WO2018216615A1 - Carburizing apparatus and carburizing method - Google Patents
Carburizing apparatus and carburizing method Download PDFInfo
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- WO2018216615A1 WO2018216615A1 PCT/JP2018/019303 JP2018019303W WO2018216615A1 WO 2018216615 A1 WO2018216615 A1 WO 2018216615A1 JP 2018019303 W JP2018019303 W JP 2018019303W WO 2018216615 A1 WO2018216615 A1 WO 2018216615A1
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- carburizing
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/20—Carburising
Definitions
- the present invention relates to a carburizing apparatus and a carburizing method for carburizing a workpiece such as a steel part in a carburizing chamber.
- the carburizing chamber for carburizing the workpiece
- the carburizing gas introducing portion for introducing the carburizing gas into the carburizing chamber
- the inert gas introducing portion for introducing the inert gas into the carburizing chamber
- a carburizing apparatus equipped with a gas exhaust unit that exhausts gas when carburizing a workpiece, even if the workpiece has a complicated shape, carbon is uniformly carburized and diffused. It is characterized in that it can be easily performed.
- Patent Document 1 when carbon is carburized and diffused inside the object to be treated, in Patent Document 1, the object to be treated is vacuum-heated in a heating chamber of a vacuum carburizing furnace, and acetylene is used as a carburizing gas in the heating chamber.
- a carburizing process is performed in a furnace atmosphere in which a system gas is supplied and the heating chamber is in a vacuum state (low pressure state) of 1 kPa or less.
- Patent Document 2 the process of carburizing carbon on the surface of the workpiece by carburizing gas supply amount at a high flow level (carburization period), and the heating chamber with the carburizing gas supply amount at a low flow level. Further, there has been proposed a method in which the treatment (diffusion period) in which carbon is diffused into the object to be treated at a low pressure is repeated many times.
- carburizing is performed in a carburizing gas-rich atmosphere and diffusion is performed in a carburizing gas-thin atmosphere.
- Carburizing gas is replenished when the carburizing gas-rich atmosphere is used, and vacuum exhaust is performed when the carburizing gas is used in a thin atmosphere.
- Patent Document 3 a plurality of mixed gases in which the amount of inert gas to be mixed with the carburizing gas is selected and used, and a plurality of nozzles for supplying such a mixed gas into the vacuum carburizing furnace are provided.
- an appropriate gas mixture is supplied from an appropriate nozzle to carburize an object to be processed.
- the hollow heating chamber which accommodates the to-be-processed material to carry out a vacuum carburizing inside, the heater which heats a to-be-processed material located in this heating chamber, and the carburizing which introduces the gas for carburizing in a heating chamber A gas introduction pipe, a vacuum pump for sucking and exhausting the gas in the heating chamber, first, second, third and fourth gas exhaust pipes communicating with the vacuum pump and the heating chamber, and the first In the vacuum carburizing furnace provided with the exhaust pipe selection means for sequentially opening the second, third and fourth gas exhaust pipes one by one, each exhaust port in each gas exhaust pipe is provided at a different position, While carburizing the material, the gas exhaust pipe for sucking and exhausting the carburizing gas in the heating chamber is switched by the exhaust pipe selection means, and the flow direction of the carburizing gas is changed to change the carburizing gas in the heating chamber. While equalizing the time-averaged density, By changing the position of the object to be treated which is exposed to the flow of coal gas,
- JP-A-8-325701 Japanese Unexamined Patent Publication No. 2000-1765 JP 2000-336469 A JP 2005-325372 A
- This invention makes it a subject to solve the above problems in the carburizing apparatus and the carburizing method for carburizing a workpiece such as a steel material part in the carburizing chamber.
- a carburizing chamber for carburizing a workpiece for carburizing a workpiece, a carburizing gas introducing portion for introducing a carburizing gas into the carburizing chamber, and an inert gas introducing portion for introducing an inert gas into the carburizing chamber.
- a carburizing apparatus equipped with a gas exhaust unit that exhausts gas in the carburizing chamber when the workpiece is carburized, even if the workpiece has a complicated shape, the workpiece is uniformly carburized. It is an object to make it easy to diffuse.
- a carburizing chamber for carburizing a workpiece a carburizing gas introduction unit for introducing a carburizing gas into the carburizing chamber, and a carburizing chamber.
- the carburizing gas introducing part and the inert gas introducing part are gas exhausting parts.
- the inert gas is introduced from the inert gas introducing portion into the carburizing chamber in which the carburizing gas is introduced from the carburizing gas introducing portion.
- the carburizing gas introduction part and the inert gas introduction part are provided at positions separated from the gas exhaust part, and the carburizing gas into which the workpiece is introduced from the carburizing gas introduction part.
- this carburized gas is dispersed in the carburizing chamber before being led to the gas exhaust part and carburized into the workpiece, and the carburized gas is introduced from the inert gas introduction part.
- the inert gas is introduced into the processing chamber, the carburizing gas and the inert gas in the carburizing chamber are dispersed in the carburizing chamber before the inert gas is guided to the gas exhaust unit. Exhausted from.
- the “distant position” here means that they do not exist at the same position, and it is better if the carburizing gas and the inert gas are sufficiently separated from each other in the carburizing chamber.
- the carburizing chamber is carburized from the carburizing gas introduction part.
- the position where the gas is introduced and the position where the inert gas is introduced from the inert gas introduction portion into the carburizing chamber can be made the same position.
- the position where the carburizing gas is introduced into the carburizing chamber from the carburizing gas inlet is not necessarily the same as the position where the inert gas is introduced into the carburizing chamber from the inert gas inlet.
- the position where the carburizing gas is introduced into the carburizing chamber from the carburizing gas inlet is different from the position where the inert gas is introduced into the carburizing chamber from the inert gas inlet. May be.
- the position where the inert gas is introduced from the inert gas introduction part into the carburizing process chamber is set on a surface opposite to the position where the gas exhausting part exhausts the carburizing process chamber. You can make it.
- the carburizing gas is used in the carburizing chamber in which the workpiece is introduced using the carburizing apparatus as described above. Introducing a carburizing gas from the introduction part to carburize carbon in the object to be treated, stopping the introduction of the carburizing gas, and diffusing the carbon carburized in the object to be treated in the object to be treated, While introducing the inert gas from the inert gas introduction part and dispersing the inert gas in the carburizing chamber, the carburizing gas and the inert gas in the carburizing chamber are exhausted through the gas exhaust part. .
- the carburizing gas is introduced from the carburizing gas introduction part provided at a position away from the gas exhausting part using the carburizing treatment apparatus as described above, the carburizing gas is introduced before the carburizing gas is introduced to the gas exhausting part.
- carbon is dispersed in the workpiece and carburized, and the introduction of the carburizing gas is stopped, and the carbon carburized in the workpiece is diffused into the workpiece to be exhausted with gas.
- the inert gas is introduced from the inert gas introduction part provided at a position away from the part and the carburizing gas and the inert gas in the carburizing treatment chamber are exhausted through the gas exhaust part, While the carburizing gas is dispersed in the carburizing chamber by the inert gas introduced from the inert gas introducing unit, the gas is exhausted from the gas exhaust unit together with the inert gas, and a part of the carburizing gas remains in the workpiece. It is prevented from.
- the amount of inert gas introduced in the initial stage for introducing the inert gas into the carburizing chamber is increased from the inert gas introducing unit, and the carburizing gas introducing unit is used. It is preferable that the introduction amount of the inert gas is larger than the amount of the carburizing gas introduced into the carburizing chamber. In this way, the carburizing gas in the carburizing chamber is quickly blown away by the inert gas introduced a lot in the initial stage and appropriately guided to the gas exhaust part, and the carburizing gas remains in a part of the workpiece. It is possible to prevent carburizing unevenness from occurring in the workpiece.
- the amount of inert gas introduced in the initial stage of introduction from the inert gas introduction unit into the carburizing chamber is increased, so that the inert gas is larger than the amount of carburizing gas introduced from the carburizing gas introduction unit into the carburizing chamber.
- a carburizing gas introducing portion for introducing a carburizing gas into the carburizing treatment chamber and an inert gas introducing portion for introducing an inert gas into the carburizing treatment chamber are provided in the carburizing treatment chamber.
- a carburizing gas is provided at a position distant from the gas exhaust part for exhausting the gas, and the carburizing gas is introduced from the carburizing gas introducing part into the carburizing treatment chamber in which the object to be processed is introduced, and the carburizing gas is carburized into the object to be processed.
- the carburizing gas obtained by carburizing carbon in the object to be processed in the carburizing chamber is dispersed in the carburizing chamber with the inert gas introduced from the inert gas introduction unit, and together with the inert gas.
- the inert gas introduced from the inert gas introduction unit and together with the inert gas.
- the carburizing gas can be sufficiently removed even if the object to be processed has a complicated shape. Was not partially over-carburized, and a uniform carburizing process was made possible.
- (B) is the example of the state which complete
- (C) is a schematic explanatory diagram showing the process of diffusing the carbon carburized in the workpiece into the workpiece, introducing an inert gas from the inert gas introduction portion, and the carburizing gas in the carburizing chamber It is the schematic explanatory drawing which showed the example of the state which exhausts inert gas from a gas exhaust part.
- the carburizing apparatus is used to show a state in which an object to be processed in the carburizing chamber is carburized, and the carburizing gas is appropriately exhausted, which is suitable for diffusion of carbon into the object to be processed. It is the schematic explanatory drawing which showed the state which has diffused the carbon which carburized to the to-be-processed object by making it the density
- the pressure of the carburizing gas in the carburizing chamber is constant while introducing the carburizing gas from the carburizing gas introduction unit into the carburizing chamber.
- a gas exhaust part 14 for exhausting the gas in the carburizing treatment chamber 11, and the carburized gas introduction part 12 and the inert gas introduction part 13 are provided at positions away from the gas exhaust part 14. .
- the carburizing gas introduction part 12 is provided.
- the position where the carburizing gas Ga is introduced into the carburizing chamber 11 from the same position as the position where the inert gas Gb is introduced into the carburizing chamber 11 from the inert gas introducing portion 13 is the same as the carburizing chamber.
- 11 is a position where the gas exhaust part 14 for exhausting the gas in the gas source 11 is introduced from the carburizing gas introduction part 12 or the inert gas introduction part 13 into the carburizing treatment chamber 11. It is provided at a position on the opposite side across the workpiece W.
- the position where the gas exhaust part 14 is provided is not necessarily a position opposite to the position where the carburizing gas Ga or the inert gas Gb is introduced into the carburizing chamber 11, and may be a position away from these positions. That's fine.
- the carburizing gas supply device 121 for supplying the carburizing gas Ga and the carburizing treatment chamber. 11 is provided with a carburizing gas supply pipe 122, and a carburizing gas adjustment valve 123 is provided in the carburizing gas supply pipe 122, and the amount of introduction of the carburizing gas Ga into the carburizing treatment chamber 11 by the carburizing gas adjustment valve 123 The stop is adjusted.
- an inert gas supply device 131 that supplies the inert gas Gb;
- An inert gas supply pipe 132 that supplies an inert gas Gb from the inert gas supply device 131 to the carburizing treatment chamber 11 is connected to the carburizing gas supply pipe 122 provided with the carburizing gas adjustment valve 123.
- the inert gas Gb is guided into the carburizing chamber 11 from the same position as the carburizing gas Ga, and an inert gas regulating valve 133 is provided in the inert gas supply pipe 132, and this inert gas regulating valve is provided.
- the amount of the inert gas Gb introduced into the carburizing chamber 11 and the stop thereof are adjusted by 133.
- the gas exhaust pipe 141 for exhausting the gas in the carburizing process chamber 11 is connected to the inside of the carburizing process chamber 11 via the gas exhaust adjustment valve 142.
- a suction / exhaust device 143 for sucking / exhausting the gas in the carburizing chamber is attached, and the suction / exhaust device 143 exhausts the carburized gas Ga and the inert gas Gb in the carburizing chamber 11 through the gas exhaust control valve 142. The amount and stop are adjusted.
- the carburizing apparatus in this embodiment when carburizing the workpiece W introduced into the carburizing chamber 11, first, the carburizing gas in the carburizing gas distribution pipe 122 as shown in FIG. While the regulating valve 123 and the inert gas regulating valve 133 in the inert gas supply pipe 132 are closed, the gas exhaust regulating valve 142 in the gas exhaust pipe 141 is opened, and the air in the carburizing chamber 11 is sucked in.
- the exhaust device 143 is evacuated to make a vacuum.
- the carburizing gas adjusting valve 123 in the carburizing gas supply pipe 122 is opened, while the inert gas adjusting valve 133 in the inert gas supply pipe 132 and the gas in the gas exhaust pipe 141 are opened.
- the exhaust adjustment valve 142 With the exhaust adjustment valve 142 closed, the carburizing gas Ga is introduced from the carburizing gas supply device 121 through the carburizing gas supply pipe 122 into the carburizing chamber 11 containing the workpiece W, and carburizing treatment is performed.
- the carburizing gas Ga is dispersed in the chamber 11.
- the carburizing gas adjustment valve 123 in the carburizing gas supply pipe 122 is closed.
- the inert gas regulating valve 133 in the inert gas supply pipe 132 is opened, and the inert gas Gb is connected to the carburized gas supply pipe 122 by the inert gas supply pipe 132 from the inert gas supply device 131.
- the gas exhaust adjusting valve 142 in the gas exhaust pipe 141 is opened, and the carburizing chamber 11 is passed through the gas exhaust pipe 141 by the suction / exhaust device 143.
- the carburizing gas Ga and the inert gas Gb inside are exhausted.
- the inert gas Gb is guided from the inert gas supply pipe 132 into the carburizing chamber 11 as described above, the gas in the carburizing chamber 11 is exhausted by the suction / exhaust device 143.
- the carburizing gas Ga in the carburizing chamber 11 is blown off by the inert gas Gb introduced into the carburizing chamber 11, and exhausted from the carburizing chamber 11 through the gas exhaust pipe 141 together with the inert gas Gb. Will come to be.
- the inert gas regulating valve 133 in the inert gas supply pipe 132 is closed as shown in FIG. By holding in a state, carbon is diffused.
- the portion near the carburizing gas supply pipe 122 of the workpiece W is indicated by Z in the figure.
- a large amount of the carburizing gas Ga adheres to the surface and is difficult to be removed during vacuum exhaust. If the workpiece W has a complicated shape, it is more difficult to remove.
- the inert gas Gb is introduced into the carburizing chamber 11 from the same position as the carburizing gas Ga, the carburizing gas sprayed toward the workpiece W in the carburizing chamber 11.
- the inert gas Gb is sprayed at the same position as the position of Ga, and even if the workpiece W has a complicated shape, the carburized gas Ga sprayed on the workpiece W is converted into the workpiece W.
- the carburizing gas adhering more to the portion Z by the inert gas Gb sprayed on is blown off from the workpiece W and removed, and is exhausted through the gas exhaust pipe 141.
- the inert gas Gb when the inert gas Gb is introduced into the carburizing chamber 11 through the inert gas supply pipe 132, the amount of the inert gas Gb introduced at the initial stage when the inert gas Gb is introduced into the carburizing chamber 11 is increased. If the introduction amount of the inert gas Gb is larger than the amount of the carburizing gas Ga introduced into the carburizing chamber 11 from the carburizing gas supply pipe 122, a large amount of the carburizing gas Ga in the carburizing chamber 11 is initially introduced. The inert gas Gb is quickly blown off and exhausted through the gas exhaust pipe 141, and the carburizing gas Ga remains in a part of the workpiece W, and the workpiece W may be unevenly carburized. Is better prevented.
- the amount of the carburizing gas Ga in the carburizing chamber 11 becomes 10% by volume or less within one minute.
- the inert gas regulating valve 133 and the gas exhaust pipe 141 in the inert gas supply pipe 132 are used. With the gas exhaust regulating valve 142 closed, the carburizing gas Ga is introduced from the carburizing gas supply pipe 122 into the carburizing chamber 11 containing the workpiece W, and carburizing in the carburizing chamber 11 is performed.
- the pressure of the gas Ga is set to a predetermined pressure, carbon in the carburizing gas Ga is applied to the surface of the workpiece W in the carburizing chamber 11, and this carbon is carburized into the workpiece W.
- the method for carburizing carbon in the workpiece W is not limited to this.
- the carburizing gas Ga is introduced from the carburizing gas supply pipe 122 into the carburizing chamber 11 containing the workpiece W in the state of FIG.
- the gas exhaust regulating valve 142 in the pipe 141 is opened to some extent so that the pressure of the carburizing gas Ga in the carburizing chamber 11 is maintained at a predetermined pressure, and carbon is introduced into the workpiece W introduced into the carburizing chamber 11. It can also be carburized.
- the position which introduces the carburizing gas Ga into the carburizing process chamber 11 from the carburizing gas introducing part 12, and the inert gas Gb which is introduced into the carburizing process chamber 11 from the inert gas introducing part 13 are introduced.
- the carburizing gas introduction part 12 and the inert gas introduction part 13 may be provided at positions away from the gas exhaust part 14, and the carburizing gas Ga is not necessarily provided in the carburizing chamber 11. It is not necessary to make the position where the inert gas Gb is introduced and the position where the inert gas Gb is introduced the same position.
- At least the inert gas introduction part 13 is at a position (facing) opposite to the gas exhaust part 14. (FIG. 5 corresponds to the state of FIG. 2C).
- the carburizing gas remaining in the most shadowed part (opposite surface of the workpiece W on the gas exhaust part 14 side) of the flow of the atmosphere in the furnace to be exhausted is blown off during vacuum exhaust. Therefore, the carburizing gas remains in the diffusion period and does not partially over carburize.
- Carburizing chamber 12 Carburizing gas introduction unit 13: Inert gas introduction unit 14: Gas exhaust unit 121: Carburizing gas supply device 122: Carburizing gas supply pipe 123: Carburizing gas adjustment valve 131: Inert gas supplying device 132: Inert gas supply pipe 133: Inert gas regulating valve 141: Gas exhaust pipe 142: Gas exhaust regulating valve 143: Exhaust device Ga: Carburizing gas Gb: Inert gas W: Object to be treated Z: Space with a lot of carburizing gas
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Abstract
Provided is a carburizing apparatus comprising: a carburizing chamber 11 for carburizing a workpiece W; a carburizing gas introducing part 12 for introducing a carburizing gas Ga into the carburizing chamber 11; an inert gas introducing part 13 for introducing an inert gas Gb into the carburizing chamber 11; and a gas exhaust part 14 for exhausting gas from the carburizing chamber 11, wherein the carburizing gas introducing part 12 and the inert gas introducing part 13 are provided at positions spaced from the gas exhaust part 14, and the inert gas Gb is introduced from the inert gas introducing part 13 into the carburizing chamber 11 into which the carburizing gas Ga has been introduced from the carburizing gas introducing part 12.
Description
本発明は、鋼材部品等の被処理物を浸炭処理室内において浸炭処理する浸炭処理装置及び浸炭処理方法に関するものである。特に、被処理物を浸炭処理させる浸炭処理室と、浸炭処理室内に浸炭ガスを導入させる浸炭ガス導入部と、浸炭処理室内に不活性ガスを導入させる不活性ガス導入部と、浸炭処理室内におけるガスを排気させるガス排気部とを備えた浸炭処理装置において、被処理物を浸炭処理させるにあたり、被処理物が複雑な形状であっても、炭素を被処理物を均一に浸炭させて拡散させることが簡単に行えるようにした点に特徴を有するものである。
The present invention relates to a carburizing apparatus and a carburizing method for carburizing a workpiece such as a steel part in a carburizing chamber. In particular, in the carburizing chamber, the carburizing chamber for carburizing the workpiece, the carburizing gas introducing portion for introducing the carburizing gas into the carburizing chamber, the inert gas introducing portion for introducing the inert gas into the carburizing chamber, In a carburizing apparatus equipped with a gas exhaust unit that exhausts gas, when carburizing a workpiece, even if the workpiece has a complicated shape, carbon is uniformly carburized and diffused. It is characterized in that it can be easily performed.
従来から、鋼材部品等の被処理物の強度等を向上させるため、これらの被処理物の表面から内部に炭素を浸炭させて拡散させることが行われている。
Conventionally, in order to improve the strength and the like of objects to be processed such as steel parts, carbon is carburized from the surface of these objects to be diffused to the inside.
そして、このように被処理物の内部に炭素を浸炭させて拡散させるにあたり、特許文献１においては、真空浸炭炉の加熱室内で被処理物を真空加熱させ、この加熱室内に浸炭用ガスとしてアセチレン系ガスを供給し、加熱室内を１ｋＰａ以下の真空状態（低圧状態）とした炉内雰囲気で浸炭処理を行うようにしたものが提案されている。
In this way, when carbon is carburized and diffused inside the object to be treated, in Patent Document 1, the object to be treated is vacuum-heated in a heating chamber of a vacuum carburizing furnace, and acetylene is used as a carburizing gas in the heating chamber. There has been proposed a system in which a carburizing process is performed in a furnace atmosphere in which a system gas is supplied and the heating chamber is in a vacuum state (low pressure state) of 1 kPa or less.
また、特許文献２においては、浸炭ガスの供給量を高流量レベルにして被処理物の表面に炭素を浸炭させる処理（浸炭期）と、浸炭ガスの供給量を低流量レベルにして加熱室をさらに低圧にして炭素を被処理物の内部に拡散させる処理（拡散期）とを何度も繰り返して行うようにしたものが提案されている。
Further, in Patent Document 2, the process of carburizing carbon on the surface of the workpiece by carburizing gas supply amount at a high flow level (carburization period), and the heating chamber with the carburizing gas supply amount at a low flow level. Further, there has been proposed a method in which the treatment (diffusion period) in which carbon is diffused into the object to be treated at a low pressure is repeated many times.
つまり、浸炭ガスの濃い雰囲気で浸炭させ、浸炭ガスの薄い雰囲気で拡散を行なっており、浸炭ガスの濃い雰囲気とするときは浸炭ガスの補給を行ない、浸炭ガスの薄い雰囲気にするときには真空排気を行なう。
In other words, carburizing is performed in a carburizing gas-rich atmosphere and diffusion is performed in a carburizing gas-thin atmosphere. Carburizing gas is replenished when the carburizing gas-rich atmosphere is used, and vacuum exhaust is performed when the carburizing gas is used in a thin atmosphere. Do.
しかし、被処理物の形状が複雑な場合、前記の特許文献１、２に示されるものにおいては、浸炭ガスの補給の際には被処理物の入り組んだ部分に浸炭ガスが溜まり、それが真空排気の際には除去されにくく、そのまま拡散期に入り、長時間浸炭ガスに晒されて過浸炭となり、被処理物に対して均一な浸炭処理を行うことができなくなるという問題があった。
However, when the shape of the object to be processed is complicated, in the above-mentioned Patent Documents 1 and 2, when the carburizing gas is replenished, the carburizing gas accumulates in the intricate portion of the object to be processed, which is a vacuum. There is a problem that it is difficult to remove during exhaust, and enters the diffusion period as it is, and is exposed to carburizing gas for a long time, resulting in excessive carburization, and it becomes impossible to perform a uniform carburizing process on the workpiece.
また、被処理物の形状が複雑でなくても、真空排気の際に、排気される炉内雰囲気の流れの影になる部分では浸炭ガスが除去されにくく、残存したまま拡散期に入り、長時間浸炭ガスに晒されて過浸炭となってしまうという問題もあった。
Even if the shape of the object to be processed is not complicated, carburizing gas is difficult to remove in the shadow of the flow of the atmosphere in the furnace to be evacuated during vacuum evacuation. There was also a problem of being over-carburized when exposed to time carburizing gas.
また、特許文献３においては、浸炭ガスに混合させる不活性ガスの量を変更させた複数の混合ガスを選択して用いると共に、このような混合ガスを真空浸炭炉内に供給するノズルを複数設け、適当なノズルから適当な混合ガスを供給して、被処理物を浸炭処理させるようにしたものが提案されている。
In Patent Document 3, a plurality of mixed gases in which the amount of inert gas to be mixed with the carburizing gas is selected and used, and a plurality of nozzles for supplying such a mixed gas into the vacuum carburizing furnace are provided. There has been proposed an apparatus in which an appropriate gas mixture is supplied from an appropriate nozzle to carburize an object to be processed.
しかし、このように適当なノズルから適当な混合ガスを供給して、被処理物を浸炭処理させる場合においても、前記のように被処理物の形状が複雑であると、適切なノズルから適切な混合ガスを選択して供給するという操作を無作為に行なっても、被処理物に対して均一な浸炭処理を行えるようにならないという問題があった。
However, even when an appropriate gas mixture is supplied from an appropriate nozzle to carburize the object to be processed, the shape of the object to be processed is complicated as described above. Even if the operation of selecting and supplying the mixed gas is performed randomly, there has been a problem that uniform carburizing treatment cannot be performed on the workpiece.
また、特許文献４においては、真空浸炭する被処理材を内部に収容する中空の加熱室と、該加熱室に位置し被処理材を加熱するヒータと、加熱室内に浸炭用ガスを導入する浸炭用ガス導入管と、加熱室内のガスを吸引排気するための真空ポンプと、該真空ポンプと加熱室内とを連通する第１、第２、第３および第４のガス排気管と、これら第１、第２、第３および第４のガス排気管を１つずつ順番に開く排気管選択手段とを備えた真空浸炭炉において、各ガス排気管における各排気口をそれぞれ異なる位置に設け、被処理材を浸炭している最中に、加熱室内の浸炭用ガスを吸引排気するガス排気管を排気管選択手段により切り換えて、浸炭用ガスの流れ方向を変化させて、加熱室内の浸炭用ガスの時間平均した密度を均一化させると共に、浸炭用ガスの流れにさらされる被処理物の位置を変化させて、被処理物を均一に浸炭させるようにしたものが提案されている。
Moreover, in patent document 4, the hollow heating chamber which accommodates the to-be-processed material to carry out a vacuum carburizing inside, the heater which heats a to-be-processed material located in this heating chamber, and the carburizing which introduces the gas for carburizing in a heating chamber A gas introduction pipe, a vacuum pump for sucking and exhausting the gas in the heating chamber, first, second, third and fourth gas exhaust pipes communicating with the vacuum pump and the heating chamber, and the first In the vacuum carburizing furnace provided with the exhaust pipe selection means for sequentially opening the second, third and fourth gas exhaust pipes one by one, each exhaust port in each gas exhaust pipe is provided at a different position, While carburizing the material, the gas exhaust pipe for sucking and exhausting the carburizing gas in the heating chamber is switched by the exhaust pipe selection means, and the flow direction of the carburizing gas is changed to change the carburizing gas in the heating chamber. While equalizing the time-averaged density, By changing the position of the object to be treated which is exposed to the flow of coal gas, it has been proposed which is adapted to uniformly carburizing an object to be processed.
しかし、特許文献４に示されるものにおいても、ガスを排気する位置を単に順番に変えるだけでは、複雑な形状の被処理物の入り組んだ部分に溜まった浸炭ガスを十分には除去できないうえ、真空ポンプと加熱室内とを連通する第１、第２、第３および第４のガス排気管を設け、加熱室内の浸炭用ガスを吸引排気するガス排気管を排気管選択手段により切り換えて、浸炭用ガスの流れ方向を適切に変化させることが必要になり、設備に要するコストが高くつくと共に、被処理物に対して均一な浸炭処理を行うために、排気管選択手段によって加熱室内の浸炭用ガスを吸引排気するガス排気管を切り換える作業も非常に困難になるという問題があった。
However, even in the one shown in Patent Document 4, carburizing gas accumulated in the complicated part of the object to be processed cannot be sufficiently removed by simply changing the position of exhausting the gas in order. The first, second, third, and fourth gas exhaust pipes that communicate between the pump and the heating chamber are provided, and the gas exhaust pipe that sucks and exhausts the carburizing gas in the heating chamber is switched by the exhaust pipe selection means for carburizing. It is necessary to change the gas flow direction appropriately, and the cost required for the equipment is high, and the carburizing gas in the heating chamber is used by the exhaust pipe selection means in order to perform uniform carburizing treatment on the workpiece. There is a problem that the operation of switching the gas exhaust pipe for sucking and exhausting the gas becomes very difficult.
本発明は、鋼材部品等の被処理物を浸炭処理室内において浸炭処理する浸炭処理装置及び浸炭処理方法における前記のような問題を解決することを課題とするものである。
This invention makes it a subject to solve the above problems in the carburizing apparatus and the carburizing method for carburizing a workpiece such as a steel material part in the carburizing chamber.
すなわち、本発明においては、被処理物を浸炭処理させる浸炭処理室と、浸炭処理室内に浸炭ガスを導入する浸炭ガス導入部と、浸炭処理室内に不活性ガスを導入する不活性ガス導入部と、浸炭処理室内におけるガスを排気させるガス排気部とを備えた浸炭処理装置において、被処理物を浸炭処理させるにあたり、被処理物が複雑な形状であっても、被処理物を均一に浸炭させて拡散させることが簡単に行えるようにすることを課題とするものである。
That is, in the present invention, a carburizing chamber for carburizing a workpiece, a carburizing gas introducing portion for introducing a carburizing gas into the carburizing chamber, and an inert gas introducing portion for introducing an inert gas into the carburizing chamber. In a carburizing apparatus equipped with a gas exhaust unit that exhausts gas in the carburizing chamber, when the workpiece is carburized, even if the workpiece has a complicated shape, the workpiece is uniformly carburized. It is an object to make it easy to diffuse.
本発明における浸炭処理装置においては、前記のような課題を解決するため、被処理物を浸炭処理させる浸炭処理室と、浸炭処理室内に浸炭ガスを導入させる浸炭ガス導入部と、浸炭処理室内に不活性ガスを導入させる不活性ガス導入部と、浸炭処理室内におけるガスを排気させるガス排気部とを備えた浸炭処理装置において、前記の浸炭ガス導入部と不活性ガス導入部とをガス排気部から離れた位置に設け、前記の浸炭ガス導入部から浸炭ガスが導入された浸炭処理室内に前記の不活性ガス導入部から不活性ガスを導入させるようにした。
In the carburizing apparatus according to the present invention, in order to solve the above-described problems, a carburizing chamber for carburizing a workpiece, a carburizing gas introduction unit for introducing a carburizing gas into the carburizing chamber, and a carburizing chamber. In the carburizing apparatus comprising an inert gas introducing part for introducing an inert gas and a gas exhausting part for exhausting the gas in the carburizing chamber, the carburizing gas introducing part and the inert gas introducing part are gas exhausting parts. The inert gas is introduced from the inert gas introducing portion into the carburizing chamber in which the carburizing gas is introduced from the carburizing gas introducing portion.
そして、前記の浸炭処理装置のように、浸炭ガス導入部と不活性ガス導入部とをガス排気部から離れた位置に設け、浸炭ガス導入部から浸炭ガスを被処理物が導入された浸炭処理室内に導入させると、この浸炭ガスが前記のガス排気部に導かれる前に浸炭処理室内に分散されて被処理物に浸炭され、また前記の不活性ガス導入部から浸炭ガスが導入された浸炭処理室内に不活性ガスを導入させると、不活性ガスが前記のガス排気部に導かれる前に浸炭処理室内において分散されながら、浸炭処理室内における浸炭ガスと不活性ガスとが前記のガス排気部から排気されるようになる。なお、ここでいう「離れた位置」とは、同じ位置には存在しないということであり、浸炭ガスや不活性ガスが浸炭処理室内において十分に分散できるだけの距離が離れていればさらに良い。
Then, as in the case of the carburizing treatment apparatus, the carburizing gas introduction part and the inert gas introduction part are provided at positions separated from the gas exhaust part, and the carburizing gas into which the workpiece is introduced from the carburizing gas introduction part. When introduced into the room, this carburized gas is dispersed in the carburizing chamber before being led to the gas exhaust part and carburized into the workpiece, and the carburized gas is introduced from the inert gas introduction part. When the inert gas is introduced into the processing chamber, the carburizing gas and the inert gas in the carburizing chamber are dispersed in the carburizing chamber before the inert gas is guided to the gas exhaust unit. Exhausted from. Note that the “distant position” here means that they do not exist at the same position, and it is better if the carburizing gas and the inert gas are sufficiently separated from each other in the carburizing chamber.
ここで、前記の浸炭処理装置において、前記の浸炭ガス導入部と不活性ガス導入部とを前記のガス排気部から離れた位置に設けるにあたっては、前記の浸炭ガス導入部から浸炭処理室内に浸炭ガスを導入させる位置と、前記の不活性ガス導入部から浸炭処理室内に不活性ガスを導入させる位置とを同じ位置にすることができる。但し、浸炭ガス導入部から浸炭処理室内に浸炭ガスを導入させる位置と、不活性ガス導入部から浸炭処理室内に不活性ガスを導入させる位置とを必ずしも同じ位置にする必要はなく、ガス排気部から離れた位置であれば、浸炭ガス導入部から浸炭処理室内に浸炭ガスを導入させる位置と、不活性ガス導入部から浸炭処理室内に不活性ガスを導入させる位置とを異なる位置に設けるようにしてもよい。
Here, in the carburizing apparatus, when the carburizing gas introduction part and the inert gas introduction part are provided at positions separated from the gas exhaust part, the carburizing chamber is carburized from the carburizing gas introduction part. The position where the gas is introduced and the position where the inert gas is introduced from the inert gas introduction portion into the carburizing chamber can be made the same position. However, the position where the carburizing gas is introduced into the carburizing chamber from the carburizing gas inlet is not necessarily the same as the position where the inert gas is introduced into the carburizing chamber from the inert gas inlet. The position where the carburizing gas is introduced into the carburizing chamber from the carburizing gas inlet is different from the position where the inert gas is introduced into the carburizing chamber from the inert gas inlet. May be.
また、前記の浸炭処理装置においては、前記の不活性ガス導入部から浸炭処理室内に不活性ガスを導入する位置を、前記のガス排気部から浸炭処理室内を排気する位置と対向した面に設置させるようにすることができる。
Further, in the carburizing apparatus, the position where the inert gas is introduced from the inert gas introduction part into the carburizing process chamber is set on a surface opposite to the position where the gas exhausting part exhausts the carburizing process chamber. You can make it.
また、本発明に係る浸炭処理方法においては、前記のような課題を解決するため、前記のような浸炭処理装置を用い、被処理物が導入された前記の浸炭処理室内に、前記の浸炭ガス導入部から浸炭ガスを導入させて前記の被処理物に炭素を浸炭させ、前記の浸炭ガスの導入を停止させて、被処理物に浸炭させた炭素を被処理物内に拡散させるにあたり、前記の不活性ガス導入部から不活性ガスを導入して不活性ガスを浸炭処理室内に分散させながら、浸炭処理室内における浸炭ガスと不活性ガスとを、前記のガス排気部を通して排気させるようにした。
Further, in the carburizing method according to the present invention, in order to solve the above-described problems, the carburizing gas is used in the carburizing chamber in which the workpiece is introduced using the carburizing apparatus as described above. Introducing a carburizing gas from the introduction part to carburize carbon in the object to be treated, stopping the introduction of the carburizing gas, and diffusing the carbon carburized in the object to be treated in the object to be treated, While introducing the inert gas from the inert gas introduction part and dispersing the inert gas in the carburizing chamber, the carburizing gas and the inert gas in the carburizing chamber are exhausted through the gas exhaust part. .
そして、前記のような浸炭処理装置を用い、ガス排気部から離れた位置に設けられた浸炭ガス導入部から浸炭ガスを導入させると、この浸炭ガスが前記のガス排気部に導かれる前に浸炭処理室内に分散されて炭素が被処理物に分散されて浸炭され、また前記の浸炭ガスの導入を停止させて、被処理物に浸炭させた炭素を被処理物内に拡散させるにあたり、ガス排気部から離れた位置に設けられた不活性ガス導入部から不活性ガスを導入させて、浸炭処理室内における浸炭ガスと不活性ガスとを、前記のガス排気部を通して排気させるようにすると、前記の不活性ガス導入部から導入された不活性ガスによって浸炭ガスが浸炭処理室内で分散されながら不活性ガスと一緒に前記のガス排気部から排気され、浸炭ガスの一部が被処理物に残ったりするのが防止される。また、前記のように浸炭ガス導入部から浸炭処理室内に浸炭ガスを導入させる位置と、前記の不活性ガス導入部から浸炭処理室内に不活性ガスを導入させる位置とを同じ位置にすると、浸炭ガス導入部から浸炭処理室内の被処理物に向けて導入されて吹付けられた浸炭ガスの位置と同じ被処理物の位置に、不活性ガス導入部から不活性ガスが導入されて吹付けられるようになり、浸炭ガス導入部から被処理物に向けて吹付けられた浸炭ガスが、不活性ガス導入部から導入されて吹付けられた不活性ガスによって被処理物から適切に吹き飛ばされて、浸炭ガスの一部が被処理物に部分的に残るのが抑制され、前記のガス排気部に適切に導かれて排気されるようになる。
Then, when the carburizing gas is introduced from the carburizing gas introduction part provided at a position away from the gas exhausting part using the carburizing treatment apparatus as described above, the carburizing gas is introduced before the carburizing gas is introduced to the gas exhausting part. In the process chamber, carbon is dispersed in the workpiece and carburized, and the introduction of the carburizing gas is stopped, and the carbon carburized in the workpiece is diffused into the workpiece to be exhausted with gas. When the inert gas is introduced from the inert gas introduction part provided at a position away from the part and the carburizing gas and the inert gas in the carburizing treatment chamber are exhausted through the gas exhaust part, While the carburizing gas is dispersed in the carburizing chamber by the inert gas introduced from the inert gas introducing unit, the gas is exhausted from the gas exhaust unit together with the inert gas, and a part of the carburizing gas remains in the workpiece. It is prevented from. Further, if the position where the carburizing gas is introduced from the carburizing gas introduction section into the carburizing treatment chamber and the position where the inert gas is introduced from the inert gas introduction section into the carburizing treatment chamber as described above, An inert gas is introduced from the inert gas introduction unit and sprayed to the same position of the carburizing gas introduced and sprayed from the gas introduction unit toward the workpiece in the carburizing chamber. The carburizing gas sprayed from the carburizing gas introduction part toward the object to be processed is appropriately blown off from the object to be processed by the inert gas introduced from the inert gas introducing part, A part of the carburizing gas is prevented from partially remaining in the workpiece, and is appropriately guided to the gas exhaust unit and exhausted.
また、本発明に係る浸炭処理方法においては、前記の不活性ガス導入部から不活性ガスを浸炭処理室内に導入させる初期における不活性ガスの導入量を多くして、前記の浸炭ガス導入部から浸炭処理室内に導入させる浸炭ガスの量よりも不活性ガスの導入量を多くすることが好ましい。このようにすると、浸炭処理室内における浸炭ガスが、初期に多く導入される不活性ガスによって速やかに吹き飛ばされてガス排気部に適切に導かれ、浸炭ガスが被処理物の一部に残って、被処理物に浸炭むらが生じたりするのが防止される。なお、このように不活性ガス導入部から浸炭処理室内に導入させる初期における不活性ガスの導入量を多くして、浸炭ガス導入部から浸炭処理室内に導入させる浸炭ガスの量よりも不活性ガスの導入量を多くするにあたっては、浸炭処理室内における浸炭ガスの量が１分間以内に１０体積％以下になるように不活性ガスを導入させることが好ましい。
In the carburizing method according to the present invention, the amount of inert gas introduced in the initial stage for introducing the inert gas into the carburizing chamber is increased from the inert gas introducing unit, and the carburizing gas introducing unit is used. It is preferable that the introduction amount of the inert gas is larger than the amount of the carburizing gas introduced into the carburizing chamber. In this way, the carburizing gas in the carburizing chamber is quickly blown away by the inert gas introduced a lot in the initial stage and appropriately guided to the gas exhaust part, and the carburizing gas remains in a part of the workpiece. It is possible to prevent carburizing unevenness from occurring in the workpiece. In addition, the amount of inert gas introduced in the initial stage of introduction from the inert gas introduction unit into the carburizing chamber is increased, so that the inert gas is larger than the amount of carburizing gas introduced from the carburizing gas introduction unit into the carburizing chamber. In order to increase the amount of introduction, it is preferable to introduce the inert gas so that the amount of carburizing gas in the carburizing chamber is 10% by volume or less within one minute.
本発明の浸炭処理装置及び浸炭処理方法においては、浸炭処理室内に浸炭ガスを導入させる浸炭ガス導入部と、浸炭処理室内に不活性ガスを導入させる不活性ガス導入部とを、浸炭処理室内におけるガスを排気させるガス排気部から離れた位置に設け、被処理物が導入された浸炭処理室内に、浸炭ガス導入部から浸炭ガスを導入させて前記の被処理物に炭素を浸炭させ、浸炭ガスの導入を停止させて、被処理物に浸炭させた炭素を被処理物内に拡散させるにあたり、不活性ガス導入部から不活性ガスを導入して不活性ガスを浸炭処理室内に分散させながら、浸炭処理室内におけるガスを、前記のガス排気部を通して排気させるようにした。
In the carburizing treatment apparatus and the carburizing treatment method of the present invention, a carburizing gas introducing portion for introducing a carburizing gas into the carburizing treatment chamber and an inert gas introducing portion for introducing an inert gas into the carburizing treatment chamber are provided in the carburizing treatment chamber. A carburizing gas is provided at a position distant from the gas exhaust part for exhausting the gas, and the carburizing gas is introduced from the carburizing gas introducing part into the carburizing treatment chamber in which the object to be processed is introduced, and the carburizing gas is carburized into the object to be processed. In order to disperse carbon that has been carburized into the object to be processed and diffused into the object to be processed, while introducing the inert gas from the inert gas introduction part and dispersing the inert gas in the carburizing chamber, The gas in the carburizing chamber was exhausted through the gas exhaust unit.
この結果、本発明においては、浸炭処理室内において被処理物に炭素を浸炭させた浸炭ガスが、不活性ガス導入部から導入された不活性ガスによって浸炭処理室内で分散されながら不活性ガスと一緒にガス排気部から適切に排気され、炭素を被処理物に均一に浸炭させて拡散させることが簡単に行えるようになった。
As a result, in the present invention, the carburizing gas obtained by carburizing carbon in the object to be processed in the carburizing chamber is dispersed in the carburizing chamber with the inert gas introduced from the inert gas introduction unit, and together with the inert gas. Thus, it is possible to easily exhaust the carbon from the gas exhaust part and to uniformly disperse the carbon in the object to be processed.
また、排気の時に浸炭ガスが残存しやすい部分に不活性ガスを吹き付けて導入することにより、被処理物が複雑な形状であっても浸炭ガスを十分に除去することができるので、被処理物が部分的に過浸炭されることがなく、均一な浸炭処理ができるようになった。
In addition, by introducing an inert gas to the portion where the carburizing gas tends to remain during exhaust, the carburizing gas can be sufficiently removed even if the object to be processed has a complicated shape. Was not partially over-carburized, and a uniform carburizing process was made possible.
以下、本発明の実施形態に係る浸炭処理装置及び浸炭処理方法を添付図面に基づいて具体的に説明する。なお、本発明に係る浸炭処理装置及び浸炭処理方法は、下記の実施形態に示したものに限定されず、発明の要旨を変更しない範囲において、適宜変更して実施できるものである。
Hereinafter, a carburizing apparatus and a carburizing method according to an embodiment of the present invention will be specifically described with reference to the accompanying drawings. It should be noted that the carburizing apparatus and the carburizing method according to the present invention are not limited to those shown in the following embodiments, and can be implemented with appropriate modifications within the scope not changing the gist of the invention.
この実施形態における浸炭処理装置においては、図１に示すように、例えば歯車のような被処理物Ｗを浸炭処理させる浸炭処理室１１と、浸炭処理室１１内にアセチレンガス（Ｃ2Ｈ2）やエチレンガス等の浸炭ガスＧａを導入させる浸炭ガス導入部１２と、浸炭処理室１１内に窒素ガス（Ｎ2）等の不活性ガスＧｂを導入させる不活性ガス導入部１３と、
浸炭処理室１１内におけるガスを排気させるガス排気部１４とを備えており、前記の浸炭ガス導入部１２と不活性ガス導入部１３とをガス排気部１４から離れた位置に設けるようにしている。 In the carburizing apparatus in this embodiment, as shown in FIG. 1, for example, acarburizing chamber 11 for carburizing a workpiece W such as a gear, and acetylene gas (C 2 H 2 ) in the carburizing chamber 11. A carburizing gas introduction part 12 for introducing a carburizing gas Ga such as ethylene gas, an inert gas introducing part 13 for introducing an inert gas Gb such as nitrogen gas (N 2 ) into the carburizing treatment chamber 11,
Agas exhaust part 14 for exhausting the gas in the carburizing treatment chamber 11, and the carburized gas introduction part 12 and the inert gas introduction part 13 are provided at positions away from the gas exhaust part 14. .
浸炭処理室１１内におけるガスを排気させるガス排気部１４とを備えており、前記の浸炭ガス導入部１２と不活性ガス導入部１３とをガス排気部１４から離れた位置に設けるようにしている。 In the carburizing apparatus in this embodiment, as shown in FIG. 1, for example, a
A
ここで、前記のように浸炭ガス導入部１２と不活性ガス導入部１３とをガス排気部１４から離れた位置に設けるにあたり、この実施形態における浸炭処理装置においては、前記の浸炭ガス導入部１２から浸炭処理室１１内に浸炭ガスＧａを導入させる位置と、前記の不活性ガス導入部１３から浸炭処理室１１内に不活性ガスＧｂを導入させる位置とを同じ位置にする一方、浸炭処理室１１内におけるガスを排気させるガス排気部１４を、前記の浸炭ガス導入部１２や不活性ガス導入部１３から浸炭処理室１１内に浸炭ガスＧａや不活性ガスＧｂを導入させる位置とは、被処理物Ｗを挟んで反対側の位置に設けている。なお、ガス排気部１４を設ける位置は、必ずしも浸炭処理室１１内に浸炭ガスＧａや不活性ガスＧｂを導入させる位置と反対側の位置である必要はなく、これらの位置から離れた位置であればよい。
Here, in providing the carburizing gas introduction part 12 and the inert gas introduction part 13 at a position away from the gas exhaust part 14 as described above, in the carburizing apparatus in this embodiment, the carburizing gas introduction part 12 is provided. The position where the carburizing gas Ga is introduced into the carburizing chamber 11 from the same position as the position where the inert gas Gb is introduced into the carburizing chamber 11 from the inert gas introducing portion 13 is the same as the carburizing chamber. 11 is a position where the gas exhaust part 14 for exhausting the gas in the gas source 11 is introduced from the carburizing gas introduction part 12 or the inert gas introduction part 13 into the carburizing treatment chamber 11. It is provided at a position on the opposite side across the workpiece W. The position where the gas exhaust part 14 is provided is not necessarily a position opposite to the position where the carburizing gas Ga or the inert gas Gb is introduced into the carburizing chamber 11, and may be a position away from these positions. That's fine.
そして、この実施形態における浸炭処理装置において、浸炭処理室１１内に浸炭ガスＧａを導入させる前記の浸炭ガス導入部１２においては、浸炭ガスＧａを供給する浸炭ガス供給装置１２１と前記の浸炭処理室１１との間に浸炭ガス供給管１２２を設けると共に、この浸炭ガス供給管１２２に浸炭ガス調整弁１２３を設け、この浸炭ガス調整弁１２３により浸炭処理室１１内への浸炭ガスＧａの導入量や停止を調整するようにしている。
And in the carburizing treatment apparatus in this embodiment, in the carburizing gas introduction part 12 for introducing the carburizing gas Ga into the carburizing treatment chamber 11, the carburizing gas supply device 121 for supplying the carburizing gas Ga and the carburizing treatment chamber. 11 is provided with a carburizing gas supply pipe 122, and a carburizing gas adjustment valve 123 is provided in the carburizing gas supply pipe 122, and the amount of introduction of the carburizing gas Ga into the carburizing treatment chamber 11 by the carburizing gas adjustment valve 123 The stop is adjusted.
また、この実施形態における浸炭処理装置において、浸炭処理室１１内に不活性ガスＧｂを導入させる前記の不活性ガス導入部１３においては、不活性ガスＧｂを供給する不活性ガス供給装置１３１と、不活性ガス供給装置１３１から前記の浸炭処理室１１に不活性ガスＧｂを供給する不活性ガス供給管１３２を、前記の浸炭ガス調整弁１２３が設けられた浸炭ガス供給管１２２に接続させて、前記の浸炭ガスＧａと同じ位置から不活性ガスＧｂを浸炭処理室１１内に導くようにすると共に、前記の不活性ガス供給管１３２に不活性ガス調整弁１３３を設け、この不活性ガス調整弁１３３により浸炭処理室１１内への不活性ガスＧｂの導入量や停止を調整するようにしている。
Further, in the carburizing apparatus in this embodiment, in the inert gas introduction unit 13 for introducing the inert gas Gb into the carburizing chamber 11, an inert gas supply device 131 that supplies the inert gas Gb; An inert gas supply pipe 132 that supplies an inert gas Gb from the inert gas supply device 131 to the carburizing treatment chamber 11 is connected to the carburizing gas supply pipe 122 provided with the carburizing gas adjustment valve 123. The inert gas Gb is guided into the carburizing chamber 11 from the same position as the carburizing gas Ga, and an inert gas regulating valve 133 is provided in the inert gas supply pipe 132, and this inert gas regulating valve is provided. The amount of the inert gas Gb introduced into the carburizing chamber 11 and the stop thereof are adjusted by 133.
また、この実施形態における浸炭処理装置において、前記のガス排気部１４においては、浸炭処理室１１内におけるガスを排気させるガス排気管１４１に、ガス排気調整弁１４２を介して、浸炭処理室１１内におけるガスを吸引・排気させる吸引・排気装置１４３を取り付け、この吸引・排気装置１４３により、前記のガス排気調整弁１４２を介して、浸炭処理室１１内における浸炭ガスＧａや不活性ガスＧｂの排気量や停止を調整するようにしている。
Further, in the carburizing apparatus in this embodiment, in the gas exhaust unit 14, the gas exhaust pipe 141 for exhausting the gas in the carburizing process chamber 11 is connected to the inside of the carburizing process chamber 11 via the gas exhaust adjustment valve 142. A suction / exhaust device 143 for sucking / exhausting the gas in the carburizing chamber is attached, and the suction / exhaust device 143 exhausts the carburized gas Ga and the inert gas Gb in the carburizing chamber 11 through the gas exhaust control valve 142. The amount and stop are adjusted.
ここで、この実施形態における浸炭処理装置において、浸炭処理室１１内に導入された被処理物Ｗを浸炭処理するにあたっては、先ず、図１に示すように前記の浸炭ガス配給管１２２における浸炭ガス調整弁１２３と不活性ガス供給管１３２における不活性ガス調整弁１３３を閉じる一方、前記のガス排気管１４１におけるガス排気調整弁１４２を開けた状態にして浸炭処理室１１内の空気を前記の吸引排気装置１４３によって排気し、真空状態にする。
Here, in the carburizing apparatus in this embodiment, when carburizing the workpiece W introduced into the carburizing chamber 11, first, the carburizing gas in the carburizing gas distribution pipe 122 as shown in FIG. While the regulating valve 123 and the inert gas regulating valve 133 in the inert gas supply pipe 132 are closed, the gas exhaust regulating valve 142 in the gas exhaust pipe 141 is opened, and the air in the carburizing chamber 11 is sucked in. The exhaust device 143 is evacuated to make a vacuum.
続いて、図２（Ａ）に示すように、前記の浸炭ガス供給管１２２における浸炭ガス調整弁１２３を開ける一方、不活性ガス供給管１３２における不活性ガス調整弁１３３及びガス排気管１４１におけるガス排気調整弁１４２を閉じた状態にして、前記の浸炭ガス供給装置１２１から浸炭ガス供給管１２２を通して、被処理物Ｗを収容させた浸炭処理室１１内に浸炭ガスＧａを導入させて、浸炭処理室１１内に浸炭ガスＧａを分散させるようにする。
Subsequently, as shown in FIG. 2A, the carburizing gas adjusting valve 123 in the carburizing gas supply pipe 122 is opened, while the inert gas adjusting valve 133 in the inert gas supply pipe 132 and the gas in the gas exhaust pipe 141 are opened. With the exhaust adjustment valve 142 closed, the carburizing gas Ga is introduced from the carburizing gas supply device 121 through the carburizing gas supply pipe 122 into the carburizing chamber 11 containing the workpiece W, and carburizing treatment is performed. The carburizing gas Ga is dispersed in the chamber 11.
そして、このように浸炭ガスＧａを浸炭処理室１１内に所定量導入させて、浸炭処理室１１内における浸炭ガスＧａの圧力が所定圧になると、図２（Ｂ）に示すように、浸炭ガス供給管１２２における前記の浸炭ガス調整弁１２３を閉じて、浸炭処理室１１内に分散された浸炭ガスＧａ中における炭素を浸炭処理室１１内における被処理物Ｗの表面に付与し、この炭素を被処理物Ｗに浸炭させるようにする。
When a predetermined amount of the carburizing gas Ga is introduced into the carburizing chamber 11 in this way and the pressure of the carburizing gas Ga in the carburizing chamber 11 becomes a predetermined pressure, as shown in FIG. The carburizing gas regulating valve 123 in the supply pipe 122 is closed, and carbon in the carburizing gas Ga dispersed in the carburizing chamber 11 is given to the surface of the workpiece W in the carburizing chamber 11, and this carbon is added. The workpiece W is carburized.
その後、被処理物Ｗに浸炭させた炭素を、被処理物Ｗ内に拡散させるにあたっては、図２（Ｃ）に示すように、浸炭ガス供給管１２２における浸炭ガス調整弁１２３を閉じた状態で、前記の不活性ガス供給管１３２における不活性ガス調整弁１３３を開け、前記の不活性ガス供給装置１３１から不活性ガス供給管１３２により不活性ガスＧｂを、浸炭ガス供給管１２２との接続部分を通して浸炭ガスＧａと同じ位置から浸炭処理室１１内に導くと共に、前記のガス排気管１４１におけるガス排気調整弁１４２を開け、前記の吸引・排気装置１４３によりガス排気管１４１を通して、浸炭処理室１１内における浸炭ガスＧａや不活性ガスＧｂを排気させるようにする。
Thereafter, in diffusing the carbon carburized in the workpiece W into the workpiece W, as shown in FIG. 2C, the carburizing gas adjustment valve 123 in the carburizing gas supply pipe 122 is closed. The inert gas regulating valve 133 in the inert gas supply pipe 132 is opened, and the inert gas Gb is connected to the carburized gas supply pipe 122 by the inert gas supply pipe 132 from the inert gas supply device 131. Through the same position as the carburizing gas Ga through the carburizing chamber 11, the gas exhaust adjusting valve 142 in the gas exhaust pipe 141 is opened, and the carburizing chamber 11 is passed through the gas exhaust pipe 141 by the suction / exhaust device 143. The carburizing gas Ga and the inert gas Gb inside are exhausted.
ここで、前記のように不活性ガス供給管１３２から不活性ガスＧｂを浸炭処理室１１内に導きながら、前記の吸引・排気装置１４３により、浸炭処理室１１内におけるガスを排気させるようにすると、浸炭処理室１１内に導かれた不活性ガスＧｂによって浸炭処理室１１内における浸炭ガスＧａが吹き飛ばされて、浸炭処理室１１内から不活性ガスＧｂと一緒に前記のガス排気管１４１を通して排気されるようになる。
Here, when the inert gas Gb is guided from the inert gas supply pipe 132 into the carburizing chamber 11 as described above, the gas in the carburizing chamber 11 is exhausted by the suction / exhaust device 143. The carburizing gas Ga in the carburizing chamber 11 is blown off by the inert gas Gb introduced into the carburizing chamber 11, and exhausted from the carburizing chamber 11 through the gas exhaust pipe 141 together with the inert gas Gb. Will come to be.
その後、炭素の処理物Ｗ内への拡散に適した圧力や浸炭ガスの濃度となった時点で、図３に示すように、不活性ガス供給管１３２における不活性ガス調整弁１３３を閉じ、その状態で保持することにより、炭素の拡散を行なう。
Thereafter, when the pressure and the concentration of the carburizing gas suitable for the diffusion of the carbon into the processed material W are reached, the inert gas regulating valve 133 in the inert gas supply pipe 132 is closed as shown in FIG. By holding in a state, carbon is diffused.
ここで、図２（Ｂ）に示すように、浸炭ガスＧａを浸炭処理室１１に導入した際には、被処理物Ｗの浸炭ガス供給管１２２に近い部分には、図中Ｚで示すように浸炭ガスＧａが多めに付着し、真空排気の際に除去されにくくなっている。被処理物Ｗが複雑な形状をしていると、さらに除去されにくい。
Here, as shown in FIG. 2B, when the carburizing gas Ga is introduced into the carburizing chamber 11, the portion near the carburizing gas supply pipe 122 of the workpiece W is indicated by Z in the figure. A large amount of the carburizing gas Ga adheres to the surface and is difficult to be removed during vacuum exhaust. If the workpiece W has a complicated shape, it is more difficult to remove.
しかし、この実施形態においては、不活性ガスＧｂを浸炭ガスＧａと同じ位置から浸炭処理室１１内に導くようにしたため、浸炭処理室１１内の被処理物Ｗに向けて吹付けられた浸炭ガスＧａの位置と同じ位置に不活性ガスＧｂが吹付けられるようになり、被処理物Ｗが複雑な形状をしていても被処理物Ｗに吹付けられた浸炭ガスＧａが、被処理物Ｗに吹付けられた不活性ガスＧｂによってＺの部分に多めに付着した浸炭ガスが被処理物Ｗから吹き飛ばされて除去され、前記のガス排気管１４１を通して排気されるようになる。
However, in this embodiment, since the inert gas Gb is introduced into the carburizing chamber 11 from the same position as the carburizing gas Ga, the carburizing gas sprayed toward the workpiece W in the carburizing chamber 11. The inert gas Gb is sprayed at the same position as the position of Ga, and even if the workpiece W has a complicated shape, the carburized gas Ga sprayed on the workpiece W is converted into the workpiece W. The carburizing gas adhering more to the portion Z by the inert gas Gb sprayed on is blown off from the workpiece W and removed, and is exhausted through the gas exhaust pipe 141.
また、不活性ガス供給管１３２を通して不活性ガスＧｂを浸炭処理室１１内に導入させるにあたり、不活性ガスＧｂを浸炭処理室１１内に導入させる初期における不活性ガスＧｂの導入量を多くして、前記の浸炭ガス供給管１２２から浸炭処理室１１内に導入させる浸炭ガスＧａの量よりも不活性ガスＧｂの導入量を多くすると、浸炭処理室１１内における浸炭ガスＧａが、初期に多く導入された不活性ガスＧｂによって速やかに吹き飛ばされてガス排気管１４１を通して排気されるようになり、浸炭ガスＧａが被処理物Ｗの一部に残って、被処理物Ｗに浸炭むらが生じたりするのがより良く防止される。なお、このように浸炭処理室１１内に導入させる初期における不活性ガスＧｂの導入量を多くするにあたっては、浸炭処理室１１内における浸炭ガスＧａの量が１分間以内に１０体積％以下になるように不活性ガスＧｂを導入させることが好ましい。
Further, when the inert gas Gb is introduced into the carburizing chamber 11 through the inert gas supply pipe 132, the amount of the inert gas Gb introduced at the initial stage when the inert gas Gb is introduced into the carburizing chamber 11 is increased. If the introduction amount of the inert gas Gb is larger than the amount of the carburizing gas Ga introduced into the carburizing chamber 11 from the carburizing gas supply pipe 122, a large amount of the carburizing gas Ga in the carburizing chamber 11 is initially introduced. The inert gas Gb is quickly blown off and exhausted through the gas exhaust pipe 141, and the carburizing gas Ga remains in a part of the workpiece W, and the workpiece W may be unevenly carburized. Is better prevented. In addition, in increasing the introduction amount of the inert gas Gb in the initial stage to be introduced into the carburizing chamber 11 as described above, the amount of the carburizing gas Ga in the carburizing chamber 11 becomes 10% by volume or less within one minute. Thus, it is preferable to introduce the inert gas Gb.
なお、この実施形態においては、浸炭処理室１１内に導入された被処理物Ｗに炭素を浸炭させるにあたり、前記のように不活性ガス供給管１３２における不活性ガス調整弁１３３及びガス排気管１４１におけるガス排気調整弁１４２を閉じた状態にして、前記の浸炭ガス供給管１２２から浸炭ガスＧａを、被処理物Ｗを収容させた浸炭処理室１１内に導入させ、浸炭処理室１１内における浸炭ガスＧａの圧力が所定圧になるようにし、浸炭ガスＧａ中における炭素を浸炭処理室１１内における被処理物Ｗの表面に付与し、この炭素を被処理物Ｗに浸炭させるようにしたが、被処理物Ｗに炭素を浸炭させる方法はこのようなものに限定されない。
In this embodiment, when carbon is carburized into the workpiece W introduced into the carburizing chamber 11, as described above, the inert gas regulating valve 133 and the gas exhaust pipe 141 in the inert gas supply pipe 132 are used. With the gas exhaust regulating valve 142 closed, the carburizing gas Ga is introduced from the carburizing gas supply pipe 122 into the carburizing chamber 11 containing the workpiece W, and carburizing in the carburizing chamber 11 is performed. Although the pressure of the gas Ga is set to a predetermined pressure, carbon in the carburizing gas Ga is applied to the surface of the workpiece W in the carburizing chamber 11, and this carbon is carburized into the workpiece W. The method for carburizing carbon in the workpiece W is not limited to this.
例えば、図４に示すように、図２（Ｂ）の状態において浸炭ガス供給管１２２から浸炭ガスＧａを、被処理物Ｗを収容させた浸炭処理室１１内に導入させる一方、前記のガス排気管１４１におけるガス排気調整弁１４２をある程度開けて、浸炭処理室１１内における浸炭ガスＧａの圧力を所定圧に維持させるようにして、浸炭処理室１１内に導入された被処理物Ｗに炭素を浸炭させるようにすることもできる。
For example, as shown in FIG. 4, while the carburizing gas Ga is introduced from the carburizing gas supply pipe 122 into the carburizing chamber 11 containing the workpiece W in the state of FIG. The gas exhaust regulating valve 142 in the pipe 141 is opened to some extent so that the pressure of the carburizing gas Ga in the carburizing chamber 11 is maintained at a predetermined pressure, and carbon is introduced into the workpiece W introduced into the carburizing chamber 11. It can also be carburized.
また、前記の実施形態においては、浸炭ガス導入部１２から浸炭処理室１１内に浸炭ガスＧａを導入させる位置と、不活性ガス導入部１３から浸炭処理室１１内に不活性ガスＧｂを導入させる位置とを同じ位置にしたが、浸炭ガス導入部１２と不活性ガス導入部１３とをガス排気部１４から離れた位置に設けるようにすればよく、必ずしも、浸炭処理室１１内に浸炭ガスＧａを導入させる位置と、不活性ガスＧｂを導入させる位置とを同じ位置にする必要はない。
Moreover, in the said embodiment, the position which introduces the carburizing gas Ga into the carburizing process chamber 11 from the carburizing gas introducing part 12, and the inert gas Gb which is introduced into the carburizing process chamber 11 from the inert gas introducing part 13 are introduced. However, the carburizing gas introduction part 12 and the inert gas introduction part 13 may be provided at positions away from the gas exhaust part 14, and the carburizing gas Ga is not necessarily provided in the carburizing chamber 11. It is not necessary to make the position where the inert gas Gb is introduced and the position where the inert gas Gb is introduced the same position.
しかし、図５に示すように、少なくとも不活性ガス導入部１３は、ガス排気部１４とは反対側の位置（対面）にした方がよい。（図５は図２（Ｃ）の状態に対応している。）
However, as shown in FIG. 5, it is preferable that at least the inert gas introduction part 13 is at a position (facing) opposite to the gas exhaust part 14. (FIG. 5 corresponds to the state of FIG. 2C).
そのようにすれば真空排気の際に、排気される炉内雰囲気の流れの最も影になる部分（被処理物Ｗのガス排気部１４側の反対面）に残存している浸炭ガスが吹き飛ばされて排気されるため、浸炭ガスが残存したまま拡散期に入り、部分的に過浸炭してしまうことがなくなる。
By doing so, the carburizing gas remaining in the most shadowed part (opposite surface of the workpiece W on the gas exhaust part 14 side) of the flow of the atmosphere in the furnace to be exhausted is blown off during vacuum exhaust. Therefore, the carburizing gas remains in the diffusion period and does not partially over carburize.
１１ ：浸炭処理室
１２ ：浸炭ガス導入部
１３ ：不活性ガス導入部
１４ ：ガス排気部
１２１ ：浸炭ガス供給装置
１２２ ：浸炭ガス供給管
１２３ ：浸炭ガス調整弁
１３１ ：不活性ガス供給装置
１３２ ：不活性ガス供給管
１３３ ：不活性ガス調整弁
１４１ ：ガス排気管
１４２ ：ガス排気調整弁
１４３ ：排気装置
Ｇａ ：浸炭ガス
Ｇｂ ：不活性ガス
Ｗ ：被処理物
Ｚ ：浸炭ガスの多い空間 11: Carburizing chamber 12: Carburizing gas introduction unit 13: Inert gas introduction unit 14: Gas exhaust unit 121: Carburizing gas supply device 122: Carburizing gas supply pipe 123: Carburizing gas adjustment valve 131: Inert gas supplying device 132: Inert gas supply pipe 133: Inert gas regulating valve 141: Gas exhaust pipe 142: Gas exhaust regulating valve 143: Exhaust device Ga: Carburizing gas Gb: Inert gas W: Object to be treated Z: Space with a lot of carburizing gas
１２ ：浸炭ガス導入部
１３ ：不活性ガス導入部
１４ ：ガス排気部
１２１ ：浸炭ガス供給装置
１２２ ：浸炭ガス供給管
１２３ ：浸炭ガス調整弁
１３１ ：不活性ガス供給装置
１３２ ：不活性ガス供給管
１３３ ：不活性ガス調整弁
１４１ ：ガス排気管
１４２ ：ガス排気調整弁
１４３ ：排気装置
Ｇａ ：浸炭ガス
Ｇｂ ：不活性ガス
Ｗ ：被処理物
Ｚ ：浸炭ガスの多い空間 11: Carburizing chamber 12: Carburizing gas introduction unit 13: Inert gas introduction unit 14: Gas exhaust unit 121: Carburizing gas supply device 122: Carburizing gas supply pipe 123: Carburizing gas adjustment valve 131: Inert gas supplying device 132: Inert gas supply pipe 133: Inert gas regulating valve 141: Gas exhaust pipe 142: Gas exhaust regulating valve 143: Exhaust device Ga: Carburizing gas Gb: Inert gas W: Object to be treated Z: Space with a lot of carburizing gas
Claims (6)
- 被処理物を浸炭処理させる浸炭処理室と、浸炭処理室内に浸炭ガスを導入させる浸炭ガス導入部と、浸炭処理室内に不活性ガスを導入させる不活性ガス導入部と、浸炭処理室内におけるガスを排気させるガス排気部とを備えた浸炭処理装置において、前記の浸炭ガス導入部と不活性ガス導入部とをガス排気部から離れた位置に設け、前記の浸炭ガス導入部から浸炭ガスが導入された浸炭処理室内に前記の不活性ガス導入部から不活性ガスを導入させることを特徴とする浸炭処理装置。 A carburizing chamber for carburizing the workpiece, a carburizing gas introducing portion for introducing a carburizing gas into the carburizing chamber, an inert gas introducing portion for introducing an inert gas into the carburizing chamber, and a gas in the carburizing chamber. In a carburizing apparatus having a gas exhaust unit for exhausting, the carburizing gas introduction unit and the inert gas introduction unit are provided at positions away from the gas exhaust unit, and the carburizing gas is introduced from the carburizing gas introduction unit. A carburizing apparatus, wherein an inert gas is introduced into the carburizing chamber from the inert gas introduction section.
- 請求項１に記載の浸炭処理装置において、前記の浸炭ガス導入部から浸炭処理室内に浸炭ガスを導入させる位置と、前記の不活性ガス導入部から浸炭処理室内に不活性ガスを導入させる位置とを同じ位置にしたことを特徴とする浸炭処理装置。 The carburizing apparatus according to claim 1, wherein a position for introducing a carburizing gas into the carburizing chamber from the carburizing gas introduction section, and a position for introducing an inert gas into the carburizing chamber from the inert gas introduction section; A carburizing apparatus characterized by having the same position.
- 請求項１又は請求項２に記載の浸炭処理装置において、前記の不活性ガス導入部から浸炭処理室内に不活性ガスを導入する位置を、前記のガス排気部から浸炭処理室内を排気する位置と対向した面に設置したことを特徴とする浸炭処理装置。 The carburizing apparatus according to claim 1 or 2, wherein a position where the inert gas is introduced into the carburizing chamber from the inert gas introduction section is a position where the carburizing chamber is exhausted from the gas exhaust section. A carburizing apparatus characterized by being installed on opposite surfaces.
- 請求項１～請求項３の何れか１項に記載の浸炭処理装置を用いた浸炭処理方法において、被処理物が導入された前記の浸炭処理室内に、前記の浸炭ガス導入部から浸炭ガスを導入させて前記の被処理物に炭素を浸炭させ、前記の浸炭ガスの導入を停止させて、被処理物に浸炭させた炭素を被処理物内に拡散させるにあたり、前記の不活性ガス導入部から不活性ガスを導入して、浸炭処理室内における浸炭ガスと不活性ガスとを、前記のガス排気部を通して排気させることを特徴とする浸炭処理方法。 The carburizing method using the carburizing apparatus according to any one of claims 1 to 3, wherein the carburizing gas is introduced from the carburizing gas introducing portion into the carburizing chamber into which the workpiece is introduced. Introducing the inert gas introduction unit in order to diffuse the carbon carburized in the object to be processed by introducing the carburized carbon into the object to be processed and stopping the introduction of the carburizing gas. A carburizing treatment method, wherein an inert gas is introduced from the carburizing chamber, and the carburizing gas and the inert gas in the carburizing treatment chamber are exhausted through the gas exhaust section.
- 請求項４に記載の浸炭処理方法において、前記の不活性ガス導入部から不活性ガスを浸炭処理室内に導入させる初期における不活性ガスの導入量を多くして、前記の浸炭ガス導入部から浸炭処理室内に導入させる浸炭ガスの量よりも不活性ガスの導入量を多くしたことを特徴とする浸炭処理方法。 5. The carburizing method according to claim 4, wherein the introduction amount of the inert gas at the initial stage of introducing the inert gas from the inert gas introduction portion into the carburizing chamber is increased, and the carburization gas is introduced from the carburization gas introduction portion. A carburizing method characterized in that the amount of inert gas introduced is larger than the amount of carburizing gas introduced into the processing chamber.
- 請求項４又は請求項５に記載の浸炭処理方法において、前記の不活性ガス導入部から不活性ガスを浸炭処理室内に導入させるにあたり、浸炭処理室内における浸炭ガスの量が１分間以内に１０体積％以下になるように、不活性ガスを浸炭処理室内に導入させることを特徴とする浸炭処理方法。 6. The carburizing method according to claim 4, wherein the amount of carburizing gas in the carburizing chamber is 10 volumes within one minute when the inert gas is introduced from the inert gas introduction portion into the carburizing chamber. A carburizing method, wherein an inert gas is introduced into the carburizing chamber so as to be less than or equal to%.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017104155A JP2018199845A (en) | 2017-05-26 | 2017-05-26 | Carburizing apparatus and carburizing method |
| JP2017-104155 | 2017-05-26 |
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| Publication Number | Publication Date |
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| WO2018216615A1 true WO2018216615A1 (en) | 2018-11-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| PCT/JP2018/019303 WO2018216615A1 (en) | 2017-05-26 | 2018-05-18 | Carburizing apparatus and carburizing method |
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| WO (1) | WO2018216615A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5881963A (en) * | 1981-11-06 | 1983-05-17 | Daido Steel Co Ltd | Vacuum carburization method |
| JP2002115042A (en) * | 2000-10-05 | 2002-04-19 | Toyota Motor Corp | Method and system for vacuum carburizing |
| JP2002167658A (en) * | 2000-11-30 | 2002-06-11 | Chugai Ro Co Ltd | Method of vacuum carburizing for steel parts |
| JP2005120404A (en) * | 2003-10-15 | 2005-05-12 | Nsk Ltd | Gas carburization method, gas carbonitriding method, and surface treatment device |
| JP2016000845A (en) * | 2014-06-11 | 2016-01-07 | 株式会社Ihi | Carburizing apparatus |
-
2017
- 2017-05-26 JP JP2017104155A patent/JP2018199845A/en active Pending
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2018
- 2018-05-18 WO PCT/JP2018/019303 patent/WO2018216615A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5881963A (en) * | 1981-11-06 | 1983-05-17 | Daido Steel Co Ltd | Vacuum carburization method |
| JP2002115042A (en) * | 2000-10-05 | 2002-04-19 | Toyota Motor Corp | Method and system for vacuum carburizing |
| JP2002167658A (en) * | 2000-11-30 | 2002-06-11 | Chugai Ro Co Ltd | Method of vacuum carburizing for steel parts |
| JP2005120404A (en) * | 2003-10-15 | 2005-05-12 | Nsk Ltd | Gas carburization method, gas carbonitriding method, and surface treatment device |
| JP2016000845A (en) * | 2014-06-11 | 2016-01-07 | 株式会社Ihi | Carburizing apparatus |
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| JP2018199845A (en) | 2018-12-20 |
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