WO2018120335A1 - 一种绝对式电容角位移测量传感器 - Google Patents

一种绝对式电容角位移测量传感器 Download PDF

Info

Publication number
WO2018120335A1
WO2018120335A1 PCT/CN2017/071350 CN2017071350W WO2018120335A1 WO 2018120335 A1 WO2018120335 A1 WO 2018120335A1 CN 2017071350 W CN2017071350 W CN 2017071350W WO 2018120335 A1 WO2018120335 A1 WO 2018120335A1
Authority
WO
WIPO (PCT)
Prior art keywords
measurement
fine
coarse
electrode
angular displacement
Prior art date
Application number
PCT/CN2017/071350
Other languages
English (en)
French (fr)
Inventor
张嵘
周斌
侯波
宋明亮
林志辉
Original Assignee
清华大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 清华大学 filed Critical 清华大学
Publication of WO2018120335A1 publication Critical patent/WO2018120335A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap

Definitions

  • the invention relates to an angular displacement sensor, in particular to an absolute capacitance angular displacement measuring sensor, belonging to the field of angular displacement sensors.
  • the angular displacement sensor is a displacement sensor that converts physical quantities such as rotational angular position and angular displacement into electrical signals. It is a sensor used to detect angle, velocity, length, displacement and acceleration in the field of automation. Its application is large to CNC machine tools and robots.
  • the position detection and transmission speed control of packaging machinery, printing machinery, elevators, factory automation related equipment, and the measurement and control of the amount of rotation of office automation equipment such as disks and printers have become an indispensable part of various fields.
  • optical encoders and magnetic encoders can be classified. Among them, optical rotary encoders are used more, magnetic encoders are second, and existing angular displacement measurements are available.
  • the sensor has high precision, but it has the disadvantages of large volume, complicated processing, high cost, harsh environment requirements and poor dynamic characteristics.
  • the magnetic encoder is complicated to process, high in cost, heavy in weight and sensitive to electromagnetic environment.
  • the lower capacitive angular displacement sensor has high stability and can be used for non-contact measurement, dynamic response and adapt to harsh environments. It has been recognized by more and more people as the most promising sensor.
  • an object of the present invention is to provide an absolute capacitance angular displacement measuring sensor with high precision, high sensitivity, high adaptability and low cost.
  • an absolute capacitance angular displacement measuring sensor wherein the angular displacement measuring sensor comprises a sensitive structure, a signal modulation and demodulation circuit, an error compensation and fusion module, and a power module;
  • the sensitive structure includes a stator and a rotor, the stator includes a first stator and a second stator, the first stator, the rotor and the second stator are sequentially disposed in parallel in a longitudinal direction;
  • the first stator includes a precision measuring electrode Qualifying the excitation electrode and the first charge amplifier, the first stator is fixedly disposed on the bottom of the first stator, and the fine measurement acquisition electrode is disposed outside the first stator top, the first stator top
  • the fine excitation electrode is disposed on the inner side;
  • the rotor includes a precision sensing electrode, a precision coupling electrode, and a coarse electrode Detecting a sensitive electrode and a coarse measuring coupling electrode, the rotor is fixedly connected to the moving member through
  • the capacitance signal, the fine measurement/and the coarse capacitance measurement signal are obtained through the corresponding charge amplifier and the fine measurement/and coarse measurement angle modulation module to obtain the fine measurement/and coarse measurement orthogonal rotation signal, and then the fine measurement/and coarse measurement rotation
  • the demodulation module solves the refined/and coarse angular displacement; the error compensation and fusion module is used for error compensation of the fine angular displacement and the coarse angular displacement, and the compensated fine angular displacement and coarse angle
  • the displacement is calculated by the absolute displacement; the power module is used for each part Power supply.
  • the angular displacement measuring sensor comprises a sensitive structure, a signal modulation and demodulation circuit, an error compensation and fusion module and a power module;
  • the sensitive structure comprises a stator and a rotor, and the The stator and the rotor are arranged in parallel;
  • the stator comprises a fine measuring collecting electrode, an excitation electrode, a rough measuring collecting electrode and a charge amplifier, wherein the charge amplifier is fixedly arranged on the bottom of the stator, and the top of the stator is arranged in order from the outside to the inside.
  • the rotor comprises a fine sensing sensitive electrode, a coupling electrode and a coarse sensing sensitive electrode; the bottom of the rotor is arranged with the fine sensing sensitive electrode, the coupling electrode and the thick from the outside to the inside Sensing the sensitive electrode, the rotor is fixedly connected to the moving piece through the main shaft; the fine measuring collecting electrode and the fine measuring sensitive electrode are facing each other to form a fine measuring capacitance, and the excitation electrode and the coupling electrode are facing each other to form a coupling capacitance, and the rough measuring The collecting electrode and the rough sensing sensitive electrode are facing each other to form a rough measuring capacitance; the signal modulation and demodulation circuit includes a measurement/and coarse measurement cyclone demodulation module and a fine measurement/and coarse measurement rotation angle signal modulation module, wherein the fine measurement/and coarse measurement cyclone demodulation module processes the output carrier signal to the excitation electrode and Acting on the coupling electrode by a coup
  • the measurement/and coarse measurement and demodulation module are solved to obtain the fine measurement/and coarse measurement angular displacement; the error compensation and fusion module is used for error compensation of the precision angular displacement and the coarse angular displacement, and the compensated fine
  • the angular displacement and the coarse angular displacement are calculated by the absolute displacement; the power module is used to supply power to each component.
  • the signal modulation and demodulation circuit further includes a fine measurement carrier signal conditioning module and a coarse measurement carrier signal conditioning module; the fine measurement carrier signal conditioning module is configured to output a carrier signal to the fine measurement and demodulation module Performing conditioning; the coarse measurement carrier signal conditioning module is configured to perform conditioning on a carrier signal output by the coarse measurement and demodulation module.
  • the fine sensing sensitive electrode is a function And function a ring-shaped petal structure region, wherein R represents a polar circle radius of the petal-like precision sensing electrode, ⁇ represents a half of the width of the fine sensing electrode, and N represents a sine included in the precision sensing electrode
  • R represents a polar circle radius of the petal-like precision sensing electrode
  • ⁇ represents a half of the width of the fine sensing electrode
  • N represents a sine included in the precision sensing electrode
  • the number of cycles Denoting a mechanical rotation angle of the rotor and the stator; dividing the oppositely-shaped fine measuring acquisition electrode into a sector-shaped region at intervals of 90° in a sinusoidal period of the precision sensing electrode, and dividing into a sector within a sinusoidal period
  • the four sectoral regions are denoted as S 0 , S 90 , S 180 and S 270 , respectively, and the four sector regions are divided into eight sector regions by the inner and outer circles of radius R, respectively:
  • ⁇ represents the measured output angle and has a relationship:
  • the outer region connecting the region S 0 S 180, S 90 are connected in the region outside the region S 270, S 180 in the region outside the connection area S 0 and the area S 90 S 270 connected to an outer area of the obtained fine sensing electrodes and sensitive Fine
  • the four facing areas of the facing area of the collecting electrode that vary with the angle of rotation are expressed as:
  • A represents the DC component of the facing area
  • B represents the amplitude determined by the parameters R, ⁇ ; and the four facing regions formed by the fine sensing sensitive electrode and the fine measuring collecting electrode in each sinusoidal period are respectively connected:
  • a multi-stage capacitor formed by four facing regions within one sinusoidal period is denoted as C 1 , C 2 , C 3 and C 4 , respectively, and a multi-stage capacitor C 1 of N sinusoidal periods in the precision sensing electrode C 2 , C 3 and C 4 are connected to obtain four precision measurement capacitor signals C N1 , C N2 , C N3 and C N4 .
  • the four-way precision capacitance signal is obtained by the corresponding charge amplifier and the fine-precision cyclode demodulation module to obtain two-way precision orthogonal transformation signals, and then the calculated angular displacement is calculated.
  • the specific process is: four-way precision measurement.
  • the four precision measured charge signals obtained by the capacitor signal passing through the corresponding charge amplifier are respectively expressed as:
  • w represents the frequency at which the fine-tuning resolver demodulation module outputs a sinusoidal excitation signal
  • sin(wt) represents a carrier signal acting on the fine excitation electrode
  • d represents a spacing between the stator and the rotor
  • the road fine charge signal is obtained by the fine angle signal modulation module to obtain two precision orthogonal polarization signals, which are respectively represented as:
  • the obtained two-way fine orthogonal vibration signal is solved by the fine-precision cyclode demodulation module to obtain the refined angular displacement ⁇ fine .
  • the change of the rotation angle of the stator and the rotor is converted into two coarse-orthogonal orthogonal rotation signals by the coarse measurement capacitance, the corresponding charge amplifier, and the coarse-measurement demodulation module, thereby calculating the coarse angular displacement.
  • the specific process is: the rough sensing sensitive electrode is an eccentric ring with an eccentricity d, and the ring-shaped coarse measuring collecting electrode is divided into a sector-shaped area every 90°, and the four sector-shaped areas are further divided by a circle with a radius of R.
  • the four pairs of positive facing areas of the coarse sensing sensitive electrode and the coarse measuring collecting electrode vary with the rotation angle; the multi-level capacitance formed by the four facing regions in one sinusoidal period is denoted as C 5 , C 6 , C 7 respectively and C 8; corresponding to the charge amplifier coarse acquisition collected four electrodes Coarse capacitance signal into four coarse charge signals, and converts the rotational angle detected by the coarse signal conditioning module two orthogonal coarse resolver signal, wherein:
  • the obtained two-way coarse-measurement orthogonal rotatory signal is solved by the coarse-measurement variable-rotation demodulation module to obtain a coarse angular displacement ⁇ coarse .
  • the error compensation and fusion module includes a fine measurement/and coarse measurement error compensation module; the fine measurement/and coarse measurement error compensation module performs error compensation on the fine measurement/and coarse measurement angular displacement, and the compensated precision
  • the measured/and coarse angular displacement is calculated by the absolute displacement.
  • the specific process is: respectively determine the error type of the fine measurement and the coarse measurement, the error type includes the harmonic component error, the signal amplitude error and the noise error; and according to the error type,
  • the acquired data is identified by data, and the error compensation parameters of the fine measurement and the coarse measurement are calculated; the fine measurement/and the coarse angular displacement are obtained; and the compensation function is generated according to the obtained error compensation parameter and the fine measurement/and coarse measurement angular displacement.
  • the invention adopts the above technical solutions, and has the following six advantages: 1.
  • the invention realizes the displacement measurement based on the spin-on demodulation technology, and can be easier under the single excitation effect compared with the existing non-contact capacitive displacement sensor. Achieve high precision and large range measurements.
  • the invention obtains the precision angular displacement and the coarse angular displacement by two-way measurement, and then obtains absolute displacement after error correction by error compensation and fusion module, which has good sensitivity, robustness, dynamic characteristics and fault tolerance.
  • the invention realizes time division multiplexing of the signal modulation and demodulation circuit through the setting of the switch, has the advantages of simple structure, small size and low cost, and can be widely applied to the angular displacement measuring sensor.
  • Figure 1 is a schematic view of the principle of the present invention
  • FIG. 2 is a schematic structural view of Embodiment 1 of the present invention.
  • FIG. 3 is a schematic view showing an electrode distribution of a first stator in Embodiment 1 of the present invention.
  • Figure 4 is a schematic cross-sectional view of Figure 2;
  • Figure 5 is a schematic view showing the distribution of electrodes at the bottom of the rotor in Embodiment 1 of the present invention.
  • Figure 6 is a schematic view showing the distribution of electrodes at the top of the rotor in Embodiment 1 of the present invention.
  • FIG. 7 is a schematic view showing an electrode distribution of a second stator in Embodiment 1 of the present invention.
  • Figure 8 is a waveform diagram of the SIN function of the fine measurement signal or the coarse measurement signal output in the present invention.
  • Figure 9 is a waveform diagram of a COS function of the fine measurement signal or the coarse measurement signal output in the present invention.
  • Figure 10 is a waveform diagram of the fine measurement envelope signal and the coarse measurement envelope signal output by the present invention.
  • FIG. 11 is a schematic flow chart of an error compensation and fusion module in the present invention.
  • Figure 12 is a schematic diagram of an error compensation function in the present invention.
  • FIG. 13 is a schematic diagram of an angle output effect after error compensation in the present invention.
  • Figure 14 is a schematic structural view of Embodiment 2 of the present invention.
  • Figure 15 is a cross-sectional structural view of Figure 14;
  • Figure 16 is a schematic view showing the electrode distribution of the stator in the second embodiment of the present invention.
  • Figure 17 is a schematic view showing the electrode distribution of the rotor in the second embodiment of the present invention.
  • the absolute capacitance angular displacement measuring sensor of the present invention comprises a sensitive structure 1, a signal modulation and demodulation circuit 2, and an error compensation and fusion module 3.
  • the sensitive structure 1 includes a first stator 11, a rotor 12, and a second stator 13, and the annular first stator 11, the annular rotor 12, and the annular second stator 13 are the same in shape and are longitudinally arranged in parallel.
  • the first stator 11 includes a fine measurement collecting electrode 111, a fine excitation electrode 112 and a first charge amplifier (not shown); a first charge amplifier is fixedly disposed at the bottom of the first stator 11
  • An annular fine measurement collecting electrode 111 is disposed on the outer side of the top of the stator 11, and a ring-shaped fine excitation electrode 112 is disposed on the inner side of the top of the first stator 11.
  • the rotor 12 includes a precision sensing electrode 121, a precision coupling electrode 122, a coarse sensing electrode 123, and a coarse coupling electrode 124.
  • the rotor 12 is fixedly coupled to the moving member through the main shaft 125, and the rotor 12 is disposed outside the bottom of the rotor 12.
  • the petal structure fine-measures the sensitive electrode 121, and the ring-shaped precision measuring coupling electrode 122 is disposed on the inner side of the bottom of the rotor 12, and the fine-sensing sensitive electrode 121 and the fine-measuring coupling electrode 122 are equipotential bodies; an eccentric circular-shaped rough sensing sensitive electrode is disposed on the outer side of the rotor 12 123.
  • a ring-shaped coarse-coupling coupling electrode 124 is disposed on the inner side of the top of the rotor 12, and the coarse sensing-sensitive electrode 123 and the coarse-measuring coupling electrode 124 are equipotential bodies.
  • the second stator 13 includes a coarse measurement acquisition electrode 131, a coarse measurement excitation electrode 132, and a second charge amplifier (not shown); a second charge amplifier is fixedly disposed on the top of the second stator 13, and the second stator
  • the annular rough measurement acquisition electrode 131 is disposed on the outer side of the bottom of the bottom portion of the bottom of the second stator 12, and the annular rough measurement excitation electrode 132 is disposed on the inner side of the bottom of the second stator 12; the fine measurement acquisition electrode 111 and the fine measurement sensitive electrode 121 are oppositely formed to form the measurement capacitance, and the excitation electrode 112 is finely measured.
  • the precision measuring coupling electrode 122 forms a precision measuring coupling capacitor
  • the coarse measuring collecting electrode 131 and the coarse sensing sensitive electrode 123 form a rough measuring capacitance
  • the rough measuring excitation electrode 132 and the coarse measuring coupling electrode 124 form a coarse measuring coupling capacitor.
  • the signal modulation and demodulation circuit 2 includes a fine measurement and demodulation module 21, a fine carrier signal conditioning module 22, a fine angle signal modulation module 23, a coarse measurement and demodulation module 24, a coarse measurement carrier signal conditioning module 25, and a coarse
  • the rotation angle signal modulation module 26; the error compensation and fusion module 3 includes a fine measurement error compensation module 31, a coarse measurement error compensation module 32, a main processor module 33, and a power module 34.
  • the precision measurement and demodulation module 21 applies the output carrier signal to the fine measurement excitation electrode 112 via the fine measurement carrier signal conditioning module 22, and then acts on the fine measurement coupling electrode 122 through the fine measurement coupling capacitance, and the precision measurement coupling electrode 122 transmits the carrier signal. It is transmitted to the fine sensing electrode 121, and the four-way precision measuring capacitance signal is obtained by the fine measuring and measuring capacitance applied to the fine measuring collecting electrode 111 (this is not limited thereto, and can be determined according to actual needs), and the four-way fine measuring is performed.
  • the capacitor signal is converted into a four-way fine-charged charge signal by the first charge amplifier, and two precise precision orthogonally-rotated signals are obtained by the fine-angle measurement signal modulation module 23, and then refined by the fine-precision cyclode demodulation module 21 to obtain a fine measurement.
  • Angular displacement is obtained by the fine-angle measurement signal modulation module 23, and then refined by the fine-precision cyclode demodulation module 21 to obtain a fine measurement.
  • the coarse measurement and demodulation module 24 applies the output carrier signal to the coarse measurement excitation electrode 132 via the coarse measurement carrier signal conditioning module 25, and then acts on the coarse measurement coupling electrode 124 through the coarse measurement coupling capacitance, and the coarse measurement coupling electrode 124 will
  • the carrier signal is transmitted to the coarse sensing sensitive electrode 123, and the four-way coarse measuring capacitance signal is obtained by the coarse measuring capacitance applied to the coarse measuring collecting electrode 131, and the four-way coarse measuring capacitance signal is converted into four rough measured charging signals by the second charging amplifier.
  • the precision angular displacement is compensated by the fine error compensation module 31, and the coarse angular displacement is compensated by the coarse error compensation module 32.
  • the compensated fine angular displacement and the coarse lateral angular displacement are calculated by the existing fusion algorithm.
  • the absolute angular displacement is sent to the main processor module 33, which is used to power the absolute capacitive angular displacement measuring sensor of the present invention.
  • the fine sensing electrode 121 is a function And function a ring-shaped annular petal structure region, wherein R represents a polar circle radius of the petal-like precision measuring electrode 121 (ie, an inner and outer divided circle radius of the fine measuring electrode 111), and ⁇ represents a half of the width of the fine sensing electrode 121, N Representing the number of sinusoidal periods included in the precision sensing electrode 121, Representing the mechanical rotation angle of the rotor and the first stator; in a sinusoidal period of the precision sensing electrode 121, the right fine measurement collecting electrode 111 is divided into a sector area every 90° apart, and four are divided into one sinusoidal period.
  • the fan-shaped areas are denoted as S 0 , S 90 , S 180 and S 270 , respectively, and the four sector-shaped areas are further divided into eight sector-shaped areas by the inside and outside of the circle of radius R, which are respectively expressed as:
  • ⁇ represents the measured output angle and has a relationship:
  • the area S 0 is outside the connection area S 180
  • the area S 90 is outside the connection area S 270
  • the area S 180 is outside the connection area S 0
  • the area S 270 is outside the connection area S 90 (ie, the different color areas in FIG. 3)
  • the four positively-oriented regions obtained by respectively connecting the corresponding areas of the fine sensing sensitive electrode 121 and the fine measuring collecting electrode 111 with the rotation angle are respectively represented as:
  • A represents a direct current component of the facing area
  • B represents an amplitude determined by the parameters R, ⁇ ; and the four positive facing regions formed by the fine sensing sensitive electrode 121 and the fine measuring collecting electrode 111 in each sinusoidal period are respectively connected to each other:
  • the multi-stage capacitors formed by the four facing regions in one sinusoidal period are denoted as C 1 , C 2 , C 3 and C 4 , respectively, and the multi-stage capacitor C 1 of N sinusoidal periods in the sensitive electrode 121 is finely measured, C 2 , C 3 and C 4 are respectively connected to obtain four-way precision capacitance signals C N1 , C N2 , C N3 and C N4 .
  • the rotation angle change of the first stator 11 and the rotor 12 is converted into four-way fine measurement. Capacitance signal.
  • the four precision charge signals obtained after the four precision capacitance signals pass through the first charge amplifier are respectively expressed as:
  • w represents the frequency at which the precision varistor demodulation module 21 outputs the sinusoidal excitation signal
  • sin(wt) represents the carrier signal acting on the fine excitation electrode 112
  • d represents the spacing between the first stator 11 and the rotor 12.
  • the two-way fine-accurate orthogonal variable-rotation signals obtained by the four-way fine-measurement charge signal through the fine-angle measurement signal modulation module 23 are as follows:
  • the obtained two-way fine orthogonal vibration signal is solved by the precision measurement and vibration demodulation module 21 to obtain the refined angular displacement ⁇ fine .
  • the coarse sensing electrode 123 is an eccentric ring with an eccentricity d
  • the annular rough measurement collecting electrode 131 is divided into a sector by 90° intervals, and the four sector regions are further rounded by a radius R. is divided into eight fan-shaped areas inside and outside, are represented by S 'the 0, S' within 90, S 'within 180 [, S' within 270, S 'outside 0, S' 90 outer, S 'and outer 180 [S' 270 outer , the outer region S 'within 0 connection region S' 180, the region S '90 connection region S' 270, the area S '180 connector region S' 0 outside and a region S '270 connector region S' 90 outer obtained
  • the four pairs of positively facing areas of the rough sensing sensitive electrode 123 and the coarse measuring collecting electrode 131 vary with the angle of rotation; the multi-level capacitors formed by the four facing regions in one sinusoidal period are denoted as C 5 , C 6 , respectively C 7 and C 8 , at this time
  • a switch is respectively disposed on the circuit of the four-way precision measurement capacitor signal and the four-way coarse measurement capacitor signal for realizing time division multiplexing of the signal modulation and demodulation circuit 2, when measuring the precision angular displacement Turn on the switch for controlling the precision measurement capacitor signal, turn off the switch for controlling the coarse measurement capacitance signal; when measuring the coarse angle measurement displacement, turn off the switch for controlling the fine measurement capacitance signal, and turn on to control the coarse measurement capacitance Signal switch.
  • the absolute differential rotation signal and the coarse orthogonal rotation signal outputted during operation of the absolute capacitance angular displacement measuring sensor of the present invention are shown.
  • the error compensation and fusion module 3 performs error correction on the fine measurement and the coarse measurement of the angular displacement, and the specific process is as follows:
  • the error types include harmonic component error, signal amplitude error, noise error, etc.; and according to the error type, the acquired data is identified by data, and the precision measurement and coarse are calculated. Measured error compensation parameters;
  • a 0 and B 0 represent the DC component of the orthogonal string-changing signal
  • a m and B m represent the amplitude of the orthogonal string-changing signal, which is the signal amplitude error source; with It represents the sum of higher harmonics and is the source of harmonic component error
  • ⁇ e represents electrical noise and is the source of noise.
  • the angular displacement after demodulation in this embodiment has a regular and stable error.
  • error compensation and fusion module 3 is expressed as:
  • ⁇ R ⁇ c +(Acos(w 1 t)+Bcos(2w 1 )+Ccos(4w 1 ))
  • ⁇ R is the angular displacement after compensation
  • ⁇ c is the angular displacement before compensation
  • A, B, and C are the parameters of the compensation function
  • w 1 is the electrical cycle frequency
  • ⁇ fine and ⁇ are coarsely compensated to obtain ⁇ R fine
  • ⁇ R is thick
  • the number n of the fine angular displacement relative to the coarse angular displacement is calculated by the formula ⁇ R fine * n* ⁇ R coarse
  • the material of the sensitive structure 1 is not limited to the PCB board, but a method of sputtering metal on the glass substrate or directly etching the wire on the silicon substrate may be employed.
  • the sensitive structure 1 can be trimmed by laser to reduce the associated manufacturing accuracy.
  • This embodiment is basically the same as the structure of Embodiment 1, except that the present embodiment replaces the three-piece annular first stator 11, the annular rotor 12, and the annular second stator 13 of the same size in the first embodiment into a two-piece type.
  • the annular stator 14 and the annular rotor 15 of the same size are arranged in parallel with each other as shown in Figs. 14 to 17, and the stator 14 includes the fine measuring collecting electrode 141, the exciting electrode 142, the rough measuring collecting electrode 143 and the charge amplifier (
  • the rotor 15 includes a precision sensing electrode 151, a coupling electrode 152 and a coarse sensing electrode 153.
  • the bottom of the stator 14 is fixedly provided with a charge amplifier, and the top of the stator 14 is provided with an annular precision measuring electrode 141 from the outside to the inside.
  • the fixed connection moving piece; the fine measuring collecting electrode 141 and the fine measuring sensitive electrode 151 are opposite to form a precision measuring capacitance, and the excitation electrode 142 and the coupling electrode 152 are opposite to form a coupling capacitance, and the rough measuring is performed.
  • the collector electrode 143 and the coarse sensing electrode 153 are opposite to each other to form a coarse measurement capacitance.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

一种绝对式电容角位移测量传感器，其特征在于包括敏感结构（1）、信号调制解调电路（2）和误差补偿及融合模块（3）；敏感结构（1）包括纵向平行设置的第一定子（11）、转子（12）和第二定子（13）；第一定子（11）顶部外侧设置精测采集电极（111），第一定子（11）顶部内侧设置精测激励电极（112）；转子（12）底部外侧设置精测敏感电极（121），转子（12）底部内侧设置精测耦合电极（122），转子（12）顶部外侧设置粗测敏感电极（123），转子（12）顶部内侧设置粗测耦合电极（124），精测/和粗测敏感电极（121,123）及精测/和粗测耦合电极（122,124）为等势体；第二定子（13）底部外侧设置粗测采集电极（131），第二定子（11）底部内侧设置粗测激励电极（132）；信号调制解调电路（2）用于测量精测角位移和粗测角位移；误差补偿及融合模块（3）用于进行误差补偿后计算绝对角位移。可广泛用于角位移测量传感器中。

Description

一种绝对式电容角位移测量传感器 技术领域
本发明涉及一种角位移传感器，特别是关于一种绝对式电容角位移测量传感器，属于角位移传感器领域。
背景技术
角位移传感器是一种将旋转角位置、角位移等物理量转换为电信号的位移传感器，是自动化领域中用来检测角度、速度、长度、位移和加速度的传感器，其应用大到数控机床、机器人、包装机械、印刷机械、电梯、工厂自动化相关设备的位置检测和传输速度控制,小到磁盘和打印机等办公自动化设备的旋转量的测量和控制，已经成为各个领域不可或缺的一部分。
目前市面上已有多种旋转角位移传感器，按照检测的原理可分为光学编码器和磁性编码器等，其中，光学旋转编码器应用较多，磁性编码器次之，现有的角位移测量传感器精度较高，但是存在体积比较大、加工复杂、成本较高、对环境要求苛刻及动态特性差等缺点，如磁性编码器加工复杂、成本高、重量大且对电磁环境敏感，相比之下电容式角位移传感器稳定性较高、可以用于非接触式测量、动态响应好以及适应恶劣环境等，已经被越来越多的人认为是最有发展前途的传感器。
国内外对于电容式传感器用于测量角位移的研究很多，也已经取得很大的突破，主要集中在敏感结构的改进，常规的敏感结构是扇形分瓣式，对角位移信息的获取能力有限，灵敏度也受限于加工精度，且解调电路复杂，无法实现绝对的角位置测量，大多数的电容式角位移传感器只能用于相对测量，且动态范围有限。
发明内容
针对上述问题，本发明的目的是提供一种高精度、高灵敏度、高适应性且低成本的绝对式电容角位移测量传感器。
为实现上述目的，本发明采取以下技术方案：一种绝对式电容角位移测量传感器，其特征在于，该角位移测量传感器包括敏感结构、信号调制解调电路、误差补偿及融合模块和电源模块；所述敏感结构包括定子和转子，所述定子包括第一定子和第二定子，所述第一定子、转子和第二定子依次纵向平行设置；所述第一定子包括精测采集电极、精测激励电极和第一电荷放大器，所述第一定子底部固定设置所述第一电荷放大器，所述第一定子顶部外侧设置所述精测采集电极，所述第一定子顶部内侧设置所述精测激励电极；所述转子包括精测敏感电极、精测耦合电极、粗 测敏感电极和粗测耦合电极，所述转子通过主轴固定连接运动件，所述转子底部外侧设置所述精测敏感电极，所述转子底部内侧设置所述精测耦合电极，且所述精测敏感电极和精测耦合电极为等势体；所述转子顶部外侧设置所述粗测敏感电极，所述转子顶部内侧设置所述粗测耦合电极，且所述粗测敏感电极和粗测耦合电极为等势体；所述第二定子包括粗测采集电极、粗测激励电极和第二电荷放大器，所述第二定子顶部固定设置所述第二电荷放大器，所述第二定子底部外侧设置所述粗测采集电极，所述第二定子底部内侧设置所述粗测激励电极；所述精测采集电极和精测敏感电极正对形成精测测量电容，所述精测激励电极和精测耦合电极正对形成精测耦合电容，所述粗测采集电极和粗测敏感电极正对形成粗测测量电容，所述粗测激励电极和粗测耦合电极正对形成粗测耦合电容；所述信号调制解调电路包括精测/和粗测旋变解调模块及精测/和粗测转角信号调制模块，所述精测/和粗测旋变解调模块将输出的载波信号经处理后作用到所述精测/和粗测激励电极并通过精测/和粗测耦合电容作用到所述精测/和粗测耦合电极，所述精测/和粗测耦合电极将载波信号传递到所述精测/和粗测敏感电极，并通过精测/和粗测测量电容作用到所述精测/和粗测采集电极得到精测/和粗测电容信号，精测/和粗测电容信号通过相应电荷放大器及精测/和粗测转角信号调制模块获得精测/和粗测正交旋变信号后经所述精测/和粗测旋变解调模块解算得到精测/和粗测角位移；所述误差补偿及融合模块用于对精测角位移和粗测角位移进行误差补偿，经补偿后的精测角位移和粗测角位移通过计算得到绝对位移；所述电源模块用于为各部件进行供电。
一种绝对式电容角位移测量传感器，其特征在于，该角位移测量传感器包括敏感结构、信号调制解调电路、误差补偿及融合模块和电源模块；所述敏感结构包括定子和转子，且所述定子和转子平行设置；所述定子包括精测采集电极、激励电极、粗测采集电极和电荷放大器，所述定子底部固定设置所述电荷放大器，所述定子顶部从外到内依次设置所述精测采集电极、激励电极和粗测采集电极；所述转子包括精测敏感电极、耦合电极和粗测敏感电极；所述转子底部从外到内依次设置所述精测敏感电极、耦合电极和粗测敏感电极，所述转子通过主轴固定连接运动件；所述精测采集电极和精测敏感电极正对形成精测测量电容，所述激励电极和耦合电极正对形成耦合电容，所述粗测采集电极和粗测敏感电极正对形成粗测测量电容；所述信号调制解调电路包括精测/和粗测旋变解调模块及精测/和粗测转角信号调制模块，所述精测/和粗测旋变解调模块将输出的载波信号经处理后作用到所述激励电极并通过耦合电容作用到所述耦合电极，所述耦合电极将载波信号传递到所述精测/和粗测敏感电极，并通过精测/和粗测测量电容作用到所述精测/和粗测采集电极 得到精测/和粗测电容信号，精测/和粗测电容信号通过相应电荷放大器及精测/和粗测转角信号调制模块获得精测/和粗测正交旋变信号后经所述精测/和粗测旋变解调模块解算得到精测/和粗测角位移；所述误差补偿及融合模块用于对精测角位移和粗测角位移进行误差补偿，经补偿后的精测角位移和粗测角位移通过计算得到绝对位移；所述电源模块用于为各部件进行供电。
进一步地，所述信号调制解调电路还包括精测载波信号调理模块和粗测载波信号调理模块；所述精测载波信号调理模块用于对所述精测旋变解调模块输出的载波信号进行调理；所述粗测载波信号调理模块用于对所述粗测旋变解调模块输出的载波信号进行调理。
进一步地，所述定子与转子的转角变化通过精测测量电容转换为四路精测电容信号，具体过程为：所述精测敏感电极为函数
Figure PCTCN2017071350-appb-000001
和函数
Figure PCTCN2017071350-appb-000002
围成的环形花瓣结构区域，其中，R表示花瓣状所述精测敏感电极的极坐标圆半径，τ表示所述精测敏感电极宽度的一半，N表示所述精测敏感电极所包含的正弦周期个数，
Figure PCTCN2017071350-appb-000003
表示所述转子与定子的机械转角；在所述精测敏感电极的一个正弦周期内，每间隔90°将正对的环形所述精测采集电极分割成一扇形区域，一个正弦周期内分割成的四个扇形区域分别表示为S0、S90、S180和S270，四个扇形区域又被半径为R的圆内外分割成八个扇形区域，分别表示为：
Figure PCTCN2017071350-appb-000004
其中，θ表示测量输出角，且有关系式：
Figure PCTCN2017071350-appb-000005
将区域S0内连接区域S180外、区域S90内连接区域S270外、区域S180内连接区域S0外以及区域S270内连接区域S90外获得所述精测敏感电极和精测采集电极的正对面积随转角变化的四个正对区域分别表示为：
Figure PCTCN2017071350-appb-000006
Figure PCTCN2017071350-appb-000007
其中，A表示正对面积的直流分量，B表示由参数R、τ决定的幅度；将每一正弦周期中所述精测敏感电极和精测采集电极形成的四个正对区域相应连接得到：
Figure PCTCN2017071350-appb-000008
将一个正弦周期内的四个正对区域形成的多级电容分别表示为C1、C2、C3和C4，并将所述精测敏感电极中N个正弦周期的多级电容C1、C2、C3和C4均相应连接得到四路精测电容信号CN1、CN2、CN3和CN4。
进一步地，四路精测电容信号经相应电荷放大器和所述精测旋变解调模块得到两路精测正交旋变信号，进而解算出精测角位移，具体过程为：四路精测电容信号通过相应电荷放大器后得到的四路精测电荷信号分别表示为：
Figure PCTCN2017071350-appb-000009
其中，w表示所述精测旋变解调模块输出正弦激励信号的频率，sin(wt)表示作用于所述精测激励电极的载波信号，d表示所述定子与转子之间的间距；四路精测电荷信号通过所述精测转角信号调制模块获得两路精测正交旋变信号分别表示为：
U精sin＝Usin(wt)sin(θ)
U精cos＝Usin(wt)cos(θ)
获得的两路精测正交旋变信号通过所述精测旋变解调模块解算得到精测角位移θ精。
进一步地，所述定子与转子的转角变化通过粗测测量电容、相应电荷放大器和所述粗测旋变解调模块转换为两路粗测正交旋变信号，进而解算出粗测角位移，具体过程为：所述粗测敏感电极为偏心距为d的偏心圆环，将环形所述粗测采集电极每间隔90°分割成一扇形区域，四个扇形区域又被半径为R的圆内外分割成八个扇形区域，分别表示为S′0内、S′90内、S′180内、S′270内、S′0外、S′90外、S′180外和S′270外，将区域S′0内连接 区域S′180外、区域S′90内连接区域S′270外、区域S′180内连接区域S′0外以及区域S′270内连接区域S′90外获得所述粗测敏感电极和粗测采集电极的正对面积随转角变化的四个正对区域；将一个正弦周期内的四个正对区域形成的多级电容分别表示为C5、C6、C7和C8；相应电荷放大器将所述粗测采集电极采集到的四路粗测电容信号转换为四路粗测电荷信号，并通过所述粗测转角信号调制模块转换为两路粗测正交旋变信号，其中：
U粗sin＝Usin(wt)sin(θ)
U粗cos＝Usin(wt)cos(θ)
获得的两路粗测正交旋变信号通过所述粗测旋变解调模块解算得到粗测角位移θ粗。
进一步地，所述误差补偿及融合模块包括精测/和粗测误差补偿模块；所述精测/和粗测误差补偿模块对精测/和粗测角位移进行误差补偿，经补偿后的精测/和粗测角位移通过计算得到绝对位移，具体过程为：分别判断精测量和粗测量的误差类型，误差类型包括谐波分量误差、信号幅值误差和噪声误差；并根据误差类型，将获取的数据进行数据辩识，计算得到精测量和粗测量的误差补偿参数；获取精测/和粗测角位移；并根据获取的误差补偿参数及精测/和粗测角位移，生成补偿函数，通过补偿函数分别对精测/和粗测角位移值进行修正，得到精测/和粗测角位移的修正值；根据公式θR精≈n*θR粗计算出精测角位移相对于粗测角位移的分瓣数n；根据公式θ实＝n*θR精计算得到绝对角位移θ实。
本发明由于采取以上技术方案，其具有以下六个优点：1、本发明基于旋变解调技术实现位移的测量，相比现有的非接触式电容位移传感器，在单激励作用下可以更加容易实现高精度和大量程测量。2、发明通过两路测量获得精测角位移和粗测角位移，进而通过误差补偿及融合模块进行误差校正后获得绝对位移，具有良好的灵敏度、鲁棒性、动态特性及容错特性。3、本发明通过开关的设置实现信号调制解调电路的时分复用，结构简单且小型，成本低廉，可以广泛应用于角位移测量传感器中。
附图说明
图1是本发明的原理示意图；
图2是本发明实施例1的结构示意图；
图3是本发明实施例1中第一定子的电极分布示意图；
图4是图2的剖面结构示意图；
图5是本发明实施例1中转子底部的电极分布示意图；
图6是本发明实施例1中转子顶部的电极分布示意图；
图7是本发明实施例1中第二定子的电极分布示意图；
图8是本发明中精测量信号或粗测量信号输出的SIN函数波形图；
图9是本发明中精测量信号或粗测量信号输出的COS函数波形图；
图10是本发明输出的精测包络信号和粗测包络信号的波形图；
图11是本发明中误差补偿及融合模块的流程示意图；
图12是本发明中误差补偿函数示意图；
图13是本发明中误差补偿后的角度输出效果示意图；
图14是本发明实施例2的结构示意图；
图15是图14的剖面结构示意图；
图16是本发明实施例2中定子的电极分布示意图；
图17是本发明实施例2中转子的电极分布示意图。
具体实施方式
以下结合附图来对本发明进行详细的描绘。然而应当理解，附图的提供仅为了更好地理解本发明，它们不应该理解成对本发明的限制。在本发明的描述中，需要理解的是，术语“第一”、“第二”等仅仅是用于描述的目的，而不能理解为指示或暗示相对重要性。
实施例1：
如图1所示，本发明的绝对式电容角位移测量传感器包括敏感结构1、信号调制解调电路2和误差补偿及融合模块3。
如图2所示，敏感结构1包括第一定子11、转子12和第二定子13，且环形第一定子11、环形转子12和环形第二定子13形状大小相同且依次纵向平行设置。
如图3所示，第一定子11包括精测采集电极111、精测激励电极112和第一电荷放大器(图中未示出)；第一定子11底部固定设置第一电荷放大器，第一定子11顶部外侧设置环形精测采集电极111，第一定子11顶部内侧设置环形精测激励电极112。
如图4～6所示，转子12包括精测敏感电极121、精测耦合电极122、粗测敏感电极123和粗测耦合电极124；转子12通过主轴125固定连接运动件，转子12底部外侧设置花瓣结构精测敏感电极121，转子12底部内侧设置环形精测耦合电极122，且精测敏感电极121和精测耦合电极122为等势体；转子12顶部外侧设置偏心圆环形粗测敏感电极123，转子12顶部内侧设置环形粗测耦合电极124，且粗测敏感电极123和粗测耦合电极124为等势体。
如图7所示，第二定子13包括粗测采集电极131、粗测激励电极132和第二电荷放大器(图中未示出)；第二定子13顶部固定设置第二电荷放大器，第二定子12底部外侧设置环形粗测采集电极131，第二定子12底部内侧设置环形粗测激励电极132；精测采集电极111和精测敏感电极121正对形成精测测量电容，精测激励电极112和精测耦合电极122正对形成精测耦合电容，粗测采集电极131和粗测敏感电极123正对形成粗测测量电容，粗测激励电极132和粗测耦合电极124正对形成粗测耦合电容。
信号调制解调电路2包括精测旋变解调模块21、精测载波信号调理模块22、精测转角信号调制模块23、粗测旋变解调模块24、粗测载波信号调理模块25和粗测转角信号调制模块26；误差补偿及融合模块3包括精测误差补偿模块31、粗测误差补偿模块32、主处理器模块33和电源模块34。
精测旋变解调模块21将输出的载波信号经精测载波信号调理模块22作用到精测激励电极112后通过精测耦合电容作用到精测耦合电极122，精测耦合电极122将载波信号传递到精测敏感电极121，并通过精测测量电容作用到精测采集电极111得到四路精测电容信号(以此为例，不限于此，可以根据实际需要进行确定)，四路精测电容信号通过第一电荷放大器转换成四路精测电荷信号，并通过精测转角信号调制模块23获得两路精测正交旋变信号后经精测旋变解调模块21解算得到精测角位移。
同时，粗测旋变解调模块24将输出的载波信号经粗测载波信号调理模块25作用到粗测激励电极132后通过粗测耦合电容作用到粗测耦合电极124，粗测耦合电极124将载波信号传递到粗测敏感电极123，并通过粗测测量电容作用到粗测采集电极131得到四路粗测电容信号，四路粗测电容信号通过第二电荷放大器转换成四路粗测电荷信号，并通过粗测转角信号调制模块26获得两路粗测正交旋变信号后经粗测旋变解调模块24解算得到粗测角位移。
精测角位移通过精测误差补偿模块31进行误差补偿、粗测角位移通过粗测误差补偿模块32进行误差补偿，经过补偿后的精测角位移和粗侧角位移通过现有融合算法计算得到绝对角位移并发送到主处理器模块33中，电源模块34用于为本发明的绝对式电容角位移测量传感器进行供电。
在一个优选的实施例中，精测敏感电极121为函数
Figure PCTCN2017071350-appb-000010
Figure PCTCN2017071350-appb-000011
和函数
Figure PCTCN2017071350-appb-000012
围成的环形花瓣结构区域，其中，R表示花瓣状精测敏感电极121的极坐标圆半径(即精测采集电极111的内外分割圆半径)，τ表示精测敏感电极121宽度的一半，N表示精测敏感电极121所包含的正弦 周期个数，
Figure PCTCN2017071350-appb-000013
表示转子与第一定子的机械转角；在精测敏感电极121的一个正弦周期内，每间隔90°将正对的精测采集电极111分割成一扇形区域，一个正弦周期内分割成的四个扇形区域分别表示为S0、S90、S180和S270，四个扇形区域又被半径为R的圆内外分割成八个扇形区域，分别表示为：
Figure PCTCN2017071350-appb-000014
其中，θ表示测量输出角，且有关系式：
Figure PCTCN2017071350-appb-000015
将区域S0内连接区域S180外、区域S90内连接区域S270外、区域S180内连接区域S0外以及区域S270内连接区域S90外(即将图3中各不同颜色的区域均分别相应连接)获得精测敏感电极121和精测采集电极111的正对面积随转角变化的四个正对区域分别表示为：
Figure PCTCN2017071350-appb-000016
其中，A表示正对面积的直流分量，B表示由参数R、τ决定的幅度；将每一正弦周期中精测敏感电极121和精测采集电极111形成的四个正对区域相应连接得到：
Figure PCTCN2017071350-appb-000017
将一个正弦周期内的四个正对区域形成的多级电容分别表示为C1、C2、C3和C4，并将精测敏感电极121中N个正弦周期的多级电容C1、C2、C3和C4均相应连接得到四路精测电容信号CN1、CN2、CN3和CN4，此时，第一定子11与转子12的转角变化转换为四路精测电容信号。
在一个优选的实施例中，四路精测电容信号通过第一电荷放大器后得到的四路精测电荷信号分别表示为：
Figure PCTCN2017071350-appb-000018
其中，w表示精测旋变解调模块21输出正弦激励信号的频率，sin(wt)表示作用于精测激励电极112的载波信号，d表示第一定子11与转子12之间的间距。
如图8～9所示为四路精测电荷信号通过精测转角信号调制模块23获得的两路精测正交旋变信号，其中：
U精sin＝Usin(wt)sin(θ)
U精cos＝Usin(wt)cos(θ)
获得的两路精测正交旋变信号通过精测旋变解调模块21解算得到精测角位移θ精。
在一个优选的实施例中，粗测敏感电极123为偏心距为d的偏心圆环，将环形粗测采集电极131每间隔90°分割成一扇形区域，四个扇形区域又被半径为R的圆内外分割成八个扇形区域，分别表示为S′0内、S′90内、S′180内、S′270内、S′0外、S′90外、S′180外和S′270外，将区域S′0内连接区域S′180外、区域S′90内连接区域S′270外、区域S′180内连接区域S′0外以及区域S′270内连接区域S′90外获得粗测敏感电极123和粗测采集电极131的正对面积随转角变化的四个正对区域；将一个正弦周期内的四个正对区域形成的多级电容分别表示为C5、C6、C7和C8，此时，转子12与第二定子13的转角变化转换为四路粗测电容信号；第二电荷放大器133将粗测采集电极131采集到的四路粗测电容信号转换为四路粗测电荷信号，并通过粗测转角信号调制模块26转换为两路粗测正交旋变信号，其中：
U粗sin＝Usin(wt)sin(θ)
U粗cos＝Usin(wt)cos(θ)
获得的两路粗测正交旋变信号通过粗测旋变解调模块24解算得到粗测角位移θ粗。
在一个优选的实施例中，四路精测电容信号和四路粗测电容信号所在电路上均分别设置有一开关，用于实现信号调制解调电路2的时分复用，当测量精测角位移 时，打开用于控制精测电容信号的开关，关闭用于控制粗测电容信号的开关；当测量粗测角位移时，关闭用于控制精测电容信号的开关，打开用于控制粗测电容信号的开关。
在一个优选的实施例中，如图10所示为本发明绝对式电容角位移测量传感器工作时输出的精测正交旋变信号和粗测正交旋变信号。
如图11所示，误差补偿及融合模块3对角位移的精测量和粗测量进行误差校正，具体过程为：
1、分别判断精测量和粗测量的误差类型，误差类型包括谐波分量误差、信号幅值误差、噪声误差等；并根据误差类型，将获取的数据进行数据辩识，计算得到精测量和粗测量的误差补偿参数；
2、获取精测角位移和粗测角位移；并根据获取的误差补偿参数及精测角位移和粗测角位移，生成补偿函数，通过补偿函数分别对精测/和粗测角位移值进行修正，得到精测角位移和粗测角位移的修正值；
3、根据公式θR精≈n*θR粗计算出精测角位移相对于粗测角位移的分瓣数n；
4、根据公式θ实＝n*θR精计算得到绝对角位移θ实。
下面结合具体实施例对误差补偿及融合模块3的具体过程进行详细说明：
由于各类误差的存在，最后获得的两路正交旋变信号的正弦波和余弦波分别表示为：
Figure PCTCN2017071350-appb-000019
其中，A0和B0表示正交弦变信号的直流分量，Am和Bm表示正交弦变信号的幅值，为信号幅值误差源；
Figure PCTCN2017071350-appb-000020
和
Figure PCTCN2017071350-appb-000021
表示高次谐波之和，为谐波分量误差来源；δe表示电噪声，为噪声来源。
如图12～13所示，本实施例中解调后的角位移存在有规律且稳定的误差，对于高精度的运用需求，完成角位移测量后需针对上述的误差来源进行校正，建立三角函数模型保护，经误差补偿及融合模块3补偿后的补偿函数表示为：
θR＝θc+(Acos(w1t)+Bcos(2w1)+Ccos(4w1))
其中，θR为补偿后的角位移，θc为补偿前的角位移，A、B、C为补偿函数的参数，w1为电周期频率；θ精和θ粗经补偿后得到θR精和θR粗；由公式θR精≈n*θR粗计算出精测角位移相对于粗测角位移的分瓣数n，并通过公式θ实＝n*θR精计算得到绝对角位移θ实并发送到主处理器模块2-9中。
在一个优选的实施例中，敏感结构1的材料不仅限于PCB板，还可以采用玻璃基地在上面溅射金属测的方法或直接通过在硅基上刻蚀健线。
在一个优选的实施例中，敏感结构1可以通过激光修调来降低相关的制造精度。
实施例2：
本实施例与实施例1的结构基本相同，不同的是本实施例将实施例1中三片式大小相同的环形第一定子11、环形转子12和环形第二定子13替换成双片式大小相同的环形定子14和环形转子15，如图14～17所示，定子14和转子15平行间隔设置，定子14包括精测采集电极141、激励电极142、粗测采集电极143和电荷放大器(图中未示出)，转子15包括精测敏感电极151、耦合电极152和粗测敏感电极153；定子14底部固定设置电荷放大器，定子14顶部从外到内依次设置环形精测采集电极141、环形激励电极142和环形粗测采集电极143；转子15底部从外到内依次设置环形花瓣结构精测敏感电极151、环形耦合电极152和偏心圆环形粗测敏感电极153，转子15通过主轴154固定连接运动件；精测采集电极141和精测敏感电极151正对形成精测测量电容，激励电极142和耦合电极152正对形成耦合电容，粗测采集电极143和粗测敏感电极153正对形成粗测测量电容。
上述各实施例仅用于说明本发明，其中方法的各实施步骤等都是可以有所变化的，凡是在本发明技术方案的基础上进行的等同变换和改进，均不应排除在本发明的保护范围之外。

Claims (7)

  1. 一种绝对式电容角位移测量传感器，其特征在于，该角位移测量传感器包括敏感结构、信号调制解调电路、误差补偿及融合模块和电源模块；
    所述敏感结构包括定子和转子，所述定子包括第一定子和第二定子，所述第一定子、转子和第二定子依次纵向平行设置；
    所述第一定子包括精测采集电极、精测激励电极和第一电荷放大器，所述第一定子底部固定设置所述第一电荷放大器，所述第一定子顶部外侧设置所述精测采集电极，所述第一定子顶部内侧设置所述精测激励电极；
    所述转子包括精测敏感电极、精测耦合电极、粗测敏感电极和粗测耦合电极，所述转子通过主轴固定连接运动件，所述转子底部外侧设置所述精测敏感电极，所述转子底部内侧设置所述精测耦合电极，且所述精测敏感电极和精测耦合电极为等势体；所述转子顶部外侧设置所述粗测敏感电极，所述转子顶部内侧设置所述粗测耦合电极，且所述粗测敏感电极和粗测耦合电极为等势体；
    所述第二定子包括粗测采集电极、粗测激励电极和第二电荷放大器，所述第二定子顶部固定设置所述第二电荷放大器，所述第二定子底部外侧设置所述粗测采集电极，所述第二定子底部内侧设置所述粗测激励电极；所述精测采集电极和精测敏感电极正对形成精测测量电容，所述精测激励电极和精测耦合电极正对形成精测耦合电容，所述粗测采集电极和粗测敏感电极正对形成粗测测量电容，所述粗测激励电极和粗测耦合电极正对形成粗测耦合电容；
    所述信号调制解调电路包括精测/和粗测旋变解调模块及精测/和粗测转角信号调制模块，所述精测/和粗测旋变解调模块将输出的载波信号经处理后作用到所述精测/和粗测激励电极并通过精测/和粗测耦合电容作用到所述精测/和粗测耦合电极，所述精测/和粗测耦合电极将载波信号传递到所述精测/和粗测敏感电极，并通过精测/和粗测测量电容作用到所述精测/和粗测采集电极得到精测/和粗测电容信号，精测/和粗测电容信号通过相应电荷放大器及精测/和粗测转角信号调制模块获得精测/和粗测正交旋变信号后经所述精测/和粗测旋变解调模块解算得到精测/和粗测角位移；
    所述误差补偿及融合模块用于对精测角位移和粗测角位移进行误差补偿，经补偿后的精测角位移和粗测角位移通过计算得到绝对位移；所述电源模块用于为各部件进行供电。
  2. 一种绝对式电容角位移测量传感器，其特征在于，该角位移测量传感器包 括敏感结构、信号调制解调电路、误差补偿及融合模块和电源模块；
    所述敏感结构包括定子和转子，且所述定子和转子平行设置；
    所述定子包括精测采集电极、激励电极、粗测采集电极和电荷放大器，所述定子底部固定设置所述电荷放大器，所述定子顶部从外到内依次设置所述精测采集电极、激励电极和粗测采集电极；
    所述转子包括精测敏感电极、耦合电极和粗测敏感电极；所述转子底部从外到内依次设置所述精测敏感电极、耦合电极和粗测敏感电极，所述转子通过主轴固定连接运动件；所述精测采集电极和精测敏感电极正对形成精测测量电容，所述激励电极和耦合电极正对形成耦合电容，所述粗测采集电极和粗测敏感电极正对形成粗测测量电容；
    所述信号调制解调电路包括精测/和粗测旋变解调模块及精测/和粗测转角信号调制模块，所述精测/和粗测旋变解调模块将输出的载波信号经处理后作用到所述激励电极并通过耦合电容作用到所述耦合电极，所述耦合电极将载波信号传递到所述精测/和粗测敏感电极，并通过精测/和粗测测量电容作用到所述精测/和粗测采集电极得到精测/和粗测电容信号，精测/和粗测电容信号通过相应电荷放大器及精测/和粗测转角信号调制模块获得精测/和粗测正交旋变信号后经所述精测/和粗测旋变解调模块解算得到精测/和粗测角位移；
    所述误差补偿及融合模块用于对精测角位移和粗测角位移进行误差补偿，经补偿后的精测角位移和粗测角位移通过计算得到绝对位移；所述电源模块用于为各部件进行供电。
  3. 如权利要求1或2所述的一种绝对式电容角位移测量传感器，其特征在于，所述信号调制解调电路还包括精测载波信号调理模块和粗测载波信号调理模块；所述精测载波信号调理模块用于对所述精测旋变解调模块输出的载波信号进行调理；所述粗测载波信号调理模块用于对所述粗测旋变解调模块输出的载波信号进行调理。
  4. 如权利要求3所述的一种绝对式电容角位移测量传感器，其特征在于，所述定子与转子的转角变化通过精测/和粗测的测量电容变化进而将转角信息转换为正交测量信号，具体过程为：
    所述精测敏感电极为函数
    Figure PCTCN2017071350-appb-100001
    和函数
    Figure PCTCN2017071350-appb-100002
    Figure PCTCN2017071350-appb-100003
    围成的环形花瓣结构区域，其中，R表示花瓣状所述精测敏感电极的极坐标圆半径，τ表示所述精测敏感电极宽度的一半，N表示所述精测敏感电极所包含的正弦周期个数，
    Figure PCTCN2017071350-appb-100004
    表示所述转子与定子的机械转角；在所述精测敏感电极的 一个正弦周期内，每间隔90°将正对的环形所述精测采集电极分割成一扇形区域，一个正弦周期内分割成的四个扇形区域分别表示为S0、S90、S180和S270，四个扇形区域又被半径为R的圆内外分割成八个扇形区域，分别表示为：
    Figure PCTCN2017071350-appb-100005
    其中，θ表示测量输出角，且有关系式：
    Figure PCTCN2017071350-appb-100006
    将区域S0内连接区域S180外、区域S90内连接区域S270外、区域S180内连接区域S0外以及区域S270内连接区域S90外获得所述精测敏感电极和精测采集电极的正对面积随转角变化的四个正对区域分别表示为：
    Figure PCTCN2017071350-appb-100007
    其中，A表示正对面积的直流分量，B表示由参数R、τ决定的幅度；将每一正弦周期中所述精测敏感电极和精测采集电极形成的四个正对区域相应连接得到：
    Figure PCTCN2017071350-appb-100008
    将一个正弦周期内的四个正对区域形成的多级电容分别表示为C1、C2、C3和C4，并将所述精测敏感电极中N个正弦周期的多级电容C1、C2、C3和C4均相应连接得到四路精测电容信号CN1、CN2、CN3和CN4。
  5. 如权利要求4所述的一种绝对式电容角位移测量传感器，其特征在于，通过定子设计的激励电极，将载波信号无接触的作用到转子的耦合电极上，通过上面所述设计，在定子的采集电极上面获得经相应电荷放大器放大的四路精测电容信号，四路精测电容信号，经过精测转角信号调制模块得到两路精测正交旋变信号，旋变 解调模块配合得到的两路精测正交旋变信号和输出的载波信号解算出精测角位移，具体过程为：
    四路精测电容信号通过相应电荷放大器后得到的四路精测电荷信号分别表示为：
    Figure PCTCN2017071350-appb-100009
    其中，w表示所述精测旋变解调模块输出正弦激励信号的频率，sin(wt)表示作用于所述精测激励电极的载波信号，d表示所述定子与转子之间的间距；四路精测电荷信号通过所述精测转角信号调制模块获得两路精测正交旋变信号分别表示为：
    U精sin＝Usin(wt)sin(θ)
    U精cos＝Usin(wt)cos(θ)
    获得的两路精测正交旋变信号通过所述精测旋变解调模块解算得到精测角位移θ精。
  6. 如权利要求5所述的一种绝对式电容角位移测量传感器，其特征在于，所述定子与转子的转角变化通过粗测测量电容、相应电荷放大器和所述粗测旋变解调模块转换为两路粗测正交旋变信号，进而解算出粗测角位移，具体过程为：
    所述粗测敏感电极为偏心距为d的偏心圆环，将环形所述粗测采集电极每间隔90°分割成一扇形区域，四个扇形区域又被半径为R的圆内外分割成八个扇形区域，分别表示为S′0内、S′90内、S′180内、S′270内、S′0外、S′90外、S′180外和S′270外，将区域S′0内连接区域S′180外、区域S′90内连接区域S′270外、区域S′180内连接区域S′0外以及区域S′270内连接区域S′90外获得所述粗测敏感电极和粗测采集电极的正对面积随转角变化的四个正对区域；将一个正弦周期内的四个正对区域形成的多级电容分别表示为C5、C6、C7和C8；相应电荷放大器将所述粗测采集电极采集到的四路粗测电容信号转换为四路粗测电荷信号，并通过所述粗测转角信号调制模块转换为两路粗测正交旋变信号，其中：
    U粗sin＝Usin(wt)sin(θ)
    U粗cos＝Usin(wt)cos(θ)
    获得的两路粗测正交旋变信号通过所述粗测旋变解调模块解算得到粗测角位移θ粗。
  7. 如权利要求6所述的一种绝对式电容角位移测量传感器，其特征在于，所述误差补偿及融合模块包括精测/和粗测误差补偿模块；所述精测/和粗测误差补偿模块对精测/和粗测角位移进行误差补偿，经补偿后的精测/和粗测角位移通过计算得到绝对位移，具体过程为：
    分别判断精测量和粗测量的误差类型，误差类型包括谐波分量误差、信号幅值误差和噪声误差；并根据误差类型，将获取的数据进行数据辩识，计算得到精测量和粗测量的误差补偿参数；
    获取精测/和粗测角位移；并根据获取的误差补偿参数及精测/和粗测角位移，生成补偿函数，通过补偿函数分别对精测/和粗测角位移值进行修正，得到精测/和粗测角位移的修正值；
    根据公式θR精≈n*θR粗计算出精测角位移相对于粗测角位移的分瓣数n；
    根据公式θ实＝n*θR精计算得到绝对角位移θ实。
PCT/CN2017/071350 2016-12-26 2017-02-20 一种绝对式电容角位移测量传感器 WO2018120335A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201611215267.8A CN106643470B (zh) 2016-12-26 2016-12-26 一种绝对式电容角位移测量传感器
CN201611215267.8 2016-12-26

Publications (1)

Publication Number Publication Date
WO2018120335A1 true WO2018120335A1 (zh) 2018-07-05

Family

ID=58827058

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2017/071350 WO2018120335A1 (zh) 2016-12-26 2017-02-20 一种绝对式电容角位移测量传感器

Country Status (2)

Country Link
CN (1) CN106643470B (zh)
WO (1) WO2018120335A1 (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109297517A (zh) * 2018-11-10 2019-02-01 重庆理工大学 一种基于组合调制原理的绝对式时栅角位移传感器
DE102018220363A1 (de) * 2018-11-27 2020-05-28 Te Connectivity Germany Gmbh Winkelmesssystem zur Bestimmung eines Winkels zwischen einem Rotor und einem gegenüberliegenden Stator
DE102018220366A1 (de) * 2018-11-27 2020-05-28 Te Connectivity Germany Gmbh Winkelmesseinrichtung zur Bestimmung eines Winkels zwischen einem Rotor und einem gegenüberliegenden Stator
WO2021171138A1 (en) * 2020-02-27 2021-09-02 Netzer Precision Motion Sensors Ltd. Angular position sensor with noise compensation
CN114061513A (zh) * 2020-08-04 2022-02-18 通用技术集团国测时栅科技有限公司 基于纳米圆时栅的自标定方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109211092B (zh) * 2017-12-15 2019-06-21 重庆理工大学 一种基于交变电场的绝对式时栅角位移传感器
CN108253882A (zh) * 2018-04-10 2018-07-06 中国工程物理研究院电子工程研究所 一种微马达的角度测量装置
CN110557410B (zh) * 2018-05-30 2021-03-23 苏州维嘉科技股份有限公司 监控***和pcb板制造***
CN109631749B (zh) * 2019-01-04 2019-09-13 重庆理工大学 一种绝对式时栅角位移传感器
CN109682401A (zh) * 2019-01-28 2019-04-26 上海奥感电子科技有限公司 一种电容式绝对值编码器
CN111137838B (zh) * 2019-12-20 2022-08-30 清华大学 一种mems容栅式角位移传感器及其制造方法
CN114279315A (zh) * 2021-12-14 2022-04-05 重庆理工大学 基于级联结构的绝对式时栅角位移传感器
CN114295042B (zh) * 2021-12-30 2024-04-30 常熟理工学院 一种块状电梯抱闸间隙监测装置、方法及预警***
CN115077374A (zh) * 2022-06-30 2022-09-20 中国工程物理研究院电子工程研究所 微马达执行器驱动时绝对位置的动态检测装置及检测方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87106077A (zh) * 1986-09-02 1988-06-01 亨格斯特勒有限公司 用于对位移物进行控制和定位的电容式直线型或旋转型传感器
US5598153A (en) * 1991-12-30 1997-01-28 Brasseur; Georg Capacitive angular displacement transducer
CN1347493A (zh) * 1999-04-19 2002-05-01 内茨精密运动传感器有限公司 电容式位移编码器
CN105953721A (zh) * 2016-05-20 2016-09-21 清华大学 一种偏心电容式角位移传感器结构及其使用方法
CN106052546A (zh) * 2016-05-20 2016-10-26 清华大学 一种分瓣电容式角位移传感器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0618212A (ja) * 1992-06-30 1994-01-25 Mitsubishi Electric Corp 回転変位検出装置
JP4364711B2 (ja) * 2004-04-14 2009-11-18 シャープ株式会社 光学式エンコーダおよびそれを備えた電子機器
CN203274722U (zh) * 2013-05-20 2013-11-06 武汉华中天经光电***有限公司 一种双通道粗精组合角度测量***
EP2824426B1 (de) * 2013-07-09 2018-05-09 Leica Geosystems AG Kapazitiver Drehlagengeber

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87106077A (zh) * 1986-09-02 1988-06-01 亨格斯特勒有限公司 用于对位移物进行控制和定位的电容式直线型或旋转型传感器
US5598153A (en) * 1991-12-30 1997-01-28 Brasseur; Georg Capacitive angular displacement transducer
CN1347493A (zh) * 1999-04-19 2002-05-01 内茨精密运动传感器有限公司 电容式位移编码器
CN105953721A (zh) * 2016-05-20 2016-09-21 清华大学 一种偏心电容式角位移传感器结构及其使用方法
CN106052546A (zh) * 2016-05-20 2016-10-26 清华大学 一种分瓣电容式角位移传感器

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109297517A (zh) * 2018-11-10 2019-02-01 重庆理工大学 一种基于组合调制原理的绝对式时栅角位移传感器
CN109297517B (zh) * 2018-11-10 2024-04-30 通用技术集团国测时栅科技有限公司 一种基于组合调制原理的绝对式时栅角位移传感器
DE102018220363A1 (de) * 2018-11-27 2020-05-28 Te Connectivity Germany Gmbh Winkelmesssystem zur Bestimmung eines Winkels zwischen einem Rotor und einem gegenüberliegenden Stator
DE102018220366A1 (de) * 2018-11-27 2020-05-28 Te Connectivity Germany Gmbh Winkelmesseinrichtung zur Bestimmung eines Winkels zwischen einem Rotor und einem gegenüberliegenden Stator
WO2021171138A1 (en) * 2020-02-27 2021-09-02 Netzer Precision Motion Sensors Ltd. Angular position sensor with noise compensation
CN114061513A (zh) * 2020-08-04 2022-02-18 通用技术集团国测时栅科技有限公司 基于纳米圆时栅的自标定方法
CN114061513B (zh) * 2020-08-04 2024-03-19 通用技术集团国测时栅科技有限公司 基于纳米圆时栅的自标定方法

Also Published As

Publication number Publication date
CN106643470A (zh) 2017-05-10
CN106643470B (zh) 2019-04-23

Similar Documents

Publication Publication Date Title
WO2018120335A1 (zh) 一种绝对式电容角位移测量传感器
US6492911B1 (en) Capacitive displacement encoder
CN101939623B (zh) 旋转角度检测装置、旋转机及旋转角度检测方法
CN103403500B (zh) 旋转角度检测装置
CN103403499A (zh) 用于确定运动体的绝对位置的方法和装置
CN101521480A (zh) 一种旋转变压器信号解算方法及解算器
CN204255287U (zh) 磁性角度传感器标定和校准装置
CN102087091B (zh) 基于柱状电容传感器的主轴六自由度位移解耦测量方法
CN102506698B (zh) 一种非接触式转角转矩传感器
Hou et al. A capacitive rotary encoder with a novel sensitive electrode
CN106052546B (zh) 一种分瓣电容式角位移传感器
CN106643455B (zh) 一种电容式旋变位移传感器
CN205843685U (zh) 用于集成型工业机械传感控制的旋转编码器
CN105953721B (zh) 一种偏心电容式角位移传感器结构及其使用方法
US20170350731A1 (en) Electrostatic encoder
CN206583464U (zh) 绝对式电容编码器
Kimura et al. Resolver compatible capacitive rotary position sensor
CN108303201A (zh) 面向智能加工的多通道高带宽无线力传感器
CN109596099B (zh) 一种类旋转变压器的倾角传感器
CN108562217A (zh) 一种实时优化信噪比的电容位移传感器
CN112729100A (zh) 一种旋变式角度传感器
CN207280646U (zh) 一种适用于力矩检测的差动式电容传感器
Li et al. A new method for the measurement of low speed using a multiple-electrode capacitive sensor
CN105807086B (zh) 智能传感器
CN117168403A (zh) 一种mems电容检测结构

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17887153

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17887153

Country of ref document: EP

Kind code of ref document: A1