WO2018207413A1 - X-ray generation device, x-ray inspection device, and method for detecting insulation failure in x-ray generation device - Google Patents

X-ray generation device, x-ray inspection device, and method for detecting insulation failure in x-ray generation device Download PDF

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WO2018207413A1
WO2018207413A1 PCT/JP2018/003124 JP2018003124W WO2018207413A1 WO 2018207413 A1 WO2018207413 A1 WO 2018207413A1 JP 2018003124 W JP2018003124 W JP 2018003124W WO 2018207413 A1 WO2018207413 A1 WO 2018207413A1
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target
ray
current
ray generator
cathode
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Japanese (ja)
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文太 松花
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株式会社島津製作所
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting

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  • the present invention relates to an X-ray generator, an X-ray inspection device, and an insulation failure detection method in the X-ray generator.
  • an X-ray generator used in an X-ray inspection apparatus that inspects an internal structure of an inspection object having a three-dimensional shape by using X-rays without destroying an electron beam emitted from a cathode, An X-ray is generated by colliding with a target to which a high voltage is applied.
  • FIG. 5 is a schematic diagram of such a conventional X-ray generator.
  • This X-ray generator includes an indirectly heated electron beam generator, and includes a cathode 12, a cathode heater 11 for heating the cathode 12, a grid electrode 13, and a target 14.
  • the electron beam 101 generated from the cathode 12 heated by the cathode heater 11 jumps out from the cathode 12 toward the target 14 by the tube voltage between the cathode 12 and the target 14, passes through the grid electrode 13 and collides with the target 14.
  • X-rays 102 are generated.
  • a target current A generated by electrons reaching the target 14 flows in the direction of the target 14, and an emission current B generated by electrons emitted from the cathode 12 flows from the cathode 12.
  • the grid voltage applied between the cathode 12 and the grid electrode 13 is controlled.
  • the target 14 is deteriorated based on the accumulated time during which X-rays are generated. It is known that the deterioration of the target 14 can be recognized by measuring the intensity of the X-ray because the X-ray intensity generated under a predetermined tube voltage and tube current is weakened with the deterioration. It has been. Further, the cathode 12 is also consumed with energization time. For this reason, it is known that the consumption of the cathode 12 can be recognized from the value of the grid voltage necessary for maintaining the target current A constant in a state where a predetermined tube voltage is applied (Patent Document 1). reference).
  • the energy density of the electron beam 101 that collides with the target 14 increases, and the surface of the target 14 may reach the melting point to cause damage.
  • the energy density of the electron beam 101 that collides with the target 14 increases, and the surface of the target 14 may reach the melting point to cause damage.
  • X-rays with a dose larger than the intended X-ray dose are generated, there is a possibility that X-rays may leak outside the X-ray irradiation region when the shielding performance of the X-ray irradiation region is low. There is also.
  • the present invention has been made to solve the above-described problem. Even when an insulation failure between electrodes occurs, an X-ray generator, an X-ray inspection apparatus, and An object of the present invention is to provide a method for detecting an insulation failure in an X-ray generator.
  • the invention according to claim 1 is an X-ray generator for generating X-rays by causing an electron beam emitted from a cathode to collide with a target to which a high voltage is applied. Emission generated by electrons emitted from the cathode An emission current detection unit that detects current, and a target current detection unit that detects a target current generated by electrons that have reached the target are provided.
  • the invention according to claim 2 is the invention according to claim 1, further comprising a cathode heater for heating the cathode.
  • a comparison unit that compares the emission current detected by the emission current detection unit with the target current detected by the target current detection unit is provided.
  • a warning signal for performing a warning display is generated.
  • the invention according to claim 5 stops the X-ray generation operation when the difference between the emission current and the target current compared by the comparison unit in the invention according to claim 3 exceeds a threshold value.
  • the invention described in claim 6 is an X-ray inspection apparatus including the X-ray generator according to any one of claims 1 to 5.
  • the invention according to claim 7 is an X-ray generator for generating X-rays by causing an electron beam emitted from a cathode heated by a cathode heater to collide with a target to which a high voltage is applied.
  • An insulation failure detection method for detecting an insulation failure between cathode heaters comprising: an emission current detection step for detecting an emission current generated by electrons emitted from the cathode; and a target current generated by electrons reaching the target.
  • a target current detection step to detect, an emission current detected in the emission current detection step, and a comparison step for comparing the target current detected in the target current detection step, and the emission current compared in the comparison step Difference from target current There when exceeding the threshold value, and detecting an insulation failure between the cathode and the cathode heater.
  • the fourth aspect of the present invention it is possible to easily recognize the occurrence of insulation failure between the electrodes by the warning display.
  • the fifth aspect of the present invention it is possible to stop the X-ray generation operation when an insulation failure occurs between the electrodes.
  • FIG. 1 is a schematic diagram showing an X-ray inspection apparatus diagram including an X-ray generation apparatus 41 according to the present invention together with its main control system.
  • This X-ray inspection apparatus includes an X-ray generator 41 that irradiates a workpiece W that is an object to be inspected with X-rays, and a flat that detects X-rays that have been irradiated from the X-ray generator 41 and then transmitted through the workpiece W.
  • An X-ray detector 42 such as a panel detector or an image intensifier (II), and the X-ray generator 41 and the workpiece W disposed between the X-ray detector 42 are placed.
  • a stage 43. The stage 43 is movable in the horizontal and vertical directions by the action of a stage moving mechanism 44 having a motor (not shown).
  • the X-ray generator 41, the X-ray detector 42, the stage 43, and the stage moving mechanism 44 are disposed inside a casing 40 that is configured by an X-ray shielding member.
  • This X-ray inspection apparatus includes a CPU that performs logical operations as a processor, a ROM that stores operation programs necessary for controlling the apparatus, a RAM that temporarily stores data during control, and the like.
  • the control part 30 to control is provided.
  • the control unit 30 includes a display unit 45 such as a liquid crystal display panel that displays an X-ray image detected by the X-ray detector 42, an operation unit 46 that includes a mouse, a keyboard, and the like for performing various operations. It is connected to the.
  • control unit 30 controls, as a functional configuration, an image processing unit 31 for performing image processing on the X-ray image detected by the X-ray detector 42 and displaying the image on the display unit 45, and the stage moving mechanism 44.
  • FIG. 2 is a schematic diagram of the X-ray generator 41 according to the first embodiment of the present invention.
  • the X-ray generator 41 includes an indirectly heated electron beam generator, and includes a cathode 12, a cathode heater 11 for heating the cathode 12, a grid electrode 13, and a target 14. .
  • the electron beam 101 generated from the cathode 12 heated by the cathode heater 11 jumps out from the cathode 12 toward the target 14 by the tube voltage between the cathode 12 and the target 14, passes through the grid electrode 13 and collides with the target 14.
  • X-rays 102 are generated.
  • a target current A generated by electrons reaching the target 14 flows in the direction of the target 14, and an emission current B generated by electrons emitted from the cathode 12 flows from the cathode 12.
  • the X-ray generator 41 includes a target current detector 22 for measuring the target current A and an emission current detector 23 for detecting the emission current B.
  • the X-ray generator 41 includes a first comparison unit 24 for comparing the current value of the emission current B detected by the emission current detection unit 23 with a set value, and an emission current B compared by the first comparison unit 24.
  • a grid voltage control unit 25 for controlling the grid voltage applied between the cathode 12 and the grid electrode 13 based on the difference between the emission current B and the set value of the emission current B.
  • the X-ray generator 41 includes a second comparison unit 21 that compares the current value of the target current A detected by the target current detection unit 22 with the current value of the emission current B detected by the emission current detection unit 23.
  • the second comparison unit 21 is configured such that the difference between the current value of the target current A detected by the target current detection unit 22 and the current value of the emission current B detected by the emission current detection unit 23 exceeds a preset threshold value.
  • a warning signal for warning display is generated for the control unit 30 shown in FIG.
  • the difference between the value of the emission current B and the value of the target current A is within a predetermined threshold range
  • the difference between the value of the emission current B and the value of the target current A is larger than the threshold value.
  • the threshold value described above is such that, for example, when a focus electrode (converging electrode) is disposed between the grid electrode 13 and the target 14, the target current A becomes small due to the electron beam 101 colliding with the focus electrode.
  • This phenomenon is determined in consideration of various phenomena such as a phenomenon in which the target current A increases when a discharge occurs in the electron beam 101.
  • the second comparison unit 21 detects the current value of the target current A detected by the target current detection unit 22 and the emission current detection unit 23.
  • the emission current B is compared with the current value.
  • the second comparison is performed.
  • the unit 21 generates a warning signal for displaying a warning to the control unit 30.
  • the control unit 30 that has received this warning signal causes the display unit 45 to display a warning display by the action of the warning display unit 34 shown in FIG. Further, a warning display by voice or the like is also executed as necessary. The operator recognizes this warning display and operates the operation unit 46 as necessary to stop the irradiation operation of the X-ray 102 in the X-ray generator 41. Thereby, it is possible to prevent the surface of the target 14 from being damaged and the X-ray 102 from leaking outside the X-ray irradiation region.
  • FIG. 3 is a schematic diagram of an X-ray generator 41 according to the second embodiment of the present invention.
  • symbol is attached
  • the difference between the current value of the target current A detected by the target current detector 22 and the current value of the emission current B detected by the emission current detector 23 is determined in advance.
  • the generation operation of the X-ray 102 is automatically stopped.
  • the X-ray generator 41 includes a switch 29 for turning on / off application of a high voltage to the target 14. Then, the second comparison unit 21 determines that the difference between the current value of the target current A detected by the target current detection unit 22 and the current value of the emission current B detected by the emission current detection unit 23 exceeds a preset threshold value. When this happens, a signal for turning off the switch 29 is transmitted to the switch 29.
  • FIG. 4 is a schematic diagram of an X-ray generator 41 according to the third embodiment of the present invention.
  • symbol is attached
  • the X-ray generator 41 displays the current value of the target current A detected by the target current detector 22 and the current value of the emission current B detected by the emission current detector 23.
  • a current value display unit 26 is provided.
  • the current value display unit 26 may be a dedicated display unit for displaying the current value of the target current A and the current value of the emission current B.
  • the current value of the target current A is displayed on the display unit 45 shown in FIG.
  • the current value of the emission current B may be displayed.
  • the operator checks the current value of the target current A and the current value of the emission current B displayed on the current value display unit 26, and based on the difference, It is determined whether or not the generation operation 102 should be stopped.
  • the generation operation of the X-ray 102 from the X-ray generation apparatus 41 is stopped by operating the operation unit 46 shown in FIG.

Abstract

The current value of a target current (A) detected by a target current detection unit (22), and the current value of an emission current (B) detected by an emission current detection unit (23) are compared with each other by a second comparison unit (21). Then, when a difference between the current value of the target current (A) detected by the target current detection unit (22), and the current value of the emission current (B) detected by the emission current detection unit (23) exceeds a predetermined threshold value, the second comparison unit (21) generates, with respect to a control unit (30), a warning signal for performing warning display.

Description

Ｘ線発生装置、Ｘ線検査装置、および、Ｘ線発生装置における絶縁不良検出方法X-ray generator, X-ray inspection apparatus, and insulation failure detection method in X-ray generator
　この発明は、Ｘ線発生装置、Ｘ線検査装置、および、Ｘ線発生装置における絶縁不良検出方法に関する。 The present invention relates to an X-ray generator, an X-ray inspection device, and an insulation failure detection method in the X-ray generator.
　例えば、Ｘ線を利用することにより立体形状を有する被検査物を破壊することなくその内部構造を検査するＸ線検査装置に使用されるＸ線発生装置は、カソードから出射された電子ビームを、高電圧を印加したターゲットに衝突させることにより、Ｘ線を発生させる構成を有する。 For example, an X-ray generator used in an X-ray inspection apparatus that inspects an internal structure of an inspection object having a three-dimensional shape by using X-rays without destroying an electron beam emitted from a cathode, An X-ray is generated by colliding with a target to which a high voltage is applied.
　図５は、このような従来のＸ線発生装置の概要図である。 FIG. 5 is a schematic diagram of such a conventional X-ray generator.
　このＸ線発生装置は、傍熱型の電子線発生部を備えたものであり、カソード１２と、このカソード１２を加熱するためのカソードヒータ１１と、グリッド電極１３と、ターゲット１４とを備える。カソードヒータ１１により加熱されたカソード１２から発生する電子ビーム１０１は、カソード１２とターゲット１４間の管電圧により、カソード１２からターゲット１４に向かって飛び出し、グリッド電極１３を通過してターゲット１４に衝突することにより、Ｘ線１０２を発生させる。このときには、ターゲット１４に到達した電子により生ずるターゲット電流Ａがターゲット１４方向に流れ、カソード１２から出射された電子により生ずるエミッション電流Ｂがカソード１２から流れる。このエミッション電流Ｂを測定することにより、カソード１２とグリッド電極１３間に印加されるグリッド電圧が制御される。 This X-ray generator includes an indirectly heated electron beam generator, and includes a cathode 12, a cathode heater 11 for heating the cathode 12, a grid electrode 13, and a target 14. The electron beam 101 generated from the cathode 12 heated by the cathode heater 11 jumps out from the cathode 12 toward the target 14 by the tube voltage between the cathode 12 and the target 14, passes through the grid electrode 13 and collides with the target 14. As a result, X-rays 102 are generated. At this time, a target current A generated by electrons reaching the target 14 flows in the direction of the target 14, and an emission current B generated by electrons emitted from the cathode 12 flows from the cathode 12. By measuring this emission current B, the grid voltage applied between the cathode 12 and the grid electrode 13 is controlled.
　このようなＸ線発生装置においては、Ｘ線を発生させた累積時間に基づいてターゲット１４が劣化する。この劣化に伴って所定の管電圧および管電流のもとで発生するＸ線強さが弱くなることから、このＸ線の強さを測定することでターゲット１４の劣化を認識し得ることが知られている。また、カソード１２も通電時間に伴って消耗する。このため、所定の管電圧を印加した状態において、ターゲット電流Ａを一定に維持するために必要となるグリッド電圧の値から、カソード１２の消耗を認識し得ることが知られている（特許文献１参照）。 In such an X-ray generator, the target 14 is deteriorated based on the accumulated time during which X-rays are generated. It is known that the deterioration of the target 14 can be recognized by measuring the intensity of the X-ray because the X-ray intensity generated under a predetermined tube voltage and tube current is weakened with the deterioration. It has been. Further, the cathode 12 is also consumed with energization time. For this reason, it is known that the consumption of the cathode 12 can be recognized from the value of the grid voltage necessary for maintaining the target current A constant in a state where a predetermined tube voltage is applied (Patent Document 1). reference).
国際公開第２００３／０９２３３６号International Publication No. 2003/092336
　例えば、Ｘ線発生装置が故障した場合においては、特許文献１に記載されたように、ターゲット１４の劣化度合いやカソード１２の消耗度合いを認識することにより、故障の原因を探求することは可能である。しかしながら、電極間の絶縁不良に起因する故障が発生した場合には、この原因を特定することができなかった。 For example, when the X-ray generator fails, as described in Patent Document 1, it is possible to search for the cause of the failure by recognizing the degree of deterioration of the target 14 and the degree of wear of the cathode 12. is there. However, when a failure has occurred due to an insulation failure between the electrodes, this cause cannot be identified.
　例えば、図５に示すような傍熱型の熱電子発生部を備えたＸ線発生装置においては、カソード１２とカソードヒータ１１の間の絶縁性が低下した場合においては、図５に示すリーク電流Ｃが発生する。このようなリーク電流Ｃが発生した場合には、グリッド電圧の制御に使用するエミッション電流Ｂが実際の値より小さなものとして認識される。このため、エミッション電流Ｂとターゲット電流Ａとの間に乖離が生じ、ターゲット電流Ａが必要以上に大きくなってしまう。 For example, in an X-ray generator having an indirectly heated thermoelectron generator as shown in FIG. 5, when the insulation between the cathode 12 and the cathode heater 11 is lowered, the leakage current shown in FIG. C is generated. When such a leakage current C occurs, it is recognized that the emission current B used for controlling the grid voltage is smaller than the actual value. For this reason, a divergence occurs between the emission current B and the target current A, and the target current A becomes larger than necessary.
　ターゲット電流Ａが大きくなると、ターゲット１４に衝突する電子ビーム１０１のエネルギー密度が高くなり、ターゲット１４の表面が融点に到達して損傷を生じる場合がある。また、意図したＸ線の線量より大きい線量のＸ線が発生することになることから、Ｘ線照射領域の遮蔽性能が低い場合等においては、Ｘ線照射領域外までＸ線が漏洩する可能性もある。 When the target current A increases, the energy density of the electron beam 101 that collides with the target 14 increases, and the surface of the target 14 may reach the melting point to cause damage. In addition, since X-rays with a dose larger than the intended X-ray dose are generated, there is a possibility that X-rays may leak outside the X-ray irradiation region when the shielding performance of the X-ray irradiation region is low. There is also.
　この発明は上記課題を解決するためになされたものであり、電極間の絶縁不良が生じた場合においても、これを容易に認識することが可能なＸ線発生装置、Ｘ線検査装置、および、Ｘ線発生装置における絶縁不良検出方法を提供することを目的とする。 The present invention has been made to solve the above-described problem. Even when an insulation failure between electrodes occurs, an X-ray generator, an X-ray inspection apparatus, and An object of the present invention is to provide a method for detecting an insulation failure in an X-ray generator.
　請求項１に記載の発明は、カソードから出射された電子ビームを、高電圧を印加したターゲットに衝突させることによりＸ線を発生させるＸ線発生装置において、前記カソードから出射された電子により生ずるエミッション電流を検出するエミッション電流検出部と、前記ターゲットに到達した電子により生ずるターゲット電流を検出するターゲット電流検出部と、を備えることを特徴とする。 The invention according to claim 1 is an X-ray generator for generating X-rays by causing an electron beam emitted from a cathode to collide with a target to which a high voltage is applied. Emission generated by electrons emitted from the cathode An emission current detection unit that detects current, and a target current detection unit that detects a target current generated by electrons that have reached the target are provided.
　請求項２に記載の発明は、請求項１に記載の発明において、前記カソードを加熱するカソードヒータを備える。 The invention according to claim 2 is the invention according to claim 1, further comprising a cathode heater for heating the cathode.
　請求項３に記載の発明は、請求項２に記載の発明において、前記エミッション電流検出部により検出したエミッション電流と、前記ターゲット電流検出部により検出したターゲット電流とを比較する比較部を備える。 According to a third aspect of the present invention, in the second aspect of the invention, a comparison unit that compares the emission current detected by the emission current detection unit with the target current detected by the target current detection unit is provided.
　請求項４に記載の発明は、請求項３に記載の発明において、前記比較部により比較したエミッション電流とターゲット電流との差異が閾値を越えた時に、警告表示を行うための警告信号を発生する。 According to a fourth aspect of the present invention, in the third aspect of the present invention, when the difference between the emission current and the target current compared by the comparison unit exceeds a threshold value, a warning signal for performing a warning display is generated. .
　請求項５に記載の発明は、請求項３に記載の発明において、前記比較部により比較したエミッション電流とターゲット電流との差異が閾値を越えた時に、Ｘ線の発生動作を停止させる。 The invention according to claim 5 stops the X-ray generation operation when the difference between the emission current and the target current compared by the comparison unit in the invention according to claim 3 exceeds a threshold value.
　請求項６に記載の発明は、請求項１から請求項５のいずれかに記載のＸ線発生装置を備えたＸ線検査装置である。 The invention described in claim 6 is an X-ray inspection apparatus including the X-ray generator according to any one of claims 1 to 5.
　請求項７に記載の発明は、カソードヒータにより加熱されたカソードから出射された電子ビームを、高電圧を印加したターゲットに衝突させることによりＸ線を発生させるＸ線発生装置において、前記カソードと前記カソードヒータ間の絶縁不良を検出するための絶縁不良検出方法であって、前記カソードから出射された電子により生ずるエミッション電流を検出するエミッション電流検出工程と、前記ターゲットに到達した電子により生ずるターゲット電流を検出するターゲット電流検出工程と、前記エミッション電流検出工程において検出したエミッション電流と、前記ターゲット電流検出工程において検出したターゲット電流を比較する比較工程と、を有し、前記比較工程において比較したエミッション電流とターゲット電流との差異が閾値を越えた時に、前記カソードと前記カソードヒータ間の絶縁不良を検出することを特徴とする。 The invention according to claim 7 is an X-ray generator for generating X-rays by causing an electron beam emitted from a cathode heated by a cathode heater to collide with a target to which a high voltage is applied. An insulation failure detection method for detecting an insulation failure between cathode heaters, comprising: an emission current detection step for detecting an emission current generated by electrons emitted from the cathode; and a target current generated by electrons reaching the target. A target current detection step to detect, an emission current detected in the emission current detection step, and a comparison step for comparing the target current detected in the target current detection step, and the emission current compared in the comparison step Difference from target current There when exceeding the threshold value, and detecting an insulation failure between the cathode and the cathode heater.
　請求項１および請求項６に記載の発明によれば、電極間の絶縁不良が生じた場合においても、エミッション電流の値とターゲット電流の値に基づいて、これを容易に認識することが可能となる。 According to the first and sixth aspects of the present invention, even when an insulation failure occurs between the electrodes, this can be easily recognized based on the value of the emission current and the value of the target current. Become.
　請求項２に記載の発明によれば、カソードとカソードヒータとの間の絶縁性が低下した場合に、これを容易に認識することが可能となる。 According to the second aspect of the present invention, when the insulation between the cathode and the cathode heater is lowered, this can be easily recognized.
　請求項３および請求項７に記載の発明によれば、エミッション電流検出部により検出したエミッション電流とターゲット電流検出部により検出したターゲット電流とを比較することにより、電極間の絶縁不良を容易に認識することが可能となる。 According to the invention of claim 3 and claim 7, by comparing the emission current detected by the emission current detector and the target current detected by the target current detector, an insulation failure between the electrodes can be easily recognized. It becomes possible to do.
　請求項４に記載の発明によれば、警告表示により、電極間の絶縁不良の発生を容易に認識することが可能となる。 According to the fourth aspect of the present invention, it is possible to easily recognize the occurrence of insulation failure between the electrodes by the warning display.
　請求項５に記載の発明によれば、電極間の絶縁不良が生じたときに、Ｘ線の発生動作を停止することが可能となる。 According to the fifth aspect of the present invention, it is possible to stop the X-ray generation operation when an insulation failure occurs between the electrodes.
この発明に係るＸ線発生装置を備えたＸ線検査装置図をその主要な制御系とともに示す概要図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the X-ray inspection apparatus figure provided with the X-ray generator concerning this invention with the main control system. この発明の第１実施形態に係るＸ線発生装置の概要図である。It is a schematic diagram of the X-ray generator concerning a 1st embodiment of this invention. この発明の第２実施形態に係るＸ線発生装置の概要図である。It is a schematic diagram of the X-ray generator which concerns on 2nd Embodiment of this invention. この発明の第３実施形態に係るＸ線発生装置の概要図である。It is a schematic diagram of the X-ray generator which concerns on 3rd Embodiment of this invention. 従来のＸ線発生装置の概要図である。It is a schematic diagram of the conventional X-ray generator.
　以下、この発明の実施の形態を図面に基づいて説明する。図１は、この発明に係るＸ線発生装置４１を備えたＸ線検査装置図をその主要な制御系とともに示す概要図である。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing an X-ray inspection apparatus diagram including an X-ray generation apparatus 41 according to the present invention together with its main control system.
　このＸ線検査装置は、被検査物であるワークＷにＸ線を照射するＸ線発生装置４１と、このＸ線発生装置４１から照射された後、ワークＷを透過したＸ線を検出するフラットパネルディテクタやイメージインテンシファイア（Ｉ．Ｉ．）等のＸ線検出器４２と、これらのＸ線発生装置４１およびＸ線検出器４２の間に配設されたワークＷを載置するためのステージ４３とを備える。このステージ４３は、図示しないモータを備えたステージ移動機構４４の作用により、水平および垂直方向に移動可能となっている。これらのＸ線発生装置４１、Ｘ線検出器４２、ステージ４３およびステージ移動機構４４は、Ｘ線遮蔽部材より構成されるケーシング４０の内部に配設されている。 This X-ray inspection apparatus includes an X-ray generator 41 that irradiates a workpiece W that is an object to be inspected with X-rays, and a flat that detects X-rays that have been irradiated from the X-ray generator 41 and then transmitted through the workpiece W. An X-ray detector 42 such as a panel detector or an image intensifier (II), and the X-ray generator 41 and the workpiece W disposed between the X-ray detector 42 are placed. A stage 43. The stage 43 is movable in the horizontal and vertical directions by the action of a stage moving mechanism 44 having a motor (not shown). The X-ray generator 41, the X-ray detector 42, the stage 43, and the stage moving mechanism 44 are disposed inside a casing 40 that is configured by an X-ray shielding member.
　このＸ線検査装置は、プロセッサーとしての論理演算を実行するＣＰＵ、装置の制御に必要な動作プログラムが格納されたＲＯＭ、制御時にデータ等が一時的にストアされるＲＡＭ等を備え、装置全体を制御する制御部３０を備える。この制御部３０は、Ｘ線検出器４２により検出したＸ線画像等を表示する液晶表示パネル等の表示部４５と、各種の操作を実行するためのマウスやキーボード等を備えた操作部４６とに接続されている。 This X-ray inspection apparatus includes a CPU that performs logical operations as a processor, a ROM that stores operation programs necessary for controlling the apparatus, a RAM that temporarily stores data during control, and the like. The control part 30 to control is provided. The control unit 30 includes a display unit 45 such as a liquid crystal display panel that displays an X-ray image detected by the X-ray detector 42, an operation unit 46 that includes a mouse, a keyboard, and the like for performing various operations. It is connected to the.
　また、この制御部３０は、機能的構成として、Ｘ線検出器４２により検出されたＸ線画像を画像処理して表示部４５に表示するための画像処理部３１と、ステージ移動機構４４を制御するための移動制御部３２と、Ｘ線発生装置４１からのＸ線照射を制御するためのＸ線制御部３３と、後述する警告表示を行うための警告表示部３４とを備える。 Further, the control unit 30 controls, as a functional configuration, an image processing unit 31 for performing image processing on the X-ray image detected by the X-ray detector 42 and displaying the image on the display unit 45, and the stage moving mechanism 44. A movement control unit 32, an X-ray control unit 33 for controlling X-ray irradiation from the X-ray generator 41, and a warning display unit 34 for performing a warning display described later.
　図２は、この発明の第１実施形態に係るＸ線発生装置４１の概要図である。 FIG. 2 is a schematic diagram of the X-ray generator 41 according to the first embodiment of the present invention.
　このＸ線発生装置４１は、傍熱型の電子線発生部を備えたものであり、カソード１２と、このカソード１２を加熱するためのカソードヒータ１１と、グリッド電極１３と、ターゲット１４とを備える。カソードヒータ１１により加熱されたカソード１２から発生する電子ビーム１０１は、カソード１２とターゲット１４間の管電圧により、カソード１２からターゲット１４に向かって飛び出し、グリッド電極１３を通過してターゲット１４に衝突することにより、Ｘ線１０２を発生させる。このときには、ターゲット１４に到達した電子により生ずるターゲット電流Ａがターゲット１４方向に流れ、カソード１２から出射された電子により生ずるエミッション電流Ｂがカソード１２から流れる。 The X-ray generator 41 includes an indirectly heated electron beam generator, and includes a cathode 12, a cathode heater 11 for heating the cathode 12, a grid electrode 13, and a target 14. . The electron beam 101 generated from the cathode 12 heated by the cathode heater 11 jumps out from the cathode 12 toward the target 14 by the tube voltage between the cathode 12 and the target 14, passes through the grid electrode 13 and collides with the target 14. As a result, X-rays 102 are generated. At this time, a target current A generated by electrons reaching the target 14 flows in the direction of the target 14, and an emission current B generated by electrons emitted from the cathode 12 flows from the cathode 12.
　また、このＸ線発生装置４１は、ターゲット電流Ａを測定するためのターゲット電流検出部２２と、エミッション電流Ｂを検出するためのエミッション電流検出部２３とを備える。また、このＸ線発生装置４１は、エミッション電流検出部２３により検出したエミッション電流Ｂの電流値を設定値と比較するための第１比較部２４と、第１比較部２４により比較したエミッション電流Ｂとエミッション電流Ｂの設定値との差異に基づいて、カソード１２とグリッド電極１３間に印加されるグリッド電圧を制御するグリッド電圧制御部２５とを備える。 The X-ray generator 41 includes a target current detector 22 for measuring the target current A and an emission current detector 23 for detecting the emission current B. The X-ray generator 41 includes a first comparison unit 24 for comparing the current value of the emission current B detected by the emission current detection unit 23 with a set value, and an emission current B compared by the first comparison unit 24. And a grid voltage control unit 25 for controlling the grid voltage applied between the cathode 12 and the grid electrode 13 based on the difference between the emission current B and the set value of the emission current B.
　さらに、このＸ線発生装置４１は、ターゲット電流検出部２２により検出したターゲット電流Ａの電流値と、エミッション電流検出部２３により検出したエミッション電流Ｂの電流値とを比較する第２比較部２１を備える。この第２比較部２１は、ターゲット電流検出部２２により検出したターゲット電流Ａの電流値と、エミッション電流検出部２３により検出したエミッション電流Ｂの電流値との差異が、予め設定した閾値を越えたときに、図１に示す制御部３０に対して、警告表示を行うための警告信号を発生する。 Further, the X-ray generator 41 includes a second comparison unit 21 that compares the current value of the target current A detected by the target current detection unit 22 with the current value of the emission current B detected by the emission current detection unit 23. Prepare. The second comparison unit 21 is configured such that the difference between the current value of the target current A detected by the target current detection unit 22 and the current value of the emission current B detected by the emission current detection unit 23 exceeds a preset threshold value. In some cases, a warning signal for warning display is generated for the control unit 30 shown in FIG.
　このような構成を有するＸ線発生装置４１においては、装置が正常に動作しているときには、エミッション電流Ｂの値とターゲット電流Ａの値との差異は、所定の閾値の範囲内となるとともに、このような構成を有するＸ線発生装置４１において、電極間の絶縁不良が生じた場合には、エミッション電流Ｂの値とターゲット電流Ａの値との差異が閾値より大きくなることが、この発明の発明者により見出された。 In the X-ray generator 41 having such a configuration, when the apparatus is operating normally, the difference between the value of the emission current B and the value of the target current A is within a predetermined threshold range, In the X-ray generator 41 having such a configuration, when an insulation failure occurs between the electrodes, the difference between the value of the emission current B and the value of the target current A is larger than the threshold value. Found by the inventor.
　ここで、上述した閾値は、例えば、グリッド電極１３とターゲット１４との間にフォーカス電極（収束電極）が配設される場合に、フォーカス電極に電子ビーム１０１が衝突することによりターゲット電流Ａが小さくなる現象や、電子ビーム１０１において放電が生じた場合に、ターゲット電流Ａが大きくなる現象等の、各種の現象を考慮して決定されるものである。 Here, the threshold value described above is such that, for example, when a focus electrode (converging electrode) is disposed between the grid electrode 13 and the target 14, the target current A becomes small due to the electron beam 101 colliding with the focus electrode. This phenomenon is determined in consideration of various phenomena such as a phenomenon in which the target current A increases when a discharge occurs in the electron beam 101.
　このため、この発明の第１実施形態に係るＸ線発生装置４１においては、第２比較部２１により、ターゲット電流検出部２２により検出したターゲット電流Ａの電流値と、エミッション電流検出部２３により検出したエミッション電流Ｂの電流値とを比較する。そして、ターゲット電流検出部２２により検出したターゲット電流Ａの電流値と、エミッション電流検出部２３により検出したエミッション電流Ｂの電流値との差異が、予め設定した閾値を越えたときに、第２比較部２１は、制御部３０に対して、警告表示を行うための警告信号を発生する。 For this reason, in the X-ray generator 41 according to the first embodiment of the present invention, the second comparison unit 21 detects the current value of the target current A detected by the target current detection unit 22 and the emission current detection unit 23. The emission current B is compared with the current value. When the difference between the current value of the target current A detected by the target current detection unit 22 and the current value of the emission current B detected by the emission current detection unit 23 exceeds a preset threshold value, the second comparison is performed. The unit 21 generates a warning signal for displaying a warning to the control unit 30.
　この警告信号を受け取った制御部３０は、図１に示す警告表示部３４の作用により、表示部４５に対して警告表示を表示させる。また、必要に応じ、音声等による警告表示も実行する。オペレータは、この警告表示を認識し、必要に応じ、操作部４６を操作してＸ線発生装置４１におけるＸ線１０２の照射動作を停止させる。これにより、ターゲット１４の表面に損傷を生じることや、Ｘ線照射領域外までＸ線１０２が漏洩することを未然に防止することが可能となる。 The control unit 30 that has received this warning signal causes the display unit 45 to display a warning display by the action of the warning display unit 34 shown in FIG. Further, a warning display by voice or the like is also executed as necessary. The operator recognizes this warning display and operates the operation unit 46 as necessary to stop the irradiation operation of the X-ray 102 in the X-ray generator 41. Thereby, it is possible to prevent the surface of the target 14 from being damaged and the X-ray 102 from leaking outside the X-ray irradiation region.
　次に、この発明の他の実施形態について説明する。図３は、この発明の第２実施形態に係るＸ線発生装置４１の概要図である。なお、上述した第１実施形態と同様の部材については、同一の符号を付して詳細な説明を省略する。 Next, another embodiment of the present invention will be described. FIG. 3 is a schematic diagram of an X-ray generator 41 according to the second embodiment of the present invention. In addition, about the member similar to 1st Embodiment mentioned above, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.
　この第２実施形態に係るＸ線発生装置４１は、ターゲット電流検出部２２により検出したターゲット電流Ａの電流値と、エミッション電流検出部２３により検出したエミッション電流Ｂの電流値との差異が、予め設定した閾値を越えたときに、Ｘ線１０２の発生動作を自動的に停止させる構成を有する。 In the X-ray generator 41 according to the second embodiment, the difference between the current value of the target current A detected by the target current detector 22 and the current value of the emission current B detected by the emission current detector 23 is determined in advance. When the set threshold value is exceeded, the generation operation of the X-ray 102 is automatically stopped.
　この第２実施形態に係るＸ線発生装置４１は、ターゲット１４への高電圧の印加をオン／オフするためのスイッチ２９を備える。そして、第２比較部２１は、ターゲット電流検出部２２により検出したターゲット電流Ａの電流値と、エミッション電流検出部２３により検出したエミッション電流Ｂの電流値との差異が、予め設定した閾値を越えたときに、スイッチ２９をオフとする為の信号をスイッチ２９に送信する。 The X-ray generator 41 according to the second embodiment includes a switch 29 for turning on / off application of a high voltage to the target 14. Then, the second comparison unit 21 determines that the difference between the current value of the target current A detected by the target current detection unit 22 and the current value of the emission current B detected by the emission current detection unit 23 exceeds a preset threshold value. When this happens, a signal for turning off the switch 29 is transmitted to the switch 29.
　このような構成を採用した場合においても、ターゲット１４の表面に損傷を生じることや、Ｘ線照射領域外までＸ線１０２が漏洩することを未然に防止することが可能となる。 Even when such a configuration is adopted, it is possible to prevent damage to the surface of the target 14 and leakage of the X-ray 102 to the outside of the X-ray irradiation region.
　次に、この発明のさらに他の実施形態について説明する。図４は、この発明の第３実施形態に係るＸ線発生装置４１の概要図である。なお、上述した第１、第２実施形態と同様の部材については、同一の符号を付して詳細な説明を省略する。 Next, still another embodiment of the present invention will be described. FIG. 4 is a schematic diagram of an X-ray generator 41 according to the third embodiment of the present invention. In addition, about the member similar to 1st, 2nd embodiment mentioned above, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.
　この第３実施形態に係るＸ線発生装置４１は、ターゲット電流検出部２２により検出したターゲット電流Ａの電流値と、エミッション電流検出部２３により検出したエミッション電流Ｂの電流値とを表示するための電流値表示部２６を備える。この電流値表示部２６は、ターゲット電流Ａの電流値とエミッション電流Ｂの電流値を表示するための専用の表示部であってもよく、図１に示す表示部４５にターゲット電流Ａの電流値とエミッション電流Ｂの電流値を表示するものであってもよい。 The X-ray generator 41 according to the third embodiment displays the current value of the target current A detected by the target current detector 22 and the current value of the emission current B detected by the emission current detector 23. A current value display unit 26 is provided. The current value display unit 26 may be a dedicated display unit for displaying the current value of the target current A and the current value of the emission current B. The current value of the target current A is displayed on the display unit 45 shown in FIG. And the current value of the emission current B may be displayed.
　この第３実施形態に係るＸ線発生装置４１においては、オペレータが電流値表示部２６に表示されたターゲット電流Ａの電流値とエミッション電流Ｂの電流値を確認し、その差に基づいてＸ線１０２の発生動作を停止すべきか否かを判断する。そして、Ｘ線１０２の発生動作を停止すべきと判断したときには、図１に示す操作部４６等を操作することにより、Ｘ線発生装置４１からのＸ線１０２の発生動作を停止させる。 In the X-ray generator 41 according to the third embodiment, the operator checks the current value of the target current A and the current value of the emission current B displayed on the current value display unit 26, and based on the difference, It is determined whether or not the generation operation 102 should be stopped. When it is determined that the generation operation of the X-ray 102 should be stopped, the generation operation of the X-ray 102 from the X-ray generation apparatus 41 is stopped by operating the operation unit 46 shown in FIG.
　このような構成を採用した場合においても、ターゲット１４の表面に損傷を生じることや、Ｘ線照射領域外までＸ線１０２が漏洩することを未然に防止することが可能となる。 Even when such a configuration is adopted, it is possible to prevent damage to the surface of the target 14 and leakage of the X-ray 102 to the outside of the X-ray irradiation region.
　１１　　　カソードヒータ
　１２　　　カソード
　１３　　　グリッド電極
　１４　　　ターゲット
　２１　　　第２比較部
　２２　　　ターゲット電流検出部
　２３　　　エミッション電流検出部
　２４　　　第１比較部
　２５　　　グリッド電圧制御部
　２６　　　電流値表示部
　２９　　　スイッチ
　３０　　　制御部
　３１　　　画像処理部
　３２　　　移動制御部
　３３　　　Ｘ線制御部
　３４　　　警告表示部
　４０　　　ケーシング
　４１　　　Ｘ線発生装置
　４２　　　Ｘ線検出器
　４３　　　ステージ
　４４　　　ステージ移動機構
　４５　　　表示部
　４６　　　操作部
　１０１　　電子ビーム
　１０２　　Ｘ線
　Ａ　　　　ターゲット電流
　Ｂ　　　　エミッション電流
　Ｗ　　　　ワーク DESCRIPTION OF SYMBOLS 11 Cathode heater 12 Cathode 13 Grid electrode 14 Target 21 2nd comparison part 22 Target current detection part 23 Emission current detection part 24 1st comparison part 25 Grid voltage control part 26 Current value display part 29 Switch 30 Control part 31 Image processing part 32 Movement control unit 33 X-ray control unit 34 Warning display unit 40 Casing 41 X-ray generator 42 X-ray detector 43 Stage 44 Stage moving mechanism 45 Display unit 46 Operation unit 101 Electron beam 102 X-ray A Target current B Emission current W Workpiece

Claims (7)

  1. 　カソードから出射された電子ビームを、高電圧を印加したターゲットに衝突させることによりＸ線を発生させるＸ線発生装置において、
    　前記カソードから出射された電子により生ずるエミッション電流を検出するエミッション電流検出部と、
    　前記ターゲットに到達した電子により生ずるターゲット電流を検出するターゲット電流検出部と、
    　を備えることを特徴とするＸ線発生装置。     In an X-ray generator for generating X-rays by causing an electron beam emitted from a cathode to collide with a target to which a high voltage is applied,
    An emission current detector for detecting an emission current generated by electrons emitted from the cathode;
    A target current detection unit for detecting a target current generated by electrons reaching the target;
    An X-ray generator comprising:
  2. 　請求項１に記載のＸ線発生装置において、
    　前記カソードを加熱するカソードヒータを備えるＸ線発生装置。     The X-ray generator according to claim 1,
    An X-ray generator provided with a cathode heater for heating the cathode.
  3. 　請求項２に記載のＸ線発生装置において、
    　前記エミッション電流検出部により検出したエミッション電流と、前記ターゲット電流検出部により検出したターゲット電流とを比較する比較部を備えるＸ線発生装置。     The X-ray generator according to claim 2,
    An X-ray generator comprising a comparison unit that compares an emission current detected by the emission current detection unit with a target current detected by the target current detection unit.
  4. 　請求項３に記載のＸ線発生装置において、
    　前記比較部により比較したエミッション電流とターゲット電流との差異が閾値を越えた時に、警告表示を行うための警告信号を発生するＸ線発生装置。     The X-ray generator according to claim 3,
    An X-ray generator that generates a warning signal for displaying a warning when a difference between an emission current and a target current compared by the comparison unit exceeds a threshold value.
  5. 　請求項３に記載のＸ線発生装置において、
    　前記比較部により比較したエミッション電流とターゲット電流との差異が閾値を越えた時に、Ｘ線の発生動作を停止させるＸ線発生装置。     The X-ray generator according to claim 3,
    An X-ray generator that stops an X-ray generation operation when a difference between an emission current and a target current compared by the comparison unit exceeds a threshold value.
  6. 　請求項１から請求項５のいずれかに記載のＸ線発生装置を備えたＸ線検査装置。 An X-ray inspection apparatus comprising the X-ray generator according to any one of claims 1 to 5.
  7. 　カソードヒータにより加熱されたカソードから出射された電子ビームを、高電圧を印加したターゲットに衝突させることによりＸ線を発生させるＸ線発生装置において、前記カソードと前記カソードヒータ間の絶縁不良を検出するための絶縁不良検出方法であって、
    　前記カソードから出射された電子により生ずるエミッション電流を検出するエミッション電流検出工程と、
    　前記ターゲットに到達した電子により生ずるターゲット電流を検出するターゲット電流検出工程と、
    　前記エミッション電流検出工程において検出したエミッション電流と、前記ターゲット電流検出工程において検出したターゲット電流を比較する比較工程と、を有し、
    　前記比較工程において比較したエミッション電流とターゲット電流との差異が閾値を越えた時に、前記カソードと前記カソードヒータ間の絶縁不良を検出することを特徴とするＸ線発生装置における絶縁不良検出方法。     In an X-ray generator for generating X-rays by causing an electron beam emitted from a cathode heated by a cathode heater to collide with a target to which a high voltage is applied, an insulation failure between the cathode and the cathode heater is detected. An insulation failure detection method for
    An emission current detection step of detecting an emission current generated by electrons emitted from the cathode;
    A target current detection step of detecting a target current generated by electrons reaching the target;
    A comparison step of comparing the emission current detected in the emission current detection step and the target current detected in the target current detection step;
    An insulation failure detection method in an X-ray generator, wherein an insulation failure between the cathode and the cathode heater is detected when a difference between the emission current and the target current compared in the comparison step exceeds a threshold value.
PCT/JP2018/003124 2017-05-10 2018-01-31 X-ray generation device, x-ray inspection device, and method for detecting insulation failure in x-ray generation device WO2018207413A1 (en)

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Citations (5)

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JP2004296242A (en) * 2003-03-26 2004-10-21 Shimadzu Corp X-ray high voltage apparatus
JP2007042516A (en) * 2005-08-04 2007-02-15 Hamamatsu Photonics Kk X ray generation device
JP2007242287A (en) * 2006-03-06 2007-09-20 Nagoya Electric Works Co Ltd Diagnostic equipment and diagnostic method for x-ray output device
JP2017041350A (en) * 2015-08-19 2017-02-23 株式会社イシダ X-ray generation device and x-ray inspection device
JP2018032561A (en) * 2016-08-25 2018-03-01 株式会社ジョブ X-ray apparatus and method of controlling x-ray apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004296242A (en) * 2003-03-26 2004-10-21 Shimadzu Corp X-ray high voltage apparatus
JP2007042516A (en) * 2005-08-04 2007-02-15 Hamamatsu Photonics Kk X ray generation device
JP2007242287A (en) * 2006-03-06 2007-09-20 Nagoya Electric Works Co Ltd Diagnostic equipment and diagnostic method for x-ray output device
JP2017041350A (en) * 2015-08-19 2017-02-23 株式会社イシダ X-ray generation device and x-ray inspection device
JP2018032561A (en) * 2016-08-25 2018-03-01 株式会社ジョブ X-ray apparatus and method of controlling x-ray apparatus

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