WO2018237014A3 - Airborne molecular contamination acid removal filter using functionalized materials - Google Patents

Airborne molecular contamination acid removal filter using functionalized materials Download PDF

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Publication number
WO2018237014A3
WO2018237014A3 PCT/US2018/038516 US2018038516W WO2018237014A3 WO 2018237014 A3 WO2018237014 A3 WO 2018237014A3 US 2018038516 W US2018038516 W US 2018038516W WO 2018237014 A3 WO2018237014 A3 WO 2018237014A3
Authority
WO
WIPO (PCT)
Prior art keywords
filter medium
molecular contamination
removal filter
airborne molecular
acid removal
Prior art date
Application number
PCT/US2018/038516
Other languages
French (fr)
Other versions
WO2018237014A2 (en
Inventor
Frank V. BELANGER
Stuart Tison
John Charles GAUDREAU
Reena Srivastava
Joseph D. Sweeney
Original Assignee
Entegris, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris, Inc. filed Critical Entegris, Inc.
Publication of WO2018237014A2 publication Critical patent/WO2018237014A2/en
Publication of WO2018237014A3 publication Critical patent/WO2018237014A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0415—Beds in cartridges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/25—Coated, impregnated or composite adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/34—Specific shapes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/06—Polluted air

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filtering Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

An airborne molecular contamination filter is herein disclosed. The airborne molecular contamination filter comprises a first filter medium that removes first airborne contaminants from a first air stream, and a second filter medium downstream of the first filter medium removing second airborne contaminants from a second air stream output from the first filter medium. At least one of the first filter medium and the second filter medium comprises a functionalized substantially non-carbon filter medium that removes a weak acid from at least one of the first air stream and the second air stream.
PCT/US2018/038516 2017-06-20 2018-06-20 Airborne molecular contamination acid removal filter using functionalized materials WO2018237014A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762522343P 2017-06-20 2017-06-20
US62/522,343 2017-06-20

Publications (2)

Publication Number Publication Date
WO2018237014A2 WO2018237014A2 (en) 2018-12-27
WO2018237014A3 true WO2018237014A3 (en) 2019-04-11

Family

ID=64735839

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2018/038516 WO2018237014A2 (en) 2017-06-20 2018-06-20 Airborne molecular contamination acid removal filter using functionalized materials

Country Status (2)

Country Link
TW (1) TW201929937A (en)
WO (1) WO2018237014A2 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4892719A (en) * 1985-01-21 1990-01-09 Gesser Hyman D Removal of aldehydes and acidic gases from indoor air
WO1996032180A1 (en) * 1995-04-12 1996-10-17 Curt Lindhe Konsult & Förvaltnings Ab Multiple filter unit
US20020189457A1 (en) * 2000-09-12 2002-12-19 Donaldson Company, Inc. Air filter assembly for low temperature catalytic processes
US20060042209A1 (en) * 2004-08-27 2006-03-02 Dallas Andrew J Alkaline impregnated filter element, and methods
US20080276804A1 (en) * 2005-03-11 2008-11-13 Abdelhamid Sayari Functionalized Adsorbent for Removal of Acid Gases and Use Thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4892719A (en) * 1985-01-21 1990-01-09 Gesser Hyman D Removal of aldehydes and acidic gases from indoor air
WO1996032180A1 (en) * 1995-04-12 1996-10-17 Curt Lindhe Konsult & Förvaltnings Ab Multiple filter unit
US20020189457A1 (en) * 2000-09-12 2002-12-19 Donaldson Company, Inc. Air filter assembly for low temperature catalytic processes
US20060042209A1 (en) * 2004-08-27 2006-03-02 Dallas Andrew J Alkaline impregnated filter element, and methods
US20080276804A1 (en) * 2005-03-11 2008-11-13 Abdelhamid Sayari Functionalized Adsorbent for Removal of Acid Gases and Use Thereof

Also Published As

Publication number Publication date
WO2018237014A2 (en) 2018-12-27
TW201929937A (en) 2019-08-01

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