触控感应单元中的架桥结构将更加不明显，改善了触控面板的消影效 果。并且，利用至少两个架桥，增加了所述触控感应单元释放应力的能力。本公开实施例提供的触控面板在沿着任意方向弯折时，每个触控感应单元中的至少两个架桥能够有效释放应力，避免了两个第二触控子电极之间的断路，增加了可挠曲触控面板的可靠性。此外，利用上述布置，还可以制作各种尺寸的触控感应单元，从而支持具有各种通道数量和触控方案的触控芯片。
可选地，所述方法还包括：在沿所述第一方向相邻的两个触控感应单元之间，设置第一狭缝以及至少两个第二架桥，所述至少两个第二架桥跨越所述第一狭缝并且电连接所述两个触控感应单元中的两个第一触控子电极。
在一些实施例中，在沿所述第一方向相邻的两个触控感应单元之间，设置有第一狭缝以及至少两个第二架桥。由此，进一步改善了触控面板的消影效果。并且增强了所述触控面板沿着所述第二方向的耐弯折性。本领域技术人员能够理解，所述第一狭缝可以与所述第一触控子电极、第二触控子电极同时形成，所述至少两个第二架桥可以与所述至少两个第一架桥同时形成。
可选地，所述方法还包括：在沿所述第二方向相邻的两个触控感应单元之间，设置第二狭缝以及至少两个第三架桥，所述至少两个第三架桥跨越所述第二狭缝并且电连接所述两个触控感应单元中直接相邻的两个第二触控子电极。
在一些实施例中，在沿所述第二方向相邻的两个触控感应单元之间，设置有第二狭缝以及至少两个第三架桥。由此，进一步改善了触控面板的消影效果。并且增强了所述触控面板沿着所述第一方向的耐弯折性。本领域技术人员能够理解，所述第二狭缝可以与所述第一触控子电极、第二触控子电极同时形成，所述至少两个第三架桥可以与所述至少两个第一架桥同时形成。
可选地，所述方法进一步包括：在每个触控感应单元中设置浮置电极，所述浮置电极位于相邻的第一触控子电极和第二触控子电极之间，并且所述浮置电极与所述第一触控子电极以及所述第二触控子电极绝缘；其中所述第一触控子电极、所述第二触控子电极和所述浮置电极同层设置。
在一些实施例中，利用与所述第一触控子电极和所述第二触控子 电极绝缘的浮置电极，可以屏蔽电气信号干扰，从而提高触控面板的触控灵敏度。此外，还可以利用所述浮置电极来控制所述触控感应单元的初始电容和电容增量，从而调整所述触控感应单元的电气参数。在一些实施例中，可以使用一次掩模工艺来制作所述触控面板中的所述第一触控子电极、所述第二触控子电极和所述浮置电极，从而简化工艺步骤并减小触控面板的整体厚度。
可选地，所述浮置电极具有锯齿形边缘。
利用具有锯齿形边缘的浮置电极，进一步改善了消影效果。
可选地，使用一次掩模工艺来制作所述触控面板中的所述第一触控子电极、所述第二触控子电极和所述浮置电极。
在一些实施例中，可以使用一次掩模工艺来制作所述触控面板中的所述第一触控子电极、所述第二触控子电极和所述浮置电极，从而简化工艺步骤并减小触控面板的整体厚度。
可选地，在所述衬底基板上阵列布置多个触控感应单元的步骤包括：利用光刻工艺在所述衬底基板上形成所述第一触控子电极和所述第二触控子电极的图案；所述设置至少两个第一架桥的步骤包括：形成覆盖所述第一触控子电极和所述第二触控子电极的图案的第一光刻胶层，在所述第一光刻胶层对应于所述第一架桥的桥点的位置形成通孔，以及利用导电材料填充所述通孔并形成所述第一架桥。
图8a-图8d为根据本公开实施例的触控面板的制作方法的各步骤的示意图。以下将结合图8a-图8d来描述触控面板制作方法的实例。本领域技术人员能够理解，图8a-图8d中仅示例性地示出了单个触控感应单元的结构在平行于所述第二方向Y上的截面图。
如图8a所示，利用光刻工艺在衬底基板10上形成第一触控子电极201和第二触控子电极202的图案。其中所述衬底基板10可以是玻璃基板或环烯烃共聚物(cycloolefin copolymer，COP)薄膜。所述第一触控子电极201和第二触控子电极202的材料可以是ITO。
如图8b所示，在第一触控子电极201和第二触控子电极202的图案上涂覆光学胶(OCA)212，并利用光刻工艺在桥点位置形成通孔204。
如图8c所示，利用例如溅射工艺在所述通孔204内部和所述光学胶212的表面形成诸如ITO的导电材料。随后利用光刻工艺形成所述第一架桥203。
如图8d所示，在图8c所示结构的基础上，涂覆光学胶213，从而完成触控感应单元的结构。
可选地，在所述设置至少两个第一架桥的步骤之前，所述方法可以还包括：在所述第一触控子电极和所述第二触控子电极的图案周边形成金属走线图案。
如图1所示，在一些实施例中，还可以在阵列布置的多个触控感应单元20的周边布置走线区域30。金属走线图案可以布置在所述走线区域30内部，用以将所述多个触控感应单元20连接至外部电路。
根据本公开实施例提供的触控面板、触控显示装置以及所述触控面板的制作方法，每个所述触控感应单元中的所述两个第二触控子电极由至少两个架桥电连接。每个所述架桥与所述第二触控子电极接触位置处的通孔中具有通孔塞。因此，利用至少四个独立的桥点，触控感应单元中的架桥结构将更加不明显，改善了触控面板的消影效果。并且，利用至少两个架桥，增加了所述触控感应单元释放应力的能力。本公开实施例提供的触控面板在沿着任意方向弯折时，每个触控感应单元中的至少两个架桥能够有效释放应力，避免了两个第二触控子电极之间的断路，增加了可挠曲触控面板的可靠性。此外，利用上述布置，还可以制作各种尺寸的触控感应单元，从而支持具有各种通道数量和触控方案的触控芯片。
显然，本领域的技术人员可以对本公开进行各种改动和变型而不脱离本公开的精神和范围。这样，倘若本公开的这些修改和变型属于本公开权利要求及其等同技术的范围之内，则本公开也意图包含这些改动和变型。

Claims (19)

  1. 一种触控面板，包括：
    衬底基板；
    在所述衬底基板上阵列布置的多个触控感应单元，每个所述触控感应单元包括沿第一方向布置的第一触控子电极、沿第二方向布置在所述第一触控子电极两侧的两个第二触控子电极、以及设置在每个第二触控子电极和所述第一触控子电极之间的电极狭缝；
    其中每个所述触控感应单元中的两个第二触控子电极经由至少两个第一架桥电连接。
  2. 如权利要求1所述的触控面板，其中所述电极狭缝具有锯齿的形状。
  3. 如权利要求1所述的触控面板，其中在沿所述第一方向相邻的两个触控感应单元之间，设置有第一狭缝以及至少两个第二架桥，所述至少两个第二架桥跨越所述第一狭缝并且电连接所述两个触控感应单元中的两个第一触控子电极。
  4. 如权利要求3所述的触控面板，其中在沿所述第二方向相邻的两个触控感应单元之间，设置有第二狭缝以及至少两个第三架桥，所述至少两个第三架桥跨越所述第二狭缝并且电连接所述两个触控感应单元中直接相邻的两个第二触控子电极。
  5. 如权利要求4所述的触控面板，其中所述第二架桥的长度方向和/或所述第三架桥的长度方向倾斜于所述第一方向。
  6. 如权利要求4所述的触控面板，其中所述第一狭缝和第二狭缝都具有锯齿的形状。
  7. 如权利要求1-6任一项所述的触控面板，其中每个所述触控感应单元还包括浮置电极，所述浮置电极位于相邻的第一触控子电极和第二触控子电极之间，并且所述浮置电极与所述第一触控子电极以及所述第二触控子电极绝缘；其中所述第一触控子电极、所述第二触控子电极和所述浮置电极同层设置。
  8. 如权利要求7所述的触控面板，其中所述浮置电极具有锯齿形边缘。
  9. 如权利要求7所述的触控面板，其中所述第一触控子电极、所 述第二触控子电极、所述浮置电极和所述第一架桥的材料均为透明导电材料。
  10. 如权利要求9所述的触控面板，其中所述透明导电材料为氧化铟锡或氧化铟锌。
  11. 一种触控显示装置，包括如权利要求1-10任一项所述的触控面板。
  12. 一种触控面板的制作方法，包括：
    提供衬底基板；
    在所述衬底基板上阵列布置多个触控感应单元，每个所述触控感应单元包括沿第一方向布置的第一触控子电极和沿第二方向布置在所述第一触控子电极两侧的两个第二触控子电极；在每个第二触控子电极和所述第一触控子电极之间设置电极狭缝；以及
    设置至少两个第一架桥，所述至少两个第一架桥的每一个电连接每个所述触控感应单元中的两个第二触控子电极。
  13. 如权利要求12所述的方法，还包括：在沿所述第一方向相邻的两个触控感应单元之间，设置第一狭缝以及至少两个第二架桥，所述至少两个第二架桥跨越所述第一狭缝并且电连接所述两个触控感应单元中的两个第一触控子电极。
  14. 如权利要求12所述的方法，还包括：在沿所述第二方向相邻的两个触控感应单元之间，设置第二狭缝以及至少两个第三架桥，所述至少两个第三架桥跨越所述第二狭缝并且电连接所述两个触控感应单元中直接相邻的两个第二触控子电极。
  15. 如权利要求12所述的方法，进一步包括：在每个触控感应单元中设置浮置电极，所述浮置位于相邻的第一触控子电极和第二触控子电极之间，并且所述浮置电极与所述第一触控子电极以及所述第二触控子电极绝缘；其中所述第一触控子电极、所述第二触控子电极和所述浮置电极同层设置。
  16. 如权利要求15所述的方法，其中所述浮置电极具有锯齿形边缘。
  17. 如权利要求15所述的方法，其中使用一次掩模工艺来制作所述触控面板中的所述第一触控子电极、所述第二触控子电极和所述浮置电极。
  18. 如权利要求12所述的方法，其中在所述衬底基板上阵列布置多个触控感应单元的步骤包括：利用光刻工艺在所述衬底基板上形成所述第一触控子电极和所述第二触控子电极的图案；
    所述设置至少两个第一架桥的步骤包括：形成覆盖所述第一触控子电极和所述第二触控子电极的图案的第一光刻胶层，在所述第一光刻胶层对应于所述第一架桥的桥点的位置形成通孔，以及利用导电材料填充所述通孔并形成所述第一架桥。
  19. 如权利要求18所述的方法，其中在所述设置至少两个第一架桥的步骤之前，所述方法还包括：在所述第一触控子电极和所述第二触控子电极的图案周边形成金属走线图案。
PCT/CN2018/088136 2017-08-21 2018-05-24 触控面板及其制作方法、触控显示装置 WO2019037494A1 (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP18804501.7A EP3683661A4 (en) 2017-08-21 2018-05-24 TOUCH SCREEN AND ITS MANUFACTURING PROCESS AND TOUCH DISPLAY DEVICE
US16/305,980 US10705640B2 (en) 2017-08-21 2018-05-24 Touch panel and method for fabricating the same, touch display device
JP2018563107A JP7202187B2 (ja) 2017-08-21 2018-05-24 タッチパネル、その製造方法及びタッチ表示装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710719365.3A CN109426373A (zh) 2017-08-21 2017-08-21 触控面板及其制作方法、触控显示装置
CN201710719365.3 2017-08-21

Publications (1)

Publication Number Publication Date
WO2019037494A1 true WO2019037494A1 (zh) 2019-02-28

Family

ID=65439991

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2018/088136 WO2019037494A1 (zh) 2017-08-21 2018-05-24 触控面板及其制作方法、触控显示装置

Country Status (5)

Country Link
US (1) US10705640B2 (zh)
EP (1) EP3683661A4 (zh)
JP (1) JP7202187B2 (zh)
CN (1) CN109426373A (zh)
WO (1) WO2019037494A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020097755A1 (en) 2018-11-12 2020-05-22 Boe Technology Group Co., Ltd. Touch substrate, touch control display apparatus, and method of fabricating touch substrate
CN112462962B (zh) * 2019-09-06 2023-01-06 华为技术有限公司 触控传感器、触控显示屏及电子设备
CN110658959B (zh) * 2019-09-25 2023-01-31 京东方科技集团股份有限公司 触控面板和显示装置
KR20210081665A (ko) * 2019-12-24 2021-07-02 동우 화인켐 주식회사 터치 센서 및 이를 포함하는 화상 표시 장치
KR20210095048A (ko) * 2020-01-22 2021-07-30 동우 화인켐 주식회사 터치 센서 및 이를 포함하는 화상 표시 장치
CN111399688A (zh) * 2020-04-17 2020-07-10 武汉华星光电半导体显示技术有限公司 触控面板及显示装置
CN111694466A (zh) * 2020-06-30 2020-09-22 武汉华星光电半导体显示技术有限公司 触控显示屏及电子装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106354299A (zh) * 2016-08-17 2017-01-25 京东方科技集团股份有限公司 一种触控基板及其制备方法、触控显示装置
CN206058170U (zh) * 2016-07-29 2017-03-29 意力(广州)电子科技有限公司 一种单面双层多点触摸屏
CN106919278A (zh) * 2015-12-28 2017-07-04 宸鸿科技(厦门)有限公司 触控面板

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4720857B2 (ja) * 2008-06-18 2011-07-13 ソニー株式会社 静電容量型入力装置および入力機能付き表示装置
JP2010244120A (ja) 2009-04-01 2010-10-28 Seiko Epson Corp タッチパネルの製造方法及び表示装置製造方法並びに電子機器製造方法
TWI405103B (zh) * 2009-10-15 2013-08-11 Au Optronics Corp 觸控面板
TWI427520B (zh) * 2009-12-10 2014-02-21 Au Optronics Corp 觸控顯示面板以及觸控基板
IT1400933B1 (it) * 2010-06-21 2013-07-02 St Microelectronics Srl Touch sensor and method of forming a touch sensor.
TWI452508B (zh) * 2011-05-27 2014-09-11 Novatek Microelectronics Corp 電容式觸碰面板的佈局結構及其製作方法
KR101895467B1 (ko) * 2012-01-12 2018-09-06 삼성디스플레이 주식회사 터치 스크린 패널
KR101385438B1 (ko) * 2012-06-12 2014-04-15 삼성디스플레이 주식회사 터치 스크린 패널
KR102017155B1 (ko) 2012-11-01 2019-09-03 삼성디스플레이 주식회사 터치스크린 패널 및 그의 제조방법
KR102076690B1 (ko) * 2013-04-19 2020-02-13 삼성디스플레이 주식회사 표시 장치
US9304641B2 (en) * 2013-09-18 2016-04-05 Apple Inc. Multiple bridges single sided touch sensor
JP2015109067A (ja) 2013-10-22 2015-06-11 パナソニックＩｐマネジメント株式会社 入力装置および表示装置
KR102312260B1 (ko) * 2015-01-09 2021-10-13 삼성디스플레이 주식회사 플렉서블 터치 패널 및 플렉서블 표시 장치
TWI564761B (zh) * 2015-01-16 2017-01-01 友達光電股份有限公司 觸控電極層
CN105117089B (zh) 2015-09-17 2018-06-05 京东方科技集团股份有限公司 触控基板、触控显示面板及其驱动方法、触控显示装置
CN105204702B (zh) 2015-09-25 2018-04-20 京东方科技集团股份有限公司 电磁电容触摸屏
KR102410661B1 (ko) * 2015-11-13 2022-06-20 삼성디스플레이 주식회사 터치 패널 및 이를 포함하는 표시 장치
KR102464277B1 (ko) * 2016-02-29 2022-11-08 삼성디스플레이 주식회사 터치 패널 및 이를 구비한 표시 장치
US10162441B2 (en) * 2016-03-10 2018-12-25 Raydium Semiconductor Corporation Capacitive touch panel
JP6756538B2 (ja) * 2016-08-03 2020-09-16 株式会社ジャパンディスプレイ 表示装置
CN107025027A (zh) * 2016-08-12 2017-08-08 京东方科技集团股份有限公司 触控基板及其制作方法、显示面板和显示装置
CN106406605A (zh) * 2016-08-24 2017-02-15 武汉华星光电技术有限公司 触摸屏及其触摸感应组件
CN106293250A (zh) * 2016-09-09 2017-01-04 合肥鑫晟光电科技有限公司 触控单元及其制造方法、触控显示面板
CN107357475B (zh) 2017-06-27 2020-12-29 上海天马微电子有限公司 触控面板和显示装置
KR102422074B1 (ko) * 2017-08-14 2022-07-19 삼성디스플레이 주식회사 표시장치
CN207123824U (zh) * 2017-08-21 2018-03-20 京东方科技集团股份有限公司 触控面板以及触控显示装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106919278A (zh) * 2015-12-28 2017-07-04 宸鸿科技(厦门)有限公司 触控面板
CN206058170U (zh) * 2016-07-29 2017-03-29 意力(广州)电子科技有限公司 一种单面双层多点触摸屏
CN106354299A (zh) * 2016-08-17 2017-01-25 京东方科技集团股份有限公司 一种触控基板及其制备方法、触控显示装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3683661A4

Also Published As

Publication number Publication date
US10705640B2 (en) 2020-07-07
EP3683661A1 (en) 2020-07-22
JP2020531932A (ja) 2020-11-05
JP7202187B2 (ja) 2023-01-11
US20190163306A1 (en) 2019-05-30
CN109426373A (zh) 2019-03-05
EP3683661A4 (en) 2021-07-28

Similar Documents

Publication Publication Date Title
WO2019037494A1 (zh) 触控面板及其制作方法、触控显示装置
TWI421581B (zh) Input device and manufacturing method thereof
US10261635B2 (en) Touch substrate, method for manufacturing the same, touch screen, and display device
TWI573053B (zh) 觸控模組及具有該觸控模組的觸控顯示裝置
WO2018166028A1 (zh) 柔性内嵌式触控结构及其制作方法
KR101093651B1 (ko) 금속박막을 이용한 터치패널 및 그 제조방법
US9949366B2 (en) Touch panel
US20160062518A1 (en) Touch substrate and fabricating method thereof, and touch display apparatus
TWI531936B (zh) 觸控顯示裝置
US9569044B2 (en) Touch panel having conductive and insulated light shielding layers
US11907456B2 (en) Touch substrate, display panel, and touch display device
TW201102702A (en) Capacitive touch panel
TW201516779A (zh) 觸控面板
US10159146B2 (en) Input apparatus, display apparatus, and electronic apparatus
TW201349306A (zh) 觸控面板及其製作方法
CN207123824U (zh) 触控面板以及触控显示装置
TW202018469A (zh) 觸控模組及觸控模組的操作方法
US9351400B1 (en) Electrical connections between conductive contacts
CN109976572B (zh) 触控面板、触控显示装置及触控面板制作方法
WO2021097975A1 (zh) 显示面板及其制备方法
TWI722363B (zh) 觸控投影屏幕以及觸控投影系統
US20160162069A1 (en) Touch screen and manufacturing method thereof, as well as display device
TWM557856U (zh) 觸控顯示面板
KR20200045801A (ko) 본딩 강건 구조가 적용된 터치 패널 및 그 제조 방법
TWI552042B (zh) 觸控面板及其製造方法

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2018563107

Country of ref document: JP

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18804501

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 2018804501

Country of ref document: EP

Effective date: 20200323