WO2018214970A1 - 靶材搬运车 - Google Patents
靶材搬运车 Download PDFInfo
- Publication number
- WO2018214970A1 WO2018214970A1 PCT/CN2018/088484 CN2018088484W WO2018214970A1 WO 2018214970 A1 WO2018214970 A1 WO 2018214970A1 CN 2018088484 W CN2018088484 W CN 2018088484W WO 2018214970 A1 WO2018214970 A1 WO 2018214970A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- target
- positioning
- bracket
- fork
- support plate
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
- B62B1/00—Hand carts having only one axis carrying one or more transport wheels; Equipment therefor
- B62B1/10—Hand carts having only one axis carrying one or more transport wheels; Equipment therefor in which the load is intended to be transferred totally to the wheels
- B62B1/14—Hand carts having only one axis carrying one or more transport wheels; Equipment therefor in which the load is intended to be transferred totally to the wheels involving means for grappling or securing in place objects to be carried; Loading or unloading equipment
- B62B1/142—Hand carts having only one axis carrying one or more transport wheels; Equipment therefor in which the load is intended to be transferred totally to the wheels involving means for grappling or securing in place objects to be carried; Loading or unloading equipment with object clamping means being movable substantially parallel to the ground surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
- B62B1/00—Hand carts having only one axis carrying one or more transport wheels; Equipment therefor
- B62B1/26—Hand carts having only one axis carrying one or more transport wheels; Equipment therefor characterised by supports specially adapted to objects of definite shape
- B62B1/264—Hand carts having only one axis carrying one or more transport wheels; Equipment therefor characterised by supports specially adapted to objects of definite shape the objects being of cylindrical shape, e.g. barrels, buckets, dustbins
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
Definitions
- Embodiments of the present application relate to, but are not limited to, a handling device, and in particular, but not limited to, a target handling vehicle.
- the target is an important part of the magnetron sputtering coating technology.
- the target is a target material for high-speed energy-energy particle bombardment, and different membrane systems can be obtained by replacing different targets.
- the target In the target production process, the target needs to be installed on the spraying platform and the lathe for processing. When installing and disassembling the target, it is usually carried out manually, but since the target weighs 50KG, manual disassembly and assembly is time-consuming and laborious, and At least two staff members are required to complete, which seriously wastes human resources. In addition, if the manual disassembly and assembly is not good, it will hit the surface of the target and cause the target to be scrapped, resulting in unnecessary waste.
- the present application provides a target pallet truck for mounting, dismounting and transporting a target, which has the advantages of simple structure, convenient operation and high work efficiency.
- a target pallet truck includes a lift truck and a target fixture, the lift truck including a vehicle body and a liftable fork disposed on the vehicle body, the target fixture being disposed on the fork Above, among them,
- the target fixture includes a target bracket mechanism and at least one locking mechanism, the at least one locking mechanism being disposed on the target bracket mechanism, the at least one locking mechanism configured to secure the target On the target carrier mechanism.
- a fork that can be lifted and lowered is arranged on the vehicle body, and a target fixing device is disposed on the fork, wherein the lifting of the fork can drive the target fixing device to synchronously move up and down to move the target fixing device to Suitable for mounting or dismounting the height of the target, the target fixture is used to fix the target, including the target bracket mechanism and the locking mechanism, the target is placed on the target bracket mechanism, and the locking mechanism fixes the target to the target On the material bracket mechanism.
- the transport function of the vehicle body can be realized by utilizing the transport function of the vehicle body.
- the target transfer vehicle has the functions of facilitating the transfer, installation and disassembly of the target, can replace the manual operation, and has the advantages of simple structure, convenient operation and high work efficiency.
- the target carrier mechanism includes a mounting bracket, a support plate, and a bracket, the support plate being fixedly mounted on the fork by the mounting bracket, the bracket being fixedly mounted on The support plate extends in a direction away from the mounting bracket.
- the brackets are at least two, and the mounting bracket and the bracket are respectively fixedly disposed at two sides of the support plate.
- the bracket is provided with one, and the mounting bracket and the bracket are respectively fixedly disposed on both sides of the support plate.
- the target carrier mechanism includes a mounting bracket, a support plate, and a bracket, the support plate being fixedly mounted on the fork by the mounting bracket, the bracket being movable Mounted on the support plate and extending in a direction away from the mounting bracket.
- the bracket has a positioning groove, and the opening of the positioning groove faces upward.
- the mounting bracket includes a first plate body and a second plate body, the first plate body is horizontally disposed and fixedly coupled to the fork, and the second plate body is vertically fixed at The support plate is mounted on the second plate body on the first plate body.
- a reinforcing rib is disposed between the second plate body and the first plate body.
- the target truck further includes a horizontal position adjustment mechanism including a slider and a slide rail, the slider being mounted in the support plate and the mounting bracket
- the slide rail is mounted on the other of the support plate and the mounting bracket, and the slide rail is slidably coupled to the two sliders.
- the target pallet further includes a horizontal position adjustment mechanism including a slider and a slide rail, the slide rail being fixedly mounted on the support plate adjacent to the first On the surface of the two plates, the sliders are two and are symmetrically mounted on the second plate.
- the target truck further includes a horizontal position adjustment mechanism including a slider and a slide rail, the slider being mounted in the fork and the vehicle body
- the slide rail is mounted on the other of the fork and the vehicle body, and the slide rail is slidably coupled to the slider.
- the target pallet further includes a horizontal position adjustment mechanism including a slider and a slide rail, the slider being mounted on the fork and the target fixed In one of the devices, the slide rail is mounted on the other of the fork and the target fixture, the slide rail being slidably coupled to the slider.
- the horizontal position adjustment mechanism further includes a protective cover that is sleeved on at least a portion of the slide rail.
- the protective cover is telescopically coupled between the slider and an end of the slide rail.
- the protective cover is provided with two, and one ends of the two protective covers are fixedly connected to the slider, and the other ends of the two protective covers are respectively associated with the sliding rails. The two ends are fixedly connected.
- the target pallet further includes a positioning mechanism including a positioning pin and a positioning hole fitted to the positioning pin, the positioning holes being respectively disposed on the support plate and the The positioning pin is insertably engaged or separated from the positioning hole.
- the target pallet further includes a positioning mechanism
- the positioning mechanism includes a positioning plate and a positioning pin
- the second plate body is provided with a mounting hole
- the positioning pin is inserted in the In the mounting hole
- the positioning plate is fixed on the support plate
- the positioning plate is provided with a positioning hole
- the positioning pin and the positioning hole can be plugged or separated.
- the target pallet further includes a positioning mechanism including a positioning pin and a positioning hole fitted to the positioning pin, the positioning holes being respectively disposed on the fork and the In the vehicle body, the positioning pin and the positioning hole can be plugged or separated.
- the target pallet further includes a positioning mechanism including a positioning pin and a positioning hole fitted to the positioning pin, the positioning holes being respectively disposed on the fork and the In the target fixing device, the positioning pin and the positioning hole can be plugged or separated.
- a positioning mechanism including a positioning pin and a positioning hole fitted to the positioning pin, the positioning holes being respectively disposed on the fork and the In the target fixing device, the positioning pin and the positioning hole can be plugged or separated.
- FIG. 1 is a schematic view showing the overall structure of a target pallet truck according to an embodiment of the present application
- FIG. 2 is an exploded perspective view showing a partial structure of a target pallet truck according to an embodiment of the present application
- FIG 3 is a schematic view of a locking mechanism of a target truck according to an embodiment of the present application.
- a target pallet truck including a lift truck
- the lift truck includes a vehicle body 1 and a liftable fork 2 provided on the vehicle body 1, and the fork 2 can be moved up and down with respect to the vehicle body 1 in the up and down direction.
- a target fixing device is provided on the fork 2, and a target fixing device is used to fix the target.
- the target fixing device can be driven to perform the lifting movement synchronously to move the target fixing device to a height suitable for mounting or dismounting the target, so as to fix the target to the target fixing device.
- the transport function of the vehicle body 1 can be utilized to realize the transport of the target.
- the target transfer vehicle has the functions of facilitating the transfer, installation and disassembly of the target, and can replace the manual operation of the target, and has the advantages of simple structure, convenient operation and high work efficiency.
- the fork 2 is L-shaped, the L-shaped vertical portion 23 is for connection with the vehicle body 1, and the L-shaped horizontal portion 22 is for connection with the target fixing device to support the target. Material fixing device.
- the fork 2 can be provided with a plurality of.
- the fork 2 is provided with two, and the two forks 2 are synchronously moved, and the target fixing device is mounted on the two forks 2.
- the target fixing device comprises a target bracket mechanism 3 and a locking mechanism 4, the target bracket mechanism 3 is used for carrying the target, and the target bracket mechanism 3 is provided with at least one locking mechanism 4, and the locking The mechanism 4 is used to fix the target on the target carrier mechanism 3.
- the target is placed on the target carrier mechanism 3, and then the target is fixed to the target carrier mechanism 3 using the locking mechanism 4, and then the transportation and height of the target are realized by operating the vehicle body 1. Adjustment to achieve transport and installation of the target.
- a target from a certain station such as a spraying platform, etc.
- the target is fixed to the target carrier mechanism 3, and then the target is removed from the lathe or the spray platform, and finally the target is transported to other stations (such as a lathe, etc.) through the vehicle body 1.
- the target is removed from the target transfer vehicle and installed at a certain station
- the height of the fork 2 on the vehicle body 1 is first adjusted, so that the target on the target bracket mechanism 3 and the mounting platform on the station In contact, the locking mechanism 4 is then released, the target is supported on the mounting platform, and the target transfer vehicle is finally removed.
- the above-described target bracket mechanism 3 includes a mounting bracket 5, a support plate 6 and a bracket 7, which is mounted on the fork 2 via a mounting bracket 5, which is mounted on the support plate 6 and is used to support the target .
- the mounting bracket 5 and the bracket 7 are respectively disposed on the sides of the support plate 6, and the bracket 7 extends in a direction away from the mounting bracket 5 (the mounting bracket 5 is in the supporting plate in the figure) 6 is adjacent to the side of the fork 2, the bracket 7 extends in a direction away from the fork 2), the mounting bracket 5 is fixedly mounted on the fork 2, and the support plate 6 and the bracket are realized by adjusting the height adjustment of the fork 2. 7 height adjustment.
- the bracket 7 is used to hold the target, so at least two. In the embodiment shown in the drawings, two brackets 7 are employed, and two brackets 7 are respectively disposed at both ends of the support plate 6. In order to prevent accidents caused by damage to a certain bracket 7, the bracket 7 can also be set to three or four or more from a safety point of view. It will be understood by those skilled in the art that in order to bring the target into a horizontal state, each of the brackets 7 should be disposed at the same level.
- the number of the brackets 7 may be one, and the target is supported by a bracket 7.
- the width of the bracket 7 can be set relatively large, which can increase the support area of the bracket 7 and the target, and improve the stability of the support.
- the target carrier mechanism 3 includes a mounting bracket 5, a support plate 6 and a bracket 7 fixedly mounted on the fork 2 by the mounting bracket 5, the mounting bracket 5 and the bracket 7 Separately disposed on the sides of the support plate 6, the bracket 7 is movably mounted on the support plate 6 and extends in a direction away from the mounting bracket.
- the bracket 7 is provided with at least two and movably mounted on the support plate 6, and the distance between the brackets 7 is adjusted by moving the bracket 7 to be adapted to support different lengths. Target.
- the bracket 7 is provided with one and is movably mounted on the support plate 6, and the position of the bracket 7 is adjusted by moving the bracket 7 to be adapted to support the target.
- the bracket 7 is provided with one or at least two, and is rotatably mounted on the support plate 6, and the position of the bracket 7 is adjusted by rotating the bracket 7 to be adapted to support the target .
- an opening-up positioning groove 8 may be formed in the bracket 7, and the target may be mounted in the positioning groove 8 to fix the target.
- the positioning groove 8 on the bracket 7 is an arc-shaped positioning groove with an opening upward, which can function as a positioning target, and an arc
- the curvature of the shaped positioning groove should be designed according to the outer diameter of the target. It should be understood that the positioning groove 8 can also be provided in other shapes such as a rectangle or the like.
- the bracket 7 is not provided with a positioning groove, but has a support plane with which the target is supported, and then the target is pressed and fixed to the support plane by the locking mechanism 4.
- the mounting bracket 5 includes a first plate body 13 and a second plate body 14.
- the first plate body 13 is horizontally disposed and fixedly coupled to the fork 2 by bolts 24; the second plate body 14 is vertically fixed to the first plate body 13.
- Both the first plate body 13 and the second plate body 14 are preferably of a unitary structure, and the overall design adopts an L-shaped design, such as an L-shaped mounting bracket that can be bent by bending.
- the first plate body 13 and the second plate body 14 may be fixed by other means, such as by welding, bonding, or the like.
- a reinforcing rib 15 is disposed between the second plate body 14 and the first plate body 13.
- the strength of the mounting bracket can be effectively increased by the arrangement of the reinforcing ribs 15.
- the ribs 15 may be provided in plurality.
- the reinforcing rib 15 is designed as two, the spacing between the two reinforcing ribs 15 is slightly smaller than the spacing between the two forks 2, and the bolt 24 places the first plate 13 at 2 The outer portion of the rib 15 is fixed to the horizontal portion 22 of the fork 2.
- the backing plate 16 is a rectangular plate.
- the backing plate 16 may be an aluminum plate or a metal plate or a non-metal plate of other materials.
- the target truck may further include a horizontal position adjustment mechanism for adjusting the horizontal position of the carriage 7 to facilitate disassembly and assembly of the target.
- a horizontal position adjustment mechanism for adjusting the horizontal position of the carriage 7 to facilitate disassembly and assembly of the target.
- the bracket 7 needs to be in contact with the target, and due to various factors such as space constraints, the vehicle body 1 may not be able to move to the bracket 7 and the target. The material is in contact, at which point the carriage 7 can be moved horizontally to move the carriage 7 into contact with the target.
- the target on the bracket 7 needs to be in contact with the mounting platform on the station, and the vehicle body is affected by various factors such as space constraints. 1 may not be able to move the target on the carriage 7 into contact with the mounting platform on the station, in which case the carriage 7 can be moved horizontally to bring the target into contact with the mounting platform on the station.
- the horizontal position adjusting mechanism can adjust the horizontal position of the fork 2 to adjust the horizontal position of the bracket 7, or the horizontal position adjusting mechanism can adjust the horizontal position of the target fixing device relative to the fork 2 to achieve adjustment
- the purpose of the horizontal position of the carriage 7 or the horizontal position of the support plate 6 relative to the mounting bracket 5 can be adjusted to achieve the purpose of adjusting the horizontal position of the carriage 7.
- the horizontal position adjusting mechanism achieves the purpose of adjusting the horizontal position of the bracket 7 by adjusting the horizontal position of the support plate 6 with respect to the mounting bracket 5, thereby achieving the purpose of adjusting the horizontal position of the target.
- the horizontal position adjusting mechanism includes a slider 9 and a slide rail fixedly mounted on the support plate 6 on the surface of the second plate body 14 .
- the slider 9 is two and symmetrically mounted on the second plate body 14 .
- the slide rail is slidably coupled to the two sliders 9.
- the slide rails may be fixedly mounted on the second plate body 14 and the two sliders 9 may be fixedly mounted on the support plate 6.
- the number of sliders 9 can be set to one or more (including three).
- the horizontal position adjustment mechanism is used to adjust the horizontal position of the fork 2 relative to the vehicle body 1 for the purpose of adjusting the horizontal position of the carriage 7 and the target.
- the fork 2 can be moved not only in the vertical direction with respect to the vehicle body 1, but also horizontally with respect to the vehicle body 1.
- the horizontal position adjusting mechanism includes a slider and a slide rail, and the slider is mounted on one of the fork 2 and the vehicle body 1, and the slide rail is mounted on the other of the fork 2 and the vehicle body 1, the slide rail Sliding connection with the slider.
- the arrangement of the horizontal position adjustment mechanism enables the fork 2 to be horizontally displaced, thereby driving the horizontal displacement of the target fixed to the target fixture.
- a slider may be provided on the vertical portion 23 of the L-shaped fork 2 toward the side of the vehicle body, and a slide rail may be provided on the vehicle body 1, and the slide rail is slidably coupled to the slider.
- the horizontal position adjustment mechanism achieves the purpose of adjusting the horizontal position of the carriage 7 and the target by adjusting the horizontal position of the target fixture relative to the fork 2.
- the horizontal position adjustment mechanism includes a slider mounted on one of the fork 2 and the target fixture, and a slide rail mounted on the other of the fork 2 and the target fixture, the slide rail Sliding connection with the slider.
- a slider may be provided on the upper surface of the horizontal portion 22 of the L-shaped fork 2, and a slide rail may be provided on the lower surface of the first plate body 13 of the mounting bracket, and the slide rail is slidably coupled to the slider.
- a flat position adjusting mechanism for adjusting the horizontal position of the fork 2 with respect to the vehicle body 1, and a flat position adjustment for adjusting the horizontal position of the target fixing device with respect to the fork 2.
- the mechanism adjusts the flat position adjustment mechanism of the support plate 6 with respect to the horizontal position of the mounting bracket 5.
- only one of the horizontal position adjusting mechanisms may be provided, or two or three horizontal position adjusting mechanisms may be simultaneously provided to increase the range of the horizontal displacement of the target.
- the target fixing device can be fixed on the fork 2, can not be displaced relative to the fork 2, or can be horizontally displaced relative to the fork 2 to increase The range of horizontal displacement of large target fixtures.
- the protective cover 10 can be sleeved on the slide rail, and the protective cover 10 can cover at least a portion of the slide rail.
- the protective cover 10 is disposed at both ends of the slide rail, the protective cover 10 is sleeved on the slide rail, and the protective cover 10 is telescopically connected between the slider 9 and the end of the slide rail. .
- the protective cover 10 can be stretched or compressed, wherein one end of the protective cover 10 is fixedly coupled to the slider 9 and the other end is fixedly coupled to the end of the slide rail.
- one of the protective covers 10 can be stretched, and the other protective cover 10 can be compressed so that the portion of the slide rail between its end and the slider 9 is always protected by the protective cover 10.
- the protective cover 10 can be used for both clean and hygienic functions, and can effectively protect the slide rails from being damaged by bumps.
- the protective cover 10 may be made of rubber or other materials such as silica gel.
- the protective cover 10 can be a corrugated protective cover so as to be stretched or compressed as the horizontal displacement of the support plate 6.
- the protective cover 10 may further include a plurality of slidingly connected sub-protective covers, and the expansion and contraction of the protective cover 10 is achieved by a sliding connection between the sub-protective covers so that the protective cover 10 can be stretched or compressed with the horizontal displacement of the support plate 6. .
- the protective cover can completely enclose the slide rails.
- one cover may be provided, which is sleeved on the slide rail, and two ends of the protective cover are respectively fixed with the two ends of the slide rail to completely cover the slide rail.
- the target does not need to be horizontally adjusted during the transfer process, it is also necessary to provide a positioning mechanism for positioning the horizontally movable fork 2 relative to the vehicle body 1 from a safety point of view, or
- the horizontally movable target fixture is positioned relative to the fork 2 or the horizontally movable support plate 6 is positioned relative to the mounting bracket 5.
- the support plate 6 is horizontally movable relative to the mounting bracket 5 for positioning the support plate 6 horizontally relative to the mounting bracket 5 during the transfer of the target, in disassembling the target During the process, the support plate 6 is disengaged and horizontally movable relative to the mounting bracket 5.
- the positioning mechanism may include a positioning plate 11 and a positioning pin 12, and the middle position of the second plate body 14 is provided with a mounting hole, and the positioning pin 12 is inserted into the mounting hole, and the positioning plate 11 is fixed.
- the positioning plate 11 is provided with a positioning hole that cooperates with the positioning pin 12.
- the center line of the support plate 6 is aligned with the center line of the second plate body 14, and the positioning hole on the positioning plate 11 is coaxial with the mounting hole on the second plate body 14, and then the positioning pin is used. 12 Insert the positioning hole so that the support plate 6 cannot move in the horizontal position, which effectively ensures the safety of the transport process.
- the positioning pin 12 is separated from the positioning hole, at which time the support plate 6 is horizontally movable relative to the second plate 14 to adjust the horizontal position of the target.
- the positioning plate 11 may not be provided, but a positioning hole may be directly formed in the middle of the support plate 6. It should also be understood that the positions of the mounting holes and the positioning holes are not limited to the central portions of the support plate 6 and the second plate body 14, and may be disposed at any other position.
- the fork 2 is horizontally movable relative to the body 1, and a positioning mechanism is used to position the fork 2 horizontally during the transfer of the target.
- the positioning mechanism may include a positioning pin, and the fork 2 and the vehicle body 1 are respectively provided with positioning holes, and the positioning pin is inserted into the two positioning holes to horizontally fix the fork 2 and the vehicle body 1.
- a positioning hole may be formed in the vertical portion 23 of the L-shaped fork 2 toward the side of the vehicle body, and a positioning hole may be formed in the vehicle body 1.
- the positioning pin can be mated with the fork 2 and the positioning hole on the vehicle body 1 to horizontally position the fork 2; the positioning pin can also be separated from the fork 2 and the positioning hole on the vehicle body 1, so that the fork 2 can be Horizontal movement relative to the vehicle body 1.
- the target fixture can be moved horizontally relative to the fork 2, which is used to position the target fixture horizontally during target transport.
- the positioning mechanism may include a positioning pin, and the positioning fork is respectively disposed on the fork 2 and the target fixing device, and the positioning pin is inserted into the two positioning holes to horizontally fix the fork 2 and the target fixing device.
- a positioning hole may be formed in the horizontal portion 22 of the L-shaped fork 2, and a positioning hole may be formed in the first plate 13 of the mounting bracket 5.
- the positioning pin can be mated with the positioning hole on the fork 2 and the first plate body 13 to horizontally position the target fixing device; the positioning pin can also be separated from the positioning hole on the fork 2 and the first plate body 13
- the target fixture can be moved horizontally relative to the fork 2.
- the lift truck 1 should at least have a vehicle body 1, a fork 2 and a fork height adjustment mechanism, wherein the fork height adjustment mechanism can be either a manual adjustment mechanism or an automatic adjustment mechanism, that is, the lift truck can be manually lifted.
- Automatic lift trucks are also available.
- the fork height adjustment mechanism usually includes a vertical fork mount, and an adjustment hand wheel and sprocket chain drive assembly mounted on the fork mount, and the fork mount is used to mount the fork A sprocket chain transmission component is arranged between the adjusting hand wheel and the fork. Adjust the height of the fork on the fork mount by adjusting the handwheel and sprocket chain drive assembly.
- the fork height adjusting mechanism When adopting an automatic lift truck, the fork height adjusting mechanism usually comprises a vertical fork mounting bracket, a sprocket chain transmission component and a driving motor, the fork mounting bracket is used for installing the fork, and the driving motor is arranged between the fork and the fork. Sprocket chain drive assembly. The height adjustment of the fork on the fork mounting bracket is achieved by driving the motor and the sprocket chain drive assembly.
- the bottom of the body of the lift truck is usually provided with a universal wheel, which can be adjusted by manual pushing or dragging the fork mounting bracket to realize the transfer of the target, and the position of the vehicle body can be realized by an automatic driving mechanism. Automatic adjustment to achieve automatic rotation of the target.
- any lift truck having the function of adjusting the height of the fork can be applied to the present case.
- the locking mechanism 4 can be obtained by using a welding jig.
- the embodiment shown in the drawings provides an exemplary clamp structure, as shown in Figure 3, which is a simple manual clamp comprising a clamping arm 17, a handle 18, a base 19, a ram 20 and a connecting rod, a clamp
- Both the tension arm 17 and the handle 18 have two mounting portions
- the pressing head 20 is mounted at one end of the clamping arm 17, and the other end of the clamping arm 17 is provided with two mounting portions, one of which is rotated with the top of the base 19.
- the other mounting portion is rotatably coupled to one of the mounting portions of the handle 18.
- the other mounting portion of the handle 18 is rotatably coupled to one end of the connecting rod, and the other end of the connecting rod is rotatably coupled to the top of the base 19, the clamping arm 17 and the connecting rod are mounted on the base 19 at the same height, and there is a escape groove 21 between the two mounting positions.
- the lower end of the indenter 20 has a rubber structure, and the upper end is a screw portion.
- the end of the pressing arm 17 has a through hole 25 through which the screw portion passes.
- the screw portion is provided with an adjusting nut 26, and the pressing head 20 can be adjusted by the adjusting nut 26.
- the overall height is adjusted to the extent that the indenter 20 is pressed against the target.
- two adjustment nuts 26 are provided for the purpose of preventing loosening.
- the locking mechanism 4 may employ other manual or automatic clamps having a clamping function.
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- Engineering & Computer Science (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Forklifts And Lifting Vehicles (AREA)
- Fittings On The Vehicle Exterior For Carrying Loads, And Devices For Holding Or Mounting Articles (AREA)
Abstract
Description
Claims (19)
- 一种靶材搬运车,包括升降车和靶材固定装置,所述升降车包括车体(1)以及设置在所述车体(1)上的可升降的货叉(2),所述靶材固定装置设置在所述货叉(2)上,其中,所述靶材固定装置包括靶材托架机构(3)和至少一个锁紧机构(4),所述至少一个锁紧机构(4)设置在所述靶材托架机构(3)上,所述至少一个锁紧机构(4)设置成将靶材固定在所述靶材托架机构(3)上。
- 根据权利要求1所述的靶材搬运车,其中:所述靶材托架机构(3)包括安装支架(5)、支撑板(6)和托架(7),所述支撑板(6)通过所述安装支架(5)固定安装在所述货叉(2)上,所述托架(7)固定安装在所述支撑板(6)上且沿背离所述安装支架(5)的方向延伸。
- 根据权利要求2所述的靶材搬运车,其中:所述托架(7)至少为两个,且所述安装支架(5)和所述托架(7)分别固定设置在所述支撑板(6)的两侧。
- 根据权利要求2所述的靶材搬运车,其中:所述托架(7)设置有一个,且所述安装支架(5)和所述托架(7)分别固定设置在所述支撑板(6)的两侧。
- 根据权利要求1所述的靶材搬运车,其中:所述靶材托架机构(3)包括安装支架(5)、支撑板(6)和托架(7),所述支撑板(6)通过所述安装支架(5)固定安装在所述货叉(2)上,所述托架(7)可活动地安装在所述支撑板(6)上且沿背离所述安装支架(5)的方向延伸。
- 根据权利要求2-5中任一项所述的靶材搬运车,其中:所述托架(7)上具有定位槽(8),所述定位槽(8)的开口朝上。
- 根据权利要求2-6中任一项所述的靶材搬运车,其中:所述安装支架(5)包括第一板体(13)和第二板体(14),所述第一板体(13) 水平设置并与所述货叉(2)固定连接,所述第二板体(14)垂直地固定在所述第一板体(13)上,所述支撑板(6)安装在所述第二板体(14)上。
- 根据权利要求7所述的靶材搬运车,其中:所述第二板体(14)与所述第一板体(13)之间设有加强筋(15)。
- 根据权利要求2-8中任一项所述的靶材搬运车,还包括水平位置调节机构,所述水平位置调节机构包括滑块(9)和滑轨,所述滑块(9)安装在所述支撑板(6)和所述安装支架(5)中的一者上,所述滑轨安装在所述支撑板(6)和所述安装支架(5)中的另一者上,所述滑轨与所述滑块(9)滑动连接。
- 根据权利要求7或8所述的靶材搬运车,还包括水平位置调节机构,所述水平位置调节机构包括滑块(9)和滑轨,所述滑轨固定安装在所述支撑板(6)上靠近所述第二板体(14)的板面上,所述滑块(9)为两个,且对称安装在所述第二板体(14)上。
- 根据权利要求1-8中任一项所述的靶材搬运车,还包括水平位置调节机构,所述水平位置调节机构包括滑块和滑轨,所述滑块安装在所述货叉(2)和所述车体(1)中的一者上,所述滑轨安装在所述货叉(2)和所述车体(1)中的另一者上,所述滑轨与所述滑块滑动连接。
- 根据权利要求1-8中任一项所述的靶材搬运车,还包括水平位置调节机构,所述水平位置调节机构包括滑块和滑轨,所述滑块安装在所述货叉(2)和所述靶材固定装置中的一者上,所述滑轨安装在所述货叉(2)和所述靶材固定装置中的另一者上,所述滑轨与所述滑块滑动连接。
- 根据权利要求9-12中任一项所述的靶材搬运车,其中:所述水平位置调节机构还包括保护罩,所述保护罩(10)套设于所述滑轨的至少一部分上。
- 根据权利要求13所述的靶材搬运车,其中:所述保护罩(10)可伸缩地连接于所述滑块(9)与所述滑轨的端部之间。
- 根据权利要求14所述的靶材搬运车,其中:所述保护罩(10)设置有两个,且两个所述保护罩(10)的一端与所述滑块(9)固定连接,两个所述保护罩(10)的另一端分别与所述滑轨的两个端部固定连接。
- 根据权利要求9、13-15中任一项所述的靶材搬运车,还包括定位机构,所述定位机构包括定位销和配合于所述定位销的定位孔,所述定位孔分别设置在所述支撑板(6)和所述安装支架(5)上,所述定位销与所述定位孔可插接配合或相分离。
- 根据权利要求10、13-15中任一项所述的靶材搬运车,还包括定位机构,所述定位机构包括定位板(11)和定位销(12),所述第二板体(14)上设有安装孔,所述定位销(12)插接在所述安装孔内,所述定位板(11)固定在所述支撑板(6)上,所述定位板(11)上设有定位孔,所述定位销与所述定位孔可插接配合或相分离。
- 根据权利要求11、13-15中任一项所述的靶材搬运车,还包括定位机构,所述定位机构包括定位销和配合于所述定位销的定位孔,所述定位孔分别设置在所述货叉(2)和所述车体(1)上,所述定位销(12)与所述定位孔可插接配合或相分离。
- 根据权利要求12-15中任一项所述的靶材搬运车,还包括定位机构,所述定位机构包括定位销和配合于所述定位销的定位孔,所述定位孔分别设置在所述货叉(2)和所述靶材固定装置上,所述定位销与所述定位孔可插接配合或相分离。
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CN206781794U (zh) * | 2017-05-26 | 2017-12-22 | 米亚索乐装备集成(福建)有限公司 | 靶材搬运车 |
CN112140979A (zh) * | 2020-10-30 | 2020-12-29 | 吕彦明 | 一种车载式两轮车固定装置 |
CN113104086A (zh) * | 2021-04-19 | 2021-07-13 | 毛利 | 一种适用于多种口径管道的输送装置 |
CN115595547A (zh) * | 2022-10-26 | 2023-01-13 | 中国航发沈阳黎明航空发动机有限责任公司(Cn) | 一种可调节叶片自旋倾角的双联体低涡导叶eb-pvd涂覆夹具 |
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